  67 136 194   0.100
  0.000  6.95832E-02 -3.56864E-16 -6.03684E-16 -5.12880E-16 -1.90255E-15  7.83692E-02 -4.03412E-16 -6.03684E-16 -7.13028E-16 -1.55923E-15
  0.100  6.95951E-02 -3.46272E-05 -2.18915E-08 -1.19710E-12  4.29147E-16  7.83687E-02 -4.76362E-05 -4.93626E-08 -1.04998E-11  4.57757E-16
  0.200  6.96309E-02 -1.36624E-04 -3.47459E-07 -7.80635E-11  4.14112E-13  7.83675E-02 -1.87787E-04 -7.82855E-07 -6.69794E-10 -3.21574E-14
  0.300  6.96902E-02 -3.00433E-04 -1.73553E-06 -9.16800E-10  1.03487E-11  7.83672E-02 -4.12327E-04 -3.90514E-06 -7.58870E-09 -9.46784E-13
  0.400  6.97723E-02 -5.17113E-04 -5.38242E-06 -5.35885E-09  9.99970E-11  7.83703E-02 -7.08205E-04 -1.20888E-05 -4.23136E-08 -1.14740E-11
  0.500  6.98765E-02 -7.74803E-04 -1.28232E-05 -2.14001E-08  5.70870E-10  7.83799E-02 -1.05814E-03 -2.87333E-05 -1.59791E-07 -8.33249E-11
  0.600  7.00015E-02 -1.05933E-03 -2.58013E-05 -6.71293E-08  2.32690E-09  7.83994E-02 -1.44157E-03 -5.76495E-05 -4.71089E-07 -4.32973E-10
  0.700  7.01460E-02 -1.35494E-03 -4.61128E-05 -1.77988E-07  7.48936E-09  7.84327E-02 -1.83572E-03 -1.02692E-04 -1.16949E-06 -1.77129E-09
  0.800  7.03083E-02 -1.64508E-03 -7.54358E-05 -4.16419E-07  2.02067E-08  7.84831E-02 -2.21687E-03 -1.67362E-04 -2.55740E-06 -6.04618E-09
  0.900  7.04863E-02 -1.91328E-03 -1.15154E-04 -8.83436E-07  4.74770E-08  7.85536E-02 -2.56155E-03 -2.54411E-04 -5.07088E-06 -1.78940E-08
  1.000  7.06776E-02 -2.14391E-03 -1.66182E-04 -1.73100E-06  9.96518E-08  7.86465E-02 -2.84784E-03 -3.65471E-04 -9.29787E-06 -4.71689E-08
  1.100  7.08797E-02 -2.32303E-03 -2.28817E-04 -3.17339E-06  1.90154E-07  7.87630E-02 -3.05653E-03 -5.00740E-04 -1.59862E-05 -1.12943E-07
  1.200  7.10899E-02 -2.43903E-03 -3.02600E-04 -5.49511E-06  3.33865E-07  7.89029E-02 -3.17207E-03 -6.58749E-04 -2.60368E-05 -2.49320E-07
  1.300  7.13050E-02 -2.48320E-03 -3.86235E-04 -9.05260E-06  5.43649E-07  7.90651E-02 -3.18345E-03 -8.36231E-04 -4.04789E-05 -5.13243E-07
  1.400  7.15220E-02 -2.45019E-03 -4.77543E-04 -1.42667E-05  8.24594E-07  7.92469E-02 -3.08477E-03 -1.02810E-03 -6.04240E-05 -9.94219E-07
  1.500  7.17379E-02 -2.33826E-03 -5.73472E-04 -2.16037E-05  1.16582E-06  7.94446E-02 -2.87553E-03 -1.22758E-03 -8.69979E-05 -1.82549E-06
  1.600  7.19498E-02 -2.14937E-03 -6.70171E-04 -3.15424E-05  1.53009E-06  7.96533E-02 -2.56072E-03 -1.42643E-03 -1.21250E-04 -3.19573E-06
  1.700  7.21548E-02 -1.88913E-03 -7.63125E-04 -4.45282E-05  1.84182E-06  7.98672E-02 -2.15053E-03 -1.61530E-03 -1.64047E-04 -5.35991E-06
  1.800  7.23505E-02 -1.56651E-03 -8.47349E-04 -6.09134E-05  1.97476E-06  8.00803E-02 -1.65989E-03 -1.78426E-03 -2.15951E-04 -8.64748E-06
  1.900  7.25349E-02 -1.19344E-03 -9.17644E-04 -8.08882E-05  1.74087E-06  8.02860E-02 -1.10773E-03 -1.92327E-03 -2.77095E-04 -1.34657E-05
  2.000  7.27063E-02 -7.84283E-04 -9.68900E-04 -1.04407E-04  8.82492E-07  8.04778E-02 -5.15964E-04 -2.02289E-03 -3.47063E-04 -2.02958E-05
  2.100  7.28635E-02 -3.55097E-04 -9.96427E-04 -1.31113E-04 -9.30214E-07  8.06497E-02  9.15684E-05 -2.07485E-03 -4.24792E-04 -2.96805E-05
  2.200  7.30058E-02  7.71208E-05 -9.96320E-04 -1.60280E-04 -4.09430E-06  8.07963E-02  6.90373E-04 -2.07273E-03 -5.08500E-04 -4.22000E-05
  2.300  7.31329E-02  4.95306E-04 -9.65808E-04 -1.90759E-04 -9.06000E-06  8.09130E-02  1.25659E-03 -2.01246E-03 -5.95658E-04 -5.84375E-05
  2.400  7.32447E-02  8.83229E-04 -9.03586E-04 -2.20965E-04 -1.63066E-05  8.09958E-02  1.76831E-03 -1.89289E-03 -6.83013E-04 -7.89331E-05
  2.500  7.33415E-02  1.22639E-03 -8.10091E-04 -2.48887E-04 -2.63082E-05  8.10422E-02  2.20676E-03 -1.71601E-03 -7.66678E-04 -1.04129E-04
  2.600  7.34233E-02  1.51289E-03 -6.87712E-04 -2.72143E-04 -3.94904E-05  8.10499E-02  2.55746E-03 -1.48719E-03 -8.42269E-04 -1.34306E-04
  2.700  7.34898E-02  1.73418E-03 -5.40888E-04 -2.88077E-04 -5.61805E-05  8.10177E-02  2.81113E-03 -1.21516E-03 -9.05119E-04 -1.69527E-04
  2.800  7.35403E-02  1.88575E-03 -3.76099E-04 -2.93893E-04 -7.65547E-05  8.09446E-02  2.96435E-03 -9.11705E-04 -9.50527E-04 -2.09568E-04
  2.900  7.35733E-02  1.96756E-03 -2.01719E-04 -2.86833E-04 -1.00587E-04  8.08299E-02  3.01997E-03 -5.91308E-04 -9.74061E-04 -2.53882E-04
  3.000  7.35862E-02  1.98436E-03 -2.77280E-05 -2.64379E-04 -1.28007E-04  8.06725E-02  2.98724E-03 -2.70467E-04 -9.71869E-04 -3.01557E-04
  3.100  7.35754E-02  1.94570E-03  1.34708E-04 -2.24467E-04 -1.58264E-04  8.04708E-02  2.88151E-03  3.30923E-05 -9.40993E-04 -3.51315E-04
  3.200  7.35356E-02  1.86575E-03  2.73782E-04 -1.65709E-04 -1.90519E-04  8.02222E-02  2.72365E-03  3.01346E-04 -8.79654E-04 -4.01524E-04
  3.300  7.34602E-02  1.76278E-03  3.77685E-04 -8.75849E-05 -2.23650E-04  7.99232E-02  2.53921E-03  5.16981E-04 -7.87486E-04 -4.50251E-04
  3.400  7.33411E-02  1.65848E-03  4.35317E-04  9.39322E-06 -2.56284E-04  7.95686E-02  2.35717E-03  6.64419E-04 -6.65698E-04 -4.95337E-04
  3.500  7.31689E-02  1.57697E-03  4.37009E-04  1.23580E-04 -2.86858E-04  7.91520E-02  2.20855E-03  7.30791E-04 -5.17134E-04 -5.34502E-04
  3.600  7.29328E-02  1.54365E-03  3.75224E-04  2.52163E-04 -3.13693E-04  7.86655E-02  2.12484E-03  7.06803E-04 -3.46236E-04 -5.65472E-04
  3.700  7.26212E-02  1.58391E-03  2.45181E-04  3.91207E-04 -3.35100E-04  7.80998E-02  2.13630E-03  5.87418E-04 -1.58895E-04 -5.86118E-04
  3.800  7.22217E-02  1.72177E-03  4.53428E-05  5.35789E-04 -3.49484E-04  7.74446E-02  2.27034E-03  3.72322E-04  3.78105E-05 -5.94596E-04
  3.900  7.17217E-02  1.97849E-03 -2.22256E-04  6.80208E-04 -3.55462E-04  7.66887E-02  2.54987E-03  6.61139E-05  2.35963E-04 -5.89490E-04
  4.000  7.11089E-02  2.37126E-03 -5.51894E-04  8.18269E-04 -3.51973E-04  7.58208E-02  2.99201E-03 -3.21789E-04  4.27229E-04 -5.69920E-04
  4.100  7.03714E-02  2.91208E-03 -9.34270E-04  9.43624E-04 -3.38367E-04  7.48294E-02  3.60687E-03 -7.77537E-04  6.03328E-04 -5.35636E-04
  4.200  6.94985E-02  3.60682E-03 -1.35684E-03  1.05014E-03 -3.14479E-04  7.37037E-02  4.39683E-03 -1.28350E-03  7.56511E-04 -4.87065E-04
  4.300  6.84809E-02  4.45461E-03 -1.80437E-03  1.13228E-03 -2.80667E-04  7.24343E-02  5.35612E-03 -1.81919E-03  8.80018E-04 -4.25319E-04
  4.400  6.73111E-02  5.44749E-03 -2.25967E-03  1.18544E-03 -2.37814E-04  7.10128E-02  6.47081E-03 -2.36227E-03  9.68479E-04 -3.52156E-04
  4.500  6.59837E-02  6.57053E-03 -2.70450E-03  1.20628E-03 -1.87298E-04  6.94334E-02  7.71927E-03 -2.88981E-03  1.01823E-03 -2.69899E-04
  4.600  6.44960E-02  7.80220E-03 -3.12050E-03  1.19294E-03 -1.30919E-04  6.76924E-02  9.07298E-03 -3.37950E-03  1.02751E-03 -1.81314E-04
  4.700  6.28476E-02  9.11520E-03 -3.49022E-03  1.14515E-03 -7.08020E-05  6.57890E-02  1.04977E-02 -3.81078E-03  9.96553E-04 -8.94670E-05
  4.800  6.10408E-02  1.04775E-02 -3.79806E-03  1.06430E-03 -9.27251E-06  6.37252E-02  1.19551E-02 -4.16594E-03  9.27558E-04  2.45364E-06
  4.900  5.90808E-02  1.18536E-02 -4.03109E-03  9.53372E-04  5.12816E-05  6.15063E-02  1.34040E-02 -4.43100E-03  8.24488E-04  9.13052E-05
  5.000  5.69754E-02  1.32062E-02 -4.17974E-03  8.16714E-04  1.08550E-04  5.91406E-02  1.48028E-02 -4.59633E-03  6.92819E-04  1.74162E-04
  5.100  5.47352E-02  1.44978E-02 -4.23828E-03  6.59825E-04  1.60435E-04  5.66395E-02  1.61109E-02 -4.65704E-03  5.39173E-04  2.48464E-04
  5.200  5.23730E-02  1.56921E-02 -4.20502E-03  4.89009E-04  2.05166E-04  5.40172E-02  1.72903E-02 -4.61302E-03  3.70902E-04  3.12140E-04
  5.300  4.99040E-02  1.67558E-02 -4.08233E-03  3.11004E-04  2.41389E-04  5.12908E-02  1.83075E-02 -4.46879E-03  1.95645E-04  3.63695E-04
  5.400  4.73453E-02  1.76597E-02 -3.87638E-03  1.32599E-04  2.68231E-04  4.84794E-02  1.91348E-02 -4.23302E-03  2.08914E-05  4.02252E-04
  5.500  4.47156E-02  1.83801E-02 -3.59667E-03 -3.97335E-05  2.85316E-04  4.56042E-02  1.97510E-02 -3.91785E-03 -1.46413E-04  4.27562E-04
  5.600  4.20352E-02  1.88994E-02 -3.25543E-03 -2.00173E-04  2.92766E-04  4.26878E-02  2.01421E-02 -3.53813E-03 -3.00209E-04  4.39967E-04
  5.700  3.93249E-02  1.92068E-02 -2.86681E-03 -3.43817E-04  2.91147E-04  3.97537E-02  2.03020E-02 -3.11041E-03 -4.35573E-04  4.40334E-04
  5.800  3.66062E-02  1.92986E-02 -2.44610E-03 -4.66880E-04  2.81415E-04  3.68257E-02  2.02320E-02 -2.65207E-03 -5.48889E-04  4.29963E-04
  5.900  3.39007E-02  1.91777E-02 -2.00889E-03 -5.66803E-04  2.64816E-04  3.39277E-02  1.99405E-02 -2.18034E-03 -6.37914E-04  4.10474E-04
  6.000  3.12294E-02  1.88534E-02 -1.57026E-03 -6.42282E-04  2.42795E-04  3.10825E-02  1.94421E-02 -1.71150E-03 -7.01760E-04  3.83691E-04
  6.100  2.86126E-02  1.83407E-02 -1.14410E-03 -6.93219E-04  2.16895E-04  2.83120E-02  1.87572E-02 -1.26017E-03 -7.40791E-04  3.51523E-04
  6.200  2.60694E-02  1.76594E-02 -7.42543E-04 -7.20602E-04  1.88654E-04  2.56362E-02  1.79100E-02 -8.38763E-04 -7.56458E-04  3.15854E-04
  6.300  2.36171E-02  1.68329E-02 -3.75524E-04 -7.26330E-04  1.59523E-04  2.30730E-02  1.69283E-02 -4.57100E-04 -7.51089E-04  2.78451E-04
  6.400  2.12713E-02  1.58871E-02 -5.05412E-05 -7.13012E-04  1.30794E-04  2.06378E-02  1.58412E-02 -1.22260E-04 -7.27650E-04  2.40886E-04
  6.500  1.90451E-02  1.48495E-02  2.27440E-04 -6.83737E-04  1.03551E-04  1.83432E-02  1.46786E-02  1.61442E-04 -6.89500E-04  2.04488E-04
  6.600  1.69493E-02  1.37475E-02  4.55929E-04 -6.41851E-04  7.86350E-05  1.61991E-02  1.34698E-02  3.92314E-04 -6.40159E-04  1.70311E-04
  6.700  1.49921E-02  1.26081E-02  6.34720E-04 -5.90749E-04  5.66378E-05  1.42123E-02  1.22425E-02  5.71010E-04 -5.83095E-04  1.39124E-04
  6.800  1.31790E-02  1.14565E-02  7.65606E-04 -5.33693E-04  3.79049E-05  1.23866E-02  1.10220E-02  7.00173E-04 -5.21557E-04  1.11422E-04
  6.900  1.15130E-02  1.03154E-02  8.52010E-04 -4.73662E-04  2.25587E-05  1.07231E-02  9.83034E-03  7.84016E-04 -4.58434E-04  8.74493E-05
  7.000  9.99460E-03  9.20484E-03  8.98593E-04 -4.13250E-04  1.05297E-05  9.22010E-03  8.68647E-03  8.27876E-04 -3.96172E-04  6.72339E-05
  7.100  8.62198E-03  8.14145E-03  9.10840E-04 -3.54596E-04  1.59631E-06  7.87368E-03  7.60544E-03  8.37782E-04 -3.36726E-04  5.06300E-05
  7.200  7.39126E-03  7.13849E-03  8.94669E-04 -2.99360E-04 -4.57439E-06  6.67775E-03  6.59860E-03  8.20051E-04 -2.81551E-04  3.73610E-05
  7.300  6.29674E-03  6.20580E-03  8.56084E-04 -2.48725E-04 -8.38489E-06  5.62455E-03  5.67377E-03  7.80937E-04 -2.31622E-04  2.70622E-05
  7.400  5.33125E-03  5.34998E-03  8.00871E-04 -2.03432E-04 -1.02698E-05  4.70495E-03  4.83536E-03  7.26347E-04 -1.87485E-04  1.93198E-05
  7.500  4.48647E-03  4.57457E-03  7.34369E-04 -1.63834E-04 -1.06638E-05  3.90885E-03  4.08487E-03  6.61626E-04 -1.49315E-04  1.37049E-05
  7.600  3.75323E-03  3.88051E-03  6.61301E-04 -1.29958E-04 -9.97592E-06  3.22554E-03  3.42122E-03  5.91413E-04 -1.16994E-04  9.79966E-06
  7.700  3.12187E-03  3.26642E-03  5.85672E-04 -1.01576E-04 -8.57124E-06  2.64401E-03  2.84123E-03  5.19562E-04 -9.01772E-05  7.21828E-06
  7.800  2.58247E-03  2.72915E-03  5.10727E-04 -7.82785E-05 -6.75960E-06  2.15327E-03  2.34012E-03  4.49126E-04 -6.83688E-05  5.61956E-06
  7.900  2.12518E-03  2.26410E-03  4.38958E-04 -5.95360E-05 -4.79036E-06  1.74260E-03  1.91196E-03  3.82385E-04 -5.09821E-05  4.71440E-06
  8.000  1.74041E-03  1.86571E-03  3.72148E-04 -4.47571E-05 -2.85249E-06  1.40176E-03  1.55005E-03  3.20911E-04 -3.73938E-05  4.26783E-06
  8.100  1.41901E-03  1.52779E-03  3.11451E-04 -3.33351E-05 -1.07862E-06  1.12118E-03  1.24734E-03  2.65660E-04 -2.69854E-05  4.09719E-06
  8.200  1.15241E-03  1.24389E-03  2.57479E-04 -2.46841E-05  4.48121E-07  8.92016E-04  9.96706E-04  2.17071E-04 -1.91742E-05  4.06742E-06
  8.300  9.32741E-04  1.00751E-03  2.10410E-04 -1.82639E-05  1.68569E-06  7.06286E-04  7.91221E-04  1.75177E-04 -1.34339E-05  4.08462E-06
  8.400  7.52867E-04  8.12393E-04  1.70081E-04 -1.35959E-05  2.62419E-06  5.56863E-04  6.24338E-04  1.39705E-04 -9.30600E-06  4.08877E-06
  8.500  6.06430E-04  6.52620E-04  1.36091E-04 -1.02704E-05  3.27710E-06  4.37488E-04  4.90026E-04  1.10176E-04 -6.40381E-06  4.04637E-06
  8.600  4.87837E-04  5.22765E-04  1.07877E-04 -7.94789E-06  3.67342E-06  3.42740E-04  3.82851E-04  8.59785E-05 -4.41091E-06  3.94347E-06
  8.700  3.92234E-04  4.17942E-04  8.47900E-05 -6.35536E-06  3.85087E-06  2.67991E-04  2.98012E-04  6.64441E-05 -3.07578E-06  3.77963E-06
  8.800  3.15465E-04  3.33839E-04  6.61497E-05 -5.27977E-06  3.85065E-06  2.09334E-04  2.31350E-04  5.08930E-05 -2.20415E-06  3.56280E-06
  8.900  2.54012E-04  2.66716E-04  5.12874E-05 -4.55976E-06  3.71335E-06  1.63518E-04  1.79319E-04  3.86745E-05 -1.65016E-06  3.30535E-06
  9.000  2.04930E-04  2.13378E-04  3.95752E-05 -4.07673E-06  3.47633E-06  1.27867E-04  1.38945E-04  2.91916E-05 -1.30746E-06  3.02110E-06
  9.100  1.65781E-04  1.71136E-04  3.04454E-05 -3.74626E-06  3.17211E-06  1.00204E-04  1.07769E-04  2.19147E-05 -1.10086E-06  2.72333E-06
  9.200  1.34568E-04  1.37758E-04  2.33993E-05 -3.51026E-06  2.82764E-06  7.87788E-05  8.37896E-05  1.63883E-05 -9.78881E-07  2.42354E-06
  9.300  1.09667E-04  1.11414E-04  1.80103E-05 -3.33023E-06  2.46430E-06  6.21952E-05  6.53949E-05  1.22302E-05 -9.07559E-07  2.13085E-06
  9.400  8.97709E-05  9.06170E-05  1.39214E-05 -3.18173E-06  2.09830E-06  4.93528E-05  5.13042E-05  9.12665E-06 -8.65350E-07  1.85188E-06
  9.500  7.38326E-05  7.41748E-05  1.08398E-05 -3.05001E-06  1.74137E-06  3.93904E-05  4.05108E-05  6.82574E-06 -8.39232E-07  1.59089E-06
  9.600  6.10213E-05  6.11378E-05  8.52913E-06 -2.92669E-06  1.40154E-06  3.16394E-05  3.22308E-05  5.12855E-06 -8.21755E-07  1.35018E-06
  9.700  5.06793E-05  5.07561E-05  6.80184E-06 -2.80742E-06  1.08398E-06  2.55839E-05  2.58596E-05  3.88066E-06 -8.08936E-07  1.13053E-06
  9.800  4.22890E-05  4.24415E-05  5.51105E-06 -2.69023E-06  7.91717E-07  2.08281E-05  2.09340E-05  2.96390E-06 -7.98796E-07  9.31618E-07
  9.900  3.54439E-05  3.57352E-05  4.54316E-06 -2.57440E-06  5.26290E-07  1.70695E-05  1.71016E-05  2.28903E-06 -7.90399E-07  7.52465E-07
 10.000  2.98257E-05  3.02812E-05  3.81138E-06 -2.45980E-06  2.88225E-07  1.40776E-05  1.40958E-05  1.78943E-06 -7.83251E-07  5.91769E-07
 10.100  2.51850E-05  2.58043E-05  3.25016E-06 -2.34650E-06  7.74192E-08  1.16773E-05  1.17154E-05  1.41593E-06 -7.76957E-07  4.48157E-07
 10.200  2.13270E-05  2.20926E-05  2.81064E-06 -2.23456E-06 -1.06620E-07  9.73544E-06  9.80968E-06  1.13259E-06 -7.71048E-07  3.20356E-07
 10.300  1.80990E-05  1.89835E-05  2.45692E-06 -2.12398E-06 -2.64618E-07  8.15080E-06  8.26551E-06  9.13460E-07 -7.64920E-07  2.07280E-07
 10.400  1.53816E-05  1.63527E-05  2.16309E-06 -2.01463E-06 -3.97456E-07  6.84654E-06  6.99861E-06  7.40039E-07 -7.57848E-07  1.08063E-07
 10.500  1.30811E-05  1.41051E-05  1.91093E-06 -1.90631E-06 -5.06147E-07  5.76412E-06  5.94619E-06  5.99358E-07 -7.49027E-07  2.20321E-08
 10.600  1.11236E-05  1.21685E-05  1.68803E-06 -1.79881E-06 -5.91834E-07  4.85892E-06  5.06167E-06  4.82515E-07 -7.37645E-07 -5.13393E-08
 10.700  9.45101E-06  1.04880E-05  1.48631E-06 -1.69192E-06 -6.55811E-07  4.09684E-06  4.31057E-06  3.83567E-07 -7.22952E-07 -1.12502E-07
 10.800  8.01721E-06  9.02183E-06  1.30092E-06 -1.58550E-06 -6.99536E-07  3.45169E-06  3.66736E-06  2.98684E-07 -7.04324E-07 -1.61900E-07
 10.900  6.78541E-06  7.73806E-06  1.12922E-06 -1.47950E-06 -7.24641E-07  2.90326E-06  3.11316E-06  2.25503E-07 -6.81322E-07 -2.00032E-07
 11.000  5.72600E-06  6.61205E-06  9.70105E-07 -1.37399E-06 -7.32920E-07  2.43584E-06  2.63389E-06  1.62626E-07 -6.53724E-07 -2.27496E-07
 11.100  4.81491E-06  5.62451E-06  8.23411E-07 -1.26918E-06 -7.26315E-07  2.03703E-06  2.21894E-06  1.09244E-07 -6.21550E-07 -2.45022E-07
 11.200  4.03229E-06  4.75992E-06  6.89447E-07 -1.16542E-06 -7.06877E-07  1.69693E-06  1.86008E-06  6.48543E-08 -5.85060E-07 -2.53481E-07
 11.300  3.36150E-06  4.00544E-06  5.68673E-07 -1.06316E-06 -6.76722E-07  1.40747E-06  1.55076E-06  2.90566E-08 -5.44738E-07 -2.53872E-07
 11.400  2.78841E-06  3.35006E-06  4.61461E-07 -9.62990E-07 -6.37979E-07  1.16191E-06  1.28550E-06  1.42216E-09 -5.01261E-07 -2.47306E-07
 11.500  2.30080E-06  2.78401E-06  3.67949E-07 -8.65537E-07 -5.92734E-07  9.54544E-07  1.05955E-06 -1.85866E-08 -4.55451E-07 -2.34964E-07
 11.600  1.88793E-06  2.29833E-06  2.87962E-07 -7.71487E-07 -5.42979E-07  7.80388E-07  8.68628E-07 -3.16472E-08 -4.08232E-07 -2.18061E-07
 11.700  1.54029E-06  1.88469E-06  2.20995E-07 -6.81521E-07 -4.90564E-07  6.35054E-07  7.08745E-07 -3.85749E-08 -3.60567E-07 -1.97801E-07
 11.800  1.24936E-06  1.53520E-06  1.66235E-07 -5.96285E-07 -4.37156E-07  5.14618E-07  5.76151E-07 -4.02947E-08 -3.13412E-07 -1.75334E-07
 11.900  1.00751E-06  1.24239E-06  1.22614E-07 -5.16354E-07 -3.84208E-07  4.15555E-07  4.67296E-07 -3.77997E-08 -2.67664E-07 -1.51722E-07
 12.000  8.07846E-07  9.99219E-07  8.88801E-08 -4.42206E-07 -3.32944E-07  3.34692E-07  3.78840E-07 -3.21015E-08 -2.24122E-07 -1.27908E-07
 12.100  6.44203E-07  7.99059E-07  6.36757E-08 -3.74199E-07 -2.84345E-07  2.69188E-07  3.07671E-07 -2.41819E-08 -1.83460E-07 -1.04695E-07
 12.200  5.11070E-07  6.35777E-07  4.56094E-08 -3.12558E-07 -2.39158E-07  2.16511E-07  2.50934E-07 -1.49495E-08 -1.46199E-07 -8.27345E-08
 12.300  4.03560E-07  5.03755E-07  3.33237E-08 -2.57373E-07 -1.97902E-07  1.74432E-07  2.06054E-07 -5.20582E-09 -1.12709E-07 -6.25217E-08
 12.400  3.17380E-07  3.97922E-07  2.55494E-08 -2.08597E-07 -1.60886E-07  1.41007E-07  1.70755E-07  4.37789E-09 -8.31987E-08 -4.44018E-08
 12.500  2.48789E-07  3.13772E-07  2.11449E-08 -1.66061E-07 -1.28240E-07  1.14569E-07  1.43067E-07  1.32729E-08 -5.77334E-08 -2.85799E-08
 12.600  1.94566E-07  2.47357E-07  1.91218E-08 -1.29483E-07 -9.99328E-08  9.37047E-08  1.21318E-07  2.10944E-08 -3.62458E-08 -1.51372E-08
 12.700  1.51971E-07  1.95279E-07  1.86571E-08 -9.84929E-08 -7.58096E-08  7.72370E-08  1.04126E-07  2.75947E-08 -1.85584E-08 -4.04957E-09
 12.800  1.18694E-07  1.54653E-07  1.90927E-08 -7.26509E-08 -5.56166E-08  6.42005E-08  9.03706E-08  3.26489E-08 -4.40635E-09  4.79110E-09
 12.900  9.28167E-08  1.23073E-07  1.99273E-08 -5.14684E-08 -3.90304E-08  5.38170E-08  7.91706E-08  3.62367E-08  6.53896E-09  1.15565E-08
 13.000  7.27627E-08  9.85610E-08  2.08004E-08 -3.44309E-08 -2.56833E-08  4.54697E-08  6.98495E-08  3.84212E-08  1.46464E-08  1.64619E-08
 13.100  5.72531E-08  7.95171E-08  2.14730E-08 -2.10168E-08 -1.51857E-08  3.86786E-08  6.19037E-08  3.93273E-08  2.03039E-08  1.97477E-08
 13.200  4.52628E-08  6.46679E-08  2.18060E-08 -1.07143E-08 -7.14504E-09  3.30766E-08  5.49706E-08  3.91214E-08  2.39005E-08  2.16642E-08
 13.300  3.59803E-08  5.30152E-08  2.17385E-08 -3.03525E-09 -1.18020E-09  2.83878E-08  4.87988E-08  3.79929E-08  2.58108E-08  2.24588E-08
 13.400  2.87702E-08  4.37881E-08  2.12674E-08  2.47402E-09  3.06670E-09  2.44081E-08  4.32215E-08  3.61384E-08  2.63838E-08  2.23657E-08
 13.500  2.31408E-08  3.64000E-08  2.04294E-08  6.22539E-09  5.92267E-09  2.09890E-08  3.81332E-08  3.37492E-08  2.59346E-08  2.15992E-08
 13.600  1.87158E-08  3.04105E-08  1.92858E-08  8.58452E-09  7.67906E-09  1.80233E-08  3.34713E-08  3.10025E-08  2.47400E-08  2.03489E-08
 13.700  1.52096E-08  2.54931E-08  1.79099E-08  9.86903E-09  8.58936E-09  1.54341E-08  2.92006E-08  2.80549E-08  2.30361E-08  1.87773E-08
 13.800  1.24071E-08  2.14078E-08  1.63778E-08  1.03489E-08  8.86906E-09  1.31658E-08  2.53021E-08  2.50389E-08  2.10182E-08  1.70197E-08
 13.900  1.01475E-08  1.79792E-08  1.47616E-08  1.02488E-08  8.69725E-09  1.11773E-08  2.17647E-08  2.20619E-08  1.88436E-08  1.51848E-08
 14.000  8.31072E-09  1.50793E-08  1.31249E-08  9.75115E-09  8.21923E-09  9.43720E-09  1.85797E-08  1.92064E-08  1.66341E-08  1.33565E-08
 14.100  6.80731E-09  1.26140E-08  1.15208E-08  9.00080E-09  7.54994E-09  7.92002E-09  1.57371E-08  1.65320E-08  1.44801E-08  1.15970E-08
 14.200  5.57003E-09  1.05127E-08  9.99078E-09  8.10948E-09  6.77780E-09  6.60405E-09  1.32240E-08  1.40780E-08  1.24454E-08  9.94954E-09
 14.300  4.54804E-09  8.72149E-09  8.56469E-09  7.16075E-09  5.96860E-09  5.46976E-09  1.10239E-08  1.18663E-08  1.05714E-08  8.44140E-09
 14.400  3.70231E-09  7.19743E-09  7.26211E-09  6.21468E-09  5.16936E-09  4.49898E-09  9.11701E-09  9.90475E-09  8.88149E-09  7.08715E-09
 14.500  3.00234E-09  5.90531E-09  6.09354E-09  5.31228E-09  4.41188E-09  3.67445E-09  7.48052E-09  8.19028E-09  7.38501E-09  5.89142E-09
 14.600  2.42383E-09  4.81518E-09  5.06205E-09  4.47951E-09  3.71598E-09  2.97970E-09  6.08986E-09  6.71172E-09  6.08089E-09  4.85141E-09
 14.700  1.94701E-09  3.90086E-09  4.16492E-09  3.73080E-09  3.09235E-09  2.39907E-09  4.91950E-09  5.45238E-09  4.96064E-09  3.95909E-09
 14.800  1.55554E-09  3.13905E-09  3.39522E-09  3.07196E-09  2.54488E-09  1.91781E-09  3.94383E-09  4.39216E-09  4.01085E-09  3.20300E-09
 14.900  1.23565E-09  2.50882E-09  2.74316E-09  2.50274E-09  2.07269E-09  1.52221E-09  3.13798E-09  3.50931E-09  3.21526E-09  2.56975E-09
 15.000  9.75675E-10  1.99130E-09  2.19729E-09  2.01874E-09  1.67170E-09  1.19970E-09  2.47836E-09  2.78175E-09  2.55629E-09  2.04511E-09
 15.100  7.65658E-10  1.56960E-09  1.74540E-09  1.61306E-09  1.33586E-09  9.38908E-10  1.94319E-09  2.18805E-09  2.01622E-09  1.61489E-09
 15.200  5.97077E-10  1.22864E-09  1.37524E-09  1.27738E-09  1.05813E-09  7.29729E-10  1.51270E-09  1.70815E-09  1.57798E-09  1.26550E-09
 15.300  4.62653E-10  9.55109E-10  1.07506E-09  1.00290E-09  8.31088E-10  5.63274E-10  1.16931E-09  1.32374E-09  1.22574E-09  9.84393E-10
 15.400  3.56197E-10  7.37381E-10  8.33983E-10  7.80944E-10  6.47488E-10  4.31852E-10  8.97619E-10  1.01848E-09  9.45170E-10  7.60213E-10
 15.500  2.72476E-10  5.65412E-10  6.42137E-10  6.03292E-10  5.00513E-10  3.28883E-10  6.84368E-10  7.78128E-10  7.23630E-10  5.82956E-10
 15.600  2.07094E-10  4.30627E-10  4.90820E-10  4.62485E-10  3.83978E-10  2.48817E-10  5.18285E-10  5.90409E-10  5.50158E-10  4.43952E-10
 15.700  1.56394E-10  3.25785E-10  3.72488E-10  3.51908E-10  2.92417E-10  1.87018E-10  3.89919E-10  4.44957E-10  4.15420E-10  3.35812E-10
 15.800  1.17354E-10  2.44842E-10  2.80713E-10  2.65835E-10  2.21100E-10  1.39666E-10  2.91440E-10  3.33119E-10  3.11584E-10  2.52331E-10
 15.900  8.75016E-11  1.82811E-10  2.10104E-10  1.99401E-10  1.66014E-10  1.03643E-10  2.16438E-10  2.47768E-10  2.32170E-10  1.88371E-10
 16.000  6.48337E-11  1.35616E-10  1.56202E-10  1.48542E-10  1.23805E-10  7.64293E-11  1.59723E-10  1.83107E-10  1.71882E-10  1.39724E-10
 16.100  4.77390E-11  9.99657E-11  1.15364E-10  1.09911E-10  9.17131E-11  5.60132E-11  1.17136E-10  1.34468E-10  1.26444E-10  1.02988E-10
 16.200  3.49348E-11  7.32239E-11  8.46518E-11  8.07917E-11  6.74973E-11  4.08002E-11  8.53767E-11  9.81372E-11  9.24372E-11  7.54405E-11
 16.300  2.54087E-11  5.33029E-11  6.17207E-11  5.90038E-11  4.93577E-11  2.95399E-11  6.18509E-11  7.11842E-11  6.71619E-11  5.49240E-11
 16.400  1.83684E-11  3.85636E-11  4.47195E-11  4.28186E-11  3.58662E-11  2.12598E-11  4.45395E-11  5.13223E-11  4.85024E-11  3.97463E-11
 16.500  1.31993E-11  2.77311E-11  3.22016E-11  3.08796E-11  2.59015E-11  1.52106E-11  3.18837E-11  3.67822E-11  3.48180E-11  2.85919E-11
 16.600  9.42862E-12  1.98220E-11  2.30468E-11  2.21330E-11  1.85915E-11  1.08192E-11  2.26907E-11  2.62065E-11  2.48473E-11  2.04472E-11
 16.700  6.69561E-12  1.40848E-11  1.63958E-11  1.57682E-11  1.32645E-11  7.65135E-12  1.60550E-11  1.85632E-11  1.76287E-11  1.45378E-11
 16.800  4.72718E-12  9.94967E-12  1.15952E-11  1.11668E-11  9.40796E-12  5.38020E-12  1.12949E-11  1.30737E-11  1.24354E-11  1.02770E-11
 16.900  3.31826E-12  6.98788E-12  8.15228E-12  7.86184E-12  6.63375E-12  3.76186E-12  7.90124E-12  9.15531E-12  8.72218E-12  7.22381E-12
 17.000  2.31601E-12  4.87966E-12  5.69861E-12  5.50296E-12  4.65066E-12  2.61563E-12  5.49631E-12  6.37535E-12  6.08334E-12  5.04921E-12
 17.100  1.60736E-12  3.38819E-12  3.96073E-12  3.82981E-12  3.24185E-12  1.80860E-12  3.80221E-12  4.41487E-12  4.21928E-12  3.50964E-12
 17.200  1.10932E-12  2.33941E-12  2.73733E-12  2.65032E-12  2.24709E-12  1.24373E-12  2.61585E-12  3.04044E-12  2.91030E-12  2.42610E-12
 17.300  7.61361E-13  1.60630E-12  1.88127E-12  1.82383E-12  1.54891E-12  8.50637E-13  1.78988E-12  2.08251E-12  1.99648E-12  1.66795E-12
 17.400  5.19683E-13  1.09687E-12  1.28579E-12  1.24815E-12  1.06178E-12  5.78660E-13  1.21813E-12  1.41869E-12  1.36220E-12  1.14054E-12
 17.500  3.52795E-13  7.44929E-13  8.74002E-13  8.49504E-13  7.23887E-13  3.91546E-13  8.24589E-13  9.61305E-13  9.24457E-13  7.75720E-13
 17.600  2.38212E-13  5.03182E-13  5.90879E-13  5.75052E-13  4.90858E-13  2.63536E-13  5.55238E-13  6.47930E-13  6.24056E-13  5.24798E-13
 17.700  1.59985E-13  3.38071E-13  3.97330E-13  3.87180E-13  3.31064E-13  1.76448E-13  3.71910E-13  4.34419E-13  4.19055E-13  3.53175E-13
 17.800  1.06879E-13  2.25935E-13  2.65761E-13  2.59302E-13  2.22106E-13  1.17525E-13  2.47817E-13  2.89748E-13  2.79929E-13  2.36437E-13
 17.900  7.10265E-14  1.50200E-13  1.76823E-13  1.72745E-13  1.48225E-13  7.78748E-14  1.64277E-13  1.92257E-13  1.86026E-13  1.57465E-13
 18.000  4.69550E-14  9.93318E-14  1.17035E-13  1.14480E-13  9.84042E-14  5.13375E-14  1.08340E-13  1.26914E-13  1.22988E-13  1.04332E-13
 18.100  3.08812E-14  6.53515E-14  7.70613E-14  7.54748E-14  6.49911E-14  3.36714E-14  7.10873E-14  8.33533E-14  8.08968E-14  6.87749E-14
 18.200  2.02057E-14  4.27749E-14  5.04802E-14  4.95035E-14  4.27032E-14  2.19730E-14  4.64082E-14  5.44671E-14  5.29417E-14  4.51061E-14
 18.300  1.31535E-14  2.78551E-14  3.28993E-14  3.23035E-14  2.79158E-14  1.42671E-14  3.01450E-14  3.54129E-14  3.44728E-14  2.94341E-14
 18.400  8.51932E-15  1.80476E-14  2.13328E-14  2.09730E-14  1.81568E-14  9.21759E-15  1.94835E-14  2.29096E-14  2.23348E-14  1.91112E-14
 18.500  5.49018E-15  1.16345E-14  1.37633E-14  1.35483E-14  1.17501E-14  5.92578E-15  1.25304E-14  1.47475E-14  1.43989E-14  1.23471E-14
 18.600  3.52045E-15  7.46292E-15  8.83542E-15  8.70832E-15  7.56609E-15  3.79083E-15  8.01909E-15  9.44662E-15  9.23702E-15  7.93761E-15
 18.700  2.24624E-15  4.76335E-15  5.64382E-15  5.56964E-15  4.84780E-15  2.41323E-15  5.10690E-15  6.02152E-15  5.89661E-15  5.07785E-15
 18.800  1.42617E-15  3.02534E-15  3.58737E-15  3.54468E-15  3.09083E-15  1.52880E-15  3.23650E-15  3.81962E-15  3.74588E-15  3.23255E-15
 18.900  9.01072E-16  1.91209E-15  2.26908E-15  2.24489E-15  1.96099E-15  9.63829E-16  2.04124E-15  2.41118E-15  2.36809E-15  2.04786E-15
 19.000  5.66544E-16  1.20261E-15  1.42826E-15  1.41481E-15  1.23810E-15  6.04731E-16  1.28121E-15  1.51478E-15  1.48987E-15  1.29109E-15
 19.100  3.54491E-16  7.52733E-16  8.94666E-16  8.87349E-16  7.77916E-16  3.77614E-16  8.00335E-16  9.47084E-16  9.32857E-16  8.10070E-16
 19.200  2.20743E-16  4.68885E-16  5.57729E-16  5.53859E-16  4.86425E-16  2.34676E-16  4.97572E-16  5.89331E-16  5.81313E-16  5.05838E-16
 19.300  1.36802E-16  2.90679E-16  3.46024E-16  3.44052E-16  3.02703E-16  1.45156E-16  3.07882E-16  3.64983E-16  3.60532E-16  3.14365E-16
  67 137 195   0.100
  0.000  6.93643E-02 -3.41348E-16 -5.72459E-16 -6.75501E-16 -1.05856E-15  7.84412E-02 -4.18928E-16 -5.62050E-16 -5.87936E-16 -1.50201E-15
  0.100  6.93739E-02 -3.52651E-05 -2.32401E-08 -4.72835E-12 -2.66071E-15  7.84383E-02 -4.86909E-05 -5.17082E-08 -1.49046E-11 -2.77515E-15
  0.200  6.94027E-02 -1.39063E-04 -3.68301E-07 -3.00618E-10 -1.48685E-13  7.84303E-02 -1.91850E-04 -8.19377E-07 -9.47891E-10 -6.25510E-13
  0.300  6.94508E-02 -3.05514E-04 -1.83500E-06 -3.38665E-09 -3.75988E-12  7.84191E-02 -4.20902E-04 -4.08174E-06 -1.06844E-08 -1.58346E-11
  0.400  6.95183E-02 -5.25184E-04 -5.67118E-06 -1.87371E-08 -3.72146E-11  7.84078E-02 -7.22104E-04 -1.26115E-05 -5.91558E-08 -1.56091E-10
  0.500  6.96051E-02 -7.85613E-04 -1.34521E-05 -7.00753E-08 -2.19315E-10  7.84005E-02 -1.07733E-03 -2.99036E-05 -2.21426E-07 -9.14791E-10
  0.600  6.97111E-02 -1.07200E-03 -2.69258E-05 -2.04250E-07 -9.30350E-10  7.84015E-02 -1.46512E-03 -5.98235E-05 -6.45999E-07 -3.85330E-09
  0.700  6.98359E-02 -1.36801E-03 -4.78356E-05 -5.00572E-07 -3.14376E-09  7.84155E-02 -1.86185E-03 -1.06206E-04 -1.58472E-06 -1.29083E-08
  0.800  6.99786E-02 -1.65666E-03 -7.77353E-05 -1.07935E-06 -8.99049E-09  7.84471E-02 -2.24311E-03 -1.72429E-04 -3.42020E-06 -3.65321E-08
  0.900  7.01380E-02 -1.92121E-03 -1.17809E-04 -2.10836E-06 -2.26279E-08  7.85001E-02 -2.58505E-03 -2.61007E-04 -6.68639E-06 -9.08217E-08
  1.000  7.03126E-02 -2.14607E-03 -1.68710E-04 -3.80601E-06 -5.14821E-08  7.85774E-02 -2.86568E-03 -3.73218E-04 -1.20784E-05 -2.03693E-07
  1.100  7.05002E-02 -2.31752E-03 -2.30433E-04 -6.44031E-06 -1.07925E-07  7.86807E-02 -3.06605E-03 -5.08815E-04 -2.04479E-05 -4.20033E-07
  1.200  7.06982E-02 -2.42446E-03 -3.02216E-04 -1.03226E-05 -2.11435E-07  7.88106E-02 -3.17130E-03 -6.65826E-04 -3.27816E-05 -8.07615E-07
  1.300  7.09039E-02 -2.45893E-03 -3.82506E-04 -1.57959E-05 -3.91271E-07  7.89658E-02 -3.17143E-03 -8.40473E-04 -5.01613E-05 -1.46339E-06
  1.400  7.11140E-02 -2.41644E-03 -4.68955E-04 -2.32167E-05 -6.89651E-07  7.91440E-02 -3.06179E-03 -1.02721E-03 -7.37055E-05 -2.51965E-06
  1.500  7.13254E-02 -2.29617E-03 -5.58477E-04 -3.29315E-05 -1.16539E-06  7.93413E-02 -2.84331E-03 -1.21892E-03 -1.04494E-04 -4.14938E-06
  1.600  7.15349E-02 -2.10100E-03 -6.47357E-04 -4.52467E-05 -1.89787E-06  7.95529E-02 -2.52242E-03 -1.40715E-03 -1.43477E-04 -6.57004E-06
  1.700  7.17394E-02 -1.83730E-03 -7.31398E-04 -6.03938E-05 -2.99108E-06  7.97730E-02 -2.11066E-03 -1.58258E-03 -1.91379E-04 -1.00449E-05
  1.800  7.19363E-02 -1.51463E-03 -8.06114E-04 -7.84896E-05 -4.57747E-06  7.99952E-02 -1.62410E-03 -1.73548E-03 -2.48589E-04 -1.48813E-05
  1.900  7.21233E-02 -1.14523E-03 -8.66957E-04 -9.94939E-05 -6.82095E-06  8.02131E-02 -1.08245E-03 -1.85626E-03 -3.15068E-04 -2.14243E-05
  2.000  7.22985E-02 -7.43442E-04 -9.09571E-04 -1.23166E-04 -9.91854E-06  8.04202E-02 -5.08033E-04 -1.93608E-03 -3.90251E-04 -3.00460E-05
  2.100  7.24607E-02 -3.25014E-04 -9.30065E-04 -1.49024E-04 -1.40997E-05  8.06103E-02  7.54101E-05 -1.96745E-03 -4.72983E-04 -4.11295E-05
  2.200  7.26092E-02  9.36851E-05 -9.25294E-04 -1.76306E-04 -1.96227E-05  8.07779E-02  6.43935E-04 -1.94476E-03 -5.61469E-04 -5.50466E-05
  2.300  7.27436E-02  4.96468E-04 -8.93125E-04 -2.03948E-04 -2.67665E-05  8.09184E-02  1.17468E-03 -1.86480E-03 -6.53269E-04 -7.21303E-05
  2.400  7.28637E-02  8.68154E-04 -8.32702E-04 -2.30567E-04 -3.58185E-05  8.10278E-02  1.64709E-03 -1.72715E-03 -7.45325E-04 -9.26426E-05
  2.500  7.29698E-02  1.19537E-03 -7.44654E-04 -2.54474E-04 -4.70557E-05  8.11031E-02  2.04407E-03 -1.53448E-03 -8.34043E-04 -1.16738E-04
  2.600  7.30617E-02  1.46734E-03 -6.31260E-04 -2.73698E-04 -6.07217E-05  8.11420E-02  2.35294E-03 -1.29261E-03 -9.15412E-04 -1.44424E-04
  2.700  7.31391E-02  1.67649E-03 -4.96547E-04 -2.86054E-04 -7.69975E-05  8.11427E-02  2.56626E-03 -1.01050E-03 -9.85177E-04 -1.75525E-04
  2.800  7.32011E-02  1.81910E-03 -3.46287E-04 -2.89226E-04 -9.59687E-05  8.11040E-02  2.68239E-03 -7.00019E-04 -1.03905E-03 -2.09647E-04
  2.900  7.32458E-02  1.89564E-03 -1.87902E-04 -2.80892E-04 -1.17591E-04  8.10245E-02  2.70573E-03 -3.75504E-04 -1.07295E-03 -2.46147E-04
  3.000  7.32704E-02  1.91105E-03 -3.02540E-05 -2.58871E-04 -1.41658E-04  8.09027E-02  2.64679E-03 -5.31890E-05 -1.08328E-03 -2.84120E-04
  3.100  7.32709E-02  1.87474E-03  1.16680E-04 -2.21291E-04 -1.67768E-04  8.07364E-02  2.52183E-03  2.49541E-04 -1.06718E-03 -3.22394E-04
  3.200  7.32419E-02  1.80042E-03  2.42241E-04 -1.66769E-04 -1.95308E-04  8.05229E-02  2.35228E-03  5.15004E-04 -1.02278E-03 -3.59543E-04
  3.300  7.31764E-02  1.70565E-03  3.35626E-04 -9.45962E-05 -2.23444E-04  8.02579E-02  2.16382E-03  7.26155E-04 -9.49427E-04 -3.93927E-04
  3.400  7.30663E-02  1.61124E-03  3.86482E-04 -4.89425E-06 -2.51126E-04  7.99365E-02  1.98526E-03  8.67550E-04 -8.47871E-04 -4.23741E-04
  3.500  7.29022E-02  1.54032E-03  3.85562E-04  1.01248E-04 -2.77116E-04  7.95519E-02  1.84716E-03  9.26269E-04 -7.20319E-04 -4.47094E-04
  3.600  7.26734E-02  1.51732E-03  3.25361E-04  2.21696E-04 -3.00034E-04  7.90965E-02  1.78034E-03  8.92762E-04 -5.70469E-04 -4.62107E-04
  3.700  7.23686E-02  1.56677E-03  2.00726E-04  3.53249E-04 -3.18420E-04  7.85612E-02  1.81427E-03  7.61530E-04 -4.03416E-04 -4.67012E-04
  3.800  7.19760E-02  1.71200E-03  9.35928E-06  4.91695E-04 -3.30823E-04  7.79360E-02  1.97553E-03  5.31624E-04 -2.25465E-04 -4.60276E-04
  3.900  7.14835E-02  1.97383E-03 -2.47803E-04  6.31945E-04 -3.35885E-04  7.72104E-02  2.28624E-03  2.06890E-04 -4.38575E-05 -4.40711E-04
  4.000  7.08792E-02  2.36934E-03 -5.66391E-04  7.68240E-04 -3.32451E-04  7.63731E-02  2.76280E-03 -2.04051E-04  1.33590E-04 -4.07576E-04
  4.100  7.01522E-02  2.91067E-03 -9.38605E-04  8.94436E-04 -3.19658E-04  7.54134E-02  3.41472E-03 -6.88100E-04  2.98898E-04 -3.60671E-04
  4.200  6.92921E-02  3.60412E-03 -1.35343E-03  1.00433E-03 -2.97028E-04  7.43207E-02  4.24390E-03 -1.22825E-03  4.44372E-04 -3.00393E-04
  4.300  6.82903E-02  4.44945E-03 -1.79707E-03  1.09204E-03 -2.64535E-04  7.30855E-02  5.24418E-03 -1.80438E-03  5.63053E-04 -2.27763E-04
  4.400  6.71396E-02  5.43950E-03 -2.25357E-03  1.15234E-03 -2.22642E-04  7.16998E-02  6.40132E-03 -2.39428E-03  6.49132E-04 -1.44415E-04
  4.500  6.58348E-02  6.56015E-03 -2.70562E-03  1.18104E-03 -1.72316E-04  7.01571E-02  7.69340E-03 -2.97480E-03  6.98309E-04 -5.25454E-05
  4.600  6.43731E-02  7.79068E-03 -3.13544E-03  1.17529E-03 -1.14999E-04  6.84535E-02  9.09159E-03 -3.52301E-03  7.08057E-04  4.51773E-05
  4.700  6.27538E-02  9.10443E-03 -3.52573E-03  1.13376E-03 -5.25461E-05  6.65872E-02  1.05613E-02 -4.01742E-03  6.77779E-04  1.45735E-04
  4.800  6.09788E-02  1.04698E-02 -3.86063E-03  1.05679E-03  1.28648E-05  6.45594E-02  1.20636E-02 -4.43907E-03  6.08846E-04  2.45909E-04
  4.900  5.90525E-02  1.18516E-02 -4.12657E-03  9.46420E-04  7.88552E-05  6.23742E-02  1.35568E-02 -4.77246E-03  5.04504E-04  3.42447E-04
  5.000  5.69818E-02  1.32125E-02 -4.31301E-03  8.06282E-04  1.42980E-04  6.00387E-02  1.49985E-02 -5.00629E-03  3.69668E-04  4.32231E-04
  5.100  5.47762E-02  1.45145E-02 -4.41294E-03  6.41406E-04  2.02871E-04  5.75632E-02  1.63472E-02 -5.13386E-03  2.10614E-04  5.12443E-04
  5.200  5.24474E-02  1.57207E-02 -4.42327E-03  4.57937E-04  2.56373E-04  5.49607E-02  1.75641E-02 -5.15333E-03  3.45946E-05  5.80701E-04
  5.300  5.00096E-02  1.67971E-02 -4.34485E-03  2.62779E-04  3.01669E-04  5.22471E-02  1.86147E-02 -5.06753E-03 -1.50597E-04  6.35183E-04
  5.400  4.74789E-02  1.77137E-02 -4.18231E-03  6.32069E-05  3.37378E-04  4.94408E-02  1.94703E-02 -4.88366E-03 -3.37073E-04  6.74696E-04
  5.500  4.48732E-02  1.84457E-02 -3.94374E-03 -1.33548E-04  3.62618E-04  4.65625E-02  2.01090E-02 -4.61262E-03 -5.17283E-04  6.98717E-04
  5.600  4.22119E-02  1.89748E-02 -3.64007E-03 -3.20679E-04  3.77043E-04  4.36343E-02  2.05162E-02 -4.26830E-03 -6.84405E-04  7.07390E-04
  5.700  3.95155E-02  1.92894E-02 -3.28438E-03 -4.92150E-04  3.80830E-04  4.06799E-02  2.06854E-02 -3.86664E-03 -8.32660E-04  7.01478E-04
  5.800  3.68054E-02  1.93851E-02 -2.89112E-03 -6.42970E-04  3.74644E-04  3.77234E-02  2.06177E-02 -3.42472E-03 -9.57546E-04  6.82284E-04
  5.900  3.41029E-02  1.92645E-02 -2.47528E-03 -7.69387E-04  3.59564E-04  3.47891E-02  2.03215E-02 -2.95979E-03 -1.05597E-03  6.51549E-04
  6.000  3.14296E-02  1.89369E-02 -2.05161E-03 -8.68992E-04  3.36992E-04  3.19010E-02  1.98121E-02 -2.48845E-03 -1.12629E-03  6.11325E-04
  6.100  2.88061E-02  1.84173E-02 -1.63392E-03 -9.40731E-04  3.08547E-04  2.90819E-02  1.91103E-02 -2.02588E-03 -1.16827E-03  5.63848E-04
  6.200  2.62522E-02  1.77259E-02 -1.23446E-03 -9.84836E-04  2.75953E-04  2.63531E-02  1.82413E-02 -1.58526E-03 -1.18292E-03  5.11401E-04
  6.300  2.37860E-02  1.68867E-02 -8.63490E-04 -1.00269E-03  2.40932E-04  2.37337E-02  1.72337E-02 -1.17735E-03 -1.17235E-03  4.56204E-04
  6.400  2.14238E-02  1.59264E-02 -5.28980E-04 -9.96613E-04  2.05106E-04  2.12406E-02  1.61179E-02 -8.10279E-04 -1.13951E-03  4.00305E-04
  6.500  1.91796E-02  1.48730E-02 -2.36486E-04 -9.69666E-04  1.69922E-04  1.88877E-02  1.49249E-02 -4.89457E-04 -1.08792E-03  3.45501E-04
  6.600  1.70651E-02  1.37549E-02  1.08220E-05 -9.25376E-04  1.36590E-04  1.66860E-02  1.36851E-02 -2.17700E-04 -1.02145E-03  2.93286E-04
  6.700  1.50891E-02  1.25997E-02  2.12013E-04 -8.67509E-04  1.06051E-04  1.46434E-02  1.24270E-02  4.54966E-06 -9.44050E-04  2.44818E-04
  6.800  1.32580E-02  1.14334E-02  3.68130E-04 -7.99848E-04  7.89619E-05  1.27646E-02  1.11770E-02  1.78887E-04 -8.59557E-04  2.00912E-04
  6.900  1.15751E-02  1.02793E-02  4.81852E-04 -7.26001E-04  5.57049E-05  1.10514E-02  9.95781E-03  3.08553E-04 -7.71515E-04  1.62057E-04
  7.000  1.00413E-02  9.15763E-03  5.57121E-04 -6.49246E-04  3.64094E-05  9.50259E-03  8.78889E-03  3.98013E-04 -6.83047E-04  1.28449E-04
  7.100  8.65525E-03  8.08545E-03  5.98750E-04 -5.72431E-04  2.09900E-05  8.11461E-03  7.68564E-03  4.52531E-04 -5.96776E-04  1.00027E-04
  7.200  7.41303E-03  7.07609E-03  6.12043E-04 -4.97899E-04  9.18961E-06  6.88151E-03  6.65961E-03  4.77776E-04 -5.14784E-04  7.65329E-05
  7.300  6.30904E-03  6.13937E-03  6.02458E-04 -4.27473E-04  6.27703E-07  5.79552E-03  5.71863E-03  4.79476E-04 -4.38605E-04  5.75564E-05
  7.400  5.33602E-03  5.28171E-03  5.75313E-04 -3.62461E-04 -5.15368E-06  4.84736E-03  4.86701E-03  4.63128E-04 -3.69265E-04  4.25911E-05
  7.500  4.48551E-03  4.50646E-03  5.35562E-04 -3.03691E-04 -8.64705E-06  4.02670E-03  4.10602E-03  4.33784E-04 -3.07324E-04  3.10796E-05
  7.600  3.74815E-03  3.81421E-03  4.87623E-04 -2.51577E-04 -1.03433E-05  3.32250E-03  3.43429E-03  3.95895E-04 -2.52949E-04  2.24540E-05
  7.700  3.11404E-03  3.20329E-03  4.35278E-04 -2.06179E-04 -1.07033E-05  2.72341E-03  2.84833E-03  3.53227E-04 -2.05991E-04  1.61674E-05
  7.800  2.57303E-03  2.67018E-03  3.81628E-04 -1.67285E-04 -1.01373E-05  2.21804E-03  2.34300E-03  3.08832E-04 -1.66058E-04  1.17178E-05
  7.900  2.11503E-03  2.20997E-03  3.29087E-04 -1.34478E-04 -8.99314E-06  1.79529E-03  1.91203E-03  2.65062E-04 -1.32591E-04  8.66274E-06
  8.000  1.73022E-03  1.81679E-03  2.79430E-04 -1.07209E-04 -7.55059E-06  1.44456E-03  1.54841E-03  2.23623E-04 -1.04929E-04  6.62777E-06
  8.100  1.40925E-03  1.48421E-03  2.33852E-04 -8.48533E-05 -6.02228E-06  1.15592E-03  1.24479E-03  1.85650E-04 -8.23607E-05  5.30770E-06
  8.200  1.14339E-03  1.20554E-03  1.93055E-04 -6.67606E-05 -4.55878E-06  9.20223E-04  9.93817E-04  1.51800E-04 -6.41756E-05  4.46369E-06
  8.300  9.24627E-04  9.74149E-04  1.57337E-04 -5.22923E-05 -3.25658E-06  7.29210E-04  7.88369E-04  1.22341E-04 -4.96912E-05  3.91680E-06
  8.400  7.45722E-04  7.83648E-04  1.26683E-04 -4.08488E-05 -2.16790E-06  5.75519E-04  6.21744E-04  9.72522E-05 -3.82784E-05  3.53956E-06
  8.500  6.00236E-04  6.28058E-04  1.00853E-04 -3.18868E-05 -1.31070E-06  4.52694E-04  4.87799E-04  7.63012E-05 -2.93748E-05  3.24660E-06
  8.600  4.82524E-04  5.01917E-04  7.94524E-05 -2.49292E-05 -6.78445E-07  3.55153E-04  3.81020E-04  5.91217E-05 -2.24910E-05  2.98536E-06
  8.700  3.87702E-04  4.00335E-04  6.20009E-05 -1.95672E-05 -2.48690E-07  2.78133E-04  2.96559E-04  4.52731E-05 -1.72112E-05  2.72747E-06
  8.800  3.11600E-04  3.19017E-04  4.79804E-05 -1.54592E-05  9.79875E-09  2.17623E-04  2.30227E-04  3.42873E-05 -1.31895E-05  2.46126E-06
  8.900  2.50697E-04  2.54256E-04  3.68738E-05 -1.23255E-05  1.31473E-07  1.70287E-04  1.78466E-04  2.57039E-05 -1.01436E-05  2.18565E-06
  9.000  2.02056E-04  2.02899E-04  2.81918E-05 -9.94096E-06  1.50033E-07  1.33385E-04  1.38300E-04  1.90932E-05 -7.84732E-06  1.90538E-06
  9.100  1.63252E-04  1.62305E-04  2.14899E-05 -8.12776E-06  9.58652E-08  1.04688E-04  1.07278E-04  1.40708E-05 -6.12207E-06  1.62760E-06
  9.200  1.32300E-04  1.30287E-04  1.63776E-05 -6.74715E-06 -5.34085E-09  8.24059E-05  8.34039E-05  1.03037E-05 -4.82885E-06  1.35962E-06
  9.300  1.07595E-04  1.05059E-04  1.25206E-05 -5.69227E-06 -1.33068E-07  6.51109E-05  6.50777E-05  7.51218E-06 -3.86075E-06  1.10758E-06
  9.400  8.78431E-05  8.51759E-05  9.64005E-06 -4.88159E-06 -2.71799E-07  5.16778E-05  5.10277E-05  5.46668E-06 -3.13638E-06  8.75814E-07
  9.500  7.20121E-05  6.94819E-05  7.50777E-06 -4.25336E-06 -4.10440E-07  4.12254E-05  4.02556E-05  3.98313E-06 -2.59420E-06  6.66798E-07
  9.600  5.92823E-05  5.70585E-05  5.94080E-06 -3.76104E-06 -5.41545E-07  3.30688E-05  3.19844E-05  2.91687E-06 -2.18793E-06  4.81331E-07
  9.700  4.90060E-05  4.71824E-05  4.79481E-06 -3.36965E-06 -6.60489E-07  2.66789E-05  2.56145E-05  2.15624E-06 -1.88283E-06  3.18924E-07
  9.800  4.06731E-05  3.92874E-05  3.95770E-06 -3.05294E-06 -7.64694E-07  2.16488E-05  2.06869E-05  1.61650E-06 -1.65279E-06  1.78225E-07
  9.900  3.38828E-05  3.29329E-05  3.34369E-06 -2.79119E-06 -8.52972E-07  1.76669E-05  1.68517E-05  1.23430E-06 -1.47817E-06  5.74152E-08
 10.000  2.83207E-05  2.77775E-05  2.88810E-06 -2.56965E-06 -9.25020E-07  1.44949E-05  1.38443E-05  9.62997E-07 -1.34410E-06 -4.54668E-08
 10.100  2.37402E-05  2.35578E-05  2.54285E-06 -2.37729E-06 -9.81048E-07  1.19509E-05  1.14646E-05  7.68690E-07 -1.23927E-06 -1.32298E-07
 10.200  1.99477E-05  2.00713E-05  2.27282E-06 -2.20595E-06 -1.02155E-06  9.89618E-06  9.56258E-06  6.27118E-07 -1.15506E-06 -2.04735E-07
 10.300  1.67913E-05  1.71626E-05  2.05286E-06 -2.04961E-06 -1.04718E-06  8.22466E-06  8.02540E-06  5.21186E-07 -1.08491E-06 -2.64162E-07
 10.400  1.41511E-05  1.47129E-05  1.86540E-06 -1.90400E-06 -1.05869E-06  6.85524E-06  6.76880E-06  4.39078E-07 -1.02384E-06 -3.11699E-07
 10.500  1.19327E-05  1.26312E-05  1.69860E-06 -1.76612E-06 -1.05690E-06  5.72572E-06  5.72979E-06  3.72824E-07 -9.68132E-07 -3.48254E-07
 10.600  1.00612E-05  1.08483E-05  1.54489E-06 -1.63402E-06 -1.04276E-06  4.78825E-06  4.86140E-06  3.17216E-07 -9.15091E-07 -3.74594E-07
 10.700  8.47703E-06  9.31111E-06  1.39977E-06 -1.50649E-06 -1.01734E-06  4.00590E-06  4.12861E-06  2.69003E-07 -8.62849E-07 -3.91419E-07
 10.800  7.13264E-06  7.97901E-06  1.26099E-06 -1.38295E-06 -9.81821E-07  3.34998E-06  3.50527E-06  2.26282E-07 -8.10217E-07 -3.99430E-07
 10.900  5.98970E-06  6.82063E-06  1.12774E-06 -1.26323E-06 -9.37542E-07  2.79811E-06  2.97179E-06  1.88044E-07 -7.56563E-07 -3.99378E-07
 11.000  5.01720E-06  5.81152E-06  1.00022E-06 -1.14748E-06 -8.85942E-07  2.33266E-06  2.51335E-06  1.53840E-07 -7.01700E-07 -3.92095E-07
 11.100  4.18973E-06  4.93226E-06  8.79094E-07 -1.03602E-06 -8.28544E-07  1.93962E-06  2.11863E-06  1.23531E-07 -6.45787E-07 -3.78498E-07
 11.200  3.48633E-06  4.16714E-06  7.65287E-07 -9.29322E-07 -7.66907E-07  1.60773E-06  1.77876E-06  9.71105E-08 -5.89238E-07 -3.59582E-07
 11.300  2.88946E-06  3.50310E-06  6.59694E-07 -8.27857E-07 -7.02579E-07  1.32777E-06  1.48665E-06  7.45918E-08 -5.32639E-07 -3.36395E-07
 11.400  2.38432E-06  2.92894E-06  5.63053E-07 -7.32103E-07 -6.37047E-07  1.09215E-06  1.23643E-06  5.59289E-08 -4.76676E-07 -3.10008E-07
 11.500  1.95824E-06  2.43486E-06  4.75857E-07 -6.42479E-07 -5.71689E-07  8.94453E-07  1.02306E-06  4.09816E-08 -4.22066E-07 -2.81472E-07
 11.600  1.60029E-06  2.01206E-06  3.98313E-07 -5.59320E-07 -5.07738E-07  7.29248E-07  8.42158E-07  2.95053E-08 -3.69509E-07 -2.51787E-07
 11.700  1.30098E-06  1.65249E-06  3.30344E-07 -4.82858E-07 -4.46253E-07  5.91838E-07  6.89760E-07  2.11600E-08 -3.19639E-07 -2.21866E-07
 11.800  1.05197E-06  1.34875E-06  2.71617E-07 -4.13211E-07 -3.88096E-07  4.78143E-07  5.62267E-07  1.55325E-08 -2.72993E-07 -1.92510E-07
 11.900  8.45971E-07  1.09399E-06  2.21583E-07 -3.50381E-07 -3.33931E-07  3.84601E-07  4.56383E-07  1.21646E-08 -2.29993E-07 -1.64391E-07
 12.000  6.76549E-07  8.81885E-07  1.79534E-07 -2.94263E-07 -2.84222E-07  3.08093E-07  3.69090E-07  1.05826E-08 -1.90931E-07 -1.38039E-07
 12.100  5.38069E-07  7.06612E-07  1.44658E-07 -2.44647E-07 -2.39244E-07  2.45893E-07  2.97641E-07  1.03259E-08 -1.55970E-07 -1.13845E-07
 12.200  4.25597E-07  5.62873E-07  1.16089E-07 -2.01235E-07 -1.99103E-07  1.95626E-07  2.39560E-07  1.09692E-08 -1.25151E-07 -9.20649E-08
 12.300  3.34836E-07  4.45884E-07  9.29582E-08 -1.63656E-07 -1.63760E-07  1.55237E-07  1.92640E-07  1.21398E-08 -9.84010E-08 -7.28288E-08
 12.400  2.62072E-07  3.51373E-07  7.44240E-08 -1.31485E-07 -1.33050E-07  1.22960E-07  1.54941E-07  1.35285E-08 -7.55536E-08 -5.61603E-08
 12.500  2.04111E-07  2.75574E-07  5.97053E-08 -1.04255E-07 -1.06717E-07  9.72914E-08  1.24782E-07  1.48936E-08 -5.63653E-08 -4.19931E-08
 12.600  1.58237E-07  2.15205E-07  4.80985E-08 -8.14780E-08 -8.44320E-08  7.69634E-08  1.00726E-07  1.60602E-08 -4.05363E-08 -3.01901E-08
 12.700  1.22152E-07  1.67440E-07  3.89873E-08 -6.26608E-08 -6.58229E-08  6.09185E-08  8.15671E-08  1.69151E-08 -2.77295E-08 -2.05632E-08
 12.800  9.39357E-08  1.29880E-07  3.18465E-08 -4.73156E-08 -5.04929E-08  4.82836E-08  6.63044E-08  1.73989E-08 -1.75882E-08 -1.28907E-08
 12.900  7.19966E-08  1.00507E-07  2.62396E-08 -3.49734E-08 -3.80395E-08  3.83461E-08  5.41213E-08  1.74960E-08 -9.75251E-09 -6.93318E-09
 13.000  5.50270E-08  7.76501E-08  2.18119E-08 -2.51927E-08 -2.80692E-08  3.05301E-08  4.43599E-08  1.72249E-08 -3.87187E-09 -2.44702E-09
 13.100  4.19634E-08  5.99370E-08  1.82825E-08 -1.75665E-08 -2.02088E-08  2.43752E-08  3.64981E-08  1.66275E-08  3.84398E-10  8.05090E-10
 13.200  3.19487E-08  4.62556E-08  1.54331E-08 -1.17262E-08 -1.41134E-08  1.95170E-08  3.01258E-08  1.57605E-08  3.31978E-09  3.04600E-09
 13.300  2.42986E-08  3.57133E-08  1.30985E-08 -7.34408E-09 -9.47162E-09  1.56693E-08  2.49245E-08  1.46876E-08  5.20579E-09  4.47862E-09
 13.400  1.84717E-08  2.76016E-08  1.11557E-08 -4.13402E-09 -6.00799E-09  1.26094E-08  2.06492E-08  1.34731E-08  6.27960E-09  5.28258E-09
 13.500  1.40429E-08  2.13628E-08  9.51519E-09 -1.85024E-09 -3.48371E-09  1.01649E-08  1.71121E-08  1.21779E-08  6.74356E-09  5.61277E-09
 13.600  1.06813E-08  1.65623E-08  8.11256E-09 -2.85246E-10 -1.69552E-09  8.20297E-09  1.41696E-08  1.08554E-08  6.76634E-09  5.59942E-09
 13.700  8.13132E-09  1.28635E-08  6.90219E-09  7.33153E-10 -4.73508E-10  6.62148E-09  1.17117E-08  9.55071E-09  6.48522E-09  5.34919E-09
 13.800  6.19679E-09  1.00077E-08  5.85168E-09  1.34541E-09  3.21816E-10  5.34190E-09  9.65346E-09  8.29935E-09  6.00910E-09  4.94718E-09
 13.900  4.72804E-09  7.79718E-09  4.93776E-09  1.66401E-09  8.02938E-10  4.30362E-09  7.92838E-09  7.12754E-09  5.42196E-09  4.45932E-09
 14.000  3.61147E-09  6.08125E-09  4.14316E-09  1.77735E-09  1.05890E-09  3.45963E-09  6.48356E-09  6.05284E-09  4.78654E-09  3.93502E-09
 14.100  2.76118E-09  4.74542E-09  3.45444E-09  1.75345E-09  1.15881E-09  2.77309E-09  5.27605E-09  5.08530E-09  4.14785E-09  3.40985E-09
 14.200  2.11244E-09  3.70273E-09  2.86048E-09  1.64349E-09  1.15524E-09  2.21491E-09  4.27030E-09  4.22864E-09  3.53659E-09  2.90808E-09
 14.300  1.61650E-09  2.88704E-09  2.35154E-09  1.48496E-09  1.08722E-09  1.76181E-09  3.43629E-09  3.48164E-09  2.97215E-09  2.44511E-09
 14.400  1.23669E-09  2.24792E-09  1.91871E-09  1.30445E-09  9.82981E-10  1.39495E-09  2.74834E-09  2.83935E-09  2.46530E-09  2.02943E-09
 14.500  9.45403E-10  1.74673E-09  1.55360E-09  1.12010E-09  8.62297E-10  1.09896E-09  2.18423E-09  2.29428E-09  2.02043E-09  1.66450E-09
 14.600  7.21772E-10  1.35370E-09  1.24825E-09  9.43621E-10  7.38468E-10  8.61149E-10  1.72464E-09  1.83736E-09  1.63744E-09  1.35017E-09
 14.700  5.50014E-10  1.04574E-09  9.95147E-10  7.81950E-10  6.19944E-10  6.71014E-10  1.35275E-09  1.45874E-09  1.31323E-09  1.08389E-09
 14.800  4.18125E-10  8.04843E-10  7.87223E-10  6.38607E-10  5.11645E-10  5.19814E-10  1.05395E-09  1.14843E-09  1.04285E-09  8.61637E-10
 14.900  3.16941E-10  6.16868E-10  6.17946E-10  5.14749E-10  4.15999E-10  4.00273E-10  8.15624E-10  8.96743E-10  8.20397E-10  6.78599E-10
 15.000  2.39438E-10  4.70653E-10  4.81364E-10  4.09974E-10  3.33740E-10  3.06340E-10  6.26923E-10  6.94645E-10  6.39629E-10  5.29702E-10
 15.100  1.80206E-10  3.57351E-10  3.72136E-10  3.22930E-10  2.64513E-10  2.32996E-10  4.78625E-10  5.33912E-10  4.94414E-10  4.09951E-10
 15.200  1.35066E-10  2.69933E-10  2.85543E-10  2.51752E-10  2.07315E-10  1.76103E-10  3.62946E-10  4.07255E-10  3.79009E-10  3.14667E-10
 15.300  1.00783E-10  2.02810E-10  2.17483E-10  1.94362E-10  1.60804E-10  1.32264E-10  2.73381E-10  3.08335E-10  2.88221E-10  2.39611E-10
 15.400  7.48466E-11  1.51537E-10  1.64440E-10  1.48677E-10  1.23516E-10  9.87118E-11  2.04546E-10  2.31744E-10  2.17482E-10  1.81051E-10
 15.500  5.53099E-11  1.12584E-10  1.23442E-10  1.12734E-10  9.40021E-11  7.32056E-11  1.52031E-10  1.72934E-10  1.62868E-10  1.35778E-10
 15.600  4.06627E-11  8.31619E-11  9.20095E-11  8.47625E-11  7.09149E-11  5.39479E-11  1.12257E-10  1.28145E-10  1.21075E-10  1.01083E-10
 15.700  2.97361E-11  6.10691E-11  6.81026E-11  6.32165E-11  5.30504E-11  3.95065E-11  8.23503E-11  9.43024E-11  8.93612E-11  7.47168E-11
 15.800  2.16278E-11  4.45805E-11  5.00609E-11  4.67793E-11  3.93670E-11  2.87502E-11  6.00219E-11  6.89281E-11  6.54927E-11  5.48429E-11
 15.900  1.56436E-11  3.23503E-11  3.65494E-11  3.43543E-11  2.89863E-11  2.07924E-11  4.34686E-11  5.00459E-11  4.76703E-11  3.99804E-11
 16.000  1.12519E-11  2.33352E-11  2.65063E-11  2.50440E-11  2.11826E-11  1.49444E-11  3.12817E-11  3.60983E-11  3.44647E-11  2.89505E-11
 16.100  8.04738E-12  1.67318E-11  1.90961E-11  1.81263E-11  1.53669E-11  1.06753E-11  2.23707E-11  2.58697E-11  2.47527E-11  2.08256E-11
 16.200  5.72278E-12  1.19254E-11  1.36680E-11  1.30277E-11  1.10688E-11  7.57935E-12  1.58992E-11  1.84214E-11  1.76622E-11  1.48842E-11
 16.300  4.04643E-12  8.44901E-12  9.72009E-12  9.29933E-12  7.91766E-12  5.34877E-12  1.12305E-11  1.30352E-11  1.25224E-11  1.05701E-11
 16.400  2.84475E-12  5.95048E-12  6.86869E-12  6.59357E-12  5.62528E-12  3.75204E-12  7.88465E-12  9.16676E-12  8.82242E-12  7.45934E-12
 16.500  1.98848E-12  4.16602E-12  4.82336E-12  4.64442E-12  3.97013E-12  2.61633E-12  5.50235E-12  6.40689E-12  6.17718E-12  5.23157E-12
 16.600  1.38199E-12  2.89952E-12  3.36614E-12  3.25040E-12  2.78378E-12  1.81365E-12  3.81701E-12  4.45088E-12  4.29863E-12  3.64677E-12
 16.700  9.54998E-13  2.00624E-12  2.33482E-12  2.26038E-12  1.93949E-12  1.24989E-12  2.63229E-12  3.07357E-12  2.97333E-12  2.52676E-12
 16.800  6.56175E-13  1.38008E-12  1.60969E-12  1.56211E-12  1.34278E-12  8.56376E-13  1.80468E-12  2.10992E-12  2.04438E-12  1.74033E-12
 16.900  4.48298E-13  9.43859E-13  1.10314E-12  1.07293E-12  9.23926E-13  5.83387E-13  1.23013E-12  1.43994E-12  1.39738E-12  1.19162E-12
 17.000  3.04547E-13  6.41815E-13  7.51522E-13  7.32470E-13  6.31859E-13  3.95156E-13  8.33692E-13  9.77017E-13  9.49588E-13  8.11180E-13
 17.100  2.05728E-13  4.33940E-13  5.08987E-13  4.97060E-13  4.29529E-13  2.66146E-13  5.61807E-13  6.59124E-13  6.41574E-13  5.49025E-13
 17.200  1.38197E-13  2.91731E-13  3.42729E-13  3.35320E-13  2.90261E-13  1.78250E-13  3.76459E-13  4.42143E-13  4.31000E-13  3.69479E-13
 17.300  9.23168E-14  1.95024E-13  2.29455E-13  2.24892E-13  1.95003E-13  1.18719E-13  2.50852E-13  2.94926E-13  2.87906E-13  2.47248E-13
 17.400  6.13278E-14  1.29647E-13  1.52747E-13  1.49962E-13  1.30250E-13  7.86335E-14  1.66229E-13  1.95631E-13  1.91245E-13  1.64530E-13
 17.500  4.05173E-14  8.57081E-14  1.01110E-13  9.94273E-14  8.65032E-14  5.17978E-14  1.09548E-13  1.29051E-13  1.26334E-13  1.08880E-13
 17.600  2.66224E-14  5.63490E-14  6.65566E-14  6.55506E-14  5.71251E-14  3.39351E-14  7.18011E-14  8.46642E-14  8.29965E-14  7.16582E-14
 17.700  1.73976E-14  3.68445E-14  4.35693E-14  4.29752E-14  3.75135E-14  2.21125E-14  4.68062E-14  5.52429E-14  5.42288E-14  4.69045E-14
 17.800  1.13080E-14  2.39605E-14  2.83650E-14  2.80190E-14  2.44985E-14  1.43317E-14  3.03486E-14  3.58516E-14  3.52411E-14  3.05361E-14
 17.900  7.31048E-15  1.54979E-14  1.83662E-14  1.81678E-14  1.59112E-14  9.23933E-15  1.95729E-14  2.31428E-14  2.27792E-14  1.97735E-14
 18.000  4.70098E-15  9.97062E-15  1.18278E-14  1.17162E-14  1.02778E-14  5.92496E-15  1.25566E-14  1.48598E-14  1.46458E-14  1.27362E-14
 18.100  3.00695E-15  6.38053E-15  7.57639E-15  7.51503E-15  6.60321E-15  3.77961E-15  8.01306E-15  9.49111E-15  9.36683E-15  8.16014E-15
 18.200  1.91326E-15  4.06156E-15  4.82732E-15  4.79456E-15  4.21970E-15  2.39850E-15  5.08692E-15  6.03039E-15  5.95925E-15  5.20087E-15
 18.300  1.21101E-15  2.57186E-15  3.05953E-15  3.04271E-15  2.68225E-15  1.51419E-15  3.21259E-15  3.81165E-15  3.77160E-15  3.29754E-15
 18.400  7.62531E-16  1.62006E-15  1.92896E-15  1.92080E-15  1.69601E-15  9.50998E-16  2.01843E-15  2.39682E-15  2.37471E-15  2.07995E-15
 18.500  4.77661E-16  1.01522E-15  1.20984E-15  1.20624E-15  1.06680E-15  5.94230E-16  1.26166E-15  1.49943E-15  1.48751E-15  1.30521E-15
 18.600  2.97677E-16  6.32925E-16  7.54889E-16  7.53575E-16  6.67540E-16  3.69417E-16  7.84622E-16  9.33249E-16  9.27023E-16  8.14866E-16
 18.700  1.84565E-16  3.92569E-16  4.68602E-16  4.68360E-16  4.15557E-16  2.28497E-16  4.85485E-16  5.77918E-16  5.74795E-16  5.06154E-16
 18.800  1.13853E-16  2.42251E-16  2.89404E-16  2.89605E-16  2.57369E-16  1.40623E-16  2.98884E-16  3.56076E-16  3.54603E-16  3.12812E-16
 18.900  6.98783E-17  1.48736E-16  1.77827E-16  1.78164E-16  1.58588E-16  8.61109E-17  1.83086E-16  2.18294E-16  2.17665E-16  1.92354E-16
 19.000  4.26731E-17  9.08609E-17  1.08717E-16  1.09053E-16  9.72257E-17  5.24683E-17  1.11594E-16  1.33160E-16  1.32944E-16  1.17692E-16
 19.100  2.59295E-17  5.52284E-17  6.61329E-17  6.64153E-17  5.93070E-17  3.18116E-17  6.76825E-17  8.08260E-17  8.07956E-17  7.16525E-17
 19.200  1.56773E-17  3.34029E-17  4.00284E-17  4.02463E-17  3.59962E-17  1.91926E-17  4.08479E-17  4.88185E-17  4.88610E-17  4.34078E-17
 19.300  9.43187E-18  2.01026E-17  2.41081E-17  2.42674E-17  2.17393E-17  1.15227E-17  2.45320E-17  2.93417E-17  2.94037E-17  2.61677E-17
 19.400  5.64658E-18  1.20387E-17  1.44481E-17  1.45604E-17  1.30642E-17  6.88419E-18  1.46614E-17  1.75495E-17  1.76083E-17  1.56977E-17
  67 138 195   0.100
  0.000  6.99268E-02 -3.56864E-16 -6.03684E-16 -4.25315E-16 -1.94547E-15  7.79421E-02 -4.03412E-16 -6.45317E-16 -5.37899E-16 -1.71659E-15
  0.100  6.99321E-02 -3.75191E-05 -1.90612E-08 -1.46431E-12  4.57757E-16  7.79657E-02 -2.45397E-05 -6.73204E-08 -7.26466E-12 -1.04426E-15
  0.200  6.99479E-02 -1.48061E-04 -3.02698E-07 -9.49911E-11  3.51672E-13  7.80358E-02 -9.66779E-05 -1.06780E-06 -4.64314E-10  1.41132E-13
  0.300  6.99746E-02 -3.25682E-04 -1.51328E-06 -1.10660E-09  8.79780E-12  7.81509E-02 -2.12051E-04 -5.32772E-06 -5.27683E-09  3.43144E-12
  0.400  7.00127E-02 -5.60820E-04 -4.69889E-06 -6.40217E-09  8.46740E-11  7.83083E-02 -3.63648E-04 -1.64978E-05 -2.95467E-08  3.16772E-11
  0.500  7.00628E-02 -8.40782E-04 -1.12121E-05 -2.52707E-08  4.80785E-10  7.85041E-02 -5.42189E-04 -3.92285E-05 -1.12162E-07  1.69509E-10
  0.600  7.01254E-02 -1.15040E-03 -2.26014E-05 -7.83045E-08  1.94604E-09  7.87338E-02 -7.36618E-04 -7.87455E-05 -3.32698E-07  6.31576E-10
  0.700  7.02010E-02 -1.47279E-03 -4.04805E-05 -2.05087E-07  6.20823E-09  7.89919E-02 -9.34696E-04 -1.40352E-04 -8.31623E-07  1.79284E-09
  0.800  7.02900E-02 -1.79024E-03 -6.63818E-05 -4.74185E-07  1.65647E-08  7.92722E-02 -1.12365E-03 -2.28891E-04 -1.83224E-06  4.03317E-09
  0.900  7.03925E-02 -2.08506E-03 -1.01602E-04 -9.94926E-07  3.83807E-08  7.95680E-02 -1.29084E-03 -3.48206E-04 -3.66206E-06  7.13942E-09
  1.000  7.05081E-02 -2.34048E-03 -1.47046E-04 -1.92983E-06  7.91539E-08  7.98723E-02 -1.42444E-03 -5.00636E-04 -6.77066E-06  8.90605E-09
  1.100  7.06363E-02 -2.54149E-03 -2.03088E-04 -3.50585E-06  1.47687E-07  8.01779E-02 -1.51403E-03 -6.86580E-04 -1.17405E-05  2.51214E-09
  1.200  7.07759E-02 -2.67558E-03 -2.69440E-04 -6.02204E-06  2.51842E-07  8.04776E-02 -1.55117E-03 -9.04173E-04 -1.92867E-05 -2.77374E-08
  1.300  7.09257E-02 -2.73331E-03 -3.45063E-04 -9.85081E-06  3.94390E-07  8.07646E-02 -1.52984E-03 -1.14910E-03 -3.02423E-05 -1.12606E-07
  1.400  7.10837E-02 -2.70880E-03 -4.28112E-04 -1.54300E-05  5.66605E-07  8.10326E-02 -1.44675E-03 -1.41454E-03 -4.55255E-05 -3.06121E-07
  1.500  7.12478E-02 -2.60003E-03 -5.15928E-04 -2.32432E-05  7.39520E-07  8.12760E-02 -1.30154E-03 -1.69136E-03 -6.60874E-05 -6.95490E-07
  1.600  7.14158E-02 -2.40887E-03 -6.05085E-04 -3.37865E-05  8.53168E-07  8.14902E-02 -1.09683E-03 -1.96837E-03 -9.28390E-05 -1.41201E-06
  1.700  7.15853E-02 -2.14106E-03 -6.91503E-04 -4.75214E-05  8.04551E-07  8.16715E-02 -8.38149E-04 -2.23283E-03 -1.26561E-04 -2.64177E-06
  1.800  7.17539E-02 -1.80590E-03 -7.70613E-04 -6.48149E-05  4.35626E-07  8.18176E-02 -5.33642E-04 -2.47110E-03 -1.67797E-04 -4.63442E-06
  1.900  7.19193E-02 -1.41582E-03 -8.37584E-04 -8.58691E-05 -4.77009E-07  8.19273E-02 -1.93740E-04 -2.66935E-03 -2.16748E-04 -7.70805E-06
  2.000  7.20795E-02 -9.85769E-04 -8.87606E-04 -1.10646E-04 -2.22868E-06  8.20008E-02  1.69346E-04 -2.81443E-03 -2.73154E-04 -1.22479E-05
  2.100  7.22326E-02 -5.32489E-04 -9.16205E-04 -1.38796E-04 -5.18728E-06  8.20392E-02  5.42230E-04 -2.89471E-03 -3.36208E-04 -1.86969E-05
  2.200  7.23772E-02 -7.36918E-05 -9.19591E-04 -1.69588E-04 -9.78598E-06  8.20448E-02  9.11022E-04 -2.90091E-03 -4.04480E-04 -2.75361E-05
  2.300  7.25119E-02  3.72848E-04 -8.95006E-04 -2.01869E-04 -1.65063E-05  8.20204E-02  1.26208E-03 -2.82690E-03 -4.75882E-04 -3.92544E-05
  2.400  7.26357E-02  7.90220E-04 -8.41059E-04 -2.34039E-04 -2.58509E-05  8.19692E-02  1.58274E-03 -2.67031E-03 -5.47687E-04 -5.43079E-05
  2.500  7.27476E-02  1.16330E-03 -7.58012E-04 -2.64070E-04 -3.83058E-05  8.18949E-02  1.86213E-03 -2.43301E-03 -6.16592E-04 -7.30692E-05
  2.600  7.28463E-02  1.47963E-03 -6.47996E-04 -2.89557E-04 -5.42940E-05  8.18002E-02  2.09182E-03 -2.12132E-03 -6.78847E-04 -9.57713E-05
  2.700  7.29306E-02  1.73017E-03 -5.15142E-04 -3.07816E-04 -7.41222E-05  8.16877E-02  2.26652E-03 -1.74603E-03 -7.30438E-04 -1.22449E-04
  2.800  7.29983E-02  1.90997E-03 -3.65581E-04 -3.16028E-04 -9.79262E-05  8.15585E-02  2.38452E-03 -1.32208E-03 -7.67318E-04 -1.52883E-04
  2.900  7.30468E-02  2.01860E-03 -2.07326E-04 -3.11413E-04 -1.25618E-04  8.14123E-02  2.44815E-03 -8.68040E-04 -7.85682E-04 -1.86555E-04
  3.000  7.30725E-02  2.06046E-03 -5.00085E-05 -2.91437E-04 -1.56840E-04  8.12471E-02  2.46386E-03 -4.05286E-04 -7.82256E-04 -2.22617E-04
  3.100  7.30704E-02  2.04474E-03  9.55242E-05 -2.54037E-04 -1.90938E-04  8.10591E-02  2.44228E-03  4.30148E-05 -7.54591E-04 -2.59886E-04
  3.200  7.30348E-02  1.98524E-03  2.17734E-04 -1.97842E-04 -2.26947E-04  8.08420E-02  2.39789E-03  4.53091E-04 -7.01326E-04 -2.96855E-04
  3.300  7.29581E-02  1.89985E-03  3.05019E-04 -1.22370E-04 -2.63602E-04  8.05880E-02  2.34859E-03  8.01854E-04 -6.22409E-04 -3.31746E-04
  3.400  7.28320E-02  1.80989E-03  3.46415E-04 -2.81945E-05 -2.99380E-04  8.02870E-02  2.31497E-03  1.06820E-03 -5.19242E-04 -3.62586E-04
  3.500  7.26466E-02  1.73909E-03  3.32319E-04  8.29491E-05 -3.32564E-04  7.99275E-02  2.31943E-03  1.23430E-03 -3.94734E-04 -3.87302E-04
  3.600  7.23915E-02  1.71250E-03  2.55192E-04  2.08135E-04 -3.61326E-04  7.94965E-02  2.38508E-03  1.28665E-03 -2.53258E-04 -4.03851E-04
  3.700  7.20553E-02  1.75525E-03  1.10196E-04  3.43294E-04 -3.83842E-04  7.89804E-02  2.53457E-03  1.21705E-03 -1.00490E-04 -4.10353E-04
  3.800  7.16266E-02  1.89119E-03 -1.04297E-04  4.83354E-04 -3.98404E-04  7.83651E-02  2.78890E-03  1.02318E-03  5.68460E-05 -4.05229E-04
  3.900  7.10937E-02  2.14159E-03 -3.86356E-04  6.22459E-04 -4.03548E-04  7.76369E-02  3.16609E-03  7.08920E-04  2.11329E-04 -3.87333E-04
  4.000  7.04456E-02  2.52386E-03 -7.30348E-04  7.54269E-04 -3.98168E-04  7.67827E-02  3.68013E-03  2.84281E-04  3.55262E-04 -3.56062E-04
  4.100  6.96722E-02  3.05046E-03 -1.12701E-03  8.72310E-04 -3.81616E-04  7.57908E-02  4.33992E-03 -2.34991E-04  4.81136E-04 -3.11435E-04
  4.200  6.87645E-02  3.72804E-03 -1.56376E-03  9.70362E-04 -3.53772E-04  7.46512E-02  5.14848E-03 -8.28182E-04  5.82095E-04 -2.54139E-04
  4.300  6.77151E-02  4.55672E-03 -2.02523E-03  1.04285E-03 -3.15088E-04  7.33559E-02  6.10246E-03 -1.47065E-03  6.52382E-04 -1.85520E-04
  4.400  6.65186E-02  5.52986E-03 -2.49396E-03  1.08522E-03 -2.66584E-04  7.18997E-02  7.19188E-03 -2.13510E-03  6.87723E-04 -1.07542E-04
  4.500  6.51717E-02  6.63405E-03 -2.95130E-03  1.09422E-03 -2.09813E-04  7.02798E-02  8.40024E-03 -2.79304E-03  6.85617E-04 -2.26928E-05
  4.600  6.36733E-02  7.84945E-03 -3.37839E-03  1.06821E-03 -1.46778E-04  6.84962E-02  9.70497E-03 -3.41626E-03  6.45516E-04  6.61487E-05
  4.700  6.20245E-02  9.15048E-03 -3.75711E-03  1.00721E-03 -7.98266E-05  6.65520E-02  1.10782E-02 -3.97827E-03  5.68871E-04  1.55866E-04
  4.800  6.02290E-02  1.05068E-02 -4.07110E-03  9.13006E-04 -1.15096E-05  6.44528E-02  1.24877E-02 -4.45571E-03  4.59055E-04  2.43285E-04
  4.900  5.82929E-02  1.18846E-02 -4.30665E-03  7.89010E-04  5.55658E-05  6.22069E-02  1.38984E-02 -4.82943E-03  3.21153E-04  3.25348E-04
  5.000  5.62243E-02  1.32479E-02 -4.45338E-03  6.40108E-04  1.18891E-04  5.98253E-02  1.52733E-02 -5.08539E-03  1.61641E-04  3.99288E-04
  5.100  5.40336E-02  1.45600E-02 -4.50480E-03  4.72350E-04  1.76201E-04  5.73208E-02  1.65758E-02 -5.21518E-03 -1.20124E-05  4.62774E-04
  5.200  5.17330E-02  1.57853E-02 -4.45859E-03  2.92602E-04  2.25600E-04  5.47088E-02  1.77702E-02 -5.21628E-03 -1.91807E-04  5.14026E-04
  5.300  4.93365E-02  1.68903E-02 -4.31667E-03  1.08140E-04  2.65654E-04  5.20058E-02  1.88241E-02 -5.09192E-03 -3.69684E-04  5.51892E-04
  5.400  4.68598E-02  1.78454E-02 -4.08497E-03 -7.37660E-05  2.95457E-04  4.92303E-02  1.97092E-02 -4.85062E-03 -5.37992E-04  5.75876E-04
  5.500  4.43197E-02  1.86258E-02 -3.77304E-03 -2.46254E-04  3.14654E-04  4.64013E-02  2.04024E-02 -4.50553E-03 -6.89898E-04  5.86130E-04
  5.600  4.17338E-02  1.92124E-02 -3.39343E-03 -4.03231E-04  3.23420E-04  4.35392E-02  2.08868E-02 -4.07344E-03 -8.19733E-04  5.83402E-04
  5.700  3.91209E-02  1.95923E-02 -2.96093E-03 -5.39665E-04  3.22421E-04  4.06644E-02  2.11520E-02 -3.57379E-03 -9.23238E-04  5.68944E-04
  5.800  3.64997E-02  1.97594E-02 -2.49176E-03 -6.51794E-04  3.12728E-04  3.77976E-02  2.11946E-02 -3.02747E-03 -9.97708E-04  5.44410E-04
  5.900  3.38894E-02  1.97142E-02 -2.00268E-03 -7.37245E-04  2.95723E-04  3.49591E-02  2.10178E-02 -2.45576E-03 -1.04203E-03  5.11721E-04
  6.000  3.13086E-02  1.94633E-02 -1.51015E-03 -7.95057E-04  2.72991E-04  3.21687E-02  2.06312E-02 -1.87921E-03 -1.05661E-03  4.72938E-04
  6.100  2.87755E-02  1.90192E-02 -1.02959E-03 -8.25614E-04  2.46202E-04  2.94455E-02  2.00501E-02 -1.31675E-03 -1.04323E-03  4.30135E-04
  6.200  2.63074E-02  1.83993E-02 -5.74683E-04 -8.30504E-04  2.17010E-04  2.68068E-02  1.92945E-02 -7.84965E-04 -1.00481E-03  3.85288E-04
  6.300  2.39202E-02  1.76249E-02 -1.56931E-04 -8.12315E-04  1.86957E-04  2.42689E-02  1.83882E-02 -2.97494E-04 -9.45152E-04  3.40177E-04
  6.400  2.16284E-02  1.67205E-02  2.14715E-04 -7.74392E-04  1.57401E-04  2.18457E-02  1.73578E-02  1.35254E-04 -8.68625E-04  2.96325E-04
  6.500  1.94446E-02  1.57121E-02  5.34010E-04 -7.20575E-04  1.29462E-04  1.95495E-02  1.62312E-02  5.06237E-04 -7.79873E-04  2.54948E-04
  6.600  1.73796E-02  1.46267E-02  7.97413E-04 -6.54936E-04  1.03990E-04  1.73899E-02  1.50369E-02  8.11707E-04 -6.83533E-04  2.16942E-04
  6.700  1.54417E-02  1.34910E-02  1.00395E-03 -5.81533E-04  8.15632E-05  1.53744E-02  1.38027E-02  1.05096E-03 -5.83992E-04  1.82886E-04
  6.800  1.36371E-02  1.23306E-02  1.15495E-03 -5.04198E-04  6.24947E-05  1.35080E-02  1.25547E-02  1.22598E-03 -4.85183E-04  1.53068E-04
  6.900  1.19699E-02  1.11692E-02  1.25367E-03 -4.26370E-04  4.68616E-05  1.17931E-02  1.13171E-02  1.34097E-03 -3.90445E-04  1.27524E-04
  7.000  1.04416E-02  1.00278E-02  1.30494E-03 -3.50969E-04  3.45438E-05  1.02300E-02  1.01107E-02  1.40180E-03 -3.02435E-04  1.06082E-04
  7.100  9.05179E-03  8.92461E-03  1.31464E-03 -2.80325E-04  2.52686E-05  8.81660E-03  8.95352E-03  1.41556E-03 -2.23093E-04  8.84216E-05
  7.200  7.79797E-03  7.87454E-03  1.28935E-03 -2.16155E-04  1.86582E-05  7.54888E-03  7.85979E-03  1.38997E-03 -1.53657E-04  7.41170E-05
  7.300  6.67588E-03  6.88920E-03  1.23592E-03 -1.59574E-04  1.42745E-05  6.42108E-03  6.84037E-03  1.33295E-03 -9.47174E-05  6.26904E-05
  7.400  5.67974E-03  5.97699E-03  1.16109E-03 -1.11148E-04  1.16598E-05  5.42594E-03  5.90269E-03  1.25223E-03 -4.62998E-05  5.36502E-05
  7.500  4.80250E-03  5.14319E-03  1.07124E-03 -7.09606E-05  1.03700E-05  4.55506E-03  5.05100E-03  1.15503E-03 -7.96614E-06  4.65243E-05
  7.600  4.03615E-03  4.39031E-03  9.72129E-04 -3.87096E-05  1.00003E-05  3.79917E-03  4.28673E-03  1.04782E-03  2.10740E-05  4.08837E-05
  7.700  3.37201E-03  3.71839E-03  8.68789E-04 -1.37953E-05  1.02014E-05  3.14848E-03  3.60887E-03  9.36163E-04  4.18533E-05  3.63570E-05
  7.800  2.80098E-03  3.12544E-03  7.65401E-04  4.58351E-06  1.06894E-05  2.59291E-03  3.01437E-03  8.24645E-04  5.55433E-05  3.26381E-05
  7.900  2.31383E-03  2.60783E-03  6.65288E-04  1.73438E-05  1.12477E-05  2.12241E-03  2.49866E-03  7.16875E-04  6.33653E-05  2.94866E-05
  8.000  1.90143E-03  2.16068E-03  5.70941E-04  2.54432E-05  1.17238E-05  1.72715E-03  2.05598E-03  6.15517E-04  6.65155E-05  2.67237E-05
  8.100  1.55492E-03  1.77830E-03  4.84075E-04  2.98193E-05  1.20225E-05  1.39770E-03  1.67987E-03  5.22380E-04  6.61093E-05  2.42245E-05
  8.200  1.26588E-03  1.45445E-03  4.05729E-04  3.13445E-05  1.20965E-05  1.12524E-03  1.36346E-03  4.38526E-04  6.31424E-05  2.19089E-05
  8.300  1.02648E-03  1.18272E-03  3.36366E-04  3.07944E-05  1.19354E-05  9.01583E-04  1.09980E-03  3.64396E-04  5.84678E-05  1.97311E-05
  8.400  8.29497E-04  9.56753E-04  2.75987E-04  2.88312E-05  1.15558E-05  7.19324E-04  8.82089E-04  2.99939E-04  5.27879E-05  1.76706E-05
  8.500  6.68443E-04  7.70419E-04  2.24244E-04  2.59971E-05  1.09913E-05  5.71821E-04  7.03889E-04  2.44735E-04  4.66562E-05  1.57231E-05
  8.600  5.37528E-04  6.17987E-04  1.80542E-04  2.27176E-05  1.02846E-05  4.53219E-04  5.59224E-04  1.98110E-04  4.04883E-05  1.38935E-05
  8.700  4.31672E-04  4.94210E-04  1.44128E-04  1.93108E-05  9.48072E-06  3.58426E-04  4.42687E-04  1.59233E-04  3.45781E-05  1.21908E-05
  8.800  3.46476E-04  3.94381E-04  1.14168E-04  1.60008E-05  8.62263E-06  2.83074E-04  3.49475E-04  1.27196E-04  2.91170E-05  1.06236E-05
  8.900  2.78179E-04  3.14356E-04  8.98084E-05  1.29336E-05  7.74795E-06  2.23461E-04  2.75399E-04  1.01077E-04  2.42135E-05  9.19840E-06
  9.000  2.23602E-04  2.50548E-04  7.02184E-05  1.01929E-05  6.88731E-06  1.76489E-04  2.16863E-04  7.99894E-05  1.99126E-05  7.91773E-06
  9.100  1.80090E-04  1.99896E-04  5.46238E-05  7.81514E-06  6.06390E-06  1.39595E-04  1.70832E-04  6.31100E-05  1.62135E-05  6.78016E-06
  9.200  1.45448E-04  1.59829E-04  4.23250E-05  5.80314E-06  5.29367E-06  1.10681E-04  1.34773E-04  4.97006E-05  1.30840E-05  5.78048E-06
  9.300  1.17880E-04  1.28213E-04  3.27075E-05  4.13742E-06  4.58623E-06  8.80489E-05  1.06607E-04  3.91152E-05  1.04733E-05  4.91039E-06
  9.400  9.59276E-05  1.03299E-04  2.52433E-05  2.78523E-06  3.94591E-06  7.03376E-05  8.46450E-05  3.08018E-05  8.32057E-06  4.15937E-06
  9.500  7.84204E-05  8.36671E-05  1.94887E-05  1.70740E-06  3.37303E-06  5.64639E-05  6.75289E-05  2.42975E-05  6.56266E-06  3.51551E-06
  9.600  6.44218E-05  6.81800E-05  1.50767E-05  8.63225E-07  2.86505E-06  4.55740E-05  5.41798E-05  1.92212E-05  5.13829E-06  2.96636E-06
  9.700  5.31894E-05  5.59311E-05  1.17091E-05  2.13686E-07  2.41757E-06  3.69990E-05  4.37473E-05  1.52634E-05  3.99112E-06  2.49959E-06
  9.800  4.41368E-05  4.62050E-05  9.14651E-06 -2.76661E-07  2.02523E-06  3.02182E-05  3.55663E-05  1.21765E-05  3.07129E-06  2.10351E-06
  9.900  3.68034E-05  3.84406E-05  7.19951E-06 -6.38768E-07  1.68232E-06  2.48281E-05  2.91202E-05  9.76406E-06  2.33594E-06  1.76737E-06
 10.000  3.08279E-05  3.22006E-05  5.71955E-06 -8.98863E-07  1.38323E-06  2.05171E-05  2.40101E-05  7.87233E-06  1.74912E-06  1.48164E-06
 10.100  2.59282E-05  2.71455E-05  4.59140E-06 -1.07866E-06  1.12276E-06  1.70455E-05  1.99294E-05  6.38152E-06  1.28121E-06  1.23806E-06
 10.200  2.18839E-05  2.30133E-05  3.72645E-06 -1.19580E-06  8.96261E-07  1.42287E-05  1.66430E-05  5.19908E-06  9.08264E-07  1.02964E-06
 10.300  1.85228E-05  1.96024E-05  3.05718E-06 -1.26443E-06  6.99711E-07  1.19255E-05  1.39718E-05  4.25392E-06  6.11090E-07  8.50580E-07
 10.400  1.57109E-05  1.67581E-05  2.53261E-06 -1.29574E-06  5.29674E-07  1.00270E-05  1.17790E-05  3.49170E-06  3.74520E-07  6.96170E-07
 10.500  1.33432E-05  1.43622E-05  2.11464E-06 -1.29855E-06  3.83259E-07  8.44995E-06  9.96103E-06  2.87113E-06  1.86641E-07  5.62651E-07
 10.600  1.13379E-05  1.23246E-05  1.77518E-06 -1.27972E-06  2.58031E-07  7.13018E-06  8.43915E-06  2.36096E-06  3.81566E-08  4.47060E-07
 10.700  9.63055E-06  1.05770E-05  1.49381E-06 -1.24461E-06  1.51925E-07  6.01837E-06  7.15383E-06  1.93770E-06 -7.81729E-08  3.47091E-07
 10.800  8.17083E-06  9.06721E-06  1.25598E-06 -1.19737E-06  6.31566E-08  5.07646E-06  6.06005E-06  1.58377E-06 -1.67984E-07  2.60946E-07
 10.900  6.91880E-06  7.75589E-06  1.05157E-06 -1.14121E-06 -9.85515E-09  4.27497E-06  5.12369E-06  1.28604E-06 -2.35691E-07  1.87217E-07
 11.000  5.84275E-06  6.61286E-06  8.73695E-07 -1.07864E-06 -6.85517E-08  3.59089E-06  4.31884E-06  1.03475E-06 -2.84790E-07  1.24768E-07
 11.100  4.91720E-06  5.61493E-06  7.17831E-07 -1.01161E-06 -1.14287E-07  3.00613E-06  3.62560E-06  8.22591E-07 -3.18100E-07  7.26495E-08
 11.200  4.12148E-06  4.74394E-06  5.81072E-07 -9.41671E-07 -1.48362E-07  2.50627E-06  3.02849E-06  6.44020E-07 -3.37959E-07  3.00172E-08
 11.300  3.43851E-06  3.98531E-06  4.61564E-07 -8.70085E-07 -1.72051E-07  2.07960E-06  2.51521E-06  4.94714E-07 -3.46363E-07 -3.92027E-09
 11.400  2.85394E-06  3.32698E-06  3.58077E-07 -7.97891E-07 -1.86610E-07  1.71646E-06  2.07565E-06  3.71176E-07 -3.45076E-07 -2.99425E-08
 11.500  2.35555E-06  2.75861E-06  2.69688E-07 -7.25983E-07 -1.93277E-07  1.40869E-06  1.70130E-06  2.70436E-07 -3.35702E-07 -4.88405E-08
 11.600  1.93268E-06  2.27104E-06  1.95556E-07 -6.55141E-07 -1.93271E-07  1.14924E-06  1.38469E-06  1.89846E-07 -3.19732E-07 -6.14266E-08
 11.700  1.57593E-06  1.85587E-06  1.34793E-07 -5.86067E-07 -1.87773E-07  9.31914E-07  1.11912E-06  1.26951E-07 -2.98567E-07 -6.85336E-08
 11.800  1.27689E-06  1.50530E-06  8.63856E-08 -5.19392E-07 -1.77918E-07  7.51197E-07  8.98436E-07  7.94170E-08 -2.73530E-07 -7.10050E-08
 11.900  1.02800E-06  1.21195E-06  4.91769E-08 -4.55685E-07 -1.64774E-07  6.02119E-07  7.16933E-07  4.49994E-08 -2.45854E-07 -6.96791E-08
 12.000  8.22425E-07  9.68852E-07  2.18818E-08 -3.95445E-07 -1.49325E-07  4.80192E-07  5.69292E-07  2.15476E-08 -2.16675E-07 -6.53713E-08
 12.100  6.53983E-07  7.69436E-07  3.12644E-09 -3.39098E-07 -1.32460E-07  3.81363E-07  4.50581E-07  7.02321E-09 -1.87015E-07 -5.88539E-08
 12.200  5.17116E-07  6.07563E-07 -8.50039E-09 -2.86984E-07 -1.14960E-07  3.01988E-07  3.56262E-07 -4.69946E-10 -1.57768E-07 -5.08392E-08
 12.300  4.06851E-07  4.77560E-07 -1.43918E-08 -2.39353E-07 -9.74905E-08  2.38819E-07  2.82213E-07 -2.65649E-09 -1.29690E-07 -4.19633E-08
 12.400  3.18778E-07  3.74265E-07 -1.58716E-08 -1.96357E-07 -8.05978E-08  1.88993E-07  2.24745E-07 -1.06370E-09 -1.03386E-07 -3.27760E-08
 12.500  2.49024E-07  2.93045E-07 -1.41514E-08 -1.58051E-07 -6.47102E-08  1.50012E-07  1.80612E-07  2.99603E-09 -7.93129E-08 -2.37335E-08
 12.600  1.94229E-07  2.29814E-07 -1.02988E-08 -1.24393E-07 -5.01429E-08  1.19732E-07  1.47013E-07  8.43301E-09 -5.77843E-08 -1.51967E-08
 12.700  1.51514E-07  1.81030E-07 -5.21827E-09 -9.52535E-08 -3.71061E-08  9.63361E-08  1.21575E-07  1.43783E-08 -3.89768E-08 -7.43338E-09
 12.800  1.18440E-07  1.43672E-07  3.57225E-10 -7.04230E-08 -2.57159E-08  7.83131E-08  1.02332E-07  2.01729E-08 -2.29461E-08 -6.23954E-10
 12.900  9.29737E-08  1.15214E-07  5.86306E-09 -4.96275E-08 -1.60070E-08  6.44248E-08  8.76909E-08  2.53489E-08 -9.64393E-09  5.12939E-09
 13.000  7.34425E-08  9.35816E-08  1.08921E-08 -3.25414E-08 -7.94726E-09  5.36757E-08  7.63914E-08  2.96064E-08  1.06286E-09  9.79192E-09
 13.100  5.84891E-08  7.71037E-08  1.51776E-08 -1.88041E-08 -1.45115E-09  4.52799E-08  6.74639E-08  3.27867E-08  9.37195E-09  1.33843E-08
 13.200  4.70296E-08  6.44608E-08  1.85719E-08 -8.03462E-09  3.60574E-09  3.86296E-08  6.01837E-08  3.48442E-08  1.55262E-08  1.59702E-08
 13.300  3.82114E-08  5.46325E-08  2.10245E-08  1.53650E-10  7.37404E-09  3.32641E-08  5.40275E-08  3.58190E-08  1.97952E-08  1.76442E-08
 13.400  3.13738E-08  4.68476E-08  2.25585E-08  6.14064E-09  1.00191E-08  2.88423E-08  4.86329E-08  3.58122E-08  2.24596E-08  1.85209E-08
 13.500  2.60132E-08  4.05362E-08  2.32500E-08  1.02890E-08  1.17110E-08  2.51171E-08  4.37611E-08  3.49633E-08  2.37973E-08  1.87251E-08
 13.600  2.17515E-08  3.52881E-08  2.32090E-08  1.29358E-08  1.26169E-08  2.19141E-08  3.92658E-08  3.34314E-08  2.40730E-08  1.83836E-08
 13.700  1.83093E-08  3.08157E-08  2.25636E-08  1.43871E-08  1.28946E-08  1.91131E-08  3.50659E-08  3.13806E-08  2.35302E-08  1.76189E-08
 13.800  1.54829E-08  2.69232E-08  2.14473E-08  1.49136E-08  1.26881E-08  1.66333E-08  3.11239E-08  2.89684E-08  2.23860E-08  1.65445E-08
 13.900  1.31259E-08  2.34814E-08  1.99890E-08  1.47501E-08  1.21254E-08  1.44213E-08  2.74295E-08  2.63380E-08  2.08283E-08  1.52614E-08
 14.000  1.11340E-08  2.04070E-08  1.83068E-08  1.40947E-08  1.13163E-08  1.24422E-08  2.39869E-08  2.36134E-08  1.90147E-08  1.38567E-08
 14.100  9.43342E-09  1.76478E-08  1.65038E-08  1.31112E-08  1.03527E-08  1.06724E-08  2.08057E-08  2.08972E-08  1.70735E-08  1.24023E-08
 14.200  7.97146E-09  1.51708E-08  1.46655E-08  1.19308E-08  9.30905E-09  9.09540E-09  1.78955E-08  1.82699E-08  1.51054E-08  1.09560E-08
 14.300  6.71022E-09  1.29543E-08  1.28598E-08  1.06562E-08  8.24372E-09  7.69791E-09  1.52620E-08  1.57914E-08  1.31862E-08  9.56143E-09
 14.400  5.62150E-09  1.09820E-08  1.11379E-08  9.36449E-09  7.20051E-09  6.46820E-09  1.29057E-08  1.35022E-08  1.13700E-08  8.25020E-09
 14.500  4.68345E-09  9.24003E-09  9.53536E-09  8.11145E-09  6.21068E-09  5.39473E-09  1.08213E-08  1.14268E-08  9.69256E-09  7.04314E-09
 14.600  3.87831E-09  7.71437E-09  8.07472E-09  6.93498E-09  5.29496E-09  4.46569E-09  8.99790E-09  9.57596E-09  8.17469E-09  5.95214E-09
 14.700  3.19087E-09  6.39032E-09  6.76737E-09  5.85863E-09  4.46552E-09  3.66879E-09  7.42034E-09  7.94990E-09  6.82531E-09  4.98190E-09
 14.800  2.60765E-09  5.25205E-09  5.61605E-09  4.89475E-09  3.72773E-09  2.99144E-09  6.06997E-09  6.54067E-09  5.64437E-09  4.13156E-09
 14.900  2.11634E-09  4.28284E-09  4.61688E-09  4.04723E-09  3.08187E-09  2.42090E-09  4.92600E-09  5.33465E-09  4.62533E-09  3.39617E-09
 15.000  1.70559E-09  3.46545E-09  3.76131E-09  3.31388E-09  2.52454E-09  1.94467E-09  3.96657E-09  4.31461E-09  3.75724E-09  2.76797E-09
 15.100  1.36487E-09  2.78260E-09  3.03773E-09  2.68834E-09  2.04984E-09  1.55069E-09  3.16967E-09  3.46134E-09  3.02650E-09  2.23746E-09
 15.200  1.08451E-09  2.21744E-09  2.43284E-09  2.16165E-09  1.65035E-09  1.22760E-09  2.51396E-09  2.75500E-09  2.41816E-09  1.79425E-09
 15.300  8.55692E-10  1.75392E-09  1.93263E-09  1.72346E-09  1.31790E-09  9.64906E-10  1.97930E-09  2.17604E-09  1.91697E-09  1.42772E-09
 15.400  6.70437E-10  1.37716E-09  1.52321E-09  1.36292E-09  1.04414E-09  7.53110E-10  1.54717E-09  1.70596E-09  1.50812E-09  1.12752E-09
 15.500  5.21656E-10  1.07355E-09  1.19138E-09  1.06933E-09  8.20927E-10  5.83746E-10  1.20087E-09  1.32772E-09  1.17770E-09  8.83928E-10
 15.600  4.03114E-10  8.30958E-10  9.24918E-10  8.32613E-10  6.40640E-10  4.49397E-10  9.25649E-10  1.02602E-09  9.13056E-10  6.88003E-10
 15.700  3.09405E-10  6.38719E-10  7.12857E-10  6.43508E-10  4.96330E-10  3.43654E-10  7.08663E-10  7.87378E-10  7.02908E-10  5.31760E-10
 15.800  2.35894E-10  4.87602E-10  5.45534E-10  4.93779E-10  3.81814E-10  2.61063E-10  5.38929E-10  6.00141E-10  5.37411E-10  4.08185E-10
 15.900  1.78664E-10  3.69739E-10  4.14602E-10  3.76235E-10  2.91693E-10  1.97036E-10  4.07165E-10  4.54385E-10  4.08119E-10  3.11224E-10
 16.000  1.34439E-10  2.78516E-10  3.12963E-10  2.84710E-10  2.21339E-10  1.47763E-10  3.05635E-10  3.41783E-10  3.07890E-10  2.35732E-10
 16.100  1.00513E-10  2.08436E-10  2.34675E-10  2.14009E-10  1.66842E-10  1.10115E-10  2.27970E-10  2.55437E-10  2.30774E-10  1.77396E-10
 16.200  7.46738E-11  1.54993E-10  1.74826E-10  1.59809E-10  1.24946E-10  8.15508E-11  1.68980E-10  1.89701E-10  1.71875E-10  1.32647E-10
 16.300  5.51311E-11  1.14527E-10  1.29409E-10  1.18569E-10  9.29732E-11  6.00272E-11  1.24484E-10  1.40009E-10  1.27210E-10  9.85658E-11
 16.400  4.04526E-11  8.41019E-11  9.51889E-11  8.74159E-11  6.87481E-11  4.39181E-11  9.11503E-11  1.02703E-10  9.35729E-11  7.27894E-11
 16.500  2.95021E-11  6.13818E-11  6.95855E-11  6.40479E-11  5.05212E-11  3.19411E-11  6.63439E-11  7.48845E-11  6.84140E-11  5.34274E-11
 16.600  2.13870E-11  4.45296E-11  5.05595E-11  4.66401E-11  3.69009E-11  2.30940E-11  4.80040E-11  5.42773E-11  4.97214E-11  3.89808E-11
 16.700  1.54125E-11  3.21122E-11  3.65156E-11  3.37595E-11  2.67910E-11  1.66007E-11  3.45321E-11  3.91108E-11  3.59236E-11  2.82725E-11
 16.800  1.10421E-11  2.30216E-11  2.62169E-11  2.42913E-11  1.93360E-11  1.18648E-11  2.46983E-11  2.80196E-11  2.58042E-11  2.03862E-11
 16.900  7.86530E-12  1.64089E-11  1.87132E-11  1.73764E-11  1.38740E-11  8.43195E-12  1.75647E-11  1.99593E-11  1.84291E-11  1.46149E-11
 17.000  5.57054E-12  1.16287E-11  1.32804E-11  1.23583E-11  9.89754E-12  5.95884E-12  1.24215E-11  1.41376E-11  1.30874E-11  1.04179E-11
 17.100  3.92305E-12  8.19450E-12  9.37133E-12  8.73935E-12  7.02059E-12  4.18781E-12  8.73562E-12  9.95827E-12  9.24206E-12  7.38427E-12
 17.200  2.74741E-12  5.74222E-12  6.57580E-12  6.14539E-12  4.95186E-12  2.92705E-12  6.10977E-12  6.97580E-12  6.49044E-12  5.20489E-12
 17.300  1.91347E-12  4.00157E-12  4.58861E-12  4.29733E-12  3.47328E-12  2.03476E-12  4.25005E-12  4.85996E-12  4.53311E-12  3.64851E-12
 17.400  1.32539E-12  2.77333E-12  3.18439E-12  2.98851E-12  2.42278E-12  1.40690E-12  2.94052E-12  3.36763E-12  3.14891E-12  2.54357E-12
 17.500  9.13093E-13  1.91168E-12  2.19790E-12  2.06700E-12  1.68079E-12  9.67612E-13  2.02367E-12  2.32110E-12  2.17565E-12  1.76368E-12
 17.600  6.25686E-13  1.31068E-12  1.50887E-12  1.42195E-12  1.15974E-12  6.61986E-13  1.38535E-12  1.59133E-12  1.49522E-12  1.21637E-12
 17.700  4.26473E-13  8.93861E-13  1.03034E-12  9.72984E-13  7.95946E-13  4.50534E-13  9.43427E-13  1.08529E-12  1.02219E-12  8.34456E-13
 17.800  2.89162E-13  6.06393E-13  6.99865E-13  6.62259E-13  5.43374E-13  3.05039E-13  6.39152E-13  7.36335E-13  6.95164E-13  5.69446E-13
 17.900  1.95041E-13  4.09233E-13  4.72908E-13  4.48407E-13  3.69001E-13  2.05473E-13  4.30791E-13  4.97007E-13  4.70318E-13  3.86574E-13
 18.000  1.30878E-13  2.74752E-13  3.17897E-13  3.02036E-13  2.49281E-13  1.37702E-13  2.88878E-13  3.33756E-13  3.16565E-13  2.61074E-13
 18.100  8.73734E-14  1.83519E-13  2.12601E-13  2.02398E-13  1.67535E-13  9.18193E-14  1.92737E-13  2.22993E-13  2.11992E-13  1.75413E-13
 18.200  5.80344E-14  1.21959E-13  1.41458E-13  1.34938E-13  1.12018E-13  6.09186E-14  1.27949E-13  1.48241E-13  1.41247E-13  1.17258E-13
 18.300  3.83531E-14  8.06401E-14  9.36471E-14  8.95072E-14  7.45179E-14  4.02165E-14  8.45168E-14  9.80559E-14  9.36398E-14  7.79882E-14
 18.400  2.52198E-14  5.30535E-14  6.16853E-14  5.90740E-14  4.93216E-14  2.64189E-14  5.55524E-14  6.45396E-14  6.17697E-14  5.16098E-14
 18.500  1.65016E-14  3.47310E-14  4.04301E-14  3.87941E-14  3.24813E-14  1.72701E-14  3.63355E-14  4.22708E-14  4.05454E-14  3.39835E-14
 18.600  1.07441E-14  2.26245E-14  2.63682E-14  2.53501E-14  2.12845E-14  1.12347E-14  2.36505E-14  2.75506E-14  2.64834E-14  2.22665E-14
 18.700  6.96122E-15  1.46659E-14  1.71130E-14  1.64838E-14  1.38786E-14  7.27317E-15  1.53196E-14  1.78695E-14  1.72141E-14  1.45177E-14
 18.800  4.48838E-15  9.46080E-15  1.10522E-14  1.06661E-14  9.00517E-15  4.68598E-15  9.87559E-15  1.15344E-14  1.11350E-14  9.41938E-15
 18.900  2.88002E-15  6.07360E-15  7.10350E-15  6.86829E-15  5.81455E-15  3.00471E-15  6.33582E-15  7.40965E-15  7.16806E-15  6.08185E-15
 19.000  1.83914E-15  3.88041E-15  4.54364E-15  4.40142E-15  3.73622E-15  1.91753E-15  4.04556E-15  4.73728E-15  4.59233E-15  3.90797E-15
 19.100  1.16887E-15  2.46738E-15  2.89240E-15  2.80706E-15  2.38920E-15  1.21796E-15  2.57100E-15  3.01441E-15  2.92817E-15  2.49909E-15
 19.200  7.39358E-16  1.56147E-15  1.83252E-15  1.78172E-15  1.52051E-15  7.69995E-16  1.62624E-15  1.90911E-15  1.85824E-15  1.59053E-15
 19.300  4.65477E-16  9.83518E-16  1.15554E-15  1.12556E-15  9.63068E-16  4.84524E-16  1.02386E-15  1.20344E-15  1.17372E-15  1.00748E-15
 19.400  2.91680E-16  6.16587E-16  7.25239E-16  7.07701E-16  6.07106E-16  3.03478E-16  6.41620E-16  7.55082E-16  7.37894E-16  6.35165E-16
  67 139 196   0.100
  0.000  7.01794E-02 -3.56864E-16 -5.62050E-16 -7.63065E-16 -2.28878E-16  7.78848E-02 -4.03412E-16 -6.24500E-16 -5.50408E-16 -1.17300E-15
  0.100  7.01824E-02 -3.92022E-05 -1.95133E-08 -9.08723E-13  8.43989E-16  7.79220E-02 -1.18219E-05 -7.13080E-08 -6.75123E-12  1.57354E-16
  0.200  7.01915E-02 -1.54701E-04 -3.09859E-07 -5.97860E-11  2.72565E-13  7.80323E-02 -4.65809E-05 -1.13118E-06 -4.31443E-10  1.84233E-13
  0.300  7.02072E-02 -3.40282E-04 -1.54893E-06 -7.11735E-10  6.77860E-12  7.82126E-02 -1.02191E-04 -5.64503E-06 -4.90256E-09  4.53552E-12
  0.400  7.02304E-02 -5.85943E-04 -4.80893E-06 -4.23107E-09  6.49224E-11  7.84575E-02 -1.75287E-04 -1.74851E-05 -2.74455E-08  4.28057E-11
  0.500  7.02619E-02 -8.78409E-04 -1.14726E-05 -1.72163E-08  3.66076E-10  7.87598E-02 -2.61384E-04 -4.15909E-05 -1.04160E-07  2.36467E-10
  0.600  7.03028E-02 -1.20181E-03 -2.31215E-05 -5.50612E-08  1.46826E-09  7.91106E-02 -3.55093E-04 -8.35244E-05 -3.08873E-07  9.22494E-10
  0.700  7.03542E-02 -1.53850E-03 -4.14012E-05 -1.48798E-07  4.62901E-09  7.94997E-02 -4.50374E-04 -1.48948E-04 -7.71816E-07  2.80192E-09
  0.800  7.04169E-02 -1.86992E-03 -6.78710E-05 -3.54489E-07  1.21646E-08  7.99159E-02 -5.40818E-04 -2.43063E-04 -1.69986E-06  6.99945E-09
  0.900  7.04916E-02 -2.17757E-03 -1.03845E-04 -7.64819E-07  2.76356E-08  8.03473E-02 -6.19951E-04 -3.70036E-04 -3.39614E-06  1.48176E-08
  1.000  7.05784E-02 -2.44393E-03 -1.50233E-04 -1.52185E-06  5.55378E-08  8.07820E-02 -6.81532E-04 -5.32471E-04 -6.27638E-06  2.68670E-08
  1.100  7.06774E-02 -2.65328E-03 -2.07396E-04 -2.82921E-06  1.00079E-07  8.12082E-02 -7.19848E-04 -7.30946E-04 -1.08785E-05  4.11841E-08
  1.200  7.07878E-02 -2.79255E-03 -2.75018E-04 -4.96120E-06  1.62576E-07  8.16145E-02 -7.29989E-04 -9.63665E-04 -1.78622E-05  4.99398E-08
  1.300  7.09085E-02 -2.85191E-03 -3.52010E-04 -8.26608E-06  2.37060E-07  8.19908E-02 -7.08089E-04 -1.22625E-03 -2.79946E-05  3.44269E-08
  1.400  7.10381E-02 -2.82524E-03 -4.36460E-04 -1.31604E-05  3.03809E-07  8.23281E-02 -6.51531E-04 -1.51169E-03 -4.21190E-05 -4.17921E-08
  1.500  7.11747E-02 -2.71047E-03 -5.25625E-04 -2.01115E-05  3.20810E-07  8.26191E-02 -5.59103E-04 -1.81048E-03 -6.11061E-05 -2.41393E-07
  1.600  7.13162E-02 -2.50962E-03 -6.15986E-04 -2.96068E-05  2.13512E-07  8.28582E-02 -4.31103E-04 -2.11093E-03 -8.57851E-05 -6.62878E-07
  1.700  7.14602E-02 -2.22876E-03 -7.03358E-04 -4.21085E-05 -1.36354E-07  8.30420E-02 -2.69382E-04 -2.39969E-03 -1.16859E-04 -1.45022E-06
  1.800  7.16045E-02 -1.87766E-03 -7.83072E-04 -5.79946E-05 -9.01626E-07  8.31690E-02 -7.73251E-05 -2.66232E-03 -1.54805E-04 -2.80113E-06
  1.900  7.17467E-02 -1.46936E-03 -8.50201E-04 -7.74897E-05 -2.31861E-06  8.32397E-02  1.40248E-04 -2.88416E-03 -1.99773E-04 -4.97213E-06
  2.000  7.18848E-02 -1.01949E-03 -8.99853E-04 -1.00590E-04 -4.69206E-06  8.32567E-02  3.77249E-04 -3.05111E-03 -2.51477E-04 -8.27846E-06
  2.100  7.20171E-02 -5.45566E-04 -9.27498E-04 -1.26986E-04 -8.39434E-06  8.32241E-02  6.26564E-04 -3.15058E-03 -3.09113E-04 -1.30870E-05
  2.200  7.21419E-02 -6.60365E-05 -9.29314E-04 -1.56003E-04 -1.38567E-05  8.31472E-02  8.80384E-04 -3.17236E-03 -3.71284E-04 -1.98005E-05
  2.300  7.22581E-02  4.00593E-04 -9.02547E-04 -1.86544E-04 -2.15513E-05  8.30327E-02  1.13059E-03 -3.10941E-03 -4.35975E-04 -2.88323E-05
  2.400  7.23646E-02  8.36749E-04 -8.45842E-04 -2.17073E-04 -3.19640E-05  8.28874E-02  1.36923E-03 -2.95859E-03 -5.00563E-04 -4.05714E-05
  2.500  7.24605E-02  1.22674E-03 -7.59534E-04 -2.45626E-04 -4.55564E-05  8.27182E-02  1.58899E-03 -2.72110E-03 -5.61881E-04 -5.53395E-05
  2.600  7.25447E-02  1.55762E-03 -6.45863E-04 -2.69865E-04 -6.27208E-05  8.25316E-02  1.78373E-03 -2.40283E-03 -6.16341E-04 -7.33424E-05
  2.700  7.26158E-02  1.82001E-03 -5.09093E-04 -2.87168E-04 -8.37295E-05  8.23327E-02  1.94905E-03 -2.01433E-03 -6.60107E-04 -9.46184E-05
  2.800  7.26721E-02  2.00870E-03 -3.55512E-04 -2.94775E-04 -1.08682E-04  8.21253E-02  2.08272E-03 -1.57056E-03 -6.89325E-04 -1.18991E-04
  2.900  7.27109E-02  2.12314E-03 -1.93301E-04 -2.89962E-04 -1.37458E-04  8.19111E-02  2.18512E-03 -1.09038E-03 -7.00376E-04 -1.46027E-04
  3.000  7.27287E-02  2.16762E-03 -3.22617E-05 -2.70244E-04 -1.69671E-04  8.16894E-02  2.25956E-03 -5.95721E-04 -6.90167E-04 -1.75013E-04
  3.100  7.27208E-02  2.15137E-03  1.16594E-04 -2.33599E-04 -2.04651E-04  8.14569E-02  2.31246E-03 -1.10590E-04 -6.56409E-04 -2.04947E-04
  3.200  7.26812E-02  2.08820E-03  2.41579E-04 -1.78688E-04 -2.41428E-04  8.12076E-02  2.35334E-03  3.40172E-04 -5.97879E-04 -2.34553E-04
  3.300  7.26025E-02  1.99609E-03  3.30971E-04 -1.05054E-04 -2.78754E-04  8.09330E-02  2.39465E-03  7.32200E-04 -5.14633E-04 -2.62327E-04
  3.400  7.24763E-02  1.89640E-03  3.73711E-04 -1.32848E-05 -3.15136E-04  8.06221E-02  2.45138E-03  1.04297E-03 -4.08151E-04 -2.86598E-04
  3.500  7.22927E-02  1.81297E-03  3.60142E-04  9.48863E-05 -3.48909E-04  8.02617E-02  2.54048E-03  1.25311E-03 -2.81391E-04 -3.05626E-04
  3.600  7.20409E-02  1.77092E-03  2.82705E-04  2.16548E-04 -3.78315E-04  7.98372E-02  2.68010E-03  1.34760E-03 -1.38747E-04 -3.17703E-04
  3.700  7.17095E-02  1.79547E-03  1.36587E-04  3.47664E-04 -4.01612E-04  7.93329E-02  2.88870E-03  1.31676E-03  1.41059E-05 -3.21281E-04
  3.800  7.12867E-02  1.91061E-03 -7.97799E-05  4.83213E-04 -4.17188E-04  7.87328E-02  3.18404E-03  1.15693E-03  1.70463E-04 -3.15087E-04
  3.900  7.07607E-02  2.13778E-03 -3.64361E-04  6.17414E-04 -4.23676E-04  7.80210E-02  3.58206E-03  8.70882E-04  3.22939E-04 -2.98241E-04
  4.000  7.01203E-02  2.49468E-03 -7.11383E-04  7.44023E-04 -4.20064E-04  7.71826E-02  4.09589E-03  4.67792E-04  4.63888E-04 -2.70346E-04
  4.100  6.93550E-02  2.99414E-03 -1.11140E-03  8.56685E-04 -4.05784E-04  7.62046E-02  4.73484E-03 -3.70863E-05  5.85860E-04 -2.31557E-04
  4.200  6.84557E-02  3.64327E-03 -1.55163E-03  9.49326E-04 -3.80781E-04  7.50756E-02  5.50351E-03 -6.23148E-04  6.82076E-04 -1.82612E-04
  4.300  6.74149E-02  4.44287E-03 -2.01643E-03  1.01654E-03 -3.45540E-04  7.37871E-02  6.40124E-03 -1.26547E-03  7.46876E-04 -1.24819E-04
  4.400  6.62272E-02  5.38705E-03 -2.48807E-03  1.05394E-03 -3.01086E-04  7.23334E-02  7.42159E-03 -1.93609E-03  7.76104E-04 -6.00052E-05
  4.500  6.48892E-02  6.46329E-03 -2.94758E-03  1.05851E-03 -2.48934E-04  7.07119E-02  8.55230E-03 -2.60549E-03  7.67406E-04  9.57114E-06
  4.600  6.34000E-02  7.65276E-03 -3.37575E-03  1.02879E-03 -1.91016E-04  6.89232E-02  9.77546E-03 -3.24411E-03  7.20413E-04  8.13481E-05
  4.700  6.17609E-02  8.93095E-03 -3.75411E-03  9.65035E-04 -1.29566E-04  6.69711E-02  1.10680E-02 -3.82393E-03  6.36798E-04  1.52607E-04
  4.800  5.99760E-02  1.02686E-02 -4.06594E-03  8.69231E-04 -6.69868E-05  6.48623E-02  1.24022E-02 -4.31985E-03  5.20186E-04  2.20635E-04
  4.900  5.80514E-02  1.16330E-02 -4.29717E-03  7.45000E-04 -5.70979E-06  6.26063E-02  1.37473E-02 -4.71098E-03  3.75946E-04  2.82883E-04
  5.000  5.59957E-02  1.29889E-02 -4.43710E-03  5.97398E-04  5.19555E-05  6.02151E-02  1.50701E-02 -4.98158E-03  2.10865E-04  3.37122E-04
  5.100  5.38195E-02  1.43007E-02 -4.47897E-03  4.32621E-04  1.03954E-04  5.77030E-02  1.63366E-02 -5.12173E-03  3.27290E-05  3.81561E-04
  5.200  5.15354E-02  1.55330E-02 -4.42027E-03  2.57636E-04  1.48602E-04  5.50860E-02  1.75132E-02 -5.12760E-03 -1.50151E-04  4.14947E-04
  5.300  4.91576E-02  1.66529E-02 -4.26281E-03  7.97695E-05  1.84667E-04  5.23817E-02  1.85683E-02 -5.00148E-03 -3.29433E-04  4.36614E-04
  5.400  4.67016E-02  1.76306E-02 -4.01254E-03 -9.37175E-05  2.11424E-04  4.96086E-02  1.94736E-02 -4.75133E-03 -4.97229E-04  4.46497E-04
  5.500  4.41844E-02  1.84410E-02 -3.67917E-03 -2.56037E-04  2.28666E-04  4.67863E-02  2.02050E-02 -4.39012E-03 -6.46540E-04  4.45105E-04
  5.600  4.16234E-02  1.90643E-02 -3.27552E-03 -4.01236E-04  2.36681E-04  4.39345E-02  2.07437E-02 -3.93495E-03 -7.71618E-04  4.33450E-04
  5.700  3.90370E-02  1.94867E-02 -2.81684E-03 -5.24491E-04  2.36198E-04  4.10734E-02  2.10769E-02 -3.40590E-03 -8.68224E-04  4.12957E-04
  5.800  3.64437E-02  1.97010E-02 -2.31990E-03 -6.22314E-04  2.28305E-04  3.82227E-02  2.11979E-02 -2.82492E-03 -9.33780E-04  3.85343E-04
  5.900  3.38619E-02  1.97061E-02 -1.80215E-03 -6.92659E-04  2.14351E-04  3.54020E-02  2.11066E-02 -2.21461E-03 -9.67407E-04  3.52496E-04
  6.000  3.13097E-02  1.95072E-02 -1.28082E-03 -7.34941E-04  1.95837E-04  3.26298E-02  2.08089E-02 -1.59706E-03 -9.69851E-04  3.16344E-04
  6.100  2.88048E-02  1.91151E-02 -7.72149E-04 -7.49949E-04  1.74308E-04  2.99240E-02  2.03165E-02 -9.92882E-04 -9.43314E-04  2.78739E-04
  6.200  2.63636E-02  1.85457E-02 -2.90681E-04 -7.39693E-04  1.51254E-04  2.73010E-02  1.96463E-02 -4.20338E-04 -8.91212E-04  2.41359E-04
  6.300  2.40015E-02  1.78187E-02  1.51268E-04 -7.07181E-04  1.28027E-04  2.47757E-02  1.88189E-02  1.05287E-04 -8.17870E-04  2.05629E-04
  6.400  2.17324E-02  1.69573E-02  5.43991E-04 -6.56156E-04  1.05772E-04  2.23615E-02  1.78584E-02  5.72103E-04 -7.28199E-04  1.72673E-04
  6.500  1.95685E-02  1.59865E-02  8.80587E-04 -5.90817E-04  8.53900E-05  2.00697E-02  1.67908E-02  9.71805E-04 -6.27369E-04  1.43287E-04
  6.600  1.75200E-02  1.49323E-02  1.15700E-03 -5.15539E-04  6.75150E-05  1.79096E-02  1.56433E-02  1.29966E-03 -5.20496E-04  1.17941E-04
  6.700  1.55951E-02  1.38210E-02  1.37189E-03 -4.34618E-04  5.25179E-05  1.58886E-02  1.44428E-02  1.55427E-03 -4.12370E-04  9.68074E-05
  6.800  1.38000E-02  1.26777E-02  1.52641E-03 -3.52042E-04  4.05261E-05  1.40114E-02  1.32154E-02  1.73728E-03 -3.07244E-04  7.97936E-05
  6.900  1.21385E-02  1.15261E-02  1.62382E-03 -2.71323E-04  3.14582E-05  1.22809E-02  1.19855E-02  1.85285E-03 -2.08666E-04  6.65997E-05
  7.000  1.06124E-02  1.03877E-02  1.66909E-03 -1.95373E-04  2.50678E-05  1.06978E-02  1.07750E-02  1.90712E-03 -1.19393E-04  5.67742E-05
  7.100  9.22159E-03  9.28100E-03  1.66846E-03 -1.26430E-04  2.09910E-05  9.26048E-03  9.60292E-03  1.90769E-03 -4.13538E-05  4.97725E-05
  7.200  7.96383E-03  8.22166E-03  1.62895E-03 -6.60471E-05  1.87951E-05  7.96572E-03  8.48501E-03  1.86302E-03  2.43286E-05  4.50114E-05
  7.300  6.83530E-03  7.22214E-03  1.55798E-03 -1.51139E-05  1.80222E-05  6.80849E-03  7.43377E-03  1.78195E-03  7.72717E-05  4.19157E-05
  7.400  5.83066E-03  6.29169E-03  1.46294E-03  2.60787E-05  1.82271E-05  5.78233E-03  6.45834E-03  1.67319E-03  1.17732E-04  3.99552E-05
  7.500  4.94334E-03  5.43656E-03  1.35087E-03  5.77503E-05  1.90060E-05  4.87964E-03  5.56469E-03  1.54501E-03  1.46485E-04  3.86713E-05
  7.600  4.16580E-03  4.66018E-03  1.22824E-03  8.05272E-05  2.00169E-05  4.09186E-03  4.75586E-03  1.40492E-03  1.64689E-04  3.76922E-05
  7.700  3.48979E-03  3.96349E-03  1.10072E-03  9.53323E-05  2.09905E-05  3.40986E-03  4.03231E-03  1.25946E-03  1.73760E-04  3.67384E-05
  7.800  2.90662E-03  3.34532E-03  9.73123E-04  1.03277E-04  2.17335E-05  2.82413E-03  3.39231E-03  1.11413E-03  1.75245E-04  3.56208E-05
  7.900  2.40743E-03  2.80273E-03  8.49300E-04  1.05565E-04  2.21246E-05  2.32505E-03  2.83236E-03  9.73299E-04  1.70715E-04  3.42310E-05
  8.000  1.98337E-03  2.33144E-03  7.32201E-04  1.03403E-04  2.21068E-05  1.90315E-03  2.34758E-03  8.40284E-04  1.61680E-04  3.25289E-05
  8.100  1.62583E-03  1.92620E-03  6.23906E-04  9.79412E-05  2.16753E-05  1.54924E-03  1.93214E-03  7.17396E-04  1.49522E-04  3.05271E-05
  8.200  1.32655E-03  1.58115E-03  5.25720E-04  9.02178E-05  2.08651E-05  1.25463E-03  1.57964E-03  6.06060E-04  1.35451E-04  2.82755E-05
  8.300  1.07781E-03  1.29009E-03  4.38284E-04  8.11304E-05  1.97375E-05  1.01118E-03  1.28335E-03  5.06948E-04  1.20479E-04  2.58464E-05
  8.400  8.72475E-04  1.04678E-03  3.61693E-04  7.14199E-05  1.83686E-05  8.11452E-04  1.03660E-03  4.20119E-04  1.05416E-04  2.33219E-05
  8.500  7.04053E-04  8.45138E-04  2.95616E-04  6.16680E-05  1.68390E-05  6.48717E-04  8.32887E-04  3.45163E-04  9.08736E-05  2.07834E-05
  8.600  5.66738E-04  6.79379E-04  2.39416E-04  5.23054E-05  1.52262E-05  5.16980E-04  6.66097E-04  2.81329E-04  7.72818E-05  1.83047E-05
  8.700  4.55403E-04  5.44161E-04  1.92247E-04  4.36270E-05  1.35986E-05  4.10982E-04  5.30603E-04  2.27648E-04  6.49144E-05  1.59469E-05
  8.800  3.65580E-04  4.34641E-04  1.53150E-04  3.58121E-05  1.20128E-05  3.26165E-04  4.21331E-04  1.83025E-04  5.39142E-05  1.37559E-05
  8.900  2.93425E-04  3.46510E-04  1.21120E-04  2.89460E-05  1.05117E-05  2.58630E-04  3.33790E-04  1.46328E-04  4.43215E-05  1.17626E-05
  9.000  2.35671E-04  2.76001E-04  9.51640E-05  2.30421E-05  9.12492E-06  2.05085E-04  2.64076E-04  1.16441E-04  3.61000E-05  9.98319E-06
  9.100  1.89574E-04  2.19874E-04  7.43437E-05  1.80619E-05  7.86976E-06  1.62779E-04  2.08847E-04  9.23143E-05  2.91612E-05  8.42159E-06
  9.200  1.52852E-04  1.75381E-04  5.77988E-05  1.39330E-05  6.75332E-06  1.29440E-04  1.65281E-04  7.29893E-05  2.33838E-05  7.07186E-06
  9.300  1.23626E-04  1.40223E-04  4.47640E-05  1.05634E-05  5.77454E-06  1.03212E-04  1.31033E-04  5.76150E-05  1.86306E-05  5.92080E-06
  9.400  1.00367E-04  1.12502E-04  3.45741E-05  7.85308E-06  4.92649E-06  8.25913E-05  1.04174E-04  4.54529E-05  1.47607E-05  4.95043E-06
  9.500  8.18368E-05  9.06667E-05  2.66632E-05  5.70232E-06  4.19837E-06  6.63739E-05  8.31347E-05  3.58756E-05  1.16379E-05  4.14023E-06
  9.600  6.70443E-05  7.34632E-05  2.05586E-05  4.01731E-06  3.57731E-06  5.36006E-05  6.66564E-05  2.83590E-05  9.13689E-06  3.46886E-06
  9.700  5.51994E-05  5.98882E-05  1.58717E-05  2.71350E-06  3.04972E-06  4.35144E-05  5.37351E-05  2.24722E-05  7.14615E-06  2.91552E-06
  9.800  4.56767E-05  4.91451E-05  1.22877E-05  1.71719E-06  2.60227E-06  3.55212E-05  4.35781E-05  1.78658E-05  5.56918E-06  2.46083E-06
  9.900  3.79837E-05  4.06062E-05  9.55514E-06  9.65863E-07  2.22263E-06  2.91575E-05  3.55642E-05  1.42598E-05  4.32445E-06  2.08742E-06
 10.000  3.17339E-05  3.37802E-05  7.47489E-06  4.07620E-07  1.89978E-06  2.40628E-05  2.92092E-05  1.14322E-05  3.34438E-06  1.78011E-06
 10.100  2.66248E-05  2.82848E-05  5.89115E-06  1.31970E-10  1.62422E-06  1.99582E-05  2.41381E-05  9.20820E-06  2.57383E-06  1.52605E-06
 10.200  2.24204E-05  2.38238E-05  4.68297E-06 -2.90639E-07  1.38794E-06  1.66282E-05  2.00616E-05  7.45143E-06  1.96839E-06  1.31451E-06
 10.300  1.89366E-05  2.01691E-05  3.75720E-06 -4.91767E-07  1.18431E-06  1.39066E-05  1.67574E-05  6.05600E-06  1.49266E-06  1.13675E-06
 10.400  1.60299E-05  1.71452E-05  3.04268E-06 -6.24613E-07  1.00795E-06  1.16653E-05  1.40551E-05  4.94015E-06  1.11866E-06  9.85764E-07
 10.500  1.35887E-05  1.46179E-05  2.48544E-06 -7.05923E-07  8.54551E-07  9.80564E-06  1.18246E-05  4.04102E-06  8.24411E-07  8.56012E-07
 10.600  1.15257E-05  1.24851E-05  2.04497E-06 -7.48754E-07  7.20645E-07  8.25165E-06  9.96669E-06  3.31052E-06  5.92729E-07  7.43200E-07
 10.700  9.77284E-06  1.06688E-05  1.69112E-06 -7.63239E-07  6.03491E-07  6.94470E-06  8.40593E-06  2.71198E-06  4.10251E-07  6.44052E-07
 10.800  8.27672E-06  9.11005E-06  1.40180E-06 -7.57193E-07  5.00907E-07  5.83946E-06  7.08495E-06  2.21758E-06  2.66620E-07  5.56121E-07
 10.900  6.99536E-06  7.76392E-06  1.16102E-06 -7.36593E-07  4.11155E-07  4.90078E-06  5.96010E-06  1.80630E-06  1.53838E-07  4.77615E-07
 11.000  5.89547E-06  6.59636E-06  9.57464E-07 -7.05966E-07  3.32836E-07  4.10121E-06  4.99809E-06  1.46230E-06  6.57444E-08  4.07258E-07
 11.100  4.95048E-06  5.58124E-06  7.83242E-07 -6.68690E-07  2.64811E-07  3.41912E-06  4.17336E-06  1.17364E-06 -2.39822E-09  3.44157E-07
 11.200  4.13885E-06  4.69827E-06  6.32996E-07 -6.27252E-07  2.06130E-07  2.83730E-06  3.46601E-06  9.31282E-07 -5.42393E-08  2.87703E-07
 11.300  3.44292E-06  3.93141E-06  5.03132E-07 -5.83445E-07  1.55979E-07  2.34179E-06  2.86030E-06  7.28324E-07 -9.26097E-08  2.37478E-07
 11.400  2.84791E-06  3.26756E-06  3.91239E-07 -5.38545E-07  1.13638E-07  1.92109E-06  2.34344E-06  5.59352E-07 -1.19736E-07  1.93179E-07
 11.500  2.34124E-06  2.69570E-06  2.95645E-07 -4.93446E-07  7.84430E-08  1.56549E-06  1.90475E-06  4.20003E-07 -1.37413E-07  1.54559E-07
 11.600  1.91200E-06  2.20621E-06  2.15083E-07 -4.48778E-07  4.97601E-08  1.26666E-06  1.53501E-06  3.06614E-07 -1.47129E-07  1.21379E-07
 11.700  1.55057E-06  1.79042E-06  1.48464E-07 -4.04993E-07  2.69698E-08  1.01728E-06  1.22605E-06  2.15977E-07 -1.50170E-07  9.33772E-08
 11.800  1.24835E-06  1.44032E-06  9.47228E-08 -3.62434E-07  9.45490E-09  8.10834E-07  9.70457E-07  1.45186E-07 -1.47680E-07  7.02484E-08
 11.900  9.97596E-07  1.14842E-06  5.27335E-08 -3.21379E-07 -3.40338E-09  6.41473E-07  7.61394E-07  9.15336E-08 -1.40710E-07  5.16331E-08
 12.000  7.91302E-07  9.07642E-07  2.12801E-08 -2.82076E-07 -1.22239E-08  5.03908E-07  5.92538E-07  5.24674E-08 -1.30237E-07  3.71195E-08
 12.100  6.23115E-07  7.11303E-07 -9.40793E-10 -2.44751E-07 -1.76196E-08  3.93358E-07  4.58030E-07  2.55775E-08 -1.17176E-07  2.62510E-08
 12.200  4.87306E-07  5.53155E-07 -1.52904E-08 -2.09617E-07 -2.01885E-08  3.05524E-07  3.52477E-07  8.60575E-09 -1.02376E-07  1.85401E-08
 12.300  3.78734E-07  4.27401E-07 -2.31446E-08 -1.76869E-07 -2.05028E-08  2.36561E-07  2.70966E-07 -5.32815E-10 -8.66100E-08  1.34846E-08
 12.400  2.92831E-07  3.28743E-07 -2.58466E-08 -1.46676E-07 -1.90983E-08  1.83074E-07  2.09086E-07 -3.72563E-09 -7.05669E-08  1.05857E-08
 12.500  2.25573E-07  2.52406E-07 -2.46621E-08 -1.19171E-07 -1.64641E-08  1.42096E-07  1.62937E-07 -2.64076E-09 -5.48402E-08  9.36440E-09
 12.600  1.73465E-07  1.94164E-07 -2.07412E-08 -9.44433E-08 -1.30342E-08  1.11073E-07  1.29134E-07  1.28800E-09 -3.99194E-08  9.37686E-09
 12.700  1.33505E-07  1.50338E-07 -1.50906E-08 -7.25320E-08 -9.18186E-09  8.78398E-08  1.04797E-07  6.86709E-09 -2.61872E-08  1.02260E-08
 12.800  1.03154E-07  1.17787E-07 -8.55691E-09 -5.34224E-08 -5.21642E-09  7.05941E-08  8.75259E-08  1.31398E-08 -1.39193E-08  1.15697E-08
 12.900  8.02971E-08  9.38816E-08 -1.82007E-09 -3.70463E-08 -1.38309E-09  5.78606E-08  7.53702E-08  1.93742E-08 -3.28958E-09  1.31253E-08
 13.000  6.31964E-08  7.64627E-08  4.60260E-09 -2.32853E-08  2.13466E-09  4.84567E-08  6.67827E-08  2.50435E-08  5.62067E-09  1.46702E-08
 13.100  5.04506E-08  6.37984E-08  1.03453E-08 -1.19776E-08  5.21055E-09  4.14543E-08  6.05730E-08  2.98017E-08  1.28113E-08  1.60400E-08
 13.200  4.09483E-08  5.45309E-08  1.51768E-08 -2.92582E-09  7.76912E-09  3.61430E-08  5.58553E-08  3.34553E-08  1.83490E-08  1.71236E-08
 13.300  3.38240E-08  4.76226E-08  1.89798E-08  4.09337E-09  9.77827E-09  3.19925E-08  5.19977E-08  3.59343E-08  2.23527E-08  1.78566E-08
 13.400  2.84173E-08  4.23034E-08  2.17287E-08  9.31900E-09  1.12412E-08  2.86200E-08  4.85730E-08  3.72636E-08  2.49788E-08  1.82138E-08
 13.500  2.42346E-08  3.80206E-08  2.34682E-08  1.29963E-08  1.21884E-08  2.57583E-08  4.53137E-08  3.75362E-08  2.64067E-08  1.82011E-08
 13.600  2.09154E-08  3.43932E-08  2.42918E-08  1.53680E-08  1.26696E-08  2.32300E-08  4.20720E-08  3.68896E-08  2.68272E-08  1.78475E-08
 13.700  1.82030E-08  3.11717E-08  2.43245E-08  1.66666E-08  1.27472E-08  2.09235E-08  3.87857E-08  3.54858E-08  2.64308E-08  1.71978E-08
 13.800  1.59196E-08  2.82038E-08  2.37067E-08  1.71084E-08  1.24897E-08  1.87750E-08  3.54503E-08  3.34948E-08  2.54003E-08  1.63061E-08
 13.900  1.39460E-08  2.54062E-08  2.25820E-08  1.68894E-08  1.19671E-08  1.67528E-08  3.20964E-08  3.10826E-08  2.39039E-08  1.52302E-08
 14.000  1.22045E-08  2.27419E-08  2.10882E-08  1.61827E-08  1.12465E-08  1.48458E-08  2.87728E-08  2.84021E-08  2.20911E-08  1.40272E-08
 14.100  1.06468E-08  2.02028E-08  1.93507E-08  1.51365E-08  1.03899E-08  1.30545E-08  2.55341E-08  2.55875E-08  2.00903E-08  1.27505E-08
 14.200  9.24348E-09  1.77969E-08  1.74785E-08  1.38750E-08  9.45175E-09  1.13848E-08  2.24323E-08  2.27512E-08  1.80081E-08  1.14473E-08
 14.300  7.97734E-09  1.55389E-08  1.55622E-08  1.24990E-08  8.47829E-09  9.84413E-09  1.95117E-08  1.99831E-08  1.59296E-08  1.01576E-08
 14.400  6.83792E-09  1.34442E-08  1.36739E-08  1.10874E-08  7.50713E-09  8.43830E-09  1.68061E-08  1.73511E-08  1.39198E-08  8.91346E-09
 14.500  5.81825E-09  1.15256E-08  1.18680E-08  9.69991E-09  6.56746E-09  7.17055E-09  1.43380E-08  1.49031E-08  1.20257E-08  7.73920E-09
 14.600  4.91259E-09  9.79090E-09  1.01829E-08  8.37945E-09  5.68074E-09  6.04081E-09  1.21191E-08  1.26693E-08  1.02787E-08  6.65186E-09
 14.700  4.11523E-09  8.24249E-09  8.64291E-09  7.15468E-09  4.86151E-09  5.04582E-09  1.01513E-08  1.06651E-08  8.69689E-09  5.66195E-09
 14.800  3.41984E-09  6.87765E-09  7.26094E-09  6.04274E-09  4.11842E-09  4.17949E-09  8.42855E-09  8.89400E-09  7.28793E-09  4.77450E-09
 14.900  2.81931E-09  5.68913E-09  6.04069E-09  5.05160E-09  3.45532E-09  3.43351E-09  6.93860E-09  7.35049E-09  6.05126E-09  3.99001E-09
 15.000  2.30581E-09  4.66617E-09  4.97884E-09  4.18229E-09  2.87225E-09  2.79803E-09  5.66476E-09  6.02238E-09  4.98025E-09  3.30550E-09
 15.100  1.87106E-09  3.79551E-09  4.06709E-09  3.43076E-09  2.36640E-09  2.26225E-09  4.58753E-09  4.89308E-09  4.06409E-09  2.71541E-09
 15.200  1.50654E-09  3.06240E-09  3.29383E-09  2.78954E-09  1.93297E-09  1.81500E-09  3.68601E-09  3.94347E-09  3.28936E-09  2.21248E-09
 15.300  1.20381E-09  2.45143E-09  2.64552E-09  2.24902E-09  1.56589E-09  1.44522E-09  2.93902E-09  3.15328E-09  2.64123E-09  1.78842E-09
 15.400  9.54717E-10  1.94727E-09  2.10782E-09  1.79849E-09  1.25836E-09  1.14231E-09  2.32594E-09  2.50225E-09  2.10452E-09  1.43449E-09
 15.500  7.51609E-10  1.53518E-09  1.66637E-09  1.42689E-09  1.00336E-09  8.96386E-10  1.82734E-09  1.97095E-09  1.66434E-09  1.14195E-09
 15.600  5.87449E-10  1.20141E-09  1.30745E-09  1.12344E-09  7.93985E-10  6.98447E-10  1.42541E-09  1.54125E-09  1.30665E-09  9.02397E-10
 15.700  4.55897E-10  9.33462E-10  1.01831E-09  8.77969E-10  6.23667E-10  5.40456E-10  1.10414E-09  1.19675E-09  1.01855E-09  7.07978E-10
 15.800  3.51350E-10  7.20178E-10  7.87437E-10  6.81185E-10  4.86358E-10  4.15370E-10  8.49454E-10  9.22852E-10  7.88464E-10  5.51546E-10
 15.900  2.68934E-10  5.51804E-10  6.04657E-10  5.24790E-10  3.76611E-10  3.17113E-10  6.49147E-10  7.06845E-10  6.06208E-10  4.26723E-10
 16.000  2.04474E-10  4.19944E-10  4.61135E-10  4.01523E-10  2.89620E-10  2.40520E-10  4.92823E-10  5.37823E-10  4.62979E-10  3.27923E-10
 16.100  1.54443E-10  3.17479E-10  3.49328E-10  3.05144E-10  2.21220E-10  1.81257E-10  3.71736E-10  4.06567E-10  3.51284E-10  2.50329E-10
 16.200  1.15901E-10  2.38457E-10  2.62897E-10  2.30373E-10  1.67855E-10  1.35735E-10  2.78628E-10  3.05389E-10  2.64828E-10  1.89854E-10
 16.300  8.64253E-11  1.77962E-10  1.96579E-10  1.72799E-10  1.26536E-10  1.01017E-10  2.07542E-10  2.27957E-10  1.98394E-10  1.43067E-10
 16.400  6.40432E-11  1.31981E-10  1.46063E-10  1.28792E-10  9.47793E-11  7.47196E-11  1.53647E-10  1.69112E-10  1.47704E-10  1.07132E-10
 16.500  4.71659E-11  9.72768E-11  1.07855E-10  9.53944E-11  7.05464E-11  5.49363E-11  1.13062E-10  1.24698E-10  1.09296E-10  7.97265E-11
 16.600  3.45260E-11  7.12626E-11  7.91562E-11  7.02239E-11  5.21847E-11  4.01519E-11  8.27045E-11  9.14005E-11  8.03895E-11  5.89695E-11
 16.700  2.51227E-11  5.18931E-11  5.77446E-11  5.13829E-11  3.83671E-11  2.91750E-11  6.01439E-11  6.66008E-11  5.87783E-11  4.33543E-11
 16.800  1.81729E-11  3.75656E-11  4.18756E-11  3.73734E-11  2.80389E-11  2.10769E-11  4.34853E-11  4.82489E-11  4.27261E-11  3.16850E-11
 16.900  1.30694E-11  2.70358E-11  3.01905E-11  2.70243E-11  2.03697E-11  1.51401E-11  3.12617E-11  3.47541E-11  3.08788E-11  2.30210E-11
 17.000  9.34532E-12  1.93460E-11  2.16408E-11  1.94280E-11  1.47117E-11  1.08145E-11  2.23478E-11  2.48923E-11  2.21897E-11  1.66294E-11
 17.100  6.64463E-12  1.37650E-11  1.54242E-11  1.38872E-11  1.05640E-11  7.68187E-12  1.58869E-11  1.77295E-11  1.58560E-11  1.19438E-11
 17.200  4.69804E-12  9.73931E-12  1.09318E-11  9.87073E-12  7.54253E-12  5.42678E-12  1.12319E-11  1.25582E-11  1.12673E-11  8.53006E-12
 17.300  3.30339E-12  6.85289E-12  7.70485E-12  6.97682E-12  5.35491E-12  3.81292E-12  7.89771E-12  8.84683E-12  7.96259E-12  6.05802E-12
 17.400  2.31008E-12  4.79557E-12  5.40074E-12  4.90420E-12  3.78062E-12  2.66464E-12  5.52347E-12  6.19868E-12  5.59658E-12  4.27864E-12
 17.500  1.60674E-12  3.33776E-12  3.76516E-12  3.42853E-12  2.65446E-12  1.85229E-12  3.84246E-12  4.32004E-12  3.91246E-12  3.00541E-12
 17.600  1.11158E-12  2.31070E-12  2.61084E-12  2.38398E-12  1.85361E-12  1.28083E-12  2.65899E-12  2.99486E-12  2.72057E-12  2.09965E-12
 17.700  7.64951E-13  1.59121E-12  1.80081E-12  1.64882E-12  1.28739E-12  8.81072E-13  1.83044E-12  2.06533E-12  1.88181E-12  1.45901E-12
 17.800  5.23661E-13  1.09002E-12  1.23558E-12  1.13435E-12  8.89361E-13  6.02957E-13  1.25357E-12  1.41692E-12  1.29484E-12  1.00847E-12
 17.900  3.56624E-13  7.42813E-13  8.43346E-13  7.76323E-13  6.11143E-13  4.10524E-13  8.54106E-13  9.67084E-13  8.86350E-13  6.93395E-13
 18.000  2.41621E-13  5.03603E-13  5.72661E-13  5.28544E-13  4.17758E-13  2.78090E-13  5.78987E-13  6.56702E-13  6.03615E-13  4.74275E-13
 18.100  1.62872E-13  3.39687E-13  3.86871E-13  3.58001E-13  2.84083E-13  1.87434E-13  3.90515E-13  4.43684E-13  4.08978E-13  3.22725E-13
 18.200  1.09235E-13  2.27967E-13  2.60034E-13  2.41251E-13  1.92187E-13  1.25702E-13  2.62081E-13  2.98264E-13  2.75704E-13  2.18478E-13
 18.300  7.28947E-14  1.52224E-13  1.73903E-13  1.61754E-13  1.29354E-13  8.38855E-14  1.75016E-13  1.99510E-13  1.84930E-13  1.47153E-13
 18.400  4.84030E-14  1.01143E-13  1.15722E-13  1.07909E-13  8.66218E-14  5.57054E-14  1.16301E-13  1.32795E-13  1.23426E-13  9.86144E-14
 18.500  3.19820E-14  6.68711E-14  7.66249E-14  7.16306E-14  5.77148E-14  3.68120E-14  7.69076E-14  8.79569E-14  8.19715E-14  6.57558E-14
 18.600  2.10287E-14  4.39960E-14  5.04882E-14  4.73140E-14  3.82627E-14  2.42090E-14  5.06113E-14  5.79752E-14  5.41734E-14  4.36282E-14
 18.700  1.37596E-14  2.88054E-14  3.31046E-14  3.10991E-14  2.52410E-14  1.58445E-14  3.31462E-14  3.80290E-14  3.56282E-14  2.88042E-14
 18.800  8.95993E-15  1.87688E-14  2.16015E-14  2.03418E-14  1.65691E-14  1.03206E-14  2.16044E-14  2.48257E-14  2.33184E-14  1.89241E-14
 18.900  5.80659E-15  1.21706E-14  1.40277E-14  1.32411E-14  1.08234E-14  6.69065E-15  1.40148E-14  1.61292E-14  1.51885E-14  1.23725E-14
 19.000  3.74515E-15  7.85453E-15  9.06592E-15  8.57775E-15  7.03585E-15  4.31703E-15  9.04857E-15  1.04296E-14  9.84595E-15  8.05005E-15
 19.100  2.40416E-15  5.04510E-15  5.83142E-15  5.53025E-15  4.55169E-15  2.77247E-15  5.81480E-15  6.71236E-15  6.35240E-15  5.21257E-15
 19.200  1.53608E-15  3.22534E-15  3.73324E-15  3.54857E-15  2.93051E-15  1.77225E-15  3.71932E-15  4.29980E-15  4.07914E-15  3.35915E-15
 19.300  9.76872E-16  2.05234E-15  2.37881E-15  2.26627E-15  1.87777E-15  1.12765E-15  2.36797E-15  2.74156E-15  2.60712E-15  2.15449E-15
 19.400  6.18362E-16  1.29988E-15  1.50871E-15  1.44056E-15  1.19752E-15  7.14200E-16  1.50068E-15  1.73995E-15  1.65855E-15  1.37534E-15
 19.500  3.89622E-16  8.19500E-16  9.52443E-16  9.11437E-16  7.60113E-16  4.50275E-16  9.46686E-16  1.09920E-15  1.05022E-15  8.73850E-16
  67 140 196   0.100
  0.000  7.07879E-02 -3.72380E-16 -5.72459E-16 -5.75426E-16 -1.28744E-15  7.81065E-02 -4.18928E-16 -5.82867E-16 -6.50482E-16 -1.23022E-15
  0.100  7.07906E-02 -4.14659E-05 -1.97208E-08 -8.39947E-13  3.00403E-16  7.81530E-02 -6.81566E-06 -7.59862E-08 -5.02430E-12  1.85964E-16
  0.200  7.07985E-02 -1.63584E-04 -3.13007E-07 -5.53578E-11  2.92549E-13  7.82912E-02 -2.69815E-05 -1.20530E-06 -3.21220E-10  2.64226E-13
  0.300  7.08122E-02 -3.59637E-04 -1.56346E-06 -6.61054E-10  7.30614E-12  7.85172E-02 -5.96617E-05 -6.01421E-06 -3.65305E-09  6.59049E-12
  0.400  7.08319E-02 -6.18825E-04 -4.84883E-06 -3.94449E-09  7.00068E-11  7.88249E-02 -1.03488E-04 -1.86258E-05 -2.04733E-08  6.33188E-11
  0.500  7.08583E-02 -9.26832E-04 -1.15522E-05 -1.61149E-08  3.95120E-10  7.92058E-02 -1.56595E-04 -4.42963E-05 -7.78073E-08  3.58509E-10
  0.600  7.08919E-02 -1.26658E-03 -2.32443E-05 -5.17465E-08  1.58682E-09  7.96495E-02 -2.16667E-04 -8.89413E-05 -2.31103E-07  1.44587E-09
  0.700  7.09334E-02 -1.61913E-03 -4.15441E-05 -1.40374E-07  5.01185E-09  8.01442E-02 -2.80993E-04 -1.58582E-04 -5.78549E-07  4.59163E-09
  0.800  7.09830E-02 -1.96463E-03 -6.79641E-05 -3.35588E-07  1.32034E-08  8.06765E-02 -3.46526E-04 -2.58749E-04 -1.27679E-06  1.21820E-08
  0.900  7.10411E-02 -2.28339E-03 -1.03752E-04 -7.26295E-07  3.00994E-08  8.12326E-02 -4.09956E-04 -3.93891E-04 -2.55646E-06  2.80270E-08
  1.000  7.11075E-02 -2.55682E-03 -1.49733E-04 -1.44915E-06  6.07844E-08  8.17979E-02 -4.67782E-04 -5.66814E-04 -4.73550E-06  5.72906E-08
  1.100  7.11819E-02 -2.76844E-03 -2.06172E-04 -2.70047E-06  1.10306E-07  8.23582E-02 -5.16396E-04 -7.78216E-04 -8.22767E-06  1.05692E-07
  1.200  7.12636E-02 -2.90461E-03 -2.72655E-04 -4.74522E-06  1.81094E-07  8.28995E-02 -5.52177E-04 -1.02633E-03 -1.35435E-05  1.77586E-07
  1.300  7.13514E-02 -2.95531E-03 -3.48006E-04 -7.92035E-06  2.68553E-07  8.34087E-02 -5.71605E-04 -1.30670E-03 -2.12809E-05  2.72575E-07
  1.400  7.14441E-02 -2.91450E-03 -4.30246E-04 -1.26295E-05  3.54565E-07  8.38739E-02 -5.71379E-04 -1.61219E-03 -3.21030E-05  3.80437E-07
  1.500  7.15400E-02 -2.78052E-03 -5.16601E-04 -1.93267E-05  3.98903E-07  8.42845E-02 -5.48568E-04 -1.93307E-03 -4.67013E-05  4.74390E-07
  1.600  7.16373E-02 -2.55605E-03 -6.03563E-04 -2.84862E-05  3.28921E-07  8.46320E-02 -5.00765E-04 -2.25736E-03 -6.57442E-05  5.03027E-07
  1.700  7.17342E-02 -2.24806E-03 -6.87012E-04 -4.05598E-05  2.83218E-08  8.49098E-02 -4.26254E-04 -2.57137E-03 -8.98114E-05  3.81650E-07
  1.800  7.18290E-02 -1.86739E-03 -7.62390E-04 -5.59199E-05 -6.73746E-07  8.51133E-02 -3.24173E-04 -2.86027E-03 -1.19317E-04 -1.59274E-08
  1.900  7.19200E-02 -1.42822E-03 -8.24934E-04 -7.47930E-05 -2.01163E-06  8.52404E-02 -1.94659E-04 -3.10893E-03 -1.54427E-04 -8.63662E-07
  2.000  7.20058E-02 -9.47424E-04 -8.69948E-04 -9.71872E-05 -4.28823E-06  8.52910E-02 -3.89640E-05 -3.30274E-03 -1.94974E-04 -2.38603E-06
  2.100  7.20853E-02 -4.43674E-04 -8.93119E-04 -1.22821E-04 -7.87428E-06  8.52675E-02  1.40493E-04 -3.42851E-03 -2.40385E-04 -4.85559E-06
  2.200  7.21577E-02  6.34429E-05 -8.90846E-04 -1.51057E-04 -1.31999E-05  8.51742E-02  3.40138E-04 -3.47534E-03 -2.89621E-04 -8.58383E-06
  2.300  7.22226E-02  5.54422E-04 -8.60571E-04 -1.80861E-04 -2.07371E-05  8.50170E-02  5.55355E-04 -3.43545E-03 -3.41143E-04 -1.39044E-05
  2.400  7.22796E-02  1.01083E-03 -8.01097E-04 -2.10771E-04 -3.09728E-05  8.48036E-02  7.80687E-04 -3.30481E-03 -3.92918E-04 -2.11482E-05
  2.500  7.23287E-02  1.41628E-03 -7.12851E-04 -2.38917E-04 -4.43728E-05  8.45423E-02  1.01015E-03 -3.08375E-03 -4.42455E-04 -3.06114E-05
  2.600  7.23696E-02  1.75732E-03 -5.98090E-04 -2.63066E-04 -6.13368E-05  8.42420E-02  1.23766E-03 -2.77718E-03 -4.86899E-04 -4.25171E-05
  2.700  7.24019E-02  2.02422E-03 -4.61006E-04 -2.80711E-04 -8.21498E-05  8.39116E-02  1.45750E-03 -2.39470E-03 -5.23163E-04 -5.69745E-05
  2.800  7.24245E-02  2.21158E-03 -3.07731E-04 -2.89207E-04 -1.06931E-04  8.35590E-02  1.66485E-03 -1.95039E-03 -5.48099E-04 -7.39382E-05
  2.900  7.24356E-02  2.31883E-03 -1.46206E-04 -2.85938E-04 -1.35585E-04  8.31908E-02  1.85641E-03 -1.46236E-03 -5.58717E-04 -9.31726E-05
  3.000  7.24323E-02  2.35037E-03  1.40726E-05 -2.68513E-04 -1.67766E-04  8.28118E-02  2.03085E-03 -9.51969E-04 -5.52410E-04 -1.14226E-04
  3.100  7.24107E-02  2.31564E-03  1.62444E-04 -2.34977E-04 -2.02847E-04  8.24243E-02  2.18930E-03 -4.42905E-04 -5.27198E-04 -1.36418E-04
  3.200  7.23652E-02  2.22880E-03  2.87593E-04 -1.84022E-04 -2.39916E-04  8.20277E-02  2.33567E-03  3.99855E-05 -4.81949E-04 -1.58848E-04
  3.300  7.22888E-02  2.10822E-03  3.78154E-04 -1.15182E-04 -2.77792E-04  8.16186E-02  2.47681E-03  4.71986E-04 -4.16570E-04 -1.80415E-04
  3.400  7.21730E-02  1.97577E-03  4.23392E-04 -2.89818E-05 -3.15056E-04  8.11903E-02  2.62241E-03  8.29850E-04 -3.32150E-04 -1.99873E-04
  3.500  7.20080E-02  1.85583E-03  4.13902E-04  7.29549E-05 -3.50120E-04  8.07332E-02  2.78480E-03  1.09313E-03 -2.31018E-04 -2.15894E-04
  3.600  7.17824E-02  1.77414E-03  3.42297E-04  1.87881E-04 -3.81307E-04  8.02350E-02  2.97840E-03  1.24542E-03 -1.16731E-04 -2.27149E-04
  3.700  7.14843E-02  1.75658E-03  2.03828E-04  3.11974E-04 -4.06951E-04  7.96814E-02  3.21902E-03  1.27536E-03  6.04240E-06 -2.32410E-04
  3.800  7.11009E-02  1.82785E-03 -3.11173E-06  4.40468E-04 -4.25506E-04  7.90561E-02  3.52296E-03  1.17747E-03  1.31720E-04 -2.30639E-04
  3.900  7.06192E-02  2.01012E-03 -2.76633E-04  5.67870E-04 -4.35657E-04  7.83423E-02  3.90601E-03  9.52608E-04  2.54100E-04 -2.21087E-04
  4.000  7.00265E-02  2.32183E-03 -6.11199E-04  6.88245E-04 -4.36421E-04  7.75228E-02  4.38230E-03  6.08093E-04  3.66709E-04 -2.03375E-04
  4.100  6.93108E-02  2.77660E-03 -9.97682E-04  7.95556E-04 -4.27236E-04  7.65814E-02  4.96329E-03  1.57456E-04  4.63207E-04 -1.77545E-04
  4.200  6.84615E-02  3.38229E-03 -1.42365E-03  8.84035E-04 -4.08020E-04  7.55031E-02  5.65666E-03 -3.80174E-04  5.37804E-04 -1.44097E-04
  4.300  6.74695E-02  4.14041E-03 -1.87387E-03  9.48562E-04 -3.79201E-04  7.42751E-02  6.46552E-03 -9.81021E-04  5.85654E-04 -1.03983E-04
  4.400  6.63275E-02  5.04579E-03 -2.33100E-03  9.85012E-04 -3.41706E-04  7.28874E-02  7.38773E-03 -1.61789E-03  6.03219E-04 -5.85687E-05
  4.500  6.50310E-02  6.08654E-03 -2.77643E-03  9.90558E-04 -2.96926E-04  7.13332E-02  8.41552E-03 -2.26159E-03  5.88535E-04 -9.56503E-06
  4.600  6.35775E-02  7.24438E-03 -3.19127E-03  9.63890E-04 -2.46631E-04  6.96091E-02  9.53543E-03 -2.88251E-03  5.41393E-04  4.10719E-05
  4.700  6.19677E-02  8.49529E-03 -3.55731E-03  9.05341E-04 -1.92869E-04  6.77155E-02  1.07286E-02 -3.45216E-03  4.63398E-04  9.12604E-05
  4.800  6.02046E-02  9.81040E-03 -3.85803E-03  8.16903E-04 -1.37837E-04  6.56562E-02  1.19712E-02 -3.94467E-03  3.57900E-04  1.38925E-04
  4.900  5.82942E-02  1.11572E-02 -4.07945E-03  7.02133E-04 -8.37459E-05  6.34387E-02  1.32354E-02 -4.33810E-03  2.29807E-04  1.82126E-04
  5.000  5.62450E-02  1.25007E-02 -4.21095E-03  5.65951E-04 -3.26829E-05  6.10737E-02  1.44907E-02 -4.61550E-03  8.52939E-05  2.19189E-04
  5.100  5.40678E-02  1.38052E-02 -4.24576E-03  4.14347E-04  1.35126E-05  5.85749E-02  1.57046E-02 -4.76566E-03 -6.85827E-05  2.48798E-04
  5.200  5.17758E-02  1.50354E-02 -4.18132E-03  2.54023E-04  5.33537E-05  5.59583E-02  1.68445E-02 -4.78351E-03 -2.24317E-04  2.70079E-04
  5.300  4.93839E-02  1.61581E-02 -4.01937E-03  9.19883E-05  8.57815E-05  5.32421E-02  1.78791E-02 -4.67015E-03 -3.74418E-04  2.82633E-04
  5.400  4.69087E-02  1.71433E-02 -3.76577E-03 -6.48550E-05  1.10207E-04  5.04463E-02  1.87794E-02 -4.43255E-03 -5.11857E-04  2.86548E-04
  5.500  4.43682E-02  1.79655E-02 -3.43015E-03 -2.10107E-04  1.26516E-04  4.75916E-02  1.95204E-02 -4.08291E-03 -6.30472E-04  2.82367E-04
  5.600  4.17811E-02  1.86046E-02 -3.02526E-03 -3.38219E-04  1.35044E-04  4.46998E-02  2.00818E-02 -3.63775E-03 -7.25307E-04  2.71025E-04
  5.700  3.91669E-02  1.90463E-02 -2.56628E-03 -4.44773E-04  1.36517E-04  4.17927E-02  2.04487E-02 -3.11690E-03 -7.92846E-04  2.53768E-04
  5.800  3.65452E-02  1.92828E-02 -2.06997E-03 -5.26673E-04  1.31969E-04  3.88921E-02  2.06125E-02 -2.54222E-03 -8.31154E-04  2.32045E-04
  5.900  3.39355E-02  1.93125E-02 -1.55376E-03 -5.82243E-04  1.22649E-04  3.60190E-02  2.05710E-02 -1.93645E-03 -8.39896E-04  2.07405E-04
  6.000  3.13569E-02  1.91400E-02 -1.03491E-03 -6.11226E-04  1.09913E-04  3.31939E-02  2.03278E-02 -1.32201E-03 -8.20261E-04  1.81384E-04
  6.100  2.88276E-02  1.87757E-02 -5.29663E-04 -6.14692E-04  9.51267E-05  3.04357E-02  1.98926E-02 -7.19929E-04 -7.74789E-04  1.55411E-04
  6.200  2.63647E-02  1.82348E-02 -5.26041E-05 -5.94874E-04  7.95751E-05  2.77620E-02  1.92802E-02 -1.48963E-04 -7.07120E-04  1.30726E-04
  6.300  2.39841E-02  1.75368E-02  3.83931E-04 -5.54939E-04  6.43849E-05  2.51888E-02  1.85099E-02  3.75087E-04 -6.21702E-04  1.08323E-04
  6.400  2.16997E-02  1.67040E-02  7.70224E-04 -4.98719E-04  5.04719E-05  2.27297E-02  1.76041E-02  8.39845E-04 -5.23469E-04  8.89138E-05
  6.500  1.95237E-02  1.57612E-02  1.09938E-03 -4.30437E-04  3.85088E-05  2.03967E-02  1.65879E-02  1.23658E-03 -4.17515E-04  7.29203E-05
  6.600  1.74664E-02  1.47341E-02  1.36739E-03 -3.54424E-04  2.89150E-05  1.81993E-02  1.54874E-02  1.56021E-03 -3.08800E-04  6.04848E-05
  6.700  1.55357E-02  1.36485E-02  1.57297E-03 -2.74868E-04  2.18674E-05  1.61445E-02  1.43292E-02  1.80912E-03 -2.01886E-04  5.15020E-05
  6.800  1.37373E-02  1.25294E-02  1.71735E-03 -1.95599E-04  1.73270E-05  1.42374E-02  1.31390E-02  1.98482E-03 -1.00733E-04  4.56639E-05
  6.900  1.20750E-02  1.14003E-02  1.80392E-03 -1.19924E-04  1.50783E-05  1.24803E-02  1.19410E-02  2.09144E-03 -8.55401E-06  4.25130E-05
  7.000  1.05500E-02  1.02823E-02  1.83780E-03 -5.05148E-05  1.47754E-05  1.08738E-02  1.07573E-02  2.13523E-03  7.22617E-05  4.14989E-05
  7.100  9.16175E-03  9.19404E-03  1.82536E-03  1.06516E-05  1.59911E-05  9.41597E-03  9.60698E-03  2.12393E-03  1.40171E-04  4.20323E-05
  7.200  7.90771E-03  8.15110E-03  1.77382E-03  6.22974E-05  1.82634E-05  8.10320E-03  8.50631E-03  2.06624E-03  1.94441E-04  4.35340E-05
  7.300  6.78366E-03  7.16594E-03  1.69074E-03  1.03807E-04  2.11373E-05  6.93016E-03  7.46817E-03  1.97125E-03  2.35067E-04  4.54744E-05
  7.400  5.78395E-03  6.24789E-03  1.58369E-03  1.35156E-04  2.41977E-05  5.89011E-03  6.50215E-03  1.84800E-03  2.62666E-04  4.74025E-05
  7.500  4.90174E-03  5.40328E-03  1.45986E-03  1.56810E-04  2.70941E-05  4.97516E-03  5.61473E-03  1.70503E-03  2.78341E-04  4.89639E-05
  7.600  4.12926E-03  4.63569E-03  1.32586E-03  1.69619E-04  2.95549E-05  4.17652E-03  4.80944E-03  1.55013E-03  2.83543E-04  4.99079E-05
  7.700  3.45809E-03  3.94619E-03  1.18750E-03  1.74699E-04  3.13931E-05  3.48486E-03  4.08723E-03  1.39013E-03  2.79938E-04  5.00858E-05
  7.800  2.87944E-03  3.33378E-03  1.04966E-03  1.73322E-04  3.25038E-05  2.89049E-03  3.44681E-03  1.23073E-03  2.69276E-04  4.94412E-05
  7.900  2.38434E-03  2.79569E-03  9.16290E-04  1.66817E-04  3.28564E-05  2.38367E-03  2.88508E-03  1.07650E-03  2.53289E-04  4.79957E-05
  8.000  1.96391E-03  2.32781E-03  7.90387E-04  1.56486E-04  3.24816E-05  1.95481E-03  2.39754E-03  9.30915E-04  2.33603E-04  4.58306E-05
  8.100  1.60952E-03  1.92508E-03  6.74062E-04  1.43539E-04  3.14566E-05  1.59464E-03  1.97868E-03  7.96379E-04  2.11676E-04  4.30693E-05
  8.200  1.31294E-03  1.58177E-03  5.68630E-04  1.29047E-04  2.98903E-05  1.29439E-03  1.62232E-03  6.74385E-04  1.88755E-04  3.98582E-05
  8.300  1.06648E-03  1.29185E-03  4.74723E-04  1.13916E-04  2.79081E-05  1.04587E-03  1.32200E-03  5.65633E-04  1.65862E-04  3.63519E-05
  8.400  8.63031E-04  1.04920E-03  3.92411E-04  9.88729E-05  2.56396E-05  8.41600E-04  1.07118E-03  4.70183E-04  1.43786E-04  3.26996E-05
  8.500  6.96157E-04  8.47849E-04  3.21327E-04  8.44690E-05  2.32082E-05  6.74801E-04  8.63508E-04  3.87596E-04  1.23099E-04  2.90357E-05
  8.600  5.60098E-04  6.82126E-04  2.60785E-04  7.10927E-05  2.07241E-05  5.39448E-04  6.92957E-04  3.17074E-04  1.04177E-04  2.54734E-05
  8.700  4.49776E-04  5.46765E-04  2.09889E-04  5.89877E-05  1.82793E-05  4.30247E-04  5.53965E-04  2.57585E-04  8.72299E-05  2.21015E-05
  8.800  3.60767E-04  4.36987E-04  1.67620E-04  4.82770E-05  1.59455E-05  3.42610E-04  4.41498E-04  2.07965E-04  7.23281E-05  1.89836E-05
  8.900  2.89267E-04  3.48534E-04  1.32916E-04  3.89876E-05  1.37741E-05  2.72607E-04  3.51083E-04  1.67002E-04  5.94390E-05  1.61599E-05
  9.000  2.32042E-04  2.77679E-04  1.04725E-04  3.10749E-05  1.17979E-05  2.16914E-04  2.78817E-04  1.33502E-04  4.84539E-05  1.36492E-05
  9.100  1.86376E-04  2.21209E-04  8.20519E-05  2.44445E-05  1.00329E-05  1.72749E-04  2.21349E-04  1.06339E-04  3.92142E-05  1.14534E-05
  9.200  1.50009E-04  1.76393E-04  6.39833E-05  1.89717E-05  8.48202E-06  1.37812E-04  1.75840E-04  8.44782E-05  3.15339E-05  9.56102E-06
  9.300  1.21082E-04  1.40944E-04  4.97049E-05  1.45168E-05  7.13816E-06  1.10218E-04  1.39918E-04  6.69998E-05  2.52160E-05  7.95104E-06
  9.400  9.80784E-05  1.12970E-04  3.85072E-05  1.09371E-05  5.98712E-06  8.84355E-05  1.11628E-04  5.31016E-05  2.00663E-05  6.59655E-06
  9.500  7.97706E-05  9.09193E-05  2.97848E-05  8.09517E-06  5.01043E-06  7.12345E-05  8.93758E-05  4.20990E-05  1.59016E-05  5.46766E-06
  9.600  6.51747E-05  7.35390E-05  2.30304E-05  5.86473E-06  4.18763E-06  5.76323E-05  7.18727E-05  3.34173E-05  1.25559E-05  4.53384E-06
  9.700  5.35061E-05  5.98224E-05  1.78261E-05  4.13353E-06  3.49795E-06  4.68504E-05  5.80897E-05  2.65816E-05  9.88276E-06  3.76568E-06
  9.800  4.41434E-05  4.89693E-05  1.38318E-05  2.80461E-06  2.92155E-06  3.82752E-05  4.72104E-05  2.12047E-05  7.75609E-06  3.13601E-06
  9.900  3.65965E-05  4.03480E-05  1.07752E-05  1.79617E-06  2.44033E-06  3.14259E-05  3.85922E-05  1.69745E-05  6.06975E-06  2.62061E-06
 10.000  3.04811E-05  3.34632E-05  8.43978E-06  1.04051E-06  2.03830E-06  2.59274E-05  3.17325E-05  1.36419E-05  4.73569E-06  2.19843E-06
 10.100  2.54959E-05  2.79291E-05  6.65576E-06  4.82486E-07  1.70176E-06  2.14876E-05  2.62400E-05  1.10098E-05  3.68199E-06  1.85165E-06
 10.200  2.14061E-05  2.34462E-05  5.29082E-06  7.77694E-08  1.41920E-06  1.78799E-05  2.18119E-05  8.92344E-06  2.85053E-06  1.56547E-06
 10.300  1.80284E-05  1.97833E-05  4.24273E-06 -2.08911E-07  1.18113E-06  1.49289E-05  1.82143E-05  7.26178E-06  2.19478E-06  1.32780E-06
 10.400  1.52201E-05  1.67626E-05  3.43310E-06 -4.05405E-07  9.79838E-07  1.24983E-05  1.52674E-05  5.93080E-06  1.67772E-06  1.12890E-06
 10.500  1.28698E-05  1.42477E-05  2.80226E-06 -5.33567E-07  8.09100E-07  1.04831E-05  1.28331E-05  4.85774E-06  1.27009E-06  9.61062E-07
 10.600  1.08909E-05  1.21343E-05  2.30511E-06 -6.10468E-07  6.63921E-07  8.80149E-06  1.08055E-05  3.98649E-06  9.48838E-07  8.18223E-07
 10.700  9.21558E-06  1.03429E-05  1.90792E-06 -6.49383E-07  5.40300E-07  7.39026E-06  9.10372E-06  3.27393E-06  6.95833E-07  6.95674E-07
 10.800  7.79081E-06  8.81279E-06  1.58566E-06 -6.60587E-07  4.35018E-07  6.20010E-06  7.66567E-06  2.68702E-06  4.96864E-07  5.89790E-07
 10.900  6.57480E-06  7.49784E-06  1.32001E-06 -6.51985E-07  3.45478E-07  5.19253E-06  6.44385E-06  2.20054E-06  3.40801E-07  4.97802E-07
 11.000  5.53447E-06  6.36266E-06  1.09773E-06 -6.29607E-07  2.69557E-07  4.33728E-06  5.40164E-06  1.79521E-06  2.18936E-07  4.17605E-07
 11.100  4.64338E-06  5.38001E-06  9.09379E-07 -5.98007E-07  2.05505E-07  3.61035E-06  4.51066E-06  1.45633E-06  1.24460E-07  3.47601E-07
 11.200  3.88019E-06  4.52866E-06  7.48327E-07 -5.60580E-07  1.51858E-07  2.99251E-06  3.74858E-06  1.17260E-06  5.20379E-08  2.86571E-07
 11.300  3.22739E-06  3.79174E-06  6.09945E-07 -5.19815E-07  1.07367E-07  2.46811E-06  3.09760E-06  9.35273E-07 -2.52551E-09  2.33569E-07
 11.400  2.67041E-06  3.15554E-06  4.91003E-07 -4.77504E-07  7.09497E-08  2.02423E-06  2.54319E-06  7.37465E-07 -4.25516E-08  1.87837E-07
 11.500  2.19689E-06  2.60856E-06  3.89191E-07 -4.34917E-07  4.16486E-08  1.64998E-06  2.07318E-06  5.73624E-07 -7.07011E-08  1.48741E-07
 11.600  1.79619E-06  2.14087E-06  3.02771E-07 -3.92935E-07  1.86006E-08  1.33607E-06  1.67712E-06  4.39149E-07 -8.91395E-08  1.15719E-07
 11.700  1.45899E-06  1.74366E-06  2.30326E-07 -3.52162E-07  1.01417E-09  1.07438E-06  1.34584E-06  3.30103E-07 -9.96628E-08  8.82446E-08
 11.800  1.17703E-06  1.40893E-06  1.70588E-07 -3.13011E-07 -1.18455E-08  8.57790E-07  1.07112E-06  2.43027E-07 -1.03792E-07  6.58043E-08
 11.900  9.42951E-07  1.12929E-06  1.22333E-07 -2.75768E-07 -2.06664E-08  6.79953E-07  8.45498E-07  1.74805E-07 -1.02840E-07  4.78842E-08
 12.000  7.50114E-07  8.97888E-07  8.43319E-08 -2.40636E-07 -2.60947E-08  5.35212E-07  6.62171E-07  1.22595E-07 -9.79547E-08  3.39652E-08
 12.100  5.92572E-07  7.08338E-07  5.53346E-08 -2.07761E-07 -2.87349E-08  4.18513E-07  5.14922E-07  8.37897E-08 -9.01493E-08  2.35251E-08
 12.200  4.64988E-07  5.54729E-07  3.40768E-08 -1.77256E-07 -2.91487E-08  3.25355E-07  3.98101E-07  5.60057E-08 -8.03160E-08  1.60456E-08
 12.300  3.62602E-07  4.31633E-07  1.93074E-08 -1.49202E-07 -2.78511E-08  2.51755E-07  3.06614E-07  3.70817E-08 -6.92350E-08  1.10218E-08
 12.400  2.81205E-07  3.34119E-07  9.81917E-09 -1.23653E-07 -2.53067E-08  1.94222E-07  2.35926E-07  2.50877E-08 -5.75761E-08  7.97313E-09
 12.500  2.17106E-07  2.57768E-07  4.48036E-09 -1.00635E-07 -2.19257E-08  1.49724E-07  1.82049E-07  1.83315E-08 -4.59009E-08  6.45336E-09
 12.600  1.67102E-07  1.98682E-07  2.26240E-09 -8.01430E-08 -1.80614E-08  1.15662E-07  1.41535E-07  1.53624E-08 -3.46636E-08  6.05974E-09
 12.700  1.28453E-07  1.53471E-07  2.26019E-09 -6.21371E-08 -1.40090E-08  8.98380E-08  1.11452E-07  1.49686E-08 -2.42143E-08  6.43944E-09
 12.800  9.88374E-08  1.19238E-07  3.70441E-09 -4.65436E-08 -1.00060E-08  7.04230E-08  8.93491E-08  1.61679E-08 -1.48045E-08  7.29354E-09
 12.900  7.63213E-08  9.35525E-08  5.96562E-09 -3.32554E-08 -6.23453E-09  5.59156E-08  7.32235E-08  1.81926E-08 -6.59514E-09  8.37823E-09
 13.000  5.93124E-08  7.44086E-08  8.55085E-09 -2.21346E-08 -2.82512E-09  4.51062E-08  6.14691E-08  2.04683E-08  3.33588E-10  9.50357E-09
 13.100  4.65207E-08  6.01843E-08  1.10943E-08 -1.30173E-08  1.37848E-10  3.70372E-08  5.28296E-08  2.25900E-08  5.97002E-09  1.05300E-08
 13.200  3.69171E-08  4.95932E-08  1.33432E-08 -5.71984E-09  2.61012E-09  3.09653E-08  4.63470E-08  2.42959E-08  1.03584E-08  1.13631E-08
 13.300  2.96932E-08  4.16368E-08  1.51419E-08 -4.51417E-11  4.58077E-09  2.63254E-08  4.13119E-08  2.54403E-08  1.35858E-08  1.19476E-08
 13.400  2.42253E-08  3.55573E-08  1.64132E-08  4.21010E-09  6.06526E-09  2.26979E-08  3.72170E-08  2.59678E-08  1.57694E-08  1.22601E-08
 13.500  2.00399E-08  3.07938E-08  1.71414E-08  7.24889E-09  7.09874E-09  1.97785E-08  3.37141E-08  2.58902E-08  1.70453E-08  1.23027E-08
 13.600  1.67841E-08  2.69424E-08  1.73551E-08  9.26797E-09  7.72982E-09  1.73531E-08  3.05772E-08  2.52647E-08  1.75579E-08  1.20956E-08
 13.700  1.42002E-08  2.37212E-08  1.71130E-08  1.04528E-08  8.01506E-09  1.52756E-08  2.76696E-08  2.41769E-08  1.74516E-08  1.16715E-08
 13.800  1.21030E-08  2.09401E-08  1.64910E-08  1.09737E-08  8.01428E-09  1.34499E-08  2.49188E-08  2.27263E-08  1.68646E-08  1.10704E-08
 13.900  1.03626E-08  1.84764E-08  1.55726E-08  1.09833E-08  7.78684E-09  1.18156E-08  2.22940E-08  2.10152E-08  1.59235E-08  1.03349E-08
 14.000  8.88917E-09  1.62547E-08  1.44406E-08  1.06148E-08  7.38880E-09  1.03364E-08  1.97912E-08  1.91408E-08  1.47404E-08  9.50724E-09
 14.100  7.62170E-09  1.42316E-08  1.31724E-08  9.98187E-09  6.87091E-09  8.99156E-09  1.74202E-08  1.71902E-08  1.34111E-08  8.62642E-09
 14.200  6.51927E-09  1.23837E-08  1.18360E-08  9.17866E-09  6.27743E-09  7.76987E-09  1.51964E-08  1.52369E-08  1.20147E-08  7.72691E-09
 14.300  5.55433E-09  1.06995E-08  1.04884E-08  8.28113E-09  5.64551E-09  6.66510E-09  1.31356E-08  1.33403E-08  1.06142E-08  6.83757E-09
 14.400  4.70802E-09  9.17312E-09  9.17491E-09  7.34859E-09  5.00520E-09  5.67310E-09  1.12500E-08  1.15448E-08  9.25723E-09  5.98135E-09
 14.500  3.96681E-09  7.80098E-09  7.92932E-09  6.42559E-09  4.37971E-09  4.79007E-09  9.54719E-09  9.88168E-09  7.97807E-09  5.17542E-09
 14.600  3.32024E-09  6.57912E-09  6.77516E-09  5.54400E-09  3.78607E-09  4.01159E-09  8.02907E-09  8.37009E-09  6.79940E-09  4.43158E-09
 14.700  2.75956E-09  5.50218E-09  5.72689E-09  4.72512E-09  3.23588E-09  3.33218E-09  6.69254E-09  7.01928E-09  5.73426E-09  3.75694E-09
 14.800  2.27685E-09  4.56301E-09  4.79141E-09  3.98169E-09  2.73617E-09  2.74532E-09  5.53008E-09  5.83045E-09  4.78802E-09  3.15459E-09
 14.900  1.86458E-09  3.75271E-09  3.96970E-09  3.31973E-09  2.29026E-09  2.24358E-09  4.53075E-09  4.79870E-09  3.96011E-09  2.62448E-09
 15.000  1.51548E-09  3.06096E-09  3.25821E-09  2.74020E-09  1.89856E-09  1.81896E-09  3.68122E-09  3.91475E-09  3.24571E-09  2.16408E-09
 15.100  1.22246E-09  2.47654E-09  2.65026E-09  2.24041E-09  1.55935E-09  1.46316E-09  2.96677E-09  3.16648E-09  2.63704E-09  1.76913E-09
 15.200  9.78693E-10  1.98779E-09  2.13711E-09  1.81521E-09  1.26941E-09  1.16790E-09  2.37208E-09  2.54016E-09  2.12454E-09  1.43423E-09
 15.300  7.77705E-10  1.58306E-09  1.70893E-09  1.45796E-09  1.02456E-09  9.25184E-10  1.88194E-09  2.02147E-09  1.69776E-09  1.15333E-09
 15.400  6.13445E-10  1.25110E-09  1.35549E-09  1.16126E-09  8.20122E-10  7.27479E-10  1.48182E-09  1.59622E-09  1.34605E-09  9.20160E-10
 15.500  4.80364E-10  9.81349E-10  1.06671E-09  9.17491E-10  6.51232E-10  5.67865E-10  1.15816E-09  1.25092E-09  1.05905E-09  7.28508E-10
 15.600  3.73462E-10  7.64107E-10  8.33057E-10  7.19245E-10  5.13109E-10  4.40111E-10  8.98660E-10  9.73113E-10  8.27049E-10  5.72464E-10
 15.700  2.88304E-10  5.90676E-10  6.45749E-10  5.59570E-10  4.01228E-10  3.38713E-10  6.92378E-10  7.51568E-10  6.41190E-10  4.46561E-10
 15.800  2.21020E-10  4.53387E-10  4.96930E-10  4.32140E-10  3.11433E-10  2.58887E-10  5.29753E-10  5.76390E-10  4.93579E-10  3.45861E-10
 15.900  1.68283E-10  3.45599E-10  3.79703E-10  3.31337E-10  2.39998E-10  1.96540E-10  4.02574E-10  4.39009E-10  3.77321E-10  2.65996E-10
 16.000  1.27270E-10  2.61648E-10  2.88124E-10  2.52270E-10  1.83648E-10  1.48220E-10  3.03890E-10  3.32124E-10  2.86491E-10  2.03171E-10
 16.100  9.56161E-11  1.96768E-10  2.17151E-10  1.90756E-10  1.39562E-10  1.11052E-10  2.27896E-10  2.49606E-10  2.16081E-10  1.54141E-10
 16.200  7.13684E-11  1.47007E-10  1.62574E-10  1.43275E-10  1.05345E-10  8.26723E-11  1.69808E-10  1.86375E-10  1.61913E-10  1.16171E-10
 16.300  5.29290E-11  1.09122E-10  1.20922E-10  1.06906E-10  7.89905E-11  6.11575E-11  1.25726E-10  1.38277E-10  1.20546E-10  8.69858E-11
 16.400  3.90066E-11  8.04878E-11  8.93656E-11  7.92545E-11  5.88446E-11  4.49614E-11  9.25090E-11  1.01950E-10  8.91834E-11  6.47169E-11
 16.500  2.85679E-11  5.89970E-11  6.56292E-11  5.83831E-11  4.35568E-11  3.28527E-11  6.76512E-11  7.47043E-11  6.55714E-11  4.78463E-11
 16.600  2.07948E-11  4.29788E-11  4.78993E-11  4.27403E-11  3.20382E-11  2.38606E-11  4.91746E-11  5.44080E-11  4.79166E-11  3.51546E-11
 16.700  1.50455E-11  3.11202E-11  3.47463E-11  3.10970E-11  2.34199E-11  1.72269E-11  3.55317E-11  3.93893E-11  3.48048E-11  2.56720E-11
 16.800  1.08210E-11  2.23992E-11  2.50539E-11  2.24890E-11  1.70156E-11  1.23647E-11  2.55233E-11  2.83484E-11  2.51309E-11  1.86344E-11
 16.900  7.73698E-12  1.60273E-11  1.79584E-11  1.61670E-11  1.22883E-11  8.82361E-12  1.82279E-11  2.02838E-11  1.80397E-11  1.34457E-11
 17.000  5.49989E-12  1.14014E-11  1.27973E-11  1.15541E-11  8.82175E-12  6.26071E-12  1.29434E-11  1.44301E-11  1.28747E-11  9.64494E-12
 17.100  3.88727E-12  8.06418E-12  9.06692E-12  8.20954E-12  6.29607E-12  4.41720E-12  9.13907E-12  1.02076E-11  9.13603E-12  6.87850E-12
 17.200  2.73196E-12  5.67147E-12  6.38744E-12  5.79978E-12  4.46752E-12  3.09917E-12  6.41692E-12  7.18026E-12  6.44650E-12  4.87748E-12
 17.300  1.90929E-12  3.96638E-12  4.47453E-12  4.07422E-12  3.15194E-12  2.16244E-12  4.48073E-12  5.02279E-12  4.52337E-12  3.43902E-12
 17.400  1.32697E-12  2.75856E-12  3.11710E-12  2.84607E-12  2.21121E-12  1.50063E-12  3.11169E-12  3.49434E-12  3.15646E-12  2.41122E-12
 17.500  9.17221E-13  1.90804E-12  2.15954E-12  1.97716E-12  1.54260E-12  1.03575E-12  2.14928E-12  2.41784E-12  2.19059E-12  1.68124E-12
 17.600  6.30567E-13  1.31261E-12  1.48802E-12  1.36603E-12  1.07021E-12  7.11067E-13  1.47660E-12  1.66400E-12  1.51207E-12  1.16583E-12
 17.700  4.31180E-13  8.98154E-13  1.01980E-12  9.38693E-13  7.38425E-13  4.85587E-13  1.00909E-12  1.13912E-12  1.03813E-12  8.04041E-13
 17.800  2.93277E-13  6.11300E-13  6.95186E-13  6.41588E-13  5.06742E-13  3.29871E-13  6.85980E-13  7.75696E-13  7.08971E-13  5.51546E-13
 17.900  1.98432E-13  4.13875E-13  4.71403E-13  4.36194E-13  3.45886E-13  2.22927E-13  4.63909E-13  5.25467E-13  4.81634E-13  3.76329E-13
 18.000  1.33561E-13  2.78751E-13  3.17987E-13  2.94996E-13  2.34837E-13  1.49880E-13  3.12114E-13  3.54120E-13  3.25492E-13  2.55421E-13
 18.100  8.94345E-14  1.86774E-13  2.13389E-13  1.98466E-13  1.58602E-13  1.00255E-13  2.08916E-13  2.37423E-13  2.18835E-13  1.72452E-13
 18.200  5.95805E-14  1.24506E-13  1.42462E-13  1.32833E-13  1.06556E-13  6.67214E-14  1.39131E-13  1.58374E-13  1.46375E-13  1.15830E-13
 18.300  3.94908E-14  8.25755E-14  9.46262E-14  8.84505E-14  7.12187E-14  4.41816E-14  9.21917E-14  1.05112E-13  9.74103E-14  7.73986E-14
 18.400  2.60435E-14  5.44906E-14  6.25352E-14  5.85979E-14  4.73561E-14  2.91106E-14  6.07839E-14  6.94130E-14  6.44986E-14  5.14545E-14
 18.500  1.70895E-14  3.57781E-14  4.11203E-14  3.86251E-14  3.13286E-14  1.90858E-14  3.98779E-14  4.56109E-14  4.24932E-14  3.40336E-14
 18.600  1.11585E-14  2.33752E-14  2.69044E-14  2.53326E-14  2.06208E-14  1.24519E-14  2.60338E-14  2.98229E-14  2.78565E-14  2.23977E-14
 18.700  7.25004E-15  1.51967E-14  1.75162E-14  1.65322E-14  1.35047E-14  8.08424E-15  1.69130E-14  1.94044E-14  1.81714E-14  1.46665E-14
 18.800  4.68760E-15  9.83146E-15  1.13481E-14  1.07357E-14  8.80029E-15  5.22321E-15  1.09344E-14  1.25642E-14  1.17956E-14  9.55634E-15
 18.900  3.01614E-15  6.32955E-15  7.31627E-15  6.93752E-15  5.70631E-15  3.35849E-15  7.03515E-15  8.09593E-15  7.61961E-15  6.19602E-15
 19.000  1.93133E-15  4.05536E-15  4.69407E-15  4.46127E-15  3.68193E-15  2.14918E-15  4.50475E-15  5.19170E-15  4.89827E-15  3.99765E-15
 19.100  1.23077E-15  2.58584E-15  2.99721E-15  2.85502E-15  2.36413E-15  1.36879E-15  2.87078E-15  3.31341E-15  3.13373E-15  2.56674E-15
 19.200  7.80602E-16  1.64097E-15  1.90462E-15  1.81832E-15  1.51062E-15  8.67653E-16  1.82085E-15  2.10464E-15  1.99528E-15  1.64004E-15
 19.300  4.92748E-16  1.03643E-15  1.20457E-15  1.15253E-15  9.60594E-16  5.47413E-16  1.14948E-15  1.33055E-15  1.26439E-15  1.04289E-15
 19.400  3.09582E-16  6.51528E-16  7.58232E-16  7.27061E-16  6.07912E-16  3.43759E-16  7.22269E-16  8.37223E-16  7.97448E-16  6.60004E-16
 19.500  1.93595E-16  4.07653E-16  4.75041E-16  4.56494E-16  3.82884E-16  2.14870E-16  4.51725E-16  5.24353E-16  5.00591E-16  4.15708E-16
  67 141 196   0.100
  0.000  6.99283E-02 -3.56864E-16 -5.41234E-16 -6.25463E-16 -8.29684E-16  7.88368E-02 -4.18928E-16 -6.03684E-16 -7.88084E-16 -4.00537E-16
  0.100  6.99324E-02 -4.16384E-05 -2.01207E-08 -5.43177E-13 -1.23022E-15  7.88755E-02 -5.83460E-06 -6.58399E-08 -6.38883E-12 -1.55923E-15
  0.200  6.99449E-02 -1.64271E-04 -3.19428E-07 -3.65397E-11  2.66271E-13  7.89907E-02 -2.31617E-05 -1.04444E-06 -4.07863E-10  2.09309E-13
  0.300  6.99660E-02 -3.61169E-04 -1.59613E-06 -4.49433E-10  6.66285E-12  7.91792E-02 -5.14502E-05 -5.21227E-06 -4.62693E-09  5.21062E-12
  0.400  6.99959E-02 -6.21512E-04 -4.95273E-06 -2.77665E-09  6.38443E-11  7.94362E-02 -8.98128E-05 -1.61452E-05 -2.58444E-08  4.98688E-11
  0.500  7.00352E-02 -9.30946E-04 -1.18075E-05 -1.17623E-08  3.60417E-10  7.97551E-02 -1.37002E-04 -3.84061E-05 -9.78120E-08  2.80917E-10
  0.600  7.00841E-02 -1.27234E-03 -2.37769E-05 -3.91150E-08  1.44782E-09  8.01275E-02 -1.91406E-04 -7.71363E-05 -2.89116E-07  1.12529E-09
  0.700  7.01430E-02 -1.62666E-03 -4.25350E-05 -1.09585E-07  4.57401E-09  8.05440E-02 -2.51048E-04 -1.37579E-04 -7.19871E-07  3.54224E-09
  0.800  7.02119E-02 -1.97397E-03 -6.96574E-05 -2.69637E-07  1.20530E-08  8.09940E-02 -3.13585E-04 -2.24562E-04 -1.57938E-06  9.29110E-09
  0.900  7.02907E-02 -2.29441E-03 -1.06459E-04 -5.98487E-07  2.74821E-08  8.14660E-02 -3.76316E-04 -3.41986E-04 -3.14282E-06  2.10592E-08
  1.000  7.03789E-02 -2.56925E-03 -1.53832E-04 -1.22059E-06  5.55037E-08  8.19483E-02 -4.36207E-04 -4.92335E-04 -5.78454E-06  4.22029E-08
  1.100  7.04759E-02 -2.78179E-03 -2.12103E-04 -2.31792E-06  1.00712E-07  8.24289E-02 -4.89927E-04 -6.76266E-04 -9.98528E-06  7.57844E-08
  1.200  7.05803E-02 -2.91823E-03 -2.80907E-04 -4.13980E-06  1.65264E-07  8.28961E-02 -5.33917E-04 -8.92293E-04 -1.63303E-05  1.22559E-07
  1.300  7.06907E-02 -2.96831E-03 -3.59097E-04 -7.00731E-06  2.44792E-07  8.33386E-02 -5.64481E-04 -1.13659E-03 -2.54961E-05  1.77615E-07
  1.400  7.08053E-02 -2.92583E-03 -4.44698E-04 -1.13096E-05  3.22358E-07  8.37461E-02 -5.77922E-04 -1.40297E-03 -3.82224E-05  2.25498E-07
  1.500  7.09221E-02 -2.78896E-03 -5.34908E-04 -1.74890E-05  3.60424E-07  8.41093E-02 -5.70697E-04 -1.68296E-03 -5.52701E-05  2.33865E-07
  1.600  7.10390E-02 -2.56030E-03 -6.26159E-04 -2.60136E-05  2.91169E-07  8.44201E-02 -5.39621E-04 -1.96611E-03 -7.73622E-05  1.46009E-07
  1.700  7.11539E-02 -2.24675E-03 -7.14236E-04 -3.73354E-05  5.86726E-09  8.46725E-02 -4.82079E-04 -2.24040E-03 -1.05112E-04 -1.27059E-07
  1.800  7.12647E-02 -1.85919E-03 -7.94450E-04 -5.18360E-05 -6.55526E-07  8.48617E-02 -3.96253E-04 -2.49280E-03 -1.38941E-04 -7.13948E-07
  1.900  7.13696E-02 -1.41193E-03 -8.61882E-04 -6.97610E-05 -1.91307E-06  8.49852E-02 -2.81339E-04 -2.70994E-03 -1.78989E-04 -1.78831E-06
  2.000  7.14671E-02 -9.22016E-04 -9.11654E-04 -9.11490E-05 -4.05204E-06  8.50424E-02 -1.37728E-04 -2.87888E-03 -2.25028E-04 -3.57086E-06
  2.100  7.15562E-02 -4.08430E-04 -9.39261E-04 -1.15759E-04 -7.42274E-06  8.50345E-02  3.28681E-05 -2.98787E-03 -2.76382E-04 -6.32643E-06
  2.200  7.16362E-02  1.08878E-04 -9.40903E-04 -1.43009E-04 -1.24333E-05  8.49648E-02  2.27370E-04 -3.02716E-03 -3.31871E-04 -1.03547E-05
  2.300  7.17069E-02  6.09963E-04 -9.13834E-04 -1.71921E-04 -1.95339E-05  8.48382E-02  4.41391E-04 -2.98969E-03 -3.89776E-04 -1.59740E-05
  2.400  7.17682E-02  1.07590E-03 -8.56677E-04 -2.01107E-04 -2.91923E-05  8.46608E-02  6.69413E-04 -2.87177E-03 -4.47845E-04 -2.34969E-05
  2.500  7.18205E-02  1.48978E-03 -7.69711E-04 -2.28764E-04 -4.18596E-05  8.44399E-02  9.05085E-04 -2.67354E-03 -5.03336E-04 -3.32001E-05
  2.600  7.18640E-02  1.83759E-03 -6.55069E-04 -2.52729E-04 -5.79300E-05  8.41834E-02  1.14163E-03 -2.39928E-03 -5.53116E-04 -4.52877E-05
  2.700  7.18989E-02  2.10907E-03 -5.16855E-04 -2.70561E-04 -7.76933E-05  8.38990E-02  1.37239E-03 -2.05748E-03 -5.93794E-04 -5.98527E-05
  2.800  7.19247E-02  2.29834E-03 -3.61149E-04 -2.79664E-04 -1.01288E-04  8.35938E-02  1.59139E-03 -1.66071E-03 -6.21912E-04 -7.68385E-05
  2.900  7.19402E-02  2.40434E-03 -1.95877E-04 -2.77454E-04 -1.28653E-04  8.32739E-02  1.79395E-03 -1.22523E-03 -6.34158E-04 -9.60054E-05
  3.000  7.19434E-02  2.43114E-03 -3.05526E-05 -2.61547E-04 -1.59495E-04  8.29436E-02  1.97735E-03 -7.70348E-04 -6.27615E-04 -1.16906E-04
  3.100  7.19308E-02  2.38786E-03  1.24113E-04 -2.29966E-04 -1.93254E-04  8.26049E-02  2.14129E-03 -3.17552E-04 -6.00005E-04 -1.38875E-04
  3.200  7.18975E-02  2.28851E-03  2.56723E-04 -1.81344E-04 -2.29104E-04  8.22573E-02  2.28839E-03  1.10500E-04 -5.49929E-04 -1.61033E-04
  3.300  7.18372E-02  2.15141E-03  3.55809E-04 -1.15122E-04 -2.65956E-04  8.18974E-02  2.42434E-03  4.91160E-04 -4.77074E-04 -1.82314E-04
  3.400  7.17417E-02  1.99851E-03  4.10501E-04 -3.16964E-05 -3.02494E-04  8.15186E-02  2.55802E-03  8.03019E-04 -3.82356E-04 -2.01508E-04
  3.500  7.16015E-02  1.85439E-03  4.11242E-04  6.74764E-05 -3.37233E-04  8.11116E-02  2.70122E-03  1.02714E-03 -2.68011E-04 -2.17327E-04
  3.600  7.14055E-02  1.74516E-03  3.50464E-04  1.79842E-04 -3.68590E-04  8.06645E-02  2.86824E-03  1.14820E-03 -1.37580E-04 -2.28485E-04
  3.700  7.11417E-02  1.69715E-03  2.23217E-04  3.01789E-04 -3.94982E-04  8.01628E-02  3.07518E-03  1.15550E-03  4.18490E-06 -2.33786E-04
  3.800  7.07971E-02  1.73565E-03  2.76682E-05  4.28774E-04 -4.14920E-04  7.95905E-02  3.33903E-03  1.04372E-03  1.51516E-04 -2.32221E-04
  3.900  7.03583E-02  1.88352E-03 -2.34545E-04  5.55519E-04 -4.27121E-04  7.89307E-02  3.67664E-03  8.13402E-04  2.97909E-04 -2.23053E-04
  4.000  6.98121E-02  2.15994E-03 -5.58159E-04  6.76282E-04 -4.30600E-04  7.81659E-02  4.10356E-03  4.71116E-04  4.36476E-04 -2.05902E-04
  4.100  6.91457E-02  2.57932E-03 -9.34339E-04  7.85183E-04 -4.24756E-04  7.72794E-02  4.63290E-03  2.92744E-05  5.60351E-04 -1.80795E-04
  4.200  6.83474E-02  3.15034E-03 -1.35096E-03  8.76561E-04 -4.09429E-04  7.62555E-02  5.27418E-03 -4.94404E-04  6.63113E-04 -1.48202E-04
  4.300  6.74072E-02  3.87533E-03 -1.79309E-03  9.45332E-04 -3.84935E-04  7.50807E-02  6.03241E-03 -1.07775E-03  7.39203E-04 -1.09032E-04
  4.400  6.63168E-02  4.74985E-03 -2.24371E-03  9.87335E-04 -3.52062E-04  7.37439E-02  6.90733E-03 -1.69525E-03  7.84299E-04 -6.46011E-05
  4.500  6.50703E-02  5.76270E-03 -2.68448E-03  9.99627E-04 -3.12037E-04  7.22373E-02  7.89293E-03 -2.31940E-03  7.95623E-04 -1.65662E-05
  4.600  6.36643E-02  6.89618E-03 -3.09676E-03  9.80698E-04 -2.66454E-04  7.05564E-02  8.97728E-03 -2.92213E-03  7.72145E-04  3.31666E-05
  4.700  6.20982E-02  8.12672E-03 -3.46255E-03  9.30608E-04 -2.17185E-04  6.87003E-02  1.01427E-02 -3.47633E-03  7.14682E-04  8.25570E-05
  4.800  6.03742E-02  9.42578E-03 -3.76546E-03  8.51012E-04 -1.66261E-04  6.66720E-02  1.13664E-02 -3.95719E-03  6.25865E-04  1.29557E-04
  4.900  5.84976E-02  1.07610E-02 -3.99159E-03  7.45084E-04 -1.15746E-04  6.44780E-02  1.26211E-02 -4.34354E-03  5.09993E-04  1.72238E-04
  5.000  5.64760E-02  1.20975E-02 -4.13030E-03  6.17332E-04 -6.76142E-05  6.21282E-02  1.38762E-02 -4.61886E-03  3.72766E-04  2.08914E-04
  5.100  5.43202E-02  1.33993E-02 -4.17470E-03  4.73335E-04 -2.36267E-05  5.96359E-02  1.50991E-02 -4.77203E-03  2.20932E-04  2.38239E-04
  5.200  5.20429E-02  1.46310E-02 -4.12205E-03  3.19403E-04  1.47647E-05  5.70169E-02  1.62567E-02 -4.79773E-03  6.18723E-05  2.59291E-04
  5.300  4.96592E-02  1.57590E-02 -3.97380E-03  1.62203E-04  4.64930E-05  5.42894E-02  1.73166E-02 -4.69656E-03 -9.68524E-05  2.71609E-04
  5.400  4.71861E-02  1.67529E-02 -3.73548E-03  8.36087E-06  7.09205E-05  5.14735E-02  1.82490E-02 -4.47475E-03 -2.47952E-04  2.75210E-04
  5.500  4.46417E-02  1.75867E-02 -3.41627E-03 -1.35914E-04  8.78499E-05  4.85907E-02  1.90274E-02 -4.14357E-03 -3.84824E-04  2.70565E-04
  5.600  4.20456E-02  1.82398E-02 -3.02850E-03 -2.65167E-04  9.75045E-05  4.56633E-02  1.96300E-02 -3.71858E-03 -5.01909E-04  2.58542E-04
  5.700  3.94179E-02  1.86972E-02 -2.58687E-03 -3.74971E-04  1.00480E-04  4.27142E-02  2.00409E-02 -3.21854E-03 -5.94956E-04  2.40332E-04
  5.800  3.67790E-02  1.89508E-02 -2.10764E-03 -4.62120E-04  9.76728E-05  3.97659E-02  2.02498E-02 -2.66433E-03 -6.61202E-04  2.17349E-04
  5.900  3.41494E-02  1.89984E-02 -1.60779E-03 -5.24734E-04  9.01956E-05  3.68410E-02  2.02533E-02 -2.07779E-03 -6.99427E-04  1.91130E-04
  6.000  3.15488E-02  1.88443E-02 -1.10416E-03 -5.62275E-04  7.92819E-05  3.39607E-02  2.00540E-02 -1.48054E-03 -7.09922E-04  1.63222E-04
  6.100  2.89963E-02  1.84984E-02 -6.12639E-04 -5.75467E-04  6.61939E-05  3.11453E-02  1.96606E-02 -8.93003E-04 -6.94352E-04  1.35094E-04
  6.200  2.65100E-02  1.79756E-02 -1.47498E-04 -5.66159E-04  5.21372E-05  2.84134E-02  1.90871E-02 -3.33493E-04 -6.55551E-04  1.08047E-04
  6.300  2.41061E-02  1.72952E-02  2.79142E-04 -5.37113E-04  3.81889E-05  2.57821E-02  1.83522E-02  1.82455E-04 -5.97251E-04  8.31565E-05
  6.400  2.17993E-02  1.64795E-02  6.57701E-04 -4.91764E-04  2.52441E-05  2.32659E-02  1.74781E-02  6.42551E-04 -5.23790E-04  6.12313E-05
  6.500  1.96023E-02  1.55530E-02  9.81347E-04 -4.33961E-04  1.39819E-05  2.08775E-02  1.64896E-02  1.03799E-03 -4.39803E-04  4.27963E-05
  6.600  1.75256E-02  1.45413E-02  1.24604E-03 -3.67702E-04  4.85218E-06  1.86271E-02  1.54129E-02  1.36350E-03 -3.49934E-04  2.80981E-05
  6.700  1.55775E-02  1.34704E-02  1.45041E-03 -2.96903E-04 -1.91988E-06  1.65224E-02  1.42745E-02  1.61715E-03 -2.58570E-04  1.71299E-05
  6.800  1.37639E-02  1.23651E-02  1.59555E-03 -2.25185E-04 -6.31252E-06  1.45686E-02  1.31005E-02  1.80003E-03 -1.69635E-04  9.66923E-06
  6.900  1.20885E-02  1.12490E-02  1.68464E-03 -1.55715E-04 -8.47489E-06  1.27685E-02  1.19154E-02  1.91587E-03 -8.64288E-05  5.32701E-06
  7.000  1.05525E-02  1.01433E-02  1.72256E-03 -9.10952E-05 -8.68677E-06  1.11226E-02  1.07416E-02  1.97044E-03 -1.15275E-05  3.60002E-06
  7.100  9.15540E-03  9.06670E-03  1.71544E-03 -3.33001E-05 -7.31520E-06  9.62924E-03  9.59876E-03  1.97103E-03  5.32535E-05  3.92356E-06
  7.200  7.89439E-03  8.03476E-03  1.67022E-03  1.63380E-05 -4.77184E-06  8.28465E-03  8.50336E-03  1.92591E-03  1.06849E-04  5.71982E-06
  7.300  6.76512E-03  7.05999E-03  1.59421E-03  5.71007E-05 -1.47458E-06  7.08340E-03  7.46872E-03  1.84379E-03  1.48887E-04  8.43881E-06
  7.400  5.76174E-03  6.15175E-03  1.49471E-03  8.88224E-05  2.18448E-06  6.01858E-03  6.50482E-03  1.73334E-03  1.79598E-04  1.15901E-05
  7.500  4.87720E-03  5.31639E-03  1.37870E-03  1.11805E-04  5.86303E-06  5.08206E-03  5.61846E-03  1.60284E-03  1.99704E-04  1.47642E-05
  7.600  4.10353E-03  4.55751E-03  1.25257E-03  1.26720E-04  9.28416E-06  4.26482E-03  4.81346E-03  1.45986E-03  2.10294E-04  1.76444E-05
  7.700  3.43209E-03  3.87619E-03  1.12195E-03  1.34500E-04  1.22438E-05  3.55726E-03  4.09101E-03  1.31104E-03  2.12701E-04  2.00088E-05
  7.800  2.85390E-03  3.27140E-03  9.91578E-04  1.36243E-04  1.46110E-05  2.94942E-03  3.45003E-03  1.16197E-03  2.08383E-04  2.17256E-05
  7.900  2.35983E-03  2.74041E-03  8.65293E-04  1.33114E-04  1.63226E-05  2.43130E-03  2.88756E-03  1.01718E-03  1.98825E-04  2.27422E-05
  8.000  1.94083E-03  2.27909E-03  7.46001E-04  1.26273E-04  1.73733E-05  1.99303E-03  2.39923E-03  8.80078E-04  1.85449E-04  2.30711E-05
  8.100  1.58815E-03  1.88237E-03  6.35759E-04  1.16807E-04  1.78040E-05  1.62510E-03  1.97959E-03  7.53098E-04  1.69559E-04  2.27739E-05
  8.200  1.29344E-03  1.54455E-03  5.35848E-04  1.05688E-04  1.76885E-05  1.31850E-03  1.62254E-03  6.37760E-04  1.52288E-04  2.19450E-05
  8.300  1.04890E-03  1.25958E-03  4.46890E-04  9.37464E-05  1.71209E-05  1.06485E-03  1.32163E-03  5.34815E-04  1.34583E-04  2.06970E-05
  8.400  8.47373E-04  1.02139E-03  3.68961E-04  8.16565E-05  1.62043E-05  8.56448E-04  1.07035E-03  4.44383E-04  1.17192E-04  1.91479E-05
  8.500  6.82357E-04  8.24009E-04  3.01717E-04  6.99359E-05  1.50413E-05  6.86368E-04  8.62330E-04  3.66098E-04  1.00672E-04  1.74109E-05
  8.600  5.48055E-04  6.61790E-04  2.44502E-04  5.89563E-05  1.37267E-05  5.48427E-04  6.91550E-04  2.99236E-04  8.54075E-05  1.55876E-05
  8.700  4.39361E-04  5.29501E-04  1.96458E-04  4.89588E-05  1.23433E-05  4.37204E-04  5.52427E-04  2.42839E-04  7.16288E-05  1.37634E-05
  8.800  3.51835E-04  4.22395E-04  1.56610E-04  4.00748E-05  1.09584E-05  3.47998E-04  4.39910E-04  1.95813E-04  5.94424E-05  1.20050E-05
  8.900  2.81667E-04  3.36248E-04  1.23942E-04  3.23475E-05  9.62382E-06  2.76788E-04  3.49509E-04  1.57014E-04  4.88564E-05  1.03611E-05
  9.000  2.25622E-04  2.67369E-04  9.74464E-05  2.57537E-05  8.37581E-06  2.20173E-04  2.77306E-04  1.25310E-04  3.98064E-05  8.86305E-06
  9.100  1.80989E-04  2.12580E-04  7.61729E-05  2.02239E-05  7.23712E-06  1.75308E-04  2.19934E-04  9.96284E-05  3.21791E-05  7.52753E-06
  9.200  1.45519E-04  1.69187E-04  5.92499E-05  1.56591E-05  6.21900E-06  1.39841E-04  1.74541E-04  7.89855E-05  2.58319E-05  6.35915E-06
  9.300  1.17361E-04  1.34935E-04  4.59013E-05  1.19452E-05  5.32368E-06  1.11847E-04  1.38748E-04  6.25039E-05  2.06090E-05  5.35342E-06
  9.400  9.50119E-05  1.07963E-04  3.54526E-05  8.96393E-06  4.54682E-06  8.97634E-05  1.10590E-04  4.94191E-05  1.63533E-05  4.49949E-06
  9.500  7.72571E-05  8.67484E-05  2.73292E-05  6.60031E-06  3.87967E-06  7.23342E-05  8.84669E-05  3.90784E-05  1.29148E-05  3.78258E-06
  9.600  6.31247E-05  7.00637E-05  2.10509E-05  4.74825E-06  3.31099E-06  5.85582E-05  7.10874E-05  3.09345E-05  1.01564E-05  3.18600E-06
  9.700  5.18423E-05  5.69246E-05  1.62229E-05  3.31322E-06  2.82846E-06  4.76421E-05  5.74195E-05  2.45353E-05  7.95648E-06  2.69260E-06
  9.800  4.27992E-05  4.65504E-05  1.25249E-05  2.21358E-06  2.41982E-06  3.89618E-05  4.66453E-05  1.95128E-05  6.20998E-06  2.28595E-06
  9.900  3.55156E-05  3.83263E-05  9.70086E-06  1.38048E-06  2.07356E-06  3.20285E-05  3.81216E-05  1.55704E-05  4.82830E-06  1.95096E-06
 10.000  2.96157E-05  3.17713E-05  7.54800E-06  7.57091E-07  1.77937E-06  2.64611E-05  3.13456E-05  1.24721E-05  3.73795E-06  1.67433E-06
 10.100  2.48061E-05  2.65112E-05  5.90746E-06  2.97265E-07  1.52833E-06  2.19635E-05  2.59265E-05  1.00312E-05  2.87889E-06  1.44464E-06
 10.200  2.08586E-05  2.22563E-05  4.65577E-06 -3.59621E-08  1.31292E-06  1.83062E-05  2.15618E-05  8.10137E-06  2.20272E-06  1.25237E-06
 10.300  1.75957E-05  1.87835E-05  3.69773E-06 -2.71878E-07  1.12697E-06  1.53114E-05  1.80184E-05  6.56842E-06  1.67074E-06  1.08975E-06
 10.400  1.48792E-05  1.59215E-05  2.96044E-06 -4.33506E-07  9.65498E-07  1.28416E-05  1.51169E-05  5.34375E-06  1.25229E-06  9.50539E-07
 10.500  1.26023E-05  1.35393E-05  2.38846E-06 -5.38834E-07  8.24523E-07  1.07907E-05  1.27202E-05  4.35890E-06  9.23196E-07  8.29879E-07
 10.600  1.06814E-05  1.15370E-05  1.93997E-06 -6.01851E-07  7.00917E-07  9.07624E-06  1.07232E-05  3.56118E-06  6.64490E-07  7.24022E-07
 10.700  9.05172E-06  9.83871E-06  1.58367E-06 -6.33397E-07  5.92223E-07  7.63462E-06  9.04562E-06  2.91021E-06  4.61331E-07  6.30151E-07
 10.800  7.66256E-06  8.38669E-06  1.29637E-06 -6.41832E-07  4.96518E-07  6.41626E-06  7.62638E-06  2.37511E-06  3.02139E-07  5.46197E-07
 10.900  6.47413E-06  7.13721E-06  1.06113E-06 -6.33572E-07  4.12292E-07  5.38253E-06  6.41867E-06  1.93239E-06  1.77897E-07  4.70681E-07
 11.000  5.45499E-06  6.05695E-06  8.65687E-07 -6.13505E-07  3.38343E-07  4.50309E-06  5.38665E-06  1.56421E-06  8.15922E-08  4.02572E-07
 11.100  4.58008E-06  5.12042E-06  7.01347E-07 -5.85321E-07  2.73702E-07  3.75393E-06  4.50264E-06  1.25698E-06  7.76810E-09  3.41172E-07
 11.200  3.82915E-06  4.30784E-06  5.61997E-07 -5.51776E-07  2.17563E-07  3.11581E-06  3.74502E-06  1.00035E-06 -4.78285E-08  2.86017E-07
 11.300  3.18563E-06  3.60359E-06  4.43393E-07 -5.14904E-07  1.69230E-07  2.57306E-06  3.09657E-06  7.86353E-07 -8.85334E-08  2.36791E-07
 11.400  2.63566E-06  2.99498E-06  3.42575E-07 -4.76188E-07  1.28084E-07  2.11274E-06  2.54331E-06  6.08731E-07 -1.16992E-07  1.93264E-07
 11.500  2.16749E-06  2.47139E-06  2.57429E-07 -4.36703E-07  9.35438E-08  1.72395E-06  2.07354E-06  4.62458E-07 -1.35338E-07  1.55233E-07
 11.600  1.77093E-06  2.02364E-06  1.86357E-07 -3.97226E-07  6.50487E-08  1.39731E-06  1.67719E-06  3.43361E-07 -1.45331E-07  1.22487E-07
 11.700  1.43702E-06  1.64351E-06  1.28041E-07 -3.58326E-07  4.20431E-08  1.12463E-06  1.34538E-06  2.47855E-07 -1.48461E-07  9.47805E-08
 11.800  1.15777E-06  1.32349E-06  8.12863E-08 -3.20431E-07  2.39686E-08  8.98680E-07  1.07013E-06  1.72758E-07 -1.46024E-07  7.18142E-08
 11.900  9.25984E-07  1.05659E-06  4.49252E-08 -2.83876E-07  1.02625E-08  7.12992E-07  8.44108E-07  1.15176E-07 -1.39171E-07  5.32351E-08
 12.000  7.35178E-07  8.36269E-07  1.77736E-08 -2.48936E-07  3.60074E-10  5.61764E-07  6.60609E-07  7.24410E-08 -1.28939E-07  3.86379E-08
 12.100  5.79483E-07  6.56398E-07 -1.38120E-09 -2.15843E-07 -6.29788E-09  4.39791E-07  5.13448E-07  4.20795E-08 -1.16266E-07  2.75755E-08
 12.200  4.53612E-07  5.11258E-07 -1.37665E-08 -1.84797E-07 -1.02569E-08  3.42416E-07  3.96971E-07  2.18097E-08 -1.02001E-07  1.95734E-08
 12.300  3.52834E-07  3.95573E-07 -2.05964E-08 -1.55968E-07 -1.20384E-08  2.65502E-07  3.06052E-07  9.54994E-09 -8.68944E-08  1.41462E-08
 12.400  2.72945E-07  3.04533E-07 -2.30383E-08 -1.29492E-07 -1.21300E-08  2.05408E-07  2.36103E-07  3.43271E-09 -7.16028E-08  1.08145E-08
 12.500  2.10253E-07  2.33819E-07 -2.21804E-08 -1.05465E-07 -1.09762E-08  1.58964E-07  1.83076E-07  1.81786E-09 -5.66788E-08  9.12139E-09
 12.600  1.61550E-07  1.79609E-07 -1.90036E-08 -8.39432E-08 -8.97190E-09  1.23446E-07  1.43460E-07  3.30062E-09 -4.25698E-08  8.64531E-09
 12.700  1.24084E-07  1.38584E-07 -1.43608E-08 -6.49369E-08 -6.45668E-09  9.65459E-08  1.14263E-07  6.71273E-09 -2.96182E-08  9.01099E-09
 12.800  9.55279E-08  1.07912E-07 -8.96567E-09 -4.84098E-08 -3.71310E-09  7.63381E-08  9.29857E-08  1.11157E-08 -1.80649E-08  9.89623E-09
 12.900  7.39423E-08  8.52180E-08 -3.38867E-09 -3.42811E-08 -9.66547E-10  6.12433E-08  7.75846E-08  1.57869E-08 -8.05559E-09  1.10354E-08
 13.000  5.77335E-08  6.85534E-08  1.93800E-09 -2.24296E-08  1.61230E-09  4.99881E-08  6.64259E-08  2.01995E-08  3.48622E-10  1.22195E-08
 13.100  4.56136E-08  5.63503E-08  6.71002E-09 -1.26998E-08  3.90321E-09  4.15657E-08  5.82368E-08  2.39980E-08  7.15964E-09  1.32939E-08
 13.200  3.65590E-08  4.73754E-08  1.07359E-08 -4.90885E-09  5.83064E-09  3.51960E-08  5.20535E-08  2.69715E-08  1.24487E-08  1.41528E-08
 13.300  2.97700E-08  4.06814E-08  1.39193E-08  1.14470E-09  7.35713E-09  3.02880E-08  4.71700E-08  2.90261E-08  1.63323E-08  1.47340E-08
 13.400  2.46335E-08  3.55600E-08  1.62399E-08  5.67273E-09  8.47622E-09  2.64046E-08  4.30893E-08  3.01577E-08  1.89587E-08  1.50104E-08
 13.500  2.06880E-08  3.14969E-08  1.77351E-08  8.88958E-09  9.20534E-09  2.32318E-08  3.94791E-08  3.04273E-08  2.04953E-08  1.49836E-08
 13.600  1.75936E-08  2.81317E-08  1.84829E-08  1.10049E-08  9.57914E-09  2.05505E-08  3.61323E-08  2.99394E-08  2.11173E-08  1.46761E-08
 13.700  1.51053E-08  2.52220E-08  1.85859E-08  1.22177E-08  9.64346E-09  1.82138E-08  3.29331E-08  2.88228E-08  2.09985E-08  1.41243E-08
 13.800  1.30506E-08  2.26137E-08  1.81596E-08  1.27116E-08  9.45009E-09  1.61272E-08  2.98296E-08  2.72163E-08  2.03041E-08  1.33733E-08
 13.900  1.13108E-08  2.02152E-08  1.73215E-08  1.26520E-08  9.05250E-09  1.42332E-08  2.68111E-08  2.52568E-08  1.91852E-08  1.24713E-08
 14.000  9.80662E-09  1.79784E-08  1.61839E-08  1.21837E-08  8.50256E-09  1.24991E-08  2.38913E-08  2.30714E-08  1.77753E-08  1.14663E-08
 14.100  8.48614E-09  1.58825E-08  1.48484E-08  1.14303E-08  7.84808E-09  1.09082E-08  2.10960E-08  2.07722E-08  1.61886E-08  1.04028E-08
 14.200  7.31606E-09  1.39231E-08  1.34032E-08  1.04945E-08  7.13131E-09  9.45256E-09  1.84535E-08  1.84531E-08  1.45195E-08  9.32033E-09
 14.300  6.27514E-09  1.21038E-08  1.19213E-08  9.45952E-09  6.38805E-09  8.12866E-09  1.59898E-08  1.61894E-08  1.28430E-08  8.25200E-09
 14.400  5.34949E-09  1.04308E-08  1.04605E-08  8.39012E-09  5.64734E-09  6.93444E-09  1.37251E-08  1.40378E-08  1.12162E-08  7.22430E-09
 14.500  4.52937E-09  8.90924E-09  9.06411E-09  7.33508E-09  4.93167E-09  5.86739E-09  1.16719E-08  1.20383E-08  9.68031E-09  6.25707E-09
 14.600  3.80710E-09  7.54186E-09  7.76254E-09  6.32932E-09  4.25749E-09  4.92366E-09  9.83561E-09  1.02159E-08  8.26283E-09  5.36403E-09
 14.700  3.17581E-09  6.32777E-09  6.57493E-09  5.39609E-09  3.63581E-09  4.09773E-09  8.21437E-09  8.58316E-09  6.97975E-09  4.55344E-09
 14.800  2.62872E-09  5.26265E-09  5.51120E-09  4.54927E-09  3.07313E-09  3.38250E-09  6.80067E-09  7.14286E-09  5.83788E-09  3.82897E-09
 14.900  2.15891E-09  4.33914E-09  4.57397E-09  3.79532E-09  2.57217E-09  2.76958E-09  5.58247E-09  5.89004E-09  4.83701E-09  3.19055E-09
 15.000  1.75923E-09  3.54748E-09  3.76035E-09  3.13510E-09  2.13275E-09  2.24971E-09  4.54454E-09  4.81435E-09  3.97173E-09  2.63528E-09
 15.100  1.42242E-09  2.87629E-09  3.06353E-09  2.56547E-09  1.75252E-09  1.81316E-09  3.66972E-09  3.90179E-09  3.23307E-09  2.15817E-09
 15.200  1.14127E-09  2.31323E-09  2.47415E-09  2.08056E-09  1.42761E-09  1.45011E-09  2.93996E-09  3.13632E-09  2.60987E-09  1.75288E-09
 15.300  9.08742E-10  1.84570E-09  1.98142E-09  1.67282E-09  1.15322E-09  1.15104E-09  2.33721E-09  2.50100E-09  2.08984E-09  1.41232E-09
 15.400  7.18191E-10  1.46129E-09  1.57396E-09  1.33387E-09  9.24015E-10  9.06911E-10  1.84408E-09  1.97901E-09  1.66036E-09  1.12906E-09
 15.500  5.63427E-10  1.14821E-09  1.24047E-09  1.05511E-09  7.34542E-10  7.09396E-10  1.44432E-09  1.55422E-09  1.30914E-09  8.95761E-10
 15.600  4.38822E-10  8.95544E-10  9.70190E-10  8.28159E-10  5.79454E-10  5.50965E-10  1.12311E-09  1.21168E-09  1.02459E-09  7.05402E-10
 15.700  3.39350E-10  6.93430E-10  7.53169E-10  6.45144E-10  4.53703E-10  4.24941E-10  8.67191E-10  9.37900E-10  7.96113E-10  5.51474E-10
 15.800  2.60597E-10  5.33132E-10  5.80465E-10  4.98903E-10  3.52657E-10  3.25507E-10  6.64981E-10  7.20917E-10  6.14237E-10  4.28080E-10
 15.900  1.98751E-10  4.07048E-10  4.44205E-10  3.83065E-10  2.72167E-10  2.47670E-10  5.06481E-10  5.50352E-10  4.70652E-10  3.29989E-10
 16.000  1.50563E-10  3.08671E-10  3.37585E-10  2.92079E-10  2.08586E-10  1.87205E-10  3.83206E-10  4.17333E-10  3.58203E-10  2.52644E-10
 16.100  1.13304E-10  2.32509E-10  2.54824E-10  2.21189E-10  1.58768E-10  1.40587E-10  2.88051E-10  3.14390E-10  2.70819E-10  1.92135E-10
 16.200  8.47113E-11  1.73992E-10  1.91080E-10  1.66390E-10  1.20041E-10  1.04907E-10  2.15141E-10  2.35316E-10  2.03426E-10  1.45160E-10
 16.300  6.29290E-11  1.29366E-10  1.42352E-10  1.24350E-10  9.01648E-11  7.77917E-11  1.59676E-10  1.75016E-10  1.51830E-10  1.08962E-10
 16.400  4.64536E-11  9.55767E-11  1.05374E-10  9.23364E-11  6.72874E-11  5.73297E-11  1.17778E-10  1.29359E-10  1.12612E-10  8.12715E-11
 16.500  3.40792E-11  7.01737E-11  7.75128E-11  6.81330E-11  4.98962E-11  4.19936E-11  8.63448E-11  9.50274E-11  8.30087E-11  6.02394E-11
 16.600  2.48485E-11  5.12070E-11  5.66671E-11  4.99625E-11  3.67691E-11  3.05761E-11  6.29211E-11  6.93867E-11  6.08164E-11  4.43753E-11
 16.700  1.80091E-11  3.71412E-11  4.11763E-11  3.64147E-11  2.69290E-11  2.21315E-11  4.55808E-11  5.03635E-11  4.42907E-11  3.24908E-11
 16.800  1.29747E-11  2.67788E-11  2.97414E-11  2.63812E-11  1.96028E-11  1.59260E-11  3.28267E-11  3.63417E-11  3.20653E-11  2.36468E-11
 16.900  9.29306E-12  1.91944E-11  2.13556E-11  1.89992E-11  1.41845E-11  1.13946E-11  2.35053E-11  2.60721E-11  2.30793E-11  1.71085E-11
 17.000  6.61764E-12  1.36784E-11  1.52452E-11  1.36030E-11  1.02033E-11  8.10630E-12  1.67352E-11  1.85979E-11  1.65161E-11  1.23058E-11
 17.100  4.68560E-12  9.69193E-12  1.08207E-11  9.68332E-12  7.29685E-12  5.73463E-12  1.18481E-11  1.31915E-11  1.17523E-11  8.80039E-12
 17.200  3.29894E-12  6.82854E-12  7.63685E-12  6.85389E-12  5.18830E-12  4.03437E-12  8.34166E-12  9.30469E-12  8.31558E-12  6.25769E-12
 17.300  2.30972E-12  4.78429E-12  5.35967E-12  4.82394E-12  3.66810E-12  2.82268E-12  5.84072E-12  6.52694E-12  5.85123E-12  4.42461E-12
 17.400  1.60823E-12  3.33356E-12  3.74071E-12  3.37635E-12  2.57876E-12  1.96420E-12  4.06740E-12  4.55350E-12  4.09462E-12  3.11108E-12
 17.500  1.11369E-12  2.31007E-12  2.59651E-12  2.35018E-12  1.80286E-12  1.35949E-12  2.81727E-12  3.15961E-12  2.84981E-12  2.17545E-12
 17.600  7.67077E-13  1.59218E-12  1.79255E-12  1.62700E-12  1.25348E-12  9.35958E-13  1.94100E-12  2.18071E-12  1.97277E-12  1.51291E-12
 17.700  5.25523E-13  1.09154E-12  1.23090E-12  1.12029E-12  8.66774E-13  6.40983E-13  1.33024E-12  1.49714E-12  1.35838E-12  1.04647E-12
 17.800  3.58134E-13  7.44358E-13  8.40748E-13  7.67278E-13  5.96139E-13  4.36686E-13  9.06909E-13  1.02246E-12  9.30398E-13  7.19961E-13
 17.900  2.42786E-13  5.04948E-13  5.71247E-13  5.22731E-13  4.07817E-13  2.95968E-13  6.15101E-13  6.94660E-13  6.33930E-13  4.92703E-13
 18.000  1.63737E-13  3.40764E-13  3.86116E-13  3.54264E-13  2.77512E-13  1.99569E-13  4.15049E-13  4.69525E-13  4.29694E-13  3.35409E-13
 18.100  1.09858E-13  2.28783E-13  2.59637E-13  2.38847E-13  1.87852E-13  1.33885E-13  2.78637E-13  3.15737E-13  2.89761E-13  2.27142E-13
 18.200  7.33339E-14  1.52818E-13  1.73697E-13  1.60204E-13  1.26499E-13  8.93676E-14  1.86117E-13  2.11246E-13  1.94403E-13  1.53028E-13
 18.300  4.87056E-14  1.01561E-13  1.15614E-13  1.06908E-13  8.47450E-14  5.93548E-14  1.23696E-13  1.40627E-13  1.29768E-13  1.02569E-13
 18.400  3.21865E-14  6.71575E-14  7.65670E-14  7.09816E-14  5.64829E-14  3.92261E-14  8.18026E-14  9.31494E-14  8.61878E-14  6.83986E-14
 18.500  2.11643E-14  4.41874E-14  5.04546E-14  4.68919E-14  3.74552E-14  2.57960E-14  5.38312E-14  6.13960E-14  5.69584E-14  4.53819E-14
 18.600  1.38481E-14  2.89304E-14  3.30830E-14  3.08235E-14  2.47124E-14  1.68813E-14  3.52511E-14  4.02683E-14  3.74557E-14  2.99598E-14
 18.700  9.01666E-15  1.88485E-14  2.15858E-14  2.01611E-14  1.62234E-14  1.09938E-14  2.29719E-14  2.62824E-14  2.45099E-14  1.96803E-14
 18.800  5.84232E-15  1.22203E-14  1.40155E-14  1.31223E-14  1.05977E-14  7.12519E-15  1.48979E-14  1.70711E-14  1.59604E-14  1.28640E-14
 18.900  3.76725E-15  7.88465E-15  9.05607E-15  8.49931E-15  6.88868E-15  4.59580E-15  9.61533E-15  1.10347E-14  1.03428E-14  8.36727E-15
 19.000  2.41755E-15  5.06284E-15  5.82338E-15  5.47835E-15  4.45584E-15  2.95023E-15  6.17636E-15  7.09877E-15  6.67017E-15  5.41592E-15
 19.100  1.54403E-15  3.23542E-15  3.72673E-15  3.51416E-15  2.86819E-15  1.88493E-15  3.94858E-15  4.54504E-15  4.28109E-15  3.48862E-15
 19.200  9.81462E-16  2.05780E-15  2.37362E-15  2.24343E-15  1.83731E-15  1.19864E-15  2.51248E-15  2.89626E-15  2.73465E-15  2.23636E-15
 19.300  6.20932E-16  1.30265E-15  1.50466E-15  1.42539E-15  1.17130E-15  7.58670E-16  1.59122E-15  1.83693E-15  1.73858E-15  1.42675E-15
 19.400  3.91003E-16  8.20754E-16  9.49341E-16  9.01366E-16  7.43148E-16  4.77964E-16  1.00307E-15  1.15963E-15  1.10012E-15  9.05915E-16
 19.500  2.45071E-16  5.14722E-16  5.96173E-16  5.67313E-16  4.69265E-16  2.99728E-16  6.29395E-16  7.28658E-16  6.92870E-16  5.72491E-16
  67 142 197   0.100
  0.000  6.98851E-02 -3.25833E-16 -6.76542E-16 -3.50260E-16 -6.15111E-16  7.91034E-02 -4.03412E-16 -6.03684E-16 -5.37899E-16 -2.04560E-15
  0.100  6.98880E-02 -4.28059E-05 -2.38389E-08 -5.82024E-12 -2.88959E-15  7.91425E-02 -4.87452E-06 -7.37854E-08 -1.09305E-11 -3.03264E-15
  0.200  6.98967E-02 -1.68755E-04 -3.77338E-07 -3.69193E-10 -2.79089E-13  7.92588E-02 -1.93732E-05 -1.16919E-06 -6.93473E-10 -3.85717E-13
  0.300  6.99117E-02 -3.70581E-04 -1.87630E-06 -4.14400E-09 -7.10415E-12  7.94494E-02 -4.31212E-05 -5.82419E-06 -7.78591E-09 -9.71757E-12
  0.400  6.99337E-02 -6.36630E-04 -5.78285E-06 -2.28112E-08 -6.98564E-11  7.97095E-02 -7.54935E-05 -1.79952E-05 -4.28720E-08 -9.50292E-11
  0.500  6.99636E-02 -9.51511E-04 -1.36691E-05 -8.47629E-08 -4.08014E-10  8.00327E-02 -1.15612E-04 -4.26704E-05 -1.59357E-07 -5.51310E-10
  0.600  7.00021E-02 -1.29695E-03 -2.72449E-05 -2.45145E-07 -1.71189E-09  8.04108E-02 -1.62342E-04 -8.53743E-05 -4.61014E-07 -2.29365E-09
  0.700  7.00501E-02 -1.65282E-03 -4.81662E-05 -5.95396E-07 -5.70979E-09  8.08346E-02 -2.14278E-04 -1.51604E-04 -1.11989E-06 -7.57214E-09
  0.800  7.01080E-02 -1.99820E-03 -7.78411E-05 -1.27078E-06 -1.60850E-08  8.12936E-02 -2.69734E-04 -2.46241E-04 -2.39025E-06 -2.10736E-08
  0.900  7.01759E-02 -2.31252E-03 -1.17250E-04 -2.45446E-06 -3.98001E-08  8.17768E-02 -3.26723E-04 -3.72989E-04 -4.61555E-06 -5.14095E-08
  1.000  7.02537E-02 -2.57669E-03 -1.66799E-04 -4.37694E-06 -8.88499E-08  8.22724E-02 -3.82942E-04 -5.33882E-04 -8.22612E-06 -1.12911E-07
  1.100  7.03406E-02 -2.77401E-03 -2.26208E-04 -7.31034E-06 -1.82422E-07  8.27687E-02 -4.35768E-04 -7.28893E-04 -1.37262E-05 -2.27571E-07
  1.200  7.04353E-02 -2.89106E-03 -2.94454E-04 -1.15573E-05 -3.49409E-07  8.32538E-02 -4.82262E-04 -9.55688E-04 -2.16699E-05 -4.26917E-07
  1.300  7.05361E-02 -2.91838E-03 -3.69764E-04 -1.74351E-05 -6.31169E-07  8.37164E-02 -5.19209E-04 -1.20953E-03 -3.26280E-05 -7.53577E-07
  1.400  7.06411E-02 -2.85085E-03 -4.49660E-04 -2.52550E-05 -1.08444E-06  8.41459E-02 -5.43186E-04 -1.48334E-03 -4.71455E-05 -1.26231E-06
  1.500  7.07479E-02 -2.68791E-03 -5.31045E-04 -3.52987E-05 -1.78427E-06  8.45324E-02 -5.50673E-04 -1.76794E-03 -6.56948E-05 -2.02038E-06
  1.600  7.08540E-02 -2.43358E-03 -6.10341E-04 -4.77920E-05 -2.82673E-06  8.48674E-02 -5.38215E-04 -2.05243E-03 -8.86258E-05 -3.10719E-06
  1.700  7.09572E-02 -2.09614E-03 -6.83645E-04 -6.28765E-05 -4.33145E-06  8.51436E-02 -5.02614E-04 -2.32468E-03 -1.16117E-04 -4.61325E-06
  1.800  7.10551E-02 -1.68774E-03 -7.46924E-04 -8.05813E-05 -6.44343E-06  8.53556E-02 -4.41171E-04 -2.57192E-03 -1.48130E-04 -6.63866E-06
  1.900  7.11460E-02 -1.22371E-03 -7.96220E-04 -1.00794E-04 -9.33420E-06  8.54996E-02 -3.51928E-04 -2.78143E-03 -1.84370E-04 -9.29128E-06
  2.000  7.12284E-02 -7.21850E-04 -8.27862E-04 -1.23232E-04 -1.32017E-05  8.55737E-02 -2.33922E-04 -2.94124E-03 -2.24255E-04 -1.26847E-05
  2.100  7.13013E-02 -2.01515E-04 -8.38689E-04 -1.47419E-04 -1.82685E-05  8.55784E-02 -8.73967E-05 -3.04079E-03 -2.66893E-04 -1.69363E-05
  2.200  7.13644E-02  3.17307E-04 -8.26263E-04 -1.72662E-04 -2.47782E-05  8.55157E-02  8.60453E-05 -3.07160E-03 -3.11074E-04 -2.21647E-05
  2.300  7.14177E-02  8.14966E-04 -7.89079E-04 -1.98035E-04 -3.29885E-05  8.53897E-02  2.83376E-04 -3.02787E-03 -3.55274E-04 -2.84871E-05
  2.400  7.14617E-02  1.27310E-03 -7.26752E-04 -2.22377E-04 -4.31619E-05  8.52065E-02  5.00196E-04 -2.90695E-03 -3.97675E-04 -3.60148E-05
  2.500  7.14972E-02  1.67553E-03 -6.40178E-04 -2.44291E-04 -5.55515E-05  8.49732E-02  7.30919E-04 -2.70969E-03 -4.36199E-04 -4.48474E-05
  2.600  7.15251E-02  2.00912E-03 -5.31660E-04 -2.62175E-04 -7.03842E-05  8.46981E-02  9.69098E-04 -2.44068E-03 -4.68570E-04 -5.50637E-05
  2.700  7.15460E-02  2.26443E-03 -4.04979E-04 -2.74258E-04 -8.78390E-05  8.43900E-02  1.20788E-03 -2.10826E-03 -4.92390E-04 -6.67100E-05
  2.800  7.15601E-02  2.43631E-03 -2.65403E-04 -2.78668E-04 -1.08022E-04  8.40576E-02  1.44058E-03 -1.72437E-03 -5.05238E-04 -7.97842E-05
  2.900  7.15669E-02  2.52428E-03 -1.19619E-04 -2.73519E-04 -1.30942E-04  8.37087E-02  1.66131E-03 -1.30425E-03 -5.04800E-04 -9.42176E-05
  3.000  7.15649E-02  2.53273E-03  2.44277E-05 -2.57023E-04 -1.56480E-04  8.33499E-02  1.86568E-03 -8.65873E-04 -4.89009E-04 -1.09855E-04
  3.100  7.15512E-02  2.47089E-03  1.57788E-04 -2.27618E-04 -1.84368E-04  8.29856E-02  2.05140E-03 -4.29250E-04 -4.56206E-04 -1.26435E-04
  3.200  7.15217E-02  2.35263E-03  2.70857E-04 -1.84115E-04 -2.14168E-04  8.26179E-02  2.21887E-03 -1.55579E-05 -4.05297E-04 -1.43573E-04
  3.300  7.14704E-02  2.19594E-03  3.53826E-04 -1.25842E-04 -2.45261E-04  8.22455E-02  2.37155E-03  3.53864E-04 -3.35920E-04 -1.60752E-04
  3.400  7.13897E-02  2.02230E-03  3.97196E-04 -5.27830E-05 -2.76847E-04  8.18642E-02  2.51621E-03  6.58600E-04 -2.48575E-04 -1.77321E-04
  3.500  7.12705E-02  1.85579E-03  3.92354E-04  3.43038E-05 -3.07960E-04  8.14664E-02  2.66281E-03  8.80273E-04 -1.44728E-04 -1.92508E-04
  3.600  7.11020E-02  1.72202E-03  3.32172E-04  1.33807E-04 -3.37496E-04  8.10412E-02  2.82427E-03  1.00362E-03 -2.68636E-05 -2.05445E-04
  3.700  7.08723E-02  1.64699E-03  2.11582E-04  2.43231E-04 -3.64257E-04  8.05748E-02  3.01584E-03  1.01749E-03  1.01531E-04 -2.15211E-04
  3.800  7.05681E-02  1.65579E-03  2.80942E-05  3.59226E-04 -3.87013E-04  8.00509E-02  3.25430E-03  9.15632E-04  2.36048E-04 -2.20887E-04
  3.900  7.01760E-02  1.77136E-03 -2.17796E-04  4.77685E-04 -4.04572E-04  7.94518E-02  3.55693E-03  6.97274E-04  3.71526E-04 -2.21620E-04
  4.000  6.96820E-02  2.01321E-03 -5.22339E-04  5.93907E-04 -4.15857E-04  7.87586E-02  3.94032E-03  3.67427E-04  5.02285E-04 -2.16697E-04
  4.100  6.90726E-02  2.39633E-03 -8.78452E-04  7.02830E-04 -4.19988E-04  7.79522E-02  4.41916E-03 -6.31544E-05  6.22426E-04 -2.05613E-04
  4.200  6.83349E-02  2.93021E-03 -1.27584E-03  7.99306E-04 -4.16353E-04  7.70146E-02  5.00502E-03 -5.78342E-04  7.26178E-04 -1.88138E-04
  4.300  6.74575E-02  3.61814E-03 -1.70132E-03  8.78416E-04 -4.04672E-04  7.59290E-02  5.70522E-03 -1.15733E-03  8.08263E-04 -1.64363E-04
  4.400  6.64307E-02  4.45676E-03 -2.13938E-03  9.35795E-04 -3.85034E-04  7.46813E-02  6.52195E-03 -1.77561E-03  8.64260E-04 -1.34728E-04
  4.500  6.52466E-02  5.43590E-03 -2.57286E-03  9.67938E-04 -3.57919E-04  7.32604E-02  7.45160E-03 -2.40625E-03  8.90922E-04 -1.00021E-04
  4.600  6.39003E-02  6.53887E-03 -2.98386E-03  9.72471E-04 -3.24185E-04  7.16585E-02  8.48446E-03 -3.02126E-03  8.86440E-04 -6.13580E-05
  4.700  6.23892E-02  7.74291E-03 -3.35463E-03  9.48353E-04 -2.85029E-04  6.98720E-02  9.60478E-03 -3.59309E-03  8.50607E-04 -2.01206E-05
  4.800  6.07139E-02  9.02005E-03 -3.66860E-03  8.95991E-04 -2.41925E-04  6.79012E-02  1.07911E-02 -4.09609E-03  7.84883E-04  2.21167E-05
  4.900  5.88779E-02  1.03383E-02 -3.91123E-03  8.17261E-04 -1.96532E-04  6.57507E-02  1.20172E-02 -4.50789E-03  6.92335E-04  6.36860E-05
  5.000  5.68879E-02  1.16627E-02 -4.07091E-03  7.15425E-04 -1.50596E-04  6.34288E-02  1.32528E-02 -4.81051E-03  5.77471E-04  1.02933E-04
  5.100  5.47535E-02  1.29573E-02 -4.13957E-03  5.94948E-04 -1.05839E-04  6.09478E-02  1.44654E-02 -4.99130E-03  4.45967E-04  1.38324E-04
  5.200  5.24869E-02  1.41860E-02 -4.11311E-03  4.61232E-04 -6.38547E-05  5.83233E-02  1.56212E-02 -5.04341E-03  3.04314E-04  1.68548E-04
  5.300  5.01031E-02  1.53148E-02 -3.99165E-03  3.20283E-04 -2.60103E-05  5.55737E-02  1.66869E-02 -4.96606E-03  1.59408E-04  1.92599E-04
  5.400  4.76192E-02  1.63123E-02 -3.77945E-03  1.78343E-04  6.62832E-06  5.27201E-02  1.76316E-02 -4.76431E-03  1.81197E-05  2.09833E-04
  5.500  4.50542E-02  1.71518E-02 -3.48463E-03  4.15071E-05  3.33476E-05  4.97852E-02  1.84272E-02 -4.44863E-03 -1.13123E-04  2.20001E-04
  5.600  4.24286E-02  1.78119E-02 -3.11864E-03 -8.46352E-05  5.38100E-05  4.67933E-02  1.90509E-02 -4.03405E-03 -2.28710E-04  2.23244E-04
  5.700  3.97640E-02  1.82772E-02 -2.69559E-03 -1.95313E-04  6.80476E-05  4.37690E-02  1.94852E-02 -3.53919E-03 -3.24152E-04  2.20067E-04
  5.800  3.70822E-02  1.85387E-02 -2.23143E-03 -2.86817E-04  7.64296E-05  4.07376E-02  1.97188E-02 -2.98508E-03 -3.96296E-04  2.11281E-04
  5.900  3.44055E-02  1.85941E-02 -1.74305E-03 -3.56662E-04  7.96065E-05  3.77237E-02  1.97471E-02 -2.39398E-03 -4.43436E-04  1.97929E-04
  6.000  3.17556E-02  1.84474E-02 -1.24739E-03 -4.03654E-04  7.84384E-05  3.47512E-02  1.95722E-02 -1.78811E-03 -4.65314E-04  1.81199E-04
  6.100  2.91532E-02  1.81086E-02 -7.60643E-04 -4.27865E-04  7.39140E-05  3.18428E-02  1.92022E-02 -1.18866E-03 -4.63037E-04  1.62332E-04
  6.200  2.66179E-02  1.75927E-02 -2.97465E-04 -4.30531E-04  6.70681E-05  2.90192E-02  1.86510E-02 -6.14709E-04 -4.38891E-04  1.42535E-04
  6.300  2.41676E-02  1.69193E-02  1.29579E-04 -4.13874E-04  5.89048E-05  2.62994E-02  1.79373E-02 -8.25899E-05 -3.96108E-04  1.22908E-04
  6.400  2.18182E-02  1.61110E-02  5.10457E-04 -3.80880E-04  5.03316E-05  2.36997E-02  1.70833E-02  3.94695E-04 -3.38583E-04  1.04380E-04
  6.500  1.95834E-02  1.51928E-02  8.37909E-04 -3.35044E-04  4.21094E-05  2.12341E-02  1.61142E-02  8.07729E-04 -2.70574E-04  8.76727E-05
  6.600  1.74743E-02  1.41906E-02  1.10752E-03 -2.80110E-04  3.48205E-05  1.89136E-02  1.50565E-02  1.15073E-03 -1.96415E-04  7.32772E-05
  6.700  1.54996E-02  1.31306E-02  1.31762E-03 -2.19825E-04  2.88552E-05  1.67467E-02  1.39371E-02  1.42142E-03 -1.20249E-04  6.14559E-05
  6.800  1.36653E-02  1.20380E-02  1.46905E-03 -1.57719E-04  2.44149E-05  1.47388E-02  1.27824E-02  1.62065E-03 -4.58157E-05  5.22589E-05
  6.900  1.19748E-02  1.09363E-02  1.56483E-03 -9.69272E-05  2.15306E-05  1.28928E-02  1.16170E-02  1.75199E-03  2.37211E-05  4.55552E-05
  7.000  1.04293E-02  9.84683E-03  1.60970E-03 -4.00656E-05  2.00915E-05  1.12088E-02  1.04634E-02  1.82116E-03  8.58750E-05  4.10721E-05
  7.100  9.02746E-03  8.78802E-03  1.60971E-03  1.08487E-05  1.98804E-05  9.68467E-03  9.34130E-03  1.83548E-03  1.38886E-04  3.84396E-05
  7.200  7.76598E-03  7.77525E-03  1.57174E-03  5.44212E-05  2.06122E-05  8.31600E-03  8.26713E-03  1.80324E-03  1.81716E-04  3.72351E-05
  7.300  6.63977E-03  6.82068E-03  1.50306E-03  8.98630E-05  2.19707E-05  7.09658E-03  7.25399E-03  1.73321E-03  2.13995E-04  3.70241E-05
  7.400  5.64225E-03  5.93330E-03  1.41091E-03  1.16936E-04  2.36416E-05  6.01867E-03  6.31162E-03  1.63412E-03  2.35937E-04  3.73948E-05
  7.500  4.76565E-03  5.11905E-03  1.30224E-03  1.35871E-04  2.53389E-05  5.07330E-03  5.44650E-03  1.51430E-03  2.48230E-04  3.79846E-05
  7.600  4.00130E-03  4.38109E-03  1.18336E-03  1.47272E-04  2.68246E-05  4.25064E-03  4.66215E-03  1.38134E-03  2.51916E-04  3.84973E-05
  7.700  3.34000E-03  3.72013E-03  1.05983E-03  1.52014E-04  2.79193E-05  3.54032E-03  3.95947E-03  1.24190E-03  2.48270E-04  3.87125E-05
  7.800  2.77222E-03  3.13482E-03  9.36336E-04  1.51137E-04  2.85071E-05  2.93171E-03  3.33708E-03  1.10158E-03  2.38687E-04  3.84868E-05
  7.900  2.28841E-03  2.62210E-03  8.16628E-04  1.45758E-04  2.85328E-05  2.41419E-03  2.79184E-03  9.64860E-04  2.24578E-04  3.77480E-05
  8.000  1.87921E-03  2.17766E-03  7.03550E-04  1.36990E-04  2.79956E-05  1.97742E-03  2.31918E-03  8.35171E-04  2.07294E-04  3.64858E-05
  8.100  1.53561E-03  1.79628E-03  5.99097E-04  1.25877E-04  2.69385E-05  1.61149E-03  1.91357E-03  7.14916E-04  1.88062E-04  3.47393E-05
  8.200  1.24913E-03  1.47216E-03  5.04508E-04  1.13356E-04  2.54368E-05  1.30709E-03  1.56886E-03  6.05613E-04  1.67945E-04  3.25826E-05
  8.300  1.01188E-03  1.19927E-03  4.20373E-04  1.00221E-04  2.35859E-05  1.05561E-03  1.27863E-03  5.08017E-04  1.47820E-04  3.01117E-05
  8.400  8.16683E-04  9.71557E-04  3.46753E-04  8.71159E-05  2.14900E-05  8.49216E-04  1.03642E-03  4.22266E-04  1.28373E-04  2.74321E-05
  8.500  6.57067E-04  7.83144E-04  2.83306E-04  7.45309E-05  1.92528E-05  6.80888E-04  8.35980E-04  3.48023E-04  1.10105E-04  2.46485E-05
  8.600  5.27293E-04  6.28500E-04  2.29393E-04  6.28142E-05  1.69700E-05  5.44406E-04  6.71422E-04  2.84604E-04  9.33501E-05  2.18570E-05
  8.700  4.22337E-04  5.02527E-04  1.84185E-04  5.21867E-05  1.47240E-05  4.34343E-04  5.37316E-04  2.31102E-04  7.82980E-05  1.91398E-05
  8.800  3.37854E-04  4.00626E-04  1.46743E-04  4.27632E-05  1.25807E-05  3.46018E-04  4.28771E-04  1.86478E-04  6.50203E-05  1.65625E-05
  8.900  2.70131E-04  3.18722E-04  1.16093E-04  3.45731E-05  1.05892E-05  2.75442E-04  3.41456E-04  1.49647E-04  5.34964E-05  1.41726E-05
  9.000  2.16030E-04  2.53268E-04  9.12743E-05  2.75823E-05  8.78148E-06  2.19253E-04  2.71601E-04  1.19538E-04  4.36391E-05  1.20009E-05
  9.100  1.72930E-04  2.01219E-04  7.13817E-05  2.17123E-05  7.17473E-06  1.74651E-04  2.15979E-04  9.51364E-05  3.53166E-05  1.00627E-05
  9.200  1.38660E-04  1.60001E-04  5.55872E-05  1.68572E-05  5.77337E-06  1.39321E-04  1.71861E-04  7.55110E-05  2.83716E-05  8.36040E-06
  9.300  1.11442E-04  1.27467E-04  4.31551E-05  1.28970E-05  4.57194E-06  1.11375E-04  1.36970E-04  5.98327E-05  2.26364E-05  6.88663E-06
  9.400  8.98309E-05  1.01846E-04  3.34465E-05  9.70865E-06  3.55782E-06  8.92793E-05  1.09433E-04  4.73789E-05  1.79440E-05  5.62670E-06
  9.500  7.26606E-05  8.16920E-05  2.59181E-05  7.17307E-06  2.71378E-06  7.18030E-05  8.77204E-05  3.75323E-05  1.41358E-05  4.56137E-06
  9.600  5.89986E-05  6.58403E-05  2.01160E-05  5.18038E-06  2.02020E-06  5.79630E-05  7.05990E-05  2.97750E-05  1.10675E-05  3.66901E-06
  9.700  4.81030E-05  5.33581E-05  1.56673E-05  3.63260E-06  1.45678E-06  4.69798E-05  5.70820E-05  2.36787E-05  8.61054E-06  2.92735E-06
  9.800  3.93869E-05  4.35056E-05  1.22698E-05  2.44475E-06  1.00389E-06  3.82383E-05  4.63864E-05  1.88939E-05  6.65398E-06  2.31484E-06
  9.900  3.23881E-05  3.57005E-05  9.68214E-06  1.54488E-06  6.43429E-07  3.12558E-05  3.78950E-05  1.51392E-05  5.10350E-06  1.81153E-06
 10.000  2.67435E-05  2.94871E-05  7.71344E-06  8.73154E-07  3.59318E-07  2.56545E-05  3.11241E-05  1.21898E-05  3.88038E-06  1.39958E-06
 10.100  2.21690E-05  2.45108E-05  6.21452E-06  3.80613E-07  1.37713E-07  2.11398E-05  2.56965E-05  9.86767E-06  2.91976E-06  1.06351E-06
 10.200  1.84425E-05  2.04970E-05  5.06985E-06  2.76758E-08 -3.30096E-08  1.74819E-05  2.13195E-05  8.03332E-06  2.16878E-06  7.90158E-07
 10.300  1.53904E-05  1.72339E-05  4.19074E-06 -2.17358E-07 -1.62427E-07  1.45023E-05  1.77659E-05  6.57764E-06  1.58469E-06  5.68577E-07
 10.400  1.28769E-05  1.45584E-05  3.50964E-06 -3.79700E-07 -2.58319E-07  1.20619E-05  1.48606E-05  5.41595E-06  1.13316E-06  3.89764E-07
 10.500  1.07958E-05  1.23455E-05  2.97556E-06 -4.79313E-07 -3.26958E-07  1.00522E-05  1.24682E-05  4.48275E-06  7.86660E-07  2.46384E-07
 10.600  9.06404E-06  1.04991E-05  2.55030E-06 -5.31947E-07 -3.73396E-07  8.38881E-06  1.04843E-05  3.72759E-06  5.23207E-07  1.32477E-07
 10.700  7.61608E-06  8.94596E-06  2.20553E-06 -5.50001E-07 -4.01727E-07  7.00552E-06  8.82817E-06  3.11169E-06  3.25240E-07  4.31843E-08
 10.800  6.40039E-06  7.62959E-06  1.92044E-06 -5.43208E-07 -4.15312E-07  5.85043E-06  7.43748E-06  2.60531E-06  1.78727E-07 -2.54874E-08
 10.900  5.37612E-06  6.50674E-06  1.67993E-06 -5.19180E-07 -4.16953E-07  4.88261E-06  6.26378E-06  2.18572E-06  7.24577E-08 -7.68651E-08
 11.000  4.51077E-06  5.54404E-06  1.47318E-06 -4.83830E-07 -4.09032E-07  4.06958E-06  5.26928E-06  1.83553E-06 -2.53286E-09 -1.13765E-07
 11.100  3.77826E-06  4.71552E-06  1.29256E-06 -4.41707E-07 -3.93605E-07  3.38542E-06  4.42425E-06  1.54142E-06 -5.34081E-08 -1.38609E-07
 11.200  3.15756E-06  4.00083E-06  1.13278E-06 -3.96262E-07 -3.72467E-07  2.80924E-06  3.70510E-06  1.29316E-06 -8.58862E-08 -1.53510E-07
 11.300  2.63150E-06  3.38376E-06  9.90203E-07 -3.50057E-07 -3.47194E-07  2.32407E-06  3.09287E-06  1.08287E-06 -1.04521E-07 -1.60327E-07
 11.400  2.18597E-06  2.85120E-06  8.62362E-07 -3.04941E-07 -3.19163E-07  1.91594E-06  2.57210E-06  9.04379E-07 -1.12923E-07 -1.60705E-07
 11.500  1.80921E-06  2.39234E-06  7.47573E-07 -2.62192E-07 -2.89570E-07  1.57328E-06  2.12997E-06  7.52817E-07 -1.13945E-07 -1.56097E-07
 11.600  1.49134E-06  1.99805E-06  6.44652E-07 -2.22634E-07 -2.59434E-07  1.28636E-06  1.75569E-06  6.24258E-07 -1.09821E-07 -1.47778E-07
 11.700  1.22396E-06  1.66047E-06  5.52714E-07 -1.86742E-07 -2.29606E-07  1.04692E-06  1.44005E-06  5.15472E-07 -1.02286E-07 -1.36854E-07
 11.800  9.99867E-07  1.37274E-06  4.71030E-07 -1.54721E-07 -2.00771E-07  8.47921E-07  1.17505E-06  4.23750E-07 -9.26735E-08 -1.24268E-07
 11.900  8.12847E-07  1.12872E-06  3.98934E-07 -1.26581E-07 -1.73463E-07  6.83287E-07  9.53712E-07  3.46765E-07 -8.19911E-08 -1.10810E-07
 12.000  6.57495E-07  9.22940E-07  3.35774E-07 -1.02189E-07 -1.48072E-07  5.47772E-07  7.69872E-07  2.82493E-07 -7.09871E-08 -9.71235E-08
 12.100  5.29100E-07  7.50443E-07  2.80882E-07 -8.13178E-08 -1.24858E-07  4.36831E-07  6.18093E-07  2.29148E-07 -6.02015E-08 -8.37153E-08
 12.200  4.23559E-07  6.06752E-07  2.33564E-07 -6.36805E-08 -1.03966E-07  3.46529E-07  4.93570E-07  1.85147E-07 -5.00087E-08 -7.09682E-08
 12.300  3.37292E-07  4.87832E-07  1.93113E-07 -4.89599E-08 -8.54453E-08  2.73462E-07  3.92066E-07  1.49083E-07 -4.06531E-08 -5.91542E-08
 12.400  2.67190E-07  3.90062E-07  1.58813E-07 -3.68279E-08 -6.92650E-08  2.14700E-07  3.09866E-07  1.19707E-07 -3.22772E-08 -4.84489E-08
 12.500  2.10563E-07  3.10213E-07  1.29957E-07 -2.69607E-08 -5.53302E-08  1.67733E-07  2.43732E-07  9.59234E-08 -2.49455E-08 -3.89467E-08
 12.600  1.65095E-07  2.45430E-07  1.05865E-07 -1.90488E-08 -4.34995E-08  1.30423E-07  1.90864E-07  7.67720E-08 -1.86635E-08 -3.06756E-08
 12.700  1.28806E-07  1.93213E-07  8.58918E-08 -1.28039E-08 -3.35989E-08  1.00964E-07  1.48864E-07  6.14243E-08 -1.33935E-08 -2.36114E-08
 12.800  1.00016E-07  1.51392E-07  6.94419E-08 -7.96226E-09 -2.54348E-08  7.78404E-08  1.15697E-07  4.91728E-08 -9.06821E-09 -1.76907E-08
 12.900  7.73092E-08  1.18102E-07  5.59740E-08 -4.28718E-09 -1.88051E-08  5.97928E-08  8.96503E-08  3.94202E-08 -5.60041E-09 -1.28234E-08
 13.000  5.95016E-08  9.17604E-08  4.50053E-08 -1.56893E-09 -1.35081E-08  4.57823E-08  6.92999E-08  3.16689E-08 -2.89218E-09 -8.90196E-09
 13.100  4.56133E-08  7.10317E-08  3.61127E-08  3.75723E-10 -9.34926E-09  3.49600E-08  5.34727E-08  2.55094E-08 -8.41342E-10 -5.81085E-09
 13.200  3.48385E-08  5.48050E-08  2.89305E-08  1.70477E-09 -6.14652E-09  2.66380E-08  4.12115E-08  2.06089E-08  6.53273E-10 -3.43277E-09
 13.300  2.65205E-08  4.21634E-08  2.31475E-08  2.55271E-09 -3.73356E-09  2.02643E-08  3.17436E-08  1.67003E-08  1.68801E-09 -1.65417E-09
 13.400  2.01289E-08  3.23576E-08  1.85020E-08  3.03255E-09 -1.96187E-09  1.53992E-08  2.44503E-08  1.35713E-08  2.35167E-09 -3.68927E-10
 13.500  1.52382E-08  2.47807E-08  1.47765E-08  3.23788E-09 -7.01602E-10  1.16960E-08  1.88415E-08  1.10549E-08  2.72385E-09  5.19159E-10
 13.600  1.15103E-08  1.89457E-08  1.17920E-08  3.24507E-09  1.58631E-10  8.88291E-09  1.45316E-08  9.02078E-09  2.87401E-09  1.09497E-09
 13.700  8.67834E-09  1.44649E-08  9.40270E-09  3.11539E-09  7.12526E-10  6.74883E-09  1.12198E-08  7.36805E-09  2.86131E-09  1.43157E-09
 13.800  6.53326E-09  1.10319E-08  7.49035E-09  2.89707E-09  1.03744E-09  5.13091E-09  8.67325E-09  6.01869E-09  2.73484E-09  1.59036E-09
 13.900  4.91244E-09  8.40648E-09  5.95992E-09  2.62724E-09  1.19601E-09  3.90425E-09  6.71251E-09  4.91248E-09  2.53431E-09  1.62176E-09
 14.000  3.69019E-09  6.40135E-09  4.73521E-09  2.33373E-09  1.23796E-09  2.97366E-09  5.20014E-09  4.00279E-09  2.29092E-09  1.56617E-09
 14.100  2.76992E-09  4.87142E-09  3.75532E-09  2.03673E-09  1.20192E-09  2.26689E-09  4.03123E-09  3.25332E-09  2.02844E-09  1.45514E-09
 14.200  2.07781E-09  3.70478E-09  2.97165E-09  1.75024E-09  1.11720E-09  1.72933E-09  3.12587E-09  2.63550E-09  1.76426E-09  1.31263E-09
 14.300  1.55773E-09  2.81550E-09  2.34540E-09  1.48336E-09  1.00545E-09  1.31979E-09  2.42326E-09  2.12657E-09  1.51052E-09  1.15625E-09
 14.400  1.16711E-09  2.13781E-09  1.84557E-09  1.24143E-09  8.82167E-10  1.00728E-09  1.87708E-09  1.70814E-09  1.27510E-09  9.98423E-10
 14.500  8.73829E-10  1.62145E-09  1.44733E-09  1.02694E-09  7.57970E-10  7.68446E-10  1.45202E-09  1.36516E-09  1.06255E-09  8.47461E-10
 14.600  6.53684E-10  1.22814E-09  1.13075E-09  8.40338E-10  6.39766E-10  5.85709E-10  1.12104E-09  1.08514E-09  8.74920E-10  7.08503E-10
 14.700  4.88474E-10  9.28673E-10  8.79788E-10  6.80652E-10  5.31663E-10  4.45789E-10  8.63344E-10  8.57600E-10  7.12438E-10  5.84311E-10
 14.800  3.64531E-10  7.00819E-10  6.81501E-10  5.45991E-10  4.35742E-10  3.38633E-10  6.62882E-10  6.73710E-10  5.74076E-10  4.75930E-10
 14.900  2.71592E-10  5.27626E-10  5.25425E-10  4.33938E-10  3.52664E-10  2.56604E-10  5.07191E-10  5.25970E-10  4.58008E-10  3.83222E-10
 15.000  2.01953E-10  3.96162E-10  4.03092E-10  3.41833E-10  2.82147E-10  1.93876E-10  3.86548E-10  4.08024E-10  3.61959E-10  3.05280E-10
 15.100  1.49826E-10  2.96550E-10  3.07649E-10  2.66984E-10  2.23319E-10  1.45989E-10  2.93338E-10  3.14485E-10  2.83467E-10  2.40747E-10
 15.200  1.10864E-10  2.21238E-10  2.33553E-10  2.06806E-10  1.74985E-10  1.09517E-10  2.21577E-10  2.40809E-10  2.20066E-10  1.88048E-10
 15.300  8.17916E-11  1.64448E-10  1.76332E-10  1.58913E-10  1.35814E-10  8.18179E-11  1.66553E-10  1.83183E-10  1.69411E-10  1.45551E-10
 15.400  6.01469E-11  1.21753E-10  1.32384E-10  1.21161E-10  1.04461E-10  6.08545E-11  1.24553E-10  1.38429E-10  1.29355E-10  1.11678E-10
 15.500  4.40732E-11  8.97645E-11  9.88237E-11  9.16778E-11  7.96534E-11  4.50503E-11  9.26487E-11  1.03919E-10  9.79905E-11  8.49709E-11
 15.600  3.21717E-11  6.58878E-11  7.33450E-11  6.88555E-11  6.02338E-11  3.31868E-11  6.85403E-11  7.75000E-11  7.36606E-11  6.41282E-11
 15.700  2.33887E-11  4.81387E-11  5.41176E-11  5.13400E-11  4.51847E-11  2.43227E-11  5.04219E-11  5.74185E-11  5.49566E-11  4.80191E-11
 15.800  1.69307E-11  3.50024E-11  3.96960E-11  3.80085E-11  3.36332E-11  1.77327E-11  3.68822E-11  4.22632E-11  4.07019E-11  3.56832E-11
 15.900  1.22010E-11  2.53250E-11  2.89456E-11  2.79428E-11  2.48468E-11  1.28586E-11  2.68230E-11  3.09065E-11  2.99288E-11  2.63200E-11
 16.000  8.75165E-12  1.82303E-11  2.09817E-11  2.04023E-11  1.82215E-11  9.27320E-12  1.93941E-11  2.24562E-11  2.18527E-11  1.92735E-11
 16.100  6.24738E-12  1.30553E-11  1.51187E-11  1.47964E-11  1.32675E-11  6.65039E-12  1.39408E-11  1.62121E-11  1.58461E-11  1.40139E-11
 16.200  4.43776E-12  9.30018E-12  1.08295E-11  1.06598E-11  9.59307E-12  4.74265E-12  9.96209E-12  1.16302E-11  1.14129E-11  1.01191E-11
 16.300  3.13646E-12  6.58983E-12  7.71123E-12  7.62963E-12  6.88890E-12  3.36305E-12  7.07711E-12  8.29084E-12  8.16528E-12  7.25729E-12
 16.400  2.20540E-12  4.64422E-12  5.45844E-12  5.42570E-12  4.91390E-12  2.37122E-12  4.99810E-12  5.87354E-12  5.80361E-12  5.17020E-12
 16.500  1.54268E-12  3.25528E-12  3.84106E-12  3.83394E-12  3.48208E-12  1.66238E-12  3.50914E-12  4.13538E-12  4.09846E-12  3.65924E-12
 16.600  1.07344E-12  2.26927E-12  2.68708E-12  2.69221E-12  2.45153E-12  1.15879E-12  2.44934E-12  2.89381E-12  2.87592E-12  2.57319E-12
 16.700  7.42980E-13  1.57325E-12  1.86883E-12  1.87879E-12  1.71500E-12  8.03152E-13  1.69965E-12  2.01273E-12  2.00542E-12  1.79802E-12
 16.800  5.11510E-13  1.08472E-12  1.29221E-12  1.30313E-12  1.19224E-12  5.53492E-13  1.17258E-12  1.39152E-12  1.38977E-12  1.24852E-12
 16.900  3.50267E-13  7.43776E-13  8.88343E-13  8.98392E-13  8.23714E-13  3.79273E-13  8.04292E-13  9.56320E-13  9.57250E-13  8.61617E-13
 17.000  2.38564E-13  5.07191E-13  6.07197E-13  6.15662E-13  5.65632E-13  2.58421E-13  5.48508E-13  6.53356E-13  6.55360E-13  5.90997E-13
 17.100  1.61610E-13  3.43960E-13  4.12661E-13  4.19416E-13  3.86075E-13  1.75085E-13  3.71933E-13  4.43765E-13  4.46005E-13  4.02940E-13
 17.200  1.08889E-13  2.31983E-13  2.78860E-13  2.84053E-13  2.61951E-13  1.17958E-13  2.50769E-13  2.99663E-13  3.01740E-13  2.73094E-13
 17.300  7.29721E-14  1.55604E-13  1.87381E-13  1.91262E-13  1.76690E-13  7.90261E-14  1.68123E-13  2.01193E-13  2.02948E-13  1.84004E-13
 17.400  4.86391E-14  1.03803E-13  1.25207E-13  1.28044E-13  1.18487E-13  5.26496E-14  1.12083E-13  1.34312E-13  1.35714E-13  1.23258E-13
 17.500  3.22460E-14  6.88697E-14  8.31964E-14  8.52341E-14  7.89998E-14  3.48830E-14  7.43066E-14  8.91574E-14  9.02346E-14  8.20921E-14
 17.600  2.12635E-14  4.54453E-14  5.49760E-14  5.64172E-14  5.23723E-14  2.29847E-14  4.89897E-14  5.88519E-14  5.96563E-14  5.43638E-14
 17.700  1.39465E-14  2.98263E-14  3.61285E-14  3.71343E-14  3.45240E-14  1.50620E-14  3.21210E-14  3.86317E-14  3.92189E-14  3.57985E-14
 17.800  9.09864E-15  1.94702E-14  2.36129E-14  2.43066E-14  2.26312E-14  9.81667E-15  2.09457E-14  2.52189E-14  2.56397E-14  2.34416E-14
 17.900  5.90441E-15  1.26419E-14  1.53492E-14  1.58227E-14  1.47530E-14  6.36346E-15  1.35843E-14  1.63729E-14  1.66697E-14  1.52651E-14
 18.000  3.81132E-15  8.16461E-15  9.92369E-15  1.02437E-14  9.56450E-15  4.10284E-15  8.76263E-15  1.05721E-14  1.07786E-14  9.88600E-15
 18.100  2.44726E-15  5.24508E-15  6.38158E-15  6.59592E-15  6.16696E-15  2.63120E-15  5.62210E-15  6.78964E-15  6.93155E-15  6.36754E-15
 18.200  1.56316E-15  3.35176E-15  4.08192E-15  4.22428E-15  3.95482E-15  1.67846E-15  3.58794E-15  4.33712E-15  4.43357E-15  4.07915E-15
 18.300  9.93235E-16  2.13064E-15  2.59714E-15  2.69094E-15  2.52258E-15  1.06506E-15  2.27766E-15  2.75575E-15  2.82065E-15  2.59916E-15
 18.400  6.27824E-16  1.34733E-15  1.64375E-15  1.70508E-15  1.60046E-15  6.72286E-16  1.43828E-15  1.74172E-15  1.78498E-15  1.64732E-15
 18.500  3.94794E-16  8.47568E-16  1.03490E-15  1.07472E-15  1.01005E-15  4.22148E-16  9.03489E-16  1.09504E-15  1.12363E-15  1.03854E-15
 18.600  2.46980E-16  5.30428E-16  6.48177E-16  6.73848E-16  6.34089E-16  2.63705E-16  5.64601E-16  6.84878E-16  7.03609E-16  6.51299E-16
 18.700  1.53716E-16  3.30247E-16  4.03867E-16  4.20306E-16  3.95992E-16  1.63881E-16  3.51004E-16  4.26127E-16  4.38303E-16  4.06319E-16
 18.800  9.51824E-17  2.04561E-16  2.50348E-16  2.60806E-16  2.46017E-16  1.01323E-16  2.17094E-16  2.63768E-16  2.71623E-16  2.52173E-16
 18.900  5.86384E-17  1.26064E-16  1.54391E-16  1.61002E-16  1.52055E-16  6.23261E-17  1.33586E-16  1.62433E-16  1.67464E-16  1.55699E-16
 19.000  3.59423E-17  7.72952E-17  9.47293E-17  9.88829E-17  9.34983E-17  3.81438E-17  8.17828E-17  9.95204E-17  1.02720E-16  9.56416E-17
 19.100  2.19200E-17  4.71540E-17  5.78286E-17  6.04225E-17  5.71992E-17  2.32264E-17  4.98157E-17  6.06658E-17  6.26865E-17  5.84508E-17
 19.200  1.33013E-17  2.86220E-17  3.51244E-17  3.67346E-17  3.48153E-17  1.40720E-17  3.01914E-17  3.67946E-17  3.80624E-17  3.55411E-17
 19.300  8.03109E-18  1.72865E-17  2.12273E-17  2.22210E-17  2.10843E-17  8.48316E-18  1.82064E-17  2.22046E-17  2.29949E-17  2.15021E-17
 19.400  4.82498E-18  1.03884E-17  1.27646E-17  1.33744E-17  1.27047E-17  5.08859E-18  1.09245E-17  1.33332E-17  1.38227E-17  1.29435E-17
 19.500  2.88446E-18  6.21209E-18  7.63770E-18  8.00975E-18  7.61730E-18  3.03728E-18  6.52267E-18  7.96646E-18  8.26782E-18  7.75270E-18
 19.600  1.71590E-18  3.69642E-18  4.54744E-18  4.77319E-18  4.54441E-18  1.80398E-18  3.87530E-18  4.73642E-18  4.92080E-18  4.62059E-18
  67 143 197   0.100
  0.000  7.17937E-02 -3.72380E-16 -5.20417E-16 -5.12880E-16 -1.40188E-15  9.14258E-02 -4.65475E-16 -6.86950E-16 -7.63065E-16 -2.50336E-15
  0.100  7.17860E-02  2.78300E-05  4.66517E-09 -1.25778E-11  6.00806E-16  9.13377E-02  3.57938E-05 -4.32841E-08  8.23485E-12  6.43720E-16
  0.200  7.17636E-02  1.09447E-04  7.51233E-08 -7.97435E-10  7.09795E-13  9.10777E-02  1.40956E-04 -6.85149E-07  5.23589E-10  4.25127E-13
  0.300  7.17288E-02  2.39353E-04  3.84144E-07 -8.94246E-09  1.78531E-11  9.06583E-02  3.08961E-04 -3.40701E-06  5.89811E-09  1.06478E-11
  0.400  7.16847E-02  4.08783E-04  1.22960E-06 -4.91587E-08  1.73942E-10  9.00996E-02  5.29367E-04 -1.05011E-05  3.26275E-08  1.02303E-10
  0.500  7.16356E-02  6.06272E-04  3.04497E-06 -1.82338E-07  1.00427E-09  8.94283E-02  7.88437E-04 -2.48233E-05  1.21995E-07  5.79749E-10
  0.600  7.15865E-02  8.18379E-04  6.40606E-06 -5.26142E-07  4.15393E-09  8.86754E-02  1.06994E-03 -4.94803E-05  3.55449E-07  2.34187E-09
  0.700  7.15423E-02  1.03053E-03  1.20283E-05 -1.27426E-06  1.36219E-08  8.78754E-02  1.35612E-03 -8.74823E-05  8.70653E-07  7.45748E-09
  0.800  7.15079E-02  1.22791E-03  2.07494E-05 -2.71046E-06  3.76250E-08  8.70637E-02  1.62866E-03 -1.41391E-04  1.87588E-06  1.98732E-08
  0.900  7.14874E-02  1.39634E-03  3.34939E-05 -5.21409E-06  9.10248E-08  8.62747E-02  1.86979E-03 -2.12995E-04  3.66038E-06  4.60396E-08
  1.000  7.14842E-02  1.52307E-03  5.12203E-05 -9.25467E-06  1.98114E-07  8.55402E-02  2.06320E-03 -3.03046E-04  6.59853E-06  9.51099E-08
  1.100  7.15004E-02  1.59752E-03  7.48522E-05 -1.53749E-05  3.95427E-07  8.48876E-02  2.19496E-03 -4.11070E-04  1.11458E-05  1.78284E-07
  1.200  7.15367E-02  1.61178E-03  1.05200E-04 -2.41624E-05  7.34152E-07  8.43386E-02  2.25423E-03 -5.35274E-04  1.78251E-05  3.06864E-07
  1.300  7.15927E-02  1.56101E-03  1.42882E-04 -3.62131E-05  1.28173E-06  8.39081E-02  2.23379E-03 -6.72551E-04  2.72031E-05  4.88704E-07
  1.400  7.16663E-02  1.44363E-03  1.88249E-04 -5.20889E-05  2.12225E-06  8.36040E-02  2.13043E-03 -8.18590E-04  3.98561E-05  7.22946E-07
  1.500  7.17544E-02  1.26134E-03  2.41328E-04 -7.22745E-05  3.35545E-06  8.34268E-02  1.94501E-03 -9.68066E-04  5.63259E-05  9.93281E-07
  1.600  7.18530E-02  1.01896E-03  3.01790E-04 -9.71381E-05  5.09429E-06  8.33699E-02  1.68243E-03 -1.11492E-03  7.70689E-05  1.26034E-06
  1.700  7.19569E-02  7.24168E-04  3.68935E-04 -1.26899E-04  7.46117E-06  8.34206E-02  1.35135E-03 -1.25266E-03  1.02399E-04  1.45423E-06
  1.800  7.20608E-02  3.87042E-04  4.41715E-04 -1.61607E-04  1.05832E-05  8.35605E-02  9.63709E-04 -1.37475E-03  1.32430E-04  1.46847E-06
  1.900  7.21589E-02  1.96020E-05  5.18770E-04 -2.01133E-04  1.45873E-05  8.37676E-02  5.34165E-04 -1.47499E-03  1.67019E-04  1.15698E-06
  2.000  7.22457E-02 -3.64785E-04  5.98492E-04 -2.45176E-04  1.95945E-05  8.40168E-02  7.93611E-05 -1.54784E-03  2.05716E-04  3.35422E-07
  2.100  7.23157E-02 -7.52017E-04  6.79080E-04 -2.93277E-04  2.57160E-05  8.42824E-02 -3.82868E-04 -1.58881E-03  2.47734E-04 -1.21170E-06
  2.200  7.23645E-02 -1.12789E-03  7.58614E-04 -3.44845E-04  3.30492E-05  8.45385E-02 -8.34349E-04 -1.59473E-03  2.91924E-04 -3.71744E-06
  2.300  7.23879E-02 -1.47877E-03  8.35097E-04 -3.99186E-04  4.16756E-05  8.47616E-02 -1.25745E-03 -1.56405E-03  3.36785E-04 -7.41227E-06
  2.400  7.23832E-02 -1.79220E-03  9.06493E-04 -4.55535E-04  5.16596E-05  8.49309E-02 -1.63594E-03 -1.49694E-03  3.80495E-04 -1.24981E-05
  2.500  7.23485E-02 -2.05751E-03  9.70737E-04 -5.13078E-04  6.30483E-05  8.50298E-02 -1.95585E-03 -1.39550E-03  4.20972E-04 -1.91182E-05
  2.600  7.22833E-02 -2.26641E-03  1.02573E-03 -5.70970E-04  7.58730E-05  8.50465E-02 -2.20621E-03 -1.26368E-03  4.55967E-04 -2.73255E-05
  2.700  7.21880E-02 -2.41349E-03  1.06932E-03 -6.28345E-04  9.01495E-05  8.49746E-02 -2.37971E-03 -1.10728E-03  4.83181E-04 -3.70530E-05
  2.800  7.20645E-02 -2.49659E-03  1.09925E-03 -6.84302E-04  1.05879E-04  8.48127E-02 -2.47328E-03 -9.33727E-04  5.00411E-04 -4.80888E-05
  2.900  7.19154E-02 -2.51715E-03  1.11321E-03 -7.37900E-04  1.23046E-04  8.45647E-02 -2.48840E-03 -7.51849E-04  5.05706E-04 -6.00614E-05
  3.000  7.17442E-02 -2.48036E-03  1.10876E-03 -7.88124E-04  1.41619E-04  8.42388E-02 -2.43129E-03 -5.71472E-04  4.97528E-04 -7.24366E-05
  3.100  7.15549E-02 -2.39518E-03  1.08346E-03 -8.33866E-04  1.61540E-04  8.38466E-02 -2.31289E-03 -4.02973E-04  4.74912E-04 -8.45304E-05
  3.200  7.13515E-02 -2.27413E-03  1.03491E-03 -8.73902E-04  1.82722E-04  8.34021E-02 -2.14853E-03 -2.56751E-04  4.37593E-04 -9.55376E-05
  3.300  7.11377E-02 -2.13294E-03  9.60923E-04 -9.06879E-04  2.05034E-04  8.29204E-02 -1.95741E-03 -1.42647E-04  3.86112E-04 -1.04576E-04
  3.400  7.09162E-02 -1.98996E-03  8.59737E-04 -9.31320E-04  2.28293E-04  8.24161E-02 -1.76181E-03 -6.93493E-05  3.21858E-04 -1.10747E-04
  3.500  7.06885E-02 -1.86535E-03  7.30225E-04 -9.45658E-04  2.52249E-04  8.19019E-02 -1.58607E-03 -4.38132E-05  2.47068E-04 -1.13199E-04
  3.600  7.04539E-02 -1.78018E-03  5.72158E-04 -9.48284E-04  2.76573E-04  8.13875E-02 -1.45539E-03 -7.07499E-05  1.64753E-04 -1.11206E-04
  3.700  7.02095E-02 -1.75527E-03  3.86441E-04 -9.37632E-04  3.00853E-04  8.08781E-02 -1.39446E-03 -1.52213E-04  7.85631E-05 -1.04235E-04
  3.800  6.99492E-02 -1.81006E-03  1.75319E-04 -9.12280E-04  3.24586E-04  8.03738E-02 -1.42608E-03 -2.87329E-04 -7.39980E-06 -9.20051E-05
  3.900  6.96641E-02 -1.96140E-03 -5.75016E-05 -8.71070E-04  3.47183E-04  7.98688E-02 -1.56975E-03 -4.72199E-04 -8.88244E-05 -7.45366E-05
  4.000  6.93417E-02 -2.22240E-03 -3.06815E-04 -8.13233E-04  3.67986E-04  7.93513E-02 -1.84033E-03 -6.99999E-04 -1.61457E-04 -5.21734E-05
  4.100  6.89666E-02 -2.60144E-03 -5.66007E-04 -7.38516E-04  3.86285E-04  7.88037E-02 -2.24702E-03 -9.61267E-04 -2.21379E-04 -2.55821E-05
  4.200  6.85205E-02 -3.10140E-03 -8.27260E-04 -6.47276E-04  4.01351E-04  7.82031E-02 -2.79246E-03 -1.24439E-03 -2.65277E-04  4.27484E-06
  4.300  6.79827E-02 -3.71914E-03 -1.08189E-03 -5.40563E-04  4.12475E-04  7.75226E-02 -3.47227E-03 -1.53624E-03 -2.90668E-04  3.61919E-05
  4.400  6.73309E-02 -4.44533E-03 -1.32080E-03 -4.20143E-04  4.19012E-04  7.67321E-02 -4.27497E-03 -1.82295E-03 -2.96080E-04  6.87944E-05
  4.500  6.65425E-02 -5.26465E-03 -1.53493E-03 -2.88486E-04  4.20427E-04  7.58004E-02 -5.18230E-03 -2.09070E-03 -2.81157E-04  1.00629E-04
  4.600  6.55953E-02 -6.15632E-03 -1.71590E-03 -1.48691E-04  4.16337E-04  7.46969E-02 -6.16996E-03 -2.32658E-03 -2.46683E-04  1.30258E-04
  4.700  6.44687E-02 -7.09500E-03 -1.85645E-03 -4.36946E-06  4.06548E-04  7.33932E-02 -7.20871E-03 -2.51934E-03 -1.94524E-04  1.56363E-04
  4.800  6.31454E-02 -8.05198E-03 -1.95098E-03  1.40524E-04  3.91085E-04  7.18648E-02 -8.26579E-03 -2.66004E-03 -1.27497E-04  1.77823E-04
  4.900  6.16121E-02 -8.99656E-03 -1.99591E-03  2.81887E-04  3.70201E-04  7.00930E-02 -9.30654E-03 -2.74255E-03 -4.91655E-05  1.93794E-04
  5.000  5.98605E-02 -9.89757E-03 -1.98993E-03  4.15684E-04  3.44376E-04  6.80661E-02 -1.02961E-02 -2.76381E-03  3.64086E-05  2.03753E-04
  5.100  5.78885E-02 -1.07250E-02 -1.93408E-03  5.38165E-04  3.14299E-04  6.57804E-02 -1.12014E-02 -2.72394E-03  1.24938E-04  2.07523E-04
  5.200  5.57003E-02 -1.14512E-02 -1.83169E-03  6.46064E-04  2.80837E-04  6.32404E-02 -1.19922E-02 -2.62606E-03  2.12191E-04  2.05265E-04
  5.300  5.33069E-02 -1.20528E-02 -1.68817E-03  7.36768E-04  2.44983E-04  6.04596E-02 -1.26433E-02 -2.47598E-03  2.94249E-04  1.97454E-04
  5.400  5.07257E-02 -1.25110E-02 -1.51060E-03  8.08439E-04  2.07809E-04  5.74595E-02 -1.31350E-02 -2.28174E-03  3.67728E-04  1.84823E-04
  5.500  4.79801E-02 -1.28129E-02 -1.30730E-03  8.60083E-04  1.70402E-04  5.42692E-02 -1.34542E-02 -2.05293E-03  4.29948E-04  1.68301E-04
  5.600  4.50991E-02 -1.29517E-02 -1.08732E-03  8.91567E-04  1.33807E-04  5.09241E-02 -1.35946E-02 -1.80009E-03  4.79038E-04  1.48934E-04
  5.700  4.21156E-02 -1.29269E-02 -8.59841E-04  9.03568E-04  9.89771E-05  4.74646E-02 -1.35567E-02 -1.53404E-03  5.13972E-04  1.27812E-04
  5.800  3.90656E-02 -1.27437E-02 -6.33689E-04  8.97491E-04  6.67229E-05  4.39343E-02 -1.33476E-02 -1.26518E-03  5.34548E-04  1.05991E-04
  5.900  3.59868E-02 -1.24128E-02 -4.16868E-04  8.75330E-04  3.76864E-05  4.03784E-02 -1.29799E-02 -1.00304E-03  5.41313E-04  8.44378E-05
  6.000  3.29170E-02 -1.19494E-02 -2.16187E-04  8.39515E-04  1.23194E-05  3.68418E-02 -1.24713E-02 -7.55776E-04  5.35437E-04  6.39752E-05
  6.100  2.98931E-02 -1.13722E-02 -3.70016E-05  7.92745E-04 -9.12084E-06  3.33678E-02 -1.18426E-02 -5.29916E-04  5.18569E-04  4.52545E-05
  6.200  2.69493E-02 -1.07022E-02  1.16925E-04  7.37815E-04 -2.65632E-05  2.99961E-02 -1.11175E-02 -3.30184E-04  4.92674E-04  2.87385E-05
  6.300  2.41167E-02 -9.96186E-03  2.43441E-04  6.77466E-04 -4.01040E-05  2.67623E-02 -1.03205E-02 -1.59487E-04  4.59870E-04  1.47026E-05
  6.400  2.14219E-02 -9.17377E-03  3.41926E-04  6.14250E-04 -4.99798E-05  2.36964E-02 -9.47614E-03 -1.90102E-05  4.22284E-04  3.24856E-06
  6.500  1.88867E-02 -8.35976E-03  4.13119E-04  5.50433E-04 -5.65348E-05  2.08222E-02 -8.60799E-03  9.15951E-05  3.81927E-04 -5.67167E-06
  6.600  1.65277E-02 -7.54008E-03  4.58881E-04  4.87922E-04 -6.01870E-05  1.81575E-02 -7.73762E-03  1.73950E-04  3.40595E-04 -1.22255E-05
  6.700  1.43560E-02 -6.73276E-03  4.81933E-04  4.28232E-04 -6.13946E-05  1.57138E-02 -6.88404E-03  2.30653E-04  2.99808E-04 -1.66664E-05
  6.800  1.23779E-02 -5.95314E-03  4.85564E-04  3.72480E-04 -6.06257E-05  1.34965E-02 -6.06324E-03  2.64969E-04  2.60771E-04 -1.93011E-05
  6.900  1.05946E-02 -5.21362E-03  4.73360E-04  3.21401E-04 -5.83329E-05  1.15055E-02 -5.28798E-03  2.80533E-04  2.24372E-04 -2.04595E-05
  7.000  9.00322E-03 -4.52362E-03  4.48961E-04  2.75396E-04 -5.49338E-05  9.73594E-03 -4.56772E-03  2.81088E-04  1.91194E-04 -2.04695E-05
  7.100  7.59716E-03 -3.88960E-03  4.15851E-04  2.34576E-04 -5.07976E-05  8.17891E-03 -3.90879E-03  2.70256E-04  1.61551E-04 -1.96371E-05
  7.200  6.36687E-03 -3.31535E-03  3.77200E-04  1.98824E-04 -4.62375E-05  6.82228E-03 -3.31464E-03  2.51375E-04  1.35528E-04 -1.82335E-05
  7.300  5.30053E-03 -2.80223E-03  3.35760E-04  1.67858E-04 -4.15082E-05  5.65154E-03 -2.78618E-03  2.27375E-04  1.13036E-04 -1.64869E-05
  7.400  4.38480E-03 -2.34958E-03  2.93802E-04  1.41282E-04 -3.68075E-05  4.65062E-03 -2.32221E-03  2.00714E-04  9.38523E-05 -1.45799E-05
  7.500  3.60542E-03 -1.95512E-03  2.53096E-04  1.18639E-04 -3.22813E-05  3.80264E-03 -1.91989E-03  1.73354E-04  7.76752E-05 -1.26510E-05
  7.600  2.94779E-03 -1.61530E-03  2.14935E-04  9.94510E-05 -2.80300E-05  3.09053E-03 -1.57511E-03  1.46773E-04  6.41572E-05 -1.07985E-05
  7.700  2.39749E-03 -1.32576E-03  1.80170E-04  8.32487E-05 -2.41161E-05  2.49759E-03 -1.28295E-03  1.22007E-04  5.29393E-05 -9.08605E-06
  7.800  1.94062E-03 -1.08158E-03  1.49279E-04  6.95939E-05 -2.05720E-05  2.00787E-03 -1.03801E-03  9.97077E-05  4.36736E-05 -7.54972E-06
  7.900  1.56417E-03 -8.77671E-04  1.22427E-04  5.80924E-05 -1.74071E-05  1.60653E-03 -8.34733E-04  8.02071E-05  3.60397E-05 -6.20422E-06
  8.000  1.25614E-03 -7.08919E-04  9.95473E-05  4.84001E-05 -1.46144E-05  1.28003E-03 -6.67633E-04  6.35906E-05  2.97536E-05 -5.04911E-06
  8.100  1.00572E-03 -5.70435E-04  8.03996E-05  4.02236E-05 -1.21756E-05  1.01621E-03 -5.31494E-04  4.97617E-05  2.45717E-05 -4.07388E-06
  8.200  8.03351E-04 -4.57658E-04  6.46363E-05  3.33176E-05 -1.00653E-05  8.04389E-04 -4.21492E-04  3.85022E-05  2.02900E-05 -3.26214E-06
  8.300  6.40658E-04 -3.66443E-04  5.18507E-05  2.74789E-05 -8.25433E-06  6.35278E-04 -3.33279E-04  2.95220E-05  1.67417E-05 -2.59469E-06
  8.400  5.10461E-04 -2.93110E-04  4.16172E-05  2.25410E-05 -6.71219E-06  5.00949E-04 -2.63013E-04  2.24991E-05  1.37920E-05 -2.05172E-06
  8.500  4.06665E-04 -2.34451E-04  3.35204E-05  1.83672E-05 -5.40839E-06  3.94710E-04 -2.07372E-04  1.71095E-05  1.13334E-05 -1.61418E-06
  8.600  3.24165E-04 -1.87719E-04  2.71753E-05  1.48447E-05 -4.31365E-06  3.10989E-04 -1.63530E-04  1.30475E-05  9.28001E-06 -1.26462E-06
  8.700  2.58733E-04 -1.50601E-04  2.22390E-05  1.18795E-05 -3.40055E-06  2.45197E-04 -1.29120E-04  1.00386E-05  7.56349E-06 -9.87498E-07
  8.800  2.06907E-04 -1.21172E-04  1.84159E-05  9.39262E-06 -2.64385E-06  1.93595E-04 -1.02189E-04  7.84545E-06  6.12872E-06 -7.69342E-07
  8.900  1.65875E-04 -9.78570E-05  1.54583E-05  7.31655E-06 -2.02073E-06  1.53168E-04 -8.11478E-05  6.26999E-06  4.93081E-06 -5.98621E-07
  9.000  1.33376E-04 -7.93758E-05  1.31639E-05  5.59309E-06 -1.51079E-06  1.21503E-04 -6.47151E-05  5.15148E-06  3.93267E-06 -4.65608E-07
  9.100  1.07605E-04 -6.47017E-05  1.13711E-05  4.17169E-06 -1.09607E-06  9.66857E-05 -5.18718E-05  4.36304E-06  3.10331E-06 -3.62190E-07
  9.200  8.71265E-05 -5.30174E-05  9.95319E-06  3.00822E-06 -7.60908E-07  7.72079E-05 -4.18134E-05  3.80698E-06  2.41652E-06 -2.81685E-07
  9.300  7.08100E-05 -4.36773E-05  8.81276E-06  2.06418E-06 -4.91879E-07  6.18873E-05 -3.39100E-05  3.40991E-06  1.85010E-06 -2.18670E-07
  9.400  5.77656E-05 -3.61743E-05  7.87618E-06  1.30601E-06 -2.77569E-07  4.98015E-05 -2.76721E-05  3.11796E-06  1.38511E-06 -1.68820E-07
  9.500  4.72966E-05 -3.01121E-05  7.08867E-06  7.04628E-07 -1.08408E-07  4.02339E-05 -2.27211E-05  2.89261E-06  1.00550E-06 -1.28769E-07
  9.600  3.88580E-05 -2.51824E-05  6.41013E-06  2.34880E-07  2.35480E-08  3.26291E-05 -1.87656E-05  2.70709E-06  6.97645E-07 -9.59702E-08
  9.700  3.20243E-05 -2.11456E-05  5.81167E-06 -1.24851E-07  1.24837E-07  2.65570E-05 -1.55822E-05  2.54336E-06  4.50074E-07 -6.85650E-08
  9.800  2.64634E-05 -1.78160E-05  5.27294E-06 -3.93095E-07  2.00814E-07  2.16856E-05 -1.29999E-05  2.38988E-06  2.53118E-07 -4.52592E-08
  9.900  2.19161E-05 -1.50500E-05  4.77989E-06 -5.85706E-07  2.55860E-07  1.77578E-05 -1.08878E-05  2.23971E-06  9.86490E-08 -2.52008E-08
 10.000  1.81798E-05 -1.27360E-05  4.32316E-06 -7.16237E-07  2.93575E-07  1.45749E-05 -9.14622E-06  2.08922E-06 -2.01861E-08 -7.86771E-09
 10.100  1.50960E-05 -1.07878E-05  3.89678E-06 -7.96282E-07  3.16949E-07  1.19831E-05 -7.69887E-06  1.93704E-06 -1.09194E-07  7.03208E-09
 10.200  1.25401E-05 -9.13816E-06  3.49719E-06 -8.35773E-07  3.28498E-07  9.86275E-06 -6.48740E-06  1.78329E-06 -1.73335E-07  1.96475E-08
 10.300  1.04142E-05 -7.73484E-06  3.12248E-06 -8.43225E-07  3.30378E-07  8.12091E-06 -5.46702E-06  1.62906E-06 -2.16879E-07  3.00540E-08
 10.400  8.64069E-06 -6.53675E-06  2.77183E-06 -8.25935E-07  3.24463E-07  6.68484E-06 -4.60324E-06  1.47597E-06 -2.43540E-07  3.83065E-08
 10.500  7.15805E-06 -5.51143E-06  2.44507E-06 -7.90141E-07  3.12407E-07  5.49747E-06 -3.86925E-06  1.32586E-06 -2.56562E-07  4.44749E-08
 10.600  5.91693E-06 -4.63297E-06  2.14234E-06 -7.41146E-07  2.95678E-07  4.51368E-06 -3.24407E-06  1.18061E-06 -2.58788E-07  4.86652E-08
 10.700  4.87753E-06 -3.88039E-06  1.86383E-06 -6.83416E-07  2.75576E-07  3.69760E-06 -2.71104E-06  1.04194E-06 -2.52707E-07  5.10274E-08
 10.800  4.00748E-06 -3.23644E-06  1.60962E-06 -6.20658E-07  2.53251E-07  3.02045E-06 -2.25672E-06  9.11310E-07 -2.40479E-07  5.17535E-08
 10.900  3.28015E-06 -2.68670E-06  1.37958E-06 -5.55893E-07  2.29701E-07  2.45892E-06 -1.87012E-06  7.89876E-07 -2.23959E-07  5.10694E-08
 11.000  2.67344E-06 -2.21894E-06  1.17329E-06 -4.91520E-07  2.05772E-07  1.99399E-06 -1.54202E-06  6.78448E-07 -2.04713E-07  4.92223E-08
 11.100  2.16884E-06 -1.82256E-06  9.90009E-07 -4.29379E-07  1.82169E-07  1.60992E-06 -1.26461E-06  5.77491E-07 -1.84036E-07  4.64668E-08
 11.200  1.75069E-06 -1.48830E-06  8.28733E-07 -3.70814E-07  1.59450E-07  1.29366E-06 -1.03112E-06  4.87148E-07 -1.62966E-07  4.30521E-08
 11.300  1.40565E-06 -1.20796E-06  6.88183E-07 -3.16741E-07  1.38039E-07  1.03422E-06 -8.35635E-07  4.07272E-07 -1.42308E-07  3.92103E-08
 11.400  1.12232E-06 -9.74257E-07  5.66882E-07 -2.67709E-07  1.18237E-07  8.22334E-07 -6.72927E-07  3.37477E-07 -1.22656E-07  3.51485E-08
 11.500  8.90886E-07 -7.80673E-07  4.63207E-07 -2.23967E-07  1.00230E-07  6.50147E-07 -5.38361E-07  2.77185E-07 -1.04423E-07  3.10425E-08
 11.600  7.02929E-07 -6.21407E-07  3.75450E-07 -1.85522E-07  8.41097E-08  5.10981E-07 -4.27822E-07  2.25683E-07 -8.78639E-08  2.70345E-08
 11.700  5.51202E-07 -4.91294E-07  3.01879E-07 -1.52198E-07  6.98877E-08  3.99158E-07 -3.37658E-07  1.82165E-07 -7.31047E-08  2.32329E-08
 11.800  4.29498E-07 -3.85767E-07  2.40786E-07 -1.23688E-07  5.75110E-08  3.09859E-07 -2.64651E-07  1.45784E-07 -6.01711E-08  1.97144E-08
 11.900  3.32516E-07 -3.00813E-07  1.90529E-07 -9.95958E-08  4.68794E-08  2.39004E-07 -2.05977E-07  1.15684E-07 -4.90115E-08  1.65268E-08
 12.000  2.55756E-07 -2.32934E-07  1.49571E-07 -7.94749E-08  3.78592E-08  1.83157E-07 -1.59181E-07  9.10322E-08 -3.95201E-08  1.36939E-08
 12.100  1.95421E-07 -1.79110E-07  1.16496E-07 -6.28595E-08  3.02965E-08  1.39438E-07 -1.22144E-07  7.10422E-08 -3.15552E-08  1.12197E-08
 12.200  1.48329E-07 -1.36757E-07  9.00281E-08 -4.92870E-08  2.40279E-08  1.05452E-07 -9.30584E-08  5.49893E-08 -2.49557E-08  9.09320E-09
 12.300  1.11833E-07 -1.03685E-07  6.90357E-08 -3.83160E-08  1.88889E-08  7.92170E-08 -7.03945E-08  4.22204E-08 -1.95531E-08  7.29253E-09
 12.400  8.37521E-08 -7.80586E-08  5.25324E-08 -2.95375E-08  1.47206E-08  5.91101E-08 -5.28717E-08  3.21580E-08 -1.51811E-08  5.78896E-09
 12.500  6.23007E-08 -5.83537E-08  3.96703E-08 -2.25825E-08  1.13745E-08  4.38102E-08 -3.94288E-08  2.43007E-08 -1.16819E-08  4.54993E-09
 12.600  4.60319E-08 -4.33178E-08  2.97316E-08 -1.71248E-08  8.71538E-09  3.22517E-08 -2.91957E-08  1.82200E-08 -8.91107E-09  3.54164E-09
 12.700  3.37827E-08 -3.19318E-08  2.21164E-08 -1.28822E-08  6.62273E-09  2.35828E-08 -2.14661E-08  1.35556E-08 -6.73940E-09  2.73086E-09
 12.800  2.46266E-08 -2.33751E-08  1.63299E-08 -9.61406E-09  4.99157E-09  1.71279E-08 -1.56720E-08  1.00085E-08 -5.05424E-09  2.08635E-09
 12.900  1.78316E-08 -1.69928E-08  1.19689E-08 -7.11914E-09  3.73194E-09  1.23562E-08 -1.13619E-08  7.33382E-09 -3.75922E-09  1.57962E-09
 13.000  1.28252E-08 -1.22681E-08  8.70871E-09 -5.23111E-09  2.76808E-09  8.85407E-09 -8.17997E-09  5.33386E-09 -2.77335E-09  1.18544E-09
 13.100  9.16288E-09 -8.79642E-09  6.29089E-09 -3.81458E-09  2.03709E-09  6.30217E-09 -5.84843E-09  3.85068E-09 -2.02970E-09  8.81941E-10
 13.200  6.50287E-09 -6.26417E-09  4.51186E-09 -2.76075E-09  1.48756E-09  4.45590E-09 -4.15273E-09  2.75962E-09 -1.47379E-09  6.50589E-10
 13.300  4.58454E-09 -4.43067E-09  3.21301E-09 -1.98322E-09  1.07798E-09  3.12961E-09 -2.92855E-09  1.96342E-09 -1.06184E-09  4.75934E-10
 13.400  3.21081E-09 -3.11272E-09  2.27200E-09 -1.41422E-09  7.75287E-10  2.18358E-09 -2.05124E-09  1.38693E-09 -7.59195E-10  3.45319E-10
 13.500  2.23397E-09 -2.17217E-09  1.59540E-09 -1.00115E-09  5.53429E-10  1.51350E-09 -1.42706E-09  9.72772E-10 -5.38718E-10  2.48534E-10
 13.600  1.54417E-09 -1.50573E-09  1.11256E-09 -7.03640E-10  3.92146E-10  1.04219E-09 -9.86167E-10  6.77497E-10 -3.79424E-10  1.77459E-10
 13.700  1.06043E-09 -1.03686E-09  7.70532E-10 -4.91024E-10  2.75838E-10  7.12979E-10 -6.76955E-10  4.68568E-10 -2.65267E-10  1.25721E-10
 13.800  7.23524E-10 -7.09291E-10  5.30027E-10 -3.40240E-10  1.92626E-10  4.84603E-10 -4.61625E-10  3.21836E-10 -1.84108E-10  8.83823E-11
 13.900  4.90481E-10 -4.82041E-10  3.62134E-10 -2.34116E-10  1.33555E-10  3.27257E-10 -3.12722E-10  2.19544E-10 -1.26863E-10  6.16616E-11
 14.000  3.30373E-10 -3.25471E-10  2.45768E-10 -1.59980E-10  9.19437E-11  2.19585E-10 -2.10467E-10  1.48749E-10 -8.67954E-11  4.26973E-11
 14.100  2.21113E-10 -2.18338E-10  1.65687E-10 -1.08571E-10  6.28535E-11  1.46399E-10 -1.40730E-10  1.00107E-10 -5.89652E-11  2.93470E-11
 14.200  1.47050E-10 -1.45529E-10  1.10964E-10 -7.31827E-11  4.26688E-11  9.69877E-11 -9.34937E-11  6.69220E-11 -3.97797E-11  2.00236E-11
 14.300  9.71791E-11 -9.63806E-11  7.38286E-11 -4.89970E-11  2.87669E-11  6.38481E-11 -6.17148E-11  4.44422E-11 -2.66517E-11  1.35636E-11
 14.400  6.38190E-11 -6.34259E-11  4.88020E-11 -3.25853E-11  1.92621E-11  4.17685E-11 -4.04786E-11  2.93200E-11 -1.77342E-11  9.12215E-12
 14.500  4.16497E-11 -4.14760E-11  3.20509E-11 -2.15273E-11  1.28105E-11  2.71540E-11 -2.63820E-11  1.92175E-11 -1.17207E-11  6.09174E-12
 14.600  2.70129E-11 -2.69523E-11  2.09146E-11 -1.41284E-11  8.46262E-12  1.75435E-11 -1.70864E-11  1.25146E-11 -7.69437E-12  4.03962E-12
 14.700  1.74118E-11 -1.74051E-11  1.35609E-11 -9.21209E-12  5.55322E-12  1.12645E-11 -1.09970E-11  8.09730E-12 -5.01761E-12  2.66026E-12
 14.800  1.11542E-11 -1.11701E-11  8.73716E-12 -5.96764E-12  3.61999E-12  7.18846E-12 -7.03380E-12  5.20582E-12 -3.25049E-12  1.73990E-12
 14.900  7.10192E-12 -7.12446E-12  5.59390E-12 -3.84102E-12  2.34430E-12  4.55930E-12 -4.47112E-12  3.32569E-12 -2.09195E-12  1.13022E-12
 15.000  4.49430E-12 -4.51620E-12  3.55908E-12 -2.45646E-12  1.50829E-12  2.87419E-12 -2.82467E-12  2.11123E-12 -1.33761E-12  7.29248E-13
 15.100  2.82692E-12 -2.84535E-12  2.25038E-12 -1.56103E-12  9.64149E-13  1.80094E-12 -1.77361E-12  1.33189E-12 -8.49766E-13  4.67391E-13
 15.200  1.76742E-12 -1.78177E-12  1.41411E-12 -9.85752E-13  6.12361E-13  1.12166E-12 -1.10688E-12  8.35022E-13 -5.36397E-13  2.97581E-13
 15.300  1.09839E-12 -1.10902E-12  8.83156E-13 -6.18583E-13  3.86452E-13  6.94415E-13 -6.86612E-13  5.20283E-13 -3.36440E-13  1.88223E-13
 15.400  6.78538E-13 -6.86128E-13  5.48192E-13 -3.85762E-13  2.42340E-13  4.27346E-13 -4.23354E-13  3.22189E-13 -2.09693E-13  1.18278E-13
 15.500  4.16681E-13 -4.21954E-13  3.38207E-13 -2.39082E-13  1.51013E-13  2.61432E-13 -2.59471E-13  1.98301E-13 -1.29877E-13  7.38458E-14
 15.600  2.54365E-13 -2.57948E-13  2.07396E-13 -1.47264E-13  9.35153E-14  1.58988E-13 -1.58082E-13  1.21310E-13 -7.99413E-14  4.58094E-14
 15.700  1.54364E-13 -1.56753E-13  1.26416E-13 -9.01540E-14  5.75498E-14  9.61197E-14 -9.57401E-14  7.37640E-14 -4.89010E-14  2.82365E-14
 15.800  9.31278E-14 -9.46956E-14  7.65949E-14 -5.48562E-14  3.51977E-14  5.77712E-14 -5.76418E-14  4.45839E-14 -2.97295E-14  1.72948E-14
 15.900  5.58560E-14 -5.68701E-14  4.61323E-14 -3.31767E-14  2.13949E-14  3.45202E-14 -3.45004E-14  2.67863E-14 -1.79638E-14  1.05266E-14
 16.000  3.33064E-14 -3.39540E-14  2.76205E-14 -1.99444E-14  1.29254E-14  2.05072E-14 -2.05289E-14  1.59978E-14 -1.07885E-14  6.36709E-15
 16.100  1.97452E-14 -2.01540E-14  1.64396E-14 -1.19180E-14  7.76132E-15  1.21123E-14 -1.21443E-14  9.49810E-15 -6.44016E-15  3.82734E-15
 16.200  1.16381E-14 -1.18933E-14  9.72735E-15 -7.07931E-15  4.63227E-15  7.11276E-15 -7.14262E-15  5.60597E-15 -3.82134E-15  2.28650E-15
 16.300  6.82027E-15 -6.97797E-15  5.72208E-15 -4.18022E-15  2.74811E-15  4.15293E-15 -4.17666E-15  3.28940E-15 -2.25389E-15  1.35762E-15
 16.400  3.97398E-15 -4.07051E-15  3.34642E-15 -2.45380E-15  1.62058E-15  2.41093E-15 -2.42828E-15  1.91886E-15 -1.32148E-15  8.01192E-16
 16.500  2.30232E-15 -2.36087E-15  1.94574E-15 -1.43194E-15  9.49981E-16  1.39167E-15 -1.40371E-15  1.11287E-15 -7.70221E-16  4.69958E-16
 16.600  1.32626E-15 -1.36147E-15  1.12480E-15 -8.30737E-16  5.53579E-16  7.98771E-16 -8.06810E-16  6.41702E-16 -4.46279E-16  2.74007E-16
 16.700  7.59672E-16 -7.80665E-16  6.46495E-16 -4.79148E-16  3.20684E-16  4.55878E-16 -4.61099E-16  3.67888E-16 -2.57067E-16  1.58802E-16
 16.800  4.32679E-16 -4.45096E-16  3.69457E-16 -2.74759E-16  1.84680E-16  2.58717E-16 -2.62031E-16  2.09703E-16 -1.47214E-16  9.14868E-17
 16.900  2.45050E-16 -2.52337E-16  2.09932E-16 -1.56648E-16  1.05734E-16  1.46002E-16 -1.48066E-16  1.18853E-16 -8.38153E-17  5.23938E-17
 17.000  1.38007E-16 -1.42252E-16  1.18610E-16 -8.87960E-17  6.01840E-17  8.19337E-17 -8.31984E-17  6.69791E-17 -4.74441E-17  2.98287E-17
 17.100  7.72887E-17 -7.97428E-17  6.66346E-17 -5.00462E-17  3.40583E-17  4.57235E-17 -4.64875E-17  3.75323E-17 -2.67015E-17  1.68824E-17
 17.200  4.30431E-17 -4.44519E-17  3.72240E-17 -2.80457E-17  1.91625E-17  2.53747E-17 -2.58303E-17  2.09129E-17 -1.49415E-17  9.49930E-18
 17.300  2.38382E-17 -2.46412E-17  2.06776E-17 -1.56275E-17  1.07196E-17  1.40040E-17 -1.42725E-17  1.15872E-17 -8.31322E-18  5.31394E-18
 17.400  1.31290E-17 -1.35835E-17  1.14219E-17 -8.65860E-18  5.96233E-18  7.68603E-18 -7.84261E-18  6.38418E-18 -4.59906E-18  2.95544E-18
 17.500  7.19099E-18 -7.44651E-18  6.27406E-18 -4.77037E-18  3.29739E-18  4.19525E-18 -4.28564E-18  3.49786E-18 -2.52990E-18  1.63425E-18
 17.600  3.91695E-18 -4.05965E-18  3.42717E-18 -2.61343E-18  1.81322E-18  2.27734E-18 -2.32902E-18  1.90580E-18 -1.38383E-18  8.98495E-19
 17.700  2.12187E-18 -2.20104E-18  1.86170E-18 -1.42375E-18  9.91441E-19  1.22947E-18 -1.25875E-18  1.03262E-18 -7.52690E-19  4.91162E-19
 17.800  1.14316E-18 -1.18679E-18  1.00572E-18 -7.71302E-19  5.39049E-19  6.60135E-19 -6.76589E-19  5.56417E-19 -4.07110E-19  2.66966E-19
 17.900  6.12516E-19 -6.36415E-19  5.40310E-19 -4.15523E-19  2.91436E-19  3.52520E-19 -3.61688E-19  2.98169E-19 -2.18967E-19  1.44284E-19
 18.000  3.26407E-19 -3.39414E-19  2.88682E-19 -2.22614E-19  1.56683E-19  1.87229E-19 -1.92298E-19  1.58904E-19 -1.17118E-19  7.75391E-20
 18.100  1.72997E-19 -1.80032E-19  1.53395E-19 -1.18605E-19  8.37661E-20  9.89035E-20 -1.01684E-19  8.42215E-20 -6.22955E-20  4.14356E-20
 18.200  9.11931E-20 -9.49739E-20  8.10631E-20 -6.28432E-20  4.45342E-20  5.19640E-20 -5.34779E-20  4.43953E-20 -3.29522E-20  2.20184E-20
 18.300  4.78117E-20 -4.98314E-20  4.26055E-20 -3.31147E-20  2.35454E-20  2.71552E-20 -2.79736E-20  2.32746E-20 -1.73347E-20  1.16350E-20
 18.400  2.49323E-20 -2.60046E-20  2.22711E-20 -1.73540E-20  1.23797E-20  1.41146E-20 -1.45539E-20  1.21358E-20 -9.06900E-21  6.11393E-21
 18.500  1.29315E-20 -1.34975E-20  1.15787E-20 -9.04486E-21  6.47316E-21  7.29717E-21 -7.53134E-21  6.29356E-21 -4.71867E-21  3.19492E-21
 18.600  6.67122E-21 -6.96814E-21  5.98727E-21 -4.68850E-21  3.36613E-21  3.75248E-21 -3.87645E-21  3.24621E-21 -2.44178E-21  1.66032E-21
 18.700  3.42321E-21 -3.57805E-21  3.07929E-21 -2.41714E-21  1.74085E-21  1.91939E-21 -1.98460E-21  1.66539E-21 -1.25668E-21  8.58074E-22
 18.800  1.74718E-21 -1.82747E-21  1.57519E-21 -1.23940E-21  8.95390E-22  9.76558E-22 -1.01063E-21  8.49802E-22 -6.43252E-22  4.41026E-22
 18.900  8.87008E-22 -9.28390E-22  8.01455E-22 -6.32081E-22  4.58029E-22  4.94225E-22 -5.11912E-22  4.31311E-22 -3.27479E-22  2.25434E-22
 19.000  4.47925E-22 -4.69131E-22  4.05600E-22 -3.20618E-22  2.33029E-22  2.48800E-22 -2.57924E-22  2.17740E-22 -1.65821E-22  1.14603E-22
 19.100  2.24997E-22 -2.35802E-22  2.04171E-22 -1.61757E-22  1.17915E-22  1.24589E-22 -1.29266E-22  1.09337E-22 -8.35127E-23  5.79434E-23
 19.200  1.12421E-22 -1.17894E-22  1.02229E-22 -8.11723E-23  5.93436E-23  6.20610E-23 -6.44436E-23  5.46116E-23 -4.18341E-23  2.91371E-23
 19.300  5.58752E-23 -5.86324E-23  5.09146E-23 -4.05158E-23  2.97053E-23  3.07518E-23 -3.19582E-23  2.71328E-23 -2.08439E-23  1.45725E-23
 19.400  2.76249E-23 -2.90059E-23  2.52234E-23 -2.01150E-23  1.47896E-23  1.51580E-23 -1.57651E-23  1.34092E-23 -1.03301E-23  7.24884E-24
 19.500  1.35861E-23 -1.42739E-23  1.24298E-23 -9.93341E-24  7.32391E-24  7.43251E-24 -7.73622E-24  6.59193E-24 -5.09229E-24  3.58641E-24
 19.600  6.64673E-24 -6.98738E-24  6.09292E-24 -4.87940E-24  3.60746E-24  3.62541E-24 -3.77644E-24  3.22353E-24 -2.49694E-24  1.76487E-24
  67 144 198   0.100
  0.000  7.03500E-02 -3.41348E-16 -5.82867E-16 -4.25315E-16 -1.91686E-15  9.29917E-02 -4.80991E-16 -7.70217E-16 -4.87861E-16 -1.07287E-15
  0.100  7.03449E-02  2.76430E-05  8.34487E-09 -8.24954E-12  2.86098E-17  9.28883E-02  3.79592E-05 -5.13862E-08  1.72040E-11 -3.60483E-15
  0.200  7.03307E-02  1.08698E-04  1.33214E-07 -5.24221E-10  4.16144E-13  9.25833E-02  1.49646E-04 -8.13732E-07  1.09141E-09 -6.42190E-13
  0.300  7.03103E-02  2.37665E-04  6.71748E-07 -5.90037E-09  1.05291E-11  9.20920E-02  3.28606E-04 -4.04918E-06  1.22498E-08 -1.61641E-11
  0.400  7.02881E-02  4.05775E-04  2.11076E-06 -3.26036E-08  1.03090E-10  9.14387E-02  5.64458E-04 -1.24923E-05  6.74223E-08 -1.58163E-10
  0.500  7.02699E-02  6.01556E-04  5.11236E-06 -1.21738E-07  5.98741E-10  9.06554E-02  8.43447E-04 -2.95658E-05  2.50474E-07 -9.18227E-10
  0.600  7.02618E-02  8.11564E-04  1.04909E-05 -3.54132E-07  2.49476E-09  8.97795E-02  1.14917E-03 -5.90201E-05  7.24137E-07 -3.82378E-09
  0.700  7.02696E-02  1.02123E-03  1.91792E-05 -8.65895E-07  8.25265E-09  8.88519E-02  1.46343E-03 -1.04527E-04  1.75774E-06 -1.26393E-08
  0.800  7.02986E-02  1.21576E-03  3.21830E-05 -1.86215E-06  2.30267E-08  8.79143E-02  1.76725E-03 -1.69268E-04  3.74852E-06 -3.52304E-08
  0.900  7.03525E-02  1.38102E-03  5.05232E-05 -3.62673E-06  5.63556E-08  8.70069E-02  2.04181E-03 -2.55547E-04  7.23175E-06 -8.61096E-08
  1.000  7.04335E-02  1.50437E-03  7.51684E-05 -6.52601E-06  1.24262E-07  8.61664E-02  2.26949E-03 -3.64464E-04  1.28761E-05 -1.89553E-07
  1.100  7.05415E-02  1.57539E-03  1.06960E-04 -1.10053E-05  2.51626E-07  8.54235E-02  2.43483E-03 -4.95683E-04  2.14625E-05 -3.83045E-07
  1.200  7.06746E-02  1.58640E-03  1.46538E-04 -1.75773E-05  4.74626E-07  8.48023E-02  2.52530E-03 -6.47301E-04  3.38458E-05 -7.20697E-07
  1.300  7.08289E-02  1.53288E-03  1.94266E-04 -2.68022E-05  8.42995E-07  8.43188E-02  2.53201E-03 -8.15833E-04  5.09012E-05 -1.27619E-06
  1.400  7.09990E-02  1.41364E-03  2.50175E-04 -3.92601E-05  1.42181E-06  8.39804E-02  2.45016E-03 -9.96327E-04  7.34593E-05 -2.14482E-06
  1.500  7.11780E-02  1.23082E-03  3.13919E-04 -5.55181E-05  2.29256E-06  8.37865E-02  2.27933E-03 -1.18257E-03  1.02233E-04 -3.44410E-06
  1.600  7.13587E-02  9.89695E-04  3.84757E-04 -7.60916E-05  3.55314E-06  8.37284E-02  2.02348E-03 -1.36742E-03  1.37740E-04 -5.31271E-06
  1.700  7.15335E-02  6.98375E-04  4.61553E-04 -1.01406E-04  5.31678E-06  8.37906E-02  1.69079E-03 -1.54316E-03  1.80237E-04 -7.90737E-06
  1.800  7.16951E-02  3.67307E-04  5.42813E-04 -1.31755E-04  7.70943E-06  8.39520E-02  1.29319E-03 -1.70194E-03  2.29649E-04 -1.13976E-05
  1.900  7.18368E-02  8.73496E-06  6.26734E-04 -1.67272E-04  1.08658E-05  8.41876E-02  8.45795E-04 -1.83624E-03  2.85523E-04 -1.59585E-05
  2.000  7.19530E-02 -3.63927E-04  7.11276E-04 -2.07893E-04  1.49241E-05  8.44694E-02  3.66108E-04 -1.93930E-03  3.46998E-04 -2.17610E-05
  2.100  7.20393E-02 -7.36751E-04  7.94241E-04 -2.53344E-04  2.00186E-05  8.47690E-02 -1.26856E-04 -2.00552E-03  4.12787E-04 -2.89611E-05
  2.200  7.20925E-02 -1.09595E-03  8.73361E-04 -3.03132E-04  2.62727E-05  8.50583E-02 -6.13543E-04 -2.03082E-03  4.81197E-04 -3.76874E-05
  2.300  7.21111E-02 -1.42854E-03  9.46371E-04 -3.56545E-04  3.37892E-05  8.53118E-02 -1.07486E-03 -2.01294E-03  5.50156E-04 -4.80276E-05
  2.400  7.20944E-02 -1.72290E-03  1.01107E-03 -4.12674E-04  4.26420E-05  8.55069E-02 -1.49315E-03 -1.95160E-03  6.17277E-04 -6.00146E-05
  2.500  7.20432E-02 -1.96937E-03  1.06538E-03 -4.70438E-04  5.28671E-05  8.56258E-02 -1.85309E-03 -1.84863E-03  6.79937E-04 -7.36139E-05
  2.600  7.19593E-02 -2.16070E-03  1.10735E-03 -5.28624E-04  6.44554E-05  8.56558E-02 -2.14254E-03 -1.70796E-03  7.35381E-04 -8.87111E-05
  2.700  7.18454E-02 -2.29244E-03  1.13516E-03 -5.85932E-04  7.73474E-05  8.55897E-02 -2.35318E-03 -1.53549E-03  7.80842E-04 -1.05102E-04
  2.800  7.17050E-02 -2.36327E-03  1.14714E-03 -6.41026E-04  9.14299E-05  8.54259E-02 -2.48103E-03 -1.33894E-03  8.13672E-04 -1.22486E-04
  2.900  7.15420E-02 -2.37516E-03  1.14172E-03 -6.92579E-04  1.06537E-04  8.51684E-02 -2.52677E-03 -1.12748E-03  8.31488E-04 -1.40463E-04
  3.000  7.13608E-02 -2.33346E-03  1.11743E-03 -7.39323E-04  1.22455E-04  8.48261E-02 -2.49582E-03 -9.11389E-04  8.32307E-04 -1.58537E-04
  3.100  7.11661E-02 -2.24682E-03  1.07291E-03 -7.80082E-04  1.38926E-04  8.44118E-02 -2.39823E-03 -7.01599E-04  8.14692E-04 -1.76121E-04
  3.200  7.09622E-02 -2.12701E-03  1.00691E-03 -8.13800E-04  1.55666E-04  8.39412E-02 -2.24833E-03 -5.09154E-04  7.77864E-04 -1.92558E-04
  3.300  7.07532E-02 -1.98854E-03  9.18392E-04 -8.39560E-04  1.72370E-04  8.34314E-02 -2.06417E-03 -3.44682E-04  7.21805E-04 -2.07134E-04
  3.400  7.05422E-02 -1.84810E-03  8.06595E-04 -8.56585E-04  1.88732E-04  8.28999E-02 -1.86676E-03 -2.17835E-04  6.47322E-04 -2.19115E-04
  3.500  7.03310E-02 -1.72397E-03  6.71161E-04 -8.64243E-04  2.04455E-04  8.23623E-02 -1.67907E-03 -1.36763E-04  5.56073E-04 -2.27776E-04
  3.600  7.01194E-02 -1.63512E-03  5.12291E-04 -8.62031E-04  2.19264E-04  8.18313E-02 -1.52495E-03 -1.07626E-04  4.50546E-04 -2.32440E-04
  3.700  6.99050E-02 -1.60033E-03  3.30903E-04 -8.49576E-04  2.32919E-04  8.13153E-02 -1.42791E-03 -1.34200E-04  3.33987E-04 -2.32520E-04
  3.800  6.96825E-02 -1.63718E-03  1.28778E-04 -8.26624E-04  2.45214E-04  8.08169E-02 -1.40986E-03 -2.17588E-04  2.10284E-04 -2.27563E-04
  3.900  6.94432E-02 -1.76101E-03 -9.13236E-05 -7.93048E-04  2.55983E-04  8.03324E-02 -1.48985E-03 -3.56072E-04  8.37980E-05 -2.17283E-04
  4.000  6.91748E-02 -1.98394E-03 -3.25593E-04 -7.48853E-04  2.65099E-04  7.98512E-02 -1.68290E-03 -5.45113E-04 -4.08432E-05 -2.01597E-04
  4.100  6.88617E-02 -2.31400E-03 -5.69184E-04 -6.94205E-04  2.72461E-04  7.93557E-02 -1.99900E-03 -7.77525E-04 -1.58975E-04 -1.80647E-04
  4.200  6.84846E-02 -2.75438E-03 -8.16297E-04 -6.29455E-04  2.77997E-04  7.88224E-02 -2.44234E-03 -1.04379E-03 -2.66144E-04 -1.54810E-04
  4.300  6.80216E-02 -3.30292E-03 -1.06036E-03 -5.55174E-04  2.81645E-04  7.82219E-02 -3.01077E-03 -1.33256E-03 -3.58353E-04 -1.24695E-04
  4.400  6.74485E-02 -3.95195E-03 -1.29428E-03 -4.72189E-04  2.83357E-04  7.75214E-02 -3.69570E-03 -1.63120E-03 -4.32280E-04 -9.11292E-05
  4.500  6.67400E-02 -4.68833E-03 -1.51080E-03 -3.81607E-04  2.83086E-04  7.66854E-02 -4.48223E-03 -1.92653E-03 -4.85468E-04 -5.51185E-05
  4.600  6.58710E-02 -5.49389E-03 -1.70285E-03 -2.84827E-04  2.80787E-04  7.56788E-02 -5.34976E-03 -2.20550E-03 -5.16459E-04 -1.78065E-05
  4.700  6.48179E-02 -6.34616E-03 -1.86397E-03 -1.83539E-04  2.76425E-04  7.44679E-02 -6.27289E-03 -2.45591E-03 -5.24866E-04  1.95846E-05
  4.800  6.35600E-02 -7.21935E-03 -1.98870E-03 -7.96934E-05  2.69974E-04  7.30237E-02 -7.22255E-03 -2.66710E-03 -5.11376E-04  5.58173E-05
  4.900  6.20812E-02 -8.08563E-03 -2.07291E-03  2.45492E-05  2.61433E-04  7.13226E-02 -8.16751E-03 -2.83045E-03 -4.77691E-04  8.97050E-05
  5.000  6.03707E-02 -8.91642E-03 -2.11409E-03  1.26893E-04  2.50834E-04  6.93491E-02 -9.07586E-03 -2.93984E-03 -4.26397E-04  1.20176E-04
  5.100  5.84244E-02 -9.68389E-03 -2.11150E-03  2.25000E-04  2.38253E-04  6.70965E-02 -9.91666E-03 -2.99187E-03 -3.60788E-04  1.46330E-04
  5.200  5.62456E-02 -1.03623E-02 -2.06621E-03  3.16595E-04  2.23820E-04  6.45676E-02 -1.06614E-02 -2.98596E-03 -2.84644E-04  1.67482E-04
  5.300  5.38450E-02 -1.09293E-02 -1.98110E-03  3.99573E-04  2.07725E-04  6.17750E-02 -1.12855E-02 -2.92421E-03 -2.01994E-04  1.83195E-04
  5.400  5.12406E-02 -1.13668E-02 -1.86059E-03  4.72111E-04  1.90219E-04  5.87410E-02 -1.17693E-02 -2.81117E-03 -1.16877E-04  1.93293E-04
  5.500  4.84575E-02 -1.16622E-02 -1.71043E-03  5.32750E-04  1.71612E-04  5.54962E-02 -1.20988E-02 -2.65340E-03 -3.31100E-05  1.97855E-04
  5.600  4.55267E-02 -1.18081E-02 -1.53730E-03  5.80474E-04  1.52259E-04  5.20788E-02 -1.22665E-02 -2.45902E-03  4.59055E-05  1.97199E-04
  5.700  4.24839E-02 -1.18033E-02 -1.34844E-03  6.14751E-04  1.32551E-04  4.85323E-02 -1.22711E-02 -2.23708E-03  1.17337E-04  1.91844E-04
  5.800  3.93684E-02 -1.16519E-02 -1.15121E-03  6.35545E-04  1.12895E-04  4.49043E-02 -1.21172E-02 -1.99707E-03  1.79022E-04  1.82471E-04
  5.900  3.62208E-02 -1.13631E-02 -9.52718E-04  6.43301E-04  9.36975E-05  4.12439E-02 -1.18153E-02 -1.74831E-03  2.29522E-04  1.69866E-04
  6.000  3.30822E-02 -1.09504E-02 -7.59467E-04  6.38901E-04  7.53389E-05  3.76001E-02 -1.13802E-02 -1.49951E-03  2.68118E-04  1.54872E-04
  6.100  2.99922E-02 -1.04309E-02 -5.77057E-04  6.23593E-04  5.81604E-05  3.40196E-02 -1.08307E-02 -1.25836E-03  2.94759E-04  1.38334E-04
  6.200  2.69875E-02 -9.82380E-03 -4.09996E-04  5.98906E-04  4.24464E-05  3.05456E-02 -1.01877E-02 -1.03127E-03  3.09981E-04  1.21053E-04
  6.300  2.41010E-02 -9.14992E-03 -2.61591E-04  5.66556E-04  2.84133E-05  2.72161E-02 -9.47383E-03 -8.23184E-04  3.14793E-04  1.03751E-04
  6.400  2.13607E-02 -8.43020E-03 -1.33918E-04  5.28342E-04  1.62031E-05  2.40632E-02 -8.71183E-03 -6.37511E-04  3.10551E-04  8.70400E-05
  6.500  1.87889E-02 -7.68499E-03 -2.78772E-05  4.86060E-04  5.88197E-06  2.11120E-02 -7.92366E-03 -4.76202E-04  2.98827E-04  7.14063E-05
  6.600  1.64025E-02 -6.93322E-03  5.66861E-05  4.41414E-04 -2.55646E-06  1.83809E-02 -7.12969E-03 -3.39861E-04  2.81284E-04  5.72038E-05
  6.700  1.42123E-02 -6.19179E-03  1.20818E-04  3.95953E-04 -9.18351E-06  1.58816E-02 -6.34801E-03 -2.27932E-04  2.59572E-04  4.46570E-05
  6.800  1.22237E-02 -5.47509E-03  1.66256E-04  3.51018E-04 -1.41248E-05  1.36189E-02 -5.59398E-03 -1.38937E-04  2.35231E-04  3.38716E-05
  6.900  1.04371E-02 -4.79478E-03  1.95227E-04  3.07713E-04 -1.75477E-05  1.15921E-02 -4.87994E-03 -7.07174E-05  2.09633E-04  2.48511E-05
  7.000  8.84836E-03 -4.15972E-03  2.10241E-04  2.66896E-04 -1.96475E-05  9.79523E-03 -4.21520E-03 -2.06756E-05  1.83934E-04  1.75167E-05
  7.100  7.44958E-03 -3.57601E-03  2.13910E-04  2.29176E-04 -2.06342E-05  8.21821E-03 -3.60607E-03  1.39981E-05  1.59056E-04  1.17292E-05
  7.200  6.22996E-03 -3.04723E-03  2.08788E-04  1.94936E-04 -2.07203E-05  6.84765E-03 -3.05615E-03  3.61360E-05  1.35684E-04  7.30920E-06
  7.300  5.17654E-03 -2.57470E-03  1.97257E-04  1.64357E-04 -2.01104E-05  5.66782E-03 -2.56662E-03  4.84385E-05  1.14283E-04  4.05690E-06
  7.400  4.27493E-03 -2.15784E-03  1.81431E-04  1.37451E-04 -1.89930E-05  4.66153E-03 -2.13660E-03  5.33621E-05  9.51214E-05  1.76792E-06
  7.500  3.50999E-03 -1.79455E-03  1.63110E-04  1.14097E-04 -1.75349E-05  3.81088E-03 -1.76364E-03  5.30469E-05  7.83046E-05  2.46181E-07
  7.600  2.86645E-03 -1.48159E-03  1.43756E-04  9.40750E-05 -1.58779E-05  3.09795E-03 -1.44405E-03  4.92816E-05  6.38076E-05 -6.87022E-07
  7.700  2.32938E-03 -1.21490E-03  1.24497E-04  7.71025E-05 -1.41371E-05  2.50532E-03 -1.17334E-03  4.34972E-05  5.15106E-05 -1.18736E-06
  7.800  1.88455E-03 -9.89982E-04  1.06150E-04  6.28587E-05 -1.24022E-05  2.01654E-03 -9.46542E-04  3.67863E-05  4.12307E-05 -1.38482E-06
  7.900  1.51873E-03 -8.02112E-04  8.92610E-05  5.10108E-05 -1.07388E-05  1.61636E-03 -7.58506E-04  2.99373E-05  3.27488E-05 -1.38346E-06
  8.000  1.21986E-03 -6.46602E-04  7.41444E-05  4.12315E-05 -9.19150E-06  1.29096E-03 -6.04141E-04  2.34793E-05  2.58314E-05 -1.26307E-06
  8.100  9.77171E-04 -5.18953E-04  6.09332E-05  3.32122E-05 -7.78715E-06  1.02803E-03 -4.78591E-04  1.77310E-05  2.02475E-05 -1.08190E-06
  8.200  7.81156E-04 -4.14975E-04  4.96235E-05  2.66717E-05 -6.53844E-06  8.16791E-04 -3.77363E-04  1.28484E-05  1.57800E-05 -8.80173E-07
  8.300  6.23593E-04 -3.30865E-04  4.01149E-05  2.13603E-05 -5.44723E-06  6.47939E-04 -2.96397E-04  8.86965E-06  1.22327E-05 -6.83639E-07
  8.400  4.97449E-04 -2.63246E-04  3.22466E-05  1.70616E-05 -4.50764E-06  5.13555E-04 -2.32112E-04  5.75291E-06  9.43399E-06 -5.07083E-07
  8.500  3.96794E-04 -2.09176E-04  2.58254E-05  1.35913E-05 -3.70870E-06  4.06987E-04 -1.81408E-04  3.40812E-06  7.23755E-06 -3.57400E-07
  8.600  3.16678E-04 -1.66136E-04  2.06477E-05  1.07951E-05 -3.03651E-06  3.22716E-04 -1.41645E-04  1.72103E-06  5.52135E-06 -2.36183E-07
  8.700  2.53022E-04 -1.32001E-04  1.65145E-05  8.54546E-06 -2.47591E-06  2.56208E-04 -1.10617E-04  5.70787E-07  4.18541E-06 -1.41774E-07
  8.800  2.02490E-04 -1.05003E-04  1.32419E-05  6.73778E-06 -2.01169E-06  2.03779E-04 -8.65009E-05 -1.58300E-07  3.14894E-06 -7.07849E-08
  8.900  1.62383E-04 -8.36887E-05  1.06665E-05  5.28708E-06 -1.62943E-06  1.62461E-04 -6.78143E-05 -5.69771E-07  2.34738E-06 -1.91602E-08
  9.000  1.30531E-04 -6.68777E-05  8.64786E-06  4.12457E-06 -1.31598E-06  1.29882E-04 -5.33630E-05 -7.51620E-07  1.72956E-06  1.71384E-08
  9.100  1.05201E-04 -5.36182E-05  7.06826E-06  3.19471E-06 -1.05971E-06  1.04158E-04 -4.21960E-05 -7.75476E-07  1.25511E-06  4.17434E-08
  9.200  8.50185E-05 -4.31504E-05  5.83143E-06  2.45267E-06 -8.50605E-07  8.38063E-05 -3.35635E-05 -6.97451E-07  8.92302E-07  5.77027E-08
  9.300  6.88974E-05 -3.48714E-05  4.85993E-06  1.86229E-06 -6.80179E-07  6.76601E-05 -2.68786E-05 -5.59946E-07  6.16220E-07  6.74409E-08
  9.400  5.59821E-05 -2.83058E-05  4.09251E-06  1.39431E-06 -5.41373E-07  5.48082E-05 -2.16856E-05 -3.93855E-07  4.07341E-07  7.28038E-08
  9.500  4.56008E-05 -2.30804E-05  3.48130E-06  1.02507E-06 -4.28374E-07  4.45400E-05 -1.76328E-05 -2.20819E-07  2.50381E-07  7.51456E-08
  9.600  3.72267E-05 -1.89037E-05  2.98931E-06  7.35387E-07 -3.36441E-07  3.63025E-05 -1.44504E-05 -5.52982E-08  1.33402E-07  7.54277E-08
  9.700  3.04470E-05 -1.55483E-05  2.58819E-06  5.09706E-07 -2.61727E-07  2.96654E-05 -1.19324E-05  9.36548E-08  4.71146E-08  7.43146E-08
  9.800  2.49380E-05 -1.28377E-05  2.25641E-06  3.35418E-07 -2.01121E-07  2.42943E-05 -9.92197E-06  2.20950E-07 -1.56762E-08  7.22560E-08
  9.900  2.04460E-05 -1.06348E-05  1.97767E-06  2.02296E-07 -1.52106E-07  1.99290E-05 -8.30068E-06  3.24333E-07 -6.05105E-08  6.95525E-08
 10.000  1.67712E-05 -8.83335E-06  1.73980E-06  1.02056E-07 -1.12641E-07  1.63664E-05 -6.97907E-06  4.03529E-07 -9.16292E-08  6.64047E-08
 10.100  1.37563E-05 -7.35112E-06  1.53372E-06  2.79871E-08 -8.10650E-08  1.34481E-05 -5.88993E-06  4.59607E-07 -1.12263E-07  6.29491E-08
 10.200  1.12768E-05 -6.12441E-06  1.35276E-06 -2.53446E-08 -5.60129E-08  1.10495E-05 -4.98289E-06  4.94518E-07 -1.24868E-07  5.92815E-08
 10.300  9.23385E-06 -5.10380E-06  1.19207E-06 -6.23408E-08 -3.63578E-08  9.07265E-06 -4.22026E-06  5.10750E-07 -1.31314E-07  5.54737E-08
 10.400  7.54845E-06 -4.25086E-06  1.04815E-06 -8.65690E-08 -2.11602E-08  7.44011E-06 -3.57382E-06  5.11073E-07 -1.33035E-07  5.15828E-08
 10.500  6.15725E-06 -3.53556E-06  9.18522E-07 -1.00922E-07 -9.63128E-09  6.09008E-06 -3.02239E-06  4.98356E-07 -1.31144E-07  4.76573E-08
 10.600  5.00902E-06 -2.93425E-06  8.01446E-07 -1.07748E-07 -1.10417E-09  4.97305E-06 -2.54992E-06  4.75413E-07 -1.26526E-07  4.37410E-08
 10.700  4.06213E-06 -2.42818E-06  6.95683E-07 -1.08950E-07  4.98715E-09  4.04902E-06 -2.14415E-06  4.44906E-07 -1.19893E-07  3.98739E-08
 10.800  3.28246E-06 -2.00226E-06  6.00337E-07 -1.06068E-07  9.12421E-09  3.28543E-06 -1.79547E-06  4.09259E-07 -1.11835E-07  3.60935E-08
 10.900  2.64189E-06 -1.64422E-06  5.14724E-07 -1.00341E-07  1.17162E-08  2.65556E-06 -1.49622E-06  3.70605E-07 -1.02845E-07  3.24343E-08
 11.000  2.11710E-06 -1.34392E-06  4.38273E-07 -9.27598E-08  1.31097E-08  2.13728E-06 -1.24009E-06  3.30761E-07 -9.33352E-08  2.89277E-08
 11.100  1.68863E-06 -1.09285E-06  3.70463E-07 -8.41048E-08  1.35959E-08  1.71219E-06 -1.02175E-06  2.91210E-07 -8.36534E-08  2.56012E-08
 11.200  1.34019E-06 -8.83805E-07  3.10777E-07 -7.49810E-08  1.34172E-08  1.36485E-06 -8.36568E-07  2.53112E-07 -7.40845E-08  2.24778E-08
 11.300  1.05810E-06 -7.10581E-07  2.58677E-07 -6.58452E-08  1.27728E-08  1.08227E-06 -6.80432E-07  2.17323E-07 -6.48567E-08  1.95757E-08
 11.400  8.30824E-07 -5.67822E-07  2.13601E-07 -5.70306E-08  1.18233E-08  8.53488E-07 -5.49653E-07  1.84421E-07 -5.61447E-08  1.69076E-08
 11.500  6.48682E-07 -4.50874E-07  1.74957E-07 -4.87677E-08  1.06959E-08  6.69229E-07 -4.40892E-07  1.54747E-07 -4.80742E-08  1.44807E-08
 11.600  5.03522E-07 -3.55680E-07  1.42140E-07 -4.12030E-08  9.48843E-09  5.21660E-07 -3.51116E-07  1.28444E-07 -4.07257E-08  1.22969E-08
 11.700  3.88515E-07 -2.78717E-07  1.14534E-07 -3.44161E-08  8.27399E-09  4.04175E-07 -2.77588E-07  1.05496E-07 -3.41411E-08  1.03529E-08
 11.800  2.97950E-07 -2.16928E-07  9.15342E-08 -2.84346E-08  7.10455E-09  3.11216E-07 -2.17847E-07  8.57668E-08 -2.83287E-08  8.64107E-09
 11.900  2.27082E-07 -1.67678E-07  7.25545E-08 -2.32468E-08  6.01498E-09  2.38133E-07 -1.69700E-07  6.90379E-08 -2.32702E-08  7.14979E-09
 12.000  1.71985E-07 -1.28712E-07  5.70411E-08 -1.88130E-08  5.02633E-09  1.81052E-07 -1.31215E-07  5.50365E-08 -1.89269E-08  5.86453E-09
 12.100  1.29429E-07 -9.81122E-08  4.44808E-08 -1.50753E-08  4.14896E-09  1.36768E-07 -1.00705E-07  4.34619E-08 -1.52455E-08  4.76855E-09
 12.200  9.67811E-08 -7.42639E-08  3.44063E-08 -1.19646E-08  3.38520E-09  1.02645E-07 -7.67171E-08  3.40059E-08 -1.21636E-08  3.84380E-09
 12.300  7.19027E-08 -5.58182E-08  2.64004E-08 -9.40716E-09  2.73162E-09  7.65326E-08 -5.80114E-08  2.63678E-08 -9.61411E-09  3.07162E-09
 12.400  5.30741E-08 -4.16598E-08  2.00963E-08 -7.32882E-09  2.18095E-09  5.66889E-08 -4.35439E-08  2.02650E-08 -7.52931E-09  2.43346E-09
 12.500  3.89221E-08 -3.08749E-08  1.51770E-08 -5.65860E-09  1.72356E-09  4.17143E-08 -3.24452E-08  1.54400E-08 -5.84340E-09  1.91140E-09
 12.600  2.83582E-08 -2.27220E-08  1.13724E-08 -4.33071E-09  1.34867E-09  3.04931E-08 -2.39994E-08  1.16639E-08 -4.49476E-09  1.48859E-09
 12.700  2.05272E-08 -1.66054E-08  8.45563E-09 -3.28590E-09  1.04523E-09  2.21436E-08 -1.76237E-08  8.73787E-09 -3.42719E-09  1.14954E-09
 12.800  1.47621E-08 -1.20511E-08  6.23877E-09 -2.47206E-09  8.02522E-10  1.59745E-08 -1.28488E-08  6.49217E-09 -2.59072E-09  8.80286E-10
 12.900  1.05472E-08 -8.68550E-09  4.56820E-09 -1.84431E-09  6.10571E-10  1.14483E-08 -9.30073E-09  4.78471E-09 -1.94184E-09  6.68511E-10
 13.000  7.48696E-09 -6.21677E-09  3.31983E-09 -1.36470E-09  4.60406E-10  8.15073E-09 -6.68476E-09  3.49831E-09 -1.44335E-09  5.03512E-10
 13.100  5.28026E-09 -4.41931E-09  2.39467E-09 -1.00166E-09  3.44153E-10  5.76502E-09 -4.77080E-09  2.53775E-09 -1.06401E-09  3.76150E-10
 13.200  3.69994E-09 -3.12019E-09  1.71461E-09 -7.29350E-10  2.55060E-10  4.05101E-09 -3.38109E-09  1.82674E-09 -7.78014E-10  2.78738E-10
 13.300  2.57593E-09 -2.18808E-09  1.21873E-09 -5.26904E-10  1.87447E-10  2.82809E-09 -2.37961E-09  1.30494E-09 -5.64350E-10  2.04904E-10
 13.400  1.78190E-09 -1.52411E-09  8.60006E-10 -3.77704E-10  1.36624E-10  1.96157E-09 -1.66327E-09  9.25186E-10 -4.06139E-10  1.49436E-10
 13.500  1.22476E-09 -1.05454E-09  6.02531E-10 -2.68684E-10  9.87735E-11  1.35177E-09 -1.15465E-09  6.51086E-10 -2.90009E-10  1.08131E-10
 13.600  8.36475E-10 -7.24799E-10  4.19151E-10 -1.89689E-10  7.08398E-11  9.25569E-10 -7.96140E-10  4.54838E-10 -2.05495E-10  7.76360E-11
 13.700  5.67670E-10 -4.94881E-10  2.89536E-10 -1.32921E-10  5.04065E-11  6.29694E-10 -5.45262E-10  3.15444E-10 -1.44507E-10  5.53135E-11
 13.800  3.82820E-10 -3.35685E-10  1.98612E-10 -9.24550E-11  3.55890E-11  4.25676E-10 -3.70954E-10  2.17206E-10 -1.00858E-10  3.91099E-11
 13.900  2.56543E-10 -2.26218E-10  1.35303E-10 -6.38399E-11  2.49351E-11  2.85938E-10 -2.50699E-10  1.48505E-10 -6.98721E-11  2.74449E-11
 14.000  1.70846E-10 -1.51463E-10  9.15442E-11 -4.37636E-11  1.73386E-11  1.90862E-10 -1.68317E-10  1.00823E-10 -4.80518E-11  1.91157E-11
 14.100  1.13069E-10 -1.00760E-10  6.15183E-11 -2.97869E-11  1.19664E-11  1.26602E-10 -1.12270E-10  6.79772E-11 -3.28066E-11  1.32160E-11
 14.200  7.43682E-11 -6.66020E-11  4.10632E-11 -2.01308E-11  8.19782E-12  8.34528E-11 -7.44013E-11  4.55175E-11 -2.22378E-11  9.07035E-12
 14.300  4.86126E-11 -4.37445E-11  2.72270E-11 -1.35099E-11  5.57514E-12  5.46688E-11 -4.89891E-11  3.02716E-11 -1.49671E-11  6.18005E-12
 14.400  3.15821E-11 -2.85504E-11  1.79337E-11 -9.00380E-12  3.76418E-12  3.55916E-11 -3.20508E-11  1.99969E-11 -1.00029E-11  4.18054E-12
 14.500  2.03928E-11 -1.85171E-11  1.17350E-11 -5.95952E-12  2.52333E-12  2.30293E-11 -2.08361E-11  1.31216E-11 -6.63876E-12  2.80785E-12
 14.600  1.30878E-11 -1.19349E-11  7.62896E-12 -3.91774E-12  1.67957E-12  1.48098E-11 -1.34602E-11  8.55323E-12 -4.37575E-12  1.87260E-12
 14.700  8.34888E-12 -7.64482E-12  4.92759E-12 -2.55815E-12  1.11013E-12  9.46606E-12 -8.64096E-12  5.53886E-12 -2.86449E-12  1.24014E-12
 14.800  5.29381E-12 -4.86669E-12  3.16237E-12 -1.65923E-12  7.28670E-13  6.01383E-12 -5.51269E-12  3.56353E-12 -1.86252E-12  8.15600E-13
 14.900  3.33657E-12 -3.07917E-12  2.01660E-12 -1.06905E-12  4.75001E-13  3.79760E-12 -3.49521E-12  2.27789E-12 -1.20292E-12  5.32711E-13
 15.000  2.09044E-12 -1.93634E-12  1.27783E-12 -6.84276E-13  3.07534E-13  2.38372E-12 -2.20246E-12  1.44676E-12 -7.71760E-13  3.45571E-13
 15.100  1.30194E-12 -1.21030E-12  8.04628E-13 -4.35135E-13  1.97766E-13  1.48731E-12 -1.37938E-12  9.13053E-13 -4.91880E-13  2.22658E-13
 15.200  8.06068E-13 -7.51931E-13  5.03501E-13 -2.74914E-13  1.26326E-13  9.22483E-13 -8.58642E-13  5.72597E-13 -3.11452E-13  1.42501E-13
 15.300  4.96125E-13 -4.64360E-13  3.13118E-13 -1.72574E-13  8.01577E-14  5.68775E-13 -5.31266E-13  3.56842E-13 -1.95929E-13  9.05935E-14
 15.400  3.03572E-13 -2.85059E-13  1.93524E-13 -1.07640E-13  5.05274E-14  3.48624E-13 -3.26735E-13  2.21002E-13 -1.22464E-13  5.72137E-14
 15.500  1.84668E-13 -1.73953E-13  1.18876E-13 -6.67139E-14  3.16419E-14  2.12433E-13 -1.99746E-13  1.36027E-13 -7.60559E-14  3.58961E-14
 15.600  1.11685E-13 -1.05526E-13  7.25786E-14 -4.10884E-14  1.96867E-14  1.28690E-13 -1.21387E-13  8.32110E-14 -4.69351E-14  2.23748E-14
 15.700  6.71548E-14 -6.36393E-14  4.40441E-14 -2.51480E-14  1.21696E-14  7.75060E-14 -7.33313E-14  5.05918E-14 -2.87820E-14  1.38566E-14
 15.800  4.01470E-14 -3.81545E-14  2.65673E-14 -1.52962E-14  7.47471E-15  4.64094E-14 -4.40398E-14  3.05732E-14 -1.75397E-14  8.52622E-15
 15.900  2.38633E-14 -2.27422E-14  1.59296E-14 -9.24650E-15  4.56191E-15  2.76291E-14 -2.62936E-14  1.83644E-14 -1.06222E-14  5.21291E-15
 16.000  1.41033E-14 -1.34771E-14  9.49446E-15 -5.55523E-15  2.76663E-15  1.63541E-14 -1.56069E-14  1.09648E-14 -6.39326E-15  3.16697E-15
 16.100  8.28765E-15 -7.94046E-15  5.62547E-15 -3.31721E-15  1.66734E-15  9.62490E-15 -9.20997E-15  6.50778E-15 -3.82435E-15  1.91191E-15
 16.200  4.84254E-15 -4.65152E-15  3.31348E-15 -1.96882E-15  9.98586E-16  5.63230E-15 -5.40361E-15  3.83957E-15 -2.27372E-15  1.14701E-15
 16.300  2.81355E-15 -2.70927E-15  1.94025E-15 -1.16149E-15  5.94361E-16  3.27721E-15 -3.15214E-15  2.25198E-15 -1.34362E-15  6.83845E-16
 16.400  1.62550E-15 -1.56903E-15  1.12952E-15 -6.81112E-16  3.51589E-16  1.89610E-15 -1.82824E-15  1.31308E-15 -7.89211E-16  4.05190E-16
 16.500  9.33844E-16 -9.03517E-16  6.53738E-16 -3.97032E-16  2.06707E-16  1.09085E-15 -1.05433E-15  7.61163E-16 -4.60785E-16  2.38607E-16
 16.600  5.33493E-16 -5.17346E-16  3.76182E-16 -2.30066E-16  1.20789E-16  6.24056E-16 -6.04572E-16  4.38666E-16 -2.67429E-16  1.39652E-16
 16.700  3.03080E-16 -2.94560E-16  2.15223E-16 -1.32529E-16  7.01558E-17  3.55016E-16 -3.44712E-16  2.51347E-16 -1.54290E-16  8.12394E-17
 16.800  1.71226E-16 -1.66773E-16  1.22430E-16 -7.58949E-17  4.05024E-17  2.00838E-16 -1.95439E-16  1.43188E-16 -8.84903E-17  4.69737E-17
 16.900  9.61992E-17 -9.38949E-17  6.92472E-17 -4.32089E-17  2.32429E-17  1.12986E-16 -1.10185E-16  8.11042E-17 -5.04544E-17  2.69977E-17
 17.000  5.37492E-17 -5.25696E-17  3.89445E-17 -2.44570E-17  1.32589E-17  6.32109E-17 -6.17726E-17  4.56770E-17 -2.85996E-17  1.54239E-17
 17.100  2.98662E-17 -2.92692E-17  2.17785E-17 -1.37630E-17  7.51878E-18  3.51688E-17 -3.44385E-17  2.55787E-17 -1.61172E-17  8.75934E-18
 17.200  1.65044E-17 -1.62061E-17  1.21104E-17 -7.70045E-18  4.23856E-18  1.94593E-17 -1.90930E-17  1.42428E-17 -9.03021E-18  4.94506E-18
 17.300  9.07071E-18 -8.92371E-18  6.69648E-18 -4.28373E-18  2.37539E-18  1.07081E-17 -1.05268E-17  7.88603E-18 -5.03037E-18  2.77528E-18
 17.400  4.95805E-18 -4.88676E-18  3.68215E-18 -2.36942E-18  1.32345E-18  5.86021E-18 -5.77187E-18  4.34189E-18 -2.78615E-18  1.54843E-18
 17.500  2.69535E-18 -2.66141E-18  2.01341E-18 -1.30313E-18  7.33080E-19  3.18964E-18 -3.14734E-18  2.37719E-18 -1.53434E-18  8.58880E-19
 17.600  1.45734E-18 -1.44154E-18  1.09483E-18 -7.12635E-19  4.03715E-19  1.72665E-18 -1.70681E-18  1.29427E-18 -8.40167E-19  4.73636E-19
 17.700  7.83711E-19 -7.76553E-19  5.92046E-19 -3.87517E-19  2.21049E-19  9.29628E-19 -9.20550E-19  7.00759E-19 -4.57450E-19  2.59681E-19
 17.800  4.19185E-19 -4.16057E-19  3.18394E-19 -2.09541E-19  1.20339E-19  4.97806E-19 -4.93787E-19  3.77315E-19 -2.47665E-19  1.41556E-19
 17.900  2.23006E-19 -2.21707E-19  1.70288E-19 -1.12670E-19  6.51379E-20  2.65134E-19 -2.63432E-19  2.02042E-19 -1.33334E-19  7.67216E-20
 18.000  1.18003E-19 -1.17505E-19  9.05776E-20 -6.02453E-20  3.50578E-20  1.40453E-19 -1.39779E-19  1.07594E-19 -7.13805E-20  4.13449E-20
 18.100  6.21079E-20 -6.19431E-20  4.79162E-20 -3.20345E-20  1.87615E-20  7.40054E-20 -7.37673E-20  5.69833E-20 -3.80007E-20  2.21539E-20
 18.200  3.25146E-20 -3.24783E-20  2.52102E-20 -1.69396E-20  9.98376E-21  3.87854E-20 -3.87207E-20  3.00147E-20 -2.01180E-20  1.18035E-20
 18.300  1.69315E-20 -1.69381E-20  1.31920E-20 -8.90809E-21  5.28289E-21  2.02186E-20 -2.02156E-20  1.57236E-20 -1.05917E-20  6.25342E-21
 18.400  8.77010E-21 -8.78642E-21  6.86578E-21 -4.65879E-21  2.77977E-21  1.04838E-20 -1.04978E-20  8.19235E-21 -5.54558E-21  3.29439E-21
 18.500  4.51866E-21 -4.53360E-21  3.55405E-21 -2.42313E-21  1.45451E-21  5.40728E-21 -5.42237E-21  4.24533E-21 -2.88758E-21  1.72581E-21
 18.600  2.31589E-21 -2.32682E-21  1.82986E-21 -1.25343E-21  7.56836E-22  2.77417E-21 -2.78587E-21  2.18811E-21 -1.49532E-21  8.99049E-22
 18.700  1.18068E-21 -1.18789E-21  9.37085E-22 -6.44844E-22  3.91628E-22  1.41576E-21 -1.42371E-21  1.12172E-21 -7.70120E-22  4.65748E-22
 18.800  5.98770E-22 -6.03242E-22  4.77325E-22 -3.29948E-22  2.01530E-22  7.18706E-22 -7.23726E-22  5.71962E-22 -3.94468E-22  2.39942E-22
 18.900  3.02069E-22 -3.04728E-22  2.41840E-22 -1.67912E-22  1.03136E-22  3.62933E-22 -3.65954E-22  2.90084E-22 -2.00956E-22  1.22930E-22
 19.000  1.51592E-22 -1.53124E-22  1.21879E-22 -8.49897E-23  5.24916E-23  1.82313E-22 -1.84071E-22  1.46338E-22 -1.01821E-22  6.26344E-23
 19.100  7.56785E-23 -7.65406E-23  6.10971E-23 -4.27868E-23  2.65698E-23  9.11028E-23 -9.20988E-23  7.34310E-23 -5.13122E-23  3.17379E-23
 19.200  3.75839E-23 -3.80594E-23  3.04657E-23 -2.14249E-23  1.33756E-23  4.52870E-23 -4.58393E-23  3.66515E-23 -2.57195E-23  1.59942E-23
 19.300  1.85682E-23 -1.88260E-23  1.51114E-23 -1.06708E-23  6.69684E-24  2.23948E-23 -2.26957E-23  1.81970E-23 -1.28224E-23  8.01632E-24
 19.400  9.12597E-24 -9.26373E-24  7.45599E-24 -5.28631E-24  3.33478E-24  1.10168E-23 -1.11783E-23  8.98696E-24 -6.35842E-24  3.99595E-24
 19.500  4.46206E-24 -4.53472E-24  3.65950E-24 -2.60491E-24  1.65163E-24  5.39147E-24 -5.47694E-24  4.41503E-24 -3.13621E-24  1.98110E-24
 19.600  2.17041E-24 -2.20829E-24  1.78673E-24 -1.27680E-24  8.13600E-25  2.62485E-24 -2.66954E-24  2.15759E-24 -1.53867E-24  9.76876E-25
 19.700  1.05028E-24 -1.06981E-24  8.67798E-25 -6.22509E-25  3.98630E-25  1.27131E-24 -1.29442E-24  1.04887E-24 -7.50886E-25  4.79101E-25
  67 145 198   0.100
  0.000  6.89263E-02 -3.56864E-16 -4.57967E-16 -9.38195E-16 -5.43586E-16  9.31026E-02 -4.96507E-16 -7.07767E-16 -8.00593E-16  1.43049E-17
  0.100  6.89281E-02  2.80277E-05  8.70556E-09 -7.61394E-12 -1.53062E-15  9.29973E-02  3.80506E-05 -5.10406E-08  1.64265E-11 -4.07690E-15
  0.200  6.89345E-02  1.10234E-04  1.38879E-07 -4.83790E-10  3.70640E-13  9.26870E-02  1.50056E-04 -8.08326E-07  1.04220E-09 -6.35867E-13
  0.300  6.89476E-02  2.41112E-04  6.99547E-07 -5.44487E-09  9.41079E-12  9.21870E-02  3.29687E-04 -4.02283E-06  1.17006E-08 -1.60164E-11
  0.400  6.89710E-02  4.11883E-04  2.19485E-06 -3.00835E-08  9.21146E-11  9.15224E-02  5.66765E-04 -1.24133E-05  6.44227E-08 -1.56796E-10
  0.500  6.90089E-02  6.11062E-04  5.30634E-06 -1.12313E-07  5.34868E-10  9.07256E-02  8.47790E-04 -2.93859E-05  2.39442E-07 -9.11039E-10
  0.600  6.90659E-02  8.25196E-04  1.08659E-05 -3.26667E-07  2.22804E-09  8.98351E-02  1.15665E-03 -5.86774E-05  6.92631E-07 -3.79764E-09
  0.700  6.91460E-02  1.03971E-03  1.98181E-05 -7.98606E-07  7.36826E-09  8.88926E-02  1.47545E-03 -1.03954E-04  1.68237E-06 -1.25677E-08
  0.800  6.92524E-02  1.23980E-03  3.31706E-05 -1.71713E-06  2.05532E-08  8.79406E-02  1.78548E-03 -1.68401E-04  3.59048E-06 -3.50785E-08
  0.900  6.93869E-02  1.41133E-03  5.19345E-05 -3.34369E-06  5.02881E-08  8.70203E-02  2.06818E-03 -2.54336E-04  6.93264E-06 -8.58699E-08
  1.000  6.95493E-02  1.54168E-03  7.70551E-05 -6.01558E-06  1.10856E-07  8.61691E-02  2.30611E-03 -3.62887E-04  1.23549E-05 -1.89348E-07
  1.100  6.97379E-02  1.62041E-03  1.09338E-04 -1.01427E-05  2.24434E-07  8.54188E-02  2.48392E-03 -4.93751E-04  2.06144E-05 -3.83349E-07
  1.200  6.99488E-02  1.63984E-03  1.49374E-04 -1.61966E-05  4.23276E-07  8.47938E-02  2.58909E-03 -6.45061E-04  3.25432E-05 -7.22745E-07
  1.300  7.01764E-02  1.59544E-03  1.97473E-04 -2.46925E-05  7.51745E-07  8.43107E-02  2.61267E-03 -8.13367E-04  4.89983E-05 -1.28265E-06
  1.400  7.04140E-02  1.48595E-03  2.53604E-04 -3.61637E-05  1.26795E-06  8.39771E-02  2.54971E-03 -9.93739E-04  7.07987E-05 -2.16078E-06
  1.500  7.06539E-02  1.31344E-03  3.17361E-04 -5.11309E-05  2.04474E-06  8.37925E-02  2.39955E-03 -1.17998E-03  9.86552E-05 -3.47851E-06
  1.600  7.08879E-02  1.08310E-03  3.87944E-04 -7.00672E-05  3.16987E-06  8.37481E-02  2.16586E-03 -1.36492E-03  1.33098E-04 -5.38019E-06
  1.700  7.11080E-02  8.02868E-04  4.64174E-04 -9.33611E-05  4.74503E-06  8.38282E-02  1.85644E-03 -1.54082E-03  1.74404E-04 -8.03055E-06
  1.800  7.13068E-02  4.83013E-04  5.44521E-04 -1.21281E-04  6.88379E-06  8.40114E-02  1.48286E-03 -1.69977E-03  2.22536E-04 -1.16098E-05
  1.900  7.14779E-02  1.35552E-04  6.27164E-04 -1.53942E-04  9.70811E-06  8.42719E-02  1.05982E-03 -1.83415E-03  2.77095E-04 -1.63068E-05
  2.000  7.16161E-02 -2.26352E-04  7.10068E-04 -1.91279E-04  1.33435E-05  8.45813E-02  6.04439E-04 -1.93709E-03  3.37278E-04 -2.23095E-05
  2.100  7.17178E-02 -5.89038E-04  7.91064E-04 -2.33030E-04  1.79132E-05  8.49104E-02  1.35378E-04 -2.00287E-03  4.01875E-04 -2.97944E-05
  2.200  7.17806E-02 -9.38987E-04  8.67938E-04 -2.78726E-04  2.35304E-05  8.52306E-02 -3.28120E-04 -2.02724E-03  4.69271E-04 -3.89137E-05
  2.300  7.18039E-02 -1.26344E-03  9.38510E-04 -3.27695E-04  3.02906E-05  8.55156E-02 -7.67201E-04 -2.00779E-03  5.37477E-04 -4.97817E-05
  2.400  7.17884E-02 -1.55099E-03  1.00070E-03 -3.79080E-04  3.82632E-05  8.57423E-02 -1.16435E-03 -1.94407E-03  6.04191E-04 -6.24608E-05
  2.500  7.17359E-02 -1.79208E-03  1.05256E-03 -4.31863E-04  4.74827E-05  8.58924E-02 -1.50433E-03 -1.83774E-03  6.66872E-04 -7.69476E-05
  2.600  7.16495E-02 -1.97948E-03  1.09234E-03 -4.84901E-04  5.79418E-05  8.59527E-02 -1.77491E-03 -1.69256E-03  7.22835E-04 -9.31601E-05
  2.700  7.15329E-02 -2.10865E-03  1.11843E-03 -5.36976E-04  6.95854E-05  8.59158E-02 -1.96762E-03 -1.51426E-03  7.69375E-04 -1.10927E-04
  2.800  7.13906E-02 -2.17804E-03  1.12939E-03 -5.86839E-04  8.23074E-05  8.57800E-02 -2.07822E-03 -1.31041E-03  8.03888E-04 -1.29980E-04
  2.900  7.12277E-02 -2.18926E-03  1.12391E-03 -6.33257E-04  9.59507E-05  8.55493E-02 -2.10698E-03 -1.09005E-03  8.24010E-04 -1.49948E-04
  3.000  7.10494E-02 -2.14717E-03  1.10079E-03 -6.75064E-04  1.10310E-04  8.52327E-02 -2.05890E-03 -8.63342E-04  8.27757E-04 -1.70364E-04
  3.100  7.08610E-02 -2.05983E-03  1.05893E-03 -7.11192E-04  1.25138E-04  8.48432E-02 -1.94351E-03 -6.41140E-04  8.13654E-04 -1.90662E-04
  3.200  7.06673E-02 -1.93832E-03  9.97346E-04 -7.40704E-04  1.40158E-04  8.43971E-02 -1.77462E-03 -4.34453E-04  7.80851E-04 -2.10201E-04
  3.300  7.04726E-02 -1.79640E-03  9.15187E-04 -7.62811E-04  1.55073E-04  8.39119E-02 -1.56980E-03 -2.53929E-04  7.29222E-04 -2.28275E-04
  3.400  7.02804E-02 -1.65006E-03  8.11836E-04 -7.76875E-04  1.69583E-04  8.34055E-02 -1.34963E-03 -1.09309E-04  6.59428E-04 -2.44147E-04
  3.500  7.00922E-02 -1.51688E-03  6.87004E-04 -7.82407E-04  1.83396E-04  8.28941E-02 -1.13678E-03 -8.90914E-06  5.72941E-04 -2.57075E-04
  3.600  6.99077E-02 -1.41527E-03  5.40861E-04 -7.79058E-04  1.96243E-04  8.23909E-02 -9.54982E-04  4.08557E-05  4.72030E-04 -2.66353E-04
  3.700  6.97241E-02 -1.36362E-03  3.74184E-04 -7.66608E-04  2.07890E-04  8.19046E-02 -8.27829E-04  3.58630E-05  3.59697E-04 -2.71347E-04
  3.800  6.95354E-02 -1.37930E-03  1.88499E-04 -7.44950E-04  2.18144E-04  8.14381E-02 -7.77540E-04 -2.54282E-05  2.39568E-04 -2.71535E-04
  3.900  6.93324E-02 -1.47772E-03 -1.38042E-05 -7.14088E-04  2.26856E-04  8.09878E-02 -8.23730E-04 -1.41819E-04  1.15741E-04 -2.66547E-04
  4.000  6.91019E-02 -1.67130E-03 -2.29394E-04 -6.74136E-04  2.33920E-04  8.05429E-02 -9.82230E-04 -3.09360E-04 -7.40751E-06 -2.56194E-04
  4.100  6.88275E-02 -1.96864E-03 -4.53988E-04 -6.25328E-04  2.39272E-04  8.00857E-02 -1.26406E-03 -5.21494E-04 -1.25434E-04 -2.40496E-04
  4.200  6.84889E-02 -2.37376E-03 -6.82412E-04 -5.68038E-04  2.42879E-04  7.95919E-02 -1.67460E-03 -7.69355E-04 -2.34060E-04 -2.19693E-04
  4.300  6.80633E-02 -2.88556E-03 -9.08749E-04 -5.02805E-04  2.44734E-04  7.90315E-02 -2.21304E-03 -1.04221E-03 -3.29400E-04 -1.94247E-04
  4.400  6.75256E-02 -3.49756E-03 -1.12656E-03 -4.30356E-04  2.44846E-04  7.83707E-02 -2.87213E-03 -1.32800E-03 -4.08171E-04 -1.64833E-04
  4.500  6.68497E-02 -4.19792E-03 -1.32919E-03 -3.51634E-04  2.43232E-04  7.75731E-02 -3.63831E-03 -1.61403E-03 -4.67870E-04 -1.32309E-04
  4.600  6.60097E-02 -4.96980E-03 -1.51009E-03 -2.67808E-04  2.39917E-04  7.66021E-02 -4.49219E-03 -1.88761E-03 -5.06909E-04 -9.76814E-05
  4.700  6.49813E-02 -5.79202E-03 -1.66321E-03 -1.80278E-04  2.34927E-04  7.54231E-02 -5.40933E-03 -2.13677E-03 -5.24685E-04 -6.20537E-05
  4.800  6.37436E-02 -6.63997E-03 -1.78337E-03 -9.06530E-05  2.28294E-04  7.40056E-02 -6.36143E-03 -2.35087E-03 -5.21599E-04 -2.65722E-05
  4.900  6.22798E-02 -7.48677E-03 -1.86655E-03 -7.18399E-07  2.20061E-04  7.23252E-02 -7.31765E-03 -2.52119E-03 -4.99005E-04  7.63431E-06
  5.000  6.05792E-02 -8.30462E-03 -1.91021E-03  8.76223E-05  2.10287E-04  7.03653E-02 -8.24618E-03 -2.64135E-03 -4.59102E-04  3.95136E-05
  5.100  5.86377E-02 -9.06615E-03 -1.91342E-03  1.72420E-04  1.99057E-04  6.81184E-02 -9.11575E-03 -2.70753E-03 -4.04777E-04  6.81437E-05
  5.200  5.64587E-02 -9.74583E-03 -1.87693E-03  2.51767E-04  1.86487E-04  6.55868E-02 -9.89727E-03 -2.71860E-03 -3.39408E-04  9.27774E-05
  5.300  5.40533E-02 -1.03212E-02 -1.80317E-03  3.23883E-04  1.72733E-04  6.27830E-02 -1.05652E-02 -2.67606E-03 -2.66652E-04  1.12876E-04
  5.400  5.14401E-02 -1.07738E-02 -1.69606E-03  3.87211E-04  1.57988E-04  5.97292E-02 -1.10986E-02 -2.58378E-03 -1.90221E-04  1.28127E-04
  5.500  4.86448E-02 -1.10904E-02 -1.56076E-03  4.40490E-04  1.42485E-04  5.64566E-02 -1.14823E-02 -2.44765E-03 -1.13669E-04  1.38449E-04
  5.600  4.56989E-02 -1.12630E-02 -1.40338E-03  4.82820E-04  1.26492E-04  5.30036E-02 -1.17071E-02 -2.27513E-03 -4.02142E-05  1.43978E-04
  5.700  4.26389E-02 -1.12892E-02 -1.23059E-03  5.13707E-04  1.10301E-04  4.94149E-02 -1.17703E-02 -2.07469E-03  2.74158E-05  1.45048E-04
  5.800  3.95048E-02 -1.11722E-02 -1.04925E-03  5.33074E-04  9.42166E-05  4.57389E-02 -1.16753E-02 -1.85530E-03  8.70818E-05  1.42151E-04
  5.900  3.63379E-02 -1.09201E-02 -8.66013E-04  5.41254E-04  7.85424E-05  4.20259E-02 -1.14308E-02 -1.62586E-03  1.37290E-04  1.35899E-04
  6.000  3.31799E-02 -1.05455E-02 -6.87015E-04  5.38955E-04  6.35676E-05  3.83262E-02 -1.10508E-02 -1.39479E-03  1.77197E-04  1.26977E-04
  6.100  3.00711E-02 -1.00643E-02 -5.17590E-04  5.27207E-04  4.95515E-05  3.46877E-02 -1.05528E-02 -1.16959E-03  2.06577E-04  1.16098E-04
  6.200  2.70485E-02 -9.49522E-03 -3.62075E-04  5.07289E-04  3.67125E-05  3.11548E-02 -9.95733E-03 -9.56562E-04  2.25749E-04  1.03964E-04
  6.300  2.41455E-02 -8.85802E-03 -2.23691E-04  4.80648E-04  2.52186E-05  2.77667E-02 -9.28629E-03 -7.60650E-04  2.35483E-04  9.12229E-05
  6.400  2.13903E-02 -8.17315E-03 -1.04508E-04  4.48818E-04  1.51817E-05  2.45564E-02 -8.56217E-03 -5.85349E-04  2.36884E-04  7.84488E-05
  6.500  1.88055E-02 -7.46052E-03 -5.48709E-06  4.13336E-04  6.65581E-06  2.15500E-02 -7.80688E-03 -4.32741E-04  2.31279E-04  6.61178E-05
  6.600  1.64079E-02 -6.73875E-03  7.34155E-05  3.75672E-04 -3.60815E-07  1.87666E-02 -7.04088E-03 -3.03599E-04  2.20105E-04  5.46000E-05
  6.700  1.42085E-02 -6.02454E-03  1.33099E-04  3.37169E-04 -5.92085E-06  1.62184E-02 -6.28252E-03 -1.97562E-04  2.04805E-04  4.41570E-05
  6.800  1.22126E-02 -5.33223E-03  1.75138E-04  2.98996E-04 -1.01200E-05  1.39107E-02 -5.54752E-03 -1.13351E-04  1.86751E-04  3.49480E-05
  6.900  1.04203E-02 -4.67352E-03  2.01584E-04  2.62123E-04 -1.30874E-05  1.18428E-02 -4.84867E-03 -4.90002E-05  1.67173E-04  2.70410E-05
  7.000  8.82744E-03 -4.05736E-03  2.14780E-04  2.27308E-04 -1.49756E-05  1.00091E-02 -4.19574E-03 -2.09142E-06  1.47122E-04  2.04273E-05
  7.100  7.42592E-03 -3.49004E-03  2.17182E-04  1.95096E-04 -1.59497E-05  8.39934E-03 -3.59555E-03  3.00294E-05  1.27447E-04  1.50387E-05
  7.200  6.20475E-03 -2.97534E-03  2.11210E-04  1.65832E-04 -1.61781E-05  6.99997E-03 -3.05217E-03  5.00625E-05  1.08793E-04  1.07646E-05
  7.300  5.15074E-03 -2.51479E-03  1.99127E-04  1.39689E-04 -1.58243E-05  5.79508E-03 -2.56722E-03  6.06018E-05  9.16065E-05  7.46831E-06
  7.400  4.24932E-03 -2.10806E-03  1.82954E-04  1.16686E-04 -1.50398E-05  4.76720E-03 -2.14024E-03  6.40209E-05  7.61586E-05  5.00120E-06
  7.500  3.48517E-03 -1.75328E-03  1.64418E-04  9.67296E-05 -1.39596E-05  3.89813E-03 -1.76913E-03  6.23984E-05  6.25734E-05  3.21442E-06
  7.600  2.84286E-03 -1.44742E-03  1.44927E-04  7.96356E-05 -1.26994E-05  3.16961E-03 -1.45050E-03  5.74789E-05  5.08567E-05  1.96760E-06
  7.700  2.30731E-03 -1.18663E-03  1.25572E-04  6.51623E-05 -1.13541E-05  2.56392E-03 -1.18012E-03  5.06635E-05  4.09266E-05  1.13486E-06
  7.800  1.86418E-03 -9.66593E-04  1.07147E-04  5.30349E-05 -9.99837E-06  2.06425E-03 -9.53207E-04  4.30254E-05  3.26422E-05  6.08143E-07
  7.900  1.50016E-03 -7.82754E-04  9.01817E-05  4.29662E-05 -8.68752E-06  1.65508E-03 -7.64778E-04  3.53407E-05  2.58273E-05  2.98459E-07
  8.000  1.20310E-03 -6.30565E-04  7.49849E-05  3.46729E-05 -7.45994E-06  1.32229E-03 -6.09858E-04  2.81310E-05  2.02909E-05  1.35431E-07
  8.100  9.62173E-04 -5.05647E-04  6.16879E-05  2.78879E-05 -6.33956E-06  1.05333E-03 -4.83678E-04  2.17098E-05  1.58418E-05  6.56847E-08
  8.200  7.67843E-04 -4.03915E-04  5.02873E-05  2.23671E-05 -5.33861E-06  8.37196E-04 -3.81801E-04  1.62291E-05  1.22997E-05  5.05376E-08
  8.300  6.11856E-04 -3.21651E-04  4.06858E-05  1.78945E-05 -4.46028E-06  6.64385E-04 -3.00209E-04  1.17231E-05  9.50159E-06  6.33728E-08
  8.400  4.87166E-04 -2.55552E-04  3.27253E-05  1.42827E-05 -3.70122E-06  5.26811E-04 -2.35344E-04  8.14594E-06  7.30511E-06  8.70118E-08
  8.500  3.87831E-04 -2.02734E-04  2.62156E-05  1.13729E-05 -3.05366E-06  4.17682E-04 -1.84118E-04  5.40268E-06  5.58936E-06  1.11293E-07
  8.600  3.08905E-04 -1.60727E-04  2.09551E-05  9.03220E-06 -2.50722E-06  3.31359E-04 -1.43898E-04  3.37385E-06  4.25416E-06  1.30989E-07
  8.700  2.46309E-04 -1.27446E-04  1.67466E-05  7.15135E-06 -2.05026E-06  2.63208E-04 -1.12476E-04  1.93297E-06  3.21807E-06  1.44112E-07
  8.800  1.96715E-04 -1.01156E-04  1.34071E-05  5.64120E-06 -1.67091E-06  2.09465E-04 -8.80256E-05  9.58617E-07  2.41588E-06  1.50625E-07
  8.900  1.57433E-04 -8.04309E-05  1.07733E-05  4.42961E-06 -1.35779E-06  1.67094E-04 -6.90585E-05  3.41573E-07  1.79604E-06  1.51510E-07
  9.000  1.26301E-04 -6.41114E-05  8.70489E-06  3.45853E-06 -1.10043E-06  1.33671E-04 -5.43744E-05 -1.15489E-08  1.31813E-06  1.48140E-07
  9.100  1.01598E-04 -5.12636E-05  7.08364E-06  2.68129E-06 -8.89540E-07  1.07269E-04 -4.30160E-05 -1.77368E-07  9.50577E-07  1.41902E-07
  9.200  8.19576E-05 -4.11419E-05  5.81268E-06  2.06042E-06 -7.17045E-07  8.63703E-05 -3.42272E-05 -2.16495E-07  6.68821E-07  1.33987E-07
  9.300  6.63042E-05 -3.31551E-05  4.81386E-06  1.56581E-06 -5.76097E-07  6.97810E-05 -2.74155E-05 -1.75290E-07  4.53735E-07  1.25318E-07
  9.400  5.37908E-05 -2.68372E-05  4.02520E-06  1.17315E-06 -4.60973E-07  5.65684E-05 -2.21202E-05 -8.80770E-08  2.90414E-07  1.16535E-07
  9.500  4.37537E-05 -2.18229E-05  3.39811E-06  8.62830E-07 -3.66956E-07  4.60049E-05 -1.79851E-05  2.05800E-08  1.67234E-07  1.08039E-07
  9.600  3.56736E-05 -1.78266E-05  2.89492E-06  6.18963E-07 -2.90190E-07  3.75240E-05 -1.47366E-05  1.33755E-07  7.51253E-08  1.00042E-07
  9.700  2.91442E-05 -1.46262E-05  2.48665E-06  4.28660E-07 -2.27547E-07  3.06854E-05 -1.21655E-05  2.40330E-07  7.02493E-09  9.26225E-08
  9.800  2.38480E-05 -1.20489E-05  2.15116E-06  2.81457E-07 -1.76496E-07  2.51464E-05 -1.01125E-05  3.33493E-07 -4.25536E-08  8.57742E-08
  9.900  1.95363E-05 -9.96110E-06  1.87163E-06  1.68854E-07 -1.34991E-07  2.06406E-05 -8.45699E-06  4.09556E-07 -7.78538E-08  7.94438E-08
 10.000  1.60139E-05 -8.25913E-06  1.63537E-06  8.39499E-08 -1.01373E-07  1.69599E-05 -7.10769E-06  4.67046E-07 -1.02143E-07  7.35580E-08
 10.100  1.31276E-05 -6.86296E-06  1.43283E-06  2.11396E-08 -7.42936E-08  1.39420E-05 -5.99608E-06  5.06034E-07 -1.17928E-07  6.80422E-08
 10.200  1.07563E-05 -5.71069E-06  1.25693E-06 -2.41274E-08 -5.26441E-08  1.14593E-05 -5.07067E-06  5.27632E-07 -1.27131E-07  6.28299E-08
 10.300  8.80411E-06 -4.75441E-06  1.10241E-06 -5.55468E-08 -3.55089E-08  9.41156E-06 -4.29292E-06  5.33625E-07 -1.31232E-07  5.78688E-08
 10.400  7.19477E-06 -3.95696E-06  9.65422E-07 -7.61210E-08 -2.21232E-08  7.71912E-06 -3.63397E-06  5.26193E-07 -1.31378E-07  5.31212E-08
 10.500  5.86709E-06 -3.28940E-06  8.43180E-07 -8.82913E-08 -1.18433E-08  6.31865E-06 -3.07212E-06  5.07707E-07 -1.28478E-07  4.85640E-08
 10.600  4.77179E-06 -2.72904E-06  7.33663E-07 -9.40429E-08 -4.12251E-09  5.15928E-06 -2.59093E-06  4.80570E-07 -1.23262E-07  4.41865E-08
 10.700  3.86886E-06 -2.25794E-06  6.35408E-07 -9.49892E-08  1.50543E-09  4.19987E-06 -2.17785E-06  4.47097E-07 -1.16332E-07  3.99878E-08
 10.800  3.12560E-06 -1.86177E-06  5.47335E-07 -9.24385E-08  5.43966E-09  3.40684E-06 -1.82303E-06  4.09428E-07 -1.08193E-07  3.59742E-08
 10.900  2.51508E-06 -1.52890E-06  4.68618E-07 -8.74466E-08  8.02175E-09  2.75262E-06 -1.51862E-06  3.69467E-07 -9.92746E-08  3.21568E-08
 11.000  2.01501E-06 -1.24979E-06  3.98584E-07 -8.08588E-08  9.54307E-09  2.21434E-06 -1.25819E-06  3.28844E-07 -8.99435E-08  2.85490E-08
 11.100  1.60681E-06 -1.01645E-06  3.36641E-07 -7.33437E-08  1.02505E-08  1.77293E-06 -1.03626E-06  2.88894E-07 -8.05090E-08  2.51645E-08
 11.200  1.27490E-06 -8.22162E-07  2.82237E-07 -6.54205E-08  1.03514E-08  1.41236E-06 -8.48098E-07  2.50664E-07 -7.12278E-08  2.20156E-08
 11.300  1.00625E-06 -6.61140E-07  2.34826E-07 -5.74829E-08  1.00173E-08  1.11916E-06 -6.89517E-07  2.14918E-07 -6.23063E-08  1.91118E-08
 11.400  7.89852E-07 -5.28409E-07  1.93854E-07 -4.98188E-08  9.38841E-09  8.81896E-07 -5.56744E-07  1.82170E-07 -5.39030E-08  1.64592E-08
 11.500  6.16469E-07 -4.19647E-07  1.58759E-07 -4.26283E-08  8.57647E-09  6.90933E-07 -4.46370E-07  1.52712E-07 -4.61315E-08  1.40595E-08
 11.600  4.78328E-07 -3.31093E-07  1.28971E-07 -3.60396E-08  7.66879E-09  5.38107E-07 -3.55304E-07  1.26654E-07 -3.90641E-08  1.19104E-08
 11.700  3.68916E-07 -2.59479E-07  1.03921E-07 -3.01230E-08  6.73137E-09  4.16534E-07 -2.80754E-07  1.03954E-07 -3.27373E-08  1.00053E-08
 11.800  2.82788E-07 -2.01969E-07  8.30554E-08 -2.49037E-08  5.81221E-09  3.20426E-07 -2.20212E-07  8.44630E-08 -2.71565E-08  8.33380E-09
 11.900  2.15419E-07 -1.56121E-07  6.58377E-08 -2.03729E-08  4.94439E-09  2.44937E-07 -1.71446E-07  6.79526E-08 -2.23022E-08  6.88244E-09
 12.000  1.63063E-07 -1.19840E-07  5.17643E-08 -1.64973E-08  4.14887E-09  1.86035E-07 -1.32487E-07  5.41455E-08 -1.81360E-08  5.63526E-09
 12.100  1.22646E-07 -9.13451E-08  4.03690E-08 -1.32273E-08  3.43714E-09  1.40384E-07 -1.01619E-07  4.27395E-08 -1.46058E-08  4.57458E-09
 12.200  9.16533E-08 -6.91350E-08  3.12281E-08 -1.05037E-08  2.81343E-09  1.05246E-07 -7.73639E-08  3.34268E-08 -1.16514E-08  3.68176E-09
 12.300  6.80497E-08 -5.19560E-08  2.39632E-08 -8.26279E-09  2.27674E-09  7.83863E-08 -5.84618E-08  2.59084E-08 -9.20787E-09  2.93789E-09
 12.400  5.01966E-08 -3.87700E-08  1.82419E-08 -6.44039E-09  1.82241E-09  5.79974E-08 -4.38519E-08  1.99042E-08 -7.21011E-09  2.32436E-09
 12.500  3.67861E-08 -2.87265E-08  1.37769E-08 -4.97486E-09  1.44351E-09  4.26290E-08 -3.26516E-08  1.51592E-08 -5.59486E-09  1.82339E-09
 12.600  2.67824E-08 -2.11351E-08  1.03232E-08 -3.80898E-09  1.13187E-09  3.11261E-08 -2.41344E-08  1.14473E-08 -4.30292E-09  1.41834E-09
 12.700  1.93719E-08 -1.54408E-08  7.67530E-09 -2.89111E-09  8.78837E-10  2.25771E-08 -1.77095E-08  8.57219E-09 -3.28040E-09  1.09404E-09
 12.800  1.39204E-08 -1.12019E-08  5.66268E-09 -2.17577E-09  6.75899E-10  1.62682E-08 -1.29013E-08  6.36648E-09 -2.47935E-09  8.36886E-10
 12.900  9.93776E-09 -8.07013E-09  4.14598E-09 -1.62374E-09  5.15018E-10  1.16450E-08 -9.33135E-09  4.69011E-09 -1.85802E-09  6.34900E-10
 13.000  7.04842E-09 -5.77374E-09  3.01262E-09 -1.20179E-09  3.88889E-10  8.28089E-09 -6.70129E-09  3.42765E-09 -1.38078E-09  4.77729E-10
 13.100  4.96669E-09 -4.10239E-09  2.17273E-09 -8.82277E-10  2.91057E-10  5.85005E-09 -4.77859E-09  2.48537E-09 -1.01767E-09  3.56555E-10
 13.200  3.47714E-09 -2.89492E-09  1.55539E-09 -6.42534E-10  2.15953E-10  4.10578E-09 -3.38371E-09  1.78820E-09 -7.43962E-10  2.63980E-10
 13.300  2.41861E-09 -2.02897E-09  1.10531E-09 -4.64248E-10  1.58869E-10  2.86284E-09 -2.37937E-09  1.27678E-09 -5.39517E-10  1.93887E-10
 13.400  1.67152E-09 -1.41244E-09  7.79766E-10 -3.32822E-10  1.15901E-10  1.98323E-09 -1.66161E-09  9.04759E-10 -3.88165E-10  1.41284E-10
 13.500  1.14780E-09 -9.76656E-10  5.46151E-10 -2.36770E-10  8.38615E-11  1.36502E-09 -1.15244E-09  6.36373E-10 -2.77096E-10  1.02149E-10
 13.600  7.83144E-10 -6.70823E-10  3.79805E-10 -1.67162E-10  6.01898E-11  9.33473E-10 -7.93879E-10  4.44315E-10 -1.96285E-10  7.32831E-11
 13.700  5.30948E-10 -4.57708E-10  2.62261E-10 -1.17133E-10  4.28569E-11  6.34277E-10 -5.43197E-10  3.07970E-10 -1.37985E-10  5.21719E-11
 13.800  3.57692E-10 -3.10244E-10  1.79831E-10 -8.14691E-11  3.02765E-11  4.28235E-10 -3.69191E-10  2.11933E-10 -9.62722E-11  3.68608E-11
 13.900  2.39455E-10 -2.08915E-10  1.22455E-10 -5.62490E-11  2.12239E-11  2.87293E-10 -2.49262E-10  1.44810E-10 -6.66707E-11  2.58474E-11
 14.000  1.59299E-10 -1.39767E-10  8.28131E-11 -3.85549E-11  1.47647E-11  1.91523E-10 -1.67184E-10  9.82518E-11 -4.58321E-11  1.79898E-11
 14.100  1.05313E-10 -9.29033E-11  5.56233E-11 -2.62374E-11  1.01940E-11  1.26877E-10 -1.11401E-10  6.61995E-11 -3.12781E-11  1.24286E-11
 14.200  6.91916E-11 -6.13569E-11  3.71087E-11 -1.77284E-11  6.98590E-12  8.35265E-11 -7.37490E-11  4.42968E-11 -2.11925E-11  8.52385E-12
 14.300  4.51786E-11 -4.02644E-11  2.45912E-11 -1.18949E-11  4.75225E-12  5.46462E-11 -4.85085E-11  2.94390E-11 -1.42569E-11  5.80355E-12
 14.400  2.93181E-11 -2.62555E-11  1.61880E-11 -7.92532E-12  3.20929E-12  3.55306E-11 -3.17025E-11  1.94327E-11 -9.52363E-12  3.92306E-12
 14.500  1.89093E-11 -1.70129E-11  1.05861E-11 -5.24410E-12  2.15172E-12  2.29597E-11 -2.05874E-11  1.27417E-11 -6.31747E-12  2.63304E-12
 14.600  1.21217E-11 -1.09550E-11  6.87758E-12 -3.44628E-12  1.43239E-12  1.47456E-11 -1.32849E-11  8.29920E-12 -4.16176E-12  1.75476E-12
 14.700  7.72345E-12 -7.01034E-12  4.43925E-12 -2.24947E-12  9.46820E-13  9.41251E-12 -8.51891E-12  5.37008E-12 -2.72290E-12  1.16127E-12
 14.800  4.89140E-12 -4.45833E-12  2.84695E-12 -1.45844E-12  6.21490E-13  5.97184E-12 -5.42869E-12  3.45211E-12 -1.76943E-12  7.63183E-13
 14.900  3.07922E-12 -2.81793E-12  1.81412E-12 -9.39279E-13  4.05125E-13  3.76602E-12 -3.43802E-12  2.20481E-12 -1.14211E-12  4.98113E-13
 15.000  1.92685E-12 -1.77021E-12  1.14866E-12 -6.00933E-13  2.62277E-13  2.36071E-12 -2.16391E-12  1.39915E-12 -7.32290E-13  3.22891E-13
 15.100  1.19857E-12 -1.10528E-12  7.22716E-13 -3.81948E-13  1.68645E-13  1.47095E-12 -1.35364E-12  8.82224E-13 -4.66421E-13  2.07892E-13
 15.200  7.41136E-13 -6.85945E-13  4.51875E-13 -2.41186E-13  1.07710E-13  9.11093E-13 -8.41623E-13  5.52764E-13 -2.95134E-13  1.32951E-13
 15.300  4.55582E-13 -4.23142E-13  2.80776E-13 -1.51318E-13  6.83323E-14  5.60980E-13 -5.20110E-13  3.44164E-13 -1.85535E-13  8.44589E-14
 15.400  2.78406E-13 -2.59464E-13  1.73384E-13 -9.43273E-14  4.30638E-14  3.43372E-13 -3.19485E-13  2.12948E-13 -1.15884E-13  5.32987E-14
 15.500  1.69140E-13 -1.58153E-13  1.06410E-13 -5.84272E-14  2.69610E-14  2.08942E-13 -1.95074E-13  1.30944E-13 -7.19164E-14  3.34140E-14
 15.600  1.02159E-13 -9.58293E-14  6.49080E-14 -3.59619E-14  1.67694E-14  1.26398E-13 -1.18400E-13  8.00227E-14 -4.43469E-14  2.08113E-14
 15.700  6.13460E-14 -5.77234E-14  3.93521E-14 -2.19957E-14  1.03629E-14  7.60185E-14 -7.14371E-14  4.86046E-14 -2.71735E-14  1.28780E-14
 15.800  3.66252E-14 -3.45662E-14  2.37143E-14 -1.33696E-14  6.36270E-15  4.54542E-14 -4.28477E-14  2.93422E-14 -1.65461E-14  7.91769E-15
 15.900  2.17405E-14 -2.05782E-14  1.42049E-14 -8.07606E-15  3.88170E-15  2.70219E-14 -2.55491E-14  1.76066E-14 -1.00123E-14  4.83688E-15
 16.000  1.28312E-14 -1.21796E-14  8.45794E-15 -4.84843E-15  2.35310E-15  1.59718E-14 -1.51453E-14  1.05012E-14 -6.02103E-15  2.93607E-15
 16.100  7.52971E-15 -7.16703E-15  5.00617E-15 -2.89293E-15  1.41747E-15  9.38634E-15 -8.92587E-15  6.22588E-15 -3.59855E-15  1.77101E-15
 16.200  4.39354E-15 -4.19311E-15  2.94559E-15 -1.71564E-15  8.48520E-16  5.48473E-15 -5.22999E-15  3.66921E-15 -2.13757E-15  1.06156E-15
 16.300  2.54909E-15 -2.43913E-15  1.72298E-15 -1.01130E-15  5.04778E-16  3.18668E-15 -3.04678E-15  2.14966E-15 -1.26202E-15  6.32348E-16
 16.400  1.47062E-15 -1.41073E-15  1.00194E-15 -5.92536E-16  2.98433E-16  1.84101E-15 -1.76475E-15  1.25200E-15 -7.40586E-16  3.74343E-16
 16.500  8.43657E-16 -8.11291E-16  5.79247E-16 -3.45099E-16  1.75354E-16  1.05759E-15 -1.01633E-15  7.24918E-16 -4.31983E-16  2.20242E-16
 16.600  4.81274E-16 -4.63918E-16  3.32939E-16 -1.99794E-16  1.02405E-16  6.04132E-16 -5.81981E-16  4.17288E-16 -2.50469E-16  1.28785E-16
 16.700  2.73016E-16 -2.63783E-16  1.90262E-16 -1.14985E-16  5.94404E-17  3.43167E-16 -3.31371E-16  2.38813E-16 -1.44361E-16  7.48476E-17
 16.800  1.54015E-16 -1.49143E-16  1.08103E-16 -6.57863E-17  3.42933E-17  1.93842E-16 -1.87612E-16  1.35884E-16 -8.27122E-17  4.32367E-17
 16.900  8.64012E-17 -8.38529E-17  6.10709E-17 -3.74177E-17  1.96662E-17  1.08885E-16 -1.05623E-16  7.68730E-17 -4.71112E-17  2.48258E-17
 17.000  4.82027E-17 -4.68816E-17  3.43044E-17 -2.11582E-17  1.12105E-17  6.08240E-17 -5.91307E-17  4.32403E-17 -2.66764E-17  1.41692E-17
 17.100  2.67438E-17 -2.60654E-17  1.91600E-17 -1.18946E-17  6.35242E-18  3.37889E-17 -3.29183E-17  2.41837E-17 -1.50172E-17  8.03874E-18
 17.200  1.47565E-17 -1.44115E-17  1.06410E-17 -6.64823E-18  3.57829E-18  1.86669E-17 -1.82237E-17  1.34489E-17 -8.40475E-18  4.53364E-18
 17.300  8.09767E-18 -7.92412E-18  5.87649E-18 -3.69450E-18  2.00376E-18  1.02561E-17 -1.00328E-17  7.43688E-18 -4.67675E-18  2.54176E-18
 17.400  4.41935E-18 -4.33304E-18  3.22710E-18 -2.04131E-18  1.11548E-18  5.60408E-18 -5.49292E-18  4.08924E-18 -2.58736E-18  1.41665E-18
 17.500  2.39876E-18 -2.35638E-18  1.76228E-18 -1.12145E-18  6.17357E-19  3.04544E-18 -2.99078E-18  2.23591E-18 -1.42324E-18  7.84952E-19
 17.600  1.29495E-18 -1.27442E-18  9.57007E-19 -6.12595E-19  3.39689E-19  1.64599E-18 -1.61948E-18  1.21572E-18 -7.78418E-19  4.32401E-19
 17.700  6.95281E-19 -6.85497E-19  5.16821E-19 -3.32739E-19  1.85826E-19  8.84786E-19 -8.72130E-19  6.57338E-19 -4.23326E-19  2.36813E-19
 17.800  3.71295E-19 -3.66716E-19  2.77562E-19 -1.79713E-19  1.01070E-19  4.73036E-19 -4.67102E-19  3.53452E-19 -2.28915E-19  1.28946E-19
 17.900  1.97212E-19 -1.95116E-19  1.48245E-19 -9.65182E-20  5.46565E-20  2.51535E-19 -2.48814E-19  1.89001E-19 -1.23089E-19  6.98087E-20
 18.000  1.04186E-19 -1.03252E-19  7.87431E-20 -5.15469E-20  2.93882E-20  1.33033E-19 -1.31818E-19  1.00508E-19 -6.58142E-20  3.75765E-20
 18.100  5.47464E-20 -5.43451E-20  4.15969E-20 -2.73759E-20  1.57118E-20  6.99816E-20 -6.94578E-20  5.31555E-20 -3.49933E-20  2.01113E-20
 18.200  2.86138E-20 -2.84498E-20  2.18542E-20 -1.44583E-20  8.35243E-21  3.66164E-20 -3.64014E-20  2.79584E-20 -1.85022E-20  1.07026E-20
 18.300  1.48757E-20 -1.48137E-20  1.14194E-20 -7.59371E-21  4.41510E-21  1.90565E-20 -1.89747E-20  1.46252E-20 -9.72847E-21  5.66339E-21
 18.400  7.69243E-21 -7.67216E-21  5.93458E-21 -3.96633E-21  2.32070E-21  9.86483E-21 -9.83775E-21  7.60896E-21 -5.08693E-21  2.97994E-21
 18.500  3.95678E-21 -3.95230E-21  3.06749E-21 -2.06030E-21  1.21299E-21  5.07952E-21 -5.07327E-21  3.93720E-21 -2.64525E-21  1.55917E-21
 18.600  2.02450E-21 -2.02519E-21  1.57700E-21 -1.06435E-21  6.30473E-22  2.60164E-21 -2.60230E-21  2.02627E-21 -1.36799E-21  8.11228E-22
 18.700  1.03038E-21 -1.03221E-21  8.06378E-22 -5.46843E-22  3.25875E-22  1.32546E-21 -1.32773E-21  1.03719E-21 -7.03585E-22  4.19724E-22
 18.800  5.21655E-22 -5.23322E-22  4.10122E-22 -2.79427E-22  1.67503E-22  6.71726E-22 -6.73830E-22  5.28060E-22 -3.59891E-22  2.15956E-22
 18.900  2.62714E-22 -2.63918E-22  2.07473E-22 -1.42007E-22  8.56222E-23  3.38629E-22 -3.40162E-22  2.67407E-22 -1.83086E-22  1.10498E-22
 19.000  1.31614E-22 -1.32396E-22  1.04397E-22 -7.17788E-23  4.35264E-23  1.69812E-22 -1.70813E-22  1.34690E-22 -9.26355E-23  5.62266E-23
 19.100  6.55906E-23 -6.60679E-23  5.22517E-23 -3.60854E-23  2.20054E-23  8.47091E-23 -8.53224E-23  6.74807E-23 -4.66168E-23  2.84533E-23
 19.200  3.25170E-23 -3.27962E-23  2.60138E-23 -1.80436E-23  1.10642E-23  4.20354E-23 -4.23951E-23  3.36285E-23 -2.33324E-23  1.43197E-23
 19.300  1.60366E-23 -1.61949E-23  1.28826E-23 -8.97386E-24  5.53272E-24  2.07505E-23 -2.09548E-23  1.66697E-23 -1.16154E-23  7.16733E-24
 19.400  7.86776E-24 -7.95533E-24  6.34612E-24 -4.43920E-24  2.75162E-24  1.01900E-23 -1.03032E-23  8.21946E-24 -5.75137E-24  3.56785E-24
 19.500  3.84001E-24 -3.88749E-24  3.10971E-24 -2.18427E-24  1.36106E-24  4.97800E-24 -5.03951E-24  4.03146E-24 -2.83257E-24  1.76640E-24
 19.600  1.86449E-24 -1.88981E-24  1.51581E-24 -1.06903E-24  6.69591E-25  2.41924E-24 -2.45208E-24  1.96693E-24 -1.38761E-24  8.69787E-25
 19.700  9.00610E-25 -9.13914E-25  7.35001E-25 -5.20430E-25  3.27639E-25  1.16963E-24 -1.18691E-24  9.54619E-25 -6.76137E-25  4.25975E-25
  67 146 198   0.100
  0.000  6.75221E-02 -3.41348E-16 -5.51642E-16 -5.75426E-16 -7.00940E-16  9.32970E-02 -4.96507E-16 -6.24500E-16 -1.27595E-15 -7.43855E-16
  0.100  6.75298E-02  2.60706E-05  8.65521E-09 -6.47760E-12  1.71659E-16  9.31888E-02  4.17344E-05 -5.59779E-08  1.73034E-11 -6.36568E-15
  0.200  6.75537E-02  1.02537E-04  1.38021E-07 -4.11535E-10  3.17283E-13  9.28699E-02  1.64615E-04 -8.86661E-07  1.09787E-09 -8.34462E-13
  0.300  6.75955E-02  2.24280E-04  6.94763E-07 -4.63153E-09  8.07202E-12  9.23562E-02  3.61796E-04 -4.41387E-06  1.23255E-08 -2.10996E-11
  0.400  6.76580E-02  3.83139E-04  2.17785E-06 -2.55885E-08  7.90393E-11  9.16735E-02  6.22263E-04 -1.36251E-05  6.78632E-08 -2.06679E-10
  0.500  6.77445E-02  5.68442E-04  5.25920E-06 -9.55258E-08  4.59317E-10  9.08554E-02  9.31407E-04 -3.22707E-05  2.52228E-07 -1.20165E-09
  0.600  6.78581E-02  7.67694E-04  1.07546E-05 -2.77820E-07  1.91521E-09  8.99414E-02  1.27179E-03 -6.44772E-05  7.29606E-07 -5.01292E-09
  0.700  6.80015E-02  9.67365E-04  1.95841E-05 -6.79124E-07  6.34135E-09  8.89747E-02  1.62404E-03 -1.14313E-04  1.77215E-06 -1.66044E-08
  0.800  6.81763E-02  1.15373E-03  3.27211E-05 -1.46005E-06  1.77144E-08  8.79991E-02  1.96788E-03 -1.85342E-04  3.78195E-06 -4.63930E-08
  0.900  6.83826E-02  1.31369E-03  5.11310E-05 -2.84268E-06  4.34165E-08  8.70572E-02  2.28321E-03 -2.80204E-04  7.30198E-06 -1.13695E-07
  1.000  6.86188E-02  1.43556E-03  7.57028E-05 -5.11330E-06  9.58982E-08  8.61875E-02  2.55112E-03 -4.00255E-04  1.30123E-05 -2.51014E-07
  1.100  6.88813E-02  1.50969E-03  1.07175E-04 -8.61943E-06  1.94592E-07  8.54227E-02  2.75491E-03 -5.45306E-04  2.17091E-05 -5.08874E-07
  1.200  6.91648E-02  1.52901E-03  1.46065E-04 -1.37603E-05  3.67933E-07  8.47881E-02  2.88098E-03 -7.13467E-04  3.42670E-05 -9.60768E-07
  1.300  6.94625E-02  1.48935E-03  1.92603E-04 -2.09710E-05  6.55311E-07  8.43006E-02  2.91955E-03 -9.01119E-04  5.15850E-05 -1.70765E-06
  1.400  6.97663E-02  1.38961E-03  2.46678E-04 -3.07003E-05  1.10873E-06  8.39683E-02  2.86513E-03 -1.10301E-03  7.45201E-05 -2.88134E-06
  1.500  7.00675E-02  1.23172E-03  3.07811E-04 -4.33835E-05  1.79396E-06  8.37902E-02  2.71689E-03 -1.31249E-03  1.03812E-04 -4.64633E-06
  1.600  7.03574E-02  1.02051E-03  3.75140E-04 -5.94123E-05  2.79096E-06  8.37575E-02  2.47865E-03 -1.52179E-03  1.40005E-04 -7.19929E-06
  1.700  7.06273E-02  7.63334E-04  4.47439E-04 -7.91027E-05  4.19330E-06  8.38539E-02  2.15870E-03 -1.72248E-03  1.83374E-04 -1.07661E-05
  1.800  7.08696E-02  4.69690E-04  5.23156E-04 -1.02664E-04  6.10641E-06  8.40571E-02  1.76936E-03 -1.90590E-03  2.33854E-04 -1.55960E-05
  1.900  7.10779E-02  1.50664E-04  6.00479E-04 -1.30169E-04  8.64450E-06  8.43406E-02  1.32638E-03 -2.06361E-03  2.90989E-04 -2.19528E-05
  2.000  7.12471E-02 -1.81615E-04  6.77415E-04 -1.61537E-04  1.19259E-05  8.46752E-02  8.48075E-04 -2.18794E-03  3.53893E-04 -3.01038E-05
  2.100  7.13739E-02 -5.14575E-04  7.51877E-04 -1.96513E-04  1.60672E-05  8.50308E-02  3.54439E-04 -2.27239E-03  4.21235E-04 -4.03057E-05
  2.200  7.14565E-02 -8.35785E-04  8.21771E-04 -2.34668E-04  2.11754E-05  8.53779E-02 -1.33909E-04 -2.31205E-03  4.91251E-04 -5.27890E-05
  2.300  7.14949E-02 -1.13352E-03  8.85079E-04 -2.75405E-04  2.73395E-05  8.56896E-02 -5.96763E-04 -2.30388E-03  5.61770E-04 -6.77406E-05
  2.400  7.14905E-02 -1.39730E-03  9.39919E-04 -3.17978E-04  3.46213E-05  8.59421E-02 -1.01536E-03 -2.24700E-03  6.30278E-04 -8.52868E-05
  2.500  7.14458E-02 -1.61834E-03  9.84584E-04 -3.61519E-04  4.30465E-05  8.61168E-02 -1.37335E-03 -2.14278E-03  6.93999E-04 -1.05475E-04
  2.600  7.13648E-02 -1.79000E-03  1.01756E-03 -4.05079E-04  5.25958E-05  8.62003E-02 -1.65763E-03 -1.99486E-03  7.50000E-04 -1.28259E-04
  2.700  7.12521E-02 -1.90809E-03  1.03752E-03 -4.47670E-04  6.31993E-05  8.61852E-02 -1.85906E-03 -1.80907E-03  7.95313E-04 -1.53482E-04
  2.800  7.11129E-02 -1.97116E-03  1.04327E-03 -4.88315E-04  7.47325E-05  8.60700E-02 -1.97299E-03 -1.59321E-03  8.27078E-04 -1.80868E-04
  2.900  7.09529E-02 -1.98066E-03  1.03376E-03 -5.26089E-04  8.70168E-05  8.58591E-02 -1.99955E-03 -1.35679E-03  8.42684E-04 -2.10014E-04
  3.000  7.07783E-02 -1.94102E-03  1.00799E-03 -5.60162E-04  9.98238E-05  8.55620E-02 -1.94380E-03 -1.11058E-03  8.39925E-04 -2.40390E-04
  3.100  7.05947E-02 -1.85964E-03  9.64990E-04 -5.89827E-04  1.12884E-04  8.51925E-02 -1.81558E-03 -8.66171E-04  8.17141E-04 -2.71342E-04
  3.200  7.04079E-02 -1.74671E-03  9.03847E-04 -6.14515E-04  1.25900E-04  8.47675E-02 -1.62915E-03 -6.35457E-04  7.73345E-04 -3.02105E-04
  3.300  7.02225E-02 -1.61492E-03  8.23691E-04 -6.33802E-04  1.38563E-04  8.43053E-02 -1.40266E-03 -4.30040E-04  7.08335E-04 -3.31820E-04
  3.400  7.00422E-02 -1.47906E-03  7.23773E-04 -6.47395E-04  1.50568E-04  8.38247E-02 -1.15733E-03 -2.60667E-04  6.22762E-04 -3.59564E-04
  3.500  6.98692E-02 -1.35546E-03  6.03564E-04 -6.55111E-04  1.61637E-04  8.33426E-02 -9.16553E-04 -1.36673E-04  5.18173E-04 -3.84381E-04
  3.600  6.97032E-02 -1.26127E-03  4.62888E-04 -6.56850E-04  1.71532E-04  8.28727E-02 -7.04735E-04 -6.54635E-05  3.96993E-04 -4.05323E-04
  3.700  6.95415E-02 -1.21368E-03  3.02074E-04 -6.52559E-04  1.80069E-04  8.24241E-02 -5.46125E-04 -5.20907E-05  2.62468E-04 -4.21493E-04
  3.800  6.93780E-02 -1.22905E-03  1.22118E-04 -6.42207E-04  1.87129E-04  8.19998E-02 -4.63554E-04 -9.89237E-05  1.18557E-04 -4.32091E-04
  3.900  6.92034E-02 -1.32192E-03 -7.51761E-05 -6.25759E-04  1.92658E-04  8.15962E-02 -4.77181E-04 -2.05460E-04 -3.02297E-05 -4.36462E-04
  4.000  6.90042E-02 -1.50415E-03 -2.87089E-04 -6.03173E-04  1.96667E-04  8.12020E-02 -6.03329E-04 -3.68283E-04 -1.79024E-04 -4.34133E-04
  4.100  6.87633E-02 -1.78409E-03 -5.09935E-04 -5.74400E-04  1.99222E-04  8.07989E-02 -8.53456E-04 -5.81185E-04 -3.22833E-04 -4.24856E-04
  4.200  6.84600E-02 -2.16577E-03 -7.39086E-04 -5.39407E-04  2.00428E-04  8.03614E-02 -1.23335E-03 -8.35444E-04 -4.56780E-04 -4.08628E-04
  4.300  6.80707E-02 -2.64850E-03 -9.69076E-04 -4.98216E-04  2.00421E-04  7.98583E-02 -1.74256E-03 -1.12026E-03 -5.76358E-04 -3.85707E-04
  4.400  6.75693E-02 -3.22649E-03 -1.19379E-03 -4.50939E-04  1.99340E-04  7.92542E-02 -2.37424E-03 -1.42330E-03 -6.77660E-04 -3.56614E-04
  4.500  6.69290E-02 -3.88889E-03 -1.40672E-03 -3.97832E-04  1.97319E-04  7.85111E-02 -3.11519E-03 -1.73137E-03 -7.57581E-04 -3.22115E-04
  4.600  6.61228E-02 -4.62006E-03 -1.60131E-03 -3.39337E-04  1.94469E-04  7.75906E-02 -3.94639E-03 -2.03109E-03 -8.13974E-04 -2.83191E-04
  4.700  6.51256E-02 -5.40021E-03 -1.77129E-03 -2.76116E-04  1.90871E-04  7.64563E-02 -4.84381E-03 -2.30965E-03 -8.45756E-04 -2.40998E-04
  4.800  6.39155E-02 -6.20620E-03 -1.91107E-03 -2.09070E-04  1.86570E-04  7.50761E-02 -5.77953E-03 -2.55542E-03 -8.52937E-04 -1.96807E-04
  4.900  6.24750E-02 -7.01266E-03 -2.01608E-03 -1.39337E-04  1.81581E-04  7.34241E-02 -6.72309E-03 -2.75861E-03 -8.36592E-04 -1.51948E-04
  5.000  6.07927E-02 -7.79322E-03 -2.08302E-03 -6.82666E-05  1.75888E-04  7.14825E-02 -7.64299E-03 -2.91169E-03 -7.98769E-04 -1.07738E-04
  5.100  5.88643E-02 -8.52183E-03 -2.11015E-03  2.62662E-06  1.69463E-04  6.92429E-02 -8.50826E-03 -3.00971E-03 -7.42336E-04 -6.54226E-05
  5.200  5.66927E-02 -9.17406E-03 -2.09734E-03  7.17279E-05  1.62274E-04  6.67072E-02 -9.29000E-03 -3.05046E-03 -6.70789E-04 -2.61136E-05
  5.300  5.42890E-02 -9.72830E-03 -2.04610E-03  1.37403E-04  1.54297E-04  6.38879E-02 -9.96274E-03 -3.03443E-03 -5.88029E-04  9.25943E-06
  5.400  5.16721E-02 -1.01668E-02 -1.95950E-03  1.98083E-04  1.45534E-04  6.08074E-02 -1.05056E-02 -2.96465E-03 -4.98131E-04  3.99854E-05
  5.500  4.88680E-02 -1.04766E-02 -1.84192E-03  2.52355E-04  1.36019E-04  5.74976E-02 -1.09033E-02 -2.84630E-03 -4.05110E-04  6.55936E-05
  5.600  4.59090E-02 -1.06496E-02 -1.69881E-03  2.99034E-04  1.25825E-04  5.39982E-02 -1.11463E-02 -2.68636E-03 -3.12719E-04  8.58595E-05
  5.700  4.28321E-02 -1.06834E-02 -1.53637E-03  3.37233E-04  1.15065E-04  5.03552E-02 -1.12316E-02 -2.49299E-03 -2.24274E-04  1.00796E-04
  5.800  3.96781E-02 -1.05806E-02 -1.36113E-03  3.66398E-04  1.03891E-04  4.66184E-02 -1.11621E-02 -2.27510E-03 -1.42524E-04  1.10630E-04
  5.900  3.64893E-02 -1.03487E-02 -1.17962E-03  3.86335E-04  9.24838E-05  4.28400E-02 -1.09461E-02 -2.04172E-03 -6.95673E-05  1.15772E-04
  6.000  3.33083E-02 -9.99944E-03 -9.98040E-04  3.97202E-04  8.10471E-05  3.90718E-02 -1.05968E-02 -1.80158E-03 -6.82206E-06  1.16768E-04
  6.100  3.01761E-02 -9.54790E-03 -8.21942E-04  3.99486E-04  6.97925E-05  3.53636E-02 -1.01312E-02 -1.56265E-03  4.49613E-05  1.14263E-04
  6.200  2.71306E-02 -9.01160E-03 -6.56039E-04  3.93952E-04  5.89278E-05  3.17613E-02 -9.56917E-03 -1.33186E-03  8.56467E-05  1.08951E-04
  6.300  2.42058E-02 -8.40953E-03 -5.04040E-04  3.81590E-04  4.86449E-05  2.83055E-02 -8.93198E-03 -1.11484E-03  1.15628E-04  1.01533E-04
  6.400  2.14305E-02 -7.76114E-03 -3.68587E-04  3.63539E-04  3.91091E-05  2.50302E-02 -8.24154E-03 -9.15839E-04  1.35726E-04  9.26787E-05
  6.500  1.88276E-02 -7.08546E-03 -2.51259E-04  3.41024E-04  3.04510E-05  2.19628E-02 -7.51921E-03 -7.37703E-04  1.47069E-04  8.29997E-05
  6.600  1.64144E-02 -6.40033E-03 -1.52644E-04  3.15281E-04  2.27619E-05  1.91229E-02 -6.78501E-03 -5.81958E-04  1.50982E-04  7.30261E-05
  6.700  1.42018E-02 -5.72179E-03 -7.24561E-05  2.87499E-04  1.60918E-05  1.65231E-02 -6.05688E-03 -4.48943E-04  1.48876E-04  6.31940E-05
  6.800  1.21952E-02 -5.06363E-03 -9.69102E-06  2.58768E-04  1.04500E-05  1.41691E-02 -5.35024E-03 -3.38010E-04  1.42157E-04  5.38407E-05
  6.900  1.03947E-02 -4.43712E-03  3.71986E-05  2.30042E-04  5.80981E-06  1.20603E-02 -4.67767E-03 -2.47735E-04  1.32146E-04  4.52072E-05
  7.000  8.79583E-03 -3.85090E-03  7.01271E-05  2.02118E-04  2.11317E-06  1.01908E-02 -4.04879E-03 -1.76142E-04  1.20027E-04  3.74453E-05
  7.100  7.39036E-03 -3.31106E-03  9.12080E-05  1.75618E-04 -7.21872E-07  8.55009E-03 -3.47035E-03 -1.20919E-04  1.06810E-04  3.06300E-05
  7.200  6.16700E-03 -2.82128E-03  1.02605E-04  1.50998E-04 -2.79396E-06  7.12435E-03 -2.94641E-03 -7.96060E-05  9.33169E-05  2.47730E-05
  7.300  5.11228E-03 -2.38309E-03  1.06410E-04  1.28555E-04 -4.21106E-06  5.89721E-03 -2.47865E-03 -4.97545E-05  8.01775E-05  1.98378E-05
  7.400  4.21134E-03 -1.99620E-03  1.04549E-04  1.08443E-04 -5.08378E-06  4.85074E-03 -2.06672E-03 -2.90532E-05  6.78426E-05  1.57536E-05
  7.500  3.44860E-03 -1.65885E-03  9.87224E-05  9.06987E-05 -5.51966E-06  3.96628E-03 -1.70862E-03 -1.54140E-05  5.66043E-05  1.24289E-05
  7.600  2.80836E-03 -1.36816E-03  9.03646E-05  7.52642E-05 -5.61876E-06  3.22513E-03 -1.40114E-03 -7.02479E-06  4.66206E-05  9.76195E-06
  7.700  2.27532E-03 -1.12047E-03  8.06381E-05  6.20107E-05 -5.47048E-06  2.60913E-03 -1.14020E-03 -2.37251E-06  3.79436E-05  7.64987E-06
  7.800  1.83497E-03 -9.11645E-04  7.04398E-05  5.07623E-05 -5.15170E-06  2.10111E-03 -9.21215E-04 -2.41291E-07  3.05459E-05  5.99476E-06
  7.900  1.47382E-03 -7.37325E-04  6.04238E-05  4.13152E-05 -4.72609E-06  1.68518E-03 -7.39367E-04  3.07051E-07  2.43453E-05  4.70798E-06
  8.000  1.17963E-03 -5.93159E-04  5.10340E-05  3.34547E-05 -4.24427E-06  1.34695E-03 -5.89858E-04 -3.51863E-08  1.92259E-05  3.71248E-06
  8.100  9.41460E-04 -4.74959E-04  4.25399E-05  2.69674E-05 -3.74473E-06  1.07361E-03 -4.68081E-04 -7.83366E-07  1.50552E-05  2.94358E-06
  8.200  7.49723E-04 -3.78815E-04  3.50739E-05  2.16509E-05 -3.25523E-06  8.53932E-04 -3.69753E-04 -1.62029E-06  1.16971E-05  2.34866E-06
  8.300  5.96126E-04 -3.01175E-04  2.86667E-05  1.73196E-05 -2.79443E-06  6.78258E-04 -2.90994E-04 -2.35747E-06  9.02078E-06  1.88607E-06
  8.400  4.73600E-04 -2.38880E-04  2.32779E-05  1.38081E-05 -2.37362E-06  5.38361E-04 -2.28367E-04 -2.90032E-06  6.90647E-06  1.52369E-06
  8.500  3.76200E-04 -1.89177E-04  1.88226E-05  1.09724E-05 -1.99839E-06  4.27337E-04 -1.78891E-04 -3.21861E-06  5.24867E-06  1.23723E-06
  8.600  2.98983E-04 -1.49712E-04  1.51916E-05  8.68975E-06 -1.67011E-06  3.39458E-04 -1.40028E-04 -3.32265E-06  3.95709E-06  1.00868E-06
  8.700  2.37881E-04 -1.18498E-04  1.22671E-05  6.85678E-06 -1.38731E-06  2.70025E-04 -1.09646E-04 -3.24525E-06  2.95630E-06  8.24821E-07
  8.800  1.89584E-04 -9.38845E-05  9.93324E-06  5.38798E-06 -1.14664E-06  2.15218E-04 -8.59856E-05 -3.02884E-06  2.18456E-06  6.75959E-07
  8.900  1.51418E-04 -7.45163E-05  8.08311E-06  4.21314E-06 -9.43797E-07  1.71959E-04 -6.76126E-05 -2.71683E-06  1.59207E-06  5.54967E-07
  9.000  1.21242E-04 -5.92938E-05  6.62225E-06  3.27512E-06 -7.74071E-07  1.37791E-04 -5.33704E-05 -2.34857E-06  1.13921E-06  4.56505E-07
  9.100  9.73544E-05 -4.73326E-05  5.47018E-06  2.52766E-06 -6.32792E-07  1.10762E-04 -4.23371E-05 -1.95675E-06  7.94670E-07  3.76463E-07
  9.200  7.84068E-05 -3.79280E-05  4.56023E-06  1.93345E-06 -5.15594E-07  8.93321E-05 -3.37844E-05 -1.56661E-06  5.33943E-07  3.11581E-07
  9.300  6.33392E-05 -3.05217E-05  3.83842E-06  1.46242E-06 -4.18564E-07  7.22922E-05 -2.71418E-05 -1.19631E-06  3.37881E-07  2.59191E-07
  9.400  5.13202E-05 -2.46748E-05  3.26186E-06  1.09038E-06 -3.38305E-07  5.86959E-05 -2.19656E-05 -8.57811E-07  1.91587E-07  2.17060E-07
  9.500  4.16993E-05 -2.00435E-05  2.79702E-06  7.97860E-07 -2.71936E-07  4.78050E-05 -1.79126E-05 -5.58062E-07  8.34950E-08  1.83292E-07
  9.600  3.39688E-05 -1.63595E-05  2.41795E-06  5.69154E-07 -2.17062E-07  3.90443E-05 -1.47191E-05 -3.00184E-07  4.64565E-09  1.56270E-07
  9.700  2.77325E-05 -1.34146E-05  2.10480E-06  3.91606E-07 -1.71710E-07  3.19663E-05 -1.21833E-05 -8.45156E-08 -5.18788E-08  1.34622E-07
  9.800  2.26814E-05 -1.10471E-05  1.84246E-06  2.55001E-07 -1.34275E-07  2.62225E-05 -1.01517E-05  9.05197E-08 -9.14013E-08  1.17195E-07
  9.900  1.85742E-05 -9.13197E-06  1.61951E-06  1.51091E-07 -1.03449E-07  2.15412E-05 -8.50746E-06  2.27739E-07 -1.18000E-07  1.03038E-07
 10.000  1.52224E-05 -7.57271E-06  1.42736E-06  7.32185E-08 -7.81661E-08  1.77107E-05 -7.16269E-06  3.30703E-07 -1.34787E-07  9.13781E-08
 10.100  1.24778E-05 -6.29478E-06  1.25960E-06  1.60035E-08 -5.75532E-08  1.45649E-05 -6.05099E-06  4.03361E-07 -1.44130E-07  8.16027E-08
 10.200  1.02241E-05 -5.24070E-06  1.11146E-06 -2.48997E-08 -4.08854E-08  1.19734E-05 -5.12257E-06  4.49801E-07 -1.47829E-07  7.32370E-08
 10.300  8.36936E-06 -4.36609E-06  9.79416E-07 -5.30034E-08 -2.75543E-08  9.83342E-06 -4.34008E-06  4.74081E-07 -1.47258E-07  6.59229E-08
 10.400  6.84048E-06 -3.63665E-06  8.60920E-07 -7.11479E-08 -1.70424E-08  8.06313E-06 -3.67550E-06  4.80107E-07 -1.43476E-07  5.93983E-08
 10.500  5.57912E-06 -3.02575E-06  7.54113E-07 -8.16299E-08 -8.90363E-09  6.59729E-06 -3.10772E-06  4.71550E-07 -1.37310E-07  5.34779E-08
 10.600  4.53837E-06 -2.51258E-06  6.57655E-07 -8.63069E-08 -2.74998E-09  5.38336E-06 -2.62074E-06  4.51781E-07 -1.29417E-07  4.80364E-08
 10.700  3.68018E-06 -2.08077E-06  5.70571E-07 -8.66782E-08  1.75819E-09  4.37869E-06 -2.20224E-06  4.23833E-07 -1.20331E-07  4.29930E-08
 10.800  2.97354E-06 -1.71723E-06  4.92135E-07 -8.39511E-08  4.91884E-09  3.54841E-06 -1.84255E-06  3.90369E-07 -1.10493E-07  3.82996E-08
 10.900  2.39293E-06 -1.41143E-06  4.21774E-07 -7.90920E-08  6.99283E-09  2.86376E-06 -1.53389E-06  3.53669E-07 -1.00272E-07  3.39302E-08
 11.000  1.91720E-06 -1.15469E-06  3.59002E-07 -7.28677E-08  8.20718E-09  2.30082E-06 -1.26983E-06  3.15629E-07 -8.99749E-08  2.98728E-08
 11.100  1.52875E-06 -9.39804E-07  3.03369E-07 -6.58788E-08  8.75762E-09  1.83961E-06 -1.04490E-06  2.77773E-07 -7.98563E-08  2.61232E-08
 11.200  1.21285E-06 -7.60662E-07  2.54434E-07 -5.85871E-08  8.81078E-09  1.46328E-06 -8.54310E-07  2.41274E-07 -7.01213E-08  2.26806E-08
 11.300  9.57102E-07 -6.12033E-07  2.11741E-07 -5.13384E-08  8.50634E-09  1.15766E-06 -6.93807E-07  2.06985E-07 -6.09297E-08  1.95441E-08
 11.400  7.51087E-07 -4.89394E-07  1.74819E-07 -4.43822E-08  7.95920E-09  9.10702E-07 -5.59552E-07  1.75480E-07 -5.23980E-08  1.67109E-08
 11.500  5.86022E-07 -3.88810E-07  1.43175E-07 -3.78889E-08  7.26181E-09  7.12251E-07 -4.48068E-07  1.47091E-07 -4.46036E-08  1.41751E-08
 11.600  4.54523E-07 -3.06851E-07  1.16307E-07 -3.19645E-08  6.48661E-09  5.53703E-07 -3.56196E-07  1.21953E-07 -3.75884E-08  1.19269E-08
 11.700  3.50389E-07 -2.40526E-07  9.37079E-08 -2.66643E-08  5.68858E-09  4.27805E-07 -2.81082E-07  1.00048E-07 -3.13633E-08  9.95323E-09
 11.800  2.68440E-07 -1.87236E-07  7.48811E-08 -2.20040E-08  4.90775E-09  3.28464E-07 -2.20165E-07  8.12394E-08 -2.59138E-08  8.23759E-09
 11.900  2.04363E-07 -1.44733E-07  5.93459E-08 -1.79701E-08  4.17167E-09  2.50590E-07 -1.71166E-07  6.53124E-08 -2.12050E-08  6.76108E-09
 12.000  1.54588E-07 -1.11089E-07  4.66487E-08 -1.45286E-08  3.49779E-09  1.89949E-07 -1.32078E-07  5.20002E-08 -1.71869E-08  5.50303E-09
 12.100  1.16184E-07 -8.46609E-08  3.63690E-08 -1.16316E-08  2.89556E-09  1.43049E-07 -1.01156E-07  4.10106E-08 -1.37996E-08  4.44174E-09
 12.200  8.67541E-08 -6.40601E-08  2.81246E-08 -9.22374E-09  2.36835E-09  1.07024E-07 -7.68950E-08  3.20452E-08 -1.09775E-08  3.55528E-09
 12.300  6.43560E-08 -4.81264E-08  2.15737E-08 -7.24641E-09  1.91513E-09  7.95462E-08 -5.80183E-08  2.48136E-08 -8.65289E-09  2.82209E-09
 12.400  4.74278E-08 -3.58979E-08  1.64163E-08 -5.64121E-09  1.53182E-09  5.87331E-08 -4.34516E-08  1.90440E-08 -6.75926E-09  2.22156E-09
 12.500  3.47229E-08 -2.65858E-08  1.23926E-08 -4.35244E-09  1.21245E-09  4.30792E-08 -3.23024E-08  1.44890E-08 -5.23324E-09  1.73440E-09
 12.600  2.52541E-08 -1.95495E-08  9.28151E-09 -3.32871E-09  9.49990E-10  3.13886E-08 -2.38382E-08  1.09296E-08 -4.01633E-09  1.34297E-09
 12.700  1.82467E-08 -1.42737E-08  6.89724E-09 -2.52388E-09  7.37082E-10  2.27194E-08 -1.74639E-08  8.17557E-09 -3.05584E-09  1.03140E-09
 12.800  1.30970E-08 -1.03482E-08  5.08584E-09 -1.89746E-09  5.66467E-10  1.63359E-08 -1.27016E-08  6.06514E-09 -2.30529E-09  7.85701E-10
 12.900  9.33897E-09 -7.44972E-09  3.72147E-09 -1.41463E-09  4.31322E-10  1.16685E-08 -9.17173E-09  4.46303E-09 -1.72450E-09  5.93718E-10
 13.000  6.61567E-09 -5.32568E-09  2.70248E-09 -1.04602E-09  3.25457E-10  8.27991E-09 -6.57568E-09  3.25792E-09 -1.27937E-09  4.45064E-10
 13.100  4.65590E-09 -3.78085E-09  1.94778E-09 -7.67199E-10  2.43409E-10  5.83683E-09 -4.68114E-09  2.35951E-09 -9.41385E-10  3.30987E-10
 13.200  3.25534E-09 -2.66564E-09  1.39340E-09 -5.58214E-10  1.80472E-10  4.08772E-09 -3.30908E-09  1.69561E-09 -6.87112E-10  2.44215E-10
 13.300  2.26133E-09 -1.86651E-09  9.89478E-10 -4.02961E-10  1.32674E-10  2.84413E-09 -2.32291E-09  1.20919E-09 -4.97532E-10  1.78786E-10
 13.400  1.56068E-09 -1.29807E-09  6.97524E-10 -2.88628E-10  9.67224E-11  1.96603E-09 -1.61939E-09  8.55809E-10 -3.57429E-10  1.29875E-10
 13.500  1.07019E-09 -8.96643E-10  4.88165E-10 -2.05149E-10  6.99355E-11  1.35027E-09 -1.12120E-09  6.01188E-10 -2.54787E-10  9.36215E-11
 13.600  7.29152E-10 -6.15203E-10  3.39201E-10 -1.44709E-10  5.01595E-11  9.21399E-10 -7.71007E-10  4.19214E-10 -1.80228E-10  6.69748E-11
 13.700  4.93622E-10 -4.19289E-10  2.34024E-10 -1.01311E-10  3.56900E-11  6.24724E-10 -5.26617E-10  2.90196E-10 -1.26522E-10  4.75512E-11
 13.800  3.32051E-10 -2.83873E-10  1.60327E-10 -7.04026E-11  2.51957E-11  4.20875E-10 -3.57285E-10  1.99440E-10 -8.81544E-11  3.35084E-11
 13.900  2.21954E-10 -1.90928E-10  1.09074E-10 -4.85654E-11  1.76498E-11  2.81746E-10 -2.40792E-10  1.36093E-10 -6.09669E-11  2.34378E-11
 14.000  1.47428E-10 -1.27577E-10  7.36938E-11 -3.32587E-11  1.22696E-11  1.87419E-10 -1.61212E-10  9.22128E-11 -4.18553E-11  1.62733E-11
 14.100  9.73132E-11 -8.46927E-11  4.94497E-11 -2.26129E-11  8.46523E-12  1.23890E-10 -1.07226E-10  6.20458E-11 -2.85265E-11  1.12166E-11
 14.200  6.38337E-11 -5.58615E-11  3.29567E-11 -1.52656E-11  5.79702E-12  8.13837E-11 -7.08557E-11  4.14599E-11 -1.93027E-11  7.67532E-12
 14.300  4.16129E-11 -3.66092E-11  2.18170E-11 -1.02330E-11  3.94062E-12  5.31290E-11 -4.65197E-11  2.75150E-11 -1.29686E-11  5.21446E-12
 14.400  2.69600E-11 -2.38394E-11  1.43464E-11 -6.81171E-12  2.65922E-12  3.44692E-11 -3.03464E-11  1.81368E-11 -8.65172E-12  3.51742E-12
 14.500  1.73595E-11 -1.54258E-11  9.37152E-12 -4.50298E-12  1.78158E-12  2.22255E-11 -1.96700E-11  1.18750E-11 -5.73159E-12  2.35595E-12
 14.600  1.11095E-11 -9.91883E-12  6.08161E-12 -2.95640E-12  1.18510E-12  1.42431E-11 -1.26692E-11  7.72336E-12 -3.77086E-12  1.56697E-12
 14.700  7.06647E-12 -6.33802E-12  3.92093E-12 -1.92783E-12  7.82756E-13  9.07196E-12 -8.10874E-12  4.99010E-12 -2.46390E-12  1.03498E-12
 14.800  4.46761E-12 -4.02478E-12  2.51157E-12 -1.24866E-12  5.13398E-13  5.74324E-12 -5.15750E-12  3.20305E-12 -1.59901E-12  6.78894E-13
 14.900  2.80754E-12 -2.54005E-12  1.59847E-12 -8.03365E-13  3.34399E-13  3.61396E-12 -3.26003E-12  2.04265E-12 -1.03074E-12  4.42277E-13
 15.000  1.75374E-12 -1.59320E-12  1.01085E-12 -5.13449E-13  2.16314E-13  2.26044E-12 -2.04794E-12  1.29425E-12 -6.59998E-13  2.86175E-13
 15.100  1.08895E-12 -9.93205E-13  6.35205E-13 -3.26002E-13  1.38976E-13  1.40539E-12 -1.27862E-12  8.14818E-13 -4.19810E-13  1.83922E-13
 15.200  6.72143E-13 -6.15410E-13  3.96644E-13 -2.05638E-13  8.86864E-14  8.68580E-13 -7.93432E-13  5.09730E-13 -2.65279E-13  1.17416E-13
 15.300  4.12421E-13 -3.79019E-13  2.46132E-13 -1.28875E-13  5.62157E-14  5.33630E-13 -4.89369E-13  3.16866E-13 -1.66539E-13  7.44603E-14
 15.400  2.51568E-13 -2.32029E-13  1.51786E-13 -8.02482E-14  3.53969E-14  3.25912E-13 -3.00011E-13  1.95744E-13 -1.03875E-13  4.69086E-14
 15.500  1.52552E-13 -1.41195E-13  9.30268E-14 -4.96503E-14  2.21413E-14  1.97880E-13 -1.82820E-13  1.20169E-13 -6.43741E-14  2.93581E-14
 15.600  9.19680E-14 -8.54102E-14  5.66649E-14 -3.05246E-14  1.37591E-14  1.19442E-13 -1.10742E-13  7.33174E-14 -3.96400E-14  1.82545E-14
 15.700  5.51220E-14 -5.13598E-14  3.43056E-14 -1.86481E-14  8.49475E-15  7.16761E-14 -6.66829E-14  4.44580E-14 -2.42548E-14  1.12771E-14
 15.800  3.28467E-14 -3.07024E-14  2.06432E-14 -1.13213E-14  5.21076E-15  4.27627E-14 -3.99156E-14  2.67939E-14 -1.47477E-14  6.92197E-15
 15.900  1.94603E-14 -1.82461E-14  1.23471E-14 -6.83045E-15  3.17587E-15  2.53652E-14 -2.37526E-14  1.60503E-14 -8.91102E-15  4.22166E-15
 16.000  1.14631E-14 -1.07802E-14  7.34073E-15 -4.09555E-15  1.92333E-15  1.49592E-14 -1.40517E-14  9.55657E-15 -5.35089E-15  2.55843E-15
 16.100  6.71379E-15 -6.33222E-15  4.33829E-15 -2.44063E-15  1.15742E-15  8.77160E-15 -8.26439E-15  5.65603E-15 -3.19328E-15  1.54071E-15
 16.200  3.90976E-15 -3.69800E-15  2.54867E-15 -1.44554E-15  6.92140E-16  5.11403E-15 -4.83244E-15  3.32754E-15 -1.89398E-15  9.22018E-16
 16.300  2.26392E-15 -2.14719E-15  1.48847E-15 -8.50977E-16  4.11318E-16  2.96463E-15 -2.80936E-15  1.94604E-15 -1.11650E-15  5.48333E-16
 16.400  1.30349E-15 -1.23959E-15  8.64185E-16 -4.97937E-16  2.42918E-16  1.70887E-15 -1.62384E-15  1.13139E-15 -6.54186E-16  3.24081E-16
 16.500  7.46275E-16 -7.11541E-16  4.98803E-16 -2.89612E-16  1.42579E-16  9.79462E-16 -9.33226E-16  6.53904E-16 -3.80993E-16  1.90361E-16
 16.600  4.24859E-16 -4.06111E-16  2.86231E-16 -1.67439E-16  8.31725E-17  5.58234E-16 -5.33269E-16  3.75726E-16 -2.20557E-16  1.11131E-16
 16.700  2.40521E-16 -2.30475E-16  1.63299E-16 -9.62299E-17  4.82223E-17  3.16375E-16 -3.02993E-16  2.14633E-16 -1.26918E-16  6.44825E-17
 16.800  1.35405E-16 -1.30060E-16  9.26274E-17 -5.49778E-17  2.77891E-17  1.78301E-16 -1.71181E-16  1.21899E-16 -7.26012E-17  3.71883E-17
 16.900  7.58040E-17 -7.29823E-17  5.22390E-17 -3.12250E-17  1.59174E-17  9.99264E-17 -9.61660E-17  6.88326E-17 -4.12849E-17  2.13179E-17
 17.000  4.22024E-17 -4.07241E-17  2.92928E-17 -1.76306E-17  9.06269E-18  5.56915E-17 -5.37209E-17  3.86446E-17 -2.33388E-17  1.21471E-17
 17.100  2.33656E-17 -2.25972E-17  1.63324E-17 -9.89678E-18  5.12909E-18  3.08665E-17 -2.98420E-17  2.15723E-17 -1.31165E-17  6.88013E-18
 17.200  1.28653E-17 -1.24691E-17  9.05455E-18 -5.52323E-18  2.88560E-18  1.70131E-17 -1.64849E-17  1.19736E-17 -7.32861E-18  3.87377E-18
 17.300  7.04485E-18 -6.84233E-18  4.99144E-18 -3.06462E-18  1.61382E-18  9.32575E-18 -9.05572E-18  6.60827E-18 -4.07100E-18  2.16818E-18
 17.400  3.83655E-18 -3.73393E-18  2.73612E-18 -1.69066E-18  8.97247E-19  5.08389E-18 -4.94708E-18  3.62653E-18 -2.24837E-18  1.20641E-18
 17.500  2.07794E-18 -2.02642E-18  1.49143E-18 -9.27343E-19  4.95926E-19  2.75631E-18 -2.68764E-18  1.97901E-18 -1.23462E-18  6.67329E-19
 17.600  1.11932E-18 -1.09371E-18  8.08425E-19 -5.05756E-19  2.72509E-19  1.48623E-18 -1.45210E-18  1.07390E-18 -6.74070E-19  3.66982E-19
 17.700  5.99675E-19 -5.87077E-19  4.35766E-19 -2.74263E-19  1.48873E-19  7.97037E-19 -7.80254E-19  5.79494E-19 -3.65928E-19  2.00641E-19
 17.800  3.19536E-19 -3.13408E-19  2.33589E-19 -1.47887E-19  8.08599E-20  4.25118E-19 -4.16959E-19  3.10966E-19 -1.97522E-19  1.09062E-19
 17.900  1.69346E-19 -1.66402E-19  1.24522E-19 -7.92933E-20  4.36659E-20  2.25521E-19 -2.21604E-19  1.65945E-19 -1.06016E-19  5.89413E-20
 18.000  8.92659E-20 -8.78705E-20  6.60144E-20 -4.22764E-20  2.34452E-20  1.18992E-19 -1.17137E-19  8.80663E-20 -5.65820E-20  3.16714E-20
 18.100  4.68015E-20 -4.61503E-20  3.48051E-20 -2.24142E-20  1.25164E-20  6.24460E-20 -6.15817E-20  4.64792E-20 -3.00290E-20  1.69209E-20
 18.200  2.44063E-20 -2.41078E-20  1.82500E-20 -1.18174E-20  6.64395E-21  3.25955E-20 -3.22000E-20  2.43960E-20 -1.58478E-20  8.98882E-21
 18.300  1.26596E-20 -1.25256E-20  9.51720E-21 -6.19581E-21  3.50675E-21  1.69231E-20 -1.67461E-20  1.27350E-20 -8.31706E-21  4.74800E-21
 18.400  6.53158E-21 -6.47297E-21  4.93613E-21 -3.23046E-21  1.84045E-21  8.73939E-21 -8.66228E-21  6.61153E-21 -4.34065E-21  2.49378E-21
 18.500  3.35199E-21 -3.32721E-21  2.54626E-21 -1.67505E-21  9.60495E-22  4.48914E-21 -4.45673E-21  3.41381E-21 -2.25284E-21  1.30243E-21
 18.600  1.71111E-21 -1.70111E-21  1.30637E-21 -8.63767E-22  4.98453E-22  2.29368E-21 -2.28072E-21  1.75314E-21 -1.16280E-21  6.76404E-22
 18.700  8.68862E-22 -8.65105E-22  6.66621E-22 -4.42973E-22  2.57230E-22  1.16572E-21 -1.16093E-21  8.95450E-22 -5.96880E-22  3.49321E-22
 18.800  4.38860E-22 -4.37616E-22  3.38339E-22 -2.25932E-22  1.32006E-22  5.89327E-22 -5.87793E-22  4.54904E-22 -3.04708E-22  1.79397E-22
 18.900  2.20500E-22 -2.20197E-22  1.70801E-22 -1.14606E-22  6.73677E-23  2.96361E-22 -2.96027E-22  2.29857E-22 -1.54704E-22  9.16197E-23
 19.000  1.10205E-22 -1.10212E-22  8.57634E-23 -5.78189E-23  3.41901E-23  1.48250E-22 -1.48298E-22  1.15522E-22 -7.81178E-23  4.65320E-23
 19.100  5.47918E-23 -5.48719E-23  4.28342E-23 -2.90117E-23  1.72564E-23  7.37704E-23 -7.38988E-23  5.77486E-23 -3.92314E-23  2.35024E-23
 19.200  2.70988E-23 -2.71758E-23  2.12796E-23 -1.44786E-23  8.66177E-24  3.65164E-23 -3.66308E-23  2.87143E-23 -1.95957E-23  1.18053E-23
 19.300  1.33325E-23 -1.33884E-23  1.05154E-23 -7.18677E-24  4.32393E-24  1.79811E-23 -1.80620E-23  1.42017E-23 -9.73506E-24  5.89735E-24
 19.400  6.52538E-24 -6.56139E-24  5.16870E-24 -3.54815E-24  2.14671E-24  8.80794E-24 -8.85936E-24  6.98670E-24 -4.81031E-24  2.92991E-24
 19.500  3.17713E-24 -3.19881E-24  2.52719E-24 -1.74236E-24  1.05998E-24  4.29205E-24 -4.32274E-24  3.41901E-24 -2.36412E-24  1.44770E-24
 19.600  1.53889E-24 -1.55135E-24  1.22914E-24 -8.51037E-25  5.20541E-25  2.08062E-24 -2.09818E-24  1.66430E-24 -1.15568E-24  7.11440E-25
 19.700  7.41519E-25 -7.48455E-25  5.94672E-25 -4.13465E-25  2.54248E-25  1.00337E-24 -1.01311E-24  8.05875E-25 -5.61924E-25  3.47726E-25
  67 147 199   0.100
  0.000  5.90334E-02 -3.25833E-16 -3.85109E-16 -9.13177E-16  5.00671E-16  1.05504E-01 -5.43054E-16 -8.32667E-16 -9.75723E-16 -1.27314E-15
  0.100  5.90995E-02  1.66366E-05 -2.50853E-10  2.86712E-14 -1.13009E-15  1.05307E-01 -2.59320E-06 -1.45412E-09  6.37723E-14 -2.00269E-15
  0.200  5.92970E-02  6.55777E-05 -3.90330E-09  1.86867E-12 -2.41753E-15  1.04725E-01 -1.01010E-05 -2.30839E-08  4.10329E-12 -6.27985E-15
  0.300  5.96227E-02  1.43973E-04 -1.88508E-08  2.08830E-11 -1.64792E-14  1.03784E-01 -2.17380E-05 -1.15335E-07  4.63455E-11 -7.48861E-14
  0.400  6.00715E-02  2.47255E-04 -5.56911E-08  1.14144E-10 -1.54178E-13  1.02525E-01 -3.62905E-05 -3.57814E-07  2.57312E-10 -7.07477E-13
  0.500  6.06359E-02  3.69399E-04 -1.24320E-07  4.20074E-10 -8.29155E-13  1.01005E-01 -5.22492E-05 -8.52771E-07  9.66309E-10 -4.10746E-12
  0.600  6.13060E-02  5.03267E-04 -2.29955E-07  1.19968E-09 -3.12509E-12  9.92875E-02 -6.79710E-05 -1.71637E-06  2.82935E-09 -1.71803E-11
  0.700  6.20692E-02  6.41007E-04 -3.69235E-07  2.86712E-09 -9.04192E-12  9.74449E-02 -8.18545E-05 -3.06821E-06  6.96689E-09 -5.70751E-11
  0.800  6.29105E-02  7.74495E-04 -5.27021E-07  5.99636E-09 -2.10098E-11  9.55512E-02 -9.25069E-05 -5.01963E-06  1.50919E-08 -1.60000E-10
  0.900  6.38123E-02  8.95779E-04 -6.74447E-07  1.12914E-08 -3.95925E-11  9.36788E-02 -9.88862E-05 -7.66172E-06  2.96065E-08 -3.93502E-10
  1.000  6.47552E-02  9.97505E-04 -7.68568E-07  1.95099E-08 -5.78049E-11  9.18952E-02 -1.00403E-04 -1.10537E-05  5.36456E-08 -8.72031E-10
  1.100  6.57180E-02  1.07331E-03 -7.53725E-07  3.13341E-08 -5.02885E-11  9.02593E-02 -9.69742E-05 -1.52130E-05  9.10493E-08 -1.77478E-09
  1.200  6.66788E-02  1.11812E-03 -5.64510E-07  4.71872E-08  4.45476E-11  8.88193E-02 -8.90188E-05 -2.01074E-05  1.46251E-07 -3.36440E-09
  1.300  6.76154E-02  1.12843E-03 -1.29981E-07  6.70000E-08  3.50841E-10  8.76101E-02 -7.74100E-05 -2.56512E-05  2.24081E-07 -6.00477E-09
  1.400  6.85067E-02  1.10241E-03  6.21368E-07  8.99377E-08  1.09074E-09  8.66530E-02 -6.33790E-05 -3.17047E-05  3.29493E-07 -1.01756E-08
  1.500  6.93331E-02  1.04001E-03  1.75650E-06  1.14102E-07  2.62862E-09  8.59551E-02 -4.83900E-05 -3.80783E-05  4.67233E-07 -1.64821E-08
  1.600  7.00773E-02  9.42858E-04  3.33315E-06  1.36232E-07  5.52207E-09  8.55099E-02 -3.39976E-05 -4.45412E-05  6.41485E-07 -2.56582E-08
  1.700  7.07254E-02  8.14180E-04  5.39610E-06  1.51417E-07  1.05765E-08  8.52987E-02 -2.17022E-05 -5.08335E-05  8.55527E-07 -3.85624E-08
  1.800  7.12671E-02  6.58578E-04  7.97476E-06  1.52858E-07  1.88986E-08  8.52922E-02 -1.28168E-05 -5.66821E-05  1.11144E-06 -5.61660E-08
  1.900  7.16958E-02  4.81767E-04  1.10822E-05  1.31689E-07  3.19424E-08  8.54529E-02 -8.35723E-06 -6.18182E-05  1.40986E-06 -7.95341E-08
  2.000  7.20094E-02  2.90272E-04  1.47154E-05  7.68859E-08  5.15432E-08  8.57379E-02 -8.96245E-06 -6.59952E-05  1.74993E-06 -1.09802E-07
  2.100  7.22093E-02  9.10960E-05  1.88571E-05 -2.47355E-08  7.99310E-08  8.61009E-02 -1.48507E-05 -6.90069E-05  2.12921E-06 -1.48143E-07
  2.200  7.23005E-02 -1.08618E-04  2.34780E-05 -1.88405E-07  1.19721E-07  8.64956E-02 -2.58120E-05 -7.07022E-05  2.54382E-06 -1.95739E-07
  2.300  7.22915E-02 -3.01912E-04  2.85391E-05 -4.31182E-07  1.73876E-07  8.68778E-02 -4.12341E-05 -7.09974E-05  2.98853E-06 -2.53743E-07
  2.400  7.21932E-02 -4.82317E-04  3.39943E-05 -7.71637E-07  2.45639E-07  8.72077E-02 -6.01596E-05 -6.98842E-05  3.45703E-06 -3.23239E-07
  2.500  7.20184E-02 -6.44119E-04  3.97922E-05 -1.22943E-06  3.38440E-07  8.74520E-02 -8.13664E-05 -6.74317E-05  3.94198E-06 -4.05198E-07
  2.600  7.17815E-02 -7.82584E-04  4.58765E-05 -1.82480E-06  4.55783E-07  8.75852E-02 -1.03467E-04 -6.37849E-05  4.43515E-06 -5.00434E-07
  2.700  7.14977E-02 -8.94137E-04  5.21863E-05 -2.57804E-06  6.01105E-07  8.75909E-02 -1.25021E-04 -5.91568E-05  4.92738E-06 -6.09538E-07
  2.800  7.11826E-02 -9.76480E-04  5.86548E-05 -3.50883E-06  7.77641E-07  8.74617E-02 -1.44653E-04 -5.38169E-05  5.40843E-06 -7.32818E-07
  2.900  7.08513E-02 -1.02867E-03  6.52072E-05 -4.63557E-06  9.88283E-07  8.71997E-02 -1.61173E-04 -4.80762E-05  5.86665E-06 -8.70216E-07
  3.000  7.05185E-02 -1.05114E-03  7.17597E-05 -5.97477E-06  1.23544E-06  8.68155E-02 -1.73692E-04 -4.22692E-05  6.28863E-06 -1.02122E-06
  3.100  7.01976E-02 -1.04566E-03  7.82178E-05 -7.54027E-06  1.52095E-06  8.63272E-02 -1.81732E-04 -3.67346E-05  6.65873E-06 -1.18475E-06
  3.200  6.99007E-02 -1.01529E-03  8.44761E-05 -9.34257E-06  1.84597E-06  8.57587E-02 -1.85320E-04 -3.17961E-05  6.95867E-06 -1.35907E-06
  3.300  6.96375E-02 -9.64214E-04  9.04201E-05 -1.13882E-05  2.21090E-06  8.51377E-02 -1.85059E-04 -2.77432E-05  7.16724E-06 -1.54168E-06
  3.400  6.94152E-02 -8.97626E-04  9.59300E-05 -1.36789E-05  2.61541E-06  8.44936E-02 -1.82175E-04 -2.48142E-05  7.26021E-06 -1.72923E-06
  3.500  6.92382E-02 -8.21494E-04  1.00886E-04 -1.62112E-05  3.05836E-06  8.38547E-02 -1.78529E-04 -2.31820E-05  7.21057E-06 -1.91744E-06
  3.600  6.91067E-02 -7.42332E-04  1.05177E-04 -1.89758E-05  3.53787E-06  8.32459E-02 -1.76583E-04 -2.29423E-05  6.98915E-06 -2.10110E-06
  3.700  6.90172E-02 -6.66929E-04  1.08711E-04 -2.19570E-05  4.05129E-06  8.26865E-02 -1.79328E-04 -2.41065E-05  6.56564E-06 -2.27410E-06
  3.800  6.89612E-02 -6.02059E-04  1.11420E-04 -2.51326E-05  4.59526E-06  8.21882E-02 -1.90148E-04 -2.65980E-05  5.91001E-06 -2.42950E-06
  3.900  6.89254E-02 -5.54168E-04  1.13278E-04 -2.84734E-05  5.16571E-06  8.17534E-02 -2.12652E-04 -3.02538E-05  4.99437E-06 -2.55975E-06
  4.000  6.88913E-02 -5.29060E-04  1.14303E-04 -3.19439E-05  5.75786E-06  8.13743E-02 -2.50448E-04 -3.48298E-05  3.79503E-06 -2.65693E-06
  4.100  6.88356E-02 -5.31604E-04  1.14563E-04 -3.55019E-05  6.36624E-06  8.10328E-02 -3.06892E-04 -4.00111E-05  2.29466E-06 -2.71305E-06
  4.200  6.87303E-02 -5.65449E-04  1.14178E-04 -3.90995E-05  6.98468E-06  8.07009E-02 -3.84822E-04 -4.54271E-05  4.84465E-07 -2.72048E-06
  4.300  6.85438E-02 -6.32805E-04  1.13319E-04 -4.26838E-05  7.60630E-06  8.03418E-02 -4.86284E-04 -5.06693E-05 -1.63389E-06 -2.67241E-06
  4.400  6.82422E-02 -7.34266E-04  1.12194E-04 -4.61980E-05  8.22349E-06  7.99117E-02 -6.12298E-04 -5.53131E-05 -4.04681E-06 -2.56325E-06
  4.500  6.77902E-02 -8.68725E-04  1.11040E-04 -4.95827E-05  8.82801E-06  7.93627E-02 -7.62653E-04 -5.89416E-05 -6.72792E-06 -2.38914E-06
  4.600  6.71533E-02 -1.03336E-03  1.10103E-04 -5.27777E-05  9.41095E-06  7.86451E-02 -9.35787E-04 -6.11702E-05 -9.63783E-06 -2.14833E-06
  4.700  6.62994E-02 -1.22374E-03  1.09620E-04 -5.57235E-05  9.96295E-06  7.77105E-02 -1.12874E-03 -6.16703E-05 -1.27248E-05 -1.84151E-06
  4.800  6.52007E-02 -1.43398E-03  1.09800E-04 -5.83629E-05  1.04743E-05  7.65154E-02 -1.33721E-03 -6.01916E-05 -1.59261E-05 -1.47199E-06
  4.900  6.38355E-02 -1.65704E-03  1.10799E-04 -6.06434E-05  1.09353E-05  7.50233E-02 -1.55569E-03 -5.65795E-05 -1.91705E-05 -1.04581E-06
  5.000  6.21896E-02 -1.88506E-03  1.12711E-04 -6.25182E-05  1.13362E-05  7.32076E-02 -1.77774E-03 -5.07882E-05 -2.23803E-05 -5.71588E-07
  5.100  6.02576E-02 -2.10974E-03  1.15553E-04 -6.39484E-05  1.16681E-05  7.10533E-02 -1.99626E-03 -4.28869E-05 -2.54758E-05 -6.02994E-08
  5.200  5.80435E-02 -2.32278E-03  1.19259E-04 -6.49039E-05  1.19227E-05  6.85583E-02 -2.20391E-03 -3.30591E-05 -2.83774E-05  4.75148E-07
  5.300  5.55611E-02 -2.51632E-03  1.23682E-04 -6.53647E-05  1.20932E-05  6.57335E-02 -2.39348E-03 -2.15937E-05 -3.10104E-05  1.02046E-06
  5.400  5.28333E-02 -2.68328E-03  1.28603E-04 -6.53215E-05  1.21743E-05  6.26026E-02 -2.55831E-03 -8.87059E-06 -3.33075E-05  1.56062E-06
  5.500  4.98916E-02 -2.81779E-03  1.33745E-04 -6.47760E-05  1.21627E-05  5.92010E-02 -2.69265E-03  4.66167E-06 -3.52120E-05  2.08057E-06
  5.600  4.67746E-02 -2.91538E-03  1.38791E-04 -6.37411E-05  1.20571E-05  5.55739E-02 -2.79197E-03  1.85112E-05 -3.66802E-05  2.56593E-06
  5.700  4.35266E-02 -2.97320E-03  1.43408E-04 -6.22399E-05  1.18586E-05  5.17744E-02 -2.85317E-03  3.21717E-05 -3.76829E-05  3.00369E-06
  5.800  4.01952E-02 -2.99009E-03  1.47269E-04 -6.03058E-05  1.15706E-05  4.78602E-02 -2.87475E-03  4.51513E-05 -3.82060E-05  3.38279E-06
  5.900  3.68298E-02 -2.96655E-03  1.50078E-04 -5.79804E-05  1.11988E-05  4.38919E-02 -2.85682E-03  5.70005E-05 -3.82514E-05  3.69462E-06
  6.000  3.34790E-02 -2.90460E-03  1.51588E-04 -5.53129E-05  1.07509E-05  3.99296E-02 -2.80101E-03  6.73356E-05 -3.78351E-05  3.93329E-06
  6.100  3.01893E-02 -2.80764E-03  1.51619E-04 -5.23579E-05  1.02365E-05  3.60305E-02 -2.71034E-03  7.58577E-05 -3.69869E-05  4.09583E-06
  6.200  2.70032E-02 -2.68014E-03  1.50066E-04 -4.91742E-05  9.66649E-06  3.22472E-02 -2.58898E-03  8.23647E-05 -3.57479E-05  4.18216E-06
  6.300  2.39576E-02 -2.52735E-03  1.46903E-04 -4.58223E-05  9.05278E-06  2.86256E-02 -2.44197E-03  8.67564E-05 -3.41684E-05  4.19494E-06
  6.400  2.10832E-02 -2.35499E-03  1.42185E-04 -4.23632E-05  8.40785E-06  2.52039E-02 -2.27488E-03  8.90332E-05 -3.23051E-05  4.13924E-06
  6.500  1.84038E-02 -2.16896E-03  1.36036E-04 -3.88562E-05  7.74423E-06  2.20115E-02 -2.09354E-03  8.92883E-05 -3.02188E-05  4.02212E-06
  6.600  1.59361E-02 -1.97500E-03  1.28642E-04 -3.53575E-05  7.07409E-06  1.90695E-02 -1.90371E-03  8.76937E-05 -2.79716E-05  3.85218E-06
  6.700  1.36899E-02 -1.77849E-03  1.20233E-04 -3.19187E-05  6.40882E-06  1.63903E-02 -1.71083E-03  8.44844E-05 -2.56243E-05  3.63899E-06
  6.800  1.16685E-02 -1.58426E-03  1.11067E-04 -2.85858E-05  5.75871E-06  1.39783E-02 -1.51982E-03  7.99386E-05 -2.32347E-05  3.39260E-06
  6.900  9.86962E-03 -1.39641E-03  1.01415E-04 -2.53978E-05  5.13270E-06  1.18311E-02 -1.33488E-03  7.43581E-05 -2.08555E-05  3.12306E-06
  7.000  8.28592E-03 -1.21825E-03  9.15433E-05 -2.23870E-05  4.53821E-06  9.94011E-03 -1.15945E-03  6.80499E-05 -1.85328E-05  2.83995E-06
  7.100  6.90624E-03 -1.05229E-03  8.17025E-05 -1.95779E-05  3.98102E-06  8.29222E-03 -9.96147E-04  6.13090E-05 -1.63058E-05  2.55205E-06
  7.200  5.71644E-03 -9.00229E-04  7.21140E-05 -1.69879E-05  3.46531E-06  6.87063E-03 -8.46756E-04  5.44055E-05 -1.42056E-05  2.26707E-06
  7.300  4.70043E-03 -7.63056E-04  6.29637E-05 -1.46270E-05  2.99370E-06  5.65615E-03 -7.12319E-04  4.75738E-05 -1.22555E-05  1.99148E-06
  7.400  3.84097E-03 -6.41094E-04  5.43976E-05 -1.24990E-05  2.56736E-06  4.62826E-03 -5.93197E-04  4.10069E-05 -1.04714E-05  1.73044E-06
  7.500  3.12049E-03 -5.34130E-04  4.65203E-05 -1.06015E-05  2.18618E-06  3.76604E-03 -4.89190E-04  3.48533E-05 -8.86176E-06  1.48776E-06
  7.600  2.52169E-03 -4.41523E-04  3.93967E-05 -8.92762E-06  1.84902E-06  3.04886E-03 -3.99645E-04  2.92178E-05 -7.42905E-06  1.26602E-06
  7.700  2.02807E-03 -3.62314E-04  3.30554E-05 -7.46610E-06  1.55381E-06  2.45707E-03 -3.23576E-04  2.41640E-05 -6.17031E-06  1.06662E-06
  7.800  1.62423E-03 -2.95336E-04  2.74939E-05 -6.20280E-06  1.29787E-06  1.97235E-03 -2.59777E-04  1.97196E-05 -5.07823E-06  8.89981E-07
  7.900  1.29616E-03 -2.39304E-04  2.26842E-05 -5.12143E-06  1.07805E-06  1.57804E-03 -2.06918E-04  1.58823E-05 -4.14223E-06  7.35712E-07
  8.000  1.03137E-03 -1.92892E-04  1.85793E-05 -4.20444E-06  8.90942E-07  1.25925E-03 -1.63628E-04  1.26265E-05 -3.34942E-06  6.02774E-07
  8.100  8.18864E-04 -1.54799E-04  1.51190E-05 -3.43381E-06  7.33011E-07  1.00293E-03 -1.28563E-04  9.90982E-06 -2.68551E-06  4.89665E-07
  8.200  6.49189E-04 -1.23795E-04  1.22356E-05 -2.79170E-06  6.00764E-07  7.97827E-04 -1.00453E-04  7.67891E-06 -2.13564E-06  3.94581E-07
  8.300  5.14290E-04 -9.87475E-05  9.85834E-06 -2.26094E-06  4.90836E-07  6.34356E-04 -7.81352E-05  5.87500E-06 -1.68501E-06  3.15554E-07
  8.400  4.07413E-04 -7.86437E-05  7.91721E-06 -1.82548E-06  4.00071E-07  5.04484E-04 -6.05742E-05  4.43805E-06 -1.31943E-06  2.50574E-07
  8.500  3.22961E-04 -6.25968E-05  6.34581E-06 -1.47062E-06  3.25578E-07  4.01545E-04 -4.68680E-05  3.31000E-06 -1.02568E-06  1.97677E-07
  8.600  2.56351E-04 -4.98456E-05  5.08319E-06 -1.18317E-06  2.64758E-07  3.20078E-04 -3.62478E-05  2.43706E-06 -7.91778E-07  1.55014E-07
  8.700  2.03862E-04 -3.97476E-05  4.07498E-06 -9.51518E-07  2.15316E-07  2.55645E-04 -2.80706E-05  1.77108E-06 -6.07108E-07  1.20896E-07
  8.800  1.62507E-04 -3.17691E-05  3.27384E-06 -7.65631E-07  1.75262E-07  2.04676E-04 -2.18071E-05  1.27027E-06 -4.62458E-07  9.38196E-08
  8.900  1.29901E-04 -2.54724E-05  2.63942E-06 -6.16948E-07  1.42891E-07  1.64318E-04 -1.70284E-05  8.99192E-07 -3.49989E-07  7.24771E-08
  9.000  1.04154E-04 -2.05032E-05  2.13800E-06 -4.98284E-07  1.16765E-07  1.32309E-04 -1.33921E-05  6.28551E-07 -2.63145E-07  5.57535E-08
  9.100  8.37804E-05 -1.65771E-05  1.74184E-06 -4.03681E-07  9.56839E-08  1.06860E-04 -1.06276E-05  4.34557E-07 -1.96527E-07  4.27156E-08
  9.200  6.76125E-05 -1.34684E-05  1.42842E-06 -3.28259E-07  7.86600E-08  8.65679E-05 -8.52381E-06  2.98245E-07 -1.45752E-07  3.25952E-08
  9.300  5.47389E-05 -1.09989E-05  1.17975E-06 -2.68063E-07  6.48867E-08  7.03319E-05 -6.91769E-06  2.04728E-07 -1.07305E-07  2.47686E-08
  9.400  4.44492E-05 -9.02868E-06  9.81553E-07 -2.19915E-07  5.37119E-08  5.72918E-05 -5.68431E-06  1.42470E-07 -7.83980E-08  1.87362E-08
  9.500  3.61908E-05 -7.44870E-06  8.22615E-07 -1.81281E-07  4.46123E-08  4.67764E-05 -4.72886E-06  1.02642E-07 -5.68337E-08  1.41016E-08
  9.600  2.95338E-05 -6.17408E-06  6.94200E-07 -1.50156E-07  3.71708E-08  3.82619E-05 -3.97992E-06  7.85516E-08 -4.08948E-08  1.05534E-08
  9.700  2.41443E-05 -5.13900E-06  5.89530E-07 -1.24958E-07  3.10564E-08  3.13394E-05 -3.38414E-06  6.51801E-08 -2.92432E-08  7.84776E-09
  9.800  1.97625E-05 -4.29252E-06  5.03376E-07 -1.04446E-07  2.60075E-08  2.56895E-05 -2.90204E-06  5.88040E-08 -2.08390E-08  5.79494E-09
  9.900  1.61857E-05 -3.59528E-06  4.31721E-07 -8.76466E-08  2.18180E-08  2.10621E-05 -2.50462E-06  5.66981E-08 -1.48751E-08  4.24719E-09
 10.000  1.32557E-05 -3.01690E-06  3.71488E-07 -7.38005E-08  1.83250E-08  1.72607E-05 -2.17083E-06  5.69054E-08 -1.07259E-08  3.08945E-09
 10.100  1.08486E-05 -2.53393E-06  3.20330E-07 -6.23131E-08  1.54002E-08  1.41302E-05 -1.88557E-06  5.80586E-08 -7.90715E-09  2.23187E-09
 10.200  8.86649E-06 -2.12824E-06  2.76460E-07 -5.27203E-08  1.29419E-08  1.15480E-05 -1.63813E-06  5.92431E-08 -6.04567E-09  1.60414E-09
 10.300  7.23204E-06 -1.78581E-06  2.38527E-07 -4.46594E-08  1.08693E-08  9.41613E-06 -1.42097E-06  5.98898E-08 -4.85550E-09  1.15109E-09
 10.400  5.88346E-06 -1.49570E-06  2.05505E-07 -3.78467E-08  9.11764E-09  7.65584E-06 -1.22888E-06  5.96891E-08 -4.12011E-09  8.29401E-10
 10.500  4.77107E-06 -1.24934E-06  1.76617E-07 -3.20598E-08  7.63490E-09  6.20350E-06 -1.05823E-06  5.85235E-08 -3.67818E-09  6.05159E-10
 10.600  3.85458E-06 -1.03995E-06  1.51272E-07 -2.71242E-08  6.37879E-09  5.00712E-06 -9.06468E-07  5.64112E-08 -3.41237E-09  4.51924E-10
 10.700  3.10102E-06 -8.62039E-07  1.29014E-07 -2.29019E-08  5.31464E-09  4.02393E-06 -7.71733E-07  5.34608E-08 -3.24016E-09  3.49285E-10
 10.800  2.48317E-06 -7.11149E-07  1.09482E-07 -1.92830E-08  4.41380E-09  3.21846E-06 -6.52593E-07  4.98353E-08 -3.10624E-09  2.81698E-10
 10.900  1.97840E-06 -5.83549E-07  9.23857E-08 -1.61794E-08  3.65234E-09  2.56107E-06 -5.47846E-07  4.57227E-08 -2.97615E-09  2.37542E-10
 11.000  1.56774E-06 -4.76075E-07  7.74799E-08 -1.35194E-08  3.01009E-09  2.02692E-06 -4.56402E-07  4.13146E-08 -2.83095E-09  2.08343E-10
 11.100  1.23527E-06 -3.85997E-07  6.45508E-08 -1.12437E-08  2.46991E-09  1.59502E-06 -3.77212E-07  3.67900E-08 -2.66283E-09  1.88109E-10
 11.200  9.67523E-07 -3.10927E-07  5.34049E-08 -9.30232E-09  2.01713E-09  1.24771E-06 -3.09230E-07  3.23054E-08 -2.47143E-09  1.72784E-10
 11.300  7.53146E-07 -2.48762E-07  4.38630E-08 -7.65264E-09  1.63912E-09  9.70029E-07 -2.51405E-07  2.79888E-08 -2.26106E-09  1.59770E-10
 11.400  5.82552E-07 -1.97634E-07  3.57561E-08 -6.25746E-09  1.32492E-09  7.49389E-07 -2.02685E-07  2.39377E-08 -2.03841E-09  1.47546E-10
 11.500  4.47674E-07 -1.55889E-07  2.89238E-08 -5.08403E-09  1.06505E-09  5.75199E-07 -1.62033E-07  2.02198E-08 -1.81099E-09  1.35343E-10
 11.600  3.41748E-07 -1.22064E-07  2.32143E-08 -4.10316E-09  8.51240E-10  4.38597E-07 -1.28442E-07  1.68754E-08 -1.58604E-09  1.22899E-10
 11.700  2.59134E-07 -9.48707E-08  1.84843E-08 -3.28873E-09  6.76325E-10  3.32208E-07 -1.00957E-07  1.39215E-08 -1.36979E-09  1.10259E-10
 11.800  1.95156E-07 -7.31841E-08  1.46005E-08 -2.61730E-09  5.34078E-10  2.49929E-07 -7.86874E-08  1.13561E-08 -1.16716E-09  9.76307E-11
 11.900  1.45966E-07 -5.60298E-08  1.14402E-08 -2.06789E-09  4.19115E-10  1.86750E-07 -6.08172E-08  9.16280E-09 -9.81623E-10  8.52892E-11
 12.000  1.08422E-07 -4.25720E-08  8.89178E-09 -1.62179E-09  3.26803E-10  1.38588E-07 -4.66147E-08  7.31499E-09 -8.15239E-10  7.35052E-11
 12.100  7.99763E-08 -3.21016E-08  6.85539E-09 -1.26246E-09  2.53170E-10  1.02140E-07 -3.54341E-08  5.77973E-09 -6.68864E-10  6.25075E-11
 12.200  5.85840E-08 -2.40230E-08  5.24288E-09 -9.75363E-10  1.94836E-10  7.47592E-08 -2.67146E-08  4.52086E-09 -5.42345E-10  5.24642E-11
 12.300  4.26153E-08 -1.78413E-08  3.97751E-09 -7.47853E-10  1.48944E-10  5.43410E-08 -1.99773E-08  3.50154E-09 -4.34772E-10  4.34773E-11
 12.400  3.07837E-08 -1.31503E-08  2.99344E-09 -5.69057E-10  1.13095E-10  3.92269E-08 -1.48190E-08  2.68606E-09 -3.44703E-10  3.55871E-11
 12.500  2.20825E-08 -9.61985E-09  2.23494E-09 -4.29711E-10  8.52909E-11  2.81214E-08 -1.09050E-08  2.04119E-09 -2.70374E-10  2.87818E-11
 12.600  1.57309E-08 -6.98450E-09  1.65545E-09 -3.22016E-10  6.38828E-11  2.00212E-08 -7.96139E-09  1.53689E-09 -2.09869E-10  2.30089E-11
 12.700  1.11287E-08 -5.03333E-09  1.21659E-09 -2.39475E-10  4.75194E-11  1.41564E-08 -5.76692E-09  1.14675E-09 -1.61256E-10  1.81877E-11
 12.800  7.81867E-09 -3.60035E-09  8.87107E-10 -1.76739E-10  3.51035E-11  9.94108E-09 -4.14499E-09  8.48090E-10 -1.22680E-10  1.42203E-11
 12.900  5.45541E-09 -2.55638E-09  6.41850E-10 -1.29451E-10  2.57522E-11  6.93332E-09 -2.95637E-09  6.21762E-10 -9.24334E-11  1.10007E-11
 13.000  3.78042E-09 -1.80184E-09  4.60833E-10 -9.40994E-11  1.87611E-11  4.80273E-09 -2.09259E-09  4.51940E-10 -6.89875E-11  8.42238E-12
 13.100  2.60187E-09 -1.26077E-09  3.28346E-10 -6.78881E-11  1.35730E-11  3.30436E-09 -1.47004E-09  3.25740E-10 -5.10137E-11  6.38369E-12
 13.200  1.77860E-09 -8.75812E-10  2.32180E-10 -4.86118E-11  9.75148E-12  2.25814E-09 -1.02501E-09  2.32838E-10 -3.73818E-11  4.79111E-12
 13.300  1.20762E-09 -6.04031E-10  1.62948E-10 -3.45499E-11  6.95729E-12  1.53283E-09 -7.09428E-10  1.65075E-10 -2.71498E-11  3.56146E-12
 13.400  8.14444E-10 -4.13623E-10  1.13509E-10 -2.43741E-11  4.92934E-12  1.03354E-09 -4.87416E-10  1.16092E-10 -1.95467E-11  2.62265E-12
 13.500  5.45611E-10 -2.81233E-10  7.84865E-11 -1.70689E-11  3.46833E-12  6.92261E-10 -3.32455E-10  8.09969E-11 -1.39525E-11  1.91363E-12
 13.600  3.63088E-10 -1.89876E-10  5.38727E-11 -1.18657E-11  2.42350E-12  4.60611E-10 -2.25130E-10  5.60688E-11 -9.87548E-12  1.38376E-12
 13.700  2.40028E-10 -1.27301E-10  3.67093E-11 -8.18877E-12  1.68174E-12  3.04464E-10 -1.51366E-10  3.85129E-11 -6.93192E-12  9.91793E-13
 13.800  1.57635E-10 -8.47577E-11  2.48338E-11 -5.61043E-12  1.15899E-12  1.99935E-10 -1.01053E-10  2.62520E-11 -4.82606E-12  7.04712E-13
 13.900  1.02848E-10 -5.60440E-11  1.66799E-11 -3.81634E-12  7.93257E-13  1.30439E-10 -6.69904E-11  1.77594E-11 -3.33292E-12  4.96472E-13
 14.000  6.66667E-11 -3.68046E-11  1.11238E-11 -2.57746E-12  5.39224E-13  8.45493E-11 -4.41012E-11  1.19245E-11 -2.28349E-12  3.46842E-13
 14.100  4.29345E-11 -2.40060E-11  7.36616E-12 -1.72842E-12  3.64046E-13  5.44512E-11 -2.88327E-11  7.94763E-12 -1.55226E-12  2.40314E-13
 14.200  2.74729E-11 -1.55526E-11  4.84378E-12 -1.15091E-12  2.44110E-13  3.48430E-11 -1.87214E-11  5.25835E-12 -1.04703E-12  1.65154E-13
 14.300  1.74669E-11 -1.00084E-11  3.16303E-12 -7.61002E-13  1.62580E-13  2.21538E-11 -1.20735E-11  3.45390E-12 -7.00848E-13  1.12594E-13
 14.400  1.10347E-11 -6.39785E-12  2.05126E-12 -4.99692E-13  1.07551E-13  1.39966E-11 -7.73381E-12  2.25241E-12 -4.65587E-13  7.61550E-14
 14.500  6.92700E-12 -4.06277E-12  1.32116E-12 -3.25844E-13  7.06697E-14  8.78713E-12 -4.92083E-12  1.45846E-12 -3.06991E-13  5.11079E-14
 14.600  4.32105E-12 -2.56300E-12  8.45146E-13 -2.11022E-13  4.61255E-14  5.48200E-12 -3.11020E-12  9.37723E-13 -2.00925E-13  3.40349E-14
 14.700  2.67859E-12 -1.60632E-12  5.36991E-13 -1.35729E-13  2.99053E-14  3.39869E-12 -1.95283E-12  5.98712E-13 -1.30544E-13  2.24930E-14
 14.800  1.65010E-12 -1.00021E-12  3.38907E-13 -8.67094E-14  1.92603E-14  2.09401E-12 -1.21810E-12  3.79621E-13 -8.42027E-14  1.47534E-14
 14.900  1.01021E-12 -6.18782E-13  2.12468E-13 -5.50203E-14  1.23226E-14  1.28218E-12 -7.54861E-13  2.39053E-13 -5.39230E-14  9.60502E-15
 15.000  6.14646E-13 -3.80358E-13  1.32319E-13 -3.46785E-14  7.83203E-15  7.80265E-13 -4.64762E-13  1.49512E-13 -3.42869E-14  6.20722E-15
 15.100  3.71676E-13 -2.32311E-13  8.18623E-14 -2.17118E-14  4.94529E-15  4.71917E-13 -2.84311E-13  9.28784E-14 -2.16479E-14  3.98218E-15
 15.200  2.23378E-13 -1.40989E-13  5.03151E-14 -1.35035E-14  3.10218E-15  2.83682E-13 -1.72811E-13  5.73107E-14 -1.35727E-14  2.53630E-15
 15.300  1.33434E-13 -8.50262E-14  3.07242E-14 -8.34313E-15  1.93335E-15  1.69494E-13 -1.04371E-13  3.51284E-14 -8.45082E-15  1.60386E-15
 15.400  7.92239E-14 -5.09552E-14  1.86401E-14 -5.12103E-15  1.19711E-15  1.00657E-13 -6.26381E-14  2.13896E-14 -5.22568E-15  1.00703E-15
 15.500  4.67539E-14 -3.03464E-14  1.12362E-14 -3.12283E-15  7.36465E-16  5.94170E-14 -3.73559E-14  1.29387E-14 -3.20937E-15  6.27857E-16
 15.600  2.74261E-14 -1.79606E-14  6.72983E-15 -1.89198E-15  4.50165E-16  3.48632E-14 -2.21390E-14  7.77565E-15 -1.95772E-15  3.88726E-16
 15.700  1.59922E-14 -1.05644E-14  4.00517E-15 -1.13887E-15  2.73405E-16  2.03341E-14 -1.30391E-14  4.64261E-15 -1.18621E-15  2.39009E-16
 15.800  9.26949E-15 -6.17576E-15  2.36856E-15 -6.81149E-16  1.64994E-16  1.17894E-14 -7.63214E-15  2.75413E-15 -7.13947E-16  1.45948E-16
 15.900  5.34100E-15 -3.58816E-15  1.39190E-15 -4.04789E-16  9.89385E-17  6.79488E-15 -4.43981E-15  1.62338E-15 -4.26863E-16  8.85149E-17
 16.000  3.05926E-15 -2.07206E-15  8.12846E-16 -2.39028E-16  5.89537E-17  3.89315E-15 -2.56694E-15  9.50790E-16 -2.53541E-16  5.33202E-17
 16.100  1.74200E-15 -1.18930E-15  4.71732E-16 -1.40255E-16  3.49072E-17  2.21749E-15 -1.47507E-15  5.53344E-16 -1.49610E-16  3.19039E-17
 16.200  9.86111E-16 -6.78505E-16  2.72072E-16 -8.17798E-17  2.05394E-17  1.25566E-15 -8.42498E-16  3.20012E-16 -8.77098E-17  1.89623E-17
 16.300  5.54959E-16 -3.84767E-16  1.55950E-16 -4.73857E-17  1.20100E-17  7.06877E-16 -4.78295E-16  1.83913E-16 -5.10885E-17  1.11958E-17
 16.400  3.10501E-16 -2.16889E-16  8.88413E-17 -2.72857E-17  6.97885E-18  3.95625E-16 -2.69902E-16  1.05038E-16 -2.95668E-17  6.56681E-18
 16.500  1.72719E-16 -1.21530E-16  5.03017E-17 -1.56142E-17  4.03020E-18  2.20141E-16 -1.51395E-16  5.96194E-17 -1.70023E-17  3.82653E-18
 16.600  9.55213E-17 -6.76929E-17  2.83074E-17 -8.88000E-18  2.31302E-18  1.21788E-16 -8.44150E-17  3.36313E-17 -9.71514E-18  2.21526E-18
 16.700  5.25235E-17 -3.74827E-17  1.58336E-17 -5.01913E-18  1.31932E-18  6.69890E-17 -4.67892E-17  1.88552E-17 -5.51622E-18  1.27418E-18
 16.800  2.87150E-17 -2.06326E-17  8.80306E-18 -2.81952E-18  7.47915E-19  3.66358E-17 -2.57809E-17  1.05066E-17 -3.11244E-18  7.28176E-19
 16.900  1.56089E-17 -1.12908E-17  4.86486E-18 -1.57422E-18  4.21397E-19  1.99213E-17 -1.41217E-17  5.81896E-18 -1.74519E-18  4.13485E-19
 17.000  8.43634E-18 -6.14260E-18  2.67241E-18 -8.73595E-19  2.35982E-19  1.07709E-17 -7.68994E-18  3.20329E-18 -9.72471E-19  2.33300E-19
 17.100  4.53379E-18 -3.32234E-18  1.45928E-18 -4.81858E-19  1.31348E-19  5.79040E-18 -4.16309E-18  1.75278E-18 -5.38541E-19  1.30803E-19
 17.200  2.42271E-18 -1.78653E-18  7.92121E-19 -2.64181E-19  7.26668E-20  3.09529E-18 -2.24066E-18  9.53339E-19 -2.96402E-19  7.28750E-20
 17.300  1.28730E-18 -9.55125E-19  4.27434E-19 -1.43969E-19  3.99597E-20  1.64527E-18 -1.19897E-18  5.15428E-19 -1.62135E-19  4.03472E-20
 17.400  6.80155E-19 -5.07694E-19  2.29288E-19 -7.79889E-20  2.18419E-20  8.69600E-19 -6.37864E-19  2.77013E-19 -8.81487E-20  2.21991E-20
 17.500  3.57347E-19 -2.68315E-19  1.22275E-19 -4.19952E-20  1.18673E-20  4.57044E-19 -3.37396E-19  1.47998E-19 -4.76334E-20  1.21383E-20
 17.600  1.86696E-19 -1.40992E-19  6.48255E-20 -2.24791E-20  6.40937E-21  2.38869E-19 -1.77441E-19  7.86032E-20 -2.55844E-20  6.59616E-21
 17.700  9.69943E-20 -7.36653E-20  3.41678E-20 -1.19614E-20  3.44101E-21  1.24145E-19 -9.27848E-20  4.15019E-20 -1.36589E-20  3.56245E-21
 17.800  5.01110E-20 -3.82698E-20  1.79044E-20 -6.32725E-21  1.83643E-21  6.41617E-20 -4.82412E-20  2.17844E-20 -7.24851E-21  1.91224E-21
 17.900  2.57455E-20 -1.97688E-20  9.32782E-21 -3.32728E-21  9.74285E-22  3.29765E-20 -2.49394E-20  1.13680E-20 -3.82366E-21  1.02019E-21
 18.000  1.31540E-20 -1.01542E-20  4.83158E-21 -1.73945E-21  5.13844E-22  1.68547E-20 -1.28200E-20  5.89785E-21 -2.00503E-21  5.40978E-22
 18.100  6.68357E-21 -5.18629E-21  2.48825E-21 -9.04046E-22  2.69411E-22  8.56706E-21 -6.55283E-21  3.04215E-21 -1.04516E-21  2.85132E-22
 18.200  3.37721E-21 -2.63404E-21  1.27410E-21 -4.67127E-22  1.40426E-22  4.33055E-21 -3.33058E-21  1.56011E-21 -5.41591E-22  1.49380E-22
 18.300  1.69713E-21 -1.33030E-21  6.48668E-22 -2.39967E-22  7.27674E-23  2.17701E-21 -1.68332E-21  7.95468E-22 -2.78997E-22  7.77903E-23
 18.400  8.48168E-22 -6.68105E-22  3.28369E-22 -1.22560E-22  3.74876E-23  1.08840E-21 -8.46008E-22  4.03269E-22 -1.42882E-22  4.02679E-23
 18.500  4.21567E-22 -3.33668E-22  1.65283E-22 -6.22354E-23  1.92003E-23  5.41171E-22 -4.22818E-22  2.03272E-22 -7.27461E-23  2.07205E-23
 18.600  2.08389E-22 -1.65717E-22  8.27230E-23 -3.14210E-23  9.77695E-24  2.67611E-22 -2.10139E-22  1.01878E-22 -3.68221E-23  1.05989E-23
 18.700  1.02450E-22 -8.18473E-23  4.11686E-23 -1.57727E-23  4.94975E-24  1.31614E-22 -1.03859E-22  5.07704E-23 -1.85302E-23  5.38949E-24
 18.800  5.00932E-23 -4.02010E-23  2.03729E-23 -7.87233E-24  2.49146E-24  6.43770E-23 -5.10471E-23  2.51579E-23 -9.27120E-24  2.72440E-24
 18.900  2.43605E-23 -1.96367E-23  1.00253E-23 -3.90677E-24  1.24687E-24  3.13184E-23 -2.49513E-23  1.23959E-23 -4.61191E-24  1.36911E-24
 19.000  1.17825E-23 -9.53909E-24  4.90567E-24 -1.92778E-24  6.20426E-25  1.51535E-23 -1.21287E-23  6.07341E-24 -2.28099E-24  6.84004E-25
 19.100  5.66809E-24 -4.60847E-24  2.38709E-24 -9.45859E-25  3.06952E-25  7.29242E-24 -5.86334E-24  2.95898E-24 -1.12169E-24  3.39735E-25
 19.200  2.71200E-24 -2.21423E-24  1.15509E-24 -4.61460E-25  1.50996E-25  3.49048E-24 -2.81895E-24  1.43355E-24 -5.48446E-25  1.67762E-25
 19.300  1.29062E-24 -1.05807E-24  5.55826E-25 -2.23865E-25  7.38559E-26  1.66171E-24 -1.34787E-24  6.90640E-25 -2.66635E-25  8.23610E-26
 19.400  6.10904E-25 -5.02841E-25  2.65980E-25 -1.07991E-25  3.59196E-26  7.86844E-25 -6.40967E-25  3.30877E-25 -1.28892E-25  4.02009E-26
 19.500  2.87616E-25 -2.37675E-25  1.26576E-25 -5.18023E-26  1.73705E-26  3.70586E-25 -3.03146E-25  1.57639E-25 -6.19544E-26  1.95093E-26
 19.600  1.34687E-25 -1.11731E-25  5.99037E-26 -2.47100E-26  8.35286E-27  1.73604E-25 -1.42594E-25  7.46873E-26 -2.96114E-26  9.41346E-27
 19.700  6.27355E-26 -5.22405E-26  2.81941E-26 -1.17210E-26  3.99396E-27  8.08920E-26 -6.67103E-26  3.51904E-26 -1.40732E-26  4.51610E-27
 19.800  2.90657E-26 -2.42935E-26  1.31969E-26 -5.52879E-27  1.89899E-27  3.74914E-26 -3.10405E-26  1.64893E-26 -6.65094E-27  2.15423E-27
  67 148 199   0.100
  0.000  5.80591E-02 -3.25833E-16 -4.26742E-16 -4.25315E-16 -2.23156E-15  1.08080E-01 -5.89602E-16 -8.32667E-16 -7.25538E-16 -2.17434E-15
  0.100  5.81302E-02 -2.13773E-05 -5.42076E-09 -6.54785E-13 -2.86098E-17  1.07865E-01  9.53697E-06  1.96778E-09  4.95392E-13 -2.38892E-15
  0.200  5.83425E-02 -8.43270E-05 -8.58253E-08 -4.14798E-11 -3.15566E-14  1.07226E-01  3.74708E-05  3.11275E-08  3.14404E-11 -1.91686E-15
  0.300  5.86923E-02 -1.85368E-04 -4.26952E-07 -4.65996E-10 -7.66270E-13  1.06194E-01  8.18238E-05  1.54618E-07  3.52632E-10 -5.13689E-14
  0.400  5.91736E-02 -3.18910E-04 -1.31675E-06 -2.56819E-09 -7.44498E-12  1.04812E-01  1.39473E-04  4.75847E-07  1.93899E-09 -5.36262E-13
  0.500  5.97776E-02 -4.77562E-04 -3.11524E-06 -9.55667E-09 -4.28137E-11  1.03141E-01  2.06391E-04  1.12271E-06  7.19561E-09 -3.31047E-12
  0.600  6.04931E-02 -6.52530E-04 -6.21673E-06 -2.76838E-08 -1.76224E-10  1.01250E-01  2.77958E-04  2.23283E-06  2.07807E-08 -1.48621E-11
  0.700  6.13059E-02 -8.34093E-04 -1.10079E-05 -6.73527E-08 -5.74321E-10  9.92183E-02  3.49302E-04  3.93738E-06  5.03965E-08 -5.33014E-11
  0.800  6.21991E-02 -1.01212E-03 -1.78260E-05 -1.44005E-07 -1.57418E-09  9.71251E-02  4.15654E-04  6.34489E-06  1.07412E-07 -1.61846E-10
  0.900  6.31537E-02 -1.17662E-03 -2.69212E-05 -2.78607E-07 -3.77256E-09  9.50496E-02  4.72679E-04  9.52670E-06  2.07207E-07 -4.31918E-10
  1.000  6.41483E-02 -1.31823E-03 -3.84252E-05 -4.97590E-07 -8.11701E-09  9.30658E-02  5.16760E-04  1.35051E-05  3.69170E-07 -1.03904E-09
  1.100  6.51603E-02 -1.42869E-03 -5.23310E-05 -8.32164E-07 -1.59773E-08  9.12384E-02  5.45209E-04  1.82448E-05  6.16320E-07 -2.29423E-09
  1.200  6.61663E-02 -1.50129E-03 -6.84824E-05 -1.31697E-06 -2.91708E-08  8.96207E-02  5.56408E-04  2.36492E-05  9.74570E-07 -4.71212E-09
  1.300  6.71432E-02 -1.53113E-03 -8.65754E-05 -1.98814E-06 -4.99158E-08  8.82522E-02  5.49853E-04  2.95598E-05  1.47169E-06 -9.09562E-09
  1.400  6.80689E-02 -1.51534E-03 -1.06170E-04 -2.88088E-06 -8.06903E-08  8.71578E-02  5.26126E-04  3.57600E-05  2.13602E-06 -1.66343E-08
  1.500  6.89232E-02 -1.45320E-03 -1.26712E-04 -4.02675E-06 -1.23983E-07  8.63469E-02  4.86789E-04  4.19830E-05  2.99504E-06 -2.90122E-08
  1.600  6.96890E-02 -1.34608E-03 -1.47557E-04 -5.45079E-06 -1.81941E-07  8.58143E-02  4.34220E-04  4.79212E-05  4.07383E-06 -4.85196E-08
  1.700  7.03523E-02 -1.19737E-03 -1.68007E-04 -7.16882E-06 -2.55920E-07  8.55416E-02  3.71410E-04  5.32396E-05  5.39352E-06 -7.81613E-08
  1.800  7.09032E-02 -1.01221E-03 -1.87339E-04 -9.18500E-06 -3.45987E-07  8.54987E-02  3.01739E-04  5.75898E-05  6.96976E-06 -1.21758E-07
  1.900  7.13362E-02 -7.97241E-04 -2.04838E-04 -1.14898E-05 -4.50397E-07  8.56465E-02  2.28744E-04  6.06255E-05  8.81133E-06 -1.84033E-07
  2.000  7.16497E-02 -5.60239E-04 -2.19830E-04 -1.40587E-05 -5.65115E-07  8.59392E-02  1.55902E-04  6.20187E-05  1.09189E-05 -2.70685E-07
  2.100  7.18465E-02 -3.09720E-04 -2.31702E-04 -1.68511E-05 -6.83428E-07  8.63276E-02  8.64379E-05  6.14757E-05  1.32841E-05 -3.88440E-07
  2.200  7.19329E-02 -5.45438E-05 -2.39931E-04 -1.98105E-05 -7.95692E-07  8.67617E-02  2.31609E-05  5.87514E-05  1.58891E-05 -5.45080E-07
  2.300  7.19184E-02  1.96484E-04 -2.44097E-04 -2.28648E-05 -8.89269E-07  8.71934E-02 -3.16531E-05  5.36631E-05  1.87067E-05 -7.49456E-07
  2.400  7.18151E-02  4.34990E-04 -2.43902E-04 -2.59268E-05 -9.48645E-07  8.75790E-02 -7.63396E-05  4.61001E-05  2.17011E-05 -1.01145E-06
  2.500  7.16369E-02  6.53381E-04 -2.39177E-04 -2.88958E-05 -9.55757E-07  8.78814E-02 -1.09877E-04  3.60303E-05  2.48301E-05 -1.34190E-06
  2.600  7.13992E-02  8.45135E-04 -2.29893E-04 -3.16590E-05 -8.90480E-07  8.80716E-02 -1.31878E-04  2.35009E-05  2.80477E-05 -1.75246E-06
  2.700  7.11178E-02  1.00505E-03 -2.16171E-04 -3.40930E-05 -7.31259E-07  8.81300E-02 -1.42535E-04  8.63423E-06  3.13078E-05 -2.25534E-06
  2.800  7.08086E-02  1.12943E-03 -1.98283E-04 -3.60661E-05 -4.55800E-07  8.80467E-02 -1.42532E-04 -8.38270E-06  3.45695E-05 -2.86297E-06
  2.900  7.04871E-02  1.21619E-03 -1.76658E-04 -3.74400E-05 -4.17812E-08  8.78221E-02 -1.32924E-04 -2.73149E-05  3.78026E-05 -3.58744E-06
  3.000  7.01679E-02  1.26497E-03 -1.51883E-04 -3.80725E-05  5.32485E-07  8.74654E-02 -1.14985E-04 -4.79010E-05  4.09929E-05 -4.43986E-06
  3.100  6.98641E-02  1.27707E-03 -1.24694E-04 -3.78203E-05  1.28749E-06  8.69943E-02 -9.00455E-05 -6.98777E-05  4.41484E-05 -5.42941E-06
  3.200  6.95872E-02  1.25544E-03 -9.59722E-05 -3.65422E-05  2.24211E-06  8.64329E-02 -5.93159E-05 -9.30067E-05  4.73036E-05 -6.56231E-06
  3.300  6.93463E-02  1.20456E-03 -6.67212E-05 -3.41031E-05  3.41328E-06  8.58098E-02 -2.37159E-05 -1.17099E-04  5.05225E-05 -7.84061E-06
  3.400  6.91481E-02  1.13023E-03 -3.80448E-05 -3.03789E-05  4.81583E-06  8.51556E-02  1.62783E-05 -1.42034E-04  5.38993E-05 -9.26084E-06
  3.500  6.89958E-02  1.03939E-03 -1.11103E-05 -2.52616E-05  6.46234E-06  8.45003E-02  6.07546E-05 -1.67776E-04  5.75569E-05 -1.08128E-05
  3.600  6.88893E-02  9.39814E-04  1.28947E-05 -1.86657E-05  8.36301E-06  8.38710E-02  1.10440E-04 -1.94371E-04  6.16407E-05 -1.24782E-05
  3.700  6.88241E-02  8.39806E-04  3.28142E-05 -1.05346E-05  1.05255E-05  8.32891E-02  1.66718E-04 -2.21946E-04  6.63110E-05 -1.42299E-05
  3.800  6.87912E-02  7.47828E-04  4.75811E-05 -8.47184E-07  1.29543E-05  8.27684E-02  2.31574E-04 -2.50680E-04  7.17315E-05 -1.60314E-05
  3.900  6.87770E-02  6.72126E-04  5.62765E-05  1.03755E-05  1.56507E-05  8.23134E-02  3.07478E-04 -2.80780E-04  7.80550E-05 -1.78366E-05
  4.000  6.87626E-02  6.20334E-04  5.81884E-05  2.30651E-05  1.86112E-05  8.19182E-02  3.97192E-04 -3.12437E-04  8.54092E-05 -1.95909E-05
  4.100  6.87246E-02  5.99092E-04  5.28633E-05  3.71014E-05  2.18271E-05  8.15660E-02  5.03522E-04 -3.45780E-04  9.38807E-05 -2.12322E-05
  4.200  6.86352E-02  6.13683E-04  4.01481E-05  5.23105E-05  2.52828E-05  8.12297E-02  6.29026E-04 -3.80834E-04  1.03501E-04 -2.26934E-05
  4.300  6.84631E-02  6.67726E-04  2.02166E-05  6.84647E-05  2.89548E-05  8.08733E-02  7.75710E-04 -4.17473E-04  1.14237E-04 -2.39053E-05
  4.400  6.81744E-02  7.62939E-04 -6.42202E-06  8.52858E-05  3.28105E-05  8.04529E-02  9.44717E-04 -4.55395E-04  1.25979E-04 -2.47999E-05
  4.500  6.77344E-02  8.98981E-04 -3.89344E-05  1.02451E-04  3.68071E-05  7.99203E-02  1.13607E-03 -4.94098E-04  1.38543E-04 -2.53144E-05
  4.600  6.71091E-02  1.07341E-03 -7.61958E-05  1.19603E-04  4.08913E-05  7.92247E-02  1.34847E-03 -5.32880E-04  1.51670E-04 -2.53954E-05
  4.700  6.62666E-02  1.28177E-03 -1.16841E-04  1.36360E-04  4.49993E-05  7.83169E-02  1.57918E-03 -5.70860E-04  1.65036E-04 -2.50025E-05
  4.800  6.51795E-02  1.51773E-03 -1.59335E-04  1.52331E-04  4.90578E-05  7.71515E-02  1.82402E-03 -6.07012E-04  1.78266E-04 -2.41120E-05
  4.900  6.38264E-02  1.77341E-03 -2.02048E-04  1.67131E-04  5.29856E-05  7.56907E-02  2.07746E-03 -6.40216E-04  1.90951E-04 -2.27191E-05
  5.000  6.21931E-02  2.03978E-03 -2.43349E-04  1.80398E-04  5.66961E-05  7.39062E-02  2.33287E-03 -6.69327E-04  2.02671E-04 -2.08399E-05
  5.100  6.02743E-02  2.30708E-03 -2.81685E-04  1.91808E-04  6.01006E-05  7.17811E-02  2.58278E-03 -6.93241E-04  2.13018E-04 -1.85115E-05
  5.200  5.80739E-02  2.56534E-03 -3.15670E-04  2.01087E-04  6.31117E-05  6.93118E-02  2.81933E-03 -7.10972E-04  2.21618E-04 -1.57908E-05
  5.300  5.56052E-02  2.80493E-03 -3.44146E-04  2.08027E-04  6.56476E-05  6.65079E-02  3.03466E-03 -7.21717E-04  2.28151E-04 -1.27527E-05
  5.400  5.28910E-02  3.01696E-03 -3.66243E-04  2.12493E-04  6.76361E-05  6.33919E-02  3.22138E-03 -7.24910E-04  2.32372E-04 -9.48621E-06
  5.500  4.99624E-02  3.19383E-03 -3.81404E-04  2.14426E-04  6.90182E-05  5.99983E-02  3.37298E-03 -7.20267E-04  2.34121E-04 -6.09018E-06
  5.600  4.68575E-02  3.32949E-03 -3.89406E-04  2.13847E-04  6.97514E-05  5.63719E-02  3.48423E-03 -7.07801E-04  2.33330E-04 -2.66822E-06
  5.700  4.36202E-02  3.41973E-03 -3.90342E-04  2.10853E-04  6.98123E-05  5.25655E-02  3.55145E-03 -6.87824E-04  2.30027E-04  6.76582E-07
  5.800  4.02977E-02  3.46233E-03 -3.84601E-04  2.05609E-04  6.91976E-05  4.86370E-02  3.57268E-03 -6.60929E-04  2.24330E-04  3.84688E-06
  5.900  3.69392E-02  3.45704E-03 -3.72817E-04  1.98342E-04  6.79248E-05  4.46473E-02  3.54778E-03 -6.27949E-04  2.16437E-04  6.75579E-06
  6.000  3.35931E-02  3.40550E-03 -3.55822E-04  1.89323E-04  6.60310E-05  4.06571E-02  3.47838E-03 -5.89908E-04  2.06613E-04  9.33079E-06
  6.100  3.03059E-02  3.31104E-03 -3.34578E-04  1.78858E-04  6.35714E-05  3.67246E-02  3.36771E-03 -5.47961E-04  1.95175E-04  1.15166E-05
  6.200  2.71199E-02  3.17840E-03 -3.10117E-04  1.67273E-04  6.06162E-05  3.29031E-02  3.22039E-03 -5.03326E-04  1.82473E-04  1.32769E-05
  6.300  2.40722E-02  3.01338E-03 -2.83481E-04  1.54898E-04  5.72474E-05  2.92398E-02  3.04210E-03 -4.57222E-04  1.68869E-04  1.45947E-05
  6.400  2.11938E-02  2.82249E-03 -2.55669E-04  1.42055E-04  5.35545E-05  2.57737E-02  2.83925E-03 -4.10812E-04  1.54724E-04  1.54717E-05
  6.500  1.85087E-02  2.61257E-03 -2.27593E-04  1.29046E-04  4.96307E-05  2.25355E-02  2.61859E-03 -3.65151E-04  1.40381E-04  1.59268E-05
  6.600  1.60338E-02  2.39045E-03 -2.00045E-04  1.16143E-04  4.55691E-05  1.95471E-02  2.38691E-03 -3.21150E-04  1.26150E-04  1.59930E-05
  6.700  1.37794E-02  2.16264E-03 -1.73674E-04  1.03586E-04  4.14585E-05  1.68218E-02  2.15070E-03 -2.79550E-04  1.12304E-04  1.57147E-05
  6.800  1.17492E-02  1.93506E-03 -1.48984E-04  9.15695E-05  3.73807E-05  1.43650E-02  1.91588E-03 -2.40914E-04  9.90675E-05  1.51442E-05
  6.900  9.94112E-03  1.71288E-03 -1.26328E-04  8.02503E-05  3.34080E-05  1.21748E-02  1.68761E-03 -2.05623E-04  8.66169E-05  1.43380E-05
  7.000  8.34817E-03  1.50039E-03 -1.05919E-04  6.97413E-05  2.96013E-05  1.02432E-02  1.47016E-03 -1.73887E-04  7.50798E-05  1.33540E-05
  7.100  6.95948E-03  1.30090E-03 -8.78481E-05  6.01162E-05  2.60095E-05  8.55740E-03  1.26686E-03 -1.45767E-04  6.45378E-05  1.22481E-05
  7.200  5.76113E-03  1.11684E-03 -7.21034E-05  5.14127E-05  2.26687E-05  7.10094E-03  1.08005E-03 -1.21195E-04  5.50304E-05  1.10724E-05
  7.300  4.73719E-03  9.49687E-04 -5.85908E-05  4.36370E-05  1.96032E-05  5.85475E-03  9.11176E-04 -1.00003E-04  4.65611E-05  9.87265E-06
  7.400  3.87055E-03  8.00160E-04 -4.71568E-05  3.67694E-05  1.68259E-05  4.79836E-03  7.60871E-04 -8.19484E-05  3.91039E-05  8.68796E-06
  7.500  3.14372E-03  6.68274E-04 -3.76088E-05  3.07694E-05  1.43398E-05  3.91077E-03  6.29049E-04 -6.67403E-05  3.26094E-05  7.54968E-06
  7.600  2.53942E-03  5.53491E-04 -2.97332E-05  2.55811E-05  1.21398E-05  3.17126E-03  5.15054E-04 -5.40630E-05  2.70116E-05  6.48148E-06
  7.700  2.04112E-03  4.54844E-04 -2.33106E-05  2.11382E-05  1.02138E-05  2.56000E-03  4.17800E-04 -4.35949E-05  2.22336E-05  5.49980E-06
  7.800  1.63340E-03  3.71069E-04 -1.81269E-05  1.73688E-05  8.54477E-06  2.05844E-03  3.35895E-04 -3.50231E-05  1.81927E-05  4.61450E-06
  7.900  1.30219E-03  3.00718E-04 -1.39821E-05  1.41983E-05  7.11222E-06  1.64970E-03  2.67770E-04 -2.80551E-05  1.48046E-05  3.82977E-06
  8.000  1.03490E-03  2.42258E-04 -1.06954E-05  1.15533E-05  5.89358E-06  1.31863E-03  2.11776E-04 -2.24251E-05  1.19867E-05  3.14520E-06
  8.100  8.20477E-04  1.94152E-04 -8.10788E-06  9.36329E-06  4.86546E-06  1.05196E-03  1.66273E-04 -1.78985E-05  9.66059E-06  2.55682E-06
  8.200  6.49372E-04  1.54923E-04 -6.08358E-06  7.56273E-06  4.00465E-06  8.38161E-04  1.29694E-04 -1.42727E-05  7.75376E-06  2.05809E-06
  8.300  5.13448E-04  1.23194E-04 -4.50833E-06  6.09176E-06  3.28884E-06  6.67445E-04  1.00588E-04 -1.13759E-05  6.20060E-06  1.64083E-06
  8.400  4.05875E-04  9.77195E-05 -3.28823E-06  4.89696E-06  2.69721E-06  5.31564E-04  7.76502E-05 -9.06527E-06  4.94286E-06  1.29598E-06
  8.500  3.20988E-04  7.73973E-05 -2.34722E-06  3.93139E-06  2.21077E-06  4.23665E-04  5.97340E-05 -7.22346E-06  3.92966E-06  1.01425E-06
  8.600  2.54143E-04  6.12738E-05 -1.62456E-06  3.15450E-06  1.81252E-06  3.38118E-04  4.58548E-05 -5.75539E-06  3.11725E-06  7.86559E-07
  8.700  2.01569E-04  4.85380E-05 -1.07225E-06  2.53170E-06  1.48758E-06  2.70340E-04  3.51827E-05 -4.58463E-06  2.46849E-06  6.04419E-07
  8.800  1.60237E-04  3.85119E-05 -6.52645E-07  2.03388E-06  1.22306E-06  2.16636E-04  2.70302E-05 -3.65020E-06  1.95222E-06  4.60112E-07
  8.900  1.27727E-04  3.06368E-05 -3.36406E-07  1.63681E-06  1.00799E-06  1.74046E-04  2.08371E-05 -2.90364E-06  1.54257E-06  3.46820E-07
  9.000  1.02126E-04  2.44581E-05 -1.00703E-07  1.32053E-06  8.33152E-07  1.40216E-04  1.61531E-05 -2.30653E-06  1.21831E-06  2.58651E-07
  9.100  8.19242E-05  1.96103E-05  7.22260E-08  1.06872E-06  6.90884E-07  1.13284E-04  1.26215E-05 -1.82845E-06  9.62097E-07  1.90614E-07
  9.200  6.59415E-05  1.58023E-05  1.96227E-07  8.68168E-07  5.74880E-07  9.17842E-05  9.96268E-06 -1.44528E-06  7.59938E-07  1.38555E-07
  9.300  5.32552E-05  1.28042E-05  2.82134E-07  7.08250E-07  4.80003E-07  7.45647E-05  7.95993E-06 -1.13790E-06  6.00577E-07  9.90670E-08
  9.400  4.31477E-05  1.04357E-05  3.38456E-07  5.80457E-07  4.02099E-07  6.07239E-05  6.44692E-06 -8.91129E-07  4.75022E-07  6.93912E-08
  9.500  3.50612E-05  8.55601E-06  3.71908E-07  4.78025E-07  3.37835E-07  4.95565E-05  5.29716E-06 -6.92911E-07  3.76122E-07  4.73194E-08
  9.600  2.85632E-05  7.05598E-06  3.87806E-07  3.95597E-07  2.84550E-07  4.05111E-05  4.41525E-06 -5.33676E-07  2.98215E-07  3.11002E-08
  9.700  2.33182E-05  5.85109E-06  3.90374E-07  3.28946E-07  2.40131E-07  3.31566E-05  3.72986E-06 -4.05824E-07  2.36824E-07  1.93544E-08
  9.800  1.90657E-05  4.87615E-06  3.82973E-07  2.74749E-07  2.02905E-07  2.71554E-05  3.18814E-06 -3.03327E-07  1.88422E-07  1.10032E-08
  9.900  1.56032E-05  4.08102E-06  3.68279E-07  2.30404E-07  1.71549E-07  2.22424E-05  2.75132E-06 -2.21395E-07  1.50233E-07  5.20640E-09
 10.000  1.27732E-05  3.42716E-06  3.48426E-07  1.93875E-07  1.45020E-07  1.82091E-05  2.39128E-06 -1.56216E-07  1.20072E-07  1.31278E-09
 10.100  1.04525E-05  2.88506E-06  3.25114E-07  1.63575E-07  1.22491E-07  1.48909E-05  2.08787E-06 -1.04743E-07  9.62217E-08 -1.18059E-09
 10.200  8.54437E-06  2.43209E-06  2.99694E-07  1.38270E-07  1.03303E-07  1.21567E-05  1.82689E-06 -6.45204E-08  7.73319E-08 -2.66030E-09
 10.300  6.97263E-06  2.05093E-06  2.73236E-07  1.16999E-07  8.69311E-08  9.90212E-06  1.59850E-06 -3.35507E-08  6.23414E-08 -3.42183E-09
 10.400  5.67666E-06  1.72829E-06  2.46584E-07  9.90142E-08  7.29505E-08  8.04297E-06  1.39601E-06 -1.01879E-08  5.04163E-08 -3.68924E-09
 10.500  4.60797E-06  1.45394E-06  2.20394E-07  8.37332E-08  6.10142E-08  6.51117E-06  1.21494E-06  6.94066E-09  4.09019E-08 -3.63072E-09
 10.600  3.72738E-06  1.21995E-06  1.95169E-07  7.07006E-08  5.08356E-08  5.25107E-06  1.05234E-06  1.89939E-08  3.32843E-08 -3.37063E-09
 10.700  3.00301E-06  1.02009E-06  1.71281E-07  5.95571E-08  4.21740E-08  4.21690E-06  9.06242E-07  2.69588E-08  2.71612E-08 -2.99917E-09
 10.800  2.40862E-06  8.49387E-07  1.48996E-07  5.00169E-08  3.48251E-08  3.37074E-06  7.75311E-07  3.16799E-08  2.22178E-08 -2.57999E-09
 10.900  1.92247E-06  7.03827E-07  1.28487E-07  4.18496E-08  2.86128E-08  2.68096E-06  6.58543E-07  3.38802E-08  1.82082E-08 -2.15634E-09
 11.000  1.52643E-06  5.80059E-07  1.09850E-07  3.48663E-08  2.33842E-08  2.12107E-06  5.55096E-07  3.41751E-08  1.49407E-08 -1.75600E-09
 11.100  1.20527E-06  4.75244E-07  9.31152E-08  2.89095E-08  1.90049E-08  1.66878E-06  4.64174E-07  3.30837E-08  1.22659E-08 -1.39521E-09
 11.200  9.46160E-07  3.86925E-07  7.82598E-08  2.38453E-08  1.53566E-08  1.30534E-06  3.84963E-07  3.10370E-08  1.00674E-08 -1.08191E-09
 11.300  7.38275E-07  3.12938E-07  6.52182E-08  1.95582E-08  1.23349E-08  1.01494E-06  3.16599E-07  2.83862E-08  8.25416E-09 -8.18199E-10
 11.400  5.72482E-07  2.51360E-07  5.38921E-08  1.59469E-08  9.84732E-09  7.84282E-07  2.58172E-07  2.54105E-08  6.75492E-09 -6.02307E-10
 11.500  4.41090E-07  2.00470E-07  4.41591E-08  1.29221E-08  7.81246E-09  6.02228E-07  2.08735E-07  2.23249E-08  5.51348E-09 -4.30105E-10
 11.600  3.37642E-07  1.58724E-07  3.58814E-08  1.04039E-08  6.15886E-09  4.59466E-07  1.67323E-07  1.92885E-08  4.48513E-09 -2.96208E-10
 11.700  2.56747E-07  1.24746E-07  2.89126E-08  8.32128E-09  4.82414E-09  3.48265E-07  1.32984E-07  1.64131E-08  3.63396E-09 -1.94767E-10
 11.800  1.93927E-07  9.73099E-08  2.31041E-08  6.61067E-09  3.75422E-09  2.62239E-07  1.04794E-07  1.37711E-08  2.93076E-09 -1.20018E-10
 11.900  1.45488E-07  7.53369E-08  1.83104E-08  5.21568E-09  2.90253E-09  1.96150E-07  8.18817E-08  1.14033E-08  2.35150E-09 -6.66179E-11
 12.000  1.08406E-07  5.78845E-08  1.43924E-08  4.08645E-09  2.22934E-09  1.45736E-07  6.34423E-08  9.32609E-09  1.87620E-09 -2.98427E-11
 12.100  8.02242E-08  4.41377E-08  1.12206E-08  3.17920E-09  1.70101E-09  1.07552E-07  4.87463E-08  7.53779E-09  1.48801E-09 -5.66539E-12
 12.200  5.89619E-08  3.34003E-08  8.67701E-09  2.45587E-09  1.28933E-09  7.88378E-08  3.71456E-08  6.02404E-09  1.17270E-09  9.23609E-12
 12.300  4.30377E-08  2.50835E-08  6.65612E-09  1.88360E-09  9.70826E-10  5.73998E-08  2.80744E-08  4.76239E-09  9.18117E-10  1.75225E-11
 12.400  3.11990E-08  1.86952E-08  5.06517E-09  1.43436E-09  7.26174E-10  4.15094E-08  2.10468E-08  3.72582E-09  7.13908E-10  2.12651E-11
 12.500  2.24620E-08  1.38290E-08  3.82399E-09  1.08445E-09  5.39591E-10  2.98157E-08  1.56521E-08  2.88551E-09  5.51238E-10  2.20314E-11
 12.600  1.60612E-08  1.01527E-08  2.86428E-09  8.14023E-10  3.98306E-10  2.12721E-08  1.15479E-08  2.21289E-09  4.22598E-10  2.09718E-11
 12.700  1.14062E-08  7.39821E-09  2.12872E-09  6.06660E-10  2.92081E-10  1.50747E-08  8.45315E-09  1.68091E-09  3.21630E-10  1.89038E-11
 12.800  8.04534E-09  5.35107E-09  1.56983E-09  4.48889E-10  2.12780E-10  1.06114E-08  6.13976E-09  1.26498E-09  2.42991E-10  1.63857E-11
 12.900  5.63642E-09  3.84190E-09  1.14880E-09  3.29780E-10  1.53997E-10  7.41975E-09  4.42526E-09  9.43348E-10  1.82223E-10  1.37805E-11
 13.000  3.92221E-09  2.73820E-09  8.34308E-10  2.40552E-10  1.10726E-10  5.15361E-09  3.16531E-09  6.97258E-10  1.35636E-10  1.13087E-11
 13.100  2.71107E-09  1.93740E-09  6.01343E-10  1.74223E-10  7.90974E-11  3.55592E-09  2.24707E-09  5.10889E-10  1.00207E-10  9.09031E-12
 13.200  1.86143E-09  1.36092E-09  4.30191E-10  1.25292E-10  5.61377E-11  2.43738E-09  1.58335E-09  3.71146E-10  7.34801E-11  7.17700E-12
 13.300  1.26960E-09  9.49139E-10  3.05471E-10  8.94696E-11  3.95858E-11  1.65974E-09  1.10745E-09  2.67372E-10  5.34795E-11  5.57670E-12
 13.400  8.60238E-10  6.57253E-10  2.15316E-10  6.34420E-11  2.77351E-11  1.12284E-09  7.68947E-10  1.91030E-10  3.86329E-11  4.27114E-12
 13.500  5.79048E-10  4.51923E-10  1.50662E-10  4.46726E-11  1.93079E-11  7.54697E-10  5.30054E-10  1.35381E-10  2.77006E-11  3.22819E-12
 13.600  3.87234E-10  3.08567E-10  1.04660E-10  3.12380E-11  1.33557E-11  5.03983E-10  3.62766E-10  9.51793E-11  1.97148E-11  2.41010E-12
 13.700  2.57284E-10  2.09224E-10  7.21831E-11  2.16929E-11  9.17992E-12  3.34399E-10  2.46516E-10  6.63903E-11  1.39278E-11  1.77871E-12
 13.800  1.69843E-10  1.40887E-10  4.94297E-11  1.49609E-11  6.26991E-12  2.20463E-10  1.66343E-10  4.59508E-11  9.76721E-12  1.29851E-12
 13.900  1.11402E-10  9.42223E-11  3.36097E-11  1.02476E-11  4.25545E-12  1.44425E-10  1.11463E-10  3.15610E-11  6.79951E-12  9.38172E-13
 14.000  7.26058E-11  6.25863E-11  2.26929E-11  6.97153E-12  2.87014E-12  9.40160E-11  7.41736E-11  2.15141E-11  4.69915E-12  6.71142E-13
 14.100  4.70213E-11  4.12923E-11  1.52155E-11  4.71072E-12  1.92374E-12  6.08174E-11  4.90216E-11  1.45562E-11  3.22415E-12  4.75561E-13
 14.200  3.02608E-11  2.70612E-11  1.01316E-11  3.16166E-12  1.28140E-12  3.90964E-11  3.21788E-11  9.77613E-12  2.19626E-12  3.33888E-13
 14.300  1.93528E-11  1.76169E-11  6.70013E-12  2.10780E-12  8.48259E-13  2.49771E-11  2.09807E-11  6.51797E-12  1.48540E-12  2.32339E-13
 14.400  1.22999E-11  1.13931E-11  4.40076E-12  1.39587E-12  5.58071E-13  1.58584E-11  1.35882E-11  4.31440E-12  9.97510E-13  1.60281E-13
 14.500  7.76905E-12  7.31980E-12  2.87099E-12  9.18281E-13  3.64903E-13  1.00070E-11  8.74209E-12  2.83546E-12  6.65154E-13  1.09642E-13
 14.600  4.87707E-12  4.67222E-12  1.86044E-12  6.00119E-13  2.37139E-13  6.27607E-12  5.58733E-12  1.85035E-12  4.40431E-13  7.43861E-14
 14.700  3.04292E-12  2.96301E-12  1.19756E-12  3.89624E-13  1.53170E-13  3.91225E-12  3.54771E-12  1.19906E-12  2.89605E-13  5.00615E-14
 14.800  1.88702E-12  1.86700E-12  7.65773E-13  2.51313E-13  9.83335E-14  2.42401E-12  2.23805E-12  7.71634E-13  1.89115E-13  3.34259E-14
 14.900  1.16313E-12  1.16890E-12  4.86452E-13  1.61049E-13  6.27472E-14  1.49288E-12  1.40277E-12  4.93167E-13  1.22646E-13  2.21458E-14
 15.000  7.12633E-13  7.27194E-13  3.06999E-13  1.02540E-13  3.97980E-14  9.13923E-13  8.73606E-13  3.13051E-13  7.89978E-14  1.45609E-14
 15.100  4.34008E-13  4.49550E-13  1.92489E-13  6.48677E-14  2.50906E-14  5.56164E-13  5.40603E-13  1.97378E-13  5.05387E-14  9.50213E-15
 15.200  2.62748E-13  2.76170E-13  1.19914E-13  4.07739E-14  1.57236E-14  3.36447E-13  3.32424E-13  1.23615E-13  3.21144E-14  6.15518E-15
 15.300  1.58126E-13  1.68602E-13  7.42234E-14  2.54664E-14  9.79476E-15  2.02332E-13  2.03130E-13  7.69043E-14  2.02704E-14  3.95814E-15
 15.400  9.46021E-14  1.02295E-13  4.56496E-14  1.58050E-14  6.06517E-15  1.20964E-13  1.23351E-13  4.75296E-14  1.27095E-14  2.52704E-15
 15.500  5.62660E-14  6.16823E-14  2.78981E-14  9.74721E-15  3.73342E-15  7.18962E-14  7.44403E-14  2.91830E-14  7.91621E-15  1.60192E-15
 15.600  3.32699E-14  3.69659E-14  1.69422E-14  5.97359E-15  2.28452E-15  4.24838E-14  4.46469E-14  1.78021E-14  4.89829E-15  1.00836E-15
 15.700  1.95581E-14  2.20186E-14  1.02244E-14  3.63808E-15  1.38967E-15  2.49587E-14  2.66138E-14  1.07896E-14  3.01112E-15  6.30321E-16
 15.800  1.14310E-14  1.30358E-14  6.13184E-15  2.20193E-15  8.40367E-16  1.45784E-14  1.57677E-14  6.49756E-15  1.83901E-15  3.91306E-16
 15.900  6.64257E-15  7.67120E-15  3.65465E-15  1.32447E-15  5.05208E-16  8.46641E-15  9.28520E-15  3.88801E-15  1.11591E-15  2.41271E-16
 16.000  3.83789E-15  4.48720E-15  2.16480E-15  7.91769E-16  3.01942E-16  4.88878E-15  5.43486E-15  2.31182E-15  6.72784E-16  1.47760E-16
 16.100  2.20477E-15  2.60908E-15  1.27443E-15  4.70419E-16  1.79405E-16  2.80688E-15  3.16209E-15  1.36598E-15  4.03036E-16  8.98864E-17
 16.200  1.25938E-15  1.50804E-15  7.45692E-16  2.77787E-16  1.05977E-16  1.60243E-15  1.82878E-15  8.02079E-16  2.39910E-16  5.43179E-17
 16.300  7.15301E-16  8.66493E-16  4.33668E-16  1.63039E-16  6.22386E-17  9.09651E-16  1.05138E-15  4.68046E-16  1.41906E-16  3.26081E-17
 16.400  4.03984E-16  4.94941E-16  2.50682E-16  9.51120E-17  3.63401E-17  5.13478E-16  6.00880E-16  2.71439E-16  8.34100E-17  1.94475E-17
 16.500  2.26878E-16  2.81055E-16  1.44036E-16  5.51509E-17  2.10959E-17  2.88223E-16  3.41392E-16  1.56453E-16  4.87207E-17  1.15233E-17
 16.600  1.26703E-16  1.58668E-16  8.22637E-17  3.17873E-17  1.21758E-17  1.60880E-16  1.92827E-16  8.96273E-17  2.82814E-17  6.78396E-18
 16.700  7.03639E-17  8.90545E-17  4.67037E-17  1.82117E-17  6.98709E-18  8.93009E-17  1.08279E-16  5.10331E-17  1.63152E-17  3.96830E-18
 16.800  3.88593E-17  4.96942E-17  2.63578E-17  1.03717E-17  3.98654E-18  4.92940E-17  6.04497E-17  2.88825E-17  9.35415E-18  2.30652E-18
 16.900  2.13418E-17  2.75706E-17  1.47875E-17  5.87173E-18  2.26154E-18  2.70599E-17  3.35526E-17  1.62480E-17  5.33023E-18  1.33216E-18
 17.000  1.16563E-17  1.52086E-17  8.24737E-18  3.30450E-18  1.27563E-18  1.47727E-17  1.85162E-17  9.08577E-18  3.01878E-18  7.64580E-19
 17.100  6.33140E-18  8.34151E-18  4.57284E-18  1.84875E-18  7.15429E-19  8.02056E-18  1.01597E-17  5.05047E-18  1.69931E-18  4.36082E-19
 17.200  3.42019E-18  4.54905E-18  2.52066E-18  1.02824E-18  3.98963E-19  4.33077E-18  5.54275E-18  2.79076E-18  9.50784E-19  2.47177E-19
 17.300  1.83748E-18  2.46677E-18  1.38137E-18  5.68541E-19  2.21222E-19  2.32568E-18  3.00672E-18  1.53301E-18  5.28773E-19  1.39238E-19
 17.400  9.81798E-19  1.33007E-18  7.52636E-19  3.12529E-19  1.21972E-19  1.24213E-18  1.62178E-18  8.37167E-19  2.92313E-19  7.79526E-20
 17.500  5.21743E-19  7.13132E-19  4.07706E-19  1.70800E-19  6.68701E-20  6.59818E-19  8.69828E-19  4.54499E-19  1.60630E-19  4.33751E-20
 17.600  2.75762E-19  3.80209E-19  2.19587E-19  9.28037E-20  3.64544E-20  3.48598E-19  4.63901E-19  2.45312E-19  8.77445E-20  2.39883E-20
 17.700  1.44964E-19  2.01577E-19  1.17590E-19  5.01335E-20  1.97615E-20  1.83180E-19  2.46024E-19  1.31638E-19  4.76469E-20  1.31862E-20
 17.800  7.57952E-20  1.06276E-19  6.26112E-20  2.69268E-20  1.06524E-20  9.57393E-20  1.29747E-19  7.02310E-20  2.57207E-20  7.20472E-21
 17.900  3.94172E-20  5.57196E-20  3.31479E-20  1.43796E-20  5.70996E-21  4.97699E-20  6.80445E-20  3.72540E-20  1.38030E-20  3.91290E-21
 18.000  2.03891E-20  2.90517E-20  1.74499E-20  7.63513E-21  3.04359E-21  2.57344E-20  3.54873E-20  1.96481E-20  7.36407E-21  2.11241E-21
 18.100  1.04902E-20  1.50638E-20  9.13420E-21  4.03093E-21  1.61328E-21  1.32354E-20  1.84054E-20  1.03035E-20  3.90593E-21  1.13362E-21
 18.200  5.36846E-21  7.76786E-21  4.75441E-21  2.11602E-21  8.50375E-22  6.77088E-21  9.49332E-21  5.37245E-21  2.05969E-21  6.04746E-22
 18.300  2.73276E-21  3.98364E-21  2.46082E-21  1.10451E-21  4.45750E-22  3.44540E-21  4.86965E-21  2.78543E-21  1.07985E-21  3.20707E-22
 18.400  1.38371E-21  2.03179E-21  1.26656E-21  5.73270E-22  2.32358E-22  1.74393E-21  2.48423E-21  1.43600E-21  5.62875E-22  1.69077E-22
 18.500  6.96924E-22  1.03063E-21  6.48256E-22  2.95867E-22  1.20452E-22  8.78043E-22  1.26040E-21  7.36149E-22  2.91716E-22  8.86155E-23
 18.600  3.49163E-22  5.19952E-22  3.29948E-22  1.51841E-22  6.20963E-23  4.39751E-22  6.35991E-22  3.75263E-22  1.50320E-22  4.61736E-23
 18.700  1.74011E-22  2.60892E-22  1.67006E-22  7.74895E-23  3.18358E-23  2.19083E-22  3.19176E-22  1.90226E-22  7.70174E-23  2.39191E-23
 18.800  8.62661E-23  1.30198E-22  8.40641E-23  3.93247E-23  1.62320E-23  1.08573E-22  1.59313E-22  9.58916E-23  3.92360E-23  1.23190E-23
 18.900  4.25422E-23  6.46254E-23  4.20815E-23  1.98456E-23  8.23064E-24  5.35251E-23  7.90901E-23  4.80698E-23  1.98753E-23  6.30797E-24
 19.000  2.08700E-23  3.19050E-23  2.09498E-23  9.95966E-24  4.15059E-24  2.62491E-23  3.90523E-23  2.39636E-23  1.00111E-23  3.21143E-24
 19.100  1.01847E-23  1.56668E-23  1.03725E-23  4.97065E-24  2.08162E-24  1.28056E-23  1.91793E-23  1.18804E-23  5.01413E-24  1.62559E-24
 19.200  4.94436E-24  7.65195E-24  5.10746E-24  2.46704E-24  1.03829E-24  6.21470E-24  9.36883E-24  5.85747E-24  2.49728E-24  8.18154E-25
 19.300  2.38784E-24  3.71741E-24  2.50124E-24  1.21770E-24  5.15059E-25  3.00038E-24  4.55209E-24  2.87211E-24  1.23680E-24  4.09428E-25
 19.400  1.14720E-24  1.79635E-24  1.21826E-24  5.97737E-25  2.54114E-25  1.44103E-24  2.19996E-24  1.40059E-24  6.09120E-25  2.03727E-25
 19.500  5.48303E-25  8.63436E-25  5.90152E-25  2.91806E-25  1.24690E-25  6.88520E-25  1.05756E-24  6.79270E-25  2.98320E-25  1.00798E-25
 19.600  2.60705E-25  4.12821E-25  2.84337E-25  1.41676E-25  6.08523E-26  3.27272E-25  5.05687E-25  3.27646E-25  1.45293E-25  4.95905E-26
 19.700  1.23319E-25  1.96332E-25  1.36256E-25  6.84105E-26  2.95368E-26  1.54759E-25  2.40522E-25  1.57183E-25  7.03719E-26  2.42602E-26
 19.800  5.80318E-26  9.28808E-26  6.49430E-26  3.28533E-26  1.42592E-26  7.28047E-26  1.13796E-25  7.49979E-26  3.38962E-26  1.18017E-26
  67 149 200   0.100
  0.000  5.66946E-02 -2.71527E-16 -4.47559E-16 -4.75352E-16 -5.00671E-16  1.07717E-01 -5.58570E-16 -9.15934E-16 -7.50556E-16 -1.60215E-15
  0.100  5.67702E-02  5.24679E-06  1.83126E-09  3.64020E-14 -2.21726E-15  1.07504E-01 -2.77513E-06 -5.93920E-10 -8.82904E-14 -1.57354E-16
  0.200  5.69954E-02  2.06844E-05  2.90063E-08  2.35207E-12 -2.97542E-15  1.06874E-01 -1.08895E-05 -9.41169E-09 -5.57521E-12 -3.08986E-15
  0.300  5.73663E-02  4.54218E-05  1.44400E-07  2.66696E-11 -3.75360E-14  1.05854E-01 -2.37276E-05 -4.68837E-08 -6.26330E-11 -6.55307E-14
  0.400  5.78762E-02  7.80294E-05  4.45780E-07  1.48824E-10 -3.53832E-13  1.04489E-01 -4.03203E-05 -1.44833E-07 -3.45246E-10 -6.10748E-13
  0.500  5.85156E-02  1.16619E-04  1.05598E-06  5.62157E-10 -1.95255E-12  1.02837E-01 -5.94238E-05 -3.43243E-07 -1.28512E-09 -3.51939E-12
  0.600  5.92721E-02  1.58952E-04  2.11049E-06  1.65606E-09 -7.63458E-12  1.00966E-01 -7.96205E-05 -6.85962E-07 -3.72436E-09 -1.45551E-11
  0.700  6.01306E-02  2.02558E-04  3.74359E-06  4.10156E-09 -2.32946E-11  9.89526E-02 -9.94305E-05 -1.21558E-06 -9.06637E-09 -4.77499E-11
  0.800  6.10733E-02  2.44879E-04  6.07439E-06  8.92869E-09 -5.86453E-11  9.68762E-02 -1.17425E-04 -1.96779E-06 -1.93990E-08 -1.31947E-10
  0.900  6.20800E-02  2.83403E-04  9.19397E-06  1.75748E-08 -1.25804E-10  9.48147E-02 -1.32333E-04 -2.96567E-06 -3.75655E-08 -3.19412E-10
  1.000  6.31287E-02  3.15803E-04  1.31548E-05  3.18792E-08 -2.33443E-10  9.28411E-02 -1.43126E-04 -4.21421E-06 -6.71627E-08 -6.95781E-10
  1.100  6.41958E-02  3.40059E-04  1.79633E-05  5.39988E-08 -3.73820E-10  9.10200E-02 -1.49087E-04 -5.69587E-06 -1.12452E-07 -1.39031E-09
  1.200  6.52575E-02  3.54563E-04  2.35761E-05  8.62212E-08 -4.99959E-10  8.94049E-02 -1.49846E-04 -7.36731E-06 -1.78176E-07 -2.58526E-09
  1.300  6.62899E-02  3.58195E-04  2.99003E-05  1.30662E-07 -4.90802E-10  8.80358E-02 -1.45385E-04 -9.15812E-06 -2.69275E-07 -4.52297E-09
  1.400  6.72707E-02  3.50374E-04  3.67976E-05  1.88840E-07 -1.03446E-10  8.69384E-02 -1.36025E-04 -1.09717E-05 -3.90520E-07 -7.51029E-09
  1.500  6.81791E-02  3.31075E-04  4.40915E-05  2.61154E-07  1.08688E-09  8.61229E-02 -1.22374E-04 -1.26889E-05 -5.46057E-07 -1.19198E-08
  1.600  6.89975E-02  3.00815E-04  5.15775E-05  3.46267E-07  3.75632E-09  8.55855E-02 -1.05273E-04 -1.41739E-05 -7.38901E-07 -1.81885E-08
  1.700  6.97116E-02  2.60616E-04  5.90348E-05  4.40481E-07  8.90666E-09  8.53086E-02 -8.57160E-05 -1.52826E-05 -9.70386E-07 -2.68163E-08
  1.800  7.03111E-02  2.11928E-04  6.62389E-05  5.37121E-07  1.79376E-08  8.52631E-02 -6.47720E-05 -1.58738E-05 -1.23962E-06 -3.83645E-08
  1.900  7.07898E-02  1.56552E-04  7.29743E-05  6.26024E-07  3.27094E-08  8.54106E-02 -4.35061E-05 -1.58204E-05 -1.54296E-06 -5.34579E-08
  2.000  7.11460E-02  9.65274E-05  7.90457E-05  6.93178E-07  5.55879E-08  8.57059E-02 -2.29071E-05 -1.50224E-05 -1.87357E-06 -7.27918E-08
  2.100  7.13817E-02  3.40299E-05  8.42883E-05  7.20576E-07  8.94639E-08  8.61003E-02 -3.82707E-06 -1.34185E-05 -2.22114E-06 -9.71437E-08
  2.200  7.15029E-02 -2.87438E-05  8.85760E-05  6.86330E-07  1.37741E-07  8.65438E-02  1.30655E-05 -1.09966E-05 -2.57170E-06 -1.27390E-07
  2.300  7.15190E-02 -8.96816E-05  9.18269E-05  5.65050E-07  2.04289E-07  8.69884E-02  2.73146E-05 -7.80042E-06 -2.90781E-06 -1.64523E-07
  2.400  7.14418E-02 -1.46853E-04  9.40078E-05  3.28489E-07  2.93361E-07  8.73904E-02  3.86898E-05 -3.93328E-06 -3.20888E-06 -2.09666E-07
  2.500  7.12853E-02 -1.98591E-04  9.51352E-05 -5.35630E-08  4.09475E-07  8.77128E-02  4.71811E-05  4.44018E-07 -3.45198E-06 -2.64078E-07
  2.600  7.10651E-02 -2.43561E-04  9.52761E-05 -6.12222E-07  5.57274E-07  8.79265E-02  5.29789E-05  5.12015E-06 -3.61289E-06 -3.29142E-07
  2.700  7.07974E-02 -2.80810E-04  9.45465E-05 -1.37833E-06  7.41361E-07  8.80120E-02  5.64392E-05  9.84588E-06 -3.66755E-06 -4.06320E-07
  2.800  7.04987E-02 -3.09792E-04  9.31093E-05 -2.38125E-06  9.66127E-07  8.79596E-02  5.80378E-05  1.43518E-05 -3.59388E-06 -4.97086E-07
  2.900  7.01854E-02 -3.30387E-04  9.11708E-05 -3.64774E-06  1.23559E-06  8.77699E-02  5.83145E-05  1.83702E-05 -3.37372E-06 -6.02814E-07
  3.000  6.98728E-02 -3.42890E-04  8.89780E-05 -5.20092E-06  1.55321E-06  8.74526E-02  5.78118E-05  2.16596E-05 -2.99510E-06 -7.24624E-07
  3.100  6.95751E-02 -3.47994E-04  8.68129E-05 -7.05945E-06  1.92180E-06  8.70255E-02  5.70116E-05  2.40303E-05 -2.45438E-06 -8.63193E-07
  3.200  6.93048E-02 -3.46756E-04  8.49881E-05 -9.23695E-06  2.34336E-06  8.65131E-02  5.62731E-05  2.53684E-05 -1.75827E-06 -1.01855E-06
  3.300  6.90719E-02 -3.40551E-04  8.38399E-05 -1.17416E-05  2.81906E-06  8.59442E-02  5.57766E-05  2.56565E-05 -9.25478E-07 -1.18982E-06
  3.400  6.88839E-02 -3.31011E-04  8.37202E-05 -1.45761E-05  3.34910E-06  8.53495E-02  5.54779E-05  2.49887E-05  1.21521E-08 -1.37503E-06
  3.500  6.87449E-02 -3.19964E-04  8.49866E-05 -1.77373E-05  3.93275E-06  8.47588E-02  5.50776E-05  2.35772E-05  1.00934E-06 -1.57090E-06
  3.600  6.86550E-02 -3.09359E-04  8.79903E-05 -2.12168E-05  4.56829E-06  8.41989E-02  5.40091E-05  2.17507E-05  2.00788E-06 -1.77271E-06
  3.700  6.86102E-02 -3.01180E-04  9.30623E-05 -2.50003E-05  5.25299E-06  8.36906E-02  5.14490E-05  1.99422E-05  2.93826E-06 -1.97424E-06
  3.800  6.86016E-02 -2.97367E-04  1.00497E-04 -2.90684E-05  5.98309E-06  8.32469E-02  4.63507E-05  1.86672E-05  3.72219E-06 -2.16781E-06
  3.900  6.86154E-02 -2.99724E-04  1.10534E-04 -3.33956E-05  6.75377E-06  8.28713E-02  3.75026E-05  1.84937E-05  4.27622E-06 -2.34448E-06
  4.000  6.86324E-02 -3.09826E-04  1.23341E-04 -3.79506E-05  7.55907E-06  8.25567E-02  2.36074E-05  2.00036E-05  4.51617E-06 -2.49433E-06
  4.100  6.86286E-02 -3.28944E-04  1.38998E-04 -4.26957E-05  8.39189E-06  8.22850E-02  3.37933E-06  2.37515E-05  4.36213E-06 -2.60687E-06
  4.200  6.85756E-02 -3.57957E-04  1.57476E-04 -4.75860E-05  9.24387E-06  8.20278E-02 -2.43469E-05  3.02210E-05  3.74380E-06 -2.67163E-06
  4.300  6.84413E-02 -3.97294E-04  1.78630E-04 -5.25690E-05  1.01054E-05  8.17473E-02 -6.05046E-05  3.97834E-05  2.60573E-06 -2.67871E-06
  4.400  6.81909E-02 -4.46883E-04  2.02192E-04 -5.75847E-05  1.09655E-05  8.13985E-02 -1.05689E-04  5.26618E-05  9.12130E-07 -2.61948E-06
  4.500  6.77889E-02 -5.06126E-04  2.27764E-04 -6.25645E-05  1.18121E-05  8.09314E-02 -1.60069E-04  6.89042E-05 -1.34926E-06 -2.48720E-06
  4.600  6.72001E-02 -5.73902E-04  2.54830E-04 -6.74328E-05  1.26318E-05  8.02943E-02 -2.23315E-04  8.83674E-05 -4.16443E-06 -2.27767E-06
  4.700  6.63920E-02 -6.48590E-04  2.82767E-04 -7.21070E-05  1.34106E-05  7.94365E-02 -2.94573E-04  1.10713E-04 -7.49192E-06 -1.98965E-06
  4.800  6.53362E-02 -7.28132E-04  3.10862E-04 -7.64997E-05  1.41336E-05  7.83118E-02 -3.72459E-04  1.35421E-04 -1.12633E-05 -1.62523E-06
  4.900  6.40106E-02 -8.10114E-04  3.38346E-04 -8.05208E-05  1.47859E-05  7.68813E-02 -4.55106E-04  1.61805E-04 -1.53855E-05 -1.18998E-06
  5.000  6.24004E-02 -8.91874E-04  3.64418E-04 -8.40802E-05  1.53528E-05  7.51161E-02 -5.40237E-04  1.89057E-04 -1.97443E-05 -6.92844E-07
  5.100  6.04997E-02 -9.70633E-04  3.88289E-04 -8.70918E-05  1.58205E-05  7.29991E-02 -6.25281E-04  2.16282E-04 -2.42099E-05 -1.45878E-07
  5.200  5.83122E-02 -1.04363E-03  4.09211E-04 -8.94768E-05  1.61768E-05  7.05262E-02 -7.07503E-04  2.42553E-04 -2.86433E-05  4.36262E-07
  5.300  5.58509E-02 -1.10825E-03  4.26520E-04 -9.11676E-05  1.64113E-05  6.77073E-02 -7.84158E-04  2.66956E-04 -3.29030E-05  1.03698E-06
  5.400  5.31387E-02 -1.16217E-03  4.39661E-04 -9.21114E-05  1.65164E-05  6.45651E-02 -8.52643E-04  2.88647E-04 -3.68524E-05  1.63856E-06
  5.500  5.02067E-02 -1.20348E-03  4.48219E-04 -9.22735E-05  1.64876E-05  6.11349E-02 -9.10643E-04  3.06889E-04 -4.03666E-05  2.22303E-06
  5.600  4.70935E-02 -1.23075E-03  4.51937E-04 -9.16391E-05  1.63234E-05  5.74622E-02 -9.56259E-04  3.21095E-04 -4.33384E-05  2.77306E-06
  5.700  4.38434E-02 -1.24310E-03  4.50721E-04 -9.02153E-05  1.60263E-05  5.36009E-02 -9.88102E-04  3.30849E-04 -4.56832E-05  3.27284E-06
  5.800  4.05043E-02 -1.24025E-03  4.44651E-04 -8.80310E-05  1.56022E-05  4.96104E-02 -1.00536E-03  3.35923E-04 -4.73428E-05  3.70877E-06
  5.900  3.71261E-02 -1.22249E-03  4.33961E-04 -8.51360E-05  1.50602E-05  4.55528E-02 -1.00783E-03  3.36283E-04 -4.82867E-05  4.07014E-06
  6.000  3.37579E-02 -1.19065E-03  4.19031E-04 -8.15995E-05  1.44125E-05  4.14905E-02 -9.95878E-04  3.32075E-04 -4.85128E-05  4.34943E-06
  6.100  3.04472E-02 -1.14604E-03  4.00363E-04 -7.75065E-05  1.36740E-05  3.74834E-02 -9.70437E-04  3.23608E-04 -4.80454E-05  4.54262E-06
  6.200  2.72369E-02 -1.09034E-03  3.78549E-04 -7.29549E-05  1.28614E-05  3.35863E-02 -9.32889E-04  3.11334E-04 -4.69329E-05  4.64912E-06
  6.300  2.41652E-02 -1.02552E-03  3.54242E-04 -6.80505E-05  1.19924E-05  2.98479E-02 -8.84984E-04  2.95805E-04 -4.52436E-05  4.67161E-06
  6.400  2.12635E-02 -9.53727E-04  3.28128E-04 -6.29032E-05  1.10856E-05  2.63086E-02 -8.28722E-04  2.77649E-04 -4.30610E-05  4.61564E-06
  6.500  1.85566E-02 -8.77158E-04  3.00888E-04 -5.76222E-05  1.01591E-05  2.30005E-02 -7.66237E-04  2.57526E-04 -4.04789E-05  4.48919E-06
  6.600  1.60619E-02 -7.97963E-04  2.73178E-04 -5.23122E-05  9.23026E-06  1.99464E-02 -6.99682E-04  2.36100E-04 -3.75959E-05  4.30202E-06
  6.700  1.37901E-02 -7.18162E-04  2.45599E-04 -4.70695E-05  8.31507E-06  1.71604E-02 -6.31127E-04  2.14009E-04 -3.45108E-05  4.06512E-06
  6.800  1.17450E-02 -6.39563E-04  2.18683E-04 -4.19797E-05  7.42761E-06  1.46484E-02 -5.62472E-04  1.91835E-04 -3.13182E-05  3.79004E-06
  6.900  9.92468E-03 -5.63715E-04  1.92879E-04 -3.71149E-05  6.57978E-06  1.24089E-02 -4.95378E-04  1.70091E-04 -2.81047E-05  3.48830E-06
  7.000  8.32216E-03 -4.91873E-04  1.68543E-04 -3.25332E-05  5.78111E-06  1.04340E-02 -4.31230E-04  1.49207E-04 -2.49468E-05  3.17093E-06
  7.100  6.92642E-03 -4.24987E-04  1.45943E-04 -2.82776E-05  5.03872E-06  8.71073E-03 -3.71109E-04  1.29522E-04 -2.19081E-05  2.84800E-06
  7.200  5.72334E-03 -3.63710E-04  1.25255E-04 -2.43770E-05  4.35734E-06  7.22241E-03 -3.15791E-04  1.11286E-04 -1.90396E-05  2.52834E-06
  7.300  4.69673E-03 -3.08411E-04  1.06575E-04 -2.08467E-05  3.73949E-06  5.94960E-03 -2.65764E-04  9.46617E-05 -1.63785E-05  2.21936E-06
  7.400  3.82918E-03 -2.59216E-04  8.99256E-05 -1.76899E-05  3.18571E-06  4.87133E-03 -2.21253E-04  7.97344E-05 -1.39496E-05  1.92690E-06
  7.500  3.10286E-03 -2.16037E-04  7.52677E-05 -1.48997E-05  2.69484E-06  3.96607E-03 -1.82257E-04  6.65207E-05 -1.17661E-05  1.65527E-06
  7.600  2.50018E-03 -1.78621E-04  6.25144E-05 -1.24607E-05  2.26434E-06  3.21255E-03 -1.48596E-04  5.49814E-05 -9.83110E-06  1.40735E-06
  7.700  2.00433E-03 -1.46592E-04  5.15422E-05 -1.03512E-05  1.89061E-06  2.59038E-03 -1.19948E-04  4.50335E-05 -8.13937E-06  1.18468E-06
  7.800  1.59960E-03 -1.19486E-04  4.22028E-05 -8.54498E-06  1.56930E-06  2.08050E-03 -9.58967E-05  3.65623E-05 -6.67928E-06  9.87686E-07
  7.900  1.27169E-03 -9.67941E-05  3.43333E-05 -7.01332E-06  1.29559E-06  1.66553E-03 -7.59669E-05  2.94329E-05 -5.43447E-06  8.15853E-07
  8.000  1.00782E-03 -7.79885E-05  2.77658E-05 -5.72621E-06  1.06444E-06  1.32991E-03 -5.96588E-05  2.34995E-05 -4.38552E-06  6.67959E-07
  8.100  7.96790E-04 -6.25492E-05  2.23340E-05 -4.65378E-06  8.70845E-07  1.05999E-03 -4.64746E-05  1.86138E-05 -3.51134E-06  5.42266E-07
  8.200  6.28928E-04 -4.99821E-05  1.78791E-05 -3.76726E-06  7.09917E-07  8.43933E-04 -3.59383E-05  1.46313E-05 -2.79044E-06  4.36711E-07
  8.300  4.96024E-04 -3.98318E-05  1.42536E-05 -3.03973E-06  5.77077E-07  6.71694E-04 -2.76107E-05  1.14161E-05 -2.20182E-06  3.49056E-07
  8.400  3.91197E-04 -3.16894E-05  1.13238E-05 -2.44658E-06  4.68111E-07  5.34821E-04 -2.10974E-05  8.84362E-06 -1.72566E-06  2.77032E-07
  8.500  3.08761E-04 -2.51958E-05  8.97125E-06 -1.96576E-06  3.79224E-07  4.26303E-04 -1.60534E-05  6.80295E-06 -1.34384E-06  2.18430E-07
  8.600  2.44065E-04 -2.00420E-05  7.09266E-06 -1.57794E-06  3.07059E-07  3.40390E-04 -1.21835E-05  5.19703E-06 -1.04012E-06  1.71183E-07
  8.700  1.93349E-04 -1.59667E-05  5.59969E-06 -1.26639E-06  2.48697E-07  2.72409E-04 -9.23971E-06  3.94274E-06 -8.00345E-07  1.33406E-07
  8.800  1.53602E-04 -1.27524E-05  4.41788E-06 -1.01690E-06  2.01636E-07  2.18601E-04 -7.01813E-06  2.97005E-06 -6.12338E-07  1.03430E-07
  8.900  1.22430E-04 -1.02207E-05  3.48529E-06 -8.17538E-07  1.63761E-07  1.75962E-04 -5.35332E-06  2.22084E-06 -4.65850E-07  7.98030E-08
  9.000  9.79446E-05 -8.22687E-06  2.75105E-06 -6.58424E-07  1.33307E-07  1.42108E-04 -4.11325E-06  1.64757E-06 -3.52372E-07  6.12915E-08
  9.100  7.86661E-05 -6.65506E-06  2.17386E-06 -5.31457E-07  1.08815E-07  1.15158E-04 -3.19394E-06  1.21180E-06 -2.64937E-07  4.68633E-08
  9.200  6.34393E-05 -5.41312E-06  1.72044E-06 -4.30066E-07  8.90947E-08  9.36341E-05 -2.51452E-06  8.82792E-07 -1.97911E-07  3.56682E-08
  9.300  5.13667E-05 -4.42843E-06  1.36428E-06 -3.48970E-07  7.31809E-08  7.63785E-05 -2.01280E-06  6.36169E-07 -1.46788E-07  2.70162E-08
  9.400  4.17526E-05 -3.64414E-06  1.08434E-06 -2.83949E-07  6.02988E-08  6.24866E-05 -1.64145E-06  4.52761E-07 -1.07992E-07  2.03534E-08
  9.500  3.40590E-05 -3.01596E-06  8.64031E-07 -2.31659E-07  4.98302E-08  5.12527E-05 -1.36480E-06  3.17588E-07 -7.87133E-08  1.52399E-08
  9.600  2.78701E-05 -2.50951E-06  6.90357E-07 -1.89458E-07  4.12852E-08  4.21266E-05 -1.15627E-06  2.19001E-07 -5.67508E-08  1.13292E-08
  9.700  2.28649E-05 -2.09821E-06  5.53141E-07 -1.55269E-07  3.42768E-08  3.46791E-05 -9.96222E-07  1.47982E-07 -4.03922E-08  8.35004E-09
  9.800  1.87955E-05 -1.76155E-06  4.44445E-07 -1.27460E-07  2.85008E-08  2.85751E-05 -8.70336E-07  9.75782E-08 -2.83083E-08  6.09086E-09
  9.900  1.54699E-05 -1.48375E-06  3.58084E-07 -1.04753E-07  2.37180E-08  2.35525E-05 -7.68327E-07  6.24498E-08 -1.94704E-08  4.38733E-09
 10.000  1.27395E-05 -1.25265E-06  2.89242E-07 -8.61438E-08  1.97409E-08  1.94054E-05 -6.82936E-07  3.85119E-08 -1.30834E-08  3.11173E-09
 10.100  1.04885E-05 -1.05893E-06  2.34172E-07 -7.08426E-08  1.64215E-08  1.59719E-05 -6.09157E-07  2.26577E-08 -8.53451E-09  2.16486E-09
 10.200  8.62674E-06 -8.95426E-07  1.89954E-07 -5.82270E-08  1.36433E-08  1.31235E-05 -5.43643E-07  1.25413E-08 -5.35205E-09  1.46958E-09
 10.300  7.08318E-06 -7.56621E-07  1.54318E-07 -4.78036E-08  1.13134E-08  1.07579E-05 -4.84245E-07  6.40762E-09 -3.17461E-09  9.65851E-10
 10.400  5.80165E-06 -6.38254E-07  1.25492E-07 -3.91793E-08  9.35761E-09  8.79273E-06 -4.29661E-07  2.95978E-09 -1.72645E-09  6.06945E-10
 10.500  4.73729E-06 -5.37011E-07  1.02092E-07 -3.20386E-08  7.71582E-09  7.16140E-06 -3.79165E-07  1.25492E-09 -7.98735E-10  3.56525E-10
 10.600  3.85390E-06 -4.50288E-07  8.30385E-08 -2.61270E-08  6.33891E-09  5.80932E-06 -3.32403E-07  6.21541E-10 -2.34738E-10  1.86419E-10
 10.700  3.12193E-06 -3.76005E-07  6.74830E-08 -2.12370E-08  5.18629E-09  4.69140E-06 -2.89240E-07  5.94210E-10  8.17073E-11  7.48972E-11
 10.800  2.51701E-06 -3.12470E-07  5.47585E-08 -1.71985E-08  4.22400E-09  3.77005E-06 -2.49652E-07  8.61729E-10  2.35389E-10  5.32847E-12
 10.900  2.01882E-06 -2.58280E-07  4.43370E-08 -1.38709E-08  3.42336E-09  3.01369E-06 -2.13649E-07  1.22618E-09  2.86992E-10 -3.48863E-11
 11.000  1.61027E-06 -2.12241E-07  3.57986E-08 -1.11370E-08  2.75995E-09  2.39561E-06 -1.81228E-07  1.57083E-09  2.78888E-10 -5.51625E-11
 11.100  1.27687E-06 -1.73320E-07  2.88066E-08 -8.89897E-09  2.21283E-09  1.89313E-06 -1.52343E-07  1.83520E-09  2.39747E-10 -6.24181E-11
 11.200  1.00629E-06 -1.40605E-07  2.30889E-08 -7.07434E-09  1.76393E-09  1.48691E-06 -1.26894E-07  1.99624E-09  1.88166E-10 -6.16314E-11
 11.300  7.88001E-07 -1.13283E-07  1.84238E-08 -5.59359E-09  1.39770E-09  1.16049E-06 -1.04728E-07  2.05414E-09  1.35511E-10 -5.62916E-11
 11.400  6.13019E-07 -9.06236E-08  1.46293E-08 -4.39795E-09  1.10070E-09  8.99868E-07 -8.56405E-08  2.02226E-09  8.81088E-11 -4.87652E-11
 11.500  4.73694E-07 -7.19707E-08  1.15548E-08 -3.43776E-09  8.61344E-10  6.93160E-07 -6.93914E-08  1.92001E-09  4.89023E-11 -4.05869E-11
 11.600  3.63532E-07 -5.67345E-08  9.07495E-09 -2.67108E-09  6.69707E-10  5.30344E-07 -5.57139E-08  1.76825E-09  1.86760E-11 -3.26920E-11
 11.700  2.77055E-07 -4.43886E-08  7.08494E-09 -2.06262E-09  5.17307E-10  4.03006E-07 -4.43286E-08  1.58642E-09 -3.06201E-12 -2.55947E-11
 11.800  2.09670E-07 -3.44664E-08  5.49701E-09 -1.58275E-09  3.96945E-10  3.04133E-07 -3.49544E-08  1.39105E-09 -1.74688E-11 -1.95258E-11
 11.900  1.57552E-07 -2.65582E-08  4.23762E-09 -1.20675E-09  3.02553E-10  2.27924E-07 -2.73185E-08  1.19511E-09 -2.59599E-11 -1.45335E-11
 12.000  1.17549E-07 -2.03080E-08  3.24523E-09 -9.14110E-10  2.29054E-10  1.69620E-07 -2.11637E-08  1.00805E-09 -2.99562E-11 -1.05575E-11
 12.100  8.70773E-08 -1.54097E-08  2.46849E-09 -6.87888E-10  1.72235E-10  1.25346E-07 -1.62536E-08  8.36097E-10 -3.07403E-11 -7.47993E-12
 12.200  6.40441E-08 -1.16034E-08  1.86479E-09 -5.14222E-10  1.28630E-10  9.19790E-08 -1.23759E-08  6.82810E-10 -2.93885E-11 -5.15989E-12
 12.300  4.67671E-08 -8.67041E-09  1.39895E-09 -3.81834E-10  9.54092E-11  6.70200E-08 -9.34362E-09  5.49641E-10 -2.67519E-11 -3.45484E-12
 12.400  3.39071E-08 -6.42940E-09  1.04212E-09 -2.81628E-10  7.02846E-11  4.84910E-08 -6.99536E-09  4.36504E-10 -2.34683E-11 -2.23338E-12
 12.500  2.44082E-08 -4.73140E-09  7.70815E-10 -2.06319E-10  5.14222E-11  3.48388E-08 -5.19404E-09  3.42262E-10 -1.99888E-11 -1.38139E-12
 12.600  1.74456E-08 -3.45552E-09  5.66095E-10 -1.50127E-10  3.73647E-11  2.48551E-08 -3.82511E-09  2.65139E-10 -1.66115E-11 -8.04166E-13
 12.700  1.23808E-08 -2.50471E-09  4.12785E-10 -1.08501E-10  2.69649E-11  1.76088E-08 -2.79426E-09  2.03038E-10 -1.35162E-11 -4.25929E-13
 12.800  8.72448E-09 -1.80195E-09  2.98848E-10 -7.78852E-11  1.93270E-11  1.23883E-08 -2.02495E-09  1.53775E-10 -1.07950E-11 -1.87963E-13
 12.900  6.10477E-09 -1.28673E-09  2.14817E-10 -5.55301E-11  1.37583E-11  8.65522E-09 -1.45589E-09  1.15234E-10 -8.47902E-12 -4.60668E-14
 13.000  4.24183E-09 -9.12037E-10  1.53313E-10 -3.93239E-11  9.72775E-12  6.00535E-09 -1.03860E-09  8.54734E-11 -6.55957E-12  3.21229E-14
 13.100  2.92690E-09 -6.41713E-10  1.08641E-10 -2.76595E-11  6.83144E-12  4.13815E-09 -7.35200E-10  6.27741E-11 -5.00411E-12  6.96504E-14
 13.200  2.00562E-09 -4.48223E-10  7.64390E-11 -1.93240E-11  4.76515E-12  2.83202E-09 -5.16465E-10  4.56626E-11 -3.76808E-12  8.24577E-14
 13.300  1.36487E-09 -3.10810E-10  5.34020E-11 -1.34099E-11  3.30153E-12  1.92496E-09 -3.60070E-10  3.29070E-11 -2.80285E-12  8.12299E-14
 13.400  9.22472E-10 -2.13976E-10  3.70453E-11 -9.24344E-12  2.27217E-12  1.29957E-09 -2.49160E-10  2.35000E-11 -2.06091E-12  7.28716E-14
 13.500  6.19229E-10 -1.46260E-10  2.55184E-11 -6.32900E-12  1.55333E-12  8.71459E-10 -1.71139E-10  1.66340E-11 -1.49879E-12  6.16476E-14
 13.600  4.12860E-10 -9.92662E-11  1.74556E-11 -4.30467E-12  1.05487E-12  5.80464E-10 -1.16688E-10  1.16724E-11 -1.07859E-12  5.00361E-14
 13.700  2.73417E-10 -6.68978E-11  1.18574E-11 -2.90843E-12  7.11640E-13  3.84062E-10 -7.89841E-11  8.12160E-12 -7.68400E-13  3.93490E-14
 13.800  1.79860E-10 -4.47691E-11  7.99903E-12 -1.95211E-12  4.76933E-13  2.52430E-10 -5.30789E-11  5.60414E-12 -5.42118E-13  3.01674E-14
 13.900  1.17530E-10 -2.97525E-11  5.35909E-12 -1.30163E-12  3.17545E-13  1.64820E-10 -3.54160E-11  3.83559E-12 -3.78892E-13  2.26407E-14
 14.000  7.62928E-11 -1.96366E-11  3.56589E-12 -8.62224E-13  2.10047E-13  1.06911E-10 -2.34638E-11  2.60419E-12 -2.62406E-13  1.66821E-14
 14.100  4.91989E-11 -1.28715E-11  2.35659E-12 -5.67435E-13  1.38040E-13  6.88963E-11 -1.54363E-11  1.75423E-12 -1.80129E-13  1.20932E-14
 14.200  3.15197E-11 -8.37975E-12  1.54688E-12 -3.71012E-13  9.01333E-14  4.41106E-11 -1.00847E-11  1.17254E-12 -1.22585E-13  8.63913E-15
 14.300  2.00621E-11 -5.41865E-12  1.00856E-12 -2.41017E-13  5.84748E-14  2.80595E-11 -6.54302E-12  7.77760E-13 -8.27238E-14  6.08943E-15
 14.400  1.26870E-11 -3.48039E-12  6.53186E-13 -1.55564E-13  3.76937E-14  1.77345E-11 -4.21612E-12  5.12020E-13 -5.53655E-14  4.23931E-15
 14.500  7.97149E-12 -2.22056E-12  4.20220E-13 -9.97662E-14  2.41435E-14  1.11373E-11 -2.69830E-12  3.34576E-13 -3.67569E-14  2.91727E-15
 14.600  4.97665E-12 -1.40737E-12  2.68557E-13 -6.35747E-14  1.53665E-14  6.94976E-12 -1.71526E-12  2.17024E-13 -2.42100E-14  1.98568E-15
 14.700  3.08720E-12 -8.86111E-13  1.70504E-13 -4.02554E-14  9.71861E-15  4.30931E-12 -1.08307E-12  1.39754E-13 -1.58223E-14  1.33764E-15
 14.800  1.90299E-12 -5.54263E-13  1.07544E-13 -2.53288E-14  6.10805E-15  2.65524E-12 -6.79336E-13  8.93518E-14 -1.02617E-14  8.92202E-16
 14.900  1.16565E-12 -3.44436E-13  6.73911E-14 -1.58368E-14  3.81490E-15  1.62583E-12 -4.23289E-13  5.67224E-14 -6.60534E-15  5.89469E-16
 15.000  7.09535E-13 -2.12659E-13  4.19569E-14 -9.84007E-15  2.36786E-15  9.89306E-13 -2.62019E-13  3.57561E-14 -4.22032E-15  3.85906E-16
 15.100  4.29205E-13 -1.30454E-13  2.59538E-14 -6.07596E-15  1.46061E-15  5.98253E-13 -1.61134E-13  2.23832E-14 -2.67679E-15  2.50413E-16
 15.200  2.58021E-13 -7.95135E-14  1.59518E-14 -3.72847E-15  8.95428E-16  3.59543E-13 -9.84513E-14  1.39154E-14 -1.68556E-15  1.61103E-16
 15.300  1.54155E-13 -4.81564E-14  9.74196E-15 -2.27383E-15  5.45577E-16  2.14754E-13 -5.97654E-14  8.59216E-15 -1.05384E-15  1.02783E-16
 15.400  9.15343E-14 -2.89808E-14  5.91182E-15 -1.37818E-15  3.30386E-16  1.27487E-13 -3.60487E-14  5.26943E-15 -6.54239E-16  6.50430E-17
 15.500  5.40192E-14 -1.73309E-14  3.56491E-15 -8.30209E-16  1.98856E-16  7.52204E-14 -2.16051E-14  3.21000E-15 -4.03337E-16  4.08343E-17
 15.600  3.16855E-14 -1.02992E-14  2.13621E-15 -4.97064E-16  1.18965E-16  4.41128E-14 -1.28666E-14  1.94245E-15 -2.46945E-16  2.54370E-17
 15.700  1.84728E-14 -6.08234E-15  1.27208E-15 -2.95795E-16  7.07409E-17  2.57136E-14 -7.61432E-15  1.16767E-15 -1.50163E-16  1.57250E-17
 15.800  1.07048E-14 -3.56972E-15  7.52801E-16 -1.74959E-16  4.18126E-17  1.48985E-14 -4.47784E-15  6.97325E-16 -9.06954E-17  9.64843E-18
 15.900  6.16603E-15 -2.08212E-15  4.42739E-16 -1.02862E-16  2.45662E-17  8.58046E-15 -2.61693E-15  4.13731E-16 -5.44115E-17  5.87654E-18
 16.000  3.53042E-15 -1.20698E-15  2.58780E-16 -6.01114E-17  1.43474E-17  4.91225E-15 -1.51990E-15  2.43885E-16 -3.24270E-17  3.55332E-18
 16.100  2.00933E-15 -6.95392E-16  1.50328E-16 -3.49184E-17  8.32953E-18  2.79551E-15 -8.77299E-16  1.42843E-16 -1.91980E-17  2.13325E-18
 16.200  1.13682E-15 -3.98202E-16  8.67940E-17 -2.01630E-17  4.80720E-18  1.58147E-15 -5.03276E-16  8.31287E-17 -1.12917E-17  1.27170E-18
 16.300  6.39373E-16 -2.26639E-16  4.98066E-17 -1.15737E-17  2.75802E-18  8.89393E-16 -2.86947E-16  4.80710E-17 -6.59844E-18  7.52842E-19
 16.400  3.57479E-16 -1.28213E-16  2.84083E-17 -6.60401E-18  1.57306E-18  4.97239E-16 -1.62609E-16  2.76229E-17 -3.83107E-18  4.42624E-19
 16.500  1.98697E-16 -7.20959E-17  1.61054E-17 -3.74607E-18  8.91953E-19  2.76366E-16 -9.15904E-17  1.57734E-17 -2.21011E-18  2.58472E-19
 16.600  1.09795E-16 -4.02975E-17  9.07573E-18 -2.11243E-18  5.02806E-19  1.52708E-16 -5.12775E-17  8.95094E-18 -1.26691E-18  1.49923E-19
 16.700  6.03169E-17 -2.23895E-17  5.08371E-18 -1.18424E-18  2.81791E-19  8.38894E-17 -2.85355E-17  5.04789E-18 -7.21650E-19  8.63834E-20
 16.800  3.29431E-17 -1.23657E-17  2.83061E-18 -6.60010E-19  1.57011E-19  4.58170E-17 -1.57848E-17  2.82921E-18 -4.08486E-19  4.94455E-20
 16.900  1.78883E-17 -6.78915E-18  1.56671E-18 -3.65701E-19  8.69797E-20  2.48788E-17 -8.67950E-18  1.57597E-18 -2.29780E-19  2.81180E-20
 17.000  9.65739E-18 -3.70543E-18  8.62021E-19 -2.01453E-19  4.79070E-20  1.34315E-17 -4.74422E-18  8.72507E-19 -1.28454E-19  1.58865E-20
 17.100  5.18378E-18 -2.01048E-18  4.71492E-19 -1.10332E-19  2.62350E-20  7.20969E-18 -2.57785E-18  4.80112E-19 -7.13672E-20  8.91821E-21
 17.200  2.76654E-18 -1.08445E-18  2.56370E-19 -6.00782E-20  1.42847E-20  3.84784E-18 -1.39247E-18  2.62592E-19 -3.94074E-20  4.97459E-21
 17.300  1.46804E-18 -5.81532E-19  1.38582E-19 -3.25257E-20  7.73351E-21  2.04189E-18 -7.47745E-19  1.42756E-19 -2.16271E-20  2.75732E-21
 17.400  7.74569E-19 -3.10029E-19  7.44729E-20 -1.75080E-20  4.16300E-21  1.07738E-18 -3.99184E-19  7.71429E-20 -1.17971E-20  1.51875E-21
 17.500  4.06357E-19 -1.64325E-19  3.97880E-20 -9.37038E-21  2.22826E-21  5.65245E-19 -2.11862E-19  4.14376E-20 -6.39615E-21  8.31329E-22
 17.600  2.11977E-19 -8.65935E-20  2.11338E-20 -4.98645E-21  1.18594E-21  2.94876E-19 -1.11790E-19  2.21260E-20 -3.44700E-21  4.52235E-22
 17.700  1.09954E-19 -4.53687E-20  1.11604E-20 -2.63845E-21  6.27627E-22  1.52963E-19 -5.86448E-20  1.17443E-20 -1.84653E-21  2.44499E-22
 17.800  5.67126E-20 -2.36332E-20  5.85956E-21 -1.38814E-21  3.30287E-22  7.89010E-20 -3.05873E-20  6.19702E-21 -9.83267E-22  1.31379E-22
 17.900  2.90873E-20 -1.22404E-20  3.05876E-21 -7.26194E-22  1.72838E-22  4.04702E-20 -1.58615E-20  3.25069E-21 -5.20475E-22  7.01663E-23
 18.000  1.48350E-20 -6.30342E-21  1.58754E-21 -3.77757E-22  8.99393E-23  2.06420E-20 -8.17808E-21  1.69518E-21 -2.73874E-22  3.72474E-23
 18.100  7.52387E-21 -3.22758E-21  8.19239E-22 -1.95398E-22  4.65403E-23  1.04698E-20 -4.19242E-21  8.78844E-22 -1.43263E-22  1.96537E-23
 18.200  3.79462E-21 -1.64325E-21  4.20350E-22 -1.00503E-22  2.39488E-23  5.28079E-21 -2.13695E-21  4.52974E-22 -7.45010E-23  1.03083E-23
 18.300  1.90316E-21 -8.31886E-22  2.14453E-22 -5.14042E-23  1.22552E-23  2.64876E-21 -1.08305E-21  2.32118E-22 -3.85159E-23  5.37442E-24
 18.400  9.49220E-22 -4.18758E-22  1.08788E-22 -2.61445E-23  6.23651E-24  1.32121E-21 -5.45797E-22  1.18257E-22 -1.97961E-23  2.78545E-24
 18.500  4.70817E-22 -2.09608E-22  5.48736E-23 -1.32231E-23  3.15614E-24  6.55386E-22 -2.73496E-22  5.99010E-23 -1.01155E-23  1.43512E-24
 18.600  2.32239E-22 -1.04329E-22  2.75224E-23 -6.65057E-24  1.58843E-24  3.23311E-22 -1.36275E-22  3.01675E-23 -5.13896E-24  7.35053E-25
 18.700  1.13925E-22 -5.16370E-23  1.37263E-23 -3.32633E-24  7.95033E-25  1.58617E-22 -6.75194E-23  1.51060E-23 -2.59566E-24  3.74283E-25
 18.800  5.55796E-23 -2.54145E-23  6.80730E-24 -1.65447E-24  3.95739E-25  7.73903E-23 -3.32659E-23  7.52096E-24 -1.30351E-24  1.89471E-25
 18.900  2.69665E-23 -1.24387E-23  3.35702E-24 -8.18352E-25  1.95905E-25  3.75526E-23 -1.62979E-23  3.72320E-24 -6.50853E-25  9.53574E-26
 19.000  1.30123E-23 -6.05401E-24  1.64626E-24 -4.02548E-25  9.64499E-26  1.81224E-23 -7.94027E-24  1.83268E-24 -3.23118E-25  4.77139E-26
 19.100  6.24465E-24 -2.93018E-24  8.02807E-25 -1.96923E-25  4.72259E-26  8.69790E-24 -3.84691E-24  8.96999E-25 -1.59498E-25  2.37369E-26
 19.200  2.98052E-24 -1.41037E-24  3.89313E-25 -9.58027E-26  2.29978E-26  4.15189E-24 -1.85341E-24  4.36553E-25 -7.82839E-26  1.17409E-26
 19.300  1.41485E-24 -6.75099E-25  1.87745E-25 -4.63521E-26  1.11385E-26  1.97112E-24 -8.88005E-25  2.11266E-25 -3.82050E-26  5.77406E-27
 19.400  6.67991E-25 -3.21366E-25  9.00376E-26 -2.23036E-26  5.36539E-27  9.30720E-25 -4.23109E-25  1.01666E-25 -1.85398E-26  2.82342E-27
 19.500  3.13671E-25 -1.52138E-25  4.29408E-26 -1.06733E-26  2.57050E-27  4.37091E-25 -2.00487E-25  4.86499E-26 -8.94610E-27  1.37275E-27
 19.600  1.46497E-25 -7.16284E-26  2.03664E-26 -5.07978E-27  1.22484E-27  2.04161E-25 -9.44767E-26  2.31501E-26 -4.29252E-27  6.63645E-28
 19.700  6.80510E-26 -3.35388E-26  9.60634E-27 -2.40446E-27  5.80488E-28  9.48484E-26 -4.42763E-26  1.09546E-26 -2.04808E-27  3.19019E-28
 19.800  3.14413E-26 -1.56181E-26  4.50619E-27 -1.13193E-27  2.73627E-28  4.38274E-26 -2.06362E-26  5.15487E-27 -9.71725E-28  1.52489E-28
 19.900  1.44487E-26 -7.23329E-27  2.10219E-27 -5.29981E-28  1.28287E-28  2.01430E-26 -9.56551E-27  2.41225E-27 -4.58467E-28  7.24789E-29
  67 150 200   0.100
  0.000  5.75361E-02 -3.10317E-16 -4.47559E-16 -4.25315E-16 -4.29147E-16  1.07706E-01 -5.58570E-16 -8.32667E-16 -8.00593E-16 -2.83237E-15
  0.100  5.76081E-02  1.73211E-05  3.31175E-09 -1.11383E-13 -6.29415E-16  1.07494E-01 -9.42250E-06  1.01267E-11 -7.06298E-13 -1.28744E-15
  0.200  5.78230E-02  6.82223E-05  5.24657E-08 -6.99902E-12 -6.36568E-15  1.06869E-01 -3.70767E-05  3.07001E-10 -4.47521E-11 -1.38757E-15
  0.300  5.81772E-02  1.49582E-04  2.61260E-07 -7.82595E-11 -1.83560E-13  1.05856E-01 -8.11739E-05  2.76799E-09 -5.03152E-10  1.74663E-14
  0.400  5.86647E-02  2.56406E-04  8.06861E-07 -4.28570E-10 -1.78382E-12  1.04502E-01 -1.38898E-04  1.40550E-08 -2.77601E-09  1.71945E-13
  0.500  5.92769E-02  3.82130E-04  1.91229E-06 -1.58231E-09 -1.02827E-11  1.02865E-01 -2.06639E-04  5.06964E-08 -1.03450E-08  1.05346E-12
  0.600  6.00024E-02  5.19005E-04  3.82422E-06 -4.54198E-09 -4.24523E-11  1.01013E-01 -2.80284E-04  1.45739E-07 -3.00215E-08  4.58089E-12
  0.700  6.08272E-02  6.58558E-04  6.78815E-06 -1.09390E-08 -1.38868E-10  9.90242E-02 -3.55546E-04  3.56454E-07 -7.31997E-08  1.58904E-11
  0.800  6.17347E-02  7.92085E-04  1.10231E-05 -2.31377E-08 -3.82350E-10  9.69772E-02 -4.28295E-04  7.72395E-07 -1.56911E-07  4.65713E-11
  0.900  6.27055E-02  9.11145E-04  1.66982E-05 -4.42744E-08 -9.21244E-10  9.49508E-02 -4.94868E-04  1.52287E-06 -3.04487E-07  1.19829E-10
  1.000  6.37187E-02  1.00804E-03  2.39126E-05 -7.82265E-08 -1.99472E-09  9.30185E-02 -5.52324E-04  2.78280E-06 -5.45677E-07  2.77665E-10
  1.100  6.47515E-02  1.07621E-03  3.26816E-05 -1.29522E-07 -3.95552E-09  9.12451E-02 -5.98635E-04  4.77567E-06 -9.16111E-07  5.89819E-10
  1.200  6.57804E-02  1.11061E-03  4.29278E-05 -2.03213E-07 -7.28439E-09  8.96843E-02 -6.32785E-04  7.77255E-06 -1.45606E-06  1.16359E-09
  1.300  6.67821E-02  1.10794E-03  5.44801E-05 -3.04739E-07 -1.25901E-08  8.83763E-02 -6.54793E-04  1.20859E-05 -2.20850E-06  2.15250E-09
  1.400  6.77342E-02  1.06675E-03  6.70786E-05 -4.39813E-07 -2.05897E-08  8.73465E-02 -6.65645E-04  1.80576E-05 -3.21662E-06  3.76112E-09
  1.500  6.86160E-02  9.87545E-04  8.03861E-05 -6.14344E-07 -3.20643E-08  8.66051E-02 -6.67147E-04  2.60405E-05 -4.52077E-06  6.24198E-09
  1.600  6.94096E-02  8.72646E-04  9.40039E-05 -8.34413E-07 -4.77904E-08  8.61476E-02 -6.61730E-04  3.63747E-05 -6.15518E-06  9.88042E-09
  1.700  7.01005E-02  7.26056E-04  1.07491E-04 -1.10627E-06 -6.84460E-08  8.59562E-02 -6.52206E-04  4.93574E-05 -8.14454E-06  1.49623E-08
  1.800  7.06777E-02  5.53205E-04  1.20387E-04 -1.43638E-06 -9.44981E-08  8.60008E-02 -6.41506E-04  6.52101E-05 -1.05007E-05  2.17205E-08
  1.900  7.11349E-02  3.60639E-04  1.32234E-04 -1.83135E-06 -1.26077E-07  8.62422E-02 -6.32424E-04  8.40444E-05 -1.32195E-05  3.02573E-08
  2.000  7.14694E-02  1.55667E-04  1.42595E-04 -2.29790E-06 -1.62848E-07  8.66339E-02 -6.27372E-04  1.05828E-04 -1.62784E-05  4.04410E-08
  2.100  7.16832E-02 -5.40019E-05  1.51081E-04 -2.84256E-06 -2.03892E-07  8.71257E-02 -6.28180E-04  1.30358E-04 -1.96347E-05  5.17779E-08
  2.200  7.17817E-02 -2.60639E-04  1.57361E-04 -3.47135E-06 -2.47604E-07  8.76660E-02 -6.35934E-04  1.57237E-04 -2.32240E-05  6.32659E-08
  2.300  7.17738E-02 -4.56841E-04  1.61180E-04 -4.18915E-06 -2.91627E-07  8.82047E-02 -6.50882E-04  1.85863E-04 -2.69606E-05  7.32342E-08
  2.400  7.16711E-02 -6.35858E-04  1.62369E-04 -4.99895E-06 -3.32819E-07  8.86960E-02 -6.72396E-04  2.15435E-04 -3.07381E-05  7.91845E-08
  2.500  7.14873E-02 -7.91865E-04  1.60853E-04 -5.90100E-06 -3.67280E-07  8.91001E-02 -6.99002E-04  2.44967E-04 -3.44316E-05  7.76450E-08
  2.600  7.12378E-02 -9.20186E-04  1.56654E-04 -6.89187E-06 -3.90426E-07  8.93856E-02 -7.28471E-04  2.73324E-04 -3.79008E-05  6.40560E-08
  2.700  7.09389E-02 -1.01747E-03  1.49895E-04 -7.96355E-06 -3.97120E-07  8.95301E-02 -7.57972E-04  2.99272E-04 -4.09941E-05  3.27060E-08
  2.800  7.06069E-02 -1.08178E-03  1.40794E-04 -9.10275E-06 -3.81860E-07  8.95214E-02 -7.84281E-04  3.21537E-04 -4.35544E-05 -2.32616E-08
  2.900  7.02583E-02 -1.11267E-03  1.29666E-04 -1.02905E-05 -3.39016E-07  8.93574E-02 -8.04024E-04  3.38885E-04 -4.54251E-05 -1.11753E-07
  3.000  6.99085E-02 -1.11118E-03  1.16918E-04 -1.15022E-05 -2.63098E-07  8.90457E-02 -8.13958E-04  3.50199E-04 -4.64578E-05 -2.41520E-07
  3.100  6.95718E-02 -1.07976E-03  1.03038E-04 -1.27082E-05 -1.49055E-07  8.86024E-02 -8.11262E-04  3.54565E-04 -4.65196E-05 -4.21841E-07
  3.200  6.92610E-02 -1.02217E-03  8.85900E-05 -1.38750E-05  7.43586E-09  8.80508E-02 -7.93827E-04  3.51348E-04 -4.55021E-05 -6.62069E-07
  3.300  6.89865E-02 -9.43369E-04  7.42051E-05 -1.49672E-05  2.09683E-07  8.74192E-02 -7.60515E-04  3.40266E-04 -4.33284E-05 -9.71064E-07
  3.400  6.87559E-02 -8.49283E-04  6.05661E-05 -1.59499E-05  4.59750E-07  8.67386E-02 -7.11383E-04  3.21435E-04 -3.99619E-05 -1.35652E-06
  3.500  6.85738E-02 -7.46610E-04  4.83948E-05 -1.67916E-05  7.58282E-07  8.60405E-02 -6.47828E-04  2.95408E-04 -3.54118E-05 -1.82418E-06
  3.600  6.84410E-02 -6.42551E-04  3.84336E-05 -1.74674E-05  1.10441E-06  8.53537E-02 -5.72656E-04  2.63178E-04 -2.97387E-05 -2.37706E-06
  3.700  6.83538E-02 -5.44532E-04  3.14246E-05 -1.79624E-05  1.49578E-06  8.47022E-02 -4.90044E-04  2.26153E-04 -2.30569E-05 -3.01465E-06
  3.800  6.83042E-02 -4.59898E-04  2.80850E-05 -1.82747E-05  1.92861E-06  8.41030E-02 -4.05404E-04  1.86111E-04 -1.55353E-05 -3.73215E-06
  3.900  6.82789E-02 -3.95599E-04  2.90798E-05 -1.84171E-05  2.39792E-06  8.35644E-02 -3.25126E-04  1.45115E-04 -7.39407E-06 -4.51996E-06
  4.000  6.82596E-02 -3.57870E-04  3.49912E-05 -1.84195E-05  2.89781E-06  8.30842E-02 -2.56232E-04  1.05414E-04  1.10109E-06 -5.36328E-06
  4.100  6.82233E-02 -3.51925E-04  4.62875E-05 -1.83281E-05  3.42177E-06  8.26500E-02 -2.05946E-04  6.93223E-05  9.64791E-06 -6.24205E-06
  4.200  6.81424E-02 -3.81685E-04  6.32909E-05 -1.82046E-05  3.96304E-06  8.22387E-02 -1.81207E-04  3.90872E-05  1.79198E-05 -7.13121E-06
  4.300  6.79855E-02 -4.49537E-04  8.61485E-05 -1.81233E-05  4.51496E-06  8.18178E-02 -1.88168E-04  1.67555E-05  2.55804E-05 -8.00140E-06
  4.400  6.77189E-02 -5.56165E-04  1.14807E-04 -1.81671E-05  5.07124E-06  8.13469E-02 -2.31710E-04  4.04683E-06  3.22998E-05 -8.81992E-06
  4.500  6.73076E-02 -7.00450E-04  1.48994E-04 -1.84215E-05  5.62619E-06  8.07800E-02 -3.15019E-04  2.24307E-06  3.77723E-05 -9.55221E-06
  4.600  6.67171E-02 -8.79459E-04  1.88208E-04 -1.89692E-05  6.17482E-06  8.00682E-02 -4.39254E-04  1.21013E-05  4.17325E-05 -1.01635E-05
  4.700  6.59153E-02 -1.08853E-03  2.31722E-04 -1.98824E-05  6.71285E-06  7.91628E-02 -6.03347E-04  3.37982E-05  4.39718E-05 -1.06206E-05
  4.800  6.48740E-02 -1.32145E-03  2.78592E-04 -2.12172E-05  7.23659E-06  7.80180E-02 -8.03949E-04  6.69092E-05  4.43506E-05 -1.08943E-05
  4.900  6.35709E-02 -1.57072E-03  3.27690E-04 -2.30072E-05  7.74273E-06  7.65944E-02 -1.03554E-03  1.10425E-04  4.28083E-05 -1.09606E-05
  5.000  6.19909E-02 -1.82792E-03  3.77735E-04 -2.52594E-05  8.22812E-06  7.48613E-02 -1.29067E-03  1.62802E-04  3.93685E-05 -1.08030E-05
  5.100  6.01273E-02 -2.08408E-03  4.27345E-04 -2.79512E-05  8.68941E-06  7.27988E-02 -1.56040E-03  2.22052E-04  3.41386E-05 -1.04138E-05
  5.200  5.79829E-02 -2.33015E-03  4.75094E-04 -3.10300E-05  9.12284E-06  7.03992E-02 -1.83472E-03  2.85848E-04  2.73057E-05 -9.79455E-06
  5.300  5.55697E-02 -2.55745E-03  5.19574E-04 -3.44143E-05  9.52400E-06  6.76678E-02 -2.10323E-03  3.51659E-04  1.91267E-05 -8.95688E-06
  5.400  5.29091E-02 -2.75805E-03  5.59457E-04 -3.79979E-05  9.88774E-06  6.46230E-02 -2.35565E-03  4.16885E-04  9.91501E-06 -7.92194E-06
  5.500  5.00307E-02 -2.92520E-03  5.93558E-04 -4.16551E-05  1.02081E-05  6.12952E-02 -2.58243E-03  4.79001E-04  2.32660E-08 -6.71959E-06
  5.600  4.69716E-02 -3.05360E-03  6.20884E-04 -4.52480E-05  1.04787E-05  5.77251E-02 -2.77527E-03  5.35683E-04 -1.01751E-05 -5.38693E-06
  5.700  4.37747E-02 -3.13962E-03  6.40686E-04 -4.86345E-05  1.06925E-05  5.39623E-02 -2.92755E-03  5.84923E-04 -2.03058E-05 -3.96639E-06
  5.800  4.04863E-02 -3.18139E-03  6.52481E-04 -5.16768E-05  1.08428E-05  5.00625E-02 -3.03459E-03  6.25114E-04 -3.00125E-05 -2.50354E-06
  5.900  3.71549E-02 -3.17886E-03  6.56075E-04 -5.42492E-05  1.09233E-05  4.60848E-02 -3.09387E-03  6.55112E-04 -3.89738E-05 -1.04467E-06
  6.000  3.38290E-02 -3.13363E-03  6.51557E-04 -5.62455E-05  1.09286E-05  4.20891E-02 -3.10496E-03  6.74262E-04 -4.69179E-05  3.65515E-07
  6.100  3.05548E-02 -3.04884E-03  6.39293E-04 -5.75843E-05  1.08549E-05  3.81339E-02 -3.06950E-03  6.82398E-04 -5.36326E-05  1.68616E-06
  6.200  2.73749E-02 -2.92887E-03  6.19890E-04 -5.82135E-05  1.07000E-05  3.42734E-02 -2.99090E-03  6.79814E-04 -5.89720E-05  2.88208E-06
  6.300  2.43270E-02 -2.77905E-03  5.94158E-04 -5.81116E-05  1.04642E-05  3.05561E-02 -2.87404E-03  6.67209E-04 -6.28582E-05  3.92520E-06
  6.400  2.14427E-02 -2.60533E-03  5.63067E-04 -5.72880E-05  1.01498E-05  2.70234E-02 -2.72491E-03  6.45615E-04 -6.52795E-05  4.79550E-06
  6.500  1.87470E-02 -2.41395E-03  5.27690E-04 -5.57808E-05  9.76185E-06  2.37084E-02 -2.55019E-03  6.16317E-04 -6.62846E-05  5.48137E-06
  6.600  1.62577E-02 -2.21116E-03  4.89151E-04 -5.36530E-05  9.30728E-06  2.06356E-02 -2.35684E-03  5.80765E-04 -6.59743E-05  5.97952E-06
  6.700  1.39860E-02 -2.00288E-03  4.48572E-04 -5.09880E-05  8.79522E-06  1.78211E-02 -2.15176E-03  5.40484E-04 -6.44907E-05  6.29435E-06
  6.800  1.19365E-02 -1.79453E-03  4.07030E-04 -4.78836E-05  8.23630E-06  1.52727E-02 -1.94144E-03  4.96998E-04 -6.20053E-05  6.43696E-06
  6.900  1.01081E-02 -1.59084E-03  3.65513E-04 -4.44461E-05  7.64228E-06  1.29910E-02 -1.73172E-03  4.51758E-04 -5.87078E-05  6.42388E-06
  7.000  8.49464E-03 -1.39574E-03  3.24894E-04 -4.07845E-05  7.02549E-06  1.09700E-02 -1.52762E-03  4.06085E-04 -5.47939E-05  6.27565E-06
  7.100  7.08587E-03 -1.21229E-03  2.85908E-04 -3.70049E-05  6.39829E-06  9.19867E-03 -1.33320E-03  3.61132E-04 -5.04558E-05  6.01530E-06
  7.200  5.86846E-03 -1.04272E-03  2.49139E-04 -3.32063E-05  5.77258E-06  7.66181E-03 -1.15157E-03  3.17856E-04 -4.58733E-05  5.66696E-06
  7.300  4.82685E-03 -8.88457E-04  2.15022E-04 -2.94762E-05  5.15931E-06  6.34132E-03 -9.84869E-04  2.77006E-04 -4.12075E-05  5.25450E-06
  7.400  3.94423E-03 -7.50179E-04  1.83845E-04 -2.58891E-05  4.56815E-06  5.21728E-03 -8.34366E-04  2.39129E-04 -3.65965E-05  4.80051E-06
  7.500  3.20324E-03 -6.27953E-04  1.55761E-04 -2.25042E-05  4.00719E-06  4.26898E-03 -7.00548E-04  2.04577E-04 -3.21526E-05  4.32539E-06
  7.600  2.58665E-03 -5.21329E-04  1.30805E-04 -1.93655E-05  3.48281E-06  3.47568E-03 -5.83257E-04  1.73529E-04 -2.79622E-05  3.84681E-06
  7.700  2.07791E-03 -4.29467E-04  1.08916E-04 -1.65021E-05  2.99960E-06  2.81731E-03 -4.81821E-04  1.46018E-04 -2.40866E-05  3.37931E-06
  7.800  1.66148E-03 -3.51249E-04  8.99507E-05 -1.39293E-05  2.56041E-06  2.27496E-03 -3.95193E-04  1.21957E-04 -2.05637E-05  2.93429E-06
  7.900  1.32315E-03 -2.85379E-04  7.37116E-05 -1.16509E-05  2.16649E-06  1.83123E-03 -3.22077E-04  1.01166E-04 -1.74116E-05  2.52000E-06
  8.000  1.05015E-03 -2.30481E-04  5.99611E-05 -9.66033E-06  1.81765E-06  1.47041E-03 -2.61037E-04  8.34031E-05 -1.46317E-05  2.14186E-06
  8.100  8.31246E-04 -1.85165E-04  4.84408E-05 -7.94356E-06  1.51251E-06  1.17863E-03 -2.10591E-04  6.83841E-05 -1.22119E-05  1.80279E-06
  8.200  6.56693E-04 -1.48091E-04  3.88849E-05 -6.48086E-06  1.24873E-06  9.43798E-04 -1.69285E-04  5.58061E-05 -1.01310E-05  1.50360E-06
  8.300  5.18179E-04 -1.18004E-04  3.10327E-05 -5.24888E-06  1.02328E-06  7.55541E-04 -1.35742E-04  4.53635E-05 -8.36085E-06  1.24346E-06
  8.400  4.08710E-04 -9.37641E-05  2.46367E-05 -4.22239E-06  8.32667E-07  6.05096E-04 -1.08702E-04  3.67612E-05 -6.86990E-06  1.02029E-06
  8.500  3.22475E-04 -7.43594E-05  1.94685E-05 -3.37571E-06  6.73171E-07  4.85142E-04 -8.70408E-05  2.97231E-05 -5.62510E-06  8.31191E-07
  8.600  2.54706E-04 -5.89099E-05  1.53233E-05 -2.68384E-06  5.41003E-07  3.89632E-04 -6.97761E-05  2.39986E-05 -4.59375E-06  6.72769E-07
  8.700  2.01530E-04 -4.66645E-05  1.20203E-05 -2.12329E-06  4.32473E-07  3.13625E-04 -5.60687E-05  1.93652E-05 -3.74484E-06  5.41404E-07
  8.800  1.59831E-04 -3.69926E-05  9.40386E-06 -1.67264E-06  3.44102E-07  2.53116E-04 -4.52133E-05  1.56294E-05 -3.04986E-06  4.33487E-07
  8.900  1.27126E-04 -2.93724E-05  7.34177E-06 -1.31284E-06  2.72693E-07  2.04890E-04 -3.66261E-05  1.26258E-05 -2.48331E-06  3.45570E-07
  9.000  1.01446E-04 -2.33776E-05  5.72360E-06 -1.02730E-06  2.15383E-07  1.66378E-04 -2.98309E-05  1.02153E-05 -2.02288E-06  2.74474E-07
  9.100  8.12440E-05 -1.86636E-05  4.45834E-06 -8.01852E-07  1.69661E-07  1.35541E-04 -2.44438E-05  8.28254E-06 -1.64946E-06  2.17353E-07
  9.200  6.53101E-05 -1.49550E-05  3.47188E-06 -6.24617E-07  1.33366E-07  1.10768E-04 -2.01584E-05  6.73266E-06 -1.34689E-06  1.71718E-07
  9.300  5.27005E-05 -1.20331E-05  2.70455E-06 -4.85775E-07  1.04672E-07  9.07933E-05 -1.67329E-05  5.48872E-06 -1.10173E-06  1.35434E-07
  9.400  4.26823E-05 -9.72560E-06  2.10868E-06 -3.77317E-07  8.20588E-08  7.46195E-05 -1.39773E-05  4.48864E-06 -9.02946E-07  1.06701E-07
  9.500  3.46880E-05 -7.89738E-06  1.64652E-06 -2.92785E-07  6.42773E-08  6.14666E-05 -1.17441E-05  3.68272E-06 -7.41527E-07  8.40260E-08
  9.600  2.82783E-05 -6.44303E-06  1.28834E-06 -2.27022E-07  5.03166E-08  5.07230E-05 -9.91866E-06  3.03133E-06 -6.10197E-07  6.61814E-08
  9.700  2.31136E-05 -5.28054E-06  1.01081E-06 -1.75938E-07  3.93654E-08  4.19093E-05 -8.41294E-06  2.50301E-06 -5.03101E-07  5.21713E-08
  9.800  1.89311E-05 -4.34625E-06  7.95737E-07 -1.36314E-07  3.07788E-08  3.46496E-05 -7.15923E-06  2.07283E-06 -4.15545E-07  4.11924E-08
  9.900  1.55277E-05 -3.59087E-06  6.28940E-07 -1.05619E-07  2.40475E-08  2.86481E-05 -6.10577E-06  1.72107E-06 -3.43773E-07  3.26013E-08
 10.000  1.27457E-05 -2.97626E-06  4.99400E-07 -8.18757E-08  1.87716E-08  2.36714E-05 -5.21301E-06  1.43216E-06 -2.84779E-07  2.58851E-08
 10.100  1.04624E-05 -2.47294E-06  3.98572E-07 -6.35346E-08  1.46377E-08  1.95347E-05 -4.45078E-06  1.19377E-06 -2.36159E-07  2.06365E-08
 10.200  8.58235E-06 -2.05813E-06  3.19840E-07 -4.93861E-08  1.14005E-08  1.60907E-05 -3.79602E-06  9.96200E-07 -1.95982E-07  1.65334E-08
 10.300  7.03028E-06 -1.71424E-06  2.58098E-07 -3.84845E-08  8.86807E-09  1.32211E-05 -3.23105E-06  8.31743E-07 -1.62701E-07  1.33212E-08
 10.400  5.74691E-06 -1.42764E-06  2.09416E-07 -3.00910E-08  6.88963E-09  1.08303E-05 -2.74217E-06  6.94320E-07 -1.35067E-07  1.07999E-08
 10.500  4.68500E-06 -1.18774E-06  1.70779E-07 -2.36291E-08  5.34673E-09  8.84028E-06 -2.31864E-06  5.79103E-07 -1.12074E-07  8.81294E-09
 10.600  3.80659E-06 -9.86297E-07  1.39885E-07 -1.86497E-08  4.14596E-09  7.18685E-06 -1.95189E-06  4.82253E-07 -9.29089E-08  7.23807E-09
 10.700  3.08087E-06 -8.16805E-07  1.14980E-07 -1.48043E-08  3.21349E-09  5.81658E-06 -1.63492E-06  4.00699E-07 -7.69118E-08  5.98071E-09
 10.800  2.48260E-06 -6.74102E-07  9.47388E-08 -1.18236E-08  2.49092E-09  4.68474E-06 -1.36184E-06  3.31970E-07 -6.35467E-08  4.96802E-09
 10.900  1.99087E-06 -5.54031E-07  7.81580E-08 -9.50067E-09  1.93208E-09  3.75355E-06 -1.12760E-06  2.74062E-07 -5.23765E-08  4.14439E-09
 11.000  1.58823E-06 -4.53188E-07  6.44807E-08 -7.67778E-09  1.50048E-09  2.99093E-06 -9.27724E-07  2.25329E-07 -4.30429E-08  3.46764E-09
 11.100  1.26000E-06 -3.68749E-07  5.31347E-08 -6.23537E-09  1.16741E-09  2.36954E-06 -7.58202E-07  1.84406E-07 -3.52512E-08  2.90605E-09
 11.200  9.93774E-07 -2.98326E-07  4.36846E-08 -5.08356E-09  9.10357E-10  1.86603E-06 -6.15382E-07  1.50149E-07 -2.87572E-08  2.43585E-09
 11.300  7.79039E-07 -2.39879E-07  3.57960E-08 -4.15520E-09  7.11768E-10  1.46045E-06 -4.95919E-07  1.21584E-07 -2.33573E-08  2.03928E-09
 11.400  6.06868E-07 -1.91643E-07  2.92081E-08 -3.40034E-09  5.58030E-10  1.13579E-06 -3.96748E-07  9.78773E-08 -1.88810E-08  1.70307E-09
 11.500  4.69698E-07 -1.52082E-07  2.37133E-08 -2.78187E-09  4.38658E-10  8.77601E-07 -3.15067E-07  7.83077E-08 -1.51840E-08  1.41717E-09
 11.600  3.61137E-07 -1.19855E-07  1.91432E-08 -2.27216E-09  3.45620E-10  6.73649E-07 -2.48335E-07  6.22487E-08 -1.21439E-08  1.17385E-09
 11.700  2.75807E-07 -9.37879E-08  1.53579E-08 -1.85048E-09  2.72796E-10  5.13653E-07 -1.94263E-07  4.91545E-08 -9.65618E-09  9.67044E-10
 11.800  2.09208E-07 -7.28612E-08  1.22392E-08 -1.50103E-09  2.15540E-10  3.89024E-07 -1.50814E-07  3.85500E-08 -7.63159E-09  7.91810E-10
 11.900  1.57603E-07 -5.61900E-08  9.68546E-09 -1.21155E-09  1.70332E-10  2.92638E-07 -1.16193E-07  3.00228E-08 -5.99357E-09  6.44013E-10
 12.000  1.17907E-07 -4.30133E-08  7.60880E-09 -9.72289E-10  1.34507E-10  2.18633E-07 -8.88395E-08  2.32162E-08 -4.67660E-09  5.20088E-10
 12.100  8.75975E-08 -3.26818E-08  5.93265E-09 -7.75300E-10  1.06038E-10  1.62226E-07 -6.74092E-08  1.78241E-08 -3.62473E-09  4.16888E-10
 12.200  6.46263E-08 -2.46466E-08  4.59040E-09 -6.13962E-10  8.33767E-11  1.19547E-07 -5.07606E-08  1.35853E-08 -2.79038E-09  3.31597E-10
 12.300  4.73466E-08 -1.84479E-08  3.52430E-09 -4.82656E-10  6.53318E-11  8.74910E-08 -3.79349E-08  1.02791E-08 -2.13326E-09  2.61679E-10
 12.400  3.44453E-08 -1.37049E-08  2.68464E-09 -3.76552E-10  5.09753E-11  6.35916E-08 -2.81364E-08  7.72059E-09 -1.61949E-09  2.04851E-10
 12.500  2.48849E-08 -1.01053E-08  2.02895E-09 -2.91479E-10  3.95779E-11  4.59039E-08 -2.07124E-08  5.75639E-09 -1.22077E-09  1.59067E-10
 12.600  1.78530E-08 -7.39566E-09  1.52132E-09 -2.23830E-10  3.05593E-11  3.29092E-08 -1.51337E-08  4.26041E-09 -9.13665E-10  1.22511E-10
 12.700  1.27194E-08 -5.37241E-09  1.13171E-09 -1.70494E-10  2.34538E-11  2.34321E-08 -1.09756E-08  3.13008E-09 -6.78929E-10  9.35873E-11
 12.800  8.99937E-09 -3.87382E-09  8.35259E-10 -1.28812E-10  1.78849E-11  1.65707E-08 -7.90134E-09  2.28280E-09 -5.00881E-10  7.09093E-11
 12.900  6.32351E-09 -2.77271E-09  6.11637E-10 -9.65265E-11  1.35461E-11  1.16390E-08 -5.64658E-09  1.65271E-09 -3.66869E-10  5.32901E-11
 13.000  4.41284E-09 -1.97008E-09  4.44395E-10 -7.17430E-11  1.01877E-11  8.11990E-09 -4.00592E-09  1.18782E-09 -2.66779E-10  3.97247E-11
 13.100  3.05848E-09 -1.38962E-09  3.20381E-10 -5.28887E-11  7.60663E-12  5.62670E-09 -2.82146E-09  8.47519E-10 -1.92602E-10  2.93743E-11
 13.200  2.10541E-09 -9.73102E-10  2.29198E-10 -3.86734E-11  5.63751E-12  3.87293E-09 -1.97298E-09  6.00346E-10 -1.38051E-10  2.15472E-11
 13.300  1.43955E-09 -6.76541E-10  1.62713E-10 -2.80510E-11  4.14680E-12  2.64803E-09 -1.36984E-09  4.22206E-10 -9.82428E-11  1.56803E-11
 13.400  9.77663E-10 -4.67008E-10  1.14639E-10 -2.01834E-11  3.02717E-12  1.79853E-09 -9.44360E-10  2.94805E-10 -6.94144E-11  1.13211E-11
 13.500  6.59542E-10 -3.20088E-10  8.01602E-11 -1.44071E-11  2.19299E-12  1.21349E-09 -6.46471E-10  2.04385E-10 -4.86966E-11  8.11000E-12
 13.600  4.41980E-10 -2.17847E-10  5.56333E-11 -1.02030E-11  1.57652E-12  8.13386E-10 -4.39466E-10  1.40698E-10 -3.39203E-11  5.76477E-12
 13.700  2.94230E-10 -1.47228E-10  3.83252E-11 -7.16922E-12  1.12467E-12  5.41640E-10 -2.96680E-10  9.61759E-11 -2.34611E-11  4.06631E-12
 13.800  1.94585E-10 -9.88123E-11  2.62081E-11 -4.99854E-12  7.96186E-13  3.58339E-10 -1.98910E-10  6.52837E-11 -1.61130E-11  2.84648E-12
 13.900  1.27846E-10 -6.58614E-11  1.77915E-11 -3.45838E-12  5.59344E-13  2.35539E-10 -1.32451E-10  4.40070E-11 -1.09891E-11  1.97758E-12
 14.000  8.34521E-11 -4.35985E-11  1.19907E-11 -2.37460E-12  3.89970E-13  1.53826E-10 -8.75998E-11  2.94602E-11 -7.44255E-12  1.36366E-12
 14.100  5.41221E-11 -2.86652E-11  8.02336E-12 -1.61818E-12  2.69828E-13  9.98180E-11 -5.75466E-11  1.95868E-11 -5.00573E-12  9.33374E-13
 14.200  3.48752E-11 -1.87197E-11  5.33056E-12 -1.09450E-12  1.85296E-13  6.43601E-11 -3.75512E-11  1.29338E-11 -3.34363E-12  6.34177E-13
 14.300  2.23294E-11 -1.21430E-11  3.51657E-12 -7.34825E-13  1.26296E-13  4.12350E-11 -2.43409E-11  8.48288E-12 -2.21815E-12  4.27757E-13
 14.400  1.42060E-11 -7.82441E-12  2.30367E-12 -4.89736E-13  8.54429E-14  2.62525E-11 -1.56738E-11  5.52623E-12 -1.46151E-12  2.86447E-13
 14.500  8.98086E-12 -5.00840E-12  1.49864E-12 -3.24025E-13  5.73788E-14  1.66091E-11 -1.00267E-11  3.57605E-12 -9.56457E-13  1.90449E-13
 14.600  5.64193E-12 -3.18482E-12  9.68228E-13 -2.12844E-13  3.82506E-14  1.04425E-11 -6.37238E-12  2.29870E-12 -6.21728E-13  1.25726E-13
 14.700  3.52222E-12 -2.01199E-12  6.21270E-13 -1.38815E-13  2.53140E-14  6.52469E-12 -4.02371E-12  1.46786E-12 -4.01442E-13  8.24149E-14
 14.800  2.18523E-12 -1.26282E-12  3.95939E-13 -8.98945E-14  1.66319E-14  4.05158E-12 -2.52434E-12  9.31167E-13 -2.57483E-13  5.36475E-14
 14.900  1.34737E-12 -7.87500E-13  2.50636E-13 -5.78062E-14  1.08494E-14  2.50041E-12 -1.57356E-12  5.86849E-13 -1.64057E-13  3.46798E-14
 15.000  8.25650E-13 -4.87940E-13  1.57596E-13 -3.69136E-14  7.02710E-15  1.53367E-12 -9.74644E-13  3.67449E-13 -1.03842E-13  2.22644E-14
 15.100  5.02851E-13 -3.00405E-13  9.84362E-14 -2.34095E-14  4.51935E-15  9.34979E-13 -5.99866E-13  2.28590E-13 -6.52987E-14  1.41963E-14
 15.200  3.04389E-13 -1.83776E-13  6.10788E-14 -1.47440E-14  2.88621E-15  5.66539E-13 -3.66878E-13  1.41293E-13 -4.07945E-14  8.99059E-15
 15.300  1.83138E-13 -1.11719E-13  3.76506E-14 -9.22316E-15  1.83044E-15  3.41216E-13 -2.22980E-13  8.67765E-14 -2.53209E-14  5.65552E-15
 15.400  1.09521E-13 -6.74893E-14  2.30578E-14 -5.73066E-15  1.15286E-15  2.04273E-13 -1.34678E-13  5.29564E-14 -1.56153E-14  3.53384E-15
 15.500  6.51033E-14 -4.05163E-14  1.40296E-14 -3.53682E-15  7.21139E-16  1.21559E-13 -8.08411E-14  3.21131E-14 -9.56828E-15  2.19347E-15
 15.600  3.84683E-14 -2.41727E-14  8.48147E-15 -2.16832E-15  4.48022E-16  7.19060E-14 -4.82263E-14  1.93512E-14 -5.82560E-15  1.35252E-15
 15.700  2.25948E-14 -1.43329E-14  5.09463E-15 -1.32056E-15  2.76464E-16  4.22825E-14 -2.85934E-14  1.15881E-14 -3.52440E-15  8.28524E-16
 15.800  1.31927E-14 -8.44639E-15  3.04079E-15 -7.98975E-16  1.69456E-16  2.47162E-14 -1.68497E-14  6.89610E-15 -2.11876E-15  5.04230E-16
 15.900  7.65751E-15 -4.94708E-15  1.80346E-15 -4.80252E-16  1.03175E-16  1.43628E-14 -9.86899E-15  4.07848E-15 -1.26573E-15  3.04883E-16
 16.000  4.41856E-15 -2.87993E-15  1.06290E-15 -2.86802E-16  6.24034E-17  8.29738E-15 -5.74542E-15  2.39722E-15 -7.51413E-16  1.83162E-16
 16.100  2.53468E-15 -1.66640E-15  6.22520E-16 -1.70173E-16  3.74954E-17  4.76540E-15 -3.32468E-15  1.40038E-15 -4.43308E-16  1.09333E-16
 16.200  1.44553E-15 -9.58422E-16  3.62332E-16 -1.00326E-16  2.23820E-17  2.72097E-15 -1.91236E-15  8.13062E-16 -2.59918E-16  6.48476E-17
 16.300  8.19592E-16 -5.47929E-16  2.09588E-16 -5.87708E-17  1.32737E-17  1.54462E-15 -1.09344E-15  4.69195E-16 -1.51454E-16  3.82191E-17
 16.400  4.62008E-16 -3.11382E-16  1.20489E-16 -3.42101E-17  7.82114E-18  8.71772E-16 -6.21485E-16  2.69121E-16 -8.77103E-17  2.23834E-17
 16.500  2.58934E-16 -1.75904E-16  6.88429E-17 -1.97881E-17  4.57880E-18  4.89189E-16 -3.51150E-16  1.53432E-16 -5.04846E-17  1.30269E-17
 16.600  1.44287E-16 -9.87833E-17  3.90946E-17 -1.13744E-17  2.66349E-18  2.72930E-16 -1.97237E-16  8.69499E-17 -2.88812E-17  7.53431E-18
 16.700  7.99411E-17 -5.51475E-17  2.20665E-17 -6.49745E-18  1.53952E-18  1.51404E-16 -1.10137E-16  4.89801E-17 -1.64223E-17  4.33056E-18
 16.800  4.40382E-17 -3.06064E-17  1.23800E-17 -3.68856E-18  8.84230E-19  8.35100E-17 -6.11405E-17  2.74269E-17 -9.28155E-18  2.47375E-18
 16.900  2.41219E-17 -1.68871E-17  6.90380E-18 -2.08107E-18  5.04672E-19  4.58001E-17 -3.37436E-17  1.52669E-17 -5.21422E-18  1.40440E-18
 17.000  1.31379E-17 -9.26326E-18  3.82693E-18 -1.16693E-18  2.86240E-19  2.49763E-17 -1.85152E-17  8.44801E-18 -2.91172E-18  7.92432E-19
 17.100  7.11508E-18 -5.05181E-18  2.10871E-18 -6.50341E-19  1.61340E-19  1.35435E-17 -1.01006E-17  4.64723E-18 -1.61626E-18  4.44407E-19
 17.200  3.83161E-18 -2.73914E-18  1.15505E-18 -3.60240E-19  9.03763E-20  7.30266E-18 -5.47850E-18  2.54144E-18 -8.91832E-19  2.47718E-19
 17.300  2.05181E-18 -1.47664E-18  6.28939E-19 -1.98339E-19  5.03135E-20  3.91551E-18 -2.95444E-18  1.38173E-18 -4.89189E-19  1.37248E-19
 17.400  1.09259E-18 -7.91476E-19  3.40450E-19 -1.08542E-19  2.78383E-20  2.08765E-18 -1.58416E-18  7.46843E-19 -2.66747E-19  7.55846E-20
 17.500  5.78557E-19 -4.21805E-19  1.83208E-19 -5.90443E-20  1.53088E-20  1.10688E-18 -8.44584E-19  4.01338E-19 -1.44598E-19  4.13764E-20
 17.600  3.04658E-19 -2.23514E-19  9.80148E-20 -3.19268E-20  8.36740E-21  5.83601E-19 -4.47726E-19  2.14425E-19 -7.79243E-20  2.25151E-20
 17.700  1.59537E-19 -1.17768E-19  5.21320E-20 -1.71610E-20  4.54574E-21  3.05997E-19 -2.36002E-19  1.13901E-19 -4.17485E-20  1.21788E-20
 17.800  8.30811E-20 -6.16999E-20  2.75672E-20 -9.16957E-21  2.45467E-21  1.59554E-19 -1.23698E-19  6.01567E-20 -2.22369E-20  6.54876E-21
 17.900  4.30269E-20 -3.21429E-20  1.44932E-20 -4.87063E-21  1.31755E-21  8.27361E-20 -6.44699E-20  3.15897E-20 -1.17755E-20  3.50060E-21
 18.000  2.21606E-20 -1.66509E-20  7.57581E-21 -2.57193E-21  7.02966E-22  4.26663E-20 -3.34125E-20  1.64939E-20 -6.19967E-21  1.86023E-21
 18.100  1.13509E-20 -8.57729E-21  3.93727E-21 -1.35016E-21  3.72829E-22  2.18819E-20 -1.72197E-20  8.56294E-21 -3.24524E-21  9.82737E-22
 18.200  5.78227E-21 -4.39367E-21  2.03456E-21 -7.04638E-22  1.96562E-22  1.11609E-20 -8.82500E-21  4.42033E-21 -1.68897E-21  5.16138E-22
 18.300  2.92946E-21 -2.23810E-21  1.04536E-21 -3.65608E-22  1.03019E-22  5.66150E-21 -4.49760E-21  2.26894E-21 -8.73985E-22  2.69501E-22
 18.400  1.47606E-21 -1.13373E-21  5.34053E-22 -1.88600E-22  5.36744E-23  2.85622E-21 -2.27947E-21  1.15808E-21 -4.49674E-22  1.39904E-22
 18.500  7.39699E-22 -5.71123E-22  2.71292E-22 -9.67280E-23  2.78011E-23  1.43313E-21 -1.14888E-21  5.87767E-22 -2.30045E-22  7.22072E-23
 18.600  3.68676E-22 -2.86117E-22  1.37035E-22 -4.93237E-23  1.43156E-23  7.15177E-22 -5.75861E-22  2.96641E-22 -1.17018E-22  3.70528E-23
 18.700  1.82759E-22 -1.42546E-22  6.88296E-23 -2.50069E-23  7.32859E-24  3.54965E-22 -2.87054E-22  1.48876E-22 -5.91874E-23  1.89043E-23
 18.800  9.01079E-23 -7.06280E-23  3.43775E-23 -1.26059E-23  3.72993E-24  1.75229E-22 -1.42305E-22  7.43002E-23 -2.97678E-23  9.58968E-24
 18.900  4.41878E-23 -3.48025E-23  1.70741E-23 -6.31839E-24  1.88738E-24  8.60356E-23 -7.01605E-23  3.68752E-23 -1.48871E-23  4.83683E-24
 19.000  2.15527E-23 -1.70554E-23  8.43276E-24 -3.14893E-24  9.49524E-25  4.20154E-23 -3.44024E-23  1.81997E-23 -7.40339E-24  2.42570E-24
 19.100  1.04560E-23 -8.31266E-24  4.14171E-24 -1.56045E-24  4.74949E-25  2.04081E-23 -1.67769E-23  8.93279E-24 -3.66109E-24  1.20960E-24
 19.200  5.04548E-24 -4.02948E-24  2.02289E-24 -7.68917E-25  2.36205E-25  9.85968E-24 -8.13709E-24  4.36021E-24 -1.80036E-24  5.99762E-25
 19.300  2.42166E-24 -1.94265E-24  9.82551E-25 -3.76751E-25  1.16800E-25  4.73801E-24 -3.92524E-24  2.11657E-24 -8.80400E-25  2.95704E-25
 19.400  1.15612E-24 -9.31496E-25  4.74607E-25 -1.83562E-25  5.74267E-26  2.26468E-24 -1.88325E-24  1.02180E-24 -4.28135E-25  1.44972E-25
 19.500  5.49005E-25 -4.44238E-25  2.27990E-25 -8.89348E-26  2.80743E-26  1.07671E-24 -8.98668E-25  4.90586E-25 -2.07046E-25  7.06744E-26
 19.600  2.59322E-25 -2.10719E-25  1.08920E-25 -4.28477E-26  1.36470E-26  5.09185E-25 -4.26527E-25  2.34253E-25 -9.95738E-26  3.42611E-26
 19.700  1.21842E-25 -9.94146E-26  5.17501E-26 -2.05285E-26  6.59632E-27  2.39521E-25 -2.01351E-25  1.11246E-25 -4.76234E-26  1.65160E-26
 19.800  5.69442E-26 -4.66509E-26  2.44532E-26 -9.78063E-27  3.17039E-27  1.12074E-25 -9.45422E-26  5.25428E-26 -2.26516E-26  7.91742E-27
 19.900  2.64731E-26 -2.17740E-26  1.14918E-26 -4.63407E-27  1.51522E-27  5.21634E-26 -4.41538E-26  2.46820E-26 -1.07148E-26  3.77432E-27
  67 151 200   0.100
  0.000  5.78688E-02 -2.94801E-16 -4.57967E-16 -4.37824E-16 -2.00269E-16  1.07271E-01 -5.58570E-16 -8.74301E-16 -1.05078E-15  8.58294E-17
  0.100  5.79366E-02  2.29651E-05  3.54465E-09 -4.81769E-13 -2.86098E-16  1.07067E-01 -1.30829E-05 -1.46015E-09 -4.30344E-13 -1.40188E-15
  0.200  5.81392E-02  9.04594E-05  5.62382E-08 -3.05137E-11 -1.87394E-15  1.06462E-01 -5.14265E-05 -2.30897E-08 -2.72636E-11 -4.04829E-15
  0.300  5.84734E-02  1.98365E-04  2.80734E-07 -3.42756E-10 -4.51892E-14  1.05483E-01 -1.12388E-04 -1.14602E-07 -3.06376E-10 -1.40074E-13
  0.400  5.89339E-02  3.40097E-04  8.69988E-07 -1.88880E-09 -4.33195E-13  1.04174E-01 -1.91801E-04 -3.52143E-07 -1.68944E-09 -1.38416E-12
  0.500  5.95131E-02  5.06993E-04  2.07101E-06 -7.02839E-09 -2.45665E-12  1.02591E-01 -2.84309E-04 -8.28498E-07 -6.29175E-09 -8.04842E-12
  0.600  6.02009E-02  6.88839E-04  4.16398E-06 -2.03623E-08 -9.94296E-12  1.00801E-01 -3.83784E-04 -1.63995E-06 -1.82461E-08 -3.36387E-11
  0.700  6.09843E-02  8.74459E-04  7.43828E-06 -4.95573E-08 -3.17102E-11  9.88782E-02 -4.83811E-04 -2.87049E-06 -4.44568E-08 -1.11674E-10
  0.800  6.18481E-02  1.05238E-03  1.21674E-05 -1.06029E-07 -8.46318E-11  9.69002E-02 -5.78163E-04 -4.57437E-06 -9.52338E-08 -3.12912E-10
  0.900  6.27745E-02  1.21146E-03  1.85844E-05 -2.05364E-07 -1.96238E-10  9.49426E-02 -6.61265E-04 -6.75822E-06 -1.84698E-07 -7.69540E-10
  1.000  6.37434E-02  1.34155E-03  2.68601E-05 -3.67395E-07 -4.05302E-10  9.30765E-02 -7.28577E-04 -9.36446E-06 -3.30875E-07 -1.70612E-09
  1.100  6.47333E-02  1.43401E-03  3.70849E-05 -6.15879E-07 -7.58099E-10  9.13648E-02 -7.76890E-04 -1.22576E-05 -5.55420E-07 -3.47606E-09
  1.200  6.57217E-02  1.48216E-03  4.92561E-05 -9.77775E-07 -1.29783E-09  8.98595E-02 -8.04502E-04 -1.52157E-05 -8.82965E-07 -6.60153E-09
  1.300  6.66859E-02  1.48162E-03  6.32707E-05 -1.48217E-06 -2.04472E-09  8.85996E-02 -8.11274E-04 -1.79280E-05 -1.34010E-06 -1.18141E-08
  1.400  6.76040E-02  1.43046E-03  7.89248E-05 -2.15888E-06 -2.96483E-09  8.76098E-02 -7.98566E-04 -2.00010E-05 -1.95406E-06 -2.00932E-08
  1.500  6.84558E-02  1.32929E-03  9.59189E-05 -3.03691E-06 -3.92661E-09  8.69003E-02 -7.69061E-04 -2.09732E-05 -2.75111E-06 -3.26988E-08
  1.600  6.92234E-02  1.18112E-03  1.13868E-04 -4.14273E-06 -4.64575E-09  8.64671E-02 -7.26500E-04 -2.03393E-05 -3.75485E-06 -5.11969E-08
  1.700  6.98922E-02  9.91165E-04  1.32319E-04 -5.49858E-06 -4.62030E-09  8.62929E-02 -6.75362E-04 -1.75821E-05 -4.98437E-06 -7.74741E-08
  1.800  7.04511E-02  7.66507E-04  1.50764E-04 -7.12082E-06 -3.06014E-09  8.63493E-02 -6.20490E-04 -1.22119E-05 -6.45242E-06 -1.13740E-07
  1.900  7.08933E-02  5.15702E-04  1.68670E-04 -9.01846E-06  1.18363E-09  8.65982E-02 -5.66725E-04 -3.80951E-06 -8.16361E-06 -1.62518E-07
  2.000  7.12159E-02  2.48320E-04  1.85492E-04 -1.11917E-05  9.68216E-09  8.69951E-02 -5.18546E-04  7.92915E-06 -1.01128E-05 -2.26622E-07
  2.100  7.14201E-02 -2.55400E-05  2.00701E-04 -1.36310E-05  2.44771E-08  8.74911E-02 -4.79750E-04  2.31511E-05 -1.22836E-05 -3.09115E-07
  2.200  7.15110E-02 -2.95732E-04  2.13804E-04 -1.63158E-05  4.81048E-08  8.80363E-02 -4.53194E-04  4.18106E-05 -1.46472E-05 -4.13267E-07
  2.300  7.14968E-02 -5.52523E-04  2.24362E-04 -1.92142E-05  8.35881E-08  8.85817E-02 -4.40606E-04  6.36440E-05 -1.71613E-05 -5.42489E-07
  2.400  7.13886E-02 -7.87009E-04  2.32008E-04 -2.22824E-05  1.34388E-07  8.90823E-02 -4.42475E-04  8.81565E-05 -1.97696E-05 -7.00263E-07
  2.500  7.11998E-02 -9.91481E-04  2.36460E-04 -2.54648E-05  2.04309E-07  8.94988E-02 -4.58034E-04  1.14627E-04 -2.24017E-05 -8.90061E-07
  2.600  7.09451E-02 -1.15972E-03  2.37533E-04 -2.86941E-05  2.97357E-07  8.97995E-02 -4.85320E-04  1.42125E-04 -2.49736E-05 -1.11527E-06
  2.700  7.06404E-02 -1.28720E-03  2.35147E-04 -3.18924E-05  4.17546E-07  8.99615E-02 -5.21332E-04  1.69554E-04 -2.73889E-05 -1.37907E-06
  2.800  7.03020E-02 -1.37129E-03  2.29334E-04 -3.49724E-05  5.68660E-07  8.99716E-02 -5.62256E-04  1.95698E-04 -2.95408E-05 -1.68440E-06
  2.900  6.99457E-02 -1.41124E-03  2.20239E-04 -3.78395E-05  7.53984E-07  8.98261E-02 -6.03763E-04  2.19293E-04 -3.13148E-05 -2.03378E-06
  3.000  6.95870E-02 -1.40829E-03  2.08120E-04 -4.03947E-05  9.76009E-07  8.95310E-02 -6.41352E-04  2.39105E-04 -3.25925E-05 -2.42925E-06
  3.100  6.92401E-02 -1.36551E-03  1.93350E-04 -4.25375E-05  1.23614E-06  8.91006E-02 -6.70738E-04  2.54005E-04 -3.32572E-05 -2.87225E-06
  3.200  6.89176E-02 -1.28774E-03  1.76409E-04 -4.41703E-05  1.53442E-06  8.85564E-02 -6.88238E-04  2.63062E-04 -3.31985E-05 -3.36342E-06
  3.300  6.86300E-02 -1.18134E-03  1.57879E-04 -4.52031E-05  1.86932E-06  8.79253E-02 -6.91146E-04  2.65608E-04 -3.23201E-05 -3.90250E-06
  3.400  6.83853E-02 -1.05403E-03  1.38437E-04 -4.55583E-05  2.23756E-06  8.72372E-02 -6.78064E-04  2.61314E-04 -3.05458E-05 -4.48807E-06
  3.500  6.81883E-02 -9.14530E-04  1.18839E-04 -4.51762E-05  2.63413E-06  8.65225E-02 -6.49154E-04  2.50229E-04 -2.78276E-05 -5.11733E-06
  3.600  6.80402E-02 -7.72256E-04  9.99102E-05 -4.40200E-05  3.05229E-06  8.58104E-02 -6.06293E-04  2.32813E-04 -2.41520E-05 -5.78585E-06
  3.700  6.79380E-02 -6.36952E-04  8.25200E-05 -4.20804E-05  3.48383E-06  8.51252E-02 -5.53111E-04  2.09939E-04 -1.95464E-05 -6.48726E-06
  3.800  6.78741E-02 -5.18279E-04  6.75621E-05 -3.93797E-05  3.91945E-06  8.44853E-02 -4.94881E-04  1.82867E-04 -1.40833E-05 -7.21298E-06
  3.900  6.78361E-02 -4.25408E-04  5.59247E-05 -3.59738E-05  4.34915E-06  8.39006E-02 -4.38277E-04  1.53196E-04 -7.88331E-06 -7.95198E-06
  4.000  6.78066E-02 -3.66598E-04  4.84583E-05 -3.19538E-05  4.76290E-06  8.33716E-02 -3.90996E-04  1.22790E-04 -1.11460E-06 -8.69058E-06
  4.100  6.77633E-02 -3.48795E-04  4.59393E-05 -2.74442E-05  5.15123E-06  8.28884E-02 -3.61262E-04  9.36806E-05  6.00980E-06 -9.41243E-06
  4.200  6.76794E-02 -3.77268E-04  4.90317E-05 -2.26003E-05  5.50586E-06  8.24309E-02 -3.57247E-04  6.79542E-05  1.32383E-05 -1.00986E-05
  4.300  6.75246E-02 -4.55300E-04  5.82481E-05 -1.76025E-05  5.82036E-06  8.19696E-02 -3.86456E-04  4.76337E-05  2.02902E-05 -1.07277E-05
  4.400  6.72655E-02 -5.83960E-04  7.39125E-05 -1.26490E-05  6.09058E-06  8.14669E-02 -4.55105E-04  3.45537E-05  2.68677E-05 -1.12769E-05
  4.500  6.68680E-02 -7.61974E-04  9.61269E-05 -7.94638E-06  6.31504E-06  8.08792E-02 -5.67569E-04  3.02444E-05  3.26704E-05 -1.17221E-05
  4.600  6.62977E-02 -9.85709E-04  1.24747E-04 -3.69945E-06  6.49499E-06  8.01594E-02 -7.25926E-04  3.58302E-05  3.74117E-05 -1.20393E-05
  4.700  6.55226E-02 -1.24928E-03  1.59364E-04 -9.97666E-08  6.63440E-06  7.92599E-02 -9.29649E-04  5.19499E-05  4.08348E-05 -1.22056E-05
  4.800  6.45144E-02 -1.54479E-03  1.99307E-04  2.68520E-06  6.73952E-06  7.81354E-02 -1.17548E-03  7.87048E-05  4.27286E-05 -1.22008E-05
  4.900  6.32503E-02 -1.86264E-03  2.43647E-04  4.52227E-06  6.81842E-06  7.67461E-02 -1.45749E-03  1.15639E-04  4.29418E-05 -1.20085E-05
  5.000  6.17146E-02 -2.19204E-03  2.91227E-04  5.32101E-06  6.88023E-06  7.50600E-02 -1.76736E-03  1.61755E-04  4.13937E-05 -1.16173E-05
  5.100  5.98996E-02 -2.52148E-03  3.40704E-04  5.03984E-06  6.93429E-06  7.30554E-02 -2.09478E-03  2.15561E-04  3.80811E-05 -1.10225E-05
  5.200  5.78069E-02 -2.83929E-03  3.90598E-04  3.68926E-06  6.98928E-06  7.07220E-02 -2.42806E-03  2.75150E-04  3.30813E-05 -1.02264E-05
  5.300  5.54472E-02 -3.13427E-03  4.39359E-04  1.33186E-06  7.05240E-06  6.80625E-02 -2.75480E-03  3.38302E-04  2.65489E-05 -9.23909E-06
  5.400  5.28405E-02 -3.39617E-03  4.85433E-04 -1.92093E-06  7.12864E-06  6.50919E-02 -3.06262E-03  4.02612E-04  1.87091E-05 -8.07853E-06
  5.500  5.00150E-02 -3.61621E-03  5.27339E-04 -5.91514E-06  7.22030E-06  6.18374E-02 -3.33985E-03  4.65615E-04  9.84593E-06 -6.77004E-06
  5.600  4.70064E-02 -3.78748E-03  5.63737E-04 -1.04632E-05  7.32665E-06  5.83367E-02 -3.57623E-03  5.24922E-04  2.86808E-07 -5.34552E-06
  5.700  4.38563E-02 -3.90518E-03  5.93491E-04 -1.53550E-05  7.44396E-06  5.46367E-02 -3.76341E-03  5.78342E-04 -9.61495E-06 -3.84206E-06
  5.800  4.06099E-02 -3.96677E-03  6.15718E-04 -2.03697E-05  7.56577E-06  5.07906E-02 -3.89539E-03  6.23995E-04 -1.94992E-05 -2.30032E-06
  5.900  3.73150E-02 -3.97200E-03  6.29828E-04 -2.52883E-05  7.68334E-06  4.68556E-02 -3.96870E-03  6.60389E-04 -2.90179E-05 -7.62600E-07
  6.000  3.40193E-02 -3.92279E-03  6.35542E-04 -2.99054E-05  7.78643E-06  4.28905E-02 -3.98250E-03  6.86484E-04 -3.78525E-05  7.29209E-07
  6.100  3.07686E-02 -3.82297E-03  6.32897E-04 -3.40396E-05  7.86404E-06  3.89531E-02 -3.93846E-03  7.01718E-04 -4.57289E-05  2.13561E-06
  6.200  2.76056E-02 -3.67800E-03  6.22227E-04 -3.75420E-05  7.90538E-06  3.50974E-02 -3.84049E-03  7.06005E-04 -5.24288E-05  3.42137E-06
  6.300  2.45680E-02 -3.49456E-03  6.04137E-04 -4.03016E-05  7.90065E-06  3.13727E-02 -3.69439E-03  6.99705E-04 -5.77974E-05  4.55703E-06
  6.400  2.16879E-02 -3.28016E-03  5.79455E-04 -4.22491E-05  7.84185E-06  2.78211E-02 -3.50737E-03  6.83573E-04 -6.17466E-05  5.52012E-06
  6.500  1.89907E-02 -3.04268E-03  5.49185E-04 -4.33565E-05  7.72336E-06  2.44770E-02 -3.28760E-03  6.58688E-04 -6.42539E-05  6.29583E-06
  6.600  1.64951E-02 -2.79003E-03  5.14445E-04 -4.36356E-05  7.54235E-06  2.13667E-02 -3.04366E-03  6.26369E-04 -6.53576E-05  6.87730E-06
  6.700  1.42131E-02 -2.52973E-03  4.76408E-04 -4.31333E-05  7.29893E-06  1.85079E-02 -2.78413E-03  5.88093E-04 -6.51495E-05  7.26536E-06
  6.800  1.21501E-02 -2.26868E-03  4.36248E-04 -4.19255E-05  6.99611E-06  1.59103E-02 -2.51715E-03  5.45402E-04 -6.37643E-05  7.46788E-06
  6.900  1.03058E-02 -2.01293E-03  3.95088E-04 -4.01103E-05  6.63957E-06  1.35761E-02 -2.25011E-03  4.99827E-04 -6.13683E-05  7.49882E-06
  7.000  8.67486E-03 -1.76750E-03  3.53956E-04 -3.78002E-05  6.23718E-06  1.15011E-02 -1.98940E-03  4.52818E-04 -5.81477E-05  7.37698E-06
  7.100  7.24786E-03 -1.53636E-03  3.13755E-04 -3.51148E-05  5.79852E-06  9.67573E-03 -1.74028E-03  4.05687E-04 -5.42967E-05  7.12460E-06
  7.200  6.01206E-03 -1.32239E-03  2.75240E-04 -3.21736E-05  5.33420E-06  8.08600E-03 -1.50679E-03  3.59572E-04 -5.00077E-05  6.76597E-06
  7.300  4.95248E-03 -1.12746E-03  2.39007E-04 -2.90906E-05  4.85526E-06  6.71486E-03 -1.29179E-03  3.15407E-04 -4.54615E-05  6.32605E-06
  7.400  4.05273E-03 -9.52517E-04  2.05491E-04 -2.59689E-05  4.37257E-06  5.54321E-03 -1.09704E-03  2.73916E-04 -4.08214E-05  5.82923E-06
  7.500  3.29577E-03 -7.97695E-04  1.74972E-04 -2.28978E-05  3.89628E-06  4.55087E-03 -9.23290E-04  2.35613E-04 -3.62278E-05  5.29835E-06
  7.600  2.66461E-03 -6.62488E-04  1.47592E-04 -1.99505E-05  3.43540E-06  3.71747E-03 -7.70473E-04  2.00819E-04 -3.17956E-05  4.75382E-06
  7.700  2.14280E-03 -5.45880E-04  1.23371E-04 -1.71834E-05  2.99752E-06  3.02307E-03 -6.37854E-04  1.69682E-04 -2.76135E-05  4.21317E-06
  7.800  1.71486E-03 -4.46495E-04  1.02227E-04 -1.46365E-05  2.58859E-06  2.44878E-03 -5.24198E-04  1.42203E-04 -2.37446E-05  3.69069E-06
  7.900  1.36654E-03 -3.62728E-04  8.40031E-05 -1.23343E-05  2.21286E-06  1.97705E-03 -4.27932E-04  1.18266E-04 -2.02284E-05  3.19737E-06
  8.000  1.08502E-03 -2.92860E-04  6.84830E-05 -1.02880E-05  1.87296E-06  1.59199E-03 -3.47285E-04  9.76639E-05 -1.70841E-05  2.74105E-06
  8.100  8.58940E-04 -2.35150E-04  5.54159E-05 -8.49721E-06  1.57000E-06  1.27941E-03 -2.80407E-04  8.01326E-05 -1.43134E-05  2.32665E-06
  8.200  6.78430E-04 -1.87912E-04  4.45323E-05 -6.95289E-06  1.30375E-06  1.02689E-03 -2.25464E-04  6.53692E-05 -1.19048E-05  1.95653E-06
  8.300  5.35036E-04 -1.49563E-04  3.55590E-05 -5.63921E-06  1.07292E-06  8.23744E-04 -1.80708E-04  5.30560E-05 -9.83668E-06  1.63099E-06
  8.400  4.21620E-04 -1.18664E-04  2.82307E-05 -4.53600E-06  8.75375E-07  6.60848E-04 -1.44526E-04  4.28762E-05 -8.08085E-06  1.34864E-06
  8.500  3.32233E-04 -9.39296E-05  2.22982E-05 -3.62061E-06  7.08381E-07  5.30558E-04 -1.15469E-04  3.45266E-05 -6.60527E-06  1.10689E-06
  8.600  2.61976E-04 -7.42443E-05  1.75345E-05 -2.86952E-06  5.68859E-07  4.26519E-04 -9.22651E-05  2.77264E-05 -5.37649E-06  9.02348E-07
  8.700  2.06860E-04 -5.86521E-05  1.37370E-05 -2.25960E-06  4.53567E-07  3.43513E-04 -7.38178E-05  2.22218E-05 -4.36144E-06  7.31140E-07
  8.800  1.63667E-04 -4.63495E-05  1.07295E-05 -1.76900E-06  3.59277E-07  2.77287E-04 -5.92015E-05  1.77894E-05 -3.52878E-06  5.89236E-07
  8.900  1.29824E-04 -3.66703E-05  8.36126E-06 -1.37775E-06  2.82895E-07  2.24408E-04 -4.76450E-05  1.42358E-05 -2.84974E-06  4.72651E-07
  9.000  1.03288E-04 -2.90694E-05  6.50554E-06 -1.06815E-06  2.21557E-07  1.82122E-04 -3.85152E-05  1.13964E-05 -2.29865E-06  3.77614E-07
  9.100  8.24526E-05 -2.31062E-05  5.05741E-06 -8.24813E-07  1.72685E-07  1.48232E-04 -3.12989E-05  9.13353E-06 -1.85310E-06  3.00669E-07
  9.200  6.60557E-05 -1.84276E-05  3.93114E-06 -6.34704E-07  1.34014E-07  1.20994E-04 -2.55838E-05  7.33326E-06 -1.49390E-06  2.38738E-07
  9.300  5.31142E-05 -1.47534E-05  3.05754E-06 -4.86943E-07  1.03598E-07  9.90310E-05 -2.10426E-05  5.90231E-06 -1.20490E-06  1.89138E-07
  9.400  4.28636E-05 -1.18625E-05  2.38127E-06 -3.72609E-07  7.97956E-08  8.12556E-05 -1.74169E-05  4.76509E-06 -9.72660E-07  1.49580E-07
  9.500  3.47114E-05 -9.58177E-06  1.85848E-06 -2.84483E-07  6.12489E-08  6.68133E-05 -1.45046E-05  3.86072E-06 -7.86150E-07  1.18139E-07
  9.600  2.81989E-05 -7.77594E-06  1.45468E-06 -2.16795E-07  4.68488E-08  5.50318E-05 -1.21481E-05  3.14053E-06 -6.36381E-07  9.32226E-08
  9.700  2.29718E-05 -6.33990E-06  1.14285E-06 -1.64974E-07  3.57028E-08  4.53829E-05 -1.02257E-05  2.56575E-06 -5.16080E-07  7.35242E-08
  9.800  1.87559E-05 -5.19214E-06  9.01942E-07 -1.25427E-07  2.70997E-08  3.74508E-05 -8.64348E-06  2.10564E-06 -4.19387E-07  5.79843E-08
  9.900  1.53395E-05 -4.26955E-06  7.15611E-07 -9.53454E-08  2.04782E-08  3.09078E-05 -7.32922E-06  1.73590E-06 -3.41597E-07  4.57487E-08
 10.000  1.25584E-05 -3.52340E-06  5.71196E-07 -7.25418E-08  1.53980E-08  2.54949E-05 -6.22780E-06  1.43738E-06 -2.78935E-07  3.61319E-08
 10.100  1.02850E-05 -2.91608E-06  4.58916E-07 -5.53163E-08  1.15148E-08  2.10066E-05 -5.29708E-06  1.19502E-06 -2.28377E-07  2.85858E-08
 10.200  8.42029E-06 -2.41856E-06  3.71235E-07 -4.23498E-08  8.56031E-09  1.72789E-05 -4.50491E-06  9.97044E-07 -1.87501E-07  2.26731E-08
 10.300  6.88638E-06 -2.00847E-06  3.02365E-07 -3.26203E-08  6.32496E-09  1.41803E-05 -3.82671E-06  8.34239E-07 -1.54368E-07  1.80450E-08
 10.400  5.62213E-06 -1.66853E-06  2.47875E-07 -2.53369E-08  4.64520E-09  1.16045E-05 -3.24361E-06  6.99436E-07 -1.27428E-07  1.44242E-08
 10.500  4.57902E-06 -1.38539E-06  2.04391E-07 -1.98895E-08  3.39300E-09  9.46483E-06 -2.74100E-06  5.87071E-07 -1.05442E-07  1.15902E-08
 10.600  3.71827E-06 -1.14865E-06  1.69353E-07 -1.58096E-08  2.46804E-09  7.69030E-06 -2.30738E-06  4.92830E-07 -8.74257E-08  9.36831E-09
 10.700  3.00856E-06 -9.50194E-07  1.40835E-07 -1.27397E-08  1.79170E-09  6.22196E-06 -1.93354E-06  4.13372E-07 -7.25951E-08  7.62083E-09
 10.800  2.42439E-06 -7.83615E-07  1.17388E-07 -1.04094E-08  1.30245E-09  5.01067E-06 -1.61195E-06  3.46105E-07 -6.03306E-08  6.23964E-09
 10.900  1.94479E-06 -6.43789E-07  9.79321E-08 -8.61699E-09  9.52399E-10  4.01512E-06 -1.33626E-06  2.89003E-07 -5.01430E-08  5.14055E-09
 11.000  1.55236E-06 -5.26569E-07  8.16602E-08 -7.21350E-09  7.04479E-10  3.20036E-06 -1.10098E-06  2.40471E-07 -4.16464E-08  4.25848E-09
 11.100  1.23255E-06 -4.28538E-07  6.79691E-08 -6.09111E-09  5.30326E-10  2.53678E-06 -9.01295E-07  1.99234E-07 -3.45367E-08  3.54364E-09
 11.200  9.73142E-07 -3.46843E-07  5.64042E-08 -5.17310E-09  4.08509E-10  1.99916E-06 -7.32860E-07  1.64255E-07 -2.85735E-08  2.95824E-09
 11.300  7.63819E-07 -2.79064E-07  4.66182E-08 -4.40592E-09  3.23104E-10  1.56604E-06 -5.91754E-07  1.34672E-07 -2.35660E-08  2.47390E-09
 11.400  5.95869E-07 -2.23126E-07  3.83402E-08 -3.75298E-09  2.62512E-10  1.21922E-06 -4.74401E-07  1.09756E-07 -1.93610E-08  2.06942E-09
 11.500  4.61930E-07 -1.77232E-07  3.13532E-08 -3.18965E-09  2.18479E-10  9.43224E-07 -3.77547E-07  8.88795E-08 -1.58343E-08  1.72902E-09
 11.600  3.55794E-07 -1.39824E-07  2.54782E-08 -2.69954E-09  1.85294E-10  7.25029E-07 -2.98243E-07  7.14903E-08 -1.28837E-08  1.44096E-09
 11.700  2.72247E-07 -1.09542E-07  2.05638E-08 -2.27168E-09  1.59131E-10  5.53680E-07 -2.33834E-07  5.71017E-08 -1.04238E-08  1.19642E-09
 11.800  2.06931E-07 -8.52074E-08  1.64783E-08 -1.89844E-09  1.37528E-10  4.20042E-07 -1.81954E-07  4.52810E-08 -8.38232E-09  9.88656E-10
 11.900  1.56226E-07 -6.57993E-08  1.31060E-08 -1.57420E-09  1.18971E-10  3.16542E-07 -1.40513E-07  3.56430E-08 -6.69717E-09  8.12380E-10
 12.000  1.17144E-07 -5.04400E-08  1.03437E-08 -1.29439E-09  1.02585E-10  2.36947E-07 -1.07688E-07  2.78465E-08 -5.31463E-09  6.63310E-10
 12.100  8.72384E-08 -3.83809E-08  8.09951E-09 -1.05492E-09  8.79015E-11  1.76174E-07 -8.19056E-08  2.15907E-08 -4.18793E-09  5.37860E-10
 12.200  6.45212E-08 -2.89883E-08  6.29176E-09 -8.51937E-10  7.46898E-11  1.30104E-07 -6.18243E-08  1.66125E-08 -3.27630E-09  4.32938E-10
 12.300  4.73911E-08 -2.17315E-08  4.84825E-09 -6.81636E-10  6.28470E-11  9.54323E-08 -4.63141E-08  1.26840E-08 -2.54424E-09  3.45810E-10
 12.400  3.45692E-08 -1.61702E-08  3.70579E-09 -5.40285E-10  5.23243E-11  6.95265E-08 -3.44341E-08  9.61014E-09 -1.96097E-09  2.74029E-10
 12.500  2.50426E-08 -1.19427E-08  2.80967E-09 -4.24238E-10  4.30844E-11  5.03104E-08 -2.54098E-08  7.22518E-09 -1.49998E-09  2.15389E-10
 12.600  1.80165E-08 -8.75500E-09  2.11307E-09 -3.30010E-10  3.50790E-11  3.61594E-08 -1.86109E-08  5.39040E-09 -1.13862E-09  1.67907E-10
 12.700  1.28727E-08 -6.37073E-09  1.57639E-09 -2.54333E-10  2.82406E-11  2.58135E-08 -1.35303E-08  3.99075E-09 -8.57690E-10  1.29807E-10
 12.800  9.13456E-09 -4.60166E-09  1.16661E-09 -1.94211E-10  2.24820E-11  1.83038E-08 -9.76424E-09  2.93200E-09 -6.41115E-10  9.95169E-11
 12.900  6.43772E-09 -3.29949E-09  8.56483E-10 -1.46954E-10  1.77010E-11  1.28918E-08 -6.99496E-09  2.13779E-09 -4.75548E-10  7.56593E-11
 13.000  4.50625E-09 -2.34859E-09  6.23832E-10 -1.10199E-10  1.37864E-11  9.01928E-09 -4.97472E-09  1.54695E-09 -3.50035E-10  5.70429E-11
 13.100  3.13293E-09 -1.65963E-09  4.50815E-10 -8.19058E-11  1.06239E-11  6.26802E-09 -3.51245E-09  1.11101E-09 -2.55679E-10  4.26510E-11
 13.200  2.16347E-09 -1.16434E-09  3.23250E-10 -6.03448E-11  8.10208E-12  4.32713E-09 -2.46226E-09  7.91972E-10 -1.85336E-10  3.16274E-11
 13.300  1.48400E-09 -8.11020E-10  2.29994E-10 -4.40767E-11  6.11633E-12  2.96752E-09 -1.71380E-09  5.60373E-10 -1.33328E-10  2.32612E-11
 13.400  1.01114E-09 -5.60907E-10  1.62392E-10 -3.19207E-11  4.57155E-12  2.02173E-09 -1.18445E-09  3.93587E-10 -9.51909E-11  1.69691E-11
 13.500  6.84380E-10 -3.85193E-10  1.13791E-10 -2.29236E-11  3.38385E-12  1.36836E-09 -8.12864E-10  2.74427E-10 -6.74535E-11  1.22794E-11
 13.600  4.60162E-10 -2.62673E-10  7.91373E-11 -1.63263E-11  2.48098E-12  9.20121E-10 -5.53978E-10  1.89957E-10 -4.74425E-11  8.81483E-12
 13.700  3.07374E-10 -1.77878E-10  5.46275E-11 -1.15329E-11  1.80213E-12  6.14703E-10 -3.74938E-10  1.30543E-10 -3.31213E-11  6.27776E-12
 13.800  2.03977E-10 -1.19625E-10  3.74307E-11 -8.08133E-12  1.29713E-12  4.08016E-10 -2.52025E-10  8.90720E-11 -2.29533E-11  4.43590E-12
 13.900  1.34483E-10 -7.98977E-11  2.54602E-11 -5.61776E-12  9.25327E-13  2.69088E-10 -1.68253E-10  6.03455E-11 -1.57909E-11  3.11011E-12
 14.000  8.80938E-11 -5.30007E-11  1.71925E-11 -3.87458E-12  6.54323E-13  1.76332E-10 -1.11568E-10  4.05963E-11 -1.07848E-11  2.16382E-12
 14.100  5.73361E-11 -3.49209E-11  1.15262E-11 -2.65161E-12  4.58716E-13  1.14816E-10 -7.34840E-11  2.71200E-11 -7.31281E-12  1.49399E-12
 14.200  3.70793E-11 -2.28541E-11  7.67248E-12 -1.80077E-12  3.18873E-13  7.42881E-11 -4.80779E-11  1.79918E-11 -4.92321E-12  1.02374E-12
 14.300  2.38271E-11 -1.48572E-11  5.07119E-12 -1.21369E-12  2.19823E-13  4.77636E-11 -3.12475E-11  1.18540E-11 -3.29098E-12  6.96267E-13
 14.400  1.52146E-11 -9.59461E-12  3.32840E-12 -8.11889E-13  1.50303E-13  3.05175E-11 -2.01753E-11  7.75683E-12 -2.18443E-12  4.70043E-13
 14.500  9.65420E-12 -6.15534E-12  2.16939E-12 -5.39090E-13  1.01943E-13  1.93771E-11 -1.29414E-11  5.04139E-12 -1.43983E-12  3.14995E-13
 14.600  6.08769E-12 -3.92310E-12  1.40424E-12 -3.55332E-13  6.85957E-14  1.22273E-11 -8.24737E-12  3.25450E-12 -9.42459E-13  2.09558E-13
 14.700  3.81490E-12 -2.48415E-12  9.02750E-13 -2.32514E-13  4.57962E-14  7.66805E-12 -5.22205E-12  2.08692E-12 -6.12654E-13  1.38409E-13
 14.800  2.37587E-12 -1.56285E-12  5.76424E-13 -1.51056E-13  3.03392E-14  4.77932E-12 -3.28529E-12  1.32934E-12 -3.95541E-13  9.07639E-14
 14.900  1.47056E-12 -9.76929E-13  3.65583E-13 -9.74378E-14  1.99463E-14  2.96064E-12 -2.05368E-12  8.41190E-13 -2.53635E-13  5.90985E-14
 15.000  9.04650E-13 -6.06782E-13  2.30314E-13 -6.24095E-14  1.30151E-14  1.82287E-12 -1.27565E-12  5.28806E-13 -1.61544E-13  3.82103E-14
 15.100  5.53129E-13 -3.74492E-13  1.44134E-13 -3.96948E-14  8.42943E-15  1.11555E-12 -7.87387E-13  3.30265E-13 -1.02201E-13  2.45328E-14
 15.200  3.36150E-13 -2.29673E-13  8.96080E-14 -2.50728E-14  5.41939E-15  6.78574E-13 -4.82968E-13  2.04932E-13 -6.42274E-14  1.56424E-14
 15.300  2.03055E-13 -1.39974E-13  5.53449E-14 -1.57283E-14  3.45892E-15  4.10291E-13 -2.94398E-13  1.26344E-13 -4.00964E-14  9.90535E-15
 15.400  1.21921E-13 -8.47765E-14  3.39608E-14 -9.79940E-15  2.19180E-15  2.46594E-13 -1.78342E-13  7.73958E-14 -2.48674E-14  6.22974E-15
 15.500  7.27685E-14 -5.10275E-14  2.07047E-14 -6.06424E-15  1.37899E-15  1.47327E-13 -1.07372E-13  4.71096E-14 -1.53218E-14  3.89157E-15
 15.600  4.31734E-14 -3.05247E-14  1.25420E-14 -3.72766E-15  8.61504E-16  8.74988E-14 -6.42477E-14  2.84936E-14 -9.37911E-15  2.41465E-15
 15.700  2.54631E-14 -1.81480E-14  7.54896E-15 -2.27615E-15  5.34458E-16  5.16595E-14 -3.82092E-14  1.71257E-14 -5.70432E-15  1.48827E-15
 15.800  1.49292E-14 -1.07238E-14  4.51491E-15 -1.38067E-15  3.29275E-16  3.03206E-14 -2.25858E-14  1.02289E-14 -3.44709E-15  9.11219E-16
 15.900  8.70170E-15 -6.29840E-15  2.68330E-15 -8.32002E-16  2.01474E-16  1.76920E-14 -1.32701E-14  6.07152E-15 -2.06977E-15  5.54241E-16
 16.000  5.04225E-15 -3.67690E-15  1.58475E-15 -4.98109E-16  1.22439E-16  1.02630E-14 -7.74984E-15  3.58156E-15 -1.23489E-15  3.34909E-16
 16.100  2.90475E-15 -2.13362E-15  9.30125E-16 -2.96285E-16  7.39068E-17  5.91889E-15 -4.49891E-15  2.09975E-15 -7.32131E-16  2.01060E-16
 16.200  1.66366E-15 -1.23069E-15  5.42531E-16 -1.75104E-16  4.43136E-17  3.39379E-15 -2.59614E-15  1.22348E-15 -4.31335E-16  1.19925E-16
 16.300  9.47335E-16 -7.05644E-16  3.14504E-16 -1.02826E-16  2.63936E-17  1.93472E-15 -1.48924E-15  7.08549E-16 -2.52535E-16  7.10721E-17
 16.400  5.36333E-16 -4.02202E-16  1.81200E-16 -5.99992E-17  1.56167E-17  1.09660E-15 -8.49243E-16  4.07851E-16 -1.46935E-16  4.18512E-17
 16.500  3.01903E-16 -2.27894E-16  1.03761E-16 -3.47890E-17  9.17980E-18  6.17989E-16 -4.81435E-16  2.33348E-16 -8.49638E-17  2.44880E-17
 16.600  1.68970E-16 -1.28370E-16  5.90568E-17 -2.00450E-17  5.36101E-18  3.46281E-16 -2.71328E-16  1.32706E-16 -4.88276E-17  1.42380E-17
 16.700  9.40310E-17 -7.18864E-17  3.34100E-17 -1.14777E-17  3.11064E-18  1.92929E-16 -1.52024E-16  7.50190E-17 -2.78888E-17  8.22637E-18
 16.800  5.20307E-17 -4.00215E-17  1.87873E-17 -6.53137E-18  1.79333E-18  1.06880E-16 -8.46833E-17  4.21558E-17 -1.58322E-17  4.72332E-18
 16.900  2.86276E-17 -2.21520E-17  1.05015E-17 -3.69374E-18  1.02729E-18  5.88757E-17 -4.68992E-17  2.35483E-17 -8.93330E-18  2.69514E-18
 17.000  1.56622E-17 -1.21903E-17  5.83500E-18 -2.07613E-18  5.84748E-19  3.22492E-17 -2.58239E-17  1.30765E-17 -5.01016E-18  1.52834E-18
 17.100  8.52067E-18 -6.66976E-18  3.22293E-18 -1.15981E-18  3.30752E-19  1.75653E-17 -1.41377E-17  7.21871E-18 -2.79302E-18  8.61350E-19
 17.200  4.60950E-18 -3.62834E-18  1.76966E-18 -6.43975E-19  1.85912E-19  9.51378E-18 -7.69560E-18  3.96165E-18 -1.54771E-18  4.82471E-19
 17.300  2.47971E-18 -1.96253E-18  9.65986E-19 -3.55401E-19  1.03849E-19  5.12410E-18 -4.16508E-18  2.16148E-18 -8.52525E-19  2.68601E-19
 17.400  1.32655E-18 -1.05547E-18  5.24206E-19 -1.94961E-19  5.76501E-20  2.74447E-18 -2.24145E-18  1.17245E-18 -4.66810E-19  1.48628E-19
 17.500  7.05709E-19 -5.64420E-19  2.82809E-19 -1.06308E-19  3.18064E-20  1.46177E-18 -1.19942E-18  6.32291E-19 -2.54096E-19  8.17449E-20
 17.600  3.73351E-19 -3.00122E-19  1.51690E-19 -5.76221E-20  1.74405E-20  7.74265E-19 -6.38192E-19  3.39020E-19 -1.37496E-19  4.46890E-20
 17.700  1.96429E-19 -1.58686E-19  8.08912E-20 -3.10474E-20  9.50488E-21  4.07845E-19 -3.37663E-19  1.80730E-19 -7.39652E-20  2.42846E-20
 17.800  1.02777E-19 -8.34318E-20  4.28880E-20 -1.66297E-20  5.14862E-21  2.13649E-19 -1.77653E-19  9.57939E-20 -3.95566E-20  1.31179E-20
 17.900  5.34801E-20 -4.36202E-20  2.26084E-20 -8.85482E-21  2.77207E-21  1.11305E-19 -9.29453E-20  5.04847E-20 -2.10317E-20  7.04381E-21
 18.000  2.76761E-20 -2.26784E-20  1.18498E-20 -4.68727E-21  1.48353E-21  5.76694E-20 -4.83565E-20  2.64547E-20 -1.11174E-20  3.75987E-21
 18.100  1.42442E-20 -1.17250E-20  6.17547E-21 -2.46670E-21  7.89193E-22  2.97162E-20 -2.50186E-20  1.37841E-20 -5.84267E-21  1.99513E-21
 18.200  7.29123E-21 -6.02835E-21  3.20004E-21 -1.29056E-21  4.17324E-22  1.52289E-20 -1.28723E-20  7.14148E-21 -3.05289E-21  1.05247E-21
 18.300  3.71189E-21 -3.08230E-21  1.64882E-21 -6.71295E-22  2.19370E-22  7.76201E-21 -6.58635E-21  3.67913E-21 -1.58603E-21  5.51948E-22
 18.400  1.87944E-21 -1.56729E-21  8.44764E-22 -3.47163E-22  1.14632E-22  3.93476E-21 -3.35145E-21  1.88476E-21 -8.19250E-22  2.87771E-22
 18.500  9.46470E-22 -7.92551E-22  4.30375E-22 -1.78504E-22  5.95485E-23  1.98383E-21 -1.69601E-21  9.60123E-22 -4.20764E-22  1.49164E-22
 18.600  4.74062E-22 -3.98582E-22  2.18030E-22 -9.12562E-23  3.07526E-23  9.94806E-22 -8.53567E-22  4.86369E-22 -2.14874E-22  7.68708E-23
 18.700  2.36167E-22 -1.99354E-22  1.09837E-22 -4.63862E-23  1.57887E-23  4.96166E-22 -4.27235E-22  2.45008E-22 -1.09109E-22  3.93861E-23
 18.800  1.17021E-22 -9.91647E-23  5.50246E-23 -2.34441E-23  8.05893E-24  2.46135E-22 -2.12677E-22  1.22737E-22 -5.50901E-23  2.00641E-23
 18.900  5.76734E-23 -4.90591E-23  2.74122E-23 -1.17816E-23  4.08961E-24  1.21446E-22 -1.05295E-22  6.11451E-23 -2.76589E-23  1.01625E-23
 19.000  2.82721E-23 -2.41390E-23  1.35806E-23 -5.88726E-24  2.06334E-24  5.96023E-23 -5.18481E-23  3.02930E-23 -1.38086E-23  5.11786E-24
 19.100  1.37853E-23 -1.18130E-23  6.69092E-24 -2.92526E-24  1.03502E-24  2.90948E-23 -2.53922E-23  1.49254E-23 -6.85526E-24  2.56269E-24
 19.200  6.68584E-24 -5.74974E-24  3.27834E-24 -1.44532E-24  5.16214E-25  1.41269E-23 -1.23685E-23  7.31336E-24 -3.38428E-24  1.27594E-24
 19.300  3.22538E-24 -2.78350E-24  1.59746E-24 -7.10107E-25  2.55987E-25  6.82278E-24 -5.99224E-24  3.56388E-24 -1.66143E-24  6.31682E-25
 19.400  1.54773E-24 -1.34027E-24  7.74137E-25 -3.46935E-25  1.26219E-25  3.27765E-24 -2.88749E-24  1.72723E-24 -8.11109E-25  3.10961E-25
 19.500  7.38766E-25 -6.41887E-25  3.73101E-25 -1.68556E-25  6.18807E-26  1.56623E-24 -1.38394E-24  8.32535E-25 -3.93789E-25  1.52217E-25
 19.600  3.50765E-25 -3.05770E-25  1.78838E-25 -8.14368E-26  3.01661E-26  7.44470E-25 -6.59757E-25  3.99106E-25 -1.90126E-25  7.40923E-26
 19.700  1.65665E-25 -1.44879E-25  8.52562E-26 -3.91275E-26  1.46225E-26  3.51997E-25 -3.12843E-25  1.90289E-25 -9.12895E-26  3.58629E-26
 19.800  7.78310E-26 -6.82804E-26  4.04231E-26 -1.86955E-26  7.04812E-27  1.65552E-25 -1.47553E-25  9.02361E-26 -4.35918E-26  1.72618E-26
 19.900  3.63736E-26 -3.20090E-26  1.90624E-26 -8.88362E-27  3.37815E-27  7.74534E-26 -6.92239E-26  4.25596E-26 -2.07015E-26  8.26228E-27
  67 152 200   0.100
  0.000  5.73911E-02 -2.87043E-16 -4.68375E-16 -5.62917E-16 -1.28744E-16  1.06972E-01 -6.20634E-16 -6.66134E-16 -1.15085E-15 -1.40188E-15
  0.100  5.74602E-02 -3.90243E-05  5.99769E-09  1.41116E-12 -1.61645E-15  1.06792E-01  4.51847E-05 -3.53951E-08  9.19201E-12  6.86635E-16
  0.200  5.76661E-02 -1.53892E-04  9.52272E-08  8.93800E-11 -1.86765E-13  1.06258E-01  1.77601E-04 -5.60661E-07  5.84405E-10  3.29199E-13
  0.300  5.80050E-02 -3.38107E-04  4.75937E-07  1.00006E-09 -4.75287E-12  1.05394E-01  3.88064E-04 -2.79110E-06  6.58223E-09  8.40972E-12
  0.400  5.84702E-02 -5.81245E-04  1.47736E-06  5.48043E-09 -4.66175E-11  1.04237E-01  6.62007E-04 -8.61562E-06  3.64055E-08  8.26962E-11
  0.500  5.90525E-02 -8.69526E-04  3.52416E-06  2.02476E-08 -2.71392E-10  1.02836E-01  9.80531E-04 -2.04028E-05  1.36096E-07  4.83041E-10
  0.600  5.97400E-02 -1.18657E-03  7.10310E-06  5.81481E-08 -1.13382E-09  1.01247E-01  1.32175E-03 -4.07507E-05  3.96472E-07  2.02644E-09
  0.700  6.05181E-02 -1.51430E-03  1.27241E-05  1.40057E-07 -3.76151E-09  9.95363E-02  1.66234E-03 -7.21993E-05  9.71059E-07  6.75646E-09
  0.800  6.13696E-02 -1.83392E-03  2.08783E-05  2.96079E-07 -1.05268E-08  9.77684E-02  1.97914E-03 -1.16929E-04  2.09233E-06  1.90195E-08
  0.900  6.22754E-02 -2.12692E-03  3.19966E-05  5.65707E-07 -2.58393E-08  9.60092E-02  2.25071E-03 -1.76467E-04  4.08382E-06  4.70028E-08
  1.000  6.32145E-02 -2.37609E-03  4.64110E-05  9.96741E-07 -5.71323E-08  9.43198E-02  2.45877E-03 -2.51431E-04  7.36597E-06  1.04731E-07
  1.100  6.41650E-02 -2.56638E-03  6.43214E-05  1.64298E-06 -1.15972E-07  9.27547E-02  2.58932E-03 -3.41322E-04  1.24540E-05  2.14450E-07
  1.200  6.51043E-02 -2.68569E-03  8.57719E-05  2.56082E-06 -2.19176E-07  9.13589E-02  2.63344E-03 -4.44397E-04  1.99466E-05  4.09246E-07
  1.300  6.60105E-02 -2.72544E-03  1.10637E-04  3.80513E-06 -3.89797E-07  9.01665E-02  2.58780E-03 -5.57625E-04  3.05058E-05  7.35696E-07
  1.400  6.68631E-02 -2.68100E-03  1.38616E-04  5.42474E-06 -6.57801E-07  8.91994E-02  2.45470E-03 -6.76739E-04  4.48272E-05  1.25627E-06
  1.500  6.76435E-02 -2.55179E-03  1.69245E-04  7.45805E-06 -1.06029E-06  8.84675E-02  2.24177E-03 -7.96386E-04  6.36031E-05  2.05117E-06
  1.600  6.83359E-02 -2.34127E-03  2.01913E-04  9.92903E-06 -1.64112E-06  8.79684E-02  1.96136E-03 -9.10363E-04  8.74791E-05  3.21932E-06
  1.700  6.89282E-02 -2.05666E-03  2.35889E-04  1.28440E-05 -2.44983E-06  8.76890E-02  1.62962E-03 -1.01194E-03  1.17007E-04  4.87810E-06
  1.800  6.94120E-02 -1.70847E-03  2.70354E-04  1.61889E-05 -3.53982E-06  8.76061E-02  1.26546E-03 -1.09422E-03  1.52599E-04  7.16167E-06
  1.900  6.97831E-02 -1.30994E-03  3.04439E-04  1.99283E-05 -4.96593E-06  8.76890E-02  8.89266E-04 -1.15059E-03  1.94476E-04  1.02175E-05
  2.000  7.00414E-02 -8.76259E-04  3.37260E-04  2.40031E-05 -6.78129E-06  8.79012E-02  5.21674E-04 -1.17511E-03  2.42633E-04  1.42010E-05
  2.100  7.01905E-02 -4.23843E-04  3.67949E-04  2.83311E-05 -9.03397E-06  8.82027E-02  1.82336E-04 -1.16294E-03  2.96797E-04  1.92683E-05
  2.200  7.02377E-02  3.04916E-05  3.95683E-04  3.28051E-05 -1.17634E-05  8.85522E-02 -1.11221E-04 -1.11072E-03  3.56408E-04  2.55669E-05
  2.300  7.01933E-02  4.70301E-04  4.19707E-04  3.72933E-05 -1.49969E-05  8.89095E-02 -3.44567E-04 -1.01685E-03  4.20603E-04  3.32246E-05
  2.400  7.00699E-02  8.80228E-04  4.39344E-04  4.16375E-05 -1.87467E-05  8.92374E-02 -5.07140E-04 -8.81712E-04  4.88217E-04  4.23369E-05
  2.500  6.98819E-02  1.24663E-03  4.54004E-04  4.56533E-05 -2.30079E-05  8.95033E-02 -5.92776E-04 -7.07772E-04  5.57796E-04  5.29539E-05
  2.600  6.96446E-02  1.55810E-03  4.63187E-04  4.91295E-05 -2.77571E-05  8.96811E-02 -5.99972E-04 -4.99553E-04  6.27631E-04  6.50659E-05
  2.700  6.93739E-02  1.80585E-03  4.66484E-04  5.18290E-05 -3.29523E-05  8.97517E-02 -5.31876E-04 -2.63505E-04  6.95800E-04  7.85907E-05
  2.800  6.90854E-02  1.98399E-03  4.63576E-04  5.34921E-05 -3.85340E-05  8.97041E-02 -3.96003E-04 -7.73793E-06  7.60228E-04  9.33615E-05
  2.900  6.87940E-02  2.08965E-03  4.54239E-04  5.38419E-05 -4.44280E-05  8.95351E-02 -2.03687E-04  2.58345E-04  8.18764E-04  1.09118E-04
  3.000  6.85134E-02  2.12303E-03  4.38362E-04  5.25936E-05 -5.05482E-05  8.92494E-02  3.06977E-05  5.24508E-04  8.69256E-04  1.25501E-04
  3.100  6.82556E-02  2.08729E-03  4.15963E-04  4.94677E-05 -5.68009E-05  8.88585E-02  2.90711E-04  7.80213E-04  9.09653E-04  1.42054E-04
  3.200  6.80306E-02  1.98841E-03  3.87225E-04  4.42083E-05 -6.30895E-05  8.83798E-02  5.58961E-04  1.01519E-03  9.38092E-04  1.58227E-04
  3.300  6.78459E-02  1.83491E-03  3.52536E-04  3.66050E-05 -6.93183E-05  8.78348E-02  8.18300E-04  1.22000E-03  9.53003E-04  1.73391E-04
  3.400  6.77059E-02  1.63756E-03  3.12538E-04  2.65191E-05 -7.53962E-05  8.72471E-02  1.05302E-03  1.38661E-03  9.53199E-04  1.86858E-04
  3.500  6.76120E-02  1.40897E-03  2.68183E-04  1.39121E-05 -8.12391E-05  8.66407E-02  1.24998E-03  1.50884E-03  9.37962E-04  1.97911E-04
  3.600  6.75620E-02  1.16320E-03  2.20771E-04 -1.12508E-06 -8.67706E-05  8.60376E-02  1.39957E-03  1.58281E-03  9.07116E-04  2.05836E-04
  3.700  6.75493E-02  9.15237E-04  1.71996E-04 -1.83450E-05 -9.19208E-05  8.54558E-02  1.49650E-03  1.60715E-03  8.61081E-04  2.09965E-04
  3.800  6.75635E-02  6.80509E-04  1.23959E-04 -3.73205E-05 -9.66233E-05  8.49075E-02  1.54020E-03  1.58320E-03  8.00903E-04  2.09716E-04
  3.900  6.75896E-02  4.74311E-04  7.91621E-05 -5.74299E-05 -1.00810E-04  8.43975E-02  1.53498E-03  1.51498E-03  7.28258E-04  2.04640E-04
  4.000  6.76083E-02  3.11231E-04  4.04620E-05 -7.78519E-05 -1.04407E-04  8.39221E-02  1.48982E-03  1.40896E-03  6.45427E-04  1.94464E-04
  4.100  6.75963E-02  2.04555E-04  1.09962E-05 -9.75739E-05 -1.07324E-04  8.34688E-02  1.41775E-03  1.27382E-03  5.55237E-04  1.79122E-04
  4.200  6.75265E-02  1.65684E-04 -5.93683E-06 -1.15415E-04 -1.09452E-04  8.30164E-02  1.33494E-03  1.11994E-03  4.60972E-04  1.58790E-04
  4.300  6.73693E-02  2.03581E-04 -7.03054E-06 -1.30065E-04 -1.10658E-04  8.25357E-02  1.25957E-03  9.58840E-04  3.66250E-04  1.33895E-04
  4.400  6.70931E-02  3.24284E-04  1.08466E-05 -1.40138E-04 -1.10779E-04  8.19908E-02  1.21044E-03  8.02530E-04  2.74884E-04  1.05117E-04
  4.500  6.66661E-02  5.30519E-04  5.04487E-05 -1.44241E-04 -1.09628E-04  8.13414E-02  1.20556E-03  6.62836E-04  1.90709E-04  7.33774E-05
  4.600  6.60571E-02  8.21428E-04  1.13944E-04 -1.41052E-04 -1.06994E-04  8.05448E-02  1.26074E-03  5.50713E-04  1.17407E-04  3.98035E-05
  4.700  6.52378E-02  1.19247E-03  2.02715E-04 -1.29403E-04 -1.02656E-04  7.95586E-02  1.38835E-03  4.75605E-04  5.83260E-05  5.68307E-06
  4.800  6.41839E-02  1.63546E-03  3.17187E-04 -1.08363E-04 -9.63924E-05  7.83433E-02  1.59625E-03  4.44908E-04  1.63080E-05 -2.75968E-05
  4.900  6.28766E-02  2.13888E-03  4.56697E-04 -7.73203E-05 -8.79980E-05  7.68650E-02  1.88718E-03  4.63543E-04 -6.46655E-06 -5.86197E-05
  5.000  6.13040E-02  2.68823E-03  6.19423E-04 -3.60448E-05 -7.73051E-05  7.50973E-02  2.25835E-03  5.33682E-04 -8.60268E-06 -8.60163E-05
  5.100  5.94618E-02  3.26672E-03  8.02374E-04  1.52621E-05 -6.42020E-05  7.30236E-02  2.70161E-03  6.54647E-04  1.04214E-05 -1.08541E-04
  5.200  5.73544E-02  3.85597E-03  1.00146E-03  7.59424E-05 -4.86522E-05  7.06381E-02  3.20385E-03  8.22973E-04  5.02122E-05 -1.25142E-04
  5.300  5.49945E-02  4.43685E-03  1.21162E-03  1.44883E-04 -3.07104E-05  6.79462E-02  3.74786E-03  1.03265E-03  1.09467E-04 -1.35026E-04
  5.400  5.24028E-02  4.99038E-03  1.42704E-03  2.20543E-04 -1.05348E-05  6.49650E-02  4.31341E-03  1.27548E-03  1.86032E-04 -1.37703E-04
  5.500  4.96079E-02  5.49865E-03  1.64141E-03  3.01013E-04  1.16079E-05  6.17221E-02  4.87856E-03  1.54161E-03  2.77000E-04 -1.33015E-04
  5.600  4.66446E-02  5.94559E-03  1.84821E-03  3.84090E-04  3.53431E-05  5.82544E-02  5.42096E-03  1.82010E-03  3.78862E-04 -1.21146E-04
  5.700  4.35525E-02  6.31770E-03  2.04105E-03  4.67383E-04  6.01976E-05  5.46065E-02  5.91926E-03  2.09954E-03  4.87678E-04 -1.02611E-04
  5.800  4.03747E-02  6.60463E-03  2.21394E-03  5.48420E-04  8.56153E-05  5.08286E-02  6.35427E-03  2.36869E-03  5.99275E-04 -7.82212E-05
  5.900  3.71559E-02  6.79952E-03  2.36162E-03  6.24773E-04  1.10980E-04  4.69741E-02  6.71003E-03  2.61706E-03  7.09454E-04 -4.90393E-05
  6.000  3.39406E-02  6.89914E-03  2.47979E-03  6.94169E-04  1.35644E-04  4.30974E-02  6.97450E-03  2.83541E-03  8.14194E-04 -1.63129E-05
  6.100  3.07714E-02  6.90392E-03  2.56529E-03  7.54603E-04  1.58956E-04  3.92516E-02  7.14006E-03  3.01619E-03  9.09829E-04  1.85945E-05
  6.200  2.76876E-02  6.81765E-03  2.61623E-03  8.04420E-04  1.80295E-04  3.54864E-02  7.20365E-03  3.15379E-03  9.93214E-04  5.42796E-05
  6.300  2.47242E-02  6.64711E-03  2.63202E-03  8.42395E-04  1.99103E-04  3.18469E-02  7.16658E-03  3.24470E-03  1.06184E-03  8.93731E-05
  6.400  2.19107E-02  6.40156E-03  2.61336E-03  8.67765E-04  2.14906E-04  2.83716E-02  7.03419E-03  3.28755E-03  1.11392E-03  1.22607E-04
  6.500  1.92707E-02  6.09211E-03  2.56212E-03  8.80252E-04  2.27341E-04  2.50923E-02  6.81518E-03  3.28299E-03  1.14842E-03  1.52874E-04
  6.600  1.68215E-02  5.73107E-03  2.48118E-03  8.80047E-04  2.36170E-04  2.20332E-02  6.52092E-03  3.23347E-03  1.16505E-03  1.79268E-04
  6.700  1.45743E-02  5.33132E-03  2.37427E-03  8.67779E-04  2.41288E-04  1.92107E-02  6.16458E-03  3.14301E-03  1.16424E-03  2.01116E-04
  6.800  1.25346E-02  4.90567E-03  2.24570E-03  8.44453E-04  2.42720E-04  1.66342E-02  5.76035E-03  3.01678E-03  1.14701E-03  2.17991E-04
  6.900  1.07025E-02  4.46636E-03  2.10014E-03  8.11383E-04  2.40619E-04  1.43065E-02  5.32262E-03  2.86080E-03  1.11494E-03  2.29710E-04
  7.000  9.07353E-03  4.02460E-03  1.94239E-03  7.70104E-04  2.35247E-04  1.22243E-02  4.86529E-03  2.68156E-03  1.06996E-03  2.36318E-04
  7.100  7.63938E-03  3.59023E-03  1.77714E-03  7.22291E-04  2.26960E-04  1.03796E-02  4.40123E-03  2.48562E-03  1.01432E-03  2.38061E-04
  7.200  6.38880E-03  3.17155E-03  1.60883E-03  6.69670E-04  2.16185E-04  8.76023E-03  3.94179E-03  2.27938E-03  9.50358E-04  2.35353E-04
  7.300  5.30834E-03  2.77515E-03  1.44145E-03  6.13943E-04  2.03394E-04  7.35126E-03  3.49658E-03  2.06876E-03  8.80466E-04  2.28733E-04
  7.400  4.38319E-03  2.40595E-03  1.27845E-03  5.56716E-04  1.89081E-04  6.13568E-03  3.07330E-03  1.85904E-03  8.06936E-04  2.18829E-04
  7.500  3.59782E-03  2.06727E-03  1.12270E-03  4.99448E-04  1.73738E-04  5.09538E-03  2.67772E-03  1.65474E-03  7.31890E-04  2.06309E-04
  7.600  2.93661E-03  1.76094E-03  9.76410E-04  4.43407E-04  1.57837E-04  4.21187E-03  2.31375E-03  1.45950E-03  6.57212E-04  1.91853E-04
  7.700  2.38431E-03  1.48753E-03  8.41176E-04  3.89648E-04  1.41807E-04  3.46691E-03  1.98364E-03  1.27612E-03  5.84501E-04  1.76112E-04
  7.800  1.92645E-03  1.24652E-03  7.18008E-04  3.38999E-04  1.26030E-04  2.84302E-03  1.68820E-03  1.10656E-03  5.15056E-04  1.59688E-04
  7.900  1.54957E-03  1.03658E-03  6.07385E-04  2.92063E-04  1.10824E-04  2.32378E-03  1.42700E-03  9.52013E-04  4.49864E-04  1.43113E-04
  8.000  1.24142E-03  8.55732E-04  5.09332E-04  2.49234E-04  9.64440E-05  1.89411E-03  1.19869E-03  8.13007E-04  3.89617E-04  1.26836E-04
  8.100  9.91031E-04  7.01582E-04  4.23502E-04  2.10713E-04  8.30789E-05  1.54042E-03  1.00123E-03  6.89501E-04  3.34735E-04  1.11220E-04
  8.200  7.88743E-04  5.71495E-04  3.49260E-04  1.76534E-04  7.08559E-05  1.25063E-03  8.32087E-04  5.81006E-04  2.85401E-04  9.65394E-05
  8.300  6.26172E-04  4.62746E-04  2.85765E-04  1.46598E-04  5.98448E-05  1.01415E-03  6.88498E-04  4.86693E-04  2.41595E-04  8.29858E-05
  8.400  4.96137E-04  3.72635E-04  2.32047E-04  1.20698E-04  5.00657E-05  8.21852E-04  5.67585E-04  4.05500E-04  2.03140E-04  7.06758E-05
  8.500  3.92559E-04  2.98584E-04  1.87063E-04  9.85513E-05  4.14976E-05  6.65917E-04  4.66511E-04  3.36222E-04  1.69739E-04  5.96612E-05
  8.600  3.10351E-04  2.38198E-04  1.49761E-04  7.98241E-05  3.40864E-05  5.39749E-04  3.82568E-04  2.77592E-04  1.41010E-04  4.99402E-05
  8.700  2.45300E-04  1.89304E-04  1.19113E-04  6.41562E-05  2.77544E-05  4.37824E-04  3.13246E-04  2.28337E-04  1.16523E-04  4.14693E-05
  8.800  1.93948E-04  1.49970E-04  9.41537E-05  5.11803E-05  2.24076E-05  3.55561E-04  2.56275E-04  1.87233E-04  9.58258E-05  3.41743E-05
  8.900  1.53481E-04  1.18512E-04  7.39932E-05  4.05370E-05  1.79432E-05  2.89185E-04  2.09639E-04  1.53131E-04  7.84632E-05  2.79602E-05
  9.000  1.21627E-04  9.34833E-05  5.78349E-05  3.18865E-05  1.42553E-05  2.35611E-04  1.71579E-04  1.24982E-04  6.39980E-05  2.27205E-05
  9.100  9.65636E-05  7.36600E-05  4.49780E-05  2.49162E-05  1.12398E-05  1.92329E-04  1.40586E-04  1.01850E-04  5.20209E-05  1.83438E-05
  9.200  7.68396E-05  5.80193E-05  3.48168E-05  1.93454E-05  8.79793E-06  1.57314E-04  1.15380E-04  8.29097E-05  4.21580E-05  1.47197E-05
  9.300  6.13035E-05  4.57169E-05  2.68363E-05  1.49272E-05  6.83858E-06  1.28931E-04  9.48871E-05  6.74474E-05  3.40751E-05  1.17429E-05
  9.400  4.90475E-05  3.60630E-05  2.06050E-05  1.14482E-05  5.27988E-06  1.05871E-04  7.82192E-05  5.48537E-05  2.74788E-05  9.31592E-06
  9.500  3.93582E-05  2.84993E-05  1.57655E-05  8.72715E-06  4.04988E-06  8.70871E-05  6.46443E-05  4.46141E-05  2.21149E-05  7.35077E-06
  9.600  3.16772E-05  2.25777E-05  1.20257E-05  6.61256E-06  3.08651E-06  7.17426E-05  5.35655E-05  3.62981E-05  1.77668E-05  5.76964E-06
  9.700  2.55686E-05  1.79414E-05  9.14914E-06  4.97917E-06  2.33722E-06  5.91711E-05  4.44992E-05  2.95486E-05  1.42514E-05  4.50503E-06
  9.800  2.06928E-05  1.43080E-05  6.94606E-06  3.72485E-06  1.75820E-06  4.88414E-05  3.70552E-05  2.40716E-05  1.14157E-05  3.49920E-06
  9.900  1.67857E-05  1.14553E-05  5.26556E-06  2.76718E-06  1.31346E-06  4.03305E-05  3.09205E-05  1.96264E-05  9.13295E-06  2.70345E-06
 10.000  1.36423E-05  9.20938E-06  3.98848E-06  2.04023E-06  9.73811E-07  3.33004E-05  2.58446E-05  1.60164E-05  7.29851E-06  2.07718E-06
 10.100  1.11031E-05  7.43494E-06  3.02130E-06  1.49176E-06  7.15875E-07  2.74810E-05  2.16277E-05  1.30824E-05  5.82671E-06  1.58684E-06
 10.200  9.04413E-06  6.02686E-06  2.29107E-06  1.08062E-06  5.21093E-07  2.26558E-05  1.81106E-05  1.06951E-05  4.64764E-06  1.20496E-06
 10.300  7.36881E-06  4.90389E-06  1.74119E-06  7.74597E-07  3.74874E-07  1.86502E-05  1.51664E-05  8.74997E-06  3.70439E-06  9.09206E-07
 10.400  6.00164E-06  4.00334E-06  1.32793E-06  5.48625E-07  2.65829E-07  1.53231E-05  1.26939E-05  7.16289E-06  2.95078E-06  6.81488E-07
 10.500  4.88339E-06  3.27699E-06  1.01772E-06  3.83270E-07  1.85121E-07  1.25597E-05  1.06123E-05  5.86591E-06  2.34942E-06  5.07265E-07
 10.600  3.96729E-06  2.68775E-06  7.84858E-07  2.63529E-07  1.25921E-07  1.02660E-05  8.85650E-06  4.80429E-06  1.87007E-06  3.74881E-07
 10.700  3.21619E-06  2.20709E-06  6.09818E-07  1.77867E-07  8.29761E-08  8.36457E-06  7.37398E-06  3.93400E-06  1.48833E-06  2.75033E-07
 10.800  2.60039E-06  1.81305E-06  4.77826E-07  1.17452E-07  5.22492E-08  6.79128E-06  6.12201E-06  3.21953E-06  1.18454E-06  2.00328E-07
 10.900  2.09592E-06  1.48867E-06  3.77777E-07  7.55576E-08  3.06484E-08  5.49268E-06  5.06546E-06  2.63228E-06  9.42883E-07  1.44915E-07
 11.000  1.68329E-06  1.22077E-06  3.01380E-07  4.70873E-08  1.58090E-08  4.42399E-06  4.17517E-06  2.14918E-06  7.50692E-07  1.04189E-07
 11.100  1.34656E-06  9.99030E-07  2.42489E-07  2.82107E-08  5.92679E-09  3.54754E-06  3.42674E-06  1.75155E-06  5.97820E-07  7.45433E-08
 11.200  1.07256E-06  8.15317E-07  1.96577E-07  1.60737E-08 -3.69507E-10  2.83154E-06  2.79947E-06  1.42426E-06  4.76173E-07  5.31770E-08
 11.300  8.50400E-07  6.63128E-07  1.60337E-07  8.57411E-09 -4.11677E-09  2.24910E-06  2.27571E-06  1.15501E-06  3.79307E-07  3.79293E-08
 11.400  6.70986E-07  5.37206E-07  1.31365E-07  4.18403E-09 -6.09326E-09  1.77749E-06  1.84026E-06  9.33724E-07  3.02109E-07  2.71502E-08
 11.500  5.26742E-07  4.33251E-07  1.07920E-07  1.81194E-09 -6.87716E-09  1.39750E-06  1.47998E-06  7.52166E-07  2.40526E-07  1.95933E-08
 11.600  4.11335E-07  3.47700E-07  8.87442E-08  6.93842E-10 -6.89217E-09  1.09291E-06  1.18346E-06  6.03535E-07  1.91354E-07  1.43281E-08
 11.700  3.19476E-07  2.77572E-07  7.29271E-08  3.08621E-10 -6.44328E-09  8.50063E-07  9.40793E-07  4.82202E-07  1.52061E-07  1.06699E-08
 11.800  2.46757E-07  2.20351E-07  5.98013E-08  3.12264E-10 -5.74488E-09  6.57522E-07  7.43386E-07  3.83485E-07  1.20646E-07  8.12220E-09
 11.900  1.89516E-07  1.73906E-07  4.88720E-08  4.87341E-10 -4.94296E-09  5.05739E-07  5.83794E-07  3.03482E-07  9.55242E-08  6.33138E-09
 12.000  1.44720E-07  1.36420E-07  3.97629E-08  7.04642E-10 -4.13266E-09  3.86784E-07  4.55603E-07  2.38928E-07  7.54425E-08  5.04999E-09
 12.100  1.09872E-07  1.06349E-07  3.21805E-08  8.94518E-10 -3.37207E-09  2.94111E-07  3.53313E-07  1.87089E-07  5.94036E-08  4.10854E-09
 12.200  8.29275E-08  8.23805E-08  2.58886E-08  1.02590E-09 -2.69285E-09  2.22350E-07  2.72240E-07  1.45675E-07  4.66127E-08  3.39346E-09
 12.300  6.22226E-08  6.34017E-08  2.06915E-08  1.09128E-09 -2.10858E-09  1.67119E-07  2.08423E-07  1.12773E-07  3.64333E-08  2.83046E-09
 12.400  4.64111E-08  4.84764E-08  1.64237E-08  1.09637E-09 -1.62089E-09  1.24873E-07  1.58534E-07  8.67841E-08  2.83545E-08  2.37214E-09
 12.500  3.44122E-08  3.68205E-08  1.29424E-08  1.05313E-09 -1.22409E-09  9.27578E-08  1.19805E-07  6.63796E-08  2.19641E-08  1.98893E-09
 12.600  2.53638E-08  2.77817E-08  1.01235E-08  9.75393E-10 -9.08462E-10  6.84968E-08  8.99498E-08  5.04596E-08  1.69288E-08  1.66272E-09
 12.700  1.85834E-08  2.08224E-08  7.85881E-09  8.76347E-10 -6.62548E-10  5.02829E-08  6.70956E-08  3.81180E-08  1.29789E-08  1.38243E-09
 12.800  1.35347E-08  1.55025E-08  6.05413E-09  7.67175E-10 -4.74642E-10  3.66944E-08  4.97231E-08  2.86130E-08  9.89539E-09  1.14108E-09
 12.900  9.79898E-09  1.14649E-08  4.62803E-09  6.56574E-10 -3.33731E-10  2.66199E-08  3.66099E-08  2.13413E-08  7.50099E-09  9.33934E-10
 13.000  7.05230E-09  8.42252E-09  3.51061E-09  5.50762E-10 -2.30000E-10  1.91974E-08  2.67806E-08  1.58156E-08  5.65214E-09  7.57385E-10
 13.100  5.04547E-09  6.14644E-09  2.64251E-09  4.53750E-10 -1.55049E-10  1.37628E-08  1.94641E-08  1.16452E-08  4.23300E-09  6.08305E-10
 13.200  3.58840E-09  4.45579E-09  1.97382E-09  3.67745E-10 -1.01926E-10  9.80859E-09  1.40555E-08  8.51906E-09  3.15043E-09  4.83764E-10
 13.300  2.53708E-09  3.20892E-09  1.46312E-09  2.93583E-10 -6.50314E-11  6.94934E-09  1.00849E-08  6.19186E-09  2.32987E-09  3.80907E-10
 13.400  1.78324E-09  2.29583E-09  1.07634E-09  2.31123E-10 -3.99667E-11  4.89466E-09  7.18987E-09  4.47129E-09  1.71198E-09  2.96957E-10
 13.500  1.24605E-09  1.63185E-09  7.85874E-10  1.79590E-10 -2.33555E-11  3.42728E-09  5.09339E-09  3.20796E-09  1.24981E-09  2.29243E-10
 13.600  8.65611E-10  1.15239E-09  5.69525E-10  1.37842E-10 -1.26606E-11  2.38578E-09  3.58545E-09  2.28673E-09  9.06456E-10  1.75263E-10
 13.700  5.97830E-10  8.08556E-10  4.09697E-10  1.04575E-10 -6.01493E-12  1.65109E-09  2.50810E-09  1.61956E-09  6.53121E-10  1.32722E-10
 13.800  4.10497E-10  5.63680E-10  2.92573E-10  7.84638E-11 -2.07346E-12  1.13600E-09  1.74351E-09  1.13968E-09  4.67494E-10  9.95720E-11
 13.900  2.80239E-10  3.90467E-10  2.07424E-10  5.82534E-11  1.12475E-13  7.77071E-10  1.20448E-09  7.96858E-10  3.32422E-10  7.40199E-11
 14.000  1.90215E-10  2.68771E-10  1.46006E-10  4.28126E-11  1.19686E-12  5.28475E-10  8.26953E-10  5.53611E-10  2.34819E-10  5.45328E-11
 14.100  1.28370E-10  1.83842E-10  1.02048E-10  3.11592E-11  1.61959E-12  3.57337E-10  5.64270E-10  3.82177E-10  1.64783E-10  3.98239E-11
 14.200  8.61388E-11  1.24965E-10  7.08249E-11  2.24654E-11  1.66844E-12  2.40231E-10  3.82676E-10  2.62164E-10  1.14876E-10  2.88325E-11
 14.300  5.74721E-11  8.44172E-11  4.88148E-11  1.60503E-11  1.52553E-12  1.60578E-10  2.57946E-10  1.78708E-10  7.95604E-11  2.06989E-11
 14.400  3.81284E-11  5.66750E-11  3.34142E-11  1.13661E-11  1.30147E-12  1.06722E-10  1.72820E-10  1.21057E-10  5.47419E-11  1.47370E-11
 14.500  2.51525E-11  3.78170E-11  2.27171E-11  7.98014E-12  1.05973E-12  7.05254E-11  1.15091E-10  8.14942E-11  3.74207E-11  1.04072E-11
 14.600  1.64993E-11  2.50804E-11  1.53409E-11  5.55612E-12  8.33716E-13  4.63411E-11  7.61883E-11  5.45213E-11  2.54147E-11  7.29099E-12
 14.700  1.07624E-11  1.65329E-11  1.02908E-11  3.83693E-12  6.38432E-13  3.02779E-11  5.01355E-11  3.62513E-11  1.71495E-11  5.06786E-12
 14.800  6.98102E-12  1.08330E-11  6.85765E-12  2.62863E-12  4.78161E-13  1.96712E-11  3.27965E-11  2.39560E-11  1.14981E-11  3.49548E-12
 14.900  4.50305E-12  7.05587E-12  4.54004E-12  1.78681E-12  3.51428E-13  1.27083E-11  2.13279E-11  1.57344E-11  7.65996E-12  2.39269E-12
 15.000  2.88854E-12  4.56845E-12  2.98625E-12  1.20532E-12  2.54062E-13  8.16414E-12  1.37887E-11  1.02719E-11  5.07065E-12  1.62560E-12
 15.100  1.84266E-12  2.94048E-12  1.95164E-12  8.06972E-13  1.80992E-13  5.21558E-12  8.86260E-12  6.66536E-12  3.33546E-12  1.09632E-12
 15.200  1.16899E-12  1.88155E-12  1.26737E-12  5.36302E-13  1.27230E-13  3.31339E-12  5.66343E-12  4.29920E-12  2.18030E-12  7.34017E-13
 15.300  7.37541E-13  1.19695E-12  8.17834E-13  3.53840E-13  8.83478E-14  2.09329E-12  3.59823E-12  2.75648E-12  1.41632E-12  4.87931E-13
 15.400  4.62784E-13  7.57025E-13  5.24450E-13  2.31793E-13  6.06535E-14  1.31517E-12  2.27302E-12  1.75688E-12  9.14340E-13  3.22060E-13
 15.500  2.88799E-13  4.76031E-13  3.34228E-13  1.50778E-13  4.11979E-14  8.21744E-13  1.42769E-12  1.11316E-12  5.86639E-13  2.11097E-13
 15.600  1.79244E-13  2.97621E-13  2.11691E-13  9.74009E-14  2.77018E-14  5.10624E-13  8.91644E-13  7.01165E-13  3.74081E-13  1.37413E-13
 15.700  1.10645E-13  1.85016E-13  1.33261E-13  6.24907E-14  1.84488E-14  3.15562E-13  5.53719E-13  4.39077E-13  2.37087E-13  8.88407E-14
 15.800  6.79308E-14  1.14363E-13  8.33806E-14  3.98230E-14  1.21741E-14  1.93951E-13  3.41931E-13  2.73358E-13  1.49353E-13  5.70513E-14
 15.900  4.14816E-14  7.02911E-14  5.18570E-14  2.52089E-14  7.96291E-15  1.18559E-13  2.09966E-13  1.69203E-13  9.35185E-14  3.63933E-14
 16.000  2.51944E-14  4.29607E-14  3.20589E-14  1.58530E-14  5.16425E-15  7.20805E-14  1.28214E-13  1.04131E-13  5.82068E-14  2.30627E-14
 16.100  1.52202E-14  2.61100E-14  1.97019E-14  9.90460E-15  3.32171E-15  4.35861E-14  7.78577E-14  6.37179E-14  3.60128E-14  1.45198E-14
 16.200  9.14561E-15  1.57805E-14  1.20365E-14  6.14839E-15  2.11953E-15  2.62141E-14  4.70179E-14  3.87671E-14  2.21494E-14  9.08233E-15
 16.300  5.46619E-15  9.48468E-15  7.31039E-15  3.79240E-15  1.34194E-15  1.56813E-14  2.82377E-14  2.34530E-14  1.35426E-14  5.64482E-15
 16.400  3.24971E-15  5.66923E-15  4.41417E-15  2.32446E-15  8.43194E-16  9.33043E-15  1.68658E-14  1.41084E-14  8.23179E-15  3.48612E-15
 16.500  1.92176E-15  3.37004E-15  2.64996E-15  1.41583E-15  5.25889E-16  5.52201E-15  1.00187E-14  8.43941E-15  4.97448E-15  2.13943E-15
 16.600  1.13046E-15  1.99235E-15  1.58171E-15  8.57048E-16  3.25614E-16  3.25069E-15  5.91897E-15  5.02011E-15  2.98867E-15  1.30479E-15
 16.700  6.61477E-16  1.17146E-15  9.38695E-16  5.15619E-16  2.00176E-16  1.90346E-15  3.47795E-15  2.96955E-15  1.78524E-15  7.90843E-16
 16.800  3.85025E-16  6.85055E-16  5.53922E-16  3.08323E-16  1.22203E-16  1.10869E-15  2.03260E-15  1.74686E-15  1.06027E-15  4.76399E-16
 16.900  2.22937E-16  3.98451E-16  3.25021E-16  1.83255E-16  7.40895E-17  6.42363E-16  1.18151E-15  1.02193E-15  6.26113E-16  2.85233E-16
 17.000  1.28410E-16  2.30506E-16  1.89639E-16  1.08267E-16  4.46158E-17  3.70221E-16  6.83115E-16  5.94557E-16  3.67633E-16  1.69746E-16
 17.100  7.35781E-17  1.32634E-16  1.10029E-16  6.35850E-17  2.66882E-17  2.12255E-16  3.92848E-16  3.44020E-16  2.14641E-16  1.00412E-16
 17.200  4.19405E-17  7.59110E-17  6.34839E-17  3.71231E-17  1.58595E-17  1.21053E-16  2.24719E-16  1.97971E-16  1.24613E-16  5.90445E-17
 17.300  2.37827E-17  4.32153E-17  3.64259E-17  2.15468E-17  9.36342E-18  6.86791E-17  1.27864E-16  1.13307E-16  7.19404E-17  3.45140E-17
 17.400  1.34164E-17  2.44717E-17  2.07853E-17  1.24334E-17  5.49276E-18  3.87622E-17  7.23694E-17  6.44995E-17  4.13005E-17  2.00563E-17
 17.500  7.52948E-18  1.37845E-17  1.17955E-17  7.13313E-18  3.20177E-18  2.17637E-17  4.07446E-17  3.65184E-17  2.35787E-17  1.15868E-17
 17.600  4.20390E-18  7.72366E-18  6.65730E-18  4.06884E-18  1.85465E-18  1.21564E-17  2.28191E-17  2.05651E-17  1.33868E-17  6.65496E-18
 17.700  2.33509E-18  4.30499E-18  3.73692E-18  2.30768E-18  1.06767E-18  6.75504E-18  1.27131E-17  1.15192E-17  7.55855E-18  3.80027E-18
 17.800  1.29040E-18  2.38696E-18  2.08628E-18  1.30140E-18  6.10855E-19  3.73431E-18  7.04580E-18  6.41790E-18  4.24437E-18  2.15767E-18
 17.900  7.09446E-19  1.31658E-18  1.15847E-18  7.29779E-19  3.47371E-19  2.05380E-18  3.88459E-18  3.55674E-18  2.37034E-18  1.21806E-18
 18.000  3.88056E-19  7.22415E-19  6.39823E-19  4.06939E-19  1.96348E-19  1.12376E-18  2.13061E-18  1.96069E-18  1.31656E-18  6.83723E-19
 18.100  2.11181E-19  3.94340E-19  3.51486E-19  2.25651E-19  1.10321E-19  6.11739E-19  1.16255E-18  1.07515E-18  7.27298E-19  3.81622E-19
 18.200  1.14341E-19  2.14143E-19  1.92060E-19  1.24431E-19  6.16187E-20  3.31313E-19  6.31062E-19  5.86464E-19  3.99609E-19  2.11807E-19
 18.300  6.15952E-20  1.15690E-19  1.04390E-19  6.82366E-20  3.42142E-20  1.78524E-19  3.40796E-19  3.18224E-19  2.18382E-19  1.16899E-19
 18.400  3.30133E-20  6.21800E-20  5.64386E-20  3.72146E-20  1.88869E-20  9.57073E-20  1.83099E-19  1.71771E-19  1.18705E-19  6.41597E-20
 18.500  1.76050E-20  3.32487E-20  3.03531E-20  2.01850E-20  1.03656E-20  5.10493E-20  9.78701E-20  9.22360E-20  6.41794E-20  3.50188E-20
 18.600  9.34096E-21  1.76879E-20  1.62384E-20  1.08886E-20  5.65620E-21  2.70916E-20  5.20467E-20  4.92710E-20  3.45150E-20  1.90082E-20
 18.700  4.93129E-21  9.36176E-21  8.64189E-21  5.84198E-21  3.06879E-21  1.43050E-20  2.75373E-20  2.61836E-20  1.84635E-20  1.02610E-20
 18.800  2.59028E-21  4.92977E-21  4.57514E-21  3.11744E-21  1.65553E-21  7.51534E-21  1.44958E-20  1.38427E-20  9.82473E-21  5.50886E-21
 18.900  1.35380E-21  2.58279E-21  2.40957E-21  1.65461E-21  8.88081E-22  3.92849E-21  7.59201E-21  7.28066E-21  5.20038E-21  2.94147E-21
 19.000  7.04027E-22  1.34632E-21  1.26246E-21  8.73508E-22  4.73724E-22  2.04326E-21  3.95615E-21  3.80968E-21  2.73821E-21  1.56210E-21
 19.100  3.64297E-22  6.98256E-22  6.58039E-22  4.58688E-22  2.51287E-22  1.05741E-21  2.05115E-21  1.98325E-21  1.43424E-21  8.25093E-22
 19.200  1.87567E-22  3.60320E-22  3.41227E-22  2.39584E-22  1.32557E-22  5.44498E-22  1.05811E-21  1.02718E-21  7.47319E-22  4.33469E-22
 19.300  9.60938E-23  1.85002E-22  1.76036E-22  1.24479E-22  6.95394E-23  2.78985E-22  5.43104E-22  5.29294E-22  3.87372E-22  2.26507E-22
 19.400  4.89867E-23  9.45115E-23  9.03511E-23  6.43343E-23  3.62804E-23  1.42234E-22  2.77368E-22  2.71356E-22  1.99754E-22  1.17729E-22
 19.500  2.48490E-23  4.80415E-23  4.61365E-23  3.30753E-23  1.88250E-23  7.21553E-23  1.40947E-22  1.38413E-22  1.02474E-22  6.08657E-23
 19.600  1.25427E-23  2.42984E-23  2.34391E-23  1.69157E-23  9.71477E-24  3.64233E-23  7.12669E-23  7.02448E-23  5.22983E-23  3.13009E-23
 19.700  6.29979E-24  1.22285E-23  1.18475E-23  8.60609E-24  4.98627E-24  1.82954E-23  3.58554E-23  3.54698E-23  2.65538E-23  1.60119E-23
 19.800  3.14863E-24  6.12358E-24  5.95816E-24  4.35573E-24  2.54551E-24  9.14444E-24  1.79499E-23  1.78203E-23  1.34133E-23  8.14779E-24
 19.900  1.56596E-24  3.05128E-24  2.98126E-24  2.19313E-24  1.29253E-24  4.54812E-24  8.94158E-24  8.90814E-24  6.74093E-24  4.12435E-24
  67 153 200   0.100
  0.000  5.69240E-02 -2.94801E-16 -4.57967E-16 -4.12806E-16 -1.19446E-15  1.06424E-01 -5.74086E-16 -7.28584E-16 -1.35100E-15 -3.14708E-16
  0.100  5.69947E-02 -4.43975E-05 -3.73914E-09  1.42175E-12 -2.97542E-15  1.06251E-01  4.82502E-05 -2.15360E-08  4.98069E-13 -1.13009E-15
  0.200  5.72052E-02 -1.75035E-04 -5.90020E-08  9.02519E-11 -4.91945E-14  1.05742E-01  1.89628E-04 -3.41316E-07  3.17984E-11  3.35679E-13
  0.300  5.75512E-02 -3.84391E-04 -2.91857E-07  1.01446E-09 -1.28169E-12  1.04916E-01  4.14256E-04 -1.70066E-06  3.60113E-10  8.58075E-12
  0.400  5.80250E-02 -6.60399E-04 -8.92880E-07  5.59475E-09 -1.26158E-11  1.03810E-01  7.06463E-04 -5.25600E-06  2.00771E-09  8.44804E-11
  0.500  5.86163E-02 -9.87123E-04 -2.09018E-06  2.08375E-08 -7.38865E-11  1.02470E-01  1.04590E-03 -1.24656E-05  7.58714E-09  4.94125E-10
  0.600  5.93118E-02 -1.34565E-03 -4.11597E-06  6.04269E-08 -3.10940E-10  1.00949E-01  1.40899E-03 -2.49412E-05  2.24151E-08  2.07628E-09
  0.700  6.00956E-02 -1.71512E-03 -7.17042E-06  1.47197E-07 -1.04017E-09  9.93100E-02  1.77056E-03 -4.42754E-05  5.58782E-08  6.93549E-09
  0.800  6.09494E-02 -2.07389E-03 -1.13866E-05  3.15161E-07 -2.93779E-09  9.76147E-02  2.10560E-03 -7.18558E-05  1.23040E-07  1.95641E-08
  0.900  6.18528E-02 -2.40071E-03 -1.68003E-05  6.10693E-07 -7.28273E-09  9.59260E-02  2.39093E-03 -1.08680E-04  2.46505E-07  4.84589E-08
  1.000  6.27842E-02 -2.67585E-03 -2.33277E-05  1.09254E-06 -1.62709E-08  9.43024E-02  2.60674E-03 -1.55185E-04  4.58562E-07  1.08240E-07
  1.100  6.37211E-02 -2.88213E-03 -3.07529E-05  1.83046E-06 -3.33848E-08  9.27965E-02  2.73788E-03 -2.11108E-04  8.03639E-07  2.22210E-07
  1.200  6.46408E-02 -3.00580E-03 -3.87268E-05  2.90238E-06 -6.37850E-08  9.14520E-02  2.77472E-03 -2.75388E-04  1.34105E-06  4.25203E-07
  1.300  6.55217E-02 -3.03723E-03 -4.67766E-05  4.39021E-06 -1.14675E-07  9.03022E-02  2.71372E-03 -3.46119E-04  2.14794E-06  7.66513E-07
  1.400  6.63436E-02 -2.97131E-03 -5.43257E-05  6.37448E-06 -1.95579E-07  8.93692E-02  2.55753E-03 -4.20564E-04  3.32229E-06  1.31261E-06
  1.500  6.70889E-02 -2.80767E-03 -6.07214E-05  8.92815E-06 -3.18457E-07  8.86635E-02  2.31467E-03 -4.95235E-04  4.98557E-06  2.14928E-06
  1.600  6.77431E-02 -2.55055E-03 -6.52702E-05  1.21101E-05 -4.97593E-07  8.81838E-02  1.99889E-03 -5.66035E-04  7.28468E-06  3.38291E-06
  1.700  6.82950E-02 -2.20856E-03 -6.72753E-05  1.59586E-05 -7.49203E-07  8.79184E-02  1.62821E-03 -6.28455E-04  1.03926E-05  5.14042E-06
  1.800  6.87379E-02 -1.79409E-03 -6.60780E-05  2.04853E-05 -1.09071E-06  8.78460E-02  1.22369E-03 -6.77822E-04  1.45068E-05  7.56768E-06
  1.900  6.90688E-02 -1.32266E-03 -6.10972E-05  2.56706E-05 -1.53972E-06  8.79376E-02  8.08091E-04 -7.09578E-04  1.98455E-05  1.08260E-05
  2.000  6.92891E-02 -8.12082E-04 -5.18688E-05  3.14594E-05 -2.11266E-06  8.81586E-02  4.04441E-04 -7.19577E-04  2.66403E-05  1.50864E-05
  2.100  6.94039E-02 -2.81569E-04 -3.80815E-05  3.77592E-05 -2.82328E-06  8.84703E-02  3.46664E-05 -7.04376E-04  3.51252E-05  2.05223E-05
  2.200  6.94217E-02  2.49187E-04 -1.96090E-05  4.44397E-05 -3.68105E-06  8.88331E-02 -2.81722E-04 -6.61507E-04  4.55218E-05  2.72997E-05
  2.300  6.93540E-02  7.60913E-04  3.46342E-06  5.13337E-05 -4.68964E-06  8.92074E-02 -5.28740E-04 -5.89703E-04  5.80212E-05  3.55651E-05
  2.400  6.92145E-02  1.23559E-03  3.08172E-05  5.82398E-05 -5.84572E-06  8.95566E-02 -6.94825E-04 -4.89068E-04  7.27621E-05  4.54336E-05
  2.500  6.90183E-02  1.65718E-03  6.18874E-05  6.49265E-05 -7.13823E-06  8.98481E-02 -7.73438E-04 -3.61173E-04  8.98079E-05  5.69743E-05
  2.600  6.87816E-02  2.01227E-03  9.58583E-05  7.11380E-05 -8.54837E-06  9.00555E-02 -7.63374E-04 -2.09071E-04  1.09123E-04  7.01965E-05
  2.700  6.85204E-02  2.29051E-03  1.31670E-04  7.66008E-05 -1.00504E-05  9.01587E-02 -6.68740E-04 -3.72198E-05  1.30547E-04  8.50369E-05
  2.800  6.82506E-02  2.48499E-03  1.68037E-04  8.10310E-05 -1.16132E-05  9.01455E-02 -4.98605E-04  1.48671E-04  1.53782E-04  1.01348E-04
  2.900  6.79866E-02  2.59242E-03  2.03485E-04  8.41432E-05 -1.32034E-05  9.00113E-02 -2.66354E-04  3.41886E-04  1.78370E-04  1.18888E-04
  3.000  6.77418E-02  2.61316E-03  2.36404E-04  8.56600E-05 -1.47881E-05  8.97590E-02  1.12435E-05  5.35008E-04  2.03696E-04  1.37319E-04
  3.100  6.75270E-02  2.55120E-03  2.65115E-04  8.53220E-05 -1.63398E-05  8.93984E-02  3.15179E-04  7.20285E-04  2.28985E-04  1.56202E-04
  3.200  6.73511E-02  2.41393E-03  2.87957E-04  8.28996E-05 -1.78399E-05  8.89448E-02  6.25517E-04  8.90032E-04  2.53321E-04  1.75005E-04
  3.300  6.72199E-02  2.21188E-03  3.03394E-04  7.82043E-05 -1.92836E-05  8.84180E-02  9.22790E-04  1.03704E-03  2.75675E-04  1.93114E-04
  3.400  6.71362E-02  1.95832E-03  3.10126E-04  7.11026E-05 -2.06832E-05  8.78401E-02  1.18938E-03  1.15500E-03  2.94949E-04  2.09846E-04
  3.500  6.70993E-02  1.66883E-03  3.07208E-04  6.15289E-05 -2.20705E-05  8.72339E-02  1.41080E-03  1.23885E-03  3.10025E-04  2.24478E-04
  3.600  6.71047E-02  1.36070E-03  2.94175E-04  4.95005E-05 -2.34977E-05  8.66206E-02  1.57682E-03  1.28513E-03  3.19831E-04  2.36269E-04
  3.700  6.71443E-02  1.05240E-03  2.71141E-04  3.51314E-05 -2.50359E-05  8.60177E-02  1.68224E-03  1.29222E-03  3.23413E-04  2.44499E-04
  3.800  6.72056E-02  7.62873E-04  2.38893E-04  1.86455E-05 -2.67716E-05  8.54378E-02  1.72740E-03  1.26050E-03  3.20009E-04  2.48499E-04
  3.900  6.72721E-02  5.10833E-04  1.98940E-04  3.87945E-07 -2.88005E-05  8.48864E-02  1.71828E-03  1.19243E-03  3.09120E-04  2.47694E-04
  4.000  6.73235E-02  3.14048E-04  1.53532E-04 -1.91672E-05 -3.12194E-05  8.43611E-02  1.66613E-03  1.09246E-03  2.90579E-04  2.41638E-04
  4.100  6.73357E-02  1.88584E-04  1.05615E-04 -3.94137E-05 -3.41153E-05  8.38516E-02  1.58675E-03  9.66869E-04  2.64597E-04  2.30044E-04
  4.200  6.72819E-02  1.48089E-04  5.87496E-05 -5.96171E-05 -3.75548E-05  8.33388E-02  1.49941E-03  8.23532E-04  2.31804E-04  2.12820E-04
  4.300  6.71327E-02  2.03124E-04  1.69624E-05 -7.89260E-05 -4.15720E-05  8.27963E-02  1.42544E-03  6.71492E-04  1.93252E-04  1.90081E-04
  4.400  6.68578E-02  3.60587E-04 -1.54491E-05 -9.63933E-05 -4.61578E-05  8.21915E-02  1.38667E-03  5.20526E-04  1.50403E-04  1.62170E-04
  4.500  6.64268E-02  6.23255E-04 -3.41524E-05 -1.11006E-04 -5.12512E-05  8.14868E-02  1.40375E-03  3.80628E-04  1.05082E-04  1.29652E-04
  4.600  6.58106E-02  9.89507E-04 -3.50452E-05 -1.21726E-04 -5.67334E-05  8.06426E-02  1.49459E-03  2.61468E-04  5.94000E-05  9.33043E-05
  4.700  6.49830E-02  1.45322E-03 -1.45317E-05 -1.27539E-04 -6.24266E-05  7.96192E-02  1.67288E-03  1.71844E-04  1.56622E-05  5.40940E-05
  4.800  6.39219E-02  2.00390E-03  3.02108E-05 -1.27506E-04 -6.80968E-05  7.83792E-02  1.94702E-03  1.19187E-04 -2.37575E-05  1.31422E-05
  4.900  6.26105E-02  2.62703E-03  1.00994E-04 -1.20826E-04 -7.34626E-05  7.68903E-02  2.31929E-03  1.09120E-04 -5.65463E-05 -2.83209E-05
  5.000  6.10389E-02  3.30461E-03  1.98432E-04 -1.06892E-04 -7.82078E-05  7.51271E-02  2.78562E-03  1.45120E-04 -8.05899E-05 -6.90096E-05
  5.100  5.92044E-02  4.01594E-03  3.21821E-04 -8.53427E-05 -8.19991E-05  7.30731E-02  3.33565E-03  2.28310E-04 -9.41047E-05 -1.07641E-04
  5.200  5.71122E-02  4.73855E-03  4.69096E-04 -5.61071E-05 -8.45071E-05  7.07218E-02  3.95337E-03  3.57372E-04 -9.57552E-05 -1.42993E-04
  5.300  5.47753E-02  5.44918E-03  6.36879E-04 -1.94353E-05 -8.54280E-05  6.80774E-02  4.61804E-03  5.28615E-04 -8.47476E-05 -1.73967E-04
  5.400  5.22146E-02  6.12486E-03  8.20610E-04  2.40892E-05 -8.45064E-05  6.51546E-02  5.30557E-03  7.36179E-04 -6.08920E-05 -1.99634E-04
  5.500  4.94576E-02  6.74401E-03  1.01476E-03  7.35544E-05 -8.15557E-05  6.19786E-02  5.98990E-03  9.72370E-04 -2.46285E-05 -2.19284E-04
  5.600  4.65381E-02  7.28736E-03  1.21309E-03  1.27747E-04 -7.64749E-05  5.85832E-02  6.64466E-03  1.22809E-03  2.29863E-05 -2.32455E-04
  5.700  4.34941E-02  7.73880E-03  1.40900E-03  1.85197E-04 -6.92605E-05  5.50098E-02  7.24468E-03  1.49333E-03  8.03306E-05 -2.38951E-04
  5.800  4.03668E-02  8.08601E-03  1.59586E-03  2.44242E-04 -6.00117E-05  5.13054E-02  7.76743E-03  1.75777E-03  1.45305E-04 -2.38848E-04
  5.900  3.71990E-02  8.32091E-03  1.76736E-03  3.03103E-04 -4.89296E-05  4.75204E-02  8.19415E-03  2.01127E-03  2.15446E-04 -2.32480E-04
  6.000  3.40332E-02  8.43982E-03  1.91783E-03  3.59971E-04 -3.63084E-05  4.37062E-02  8.51073E-03  2.24441E-03  2.88067E-04 -2.20413E-04
  6.100  3.09101E-02  8.44339E-03  2.04250E-03  4.13092E-04 -2.25208E-05  3.99138E-02  8.70825E-03  2.44895E-03  3.60401E-04 -2.03414E-04
  6.200  2.78677E-02  8.33632E-03  2.13776E-03  4.60857E-04 -7.99881E-06  3.61910E-02  8.78313E-03  2.61819E-03  4.29750E-04 -1.82396E-04
  6.300  2.49395E-02  8.12689E-03  2.20124E-03  5.01874E-04  6.79063E-06  3.25818E-02  8.73698E-03  2.74720E-03  4.93622E-04 -1.58373E-04
  6.400  2.21541E-02  7.82634E-03  2.23192E-03  5.35035E-04  2.13708E-05  2.91241E-02  8.57609E-03  2.83299E-03  5.49855E-04 -1.32403E-04
  6.500  1.95348E-02  7.44811E-03  2.23006E-03  5.59555E-04  3.52809E-05  2.58498E-02  8.31080E-03  2.87450E-03  5.96704E-04 -1.05533E-04
  6.600  1.70987E-02  7.00712E-03  2.19715E-03  5.75004E-04  4.81001E-05  2.27834E-02  7.95458E-03  2.87248E-03  6.32911E-04 -7.87528E-05
  6.700  1.48574E-02  6.51893E-03  2.13575E-03  5.81306E-04  5.94677E-05  1.99426E-02  7.52310E-03  2.82936E-03  6.57735E-04 -5.29520E-05
  6.800  1.28168E-02  5.99906E-03  2.04924E-03  5.78725E-04  6.90991E-05  1.73382E-02  7.03326E-03  2.74894E-03  6.70947E-04 -2.88871E-05
  6.900  1.09778E-02  5.46235E-03  1.94165E-03  5.67833E-04  7.67962E-05  1.49743E-02  6.50226E-03  2.63608E-03  6.72807E-04 -7.15960E-06
  7.000  9.33696E-03  4.92242E-03  1.81739E-03  5.49459E-04  8.24517E-05  1.28496E-02  5.94679E-03  2.49639E-03  6.64003E-04  1.17954E-05
  7.100  7.88696E-03  4.39125E-03  1.68101E-03  5.24633E-04  8.60476E-05  1.09579E-02  5.38232E-03  2.33584E-03  6.45577E-04  2.77106E-05
  7.200  6.61762E-03  3.87896E-03  1.53700E-03  4.94521E-04  8.76495E-05  9.28863E-03  4.82264E-03  2.16051E-03  6.18843E-04  4.04777E-05
  7.300  5.51652E-03  3.39364E-03  1.38958E-03  4.60362E-04  8.73950E-05  7.82854E-03  4.27943E-03  1.97624E-03  5.85290E-04  5.01322E-05
  7.400  4.56977E-03  2.94136E-03  1.24255E-03  4.23402E-04  8.54804E-05  6.56205E-03  3.76214E-03  1.78844E-03  5.46497E-04  5.68309E-05
  7.500  3.76267E-03  2.52623E-03  1.09920E-03  3.84842E-04  8.21449E-05  5.47225E-03  3.27793E-03  1.60190E-03  5.04042E-04  6.08273E-05
  7.600  3.08027E-03  2.15058E-03  9.62235E-04  3.45790E-04  7.76541E-05  4.54162E-03  2.83174E-03  1.42068E-03  4.59436E-04  6.24440E-05
  7.700  2.50788E-03  1.81517E-03  8.33749E-04  3.07227E-04  7.22842E-05  3.75264E-03  2.42648E-03  1.24804E-03  4.14060E-04  6.20465E-05
  7.800  2.03139E-03  1.51945E-03  7.15232E-04  2.69980E-04  6.63074E-05  3.08831E-03  2.06331E-03  1.08645E-03  3.69124E-04  6.00181E-05
  7.900  1.63761E-03  1.26184E-03  6.07611E-04  2.34710E-04  5.99801E-05  2.53252E-03  1.74190E-03  9.37616E-04  3.25639E-04  5.67389E-05
  8.000  1.31442E-03  1.03997E-03  5.11313E-04  2.01912E-04  5.35328E-05  2.07028E-03  1.46072E-03  8.02527E-04  2.84405E-04  5.25678E-05
  8.100  1.05087E-03  8.50943E-04  4.26334E-04  1.71921E-04  4.71641E-05  1.68796E-03  1.21740E-03  6.81572E-04  2.46012E-04  4.78294E-05
  8.200  8.37277E-04  6.91541E-04  3.52324E-04  1.44922E-04  4.10363E-05  1.37331E-03  1.00896E-03  5.74632E-04  2.10853E-04  4.28052E-05
  8.300  6.65133E-04  5.58431E-04  2.88667E-04  1.20973E-04  3.52742E-05  1.11551E-03  8.32057E-04  4.81185E-04  1.79142E-04  3.77288E-05
  8.400  5.27114E-04  4.48297E-04  2.34563E-04  1.00023E-04  2.99667E-05  9.05109E-04  6.83212E-04  4.00413E-04  1.50941E-04  3.27850E-05
  8.500  4.16970E-04  3.57963E-04  1.89097E-04  8.19406E-05  2.51690E-05  7.33965E-04  5.58960E-04  3.31298E-04  1.26185E-04  2.81113E-05
  8.600  3.29435E-04  2.84469E-04  1.51300E-04  6.65284E-05  2.09068E-05  5.95136E-04  4.55975E-04  2.72705E-04  1.04717E-04  2.38021E-05
  8.700  2.60116E-04  2.25128E-04  1.20198E-04  5.35502E-05  1.71812E-05  4.82760E-04  3.71161E-04  2.23456E-04  8.63084E-05  1.99145E-05
  8.800  2.05386E-04  1.77546E-04  9.48529E-05  4.27468E-05  1.39741E-05  3.91935E-04  3.01701E-04  1.82381E-04  7.06871E-05  1.64739E-05
  8.900  1.62276E-04  1.39634E-04  7.43867E-05  3.38520E-05  1.12528E-05  3.18591E-04  2.45086E-04  1.48364E-04  5.75587E-05  1.34811E-05
  9.000  1.28374E-04  1.09598E-04  5.80020E-05  2.66044E-05  8.97493E-06  2.59380E-04  1.99121E-04  1.20367E-04  4.66228E-05  1.09186E-05
  9.100  1.01741E-04  8.59211E-05  4.49896E-05  2.07570E-05  7.09273E-06  2.11560E-04  1.61917E-04  9.74507E-05  3.75867E-05  8.75583E-06
  9.200  8.08239E-05  6.73356E-05  3.47323E-05  1.60829E-05  5.55634E-06  1.72903E-04  1.31868E-04  7.87819E-05  3.01750E-05  6.95451E-06
  9.300  6.43871E-05  5.27978E-05  2.67023E-05  1.23790E-05  4.31655E-06  1.41607E-04  1.07628E-04  6.36337E-05  2.41356E-05  5.47252E-06
  9.400  5.14554E-05  4.14567E-05  2.04555E-05  9.46762E-06  3.32681E-06  1.16219E-04  8.80798E-05  5.13824E-05  1.92433E-05  4.26700E-06
  9.500  4.12612E-05  3.26258E-05  1.56240E-05  7.19648E-06  2.54455E-06  9.55753E-05  7.23054E-05  4.14992E-05  1.53008E-05  3.29667E-06
  9.600  3.32034E-05  2.57561E-05  1.19067E-05  5.43713E-06  1.93195E-06  7.87432E-05  5.95566E-05  3.35416E-05  1.21381E-05  2.52329E-06
  9.700  2.68132E-05  2.04121E-05  9.06016E-06  4.08313E-06  1.45623E-06  6.49786E-05  4.92280E-05  2.71424E-05  9.61112E-06  1.91257E-06
  9.800  2.17259E-05  1.62508E-05  6.88974E-06  3.04747E-06  1.08962E-06  5.36885E-05  4.08331E-05  2.19997E-05  7.59915E-06  1.43454E-06
  9.900  1.76583E-05  1.30041E-05  5.24113E-06  2.25996E-06  8.09025E-07  4.44002E-05  3.39828E-05  1.78670E-05  6.00219E-06  1.06360E-06
 10.000  1.43912E-05  1.04630E-05  3.99308E-06  1.66461E-06  5.95603E-07  3.67368E-05  2.83675E-05  1.45441E-05  4.73811E-06  7.78238E-07
 10.100  1.17547E-05  8.46607E-06  3.05095E-06  1.21718E-06  4.34212E-07  3.03977E-05  2.37419E-05  1.18695E-05  3.73998E-06  5.60699E-07
 10.200  9.61734E-06  6.88854E-06  2.34132E-06  8.83030E-07  3.12853E-07  2.51422E-05  1.99117E-05  9.71313E-06  2.95359E-06  3.96488E-07
 10.300  7.87714E-06  5.63472E-06  1.80760E-06  6.35190E-07  2.22127E-07  2.07774E-05  1.67239E-05  7.97062E-06  2.33521E-06  2.73908E-07
 10.400  6.45475E-06  4.63133E-06  1.40634E-06  4.52791E-07  1.54745E-07  1.71477E-05  1.40578E-05  6.55866E-06  1.84974E-06  1.83598E-07
 10.500  5.28829E-06  3.82239E-06  1.10436E-06  3.19751E-07  1.05094E-07  1.41272E-05  1.18180E-05  5.41081E-06  1.46905E-06  1.18115E-07
 10.600  4.32921E-06  3.16523E-06  8.76461E-07  2.23717E-07  6.88725E-08  1.16134E-05  9.92931E-06  4.47421E-06  1.17073E-06  7.15714E-08
 10.700  3.53918E-06  2.62736E-06  7.03586E-07  1.55232E-07  4.27930E-08  9.52234E-06  8.33186E-06  3.70690E-06  9.36913E-07  3.93336E-08
 10.800  2.88773E-06  2.18402E-06  5.71431E-07  1.07078E-07  2.43437E-08  7.78479E-06  6.97800E-06  3.07566E-06  7.53453E-07  1.77671E-08
 10.900  2.35044E-06  1.81631E-06  4.69322E-07  7.37678E-08  1.16037E-08  6.34340E-06  5.82933E-06  2.55418E-06  6.09175E-07  4.03608E-09
 11.000  1.90756E-06  1.50976E-06  3.89361E-07  5.11509E-08  3.10165E-09  5.15030E-06  4.85468E-06  2.12168E-06  4.95299E-07 -4.05864E-09
 11.100  1.54298E-06  1.25319E-06  3.25753E-07  3.61115E-08 -2.29108E-09  4.16540E-06  4.02839E-06  1.76171E-06  4.04962E-07 -8.20851E-09
 11.200  1.24347E-06  1.03790E-06  2.74289E-07  2.63325E-08 -5.43991E-09  3.35493E-06  3.32916E-06  1.46122E-06  3.32837E-07 -9.69947E-09
 11.300  9.98073E-07  8.57032E-07  2.31939E-07  2.01131E-08 -7.00665E-09  2.69038E-06  2.73900E-06  1.20985E-06  2.74814E-07 -9.49402E-09
 11.400  7.97654E-07  7.05111E-07  1.96541E-07  1.62258E-08 -7.49417E-09  2.14762E-06  2.24259E-06  9.99313E-07  2.27741E-07 -8.29750E-09
 11.500  6.34579E-07  5.77677E-07  1.66566E-07  1.38035E-08 -7.28041E-09  1.70625E-06  1.82673E-06  8.22913E-07  1.89220E-07 -6.61228E-09
 11.600  5.02438E-07  4.71049E-07  1.40932E-07  1.22507E-08 -6.64473E-09  1.34894E-06  1.47997E-06  6.75217E-07  1.57434E-07 -4.78225E-09
 11.700  3.95845E-07  3.82138E-07  1.18870E-07  1.11733E-08 -5.78878E-09  1.06110E-06  1.19231E-06  5.51755E-07  1.31008E-07 -3.02968E-09
 11.800  3.10275E-07  3.08315E-07  9.98256E-08  1.03236E-08 -4.85342E-09  8.30374E-07  9.55000E-07  4.48810E-07  1.08905E-07 -1.48552E-09
 11.900  2.41930E-07  2.47325E-07  8.33851E-08  9.55703E-09 -3.93243E-09  6.46404E-07  7.60372E-07  3.63260E-07  9.03357E-08 -2.14249E-10
 12.000  1.87633E-07  1.97213E-07  6.92275E-08  8.79933E-09 -3.08388E-09  5.00504E-07  6.01735E-07  2.92455E-07  7.46954E-08  7.66108E-10
 12.100  1.44730E-07  1.56286E-07  5.70896E-08  8.02182E-09 -2.33945E-09  3.85434E-07  4.73257E-07  2.34132E-07  6.15130E-08  1.46809E-09
 12.200  1.11023E-07  1.23071E-07  4.67449E-08  7.22321E-09 -1.71194E-09  2.95191E-07  3.69886E-07  1.86343E-07  5.04138E-08  1.92262E-09
 12.300  8.46915E-08  9.62938E-08  3.79904E-08  6.41671E-09 -1.20132E-09  2.24825E-07  2.87271E-07  1.47409E-07  4.10929E-08  2.16983E-09
 12.400  6.42421E-08  7.48526E-08  3.06395E-08  5.62143E-09 -7.99439E-10  1.70275E-07  2.21692E-07  1.15884E-07  3.32962E-08  2.25264E-09
 12.500  4.84545E-08  5.78041E-08  2.45186E-08  4.85683E-09 -4.93542E-10  1.28236E-07  1.69992E-07  9.05214E-08  2.68074E-08  2.21236E-09
 12.600  3.63388E-08  4.43440E-08  1.94661E-08  4.13957E-09 -2.68883E-10  9.60298E-08  1.29515E-07  7.02524E-08  2.14389E-08  2.08601E-09
 12.700  2.70968E-08  3.37931E-08  1.53327E-08  3.48201E-09 -1.10494E-10  7.15038E-08  9.80449E-08  5.41650E-08  1.70268E-08  1.90498E-09
 12.800  2.00895E-08  2.55820E-08  1.19815E-08  2.89188E-09 -4.33824E-12  5.29384E-08  7.37461E-08  4.14858E-08  1.34266E-08  1.69452E-09
 12.900  1.48087E-08  1.92377E-08  9.28906E-09  2.37251E-09  6.20303E-11  3.89695E-08  5.51146E-08  3.15634E-08  1.05109E-08  1.47399E-09
 13.000  1.08533E-08  1.43712E-08  7.14521E-09  1.92362E-09  9.91659E-11  2.85225E-08  4.09274E-08  2.38540E-08  8.16808E-09  1.25738E-09
 13.100  7.90863E-09  1.06650E-08  5.45342E-09  1.54206E-09  1.15680E-10  2.07566E-08  3.01988E-08  1.79073E-08  6.30058E-09  1.05410E-09
 13.200  5.72973E-09  7.86264E-09  4.13013E-09  1.22274E-09  1.18352E-10  1.50186E-08  2.21413E-08  1.33532E-08  4.82404E-09  8.69870E-10
 13.300  4.12726E-09  5.75875E-09  3.10408E-09  9.59369E-10  1.12337E-10  1.08046E-08  1.61311E-08  9.89088E-09  3.66615E-09  7.07541E-10
 13.400  2.95589E-09  4.19040E-09  2.31532E-09  7.45093E-10  1.01410E-10  7.72846E-09  1.16785E-08  7.27753E-09  2.76556E-09  5.67844E-10
 13.500  2.10482E-09  3.02948E-09  1.71409E-09  5.72994E-10  8.82262E-11  5.49650E-09  8.40202E-09  5.31916E-09  2.07082E-09  4.50051E-10
 13.600  1.49021E-09  2.17611E-09  1.25962E-09  4.36450E-10  7.45625E-11  3.88680E-09  6.00714E-09  3.86210E-09  1.53923E-09  3.52505E-10
 13.700  1.04903E-09  1.55314E-09  9.18901E-10  3.29371E-10  6.15294E-11  2.73284E-09  4.26830E-09  2.78574E-09  1.13577E-09  2.73026E-10
 13.800  7.34252E-10  1.10149E-09  6.65510E-10  2.46328E-10  4.97535E-11  1.91054E-09  3.01411E-09  1.99622E-09  8.32002E-10  2.09221E-10
 13.900  5.11002E-10  7.76254E-10  4.78559E-10  1.82608E-10  3.95235E-11  1.32808E-09  2.11541E-09  1.42116E-09  6.05103E-10  1.58697E-10
 14.000  3.53613E-10  5.43628E-10  3.41701E-10  1.34215E-10  3.09034E-11  9.17957E-10  1.47563E-09  1.00522E-09  4.36951E-10  1.19197E-10
 14.100  2.43314E-10  3.78349E-10  2.42284E-10  9.78232E-11  2.38186E-11  6.30897E-10  1.02311E-09  7.06448E-10  3.13301E-10  8.86840E-11
 14.200  1.66474E-10  2.61695E-10  1.70609E-10  7.07173E-11  1.81173E-11  4.31160E-10  7.05095E-10  4.93310E-10  2.23072E-10  6.53801E-11
 14.300  1.13259E-10  1.79899E-10  1.19320E-10  5.07139E-11  1.36126E-11  2.93001E-10  4.83019E-10  3.42293E-10  1.57728E-10  4.77733E-11
 14.400  7.66221E-11  1.22916E-10  8.28884E-11  3.60841E-11  1.01111E-11  1.97996E-10  3.28919E-10  2.36011E-10  1.10760E-10  3.46077E-11
 14.500  5.15463E-11  8.34746E-11  5.71967E-11  2.54776E-11  7.42911E-12  1.33048E-10  2.22658E-10  1.61712E-10  7.72490E-11  2.48603E-11
 14.600  3.44834E-11  5.63487E-11  3.92082E-11  1.78531E-11  5.40254E-12  8.89064E-11  1.49838E-10  1.10115E-10  5.35143E-11  1.77123E-11
 14.700  2.29404E-11  3.78107E-11  2.67017E-11  1.24177E-11  3.89028E-12  5.90795E-11  1.00245E-10  7.45179E-11  3.68246E-11  1.25186E-11
 14.800  1.51767E-11  2.52210E-11  1.80671E-11  8.57414E-12  2.77498E-12  3.90416E-11  6.66756E-11  5.01194E-11  2.51725E-11  8.77869E-12
 14.900  9.98491E-12  1.67242E-11  1.21465E-11  5.87781E-12  1.96149E-12  2.56575E-11  4.40913E-11  3.35042E-11  1.70946E-11  6.10885E-12
 15.000  6.53300E-12  1.10250E-11  8.11437E-12  4.00094E-12  1.37433E-12  1.67688E-11  2.89890E-11  2.22617E-11  1.15335E-11  4.21901E-12
 15.100  4.25098E-12  7.22567E-12  5.38670E-12  2.70442E-12  9.54769E-13  1.08994E-11  1.89505E-11  1.47028E-11  7.73146E-12  2.89228E-12
 15.200  2.75095E-12  4.70824E-12  3.55369E-12  1.81549E-12  6.57821E-13  7.04563E-12  1.23177E-11  9.65251E-12  5.14968E-12  1.96836E-12
 15.300  1.77051E-12  3.05025E-12  2.32997E-12  1.21049E-12  4.49590E-13  4.52964E-12  7.96113E-12  6.29939E-12  3.40833E-12  1.33000E-12
 15.400  1.13330E-12  1.96483E-12  1.51830E-12  8.01707E-13  3.04866E-13  2.89629E-12  5.11641E-12  4.08685E-12  2.24166E-12  8.92338E-13
 15.500  7.21496E-13  1.25846E-12  9.83383E-13  5.27459E-13  2.05146E-13  1.84189E-12  3.26976E-12  2.63590E-12  1.46517E-12  5.94542E-13
 15.600  4.56845E-13  8.01475E-13  6.33091E-13  3.44759E-13  1.37009E-13  1.16502E-12  2.07796E-12  1.69018E-12  9.51730E-13  3.93416E-13
 15.700  2.87712E-13  5.07568E-13  4.05144E-13  2.23887E-13  9.08308E-14  7.32928E-13  1.31323E-12  1.07750E-12  6.14428E-13  2.58570E-13
 15.800  1.80223E-13  3.19643E-13  2.57734E-13  1.44464E-13  5.97823E-14  4.58622E-13  8.25356E-13  6.82957E-13  3.94258E-13  1.68809E-13
 15.900  1.12287E-13  2.00176E-13  1.62994E-13  9.26259E-14  3.90682E-14  2.85445E-13  5.15877E-13  4.30408E-13  2.51455E-13  1.09481E-13
 16.000  6.95873E-14  1.24667E-13  1.02478E-13  5.90173E-14  2.53533E-14  1.76713E-13  3.20678E-13  2.69706E-13  1.59415E-13  7.05414E-14
 16.100  4.28957E-14  7.72132E-14  6.40559E-14  3.73701E-14  1.63401E-14  1.08819E-13  1.98252E-13  1.68049E-13  1.00463E-13  4.51585E-14
 16.200  2.63021E-14  4.75605E-14  3.98089E-14  2.35177E-14  1.04599E-14  6.66556E-14  1.21901E-13  1.04120E-13  6.29377E-14  2.87247E-14
 16.300  1.60423E-14  2.91357E-14  2.45985E-14  1.47099E-14  6.65111E-15  4.06136E-14  7.45491E-14  6.41494E-14  3.91976E-14  1.81560E-14
 16.400  9.73302E-15  1.77518E-14  1.51133E-14  9.14531E-15  4.20138E-15  2.46159E-14  4.53458E-14  3.93032E-14  2.42699E-14  1.14040E-14
 16.500  5.87413E-15  1.07573E-14  9.23315E-15  5.65169E-15  2.63668E-15  1.48415E-14  2.74346E-14  2.39470E-14  1.49400E-14  7.11864E-15
 16.600  3.52663E-15  6.48374E-15  5.60909E-15  3.47194E-15  1.64409E-15  8.90157E-15  1.65097E-14  1.45103E-14  9.14386E-15  4.41633E-15
 16.700  2.10622E-15  3.88699E-15  3.38846E-15  2.12031E-15  1.01865E-15  5.31111E-15  9.88247E-15  8.74404E-15  5.56435E-15  2.72316E-15
 16.800  1.25136E-15  2.31781E-15  2.03561E-15  1.28730E-15  6.27173E-16  3.15242E-15  5.88420E-15  5.24048E-15  3.36684E-15  1.66899E-15
 16.900  7.39611E-16  1.37477E-15  1.21613E-15  7.77014E-16  3.83744E-16  1.86143E-15  3.48509E-15  3.12367E-15  2.02566E-15  1.01678E-15
 17.000  4.34882E-16  8.11108E-16  7.22560E-16  4.66304E-16  2.33353E-16  1.09346E-15  2.05330E-15  1.85184E-15  1.21189E-15  6.15760E-16
 17.100  2.54386E-16  4.76028E-16  4.26960E-16  2.78237E-16  1.41036E-16  6.39023E-16  1.20341E-15  1.09194E-15  7.20981E-16  3.70703E-16
 17.200  1.48039E-16  2.77907E-16  2.50919E-16  1.65076E-16  8.47257E-17  3.71532E-16  7.01622E-16  6.40414E-16  4.26542E-16  2.21866E-16
 17.300  8.57092E-17  1.61395E-16  1.46664E-16  9.73847E-17  5.05930E-17  2.14905E-16  4.06940E-16  3.73592E-16  2.50952E-16  1.32015E-16
 17.400  4.93687E-17  9.32419E-17  8.52642E-17  5.71284E-17  3.00316E-17  1.23673E-16  2.34803E-16  2.16781E-16  1.46832E-16  7.80976E-17
 17.500  2.82915E-17  5.35885E-17  4.93035E-17  3.33258E-17  1.77215E-17  7.08093E-17  1.34781E-16  1.25123E-16  8.54414E-17  4.59362E-17
 17.600  1.61304E-17  3.06393E-17  2.83573E-17  1.93327E-17  1.03963E-17  4.03361E-17  7.69688E-17  7.18391E-17  4.94471E-17  2.68652E-17
 17.700  9.15014E-18  1.74277E-17  1.62233E-17  1.11532E-17  6.06355E-18  2.28609E-17  4.37288E-17  4.10296E-17  2.84611E-17  1.56227E-17
 17.800  5.16425E-18  9.86203E-18  9.23232E-18  6.39909E-18  3.51615E-18  1.28913E-17  2.47170E-17  2.33107E-17  1.62934E-17  9.03381E-18
 17.900  2.89995E-18  5.55214E-18  5.22624E-18  3.65139E-18  2.02730E-18  7.23280E-18  1.38997E-17  1.31748E-17  9.27747E-18  5.19454E-18
 18.000  1.62025E-18  3.10980E-18  2.94296E-18  2.07220E-18  1.16223E-18  4.03767E-18  7.77682E-18  7.40750E-18  5.25434E-18  2.97029E-18
 18.100  9.00718E-19  1.73296E-18  1.64856E-18  1.16964E-18  6.62535E-19  2.24272E-18  4.32906E-18  4.14330E-18  2.95997E-18  1.68904E-18
 18.200  4.98214E-19  9.60802E-19  9.18668E-19  6.56646E-19  3.75563E-19  1.23949E-18  2.39766E-18  2.30556E-18  1.65862E-18  9.55172E-19
 18.300  2.74201E-19  5.30002E-19  5.09279E-19  3.66673E-19  2.11704E-19  6.81618E-19  1.32126E-18  1.27635E-18  9.24494E-19  5.37203E-19
 18.400  1.50159E-19  2.90888E-19  2.80870E-19  2.03660E-19  1.18676E-19  3.72971E-19  7.24440E-19  7.02961E-19  5.12591E-19  3.00484E-19
 18.500  8.18225E-20  1.58849E-19  1.54104E-19  1.12519E-19  6.61599E-20  2.03072E-19  3.95218E-19  3.85187E-19  2.82719E-19  1.67164E-19
 18.600  4.43644E-20  8.63094E-20  8.41180E-20  6.18362E-20  3.66810E-20  1.10020E-19  2.14534E-19  2.09989E-19  1.55120E-19  9.24938E-20
 18.700  2.39355E-20  4.66611E-20  4.56815E-20  3.38043E-20  2.02262E-20  5.93119E-20  1.15874E-19  1.13897E-19  8.46667E-20  5.09030E-20
 18.800  1.28500E-20  2.51004E-20  2.46816E-20  1.83832E-20  1.10924E-20  3.18177E-20  6.22752E-20  6.14649E-20  4.59730E-20  2.78641E-20
 18.900  6.86465E-21  1.34351E-20  1.32678E-20  9.94486E-21  6.05044E-21  1.69847E-20  3.33031E-20  3.30025E-20  2.48339E-20  1.51715E-20
 19.000  3.64918E-21  7.15550E-21  7.09608E-21  5.35198E-21  3.28255E-21  9.02215E-21  1.77216E-20  1.76310E-20  1.33458E-20  8.21678E-21
 19.100  1.93036E-21  3.79215E-21  3.77610E-21  2.86535E-21  1.77137E-21  4.76907E-21  9.38372E-21  9.37187E-21  7.13532E-21  4.42666E-21
 19.200  1.01614E-21  1.99978E-21  1.99930E-21  1.52614E-21  9.50802E-22  2.50860E-21  4.94430E-21  4.95677E-21  3.79539E-21  2.37226E-21
 19.300  5.32280E-22  1.04938E-21  1.05325E-21  8.08681E-22  5.07652E-22  1.31314E-21  2.59237E-21  2.60857E-21  2.00855E-21  1.26464E-21
 19.400  2.77465E-22  5.47958E-22  5.52089E-22  4.26315E-22  2.69617E-22  6.84024E-22  1.35257E-21  1.36597E-21  1.05754E-21  6.70658E-22
 19.500  1.43933E-22  2.84726E-22  2.87949E-22  2.23595E-22  1.42443E-22  3.54585E-22  7.02253E-22  7.11739E-22  5.53996E-22  3.53811E-22
 19.600  7.43019E-23  1.47224E-22  1.49437E-22  1.16676E-22  7.48619E-23  1.82921E-22  3.62832E-22  3.69019E-22  2.88749E-22  1.85690E-22
 19.700  3.81709E-23  7.57540E-23  7.71691E-23  6.05752E-23  3.91393E-23  9.39076E-23  1.86553E-22  1.90383E-22  1.49742E-22  9.69523E-23
 19.800  1.95147E-23  3.87895E-23  3.96530E-23  3.12903E-23  2.03567E-23  4.79777E-23  9.54516E-23  9.77388E-23  7.72652E-23  5.03605E-23
 19.900  9.92870E-24  1.97655E-23  2.02751E-23  1.60817E-23  1.05330E-23  2.43940E-23  4.86023E-23  4.99308E-23  3.96685E-23  2.60251E-23
  67 154 200   0.100
  0.000  5.69818E-02 -2.94801E-16 -3.95517E-16 -7.13028E-16 -6.43720E-17  1.06542E-01 -5.58570E-16 -8.74301E-16 -8.25612E-16 -9.15513E-16
  0.100  5.70519E-02 -4.73380E-05 -5.57474E-09  3.17289E-12 -1.28744E-15  1.06378E-01  5.60603E-05 -1.88503E-08 -6.87202E-12  1.17300E-15
  0.200  5.72608E-02 -1.86645E-04 -8.79656E-08  2.01503E-10 -4.75352E-14  1.05892E-01  2.20318E-04 -2.98772E-07 -4.36602E-10  7.04030E-13
  0.300  5.76038E-02 -4.09953E-04 -4.35112E-07  2.26546E-09 -1.19390E-12  1.05105E-01  4.81287E-04 -1.48882E-06 -4.91249E-09  1.78720E-11
  0.400  5.80732E-02 -7.04475E-04 -1.33106E-06  1.24981E-08 -1.19027E-11  1.04051E-01  8.20741E-04 -4.60182E-06 -2.71299E-08  1.76166E-10
  0.500  5.86582E-02 -1.05333E-03 -3.11565E-06  4.65673E-08 -7.07756E-11  1.02772E-01  1.21502E-03 -1.09152E-05 -1.01215E-07  1.03228E-09
  0.600  5.93454E-02 -1.43645E-03 -6.13444E-06  1.35103E-07 -3.03141E-10  1.01321E-01  1.63671E-03 -2.18411E-05 -2.94078E-07  4.34717E-09
  0.700  6.01185E-02 -1.83176E-03 -1.06846E-05  3.29272E-07 -1.03438E-09  9.97546E-02  2.05654E-03 -3.87726E-05 -7.17847E-07  1.45582E-08
  0.800  6.09589E-02 -2.21629E-03 -1.69621E-05  7.05382E-07 -2.98539E-09  9.81331E-02  2.44545E-03 -6.29194E-05 -1.54024E-06  4.11859E-08
  0.900  6.18462E-02 -2.56751E-03 -2.50171E-05  1.36759E-06 -7.57352E-09  9.65154E-02  2.77651E-03 -9.51404E-05 -2.99068E-06  1.02342E-07
  1.000  6.27586E-02 -2.86449E-03 -3.47197E-05  2.44801E-06 -1.73341E-08  9.49571E-02  3.02672E-03 -1.35790E-04 -5.36027E-06  2.29395E-07
  1.100  6.36736E-02 -3.08899E-03 -4.57427E-05  4.10360E-06 -3.64620E-08  9.35078E-02  3.17847E-03 -1.84589E-04 -8.99398E-06  4.72702E-07
  1.200  6.45689E-02 -3.22642E-03 -5.75604E-05  6.50981E-06 -7.14484E-08  9.22089E-02  3.22062E-03 -2.40533E-04 -1.42742E-05  9.08133E-07
  1.300  6.54232E-02 -3.26653E-03 -6.94650E-05  9.85093E-06 -1.31762E-07  9.10922E-02  3.14907E-03 -3.01843E-04 -2.15955E-05  1.64397E-06
  1.400  6.62167E-02 -3.20387E-03 -8.05981E-05  1.43079E-05 -2.30492E-07  9.01788E-02  2.96693E-03 -3.65983E-04 -3.13315E-05  2.82754E-06
  1.500  6.69324E-02 -3.03798E-03 -8.99967E-05  2.00440E-05 -3.84838E-07  8.94789E-02  2.68412E-03 -4.29723E-04 -4.37947E-05  4.65092E-06
  1.600  6.75564E-02 -2.77332E-03 -9.66476E-05  2.71900E-05 -6.16328E-07  8.89917E-02  2.31666E-03 -4.89266E-04 -5.91934E-05  7.35482E-06
  1.700  6.80784E-02 -2.41891E-03 -9.95481E-05  3.58292E-05 -9.50629E-07  8.87068E-02  1.88549E-03 -5.40436E-04 -7.75875E-05  1.12299E-05
  1.800  6.84922E-02 -1.98778E-03 -9.77693E-05  4.59843E-05 -1.41683E-06  8.86045E-02  1.41510E-03 -5.78900E-04 -9.88470E-05  1.66145E-05
  1.900  6.87958E-02 -1.49627E-03 -9.05171E-05  5.76067E-05 -2.04616E-06  8.86581E-02  9.31951E-04 -6.00428E-04 -1.22618E-04  2.38886E-05
  2.000  6.89910E-02 -9.63093E-04 -7.71897E-05  7.05691E-05 -2.87006E-06  8.88353E-02  4.62833E-04 -6.01168E-04 -1.48302E-04  3.34631E-05
  2.100  6.90837E-02 -4.08429E-04 -5.74269E-05  8.46625E-05 -3.91776E-06  8.91004E-02  3.32518E-05 -5.77922E-04 -1.75044E-04  4.57640E-05
  2.200  6.90830E-02  1.47059E-04 -3.11522E-05  9.95969E-05 -5.21344E-06  8.94161E-02 -3.34072E-04 -5.28397E-04 -2.01747E-04  6.12125E-05
  2.300  6.90006E-02  6.83167E-04  1.39644E-06  1.15008E-04 -6.77329E-06  8.97458E-02 -6.20496E-04 -4.51418E-04 -2.27099E-04  8.02004E-05
  2.400  6.88505E-02  1.18103E-03  3.96470E-05  1.30465E-04 -8.60268E-06  9.00548E-02 -8.12488E-04 -3.47092E-04 -2.49621E-04  1.03062E-04
  2.500  6.86480E-02  1.62387E-03  8.26864E-05  1.45486E-04 -1.06939E-05  9.03126E-02 -9.02334E-04 -2.16897E-04 -2.67741E-04  1.30045E-04
  2.600  6.84091E-02  1.99768E-03  1.29267E-04  1.59551E-04 -1.30249E-05  9.04938E-02 -8.88493E-04 -6.37020E-05 -2.79876E-04  1.61279E-04
  2.700  6.81497E-02  2.29165E-03  1.77831E-04  1.72125E-04 -1.55588E-05  9.05795E-02 -7.75583E-04  1.08295E-04 -2.84530E-04  1.96745E-04
  2.800  6.78851E-02  2.49857E-03  2.26544E-04  1.82669E-04 -1.82459E-05  9.05575E-02 -5.73991E-04  2.93710E-04 -2.80403E-04  2.36251E-04
  2.900  6.76293E-02  2.61496E-03  2.73359E-04  1.90665E-04 -2.10262E-05  9.04227E-02 -2.99133E-04  4.86187E-04 -2.66495E-04  2.79408E-04
  3.000  6.73948E-02  2.64118E-03  3.16085E-04  1.95629E-04 -2.38347E-05  9.01772E-02  2.96002E-05  6.78675E-04 -2.42204E-04  3.25619E-04
  3.100  6.71917E-02  2.58132E-03  3.52489E-04  1.97132E-04 -2.66070E-05  8.98291E-02  3.90158E-04  8.63765E-04 -2.07413E-04  3.74070E-04
  3.200  6.70278E-02  2.44300E-03  3.80401E-04  1.94813E-04 -2.92874E-05  8.93921E-02  7.59327E-04  1.03405E-03 -1.62548E-04  4.23737E-04
  3.300  6.69080E-02  2.23712E-03  3.97847E-04  1.88390E-04 -3.18363E-05  8.88837E-02  1.11433E-03  1.18251E-03 -1.08611E-04  4.73401E-04
  3.400  6.68339E-02  1.97742E-03  4.03188E-04  1.77679E-04 -3.42385E-05  8.83239E-02  1.43441E-03  1.30290E-03 -4.71764E-05  5.21679E-04
  3.500  6.68040E-02  1.68007E-03  3.95261E-04  1.62598E-04 -3.65096E-05  8.77331E-02  1.70233E-03  1.39010E-03  1.96520E-05  5.67060E-04
  3.600  6.68130E-02  1.36312E-03  3.73517E-04  1.43183E-04 -3.87011E-05  8.71304E-02  1.90565E-03  1.44045E-03  8.93220E-05  6.07956E-04
  3.700  6.68519E-02  1.04587E-03  3.38151E-04  1.19594E-04 -4.09027E-05  8.65316E-02  2.03770E-03  1.45201E-03  1.58952E-04  6.42763E-04
  3.800  6.69077E-02  7.48232E-04  2.90194E-04  9.21291E-05 -4.32408E-05  8.59477E-02  2.09815E-03  1.42473E-03  2.25483E-04  6.69925E-04
  3.900  6.69638E-02  4.90019E-04  2.31580E-04  6.12290E-05 -4.58737E-05  8.53835E-02  2.09316E-03  1.36056E-03  2.85850E-04  6.88006E-04
  4.000  6.70000E-02  2.90170E-04  1.65152E-04  2.74877E-05 -4.89824E-05  8.48362E-02  2.03506E-03  1.26347E-03  3.37175E-04  6.95760E-04
  4.100  6.69926E-02  1.65991E-04  9.46245E-05 -8.34513E-06 -5.27572E-05  8.42957E-02  1.94155E-03  1.13929E-03  3.76947E-04  6.92195E-04
  4.200  6.69155E-02  1.32385E-04  2.44721E-05 -4.53644E-05 -5.73815E-05  8.37441E-02  1.83447E-03  9.95541E-04  4.03208E-04  6.76640E-04
  4.300  6.67406E-02  2.01128E-04 -4.02413E-05 -8.25167E-05 -6.30134E-05  8.31563E-02  1.73830E-03  8.41080E-04  4.14692E-04  6.48791E-04
  4.400  6.64388E-02  3.80228E-04 -9.40932E-05 -1.18616E-04 -6.97663E-05  8.25016E-02  1.67831E-03  6.85713E-04  4.10936E-04  6.08746E-04
  4.500  6.59813E-02  6.73401E-04 -1.31584E-04 -1.52370E-04 -7.76900E-05  8.17450E-02  1.67875E-03  5.39694E-04  3.92343E-04  5.57027E-04
  4.600  6.53410E-02  1.07971E-03 -1.47456E-04 -1.82417E-04 -8.67553E-05  8.08493E-02  1.76094E-03  4.13192E-04  3.60180E-04  4.94580E-04
  4.700  6.44932E-02  1.59340E-03 -1.37022E-04 -2.07375E-04 -9.68423E-05  7.97776E-02  1.94167E-03  3.15738E-04  3.16525E-04  4.22754E-04
  4.800  6.34176E-02  2.20397E-03 -9.64972E-05 -2.25901E-04 -1.07735E-04  7.84952E-02  2.23181E-03  2.55678E-04  2.64154E-04  3.43258E-04
  4.900  6.20992E-02  2.89648E-03 -2.32888E-05 -2.36755E-04 -1.19122E-04  7.69721E-02  2.63541E-03  2.39678E-04  2.06378E-04  2.58108E-04
  5.000  6.05291E-02  3.65205E-03  8.37619E-05 -2.38875E-04 -1.30608E-04  7.51849E-02  3.14922E-03  2.72311E-04  1.46840E-04  1.69544E-04
  5.100  5.87057E-02  4.44869E-03  2.24217E-04 -2.31445E-04 -1.41727E-04  7.31187E-02  3.76279E-03  3.55747E-04  8.92857E-05  7.99450E-05
  5.200  5.66345E-02  5.26219E-03  3.95973E-04 -2.13958E-04 -1.51971E-04  7.07678E-02  4.45905E-03  4.89592E-04  3.73328E-05 -8.27227E-06
  5.300  5.43288E-02  6.06722E-03  5.95289E-04 -1.86276E-04 -1.60813E-04  6.81365E-02  5.21533E-03  6.70858E-04 -5.76172E-06 -9.27529E-05
  5.400  5.18088E-02  6.83847E-03  8.16926E-04 -1.48658E-04 -1.67744E-04  6.52392E-02  6.00475E-03  8.94103E-04 -3.73008E-05 -1.71304E-04
  5.500  4.91013E-02  7.55181E-03  1.05437E-03 -1.01783E-04 -1.72305E-04  6.20999E-02  6.79789E-03  1.15171E-03 -5.53094E-05 -2.41988E-04
  5.600  4.62385E-02  8.18537E-03  1.30017E-03 -4.67402E-05 -1.74118E-04  5.87509E-02  7.56456E-03  1.43429E-03 -5.86445E-05 -3.03197E-04
  5.700  4.32569E-02  8.72050E-03  1.54628E-03  1.50057E-05 -1.72914E-04  5.52313E-02  8.27558E-03  1.73120E-03 -4.70461E-05 -3.53720E-04
  5.800  4.01957E-02  9.14251E-03  1.78451E-03  8.16697E-05 -1.68554E-04  5.15858E-02  8.90437E-03  2.03112E-03 -2.11278E-05 -3.92775E-04
  5.900  3.70956E-02  9.44121E-03  2.00691E-03  1.51225E-04 -1.61039E-04  4.78619E-02  9.42837E-03  2.32266E-03  1.76908E-05 -4.20033E-04
  6.000  3.39970E-02  9.61119E-03  2.20621E-03  2.21499E-04 -1.50518E-04  4.41085E-02  9.83009E-03  2.59494E-03  6.73027E-05 -4.35608E-04
  6.100  3.09387E-02  9.65181E-03  2.37613E-03  2.90273E-04 -1.37275E-04  4.03740E-02  1.00978E-02  2.83817E-03  1.25072E-04 -4.40025E-04
  6.200  2.79566E-02  9.56699E-03  2.51171E-03  3.55399E-04 -1.21720E-04  3.67041E-02  1.02256E-02  3.04406E-03  1.88021E-04 -4.34180E-04
  6.300  2.50829E-02  9.36471E-03  2.60947E-03  4.14894E-04 -1.04360E-04  3.31404E-02  1.02140E-02  3.20619E-03  2.53022E-04 -4.19263E-04
  6.400  2.23449E-02  9.05645E-03  2.66751E-03  4.67039E-04 -8.57731E-05  2.97197E-02  1.00684E-02  3.32024E-03  3.16995E-04 -3.96694E-04
  6.500  1.97649E-02  8.65636E-03  2.68556E-03  5.10450E-04 -6.65751E-05  2.64725E-02  9.79943E-03  3.38405E-03  3.77084E-04 -3.68033E-04
  6.600  1.73597E-02  8.18044E-03  2.66485E-03  5.44133E-04 -4.73840E-05  2.34231E-02  9.42131E-03  3.39759E-03  4.30802E-04 -3.34898E-04
  6.700  1.51406E-02  7.64575E-03  2.60796E-03  5.67515E-04 -2.87884E-05  2.05889E-02  8.95114E-03  3.36280E-03  4.76147E-04 -2.98892E-04
  6.800  1.31138E-02  7.06953E-03  2.51861E-03  5.80445E-04 -1.13186E-05  1.79810E-02  8.40772E-03  3.28334E-03  5.11670E-04 -2.61527E-04
  6.900  1.12808E-02  6.46852E-03  2.40139E-03  5.83174E-04  4.57727E-06  1.56045E-02  7.81052E-03  3.16426E-03  5.36509E-04 -2.24166E-04
  7.000  9.63881E-03  5.85832E-03  2.26147E-03  5.76318E-04  1.85501E-05  1.34590E-02  7.17868E-03  3.01159E-03  5.50374E-04 -1.87984E-04
  7.100  8.18152E-03  5.25292E-03  2.10429E-03  5.60795E-04  3.03593E-05  1.15394E-02  6.53028E-03  2.83202E-03  5.53506E-04 -1.53937E-04
  7.200  6.89977E-03  4.66431E-03  1.93533E-03  5.37759E-04  3.98746E-05  9.83683E-03  5.88161E-03  2.63248E-03  5.46604E-04 -1.22748E-04
  7.300  5.78223E-03  4.10238E-03  1.75983E-03  5.08524E-04  4.70723E-05  8.33923E-03  5.24681E-03  2.41981E-03  5.30732E-04 -9.49102E-05
  7.400  4.81611E-03  3.57473E-03  1.58262E-03  4.74489E-04  5.20243E-05  7.03248E-03  4.63751E-03  2.20048E-03  5.07221E-04 -7.06985E-05
  7.500  3.98771E-03  3.08683E-03  1.40796E-03  4.37061E-04  5.48833E-05  5.90096E-03  4.06281E-03  1.98034E-03  4.77565E-04 -5.01935E-05
  7.600  3.28303E-03  2.64208E-03  1.23942E-03  3.97598E-04  5.58658E-05  4.92834E-03  3.52928E-03  1.76444E-03  4.43319E-04 -3.33111E-05
  7.700  2.68815E-03  2.24208E-03  1.07986E-03  3.57349E-04  5.52322E-05  4.09812E-03  3.04113E-03  1.55699E-03  4.06014E-04 -1.98362E-05
  7.800  2.18967E-03  1.88688E-03  9.31425E-04  3.17417E-04  5.32684E-05  3.39412E-03  2.60050E-03  1.36124E-03  3.67084E-04 -9.45785E-06
  7.900  1.77491E-03  1.57521E-03  7.95537E-04  2.78734E-04  5.02680E-05  2.80086E-03  2.20770E-03  1.17958E-03  3.27812E-04 -1.80282E-06
  8.000  1.43213E-03  1.30487E-03  6.72997E-04  2.42044E-04  4.65165E-05  2.30382E-03  1.86162E-03  1.01353E-03  2.89291E-04  3.53331E-06
  8.100  1.15067E-03  1.07292E-03  5.64049E-04  2.07903E-04  4.22795E-05  1.88966E-03  1.56001E-03  8.63848E-04  2.52403E-04  6.95986E-06
  8.200  9.20959E-04  8.75967E-04  4.68474E-04  1.76686E-04  3.77928E-05  1.54628E-03  1.29979E-03  7.30677E-04  2.17820E-04  8.86981E-06
  8.300  7.34568E-04  7.10378E-04  3.85694E-04  1.48605E-04  3.32569E-05  1.26285E-03  1.07741E-03  6.13617E-04  1.86006E-04  9.62400E-06
  8.400  5.84138E-04  5.72466E-04  3.14858E-04  1.23727E-04  2.88339E-05  1.02988E-03  8.89007E-04  5.11874E-04  1.57241E-04  9.54070E-06
  8.500  4.63339E-04  4.58628E-04  2.54942E-04  1.02004E-04  2.46475E-05  8.39044E-04  7.30674E-04  4.24367E-04  1.31641E-04  8.88999E-06
  8.600  3.66775E-04  3.65453E-04  2.04817E-04  8.32939E-05  2.07848E-05  6.83207E-04  5.98582E-04  3.49836E-04  1.09189E-04  7.89225E-06
  8.700  2.89904E-04  2.89795E-04  1.63323E-04  6.73876E-05  1.73002E-05  5.56266E-04  4.89107E-04  2.86926E-04  8.97660E-05  6.71985E-06
  8.800  2.28931E-04  2.28817E-04  1.29316E-04  5.40323E-05  1.42199E-05  4.53063E-04  3.98907E-04  2.34265E-04  7.31746E-05  5.50127E-06
  8.900  1.80720E-04  1.80008E-04  1.01708E-04  4.29511E-05  1.15474E-05  3.69273E-04  3.24966E-04  1.90516E-04  5.91698E-05  4.32666E-06
  9.000  1.42697E-04  1.41187E-04  7.94971E-05  3.38602E-05  9.26830E-06  3.01297E-04  2.64613E-04  1.54420E-04  4.74790E-05  3.25420E-06
  9.100  1.12767E-04  1.10486E-04  6.17784E-05  2.64820E-05  7.35594E-06  2.46163E-04  2.15522E-04  1.24820E-04  3.78207E-05  2.31654E-06
  9.200  8.92398E-05  8.63313E-05  4.77555E-05  2.05547E-05  5.77549E-06  2.01427E-04  1.75696E-04  1.00679E-04  2.99186E-05  1.52702E-06
  9.300  7.07565E-05  6.74108E-05  3.67398E-05  1.58386E-05  4.48791E-06  1.65097E-04  1.43444E-04  8.10828E-05  2.35117E-05  8.85093E-07
  9.400  5.62350E-05  5.26454E-05  2.81458E-05  1.21202E-05  3.45297E-06  1.35553E-04  1.17347E-04  6.52401E-05  1.83609E-05  3.81054E-07
  9.500  4.48169E-05  4.11567E-05  2.14839E-05  9.21319E-06  2.63157E-06  1.11483E-04  9.62325E-05  5.24747E-05  1.42527E-05 -2.15887E-10
  9.600  3.58253E-05  3.22369E-05  1.63498E-05  6.95862E-06  1.98732E-06  9.18321E-05  7.91332E-05  4.22164E-05  1.10004E-05 -2.76373E-07
  9.700  2.87290E-05  2.53204E-05  1.24143E-05  5.22297E-06  1.48753E-06  7.57498E-05  6.52625E-05  3.39896E-05  8.44402E-06 -4.65531E-07
  9.800  2.31123E-05  1.99592E-05  9.41225E-06  3.89609E-06  1.10373E-06  6.25549E-05  5.39833E-05  2.74013E-05  6.44830E-06 -5.84888E-07
  9.900  1.86516E-05  1.58010E-05  7.13227E-06  2.88834E-06  8.11699E-07  5.17010E-05  4.47825E-05  2.21293E-05  4.90067E-06 -6.49902E-07
 10.000  1.50954E-05  1.25705E-05  5.40745E-06  2.12781E-06  5.91372E-07  4.27506E-05  3.72493E-05  1.79113E-05  3.70850E-06 -6.73895E-07
 10.100  1.22485E-05  1.00538E-05  4.10704E-06  1.55739E-06  4.26414E-07  3.53527E-05  3.10563E-05  1.45351E-05  2.79630E-06 -6.67964E-07
 10.200  9.95972E-06  8.08575E-06  3.12937E-06  1.13226E-06  3.03791E-07  2.92259E-05  2.59427E-05  1.18296E-05  2.10313E-06 -6.41084E-07
 10.300  8.11193E-06  6.53924E-06  2.39590E-06  8.17498E-07  2.13267E-07  2.41433E-05  2.17019E-05  9.65784E-06  1.58012E-06 -6.00333E-07
 10.400  6.61422E-06  5.31690E-06  1.84630E-06  5.86129E-07  1.46917E-07  1.99219E-05  1.81699E-05  7.91025E-06  1.18839E-06 -5.51160E-07
 10.500  5.39589E-06  4.34440E-06  1.43449E-06  4.17413E-07  9.86742E-08  1.64132E-05  1.52166E-05  6.49967E-06  8.97127E-07 -4.97670E-07
 10.600  4.40178E-06  3.56512E-06  1.12547E-06  2.95495E-07  6.39402E-08  1.34964E-05  1.27388E-05  5.35692E-06  6.82118E-07 -4.42886E-07
 10.700  3.58863E-06  2.93602E-06  8.92776E-07  2.08302E-07  3.92489E-08  1.10724E-05  1.06542E-05  4.42726E-06  5.24416E-07 -3.88979E-07
 10.800  2.92232E-06  2.42440E-06  7.16537E-07  1.46674E-07  2.19982E-08  9.05975E-06  8.89674E-06  3.66747E-06  4.09318E-07 -3.37463E-07
 10.900  2.37577E-06  2.00542E-06  5.81910E-07  1.03690E-07  1.02360E-08  7.39089E-06  7.41337E-06  3.04355E-06  3.25503E-07 -2.89340E-07
 11.000  1.92730E-06  1.66016E-06  4.77890E-07  7.41438E-08  2.49573E-09  6.00973E-06  6.16089E-06  2.52872E-06  2.64343E-07 -2.45232E-07
 11.100  1.55948E-06  1.37413E-06  3.96381E-07  5.41448E-08 -2.32654E-09  4.86935E-06  5.10388E-06  2.10200E-06  2.19347E-07 -2.05467E-07
 11.200  1.25811E-06  1.13620E-06  3.31477E-07  4.08086E-08 -5.06394E-09  3.93040E-06  4.21303E-06  1.74685E-06  1.85698E-07 -1.70151E-07
 11.300  1.01162E-06  9.37716E-07  2.78908E-07  3.20203E-08 -6.34541E-09  3.15975E-06  3.46378E-06  1.45029E-06  1.59892E-07 -1.39229E-07
 11.400  8.10471E-07  7.71890E-07  2.35610E-07  2.62519E-08 -6.64441E-09  2.52947E-06  2.83540E-06  1.20202E-06  1.39434E-07 -1.12521E-07
 11.500  6.46785E-07  6.33312E-07  1.99407E-07  2.24205E-08 -6.31461E-09  2.01600E-06  2.31019E-06  9.93863E-07  1.22591E-07 -8.97614E-08
 11.600  5.14017E-07  5.17613E-07  1.68756E-07  1.97776E-08 -5.61650E-09  1.59941E-06  1.87299E-06  8.19261E-07  1.08206E-07 -7.06264E-08
 11.700  4.06723E-07  4.21213E-07  1.42565E-07  1.78225E-08 -4.73765E-09  1.26292E-06  1.51069E-06  6.72888E-07  9.55311E-08 -5.47572E-08
 11.800  3.20362E-07  3.41130E-07  1.20055E-07  1.62351E-08 -3.80863E-09  9.92386E-07  1.21192E-06  5.50376E-07  8.41124E-08 -4.17795E-08
 11.900  2.51150E-07  2.74857E-07  1.00658E-07  1.48239E-08 -2.91577E-09  7.75936E-07  9.66862E-07  4.48096E-07  7.36919E-08 -3.13192E-08
 12.000  1.95936E-07  2.20257E-07  8.39476E-08  1.34853E-08 -2.11164E-09  6.03623E-07  7.66975E-07  3.62996E-07  6.41375E-08 -2.30147E-08
 12.100  1.52101E-07  1.75503E-07  6.95900E-08  1.21739E-08 -1.42369E-09  4.67156E-07  6.04884E-07  2.92485E-07  5.53905E-08 -1.65264E-08
 12.200  1.17473E-07  1.39023E-07  5.73086E-08  1.08796E-08 -8.61270E-10  3.59651E-07  4.74239E-07  2.34342E-07  4.74303E-08 -1.15436E-08
 12.300  9.02591E-08  1.09462E-07  4.68650E-08  9.61237E-09 -4.21431E-10  2.75418E-07  3.69591E-07  1.86654E-07  4.02493E-08 -7.78787E-09
 12.400  6.89858E-08  8.56569E-08  3.80455E-08  8.39058E-09 -9.34415E-11  2.09783E-07  2.86297E-07  1.47767E-07  3.38393E-08 -5.01550E-09
 12.500  5.24461E-08  6.66106E-08  3.06545E-08  7.23442E-09  1.37711E-10  1.58926E-07  2.20428E-07  1.16253E-07  2.81827E-08 -3.01727E-09
 12.600  3.96576E-08  5.14725E-08  2.45111E-08  6.16148E-09  2.88740E-10  1.19741E-07  1.68676E-07  9.08783E-08  2.32503E-08 -1.61720E-09
 12.700  2.98247E-08  3.95217E-08  1.94481E-08  5.18470E-09  3.76259E-10  8.97231E-08  1.28282E-07  7.05840E-08  1.90008E-08 -6.70100E-10
 12.800  2.23073E-08  3.01516E-08  1.53116E-08  4.31166E-09  4.15613E-10  6.68593E-08  9.69620E-08  5.44641E-08  1.53835E-08 -5.85121E-11
 12.900  1.65929E-08  2.28555E-08  1.19618E-08  3.54477E-09  4.20213E-10  4.95457E-08  7.28375E-08  4.17495E-08  1.23402E-08  3.10685E-10
 13.000  1.22740E-08  1.72137E-08  9.27277E-09  2.88208E-09  4.01247E-10  3.65113E-08  5.43785E-08  3.17917E-08  9.80933E-09  5.09826E-10
 13.100  9.02891E-09  1.28814E-08  7.13316E-09  2.31817E-09  3.67653E-10  2.67560E-08  4.03478E-08  2.40487E-08  7.72799E-09  5.93880E-10
 13.200  6.60475E-09  9.57768E-09  5.44550E-09  1.84523E-09  3.26275E-10  1.94976E-08  2.97536E-08  1.80710E-08  6.03493E-09  6.03646E-10
 13.300  4.80445E-09  7.07578E-09  4.12578E-09  1.45399E-09  2.82108E-10  1.41287E-08  2.18068E-08  1.34892E-08  4.67223E-09  5.68614E-10
 13.400  3.47530E-09  5.19415E-09  3.10255E-09  1.13450E-09  2.38607E-10  1.01809E-08  1.58849E-08  1.00025E-08  3.58666E-09  5.09460E-10
 13.500  2.49977E-09  3.78872E-09  2.31584E-09  8.76814E-10  1.97988E-10  7.29503E-09  1.15007E-08  7.36826E-09  2.73046E-09  4.40145E-10
 13.600  1.78799E-09  2.74613E-09  1.71598E-09  6.71398E-10  1.61513E-10  5.19792E-09  8.27611E-09  5.39213E-09  2.06170E-09  3.69648E-10
 13.700  1.27170E-09  1.97795E-09  1.26231E-09  5.09485E-10  1.29748E-10  3.68292E-09  5.91967E-09  3.92023E-09  1.54427E-09  3.03350E-10
 13.800  8.99419E-10  1.41575E-09  9.21940E-10  3.83230E-10  1.02774E-10  2.59490E-09  4.20874E-09  2.83159E-09  1.14758E-09  2.44120E-10
 13.900  6.32552E-10  1.00706E-09  6.68591E-10  2.85797E-10  8.03538E-11  1.81808E-09  2.97440E-09  2.03206E-09  8.46195E-10  1.93137E-10
 14.000  4.42374E-10  7.11929E-10  4.81475E-10  2.11355E-10  6.20636E-11  1.26671E-09  2.08956E-09  1.44892E-09  6.19205E-10  1.50504E-10
 14.100  3.07641E-10  5.00201E-10  3.44333E-10  1.55026E-10  4.73898E-11  8.77638E-10  1.45924E-09  1.02653E-09  4.49706E-10  1.15684E-10
 14.200  2.12748E-10  3.49298E-10  2.44572E-10  1.12800E-10  3.57940E-11  6.04689E-10  1.01306E-09  7.22672E-10  3.24193E-10  8.78067E-11
 14.300  1.46304E-10  2.42443E-10  1.72542E-10  8.14318E-11  2.67568E-11  4.14318E-10  6.99172E-10  5.05552E-10  2.32010E-10  6.58728E-11
 14.400  1.00051E-10  1.67263E-10  1.20912E-10  5.83348E-11  1.98040E-11  2.82309E-10  4.79725E-10  3.51453E-10  1.64848E-10  4.88795E-11
 14.500  6.80406E-11  1.14705E-10  8.41719E-11  4.14736E-11  1.45188E-11  1.91299E-10  3.27244E-10  2.42808E-10  1.16300E-10  3.58965E-11
 14.600  4.60149E-11  7.81943E-11  5.82124E-11  2.92673E-11  1.05467E-11  1.28915E-10  2.21940E-10  1.66714E-10  8.14765E-11  2.61039E-11
 14.700  3.09471E-11  5.29900E-11  3.99985E-11  2.05029E-11  7.59347E-12  8.63976E-11  1.49657E-10  1.13766E-10  5.66871E-11  1.88051E-11
 14.800  2.06984E-11  3.56988E-11  2.73075E-11  1.42600E-11  5.42026E-12  5.75860E-11  1.00338E-10  7.71623E-11  3.91716E-11  1.34253E-11
 14.900  1.37676E-11  2.39095E-11  1.85249E-11  9.84798E-12  3.83673E-12  3.81728E-11  6.68897E-11  5.20194E-11  2.68862E-11  9.50150E-12
 15.000  9.10733E-12  1.59206E-11  1.24879E-11  6.75366E-12  2.69375E-12  2.51664E-11  4.43391E-11  3.48588E-11  1.83313E-11  6.66812E-12
 15.100  5.99156E-12  1.05399E-11  8.36593E-12  4.59981E-12  1.87627E-12  1.65016E-11  2.92254E-11  2.32200E-11  1.24165E-11  4.64160E-12
 15.200  3.92025E-12  6.93770E-12  5.56992E-12  3.11165E-12  1.29674E-12  1.07616E-11  1.91555E-11  1.53757E-11  8.35547E-12  3.20539E-12
 15.300  2.55104E-12  4.54056E-12  3.68570E-12  2.09088E-12  8.89414E-13  6.98037E-12  1.24853E-11  1.01215E-11  5.58656E-12  2.19650E-12
 15.400  1.65105E-12  2.95484E-12  2.42410E-12  1.39570E-12  6.05497E-13  4.50339E-12  8.09256E-12  6.62384E-12  3.71147E-12  1.49381E-12
 15.500  1.06280E-12  1.91207E-12  1.58474E-12  9.25575E-13  4.09203E-13  2.88980E-12  5.21636E-12  4.30969E-12  2.45022E-12  1.00843E-12
 15.600  6.80444E-13  1.23035E-12  1.02984E-12  6.09850E-13  2.74563E-13  1.84447E-12  3.34391E-12  2.78784E-12  1.60748E-12  6.75844E-13
 15.700  4.33307E-13  7.87269E-13  6.65278E-13  3.99261E-13  1.82925E-13  1.17100E-12  2.13186E-12  1.79305E-12  1.04808E-12  4.49735E-13
 15.800  2.74453E-13  5.00958E-13  4.27245E-13  2.59743E-13  1.21026E-13  7.39490E-13  1.35173E-12  1.14666E-12  6.79162E-13  2.97187E-13
 15.900  1.72908E-13  3.17011E-13  2.72780E-13  1.67923E-13  7.95259E-14  4.64520E-13  8.52427E-13  7.29131E-13  4.37430E-13  1.95037E-13
 16.000  1.08355E-13  1.99506E-13  1.73151E-13  1.07890E-13  5.19042E-14  2.90256E-13  5.34655E-13  4.61025E-13  2.80041E-13  1.27135E-13
 16.100  6.75415E-14  1.24869E-13  1.09278E-13  6.88951E-14  3.36513E-14  1.80414E-13  3.33541E-13  2.89869E-13  1.78210E-13  8.23221E-14
 16.200  4.18785E-14  7.77291E-14  6.85735E-14  4.37272E-14  2.16742E-14  1.11553E-13  2.06963E-13  1.81240E-13  1.12736E-13  5.29554E-14
 16.300  2.58297E-14  4.81232E-14  4.27866E-14  2.75864E-14  1.38695E-14  6.86145E-14  1.27736E-13  1.12691E-13  7.08977E-14  3.38442E-14
 16.400  1.58474E-14  2.96332E-14  2.65463E-14  1.72999E-14  8.81845E-15  4.19842E-14  7.84192E-14  6.96831E-14  4.43262E-14  2.14918E-14
 16.500  9.67209E-15  1.81495E-14  1.63781E-14  1.07849E-14  5.57141E-15  2.55562E-14  4.78882E-14  4.28525E-14  2.75527E-14  1.35616E-14
 16.600  5.87232E-15  1.10566E-14  1.00484E-14  6.68394E-15  3.49793E-15  1.54759E-14  2.90897E-14  2.62088E-14  1.70280E-14  8.50410E-15
 16.700  3.54678E-15  6.69987E-15  6.13081E-15  4.11827E-15  2.18252E-15  9.32330E-15  1.75778E-14  1.59425E-14  1.04634E-14  5.29973E-15
 16.800  2.13108E-15  4.03833E-15  3.72001E-15  2.52279E-15  1.35342E-15  5.58786E-15  1.05661E-14  9.64516E-15  6.39308E-15  3.28258E-15
 16.900  1.27384E-15  2.42126E-15  2.24485E-15  1.53657E-15  8.34181E-16  3.33189E-15  6.31824E-15  5.80393E-15  3.88411E-15  2.02087E-15
 17.000  7.57510E-16  1.44408E-15  1.34728E-15  9.30551E-16  5.11053E-16  1.97657E-15  3.75852E-15  3.47379E-15  2.34656E-15  1.23665E-15
 17.100  4.48151E-16  8.56767E-16  8.04218E-16  5.60358E-16  3.11224E-16  1.16658E-15  2.22426E-15  2.06807E-15  1.40976E-15  7.52259E-16
 17.200  2.63773E-16  5.05666E-16  4.77466E-16  3.35540E-16  1.88409E-16  6.85024E-16  1.30952E-15  1.22466E-15  8.42260E-16  4.54903E-16
 17.300  1.54458E-16  2.96896E-16  2.81953E-16  1.99798E-16  1.13390E-16  4.00214E-16  7.67011E-16  7.21384E-16  5.00437E-16  2.73479E-16
 17.400  8.99864E-17  1.73417E-16  1.65611E-16  1.18310E-16  6.78445E-17  2.32637E-16  4.46953E-16  4.22695E-16  2.95711E-16  1.63457E-16
 17.500  5.21594E-17  1.00770E-16  9.67586E-17  6.96710E-17  4.03587E-17  1.34547E-16  2.59120E-16  2.46381E-16  1.73786E-16  9.71352E-17
 17.600  3.00804E-17  5.82556E-17  5.62327E-17  4.08031E-17  2.38705E-17  7.74255E-17  1.49461E-16  1.42861E-16  1.01578E-16  5.73932E-17
 17.700  1.72599E-17  3.35054E-17  3.25085E-17  2.37662E-17  1.40381E-17  4.43315E-17  8.57721E-17  8.24062E-17  5.90528E-17  3.37190E-17
 17.800  9.85371E-18  1.91721E-17  1.86950E-17  1.37678E-17  8.20899E-18  2.52561E-17  4.89739E-17  4.72881E-17  3.41464E-17  1.96985E-17
 17.900  5.59728E-18  1.09147E-17  1.06950E-17  7.93272E-18  4.77338E-18  1.43170E-17  2.78221E-17  2.69959E-17  1.96392E-17  1.14434E-17
 18.000  3.16356E-18  6.18222E-18  6.08661E-18  4.54613E-18  2.76014E-18  8.07559E-18  1.57264E-17  1.53323E-17  1.12355E-17  6.61084E-18
 18.100  1.77910E-18  3.48401E-18  3.44602E-18  2.59142E-18  1.58716E-18  4.53252E-18  8.84481E-18  8.66339E-18  6.39373E-18  3.79796E-18
 18.200  9.95538E-19  1.95353E-18  1.94096E-18  1.46933E-18  9.07635E-19  2.53135E-18  4.94964E-18  4.87021E-18  3.61931E-18  2.16996E-18
 18.300  5.54311E-19  1.08988E-18  1.08763E-18  8.28702E-19  5.16196E-19  1.40676E-18  2.75608E-18  2.72392E-18  2.03805E-18  1.23303E-18
 18.400  3.07109E-19  6.04998E-19  6.06342E-19  4.64928E-19  2.91974E-19  7.77938E-19  1.52703E-18  1.51577E-18  1.14165E-18  6.96837E-19
 18.500  1.69310E-19  3.34163E-19  3.36307E-19  2.59473E-19  1.64253E-19  4.28090E-19  8.41875E-19  8.39222E-19  6.36189E-19  3.91684E-19
 18.600  9.28807E-20  1.83652E-19  1.85586E-19  1.44054E-19  9.19044E-20  2.34420E-19  4.61847E-19  4.62304E-19  3.52684E-19  2.18978E-19
 18.700  5.07025E-20  1.00432E-19  1.01894E-19  7.95609E-20  5.11474E-20  1.27740E-19  2.52119E-19  2.53393E-19  1.94510E-19  1.21769E-19
 18.800  2.75422E-20  5.46508E-20  5.56622E-20  4.37140E-20  2.83131E-20  6.92692E-20  1.36953E-19  1.38192E-19  1.06724E-19  6.73533E-20
 18.900  1.48881E-20  2.95918E-20  3.02540E-20  2.38945E-20  1.55898E-20  3.73798E-20  7.40301E-20  7.49899E-20  5.82575E-20  3.70574E-20
 19.000  8.00854E-21  1.59442E-20  1.63616E-20  1.29940E-20  8.53867E-21  2.00735E-20  3.98213E-20  4.04909E-20  3.16391E-20  2.02813E-20
 19.100  4.28696E-21  8.54867E-21  8.80425E-21  7.03005E-21  4.65212E-21  1.07276E-20  2.13157E-20  2.17547E-20  1.70956E-20  1.10416E-20
 19.200  2.28365E-21  4.56102E-21  4.71404E-21  3.78407E-21  2.52134E-21  5.70530E-21  1.13545E-20  1.16305E-20  9.19055E-21  5.97995E-21
 19.300  1.21060E-21  2.42159E-21  2.51150E-21  2.02651E-21  1.35939E-21  3.01967E-21  6.01898E-21  6.18723E-21  4.91589E-21  3.22179E-21
 19.400  6.38657E-22  1.27943E-21  1.33143E-21  1.07979E-21  7.29110E-22  1.59055E-21  3.17520E-21  3.27533E-21  2.61622E-21  1.72680E-21
 19.500  3.35300E-22  6.72695E-22  7.02356E-22  5.72447E-22  3.89039E-22  8.33767E-22  1.66692E-21  1.72536E-21  1.38537E-21  9.20754E-22
 19.600  1.75188E-22  3.51973E-22  3.68683E-22  3.01957E-22  2.06515E-22  4.34970E-22  8.70890E-22  9.04433E-22  7.29930E-22  4.88436E-22
 19.700  9.10923E-23  1.83272E-22  1.92581E-22  1.58480E-22  1.09063E-22  2.25836E-22  4.52811E-22  4.71791E-22  3.82674E-22  2.57777E-22
 19.800  4.71382E-23  9.49685E-23  1.00102E-22  8.27626E-23  5.73030E-23  1.16695E-22  2.34305E-22  2.44909E-22  1.99626E-22  1.35351E-22
 19.900  2.42762E-23  4.89743E-23  5.17787E-23  4.30059E-23  2.99545E-23  6.00121E-23  1.20660E-22  1.26517E-22  1.03621E-22  7.07082E-23
  67 155 200   0.100
  0.000  5.75823E-02 -3.18075E-16 -4.37150E-16 -2.50185E-16 -1.90255E-15  1.04927E-01 -5.43054E-16 -7.70217E-16 -8.00593E-16 -1.08717E-15
  0.100  5.76487E-02 -4.93007E-05 -1.44398E-08  9.65528E-13 -1.25883E-15  1.04781E-01  5.99322E-05 -9.37981E-09 -7.91464E-12  2.71793E-16
  0.200  5.78462E-02 -1.94349E-04 -2.27719E-07  6.25142E-11 -8.18669E-14  1.04350E-01  2.35612E-04 -1.48948E-07 -5.03660E-10  4.47042E-13
  0.300  5.81690E-02 -4.26744E-04 -1.12532E-06  7.24375E-10 -2.06610E-12  1.03650E-01  5.14971E-04 -7.44532E-07 -5.68431E-09  1.13855E-11
  0.400  5.86079E-02 -7.33017E-04 -3.43804E-06  4.16063E-09 -2.01253E-11  1.02712E-01  8.78828E-04 -2.31102E-06 -3.15252E-08  1.12319E-10
  0.500  5.91506E-02 -1.09539E-03 -8.03459E-06  1.62778E-08 -1.16131E-10  1.01571E-01  1.30221E-03 -5.51042E-06 -1.18244E-07  6.58677E-10
  0.600  5.97817E-02 -1.49278E-03 -1.57900E-05  4.99232E-08 -4.79831E-10  1.00275E-01  1.75604E-03 -1.10940E-05 -3.45769E-07  2.77658E-09
  0.700  6.04839E-02 -1.90197E-03 -2.74459E-05  1.29263E-07 -1.57053E-09  9.88725E-02  2.20916E-03 -1.98301E-05 -8.50324E-07  9.31002E-09
  0.800  6.12382E-02 -2.29890E-03 -4.34795E-05  2.95171E-07 -4.32488E-09  9.74163E-02  2.63036E-03 -3.24206E-05 -1.83983E-06  2.63782E-08
  0.900  6.20248E-02 -2.66000E-03 -6.39968E-05  6.11160E-07 -1.04158E-08  9.59591E-02  2.99050E-03 -4.94101E-05 -3.60561E-06  6.56646E-08
  1.000  6.28236E-02 -2.96342E-03 -8.86628E-05  1.16906E-06 -2.25236E-08  9.45508E-02  3.26436E-03 -7.10940E-05 -6.52780E-06  1.47495E-07
  1.100  6.36148E-02 -3.19023E-03 -1.16677E-04  2.09339E-06 -4.45569E-08  9.32364E-02  3.43228E-03 -9.74325E-05 -1.10720E-05  3.04673E-07
  1.200  6.43801E-02 -3.32533E-03 -1.46796E-04  3.54312E-06 -8.17419E-08  9.20541E-02  3.48134E-03 -1.27979E-04 -1.77755E-05  5.86933E-07
  1.300  6.51024E-02 -3.35826E-03 -1.77403E-04  5.70977E-06 -1.40495E-07  9.10339E-02  3.40613E-03 -1.61829E-04 -2.72214E-05  1.06576E-06
  1.400  6.57672E-02 -3.28358E-03 -2.06613E-04  8.81077E-06 -2.28001E-07  9.01964E-02  3.20897E-03 -1.97602E-04 -4.00008E-05  1.83921E-06
  1.500  6.63622E-02 -3.10114E-03 -2.32408E-04  1.30776E-05 -3.51446E-07  8.95523E-02  2.89968E-03 -2.33455E-04 -5.66644E-05  3.03621E-06
  1.600  6.68781E-02 -2.81591E-03 -2.52779E-04  1.87391E-05 -5.16913E-07  8.91026E-02  2.49484E-03 -2.67133E-04 -7.76648E-05  4.81989E-06
  1.700  6.73085E-02 -2.43765E-03 -2.65874E-04  2.60001E-05 -7.27985E-07  8.88390E-02  2.01665E-03 -2.96064E-04 -1.03294E-04  7.38911E-06
  1.800  6.76500E-02 -1.98032E-03 -2.70127E-04  3.50183E-05 -9.84198E-07  8.87446E-02  1.49151E-03 -3.17476E-04 -1.33622E-04  1.09777E-05
  1.900  6.79022E-02 -1.46124E-03 -2.64366E-04  4.58797E-05 -1.27953E-06  8.87957E-02  9.48310E-04 -3.28556E-04 -1.68436E-04  1.58511E-05
  2.000  6.80674E-02 -9.00247E-04 -2.47887E-04  5.85767E-05 -1.60116E-06  8.89630E-02  4.16629E-04 -3.26619E-04 -2.07196E-04  2.22989E-05
  2.100  6.81505E-02 -3.18650E-04 -2.20492E-04  7.29907E-05 -1.92878E-06  8.92136E-02 -7.50623E-05 -3.09284E-04 -2.49006E-04  3.06245E-05
  2.200  6.81587E-02  2.61783E-04 -1.82502E-04  8.88819E-05 -2.23465E-06  8.95129E-02 -5.01118E-04 -2.74649E-04 -2.92602E-04  4.11308E-05
  2.300  6.81011E-02  8.19807E-04 -1.34731E-04  1.05887E-04 -2.48471E-06  8.98262E-02 -8.40220E-04 -2.21452E-04 -3.36377E-04  5.41025E-05
  2.400  6.79885E-02  1.33562E-03 -7.84426E-05  1.23531E-04 -2.64066E-06  9.01212E-02 -1.07660E-03 -1.49206E-04 -3.78419E-04  6.97853E-05
  2.500  6.78327E-02  1.79169E-03 -1.52940E-05  1.41239E-04 -2.66322E-06  9.03689E-02 -1.20092E-03 -5.82937E-05 -4.16591E-04  8.83642E-05
  2.600  6.76463E-02  2.17338E-03  5.27346E-05  1.58371E-04 -2.51622E-06  9.05454E-02 -1.21069E-03  4.99703E-05 -4.48635E-04  1.09941E-04
  2.700  6.74422E-02  2.46952E-03  1.23406E-04  1.74254E-04 -2.17129E-06  9.06328E-02 -1.11034E-03  1.73323E-04 -4.72289E-04  1.34511E-04
  2.800  6.72333E-02  2.67279E-03  1.94294E-04  1.88218E-04 -1.61286E-06  9.06198E-02 -9.10778E-04  3.08587E-04 -4.85434E-04  1.61948E-04
  2.900  6.70318E-02  2.77985E-03  2.62844E-04  1.99639E-04 -8.42883E-07  9.05019E-02 -6.28567E-04  4.51741E-04 -4.86236E-04  1.91985E-04
  3.000  6.68487E-02  2.79150E-03  3.26435E-04  2.07974E-04  1.15144E-07  9.02813E-02 -2.84726E-04  5.98048E-04 -4.73295E-04  2.24207E-04
  3.100  6.66936E-02  2.71258E-03  3.82444E-04  2.12790E-04  1.21319E-06  8.99660E-02  9.67733E-05  7.42211E-04 -4.45777E-04  2.58051E-04
  3.200  6.65739E-02  2.55175E-03  4.28317E-04  2.13784E-04  2.37715E-06  8.95689E-02  4.90715E-04  8.78580E-04 -4.03522E-04  2.92806E-04
  3.300  6.64943E-02  2.32123E-03  4.61645E-04  2.10796E-04  3.50675E-06  8.91063E-02  8.72451E-04  1.00139E-03 -3.47124E-04  3.27630E-04
  3.400  6.64567E-02  2.03634E-03  4.80270E-04  2.03803E-04  4.47718E-06  8.85964E-02  1.21969E-03  1.10500E-03 -2.77962E-04  3.61569E-04
  3.500  6.64592E-02  1.71503E-03  4.82397E-04  1.92906E-04  5.14199E-06  8.80572E-02  1.51415E-03  1.18424E-03 -1.98192E-04  3.93582E-04
  3.600  6.64962E-02  1.37726E-03  4.66726E-04  1.78316E-04  5.33731E-06  8.75051E-02  1.74295E-03  1.23465E-03 -1.10682E-04  4.22574E-04
  3.700  6.65582E-02  1.04435E-03  4.32596E-04  1.60317E-04  4.88701E-06  8.69526E-02  1.89961E-03  1.25281E-03 -1.88987E-05  4.47432E-04
  3.800  6.66313E-02  7.38186E-04  3.80128E-04  1.39251E-04  3.60856E-06  8.64077E-02  1.98465E-03  1.23660E-03  7.32529E-05  4.67066E-04
  3.900  6.66978E-02  4.80443E-04  3.10353E-04  1.15488E-04  1.31946E-06  8.58718E-02  2.00564E-03  1.18547E-03  1.61629E-04  4.80448E-04
  4.000  6.67366E-02  2.91734E-04  2.25318E-04  8.94100E-05 -2.15586E-06  8.53397E-02  1.97670E-03  1.10065E-03  2.42077E-04  4.86653E-04
  4.100  6.67232E-02  1.90742E-04  1.28138E-04  6.14112E-05 -6.97857E-06  8.47991E-02  1.91761E-03  9.85191E-04  3.10680E-04  4.84902E-04
  4.200  6.66309E-02  1.93379E-04  2.29921E-05  3.18979E-05 -1.32874E-05  8.42309E-02  1.85233E-03  8.44073E-04  3.63997E-04  4.74593E-04
  4.300  6.64318E-02  3.11997E-04 -8.49550E-05  1.30704E-06 -2.11901E-05  8.36100E-02  1.80731E-03  6.84049E-04  3.99295E-04  4.55341E-04
  4.400  6.60974E-02  5.54709E-04 -1.89715E-04 -2.98704E-05 -3.07537E-05  8.29069E-02  1.80947E-03  5.13455E-04  4.14736E-04  4.27002E-04
  4.500  6.56006E-02  9.24838E-04 -2.84717E-04 -6.10617E-05 -4.19951E-05  8.20888E-02  1.88420E-03  3.41870E-04  4.09522E-04  3.89699E-04
  4.600  6.49162E-02  1.42056E-03 -3.63124E-04 -9.15873E-05 -5.48707E-05  8.11223E-02  2.05336E-03  1.79667E-04  3.83976E-04  3.43831E-04
  4.700  6.40227E-02  2.03478E-03 -4.18208E-04 -1.20643E-04 -6.92678E-05  7.99744E-02  2.33361E-03  3.74738E-05  3.39552E-04  2.90086E-04
  4.800  6.29030E-02  2.75521E-03 -4.43756E-04 -1.47294E-04 -8.49968E-05  7.86155E-02  2.73500E-03 -7.44320E-05  2.78772E-04  2.29427E-04
  4.900  6.15457E-02  3.56477E-03 -4.34493E-04 -1.70494E-04 -1.01786E-04  7.70207E-02  3.26006E-03 -1.46743E-04  2.05093E-04  1.63083E-04
  5.000  5.99454E-02  4.44218E-03 -3.86468E-04 -1.89110E-04 -1.19284E-04  7.51720E-02  3.90347E-03 -1.71727E-04  1.22707E-04  9.25131E-05
  5.100  5.81037E-02  5.36279E-03 -2.97385E-04 -2.01985E-04 -1.37058E-04  7.30585E-02  4.65220E-03 -1.43761E-04  3.62941E-05  1.93688E-05
  5.200  5.60289E-02  6.29964E-03 -1.66855E-04 -2.08003E-04 -1.54610E-04  7.06786E-02  5.48625E-03 -5.97545E-05 -4.92652E-05 -5.45620E-05
  5.300  5.37359E-02  7.22462E-03  3.47686E-06 -2.06174E-04 -1.71394E-04  6.80389E-02  6.37977E-03  8.05744E-05 -1.29184E-04 -1.27418E-04
  5.400  5.12459E-02  8.10968E-03  2.09925E-04 -1.95722E-04 -1.86831E-04  6.51552E-02  7.30265E-03  2.74596E-04 -1.99060E-04 -1.97337E-04
  5.500  4.85855E-02  8.92810E-03  4.46887E-04 -1.76167E-04 -2.00346E-04  6.20511E-02  8.22229E-03  5.16852E-04 -2.55138E-04 -2.62528E-04
  5.600  4.57857E-02  9.65561E-03  7.07103E-04 -1.47398E-04 -2.11390E-04  5.87574E-02  9.10548E-03  7.99321E-04 -2.94526E-04 -3.21350E-04
  5.700  4.28807E-02  1.02714E-02  9.82013E-04 -1.09717E-04 -2.19479E-04  5.53106E-02  9.92029E-03  1.11185E-03 -3.15343E-04 -3.72383E-04
  5.800  3.99068E-02  1.07591E-02  1.26221E-03 -6.38658E-05 -2.24221E-04  5.17513E-02  1.06378E-02  1.44274E-03 -3.16806E-04 -4.14484E-04
  5.900  3.69012E-02  1.11071E-02  1.53796E-03 -1.10137E-05 -2.25341E-04  4.81227E-02  1.12335E-02  1.77936E-03 -2.99233E-04 -4.46844E-04
  6.000  3.39003E-02  1.13089E-02  1.79969E-03  4.72848E-05 -2.22706E-04  4.44689E-02  1.16884E-02  2.10889E-03 -2.63978E-04 -4.69010E-04
  6.100  3.09391E-02  1.13635E-02  2.03851E-03  1.09162E-04 -2.16334E-04  4.08331E-02  1.19899E-02  2.41902E-03 -2.13296E-04 -4.80905E-04
  6.200  2.80499E-02  1.12747E-02  2.24666E-03  1.72532E-04 -2.06397E-04  3.72565E-02  1.21318E-02  2.69856E-03 -1.50163E-04 -4.82819E-04
  6.300  2.52613E-02  1.10510E-02  2.41785E-03  2.35209E-04 -1.93217E-04  3.37766E-02  1.21145E-02  2.93802E-03 -7.80520E-05 -4.75379E-04
  6.400  2.25981E-02  1.07047E-02  2.54756E-03  2.95023E-04 -1.77245E-04  3.04267E-02  1.19442E-02  3.13001E-03 -6.97054E-07 -4.59511E-04
  6.500  2.00806E-02  1.02512E-02  2.63313E-03  3.49948E-04 -1.59039E-04  2.72351E-02  1.16325E-02  3.26950E-03  7.81453E-05 -4.36380E-04
  6.600  1.77242E-02  9.70824E-03  2.67380E-03  3.98201E-04 -1.39230E-04  2.42243E-02  1.11951E-02  3.35392E-03  1.54916E-04 -4.07319E-04
  6.700  1.55400E-02  9.09473E-03  2.67066E-03  4.38341E-04 -1.18492E-04  2.14113E-02  1.06510E-02  3.38314E-03  2.26443E-04 -3.73763E-04
  6.800  1.35342E-02  8.43012E-03  2.62640E-03  4.69328E-04 -9.74998E-05  1.88078E-02  1.00212E-02  3.35925E-03  2.90086E-04 -3.37171E-04
  6.900  1.17093E-02  7.73345E-03  2.54507E-03  4.90560E-04 -7.68963E-05  1.64197E-02  9.32744E-03  3.28630E-03  3.43836E-04 -2.98959E-04
  7.000  1.00637E-02  7.02265E-03  2.43179E-03  5.01881E-04 -5.72628E-05  1.42486E-02  8.59132E-03  3.16987E-03  3.86361E-04 -2.60441E-04
  7.100  8.59295E-03  6.31401E-03  2.29236E-03  5.03556E-04 -3.90921E-05  1.22914E-02  7.83339E-03  3.01670E-03  4.17006E-04 -2.22776E-04
  7.200  7.28967E-03  5.62175E-03  2.13296E-03  4.96226E-04 -2.27716E-05  1.05418E-02  7.07240E-03  2.83418E-03  4.35750E-04 -1.86938E-04
  7.300  6.14454E-03  4.95773E-03  1.95978E-03  4.80842E-04 -8.57359E-06  8.99018E-03  6.32476E-03  2.62999E-03  4.43129E-04 -1.53694E-04
  7.400  5.14668E-03  4.33133E-03  1.77877E-03  4.58587E-04  3.34724E-06  7.62501E-03  5.60424E-03  2.41166E-03  4.40133E-04 -1.23593E-04
  7.500  4.28419E-03  3.74948E-03  1.59539E-03  4.30796E-04  1.29479E-05  6.43294E-03  4.92176E-03  2.18627E-03  4.28089E-04 -9.69759E-05
  7.600  3.54462E-03  3.21678E-03  1.41443E-03  3.98866E-04  2.02856E-05  5.39968E-03  4.28545E-03  1.96018E-03  4.08544E-04 -7.39918E-05
  7.700  2.91541E-03  2.73567E-03  1.23991E-03  3.64185E-04  2.55021E-05  4.51043E-03  3.70077E-03  1.73888E-03  3.83148E-04 -5.46203E-05
  7.800  2.38416E-03  2.30674E-03  1.07501E-03  3.28066E-04  2.88042E-05  3.75037E-03  3.17076E-03  1.52683E-03  3.53554E-04 -3.87036E-05
  7.900  1.93896E-03  1.92902E-03  9.22078E-04  2.91689E-04  3.04439E-05  3.10502E-03  2.69636E-03  1.32749E-03  3.21326E-04 -2.59783E-05
  8.000  1.56860E-03  1.60029E-03  7.82652E-04  2.56071E-04  3.06982E-05  2.56053E-03  2.27675E-03  1.14331E-03  2.87880E-04 -1.61085E-05
  8.100  1.26267E-03  1.31741E-03  6.57561E-04  2.22038E-04  2.98512E-05  2.10391E-03  1.90971E-03  9.75808E-04  2.54433E-04 -8.71649E-06
  8.200  1.01170E-03  1.07661E-03  5.47010E-04  1.90222E-04  2.81785E-05  1.72317E-03  1.59203E-03  8.25700E-04  2.21983E-04 -3.40989E-06
  8.300  8.07180E-04  8.73744E-04  4.50690E-04  1.61062E-04  2.59343E-05  1.40739E-03  1.31975E-03  6.92999E-04  1.91298E-04  1.95884E-07
  8.400  6.41567E-04  7.04527E-04  3.67899E-04  1.34820E-04  2.33435E-05  1.14681E-03  1.08854E-03  5.77170E-04  1.62925E-04  2.46036E-06
  8.500  5.08269E-04  5.64710E-04  2.97648E-04  1.11604E-04  2.05955E-05  9.32742E-04  8.93887E-04  4.77263E-04  1.37207E-04  3.70606E-06
  8.600  4.01587E-04  4.50220E-04  2.38768E-04  9.13918E-05  1.78423E-05  7.57618E-04  7.31306E-04  3.92045E-04  1.14314E-04  4.21139E-06
  8.700  3.16655E-04  3.57265E-04  1.89994E-04  7.40585E-05  1.51991E-05  6.14870E-04  5.96502E-04  3.20105E-04  9.42703E-05  4.20780E-06
  8.800  2.49360E-04  2.82390E-04  1.50041E-04  5.94064E-05  1.27469E-05  4.98870E-04  4.85464E-04  2.59959E-04  7.69861E-05  3.88047E-06
  8.900  1.96265E-04  2.22522E-04  1.17661E-04  4.71887E-05  1.05362E-05  4.04844E-04  3.94536E-04  2.10121E-04  6.22909E-05  3.37152E-06
  9.000  1.54524E-04  1.74973E-04  9.16796E-05  3.71322E-05  8.59218E-06  3.28776E-04  3.20453E-04  1.69162E-04  4.99601E-05  2.78497E-06
  9.100  1.21803E-04  1.37432E-04  7.10297E-05  2.89559E-05  6.92015E-06  2.67315E-04  2.60349E-04  1.35752E-04  3.97390E-05  2.19265E-06
  9.200  9.62073E-05  1.07946E-04  5.47617E-05  2.23850E-05  5.51032E-06  2.17688E-04  2.11749E-04  1.08682E-04  3.13626E-05  1.64037E-06
  9.300  7.62100E-05  8.48844E-05  4.20502E-05  1.71618E-05  4.34275E-06  1.77617E-04  1.72544E-04  8.68797E-05  2.45706E-05  1.15390E-06
  9.400  6.05912E-05  6.69070E-05  3.21920E-05  1.30524E-05  3.39139E-06  1.45240E-04  1.40964E-04  6.94117E-05  1.91173E-05  7.44359E-07
  9.500  4.83834E-05  5.29233E-05  2.45983E-05  9.84992E-06  2.62738E-06  1.19049E-04  1.15536E-04  5.54778E-05  1.47792E-05  4.12844E-07
  9.600  3.88250E-05  4.20570E-05  1.87841E-05  7.37632E-06  2.02162E-06  9.78219E-05  9.50462E-05  4.44031E-05  1.13579E-05  1.54137E-07
  9.700  3.13200E-05  3.36109E-05  1.43559E-05  5.48141E-06  1.54654E-06  8.05792E-05  7.85085E-05  3.56250E-05  8.68178E-06 -4.04162E-08
  9.800  2.54049E-05  2.70352E-05  1.09981E-05  4.04101E-06  1.17726E-06  6.65347E-05  6.51242E-05  2.86802E-05  6.60485E-06 -1.80846E-07
  9.900  2.07205E-05  2.19002E-05  8.46131E-06  2.95418E-06  8.92172E-07  5.50603E-05  5.42521E-05  2.31910E-05  5.00529E-06 -2.77182E-07
 10.000  1.69899E-05  1.78724E-05  6.54988E-06  2.14010E-06  6.73119E-07  4.56552E-05  4.53809E-05  1.88516E-05  3.78279E-06 -3.38623E-07
 10.100  1.40004E-05  1.46946E-05  5.11208E-06  1.53497E-06  5.05289E-07  3.79204E-05  3.81047E-05  1.54171E-05  2.85575E-06 -3.73121E-07
 10.200  1.15887E-05  1.21695E-05  4.03105E-06  1.08892E-06  3.76884E-07  3.15380E-05  3.21026E-05  1.26919E-05  2.15849E-06 -3.87264E-07
 10.300  9.62951E-06  1.01465E-05  3.21746E-06  7.63334E-07  2.78711E-07  2.62545E-05  2.71220E-05  1.05213E-05  1.63854E-06 -3.86334E-07
 10.400  8.02701E-06  8.51101E-06  2.60339E-06  5.28511E-07  2.03727E-07  2.18677E-05  2.29640E-05  8.78333E-06  1.25431E-06 -3.74472E-07
 10.500  6.70755E-06  7.17605E-06  2.13749E-06  3.61696E-07  1.46598E-07  1.82156E-05  1.94726E-05  7.38241E-06  9.73007E-07 -3.54878E-07
 10.600  5.61446E-06  6.07576E-06  1.78114E-06  2.45500E-07  1.03306E-07  1.51684E-05  1.65252E-05  6.24403E-06  7.68931E-07 -3.30017E-07
 10.700  4.70395E-06  5.16026E-06  1.50543E-06  1.66646E-07  7.08211E-08  1.26212E-05  1.40253E-05  5.31042E-06  6.22058E-07 -3.01797E-07
 10.800  3.94201E-06  4.39178E-06  1.28886E-06  1.15001E-07  4.68287E-08  1.04892E-05  1.18965E-05  4.53703E-06  5.16895E-07 -2.71706E-07
 10.900  3.30200E-06  3.74164E-06  1.11556E-06  8.28363E-08  2.95316E-08  8.70344E-06  1.00783E-05  3.88969E-06  4.41561E-07 -2.40924E-07
 11.000  2.76293E-06  3.18797E-06  9.73911E-07  6.42782E-08  1.75017E-08  7.20730E-06  8.52222E-06  3.34232E-06  3.87051E-07 -2.10393E-07
 11.100  2.30805E-06  2.71401E-06  8.55503E-07  5.48863E-08  9.57851E-09  5.95427E-06  7.18904E-06  2.87513E-06  3.46647E-07 -1.80864E-07
 11.200  1.92388E-06  2.30678E-06  7.54329E-07  5.13413E-08  4.80277E-09  4.90578E-06  6.04675E-06  2.47313E-06  3.15441E-07 -1.52925E-07
 11.300  1.59944E-06  1.95610E-06  6.66168E-07  5.12045E-08  2.37404E-09  4.02970E-06  5.06885E-06  2.12496E-06  2.89946E-07 -1.27022E-07
 11.400  1.32567E-06  1.65386E-06  5.88108E-07  5.27304E-08  1.62497E-09  3.29910E-06  4.23311E-06  1.82201E-06  2.67777E-07 -1.03468E-07
 11.500  1.09504E-06  1.39347E-06  5.18179E-07  5.47179E-08  2.00516E-09  2.69129E-06  3.52062E-06  1.55767E-06  2.47393E-07 -8.24538E-08
 11.600  9.01190E-07  1.16948E-06  4.55073E-07  5.63890E-08  3.06984E-09  2.18705E-06  2.91513E-06  1.32681E-06  2.27875E-07 -6.40610E-08
 11.700  7.38719E-07  9.77301E-07  3.97932E-07  5.72894E-08  4.47036E-09  1.77011E-06  2.40250E-06  1.12533E-06  2.08761E-07 -4.82750E-08
 11.800  6.03007E-07  8.12957E-07  3.46189E-07  5.72049E-08  5.94477E-09  1.42659E-06  1.97034E-06  9.49866E-07  1.89893E-07 -3.50004E-08
 11.900  4.90080E-07  6.72986E-07  2.99454E-07  5.60937E-08  7.30756E-09  1.14468E-06  1.60772E-06  7.97584E-07  1.71315E-07 -2.40778E-08
 12.000  3.96504E-07  5.54318E-07  2.57434E-07  5.40300E-08  8.43866E-09  9.14296E-07  1.30499E-06  6.66003E-07  1.53181E-07 -1.53010E-08
 12.100  3.19308E-07  4.54216E-07  2.19881E-07  5.11594E-08  9.27201E-09  7.26867E-07  1.05361E-06  5.52900E-07  1.35698E-07 -8.43406E-09
 12.200  2.55927E-07  3.70227E-07  1.86552E-07  4.76641E-08  9.78409E-09  5.75096E-07  8.46025E-07  4.56248E-07  1.19075E-07 -3.22611E-09
 12.300  2.04142E-07  3.00152E-07  1.57199E-07  4.37374E-08  9.98311E-09  4.52797E-07  6.75601E-07  3.74175E-07  1.03497E-07  5.75157E-10
 12.400  1.62046E-07  2.42026E-07  1.31554E-07  3.95647E-08  9.89919E-09  3.54742E-07  5.36508E-07  3.04946E-07  8.91081E-08  3.21296E-09
 12.500  1.28002E-07  1.94096E-07  1.09333E-07  3.53122E-08  9.57587E-09  2.76529E-07  4.23669E-07  2.46955E-07  7.60055E-08  4.91342E-09
 12.600  1.00615E-07  1.54811E-07  9.02401E-08  3.11198E-08  9.06324E-09  2.14470E-07  3.32683E-07  1.98720E-07  6.42361E-08  5.88010E-09
 12.700  7.86998E-08  1.22806E-07  7.39715E-08  2.70982E-08  8.41246E-09  1.65493E-07  2.59768E-07  1.58887E-07  5.38020E-08  6.29092E-09
 12.800  6.12560E-08  9.68894E-08  6.02239E-08  2.33295E-08  7.67197E-09  1.27047E-07  2.01694E-07  1.26230E-07  4.46671E-08  6.29704E-09
 12.900  4.74454E-08  7.60297E-08  4.87016E-08  1.98685E-08  6.88482E-09  9.70319E-08  1.55724E-07  9.96490E-08  3.67649E-08  6.02330E-09
 13.000  3.65694E-08  5.93409E-08  3.91219E-08  1.67469E-08  6.08730E-09  7.37277E-08  1.19560E-07  7.81690E-08  3.00070E-08  5.56986E-09
 13.100  2.80497E-08  4.60685E-08  3.12201E-08  1.39765E-08  5.30832E-09  5.57328E-08  9.12837E-08  6.09350E-08  2.42907E-08  5.01462E-09
 13.200  2.14109E-08  3.55754E-08  2.47525E-08  1.15539E-08  4.56955E-09  4.19140E-08  6.93092E-08  4.72055E-08  1.95059E-08  4.41605E-09
 13.300  1.62649E-08  2.73281E-08  1.94990E-08  9.46399E-09  3.88600E-09  3.13604E-08  5.23353E-08  3.63442E-08  1.55412E-08  3.81625E-09
 13.400  1.22967E-08  2.08832E-08  1.52632E-08  7.68372E-09  3.26684E-09  2.33445E-08  3.93026E-08  2.78114E-08  1.22876E-08  3.24387E-09
 13.500  9.25249E-09  1.58756E-08  1.18728E-08  6.18503E-09  2.71638E-09  1.72893E-08  2.93554E-08  2.11534E-08  9.64241E-09  2.71694E-09
 13.600  6.92897E-09  1.20067E-08  9.17839E-09  4.93737E-09  2.23516E-09  1.27400E-08  2.18079E-08  1.59933E-08  7.51122E-09  2.24531E-09
 13.700  5.16452E-09  9.03423E-09  7.05204E-09  3.90959E-09  1.82082E-09  9.34058E-09  1.61145E-08  1.20205E-08  5.80903E-09  1.83284E-09
 13.800  3.83132E-09  6.76308E-09  5.38548E-09  3.07141E-09  1.46905E-09  6.81400E-09  1.18445E-08  8.98175E-09  4.46095E-09  1.47911E-09
 13.900  2.82900E-09  5.03726E-09  4.08811E-09  2.39441E-09  1.17425E-09  4.94614E-09  8.66028E-09  6.67238E-09  3.40202E-09  1.18091E-09
 14.000  2.07915E-09  3.73293E-09  3.08482E-09  1.85262E-09  9.30196E-10  3.57256E-09  6.29915E-09  4.92843E-09  2.57683E-09  9.33324E-10
 14.100  1.52094E-09  2.75244E-09  2.31403E-09  1.42287E-09  7.30459E-10  2.56776E-09  4.55811E-09  3.61968E-09  1.93876E-09  7.30577E-10
 14.200  1.10741E-09  2.01932E-09  1.72568E-09  1.08493E-09  5.68764E-10  1.83655E-09  3.28139E-09  2.64356E-09  1.44910E-09  5.66636E-10
 14.300  8.02565E-10  1.47405E-09  1.27943E-09  8.21391E-10  4.39219E-10  1.30719E-09  2.35027E-09  1.91995E-09  1.07610E-09  4.35622E-10
 14.400  5.78924E-10  1.07064E-09  9.43104E-10  6.17532E-10  3.36457E-10  9.25922E-10  1.67487E-09  1.38673E-09  7.94013E-10  3.32065E-10
 14.500  4.15652E-10  7.73744E-10  6.91193E-10  4.61082E-10  2.55716E-10  6.52709E-10  1.18758E-09  9.96140E-10  5.82184E-10  2.51053E-10
 14.600  2.97030E-10  5.56385E-10  5.03673E-10  3.41939E-10  1.92860E-10  4.57915E-10  8.37868E-10  7.11691E-10  4.24215E-10  1.88299E-10
 14.700  2.11264E-10  3.98084E-10  3.64939E-10  2.51891E-10  1.44359E-10  3.19729E-10  5.88214E-10  5.05737E-10  3.07212E-10  1.40142E-10
 14.800  1.49554E-10  2.83395E-10  2.62919E-10  1.84334E-10  1.07258E-10  2.22187E-10  4.10915E-10  3.57468E-10  2.21130E-10  1.03516E-10
 14.900  1.05368E-10  2.00736E-10  1.88350E-10  1.34017E-10  7.91146E-11  1.53675E-10  2.85652E-10  2.51329E-10  1.58213E-10  7.59016E-11
 15.000  7.38837E-11  1.41471E-10  1.34170E-10  9.68076E-11  5.79395E-11  1.05789E-10  1.97606E-10  1.75775E-10  1.12525E-10  5.52538E-11
 15.100  5.15595E-11  9.92002E-11  9.50393E-11  6.94836E-11  4.21342E-11  7.24840E-11  1.36035E-10  1.22291E-10  7.95592E-11  3.99398E-11
 15.200  3.58078E-11  6.92082E-11  6.69442E-11  4.95572E-11  3.04285E-11  4.94322E-11  9.31957E-11  8.46378E-11  5.59232E-11  2.86709E-11
 15.300  2.47482E-11  4.80392E-11  4.68911E-11  3.51243E-11  2.18251E-11  3.35544E-11  6.35392E-11  5.82746E-11  3.90817E-11  2.04418E-11
 15.400  1.70215E-11  3.31758E-11  3.26620E-11  2.47405E-11  1.55489E-11  2.26706E-11  4.31116E-11  3.99160E-11  2.71554E-11  1.44773E-11
 15.500  1.16501E-11  2.27944E-11  2.26243E-11  1.73194E-11  1.10039E-11  1.52459E-11  2.91111E-11  2.72006E-11  1.87610E-11  1.01858E-11
 15.600  7.93461E-12  1.55815E-11  1.55844E-11  1.20504E-11  7.73633E-12  1.02053E-11  1.95631E-11  1.84408E-11  1.28882E-11  7.11989E-12
 15.700  5.37746E-12  1.05964E-11  1.06757E-11  8.33364E-12  5.40375E-12  6.79949E-12  1.30838E-11  1.24383E-11  8.80397E-12  4.94500E-12
 15.800  3.62639E-12  7.16926E-12  7.27271E-12  5.72862E-12  3.75024E-12  4.50929E-12  8.70864E-12  8.34684E-12  5.98042E-12  3.41278E-12
 15.900  2.43336E-12  4.82555E-12  4.92714E-12  3.91442E-12  2.58615E-12  2.97659E-12  5.76883E-12  5.57280E-12  4.03984E-12  2.34061E-12
 16.000  1.62467E-12  3.23127E-12  3.31968E-12  2.65890E-12  1.77218E-12  1.95574E-12  3.80318E-12  3.70184E-12  2.71388E-12  1.59537E-12
 16.100  1.07930E-12  2.15252E-12  2.22436E-12  1.79544E-12  1.20683E-12  1.27902E-12  2.49533E-12  2.44658E-12  1.81310E-12  1.08076E-12
 16.200  7.13389E-13  1.42648E-12  1.48227E-12  1.20529E-12  8.16755E-13  8.32570E-13  1.62941E-12  1.60880E-12  1.20467E-12  7.27717E-13
 16.300  4.69153E-13  9.40434E-13  9.82349E-13  8.04407E-13  5.49378E-13  5.39431E-13  1.05890E-12  1.05257E-12  7.96052E-13  4.87062E-13
 16.400  3.06971E-13  6.16776E-13  6.47479E-13  5.33753E-13  3.67286E-13  3.47873E-13  6.84851E-13  6.85180E-13  5.23181E-13  3.24053E-13
 16.500  1.99834E-13  4.02404E-13  4.24436E-13  3.52126E-13  2.44069E-13  2.23291E-13  4.40814E-13  4.43781E-13  3.41986E-13  2.14329E-13
 16.600  1.29427E-13  2.61174E-13  2.76713E-13  2.30973E-13  1.61220E-13  1.42654E-13  2.82378E-13  2.85985E-13  2.22342E-13  1.40928E-13
 16.700  8.33988E-14  1.68628E-13  1.79425E-13  1.50642E-13  1.05861E-13  9.07105E-14  1.80020E-13  1.83371E-13  1.43780E-13  9.21273E-14
 16.800  5.34649E-14  1.08308E-13  1.15712E-13  9.76925E-14  6.91016E-14  5.74097E-14  1.14214E-13  1.16986E-13  9.24794E-14  5.98781E-14
 16.900  3.40996E-14  6.92026E-14  7.42195E-14  6.29971E-14  4.48426E-14  3.61629E-14  7.21159E-14  7.42596E-14  5.91661E-14  3.86950E-14
 17.000  2.16371E-14  4.39859E-14  4.73489E-14  4.03958E-14  2.89308E-14  2.26719E-14  4.53156E-14  4.69018E-14  3.76520E-14  2.48637E-14
 17.100  1.36589E-14  2.78121E-14  3.00441E-14  2.57584E-14  1.85573E-14  1.41468E-14  2.83380E-14  2.94744E-14  2.38340E-14  1.58860E-14
 17.200  8.57817E-15  1.74939E-14  1.89614E-14  1.63335E-14  1.18350E-14  8.78547E-15  1.76357E-14  1.84298E-14  1.50075E-14  1.00930E-14
 17.300  5.35967E-15  1.09464E-14  1.19028E-14  1.02998E-14  7.50471E-15  5.43011E-15  1.09223E-14  1.14661E-14  9.39994E-15  6.37661E-15
 17.400  3.33153E-15  6.81376E-15  7.43193E-15  6.45921E-15  4.73183E-15  3.34029E-15  6.73188E-15  7.09801E-15  5.85676E-15  4.00629E-15
 17.500  2.06022E-15  4.21929E-15  4.61565E-15  4.02846E-15  2.96666E-15  2.04497E-15  4.12908E-15  4.37199E-15  3.63003E-15  2.50316E-15
 17.600  1.26749E-15  2.59914E-15  2.85134E-15  2.49873E-15  1.84954E-15  1.24599E-15  2.52036E-15  2.67946E-15  2.23815E-15  1.55540E-15
 17.700  7.75782E-16  1.59279E-15  1.75209E-15  1.54144E-15  1.14664E-15  7.55554E-16  1.53097E-15  1.63396E-15  1.37278E-15  9.61198E-16
 17.800  4.72389E-16  9.71024E-16  1.07093E-15  9.45749E-16  7.06925E-16  4.55968E-16  9.25461E-16  9.91435E-16  8.37627E-16  5.90764E-16
 17.900  2.86171E-16  5.88908E-16  6.51129E-16  5.77129E-16  4.33425E-16  2.73854E-16  5.56723E-16  5.98571E-16  5.08446E-16  3.61124E-16
 18.000  1.72473E-16  3.55315E-16  3.93806E-16  3.50290E-16  2.64278E-16  1.63689E-16  3.33280E-16  3.59582E-16  3.07035E-16  2.19558E-16
 18.100  1.03415E-16  2.13271E-16  2.36925E-16  2.11471E-16  1.60260E-16  9.73707E-17  1.98548E-16  2.14938E-16  1.84454E-16  1.32771E-16
 18.200  6.16913E-17  1.27352E-16  1.41795E-16  1.26984E-16  9.66536E-17  5.76432E-17  1.17708E-16  1.27838E-16  1.10242E-16  7.98603E-17
 18.300  3.66132E-17  7.56553E-17  8.44186E-17  7.58455E-17  5.79763E-17  3.39606E-17  6.94438E-17  7.56564E-17  6.55499E-17  4.77792E-17
 18.400  2.16187E-17  4.47133E-17  4.99975E-17  4.50614E-17  3.45886E-17  1.99117E-17  4.07705E-17  4.45521E-17  3.87765E-17  2.84339E-17
 18.500  1.27000E-17  2.62907E-17  2.94575E-17  2.66306E-17  2.05247E-17  1.16184E-17  2.38200E-17  2.61054E-17  2.28213E-17  1.68319E-17
 18.600  7.42273E-18  1.53794E-17  1.72659E-17  1.56554E-17  1.21141E-17  6.74668E-18  1.38492E-17  1.52207E-17  1.33627E-17  9.91150E-18
 18.700  4.31630E-18  8.95065E-18  1.00678E-17  9.15520E-18  7.11189E-18  3.89884E-18  8.01289E-18  8.83048E-18  7.78460E-18  5.80580E-18
 18.800  2.49720E-18  5.18263E-18  5.84030E-18  5.32593E-18  4.15307E-18  2.24225E-18  4.61361E-18  5.09776E-18  4.51200E-18  3.38306E-18
 18.900  1.43744E-18  2.98560E-18  3.37054E-18  3.08216E-18  2.41241E-18  1.28332E-18  2.64349E-18  2.92836E-18  2.60195E-18  1.96105E-18
 19.000  8.23245E-19  1.71121E-18  1.93523E-18  1.77442E-18  1.39393E-18  7.30951E-19  1.50730E-18  1.67386E-18  1.49290E-18  1.13087E-18
 19.100  4.69107E-19  9.75821E-19  1.10545E-18  1.01626E-18  8.01215E-19  4.14327E-19  8.55286E-19  9.52073E-19  8.52251E-19  6.48755E-19
 19.200  2.65965E-19  5.53653E-19  6.28247E-19  5.79041E-19  4.58123E-19  2.33723E-19  4.82959E-19  5.38861E-19  4.84080E-19  3.70260E-19
 19.300  1.50034E-19  3.12543E-19  3.55227E-19  3.28228E-19  2.60584E-19  1.31209E-19  2.71393E-19  3.03489E-19  2.73579E-19  2.10230E-19
 19.400  8.42117E-20  1.75546E-19  1.99837E-19  1.85102E-19  1.47454E-19  7.33043E-20  1.51767E-19  1.70087E-19  1.53840E-19  1.18756E-19
 19.500  4.70303E-20  9.81041E-20  1.11852E-19  1.03854E-19  8.30069E-20  4.07568E-20  8.44600E-20  9.48564E-20  8.60763E-20  6.67409E-20
 19.600  2.61342E-20  5.45510E-20  6.22894E-20  5.79722E-20  4.64868E-20  2.25516E-20  4.67754E-20  5.26416E-20  4.79212E-20  3.73176E-20
 19.700  1.44502E-20  3.01817E-20  3.45140E-20  3.21962E-20  2.59006E-20  1.24183E-20  2.57799E-20  2.90712E-20  2.65465E-20  2.07599E-20
 19.800  7.95008E-21  1.66155E-20  1.90280E-20  1.77904E-20  1.43570E-20  6.80540E-21  1.41397E-20  1.59761E-20  1.46328E-20  1.14904E-20
 19.900  4.35222E-21  9.10158E-21  1.04379E-20  9.78073E-21  7.91767E-21  3.71156E-21  7.71794E-21  8.73687E-21  8.02587E-21  6.32774E-21
  67 156 200   0.100
  0.000  5.73900E-02 -2.94801E-16 -4.78784E-16 -3.75278E-16 -1.83103E-15  1.04918E-01 -5.27539E-16 -9.57567E-16 -3.50260E-16 -2.24587E-15
  0.100  5.74578E-02 -4.94376E-05 -1.80474E-08  1.45677E-12 -1.40188E-15  1.04774E-01  6.29846E-05 -3.95276E-09 -1.22321E-11  1.73089E-15
  0.200  5.76589E-02 -1.94917E-04 -2.84845E-07  9.39373E-11 -9.66153E-14  1.04349E-01  2.47652E-04 -6.31092E-08 -7.78095E-10  6.80484E-13
  0.300  5.79873E-02 -4.28100E-04 -1.40957E-06  1.08226E-09 -2.39892E-12  1.03659E-01  5.41436E-04 -3.18233E-07 -8.77339E-09  1.72716E-11
  0.400  5.84332E-02 -7.35610E-04 -4.31487E-06  6.17015E-09 -2.33943E-11  1.02733E-01  9.24353E-04 -9.99461E-07 -4.85948E-08  1.70061E-10
  0.500  5.89832E-02 -1.09979E-03 -1.01092E-05  2.39307E-08 -1.35250E-10  1.01608E-01  1.37036E-03 -2.41732E-06 -1.81975E-07  9.95231E-10
  0.600  5.96212E-02 -1.49967E-03 -1.99294E-05  7.27004E-08 -5.60164E-10  1.00330E-01  1.84914E-03 -4.94627E-06 -5.31123E-07  4.18481E-09
  0.700  6.03288E-02 -1.91217E-03 -3.47712E-05  1.86387E-07 -1.83887E-09  9.89483E-02  2.32810E-03 -8.99813E-06 -1.30333E-06  1.39906E-08
  0.800  6.10859E-02 -2.31333E-03 -5.53275E-05  4.21406E-07 -5.08191E-09  9.75141E-02  2.77459E-03 -1.49838E-05 -2.81331E-06  3.95061E-08
  0.900  6.18720E-02 -2.67961E-03 -8.18527E-05  8.64087E-07 -1.22912E-08  9.60797E-02  3.15799E-03 -2.32631E-05 -5.49933E-06  9.79720E-08
  1.000  6.26662E-02 -2.98919E-03 -1.14067E-04  1.63751E-06 -2.67131E-08  9.46941E-02  3.45172E-03 -3.40848E-05 -9.92956E-06  2.19142E-07
  1.100  6.34485E-02 -3.22305E-03 -1.51115E-04  2.90639E-06 -5.31583E-08  9.34017E-02  3.63490E-03 -4.75213E-05 -1.67952E-05  4.50601E-07
  1.200  6.42001E-02 -3.36599E-03 -1.91573E-04  4.87853E-06 -9.81989E-08  9.22398E-02  3.69361E-03 -6.34037E-05 -2.68876E-05  8.63783E-07
  1.300  6.49044E-02 -3.40731E-03 -2.33522E-04  7.80131E-06 -1.70148E-07  9.12377E-02  3.62169E-03 -8.12651E-05 -4.10594E-05  1.56025E-06
  1.400  6.55471E-02 -3.34132E-03 -2.74660E-04  1.19523E-05 -2.78729E-07  9.04154E-02  3.42103E-03 -1.00300E-04 -6.01671E-05  2.67769E-06
  1.500  6.61166E-02 -3.16749E-03 -3.12450E-04  1.76230E-05 -4.34360E-07  8.97831E-02  3.10130E-03 -1.19349E-04 -8.50010E-05  4.39493E-06
  1.600  6.66047E-02 -2.89043E-03 -3.44296E-04  2.50969E-05 -6.47044E-07  8.93414E-02  2.67928E-03 -1.36908E-04 -1.16202E-04  6.93520E-06
  1.700  6.70059E-02 -2.51947E-03 -3.67717E-04  3.46223E-05 -9.24882E-07  8.90817E-02  2.17766E-03 -1.51174E-04 -1.54174E-04  1.05670E-05
  1.800  6.73181E-02 -2.06814E-03 -3.80519E-04  4.63817E-05 -1.27233E-06  8.89874E-02  1.62359E-03 -1.60120E-04 -1.98996E-04  1.56013E-05
  1.900  6.75422E-02 -1.55340E-03 -3.80935E-04  6.04618E-05 -1.68837E-06  8.90348E-02  1.04697E-03 -1.61601E-04 -2.50343E-04  2.23859E-05
  2.000  6.76817E-02 -9.94702E-04 -3.67745E-04  7.68263E-05 -2.16480E-06  8.91952E-02  4.78547E-04 -1.53481E-04 -3.07427E-04  3.12940E-05
  2.100  6.77427E-02 -4.13095E-04 -3.40348E-04  9.52950E-05 -2.68501E-06  8.94363E-02 -5.19051E-05 -1.33775E-04 -3.68955E-04  4.27097E-05
  2.200  6.77334E-02  1.69835E-04 -2.98798E-04  1.15532E-04 -3.22335E-06  8.97243E-02 -5.17386E-04 -1.00797E-04 -4.33123E-04  5.70085E-05
  2.300  6.76636E-02  7.32910E-04 -2.43811E-04  1.37046E-04 -3.74548E-06  9.00255E-02 -8.95228E-04 -5.33048E-05 -4.97648E-04  7.45341E-05
  2.400  6.75448E-02  1.25628E-03 -1.76726E-04  1.59204E-04 -4.20982E-06  9.03084E-02 -1.16839E-03  9.37454E-06 -5.59834E-04  9.55725E-05
  2.500  6.73889E-02  1.72222E-03 -9.94561E-05  1.81257E-04 -4.57017E-06  9.05452E-02 -1.32635E-03  8.72351E-05 -6.16679E-04  1.20325E-04
  2.600  6.72088E-02  2.11580E-03 -1.44146E-05  2.02376E-04 -4.77937E-06  9.07130E-02 -1.36565E-03  1.79514E-04 -6.65015E-04  1.48879E-04
  2.700  6.70169E-02  2.42547E-03  7.55701E-05  2.21699E-04 -4.79391E-06  9.07946E-02 -1.28992E-03  2.84648E-04 -7.01684E-04  1.81186E-04
  2.800  6.68257E-02  2.64336E-03  1.67343E-04  2.38380E-04 -4.57920E-06  9.07795E-02 -1.10951E-03  4.00262E-04 -7.23726E-04  2.17034E-04
  2.900  6.66464E-02  2.76561E-03  2.57518E-04  2.51641E-04 -4.11501E-06  9.06639E-02 -8.40631E-04  5.23201E-04 -7.28581E-04  2.56037E-04
  3.000  6.64892E-02  2.79243E-03  3.42571E-04  2.60819E-04 -3.40068E-06  9.04502E-02 -5.04206E-04  6.49599E-04 -7.14287E-04  2.97620E-04
  3.100  6.63624E-02  2.72805E-03  4.18950E-04  2.65401E-04 -2.45985E-06  9.01465E-02 -1.24307E-04  7.74989E-04 -6.79656E-04  3.41022E-04
  3.200  6.62719E-02  2.58060E-03  4.83180E-04  2.65049E-04 -1.34413E-06  8.97654E-02  2.73558E-04  8.94452E-04 -6.24426E-04  3.85302E-04
  3.300  6.62212E-02  2.36182E-03  5.31996E-04  2.59612E-04 -1.35584E-07  8.93228E-02  6.64298E-04  1.00281E-03 -5.49355E-04  4.29353E-04
  3.400  6.62105E-02  2.08665E-03  5.62475E-04  2.49121E-04  1.05223E-06  8.88359E-02  1.02507E-03  1.09485E-03 -4.56274E-04  4.71934E-04
  3.500  6.62366E-02  1.77281E-03  5.72197E-04  2.33769E-04  2.07463E-06  8.83220E-02  1.33695E-03  1.16559E-03 -3.48062E-04  5.11700E-04
  3.600  6.62925E-02  1.44016E-03  5.59410E-04  2.13883E-04  2.75780E-06  8.77959E-02  1.58641E-03  1.21058E-03 -2.28565E-04  5.47245E-04
  3.700  6.63675E-02  1.11008E-03  5.23197E-04  1.89890E-04  2.90226E-06  8.72692E-02  1.76635E-03  1.22617E-03 -1.02440E-04  5.77149E-04
  3.800  6.64470E-02  8.04725E-04  4.63648E-04  1.62280E-04  2.28790E-06  8.67481E-02  1.87669E-03  1.20989E-03  2.50647E-05  6.00033E-04
  3.900  6.65127E-02  5.46176E-04  3.81998E-04  1.31575E-04  6.80779E-07  8.62328E-02  1.92452E-03  1.16066E-03  1.48373E-04  6.14608E-04
  4.000  6.65430E-02  3.55624E-04  2.80736E-04  9.83055E-05 -2.15840E-06  8.57169E-02  1.92360E-03  1.07908E-03  2.61892E-04  6.19734E-04
  4.100  6.65137E-02  2.52469E-04  1.63656E-04  6.30076E-05 -6.46373E-06  8.51868E-02  1.89351E-03  9.67646E-04  3.60340E-04  6.14474E-04
  4.200  6.63987E-02  2.53459E-04  3.58372E-05  2.62246E-05 -1.24515E-05  8.46229E-02  1.85817E-03  8.30765E-04  4.39068E-04  5.98145E-04
  4.300  6.61708E-02  3.71869E-04 -9.64643E-05 -1.14707E-05 -2.03058E-05  8.39997E-02  1.84415E-03  6.74793E-04  4.94370E-04  5.70362E-04
  4.400  6.58031E-02  6.16780E-04 -2.26008E-04 -4.94451E-05 -3.01616E-05  8.32877E-02  1.87870E-03  5.07862E-04  5.23733E-04  5.31080E-04
  4.500  6.52699E-02  9.92497E-04 -3.44857E-04 -8.69684E-05 -4.20882E-05  8.24547E-02  1.98764E-03  3.39593E-04  5.26038E-04  4.80620E-04
  4.600  6.45481E-02  1.49814E-03 -4.44750E-04 -1.23180E-04 -5.60705E-05  8.14680E-02  2.19345E-03  1.80674E-04  5.01661E-04  4.19686E-04
  4.700  6.36179E-02  2.12746E-03 -5.17531E-04 -1.57061E-04 -7.19940E-05  8.02960E-02  2.51344E-03  4.23258E-05  4.52497E-04  3.49368E-04
  4.800  6.24647E-02  2.86893E-03 -5.55627E-04 -1.87431E-04 -8.96305E-05  7.89108E-02  2.95838E-03 -6.43321E-05  3.81874E-04  2.71131E-04
  4.900  6.10788E-02  3.70599E-03 -5.52529E-04 -2.12957E-04 -1.08630E-04  7.72893E-02  3.53149E-03 -1.28953E-04  2.94379E-04  1.86778E-04
  5.000  5.94570E-02  4.61771E-03 -5.03248E-04 -2.32200E-04 -1.28521E-04  7.54153E-02  4.22806E-03 -1.42642E-04  1.95592E-04  9.84039E-05
  5.100  5.76024E-02  5.57954E-03 -4.04703E-04 -2.43674E-04 -1.48714E-04  7.32801E-02  5.03547E-03 -9.85880E-05  9.17572E-05  8.32801E-06
  5.200  5.55245E-02  6.56433E-03 -2.56018E-04 -2.45945E-04 -1.68520E-04  7.08835E-02  5.93394E-03  7.40840E-06 -1.06033E-05 -8.09906E-05
  5.300  5.32392E-02  7.54347E-03 -5.86945E-05 -2.37732E-04 -1.87176E-04  6.82339E-02  6.89754E-03  1.76552E-04 -1.05084E-04 -1.67048E-04
  5.400  5.07680E-02  8.48814E-03  1.83363E-04 -2.18022E-04 -2.03880E-04  6.53480E-02  7.89574E-03  4.06849E-04 -1.85793E-04 -2.47402E-04
  5.500  4.81372E-02  9.37052E-03  4.63966E-04 -1.86183E-04 -2.17832E-04  6.22502E-02  8.89518E-03  6.93106E-04 -2.47706E-04 -3.19775E-04
  5.600  4.53773E-02  1.01650E-02  7.74911E-04 -1.42059E-04 -2.28281E-04  5.89713E-02  9.86151E-03  1.02714E-03 -2.86962E-04 -3.82163E-04
  5.700  4.25214E-02  1.08493E-02  1.10637E-03 -8.60380E-05 -2.34573E-04  5.55474E-02  1.07613E-02  1.39817E-03 -3.01077E-04 -4.32924E-04
  5.800  3.96042E-02  1.14052E-02  1.44741E-03 -1.90890E-05 -2.36196E-04  5.20184E-02  1.15639E-02  1.79340E-03 -2.89063E-04 -4.70858E-04
  5.900  3.66611E-02  1.18193E-02  1.78653E-03  5.72447E-05 -2.32821E-04  4.84260E-02  1.22428E-02  2.19871E-03 -2.51441E-04 -4.95261E-04
  6.000  3.37264E-02  1.20834E-02  2.11227E-03  1.40894E-04 -2.24325E-04  4.48128E-02  1.27768E-02  2.59943E-03 -1.90157E-04 -5.05955E-04
  6.100  3.08330E-02  1.21945E-02  2.41382E-03  2.29351E-04 -2.10815E-04  4.12201E-02  1.31511E-02  2.98114E-03 -1.08410E-04 -5.03285E-04
  6.200  2.80110E-02  1.21549E-02  2.68150E-03  3.19796E-04 -1.92626E-04  3.76868E-02  1.33574E-02  3.33041E-03 -1.04033E-05 -4.88096E-04
  6.300  2.52871E-02  1.19715E-02  2.90728E-03  4.09241E-04 -1.70305E-04  3.42488E-02  1.33941E-02  3.63546E-03  9.89574E-05 -4.61677E-04
  6.400  2.26842E-02  1.16556E-02  3.08503E-03  4.94694E-04 -1.44588E-04  3.09373E-02  1.32659E-02  3.88676E-03  2.14390E-04 -4.25679E-04
  6.500  2.02210E-02  1.12217E-02  3.21081E-03  5.73323E-04 -1.16358E-04  2.77789E-02  1.29828E-02  4.07733E-03  3.30570E-04 -3.82028E-04
  6.600  1.79118E-02  1.06870E-02  3.28286E-03  6.42605E-04 -8.65950E-05  2.47948E-02  1.25600E-02  4.20299E-03  4.42436E-04 -3.32809E-04
  6.700  1.57668E-02  1.00704E-02  3.30161E-03  7.00453E-04 -5.63214E-05  2.20011E-02  1.20158E-02  4.26241E-03  5.45465E-04 -2.80168E-04
  6.800  1.37918E-02  9.39169E-03  3.26949E-03  7.45318E-04 -2.65471E-05  1.94085E-02  1.13714E-02  4.25691E-03  6.35881E-04 -2.26197E-04
  6.900  1.19891E-02  8.67043E-03  3.19064E-03  7.76242E-04  1.78484E-06  1.70232E-02  1.06492E-02  4.19025E-03  7.10804E-04 -1.72843E-04
  7.000  1.03575E-02  7.92554E-03  3.07056E-03  7.92881E-04  2.78440E-05  1.48464E-02  9.87167E-03  4.06819E-03  7.68324E-04 -1.21826E-04
  7.100  8.89283E-03  7.17452E-03  2.91579E-03  7.95485E-04  5.09499E-05  1.28760E-02  9.06084E-03  3.89807E-03  8.07512E-04 -7.45813E-05
  7.200  7.58863E-03  6.43298E-03  2.73342E-03  7.84846E-04  7.05970E-05  1.11060E-02  8.23711E-03  3.68828E-03  8.28365E-04 -3.22191E-05
  7.300  6.43645E-03  5.71428E-03  2.53080E-03  7.62215E-04  8.64673E-05  9.52816E-03  7.41879E-03  3.44775E-03  8.31703E-04  4.49172E-06
  7.400  5.42645E-03  5.02939E-03  2.31512E-03  7.29200E-04  9.84306E-05  8.13182E-03  6.62164E-03  3.18554E-03  8.19028E-04  3.51185E-05
  7.500  4.54779E-03  4.38678E-03  2.09315E-03  6.87654E-04  1.06533E-04  6.90489E-03  5.85862E-03  2.91034E-03  7.92358E-04  5.95421E-05
  7.600  3.78911E-03  3.79253E-03  1.87098E-03  6.39562E-04  1.10975E-04  5.83426E-03  5.13982E-03  2.63021E-03  7.54055E-04  7.79190E-05
  7.700  3.13883E-03  3.25042E-03  1.65386E-03  5.86927E-04  1.12087E-04  4.90629E-03  4.47253E-03  2.35225E-03  7.06659E-04  9.06335E-05
  7.800  2.58548E-03  2.76223E-03  1.44612E-03  5.31680E-04  1.10292E-04  4.10721E-03  3.86143E-03  2.08250E-03  6.52729E-04  9.82434E-05
  7.900  2.11796E-03  2.32796E-03  1.25111E-03  4.75591E-04  1.06077E-04  3.42345E-03  3.30885E-03  1.82579E-03  5.94715E-04  1.01425E-04
  8.000  1.72572E-03  1.94618E-03  1.07121E-03  4.20217E-04  9.99548E-05  2.84193E-03  2.81510E-03  1.58577E-03  5.34854E-04  1.00919E-04
  8.100  1.39889E-03  1.61431E-03  9.07920E-04  3.66857E-04  9.24395E-05  2.35029E-03  2.37885E-03  1.36496E-03  4.75092E-04  9.74825E-05
  8.200  1.12839E-03  1.32894E-03  7.61942E-04  3.16537E-04  8.40169E-05  1.93696E-03  1.99745E-03  1.16481E-03  4.17047E-04  9.18496E-05
  8.300  9.05994E-04  1.08610E-03  6.33300E-04  2.70003E-04  7.51266E-05  1.59133E-03  1.66733E-03  9.85897E-04  3.61985E-04  8.46978E-05
  8.400  7.24304E-04  8.81534E-04  5.21471E-04  2.27743E-04  6.61479E-05  1.30380E-03  1.38426E-03  8.28010E-04  3.10828E-04  7.66265E-05
  8.500  5.76792E-04  7.10861E-04  4.25512E-04  1.90006E-04  5.73920E-05  1.06572E-03  1.14367E-03  6.90352E-04  2.64179E-04  6.81431E-05
  8.600  4.57738E-04  5.69784E-04  3.44190E-04  1.56838E-04  4.90994E-05  8.69467E-04  9.40865E-04  5.71686E-04  2.22358E-04  5.96576E-05
  8.700  3.62197E-04  4.54199E-04  2.76087E-04  1.28123E-04  4.14420E-05  7.08338E-04  7.71221E-04  4.70470E-04  1.85444E-04  5.14838E-05
  8.800  2.85933E-04  3.60298E-04  2.19702E-04  1.03614E-04  3.45287E-05  5.76521E-04  6.30312E-04  3.84990E-04  1.53328E-04  4.38455E-05
  8.900  2.25355E-04  2.84616E-04  1.73525E-04  8.29802E-05  2.84136E-05  4.69019E-04  5.14015E-04  3.13465E-04  1.25756E-04  3.68872E-05
  9.000  1.77451E-04  2.24070E-04  1.36100E-04  6.58332E-05  2.31053E-05  3.81575E-04  4.18578E-04  2.54125E-04  1.02377E-04  3.06863E-05
  9.100  1.39717E-04  1.75965E-04  1.06067E-04  5.17600E-05  1.85775E-05  3.10592E-04  3.40648E-04  2.05281E-04  8.27801E-05  2.52662E-05
  9.200  1.10090E-04  1.37980E-04  8.21913E-05  4.03457E-05  1.47779E-05  2.53056E-04  2.77276E-04  1.65363E-04  6.65270E-05  2.06094E-05
  9.300  8.68888E-05  1.08150E-04  6.33769E-05  3.11916E-05  1.16378E-05  2.06460E-04  2.25915E-04  1.32950E-04  5.31789E-05  1.66697E-05
  9.400  6.87499E-05  8.48327E-05  4.86725E-05  2.39278E-05  9.07969E-06  1.68735E-04  1.84388E-04  1.06779E-04  4.23149E-05  1.33826E-05
  9.500  5.45806E-05  6.66736E-05  3.72672E-05  1.82215E-05  7.02318E-06  1.38180E-04  1.50862E-04  8.57527E-05  3.35450E-05  1.06738E-05
  9.600  4.35102E-05  5.25695E-05  2.84818E-05  1.37805E-05  5.39001E-06  1.13409E-04  1.23808E-04  6.89279E-05  2.65179E-05  8.46602E-06
  9.700  3.48506E-05  4.16318E-05  2.17563E-05  1.03543E-05  4.10737E-06  9.32985E-05  1.01965E-04  5.55088E-05  2.09246E-05  6.68409E-06
  9.800  2.80613E-05  3.31519E-05  1.66358E-05  7.73248E-06  3.10992E-06  7.69381E-05  8.43033E-05  4.48312E-05  1.64989E-05  5.25804E-06
  9.900  2.27205E-05  2.65707E-05  1.27552E-05  5.74127E-06  2.34089E-06  6.35964E-05  6.99859E-05  3.63467E-05  1.30152E-05  4.12513E-06
 10.000  1.85009E-05  2.14501E-05  9.82525E-06  4.23983E-06  1.75225E-06  5.26863E-05  5.83400E-05  2.96073E-05  1.02854E-05  3.23074E-06
 10.100  1.51496E-05  1.74503E-05  7.61921E-06  3.11552E-06  1.30437E-06  4.37376E-05  4.88271E-05  2.42502E-05  8.15437E-06  2.52843E-06
 10.200  1.24717E-05  1.43089E-05  5.96096E-06  2.27945E-06  9.65259E-07  3.63745E-05  4.10182E-05  1.99835E-05  6.49596E-06  1.97948E-06
 10.300  1.03179E-05  1.18248E-05  4.71486E-06  1.66226E-06  7.09545E-07  3.02963E-05  3.45736E-05  1.65745E-05  5.20826E-06  1.55217E-06
 10.400  8.57349E-06  9.84461E-06  3.77727E-06  1.21030E-06  5.17463E-07  2.52631E-05  2.92244E-05  1.38382E-05  4.20966E-06  1.22079E-06
 10.500  7.15079E-06  8.25174E-06  3.06947E-06  8.82394E-07  3.73806E-07  2.10826E-05  2.47588E-05  1.16291E-05  3.43529E-06  9.64738E-07
 10.600  5.98243E-06  6.95784E-06  2.53205E-06  6.47067E-07  2.66982E-07  1.76008E-05  2.10100E-05  9.83265E-06  2.83383E-06  7.67601E-07
 10.700  5.01668E-06  5.89613E-06  2.12037E-06  4.80370E-07  1.88201E-07  1.46937E-05  1.78462E-05  8.35967E-06  2.36497E-06  6.16353E-07
 10.800  4.21363E-06  5.01614E-06  1.80113E-06  3.64106E-07  1.30796E-07  1.22615E-05  1.51636E-05  7.14078E-06  1.99717E-06  5.00679E-07
 10.900  3.54235E-06  4.27974E-06  1.54960E-06  2.84479E-07  8.96888E-08  1.02233E-05  1.28800E-05  6.12240E-06  1.70594E-06  4.12412E-07
 11.000  2.97871E-06  3.65809E-06  1.34756E-06  2.31045E-07  6.09764E-08  8.51341E-06  1.09297E-05  5.26329E-06  1.47241E-06  3.45095E-07
 11.100  2.50377E-06  3.12927E-06  1.18169E-06  1.95934E-07  4.16261E-08  7.07795E-06  9.26040E-06  4.53189E-06  1.28215E-06  2.93630E-07
 11.200  2.10249E-06  2.67658E-06  1.04237E-06  1.73253E-07  2.92563E-08  5.87276E-06  7.82953E-06  3.90405E-06  1.12428E-06  2.54004E-07
 11.300  1.76284E-06  2.28715E-06  9.22732E-07  1.58642E-07  2.19825E-08  4.86130E-06  6.60251E-06  3.36138E-06  9.90703E-07  2.23088E-07
 11.400  1.47509E-06  1.95099E-06  8.17961E-07  1.48931E-07  1.83095E-08  4.01323E-06  5.55075E-06  2.88982E-06  8.75470E-07  1.98464E-07
 11.500  1.23128E-06  1.66024E-06  7.24736E-07  1.41876E-07  1.70573E-08  3.30316E-06  4.65034E-06  2.47855E-06  7.74321E-07  1.78299E-07
 11.600  1.02486E-06  1.40860E-06  6.40815E-07  1.35950E-07  1.73064E-08  2.70978E-06  3.88105E-06  2.11919E-06  6.84257E-07  1.61232E-07
 11.700  8.50313E-07  1.19092E-06  5.64721E-07  1.30179E-07  1.83572E-08  2.21508E-06  3.22557E-06  1.80508E-06  6.03224E-07  1.46284E-07
 11.800  7.03025E-07  1.00294E-06  4.95495E-07  1.24000E-07  1.96956E-08  1.80380E-06  2.66891E-06  1.53085E-06  5.29846E-07  1.32782E-07
 11.900  5.79055E-07  8.41004E-07  4.32514E-07  1.17155E-07  2.09631E-08  1.46298E-06  2.19799E-06  1.29204E-06  4.63219E-07  1.20287E-07
 12.000  4.75031E-07  7.01980E-07  3.75366E-07  1.09599E-07  2.19297E-08  1.18154E-06  1.80132E-06  1.08481E-06  4.02747E-07  1.08536E-07
 12.100  3.88049E-07  5.83101E-07  3.23745E-07  1.01424E-07  2.24677E-08  9.50040E-07  1.46876E-06  9.05791E-07  3.48029E-07  9.73979E-08
 12.200  3.15600E-07  4.81911E-07  2.77397E-07  9.28050E-08  2.25291E-08  7.60413E-07  1.19136E-06  7.51949E-07  2.98763E-07  8.68245E-08
 12.300  2.55509E-07  3.96205E-07  2.36075E-07  8.39562E-08  2.21234E-08  6.05774E-07  9.61198E-07  6.20507E-07  2.54691E-07  7.68235E-08
 12.400  2.05892E-07  3.24001E-07  1.99518E-07  7.50964E-08  2.12998E-08  4.80255E-07  7.71283E-07  5.08905E-07  2.15561E-07  6.74302E-08
 12.500  1.65115E-07  2.63512E-07  1.67440E-07  6.64290E-08  2.01309E-08  3.78868E-07  6.15476E-07  4.14771E-07  1.81101E-07  5.86891E-08
 12.600  1.31768E-07  2.13132E-07  1.39526E-07  5.81278E-08  1.87008E-08  2.97384E-07  4.88401E-07  3.35912E-07  1.51016E-07  5.06411E-08
 12.700  1.04635E-07  1.71422E-07  1.15444E-07  5.03300E-08  1.70950E-08  2.32236E-07  3.85378E-07  2.70312E-07  1.24983E-07  4.33149E-08
 12.800  8.26729E-08  1.37099E-07  9.48440E-08  4.31343E-08  1.53938E-08  1.80425E-07  3.02363E-07  2.16130E-07  1.02660E-07  3.67236E-08
 12.900  6.49898E-08  1.09030E-07  7.73729E-08  3.66020E-08  1.36675E-08  1.39442E-07  2.35880E-07  1.71699E-07  8.36915E-08  3.08628E-08
 13.000  5.08286E-08  8.62162E-08  6.26801E-08  3.07612E-08  1.19747E-08  1.07203E-07  1.82964E-07  1.35527E-07  6.77184E-08  2.57119E-08
 13.100  3.95493E-08  6.77900E-08  5.04265E-08  2.56120E-08  1.03606E-08  8.19816E-08  1.41108E-07  1.06290E-07  5.43878E-08  2.12366E-08
 13.200  3.06147E-08  5.30001E-08  4.02907E-08  2.11322E-08  8.85788E-09  6.23615E-08  1.08205E-07  8.28290E-08  4.33607E-08  1.73914E-08
 13.300  2.35762E-08  4.12028E-08  3.19743E-08  1.72829E-08  7.48776E-09  4.71845E-08  8.25009E-08  6.41370E-08  3.43182E-08  1.41234E-08
 13.400  1.80620E-08  3.18508E-08  2.52045E-08  1.40141E-08  6.26140E-09  3.55107E-08  6.25448E-08  4.93501E-08  2.69663E-08  1.13752E-08
 13.500  1.37660E-08  2.44832E-08  1.97365E-08  1.12690E-08  5.18187E-09  2.65826E-08  4.71468E-08  3.77346E-08  2.10390E-08  9.08772E-09
 13.600  1.04374E-08  1.87144E-08  1.53535E-08  8.98817E-09  4.24594E-09  1.97930E-08  3.53388E-08  2.86738E-08  1.62996E-08  7.20255E-09
 13.700  7.87278E-09  1.42251E-08  1.18666E-08  7.11221E-09  3.44583E-09  1.46591E-08  2.63390E-08  2.16544E-08  1.25405E-08  5.66388E-09
 13.800  5.90759E-09  1.07527E-08  9.11287E-09  5.58426E-09  2.77071E-09  1.07990E-08  1.95213E-08  1.62534E-08  9.58241E-09  4.41977E-09
 13.900  4.41004E-09  8.08296E-09  6.95386E-09  4.35137E-09  2.20798E-09  7.91319E-09  1.43877E-08  1.21257E-08  7.27278E-09  3.42294E-09
 14.000  3.27513E-09  6.04263E-09  5.27312E-09  3.36554E-09  1.74431E-09  5.76786E-09  1.05454E-08  8.99188E-09  5.48313E-09  2.63131E-09
 14.100  2.41974E-09  4.49256E-09  3.97382E-09  2.58413E-09  1.36642E-09  4.18198E-09  7.68662E-09  6.62834E-09  4.10674E-09  2.00804E-09
 14.200  1.77856E-09  3.32188E-09  2.97629E-09  1.96999E-09  1.06163E-09  3.01621E-09  5.57216E-09  4.85725E-09  3.05592E-09  1.52143E-09
 14.300  1.30056E-09  2.44291E-09  2.21561E-09  1.49127E-09  8.18251E-10  2.16403E-09  4.01738E-09  3.53861E-09  2.25944E-09  1.14463E-09
 14.400  9.46135E-10  1.78678E-09  1.63941E-09  1.12110E-09  6.25750E-10  1.54453E-09  2.88076E-09  2.56302E-09  1.65999E-09  8.55173E-10
 14.500  6.84768E-10  1.29982E-09  1.20582E-09  8.37103E-10  4.74891E-10  1.09665E-09  2.05462E-09  1.84575E-09  1.21197E-09  6.34556E-10
 14.600  4.93063E-10  9.40496E-10  8.81646E-10  6.20867E-10  3.57714E-10  7.74632E-10  1.45757E-09  1.32165E-09  8.79403E-10  4.67689E-10
 14.700  3.53210E-10  6.76855E-10  6.40839E-10  4.57454E-10  2.67480E-10  5.44356E-10  1.02854E-09  9.41036E-10  6.34204E-10  3.42418E-10
 14.800  2.51731E-10  4.84516E-10  4.63089E-10  3.34860E-10  1.98572E-10  3.80577E-10  7.21958E-10  6.66284E-10  4.54614E-10  2.49063E-10
 14.900  1.78490E-10  3.44985E-10  3.32704E-10  2.43547E-10  1.46377E-10  2.64719E-10  5.04107E-10  4.69135E-10  3.23936E-10  1.79992E-10
 15.000  1.25913E-10  2.44332E-10  2.37655E-10  1.76011E-10  1.07154E-10  1.83199E-10  3.50158E-10  3.28504E-10  2.29458E-10  1.29249E-10
 15.100  8.83692E-11  1.72129E-10  1.68791E-10  1.26405E-10  7.79060E-11  1.26143E-10  2.41964E-10  2.28774E-10  1.61586E-10  9.22282E-11
 15.200  6.17039E-11  1.20621E-10  1.19201E-10  9.02173E-11  5.62607E-11  8.64204E-11  1.66339E-10  1.58458E-10  1.13131E-10  6.54029E-11
 15.300  4.28651E-11  8.40811E-11  8.37047E-11  6.39942E-11  4.03601E-11  5.89107E-11  1.13765E-10  1.09164E-10  7.87530E-11  4.60955E-11
 15.400  2.96262E-11  5.83018E-11  5.84489E-11  4.51175E-11  2.87642E-11  3.99581E-11  7.74114E-11  7.48036E-11  5.45102E-11  3.22908E-11
 15.500  2.03718E-11  4.02141E-11  4.05855E-11  3.16174E-11  2.03677E-11  2.69686E-11  5.24076E-11  5.09865E-11  3.75177E-11  2.24847E-11
 15.600  1.39369E-11  2.75926E-11  2.80251E-11  2.20246E-11  1.43302E-11  1.81119E-11  3.53012E-11  3.45695E-11  2.56782E-11  1.55635E-11
 15.700  9.48602E-12  1.88334E-11  1.92449E-11  1.52515E-11  1.00189E-11  1.21040E-11  2.36591E-11  2.33159E-11  1.74776E-11  1.07095E-11
 15.800  6.42372E-12  1.27876E-11  1.31428E-11  1.04993E-11  6.96100E-12  8.04936E-12  1.57773E-11  1.56439E-11  1.18305E-11  7.32648E-12
 15.900  4.32786E-12  8.63733E-12  8.92631E-12  7.18578E-12  4.80659E-12  5.32685E-12  1.04690E-11  1.04421E-11  7.96442E-12  4.98321E-12
 16.000  2.90098E-12  5.80368E-12  6.02950E-12  4.88954E-12  3.29870E-12  3.50803E-12  6.91223E-12  6.93403E-12  5.33268E-12  3.37003E-12
 16.100  1.93465E-12  3.87939E-12  4.05064E-12  3.30797E-12  2.25017E-12  2.29904E-12  4.54135E-12  4.58097E-12  3.55137E-12  2.26615E-12
 16.200  1.28365E-12  2.57967E-12  2.70651E-12  2.22521E-12  1.52573E-12  1.49943E-12  2.96901E-12  3.01101E-12  2.35244E-12  1.51529E-12
 16.300  8.47379E-13  1.70651E-12  1.79865E-12  1.48837E-12  1.02837E-12  9.73217E-13  1.93156E-12  1.96906E-12  1.55000E-12  1.00756E-12
 16.400  5.56540E-13  1.12305E-12  1.18890E-12  9.89923E-13  6.89065E-13  6.28641E-13  1.25049E-12  1.28118E-12  1.01589E-12  6.66251E-13
 16.500  3.63668E-13  7.35257E-13  7.81644E-13  6.54716E-13  4.59011E-13  4.04120E-13  8.05626E-13  8.29415E-13  6.62328E-13  4.38136E-13
 16.600  2.36430E-13  4.78888E-13  5.11153E-13  4.30606E-13  3.03991E-13  2.58546E-13  5.16507E-13  5.34264E-13  4.29566E-13  2.86551E-13
 16.700  1.52930E-13  3.10302E-13  3.32488E-13  2.81641E-13  2.00166E-13  1.64623E-13  3.29544E-13  3.42429E-13  2.77157E-13  1.86394E-13
 16.800  9.84185E-14  2.00031E-13  2.15126E-13  1.83195E-13  1.31048E-13  1.04321E-13  2.09243E-13  2.18385E-13  1.77898E-13  1.20591E-13
 16.900  6.30166E-14  1.28284E-13  1.38455E-13  1.18508E-13  8.53093E-14  6.57940E-14  1.32219E-13  1.38586E-13  1.13600E-13  7.76007E-14
 17.000  4.01448E-14  8.18493E-14  8.86405E-14  7.62441E-14  5.52213E-14  4.12989E-14  8.31476E-14  8.75122E-14  7.21699E-14  4.96701E-14
 17.100  2.54449E-14  5.19551E-14  5.64505E-14  4.87868E-14  3.55448E-14  2.58007E-14  5.20378E-14  5.49892E-14  4.56157E-14  3.16240E-14
 17.200  1.60463E-14  3.28108E-14  3.57620E-14  3.10489E-14  2.27519E-14  1.60424E-14  3.24121E-14  3.43836E-14  2.86856E-14  2.00283E-14
 17.300  1.00681E-14  2.06149E-14  2.25374E-14  1.96539E-14  1.44827E-14  9.92779E-15  2.00918E-14  2.13942E-14  1.79478E-14  1.26179E-14
 17.400  6.28534E-15  1.28863E-14  1.41292E-14  1.23743E-14  9.16810E-15  6.11486E-15  1.23953E-14  1.32470E-14  1.11728E-14  7.90788E-15
 17.500  3.90405E-15  8.01424E-15  8.81195E-15  7.74949E-15  5.77198E-15  3.74863E-15  7.61073E-15  8.16245E-15  6.92041E-15  4.93026E-15
 17.600  2.41275E-15  4.95889E-15  5.46729E-15  4.82740E-15  3.61408E-15  2.28725E-15  4.65081E-15  5.00508E-15  4.26502E-15  3.05793E-15
 17.700  1.48361E-15  3.05281E-15  3.37461E-15  2.99124E-15  2.25066E-15  1.38903E-15  2.82858E-15  3.05417E-15  2.61541E-15  1.88688E-15
 17.800  9.07703E-16  1.86987E-15  2.07221E-15  1.84372E-15  1.39403E-15  8.39597E-16  1.71217E-15  1.85469E-15  1.59586E-15  1.15831E-15
 17.900  5.52568E-16  1.13952E-15  1.26593E-15  1.13046E-15  8.58810E-16  5.05114E-16  1.03149E-15  1.12085E-15  9.68927E-16  7.07434E-16
 18.000  3.34694E-16  6.90942E-16  7.69403E-16  6.89508E-16  5.26254E-16  3.02462E-16  6.18488E-16  6.74113E-16  5.85377E-16  4.29862E-16
 18.100  2.01714E-16  4.16839E-16  4.65238E-16  4.18366E-16  3.20757E-16  1.80267E-16  3.69099E-16  4.03482E-16  3.51912E-16  2.59876E-16
 18.200  1.20962E-16  2.50212E-16  2.79884E-16  2.52530E-16  1.94470E-16  1.06937E-16  2.19232E-16  2.40340E-16  2.10520E-16  1.56316E-16
 18.300  7.21764E-17  1.49439E-16  1.67521E-16  1.51642E-16  1.17282E-16  6.31406E-17  1.29603E-16  1.42477E-16  1.25319E-16  9.35506E-17
 18.400  4.28524E-17  8.88061E-17  9.97598E-17  9.05901E-17  7.03598E-17  3.71071E-17  7.62573E-17  8.40587E-17  7.42356E-17  5.57065E-17
 18.500  2.53158E-17  5.25105E-17  5.91072E-17  5.38401E-17  4.19894E-17  2.17058E-17  4.46582E-17  4.93562E-17  4.37605E-17  3.30056E-17
 18.600  1.48817E-17  3.08944E-17  3.48442E-17  3.18348E-17  2.49280E-17  1.26376E-17  2.60303E-17  2.88420E-17  2.56704E-17  1.94580E-17
 18.700  8.70473E-18  1.80862E-17  2.04376E-17  1.87274E-17  1.47223E-17  7.32364E-18  1.51013E-17  1.67741E-17  1.49854E-17  1.14141E-17
 18.800  5.06650E-18  1.05355E-17  1.19274E-17  1.09607E-17  8.64993E-18  4.22438E-18  8.71988E-18  9.70916E-18  8.70547E-18  6.66238E-18
 18.900  2.93436E-18  6.10666E-18  6.92604E-18  6.38248E-18  5.05600E-18  2.42535E-18  5.01151E-18  5.59318E-18  5.03281E-18  3.86958E-18
 19.000  1.69112E-18  3.52208E-18  4.00175E-18  3.69777E-18  2.94014E-18  1.38599E-18  2.86676E-18  3.20680E-18  2.89553E-18  2.23640E-18
 19.100  9.69832E-19  2.02138E-18  2.30063E-18  2.13156E-18  1.70099E-18  7.88362E-19  1.63222E-18  1.82989E-18  1.65785E-18  1.28616E-18
 19.200  5.53455E-19  1.15438E-18  1.31608E-18  1.22255E-18  9.79076E-19  4.46343E-19  9.24980E-19  1.03925E-18  9.44649E-19  7.36047E-19
 19.300  3.14294E-19  6.56015E-19  7.49134E-19  6.97673E-19  5.60687E-19  2.51531E-19  5.21741E-19  5.87433E-19  5.35680E-19  4.19165E-19
 19.400  1.77608E-19  3.70973E-19  4.24312E-19  3.96153E-19  3.19463E-19  1.41089E-19  2.92919E-19  3.30479E-19  3.02311E-19  2.37541E-19
 19.500  9.98767E-20  2.08756E-19  2.39147E-19  2.23824E-19  1.81102E-19  7.87732E-20  1.63686E-19  1.85046E-19  1.69793E-19  1.33959E-19
 19.600  5.58915E-20  1.16898E-19  1.34122E-19  1.25830E-19  1.02150E-19  4.37770E-20  9.10438E-20  1.03125E-19  9.49088E-20  7.51779E-20
 19.700  3.11252E-20  6.51413E-20  7.48517E-20  7.03892E-20  5.73281E-20  2.42158E-20  5.04037E-20  5.72014E-20  5.27981E-20  4.19853E-20
 19.800  1.72491E-20  3.61231E-20  4.15690E-20  3.91811E-20  3.20127E-20  1.33332E-20  2.77749E-20  3.15794E-20  2.92319E-20  2.33345E-20
 19.900  9.51288E-21  1.99343E-20  2.29727E-20  2.17021E-20  1.77872E-20  7.30734E-21  1.52342E-20  1.73524E-20  1.61075E-20  1.29062E-20
  67 157 200   0.100
  0.000  5.94423E-02 -3.18075E-16 -4.16334E-16 -5.25389E-16 -6.00806E-16  1.02913E-01 -5.12023E-16 -8.74301E-16 -6.50482E-16 -2.27448E-15
  0.100  5.94971E-02 -5.34249E-05 -3.37400E-08 -4.93117E-12 -1.83103E-15  1.02795E-01  6.69137E-05  1.12544E-08 -1.03146E-11  8.58294E-17
  0.200  5.96599E-02 -2.10607E-04 -5.33573E-07 -3.10846E-10 -1.94890E-13  1.02448E-01  2.63115E-04  1.77370E-07 -6.55912E-10  2.07121E-13
  0.300  5.99252E-02 -4.62443E-04 -2.64912E-06 -3.45232E-09 -4.92121E-12  1.01886E-01  5.75294E-04  8.75582E-07 -7.39393E-09  5.27304E-12
  0.400  6.02843E-02 -7.94337E-04 -8.14705E-06 -1.87216E-08 -4.78107E-11  1.01133E-01  9.82272E-04  2.67113E-06 -4.09401E-08  5.16195E-11
  0.500  6.07256E-02 -1.18702E-03 -1.92032E-05 -6.82271E-08 -2.75134E-10  1.00218E-01  1.45643E-03  6.23072E-06 -1.53242E-07  2.99943E-10
  0.600  6.12351E-02 -1.61764E-03 -3.81418E-05 -1.92627E-07 -1.13361E-09  9.91800E-02  1.96557E-03  1.22176E-05 -4.47012E-07  1.25046E-09
  0.700  6.17970E-02 -2.06101E-03 -6.71480E-05 -4.54511E-07 -3.70096E-09  9.80587E-02  2.47504E-03  2.11821E-05 -1.09621E-06  4.13946E-09
  0.800  6.23944E-02 -2.49103E-03 -1.07983E-04 -9.37698E-07 -1.01725E-08  9.68971E-02  2.95005E-03  3.34607E-05 -2.36441E-06  1.15604E-08
  0.900  6.30098E-02 -2.88208E-03 -1.61730E-04 -1.74141E-06 -2.44815E-08  9.57375E-02  3.35793E-03  4.90991E-05 -4.61781E-06  2.83252E-08
  1.000  6.36261E-02 -3.21037E-03 -2.28593E-04 -2.96926E-06 -5.29955E-08  9.46201E-02  3.67019E-03  6.78061E-05 -8.32979E-06  6.25448E-08
  1.100  6.42272E-02 -3.45523E-03 -3.07769E-04 -4.71405E-06 -1.05204E-07  9.35806E-02  3.86438E-03  8.89480E-05 -1.40742E-05  1.26875E-07
  1.200  6.47981E-02 -3.60009E-03 -3.97412E-04 -7.04042E-06 -1.94309E-07  9.26493E-02  3.92539E-03  1.11583E-04 -2.25058E-05  2.39838E-07
  1.300  6.53261E-02 -3.63332E-03 -4.94672E-04 -9.96784E-06 -3.37638E-07  9.18493E-02  3.84636E-03  1.34533E-04 -3.43260E-05  4.27126E-07
  1.400  6.58005E-02 -3.54874E-03 -5.95827E-04 -1.34570E-05 -5.56864E-07  9.11959E-02  3.62901E-03  1.56490E-04 -5.02363E-05  7.22763E-07
  1.500  6.62134E-02 -3.34580E-03 -6.96484E-04 -1.74021E-05 -8.78028E-07  9.06963E-02  3.28342E-03  1.76137E-04 -7.08786E-05  1.17003E-06
  1.600  6.65592E-02 -3.02955E-03 -7.91829E-04 -2.16305E-05 -1.33147E-06  9.03500E-02  2.82727E-03  1.92291E-04 -9.67680E-05  1.82210E-06
  1.700  6.68353E-02 -2.61024E-03 -8.76909E-04 -2.59113E-05 -1.95177E-06  9.01485E-02  2.28470E-03  2.04026E-04 -1.28222E-04  2.74220E-06
  1.800  6.70413E-02 -2.10271E-03 -9.46931E-04 -2.99712E-05 -2.77785E-06  9.00770E-02  1.68471E-03  2.10800E-04 -1.65287E-04  4.00344E-06
  1.900  6.71796E-02 -1.52560E-03 -9.97543E-04 -3.35163E-05 -3.85339E-06  9.01150E-02  1.05934E-03  2.12541E-04 -2.07683E-04  5.68808E-06
  2.000  6.72543E-02 -9.00392E-04 -1.02509E-03 -3.62563E-05 -5.22759E-06  9.02381E-02  4.41708E-04  2.09707E-04 -2.54743E-04  7.88634E-06
  2.100  6.72716E-02 -2.50301E-04 -1.02681E-03 -3.79287E-05 -6.95627E-06  9.04190E-02 -1.35971E-04  2.03302E-04 -3.05391E-04  1.06947E-05
  2.200  6.72391E-02  4.00763E-04 -1.00104E-03 -3.83174E-05 -9.10323E-06  9.06297E-02 -6.44310E-04  1.94844E-04 -3.58130E-04  1.42137E-05
  2.300  6.71654E-02  1.02931E-03 -9.47266E-04 -3.72642E-05 -1.17416E-05  9.08426E-02 -1.05842E-03  1.86293E-04 -4.11059E-04  1.85452E-05
  2.400  6.70601E-02  1.61328E-03 -8.66213E-04 -3.46704E-05 -1.49546E-05  9.10322E-02 -1.35929E-03  1.79924E-04 -4.61923E-04  2.37894E-05
  2.500  6.69331E-02  2.13300E-03 -7.59824E-04 -3.04883E-05 -1.88360E-05  9.11763E-02 -1.53477E-03  1.78162E-04 -5.08183E-04  3.00409E-05
  2.600  6.67941E-02  2.57193E-03 -6.31219E-04 -2.47032E-05 -2.34883E-05  9.12569E-02 -1.58014E-03  1.83382E-04 -5.47117E-04  3.73855E-05
  2.700  6.66528E-02  2.91738E-03 -4.84607E-04 -1.73101E-05 -2.90205E-05  9.12610E-02 -1.49815E-03  1.97678E-04 -5.75948E-04  4.58953E-05
  2.800  6.65179E-02  3.16092E-03 -3.25156E-04 -8.28723E-06 -3.55426E-05  9.11811E-02 -1.29863E-03  2.22625E-04 -5.91978E-04  5.56249E-05
  2.900  6.63971E-02  3.29877E-03 -1.58843E-04  2.42519E-06 -4.31588E-05  9.10149E-02 -9.97620E-04  2.59039E-04 -5.92745E-04  6.66068E-05
  3.000  6.62965E-02  3.33189E-03  7.72810E-06  1.49388E-05 -5.19586E-05  9.07650E-02 -6.16111E-04  3.06765E-04 -5.76180E-04  7.88462E-05
  3.100  6.62205E-02  3.26600E-03  1.67540E-04  2.94170E-05 -6.20063E-05  9.04386E-02 -1.78459E-04  3.64499E-04 -5.40760E-04  9.23162E-05
  3.200  6.61712E-02  3.11132E-03  3.13396E-04  4.60574E-05 -7.33307E-05  9.00456E-02  2.89425E-04  4.29689E-04 -4.85655E-04  1.06952E-04
  3.300  6.61482E-02  2.88231E-03  4.38178E-04  6.50577E-05 -8.59144E-05  8.95983E-02  7.61976E-04  4.98516E-04 -4.10840E-04  1.22644E-04
  3.400  6.61485E-02  2.59711E-03  5.35139E-04  8.65645E-05 -9.96859E-05  8.91094E-02  1.21586E-03  5.65973E-04 -3.17196E-04  1.39232E-04
  3.500  6.61658E-02  2.27693E-03  5.98203E-04  1.10610E-04 -1.14515E-04  8.85908E-02  1.63171E-03  6.26074E-04 -2.06557E-04  1.56497E-04
  3.600  6.61912E-02  1.94527E-03  6.22282E-04  1.37046E-04 -1.30211E-04  8.80522E-02  1.99554E-03  6.72164E-04 -8.17144E-05  1.74153E-04
  3.700  6.62125E-02  1.62710E-03  6.03595E-04  1.65478E-04 -1.46533E-04  8.75000E-02  2.29983E-03  6.97349E-04  5.36276E-05  1.91837E-04
  3.800  6.62147E-02  1.34783E-03  5.39967E-04  1.95218E-04 -1.63193E-04  8.69359E-02  2.54408E-03  6.95012E-04  1.94958E-04  2.09109E-04
  3.900  6.61803E-02  1.13240E-03  4.31090E-04  2.25257E-04 -1.79880E-04  8.63568E-02  2.73491E-03  6.59384E-04  3.37121E-04  2.25444E-04
  4.000  6.60897E-02  1.00413E-03  2.78729E-04  2.54277E-04 -1.96278E-04  8.57543E-02  2.88556E-03  5.86133E-04  4.74534E-04  2.40233E-04
  4.100  6.59218E-02  9.83804E-04  8.68371E-05  2.80688E-04 -2.12089E-04  8.51147E-02  3.01491E-03  4.72918E-04  6.01454E-04  2.52794E-04
  4.200  6.56548E-02  1.08861E-03 -1.38423E-04  3.02719E-04 -2.27059E-04  8.44199E-02  3.14608E-03  3.19859E-04  7.12274E-04  2.62384E-04
  4.300  6.52669E-02  1.33136E-03 -3.88786E-04  3.18535E-04 -2.40997E-04  8.36478E-02  3.30465E-03  1.29864E-04  8.01851E-04  2.68227E-04
  4.400  6.47372E-02  1.71969E-03 -6.54125E-04  3.26387E-04 -2.53791E-04  8.27741E-02  3.51668E-03 -9.12174E-05  8.65819E-04  2.69546E-04
  4.500  6.40467E-02  2.25564E-03 -9.22809E-04  3.24774E-04 -2.65416E-04  8.17732E-02  3.80667E-03 -3.34664E-04  9.00890E-04  2.65607E-04
  4.600  6.31792E-02  2.93526E-03 -1.18220E-03  3.12616E-04 -2.75931E-04  8.06200E-02  4.19562E-03 -5.89169E-04  9.05107E-04  2.55769E-04
  4.700  6.21218E-02  3.74867E-03 -1.41925E-03  2.89396E-04 -2.85464E-04  7.92914E-02  4.69922E-03 -8.41365E-04  8.78025E-04  2.39542E-04
  4.800  6.08659E-02  4.68021E-03 -1.62114E-03  2.55283E-04 -2.94191E-04  7.77677E-02  5.32655E-03 -1.07653E-03  8.20806E-04  2.16639E-04
  4.900  5.94074E-02  5.70903E-03 -1.77599E-03  2.11199E-04 -3.02306E-04  7.60338E-02  6.07909E-03 -1.27946E-03  7.36223E-04  1.87027E-04
  5.000  5.77472E-02  6.80979E-03 -1.87354E-03  1.58828E-04 -3.09984E-04  7.40804E-02  6.95030E-03 -1.43544E-03  6.28545E-04  1.50969E-04
  5.100  5.58912E-02  7.95367E-03 -1.90575E-03  1.00559E-04 -3.17345E-04  7.19044E-02  7.92581E-03 -1.53121E-03  5.03326E-04  1.09049E-04
  5.200  5.38502E-02  9.10951E-03 -1.86733E-03  3.93681E-05 -3.24422E-04  6.95092E-02  8.98399E-03 -1.55591E-03  3.67105E-04  6.21776E-05
  5.300  5.16396E-02  1.02451E-02 -1.75609E-03 -2.13586E-05 -3.31137E-04  6.69048E-02  1.00971E-02 -1.50185E-03  2.27023E-04  1.15758E-05
  5.400  4.92787E-02  1.13285E-02 -1.57313E-03 -7.80490E-05 -3.37290E-04  6.41076E-02  1.12328E-02 -1.36514E-03  9.03985E-05 -4.12654E-05
  5.500  4.67904E-02  1.23292E-02 -1.32284E-03 -1.27189E-04 -3.42557E-04  6.11391E-02  1.23558E-02 -1.14605E-03 -3.57105E-05 -9.46480E-05
  5.600  4.42000E-02  1.32197E-02 -1.01271E-03 -1.65578E-04 -3.46511E-04  5.80257E-02  1.34301E-02 -8.49042E-04 -1.44934E-04 -1.46749E-04
  5.700  4.15348E-02  1.39761E-02 -6.52951E-04 -1.90557E-04 -3.48648E-04  5.47974E-02  1.44203E-02 -4.82619E-04 -2.31969E-04 -1.95717E-04
  5.800  3.88229E-02  1.45793E-02 -2.55935E-04 -2.00213E-04 -3.48431E-04  5.14865E-02  1.52940E-02 -5.88337E-05 -2.92875E-04 -2.39776E-04
  5.900  3.60926E-02  1.50156E-02  1.64443E-04 -1.93515E-04 -3.45339E-04  4.81267E-02  1.60231E-02  4.07400E-04 -3.25284E-04 -2.77329E-04
  6.000  3.33713E-02  1.52767E-02  5.93505E-04 -1.70390E-04 -3.38917E-04  4.47518E-02  1.65850E-02  8.99174E-04 -3.28487E-04 -3.07050E-04
  6.100  3.06853E-02  1.53603E-02  1.01655E-03 -1.31727E-04 -3.28828E-04  4.13947E-02  1.69636E-02  1.39855E-03 -3.03420E-04 -3.27967E-04
  6.200  2.80586E-02  1.52695E-02  1.41958E-03 -7.93056E-05 -3.14888E-04  3.80867E-02  1.71497E-02  1.88758E-03 -2.52525E-04 -3.39510E-04
  6.300  2.55130E-02  1.50127E-02  1.78997E-03 -1.56651E-05 -2.97101E-04  3.48565E-02  1.71413E-02  2.34925E-03 -1.79530E-04 -3.41548E-04
  6.400  2.30674E-02  1.46027E-02  2.11703E-03  5.60797E-05 -2.75666E-04  3.17297E-02  1.69431E-02  2.76833E-03 -8.91500E-05 -3.34379E-04
  6.500  2.07376E-02  1.40560E-02  2.39238E-03  1.32456E-04 -2.50982E-04  2.87285E-02  1.65659E-02  3.13210E-03  1.32583E-05 -3.18710E-04
  6.600  1.85363E-02  1.33921E-02  2.61023E-03  2.09865E-04 -2.23619E-04  2.58715E-02  1.60257E-02  3.43085E-03  1.22061E-04 -2.95596E-04
  6.700  1.64731E-02  1.26325E-02  2.76748E-03  2.84811E-04 -1.94293E-04  2.31731E-02  1.53430E-02  3.65815E-03  2.31699E-04 -2.66369E-04
  6.800  1.45544E-02  1.17993E-02  2.86362E-03  3.54106E-04 -1.63820E-04  2.06443E-02  1.45408E-02  3.81094E-03  3.37010E-04 -2.32548E-04
  6.900  1.27840E-02  1.09150E-02  2.90058E-03  4.15045E-04 -1.33064E-04  1.82923E-02  1.36445E-02  3.88940E-03  4.33496E-04 -1.95745E-04
  7.000  1.11627E-02  1.00015E-02  2.88235E-03  4.65525E-04 -1.02884E-04  1.61209E-02  1.26797E-02  3.89664E-03  5.17512E-04 -1.57569E-04
  7.100  9.68915E-03  9.07878E-03  2.81463E-03  5.04121E-04 -7.40866E-05  1.41309E-02  1.16717E-02  3.83827E-03  5.86397E-04 -1.19540E-04
  7.200  8.35989E-03  8.16534E-03  2.70439E-03  5.30110E-04 -4.73794E-05  1.23200E-02  1.06445E-02  3.72186E-03  6.38510E-04 -8.30162E-05
  7.300  7.16966E-03  7.27706E-03  2.55936E-03  5.43435E-04 -2.33391E-05  1.06838E-02  9.62003E-03  3.55636E-03  6.73212E-04 -4.91364E-05
  7.400  6.11179E-03  6.42721E-03  2.38761E-03  5.44649E-04 -2.38766E-06  9.21577E-03  8.61733E-03  3.35153E-03  6.90772E-04 -1.87847E-05
  7.500  5.17847E-03  5.62632E-03  2.19717E-03  5.34805E-04  1.52175E-05  7.90771E-03  7.65259E-03  3.11736E-03  6.92240E-04  7.42667E-06
  7.600  4.36110E-03  4.88217E-03  1.99563E-03  5.15342E-04  2.93821E-05  6.75013E-03  6.73876E-03  2.86361E-03  6.79281E-04  2.91546E-05
  7.700  3.65053E-03  4.19992E-03  1.78987E-03  4.87954E-04  4.01626E-05  5.73267E-03  5.88553E-03  2.59938E-03  6.54000E-04  4.63063E-05
  7.800  3.03736E-03  3.58234E-03  1.58591E-03  4.54467E-04  4.77458E-05  4.84434E-03  5.09957E-03  2.33280E-03  6.18759E-04  5.90080E-05
  7.900  2.51213E-03  3.03008E-03  1.38872E-03  4.16719E-04  5.24227E-05  4.07388E-03  4.38467E-03  2.07083E-03  5.76011E-04  6.75638E-05
  8.000  2.06552E-03  2.54200E-03  1.20221E-03  3.76461E-04  5.45588E-05  3.40999E-03  3.74214E-03  1.81917E-03  5.28159E-04  7.24112E-05
  8.100  1.68854E-03  2.11550E-03  1.02926E-03  3.35279E-04  5.45641E-05  2.84158E-03  3.17117E-03  1.58217E-03  4.77435E-04  7.40747E-05
  8.200  1.37266E-03  1.74687E-03  8.71739E-04  2.94542E-04  5.28654E-05  2.35797E-03  2.66922E-03  1.36295E-03  4.25817E-04  7.31227E-05
  8.300  1.10987E-03  1.43164E-03  7.30641E-04  2.55365E-04  4.98812E-05  1.94899E-03  2.23245E-03  1.16345E-03  3.74972E-04  7.01295E-05
  8.400  8.92821E-04  1.16482E-03  6.06208E-04  2.18601E-04  4.60020E-05  1.60516E-03  1.85607E-03  9.84593E-04  3.26231E-04  6.56430E-05
  8.500  7.14793E-04  9.41228E-04  4.98070E-04  1.84848E-04  4.15757E-05  1.31772E-03  1.53472E-03  8.26446E-04  2.80586E-04  6.01622E-05
  8.600  5.69767E-04  7.55646E-04  4.05392E-04  1.54468E-04  3.68981E-05  1.07869E-03  1.26273E-03  6.88400E-04  2.38715E-04  5.41205E-05
  8.700  4.52403E-04  6.03035E-04  3.27004E-04  1.27617E-04  3.22089E-05  8.80916E-04  1.03439E-03  5.69339E-04  2.01010E-04  4.78775E-05
  8.800  3.58022E-04  4.78643E-04  2.61531E-04  1.04284E-04  2.76917E-05  7.18028E-04  8.44164E-04  4.67794E-04  1.67620E-04  4.17168E-05
  8.900  2.82575E-04  3.78105E-04  2.07496E-04  8.43263E-05  2.34770E-05  5.84431E-04  6.86803E-04  3.82083E-04  1.38502E-04  3.58492E-05
  9.000  2.22594E-04  2.97487E-04  1.63403E-04  6.75071E-05  1.96486E-05  4.75260E-04  5.57463E-04  3.10434E-04  1.13465E-04  3.04190E-05
  9.100  1.75146E-04  2.33319E-04  1.27808E-04  5.35288E-05  1.62504E-05  3.86330E-04  4.51767E-04  2.51071E-04  9.22156E-05  2.55134E-05
  9.200  1.37776E-04  1.82588E-04  9.93630E-05  4.20625E-05  1.32946E-05  3.14077E-04  3.65825E-04  2.02288E-04  7.43954E-05  2.11726E-05
  9.300  1.08450E-04  1.42721E-04  7.68450E-05  3.27712E-05  1.07695E-05  2.55489E-04  2.96242E-04  1.62495E-04  5.96153E-05  1.74004E-05
  9.400  8.55026E-05  1.11555E-04  5.91744E-05  2.53275E-05  8.64663E-06  2.08047E-04  2.40097E-04  1.30251E-04  4.74804E-05  1.41741E-05
  9.500  6.75802E-05  8.72966E-05  4.54180E-05  1.94266E-05  6.88700E-06  1.69657E-04  1.94908E-04  1.04277E-04  3.76096E-05  1.14533E-05
  9.600  5.35953E-05  6.84760E-05  3.47851E-05  1.47937E-05  5.44652E-06  1.38595E-04  1.58595E-04  8.34581E-05  2.96482E-05  9.18684E-06
  9.700  4.26812E-05  5.39057E-05  2.66178E-05  1.11880E-05  4.27980E-06  1.13450E-04  1.29432E-04  6.68418E-05  2.32762E-05  7.31935E-06
  9.800  3.41526E-05  4.26360E-05  2.03776E-05  8.40375E-06  3.34309E-06  9.30700E-05  1.06001E-04  5.36234E-05  1.82117E-05  5.79503E-06
  9.900  2.74720E-05  3.39152E-05  1.56301E-05  6.26870E-06  2.59621E-06  7.65261E-05  8.71478E-05  4.31330E-05  1.42116E-05  4.56089E-06
 10.000  2.22203E-05  2.71540E-05  1.20295E-05  4.64146E-06  2.00360E-06  6.30674E-05  7.19419E-05  3.48192E-05  1.10701E-05  3.56860E-06
 10.100  1.80729E-05  2.18944E-05  9.30372E-06  3.40787E-06  1.53475E-06  5.20908E-05  5.96363E-05  2.82324E-05  8.61535E-06  2.77545E-06
 10.200  1.47794E-05  1.77829E-05  7.24126E-06  2.47710E-06  1.16420E-06  4.31131E-05  4.96358E-05  2.30096E-05  6.70589E-06  2.14467E-06
 10.300  1.21475E-05  1.45484E-05  5.67900E-06  1.77780E-06  8.71198E-07  3.57480E-05  4.14686E-05  1.88598E-05  5.22649E-06  1.64525E-06
 10.400  1.00298E-05  1.19843E-05  4.49227E-06  1.25456E-06  6.39139E-07  2.96866E-05  3.47620E-05  1.55515E-05  4.08416E-06  1.25146E-06
 10.500  8.31360E-06  9.93387E-06  3.58648E-06  8.64688E-07  4.54990E-07  2.46823E-05  2.92230E-05  1.29017E-05  3.20450E-06  9.42246E-07
 10.600  6.91259E-06  8.27846E-06  2.89038E-06  5.75564E-07  3.08660E-07  2.05378E-05  2.46212E-05  1.07665E-05  2.52836E-06  7.00555E-07
 10.700  5.76085E-06  6.92868E-06  2.35056E-06  3.62386E-07  1.92411E-07  1.70956E-05  2.07760E-05  9.03357E-06  2.00906E-06  5.12660E-07
 10.800  4.80779E-06  5.81721E-06  1.92730E-06  2.06379E-07  1.00344E-07  1.42292E-05  1.75458E-05  7.61566E-06  1.60995E-06  3.67566E-07
 10.900  4.01451E-06  4.89343E-06  1.59120E-06  9.33776E-08  2.79628E-08  1.18369E-05  1.48192E-05  6.44526E-06  1.30248E-06  2.56481E-07
 11.000  3.35096E-06  4.11925E-06  1.32064E-06  1.27103E-08 -2.81939E-08  9.83688E-06  1.25086E-05  5.47049E-06  1.06451E-06  1.72372E-07
 11.100  2.79378E-06  3.46593E-06  1.09984E-06 -4.36484E-08 -7.08295E-08  8.16271E-06  1.05444E-05  4.65160E-06  8.79045E-07  1.09607E-07
 11.200  2.32463E-06  2.91165E-06  9.17341E-07 -8.17326E-08 -1.02109E-07  6.76042E-06  8.87134E-06  3.95825E-06  7.33121E-07  6.36645E-08
 11.300  1.92904E-06  2.43973E-06  7.64848E-07 -1.06082E-07 -1.23819E-07  5.58584E-06  7.44478E-06  3.36727E-06  6.16949E-07  3.09058E-08
 11.400  1.59538E-06  2.03724E-06  6.36380E-07 -1.20120E-07 -1.37477E-07  4.60259E-06  6.22844E-06  2.86093E-06  5.23209E-07  8.39609E-09
 11.500  1.31421E-06  1.69399E-06  5.27595E-07 -1.26437E-07 -1.44415E-07  3.78054E-06  5.19240E-06  2.42561E-06  4.46480E-07 -6.23369E-09
 11.600  1.07777E-06  1.40173E-06  4.35302E-07 -1.27009E-07 -1.45821E-07  3.09454E-06  4.31165E-06  2.05068E-06  3.82784E-07 -1.48953E-08
 11.700  8.79560E-07  1.15369E-06  3.57090E-07 -1.23357E-07 -1.42772E-07  2.52349E-06  3.56501E-06  1.72772E-06  3.29226E-07 -1.91282E-08
 11.800  7.14061E-07  9.44101E-07  2.91074E-07 -1.16666E-07 -1.36247E-07  2.04956E-06  2.93430E-06  1.44989E-06  2.83704E-07 -2.01670E-08
 11.900  5.76546E-07  7.67982E-07  2.35703E-07 -1.07874E-07 -1.27132E-07  1.65761E-06  2.40372E-06  1.21153E-06  2.44689E-07 -1.89949E-08
 12.000  4.62915E-07  6.20936E-07  1.89647E-07 -9.77292E-08 -1.16219E-07  1.33474E-06  1.95947E-06  1.00778E-06  2.11059E-07 -1.63872E-08
 12.100  3.69593E-07  4.99033E-07  1.51717E-07 -8.68386E-08 -1.04207E-07  1.06994E-06  1.58942E-06  8.34414E-07  1.81971E-07 -1.29469E-08
 12.200  2.93452E-07  3.98745E-07  1.20821E-07 -7.56924E-08 -9.16950E-08  8.53764E-07  1.28284E-06  6.87658E-07  1.56776E-07 -9.13377E-09
 12.300  2.31757E-07  3.16893E-07  9.59529E-08 -6.46847E-08 -7.91846E-08  6.78157E-07  1.03030E-06  5.64125E-07  1.34949E-07 -5.28934E-09
 12.400  1.82122E-07  2.50630E-07  7.61772E-08 -5.41265E-08 -6.70795E-08  5.36233E-07  8.23489E-07  4.60751E-07  1.16058E-07 -1.65723E-09
 12.500  1.42474E-07  1.97421E-07  6.06382E-08 -4.42544E-08 -5.56896E-08  4.22130E-07  6.55119E-07  3.74759E-07  9.97273E-08  1.59884E-09
 12.600  1.11029E-07  1.55028E-07  4.85632E-08 -3.52383E-08 -4.52370E-08  3.30880E-07  5.18853E-07  3.03647E-07  8.56295E-08  4.37978E-09
 12.700  8.62593E-08  1.21505E-07  3.92675E-08 -2.71876E-08 -3.58643E-08  2.58290E-07  4.09208E-07  2.45175E-07  7.34728E-08  6.63781E-09
 12.800  6.68744E-08  9.51745E-08  3.21580E-08 -2.01584E-08 -2.76447E-08  2.00845E-07  3.21480E-07  1.97356E-07  6.29975E-08  8.36483E-09
 12.900  5.17925E-08  7.46126E-08  2.67326E-08 -1.41608E-08 -2.05931E-08  1.55615E-07  2.51666E-07  1.58444E-07  5.39731E-08  9.58239E-09
 13.000  4.01178E-08  5.86286E-08  2.25770E-08 -9.16658E-09 -1.46771E-08  1.20176E-07  1.96391E-07  1.26921E-07  4.61967E-08  1.03330E-08
 13.100  3.11170E-08  4.62404E-08  1.93583E-08 -5.11729E-09 -9.82886E-09  9.25363E-08  1.52834E-07  1.01485E-07  3.94917E-08  1.06726E-08
 13.200  2.41970E-08  3.66497E-08  1.68166E-08 -1.93240E-09 -5.95538E-09  7.10718E-08  1.18658E-07  8.10293E-08  3.37060E-08  1.06649E-08
 13.300  1.88837E-08  2.92173E-08  1.47554E-08  4.83239E-10 -2.94801E-09  5.44678E-08  9.19451E-08  6.46225E-08  2.87099E-08  1.03756E-08
 13.400  1.48026E-08  2.34385E-08  1.30312E-08  2.23246E-09 -6.90735E-10  4.16685E-08  7.11349E-08  5.14906E-08  2.43933E-08  9.86926E-09
 13.500  1.16614E-08  1.89205E-08  1.15431E-08  3.41989E-09  9.33142E-10  3.18317E-08  5.49682E-08  4.09957E-08  2.06638E-08  9.20617E-09
 13.600  9.23420E-09  1.53617E-08  1.02237E-08  4.14708E-09  2.03577E-09  2.42908E-08  4.24368E-08  3.26161E-08  1.74432E-08  8.44026E-09
 13.700  7.34859E-09  1.25331E-08  9.03039E-09  4.50889E-09  2.72097E-09  1.85217E-08  3.27398E-08  2.59293E-08  1.46659E-08  7.61809E-09
 13.800  5.87387E-09  1.02629E-08  7.93815E-09  4.59089E-09  3.08180E-09  1.41148E-08  2.52450E-08  2.05943E-08  1.22759E-08  6.77830E-09
 13.900  4.71190E-09  8.42311E-09  6.93381E-09  4.46786E-09  3.19921E-09  1.07521E-08  1.94567E-08  1.63383E-08  1.02252E-08  5.95162E-09
 14.000  3.78930E-09  6.91889E-09  6.01139E-09  4.20315E-09  3.14162E-09  8.18782E-09  1.49881E-08  1.29432E-08  8.47231E-09  5.16133E-09
 14.100  3.05144E-09  5.68000E-09  5.16884E-09  3.84878E-09  2.96526E-09  6.23296E-09  1.15388E-08  1.02351E-08  6.98056E-09  4.42392E-09
 14.200  2.45758E-09  4.65416E-09  4.40560E-09  3.44606E-09  2.71499E-09  4.74275E-09  8.87611E-09  8.07604E-09  5.71758E-09  3.74999E-09
 14.300  1.97724E-09  3.80201E-09  3.72117E-09  3.02657E-09  2.42548E-09  3.60663E-09  6.82065E-09  6.35595E-09  4.65437E-09  3.14522E-09
 14.400  1.58740E-09  3.09339E-09  3.11420E-09  2.61343E-09  2.12251E-09  2.74034E-09  5.23397E-09  4.98726E-09  3.76486E-09  2.61133E-09
 14.500  1.27048E-09  2.50466E-09  2.58218E-09  2.22258E-09  1.82445E-09  2.07972E-09  4.00946E-09  3.90003E-09  3.02554E-09  2.14697E-09
 14.600  1.01284E-09  2.01682E-09  2.12134E-09  1.86413E-09  1.54359E-09  1.57601E-09  3.06496E-09  3.03832E-09  2.41528E-09  1.74860E-09
 14.700  8.03714E-10  1.61422E-09  1.72683E-09  1.54360E-09  1.28743E-09  1.19208E-09  2.33711E-09  2.35724E-09  1.91515E-09  1.41119E-09
 14.800  6.34444E-10  1.28370E-09  1.39302E-09  1.26300E-09  1.05983E-09  8.99652E-10  1.77697E-09  1.82069E-09  1.50826E-09  1.12883E-09
 14.900  4.97984E-10  1.01399E-09  1.11375E-09  1.02188E-09  8.61969E-10  6.77175E-10  1.34669E-09  1.39962E-09  1.17968E-09  8.95198E-10
 15.000  3.88515E-10  7.95399E-10  8.82691E-10  8.18047E-10  6.93154E-10  5.08184E-10  1.01691E-09  1.07055E-09  9.16351E-10  7.03974E-10
 15.100  3.01196E-10  6.19513E-10  6.93564E-10  6.48283E-10  5.51487E-10  3.80082E-10  7.64870E-10  8.14582E-10  7.06903E-10  5.49068E-10
 15.200  2.31978E-10  4.79059E-10  5.40370E-10  5.08801E-10  4.34356E-10  2.83221E-10  5.72860E-10  6.16467E-10  5.41578E-10  4.24822E-10
 15.300  1.77475E-10  3.67773E-10  4.17533E-10  3.95632E-10  3.38816E-10  2.10198E-10  4.27120E-10  4.63940E-10  4.12070E-10  3.26116E-10
 15.400  1.34857E-10  2.80294E-10  3.20002E-10  3.04889E-10  2.61856E-10  1.55335E-10  3.16948E-10  3.47164E-10  3.11388E-10  2.48421E-10
 15.500  1.01772E-10  2.12078E-10  2.43301E-10  2.32931E-10  2.00583E-10  1.14271E-10  2.34031E-10  2.58273E-10  2.33705E-10  1.87811E-10
 15.600  7.62759E-11  1.59307E-10  1.83538E-10  1.76465E-10  1.52332E-10  8.36634E-11  1.71920E-10  1.91012E-10  1.74214E-10  1.40937E-10
 15.700  5.67737E-11  1.18810E-10  1.37392E-10  1.32599E-10  1.14728E-10  6.09515E-11  1.25627E-10  1.40426E-10  1.28994E-10  1.04993E-10
 15.800  4.19674E-11  8.79779E-11  1.02073E-10  9.88476E-11  8.57103E-11  4.41787E-11  9.13040E-11  1.02618E-10  9.48731E-11  7.76553E-11
 15.900  3.08100E-11  6.46876E-11  7.52713E-11  7.31167E-11  6.35297E-11  3.18537E-11  6.59929E-11  7.45360E-11  6.93153E-11  5.70309E-11
 16.000  2.24648E-11  4.72308E-11  5.51023E-11  5.36747E-11  4.67287E-11  2.28442E-11  4.74318E-11  5.38109E-11  5.03094E-11  4.15932E-11
 16.100  1.62692E-11  3.42466E-11  4.00482E-11  3.91106E-11  3.41139E-11  1.62937E-11  3.38984E-11  3.86128E-11  3.62765E-11  3.01265E-11
 16.200  1.17031E-11  2.46620E-11  2.89014E-11  2.82915E-11  2.47222E-11  1.15574E-11  2.40881E-11  2.75388E-11  2.59885E-11  2.16736E-11
 16.300  8.36243E-12  1.76397E-11  2.07121E-11  2.03195E-11  1.77876E-11  8.15208E-12  1.70185E-11  1.95217E-11  1.84987E-11  1.54885E-11
 16.400  5.93590E-12  1.25324E-11  1.47415E-11  1.44917E-11  1.27081E-11  5.71774E-12  1.19543E-11  1.37547E-11  1.30836E-11  1.09955E-11
 16.500  4.18591E-12  8.84495E-12  1.04211E-11  1.02643E-11  9.01628E-12  3.98762E-12  8.34849E-12  9.63281E-12  9.19531E-12  7.75512E-12
 16.600  2.93271E-12  6.20158E-12  7.31779E-12  7.22083E-12  6.35348E-12  2.76520E-12  5.79647E-12  6.70554E-12  6.42211E-12  5.43450E-12
 16.700  2.04150E-12  4.32003E-12  5.10482E-12  5.04591E-12  4.44711E-12  1.90659E-12  4.00123E-12  4.63984E-12  4.45744E-12  3.78407E-12
 16.800  1.41208E-12  2.99005E-12  3.53793E-12  3.50289E-12  3.09222E-12  1.30707E-12  2.74598E-12  3.19134E-12  3.07477E-12  2.61830E-12
 16.900  9.70567E-13  2.05640E-12  2.43626E-12  2.41596E-12  2.13614E-12  8.90954E-13  1.87362E-12  2.18202E-12  2.10806E-12  1.80039E-12
 17.000  6.62938E-13  1.40541E-12  1.66699E-12  1.65563E-12  1.46620E-12  6.03846E-13  1.27102E-12  1.48310E-12  1.43653E-12  1.23035E-12
 17.100  4.50016E-13  9.54535E-13  1.13348E-12  1.12741E-12  9.99992E-13  4.06928E-13  8.57261E-13  1.00213E-12  9.73043E-13  8.35669E-13
 17.200  3.03610E-13  6.44319E-13  7.65931E-13  7.62926E-13  6.77758E-13  2.72668E-13  5.74880E-13  6.73183E-13  6.55171E-13  5.64165E-13
 17.300  2.03592E-13  4.32271E-13  5.14392E-13  5.13088E-13  4.56518E-13  1.81670E-13  3.83313E-13  4.49587E-13  4.38534E-13  3.78589E-13
 17.400  1.35702E-13  2.88259E-13  3.43364E-13  3.42959E-13  3.05617E-13  1.20357E-13  2.54128E-13  2.98525E-13  2.91809E-13  2.52548E-13
 17.500  8.99115E-14  1.91076E-13  2.27822E-13  2.27855E-13  2.03358E-13  7.92886E-14  1.67527E-13  1.97083E-13  1.93045E-13  1.67478E-13
 17.600  5.92204E-14  1.25907E-13  1.50260E-13  1.50477E-13  1.34504E-13  5.19410E-14  1.09815E-13  1.29370E-13  1.26970E-13  1.10415E-13
 17.700  3.87772E-14  8.24771E-14  9.85191E-14  9.87879E-14  8.84354E-14  3.38361E-14  7.15808E-14  8.44408E-14  8.30324E-14  7.23730E-14
 17.800  2.52435E-14  5.37133E-14  6.42173E-14  6.44733E-14  5.78040E-14  2.19196E-14  4.63982E-14  5.48045E-14  5.39901E-14  4.71654E-14
 17.900  1.63386E-14  3.47788E-14  4.16159E-14  4.18334E-14  3.75625E-14  1.41214E-14  2.99081E-14  3.53706E-14  3.49074E-14  3.05624E-14
 18.000  1.05145E-14  2.23900E-14  2.68141E-14  2.69871E-14  2.42682E-14  9.04743E-15  1.91722E-14  2.27009E-14  2.24427E-14  1.96919E-14
 18.100  6.72809E-15  1.43324E-14  1.71785E-14  1.73101E-14  1.55894E-14  5.76489E-15  1.22225E-14  1.44889E-14  1.43485E-14  1.26165E-14
 18.200  4.28097E-15  9.12275E-15  1.09432E-14  1.10401E-14  9.95745E-15  3.65329E-15  7.74947E-15  9.19676E-15  9.12265E-15  8.03828E-15
 18.300  2.70869E-15  5.77426E-15  6.93203E-15  7.00163E-15  6.32434E-15  2.30260E-15  4.88671E-15  5.80566E-15  5.76819E-15  5.09300E-15
 18.400  1.70435E-15  3.63451E-15  4.36667E-15  4.41563E-15  3.99437E-15  1.44346E-15  3.06482E-15  3.64504E-15  3.62723E-15  3.20913E-15
 18.500  1.06649E-15  2.27506E-15  2.73547E-15  2.76932E-15  2.50879E-15  9.00021E-16  1.91185E-15  2.27613E-15  2.26852E-15  2.01104E-15
 18.600  6.63701E-16  1.41630E-15  1.70421E-15  1.72726E-15  1.56705E-15  5.58184E-16  1.18624E-15  1.41369E-15  1.41109E-15  1.25339E-15
 18.700  4.10789E-16  8.76888E-16  1.05594E-15  1.07142E-15  9.73462E-16  3.44341E-16  7.32101E-16  8.73336E-16  8.73031E-16  7.76962E-16
 18.800  2.52879E-16  5.39982E-16  6.50720E-16  6.61002E-16  6.01435E-16  2.11300E-16  4.49433E-16  5.36654E-16  5.37251E-16  4.79044E-16
 18.900  1.54835E-16  3.30730E-16  3.98847E-16  4.05597E-16  3.69579E-16  1.28979E-16  2.74451E-16  3.28023E-16  3.28860E-16  2.93784E-16
 19.000  9.42975E-17  2.01485E-16  2.43159E-16  2.47545E-16  2.25886E-16  7.83177E-17  1.66718E-16  1.99445E-16  2.00237E-16  1.79212E-16
 19.100  5.71244E-17  1.22096E-16  1.47454E-16  1.50278E-16  1.37325E-16  4.73078E-17  1.00746E-16  1.20633E-16  1.21280E-16  1.08745E-16
 19.200  3.44228E-17  7.35968E-17  8.89453E-17  9.07464E-17  8.30426E-17  2.84281E-17  6.05636E-17  7.25835E-17  7.30728E-17  6.56397E-17
 19.300  2.06342E-17  4.41298E-17  5.33704E-17  5.45095E-17  4.99526E-17  1.69948E-17  3.62198E-17  4.34465E-17  4.37985E-17  3.94139E-17
 19.400  1.23043E-17  2.63228E-17  3.18568E-17  3.25713E-17  2.98904E-17  1.01076E-17  2.15497E-17  2.58718E-17  2.61161E-17  2.35434E-17
 19.500  7.29905E-18  1.56197E-17  1.89165E-17  1.93612E-17  1.77925E-17  5.98075E-18  1.27558E-17  1.53272E-17  1.54923E-17  1.39907E-17
 19.600  4.30754E-18  9.22070E-18  1.11745E-17  1.14492E-17  1.05362E-17  3.52083E-18  7.51202E-18  9.03390E-18  9.14307E-18  8.27118E-18
 19.700  2.52905E-18  5.41525E-18  6.56713E-18  6.73556E-18  6.20704E-18  2.06219E-18  4.40145E-18  5.29754E-18  5.36842E-18  4.86483E-18
 19.800  1.47727E-18  3.16408E-18  3.83968E-18  3.94222E-18  3.63790E-18  1.20175E-18  2.56587E-18  3.09078E-18  3.13610E-18  2.84675E-18
 19.900  8.58515E-19  1.83933E-18  2.23355E-18  2.29556E-18  2.12125E-18  6.96809E-19  1.48828E-18  1.79419E-18  1.82278E-18  1.65738E-18
  67 158 200   0.100
  0.000  5.92502E-02 -3.02559E-16 -4.57967E-16 -7.25538E-16  3.57622E-16  1.03549E-01 -5.27539E-16 -7.91034E-16 -9.75723E-16 -2.43183E-16
  0.100  5.93067E-02 -5.26928E-05 -3.62914E-08 -5.40871E-12 -1.31605E-15  1.03429E-01  6.81321E-05  1.62414E-08 -1.04402E-11 -9.29818E-16
  0.200  5.94742E-02 -2.07734E-04 -5.74012E-07 -3.40930E-10 -2.07063E-13  1.03073E-01  2.67918E-04  2.56189E-07 -6.64023E-10  1.31834E-13
  0.300  5.97471E-02 -4.56183E-04 -2.85064E-06 -3.78681E-09 -5.19504E-12  1.02496E-01  5.85839E-04  1.26651E-06 -7.48694E-09  3.36411E-12
  0.400  6.01162E-02 -7.83702E-04 -8.77003E-06 -2.05383E-08 -5.03834E-11  1.01723E-01  1.00038E-03  3.87164E-06 -4.14671E-08  3.27916E-11
  0.500  6.05692E-02 -1.17136E-03 -2.06814E-05 -7.48605E-08 -2.89283E-10  1.00786E-01  1.48349E-03  9.05496E-06 -1.55270E-07  1.89378E-10
  0.600  6.10913E-02 -1.59671E-03 -4.11014E-05 -2.11397E-07 -1.18860E-09  9.97222E-02  2.00243E-03  1.78134E-05 -4.53115E-07  7.83726E-10
  0.700  6.16658E-02 -2.03499E-03 -7.24075E-05 -4.98911E-07 -3.86758E-09  9.85742E-02  2.52198E-03  3.10031E-05 -1.11168E-06  2.57229E-09
  0.800  6.22751E-02 -2.46053E-03 -1.16532E-04 -1.02954E-06 -1.05891E-08  9.73860E-02  3.00674E-03  4.91949E-05 -2.39893E-06  7.11475E-09
  0.900  6.29009E-02 -2.84811E-03 -1.74689E-04 -1.91242E-06 -2.53706E-08  9.62010E-02  3.42344E-03  7.25572E-05 -4.68756E-06  1.72480E-08
  1.000  6.35254E-02 -3.17431E-03 -2.47152E-04 -3.26156E-06 -5.46429E-08  9.50606E-02  3.74303E-03  1.00780E-04 -8.45978E-06  3.76506E-08
  1.100  6.41318E-02 -3.41871E-03 -3.33121E-04 -5.17906E-06 -1.07862E-07  9.40012E-02  3.94255E-03  1.33051E-04 -1.43006E-05  7.54532E-08
  1.200  6.47049E-02 -3.56494E-03 -4.30663E-04 -7.73580E-06 -1.97977E-07  9.30536E-02  4.00648E-03  1.68083E-04 -2.28778E-05  1.40845E-07
  1.300  6.52318E-02 -3.60141E-03 -5.36760E-04 -1.09524E-05 -3.41676E-07  9.22413E-02  3.92766E-03  2.04199E-04 -3.49069E-05  2.47629E-07
  1.400  6.57018E-02 -3.52189E-03 -6.47441E-04 -1.47839E-05 -5.59402E-07  9.15795E-02  3.70762E-03  2.39457E-04 -5.11025E-05  4.13700E-07
  1.500  6.61070E-02 -3.32565E-03 -7.57985E-04 -1.91104E-05 -8.75180E-07  9.10754E-02  3.35636E-03  2.71815E-04 -7.21173E-05  6.61434E-07
  1.600  6.64425E-02 -3.01745E-03 -8.63194E-04 -2.37364E-05 -1.31638E-06  9.07277E-02  2.89164E-03  2.99308E-04 -9.84718E-05  1.01802E-06
  1.700  6.67060E-02 -2.60714E-03 -9.57692E-04 -2.83993E-05 -1.91359E-06  9.05276E-02  2.33778E-03  3.20236E-04 -1.30480E-04  1.51578E-06
  1.800  6.68979E-02 -2.10912E-03 -1.03624E-03 -3.27861E-05 -2.70077E-06  9.04594E-02  1.72410E-03  3.33331E-04 -1.68176E-04  2.19246E-06
  1.900  6.70211E-02 -1.54149E-03 -1.09406E-03 -3.65577E-05 -3.71591E-06  9.05020E-02  1.08305E-03  3.37904E-04 -2.11251E-04  3.09166E-06
  2.000  6.70806E-02 -9.25202E-04 -1.12708E-03 -3.93755E-05 -5.00227E-06  9.06301E-02  4.48279E-04  3.33947E-04 -2.58996E-04  4.26328E-06
  2.100  6.70832E-02 -2.82945E-04 -1.13222E-03 -4.09281E-05 -6.61007E-06  9.08159E-02 -1.47436E-04  3.22188E-04 -3.10277E-04  5.76407E-06
  2.200  6.70371E-02  3.61859E-04 -1.10753E-03 -4.09539E-05 -8.59877E-06  9.10307E-02 -6.74066E-04  3.04087E-04 -3.63521E-04  7.65813E-06
  2.300  6.69518E-02  9.86142E-04 -1.05234E-03 -3.92546E-05 -1.10392E-05  9.12464E-02 -1.10605E-03  2.81769E-04 -4.16740E-04  1.00174E-05
  2.400  6.68369E-02  1.56818E-03 -9.67307E-04 -3.57000E-05 -1.40156E-05  9.14373E-02 -1.42370E-03  2.57903E-04 -4.67577E-04  1.29220E-05
  2.500  6.67028E-02  2.08851E-03 -8.54421E-04 -3.02210E-05 -1.76265E-05  9.15810E-02 -1.61420E-03  2.35521E-04 -5.13387E-04  1.64600E-05
  2.600  6.65594E-02  2.53071E-03 -7.16971E-04 -2.27925E-05 -2.19842E-05  9.16595E-02 -1.67219E-03  2.17782E-04 -5.51342E-04  2.07269E-05
  2.700  6.64161E-02  2.88204E-03 -5.59435E-04 -1.34105E-05 -2.72122E-05  9.16600E-02 -1.59987E-03  2.07707E-04 -5.78561E-04  2.58241E-05
  2.800  6.62816E-02  3.13396E-03 -3.87352E-04 -2.06575E-06 -3.34404E-05  9.15752E-02 -1.40654E-03  2.07887E-04 -5.92257E-04  3.18571E-05
  2.900  6.61632E-02  3.28240E-03 -2.07148E-04  1.12788E-05 -4.07975E-05  9.14031E-02 -1.10787E-03  2.20186E-04 -5.89897E-04  3.89314E-05
  3.000  6.60665E-02  3.32797E-03 -2.59351E-05  2.67024E-05 -4.94011E-05  9.11467E-02 -7.24537E-04  2.45467E-04 -5.69370E-04  4.71477E-05
  3.100  6.59952E-02  3.27593E-03  1.48722E-04  4.43264E-05 -5.93464E-05  9.08134E-02 -2.80739E-04  2.83362E-04 -5.29144E-04  5.65952E-05
  3.200  6.59509E-02  3.13602E-03  3.09062E-04  6.42984E-05 -7.06934E-05  9.04135E-02  1.97649E-04  3.32106E-04 -4.68413E-04  6.73425E-05
  3.300  6.59324E-02  2.92214E-03  4.47418E-04  8.67568E-05 -8.34553E-05  8.99593E-02  6.84959E-04  3.88481E-04 -3.87225E-04  7.94266E-05
  3.400  6.59360E-02  2.65190E-03  5.56523E-04  1.11780E-04 -9.75879E-05  8.94639E-02  1.15761E-03  4.47852E-04 -2.86577E-04  9.28392E-05
  3.500  6.59549E-02  2.34596E-03  6.29838E-04  1.39320E-04 -1.12984E-04  8.89390E-02  1.59586E-03  5.04358E-04 -1.68461E-04  1.07512E-04
  3.600  6.59794E-02  2.02735E-03  6.61891E-04  1.69139E-04 -1.29470E-04  8.83942E-02  1.98520E-03  5.51213E-04 -3.58767E-05  1.23299E-04
  3.700  6.59969E-02  1.72059E-03  6.48607E-04  2.00741E-04 -1.46814E-04  8.78357E-02  2.31751E-03  5.81149E-04  1.07227E-04  1.39961E-04
  3.800  6.59921E-02  1.45078E-03  5.87621E-04  2.33325E-04 -1.64731E-04  8.72648E-02  2.59159E-03  5.86957E-04  2.56061E-04  1.57151E-04
  3.900  6.59474E-02  1.24258E-03  4.78553E-04  2.65761E-04 -1.82907E-04  8.66783E-02  2.81331E-03  5.62102E-04  4.05165E-04  1.74399E-04
  4.000  6.58432E-02  1.11920E-03  3.23213E-04  2.96599E-04 -2.01013E-04  8.60672E-02  2.99513E-03  5.01370E-04  5.48642E-04  1.91113E-04
  4.100  6.56588E-02  1.10140E-03  1.25724E-04  3.24123E-04 -2.18737E-04  8.54176E-02  3.15522E-03  4.01488E-04  6.80434E-04  2.06575E-04
  4.200  6.53726E-02  1.20650E-03 -1.07463E-04  3.46439E-04 -2.35805E-04  8.47110E-02  3.31603E-03  2.61666E-04  7.94647E-04  2.19960E-04
  4.300  6.49635E-02  1.44755E-03 -3.67686E-04  3.61608E-04 -2.52003E-04  8.39256E-02  3.50260E-03  8.39956E-05  8.85884E-04  2.30363E-04
  4.400  6.44117E-02  1.83259E-03 -6.44311E-04  3.67802E-04 -2.67196E-04  8.30368E-02  3.74062E-03 -1.26327E-04  9.49591E-04  2.36834E-04
  4.500  6.36989E-02  2.36413E-03 -9.25121E-04  3.63485E-04 -2.81334E-04  8.20195E-02  4.05442E-03 -3.61011E-04  9.82371E-04  2.38435E-04
  4.600  6.28100E-02  3.03885E-03 -1.19682E-03  3.47586E-04 -2.94448E-04  8.08490E-02  4.46504E-03 -6.08921E-04  9.82260E-04  2.34299E-04
  4.700  6.17334E-02  3.84753E-03 -1.44563E-03  3.19666E-04 -3.06636E-04  7.95029E-02  4.98845E-03 -8.56567E-04  9.48916E-04  2.23705E-04
  4.800  6.04614E-02  4.77530E-03 -1.65801E-03  2.80032E-04 -3.18039E-04  7.79622E-02  5.63424E-03 -1.08882E-03  8.83734E-04  2.06143E-04
  4.900  5.89911E-02  5.80205E-03 -1.82133E-03  2.29818E-04 -3.28810E-04  7.62130E-02  6.40459E-03 -1.28980E-03  7.89843E-04  1.81386E-04
  5.000  5.73243E-02  6.90323E-03 -1.92463E-03  1.70987E-04 -3.39069E-04  7.42468E-02  7.29383E-03 -1.44388E-03  6.71989E-04  1.49545E-04
  5.100  5.54678E-02  8.05073E-03 -1.95922E-03  1.06271E-04 -3.48873E-04  7.20615E-02  8.28853E-03 -1.53672E-03  5.36310E-04  1.11108E-04
  5.200  5.34330E-02  9.21403E-03 -1.91923E-03  3.90343E-05 -3.58177E-04  6.96616E-02  9.36803E-03 -1.55631E-03  3.90008E-04  6.69512E-05
  5.300  5.12356E-02  1.03614E-02 -1.80203E-03 -2.69188E-05 -3.66812E-04  6.70578E-02  1.05055E-02 -1.49381E-03  2.40940E-04  1.83330E-05
  5.400  4.88949E-02  1.14612E-02 -1.60843E-03 -8.75902E-05 -3.74474E-04  6.42669E-02  1.16694E-02 -1.34426E-03  9.71507E-05 -3.31517E-05
  5.500  4.64338E-02  1.24831E-02 -1.34268E-03 -1.39060E-04 -3.80730E-04  6.13110E-02  1.28251E-02 -1.10703E-03 -3.36112E-05 -8.56392E-05
  5.600  4.38770E-02  1.33994E-02 -1.01234E-03 -1.77767E-04 -3.85036E-04  5.82164E-02  1.39366E-02 -7.85964E-04 -1.44362E-04 -1.37092E-04
  5.700  4.12512E-02  1.41859E-02 -6.27847E-04 -2.00768E-04 -3.86781E-04  5.50127E-02  1.49686E-02 -3.89259E-04 -2.29303E-04 -1.85413E-04
  5.800  3.85834E-02  1.48230E-02 -2.02028E-04 -2.05958E-04 -3.85329E-04  5.17317E-02  1.58884E-02  7.09771E-05 -2.84164E-04 -2.28566E-04
  5.900  3.59008E-02  1.52960E-02  2.50592E-04 -1.92232E-04 -3.80083E-04  4.84061E-02  1.66668E-02  5.79393E-04 -3.06429E-04 -2.64704E-04
  6.000  3.32297E-02  1.55958E-02  7.14536E-04 -1.59569E-04 -3.70544E-04  4.50685E-02  1.72804E-02  1.11828E-03 -2.95455E-04 -2.92283E-04
  6.100  3.05948E-02  1.57188E-02  1.17417E-03 -1.09041E-04 -3.56362E-04  4.17506E-02  1.77114E-02  1.66855E-03 -2.52450E-04 -3.10158E-04
  6.200  2.80190E-02  1.56669E-02  1.61445E-03 -4.27394E-05 -3.37389E-04  3.84821E-02  1.79493E-02  2.21085E-03 -1.80336E-04 -3.17657E-04
  6.300  2.55227E-02  1.54473E-02  2.02167E-03  3.63752E-05 -3.13703E-04  3.52903E-02  1.79901E-02  2.72654E-03 -8.35048E-05 -3.14616E-04
  6.400  2.31235E-02  1.50714E-02  2.38402E-03  1.24672E-04 -2.85630E-04  3.21993E-02  1.78368E-02  3.19867E-03  3.25189E-05 -3.01387E-04
  6.500  2.08362E-02  1.45547E-02  2.69208E-03  2.18097E-04 -2.53727E-04  2.92299E-02  1.74985E-02  3.61278E-03  1.61463E-04 -2.78803E-04
  6.600  1.86726E-02  1.39156E-02  2.93907E-03  3.12436E-04 -2.18765E-04  2.63995E-02  1.69898E-02  3.95749E-03  2.96722E-04 -2.48120E-04
  6.700  1.66416E-02  1.31747E-02  3.12105E-03  4.03578E-04 -1.81684E-04  2.37218E-02  1.63297E-02  4.22487E-03  4.31767E-04 -2.10925E-04
  6.800  1.47493E-02  1.23536E-02  3.23685E-03  4.87752E-04 -1.43533E-04  2.12069E-02  1.55405E-02  4.41061E-03  5.60512E-04 -1.69035E-04
  6.900  1.29991E-02  1.14745E-02  3.28792E-03  5.61732E-04 -1.05414E-04  1.88618E-02  1.46468E-02  4.51393E-03  6.77634E-04 -1.24376E-04
  7.000  1.13920E-02  1.05591E-02  3.27800E-03  6.22983E-04 -6.84123E-05  1.66901E-02  1.36742E-02  4.53732E-03  7.78806E-04 -7.88724E-05
  7.100  9.92676E-03  9.62773E-03  3.21275E-03  6.69759E-04 -3.35360E-05  1.46927E-02  1.26481E-02  4.48612E-03  8.60846E-04 -3.43384E-05
  7.200  8.60030E-03  8.69920E-03  3.09928E-03  7.01132E-04 -1.66088E-06  1.28681E-02  1.15931E-02  4.36800E-03  9.21785E-04  7.61343E-06
  7.300  7.40791E-03  7.79005E-03  2.94570E-03  7.16968E-04  2.65107E-05  1.12123E-02  1.05320E-02  4.19231E-03  9.60843E-04  4.56425E-05
  7.400  6.34357E-03  6.91436E-03  2.76060E-03  7.17862E-04  5.04777E-05  9.71960E-03  9.48506E-03  3.96950E-03  9.78340E-04  7.87265E-05
  7.500  5.40019E-03  6.08356E-03  2.55264E-03  7.05020E-04  6.99523E-05  8.38275E-03  8.46977E-03  3.71049E-03  9.75545E-04  1.06183E-04
  7.600  4.56990E-03  5.30641E-03  2.33017E-03  6.80130E-04  8.48573E-05  7.19325E-03  7.50053E-03  3.42611E-03  9.54493E-04  1.27666E-04
  7.700  3.84430E-03  4.58908E-03  2.10087E-03  6.45212E-04  9.53098E-05  6.14171E-03  6.58859E-03  3.12667E-03  9.17768E-04  1.43146E-04
  7.800  3.21469E-03  3.93532E-03  1.87155E-03  6.02465E-04  1.01594E-04  5.21810E-03  5.74206E-03  2.82153E-03  8.68301E-04  1.52866E-04
  7.900  2.67225E-03  3.34668E-03  1.64798E-03  5.54133E-04  1.04129E-04  4.41205E-03  4.96615E-03  2.51887E-03  8.09157E-04  1.57294E-04
  8.000  2.20827E-03  2.82284E-03  1.43480E-03  5.02379E-04  1.03426E-04  3.71304E-03  4.26343E-03  2.22554E-03  7.43366E-04  1.57061E-04
  8.100  1.81423E-03  2.36191E-03  1.23552E-03  4.49188E-04  1.00053E-04  3.11065E-03  3.63418E-03  1.94695E-03  6.73770E-04  1.52909E-04
  8.200  1.48199E-03  1.96073E-03  1.05259E-03  3.96297E-04  9.45975E-05  2.59472E-03  3.07677E-03  1.68710E-03  6.02913E-04  1.45626E-04
  8.300  1.20386E-03  1.61525E-03  8.87439E-04  3.45146E-04  8.76312E-05  2.15551E-03  2.58805E-03  1.44868E-03  5.32966E-04  1.36002E-04
  8.400  9.72691E-04  1.32080E-03  7.40654E-04  2.96861E-04  7.96865E-05  1.78381E-03  2.16372E-03  1.23322E-03  4.65689E-04  1.24787E-04
  8.500  7.81899E-04  1.07233E-03  6.12097E-04  2.52255E-04  7.12352E-05  1.47104E-03  1.79871E-03  1.04119E-03  4.02422E-04  1.12657E-04
  8.600  6.25526E-04  8.64704E-04  5.01062E-04  2.11849E-04  6.26766E-05  1.20929E-03  1.48750E-03  8.72255E-04  3.44101E-04  1.00195E-04
  8.700  4.98231E-04  6.92825E-04  4.06424E-04  1.75904E-04  5.43316E-05  9.91367E-04  1.22437E-03  7.25432E-04  2.91298E-04  8.78816E-05
  8.800  3.95287E-04  5.51826E-04  3.26778E-04  1.44461E-04  4.64427E-05  8.10820E-04  1.00362E-03  5.99264E-04  2.44267E-04  7.60882E-05
  8.900  3.12559E-04  4.37163E-04  2.60553E-04  1.17386E-04  3.91781E-05  6.61910E-04  8.19779E-04  4.91986E-04  2.03002E-04  6.50839E-05
  9.000  2.46474E-04  3.44688E-04  2.06121E-04  9.44158E-05  3.26403E-05  5.39594E-04  6.67708E-04  4.01666E-04  1.67294E-04  5.50442E-05
  9.100  1.93974E-04  2.70689E-04  1.61870E-04  7.52004E-05  2.68761E-05  4.39484E-04  5.42686E-04  3.26318E-04  1.36790E-04  4.60639E-05
  9.200  1.52476E-04  2.11908E-04  1.26271E-04  5.93376E-05  2.18872E-05  3.57803E-04  4.40462E-04  2.63990E-04  1.11039E-04  3.81715E-05
  9.300  1.19820E-04  1.65526E-04  9.79120E-05  4.64052E-05  1.76417E-05  2.91329E-04  3.57277E-04  2.12833E-04  8.95383E-05  3.13443E-05
  9.400  9.42160E-05  1.29147E-04  7.55295E-05  3.59854E-05  1.40842E-05  2.37337E-04  2.89855E-04  1.71138E-04  7.17688E-05  2.55227E-05
  9.500  7.41998E-05  1.00762E-04  5.80147E-05  2.76822E-05  1.11451E-05  1.93543E-04  2.35382E-04  1.37369E-04  5.72195E-05  2.06224E-05
  9.600  5.85829E-05  7.87103E-05  4.44165E-05  2.11332E-05  8.74786E-06  1.58048E-04  1.91472E-04  1.10170E-04  4.54088E-05  1.65456E-05
  9.700  4.64103E-05  6.16346E-05  3.39336E-05  1.60167E-05  6.81485E-06  1.29283E-04  1.56124E-04  8.83664E-05  3.58958E-05  1.31896E-05
  9.800  3.69214E-05  4.84408E-05  2.59025E-05  1.20539E-05  5.27185E-06  1.05960E-04  1.27681E-04  7.09554E-05  2.82878E-05  1.04527E-05
  9.900  2.95155E-05  3.82555E-05  1.97824E-05  9.00878E-06  4.05076E-06  8.70314E-05  1.04780E-04  5.70935E-05  2.22419E-05  8.23938E-06
 10.000  2.37213E-05  3.03891E-05  1.51386E-05  6.68549E-06  3.09122E-06  7.16444E-05  8.63139E-05  4.60794E-05  1.74648E-05  6.46263E-06
 10.100  1.91722E-05  2.43020E-05  1.16262E-05  4.92422E-06  2.34130E-06  5.91111E-05  7.13854E-05  3.73370E-05  1.37093E-05  5.04559E-06
 10.200  1.55841E-05  1.95755E-05  8.97471E-06  3.59668E-06  1.75747E-06  4.88774E-05  5.92763E-05  3.03971E-05  1.07700E-05  3.92193E-06
 10.300  1.27383E-05  1.58874E-05  6.97430E-06  2.60135E-06  1.30400E-06  4.04985E-05  4.94130E-05  2.48809E-05  8.47814E-06  3.03548E-06
 10.400  1.04668E-05  1.29909E-05  5.46362E-06  1.85883E-06  9.52183E-07  3.36178E-05  4.13401E-05  2.04853E-05  6.69662E-06  2.33946E-06
 10.500  8.64115E-06  1.06985E-05  4.31963E-06  1.30766E-06  6.79316E-07  2.79498E-05  3.46975E-05  1.69692E-05  5.31497E-06  1.79544E-06
 10.600  7.16312E-06  8.86787E-06  3.44924E-06  9.00678E-07  4.67722E-07  2.32662E-05  2.92010E-05  1.41420E-05  4.24489E-06  1.37216E-06
 10.700  5.95771E-06  7.39189E-06  2.78247E-06  6.01969E-07  3.03788E-07  1.93842E-05  2.46273E-05  1.18541E-05  3.41625E-06  1.04440E-06
 10.800  4.96756E-06  6.18978E-06  2.26700E-06  3.84299E-07  1.77116E-07  1.61572E-05  2.08003E-05  9.98884E-06  2.77374E-06  7.91926E-07
 10.900  4.14877E-06  5.20088E-06  1.86400E-06  2.27119E-07  7.97916E-08  1.34676E-05  1.75819E-05  8.45528E-06  2.27397E-06  5.98602E-07
 11.000  3.46760E-06  4.37962E-06  1.54479E-06  1.14964E-07  5.78638E-09  1.12209E-05  1.48629E-05  7.18329E-06  1.88319E-06  4.51558E-07
 11.100  2.89800E-06  3.69174E-06  1.28832E-06  3.62309E-08 -4.95261E-08  9.34080E-06  1.25572E-05  6.11886E-06  1.57525E-06  3.40563E-07
 11.200  2.41974E-06  3.11142E-06  1.07924E-06 -1.77761E-08 -8.97402E-08  7.76530E-06  1.05963E-05  5.22059E-06  1.33010E-06  2.57495E-07
 11.300  2.01697E-06  2.61908E-06  9.06428E-07 -5.35570E-08 -1.17699E-07  6.44408E-06  8.92515E-06  4.45676E-06  1.13250E-06  1.95914E-07
 11.400  1.67719E-06  2.19977E-06  7.61848E-07 -7.59641E-08 -1.35697E-07  5.33592E-06  7.49964E-06  3.80313E-06  9.70934E-07  1.50726E-07
 11.500  1.39036E-06  1.84189E-06  6.39718E-07 -8.86139E-08 -1.45630E-07  4.40688E-06  6.28358E-06  3.24106E-06  8.36843E-07  1.17920E-07
 11.600  1.14839E-06  1.53632E-06  5.35865E-07 -9.42002E-08 -1.49093E-07  3.62883E-06  5.24712E-06  2.75615E-06  7.23895E-07  9.43541E-08
 11.700  9.44600E-07  1.27574E-06  4.47238E-07 -9.47297E-08 -1.47450E-07  2.97831E-06  4.36529E-06  2.33712E-06  6.27464E-07  7.75821E-08
 11.800  7.73429E-07  1.05410E-06  3.71567E-07 -9.17009E-08 -1.41880E-07  2.43565E-06  3.61693E-06  1.97498E-06  5.44198E-07  6.57196E-08
 11.900  6.30174E-07  8.66319E-07  3.07096E-07 -8.62370E-08 -1.33402E-07  1.98421E-06  2.98389E-06  1.66242E-06  4.71674E-07  5.73308E-08
 12.000  5.10811E-07  7.08011E-07  2.52413E-07 -7.91857E-08 -1.22898E-07  1.60988E-06  2.45048E-06  1.39332E-06  4.08136E-07  5.13367E-08
 12.100  4.11861E-07  5.75323E-07  2.06323E-07 -7.11907E-08 -1.11121E-07  1.30065E-06  2.00296E-06  1.16246E-06  3.52294E-07  4.69405E-08
 12.200  3.30297E-07  4.64830E-07  1.67774E-07 -6.27447E-08 -9.87069E-08  1.04623E-06  1.62930E-06  9.65254E-07  3.03176E-07  4.35655E-08
 12.300  2.63474E-07  3.73460E-07  1.35812E-07 -5.42251E-08 -8.61782E-08  8.37830E-07  1.31890E-06  7.97633E-07  2.60020E-07  4.08055E-08
 12.400  2.09080E-07  2.98457E-07  1.09555E-07 -4.59202E-08 -7.39534E-08  6.67922E-07  1.06244E-06  6.55927E-07  2.22198E-07  3.83840E-08
 12.500  1.65095E-07  2.37348E-07  8.81888E-08 -3.80462E-08 -6.23542E-08  5.30071E-07  8.51710E-07  5.36812E-07  1.89169E-07  3.61214E-08
 12.600  1.29767E-07  1.87932E-07  7.09600E-08 -3.07601E-08 -5.16136E-08  4.18789E-07  6.79536E-07  4.37271E-07  1.60448E-07  3.39097E-08
 12.700  1.01582E-07  1.48264E-07  5.71844E-08 -2.41681E-08 -4.18861E-08  3.29414E-07  5.39657E-07  3.54578E-07  1.35588E-07  3.16917E-08
 12.800  7.92406E-08  1.16643E-07  4.62489E-08 -1.83328E-08 -3.32580E-08  2.58003E-07  4.26658E-07  2.86285E-07  1.14171E-07  2.94458E-08
 12.900  6.16420E-08  9.16006E-08  3.76141E-08 -1.32801E-08 -2.57578E-08  2.01235E-07  3.35878E-07  2.30203E-07  9.58082E-08  2.71740E-08
 13.000  4.78585E-08  7.18811E-08  3.08155E-08 -9.00435E-09 -1.93678E-08  1.56337E-07  2.63343E-07  1.84404E-07  8.01336E-08  2.48926E-08
 13.100  3.71183E-08  5.64280E-08  2.54610E-08 -5.47474E-09 -1.40340E-08  1.21000E-07  2.05688E-07  1.47195E-07  6.68106E-08  2.26260E-08
 13.200  2.87857E-08  4.43626E-08  2.12272E-08 -2.64069E-09 -9.67670E-09  9.33218E-08  1.60090E-07  1.17113E-07  5.55311E-08  2.04017E-08
 13.300  2.23426E-08  3.49640E-08  1.78528E-08 -4.37541E-10 -6.19881E-09  7.17401E-08  1.24195E-07  9.29017E-08  4.60164E-08  1.82470E-08
 13.400  1.73719E-08  2.76485E-08  1.51318E-08  1.20828E-09 -3.49406E-09  5.49844E-08  9.60643E-08  7.34964E-08  3.80172E-08  1.61865E-08
 13.500  1.35410E-08  2.19497E-08  1.29055E-08  2.37457E-09 -1.45329E-09  4.20278E-08  7.41064E-08  5.80003E-08  3.13131E-08  1.42412E-08
 13.600  1.05875E-08  1.74990E-08  1.10542E-08  3.13935E-09  3.03015E-11  3.20457E-08  5.70303E-08  4.56669E-08  2.57110E-08  1.24272E-08
 13.700  8.30676E-09  1.40092E-08  9.48964E-09  3.57761E-09  1.05737E-09  2.43812E-08  4.37944E-08  3.58794E-08  2.10430E-08  1.07560E-08
 13.800  6.54032E-09  1.12581E-08  8.14842E-09  3.75885E-09  1.71971E-09  1.85138E-08  3.35653E-08  2.81321E-08  1.71643E-08  9.23423E-09
 13.900  5.16670E-09  9.07575E-09  6.98548E-09  3.74539E-09  2.09862E-09  1.40340E-08  2.56802E-08  2.20137E-08  1.39507E-08  7.86396E-09
 14.000  4.09337E-09  7.33314E-09  5.96933E-09  3.59139E-09  2.26421E-09  1.06216E-08  1.96154E-08  1.71914E-08  1.12961E-08  6.64356E-09
 14.100  3.25027E-09  5.93258E-09  5.07794E-09  3.34250E-09  2.27536E-09  8.02743E-09  1.49597E-08  1.33978E-08  9.11031E-09  5.56810E-09
 14.200  2.58448E-09  4.80035E-09  4.29556E-09  3.03598E-09  2.18019E-09  6.05860E-09  1.13916E-08  1.04185E-08  7.31662E-09  4.63008E-09
 14.300  2.05612E-09  3.88068E-09  3.61051E-09  2.70125E-09  2.01703E-09  4.56655E-09  8.66107E-09  8.08273E-09  5.85012E-09  3.82010E-09
 14.400  1.63507E-09  3.13113E-09  3.01346E-09  2.36058E-09  1.81542E-09  3.43724E-09  6.57422E-09  6.25477E-09  4.65588E-09  3.12751E-09
 14.500  1.29847E-09  2.51910E-09  2.49642E-09  2.03011E-09  1.59743E-09  2.58346E-09  4.98133E-09  4.82691E-09  3.68750E-09  2.54091E-09
 14.600  1.02886E-09  2.01922E-09  2.05207E-09  1.72077E-09  1.37883E-09  1.93867E-09  3.76705E-09  3.71387E-09  2.90584E-09  2.04871E-09
 14.700  8.12751E-10  1.61140E-09  1.67341E-09  1.43927E-09  1.17030E-09  1.45225E-09  2.84262E-09  2.84823E-09  2.27794E-09  1.63946E-09
 14.800  6.39634E-10  1.27952E-09  1.35361E-09  1.18903E-09  9.78524E-10  1.08574E-09  2.13992E-09  2.17673E-09  1.77614E-09  1.30223E-09
 14.900  5.01201E-10  1.01042E-09  1.08605E-09  9.70980E-10  8.07115E-10  8.09928E-10  1.60667E-09  1.65732E-09  1.37725E-09  1.02676E-09
 15.000  3.90816E-10  7.93235E-10  8.64307E-10  7.84299E-10  6.57456E-10  6.02694E-10  1.20280E-09  1.25683E-09  1.06193E-09  8.03669E-10
 15.100  3.03130E-10  6.18887E-10  6.82275E-10  6.26965E-10  5.29354E-10  4.47260E-10  8.97596E-10  9.49100E-10  8.14108E-10  6.24519E-10
 15.200  2.33792E-10  4.79766E-10  5.34258E-10  4.96248E-10  4.21588E-10  3.30917E-10  6.67539E-10  7.13548E-10  6.20482E-10  4.81843E-10
 15.300  1.79248E-10  3.69471E-10  4.15027E-10  3.89067E-10  3.32318E-10  2.44038E-10  4.94619E-10  5.33978E-10  4.70117E-10  3.69138E-10
 15.400  1.36588E-10  2.82626E-10  3.19870E-10  3.02256E-10  2.59395E-10  1.79334E-10  3.65056E-10  3.97682E-10  3.54068E-10  2.80819E-10
 15.500  1.03425E-10  2.14728E-10  2.44616E-10  2.32749E-10  2.00585E-10  1.31289E-10  2.68315E-10  2.94708E-10  2.65064E-10  2.12152E-10
 15.600  7.78131E-11  1.62027E-10  1.85633E-10  1.77697E-10  1.53719E-10  9.57314E-11  1.96354E-10  2.17285E-10  1.97234E-10  1.59179E-10
 15.700  5.81635E-11  1.21423E-10  1.39809E-10  1.34543E-10  1.16786E-10  6.95103E-11  1.43042E-10  1.59367E-10  1.45872E-10  1.18622E-10
 15.800  4.31914E-11  9.03708E-11  1.04511E-10  1.01049E-10  8.79847E-11  5.02491E-11  1.03715E-10  1.16265E-10  1.07229E-10  8.78054E-11
 15.900  3.18626E-11  6.67999E-11  7.75516E-11  7.52967E-11  6.57493E-11  3.61590E-11  7.48356E-11  8.43616E-11  7.83432E-11  6.45622E-11
 16.000  2.33505E-11  4.90407E-11  5.71297E-11  5.56769E-11  4.87461E-11  2.58969E-11  5.37293E-11  6.08771E-11  5.68902E-11  4.71592E-11
 16.100  1.69999E-11  3.57591E-11  4.17852E-11  4.08604E-11  3.58624E-11  1.84570E-11  3.83796E-11  4.36868E-11  4.10605E-11  3.42225E-11
 16.200  1.22953E-11  2.58992E-11  3.03469E-11  2.97665E-11  2.61862E-11  1.30890E-11  2.72730E-11  3.11755E-11  2.94554E-11  2.46741E-11
 16.300  8.83462E-12  1.86328E-11  2.18867E-11  2.15283E-11  1.89805E-11  9.23509E-12  1.92786E-11  2.21220E-11  2.10024E-11  1.76759E-11
 16.400  6.30674E-12  1.33164E-11  1.56770E-11  1.54600E-11  1.36588E-11  6.48225E-12  1.35549E-11  1.56089E-11  1.48848E-11  1.25823E-11
 16.500  4.47311E-12  9.45443E-12  1.11531E-11  1.10250E-11  9.75994E-12  4.52615E-12  9.47926E-12  1.09509E-11  1.04858E-11  8.90012E-12
 16.600  3.15226E-12  6.66886E-12  7.88180E-12  7.80844E-12  6.92577E-12  3.14359E-12  6.59308E-12  7.63924E-12  7.34255E-12  6.25631E-12
 16.700  2.20730E-12  4.67370E-12  5.53327E-12  5.49310E-12  4.88119E-12  2.17167E-12  4.56062E-12  5.29872E-12  5.11090E-12  4.37069E-12
 16.800  1.53586E-12  3.25454E-12  3.85924E-12  3.83867E-12  3.41718E-12  1.49217E-12  3.13740E-12  3.65437E-12  3.53643E-12  3.03468E-12
 16.900  1.06197E-12  2.25198E-12  2.67436E-12  2.66498E-12  2.37651E-12  1.01973E-12  2.14643E-12  2.50597E-12  2.43255E-12  2.09426E-12
 17.000  7.29737E-13  1.54850E-12  1.84148E-12  1.83822E-12  1.64203E-12  6.93080E-13  1.46037E-12  1.70870E-12  1.66342E-12  1.43656E-12
 17.100  4.98355E-13  1.05817E-12  1.26002E-12  1.25987E-12  1.12728E-12  4.68499E-13  9.88103E-13  1.15847E-12  1.13084E-12  9.79520E-13
 17.200  3.38260E-13  7.18657E-13  8.56794E-13  8.58051E-13  7.69005E-13  3.14961E-13  6.64870E-13  7.80988E-13  7.64314E-13  6.63928E-13
 17.300  2.28205E-13  4.85105E-13  5.79023E-13  5.80755E-13  5.21322E-13  2.10584E-13  4.44904E-13  5.23538E-13  5.13605E-13  4.47370E-13
 17.400  1.53033E-13  3.25478E-13  3.88921E-13  3.90658E-13  3.51232E-13  1.40029E-13  2.96070E-13  3.48984E-13  3.43153E-13  2.99688E-13
 17.500  1.02012E-13  2.17071E-13  2.59658E-13  2.61187E-13  2.35194E-13  9.26041E-14  1.95942E-13  2.31327E-13  2.27962E-13  1.99594E-13
 17.600  6.75996E-14  1.43913E-13  1.72321E-13  1.73575E-13  1.56541E-13  6.09075E-14  1.28964E-13  1.52483E-13  1.50580E-13  1.32166E-13
 17.700  4.45334E-14  9.48502E-14  1.13684E-13  1.14664E-13  1.03569E-13  3.98422E-14  8.44158E-14  9.99533E-14  9.89049E-14  8.70172E-14
 17.800  2.91674E-14  6.21495E-14  7.45601E-14  7.53010E-14  6.81170E-14  2.59210E-14  5.49544E-14  6.51580E-14  6.45993E-14  5.69665E-14
 17.900  1.89932E-14  4.04873E-14  4.86164E-14  4.91619E-14  4.45380E-14  1.67728E-14  3.55805E-14  4.22419E-14  4.19576E-14  3.70835E-14
 18.000  1.22972E-14  2.62242E-14  3.15173E-14  3.19107E-14  2.89520E-14  1.07947E-14  2.29119E-14  2.72354E-14  2.71008E-14  2.40052E-14
 18.100  7.91669E-15  1.68892E-14  2.03155E-14  2.05941E-14  1.87121E-14  6.90989E-15  1.46743E-14  1.74644E-14  1.74083E-14  1.54528E-14
 18.200  5.06788E-15  1.08157E-14  1.30207E-14  1.32152E-14  1.20249E-14  4.39948E-15  9.34787E-15  1.11381E-14  1.11210E-14  9.89247E-15
 18.300  3.22606E-15  6.88747E-15  8.29840E-15  8.43225E-15  7.68385E-15  2.78616E-15  5.92291E-15  7.06506E-15  7.06579E-15  6.29813E-15
 18.400  2.04220E-15  4.36156E-15  5.25924E-15  5.35027E-15  4.88239E-15  1.75508E-15  3.73279E-15  4.45743E-15  4.46499E-15  3.98788E-15
 18.500  1.28565E-15  2.74675E-15  3.31466E-15  3.37588E-15  3.08504E-15  1.09971E-15  2.34002E-15  2.79721E-15  2.80630E-15  2.51137E-15
 18.600  8.04940E-16  1.72031E-15  2.07758E-15  2.11834E-15  1.93858E-15  6.85436E-16  1.45916E-15  1.74602E-15  1.75435E-15  1.57301E-15
 18.700  5.01225E-16  1.07157E-15  1.29509E-15  1.32196E-15  1.21148E-15  4.24979E-16  9.05092E-16  1.08410E-15  1.09088E-15  9.79985E-16
 18.800  3.10418E-16  6.63860E-16  8.02927E-16  8.20492E-16  7.52972E-16  2.62114E-16  5.58470E-16  6.69569E-16  6.74735E-16  6.07275E-16
 18.900  1.91215E-16  4.09063E-16  4.95115E-16  5.06496E-16  4.65461E-16  1.60822E-16  3.42795E-16  4.11375E-16  4.15138E-16  3.74320E-16
 19.000  1.17157E-16  2.50713E-16  3.03671E-16  3.10986E-16  2.86185E-16  9.81614E-17  2.09318E-16  2.51425E-16  2.54078E-16  2.29511E-16
 19.100  7.14016E-17  1.52844E-16  1.85261E-16  1.89925E-16  1.75018E-16  5.96057E-17  1.27152E-16  1.52869E-16  1.54693E-16  1.39985E-16
 19.200  4.32860E-17  9.26877E-17  1.12424E-16  1.15376E-16  1.06465E-16  3.60078E-17  7.68423E-17  9.24650E-17  9.36937E-17  8.49351E-17
 19.300  2.61037E-17  5.59124E-17  6.78648E-17  6.97193E-17  6.44222E-17  2.16409E-17  4.62001E-17  5.56411E-17  5.64548E-17  5.12663E-17
 19.400  1.56598E-17  3.35522E-17  4.07524E-17  4.19092E-17  3.87773E-17  1.29400E-17  2.76351E-17  3.33106E-17  3.38417E-17  3.07842E-17
 19.500  9.34565E-18  2.00296E-17  2.43442E-17  2.50609E-17  2.32192E-17  7.69804E-18  1.64462E-17  1.98404E-17  2.01824E-17  1.83901E-17
 19.600  5.54863E-18  1.18953E-17  1.44673E-17  1.49083E-17  1.38312E-17  4.55643E-18  9.73792E-18  1.17572E-17  1.19750E-17  1.09298E-17
 19.700  3.27737E-18  7.02813E-18  8.55340E-18  8.82302E-18  8.19637E-18  2.68335E-18  5.73681E-18  6.93202E-18  7.06920E-18  6.46286E-18
 19.800  1.92594E-18  4.13123E-18  5.03107E-18  5.19485E-18  4.83225E-18  1.57234E-18  3.36270E-18  4.06651E-18  4.15207E-18  3.80214E-18
 19.900  1.12602E-18  2.41604E-18  2.94419E-18  3.04304E-18  2.83434E-18  9.16723E-19  1.96123E-18  2.37357E-18  2.42644E-18  2.22553E-18
  67 159 200   0.100
  0.000  5.88762E-02 -3.10317E-16 -4.99600E-16 -2.25167E-16 -1.68798E-15  1.02918E-01 -5.12023E-16 -8.95117E-16 -8.50630E-16 -1.18731E-15
  0.100  5.89322E-02 -5.31650E-05 -3.65550E-08 -7.60754E-12 -3.20430E-15  1.02803E-01  6.77370E-05  1.72921E-08 -1.06976E-11 -3.77649E-15
  0.200  5.90984E-02 -2.09587E-04 -5.78063E-07 -4.79620E-10 -5.67947E-13  1.02462E-01  2.66334E-04  2.72573E-07 -6.80030E-10 -2.94895E-13
  0.300  5.93692E-02 -4.60219E-04 -2.86977E-06 -5.32864E-09 -1.42707E-11  1.01911E-01  5.82265E-04  1.34595E-06 -7.66031E-09 -7.42998E-12
  0.400  5.97355E-02 -7.90557E-04 -8.82467E-06 -2.89103E-08 -1.38724E-10  1.01173E-01  9.94026E-04  4.10783E-06 -4.23723E-08 -7.27713E-11
  0.500  6.01852E-02 -1.18145E-03 -2.07974E-05 -1.05418E-07 -7.98566E-10  1.00278E-01  1.47360E-03  9.58735E-06 -1.58395E-07 -4.23028E-10
  0.600  6.07038E-02 -1.61019E-03 -4.13007E-05 -2.97817E-07 -3.29066E-09  9.92635E-02  1.98836E-03  1.88127E-05 -4.61299E-07 -1.76354E-09
  0.700  6.12748E-02 -2.05176E-03 -7.26935E-05 -7.03174E-07 -1.07405E-08  9.81694E-02  2.50327E-03  3.26435E-05 -1.12905E-06 -5.83273E-09
  0.800  6.18806E-02 -2.48022E-03 -1.16872E-04 -1.45163E-06 -2.94964E-08  9.70379E-02  2.98320E-03  5.16170E-05 -2.42973E-06 -1.62543E-08
  0.900  6.25033E-02 -2.87011E-03 -1.74992E-04 -2.69729E-06 -7.08675E-08  9.59108E-02  3.39522E-03  7.58270E-05 -4.73303E-06 -3.96719E-08
  1.000  6.31253E-02 -3.19781E-03 -2.47256E-04 -4.60075E-06 -1.52974E-07  9.48270E-02  3.71073E-03  1.04850E-04 -8.51243E-06 -8.70648E-08
  1.100  6.37299E-02 -3.44278E-03 -3.32778E-04 -7.30474E-06 -3.02361E-07  9.38213E-02  3.90721E-03  1.37732E-04 -1.43353E-05 -1.75045E-07
  1.200  6.43021E-02 -3.58859E-03 -4.29539E-04 -1.09057E-05 -5.54967E-07  9.29227E-02  3.96958E-03  1.73029E-04 -2.28395E-05 -3.26843E-07
  1.300  6.48289E-02 -3.62370E-03 -5.34444E-04 -1.54256E-05 -9.56043E-07  9.21531E-02  3.89105E-03  2.08908E-04 -3.46953E-05 -5.72610E-07
  1.400  6.52999E-02 -3.54196E-03 -6.43467E-04 -2.07882E-05 -1.55871E-06  9.15269E-02  3.67338E-03  2.43296E-04 -5.05552E-05 -9.48672E-07
  1.500  6.57072E-02 -3.34284E-03 -7.51868E-04 -2.68048E-05 -2.42108E-06  9.10505E-02  3.32668E-03  2.74053E-04 -7.09930E-05 -1.49537E-06
  1.600  6.60459E-02 -3.03135E-03 -8.54475E-04 -3.31721E-05 -3.60197E-06  9.07226E-02  2.86861E-03  2.99166E-04 -9.64361E-05 -2.25328E-06
  1.700  6.63137E-02 -2.61763E-03 -9.45990E-04 -3.94843E-05 -5.15571E-06  9.05350E-02  2.32317E-03  3.16941E-04 -1.27098E-04 -3.25778E-06
  1.800  6.65111E-02 -2.11634E-03 -1.02131E-03 -4.52592E-05 -7.12663E-06  9.04729E-02  1.71921E-03  3.26171E-04 -1.62913E-04 -4.53211E-06
  1.900  6.66409E-02 -1.54591E-03 -1.07584E-03 -4.99757E-05 -9.54400E-06  9.05164E-02  1.08855E-03  3.26276E-04 -2.03486E-04 -6.07954E-06
  2.000  6.67081E-02 -9.27500E-04 -1.10574E-03 -5.31184E-05 -1.24183E-05  9.06420E-02  4.64108E-04  3.17398E-04 -2.48054E-04 -7.87518E-06
  2.100  6.67193E-02 -2.84003E-04 -1.10816E-03 -5.42239E-05 -1.57399E-05  9.08236E-02 -1.22071E-04  3.00443E-04 -2.95469E-04 -9.85851E-06
  2.200  6.66827E-02  3.61054E-04 -1.08141E-03 -5.29225E-05 -1.94799E-05  9.10345E-02 -6.40652E-04  2.77066E-04 -3.44210E-04 -1.19276E-05
  2.300  6.66074E-02  9.84571E-04 -1.02503E-03 -4.89697E-05 -2.35949E-05  9.12484E-02 -1.06665E-03  2.49603E-04 -3.92410E-04 -1.39360E-05
  2.400  6.65030E-02  1.56488E-03 -9.39851E-04 -4.22627E-05 -2.80341E-05  9.14409E-02 -1.38078E-03  2.20940E-04 -4.37915E-04 -1.56932E-05
  2.500  6.63794E-02  2.08264E-03 -8.27973E-04 -3.28389E-05 -3.27485E-05  9.15908E-02 -1.57042E-03  1.94333E-04 -4.78368E-04 -1.69688E-05
  2.600  6.62462E-02  2.52160E-03 -6.92685E-04 -2.08574E-05 -3.77020E-05  9.16808E-02 -1.63020E-03  1.73188E-04 -5.11298E-04 -1.75017E-05
  2.700  6.61126E-02  2.86924E-03 -5.38367E-04 -6.56498E-06 -4.28816E-05  9.16984E-02 -1.56207E-03  1.60791E-04 -5.34242E-04 -1.70120E-05
  2.800  6.59869E-02  3.11723E-03 -3.70351E-04  9.74821E-06 -4.83063E-05  9.16360E-02 -1.37498E-03  1.60031E-04 -5.44861E-04 -1.52171E-05
  2.900  6.58760E-02  3.26169E-03 -1.94753E-04  2.77962E-05 -5.40327E-05  9.14909E-02 -1.08409E-03  1.73104E-04 -5.41065E-04 -1.18497E-05
  3.000  6.57853E-02  3.30340E-03 -1.82950E-05  4.73402E-05 -6.01558E-05  9.12653E-02 -7.09564E-04  2.01234E-04 -5.21142E-04 -6.67562E-06
  3.100  6.57184E-02  3.24769E-03  1.51908E-04  6.82199E-05 -6.68045E-05  9.09651E-02 -2.75124E-04  2.44426E-04 -4.83873E-04  4.87254E-07
  3.200  6.56768E-02  3.10432E-03  3.08568E-04  9.03647E-05 -7.41316E-05  9.05996E-02  1.93724E-04  3.01286E-04 -4.28637E-04  9.75333E-06
  3.300  6.56593E-02  2.88713E-03  4.44473E-04  1.13783E-04 -8.22987E-05  9.01800E-02  6.71525E-04  3.68911E-04 -3.55506E-04  2.11557E-05
  3.400  6.56625E-02  2.61359E-03  5.52756E-04  1.38527E-04 -9.14580E-05  8.97178E-02  1.13473E-03  4.42904E-04 -2.65310E-04  3.46360E-05
  3.500  6.56800E-02  2.30420E-03  6.27177E-04  1.64634E-04 -1.01732E-04  8.92244E-02  1.56342E-03  5.17496E-04 -1.59687E-04  5.00385E-05
  3.600  6.57025E-02  1.98178E-03  6.62433E-04  1.92054E-04 -1.13195E-04  8.87086E-02  1.94279E-03  5.85816E-04 -4.10899E-05  6.71070E-05
  3.700  6.57180E-02  1.67064E-03  6.54460E-04  2.20571E-04 -1.25857E-04  8.81764E-02  2.26430E-03  6.40288E-04  8.72347E-05  8.54855E-05
  3.800  6.57120E-02  1.39570E-03  6.00736E-04  2.49726E-04 -1.39655E-04  8.76295E-02  2.52630E-03  6.73147E-04  2.21313E-04  1.04722E-04
  3.900  6.56675E-02  1.18152E-03  5.00552E-04  2.78764E-04 -1.54451E-04  8.70647E-02  2.73427E-03  6.77051E-04  3.56556E-04  1.24273E-04
  4.000  6.55657E-02  1.05130E-03  3.55235E-04  3.06604E-04 -1.70039E-04  8.64740E-02  2.90042E-03  6.45745E-04  4.87920E-04  1.43515E-04
  4.100  6.53863E-02  1.02587E-03  1.68297E-04  3.31854E-04 -1.86160E-04  8.58442E-02  3.04287E-03  5.74716E-04  6.10111E-04  1.61753E-04
  4.200  6.51084E-02  1.12274E-03 -5.45130E-05  3.52866E-04 -2.02523E-04  8.51575E-02  3.18428E-03  4.61808E-04  7.17836E-04  1.78237E-04
  4.300  6.47114E-02  1.35526E-03 -3.05269E-04  3.67839E-04 -2.18829E-04  8.43927E-02  3.35020E-03  3.07699E-04  8.06080E-04  1.92182E-04
  4.400  6.41754E-02  1.73186E-03 -5.74067E-04  3.74960E-04 -2.34799E-04  8.35261E-02  3.56712E-03  1.16217E-04  8.70406E-04  2.02793E-04
  4.500  6.34822E-02  2.25552E-03 -8.49348E-04  3.72576E-04 -2.50196E-04  8.25326E-02  3.86039E-03 -1.05565E-04  9.07249E-04  2.09296E-04
  4.600  6.26166E-02  2.92339E-03 -1.11836E-03  3.59377E-04 -2.64840E-04  8.13879E-02  4.25225E-03 -3.47491E-04  9.14196E-04  2.10977E-04
  4.700  6.15664E-02  3.72676E-03 -1.36774E-03  3.34575E-04 -2.78617E-04  8.00692E-02  4.76000E-03 -5.96729E-04  8.90206E-04  2.07224E-04
  4.800  6.03235E-02  4.65118E-03 -1.58414E-03  2.98058E-04 -2.91474E-04  7.85573E-02  5.39449E-03 -8.38429E-04  8.35779E-04  1.97575E-04
  4.900  5.88842E-02  5.67693E-03 -1.75496E-03  2.50499E-04 -3.03402E-04  7.68375E-02  6.15906E-03 -1.05658E-03  7.53019E-04  1.81764E-04
  5.000  5.72497E-02  6.77969E-03 -1.86905E-03  1.93401E-04 -3.14419E-04  7.49006E-02  7.04900E-03 -1.23503E-03  6.45608E-04  1.59766E-04
  5.100  5.54256E-02  7.93149E-03 -1.91735E-03  1.29078E-04 -3.24536E-04  7.27434E-02  8.05150E-03 -1.35854E-03  5.18661E-04  1.31835E-04
  5.200  5.34227E-02  9.10176E-03 -1.89350E-03  6.05596E-05 -3.33725E-04  7.03694E-02  9.14620E-03 -1.41386E-03  3.78489E-04  9.85224E-05
  5.300  5.12557E-02  1.02586E-02 -1.79423E-03 -8.57880E-06 -3.41898E-04  6.77885E-02  1.03061E-02 -1.39069E-03  2.32250E-04  6.06865E-05
  5.400  4.89434E-02  1.13701E-02 -1.61961E-03 -7.44367E-05 -3.48878E-04  6.50166E-02  1.14993E-02 -1.28250E-03  8.75426E-05  1.94755E-05
  5.500  4.65079E-02  1.24055E-02 -1.37319E-03 -1.33054E-04 -3.54397E-04  6.20748E-02  1.26900E-02 -1.08700E-03 -4.80488E-05 -2.37094E-05
  5.600  4.39735E-02  1.33366E-02 -1.06177E-03 -1.80694E-04 -3.58096E-04  5.89891E-02  1.38412E-02 -8.06502E-04 -1.67421E-04 -6.72738E-05
  5.700  4.13664E-02  1.41387E-02 -6.95130E-04 -2.14115E-04 -3.59544E-04  5.57885E-02  1.49163E-02 -4.47766E-04 -2.64389E-04 -1.09509E-04
  5.800  3.87136E-02  1.47915E-02 -2.85518E-04 -2.30817E-04 -3.58274E-04  5.25046E-02  1.58808E-02 -2.17154E-05 -3.34064E-04 -1.48683E-04
  5.900  3.60422E-02  1.52798E-02  1.53011E-04 -2.29231E-04 -3.53819E-04  4.91702E-02  1.67042E-02  4.57219E-04 -3.73144E-04 -1.83147E-04
  6.000  3.33785E-02  1.55941E-02  6.05321E-04 -2.08838E-04 -3.45764E-04  4.58180E-02  1.73613E-02  9.71940E-04 -3.80086E-04 -2.11431E-04
  6.100  3.07475E-02  1.57302E-02  1.05598E-03 -1.70208E-04 -3.33796E-04  4.24802E-02  1.78331E-02  1.50369E-03 -3.55164E-04 -2.32337E-04
  6.200  2.81725E-02  1.56898E-02  1.49002E-03 -1.14962E-04 -3.17742E-04  3.91869E-02  1.81077E-02  2.03311E-03 -3.00393E-04 -2.45020E-04
  6.300  2.56739E-02  1.54798E-02  1.89369E-03 -4.56533E-05 -2.97610E-04  3.59659E-02  1.81803E-02  2.54135E-03 -2.19344E-04 -2.49035E-04
  6.400  2.32701E-02  1.51115E-02  2.25503E-03  3.44197E-05 -2.73605E-04  3.28421E-02  1.80532E-02  3.01101E-03 -1.16857E-04 -2.44369E-04
  6.500  2.09762E-02  1.46004E-02  2.56438E-03  1.21439E-04 -2.46132E-04  2.98370E-02  1.77350E-02  3.42703E-03  1.31271E-06 -2.31434E-04
  6.600  1.88044E-02  1.39649E-02  2.81468E-03  2.11329E-04 -2.15786E-04  2.69688E-02  1.72404E-02  3.77733E-03  1.28894E-04 -2.11036E-04
  6.700  1.67642E-02  1.32257E-02  3.00165E-03  3.00014E-04 -1.83323E-04  2.42517E-02  1.65884E-02  4.05322E-03  2.59504E-04 -1.84316E-04
  6.800  1.48618E-02  1.24048E-02  3.12378E-03  3.83672E-04 -1.49615E-04  2.16968E-02  1.58017E-02  4.24966E-03  3.87031E-04 -1.52670E-04
  6.900  1.31011E-02  1.15245E-02  3.18216E-03  4.58943E-04 -1.15600E-04  1.93115E-02  1.49055E-02  4.36513E-03  5.05969E-04 -1.17660E-04
  7.000  1.14835E-02  1.06067E-02  3.18022E-03  5.23099E-04 -8.22269E-05  1.71002E-02  1.39259E-02  4.40150E-03  6.11688E-04 -8.09080E-05
  7.100  1.00078E-02  9.67208E-03  3.12330E-03  5.74152E-04 -5.03992E-05  1.50641E-02  1.28892E-02  4.36355E-03  7.00614E-04 -4.40070E-05
  7.200  8.67139E-03  8.73969E-03  3.01826E-03  6.10905E-04 -2.09255E-05  1.32022E-02  1.18208E-02  4.25848E-03  7.70328E-04 -8.42748E-06
  7.300  7.46956E-03  7.82629E-03  2.87298E-03  6.32950E-04  5.52268E-06  1.15108E-02  1.07441E-02  4.09529E-03  8.19580E-04  2.45534E-05
  7.400  6.39643E-03  6.94617E-03  2.69588E-03  6.40607E-04  2.84398E-05  9.98459E-03  9.68016E-03  3.88419E-03  8.48226E-04  5.39057E-05
  7.500  5.44498E-03  6.11094E-03  2.49549E-03  6.34828E-04  4.75027E-05  8.61643E-03  8.64714E-03  3.63592E-03  8.57102E-04  7.88794E-05
  7.600  4.60741E-03  5.32950E-03  2.28004E-03  6.17074E-04  6.25736E-05  7.39799E-03  7.66000E-03  3.36123E-03  8.47853E-04  9.90152E-05
  7.700  3.87531E-03  4.60812E-03  2.05717E-03  5.89168E-04  7.36904E-05  6.31994E-03  6.73044E-03  3.07041E-03  8.22738E-04  1.14135E-04
  7.800  3.23998E-03  3.95064E-03  1.83365E-03  5.53154E-04  8.10469E-05  5.37226E-03  5.86699E-03  2.77283E-03  7.84422E-04  1.24319E-04
  7.900  2.69256E-03  3.35865E-03  1.61525E-03  5.11154E-04  8.49650E-05  4.54454E-03  5.07513E-03  2.47675E-03  7.35773E-04  1.29860E-04
  8.000  2.22429E-03  2.83185E-03  1.40663E-03  4.65247E-04  8.58625E-05  3.82618E-03  4.35764E-03  2.18910E-03  6.79682E-04  1.31224E-04
  8.100  1.82662E-03  2.36835E-03  1.21134E-03  4.17369E-04  8.42184E-05  3.20667E-03  3.71492E-03  1.91537E-03  6.18911E-04  1.28996E-04
  8.200  1.49133E-03  1.96501E-03  1.03186E-03  3.69231E-04  8.05401E-05  2.67571E-03  3.14540E-03  1.65968E-03  5.55967E-04  1.23828E-04
  8.300  1.21069E-03  1.61774E-03  8.69683E-04  3.22276E-04  7.53332E-05  2.22341E-03  2.64593E-03  1.42483E-03  4.93028E-04  1.16395E-04
  8.400  9.77462E-04  1.32184E-03  7.25445E-04  2.77649E-04  6.90760E-05  1.84039E-03  2.21219E-03  1.21241E-03  4.31886E-04  1.07354E-04
  8.500  7.85029E-04  1.07223E-03  5.99060E-04  2.36197E-04  6.22008E-05  1.51790E-03  1.83902E-03  1.02301E-03  3.73935E-04  9.73122E-05
  8.600  6.27365E-04  8.63734E-04  4.89877E-04  1.98483E-04  5.50796E-05  1.24788E-03  1.52082E-03  8.56346E-04  3.20183E-04  8.68040E-05
  8.700  4.99077E-04  6.91225E-04  3.96817E-04  1.64815E-04  4.80181E-05  1.02297E-03  1.25175E-03  7.11503E-04  2.71274E-04  7.62781E-05
  8.800  3.95391E-04  5.49797E-04  3.18517E-04  1.35283E-04  4.12532E-05  8.36557E-04  1.02601E-03  5.87072E-04  2.27541E-04  6.60911E-05
  8.900  3.12127E-04  4.34873E-04  2.53445E-04  1.09802E-04  3.49554E-05  6.82756E-04  8.38004E-04  4.81332E-04  1.89054E-04  5.65083E-05
  9.000  2.45673E-04  3.42273E-04  2.00003E-04  8.81557E-05  2.92358E-05  5.56388E-04  6.82490E-04  3.92380E-04  1.55677E-04  4.77104E-05
  9.100  1.92937E-04  2.68256E-04  1.56607E-04  7.00343E-05  2.41530E-05  4.52945E-04  5.54640E-04  3.18256E-04  1.27122E-04  3.98036E-05
  9.200  1.51308E-04  2.09536E-04  1.21750E-04  5.50736E-05  1.97236E-05  3.68538E-04  4.50109E-04  2.57026E-04  1.02996E-04  3.28313E-05
  9.300  1.18598E-04  1.63273E-04  9.40365E-05  4.28841E-05  1.59314E-05  2.99846E-04  3.65052E-04  2.06853E-04  8.28503E-05  2.67877E-05
  9.400  9.29986E-05  1.27054E-04  7.22172E-05  3.30757E-05  1.27366E-05  2.44061E-04  2.96117E-04  1.66040E-04  6.62082E-05  2.16302E-05
  9.500  7.30277E-05  9.88524E-05  5.51945E-05  2.52758E-05  1.00843E-05  1.98825E-04  2.40426E-04  1.33057E-04  5.25973E-05  1.72913E-05
  9.600  5.74833E-05  7.69951E-05  4.20261E-05  1.91416E-05  7.91137E-06  1.62175E-04  1.95538E-04  1.06557E-04  4.15679E-05  1.36886E-05
  9.700  4.53997E-05  6.01159E-05  3.19181E-05  1.43672E-05  6.15222E-06  1.32489E-04  1.59406E-04  8.53698E-05  3.27060E-05  1.07329E-05
  9.800  3.60084E-05  4.71132E-05  2.42132E-05  1.06871E-05  4.74281E-06  1.08438E-04  1.30334E-04  6.84984E-05  2.56410E-05  8.33478E-06
  9.900  2.87025E-05  3.71090E-05  1.83758E-05  7.87591E-06  3.62362E-06  8.89344E-05  1.06931E-04  5.51049E-05  2.00485E-05  6.40893E-06
 10.000  2.30069E-05  2.94105E-05  1.39761E-05  5.74654E-06  2.74142E-06  7.30965E-05  8.80611E-05  4.44941E-05  1.56505E-05  4.87707E-06
 10.100  1.85519E-05  2.34766E-05  1.06736E-05  4.14634E-06  2.05003E-06  6.02115E-05  7.28095E-05  3.60952E-05  1.22122E-05  3.66963E-06
 10.200  1.50518E-05  1.88881E-05  8.20189E-06  2.95295E-06  1.51055E-06  4.97055E-05  6.04413E-05  2.94451E-05  9.53872E-06  2.72625E-06
 10.300  1.22871E-05  1.53230E-05  6.35483E-06  2.06967E-06  1.09090E-06  4.11174E-05  5.03704E-05  2.41709E-05  7.46982E-06  1.99571E-06
 10.400  1.00893E-05  1.25354E-05  4.97455E-06  1.42110E-06  7.65225E-07  3.40774E-05  4.21313E-05  1.99751E-05  5.87550E-06  1.43526E-06
 10.500  8.33013E-06  1.03388E-05  3.94119E-06  9.49080E-07  5.13042E-07  2.82896E-05  3.53559E-05  1.66221E-05  4.65112E-06  1.00974E-06
 10.600  6.91145E-06  8.59213E-06  3.16442E-06  6.09130E-07  3.18343E-07  2.35171E-05  2.97537E-05  1.39264E-05  3.71318E-06  6.90518E-07
 10.700  5.75867E-06  7.18928E-06  2.57668E-06  3.67483E-07  1.68762E-07  1.95701E-05  2.50958E-05  1.17432E-05  2.99553E-06  4.54507E-07
 10.800  4.81485E-06  6.05059E-06  2.12775E-06  1.98626E-07  5.47952E-08  1.62967E-05  2.12022E-05  9.95978E-06  2.44609E-06  2.83188E-07
 10.900  4.03648E-06  5.11628E-06  1.78052E-06  8.33520E-08 -3.08547E-08  1.35747E-05  1.79309E-05  8.48908E-06  2.02417E-06  1.61771E-07
 11.000  3.39022E-06  4.34158E-06  1.50775E-06  7.22949E-09 -9.38272E-08  1.13060E-05  1.51700E-05  7.26414E-06  1.69820E-06  7.84775E-08
 11.100  2.85041E-06  3.69289E-06  1.28955E-06 -4.05681E-08 -1.38533E-07  9.41140E-06  1.28307E-05  6.23373E-06  1.44389E-06  2.39485E-08
 11.200  2.39717E-06  3.14497E-06  1.11154E-06 -6.81490E-08 -1.68485E-07  7.82678E-06  1.08424E-05  5.35878E-06  1.24271E-06 -9.23199E-09
 11.300  2.01501E-06  2.67874E-06  9.63391E-07 -8.15700E-08 -1.86535E-07  6.50001E-06  9.14865E-06  4.60957E-06  1.08069E-06 -2.69172E-08
 11.400  1.69177E-06  2.27973E-06  8.37746E-07 -8.53345E-08 -1.95051E-07  5.38852E-06  7.70385E-06  3.96351E-06  9.47464E-07 -3.36975E-08
 11.500  1.41780E-06  1.93685E-06  7.29436E-07 -8.27665E-08 -1.96032E-07  4.45738E-06  6.47080E-06  3.40339E-06  8.35424E-07 -3.31387E-08
 11.600  1.18533E-06  1.64146E-06  6.34853E-07 -7.62929E-08 -1.91186E-07  3.67777E-06  5.41887E-06  2.91599E-06  7.39115E-07 -2.79719E-08
 11.700  9.88087E-07  1.38675E-06  5.51493E-07 -6.76577E-08 -1.81978E-07  3.02575E-06  4.52256E-06  2.49105E-06  6.54697E-07 -2.02487E-08
 11.800  8.20890E-07  1.16724E-06  4.77622E-07 -5.80868E-08 -1.69666E-07  2.48134E-06  3.76036E-06  2.12045E-06  5.79536E-07 -1.14685E-08
 11.900  6.79421E-07  9.78406E-07  4.12017E-07 -4.84160E-08 -1.55320E-07  2.02777E-06  3.11393E-06  1.79760E-06  5.11869E-07 -2.68573E-09
 12.000  5.60038E-07  8.16418E-07  3.53791E-07 -3.91900E-08 -1.39835E-07  1.65089E-06  2.56749E-06  1.51702E-06  4.50544E-07  5.39912E-09
 12.100  4.59626E-07  6.77988E-07  3.02261E-07 -3.07397E-08 -1.23945E-07  1.33870E-06  2.10733E-06  1.27401E-06  3.94821E-07  1.23620E-08
 12.200  3.75501E-07  5.60222E-07  2.56861E-07 -2.32422E-08 -1.08237E-07  1.08102E-06  1.72148E-06  1.06446E-06  3.44223E-07  1.79897E-08
 12.300  3.05331E-07  4.60544E-07  2.17089E-07 -1.67667E-08 -9.31623E-08  8.69152E-07  1.39945E-06  8.84656E-07  2.98425E-07  2.22238E-08
 12.400  2.47084E-07  3.76643E-07  1.82471E-07 -1.13091E-08 -7.90493E-08  6.95679E-07  1.13200E-06  7.31223E-07  2.57180E-07  2.51153E-08
 12.500  1.98980E-07  3.06432E-07  1.52547E-07 -6.81794E-09 -6.61199E-08  5.54277E-07  9.11056E-07  6.01064E-07  2.20270E-07  2.67864E-08
 12.600  1.59464E-07  2.48030E-07  1.26865E-07 -3.21315E-09 -5.45047E-08  4.39558E-07  7.29504E-07  4.91327E-07  1.87474E-07  2.74014E-08
 12.700  1.27182E-07  1.99748E-07  1.04977E-07 -3.99532E-10 -4.42581E-08  3.46939E-07  5.81150E-07  3.99393E-07  1.58554E-07  2.71436E-08
 12.800  1.00956E-07  1.60076E-07  8.64542E-08  1.72396E-09 -3.53737E-08  2.72535E-07  4.60605E-07  3.22867E-07  1.33253E-07  2.61986E-08
 12.900  7.97675E-08  1.27677E-07  7.08823E-08  3.25799E-09 -2.77982E-08  2.13071E-07  3.63212E-07  2.59577E-07  1.11293E-07  2.47424E-08
 13.000  6.27445E-08  1.01374E-07  5.78736E-08  4.29873E-09 -2.14447E-08  1.65791E-07  2.84973E-07  2.07568E-07  9.23829E-08  2.29340E-08
 13.100  4.91419E-08  8.01422E-08  4.70701E-08  4.93535E-09 -1.62041E-08  1.28395E-07  2.22477E-07  1.65101E-07  7.62245E-08  2.09110E-08
 13.200  3.83300E-08  6.30989E-08  3.81463E-08  5.24860E-09 -1.19542E-08  9.89697E-08  1.72838E-07  1.30641E-07  6.25216E-08  1.87879E-08
 13.300  2.97798E-08  4.94893E-08  3.08114E-08  5.31011E-09 -8.56849E-09  7.59372E-08  1.33630E-07  1.02849E-07  5.09863E-08  1.66564E-08
 13.400  2.30513E-08  3.86754E-08  2.48094E-08  5.18222E-09 -5.92182E-09  5.80010E-08  1.02830E-07  8.05688E-08  4.13446E-08  1.45866E-08
 13.500  1.77809E-08  3.01227E-08  1.99177E-08  4.91814E-09 -3.89523E-09  4.41044E-08  7.87657E-08  6.28107E-08  3.33407E-08  1.26292E-08
 13.600  1.36705E-08  2.33874E-08  1.59450E-08  4.56239E-09 -2.37914E-09  3.33914E-08  6.00622E-08  4.87364E-08  2.67406E-08  1.08183E-08
 13.700  1.04780E-08  1.81044E-08  1.27292E-08  4.15141E-09 -1.27534E-09  2.51730E-08  4.55997E-08  3.76426E-08  2.13329E-08  9.17417E-09
 13.800  8.00777E-09  1.39755E-08  1.01336E-08  3.71423E-09 -4.97925E-10  1.88986E-08  3.44722E-08  2.89441E-08  1.69296E-08  7.70567E-09
 13.900  6.10312E-09  1.07595E-08  8.04432E-09  3.27332E-09  2.65383E-11  1.41306E-08  2.59520E-08  2.21586E-08  1.33658E-08  6.41320E-09
 14.000  4.63933E-09  8.26223E-09  6.36697E-09  2.84536E-09  3.59484E-10  1.05238E-08  1.94587E-08  1.68915E-08  1.04983E-08  5.29072E-09
 14.100  3.51773E-09  6.32848E-09  5.02377E-09  2.44213E-09  5.51209E-10  7.80752E-09  1.45326E-08  1.28226E-08  8.20415E-09  4.32778E-09
 14.200  2.66072E-09  4.83506E-09  3.95094E-09  2.07129E-09  6.42014E-10  5.77058E-09  1.08118E-08  9.69375E-09  6.37908E-09  3.51106E-09
 14.300  2.00757E-09  3.68458E-09  3.09638E-09  1.73717E-09  6.63474E-10  4.24942E-09  8.01337E-09  7.29868E-09  4.93512E-09  2.82577E-09
 14.400  1.51102E-09  2.80043E-09  2.41766E-09  1.44150E-09  6.39744E-10  3.11801E-09  5.91732E-09  5.47331E-09  3.79889E-09  2.25654E-09
 14.500  1.13442E-09  2.12258E-09  1.88027E-09  1.18401E-09  5.88817E-10  2.27978E-09  4.35364E-09  4.08810E-09  2.90960E-09  1.78829E-09
 14.600  8.49457E-10  1.60414E-09  1.45623E-09  9.63024E-10  5.23697E-10  1.66111E-09  3.19166E-09  3.04134E-09  2.21728E-09  1.40665E-09
 14.700  6.34338E-10  1.20862E-09  1.12284E-09  7.75903E-10  4.53436E-10  1.20618E-09  2.33148E-09  2.25361E-09  1.68118E-09  1.09837E-09
 14.800  4.72333E-10  9.07667E-10  8.61783E-10  6.19434E-10  3.84040E-10  8.72860E-10  1.69708E-09  1.66325E-09  1.26824E-09  8.51489E-10
 14.900  3.50633E-10  6.79307E-10  6.58223E-10  4.90134E-10  3.19225E-10  6.29510E-10  1.23092E-09  1.22261E-09  9.51849E-10  6.55429E-10
 15.000  2.59451E-10  5.06550E-10  5.00221E-10  3.84475E-10  2.61044E-10  4.52466E-10  8.89625E-10  8.95073E-10  7.10725E-10  5.00993E-10
 15.100  1.91326E-10  3.76275E-10  3.78173E-10  2.99052E-10  2.10376E-10  3.24105E-10  6.40655E-10  6.52597E-10  5.27943E-10  3.80311E-10
 15.200  1.40580E-10  2.78375E-10  2.84374E-10  2.30694E-10  1.67316E-10  2.31362E-10  4.59689E-10  4.73832E-10  3.90129E-10  2.86736E-10
 15.300  1.02901E-10  2.05075E-10  2.12668E-10  1.76527E-10  1.31461E-10  1.64582E-10  3.28628E-10  3.42588E-10  2.86781E-10  2.14732E-10
 15.400  7.50210E-11  1.50409E-10  1.58152E-10  1.34012E-10  1.02129E-10  1.16665E-10  2.34057E-10  2.46637E-10  2.09699E-10  1.59740E-10
 15.500  5.44667E-11  1.09809E-10  1.16941E-10  1.00948E-10  7.85057E-11  8.24016E-11  1.66067E-10  1.76789E-10  1.52522E-10  1.18049E-10
 15.600  3.93722E-11  7.97877E-11  8.59683E-11  7.54631E-11  5.97450E-11  5.79880E-11  1.17371E-10  1.26163E-10  1.10344E-10  8.66704E-11
 15.700  2.83328E-11  5.76910E-11  6.28290E-11  5.59901E-11  4.50364E-11  4.06551E-11  8.26271E-11  8.96308E-11  7.94008E-11  6.32217E-11
 15.800  2.02938E-11  4.15047E-11  4.56466E-11  4.12364E-11  3.36409E-11  2.83944E-11  5.79334E-11  6.33872E-11  5.68269E-11  4.58219E-11
 15.900  1.44662E-11  2.97067E-11  3.29658E-11  3.01504E-11  2.49096E-11  1.97539E-11  4.04526E-11  4.46206E-11  4.04506E-11  3.30000E-11
 16.000  1.02614E-11  2.11512E-11  2.36653E-11  2.18875E-11  1.82894E-11  1.36880E-11  2.81281E-11  3.12630E-11  2.86370E-11  2.36164E-11
 16.100  7.24230E-12  1.49796E-11  1.68867E-11  1.57773E-11  1.33193E-11  9.44611E-12  1.94748E-11  2.18001E-11  2.01630E-11  1.67955E-11
 16.200  5.08533E-12  1.05517E-11  1.19771E-11  1.12939E-11  9.62310E-12  6.49170E-12  1.34250E-11  1.51285E-11  1.41188E-11  1.18706E-11
 16.300  3.55220E-12  7.39208E-12  8.44378E-12  8.02926E-12  6.89916E-12  4.44242E-12  9.21350E-12  1.04476E-11  9.83229E-12  8.33819E-12
 16.400  2.46820E-12  5.15010E-12  5.91691E-12  5.66970E-12  4.90916E-12  3.02691E-12  6.29473E-12  7.17959E-12  6.80956E-12  5.82120E-12
 16.500  1.70586E-12  3.56820E-12  4.12126E-12  3.97682E-12  3.46754E-12  2.05336E-12  4.28095E-12  4.90934E-12  4.69017E-12  4.03935E-12
 16.600  1.17263E-12  2.45840E-12  2.85329E-12  2.77100E-12  2.43169E-12  1.38670E-12  2.89791E-12  3.34018E-12  3.21263E-12  2.78605E-12
 16.700  8.01706E-13  1.68429E-12  1.96359E-12  1.91821E-12  1.69328E-12  9.32237E-13  1.95247E-12  2.26112E-12  2.18845E-12  1.91013E-12
 16.800  5.45119E-13  1.14744E-12  1.34323E-12  1.31930E-12  1.17095E-12  6.23827E-13  1.30923E-12  1.52289E-12  1.48257E-12  1.30181E-12
 16.900  3.68619E-13  7.77298E-13  9.13389E-13  9.01599E-13  8.04251E-13  4.15499E-13  8.73689E-13  1.02045E-12  9.98841E-13  8.81991E-13
 17.000  2.47894E-13  5.23586E-13  6.17413E-13  6.12253E-13  5.48698E-13  2.75437E-13  5.80211E-13  6.80270E-13  6.69244E-13  5.94054E-13
 17.100  1.65787E-13  3.50695E-13  4.14879E-13  4.13166E-13  3.71886E-13  1.81717E-13  3.83430E-13  4.51159E-13  4.45945E-13  3.97787E-13
 17.200  1.10261E-13  2.33568E-13  2.77143E-13  2.77090E-13  2.50415E-13  1.19309E-13  2.52139E-13  2.97665E-13  2.95523E-13  2.64821E-13
 17.300  7.29268E-14  1.54683E-13  1.84051E-13  1.84691E-13  1.67542E-13  7.79538E-14  1.64981E-13  1.95375E-13  1.94768E-13  1.75287E-13
 17.400  4.79666E-14  1.01863E-13  1.21516E-13  1.22355E-13  1.11388E-13  5.06839E-14  1.07413E-13  1.27569E-13  1.27663E-13  1.15359E-13
 17.500  3.13748E-14  6.67034E-14  7.97635E-14  8.05705E-14  7.35927E-14  3.27913E-14  6.95815E-14  8.28626E-14  8.32222E-14  7.54883E-14
 17.600  2.04088E-14  4.34347E-14  5.20551E-14  5.27385E-14  4.83220E-14  2.11101E-14  4.48476E-14  5.35429E-14  5.39568E-14  4.91183E-14
 17.700  1.32023E-14  2.81249E-14  3.37773E-14  3.43163E-14  3.15355E-14  1.35225E-14  2.87597E-14  3.44170E-14  3.47930E-14  3.17803E-14
 17.800  8.49341E-15  1.81101E-14  2.17922E-14  2.21980E-14  2.04562E-14  8.61878E-15  1.83494E-14  2.20077E-14  2.23143E-14  2.04474E-14
 17.900  5.43404E-15  1.15966E-14  1.39800E-14  1.42754E-14  1.31902E-14  5.46578E-15  1.16480E-14  1.39992E-14  1.42339E-14  1.30827E-14
 18.000  3.45761E-15  7.38467E-15  8.91772E-15  9.12735E-15  8.45471E-15  3.44881E-15  7.35633E-15  8.85852E-15  9.03081E-15  8.32424E-15
 18.100  2.18802E-15  4.67661E-15  5.65661E-15  5.80230E-15  5.38758E-15  2.16517E-15  4.62226E-15  5.57635E-15  5.69895E-15  5.26741E-15
 18.200  1.37706E-15  2.94537E-15  3.56802E-15  3.66753E-15  3.41318E-15  1.35244E-15  2.88953E-15  3.49199E-15  3.57714E-15  3.31486E-15
 18.300  8.61969E-16  1.84488E-15  2.23810E-15  2.30506E-15  2.14989E-15  8.40510E-16  1.79713E-15  2.17536E-15  2.23336E-15  2.07473E-15
 18.400  5.36629E-16  1.14927E-15  1.39614E-15  1.44060E-15  1.34644E-15  5.19715E-16  1.11201E-15  1.34812E-15  1.38699E-15  1.29152E-15
 18.500  3.32284E-16  7.12060E-16  8.66128E-16  8.95306E-16  8.38467E-16  3.19731E-16  6.84575E-16  8.31133E-16  8.56804E-16  7.99629E-16
 18.600  2.04647E-16  4.38791E-16  5.34388E-16  5.53331E-16  5.19203E-16  1.95705E-16  4.19288E-16  5.09752E-16  5.26497E-16  4.92426E-16
 18.700  1.25364E-16  2.68941E-16  3.27916E-16  3.40093E-16  3.19711E-16  1.19184E-16  2.55498E-16  3.11029E-16  3.21827E-16  3.01625E-16
 18.800  7.63869E-17  1.63955E-16  2.00131E-16  2.07886E-16  1.95777E-16  7.22155E-17  1.54899E-16  1.88798E-16  1.95691E-16  1.83772E-16
 18.900  4.62971E-17  9.94191E-17  1.21485E-16  1.26381E-16  1.19226E-16  4.35357E-17  9.34321E-17  1.14014E-16  1.18371E-16  1.11375E-16
 19.000  2.79117E-17  5.99657E-17  7.33494E-17  7.64152E-17  7.22097E-17  2.61134E-17  5.60708E-17  6.84993E-17  7.12296E-17  6.71430E-17
 19.100  1.67388E-17  3.59778E-17  4.40506E-17  4.59552E-17  4.34965E-17  1.55843E-17  3.34790E-17  4.09437E-17  4.26401E-17  4.02653E-17
 19.200  9.98573E-18  2.14720E-17  2.63146E-17  2.74889E-17  2.60592E-17  9.25380E-18  1.98887E-17  2.43482E-17  2.53939E-17  2.40208E-17
 19.300  5.92597E-18  1.27476E-17  1.56367E-17  1.63555E-17  1.55285E-17  5.46722E-18  1.17556E-17  1.44056E-17  1.50453E-17  1.42554E-17
 19.400  3.49843E-18  7.52858E-18  9.24281E-18  9.67972E-18  9.20398E-18  3.21388E-18  6.91344E-18  8.47985E-18  8.86830E-18  8.41627E-18
 19.500  2.05461E-18  4.42316E-18  5.43484E-18  5.69860E-18  5.42637E-18  1.87980E-18  4.04534E-18  4.96639E-18  5.20063E-18  4.94326E-18
 19.600  1.20043E-18  2.58523E-18  3.17909E-18  3.33727E-18  3.18233E-18  1.09401E-18  2.35523E-18  2.89399E-18  3.03428E-18  2.88850E-18
 19.700  6.97761E-19  1.50321E-18  1.84996E-18  1.94421E-18  1.85650E-18  6.33521E-19  1.36438E-18  1.67789E-18  1.76136E-18  1.67920E-18
 19.800  4.03501E-19  8.69570E-19  1.07097E-18  1.12676E-18  1.07738E-18  3.65035E-19  7.86442E-19  9.67929E-19  1.01727E-18  9.71217E-19
 19.900  2.32146E-19  5.00452E-19  6.16812E-19  6.49642E-19  6.21989E-19  2.09289E-19  4.51057E-19  5.55580E-19  5.84566E-19  5.58882E-19
  67 160 200   0.100
  0.000  5.79875E-02 -2.87043E-16 -4.37150E-16 -7.63065E-16  2.86098E-16  1.03563E-01 -5.12023E-16 -9.36751E-16 -4.75352E-16 -2.38892E-15
  0.100  5.80481E-02 -5.16564E-05 -3.48795E-08 -6.18025E-12 -2.41753E-15  1.03439E-01  6.73435E-05  1.56777E-08 -1.10923E-11 -1.55923E-15
  0.200  5.82277E-02 -2.03667E-04 -5.51595E-07 -3.89332E-10 -4.25943E-13  1.03073E-01  2.64831E-04  2.47090E-07 -7.05214E-10 -2.32168E-13
  0.300  5.85204E-02 -4.47320E-04 -2.73860E-06 -4.31971E-09 -1.07181E-11  1.02479E-01  5.79142E-04  1.21982E-06 -7.94324E-09 -5.91661E-12
  0.400  5.89162E-02 -7.68648E-04 -8.42229E-06 -2.33914E-08 -1.04170E-10  1.01685E-01  9.89082E-04  3.72151E-06 -4.39318E-08 -5.80549E-11
  0.500  5.94021E-02 -1.14921E-03 -1.98520E-05 -8.50775E-08 -5.99555E-10  1.00721E-01  1.46701E-03  8.68147E-06 -1.64200E-07 -3.38101E-10
  0.600  5.99622E-02 -1.56711E-03 -3.94301E-05 -2.39583E-07 -2.47002E-09  9.96293E-02  1.98068E-03  1.70243E-05 -4.78122E-07 -1.41259E-09
  0.700  6.05788E-02 -1.99823E-03 -6.94152E-05 -5.63444E-07 -8.05958E-09  9.84519E-02  2.49540E-03  2.95166E-05 -1.17001E-06 -4.68369E-09
  0.800  6.12328E-02 -2.41754E-03 -1.11626E-04 -1.15761E-06 -2.21257E-08  9.72347E-02  2.97630E-03  4.66259E-05 -2.51739E-06 -1.30881E-08
  0.900  6.19047E-02 -2.80045E-03 -1.67179E-04 -2.13860E-06 -5.31345E-08  9.60227E-02  3.39058E-03  6.84103E-05 -4.90284E-06 -3.20384E-08
  1.000  6.25754E-02 -3.12411E-03 -2.36279E-04 -3.62277E-06 -1.14631E-07  9.48585E-02  3.70958E-03  9.44525E-05 -8.81613E-06 -7.05294E-08
  1.100  6.32269E-02 -3.36859E-03 -3.18090E-04 -5.70492E-06 -2.26418E-07  9.37797E-02  3.91058E-03  1.23847E-04 -1.48439E-05 -1.42248E-07
  1.200  6.38429E-02 -3.51787E-03 -4.10691E-04 -8.43406E-06 -4.15229E-07  9.28180E-02  3.97814E-03  1.55243E-04 -2.36449E-05 -2.66439E-07
  1.300  6.44093E-02 -3.56062E-03 -5.11127E-04 -1.17899E-05 -7.14590E-07  9.19973E-02  3.90494E-03  1.86940E-04 -3.59111E-05 -4.68205E-07
  1.400  6.49150E-02 -3.49067E-03 -6.15540E-04 -1.56643E-05 -1.16363E-06  9.13335E-02  3.69216E-03  2.17028E-04 -5.23143E-05 -7.77895E-07
  1.500  6.53514E-02 -3.30720E-03 -7.19380E-04 -1.98512E-05 -1.80476E-06  9.08339E-02  3.34923E-03  2.43554E-04 -7.34424E-05 -1.22923E-06
  1.600  6.57134E-02 -3.01472E-03 -8.17667E-04 -2.40475E-05 -2.68034E-06  9.04973E-02  2.89315E-03  2.64705E-04 -9.97288E-05 -1.85592E-06
  1.700  6.59987E-02 -2.62265E-03 -9.05287E-04 -2.78680E-05 -3.82856E-06  9.03148E-02  2.34732E-03  2.78992E-04 -1.31379E-04 -2.68668E-06
  1.800  6.62078E-02 -2.14480E-03 -9.77296E-04 -3.08705E-05 -5.27916E-06  9.02704E-02  1.74003E-03  2.85411E-04 -1.68305E-04 -3.73868E-06
  1.900  6.63442E-02 -1.59859E-03 -1.02922E-03 -3.25927E-05 -7.04954E-06  9.03426E-02  1.10271E-03  2.83572E-04 -2.10066E-04 -5.00988E-06
  2.000  6.64133E-02 -1.00415E-03 -1.05731E-03 -3.25936E-05 -9.14196E-06  9.05059E-02  4.68012E-04  2.73791E-04 -2.55829E-04 -6.47069E-06
  2.100  6.64227E-02 -3.83320E-04 -1.05875E-03 -3.04957E-05 -1.15426E-05  9.07318E-02 -1.32119E-04  2.57124E-04 -3.04353E-04 -8.05594E-06
  2.200  6.63813E-02  2.41382E-04 -1.03185E-03 -2.60231E-05 -1.42227E-05  9.09911E-02 -6.68304E-04  2.35346E-04 -3.53997E-04 -9.65798E-06
  2.300  6.62993E-02  8.47737E-04 -9.76096E-04 -1.90284E-05 -1.71426E-05  9.12552E-02 -1.11537E-03  2.10880E-04 -4.02753E-04 -1.11220E-05
  2.400  6.61873E-02  1.41480E-03 -8.92240E-04 -9.50593E-06 -2.02578E-05  9.14975E-02 -1.45371E-03  1.86660E-04 -4.48312E-04 -1.22446E-05
  2.500  6.60561E-02  1.92376E-03 -7.82258E-04  2.41126E-06 -2.35273E-05  9.16950E-02 -1.67029E-03  1.65950E-04 -4.88157E-04 -1.27763E-05
  2.600  6.59162E-02  2.35865E-03 -6.49297E-04  1.64713E-05 -2.69229E-05  9.18289E-02 -1.75924E-03  1.52113E-04 -5.19668E-04 -1.24283E-05
  2.700  6.57777E-02  2.70698E-03 -4.97576E-04  3.23369E-05 -3.04388E-05  9.18857E-02 -1.72199E-03  1.48354E-04 -5.40257E-04 -1.08840E-05
  2.800  6.56493E-02  2.96019E-03 -3.32250E-04  4.96282E-05 -3.40994E-05  9.18572E-02 -1.56691E-03  1.57430E-04 -5.47502E-04 -7.81529E-06
  2.900  6.55388E-02  3.11393E-03 -1.59251E-04  6.79687E-05 -3.79658E-05  9.17408E-02 -1.30857E-03  1.81371E-04 -5.39297E-04 -2.90118E-06
  3.000  6.54519E-02  3.16826E-03  1.48944E-05  8.70268E-05 -4.21369E-05  9.15392E-02 -9.66626E-04  2.21203E-04 -5.13986E-04  4.14951E-06
  3.100  6.53925E-02  3.12759E-03  1.83274E-04  1.06546E-04 -4.67479E-05  9.12594E-02 -5.64251E-04  2.76721E-04 -4.70499E-04  1.35750E-05
  3.200  6.53621E-02  3.00062E-03  3.38808E-04  1.26360E-04 -5.19633E-05  9.09116E-02 -1.26488E-04  3.46316E-04 -4.08461E-04  2.55369E-05
  3.300  6.53598E-02  2.80001E-03  4.74502E-04  1.46382E-04 -5.79658E-05  9.05085E-02  3.21613E-04  4.26895E-04 -3.28284E-04  4.00983E-05
  3.400  6.53817E-02  2.54198E-03  5.83706E-04  1.66576E-04 -6.49419E-05  9.00633E-02  7.56834E-04  5.13904E-04 -2.31229E-04  5.72038E-05
  3.500  6.54212E-02  2.24581E-03  6.60400E-04  1.86909E-04 -7.30666E-05  8.95885E-02  1.15951E-03  6.01473E-04 -1.19429E-04  7.66642E-05
  3.600  6.54686E-02  1.93315E-03  6.99497E-04  2.07288E-04 -8.24870E-05  8.90944E-02  1.51500E-03  6.82701E-04  4.12221E-06  9.81453E-05
  3.700  6.55116E-02  1.62731E-03  6.97132E-04  2.27486E-04 -9.33090E-05  8.85879E-02  1.81481E-03  7.50056E-04  1.35633E-04  1.21162E-04
  3.800  6.55348E-02  1.35235E-03  6.50960E-04  2.47089E-04 -1.05587E-04  8.80713E-02  2.05729E-03  7.95898E-04  2.70614E-04  1.45081E-04
  3.900  6.55206E-02  1.13223E-03  5.60414E-04  2.65438E-04 -1.19321E-04  8.75416E-02  2.24780E-03  8.13084E-04  4.04039E-04  1.69125E-04
  4.000  6.54494E-02  9.89796E-04  4.26915E-04  2.81620E-04 -1.34453E-04  8.69905E-02  2.39838E-03  7.95613E-04  5.30541E-04  1.92393E-04
  4.100  6.53003E-02  9.45834E-04  2.54008E-04  2.94479E-04 -1.50881E-04  8.64039E-02  2.52694E-03  7.39272E-04  6.44657E-04  2.13880E-04
  4.200  6.50516E-02  1.01812E-03  4.74119E-05  3.02672E-04 -1.68462E-04  8.57633E-02  2.65592E-03  6.42213E-04  7.41109E-04  2.32512E-04
  4.300  6.46817E-02  1.22057E-03 -1.85056E-04  3.04768E-04 -1.87027E-04  8.50457E-02  2.81067E-03  5.05410E-04  8.15095E-04  2.47184E-04
  4.400  6.41702E-02  1.56244E-03 -4.33674E-04  2.99380E-04 -2.06398E-04  8.42257E-02  3.01752E-03  3.32948E-04  8.62598E-04  2.56814E-04
  4.500  6.34983E-02  2.04782E-03 -6.87137E-04  2.85317E-04 -2.26390E-04  8.32766E-02  3.30179E-03  1.32088E-04  8.80672E-04  2.60393E-04
  4.600  6.26502E-02  2.67518E-03 -9.33013E-04  2.61752E-04 -2.46824E-04  8.21720E-02  3.68579E-03 -8.69057E-05  8.67689E-04  2.57053E-04
  4.700  6.16134E-02  3.43726E-03 -1.15830E-03  2.28375E-04 -2.67520E-04  8.08875E-02  4.18703E-03 -3.11192E-04  8.23536E-04  2.46125E-04
  4.800  6.03796E-02  4.32118E-03 -1.35006E-03  1.85527E-04 -2.88290E-04  7.94024E-02  4.81676E-03 -5.26010E-04  7.49723E-04  2.27202E-04
  4.900  5.89451E-02  5.30879E-03 -1.49611E-03  1.34279E-04 -3.08926E-04  7.77007E-02  5.57884E-03 -7.15537E-04  6.49398E-04  2.00199E-04
  5.000  5.73111E-02  6.37730E-03 -1.58570E-03  7.64636E-05 -3.29181E-04  7.57725E-02  6.46922E-03 -8.63879E-04  5.27260E-04  1.65390E-04
  5.100  5.54840E-02  7.50016E-03 -1.61019E-03  1.46315E-05 -3.48748E-04  7.36143E-02  7.47585E-03 -9.56139E-04  3.89361E-04  1.23440E-04
  5.200  5.34746E-02  8.64804E-03 -1.56353E-03 -4.80577E-05 -3.67248E-04  7.12297E-02  8.57916E-03 -9.79453E-04  2.42804E-04  7.54049E-05
  5.300  5.12986E-02  9.79005E-03 -1.44275E-03 -1.08011E-04 -3.84217E-04  6.86291E-02  9.75298E-03 -9.23944E-04  9.53591E-05  2.27185E-05
  5.400  4.89755E-02  1.08950E-02 -1.24819E-03 -1.61427E-04 -3.99107E-04  6.58293E-02  1.09659E-02 -7.83492E-04 -4.49793E-05 -3.28585E-05
  5.500  4.65281E-02  1.19325E-02 -9.83540E-04 -2.04563E-04 -4.11298E-04  6.28529E-02  1.21830E-02 -5.56261E-04 -1.70473E-04 -8.93086E-05
  5.600  4.39816E-02  1.28745E-02 -6.55748E-04 -2.33999E-04 -4.20125E-04  5.97270E-02  1.33674E-02 -2.44954E-04 -2.74108E-04 -1.44453E-04
  5.700  4.13631E-02  1.36960E-02 -2.74672E-04 -2.46911E-04 -4.24912E-04  5.64826E-02  1.44826E-02  1.43249E-04 -3.50031E-04 -1.96064E-04
  5.800  3.87001E-02  1.43763E-02  1.47406E-04 -2.41288E-04 -4.25019E-04  5.31529E-02  1.54940E-02  5.97040E-04 -3.93903E-04 -2.41989E-04
  5.900  3.60204E-02  1.48992E-02  5.96404E-04 -2.16109E-04 -4.19896E-04  4.97720E-02  1.63704E-02  1.10161E-03 -4.03163E-04 -2.80276E-04
  6.000  3.33508E-02  1.52542E-02  1.05717E-03 -1.71438E-04 -4.09136E-04  4.63745E-02  1.70858E-02  1.63949E-03 -3.77162E-04 -3.09290E-04
  6.100  3.07166E-02  1.54360E-02  1.51425E-03 -1.08446E-04 -3.92520E-04  4.29933E-02  1.76203E-02  2.19155E-03 -3.17173E-04 -3.27811E-04
  6.200  2.81410E-02  1.54447E-02  1.95265E-03 -2.93443E-05 -3.70056E-04  3.96597E-02  1.79605E-02  2.73809E-03 -2.26273E-04 -3.35115E-04
  6.300  2.56446E-02  1.52858E-02  2.35856E-03  6.27488E-05 -3.42004E-04  3.64021E-02  1.81002E-02  3.25988E-03 -1.09108E-04 -3.31009E-04
  6.400  2.32454E-02  1.49692E-02  2.71997E-03  1.64014E-04 -3.08878E-04  3.32457E-02  1.80399E-02  3.73922E-03  2.84409E-05 -3.15848E-04
  6.500  2.09582E-02  1.45089E-02  3.02712E-03  2.70173E-04 -2.71434E-04  3.02122E-02  1.77870E-02  4.16073E-03  1.79650E-04 -2.90501E-04
  6.600  1.87947E-02  1.39221E-02  3.27290E-03  3.76763E-04 -2.30641E-04  2.73193E-02  1.73541E-02  4.51206E-03  3.37388E-04 -2.56296E-04
  6.700  1.67640E-02  1.32282E-02  3.45296E-03  4.79408E-04 -1.87626E-04  2.45811E-02  1.67591E-02  4.78435E-03  4.94548E-04 -2.14928E-04
  6.800  1.48717E-02  1.24484E-02  3.56575E-03  5.74069E-04 -1.43620E-04  2.20081E-02  1.60235E-02  4.97240E-03  6.44450E-04 -1.68351E-04
  6.900  1.31212E-02  1.16042E-02  3.61236E-03  6.57268E-04 -9.98862E-05  1.96070E-02  1.51714E-02  5.07472E-03  7.81191E-04 -1.18658E-04
  7.000  1.15133E-02  1.07169E-02  3.59625E-03  7.26246E-04 -5.76539E-05  1.73817E-02  1.42282E-02  5.09324E-03  8.99913E-04 -6.79579E-05
  7.100  1.00466E-02  9.80707E-03  3.52290E-03  7.79076E-04 -1.80516E-05  1.53328E-02  1.32199E-02  5.03295E-03  9.96986E-04 -1.82578E-05
  7.200  8.71781E-03  8.89357E-03  3.39932E-03  8.14704E-04  1.79487E-05  1.34586E-02  1.21717E-02  4.90138E-03  1.07009E-03  2.86385E-05
  7.300  7.52222E-03  7.99335E-03  3.23362E-03  8.32936E-04  4.95750E-05  1.17552E-02  1.11071E-02  4.70796E-03  1.11822E-03  7.12117E-05
  7.400  6.45374E-03  7.12103E-03  3.03452E-03  8.34367E-04  7.62833E-05  1.02168E-02  1.00478E-02  4.46342E-03  1.14159E-03  1.08283E-04
  7.500  5.50531E-03  6.28869E-03  2.81087E-03  8.20274E-04  9.77697E-05  8.83610E-03  9.01241E-03  4.17911E-03  1.14151E-03  1.39044E-04
  7.600  4.66913E-03  5.50581E-03  2.57128E-03  7.92474E-04  1.13966E-04  7.60462E-03  8.01682E-03  3.86646E-03  1.12014E-03  1.63061E-04
  7.700  3.93692E-03  4.77933E-03  2.32378E-03  7.53165E-04  1.25021E-04  6.51305E-03  7.07365E-03  3.53641E-03  1.08032E-03  1.80252E-04
  7.800  3.30013E-03  4.11374E-03  2.07555E-03  7.04770E-04  1.31271E-04  5.55143E-03  6.19238E-03  3.19907E-03  1.02532E-03  1.90851E-04
  7.900  2.75014E-03  3.51136E-03  1.83273E-03  6.49780E-04  1.33203E-04  4.70950E-03  5.37951E-03  2.86334E-03  9.58581E-04  1.95353E-04
  8.000  2.27839E-03  2.97256E-03  1.60034E-03  5.90620E-04  1.31409E-04  3.97685E-03  4.63880E-03  2.53677E-03  8.83564E-04  1.94450E-04
  8.100  1.87657E-03  2.49605E-03  1.38227E-03  5.29540E-04  1.26545E-04  3.34316E-03  3.97155E-03  2.22542E-03  8.03544E-04  1.88969E-04
  8.200  1.53671E-03  2.07925E-03  1.18125E-03  4.68527E-04  1.19290E-04  2.79833E-03  3.37700E-03  1.93388E-03  7.21489E-04  1.79806E-04
  8.300  1.25127E-03  1.71854E-03  9.98989E-04  4.09251E-04  1.10306E-04  2.33267E-03  2.85271E-03  1.66530E-03  6.39967E-04  1.67867E-04
  8.400  1.01322E-03  1.40960E-03  8.36287E-04  3.53041E-04  1.00212E-04  1.93697E-03  2.39492E-03  1.42159E-03  5.61088E-04  1.54024E-04
  8.500  8.16080E-04  1.14767E-03  6.93152E-04  3.00875E-04  8.95576E-05  1.60261E-03  1.99896E-03  1.20351E-03  4.86494E-04  1.39071E-04
  8.600  6.53960E-04  9.27770E-04  5.68971E-04  2.53406E-04  7.88118E-05  1.32163E-03  1.65952E-03  1.01088E-03  4.17364E-04  1.23704E-04
  8.700  5.21550E-04  7.44917E-04  4.62658E-04  2.10985E-04  6.83529E-05  1.08672E-03  1.37099E-03  8.42792E-04  3.54453E-04  1.08498E-04
  8.800  4.14133E-04  5.94277E-04  3.72793E-04  1.73711E-04  5.84685E-05  8.91311E-04  1.12770E-03  6.97792E-04  2.98142E-04  9.39067E-05
  8.900  3.27561E-04  4.71288E-04  2.97756E-04  1.41477E-04  4.93604E-05  7.29501E-04  9.24085E-04  5.74044E-04  2.48500E-04  8.02632E-05
  9.000  2.58226E-04  3.71740E-04  2.35833E-04  1.14016E-04  4.11530E-05  5.96085E-04  7.54856E-04  4.69490E-04  2.05349E-04  6.77897E-05
  9.100  2.03028E-04  2.91830E-04  1.85306E-04  9.09531E-05  3.39042E-05  4.86498E-04  6.15102E-04  3.81981E-04  1.68328E-04  5.66110E-05
  9.200  1.59326E-04  2.28184E-04  1.44523E-04  7.18453E-05  2.76184E-05  3.96788E-04  5.00351E-04  3.09379E-04  1.36948E-04  4.67709E-05
  9.300  1.24900E-04  1.77864E-04  1.11943E-04  5.62171E-05  2.22588E-05  3.23557E-04  4.06610E-04  2.49629E-04  1.10649E-04  3.82491E-05
  9.400  9.79013E-05  1.38345E-04  8.61725E-05  4.35905E-05  1.77594E-05  2.63914E-04  3.30363E-04  2.00821E-04  8.88387E-05  3.09786E-05
  9.500  7.68055E-05  1.07499E-04  6.59764E-05  3.35067E-05  1.40363E-05  2.15423E-04  2.68567E-04  1.61217E-04  7.09248E-05  2.48601E-05
  9.600  6.03693E-05  8.35472E-05  5.02866E-05  2.55412E-05  1.09959E-05  1.76040E-04  2.18619E-04  1.29275E-04  5.63427E-05  1.97756E-05
  9.700  4.75880E-05  6.50310E-05  3.81958E-05  1.93131E-05  8.54291E-06  1.44072E-04  1.78322E-04  1.03645E-04  4.45702E-05  1.55994E-05
  9.800  3.76574E-05  5.07643E-05  2.89471E-05  1.44898E-05  6.58511E-06  1.18120E-04  1.45840E-04  8.31700E-05  3.51371E-05  1.22056E-05
  9.900  2.99396E-05  3.97957E-05  2.19190E-05  1.07873E-05  5.03735E-06  9.70370E-05  1.19656E-04  6.68702E-05  2.76303E-05  9.47481E-06
 10.000  2.39327E-05  3.13700E-05  1.66091E-05  7.96815E-06  3.82363E-06  7.98889E-05  9.85271E-05  5.39268E-05  2.16932E-05  7.29744E-06
 10.100  1.92448E-05  2.48939E-05  1.26167E-05  5.83772E-06  2.87816E-06  6.59172E-05  8.14438E-05  4.36640E-05  1.70239E-05  5.57604E-06
 10.200  1.55719E-05  1.99059E-05  9.62636E-06  4.23894E-06  2.14542E-06  5.45092E-05  6.75916E-05  3.55297E-05  1.33697E-05  4.22604E-06
 10.300  1.26799E-05  1.60498E-05  7.39249E-06  3.04706E-06  1.57965E-06  4.51714E-05  5.63178E-05  2.90767E-05  1.05225E-05  3.17556E-06
 10.400  1.03889E-05  1.30527E-05  5.72593E-06  2.16428E-06  1.14391E-06  3.75069E-05  4.71021E-05  2.39465E-05  8.31220E-06  2.36452E-06
 10.500  8.56174E-06  1.07070E-05  4.48231E-06  1.51485E-06  8.08891E-07  3.11974E-05  3.95314E-05  1.98533E-05  6.60149E-06  1.74344E-06
 10.600  7.09361E-06  8.85575E-06  3.55238E-06  1.04063E-06  5.51723E-07  2.59876E-05  3.32787E-05  1.65711E-05  5.28019E-06  1.27207E-06
 10.700  5.90484E-06  7.38059E-06  2.85404E-06  6.97354E-07  3.54765E-07  2.16730E-05  2.80861E-05  1.39223E-05  4.26060E-06  9.17912E-07
 10.800  4.93474E-06  6.19269E-06  2.32602E-06  4.51522E-07  2.04540E-07  1.80893E-05  2.37501E-05  1.17683E-05  3.47338E-06  6.54959E-07
 10.900  4.13706E-06  5.22550E-06  1.92287E-06  2.77876E-07  9.07940E-08  1.51046E-05  2.01103E-05  1.00013E-05  2.86404E-06  4.62480E-07
 11.000  3.47642E-06  4.42926E-06  1.61106E-06  1.57422E-07  5.72402E-09  1.26126E-05  1.70401E-05  8.53784E-06  2.39004E-06  3.24019E-07
 11.100  2.92571E-06  3.76672E-06  1.36601E-06  7.59000E-08 -5.66462E-08  1.05275E-05  1.44393E-05  7.31402E-06  2.01838E-06  2.26555E-07
 11.200  2.46400E-06  3.21001E-06  1.16982E-06  2.26166E-08 -1.00947E-07  8.78010E-06  1.22285E-05  6.28076E-06  1.72369E-06  1.59811E-07
 11.300  2.07505E-06  2.73820E-06  1.00956E-06 -1.04345E-08 -1.30828E-07  7.31373E-06  1.03439E-05  5.40059E-06  1.48666E-06  1.15714E-07
 11.400  1.74616E-06  2.33548E-06  8.75969E-07 -2.92310E-08 -1.49214E-07  6.08232E-06  8.73457E-06  4.64499E-06  1.29269E-06  8.79569E-08
 11.500  1.46729E-06  1.98988E-06  7.62467E-07 -3.82139E-08 -1.58503E-07  5.04801E-06  7.35891E-06  3.99221E-06  1.13095E-06  7.16538E-08
 11.600  1.23044E-06  1.69217E-06  6.64445E-07 -4.06569E-08 -1.60684E-07  4.17955E-06  6.18293E-06  3.42558E-06  9.93482E-07  6.30657E-08
 11.700  1.02916E-06  1.43518E-06  5.78696E-07 -3.89465E-08 -1.57428E-07  3.45100E-06  5.17842E-06  2.93225E-06  8.74534E-07  5.93789E-08
 11.800  8.58178E-07  1.21323E-06  5.03005E-07 -3.47940E-08 -1.50147E-07  2.84070E-06  4.32174E-06  2.50213E-06  7.70035E-07  5.85239E-08
 11.900  7.13111E-07  1.02169E-06  4.35840E-07 -2.94008E-08 -1.40031E-07  2.33046E-06  3.59279E-06  2.12720E-06  6.77146E-07  5.90257E-08
 12.000  5.90294E-07  8.56751E-07  3.76128E-07 -2.35850E-08 -1.28073E-07  1.90492E-06  2.97436E-06  1.80086E-06  5.93918E-07  5.98786E-08
 12.100  4.86613E-07  7.15156E-07  3.23085E-07 -1.78812E-08 -1.15093E-07  1.55106E-06  2.45154E-06  1.51758E-06  5.19022E-07  6.04409E-08
 12.200  3.99392E-07  5.94085E-07  2.76111E-07 -1.26169E-08 -1.01754E-07  1.25778E-06  2.01131E-06  1.27259E-06  4.51549E-07  6.03465E-08
 12.300  3.26314E-07  4.91046E-07  2.34705E-07 -7.97212E-09 -8.85754E-08  1.01561E-06  1.64226E-06  1.06166E-06  3.90855E-07  5.94319E-08
 12.400  2.65362E-07  4.03808E-07  1.98416E-07 -4.02477E-09 -7.59508E-08  8.16458E-07  1.33436E-06  8.80965E-07  3.36452E-07  5.76757E-08
 12.500  2.14770E-07  3.30361E-07  1.66821E-07 -7.84428E-10 -6.41625E-08  6.53385E-07  1.07877E-06  7.27043E-07  2.87933E-07  5.51503E-08
 12.600  1.72993E-07  2.68887E-07  1.39502E-07  1.78269E-09 -5.33969E-08  5.20466E-07  8.67727E-07  5.96700E-07  2.44927E-07  5.19843E-08
 12.700  1.38678E-07  2.17744E-07  1.16048E-07  3.73588E-09 -4.37601E-08  4.12643E-07  6.94415E-07  4.87003E-07  2.07067E-07  4.83331E-08
 12.800  1.10646E-07  1.75454E-07  9.60559E-08  5.14743E-09 -3.52922E-08  3.25607E-07  5.52880E-07  3.95263E-07  1.73979E-07  4.43588E-08
 12.900  8.78719E-08  1.40698E-07  7.91318E-08  6.09428E-09 -2.79815E-08  2.55707E-07  4.37947E-07  3.19033E-07  1.45279E-07  4.02151E-08
 13.000  6.94717E-08  1.12304E-07  6.49001E-08  6.65253E-09 -2.17774E-08  1.99856E-07  3.45147E-07  2.56096E-07  1.20572E-07  3.60389E-08
 13.100  5.46858E-08  8.92432E-08  5.30073E-08  6.89406E-09 -1.66012E-08  1.55463E-07  2.70645E-07  2.04465E-07  9.94653E-08  3.19448E-08
 13.200  4.28673E-08  7.06198E-08  4.31271E-08  6.88462E-09 -1.23566E-08  1.20361E-07  2.11171E-07  1.62377E-07  8.15674E-08  2.80235E-08
 13.300  3.34693E-08  5.56611E-08  3.49631E-08  6.68282E-09 -8.93770E-09  9.27502E-08  1.63961E-07  1.28282E-07  6.65016E-08  2.43422E-08
 13.400  2.60331E-08  4.37074E-08  2.82502E-08  6.33984E-09 -6.23535E-09  7.11445E-08  1.26695E-07  1.00831E-07  5.39102E-08  2.09465E-08
 13.500  2.01771E-08  3.42013E-08  2.27550E-08  5.89944E-09 -4.14280E-09  5.43246E-08  9.74379E-08  7.88595E-08  4.34594E-08  1.78630E-08
 13.600  1.55860E-08  2.66754E-08  1.82745E-08  5.39827E-09 -2.55916E-09  4.12970E-08  7.45925E-08  6.13768E-08  3.48437E-08  1.51022E-08
 13.700  1.20018E-08  2.07421E-08  1.46344E-08  4.86632E-09 -1.39206E-09  3.12569E-08  5.68469E-08  4.75439E-08  2.77868E-08  1.26622E-08
 13.800  9.21460E-09  1.60824E-08  1.16867E-08  4.32753E-09 -5.59140E-10  2.35571E-08  4.31332E-08  3.66589E-08  2.20432E-08  1.05312E-08
 13.900  7.05504E-09  1.24356E-08  9.30659E-09  3.80031E-09  1.12708E-11  1.76804E-08  3.25881E-08  2.81390E-08  1.73968E-08  8.69066E-09
 14.000  5.38740E-09  9.59084E-09  7.39012E-09  3.29829E-09  3.80126E-10  1.32159E-08  2.45186E-08  2.15044E-08  1.36604E-08  7.11750E-09
 14.100  4.10360E-09  7.37820E-09  5.85100E-09  2.83094E-09  5.98144E-10  9.83975E-09  1.83725E-08  1.63636E-08  1.06729E-08  5.78607E-09
 14.200  3.11812E-09  5.66192E-09  4.61812E-09  2.40419E-09  7.06617E-10  7.29786E-09  1.37127E-08  1.23995E-08  8.29758E-09  4.66973E-09
 14.300  2.36363E-09  4.33404E-09  3.63311E-09  2.02113E-09  7.38415E-10  5.39229E-09  1.01953E-08  9.35696E-09  6.41938E-09  3.74210E-09
 14.400  1.78743E-09  3.30916E-09  2.84829E-09  1.68254E-09  7.19097E-10  3.96967E-09  7.55153E-09  7.03235E-09  4.94220E-09  2.97789E-09
 14.500  1.34842E-09  2.51999E-09  2.22478E-09  1.38746E-09  6.68035E-10  2.91189E-09  5.57264E-09  5.26409E-09  3.78652E-09  2.35353E-09
 14.600  1.01470E-09  1.91374E-09  1.73097E-09  1.13364E-09  5.99491E-10  2.12845E-09  4.09737E-09  3.92481E-09  2.88709E-09  1.84754E-09
 14.700  7.61585E-10  1.44913E-09  1.34120E-09  9.17999E-10  5.23609E-10  1.55040E-09  3.00186E-09  2.91473E-09  2.19067E-09  1.44068E-09
 14.800  5.70053E-10  1.09395E-09  1.03466E-09  7.36903E-10  4.47292E-10  1.12549E-09  2.19144E-09  2.15609E-09  1.65421E-09  1.11603E-09
 14.900  4.25459E-10  8.23138E-10  7.94534E-10  5.86499E-10  3.74966E-10  8.14259E-10  1.59417E-09  1.58863E-09  1.24306E-09  8.58908E-10
 15.000  3.16572E-10  6.17226E-10  6.07223E-10  4.62905E-10  3.09211E-10  5.87111E-10  1.15560E-09  1.16589E-09  9.29545E-10  6.56765E-10
 15.100  2.34788E-10  4.61132E-10  4.61769E-10  3.62373E-10  2.51281E-10  4.21905E-10  8.34733E-10  8.52248E-10  6.91698E-10  4.98988E-10
 15.200  1.73535E-10  3.43185E-10  3.49356E-10  2.81402E-10  2.01513E-10  3.02164E-10  6.00821E-10  6.20479E-10  5.12173E-10  3.76711E-10
 15.300  1.27797E-10  2.54371E-10  2.62913E-10  2.16805E-10  1.59644E-10  2.15672E-10  4.30911E-10  4.49908E-10  3.77360E-10  2.82610E-10
 15.400  9.37543E-11  1.87741E-10  1.96788E-10  1.65744E-10  1.25051E-10  1.53410E-10  3.07933E-10  3.24888E-10  2.76643E-10  2.10692E-10
 15.500  6.85042E-11  1.37952E-10  1.46479E-10  1.25745E-10  9.69184E-11  1.08743E-10  2.19245E-10  2.33632E-10  2.01786E-10  1.56100E-10
 15.600  4.98448E-11  1.00902E-10  1.08418E-10  9.46854E-11  7.43651E-11  7.68091E-11  1.55519E-10  1.67299E-10  1.46439E-10  1.14941E-10
 15.700  3.61098E-11  7.34524E-11  7.97882E-11  7.07718E-11  5.65181E-11  5.40583E-11  1.09897E-10  1.19286E-10  1.05731E-10  8.41162E-11
 15.800  2.60415E-11  5.32095E-11  5.83792E-11  5.25135E-11  4.25642E-11  3.79069E-11  7.73586E-11  8.46822E-11  7.59465E-11  6.11830E-11
 15.900  1.86929E-11  3.83525E-11  4.24654E-11  3.86866E-11  3.17756E-11  2.64818E-11  5.42398E-11  5.98511E-11  5.42707E-11  4.42328E-11
 16.000  1.33537E-11  2.75025E-11  3.07080E-11  2.82990E-11  2.35220E-11  1.84296E-11  3.78774E-11  4.21116E-11  3.85798E-11  3.17859E-11
 16.100  9.49271E-12  1.96192E-11  2.20746E-11  2.05562E-11  1.72704E-11  1.27758E-11  2.63427E-11  2.94953E-11  2.72822E-11  2.27047E-11
 16.200  6.71421E-12  1.39215E-11  1.57742E-11  1.48292E-11  1.25800E-11  8.82120E-12  1.82443E-11  2.05636E-11  1.91917E-11  1.61214E-11
 16.300  4.72472E-12  9.82552E-12  1.12049E-11  1.06250E-11  9.09303E-12  6.06594E-12  1.25818E-11  1.42696E-11  1.34293E-11  1.13791E-11
 16.400  3.30750E-12  6.89705E-12  7.91182E-12  7.56166E-12  6.52328E-12  4.15398E-12  8.63933E-12  9.85535E-12  9.34739E-12  7.98451E-12
 16.500  2.30321E-12  4.81491E-12  5.55327E-12  5.34581E-12  4.64546E-12  2.83264E-12  5.90613E-12  6.77412E-12  6.47168E-12  5.56971E-12
 16.600  1.59535E-12  3.34281E-12  3.87460E-12  3.75449E-12  3.28447E-12  1.92330E-12  4.01961E-12  4.63377E-12  4.45685E-12  3.86257E-12
 16.700  1.09911E-12  2.30793E-12  2.68730E-12  2.61977E-12  2.30588E-12  1.30016E-12  2.72328E-12  3.15426E-12  3.05294E-12  2.66312E-12
 16.800  7.53144E-13  1.58455E-12  1.85278E-12  1.81626E-12  1.60769E-12  8.75009E-13  1.83655E-12  2.13660E-12  2.08010E-12  1.82554E-12
 16.900  5.13272E-13  1.08183E-12  1.26985E-12  1.25120E-12  1.11330E-12  5.86226E-13  1.23279E-12  1.44011E-12  1.40969E-12  1.24420E-12
 17.000  3.47889E-13  7.34476E-13  8.65202E-13  8.56518E-13  7.65803E-13  3.90956E-13  8.23631E-13  9.65832E-13  9.50240E-13  8.43133E-13
 17.100  2.34504E-13  4.95856E-13  5.86036E-13  5.82685E-13  5.23310E-13  2.59523E-13  5.47656E-13  6.44508E-13  6.37111E-13  5.68102E-13
 17.200  1.57206E-13  3.32884E-13  3.94624E-13  3.93954E-13  3.55288E-13  1.71470E-13  3.62408E-13  4.27921E-13  4.24882E-13  3.80619E-13
 17.300  1.04808E-13  2.22225E-13  2.64185E-13  2.64726E-13  2.39674E-13  1.12757E-13  2.38663E-13  2.82683E-13  2.81835E-13  2.53572E-13
 17.400  6.94911E-14  1.47522E-13  1.75837E-13  1.76812E-13  1.60663E-13  7.37946E-14  1.56406E-13  1.85792E-13  1.85950E-13  1.67986E-13
 17.500  4.58214E-14  9.73846E-14  1.16359E-13  1.17385E-13  1.07028E-13  4.80632E-14  1.01998E-13  1.21490E-13  1.22032E-13  1.10666E-13
 17.600  3.00480E-14  6.39289E-14  7.65584E-14  7.74677E-14  7.08601E-14  3.11527E-14  6.61894E-14  7.90373E-14  7.96582E-14  7.25000E-14
 17.700  1.95963E-14  4.17335E-14  5.00841E-14  5.08230E-14  4.66289E-14  2.00936E-14  4.27396E-14  5.11565E-14  5.17216E-14  4.72342E-14
 17.800  1.27101E-14  2.70931E-14  3.25787E-14  3.31476E-14  3.04992E-14  1.28971E-14  2.74607E-14  3.29413E-14  3.34043E-14  3.06042E-14
 17.900  8.19870E-15  1.74916E-14  2.10721E-14  2.14939E-14  1.98301E-14  8.23726E-15  1.75559E-14  2.11034E-14  2.14598E-14  1.97207E-14
 18.000  5.25978E-15  1.12306E-14  1.35531E-14  1.38570E-14  1.28172E-14  5.23513E-15  1.11676E-14  1.34503E-14  1.37134E-14  1.26384E-14
 18.100  3.35601E-15  7.17111E-15  8.66828E-15  8.88242E-15  8.23605E-15  3.31067E-15  7.06833E-15  8.52869E-15  8.71707E-15  8.05569E-15
 18.200  2.12970E-15  4.55399E-15  5.51326E-15  5.66138E-15  5.26163E-15  2.08327E-15  4.45134E-15  5.38024E-15  5.51194E-15  5.10697E-15
 18.300  1.34420E-15  2.87626E-15  3.48720E-15  3.58805E-15  3.34212E-15  1.30439E-15  2.78920E-15  3.37669E-15  3.46700E-15  3.22021E-15
 18.400  8.43849E-16  1.80678E-15  2.19357E-15  2.26130E-15  2.11079E-15  8.12650E-16  1.73892E-15  2.10841E-15  2.16933E-15  2.01966E-15
 18.500  5.26903E-16  1.12884E-15  1.37229E-15  1.41721E-15  1.32559E-15  5.03766E-16  1.07868E-15  1.30976E-15  1.35028E-15  1.25995E-15
 18.600  3.27243E-16  7.01484E-16  8.53827E-16  8.83298E-16  8.27809E-16  3.10729E-16  6.65761E-16  8.09484E-16  8.36102E-16  7.81846E-16
 18.700  2.02158E-16  4.33584E-16  5.28369E-16  5.47507E-16  5.14080E-16  1.90705E-16  4.08842E-16  4.97744E-16  5.15033E-16  4.82605E-16
 18.800  1.24224E-16  2.66569E-16  3.25208E-16  3.37518E-16  3.17487E-16  1.16458E-16  2.49808E-16  3.04501E-16  3.15617E-16  2.96330E-16
 18.900  7.59308E-17  1.63018E-16  1.99092E-16  2.06940E-16  1.95000E-16  7.07628E-17  1.51871E-16  1.85336E-16  1.92416E-16  1.81001E-16
 19.000  4.61680E-17  9.91654E-17  1.21234E-16  1.26196E-16  1.19116E-16  4.27829E-17  9.18668E-17  1.12235E-16  1.16704E-16  1.09981E-16
 19.100  2.79243E-17  6.00061E-17  7.34320E-17  7.65440E-17  7.23685E-17  2.57376E-17  5.52923E-17  6.76225E-17  7.04203E-17  6.64809E-17
 19.200  1.68016E-17  3.61202E-17  4.42435E-17  4.61805E-17  4.37308E-17  1.54063E-17  3.31127E-17  4.05377E-17  4.22755E-17  3.99785E-17
 19.300  1.00568E-17  2.16289E-17  2.65172E-17  2.77140E-17  2.62844E-17  9.17627E-18  1.97311E-17  2.41789E-17  2.52501E-17  2.39175E-17
 19.400  5.98840E-18  1.28842E-17  1.58099E-17  1.65442E-17  1.57143E-17  5.43843E-18  1.16988E-17  1.43492E-17  1.50048E-17  1.42355E-17
 19.500  3.54746E-18  7.63535E-18  9.37706E-18  9.82446E-18  9.34531E-18  3.20719E-18  6.90185E-18  8.47301E-18  8.87146E-18  8.42966E-18
 19.600  2.09069E-18  4.50152E-18  5.53286E-18  5.80365E-18  5.52846E-18  1.88201E-18  4.05164E-18  4.97821E-18  5.21875E-18  4.96629E-18
 19.700  1.22584E-18  2.64032E-18  3.24779E-18  3.41063E-18  3.25342E-18  1.09893E-18  2.36668E-18  2.91031E-18  3.05457E-18  2.91104E-18
 19.800  7.15089E-19  1.54074E-18  1.89667E-18  1.99397E-18  1.90464E-18  6.38522E-19  1.37562E-18  1.69294E-18  1.77891E-18  1.69773E-18
 19.900  4.15027E-19  8.94518E-19  1.10197E-18  1.15975E-18  1.10927E-18  3.69182E-19  7.95631E-19  9.79915E-19  1.03083E-18  9.85143E-19
  67 161 200   0.100
  0.000  5.85481E-02 -3.02559E-16 -5.10009E-16 -3.75278E-16 -9.72733E-16  1.02254E-01 -4.80991E-16 -9.57567E-16 -6.75501E-16 -7.00940E-16
  0.100  5.86010E-02 -5.23068E-05 -3.73239E-08 -7.90206E-12 -3.64775E-15  1.02149E-01  6.75519E-05  2.14976E-08 -9.46101E-12 -3.77649E-15
  0.200  5.87578E-02 -2.06230E-04 -5.90296E-07 -4.98397E-10 -5.53156E-13  1.01839E-01  2.65602E-04  3.39027E-07 -6.01623E-10 -4.72591E-13
  0.300  5.90134E-02 -4.52943E-04 -2.93111E-06 -5.54134E-09 -1.38798E-11  1.01337E-01  5.80649E-04  1.67542E-06 -6.77954E-09 -1.19393E-11
  0.400  5.93591E-02 -7.78286E-04 -9.01592E-06 -3.00958E-08 -1.34730E-10  1.00664E-01  9.91220E-04  5.11894E-06 -3.75191E-08 -1.17256E-10
  0.500  5.97837E-02 -1.16355E-03 -2.12560E-05 -1.09890E-07 -7.74094E-10  9.98470E-02  1.46933E-03  1.19636E-05 -1.40341E-07 -6.83799E-10
  0.600  6.02734E-02 -1.58654E-03 -4.22305E-05 -3.10980E-07 -3.18237E-09  9.89200E-02  1.98238E-03  2.35136E-05 -4.09022E-07 -2.86228E-09
  0.700  6.08128E-02 -2.02273E-03 -7.43695E-05 -7.35769E-07 -1.03581E-08  9.79192E-02  2.49532E-03  4.08761E-05 -1.00195E-06 -9.51476E-09
  0.800  6.13855E-02 -2.44668E-03 -1.19639E-04 -1.52264E-06 -2.83538E-08  9.68829E-02  2.97302E-03  6.47660E-05 -2.15825E-06 -2.66794E-08
  0.900  6.19748E-02 -2.83335E-03 -1.79258E-04 -2.83737E-06 -6.78681E-08  9.58487E-02  3.38250E-03  9.53486E-05 -4.20852E-06 -6.56017E-08
  1.000  6.25641E-02 -3.15943E-03 -2.53477E-04 -4.85584E-06 -1.45880E-07  9.48527E-02  3.69509E-03  1.32136E-04 -7.57742E-06 -1.45250E-07
  1.100  6.31380E-02 -3.40458E-03 -3.41436E-04 -7.73950E-06 -2.86970E-07  9.39267E-02  3.88821E-03  1.73954E-04 -1.27755E-05 -2.95092E-07
  1.200  6.36825E-02 -3.55241E-03 -4.41117E-04 -1.16061E-05 -5.23929E-07  9.30975E-02  3.94672E-03  2.18977E-04 -2.03788E-05 -5.57780E-07
  1.300  6.41856E-02 -3.59126E-03 -5.49394E-04 -1.64999E-05 -8.97275E-07  9.23859E-02  3.86378E-03  2.64842E-04 -3.09957E-05 -9.91261E-07
  1.400  6.46374E-02 -3.51479E-03 -6.62176E-04 -2.23661E-05 -1.45343E-06  9.18056E-02  3.64118E-03  3.08814E-04 -4.52216E-05 -1.66976E-06
  1.500  6.50307E-02 -3.32212E-03 -7.74627E-04 -2.90335E-05 -2.24147E-06  9.13632E-02  3.28907E-03  3.48006E-04 -6.35848E-05 -2.68312E-06
  1.600  6.53607E-02 -3.01784E-03 -8.81448E-04 -3.62093E-05 -3.30876E-06  9.10583E-02  2.82521E-03  3.79618E-04 -8.64849E-05 -4.13395E-06
  1.700  6.56253E-02 -2.61165E-03 -9.77193E-04 -4.34875E-05 -4.69571E-06  9.08839E-02  2.27381E-03  4.01186E-04 -1.14131E-04 -6.13237E-06
  1.800  6.58247E-02 -2.11777E-03 -1.05659E-03 -5.03721E-05 -6.43064E-06  9.08268E-02  1.66391E-03  4.10818E-04 -1.46484E-04 -8.78826E-06
  1.900  6.59613E-02 -1.55420E-03 -1.11488E-03 -5.63112E-05 -8.52538E-06  9.08695E-02  1.02762E-03  4.07389E-04 -1.83205E-04 -1.22012E-05
  2.000  6.60394E-02 -9.41761E-04 -1.14804E-03 -6.07405E-05 -1.09725E-05  9.09902E-02  3.98131E-04  3.90696E-04 -2.23623E-04 -1.64486E-05
  2.100  6.60650E-02 -3.03101E-04 -1.15310E-03 -6.31283E-05 -1.37452E-05  9.11653E-02 -1.92231E-04  3.61540E-04 -2.66717E-04 -2.15733E-05
  2.200  6.60452E-02  3.38397E-04 -1.12821E-03 -6.30189E-05 -1.67997E-05  9.13700E-02 -7.13879E-04  3.21746E-04 -3.11121E-04 -2.75709E-05
  2.300  6.59882E-02  9.59663E-04 -1.07284E-03 -6.00661E-05 -2.00813E-05  9.15797E-02 -1.14162E-03  2.74105E-04 -3.55148E-04 -3.43786E-05
  2.400  6.59028E-02  1.53895E-03 -9.87754E-04 -5.40545E-05 -2.35328E-05  9.17717E-02 -1.45605E-03  2.22236E-04 -3.96844E-04 -4.18665E-05
  2.500  6.57977E-02  2.05674E-03 -8.75024E-04 -4.49044E-05 -2.71051E-05  9.19260E-02 -1.64449E-03  1.70382E-04 -4.34053E-04 -4.98330E-05
  2.600  6.56820E-02  2.49655E-03 -7.37953E-04 -3.26598E-05 -3.07686E-05  9.20260E-02 -1.70161E-03  1.23142E-04 -4.64503E-04 -5.80032E-05
  2.700  6.55641E-02  2.84556E-03 -5.80959E-04 -1.74632E-05 -3.45237E-05  9.20597E-02 -1.62949E-03  8.51443E-05 -4.85910E-04 -6.60337E-05
  2.800  6.54516E-02  3.09511E-03 -4.09437E-04  4.81020E-07 -3.84089E-05  9.20194E-02 -1.43730E-03  6.06913E-05 -4.96080E-04 -7.35211E-05
  2.900  6.53511E-02  3.24102E-03 -2.29584E-04  2.09464E-05 -4.25056E-05  9.19022E-02 -1.14048E-03  5.33842E-05 -4.93028E-04 -8.00154E-05
  3.000  6.52679E-02  3.28376E-03 -4.82056E-05  4.37206E-05 -4.69364E-05  9.17095E-02 -7.59574E-04  6.57586E-05 -4.75089E-04 -8.50374E-05
  3.100  6.52056E-02  3.22840E-03  1.27492E-04  6.86318E-05 -5.18589E-05  9.14465E-02 -3.18674E-04  9.89571E-05 -4.41027E-04 -8.80987E-05
  3.200  6.51657E-02  3.08449E-03  2.90134E-04  9.55575E-05 -5.74522E-05  9.11212E-02  1.56290E-04  1.52468E-04 -3.90140E-04 -8.87247E-05
  3.300  6.51475E-02  2.86573E-03  4.32419E-04  1.24414E-04 -6.38999E-05  9.07434E-02  6.39442E-04  2.23959E-04 -3.22349E-04 -8.64782E-05
  3.400  6.51479E-02  2.58948E-03  5.47389E-04  1.55120E-04 -7.13679E-05  9.03235E-02  1.10683E-03  3.09241E-04 -2.38274E-04 -8.09836E-05
  3.500  6.51609E-02  2.27620E-03  6.28705E-04  1.87547E-04 -7.99827E-05  8.98713E-02  1.53816E-03  4.02364E-04 -1.39291E-04 -7.19505E-05
  3.600  6.51781E-02  1.94872E-03  6.70950E-04  2.21452E-04 -8.98105E-05  8.93947E-02  1.91834E-03  4.95880E-04 -2.75567E-05 -5.91969E-05
  3.700  6.51881E-02  1.63141E-03  6.69918E-04  2.56400E-04 -1.00841E-04  8.88984E-02  2.23857E-03  5.81257E-04  9.39932E-05 -4.26702E-05
  3.800  6.51769E-02  1.34931E-03  6.22914E-04  2.91707E-04 -1.12979E-04  8.83835E-02  2.49711E-03  6.49437E-04  2.21686E-04 -2.24666E-05
  3.900  6.51285E-02  1.12711E-03  5.29016E-04  3.26384E-04 -1.26043E-04  8.78463E-02  2.69942E-03  6.91498E-04  3.51202E-04  1.15358E-06
  4.000  6.50246E-02  9.88214E-04  3.89296E-04  3.59121E-04 -1.39777E-04  8.72785E-02  2.85787E-03  6.99402E-04  4.77702E-04  2.77545E-05
  4.100  6.48457E-02  9.53691E-04  2.06973E-04  3.88307E-04 -1.53869E-04  8.66672E-02  2.99088E-03  6.66742E-04  5.96021E-04  5.67194E-05
  4.200  6.45716E-02  1.04136E-03 -1.25244E-05  4.12093E-04 -1.67980E-04  8.59953E-02  3.12162E-03  5.89446E-04  7.00887E-04  8.72532E-05
  4.300  6.41820E-02  1.26490E-03 -2.61605E-04  4.28496E-04 -1.81770E-04  8.52422E-02  3.27632E-03  4.66369E-04  7.87202E-04  1.18395E-04
  4.400  6.36577E-02  1.63316E-03 -5.30687E-04  4.35550E-04 -1.94939E-04  8.43851E-02  3.48233E-03  2.99703E-04  8.50324E-04  1.49041E-04
  4.500  6.29810E-02  2.14955E-03 -8.08504E-04  4.31473E-04 -2.07251E-04  8.34005E-02  3.76603E-03  9.51654E-05  8.86380E-04  1.77982E-04
  4.600  6.21368E-02  2.81174E-03 -1.08253E-03  4.14861E-04 -2.18557E-04  8.22648E-02  4.15081E-03 -1.38080E-04  8.92555E-04  2.03952E-04
  4.700  6.11130E-02  3.61153E-03 -1.33953E-03  3.84867E-04 -2.28804E-04  8.09569E-02  4.65522E-03 -3.87776E-04  8.67340E-04  2.25689E-04
  4.800  5.99017E-02  4.53500E-03 -1.56618E-03  3.41358E-04 -2.38038E-04  7.94582E-02  5.29135E-03 -6.39187E-04  8.10734E-04  2.42004E-04
  4.900  5.84989E-02  5.56293E-03 -1.74977E-03  2.85025E-04 -2.46383E-04  7.77550E-02  6.06377E-03 -8.75954E-04  7.24344E-04  2.51860E-04
  5.000  5.69054E-02  6.67145E-03 -1.87889E-03  2.17443E-04 -2.54015E-04  7.58384E-02  6.96883E-03 -1.08111E-03  6.11405E-04  2.54446E-04
  5.100  5.51265E-02  7.83296E-03 -1.94407E-03  1.41043E-04 -2.61128E-04  7.37057E-02  7.99458E-03 -1.23821E-03  4.76673E-04  2.49248E-04
  5.200  5.31722E-02  9.01712E-03 -1.93840E-03  5.90275E-05 -2.67888E-04  7.13600E-02  9.12120E-03 -1.33246E-03  3.26219E-04  2.36104E-04
  5.300  5.10566E-02  1.01921E-02 -1.85798E-03 -2.48010E-05 -2.74397E-04  6.88106E-02  1.03220E-02 -1.35175E-03  1.67118E-04  2.15248E-04
  5.400  4.87975E-02  1.13259E-02 -1.70218E-03 -1.06261E-04 -2.80658E-04  6.60724E-02  1.15645E-02 -1.28761E-03  7.05567E-06  1.87318E-04
  5.500  4.64159E-02  1.23876E-02 -1.47376E-03 -1.81064E-04 -2.86551E-04  6.31656E-02  1.28128E-02 -1.13577E-03 -1.46125E-04  1.53348E-04
  5.600  4.39353E-02  1.33483E-02 -1.17880E-03 -2.45100E-04 -2.91824E-04  6.01144E-02  1.40285E-02 -8.96612E-04 -2.84892E-04  1.14723E-04
  5.700  4.13807E-02  1.41828E-02 -8.26396E-04 -2.94728E-04 -2.96105E-04  5.69466E-02  1.51735E-02 -5.75191E-04 -4.02485E-04  7.31066E-05
  5.800  3.87781E-02  1.48698E-02 -4.28208E-04 -3.27034E-04 -2.98924E-04  5.36920E-02  1.62117E-02 -1.80963E-04 -4.93325E-04  3.03543E-05
  5.900  3.61536E-02  1.53934E-02  2.15711E-06 -3.40035E-04 -2.99751E-04  5.03820E-02  1.71104E-02  2.72759E-04 -5.53346E-04 -1.16016E-05
  6.000  3.35326E-02  1.57427E-02  4.49847E-04 -3.32818E-04 -2.98051E-04  4.70478E-02  1.78421E-02  7.69613E-04 -5.80214E-04 -5.08680E-05
  6.100  3.09394E-02  1.59129E-02  8.99534E-04 -3.05604E-04 -2.93331E-04  4.37203E-02  1.83858E-02  1.29117E-03 -5.73435E-04 -8.57085E-05
  6.200  2.83966E-02  1.59043E-02  1.33619E-03 -2.59717E-04 -2.85198E-04  4.04289E-02  1.87273E-02  1.81800E-03 -5.34321E-04 -1.14649E-04
  6.300  2.59244E-02  1.57229E-02  1.74581E-03 -1.97487E-04 -2.73404E-04  3.72007E-02  1.88597E-02  2.33081E-03 -4.65853E-04 -1.36567E-04
  6.400  2.35407E-02  1.53793E-02  2.11604E-03 -1.22073E-04 -2.57883E-04  3.40603E-02  1.87837E-02  2.81147E-03 -3.72421E-04 -1.50750E-04
  6.500  2.12607E-02  1.48881E-02  2.43672E-03 -3.72403E-05 -2.38766E-04  3.10293E-02  1.85065E-02  3.24390E-03 -2.59494E-04 -1.56927E-04
  6.600  1.90969E-02  1.42674E-02  2.70022E-03  5.28971E-05 -2.16390E-04  2.81261E-02  1.80417E-02  3.61486E-03 -1.33231E-04 -1.55268E-04
  6.700  1.70588E-02  1.35376E-02  2.90161E-03  1.44143E-04 -1.91277E-04  2.53660E-02  1.74080E-02  3.91441E-03 -7.53657E-08 -1.46352E-04
  6.800  1.51534E-02  1.27206E-02  3.03877E-03  2.32475E-04 -1.64106E-04  2.27606E-02  1.66279E-02  4.13623E-03  1.33642E-04 -1.31108E-04
  6.900  1.33850E-02  1.18389E-02  3.11219E-03  3.14274E-04 -1.35670E-04  2.03187E-02  1.57269E-02  4.27761E-03  2.62061E-04 -1.10733E-04
  7.000  1.17557E-02  1.09147E-02  3.12476E-03  3.86504E-04 -1.06823E-04  1.80458E-02  1.47319E-02  4.33933E-03  3.80086E-04 -8.66041E-05
  7.100  1.02651E-02  9.96935E-03  3.08139E-03  4.46841E-04 -7.84251E-05  1.59446E-02  1.36703E-02  4.32525E-03  4.83601E-04 -6.01751E-05
  7.200  8.91125E-03  9.02241E-03  2.98861E-03  4.93741E-04 -5.12938E-05  1.40152E-02  1.25687E-02  4.24185E-03  5.69610E-04 -3.28857E-05
  7.300  7.69023E-03  8.09142E-03  2.85404E-03  5.26455E-04 -2.61526E-05  1.22555E-02  1.14520E-02  4.09761E-03  6.36273E-04 -6.07438E-06
  7.400  6.59686E-03  7.19141E-03  2.68600E-03  5.44981E-04 -3.59648E-06  1.06612E-02  1.03427E-02  3.90241E-03  6.82881E-04  1.90902E-05
  7.500  5.62476E-03  6.33477E-03  2.49296E-03  5.49984E-04  1.59343E-05  9.22639E-03  9.26063E-03  3.66688E-03  7.09751E-04  4.16602E-05
  7.600  4.76670E-03  5.53113E-03  2.28323E-03  5.42678E-04  3.21662E-05  7.94363E-03  8.22221E-03  3.40181E-03  7.18079E-04  6.09379E-05
  7.700  4.01475E-03  4.78742E-03  2.06455E-03  5.24686E-04  4.49927E-05  6.80439E-03  7.24055E-03  3.11765E-03  7.09749E-04  7.64852E-05
  7.800  3.36059E-03  4.10806E-03  1.84387E-03  4.97899E-04  5.44625E-05  5.79925E-03  6.32537E-03  2.82408E-03  6.87136E-04  8.81138E-05
  7.900  2.79567E-03  3.49515E-03  1.62714E-03  4.64336E-04  6.07598E-05  4.91825E-03  5.48322E-03  2.52969E-03  6.52906E-04  9.58608E-05
  8.000  2.31141E-03  2.94874E-03  1.41926E-03  4.26017E-04  6.41772E-05  4.15106E-03  4.71774E-03  2.24180E-03  6.09824E-04  9.99525E-05
  8.100  1.89937E-03  2.46724E-03  1.22397E-03  3.84855E-04  6.50855E-05  3.48727E-03  4.02998E-03  1.96631E-03  5.60597E-04  1.00762E-04
  8.200  1.55139E-03  2.04764E-03  1.04394E-03  3.42575E-04  6.39030E-05  2.91660E-03  3.41881E-03  1.70771E-03  5.07742E-04  9.87619E-05
  8.300  1.25969E-03  1.68596E-03  8.80841E-04  3.00656E-04  6.10661E-05  2.42903E-03  2.88138E-03  1.46916E-03  4.53489E-04  9.44828E-05
  8.400  1.01699E-03  1.37748E-03  7.35463E-04  2.60300E-04  5.70035E-05  2.01498E-03  2.41347E-03  1.25257E-03  3.99725E-04  8.84701E-05
  8.500  8.16551E-04  1.11708E-03  6.07837E-04  2.22424E-04  5.21151E-05  1.66542E-03  2.00994E-03  1.05878E-03  3.47959E-04  8.12518E-05
  8.600  6.52214E-04  8.99458E-04  4.97402E-04  1.87665E-04  4.67570E-05  1.37199E-03  1.66503E-03  8.87724E-04  2.99325E-04  7.33115E-05
  8.700  5.18442E-04  7.19340E-04  4.03147E-04  1.56410E-04  4.12312E-05  1.12697E-03  1.37273E-03  7.38642E-04  2.54606E-04  6.50709E-05
  8.800  4.10310E-04  5.71663E-04  3.23751E-04  1.28825E-04  3.57810E-05  9.23426E-04  1.12697E-03  6.10242E-04  2.14265E-04  5.68786E-05
  8.900  3.23489E-04  4.51676E-04  2.57706E-04  1.04898E-04  3.05912E-05  7.55112E-04  9.21881E-04  5.00874E-04  1.78498E-04  4.90068E-05
  9.000  2.54226E-04  3.55028E-04  2.03422E-04  8.44766E-05  2.57912E-05  6.16523E-04  7.51895E-04  4.08679E-04  1.47283E-04  4.16537E-05
  9.100  1.99301E-04  2.77819E-04  1.59316E-04  6.73112E-05  2.14614E-05  5.02841E-04  6.11882E-04  3.31707E-04  1.20434E-04  3.49491E-05
  9.200  1.55985E-04  2.16613E-04  1.23870E-04  5.30880E-05  1.76405E-05  4.09891E-04  4.97198E-04  2.68018E-04  9.76473E-05  2.89644E-05
  9.300  1.21994E-04  1.68439E-04  9.56766E-05  4.14613E-05  1.43344E-05  3.34100E-04  4.03717E-04  2.15753E-04  7.85469E-05  2.37223E-05
  9.400  9.54321E-05  1.30766E-04  7.34716E-05  3.20773E-05  1.15236E-05  2.72431E-04  3.27830E-04  1.73185E-04  6.27198E-05  1.92083E-05
  9.500  7.47467E-05  1.01473E-04  5.61422E-05  2.45936E-05  9.17193E-06  2.22329E-04  2.66427E-04  1.38750E-04  4.97441E-05  1.53812E-05
  9.600  5.86780E-05  7.88048E-05  4.27319E-05  1.86917E-05  7.23243E-06  1.81661E-04  2.16863E-04  1.11060E-04  3.92109E-05  1.21819E-05
  9.700  4.62141E-05  6.13302E-05  3.24341E-05  1.40853E-05  5.65326E-06  1.48660E-04  1.76914E-04  8.89094E-05  3.07386E-05  9.54212E-06
  9.800  3.65498E-05  4.78952E-05  2.45806E-05  1.05242E-05  4.38186E-06  1.21873E-04  1.44732E-04  7.12667E-05  2.39818E-05  7.38984E-06
  9.900  2.90502E-05  3.75804E-05  1.86269E-05  7.79511E-06  3.36800E-06  1.00111E-04  1.18797E-04  5.72617E-05  1.86356E-05  5.65443E-06
 10.000  2.32184E-05  2.96615E-05  1.41359E-05  5.72028E-06  2.56584E-06  8.24072E-05  9.78657E-05  4.61704E-05  1.44366E-05  4.26963E-06
 10.100  1.86689E-05  2.35732E-05  1.07614E-05  4.15420E-06  1.93501E-06  6.79778E-05  8.09347E-05  3.73975E-05  1.11616E-05  3.17555E-06
 10.200  1.51038E-05  1.88780E-05  8.23268E-06  2.97993E-06  1.44103E-06  5.61913E-05  6.71953E-05  3.04584E-05  8.62369E-06  2.31957E-06
 10.300  1.22947E-05  1.52405E-05  6.34020E-06  2.10492E-06  1.05523E-06  4.65390E-05  5.60018E-05  2.49625E-05  6.66913E-06  1.65653E-06
 10.400  1.00670E-05  1.24047E-05  4.92360E-06  1.45688E-06  7.54337E-07  3.86128E-05  4.68402E-05  2.05975E-05  5.17246E-06  1.14843E-06
 10.500  8.28778E-06  1.01770E-05  3.86111E-06  9.80010E-07  5.19815E-07  3.20850E-05  3.93034E-05  1.71158E-05  4.03244E-06  7.63765E-07
 10.600  6.85582E-06  8.41112E-06  3.06104E-06  6.31641E-07  3.37160E-07  2.66932E-05  3.30698E-05  1.43223E-05  3.16811E-06  4.76756E-07
 10.700  5.69431E-06  6.99728E-06  2.45481E-06  3.79395E-07  1.95181E-07  2.22268E-05  2.78856E-05  1.20644E-05  2.51516E-06  2.66475E-07
 10.800  4.74484E-06  5.85322E-06  1.99143E-06  1.98840E-07  8.53159E-08  1.85169E-05  2.35510E-05  1.02235E-05  2.02294E-06  1.16059E-07
 10.900  3.96293E-06  4.91745E-06  1.63326E-06  7.16091E-08  1.04463E-09  1.54277E-05  1.99084E-05  8.70794E-06  1.65183E-06  1.19723E-08
 11.000  3.31461E-06  4.14403E-06  1.35264E-06 -1.60736E-08 -6.26162E-08  1.28496E-05  1.68336E-05  7.44745E-06  1.37111E-06 -5.66175E-08
 11.100  2.77385E-06  3.49861E-06  1.12940E-06 -7.45293E-08 -1.09515E-07  1.06942E-05  1.42281E-05  6.38825E-06  1.15714E-06 -9.83645E-08
 11.200  2.32055E-06  2.95549E-06  9.48913E-07 -1.11490E-07 -1.42678E-07  8.88991E-06  1.20135E-05  5.48950E-06  9.91958E-07 -1.20167E-07
 11.300  1.93910E-06  2.49531E-06  8.00636E-07 -1.32749E-07 -1.64544E-07  7.37817E-06  1.01271E-05  4.72022E-06  8.62071E-07 -1.27508E-07
 11.400  1.61726E-06  2.10343E-06  6.77030E-07 -1.42650E-07 -1.77133E-07  6.11121E-06  8.51831E-06  4.05700E-06  7.57498E-07 -1.24719E-07
 11.500  1.34534E-06  1.76863E-06  5.72720E-07 -1.44449E-07 -1.82161E-07  5.04968E-06  7.14588E-06  3.48205E-06  6.70996E-07 -1.15197E-07
 11.600  1.11554E-06  1.48218E-06  4.83881E-07 -1.40587E-07 -1.81117E-07  4.16105E-06  5.97578E-06  2.98180E-06  5.97416E-07 -1.01568E-07
 11.700  9.21537E-07  1.23717E-06  4.07775E-07 -1.32894E-07 -1.75310E-07  3.41820E-06  4.97962E-06  2.54573E-06  5.33195E-07 -8.58308E-08
 11.800  7.58075E-07  1.02797E-06  3.42408E-07 -1.22740E-07 -1.65896E-07  2.79846E-06  4.13344E-06  2.16555E-06  4.75942E-07 -6.94638E-08
 11.900  6.20759E-07  8.49915E-07  2.86287E-07 -1.11149E-07 -1.53894E-07  2.28269E-06  3.41676E-06  1.83454E-06  4.24112E-07 -5.35256E-08
 12.000  5.05851E-07  6.99009E-07  2.38244E-07 -9.88856E-08 -1.40192E-07  1.85474E-06  2.81190E-06  1.54710E-06  3.76747E-07 -3.87335E-08
 12.100  4.10132E-07  5.71776E-07  1.97317E-07 -8.65163E-08 -1.25551E-07  1.50086E-06  2.30350E-06  1.29842E-06  3.33279E-07 -2.55341E-08
 12.200  3.30810E-07  4.65136E-07  1.62674E-07 -7.44566E-08 -1.10609E-07  1.20935E-06  1.87808E-06  1.08425E-06  2.93388E-07 -1.41634E-08
 12.300  2.65447E-07  3.76332E-07  1.33566E-07 -6.30058E-08 -9.58881E-08  9.70194E-07  1.52384E-06  9.00737E-07  2.56888E-07 -4.69756E-09
 12.400  2.11909E-07  3.02884E-07  1.09300E-07 -5.23722E-08 -8.17941E-08  7.74864E-07  1.23037E-06  7.44390E-07  2.23664E-07  2.90373E-09
 12.500  1.68331E-07  2.42561E-07  8.92331E-08 -4.26911E-08 -6.86298E-08  6.16066E-07  9.88545E-07  6.11975E-07  1.93617E-07  8.76125E-09
 12.600  1.33085E-07  1.93366E-07  7.27663E-08 -3.40400E-08 -5.66031E-08  4.87591E-07  7.90372E-07  5.00517E-07  1.66639E-07  1.30473E-08
 12.700  1.04759E-07  1.53526E-07  5.93479E-08 -2.64486E-08 -4.58384E-08  3.84163E-07  6.28874E-07  4.07283E-07  1.42602E-07  1.59624E-08
 12.800  8.21382E-08  1.21475E-07  4.84778E-08 -1.99087E-08 -3.63895E-08  3.01317E-07  4.97999E-07  3.29776E-07  1.21348E-07  1.77178E-08
 12.900  6.41814E-08  9.58524E-08  3.97102E-08 -1.43819E-08 -2.82515E-08  2.35294E-07  3.92530E-07  2.65740E-07  1.02698E-07  1.85220E-08
 13.000  5.00081E-08  7.54856E-08  3.26557E-08 -9.80608E-09 -2.13743E-08  1.82944E-07  3.08004E-07  2.13149E-07  8.64525E-08  1.85717E-08
 13.100  3.88797E-08  5.93770E-08  2.69805E-08 -6.10252E-09 -1.56739E-08  1.41644E-07  2.40628E-07  1.70208E-07  7.24013E-08  1.80459E-08
 13.200  3.01825E-08  4.66891E-08  2.24047E-08 -3.18119E-09 -1.10436E-08  1.09223E-07  1.87204E-07  1.35343E-07  6.03296E-08  1.71019E-08
 13.300  2.34120E-08  3.67270E-08  1.86980E-08 -9.46075E-10 -7.36331E-09  8.38932E-08  1.45059E-07  1.07186E-07  5.00245E-08  1.58746E-08
 13.400  1.81580E-08  2.89211E-08  1.56745E-08  7.00290E-10 -4.50742E-09  6.41971E-08  1.11974E-07  8.45601E-08  4.12810E-08  1.44759E-08
 13.500  1.40899E-08  2.28105E-08  1.31872E-08  1.85309E-09 -2.35150E-09  4.89504E-08  8.61236E-08  6.64663E-08  3.39050E-08  1.29960E-08
 13.600  1.09442E-08  1.80257E-08  1.11215E-08  2.60223E-09 -7.76942E-10  3.71989E-08  6.60144E-08  5.20617E-08  2.77172E-08  1.15054E-08
 13.700  8.51250E-09  1.42742E-08  9.38988E-09  3.03012E-09  3.25546E-10  2.81783E-08  5.04370E-08  4.06423E-08  2.25535E-08  1.00569E-08
 13.800  6.63165E-09  1.13259E-08  7.92585E-09  3.21022E-09  1.05376E-09  2.12809E-08  3.84175E-08  3.16251E-08  1.82667E-08  8.68798E-09
 13.900  5.17480E-09  9.00195E-09  6.67956E-09  3.20627E-09  1.49291E-09  1.60261E-08  2.91774E-08  2.45313E-08  1.47258E-08  7.42342E-09
 14.000  4.04400E-09  7.16370E-09  5.61354E-09  3.07211E-09  1.71539E-09  1.20363E-08  2.20984E-08  1.89700E-08  1.18154E-08  6.27762E-09
 14.100  3.16401E-09  5.70442E-09  4.69946E-09  2.85196E-09  1.78119E-09  9.01657E-09  1.66924E-08  1.46247E-08  9.43511E-09  5.25676E-09
 14.200  2.47731E-09  4.54202E-09  3.91547E-09  2.58108E-09  1.73877E-09  6.73785E-09  1.25764E-08  1.12403E-08  7.49791E-09  4.36075E-09
 14.300  1.93994E-09  3.61344E-09  3.24428E-09  2.28665E-09  1.62629E-09  5.02302E-09  9.45126E-09  8.61229E-09  5.92918E-09  3.58495E-09
 14.400  1.51842E-09  2.87005E-09  2.67169E-09  1.98883E-09  1.47293E-09  3.73588E-09  7.08482E-09  6.57791E-09  4.66520E-09  2.92158E-09
 14.500  1.18711E-09  2.27420E-09  2.18566E-09  1.70182E-09  1.30027E-09  2.77212E-09  5.29744E-09  5.00779E-09  3.65199E-09  2.36093E-09
 14.600  9.26389E-10  1.79653E-09  1.77562E-09  1.43499E-09  1.12366E-09  2.05217E-09  3.95076E-09  3.79966E-09  2.84401E-09  1.89225E-09
 14.700  7.21129E-10  1.41393E-09  1.43211E-09  1.19384E-09  9.53456E-10  1.51558E-09  2.93858E-09  2.87297E-09  2.20311E-09  1.50450E-09
 14.800  5.59605E-10  1.10807E-09  1.14651E-09  9.80926E-10  7.96131E-10  1.11653E-09  2.17969E-09  2.16443E-09  1.69749E-09  1.18687E-09
 14.900  4.32667E-10  8.64237E-10  9.10968E-10  7.96658E-10  6.55251E-10  8.20438E-10  1.61211E-09  1.62449E-09  1.30080E-09  9.29144E-10
 15.000  3.33128E-10  6.70578E-10  7.18327E-10  6.39946E-10  5.32264E-10  6.01242E-10  1.18872E-09  1.21447E-09  9.91316E-10  7.21926E-10
 15.100  2.55308E-10  5.17447E-10  5.62110E-10  5.08739E-10  4.27153E-10  4.39358E-10  8.73739E-10  9.04251E-10  7.51247E-10  5.56788E-10
 15.200  1.94693E-10  3.96971E-10  4.36517E-10  4.00438E-10  3.38948E-10  3.20098E-10  6.40070E-10  6.70432E-10  5.66103E-10  4.26312E-10
 15.300  1.47683E-10  3.02714E-10  3.36412E-10  3.12207E-10  2.66115E-10  2.32473E-10  4.67246E-10  4.94905E-10  4.24158E-10  3.24080E-10
 15.400  1.11402E-10  2.29407E-10  2.57307E-10  2.41197E-10  2.06842E-10  1.68270E-10  3.39829E-10  3.63688E-10  3.15980E-10  2.44630E-10
 15.500  8.35495E-11  1.72754E-10  1.95329E-10  1.84697E-10  1.59237E-10  1.21370E-10  2.46207E-10  2.66023E-10  2.34032E-10  1.83376E-10
 15.600  6.22889E-11  1.29255E-10  1.47179E-10  1.40226E-10  1.21468E-10  8.72196E-11  1.77663E-10  1.93660E-10  1.72330E-10  1.36517E-10
 15.700  4.61568E-11  9.60820E-11  1.10083E-10  1.05581E-10  9.18435E-11  6.24362E-11  1.27667E-10  1.40296E-10  1.26155E-10  1.00943E-10
 15.800  3.39919E-11  7.09557E-11  8.17375E-11  7.88543E-11  6.88550E-11  4.45154E-11  9.13442E-11  1.01131E-10  9.18117E-11  7.41403E-11
 15.900  2.48770E-11  5.20565E-11  6.02544E-11  5.84305E-11  5.11964E-11  3.16058E-11  6.50651E-11  7.25310E-11  6.64260E-11  5.40936E-11
 16.000  1.80919E-11  3.79405E-11  4.41019E-11  4.29641E-11  3.77629E-11  2.23432E-11  4.61342E-11  5.17518E-11  4.77771E-11  3.92089E-11
 16.100  1.30742E-11  2.74708E-11  3.20525E-11  3.13544E-11  2.76380E-11  1.57249E-11  3.25579E-11  3.67333E-11  3.41620E-11  2.82357E-11
 16.200  9.38839E-12  1.97602E-11  2.31334E-11  2.27134E-11  2.00745E-11  1.10164E-11  2.28667E-11  2.59358E-11  2.42834E-11  2.02031E-11
 16.300  6.69895E-12  1.41212E-11  1.65816E-11  1.63350E-11  1.44730E-11  7.68162E-12  1.59816E-11  1.82148E-11  1.71601E-11  1.43638E-11
 16.400  4.74971E-12  1.00260E-11  1.18048E-11  1.16646E-11  1.03589E-11  5.33071E-12  1.11142E-11  1.27236E-11  1.20553E-11  1.01479E-11
 16.500  3.34641E-12  7.07255E-12  8.34767E-12  8.27144E-12  7.36161E-12  3.68128E-12  7.69019E-12  8.83990E-12  8.41961E-12  7.12469E-12
 16.600  2.34289E-12  4.95718E-12  5.86388E-12  5.82513E-12  5.19511E-12  2.52964E-12  5.29390E-12  6.10828E-12  5.84610E-12  4.97120E-12
 16.700  1.63005E-12  3.45241E-12  4.09213E-12  4.07464E-12  3.64111E-12  1.72956E-12  3.62551E-12  4.19775E-12  4.03560E-12  3.44736E-12
 16.800  1.12704E-12  2.38924E-12  2.83720E-12  2.83123E-12  2.53475E-12  1.17654E-12  2.47001E-12  2.86902E-12  2.76966E-12  2.37609E-12
 16.900  7.74432E-13  1.64312E-12  1.95450E-12  1.95435E-12  1.75286E-12  7.96244E-13  1.67396E-12  1.95013E-12  1.88986E-12  1.62784E-12
 17.000  5.28870E-13  1.12297E-12  1.33788E-12  1.34032E-12  1.20424E-12  5.36090E-13  1.12850E-12  1.31827E-12  1.28212E-12  1.10855E-12
 17.100  3.58967E-13  7.62754E-13  9.10049E-13  9.13343E-13  8.21997E-13  3.59060E-13  7.56742E-13  8.86241E-13  8.64833E-13  7.50433E-13
 17.200  2.42169E-13  5.14914E-13  6.15182E-13  6.18454E-13  5.57514E-13  2.39233E-13  5.04758E-13  5.92531E-13  5.80032E-13  5.05013E-13
 17.300  1.62390E-13  3.45495E-13  4.13297E-13  4.16162E-13  3.75755E-13  1.58559E-13  3.34888E-13  3.93986E-13  3.86811E-13  3.37867E-13
 17.400  1.08242E-13  2.30423E-13  2.75972E-13  2.78311E-13  2.51680E-13  1.04536E-13  2.21000E-13  2.60534E-13  2.56498E-13  2.24729E-13
 17.500  7.17206E-14  1.52760E-13  1.83163E-13  1.84986E-13  1.67541E-13  6.85562E-14  1.45065E-13  1.71343E-13  1.69129E-13  1.48615E-13
 17.600  4.72418E-14  1.00673E-13  1.20839E-13  1.22213E-13  1.10854E-13  4.47225E-14  9.47117E-14  1.12071E-13  1.10895E-13  9.77168E-14
 17.700  3.09357E-14  6.59560E-14  7.92481E-14  8.02578E-14  7.29056E-14  2.90203E-14  6.15065E-14  7.29030E-14  7.23073E-14  6.38851E-14
 17.800  2.01402E-14  4.29591E-14  5.16668E-14  5.23936E-14  4.76631E-14  1.87316E-14  3.97296E-14  4.71665E-14  4.68851E-14  4.15307E-14
 17.900  1.30363E-14  2.78186E-14  3.34885E-14  3.40026E-14  3.09769E-14  1.20267E-14  2.55263E-14  3.03504E-14  3.02332E-14  2.68468E-14
 18.000  8.38981E-15  1.79106E-14  2.15804E-14  2.19388E-14  2.00149E-14  7.68103E-15  1.63134E-14  1.94243E-14  1.93883E-14  1.72579E-14
 18.100  5.36873E-15  1.14658E-14  1.38270E-14  1.40735E-14  1.28572E-14  4.87971E-15  1.03703E-14  1.23646E-14  1.23657E-14  1.10323E-14
 18.200  3.41611E-15  7.29841E-15  8.80875E-15  8.97629E-15  8.21191E-15  3.08372E-15  6.55733E-15  7.82860E-15  7.84377E-15  7.01366E-15
 18.300  2.16146E-15  4.61960E-15  5.58009E-15  5.69274E-15  5.21512E-15  1.93851E-15  4.12443E-15  4.93015E-15  4.94852E-15  4.43442E-15
 18.400  1.35999E-15  2.90769E-15  3.51500E-15  3.59000E-15  3.29326E-15  1.21221E-15  2.58051E-15  3.08829E-15  3.10513E-15  2.78841E-15
 18.500  8.50967E-16  1.82001E-15  2.20184E-15  2.25129E-15  2.06799E-15  7.54065E-16  1.60605E-15  1.92428E-15  1.93798E-15  1.74388E-15
 18.600  5.29534E-16  1.13293E-15  1.37163E-15  1.40396E-15  1.29137E-15  4.66625E-16  9.94335E-16  1.19266E-15  1.20308E-15  1.08475E-15
 18.700  3.27714E-16  7.01365E-16  8.49759E-16  8.70715E-16  8.01955E-16  2.87251E-16  6.12395E-16  7.35320E-16  7.42896E-16  6.71137E-16
 18.800  2.01711E-16  4.31834E-16  5.23575E-16  5.37051E-16  4.95293E-16  1.75913E-16  3.75201E-16  4.50975E-16  4.56309E-16  4.13019E-16
 18.900  1.23484E-16  2.64445E-16  3.20850E-16  3.29449E-16  3.04231E-16  1.07172E-16  2.28686E-16  2.75142E-16  2.78804E-16  2.52825E-16
 19.000  7.51891E-17  1.61069E-16  1.95559E-16  2.01005E-16  1.85861E-16  6.49560E-17  1.38663E-16  1.66992E-16  1.69457E-16  1.53948E-16
 19.100  4.55381E-17  9.75801E-17  1.18555E-16  1.21981E-16  1.12936E-16  3.91671E-17  8.36455E-17  1.00828E-16  1.02459E-16  9.32482E-17
 19.200  2.74336E-17  5.88027E-17  7.14903E-17  7.36292E-17  6.82576E-17  2.34960E-17  5.01982E-17  6.05646E-17  6.16279E-17  5.61866E-17
 19.300  1.64397E-17  3.52479E-17  4.28813E-17  4.42079E-17  4.10352E-17  1.40231E-17  2.99714E-17  3.61926E-17  3.68770E-17  3.36791E-17
 19.400  9.79980E-18  2.10175E-17  2.55857E-17  2.64030E-17  2.45393E-17  8.32683E-18  1.78035E-17  2.15175E-17  2.19530E-17  2.00833E-17
 19.500  5.81122E-18  1.24667E-17  1.51861E-17  1.56864E-17  1.45976E-17  4.91936E-18  1.05219E-17  1.27276E-17  1.30017E-17  1.19143E-17
 19.600  3.42811E-18  7.35631E-18  8.96661E-18  9.27093E-18  8.63831E-18  2.89160E-18  6.18701E-18  7.49011E-18  7.66099E-18  7.03180E-18
 19.700  2.01184E-18  4.31833E-18  5.26690E-18  5.45084E-18  5.08525E-18  1.69113E-18  3.61969E-18  4.38558E-18  4.49114E-18  4.12897E-18
 19.800  1.17460E-18  2.52191E-18  3.07778E-18  3.18828E-18  2.97815E-18  9.84083E-19  2.10705E-18  2.55489E-18  2.61955E-18  2.41215E-18
 19.900  6.82274E-19  1.46526E-18  1.78932E-18  1.85529E-18  1.73516E-18  5.69783E-19  1.22039E-18  1.48092E-18  1.52020E-18  1.40205E-18
  67 162 200   0.100
  0.000  5.83382E-02 -3.02559E-16 -4.78784E-16 -4.25315E-16 -1.27314E-15  1.02223E-01 -5.27539E-16 -8.32667E-16 -7.50556E-16 -1.80242E-15
  0.100  5.83899E-02 -5.13899E-05 -3.63729E-08 -5.88875E-12 -1.40188E-15  1.02119E-01  6.65675E-05  2.18047E-08 -8.59597E-12 -3.07555E-15
  0.200  5.85432E-02 -2.02632E-04 -5.75444E-07 -3.71537E-10 -1.69041E-13  1.01810E-01  2.61759E-04  3.44024E-07 -5.46862E-10 -3.72042E-13
  0.300  5.87931E-02 -4.45106E-04 -2.85892E-06 -4.13321E-09 -4.24742E-12  1.01310E-01  5.72345E-04  1.70136E-06 -6.16945E-09 -9.43173E-12
  0.400  5.91312E-02 -7.64981E-04 -8.80054E-06 -2.24663E-08 -4.10045E-11  1.00639E-01  9.77261E-04  5.20347E-06 -3.41967E-08 -9.28516E-11
  0.500  5.95465E-02 -1.14399E-03 -2.07685E-05 -8.21205E-08 -2.33956E-10  9.98248E-02  1.44902E-03  1.21767E-05 -1.28171E-07 -5.43226E-10
  0.600  6.00258E-02 -1.56041E-03 -4.13114E-05 -2.32712E-07 -9.53738E-10  9.89003E-02  1.95553E-03  2.39690E-05 -3.74465E-07 -2.28292E-09
  0.700  6.05542E-02 -1.99031E-03 -7.28537E-05 -5.51516E-07 -3.07380E-09  9.79018E-02  2.46221E-03  4.17405E-05 -9.19921E-07 -7.62490E-09
  0.800  6.11156E-02 -2.40878E-03 -1.17391E-04 -1.14367E-06 -8.32036E-09  9.68674E-02  2.93428E-03  6.62642E-05 -1.98799E-06 -2.14985E-08
  0.900  6.16939E-02 -2.79132E-03 -1.76214E-04 -2.13637E-06 -1.96695E-08  9.58351E-02  3.33898E-03  9.77595E-05 -3.89059E-06 -5.31979E-08
  1.000  6.22730E-02 -3.11507E-03 -2.49683E-04 -3.66679E-06 -4.17106E-08  9.48407E-02  3.64767E-03  1.35778E-04 -7.03293E-06 -1.18631E-07
  1.100  6.28379E-02 -3.36005E-03 -3.37084E-04 -5.86434E-06 -8.08782E-08  9.39165E-02  3.83762E-03  1.79159E-04 -1.19088E-05 -2.42949E-07
  1.200  6.33749E-02 -3.51008E-03 -4.36563E-04 -8.82954E-06 -1.45464E-07  9.30897E-02  3.89345E-03  2.26050E-04 -1.90844E-05 -4.63311E-07
  1.300  6.38722E-02 -3.55361E-03 -5.45160E-04 -1.26119E-05 -2.45364E-07  9.23813E-02  3.80796E-03  2.74013E-04 -2.91700E-05 -8.31457E-07
  1.400  6.43202E-02 -3.48420E-03 -6.58932E-04 -1.71903E-05 -3.91583E-07  9.18056E-02  3.58254E-03  3.20186E-04 -4.27787E-05 -1.41563E-06
  1.500  6.47116E-02 -3.30074E-03 -7.73146E-04 -2.24588E-05 -5.95603E-07  9.13694E-02  3.22700E-03  3.61499E-04 -6.04754E-05 -2.30139E-06
  1.600  6.50416E-02 -3.00744E-03 -8.82546E-04 -2.82205E-05 -8.68812E-07  9.10726E-02  2.75884E-03  3.94933E-04 -8.27163E-05 -3.59082E-06
  1.700  6.53078E-02 -2.61348E-03 -9.81648E-04 -3.41906E-05 -1.22224E-06  9.09082E-02  2.20214E-03  4.17778E-04 -1.09786E-04 -5.39969E-06
  1.800  6.55102E-02 -2.13250E-03 -1.06507E-03 -4.00090E-05 -1.66687E-06  9.08632E-02  1.58597E-03  4.27895E-04 -1.41732E-04 -7.85234E-06
  1.900  6.56507E-02 -1.58184E-03 -1.12783E-03 -4.52608E-05 -2.21479E-06  9.09195E-02  9.42629E-04  4.23943E-04 -1.78309E-04 -1.10741E-05
  2.000  6.57334E-02 -9.81690E-04 -1.16565E-03 -4.95028E-05 -2.88128E-06  9.10556E-02  3.05640E-04  4.05556E-04 -2.18933E-04 -1.51812E-05
  2.100  6.57638E-02 -3.54079E-04 -1.17521E-03 -5.22919E-05 -3.68783E-06  9.12471E-02 -2.92255E-04  3.73461E-04 -2.62649E-04 -2.02692E-05
  2.200  6.57489E-02  2.78138E-04 -1.15434E-03 -5.32116E-05 -4.66594E-06  9.14688E-02 -8.21010E-04  3.29509E-04 -3.08123E-04 -2.63992E-05
  2.300  6.56966E-02  8.92301E-04 -1.10213E-03 -5.18945E-05 -5.86119E-06  9.16961E-02 -1.25501E-03  2.76629E-04 -3.53655E-04 -3.35840E-05
  2.400  6.56155E-02  1.46693E-03 -1.01905E-03 -4.80357E-05 -7.33703E-06  9.19057E-02 -1.57449E-03  2.18694E-04 -3.97216E-04 -4.17742E-05
  2.500  6.55144E-02  1.98262E-03 -9.06923E-04 -4.13987E-05 -9.17757E-06  9.20773E-02 -1.76656E-03  1.60298E-04 -4.36516E-04 -5.08460E-05
  2.600  6.54022E-02  2.42282E-03 -7.68906E-04 -3.18110E-05 -1.14885E-05  9.21945E-02 -1.82584E-03  1.06461E-04 -4.69083E-04 -6.05904E-05
  2.700  6.52876E-02  2.77451E-03 -6.09379E-04 -1.91538E-05 -1.43955E-05  9.22452E-02 -1.75454E-03  6.22739E-05 -4.92377E-04 -7.07073E-05
  2.800  6.51785E-02  3.02868E-03 -4.33816E-04 -3.34784E-06 -1.80393E-05  9.22220E-02 -1.56209E-03  3.24945E-05 -5.03912E-04 -8.08026E-05
  2.900  6.50816E-02  3.18073E-03 -2.48602E-04  1.56602E-05 -2.25677E-05  9.21222E-02 -1.26434E-03  2.11361E-05 -5.01391E-04 -9.03912E-05
  3.000  6.50025E-02  3.23058E-03 -6.08300E-05  3.79053E-05 -2.81240E-05  9.19475E-02 -8.82301E-04  3.10628E-05 -4.82847E-04 -9.89063E-05
  3.100  6.49449E-02  3.18281E-03  1.21937E-04  6.34025E-05 -3.48326E-05  9.17034E-02 -4.40547E-04  6.36316E-05 -4.46790E-04 -1.05714E-04
  3.200  6.49106E-02  3.04641E-03  2.91925E-04  9.21315E-05 -4.27840E-05  9.13982E-02  3.45628E-05  1.18414E-04 -3.92339E-04 -1.10138E-04
  3.300  6.48988E-02  2.83461E-03  4.41436E-04  1.24007E-04 -5.20187E-05  9.10418E-02  5.16833E-04  1.93028E-04 -3.19342E-04 -1.11485E-04
  3.400  6.49065E-02  2.56435E-03  5.63139E-04  1.58838E-04 -6.25138E-05  9.06446E-02  9.82143E-04  2.83105E-04 -2.28480E-04 -1.09084E-04
  3.500  6.49275E-02  2.25578E-03  6.50395E-04  1.96270E-04 -7.41733E-05  9.02163E-02  1.41022E-03  3.82419E-04 -1.21334E-04 -1.02325E-04
  3.600  6.49532E-02  1.93151E-03  6.97567E-04  2.35736E-04 -8.68246E-05  8.97642E-02  1.78617E-03  4.83179E-04 -4.13500E-07 -9.07075E-05
  3.700  6.49718E-02  1.61580E-03  7.00341E-04  2.76403E-04 -1.00222E-04  8.92926E-02  2.10155E-03  5.76479E-04  1.30854E-04 -7.38847E-05
  3.800  6.49690E-02  1.33366E-03  6.56021E-04  3.17131E-04 -1.14059E-04  8.88018E-02  2.35511E-03  6.52900E-04  2.68195E-04 -5.17138E-05
  3.900  6.49284E-02  1.10988E-03  5.63790E-04  3.56466E-04 -1.27988E-04  8.82874E-02  2.55289E-03  7.03214E-04  4.06607E-04 -2.42976E-05
  4.000  6.48314E-02  9.67994E-04  4.24914E-04  3.92654E-04 -1.41647E-04  8.77403E-02  2.70786E-03  7.19149E-04  5.40548E-04  7.98014E-06
  4.100  6.46581E-02  9.29274E-04  2.42871E-04  4.23699E-04 -1.54694E-04  8.71469E-02  2.83904E-03  6.94160E-04  6.64168E-04  4.44316E-05
  4.200  6.43882E-02  1.01178E-03  2.33870E-05  4.47454E-04 -1.66838E-04  8.64894E-02  2.97008E-03  6.24137E-04  7.71590E-04  8.40588E-05
  4.300  6.40013E-02  1.22949E-03 -2.25643E-04  4.61755E-04 -1.77869E-04  8.57468E-02  3.12762E-03  5.07987E-04  8.57237E-04  1.25566E-04
  4.400  6.34783E-02  1.59154E-03 -4.94361E-04  4.64583E-04 -1.87691E-04  8.48962E-02  3.33928E-03  3.48027E-04  9.16160E-04  1.67398E-04
  4.500  6.28018E-02  2.10165E-03 -7.71265E-04  4.54237E-04 -1.96326E-04  8.39140E-02  3.63161E-03  1.50144E-04  9.44376E-04  2.07793E-04
  4.600  6.19569E-02  2.75784E-03 -1.04367E-03  4.29520E-04 -2.03927E-04  8.27772E-02  4.02803E-03 -7.63080E-05  9.39169E-04  2.44872E-04
  4.700  6.09321E-02  3.55224E-03 -1.29824E-03  3.89901E-04 -2.10760E-04  8.14648E-02  4.54703E-03 -3.18889E-04  8.99342E-04  2.76733E-04
  4.800  5.97200E-02  4.47129E-03 -1.52164E-03  3.35652E-04 -2.17179E-04  7.99594E-02  5.20064E-03 -5.62716E-04  8.25392E-04  3.01564E-04
  4.900  5.83173E-02  5.49614E-03 -1.70122E-03  2.67924E-04 -2.23585E-04  7.82479E-02  5.99327E-03 -7.91326E-04  7.19586E-04  3.17766E-04
  5.000  5.67254E-02  6.60328E-03 -1.82566E-03  1.88777E-04 -2.30382E-04  7.63226E-02  6.92116E-03 -9.87709E-04  5.85927E-04  3.24068E-04
  5.100  5.49501E-02  7.76544E-03 -1.88565E-03  1.01122E-04 -2.37915E-04  7.41815E-02  7.97225E-03 -1.13542E-03  4.30004E-04  3.19628E-04
  5.200  5.30019E-02  8.95262E-03 -1.87443E-03  8.60241E-06 -2.46427E-04  7.18286E-02  9.12667E-03 -1.21972E-03  2.58732E-04  3.04119E-04
  5.300  5.08953E-02  1.01333E-02 -1.78824E-03 -8.45921E-05 -2.56006E-04  6.92741E-02  1.03576E-02 -1.22859E-03  7.99878E-05  2.77775E-04
  5.400  4.86482E-02  1.12756E-02 -1.62657E-03 -1.73970E-04 -2.66558E-04  6.65332E-02  1.16327E-02 -1.15364E-03 -9.78275E-05  2.41409E-04
  5.500  4.62816E-02  1.23487E-02 -1.39230E-03 -2.55014E-04 -2.77791E-04  6.36265E-02  1.29157E-02 -9.90732E-04 -2.66271E-04  1.96385E-04
  5.600  4.38189E-02  1.33239E-02 -1.09154E-03 -3.23478E-04 -2.89220E-04  6.05782E-02  1.41683E-02 -7.40333E-04 -4.17357E-04  1.44556E-04
  5.700  4.12848E-02  1.41756E-02 -7.33405E-04 -3.75665E-04 -3.00193E-04  5.74158E-02  1.53521E-02 -4.07583E-04 -5.44025E-04  8.81575E-05
  5.800  3.87047E-02  1.48825E-02 -3.29555E-04 -4.08680E-04 -3.09934E-04  5.41688E-02  1.64304E-02 -2.02185E-06 -6.40555E-04  2.96805E-05
  5.900  3.61043E-02  1.54281E-02  1.06428E-04 -4.20629E-04 -3.17607E-04  5.08678E-02  1.73703E-02  4.62966E-04 -7.02887E-04 -2.82805E-05
  6.000  3.35084E-02  1.58012E-02  5.59716E-04 -4.10739E-04 -3.22379E-04  4.75435E-02  1.81435E-02  9.70938E-04 -7.28826E-04 -8.31847E-05
  6.100  3.09404E-02  1.59962E-02  1.01499E-03 -3.79411E-04 -3.23495E-04  4.42257E-02  1.87281E-02  1.50337E-03 -7.18127E-04 -1.32699E-04
  6.200  2.84222E-02  1.60128E-02  1.45719E-03 -3.28180E-04 -3.20347E-04  4.09429E-02  1.91091E-02  2.04071E-03 -6.72442E-04 -1.74834E-04
  6.300  2.59734E-02  1.58562E-02  1.87226E-03 -2.59601E-04 -3.12526E-04  3.77215E-02  1.92787E-02  2.56351E-03 -5.95149E-04 -2.08055E-04
  6.400  2.36114E-02  1.55362E-02  2.24776E-03 -1.77070E-04 -2.99864E-04  3.45853E-02  1.92365E-02  3.05344E-03 -4.91077E-04 -2.31357E-04
  6.500  2.13507E-02  1.50668E-02  2.57336E-03 -8.45882E-05 -2.82458E-04  3.15553E-02  1.89890E-02  3.49420E-03 -3.66149E-04 -2.44302E-04
  6.600  1.92033E-02  1.44652E-02  2.84125E-03  1.34965E-05 -2.60662E-04  2.86494E-02  1.85487E-02  3.87229E-03 -2.26978E-04 -2.47012E-04
  6.700  1.71787E-02  1.37515E-02  3.04634E-03  1.12766E-04 -2.35073E-04  2.58826E-02  1.79336E-02  4.17752E-03 -8.04386E-05 -2.40130E-04
  6.800  1.52835E-02  1.29470E-02  3.18628E-03  2.08991E-04 -2.06485E-04  2.32664E-02  1.71659E-02  4.40328E-03  6.67344E-05 -2.24744E-04
  6.900  1.35221E-02  1.20739E-02  3.26138E-03  2.98364E-04 -1.75838E-04  2.08097E-02  1.62707E-02  4.54665E-03  2.08318E-04 -2.02288E-04
  7.000  1.18965E-02  1.11544E-02  3.27436E-03  3.77681E-04 -1.44153E-04  1.85183E-02  1.52749E-02  4.60820E-03  3.38903E-04 -1.74426E-04
  7.100  1.04067E-02  1.02097E-02  3.23002E-03  4.44478E-04 -1.12467E-04  1.63951E-02  1.42060E-02  4.59169E-03  4.54114E-04 -1.42937E-04
  7.200  9.05090E-03  9.25969E-03  3.13481E-03  4.97101E-04 -8.17713E-05  1.44410E-02  1.30910E-02  4.50353E-03  5.50746E-04 -1.09594E-04
  7.300  7.82555E-03  8.32210E-03  2.99636E-03  5.34720E-04 -5.29517E-05  1.26543E-02  1.19553E-02  4.35225E-03  6.26813E-04 -7.60606E-05
  7.400  6.72585E-03  7.41244E-03  2.82304E-03  5.57286E-04 -2.67468E-05  1.10313E-02  1.08224E-02  4.14783E-03  6.81511E-04 -4.38113E-05
  7.500  5.74585E-03  6.54357E-03  2.62344E-03  5.65450E-04 -3.71713E-06  9.56677E-03  9.71274E-03  3.90111E-03  7.15117E-04 -1.40640E-05
  7.600  4.87871E-03  5.72569E-03  2.40604E-03  5.60441E-04  1.57703E-05  8.25394E-03  8.64374E-03  3.62314E-03  7.28834E-04  1.22544E-05
  7.700  4.11693E-03  4.96630E-03  2.17880E-03  5.43930E-04  3.15429E-05  7.08481E-03  7.62942E-03  3.32470E-03  7.24599E-04  3.45224E-05
  7.800  3.45254E-03  4.27037E-03  1.94889E-03  5.17875E-04  4.36097E-05  6.05053E-03  6.68044E-03  3.01581E-03  7.04875E-04  5.24145E-05
  7.900  2.87732E-03  3.64052E-03  1.72254E-03  4.84386E-04  5.21390E-05  5.14154E-03  5.80419E-03  2.70545E-03  6.72444E-04  6.58747E-05
  8.000  2.38300E-03  3.07731E-03  1.50487E-03  4.45583E-04  5.74276E-05  4.34789E-03  5.00505E-03  2.40129E-03  6.30208E-04  7.50766E-05
  8.100  1.96134E-03  2.57951E-03  1.29986E-03  4.03489E-04  5.98668E-05  3.65944E-03  4.28474E-03  2.10960E-03  5.81025E-04  8.03741E-05
  8.200  1.60438E-03  2.14447E-03  1.11041E-03  3.59939E-04  5.99067E-05  3.06609E-03  3.64266E-03  1.83517E-03  5.27566E-04  8.22501E-05
  8.300  1.30445E-03  1.76846E-03  9.38362E-04  3.16519E-04  5.80227E-05  2.55791E-03  3.07634E-03  1.58144E-03  4.72211E-04  8.12652E-05
  8.400  1.05435E-03  1.44692E-03  7.84639E-04  2.74528E-04  5.46859E-05  2.12538E-03  2.58187E-03  1.35053E-03  4.16989E-04  7.80108E-05
  8.500  8.47359E-04  1.17483E-03  6.49377E-04  2.34968E-04  5.03386E-05  1.75943E-03  2.15423E-03  1.14345E-03  3.63539E-04  7.30700E-05
  8.600  6.77331E-04  9.46908E-04  5.32077E-04  1.98547E-04  4.53767E-05  1.45159E-03  1.78776E-03  9.60244E-04  3.13105E-04  6.69856E-05
  8.700  5.38689E-04  7.57879E-04  4.31752E-04  1.65709E-04  4.01377E-05  1.19407E-03  1.47640E-03  8.00207E-04  2.66563E-04  6.02389E-05
  8.800  4.26452E-04  6.02603E-04  3.47076E-04  1.36658E-04  3.48952E-05  9.79752E-04  1.21400E-03  6.62061E-04  2.24449E-04  5.32356E-05
  8.900  3.36223E-04  4.76234E-04  2.76510E-04  1.11410E-04  2.98581E-05  8.02244E-04  9.94533E-04  5.44133E-04  1.87013E-04  4.63003E-05
  9.000  2.64171E-04  3.74304E-04  2.18414E-04  8.98255E-05  2.51748E-05  6.55870E-04  8.12250E-04  4.44507E-04  1.54270E-04  3.96777E-05
  9.100  2.06996E-04  2.92785E-04  1.71138E-04  7.16575E-05  2.09391E-05  5.35640E-04  6.61820E-04  3.61156E-04  1.26056E-04  3.35379E-05
  9.200  1.61890E-04  2.28111E-04  1.33094E-04  5.65872E-05  1.71992E-05  4.37220E-04  5.38388E-04  2.92048E-04  1.02076E-04  2.79860E-05
  9.300  1.26493E-04  1.77183E-04  1.02800E-04  4.42575E-05  1.39664E-05  3.56880E-04  4.37617E-04  2.35226E-04  8.19527E-05  2.30728E-05
  9.400  9.88409E-05  1.37351E-04  7.89174E-05  3.42999E-05  1.12245E-05  2.91446E-04  3.55697E-04  1.88860E-04  6.52658E-05  1.88064E-05
  9.500  7.73206E-05  1.06388E-04  6.02653E-05  2.63550E-05  8.93841E-06  2.38235E-04  2.89331E-04  1.51287E-04  5.15804E-05  1.51635E-05
  9.600  6.06198E-05  8.24422E-05  4.58236E-05  2.00872E-05  7.06127E-06  1.95006E-04  2.35704E-04  1.21026E-04  4.04716E-05  1.20995E-05
  9.700  4.76823E-05  6.40022E-05  3.47302E-05  1.51936E-05  5.54069E-06  1.59896E-04  1.92441E-04  9.67850E-05  3.15406E-05  9.55706E-06
  9.800  3.76664E-05  4.98455E-05  2.62690E-05  1.14087E-05  4.32332E-06  1.31370E-04  1.57564E-04  7.74540E-05  2.44250E-05  7.47295E-06
  9.900  2.99076E-05  3.89971E-05  1.98552E-05  8.50624E-06  3.35822E-06  1.08171E-04  1.29439E-04  6.20949E-05  1.88039E-05  5.78328E-06
 10.000  2.38859E-05  3.06874E-05  1.50187E-05  6.29697E-06  2.59898E-06  8.92753E-05  1.06729E-04  4.99247E-05  1.43991E-05  4.42711E-06
 10.100  1.91970E-05  2.43154E-05  1.13865E-05  4.62623E-06  2.00494E-06  7.38531E-05  8.83502E-05  4.02973E-05  1.09743E-05  3.34867E-06
 10.200  1.55295E-05  1.94158E-05  8.66669E-06  3.36972E-06  1.54154E-06  6.12346E-05  7.34293E-05  3.26858E-05  8.33166E-06  2.49862E-06
 10.300  1.26445E-05  1.56318E-05  6.63328E-06  2.42916E-06  1.18025E-06  5.08806E-05  6.12671E-05  2.66639E-05  6.30777E-06  1.83437E-06
 10.400  1.03594E-05  1.26913E-05  5.11309E-06  1.72795E-06  8.98092E-07  4.23583E-05  5.13068E-05  2.18898E-05  4.76939E-06  1.31994E-06
 10.500  8.53571E-06  1.03884E-05  3.97468E-06  1.20704E-06  6.76927E-07  3.53209E-05  4.31069E-05  1.80919E-05  3.60885E-06  9.25412E-07
 10.600  7.06825E-06  8.56817E-06  3.11903E-06  8.21452E-07  5.02721E-07  2.94902E-05  3.63184E-05  1.50552E-05  2.73994E-06  6.26220E-07
 10.700  5.87738E-06  7.11430E-06  2.47208E-06  5.37130E-07  3.64780E-07  2.46437E-05  3.06661E-05  1.26113E-05  2.09415E-06  4.02380E-07
 10.800  4.90276E-06  5.93999E-06  1.97885E-06  3.28492E-07  2.55061E-07  2.06029E-05  2.59334E-05  1.06288E-05  1.61748E-06  2.37735E-07
 10.900  4.09867E-06  4.98056E-06  1.59874E-06  1.76390E-07  1.67560E-07  1.72243E-05  2.19498E-05  9.00585E-06  1.26765E-06  1.19276E-07
 11.000  3.43038E-06  4.18793E-06  1.30199E-06  6.65372E-08  9.78115E-08  1.43927E-05  1.85808E-05  7.66407E-06  1.01183E-06  3.65573E-08
 11.100  2.87138E-06  3.52638E-06  1.06694E-06 -1.17078E-08  4.24815E-08  1.20149E-05  1.57201E-05  6.54345E-06  8.24799E-07 -1.87949E-08
 11.200  2.40137E-06  2.96939E-06  8.77913E-07 -6.62687E-08 -9.51370E-10  1.00153E-05  1.32835E-05  5.59829E-06  6.87356E-07 -5.34758E-08
 11.300  2.00466E-06  2.49714E-06  7.23678E-07 -1.03046E-07 -3.44323E-08  8.33253E-06  1.12036E-05  4.79394E-06  5.85103E-07 -7.28209E-08
 11.400  1.66902E-06  2.09480E-06  5.96227E-07 -1.26443E-07 -5.95067E-08  6.91609E-06  9.42617E-06  4.10418E-06  5.07415E-07 -8.10579E-08
 11.500  1.38478E-06  1.75107E-06  4.89879E-07 -1.39752E-07 -7.74447E-08  5.72445E-06  7.90699E-06  3.50918E-06  4.46603E-07 -8.15093E-08
 11.600  1.14420E-06  1.45725E-06  4.00598E-07 -1.45454E-07 -8.93276E-08  4.72311E-06  6.60965E-06  2.99383E-06  3.97238E-07 -7.67560E-08
 11.700  9.40954E-07  1.20646E-06  3.25487E-07 -1.45431E-07 -9.61054E-08  3.88320E-06  5.50372E-06  2.54652E-06  3.55603E-07 -6.87717E-08
 11.800  7.69801E-07  9.93083E-07  2.62414E-07 -1.41133E-07 -9.86322E-08  3.18042E-06  4.56344E-06  2.15813E-06  3.19239E-07 -5.90356E-08
 11.900  6.26289E-07  8.12418E-07  2.09745E-07 -1.33693E-07 -9.76878E-08  2.59415E-06  3.76670E-06  1.82134E-06  2.86600E-07 -4.86270E-08
 12.000  5.06594E-07  6.60390E-07  1.66155E-07 -1.24019E-07 -9.39875E-08  2.10681E-06  3.09431E-06  1.53010E-06  2.56767E-07 -3.83067E-08
 12.100  4.07376E-07  5.33391E-07  1.30509E-07 -1.12846E-07 -8.81857E-08  1.70331E-06  2.52946E-06  1.27920E-06  2.29239E-07 -2.85846E-08
 12.200  3.25696E-07  4.28163E-07  1.01782E-07 -1.00783E-07 -8.08754E-08  1.37072E-06  2.05735E-06  1.06411E-06  2.03772E-07 -1.97783E-08
 12.300  2.58949E-07  3.41738E-07  7.90233E-08 -8.83379E-08 -7.25856E-08  1.09787E-06  1.66488E-06  8.80720E-07  1.80266E-07 -1.20600E-08
 12.400  2.04831E-07  2.71411E-07  6.13381E-08 -7.59326E-08 -6.37785E-08  8.75168E-07  1.34049E-06  7.25292E-07  1.58688E-07 -5.49636E-09
 12.500  1.61302E-07  2.14720E-07  4.78855E-08 -6.39132E-08 -5.48467E-08  6.94342E-07  1.07393E-06  5.94389E-07  1.39020E-07 -7.92463E-11
 12.600  1.26571E-07  1.69448E-07  3.78862E-08 -5.25558E-08 -4.61133E-08  5.48314E-07  8.56198E-07  4.84846E-07  1.21234E-07  4.24972E-09
 12.700  9.90763E-08  1.33618E-07  3.06319E-08 -4.20704E-08 -3.78322E-08  4.31033E-07  6.79425E-07  3.93765E-07  1.05277E-07  7.58052E-09
 12.800  7.74725E-08  1.05495E-07  2.54947E-08 -3.26043E-08 -3.01916E-08  3.37359E-07  5.36758E-07  3.18508E-07  9.10668E-08  1.00209E-08
 12.900  6.06112E-08  8.35776E-08  2.19329E-08 -2.42474E-08 -2.33186E-08  2.62948E-07  4.22289E-07  2.56700E-07  7.84993E-08  1.16864E-08
 13.000  4.75263E-08  6.65897E-08  1.94935E-08 -1.70369E-08 -1.72860E-08  2.04156E-07  3.30963E-07  2.06224E-07  6.74509E-08  1.26930E-08
 13.100  3.74155E-08  5.34641E-08  1.78107E-08 -1.09648E-08 -1.21195E-08  1.57944E-07  2.58494E-07  1.65218E-07  5.77875E-08  1.31530E-08
 13.200  2.96219E-08  4.33252E-08  1.66004E-08 -5.98526E-09 -7.80629E-09  1.21800E-07  2.01279E-07  1.32062E-07  4.93714E-08  1.31708E-08
 13.300  2.36159E-08  3.54678E-08  1.56517E-08 -2.02296E-09 -4.30312E-09  9.36618E-08  1.56319E-07  1.05362E-07  4.20673E-08  1.28422E-08
 13.400  1.89763E-08  2.93346E-08  1.48177E-08  1.01876E-09 -1.54472E-09  7.18500E-08  1.21138E-07  8.39367E-08  3.57463E-08  1.22525E-08
 13.500  1.53736E-08  2.44937E-08  1.40035E-08  3.24989E-09  5.48758E-10  5.50077E-08  9.37107E-08  6.67926E-08  3.02892E-08  1.14761E-08
 13.600  1.25537E-08  2.06173E-08  1.31560E-08  4.78661E-09  2.06499E-09  4.20470E-08  7.23972E-08  5.31042E-08  2.55879E-08  1.05770E-08
 13.700  1.03235E-08  1.74608E-08  1.22530E-08  5.74518E-09  3.09390E-09  3.21022E-08  5.58777E-08  4.21919E-08  2.15459E-08  9.60884E-09
 13.800  8.53811E-09  1.48458E-08  1.12942E-08  6.23701E-09  3.72315E-09  2.44895E-08  4.30999E-08  3.35016E-08  1.80781E-08  8.61527E-09
 13.900  7.09051E-09  1.26442E-08  1.02932E-08  6.36498E-09  4.03476E-09  1.86728E-08  3.32309E-08  2.65846E-08  1.51098E-08  7.63104E-09
 14.000  5.90219E-09  1.07655E-08  9.27086E-09  6.22094E-09  4.10283E-09  1.42340E-08  2.56155E-08  2.10801E-08  1.25761E-08  6.68266E-09
 14.100  4.91603E-09  9.14631E-09  8.25115E-09  5.88434E-09  3.99216E-09  1.08493E-08  1.97420E-08  1.66995E-08  1.04199E-08  5.78940E-09
 14.200  4.09053E-09  7.74221E-09  7.25713E-09  5.42174E-09  3.75770E-09  8.26933E-09  1.52121E-08  1.32130E-08  8.59176E-09  4.96427E-09
 14.300  3.39538E-09  6.52171E-09  6.30894E-09  4.88712E-09  3.44462E-09  6.30262E-09  1.17178E-08  1.04382E-08  7.04807E-09  4.21500E-09
 14.400  2.80810E-09  5.46160E-09  5.42259E-09  4.32271E-09  3.08883E-09  4.80293E-09  9.02145E-09  8.23007E-09  5.75059E-09  3.54496E-09
 14.500  2.31162E-09  4.54390E-09  4.60943E-09  3.76019E-09  2.71787E-09  3.65882E-09  6.93989E-09  6.47390E-09  4.66557E-09  2.95414E-09
 14.600  1.89258E-09  3.75369E-09  3.87631E-09  3.22213E-09  2.35195E-09  2.78553E-09  5.33251E-09  5.07847E-09  3.76319E-09  2.43990E-09
 14.700  1.54012E-09  3.07785E-09  3.22596E-09  2.72347E-09  2.00508E-09  2.11868E-09  4.09118E-09  3.97126E-09  3.01710E-09  1.99771E-09
 14.800  1.24514E-09  2.50432E-09  2.65769E-09  2.27300E-09  1.68624E-09  1.60935E-09  3.13277E-09  3.09445E-09  2.40403E-09  1.62184E-09
 14.900  9.99747E-10  2.02171E-09  2.16814E-09  1.87475E-09  1.40038E-09  1.22037E-09  2.39328E-09  2.40182E-09  1.90351E-09  1.30580E-09
 15.000  7.97021E-10  1.61920E-09  1.75198E-09  1.52916E-09  1.14942E-09  9.23441E-10  1.82333E-09  1.85632E-09  1.49759E-09  1.04283E-09
 15.100  6.30792E-10  1.28655E-09  1.40265E-09  1.23421E-09  9.33095E-10  6.96987E-10  1.38475E-09  1.42821E-09  1.17064E-09  8.26207E-10
 15.200  4.95561E-10  1.01415E-09  1.11291E-09  9.86210E-10  7.49623E-10  5.24525E-10  1.04799E-09  1.09355E-09  9.09114E-10  6.49480E-10
 15.300  3.86439E-10  7.93145E-10  8.75306E-10  7.80509E-10  5.96274E-10  3.93432E-10  7.90070E-10  8.33091E-10  7.01400E-10  5.06646E-10
 15.400  2.99112E-10  6.15463E-10  6.82573E-10  6.12038E-10  4.69810E-10  2.94025E-10  5.93153E-10  6.31348E-10  5.37597E-10  3.92247E-10
 15.500  2.29808E-10  4.73903E-10  5.27858E-10  4.75679E-10  3.66804E-10  2.18862E-10  4.43343E-10  4.75874E-10  4.09342E-10  3.01428E-10
 15.600  1.75262E-10  3.62122E-10  4.04901E-10  3.66532E-10  2.83871E-10  1.62220E-10  3.29821E-10  3.56699E-10  3.09640E-10  2.29946E-10
 15.700  1.32688E-10  2.74625E-10  3.08122E-10  2.80081E-10  2.17826E-10  1.19696E-10  2.44169E-10  2.65857E-10  2.32689E-10  1.74154E-10
 15.800  9.97288E-11  2.06725E-10  2.32656E-10  2.12292E-10  1.65772E-10  8.79008E-11  1.79844E-10  1.97011E-10  1.73719E-10  1.30964E-10
 15.900  7.44199E-11  1.54474E-10  1.74337E-10  1.59643E-10  1.25148E-10  6.42344E-11  1.31774E-10  1.45143E-10  1.28851E-10  9.77963E-11
 16.000  5.51405E-11  1.14597E-10  1.29664E-10  1.19130E-10  9.37433E-11  4.67016E-11  9.60371E-11  1.06303E-10  9.49537E-11  7.25247E-11
 16.100  4.05696E-11  8.44098E-11  9.57324E-11  8.82300E-11  6.96851E-11  3.37774E-11  6.96104E-11  7.73954E-11  6.95235E-11  5.34172E-11
 16.200  2.96426E-11  6.17386E-11  7.01727E-11  6.48649E-11  5.14159E-11  2.42997E-11  5.01765E-11  5.60143E-11  5.05785E-11  3.90791E-11
 16.300  2.15107E-11  4.48443E-11  5.10742E-11  4.73440E-11  3.76601E-11  1.73868E-11  3.59657E-11  4.02985E-11  3.65623E-11  2.83996E-11
 16.400  1.55042E-11  3.23509E-11  3.69155E-11  3.43116E-11  2.73876E-11  1.23722E-11  2.56340E-11  2.88192E-11  2.62636E-11  2.05030E-11
 16.500  1.11004E-11  2.31812E-11  2.64995E-11  2.46941E-11  1.97776E-11  8.75510E-12  1.81664E-11  2.04871E-11  1.87477E-11  1.47060E-11
 16.600  7.89511E-12  1.65003E-11  1.88945E-11  1.76511E-11  1.41838E-11  6.16087E-12  1.28007E-11  1.44773E-11  1.32994E-11  1.04802E-11
 16.700  5.57879E-12  1.16678E-11  1.33826E-11  1.25322E-11  1.01032E-11  4.31098E-12  8.96825E-12  1.01697E-11  9.37629E-12  7.42133E-12
 16.800  3.91668E-12  8.19731E-12  9.41671E-12  8.83892E-12  7.14865E-12  2.99955E-12  6.24718E-12  7.10154E-12  6.56997E-12  5.22220E-12
 16.900  2.73228E-12  5.72225E-12  6.58333E-12  6.19346E-12  5.02490E-12  2.07527E-12  4.32677E-12  4.92982E-12  4.57563E-12  3.65186E-12
 17.000  1.89405E-12  3.96927E-12  4.57317E-12  4.31189E-12  3.50922E-12  1.42768E-12  2.97955E-12  3.40215E-12  3.16748E-12  2.53799E-12
 17.100  1.30482E-12  2.73612E-12  3.15681E-12  2.98291E-12  2.43507E-12  9.76627E-13  2.04009E-12  2.33418E-12  2.17957E-12  1.75311E-12
 17.200  8.93359E-13  1.87443E-12  2.16557E-12  2.05062E-12  1.67906E-12  6.64305E-13  1.38888E-12  1.59216E-12  1.49089E-12  1.20363E-12
 17.300  6.07925E-13  1.27627E-12  1.47646E-12  1.40099E-12  1.15056E-12  4.49319E-13  9.40175E-13  1.07974E-12  1.01380E-12  8.21431E-13
 17.400  4.11197E-13  8.63739E-13  1.00051E-12  9.51315E-13  7.83562E-13  3.02202E-13  6.32831E-13  7.28039E-13  6.85359E-13  5.57265E-13
 17.500  2.76471E-13  5.81056E-13  6.73914E-13  6.42065E-13  5.30379E-13  2.02116E-13  4.23558E-13  4.88092E-13  4.60634E-13  3.75828E-13
 17.600  1.84789E-13  3.88574E-13  4.51229E-13  4.30753E-13  3.56844E-13  1.34424E-13  2.81900E-13  3.25370E-13  3.07813E-13  2.51985E-13
 17.700  1.22787E-13  2.58330E-13  3.00348E-13  2.87276E-13  2.38658E-13  8.89073E-14  1.86572E-13  2.15673E-13  2.04517E-13  1.67973E-13
 17.800  8.11150E-14  1.70744E-13  1.98752E-13  1.90466E-13  1.58674E-13  5.84776E-14  1.22795E-13  1.42158E-13  1.35115E-13  1.11328E-13
 17.900  5.32779E-14  1.12204E-13  1.30762E-13  1.25548E-13  1.04880E-13  3.82512E-14  8.03725E-14  9.31797E-14  8.87609E-14  7.33645E-14
 18.000  3.47945E-14  7.33133E-14  8.55375E-14  8.22798E-14  6.89229E-14  2.48839E-14  5.23168E-14  6.07377E-14  5.79836E-14  4.80737E-14
 18.100  2.25950E-14  4.76314E-14  5.56365E-14  5.36162E-14  4.50335E-14  1.60997E-14  3.38684E-14  3.93730E-14  3.76677E-14  3.13245E-14
 18.200  1.45906E-14  3.07723E-14  3.59842E-14  3.47406E-14  2.92572E-14  1.03599E-14  2.18062E-14  2.53837E-14  2.43349E-14  2.02972E-14
 18.300  9.36939E-15  1.97697E-14  2.31437E-14  2.23840E-14  1.89006E-14  6.63055E-15  1.39641E-14  1.62758E-14  1.56352E-14  1.30791E-14
 18.400  5.98337E-15  1.26309E-14  1.48027E-14  1.43422E-14  1.21418E-14  4.22091E-15  8.89408E-15  1.03795E-14  9.99096E-15  8.38161E-15
 18.500  3.80010E-15  8.02568E-15  9.41574E-15  9.13888E-15  7.75669E-15  2.67263E-15  5.63458E-15  6.58372E-15  6.34971E-15  5.34197E-15
 18.600  2.40036E-15  5.07175E-15  5.95652E-15  5.79142E-15  4.92802E-15  1.68330E-15  3.55064E-15  4.15373E-15  4.01383E-15  3.38621E-15
 18.700  1.50802E-15  3.18772E-15  3.74776E-15  3.65014E-15  3.11379E-15  1.05459E-15  2.22560E-15  2.60670E-15  2.52369E-15  2.13492E-15
 18.800  9.42325E-16  1.99280E-15  2.34535E-15  2.28815E-15  1.95679E-15  6.57233E-16  1.38770E-15  1.62721E-15  1.57834E-15  1.33880E-15
 18.900  5.85701E-16  1.23916E-15  1.45988E-15  1.42667E-15  1.22307E-15  4.07456E-16  8.60731E-16  1.01044E-15  9.81892E-16  8.35097E-16
 19.000  3.62115E-16  7.66451E-16  9.03893E-16  8.84801E-16  7.60375E-16  2.51291E-16  5.31094E-16  6.24166E-16  6.07632E-16  5.18147E-16
 19.100  2.22703E-16  4.71573E-16  5.56698E-16  5.45837E-16  4.70207E-16  1.54178E-16  3.26002E-16  3.83555E-16  3.74063E-16  3.19801E-16
 19.200  1.36248E-16  2.88626E-16  3.41067E-16  3.34958E-16  2.89234E-16  9.41084E-17  1.99079E-16  2.34479E-16  2.29079E-16  1.96350E-16
 19.300  8.29225E-17  1.75735E-16  2.07870E-16  2.04476E-16  1.76980E-16  5.71484E-17  1.20947E-16  1.42607E-16  1.39566E-16  1.19927E-16
 19.400  5.02071E-17  1.06446E-16  1.26034E-16  1.24175E-16  1.07727E-16  3.45272E-17  7.31051E-17  8.62884E-17  8.45929E-17  7.28705E-17
 19.500  3.02428E-17  6.41450E-17  7.60225E-17  7.50195E-17  6.52327E-17  2.07544E-17  4.39631E-17  5.19453E-17  5.10109E-17  4.40501E-17
 19.600  1.81240E-17  3.84566E-17  4.56212E-17  4.50899E-17  3.92969E-17  1.24126E-17  2.63044E-17  3.11124E-17  3.06040E-17  2.64919E-17
 19.700  1.08062E-17  2.29385E-17  2.72379E-17  2.69625E-17  2.35514E-17  7.38630E-18  1.56596E-17  1.85407E-17  1.82679E-17  1.58512E-17
 19.800  6.41055E-18  1.36131E-17  1.61799E-17  1.60409E-17  1.40427E-17  4.37335E-18  9.27582E-18  1.09935E-17  1.08494E-17  9.43640E-18
 19.900  3.78378E-18  8.03820E-18  9.56273E-18  9.49499E-18  8.33059E-18  2.57653E-18  5.46707E-18  6.48589E-18  6.41122E-18  5.58926E-18
  67 163 200   0.100
  0.000  5.83484E-02 -3.02559E-16 -4.68375E-16 -3.37750E-16 -1.58784E-15  1.01028E-01 -5.12023E-16 -8.95117E-16 -3.50260E-16 -2.23156E-15
  0.100  5.83962E-02 -5.18961E-05 -3.77114E-08 -8.26788E-12 -2.73224E-15  1.00939E-01  6.81159E-05  2.56679E-08 -7.64501E-12 -8.58294E-16
  0.200  5.85381E-02 -2.04630E-04 -5.96521E-07 -5.21856E-10 -5.21199E-13  1.00673E-01  2.67849E-04  4.04962E-07 -4.86443E-10 -6.08745E-13
  0.300  5.87694E-02 -4.49501E-04 -2.96282E-06 -5.80846E-09 -1.30700E-11  1.00243E-01  5.85667E-04  2.00264E-06 -5.48719E-09 -1.54088E-11
  0.400  5.90826E-02 -7.72547E-04 -9.11690E-06 -3.15951E-08 -1.26848E-10  9.96658E-02  1.00004E-03  6.12449E-06 -3.04099E-08 -1.51506E-10
  0.500  5.94675E-02 -1.15532E-03 -2.15046E-05 -1.15597E-07 -7.28639E-10  9.89654E-02  1.48288E-03  1.43308E-05 -1.13952E-07 -8.84994E-10
  0.600  5.99121E-02 -1.57588E-03 -4.27504E-05 -3.27952E-07 -2.99465E-09  9.81698E-02  2.00142E-03  2.82061E-05 -3.32821E-07 -3.71205E-09
  0.700  6.04026E-02 -2.01003E-03 -7.53397E-05 -7.78292E-07 -9.74391E-09  9.73102E-02  2.52043E-03  4.91129E-05 -8.17307E-07 -1.23702E-08
  0.800  6.09245E-02 -2.43259E-03 -1.21303E-04 -1.61649E-06 -2.66629E-08  9.64191E-02  3.00446E-03  7.79558E-05 -1.76541E-06 -3.47879E-08
  0.900  6.14629E-02 -2.81875E-03 -1.81929E-04 -3.02508E-06 -6.37956E-08  9.55292E-02  3.42020E-03  1.14986E-04 -3.45307E-06 -8.58326E-08
  1.000  6.20031E-02 -3.14540E-03 -2.57541E-04 -5.20278E-06 -1.37068E-07  9.46711E-02  3.73859E-03  1.59666E-04 -6.23797E-06 -1.90793E-07
  1.100  6.25313E-02 -3.39227E-03 -3.47349E-04 -8.34003E-06 -2.69517E-07  9.38727E-02  3.93661E-03  2.10613E-04 -1.05549E-05 -3.89360E-07
  1.200  6.30351E-02 -3.54300E-03 -4.49395E-04 -1.25893E-05 -4.91846E-07  9.31573E-02  3.99871E-03  2.65629E-04 -1.69007E-05 -7.39709E-07
  1.300  6.35035E-02 -3.58587E-03 -5.60598E-04 -1.80339E-05 -8.41963E-07  9.25430E-02  3.91767E-03  3.21813E-04 -2.58090E-05 -1.32209E-06
  1.400  6.39277E-02 -3.51437E-03 -6.76890E-04 -2.46595E-05 -1.36327E-06  9.20422E-02  3.69495E-03  3.75752E-04 -3.78138E-05 -2.24127E-06
  1.500  6.43009E-02 -3.32743E-03 -7.93429E-04 -3.23333E-05 -2.10165E-06  9.16610E-02  3.34049E-03  4.23772E-04 -5.34044E-05 -3.62706E-06
  1.600  6.46186E-02 -3.02937E-03 -9.04881E-04 -4.07944E-05 -3.10143E-06  9.13995E-02  2.87197E-03  4.62231E-04 -7.29746E-05 -5.63228E-06
  1.700  6.48786E-02 -2.62959E-03 -1.00573E-03 -4.96568E-05 -4.40059E-06  9.12519E-02  2.31364E-03  4.87823E-04 -9.67683E-05 -8.42762E-06
  1.800  6.50804E-02 -2.14203E-03 -1.09060E-03 -5.84273E-05 -6.02609E-06  9.12074E-02  1.69475E-03  4.97874E-04 -1.24828E-04 -1.21931E-05
  1.900  6.52260E-02 -1.58441E-03 -1.15458E-03 -6.65345E-05 -7.98990E-06  9.12508E-02  1.04774E-03  4.90615E-04 -1.56947E-04 -1.71061E-05
  2.000  6.53185E-02 -9.77317E-04 -1.19352E-03 -7.33682E-05 -1.02867E-05  9.13633E-02  4.06255E-04  4.65384E-04 -1.92639E-04 -2.33268E-05
  2.100  6.53629E-02 -3.43222E-04 -1.20423E-03 -7.83221E-05 -1.28939E-05  9.15245E-02 -1.96860E-04  4.22769E-04 -2.31111E-04 -3.09807E-05
  2.200  6.53652E-02  2.94607E-04 -1.18471E-03 -8.08364E-05 -1.57741E-05  9.17124E-02 -7.31449E-04  3.64664E-04 -2.71262E-04 -4.01410E-05
  2.300  6.53322E-02  9.13137E-04 -1.13420E-03 -8.04337E-05 -1.88806E-05  9.19056E-02 -1.17176E-03  2.94228E-04 -3.11698E-04 -5.08108E-05
  2.400  6.52715E-02  1.49059E-03 -1.05329E-03 -7.67447E-05 -2.21653E-05  9.20840E-02 -1.49785E-03  2.15751E-04 -3.50764E-04 -6.29068E-05
  2.500  6.51909E-02  2.00735E-03 -9.43896E-04 -6.95200E-05 -2.55879E-05  9.22295E-02 -1.69661E-03  1.34429E-04 -3.86594E-04 -7.62467E-05
  2.600  6.50982E-02  2.44677E-03 -8.09160E-04 -5.86276E-05 -2.91264E-05  9.23275E-02 -1.76236E-03  5.60492E-05 -4.17177E-04 -9.05412E-05
  2.700  6.50011E-02  2.79584E-03 -6.53392E-04 -4.40376E-05 -3.27851E-05  9.23668E-02 -1.69698E-03 -1.33882E-05 -4.40437E-04 -1.05390E-04
  2.800  6.49063E-02  3.04567E-03 -4.81906E-04 -2.57977E-05 -3.66019E-05  9.23404E-02 -1.50955E-03 -6.81054E-05 -4.54320E-04 -1.20288E-04
  2.900  6.48202E-02  3.19186E-03 -3.00857E-04 -4.00426E-06 -4.06501E-05  9.22453E-02 -1.21559E-03 -1.03004E-04 -4.56895E-04 -1.34631E-04
  3.000  6.47475E-02  3.23463E-03 -1.17048E-04  2.12239E-05 -4.50359E-05  9.20821E-02 -8.35793E-04 -1.14121E-04 -4.46449E-04 -1.47735E-04
  3.100  6.46919E-02  3.17888E-03  6.22770E-05  4.97633E-05 -4.98903E-05  9.18551E-02 -3.94556E-04 -9.90414E-05 -4.21593E-04 -1.58857E-04
  3.200  6.46548E-02  3.03398E-03  2.29663E-04  8.14888E-05 -5.53551E-05  9.15706E-02  8.18410E-05 -5.72431E-05 -3.81365E-04 -1.67222E-04
  3.300  6.46358E-02  2.81351E-03  3.77689E-04  1.16260E-04 -6.15653E-05  9.12369E-02  5.67117E-04  9.66909E-06 -3.25326E-04 -1.72055E-04
  3.400  6.46322E-02  2.53475E-03  4.99235E-04  1.53886E-04 -6.86278E-05  9.08624E-02  1.03690E-03  9.78688E-05 -2.53650E-04 -1.72616E-04
  3.500  6.46387E-02  2.21816E-03  5.87761E-04  1.94077E-04 -7.66008E-05  9.04551E-02  1.47051E-03  2.01377E-04 -1.67199E-04 -1.68234E-04
  3.600  6.46474E-02  1.88662E-03  6.37604E-04  2.36383E-04 -8.54751E-05  9.00210E-02  1.85249E-03  3.12310E-04 -6.75828E-05 -1.58352E-04
  3.700  6.46477E-02  1.56459E-03  6.44273E-04  2.80128E-04 -9.51615E-05  8.95634E-02  2.17378E-03  4.21303E-04  4.28115E-05 -1.42557E-04
  3.800  6.46266E-02  1.27728E-03  6.04747E-04  3.24352E-04 -1.05485E-04  8.90823E-02  2.43247E-03  5.18101E-04  1.60827E-04 -1.20626E-04
  3.900  6.45689E-02  1.04959E-03  5.17742E-04  3.67773E-04 -1.16191E-04  8.85733E-02  2.63399E-03  5.92282E-04  2.82581E-04 -9.25520E-05
  4.000  6.44573E-02  9.05191E-04  3.83939E-04  4.08778E-04 -1.26957E-04  8.80278E-02  2.79082E-03  6.34069E-04  4.03565E-04 -5.85789E-05
  4.100  6.42733E-02  8.65458E-04  2.06145E-04  4.45448E-04 -1.37425E-04  8.74332E-02  2.92166E-03  6.35168E-04  5.18795E-04 -1.92196E-05
  4.200  6.39976E-02  9.48551E-04 -1.06274E-05  4.75629E-04 -1.47224E-04  8.67730E-02  3.05011E-03  5.89570E-04  6.23014E-04  2.47315E-05
  4.300  6.36109E-02  1.16853E-03 -2.59194E-04  4.97048E-04 -1.56016E-04  8.60279E-02  3.20299E-03  4.94238E-04  7.10946E-04  7.22012E-05
  4.400  6.30948E-02  1.53464E-03 -5.30350E-04  5.07460E-04 -1.63533E-04  8.51766E-02  3.40838E-03  3.49625E-04  7.77588E-04  1.21855E-04
  4.500  6.24321E-02  2.05068E-03 -8.13144E-04  5.04828E-04 -1.69603E-04  8.41968E-02  3.69353E-03  1.59950E-04  8.18522E-04  1.72131E-04
  4.600  6.16083E-02  2.71471E-03 -1.09529E-03  4.87519E-04 -1.74186E-04  8.30671E-02  4.08279E-03 -6.67910E-05  8.30230E-04  2.21296E-04
  4.700  6.06116E-02  3.51888E-03 -1.36369E-03  4.54491E-04 -1.77376E-04  8.17676E-02  4.59566E-03 -3.19120E-04  8.10387E-04  2.67515E-04
  4.800  5.94340E-02  4.44960E-03 -1.60503E-03  4.05454E-04 -1.79404E-04  8.02815E-02  5.24520E-03 -5.82642E-04  7.58095E-04  3.08937E-04
  4.900  5.80715E-02  5.48787E-03 -1.80648E-03  3.40995E-04 -1.80614E-04  7.85958E-02  6.03684E-03 -8.40879E-04  6.74060E-04  3.43795E-04
  5.000  5.65244E-02  6.60999E-03 -1.95634E-03  2.62639E-04 -1.81434E-04  7.67026E-02  6.96764E-03 -1.07629E-03  5.60655E-04  3.70505E-04
  5.100  5.47973E-02  7.78837E-03 -2.04473E-03  1.72838E-04 -1.82325E-04  7.45993E-02  8.02614E-03 -1.27142E-03  4.21885E-04  3.87775E-04
  5.200  5.28993E-02  8.99260E-03 -2.06419E-03  7.48875E-05 -1.83734E-04  7.22887E-02  9.19273E-03 -1.41010E-03  2.63239E-04  3.94687E-04
  5.300  5.08434E-02  1.01907E-02 -2.01011E-03 -2.72295E-05 -1.86033E-04  6.97793E-02  1.04406E-02 -1.47854E-03  9.14199E-05  3.90778E-04
  5.400  4.86461E-02  1.13501E-02 -1.88110E-03 -1.29065E-04 -1.89476E-04  6.70850E-02  1.17368E-02 -1.46637E-03 -8.60088E-05  3.76082E-04
  5.500  4.63272E-02  1.24395E-02 -1.67911E-03 -2.25974E-04 -1.94160E-04  6.42243E-02  1.30446E-02 -1.36732E-03 -2.61055E-04  3.51153E-04
  5.600  4.39086E-02  1.34295E-02 -1.40936E-03 -3.13408E-04 -1.99999E-04  6.12196E-02  1.43244E-02 -1.17976E-03 -4.25769E-04  3.17044E-04
  5.700  4.14140E-02  1.42940E-02 -1.08012E-03 -3.87214E-04 -2.06724E-04  5.80967E-02  1.55367E-02 -9.06820E-04 -5.72719E-04  2.75257E-04
  5.800  3.88682E-02  1.50112E-02 -7.02308E-04 -4.43905E-04 -2.13896E-04  5.48833E-02  1.66435E-02 -5.56240E-04 -6.95437E-04  2.27659E-04
  5.900  3.62959E-02  1.55639E-02 -2.88885E-04 -4.80890E-04 -2.20938E-04  5.16089E-02  1.76103E-02 -1.39877E-04 -7.88795E-04  1.76376E-04
  6.000  3.37217E-02  1.59409E-02  1.45806E-04 -4.96635E-04 -2.27186E-04  4.83030E-02  1.84077E-02  3.27030E-04 -8.49288E-04  1.23664E-04
  6.100  3.11689E-02  1.61362E-02  5.86783E-04 -4.90751E-04 -2.31948E-04  4.49949E-02  1.90127E-02  8.26799E-04 -8.75207E-04  7.17752E-05
  6.200  2.86596E-02  1.61497E-02  1.01919E-03 -4.63998E-04 -2.34560E-04  4.17127E-02  1.94091E-02  1.34038E-03 -8.66674E-04  2.28234E-05
  6.300  2.62137E-02  1.59866E-02  1.42901E-03 -4.18204E-04 -2.34451E-04  3.84831E-02  1.95887E-02  1.84845E-03 -8.25568E-04 -2.13329E-05
  6.400  2.38491E-02  1.56570E-02  1.80374E-03 -3.56122E-04 -2.31191E-04  3.53301E-02  1.95507E-02  2.33253E-03 -7.55326E-04 -5.91903E-05
  6.500  2.15810E-02  1.51755E-02  2.13286E-03 -2.81217E-04 -2.24532E-04  3.22756E-02  1.93013E-02  2.77587E-03 -6.60656E-04 -8.96694E-05
  6.600  1.94221E-02  1.45598E-02  2.40830E-03 -1.97429E-04 -2.14426E-04  2.93384E-02  1.88536E-02  3.16433E-03 -5.47182E-04 -1.12152E-04
  6.700  1.73828E-02  1.38304E-02  2.62461E-03 -1.08904E-04 -2.01031E-04  2.65345E-02  1.82260E-02  3.48689E-03 -4.21054E-04 -1.26486E-04
  6.800  1.54705E-02  1.30094E-02  2.77903E-03 -1.97400E-05 -1.84699E-04  2.38768E-02  1.74414E-02  3.73605E-03 -2.88553E-04 -1.32953E-04
  6.900  1.36904E-02  1.21197E-02  2.87142E-03  6.62513E-05 -1.65944E-04  2.13754E-02  1.65257E-02  3.90789E-03 -1.55719E-04 -1.32217E-04
  7.000  1.20454E-02  1.11839E-02  2.90404E-03  1.45739E-04 -1.45405E-04  1.90372E-02  1.55068E-02  4.00199E-03 -2.80321E-05 -1.25245E-04
  7.100  1.05361E-02  1.02238E-02  2.88122E-03  2.16020E-04 -1.23796E-04  1.68666E-02  1.44132E-02  4.02111E-03  8.98418E-05 -1.13218E-04
  7.200  9.16117E-03  9.25980E-03  2.80891E-03  2.75115E-04 -1.01856E-04  1.48652E-02  1.32728E-02  3.97075E-03  1.94223E-04 -9.74349E-05
  7.300  7.91773E-03  8.30990E-03  2.69431E-03  3.21796E-04 -8.03012E-05  1.30324E-02  1.21119E-02  3.85857E-03  2.82511E-04 -7.92210E-05
  7.400  6.80129E-03  7.38984E-03  2.54532E-03  3.55576E-04 -5.97816E-05  1.13654E-02  1.09546E-02  3.69378E-03  3.53193E-04 -5.98447E-05
  7.500  5.80615E-03  6.51260E-03  2.37015E-03  3.76639E-04 -4.08469E-05  9.85948E-03  9.82213E-03  3.48652E-03  4.05785E-04 -4.04485E-05
  7.600  4.92564E-03  5.68839E-03  2.17688E-03  3.85748E-04 -2.39230E-05  8.50822E-03  8.73220E-03  3.24725E-03  4.40719E-04 -2.19990E-05
  7.700  4.15229E-03  4.92464E-03  1.97315E-03  3.84119E-04 -9.30034E-06  7.30397E-03  7.69919E-03  2.98625E-03  4.59184E-04 -5.25444E-06
  7.800  3.47813E-03  4.22616E-03  1.76585E-03  3.73292E-04  2.86752E-06  6.23799E-03  6.73391E-03  2.71316E-03  4.62943E-04  9.24710E-06
  7.900  2.89487E-03  3.59538E-03  1.56095E-03  3.54993E-04  1.25556E-05  5.30076E-03  5.84377E-03  2.43663E-03  4.54152E-04  2.11840E-05
  8.000  2.39406E-03  3.03260E-03  1.36340E-03  3.31016E-04  1.98514E-05  4.48225E-03  5.03310E-03  2.16409E-03  4.35173E-04  3.04329E-05
  8.100  1.96735E-03  2.53635E-03  1.17704E-03  3.03112E-04  2.49338E-05  3.77214E-03  4.30346E-03  1.90167E-03  4.08416E-04  3.70398E-05
  8.200  1.60657E-03  2.10372E-03  1.00467E-03  2.72903E-04  2.80488E-05  3.16011E-03  3.65404E-03  1.65408E-03  3.76200E-04  4.11861E-05
  8.300  1.30387E-03  1.73072E-03  8.48095E-04  2.41819E-04  2.94850E-05  2.63598E-03  3.08214E-03  1.42472E-03  3.40648E-04  4.31505E-05
  8.400  1.05186E-03  1.41258E-03  7.08225E-04  2.11061E-04  2.95506E-05  2.18993E-03  2.58356E-03  1.21575E-03  3.03614E-04  4.32728E-05
  8.500  8.43657E-04  1.14406E-03  5.85231E-04  1.81577E-04  2.85528E-05  1.81262E-03  2.15307E-03  1.02824E-03  2.66641E-04  4.19204E-05
  8.600  6.72952E-04  9.19751E-04  4.78678E-04  1.54069E-04  2.67818E-05  1.49531E-03  1.78472E-03  8.62354E-04  2.30949E-04  3.94598E-05
  8.700  5.34035E-04  7.34222E-04  3.87666E-04  1.29008E-04  2.44983E-05  1.22992E-03  1.47226E-03  7.17513E-04  1.97435E-04  3.62351E-05
  8.800  4.21811E-04  5.82247E-04  3.10973E-04  1.06657E-04  2.19260E-05  1.00911E-03  1.20933E-03  5.92596E-04  1.66707E-04  3.25519E-05
  8.900  3.31790E-04  4.58916E-04  2.47179E-04  8.71046E-05  1.92477E-05  8.26254E-04  9.89749E-04  4.86094E-04  1.39116E-04  2.86681E-05
  9.000  2.60066E-04  3.59722E-04  1.94769E-04  7.03052E-05  1.66049E-05  6.75494E-04  8.07631E-04  3.96264E-04  1.14800E-04  2.47899E-05
  9.100  2.03284E-04  2.80620E-04  1.52220E-04  5.61093E-05  1.41006E-05  5.51671E-04  6.57539E-04  3.21253E-04  9.37291E-05  2.10722E-05
  9.200  1.58594E-04  2.18047E-04  1.18065E-04  4.42987E-05  1.18029E-05  4.50309E-04  5.34539E-04  2.59197E-04  7.57511E-05  1.76229E-05
  9.300  1.23607E-04  1.68918E-04  9.09423E-05  3.46150E-05  9.75072E-06  3.67560E-04  4.34235E-04  2.08299E-04  6.06287E-05  1.45083E-05
  9.400  9.63423E-05  1.30606E-04  6.96219E-05  2.67828E-05  7.95941E-06  3.00150E-04  3.52778E-04  1.66880E-04  4.80751E-05  1.17607E-05
  9.500  7.51752E-05  1.00910E-04  5.30212E-05  2.05283E-05  6.42669E-06  2.45318E-04  2.86845E-04  1.33415E-04  3.77810E-05  9.38601E-06
  9.600  5.87886E-05  7.80111E-05  4.02088E-05  1.55925E-05  5.13781E-06  2.00756E-04  2.33607E-04  1.06548E-04  2.94361E-05  7.37069E-06
  9.700  4.61256E-05  6.04274E-05  3.03993E-05  1.17395E-05  4.07019E-06  1.64549E-04  1.90685E-04  8.50961E-05  2.27437E-05  5.68831E-06
  9.800  3.63460E-05  4.69658E-05  2.29426E-05  8.76157E-06  3.19710E-06  1.35119E-04  1.56097E-04  6.80476E-05  1.74314E-05  4.30489E-06
  9.900  2.87888E-05  3.66780E-05  1.73096E-05  6.48044E-06  2.49063E-06  1.11176E-04  1.28213E-04  5.45485E-05  1.32556E-05  3.18315E-06
 10.000  2.29376E-05  2.88184E-05  1.30765E-05  4.74693E-06  1.92367E-06  9.16670E-05  1.05702E-04  4.38881E-05  1.00043E-05  2.28564E-06
 10.100  1.83928E-05  2.28067E-05  9.90822E-06  3.43876E-06  1.47135E-06  7.57412E-05  8.74859E-05  3.54821E-05  7.49651E-06  1.57686E-06
 10.200  1.48467E-05  1.81953E-05  7.54363E-06  2.45763E-06  1.11174E-06  6.27102E-05  7.26963E-05  2.88552E-05  5.58062E-06  1.02456E-06
 10.300  1.20643E-05  1.46420E-05  5.78137E-06  1.72579E-06  8.26183E-07  5.20200E-05  6.06405E-05  2.36246E-05  4.13123E-06  6.00356E-07
 10.400  9.86634E-06  1.18869E-05  4.46779E-06  1.18265E-06  5.99291E-07  4.32254E-05  5.07667E-05  1.94846E-05  3.04605E-06  2.79919E-07
 10.500  8.11699E-06  9.73371E-06  3.48671E-06  7.81614E-07  4.18676E-07  3.59691E-05  4.26379E-05  1.61931E-05  2.24250E-06  4.27748E-08
 10.600  6.71336E-06  8.03512E-06  2.75099E-06  4.87173E-07  2.74600E-07  2.99643E-05  3.59085E-05  1.35600E-05  1.65454E-06 -1.28040E-07
 10.700  5.57763E-06  6.68095E-06  2.19576E-06  2.72525E-07  1.59549E-07  2.49809E-05  3.03064E-05  1.14368E-05  1.22983E-06 -2.46435E-07
 10.800  4.65091E-06  5.58903E-06  1.77296E-06  1.17547E-07  6.78088E-08  2.08339E-05  2.56171E-05  9.70852E-06  9.27198E-07 -3.23735E-07
 10.900  3.88861E-06  4.69824E-06  1.44730E-06  7.19302E-09 -4.93327E-09  1.73745E-05  2.16718E-05  8.28665E-06  7.14565E-07 -3.69128E-07
 11.000  3.25684E-06  3.96319E-06  1.19294E-06 -6.97688E-08 -6.19345E-08  1.44825E-05  1.83370E-05  7.10361E-06  5.67148E-07 -3.90049E-07
 11.100  2.72975E-06  3.35020E-06  9.91145E-07 -1.21722E-07 -1.05686E-07  1.20609E-05  1.55074E-05  6.10804E-06  4.66028E-07 -3.92520E-07
 11.200  2.28754E-06  2.83420E-06  8.28380E-07 -1.54939E-07 -1.38144E-07  1.00305E-05  1.30990E-05  5.26123E-06  3.96956E-07 -3.81413E-07
 11.300  1.91491E-06  2.39652E-06  6.94967E-07 -1.74127E-07 -1.60902E-07  8.32709E-06  1.10450E-05  4.53411E-06  3.49384E-07 -3.60668E-07
 11.400  1.59996E-06  2.02317E-06  5.84020E-07 -1.82838E-07 -1.75321E-07  6.89774E-06  9.29105E-06  3.90489E-06  3.15668E-07 -3.33454E-07
 11.500  1.33330E-06  1.70353E-06  4.90668E-07 -1.83771E-07 -1.82609E-07  5.69893E-06  7.79314E-06  3.35725E-06  2.90424E-07 -3.02309E-07
 11.600  1.10744E-06  1.42942E-06  4.11466E-07 -1.78993E-07 -1.83879E-07  4.69453E-06  6.51487E-06  2.87887E-06  2.69993E-07 -2.69235E-07
 11.700  9.16316E-07  1.19444E-06  3.43960E-07 -1.70105E-07 -1.80172E-07  3.85440E-06  5.42583E-06  2.46030E-06  2.52011E-07 -2.35791E-07
 11.800  7.54923E-07  9.93397E-07  2.86367E-07 -1.58358E-07 -1.72474E-07  3.15321E-06  4.50031E-06  2.09417E-06  2.35060E-07 -2.03154E-07
 11.900  6.19065E-07  8.21989E-07  2.37340E-07 -1.44742E-07 -1.61708E-07  2.56958E-06  3.71626E-06  1.77450E-06  2.18392E-07 -1.72186E-07
 12.000  5.05168E-07  6.76537E-07  1.95813E-07 -1.30047E-07 -1.48731E-07  2.08539E-06  3.05460E-06  1.49631E-06  2.01705E-07 -1.43483E-07
 12.100  4.10146E-07  5.53817E-07  1.60887E-07 -1.14907E-07 -1.34320E-07  1.68516E-06  2.49866E-06  1.25527E-06  1.84984E-07 -1.17420E-07
 12.200  3.31309E-07  4.50944E-07  1.31767E-07 -9.98301E-08 -1.19167E-07  1.35568E-06  2.03381E-06  1.04749E-06  1.68370E-07 -9.41932E-08
 12.300  2.66292E-07  3.65313E-07  1.07723E-07 -8.52198E-08 -1.03865E-07  1.08564E-06  1.64712E-06  8.69430E-07  1.52079E-07 -7.38595E-08
 12.400  2.13011E-07  2.94557E-07  8.80677E-08 -7.13892E-08 -8.89098E-08  8.65356E-07  1.32721E-06  7.17786E-07  1.36339E-07 -5.63644E-08
 12.500  1.69635E-07  2.36526E-07  7.21597E-08 -5.85718E-08 -7.46920E-08  6.86550E-07  1.06405E-06  5.89479E-07  1.21355E-07 -4.15726E-08
 12.600  1.34554E-07  1.89282E-07  5.93997E-08 -4.69297E-08 -6.15053E-08  5.42150E-07  8.48823E-07  4.81635E-07  1.07289E-07 -2.92912E-08
 12.700  1.06366E-07  1.51091E-07  4.92393E-08 -3.65618E-08 -4.95503E-08  4.26144E-07  6.73828E-07  3.91589E-07  9.42553E-08 -1.92908E-08
 12.800  8.38572E-08  1.20419E-07  4.11864E-08 -2.75104E-08 -3.89447E-08  3.33443E-07  5.32378E-07  3.16892E-07  8.23182E-08 -1.13214E-08
 12.900  6.59875E-08  9.59294E-08  3.48101E-08 -1.97699E-08 -2.97335E-08  2.59756E-07  4.18705E-07  2.55319E-07  7.14984E-08 -5.12640E-09
 13.000  5.18742E-08  7.64693E-08  2.97424E-08 -1.32942E-08 -2.19022E-08  2.01493E-07  3.27874E-07  2.04871E-07  6.17812E-08 -4.52744E-10
 13.100  4.07766E-08  6.10615E-08  2.56774E-08 -8.00546E-09 -1.53888E-08  1.55663E-07  2.55695E-07  1.63773E-07  5.31248E-08  2.94105E-09
 13.200  3.20801E-08  4.88885E-08  2.23681E-08 -3.80213E-09 -1.00968E-08  1.19795E-07  1.98643E-07  1.30472E-07  4.54684E-08  5.27931E-09
 13.300  2.52811E-08  3.92762E-08  1.96211E-08 -5.67272E-10 -5.90594E-09  9.18600E-08  1.53774E-07  1.03619E-07  3.87395E-08  6.76559E-09
 13.400  1.99709E-08  3.16772E-08  1.72895E-08  1.82440E-09 -2.68308E-09  7.02048E-08  1.18655E-07  8.20637E-08  3.28594E-08  7.58057E-09
 13.500  1.58223E-08  2.56523E-08  1.52661E-08  3.50000E-09 -2.90301E-10  5.34913E-08  9.12891E-08  6.48292E-08  2.77479E-08  7.88133E-09
 13.600  1.25759E-08  2.08542E-08  1.34754E-08  4.58319E-09  1.40797E-09  4.06445E-08  7.00504E-08  5.10980E-08  2.33262E-08  7.80163E-09
 13.700  1.00280E-08  1.70113E-08  1.18664E-08  5.19003E-09  2.53981E-09  3.08070E-08  5.36277E-08  4.01917E-08  1.95193E-08  7.45299E-09
 13.800  8.02032E-09  1.39134E-08  1.04068E-08  5.42601E-09  3.22214E-09  2.32996E-08  4.09706E-08  3.15520E-08  1.62568E-08  6.92631E-09
 13.900  6.43078E-09  1.13991E-08  9.07679E-09  5.38417E-09  3.55850E-09  1.75878E-08  3.12436E-08  2.47236E-08  1.34738E-08  6.29390E-09
 14.000  5.16578E-09  9.34540E-09  7.86514E-09  5.14425E-09  3.63801E-09  1.32539E-08  2.37871E-08  1.93373E-08  1.11112E-08  5.61167E-09
 14.100  4.15387E-09  7.65838E-09  6.76547E-09  4.77262E-09  3.53530E-09  9.97299E-09  1.80832E-08  1.50960E-08  9.11528E-09  4.92142E-09
 14.200  3.34060E-09  6.26653E-09  5.77381E-09  4.32280E-09  3.31112E-09  7.49418E-09  1.37278E-08  1.17615E-08  7.43781E-09  4.25309E-09
 14.300  2.68441E-09  5.11491E-09  4.88692E-09  3.83658E-09  3.01349E-09  5.62448E-09  1.04072E-08  9.14403E-09  6.03550E-09  3.62689E-09
 14.400  2.15344E-09  4.16085E-09  4.10121E-09  3.34527E-09  2.67915E-09  4.21616E-09  7.87877E-09  7.09246E-09  4.86977E-09  3.05525E-09
 14.500  1.72310E-09  3.37071E-09  3.41219E-09  2.87125E-09  2.33518E-09  3.15662E-09  5.95579E-09  5.48710E-09  3.90633E-09  2.54456E-09
 14.600  1.37420E-09  2.71749E-09  2.81434E-09  2.42946E-09  2.00057E-09  2.36029E-09  4.49487E-09  4.23317E-09  3.11488E-09  2.09669E-09
 14.700  1.09157E-09  2.17915E-09  2.30114E-09  2.02888E-09  1.68782E-09  1.76235E-09  3.38621E-09  3.25573E-09  2.46874E-09  1.71024E-09
 14.800  8.63108E-10  1.73734E-09  1.86533E-09  1.67385E-09  1.40434E-09  1.31381E-09  2.54585E-09  2.49560E-09  1.94460E-09  1.38162E-09
 14.900  6.79015E-10  1.37661E-09  1.49915E-09  1.36528E-09  1.15370E-09  9.77660E-10  1.90971E-09  1.90601E-09  1.52221E-09  1.10587E-09
 15.000  5.31272E-10  1.08379E-09  1.19470E-09  1.10168E-09  9.36657E-10  7.26036E-10  1.42890E-09  1.45006E-09  1.18408E-09  8.77316E-10
 15.100  4.13273E-10  8.47619E-10  9.44152E-10  8.79919E-10  7.52083E-10  5.37935E-10  1.06615E-09  1.09862E-09  9.15217E-10  6.90036E-10
 15.200  3.19541E-10  6.58438E-10  7.40031E-10  6.95967E-10  5.97610E-10  3.97540E-10  7.93039E-10  8.28730E-10  7.02898E-10  5.38229E-10
 15.300  2.45527E-10  5.07977E-10  5.75357E-10  5.45336E-10  4.70179E-10  2.92949E-10  5.87911E-10  6.22280E-10  5.36382E-10  4.16430E-10
 15.400  1.87452E-10  3.89188E-10  4.43773E-10  4.23468E-10  3.66435E-10  2.15200E-10  4.34264E-10  4.65032E-10  4.06690E-10  3.19658E-10
 15.500  1.42184E-10  2.96107E-10  3.39605E-10  3.25980E-10  2.83000E-10  1.57548E-10  3.19532E-10  3.45804E-10  3.06379E-10  2.43489E-10
 15.600  1.07140E-10  2.23721E-10  2.57890E-10  2.48824E-10  2.16658E-10  1.14919E-10  2.34149E-10  2.55835E-10  2.29331E-10  1.84076E-10
 15.700  8.01994E-11  1.67857E-10  1.94355E-10  1.88378E-10  1.64472E-10  8.34980E-11  1.70841E-10  1.88285E-10  1.70560E-10  1.38135E-10
 15.800  5.96347E-11  1.25071E-10  1.45382E-10  1.41481E-10  1.23837E-10  6.04183E-11  1.24089E-10  1.37832E-10  1.26042E-10  1.02910E-10
 15.900  4.40488E-11  9.25502E-11  1.07951E-10  1.05434E-10  9.25016E-11  4.35292E-11  8.97099E-11  1.00351E-10  9.25505E-11  7.61236E-11
 16.000  3.23207E-11  6.80171E-11  7.95789E-11  7.79763E-11  6.85615E-11  3.12200E-11  6.45425E-11  7.26597E-11  6.75281E-11  5.59161E-11
 16.100  2.35585E-11  4.96480E-11  5.82464E-11  5.72412E-11  5.04341E-11  2.22872E-11  4.62054E-11  5.23166E-11  4.89603E-11  4.07905E-11
 16.200  1.70588E-11  3.59960E-11  4.23337E-11  4.17145E-11  3.68261E-11  1.58338E-11  3.29101E-11  3.74573E-11  3.52754E-11  2.95550E-11
 16.300  1.22716E-11  2.59239E-11  3.05558E-11  3.01826E-11  2.66957E-11  1.11936E-11  2.33193E-11  2.66666E-11  2.52571E-11  2.12712E-11
 16.400  8.77053E-12  1.85467E-11  2.19044E-11  2.16858E-11  1.92151E-11  7.87333E-12  1.64367E-11  1.88765E-11  1.79720E-11  1.52084E-11
 16.500  6.22787E-12  1.31821E-11  1.55970E-11  1.54737E-11  1.37347E-11  5.50955E-12  1.15238E-11  1.32857E-11  1.27094E-11  1.08029E-11
 16.600  4.39405E-12  9.30840E-12  1.10321E-11  1.09663E-11  9.75034E-12  3.83538E-12  8.03590E-12  9.29732E-12  8.93276E-12  7.62432E-12
 16.700  3.08053E-12  6.53086E-12  7.75222E-12  7.72010E-12  6.87535E-12  2.65587E-12  5.57331E-12  6.46895E-12  6.24020E-12  5.34681E-12
 16.800  2.14608E-12  4.55299E-12  5.41219E-12  5.39909E-12  4.81603E-12  1.82932E-12  3.84429E-12  4.47523E-12  4.33292E-12  3.72609E-12
 16.900  1.48575E-12  3.15414E-12  3.75436E-12  3.75140E-12  3.35155E-12  1.25325E-12  2.63713E-12  3.07824E-12  2.99054E-12  2.58051E-12
 17.000  1.02223E-12  2.17145E-12  2.58789E-12  2.58988E-12  2.31741E-12  8.53965E-13  1.79909E-12  2.10524E-12  2.05175E-12  1.77616E-12
 17.100  6.99009E-13  1.48569E-12  1.77269E-12  1.77670E-12  1.59220E-12  5.78741E-13  1.22060E-12  1.43159E-12  1.39933E-12  1.21509E-12
 17.200  4.75080E-13  1.01028E-12  1.20678E-12  1.21125E-12  1.08709E-12  3.90090E-13  8.23557E-13  9.67960E-13  9.48760E-13  8.26246E-13
 17.300  3.20940E-13  6.82838E-13  8.16510E-13  8.20660E-13  7.37633E-13  2.61502E-13  5.52600E-13  6.50773E-13  6.39515E-13  5.58483E-13
 17.400  2.15515E-13  4.58751E-13  5.49106E-13  5.52634E-13  4.97451E-13  1.74348E-13  3.68746E-13  4.35053E-13  4.28569E-13  3.75262E-13
 17.500  1.43863E-13  3.06369E-13  3.67063E-13  3.69899E-13  3.33447E-13  1.15607E-13  2.44708E-13  2.89206E-13  2.85550E-13  2.50671E-13
 17.600  9.54688E-14  2.03396E-13  2.43915E-13  2.46110E-13  2.22176E-13  7.62406E-14  1.61501E-13  1.91176E-13  1.89170E-13  1.66472E-13
 17.700  6.29844E-14  1.34243E-13  1.61129E-13  1.62779E-13  1.47159E-13  5.00059E-14  1.06002E-13  1.25670E-13  1.24609E-13  1.09917E-13
 17.800  4.13129E-14  8.80880E-14  1.05821E-13  1.07033E-13  9.68995E-14  3.26209E-14  6.91954E-14  8.21510E-14  8.16185E-14  7.21606E-14
 17.900  2.69425E-14  5.74692E-14  6.90958E-14  6.99695E-14  6.34344E-14  2.11648E-14  4.49228E-14  5.34060E-14  5.31600E-14  4.71043E-14
 18.000  1.74707E-14  3.72793E-14  4.48576E-14  4.54773E-14  4.12876E-14  1.36579E-14  2.90063E-14  3.45283E-14  3.44314E-14  3.05750E-14
 18.100  1.12648E-14  2.40455E-14  2.89565E-14  2.93899E-14  2.67195E-14  8.76619E-15  1.86279E-14  2.22013E-14  2.21776E-14  1.97350E-14
 18.200  7.22256E-15  1.54224E-14  1.85866E-14  1.88859E-14  1.71937E-14  5.59635E-15  1.18984E-14  1.41975E-14  1.42062E-14  1.26674E-14
 18.300  4.60504E-15  9.83655E-15  1.18636E-14  1.20679E-14  1.10018E-14  3.55363E-15  7.55922E-15  9.03004E-15  9.05018E-15  8.08602E-15
 18.400  2.91990E-15  6.23908E-15  7.53035E-15  7.66840E-15  7.00058E-15  2.24452E-15  4.77683E-15  5.71244E-15  5.73417E-15  5.13329E-15
 18.500  1.84124E-15  3.93553E-15  4.75350E-15  4.84585E-15  4.42990E-15  1.41015E-15  3.00252E-15  3.59435E-15  3.61352E-15  3.24105E-15
 18.600  1.15472E-15  2.46892E-15  2.98420E-15  3.04541E-15  2.78780E-15  8.81275E-16  1.87726E-15  2.24956E-15  2.26491E-15  2.03526E-15
 18.700  7.20251E-16  1.54045E-15  1.86326E-15  1.90349E-15  1.74484E-15  5.47856E-16  1.16753E-15  1.40044E-15  1.41203E-15  1.27120E-15
 18.800  4.46833E-16  9.55967E-16  1.15710E-15  1.18331E-15  1.08615E-15  3.38799E-16  7.22315E-16  8.67226E-16  8.75637E-16  7.89729E-16
 18.900  2.75725E-16  5.90072E-16  7.14708E-16  7.31654E-16  6.72483E-16  2.08424E-16  4.44538E-16  5.34213E-16  5.40136E-16  4.88010E-16
 19.000  1.69236E-16  3.62284E-16  4.39103E-16  4.49974E-16  4.14138E-16  1.27554E-16  2.72161E-16  3.27356E-16  3.31431E-16  2.99971E-16
 19.100  1.03325E-16  2.21253E-16  2.68347E-16  2.75270E-16  2.53685E-16  7.76583E-17  1.65763E-16  1.99554E-16  2.02305E-16  1.83418E-16
 19.200  6.27524E-17  1.34412E-16  1.63130E-16  1.67507E-16  1.54578E-16  4.70372E-17  1.00439E-16  1.21017E-16  1.22845E-16  1.11565E-16
 19.300  3.79122E-17  8.12291E-17  9.86482E-17  1.01396E-16  9.36940E-17  2.83441E-17  6.05459E-17  7.30115E-17  7.42082E-17  6.75077E-17
 19.400  2.27859E-17  4.88337E-17  5.93442E-17  6.10580E-17  5.64942E-17  1.69927E-17  3.63111E-17  4.38230E-17  4.45970E-17  4.06374E-17
 19.500  1.36239E-17  2.92063E-17  3.55150E-17  3.65767E-17  3.38872E-17  1.01356E-17  2.16660E-17  2.61692E-17  2.66641E-17  2.43365E-17
 19.600  8.10395E-18  1.73777E-17  2.11448E-17  2.17982E-17  2.02218E-17  6.01500E-18  1.28621E-17  1.55477E-17  1.58609E-17  1.44997E-17
 19.700  4.79585E-18  1.02868E-17  1.25246E-17  1.29242E-17  1.20051E-17  3.55161E-18  7.59711E-18  9.19048E-18  9.38685E-18  8.59498E-18
 19.800  2.82370E-18  6.05829E-18  7.38084E-18  7.62367E-18  7.09069E-18  2.08656E-18  4.46475E-18  5.40527E-18  5.52727E-18  5.06899E-18
 19.900  1.65412E-18  3.54988E-18  4.32752E-18  4.47418E-18  4.16674E-18  1.21972E-18  2.61076E-18  3.16311E-18  3.23826E-18  2.97440E-18
  67 164 200   0.100
  0.000  5.81308E-02 -3.10317E-16 -4.89192E-16 -4.37824E-16 -1.55923E-15  1.00611E-01 -4.96507E-16 -8.11851E-16 -6.00445E-16 -2.81806E-15
  0.100  5.81770E-02 -5.18477E-05 -3.80452E-08 -8.49867E-12 -4.30577E-15  1.00527E-01  6.97020E-05  2.75544E-08 -6.99211E-12 -5.36434E-15
  0.200  5.83140E-02 -2.04439E-04 -6.01815E-07 -5.36447E-10 -5.25061E-13  1.00281E-01  2.74103E-04  4.34730E-07 -4.44969E-10 -7.34299E-13
  0.300  5.85375E-02 -4.49083E-04 -2.98924E-06 -5.97142E-09 -1.31613E-11  9.98812E-02  5.99405E-04  2.14987E-06 -5.02194E-09 -1.85665E-11
  0.400  5.88403E-02 -7.71831E-04 -9.19870E-06 -3.24857E-08 -1.27663E-10  9.93451E-02  1.02365E-03  6.57478E-06 -2.78509E-08 -1.82712E-10
  0.500  5.92127E-02 -1.15424E-03 -2.16992E-05 -1.18875E-07 -7.32751E-10  9.86944E-02  1.51819E-03  1.53842E-05 -1.04453E-07 -1.06832E-09
  0.600  5.96432E-02 -1.57441E-03 -4.31410E-05 -3.37322E-07 -3.00858E-09  9.79551E-02  2.04960E-03  3.02785E-05 -3.05384E-07 -4.48640E-09
  0.700  6.01189E-02 -2.00814E-03 -7.60361E-05 -8.00715E-07 -9.77756E-09  9.71561E-02  2.58189E-03  5.27168E-05 -7.50767E-07 -1.49722E-08
  0.800  6.06258E-02 -2.43026E-03 -1.22439E-04 -1.66350E-06 -2.67171E-08  9.63276E-02  3.07890E-03  8.36635E-05 -1.62363E-06 -4.21759E-08
  0.900  6.11496E-02 -2.81597E-03 -1.83660E-04 -3.11397E-06 -6.38193E-08  9.54999E-02  3.50657E-03  1.23374E-04 -3.17971E-06 -1.04261E-07
  1.000  6.16764E-02 -3.14215E-03 -2.60035E-04 -5.35733E-06 -1.36855E-07  9.47015E-02  3.83516E-03  1.71247E-04 -5.75142E-06 -2.32257E-07
  1.100  6.21930E-02 -3.38854E-03 -3.50779E-04 -8.59065E-06 -2.68504E-07  9.39583E-02  4.04110E-03  2.25760E-04 -9.74384E-06 -4.75128E-07
  1.200  6.26872E-02 -3.53874E-03 -4.53932E-04 -1.29721E-05 -4.88754E-07  9.32919E-02  4.10839E-03  2.84498E-04 -1.56210E-05 -9.05075E-07
  1.300  6.31486E-02 -3.58106E-03 -5.66403E-04 -1.85887E-05 -8.34246E-07  9.27195E-02  4.02953E-03  3.44272E-04 -2.38822E-05 -1.62243E-06
  1.400  6.35685E-02 -3.50896E-03 -6.84104E-04 -2.54267E-05 -1.34631E-06  9.22525E-02  3.80587E-03  4.01322E-04 -3.50274E-05 -2.75931E-06
  1.500  6.39403E-02 -3.32138E-03 -8.02171E-04 -3.33500E-05 -2.06771E-06  9.18970E-02  3.44739E-03  4.51593E-04 -4.95154E-05 -4.48112E-06
  1.600  6.42593E-02 -3.02263E-03 -9.15241E-04 -4.20889E-05 -3.03830E-06  9.16532E-02  2.97201E-03  4.91046E-04 -6.77139E-05 -6.98503E-06
  1.700  6.45231E-02 -2.62216E-03 -1.01777E-03 -5.12435E-05 -4.29004E-06  9.15159E-02  2.40434E-03  5.15997E-04 -8.98490E-05 -1.04947E-05
  1.800  6.47311E-02 -2.13392E-03 -1.10436E-03 -6.03011E-05 -5.84221E-06  9.14754E-02  1.77410E-03  5.23446E-04 -1.15955E-04 -1.52510E-05
  1.900  6.48845E-02 -1.57568E-03 -1.17007E-03 -6.86660E-05 -7.69744E-06  9.15176E-02  1.11430E-03  5.11374E-04 -1.45829E-04 -2.14977E-05
  2.000  6.49865E-02 -9.68093E-04 -1.21074E-03 -7.57000E-05 -9.83955E-06  9.16254E-02  4.59194E-04  4.78978E-04 -1.79002E-04 -2.94642E-05
  2.100  6.50412E-02 -3.33696E-04 -1.22315E-03 -8.07665E-05 -1.22338E-05  9.17796E-02 -1.57757E-04  4.26842E-04 -2.14713E-04 -3.93442E-05
  2.200  6.50541E-02  3.04164E-04 -1.20530E-03 -8.32752E-05 -1.48303E-05  9.19601E-02 -7.05813E-04  3.56996E-04 -2.51913E-04 -5.12727E-05
  2.300  6.50318E-02  9.22377E-04 -1.15642E-03 -8.27199E-05 -1.75695E-05  9.21466E-02 -1.15871E-03  2.72895E-04 -2.89273E-04 -6.53022E-05
  2.400  6.49812E-02  1.49908E-03 -1.07708E-03 -7.87068E-05 -2.03916E-05  9.23203E-02 -1.49609E-03  1.79277E-04 -3.25223E-04 -8.13812E-05
  2.500  6.49097E-02  2.01459E-03 -9.69173E-04 -7.09677E-05 -2.32465E-05  9.24642E-02 -1.70456E-03  8.19255E-05 -3.57999E-04 -9.93341E-05
  2.600  6.48249E-02  2.45218E-03 -8.35818E-04 -5.93593E-05 -2.61044E-05  9.25640E-02 -1.77830E-03 -1.26679E-05 -3.85707E-04 -1.18848E-04
  2.700  6.47341E-02  2.79879E-03 -6.81276E-04 -4.38493E-05 -2.89658E-05  9.26091E-02 -1.71917E-03 -9.77153E-05 -4.06398E-04 -1.39465E-04
  2.800  6.46441E-02  3.04548E-03 -5.10806E-04 -2.44915E-05 -3.18678E-05  9.25923E-02 -1.53641E-03 -1.66607E-04 -4.18157E-04 -1.60581E-04
  2.900  6.45609E-02  3.18781E-03 -3.30490E-04 -1.39728E-06 -3.48873E-05  9.25104E-02 -1.24578E-03 -2.13417E-04 -4.19189E-04 -1.81455E-04
  3.000  6.44897E-02  3.22601E-03 -1.47046E-04  2.52921E-05 -3.81376E-05  9.23635E-02 -8.68341E-04 -2.33403E-04 -4.07916E-04 -2.01226E-04
  3.100  6.44338E-02  3.16495E-03  3.23724E-05  5.54247E-05 -4.17598E-05  9.21549E-02 -4.28936E-04 -2.23475E-04 -3.83068E-04 -2.18937E-04
  3.200  6.43953E-02  3.01403E-03  2.00404E-04  8.88429E-05 -4.59079E-05  9.18903E-02  4.56731E-05 -1.82581E-04 -3.43781E-04 -2.33566E-04
  3.300  6.43740E-02  2.78686E-03  3.49712E-04  1.25371E-04 -5.07291E-05  9.15769E-02  5.28714E-04 -1.11986E-04 -2.89684E-04 -2.44068E-04
  3.400  6.43674E-02  2.50077E-03  4.73244E-04  1.64786E-04 -5.63415E-05  9.12223E-02  9.95351E-04 -1.53916E-05 -2.20977E-04 -2.49416E-04
  3.500  6.43706E-02  2.17628E-03  5.64498E-04  2.06763E-04 -6.28109E-05  9.08338E-02  1.42450E-03  1.01106E-04 -1.38510E-04 -2.48652E-04
  3.600  6.43762E-02  1.83634E-03  6.17809E-04  2.50824E-04 -7.01303E-05  9.04167E-02  1.80041E-03  2.29262E-04 -4.38298E-05 -2.40931E-04
  3.700  6.43741E-02  1.50554E-03  6.28637E-04  2.96266E-04 -7.82055E-05  8.99740E-02  2.11382E-03  3.59111E-04  6.07866E-05 -2.25579E-04
  3.800  6.43518E-02  1.20917E-03  5.93856E-04  3.42104E-04 -8.68489E-05  8.95054E-02  2.36277E-03  4.79580E-04  1.72333E-04 -2.02134E-04
  3.900  6.42942E-02  9.72307E-04  5.12019E-04  3.87035E-04 -9.57832E-05  8.90065E-02  2.55279E-03  5.79247E-04  2.87115E-04 -1.70397E-04
  4.000  6.41847E-02  8.18759E-04  3.83586E-04  4.29420E-04 -1.04658E-04  8.84691E-02  2.69662E-03  6.47200E-04  4.00833E-04 -1.30468E-04
  4.100  6.40051E-02  7.70093E-04  2.11091E-04  4.67313E-04 -1.13075E-04  8.78808E-02  2.81334E-03  6.73926E-04  5.08723E-04 -8.27745E-05
  4.200  6.37362E-02  8.44675E-04 -7.67276E-07  4.98526E-04 -1.20624E-04  8.72260E-02  2.92708E-03  6.52181E-04  6.05743E-04 -2.80910E-05
  4.300  6.33591E-02  1.05679E-03 -2.45145E-04  5.20740E-04 -1.26927E-04  8.64857E-02  3.06530E-03  5.77741E-04  6.86809E-04  3.24602E-05
  4.400  6.28552E-02  1.41589E-03 -5.13184E-04  5.31656E-04 -1.31675E-04  8.56393E-02  3.25679E-03  4.49982E-04  7.47075E-04  9.74238E-05
  4.500  6.22076E-02  1.92603E-03 -7.94270E-04  5.29173E-04 -1.34670E-04  8.46654E-02  3.52955E-03  2.72215E-04  7.82231E-04  1.65047E-04
  4.600  6.14015E-02  2.58549E-03 -1.07641E-03  5.11582E-04 -1.35853E-04  8.35428E-02  3.90868E-03  5.17449E-05  7.88814E-04  2.33334E-04
  4.700  6.04251E-02  3.38664E-03 -1.34675E-03  4.77757E-04 -1.35325E-04  8.22522E-02  4.41439E-03 -2.00383E-04  7.64493E-04  3.00125E-04
  4.800  5.92700E-02  4.31605E-03 -1.59213E-03  4.27326E-04 -1.33340E-04  8.07770E-02  5.06039E-03 -4.69927E-04  7.08313E-04  3.63187E-04
  4.900  5.79320E-02  5.35489E-03 -1.79979E-03  3.60797E-04 -1.30294E-04  7.91042E-02  5.85262E-03 -7.40275E-04  6.20870E-04  4.20320E-04
  5.000  5.64107E-02  6.47954E-03 -1.95798E-03  2.79625E-04 -1.26690E-04  7.72259E-02  6.78851E-03 -9.93473E-04  5.04397E-04  4.69479E-04
  5.100  5.47106E-02  7.66245E-03 -2.05669E-03  1.86214E-04 -1.23089E-04  7.51389E-02  7.85678E-03 -1.21141E-03  3.62739E-04  5.08879E-04
  5.200  5.28400E-02  8.87317E-03 -2.08820E-03  8.38397E-05 -1.20058E-04  7.28458E-02  9.03784E-03 -1.37701E-03  2.01219E-04  5.37111E-04
  5.300  5.08114E-02  1.00796E-02 -2.04755E-03 -2.35028E-05 -1.18107E-04  7.03543E-02  1.03046E-02 -1.47548E-03  2.63920E-05  5.53225E-04
  5.400  4.86408E-02  1.12491E-02 -1.93294E-03 -1.31315E-04 -1.17636E-04  6.76776E-02  1.16240E-02 -1.49524E-03 -1.54294E-04  5.56803E-04
  5.500  4.63475E-02  1.23500E-02 -1.74581E-03 -2.34861E-04 -1.18886E-04  6.48334E-02  1.29583E-02 -1.42886E-03 -3.32920E-04  5.47984E-04
  5.600  4.39529E-02  1.33527E-02 -1.49089E-03 -3.29462E-04 -1.21911E-04  6.18433E-02  1.42676E-02 -1.27350E-03 -5.01557E-04  5.27471E-04
  5.700  4.14803E-02  1.42307E-02 -1.17595E-03 -4.10799E-04 -1.26564E-04  5.87323E-02  1.55114E-02 -1.03119E-03 -6.52736E-04  4.96487E-04
  5.800  3.89540E-02  1.49618E-02 -8.11392E-04 -4.75190E-04 -1.32505E-04  5.55277E-02  1.66507E-02 -7.08660E-04 -7.79899E-04  4.56709E-04
  5.900  3.63986E-02  1.55287E-02 -4.09754E-04 -5.19826E-04 -1.39226E-04  5.22580E-02  1.76503E-02 -3.16942E-04 -8.77782E-04  4.10159E-04
  6.000  3.38383E-02  1.59195E-02  1.49930E-05 -5.42950E-04 -1.46098E-04  4.89525E-02  1.84797E-02  1.29358E-04 -9.42706E-04  3.59087E-04
  6.100  3.12964E-02  1.61279E-02  4.48148E-04 -5.43950E-04 -1.52424E-04  4.56402E-02  1.91149E-02  6.12989E-04 -9.72767E-04  3.05829E-04
  6.200  2.87950E-02  1.61536E-02  8.75036E-04 -5.23376E-04 -1.57503E-04  4.23492E-02  1.95392E-02  1.11511E-03 -9.67884E-04  2.52671E-04
  6.300  2.63540E-02  1.60015E-02  1.28173E-03 -4.82876E-04 -1.60691E-04  3.91060E-02  1.97435E-02  1.61643E-03 -9.29744E-04  2.01719E-04
  6.400  2.39914E-02  1.56815E-02  1.65570E-03 -4.25054E-04 -1.61455E-04  3.59351E-02  1.97265E-02  2.09827E-03 -8.61613E-04  1.54788E-04
  6.500  2.17227E-02  1.52079E-02  1.98633E-03 -3.53271E-04 -1.59421E-04  3.28584E-02  1.94943E-02  2.54357E-03 -7.68065E-04  1.13317E-04
  6.600  1.95610E-02  1.45984E-02  2.26536E-03 -2.71406E-04 -1.54399E-04  2.98955E-02  1.90595E-02  2.93772E-03 -6.54635E-04  7.83124E-05
  6.700  1.75167E-02  1.38736E-02  2.48707E-03 -1.83596E-04 -1.46397E-04  2.70627E-02  1.84405E-02  3.26917E-03 -5.27431E-04  5.03305E-05
  6.800  1.55977E-02  1.30556E-02  2.64844E-03 -9.39732E-05 -1.35616E-04  2.43737E-02  1.76604E-02  3.52980E-03 -3.92742E-04  2.94872E-05
  6.900  1.38097E-02  1.21673E-02  2.74899E-03 -6.42781E-06 -1.22424E-04  2.18391E-02  1.67454E-02  3.71508E-03 -2.56668E-04  1.54991E-05
  7.000  1.21556E-02  1.12315E-02  2.79065E-03  7.55963E-05 -1.07331E-04  1.94666E-02  1.57236E-02  3.82399E-03 -1.24786E-04  7.74767E-06
  7.100  1.06366E-02  1.02703E-02  2.77743E-03  1.49257E-04 -9.09345E-05  1.72612E-02  1.46240E-02  3.85871E-03 -1.89466E-06  5.35867E-06
  7.200  9.25177E-03  9.30408E-03  2.71499E-03  2.12413E-04 -7.38826E-05  1.52252E-02  1.34750E-02  3.82423E-03  1.08168E-04  7.29094E-06
  7.300  7.99830E-03  8.35124E-03  2.61023E-03  2.63670E-04 -5.68211E-05  1.33583E-02  1.23034E-02  3.72776E-03  2.02630E-04  1.24249E-05
  7.400  6.87203E-03  7.42767E-03  2.47085E-03  3.02370E-04 -4.03532E-05  1.16583E-02  1.11339E-02  3.57816E-03  2.79803E-04  1.96451E-05
  7.500  5.86747E-03  6.54656E-03  2.30485E-03  3.28537E-04 -2.50040E-05  1.01209E-02  9.98800E-03  3.38527E-03  3.39032E-04  2.79106E-05
  7.600  4.97810E-03  5.71829E-03  2.12018E-03  3.42782E-04 -1.11947E-05  8.73998E-03  8.88413E-03  3.15937E-03  3.80592E-04  3.63100E-05
  7.700  4.19658E-03  4.95048E-03  1.92436E-03  3.46193E-04  7.71752E-07  7.50811E-03  7.83699E-03  2.91059E-03  4.05529E-04  4.40984E-05
  7.800  3.51501E-03  4.24806E-03  1.72425E-03  3.40200E-04  1.07160E-05  6.41670E-03  6.85773E-03  2.64849E-03  4.15493E-04  5.07171E-05
  7.900  2.92515E-03  3.61356E-03  1.52578E-03  3.26445E-04  1.85771E-05  5.45630E-03  5.95410E-03  2.38173E-03  4.12545E-04  5.57963E-05
  8.000  2.41855E-03  3.04737E-03  1.33389E-03  3.06661E-04  2.43998E-05  4.61688E-03  5.13061E-03  2.11777E-03  3.98980E-04  5.91441E-05
  8.100  1.98685E-03  2.54807E-03  1.15247E-03  2.82557E-04  2.83171E-05  3.88810E-03  4.38901E-03  1.86279E-03  3.77166E-04  6.07249E-05
  8.200  1.62182E-03  2.11277E-03  9.84351E-04  2.55738E-04  3.05286E-05  3.25953E-03  3.72860E-03  1.62159E-03  3.49398E-04  6.06303E-05
  8.300  1.31558E-03  1.73749E-03  8.31392E-04  2.27632E-04  3.12781E-05  2.72087E-03  3.14673E-03  1.39766E-03  3.17798E-04  5.90472E-05
  8.400  1.06066E-03  1.41745E-03  6.94575E-04  1.99450E-04  3.08323E-05  2.26216E-03  2.63922E-03  1.19328E-03  2.84234E-04  5.62249E-05
  8.500  8.50109E-04  1.14738E-03  5.74134E-04  1.72164E-04  2.94615E-05  1.87390E-03  2.20081E-03  1.00962E-03  2.50273E-04  5.24449E-05
  8.600  6.77539E-04  9.21842E-04  4.69697E-04  1.46508E-04  2.74239E-05  1.54716E-03  1.82552E-03  8.46930E-04  2.17168E-04  4.79947E-05
  8.700  5.37171E-04  7.35365E-04  3.80426E-04  1.22985E-04  2.49535E-05  1.27372E-03  1.50702E-03  7.04747E-04  1.85857E-04  4.31469E-05
  8.800  4.23841E-04  5.82684E-04  3.05157E-04  1.01897E-04  2.22523E-05  1.04605E-03  1.23889E-03  5.82026E-04  1.56988E-04  3.81446E-05
  8.900  3.32997E-04  4.58845E-04  2.42521E-04  8.33704E-05  1.94861E-05  8.57394E-04  1.01484E-03  4.77335E-04  1.30954E-04  3.31913E-05
  9.000  2.60677E-04  3.59307E-04  1.91048E-04  6.73944E-05  1.67838E-05  7.01736E-04  8.28922E-04  3.88998E-04  1.07935E-04  2.84472E-05
  9.100  2.03476E-04  2.79989E-04  1.49254E-04  5.38531E-05  1.42386E-05  5.73792E-04  6.75610E-04  3.15217E-04  8.79388E-05  2.40287E-05
  9.200  1.58505E-04  2.17296E-04  1.15706E-04  4.25580E-05  1.19121E-05  4.68969E-04  5.49890E-04  2.54177E-04  7.08486E-05  2.00118E-05
  9.300  1.23340E-04  1.68118E-04  8.90689E-05  3.32767E-05  9.83861E-06  3.83316E-04  4.47296E-04  2.04118E-04  5.64583E-05  1.64367E-05
  9.400  9.59726E-05  1.29808E-04  6.81364E-05  2.57564E-05  8.03078E-06  3.13472E-04  3.63914E-04  1.63396E-04  4.45083E-05  1.33149E-05
  9.500  7.47566E-05  1.00148E-04  5.18448E-05  1.97420E-05  6.48452E-06  2.56599E-04  2.96363E-04  1.30510E-04  3.47129E-05  1.06350E-05
  9.600  5.83579E-05  7.73049E-05  3.92780E-05  1.49901E-05  5.18412E-06  2.10325E-04  2.41764E-04  1.04126E-04  2.67816E-05  8.37026E-06
  9.700  4.57068E-05  5.97876E-05  2.96632E-05  1.12773E-05  4.10647E-06  1.72678E-04  1.97695E-04  8.30791E-05  2.04343E-05  6.48341E-06
  9.800  3.59539E-05  4.63962E-05  2.23605E-05  8.40572E-06  3.22465E-06  1.42037E-04  1.62139E-04  6.63712E-05  1.54118E-05  4.93199E-06
  9.900  2.84314E-05  3.61779E-05  1.68490E-05  6.20511E-06  2.51063E-06  1.17072E-04  1.33435E-04  5.31592E-05  1.14817E-05  3.67202E-06
 10.000  2.26184E-05  2.83841E-05  1.27112E-05  4.53237E-06  1.93726E-06  9.66985E-05  1.10227E-04  4.27415E-05  8.44078E-06  2.66069E-06
 10.100  1.81123E-05  2.24328E-05  9.61773E-06  3.26998E-06  1.47959E-06  8.00398E-05  9.14143E-05  3.45408E-05  6.11494E-06  1.85829E-06
 10.200  1.46035E-05  1.78758E-05  7.31156E-06  2.32324E-06  1.11564E-06  6.63857E-05  7.61135E-05  2.80876E-05  4.35791E-06  1.22916E-06
 10.300  1.18558E-05  1.43707E-05  5.59483E-06  1.61720E-06  8.26631E-07  5.51643E-05  6.36168E-05  2.30039E-05  3.04854E-06  7.42210E-07
 10.400  9.68939E-06  1.16578E-05  4.31668E-06  1.09340E-06  5.97061E-07  4.59159E-05  5.33610E-05  1.89877E-05  2.08774E-06  3.70885E-07
 10.500  7.96828E-06  9.54129E-06  3.36318E-06  7.06849E-07  4.14417E-07  3.82708E-05  4.48997E-05  1.58004E-05  1.39539E-06  9.28890E-08
 10.600  6.58957E-06  7.87439E-06  2.64899E-06  4.23295E-07  2.68840E-07  3.19324E-05  3.78800E-05  1.32544E-05  9.07324E-07 -1.10263E-07
 10.700  5.47559E-06  6.54744E-06  2.11061E-06  2.16887E-07  1.52709E-07  2.66621E-05  3.20233E-05  1.12036E-05  5.72606E-07 -2.53767E-07
 10.800  4.56767E-06  5.47882E-06  1.70115E-06  6.82344E-08  6.02183E-08  2.22681E-05  2.71101E-05  9.53488E-06  3.51153E-07 -3.50052E-07
 10.900  3.82146E-06  4.60789E-06  1.38615E-06 -3.71531E-08 -1.30160E-08  1.85959E-05  2.29676E-05  8.16160E-06  2.11716E-07 -4.09264E-07
 11.000  3.20334E-06  3.88971E-06  1.14045E-06 -1.10086E-07 -7.03048E-08  1.55206E-05  1.94589E-05  7.01767E-06  1.30187E-07 -4.39680E-07
 11.100  2.68772E-06  3.29096E-06  9.45800E-07 -1.58637E-07 -1.14178E-07  1.29409E-05  1.64759E-05  6.05313E-06  8.82074E-08 -4.48068E-07
 11.200  2.25506E-06  2.78693E-06  7.89057E-07 -1.88854E-07 -1.46618E-07  1.07744E-05  1.39324E-05  5.23047E-06  7.20120E-08 -4.39960E-07
 11.300  1.89028E-06  2.35924E-06  6.60808E-07 -2.05289E-07 -1.69239E-07  8.95393E-06  1.17593E-05  4.52172E-06  7.14929E-08 -4.19879E-07
 11.400  1.58171E-06  1.99416E-06  5.54359E-07 -2.11394E-07 -1.83413E-07  7.42410E-06  9.90078E-06  3.90607E-06  7.94228E-08 -3.91512E-07
 11.500  1.32016E-06  1.68131E-06  4.64977E-07 -2.09811E-07 -1.90364E-07  6.13923E-06  8.31131E-06  3.36807E-06  9.08188E-08 -3.57848E-07
 11.600  1.09835E-06  1.41273E-06  3.89309E-07 -2.02579E-07 -1.91215E-07  5.06134E-06  6.95314E-06  2.89615E-06  1.02418E-07 -3.21279E-07
 11.700  9.10360E-07  1.18219E-06  3.24964E-07 -1.91296E-07 -1.87022E-07  4.15865E-06  5.79467E-06  2.48154E-06  1.12249E-07 -2.83695E-07
 11.800  7.51353E-07  9.84682E-07  2.70199E-07 -1.77221E-07 -1.78784E-07  3.40443E-06  4.80910E-06  2.11743E-06  1.19279E-07 -2.46551E-07
 11.900  6.17267E-07  8.16040E-07  2.23700E-07 -1.61365E-07 -1.67440E-07  2.77602E-06  3.97339E-06  1.79832E-06  1.23138E-07 -2.10933E-07
 12.000  5.04650E-07  6.72722E-07  1.84419E-07 -1.44538E-07 -1.53863E-07  2.25419E-06  3.26752E-06  1.51963E-06  1.23892E-07 -1.77614E-07
 12.100  4.10517E-07  5.51616E-07  1.51476E-07 -1.27397E-07 -1.38848E-07  1.82248E-06  2.67398E-06  1.27736E-06  1.21877E-07 -1.47107E-07
 12.200  3.32265E-07  4.49939E-07  1.24091E-07 -1.10467E-07 -1.23100E-07  1.46680E-06  2.17733E-06  1.06789E-06  1.17568E-07 -1.19705E-07
 12.300  2.67602E-07  3.65169E-07  1.01549E-07 -9.41667E-08 -1.07227E-07  1.17508E-06  1.76393E-06  8.87883E-07  1.11492E-07 -9.55292E-08
 12.400  2.14505E-07  2.95011E-07  8.31815E-08 -7.88166E-08 -9.17340E-08  9.36961E-07  1.42172E-06  7.34183E-07  1.04165E-07 -7.45642E-08
 12.500  1.71190E-07  2.37374E-07  6.83625E-08 -6.46535E-08 -7.70213E-08  7.43557E-07  1.14006E-06  6.03829E-07  9.60534E-08 -5.66900E-08
 12.600  1.36084E-07  1.90369E-07  5.65116E-08 -5.18375E-08 -6.33882E-08  5.87284E-07  9.09597E-07  4.94025E-07  8.75569E-08 -4.17123E-08
 12.700  1.07816E-07  1.52301E-07  4.70989E-08 -4.04608E-08 -5.10388E-08  4.61678E-07  7.22132E-07  4.02158E-07  7.89985E-08 -2.93868E-08
 12.800  8.51936E-08  1.21669E-07  3.96513E-08 -3.05558E-08 -4.00914E-08  3.61262E-07  5.70545E-07  3.25811E-07  7.06270E-08 -1.94395E-08
 12.900  6.71925E-08  9.71601E-08  3.37565E-08 -2.21043E-08 -3.05904E-08  2.81414E-07  4.48687E-07  2.62771E-07  6.26235E-08 -1.15836E-08
 13.000  5.29419E-08  7.76409E-08  2.90642E-08 -1.50456E-08 -2.25183E-08  2.18260E-07  3.51290E-07  2.11040E-07  5.51110E-08 -5.53280E-09
 13.100  4.17089E-08  6.21489E-08  2.52852E-08 -9.28698E-09 -1.58095E-08  1.68571E-07  2.73878E-07  1.68837E-07  4.81646E-08 -1.01106E-09
 13.200  3.28843E-08  4.98776E-08  2.21879E-08 -4.71158E-09 -1.03626E-08  1.29678E-07  2.12683E-07  1.34595E-07  4.18218E-08  2.23988E-09
 13.300  2.59672E-08  4.01612E-08  1.95927E-08 -1.18769E-09 -6.05242E-09  9.93854E-08  1.64555E-07  1.06952E-07  3.60920E-08  4.45581E-09
 13.400  2.05507E-08  3.24577E-08  1.73650E-08  1.42380E-09 -2.74052E-09  7.59042E-08  1.26889E-07  8.47386E-08  3.09639E-08  5.84710E-09
 13.500  1.63082E-08  2.63322E-08  1.54081E-08  3.26257E-09 -2.83910E-10  5.77848E-08  9.75438E-08  6.69621E-08  2.64120E-08  6.59753E-09
 13.600  1.29798E-08  2.14399E-08  1.36554E-08  4.46348E-09  1.45774E-09  4.38620E-08  7.47770E-08  5.27881E-08  2.24018E-08  6.86433E-09
 13.700  1.03612E-08  1.75106E-08  1.20635E-08  5.15228E-09  2.61680E-09  3.32058E-08  5.71815E-08  4.15231E-08  1.88935E-08  6.77928E-09
 13.800  8.29340E-09  1.43351E-08  1.06059E-08  5.44271E-09  3.31398E-09  2.50790E-08  4.36293E-08  3.25949E-08  1.58444E-08  6.45045E-09
 13.900  6.65307E-09  1.17520E-08  9.26795E-09  5.43464E-09  3.65603E-09  1.89013E-08  3.32232E-08  2.55361E-08  1.32116E-08  5.96446E-09
 14.000  5.34557E-09  9.63813E-09  8.04194E-09  5.21338E-09  3.73475E-09  1.42187E-08  2.52542E-08  1.99671E-08  1.09525E-08  5.38893E-09
 14.100  4.29838E-09  7.89921E-09  6.92436E-09  4.84971E-09  3.62689E-09  1.06784E-08  1.91655E-08  1.55818E-08  9.02636E-09  4.77517E-09
 14.200  3.45604E-09  6.46308E-09  5.91334E-09  4.40062E-09  3.39490E-09  8.00763E-09  1.45228E-08  1.21344E-08  7.39457E-09  4.16065E-09
 14.300  2.77606E-09  5.27405E-09  5.00706E-09  3.91049E-09  3.08808E-09  5.99652E-09  1.09886E-08  9.42888E-09  6.02105E-09  3.57151E-09
 14.400  2.22578E-09  4.28871E-09  4.20291E-09  3.41257E-09  2.74408E-09  4.48459E-09  8.30225E-09  7.30908E-09  4.87250E-09  3.02474E-09
 14.500  1.77984E-09  3.47265E-09  3.49700E-09  2.93063E-09  2.39062E-09  3.34948E-09  6.26303E-09  5.65108E-09  3.91844E-09  2.53022E-09
 14.600  1.41843E-09  2.79817E-09  2.88411E-09  2.48055E-09  2.04712E-09  2.49830E-09  4.71692E-09  4.35675E-09  3.13132E-09  2.09242E-09
 14.700  1.12585E-09  2.24253E-09  2.35782E-09  2.07192E-09  1.72633E-09  1.86073E-09  3.54608E-09  3.34845E-09  2.48635E-09  1.71188E-09
 14.800  8.89515E-10  1.78677E-09  1.91084E-09  1.70947E-09  1.43577E-09  1.38366E-09  2.66054E-09  2.56485E-09  1.96155E-09  1.38640E-09
 14.900  6.99230E-10  1.41487E-09  1.53531E-09  1.39430E-09  1.17902E-09  1.02708E-09  1.99170E-09  1.95751E-09  1.53751E-09  1.11201E-09
 15.000  5.46654E-10  1.11320E-09  1.22313E-09  1.12499E-09  9.56824E-10  7.60874E-10  1.48731E-09  1.48819E-09  1.19731E-09  8.83723E-10
 15.100  4.24904E-10  8.70068E-10  9.66285E-10  8.98403E-10  7.67968E-10  5.62408E-10  1.10762E-09  1.12672E-09  9.26303E-10  6.96088E-10
 15.200  3.28282E-10  6.75451E-10  7.57103E-10  7.10453E-10  6.09993E-10  4.14674E-10  8.22382E-10  8.49346E-10  7.11960E-10  5.43609E-10
 15.300  2.52055E-10  5.20779E-10  5.88408E-10  5.56564E-10  4.79738E-10  3.04905E-10  6.08604E-10  6.37335E-10  5.43641E-10  4.21019E-10
 15.400  1.92297E-10  3.98756E-10  4.53662E-10  4.32081E-10  3.73744E-10  2.23515E-10  4.48809E-10  4.75975E-10  4.12406E-10  3.23453E-10
 15.500  1.45758E-10  3.03208E-10  3.47037E-10  3.32522E-10  2.88537E-10  1.63312E-10  3.29722E-10  3.53720E-10  3.10813E-10  2.46552E-10
 15.600  1.09759E-10  2.28956E-10  2.63430E-10  2.53746E-10  2.20817E-10  1.18902E-10  2.41263E-10  2.61535E-10  2.32725E-10  1.86498E-10
 15.700  8.21072E-11  1.71689E-10  1.98451E-10  1.92048E-10  1.67569E-10  8.62416E-11  1.75792E-10  1.92369E-10  1.73128E-10  1.40017E-10
 15.800  6.10156E-11  1.27858E-10  1.48387E-10  1.44194E-10  1.26124E-10  6.23020E-11  1.27522E-10  1.40744E-10  1.27962E-10  1.04352E-10
 15.900  4.50420E-11  9.45631E-11  1.10139E-10  1.07424E-10  9.41775E-11  4.48183E-11  9.20823E-11  1.02416E-10  9.39723E-11  7.72127E-11
 16.000  3.30306E-11  6.94614E-11  8.11605E-11  7.94229E-11  6.97797E-11  3.20993E-11  6.61761E-11  7.41176E-11  6.85707E-11  5.67289E-11
 16.100  2.40628E-11  5.06775E-11  5.93812E-11  5.82848E-11  5.13128E-11  2.28850E-11  4.73261E-11  5.33404E-11  4.97180E-11  4.13904E-11
 16.200  1.74148E-11  3.67250E-11  4.31421E-11  4.24616E-11  3.74552E-11  1.62388E-11  3.36762E-11  3.81725E-11  3.58212E-11  2.99931E-11
 16.300  1.25214E-11  2.64368E-11  3.11275E-11  3.07135E-11  2.71428E-11  1.14670E-11  2.38409E-11  2.71636E-11  2.56471E-11  2.15881E-11
 16.400  8.94463E-12  1.89052E-11  2.23060E-11  2.20602E-11  1.95305E-11  8.05730E-12  1.67904E-11  1.92200E-11  1.82483E-11  1.54354E-11
 16.500  6.34849E-12  1.34310E-11  1.58771E-11  1.57359E-11  1.39556E-11  5.63287E-12  1.17627E-11  1.35220E-11  1.29037E-11  1.09642E-11
 16.600  4.47711E-12  9.48020E-12  1.12262E-11  1.11486E-11  9.90400E-12  3.91773E-12  8.19663E-12  9.45888E-12  9.06839E-12  7.73788E-12
 16.700  3.13737E-12  6.64866E-12  7.88577E-12  7.84593E-12  6.98149E-12  2.71065E-12  5.68098E-12  6.57885E-12  6.33417E-12  5.42613E-12
 16.800  2.18473E-12  4.63325E-12  5.50349E-12  5.48536E-12  4.88884E-12  1.86562E-12  3.91610E-12  4.54958E-12  4.39756E-12  3.78106E-12
 16.900  1.51188E-12  3.20848E-12  3.81636E-12  3.81015E-12  3.40116E-12  1.27721E-12  2.68481E-12  3.12827E-12  3.03470E-12  2.61833E-12
 17.000  1.03979E-12  2.20801E-12  2.62972E-12  2.62962E-12  2.35099E-12  8.69712E-13  1.83061E-12  2.13872E-12  2.08170E-12  1.80197E-12
 17.100  7.10730E-13  1.51014E-12  1.80074E-12  1.80340E-12  1.61478E-12  5.89047E-13  1.24134E-12  1.45386E-12  1.41952E-12  1.23258E-12
 17.200  4.82859E-13  1.02653E-12  1.22546E-12  1.22907E-12  1.10217E-12  3.96805E-13  8.37139E-13  9.82703E-13  9.62272E-13  8.38019E-13
 17.300  3.26072E-13  6.93567E-13  8.28872E-13  8.32478E-13  7.47639E-13  2.65859E-13  5.61453E-13  6.60476E-13  6.48501E-13  5.66351E-13
 17.400  2.18880E-13  4.65794E-13  5.57237E-13  5.60420E-13  5.04049E-13  1.77162E-13  3.74489E-13  4.41404E-13  4.34506E-13  3.80484E-13
 17.500  1.46056E-13  3.10963E-13  3.72376E-13  3.74997E-13  3.37769E-13  1.17416E-13  2.48415E-13  2.93338E-13  2.89448E-13  2.54114E-13
 17.600  9.68893E-14  2.06375E-13  2.47366E-13  2.49425E-13  2.24989E-13  7.73982E-14  1.63882E-13  1.93850E-13  1.91713E-13  1.68727E-13
 17.700  6.38991E-14  1.36163E-13  1.63357E-13  1.64922E-13  1.48978E-13  5.07431E-14  1.07524E-13  1.27391E-13  1.26257E-13  1.11384E-13
 17.800  4.18984E-14  8.93176E-14  1.07250E-13  1.08409E-13  9.80686E-14  3.30881E-14  7.01630E-14  8.32525E-14  8.26803E-14  7.31089E-14
 17.900  2.73151E-14  5.82521E-14  7.00066E-14  7.08481E-14  6.41811E-14  2.14595E-14  4.55348E-14  5.41070E-14  5.38398E-14  4.77134E-14
 18.000  1.77063E-14  3.77748E-14  4.54347E-14  4.60347E-14  4.17615E-14  1.38428E-14  2.93915E-14  3.49718E-14  3.48640E-14  3.09638E-14
 18.100  1.14129E-14  2.43572E-14  2.93199E-14  2.97412E-14  2.70183E-14  8.88167E-15  1.88690E-14  2.24803E-14  2.24512E-14  1.99816E-14
 18.200  7.31512E-15  1.56173E-14  1.88140E-14  1.91060E-14  1.73810E-14  5.66809E-15  1.20486E-14  1.43721E-14  1.43782E-14  1.28228E-14
 18.300  4.66255E-15  9.95767E-15  1.20051E-14  1.22050E-14  1.11185E-14  3.59798E-15  7.65224E-15  9.13866E-15  9.15766E-15  8.18340E-15
 18.400  2.95541E-15  6.31391E-15  7.61784E-15  7.75320E-15  7.07278E-15  2.27179E-15  4.83414E-15  5.77963E-15  5.80093E-15  5.19393E-15
 18.500  1.86304E-15  3.98148E-15  4.80726E-15  4.89800E-15  4.47430E-15  1.42683E-15  3.03764E-15  3.63568E-15  3.65474E-15  3.27858E-15
 18.600  1.16802E-15  2.49697E-15  3.01704E-15  3.07728E-15  2.81494E-15  8.91423E-16  1.89867E-15  2.27483E-15  2.29021E-15  2.05834E-15
 18.700  7.28318E-16  1.55747E-15  1.88320E-15  1.92285E-15  1.76132E-15  5.53998E-16  1.18051E-15  1.41581E-15  1.42747E-15  1.28531E-15
 18.800  4.51697E-16  9.66232E-16  1.16913E-15  1.19500E-15  1.09610E-15  3.42497E-16  7.30141E-16  8.76521E-16  8.84999E-16  7.98303E-16
 18.900  2.78641E-16  5.96225E-16  7.21924E-16  7.38664E-16  6.78452E-16  2.10638E-16  4.49230E-16  5.39800E-16  5.45780E-16  4.93190E-16
 19.000  1.70972E-16  3.65950E-16  4.43404E-16  4.54154E-16  4.17696E-16  1.28872E-16  2.74959E-16  3.30696E-16  3.34814E-16  3.03081E-16
 19.100  1.04353E-16  2.23424E-16  2.70894E-16  2.77746E-16  2.55792E-16  7.84391E-17  1.67422E-16  2.01539E-16  2.04321E-16  1.85274E-16
 19.200  6.33576E-17  1.35690E-16  1.64630E-16  1.68965E-16  1.55817E-16  4.74971E-17  1.01418E-16  1.22190E-16  1.24039E-16  1.12666E-16
 19.300  3.82662E-17  8.19768E-17  9.95258E-17  1.02249E-16  9.44187E-17  2.86135E-17  6.11194E-17  7.37007E-17  7.49111E-17  6.81570E-17
 19.400  2.29917E-17  4.92684E-17  5.98544E-17  6.15538E-17  5.69151E-17  1.71496E-17  3.66455E-17  4.42255E-17  4.50084E-17  4.10179E-17
 19.500  1.37428E-17  2.94574E-17  3.58098E-17  3.68631E-17  3.41300E-17  1.02265E-17  2.18599E-17  2.64029E-17  2.69035E-17  2.45582E-17
 19.600  8.17221E-18  1.75219E-17  2.13141E-17  2.19625E-17  2.03609E-17  6.06732E-18  1.29738E-17  1.56826E-17  1.59994E-17  1.46282E-17
 19.700  4.83480E-18  1.03690E-17  1.26212E-17  1.30179E-17  1.20843E-17  3.58157E-18  7.66112E-18  9.26792E-18  9.46642E-18  8.66889E-18
 19.800  2.84578E-18  6.10491E-18  7.43554E-18  7.67669E-18  7.13546E-18  2.10361E-18  4.50121E-18  5.44945E-18  5.57273E-18  5.11127E-18
 19.900  1.66655E-18  3.57614E-18  4.35830E-18  4.50399E-18  4.19187E-18  1.22937E-18  2.63141E-18  3.18816E-18  3.26407E-18  2.99844E-18
  67 165 200   0.100
  0.000  5.80949E-02 -2.87043E-16 -4.89192E-16 -5.25389E-16 -5.29281E-16  9.91540E-02 -5.12023E-16 -7.07767E-16 -1.42606E-15  6.86635E-16
  0.100  5.81386E-02 -5.21085E-05 -3.82644E-08 -8.73529E-12 -2.74654E-15  9.90868E-02  7.05447E-05  3.16985E-08 -5.18073E-12 -3.86232E-15
  0.200  5.82681E-02 -2.05481E-04 -6.05409E-07 -5.51597E-10 -5.95856E-13  9.88883E-02  2.77474E-04  5.00310E-07 -3.30780E-10 -6.18758E-13
  0.300  5.84793E-02 -4.51421E-04 -3.00813E-06 -6.14499E-09 -1.49610E-11  9.85665E-02  6.06987E-04  2.47583E-06 -3.75316E-09 -1.56919E-11
  0.400  5.87652E-02 -7.75968E-04 -9.26133E-06 -3.34680E-08 -1.45108E-10  9.81346E-02  1.03710E-03  7.57879E-06 -2.09666E-08 -1.55016E-10
  0.500  5.91167E-02 -1.16067E-03 -2.18605E-05 -1.22652E-07 -8.32816E-10  9.76102E-02  1.53911E-03  1.77554E-05 -7.93504E-08 -9.10810E-10
  0.600  5.95228E-02 -1.58358E-03 -4.34946E-05 -3.48683E-07 -3.41908E-09  9.70142E-02  2.07947E-03  3.49988E-05 -2.34482E-07 -3.84725E-09
  0.700  5.99710E-02 -2.02047E-03 -7.67278E-05 -8.29538E-07 -1.11099E-08  9.63698E-02  2.62199E-03  6.10486E-05 -5.83451E-07 -1.29251E-08
  0.800  6.04483E-02 -2.44612E-03 -1.23680E-04 -1.72796E-06 -3.03512E-08  9.57014E-02  3.13019E-03  9.71005E-05 -1.27859E-06 -3.66815E-08
  0.900  6.09413E-02 -2.83566E-03 -1.85735E-04 -3.24471E-06 -7.24793E-08  9.50336E-02  3.56962E-03  1.43560E-04 -2.53978E-06 -9.14183E-08
  1.000  6.14369E-02 -3.16589E-03 -2.63312E-04 -5.60243E-06 -1.55367E-07  9.43895E-02  3.91002E-03  1.99869E-04 -4.66314E-06 -2.05433E-07
  1.100  6.19229E-02 -3.41645E-03 -3.55704E-04 -9.02104E-06 -3.04669E-07  9.37903E-02  4.12723E-03  2.64418E-04 -8.02381E-06 -4.24151E-07
  1.200  6.23882E-02 -3.57087E-03 -4.61020E-04 -1.36870E-05 -5.54230E-07  9.32537E-02  4.20461E-03  3.34567E-04 -1.30705E-05 -8.15806E-07
  1.300  6.28232E-02 -3.61732E-03 -5.76215E-04 -1.97202E-05 -9.45234E-07  9.27939E-02  4.13400E-03  4.06768E-04 -2.03101E-05 -1.47711E-06
  1.400  6.32202E-02 -3.54921E-03 -6.97224E-04 -2.71429E-05 -1.52386E-06  9.24203E-02  3.91614E-03  4.76776E-04 -3.02821E-05 -2.53811E-06
  1.500  6.35733E-02 -3.36535E-03 -8.19167E-04 -3.58551E-05 -2.33742E-06  9.21381E-02  3.56049E-03  5.39946E-04 -4.35212E-05 -4.16536E-06
  1.600  6.38784E-02 -3.07001E-03 -9.36623E-04 -4.56208E-05 -3.42920E-06  9.19473E-02  3.08456E-03  5.91575E-04 -6.05126E-05 -6.56237E-06
  1.700  6.41333E-02 -2.67254E-03 -1.04395E-03 -5.60666E-05 -4.83267E-06  9.18439E-02  2.51274E-03  6.27280E-04 -8.16393E-05 -9.96650E-06
  1.800  6.43377E-02 -2.18689E-03 -1.13563E-03 -6.66950E-05 -6.56573E-06  9.18194E-02  1.87477E-03  6.43360E-04 -1.07128E-04 -1.46414E-05
  1.900  6.44927E-02 -1.63080E-03 -1.20655E-03 -7.69101E-05 -8.62615E-06  9.18621E-02  1.20383E-03  6.37140E-04 -1.36998E-04 -2.08650E-05
  2.000  6.46010E-02 -1.02491E-03 -1.25236E-03 -8.60542E-05 -1.09890E-05  9.19576E-02  5.34612E-04  6.07245E-04 -1.71012E-04 -2.89121E-05
  2.100  6.46663E-02 -3.91775E-04 -1.26967E-03 -9.34497E-05 -1.36070E-05  9.20895E-02 -9.88159E-05  5.53802E-04 -2.08645E-04 -3.90340E-05
  2.200  6.46934E-02  2.45232E-04 -1.25629E-03 -9.84423E-05 -1.64143E-05  9.22406E-02 -6.64940E-04  4.78538E-04 -2.49065E-04 -5.14332E-05
  2.300  6.46879E-02  8.62969E-04 -1.21130E-03 -1.00440E-04 -1.93338E-05  9.23938E-02 -1.13661E-03  3.84777E-04 -2.91126E-04 -6.62379E-05
  2.400  6.46558E-02  1.43954E-03 -1.13516E-03 -9.89431E-05 -2.22874E-05  9.25330E-02 -1.49253E-03  2.77315E-04 -3.33391E-04 -8.34756E-05
  2.500  6.46036E-02  1.95524E-03 -1.02966E-03 -9.35635E-05 -2.52082E-05  9.26437E-02 -1.71835E-03  1.62186E-04 -3.74166E-04 -1.03049E-04
  2.600  6.45379E-02  2.39332E-03 -8.97887E-04 -8.40292E-05 -2.80534E-05  9.27139E-02 -1.80737E-03  4.63278E-05 -4.11548E-04 -1.24716E-04
  2.700  6.44651E-02  2.74072E-03 -7.44118E-04 -7.01777E-05 -3.08160E-05  9.27348E-02 -1.76068E-03 -6.28507E-05 -4.43502E-04 -1.48075E-04
  2.800  6.43912E-02  2.98850E-03 -5.73656E-04 -5.19401E-05 -3.35328E-05  9.27004E-02 -1.58687E-03 -1.57961E-04 -4.67934E-04 -1.72560E-04
  2.900  6.43217E-02  3.13226E-03 -3.92663E-04 -2.93195E-05 -3.62879E-05  9.26082E-02 -1.30127E-03 -2.32173E-04 -4.82787E-04 -1.97443E-04
  3.000  6.42610E-02  3.17224E-03 -2.07962E-04 -2.37135E-06 -3.92093E-05  9.24588E-02 -9.24712E-04 -2.79756E-04 -4.86137E-04 -2.21842E-04
  3.100  6.42124E-02  3.11338E-03 -2.68228E-05  2.88103E-05 -4.24591E-05  9.22551E-02 -4.81998E-04 -2.96592E-04 -4.76298E-04 -2.44746E-04
  3.200  6.41777E-02  2.96512E-03  1.43276E-04  6.40940E-05 -4.62158E-05  9.20022E-02 -6.35547E-08 -2.80612E-04 -4.51922E-04 -2.65047E-04
  3.300  6.41565E-02  2.74111E-03  2.94884E-04  1.03296E-04 -5.06516E-05  9.17063E-02  4.93969E-04 -2.32126E-04 -4.12112E-04 -2.81574E-04
  3.400  6.41468E-02  2.45874E-03  4.20846E-04  1.46151E-04 -5.59057E-05  9.13736E-02  9.74764E-04 -1.54003E-04 -3.56514E-04 -2.93141E-04
  3.500  6.41438E-02  2.13856E-03  5.14565E-04  1.92262E-04 -6.20568E-05  9.10096E-02  1.42063E-03 -5.16701E-05 -2.85417E-04 -2.98601E-04
  3.600  6.41404E-02  1.80353E-03  5.70293E-04  2.41046E-04 -6.90990E-05  9.06182E-02  1.81511E-03  6.70828E-05 -1.99827E-04 -2.96903E-04
  3.700  6.41271E-02  1.47826E-03  5.83406E-04  2.91674E-04 -7.69236E-05  9.02007E-02  2.14826E-03  1.92500E-04 -1.01529E-04 -2.87145E-04
  3.800  6.40919E-02  1.18804E-03  5.50691E-04  3.43016E-04 -8.53110E-05  8.97551E-02  2.41743E-03  3.13452E-04  6.88396E-06 -2.68640E-04
  3.900  6.40205E-02  9.57900E-04  4.70602E-04  3.93606E-04 -9.39348E-05  8.92758E-02  2.62751E-03  4.18180E-04  1.22024E-04 -2.40966E-04
  4.000  6.38968E-02  8.11633E-04  3.43477E-04  4.41630E-04 -1.02380E-04  8.87537E-02  2.79071E-03  4.95172E-04  2.39762E-04 -2.04020E-04
  4.100  6.37033E-02  7.70770E-04  1.71711E-04  4.84958E-04 -1.10173E-04  8.81760E-02  2.92572E-03  5.34075E-04  3.55340E-04 -1.58057E-04
  4.200  6.34218E-02  8.53638E-04 -4.01681E-05  5.21209E-04 -1.16824E-04  8.75265E-02  3.05643E-03  5.26604E-04  4.63536E-04 -1.03723E-04
  4.300  6.30339E-02  1.07449E-03 -2.85502E-04  5.47865E-04 -1.21878E-04  8.67869E-02  3.21021E-03  4.67355E-04  5.58895E-04 -4.20650E-05
  4.400  6.25219E-02  1.44278E-03 -5.55630E-04  5.62421E-04 -1.24964E-04  8.59374E-02  3.41595E-03  3.54448E-04  6.36001E-04  2.54715E-05
  4.500  6.18696E-02  1.96255E-03 -8.40132E-04  5.62565E-04 -1.25846E-04  8.49575E-02  3.70190E-03  1.89940E-04  6.89788E-04  9.70732E-05
  4.600  6.10627E-02  2.63210E-03 -1.12720E-03  5.46376E-04 -1.24459E-04  8.38275E-02  4.09353E-03 -2.00457E-05  7.15871E-04  1.70609E-04
  4.700  6.00901E-02  3.44382E-03 -1.40410E-03  5.12518E-04 -1.20937E-04  8.25296E-02  4.61158E-03 -2.65490E-04  7.10876E-04  2.43705E-04
  4.800  5.89437E-02  4.38433E-03 -1.65777E-03  4.60418E-04 -1.15614E-04  8.10487E-02  5.27032E-03 -5.32969E-04  6.72724E-04  3.13843E-04
  4.900  5.76195E-02  5.43483E-03 -1.87546E-03  3.90402E-04 -1.09014E-04  7.93735E-02  6.07628E-03 -8.06419E-04  6.00874E-04  3.78476E-04
  5.000  5.61173E-02  6.57173E-03 -2.04534E-03  3.03774E-04 -1.01811E-04  7.74972E-02  7.02747E-03 -1.06814E-03  4.96465E-04  4.35156E-04
  5.100  5.44412E-02  7.76747E-03 -2.15724E-03  2.02828E-04 -9.47774E-05  7.54177E-02  8.11309E-03 -1.29995E-03  3.62363E-04  4.81666E-04
  5.200  5.25993E-02  8.99159E-03 -2.20317E-03  9.07859E-05 -8.87175E-05  7.31382E-02  9.31392E-03 -1.48442E-03  2.03092E-04  5.16151E-04
  5.300  5.06036E-02  1.02119E-02 -2.17784E-03 -2.83427E-05 -8.43934E-05  7.06666E-02  1.06031E-02 -1.60607E-03  2.46394E-05  5.37232E-04
  5.400  4.84695E-02  1.13957E-02 -2.07901E-03 -1.49967E-04 -8.24533E-05  6.80159E-02  1.19474E-02 -1.65246E-03 -1.65838E-04  5.44095E-04
  5.500  4.62152E-02  1.25110E-02 -1.90768E-03 -2.69173E-04 -8.33676E-05  6.52029E-02  1.33092E-02 -1.61506E-03 -3.60408E-04  5.36550E-04
  5.600  4.38612E-02  1.35280E-02 -1.66806E-03 -3.81020E-04 -8.73794E-05  6.22484E-02  1.46478E-02 -1.48984E-03 -5.50816E-04  5.15056E-04
  5.700  4.14297E-02  1.44200E-02 -1.36741E-03 -4.80839E-04 -9.44767E-05  5.91759E-02  1.59223E-02 -1.27759E-03 -7.28974E-04  4.80697E-04
  5.800  3.89440E-02  1.51644E-02 -1.01568E-03 -5.64527E-04 -1.04386E-04  5.60110E-02  1.70928E-02 -9.83842E-04 -8.87431E-04  4.35128E-04
  5.900  3.64277E-02  1.57435E-02 -6.24965E-04 -6.28794E-04 -1.16593E-04  5.27807E-02  1.81231E-02 -6.18494E-04 -1.01981E-03  3.80475E-04
  6.000  3.39039E-02  1.61451E-02 -2.08887E-04 -6.71362E-04 -1.30379E-04  4.95125E-02  1.89817E-02 -1.95181E-04 -1.12116E-03  3.19209E-04
  6.100  3.13953E-02  1.63625E-02  2.18116E-04 -6.91077E-04 -1.44882E-04  4.62339E-02  1.96436E-02  2.69625E-04 -1.18823E-03  2.54003E-04
  6.200  2.89230E-02  1.63951E-02  6.41532E-04 -6.87960E-04 -1.59164E-04  4.29713E-02  2.00910E-02  7.57650E-04 -1.21955E-03  1.87573E-04
  6.300  2.65065E-02  1.62474E-02  1.04749E-03 -6.63158E-04 -1.72286E-04  3.97503E-02  2.03139E-02  1.24992E-03 -1.21549E-03  1.22528E-04
  6.400  2.41635E-02  1.59293E-02  1.42340E-03 -6.18835E-04 -1.83380E-04  3.65942E-02  2.03103E-02  1.72786E-03 -1.17814E-03  6.12273E-05
  6.500  2.19093E-02  1.54548E-02  1.75853E-03 -5.57989E-04 -1.91713E-04  3.35248E-02  2.00855E-02  2.17430E-03 -1.11105E-03  5.67053E-06
  6.600  1.97570E-02  1.48418E-02  2.04437E-03 -4.84229E-04 -1.96735E-04  3.05611E-02  1.96520E-02  2.57431E-03 -1.01897E-03 -4.25916E-05
  6.700  1.77174E-02  1.41108E-02  2.27494E-03 -4.01528E-04 -1.98110E-04  2.77199E-02  1.90281E-02  2.91588E-03 -9.07454E-04 -8.25050E-05
  6.800  1.57986E-02  1.32841E-02  2.44685E-03 -3.13964E-04 -1.95731E-04  2.50150E-02  1.82368E-02  3.19032E-03 -7.82516E-04 -1.13525E-04
  6.900  1.40068E-02  1.23849E-02  2.55927E-03 -2.25479E-04 -1.89713E-04  2.24579E-02  1.73048E-02  3.39244E-03 -6.50218E-04 -1.35598E-04
  7.000  1.23456E-02  1.14363E-02  2.61379E-03 -1.39672E-04 -1.80367E-04  2.00571E-02  1.62607E-02  3.52053E-03 -5.16340E-04 -1.49105E-04
  7.100  1.08167E-02  1.04608E-02  2.61401E-03 -5.96274E-05 -1.68172E-04  1.78186E-02  1.51343E-02  3.57610E-03 -3.86082E-04 -1.54795E-04
  7.200  9.41971E-03  9.47909E-03  2.56530E-03  1.22017E-05 -1.53719E-04  1.57458E-02  1.39546E-02  3.56347E-03 -2.63851E-04 -1.53691E-04
  7.300  8.15264E-03  8.51008E-03  2.47424E-03  7.40535E-05 -1.37672E-04  1.38396E-02  1.27496E-02  3.48926E-03 -1.53109E-04 -1.46995E-04
  7.400  7.01185E-03  7.57006E-03  2.34827E-03  1.24871E-04 -1.20713E-04  1.20989E-02  1.15447E-02  3.36180E-03 -5.63095E-05 -1.35996E-04
  7.500  5.99239E-03  6.67259E-03  2.19519E-03  1.64265E-04 -1.03501E-04  1.05203E-02  1.03625E-02  3.19050E-03  2.50937E-05 -1.21980E-04
  7.600  5.08820E-03  5.82842E-03  2.02277E-03  1.92443E-04 -8.66308E-05  9.09861E-03  9.22208E-03  2.98528E-03  9.05799E-05 -1.06158E-04
  7.700  4.29234E-03  5.04544E-03  1.83844E-03  2.10105E-04 -7.06106E-05  7.82724E-03  8.13898E-03  2.75601E-03  1.40444E-04 -8.96094E-05
  7.800  3.59722E-03  4.32885E-03  1.64894E-03  2.18333E-04 -5.58392E-05  6.69819E-03  7.12504E-03  2.51208E-03  1.75645E-04 -7.32407E-05
  7.900  2.99480E-03  3.68133E-03  1.46018E-03  2.18465E-04 -4.26013E-05  5.70251E-03  6.18849E-03  2.26202E-03  1.97645E-04 -5.77670E-05
  8.000  2.47681E-03  3.10341E-03  1.27710E-03  2.11979E-04 -3.10678E-05  4.83049E-03  5.33429E-03  2.01326E-03  2.08236E-04 -4.37066E-05
  8.100  2.03494E-03  2.59371E-03  1.10358E-03  2.00387E-04 -2.13051E-05  4.07200E-03  4.56446E-03  1.77197E-03  2.09380E-04 -3.13904E-05
  8.200  1.66101E-03  2.14935E-03  9.42500E-04  1.85145E-04 -1.32893E-05  3.41670E-03  3.87846E-03  1.54300E-03  2.03078E-04 -2.09823E-05
  8.300  1.34709E-03  1.76631E-03  7.95763E-04  1.67589E-04 -6.92410E-06  2.85428E-03  3.27370E-03  1.32992E-03  1.91245E-04 -1.25057E-05
  8.400  1.08566E-03  1.43974E-03  6.64406E-04  1.48881E-04 -2.05976E-06  2.37469E-03  2.74598E-03  1.13510E-03  1.75633E-04 -5.87432E-06
  8.500  8.69678E-04  1.16429E-03  5.48722E-04  1.29987E-04  1.48773E-06  1.96825E-03  2.28994E-03  9.59797E-04  1.57768E-04 -9.23129E-07
  8.600  6.92643E-04  9.34374E-04  4.48403E-04  1.11665E-04  3.91949E-06  1.62587E-03  1.89944E-03  8.04398E-04  1.38923E-04  2.56236E-06
  8.700  5.48662E-04  7.44413E-04  3.62676E-04  9.44716E-05  5.43904E-06  1.33907E-03  1.56796E-03  6.68532E-04  1.20105E-04  4.82054E-06
  8.800  4.32453E-04  5.89012E-04  2.90437E-04  7.87778E-05  6.24071E-06  1.10010E-03  1.28886E-03  5.51264E-04  1.02069E-04  6.09283E-06
  8.900  3.39351E-04  4.63097E-04  2.30374E-04  6.47949E-05  6.50129E-06  9.01947E-04  1.05563E-03  4.51264E-04  8.53368E-05  6.60788E-06
  9.000  2.65289E-04  3.62010E-04  1.81074E-04  5.26020E-05  6.37479E-06  7.38367E-04  8.62096E-04  3.66947E-04  7.02327E-05  6.57086E-06
  9.100  2.06765E-04  2.81566E-04  1.41102E-04  4.21754E-05  5.98994E-06  6.03853E-04  7.02509E-04  2.96602E-04  5.69162E-05  6.15724E-06
  9.200  1.60807E-04  2.18080E-04  1.09073E-04  3.34173E-05  5.44996E-06  4.93610E-04  5.71658E-04  2.38489E-04  4.54188E-05  5.51040E-06
  9.300  1.24918E-04  1.68364E-04  8.36947E-05  2.61808E-05  4.83398E-06  4.03505E-04  4.64892E-04  1.90919E-04  3.56785E-05  4.74217E-06
  9.400  9.70293E-05  1.29707E-04  6.37976E-05  2.02920E-05  4.19961E-06  3.30016E-04  3.78135E-04  1.52307E-04  2.75702E-05  3.93547E-06
  9.500  7.54459E-05  9.98386E-05  4.83527E-05  1.55668E-05  3.58621E-06  2.70166E-04  3.07866E-04  1.21207E-04  2.09304E-05  3.14815E-06
  9.600  5.87938E-05  7.68853E-05  3.64740E-05  1.18239E-05  3.01829E-06  2.21464E-04  2.51083E-04  9.63300E-05  1.55781E-05  2.41747E-06
  9.700  4.59724E-05  5.93238E-05  2.74151E-05  8.89373E-06  2.50894E-06  1.81840E-04  2.05262E-04  7.65536E-05  1.13297E-05  1.76462E-06
  9.800  3.61084E-05  4.59313E-05  2.05592E-05  6.62397E-06  2.06291E-06  1.49586E-04  1.68303E-04  6.09146E-05  8.00946E-06  1.19887E-06
  9.900  2.85161E-05  3.57377E-05  1.54051E-05  4.88218E-06  1.67923E-06  1.23305E-04  1.38473E-04  4.86008E-05  5.45607E-06  7.21215E-07
 10.000  2.26614E-05  2.79828E-05  1.15522E-05  3.55639E-06  1.35338E-06  1.01856E-04  1.14360E-04  3.89366E-05  3.52641E-06  3.27323E-07
 10.100  1.81320E-05  2.20766E-05  8.68504E-06  2.55422E-06  1.07900E-06  8.43163E-05  9.48198E-05  3.13676E-05  2.09666E-06  9.81028E-09
 10.200  1.46119E-05  1.75659E-05  6.55845E-06  1.80109E-06  8.49024E-07  6.99386E-05  7.89305E-05  2.54433E-05  1.06206E-06 -2.40102E-07
 10.300  1.18600E-05  1.41052E-05  4.98414E-06  1.23788E-06  6.56563E-07  5.81212E-05  6.59561E-05  2.08021E-05  3.35462E-07 -4.31480E-07
 10.400  9.69350E-06  1.14330E-05  3.81907E-06  8.18530E-07  4.95376E-07  4.83801E-05  5.53106E-05  1.71559E-05 -1.54499E-07 -5.72992E-07
 10.500  7.97438E-06  9.35294E-06  2.95557E-06  5.07628E-07  3.60117E-07  4.03266E-05  4.65296E-05  1.42776E-05 -4.65544E-07 -6.72547E-07
 10.600  6.59845E-06  7.71796E-06  2.31328E-06  2.78284E-07  2.46416E-07  3.36485E-05  3.92461E-05  1.19895E-05 -6.43833E-07 -7.37150E-07
 10.700  5.48727E-06  6.41857E-06  1.83265E-06  1.10261E-07  1.50819E-07  2.80950E-05  3.31705E-05  1.01537E-05 -7.25886E-07 -7.72898E-07
 10.800  4.58178E-06  5.37344E-06  1.46984E-06 -1.15739E-08  7.06748E-08  2.34642E-05  2.80747E-05  8.66417E-06 -7.40296E-07 -7.85059E-07
 10.900  3.83740E-06  4.52237E-06  1.19277E-06 -9.84944E-08  3.97680E-09  1.95936E-05  2.37789E-05  7.44000E-06 -7.09182E-07 -7.78173E-07
 11.000  3.22045E-06  3.82081E-06  9.78127E-07 -1.58897E-07 -5.07970E-08  1.63517E-05  2.01410E-05  6.42000E-06 -6.49419E-07 -7.56164E-07
 11.100  2.70538E-06  3.23587E-06  8.09104E-07 -1.99051E-07 -9.48337E-08  1.36321E-05  1.70486E-05  5.55837E-06 -5.73647E-07 -7.22437E-07
 11.200  2.27270E-06  2.74321E-06  6.73651E-07 -2.23669E-07 -1.29113E-07  1.13480E-05  1.44122E-05  4.82106E-06 -4.91112E-07 -6.79952E-07
 11.300  1.90745E-06  2.32483E-06  5.63216E-07 -2.36324E-07 -1.54505E-07  9.42856E-06  1.21602E-05  4.18304E-06 -4.08356E-07 -6.31286E-07
 11.400  1.59804E-06  1.96731E-06  4.71779E-07 -2.39764E-07 -1.71846E-07  7.81561E-06  1.02345E-05  3.62596E-06 -3.29794E-07 -5.78670E-07
 11.500  1.33540E-06  1.66055E-06  3.95126E-07 -2.36138E-07 -1.81974E-07  6.46100E-06  8.58791E-06  3.13642E-06 -2.58186E-07 -5.24020E-07
 11.600  1.11233E-06  1.39685E-06  3.30316E-07 -2.27152E-07 -1.85760E-07  5.32471E-06  7.18125E-06  2.70460E-06 -1.95032E-07 -4.68956E-07
 11.700  9.23006E-07  1.17020E-06  2.75284E-07 -2.14192E-07 -1.84102E-07  4.37327E-06  5.98174E-06  2.32318E-06 -1.40909E-07 -4.14822E-07
 11.800  7.62649E-07  9.75787E-07  2.28540E-07 -1.98400E-07 -1.77918E-07  3.57847E-06  4.96158E-06  1.98655E-06 -9.57274E-08 -3.62698E-07
 11.900  6.27254E-07  8.09607E-07  1.88971E-07 -1.80733E-07 -1.68125E-07  2.91644E-06  4.09685E-06  1.69022E-06 -5.89601E-08 -3.13422E-07
 12.000  5.13405E-07  6.68248E-07  1.55689E-07 -1.61996E-07 -1.55615E-07  2.36686E-06  3.36679E-06  1.43044E-06 -2.98075E-08 -2.67607E-07
 12.100  4.18145E-07  5.48703E-07  1.27940E-07 -1.42870E-07 -1.41232E-07  1.91238E-06  2.75323E-06  1.20387E-06 -7.33187E-09 -2.25664E-07
 12.200  3.38883E-07  4.48275E-07  1.05046E-07 -1.23921E-07 -1.25748E-07  1.53812E-06  2.24012E-06  1.00746E-06  9.44590E-09 -1.87826E-07
 12.300  2.73332E-07  3.64504E-07  8.63723E-08 -1.05617E-07 -1.09845E-07  1.23132E-06  1.81330E-06  8.38326E-07  2.14786E-08 -1.54171E-07
 12.400  2.19466E-07  2.95145E-07  7.13187E-08 -8.83297E-08 -9.41034E-08  9.81044E-07  1.46026E-06  6.93683E-07  2.96487E-08 -1.24654E-07
 12.500  1.75492E-07  2.38143E-07  5.93170E-08 -7.23388E-08 -7.89951E-08  7.77907E-07  1.16992E-06  5.70870E-07  3.47436E-08 -9.91224E-08
 12.600  1.39828E-07  1.91635E-07  4.98372E-08 -5.78414E-08 -6.48823E-08  6.13892E-07  9.32572E-07  4.67340E-07  3.74446E-08 -7.73491E-08
 12.700  1.11086E-07  1.53947E-07  4.23956E-08 -4.49561E-08 -5.20217E-08  4.82174E-07  7.39697E-07  3.80683E-07  3.83268E-08 -5.90487E-08
 12.800  8.80636E-08  1.23593E-07  3.65620E-08 -3.37314E-08 -4.05734E-08  3.76964E-07  5.83899E-07  3.08648E-07  3.78647E-08 -4.38998E-08
 12.900  6.97221E-08  9.92721E-08  3.19644E-08 -2.41554E-08 -3.06119E-08  2.93384E-07  4.58794E-07  2.49164E-07  3.64426E-08 -3.15616E-08
 13.000  5.51797E-08  7.98638E-08  2.82913E-08 -1.61655E-08 -2.21402E-08  2.27345E-07  3.58917E-07  2.00350E-07  3.43662E-08 -2.16885E-08
 13.100  4.36937E-08  6.44152E-08  2.52908E-08 -9.65937E-09 -1.51038E-08  1.75441E-07  2.79628E-07  1.60525E-07  3.18748E-08 -1.39422E-08
 13.200  3.46469E-08  5.21300E-08  2.27663E-08 -4.50571E-09 -9.40529E-09  1.34858E-07  2.17022E-07  1.28209E-07  2.91528E-08 -8.00019E-09
 13.300  2.75321E-08  4.23521E-08  2.05713E-08 -5.54554E-10 -4.91765E-09  1.03283E-07  1.67841E-07  1.02111E-07  2.63398E-08 -3.56334E-09
 13.400  2.19379E-08  3.45493E-08  1.86021E-08  2.35346E-09 -1.49656E-09  7.88351E-08  1.29393E-07  8.11251E-08  2.35397E-08 -3.59661E-10
 13.500  1.75341E-08  2.82956E-08  1.67896E-08  4.37898E-09  1.00946E-09  5.99892E-08  9.94674E-08  6.43138E-08  2.08277E-08  1.85279E-09
 13.600  1.40587E-08  2.32548E-08  1.50923E-08  5.67734E-09  2.75068E-09  4.55226E-08  7.62707E-08  5.08894E-08  1.82566E-08  3.28512E-09
 13.700  1.13059E-08  1.91647E-08  1.34887E-08  6.39350E-09  3.86982E-09  3.44601E-08  5.83551E-08  4.01983E-08  1.58614E-08  4.11794E-09
 13.800  9.11547E-09  1.58224E-08  1.19710E-08  6.65851E-09  4.49761E-09  2.60300E-08  4.45628E-08  3.17027E-08  1.36634E-08  4.50282E-09
 13.900  7.36375E-09  1.30728E-08  1.05399E-08  6.58737E-09  4.74997E-09  1.96258E-08  3.39743E-08  2.49641E-08  1.16728E-08  4.56443E-09
 14.000  5.95556E-09  1.07970E-08  9.20074E-09  6.27813E-09  4.72669E-09  1.47736E-08  2.58646E-08  1.96269E-08  9.89181E-09  4.40315E-09
 14.100  4.81801E-09  8.90453E-09  7.95994E-09  5.81198E-09  4.51118E-09  1.11057E-08  1.96656E-08  1.54051E-08  8.31606E-09  4.09801E-09
 14.200  3.89526E-09  7.32565E-09  6.82334E-09  5.25409E-09  4.17119E-09  8.33839E-09  1.49347E-08  1.20693E-08  6.93663E-09  3.70961E-09
 14.300  3.14437E-09  6.00638E-09  5.79476E-09  4.65503E-09  3.76001E-09  6.25382E-09  1.13289E-08  9.43655E-09  5.74124E-09  3.28305E-09
 14.400  2.53213E-09  4.90416E-09  4.87548E-09  4.05250E-09  3.31815E-09  4.68556E-09  8.58363E-09  7.36117E-09  4.71542E-09  2.85069E-09
 14.500  2.03261E-09  3.98482E-09  4.06406E-09  3.47322E-09  2.87514E-09  3.50693E-09  6.49533E-09  5.72741E-09  3.84345E-09  2.43465E-09
 14.600  1.62529E-09  3.22034E-09  3.35663E-09  2.93489E-09  2.45140E-09  2.62188E-09  4.90810E-09  4.44340E-09  3.10911E-09  2.04897E-09
 14.700  1.29377E-09  2.58731E-09  2.74725E-09  2.44795E-09  2.06002E-09  1.95779E-09  3.70272E-09  3.43624E-09  2.49625E-09  1.70162E-09
 14.800  1.02474E-09  2.06582E-09  2.22845E-09  2.01729E-09  1.70836E-09  1.45986E-09  2.78817E-09  2.64806E-09  1.98933E-09  1.39603E-09
 14.900  8.07253E-10  1.63875E-09  1.79178E-09  1.64368E-09  1.39952E-09  1.08680E-09  2.09503E-09  2.03290E-09  1.57367E-09  1.13242E-09
 15.000  6.32269E-10  1.29129E-09  1.42827E-09  1.32503E-09  1.13351E-09  8.07561E-10  1.57040E-09  1.55427E-09  1.23577E-09  9.08893E-10
 15.100  4.92233E-10  1.01055E-09  1.12888E-09  1.05736E-09  9.08259E-10  5.98780E-10  1.17394E-09  1.18317E-09  9.63400E-10  7.22210E-10
 15.200  3.80823E-10  7.85372E-10  8.84840E-10  8.35626E-10  7.20411E-10  4.42892E-10  8.74915E-10  8.96536E-10  7.45670E-10  5.68424E-10
 15.300  2.92745E-10  6.06101E-10  6.87907E-10  6.54272E-10  5.65906E-10  3.26693E-10  6.49898E-10  6.76080E-10  5.73041E-10  4.43324E-10
 15.400  2.23574E-10  4.64468E-10  5.30528E-10  5.07707E-10  4.40435E-10  2.40249E-10  4.81016E-10  5.07286E-10  4.37274E-10  3.42739E-10
 15.500  1.69621E-10  3.53430E-10  4.05941E-10  3.90578E-10  3.39740E-10  1.76093E-10  3.54644E-10  3.78670E-10  3.31343E-10  2.62744E-10
 15.600  1.27834E-10  2.67052E-10  3.08216E-10  2.97960E-10  2.59822E-10  1.28606E-10  2.60399E-10  2.81163E-10  2.49337E-10  1.99778E-10
 15.700  9.56994E-11  2.00374E-10  2.32244E-10  2.25459E-10  1.97055E-10  9.35632E-11  1.90371E-10  2.07631E-10  1.86342E-10  1.50699E-10
 15.800  7.11644E-11  1.49300E-10  1.73694E-10  1.69251E-10  1.48249E-10  6.77915E-11  1.38545E-10  1.52482E-10  1.38318E-10  1.12801E-10
 15.900  5.25669E-11  1.10477E-10  1.28954E-10  1.26077E-10  1.10657E-10  4.89077E-11  1.00353E-10  1.11353E-10  1.01980E-10  8.37986E-11
 16.000  3.85715E-11  8.11900E-11  9.50473E-11  9.32079E-11  8.19666E-11  3.51258E-11  7.23349E-11  8.08555E-11  7.46889E-11  6.17956E-11
 16.100  2.81150E-11  5.92618E-11  6.95589E-11  6.84002E-11  6.02621E-11  2.51101E-11  5.18786E-11  5.83742E-11  5.43404E-11  4.52420E-11
 16.200  2.03584E-11  4.29652E-11  5.05498E-11  4.98325E-11  4.39816E-11  1.78641E-11  3.70169E-11  4.19004E-11  3.92777E-11  3.28891E-11
 16.300  1.46454E-11  3.09426E-11  3.64825E-11  3.60478E-11  3.18700E-11  1.26463E-11  2.62747E-11  2.99013E-11  2.82067E-11  2.37433E-11
 16.400  1.04673E-11  2.21372E-11  2.61511E-11  2.58947E-11  2.29317E-11  8.90736E-12  1.85510E-11  2.12142E-11  2.01265E-11  1.70241E-11
 16.500  7.43297E-12  1.57341E-11  1.86199E-11  1.84739E-11  1.63866E-11  6.24161E-12  1.30275E-11  1.49632E-11  1.42699E-11  1.21246E-11
 16.600  5.24456E-12  1.11108E-11  1.31699E-11  1.30910E-11  1.16303E-11  4.35083E-12  9.09893E-12  1.04926E-11  1.00539E-11  8.57813E-12
 16.700  3.67703E-12  7.79582E-12  9.25440E-12  9.21500E-12  8.19948E-12  3.01680E-12  6.32033E-12  7.31477E-12  7.03935E-12  6.02955E-12
 16.800  2.56183E-12  5.43521E-12  6.46107E-12  6.44421E-12  5.74279E-12  2.08064E-12  4.36611E-12  5.06972E-12  4.89827E-12  4.21096E-12
 16.900  1.77376E-12  3.76562E-12  4.48215E-12  4.47748E-12  3.99614E-12  1.42727E-12  2.99947E-12  3.49332E-12  3.38756E-12  2.92225E-12
 17.000  1.22054E-12  2.59269E-12  3.08978E-12  3.09119E-12  2.76297E-12  9.73775E-13  2.04919E-12  2.39315E-12  2.32857E-12  2.01524E-12
 17.100  8.34725E-13  1.77413E-12  2.11668E-12  2.12070E-12  1.89831E-12  6.60763E-13  1.39221E-12  1.63001E-12  1.59101E-12  1.38116E-12
 17.200  5.67409E-13  1.20660E-12  1.44113E-12  1.44586E-12  1.29613E-12  4.45922E-13  9.40606E-13  1.10384E-12  1.08058E-12  9.40795E-13
 17.300  3.83382E-13  8.15665E-13  9.75206E-13  9.79720E-13  8.79526E-13  2.99292E-13  6.31969E-13  7.43237E-13  7.29567E-13  6.36959E-13
 17.400  2.57497E-13  5.48092E-13  6.55938E-13  6.59830E-13  5.93199E-13  1.99781E-13  4.22250E-13  4.97586E-13  4.89686E-13  4.28667E-13
 17.500  1.71925E-13  3.66110E-13  4.38559E-13  4.41718E-13  3.97678E-13  1.32627E-13  2.80565E-13  3.31237E-13  3.26765E-13  2.86777E-13
 17.600  1.14118E-13  2.43114E-13  2.91486E-13  2.93947E-13  2.65014E-13  8.75660E-14  1.85394E-13  2.19256E-13  2.16788E-13  1.90727E-13
 17.700  7.53074E-14  1.60498E-13  1.92599E-13  1.94459E-13  1.75565E-13  5.74997E-14  1.21831E-13  1.44318E-13  1.43001E-13  1.26108E-13
 17.800  4.94096E-14  1.05344E-13  1.26521E-13  1.27893E-13  1.15629E-13  3.75515E-14  7.96218E-14  9.44620E-14  9.37920E-14  8.29016E-14
 17.900  3.22324E-14  6.87472E-14  8.26345E-14  8.36271E-14  7.57134E-14  2.43909E-14  5.17517E-14  6.14858E-14  6.11689E-14  5.41864E-14
 18.000  2.09076E-14  4.46090E-14  5.36629E-14  5.43692E-14  4.92927E-14  1.57570E-14  3.34538E-14  3.98003E-14  3.96691E-14  3.52166E-14
 18.100  1.34853E-14  2.87827E-14  3.46513E-14  3.51467E-14  3.19092E-14  1.01244E-14  2.15081E-14  2.56216E-14  2.55828E-14  2.27590E-14
 18.200  8.64931E-15  1.84672E-14  2.22494E-14  2.25924E-14  2.05396E-14  6.47038E-15  1.37533E-14  1.64038E-14  1.64072E-14  1.46260E-14
 18.300  5.51677E-15  1.17828E-14  1.42066E-14  1.44413E-14  1.31472E-14  4.11299E-15  8.74722E-15  1.04452E-14  1.04647E-14  9.34721E-15
 18.400  3.49935E-15  7.47641E-15  9.02090E-15  9.17982E-15  8.36866E-15  2.60055E-15  5.53350E-15  6.61509E-15  6.63806E-15  5.94076E-15
 18.500  2.20753E-15  4.71791E-15  5.69662E-15  5.80315E-15  5.29759E-15  1.63554E-15  3.48183E-15  4.16690E-15  4.18786E-15  3.75509E-15
 18.600  1.38502E-15  2.96097E-15  3.57774E-15  3.64849E-15  3.33518E-15  1.02318E-15  2.17924E-15  2.61073E-15  2.62781E-15  2.36067E-15
 18.700  8.64275E-16  1.84827E-15  2.23481E-15  2.28138E-15  2.08830E-15  6.36726E-16  1.35675E-15  1.62703E-15  1.64007E-15  1.47605E-15
 18.800  5.36427E-16  1.14750E-15  1.38844E-15  1.41884E-15  1.30052E-15  3.94158E-16  8.40247E-16  1.00861E-15  1.01815E-15  9.17973E-16
 18.900  3.31166E-16  7.08628E-16  8.57996E-16  8.77682E-16  8.05574E-16  2.42725E-16  5.17648E-16  6.21955E-16  6.28710E-16  5.67858E-16
 19.000  2.03363E-16  4.35282E-16  5.27386E-16  5.40036E-16  4.96334E-16  1.48695E-16  3.17243E-16  3.81518E-16  3.86186E-16  3.49417E-16
 19.100  1.24223E-16  2.65966E-16  3.22457E-16  3.30525E-16  3.04184E-16  9.06204E-17  1.93416E-16  2.32810E-16  2.35972E-16  2.13873E-16
 19.200  7.54831E-17  1.61658E-16  1.96122E-16  2.01231E-16  1.85442E-16  5.49429E-17  1.17313E-16  1.41329E-16  1.43435E-16  1.30223E-16
 19.300  4.56277E-17  9.77461E-17  1.18661E-16  1.21874E-16  1.12460E-16  3.31409E-17  7.07881E-17  8.53520E-17  8.67350E-17  7.88772E-17
 19.400  2.74378E-17  5.87952E-17  7.14218E-17  7.34279E-17  6.78461E-17  1.98881E-17  4.24960E-17  5.12816E-17  5.21780E-17  4.75292E-17
 19.500  1.64145E-17  3.51835E-17  4.27665E-17  4.40110E-17  4.07190E-17  1.18743E-17  2.53815E-17  3.06538E-17  3.12281E-17  2.84923E-17
 19.600  9.76945E-18  2.09460E-17  2.54765E-17  2.62435E-17  2.43124E-17  7.05376E-18  1.50827E-17  1.82302E-17  1.85943E-17  1.69927E-17
 19.700  5.78485E-18  1.24063E-17  1.50991E-17  1.55688E-17  1.44420E-17  4.16905E-18  8.91752E-18  1.07869E-17  1.10155E-17  1.00827E-17
 19.800  3.40803E-18  7.31086E-18  8.90327E-18  9.18906E-18  8.53514E-18  2.45170E-18  5.24590E-18  6.35044E-18  6.49269E-18  5.95226E-18
 19.900  1.99763E-18  4.28643E-18  5.22330E-18  5.39613E-18  5.01863E-18  1.43457E-18  3.07055E-18  3.71987E-18  3.80762E-18  3.49613E-18
  67 166 200   0.100
  0.000  5.78143E-02 -2.94801E-16 -4.89192E-16 -4.25315E-16 -9.15513E-16  9.90478E-02 -5.12023E-16 -8.11851E-16 -4.62843E-16 -4.19133E-15
  0.100  5.78571E-02 -5.16794E-05 -3.74761E-08 -8.20225E-12 -2.87528E-15  9.89816E-02  7.06493E-05  3.13866E-08 -4.94079E-12 -3.56192E-15
  0.200  5.79840E-02 -2.03803E-04 -5.92989E-07 -5.18051E-10 -5.13446E-13  9.87856E-02  2.77891E-04  4.95431E-07 -3.15492E-10 -6.72774E-13
  0.300  5.81910E-02 -4.47787E-04 -2.94686E-06 -5.77270E-09 -1.28804E-11  9.84678E-02  6.07918E-04  2.45203E-06 -3.57904E-09 -1.70393E-11
  0.400  5.84713E-02 -7.69851E-04 -9.07460E-06 -3.14514E-08 -1.24921E-10  9.80412E-02  1.03873E-03  7.50735E-06 -1.99893E-08 -1.68193E-10
  0.500  5.88159E-02 -1.15177E-03 -2.14256E-05 -1.15314E-07 -7.16969E-10  9.75228E-02  1.54159E-03  1.75920E-05 -7.56313E-08 -9.87359E-10
  0.600  5.92142E-02 -1.57189E-03 -4.26438E-05 -3.28006E-07 -2.94360E-09  9.69332E-02  2.08290E-03  3.46853E-05 -2.23429E-07 -4.16637E-09
  0.700  5.96540E-02 -2.00625E-03 -7.52577E-05 -7.80877E-07 -9.56559E-09  9.62952E-02  2.62639E-03  6.05172E-05 -5.55799E-07 -1.39813E-08
  0.800  6.01226E-02 -2.42993E-03 -1.21369E-04 -1.62790E-06 -2.61353E-08  9.56328E-02  3.13544E-03  9.62785E-05 -1.21770E-06 -3.96297E-08
  0.900  6.06070E-02 -2.81834E-03 -1.82367E-04 -3.05966E-06 -6.24217E-08  9.49703E-02  3.57546E-03  1.42374E-04 -2.41838E-06 -9.86360E-08
  1.000  6.10944E-02 -3.14849E-03 -2.58704E-04 -5.28852E-06 -1.33839E-07  9.43306E-02  3.91602E-03  1.98243E-04 -4.43974E-06 -2.21349E-07
  1.100  6.15727E-02 -3.40021E-03 -3.49737E-04 -8.52583E-06 -2.62539E-07  9.37349E-02  4.13278E-03  2.62272E-04 -7.63914E-06 -4.56372E-07
  1.200  6.20313E-02 -3.55713E-03 -4.53664E-04 -1.29532E-05 -4.77801E-07  9.32010E-02  4.20890E-03  3.31809E-04 -1.24446E-05 -8.76533E-07
  1.300  6.24608E-02 -3.60745E-03 -5.67557E-04 -1.86910E-05 -8.15366E-07  9.27432E-02  4.13608E-03  4.03278E-04 -1.93407E-05 -1.58479E-06
  1.400  6.28534E-02 -3.54452E-03 -6.87477E-04 -2.57693E-05 -1.31552E-06  9.23713E-02  3.91492E-03  4.72391E-04 -2.88443E-05 -2.71925E-06
  1.500  6.32034E-02 -3.36703E-03 -8.08677E-04 -3.41030E-05 -2.01989E-06  9.20907E-02  3.55483E-03  5.34447E-04 -4.14699E-05 -4.45624E-06
  1.600  6.35068E-02 -3.07905E-03 -9.25868E-04 -4.34779E-05 -2.96723E-06  9.19020E-02  3.07333E-03  5.84674E-04 -5.76868E-05 -7.01055E-06
  1.700  6.37615E-02 -2.68968E-03 -1.03352E-03 -5.35477E-05 -4.18862E-06  9.18014E-02  2.49487E-03  6.18619E-04 -7.78694E-05 -1.06317E-05
  1.800  6.39670E-02 -2.21256E-03 -1.12619E-03 -6.38441E-05 -5.70280E-06  9.17809E-02  1.84931E-03  6.32517E-04 -1.02244E-04 -1.55953E-05
  1.900  6.41244E-02 -1.66511E-03 -1.19882E-03 -7.37988E-05 -7.51251E-06  9.18293E-02  1.17003E-03  6.23652E-04 -1.30840E-04 -2.21898E-05
  2.000  6.42361E-02 -1.06766E-03 -1.24707E-03 -8.27753E-05 -9.60249E-06  9.19323E-02  4.91905E-04  5.90639E-04 -1.63440E-04 -3.06973E-05
  2.100  6.43060E-02 -4.42442E-04 -1.26752E-03 -9.01073E-05 -1.19400E-05  9.20738E-02 -1.50754E-04  5.33642E-04 -1.99548E-04 -4.13706E-05
  2.200  6.43386E-02  1.87446E-04 -1.25787E-03 -9.51374E-05 -1.44782E-05  9.22368E-02 -7.26239E-04  4.54477E-04 -2.38367E-04 -5.44057E-05
  2.300  6.43394E-02  7.99089E-04 -1.21711E-03 -9.72546E-05 -1.71620E-05  9.24041E-02 -1.20723E-03  3.56613E-04 -2.78793E-04 -6.99129E-05
  2.400  6.43143E-02  1.37076E-03 -1.14552E-03 -9.59229E-05 -1.99368E-05  9.25597E-02 -1.57234E-03  2.45040E-04 -3.19429E-04 -8.78879E-05
  2.500  6.42697E-02  1.88284E-03 -1.04473E-03 -9.07019E-05 -2.27584E-05  9.26890E-02 -1.80716E-03  1.26031E-04 -3.58617E-04 -1.08185E-04
  2.600  6.42120E-02  2.31862E-03 -9.17634E-04 -8.12549E-05 -2.56028E-05  9.27799E-02 -1.90504E-03  6.78437E-06 -3.94485E-04 -1.30495E-04
  2.700  6.41475E-02  2.66498E-03 -7.68301E-04 -6.73481E-05 -2.84748E-05  9.28232E-02 -1.86716E-03 -1.05027E-04 -4.25019E-04 -1.54330E-04
  2.800  6.40821E-02  2.91287E-03 -6.01847E-04 -4.88405E-05 -3.14139E-05  9.28130E-02 -1.70229E-03 -2.01770E-04 -4.48136E-04 -1.79017E-04
  2.900  6.40211E-02  3.05769E-03 -4.24260E-04 -2.56711E-05 -3.44946E-05  9.27463E-02 -1.42591E-03 -2.76416E-04 -4.61783E-04 -2.03700E-04
  3.000  6.39690E-02  3.09948E-03 -2.42212E-04  2.15344E-06 -3.78220E-05  9.26234E-02 -1.05907E-03 -3.23103E-04 -4.64030E-04 -2.27358E-04
  3.100  6.39289E-02  3.04290E-03 -6.28466E-05  3.45650E-05 -4.15211E-05  9.24470E-02 -6.26717E-04 -3.37662E-04 -4.53185E-04 -2.48831E-04
  3.200  6.39023E-02  2.89711E-03  1.06445E-04  7.14292E-05 -4.57196E-05  9.22219E-02 -1.55906E-04 -3.18068E-04 -4.27899E-04 -2.66856E-04
  3.300  6.38890E-02  2.67548E-03  2.58267E-04  1.12528E-04 -5.05275E-05  9.19539E-02  3.26207E-04 -2.64767E-04 -3.87280E-04 -2.80113E-04
  3.400  6.38867E-02  2.39512E-03  3.85481E-04  1.57526E-04 -5.60132E-05  9.16488E-02  7.94346E-04 -1.80851E-04 -3.30998E-04 -2.87289E-04
  3.500  6.38906E-02  2.07633E-03  4.81473E-04  2.05926E-04 -6.21804E-05  9.13120E-02  1.22698E-03 -7.20380E-05 -2.59385E-04 -2.87131E-04
  3.600  6.38936E-02  1.74188E-03  5.40438E-04  2.57020E-04 -6.89487E-05  9.09469E-02  1.60793E-03  5.35390E-05 -1.73517E-04 -2.78522E-04
  3.700  6.38862E-02  1.41620E-03  5.57667E-04  3.09828E-04 -7.61413E-05  9.05545E-02  1.92760E-03  1.85761E-04 -7.52726E-05 -2.60544E-04
  3.800  6.38564E-02  1.12452E-03  5.29825E-04  3.63060E-04 -8.34824E-05  9.01326E-02  2.18380E-03  3.13138E-04  3.26373E-05 -2.32548E-04
  3.900  6.37899E-02  8.91846E-04  4.55216E-04  4.15088E-04 -9.06058E-05  8.96755E-02  2.38194E-03  4.23584E-04  1.46685E-04 -1.94216E-04
  4.000  6.36708E-02  7.42025E-04  3.34003E-04  4.63943E-04 -9.70780E-05  8.91738E-02  2.53477E-03  5.05309E-04  2.62587E-04 -1.45614E-04
  4.100  6.34818E-02  6.96721E-04  1.68381E-04  5.07356E-04 -1.02432E-04  8.86145E-02  2.66154E-03  5.47756E-04  3.75428E-04 -8.72331E-05
  4.200  6.32048E-02  7.74468E-04 -3.73399E-05  5.42832E-04 -1.06209E-04  8.79817E-02  2.78671E-03  5.42512E-04  4.79832E-04 -2.00140E-05
  4.300  6.28217E-02  9.89797E-04 -2.76731E-04  5.67767E-04 -1.08012E-04  8.72571E-02  2.93815E-03  4.84127E-04  5.70205E-04  5.46463E-05
  4.400  6.23151E-02  1.35248E-03 -5.41367E-04  5.79604E-04 -1.07553E-04  8.64207E-02  3.14523E-03  3.70753E-04  6.41013E-04  1.34914E-04
  4.500  6.16690E-02  1.86694E-03 -8.21058E-04  5.76013E-04 -1.04700E-04  8.54525E-02  3.43660E-03  2.04545E-04  6.87108E-04  2.18562E-04
  4.600  6.08695E-02  2.53188E-03 -1.10421E-03  5.55087E-04 -9.95124E-05  8.43329E-02  3.83804E-03 -8.21732E-06  7.04063E-04  3.03037E-04
  4.700  5.99055E-02  3.34011E-03 -1.37828E-03  5.15535E-04 -9.22575E-05  8.30443E-02  4.37052E-03 -2.57324E-04  6.88501E-04  3.85557E-04
  4.800  5.87692E-02  4.27864E-03 -1.63036E-03  4.56855E-04 -8.34136E-05  8.15719E-02  5.04843E-03 -5.29134E-04  6.38391E-04  4.63225E-04
  4.900  5.74568E-02  5.32905E-03 -1.84779E-03  3.79461E-04 -7.36471E-05  7.99047E-02  5.87832E-03 -8.07357E-04  5.53280E-04  5.33165E-04
  5.000  5.59681E-02  6.46806E-03 -2.01881E-03  2.84765E-04 -6.37708E-05  7.80360E-02  6.85810E-03 -1.07406E-03  4.34444E-04  5.92665E-04
  5.100  5.43073E-02  7.66838E-03 -2.13320E-03  1.75183E-04 -5.46844E-05  7.59639E-02  7.97679E-03 -1.31086E-03  2.84924E-04  6.39325E-04
  5.200  5.24825E-02  8.89969E-03 -2.18290E-03  5.40663E-05 -4.73028E-05  7.36916E-02  9.21481E-03 -1.50012E-03  1.09456E-04  6.71193E-04
  5.300  5.05053E-02  1.01299E-02 -2.16246E-03 -7.44379E-05 -4.24775E-05  7.12272E-02  1.05449E-02 -1.62617E-03 -8.57276E-05  6.86884E-04
  5.400  4.83910E-02  1.13261E-02 -2.06945E-03 -2.05593E-04 -4.09205E-05  6.85834E-02  1.19332E-02 -1.67642E-03 -2.93199E-04  6.85673E-04
  5.500  4.61575E-02  1.24564E-02 -1.90458E-03 -3.34334E-04 -4.31373E-05  6.57770E-02  1.33414E-02 -1.64219E-03 -5.04735E-04  6.67549E-04
  5.600  4.38249E-02  1.34906E-02 -1.67177E-03 -4.55562E-04 -4.93759E-05  6.28286E-02  1.47282E-02 -1.51933E-03 -7.11775E-04  6.33229E-04
  5.700  4.14152E-02  1.44015E-02 -1.37798E-03 -5.64446E-04 -5.95968E-05  5.97612E-02  1.60515E-02 -1.30854E-03 -9.05914E-04  5.84130E-04
  5.800  3.89510E-02  1.51662E-02 -1.03282E-03 -6.56715E-04 -7.34684E-05  5.66004E-02  1.72708E-02 -1.01526E-03 -1.07939E-03  5.22290E-04
  5.900  3.64555E-02  1.57664E-02 -6.48107E-04 -7.28914E-04 -9.03866E-05  5.33727E-02  1.83486E-02 -6.49381E-04 -1.22551E-03  4.50264E-04
  6.000  3.39516E-02  1.61892E-02 -2.37191E-04 -7.78597E-04 -1.09518E-04  5.01052E-02  1.92526E-02 -2.24512E-04 -1.33904E-03  3.70971E-04
  6.100  3.14613E-02  1.64276E-02  1.85697E-04 -8.04460E-04 -1.29860E-04  4.68249E-02  1.99568E-02  2.42840E-04 -1.41644E-03  2.87539E-04
  6.200  2.90056E-02  1.64802E-02  6.06192E-04 -8.06380E-04 -1.50319E-04  4.35583E-02  2.04425E-02  7.34332E-04 -1.45605E-03  2.03130E-04
  6.300  2.66036E-02  1.63511E-02  1.01050E-03 -7.85389E-04 -1.69787E-04  4.03304E-02  2.06989E-02  1.23088E-03 -1.45803E-03  1.20768E-04
  6.400  2.42727E-02  1.60496E-02  1.38604E-03 -7.43557E-04 -1.87221E-04  3.71645E-02  2.07233E-02  1.71378E-03 -1.42434E-03  4.31925E-05
  6.500  2.20281E-02  1.55893E-02  1.72202E-03 -6.83826E-04 -2.01716E-04  3.40823E-02  2.05206E-02  2.16566E-03 -1.35847E-03 -2.72732E-05
  6.600  1.98829E-02  1.49879E-02  2.00981E-03 -6.09789E-04 -2.12557E-04  3.11027E-02  2.01028E-02  2.57142E-03 -1.26516E-03 -8.88128E-05
  6.700  1.78478E-02  1.42655E-02  2.24324E-03 -5.25440E-04 -2.19263E-04  2.82426E-02  1.94882E-02  2.91883E-03 -1.15003E-03 -1.40173E-04
  6.800  1.59311E-02  1.34444E-02  2.41874E-03 -4.34919E-04 -2.21600E-04  2.55162E-02  1.86999E-02  3.19897E-03 -1.01923E-03 -1.80680E-04
  6.900  1.41389E-02  1.25478E-02  2.53526E-03 -3.42272E-04 -2.19582E-04  2.29350E-02  1.77647E-02  3.40647E-03 -8.79000E-04 -2.10216E-04
  7.000  1.24753E-02  1.15990E-02  2.59413E-03 -2.51231E-04 -2.13454E-04  2.05081E-02  1.67118E-02  3.53943E-03 -7.35364E-04 -2.29168E-04
  7.100  1.09421E-02  1.06206E-02  2.59877E-03 -1.65044E-04 -2.03653E-04  1.82417E-02  1.55714E-02  3.59920E-03 -5.93804E-04 -2.38349E-04
  7.200  9.53920E-03  9.63372E-03  2.55432E-03 -8.63488E-05 -1.90765E-04  1.61398E-02  1.43733E-02  3.58999E-03 -4.59036E-04 -2.38898E-04
  7.300  8.26495E-03  8.65746E-03  2.46722E-03 -1.70998E-05 -1.75476E-04  1.42039E-02  1.31462E-02  3.51834E-03 -3.34845E-04 -2.32179E-04
  7.400  7.11601E-03  7.70852E-03  2.34477E-03  4.14491E-05 -1.58516E-04  1.24331E-02  1.19163E-02  3.39256E-03 -2.24014E-04 -2.19673E-04
  7.500  6.08774E-03  6.80089E-03  2.19469E-03  8.87184E-05 -1.40616E-04  1.08245E-02  1.07069E-02  3.22207E-03 -1.28310E-04 -2.02883E-04
  7.600  5.17439E-03  5.94570E-03  2.02471E-03  1.24738E-04 -1.22461E-04  9.37352E-03  9.53811E-03  3.01684E-03 -4.85462E-05 -1.83251E-04
  7.700  4.36926E-03  5.15121E-03  1.84223E-03  1.50052E-04 -1.04658E-04  8.07383E-03  8.42608E-03  2.78683E-03  1.53115E-05 -1.62085E-04
  7.800  3.66502E-03  4.42299E-03  1.65404E-03  1.65609E-04 -8.77125E-05  6.91777E-03  7.38332E-03  2.54152E-03  6.40010E-05 -1.40518E-04
  7.900  3.05381E-03  3.76402E-03  1.46608E-03  1.72640E-04 -7.20170E-05  5.89665E-03  6.41866E-03  2.28957E-03  9.88023E-05 -1.19477E-04
  8.000  2.52754E-03  3.17508E-03  1.28336E-03  1.72544E-04 -5.78459E-05  5.00097E-03  5.53755E-03  2.03854E-03  1.21370E-04 -9.96696E-05
  8.100  2.07801E-03  2.65501E-03  1.10984E-03  1.66781E-04 -4.53612E-05  4.22072E-03  4.74236E-03  1.79472E-03  1.33575E-04 -8.15954E-05
  8.200  1.69710E-03  2.20109E-03  9.48483E-04  1.56782E-04 -3.46237E-05  3.54564E-03  4.03285E-03  1.56310E-03  1.37359E-04 -6.55581E-05
  8.300  1.37696E-03  1.80939E-03  8.01263E-04  1.43875E-04 -2.56085E-05  2.96543E-03  3.40661E-03  1.34735E-03  1.34622E-04 -5.16937E-05
  8.400  1.11006E-03  1.47511E-03  6.69293E-04  1.29238E-04 -1.82236E-05  2.46999E-03  2.85952E-03  1.14991E-03  1.27123E-04 -4.00013E-05
  8.500  8.89339E-04  1.19291E-03  5.52932E-04  1.13864E-04 -1.23282E-05  2.04958E-03  2.38623E-03  9.72143E-04  1.16425E-04 -3.03755E-05
  8.600  7.08275E-04  9.57195E-04  4.51921E-04  9.85488E-05 -7.75076E-06  1.69498E-03  1.98056E-03  8.14469E-04  1.03852E-04 -2.26379E-05
  8.700  5.60919E-04  7.62330E-04  3.65527E-04  8.38952E-05 -4.30482E-06  1.39760E-03  1.63589E-03  6.76555E-04  9.04768E-05 -1.65663E-05
  8.800  4.41927E-04  6.02849E-04  2.92676E-04  7.03239E-05 -1.80221E-06  1.14952E-03  1.34543E-03  5.57487E-04  7.71275E-05 -1.19185E-05
  8.900  3.46566E-04  4.73597E-04  2.32074E-04  5.80964E-05 -6.32549E-08  9.43601E-04  1.10253E-03  4.55939E-04  6.44034E-05 -8.45168E-06
  9.000  2.70699E-04  3.69825E-04  1.82313E-04  4.73409E-05  1.07604E-06  7.73430E-04  9.00834E-04  3.70320E-04  5.27049E-05 -5.93675E-06
  9.100  2.10758E-04  2.87259E-04  1.41963E-04  3.80803E-05  1.75956E-06  6.33353E-04  7.34415E-04  2.98902E-04  4.22657E-05 -4.16734E-06
  9.200  1.63705E-04  2.22126E-04  1.09632E-04  3.02595E-05  2.10902E-06  5.18436E-04  5.97890E-04  2.39925E-04  3.31871E-05 -2.96510E-06
  9.300  1.26984E-04  1.71154E-04  8.40210E-05  2.37699E-05  2.22388E-06  4.24418E-04  4.86445E-04  1.91677E-04  2.54715E-05 -2.18140E-06
  9.400  9.84750E-05  1.31559E-04  6.39516E-05  1.84711E-05  2.18261E-06  3.47659E-04  3.95851E-04  1.52546E-04  1.90513E-05 -1.69657E-06
  9.500  7.64376E-05  1.01005E-04  4.83840E-05  1.42082E-05  2.04486E-06  2.85081E-04  3.22451E-04  1.21062E-04  1.38149E-05 -1.41739E-06
  9.600  5.94601E-05  7.75621E-05  3.64224E-05  1.08243E-05  1.85421E-06  2.34102E-04  2.63123E-04  9.59128E-05  9.62643E-06 -1.27359E-06
  9.700  4.64104E-05  5.96617E-05  2.73110E-05  8.17055E-06  1.64103E-06  1.92575E-04  2.15238E-04  7.59538E-05  6.34139E-06 -1.21398E-06
  9.800  3.63902E-05  4.60424E-05  2.04251E-05  6.11163E-06  1.42527E-06  1.58729E-04  1.76606E-04  6.02032E-05  3.81771E-06 -1.20256E-06
  9.900  2.86939E-05  3.57044E-05  1.52570E-05  4.52899E-06  1.21907E-06  1.31111E-04  1.45421E-04  4.78327E-05  1.92280E-06 -1.21496E-06
 10.000  2.27725E-05  2.78638E-05  1.14009E-05  3.32188E-06  1.02889E-06  1.08537E-04  1.20207E-04  3.81532E-05  5.37737E-07 -1.23542E-06
 10.100  1.82021E-05  2.19129E-05  8.53740E-06  2.40694E-06  8.57370E-07  9.00453E-05  9.97689E-05  3.05990E-05 -4.40949E-07 -1.25429E-06
 10.200  1.46581E-05  1.73849E-05  6.41858E-06  1.71674E-06  7.04738E-07  7.48593E-05  8.31442E-05  2.47108E-05 -1.10111E-06 -1.26607E-06
 10.300  1.18936E-05  1.39247E-05  4.85414E-06  1.19782E-06  5.69859E-07  6.23525E-05  6.95634E-05  2.01195E-05 -1.51587E-06 -1.26799E-06
 10.400  9.72157E-06  1.12640E-05  3.69975E-06  8.08571E-07  4.50990E-07  5.20212E-05  5.84138E-05  1.65317E-05 -1.74507E-06 -1.25902E-06
 10.500  8.00092E-06  9.20141E-06  2.84693E-06  5.17057E-07  3.46265E-07  4.34604E-05  4.92101E-05  1.37158E-05 -1.83700E-06 -1.23912E-06
 10.600  6.62559E-06  7.58657E-06  2.21484E-06  2.99103E-07  2.53988E-07  3.63448E-05  4.15686E-05  1.14908E-05 -1.83016E-06 -1.20890E-06
 10.700  5.51588E-06  6.30781E-06  1.74367E-06  1.36589E-07  1.72765E-07  3.04127E-05  3.51871E-05  9.71646E-06 -1.75489E-06 -1.16928E-06
 10.800  4.61194E-06  5.28243E-06  1.38948E-06  1.60314E-08  1.01539E-07  2.54538E-05  2.98275E-05  8.28501E-06 -1.63480E-06 -1.12138E-06
 10.900  3.86877E-06  4.44939E-06  1.12016E-06 -7.25574E-08  3.95589E-08  2.12982E-05  2.53023E-05  7.11442E-06 -1.48803E-06 -1.06641E-06
 11.000  3.25246E-06  3.76369E-06  9.12459E-07 -1.36568E-07 -1.36928E-08  1.78086E-05  2.14635E-05  6.14286E-06 -1.32826E-06 -1.00566E-06
 11.100  2.73737E-06  3.19228E-06  7.49606E-07 -1.81487E-07 -5.85822E-08  1.48736E-05  1.81943E-05  5.32419E-06 -1.16558E-06 -9.40423E-07
 11.200  2.30403E-06  2.71086E-06  6.19644E-07 -2.11416E-07 -9.54080E-08  1.24024E-05  1.54016E-05  4.62440E-06 -1.00720E-06 -8.72014E-07
 11.300  1.93754E-06  2.30155E-06  5.14111E-07 -2.29460E-07 -1.24472E-07  1.03206E-05  1.30113E-05  4.01863E-06 -8.58017E-07 -8.01703E-07
 11.400  1.62642E-06  1.95115E-06  4.27083E-07 -2.38016E-07 -1.46132E-07  8.56705E-06  1.09632E-05  3.48892E-06 -7.21116E-07 -7.30709E-07
 11.500  1.36173E-06  1.64983E-06  3.54443E-07 -2.38977E-07 -1.60838E-07  7.09105E-06  9.20847E-06  3.02235E-06 -5.98167E-07 -6.60170E-07
 11.600  1.13637E-06  1.39018E-06  2.93339E-07 -2.33880E-07 -1.69146E-07  5.85031E-06  7.70653E-06  2.60962E-06 -4.89775E-07 -5.91116E-07
 11.700  9.44651E-07  1.16646E-06  2.41783E-07 -2.24009E-07 -1.71714E-07  4.80936E-06  6.42349E-06  2.24394E-06 -3.95763E-07 -5.24453E-07
 11.800  7.81891E-07  9.74109E-07  1.98353E-07 -2.10469E-07 -1.69289E-07  3.93823E-06  5.33051E-06  1.92024E-06 -3.15412E-07 -4.60948E-07
 11.900  6.44173E-07  8.09356E-07  1.61983E-07 -1.94228E-07 -1.62681E-07  3.21146E-06  4.40272E-06  1.63453E-06 -2.47654E-07 -4.01216E-07
 12.000  5.28149E-07  6.68981E-07  1.31814E-07 -1.76145E-07 -1.52730E-07  2.60730E-06  3.61848E-06  1.38349E-06 -1.91224E-07 -3.45725E-07
 12.100  4.30909E-07  5.50133E-07  1.07107E-07 -1.56982E-07 -1.40275E-07  2.10708E-06  2.95873E-06  1.16417E-06 -1.44782E-07 -2.94793E-07
 12.200  3.49890E-07  4.50227E-07  8.71771E-08 -1.37413E-07 -1.26121E-07  1.69477E-06  2.40661E-06  9.73824E-07 -1.06996E-07 -2.48601E-07
 12.300  2.82816E-07  3.66888E-07  7.13751E-08 -1.18024E-07 -1.11011E-07  1.35653E-06  1.94714E-06  8.09822E-07 -7.66038E-08 -2.07202E-07
 12.400  2.27658E-07  2.97918E-07  5.90739E-08 -9.93071E-08 -9.56055E-08  1.08048E-06  1.56703E-06  6.69583E-07 -5.24455E-08 -1.70540E-07
 12.500  1.82607E-07  2.41288E-07  4.96742E-08 -8.16626E-08 -8.04671E-08  8.56362E-07  1.25448E-06  5.50590E-07 -3.34874E-08 -1.38461E-07
 12.600  1.46060E-07  1.95143E-07  4.26137E-08 -6.53974E-08 -6.60499E-08  6.75412E-07  9.99085E-07  4.50402E-07 -1.88254E-08 -1.10736E-07
 12.700  1.16601E-07  1.57801E-07  3.73787E-08 -5.07271E-08 -5.26992E-08  5.30131E-07  7.91691E-07  3.66684E-07 -7.68225E-09 -8.70777E-08
 12.800  9.29982E-08  1.27766E-07  3.35144E-08 -3.77813E-08 -4.06549E-08  4.14146E-07  6.24331E-07  2.97237E-07  6.01377E-10 -6.71544E-08
 12.900  7.41853E-08  1.03720E-07  3.06316E-08 -2.66115E-08 -3.00597E-08  3.22072E-07  4.90107E-07  2.40023E-07  6.57960E-09 -5.06095E-08
 13.000  5.92538E-08  8.45277E-08  2.84102E-08 -1.72006E-08 -2.09715E-08  2.49389E-07  3.83104E-07  1.93189E-07  1.07147E-08 -3.70740E-08
 13.100  4.74385E-08  6.92250E-08  2.65985E-08 -9.47519E-09 -1.33770E-08  1.92328E-07  2.98295E-07  1.55071E-07  1.33907E-08 -2.61790E-08
 13.200  3.81035E-08  5.70084E-08  2.50084E-08 -3.31762E-09 -7.20675E-09  1.47767E-07  2.31445E-07  1.24207E-07  1.49252E-08 -1.75657E-08
 13.300  3.07273E-08  4.72195E-08  2.35091E-08  1.42134E-09 -2.34982E-09  1.13145E-07  1.79023E-07  9.93242E-08  1.55805E-08 -1.08942E-08
 13.400  2.48881E-08  3.93285E-08  2.20183E-08  4.91061E-09  1.33221E-09  8.63739E-08  1.38110E-07  7.93359E-08  1.55728E-08 -5.84877E-09
 13.500  2.02490E-08  3.29160E-08  2.04925E-08  7.32813E-09  3.99299E-09  6.57649E-08  1.06314E-07  6.33235E-08  1.50791E-08 -2.14245E-09
 13.600  1.65441E-08  2.76554E-08  1.89183E-08  8.85167E-09  5.79102E-09  4.99636E-08  8.16976E-08  5.05213E-08  1.42442E-08  4.80688E-10
 13.700  1.35664E-08  2.32960E-08  1.73029E-08  9.65156E-09  6.88132E-09  3.78919E-08  6.26999E-08  4.02981E-08  1.31849E-08  2.24469E-09
 13.800  1.11560E-08  1.96477E-08  1.56669E-08  9.88517E-09  7.40926E-09  2.86981E-08  4.80768E-08  3.21386E-08  1.19946E-08  3.34206E-09
 13.900  9.19028E-09  1.65680E-08  1.40377E-08  9.69322E-09  7.50629E-09  2.17139E-08  3.68436E-08  2.56260E-08  1.07468E-08  3.93516E-09
 14.000  7.57620E-09  1.39503E-08  1.24445E-08  9.19769E-09  7.28745E-09  1.64192E-08  2.82267E-08  2.04256E-08  9.49757E-09  4.15831E-09
 14.100  6.24288E-09  1.17146E-08  1.09149E-08  8.50114E-09  6.85027E-09  1.24112E-08  2.16226E-08  1.62701E-08  8.28858E-09  4.12043E-09
 14.200  5.13639E-09  9.80052E-09  9.47230E-09  7.68705E-09  6.27494E-09  9.38031E-09  1.65630E-08  1.29473E-08  7.14929E-09  3.90794E-09
 14.300  4.21535E-09  8.16144E-09  8.13496E-09  6.82111E-09  5.62522E-09  7.08939E-09  1.26867E-08  1.02885E-08  6.09904E-09  3.58778E-09
 14.400  3.44766E-09  6.76029E-09  6.91516E-09  5.95296E-09  4.94995E-09  5.35801E-09  9.71585E-09  8.16058E-09  5.14895E-09  3.21036E-09
 14.500  2.80798E-09  5.56665E-09  5.81958E-09  5.11830E-09  4.28499E-09  4.04923E-09  7.43792E-09  6.45763E-09  4.30362E-09  2.81247E-09
 14.600  2.27595E-09  4.55468E-09  4.84978E-09  4.34112E-09  3.65518E-09  3.05950E-09  5.69033E-09  5.09570E-09  3.56267E-09  2.41979E-09
 14.700  1.83483E-09  3.70175E-09  4.00310E-09  3.63593E-09  3.07638E-09  2.31067E-09  4.34901E-09  4.00789E-09  2.92206E-09  2.04928E-09
 14.800  1.47064E-09  2.98769E-09  3.27351E-09  3.00977E-09  2.55736E-09  1.74383E-09  3.31927E-09  3.14064E-09  2.37519E-09  1.71113E-09
 14.900  1.17152E-09  2.39423E-09  2.65261E-09  2.46410E-09  2.10148E-09  1.31461E-09  2.52880E-09  2.45099E-09  1.91388E-09  1.41055E-09
 15.000  9.27284E-10  1.90480E-09  2.13044E-09  1.99638E-09  1.70822E-09  9.89591E-10  1.92232E-09  1.90428E-09  1.52911E-09  1.14909E-09
 15.100  7.29141E-10  1.50437E-09  1.69625E-09  1.60143E-09  1.37434E-09  7.43534E-10  1.45743E-09  1.47247E-09  1.21159E-09  9.25837E-10
 15.200  5.69489E-10  1.17943E-09  1.33914E-09  1.27244E-09  1.09495E-09  5.57387E-10  1.10162E-09  1.13285E-09  9.52245E-10  7.38278E-10
 15.300  4.41769E-10  9.17909E-10  1.04847E-09  1.00182E-09  8.64220E-10  4.16724E-10  8.29831E-10  8.66967E-10  7.42494E-10  5.82974E-10
 15.400  3.40342E-10  7.09167E-10  8.14247E-10  7.81830E-10  6.75997E-10  3.10606E-10  6.22741E-10  6.59867E-10  5.74457E-10  4.56063E-10
 15.500  2.60397E-10  5.43921E-10  6.27342E-10  6.04959E-10  5.24197E-10  2.30720E-10  4.65423E-10  4.99414E-10  4.41068E-10  3.53606E-10
 15.600  1.97858E-10  4.14176E-10  4.79587E-10  4.64242E-10  4.03085E-10  1.70737E-10  3.46326E-10  3.75803E-10  3.36122E-10  2.71819E-10
 15.700  1.49306E-10  3.13128E-10  3.63842E-10  3.53401E-10  3.07440E-10  1.25837E-10  2.56515E-10  2.81130E-10  2.54267E-10  2.07221E-10
 15.800  1.11896E-10  2.35059E-10  2.73969E-10  2.66922E-10  2.32640E-10  9.23444E-11  1.89075E-10  2.09059E-10  1.90956E-10  1.56710E-10
 15.900  8.32888E-11  1.75219E-10  2.04782E-10  2.00069E-10  1.74685E-10  6.74578E-11  1.38667E-10  1.54532E-10  1.42390E-10  1.17590E-10
 16.000  6.15760E-11  1.29709E-10  1.51963E-10  1.48842E-10  1.30183E-10  4.90437E-11  1.01171E-10  1.13537E-10  1.05433E-10  8.75663E-11
 16.100  4.52182E-11  9.53614E-11  1.11968E-10  1.09924E-10  9.63060E-11  3.54803E-11  7.34220E-11  8.29108E-11  7.75296E-11  6.47266E-11
 16.200  3.29851E-11  6.96349E-11  8.19243E-11  8.06019E-11  7.07326E-11  2.55377E-11  5.29957E-11  6.01780E-11  5.66233E-11  4.74983E-11
 16.300  2.39028E-11  5.05085E-11  5.95301E-11  5.86866E-11  5.15839E-11  1.82856E-11  3.80417E-11  4.34124E-11  4.10770E-11  3.46090E-11
 16.400  1.72082E-11  3.63932E-11  4.29647E-11  4.24354E-11  3.73589E-11  1.30235E-11  2.71554E-11  3.11273E-11  2.96018E-11  2.50423E-11
 16.500  1.23085E-11  2.60511E-11  3.08021E-11  3.04764E-11  2.68726E-11  9.22573E-12  1.92755E-11  2.21833E-11  2.11928E-11  1.79966E-11
 16.600  8.74751E-12  1.85274E-11  2.19372E-11  2.17417E-11  1.92005E-11  6.49980E-12  1.36048E-11  1.57137E-11  1.50746E-11  1.28465E-11
 16.700  6.17734E-12  1.30923E-11  1.55223E-11  1.54085E-11  1.36284E-11  4.55410E-12  9.54782E-12  1.10638E-11  1.06543E-11  9.10980E-12
 16.800  4.33494E-12  9.19309E-12  1.09128E-11  1.08494E-11  9.61055E-12  3.17316E-12  6.66247E-12  7.74316E-12  7.48264E-12  6.41805E-12
 16.900  3.02313E-12  6.41477E-12  7.62365E-12  7.59041E-12  6.73388E-12  2.19866E-12  4.62256E-12  5.38683E-12  5.22237E-12  4.49272E-12
 17.000  2.09531E-12  4.44840E-12  5.29253E-12  5.27691E-12  4.68848E-12  1.51493E-12  3.18893E-12  3.72532E-12  3.62236E-12  3.12510E-12
 17.100  1.44339E-12  3.06589E-12  3.65150E-12  3.64571E-12  3.24401E-12  1.03799E-12  2.18739E-12  2.56109E-12  2.49722E-12  2.16025E-12
 17.200  9.88296E-13  2.10023E-12  2.50389E-12  2.50325E-12  2.23075E-12  7.07224E-13  1.49187E-12  1.75038E-12  1.71115E-12  1.48410E-12
 17.300  6.72642E-13  1.43008E-12  1.70658E-12  1.70836E-12  1.52464E-12  4.79166E-13  1.01173E-12  1.18932E-12  1.16550E-12  1.01337E-12
 17.400  4.55092E-13  9.67969E-13  1.15619E-12  1.15886E-12  1.03576E-12  3.22838E-13  6.82242E-13  8.03431E-13  7.89137E-13  6.87791E-13
 17.500  3.06093E-13  6.51322E-13  7.78666E-13  7.81435E-13  6.99456E-13  2.16301E-13  4.57466E-13  5.39625E-13  5.31172E-13  4.64035E-13
 17.600  2.04678E-13  4.35698E-13  5.21336E-13  5.23827E-13  4.69562E-13  1.44117E-13  3.05026E-13  3.60369E-13  3.55453E-13  3.11228E-13
 17.700  1.36073E-13  2.89771E-13  3.47018E-13  3.49094E-13  3.13388E-13  9.54909E-14  2.02248E-13  2.39294E-13  2.36492E-13  2.07523E-13
 17.800  8.99458E-14  1.91613E-13  2.29656E-13  2.31302E-13  2.07947E-13  6.29228E-14  1.33356E-13  1.58001E-13  1.56444E-13  1.37574E-13
 17.900  5.91173E-14  1.25984E-13  1.51118E-13  1.52378E-13  1.37192E-13  4.12348E-14  8.74448E-14  1.03741E-13  1.02903E-13  9.06803E-14
 18.000  3.86361E-14  8.23658E-14  9.88756E-14  9.98149E-14  8.99976E-14  2.68745E-14  5.70244E-14  6.77358E-14  6.73047E-14  5.94316E-14
 18.100  2.51095E-14  5.35477E-14  6.43305E-14  6.50154E-14  5.87057E-14  1.74199E-14  3.69833E-14  4.39825E-14  4.37754E-14  3.87321E-14
 18.200  1.62280E-14  3.46190E-14  4.16216E-14  4.21120E-14  3.80800E-14  1.12304E-14  2.38551E-14  2.84021E-14  2.83140E-14  2.51012E-14
 18.300  1.04302E-14  2.22580E-14  2.67802E-14  2.71259E-14  2.45641E-14  7.20112E-15  1.53039E-14  1.82408E-14  1.82127E-14  1.61772E-14
 18.400  6.66717E-15  1.42323E-14  1.71364E-14  1.73767E-14  1.57583E-14  4.59271E-15  9.76513E-15  1.16514E-14  1.16511E-14  1.03686E-14
 18.500  4.23862E-15  9.05097E-15  1.09057E-14  1.10708E-14  1.00540E-14  2.91351E-15  6.19761E-15  7.40230E-15  7.41309E-15  6.60941E-15
 18.600  2.68015E-15  5.72486E-15  6.90296E-15  7.01501E-15  6.37986E-15  1.83846E-15  3.91249E-15  4.67760E-15  4.69119E-15  4.19030E-15
 18.700  1.68562E-15  3.60164E-15  4.34588E-15  4.42117E-15  4.02660E-15  1.15396E-15  2.45684E-15  2.94010E-15  2.95281E-15  2.64232E-15
 18.800  1.05449E-15  2.25381E-15  2.72143E-15  2.77153E-15  2.52777E-15  7.20517E-16  1.53465E-15  1.83822E-15  1.84872E-15  1.65729E-15
 18.900  6.56183E-16  1.40291E-15  1.69515E-15  1.72819E-15  1.57842E-15  4.47529E-16  9.53585E-16  1.14325E-15  1.15135E-15  1.03395E-15
 19.000  4.06179E-16  8.68661E-16  1.05033E-15  1.07193E-15  9.80417E-16  2.76525E-16  5.89444E-16  7.07309E-16  7.13266E-16  6.41658E-16
 19.100  2.50112E-16  5.35052E-16  6.47392E-16  6.61397E-16  6.05780E-16  1.69979E-16  3.62468E-16  4.35323E-16  4.39565E-16  3.96119E-16
 19.200  1.53212E-16  3.27853E-16  3.96955E-16  4.05965E-16  3.72347E-16  1.03948E-16  2.21744E-16  2.66540E-16  2.69484E-16  2.43264E-16
 19.300  9.33683E-17  1.99854E-16  2.42139E-16  2.47890E-16  2.27679E-16  6.32425E-17  1.34959E-16  1.62358E-16  1.64360E-16  1.48618E-16
 19.400  5.66072E-17  1.21201E-16  1.46942E-16  1.50587E-16  1.38502E-16  3.82809E-17  8.17202E-17  9.83909E-17  9.97289E-17  9.03285E-17
 19.500  3.41444E-17  7.31273E-17  8.87163E-17  9.10096E-17  8.38212E-17  2.30541E-17  4.92319E-17  5.93226E-17  6.02036E-17  5.46192E-17
 19.600  2.04907E-17  4.38973E-17  5.32898E-17  5.47228E-17  5.04699E-17  1.38139E-17  2.95096E-17  3.55861E-17  3.61586E-17  3.28584E-17
 19.700  1.22347E-17  2.62177E-17  3.18480E-17  3.27374E-17  3.02345E-17  8.23562E-18  1.75991E-17  2.12396E-17  2.16073E-17  1.96671E-17
 19.800  7.26842E-18  1.55798E-17  1.89377E-17  1.94861E-17  1.80209E-17  4.88541E-18  1.04433E-17  1.26133E-17  1.28469E-17  1.17122E-17
 19.900  4.29644E-18  9.21191E-18  1.12045E-17  1.15404E-17  1.06871E-17  2.88362E-18  6.16621E-18  7.45306E-18  7.60004E-18  6.93985E-18
  67 167 200   0.100
  0.000  5.79343E-02 -3.02559E-16 -4.57967E-16 -5.75426E-16 -2.00269E-16  9.69153E-02 -4.96507E-16 -7.91034E-16 -5.25389E-16 -3.83371E-15
  0.100  5.79707E-02 -5.14531E-05 -3.66091E-08 -7.56269E-12 -2.30309E-15  9.68740E-02  7.58393E-05  4.26376E-08 -2.91208E-12 -6.86635E-16
  0.200  5.80789E-02 -2.03017E-04 -5.79811E-07 -4.78094E-10 -2.89946E-13  9.67517E-02  2.98293E-04  6.72889E-07 -1.87707E-10 -7.72736E-13
  0.300  5.82558E-02 -4.46443E-04 -2.88581E-06 -5.33644E-09 -7.27816E-12  9.65542E-02  6.52514E-04  3.32923E-06 -2.16398E-09 -1.95567E-11
  0.400  5.84967E-02 -7.68445E-04 -8.90563E-06 -2.91437E-08 -7.02644E-11  9.62902E-02  1.11487E-03  1.01885E-05 -1.23479E-08 -1.93395E-10
  0.500  5.87949E-02 -1.15136E-03 -2.10837E-05 -1.07184E-07 -4.00795E-10  9.59714E-02  1.65455E-03  2.38620E-05 -4.79420E-08 -1.13786E-09
  0.600  5.91425E-02 -1.57405E-03 -4.21004E-05 -3.06051E-07 -1.63305E-09  9.56116E-02  2.23560E-03  4.70194E-05 -1.45826E-07 -4.81440E-09
  0.700  5.95302E-02 -2.01294E-03 -7.45795E-05 -7.31968E-07 -5.25884E-09  9.52259E-02  2.81931E-03  8.19850E-05 -3.74383E-07 -1.62066E-08
  0.800  5.99478E-02 -2.44326E-03 -1.20787E-04 -1.53422E-06 -1.42167E-08  9.48299E-02  3.36676E-03  1.30351E-04 -8.47746E-07 -4.61009E-08
  0.900  6.03847E-02 -2.84024E-03 -1.82345E-04 -2.90171E-06 -3.35440E-08  9.44389E-02  3.84130E-03  1.92650E-04 -1.74120E-06 -1.15198E-07
  1.000  6.08301E-02 -3.18044E-03 -2.59988E-04 -5.05166E-06 -7.09343E-08  9.40671E-02  4.21085E-03  2.68130E-04 -3.30570E-06 -2.59645E-07
  1.100  6.12734E-02 -3.44291E-03 -3.53377E-04 -8.21074E-06 -1.37001E-07  9.37268E-02  4.44988E-03  3.54649E-04 -5.87890E-06 -5.37874E-07
  1.200  6.17047E-02 -3.61030E-03 -4.61000E-04 -1.25901E-05 -2.45057E-07  9.34282E-02  4.54090E-03  4.48705E-04 -9.88951E-06 -1.03838E-06
  1.300  6.21148E-02 -3.66970E-03 -5.80149E-04 -1.83568E-05 -4.10271E-07  9.31788E-02  4.47538E-03  5.45610E-04 -1.58524E-05 -1.88783E-06
  1.400  6.24958E-02 -3.61335E-03 -7.07004E-04 -2.56051E-05 -6.48188E-07  9.29830E-02  4.25418E-03  6.39776E-04 -2.43517E-05 -3.25848E-06
  1.500  6.28413E-02 -3.43900E-03 -8.36790E-04 -3.43310E-05 -9.72741E-07  9.28425E-02  3.88726E-03  7.25101E-04 -3.60113E-05 -5.37400E-06
  1.600  6.31464E-02 -3.15002E-03 -9.64018E-04 -4.44134E-05 -1.39405E-06  9.27560E-02  3.39294E-03  7.95425E-04 -5.14528E-05 -8.51225E-06
  1.700  6.34078E-02 -2.75521E-03 -1.08278E-03 -5.56037E-05 -1.91640E-06  9.27195E-02  2.79663E-03  8.44998E-04 -7.12422E-05 -1.30039E-05
  1.800  6.36240E-02 -2.26832E-03 -1.18710E-03 -6.75266E-05 -2.53701E-06  9.27270E-02  2.12920E-03  8.68946E-04 -9.58300E-05 -1.92257E-05
  1.900  6.37950E-02 -1.70734E-03 -1.27127E-03 -7.96906E-05 -3.24589E-06  9.27701E-02  1.42506E-03  8.63686E-04 -1.25489E-04 -2.75883E-05
  2.000  6.39226E-02 -1.09356E-03 -1.33020E-03 -9.15082E-05 -4.02746E-06  9.28396E-02  7.20102E-04  8.27257E-04 -1.60252E-04 -3.85166E-05
  2.100  6.40096E-02 -4.50478E-04 -1.35973E-03 -1.02323E-04 -4.86384E-06  9.29248E-02  4.96087E-05  7.59551E-04 -1.99866E-04 -5.24255E-05
  2.200  6.40600E-02  1.97332E-04 -1.35691E-03 -1.11439E-04 -5.73994E-06  9.30151E-02 -5.53739E-04  6.62420E-04 -2.43748E-04 -6.96893E-05
  2.300  6.40789E-02  8.25457E-04 -1.32018E-03 -1.18155E-04 -6.64984E-06  9.30999E-02 -1.06164E-03  5.39655E-04 -2.90970E-04 -9.06079E-05
  2.400  6.40719E-02  1.41078E-03 -1.24948E-03 -1.21791E-04 -7.60371E-06  9.31691E-02 -1.45167E-03  3.96835E-04 -3.40258E-04 -1.15371E-04
  2.500  6.40447E-02  1.93257E-03 -1.14635E-03 -1.21711E-04 -8.63429E-06  9.32139E-02 -1.70836E-03  2.41051E-04 -3.90013E-04 -1.44021E-04
  2.600  6.40034E-02  2.37335E-03 -1.01382E-03 -1.17347E-04 -9.80168E-06  9.32269E-02 -1.82390E-03  8.05210E-05 -4.38355E-04 -1.76423E-04
  2.700  6.39538E-02  2.71972E-03 -8.56370E-04 -1.08205E-04 -1.11952E-05  9.32024E-02 -1.79837E-03 -7.58892E-05 -4.83187E-04 -2.12236E-04
  2.800  6.39012E-02  2.96282E-03 -6.79735E-04 -9.38748E-05 -1.29313E-05  9.31367E-02 -1.63942E-03 -2.19210E-04 -5.22270E-04 -2.50891E-04
  2.900  6.38503E-02  3.09870E-03 -4.90673E-04 -7.40392E-05 -1.51466E-05  9.30278E-02 -1.36159E-03 -3.40951E-04 -5.53317E-04 -2.91584E-04
  3.000  6.38046E-02  3.12842E-03 -2.96721E-04 -4.84763E-05 -1.79856E-05  9.28758E-02 -9.85201E-04 -4.33696E-04 -5.74095E-04 -3.33277E-04
  3.100  6.37667E-02  3.05794E-03 -1.05895E-04 -1.70735E-05 -2.15841E-05  9.26822E-02 -5.34839E-04 -4.91658E-04 -5.82534E-04 -3.74710E-04
  3.200  6.37376E-02  2.89788E-03  7.36126E-05  2.01548E-05 -2.60483E-05  9.24496E-02 -3.76248E-05 -5.11173E-04 -5.76839E-04 -4.14430E-04
  3.300  6.37167E-02  2.66302E-03  2.33749E-04  6.30401E-05 -3.14326E-05  9.21812E-02  4.78694E-04 -4.91087E-04 -5.55608E-04 -4.50828E-04
  3.400  6.37015E-02  2.37178E-03  3.66911E-04  1.11223E-04 -3.77173E-05  9.18803E-02  9.87701E-04 -4.32997E-04 -5.17943E-04 -4.82197E-04
  3.500  6.36877E-02  2.04546E-03  4.66249E-04  1.64114E-04 -4.47899E-05  9.15494E-02  1.46618E-03 -3.41320E-04 -4.63557E-04 -5.06790E-04
  3.600  6.36687E-02  1.70751E-03  5.25956E-04  2.20841E-04 -5.24328E-05  9.11897E-02  1.89582E-03 -2.23173E-04 -3.92877E-04 -5.22898E-04
  3.700  6.36361E-02  1.38263E-03  5.41535E-04  2.80219E-04 -6.03197E-05  9.08004E-02  2.26451E-03 -8.80395E-05 -3.07120E-04 -5.28928E-04
  3.800  6.35790E-02  1.09591E-03  5.10038E-04  3.40709E-04 -6.80239E-05  9.03782E-02  2.56737E-03  5.27593E-05 -2.08352E-04 -5.23495E-04
  3.900  6.34850E-02  8.71876E-04  4.30266E-04  4.00415E-04 -7.50383E-05  8.99169E-02  2.80712E-03  1.86771E-04 -9.95070E-05 -5.05501E-04
  4.000  6.33398E-02  7.33606E-04  3.02927E-04  4.57095E-04 -8.08084E-05  8.94075E-02  2.99405E-03  3.01263E-04  1.56331E-05 -4.74225E-04
  4.100  6.31280E-02  7.01813E-04  1.30727E-04  5.08214E-04 -8.47760E-05  8.88378E-02  3.14535E-03  3.84154E-04  1.32518E-04 -4.29395E-04
  4.200  6.28332E-02  7.94004E-04 -8.15979E-05  5.51028E-04 -8.64302E-05  8.81934E-02  3.28400E-03  4.24975E-04  2.45962E-04 -3.71253E-04
  4.300  6.24387E-02  1.02372E-03 -3.27343E-04  5.82705E-04 -8.53625E-05  8.74575E-02  3.43712E-03  4.15758E-04  3.50344E-04 -3.00593E-04
  4.400  6.19284E-02  1.39986E-03 -5.97982E-04  6.00485E-04 -8.13187E-05  8.66120E-02  3.63409E-03  3.51812E-04  4.39861E-04 -2.18784E-04
  4.500  6.12870E-02  1.92621E-03 -8.83411E-04  6.01858E-04 -7.42442E-05  8.56384E-02  3.90438E-03  2.32278E-04  5.08837E-04 -1.27756E-04
  4.600  6.05010E-02  2.60103E-03 -1.17229E-03  5.84755E-04 -6.43148E-05  8.45188E-02  4.27532E-03  6.04348E-05  5.52058E-04 -2.99566E-05
  4.700  5.95592E-02  3.41699E-03 -1.45249E-03  5.47739E-04 -5.19499E-05  8.32367E-02  4.76998E-03 -1.56305E-04  5.65130E-04  7.17232E-05
  4.800  5.84532E-02  4.36116E-03 -1.71159E-03  4.90170E-04 -3.78043E-05  8.17778E-02  5.40532E-03 -4.06709E-04  5.44809E-04  1.74061E-04
  4.900  5.71782E-02  5.41538E-03 -1.93743E-03  4.12342E-04 -2.27373E-05  8.01315E-02  6.19064E-03 -6.76351E-04  4.89296E-04  2.73642E-04
  5.000  5.57327E-02  6.55679E-03 -2.11875E-03  3.15554E-04 -7.76126E-06  7.82906E-02  7.12661E-03 -9.48494E-04  3.98458E-04  3.67014E-04
  5.100  5.41194E-02  7.75853E-03 -2.24573E-03  2.02128E-04  6.02820E-06  7.62528E-02  8.20478E-03 -1.20518E-03  2.73953E-04  4.50870E-04
  5.200  5.23445E-02  8.99076E-03 -2.31052E-03  7.53495E-05  1.75333E-05  7.40199E-02  9.40773E-03 -1.42845E-03  1.19240E-04  5.22215E-04
  5.300  5.04181E-02  1.02217E-02 -2.30776E-03 -6.06629E-05  2.57404E-05  7.15987E-02  1.07098E-02 -1.60154E-03 -6.05344E-05  5.78537E-04
  5.400  4.83536E-02  1.14188E-02 -2.23484E-03 -2.01153E-04  2.98031E-05  6.90003E-02  1.20781E-02 -1.71012E-03 -2.58768E-04  6.17948E-04
  5.500  4.61676E-02  1.25503E-02 -2.09213E-03 -3.40977E-04  2.91144E-05  6.62399E-02  1.34746E-02 -1.74319E-03 -4.67747E-04  6.39293E-04
  5.600  4.38788E-02  1.35858E-02 -1.88302E-03 -4.74888E-04  2.33610E-05  6.33362E-02  1.48577E-02 -1.69392E-03 -6.79075E-04  6.42218E-04
  5.700  4.15080E-02  1.44981E-02 -1.61377E-03 -5.97835E-04  1.25542E-05  6.03110E-02  1.61846E-02 -1.56006E-03 -8.84155E-04  6.27186E-04
  5.800  3.90773E-02  1.52640E-02 -1.29319E-03 -7.05258E-04 -2.96488E-06  5.71879E-02  1.74133E-02 -1.34410E-03 -1.07469E-03  5.95445E-04
  5.900  3.66092E-02  1.58648E-02 -9.32246E-04 -7.93343E-04 -2.25472E-05  5.39926E-02  1.85049E-02 -1.05303E-03 -1.24316E-03  5.48946E-04
  6.000  3.41265E-02  1.62874E-02 -5.43438E-04 -8.59238E-04 -4.52815E-05  5.07511E-02  1.94253E-02 -6.97866E-04 -1.38324E-03  4.90218E-04
  6.100  3.16513E-02  1.65244E-02 -1.40193E-04 -9.01190E-04 -7.00602E-05  4.74897E-02  2.01467E-02 -2.92881E-04 -1.49016E-03  4.22212E-04
  6.200  2.92047E-02  1.65742E-02  2.63825E-04 -9.18615E-04 -9.56589E-05  4.42345E-02  2.06487E-02  1.45357E-04 -1.56089E-03  3.48121E-04
  6.300  2.68064E-02  1.64406E-02  6.55390E-04 -9.12090E-04 -1.20823E-04  4.10104E-02  2.09194E-02  5.99037E-04 -1.59424E-03  2.71195E-04
  6.400  2.44744E-02  1.61330E-02  1.02233E-03 -8.83260E-04 -1.44350E-04  3.78408E-02  2.09547E-02  1.05019E-03 -1.59086E-03  1.94564E-04
  6.500  2.22246E-02  1.56653E-02  1.35408E-03 -8.34694E-04 -1.65171E-04  3.47477E-02  2.07590E-02  1.48171E-03 -1.55308E-03  1.21075E-04
  6.600  2.00708E-02  1.50549E-02  1.64207E-03 -7.69679E-04 -1.82408E-04  3.17507E-02  2.03438E-02  1.87828E-03 -1.48463E-03  5.31598E-05
  6.700  1.80243E-02  1.43227E-02  1.88004E-03 -6.91990E-04 -1.95422E-04  2.88674E-02  1.97273E-02  2.22705E-03 -1.39037E-03 -7.25434E-06
  6.800  1.60944E-02  1.34911E-02  2.06413E-03 -6.05641E-04 -2.03834E-04  2.61128E-02  1.89328E-02  2.51822E-03 -1.27589E-03 -5.88035E-05
  6.900  1.42878E-02  1.25837E-02  2.19291E-03 -5.14644E-04 -2.07530E-04  2.34994E-02  1.79878E-02  2.74523E-03 -1.14715E-03 -1.00698E-04
  7.000  1.26091E-02  1.16242E-02  2.26724E-03 -4.22794E-04 -2.06647E-04  2.10371E-02  1.69219E-02  2.90488E-03 -1.01011E-03 -1.32700E-04
  7.100  1.10606E-02  1.06356E-02  2.28997E-03 -3.33484E-04 -2.01537E-04  1.87333E-02  1.57661E-02  2.99715E-03 -8.70383E-04 -1.55063E-04
  7.200  9.64289E-03  9.63937E-03  2.26567E-03 -2.49568E-04 -1.92727E-04  1.65928E-02  1.45510E-02  3.02486E-03 -7.33014E-04 -1.68456E-04
  7.300  8.35443E-03  8.65479E-03  2.20017E-03 -1.73277E-04 -1.80866E-04  1.46177E-02  1.33060E-02  2.99322E-03 -6.02246E-04 -1.73866E-04
  7.400  7.19223E-03  7.69878E-03  2.10019E-03 -1.06181E-04 -1.66676E-04  1.28082E-02  1.20579E-02  2.90928E-03 -4.81419E-04 -1.72495E-04
  7.500  6.15182E-03  6.78540E-03  1.97290E-03 -4.91958E-05 -1.50900E-04  1.11620E-02  1.08308E-02  2.78136E-03 -3.72919E-04 -1.65659E-04
  7.600  5.22754E-03  5.92581E-03  1.82553E-03 -2.63556E-06 -1.34254E-04  9.67491E-03  9.64512E-03  2.61845E-03 -2.78201E-04 -1.54698E-04
  7.700  4.41277E-03  5.12823E-03  1.66506E-03  3.37115E-05 -1.17395E-04  8.34109E-03  8.51739E-03  2.42969E-03 -1.97863E-04 -1.40893E-04
  7.800  3.70014E-03  4.39810E-03  1.49792E-03  6.04832E-05 -1.00891E-04  7.15319E-03  7.46036E-03  2.22394E-03 -1.31762E-04 -1.25414E-04
  7.900  3.08176E-03  3.73829E-03  1.32979E-03  7.86349E-05 -8.52040E-05  6.10272E-03  6.48299E-03  2.00934E-03 -7.91568E-05 -1.09266E-04
  8.000  2.54945E-03  3.14939E-03  1.16544E-03  8.93299E-05 -7.06842E-05  5.18027E-03  5.59077E-03  1.79310E-03 -3.88616E-05 -9.32752E-05
  8.100  2.09490E-03  2.63008E-03  1.00873E-03  9.38370E-05 -5.75695E-05  4.37585E-03  4.78604E-03  1.58130E-03 -9.39698E-06 -7.80735E-05
  8.200  1.70989E-03  2.17745E-03  8.62527E-04  9.34413E-05 -4.59945E-05  3.67913E-03  4.06846E-03  1.37880E-03  1.08702E-05 -6.41098E-05
  8.300  1.38645E-03  1.78741E-03  7.28811E-04  8.93708E-05 -3.60026E-05  3.07974E-03  3.43549E-03  1.18925E-03  2.36064E-05 -5.16637E-05
  8.400  1.11692E-03  1.45503E-03  6.08726E-04  8.27424E-05 -2.75629E-05  2.56741E-03  2.88286E-03  1.01517E-03  3.04147E-05 -4.08705E-05
  8.500  8.94151E-04  1.17483E-03  5.02703E-04  7.45259E-05 -2.05865E-05  2.13224E-03  2.40507E-03  8.58022E-04  3.27635E-05 -3.17485E-05
  8.600  7.11510E-04  9.41130E-04  4.10587E-04  6.55247E-05 -1.49447E-05  1.76482E-03  1.99578E-03  7.18393E-04  3.19405E-05 -2.42270E-05
  8.700  5.62960E-04  7.48214E-04  3.31765E-04  5.63725E-05 -1.04839E-05  1.45636E-03  1.64822E-03  5.96144E-04  2.90282E-05 -1.81740E-05
  8.800  4.43082E-04  5.90567E-04  2.65293E-04  4.75398E-05 -7.03967E-06  1.19878E-03  1.35547E-03  4.90569E-04  2.48989E-05 -1.34204E-05
  8.900  3.47076E-04  4.62999E-04  2.10015E-04  3.93504E-05 -4.44776E-06  9.84722E-04  1.11076E-03  4.00557E-04  2.02241E-05 -9.77962E-06
  9.000  2.70750E-04  3.60746E-04  1.64658E-04  3.20021E-05 -2.55226E-06  8.07626E-04  9.07628E-04  3.24733E-04  1.54931E-05 -7.06389E-06
  9.100  2.10493E-04  2.79528E-04  1.27918E-04  2.55902E-05 -1.21136E-06  6.61675E-04  7.40078E-04  2.61580E-04  1.10397E-05 -5.09546E-06
  9.200  1.63230E-04  2.15575E-04  9.85249E-05  2.01315E-05 -3.00745E-07  5.41794E-04  6.02652E-04  2.09533E-04  7.06914E-06 -3.71400E-06
  9.300  1.26379E-04  1.65627E-04  7.52866E-05  1.55863E-05  2.85044E-07  4.43595E-04  4.90483E-04  1.67061E-04  3.68726E-06 -2.78062E-06
  9.400  9.77976E-05  1.26911E-04  5.71206E-05  1.18779E-05  6.32719E-07  3.63326E-04  3.99300E-04  1.32719E-04  9.25949E-07 -2.17919E-06
  9.500  7.57278E-05  9.71061E-05  4.30706E-05  8.90849E-06  8.11448E-07  2.97812E-04  3.25412E-04  1.05183E-04 -1.23396E-06 -1.81570E-06
  9.600  5.87460E-05  7.42997E-05  3.23122E-05  6.57217E-06  8.74757E-07  2.44386E-04  2.65674E-04  8.32742E-05 -2.84394E-06 -1.61633E-06
  9.700  4.57111E-05  5.69363E-05  2.41500E-05  4.76386E-06  8.62797E-07  2.00827E-04  2.17439E-04  6.59600E-05 -3.97316E-06 -1.52481E-06
  9.800  3.57181E-05  4.37687E-05  1.80094E-05  3.38559E-06  8.04709E-07  1.65300E-04  1.78503E-04  5.23576E-05 -4.69762E-06 -1.49950E-06
  9.900  2.80567E-05  3.38095E-05  1.34239E-05  2.35014E-06  7.20901E-07  1.36300E-04  1.47051E-04  4.17232E-05 -5.09270E-06 -1.51052E-06
 10.000  2.21746E-05  2.62860E-05  1.00215E-05  1.58276E-06  6.25106E-07  1.12594E-04  1.21602E-04  3.34394E-05 -5.22843E-06 -1.53711E-06
 10.100  1.76459E-05  2.06002E-05  7.51015E-06  1.02137E-06  5.26144E-07  9.31813E-05  1.00955E-04  2.70011E-05 -5.16690E-06 -1.56542E-06
 10.200  1.41447E-05  1.62940E-05  5.66380E-06  6.15818E-07  4.29373E-07  7.72514E-05  8.41455E-05  2.19999E-05 -4.96127E-06 -1.58666E-06
 10.300  1.14230E-05  1.30195E-05  4.30974E-06  3.26596E-07  3.37826E-07  6.41485E-05  7.04011E-05  1.81095E-05 -4.65566E-06 -1.59568E-06
 10.400  9.29341E-06  1.05148E-05  3.31759E-06  1.23231E-07  2.53063E-07  5.33440E-05  5.91082E-05  1.50715E-05 -4.28585E-06 -1.58988E-06
 10.500  7.61451E-06  8.58383E-06  2.58990E-06 -1.73290E-08  1.75776E-07  4.44116E-05  4.97802E-05  1.26838E-05 -3.88021E-06 -1.56840E-06
 10.600  6.28003E-06  7.08076E-06  2.05447E-06 -1.12236E-07  1.06193E-07  3.70081E-05  4.20324E-05  1.07895E-05 -3.46069E-06 -1.53159E-06
 10.700  5.21010E-06  5.89752E-06  1.65821E-06 -1.74086E-07  4.43256E-08  3.08566E-05  3.55615E-05  9.26803E-06 -3.04394E-06 -1.48057E-06
 10.800  4.34468E-06  4.95436E-06  1.36232E-06 -2.12038E-07 -9.89365E-09  2.57334E-05  3.01278E-05  8.02782E-06 -2.64217E-06 -1.41700E-06
 10.900  3.63855E-06  4.19248E-06  1.13858E-06 -2.32717E-07 -5.65591E-08  2.14578E-05  2.55426E-05  6.99986E-06 -2.26403E-06 -1.34286E-06
 11.000  3.05752E-06  3.56865E-06  9.66605E-07 -2.40910E-07 -9.57829E-08  1.78832E-05  2.16564E-05  6.13284E-06 -1.91523E-06 -1.26028E-06
 11.100  2.57568E-06  3.05107E-06  8.31729E-07 -2.40091E-07 -1.27713E-07  1.48904E-05  1.83505E-05  5.38904E-06 -1.59917E-06 -1.17147E-06
 11.200  2.17327E-06  2.61635E-06  7.23478E-07 -2.32803E-07 -1.52562E-07  1.23823E-05  1.55303E-05  4.74113E-06 -1.31739E-06 -1.07859E-06
 11.300  1.83513E-06  2.24725E-06  6.34433E-07 -2.20939E-07 -1.70631E-07  1.02791E-05  1.31198E-05  4.16953E-06 -1.06999E-06 -9.83730E-07
 11.400  1.54954E-06  1.93103E-06  5.59397E-07 -2.05926E-07 -1.82324E-07  8.51536E-06  1.10574E-05  3.66044E-06 -8.55948E-07 -8.88789E-07
 11.500  1.30740E-06  1.65822E-06  4.94775E-07 -1.88865E-07 -1.88154E-07  7.03702E-06  9.29265E-06  3.20419E-06 -6.73426E-07 -7.95476E-07
 11.600  1.10153E-06  1.42171E-06  4.38120E-07 -1.70616E-07 -1.88735E-07  5.79907E-06  7.78384E-06  2.79402E-06 -5.20017E-07 -7.05262E-07
 11.700  9.26222E-07  1.21609E-06  3.87789E-07 -1.51859E-07 -1.84765E-07  4.76397E-06  6.49594E-06  2.42516E-06 -3.92958E-07 -6.19361E-07
 11.800  7.76873E-07  1.03715E-06  3.42694E-07 -1.33142E-07 -1.76995E-07  3.90024E-06  5.39924E-06  2.09407E-06 -2.89305E-07 -5.38723E-07
 11.900  6.49715E-07  8.81527E-07  3.02114E-07 -1.14898E-07 -1.66207E-07  3.18130E-06  4.46824E-06  1.79801E-06 -2.06079E-07 -4.64042E-07
 12.000  5.41619E-07  7.46447E-07  2.65561E-07 -9.74710E-08 -1.53175E-07  2.58465E-06  3.68082E-06  1.53464E-06 -1.40382E-07 -3.95769E-07
 12.100  4.49945E-07  6.29566E-07  2.32689E-07 -8.11283E-08 -1.38643E-07  2.09118E-06  3.01765E-06  1.30179E-06 -8.94800E-08 -3.34129E-07
 12.200  3.72435E-07  5.28829E-07  2.03224E-07 -6.60665E-08 -1.23294E-07  1.68459E-06  2.46172E-06  1.09735E-06 -5.08640E-08 -2.79152E-07
 12.300  3.07135E-07  4.42400E-07  1.76928E-07 -5.24210E-08 -1.07733E-07  1.35095E-06  1.99802E-06  9.19172E-07 -2.22839E-08 -2.30704E-07
 12.400  2.52343E-07  3.68614E-07  1.53573E-07 -4.02713E-08 -9.24743E-08  1.07840E-06  1.61331E-06  7.65075E-07 -1.76568E-09 -1.88511E-07
 12.500  2.06565E-07  3.05946E-07  1.32931E-07 -2.96472E-08 -7.79303E-08  8.56786E-07  1.29591E-06  6.32847E-07  1.23886E-08 -1.52199E-07
 12.600  1.68489E-07  2.52997E-07  1.14773E-07 -2.05345E-08 -6.44147E-08  6.77475E-07  1.03553E-06  5.20273E-07  2.16120E-08 -1.21320E-07
 12.700  1.36962E-07  2.08489E-07  9.88638E-08 -1.28813E-08 -5.21443E-08  5.33124E-07  8.23169E-07  4.25176E-07  2.70925E-08 -9.53756E-08
 12.800  1.10973E-07  1.71260E-07  8.49758E-08 -6.60456E-09 -4.12479E-08  4.17518E-07  6.50994E-07  3.45455E-07  2.97978E-08 -7.38467E-08
 12.900  8.96431E-08  1.40264E-07  7.28870E-08 -1.59706E-09 -3.17771E-08  3.25421E-07  5.12224E-07  2.79122E-07  3.05027E-08 -5.62096E-08
 13.000  7.22089E-08  1.14567E-07  6.23885E-08  2.26588E-09 -2.37195E-08  2.52442E-07  4.01034E-07  2.24324E-07  2.98165E-08 -4.19539E-08
 13.100  5.80140E-08  9.33468E-08  5.32871E-08  5.11964E-09 -1.70123E-08  1.94918E-07  3.12461E-07  1.79368E-07  2.82103E-08 -3.05944E-08
 13.200  4.64977E-08  7.58830E-08  4.54079E-08  7.10410E-09 -1.15555E-08  1.49818E-07  2.42307E-07  1.42729E-07  2.60407E-08 -2.16809E-08
 13.300  3.71846E-08  6.15545E-08  3.85947E-08  8.35818E-09 -7.22458E-09  1.14642E-07  1.87052E-07  1.13055E-07  2.35723E-08 -1.48038E-08
 13.400  2.96750E-08  4.98291E-08  3.27100E-08  9.01519E-09 -3.88150E-09  8.73479E-08  1.43769E-07  8.91653E-08  2.09964E-08 -9.59740E-09
 13.500  2.36352E-08  4.02557E-08  2.76337E-08  9.19920E-09 -1.38368E-09  6.62761E-08  1.10041E-07  7.00383E-08  1.84467E-08 -5.74098E-09
 13.600  1.87884E-08  3.24549E-08  2.32618E-08  9.02235E-09  4.08537E-10  5.00873E-08  8.38917E-08  5.48041E-08  1.60130E-08 -2.95812E-09
 13.700  1.49067E-08  2.61097E-08  1.95041E-08  8.58322E-09  1.62648E-09  3.77088E-08  6.37156E-08  4.27292E-08  1.37516E-08 -1.01441E-09
 13.800  1.18035E-08  2.09569E-08  1.62826E-08  7.96603E-09  2.38943E-09  2.82866E-08  4.82196E-08  3.32013E-08  1.16942E-08  2.85621E-10
 13.900  9.32682E-09  1.67794E-08  1.35295E-08  7.24064E-09  2.80247E-09  2.11458E-08  3.63697E-08  2.57143E-08  9.85440E-09  1.10230E-09
 14.000  7.35333E-09  1.33982E-08  1.11853E-08  6.46316E-09  2.95553E-09  1.57561E-08  2.73448E-08  1.98538E-08  8.23311E-09  1.56486E-09
 14.100  5.78336E-09  1.06666E-08  9.19798E-09  5.67701E-09  2.92351E-09  1.17041E-08  2.04978E-08  1.52828E-08  6.82257E-09  1.77561E-09
 14.200  4.53654E-09  8.46438E-09  7.52133E-09  4.91438E-09  2.76703E-09  8.66885E-09  1.53216E-08  1.17296E-08  5.60942E-09  1.81400E-09
 14.300  3.54823E-09  6.69318E-09  6.11437E-09  4.19768E-09  2.53376E-09  6.40305E-09  1.14215E-08  8.97617E-09  4.57695E-09  1.74043E-09
 14.400  2.76649E-09  5.27246E-09  4.94052E-09  3.54125E-09  2.26001E-09  4.71707E-09  8.49199E-09  6.84893E-09  3.70685E-09  1.59972E-09
 14.500  2.14962E-09  4.13636E-09  3.96720E-09  2.95291E-09  1.97239E-09  3.46631E-09  6.29797E-09  5.21026E-09  2.98034E-09  1.42419E-09
 14.600  1.66415E-09  3.23096E-09  3.16537E-09  2.43539E-09  1.68955E-09  2.54102E-09  4.65924E-09  3.95155E-09  2.37908E-09  1.23637E-09
 14.700  1.28325E-09  2.51217E-09  2.50925E-09  1.98769E-09  1.42374E-09  1.85832E-09  3.43843E-09  2.98747E-09  1.88571E-09  1.05123E-09
 14.800  9.85399E-10  1.94389E-09  1.97609E-09  1.60617E-09  1.18226E-09  1.35586E-09  2.53121E-09  2.25120E-09  1.48421E-09  8.78119E-10
 14.900  7.53340E-10  1.49661E-09  1.54590E-09  1.28550E-09  9.68709E-10  9.86945E-10  1.85866E-09  1.69059E-09  1.16012E-09  7.22219E-10
 15.000  5.73268E-10  1.14627E-09  1.20131E-09  1.01939E-09  7.84019E-10  7.16702E-10  1.36126E-09  1.26505E-09  9.00568E-10  5.85819E-10
 15.100  4.34137E-10  8.73235E-10  9.27274E-10  8.01182E-10  6.27307E-10  5.19190E-10  9.94288E-10  9.43099E-10  6.94324E-10  4.69233E-10
 15.200  3.27132E-10  6.61585E-10  7.10950E-10  6.24257E-10  4.96542E-10  3.75162E-10  7.24199E-10  7.00345E-10  5.31692E-10  3.71515E-10
 15.300  2.45233E-10  4.98423E-10  5.41436E-10  4.82328E-10  3.89050E-10  2.70377E-10  5.25920E-10  5.17968E-10  4.04417E-10  2.90989E-10
 15.400  1.82868E-10  3.73359E-10  4.09578E-10  3.69628E-10  3.01886E-10  1.94322E-10  3.80743E-10  3.81471E-10  3.05555E-10  2.25616E-10
 15.500  1.35627E-10  2.78058E-10  3.07763E-10  2.81007E-10  2.32087E-10  1.39257E-10  2.74742E-10  2.79718E-10  2.29329E-10  1.73259E-10
 15.600  1.00038E-10  2.05872E-10  2.29719E-10  2.11972E-10  1.76843E-10  9.94910E-11  1.97574E-10  2.04181E-10  1.70985E-10  1.31840E-10
 15.700  7.33765E-11  1.51528E-10  1.70330E-10  1.58680E-10  1.33595E-10  7.08528E-11  1.41570E-10  1.48352E-10  1.26650E-10  9.94474E-11
 15.800  5.35170E-11  1.10866E-10  1.25463E-10  1.17899E-10  1.00087E-10  5.02879E-11  1.01061E-10  1.07274E-10  9.32006E-11  7.43840E-11
 15.900  3.88103E-11  8.06326E-11  9.18096E-11  8.69587E-11  7.43814E-11  3.55657E-11  7.18605E-11  7.71920E-11  6.81425E-11  5.51860E-11
 16.000  2.79836E-11  5.82931E-11  6.67463E-11  6.36767E-11  5.48453E-11  2.50606E-11  5.08899E-11  5.52692E-11  4.95019E-11  4.06212E-11
 16.100  2.00607E-11  4.18905E-11  4.82117E-11  4.62987E-11  4.01322E-11  1.75904E-11  3.58874E-11  3.93719E-11  3.57314E-11  2.96719E-11
 16.200  1.42978E-11  2.99230E-11  3.46006E-11  3.34293E-11  2.91475E-11  1.22976E-11  2.51978E-11  2.79029E-11  2.56285E-11  2.15127E-11
 16.300  1.01312E-11  2.12465E-11  2.46742E-11  2.39719E-11  2.10153E-11  8.56172E-12  1.76133E-11  1.96717E-11  1.82666E-11  1.54837E-11
 16.400  7.13710E-12  1.49957E-11  1.74844E-11  1.70741E-11  1.50439E-11  5.93529E-12  1.22554E-11  1.37955E-11  1.29383E-11  1.10651E-11
 16.500  4.99862E-12  1.05208E-11  1.23120E-11  1.20802E-11  1.06939E-11  4.09647E-12  8.48740E-12  9.62305E-12  9.10744E-12  7.85240E-12
 16.600  3.48055E-12  7.33744E-12  8.61579E-12  8.49086E-12  7.54952E-12  2.81460E-12  5.84985E-12  6.67656E-12  6.37144E-12  5.53438E-12
 16.700  2.40945E-12  5.08698E-12  5.99204E-12  5.92932E-12  5.29367E-12  1.92494E-12  4.01238E-12  4.60726E-12  4.43016E-12  3.87444E-12
 16.800  1.65832E-12  3.50596E-12  4.14179E-12  4.11405E-12  3.68720E-12  1.31031E-12  2.73850E-12  3.16206E-12  3.06168E-12  2.69444E-12
 16.900  1.13475E-12  2.40213E-12  2.84548E-12  2.83648E-12  2.55142E-12  8.87664E-13  1.85974E-12  2.15838E-12  2.10319E-12  1.86163E-12
 17.000  7.72020E-13  1.63621E-12  1.94310E-12  1.94340E-12  1.75410E-12  5.98430E-13  1.25659E-12  1.46523E-12  1.43614E-12  1.27798E-12
 17.100  5.22225E-13  1.10803E-12  1.31896E-12  1.32328E-12  1.19826E-12  4.01457E-13  8.44735E-13  9.89249E-13  9.74824E-13  8.71766E-13
 17.200  3.51235E-13  7.46004E-13  8.89983E-13  8.95519E-13  8.13410E-13  2.67980E-13  5.64954E-13  6.64234E-13  6.57794E-13  5.90955E-13
 17.300  2.34888E-13  4.99373E-13  5.96988E-13  6.02362E-13  5.48733E-13  1.77986E-13  3.75888E-13  4.43561E-13  4.41270E-13  3.98126E-13
 17.400  1.56191E-13  3.32366E-13  3.98109E-13  4.02741E-13  3.67907E-13  1.17616E-13  2.48797E-13  2.94580E-13  2.94298E-13  2.66582E-13
 17.500  1.03275E-13  2.19952E-13  2.63943E-13  2.67673E-13  2.45172E-13  7.73282E-14  1.63819E-13  1.94569E-13  1.95144E-13  1.77425E-13
 17.600  6.79036E-14  1.44735E-13  1.73983E-13  1.76855E-13  1.62400E-13  5.05805E-14  1.07303E-13  1.27811E-13  1.28655E-13  1.17381E-13
 17.700  4.43973E-14  9.47036E-14  1.14028E-13  1.16168E-13  1.06933E-13  3.29150E-14  6.99160E-14  8.35010E-14  8.43361E-14  7.71987E-14
 17.800  2.88669E-14  6.16200E-14  7.43088E-14  7.58639E-14  6.99962E-14  2.13090E-14  4.53169E-14  5.42562E-14  5.49713E-14  5.04745E-14
 17.900  1.86654E-14  3.98706E-14  4.81516E-14  4.92585E-14  4.55508E-14  1.37242E-14  2.92187E-14  3.50629E-14  3.56295E-14  3.28102E-14
 18.000  1.20026E-14  2.56550E-14  3.10269E-14  3.18014E-14  2.94714E-14  8.79350E-15  1.87404E-14  2.25369E-14  2.29640E-14  2.12053E-14
 18.100  7.67596E-15  1.64170E-14  1.98811E-14  2.04150E-14  1.89588E-14  5.60511E-15  1.19568E-14  1.44077E-14  1.47186E-14  1.36269E-14
 18.200  4.88222E-15  1.04480E-14  1.26687E-14  1.30319E-14  1.21268E-14  3.55430E-15  7.58870E-15  9.16132E-15  9.38170E-15  8.70740E-15
 18.300  3.08846E-15  6.61302E-15  8.02834E-15  8.27261E-15  7.71303E-15  2.24219E-15  4.79120E-15  5.79419E-15  5.94711E-15  5.53272E-15
 18.400  1.94321E-15  4.16301E-15  5.05988E-15  5.22236E-15  4.87831E-15  1.40715E-15  3.00917E-15  3.64508E-15  3.74933E-15  3.49595E-15
 18.500  1.21607E-15  2.60657E-15  3.17167E-15  3.27868E-15  3.06830E-15  8.78533E-16  1.88010E-15  2.28091E-15  2.35093E-15  2.19678E-15
 18.600  7.56966E-16  1.62330E-15  1.97735E-15  2.04717E-15  1.91922E-15  5.45672E-16  1.16856E-15  1.41974E-15  1.46614E-15  1.37284E-15
 18.700  4.68684E-16  1.00556E-15  1.22614E-15  1.27130E-15  1.19391E-15  3.37182E-16  7.22540E-16  8.79050E-16  9.09445E-16  8.53255E-16
 18.800  2.88657E-16  6.19590E-16  7.56259E-16  7.85229E-16  7.38671E-16  2.07282E-16  4.44447E-16  5.41420E-16  5.61117E-16  5.27451E-16
 18.900  1.76846E-16  3.79756E-16  4.63969E-16  4.82405E-16  4.54548E-16  1.26772E-16  2.71977E-16  3.31725E-16  3.44365E-16  3.24298E-16
 19.000  1.07777E-16  2.31536E-16  2.83143E-16  2.94788E-16  2.78210E-16  7.71369E-17  1.65579E-16  2.02189E-16  2.10226E-16  1.98326E-16
 19.100  6.53418E-17  1.40429E-16  1.71884E-16  1.79185E-16  1.69373E-16  4.66959E-17  1.00287E-16  1.22596E-16  1.27663E-16  1.20643E-16
 19.200  3.94091E-17  8.47292E-17  1.03798E-16  1.08344E-16  1.02567E-16  2.81242E-17  6.04306E-17  7.39519E-17  7.71207E-17  7.30005E-17
 19.300  2.36458E-17  5.08575E-17  6.23561E-17  6.51665E-17  6.17844E-17  1.68528E-17  3.62286E-17  4.43795E-17  4.63459E-17  4.39403E-17
 19.400  1.41148E-17  3.03693E-17  3.72661E-17  3.89923E-17  3.70227E-17  1.00476E-17  2.16090E-17  2.64963E-17  2.77076E-17  2.63103E-17
 19.500  8.38235E-18  1.80419E-17  2.21568E-17  2.32101E-17  2.20693E-17  5.96018E-18  1.28237E-17  1.57386E-17  1.64795E-17  1.56721E-17
 19.600  4.95268E-18  1.06636E-17  1.31059E-17  1.37446E-17  1.30874E-17  3.51775E-18  7.57175E-18  9.30109E-18  9.75116E-18  9.28711E-18
 19.700  2.91142E-18  6.27072E-18  7.71273E-18  8.09758E-18  7.72102E-18  2.06581E-18  4.44825E-18  5.46888E-18  5.74047E-18  5.47513E-18
 19.800  1.70283E-18  3.66882E-18  4.51582E-18  4.74630E-18  4.53171E-18  1.20709E-18  2.60016E-18  3.19939E-18  3.36222E-18  3.21130E-18
 19.900  9.90943E-19  2.13570E-18  2.63066E-18  2.76786E-18  2.64623E-18  7.01809E-19  1.51230E-18  1.86230E-18  1.95931E-18  1.87392E-18
  67 168 200   0.100
  0.000  5.77576E-02 -3.10317E-16 -4.57967E-16 -4.75352E-16  1.14439E-16  9.56761E-02 -4.96507E-16 -7.70217E-16 -7.88084E-16 -1.51632E-15
  0.100  5.77919E-02 -5.17142E-05 -3.53252E-08 -6.28967E-12 -2.21726E-15  9.56484E-02  7.85955E-05  4.84986E-08 -1.56498E-12 -6.53734E-15
  0.200  5.78940E-02 -2.04081E-04 -5.59766E-07 -3.98152E-10 -1.46797E-13  9.55666E-02  3.09136E-04  7.65386E-07 -1.03045E-10 -1.03167E-12
  0.300  5.80610E-02 -4.48911E-04 -2.78844E-06 -4.45376E-09 -3.63513E-12  9.54348E-02  6.76241E-04  3.78689E-06 -1.22788E-09 -2.61850E-11
  0.400  5.82882E-02 -7.73002E-04 -8.61537E-06 -2.43967E-08 -3.49084E-11  9.52595E-02  1.15543E-03  1.15894E-05 -7.30418E-09 -2.58901E-10
  0.500  5.85695E-02 -1.15879E-03 -2.04274E-05 -9.00732E-08 -1.97771E-10  9.50491E-02  1.71480E-03  2.71440E-05 -2.97193E-08 -1.52302E-09
  0.600  5.88972E-02 -1.58523E-03 -4.08640E-05 -2.58407E-07 -7.98751E-10  9.48135E-02  2.31709E-03  5.34911E-05 -9.49466E-08 -6.44277E-09
  0.700  5.92625E-02 -2.02882E-03 -7.25419E-05 -6.21451E-07 -2.54366E-09  9.45634E-02  2.92224E-03  9.32829E-05 -2.56000E-07 -2.16841E-08
  0.800  5.96560E-02 -2.46481E-03 -1.17767E-04 -1.31087E-06 -6.78134E-09  9.43096E-02  3.48992E-03  1.48348E-04 -6.07715E-07 -6.16720E-08
  0.900  6.00678E-02 -2.86842E-03 -1.78254E-04 -2.49704E-06 -1.57261E-08  9.40625E-02  3.98217E-03  2.19325E-04 -1.30486E-06 -1.54088E-07
  1.000  6.04879E-02 -3.21613E-03 -2.54884E-04 -4.38172E-06 -3.25517E-08  9.38317E-02  4.36575E-03  3.05413E-04 -2.58099E-06 -3.47274E-07
  1.100  6.09066E-02 -3.48683E-03 -3.47507E-04 -7.18386E-06 -6.12288E-08  9.36249E-02  4.61417E-03  4.04254E-04 -4.76483E-06 -7.19403E-07
  1.200  6.13146E-02 -3.66296E-03 -4.54826E-04 -1.11195E-05 -1.05989E-07  9.34483E-02  4.70924E-03  5.11979E-04 -8.29044E-06 -1.38894E-06
  1.300  6.17039E-02 -3.73138E-03 -5.74355E-04 -1.63770E-05 -1.70344E-07  9.33060E-02  4.64203E-03  6.23400E-04 -1.36972E-05 -2.52560E-06
  1.400  6.20672E-02 -3.68404E-03 -7.02473E-04 -2.30907E-05 -2.55682E-07  9.31998E-02  4.41324E-03  7.32335E-04 -2.16162E-05 -4.36055E-06
  1.500  6.23987E-02 -3.51842E-03 -8.34560E-04 -3.13143E-05 -3.59564E-07  9.31296E-02  4.03300E-03  8.32042E-04 -3.27407E-05 -7.19443E-06
  1.600  6.26940E-02 -3.23765E-03 -9.65219E-04 -4.09987E-05 -4.73978E-07  9.30932E-02  3.52002E-03  9.15714E-04 -4.77808E-05 -1.14017E-05
  1.700  6.29503E-02 -2.85030E-03 -1.08856E-03 -5.19750E-05 -5.83906E-07  9.30868E-02  2.90036E-03  9.76998E-04 -6.74035E-05 -1.74293E-05
  1.800  6.31661E-02 -2.36996E-03 -1.19853E-03 -6.39462E-05 -6.66633E-07  9.31051E-02  2.20569E-03  1.01049E-03 -9.21618E-05 -2.57887E-05
  1.900  6.33415E-02 -1.81454E-03 -1.28927E-03 -7.64875E-05 -6.92212E-07  9.31416E-02  1.47136E-03  1.01220E-03 -1.22420E-04 -3.70400E-05
  2.000  6.34779E-02 -1.20531E-03 -1.35548E-03 -8.90555E-05 -6.25444E-07  9.31891E-02  7.34300E-04  9.79835E-04 -1.58280E-04 -5.17676E-05
  2.100  6.35777E-02 -5.65828E-04 -1.39274E-03 -1.01006E-04 -4.29520E-07  9.32403E-02  3.08425E-05  9.13127E-04 -1.99516E-04 -7.05476E-05
  2.200  6.36446E-02  7.92325E-05 -1.39782E-03 -1.11620E-04 -7.12812E-08  9.32874E-02 -6.05271E-04  8.13860E-04 -2.45532E-04 -9.39084E-05
  2.300  6.36827E-02  7.05305E-04 -1.36887E-03 -1.20131E-04  4.72285E-07  9.33235E-02 -1.14474E-03  6.85875E-04 -2.95329E-04 -1.22286E-04
  2.400  6.36970E-02  1.28911E-03 -1.30560E-03 -1.25755E-04  1.20698E-06  9.33420E-02 -1.56423E-03  5.34895E-04 -3.47511E-04 -1.55976E-04
  2.500  6.36926E-02  1.80972E-03 -1.20931E-03 -1.27728E-04  2.11472E-06  9.33374E-02 -1.84751E-03  3.68242E-04 -4.00311E-04 -1.95087E-04
  2.600  6.36746E-02  2.24955E-03 -1.08291E-03 -1.25328E-04  3.14838E-06  9.33054E-02 -1.98614E-03  1.94437E-04 -4.51646E-04 -2.39496E-04
  2.700  6.36482E-02  2.59506E-03 -9.30757E-04 -1.17907E-04  4.22939E-06  9.32430E-02 -1.97973E-03  2.27157E-05 -4.99196E-04 -2.88810E-04
  2.800  6.36181E-02  2.83735E-03 -7.58551E-04 -1.04915E-04  5.24915E-06  9.31485E-02 -1.83570E-03 -1.37515E-04 -5.40498E-04 -3.42342E-04
  2.900  6.35882E-02  2.97246E-03 -5.73044E-04 -8.59203E-05  6.07521E-06  9.30217E-02 -1.56853E-03 -2.77269E-04 -5.73063E-04 -3.99092E-04
  3.000  6.35617E-02  3.00148E-03 -3.81791E-04 -6.06319E-05  6.56238E-06  9.28634E-02 -1.19865E-03 -3.88568E-04 -5.94495E-04 -4.57751E-04
  3.100  6.35407E-02  2.93051E-03 -1.92833E-04 -2.89208E-05  6.56878E-06  9.26753E-02 -7.50961E-04 -4.65008E-04 -6.02615E-04 -5.16716E-04
  3.200  6.35258E-02  2.77026E-03 -1.43737E-05  9.15563E-06  5.97560E-06  9.24597E-02 -2.53030E-04 -5.02264E-04 -5.95585E-04 -5.74120E-04
  3.300  6.35164E-02  2.53570E-03  1.45541E-04  5.33271E-05  4.70923E-06  9.22190E-02  2.66829E-04 -4.98490E-04 -5.72030E-04 -6.27886E-04
  3.400  6.35096E-02  2.24538E-03  2.79343E-04  1.03080E-04  2.76305E-06  9.19548E-02  7.81561E-04 -4.54594E-04 -5.31153E-04 -6.75789E-04
  3.500  6.35013E-02  1.92077E-03  3.80243E-04  1.57629E-04  2.16457E-07  9.16679E-02  1.26729E-03 -3.74344E-04 -4.72836E-04 -7.15538E-04
  3.600  6.34847E-02  1.58541E-03  4.42510E-04  2.15882E-04 -2.75205E-06  9.13573E-02  1.70507E-03 -2.64288E-04 -3.97729E-04 -7.44865E-04
  3.700  6.34516E-02  1.26411E-03  4.61718E-04  2.76421E-04 -5.86055E-06  9.10199E-02  2.08225E-03 -1.33469E-04 -3.07326E-04 -7.61630E-04
  3.800  6.33915E-02  9.81981E-04  4.34965E-04  3.37487E-04 -8.73026E-06  9.06501E-02  2.39353E-03  7.05341E-06 -2.04003E-04 -7.63921E-04
  3.900  6.32920E-02  7.63569E-04  3.61052E-04  3.96987E-04 -1.09045E-05  9.02396E-02  2.64137E-03  1.44878E-04 -9.10364E-05 -7.50173E-04
  4.000  6.31394E-02  6.31911E-04  2.40618E-04  4.52516E-04 -1.18801E-05  8.97772E-02  2.83601E-03  2.67079E-04  2.74341E-05 -7.19264E-04
  4.100  6.29187E-02  6.07664E-04  7.62173E-05  5.01423E-04 -1.11499E-05  8.92492E-02  2.99479E-03  3.61133E-04  1.46484E-04 -6.70618E-04
  4.200  6.26141E-02  7.08263E-04 -1.27664E-04  5.40888E-04 -8.25307E-06  8.86397E-02  3.14105E-03  4.15877E-04  2.60545E-04 -6.04284E-04
  4.300  6.22096E-02  9.47176E-04 -3.64658E-04  5.68049E-04 -2.83045E-06  8.79311E-02  3.30245E-03  4.22439E-04  3.63608E-04 -5.20997E-04
  4.400  6.16898E-02  1.33325E-03 -6.26659E-04  5.80147E-04  5.32263E-06  8.71051E-02  3.50906E-03  3.75052E-04  4.49483E-04 -4.22212E-04
  4.500  6.10402E-02  1.87022E-03 -9.04039E-04  5.74696E-04  1.62097E-05  8.61433E-02  3.79112E-03  2.71675E-04  5.12109E-04 -3.10103E-04
  4.600  6.02480E-02  2.55637E-03 -1.18597E-03  5.49660E-04  2.95999E-05  8.50284E-02  4.17678E-03  1.14376E-04  5.45913E-04 -1.87519E-04
  4.700  5.93027E-02  3.38435E-03 -1.46080E-03  5.03637E-04  4.50119E-05  8.37447E-02  4.68990E-03 -9.05910E-05  5.46167E-04 -5.79112E-05
  4.800  5.81966E-02  4.34132E-03 -1.71657E-03  4.36016E-04  6.17199E-05  8.22796E-02  5.34809E-03 -3.33022E-04  5.09348E-04  7.47943E-05
  4.900  5.69253E-02  5.40919E-03 -1.94149E-03  3.47105E-04  7.87823E-05  8.06237E-02  6.16119E-03 -5.99315E-04  4.33456E-04  2.06351E-04
  5.000  5.54879E-02  6.56515E-03 -2.12453E-03  2.38211E-04  9.50923E-05  7.87717E-02  7.13016E-03 -8.73297E-04  3.18254E-04  3.32381E-04
  5.100  5.38871E-02  7.78242E-03 -2.25599E-03  1.11662E-04  1.09449E-04  7.67225E-02  8.24659E-03 -1.13728E-03  1.65425E-04  4.48586E-04
  5.200  5.21293E-02  9.03118E-03 -2.32798E-03 -2.92410E-05  1.20642E-04  7.44798E-02  9.49282E-03 -1.37325E-03 -2.14024E-05  5.50964E-04
  5.300  5.02242E-02  1.02796E-02 -2.33492E-03 -1.80341E-04  1.27540E-04  7.20515E-02  1.08426E-02 -1.56411E-03 -2.36746E-04  6.36021E-04
  5.400  4.81851E-02  1.14952E-02 -2.27387E-03 -3.36804E-04  1.29187E-04  6.94495E-02  1.22624E-02 -1.69488E-03 -4.73500E-04  7.00961E-04
  5.500  4.60277E-02  1.26457E-02 -2.14475E-03 -4.93354E-04  1.24878E-04  6.66896E-02  1.37131E-02 -1.75370E-03 -7.23278E-04  7.43840E-04
  5.600  4.37702E-02  1.37008E-02 -1.95037E-03 -6.44549E-04  1.14227E-04  6.37907E-02  1.51517E-02 -1.73273E-03 -9.76857E-04  7.63676E-04
  5.700  4.14326E-02  1.46328E-02 -1.69639E-03 -7.85077E-04  9.72087E-05  6.07742E-02  1.65342E-02 -1.62857E-03 -1.22469E-03  7.60493E-04
  5.800  3.90358E-02  1.54181E-02 -1.39099E-03 -9.10045E-04  7.41689E-05  5.76634E-02  1.78170E-02 -1.44255E-03 -1.45742E-03  7.35319E-04
  5.900  3.66016E-02  1.60377E-02 -1.04452E-03 -1.01525E-03  4.58147E-05  5.44828E-02  1.89599E-02 -1.18056E-03 -1.66645E-03  6.90102E-04
  6.000  3.41517E-02  1.64778E-02 -6.68947E-04 -1.09741E-03  1.31708E-05  5.12575E-02  1.99273E-02 -8.52596E-04 -1.84437E-03  6.27594E-04
  6.100  3.17074E-02  1.67306E-02 -2.77218E-04 -1.15430E-03 -2.24854E-05  4.80125E-02  2.06903E-02 -4.72065E-04 -1.98536E-03  5.51170E-04
  6.200  2.92891E-02  1.67940E-02  1.17364E-04 -1.18489E-03 -5.97075E-05  4.47726E-02  2.12273E-02 -5.48579E-05 -2.08545E-03  4.64623E-04
  6.300  2.69157E-02  1.66715E-02  5.01817E-04 -1.18933E-03 -9.69734E-05  4.15614E-02  2.15255E-02  3.81688E-04 -2.14269E-03  3.71943E-04
  6.400  2.46048E-02  1.63721E-02  8.64101E-04 -1.16887E-03 -1.32782E-04  3.84015E-02  2.15805E-02  8.19867E-04 -2.15712E-03  2.77092E-04
  6.500  2.23720E-02  1.59093E-02  1.19365E-03 -1.12580E-03 -1.65744E-04  3.53136E-02  2.13960E-02  1.24265E-03 -2.13065E-03  1.83799E-04
  6.600  2.02308E-02  1.53007E-02  1.48182E-03 -1.06318E-03 -1.94662E-04  3.23171E-02  2.09839E-02  1.63459E-03 -2.06687E-03  9.53766E-05
  6.700  1.81927E-02  1.45668E-02  1.72215E-03 -9.84699E-04 -2.18589E-04  2.94289E-02  2.03624E-02  1.98260E-03 -1.97068E-03  1.45874E-05
  6.800  1.62669E-02  1.37304E-02  1.91057E-03 -8.94380E-04 -2.36873E-04  2.66640E-02  1.95555E-02  2.27649E-03 -1.84793E-03 -5.64515E-05
  6.900  1.44607E-02  1.28153E-02  2.04534E-03 -7.96359E-04 -2.49170E-04  2.40352E-02  1.85911E-02  2.50927E-03 -1.70503E-03 -1.16311E-04
  7.000  1.27789E-02  1.18455E-02  2.12701E-03 -6.94659E-04 -2.55440E-04  2.15526E-02  1.75000E-02  2.67722E-03 -1.54853E-03 -1.64248E-04
  7.100  1.12244E-02  1.08443E-02  2.15812E-03 -5.92988E-04 -2.55925E-04  1.92242E-02  1.63140E-02  2.77982E-03 -1.38479E-03 -2.00157E-04
  7.200  9.79825E-03  9.83358E-03  2.14291E-03 -4.94587E-04 -2.51105E-04  1.70556E-02  1.50648E-02  2.81939E-03 -1.21966E-03 -2.24496E-04
  7.300  8.49949E-03  8.83330E-03  2.08693E-03 -4.02122E-04 -2.41651E-04  1.50498E-02  1.37829E-02  2.80066E-03 -1.05824E-03 -2.38177E-04
  7.400  7.32566E-03  7.86076E-03  1.99665E-03 -3.17621E-04 -2.28360E-04  1.32076E-02  1.24962E-02  2.73026E-03 -9.04728E-04 -2.42456E-04
  7.500  6.27281E-03  6.93051E-03  1.87900E-03 -2.42466E-04 -2.12103E-04  1.15276E-02  1.12297E-02  2.61615E-03 -7.62351E-04 -2.38808E-04
  7.600  5.33575E-03  6.05413E-03  1.74105E-03 -1.77418E-04 -1.93767E-04  1.00066E-02  1.00048E-02  2.46701E-03 -6.33336E-04 -2.28811E-04
  7.700  4.50825E-03  5.24024E-03  1.58962E-03 -1.22679E-04 -1.74204E-04  8.63926E-03  8.83871E-03  2.29174E-03 -5.18978E-04 -2.14050E-04
  7.800  3.78329E-03  4.49460E-03  1.43102E-03 -7.79778E-05 -1.54195E-04  7.41892E-03  7.74493E-03  2.09899E-03 -4.19736E-04 -1.96021E-04
  7.900  3.15325E-03  3.82032E-03  1.27087E-03 -4.26673E-05 -1.34417E-04  6.33757E-03  6.73291E-03  1.89678E-03 -3.35366E-04 -1.76079E-04
  8.000  2.61012E-03  3.21819E-03  1.11390E-03 -1.58312E-05 -1.15427E-04  5.38618E-03  5.80849E-03  1.69221E-03 -2.65072E-04 -1.55383E-04
  8.100  2.14576E-03  2.68697E-03  9.63918E-04  3.61705E-06 -9.76552E-05  4.55503E-03  4.97428E-03  1.49131E-03 -2.07660E-04 -1.34882E-04
  8.200  1.75200E-03  2.22383E-03  8.23815E-04  1.68418E-05 -8.14043E-05  3.83394E-03  4.23005E-03  1.29890E-03 -1.61682E-04 -1.15303E-04
  8.300  1.42088E-03  1.82467E-03  6.95569E-04  2.50082E-05 -6.68589E-05  3.21260E-03  3.57329E-03  1.11862E-03 -1.25568E-04 -9.71656E-05
  8.400  1.14474E-03  1.48450E-03  5.80349E-04  2.92206E-05 -5.40993E-05  2.68073E-03  2.99967E-03  9.53008E-04 -9.77348E-05 -8.07996E-05
  8.500  9.16355E-04  1.19777E-03  4.78620E-04  3.04789E-05 -4.31188E-05  2.22834E-03  2.50356E-03  8.03547E-04 -7.66705E-05 -6.63725E-05
  8.600  7.29023E-04  9.58678E-04  3.90264E-04  2.96509E-05 -3.38424E-05  1.84591E-03  2.07843E-03  6.70859E-04 -6.09927E-05 -5.39207E-05
  8.700  5.76613E-04  7.61389E-04  3.14709E-04  2.74593E-05 -2.61455E-05  1.52447E-03  1.71730E-03  5.54840E-04 -4.94866E-05 -4.33808E-05
  8.800  4.53605E-04  6.00257E-04  2.51056E-04  2.44810E-05 -1.98711E-05  1.25575E-03  1.41302E-03  4.54831E-04 -4.11218E-05 -3.46190E-05
  8.900  3.55099E-04  4.69962E-04  1.98191E-04  2.11556E-05 -1.48453E-05  1.03221E-03  1.15860E-03  3.69767E-04 -3.50538E-05 -2.74575E-05
  9.000  2.76804E-04  3.65615E-04  1.54887E-04  1.78000E-05 -1.08897E-05  8.47104E-04  9.47329E-04  2.98319E-04 -3.06132E-05 -2.16962E-05
  9.100  2.15017E-04  2.82820E-04  1.19882E-04  1.46269E-05 -7.83115E-06  6.94418E-04  7.72998E-04  2.39017E-04 -2.72878E-05 -1.71296E-05
  9.200  1.66582E-04  2.17706E-04  9.19432E-05  1.17648E-05 -5.50857E-06  5.68903E-04  6.29947E-04  1.90344E-04 -2.46995E-05 -1.35600E-05
  9.300  1.28844E-04  1.66923E-04  6.99175E-05  9.27709E-06 -3.77767E-06  4.66012E-04  5.13127E-04  1.50813E-04 -2.25804E-05 -1.08050E-05
  9.400  9.95999E-05  1.27622E-04  5.27559E-05  7.17991E-06 -2.51303E-06  3.81850E-04  4.18106E-04  1.19023E-04 -2.07493E-05 -8.70310E-06
  9.500  7.70403E-05  9.74202E-05  3.95334E-05  5.45757E-06 -1.60873E-06  3.13114E-04  3.41055E-04  9.36922E-05 -1.90906E-05 -7.11519E-06
  9.600  5.97001E-05  7.43553E-05  2.94529E-05  4.07492E-06 -9.77639E-07  2.57025E-04  2.78709E-04  7.36779E-05 -1.75361E-05 -5.92483E-06
  9.700  4.64049E-05  5.68324E-05  2.18438E-05  2.98695E-06 -5.49814E-07  2.11271E-04  2.28321E-04  5.79855E-05 -1.60500E-05 -5.03674E-06
  9.800  3.62239E-05  4.35744E-05  1.61525E-05  2.14579E-06 -2.70418E-07  1.73934E-04  1.87607E-04  4.57650E-05 -1.46176E-05 -4.37459E-06
  9.900  2.84271E-05  3.35714E-05  1.19309E-05  1.50534E-06 -9.73947E-08  1.43441E-04  1.54681E-04  3.63026E-05 -1.32368E-05 -3.87832E-06
 10.000  2.24475E-05  2.60346E-05  8.82266E-06  1.02409E-06  8.40100E-10  1.18505E-04  1.28007E-04  2.90085E-05 -1.19117E-05 -3.50154E-06
 10.100  1.78483E-05  2.03543E-05  6.54872E-06  6.66461E-07  4.75611E-08  9.80768E-05  1.06340E-04  2.34021E-05 -1.06493E-05 -3.20896E-06
 10.200  1.42958E-05  1.60647E-05  4.89386E-06  4.03179E-07  5.96371E-08  8.13083E-05  8.86773E-05  1.90969E-05 -9.45677E-06 -2.97417E-06
 10.300  1.15365E-05  1.28127E-05  3.69431E-06  2.10929E-07  4.91363E-08  6.75121E-05  7.42185E-05  1.57859E-05 -8.33999E-06 -2.77774E-06
 10.400  9.37920E-06  1.03328E-05  2.82693E-06  7.16791E-08  2.46234E-08  5.61337E-05  6.23256E-05  1.32278E-05 -7.30331E-06 -2.60569E-06
 10.500  7.67973E-06  8.42689E-06  2.20012E-06 -2.81875E-08 -7.83620E-09  4.67259E-05  5.24928E-05  1.12353E-05 -6.34921E-06 -2.44816E-06
 10.600  6.32995E-06  6.94799E-06  1.74637E-06 -9.87582E-08 -4.39293E-08  3.89279E-05  4.43195E-05  9.66445E-06 -5.47849E-06 -2.29852E-06
 10.700  5.24867E-06  5.78734E-06  1.41633E-06 -1.47405E-07 -8.05631E-08  3.24488E-05  3.74894E-05  8.40604E-06 -4.69044E-06 -2.15252E-06
 10.800  4.37489E-06  4.86479E-06  1.17414E-06 -1.79481E-07 -1.15502E-07  2.70535E-05  3.17525E-05  7.37807E-06 -3.98309E-06 -2.00776E-06
 10.900  3.66267E-06  4.12143E-06  9.93961E-07 -1.98885E-07 -1.47135E-07  2.25517E-05  2.69109E-05  6.51993E-06 -3.35349E-06 -1.86316E-06
 11.000  3.07728E-06  3.51399E-06  8.57256E-07 -2.08495E-07 -1.74322E-07  1.87889E-05  2.28079E-05  5.78747E-06 -2.79788E-06 -1.71861E-06
 11.100  2.59238E-06  3.01067E-06  7.50845E-07 -2.10484E-07 -1.96314E-07  1.56397E-05  1.93187E-05  5.14910E-06 -2.31187E-06 -1.57470E-06
 11.200  2.18786E-06  2.58818E-06  6.65446E-07 -2.06545E-07 -2.12690E-07  1.30013E-05  1.63435E-05  4.58270E-06 -1.89062E-06 -1.43243E-06
 11.300  1.84827E-06  2.22936E-06  5.94603E-07 -1.98043E-07 -2.23318E-07  1.07899E-05  1.38019E-05  4.07314E-06 -1.52896E-06 -1.29306E-06
 11.400  1.56169E-06  1.92160E-06  5.33908E-07 -1.86114E-07 -2.28326E-07  8.93624E-06  1.16287E-05  3.61036E-06 -1.22154E-06 -1.15793E-06
 11.500  1.31882E-06  1.65558E-06  4.80418E-07 -1.71720E-07 -2.28056E-07  7.38316E-06  9.77038E-06  3.18783E-06 -9.62935E-07 -1.02832E-06
 11.600  1.11235E-06  1.42432E-06  4.32231E-07 -1.55690E-07 -2.23032E-07  6.08319E-06  8.18250E-06  2.80143E-06 -7.47759E-07 -9.05431E-07
 11.700  9.36498E-07  1.22258E-06  3.88166E-07 -1.38739E-07 -2.13909E-07  4.99669E-06  6.82787E-06  2.44855E-06 -5.70774E-07 -7.90236E-07
 11.800  7.86587E-07  1.04633E-06  3.47529E-07 -1.21477E-07 -2.01434E-07  4.09038E-06  5.67492E-06  2.12749E-06 -4.26973E-07 -6.83499E-07
 11.900  6.58819E-07  8.92379E-07  3.09939E-07 -1.04417E-07 -1.86392E-07  3.33625E-06  4.69656E-06  1.83694E-06 -3.11656E-07 -5.85734E-07
 12.000  5.50052E-07  7.58131E-07  2.75201E-07 -8.79800E-08 -1.69569E-07  2.71056E-06  3.86933E-06  1.57576E-06 -2.20485E-07 -4.97209E-07
 12.100  4.57648E-07  6.41404E-07  2.43221E-07 -7.24990E-08 -1.51713E-07  2.19317E-06  3.17274E-06  1.34272E-06 -1.49521E-07 -4.17964E-07
 12.200  3.79362E-07  5.40302E-07  2.13941E-07 -5.82237E-08 -1.33506E-07  1.76691E-06  2.58883E-06  1.13647E-06 -9.52476E-08 -3.47830E-07
 12.300  3.13262E-07  4.53130E-07  1.87309E-07 -4.53262E-08 -1.15537E-07  1.41716E-06  2.10177E-06  9.55439E-07 -5.45731E-08 -2.86460E-07
 12.400  2.57665E-07  3.78345E-07  1.63252E-07 -3.39083E-08 -9.82951E-08  1.13143E-06  1.69762E-06  7.97889E-07 -2.48218E-08 -2.33367E-07
 12.500  2.11101E-07  3.14527E-07  1.41670E-07 -2.40094E-08 -8.21592E-08  8.99078E-07  1.36407E-06  6.61937E-07 -3.71320E-09 -1.87959E-07
 12.600  1.72274E-07  2.60365E-07  1.22439E-07 -1.56152E-08 -6.74008E-08  7.11045E-07  1.09035E-06  5.45608E-07  1.06673E-08 -1.49570E-07
 12.700  1.40049E-07  2.14648E-07  1.05407E-07 -8.66711E-09 -5.41907E-08  5.59636E-07  8.67014E-07  4.46891E-07  1.99034E-08 -1.17494E-07
 12.800  1.13427E-07  1.76266E-07  9.04086E-08 -3.07152E-09 -4.26097E-08  4.38342E-07  6.85846E-07  3.63796E-07  2.52852E-08 -9.10142E-08
 12.900  9.15349E-08  1.44210E-07  7.72687E-08  1.29068E-09 -3.26624E-08  3.41682E-07  5.39745E-07  2.94397E-07  2.78481E-08 -6.94240E-08
 13.000  7.36134E-08  1.17567E-07  6.58095E-08  4.55539E-09 -2.42924E-08  2.65058E-07  4.22614E-07  2.36875E-07  2.84099E-08 -5.20466E-08
 13.100  5.90061E-08  9.55271E-08  5.58569E-08  6.86732E-09 -1.73970E-08  2.04641E-07  3.29255E-07  1.89545E-07  2.76057E-08 -3.82493E-08
 13.200  4.71492E-08  7.73729E-08  4.72448E-08  8.37299E-09 -1.18416E-08  1.57255E-07  2.55270E-07  1.50872E-07  2.59204E-08 -2.74523E-08
 13.300  3.75624E-08  6.24789E-08  3.98183E-08  9.21486E-09 -7.47309E-09  1.20285E-07  1.96971E-07  1.19483E-07  2.37165E-08 -1.91351E-08
 13.400  2.98394E-08  5.03046E-08  3.34350E-08  9.52684E-09 -4.13022E-09  9.15928E-08  1.51285E-07  9.41680E-08  2.12587E-08 -1.28385E-08
 13.500  2.36391E-08  4.03867E-08  2.79662E-08  9.43089E-09 -1.65286E-09  6.94383E-08  1.15678E-07  7.38741E-08  1.87350E-08 -8.16432E-09
 13.600  1.86768E-08  3.23324E-08  2.32963E-08  9.03491E-09  1.11437E-10  5.24180E-08  8.80698E-08  5.76982E-08  1.62736E-08 -4.77284E-09
 13.700  1.47172E-08  2.58106E-08  1.93224E-08  8.43160E-09  1.30262E-09  3.94062E-08  6.67727E-08  4.48743E-08  1.39577E-08 -2.37908E-09
 13.800  1.15664E-08  2.05443E-08  1.59533E-08  7.69831E-09  2.04526E-09  2.95061E-08  5.04238E-08  3.47596E-08  1.18365E-08 -7.47683E-10
 13.900  9.06579E-09  1.63032E-08  1.31085E-08  6.89755E-09  2.44708E-09  2.20083E-08  3.79320E-08  2.68200E-08  9.93459E-09  3.12584E-10
 14.000  7.08620E-09  1.28970E-08  1.07167E-08  6.07807E-09  2.59877E-09  1.63550E-08  2.84300E-08  2.06161E-08  8.25897E-09  9.54514E-10
 14.100  5.52300E-09  1.01688E-08  8.71525E-09  5.27628E-09  2.57465E-09  1.21107E-08  2.12331E-08  1.57893E-08  6.80474E-09  1.29809E-09
 14.200  4.29174E-09  7.98971E-09  7.04881E-09  4.51793E-09  2.43400E-09  8.93710E-09  1.58041E-08  1.20494E-08  5.55915E-09  1.43579E-09
 14.300  3.32444E-09  6.25450E-09  5.66875E-09  3.81982E-09  2.22272E-09  6.57347E-09  1.17247E-08  9.16292E-09  4.50481E-09  1.43747E-09
 14.400  2.56657E-09  4.87711E-09  4.53232E-09  3.19152E-09  1.97523E-09  4.81961E-09  8.67069E-09  6.94353E-09  3.62194E-09  1.35473E-09
 14.500  1.97449E-09  3.78750E-09  3.60205E-09  2.63693E-09  1.71638E-09  3.52285E-09  6.39232E-09  5.24329E-09  2.89006E-09  1.22466E-09
 14.600  1.51334E-09  2.92869E-09  2.84526E-09  2.15573E-09  1.46323E-09  2.56731E-09  4.69835E-09  3.94543E-09  2.28904E-09  1.07313E-09
 14.700  1.15535E-09  2.25444E-09  2.23351E-09  1.74459E-09  1.22676E-09  1.86549E-09  3.44294E-09  2.95823E-09  1.79991E-09  9.17416E-10
 14.800  8.78414E-10  1.72730E-09  1.74226E-09  1.39823E-09  1.01328E-09  1.35163E-09  2.51546E-09  2.20998E-09  1.40525E-09  7.68451E-10
 14.900  6.64984E-10  1.31699E-09  1.35040E-09  1.11021E-09  8.25710E-10  9.76531E-10  1.83235E-09  1.64486E-09  1.08945E-09  6.32547E-10
 15.000  5.01154E-10  9.99119E-10  1.03996E-09  8.73600E-10  6.64543E-10  7.03522E-10  1.33073E-09  1.21959E-09  8.38794E-10  5.12780E-10
 15.100  3.75927E-10  7.54058E-10  7.95718E-10  6.81430E-10  5.28685E-10  5.05388E-10  9.63468E-10  9.00728E-10  6.41403E-10  4.10046E-10
 15.200  2.80635E-10  5.66095E-10  6.04891E-10  5.27037E-10  4.16065E-10  3.62003E-10  6.95385E-10  6.62559E-10  4.87152E-10  3.23845E-10
 15.300  2.08460E-10  4.22690E-10  4.56841E-10  4.04268E-10  3.24096E-10  2.58531E-10  5.00284E-10  4.85350E-10  3.67523E-10  2.52854E-10
 15.400  1.54060E-10  3.13877E-10  3.42784E-10  3.07606E-10  2.50008E-10  1.84076E-10  3.58731E-10  3.54027E-10  2.75434E-10  1.95332E-10
 15.500  1.13265E-10  2.31774E-10  2.55533E-10  2.32219E-10  1.91068E-10  1.30654E-10  2.56352E-10  2.57109E-10  2.05062E-10  1.49391E-10
 15.600  8.28310E-11  1.70180E-10  1.89255E-10  1.73961E-10  1.44723E-10  9.24382E-11  1.82545E-10  1.85887E-10  1.51674E-10  1.13176E-10
 15.700  6.02484E-11  1.24240E-10  1.39262E-10  1.29338E-10  1.08678E-10  6.51825E-11  1.29514E-10  1.33779E-10  1.11459E-10  8.49690E-11
 15.800  4.35834E-11  9.01788E-11  1.01815E-10  9.54511E-11  8.09329E-11  4.58049E-11  9.15426E-11  9.58268E-11  8.13804E-11  6.32418E-11
 15.900  3.13539E-11  6.50761E-11  7.39593E-11  6.99319E-11  5.97853E-11  3.20731E-11  6.44520E-11  6.83133E-11  5.90396E-11  4.66797E-11
 16.000  2.24303E-11  4.66875E-11  5.33819E-11  5.08701E-11  4.38175E-11  2.23751E-11  4.51964E-11  4.84625E-11  4.25605E-11  3.41786E-11
 16.100  1.59563E-11  3.32992E-11  3.82850E-11  3.67446E-11  3.18693E-11  1.55500E-11  3.15627E-11  3.42100E-11  3.04879E-11  2.48309E-11
 16.200  1.12868E-11  2.36110E-11  2.72843E-11  2.63581E-11  2.30063E-11  1.07643E-11  2.19481E-11  2.40279E-11  2.17033E-11  1.79034E-11
 16.300  7.93849E-12  1.66433E-11  1.93224E-11  1.87789E-11  1.64870E-11  7.42121E-12  1.51959E-11  1.67906E-11  1.53539E-11  1.28134E-11
 16.400  5.55169E-12  1.16630E-11  1.35986E-11  1.32893E-11  1.17307E-11  5.09511E-12  1.04742E-11  1.16728E-11  1.07951E-11  9.10462E-12
 16.500  3.86037E-12  8.12507E-12  9.51103E-12  9.34214E-12  8.28800E-12  3.48315E-12  7.18675E-12  8.07289E-12  7.54333E-12  6.42377E-12
 16.600  2.66899E-12  5.62723E-12  6.61118E-12  6.52444E-12  5.81535E-12  2.37077E-12  4.90829E-12  5.55395E-12  5.23903E-12  4.50102E-12
 16.700  1.83475E-12  3.87453E-12  4.56738E-12  4.52716E-12  4.05278E-12  1.60643E-12  3.33639E-12  3.80086E-12  3.61665E-12  3.13242E-12
 16.800  1.25407E-12  2.65220E-12  3.13624E-12  3.12125E-12  2.80561E-12  1.08356E-12  2.25705E-12  2.58734E-12  2.48168E-12  2.16545E-12
 16.900  8.52287E-13  1.80495E-12  2.14055E-12  2.13836E-12  1.92949E-12  7.27496E-13  1.51949E-12  1.75188E-12  1.69273E-12  1.48718E-12
 17.000  5.75932E-13  1.22124E-12  1.45222E-12  1.45584E-12  1.31837E-12  4.86138E-13  1.01793E-12  1.17986E-12  1.14775E-12  1.01477E-12
 17.100  3.86976E-13  8.21538E-13  9.79367E-13  9.85046E-13  8.95064E-13  3.23306E-13  6.78549E-13  7.90355E-13  7.73644E-13  6.88016E-13
 17.200  2.58542E-13  5.49482E-13  6.56578E-13  6.62422E-13  6.03843E-13  2.13977E-13  4.50059E-13  5.26593E-13  5.18427E-13  4.63549E-13
 17.300  1.71760E-13  3.65417E-13  4.37594E-13  4.42766E-13  4.04839E-13  1.40929E-13  2.97006E-13  3.48968E-13  3.45384E-13  3.10379E-13
 17.400  1.13465E-13  2.41627E-13  2.89946E-13  2.94172E-13  2.69748E-13  9.23610E-14  1.95009E-13  2.30014E-13  2.28770E-13  2.06548E-13
 17.500  7.45351E-14  1.58868E-13  1.91003E-13  1.94284E-13  1.78643E-13  6.02310E-14  1.27387E-13  1.50792E-13  1.50660E-13  1.36619E-13
 17.600  4.86888E-14  1.03865E-13  1.25100E-13  1.27558E-13  1.17595E-13  3.90822E-14  8.27886E-14  9.83241E-14  9.86527E-14  8.98239E-14
 17.700  3.16283E-14  6.75244E-14  8.14680E-14  8.32590E-14  7.69473E-14  2.52320E-14  5.35278E-14  6.37678E-14  6.42319E-14  5.87069E-14
 17.800  2.04320E-14  4.36536E-14  5.27525E-14  5.40295E-14  5.00527E-14  1.62080E-14  3.44308E-14  4.11345E-14  4.15850E-14  3.81442E-14
 17.900  1.31264E-14  2.80646E-14  3.39657E-14  3.48599E-14  3.23679E-14  1.03587E-14  2.20327E-14  2.63923E-14  2.67721E-14  2.46396E-14
 18.000  8.38665E-15  1.79428E-14  2.17469E-14  2.23633E-14  2.08102E-14  6.58670E-15  1.40262E-14  1.68430E-14  1.71396E-14  1.58244E-14
 18.100  5.32908E-15  1.14085E-14  1.38461E-14  1.42652E-14  1.33025E-14  4.16693E-15  8.88307E-15  1.06915E-14  1.09120E-14  1.01048E-14
 18.200  3.36780E-15  7.21409E-15  8.76683E-15  9.04842E-15  8.45493E-15  2.62269E-15  5.59673E-15  6.75052E-15  6.90895E-15  6.41596E-15
 18.300  2.11681E-15  4.53694E-15  5.52027E-15  5.70736E-15  5.34347E-15  1.64231E-15  3.50796E-15  4.23961E-15  4.35043E-15  4.05083E-15
 18.400  1.32333E-15  2.83782E-15  3.45696E-15  3.58000E-15  3.35809E-15  1.02316E-15  2.18738E-15  2.64856E-15  2.72445E-15  2.54328E-15
 18.500  8.22848E-16  1.76546E-15  2.15307E-15  2.23322E-15  2.09863E-15  6.34171E-16  1.35690E-15  1.64586E-15  1.69694E-15  1.58793E-15
 18.600  5.08913E-16  1.09244E-15  1.33371E-15  1.38547E-15  1.30428E-15  3.91064E-16  8.37388E-16  1.01739E-15  1.05125E-15  9.85982E-16
 18.700  3.13077E-16  6.72370E-16  8.21720E-16  8.54855E-16  8.06146E-16  2.39922E-16  5.14119E-16  6.25602E-16  6.47754E-16  6.08874E-16
 18.800  1.91582E-16  4.11630E-16  5.03562E-16  5.24607E-16  4.95543E-16  1.46444E-16  3.14025E-16  3.82676E-16  3.97000E-16  3.73955E-16
 18.900  1.16617E-16  2.50670E-16  3.06947E-16  3.20211E-16  3.02962E-16  8.89325E-17  1.90823E-16  2.32861E-16  2.42024E-16  2.28435E-16
 19.000  7.06128E-17  1.51846E-16  1.86108E-16  1.94407E-16  1.84226E-16  5.37324E-17  1.15364E-16  1.40962E-16  1.46767E-16  1.38793E-16
 19.100  4.25335E-17  9.15009E-17  1.12246E-16  1.17401E-16  1.11424E-16  3.23001E-17  6.93883E-17  8.48893E-17  8.85332E-17  8.38791E-17
 19.200  2.54867E-17  5.48498E-17  6.73433E-17  7.05233E-17  6.70337E-17  1.93182E-17  4.15227E-17  5.08580E-17  5.31259E-17  5.04232E-17
 19.300  1.51929E-17  3.27088E-17  4.01924E-17  4.21409E-17  4.01146E-17  1.14956E-17  2.47214E-17  3.03130E-17  3.17132E-17  3.01516E-17
 19.400  9.00994E-18  1.94045E-17  2.38633E-17  2.50495E-17  2.38792E-17  6.80613E-18  1.46438E-17  1.79751E-17  1.88328E-17  1.79353E-17
 19.500  5.31578E-18  1.14525E-17  1.40950E-17  1.48125E-17  1.41403E-17  4.00940E-18  8.63047E-18  1.06045E-17  1.11261E-17  1.06129E-17
 19.600  3.12023E-18  6.72456E-18  8.28246E-18  8.71373E-18  8.32973E-18  2.35004E-18  5.06084E-18  6.22439E-18  6.53935E-18  6.24745E-18
 19.700  1.82216E-18  3.92832E-18  4.84197E-18  5.09961E-18  4.88144E-18  1.37054E-18  2.95272E-18  3.63495E-18  3.82382E-18  3.65866E-18
 19.800  1.05871E-18  2.28317E-18  2.81620E-18  2.96918E-18  2.84590E-18  7.95311E-19  1.71412E-18  2.11204E-18  2.22456E-18  2.13160E-18
 19.900  6.12028E-19  1.32027E-18  1.62965E-18  1.71994E-18  1.65067E-18  4.59213E-19  9.90119E-19  1.22100E-18  1.28760E-18  1.23555E-18
  67 169 200   0.100
  0.000  5.76765E-02 -2.79285E-16 -4.78784E-16 -5.12880E-16 -6.29415E-16  9.54037E-02 -4.65475E-16 -7.49401E-16 -9.50704E-16 -4.57757E-16
  0.100  5.77089E-02 -5.09953E-05 -3.56314E-08 -7.50115E-12 -1.00134E-15  9.53784E-02  7.72463E-05  4.66863E-08  9.16279E-13 -3.23291E-15
  0.200  5.78053E-02 -2.01223E-04 -5.64485E-07 -4.74908E-10 -2.26961E-13  9.53036E-02  3.03865E-04  7.36653E-07  5.43612E-11 -6.38485E-13
  0.300  5.79631E-02 -4.42545E-04 -2.81085E-06 -5.31319E-09 -5.68608E-12  9.51830E-02  6.64841E-04  3.64361E-06  5.40942E-10 -1.62426E-11
  0.400  5.81782E-02 -7.61847E-04 -8.67987E-06 -2.91112E-08 -5.50930E-11  9.50223E-02  1.13627E-03  1.11458E-05  2.44684E-09 -1.61210E-10
  0.500  5.84449E-02 -1.14169E-03 -2.05660E-05 -1.07512E-07 -3.15755E-10  9.48292E-02  1.68697E-03  2.60888E-05  6.57318E-09 -9.52973E-10
  0.600  5.87565E-02 -1.56117E-03 -4.11063E-05 -3.08563E-07 -1.29422E-09  9.46125E-02  2.28053E-03  5.13692E-05  1.01851E-08 -4.05461E-09
  0.700  5.91050E-02 -1.99698E-03 -7.28997E-05 -7.42453E-07 -4.19761E-09  9.43822E-02  2.87773E-03  8.94871E-05 -3.15545E-10 -1.37356E-08
  0.800  5.94818E-02 -2.42457E-03 -1.18213E-04 -1.56711E-06 -1.14439E-08  9.41483E-02  3.43906E-03  1.42118E-04 -6.15380E-08 -3.93460E-08
  0.900  5.98779E-02 -2.81940E-03 -1.78700E-04 -2.98753E-06 -2.72675E-08  9.39207E-02  3.92729E-03  2.09753E-04 -2.49932E-07 -9.90640E-08
  1.000  6.02839E-02 -3.15817E-03 -2.55158E-04 -5.24752E-06 -5.83156E-08  9.37086E-02  4.30973E-03  2.91451E-04 -7.01933E-07 -2.25077E-07
  1.100  6.06909E-02 -3.42002E-03 -3.47336E-04 -8.61355E-06 -1.14091E-07  9.35198E-02  4.56030E-03  3.84723E-04 -1.63484E-06 -4.70187E-07
  1.200  6.10901E-02 -3.58761E-03 -4.53822E-04 -1.33515E-05 -2.07088E-07  9.33607E-02  4.66100E-03  4.85577E-04 -3.36489E-06 -9.15613E-07
  1.300  6.14737E-02 -3.64799E-03 -5.72018E-04 -1.96985E-05 -3.52506E-07  9.32360E-02  4.60291E-03  5.88709E-04 -6.31847E-06 -1.67946E-06
  1.400  6.18345E-02 -3.59330E-03 -6.98195E-04 -2.78313E-05 -5.67469E-07  9.31483E-02  4.38656E-03  6.87832E-04 -1.10327E-05 -2.92511E-06
  1.500  6.21668E-02 -3.42113E-03 -8.27643E-04 -3.78370E-05 -8.69815E-07  9.30982E-02  4.02174E-03  7.76109E-04 -1.81422E-05 -4.86841E-06
  1.600  6.24657E-02 -3.13468E-03 -9.54906E-04 -4.96856E-05 -1.27659E-06  9.30844E-02  3.52676E-03  8.46658E-04 -2.83507E-05 -7.78253E-06
  1.700  6.27279E-02 -2.74256E-03 -1.07406E-03 -6.32111E-05 -1.80251E-06  9.31038E-02  2.92713E-03  8.93084E-04 -4.23873E-05 -1.19992E-05
  1.800  6.29514E-02 -2.25837E-03 -1.17908E-03 -7.81004E-05 -2.45878E-06  9.31517E-02  2.25401E-03  9.09992E-04 -6.09496E-05 -1.79049E-05
  1.900  6.31354E-02 -1.69993E-03 -1.26414E-03 -9.38933E-05 -3.25247E-06  9.32221E-02  1.54218E-03  8.93447E-04 -8.46384E-05 -2.59319E-05
  2.000  6.32805E-02 -1.08846E-03 -1.32404E-03 -1.09992E-04 -4.18694E-06  9.33077E-02  8.28044E-04  8.41342E-04 -1.13888E-04 -3.65420E-05
  2.100  6.33885E-02 -4.47414E-04 -1.35447E-03 -1.25679E-04 -5.26338E-06  9.34009E-02  1.47478E-04  7.53644E-04 -1.48898E-04 -5.02050E-05
  2.200  6.34621E-02  1.98619E-04 -1.35234E-03 -1.40148E-04 -6.48345E-06  9.34937E-02 -4.66191E-04  6.32516E-04 -1.89577E-04 -6.73708E-05
  2.300  6.35049E-02  8.25160E-04 -1.31596E-03 -1.52531E-04 -7.85287E-06  9.35779E-02 -9.83996E-04  4.82282E-04 -2.35493E-04 -8.84375E-05
  2.400  6.35213E-02  1.40899E-03 -1.24518E-03 -1.61935E-04 -9.38536E-06  9.36460E-02 -1.38285E-03  3.09263E-04 -2.85851E-04 -1.13716E-04
  2.500  6.35161E-02  1.92924E-03 -1.14148E-03 -1.67476E-04 -1.11064E-05  9.36912E-02 -1.64670E-03  1.21469E-04 -3.39483E-04 -1.43395E-04
  2.600  6.34942E-02  2.36832E-03 -1.00790E-03 -1.68313E-04 -1.30559E-05  9.37076E-02 -1.76721E-03 -7.18243E-05 -3.94864E-04 -1.77507E-04
  2.700  6.34608E-02  2.71270E-03 -8.48971E-04 -1.63678E-04 -1.52885E-05  9.36906E-02 -1.74403E-03 -2.60594E-04 -4.50145E-04 -2.15897E-04
  2.800  6.34207E-02  2.95344E-03 -6.70496E-04 -1.52898E-04 -1.78717E-05  9.36371E-02 -1.58454E-03 -4.34665E-04 -5.03214E-04 -2.58199E-04
  2.900  6.33784E-02  3.08657E-03 -4.79361E-04 -1.35425E-04 -2.08801E-05  9.35453E-02 -1.30318E-03 -5.84343E-04 -5.51762E-04 -3.03823E-04
  3.000  6.33374E-02  3.11315E-03 -2.83237E-04 -1.10855E-04 -2.43858E-05  9.34145E-02 -9.20306E-04 -7.01052E-04 -5.93373E-04 -3.51942E-04
  3.100  6.33004E-02  3.03925E-03 -9.02800E-05 -7.89529E-05 -2.84457E-05  9.32454E-02 -4.60710E-04 -7.77950E-04 -6.25624E-04 -4.01504E-04
  3.200  6.32688E-02  2.87561E-03  9.11890E-05 -3.96765E-05 -3.30859E-05  9.30394E-02  4.81001E-05 -8.10466E-04 -6.46195E-04 -4.51239E-04
  3.300  6.32425E-02  2.63721E-03  2.53006E-04  6.79505E-06 -3.82852E-05  9.27982E-02  5.77846E-04 -7.96734E-04 -6.52992E-04 -4.99688E-04
  3.400  6.32197E-02  2.34269E-03  3.87481E-04  6.00300E-05 -4.39583E-05  9.25236E-02  1.10145E-03 -7.37881E-04 -6.44268E-04 -5.45240E-04
  3.500  6.31966E-02  2.01357E-03  4.87701E-04  1.19311E-04 -4.99428E-05  9.22165E-02  1.59495E-03 -6.38135E-04 -6.18765E-04 -5.86174E-04
  3.600  6.31676E-02  1.67352E-03  5.47813E-04  1.83603E-04 -5.59903E-05  9.18767E-02  2.03921E-03 -5.04736E-04 -5.75833E-04 -6.20721E-04
  3.700  6.31247E-02  1.34745E-03  5.63275E-04  2.51525E-04 -6.17663E-05  9.15025E-02  2.42134E-03 -3.47628E-04 -5.15566E-04 -6.47123E-04
  3.800  6.30581E-02  1.06058E-03  5.31084E-04  3.21339E-04 -6.68578E-05  9.10899E-02  2.73569E-03 -1.78938E-04 -4.38904E-04 -6.63708E-04
  3.900  6.29561E-02  8.37541E-04  4.49957E-04  3.90942E-04 -7.07927E-05  9.06328E-02  2.98433E-03 -1.22690E-05 -3.47718E-04 -6.68971E-04
  4.000  6.28054E-02  7.01437E-04  3.20472E-04  4.57899E-04 -7.30692E-05  9.01224E-02  3.17708E-03  1.38177E-04 -2.44848E-04 -6.61652E-04
  4.100  6.25911E-02  6.72949E-04  1.45153E-04  5.19487E-04 -7.31938E-05  8.95475E-02  3.33086E-03  2.58573E-04 -1.34099E-04 -6.40822E-04
  4.200  6.22980E-02  7.69501E-04 -7.15112E-05  5.72781E-04 -7.07275E-05  8.88950E-02  3.46862E-03  3.36486E-04 -2.01594E-05 -6.05960E-04
  4.300  6.19100E-02  1.00450E-03 -3.23119E-04  6.14773E-04 -6.53343E-05  8.81500E-02  3.61775E-03  3.61854E-04  9.15368E-05 -5.57027E-04
  4.400  6.14116E-02  1.38670E-03 -6.01494E-04  6.42510E-04 -5.68286E-05  8.72964E-02  3.80814E-03  3.27849E-04  1.95032E-04 -4.94518E-04
  4.500  6.07882E-02  1.91971E-03 -8.96909E-04  6.53266E-04 -4.52167E-05  8.63178E-02  4.07003E-03  2.31546E-04  2.84129E-04 -4.19498E-04
  4.600  6.00267E-02  2.60164E-03 -1.19840E-03  6.44725E-04 -3.07268E-05  8.51984E-02  4.43174E-03  7.43415E-05  3.52734E-04 -3.33613E-04
  4.700  5.91161E-02  3.42500E-03 -1.49417E-03  6.15157E-04 -1.38230E-05  8.39234E-02  4.91747E-03 -1.37945E-04  3.95234E-04 -2.39062E-04
  4.800  5.80481E-02  4.37677E-03 -1.77205E-03  5.63590E-04  4.79899E-06  8.24801E-02  5.54538E-03 -3.95281E-04  4.06884E-04 -1.38543E-04
  4.900  5.68173E-02  5.43870E-03 -2.02006E-03  4.89946E-04  2.42377E-05  8.08588E-02  6.32595E-03 -6.83967E-04  3.84177E-04 -3.51550E-05
  5.000  5.54220E-02  6.58785E-03 -2.22694E-03  3.95132E-04  4.34311E-05  7.90527E-02  7.26094E-03 -9.87461E-04  3.25154E-04  6.77255E-05
  5.100  5.38638E-02  7.79735E-03 -2.38273E-03  2.81078E-04  6.12197E-05  7.70591E-02  8.34278E-03 -1.28744E-03  2.29634E-04  1.66601E-04
  5.200  5.21480E-02  9.03730E-03 -2.47926E-03  1.50703E-04  7.64233E-05  7.48789E-02  9.55466E-03 -1.56501E-03  9.93403E-05  2.58028E-04
  5.300  5.02833E-02  1.02759E-02 -2.51066E-03  7.82404E-06  8.79244E-05  7.25174E-02  1.08712E-02 -1.80199E-03 -6.21129E-05  3.38795E-04
  5.400  4.82818E-02  1.14806E-02 -2.47367E-03 -1.43014E-04  9.47519E-05  6.99836E-02  1.22595E-02 -1.98213E-03 -2.49351E-04  4.06105E-04
  5.500  4.61583E-02  1.26193E-02 -2.36786E-03 -2.96751E-04  9.61573E-05  6.72902E-02  1.36810E-02 -2.09219E-03 -4.55509E-04  4.57728E-04
  5.600  4.39301E-02  1.36619E-02 -2.19570E-03 -4.48077E-04  9.16766E-05  6.44532E-02  1.50933E-02 -2.12283E-03 -6.72600E-04  4.92136E-04
  5.700  4.16165E-02  1.45807E-02 -1.96248E-03 -5.91712E-04  8.11725E-05  6.14914E-02  1.64525E-02 -2.06920E-03 -8.91978E-04  5.08582E-04
  5.800  3.92381E-02  1.53524E-02 -1.67602E-03 -7.22699E-04  6.48518E-05  5.84259E-02  1.77154E-02 -1.93117E-03 -1.10484E-03  5.07144E-04
  5.900  3.68163E-02  1.59582E-02 -1.34632E-03 -8.36668E-04  4.32578E-05  5.52796E-02  1.88414E-02 -1.71327E-03 -1.30275E-03  4.88706E-04
  6.000  3.43728E-02  1.63846E-02 -9.85020E-04 -9.30067E-04  1.72370E-05  5.20764E-02  1.97951E-02 -1.42428E-03 -1.47810E-03  4.54894E-04
  6.100  3.19292E-02  1.66241E-02 -6.04783E-04 -1.00034E-03 -1.21156E-05  4.88410E-02  2.05470E-02 -1.07660E-03 -1.62454E-03  4.07962E-04
  6.200  2.95063E-02  1.66749E-02 -2.18677E-04 -1.04603E-03 -4.35293E-05  4.55982E-02  2.10756E-02 -6.85325E-04 -1.73731E-03  3.50648E-04
  6.300  2.71236E-02  1.65407E-02  1.60492E-04 -1.06682E-03 -7.56404E-05  4.23722E-02  2.13675E-02 -2.67236E-04 -1.81341E-03  2.85994E-04
  6.400  2.47993E-02  1.62309E-02  5.20781E-04 -1.06348E-03 -1.07079E-04  3.91867E-02  2.14180E-02  1.60251E-04 -1.85169E-03  2.17165E-04
  6.500  2.25500E-02  1.57591E-02  8.51648E-04 -1.03778E-03 -1.36554E-04  3.60639E-02  2.12308E-02  5.80136E-04 -1.85281E-03  1.47269E-04
  6.600  2.03900E-02  1.51432E-02  1.14437E-03 -9.92339E-04 -1.62925E-04  3.30246E-02  2.08172E-02  9.76775E-04 -1.81905E-03  7.91851E-05
  6.700  1.83318E-02  1.44040E-02  1.39236E-03 -9.30378E-04 -1.85262E-04  3.00878E-02  2.01956E-02  1.33665E-03 -1.75408E-03  1.54322E-05
  6.800  1.63853E-02  1.35642E-02  1.59131E-03 -8.55547E-04 -2.02889E-04  2.72701E-02  1.93896E-02  1.64894E-03 -1.66259E-03 -4.19396E-05
  6.900  1.45585E-02  1.26476E-02  1.73918E-03 -7.71669E-04 -2.15399E-04  2.45861E-02  1.84271E-02  1.90588E-03 -1.55002E-03 -9.14113E-05
  7.000  1.28569E-02  1.16784E-02  1.83618E-03 -6.82528E-04 -2.22660E-04  2.20477E-02  1.73389E-02  2.10290E-03 -1.42209E-03 -1.32019E-04
  7.100  1.12840E-02  1.06798E-02  1.88444E-03 -5.91680E-04 -2.24797E-04  1.96643E-02  1.61567E-02  2.23850E-03 -1.28454E-03 -1.63341E-04
  7.200  9.84115E-03  9.67352E-03  1.88779E-03 -5.02289E-04 -2.22157E-04  1.74425E-02  1.49123E-02  2.31403E-03 -1.14277E-03 -1.85450E-04
  7.300  8.52773E-03  8.67928E-03  1.85134E-03 -4.17022E-04 -2.15269E-04  1.53865E-02  1.36360E-02  2.33326E-03 -1.00163E-03 -1.98841E-04
  7.400  7.34138E-03  7.71423E-03  1.78112E-03 -3.37973E-04 -2.04791E-04  1.34977E-02  1.23557E-02  2.30191E-03 -8.65254E-04 -2.04346E-04
  7.500  6.27820E-03  6.79264E-03  1.68368E-03 -2.66644E-04 -1.91462E-04  1.17753E-02  1.10964E-02  2.22707E-03 -7.36907E-04 -2.03031E-04
  7.600  5.33292E-03  5.92584E-03  1.56570E-03 -2.03959E-04 -1.76052E-04  1.02162E-02  9.87930E-03  2.11667E-03 -6.18998E-04 -1.96108E-04
  7.700  4.49918E-03  5.12217E-03  1.43367E-03 -1.50312E-04 -1.59312E-04  8.81520E-03  8.72160E-03  1.97897E-03 -5.13087E-04 -1.84836E-04
  7.800  3.76977E-03  4.38710E-03  1.29362E-03 -1.05638E-04 -1.41943E-04  7.56552E-03  7.63656E-03  1.82209E-03 -4.19950E-04 -1.70449E-04
  7.900  3.13682E-03  3.72349E-03  1.15094E-03 -6.95022E-05 -1.24566E-04  6.45894E-03  6.63350E-03  1.65362E-03 -3.39695E-04 -1.54090E-04
  8.000  2.59210E-03  3.13190E-03  1.01019E-03 -4.11925E-05 -1.07702E-04  5.48612E-03  5.71811E-03  1.48038E-03 -2.71883E-04 -1.36770E-04
  8.100  2.12720E-03  2.61089E-03  8.75078E-04 -1.98131E-05 -9.17610E-05  4.63698E-03  4.89283E-03  1.30819E-03 -2.15664E-04 -1.19335E-04
  8.200  1.73372E-03  2.15744E-03  7.48415E-04 -4.36940E-06 -7.70466E-05  3.90097E-03  4.15729E-03  1.14178E-03 -1.69908E-04 -1.02456E-04
  8.300  1.40348E-03  1.76734E-03  6.32168E-04  6.15804E-06 -6.37553E-05  3.26735E-03  3.50885E-03  9.84794E-04 -1.33328E-04 -8.66321E-05
  8.400  1.12863E-03  1.43548E-03  5.27529E-04  1.27541E-05 -5.19899E-05  2.72546E-03  2.94308E-03  8.39802E-04 -1.04583E-04 -7.21998E-05
  8.500  9.01782E-04  1.15628E-03  4.35017E-04  1.63251E-05 -4.17728E-05  2.26497E-03  2.45427E-03  7.08418E-04 -8.23538E-05 -5.93527E-05
  8.600  7.16104E-04  9.23902E-04  3.54596E-04  1.76704E-05 -3.30616E-05  1.87601E-03  2.03584E-03  5.91416E-04 -6.54134E-05 -4.81655E-05
  8.700  5.65363E-04  7.32515E-04  2.85794E-04  1.74666E-05 -2.57653E-05  1.54933E-03  1.68077E-03  4.88881E-04 -5.26601E-05 -3.86194E-05
  8.800  4.43963E-04  5.76501E-04  2.27823E-04  1.62637E-05 -1.97597E-05  1.27641E-03  1.38192E-03  4.00355E-04 -4.31423E-05 -3.06267E-05
  8.900  3.46954E-04  4.50587E-04  1.79685E-04  1.44908E-05 -1.49005E-05  1.04950E-03  1.13228E-03  3.24985E-04 -3.60643E-05 -2.40537E-05
  9.000  2.70013E-04  3.49942E-04  1.40269E-04  1.24664E-05 -1.10358E-05  8.61672E-04  9.25204E-04  2.61654E-04 -3.07821E-05 -1.87400E-05
  9.100  2.09422E-04  2.70240E-04  1.08427E-04  1.04143E-05 -8.01430E-06  7.06776E-04  7.54499E-04  2.09096E-04 -2.67903E-05 -1.45147E-05
  9.200  1.62023E-04  2.07678E-04  8.30364E-05  8.48024E-06 -5.69308E-06  5.79452E-04  6.14559E-04  1.65986E-04 -2.37044E-05 -1.12085E-05
  9.300  1.25166E-04  1.58978E-04  6.30403E-05  6.74843E-06 -3.94163E-06  4.75064E-04  5.00384E-04  1.31014E-04 -2.12416E-05 -8.66165E-06
  9.400  9.66595E-05  1.21362E-04  4.74794E-05  5.25760E-06 -2.64481E-06  3.89649E-04  4.07596E-04  1.02937E-04 -1.92004E-05 -6.72996E-06
  9.500  7.47088E-05  9.25083E-05  3.55066E-05  4.01455E-06 -1.70387E-06  3.19851E-04  3.32418E-04  8.06170E-05 -1.74429E-05 -5.28712E-06
  9.600  5.78648E-05  7.05130E-05  2.63927E-05  3.00542E-06 -1.03639E-06  2.62856E-04  2.71634E-04  6.30338E-05 -1.58779E-05 -4.22570E-06
  9.700  4.49696E-05  5.38322E-05  1.95242E-05  2.20466E-06 -5.75215E-07  2.16319E-04  2.22544E-04  4.92985E-05 -1.44486E-05 -3.45646E-06
  9.800  3.51079E-05  4.12328E-05  1.43957E-05  1.58147E-06 -2.66930E-07  1.78303E-04  1.82900E-04  3.86508E-05 -1.31210E-05 -2.90689E-06
  9.900  2.75638E-05  3.17422E-05  1.05984E-05  1.10436E-06 -6.99554E-08  1.47216E-04  1.50856E-04  3.04519E-05 -1.18766E-05 -2.51916E-06
 10.000  2.17824E-05  2.46021E-05  7.80787E-06  7.43988E-07  4.73967E-08  1.21759E-04  1.24906E-04  2.41735E-05 -1.07060E-05 -2.24797E-06
 10.100  1.73378E-05  1.92283E-05  5.77037E-06  4.74676E-07  1.08816E-07  1.00875E-04  1.03830E-04  1.93855E-05 -9.60548E-06 -2.05845E-06
 10.200  1.39049E-05  1.51751E-05  4.29070E-06  2.75033E-07  1.31715E-07  8.37060E-05  8.66501E-05  1.57420E-05 -8.57385E-06 -1.92411E-06
 10.300  1.12378E-05  1.21053E-05  3.22060E-06  1.27919E-07  1.28718E-07  6.95584E-05  7.25833E-05  1.29683E-05 -7.61113E-06 -1.82523E-06
 10.400  9.15097E-06  9.76610E-06  2.44879E-06  2.00561E-08  1.08900E-07  5.78724E-05  6.10080E-05  1.08492E-05 -6.71754E-06 -1.74737E-06
 10.500  7.50512E-06  7.96917E-06  1.89269E-06 -5.85616E-08  7.87615E-08  4.81961E-05  5.14312E-05  9.21749E-06 -5.89303E-06 -1.68023E-06
 10.600  6.19588E-06  6.57491E-06  1.49154E-06 -1.15300E-07  4.29786E-08  4.01645E-05  4.34638E-05  7.94527E-06 -5.13704E-06 -1.61669E-06
 10.700  5.14506E-06  5.48032E-06  1.20097E-06 -1.55492E-07  4.95108E-09  3.34830E-05  3.67983E-05  6.93572E-06 -4.44845E-06 -1.55209E-06
 10.800  4.29402E-06  4.60967E-06  9.88846E-07 -1.82964E-07 -3.28195E-08  2.79130E-05  3.11924E-05  6.11662E-06 -3.82556E-06 -1.48362E-06
 10.900  3.59869E-06  3.90738E-06  8.32005E-07 -2.00464E-07 -6.84760E-08  2.32611E-05  2.64547E-05  5.43495E-06 -3.26618E-06 -1.40992E-06
 11.000  3.02579E-06  3.33272E-06  7.13875E-07 -2.10000E-07 -1.00647E-07  1.93702E-05  2.24338E-05  4.85251E-06 -2.76759E-06 -1.33066E-06
 11.100  2.55012E-06  2.85588E-06  6.22686E-07 -2.13084E-07 -1.28351E-07  1.61121E-05  1.90094E-05  4.34241E-06 -2.32667E-06 -1.24625E-06
 11.200  2.15244E-06  2.45504E-06  5.50161E-07 -2.10901E-07 -1.50939E-07  1.33819E-05  1.60852E-05  3.88624E-06 -1.93992E-06 -1.15768E-06
 11.300  1.81800E-06  2.11418E-06  4.90554E-07 -2.04433E-07 -1.68058E-07  1.10936E-05  1.35840E-05  3.47183E-06 -1.60355E-06 -1.06621E-06
 11.400  1.53537E-06  1.82156E-06  4.39943E-07 -1.94526E-07 -1.79625E-07  9.17592E-06  1.14429E-05  3.09147E-06 -1.31355E-06 -9.73308E-07
 11.500  1.29565E-06  1.56850E-06  3.95712E-07 -1.81940E-07 -1.85791E-07  7.57011E-06  9.61042E-06  2.74056E-06 -1.06576E-06 -8.80486E-07
 11.600  1.09180E-06  1.34853E-06  3.56169E-07 -1.67365E-07 -1.86916E-07  6.22707E-06  8.04362E-06  2.41653E-06 -8.55999E-07 -7.89199E-07
 11.700  9.18207E-07  1.15674E-06  3.20255E-07 -1.51434E-07 -1.83522E-07  5.10573E-06  6.70651E-06  2.11806E-06 -6.80097E-07 -7.00775E-07
 11.800  7.70343E-07  9.89366E-07  2.87336E-07 -1.34727E-07 -1.76255E-07  4.17159E-06  5.56840E-06  1.84447E-06 -5.34017E-07 -6.16367E-07
 11.900  6.44482E-07  8.43382E-07  2.57051E-07 -1.17765E-07 -1.65837E-07  3.39547E-06  4.60288E-06  1.59537E-06 -4.13910E-07 -5.36917E-07
 12.000  5.37518E-07  7.16317E-07  2.29198E-07 -1.01006E-07 -1.53024E-07  2.75267E-06  3.78695E-06  1.37033E-06 -3.16167E-07 -4.63140E-07
 12.100  4.46830E-07  6.06066E-07  2.03658E-07 -8.48412E-08 -1.38565E-07  2.22215E-06  3.10047E-06  1.16878E-06 -2.37471E-07 -3.95523E-07
 12.200  3.70171E-07  5.10784E-07  1.80347E-07 -6.95934E-08 -1.23165E-07  1.78602E-06  2.52566E-06  9.89867E-07 -1.74818E-07 -3.34341E-07
 12.300  3.05597E-07  4.28811E-07  1.59185E-07 -5.55126E-08 -1.07461E-07  1.42899E-06  2.04686E-06  8.32517E-07 -1.25530E-07 -2.79669E-07
 12.400  2.51415E-07  3.58631E-07  1.40078E-07 -4.27787E-08 -9.19976E-08  1.13803E-06  1.65020E-06  6.95399E-07 -8.72539E-08 -2.31414E-07
 12.500  2.06137E-07  2.98849E-07  1.22918E-07 -3.15037E-08 -7.72216E-08  9.02045E-07  1.32344E-06  5.76997E-07 -5.79548E-08 -1.89340E-07
 12.600  1.68460E-07  2.48181E-07  1.07577E-07 -2.17375E-08 -6.34736E-08  7.11585E-07  1.05582E-06  4.75664E-07 -3.58922E-08 -1.53098E-07
 12.700  1.37241E-07  2.05446E-07  9.39167E-08 -1.34745E-08 -5.09921E-08  5.58652E-07  8.37933E-07  3.89690E-07 -1.95978E-08 -1.22260E-07
 12.800  1.11480E-07  1.69569E-07  8.17915E-08 -6.66236E-09 -3.99209E-08  4.36491E-07  6.61593E-07  3.17354E-07 -7.84725E-09 -9.63412E-08
 12.900  9.03071E-08  1.39578E-07  7.10562E-08 -1.21069E-09 -3.03208E-08  3.39424E-07  5.19724E-07  2.56979E-07  3.68595E-10 -7.48295E-08
 13.000  7.29707E-08  1.14604E-07  6.15705E-08  2.99895E-09 -2.21828E-08  2.62705E-07  4.06262E-07  2.06971E-07  5.87245E-09 -5.72047E-08
 13.100  5.88245E-08  9.38816E-08  5.32026E-08  6.10395E-09 -1.54434E-08  2.02391E-07  3.16048E-07  1.65848E-07  9.32787E-09 -4.29571E-08
 13.200  4.73179E-08  7.67385E-08  4.58315E-08  8.25191E-09 -9.99840E-09  1.55222E-07  2.44727E-07  1.32262E-07  1.12643E-08 -3.16006E-08
 13.300  3.79845E-08  6.25941E-08  3.93483E-08  9.59309E-09 -5.71698E-09  1.18527E-07  1.88656E-07  1.05007E-07  1.20997E-08 -2.26833E-08
 13.400  3.04329E-08  5.09507E-08  3.36561E-08  1.02739E-08 -2.45352E-09  9.01237E-08  1.44813E-07  8.30210E-08  1.21598E-08 -1.57941E-08
 13.500  2.43363E-08  4.13851E-08  2.86690E-08  1.04319E-08 -5.75830E-11  6.82488E-08  1.10708E-07  6.53828E-08  1.16958E-08 -1.05661E-08
 13.600  1.94238E-08  3.35408E-08  2.43115E-08  1.01922E-08  1.61805E-09  5.14827E-08  8.43095E-08  5.13048E-08  1.08982E-08 -6.67819E-09
 13.700  1.54724E-08  2.71187E-08  2.05163E-08  9.66497E-09  2.71156E-09  3.86918E-08  6.39735E-08  4.01210E-08  9.90922E-09 -3.85425E-09
 13.800  1.22991E-08  2.18698E-08  1.72238E-08  8.94444E-09  3.34808E-09  2.89770E-08  4.83772E-08  3.12744E-08  8.83259E-09 -1.86082E-09
 13.900  9.75471E-09  1.75872E-08  1.43801E-08  8.10864E-09  3.63739E-09  2.16296E-08  3.64661E-08  2.43041E-08  7.74206E-09 -5.03887E-10
 14.000  7.71782E-09  1.40997E-08  1.19366E-08  7.22004E-09  3.67299E-09  1.60949E-08  2.74052E-08  1.88319E-08  6.68801E-09  3.75059E-10
 14.100  6.08996E-09  1.12659E-08  9.84863E-09  6.32679E-09  3.53227E-09  1.19414E-08  2.05376E-08  1.45501E-08  5.70296E-09  9.03280E-10
 14.200  4.79143E-09  8.96880E-09  8.07526E-09  5.46426E-09  3.27738E-09  8.83533E-09  1.53500E-08  1.12100E-08  4.80598E-09  1.18112E-09
 14.300  3.75776E-09  7.11207E-09  6.57881E-09  4.65689E-09  2.95673E-09  6.52022E-09  1.14436E-08  8.61220E-09  4.00620E-09  1.28621E-09
 14.400  2.93691E-09  5.61604E-09  5.32459E-09  3.92002E-09  2.60674E-09  4.79988E-09  8.51065E-09  6.59729E-09  3.30566E-09  1.27734E-09
 14.500  2.28683E-09  4.41491E-09  4.28079E-09  3.26169E-09  2.25365E-09  3.52514E-09  6.31443E-09  5.03879E-09  2.70147E-09  1.19803E-09
 14.600  1.77354E-09  3.45435E-09  3.41840E-09  2.68434E-09  1.91540E-09  2.58306E-09  4.67405E-09  3.83660E-09  2.18752E-09  1.07965E-09
 14.700  1.36964E-09  2.68947E-09  2.71117E-09  2.18630E-09  1.60334E-09  1.88855E-09  3.45175E-09  2.91183E-09  1.75579E-09  9.44044E-10
 14.800  1.05300E-09  2.08322E-09  2.13553E-09  1.76302E-09  1.32373E-09  1.37772E-09  2.54307E-09  2.20250E-09  1.39732E-09  8.05827E-10
 14.900  8.05770E-10  1.60508E-09  1.67055E-09  1.40818E-09  1.07913E-09  1.00284E-09  1.86904E-09  1.66006E-09  1.10288E-09  6.74210E-10
 15.000  6.13583E-10  1.22994E-09  1.29782E-09  1.11445E-09  8.69445E-10  7.28314E-10  1.37019E-09  1.24656E-09  8.63520E-10  5.54480E-10
 15.100  4.64877E-10  9.37209E-10  1.00132E-09  8.74171E-10  6.92822E-10  5.27700E-10  1.00183E-09  9.32407E-10  6.70820E-10  4.49175E-10
 15.200  3.50379E-10  7.10083E-10  7.67258E-10  6.79812E-10  5.46364E-10  3.81411E-10  7.30457E-10  6.94579E-10  5.17135E-10  3.58973E-10
 15.300  2.62673E-10  5.34884E-10  5.83887E-10  5.24255E-10  4.26626E-10  2.74969E-10  5.31025E-10  5.15214E-10  3.95668E-10  2.83367E-10
 15.400  1.95849E-10  4.00549E-10  4.41316E-10  4.01008E-10  3.29998E-10  1.97696E-10  3.84842E-10  3.80480E-10  3.00501E-10  2.21153E-10
 15.500  1.45215E-10  2.98174E-10  3.31298E-10  3.04303E-10  2.52953E-10  1.41730E-10  2.77985E-10  2.79695E-10  2.26569E-10  1.70775E-10
 15.600  1.07066E-10  2.20640E-10  2.47034E-10  2.29130E-10  1.92211E-10  1.01300E-10  2.00102E-10  2.04638E-10  1.69608E-10  1.30563E-10
 15.700  7.84897E-11  1.62287E-10  1.82970E-10  1.71219E-10  1.44827E-10  7.21704E-11  1.43516E-10  1.48997E-10  1.26074E-10  9.88798E-11
 15.800  5.72101E-11  1.18647E-10  1.34620E-10  1.26995E-10  1.08236E-10  5.12435E-11  1.02539E-10  1.07946E-10  9.30645E-11  7.42126E-11
 15.900  4.14584E-11  8.62178E-11  9.83942E-11  9.35063E-11  8.02493E-11  3.62552E-11  7.29703E-11  7.78089E-11  6.82274E-11  5.52197E-11
 16.000  2.98690E-11  6.22737E-11  7.14465E-11  6.83559E-11  5.90404E-11  2.55553E-11  5.17135E-11  5.57961E-11  4.96807E-11  4.07472E-11
 16.100  2.13937E-11  4.47073E-11  5.15427E-11  4.96185E-11  4.31099E-11  1.79432E-11  3.64920E-11  3.98011E-11  3.59340E-11  2.98271E-11
 16.200  1.52337E-11  3.19024E-11  3.69446E-11  3.57679E-11  3.12463E-11  1.25475E-11  2.56371E-11  2.82405E-11  2.58194E-11  2.16641E-11
 16.300  1.07838E-11  2.26278E-11  2.63121E-11  2.56078E-11  2.24843E-11  8.73761E-12  1.79292E-11  1.99302E-11  1.84308E-11  1.56164E-11
 16.400  7.58913E-12  1.59531E-11  1.86210E-11  1.82106E-11  1.60651E-11  6.05824E-12  1.24803E-11  1.39891E-11  1.30715E-11  1.11742E-11
 16.500  5.30961E-12  1.11800E-11  1.30954E-11  1.28643E-11  1.13990E-11  4.18182E-12  8.64608E-12  9.76540E-12  9.21133E-12  7.93825E-12
 16.600  3.69309E-12  7.78821E-12  9.15210E-12  9.02821E-12  8.03302E-12  2.87342E-12  5.96076E-12  6.77952E-12  6.45004E-12  5.59978E-12
 16.700  2.55376E-12  5.39322E-12  6.35677E-12  6.29512E-12  5.62304E-12  1.96520E-12  4.08920E-12  4.68065E-12  4.48821E-12  3.92300E-12
 16.800  1.75566E-12  3.71265E-12  4.38819E-12  4.36142E-12  3.91010E-12  1.33766E-12  2.79126E-12  3.21369E-12  3.10370E-12  2.72974E-12
 16.900  1.20000E-12  2.54073E-12  3.01085E-12  3.00266E-12  2.70128E-12  9.06111E-13  1.89565E-12  2.19426E-12  2.13308E-12  1.88683E-12
 17.000  8.15469E-13  1.72855E-12  2.05339E-12  2.05433E-12  1.85420E-12  6.10781E-13  1.28084E-12  1.48989E-12  1.45707E-12  1.29569E-12
 17.100  5.50976E-13  1.16916E-12  1.39203E-12  1.39684E-12  1.26470E-12  4.09667E-13  8.60967E-13  1.00601E-12  9.89283E-13  8.84026E-13
 17.200  3.70141E-13  7.86219E-13  9.38089E-13  9.43992E-13  8.57221E-13  2.73398E-13  5.75733E-13  6.75511E-13  6.67656E-13  5.99334E-13
 17.300  2.47242E-13  5.25662E-13  6.28459E-13  6.34100E-13  5.77441E-13  1.81535E-13  3.82989E-13  4.51074E-13  4.47918E-13  4.03784E-13
 17.400  1.64214E-13  3.49444E-13  4.18569E-13  4.23391E-13  3.86600E-13  1.19924E-13  2.53437E-13  2.99539E-13  2.98729E-13  2.70358E-13
 17.500  1.08453E-13  2.30977E-13  2.77161E-13  2.81025E-13  2.57267E-13  7.88177E-14  1.66827E-13  1.97812E-13  1.98066E-13  1.79918E-13
 17.600  7.12245E-14  1.51809E-13  1.82470E-13  1.85434E-13  1.70178E-13  5.15349E-14  1.09237E-13  1.29913E-13  1.30562E-13  1.19010E-13
 17.700  4.65143E-14  9.92147E-14  1.19443E-13  1.21647E-13  1.11903E-13  3.35220E-14  7.11507E-14  8.48513E-14  8.55693E-14  7.82516E-14
 17.800  3.02082E-14  6.44791E-14  7.77428E-14  7.93406E-14  7.31527E-14  2.16923E-14  4.60988E-14  5.51162E-14  5.57609E-14  5.11486E-14
 17.900  1.95100E-14  4.16715E-14  5.03159E-14  5.14513E-14  4.75431E-14  1.39643E-14  2.97099E-14  3.56059E-14  3.61302E-14  3.32376E-14
 18.000  1.25313E-14  2.67826E-14  3.23827E-14  3.31760E-14  3.07211E-14  8.94282E-15  1.90465E-14  2.28768E-14  2.32786E-14  2.14737E-14
 18.100  8.00486E-15  1.71187E-14  2.07252E-14  2.12714E-14  1.97378E-14  5.69726E-15  1.21461E-14  1.46187E-14  1.49145E-14  1.37938E-14
 18.200  5.08560E-15  1.08820E-14  1.31910E-14  1.35622E-14  1.26095E-14  3.61073E-15  7.70483E-15  9.29115E-15  9.50251E-15  8.81021E-15
 18.300  3.21347E-15  6.87983E-15  8.34965E-15  8.59897E-15  8.01029E-15  2.27647E-15  4.86186E-15  5.87340E-15  6.02094E-15  5.59543E-15
 18.400  2.01958E-15  4.32606E-15  5.25631E-15  5.42199E-15  5.06025E-15  1.42781E-15  3.05182E-15  3.69298E-15  3.79403E-15  3.53382E-15
 18.500  1.26245E-15  2.70560E-15  3.29103E-15  3.40005E-15  3.17896E-15  8.90887E-16  1.90562E-15  2.30962E-15  2.37773E-15  2.21942E-15
 18.600  7.84962E-16  1.68309E-15  2.04944E-15  2.12051E-15  1.98613E-15  5.52996E-16  1.18370E-15  1.43679E-15  1.48206E-15  1.38623E-15
 18.700  4.85481E-16  1.04143E-15  1.26941E-15  1.31535E-15  1.23411E-15  3.41487E-16  7.31443E-16  8.89083E-16  9.18799E-16  8.61095E-16
 18.800  2.98674E-16  6.40988E-16  7.82079E-16  8.11518E-16  7.62674E-16  2.09789E-16  4.49635E-16  5.47266E-16  5.66558E-16  5.31987E-16
 18.900  1.82783E-16  3.92441E-16  4.79280E-16  4.98001E-16  4.68792E-16  1.28219E-16  2.74971E-16  3.35097E-16  3.47495E-16  3.26890E-16
 19.000  1.11275E-16  2.39011E-16  2.92167E-16  3.03982E-16  2.86610E-16  7.79638E-17  1.67289E-16  2.04113E-16  2.12006E-16  1.99788E-16
 19.100  6.73898E-17  1.44806E-16  1.77170E-16  1.84572E-16  1.74296E-16  4.71636E-17  1.01254E-16  1.23682E-16  1.28662E-16  1.21455E-16
 19.200  4.06009E-17  8.72766E-17  1.06875E-16  1.11480E-16  1.05434E-16  2.83858E-17  6.09709E-17  7.45567E-17  7.76738E-17  7.34446E-17
 19.300  2.43351E-17  5.23309E-17  6.41360E-17  6.69813E-17  6.34431E-17  1.69974E-17  3.65267E-17  4.47119E-17  4.66474E-17  4.41785E-17
 19.400  1.45109E-17  3.12162E-17  3.82893E-17  4.00356E-17  3.79763E-17  1.01265E-17  2.17713E-17  2.66762E-17  2.78690E-17  2.64353E-17
 19.500  8.60860E-18  1.85256E-17  2.27413E-17  2.38061E-17  2.26140E-17  6.00253E-18  1.29107E-17  1.58343E-17  1.65641E-17  1.57359E-17
 19.600  5.08108E-18  1.09381E-17  1.34376E-17  1.40829E-17  1.33965E-17  3.54013E-18  7.61752E-18  9.35102E-18  9.79444E-18  9.31845E-18
 19.700  2.98382E-18  6.42550E-18  7.89976E-18  8.28827E-18  7.89520E-18  2.07739E-18  4.47184E-18  5.49428E-18  5.76189E-18  5.48977E-18
 19.800  1.74339E-18  3.75552E-18  4.62059E-18  4.85309E-18  4.62921E-18  1.21294E-18  2.61200E-18  3.21191E-18  3.37236E-18  3.21762E-18
 19.900  1.01351E-18  2.18395E-18  2.68894E-18  2.82726E-18  2.70043E-18  7.04678E-19  1.51804E-18  1.86821E-18  1.96380E-18  1.87627E-18
  67 170 200   0.100
  0.000  5.74340E-02 -2.94801E-16 -4.57967E-16 -5.12880E-16 -4.72062E-16  9.46471E-02 -5.12023E-16 -7.49401E-16 -1.10082E-15  6.72330E-16
  0.100  5.74654E-02 -5.09280E-05 -3.45983E-08 -7.72566E-12 -1.88825E-15  9.46275E-02  7.80412E-05  4.62959E-08  1.07765E-12 -1.14439E-15
  0.200  5.75585E-02 -2.00971E-04 -5.48154E-07 -4.89254E-10 -2.20982E-13  9.45699E-02  3.06977E-04  7.30407E-07  6.47473E-11 -7.56128E-13
  0.300  5.77111E-02 -4.42039E-04 -2.72983E-06 -5.47540E-09 -5.50398E-12  9.44773E-02  6.71592E-04  3.61199E-06  6.56903E-10 -1.92893E-11
  0.400  5.79189E-02 -7.61095E-04 -8.43097E-06 -3.00130E-08 -5.32280E-11  9.43544E-02  1.14767E-03  1.10459E-05  3.08008E-09 -1.91365E-10
  0.500  5.81767E-02 -1.14079E-03 -1.99801E-05 -1.10905E-07 -3.04368E-10  9.42077E-02  1.70360E-03  2.58449E-05  8.90070E-09 -1.13055E-09
  0.600  5.84779E-02 -1.56034E-03 -3.99446E-05 -3.18516E-07 -1.24379E-09  9.40446E-02  2.30251E-03  5.08637E-05  1.68215E-08 -4.80698E-09
  0.700  5.88148E-02 -1.99655E-03 -7.08587E-05 -7.67023E-07 -4.01897E-09  9.38733E-02  2.90463E-03  8.85511E-05  1.55131E-08 -1.62729E-08
  0.800  5.91791E-02 -2.42496E-03 -1.14939E-04 -1.62049E-06 -1.09066E-08  9.37020E-02  3.46997E-03  1.40523E-04 -2.85127E-08 -4.65803E-08
  0.900  5.95623E-02 -2.82111E-03 -1.73810E-04 -3.09257E-06 -2.58429E-08  9.35387E-02  3.96077E-03  2.07202E-04 -1.87914E-07 -1.17195E-07
  1.000  5.99555E-02 -3.16178E-03 -2.48267E-04 -5.43850E-06 -5.48985E-08  9.33909E-02  4.34396E-03  2.87572E-04 -5.95091E-07 -2.66093E-07
  1.100  6.03500E-02 -3.42613E-03 -3.38090E-04 -8.93885E-06 -1.06541E-07  9.32647E-02  4.59312E-03  3.79066E-04 -1.46376E-06 -5.55539E-07
  1.200  6.07377E-02 -3.59682E-03 -4.41931E-04 -1.38760E-05 -1.91523E-07  9.31650E-02  4.69004E-03  4.77611E-04 -3.10792E-06 -1.08128E-06
  1.300  6.11111E-02 -3.66090E-03 -5.57282E-04 -2.05051E-05 -3.22258E-07  9.30952E-02  4.62573E-03  5.77826E-04 -5.95422E-06 -1.98259E-06
  1.400  6.14636E-02 -3.61043E-03 -6.80531E-04 -2.90218E-05 -5.11641E-07  9.30570E-02  4.40080E-03  6.73352E-04 -1.05436E-05 -3.45226E-06
  1.500  6.17894E-02 -3.44294E-03 -8.07107E-04 -3.95310E-05 -7.71358E-07  9.30504E-02  4.02524E-03  7.57298E-04 -1.75191E-05 -5.74536E-06
  1.600  6.20844E-02 -3.16155E-03 -9.31697E-04 -5.20187E-05 -1.10988E-06  9.30737E-02  3.51768E-03  8.22748E-04 -2.75985E-05 -9.18540E-06
  1.700  6.23452E-02 -2.77478E-03 -1.04853E-03 -6.63308E-05 -1.53043E-06  9.31238E-02  2.90408E-03  8.63298E-04 -4.15305E-05 -1.41664E-05
  1.800  6.25699E-02 -2.29611E-03 -1.15171E-03 -8.21609E-05 -2.02933E-06  9.31963E-02  2.21608E-03  8.73581E-04 -6.00386E-05 -2.11498E-05
  1.900  6.27578E-02 -1.74330E-03 -1.23555E-03 -9.90488E-05 -2.59514E-06  9.32857E-02  1.48906E-03  8.49728E-04 -8.37543E-05 -3.06540E-05
  2.000  6.29094E-02 -1.13745E-03 -1.29493E-03 -1.16389E-04 -3.20897E-06  9.33857E-02  7.59987E-04  7.89736E-04 -1.13146E-04 -4.32382E-05
  2.100  6.30263E-02 -5.01943E-04 -1.32564E-03 -1.33451E-04 -3.84620E-06  9.34895E-02  6.52820E-05  6.93723E-04 -1.48452E-04 -5.94774E-05
  2.200  6.31108E-02  1.38716E-04 -1.32461E-03 -1.49403E-04 -4.47967E-06  9.35901E-02 -5.61221E-04  5.64039E-04 -1.89616E-04 -7.99321E-05
  2.300  6.31663E-02  7.60122E-04 -1.29016E-03 -1.63349E-04 -5.08416E-06  9.36806E-02 -1.09014E-03  4.05234E-04 -2.36241E-04 -1.05111E-04
  2.400  6.31967E-02  1.33913E-03 -1.22212E-03 -1.74361E-04 -5.64159E-06  9.37543E-02 -1.49807E-03  2.23878E-04 -2.87561E-04 -1.35433E-04
  2.500  6.32063E-02  1.85494E-03 -1.12189E-03 -1.81516E-04 -6.14639E-06  9.38056E-02 -1.76876E-03  2.82505E-05 -3.42428E-04 -1.71183E-04
  2.600  6.31998E-02  2.29005E-03 -9.92448E-04 -1.83934E-04 -6.60983E-06  9.38294E-02 -1.89383E-03 -1.72095E-04 -3.99329E-04 -2.12474E-04
  2.700  6.31817E-02  2.63098E-03 -8.38176E-04 -1.80803E-04 -7.06259E-06  9.38218E-02 -1.87299E-03 -3.66867E-04 -4.56415E-04 -2.59210E-04
  2.800  6.31565E-02  2.86890E-03 -6.64752E-04 -1.71413E-04 -7.55440E-06  9.37803E-02 -1.71383E-03 -5.45635E-04 -5.11559E-04 -3.11055E-04
  2.900  6.31283E-02  2.99989E-03 -4.78897E-04 -1.55183E-04 -8.15005E-06  9.37031E-02 -1.43106E-03 -6.98480E-04 -5.62426E-04 -3.67416E-04
  3.000  6.31003E-02  3.02510E-03 -2.88107E-04 -1.31676E-04 -8.92138E-06  9.35898E-02 -1.04543E-03 -8.16644E-04 -6.06562E-04 -4.27422E-04
  3.100  6.30750E-02  2.95066E-03 -1.00358E-04 -1.00635E-04 -9.93528E-06  9.34410E-02 -5.82171E-04 -8.93149E-04 -6.41493E-04 -4.89933E-04
  3.200  6.30535E-02  2.78735E-03  7.62109E-05 -6.20014E-05 -1.12385E-05  9.32576E-02 -6.92292E-05 -9.23341E-04 -6.64843E-04 -5.53547E-04
  3.300  6.30356E-02  2.55021E-03  2.33610E-04 -1.59441E-05 -1.28406E-05  9.30410E-02  4.64682E-04 -9.05335E-04 -6.74455E-04 -6.16624E-04
  3.400  6.30195E-02  2.25786E-03  3.64310E-04  3.71054E-05 -1.46965E-05  9.27920E-02  9.92107E-04 -8.40300E-04 -6.68528E-04 -6.77322E-04
  3.500  6.30014E-02  1.93183E-03  4.61535E-04  9.64212E-05 -1.66917E-05  9.25110E-02  1.48879E-03 -7.32569E-04 -6.45749E-04 -7.33649E-04
  3.600  6.29757E-02  1.59576E-03  5.19537E-04  1.60950E-04 -1.86323E-05  9.21970E-02  1.93540E-03 -5.89551E-04 -6.05438E-04 -7.83516E-04
  3.700  6.29346E-02  1.27449E-03  5.33841E-04  2.29282E-04 -2.02419E-05  9.18475E-02  2.31902E-03 -4.21419E-04 -5.47680E-04 -8.24817E-04
  3.800  6.28685E-02  9.93186E-04  5.01462E-04  2.99633E-04 -2.11682E-05  9.14578E-02  2.63407E-03 -2.40591E-04 -4.73437E-04 -8.55505E-04
  3.900  6.27658E-02  7.76384E-04  4.21084E-04  3.69845E-04 -2.10004E-05  9.10210E-02  2.88290E-03 -6.10076E-05 -3.84643E-04 -8.73682E-04
  4.000  6.26135E-02  6.47106E-04  2.93196E-04  4.37401E-04 -1.92970E-05  9.05281E-02  3.07570E-03  1.02740E-04 -2.84250E-04 -8.77701E-04
  4.100  6.23972E-02  6.25948E-04  1.20175E-04  4.99484E-04 -1.56241E-05  8.99675E-02  3.22993E-03  2.36396E-04 -1.76222E-04 -8.66258E-04
  4.200  6.21017E-02  7.30261E-04 -9.36920E-05  5.53052E-04 -9.60067E-06  8.93261E-02  3.36916E-03  3.27066E-04 -6.54612E-05 -8.38493E-04
  4.300  6.17117E-02  9.73400E-04 -3.42254E-04  5.94952E-04 -9.48032E-07  8.85889E-02  3.52148E-03  3.64209E-04  4.23357E-05 -7.94078E-04
  4.400  6.12119E-02  1.36409E-03 -6.17623E-04  6.22073E-04  1.04613E-05  8.77403E-02  3.71751E-03  3.40507E-04  1.40905E-04 -7.33287E-04
  4.500  6.05881E-02  1.90591E-03 -9.10386E-04  6.31509E-04  2.45610E-05  8.67645E-02  3.98820E-03  2.52558E-04  2.23710E-04 -6.57055E-04
  4.600  5.98277E-02  2.59701E-03 -1.20991E-03  6.20751E-04  4.10598E-05  8.56460E-02  4.36250E-03  1.01301E-04  2.84302E-04 -5.66993E-04
  4.700  5.89200E-02  3.42992E-03 -1.50471E-03  5.87873E-04  5.94258E-05  8.43711E-02  4.86516E-03 -1.07853E-04  3.16715E-04 -4.65376E-04
  4.800  5.78570E-02  4.39167E-03 -1.78291E-03  5.31714E-04  7.88913E-05  8.29279E-02  5.51472E-03 -3.65218E-04  3.15878E-04 -3.55090E-04
  4.900  5.66338E-02  5.46405E-03 -2.03279E-03  4.52021E-04  9.84787E-05  8.13072E-02  6.32187E-03 -6.57355E-04  2.78007E-04 -2.39535E-04
  5.000  5.52487E-02  6.62417E-03 -2.24327E-03  3.49559E-04  1.17048E-04  7.95033E-02  7.28834E-03 -9.67881E-04  2.00940E-04 -1.22492E-04
  5.100  5.37035E-02  7.84516E-03 -2.40450E-03  2.26159E-04  1.33363E-04  7.75138E-02  8.40632E-03 -1.27852E-03  8.43984E-05 -7.95095E-06
  5.200  5.20034E-02  9.09711E-03 -2.50836E-03  8.47031E-05  1.46174E-04  7.53402E-02  9.65850E-03 -1.57029E-03 -6.98804E-05  1.00085E-04
  5.300  5.01571E-02  1.03481E-02 -2.54889E-03 -7.09659E-05  1.54303E-04  7.29879E-02  1.10188E-02 -1.82480E-03 -2.58127E-04  1.97804E-04
  5.400  4.81762E-02  1.15656E-02 -2.52269E-03 -2.36195E-04  1.56739E-04  7.04660E-02  1.24534E-02 -2.02545E-03 -4.74670E-04  2.81799E-04
  5.500  4.60753E-02  1.27173E-02 -2.42908E-03 -4.05735E-04  1.52716E-04  6.77868E-02  1.39226E-02 -2.15853E-03 -7.12202E-04  3.49250E-04
  5.600  4.38712E-02  1.37727E-02 -2.27023E-03 -5.74005E-04  1.41783E-04  6.49658E-02  1.53830E-02 -2.21415E-03 -9.62162E-04  3.98090E-04
  5.700  4.15827E-02  1.47041E-02 -2.05105E-03 -7.35380E-04  1.23852E-04  6.20212E-02  1.67893E-02 -2.18678E-03 -1.21521E-03  4.27117E-04
  5.800  3.92296E-02  1.54878E-02 -1.77895E-03 -8.84487E-04  9.92155E-05  5.89733E-02  1.80969E-02 -2.07557E-03 -1.46175E-03  4.36057E-04
  5.900  3.68328E-02  1.61046E-02 -1.46347E-03 -1.01649E-03  6.85431E-05  5.58439E-02  1.92641E-02 -1.88433E-03 -1.69248E-03  4.25563E-04
  6.000  3.44134E-02  1.65409E-02 -1.11582E-03 -1.12735E-03  3.28447E-05  5.26560E-02  2.02543E-02 -1.62109E-03 -1.89894E-03  3.97164E-04
  6.100  3.19922E-02  1.67887E-02 -7.48240E-04 -1.21400E-03 -6.58834E-06  4.94334E-02  2.10371E-02 -1.29754E-03 -2.07391E-03  3.53149E-04
  6.200  2.95896E-02  1.68459E-02 -3.73407E-04 -1.27449E-03 -4.82616E-05  4.61998E-02  2.15902E-02 -9.28146E-04 -2.21180E-03  2.96415E-04
  6.300  2.72246E-02  1.67162E-02 -3.80120E-06 -1.30806E-03 -9.05701E-05  4.29789E-02  2.18997E-02 -5.29132E-04 -2.30891E-03  2.30277E-04
  6.400  2.49151E-02  1.64086E-02  3.48895E-04 -1.31508E-03 -1.31896E-04  3.97938E-02  2.19604E-02 -1.17477E-04 -2.36349E-03  1.58260E-04
  6.500  2.26774E-02  1.59369E-02  6.74324E-04 -1.29702E-03 -1.70702E-04  3.66662E-02  2.17762E-02  2.90140E-04 -2.37575E-03  8.38963E-05
  6.600  2.05257E-02  1.53188E-02  9.63868E-04 -1.25626E-03 -2.05622E-04  3.36170E-02  2.13584E-02  6.78261E-04 -2.34769E-03  1.05272E-05
  6.700  1.84725E-02  1.45751E-02  1.21095E-03 -1.19591E-03 -2.35522E-04  3.06650E-02  2.07259E-02  1.03343E-03 -2.28288E-03 -5.88621E-05
  6.800  1.65279E-02  1.37289E-02  1.41120E-03 -1.11962E-03 -2.59559E-04  2.78274E-02  1.99030E-02  1.34476E-03 -2.18611E-03 -1.21775E-04
  6.900  1.47001E-02  1.28041E-02  1.56249E-03 -1.03130E-03 -2.77207E-04  2.51191E-02  1.89183E-02  1.60431E-03 -2.06303E-03 -1.76289E-04
  7.000  1.29950E-02  1.18252E-02  1.66479E-03 -9.34919E-04 -2.88258E-04  2.25526E-02  1.78034E-02  1.80723E-03 -1.91978E-03 -2.21103E-04
  7.100  1.14163E-02  1.08157E-02  1.72003E-03 -8.34305E-04 -2.92811E-04  2.01380E-02  1.65911E-02  1.95169E-03 -1.76262E-03 -2.55531E-04
  7.200  9.96577E-03  9.79772E-03  1.73177E-03 -7.32966E-04 -2.91240E-04  1.78828E-02  1.53140E-02  2.03862E-03 -1.59756E-03 -2.79470E-04
  7.300  8.64335E-03  8.79126E-03  1.70482E-03 -6.33953E-04 -2.84142E-04  1.57920E-02  1.40035E-02  2.07136E-03 -1.43016E-03 -2.93321E-04
  7.400  7.44704E-03  7.81381E-03  1.64494E-03 -5.39782E-04 -2.72287E-04  1.38677E-02  1.26885E-02  2.05516E-03 -1.26525E-03 -2.97905E-04
  7.500  6.37335E-03  6.87998E-03  1.55836E-03 -4.52383E-04 -2.56554E-04  1.21099E-02  1.13947E-02  1.99666E-03 -1.10684E-03 -2.94351E-04
  7.600  5.41739E-03  6.00135E-03  1.45150E-03 -3.73098E-04 -2.37877E-04  1.05161E-02  1.01439E-02  1.90338E-03 -9.58040E-04 -2.83989E-04
  7.700  4.57312E-03  5.18647E-03  1.33061E-03 -3.02716E-04 -2.17186E-04  9.08180E-03  8.95405E-03  1.78315E-03 -8.21073E-04 -2.68249E-04
  7.800  3.83357E-03  4.44101E-03  1.20150E-03 -2.41532E-04 -1.95364E-04  7.80055E-03  7.83880E-03  1.64373E-03 -6.97306E-04 -2.48562E-04
  7.900  3.19110E-03  3.76796E-03  1.06936E-03 -1.89419E-04 -1.73211E-04  6.66451E-03  6.80783E-03  1.49241E-03 -5.87355E-04 -2.26287E-04
  8.000  2.63763E-03  3.16793E-03  9.38615E-04 -1.45922E-04 -1.51414E-04  5.66459E-03  5.86702E-03  1.33574E-03 -4.91204E-04 -2.02650E-04
  8.100  2.16483E-03  2.63954E-03  8.12847E-04 -1.10343E-04 -1.30535E-04  4.79082E-03  5.01893E-03  1.17933E-03 -4.08332E-04 -1.78705E-04
  8.200  1.76437E-03  2.17974E-03  6.94794E-04 -8.18299E-05 -1.11006E-04  4.03271E-03  4.26320E-03  1.02776E-03 -3.37848E-04 -1.55312E-04
  8.300  1.42806E-03  1.78428E-03  5.86375E-04 -5.94511E-05 -9.31276E-05  3.37947E-03  3.59710E-03  8.84546E-04 -2.78617E-04 -1.33134E-04
  8.400  1.14803E-03  1.44801E-03  4.88764E-04 -4.22604E-05 -7.70831E-05  2.82036E-03  3.01609E-03  7.52206E-04 -2.29369E-04 -1.12639E-04
  8.500  9.16834E-04  1.16522E-03  4.02486E-04 -2.93473E-05 -6.29511E-05  2.34489E-03  2.51426E-03  6.32320E-04 -1.88794E-04 -9.41236E-05
  8.600  7.27571E-04  9.30004E-04  3.27529E-04 -1.98735E-05 -5.07224E-05  1.94302E-03  2.08484E-03  5.25669E-04 -1.55613E-04 -7.77344E-05
  8.700  5.73924E-04  7.36422E-04  2.63462E-04 -1.30955E-05 -4.03195E-05  1.60531E-03  1.72058E-03  4.32366E-04 -1.28629E-04 -6.34954E-05
  8.800  4.50211E-04  5.78758E-04  2.09550E-04 -8.37629E-06 -3.16148E-05  1.32303E-03  1.41413E-03  3.52007E-04 -1.06762E-04 -5.13364E-05
  8.900  3.51393E-04  4.51641E-04  1.64855E-04 -5.18734E-06 -2.44474E-05  1.08825E-03  1.15826E-03  2.83804E-04 -8.90644E-05 -4.11202E-05
  9.000  2.73066E-04  3.50153E-04  1.28329E-04 -3.10365E-06 -1.86383E-05  8.93811E-04  9.46112E-04  2.26718E-04 -7.47279E-05 -3.26663E-05
  9.100  2.11434E-04  2.69889E-04  9.88885E-05 -1.79394E-06 -1.40032E-05  7.33410E-04  7.71310E-04  1.79563E-04 -6.30780E-05 -2.57713E-05
  9.200  1.63270E-04  2.06979E-04  7.54733E-05 -1.00799E-06 -1.03617E-05  6.01514E-04  6.28078E-04  1.41099E-04 -5.35629E-05 -2.02247E-05
  9.300  1.25866E-04  1.58090E-04  5.70870E-05 -5.63060E-07 -7.54489E-06  4.93341E-04  5.11273E-04  1.10100E-04 -4.57390E-05 -1.58213E-05
  9.400  9.69788E-05  1.20395E-04  4.28258E-05 -3.30327E-07 -5.39984E-06  4.04798E-04  4.16391E-04  8.54050E-05 -3.92547E-05 -1.23696E-05
  9.500  7.47730E-05  9.15392E-05  3.18929E-05 -2.22541E-07 -3.79219E-06  3.32419E-04  3.39547E-04  6.59489E-05 -3.38348E-05 -9.69663E-06
  9.600  5.77660E-05  6.95898E-05  2.36039E-05 -1.83229E-07 -2.60705E-06  2.73293E-04  2.77440E-04  5.07828E-05 -2.92652E-05 -7.65089E-06
  9.700  4.47739E-05  5.29827E-05  1.73844E-05 -1.77786E-07 -1.74856E-06  2.24998E-04  2.27297E-04  3.90808E-05 -2.53803E-05 -6.10253E-06
  9.800  3.48612E-05  4.04704E-05  1.27624E-05 -1.86434E-07 -1.13857E-06  1.85528E-04  1.86813E-04  3.01388E-05 -2.20522E-05 -4.94275E-06
  9.900  2.72970E-05  3.10702E-05  9.35768E-06 -1.98921E-07 -7.14696E-07  1.53238E-04  1.54097E-04  2.33677E-05 -1.91815E-05 -4.08202E-06
 10.000  2.15156E-05  2.40179E-05  6.86915E-06 -2.10697E-07 -4.28170E-07  1.26784E-04  1.27604E-04  1.82826E-05 -1.66909E-05 -3.44788E-06
 10.100  1.70832E-05  1.87256E-05  5.06260E-06 -2.20326E-07 -2.41539E-07  1.05071E-04  1.06088E-04  1.44906E-05 -1.45193E-05 -2.98257E-06
 10.200  1.36696E-05  1.47457E-05  3.75851E-06 -2.27826E-07 -1.26528E-07  8.72111E-05  8.85486E-05  1.16777E-05 -1.26186E-05 -2.64070E-06
 10.300  1.10250E-05  1.17406E-05  2.82120E-06 -2.33692E-07 -6.20891E-08  7.24872E-05  7.41856E-05  9.59615E-06 -1.09498E-05 -2.38709E-06
 10.400  8.96168E-06  9.45774E-06  2.14939E-06 -2.38398E-07 -3.27243E-08  6.03194E-05  6.23642E-05  8.05344E-06 -9.48166E-06 -2.19486E-06
 10.500  7.33899E-06  7.70942E-06  1.66831E-06 -2.42189E-07 -2.70983E-08  5.02394E-05  5.25816E-05  6.90162E-06 -8.18840E-06 -2.04379E-06
 10.600  6.05170E-06  6.35687E-06  1.32326E-06 -2.45057E-07 -3.69388E-08  4.18694E-05  4.44406E-05  6.02871E-06 -7.04886E-06 -1.91898E-06
 10.700  5.02119E-06  5.29799E-06  1.07458E-06 -2.46794E-07 -5.61938E-08  3.49038E-05  3.76280E-05  5.35124E-06 -6.04535E-06 -1.80969E-06
 10.800  4.18863E-06  4.45788E-06  8.93708E-07 -2.47085E-07 -8.04130E-08  2.90951E-05  3.18967E-05  4.80812E-06 -5.16293E-06 -1.70847E-06
 10.900  3.50989E-06  3.78170E-06  7.60190E-07 -2.45594E-07 -1.06309E-07  2.42428E-05  2.70517E-05  4.35563E-06 -4.38877E-06 -1.61040E-06
 11.000  2.95176E-06  3.22938E-06  6.59505E-07 -2.42033E-07 -1.31457E-07  2.01836E-05  2.29387E-05  3.96333E-06 -3.71173E-06 -1.51249E-06
 11.100  2.48909E-06  2.77163E-06  5.81422E-07 -2.36209E-07 -1.54096E-07  1.67843E-05  1.94351E-05  3.61082E-06 -3.12192E-06 -1.41325E-06
 11.200  2.10278E-06  2.38708E-06  5.18810E-07 -2.28049E-07 -1.72999E-07  1.39358E-05  1.64429E-05  3.28509E-06 -2.61044E-06 -1.31222E-06
 11.300  1.77817E-06  2.06009E-06  4.66770E-07 -2.17606E-07 -1.87383E-07  1.15485E-05  1.38833E-05  2.97853E-06 -2.16919E-06 -1.20972E-06
 11.400  1.50397E-06  1.77923E-06  4.22006E-07 -2.05055E-07 -1.96846E-07  9.54818E-06  1.16921E-05  2.68724E-06 -1.79069E-06 -1.10657E-06
 11.500  1.27140E-06  1.53607E-06  3.82356E-07 -1.90667E-07 -2.01307E-07  7.87355E-06  9.81673E-06  2.40979E-06 -1.46802E-06 -1.00389E-06
 11.600  1.07355E-06  1.32438E-06  3.46455E-07 -1.74798E-07 -2.00962E-07  6.47339E-06  8.21347E-06  2.14627E-06 -1.19473E-06 -9.02910E-07
 11.700  9.04938E-07  1.13946E-06  3.13479E-07 -1.57853E-07 -1.96223E-07  5.30480E-06  6.84548E-06  1.89760E-06 -9.64846E-07 -8.04884E-07
 11.800  7.61139E-07  9.77708E-07  2.82959E-07 -1.40266E-07 -1.87667E-07  4.33172E-06  5.68138E-06  1.66495E-06 -7.72841E-07 -7.10969E-07
 11.900  6.38546E-07  8.36269E-07  2.54648E-07 -1.22476E-07 -1.75982E-07  3.52365E-06  4.69410E-06  1.44947E-06 -6.13649E-07 -6.22166E-07
 12.000  5.34164E-07  7.12817E-07  2.28422E-07 -1.04900E-07 -1.61910E-07  2.85476E-06  3.86009E-06  1.25202E-06 -4.82660E-07 -5.39282E-07
 12.100  4.45471E-07  6.05381E-07  2.04219E-07 -8.79204E-08 -1.46205E-07  2.30304E-06  3.15870E-06  1.07307E-06 -3.75717E-07 -4.62906E-07
 12.200  3.70313E-07  5.12233E-07  1.81992E-07 -7.18661E-08 -1.29589E-07  1.84978E-06  2.57170E-06  9.12673E-07 -2.89110E-07 -3.93408E-07
 12.300  3.06831E-07  4.31823E-07  1.61690E-07 -5.70050E-08 -1.12716E-07  1.47897E-06  2.08300E-06  7.70457E-07 -2.19566E-07 -3.30949E-07
 12.400  2.53404E-07  3.62732E-07  1.43243E-07 -4.35380E-08 -9.61558E-08  1.17701E-06  1.67837E-06  6.45693E-07 -1.64219E-07 -2.75499E-07
 12.500  2.08612E-07  3.03652E-07  1.26561E-07 -3.15968E-08 -8.03722E-08  9.32279E-07  1.34526E-06  5.37354E-07 -1.20591E-07 -2.26868E-07
 12.600  1.71209E-07  2.53373E-07  1.11537E-07 -2.12476E-08 -6.57213E-08  7.34917E-07  1.07262E-06  4.44200E-07 -8.65589E-08 -1.84729E-07
 12.700  1.40101E-07  2.10780E-07  9.80506E-08 -1.24956E-08 -5.24517E-08  5.76567E-07  8.50799E-07  3.64852E-07 -6.03178E-08 -1.48655E-07
 12.800  1.14327E-07  1.74856E-07  8.59763E-08 -5.29356E-09 -4.07120E-08  4.50181E-07  6.71401E-07  2.97865E-07 -4.03498E-08 -1.18147E-07
 12.900  9.30539E-08  1.44677E-07  7.51882E-08  4.49069E-10 -3.05623E-08  3.49839E-07  5.27176E-07  2.41790E-07 -2.53877E-08 -9.26623E-08
 13.000  7.55557E-08  1.19416E-07  6.55652E-08  4.85555E-09 -2.19890E-08  2.70597E-07  4.11911E-07  1.95222E-07 -1.43829E-08 -7.16402E-08
 13.100  6.12090E-08  9.83389E-08  5.69941E-08  8.07173E-09 -1.49198E-08  2.08349E-07  3.20327E-07  1.56835E-07 -6.47407E-09 -5.45220E-08
 13.200  4.94805E-08  8.08027E-08  4.93715E-08  1.02562E-08 -9.23944E-09  1.59707E-07  2.47972E-07  1.25413E-07 -9.59599E-10 -4.07688E-08
 13.300  3.99175E-08  6.62482E-08  4.26043E-08  1.15714E-08 -4.80455E-09  1.21895E-07  1.91124E-07  9.98547E-08  2.72752E-09 -2.98738E-08
 13.400  3.21382E-08  5.41946E-08  3.66098E-08  1.21768E-08 -1.45619E-09  9.26488E-08  1.46698E-07  7.91897E-08  5.04162E-09 -2.13716E-08
 13.500  2.58230E-08  4.42315E-08  3.13142E-08  1.22222E-08  9.69229E-10  7.01402E-08  1.12157E-07  6.25709E-08  6.34347E-09 -1.48433E-08
 13.600  2.07060E-08  3.60113E-08  2.66518E-08  1.18442E-08  2.63136E-09  5.28991E-08  8.54326E-08  4.92719E-08  6.91661E-09 -9.91956E-09
 13.700  1.65671E-08  2.92412E-08  2.25633E-08  1.11634E-08  3.67965E-09  3.97531E-08  6.48504E-08  3.86767E-08  6.98135E-09 -6.28013E-09
 13.800  1.32248E-08  2.36756E-08  1.89947E-08  1.02823E-08  4.24908E-09  2.97732E-08  4.90676E-08  3.02695E-08  6.70656E-09 -3.65242E-09
 13.900  1.05305E-08  1.91094E-08  1.58962E-08  9.28619E-09  4.45774E-09  2.22281E-08  3.70140E-08  2.36227E-08  6.21963E-09 -1.80823E-09
 14.000  8.36229E-09  1.53714E-08  1.32215E-08  8.24275E-09  4.40587E-09  1.65458E-08  2.78430E-08  1.83850E-08  5.61473E-09 -5.59752E-10
 14.100  6.62088E-09  1.23191E-08  1.09271E-08  7.20401E-09  4.17608E-09  1.22820E-08  2.08892E-08  1.42701E-08  4.95978E-09  2.44973E-10
 14.200  5.22526E-09  9.83382E-09  8.97203E-09  6.20792E-09  3.83447E-09  9.09334E-09  1.56335E-08  1.10463E-08  4.30214E-09  7.26786E-10
 14.300  4.10948E-09  7.81672E-09  7.31771E-09  5.28035E-09  3.43217E-09  6.71614E-09  1.16727E-08  8.52726E-09  3.67333E-09  9.80046E-10
 14.400  3.21987E-09  6.18548E-09  5.92805E-09  4.43720E-09  3.00735E-09  4.94900E-09  8.69577E-09  6.56402E-09  3.09289E-09  1.07703E-09
 14.500  2.51276E-09  4.87151E-09  4.76942E-09  3.68639E-09  2.58721E-09  3.63884E-09  6.46385E-09  5.03781E-09  2.57144E-09  1.07193E-09
 14.600  1.95261E-09  3.81768E-09  3.81075E-09  3.02974E-09  2.19004E-09  2.66986E-09  4.79434E-09  3.85441E-09  2.11321E-09  1.00444E-09
 14.700  1.51054E-09  2.97642E-09  3.02363E-09  2.46458E-09  1.82708E-09  1.95484E-09  3.54822E-09  2.93930E-09  1.71795E-09  9.02863E-10
 14.800  1.16308E-09  2.30818E-09  2.38239E-09  1.98522E-09  1.50418E-09  1.42834E-09  2.62008E-09  2.23366E-09  1.38250E-09  7.86667E-10
 14.900  8.91167E-10  1.78016E-09  1.86407E-09  1.58405E-09  1.22327E-09  1.04145E-09  1.93019E-09  1.69118E-09  1.10186E-09  6.68700E-10
 15.000  6.79374E-10  1.36523E-09  1.44836E-09  1.25248E-09  9.83517E-10  7.57716E-10  1.41845E-09  1.27549E-09  8.70145E-10  5.56922E-10
 15.100  5.15217E-10  1.04102E-09  1.11754E-09  9.81615E-10  7.82299E-10  5.50036E-10  1.03967E-09  9.58059E-10  6.81106E-10  4.55796E-10
 15.200  3.88637E-10  7.89189E-10  8.56328E-10  7.62777E-10  6.15946E-10  3.98327E-10  7.59932E-10  7.16559E-10  5.28605E-10  3.67364E-10
 15.300  2.91556E-10  5.94752E-10  6.51654E-10  5.87818E-10  4.80288E-10  2.87735E-10  5.53824E-10  5.33552E-10  4.06873E-10  2.92063E-10
 15.400  2.17509E-10  4.45550E-10  4.92508E-10  4.49335E-10  3.71047E-10  2.07289E-10  4.02353E-10  3.95452E-10  3.10668E-10  2.29325E-10
 15.500  1.61354E-10  3.31776E-10  3.69698E-10  3.40772E-10  2.84107E-10  1.48908E-10  2.91338E-10  2.91699E-10  2.35362E-10  1.78011E-10
 15.600  1.19013E-10  2.45564E-10  2.75639E-10  2.56450E-10  2.15674E-10  1.06644E-10  2.10211E-10  2.14110E-10  1.76953E-10  1.36713E-10
 15.700  8.72772E-11  1.80654E-10  2.04135E-10  1.91538E-10  1.62366E-10  7.61286E-11  1.51114E-10  1.56368E-10  1.32048E-10  1.03949E-10
 15.800  6.36327E-11  1.32095E-10  1.50175E-10  1.42000E-10  1.21250E-10  5.41595E-11  1.08209E-10  1.13610E-10  9.78182E-11  7.82910E-11
 15.900  4.61232E-11  9.60012E-11  1.09750E-10  1.04511E-10  8.98362E-11  3.83915E-11  7.71713E-11  8.21109E-11  7.19423E-11  5.84359E-11
 16.000  3.32360E-11  6.93461E-11  7.96827E-11  7.63719E-11  6.60531E-11  2.71114E-11  5.48040E-11  5.90288E-11  5.25387E-11  4.32407E-11
 16.100  2.38091E-11  4.97881E-11  5.74778E-11  5.54182E-11  4.82042E-11  1.90701E-11  3.87496E-11  4.22060E-11  3.81025E-11  3.17317E-11
 16.200  1.69557E-11  3.55298E-11  4.11942E-11  3.99364E-11  3.49218E-11  1.33588E-11  2.72747E-11  3.00128E-11  2.74443E-11  2.30997E-11
 16.300  1.20042E-11  2.52017E-11  2.93357E-11  2.85844E-11  2.51184E-11  9.31813E-12  1.91090E-11  2.12246E-11  1.96345E-11  1.66856E-11
 16.400  8.44874E-12  1.77684E-11  2.07589E-11  2.03223E-11  1.79404E-11  6.47115E-12  1.33245E-11  1.49264E-11  1.39539E-11  1.19617E-11
 16.500  5.91152E-12  1.24525E-11  1.45977E-11  1.43531E-11  1.27254E-11  4.47373E-12  9.24604E-12  1.04386E-11  9.85188E-12  8.51239E-12
 16.600  4.11207E-12  8.67491E-12  1.02014E-11  1.00712E-11  8.96526E-12  3.07855E-12  6.38433E-12  7.25916E-12  6.91073E-12  6.01435E-12
 16.700  2.84369E-12  6.00743E-12  7.08517E-12  7.02123E-12  6.27407E-12  2.10847E-12  4.38627E-12  5.01980E-12  4.81664E-12  4.21964E-12
 16.800  1.95512E-12  4.13561E-12  4.89082E-12  4.86386E-12  4.36191E-12  1.43712E-12  2.99825E-12  3.45172E-12  3.33590E-12  2.94017E-12
 16.900  1.33642E-12  2.83029E-12  3.35563E-12  3.34822E-12  3.01291E-12  9.74745E-13  2.03896E-12  2.36011E-12  2.29593E-12  2.03488E-12
 17.000  9.08247E-13  1.92565E-12  2.28850E-12  2.29056E-12  2.06783E-12  6.57858E-13  1.37943E-12  1.60464E-12  1.57040E-12  1.39902E-12
 17.100  6.13712E-13  1.30254E-12  1.55142E-12  1.55738E-12  1.41026E-12  4.41765E-13  9.28365E-13  1.08486E-12  1.06757E-12  9.55606E-13
 17.200  4.12322E-13  8.75969E-13  1.04552E-12  1.05245E-12  9.55812E-13  2.95153E-13  6.21522E-13  7.29325E-13  7.21340E-13  6.48550E-13
 17.300  2.75444E-13  5.85712E-13  7.00458E-13  7.06946E-13  6.43824E-13  1.96192E-13  4.13906E-13  4.87562E-13  4.84474E-13  4.37381E-13
 17.400  1.82964E-13  3.89396E-13  4.66545E-13  4.72036E-13  4.31035E-13  1.29742E-13  2.74186E-13  3.24118E-13  3.23451E-13  2.93134E-13
 17.500  1.20850E-13  2.57410E-13  3.08950E-13  3.13323E-13  2.86839E-13  8.53554E-14  1.80668E-13  2.14264E-13  2.14674E-13  1.95253E-13
 17.600  7.93755E-14  1.69200E-13  2.03414E-13  2.06757E-13  1.89744E-13  5.58632E-14  1.18416E-13  1.40856E-13  1.41646E-13  1.29266E-13
 17.700  5.18443E-14  1.10594E-13  1.33166E-13  1.35644E-13  1.24776E-13  3.63711E-14  7.72009E-14  9.20856E-14  9.29186E-14  8.50666E-14
 17.800  3.36746E-14  7.18842E-14  8.66848E-14  8.84777E-14  8.15740E-14  2.35569E-14  5.00637E-14  5.98694E-14  6.06034E-14  5.56481E-14
 17.900  2.17522E-14  4.64641E-14  5.61104E-14  5.73828E-14  5.30213E-14  1.51778E-14  3.22933E-14  3.87103E-14  3.93012E-14  3.61897E-14
 18.000  1.39738E-14  2.98675E-14  3.61172E-14  3.70053E-14  3.42649E-14  9.72802E-15  2.07201E-14  2.48923E-14  2.53424E-14  2.33985E-14
 18.100  8.92789E-15  1.90938E-14  2.31190E-14  2.37300E-14  2.20177E-14  6.20251E-15  1.32241E-14  1.59195E-14  1.62496E-14  1.50413E-14
 18.200  5.67310E-15  1.21398E-14  1.47171E-14  1.51322E-14  1.40681E-14  3.93404E-15  8.39528E-15  1.01259E-14  1.03611E-14  9.61383E-15
 18.300  3.58543E-15  7.67654E-15  9.31738E-15  9.59610E-15  8.93847E-15  2.48221E-15  5.30162E-15  6.40600E-15  6.56985E-15  6.11007E-15
 18.400  2.25383E-15  4.82805E-15  5.86670E-15  6.05189E-15  5.64767E-15  1.55802E-15  3.33035E-15  4.03086E-15  4.14293E-15  3.86148E-15
 18.500  1.40921E-15  3.02024E-15  3.67400E-15  3.79584E-15  3.54873E-15  9.72840E-16  2.08106E-15  2.52278E-15  2.59823E-15  2.42683E-15
 18.600  8.76419E-16  1.87926E-15  2.28845E-15  2.36788E-15  2.21765E-15  6.04299E-16  1.29361E-15  1.57051E-15  1.62062E-15  1.51677E-15
 18.700  5.42182E-16  1.16310E-15  1.41780E-15  1.46914E-15  1.37829E-15  3.73429E-16  7.99919E-16  9.72506E-16  1.00539E-15  9.42794E-16
 18.800  3.33645E-16  7.16063E-16  8.73724E-16  9.06634E-16  8.51998E-16  2.29571E-16  4.92068E-16  5.99027E-16  6.20367E-16  5.82833E-16
 18.900  2.04241E-16  4.38526E-16  5.35587E-16  5.56518E-16  5.23838E-16  1.40405E-16  3.01125E-16  3.67038E-16  3.80750E-16  3.58360E-16
 19.000  1.24374E-16  2.67154E-16  3.26584E-16  3.39797E-16  3.20355E-16  8.54304E-17  1.83323E-16  2.23717E-16  2.32445E-16  2.19158E-16
 19.100  7.53454E-17  1.61906E-16  1.98099E-16  2.06379E-16  1.94875E-16  5.17146E-17  1.11032E-16  1.35650E-16  1.41158E-16  1.33314E-16
 19.200  4.54082E-17  9.76128E-17  1.19537E-16  1.24690E-16  1.17920E-16  3.11452E-17  6.69025E-17  8.18243E-17  8.52716E-17  8.06648E-17
 19.300  2.72252E-17  5.85474E-17  7.17575E-17  7.49422E-17  7.09793E-17  1.86618E-17  4.01062E-17  4.91019E-17  5.12426E-17  4.85513E-17
 19.400  1.62397E-17  3.49360E-17  4.28536E-17  4.48089E-17  4.25018E-17  1.11252E-17  2.39201E-17  2.93141E-17  3.06336E-17  2.90695E-17
 19.500  9.63757E-18  2.07403E-17  2.54609E-17  2.66536E-17  2.53177E-17  6.59874E-18  1.41940E-17  1.74111E-17  1.82186E-17  1.73144E-17
 19.600  5.69044E-18  1.22502E-17  1.50501E-17  1.57730E-17  1.50036E-17  3.89422E-18  8.37999E-18  1.02887E-17  1.07794E-17  1.02594E-17
 19.700  3.34290E-18  7.19890E-18  8.85093E-18  9.28641E-18  8.84569E-18  2.28662E-18  4.92254E-18  6.04898E-18  6.34526E-18  6.04778E-18
 19.800  1.95393E-18  4.20915E-18  5.17889E-18  5.43962E-18  5.18852E-18  1.33594E-18  2.87706E-18  3.53839E-18  3.71609E-18  3.54681E-18
 19.900  1.13635E-18  2.44871E-18  3.01503E-18  3.17019E-18  3.02791E-18  7.76622E-19  1.67313E-18  2.05939E-18  2.16530E-18  2.06948E-18
  67 171 200   0.100
  0.000  5.73456E-02 -3.18075E-16 -4.26742E-16 -4.50334E-16 -1.50201E-15  9.44640E-02 -4.96507E-16 -7.70217E-16 -3.87787E-16 -3.00403E-15
  0.100  5.73747E-02 -4.99131E-05 -3.53245E-08 -8.62130E-12 -2.18865E-15  9.44470E-02  7.65771E-05  4.65403E-08  4.06644E-12 -3.93385E-15
  0.200  5.74614E-02 -1.96946E-04 -5.59553E-07 -5.46034E-10 -3.87162E-13  9.43971E-02  3.01305E-04  7.34385E-07  2.54361E-10 -3.60769E-13
  0.300  5.76035E-02 -4.33113E-04 -2.78571E-06 -6.11293E-09 -9.72634E-12  9.43169E-02  6.59505E-04  3.63265E-06  2.78554E-09 -9.29834E-12
  0.400  5.77977E-02 -7.45543E-04 -8.59978E-06 -3.35236E-08 -9.44846E-11  9.42105E-02  1.12779E-03  1.11131E-05  1.47984E-08 -9.32142E-11
  0.500  5.80391E-02 -1.11712E-03 -2.03687E-05 -1.23955E-07 -5.43402E-10  9.40835E-02  1.67560E-03  2.60141E-05  5.24392E-08 -5.57898E-10
  0.600  5.83221E-02 -1.52734E-03 -4.06938E-05 -3.56268E-07 -2.23674E-09  9.39426E-02  2.26721E-03  5.12233E-05  1.42682E-07 -2.40798E-09
  0.700  5.86401E-02 -1.95331E-03 -7.21303E-05 -8.58719E-07 -7.29119E-09  9.37948E-02  2.86403E-03  8.92279E-05  3.20885E-07 -8.28829E-09
  0.800  5.89857E-02 -2.37094E-03 -1.16895E-04 -1.81615E-06 -1.99948E-08  9.36475E-02  3.42707E-03  1.41680E-04  6.22087E-07 -2.41520E-08
  0.900  5.93511E-02 -2.75612E-03 -1.76589E-04 -3.47024E-06 -4.79632E-08  9.35080E-02  3.91943E-03  2.09030E-04  1.06513E-06 -6.19112E-08
  1.000  5.97286E-02 -3.08596E-03 -2.51954E-04 -6.11117E-06 -1.03358E-07  9.33830E-02  4.30859E-03  2.90262E-04  1.63012E-06 -1.43288E-07
  1.100  6.01100E-02 -3.33997E-03 -3.42690E-04 -1.00603E-05 -2.03932E-07  9.32784E-02  4.56834E-03  3.82771E-04  2.23121E-06 -3.04984E-07
  1.200  6.04879E-02 -3.50110E-03 -4.47348E-04 -1.56444E-05 -3.73638E-07  9.31987E-02  4.68039E-03  4.82396E-04  2.68817E-06 -6.05125E-07
  1.300  6.08549E-02 -3.55659E-03 -5.63299E-04 -2.31637E-05 -6.42544E-07  9.31475E-02  4.63532E-03  5.83602E-04  2.70096E-06 -1.13069E-06
  1.400  6.12045E-02 -3.49868E-03 -6.86809E-04 -3.28563E-05 -1.04589E-06  9.31266E-02  4.43305E-03  6.79810E-04  1.83206E-06 -2.00544E-06
  1.500  6.15311E-02 -3.32497E-03 -8.13182E-04 -4.48627E-05 -1.62227E-06  9.31365E-02  4.08271E-03  7.63838E-04 -4.99277E-07 -3.39744E-06
  1.600  6.18298E-02 -3.03860E-03 -9.36997E-04 -5.91940E-05 -2.41099E-06  9.31761E-02  3.60193E-03  8.28427E-04 -5.00745E-06 -5.52533E-06
  1.700  6.20969E-02 -2.64801E-03 -1.05239E-03 -7.57069E-05 -3.44903E-06  9.32430E-02  3.01565E-03  8.66799E-04 -1.25141E-05 -8.66201E-06
  1.800  6.23298E-02 -2.16657E-03 -1.15341E-03 -9.40888E-05 -4.76796E-06  9.33334E-02  2.35454E-03  8.73207E-04 -2.39052E-05 -1.31348E-05
  1.900  6.25270E-02 -1.61187E-03 -1.23434E-03 -1.13854E-04 -6.39130E-06  9.34424E-02  1.65312E-03  8.43439E-04 -4.00729E-05 -1.93209E-05
  2.000  6.26879E-02 -1.00486E-03 -1.29006E-03 -1.34352E-04 -8.33296E-06  9.35642E-02  9.47654E-04  7.75225E-04 -6.18474E-05 -2.76378E-05
  2.100  6.28134E-02 -3.68748E-04 -1.31639E-03 -1.54786E-04 -1.05970E-05  9.36922E-02  2.74096E-04  6.68526E-04 -8.99219E-05 -3.85277E-05
  2.200  6.29049E-02  2.72110E-04 -1.31032E-03 -1.74242E-04 -1.31790E-05  9.38197E-02 -3.34005E-04  5.25685E-04 -1.24778E-04 -5.24372E-05
  2.300  6.29650E-02  8.93406E-04 -1.27025E-03 -1.91723E-04 -1.60693E-05  9.39393E-02 -8.47337E-04  3.51417E-04 -1.66615E-04 -6.97925E-05
  2.400  6.29971E-02  1.47204E-03 -1.19610E-03 -2.06191E-04 -1.92566E-05  9.40443E-02 -1.24239E-03  1.52638E-04 -2.15289E-04 -9.09708E-05
  2.500  6.30050E-02  1.98722E-03 -1.08940E-03 -2.16601E-04 -2.27334E-05  9.41281E-02 -1.50267E-03 -6.18479E-05 -2.70272E-04 -1.16271E-04
  2.600  6.29932E-02  2.42136E-03 -9.53204E-04 -2.21947E-04 -2.64998E-05  9.41847E-02 -1.61940E-03 -2.81807E-04 -3.30616E-04 -1.45885E-04
  2.700  6.29662E-02  2.76090E-03 -7.92026E-04 -2.21291E-04 -3.05666E-05  9.42092E-02 -1.59189E-03 -4.96145E-04 -3.94948E-04 -1.79869E-04
  2.800  6.29287E-02  2.99689E-03 -6.11654E-04 -2.13800E-04 -3.49559E-05  9.41974E-02 -1.42726E-03 -6.93558E-04 -4.61481E-04 -2.18120E-04
  2.900  6.28850E-02  3.12529E-03 -4.18925E-04 -1.98773E-04 -3.96984E-05  9.41464E-02 -1.13980E-03 -8.63238E-04 -5.28047E-04 -2.60360E-04
  3.000  6.28391E-02  3.14714E-03 -2.21453E-04 -1.75667E-04 -4.48269E-05  9.40545E-02 -7.49854E-04 -9.95585E-04 -5.92152E-04 -3.06120E-04
  3.100  6.27941E-02  3.06850E-03 -2.73378E-05 -1.44121E-04 -5.03654E-05  9.39208E-02 -2.82363E-04 -1.08289E-03 -6.51052E-04 -3.54734E-04
  3.200  6.27521E-02  2.90016E-03  1.55143E-04 -1.03989E-04 -5.63159E-05  9.37453E-02  2.34922E-04 -1.11992E-03 -7.01858E-04 -4.05342E-04
  3.300  6.27136E-02  2.65717E-03  3.17849E-04 -5.53579E-05 -6.26416E-05  9.35283E-02  7.73367E-04 -1.10443E-03 -7.41656E-04 -4.56895E-04
  3.400  6.26780E-02  2.35826E-03  4.53081E-04  1.41058E-06 -6.92507E-05  9.32707E-02  1.30546E-03 -1.03746E-03 -7.67655E-04 -5.08168E-04
  3.500  6.26423E-02  2.02509E-03  5.53878E-04  6.56545E-05 -7.59810E-05  9.29727E-02  1.80673E-03 -9.23498E-04 -7.77355E-04 -5.57781E-04
  3.600  6.26019E-02  1.68145E-03  6.14283E-04  1.36377E-04 -8.25893E-05  9.26339E-02  2.25755E-03 -7.70327E-04 -7.68719E-04 -6.04228E-04
  3.700  6.25500E-02  1.35236E-03  6.29602E-04  2.12218E-04 -8.87468E-05  9.22530E-02  2.64450E-03 -5.88759E-04 -7.40364E-04 -6.45912E-04
  3.800  6.24777E-02  1.06311E-03  5.96618E-04  2.91437E-04 -9.40437E-05  9.18268E-02  2.96145E-03 -3.92057E-04 -6.91734E-04 -6.81193E-04
  3.900  6.23742E-02  8.38349E-04  5.13782E-04  3.71909E-04 -9.80042E-05  9.13506E-02  3.21009E-03 -1.95186E-04 -6.23260E-04 -7.08439E-04
  4.000  6.22269E-02  7.01143E-04  3.81358E-04  4.51143E-04 -1.00112E-04  9.08176E-02  3.39991E-03 -1.38817E-05 -5.36479E-04 -7.26094E-04
  4.100  6.20219E-02  6.72059E-04  2.01516E-04  5.26326E-04 -9.98466E-05  9.02189E-02  3.54765E-03  1.36385E-04 -4.34101E-04 -7.32753E-04
  4.200  6.17440E-02  7.68346E-04 -2.16313E-05  5.94399E-04 -9.67278E-05  8.95438E-02  3.67622E-03  2.41491E-04 -3.20003E-04 -7.27243E-04
  4.300  6.13778E-02  1.00319E-03 -2.82066E-04  6.52163E-04 -9.03652E-05  8.87802E-02  3.81313E-03  2.89706E-04 -1.99149E-04 -7.08708E-04
  4.400  6.09079E-02  1.38511E-03 -5.71977E-04  6.96417E-04 -8.05091E-05  8.79144E-02  3.98858E-03  2.72628E-04 -7.74120E-05 -6.76693E-04
  4.500  6.03195E-02  1.91746E-03 -8.81962E-04  7.24122E-04 -6.70970E-05  8.69324E-02  4.23327E-03  1.85914E-04  3.86830E-05 -6.31216E-04
  4.600  5.95994E-02  2.59812E-03 -1.20132E-03  7.32582E-04 -5.02902E-05  8.58203E-02  4.57614E-03  2.97543E-05  1.42298E-04 -5.72830E-04
  4.700  5.87360E-02  3.41944E-03 -1.51842E-03  7.19623E-04 -3.04971E-05  8.45647E-02  5.04219E-03 -1.90958E-04  2.26677E-04 -5.02654E-04
  4.800  5.77204E-02  4.36829E-03 -1.82118E-03  6.83777E-04 -8.37659E-06  8.31535E-02  5.65040E-03 -4.66798E-04  2.85578E-04 -4.22379E-04
  4.900  5.65464E-02  5.42641E-03 -2.09752E-03  6.24428E-04  1.51778E-05  8.15768E-02  6.41222E-03 -7.84315E-04  3.13703E-04 -3.34233E-04
  5.000  5.52111E-02  6.57092E-03 -2.33599E-03  5.41930E-04  3.90770E-05  7.98272E-02  7.33027E-03 -1.12683E-03  3.07095E-04 -2.40912E-04
  5.100  5.37151E-02  7.77509E-03 -2.52626E-03  4.37661E-04  6.20943E-05  7.79002E-02  8.39784E-03 -1.47548E-03  2.63466E-04 -1.45468E-04
  5.200  5.20624E-02  9.00924E-03 -2.65968E-03  3.14032E-04  8.29401E-05  7.57948E-02  9.59883E-03 -1.81047E-03  1.82425E-04 -5.11733E-05
  5.300  5.02603E-02  1.02418E-02 -2.72973E-03  1.74414E-04  1.00348E-04  7.35134E-02  1.09084E-02 -2.11232E-03  6.55866E-05  3.86538E-05
  5.400  4.83197E-02  1.14405E-02 -2.73240E-03  2.30068E-05  1.13162E-04  7.10620E-02  1.22939E-02 -2.36316E-03 -8.34658E-05  1.20824E-04
  5.500  4.62539E-02  1.25735E-02 -2.66642E-03 -1.35349E-04  1.20425E-04  6.84499E-02  1.37169E-02 -2.54789E-03 -2.59347E-04  1.92459E-04
  5.600  4.40792E-02  1.36108E-02 -2.53336E-03 -2.95413E-04  1.21451E-04  6.56898E-02  1.51348E-02 -2.65509E-03 -4.55171E-04  2.51161E-04
  5.700  4.18137E-02  1.45251E-02 -2.33758E-03 -4.51818E-04  1.15881E-04  6.27975E-02  1.65031E-02 -2.67774E-03 -6.62951E-04  2.95146E-04
  5.800  3.94771E-02  1.52930E-02 -2.08602E-03 -5.99345E-04  1.03717E-04  5.97911E-02  1.77780E-02 -2.61349E-03 -8.74084E-04  3.23351E-04
  5.900  3.70901E-02  1.58957E-02 -1.78782E-03 -7.33206E-04  8.53244E-05  5.66911E-02  1.89181E-02 -2.46477E-03 -1.07986E-03  3.35484E-04
  6.000  3.46740E-02  1.63198E-02 -1.45386E-03 -8.49282E-04  6.14175E-05  5.35198E-02  1.98868E-02 -2.23840E-03 -1.27198E-03  3.32024E-04
  6.100  3.22501E-02  1.65574E-02 -1.09620E-03 -9.44331E-04  3.30087E-05  5.03006E-02  2.06538E-02 -1.94506E-03 -1.44301E-03  3.14175E-04
  6.200  2.98390E-02  1.66067E-02 -7.27397E-04 -1.01612E-03  1.34395E-06  4.70576E-02  2.11965E-02 -1.59844E-03 -1.58680E-03  2.83766E-04
  6.300  2.74608E-02  1.64713E-02 -3.59959E-04 -1.06350E-03 -3.21794E-05  4.38153E-02  2.15007E-02 -1.21428E-03 -1.69876E-03  2.43120E-04
  6.400  2.51340E-02  1.61602E-02 -5.67783E-06 -1.08642E-03 -6.61022E-05  4.05980E-02  2.15608E-02 -8.09343E-04 -1.77600E-03  1.94891E-04
  6.500  2.28759E-02  1.56870E-02  3.24881E-04 -1.08585E-03 -9.89944E-05  3.74292E-02  2.13800E-02 -4.00372E-04 -1.81743E-03  1.41894E-04
  6.600  2.07015E-02  1.50695E-02  6.22813E-04 -1.06365E-03 -1.29539E-04  3.43313E-02  2.09694E-02 -3.13973E-06 -1.82366E-03  8.69301E-05
  6.700  1.86243E-02  1.43284E-02  8.81193E-04 -1.02245E-03 -1.56602E-04  3.13253E-02  2.03471E-02  3.68350E-04 -1.79683E-03  3.26282E-05
  6.800  1.66553E-02  1.34864E-02  1.09525E-03 -9.65386E-04 -1.79290E-04  2.84302E-02  1.95369E-02  7.02483E-04 -1.74034E-03 -1.86861E-05
  6.900  1.48033E-02  1.25675E-02  1.26243E-03 -8.95929E-04 -1.96981E-04  2.56625E-02  1.85670E-02  9.90444E-04 -1.65856E-03 -6.50943E-05
  7.000  1.30751E-02  1.15959E-02  1.38228E-03 -8.17668E-04 -2.09339E-04  2.30367E-02  1.74686E-02  1.22640E-03 -1.55649E-03 -1.05148E-04
  7.100  1.14749E-02  1.05951E-02  1.45629E-03 -7.34108E-04 -2.16309E-04  2.05642E-02  1.62741E-02  1.40749E-03 -1.43939E-03 -1.37897E-04
  7.200  1.00050E-02  9.58686E-03  1.48760E-03 -6.48511E-04 -2.18088E-04  1.82538E-02  1.50159E-02  1.53362E-03 -1.31251E-03 -1.62880E-04
  7.300  8.66545E-03  8.59123E-03  1.48064E-03 -5.63760E-04 -2.15093E-04  1.61111E-02  1.37249E-02  1.60712E-03 -1.18081E-03 -1.80083E-04
  7.400  7.45455E-03  7.62548E-03  1.44080E-03 -4.82271E-04 -2.07908E-04  1.41394E-02  1.24297E-02  1.63231E-03 -1.04871E-03 -1.89881E-04
  7.500  6.36885E-03  6.70405E-03  1.37401E-03 -4.05944E-04 -1.97237E-04  1.23387E-02  1.11559E-02  1.61498E-03 -9.19991E-04 -1.92955E-04
  7.600  5.40340E-03  5.83834E-03  1.28642E-03 -3.36148E-04 -1.83845E-04  1.07068E-02  9.92511E-03  1.56190E-03 -7.97688E-04 -1.90207E-04
  7.700  4.55203E-03  5.03673E-03  1.18402E-03 -2.73748E-04 -1.68512E-04  9.23931E-03  8.75498E-03  1.48031E-03 -6.84058E-04 -1.82672E-04
  7.800  3.80757E-03  4.30471E-03  1.07247E-03 -2.19149E-04 -1.51993E-04  7.92955E-03  7.65901E-03  1.37746E-03 -5.80613E-04 -1.71438E-04
  7.900  3.16213E-03  3.64505E-03  9.56788E-04 -1.72362E-04 -1.34974E-04  6.76941E-03  6.64667E-03  1.26028E-03 -4.88182E-04 -1.57573E-04
  8.000  2.60734E-03  3.05820E-03  8.41304E-04 -1.33085E-04 -1.18056E-04  5.74941E-03  5.72371E-03  1.13505E-03 -4.07006E-04 -1.42072E-04
  8.100  2.13458E-03  2.54258E-03  7.29532E-04 -1.00777E-04 -1.01735E-04  4.85916E-03  4.89251E-03  1.00724E-03 -3.36846E-04 -1.25816E-04
  8.200  1.73521E-03  2.09499E-03  6.24169E-04 -7.47434E-05 -8.63953E-05  4.08770E-03  4.15261E-03  8.81380E-04 -2.77098E-04 -1.09543E-04
  8.300  1.40077E-03  1.71103E-03  5.27128E-04 -5.41989E-05 -7.23102E-05  3.42381E-03  3.50118E-03  7.61019E-04 -2.26906E-04 -9.38381E-05
  8.400  1.12313E-03  1.38542E-03  4.39602E-04 -3.83321E-05 -5.96514E-05  2.85630E-03  2.93361E-03  6.48761E-04 -1.85259E-04 -7.91374E-05
  8.500  8.94643E-04  1.11240E-03  3.62159E-04 -2.63507E-05 -4.84998E-05  2.37428E-03  2.44396E-03  5.46332E-04 -1.51082E-04 -6.57338E-05
  8.600  7.08205E-04  8.85967E-04  2.94848E-04 -1.75172E-05 -3.88600E-05  1.96733E-03  2.02545E-03  4.54696E-04 -1.23299E-04 -5.37955E-05
  8.700  5.57359E-04  7.00187E-04  2.37315E-04 -1.11711E-05 -3.06769E-05  1.62571E-03  1.67086E-03  3.74174E-04 -1.00889E-04 -4.33866E-05
  8.800  4.36311E-04  5.49339E-04  1.88914E-04 -6.74116E-06 -2.38511E-05  1.34043E-03  1.37287E-03  3.04583E-04 -8.29172E-05 -3.44888E-05
  8.900  3.39947E-04  4.28085E-04  1.48804E-04 -3.74940E-06 -1.82544E-05  1.10331E-03  1.12433E-03  2.45362E-04 -6.85574E-05 -2.70232E-05
  9.000  2.63815E-04  3.31561E-04  1.16037E-04 -1.80760E-06 -1.37424E-05  9.07051E-04  9.18450E-04  1.95697E-04 -5.70974E-05 -2.08703E-05
  9.100  2.04096E-04  2.55432E-04  8.96330E-05 -6.09896E-07 -1.01653E-05  7.45191E-04  7.48964E-04  1.54615E-04 -4.79395E-05 -1.58866E-05
  9.200  1.57561E-04  1.95913E-04  6.86305E-05  7.75660E-08 -7.37678E-06  6.12098E-04  6.10192E-04  1.21077E-04 -4.05926E-05 -1.19190E-05
  9.300  1.21513E-04  1.49756E-04  5.21289E-05  4.28151E-07 -5.23960E-06  5.02912E-04  4.97088E-04  9.40422E-05 -3.46608E-05 -8.81478E-06
  9.400  9.37313E-05  1.14227E-04  3.93130E-05  5.66264E-07 -3.62995E-06  4.13488E-04  4.05250E-04  7.25117E-05 -2.98305E-05 -6.42973E-06
  9.500  7.24083E-05  8.70585E-05  2.94665E-05  5.78084E-07 -2.43944E-06  3.40322E-04  3.30887E-04  5.55659E-05 -2.58566E-05 -4.63236E-06
  9.600  5.60924E-05  6.64001E-05  2.19762E-05  5.20991E-07 -1.57585E-06  2.80478E-04  2.70785E-04  4.23809E-05 -2.25499E-05 -3.30669E-06
  9.700  4.36300E-05  5.07629E-05  1.63294E-05  4.31451E-07 -9.62706E-07  2.31518E-04  2.22247E-04  3.22368E-05 -1.97653E-05 -2.35304E-06
  9.800  3.41150E-05  3.89650E-05  1.21062E-05  3.31330E-07 -5.38114E-07  1.91429E-04  1.83040E-04  2.45179E-05 -1.73928E-05 -1.68759E-06
  9.900  2.68428E-05  3.00803E-05  8.96924E-06  2.32734E-07 -2.53098E-07  1.58559E-04  1.51329E-04  1.87077E-05 -1.53485E-05 -1.24125E-06
 10.000  2.12702E-05  2.33911E-05  6.65201E-06  1.41579E-07 -6.97247E-08  1.31562E-04  1.25621E-04  1.43798E-05 -1.35691E-05 -9.57992E-07
 10.100  1.69827E-05  1.83475E-05  4.94745E-06  6.01001E-08  4.08073E-08  1.09342E-04  1.04712E-04  1.11877E-05 -1.20064E-05 -7.93098E-07
 10.200  1.36653E-05  1.45318E-05  3.69684E-06 -1.14604E-08  9.99782E-08  9.10096E-05  8.76346E-05  8.85408E-06 -1.06236E-05 -7.11357E-07
 10.300  1.10808E-05  1.16295E-05  2.78006E-06 -7.37772E-08  1.23568E-07  7.58479E-05  7.36184E-05  7.15937E-06 -9.39256E-06 -6.85427E-07
 10.400  9.05111E-06  9.40552E-06  2.10719E-06 -1.27809E-07  1.23040E-07  6.32761E-05  6.20514E-05  5.93251E-06 -8.29165E-06 -6.94385E-07
 10.500  7.44273E-06  7.68512E-06  1.61156E-06 -1.74459E-07  1.06675E-07  5.28253E-05  5.24496E-05  5.04188E-06 -7.30403E-06 -7.22488E-07
 10.600  6.15606E-06  6.33911E-06  1.24421E-06 -2.14427E-07  8.04582E-08  4.41165E-05  4.44314E-05  4.38778E-06 -6.41650E-06 -7.58150E-07
 10.700  5.11667E-06  5.27239E-06  9.69421E-07 -2.48178E-07  4.87483E-08  3.68432E-05  3.76964E-05  3.89597E-06 -5.61858E-06 -7.93100E-07
 10.800  4.26891E-06  4.41519E-06  7.61360E-07 -2.75974E-07  1.47591E-08  3.07568E-05  3.20081E-05  3.51231E-06 -4.90174E-06 -8.21709E-07
 10.900  3.57112E-06  3.71652E-06  6.01500E-07 -2.97931E-07 -1.91100E-08  2.56552E-05  2.71800E-05  3.19835E-06 -4.25890E-06 -8.40430E-07
 11.000  2.99197E-06  3.13919E-06  4.76668E-07 -3.14092E-07 -5.10578E-08  2.13740E-05  2.30653E-05  2.92768E-06 -3.68398E-06 -8.47360E-07
 11.100  2.50782E-06  2.65616E-06  3.77597E-07 -3.24492E-07 -7.97471E-08  1.77784E-05  1.95473E-05  2.68299E-06 -3.17159E-06 -8.41859E-07
 11.200  2.10074E-06  2.24777E-06  2.97836E-07 -3.29212E-07 -1.04224E-07  1.47577E-05  1.65328E-05  2.45373E-06 -2.71680E-06 -8.24246E-07
 11.300  1.75699E-06  1.89972E-06  2.32936E-07 -3.28426E-07 -1.23870E-07  1.22207E-05  1.39469E-05  2.23416E-06 -2.31498E-06 -7.95536E-07
 11.400  1.46593E-06  1.60150E-06  1.79851E-07 -3.22422E-07 -1.38364E-07  1.00916E-05  1.17285E-05  2.02185E-06 -1.96174E-06 -7.57221E-07
 11.500  1.21924E-06  1.34532E-06  1.36477E-07 -3.11616E-07 -1.47660E-07  8.30736E-06  9.82721E-06  1.81654E-06 -1.65284E-06 -7.11082E-07
 11.600  1.01026E-06  1.12527E-06  1.01328E-07 -2.96547E-07 -1.51945E-07  6.81488E-06  8.20087E-06  1.61917E-06 -1.38419E-06 -6.59034E-07
 11.700  8.33588E-07  9.36689E-07  7.32944E-08 -2.77863E-07 -1.51611E-07  5.56954E-06  6.81357E-06  1.43131E-06 -1.15187E-06 -6.03003E-07
 11.800  6.84715E-07  7.75776E-07  5.14805E-08 -2.56291E-07 -1.47203E-07  4.53350E-06  5.63441E-06  1.25461E-06 -9.52121E-07 -5.44823E-07
 11.900  5.59826E-07  6.39281E-07  3.50976E-08 -2.32610E-07 -1.39381E-07  3.67454E-06  4.63638E-06  1.09054E-06 -7.81396E-07 -4.86168E-07
 12.000  4.55617E-07  5.24324E-07  2.34030E-08 -2.07613E-07 -1.28868E-07  2.96515E-06  3.79571E-06  9.40208E-07 -6.36361E-07 -4.28495E-07
 12.100  3.69193E-07  4.28280E-07  1.56717E-08 -1.82070E-07 -1.16407E-07  2.38178E-06  3.09132E-06  8.04253E-07 -5.13922E-07 -3.73021E-07
 12.200  2.97990E-07  3.48719E-07  1.11907E-08 -1.56698E-07 -1.02718E-07  1.90424E-06  2.50441E-06  6.82854E-07 -4.11230E-07 -3.20706E-07
 12.300  2.39729E-07  2.83382E-07  9.26883E-09 -1.32135E-07 -8.84698E-08  1.51524E-06  2.01828E-06  5.75762E-07 -3.25691E-07 -2.72258E-07
 12.400  1.92386E-07  2.30177E-07  9.25280E-09 -1.08917E-07 -7.42495E-08  1.19997E-06  1.61807E-06  4.82370E-07 -2.54960E-07 -2.28148E-07
 12.500  1.54172E-07  1.87186E-07  1.05456E-08 -8.74659E-08 -6.05485E-08  9.45808E-07  1.29063E-06  4.01797E-07 -1.96933E-07 -1.88630E-07
 12.600  1.23517E-07  1.52678E-07  1.26227E-08 -6.80864E-08 -4.77528E-08  7.42009E-07  1.02440E-06  3.32968E-07 -1.49738E-07 -1.53776E-07
 12.700  9.90585E-08  1.25118E-07  1.50436E-08 -5.09668E-08 -3.61423E-08  5.79481E-07  8.09258E-07  2.74702E-07 -1.11717E-07 -1.23499E-07
 12.800  7.96264E-08  1.03169E-07  1.74577E-08 -3.61877E-08 -2.58961E-08  4.50570E-07  6.36467E-07  2.25776E-07 -8.14125E-08 -9.75933E-08
 12.900  6.42315E-08  8.56889E-08  1.96046E-08 -2.37346E-08 -1.71018E-08  3.48874E-07  4.98504E-07  1.84987E-07 -5.75496E-08 -7.57610E-08
 13.000  5.20478E-08  7.17243E-08  2.13087E-08 -1.35137E-08 -9.76960E-09  2.69069E-07  3.88970E-07  1.51189E-07 -3.90202E-08 -5.76434E-08
 13.100  4.23963E-08  6.04946E-08  2.24705E-08 -5.36984E-09 -3.84655E-09  2.06762E-07  3.02472E-07  1.23328E-07 -2.48670E-08 -4.28465E-08
 13.200  3.47267E-08  5.13749E-08  2.30540E-08  8.96238E-10  7.67634E-10  1.58354E-07  2.34506E-07  1.00454E-07 -1.42677E-08 -3.09624E-08
 13.300  2.85998E-08  4.38756E-08  2.30740E-08  5.51082E-09  4.20586E-09  1.20917E-07  1.81343E-07  8.17322E-08 -6.52199E-09 -2.15874E-08
 13.400  2.36702E-08  3.76213E-08  2.25826E-08  8.71231E-09  6.62016E-09  9.20885E-08  1.39930E-07  6.64430E-08 -1.03750E-09 -1.43357E-08
 13.500  1.96699E-08  3.23303E-08  2.16561E-08  1.07385E-08  8.17016E-09  6.99756E-08  1.07786E-07  5.39735E-08  2.68196E-09 -8.84908E-09
 13.600  1.63935E-08  2.77955E-08  2.03840E-08  1.18164E-08  9.01378E-09  5.30729E-08  8.29117E-08  4.38105E-08  5.04792E-09 -4.80346E-09
 13.700  1.36851E-08  2.38668E-08  1.88599E-08  1.21551E-08  9.30010E-09  4.01920E-08  6.37112E-08  3.55287E-08  6.39772E-09 -1.91237E-09
 13.800  1.14276E-08  2.04372E-08  1.71739E-08  1.19407E-08  9.16445E-09  3.04010E-08  4.89192E-08  2.87789E-08  7.00437E-09  7.20459E-11
 13.900  9.53286E-09  1.74301E-08  1.54078E-08  1.13336E-08  8.72542E-09  2.29743E-08  3.75396E-08  2.32764E-08  7.08553E-09  1.35980E-09
 14.000  7.93469E-09  1.47903E-08  1.36319E-08  1.04680E-08  8.08347E-09  1.73501E-08  2.87936E-08  1.87900E-08  6.81181E-09  2.12528E-09
 14.100  6.58280E-09  1.24763E-08  1.19031E-08  9.45244E-09  7.32087E-09  1.30958E-08  2.20754E-08  1.51327E-08  6.31434E-09  2.51035E-09
 14.200  5.43833E-09  1.04557E-08  1.02648E-08  8.37181E-09  6.50265E-09  9.88039E-09  1.69160E-08  1.21530E-08  5.69155E-09  2.62800E-09
 14.300  4.47056E-09  8.70087E-09  8.74770E-09  7.28973E-09  5.67812E-09  7.45119E-09  1.29539E-08  9.72815E-09  5.01523E-09  2.56625E-09
 14.400  3.65451E-09  7.18732E-09  7.37099E-09  6.25157E-09  4.88288E-09  5.61636E-09  9.91096E-09  7.75817E-09  4.33583E-09  2.39202E-09
 14.500  2.96928E-09  5.89197E-09  6.14402E-09  5.28744E-09  4.14098E-09  4.23055E-09  7.57397E-09  6.16158E-09  3.68706E-09  2.15478E-09
 14.600  2.39697E-09  4.79264E-09  5.06827E-09  4.41522E-09  3.46704E-09  3.18388E-09  5.77933E-09  4.87150E-09  3.08975E-09  1.88995E-09
 14.700  1.92193E-09  3.86788E-09  4.13918E-09  3.64327E-09  2.86832E-09  2.39341E-09  4.40169E-09  3.83287E-09  2.55514E-09  1.62182E-09
 14.800  1.53034E-09  3.09698E-09  3.34785E-09  2.97286E-09  2.34653E-09  1.79655E-09  3.34490E-09  3.00016E-09  2.08752E-09  1.36617E-09
 14.900  1.20990E-09  2.46022E-09  2.68256E-09  2.40029E-09  1.89941E-09  1.34610E-09  2.53513E-09  2.33569E-09  1.68635E-09  1.13238E-09
 15.000  9.49693E-10  1.93906E-09  2.13006E-09  1.91860E-09  1.52205E-09  1.00640E-09  1.91561E-09  1.80817E-09  1.34794E-09  9.25205E-10
 15.100  7.40057E-10  1.51640E-09  1.67650E-09  1.51888E-09  1.20795E-09  7.50517E-10  1.44259E-09  1.39167E-09  1.06672E-09  7.46155E-10
 15.200  5.72516E-10  1.17672E-09  1.30824E-09  1.19138E-09  9.49839E-10  5.58075E-10  1.08234E-09  1.06475E-09  8.36181E-10  5.94606E-10
 15.300  4.39698E-10  9.06157E-10  1.01237E-09  9.26203E-10  7.40241E-10  4.13634E-10  8.08781E-10  8.09690E-10  6.49523E-10  4.68609E-10
 15.400  3.35255E-10  6.92539E-10  7.77050E-10  7.13873E-10  5.71938E-10  3.05485E-10  6.01758E-10  6.11943E-10  5.00133E-10  3.65490E-10
 15.500  2.53788E-10  5.25333E-10  5.91691E-10  5.45642E-10  4.38219E-10  2.24742E-10  4.45684E-10  4.59615E-10  3.81862E-10  2.82275E-10
 15.600  1.90748E-10  3.95564E-10  4.47047E-10  4.13683E-10  3.33045E-10  1.64656E-10  3.28511E-10  3.43043E-10  2.89182E-10  2.15980E-10
 15.700  1.42355E-10  2.95687E-10  3.35192E-10  3.11167E-10  2.51117E-10  1.20106E-10  2.40939E-10  2.54425E-10  2.17262E-10  1.63786E-10
 15.800  1.05495E-10  2.19444E-10  2.49448E-10  2.32257E-10  1.87886E-10  8.72068E-11  1.75803E-10  1.87508E-10  1.61970E-10  1.23144E-10
 15.900  7.76380E-11  1.61708E-10  1.84279E-10  1.72055E-10  1.39520E-10  6.30163E-11  1.27600E-10  1.37319E-10  1.19840E-10  9.18244E-11
 16.000  5.67450E-11  1.18331E-10  1.35156E-10  1.26520E-10  1.02841E-10  4.53106E-11  9.21137E-11  9.99283E-11  8.80165E-11  6.79246E-11
 16.100  4.11930E-11  8.59924E-11  9.84270E-11  9.23654E-11  7.52576E-11  3.24139E-11  6.61318E-11  7.22609E-11  6.41777E-11  4.98565E-11
 16.200  2.97027E-11  6.20667E-11  7.11804E-11  6.69538E-11  5.46825E-11  2.30672E-11  4.72145E-11  5.19259E-11  4.64648E-11  3.63190E-11
 16.300  2.12752E-11  4.44969E-11  5.11237E-11  4.81961E-11  3.94561E-11  1.63286E-11  3.35191E-11  3.70801E-11  3.34071E-11  2.62630E-11
 16.400  1.51388E-11  3.16892E-11  3.64707E-11  3.44564E-11  2.82747E-11  1.14963E-11  2.36615E-11  2.63140E-11  2.38552E-11  1.88550E-11
 16.500  1.07024E-11  2.24201E-11  2.58445E-11  2.44678E-11  2.01255E-11  8.04999E-12  1.66078E-11  1.85583E-11  1.69200E-11  1.34415E-11
 16.600  7.51739E-12  1.57595E-11  1.81942E-11  1.72597E-11  1.42300E-11  5.60579E-12  1.15902E-11  1.30079E-11  1.19217E-11  9.51629E-12
 16.700  5.24668E-12  1.10067E-11  1.27255E-11  1.20956E-11  9.99573E-12  3.88211E-12  8.04215E-12  9.06184E-12  8.34518E-12  6.69176E-12
 16.800  3.63882E-12  7.63863E-12  8.84370E-12  8.42190E-12  6.97610E-12  2.67347E-12  5.54823E-12  6.27450E-12  5.80408E-12  4.67431E-12
 16.900  2.50798E-12  5.26800E-12  6.10718E-12  5.82670E-12  4.83766E-12  1.83084E-12  3.80574E-12  4.31831E-12  4.01114E-12  3.24373E-12
 17.000  1.71791E-12  3.61059E-12  4.19110E-12  4.00589E-12  3.33363E-12  1.24678E-12  2.59555E-12  2.95419E-12  2.75468E-12  2.23649E-12
 17.100  1.16955E-12  2.45946E-12  2.85842E-12  2.73697E-12  2.28293E-12  8.44292E-13  1.76006E-12  2.00897E-12  1.88009E-12  1.53222E-12
 17.200  7.91408E-13  1.66517E-12  1.93760E-12  1.85852E-12  1.55378E-12  5.68535E-13  1.18671E-12  1.35811E-12  1.27531E-12  1.04315E-12
 17.300  5.32322E-13  1.12063E-12  1.30548E-12  1.25436E-12  1.05108E-12  3.80705E-13  7.95581E-13  9.12728E-13  8.59840E-13  7.05797E-13
 17.400  3.55929E-13  7.49668E-13  8.74323E-13  8.41509E-13  7.06746E-13  2.53507E-13  5.30346E-13  6.09835E-13  5.76246E-13  4.74625E-13
 17.500  2.36586E-13  4.98550E-13  5.82093E-13  5.61184E-13  4.72384E-13  1.67868E-13  3.51542E-13  4.05102E-13  3.83895E-13  3.17242E-13
 17.600  1.56342E-13  3.29612E-13  3.85263E-13  3.72038E-13  3.13876E-13  1.10542E-13  2.31713E-13  2.67557E-13  2.54248E-13  2.10779E-13
 17.700  1.02717E-13  2.16657E-13  2.53507E-13  2.45204E-13  2.07336E-13  7.23905E-14  1.51876E-13  1.75705E-13  1.67404E-13  1.39217E-13
 17.800  6.70985E-14  1.41593E-13  1.65848E-13  1.60675E-13  1.36165E-13  4.71450E-14  9.89937E-14  1.14733E-13  1.09588E-13  9.14125E-14
 17.900  4.35818E-14  9.20085E-14  1.07881E-13  1.04682E-13  8.89116E-14  3.05351E-14  6.41676E-14  7.44974E-14  7.13289E-14  5.96754E-14
 18.000  2.81475E-14  5.94501E-14  6.97762E-14  6.78147E-14  5.77257E-14  1.96691E-14  4.13643E-14  4.81019E-14  4.61633E-14  3.87332E-14
 18.100  1.80773E-14  3.81975E-14  4.48768E-14  4.36835E-14  3.72665E-14  1.26009E-14  2.65186E-14  3.08863E-14  2.97083E-14  2.49973E-14
 18.200  1.15454E-14  2.44058E-14  2.87017E-14  2.79818E-14  2.39236E-14  8.02896E-15  1.69085E-14  1.97229E-14  1.90119E-14  1.60415E-14
 18.300  7.33292E-15  1.55076E-14  1.82549E-14  1.78244E-14  1.52725E-14  5.08828E-15  1.07225E-14  1.25253E-14  1.20992E-14  1.02366E-14
 18.400  4.63190E-15  9.79953E-15  1.15467E-14  1.12916E-14  9.69593E-15  3.20735E-15  6.76305E-15  7.91108E-15  7.65764E-15  6.49605E-15
 18.500  2.90986E-15  6.15877E-15  7.26373E-15  7.11398E-15  6.12180E-15  2.01094E-15  4.24281E-15  4.96967E-15  4.82005E-15  4.09960E-15
 18.600  1.81815E-15  3.84969E-15  4.54464E-15  4.45762E-15  3.84412E-15  1.25411E-15  2.64753E-15  3.10512E-15  3.01748E-15  2.57307E-15
 18.700  1.12992E-15  2.39340E-15  2.82809E-15  2.77807E-15  2.40081E-15  7.77989E-16  1.64331E-15  1.92975E-15  1.87884E-15  1.60618E-15
 18.800  6.98457E-16  1.48006E-15  1.75048E-15  1.72206E-15  1.49134E-15  4.80087E-16  1.01461E-15  1.19291E-15  1.16360E-15  9.97209E-16
 18.900  4.29459E-16  9.10397E-16  1.07772E-15  1.06177E-15  9.21444E-16  2.94704E-16  6.23148E-16  7.33529E-16  7.16799E-16  6.15806E-16
 19.000  2.62669E-16  5.57037E-16  6.60012E-16  6.51190E-16  5.66302E-16  1.79963E-16  3.80723E-16  4.48680E-16  4.39226E-16  3.78252E-16
 19.100  1.59813E-16  3.39041E-16  4.02077E-16  3.97276E-16  3.46201E-16  1.09326E-16  2.31400E-16  2.73012E-16  2.67724E-16  2.31107E-16
 19.200  9.67262E-17  2.05281E-16  2.43665E-16  2.41100E-16  2.10534E-16  6.60721E-17  1.39915E-16  1.65258E-16  1.62334E-16  1.40460E-16
 19.300  5.82398E-17  1.23648E-16  1.46897E-16  1.45557E-16  1.27363E-16  3.97260E-17  8.41638E-17  9.95156E-17  9.79195E-17  8.49212E-17
 19.400  3.48859E-17  7.40933E-17  8.81019E-17  8.74214E-17  7.66485E-17  2.37633E-17  5.03680E-17  5.96185E-17  5.87591E-17  5.10755E-17
 19.500  2.07896E-17  4.41708E-17  5.25677E-17  5.22347E-17  4.58897E-17  1.41424E-17  2.99892E-17  3.55338E-17  3.50785E-17  3.05602E-17
 19.600  1.23260E-17  2.61980E-17  3.12051E-17  3.10505E-17  2.73331E-17  8.37397E-18  1.77650E-17  2.10710E-17  2.08343E-17  1.81911E-17
 19.700  7.27086E-18  1.54593E-17  1.84297E-17  1.83637E-17  1.61971E-17  4.93339E-18  1.04705E-17  1.24314E-17  1.23112E-17  1.07729E-17
 19.800  4.26727E-18  9.07633E-18  1.08295E-17  1.08054E-17  9.54927E-18  2.89183E-18  6.14014E-18  7.29725E-18  7.23790E-18  6.34729E-18
 19.900  2.49187E-18  5.30200E-18  6.33143E-18  6.32597E-18  5.60143E-18  1.68665E-18  3.58269E-18  4.26198E-18  4.23380E-18  3.72080E-18
  67 172 200   0.100
  0.000  5.68968E-02 -2.94801E-16 -4.37150E-16 -3.75278E-16 -1.56639E-15  9.36728E-02 -4.96507E-16 -6.45317E-16 -1.18838E-15 -1.85964E-16
  0.100  5.69258E-02 -4.97992E-05 -3.44010E-08 -8.45579E-12 -1.33036E-15  9.36606E-02  7.61694E-05  4.22372E-08  4.34798E-12  2.10282E-15
  0.200  5.70122E-02 -1.96486E-04 -5.44926E-07 -5.35489E-10 -2.75641E-13  9.36245E-02  2.99698E-04  6.66140E-07  2.70794E-10  6.35423E-14
  0.300  5.71540E-02 -4.32060E-04 -2.71289E-06 -5.99397E-09 -6.90018E-12  9.35664E-02  6.55972E-04  3.29223E-06  2.94314E-09  1.37048E-12
  0.400  5.73476E-02 -7.43630E-04 -8.37493E-06 -3.28645E-08 -6.69787E-11  9.34891E-02  1.12170E-03  1.00595E-05  1.54605E-08  9.78376E-12
  0.500  5.75887E-02 -1.11405E-03 -1.98359E-05 -1.21486E-07 -3.84876E-10  9.33966E-02  1.66643E-03  2.35102E-05  5.39285E-08  2.97423E-11
  0.600  5.78715E-02 -1.52277E-03 -3.96282E-05 -3.49062E-07 -1.58259E-09  9.32935E-02  2.25452E-03  4.62020E-05  1.43606E-07 -1.36847E-11
  0.700  5.81897E-02 -1.94686E-03 -7.02380E-05 -8.41044E-07 -5.15262E-09  9.31852E-02  2.84744E-03  8.02898E-05  3.13589E-07 -5.81113E-10
  0.800  5.85359E-02 -2.36221E-03 -1.13819E-04 -1.77804E-06 -1.41106E-08  9.30774E-02  3.40622E-03  1.27129E-04  5.83531E-07 -3.33692E-09
  0.900  5.89026E-02 -2.74466E-03 -1.71922E-04 -3.39589E-06 -3.37953E-08  9.29761E-02  3.89390E-03  1.86944E-04  9.41656E-07 -1.28891E-08
  1.000  5.92820E-02 -3.07134E-03 -2.45254E-04 -5.97730E-06 -7.27002E-08  9.28870E-02  4.27785E-03  2.58597E-04  1.31527E-06 -3.99419E-08
  1.100  5.96662E-02 -3.32176E-03 -3.33502E-04 -9.83475E-06 -1.43169E-07  9.28154E-02  4.53175E-03  3.39498E-04  1.53691E-06 -1.06340E-07
  1.200  6.00475E-02 -3.47893E-03 -4.35222E-04 -1.52852E-05 -2.61767E-07  9.27660E-02  4.63714E-03  4.25648E-04  1.31110E-06 -2.52343E-07
  1.300  6.04188E-02 -3.53020E-03 -5.47818E-04 -2.26187E-05 -4.49157E-07  9.27426E-02  4.58446E-03  5.11837E-04  1.87504E-07 -5.46168E-07
  1.400  6.07735E-02 -3.46798E-03 -6.67604E-04 -3.20639E-05 -7.29376E-07  9.27477E-02  4.37355E-03  5.91965E-04 -2.45331E-06 -1.09545E-06
  1.500  6.11057E-02 -3.29005E-03 -7.89958E-04 -4.37536E-05 -1.12850E-06  9.27826E-02  4.01355E-03  6.59467E-04 -7.39630E-06 -2.05976E-06
  1.600  6.14106E-02 -2.99980E-03 -9.09546E-04 -5.76943E-05 -1.67280E-06  9.28469E-02  3.52217E-03  7.07803E-04 -1.55672E-05 -3.66277E-06
  1.700  6.16841E-02 -2.60593E-03 -1.02061E-03 -7.37423E-05 -2.38665E-06  9.29391E-02  2.92460E-03  7.30979E-04 -2.79858E-05 -6.20239E-06
  1.800  6.19235E-02 -2.12209E-03 -1.11731E-03 -9.15903E-05 -3.29053E-06  9.30558E-02  2.25186E-03  7.24043E-04 -4.56982E-05 -1.00568E-05
  1.900  6.21270E-02 -1.56613E-03 -1.19405E-03 -1.10765E-04 -4.39942E-06  9.31925E-02  1.53889E-03  6.83530E-04 -6.96943E-05 -1.56844E-05
  2.000  6.22940E-02 -9.59230E-04 -1.24584E-03 -1.30635E-04 -5.72212E-06  9.33433E-02  8.22529E-04  6.07819E-04 -1.00815E-04 -2.36160E-05
  2.100  6.24248E-02 -3.24756E-04 -1.26861E-03 -1.50434E-04 -7.26165E-06  9.35013E-02  1.39263E-04  4.97374E-04 -1.39659E-04 -3.44388E-05
  2.200  6.25209E-02  3.12847E-04 -1.25948E-03 -1.69284E-04 -9.01696E-06  9.36591E-02 -4.76803E-04  3.54846E-04 -1.86499E-04 -4.87701E-05
  2.300  6.25846E-02  9.29279E-04 -1.21692E-03 -1.86236E-04 -1.09859E-05  9.38090E-02 -9.95875E-04  1.85044E-04 -2.41206E-04 -6.72241E-05
  2.400  6.26191E-02  1.50155E-03 -1.14095E-03 -2.00306E-04 -1.31689E-05  9.39432E-02 -1.39408E-03 -5.25107E-06 -3.03205E-04 -9.03716E-05
  2.500  6.26282E-02  2.00907E-03 -1.03312E-03 -2.10512E-04 -1.55738E-05  9.40545E-02 -1.65471E-03 -2.07591E-04 -3.71449E-04 -1.18696E-04
  2.600  6.26163E-02  2.43454E-03 -8.96496E-04 -2.15912E-04 -1.82191E-05  9.41363E-02 -1.76899E-03 -4.12299E-04 -4.44418E-04 -1.52547E-04
  2.700  6.25879E-02  2.76476E-03 -7.35548E-04 -2.15635E-04 -2.11373E-05  9.41831E-02 -1.73639E-03 -6.08995E-04 -5.20152E-04 -1.92102E-04
  2.800  6.25478E-02  2.99115E-03 -5.55984E-04 -2.08908E-04 -2.43759E-05  9.41908E-02 -1.56442E-03 -7.87205E-04 -5.96298E-04 -2.37325E-04
  2.900  6.25006E-02  3.11006E-03 -3.64513E-04 -1.95076E-04 -2.79945E-05  9.41564E-02 -1.26794E-03 -9.37008E-04 -6.70182E-04 -2.87944E-04
  3.000  6.24503E-02  3.12292E-03 -1.68588E-04 -1.73624E-04 -3.20602E-05  9.40785E-02 -8.68022E-04 -1.04969E-03 -7.38899E-04 -3.43433E-04
  3.100  6.24004E-02  3.03607E-03  2.38818E-05 -1.44188E-04 -3.66381E-05  9.39567E-02 -3.90406E-04 -1.11837E-03 -7.99408E-04 -4.03007E-04
  3.200  6.23532E-02  2.86053E-03  2.04823E-04 -1.06580E-04 -4.17784E-05  9.37916E-02  1.36287E-04 -1.13856E-03 -8.48647E-04 -4.65634E-04
  3.300  6.23099E-02  2.61147E-03  3.66296E-04 -6.08023E-05 -4.75016E-05  9.35845E-02  6.82568E-04 -1.10863E-03 -8.83655E-04 -5.30049E-04
  3.400  6.22699E-02  2.30764E-03  5.00778E-04 -7.07560E-06 -5.37810E-05  9.33367E-02  1.22013E-03 -1.03008E-03 -9.01698E-04 -5.94786E-04
  3.500  6.22311E-02  1.97061E-03  6.01435E-04  5.41312E-05 -6.05269E-05  9.30496E-02  1.72386E-03 -9.07684E-04 -9.00413E-04 -6.58216E-04
  3.600  6.21892E-02  1.62401E-03  6.62381E-04  1.22068E-04 -6.75719E-05  9.27234E-02  2.17361E-03 -7.49430E-04 -8.77955E-04 -7.18586E-04
  3.700  6.21381E-02  1.29258E-03  6.78902E-04  1.95666E-04 -7.46625E-05  9.23573E-02  2.55567E-03 -5.66186E-04 -8.33148E-04 -7.74073E-04
  3.800  6.20695E-02  1.00135E-03  6.47670E-04  2.73513E-04 -8.14561E-05  9.19491E-02  2.86384E-03 -3.71196E-04 -7.65634E-04 -8.22835E-04
  3.900  6.19730E-02  7.74671E-04  5.66924E-04  3.53824E-04 -8.75285E-05  9.14943E-02  3.09999E-03 -1.79359E-04 -6.76011E-04 -8.63066E-04
  4.000  6.18366E-02  6.35321E-04  4.36614E-04  4.34443E-04 -9.23908E-05  9.09865E-02  3.27399E-03 -6.33571E-06 -5.65943E-04 -8.93058E-04
  4.100  6.16467E-02  6.03639E-04  2.58507E-04  5.12857E-04 -9.55163E-05  9.04173E-02  3.40321E-03  1.32469E-04 -4.38235E-04 -9.11271E-04
  4.200  6.13886E-02  6.96716E-04  3.62407E-05  5.86246E-04 -9.63785E-05  8.97762E-02  3.51135E-03  2.22965E-04 -2.96845E-04 -9.16396E-04
  4.300  6.10472E-02  9.27659E-04 -2.24688E-04  6.51564E-04 -9.44943E-05  8.90510E-02  3.62687E-03  2.53422E-04 -1.46827E-04 -9.07432E-04
  4.400  6.06069E-02  1.30498E-03 -5.17005E-04  7.05648E-04 -8.94735E-05  8.82284E-02  3.78098E-03  2.15407E-04  5.79966E-06 -8.83757E-04
  4.500  6.00530E-02  1.83211E-03 -8.31825E-04  7.45372E-04 -8.10666E-05  8.72940E-02  4.00546E-03  1.04539E-04  1.54279E-04 -8.45192E-04
  4.600  5.93717E-02  2.50710E-03 -1.15890E-03  7.67808E-04 -6.92079E-05  8.62335E-02  4.33028E-03 -7.90080E-05  2.91418E-04 -7.92063E-04
  4.700  5.85510E-02  3.32247E-03 -1.48698E-03  7.70418E-04 -5.40496E-05  8.50331E-02  4.78136E-03 -3.30308E-04  4.09959E-04 -7.25240E-04
  4.800  5.75812E-02  4.26530E-03 -1.80421E-03  7.51240E-04 -3.59799E-05  8.36800E-02  5.37850E-03 -6.39815E-04  5.03002E-04 -6.46153E-04
  4.900  5.64553E-02  5.31752E-03 -2.09861E-03  7.09056E-04 -1.56247E-05  8.21632E-02  6.13371E-03 -9.93839E-04  5.64445E-04 -5.56781E-04
  5.000  5.51691E-02  6.45642E-03 -2.35865E-03  6.43541E-04  6.17185E-06  8.04741E-02  7.04998E-03 -1.37532E-03  5.89404E-04 -4.59607E-04
  5.100  5.37220E-02  7.65540E-03 -2.57376E-03  5.55359E-04  2.83858E-05  7.86069E-02  8.12070E-03 -1.76489E-03  5.74589E-04 -3.57532E-04
  5.200  5.21169E-02  8.88483E-03 -2.73486E-03  4.46208E-04  4.98706E-05  7.65588E-02  9.32958E-03 -2.14205E-03  5.18590E-04 -2.53764E-04
  5.300  5.03598E-02  1.01131E-02 -2.83488E-03  3.18793E-04  6.94283E-05  7.43307E-02  1.06513E-02 -2.48654E-03  4.22047E-04 -1.51669E-04
  5.400  4.84603E-02  1.13080E-02 -2.86909E-03  1.76739E-04  8.58897E-05  7.19268E-02  1.20527E-02 -2.77957E-03  2.87688E-04 -5.46035E-05
  5.500  4.64308E-02  1.24376E-02 -2.83542E-03  2.44344E-05  9.81965E-05  6.93548E-02  1.34944E-02 -3.00509E-03  1.20225E-04  3.42594E-05
  5.600  4.42867E-02  1.34716E-02 -2.73457E-03 -1.33179E-04  1.05479E-04  6.66262E-02  1.49328E-02 -3.15069E-03 -7.38925E-05  1.12106E-04
  5.700  4.20453E-02  1.43827E-02 -2.57003E-03 -2.90861E-04  1.07120E-04  6.37553E-02  1.63226E-02 -3.20837E-03 -2.86844E-04  1.76637E-04
  5.800  3.97261E-02  1.51473E-02 -2.34784E-03 -4.43344E-04  1.02808E-04  6.07597E-02  1.76187E-02 -3.17495E-03 -5.09897E-04  2.26195E-04
  5.900  3.73497E-02  1.57467E-02 -2.07634E-03 -5.85618E-04  9.25564E-05  5.76593E-02  1.87789E-02 -3.05208E-03 -7.33924E-04  2.59852E-04
  6.000  3.49373E-02  1.61674E-02 -1.76568E-03 -7.13191E-04  7.67122E-05  5.44763E-02  1.97658E-02 -2.84598E-03 -9.49940E-04  2.77444E-04
  6.100  3.25108E-02  1.64017E-02 -1.42732E-03 -8.22313E-04  5.59303E-05  5.12345E-02  2.05486E-02 -2.56690E-03 -1.14961E-03  2.79563E-04
  6.200  3.00916E-02  1.64476E-02 -1.07336E-03 -9.10153E-04  3.11311E-05  4.79589E-02  2.11041E-02 -2.22831E-03 -1.32570E-03  2.67495E-04
  6.300  2.77002E-02  1.63092E-02 -7.16022E-04 -9.74907E-04  3.43765E-06  4.46750E-02  2.14180E-02 -1.84592E-03 -1.47243E-03  2.43112E-04
  6.400  2.53563E-02  1.59955E-02 -3.66956E-04 -1.01584E-03 -2.58982E-05  4.14085E-02  2.14847E-02 -1.43662E-03 -1.58570E-03  2.08739E-04
  6.500  2.30781E-02  1.55205E-02 -3.67665E-05 -1.03327E-03 -5.55769E-05  3.81845E-02  2.13075E-02 -1.01748E-03 -1.66324E-03  1.66985E-04
  6.600  2.08817E-02  1.49021E-02  2.65454E-04 -1.02846E-03 -8.43317E-05  3.50271E-02  2.08980E-02 -6.04732E-04 -1.70455E-03  1.20583E-04
  6.700  1.87814E-02  1.41611E-02  5.32453E-04 -1.00350E-03 -1.11002E-04  3.19589E-02  2.02747E-02 -2.12948E-04 -1.71082E-03  7.22152E-05
  6.800  1.67892E-02  1.33207E-02  7.59016E-04 -9.61097E-04 -1.34595E-04  2.90006E-02  1.94620E-02  1.45598E-04 -1.68467E-03  2.43728E-05
  6.900  1.49147E-02  1.24048E-02  9.42043E-04 -9.04423E-04 -1.54332E-04  2.61704E-02  1.84887E-02  4.61375E-04 -1.62989E-03 -2.07715E-05
  7.000  1.31652E-02  1.14376E-02  1.08049E-03 -8.36864E-04 -1.69679E-04  2.34839E-02  1.73866E-02  7.27816E-04 -1.55107E-03 -6.14500E-05
  7.100  1.15456E-02  1.04426E-02  1.17520E-03 -7.61844E-04 -1.80351E-04  2.09537E-02  1.61885E-02  9.41321E-04 -1.45332E-03 -9.63534E-05
  7.200  1.00583E-02  9.44155E-03  1.22866E-03 -6.82643E-04 -1.86311E-04  1.85894E-02  1.49273E-02  1.10109E-03 -1.34188E-03 -1.24647E-04
  7.300  8.70371E-03  8.45425E-03  1.24470E-03 -6.02254E-04 -1.87743E-04  1.63975E-02  1.36342E-02  1.20879E-03 -1.22186E-03 -1.45955E-04
  7.400  7.48013E-03  7.49777E-03  1.22810E-03 -5.23272E-04 -1.85021E-04  1.43812E-02  1.23382E-02  1.26814E-03 -1.09796E-03 -1.60315E-04
  7.500  6.38404E-03  6.58629E-03  1.18427E-03 -4.47827E-04 -1.78662E-04  1.25410E-02  1.10648E-02  1.28440E-03 -9.74332E-04 -1.68114E-04
  7.600  5.41036E-03  5.73097E-03  1.11888E-03 -3.77550E-04 -1.69287E-04  1.08746E-02  9.83561E-03  1.26388E-03 -8.54443E-04 -1.70011E-04
  7.700  4.55271E-03  4.93991E-03  1.03759E-03 -3.13579E-04 -1.57569E-04  9.37728E-03  8.66831E-03  1.21344E-03 -7.41006E-04 -1.66851E-04
  7.800  3.80367E-03  4.21832E-03  9.45734E-04 -2.56590E-04 -1.44190E-04  8.04220E-03  7.57624E-03  1.14004E-03 -6.35989E-04 -1.59588E-04
  7.900  3.15510E-03  3.56879E-03  8.48144E-04 -2.06848E-04 -1.29808E-04  6.86079E-03  6.56868E-03  1.05039E-03 -5.40658E-04 -1.49208E-04
  8.000  2.59834E-03  2.99154E-03  7.49019E-04 -1.64276E-04 -1.15022E-04  5.82316E-03  5.65116E-03  9.50638E-04 -4.55652E-04 -1.36668E-04
  8.100  2.12453E-03  2.48487E-03  6.51825E-04 -1.28530E-04 -1.00355E-04  4.91846E-03  4.82585E-03  8.46169E-04 -3.81082E-04 -1.22845E-04
  8.200  1.72482E-03  2.04547E-03  5.59273E-04 -9.90693E-05 -8.62354E-05  4.13526E-03  4.09207E-03  7.41490E-04 -3.16639E-04 -1.08503E-04
  8.300  1.39054E-03  1.66887E-03  4.73343E-04 -7.52323E-05 -7.29949E-05  3.46192E-03  3.44681E-03  6.40182E-04 -2.61703E-04 -9.42755E-05
  8.400  1.11340E-03  1.34980E-03  3.95332E-04 -5.62933E-05 -6.08686E-05  2.88686E-03  2.88529E-03  5.44920E-04 -2.15447E-04 -8.06531E-05
  8.500  8.85623E-04  1.08248E-03  3.25941E-04 -4.15157E-05 -5.00015E-05  2.39883E-03  2.40143E-03  4.57532E-04 -1.76926E-04 -6.79921E-05
  8.600  7.00003E-04  8.60981E-04  2.65371E-04 -3.01908E-05 -4.04591E-05  1.98713E-03  1.98835E-03  3.79108E-04 -1.45155E-04 -5.65232E-05
  8.700  5.50013E-04  6.79402E-04  2.13426E-04 -2.16659E-05 -3.22408E-05  1.64175E-03  1.63877E-03  3.10111E-04 -1.19161E-04 -4.63693E-05
  8.800  4.29809E-04  5.32102E-04  1.69614E-04 -1.53616E-05 -2.52938E-05  1.35348E-03  1.34533E-03  2.50506E-04 -9.80299E-05 -3.75643E-05
  8.900  3.34244E-04  4.13821E-04  1.33245E-04 -1.07804E-05 -1.95269E-05  1.11399E-03  1.10085E-03  1.99888E-04 -8.09323E-05 -3.00743E-05
  9.000  2.58849E-04  3.19771E-04  1.03509E-04 -7.50736E-06 -1.48244E-05  9.15828E-04  8.98561E-04  1.57591E-04 -6.71363E-05 -2.38162E-05
  9.100  1.99796E-04  2.45692E-04  7.95483E-05 -5.20670E-06 -1.10569E-05  7.52430E-04  7.32204E-04  1.22788E-04 -5.60134E-05 -1.86755E-05
  9.200  1.53854E-04  1.87864E-04  6.05093E-05 -3.61365E-06 -8.09137E-06  6.18081E-04  5.96132E-04  9.45759E-05 -4.70350E-05 -1.45210E-05
  9.300  1.18330E-04  1.43103E-04  4.55831E-05 -2.52508E-06 -5.79823E-06  5.07861E-04  4.85337E-04  7.20386E-05 -3.97651E-05 -1.12162E-05
  9.400  9.10064E-05  1.08724E-04  3.40306E-05 -1.78921E-06 -4.05697E-06  4.17574E-04  3.95456E-04  5.42925E-05 -3.38495E-05 -8.62777E-06
  9.500  7.00828E-05  8.25047E-05  2.51983E-05 -1.29551E-06 -2.75944E-06  3.43683E-04  3.22740E-04  4.05197E-05 -2.90046E-05 -6.63169E-06
  9.600  5.41132E-05  6.26305E-05  1.85236E-05 -9.65600E-07 -1.81167E-06  2.83225E-04  2.64014E-04  2.99866E-05 -2.50054E-05 -5.11651E-06
  9.700  4.19503E-05  4.76425E-05  1.35343E-05 -7.45211E-07 -1.13433E-06  2.33744E-04  2.16620E-04  2.20526E-05 -2.16752E-05 -3.98507E-06
  9.800  3.26937E-05  3.63831E-05  9.84269E-06 -5.97666E-07 -6.62233E-07  1.93210E-04  1.78360E-04  1.61707E-05 -1.88759E-05 -3.15470E-06
  9.900  2.56437E-05  2.79458E-05  7.13670E-06 -4.98657E-07 -3.43118E-07  1.59963E-04  1.47430E-04  1.18839E-05 -1.64998E-05 -2.55659E-06
 10.000  2.02622E-05  2.16294E-05  5.17012E-06 -4.32289E-07 -1.36049E-07  1.32645E-04  1.22366E-04  8.81656E-06 -1.44637E-05 -2.13446E-06
 10.100  1.61385E-05  1.68970E-05  3.75187E-06 -3.88193E-07 -9.65180E-09  1.10155E-04  1.01987E-04  6.66564E-06 -1.27026E-05 -1.84299E-06
 10.200  1.29618E-05  1.33419E-05  2.73602E-06 -3.59511E-07  5.96644E-08  9.15984E-05  8.53461E-05  5.19028E-06 -1.11665E-05 -1.64626E-06
 10.300  1.04980E-05  1.06587E-05  2.01271E-06 -3.41550E-07  8.93450E-08  7.62517E-05  7.16910E-05  4.20207E-06 -9.81660E-06 -1.51611E-06
 10.400  8.57208E-06  8.61978E-06  1.50024E-06 -3.30931E-07  9.21333E-08  6.35303E-05  6.04242E-05  3.55592E-06 -8.62273E-06 -1.43081E-06
 10.500  7.05320E-06  7.05660E-06  1.13854E-06 -3.25082E-07  7.72712E-08  5.29609E-05  5.10737E-05  3.14198E-06 -7.56162E-06 -1.37381E-06
 10.600  5.84394E-06  5.84496E-06  8.83843E-07 -3.21960E-07  5.14558E-08  4.41609E-05  4.32674E-05  2.87866E-06 -6.61519E-06 -1.33277E-06
 10.700  4.87169E-06  4.89370E-06  7.04496E-07 -3.19905E-07  1.95653E-08  3.68197E-05  3.67126E-05  2.70671E-06 -5.76934E-06 -1.29868E-06
 10.800  4.08228E-06  4.13614E-06  5.77776E-07 -3.17584E-07 -1.48135E-08  3.06853E-05  3.11787E-05  2.58439E-06 -5.01295E-06 -1.26524E-06
 10.900  3.43518E-06  3.52362E-06  4.87456E-07 -3.13962E-07 -4.90210E-08  2.55524E-05  2.64840E-05  2.48340E-06 -4.33710E-06 -1.22827E-06
 11.000  2.89994E-06  3.02062E-06  4.22031E-07 -3.08289E-07 -8.10847E-08  2.12532E-05  2.24849E-05  2.38571E-06 -3.73446E-06 -1.18531E-06
 11.100  2.45357E-06  2.60134E-06  3.73405E-07 -3.00090E-07 -1.09568E-07  1.76502E-05  1.90674E-05  2.28085E-06 -3.19879E-06 -1.13519E-06
 11.200  2.07863E-06  2.24697E-06  3.35948E-07 -2.89144E-07 -1.33474E-07  1.46302E-05  1.61402E-05  2.16386E-06 -2.72460E-06 -1.07779E-06
 11.300  1.76176E-06  1.94384E-06  3.05801E-07 -2.75455E-07 -1.52190E-07  1.20997E-05  1.36299E-05  2.03364E-06 -2.30691E-06 -1.01370E-06
 11.400  1.49266E-06  1.68201E-06  2.80379E-07 -2.59219E-07 -1.65438E-07  9.98089E-06  1.14765E-05  1.89158E-06 -1.94101E-06 -9.44053E-07
 11.500  1.26331E-06  1.45417E-06  2.58004E-07 -2.40784E-07 -1.73236E-07  8.20912E-06  9.63058E-06  1.74062E-06 -1.62243E-06 -8.70292E-07
 11.600  1.06738E-06  1.25494E-06  2.37632E-07 -2.20608E-07 -1.75854E-07  6.73012E-06  8.05078E-06  1.58440E-06 -1.34686E-06 -7.94029E-07
 11.700  8.99837E-07  1.08028E-06  2.18651E-07 -1.99217E-07 -1.73767E-07  5.49824E-06  6.70203E-06  1.42678E-06 -1.11011E-06 -7.16903E-07
 11.800  7.56568E-07  9.27064E-07  2.00740E-07 -1.77169E-07 -1.67606E-07  4.47492E-06  5.55419E-06  1.27140E-06 -9.08151E-07 -6.40477E-07
 11.900  6.34193E-07  7.92811E-07  1.83751E-07 -1.55013E-07 -1.58099E-07  3.62749E-06  4.58107E-06  1.12142E-06 -7.37126E-07 -5.66162E-07
 12.000  5.29874E-07  6.75467E-07  1.67641E-07 -1.33268E-07 -1.46025E-07  2.92817E-06  3.75968E-06  9.79421E-07 -5.93380E-07 -4.95159E-07
 12.100  4.41192E-07  5.73265E-07  1.52418E-07 -1.12393E-07 -1.32165E-07  2.35329E-06  3.06973E-06  8.47335E-07 -4.73488E-07 -4.28436E-07
 12.200  3.66055E-07  4.84631E-07  1.38102E-07 -9.27732E-08 -1.17257E-07  1.88270E-06  2.49321E-06  7.26437E-07 -3.74279E-07 -3.66709E-07
 12.300  3.02634E-07  4.08128E-07  1.24712E-07 -7.47119E-08 -1.01971E-07  1.49919E-06  2.01415E-06  6.17415E-07 -2.92850E-07 -3.10454E-07
 12.400  2.49322E-07  3.42425E-07  1.12253E-07 -5.84231E-08 -8.68821E-08  1.18813E-06  1.61837E-06  5.20445E-07 -2.26578E-07 -2.59918E-07
 12.500  2.04699E-07  2.86284E-07  1.00714E-07 -4.40355E-08 -7.24588E-08  9.37074E-07  1.29334E-06  4.35289E-07 -1.73117E-07 -2.15150E-07
 12.600  1.67511E-07  2.38550E-07  9.00684E-08 -3.15973E-08 -5.90573E-08  7.35479E-07  1.02803E-06  3.61386E-07 -1.30391E-07 -1.76026E-07
 12.700  1.36652E-07  1.98157E-07  8.02806E-08 -2.10863E-08 -4.69255E-08  5.74447E-07  8.12796E-07  2.97952E-07 -9.65862E-08 -1.42290E-07
 12.800  1.11150E-07  1.64129E-07  7.13068E-08 -1.24210E-08 -3.62107E-08  4.46498E-07  6.39258E-07  2.44055E-07 -7.01281E-08 -1.13582E-07
 12.900  9.01600E-08  1.35578E-07  6.31002E-08 -5.47347E-09 -2.69727E-08  3.45382E-07  5.00195E-07  1.98695E-07 -4.96669E-08 -8.94743E-08
 13.000  7.29465E-08  1.11711E-07  5.56141E-08 -8.23571E-11 -1.91985E-08  2.65902E-07  3.89430E-07  1.60851E-07 -3.40549E-08 -6.94960E-08
 13.100  5.88780E-08  9.18247E-08  4.88035E-08  3.93460E-09 -1.28186E-08  2.03762E-07  3.01729E-07  1.29533E-07 -2.23250E-08 -5.31616E-08
 13.200  4.74155E-08  7.53025E-08  4.26264E-08  6.76939E-09 -7.72224E-09  1.55438E-07  2.32692E-07  1.03807E-07 -1.36702E-08 -3.99896E-08
 13.300  3.81019E-08  6.16102E-08  3.70437E-08  8.61403E-09 -3.77219E-09  1.18055E-07  1.78653E-07  8.28193E-08 -7.42300E-09 -2.95185E-08
 13.400  3.05532E-08  5.02885E-08  3.20190E-08  9.65283E-09 -8.17326E-10  8.92835E-08  1.36583E-07  6.58025E-08 -3.03666E-09 -2.13186E-08
 13.500  2.44484E-08  4.09463E-08  2.75182E-08  1.00565E-08  1.29698E-09  6.72503E-08  1.04001E-07  5.20831E-08 -6.77532E-11 -1.49991E-08
 13.600  1.95213E-08  3.32525E-08  2.35083E-08  9.97833E-09  2.72070E-09  5.04587E-08  7.88925E-08  4.10784E-08  1.83955E-09 -1.02125E-08
 13.700  1.55521E-08  2.69286E-08  1.99571E-08  9.55150E-09  3.59329E-09  3.77208E-08  5.96338E-08  3.22918E-08  2.96750E-09 -6.65599E-09
 13.800  1.23604E-08  2.17413E-08  1.68325E-08  8.88866E-09  4.03982E-09  2.81009E-08  4.49271E-08  2.53053E-08  3.53716E-09 -4.07080E-09
 13.900  9.79848E-09  1.74955E-08  1.41023E-08  8.08203E-09  4.16891E-09  2.08662E-08  3.37428E-08  1.97710E-08  3.71926E-09 -2.23958E-09
 14.000  7.74604E-09  1.40289E-08  1.17342E-08  7.20470E-09  4.07202E-09  1.54468E-08  2.52698E-08  1.54020E-08  3.64350E-09 -9.83106E-10
 14.100  6.10511E-09  1.12062E-08  9.69570E-09  6.31240E-09  3.82391E-09  1.14023E-08  1.88734E-08  1.19637E-08  3.40662E-09 -1.56138E-10
 14.200  4.79614E-09  8.91477E-09  7.95480E-09  5.44573E-09  3.48379E-09  8.39437E-09  1.40604E-08  9.26592E-09  3.07914E-09  3.56934E-10
 14.300  3.75459E-09  7.06102E-09  6.47994E-09  4.63252E-09  3.09698E-09  6.16444E-09  1.04497E-08  7.15510E-09  2.71104E-09  6.46471E-10
 14.400  2.92817E-09  5.56701E-09  5.24062E-09  3.89010E-09  2.69683E-09  4.51621E-09  7.74842E-09  5.50811E-09  2.33649E-09  7.81748E-10
 14.500  2.27447E-09  4.36790E-09  4.20778E-09  3.22759E-09  2.30674E-09  3.30125E-09  5.73256E-09  4.22659E-09  1.97766E-09  8.14789E-10
 14.600  1.75920E-09  3.40980E-09  3.35410E-09  2.64782E-09  1.94204E-09  2.40794E-09  4.23179E-09  3.23229E-09  1.64788E-09  7.83775E-10
 14.700  1.35456E-09  2.64795E-09  2.65433E-09  2.14912E-09  1.61179E-09  1.75266E-09  3.11697E-09  2.46312E-09  1.35406E-09  7.16000E-10
 14.800  1.03810E-09  2.04522E-09  2.08544E-09  1.72670E-09  1.32031E-09  1.27305E-09  2.29063E-09  1.86997E-09  1.09865E-09  6.30372E-10
 14.900  7.91692E-10  1.57093E-09  1.62673E-09  1.37389E-09  1.06853E-09  9.22734E-10  1.67939E-09  1.41408E-09  8.81127E-10  5.39474E-10
 15.000  6.00723E-10  1.19980E-09  1.25986E-09  1.08301E-09  8.55027E-10  6.67379E-10  1.22823E-09  1.06492E-09  6.99072E-10  4.51236E-10
 15.100  4.53448E-10  9.11062E-10  9.68815E-10  8.46059E-10  6.76931E-10  4.81613E-10  8.95930E-10  7.98522E-10  5.49031E-10  3.70254E-10
 15.200  3.40454E-10  6.87759E-10  7.39755E-10  6.55224E-10  5.30541E-10  3.46741E-10  6.51732E-10  5.96077E-10  4.27066E-10  2.98811E-10
 15.300  2.54223E-10  5.16112E-10  5.60903E-10  5.03166E-10  4.11819E-10  2.49021E-10  4.72703E-10  4.42886E-10  3.29163E-10  2.37645E-10
 15.400  1.88781E-10  3.84987E-10  4.22343E-10  3.83238E-10  3.16726E-10  1.78371E-10  3.41784E-10  3.27482E-10  2.51484E-10  1.86524E-10
 15.500  1.39396E-10  2.85447E-10  3.15823E-10  2.89569E-10  2.41437E-10  1.27408E-10  2.46308E-10  2.40949E-10  1.90517E-10  1.44646E-10
 15.600  1.02343E-10  2.10362E-10  2.34558E-10  2.17093E-10  1.82472E-10  9.07347E-11  1.76882E-10  1.76381E-10  1.43153E-10  1.10928E-10
 15.700  7.47081E-11  1.54086E-10  1.73026E-10  1.61519E-10  1.36768E-10  6.44138E-11  1.26558E-10  1.28445E-10  1.06713E-10  8.41884E-11
 15.800  5.42192E-11  1.12179E-10  1.26781E-10  1.19277E-10  1.01688E-10  4.55753E-11  9.02012E-11  9.30421E-11  7.89361E-11  6.32711E-11
 15.900  3.91204E-11  8.11717E-11  9.22794E-11  8.74401E-11  7.50147E-11  3.21327E-11  6.40296E-11  6.70347E-11  5.79510E-11  4.71106E-11
 16.000  2.80612E-11  5.83779E-11  6.67250E-11  6.36415E-11  5.49162E-11  2.25711E-11  4.52609E-11  4.80338E-11  4.22324E-11  3.47678E-11
 16.100  2.00106E-11  4.17298E-11  4.79328E-11  4.59941E-11  3.99033E-11  1.57933E-11  3.18547E-11  3.42290E-11  3.05561E-11  2.54413E-11
 16.200  1.41859E-11  2.96486E-11  3.42108E-11  3.30101E-11  2.87832E-11  1.10061E-11  2.23188E-11  2.42561E-11  2.19521E-11  1.84647E-11
 16.300  9.99767E-12  2.09378E-11  2.42608E-11  2.35299E-11  2.06138E-11  7.63793E-12  1.55654E-11  1.70926E-11  1.56616E-11  1.32954E-11
 16.400  7.00467E-12  1.46972E-11  1.70956E-11  1.66597E-11  1.46596E-11  5.27756E-12  1.08042E-11  1.19769E-11  1.10976E-11  9.50002E-12
 16.500  4.87895E-12  1.02547E-11  1.19708E-11  1.17174E-11  1.03535E-11  3.63037E-12  7.46320E-12  8.34480E-12  7.81095E-12  6.73756E-12
 16.600  3.37848E-12  7.11236E-12  8.33011E-12  8.18743E-12  7.26279E-12  2.48588E-12  5.12999E-12  5.78122E-12  5.46135E-12  4.74371E-12
 16.700  2.32583E-12  4.90361E-12  5.76084E-12  5.68401E-12  5.06075E-12  1.69423E-12  3.50861E-12  3.98245E-12  3.79366E-12  3.31623E-12
 16.800  1.59187E-12  3.36080E-12  3.95962E-12  3.92091E-12  3.50322E-12  1.14919E-12  2.38753E-12  2.72776E-12  2.61829E-12  2.30222E-12
 16.900  1.08322E-12  2.28985E-12  2.70505E-12  2.68767E-12  2.40935E-12  7.75709E-13  1.61635E-12  1.85775E-12  1.79561E-12  1.58741E-12
 17.000  7.32850E-13  1.55104E-12  1.83685E-12  1.83086E-12  1.64646E-12  5.21032E-13  1.08861E-12  1.25805E-12  1.22370E-12  1.08723E-12
 17.100  4.92963E-13  1.04450E-12  1.23985E-12  1.23951E-12  1.11803E-12  3.48226E-13  7.29365E-13  8.47104E-13  8.28781E-13  7.39770E-13
 17.200  3.29705E-13  6.99314E-13  8.31926E-13  8.34052E-13  7.54476E-13  2.31562E-13  4.86111E-13  5.67170E-13  5.57869E-13  5.00104E-13
 17.300  2.19261E-13  4.65513E-13  5.54929E-13  5.57837E-13  5.06005E-13  1.53201E-13  3.22280E-13  3.77601E-13  3.73234E-13  3.35934E-13
 17.400  1.44988E-13  3.08106E-13  3.68000E-13  3.70868E-13  3.37297E-13  1.00839E-13  2.12535E-13  2.49979E-13  2.48207E-13  2.24242E-13
 17.500  9.53340E-14  2.02765E-13  2.42625E-13  2.45106E-13  2.23484E-13  6.60325E-14  1.39418E-13  1.64563E-13  1.64080E-13  1.48760E-13
 17.600  6.23340E-14  1.32686E-13  1.59044E-13  1.61039E-13  1.47192E-13  4.30165E-14  9.09700E-14  1.07728E-13  1.07827E-13  9.80839E-14
 17.700  4.05297E-14  8.63390E-14  1.03661E-13  1.05191E-13  9.63715E-14  2.78775E-14  5.90423E-14  7.01295E-14  7.04463E-14  6.42805E-14
 17.800  2.62063E-14  5.58672E-14  6.71801E-14  6.83142E-14  6.27286E-14  1.79725E-14  3.81165E-14  4.54003E-14  4.57576E-14  4.18758E-14
 17.900  1.68514E-14  3.59490E-14  4.32927E-14  4.41117E-14  4.05937E-14  1.15264E-14  2.44765E-14  2.92290E-14  2.95506E-14  2.71191E-14
 18.000  1.07764E-14  2.30044E-14  2.77429E-14  2.83220E-14  2.61185E-14  7.35372E-15  1.56341E-14  1.87144E-14  1.89753E-14  1.74600E-14
 18.100  6.85385E-15  1.46400E-14  1.76795E-14  1.80817E-14  1.67092E-14  4.66712E-15  9.93313E-15  1.19167E-14  1.21156E-14  1.11762E-14
 18.200  4.33538E-15  9.26604E-15  1.12042E-14  1.14794E-14  1.06292E-14  2.94658E-15  6.27762E-15  7.54678E-15  7.69235E-15  7.11288E-15
 18.300  2.72751E-15  5.83284E-15  7.06162E-15  7.24742E-15  6.72359E-15  1.85062E-15  3.94641E-15  4.75344E-15  4.85674E-15  4.50116E-15
 18.400  1.70672E-15  3.65184E-15  4.42641E-15  4.55035E-15  4.22939E-15  1.15624E-15  2.46782E-15  2.97786E-15  3.04945E-15  2.83237E-15
 18.500  1.06225E-15  2.27407E-15  2.75954E-15  2.84132E-15  2.64574E-15  7.18648E-16  1.53510E-15  1.85550E-15  1.90416E-15  1.77232E-15
 18.600  6.57613E-16  1.40853E-15  1.71110E-15  1.76451E-15  1.64598E-15  4.44347E-16  9.49890E-16  1.14998E-15  1.18252E-15  1.10286E-15
 18.700  4.04955E-16  8.67783E-16  1.05531E-15  1.08987E-15  1.01843E-15  2.73320E-16  5.84702E-16  7.08923E-16  7.30380E-16  6.82504E-16
 18.800  2.48054E-16  5.31804E-16  6.47386E-16  6.69552E-16  6.26721E-16  1.67251E-16  3.58035E-16  4.34713E-16  4.48686E-16  4.20059E-16
 18.900  1.51147E-16  3.24189E-16  3.95037E-16  4.09135E-16  3.83597E-16  1.01817E-16  2.18099E-16  2.65161E-16  2.74159E-16  2.57130E-16
 19.000  9.16169E-17  1.96591E-16  2.39782E-16  2.48677E-16  2.33533E-16  6.16645E-17  1.32168E-16  1.60891E-16  1.66625E-16  1.56549E-16
 19.100  5.52443E-17  1.18592E-16  1.44781E-16  1.50350E-16  1.41418E-16  3.71548E-17  7.96805E-17  9.71129E-17  1.00733E-16  9.48019E-17
 19.200  3.31394E-17  7.11687E-17  8.69626E-17  9.04242E-17  8.51839E-17  2.22724E-17  4.77901E-17  5.83119E-17  6.05776E-17  5.71042E-17
 19.300  1.97769E-17  4.24885E-17  5.19628E-17  5.40990E-17  5.10413E-17  1.32831E-17  2.85162E-17  3.48323E-17  3.62384E-17  3.42150E-17
 19.400  1.17418E-17  2.52357E-17  3.08889E-17  3.21981E-17  3.04235E-17  7.88171E-18  1.69286E-17  2.06996E-17  2.15654E-17  2.03928E-17
 19.500  6.93567E-18  1.49117E-17  1.82672E-17  1.90642E-17  1.80399E-17  4.65301E-18  9.99852E-18  1.22379E-17  1.27669E-17  1.20910E-17
 19.600  4.07592E-18  8.76638E-18  1.07476E-17  1.12297E-17  1.06415E-17  2.73306E-18  5.87545E-18  7.19822E-18  7.51916E-18  7.13154E-18
 19.700  2.38318E-18  5.12747E-18  6.29121E-18  6.58087E-18  6.24500E-18  1.59724E-18  3.43516E-18  4.21237E-18  4.40572E-18  4.18461E-18
 19.800  1.38641E-18  2.98390E-18  3.66392E-18  3.83690E-18  3.64611E-18  9.28773E-19  1.99830E-18  2.45257E-18  2.56826E-18  2.44279E-18
 19.900  8.02484E-19  1.72772E-18  2.12304E-18  2.22570E-18  2.11791E-18  5.37366E-19  1.15662E-18  1.42075E-18  1.48952E-18  1.41870E-18
  67 173 200   0.100
  0.000  5.70366E-02 -3.10317E-16 -3.74700E-16 -7.25538E-16 -4.14842E-16  9.38391E-02 -4.96507E-16 -8.11851E-16 -2.62695E-16 -4.59187E-15
  0.100  5.70614E-02 -4.92328E-05 -3.52366E-08 -9.45624E-12 -3.33304E-15  9.38325E-02  7.69399E-05  5.27486E-08  1.20019E-11  9.72733E-16
  0.200  5.71352E-02 -1.94271E-04 -5.58292E-07 -5.99321E-10 -4.13705E-13  9.38128E-02  3.02863E-04  8.32815E-07  7.56398E-10  6.56781E-13
  0.300  5.72566E-02 -4.27264E-04 -2.78052E-06 -6.71690E-09 -1.04325E-11  9.37807E-02  6.63394E-04  4.12344E-06  8.39504E-09  1.64707E-11
  0.400  5.74227E-02 -7.35557E-04 -8.58836E-06 -3.68931E-08 -1.01745E-10  9.37374E-02  1.13560E-03  1.26318E-05  4.54792E-08  1.57870E-10
  0.500  5.76301E-02 -1.10231E-03 -2.03555E-05 -1.36686E-07 -5.88173E-10  9.36844E-02  1.68947E-03  2.96222E-05  1.65502E-07  8.91707E-10
  0.600  5.78745E-02 -1.50733E-03 -4.07007E-05 -3.93820E-07 -2.43636E-09  9.36236E-02  2.28982E-03  5.84615E-05  4.66355E-07  3.58701E-09
  0.700  5.81505E-02 -1.92808E-03 -7.22104E-05 -9.51978E-07 -8.00179E-09  9.35577E-02  2.89849E-03  1.02125E-04  1.09751E-06  1.13639E-08
  0.800  5.84526E-02 -2.34080E-03 -1.17149E-04 -2.02012E-06 -2.21358E-08  9.34895E-02  3.47679E-03  1.62719E-04  2.25644E-06  3.00946E-08
  0.900  5.87745E-02 -2.72170E-03 -1.77177E-04 -3.87464E-06 -5.36300E-08  9.34220E-02  3.98786E-03  2.41070E-04  4.17138E-06  6.91931E-08
  1.000  5.91098E-02 -3.04818E-03 -2.53109E-04 -6.85236E-06 -1.16872E-07  9.33589E-02  4.39892E-03  3.36427E-04  7.06996E-06  1.41633E-07
  1.100  5.94521E-02 -3.29997E-03 -3.44718E-04 -1.13336E-05 -2.33491E-07  9.33035E-02  4.68321E-03  4.46307E-04  1.11360E-05  2.62517E-07
  1.200  5.97947E-02 -3.46019E-03 -4.50621E-04 -1.77159E-05 -4.33726E-07  9.32592E-02  4.82160E-03  5.66507E-04  1.64593E-05  4.45538E-07
  1.300  6.01316E-02 -3.51621E-03 -5.68241E-04 -2.63793E-05 -7.57199E-07  9.32293E-02  4.80359E-03  6.91278E-04  2.29847E-05  6.96870E-07
  1.400  6.04568E-02 -3.46033E-03 -6.93863E-04 -3.76476E-05 -1.25285E-06  9.32163E-02  4.62785E-03  8.13651E-04  3.04682E-05  1.00640E-06
  1.500  6.07650E-02 -3.29016E-03 -8.22778E-04 -5.17471E-05 -1.97786E-06  9.32222E-02  4.30216E-03  9.25889E-04  3.84482E-05  1.33669E-06
  1.600  6.10515E-02 -3.00877E-03 -9.49505E-04 -6.87684E-05 -2.99549E-06  9.32480E-02  3.84280E-03  1.02002E-03  4.62360E-05  1.61058E-06
  1.700  6.13124E-02 -2.62454E-03 -1.06809E-03 -8.86345E-05 -4.37203E-06  9.32939E-02  3.27350E-03  1.08842E-03  5.29311E-05  1.69895E-06
  1.800  6.15446E-02 -2.15070E-03 -1.17242E-03 -1.11078E-04 -6.17309E-06  9.33588E-02  2.62389E-03  1.12441E-03  5.74611E-05  1.41041E-06
  1.900  6.17458E-02 -1.60468E-03 -1.25661E-03 -1.35630E-04 -8.45957E-06  9.34405E-02  1.92771E-03  1.12274E-03  5.86436E-05  4.84802E-07
  2.000  6.19148E-02 -1.00721E-03 -1.31537E-03 -1.61626E-04 -1.12840E-05  9.35358E-02  1.22079E-03  1.08010E-03  5.52666E-05 -1.40763E-06
  2.100  6.20512E-02 -3.81272E-04 -1.34427E-03 -1.88215E-04 -1.46876E-05  9.36402E-02  5.38974E-04  9.95404E-04  4.61790E-05 -4.66011E-06
  2.200  6.21557E-02  2.49043E-04 -1.34014E-03 -2.14396E-04 -1.86983E-05  9.37487E-02 -8.39548E-05  8.69999E-04  3.03846E-05 -9.71564E-06
  2.300  6.22297E-02  8.59723E-04 -1.30117E-03 -2.39046E-04 -2.33303E-05  9.38556E-02 -6.18113E-04  7.07706E-04  7.13133E-06 -1.70460E-05
  2.400  6.22756E-02  1.42799E-03 -1.22716E-03 -2.60973E-04 -2.85850E-05  9.39550E-02 -1.03914E-03  5.14694E-04 -2.40103E-05 -2.71246E-05
  2.500  6.22964E-02  1.93335E-03 -1.11951E-03 -2.78954E-04 -3.44533E-05  9.40407E-02 -1.32944E-03  2.99212E-04 -6.30860E-05 -4.03949E-05
  2.600  6.22957E-02  2.35857E-03 -9.81217E-04 -2.91789E-04 -4.09180E-05  9.41071E-02 -1.47902E-03  7.11736E-05 -1.09714E-04 -5.72370E-05
  2.700  6.22777E-02  2.69038E-03 -8.16781E-04 -2.98341E-04 -4.79568E-05  9.41489E-02 -1.48584E-03 -1.58379E-04 -1.63065E-04 -7.79357E-05
  2.800  6.22465E-02  2.92007E-03 -6.32013E-04 -2.97579E-04 -5.55443E-05  9.41616E-02 -1.35569E-03 -3.77903E-04 -2.21857E-04 -1.02651E-04
  2.900  6.22065E-02  3.04381E-03 -4.33813E-04 -2.88611E-04 -6.36521E-05  9.41414E-02 -1.10158E-03 -5.76051E-04 -2.84374E-04 -1.31397E-04
  3.000  6.21616E-02  3.06276E-03 -2.29894E-04 -2.70716E-04 -7.22464E-05  9.40858E-02 -7.42728E-04 -7.42396E-04 -3.48501E-04 -1.64020E-04
  3.100  6.21151E-02  2.98302E-03 -2.84849E-05 -2.43370E-04 -8.12831E-05  9.39926E-02 -3.03105E-04 -8.68138E-04 -4.11774E-04 -2.00198E-04
  3.200  6.20697E-02  2.81527E-03  1.61986E-04 -2.06270E-04 -9.06996E-05  9.38608E-02  1.90250E-04 -9.46759E-04 -4.71451E-04 -2.39431E-04
  3.300  6.20265E-02  2.57441E-03  3.33200E-04 -1.59359E-04 -1.00404E-04  9.36896E-02  7.09149E-04 -9.74579E-04 -5.24603E-04 -2.81050E-04
  3.400  6.19855E-02  2.27886E-03  4.77253E-04 -1.02850E-04 -1.10261E-04  9.34785E-02  1.22624E-03 -9.51162E-04 -5.68218E-04 -3.24223E-04
  3.500  6.19449E-02  1.94992E-03  5.86938E-04 -3.72568E-05 -1.20083E-04  9.32267E-02  1.71695E-03 -8.79546E-04 -5.99343E-04 -3.67968E-04
  3.600  6.19009E-02  1.61096E-03  6.56020E-04  3.65829E-05 -1.29614E-04  9.29329E-02  2.16123E-03 -7.66250E-04 -6.15232E-04 -4.11168E-04
  3.700  6.18479E-02  1.28649E-03  6.79467E-04  1.17477E-04 -1.38527E-04  9.25952E-02  2.54507E-03 -6.21060E-04 -6.13525E-04 -4.52588E-04
  3.800  6.17782E-02  1.00136E-03  6.53672E-04  2.03857E-04 -1.46419E-04  9.22101E-02  2.86152E-03 -4.56560E-04 -5.92439E-04 -4.90895E-04
  3.900  6.16819E-02  7.79756E-04  5.76632E-04  2.93768E-04 -1.52819E-04  9.17729E-02  3.11134E-03 -2.87450E-04 -5.50956E-04 -5.24683E-04
  4.000  6.15475E-02  6.44343E-04  4.48097E-04  3.84871E-04 -1.57206E-04  9.12772E-02  3.30303E-03 -1.29657E-04 -4.89007E-04 -5.52510E-04
  4.100  6.13621E-02  6.15386E-04  2.69670E-04  4.74467E-04 -1.59032E-04  9.07152E-02  3.45237E-03  6.92898E-07 -4.07617E-04 -5.72936E-04
  4.200  6.11113E-02  7.09931E-04  4.48615E-05  5.59553E-04 -1.57759E-04  9.00772E-02  3.58140E-03  8.83854E-05 -3.09006E-04 -5.84582E-04
  4.300  6.07802E-02  9.41083E-04 -2.20926E-04  6.36905E-04 -1.52901E-04  8.93524E-02  3.71692E-03  1.20233E-04 -1.96622E-04 -5.86194E-04
  4.400  6.03537E-02  1.31738E-03 -5.20478E-04  7.03189E-04 -1.44071E-04  8.85289E-02  3.88861E-03  8.61032E-05 -7.50832E-05 -5.76721E-04
  4.500  5.98172E-02  1.84230E-03 -8.44935E-04  7.55113E-04 -1.31027E-04  8.75939E-02  4.12691E-03 -2.02187E-05  4.99705E-05 -5.55397E-04
  4.600  5.91569E-02  2.51396E-03 -1.18404E-03  7.89588E-04 -1.13721E-04  8.65349E-02  4.46074E-03 -2.00411E-04  1.72119E-04 -5.21824E-04
  4.700  5.83605E-02  3.32499E-03 -1.52648E-03  8.03916E-04 -9.23264E-05  8.53393E-02  4.91532E-03 -4.51297E-04  2.84496E-04 -4.76050E-04
  4.800  5.74182E-02  4.26256E-03 -1.86029E-03  7.95973E-04 -6.72643E-05  8.39956E-02  5.51010E-03 -7.64873E-04  3.80189E-04 -4.18628E-04
  4.900  5.63223E-02  5.30873E-03 -2.17335E-03  7.64376E-04 -3.92050E-05  8.24936E-02  6.25710E-03 -1.12868E-03  4.52678E-04 -3.50651E-04
  5.000  5.50682E-02  6.44091E-03 -2.45390E-03  7.08634E-04 -9.05291E-06  8.08251E-02  7.15966E-03 -1.52650E-03  4.96294E-04 -2.73757E-04
  5.100  5.36548E-02  7.63260E-03 -2.69108E-03  6.29245E-04  2.20891E-05  7.89842E-02  8.21183E-03 -1.93937E-03  5.06633E-04 -1.90089E-04
  5.200  5.20838E-02  8.85431E-03 -2.87546E-03  5.27741E-04  5.29742E-05  7.69677E-02  9.39820E-03 -2.34674E-03  4.80911E-04 -1.02226E-04
  5.300  5.03607E-02  1.00746E-02 -2.99955E-03  4.06674E-04  8.22813E-05  7.47753E-02  1.06945E-02 -2.72782E-03  4.18218E-04 -1.30668E-05
  5.400  4.84941E-02  1.12613E-02 -3.05814E-03  2.69533E-04  1.08695E-04  7.24102E-02  1.20687E-02 -3.06292E-03  3.19641E-04  7.43159E-05
  5.500  4.64957E-02  1.23825E-02 -3.04866E-03  1.20596E-04  1.30990E-04  6.98786E-02  1.34827E-02 -3.33466E-03  1.88254E-04  1.56840E-04
  5.600  4.43799E-02  1.34082E-02 -2.97125E-03 -3.52722E-05  1.48112E-04  6.71901E-02  1.48938E-02 -3.52908E-03  2.89542E-05  2.31594E-04
  5.700  4.21636E-02  1.43112E-02 -2.82884E-03 -1.92861E-04  1.59249E-04  6.43573E-02  1.62578E-02 -3.63644E-03 -1.51822E-04  2.96003E-04
  5.800  3.98657E-02  1.50680E-02 -2.62692E-03 -3.46890E-04  1.63886E-04  6.13962E-02  1.75304E-02 -3.65172E-03 -3.46501E-04  3.47988E-04
  5.900  3.75062E-02  1.56599E-02 -2.37332E-03 -4.92282E-04  1.61843E-04  5.83252E-02  1.86702E-02 -3.57476E-03 -5.46842E-04  3.86084E-04
  6.000  3.51064E-02  1.60736E-02 -2.07773E-03 -6.24425E-04  1.53281E-04  5.51652E-02  1.96402E-02 -3.41013E-03 -7.44449E-04  4.09516E-04
  6.100  3.26880E-02  1.63015E-02 -1.75121E-03 -7.39404E-04  1.38696E-04  5.19391E-02  2.04096E-02 -3.16662E-03 -9.31277E-04  4.18233E-04
  6.200  3.02724E-02  1.63419E-02 -1.40560E-03 -8.34177E-04  1.18876E-04  4.86713E-02  2.09556E-02 -2.85649E-03 -1.10009E-03  4.12883E-04
  6.300  2.78806E-02  1.61986E-02 -1.05290E-03 -9.06701E-04  9.48504E-05  4.53871E-02  2.12636E-02 -2.49460E-03 -1.24486E-03  3.94750E-04
  6.400  2.55325E-02  1.58810E-02 -7.04705E-04 -9.55978E-04  6.78187E-05  4.21123E-02  2.13280E-02 -2.09734E-03 -1.36102E-03  3.65645E-04
  6.500  2.32469E-02  1.54032E-02 -3.71663E-04 -9.82050E-04  3.90722E-05  3.88724E-02  2.11517E-02 -1.68161E-03 -1.44565E-03  3.27765E-04
  6.600  2.10404E-02  1.47831E-02 -6.30178E-05 -9.85916E-04  9.91349E-06  3.56923E-02  2.07457E-02 -1.26382E-03 -1.49753E-03  2.83543E-04
  6.700  1.89280E-02  1.40416E-02  2.13720E-04 -9.69410E-04 -1.84197E-05  3.25955E-02  2.01283E-02 -8.59025E-04 -1.51704E-03  2.35483E-04
  6.800  1.69222E-02  1.32017E-02  4.52994E-04 -9.35031E-04 -4.48211E-05  2.96036E-02  1.93234E-02 -4.80225E-04 -1.50600E-03  1.86014E-04
  6.900  1.50333E-02  1.22876E-02  6.51288E-04 -8.85752E-04 -6.83690E-05  2.67361E-02  1.83593E-02 -1.37882E-04 -1.46744E-03  1.37355E-04
  7.000  1.32691E-02  1.13233E-02  8.07092E-04 -8.24820E-04 -8.83623E-05  2.40097E-02  1.72674E-02  1.60367E-04 -1.40528E-03  9.14098E-05
  7.100  1.16350E-02  1.03322E-02  9.20759E-04 -7.55559E-04 -1.04339E-04  2.14380E-02  1.60802E-02  4.09781E-04 -1.32401E-03  4.96979E-05
  7.200  1.01338E-02  9.33599E-03  9.94277E-04 -6.81198E-04 -1.16077E-04  1.90317E-02  1.48300E-02  6.08392E-04 -1.22840E-03  1.33150E-05
  7.300  8.76619E-03  8.35435E-03  1.03097E-03 -6.04720E-04 -1.23581E-04  1.67982E-02  1.35480E-02  7.56739E-04 -1.12319E-03 -1.70709E-05
  7.400  7.53075E-03  7.40419E-03  1.03517E-03 -5.28748E-04 -1.27053E-04  1.47415E-02  1.22628E-02  8.57476E-04 -1.01285E-03 -4.11953E-05
  7.500  6.42410E-03  6.49953E-03  1.01186E-03 -4.55473E-04 -1.26860E-04  1.28627E-02  1.09997E-02  9.14920E-04 -9.01386E-04 -5.91500E-05
  7.600  5.44122E-03  5.65136E-03  9.66351E-04 -3.86610E-04 -1.23486E-04  1.11600E-02  9.78029E-03  9.34559E-04 -7.92205E-04 -7.13189E-05
  7.700  4.57575E-03  4.86763E-03  9.03990E-04 -3.23400E-04 -1.17497E-04  9.62886E-03  8.62200E-03  9.22577E-04 -6.88045E-04 -7.83059E-05
  7.800  3.82022E-03  4.15338E-03  8.29874E-04 -2.66628E-04 -1.09489E-04  8.26278E-03  7.53814E-03  8.85415E-04 -5.90953E-04 -8.08601E-05
  7.900  3.16638E-03  3.51104E-03  7.48670E-04 -2.16671E-04 -1.00060E-04  7.05322E-03  6.53796E-03  8.29397E-04 -5.02312E-04 -7.98050E-05
  8.000  2.60548E-03  2.94074E-03  6.64459E-04 -1.73563E-04 -8.97723E-05  5.99028E-03  5.62697E-03  7.60424E-04 -4.22901E-04 -7.59764E-05
  8.100  2.12850E-03  2.44064E-03  5.80653E-04 -1.37056E-04 -7.91290E-05  5.06301E-03  4.80736E-03  6.83760E-04 -3.52982E-04 -7.01709E-05
  8.200  1.72644E-03  2.00737E-03  4.99963E-04 -1.06700E-04 -6.85601E-05  4.25986E-03  4.07846E-03  6.03896E-04 -2.92393E-04 -6.31085E-05
  8.300  1.39051E-03  1.63640E-03  4.24404E-04 -8.19057E-05 -5.84118E-05  3.56899E-03  3.43733E-03  5.24479E-04 -2.40655E-04 -5.54073E-05
  8.400  1.11227E-03  1.32240E-03  3.55347E-04 -6.20059E-05 -4.89446E-05  2.97863E-03  2.87923E-03  4.48319E-04 -1.97066E-04 -4.75710E-05
  8.500  8.83813E-04  1.05961E-03  2.93592E-04 -4.63085E-05 -4.03368E-05  2.47730E-03  2.39816E-03  3.77431E-04 -1.60790E-04 -3.99865E-05
  8.600  6.97843E-04  8.42072E-04  2.39455E-04 -3.41356E-05 -3.26921E-05  2.05410E-03  1.98729E-03  3.13118E-04 -1.30929E-04 -3.29297E-05
  8.700  5.47734E-04  6.63929E-04  1.92864E-04 -2.48533E-05 -2.60502E-05  1.69880E-03  1.63942E-03  2.56080E-04 -1.06582E-04 -2.65777E-05
  8.800  4.27570E-04  5.19563E-04  1.53458E-04 -1.78915E-05 -2.03987E-05  1.40201E-03  1.34726E-03  2.06525E-04 -8.68928E-05 -2.10240E-05
  8.900  3.32145E-04  4.03753E-04  1.20670E-04 -1.27538E-05 -1.56860E-05  1.15521E-03  1.10369E-03  1.64282E-04 -7.10714E-05 -1.62951E-05
  9.000  2.56945E-04  3.11759E-04  9.38133E-05 -9.02110E-06 -1.18330E-05  9.50797E-04  9.02016E-04  1.28914E-04 -5.84168E-05 -1.23678E-05
  9.100  1.98113E-04  2.39369E-04  7.21411E-05 -6.34915E-06 -8.74371E-06  7.82057E-04  7.36027E-04  9.98034E-05 -4.83217E-05 -9.18453E-06
  9.200  1.52394E-04  1.82912E-04  5.49015E-05 -4.46272E-06 -6.31498E-06  6.43150E-04  6.00129E-04  7.62394E-05 -4.02723E-05 -6.66638E-06
  9.300  1.17080E-04  1.39250E-04  4.13745E-05 -3.14722E-06 -4.44324E-06  5.29045E-04  4.89362E-04  5.74749E-05 -3.38428E-05 -4.72435E-06
  9.400  8.99478E-05  1.05743E-04  3.08989E-05 -2.23944E-06 -3.03023E-06  4.35452E-04  3.99397E-04  4.27759E-05 -2.86860E-05 -3.26748E-06
  9.500  6.91922E-05  8.02080E-05  2.28867E-05 -1.61816E-06 -1.98653E-06  3.58749E-04  3.26520E-04  3.14530E-05 -2.45237E-05 -2.20866E-06
  9.600  5.33670E-05  6.08658E-05  1.68305E-05 -1.19541E-06 -1.23370E-06  2.95903E-04  2.67579E-04  2.28816E-05 -2.11356E-05 -1.46838E-06
  9.700  4.13260E-05  4.62875E-05  1.23032E-05 -9.08760E-07 -7.05136E-07  2.44395E-04  2.19940E-04  1.65128E-05 -1.83491E-05 -9.76785E-07
  9.800  3.21710E-05  3.53415E-05  8.95321E-06 -7.14763E-07 -3.45903E-07  2.02145E-04  1.81417E-04  1.18760E-05 -1.60303E-05 -6.74313E-07
  9.900  2.52052E-05  2.71424E-05  6.49775E-06 -5.83710E-07 -1.11917E-07  1.67445E-04  1.50219E-04  8.57629E-06 -1.40762E-05 -5.11528E-07
 10.000  1.98931E-05  2.10061E-05  4.71322E-06 -4.95520E-07  3.13020E-08  1.38900E-04  1.24892E-04  6.28943E-06 -1.24079E-05 -4.48319E-07
 10.100  1.58266E-05  1.64096E-05  3.42611E-06 -4.36679E-07  1.10089E-07  1.15374E-04  1.04259E-04  4.75359E-06 -1.09654E-05 -4.52804E-07
 10.200  1.26972E-05  1.29570E-05  2.50389E-06 -3.98034E-07  1.44132E-07  9.59453E-05  8.73784E-05  3.76128E-06 -9.70358E-06 -5.00124E-07
 10.300  1.02728E-05  1.03513E-05  1.84684E-06 -3.73267E-07  1.47876E-07  7.98653E-05  7.34996E-05  3.15081E-06 -8.58824E-06 -5.71271E-07
 10.400  8.37978E-06  8.37122E-06  1.38082E-06 -3.57883E-07  1.31774E-07  6.65283E-05  6.20261E-05  2.79854E-06 -7.59395E-06 -6.52017E-07
 10.500  6.88860E-06  6.85299E-06  1.05137E-06 -3.48564E-07  1.03324E-07  5.54432E-05  5.24864E-05  2.61174E-06 -6.70178E-06 -7.31991E-07
 10.600  5.70280E-06  5.67601E-06  8.18819E-07 -3.42781E-07  6.79000E-08  4.62118E-05  4.45082E-05  2.52253E-06 -5.89769E-06 -8.03911E-07
 10.700  4.75052E-06  4.75180E-06  6.54531E-07 -3.38573E-07  2.93753E-08  3.85106E-05  3.77979E-05  2.48267E-06 -5.17129E-06 -8.62957E-07
 10.800  3.97818E-06  4.01564E-06  5.37944E-07 -3.34420E-07 -9.42750E-09  3.20764E-05  3.21243E-05  2.45918E-06 -4.51480E-06 -9.06259E-07
 10.900  3.34572E-06  3.42026E-06  4.54398E-07 -3.29177E-07 -4.64326E-08  2.66942E-05  2.73046E-05  2.43087E-06 -3.92224E-06 -9.32493E-07
 11.000  2.82306E-06  2.93124E-06  3.93499E-07 -3.22031E-07 -8.01149E-08  2.21882E-05  2.31943E-05  2.38533E-06 -3.38890E-06 -9.41536E-07
 11.100  2.38752E-06  2.52352E-06  3.47942E-07 -3.12472E-07 -1.09382E-07  1.84141E-05  1.96781E-05  2.31669E-06 -2.91078E-06 -9.34190E-07
 11.200  2.02189E-06  2.17885E-06  3.12641E-07 -3.00262E-07 -1.33504E-07  1.52528E-05  1.66638E-05  2.22364E-06 -2.48436E-06 -9.11934E-07
 11.300  1.71303E-06  1.88400E-06  2.84113E-07 -2.85397E-07 -1.52072E-07  1.26058E-05  1.40770E-05  2.10800E-06 -2.10629E-06 -8.76722E-07
 11.400  1.45083E-06  1.62930E-06  2.60021E-07 -2.68071E-07 -1.64962E-07  1.03913E-05  1.18566E-05  1.97352E-06 -1.77328E-06 -8.30798E-07
 11.500  1.22741E-06  1.40769E-06  2.38840E-07 -2.48633E-07 -1.72310E-07  8.54103E-06  9.95243E-06  1.82499E-06 -1.48204E-06 -7.76539E-07
 11.600  1.03660E-06  1.21395E-06  2.19619E-07 -2.27542E-07 -1.74470E-07  6.99785E-06  8.32211E-06  1.66753E-06 -1.22922E-06 -7.16323E-07
 11.700  8.73453E-07  1.04415E-06  2.01792E-07 -2.05326E-07 -1.71975E-07  5.71362E-06  6.92976E-06  1.50613E-06 -1.01146E-06 -6.52425E-07
 11.800  7.33974E-07  8.95267E-07  1.85052E-07 -1.82542E-07 -1.65492E-07  4.64772E-06  5.74448E-06  1.34532E-06 -8.25395E-07 -5.86927E-07
 11.900  6.14865E-07  7.64886E-07  1.69253E-07 -1.59742E-07 -1.55768E-07  3.76573E-06  4.73935E-06  1.18895E-06 -6.67711E-07 -5.21664E-07
 12.000  5.13359E-07  6.51006E-07  1.54337E-07 -1.37437E-07 -1.43588E-07  3.03844E-06  3.89073E-06  1.04012E-06 -5.35197E-07 -4.58184E-07
 12.100  4.27099E-07  5.51900E-07  1.40293E-07 -1.16084E-07 -1.29725E-07  2.44100E-06  3.17773E-06  9.01110E-07 -4.24788E-07 -3.97731E-07
 12.200  3.54047E-07  4.66029E-07  1.27127E-07 -9.60610E-08 -1.14908E-07  1.95225E-06  2.58179E-06  7.73475E-07 -3.33602E-07 -3.41249E-07
 12.300  2.92420E-07  3.91984E-07  1.14839E-07 -7.76615E-08 -9.97887E-08  1.55416E-06  2.08644E-06  6.58082E-07 -2.58973E-07 -2.89390E-07
 12.400  2.40650E-07  3.28461E-07  1.03422E-07 -6.10909E-08 -8.49237E-08  1.23144E-06  1.67707E-06  5.55224E-07 -1.98468E-07 -2.42547E-07
 12.500  1.97350E-07  2.74246E-07  9.28560E-08 -4.64681E-08 -7.07615E-08  9.71072E-07  1.34075E-06  4.64724E-07 -1.49894E-07 -2.00883E-07
 12.600  1.61295E-07  2.28206E-07  8.31100E-08 -3.38320E-08 -5.76404E-08  7.62071E-07  1.06612E-06  3.86051E-07 -1.11306E-07 -1.64369E-07
 12.700  1.31406E-07  1.89298E-07  7.41452E-08 -2.31516E-08 -4.57923E-08  5.95165E-07  8.43224E-07  3.18417E-07 -8.09949E-08 -1.32824E-07
 12.800  1.06733E-07  1.56564E-07  6.59184E-08 -1.43375E-08 -3.53510E-08  4.62573E-07  6.63422E-07  2.60873E-07 -5.74757E-08 -1.05950E-07
 12.900  8.64481E-08  1.29140E-07  5.83856E-08 -7.25543E-09 -2.63663E-08  3.57798E-07  5.19265E-07  2.12382E-07 -3.94754E-08 -8.33715E-08
 13.000  6.98348E-08  1.06248E-07  5.15037E-08 -1.73891E-09 -1.88179E-08  2.75446E-07  4.04384E-07  1.71883E-07 -2.59121E-08 -6.46615E-08
 13.100  5.62759E-08  8.72028E-08  4.52326E-08  2.39799E-09 -1.26318E-08  2.11061E-07  3.13375E-07  1.38337E-07 -1.58769E-08 -4.93721E-08
 13.200  4.52448E-08  7.14045E-08  3.95352E-08  5.34961E-09 -7.69566E-09  1.60989E-07  2.41697E-07  1.10763E-07 -8.61329E-09 -3.70544E-08
 13.300  3.62960E-08  5.83329E-08  3.43776E-08  7.30925E-09 -3.87248E-09  1.22251E-07  1.85562E-07  8.82580E-08 -3.49879E-09 -2.72756E-08
 13.400  2.90549E-08  4.75421E-08  2.97286E-08  8.46157E-09 -1.01300E-09  9.24343E-08  1.41841E-07  7.00089E-08 -2.63341E-11 -1.96309E-08
 13.500  2.32090E-08  3.86526E-08  2.55586E-08  8.97700E-09  1.03439E-09  6.95999E-08  1.07969E-07  5.52994E-08  2.21248E-09 -1.37516E-08
 13.600  1.84992E-08  3.13437E-08  2.18391E-08  9.00794E-09  2.41597E-09  5.21972E-08  8.18586E-08  4.35082E-08  3.54269E-09 -9.30966E-09
 13.700  1.47121E-08  2.53460E-08  1.85419E-08  8.68669E-09  3.26715E-09  3.89964E-08  6.18289E-08  3.41038E-08  4.21969E-09 -6.01930E-09
 13.800  1.16725E-08  2.04344E-08  1.56386E-08  8.12477E-09  3.70894E-09  2.90281E-08  4.65341E-08  2.66376E-08  4.44134E-09 -3.63631E-09
 13.900  9.23727E-09  1.64208E-08  1.31004E-08  7.41341E-09  3.84608E-09  2.15333E-08  3.49051E-08  2.07354E-08  4.35848E-09 -1.95595E-09
 14.000  7.29003E-09  1.31490E-08  1.08980E-08  6.62482E-09  3.76653E-09  1.59213E-08  2.60992E-08  1.60879E-08  4.08398E-09 -8.09682E-10
 14.100  5.73614E-09  1.04891E-08  9.00191E-09  5.81411E-09  3.54198E-09  1.17354E-08  1.94564E-08  1.24417E-08  3.70048E-09 -6.12105E-11
 14.200  4.49893E-09  8.33326E-09  7.38256E-09  5.02148E-09  3.22909E-09  8.62468E-09  1.44631E-08  9.59097E-09  3.26684E-09  3.97686E-10
 14.300  3.51630E-09  6.59182E-09  6.01087E-09  4.27459E-09  2.87111E-09  6.32093E-09  1.07221E-08  7.36950E-09  2.82355E-09  6.51351E-10
 14.400  2.73805E-09  5.19041E-09  4.85855E-09  3.59085E-09  2.49982E-09  4.62030E-09  7.92798E-09  5.64395E-09  2.39712E-09  7.64237E-10
 14.500  2.12355E-09  4.06727E-09  3.89858E-09  2.97962E-09  2.13746E-09  3.36868E-09  5.84712E-09  4.30784E-09  2.00368E-09  7.84570E-10
 14.600  1.64002E-09  3.17116E-09  3.10552E-09  2.44416E-09  1.79858E-09  2.45013E-09  4.30166E-09  3.27657E-09  1.65179E-09  7.47589E-10
 14.700  1.26095E-09  2.45959E-09  2.45582E-09  1.98329E-09  1.49175E-09  1.77781E-09  3.15682E-09  2.48318E-09  1.34474E-09  6.78360E-10
 14.800  9.64986E-10  1.89743E-09  1.92797E-09  1.59282E-09  1.22107E-09  1.28695E-09  2.31085E-09  1.87482E-09  1.08222E-09  5.94134E-10
 14.900  7.34906E-10  1.45566E-09  1.50267E-09  1.26672E-09  9.87394E-10  9.29435E-10  1.68726E-09  1.40997E-09  8.61657E-10  5.06301E-10
 15.000  5.56872E-10  1.11043E-09  1.16278E-09  9.97917E-10  7.89405E-10  6.69651E-10  1.22870E-09  1.05607E-09  6.79168E-10  4.21952E-10
 15.100  4.19782E-10  8.42194E-10  8.93364E-10  7.79052E-10  6.24392E-10  4.81311E-10  8.92315E-10  7.87649E-10  5.30241E-10  3.45118E-10
 15.200  3.14759E-10  6.35019E-10  6.81515E-10  6.02876E-10  4.88886E-10  3.45078E-10  6.46170E-10  5.84880E-10  4.10216E-10  2.77722E-10
 15.300  2.34730E-10  4.75974E-10  5.16254E-10  4.62592E-10  3.79103E-10  2.46762E-10  4.66520E-10  4.32344E-10  3.14600E-10  2.20288E-10
 15.400  1.74081E-10  3.54630E-10  3.88345E-10  3.52032E-10  2.91262E-10  1.75977E-10  3.35757E-10  3.18097E-10  2.39247E-10  1.72473E-10
 15.500  1.28378E-10  2.62630E-10  2.90111E-10  2.65750E-10  2.21790E-10  1.25139E-10  2.40846E-10  2.32916E-10  1.80466E-10  1.33439E-10
 15.600  9.41355E-11  1.93321E-10  2.15244E-10  1.99049E-10  1.67442E-10  8.87198E-11  1.72165E-10  1.69705E-10  1.35055E-10  1.02106E-10
 15.700  6.86306E-11  1.41438E-10  1.58614E-10  1.47951E-10  1.25364E-10  6.27012E-11  1.22623E-10  1.23027E-10  1.00295E-10  7.73291E-11
 15.800  4.97466E-11  1.02850E-10  1.16099E-10  1.09149E-10  9.31053E-11  4.41658E-11  8.70050E-11  8.87307E-11  7.39243E-11  5.79975E-11
 15.900  3.58490E-11  7.43347E-11  8.44141E-11  7.99331E-11  6.86058E-11  3.10015E-11  6.14892E-11  6.36613E-11  5.40881E-11  4.30986E-11
 16.000  2.56831E-11  5.33982E-11  6.09718E-11  5.81169E-11  5.01671E-11  2.16817E-11  4.32783E-11  4.54331E-11  3.92907E-11  3.17459E-11
 16.100  1.82923E-11  3.81254E-11  4.37520E-11  4.19568E-11  3.64104E-11  1.51062E-11  3.03316E-11  3.22506E-11  2.83407E-11  2.31865E-11
 16.200  1.29519E-11  2.70559E-11  3.11923E-11  3.00799E-11  2.62332E-11  1.04833E-11  2.11650E-11  2.27691E-11  2.03010E-11  1.67974E-11
 16.300  9.11689E-12  1.90842E-11  2.20955E-11  2.14177E-11  1.87656E-11  7.24537E-12  1.47023E-11  1.59874E-11  1.44430E-11  1.20732E-11
 16.400  6.37979E-12  1.33802E-11  1.55522E-11  1.51474E-11  1.33295E-11  4.98641E-12  1.01659E-11  1.11639E-11  1.02066E-11  8.61154E-12
 16.500  4.43830E-12  9.32479E-12  1.08777E-11  1.06417E-11  9.40292E-12  3.41684E-12  6.99621E-12  7.75265E-12  7.16516E-12  6.09685E-12
 16.600  3.06960E-12  6.45970E-12  7.56074E-12  7.42731E-12  6.58808E-12  2.33089E-12  4.79171E-12  5.35386E-12  4.99728E-12  4.28528E-12
 16.700  2.11062E-12  4.44831E-12  5.22272E-12  5.15038E-12  4.58510E-12  1.58283E-12  3.26585E-12  3.67673E-12  3.46290E-12  2.99071E-12
 16.800  1.44281E-12  3.04510E-12  3.58556E-12  3.54868E-12  3.17012E-12  1.06985E-12  2.21488E-12  2.51089E-12  2.38440E-12  2.07278E-12
 16.900  9.80590E-13  2.07226E-12  2.44663E-12  2.42967E-12  2.17761E-12  7.19692E-13  1.49460E-12  1.70516E-12  1.63148E-12  1.42686E-12
 17.000  6.62605E-13  1.40196E-12  1.65941E-12  1.65315E-12  1.48628E-12  4.81812E-13  1.00345E-12  1.15151E-12  1.10939E-12  9.75676E-13
 17.100  4.45165E-13  9.42961E-13  1.11875E-12  1.11787E-12  1.00802E-12  3.20987E-13  6.70264E-13  7.73295E-13  7.49735E-13  6.62795E-13
 17.200  2.97371E-13  6.30564E-13  7.49766E-13  7.51301E-13  6.79402E-13  2.12789E-13  4.45408E-13  5.16408E-13  5.03598E-13  4.47350E-13
 17.300  1.97514E-13  4.19235E-13  4.99522E-13  5.01885E-13  4.55091E-13  1.40360E-13  2.94454E-13  3.42940E-13  3.36231E-13  3.00021E-13
 17.400  1.30446E-13  2.77136E-13  3.30855E-13  3.33264E-13  3.02981E-13  9.21196E-14  1.93649E-13  2.26477E-13  2.23149E-13  1.99954E-13
 17.500  8.56659E-14  1.82159E-13  2.17869E-13  2.19985E-13  2.00497E-13  6.01532E-14  1.26690E-13  1.48737E-13  1.47223E-13  1.32440E-13
 17.600  5.59427E-14  1.19054E-13  1.42641E-13  1.44357E-13  1.31886E-13  3.90797E-14  8.24501E-14  9.71419E-14  9.65623E-14  8.71873E-14
 17.700  3.63287E-14  7.73727E-14  9.28551E-14  9.41773E-14  8.62418E-14  2.52592E-14  5.33775E-14  6.30952E-14  6.29663E-14  5.70508E-14
 17.800  2.34605E-14  5.00029E-14  6.01026E-14  6.10858E-14  5.60642E-14  1.62426E-14  3.43748E-14  4.07563E-14  4.08224E-14  3.71087E-14
 17.900  1.50668E-14  3.21352E-14  3.86835E-14  3.93949E-14  3.62348E-14  1.03909E-14  2.20210E-14  2.61826E-14  2.63148E-14  2.39951E-14
 18.000  9.62300E-15  2.05380E-14  2.47582E-14  2.52618E-14  2.32842E-14  6.61318E-15  1.40329E-14  1.67285E-14  1.68667E-14  1.54250E-14
 18.100  6.11250E-15  1.30539E-14  1.57576E-14  1.61077E-14  1.48769E-14  4.18717E-15  8.89550E-15  1.06301E-14  1.07500E-14  9.85856E-15
 18.200  3.86152E-15  8.25165E-15  9.97360E-15  1.02132E-14  9.45147E-15  2.63745E-15  5.60934E-15  6.71832E-15  6.81317E-15  6.26480E-15
 18.300  2.42628E-15  5.18767E-15  6.27801E-15  6.43979E-15  5.97091E-15  1.65272E-15  3.51863E-15  4.22319E-15  4.29411E-15  3.95848E-15
 18.400  1.51628E-15  3.24376E-15  3.93019E-15  4.03809E-15  3.75106E-15  1.03031E-15  2.19563E-15  2.64049E-15  2.69151E-15  2.48713E-15
 18.500  9.42505E-16  2.01735E-15  2.44705E-15  2.51821E-15  2.34346E-15  6.38991E-16  1.36292E-15  1.64211E-15  1.67776E-15  1.55395E-15
 18.600  5.82728E-16  1.24791E-15  1.51538E-15  1.56184E-15  1.45603E-15  3.94255E-16  8.41623E-16  1.01579E-15  1.04015E-15  9.65521E-16
 18.700  3.58375E-16  7.67827E-16  9.33387E-16  9.63434E-16  8.99714E-16  2.42004E-16  5.17014E-16  6.25030E-16  6.41362E-16  5.96613E-16
 18.800  2.19235E-16  4.69935E-16  5.71846E-16  5.91105E-16  5.52940E-16  1.47785E-16  3.15960E-16  3.82561E-16  3.93341E-16  3.66645E-16
 18.900  1.33411E-16  2.86098E-16  3.48487E-16  3.60726E-16  3.37991E-16  8.97862E-17  1.92093E-16  2.32924E-16  2.39942E-16  2.24098E-16
 19.000  8.07603E-17  1.73264E-16  2.11249E-16  2.18965E-16  2.05495E-16  5.42704E-17  1.16185E-16  1.41075E-16  1.45588E-16  1.36234E-16
 19.100  4.86335E-17  1.04383E-16  1.27384E-16  1.32211E-16  1.24273E-16  3.26359E-17  6.99117E-17  8.50002E-17  8.78711E-17  8.23764E-17
 19.200  2.91351E-17  6.25582E-17  7.64117E-17  7.94093E-17  7.47568E-17  1.95260E-17  4.18525E-17  5.09485E-17  5.27563E-17  4.95455E-17
 19.300  1.73640E-17  3.72982E-17  4.55976E-17  4.74457E-17  4.47334E-17  1.16231E-17  2.49271E-17  3.03805E-17  3.15083E-17  2.96417E-17
 19.400  1.02954E-17  2.21233E-17  2.70689E-17  2.82004E-17  2.66277E-17  6.88378E-18  1.47709E-17  1.80227E-17  1.87202E-17  1.76406E-17
 19.500  6.07315E-18  1.30550E-17  1.59866E-17  1.66747E-17  1.57678E-17  4.05635E-18  8.70828E-18  1.06369E-17  1.10647E-17  1.04436E-17
 19.600  3.56422E-18  7.66451E-18  9.39313E-18  9.80888E-18  9.28859E-18  2.37823E-18  5.10809E-18  6.24579E-18  6.50614E-18  6.15066E-18
 19.700  2.08116E-18  4.47690E-18  5.49089E-18  5.74045E-18  5.44360E-18  1.38736E-18  2.98120E-18  3.64880E-18  3.80606E-18  3.60365E-18
 19.800  1.20906E-18  2.60176E-18  3.19347E-18  3.34234E-18  3.17387E-18  8.05278E-19  1.73117E-18  2.12085E-18  2.21516E-18  2.10051E-18
 19.900  6.98874E-19  1.50440E-18  1.84791E-18  1.93617E-18  1.84107E-18  4.65085E-19  1.00025E-18  1.22652E-18  1.28269E-18  1.21809E-18
  67 174 200   0.100
  0.000  5.67947E-02 -3.02559E-16 -4.16334E-16 -4.62843E-16 -1.08717E-15  9.32112E-02 -4.80991E-16 -6.66134E-16 -1.20089E-15  7.15245E-17
  0.100  5.68173E-02 -4.86510E-05 -3.40371E-08 -9.35788E-12 -2.17434E-15  9.32088E-02  7.73827E-05  5.20426E-08  1.33220E-11 -1.18731E-15
  0.200  5.68846E-02 -1.91976E-04 -5.39332E-07 -5.93332E-10 -5.39187E-13  9.32015E-02  3.04614E-04  8.21692E-07  8.40011E-10  7.18134E-13
  0.300  5.69953E-02 -4.22222E-04 -2.68646E-06 -6.65428E-09 -1.35900E-11  9.31894E-02  6.67258E-04  4.06857E-06  9.33034E-09  1.79887E-11
  0.400  5.71472E-02 -7.26886E-04 -8.29943E-06 -3.65837E-08 -1.32494E-10  9.31728E-02  1.14229E-03  1.24646E-05  5.06027E-08  1.72744E-10
  0.500  5.73373E-02 -1.08933E-03 -1.96755E-05 -1.35704E-07 -7.65520E-10  9.31518E-02  1.69956E-03  2.92332E-05  1.84419E-07  9.78614E-10
  0.600  5.75618E-02 -1.48962E-03 -3.93527E-05 -3.91572E-07 -3.16873E-09  9.31270E-02  2.30371E-03  5.77016E-05  5.20626E-07  3.95179E-09
  0.700  5.78164E-02 -1.90548E-03 -6.98428E-05 -9.48198E-07 -1.03978E-08  9.30994E-02  2.91643E-03  1.00816E-04  1.22804E-06  1.25807E-08
  0.800  5.80962E-02 -2.31343E-03 -1.13352E-04 -2.01615E-06 -2.87319E-08  9.30702E-02  3.49881E-03  1.60670E-04  2.53178E-06  3.35207E-08
  0.900  5.83959E-02 -2.68997E-03 -1.71509E-04 -3.87581E-06 -6.95165E-08  9.30409E-02  4.01377E-03  2.38104E-04  4.69586E-06  7.76605E-08
  1.000  5.87098E-02 -3.01277E-03 -2.45128E-04 -6.87178E-06 -1.51243E-07  9.30137E-02  4.42834E-03  3.32413E-04  7.99029E-06  1.60495E-07
  1.100  5.90322E-02 -3.26179E-03 -3.34022E-04 -1.13975E-05 -3.01566E-07  9.29907E-02  4.71558E-03  4.41195E-04  1.26449E-05  3.01111E-07
  1.200  5.93572E-02 -3.42036E-03 -4.36881E-04 -1.78699E-05 -5.58870E-07  9.29746E-02  4.85615E-03  5.60362E-04  1.87946E-05  5.19100E-07
  1.300  5.96792E-02 -3.47599E-03 -5.51242E-04 -2.66966E-05 -9.72980E-07  9.29678E-02  4.83943E-03  6.84315E-04  2.64236E-05  8.28877E-07
  1.400  5.99928E-02 -3.42107E-03 -6.73532E-04 -3.82359E-05 -1.60466E-06  9.29727E-02  4.66396E-03  8.06264E-04  3.53159E-05  1.23127E-06
  1.500  6.02929E-02 -3.25326E-03 -7.99207E-04 -5.27560E-05 -2.52369E-06  9.29913E-02  4.33744E-03  9.18666E-04  4.50204E-05  1.70269E-06
  1.600  6.05749E-02 -2.97559E-03 -9.22968E-04 -7.03943E-05 -3.80543E-06  9.30251E-02  3.87613E-03  1.01375E-03  5.48375E-05  2.18279E-06
  1.700  6.08348E-02 -2.59637E-03 -1.03903E-03 -9.11227E-05 -5.52619E-06  9.30748E-02  3.30372E-03  1.08410E-03  6.38303E-05  2.56195E-06
  1.800  6.10694E-02 -2.12872E-03 -1.14147E-03 -1.14721E-04 -7.75774E-06  9.31400E-02  2.64989E-03  1.12319E-03  7.08630E-05  2.67048E-06
  1.900  6.12761E-02 -1.58990E-03 -1.22454E-03 -1.40762E-04 -1.05616E-05  9.32197E-02  1.94844E-03  1.12593E-03  7.46636E-05  2.27131E-06
  2.000  6.14532E-02 -1.00046E-03 -1.28305E-03 -1.68608E-04 -1.39838E-05  9.33116E-02  1.23528E-03  1.08906E-03  7.39060E-05  1.05803E-06
  2.100  6.15998E-02 -3.83169E-04 -1.31267E-03 -1.97426E-04 -1.80513E-05  9.34126E-02  5.46315E-04  1.01153E-03  6.73060E-05 -1.34032E-06
  2.200  6.17160E-02  2.38091E-04 -1.31024E-03 -2.26206E-04 -2.27697E-05  9.35185E-02 -8.45530E-05  8.94597E-04  5.37208E-05 -5.34715E-06
  2.300  6.18027E-02  8.39525E-04 -1.27395E-03 -2.53800E-04 -2.81241E-05  9.36247E-02 -6.27361E-04  7.41939E-04  3.22459E-05 -1.14190E-05
  2.400  6.18617E-02  1.39856E-03 -1.20350E-03 -2.78964E-04 -3.40814E-05  9.37260E-02 -1.05767E-03  5.59481E-04  2.30158E-06 -2.00198E-05
  2.500  6.18954E-02  1.89492E-03 -1.10016E-03 -3.00404E-04 -4.05955E-05  9.38172E-02 -1.35784E-03  3.55147E-04 -3.62973E-05 -3.15915E-05
  2.600  6.19071E-02  2.31153E-03 -9.66765E-04 -3.16825E-04 -4.76139E-05  9.38929E-02 -1.51783E-03  1.38451E-04 -8.32903E-05 -4.65215E-05
  2.700  6.19003E-02  2.63532E-03 -8.07577E-04 -3.26982E-04 -5.50840E-05  9.39482E-02 -1.53559E-03 -8.00191E-05 -1.37942E-04 -6.51118E-05
  2.800  6.18791E-02  2.85770E-03 -6.28158E-04 -3.29725E-04 -6.29589E-05  9.39788E-02 -1.41689E-03 -2.89216E-04 -1.99034E-04 -8.75505E-05
  2.900  6.18476E-02  2.97499E-03 -4.35130E-04 -3.24036E-04 -7.12013E-05  9.39807E-02 -1.17477E-03 -4.78301E-04 -2.64875E-04 -1.13889E-04
  3.000  6.18096E-02  2.98847E-03 -2.35925E-04 -3.09069E-04 -7.97832E-05  9.39510E-02 -8.28447E-04 -6.37344E-04 -3.33331E-04 -1.44024E-04
  3.100  6.17686E-02  2.90429E-03 -3.84961E-05 -2.84183E-04 -8.86817E-05  9.38873E-02 -4.01902E-04 -7.58003E-04 -4.01878E-04 -1.77688E-04
  3.200  6.17273E-02  2.73324E-03  1.48971E-04 -2.48966E-04 -9.78698E-05  9.37879E-02  7.78427E-05 -8.34162E-04 -4.67664E-04 -2.14446E-04
  3.300  6.16873E-02  2.49022E-03  3.18357E-04 -2.03266E-04 -1.07303E-04  9.36513E-02  5.82644E-04 -8.62456E-04 -5.27599E-04 -2.53692E-04
  3.400  6.16488E-02  2.19366E-03  4.61888E-04 -1.47219E-04 -1.16900E-04  9.34766E-02  1.08524E-03 -8.42676E-04 -5.78470E-04 -2.94660E-04
  3.500  6.16106E-02  1.86485E-03  5.72413E-04 -8.12744E-05 -1.26528E-04  9.32622E-02  1.56119E-03 -7.77977E-04 -6.17069E-04 -3.36425E-04
  3.600  6.15693E-02  1.52705E-03  6.43650E-04 -6.22521E-06 -1.35980E-04  9.30066E-02  1.99064E-03 -6.74903E-04 -6.40358E-04 -3.77915E-04
  3.700  6.15197E-02  1.20469E-03  6.70421E-04  7.67665E-05 -1.44960E-04  9.27070E-02  2.35983E-03 -5.43163E-04 -6.45652E-04 -4.17921E-04
  3.800  6.14548E-02  9.22440E-04  6.48862E-04  1.66148E-04 -1.53078E-04  9.23599E-02  2.66214E-03 -3.95190E-04 -6.30813E-04 -4.55112E-04
  3.900  6.13652E-02  7.04315E-04  5.76609E-04  2.59964E-04 -1.59846E-04  9.19603E-02  2.89869E-03 -2.45476E-04 -5.94459E-04 -4.88057E-04
  4.000  6.12398E-02  5.72762E-04  4.52953E-04  3.55859E-04 -1.64693E-04  9.15021E-02  3.07839E-03 -1.09703E-04 -5.36161E-04 -5.15251E-04
  4.100  6.10661E-02  5.47811E-04  2.78962E-04  4.51101E-04 -1.66989E-04  9.09772E-02  3.21748E-03 -3.74333E-06 -4.56608E-04 -5.35158E-04
  4.200  6.08300E-02  6.46269E-04  5.75532E-05  5.42632E-04 -1.66081E-04  9.03764E-02  3.33844E-03  5.74305E-05 -3.57730E-04 -5.46269E-04
  4.300  6.05169E-02  8.81002E-04 -2.06486E-04  6.27147E-04 -1.61341E-04  8.96892E-02  3.46851E-03  6.08424E-05 -2.42755E-04 -5.47165E-04
  4.400  6.01116E-02  1.26033E-03 -5.06549E-04  7.01204E-04 -1.52223E-04  8.89039E-02  3.63777E-03 -3.47020E-06 -1.16171E-04 -5.36608E-04
  4.500  5.95995E-02  1.78756E-03 -8.34339E-04  7.61364E-04 -1.38323E-04  8.80083E-02  3.87700E-03 -1.41597E-04  1.63968E-05 -5.13631E-04
  4.600  5.89667E-02  2.46068E-03 -1.18008E-03  8.04361E-04 -1.19431E-04  8.69898E-02  4.21535E-03 -3.55133E-04  1.48419E-04 -4.77634E-04
  4.700  5.82007E-02  3.27220E-03 -1.53282E-03  8.27278E-04 -9.55863E-05  8.58362E-02  4.67816E-03 -6.40845E-04  2.72781E-04 -4.28477E-04
  4.800  5.72910E-02  4.20929E-03 -1.88081E-03  8.27736E-04 -6.71081E-05  8.45358E-02  5.28486E-03 -9.90681E-04  3.82184E-04 -3.66556E-04
  4.900  5.62296E-02  5.25402E-03 -2.21200E-03  8.04071E-04 -3.46141E-05  8.30781E-02  6.04728E-03 -1.39212E-03  4.69599E-04 -2.92856E-04
  5.000  5.50112E-02  6.38387E-03 -2.51448E-03  7.55487E-04  9.86300E-07  8.14545E-02  6.96848E-03 -1.82884E-03  5.28733E-04 -2.08966E-04
  5.100  5.36339E-02  7.57247E-03 -2.77710E-03  6.82169E-04  3.85220E-05  7.96583E-02  8.04197E-03 -2.28170E-03  5.54480E-04 -1.17058E-04
  5.200  5.20988E-02  8.79046E-03 -2.98995E-03  5.85344E-04  7.66134E-05  7.76855E-02  9.25176E-03 -2.72991E-03  5.43311E-04 -1.98165E-05
  5.300  5.04105E-02  1.00066E-02 -3.14491E-03  4.67285E-04  1.13747E-04  7.55347E-02  1.05729E-02 -3.15232E-03  4.93567E-04  7.96730E-05
  5.400  4.85769E-02  1.11887E-02 -3.23603E-03  3.31243E-04  1.48362E-04  7.32078E-02  1.19724E-02 -3.52876E-03  4.05631E-04  1.78072E-04
  5.500  4.66089E-02  1.23053E-02 -3.25985E-03  1.81321E-04  1.78951E-04  7.07098E-02  1.34112E-02 -3.84131E-03  2.81957E-04  2.71969E-04
  5.600  4.45204E-02  1.33263E-02 -3.21566E-03  2.22848E-05  2.04155E-04  6.80492E-02  1.48461E-02 -4.07536E-03  1.26955E-04  3.58070E-04
  5.700  4.23276E-02  1.42246E-02 -3.10545E-03 -1.40668E-04  2.22856E-04  6.52376E-02  1.62318E-02 -4.22043E-03 -5.32714E-05  4.33394E-04
  5.800  4.00488E-02  1.49768E-02 -2.93385E-03 -3.02173E-04  2.34247E-04  6.22900E-02  1.75234E-02 -4.27074E-03 -2.51293E-04  4.95448E-04
  5.900  3.77040E-02  1.55643E-02 -2.70789E-03 -4.56977E-04  2.37889E-04  5.92240E-02  1.86788E-02 -4.22538E-03 -4.58824E-04  5.42369E-04
  6.000  3.53142E-02  1.59738E-02 -2.43655E-03 -6.00201E-04  2.33739E-04  5.60603E-02  1.96605E-02 -4.08817E-03 -6.67229E-04  5.73032E-04
  6.100  3.29010E-02  1.61976E-02 -2.13031E-03 -7.27584E-04  2.22143E-04  5.28216E-02  2.04376E-02 -3.86723E-03 -8.68049E-04  5.87096E-04
  6.200  3.04861E-02  1.62341E-02 -1.80058E-03 -8.35677E-04  2.03812E-04  4.95325E-02  2.09871E-02 -3.57428E-03 -1.05348E-03  5.85001E-04
  6.300  2.80907E-02  1.60871E-02 -1.45909E-03 -9.21986E-04  1.79767E-04  4.62188E-02  2.12947E-02 -3.22371E-03 -1.21681E-03  5.67913E-04
  6.400  2.57351E-02  1.57661E-02 -1.11731E-03 -9.85047E-04  1.51270E-04  4.29071E-02  2.13548E-02 -2.83163E-03 -1.35273E-03  5.37619E-04
  6.500  2.34386E-02  1.52851E-02 -7.85913E-04 -1.02444E-03  1.19734E-04  3.96239E-02  2.11711E-02 -2.41481E-03 -1.45752E-03  4.96386E-04
  6.600  2.12184E-02  1.46621E-02 -4.74305E-04 -1.04072E-03  8.66325E-05  3.63953E-02  2.07551E-02 -1.98969E-03 -1.52920E-03  4.46802E-04
  6.700  1.90902E-02  1.39182E-02 -1.90278E-04 -1.03535E-03  5.34137E-05  3.32460E-02  2.01256E-02 -1.57154E-03 -1.56743E-03  3.91600E-04
  6.800  1.70671E-02  1.30764E-02  6.02299E-05 -1.01050E-03  2.14155E-05  3.01992E-02  1.93075E-02 -1.17372E-03 -1.57341E-03  3.33492E-04
  6.900  1.51601E-02  1.21611E-02  2.73247E-04 -9.68913E-04 -8.20104E-06  2.72754E-02  1.83298E-02 -8.07183E-04 -1.54967E-03  2.75017E-04
  7.000  1.33776E-02  1.11963E-02  4.46752E-04 -9.13686E-04 -3.45013E-05  2.44928E-02  1.72244E-02 -4.80172E-04 -1.49974E-03  2.18418E-04
  7.100  1.17254E-02  1.02056E-02  5.80555E-04 -8.48082E-04 -5.68080E-05  2.18661E-02  1.60245E-02 -1.98125E-04 -1.42790E-03  1.65555E-04
  7.200  1.02069E-02  9.21084E-03  6.76087E-04 -7.75357E-04 -7.47115E-05  1.94070E-02  1.47631E-02  3.62368E-05 -1.33883E-03  1.17842E-04
  7.300  8.82336E-03  8.23163E-03  7.36124E-04 -6.98596E-04 -8.80620E-05  1.71237E-02  1.34717E-02  2.22665E-04 -1.23731E-03  7.62384E-05
  7.400  7.57343E-03  7.28496E-03  7.64465E-04 -6.20596E-04 -9.69453E-05  1.50208E-02  1.21790E-02  3.63028E-04 -1.12798E-03  4.12571E-05
  7.500  6.45400E-03  6.38481E-03  7.65605E-04 -5.43768E-04 -1.01648E-04  1.30999E-02  1.09107E-02  4.60877E-04 -1.01508E-03  1.30080E-05
  7.600  5.46018E-03  5.54211E-03  7.44406E-04 -4.70090E-04 -1.02611E-04  1.13594E-02  9.68832E-03  5.20981E-04 -9.02354E-04 -8.74150E-06
  7.700  4.58561E-03  4.76468E-03  7.05809E-04 -4.01080E-04 -1.00387E-04  9.79488E-03  8.52919E-03  5.48870E-04 -7.92903E-04 -2.44929E-05
  7.800  3.82278E-03  4.05746E-03  6.54573E-04 -3.37808E-04 -9.55880E-05  8.39969E-03  7.44645E-03  5.50410E-04 -6.89163E-04 -3.49389E-05
  7.900  3.16332E-03  3.42269E-03  5.95083E-04 -2.80928E-04 -8.88450E-05  7.16513E-03  6.44910E-03  5.31437E-04 -5.92902E-04 -4.08866E-05
  8.000  2.59832E-03  2.86031E-03  5.31198E-04 -2.30724E-04 -8.07687E-05  6.08102E-03  5.54237E-03  4.97459E-04 -5.05267E-04 -4.31890E-05
  8.100  2.11857E-03  2.36830E-03  4.66169E-04 -1.87177E-04 -7.19204E-05  5.13608E-03  4.72813E-03  4.53444E-04 -4.26852E-04 -4.26859E-05
  8.200  1.71488E-03  1.94310E-03  4.02601E-04 -1.50023E-04 -6.27900E-05  4.31835E-03  4.00540E-03  4.03678E-04 -3.57783E-04 -4.01591E-05
  8.300  1.37823E-03  1.58001E-03  3.42457E-04 -1.18822E-04 -5.37832E-05  3.61561E-03  3.37092E-03  3.51691E-04 -2.97819E-04 -3.63000E-05
  8.400  1.09998E-03  1.27355E-03  2.87105E-04 -9.30186E-05 -4.52161E-05  3.01568E-03  2.81968E-03  3.00255E-04 -2.46443E-04 -3.16916E-05
  8.500  8.72048E-04  1.01782E-03  2.37378E-04 -7.19909E-05 -3.73167E-05  2.50674E-03  2.34545E-03  2.51416E-04 -2.02954E-04 -2.68004E-05
  8.600  6.86960E-04  8.06796E-04  1.93665E-04 -5.50991E-05 -3.02309E-05  2.07753E-03  1.94120E-03  2.06567E-04 -1.66540E-04 -2.19794E-05
  8.700  5.37952E-04  6.34535E-04  1.55992E-04 -4.17169E-05 -2.40334E-05  1.71752E-03  1.59957E-03  1.66542E-04 -1.36346E-04 -1.74767E-05
  8.800  4.18993E-04  4.95392E-04  1.24117E-04 -3.12573E-05 -1.87396E-05  1.41706E-03  1.31317E-03  1.31716E-04 -1.11524E-04 -1.34496E-05
  8.900  3.24789E-04  3.84140E-04  9.76058E-05 -2.31882E-05 -1.43190E-05  1.16740E-03  1.07483E-03  1.02112E-04 -9.12665E-05 -9.98048E-06
  9.000  2.50761E-04  2.96055E-04  7.59101E-05 -1.70417E-05 -1.07082E-05  9.60756E-04  8.77799E-04  7.74941E-05 -7.48324E-05 -7.09385E-06
  9.100  1.93008E-04  2.26961E-04  5.84243E-05 -1.24169E-05 -7.82270E-06  7.90271E-04  7.15877E-04  5.74557E-05 -6.15606E-05 -4.77198E-06
  9.200  1.48250E-04  1.73238E-04  4.45332E-05 -8.97812E-06 -5.56700E-06  6.49987E-04  5.83489E-04  4.14895E-05 -5.08752E-05 -2.96909E-06
  9.300  1.13768E-04  1.31807E-04  3.36469E-05 -6.45032E-06 -3.84309E-06  5.34780E-04  4.75710E-04  2.90445E-05 -4.22843E-05 -1.62308E-06
  9.400  8.73383E-05  1.00090E-04  2.52236E-05 -4.61281E-06 -2.55646E-06  4.40293E-04  3.88259E-04  1.95693E-05 -3.53751E-05 -6.64726E-07
  9.500  6.71624E-05  7.59687E-05  1.87828E-05 -3.29163E-06 -1.62043E-06  3.62855E-04  3.17473E-04  1.25406E-05 -2.98066E-05 -2.44288E-08
  9.600  5.18058E-05  5.77250E-05  1.39114E-05 -2.35213E-06 -9.58708E-07  2.99395E-04  2.60256E-04  7.48300E-06 -2.53010E-05  3.63254E-07
  9.700  4.01367E-05  4.39871E-05  1.02629E-05 -1.69171E-06 -5.06486E-07  2.47367E-04  2.14025E-04  3.97805E-06 -2.16341E-05  5.56895E-07
  9.800  3.12720E-05  3.36738E-05  7.55400E-06 -1.23338E-06 -2.10484E-07  2.04671E-04  1.76644E-04  1.66809E-06 -1.86272E-05  6.06927E-07
  9.900  2.45290E-05  2.59437E-05  5.55751E-06 -9.20103E-07 -2.81962E-08  1.69586E-04  1.46367E-04  2.54755E-07 -1.61388E-05  5.55389E-07
 10.000  1.93856E-05  2.01495E-05  4.09483E-06 -7.10099E-07  7.33436E-08  1.40707E-04  1.21777E-04 -5.05319E-07 -1.40582E-05  4.36362E-07
 10.100  1.54452E-05  1.57984E-05  3.02793E-06 -5.73020E-07  1.19039E-07  1.16891E-04  1.01733E-04 -8.06430E-07 -1.22989E-05  2.76789E-07
 10.200  1.24086E-05  1.25186E-05  2.25176E-06 -4.86941E-07  1.27256E-07  9.72099E-05  8.53205E-05 -8.00475E-07 -1.07944E-05  9.74641E-08
 10.300  1.00517E-05  1.00320E-05  1.68750E-06 -4.36047E-07  1.11256E-07  8.09105E-05  7.18127E-05 -6.03597E-07 -9.49343E-06 -8.59579E-08
 10.400  8.20696E-06  8.13176E-06  1.27665E-06 -4.08906E-07  8.04638E-08  6.73833E-05  6.06327E-05 -3.02428E-07 -8.35695E-06 -2.62024E-07
 10.500  6.74972E-06  6.66505E-06  9.76305E-07 -3.97203E-07  4.15116E-08  5.61341E-05  5.13249E-05  4.03263E-08 -7.35537E-06 -4.22670E-07
 10.600  5.58716E-06  5.51943E-06  7.55248E-07 -3.94848E-07 -9.42229E-10  4.67618E-05  4.35300E-05  3.81029E-07 -6.46640E-06 -5.62542E-07
 10.700  4.65028E-06  4.61248E-06  5.90960E-07 -3.97352E-07 -4.36052E-08  3.89404E-05  3.69648E-05  6.90994E-07 -5.67322E-06 -6.78447E-07
 10.800  3.88765E-06  3.88396E-06  4.67315E-07 -4.01406E-07 -8.41263E-08  3.24043E-05  3.14066E-05  9.53050E-07 -4.96315E-06 -7.68906E-07
 10.900  3.26085E-06  3.28994E-06  3.72861E-07 -4.04598E-07 -1.20817E-07  2.69367E-05  2.66793E-05  1.15870E-06 -4.32650E-06 -8.33800E-07
 11.000  2.74113E-06  2.79852E-06  2.99522E-07 -4.05224E-07 -1.52483E-07  2.23599E-05  2.26437E-05  1.30582E-06 -3.75578E-06 -8.74075E-07
 11.100  2.30680E-06  2.38650E-06  2.41659E-07 -4.02162E-07 -1.78322E-07  1.85277E-05  1.91890E-05  1.39674E-06 -3.24495E-06 -8.91491E-07
 11.200  1.94146E-06  2.03708E-06  1.95362E-07 -3.94774E-07 -1.97874E-07  1.53196E-05  1.62264E-05  1.43677E-06 -2.78904E-06 -8.88405E-07
 11.300  1.63260E-06  1.73806E-06  1.57940E-07 -3.82834E-07 -2.10986E-07  1.26357E-05  1.36838E-05  1.43300E-06 -2.38369E-06 -8.67577E-07
 11.400  1.37056E-06  1.48052E-06  1.27542E-07 -3.66456E-07 -2.17783E-07  1.03929E-05  1.15024E-05  1.39335E-06 -2.02498E-06 -8.31999E-07
 11.500  1.14781E-06  1.25788E-06  1.02876E-07 -3.46032E-07 -2.18637E-07  8.52158E-06  9.63322E-06  1.32587E-06 -1.70925E-06 -7.84739E-07
 11.600  9.58364E-07  1.06517E-06  8.30145E-08 -3.22161E-07 -2.14129E-07  6.96352E-06  8.03496E-06  1.23825E-06 -1.43297E-06 -7.28808E-07
 11.700  7.97407E-07  8.98527E-07  6.72497E-08 -2.95590E-07 -2.05000E-07  5.66953E-06  6.67239E-06  1.13747E-06 -1.19276E-06 -6.67055E-07
 11.800  6.60950E-07  7.54829E-07  5.50014E-08 -2.67149E-07 -1.92101E-07  4.59803E-06  5.51500E-06  1.02955E-06 -9.85294E-07 -6.02075E-07
 11.900  5.45641E-07  6.31446E-07  4.57572E-08 -2.37691E-07 -1.76335E-07  3.71375E-06  4.53608E-06  9.19524E-07 -8.07381E-07 -5.36148E-07
 12.000  4.48604E-07  5.26071E-07  3.90399E-08 -2.08044E-07 -1.58609E-07  2.98670E-06  3.71205E-06  8.11350E-07 -6.55931E-07 -4.71204E-07
 12.100  3.67335E-07  4.36620E-07  3.43938E-08 -1.78970E-07 -1.39789E-07  2.39137E-06  3.02199E-06  7.08016E-07 -5.27998E-07 -4.08803E-07
 12.200  2.99629E-07  3.61174E-07  3.13839E-08 -1.51130E-07 -1.20658E-07  1.90602E-06  2.44731E-06  6.11609E-07 -4.20795E-07 -3.50143E-07
 12.300  2.43533E-07  2.97953E-07  2.96024E-08 -1.25064E-07 -1.01893E-07  1.51215E-06  1.97146E-06  5.23444E-07 -3.31719E-07 -2.96071E-07
 12.400  1.97318E-07  2.45306E-07  2.86776E-08 -1.01181E-07 -8.40471E-08  1.19408E-06  1.57980E-06  4.44194E-07 -2.58360E-07 -2.47124E-07
 12.500  1.59451E-07  2.01717E-07  2.82840E-08 -7.97569E-08 -6.75402E-08  9.38498E-07  1.25936E-06  3.74022E-07 -1.98510E-07 -2.03561E-07
 12.600  1.28585E-07  1.65806E-07  2.81486E-08 -6.09414E-08 -5.26642E-08  7.34176E-07  9.98784E-07  3.12711E-07 -1.50173E-07 -1.65412E-07
 12.700  1.03544E-07  1.36339E-07  2.80558E-08 -4.47694E-08 -3.95901E-08  5.71682E-07  7.88181E-07  2.59769E-07 -1.11556E-07 -1.32522E-07
 12.800  8.33119E-08  1.12226E-07  2.78467E-08 -3.11790E-08 -2.83834E-08  4.43129E-07  6.18986E-07  2.14532E-07 -8.10693E-08 -1.04595E-07
 12.900  6.70192E-08  9.25233E-08  2.74166E-08 -2.00298E-08 -1.90207E-08  3.41958E-07  4.83858E-07  1.76240E-07 -5.73158E-08 -8.12402E-08
 13.000  5.39305E-08  7.64240E-08  2.67092E-08 -1.11239E-08 -1.14094E-08  2.62750E-07  3.76556E-07  1.44092E-07 -3.90804E-08 -6.20041E-08
 13.100  4.34311E-08  6.32514E-08  2.57085E-08 -4.22431E-09 -5.40631E-09  2.01051E-07  2.91822E-07  1.17302E-07 -2.53172E-08 -4.64043E-08
 13.200  3.50126E-08  5.24455E-08  2.44302E-08  9.26769E-10 -8.35472E-10  1.53230E-07  2.25265E-07  9.51202E-08 -1.51349E-08 -3.39546E-08
 13.300  2.82592E-08  4.35493E-08  2.29128E-08  4.59293E-09  2.49623E-09  1.16345E-07  1.73248E-07  7.68578E-08 -7.78253E-09 -2.41851E-08
 13.400  2.28342E-08  3.61948E-08  2.12094E-08  7.03114E-09  4.78608E-09  8.80247E-08  1.32789E-07  6.18968E-08 -2.63429E-09 -1.66560E-08
 13.500  1.84676E-08  3.00881E-08  1.93798E-08  8.48229E-09  6.22527E-09  6.63773E-08  1.01458E-07  4.96934E-08  8.25208E-10 -1.09673E-08
 13.600  1.49440E-08  2.49965E-08  1.74849E-08  9.16472E-09  6.99149E-09  4.98992E-08  7.72960E-08  3.97773E-08  3.01503E-09 -6.76398E-09
 13.700  1.20931E-08  2.07366E-08  1.55816E-08  9.27023E-09  7.24396E-09  3.74048E-08  5.87322E-08  3.17469E-08  4.27132E-09 -3.73810E-09
 13.800  9.78073E-09  1.71636E-08  1.37200E-08  8.96238E-09  7.12075E-09  2.79653E-08  4.45182E-08  2.52635E-08  4.85975E-09 -1.62797E-09
 13.900  7.90099E-09  1.41627E-08  1.19412E-08  8.37663E-09  6.73784E-09  2.08575E-08  3.36683E-08  2.00440E-08  4.98687E-09 -2.15688E-10
 14.000  6.37057E-09  1.16423E-08  1.02766E-08  7.62172E-09  6.18968E-09  1.55217E-08  2.54093E-08  1.58532E-08  4.81031E-09  6.76648E-10
 14.100  5.12359E-09  9.52803E-09  8.74816E-09  6.78211E-09  5.55059E-09  1.15271E-08  1.91379E-08  1.24977E-08  4.44787E-09  1.19144E-09
 14.200  4.10767E-09  7.75884E-09  7.36867E-09  5.92094E-09  4.87696E-09  8.54402E-09  1.43865E-08  9.81827E-09  3.98531E-09  1.44038E-09
 14.300  3.28087E-09  6.28366E-09  6.14336E-09  5.08317E-09  4.20974E-09  6.32129E-09  1.07939E-08  7.68498E-09  3.48319E-09  1.50923E-09
 14.400  2.60932E-09  5.05918E-09  5.07105E-09  4.29885E-09  3.57695E-09  4.66844E-09  8.08256E-09  5.99178E-09  2.98250E-09  1.46233E-09
 14.500  2.06542E-09  4.04819E-09  4.14559E-09  3.58614E-09  2.99625E-09  3.44164E-09  6.03995E-09  4.65238E-09  2.50944E-09  1.34672E-09
 14.600  1.62652E-09  3.21843E-09  3.35726E-09  2.95409E-09  2.47723E-09  2.53262E-09  4.50380E-09  3.59669E-09  2.07925E-09  1.19576E-09
 14.700  1.27389E-09  2.54182E-09  2.69402E-09  2.40499E-09  2.02344E-09  1.86018E-09  3.35057E-09  2.76787E-09  1.69931E-09  1.03225E-09
 14.800  9.91992E-10  1.99388E-09  2.14257E-09  1.93645E-09  1.63413E-09  1.36354E-09  2.48643E-09  2.11989E-09  1.37155E-09  8.71000E-10
 14.900  7.67867E-10  1.55333E-09  1.68919E-09  1.54298E-09  1.30568E-09  9.97350E-10  1.84018E-09  1.61557E-09  1.09432E-09  7.20978E-10
 15.000  5.90728E-10  1.20173E-09  1.32045E-09  1.21728E-09  1.03271E-09  7.27810E-10  1.35793E-09  1.22491E-09  8.63785E-10  5.86972E-10
 15.100  4.51596E-10  9.23229E-10  1.02364E-09  9.51224E-10  8.08929E-10  5.29778E-10  9.98914E-10  9.23820E-10  6.74956E-10  4.70902E-10
 15.200  3.43026E-10  7.04313E-10  7.87094E-10  7.36548E-10  6.27779E-10  3.84578E-10  7.32343E-10  6.92967E-10  5.22372E-10  3.72815E-10
 15.300  2.58872E-10  5.33550E-10  6.00395E-10  5.65309E-10  4.82857E-10  2.78353E-10  5.34980E-10  5.16927E-10  4.00598E-10  2.91604E-10
 15.400  1.94089E-10  4.01369E-10  4.54407E-10  4.30192E-10  3.68196E-10  2.00830E-10  3.89317E-10  3.83437E-10  3.04526E-10  2.25541E-10
 15.500  1.44563E-10  2.99837E-10  3.41282E-10  3.24668E-10  2.78422E-10  1.44407E-10  2.82176E-10  2.82795E-10  2.29544E-10  1.72625E-10
 15.600  1.06968E-10  2.22441E-10  2.54393E-10  2.43062E-10  2.08833E-10  1.03462E-10  2.03659E-10  2.07362E-10  1.71615E-10  1.30826E-10
 15.700  7.86295E-11  1.63890E-10  1.88223E-10  1.80545E-10  1.55403E-10  7.38437E-11  1.46344E-10  1.51163E-10  1.27291E-10  9.82226E-11
 15.800  5.74193E-11  1.19928E-10  1.38252E-10  1.33083E-10  1.14753E-10  5.24934E-11  1.04680E-10  1.09546E-10  9.36882E-11  7.30874E-11
 15.900  4.16562E-11  8.71644E-11  1.00822E-10  9.73650E-11  8.41003E-11  3.71600E-11  7.45250E-11  7.89181E-11  6.84387E-11  5.39195E-11
 16.000  3.00236E-11  6.29269E-11  7.30072E-11  7.07122E-11  6.11821E-11  2.61910E-11  5.28003E-11  5.65158E-11  4.96275E-11  3.94509E-11
 16.100  2.14992E-11  4.51269E-11  5.24991E-11  5.09868E-11  4.41886E-11  1.83767E-11  3.72232E-11  4.02320E-11  3.57285E-11  2.86350E-11
 16.200  1.52958E-11  3.21487E-11  3.74935E-11  3.65048E-11  3.16893E-11  1.28340E-11  2.61089E-11  2.84695E-11  2.55410E-11  2.06239E-11
 16.300  1.08127E-11  2.27534E-11  2.65961E-11  2.59552E-11  2.25677E-11  8.92037E-12  1.82191E-11  2.00260E-11  1.81322E-11  1.47424E-11
 16.400  7.59493E-12  1.59996E-11  1.87404E-11  1.83286E-11  1.59619E-11  6.16998E-12  1.26471E-11  1.40028E-11  1.27850E-11  1.04611E-11
 16.500  5.30106E-12  1.11784E-11  1.31181E-11  1.28561E-11  1.12137E-11  4.24641E-12  8.73280E-12  9.73309E-12  8.95440E-12  7.36996E-12
 16.600  3.67680E-12  7.76036E-12  9.12292E-12  8.95791E-12  7.82577E-12  2.90780E-12  5.99784E-12  6.72520E-12  6.23020E-12  5.15590E-12
 16.700  2.53436E-12  5.35355E-12  6.30374E-12  6.20102E-12  5.42572E-12  1.98097E-12  4.09727E-12  4.61941E-12  4.30663E-12  3.58223E-12
 16.800  1.73611E-12  3.67016E-12  4.32810E-12  4.26496E-12  3.73748E-12  1.34258E-12  2.78380E-12  3.15431E-12  2.95788E-12  2.47212E-12
 16.900  1.18200E-12  2.50054E-12  2.95298E-12  2.91472E-12  2.55815E-12  9.05162E-13  1.88111E-12  2.14126E-12  2.01868E-12  1.69473E-12
 17.000  7.99849E-13  1.69323E-12  2.00224E-12  1.97944E-12  1.73994E-12  6.07045E-13  1.26419E-12  1.44507E-12  1.36908E-12  1.15423E-12
 17.100  5.37988E-13  1.13959E-12  1.34925E-12  1.33593E-12  1.17607E-12  4.04958E-13  8.44949E-13  9.69572E-13  9.22782E-13  7.81074E-13
 17.200  3.59692E-13  7.62360E-13  9.03687E-13  8.96081E-13  7.90052E-13  2.68709E-13  5.61647E-13  6.46772E-13  6.18166E-13  5.25214E-13
 17.300  2.39057E-13  5.06955E-13  6.01611E-13  5.97399E-13  5.27506E-13  1.77349E-13  3.71287E-13  4.28958E-13  4.11600E-13  3.50964E-13
 17.400  1.57945E-13  3.35118E-13  3.98117E-13  3.95878E-13  3.50088E-13  1.16425E-13  2.44101E-13  2.82869E-13  2.72418E-13  2.33079E-13
 17.500  1.03744E-13  2.20225E-13  2.61894E-13  2.60773E-13  2.30956E-13  7.60198E-14  1.59605E-13  1.85471E-13  1.79231E-13  1.53849E-13
 17.600  6.77468E-14  1.43879E-13  1.71271E-13  1.70762E-13  1.51463E-13  4.93711E-14  1.03787E-13  1.20920E-13  1.17227E-13  1.00940E-13
 17.700  4.39850E-14  9.34561E-14  1.11355E-13  1.11167E-13  9.87499E-14  3.18921E-14  6.71215E-14  7.83908E-14  7.62266E-14  6.58321E-14
 17.800  2.83941E-14  6.03556E-14  7.19808E-14  7.19499E-14  6.40086E-14  2.04907E-14  4.31728E-14  5.05350E-14  4.92797E-14  4.26821E-14
 17.900  1.82253E-14  3.87565E-14  4.62626E-14  4.63000E-14  4.12509E-14  1.30949E-14  2.76181E-14  3.23959E-14  3.16763E-14  2.75114E-14
 18.000  1.16323E-14  2.47461E-14  2.95643E-14  2.96242E-14  2.64327E-14  8.32369E-15  1.75720E-14  2.06526E-14  2.02453E-14  1.76304E-14
 18.100  7.38265E-15  1.57117E-14  1.87866E-14  1.88472E-14  1.68416E-14  5.26268E-15  1.11198E-14  1.30935E-14  1.28664E-14  1.12335E-14
 18.200  4.65945E-15  9.91988E-15  1.18711E-14  1.19234E-14  1.06703E-14  3.30963E-15  6.99890E-15  8.25564E-15  8.13112E-15  7.11693E-15
 18.300  2.92447E-15  6.22840E-15  7.45948E-15  7.50111E-15  6.72262E-15  2.07033E-15  4.38156E-15  5.17688E-15  5.11002E-15  4.48350E-15
 18.400  1.82543E-15  3.88909E-15  4.66145E-15  4.69287E-15  4.21199E-15  1.28823E-15  2.72837E-15  3.22866E-15  3.19367E-15  2.80872E-15
 18.500  1.13319E-15  2.41510E-15  2.89697E-15  2.91981E-15  2.62445E-15  7.97347E-16  1.68989E-15  2.00274E-15  1.98504E-15  1.74977E-15
 18.600  6.99641E-16  1.49161E-15  1.79058E-15  1.80673E-15  1.62633E-15  4.90919E-16  1.04114E-15  1.23563E-15  1.22708E-15  1.08407E-15
 18.700  4.29632E-16  9.16263E-16  1.10073E-15  1.11190E-15  1.00233E-15  3.00668E-16  6.38055E-16  7.58274E-16  7.54435E-16  6.67961E-16
 18.800  2.62410E-16  5.59816E-16  6.73016E-16  6.80593E-16  6.14419E-16  1.83185E-16  3.88972E-16  4.62858E-16  4.61345E-16  4.09335E-16
 18.900  1.59419E-16  3.40207E-16  4.09297E-16  4.14357E-16  3.74610E-16  1.11025E-16  2.35884E-16  2.81039E-16  2.80608E-16  2.49492E-16
 19.000  9.63359E-17  2.05649E-16  2.47590E-16  2.50923E-16  2.27180E-16  6.69415E-17  1.42301E-16  1.69743E-16  1.69769E-16  1.51251E-16
 19.100  5.79078E-17  1.23655E-16  1.48978E-16  1.51146E-16  1.37041E-16  4.01528E-17  8.53994E-17  1.01985E-16  1.02167E-16  9.12055E-17
 19.200  3.46258E-17  7.39614E-17  8.91702E-17  9.05648E-17  8.22306E-17  2.39603E-17  5.09858E-17  6.09551E-17  6.11610E-17  5.47060E-17
 19.300  2.05962E-17  4.40072E-17  5.30930E-17  5.39806E-17  4.90830E-17  1.42244E-17  3.02831E-17  3.62430E-17  3.64217E-17  3.26404E-17
 19.400  1.21874E-17  2.60481E-17  3.14476E-17  3.20070E-17  2.91443E-17  8.40134E-18  1.78943E-17  2.14382E-17  2.15764E-17  1.93729E-17
 19.500  7.17435E-18  1.53382E-17  1.85302E-17  1.88795E-17  1.72154E-17  4.93679E-18  1.05198E-17  1.26158E-17  1.27157E-17  1.14384E-17
 19.600  4.20158E-18  8.98529E-18  1.08624E-17  1.10787E-17  1.01164E-17  2.88622E-18  6.15290E-18  7.38601E-18  7.45521E-18  6.71856E-18
 19.700  2.44801E-18  5.23669E-18  6.33491E-18  6.46773E-18  5.91422E-18  1.67885E-18  3.58051E-18  4.30215E-18  4.34855E-18  3.92593E-18
 19.800  1.41903E-18  3.03640E-18  3.67561E-18  3.75652E-18  3.43985E-18  9.71628E-19  2.07306E-18  2.49317E-18  2.52352E-18  2.28231E-18
 19.900  8.18391E-19  1.75166E-18  2.12180E-18  2.17072E-18  1.99050E-18  5.59503E-19  1.19422E-18  1.43753E-18  1.45699E-18  1.32003E-18
  67 175 200   0.100
  0.000  5.69697E-02 -2.79285E-16 -4.89192E-16 -3.37750E-16 -1.35181E-15  9.34191E-02 -4.96507E-16 -7.49401E-16 -6.75501E-16 -9.29818E-16
  0.100  5.69884E-02 -4.80387E-05 -3.49862E-08 -1.07128E-11 -4.70631E-15  9.34231E-02  7.83998E-05  6.22732E-08  2.01877E-11  2.57488E-15
  0.200  5.70441E-02 -1.89570E-04 -5.54441E-07 -6.79446E-10 -6.42776E-13  9.34347E-02  3.08757E-04  9.83962E-07  1.27624E-09  1.17274E-12
  0.300  5.71360E-02 -4.16967E-04 -2.76230E-06 -7.62444E-09 -1.61830E-11  9.34528E-02  6.76846E-04  4.87820E-06  1.42407E-08  2.94537E-11
  0.400  5.72624E-02 -7.17930E-04 -8.53624E-06 -4.19510E-08 -1.58056E-10  9.34756E-02  1.15995E-03  1.49717E-05  7.77363E-08  2.85728E-10
  0.500  5.74214E-02 -1.07609E-03 -2.02447E-05 -1.55773E-07 -9.15271E-10  9.35008E-02  1.72829E-03  3.51946E-05  2.85726E-07  1.64014E-09
  0.600  5.76103E-02 -1.47182E-03 -4.05101E-05 -4.50041E-07 -3.79916E-09  9.35260E-02  2.34685E-03  6.96687E-05  8.15265E-07  6.73480E-09
  0.700  5.78259E-02 -1.88321E-03 -7.19377E-05 -1.09137E-06 -1.25079E-08  9.35490E-02  2.97755E-03  1.22147E-04  1.94815E-06  2.18886E-08
  0.800  5.80648E-02 -2.28711E-03 -1.16829E-04 -2.32447E-06 -3.46968E-08  9.35679E-02  3.58161E-03  1.95463E-04  4.07926E-06  5.98106E-08
  0.900  5.83229E-02 -2.66039E-03 -1.76905E-04 -4.47694E-06 -8.43219E-08  9.35814E-02  4.12185E-03  2.91050E-04  7.70629E-06  1.42858E-07
  1.000  5.85960E-02 -2.98098E-03 -2.53061E-04 -7.95421E-06 -1.84378E-07  9.35889E-02  4.56491E-03  4.08571E-04  1.33983E-05  3.06284E-07
  1.100  5.88797E-02 -3.22912E-03 -3.45169E-04 -1.32231E-05 -3.69707E-07  9.35908E-02  4.88325E-03  5.45711E-04  2.17441E-05  6.00673E-07
  1.200  5.91692E-02 -3.38828E-03 -4.51956E-04 -2.07842E-05 -6.89441E-07  9.35882E-02  5.05669E-03  6.98145E-04  3.32837E-05  1.09267E-06
  1.300  5.94599E-02 -3.44605E-03 -5.70957E-04 -3.11346E-05 -1.20859E-06  9.35830E-02  5.07351E-03  8.59681E-04  4.84312E-05  1.86314E-06
  1.400  5.97469E-02 -3.39479E-03 -6.98561E-04 -4.47227E-05 -2.00832E-06  9.35776E-02  4.93102E-03  1.02259E-03  6.73963E-05  3.00212E-06
  1.500  6.00257E-02 -3.23201E-03 -8.30139E-04 -6.19005E-05 -3.18457E-06  9.35748E-02  4.63562E-03  1.17807E-03  9.01147E-05  4.60050E-06
  1.600  6.02918E-02 -2.96056E-03 -9.60257E-04 -8.28757E-05 -4.84483E-06  9.35774E-02  4.20224E-03  1.31682E-03  1.16196E-04  6.73856E-06
  1.700  6.05412E-02 -2.58841E-03 -1.08295E-03 -1.07669E-04 -7.10322E-06  9.35880E-02  3.65337E-03  1.42969E-03  1.44898E-04  9.47245E-06
  1.800  6.07703E-02 -2.12833E-03 -1.19207E-03 -1.36083E-04 -1.00741E-05  9.36085E-02  3.01764E-03  1.50831E-03  1.75123E-04  1.28198E-05
  1.900  6.09758E-02 -1.59717E-03 -1.28161E-03 -1.67678E-04 -1.38650E-05  9.36403E-02  2.32805E-03  1.54574E-03  2.05457E-04  1.67462E-05
  2.000  6.11553E-02 -1.01509E-03 -1.34609E-03 -2.01768E-04 -1.85690E-05  9.36835E-02  1.61998E-03  1.53700E-03  2.34226E-04  2.11539E-05
  2.100  6.13072E-02 -4.04474E-04 -1.38088E-03 -2.37432E-04 -2.42588E-05  9.37376E-02  9.29220E-04  1.47948E-03  2.59578E-04  2.58749E-05
  2.200  6.14304E-02  2.11146E-04 -1.38251E-03 -2.73534E-04 -3.09806E-05  9.38007E-02  2.89823E-04  1.37320E-03  2.79594E-04  3.06687E-05
  2.300  6.15249E-02  8.08239E-04 -1.34890E-03 -3.08765E-04 -3.87518E-05  9.38701E-02 -2.67709E-04  1.22098E-03  2.92397E-04  3.52256E-05
  2.400  6.15915E-02  1.36441E-03 -1.27949E-03 -3.41687E-04 -4.75597E-05  9.39422E-02 -7.18104E-04  1.02833E-03  2.96274E-04  3.91757E-05
  2.500  6.16321E-02  1.85947E-03 -1.17538E-03 -3.70790E-04 -5.73630E-05  9.40128E-02 -1.04261E-03  8.03208E-04  2.89790E-04  4.21017E-05
  2.600  6.16489E-02  2.27635E-03 -1.03929E-03 -3.94549E-04 -6.80951E-05  9.40770E-02 -1.22989E-03  5.55659E-04  2.71900E-04  4.35561E-05
  2.700  6.16454E-02  2.60185E-03 -8.75437E-04 -4.11480E-04 -7.96684E-05  9.41300E-02 -1.27645E-03  2.97249E-04  2.42041E-04  4.30801E-05
  2.800  6.16251E-02  2.82724E-03 -6.89452E-04 -4.20198E-04 -9.19793E-05  9.41667E-02 -1.18660E-03  4.04121E-05  2.00215E-04  4.02230E-05
  2.900  6.15920E-02  2.94858E-03 -4.88105E-04 -4.19463E-04 -1.04911E-04  9.41823E-02 -9.71909E-04 -2.02288E-04  1.47046E-04  3.45622E-05
  3.000  6.15501E-02  2.96688E-03 -2.79063E-04 -4.08228E-04 -1.18336E-04  9.41723E-02 -6.50268E-04 -4.18947E-04  8.38158E-05  2.57229E-05
  3.100  6.15033E-02  2.88803E-03 -7.06010E-05 -3.85678E-04 -1.32113E-04  9.41325E-02 -2.44498E-04 -5.99100E-04  1.24725E-05  1.33976E-05
  3.200  6.14544E-02  2.72250E-03  1.28716E-04 -3.51263E-04 -1.46084E-04  9.40592E-02  2.19292E-04 -7.34465E-04 -6.43909E-05 -2.63416E-06
  3.300  6.14058E-02  2.48494E-03  3.10336E-04 -3.04734E-04 -1.60065E-04  9.39488E-02  7.13580E-04 -8.19576E-04 -1.43597E-04 -2.24838E-05
  3.400  6.13583E-02  2.19356E-03  4.66032E-04 -2.46169E-04 -1.73834E-04  9.37982E-02  1.21139E-03 -8.52289E-04 -2.21481E-04 -4.61303E-05
  3.500  6.13112E-02  1.86942E-03  5.88188E-04 -1.76003E-04 -1.87123E-04  9.36041E-02  1.68823E-03 -8.34086E-04 -2.94038E-04 -7.33942E-05
  3.600  6.12618E-02  1.53566E-03  6.70078E-04 -9.50556E-05 -1.99600E-04  9.33633E-02  2.12384E-03 -7.70166E-04 -3.57102E-04 -1.03911E-04
  3.700  6.12058E-02  1.21656E-03  7.06112E-04 -4.55378E-06 -2.10868E-04  9.30721E-02  2.50371E-03 -6.69295E-04 -4.06576E-04 -1.37104E-04
  3.800  6.11365E-02  9.36722E-04  6.92065E-04  9.38505E-05 -2.20455E-04  9.27262E-02  2.82020E-03 -5.43391E-04 -4.38690E-04 -1.72163E-04
  3.900  6.10451E-02  7.20070E-04  6.25275E-04  1.98074E-04 -2.27822E-04  9.23207E-02  3.07314E-03 -4.06879E-04 -4.50271E-04 -2.08034E-04
  4.000  6.09211E-02  5.88998E-04  5.04800E-04  3.05610E-04 -2.32380E-04  9.18499E-02  3.27003E-03 -2.75822E-04 -4.39026E-04 -2.43414E-04
  4.100  6.07522E-02  5.63482E-04  3.31549E-04  4.13558E-04 -2.33507E-04  9.13069E-02  3.42553E-03 -1.66886E-04 -4.03791E-04 -2.76779E-04
  4.200  6.05247E-02  6.60277E-04  1.08348E-04  5.18680E-04 -2.30590E-04  9.06839E-02  3.56061E-03 -9.62130E-05 -3.44735E-04 -3.06422E-04
  4.300  6.02241E-02  8.92198E-04 -1.60044E-04  6.17482E-04 -2.23065E-04  8.99724E-02  3.70105E-03 -7.82548E-05 -2.63499E-04 -3.30521E-04
  4.400  5.98352E-02  1.26752E-03 -4.66993E-04  7.06330E-04 -2.10471E-04  8.91628E-02  3.87567E-03 -1.24681E-04 -1.63237E-04 -3.47234E-04
  4.500  5.93434E-02  1.78951E-03 -8.04122E-04  7.81592E-04 -1.92496E-04  8.82451E-02  4.11420E-03 -2.43431E-04 -4.85464E-05 -3.54809E-04
  4.600  5.87345E-02  2.45613E-03 -1.16154E-03  8.39805E-04 -1.69032E-04  8.72088E-02  4.44513E-03 -4.37991E-04  7.47108E-05 -3.51712E-04
  4.700  5.79958E-02  3.25991E-03 -1.52814E-03  8.77853E-04 -1.40214E-04  8.60435E-02  4.89342E-03 -7.06972E-04  1.99699E-04 -3.36760E-04
  4.800  5.71162E-02  4.18804E-03 -1.89200E-03  8.93159E-04 -1.06451E-04  8.47390E-02  5.47856E-03 -1.04401E-03  3.19000E-04 -3.09235E-04
  4.900  5.60873E-02  5.22268E-03 -2.24084E-03  8.83856E-04 -6.84372E-05  8.32860E-02  6.21282E-03 -1.43805E-03  4.25069E-04 -2.68998E-04
  5.000  5.49032E-02  6.34145E-03 -2.56253E-03  8.48942E-04 -2.71399E-05  8.16761E-02  7.10000E-03 -1.87391E-03  5.10737E-04 -2.16548E-04
  5.100  5.35610E-02  7.51814E-03 -2.84564E-03  7.88397E-04  1.62265E-05  7.99026E-02  8.13471E-03 -2.33322E-03  5.69699E-04 -1.53056E-04
  5.200  5.20614E-02  8.72362E-03 -3.07998E-03  7.03244E-04  6.02552E-05  7.79607E-02  9.30227E-03 -2.79555E-03  5.96970E-04 -8.03419E-05
  5.300  5.04080E-02  9.92684E-03 -3.25706E-03  5.95556E-04  1.03416E-04  7.58480E-02  1.05791E-02 -3.23968E-03  5.89252E-04 -8.03069E-07
  5.400  4.86079E-02  1.10960E-02 -3.37058E-03  4.68401E-04  1.44141E-04  7.35647E-02  1.19339E-02 -3.64496E-03  5.45186E-04  8.27060E-05
  5.500  4.66713E-02  1.21999E-02 -3.41669E-03  3.25715E-04  1.80911E-04  7.11139E-02  1.33292E-02 -3.99259E-03  4.65467E-04  1.67032E-04
  5.600  4.46113E-02  1.32087E-02 -3.39423E-03  1.72129E-04  2.12355E-04  6.85018E-02  1.47228E-02 -4.26675E-03  3.52814E-04  2.48907E-04
  5.700  4.24437E-02  1.40956E-02 -3.30474E-03  1.27401E-05  2.37328E-04  6.57381E-02  1.60710E-02 -4.45548E-03  2.11786E-04  3.25153E-04
  5.800  4.01862E-02  1.48375E-02 -3.15243E-03 -1.47144E-04  2.54981E-04  6.28354E-02  1.73297E-02 -4.55135E-03  4.84785E-05  3.92869E-04
  5.900  3.78585E-02  1.54160E-02 -2.94386E-03 -3.02275E-04  2.64816E-04  5.98097E-02  1.84576E-02 -4.55170E-03 -1.29890E-04  4.49613E-04
  6.000  3.54814E-02  1.58180E-02 -2.68761E-03 -4.47726E-04  2.66711E-04  5.66800E-02  1.94177E-02 -4.45863E-03 -3.15455E-04  4.93536E-04
  6.100  3.30764E-02  1.60359E-02 -2.39381E-03 -5.79135E-04  2.60915E-04  5.34678E-02  2.01793E-02 -4.27861E-03 -5.00207E-04  5.23479E-04
  6.200  3.06653E-02  1.60681E-02 -2.07356E-03 -6.92901E-04  2.48030E-04  5.01968E-02  2.07193E-02 -4.02191E-03 -6.76485E-04  5.39017E-04
  6.300  2.82697E-02  1.59188E-02 -1.73838E-03 -7.86333E-04  2.28964E-04  4.68924E-02  2.10230E-02 -3.70171E-03 -8.37415E-04  5.40446E-04
  6.400  2.59103E-02  1.55970E-02 -1.39963E-03 -8.57730E-04  2.04858E-04  4.35812E-02  2.10845E-02 -3.33320E-03 -9.77264E-04  5.28723E-04
  6.500  2.36066E-02  1.51169E-02 -1.06794E-03 -9.06409E-04  1.77016E-04  4.02901E-02  2.09067E-02 -2.93255E-03 -1.09170E-03  5.05368E-04
  6.600  2.13767E-02  1.44964E-02 -7.52806E-04 -9.32661E-04  1.46818E-04  3.70458E-02  2.05005E-02 -2.51595E-03 -1.17793E-03  4.72327E-04
  6.700  1.92367E-02  1.37565E-02 -4.62196E-04 -9.37655E-04  1.15639E-04  3.38740E-02  1.98840E-02 -2.09871E-03 -1.23471E-03  4.31819E-04
  6.800  1.72003E-02  1.29200E-02 -2.02310E-04 -9.23305E-04  8.47690E-05  3.07988E-02  1.90812E-02 -1.69454E-03 -1.26230E-03  3.86186E-04
  6.900  1.52791E-02  1.20110E-02  2.25424E-05 -8.92098E-04  5.53546E-05  2.78420E-02  1.81204E-02 -1.31497E-03 -1.26227E-03  3.37739E-04
  7.000  1.34819E-02  1.10536E-02  2.09946E-04 -8.46910E-04  2.83465E-05  2.50229E-02  1.70330E-02 -9.69042E-04 -1.23726E-03  2.88634E-04
  7.100  1.18153E-02  1.00711E-02  3.59281E-04 -7.90821E-04  4.47042E-06  2.23575E-02  1.58514E-02 -6.63125E-04 -1.19074E-03  2.40760E-04
  7.200  1.02830E-02  9.08505E-03  4.71528E-04 -7.26940E-04 -1.57870E-05  1.98585E-02  1.46082E-02 -4.00952E-04 -1.12666E-03  1.95674E-04
  7.300  8.88639E-03  8.11500E-03  5.49015E-04 -6.58248E-04 -3.21739E-05  1.75351E-02  1.33345E-02 -1.83811E-04 -1.04924E-03  1.54557E-04
  7.400  7.62455E-03  7.17772E-03  5.95113E-04 -5.87476E-04 -4.46559E-05  1.53929E-02  1.20587E-02 -1.08556E-05 -9.62658E-04  1.18204E-04
  7.500  6.49448E-03  6.28706E-03  6.13924E-04 -5.17009E-04 -5.33863E-05  1.34340E-02  1.08062E-02  1.20509E-04 -8.70843E-04  8.70444E-05
  7.600  5.49137E-03  5.45377E-03  6.09964E-04 -4.48828E-04 -5.86698E-05  1.16574E-02  9.59842E-03  2.14189E-04 -7.77331E-04  6.11785E-05
  7.700  4.60888E-03  4.68556E-03  5.87879E-04 -3.84484E-04 -6.09214E-05  1.00592E-02  8.45259E-03  2.74972E-04 -6.85135E-04  4.04335E-05
  7.800  3.83947E-03  3.98722E-03  5.52195E-04 -3.25101E-04 -6.06256E-05  8.63283E-03  7.38182E-03  3.08110E-04 -5.96684E-04  2.44249E-05
  7.900  3.17467E-03  3.36091E-03  5.07121E-04 -2.71400E-04 -5.82976E-05  7.36984E-03  6.39513E-03  3.18960E-04 -5.13817E-04  1.26218E-05
  8.000  2.60546E-03  2.80648E-03  4.56401E-04 -2.23746E-04 -5.44499E-05  6.26005E-03  5.49777E-03  3.12686E-04 -4.37795E-04  4.40785E-06
  8.100  2.12252E-03  2.32185E-03  4.03223E-04 -1.82201E-04 -4.95643E-05  5.29212E-03  4.69169E-03  2.94033E-04 -3.69365E-04 -8.63643E-07
  8.200  1.71648E-03  1.90341E-03  3.50176E-04 -1.46584E-04 -4.40720E-05  4.45398E-03  3.97600E-03  2.67172E-04 -3.08824E-04 -3.82555E-06
  8.300  1.37818E-03  1.54643E-03  2.99249E-04 -1.16535E-04 -3.83402E-05  3.73325E-03  3.34752E-03  2.35615E-04 -2.56108E-04 -5.06295E-06
  8.400  1.09886E-03  1.24544E-03  2.51864E-04 -9.15707E-05 -3.26655E-05  3.11755E-03  2.80135E-03  2.02191E-04 -2.10873E-04 -5.09053E-06
  8.500  8.70301E-04  9.94533E-04  2.08938E-04 -7.11357E-05 -2.72731E-05  2.59485E-03  2.33134E-03  1.69059E-04 -1.72578E-04 -4.34010E-06
  8.600  6.84912E-04  7.87705E-04  1.70957E-04 -5.46465E-05 -2.23204E-05  2.15368E-03  1.93059E-03  1.37770E-04 -1.40561E-04 -3.15694E-06
  8.700  5.35839E-04  6.19051E-04  1.38055E-04 -4.15246E-05 -1.79046E-05  1.78332E-03  1.59182E-03  1.09341E-04 -1.14097E-04 -1.80284E-06
  8.800  4.16971E-04  4.82969E-04  1.10101E-04 -3.12223E-05 -1.40717E-05  1.47390E-03  1.30772E-03  8.43490E-05 -9.24462E-05 -4.64147E-07
  8.900  3.22953E-04  3.74280E-04  8.67739E-05 -2.32385E-05 -1.08265E-05  1.21651E-03  1.07121E-03  6.30173E-05 -7.48970E-05  7.37343E-07
  9.000  2.49161E-04  2.88312E-04  6.76311E-05 -1.71295E-05 -8.14335E-06  1.00319E-03  8.75619E-04  4.53095E-05 -6.07858E-05  1.73210E-06
  9.100  1.91658E-04  2.20943E-04  5.21667E-05 -1.25121E-05 -5.97562E-06  8.26938E-04  7.14811E-04  3.10069E-05 -4.95150E-05  2.49062E-06
  9.200  1.47144E-04  1.68608E-04  3.98564E-05 -9.06331E-06 -4.26395E-06  6.81676E-04  5.83269E-04  1.97761E-05 -4.05596E-05  3.01207E-06
  9.300  1.12886E-04  1.28276E-04  3.01908E-05 -6.51700E-06 -2.94342E-06  5.62167E-04  4.76120E-04  1.12231E-05 -3.34690E-05  3.31458E-06
  9.400  8.66508E-05  9.74209E-05  2.26979E-05 -4.65805E-06 -1.94890E-06  4.63959E-04  3.89126E-04  4.93535E-06 -2.78638E-05  3.42728E-06
  9.500  6.66393E-05  7.39649E-05  1.69573E-05 -3.31588E-06 -1.21894E-06  3.83298E-04  3.18662E-04  5.10748E-07 -2.34299E-05  3.38426E-06
  9.600  5.14172E-05  5.62286E-05  1.26058E-05 -2.35757E-06 -6.98231E-07  3.17045E-04  2.61660E-04 -2.42266E-06 -1.99112E-05  3.22027E-06
  9.700  3.98552E-05  4.28728E-05  9.33814E-06 -1.68125E-06 -3.39016E-07  2.62594E-04  2.15562E-04 -4.19558E-06 -1.71020E-05  2.96794E-06
  9.800  3.10734E-05  3.28440E-05  6.90429E-06 -1.21000E-06 -1.01443E-07  2.17796E-04  1.78251E-04 -5.09255E-06 -1.48388E-05  2.65617E-06
  9.900  2.43933E-05  2.53232E-05  5.10348E-06 -8.86536E-07  4.66725E-08  1.80885E-04  1.47997E-04 -5.35153E-06 -1.29934E-05  2.30940E-06
 10.000  1.92961E-05  1.96815E-05  3.77771E-06 -6.68721E-07  1.30566E-07  1.50421E-04  1.23394E-04 -5.16651E-06 -1.14667E-05  1.94760E-06
 10.100  1.53888E-05  1.54402E-05  2.80478E-06 -5.25842E-07  1.69483E-07  1.25228E-04  1.03309E-04 -4.69171E-06 -1.01824E-05  1.58647E-06
 10.200  1.23749E-05  1.22387E-05  2.09161E-06 -4.35671E-07  1.77738E-07  1.04351E-04  8.68361E-05 -4.04676E-06 -9.08306E-06  1.23802E-06
 10.300  1.00327E-05  9.80726E-06  1.56826E-06 -3.82174E-07  1.65752E-07  8.70150E-05  7.32527E-05 -3.32188E-06 -8.12568E-06  9.11066E-07
 10.400  8.19655E-06  7.94531E-06  1.18280E-06 -3.53765E-07  1.40983E-07  7.25887E-05  6.19861E-05 -2.58300E-06 -7.27869E-06  6.11785E-07
 10.500  6.74333E-06  6.50474E-06  8.97075E-07 -3.42029E-07  1.08722E-07  6.05609E-05  5.25841E-05 -1.87626E-06 -6.51924E-06  3.44220E-07
 10.600  5.58144E-06  5.37653E-06  6.83334E-07 -3.40793E-07  7.27243E-08  5.05151E-05  4.46900E-05 -1.23200E-06 -5.83110E-06  1.10662E-07
 10.700  4.64284E-06  4.48083E-06  5.21550E-07 -3.45482E-07  3.56844E-08  4.21123E-05  3.80232E-05 -6.68260E-07 -5.20297E-06 -8.80075E-08
 10.800  3.87690E-06  3.75930E-06  3.97415E-07 -3.52678E-07 -4.29510E-10  3.50752E-05  3.23628E-05 -1.93578E-07 -4.62708E-06 -2.52057E-07
 10.900  3.24586E-06  3.16949E-06  3.00797E-07 -3.59829E-07 -3.41528E-08  2.91769E-05  2.75347E-05  1.90561E-07 -4.09820E-06 -3.82683E-07
 11.000  2.72148E-06  2.68059E-06  2.24596E-07 -3.65059E-07 -6.43915E-08  2.42308E-05  2.34014E-05  4.87760E-07 -3.61275E-06 -4.81825E-07
 11.100  2.28254E-06  2.27029E-06  1.63886E-07 -3.67046E-07 -9.03480E-08  2.00832E-05  1.98533E-05  7.05086E-07 -3.16823E-06 -5.52001E-07
 11.200  1.91297E-06  1.92246E-06  1.15274E-07 -3.64940E-07 -1.11486E-07  1.66066E-05  1.68028E-05  8.51764E-07 -2.76273E-06 -5.96157E-07
 11.300  1.60052E-06  1.62538E-06  7.64270E-08 -3.58299E-07 -1.27510E-07  1.36951E-05  1.41787E-05  9.38124E-07 -2.39463E-06 -6.17522E-07
 11.400  1.33572E-06  1.37049E-06  4.57179E-08 -3.47036E-07 -1.38357E-07  1.12601E-05  1.19229E-05  9.74793E-07 -2.06240E-06 -6.19478E-07
 11.500  1.11114E-06  1.15141E-06  2.19671E-08 -3.31362E-07 -1.44177E-07  9.22757E-06  9.98663E-06  9.72080E-07 -1.76443E-06 -6.05431E-07
 11.600  9.20845E-07  9.63261E-07  4.26055E-09 -3.11739E-07 -1.45311E-07  7.53487E-06  8.32884E-06  9.39541E-07 -1.49897E-06 -5.78705E-07
 11.700  7.59979E-07  8.02183E-07 -8.17596E-09 -2.88812E-07 -1.42258E-07  6.12913E-06  6.91418E-06  8.85690E-07 -1.26417E-06 -5.42440E-07
 11.800  6.24484E-07  6.64956E-07 -1.60542E-08 -2.63354E-07 -1.35640E-07  4.96546E-06  5.71183E-06  8.17849E-07 -1.05800E-06 -4.99522E-07
 11.900  5.10892E-07  5.48791E-07 -2.00658E-08 -2.36202E-07 -1.26151E-07  4.00568E-06  4.69467E-06  7.42083E-07 -8.78344E-07 -4.52520E-07
 12.000  4.16187E-07  4.51181E-07 -2.08977E-08 -2.08210E-07 -1.14523E-07  3.21721E-06  3.83856E-06  6.63231E-07 -7.23007E-07 -4.03651E-07
 12.100  3.37712E-07  3.69817E-07 -1.92291E-08 -1.80190E-07 -1.01479E-07  2.57227E-06  3.12198E-06  5.84991E-07 -5.89772E-07 -3.54764E-07
 12.200  2.73105E-07  3.02553E-07 -1.57174E-08 -1.52881E-07 -8.76982E-08  2.04715E-06  2.52568E-06  5.10039E-07 -4.76441E-07 -3.07340E-07
 12.300  2.20267E-07  2.47392E-07 -1.09793E-08 -1.26914E-07 -7.37892E-08  1.62165E-06  2.03245E-06  4.40180E-07 -3.80866E-07 -2.62505E-07
 12.400  1.77332E-07  2.02491E-07 -5.57125E-09 -1.02795E-07 -6.02687E-08  1.27859E-06  1.62699E-06  3.76497E-07 -3.00985E-07 -2.21059E-07
 12.500  1.42654E-07  1.66173E-07  2.64813E-11 -8.08972E-08 -4.75508E-08  1.00343E-06  1.29577E-06  3.19505E-07 -2.34847E-07 -1.83513E-07
 12.600  1.14797E-07  1.36937E-07  5.42109E-09 -6.14597E-08 -3.59429E-08  7.83874E-07  1.02686E-06  2.69285E-07 -1.80633E-07 -1.50129E-07
 12.700  9.25159E-08  1.13465E-07  1.03121E-08 -4.45971E-08 -2.56492E-08  6.09617E-07  8.09897E-07  2.25613E-07 -1.36663E-07 -1.20962E-07
 12.800  7.47503E-08  9.46192E-08  1.44903E-08 -3.03131E-08 -1.67795E-08  4.72039E-07  6.35894E-07  1.88059E-07 -1.01410E-07 -9.59063E-08
 12.900  6.06073E-08  7.94445E-08  1.78317E-08 -1.85187E-08 -9.36146E-09  3.63985E-07  4.97161E-07  1.56072E-07 -7.34984E-08 -7.47352E-08
 13.000  4.93458E-08  6.71508E-08  2.02871E-08 -9.05212E-09 -3.35560E-09  2.79553E-07  3.87168E-07  1.29041E-07 -5.17050E-08 -5.71377E-08
 13.100  4.03597E-08  5.71007E-08  2.18693E-08 -1.69922E-09  1.32918E-09  2.13906E-07  3.00425E-07  1.06352E-07 -3.49532E-08 -4.27515E-08
 13.200  3.31607E-08  4.87905E-08  2.26388E-08  3.78719E-09  4.82024E-09  1.63108E-07  2.32358E-07  8.74087E-08 -2.23067E-08 -3.11902E-08
 13.300  2.73604E-08  4.18309E-08  2.26901E-08  7.66997E-09  7.26713E-09  1.23978E-07  1.79192E-07  7.16625E-08 -1.29605E-08 -2.20644E-08
 13.400  2.26543E-08  3.59270E-08  2.21378E-08  1.02129E-08  8.82942E-09  9.39645E-08  1.37838E-07  5.86189E-08 -6.23048E-09 -1.49987E-08
 13.500  1.88063E-08  3.08597E-08  2.11059E-08  1.16693E-08  9.66660E-09  7.10339E-08  1.05794E-07  4.78437E-08 -1.54259E-09 -9.64313E-09
 13.600  1.56351E-08  2.64688E-08  1.97178E-08  1.22728E-08  9.93048E-09  5.35777E-08  8.10444E-08  3.89617E-08  1.57878E-09 -5.68087E-09
 13.700  1.30027E-08  2.26381E-08  1.80891E-08  1.22325E-08  9.75967E-09  4.03318E-08  6.19839E-08  3.16537E-08  3.52234E-09 -2.83223E-09
 13.800  1.08041E-08  1.92836E-08  1.63231E-08  1.17291E-08  9.27622E-09  3.03092E-08  4.73396E-08  2.56504E-08  4.60111E-09 -8.55990E-10
 13.900  8.95934E-09  1.63434E-08  1.45076E-08  1.09142E-08  8.58389E-09  2.27442E-08  3.61104E-08  2.07270E-08  5.06324E-09  4.51383E-10
 14.000  7.40724E-09  1.37707E-08  1.27137E-08  9.91108E-09  7.76793E-09  1.70460E-08  2.75135E-08  1.66961E-08  5.10202E-09  1.25805E-09
 14.100  6.10015E-09  1.15281E-08  1.09956E-08  8.81646E-09  6.89586E-09  1.27612E-08  2.09402E-08  1.34027E-08  4.86505E-09  1.70006E-09
 14.200  5.00031E-09  9.58376E-09  9.39239E-09  7.70342E-09  6.01896E-09  9.54372E-09  1.59191E-08  1.07182E-08  4.46256E-09  1.88516E-09
 14.300  4.07708E-09  7.90940E-09  7.92911E-09  6.62455E-09  5.17433E-09  7.13040E-09  1.20870E-08  8.53605E-09  3.97463E-09  1.89681E-09
 14.400  3.30503E-09  6.47845E-09  6.61927E-09  5.61534E-09  4.38700E-09  5.32186E-09  9.16441E-09  6.76801E-09  3.45756E-09  1.79809E-09
 14.500  2.66256E-09  5.26562E-09  5.46698E-09  4.69745E-09  3.67220E-09  3.96759E-09  6.93726E-09  5.34077E-09  2.94918E-09  1.63542E-09
 14.600  2.13099E-09  4.24654E-09  4.46916E-09  3.88177E-09  3.03742E-09  2.95419E-09  5.24151E-09  4.19343E-09  2.47332E-09  1.44190E-09
 14.700  1.69403E-09  3.39789E-09  3.61753E-09  3.17119E-09  2.48436E-09  2.19640E-09  3.95172E-09  3.27530E-09  2.04350E-09  1.24017E-09
 14.800  1.33735E-09  2.69754E-09  2.90039E-09  2.56283E-09  2.01055E-09  1.63021E-09  2.97197E-09  2.54423E-09  1.66586E-09  1.04497E-09
 14.900  1.04834E-09  2.12482E-09  2.30406E-09  2.05003E-09  1.61076E-09  1.20758E-09  2.22892E-09  1.96520E-09  1.34146E-09  8.65129E-10
 15.000  8.15940E-10  1.66070E-09  1.81403E-09  1.62386E-09  1.27805E-09  8.92492E-10  1.66648E-09  1.50915E-09  1.06805E-09  7.05258E-10
 15.100  6.30519E-10  1.28796E-09  1.41585E-09  1.27426E-09  1.00470E-09  6.57930E-10  1.24173E-09  1.15208E-09  8.41402E-10  5.67029E-10
 15.200  4.83745E-10  9.91265E-10  1.09576E-09  9.90929E-10  7.82772E-10  4.83627E-10  9.21833E-10  8.74190E-10  6.56256E-10  4.50189E-10
 15.300  3.68484E-10  7.57158E-10  8.41070E-10  7.63898E-10  6.04610E-10  3.54379E-10  6.81639E-10  6.59280E-10  5.07016E-10  3.53303E-10
 15.400  2.78685E-10  5.74026E-10  6.40396E-10  5.83924E-10  4.63095E-10  2.58778E-10  5.01909E-10  4.94137E-10  3.88181E-10  2.74287E-10
 15.500  2.09277E-10  4.31980E-10  4.83776E-10  4.42701E-10  3.51821E-10  1.88267E-10  3.67929E-10  3.68058E-10  2.94624E-10  2.10792E-10
 15.600  1.56050E-10  3.22719E-10  3.62653E-10  3.32961E-10  2.65168E-10  1.36426E-10  2.68462E-10  2.72437E-10  2.21748E-10  1.60447E-10
 15.700  1.15548E-10  2.39360E-10  2.69809E-10  2.48479E-10  1.98313E-10  9.84455E-11  1.94941E-10  2.00395E-10  1.65549E-10  1.21013E-10
 15.800  8.49659E-11  1.76274E-10  1.99253E-10  1.84027E-10  1.47193E-10  7.07266E-11  1.40850E-10  1.46479E-10  1.22623E-10  9.04744E-11
 15.900  6.20498E-11  1.28906E-10  1.46080E-10  1.35281E-10  1.08443E-10  5.05796E-11  1.01247E-10  1.06397E-10  9.01346E-11  6.70749E-11
 16.000  4.50069E-11  9.36145E-11  1.06334E-10  9.87235E-11  7.93147E-11  3.60001E-11  7.23993E-11  7.68000E-11  6.57604E-11  4.93244E-11
 16.100  3.24257E-11  6.75207E-11  7.68592E-11  7.15311E-11  5.75976E-11  2.54979E-11  5.14951E-11  5.50899E-11  4.76283E-11  3.59866E-11
 16.200  2.32061E-11  4.83718E-11  5.51714E-11  5.14654E-11  4.15344E-11  1.79691E-11  3.64286E-11  3.92710E-11  3.42500E-11  2.60552E-11
 16.300  1.64985E-11  3.44226E-11  3.93341E-11  3.67733E-11  2.97450E-11  1.25985E-11  2.56294E-11  2.78210E-11  2.44575E-11  1.87246E-11
 16.400  1.16533E-11  2.43347E-11  2.78552E-11  2.60973E-11  2.11578E-11  8.78714E-12  1.79319E-11  1.95879E-11  1.73450E-11  1.33589E-11
 16.500  8.17797E-12  1.70912E-11  1.95958E-11  1.83971E-11  1.49493E-11  6.09647E-12  1.24765E-11  1.37066E-11  1.22179E-11  9.46331E-12
 16.600  5.70243E-12  1.19266E-11  1.36955E-11  1.28835E-11  1.04931E-11  4.20713E-12  8.63225E-12  9.53270E-12  8.54929E-12  6.65716E-12
 16.700  3.95113E-12  8.26962E-12  9.51020E-12  8.96374E-12  7.31748E-12  2.88767E-12  5.93895E-12  6.58962E-12  5.94312E-12  4.65124E-12
 16.800  2.72055E-12  5.69788E-12  6.56189E-12  6.19661E-12  5.07024E-12  1.97128E-12  4.06298E-12  4.52772E-12  4.10480E-12  3.22801E-12
 16.900  1.86163E-12  3.90145E-12  4.49914E-12  4.25659E-12  3.49091E-12  1.33837E-12  2.76392E-12  3.09237E-12  2.81709E-12  2.22554E-12
 17.000  1.26607E-12  2.65493E-12  3.06564E-12  2.90567E-12  2.38850E-12  9.03692E-13  1.86962E-12  2.09948E-12  1.92120E-12  1.52446E-12
 17.100  8.55801E-13  1.79565E-12  2.07604E-12  1.97123E-12  1.62412E-12  6.06843E-13  1.25756E-12  1.41696E-12  1.30210E-12  1.03757E-12
 17.200  5.74995E-13  1.20713E-12  1.39733E-12  1.32912E-12  1.09761E-12  4.05266E-13  8.41114E-13  9.50709E-13  8.77097E-13  7.01742E-13
 17.300  3.84021E-13  8.06640E-13  9.34842E-13  8.90751E-13  7.37290E-13  2.69160E-13  5.59420E-13  6.34158E-13  5.87231E-13  4.71665E-13
 17.400  2.54958E-13  5.35820E-13  6.21697E-13  5.93390E-13  4.92287E-13  1.77783E-13  3.69986E-13  4.20556E-13  3.90802E-13  3.15079E-13
 17.500  1.68278E-13  3.53831E-13  4.11004E-13  3.92952E-13  3.26748E-13  1.16783E-13  2.43334E-13  2.77297E-13  2.58535E-13  2.09202E-13
 17.600  1.10420E-13  2.32291E-13  2.70123E-13  2.58690E-13  2.15598E-13  7.62931E-14  1.59148E-13  1.81793E-13  1.70027E-13  1.38070E-13
 17.700  7.20376E-14  1.51618E-13  1.76502E-13  1.69311E-13  1.41429E-13  4.95691E-14  1.03511E-13  1.18505E-13  1.11168E-13  9.05844E-14
 17.800  4.67278E-14  9.83941E-14  1.14665E-13  1.10173E-13  9.22388E-14  3.20304E-14  6.69529E-14  7.68133E-14  7.22646E-14  5.90813E-14
 17.900  3.01381E-14  6.34906E-14  7.40669E-14  7.12806E-14  5.98124E-14  2.05849E-14  4.30686E-14  4.95105E-14  4.67065E-14  3.83102E-14
 18.000  1.93287E-14  4.07371E-14  4.75721E-14  4.58559E-14  3.85649E-14  1.31576E-14  2.75532E-14  3.17345E-14  3.00163E-14  2.46985E-14
 18.100  1.23268E-14  2.59913E-14  3.03831E-14  2.93336E-14  2.47249E-14  8.36479E-15  1.75312E-14  2.02282E-14  1.91814E-14  1.58322E-14
 18.200  7.81766E-15  1.64909E-14  1.92967E-14  1.86595E-14  1.57630E-14  5.28922E-15  1.10941E-14  1.28229E-14  1.21891E-14  1.00913E-14
 18.300  4.93061E-15  1.04053E-14  1.21877E-14  1.18037E-14  9.99355E-15  3.32657E-15  6.98271E-15  8.08414E-15  7.70273E-15  6.39597E-15
 18.400  3.09269E-15  6.52939E-15  7.65536E-15  7.42565E-15  6.30080E-15  2.08104E-15  4.37138E-15  5.06892E-15  4.84082E-15  4.03126E-15
 18.500  1.92931E-15  4.07490E-15  4.78224E-15  4.64588E-15  3.95078E-15  1.29494E-15  2.72199E-15  3.16114E-15  3.02559E-15  2.52679E-15
 18.600  1.19704E-15  2.52932E-15  2.97121E-15  2.89091E-15  2.46375E-15  8.01524E-16  1.68593E-15  1.96080E-15  1.88077E-15  1.57509E-15
 18.700  7.38715E-16  1.56152E-15  1.83607E-15  1.78915E-15  1.52811E-15  4.93504E-16  1.03870E-15  1.20975E-15  1.16281E-15  9.76496E-16
 18.800  4.53437E-16  9.58873E-16  1.12852E-15  1.10134E-15  9.42685E-16  3.02261E-16  6.36566E-16  7.42413E-16  7.15064E-16  6.02112E-16
 18.900  2.76849E-16  5.85679E-16  6.89945E-16  6.74334E-16  5.78429E-16  1.84162E-16  3.88076E-16  4.53205E-16  4.37381E-16  3.69269E-16
 19.000  1.68140E-16  3.55842E-16  4.19578E-16  4.10693E-16  3.53036E-16  1.11623E-16  2.35352E-16  2.75205E-16  2.66113E-16  2.25259E-16
 19.100  1.01580E-16  2.15063E-16  2.53816E-16  2.48807E-16  2.14331E-16  6.73060E-17  1.41990E-16  1.66242E-16  1.61056E-16  1.36681E-16
 19.200  6.10485E-17  1.29300E-16  1.52738E-16  1.49943E-16  1.29438E-16  4.03749E-17  8.52212E-17  9.98986E-17  9.69634E-17  8.24967E-17
 19.300  3.64988E-17  7.73336E-17  9.14337E-17  8.98912E-17  7.77607E-17  2.40954E-17  5.08858E-17  5.97208E-17  5.80722E-17  4.95312E-17
 19.400  2.17086E-17  4.60135E-17  5.44518E-17  5.36105E-17  4.64723E-17  1.43065E-17  3.02284E-17  3.55181E-17  3.45997E-17  2.95834E-17
 19.500  1.28454E-17  2.72373E-17  3.22608E-17  3.18079E-17  2.76296E-17  8.45115E-18  1.78654E-17  2.10156E-17  2.05083E-17  1.75775E-17
 19.600  7.56194E-18  1.60403E-17  1.90154E-17  1.87751E-17  1.63423E-17  4.96699E-18  1.05051E-17  1.23712E-17  1.20935E-17  1.03901E-17
 19.700  4.42898E-18  9.39817E-18  1.11511E-17  1.10257E-17  9.61654E-18  2.90452E-18  6.14593E-18  7.24557E-18  7.09501E-18  6.11003E-18
 19.800  2.58088E-18  5.47857E-18  6.50605E-18  6.44194E-18  5.62995E-18  1.68993E-18  3.57752E-18  4.22214E-18  4.14134E-18  3.57471E-18
 19.900  1.49636E-18  3.17756E-18  3.77674E-18  3.74474E-18  3.27929E-18  9.78325E-19  2.07202E-18  2.44794E-18  2.40506E-18  2.08077E-18
  67 176 200   0.100
  0.000  5.71001E-02 -3.02559E-16 -3.95517E-16 -7.88084E-16  2.57488E-16  9.34108E-02 -4.65475E-16 -7.49401E-16 -7.50556E-16 -1.05856E-15
  0.100  5.71146E-02 -4.76597E-05 -3.54988E-08 -1.18311E-11 -4.63479E-15  9.34231E-02  8.10210E-05  7.05551E-08  2.67787E-11  7.48146E-15
  0.200  5.71578E-02 -1.88065E-04 -5.62609E-07 -7.50615E-10 -7.20437E-13  9.34591E-02  3.19163E-04  1.11541E-06  1.69500E-09  1.60950E-12
  0.300  5.72295E-02 -4.13619E-04 -2.80337E-06 -8.42685E-09 -1.81909E-11  9.35161E-02  6.99971E-04  5.53470E-06  1.89529E-08  4.05201E-11
  0.400  5.73289E-02 -7.12081E-04 -8.66481E-06 -4.63952E-08 -1.77880E-10  9.35898E-02  1.20035E-03  1.70075E-05  1.03765E-07  3.94656E-10
  0.500  5.74550E-02 -1.06717E-03 -2.05547E-05 -1.72415E-07 -1.03177E-09  9.36749E-02  1.78997E-03  4.00441E-05  3.82862E-07  2.27717E-09
  0.600  5.76065E-02 -1.45937E-03 -4.11434E-05 -4.98617E-07 -4.29135E-09  9.37652E-02  2.43319E-03  7.94250E-05  1.09761E-06  9.41075E-09
  0.700  5.77817E-02 -1.86691E-03 -7.30901E-05 -1.21061E-06 -1.41621E-08  9.38545E-02  3.09116E-03  1.39582E-04  2.63773E-06  3.08227E-08
  0.800  5.79787E-02 -2.26686E-03 -1.18755E-04 -2.58196E-06 -3.93938E-08  9.39369E-02  3.72421E-03  2.23982E-04  5.55996E-06  8.49935E-08
  0.900  5.81950E-02 -2.63626E-03 -1.79917E-04 -4.98067E-06 -9.60359E-08  9.40076E-02  4.29422E-03  3.34585E-04  1.05842E-05  2.05167E-07
  1.000  5.84277E-02 -2.95331E-03 -2.57527E-04 -8.86482E-06 -2.10725E-07  9.40627E-02  4.76690E-03  4.71409E-04  1.85633E-05  4.45251E-07
  1.100  5.86738E-02 -3.19848E-03 -3.51511E-04 -1.47660E-05 -4.24167E-07  9.41001E-02  5.11371E-03  6.32269E-04  3.04250E-05  8.85401E-07
  1.200  5.89296E-02 -3.35547E-03 -4.60633E-04 -2.32600E-05 -7.94336E-07  9.41193E-02  5.31355E-03  8.12706E-04  4.70908E-05  1.63613E-06
  1.300  5.91913E-02 -3.41212E-03 -5.82457E-04 -3.49269E-05 -1.39884E-06  9.41212E-02  5.35385E-03  1.00610E-03  6.93771E-05  2.83974E-06
  1.400  5.94547E-02 -3.36094E-03 -7.13376E-04 -5.03018E-05 -2.33588E-06  9.41086E-02  5.23119E-03  1.20401E-03  9.78892E-05  4.66808E-06
  1.500  5.97154E-02 -3.19959E-03 -8.48744E-04 -6.98218E-05 -3.72340E-06  9.40849E-02  4.95137E-03  1.39662E-03  1.32919E-04  7.31584E-06
  1.600  5.99689E-02 -2.93095E-03 -9.83079E-04 -9.37718E-05 -5.69604E-06  9.40548E-02  4.52895E-03  1.57339E-03  1.74355E-04  1.09894E-05
  1.700  6.02110E-02 -2.56297E-03 -1.11034E-03 -1.22236E-04 -8.39996E-06  9.40231E-02  3.98618E-03  1.72372E-03  2.21622E-04  1.58913E-05
  1.800  6.04374E-02 -2.10832E-03 -1.22426E-03 -1.55058E-04 -1.19858E-05  9.39944E-02  3.35168E-03  1.83770E-03  2.73645E-04  2.22022E-05
  1.900  6.06442E-02 -1.58367E-03 -1.31869E-03 -1.91814E-04 -1.65999E-05  9.39731E-02  2.65865E-03  1.90680E-03  3.28856E-04  3.00600E-05
  2.000  6.08282E-02 -1.00891E-03 -1.38795E-03 -2.31800E-04 -2.23754E-05  9.39626E-02  1.94285E-03  1.92450E-03  3.85234E-04  3.95402E-05
  2.100  6.09867E-02 -4.06127E-04 -1.42721E-03 -2.74040E-04 -2.94230E-05  9.39650E-02  1.24060E-03  1.88682E-03  4.40382E-04  5.06371E-05
  2.200  6.11177E-02  2.01479E-04 -1.43277E-03 -3.17306E-04 -3.78226E-05  9.39815E-02  5.86637E-04  1.79265E-03  4.91636E-04  6.32489E-05
  2.300  6.12204E-02  7.90724E-04 -1.40227E-03 -3.60158E-04 -4.76175E-05  9.40116E-02  1.22177E-05  1.64397E-03  5.36201E-04  7.71663E-05
  2.400  6.12948E-02  1.33955E-03 -1.33495E-03 -4.00990E-04 -5.88098E-05  9.40534E-02 -4.56561E-04  1.44581E-03  5.71297E-04  9.20672E-05
  2.500  6.13419E-02  1.82806E-03 -1.23166E-03 -4.38092E-04 -7.13595E-05  9.41039E-02 -8.00115E-04  1.20608E-03  5.94329E-04  1.07516E-04
  2.600  6.13636E-02  2.23942E-03 -1.09490E-03 -4.69712E-04 -8.51852E-05  9.41591E-02 -1.00631E-03  9.35157E-04  6.03044E-04  1.22969E-04
  2.700  6.13628E-02  2.56062E-03 -9.28760E-04 -4.94123E-04 -1.00167E-04  9.42137E-02 -1.07090E-03  6.45344E-04  5.95691E-04  1.37784E-04
  2.800  6.13430E-02  2.78303E-03 -7.38769E-04 -5.09686E-04 -1.16150E-04  9.42622E-02 -9.97570E-04  3.50165E-04  5.71168E-04  1.51235E-04
  2.900  6.13083E-02  2.90274E-03 -5.31680E-04 -5.14909E-04 -1.32951E-04  9.42984E-02 -7.97362E-04  6.35658E-05  5.29148E-04  1.62531E-04
  3.000  6.12627E-02  2.92073E-03 -3.15224E-04 -5.08507E-04 -1.50359E-04  9.43162E-02 -4.87775E-04 -2.00947E-04  4.70170E-04  1.70842E-04
  3.100  6.12103E-02  2.84278E-03 -9.78203E-05 -4.89443E-04 -1.68137E-04  9.43094E-02 -9.14014E-05 -4.31176E-04  3.95706E-04  1.75327E-04
  3.200  6.11547E-02  2.67921E-03  1.11734E-04 -4.56981E-04 -1.86026E-04  9.42718E-02  3.65732E-04 -6.17066E-04  3.08173E-04  1.75174E-04
  3.300  6.10984E-02  2.44450E-03  3.04582E-04 -4.10717E-04 -2.03734E-04  9.41976E-02  8.56033E-04 -7.51435E-04  2.10902E-04  1.69637E-04
  3.400  6.10430E-02  2.15664E-03  4.72124E-04 -3.50620E-04 -2.20938E-04  9.40814E-02  1.35232E-03 -8.30556E-04  1.08045E-04  1.58089E-04
  3.500  6.09883E-02  1.83649E-03  6.06324E-04 -2.77064E-04 -2.37272E-04  9.39179E-02  1.82974E-03 -8.54542E-04  4.42238E-06  1.40078E-04
  3.600  6.09324E-02  1.50696E-03  6.99998E-04 -1.90852E-04 -2.52324E-04  9.37022E-02  2.26761E-03 -8.27498E-04 -9.46885E-05  1.15384E-04
  3.700  6.08715E-02  1.19214E-03  7.47091E-04 -9.32404E-05 -2.65629E-04  9.34292E-02  2.65087E-03 -7.57407E-04 -1.83826E-04  8.40747E-05
  3.800  6.07994E-02  9.16440E-04  7.42916E-04  1.40436E-05 -2.76668E-04  9.30942E-02  2.97127E-03 -6.55748E-04 -2.57657E-04  4.65619E-05
  3.900  6.07081E-02  7.03607E-04  6.84370E-04  1.28803E-04 -2.84877E-04  9.26921E-02  3.22801E-03 -5.36852E-04 -3.11324E-04  3.63925E-06
  4.000  6.05875E-02  5.75878E-04  5.70115E-04  2.48385E-04 -2.89658E-04  9.22175E-02  3.42795E-03 -4.17025E-04 -3.40798E-04 -4.34954E-05
  4.100  6.04256E-02  5.53082E-04  4.00711E-04  3.69713E-04 -2.90400E-04  9.16649E-02  3.58514E-03 -3.13494E-04 -3.43211E-04 -9.32440E-05
  4.200  6.02090E-02  6.51837E-04  1.78699E-04  4.89349E-04 -2.86516E-04  9.10280E-02  3.71999E-03 -2.43232E-04 -3.17144E-04 -1.43643E-04
  4.300  5.99235E-02  8.84833E-04 -9.13806E-05  6.03585E-04 -2.77475E-04  9.03001E-02  3.85781E-03 -2.21750E-04 -2.62838E-04 -1.92430E-04
  4.400  5.95541E-02  1.26022E-03 -4.03042E-04  7.08557E-04 -2.62853E-04  8.94738E-02  4.02705E-03 -2.61948E-04 -1.82301E-04 -2.37150E-04
  4.500  5.90859E-02  1.78117E-03 -7.47990E-04  8.00393E-04 -2.42375E-04  8.85412E-02  4.25721E-03 -3.73103E-04 -7.92992E-05 -2.75280E-04
  4.600  5.85047E-02  2.44552E-03 -1.11634E-03  8.75382E-04 -2.15967E-04  8.74940E-02  4.57668E-03 -5.60082E-04  4.07821E-05 -3.04392E-04
  4.700  5.77972E-02  3.24573E-03 -1.49693E-03  9.30154E-04 -1.83787E-04  8.63236E-02  5.01047E-03 -8.22850E-04  1.71211E-04 -3.22312E-04
  4.800  5.69520E-02  4.16892E-03 -1.87773E-03  9.61870E-04 -1.46256E-04  8.50212E-02  5.57823E-03 -1.15632E-03  3.04289E-04 -3.27291E-04
  4.900  5.59599E-02  5.19722E-03 -2.24625E-03  9.68401E-04 -1.04073E-04  8.35784E-02  6.29254E-03 -1.55053E-03  4.31829E-04 -3.18148E-04
  5.000  5.48144E-02  6.30822E-03 -2.59014E-03  9.48475E-04 -5.82032E-05  8.19872E-02  7.15761E-03 -1.99124E-03  5.45682E-04 -2.94393E-04
  5.100  5.35117E-02  7.47577E-03 -2.89764E-03  9.01806E-04 -9.85354E-06  8.02406E-02  8.16853E-03 -2.46073E-03  6.38281E-04 -2.56294E-04
  5.200  5.20513E-02  8.67080E-03 -3.15820E-03  8.29154E-04  3.95721E-05  7.83330E-02  9.31114E-03 -2.93894E-03  7.03160E-04 -2.04907E-04
  5.300  5.04362E-02  9.86240E-03 -3.36292E-03  7.32345E-04  8.85384E-05  7.62606E-02  1.05625E-02 -3.40475E-03  7.35394E-04 -1.42033E-04
  5.400  4.86723E-02  1.10190E-02 -3.50498E-03  6.14216E-04  1.35456E-04  7.40218E-02  1.18917E-02 -3.83726E-03  7.31935E-04 -7.01309E-05
  5.500  4.67691E-02  1.21094E-02 -3.58003E-03  4.78506E-04  1.78767E-04  7.16177E-02  1.32618E-02 -4.21714E-03  6.91809E-04  7.82776E-06
  5.600  4.47388E-02  1.31044E-02 -3.58631E-03  3.29687E-04  2.17033E-04  6.90524E-02  1.46312E-02 -4.52774E-03  6.16166E-04  8.85402E-05
  5.700  4.25966E-02  1.39772E-02 -3.52479E-03  1.72750E-04  2.49016E-04  6.63330E-02  1.59565E-02 -4.75606E-03  5.08169E-04  1.68579E-04
  5.800  4.03596E-02  1.47051E-02 -3.39904E-03  1.29540E-05  2.73753E-04  6.34704E-02  1.71940E-02 -4.89344E-03  3.72750E-04  2.44604E-04
  5.900  3.80474E-02  1.52701E-02 -3.21503E-03 -1.44432E-04  2.90605E-04  6.04787E-02  1.83026E-02 -4.93585E-03  2.16245E-04  3.13570E-04
  6.000  3.56804E-02  1.56593E-02 -2.98077E-03 -2.94395E-04  2.99291E-04  5.73753E-02  1.92455E-02 -4.88398E-03  4.59446E-05  3.72899E-04
  6.100  3.32805E-02  1.58657E-02 -2.70586E-03 -4.32411E-04  2.99898E-04  5.41806E-02  1.99922E-02 -4.74291E-03 -1.30402E-04  4.20623E-04
  6.200  3.08697E-02  1.58879E-02 -2.40097E-03 -5.54657E-04  2.92862E-04  5.09178E-02  2.05195E-02 -4.52157E-03 -3.05083E-04  4.55466E-04
  6.300  2.84698E-02  1.57301E-02 -2.07728E-03 -6.58159E-04  2.78934E-04  4.76122E-02  2.08129E-02 -4.23200E-03 -4.70889E-04  4.76881E-04
  6.400  2.61022E-02  1.54020E-02 -1.74589E-03 -7.40890E-04  2.59122E-04  4.42906E-02  2.08665E-02 -3.88842E-03 -6.21510E-04  4.85033E-04
  6.500  2.37872E-02  1.49176E-02 -1.41734E-03 -8.01808E-04  2.34621E-04  4.09805E-02  2.06831E-02 -3.50625E-03 -7.51839E-04  4.80729E-04
  6.600  2.15433E-02  1.42950E-02 -1.10113E-03 -8.40830E-04  2.06739E-04  3.77097E-02  2.02736E-02 -3.10122E-03 -8.58167E-04  4.65314E-04
  6.700  1.93875E-02  1.35551E-02 -8.05379E-04 -8.58756E-04  1.76815E-04  3.45049E-02  1.96560E-02 -2.68844E-03 -9.38272E-04  4.40539E-04
  6.800  1.73342E-02  1.27209E-02 -5.36544E-04 -8.57149E-04  1.46147E-04  3.13916E-02  1.88541E-02 -2.28168E-03 -9.91393E-04  4.08412E-04
  6.900  1.53957E-02  1.18163E-02 -2.99304E-04 -8.38177E-04  1.15925E-04  2.83932E-02  1.78963E-02 -1.89279E-03 -1.01811E-03  3.71053E-04
  7.000  1.35814E-02  1.08652E-02 -9.65254E-05 -8.04446E-04  8.71835E-05  2.55300E-02  1.68137E-02 -1.53134E-03 -1.02018E-03  3.30554E-04
  7.100  1.18983E-02  9.89066E-03  7.06529E-05 -7.58819E-04  6.07574E-05  2.28196E-02  1.56388E-02 -1.20440E-03 -1.00024E-03  2.88862E-04
  7.200  1.03505E-02  8.91406E-03  2.02656E-04 -7.04248E-04  3.72680E-05  2.02757E-02  1.44037E-02 -9.16516E-04 -9.61602E-04  2.47686E-04
  7.300  8.93977E-03  7.95459E-03  3.01238E-04 -6.43618E-04  1.71155E-05  1.79086E-02  1.31394E-02 -6.69905E-04 -9.07955E-04  2.08434E-04
  7.400  7.66536E-03  7.02878E-03  3.69210E-04 -5.79624E-04  4.89115E-07  1.57245E-02  1.18743E-02 -4.64663E-04 -8.43104E-04  1.72181E-04
  7.500  6.52439E-03  6.15015E-03  4.10140E-04 -5.14666E-04 -1.26118E-05  1.37264E-02  1.06333E-02 -2.99137E-04 -7.70759E-04  1.39667E-04
  7.600  5.51206E-03  5.32918E-03  4.28061E-04 -4.50787E-04 -2.23481E-05  1.19136E-02  9.43763E-03 -1.70313E-04 -6.94352E-04  1.11306E-04
  7.700  4.62198E-03  4.57330E-03  4.27196E-04 -3.89636E-04 -2.90058E-05  1.02824E-02  8.30438E-03 -7.42248E-05 -6.16906E-04  8.72347E-05
  7.800  3.84649E-03  3.88707E-03  4.11723E-04 -3.32460E-04 -3.29595E-05  8.82640E-03  7.24637E-03 -6.34084E-06 -5.40953E-04  6.73506E-05
  7.900  3.17701E-03  3.27243E-03  3.85576E-04 -2.80121E-04 -3.46361E-05  7.53711E-03  6.27238E-03  3.80888E-05 -4.68495E-04  5.13730E-05
  8.000  2.60434E-03  2.72908E-03  3.52302E-04 -2.33130E-04 -3.44825E-05  6.40422E-03  5.38747E-03  6.37408E-05 -4.01007E-04  3.88961E-05
  8.100  2.11897E-03  2.25478E-03  3.14965E-04 -1.91692E-04 -3.29371E-05  5.41619E-03  4.59339E-03  7.49930E-05 -3.39468E-04  2.94415E-05
  8.200  1.71135E-03  1.84585E-03  2.76095E-04 -1.55765E-04 -3.04083E-05  4.56070E-03  3.88911E-03  7.57653E-05 -2.84419E-04  2.25033E-05
  8.300  1.37217E-03  1.49749E-03  2.37680E-04 -1.25110E-04 -2.72581E-05  3.82508E-03  3.27133E-03  6.94239E-05 -2.36033E-04  1.75847E-05
  8.400  1.09250E-03  1.20421E-03  2.01194E-04 -9.93506E-05 -2.37932E-05  3.19668E-03  2.73506E-03  5.87413E-05 -1.94186E-04  1.42254E-05
  8.500  8.63967E-04  9.60122E-04  1.67639E-04 -7.80198E-05 -2.02601E-05  2.66317E-03  2.27411E-03  4.59015E-05 -1.58534E-04  1.20190E-05
  8.600  6.78883E-04  7.59233E-04  1.37612E-04 -6.06040E-05 -1.68461E-05  2.21282E-03  1.88153E-03  3.25397E-05 -1.28584E-04  1.06232E-05
  8.700  5.30288E-04  5.95696E-04  1.11382E-04 -4.65772E-05 -1.36828E-05  1.83465E-03  1.55007E-03  1.98050E-05 -1.03750E-04  9.76209E-06
  8.800  4.11996E-04  4.63968E-04  8.89568E-05 -3.54281E-05 -1.08533E-05  1.51859E-03  1.27243E-03  8.43634E-06 -8.34101E-05  9.22322E-06
  8.900  3.18593E-04  3.58941E-04  7.01587E-05 -2.66788E-05 -8.39932E-06  1.25552E-03  1.04157E-03 -1.15756E-06 -6.69389E-05  8.85161E-06
  9.000  2.45411E-04  2.76021E-04  5.46846E-05 -1.98975E-05 -6.33063E-06  1.03733E-03  8.50869E-04 -8.82037E-06 -5.37398E-05  8.54100E-06
  9.100  1.88487E-04  2.11161E-04  4.21597E-05 -1.47043E-05 -4.63288E-06  8.56877E-04  6.94268E-04 -1.45774E-05 -4.32631E-05  8.22452E-06
  9.200  1.44501E-04  1.60868E-04  3.21798E-05 -1.07734E-05 -3.27552E-06  7.07969E-04  5.66313E-04 -1.85750E-05 -3.50170E-05  7.86547E-06
  9.300  1.10710E-04  1.22185E-04  2.43428E-05 -7.83147E-06 -2.21839E-06  5.85277E-04  4.62198E-04 -2.10309E-05 -2.85723E-05  7.44892E-06
  9.400  8.48815E-05  9.26470E-05  1.82710E-05 -5.65389E-06 -1.41710E-06  4.84275E-04  3.77756E-04 -2.21960E-05 -2.35628E-05  6.97458E-06
  9.500  6.52152E-05  7.02353E-05  1.36244E-05 -4.05940E-06 -8.27113E-07  4.01150E-04  3.09423E-04 -2.23266E-05 -1.96813E-05  6.45108E-06
  9.600  5.02819E-05  5.33207E-05  1.01077E-05 -2.90437E-06 -4.06665E-07  3.32715E-04  2.54192E-04 -2.16657E-05 -1.66752E-05  5.89165E-06
  9.700  3.89581E-05  4.06074E-05  7.47183E-06 -2.07684E-06 -1.18513E-07  2.76327E-04  2.09559E-04 -2.04316E-05 -1.43398E-05  5.31115E-06
  9.800  3.03703E-05  3.10781E-05  5.51245E-06 -1.49086E-06  6.91512E-08  2.29806E-04  1.73453E-04 -1.88122E-05 -1.25116E-05  4.72403E-06
  9.900  2.38466E-05  2.39444E-05  4.06545E-06 -1.08139E-06  1.82487E-07  1.91363E-04  1.44186E-04 -1.69633E-05 -1.10621E-05  4.14325E-06
 10.000  1.88746E-05  1.86017E-05  3.00186E-06 -7.99816E-07  2.42289E-07  1.59535E-04  1.20388E-04 -1.50096E-05 -9.89185E-06  3.57976E-06
 10.100  1.50663E-05  1.45913E-05  2.22211E-06 -6.10205E-07  2.64578E-07  1.33130E-04  1.00956E-04 -1.30477E-05 -8.92496E-06  3.04233E-06
 10.200  1.21305E-05  1.15682E-05  1.65060E-06 -4.86208E-07  2.61347E-07  1.11178E-04  8.50103E-05 -1.11492E-05 -8.10473E-06  2.53767E-06
 10.300  9.84939E-06  9.27480E-06  1.23072E-06 -4.08605E-07  2.41357E-07  9.28905E-05  7.18492E-05 -9.36486E-06 -7.38962E-06  2.07068E-06
 10.400  8.06069E-06  7.52005E-06  9.20614E-07 -3.63390E-07  2.10884E-07  7.76248E-05  6.09189E-05 -7.72824E-06 -6.74993E-06  1.64467E-06
 10.500  6.64402E-06  6.16304E-06  6.89699E-07 -3.40320E-07  1.74380E-07  6.48587E-05  5.17821E-05 -6.25882E-06 -6.16513E-06  1.26160E-06
 10.600  5.51005E-06  5.10028E-06  5.15835E-07 -3.31850E-07  1.35003E-07  5.41663E-05  4.40951E-05 -4.96514E-06 -5.62163E-06  9.22314E-07
 10.700  4.59254E-06  4.25608E-06  3.83164E-07 -3.32369E-07  9.50274E-08  4.51992E-05  3.75881E-05 -3.84728E-06 -5.11090E-06  6.26686E-07
 10.800  3.84231E-06  3.57528E-06  2.80445E-07 -3.37664E-07  5.61356E-08  3.76720E-05  3.20492E-05 -2.89904E-06 -4.62810E-06  3.73761E-07
 10.900  3.22278E-06  3.01785E-06  1.99798E-07 -3.44564E-07  1.96064E-08  3.13501E-05  2.73120E-05 -2.10969E-06 -4.17089E-06  1.61868E-07
 11.000  2.70666E-06  2.55483E-06  1.35767E-07 -3.50699E-07 -1.35731E-08  2.60396E-05  2.32453E-05 -1.46551E-06 -3.73854E-06 -1.12728E-08
 11.100  2.27347E-06  2.16535E-06  8.46198E-08 -3.54351E-07 -4.26511E-08  2.15801E-05  1.97449E-05 -9.50931E-07 -3.33128E-06 -1.48451E-07
 11.200  1.90778E-06  1.83437E-06  4.38231E-08 -3.54346E-07 -6.70895E-08  1.78381E-05  1.67277E-05 -5.49628E-07 -2.94976E-06 -2.52860E-07
 11.300  1.59782E-06  1.55107E-06  1.16514E-08 -3.49981E-07 -8.65584E-08  1.47021E-05  1.41261E-05 -2.45248E-07 -2.59473E-06 -3.27985E-07
 11.400  1.33453E-06  1.30755E-06 -1.31025E-08 -3.40966E-07 -1.00935E-07  1.20784E-05  1.18847E-05 -2.20507E-08 -2.26678E-06 -3.77491E-07
 11.500  1.11080E-06  1.09797E-06 -3.13386E-08 -3.27361E-07 -1.10300E-07  9.88807E-06  9.95737E-06  1.34638E-07 -1.96624E-06 -4.05107E-07
 11.600  9.20924E-07  9.17888E-07 -4.37979E-08 -3.09518E-07 -1.14919E-07  8.06446E-06  8.30470E-06  2.38117E-07 -1.69305E-06 -4.14520E-07
 11.700  7.60231E-07  7.63735E-07 -5.11599E-08 -2.88019E-07 -1.15222E-07  6.55081E-06  6.89276E-06  3.00125E-07 -1.44678E-06 -4.09274E-07
 11.800  6.24792E-07  6.32539E-07 -5.40986E-08 -2.63606E-07 -1.11769E-07  5.29884E-06  5.69175E-06  3.30759E-07 -1.22667E-06 -3.92682E-07
 11.900  5.11224E-07  5.21686E-07 -5.33076E-08 -2.37124E-07 -1.05209E-07  4.26733E-06  4.67525E-06  3.38490E-07 -1.03159E-06 -3.67767E-07
 12.000  4.16566E-07  4.28790E-07 -4.95012E-08 -2.09450E-07 -9.62399E-08  3.42105E-06  3.81959E-06  3.30240E-07 -8.60205E-07 -3.37206E-07
 12.100  3.38185E-07  3.51630E-07 -4.34006E-08 -1.81445E-07 -8.55685E-08  2.72988E-06  3.10353E-06  3.11511E-07 -7.10933E-07 -3.03304E-07
 12.200  2.73727E-07  2.88113E-07 -3.57102E-08 -1.53902E-07 -7.38713E-08  2.16810E-06  2.50797E-06  2.86549E-07 -5.82073E-07 -2.67983E-07
 12.300  2.21085E-07  2.36280E-07 -2.70925E-08 -1.27517E-07 -6.17659E-08  1.71377E-06  2.01576E-06  2.58520E-07 -4.71836E-07 -2.32791E-07
 12.400  1.78380E-07  1.94310E-07 -1.81431E-08 -1.02857E-07 -4.97881E-08  1.34824E-06  1.61158E-06  2.29692E-07 -3.78405E-07 -1.98918E-07
 12.500  1.43949E-07  1.60543E-07 -9.37154E-09 -8.03532E-08 -3.83772E-08  1.05571E-06  1.28184E-06  2.01606E-07 -2.99974E-07 -1.67230E-07
 12.600  1.16334E-07  1.33494E-07 -1.18866E-09 -6.02978E-08 -2.78703E-08  8.22862E-07  1.01455E-06  1.75240E-07 -2.34791E-07 -1.38303E-07
 12.700  9.42758E-08  1.11858E-07  6.09929E-09 -4.28475E-08 -1.85023E-08  6.38513E-07  7.99258E-07  1.51142E-07 -1.81182E-07 -1.12472E-07
 12.800  7.66994E-08  9.45199E-08  1.22889E-08 -2.80390E-08 -1.04134E-08  4.93345E-07  6.26916E-07  1.29554E-07 -1.37580E-07 -8.98673E-08
 12.900  6.27023E-08  8.05442E-08  1.72723E-08 -1.58061E-08 -3.65908E-09  3.79634E-07  4.89770E-07  1.10505E-07 -1.02535E-07 -7.04625E-08
 13.000  5.15380E-08  6.91676E-08  2.10249E-08 -6.00036E-09  1.77531E-09  2.91022E-07  3.81245E-07  9.38858E-08 -7.47267E-08 -5.41117E-08
 13.100  4.25988E-08  5.97819E-08  2.35908E-08  1.58730E-09  5.96006E-09  2.22310E-07  2.95820E-07  7.95095E-08 -5.29688E-08 -4.05865E-08
 13.200  3.53980E-08  5.19150E-08  2.50662E-08  7.20600E-09  9.00577E-09  1.69281E-07  2.28902E-07  6.71498E-08 -3.62094E-08 -2.96064E-08
 13.300  2.95517E-08  4.52099E-08  2.55836E-08  1.11259E-08  1.10491E-08  1.28537E-07  1.76711E-07  5.65702E-08 -2.35280E-08 -2.08644E-08
 13.400  2.47614E-08  3.94040E-08  2.52962E-08  1.36220E-08  1.22404E-08  9.73601E-08  1.36162E-07  4.75417E-08 -1.41294E-08 -1.40475E-08
 13.500  2.07982E-08  3.43094E-08  2.43653E-08  1.49609E-08  1.27328E-08  7.35919E-08  1.04762E-07  3.98532E-08 -7.33567E-09 -8.85173E-09
 13.600  1.74887E-08  2.97945E-08  2.29495E-08  1.53911E-08  1.26743E-08  5.55314E-08  8.05134E-08  3.33161E-08 -2.57653E-09 -4.99327E-09
 13.700  1.47021E-08  2.57696E-08  2.11963E-08  1.51362E-08  1.22013E-08  4.18469E-08  6.18277E-08  2.77658E-08  6.21039E-10 -2.21526E-09
 13.800  1.23407E-08  2.21734E-08  1.92373E-08  1.43907E-08  1.14351E-08  3.15025E-08  4.74517E-08  2.30604E-08  2.64375E-09 -2.91600E-10
 13.900  1.03306E-08  1.89635E-08  1.71840E-08  1.33186E-08  1.04794E-08  2.36976E-08  3.64032E-08  1.90787E-08  3.80300E-09  9.71800E-10
 14.000  8.61579E-09  1.61091E-08  1.51273E-08  1.20537E-08  9.41982E-09  1.78171E-08  2.79174E-08  1.57172E-08  4.34541E-09  1.73768E-09
 14.100  7.15273E-09  1.35853E-08  1.31375E-08  1.07017E-08  8.32418E-09  1.33908E-08  2.14016E-08  1.28877E-08  4.46289E-09  2.13940E-09
 14.200  5.90671E-09  1.13698E-08  1.12655E-08  9.34226E-09  7.24405E-09  1.00611E-08  1.63983E-08  1.05145E-08  4.30180E-09  2.28379E-09
 14.300  4.84917E-09  9.44099E-09  9.54549E-09  8.03299E-09  6.21650E-09  7.55701E-09  1.25559E-08  8.53235E-09  3.97127E-09  2.25439E-09
 14.400  3.95588E-09  7.77671E-09  7.99690E-09  6.81260E-09  5.26624E-09  5.67387E-09  9.60453E-09  6.88471E-09  3.55052E-09  2.11493E-09
 14.500  3.20570E-09  6.35409E-09  6.62757E-09  5.70459E-09  4.40782E-09  4.25757E-09  7.33737E-09  5.52244E-09  3.09520E-09  1.91265E-09
 14.600  2.57987E-09  5.14965E-09  5.43625E-09  4.72050E-09  3.64778E-09  3.19226E-09  5.59608E-09  4.40263E-09  2.64271E-09  1.68144E-09
 14.700  2.06153E-09  4.13975E-09  4.41505E-09  3.86291E-09  2.98662E-09  2.39091E-09  4.25929E-09  3.48781E-09  2.21673E-09  1.44463E-09
 14.800  1.63548E-09  3.30113E-09  3.55156E-09  3.12798E-09  2.42048E-09  1.78820E-09  3.23391E-09  2.74532E-09  1.83080E-09  1.21742E-09
 14.900  1.28806E-09  2.61138E-09  2.83069E-09  2.50759E-09  1.94261E-09  1.33506E-09  2.44842E-09  2.14678E-09  1.49127E-09  1.00892E-09
 15.000  1.00703E-09  2.04943E-09  2.23604E-09  1.99105E-09  1.54454E-09  9.94624E-10  1.84776E-09  1.66763E-09  1.19952E-09  8.23825E-10
 15.100  7.81569E-10  1.59585E-09  1.75105E-09  1.56641E-09  1.21700E-09  7.39142E-10  1.38947E-09  1.28680E-09  9.53739E-10  6.63760E-10
 15.200  6.02166E-10  1.23307E-09  1.35972E-09  1.22143E-09  9.50584E-10  5.47708E-10  1.04078E-09  9.86282E-10  7.50189E-10  5.28298E-10
 15.300  4.60579E-10  9.45515E-10  1.04720E-09  9.44274E-10  7.36231E-10  4.04550E-10  7.76312E-10  7.50872E-10  5.84135E-10  4.15750E-10
 15.400  3.49746E-10  7.19575E-10  8.00061E-10  7.23952E-10  5.65542E-10  2.97751E-10  5.76461E-10  5.67813E-10  4.50498E-10  3.23738E-10
 15.500  2.63686E-10  5.43572E-10  6.06472E-10  5.50558E-10  4.30960E-10  2.18304E-10  4.26046E-10  4.26504E-10  3.44275E-10  2.49589E-10
 15.600  1.97394E-10  4.07622E-10  4.56211E-10  4.15403E-10  3.25849E-10  1.59396E-10  3.13332E-10  3.18221E-10  2.60807E-10  1.90613E-10
 15.700  1.46732E-10  3.03475E-10  3.40610E-10  3.11022E-10  2.44500E-10  1.15877E-10  2.29266E-10  2.35850E-10  1.95920E-10  1.44264E-10
 15.800  1.08316E-10  2.24334E-10  2.52433E-10  2.31123E-10  1.82094E-10  8.38539E-11  1.66876E-10  1.73644E-10  1.45985E-10  1.08245E-10
 15.900  7.94090E-11  1.64671E-10  1.85735E-10  1.70489E-10  1.34627E-10  6.03913E-11  1.20814E-10  1.27004E-10  1.07924E-10  8.05453E-11
 16.000  5.78211E-11  1.20042E-10  1.35692E-10  1.24857E-10  9.88208E-11  4.32793E-11  8.69884E-11  9.22842E-11  7.91773E-11  5.94530E-11
 16.100  4.18193E-11  8.69114E-11  9.84411E-11  9.07921E-11  7.20279E-11  3.08589E-11  6.22863E-11  6.66212E-11  5.76563E-11  4.35430E-11
 16.200  3.00450E-11  6.25017E-11  7.09270E-11  6.55632E-11  5.21363E-11  2.18888E-11  4.43487E-11  4.77852E-11  4.16804E-11  3.16495E-11
 16.300  2.14441E-11  4.46492E-11  5.07580E-11  4.70217E-11  3.74813E-11  1.54442E-11  3.13984E-11  3.40559E-11  2.99175E-11  2.28352E-11
 16.400  1.52058E-11  3.16868E-11  3.60825E-11  3.34972E-11  2.67652E-11  1.08387E-11  2.21031E-11  2.41175E-11  2.13250E-11  1.63572E-11
 16.500  1.07131E-11  2.23419E-11  2.54817E-11  2.37047E-11  1.89866E-11  7.56531E-12  1.54706E-11  1.69721E-11  1.50967E-11  1.16345E-11
 16.600  7.49977E-12  1.56521E-11  1.78788E-11  1.66655E-11  1.33810E-11  5.25162E-12  1.07663E-11  1.18694E-11  1.06159E-11  8.21827E-12
 16.700  5.21724E-12  1.08960E-11  1.24642E-11  1.16412E-11  9.36972E-12  3.62545E-12  7.44946E-12  8.24950E-12  7.41580E-12  5.76590E-12
 16.800  3.60679E-12  7.53758E-12  8.63448E-12  8.07996E-12  6.51928E-12  2.48897E-12  5.12486E-12  5.69850E-12  5.14676E-12  4.01845E-12
 16.900  2.47808E-12  5.18202E-12  5.94414E-12  5.57297E-12  4.50755E-12  1.69925E-12  3.50543E-12  3.91244E-12  3.54915E-12  2.78229E-12
 17.000  1.69220E-12  3.54076E-12  4.06680E-12  3.81999E-12  3.09728E-12  1.15365E-12  2.38401E-12  2.67001E-12  2.43203E-12  1.91401E-12
 17.100  1.14856E-12  2.40464E-12  2.76539E-12  2.60235E-12  2.11519E-12  7.78868E-13  1.61208E-12  1.81124E-12  1.65616E-12  1.30835E-12
 17.200  7.74902E-13  1.62326E-12  1.86909E-12  1.76209E-12  1.43574E-12  5.22915E-13  1.08390E-12  1.22140E-12  1.12088E-12  8.88745E-13
 17.300  5.19703E-13  1.08926E-12  1.25573E-12  1.18597E-12  9.68689E-13  3.49121E-13  7.24634E-13  8.18804E-13  7.53995E-13  5.99989E-13
 17.400  3.46500E-13  7.26620E-13  8.38657E-13  7.93476E-13  6.49685E-13  2.31796E-13  4.81715E-13  5.45711E-13  5.04154E-13  4.02581E-13
 17.500  2.29673E-13  4.81878E-13  5.56822E-13  5.27750E-13  4.33167E-13  1.53046E-13  3.18428E-13  3.61598E-13  3.35096E-13  2.68497E-13
 17.600  1.51356E-13  3.17720E-13  3.67550E-13  3.48966E-13  2.87121E-13  1.00493E-13  2.09313E-13  2.38226E-13  2.21419E-13  1.78004E-13
 17.700  9.91730E-14  2.08281E-13  2.41216E-13  2.29415E-13  1.89214E-13  6.56230E-14  1.36821E-13  1.56053E-13  1.45453E-13  1.17315E-13
 17.800  6.46114E-14  1.35761E-13  1.57401E-13  1.49956E-13  1.23978E-13  4.26175E-14  8.89404E-14  1.01646E-13  9.49987E-14  7.68658E-14
 17.900  4.18569E-14  8.79906E-14  1.02127E-13  9.74611E-14  8.07706E-14  2.75260E-14  5.74967E-14  6.58358E-14  6.16912E-14  5.00722E-14
 18.000  2.69641E-14  5.67096E-14  6.58905E-14  6.29861E-14  5.23244E-14  1.76819E-14  3.69656E-14  4.24039E-14  3.98346E-14  3.24314E-14
 18.100  1.72737E-14  3.63456E-14  4.22743E-14  4.04782E-14  3.37066E-14  1.12969E-14  2.36362E-14  2.71606E-14  2.55770E-14  2.08864E-14
 18.200  1.10047E-14  2.31655E-14  2.69723E-14  2.58691E-14  2.15925E-14  7.17869E-15  1.50312E-14  1.73012E-14  1.63309E-14  1.33755E-14
 18.300  6.97247E-15  1.46839E-14  1.71146E-14  1.64415E-14  1.37558E-14  4.53727E-15  9.50735E-15  1.09606E-14  1.03696E-14  8.51779E-15
 18.400  4.39364E-15  9.25697E-15  1.08003E-14  1.03925E-14  8.71526E-15  2.85246E-15  5.98118E-15  6.90602E-15  6.54821E-15  5.39425E-15
 18.500  2.75364E-15  5.80416E-15  6.77869E-15  6.53326E-15  5.49165E-15  1.78374E-15  3.74273E-15  4.32785E-15  4.11252E-15  3.39737E-15
 18.600  1.71653E-15  3.61966E-15  4.23164E-15  4.08499E-15  3.44166E-15  1.10954E-15  2.32958E-15  2.69763E-15  2.56883E-15  2.12803E-15
 18.700  1.06431E-15  2.24528E-15  2.62749E-15  2.54048E-15  2.14532E-15  6.86530E-16  1.44233E-15  1.67252E-15  1.59596E-15  1.32573E-15
 18.800  6.56414E-16  1.38535E-15  1.62278E-15  1.57152E-15  1.33011E-15  4.22569E-16  8.88308E-16  1.03147E-15  9.86239E-16  8.21461E-16
 18.900  4.02707E-16  8.50260E-16  9.96949E-16  9.66976E-16  8.20297E-16  2.58742E-16  5.44232E-16  6.32767E-16  6.06220E-16  5.06282E-16
 19.000  2.45764E-16  5.19109E-16  6.09255E-16  5.91860E-16  5.03216E-16  1.57608E-16  3.31695E-16  3.86147E-16  3.70665E-16  3.10374E-16
 19.100  1.49203E-16  3.15278E-16  3.70382E-16  3.60365E-16  3.07079E-16  9.55083E-17  2.01113E-16  2.34419E-16  2.25449E-16  1.89269E-16
 19.200  9.01108E-17  1.90488E-16  2.23995E-16  2.18272E-16  1.86411E-16  5.75794E-17  1.21310E-16  1.41572E-16  1.36409E-16  1.14812E-16
 19.300  5.41417E-17  1.14498E-16  1.34765E-16  1.31522E-16  1.12573E-16  3.45355E-17  7.27981E-17  8.50584E-17  8.21074E-17  6.92828E-17
 19.400  3.23633E-17  6.84685E-17  8.06634E-17  7.88420E-17  6.76305E-17  2.06086E-17  4.34633E-17  5.08423E-17  4.91672E-17  4.15915E-17
 19.500  1.92465E-17  4.07343E-17  4.80341E-17  4.70202E-17  4.04217E-17  1.22356E-17  2.58174E-17  3.02351E-17  2.92910E-17  2.48392E-17
 19.600  1.13878E-17  2.41111E-17  2.84582E-17  2.78991E-17  2.40358E-17  7.22774E-18  1.52582E-17  1.78891E-17  1.73609E-17  1.47582E-17
 19.700  6.70390E-18  1.41995E-17  1.67749E-17  1.64698E-17  1.42196E-17  4.24809E-18  8.97222E-18  1.05308E-17  1.02376E-17  8.72387E-18
 19.800  3.92668E-18  8.32026E-18  9.83826E-18  9.67353E-18  8.36966E-18  2.48432E-18  5.24948E-18  6.16807E-18  6.00654E-18  5.13065E-18
 19.900  2.28846E-18  4.85087E-18  5.74107E-18  5.65320E-18  4.90155E-18  1.44562E-18  3.05605E-18  3.59465E-18  3.50640E-18  3.00216E-18
  67 177 200   0.100
  0.000  5.70623E-02 -2.87043E-16 -4.47559E-16 -6.37973E-16 -3.93385E-16  9.31371E-02 -4.80991E-16 -8.11851E-16 -7.13028E-16  2.86098E-16
  0.100  5.70742E-02 -4.72651E-05 -3.50672E-08 -1.21474E-11 -2.71078E-15  9.31532E-02  8.10418E-05  7.23625E-08  2.85438E-11  7.96783E-15
  0.200  5.71097E-02 -1.86516E-04 -5.55836E-07 -7.70753E-10 -7.63452E-13  9.32005E-02  3.19257E-04  1.14427E-06  1.80722E-09  1.91136E-12
  0.300  5.71686E-02 -4.10247E-04 -2.77018E-06 -8.65465E-09 -1.92744E-11  9.32759E-02  7.00218E-04  5.68034E-06  2.02208E-08  4.81277E-11
  0.400  5.72507E-02 -7.06357E-04 -8.56464E-06 -4.76625E-08 -1.88577E-10  9.33741E-02  1.20087E-03  1.74653E-05  1.10806E-07  4.69118E-10
  0.500  5.73556E-02 -1.05875E-03 -2.03243E-05 -1.77187E-07 -1.09449E-09  9.34889E-02  1.79096E-03  4.11534E-05  4.09317E-07  2.70964E-09
  0.600  5.74827E-02 -1.44812E-03 -4.06997E-05 -5.12635E-07 -4.55567E-09  9.36128E-02  2.43488E-03  8.17006E-05  1.17513E-06  1.12124E-08
  0.700  5.76311E-02 -1.85294E-03 -7.23376E-05 -1.24525E-06 -1.50476E-08  9.37380E-02  3.09383E-03  1.43737E-04  2.82883E-06  3.67805E-08
  0.800  5.77996E-02 -2.25049E-03 -1.17597E-04 -2.65734E-06 -4.18991E-08  9.38573E-02  3.72818E-03  2.30938E-04  5.97455E-06  1.01607E-07
  0.900  5.79867E-02 -2.61804E-03 -1.78273E-04 -5.12926E-06 -1.02258E-07  9.39640E-02  4.29985E-03  3.45460E-04  1.13991E-05  2.45790E-07
  1.000  5.81907E-02 -2.93398E-03 -2.55344E-04 -9.13548E-06 -2.24655E-07  9.40529E-02  4.77451E-03  4.87491E-04  2.00433E-05  5.34707E-07
  1.100  5.84091E-02 -3.17893E-03 -3.48777E-04 -1.52279E-05 -4.52814E-07  9.41204E-02  5.12359E-03  6.54964E-04  3.29437E-05  1.06623E-06
  1.200  5.86394E-02 -3.33672E-03 -4.57393E-04 -2.40064E-05 -8.49205E-07  9.41648E-02  5.32591E-03  8.43457E-04  5.11487E-05  1.97645E-06
  1.300  5.88782E-02 -3.39520E-03 -5.78809E-04 -3.60774E-05 -1.49775E-06  9.41863E-02  5.36878E-03  1.04630E-03  7.56141E-05  3.44252E-06
  1.400  5.91222E-02 -3.34695E-03 -7.09476E-04 -5.20038E-05 -2.50508E-06  9.41868E-02  5.24865E-03  1.25487E-03  1.07089E-04  5.68138E-06
  1.500  5.93674E-02 -3.18955E-03 -8.44795E-04 -7.22497E-05 -3.99979E-06  9.41699E-02  4.97114E-03  1.45909E-03  1.46001E-04  8.94341E-06
  1.600  5.96095E-02 -2.92581E-03 -9.79320E-04 -9.71242E-05 -6.12945E-06  9.41403E-02  4.55060E-03  1.64799E-03  1.92356E-04  1.35009E-05
  1.700  5.98444E-02 -2.56359E-03 -1.10702E-03 -1.26730E-04 -9.05514E-06  9.41035E-02  4.00910E-03  1.81049E-03  2.45658E-04  1.96316E-05
  1.800  6.00677E-02 -2.11538E-03 -1.22163E-03 -1.60923E-04 -1.29439E-05  9.40652E-02  3.37507E-03  1.93610E-03  3.04861E-04  2.75978E-05
  1.900  6.02753E-02 -1.59770E-03 -1.31696E-03 -1.99280E-04 -1.79593E-05  9.40310E-02  2.68151E-03  2.01565E-03  3.68361E-04  3.76242E-05
  2.000  6.04635E-02 -1.03028E-03 -1.38731E-03 -2.41089E-04 -2.42513E-05  9.40056E-02  1.96404E-03  2.04201E-03  4.34019E-04  4.98735E-05
  2.100  6.06289E-02 -4.35011E-04 -1.42777E-03 -2.85354E-04 -3.19460E-05  9.39930E-02  1.25887E-03  2.01060E-03  4.99236E-04  6.44246E-05
  2.200  6.07691E-02  1.65086E-04 -1.43456E-03 -3.30814E-04 -4.11361E-05  9.39958E-02  6.00667E-04  1.91980E-03  5.61054E-04  8.12530E-05
  2.300  6.08825E-02  7.47006E-04 -1.40528E-03 -3.75987E-04 -5.18735E-05  9.40149E-02  2.07225E-05  1.77123E-03  6.16292E-04  1.00216E-04
  2.400  6.09684E-02  1.28886E-03 -1.33907E-03 -4.19215E-04 -6.41637E-05  9.40498E-02 -4.54781E-04  1.56968E-03  6.61709E-04  1.21042E-04
  2.500  6.10272E-02  1.77092E-03 -1.23674E-03 -4.58730E-04 -7.79639E-05  9.40986E-02 -8.06091E-04  1.32302E-03  6.94179E-04  1.43326E-04
  2.600  6.10602E-02  2.17651E-03 -1.10075E-03 -4.92720E-04 -9.31829E-05  9.41577E-02 -1.02082E-03  1.04178E-03  7.10880E-04  1.66531E-04
  2.700  6.10698E-02  2.49276E-03 -9.35160E-04 -5.19395E-04 -1.09684E-04  9.42224E-02 -1.09441E-03  7.38574E-04  7.09477E-04  1.89992E-04
  2.800  6.10592E-02  2.71116E-03 -7.45489E-04 -5.37054E-04 -1.27290E-04  9.42869E-02 -1.03014E-03  4.27416E-04  6.88304E-04  2.12928E-04
  2.900  6.10321E-02  2.82793E-03 -5.38494E-04 -5.44152E-04 -1.45785E-04  9.43446E-02 -8.38654E-04  1.22879E-04  6.46520E-04  2.34460E-04
  3.000  6.09926E-02  2.84411E-03 -3.21923E-04 -5.39352E-04 -1.64924E-04  9.43886E-02 -5.36999E-04 -1.60807E-04  5.84242E-04  2.53630E-04
  3.100  6.09449E-02  2.76555E-03 -1.04218E-04 -5.21576E-04 -1.84432E-04  9.44114E-02 -1.47337E-04 -4.10668E-04  5.02637E-04  2.69428E-04
  3.200  6.08924E-02  2.60260E-03  1.05795E-04 -4.90050E-04 -2.04004E-04  9.44057E-02  3.04701E-04 -6.15861E-04  4.03971E-04  2.80837E-04
  3.300  6.08383E-02  2.36972E-03  2.99233E-04 -4.44344E-04 -2.23306E-04  9.43645E-02  7.91852E-04 -7.68453E-04  2.91590E-04  2.86866E-04
  3.400  6.07842E-02  2.08484E-03  4.67465E-04 -3.84403E-04 -2.41970E-04  9.42809E-02  1.28716E-03 -8.64048E-04  1.69845E-04  2.86617E-04
  3.500  6.07304E-02  1.76872E-03  6.02423E-04 -3.10580E-04 -2.59586E-04  9.41483E-02  1.76592E-03 -9.02207E-04  4.39479E-05  2.79339E-04
  3.600  6.06754E-02  1.44412E-03  6.96890E-04 -2.23665E-04 -2.75698E-04  9.39608E-02  2.20741E-03 -8.86628E-04 -8.02576E-05  2.64501E-04
  3.700  6.06156E-02  1.13496E-03  7.44762E-04 -1.24901E-04 -2.89798E-04  9.37125E-02  2.59646E-03 -8.25058E-04 -1.96575E-04  2.41866E-04
  3.800  6.05455E-02  8.65413E-04  7.41286E-04 -1.60043E-05 -3.01326E-04  9.33981E-02  2.92452E-03 -7.28922E-04 -2.98801E-04  2.11558E-04
  3.900  6.04573E-02  6.58986E-04  6.83270E-04  1.00838E-04 -3.09676E-04  9.30124E-02  3.19045E-03 -6.12686E-04 -3.81104E-04  1.74121E-04
  4.000  6.03412E-02  5.37648E-04  5.69251E-04  2.22974E-04 -3.14208E-04  9.25503E-02  3.40058E-03 -4.92981E-04 -4.38423E-04  1.30559E-04
  4.100  6.01856E-02  5.20959E-04  3.99628E-04  3.47325E-04 -3.14269E-04  9.20063E-02  3.56847E-03 -3.87533E-04 -4.66846E-04  8.23533E-05
  4.200  5.99773E-02  6.25280E-04  1.76741E-04  4.70440E-04 -3.09229E-04  9.13752E-02  3.71392E-03 -3.13973E-04 -4.63950E-04  3.14392E-05
  4.300  5.97022E-02  8.63061E-04 -9.51124E-05  5.88578E-04 -2.98514E-04  9.06511E-02  3.86171E-03 -2.88608E-04 -4.29060E-04 -1.98497E-05
  4.400  5.93454E-02  1.24225E-03 -4.09718E-04  6.97828E-04 -2.81660E-04  8.98276E-02  4.03977E-03 -3.25236E-04 -3.63410E-04 -6.88790E-05
  4.500  5.88923E-02  1.76584E-03 -7.59074E-04  7.94248E-04 -2.58354E-04  8.88981E-02  4.27715E-03 -4.34097E-04 -2.70169E-04 -1.12848E-04
  4.600  5.83283E-02  2.43157E-03 -1.13360E-03  8.74028E-04 -2.28489E-04  8.78553E-02  4.60191E-03 -6.21045E-04 -1.54342E-04 -1.48955E-04
  4.700  5.76403E-02  3.23182E-03 -1.52241E-03  9.33680E-04 -1.92205E-04  8.66916E-02  5.03883E-03 -8.87002E-04 -2.25168E-05 -1.74580E-04
  4.800  5.68167E-02  4.15372E-03 -1.91371E-03  9.70218E-04 -1.49917E-04  8.53990E-02  5.60749E-03 -1.22775E-03  1.17501E-04 -1.87477E-04
  4.900  5.58480E-02  5.17941E-03 -2.29522E-03  9.81345E-04 -1.02334E-04  8.39698E-02  6.32048E-03 -1.63409E-03  2.57171E-04 -1.85951E-04
  5.000  5.47274E-02  6.28659E-03 -2.65467E-03  9.65610E-04 -5.04570E-05  8.23963E-02  7.18216E-03 -2.09233E-03  3.87757E-04 -1.69009E-04
  5.100  5.34506E-02  7.44919E-03 -2.98031E-03  9.22540E-04  4.44656E-06  8.06714E-02  8.18786E-03 -2.58507E-03  5.00910E-04 -1.36469E-04
  5.200  5.20169E-02  8.63831E-03 -3.26144E-03  8.52714E-04  6.08864E-05  7.87892E-02  9.32374E-03 -3.09234E-03  5.89217E-04 -8.90130E-05
  5.300  5.04285E-02  9.82320E-03 -3.48891E-03  7.57789E-04  1.17213E-04  7.67454E-02  1.05672E-02 -3.59278E-03  6.46701E-04 -2.81782E-05
  5.400  4.86910E-02  1.09724E-02 -3.65555E-03  6.40465E-04  1.71699E-04  7.45374E-02  1.18877E-02 -4.06497E-03  6.69208E-04  4.37142E-05
  5.500  4.68131E-02  1.20551E-02 -3.75646E-03  5.04379E-04  2.22625E-04  7.21652E-02  1.32487E-02 -4.48877E-03  6.54669E-04  1.23692E-04
  5.600  4.48065E-02  1.30420E-02 -3.78931E-03  3.53948E-04  2.68375E-04  6.96317E-02  1.46091E-02 -4.84647E-03  6.03203E-04  2.08313E-04
  5.700  4.26859E-02  1.39066E-02 -3.75437E-03  1.94161E-04  3.07527E-04  6.69428E-02  1.59254E-02 -5.12379E-03  5.17067E-04  2.93882E-04
  5.800  4.04680E-02  1.46265E-02 -3.65448E-03  3.03335E-05  3.38930E-04  6.41078E-02  1.71546E-02 -5.31061E-03  4.00448E-04  3.76680E-04
  5.900  3.81718E-02  1.51837E-02 -3.49485E-03 -1.32154E-04  3.61768E-04  6.11397E-02  1.82554E-02 -5.40138E-03  2.59137E-04  4.53200E-04
  6.000  3.58176E-02  1.55655E-02 -3.28278E-03 -2.88124E-04  3.75598E-04  5.80548E-02  1.91915E-02 -5.39524E-03  1.00093E-04  5.20353E-04
  6.100  3.34270E-02  1.57650E-02 -3.02719E-03 -4.32847E-04  3.80370E-04  5.48727E-02  1.99321E-02 -5.29579E-03 -6.90427E-05  5.75641E-04
  6.200  3.10219E-02  1.57810E-02 -2.73817E-03 -5.62256E-04  3.76418E-04  5.16158E-02  2.04544E-02 -5.11063E-03 -2.40456E-04  6.17281E-04
  6.300  2.86243E-02  1.56179E-02 -2.42644E-03 -6.73115E-04  3.64424E-04  4.83092E-02  2.07437E-02 -4.85066E-03 -4.06646E-04  6.44269E-04
  6.400  2.62558E-02  1.52853E-02 -2.10278E-03 -7.63130E-04  3.45370E-04  4.49794E-02  2.07942E-02 -4.52922E-03 -5.60853E-04  6.56391E-04
  6.500  2.39368E-02  1.47975E-02 -1.77756E-03 -8.30996E-04  3.20466E-04  4.16543E-02  2.06085E-02 -4.16116E-03 -6.97406E-04  6.54173E-04
  6.600  2.16864E-02  1.41726E-02 -1.46027E-03 -8.76392E-04  2.91072E-04  3.83621E-02  2.01976E-02 -3.76194E-03 -8.11960E-04  6.38791E-04
  6.700  1.95219E-02  1.34316E-02 -1.15916E-03 -8.99913E-04  2.58614E-04  3.51301E-02  1.95794E-02 -3.34669E-03 -9.01623E-04  6.11938E-04
  6.800  1.74583E-02  1.25975E-02 -8.80958E-04 -9.02957E-04  2.24510E-04  3.19848E-02  1.87777E-02 -2.92953E-03 -9.64983E-04  5.75676E-04
  6.900  1.55081E-02  1.16942E-02 -6.30743E-04 -8.87579E-04  1.90091E-04  2.89504E-02  1.78208E-02 -2.52291E-03 -1.00202E-03  5.32274E-04
  7.000  1.36816E-02  1.07455E-02 -4.11870E-04 -8.56323E-04  1.56544E-04  2.60484E-02  1.67398E-02 -2.13719E-03 -1.01395E-03  4.84054E-04
  7.100  1.19859E-02  9.77454E-03 -2.26033E-04 -8.12040E-04  1.24870E-04  2.32973E-02  1.55671E-02 -1.78042E-03 -1.00301E-03  4.33252E-04
  7.200  1.04258E-02  8.80254E-03 -7.34060E-05 -7.57718E-04  9.58517E-05  2.07119E-02  1.43348E-02 -1.45824E-03 -9.72186E-04  3.81906E-04
  7.300  9.00326E-03  7.84859E-03  4.71585E-05 -6.96324E-04  7.00438E-05  1.83032E-02  1.30738E-02 -1.17399E-03 -9.24957E-04  3.31767E-04
  7.400  7.71780E-03  6.92904E-03  1.37876E-04 -6.30662E-04  4.77773E-05  1.60786E-02  1.18124E-02 -9.28909E-04 -8.65036E-04  2.84249E-04
  7.500  6.56676E-03  6.05728E-03  2.01756E-04 -5.63272E-04  2.91756E-05  1.40415E-02  1.05755E-02 -7.22412E-04 -7.96132E-04  2.40405E-04
  7.600  5.54546E-03  5.24362E-03  2.42330E-04 -4.96350E-04  1.41813E-05  1.21918E-02  9.38421E-03 -5.52482E-04 -7.21758E-04  2.00933E-04
  7.700  4.64759E-03  4.49530E-03  2.63388E-04 -4.31703E-04  2.58931E-06  1.05262E-02  8.25550E-03 -4.16027E-04 -6.45078E-04  1.66202E-04
  7.800  3.86549E-03  3.81671E-03  2.68750E-04 -3.70738E-04 -5.91617E-06  9.03865E-03  7.20212E-03 -3.09250E-04 -5.68808E-04  1.36296E-04
  7.900  3.19054E-03  3.20965E-03  2.62074E-04 -3.14461E-04 -1.17248E-05  7.72074E-03  6.23277E-03 -2.27989E-04 -4.95156E-04  1.11069E-04
  8.000  2.61345E-03  2.67364E-03  2.46711E-04 -2.63517E-04 -1.52653E-05  6.56219E-03  5.35241E-03 -1.68009E-04 -4.25812E-04  9.01971E-05
  8.100  2.12461E-03  2.20636E-03  2.25602E-04 -2.18223E-04 -1.69752E-05  5.55141E-03  4.56273E-03 -1.25226E-04 -3.61962E-04  7.32431E-05
  8.200  1.71436E-03  1.80400E-03  2.01227E-04 -1.78627E-04 -1.72754E-05  4.67595E-03  3.86262E-03 -9.58860E-05 -3.04337E-04  5.97017E-05
  8.300  1.37326E-03  1.46171E-03  1.75582E-04 -1.44559E-04 -1.65516E-05  3.92295E-03  3.24874E-03 -7.66749E-05 -2.53271E-04  4.90464E-05
  8.400  1.09224E-03  1.17394E-03  1.50193E-04 -1.15691E-04 -1.51413E-05  3.27956E-03  2.71605E-03 -6.47752E-05 -2.08775E-04  4.07634E-05
  8.500  8.62828E-04  9.34775E-04  1.26158E-04 -9.15806E-05 -1.33271E-05  2.73322E-03  2.25834E-03 -5.78820E-05 -1.70608E-04  3.43774E-05
  8.600  6.77223E-04  7.38228E-04  1.04196E-04 -7.17247E-05 -1.13343E-05  2.27194E-03  1.86866E-03 -5.41826E-05 -1.38349E-04  2.94674E-05
  8.700  5.28373E-04  5.78462E-04  8.47132E-05 -5.55920E-05 -9.33340E-06  1.88451E-03  1.53973E-03 -5.23114E-05 -1.11461E-04  2.56753E-05
  8.800  4.10016E-04  4.49965E-04  6.78655E-05 -4.26547E-05 -7.44432E-06  1.56064E-03  1.26429E-03 -5.12908E-05 -8.93417E-05  2.27073E-05
  8.900  3.16675E-04  3.47670E-04  5.36237E-05 -3.24108E-05 -5.74387E-06  1.29101E-03  1.03530E-03 -5.04638E-05 -7.13703E-05  2.03314E-05
  9.000  2.43633E-04  2.67028E-04  4.18296E-05 -2.43985E-05 -4.27324E-06  1.06732E-03  8.46180E-04 -4.94283E-05 -5.69391E-05  1.83705E-05
  9.100  1.86891E-04  2.04045E-04  3.22440E-05 -1.82061E-05 -3.04609E-06  8.82264E-04  6.90882E-04 -4.79740E-05 -4.54773E-05  1.66949E-05
  9.200  1.43102E-04  1.55280E-04  2.45869E-05 -1.34750E-05 -2.05610E-06  7.29496E-04  5.63989E-04 -4.60278E-05 -3.64658E-05  1.52134E-05
  9.300  1.09508E-04  1.17826E-04  1.85670E-05 -9.90051E-06 -1.28368E-06  6.03571E-04  4.60726E-04 -4.36081E-05 -2.94450E-05  1.38649E-05
  9.400  8.38624E-05  8.92660E-05  1.39028E-05 -7.22866E-06 -7.01641E-07  4.99857E-04  3.76955E-04 -4.07888E-05 -2.40176E-05  1.26108E-05
  9.500  6.43606E-05  6.76242E-05  1.03368E-05 -5.25213E-06 -2.79566E-07  4.14451E-04  3.09142E-04 -3.76713E-05 -1.98470E-05  1.14283E-05
  9.600  4.95707E-05  5.13101E-05  7.64281E-06 -3.80457E-06  1.28972E-08  3.44094E-04  2.54304E-04 -3.43659E-05 -1.66533E-05  1.03057E-05
  9.700  3.83689E-05  3.90610E-05  5.62861E-06 -2.75479E-06  2.03867E-07  2.86081E-04  2.09959E-04 -3.09786E-05 -1.42080E-05  9.23811E-06
  9.800  2.98834E-05  2.98879E-05  4.13580E-06 -2.00095E-06  3.17947E-07  2.38180E-04  1.74058E-04 -2.76035E-05 -1.23274E-05  8.22458E-06
  9.900  2.34443E-05  2.30258E-05  3.03702E-06 -1.46518E-06  3.75675E-07  1.98562E-04  1.44927E-04 -2.43193E-05 -1.08661E-05  7.26636E-06
 10.000  1.85415E-05  1.78891E-05  2.23208E-06 -1.08875E-06  3.93493E-07  1.65730E-04  1.21212E-04 -2.11878E-05 -9.71132E-06  6.36549E-06
 10.100  1.47896E-05  1.40344E-05  1.64378E-06 -8.27855E-07  3.84081E-07  1.38463E-04  1.01822E-04 -1.82548E-05 -8.77665E-06  5.52409E-06
 10.200  1.18995E-05  1.11288E-05  1.21362E-06 -6.50168E-07  3.56886E-07  1.15769E-04  8.58853E-05 -1.55513E-05 -7.99750E-06  4.74397E-06
 10.300  9.65550E-06  8.92400E-06  8.97968E-07 -5.31974E-07  3.18738E-07  9.68406E-05  7.27096E-05 -1.30957E-05 -7.32652E-06  4.02639E-06
 10.400  7.89700E-06  7.23632E-06  6.64737E-07 -4.55931E-07  2.74459E-07  8.10200E-05  6.17468E-05 -1.08960E-05 -6.72997E-06  3.37199E-06
 10.500  6.50499E-06  5.93033E-06  4.90606E-07 -4.09343E-07  2.27403E-07  6.77725E-05  5.25651E-05 -8.95152E-06 -6.18465E-06  2.78078E-06
 10.600  5.39131E-06  4.90674E-06  3.58840E-07 -3.82863E-07  1.79908E-07  5.66620E-05  4.48249E-05 -7.25487E-06 -5.67532E-06  2.25208E-06
 10.700  4.49063E-06  4.09299E-06  2.57571E-07 -3.69555E-07  1.33634E-07  4.73315E-05  3.82597E-05 -5.79363E-06 -5.19266E-06  1.78459E-06
 10.800  3.75451E-06  3.43628E-06  1.78494E-07 -3.64228E-07  8.98016E-08  3.94885E-05  3.26603E-05 -4.55170E-06 -4.73157E-06  1.37636E-06
 10.900  3.14693E-06  2.89828E-06  1.15884E-07 -3.62975E-07  4.93451E-08  3.28924E-05  2.78623E-05 -3.51048E-06 -4.28990E-06  1.02482E-06
 11.000  2.64105E-06  2.45130E-06  6.58548E-08 -3.62874E-07  1.29921E-08  2.73444E-05  2.37362E-05 -2.64991E-06 -3.86740E-06  7.26837E-07
 11.100  2.21673E-06  2.07537E-06  2.58112E-08 -3.61779E-07 -1.87004E-08  2.26796E-05  2.01791E-05 -1.94932E-06 -3.46491E-06  4.78775E-07
 11.200  1.85880E-06  1.75611E-06 -5.96671E-09 -3.58187E-07 -4.53412E-08  1.87607E-05  1.71084E-05 -1.38817E-06 -3.08385E-06  2.76561E-07
 11.300  1.55569E-06  1.48311E-06 -3.06310E-08 -3.51140E-07 -6.67111E-08  1.54727E-05  1.44573E-05 -9.46626E-07 -2.72573E-06  1.15800E-07
 11.400  1.29847E-06  1.24878E-06 -4.89937E-08 -3.40146E-07 -8.27708E-08  1.27191E-05  1.21709E-05 -6.05992E-07 -2.39193E-06 -8.11301E-09
 11.500  1.08014E-06  1.04749E-06 -6.16898E-08 -3.25112E-07 -9.36612E-08  1.04183E-05  1.02028E-05 -3.49072E-07 -2.08348E-06 -9.98693E-08
 11.600  8.95061E-07  8.74869E-07 -6.92884E-08 -3.06271E-07 -9.96940E-08  8.50104E-06  8.51383E-06 -1.60380E-07 -1.80099E-06 -1.64125E-07
 11.700  7.38624E-07  7.27449E-07 -7.23611E-08 -2.84111E-07 -1.01330E-07  6.90850E-06  7.06983E-06 -2.62594E-08 -1.54462E-06 -2.05387E-07
 11.800  6.06936E-07  6.02287E-07 -7.15162E-08 -2.59307E-07 -9.91496E-08  5.59041E-06  5.84079E-06  6.50826E-08 -1.31408E-06 -2.27910E-07
 11.900  4.96650E-07  4.96793E-07 -6.74067E-08 -2.32646E-07 -9.38138E-08  4.50380E-06  4.79997E-06  1.23624E-07 -1.10865E-06 -2.35616E-07
 12.000  4.04833E-07  4.08603E-07 -6.07198E-08 -2.04963E-07 -8.60261E-08  3.61186E-06  3.92339E-06  1.57633E-07 -9.27291E-07 -2.32035E-07
 12.100  3.28883E-07  3.35517E-07 -5.21536E-08 -1.77084E-07 -7.64924E-08  2.88306E-06  3.18946E-06  1.73814E-07 -7.68653E-07 -2.20260E-07
 12.200  2.66476E-07  2.75475E-07 -4.23893E-08 -1.49772E-07 -6.58859E-08  2.29045E-06  2.57874E-06  1.77484E-07 -6.31185E-07 -2.02937E-07
 12.300  2.15539E-07  2.26552E-07 -3.20622E-08 -1.23695E-07 -5.48186E-08  1.81099E-06  2.07374E-06  1.72761E-07 -5.13189E-07 -1.82260E-07
 12.400  1.74226E-07  1.86977E-07 -2.17366E-08 -9.93998E-08 -4.38191E-08  1.42511E-06  1.65885E-06  1.62756E-07 -4.12881E-07 -1.59998E-07
 12.500  1.40911E-07  1.55141E-07 -1.18866E-08 -7.72966E-08 -3.33201E-08  1.11618E-06  1.32017E-06  1.49748E-07 -3.28450E-07 -1.37519E-07
 12.600  1.14171E-07  1.29612E-07 -2.88462E-09 -5.76581E-08 -2.36523E-08  8.70183E-07  1.04548E-06  1.35360E-07 -2.58108E-07 -1.15837E-07
 12.700  9.27843E-08  1.09146E-07  5.00247E-09 -4.06254E-08 -1.50460E-08  6.75358E-07  8.24072E-07  1.20696E-07 -2.00121E-07 -9.56560E-08
 12.800  7.57089E-08  9.26821E-08  1.16103E-08 -2.62214E-08 -7.63817E-09  5.21885E-07  6.46711E-07  1.06473E-07 -1.52850E-07 -7.74207E-08
 12.900  6.20743E-08  7.93395E-08  1.68680E-08 -1.43688E-08 -1.48351E-09  4.01623E-07  5.05465E-07  9.31231E-08 -1.14765E-07 -6.13645E-08
 13.000  5.11626E-08  6.84043E-08  2.07849E-08 -4.91072E-09  3.43185E-09  3.07872E-07  3.93609E-07  8.08762E-08 -8.44654E-08 -4.75565E-08
 13.100  4.23912E-08  5.93119E-08  2.34345E-08  2.36765E-09  7.17538E-09  2.35150E-07  3.05491E-07  6.98245E-08 -6.06850E-08 -3.59433E-08
 13.200  3.52949E-08  5.16278E-08  2.49382E-08  7.71874E-09  9.85329E-09  1.79008E-07  2.36409E-07  5.99714E-08 -4.22984E-08 -2.63856E-08
 13.300  2.95075E-08  4.50265E-08  2.54488E-08  1.14137E-08  1.15967E-08  1.35861E-07  1.82490E-07  5.12662E-08 -2.83182E-08 -1.86894E-08
 13.400  2.47449E-08  3.92707E-08  2.51355E-08  1.37268E-08  1.25492E-08  1.02838E-07  1.40570E-07  4.36288E-08 -1.78899E-08 -1.26311E-08
 13.500  2.07892E-08  3.41918E-08  2.41711E-08  1.49222E-08  1.28569E-08  7.76616E-08  1.08091E-07  3.69656E-08 -1.02845E-08 -7.97718E-09
 13.600  1.74754E-08  2.96733E-08  2.27223E-08  1.52448E-08  1.26603E-08  5.85323E-08  8.29987E-08  3.11799E-08 -4.88843E-09 -4.49836E-09
 13.700  1.46788E-08  2.56356E-08  2.09420E-08  1.49139E-08  1.20889E-08  4.40418E-08  6.36598E-08  2.61781E-08 -1.19264E-09 -1.98007E-09
 13.800  1.23056E-08  2.20246E-08  1.89640E-08  1.41195E-08  1.12568E-08  3.30938E-08  4.87827E-08  2.18721E-08  1.21907E-09 -2.28527E-10
 13.900  1.02846E-08  1.88021E-08  1.69012E-08  1.30209E-08  1.02614E-08  2.48400E-08  3.73540E-08  1.81814E-08  2.68189E-09  9.25844E-10
 14.000  8.56117E-09  1.59396E-08  1.48440E-08  1.17473E-08  9.18236E-09  1.86284E-08  2.85831E-08  1.50326E-08  3.46138E-09  1.62735E-09
 14.100  7.09237E-09  1.34130E-08  1.28617E-08  1.04000E-08  8.08266E-09  1.39598E-08  2.18562E-08  1.23595E-08  3.76436E-09  1.99562E-09
 14.200  5.84355E-09  1.11999E-08  1.10038E-08  9.05523E-09  7.00954E-09  1.04546E-08  1.66991E-08  1.01025E-08  3.74882E-09  2.12740E-09
 14.300  4.78588E-09  9.27799E-09  9.30251E-09  7.76719E-09  5.99648E-09  7.82449E-09  1.27465E-08  8.20767E-09  3.53288E-09  2.09889E-09
 14.400  3.89465E-09  7.62416E-09  7.77583E-09  6.57199E-09  5.06535E-09  5.85204E-09  9.71783E-09  6.62667E-09  3.20267E-09  1.96858E-09
 14.500  3.14819E-09  6.21443E-09  6.43006E-09  5.49099E-09  4.22847E-09  4.37327E-09  7.39784E-09  5.31602E-09  2.81913E-09  1.78003E-09
 14.600  2.52720E-09  5.02433E-09  5.26271E-09  4.53413E-09  3.49071E-09  3.26491E-09  5.62158E-09  4.23680E-09  2.42375E-09  1.56460E-09
 14.700  2.01434E-09  4.02933E-09  4.26488E-09  3.70280E-09  2.85134E-09  2.43444E-09  4.26265E-09  3.35432E-09  2.04330E-09  1.34397E-09
 14.800  1.59404E-09  3.20543E-09  3.42347E-09  2.99236E-09  2.30571E-09  1.81247E-09  3.22413E-09  2.63786E-09  1.69373E-09  1.13227E-09
 14.900  1.25229E-09  2.52972E-09  2.72288E-09  2.39422E-09  1.84657E-09  1.34695E-09  2.43166E-09  2.06042E-09  1.38324E-09  9.38023E-10
 15.000  9.76659E-10  1.98074E-09  2.14644E-09  1.89742E-09  1.46518E-09  9.98842E-10  1.82810E-09  1.59846E-09  1.11468E-09  7.65605E-10
 15.100  7.56156E-10  1.53882E-09  1.67746E-09  1.48996E-09  1.15218E-09  7.38865E-10  1.36949E-09  1.23164E-09  8.87391E-10  6.16538E-10
 15.200  5.81192E-10  1.18633E-09  1.29996E-09  1.15969E-09  8.98229E-10  5.45017E-10  1.02198E-09  9.42533E-10  6.98540E-10  4.90427E-10
 15.300  4.43489E-10  9.07645E-10  9.99182E-10  8.94923E-10  6.94379E-10  4.00767E-10  7.59501E-10  7.16383E-10  5.44131E-10  3.85695E-10
 15.400  3.35987E-10  6.89241E-10  7.61879E-10  6.84891E-10  5.32418E-10  2.93682E-10  5.61962E-10  5.40803E-10  4.19681E-10  3.00119E-10
 15.500  2.52735E-10  5.19534E-10  5.76410E-10  5.19935E-10  4.04991E-10  2.14409E-10  4.13882E-10  4.05498E-10  3.20672E-10  2.31200E-10
 15.600  1.88771E-10  3.88767E-10  4.32767E-10  3.91613E-10  3.05674E-10  1.55909E-10  3.03355E-10  3.02002E-10  2.42836E-10  1.76421E-10
 15.700  1.40013E-10  2.88830E-10  3.22494E-10  2.92703E-10  2.28964E-10  1.12891E-10  2.21236E-10  2.23419E-10  1.82321E-10  1.33405E-10
 15.800  1.03131E-10  2.13066E-10  2.38559E-10  2.17138E-10  1.70232E-10  8.13794E-11  1.60518E-10  1.64187E-10  1.35758E-10  1.00004E-10
 15.900  7.54455E-11  1.56081E-10  1.75200E-10  1.59900E-10  1.25645E-10  5.83921E-11  1.15851E-10  1.19863E-10  1.00282E-10  7.43397E-11
 16.000  5.48191E-11  1.13550E-10  1.27760E-10  1.16904E-10  9.20738E-11  4.16972E-11  8.31650E-11  8.69324E-11  7.35043E-11  5.48165E-11
 16.100  3.95655E-11  8.20477E-11  9.25176E-11  8.48667E-11  6.69992E-11  2.96286E-11  5.93755E-11  6.26401E-11  5.34720E-11  4.01047E-11
 16.200  2.83675E-11  5.88879E-11  6.65385E-11  6.11821E-11  4.84169E-11  2.09465E-11  4.21571E-11  4.48456E-11  3.86142E-11  2.91186E-11
 16.300  2.02057E-11  4.19858E-11  4.75318E-11  4.38068E-11  3.47508E-11  1.47322E-11  2.97650E-11  3.19012E-11  2.76852E-11  2.09855E-11
 16.400  1.42990E-11  2.97392E-11  3.37289E-11  3.11554E-11  2.47753E-11  1.03071E-11  2.08976E-11  2.25496E-11  1.97105E-11  1.50149E-11
 16.500  1.00543E-11  2.09287E-11  2.37774E-11  2.20113E-11  1.75468E-11  7.17287E-12  1.45891E-11  1.58393E-11  1.39365E-11  1.06671E-11
 16.600  7.02479E-12  1.46344E-11  1.66537E-11  1.54496E-11  1.23465E-11  4.96489E-12  1.01273E-11  1.10567E-11  9.78754E-12  7.52586E-12
 16.700  4.87736E-12  1.01684E-11  1.15897E-11  1.07743E-11  8.63162E-12  3.41797E-12  6.99016E-12  7.67055E-12  6.82822E-12  5.27362E-12
 16.800  3.36536E-12  7.02124E-12  8.01474E-12  7.46605E-12  5.99623E-12  2.34020E-12  4.79740E-12  5.28889E-12  4.73262E-12  3.67077E-12
 16.900  2.30782E-12  4.81816E-12  5.50795E-12  5.14118E-12  4.13937E-12  1.59351E-12  3.27379E-12  3.62462E-12  3.25911E-12  2.53834E-12
 17.000  1.57296E-12  3.28613E-12  3.76188E-12  3.51831E-12  2.83982E-12  1.07911E-12  2.22139E-12  2.46911E-12  2.23018E-12  1.74394E-12
 17.100  1.06564E-12  2.22767E-12  2.55367E-12  2.39297E-12  1.93632E-12  7.26745E-13  1.49876E-12  1.67195E-12  1.51656E-12  1.19054E-12
 17.200  7.17628E-13  1.50108E-12  1.72304E-12  1.61770E-12  1.31227E-12  4.86746E-13  1.00550E-12  1.12545E-12  1.02493E-12  8.07653E-13
 17.300  4.80407E-13  1.00547E-12  1.15564E-12  1.08704E-12  8.84005E-13  3.24210E-13  6.70778E-13  7.53142E-13  6.88461E-13  5.44516E-13
 17.400  3.19716E-13  6.69533E-13  7.70502E-13  7.26117E-13  5.91965E-13  2.14762E-13  4.44972E-13  5.01061E-13  4.59664E-13  3.64867E-13
 17.500  2.11536E-13  4.43234E-13  5.10706E-13  4.82174E-13  3.94069E-13  1.41481E-13  2.93530E-13  3.31428E-13  3.05076E-13  2.43013E-13
 17.600  1.39152E-13  2.91726E-13  3.36542E-13  3.18319E-13  2.60799E-13  9.26951E-14  1.92552E-13  2.17967E-13  2.01284E-13  1.60887E-13
 17.700  9.10134E-14  1.90905E-13  2.20495E-13  2.08932E-13  1.71601E-13  6.04000E-14  1.25612E-13  1.42532E-13  1.32029E-13  1.05887E-13
 17.800  5.91897E-14  1.24217E-13  1.43638E-13  1.36349E-13  1.12262E-13  3.91425E-14  8.14919E-14  9.26781E-14  8.61019E-14  6.92815E-14
 17.900  3.82766E-14  8.03691E-14  9.30414E-14  8.84756E-14  7.30247E-14  2.52288E-14  5.25782E-14  5.99235E-14  5.58294E-14  4.50681E-14
 18.000  2.46142E-14  5.17078E-14  5.99287E-14  5.70876E-14  4.72331E-14  1.61731E-14  3.37380E-14  3.85294E-14  3.59949E-14  2.91490E-14
 18.100  1.57405E-14  3.30827E-14  3.83852E-14  3.66289E-14  3.03796E-14  1.03121E-14  2.15311E-14  2.46365E-14  2.30764E-14  1.87457E-14
 18.200  1.00104E-14  2.10495E-14  2.44503E-14  2.33716E-14  1.94310E-14  6.53978E-15  1.36665E-14  1.56665E-14  1.47118E-14  1.19874E-14
 18.300  6.33144E-15  1.33198E-14  1.54885E-14  1.48305E-14  1.23596E-14  4.12531E-15  8.62795E-15  9.90804E-15  9.32717E-15  7.62283E-15
 18.400  3.98276E-15  8.38261E-15  9.75794E-15  9.35917E-15  7.81848E-15  2.58843E-15  5.41784E-15  6.23221E-15  5.88085E-15  4.82049E-15
 18.500  2.49180E-15  5.24695E-15  6.11430E-15  5.87426E-15  4.91890E-15  1.61552E-15  3.38397E-15  3.89896E-15  3.68769E-15  3.03158E-15
 18.600  1.55062E-15  3.26659E-15  3.81057E-15  3.66706E-15  3.07792E-15  1.00298E-15  2.10241E-15  2.42618E-15  2.29990E-15  1.89613E-15
 18.700  9.59785E-16  2.02282E-15  2.36213E-15  2.27691E-15  1.91559E-15  6.19429E-16  1.29932E-15  1.50168E-15  1.42666E-15  1.17952E-15
 18.800  5.90927E-16  1.24597E-15  1.45647E-15  1.40622E-15  1.18583E-15  3.80554E-16  7.98780E-16  9.24543E-16  8.80240E-16  7.29786E-16
 18.900  3.61909E-16  7.63418E-16  8.93298E-16  8.63880E-16  7.30173E-16  2.32583E-16  4.88502E-16  5.66218E-16  5.40219E-16  4.49113E-16
 19.000  2.20486E-16  4.65299E-16  5.45009E-16  5.27909E-16  4.47228E-16  1.41413E-16  2.97197E-16  3.44954E-16  3.29791E-16  2.74916E-16
 19.100  1.33627E-16  2.82118E-16  3.30777E-16  3.20911E-16  2.72486E-16  8.55374E-17  1.79875E-16  2.09060E-16  2.00273E-16  1.67396E-16
 19.200  8.05662E-17  1.70165E-16  1.99712E-16  1.94062E-16  1.65152E-16  5.14743E-17  1.08307E-16  1.26045E-16  1.20986E-16  1.01391E-16
 19.300  4.83242E-17  1.02109E-16  1.19957E-16  1.16746E-16  9.95776E-17  3.08179E-17  6.48806E-17  7.56028E-17  7.27086E-17  6.10916E-17
 19.400  2.88366E-17  6.09569E-17  7.16811E-17  6.98714E-17  5.97293E-17  1.83571E-17  3.86681E-17  4.51146E-17  4.34701E-17  3.66186E-17
 19.500  1.71199E-17  3.62041E-17  4.26145E-17  4.16029E-17  3.56429E-17  1.08793E-17  2.29288E-17  2.67840E-17  2.58559E-17  2.18360E-17
 19.600  1.01123E-17  2.13934E-17  2.52055E-17  2.46449E-17  2.11607E-17  6.41509E-18  1.35273E-17  1.58206E-17  1.53005E-17  1.29541E-17
 19.700  5.94285E-18  1.25777E-17  1.48329E-17  1.45251E-17  1.24989E-17  3.76376E-18  7.94057E-18  9.29764E-18  9.00822E-18  7.64568E-18
 19.800  3.47497E-18  7.35752E-18  8.68487E-18  8.51751E-18  7.34518E-18  2.19718E-18  4.63780E-18  5.43665E-18  5.27680E-18  4.48963E-18
 19.900  2.02175E-18  4.28233E-18  5.05959E-18  4.96953E-18  4.29474E-18  1.27627E-18  2.69526E-18  3.16308E-18  3.07547E-18  2.62302E-18
  67 178 200   0.100
  0.000  5.72797E-02 -2.94801E-16 -4.16334E-16 -8.50630E-16  4.57757E-16  9.29424E-02 -4.65475E-16 -7.28584E-16 -1.01325E-15  3.43318E-16
  0.100  5.72864E-02 -4.68929E-05 -3.54229E-08 -1.33923E-11 -3.66205E-15  9.29691E-02  8.64263E-05  8.25958E-08  3.57429E-11  7.48146E-15
  0.200  5.73067E-02 -1.85029E-04 -5.61582E-07 -8.50082E-10 -8.41986E-13  9.30473E-02  3.40604E-04  1.30678E-06  2.26494E-09  2.32982E-12
  0.300  5.73410E-02 -4.06906E-04 -2.79972E-06 -9.55131E-09 -2.13051E-11  9.31721E-02  7.47543E-04  6.49280E-06  2.53730E-08  5.86822E-11
  0.400  5.73901E-02 -7.00439E-04 -8.65986E-06 -5.26459E-08 -2.08702E-10  9.33355E-02  1.28328E-03  1.99884E-05  1.39278E-07  5.73230E-10
  0.500  5.74546E-02 -1.04956E-03 -2.05623E-05 -1.95930E-07 -1.21324E-09  9.35272E-02  1.91632E-03  4.71749E-05  5.15624E-07  3.32031E-09
  0.600  5.75356E-02 -1.43505E-03 -4.12059E-05 -5.67628E-07 -5.05981E-09  9.37354E-02  2.60957E-03  9.38435E-05  1.48433E-06  1.37869E-08
  0.700  5.76339E-02 -1.83545E-03 -7.33001E-05 -1.38104E-06 -1.67512E-08  9.39476E-02  3.32255E-03  1.65500E-04  3.58461E-06  4.54116E-08
  0.800  5.77501E-02 -2.22821E-03 -1.19281E-04 -2.95253E-06 -4.67657E-08  9.41516E-02  4.01382E-03  2.66664E-04  7.59892E-06  1.26050E-07
  0.900  5.78847E-02 -2.59080E-03 -1.81034E-04 -5.71093E-06 -1.14475E-07  9.43362E-02  4.64340E-03  4.00228E-04  1.45598E-05  3.06581E-07
  1.000  5.80374E-02 -2.90185E-03 -2.59637E-04 -1.01951E-05 -2.52323E-07  9.44919E-02  5.17510E-03  5.66939E-04  2.57226E-05  6.71052E-07
  1.100  5.82076E-02 -3.14225E-03 -3.55160E-04 -1.70379E-05 -5.10415E-07  9.46119E-02  5.57858E-03  7.65045E-04  4.25027E-05  1.34727E-06
  1.200  5.83940E-02 -3.29614E-03 -4.66525E-04 -2.69352E-05 -9.60974E-07  9.46920E-02  5.83106E-03  9.90151E-04  6.63767E-05  2.51628E-06
  1.300  5.85946E-02 -3.35168E-03 -5.91437E-04 -4.06024E-05 -1.70200E-06  9.47309E-02  5.91843E-03  1.23529E-03  9.87569E-05  4.41910E-06
  1.400  5.88066E-02 -3.30172E-03 -7.26410E-04 -5.87191E-05 -2.85943E-06  9.47302E-02  5.83603E-03  1.49119E-03  1.40847E-04  7.35890E-06
  1.500  5.90267E-02 -3.14411E-03 -8.66873E-04 -8.18675E-05 -4.58718E-06  9.46940E-02  5.58864E-03  1.74682E-03  1.93494E-04  1.16973E-05
  1.600  5.92507E-02 -2.88183E-03 -1.00736E-03 -1.10469E-04 -7.06448E-06  9.46287E-02  5.19007E-03  1.98994E-03  2.57046E-04  1.78441E-05
  1.700  5.94744E-02 -2.52282E-03 -1.14179E-03 -1.44722E-04 -1.04905E-05  9.45420E-02  4.66221E-03  2.20795E-03  3.31231E-04  2.62400E-05
  1.800  5.96928E-02 -2.07959E-03 -1.26373E-03 -1.84553E-04 -1.50758E-05  9.44428E-02  4.03354E-03  2.38868E-03  4.15079E-04  3.73326E-05
  1.900  5.99012E-02 -1.56858E-03 -1.36683E-03 -2.29577E-04 -2.10323E-05  9.43400E-02  3.33742E-03  2.52116E-03  5.06868E-04  5.15483E-05
  2.000  6.00950E-02 -1.00930E-03 -1.44511E-03 -2.79074E-04 -2.85600E-05  9.42421E-02  2.61005E-03  2.59647E-03  6.04139E-04  6.92593E-05
  2.100  6.02698E-02 -4.23390E-04 -1.49336E-03 -3.31990E-04 -3.78347E-05  9.41570E-02  1.88837E-03  2.60832E-03  7.03747E-04  9.07508E-05
  2.200  6.04221E-02  1.66489E-04 -1.50745E-03 -3.86953E-04 -4.89948E-05  9.40906E-02  1.20793E-03  2.55358E-03  8.01967E-04  1.16187E-04
  2.300  6.05493E-02  7.37721E-04 -1.48461E-03 -4.42310E-04 -6.21301E-05  9.40472E-02  6.00932E-04  2.43256E-03  8.94650E-04  1.45583E-04
  2.400  6.06495E-02  1.26884E-03 -1.42360E-03 -4.96183E-04 -7.72722E-05  9.40293E-02  9.44893E-05  2.24912E-03  9.77408E-04  1.78774E-04
  2.500  6.07223E-02  1.74051E-03 -1.32486E-03 -5.46529E-04 -9.43891E-05  9.40369E-02 -2.90757E-04  2.01054E-03  1.04584E-03  2.15402E-04
  2.600  6.07682E-02  2.13647E-03 -1.19054E-03 -5.91225E-04 -1.13381E-04  9.40680E-02 -5.41605E-04  1.72712E-03  1.09577E-03  2.54897E-04
  2.700  6.07891E-02  2.44417E-03 -1.02443E-03 -6.28140E-04 -1.34082E-04  9.41187E-02 -6.52789E-04  1.41167E-03  1.12351E-03  2.96473E-04
  2.800  6.07876E-02  2.65538E-03 -8.31876E-04 -6.55219E-04 -1.56261E-04  9.41832E-02 -6.26989E-04  1.07875E-03  1.12608E-03  3.39133E-04
  2.900  6.07672E-02  2.76653E-03 -6.19561E-04 -6.70562E-04 -1.79628E-04  9.42543E-02 -4.74345E-04  7.43811E-04  1.10146E-03  3.81682E-04
  3.000  6.07321E-02  2.77880E-03 -3.95261E-04 -6.72499E-04 -2.03839E-04  9.43237E-02 -2.11516E-04  4.22212E-04  1.04878E-03  4.22750E-04
  3.100  6.06863E-02  2.69808E-03 -1.67561E-04 -6.59650E-04 -2.28501E-04  9.43823E-02  1.39662E-04  1.28274E-04  9.68491E-04  4.60831E-04
  3.200  6.06338E-02  2.53472E-03  5.44627E-05 -6.30990E-04 -2.53176E-04  9.44204E-02  5.53828E-04 -1.25689E-04  8.62420E-04  4.94337E-04
  3.300  6.05779E-02  2.30309E-03  2.61570E-04 -5.85898E-04 -2.77386E-04  9.44283E-02  1.00397E-03 -3.30220E-04  7.33824E-04  5.21656E-04
  3.400  6.05207E-02  2.02103E-03  4.44690E-04 -5.24200E-04 -3.00611E-04  9.43967E-02  1.46341E-03 -4.79417E-04  5.87318E-04  5.41240E-04
  3.500  6.04630E-02  1.70913E-03  5.95242E-04 -4.46204E-04 -3.22294E-04  9.43163E-02  1.90771E-03 -5.71421E-04  4.28728E-04  5.51690E-04
  3.600  6.04040E-02  1.38999E-03  7.05445E-04 -3.52733E-04 -3.41832E-04  9.41787E-02  2.31650E-03 -6.08652E-04  2.64852E-04  5.51862E-04
  3.700  6.03406E-02  1.08731E-03  7.68601E-04 -2.45143E-04 -3.58589E-04  9.39760E-02  2.67497E-03 -5.97767E-04  1.03141E-04  5.40966E-04
  3.800  6.02677E-02  8.25061E-04  7.79359E-04 -1.25331E-04 -3.71887E-04  9.37012E-02  2.97502E-03 -5.49323E-04 -4.86963E-05  5.18670E-04
  3.900  6.01782E-02  6.26537E-04  7.33939E-04  4.27079E-06 -3.81028E-04  9.33479E-02  3.21590E-03 -4.77166E-04 -1.83139E-04  4.85181E-04
  4.000  6.00627E-02  5.13483E-04  6.30323E-04  1.40713E-04 -3.85299E-04  9.29106E-02  3.40441E-03 -3.97564E-04 -2.93324E-04  4.41313E-04
  4.100  5.99101E-02  5.05227E-04  4.68400E-04  2.80580E-04 -3.84002E-04  9.23840E-02  3.55450E-03 -3.28140E-04 -3.73507E-04  3.88516E-04
  4.200  5.97077E-02  6.17891E-04  2.50056E-04  4.20052E-04 -3.76483E-04  9.17633E-02  3.68632E-03 -2.86678E-04 -4.19487E-04  3.28865E-04
  4.300  5.94416E-02  8.63677E-04 -2.07968E-05  5.55011E-04 -3.62170E-04  9.10439E-02  3.82485E-03 -2.89871E-04 -4.28946E-04  2.65002E-04
  4.400  5.90973E-02  1.25028E-03 -3.38257E-04  6.81161E-04 -3.40620E-04  9.02212E-02  3.99814E-03 -3.52114E-04 -4.01685E-04  2.00033E-04
  4.500  5.86599E-02  1.78041E-03 -6.94556E-04  7.94181E-04 -3.11565E-04  8.92901E-02  4.23518E-03 -4.84420E-04 -3.39720E-04  1.37374E-04
  4.600  5.81153E-02  2.45157E-03 -1.08026E-03  8.89905E-04 -2.74956E-04  8.82455E-02  4.56379E-03 -6.93550E-04 -2.47228E-04  8.05594E-05
  4.700  5.74501E-02  3.25586E-03 -1.48456E-03  9.64506E-04 -2.31005E-04  8.70816E-02  5.00835E-03 -9.81421E-04 -1.30340E-04  3.30285E-05
  4.800  5.66524E-02  4.18016E-03 -1.89561E-03  1.01469E-03 -1.80214E-04  8.57922E-02  5.58787E-03 -1.34484E-03  3.21897E-06 -2.10618E-06
  4.900  5.57125E-02  5.20639E-03 -2.30102E-03  1.03790E-03 -1.23391E-04  8.43708E-02  6.31420E-03 -1.77560E-03  1.44603E-04 -2.22785E-05
  5.000  5.46227E-02  6.31206E-03 -2.68829E-03  1.03243E-03 -6.16442E-05  8.28106E-02  7.19086E-03 -2.26090E-03  2.84418E-04 -2.56632E-05
  5.100  5.33786E-02  7.47097E-03 -3.04532E-03  9.97628E-04  3.63747E-06  8.11050E-02  8.21226E-03 -2.78413E-03  4.13338E-04 -1.13262E-05
  5.200  5.19783E-02  8.65413E-03 -3.36099E-03  9.33921E-04  7.08321E-05  7.92480E-02  9.36359E-03 -3.32583E-03  5.22717E-04  2.06838E-05
  5.300  5.04235E-02  9.83081E-03 -3.62559E-03  8.42866E-04  1.38146E-04  7.72345E-02  1.06213E-02 -3.86493E-03  6.05157E-04  6.93126E-05
  5.400  4.87189E-02  1.09696E-02 -3.83127E-03  7.27110E-04  2.03694E-04  7.50608E-02  1.19540E-02 -4.38004E-03  6.54977E-04  1.32549E-04
  5.500  4.68723E-02  1.20399E-02 -3.97241E-03  5.90293E-04  2.65588E-04  7.27254E-02  1.33242E-02 -4.85069E-03  6.68560E-04  2.07545E-04
  5.600  4.48948E-02  1.30125E-02 -4.04583E-03  4.36892E-04  3.22034E-04  7.02294E-02  1.46903E-02 -5.25857E-03  6.44537E-04  2.90795E-04
  5.700  4.28001E-02  1.38615E-02 -4.05090E-03  2.72014E-04  3.71422E-04  6.75767E-02  1.60084E-02 -5.58847E-03  5.83811E-04  3.78356E-04
  5.800  4.06046E-02  1.45646E-02 -3.98954E-03  1.01149E-04  4.12414E-04  6.47749E-02  1.72350E-02 -5.82914E-03  4.89420E-04  4.66109E-04
  5.900  3.83266E-02  1.51044E-02 -3.86604E-03 -7.00939E-05  4.44006E-04  6.18351E-02  1.83291E-02 -5.97366E-03  3.66257E-04  5.50008E-04
  6.000  3.59862E-02  1.54687E-02 -3.68680E-03 -2.36254E-04  4.65582E-04  5.87720E-02  1.92542E-02 -6.01969E-03  2.20666E-04  6.26332E-04
  6.100  3.36049E-02  1.56510E-02 -3.45992E-03 -3.92279E-04  4.76934E-04  5.56040E-02  1.99802E-02 -5.96930E-03  5.99715E-05  6.91891E-04
  6.200  3.12046E-02  1.56506E-02 -3.19479E-03 -5.33744E-04  4.78261E-04  5.23528E-02  2.04846E-02 -5.82859E-03 -1.08037E-04  7.44196E-04
  6.300  2.88075E-02  1.54723E-02 -2.90152E-03 -6.57037E-04  4.70147E-04  4.90430E-02  2.07536E-02 -5.60706E-03 -2.75617E-04  7.81560E-04
  6.400  2.64355E-02  1.51264E-02 -2.59050E-03 -7.59481E-04  4.53510E-04  4.57013E-02  2.07819E-02 -5.31685E-03 -4.35537E-04  8.03145E-04
  6.500  2.41095E-02  1.46273E-02 -2.27186E-03 -8.39401E-04  4.29539E-04  4.23560E-02  2.05732E-02 -4.97186E-03 -5.81469E-04  8.08945E-04
  6.600  2.18492E-02  1.39934E-02 -1.95505E-03 -8.96131E-04  3.99619E-04  3.90359E-02  2.01393E-02 -4.58687E-03 -7.08290E-04  7.99714E-04
  6.700  1.96724E-02  1.32461E-02 -1.64846E-03 -9.29959E-04  3.65243E-04  3.57697E-02  1.94989E-02 -4.17669E-03 -8.12265E-04  7.76851E-04
  6.800  1.75948E-02  1.24083E-02 -1.35916E-03 -9.42033E-04  3.27935E-04  3.25849E-02  1.86765E-02 -3.75540E-03 -8.91125E-04  7.42255E-04
  6.900  1.56297E-02  1.15039E-02 -1.09271E-03 -9.34216E-04  2.89168E-04  2.95070E-02  1.77012E-02 -3.33576E-03 -9.44036E-04  6.98158E-04
  7.000  1.37877E-02  1.05568E-02 -8.53095E-04 -9.08931E-04  2.50303E-04  2.65591E-02  1.66044E-02 -2.92872E-03 -9.71483E-04  6.46966E-04
  7.100  1.20766E-02  9.58976E-03 -6.42733E-04 -8.68975E-04  2.12529E-04  2.37608E-02  1.54189E-02 -2.54317E-03 -9.75081E-04  5.91094E-04
  7.200  1.05016E-02  8.62390E-03 -4.62597E-04 -8.17353E-04  1.76831E-04  2.11283E-02  1.41771E-02 -2.18578E-03 -9.57339E-04  5.32842E-04
  7.300  9.06505E-03  7.67799E-03 -3.12365E-04 -7.57103E-04  1.43968E-04  1.86738E-02  1.29100E-02 -1.86105E-03 -9.21399E-04  4.74275E-04
  7.400  7.76679E-03  6.76806E-03 -1.90645E-04 -6.91162E-04  1.14468E-04  1.64053E-02  1.16457E-02 -1.57145E-03 -8.70779E-04  4.17157E-04
  7.500  6.60432E-03  5.90713E-03 -9.52106E-05 -6.22237E-04  8.86373E-05  1.43270E-02  1.04090E-02 -1.31766E-03 -8.09125E-04  3.62900E-04
  7.600  5.57308E-03  5.10516E-03 -2.32506E-05 -5.52724E-04  6.65801E-05  1.24393E-02  9.22072E-03 -1.09887E-03 -7.39998E-04  3.12550E-04
  7.700  4.66678E-03  4.36904E-03  2.83910E-05 -4.84647E-04  4.82286E-05  1.07393E-02  8.09740E-03 -9.13127E-04 -6.66707E-04  2.66799E-04
  7.800  3.87772E-03  3.70283E-03  6.30012E-05 -4.19632E-04  3.33762E-05  9.22110E-03  7.05139E-03 -7.57643E-04 -5.92176E-04  2.26016E-04
  7.900  3.19719E-03  3.10805E-03  8.38147E-05 -3.58900E-04  2.17139E-05  7.87615E-03  6.09096E-03 -6.29128E-04 -5.18871E-04  1.90293E-04
  8.000  2.61579E-03  2.58395E-03  9.38700E-05 -3.03291E-04  1.28658E-05  6.69409E-03  5.22065E-03 -5.24057E-04 -4.48756E-04  1.59496E-04
  8.100  2.12374E-03  2.12801E-03  9.59049E-05 -2.53299E-04  6.42123E-06  5.66311E-03  4.44172E-03 -4.38896E-04 -3.83292E-04  1.33324E-04
  8.200  1.71125E-03  1.73627E-03  9.22927E-05 -2.09119E-04  1.96322E-06  4.77048E-03  3.75269E-03 -3.70279E-04 -3.23473E-04  1.11363E-04
  8.300  1.36868E-03  1.40375E-03  8.50113E-05 -1.70697E-04 -9.09035E-07  4.00303E-03  3.14989E-03 -3.15132E-04 -2.69869E-04  9.31323E-05
  8.400  1.08683E-03  1.12482E-03  7.56440E-05 -1.37791E-04 -2.56334E-06  3.34755E-03  2.62802E-03 -2.70745E-04 -2.22689E-04  7.81295E-05
  8.500  8.57075E-04  8.93555E-04  6.54014E-05 -1.10019E-04 -3.32336E-06  2.79116E-03  2.18063E-03 -2.34807E-04 -1.81857E-04  6.58589E-05
  8.600  6.71488E-04  7.03963E-04  5.51607E-05 -8.69060E-05 -3.46277E-06  2.32156E-03  1.80062E-03 -2.05407E-04 -1.47074E-04  5.58570E-05
  8.700  5.22909E-04  5.50237E-04  4.55137E-05 -6.79317E-05 -3.20367E-06  1.92725E-03  1.48061E-03 -1.81009E-04 -1.17889E-04  4.77068E-05
  8.800  4.04985E-04  4.26918E-04  3.68195E-05 -5.25588E-05 -2.71867E-06  1.59768E-03  1.21327E-03 -1.60416E-04 -9.37556E-05  4.10461E-05
  8.900  3.12166E-04  3.29007E-04  2.92564E-05 -4.02625E-05 -2.13535E-06  1.32331E-03  9.91541E-04 -1.42717E-04 -7.40772E-05  3.55694E-05
  9.000  2.39683E-04  2.52032E-04  2.28693E-05 -3.05487E-05 -1.54238E-06  1.09564E-03  8.08854E-04 -1.27241E-04 -5.82503E-05  3.10255E-05
  9.100  1.83496E-04  1.92081E-04  1.76125E-05 -2.29675E-05 -9.96366E-07  9.07221E-04  6.59198E-04 -1.13503E-04 -4.56906E-05  2.72133E-05
  9.200  1.40233E-04  1.45796E-04  1.33832E-05 -1.71197E-05 -5.28826E-07  7.51578E-04  5.37206E-04 -1.01164E-04 -3.58541E-05  2.39745E-05
  9.300  1.07119E-04  1.10350E-04  1.00493E-05 -1.26600E-05 -1.52674E-07  6.23165E-04  4.38167E-04 -8.99906E-05 -2.82491E-05  2.11873E-05
  9.400  8.18990E-05  8.33984E-05  7.46899E-06 -9.29591E-06  1.32010E-07  5.17272E-04  3.58011E-04 -7.98229E-05 -2.24426E-05  1.87589E-05
  9.500  6.27659E-05  6.30350E-05  5.50451E-06 -6.78497E-06  3.33197E-07  4.29940E-04  2.93272E-04 -7.05524E-05 -1.80618E-05  1.66194E-05
  9.600  4.82891E-05  4.77287E-05  4.03031E-06 -4.92971E-06  4.63146E-07  3.57864E-04  2.41037E-04 -6.21026E-05 -1.47924E-05  1.47167E-05
  9.700  3.73490E-05  3.62687E-05  2.93763E-06 -3.57228E-06  5.35646E-07  2.98304E-04  1.98885E-04 -5.44167E-05 -1.23739E-05  1.30119E-05
  9.800  2.90791E-05  2.77101E-05  2.13575E-06 -2.58857E-06  5.64133E-07  2.49007E-04  1.64827E-04 -4.74485E-05 -1.05948E-05  1.14756E-05
  9.900  2.28154E-05  2.13244E-05  1.55147E-06 -1.88257E-06  5.60570E-07  2.08124E-04  1.37241E-04 -4.11572E-05 -9.28598E-06  1.00858E-05
 10.000  1.80539E-05  1.65561E-05  1.12737E-06 -1.38108E-06  5.34898E-07  1.74145E-04  1.14818E-04 -3.55045E-05 -8.31484E-06  8.82557E-06
 10.100  1.44148E-05  1.29861E-05  8.19466E-07 -1.02901E-06  4.94917E-07  1.45838E-04  9.65051E-05 -3.04523E-05 -7.57932E-06  7.68189E-06
 10.200  1.16141E-05  1.03004E-05  5.94808E-07 -7.85359E-07  4.46444E-07  1.22204E-04  8.14665E-05 -2.59623E-05 -7.00253E-06  6.64452E-06
 10.300  9.44029E-06  8.26589E-06  4.29195E-07 -6.19867E-07  3.93622E-07  1.02427E-04  6.90378E-05 -2.19958E-05 -6.52800E-06  5.70529E-06
 10.400  7.73655E-06  6.71044E-06  3.05164E-07 -5.10311E-07  3.39292E-07  8.58451E-05  5.86957E-05 -1.85139E-05 -6.11546E-06  4.85758E-06
 10.500  6.38692E-06  5.50754E-06  2.10345E-07 -4.40375E-07  2.85356E-07  7.19167E-05  5.00287E-05 -1.54776E-05 -5.73737E-06  4.09582E-06
 10.600  5.30576E-06  4.56469E-06  1.36140E-07 -3.98040E-07  2.33088E-07  6.02002E-05  4.27147E-05 -1.28485E-05 -5.37591E-06  3.41519E-06
 10.700  4.42977E-06  3.81451E-06  7.67081E-08 -3.74386E-07  1.83378E-07  5.03339E-05  3.65020E-05 -1.05884E-05 -5.02058E-06  2.81130E-06
 10.800  3.71216E-06  3.20810E-06  2.81920E-08 -3.62736E-07  1.36896E-07  4.20198E-05  3.11938E-05 -8.66027E-06 -4.66619E-06  2.27996E-06
 10.900  3.11826E-06  2.71017E-06 -1.18587E-08 -3.58061E-07  9.41929E-08  3.50122E-05  2.66364E-05 -7.02842E-06 -4.31131E-06  1.81698E-06
 11.000  2.62230E-06  2.29531E-06 -4.49262E-08 -3.56572E-07  5.57419E-08  2.91071E-05  2.27088E-05 -5.65859E-06 -3.95696E-06  1.41807E-06
 11.100  2.20504E-06  1.94532E-06 -7.18538E-08 -3.55454E-07  2.19429E-08  2.41347E-05  1.93158E-05 -4.51839E-06 -3.60568E-06  1.07872E-06
 11.200  1.85200E-06  1.64718E-06 -9.30955E-08 -3.52683E-07 -6.89564E-09  1.99527E-05  1.63810E-05 -3.57750E-06 -3.26080E-06  7.94212E-07
 11.300  1.55219E-06  1.39156E-06 -1.08905E-07 -3.46901E-07 -3.05828E-08  1.64416E-05  1.38427E-05 -2.80790E-06 -2.92588E-06  5.59618E-07
 11.400  1.29713E-06  1.17171E-06 -1.19473E-07 -3.37315E-07 -4.90693E-08  1.35001E-05  1.16503E-05 -2.18397E-06 -2.60434E-06  3.69861E-07
 11.500  1.08016E-06  9.82614E-07 -1.25023E-07 -3.23612E-07 -6.24616E-08  1.10425E-05  9.76113E-06 -1.68265E-06 -2.29920E-06  2.19795E-07
 11.600  8.95928E-07  8.20417E-07 -1.25870E-07 -3.05881E-07 -7.10236E-08  8.99552E-06  8.13863E-06 -1.28342E-06 -2.01293E-06  1.04301E-07
 11.700  7.40019E-07  6.82003E-07 -1.22451E-07 -2.84526E-07 -7.51644E-08  7.29662E-06  6.75100E-06 -9.68311E-07 -1.74740E-06  1.83889E-08
 11.800  6.08683E-07  5.64707E-07 -1.15319E-07 -2.60187E-07 -7.54141E-08  5.89216E-06  5.57005E-06 -7.21763E-07 -1.50382E-06 -4.27036E-08
 11.900  4.98667E-07  4.66135E-07 -1.05131E-07 -2.33655E-07 -7.23916E-08  4.73609E-06  4.57047E-06 -5.30531E-07 -1.28279E-06 -8.34260E-08
 12.000  4.07095E-07  3.84061E-07 -9.26138E-08 -2.05799E-07 -6.67674E-08  3.78885E-06  3.72941E-06 -3.83479E-07 -1.08437E-06 -1.07845E-07
 12.100  3.31393E-07  3.16381E-07 -7.85212E-08 -1.77496E-07 -5.92252E-08  3.01650E-06  3.02615E-06 -2.71376E-07 -9.08114E-07 -1.19597E-07
 12.200  2.69247E-07  2.61098E-07 -6.35968E-08 -1.49576E-07 -5.04274E-08  2.38997E-06  2.44195E-06 -1.86672E-07 -7.53185E-07 -1.21856E-07
 12.300  2.18577E-07  2.16333E-07 -4.85334E-08 -1.22773E-07 -4.09841E-08  1.88441E-06  1.95988E-06 -1.23274E-07 -6.18419E-07 -1.17329E-07
 12.400  1.77525E-07  1.80348E-07 -3.39415E-08 -9.76971E-08 -3.14305E-08  1.47867E-06  1.56474E-06 -7.63183E-08 -5.02418E-07 -1.08264E-07
 12.500  1.44449E-07  1.51562E-07 -2.03267E-08 -7.48183E-08 -2.22115E-08  1.15484E-06  1.24303E-06 -4.19696E-08 -4.03625E-07 -9.64758E-08
 12.600  1.17912E-07  1.28576E-07 -8.07606E-09 -5.44571E-08 -1.36742E-08  8.97803E-07  9.82825E-07 -1.72314E-08 -3.20392E-07 -8.33815E-08
 12.700  9.66772E-08  1.10174E-07  2.54532E-09 -3.67920E-08 -6.06705E-09  6.94914E-07  7.73714E-07  2.18331E-10 -2.51041E-07 -7.00453E-08
 12.800  7.96948E-08  9.53335E-08  1.13899E-08 -2.18714E-08  4.54415E-10  5.35636E-07  6.06698E-07  1.21676E-08 -1.93914E-07 -5.72271E-08
 12.900  6.60892E-08  8.32128E-08  1.84165E-08 -9.63268E-09  5.81787E-09  4.11260E-07  4.74078E-07  1.99875E-08 -1.47415E-07 -4.54323E-08
 13.000  5.51425E-08  7.31417E-08  2.36739E-08  7.63097E-11  1.00214E-08  3.14637E-07  3.69340E-07  2.47272E-08 -1.10041E-07 -3.49603E-08
 13.100  4.62753E-08  6.46018E-08  2.72823E-08  7.47408E-09  1.31189E-08  2.39941E-07  2.87031E-07  2.71897E-08 -8.03999E-08 -2.59497E-08
 13.200  3.90290E-08  5.72053E-08  2.94138E-08  1.28231E-08  1.52058E-08  1.82463E-07  2.22632E-07  2.79906E-08 -5.72305E-08 -1.84193E-08
 13.300  3.30459E-08  5.06730E-08  3.02729E-08  1.64093E-08  1.64047E-08  1.38420E-07  1.72435E-07  2.76028E-08 -3.94055E-08 -1.23029E-08
 13.400  2.80517E-08  4.48119E-08  3.00799E-08  1.85242E-08  1.68532E-08  1.04802E-07  1.33432E-07  2.63904E-08 -2.59345E-08 -7.47879E-09
 13.500  2.38390E-08  3.94947E-08  2.90559E-08  1.94511E-08  1.66933E-08  7.92277E-08  1.03200E-07  2.46338E-08 -1.59606E-08 -3.79370E-09
 13.600  2.02526E-08  3.46418E-08  2.74116E-08  1.94537E-08  1.60626E-08  5.98283E-08  7.98069E-08  2.25484E-08 -8.75330E-09 -1.08072E-09
 13.700  1.71771E-08  3.02062E-08  2.53389E-08  1.87689E-08  1.50891E-08  4.51470E-08  6.17253E-08  2.02981E-08 -3.69942E-09  8.27039E-10
 13.800  1.45269E-08  2.61612E-08  2.30053E-08  1.76027E-08  1.38861E-08  3.40562E-08  4.77547E-08  1.80062E-08 -2.91908E-10  2.08714E-09
 13.900  1.22375E-08  2.24913E-08  2.05514E-08  1.61283E-08  1.25503E-08  2.56880E-08  3.69590E-08  1.57628E-08  1.88200E-09  2.84197E-09
 14.000  1.02595E-08  1.91856E-08  1.80901E-08  1.44864E-08  1.11611E-08  1.93784E-08  2.86117E-08  1.36317E-08  3.15291E-09  3.21554E-09
 14.100  8.55405E-09  1.62335E-08  1.57081E-08  1.27870E-08  9.78098E-09  1.46220E-08  2.21516E-08  1.16552E-08  3.78113E-09  3.31241E-09
 14.200  7.08887E-09  1.36221E-08  1.34675E-08  1.11127E-08  8.45636E-09  1.10358E-08  1.71469E-08  9.85874E-09  3.96787E-09  3.21806E-09
 14.300  5.83653E-09  1.13353E-08  1.14095E-08  9.52220E-09  7.21978E-09  8.33054E-09  1.32655E-08  8.25416E-09  3.86553E-09  3.00028E-09
 14.400  4.77268E-09  9.35320E-09  9.55755E-09  8.05404E-09  6.09177E-09  6.28836E-09  1.02528E-08  6.84316E-09  3.58692E-09  2.71115E-09
 14.500  3.87523E-09  7.65310E-09  7.92073E-09  6.73047E-09  5.08310E-09  4.74553E-09  7.91282E-09  5.61988E-09  3.21332E-09  2.38926E-09
 14.600  3.12385E-09  6.20992E-09  6.49727E-09  5.56107E-09  4.19683E-09  3.57910E-09  6.09522E-09  4.57316E-09  2.80137E-09  2.06204E-09
 14.700  2.49973E-09  4.99733E-09  5.27748E-09  4.54595E-09  3.43029E-09  2.69677E-09  4.68389E-09  3.68843E-09  2.38888E-09  1.74794E-09
 14.800  1.98555E-09  3.98874E-09  4.24631E-09  3.67854E-09  2.77676E-09  2.02915E-09  3.58906E-09  2.94920E-09  1.99957E-09  1.45843E-09
 14.900  1.56548E-09  3.15809E-09  3.38554E-09  2.94787E-09  2.22691E-09  1.52405E-09  2.74108E-09  2.33830E-09  1.64694E-09  1.19973E-09
 15.000  1.22516E-09  2.48059E-09  2.67549E-09  2.34042E-09  1.76996E-09  1.14213E-09  2.08571E-09  1.83870E-09  1.33725E-09  9.74238E-10
 15.100  9.51771E-10  1.93319E-09  2.09630E-09  1.84154E-09  1.39459E-09  8.53643E-10  1.58059E-09  1.43423E-09  1.07188E-09  7.81758E-10
 15.200  7.33979E-10  1.49499E-09  1.62884E-09  1.43649E-09  1.08959E-09  6.36080E-10  1.19254E-09  1.10992E-09  8.49088E-10  6.20383E-10
 15.300  5.61917E-10  1.14735E-09  1.25538E-09  1.11116E-09  8.44330E-10  4.72344E-10  8.95565E-10  8.52313E-10  6.65284E-10  4.87213E-10
 15.400  4.27096E-10  8.73968E-10  9.59904E-10  8.52520E-10  6.49066E-10  3.49436E-10  6.69238E-10  6.49536E-10  5.15959E-10  3.78874E-10
 15.500  3.22312E-10  6.60832E-10  7.28310E-10  6.48909E-10  4.95079E-10  2.57458E-10  4.97547E-10  4.91319E-10  3.96304E-10  2.91874E-10
 15.600  2.41523E-10  4.96055E-10  5.48420E-10  4.90115E-10  3.74753E-10  1.88867E-10  3.67944E-10  3.68922E-10  3.01618E-10  2.22842E-10
 15.700  1.79722E-10  3.69707E-10  4.09907E-10  3.67389E-10  2.81560E-10  1.37915E-10  2.70621E-10  2.75023E-10  2.27552E-10  1.68675E-10
 15.800  1.32815E-10  2.73603E-10  3.04155E-10  2.73362E-10  2.09999E-10  1.00227E-10  1.97935E-10  2.03572E-10  1.70235E-10  1.26618E-10
 15.900  9.74814E-11  2.01078E-10  2.24078E-10  2.01929E-10  1.55504E-10  7.24768E-11  1.43955E-10  1.49632E-10  1.26326E-10  9.42852E-11
 16.000  7.10666E-11  1.46767E-10  1.63928E-10  1.48105E-10  1.14340E-10  5.21421E-11  1.04097E-10  1.09229E-10  9.30101E-11  6.96629E-11
 16.100  5.14648E-11  1.06403E-10  1.19099E-10  1.07871E-10  8.34918E-11  3.73164E-11  7.48406E-11  7.91952E-11  6.79610E-11  5.10813E-11
 16.200  3.70246E-11  7.66263E-11  8.59425E-11  7.80295E-11  6.05511E-11  2.65638E-11  5.34942E-11  5.70356E-11  4.92915E-11  3.71799E-11
 16.300  2.64629E-11  5.48203E-11  6.16028E-11  5.60630E-11  4.36194E-11  1.88072E-11  3.80133E-11  4.08056E-11  3.54933E-11  2.68667E-11
 16.400  1.87925E-11  3.89653E-11  4.38657E-11  4.00132E-11  3.12146E-11  1.32425E-11  2.68545E-11  2.90039E-11  2.53778E-11  1.92775E-11
 16.500  1.32605E-11  2.75183E-11  3.10330E-11  2.83715E-11  2.21920E-11  9.27284E-12  1.88604E-11  2.04828E-11  1.80203E-11  1.37365E-11
 16.600  9.29815E-12  1.93111E-11  2.18138E-11  1.99872E-11  1.56759E-11  6.45703E-12  1.31685E-11  1.43732E-11  1.27094E-11  9.72185E-12
 16.700  6.47920E-12  1.34668E-11  1.52364E-11  1.39910E-11  1.10028E-11  4.47116E-12  9.14070E-12  1.00226E-11  8.90429E-12  6.83474E-12
 16.800  4.48707E-12  9.33302E-12  1.05758E-11  9.73219E-12  7.67433E-12  3.07870E-12  6.30792E-12  6.94550E-12  6.19775E-12  4.77356E-12
 16.900  3.08851E-12  6.42853E-12  7.29550E-12  6.72771E-12  5.31956E-12  2.10801E-12  4.32778E-12  4.78352E-12  4.28621E-12  3.31249E-12
 17.000  2.11303E-12  4.40108E-12  5.00191E-12  4.62223E-12  3.66470E-12  1.43527E-12  2.95206E-12  3.27448E-12  2.94551E-12  2.28403E-12
 17.100  1.43700E-12  2.99497E-12  3.40867E-12  3.15640E-12  2.50934E-12  9.71754E-13  2.00207E-12  2.22800E-12  2.01156E-12  1.56502E-12
 17.200  9.71465E-13  2.02599E-12  2.30903E-12  2.14248E-12  1.70790E-12  6.54246E-13  1.35001E-12  1.50692E-12  1.36530E-12  1.06572E-12
 17.300  6.52892E-13  1.36244E-12  1.55488E-12  1.44562E-12  1.15552E-12  4.38022E-13  9.05137E-13  1.01320E-12  9.21038E-13  7.21292E-13
 17.400  4.36236E-13  9.10865E-13  1.04090E-12  9.69681E-13  7.77184E-13  2.91627E-13  6.03424E-13  6.77254E-13  6.17611E-13  4.85234E-13
 17.500  2.89794E-13  6.05443E-13  6.92775E-13  6.46642E-13  5.19672E-13  1.93083E-13  4.00014E-13  4.50072E-13  4.11689E-13  3.24484E-13
 17.600  1.91411E-13  4.00124E-13  4.58425E-13  4.28730E-13  3.45474E-13  1.27132E-13  2.63686E-13  2.97379E-13  2.72815E-13  2.15708E-13
 17.700  1.25711E-13  2.62931E-13  3.01619E-13  2.82625E-13  2.28351E-13  8.32479E-14  1.72852E-13  1.95369E-13  1.79738E-13  1.42559E-13
 17.800  8.20969E-14  1.71803E-13  1.97327E-13  1.85252E-13  1.50077E-13  5.42133E-14  1.12680E-13  1.27626E-13  1.17735E-13  9.36715E-14
 17.900  5.33150E-14  1.11631E-13  1.28371E-13  1.20744E-13  9.80769E-14  3.51128E-14  7.30503E-14  8.29049E-14  7.66818E-14  6.11963E-14
 18.000  3.44316E-14  7.21306E-14  8.30469E-14  7.82590E-14  6.37354E-14  2.26185E-14  4.70991E-14  5.35548E-14  4.96615E-14  3.97531E-14
 18.100  2.21141E-14  4.63505E-14  5.34285E-14  5.04416E-14  4.11884E-14  1.44915E-14  3.02019E-14  3.44041E-14  3.19824E-14  2.56783E-14
 18.200  1.41255E-14  2.96215E-14  3.41848E-14  3.23331E-14  2.64707E-14  9.23470E-15  1.92619E-14  2.19804E-14  2.04827E-14  1.64942E-14
 18.300  8.97372E-15  1.88275E-14  2.17531E-14  2.06123E-14  1.69189E-14  5.85338E-15  1.22187E-14  1.39666E-14  1.30456E-14  1.05363E-14
 18.400  5.67016E-15  1.19023E-14  1.37675E-14  1.30691E-14  1.07549E-14  3.69043E-15  7.70936E-15  8.82651E-15  8.26349E-15  6.69346E-15
 18.500  3.56358E-15  7.48397E-15  8.66655E-15  8.24167E-15  6.79969E-15  2.31443E-15  4.83836E-15  5.54817E-15  5.20597E-15  4.22902E-15
 18.600  2.22772E-15  4.68074E-15  5.42643E-15  5.16958E-15  4.27595E-15  1.44385E-15  3.02047E-15  3.46886E-15  3.26209E-15  2.65750E-15
 18.700  1.38527E-15  2.91201E-15  3.37965E-15  3.22536E-15  2.67456E-15  8.96025E-16  1.87570E-15  2.15732E-15  2.03311E-15  1.66098E-15
 18.800  8.56875E-16  1.80210E-15  2.09380E-15  2.00171E-15  1.66403E-15  5.53160E-16  1.15871E-15  1.33459E-15  1.26042E-15  1.03260E-15
 18.900  5.27262E-16  1.10940E-15  1.29037E-15  1.23576E-15  1.02985E-15  3.39724E-16  7.12066E-16  8.21301E-16  7.77269E-16  6.38543E-16
 19.000  3.22756E-16  6.79416E-16  7.91092E-16  7.58914E-16  6.34025E-16  2.07566E-16  4.35326E-16  5.02791E-16  4.76809E-16  3.92783E-16
 19.100  1.96549E-16  4.13933E-16  4.82484E-16  4.63649E-16  3.88300E-16  1.26169E-16  2.64769E-16  3.06210E-16  2.90970E-16  2.40345E-16
 19.200  1.19078E-16  2.50891E-16  2.92749E-16  2.81797E-16  2.36576E-16  7.63004E-17  1.60210E-16  1.85527E-16  1.76643E-16  1.46301E-16
 19.300  7.17742E-17  1.51291E-16  1.76717E-16  1.70391E-16  1.43393E-16  4.59080E-17  9.64486E-17  1.11832E-16  1.06685E-16  8.85946E-17
 19.400  4.30418E-17  9.07668E-17  1.06130E-16  1.02502E-16  8.64672E-17  2.74820E-17  5.77689E-17  6.70668E-17  6.41026E-17  5.33733E-17
 19.500  2.56809E-17  5.41796E-17  6.34152E-17  6.13482E-17  5.18743E-17  1.63688E-17  3.44267E-17  4.00167E-17  3.83206E-17  3.19898E-17
 19.600  1.52454E-17  3.21774E-17  3.77007E-17  3.65316E-17  3.09629E-17  9.70073E-18  2.04131E-17  2.37563E-17  2.27919E-17  1.90757E-17
 19.700  9.00504E-18  1.90145E-17  2.23008E-17  2.16443E-17  1.83878E-17  5.72032E-18  1.20434E-17  1.40324E-17  1.34876E-17  1.13173E-17
 19.800  5.29252E-18  1.11801E-17  1.31254E-17  1.27596E-17  1.08649E-17  3.35640E-18  7.07003E-18  8.24729E-18  7.94149E-18  6.68048E-18
 19.900  3.09512E-18  6.54096E-18  7.68670E-18  7.48439E-18  6.38768E-18  1.95963E-18  4.12988E-18  4.82309E-18  4.65260E-18  3.92363E-18
  67 179 200   0.100
  0.000  5.77299E-02 -3.02559E-16 -4.78784E-16 -3.50260E-16 -2.07421E-15  9.27249E-02 -4.80991E-16 -7.07767E-16 -7.50556E-16 -3.57622E-16
  0.100  5.77302E-02 -4.66308E-05 -3.64290E-08 -1.41710E-11 -6.05097E-15  9.27572E-02  7.97701E-05  8.02051E-08  3.65508E-11  8.71168E-15
  0.200  5.77316E-02 -1.84009E-04 -5.77665E-07 -8.99762E-10 -8.86803E-13  9.28523E-02  3.14247E-04  1.26908E-06  2.31732E-09  2.32924E-12
  0.300  5.77353E-02 -4.04718E-04 -2.88101E-06 -1.01137E-08 -2.24292E-11  9.30040E-02  6.89228E-04  6.30651E-06  2.59819E-08  5.88550E-11
  0.400  5.77431E-02 -6.96812E-04 -8.91619E-06 -5.57783E-08 -2.19754E-10  9.32027E-02  1.18202E-03  1.94189E-05  1.42790E-07  5.76014E-10
  0.500  5.77576E-02 -1.04442E-03 -2.11860E-05 -2.07747E-07 -1.27770E-09  9.34361E-02  1.76282E-03  4.58425E-05  5.29432E-07  3.34466E-09
  0.600  5.77817E-02 -1.42855E-03 -4.24933E-05 -6.02433E-07 -5.32977E-09  9.36899E-02  2.39657E-03  9.12179E-05  1.52689E-06  1.39300E-08
  0.700  5.78185E-02 -1.82803E-03 -7.56709E-05 -1.46740E-06 -1.76497E-08  9.39490E-02  3.04503E-03  1.60914E-04  3.69535E-06  4.60468E-08
  0.800  5.78709E-02 -2.22061E-03 -1.23294E-04 -3.14140E-06 -4.92901E-08  9.41984E-02  3.66915E-03  2.59338E-04  7.85294E-06  1.28340E-07
  0.900  5.79416E-02 -2.58406E-03 -1.87398E-04 -6.08578E-06 -1.20702E-07  9.44246E-02  4.23137E-03  3.89307E-04  1.50877E-05  3.13606E-07
  1.000  5.80329E-02 -2.89733E-03 -2.69216E-04 -1.08839E-05 -2.66174E-07  9.46160E-02  4.69784E-03  5.51520E-04  2.67358E-05  6.90005E-07
  1.100  5.81461E-02 -3.14155E-03 -3.68972E-04 -1.82262E-05 -5.38733E-07  9.47641E-02  5.04036E-03  7.44197E-04  4.43208E-05  1.39328E-06
  1.200  5.82818E-02 -3.30107E-03 -4.85724E-04 -2.88805E-05 -1.01495E-06  9.48636E-02  5.23802E-03  9.62917E-04  6.94572E-05  2.61853E-06
  1.300  5.84393E-02 -3.36418E-03 -6.17291E-04 -4.36479E-05 -1.79894E-06  9.49128E-02  5.27832E-03  1.20066E-03  1.03721E-04  4.62988E-06
  1.400  5.86170E-02 -3.32371E-03 -7.60266E-04 -6.33064E-05 -3.02488E-06  9.49136E-02  5.15777E-03  1.44808E-03  1.48496E-04  7.76600E-06
  1.500  5.88120E-02 -3.17739E-03 -9.10106E-04 -8.85479E-05 -4.85733E-06  9.48708E-02  4.88199E-03  1.69395E-03  2.04815E-04  1.24401E-05
  1.600  5.90204E-02 -2.92795E-03 -1.06131E-03 -1.19910E-04 -7.48875E-06  9.47921E-02  4.46525E-03  1.92581E-03  2.73193E-04  1.91326E-05
  1.700  5.92376E-02 -2.58293E-03 -1.20768E-03 -1.57712E-04 -1.11341E-05  9.46873E-02  3.92948E-03  2.13074E-03  3.53492E-04  2.83765E-05
  1.800  5.94579E-02 -2.15431E-03 -1.34260E-03 -2.01995E-04 -1.60226E-05  9.45673E-02  3.30293E-03  2.29615E-03  4.44802E-04  4.07338E-05
  1.900  5.96756E-02 -1.65788E-03 -1.45943E-03 -2.52481E-04 -2.23866E-05  9.44432E-02  2.61842E-03  2.41066E-03  5.45376E-04  5.67654E-05
  2.000  5.98847E-02 -1.11246E-03 -1.55183E-03 -3.08539E-04 -3.04485E-05  9.43263E-02  1.91142E-03  2.46488E-03  6.52609E-04  7.69942E-05
  2.100  6.00794E-02 -5.38910E-04 -1.61415E-03 -3.69179E-04 -4.04074E-05  9.42261E-02  1.21793E-03  2.45213E-03  7.63075E-04  1.01863E-04
  2.200  6.02544E-02  4.08411E-05 -1.64173E-03 -4.33061E-04 -5.24247E-05  9.41509E-02  5.72496E-04  2.36896E-03  8.72625E-04  1.31691E-04
  2.300  6.04054E-02  6.04886E-04 -1.63122E-03 -4.98523E-04 -6.66117E-05  9.41066E-02  6.24102E-06  2.21555E-03  9.76536E-04  1.66629E-04
  2.400  6.05290E-02  1.13236E-03 -1.58080E-03 -5.63633E-04 -8.30187E-05  9.40964E-02 -4.54782E-04  1.99581E-03  1.06972E-03  2.06613E-04
  2.500  6.06231E-02  1.60443E-03 -1.49031E-03 -6.26245E-04 -1.01627E-04  9.41209E-02 -7.90946E-04  1.71732E-03  1.14697E-03  2.51334E-04
  2.600  6.06870E-02  2.00510E-03 -1.36133E-03 -6.84081E-04 -1.22344E-04  9.41781E-02 -9.89990E-04  1.39097E-03  1.20325E-03  3.00197E-04
  2.700  6.07213E-02  2.32197E-03 -1.19718E-03 -7.34803E-04 -1.45001E-04  9.42632E-02 -1.04749E-03  1.03042E-03  1.23399E-03  3.52308E-04
  2.800  6.07280E-02  2.54673E-03 -1.00282E-03 -7.76104E-04 -1.69356E-04  9.43691E-02 -9.66877E-04  6.51378E-04  1.23538E-03  4.06462E-04
  2.900  6.07101E-02  2.67551E-03 -7.84676E-04 -8.05785E-04 -1.95093E-04  9.44868E-02 -7.58920E-04  2.70635E-04  1.20469E-03  4.61150E-04
  3.000  6.06714E-02  2.70904E-03 -5.50446E-04 -8.21842E-04 -2.21831E-04  9.46057E-02 -4.40831E-04 -9.48969E-05  1.14053E-03  5.14585E-04
  3.100  6.06161E-02  2.65258E-03 -3.08813E-04 -8.22535E-04 -2.49125E-04  9.47142E-02 -3.49259E-05 -4.29256E-04  1.04302E-03  5.64750E-04
  3.200  6.05485E-02  2.51570E-03 -6.91422E-05 -8.06464E-04 -2.76471E-04  9.48001E-02  4.33005E-04 -7.18467E-04  9.13987E-04  6.09464E-04
  3.300  6.04726E-02  2.31192E-03  1.58844E-04 -7.72625E-04 -3.03311E-04  9.48512E-02  9.35547E-04 -9.51481E-04  7.56971E-04  6.46473E-04
  3.400  6.03915E-02  2.05812E-03  3.65410E-04 -7.20472E-04 -3.29032E-04  9.48555E-02  1.44560E-03 -1.12097E-03  5.77208E-04  6.73562E-04
  3.500  6.03069E-02  1.77397E-03  5.41150E-04 -6.49959E-04 -3.52972E-04  9.48019E-02  1.93830E-03 -1.22390E-03  3.81461E-04  6.88684E-04
  3.600  6.02192E-02  1.48108E-03  6.77322E-04 -5.61587E-04 -3.74419E-04  9.46805E-02  2.39281E-03 -1.26185E-03  1.77759E-04  6.90099E-04
  3.700  6.01267E-02  1.20228E-03  7.66173E-04 -4.56430E-04 -3.92617E-04  9.44826E-02  2.79380E-03 -1.24102E-03 -2.49735E-05  6.76522E-04
  3.800  6.00257E-02  9.60687E-04  8.01237E-04 -3.36157E-04 -4.06773E-04  9.42009E-02  3.13259E-03 -1.17196E-03 -2.17373E-04  6.47256E-04
  3.900  5.99102E-02  7.78872E-04  7.77608E-04 -2.03034E-04 -4.16067E-04  9.38297E-02  3.40785E-03 -1.06898E-03 -3.90161E-04  6.02312E-04
  4.000  5.97722E-02  6.77941E-04  6.92171E-04 -5.99059E-05 -4.19678E-04  9.33644E-02  3.62575E-03 -9.49232E-04 -5.34702E-04  5.42493E-04
  4.100  5.96018E-02  6.76716E-04  5.43792E-04  8.98363E-05 -4.16804E-04  9.28019E-02  3.79961E-03 -8.31712E-04 -6.43556E-04  4.69447E-04
  4.200  5.93872E-02  7.90932E-04  3.33447E-04  2.42326E-04 -4.06701E-04  9.21397E-02  3.94900E-03 -7.35946E-04 -7.10988E-04  3.85647E-04
  4.300  5.91152E-02  1.03254E-03  6.42867E-05  3.93313E-04 -3.88724E-04  9.13761E-02  4.09839E-03 -6.80712E-04 -7.33393E-04  2.94335E-04
  4.400  5.87720E-02  1.40912E-03 -2.58380E-04  5.38293E-04 -3.62373E-04  9.05092E-02  4.27538E-03 -6.82743E-04 -7.09601E-04  1.99390E-04
  4.500  5.83430E-02  1.92340E-03 -6.27179E-04  6.72655E-04 -3.27345E-04  8.95372E-02  4.50869E-03 -7.55545E-04 -6.41025E-04  1.05150E-04
  4.600  5.78139E-02  2.57301E-03 -1.03286E-03  7.91866E-04 -2.83581E-04  8.84577E-02  4.82599E-03 -9.08429E-04 -5.31643E-04  1.61766E-05
  4.700  5.71712E-02  3.35034E-03 -1.46458E-03  8.91665E-04 -2.31305E-04  8.72675E-02  5.25169E-03 -1.14580E-03 -3.87805E-04 -6.30049E-05
  4.800  5.64023E-02  4.24264E-03 -1.91026E-03  9.68263E-04 -1.71061E-04  8.59624E-02  5.80502E-03 -1.46679E-03 -2.17869E-04 -1.28182E-04
  4.900  5.54968E-02  5.23234E-03 -2.35702E-03  1.01854E-03 -1.03721E-04  8.45371E-02  6.49826E-03 -1.86523E-03 -3.16947E-05 -1.75730E-04
  5.000  5.44461E-02  6.29757E-03 -2.79168E-03  1.04024E-03 -3.04922E-05  8.29855E-02  7.33551E-03 -2.32998E-03  1.59972E-04 -2.02849E-04
  5.100  5.32443E-02  7.41285E-03 -3.20131E-03  1.03209E-03  4.71154E-05  8.13009E-02  8.31195E-03 -2.84562E-03  3.46175E-04 -2.07766E-04
  5.200  5.18884E-02  8.54997E-03 -3.57372E-03  9.93927E-04  1.27327E-04  7.94764E-02  9.41367E-03 -3.39339E-03  5.16441E-04 -1.89858E-04
  5.300  5.03786E-02  9.67907E-03 -3.89803E-03  9.26724E-04  2.08171E-04  7.75053E-02  1.06181E-02 -3.95231E-03  6.61428E-04 -1.49707E-04
  5.400  4.87182E-02  1.07697E-02 -4.16511E-03  8.32600E-04  2.87556E-04  7.53820E-02  1.18952E-02 -4.50050E-03  7.73483E-04 -8.90687E-05
  5.500  4.69137E-02  1.17921E-02 -4.36795E-03  7.14726E-04  3.63369E-04  7.31024E-02  1.32085E-02 -5.01646E-03  8.47077E-04 -1.07649E-05
  5.600  4.49749E-02  1.27181E-02 -4.50194E-03  5.77194E-04  4.33572E-04  7.06648E-02  1.45175E-02 -5.48029E-03  8.79067E-04  8.14996E-05
  5.700  4.29146E-02  1.35227E-02 -4.56506E-03  4.24823E-04  4.96298E-04  6.80704E-02  1.57797E-02 -5.87477E-03  8.68801E-04  1.83374E-04
  5.800  4.07482E-02  1.41846E-02 -4.55784E-03  2.62930E-04  5.49944E-04  6.53241E-02  1.69528E-02 -6.18623E-03  8.18034E-04  2.90138E-04
  5.900  3.84935E-02  1.46870E-02 -4.48329E-03  9.70682E-05  5.93247E-04  6.24343E-02  1.79966E-02 -6.40513E-03  7.30693E-04  3.96989E-04
  6.000  3.61703E-02  1.50185E-02 -4.34666E-03 -6.72413E-05  6.25338E-04  5.94140E-02  1.88759E-02 -6.52635E-03  6.12500E-04  4.99326E-04
  6.100  3.37999E-02  1.51733E-02 -4.15509E-03 -2.24768E-04  6.45778E-04  5.62797E-02  1.95612E-02 -6.54921E-03  4.70510E-04  5.93003E-04
  6.200  3.14045E-02  1.51511E-02 -3.91718E-03 -3.70809E-04  6.54563E-04  5.30521E-02  2.00309E-02 -6.47717E-03  3.12581E-04  6.74543E-04
  6.300  2.90067E-02  1.49570E-02 -3.64253E-03 -5.01383E-04  6.52108E-04  4.97553E-02  2.02715E-02 -6.31737E-03  1.46839E-04  7.41280E-04
  6.400  2.66290E-02  1.46014E-02 -3.34126E-03 -6.13377E-04  6.39208E-04  4.64158E-02  2.02783E-02 -6.07992E-03 -1.88308E-05  7.91453E-04
  6.500  2.42930E-02  1.40988E-02 -3.02346E-03 -7.04637E-04  6.16978E-04  4.30624E-02  2.00551E-02 -5.77714E-03 -1.77230E-04  8.24224E-04
  6.600  2.20192E-02  1.34675E-02 -2.69884E-03 -7.73993E-04  5.86781E-04  3.97247E-02  1.96136E-02 -5.42269E-03 -3.22202E-04  8.39635E-04
  6.700  1.98263E-02  1.27284E-02 -2.37626E-03 -8.21234E-04  5.50146E-04  3.64326E-02  1.89723E-02 -5.03078E-03 -4.48883E-04  8.38520E-04
  6.800  1.77309E-02  1.19041E-02 -2.06349E-03 -8.47030E-04  5.08682E-04  3.32150E-02  1.81556E-02 -4.61539E-03 -5.53836E-04  8.22368E-04
  6.900  1.57472E-02  1.10181E-02 -1.76695E-03 -8.52813E-04  4.64003E-04  3.00990E-02  1.71919E-02 -4.18965E-03 -6.35086E-04  7.93166E-04
  7.000  1.38864E-02  1.00934E-02 -1.49165E-03 -8.40628E-04  4.17649E-04  2.71090E-02  1.61121E-02 -3.76528E-03 -6.92040E-04  7.53229E-04
  7.100  1.21571E-02  9.15214E-03 -1.24113E-03 -8.12967E-04  3.71032E-04  2.42664E-02  1.49482E-02 -3.35231E-03 -7.25349E-04  7.05033E-04
  7.200  1.05650E-02  8.21478E-03 -1.01749E-03 -7.72599E-04  3.25382E-04  2.15885E-02  1.37320E-02 -2.95880E-03 -7.36690E-04  6.51061E-04
  7.300  9.11287E-03  7.29929E-03 -8.21587E-04 -7.22405E-04  2.81725E-04  1.90888E-02  1.24934E-02 -2.59083E-03 -7.28533E-04  5.93674E-04
  7.400  7.80082E-03  6.42097E-03 -6.53135E-04 -6.65231E-04  2.40859E-04  1.67764E-02  1.12598E-02 -2.25252E-03 -7.03882E-04  5.35004E-04
  7.500  6.62651E-03  5.59215E-03 -5.10945E-04 -6.03761E-04  2.03360E-04  1.46563E-02  1.00553E-02 -1.94623E-03 -6.66025E-04  4.76887E-04
  7.600  5.58543E-03  4.82213E-03 -3.93135E-04 -5.40422E-04  1.69586E-04  1.27295E-02  8.89971E-03 -1.67277E-03 -6.18316E-04  4.20820E-04
  7.700  4.67123E-03  4.11723E-03 -2.97344E-04 -4.77314E-04  1.39704E-04  1.09935E-02  7.80903E-03 -1.43165E-03 -5.63980E-04  3.67947E-04
  7.800  3.87611E-03  3.48103E-03 -2.20937E-04 -4.16167E-04  1.13714E-04  9.44253E-03  6.79494E-03 -1.22140E-03 -5.05970E-04  3.19071E-04
  7.900  3.19116E-03  2.91461E-03 -1.61179E-04 -3.58334E-04  9.14782E-05  8.06823E-03  5.86515E-03 -1.03985E-03 -4.46859E-04  2.74683E-04
  8.000  2.60677E-03  2.41694E-03 -1.15383E-04 -3.04794E-04  7.27588E-05  6.86014E-03  5.02378E-03 -8.84371E-04 -3.88784E-04  2.35001E-04
  8.100  2.11295E-03  1.98526E-03 -8.10183E-05 -2.56182E-04  5.72449E-05  5.80631E-03  4.27176E-03 -7.52100E-04 -3.33419E-04  2.00024E-04
  8.200  1.69965E-03  1.61548E-03 -5.57932E-05 -2.12830E-04  4.45830E-05  4.89377E-03  3.60740E-03 -6.40141E-04 -2.81986E-04  1.69574E-04
  8.300  1.35702E-03  1.30258E-03 -3.76992E-05 -1.74809E-04  3.44025E-05  4.10911E-03  3.02689E-03 -5.45691E-04 -2.35291E-04  1.43354E-04
  8.400  1.07565E-03  1.04095E-03 -2.50308E-05 -1.41988E-04  2.63353E-05  3.43881E-03  2.52487E-03 -4.66142E-04 -1.93772E-04  1.20987E-04
  8.500  8.46754E-04  8.24730E-04 -1.63834E-05 -1.14078E-04  2.00315E-05  2.86973E-03  2.09496E-03 -3.99144E-04 -1.57563E-04  1.02055E-04
  8.600  6.62239E-04  6.48051E-04 -1.06346E-05 -9.06836E-05  1.51708E-05  2.38927E-03  1.73012E-03 -3.42632E-04 -1.26554E-04  8.61297E-05
  8.700  5.14832E-04  5.05272E-04 -6.91391E-06 -7.13448E-05  1.14689E-05  1.98569E-03  1.42313E-03 -2.94832E-04 -1.00457E-04  7.27942E-05
  8.800  3.98089E-04  3.91114E-04 -4.56751E-06 -5.55708E-05  8.68026E-06  1.64819E-03  1.16682E-03 -2.54250E-04 -7.88619E-05  6.16599E-05
  8.900  3.06397E-04  3.00773E-04 -3.12008E-06 -4.28697E-05  6.59890E-06  1.36704E-03  9.54346E-04 -2.19645E-04 -6.12860E-05  5.23754E-05
  9.000  2.34946E-04  2.29976E-04 -2.23831E-06 -3.27699E-05  5.05595E-06  1.13356E-03  7.79323E-04 -1.89999E-04 -4.72163E-05  4.46311E-05
  9.100  1.79672E-04  1.75006E-04 -1.69755E-06 -2.48349E-05  3.91643E-06  9.40142E-04  6.35951E-04 -1.64487E-04 -3.61399E-05  3.81606E-05
  9.200  1.37194E-04  1.32689E-04 -1.35307E-06 -1.86727E-05  3.07487E-06  7.80189E-04  5.19059E-04 -1.42438E-04 -2.75680E-05  3.27378E-05
  9.300  1.04737E-04  1.00364E-04 -1.11652E-06 -1.39398E-05  2.45078E-06  6.48047E-04  4.24118E-04 -1.23314E-04 -2.10513E-05  2.81745E-05
  9.400  8.00562E-05  7.58437E-05 -9.37444E-07 -1.03429E-05  1.98397E-06  5.38919E-04  3.47226E-04 -1.06677E-04 -1.61887E-05  2.43153E-05
  9.500  6.13564E-05  5.73514E-05 -7.89514E-07 -7.63624E-06  1.63041E-06  4.48772E-04  2.85064E-04 -9.21701E-05 -1.26317E-05  2.10335E-05
  9.600  4.72217E-05  4.34707E-05 -6.60703E-07 -5.61815E-06  1.35841E-06  3.74239E-04  2.34846E-04 -7.95025E-05 -1.00844E-05  1.82260E-05
  9.700  3.65472E-05  3.30868E-05 -5.46718E-07 -4.12622E-06  1.14554E-06  3.12534E-04  1.94263E-04 -6.84318E-05 -8.30074E-06  1.58097E-05
  9.800  2.84805E-05  2.53332E-05 -4.46859E-07 -3.03187E-06  9.76023E-07  2.61359E-04  1.61414E-04 -5.87553E-05 -7.08033E-06  1.37177E-05
  9.900  2.23701E-05  1.95452E-05 -3.61634E-07 -2.23499E-06  8.38790E-07  2.18830E-04  1.34754E-04 -5.03017E-05 -6.26332E-06  1.18964E-05
 10.000  1.77228E-05  1.52176E-05 -2.91534E-07 -1.65878E-06  7.25996E-07  1.83408E-04  1.13034E-04 -4.29244E-05 -5.72471E-06  1.03027E-05
 10.100  1.41675E-05  1.19703E-05 -2.36537E-07 -1.24513E-06  6.31976E-07  1.53837E-04  9.52507E-05 -3.64970E-05 -5.36900E-06  8.90222E-06
 10.200  1.14275E-05  9.51982E-06 -1.96003E-07 -9.50592E-07  5.52526E-07  1.29094E-04  8.06064E-05 -3.09098E-05 -5.12498E-06  7.66741E-06
 10.300  9.29672E-06  7.65576E-06 -1.68756E-07 -7.42929E-07  4.84445E-07  1.08346E-04  6.84680E-05 -2.60664E-05 -4.94119E-06  6.57627E-06
 10.400  7.62280E-06  6.22314E-06 -1.53227E-07 -5.98378E-07  4.25246E-07  9.09132E-05  5.83359E-05 -2.18818E-05 -4.78184E-06  5.61114E-06
 10.500  6.29314E-06  5.10829E-06 -1.47592E-07 -4.99430E-07  3.72994E-07  7.62412E-05  4.98177E-05 -1.82802E-05 -4.62340E-06  4.75780E-06
 10.600  5.22464E-06  4.22823E-06 -1.49886E-07 -4.33140E-07  3.26202E-07  6.38762E-05  4.26061E-05 -1.51939E-05 -4.45167E-06  4.00466E-06
 10.700  4.35606E-06  3.52266E-06 -1.58091E-07 -3.89869E-07  2.83769E-07  5.34452E-05  3.64608E-05 -1.25620E-05 -4.25939E-06  3.34208E-06
 10.800  3.64219E-06  2.94800E-06 -1.70204E-07 -3.62365E-07  2.44932E-07  4.46411E-05  3.11943E-05 -1.03294E-05 -4.04434E-06  2.76190E-06
 10.900  3.04962E-06  2.47292E-06 -1.84302E-07 -3.45126E-07  2.09209E-07  3.72098E-05  2.66598E-05 -8.44597E-06 -3.80774E-06  2.25696E-06
 11.000  2.55358E-06  2.07502E-06 -1.98602E-07 -3.33960E-07  1.76353E-07  3.09397E-05  2.27423E-05 -6.86660E-06 -3.55308E-06  1.82078E-06
 11.100  2.13564E-06  1.73834E-06 -2.11520E-07 -3.25692E-07  1.46288E-07  2.56545E-05  1.93505E-05 -5.55027E-06 -3.28515E-06  1.44736E-06
 11.200  1.78193E-06  1.45152E-06 -2.21729E-07 -3.17967E-07  1.19051E-07  2.12058E-05  1.64117E-05 -4.46003E-06 -3.00932E-06  1.13095E-06
 11.300  1.48192E-06  1.20642E-06 -2.28204E-07 -3.09114E-07  9.47329E-08  1.74685E-05  1.38667E-05 -3.56273E-06 -2.73102E-06  8.66008E-07
 11.400  1.22744E-06  9.97092E-07 -2.30253E-07 -2.98045E-07  7.34311E-08  1.43366E-05  1.16664E-05 -2.82883E-06 -2.45540E-06  6.47127E-07
 11.500  1.01200E-06  8.19010E-07 -2.27531E-07 -2.84168E-07  5.52075E-08  1.17195E-05  9.76953E-06 -2.23227E-06 -2.18705E-06  4.69046E-07
 11.600  8.30303E-07  6.68555E-07 -2.20027E-07 -2.67307E-07  4.00602E-08  9.54014E-06  8.14039E-06 -1.75023E-06 -1.92986E-06  3.26671E-07
 11.700  6.77897E-07  5.42643E-07 -2.08038E-07 -2.47622E-07  2.79086E-08  7.73205E-06  6.74755E-06 -1.36293E-06 -1.68696E-06  2.15126E-07
 11.800  5.50915E-07  4.38490E-07 -1.92115E-07 -2.25534E-07  1.85892E-08  6.23825E-06  5.56298E-06 -1.05346E-06 -1.46071E-06  1.29803E-07
 11.900  4.45937E-07  3.53482E-07 -1.73004E-07 -2.01638E-07  1.18620E-08  5.00966E-06  4.56134E-06 -8.07443E-07 -1.25270E-06  6.64101E-08
 12.000  3.59886E-07  2.85116E-07 -1.51577E-07 -1.76636E-07  7.42428E-09  4.00403E-06  3.71959E-06 -6.12847E-07 -1.06384E-06  2.10232E-08
 12.100  2.89976E-07  2.30983E-07 -1.28760E-07 -1.51267E-07  4.92928E-09  3.18505E-06  3.01679E-06 -4.59676E-07 -8.94440E-07 -9.88695E-09
 12.200  2.33685E-07  1.88794E-07 -1.05469E-07 -1.26249E-07  4.00735E-09  2.52156E-06  2.43390E-06 -3.39713E-07 -7.44267E-07 -2.94327E-08
 12.300  1.88746E-07  1.56407E-07 -8.25537E-08 -1.02231E-07  4.28671E-09  1.98692E-06  1.95370E-06 -2.46262E-07 -6.12678E-07 -4.03050E-08
 12.400  1.53143E-07  1.31867E-07 -6.07528E-08 -7.97656E-08  5.41225E-09  1.55848E-06  1.56075E-06 -1.73909E-07 -4.98694E-07 -4.47815E-08
 12.500  1.25104E-07  1.13435E-07 -4.06664E-08 -5.92818E-08  7.06095E-09  1.21702E-06  1.24131E-06 -1.18300E-07 -4.01091E-07 -4.47466E-08
 12.600  1.03105E-07  9.96084E-08 -2.27390E-08 -4.10804E-08  8.95312E-09  9.46372E-07  9.83301E-07 -7.59543E-08 -3.18483E-07 -4.17210E-08
 12.700  8.58533E-08  8.91285E-08 -7.25736E-09 -2.53336E-08  1.08592E-08  7.33012E-07  7.76165E-07 -4.40915E-08 -2.49391E-07 -3.68975E-08
 12.800  7.22764E-08  8.09775E-08  5.64164E-09 -1.20952E-08  1.26025E-08  5.65695E-07  6.10822E-07 -2.04958E-08 -1.92303E-07 -3.11817E-08
 12.900  6.15037E-08  7.43641E-08  1.59540E-08 -1.31552E-09  1.40580E-08  4.35146E-07  4.79529E-07 -3.39888E-09 -1.45730E-07 -2.52337E-08
 13.000  5.28441E-08  6.87003E-08  2.37869E-08  7.13904E-09  1.51485E-08  3.33769E-07  3.75760E-07  8.61336E-09 -1.08239E-07 -1.95101E-08
 13.100  4.57619E-08  6.35737E-08  2.93332E-08  1.34658E-08  1.58386E-08  2.55395E-07  2.94075E-07  1.66744E-08 -7.84854E-08 -1.43026E-08
 13.200  3.98529E-08  5.87175E-08  3.28461E-08  1.79050E-08  1.61270E-08  1.95047E-07  2.29987E-07  2.16952E-08 -5.52342E-08 -9.77529E-09
 13.300  3.48198E-08  5.39791E-08  3.46148E-08  2.07206E-08  1.60392E-08  1.48742E-07  1.79831E-07  2.44089E-08 -3.73714E-08 -5.99552E-09
 13.400  3.04507E-08  4.92914E-08  3.49431E-08  2.21838E-08  1.56190E-08  1.13320E-07  1.40648E-07  2.54054E-08 -2.39097E-08 -2.96186E-09
 13.500  2.65987E-08  4.46470E-08  3.41309E-08  2.25594E-08  1.49223E-08  8.62891E-08  1.10065E-07  2.51581E-08 -1.39894E-08 -6.26543E-10
 13.600  2.31653E-08  4.00760E-08  3.24611E-08  2.20947E-08  1.40100E-08  6.56986E-08  8.61992E-08  2.40443E-08 -6.87325E-09  1.08638E-09
 13.700  2.00859E-08  3.56287E-08  3.01890E-08  2.10131E-08  1.29436E-08  5.00327E-08  6.75648E-08  2.23622E-08 -1.93978E-09  2.26705E-09
 13.800  1.73188E-08  3.13621E-08  2.75365E-08  1.95087E-08  1.17810E-08  3.81207E-08  5.29995E-08  2.03437E-08  1.32686E-09  3.00952E-09
 13.900  1.48366E-08  2.73301E-08  2.46891E-08  1.77453E-08  1.05742E-08  2.90630E-08  4.15975E-08  1.81661E-08  3.34776E-09  3.40451E-09
 14.000  1.26201E-08  2.35780E-08  2.17958E-08  1.58556E-08  9.36720E-09  2.21724E-08  3.26564E-08  1.59607E-08  4.46085E-09  3.53488E-09
 14.100  1.06537E-08  2.01391E-08  1.89708E-08  1.39434E-08  8.19564E-09  1.69256E-08  2.56326E-08  1.38219E-08  4.93250E-09  3.47293E-09
 14.200  8.92308E-09  1.70333E-08  1.62970E-08  1.20863E-08  7.08660E-09  1.29258E-08  2.01063E-08  1.18136E-08  4.96865E-09  3.27942E-09
 14.300  7.41345E-09  1.42678E-08  1.38299E-08  1.03386E-08  6.05918E-09  9.87267E-09  1.57527E-08  9.97550E-09  4.72513E-09  3.00351E-09
 14.400  6.10902E-09  1.18385E-08  1.16019E-08  8.73559E-09  5.12532E-09  7.53912E-09  1.23203E-08  8.32871E-09  4.31702E-09  2.68356E-09
 14.500  4.99289E-09  9.73213E-09  9.62735E-09  7.29656E-09  4.29086E-09  5.75353E-09  9.61393E-09  6.88010E-09  3.82685E-09  2.34832E-09
 14.600  4.04730E-09  7.92825E-09  7.90640E-09  6.02867E-09  3.55674E-09  4.38610E-09  7.48104E-09  5.62626E-09  3.31175E-09  2.01831E-09
 14.700  3.25411E-09  6.40167E-09  6.42898E-09  4.92994E-09  2.92007E-09  3.33846E-09  5.80220E-09  4.55668E-09  2.80935E-09  1.70728E-09
 14.800  2.59528E-09  5.12439E-09  5.17806E-09  3.99192E-09  2.37522E-09  2.53587E-09  4.48332E-09  3.65636E-09  2.34276E-09  1.42364E-09
 14.900  2.05333E-09  4.06730E-09  4.13243E-09  3.20197E-09  1.91471E-09  1.92140E-09  3.44991E-09  2.90781E-09  1.92455E-09  1.17171E-09
 15.000  1.61176E-09  3.20160E-09  3.26883E-09  2.54510E-09  1.53005E-09  1.45154E-09  2.64281E-09  2.29259E-09  1.55987E-09  9.52775E-10
 15.100  1.25532E-09  2.49977E-09  2.56358E-09  2.00529E-09  1.21230E-09  1.09289E-09  2.01484E-09  1.79243E-09  1.24891E-09  7.66075E-10
 15.200  9.70228E-10  1.93633E-09  1.99377E-09  1.56660E-09  9.52598E-10  8.19790E-10  1.52833E-09  1.38999E-09  9.88715E-10  6.09471E-10
 15.300  7.44225E-10  1.48824E-09  1.53808E-09  1.21381E-09  7.42492E-10  6.12430E-10  1.15320E-09  1.06937E-09  7.74540E-10  4.80046E-10
 15.400  5.66626E-10  1.13513E-09  1.17718E-09  9.32948E-10  5.74162E-10  4.55523E-10  8.65415E-10  8.16341E-10  6.00789E-10  3.74515E-10
 15.500  4.28253E-10  8.59337E-10  8.94033E-10  7.11481E-10  4.40566E-10  3.37251E-10  6.45821E-10  6.18465E-10  4.61672E-10  2.89529E-10
 15.600  3.21338E-10  6.45775E-10  6.73877E-10  5.38454E-10  3.35498E-10  2.48478E-10  4.79201E-10  4.65081E-10  3.51615E-10  2.21874E-10
 15.700  2.39403E-10  4.81789E-10  5.04190E-10  4.04470E-10  2.53591E-10  1.82152E-10  3.53511E-10  3.47196E-10  2.65515E-10  1.68597E-10
 15.800  1.77113E-10  3.56896E-10  3.74505E-10  3.01609E-10  1.90283E-10  1.32838E-10  2.59262E-10  2.57343E-10  1.98856E-10  1.27070E-10
 15.900  1.30126E-10  2.62536E-10  2.76205E-10  2.23297E-10  1.41758E-10  9.63603E-11  1.89018E-10  1.89407E-10  1.47753E-10  9.50144E-11
 16.000  9.49544E-11  1.91797E-10  2.02287E-10  1.64158E-10  1.04864E-10  6.95211E-11  1.36988E-10  1.38444E-10  1.08940E-10  7.04997E-11
 16.100  6.88247E-11  1.39171E-10  1.47136E-10  1.19848E-10  7.70341E-11  4.98818E-11  9.86896E-11  1.00508E-10  7.97243E-11  5.19184E-11
 16.200  4.95554E-11  1.00312E-10  1.06300E-10  8.69045E-11  5.62038E-11  3.55915E-11  7.06745E-11  7.24787E-11  5.79198E-11  3.79550E-11
 16.300  3.54480E-11  7.18273E-11  7.62879E-11  6.25951E-11  4.07303E-11  2.52528E-11  5.03106E-11  5.19221E-11  4.17804E-11  2.75486E-11
 16.400  2.51933E-11  5.10979E-11  5.43910E-11  4.47888E-11  2.93209E-11  1.78162E-11  3.56012E-11  3.69543E-11  2.99292E-11  1.98554E-11
 16.500  1.77910E-11  3.61183E-11  3.85290E-11  3.18398E-11  2.09694E-11  1.24984E-11  2.50430E-11  2.61327E-11  2.12938E-11  1.42123E-11
 16.600  1.24847E-11  2.53687E-11  2.71190E-11  2.24895E-11  1.48997E-11  8.71815E-12  1.75119E-11  1.83632E-11  1.50490E-11  1.01044E-11
 16.700  8.70648E-12  1.77071E-11  1.89681E-11  1.57847E-11  1.05194E-11  6.04673E-12  1.21735E-11  1.28229E-11  1.05659E-11  7.13622E-12
 16.800  6.03432E-12  1.22831E-11  1.31846E-11  1.10095E-11  7.37992E-12  4.17008E-12  8.41294E-12  8.89887E-12  7.37047E-12  5.00705E-12
 16.900  4.15685E-12  8.46858E-12  9.10831E-12  7.63159E-12  5.14514E-12  2.85957E-12  5.78018E-12  6.13792E-12  5.10881E-12  3.49055E-12
 17.000  2.84627E-12  5.80341E-12  6.25411E-12  5.25779E-12  3.56497E-12  1.94982E-12  3.94831E-12  4.20800E-12  3.51901E-12  2.41794E-12
 17.100  1.93728E-12  3.95324E-12  4.26854E-12  3.60049E-12  2.45502E-12  1.32201E-12  2.68147E-12  2.86765E-12  2.40898E-12  1.66447E-12
 17.200  1.31081E-12  2.67699E-12  2.89604E-12  2.45086E-12  1.68044E-12  8.91311E-13  1.81068E-12  1.94267E-12  1.63905E-12  1.13872E-12
 17.300  8.81742E-13  1.80214E-12  1.95330E-12  1.65844E-12  1.14337E-12  5.97569E-13  1.21571E-12  1.30833E-12  1.10849E-12  7.74283E-13
 17.400  5.89686E-13  1.20616E-12  1.30978E-12  1.11565E-12  7.73337E-13  3.98403E-13  8.11632E-13  8.76006E-13  7.45215E-13  5.23311E-13
 17.500  3.92103E-13  8.02633E-13  8.73200E-13  7.46163E-13  5.19988E-13  2.64146E-13  5.38817E-13  5.83165E-13  4.98047E-13  3.51580E-13
 17.600  2.59241E-13  5.31065E-13  5.78814E-13  4.96173E-13  3.47603E-13  1.74166E-13  3.55707E-13  3.86005E-13  3.30921E-13  2.34812E-13
 17.700  1.70431E-13  3.49396E-13  3.81501E-13  3.28058E-13  2.31027E-13  1.14208E-13  2.33523E-13  2.54057E-13  2.18611E-13  1.55911E-13
 17.800  1.11419E-13  2.28585E-13  2.50037E-13  2.15678E-13  1.52669E-13  7.44823E-14  1.52464E-13  1.66275E-13  1.43593E-13  1.02923E-13
 17.900  7.24358E-14  1.48716E-13  1.62961E-13  1.41001E-13  1.00315E-13  4.83111E-14  9.89965E-14  1.08218E-13  9.37850E-14  6.75550E-14
 18.000  4.68326E-14  9.62205E-14  1.05623E-13  9.16672E-14  6.55435E-14  3.11666E-14  6.39300E-14  7.00441E-14  6.09108E-14  4.40890E-14
 18.100  3.01137E-14  6.19146E-14  6.80829E-14  5.92656E-14  4.25855E-14  1.99985E-14  4.10616E-14  4.50876E-14  3.93402E-14  2.86123E-14
 18.200  1.92582E-14  3.96235E-14  4.36462E-14  3.81070E-14  2.75155E-14  1.27638E-14  2.62318E-14  2.88651E-14  2.52685E-14  1.84649E-14
 18.300  1.22496E-14  2.52211E-14  2.78291E-14  2.43691E-14  1.76806E-14  8.10309E-15  1.66684E-14  1.83797E-14  1.61414E-14  1.18503E-14
 18.400  7.74995E-15  1.59677E-14  1.76487E-14  1.54996E-14  1.12989E-14  5.11710E-15  1.05354E-14  1.16405E-14  1.02552E-14  7.56349E-15
 18.500  4.87709E-15  1.00555E-14  1.11327E-14  9.80539E-15  7.18138E-15  3.21448E-15  6.62381E-15  7.33301E-15  6.48035E-15  4.80110E-15
 18.600  3.05298E-15  6.29886E-15  6.98524E-15  6.17004E-15  4.53975E-15  2.00874E-15  4.14268E-15  4.59504E-15  4.07310E-15  3.03112E-15
 18.700  1.90109E-15  3.92494E-15  4.35982E-15  3.86193E-15  2.85445E-15  1.24875E-15  2.57742E-15  2.86423E-15  2.54648E-15  1.90338E-15
 18.800  1.17763E-15  2.43294E-15  2.70692E-15  2.40452E-15  1.78523E-15  7.72284E-16  1.59525E-15  1.77603E-15  1.58364E-15  1.18884E-15
 18.900  7.25704E-16  1.50027E-15  1.67192E-15  1.48927E-15  1.11060E-15  4.75162E-16  9.82266E-16  1.09554E-15  9.79699E-16  7.38603E-16
 19.000  4.44904E-16  9.20370E-16  1.02731E-15  9.17600E-16  6.87279E-16  2.90857E-16  6.01720E-16  6.72297E-16  6.02919E-16  4.56463E-16
 19.100  2.71357E-16  5.61721E-16  6.27988E-16  5.62446E-16  4.23086E-16  1.77134E-16  3.66723E-16  4.10447E-16  3.69122E-16  2.80620E-16
 19.200  1.64663E-16  3.41081E-16  3.81919E-16  3.42979E-16  2.59095E-16  1.07330E-16  2.22367E-16  2.49304E-16  2.24823E-16  1.71619E-16
 19.300  9.94135E-17  2.06056E-16  2.31087E-16  2.08078E-16  1.57847E-16  6.47063E-17  1.34154E-16  1.50657E-16  1.36233E-16  1.04414E-16
 19.400  5.97171E-17  1.23855E-16  1.39115E-16  1.25594E-16  9.56692E-17  3.88141E-17  8.05287E-17  9.05835E-17  8.21305E-17  6.31993E-17
 19.500  3.56917E-17  7.40724E-17  8.33262E-17  7.54236E-17  5.76872E-17  2.31664E-17  4.80971E-17  5.41901E-17  4.92633E-17  3.80571E-17
 19.600  2.12257E-17  4.40781E-17  4.96600E-17  4.50662E-17  3.46073E-17  1.37584E-17  2.85837E-17  3.22562E-17  2.94001E-17  2.28004E-17
 19.700  1.25601E-17  2.60990E-17  2.94483E-17  2.67924E-17  2.06562E-17  8.13059E-18  1.69029E-17  1.91047E-17  1.74579E-17  1.35908E-17
 19.800  7.39561E-18  1.53770E-17  1.73761E-17  1.58489E-17  1.22669E-17  4.78117E-18  9.94622E-18  1.12592E-17  1.03148E-17  8.06031E-18
 19.900  4.33321E-18  9.01511E-18  1.02022E-17  9.32873E-18  7.24828E-18  2.79777E-18  5.82392E-18  6.60282E-18  6.06416E-18  4.75637E-18
  67 180 200   0.100
  0.000  5.72835E-02 -3.02559E-16 -4.26742E-16 -4.37824E-16 -1.15870E-15  9.31011E-02 -4.80991E-16 -8.11851E-16 -5.37899E-16 -1.35897E-15
  0.100  5.72869E-02 -4.83789E-05 -3.69437E-08 -1.39919E-11 -3.74788E-15  9.31327E-02  8.11803E-05  8.19932E-08  3.66310E-11  7.35272E-15
  0.200  5.72974E-02 -1.90926E-04 -5.85916E-07 -8.88336E-10 -8.56963E-13  9.32256E-02  3.19744E-04  1.29756E-06  2.32249E-09  2.28947E-12
  0.300  5.73162E-02 -4.19999E-04 -2.92290E-06 -9.98635E-09 -2.16699E-11  9.33735E-02  7.01066E-04  6.44956E-06  2.60427E-08  5.79038E-11
  0.400  5.73449E-02 -7.23290E-04 -9.04908E-06 -5.50846E-08 -2.12347E-10  9.35671E-02  1.20177E-03  1.98661E-05  1.43146E-07  5.66662E-10
  0.500  5.73858E-02 -1.08444E-03 -2.15118E-05 -2.05203E-07 -1.23485E-09  9.37940E-02  1.79117E-03  4.69188E-05  5.30860E-07  3.29015E-09
  0.600  5.74412E-02 -1.48386E-03 -4.31714E-05 -5.95203E-07 -5.15210E-09  9.40401E-02  2.43314E-03  9.34104E-05  1.53140E-06  1.37018E-08
  0.700  5.75137E-02 -1.89972E-03 -7.69311E-05 -1.45021E-06 -1.70654E-08  9.42906E-02  3.08829E-03  1.64889E-04  3.70744E-06  4.52884E-08
  0.800  5.76056E-02 -2.30902E-03 -1.25448E-04 -3.10563E-06 -4.76709E-08  9.45312E-02  3.71637E-03  2.65952E-04  7.88163E-06  1.26214E-07
  0.900  5.77189E-02 -2.68881E-03 -1.90848E-04 -6.01878E-06 -1.16770E-07  9.47487E-02  4.27867E-03  3.99593E-04  1.51498E-05  3.08385E-07
  1.000  5.78547E-02 -3.01727E-03 -2.74464E-04 -1.07687E-05 -2.57583E-07  9.49327E-02  4.74028E-03  5.66676E-04  2.68601E-05  6.78464E-07
  1.100  5.80134E-02 -3.27486E-03 -3.76615E-04 -1.80420E-05 -5.21517E-07  9.50755E-02  5.07214E-03  7.65550E-04  4.45550E-05  1.36989E-06
  1.200  5.81945E-02 -3.44527E-03 -4.96456E-04 -2.86040E-05 -9.82847E-07  9.51729E-02  5.25268E-03  9.91868E-04  6.98756E-05  2.57448E-06
  1.300  5.83961E-02 -3.51625E-03 -6.31891E-04 -4.32558E-05 -1.74266E-06  9.52246E-02  5.26901E-03  1.23862E-03  1.04435E-04  4.55198E-06
  1.400  5.86154E-02 -3.48021E-03 -7.79578E-04 -6.27794E-05 -2.93131E-06  9.52333E-02  5.11758E-03  1.49640E-03  1.49667E-04  7.63569E-06
  1.500  5.88483E-02 -3.33457E-03 -9.35017E-04 -8.78754E-05 -4.70879E-06  9.52053E-02  4.80426E-03  1.75382E-03  2.06665E-04  1.22326E-05
  1.600  5.90898E-02 -3.08190E-03 -1.09272E-03 -1.19097E-04 -7.26243E-06  9.51490E-02  4.34390E-03  1.99817E-03  2.76025E-04  1.88170E-05
  1.700  5.93342E-02 -2.72972E-03 -1.24645E-03 -1.56784E-04 -1.08017E-05  9.50749E-02  3.75932E-03  2.21614E-03  3.57698E-04  2.79159E-05
  1.800  5.95752E-02 -2.29014E-03 -1.38953E-03 -2.01010E-04 -1.55499E-05  9.49941E-02  3.07998E-03  2.39469E-03  4.50879E-04  4.00879E-05
  1.900  5.98064E-02 -1.77921E-03 -1.51520E-03 -2.51533E-04 -2.17342E-05  9.49178E-02  2.34014E-03  2.52186E-03  5.53934E-04  5.58939E-05
  2.000  6.00212E-02 -1.21611E-03 -1.61695E-03 -3.07769E-04 -2.95722E-05  9.48564E-02  1.57691E-03  2.58761E-03  6.64372E-04  7.58624E-05
  2.100  6.02138E-02 -6.22190E-04 -1.68892E-03 -3.68778E-04 -3.92590E-05  9.48185E-02  8.28102E-04  2.58450E-03  7.78879E-04  1.00450E-04
  2.200  6.03791E-02 -1.99297E-05 -1.72620E-03 -4.33278E-04 -5.09540E-05  9.48107E-02  1.30150E-04  2.50835E-03  8.93399E-04  1.30000E-04
  2.300  6.05131E-02  5.68148E-04 -1.72515E-03 -4.99666E-04 -6.47678E-05  9.48368E-02 -4.83914E-04  2.35853E-03  1.00328E-03  1.64698E-04
  2.400  6.06130E-02  1.12054E-03 -1.68363E-03 -5.66067E-04 -8.07522E-05  9.48977E-02 -9.86194E-04  2.13822E-03  1.10346E-03  2.04534E-04
  2.500  6.06776E-02  1.61773E-03 -1.60113E-03 -6.30394E-04 -9.88925E-05  9.49912E-02 -1.35536E-03  1.85431E-03  1.18870E-03  2.49263E-04
  2.600  6.07074E-02  2.04310E-03 -1.47891E-03 -6.90415E-04 -1.19103E-04  9.51123E-02 -1.57764E-03  1.51717E-03  1.25388E-03  2.98373E-04
  2.700  6.07043E-02  2.38363E-03 -1.31993E-03 -7.43832E-04 -1.41224E-04  9.52531E-02 -1.64741E-03  1.14010E-03  1.29424E-03  3.51067E-04
  2.800  6.06713E-02  2.63043E-03 -1.12886E-03 -7.88360E-04 -1.65025E-04  9.54039E-02 -1.56724E-03  7.38644E-04  1.30572E-03  4.06246E-04
  2.900  6.06132E-02  2.77910E-03 -9.11833E-04 -8.21812E-04 -1.90206E-04  9.55529E-02 -1.34744E-03  3.29729E-04  1.28525E-03  4.62517E-04
  3.000  6.05349E-02  2.82990E-03 -6.76318E-04 -8.42172E-04 -2.16403E-04  9.56875E-02 -1.00525E-03 -6.93146E-05  1.23098E-03  5.18207E-04
  3.100  6.04423E-02  2.78768E-03 -4.30817E-04 -8.47672E-04 -2.43192E-04  9.57945E-02 -5.63483E-04 -4.41791E-04  1.14252E-03  5.71404E-04
  3.200  6.03409E-02  2.66167E-03 -1.84583E-04 -8.36858E-04 -2.70093E-04  9.58610E-02 -4.89442E-05 -7.72674E-04  1.02113E-03  6.20014E-04
  3.300  6.02360E-02  2.46507E-03  5.27076E-05 -8.08658E-04 -2.96574E-04  9.58746E-02  5.09437E-04 -1.04956E-03  8.69745E-04  6.61840E-04
  3.400  6.01316E-02  2.21454E-03  2.71288E-04 -7.62432E-04 -3.22053E-04  9.58245E-02  1.08259E-03 -1.26352E-03  6.92977E-04  6.94682E-04
  3.500  6.00305E-02  1.92953E-03  4.61646E-04 -6.98025E-04 -3.45901E-04  9.57014E-02  1.64326E-03 -1.40970E-03  4.97020E-04  7.16460E-04
  3.600  5.99336E-02  1.63153E-03  6.14861E-04 -6.15809E-04 -3.67442E-04  9.54979E-02  2.16792E-03 -1.48774E-03  2.89409E-04  7.25336E-04
  3.700  5.98398E-02  1.34327E-03  7.22926E-04 -5.16715E-04 -3.85960E-04  9.52087E-02  2.63831E-03 -1.50188E-03  7.86928E-05  7.19864E-04
  3.800  5.97456E-02  1.08782E-03  7.79058E-04 -4.02256E-04 -4.00702E-04  9.48306E-02  3.04278E-03 -1.46079E-03 -1.25976E-04  6.99114E-04
  3.900  5.96449E-02  8.87770E-04  7.77972E-04 -2.74529E-04 -4.10893E-04  9.43622E-02  3.37704E-03 -1.37704E-03 -3.15338E-04  6.62802E-04
  4.000  5.95296E-02  7.64310E-04  7.16123E-04 -1.36208E-04 -4.15751E-04  9.38037E-02  3.64455E-03 -1.26643E-03 -4.80553E-04  6.11379E-04
  4.100  5.93890E-02  7.36415E-04  5.91904E-04  9.49539E-06 -4.14515E-04  9.31561E-02  3.85621E-03 -1.14691E-03 -6.13749E-04  5.46091E-04
  4.200  5.92106E-02  8.20057E-04  4.05785E-04  1.58891E-04 -4.06472E-04  9.24211E-02  4.02969E-03 -1.03748E-03 -7.08529E-04  4.68990E-04
  4.300  5.89804E-02  1.02750E-03  1.60389E-04  3.07899E-04 -3.91003E-04  9.16004E-02  4.18809E-03 -9.56905E-04 -7.60417E-04  3.82891E-04
  4.400  5.86831E-02  1.36673E-03 -1.39508E-04  4.52175E-04 -3.67621E-04  9.06950E-02  4.35832E-03 -9.22452E-04 -7.67195E-04  2.91272E-04
  4.500  5.83029E-02  1.84097E-03 -4.87062E-04  5.87249E-04 -3.36019E-04  8.97047E-02  4.56905E-03 -9.48712E-04 -7.29107E-04  1.98117E-04
  4.600  5.78242E-02  2.44839E-03 -8.73529E-04  7.08703E-04 -2.96114E-04  8.86275E-02  4.84859E-03 -1.04657E-03 -6.48895E-04  1.07712E-04
  4.700  5.72318E-02  3.18201E-03 -1.28853E-03  8.12356E-04 -2.48089E-04  8.74597E-02  5.22265E-03 -1.22244E-03 -5.31677E-04  2.44056E-05
  4.800  5.65116E-02  4.02978E-03 -1.72041E-03  8.94460E-04 -1.92419E-04  8.61955E-02  5.71224E-03 -1.47775E-03 -3.84653E-04 -4.76503E-05
  4.900  5.56516E-02  4.97483E-03 -2.15664E-03  9.51892E-04 -1.29889E-04  8.48270E-02  6.33191E-03 -1.80886E-03 -2.16668E-04 -1.04762E-04
  5.000  5.46419E-02  5.99600E-03 -2.58431E-03  9.82324E-04 -6.15963E-05  8.33447E-02  7.08833E-03 -2.20719E-03 -3.76562E-05 -1.43935E-04
  5.100  5.34754E-02  7.06855E-03 -2.99065E-03  9.84374E-04  1.10771E-05  8.17379E-02  7.97944E-03 -2.65982E-03  1.41986E-04 -1.63071E-04
  5.200  5.21482E-02  8.16496E-03 -3.36356E-03  9.57701E-04  8.64970E-05  7.99951E-02  8.99409E-03 -3.15025E-03  3.12062E-04 -1.61116E-04
  5.300  5.06595E-02  9.25599E-03 -3.69212E-03  9.03057E-04  1.62838E-04  7.81054E-02  1.01124E-02 -3.65947E-03  4.63207E-04 -1.38132E-04
  5.400  4.90122E-02  1.03118E-02 -3.96704E-03  8.22283E-04  2.38157E-04  7.60588E-02  1.13067E-02 -4.16714E-03  5.87455E-04 -9.52949E-05
  5.500  4.72129E-02  1.13031E-02 -4.18106E-03  7.18235E-04  3.10479E-04  7.38475E-02  1.25429E-02 -4.65281E-03  6.78690E-04 -3.48190E-05
  5.600  4.52713E-02  1.22023E-02 -4.32923E-03  5.94665E-04  3.77886E-04  7.14665E-02  1.37822E-02 -5.09712E-03  7.32960E-04  4.01936E-05
  5.700  4.32007E-02  1.29845E-02 -4.40907E-03  4.56037E-04  4.38613E-04  6.89147E-02  1.49834E-02 -5.48292E-03  7.48622E-04  1.25957E-04
  5.800  4.10172E-02  1.36287E-02 -4.42062E-03  3.07316E-04  4.91125E-04  6.61953E-02  1.61052E-02 -5.79609E-03  7.26328E-04  2.18246E-04
  5.900  3.87396E-02  1.41184E-02 -4.36632E-03  1.53719E-04  5.34197E-04  6.33161E-02  1.71083E-02 -6.02624E-03  6.68849E-04  3.12664E-04
  6.000  3.63887E-02  1.44422E-02 -4.25084E-03  4.66873E-07  5.66960E-04  6.02901E-02  1.79573E-02 -6.16706E-03  5.80767E-04  4.04909E-04
  6.100  3.39872E-02  1.45943E-02 -4.08072E-03 -1.47466E-04  5.88940E-04  5.71349E-02  1.86230E-02 -6.21643E-03  4.68067E-04  4.91015E-04
  6.200  3.15584E-02  1.45742E-02 -3.86399E-03 -2.85575E-04  6.00066E-04  5.38727E-02  1.90832E-02 -6.17621E-03  3.37658E-04  5.67564E-04
  6.300  2.91262E-02  1.43870E-02 -3.60971E-03 -4.10015E-04  6.00657E-04  5.05296E-02  1.93241E-02 -6.05190E-03  1.96878E-04  6.31840E-04
  6.400  2.67143E-02  1.40426E-02 -3.32752E-03 -5.17739E-04  5.91389E-04  4.71346E-02  1.93401E-02 -5.85196E-03  5.30051E-05  6.81930E-04
  6.500  2.43455E-02  1.35555E-02 -3.02712E-03 -6.06592E-04  5.73240E-04  4.37191E-02  1.91343E-02 -5.58721E-03 -8.71708E-05  7.16759E-04
  6.600  2.20411E-02  1.29434E-02 -2.71789E-03 -6.75337E-04  5.47429E-04  4.03152E-02  1.87175E-02 -5.26996E-03 -2.17710E-04  7.36073E-04
  6.700  1.98206E-02  1.22268E-02 -2.40848E-03 -7.23642E-04  5.15339E-04  3.69553E-02  1.81073E-02 -4.91328E-03 -3.33785E-04  7.40367E-04
  6.800  1.77012E-02  1.14280E-02 -2.10652E-03 -7.52007E-04  4.78442E-04  3.36705E-02  1.73271E-02 -4.53026E-03 -4.31834E-04  7.30774E-04
  6.900  1.56973E-02  1.05697E-02 -1.81840E-03 -7.61655E-04  4.38226E-04  3.04897E-02  1.64043E-02 -4.13337E-03 -5.09624E-04  7.08928E-04
  7.000  1.38205E-02  9.67466E-03 -1.54918E-03 -7.54401E-04  3.96121E-04  2.74390E-02  1.53690E-02 -3.73396E-03 -5.66206E-04  6.76809E-04
  7.100  1.20792E-02  8.76440E-03 -1.30252E-03 -7.32493E-04  3.53451E-04  2.45408E-02  1.42522E-02 -3.34185E-03 -6.01802E-04  6.36592E-04
  7.200  1.04790E-02  7.85874E-03 -1.08071E-03 -6.98458E-04  3.11383E-04  2.18133E-02  1.30848E-02 -2.96514E-03 -6.17628E-04  5.90503E-04
  7.300  9.02225E-03  6.97519E-03 -8.84840E-04 -6.54944E-04  2.70897E-04  1.92701E-02  1.18959E-02 -2.61008E-03 -6.15680E-04  5.40690E-04
  7.400  7.70875E-03  6.12852E-03 -7.14890E-04 -6.04582E-04  2.32775E-04  1.69206E-02  1.07122E-02 -2.28112E-03 -5.98500E-04  4.89127E-04
  7.500  6.53567E-03  5.33063E-03 -5.69956E-04 -5.49871E-04  1.97587E-04  1.47695E-02  9.55692E-03 -1.98101E-03 -5.68953E-04  4.37540E-04
  7.600  5.49799E-03  4.59037E-03 -4.48442E-04 -4.93079E-04  1.65712E-04  1.28174E-02  8.44940E-03 -1.71100E-03 -5.30010E-04  3.87359E-04
  7.700  4.58888E-03  3.91375E-03 -3.48264E-04 -4.36178E-04  1.37342E-04  1.10612E-02  7.40497E-03 -1.47109E-03 -4.84573E-04  3.39701E-04
  7.800  3.80004E-03  3.30404E-03 -2.67044E-04 -3.80809E-04  1.12516E-04  9.49461E-03  6.43488E-03 -1.26029E-03 -4.35325E-04  2.95374E-04
  7.900  3.12214E-03  2.76212E-03 -2.02274E-04 -3.28258E-04  9.11415E-05  8.10849E-03  5.54648E-03 -1.07685E-03 -3.84634E-04  2.54897E-04
  8.000  2.54517E-03  2.28682E-03 -1.51462E-04 -2.79470E-04  7.30262E-05  6.89176E-03  4.74360E-03 -9.18553E-04 -3.34479E-04  2.18539E-04
  8.100  2.05881E-03  1.87530E-03 -1.12238E-04 -2.35071E-04  5.79058E-05  5.83179E-03  4.02700E-03 -7.82883E-04 -2.86432E-04  1.86352E-04
  8.200  1.65276E-03  1.52346E-03 -8.24308E-05 -1.95398E-04  4.54712E-05  4.91507E-03  3.39489E-03 -6.67235E-04 -2.41656E-04  1.58225E-04
  8.300  1.31697E-03  1.22632E-03 -6.01194E-05 -1.60550E-04  3.53915E-05  4.12765E-03  2.84345E-03 -5.69037E-04 -2.00929E-04  1.33925E-04
  8.400  1.04189E-03  9.78364E-04 -4.36526E-05 -1.30429E-04  2.73337E-05  3.45562E-03  2.36739E-03 -4.85861E-04 -1.64694E-04  1.13136E-04
  8.500  8.18653E-04  7.73860E-04 -3.16520E-05 -1.04789E-04  2.09774E-05  2.88547E-03  1.96045E-03 -4.15480E-04 -1.33109E-04  9.54972E-05
  8.600  6.39127E-04  6.07102E-04 -2.29979E-05 -8.32822E-05  1.60262E-05  2.40435E-03  1.61576E-03 -3.55912E-04 -1.06105E-04  8.06317E-05
  8.700  4.96038E-04  4.72618E-04 -1.68042E-05 -6.54949E-05  1.22139E-05  2.00031E-03  1.32630E-03 -3.05426E-04 -8.34428E-05  6.81666E-05
  8.800  3.82970E-04  3.65313E-04 -1.23880E-05 -5.09831E-05  9.30894E-06  1.66242E-03  1.08513E-03 -2.62543E-04 -6.47678E-05  5.77500E-05
  8.900  2.94355E-04  2.80567E-04 -9.23603E-06 -3.92986E-05  7.11469E-06  1.38085E-03  8.85645E-04 -2.26013E-04 -4.96550E-05  4.90611E-05
  9.000  2.25442E-04  2.14284E-04 -6.97199E-06 -3.00099E-05  5.46835E-06  1.14688E-03  7.21698E-04 -1.94795E-04 -3.76476E-05  4.18147E-05
  9.100  1.72232E-04  1.62914E-04 -5.32676E-06 -2.27162E-05  4.23825E-06  9.52864E-04  5.87720E-04 -1.68029E-04 -2.82867E-05  3.57636E-05
  9.200  1.31412E-04  1.23437E-04 -4.11214E-06 -1.70565E-05  3.32026E-06  7.92215E-04  4.78761E-04 -1.45004E-04 -2.11334E-05  3.06970E-05
  9.300  1.00270E-04  9.33300E-05 -3.19912E-06 -1.27144E-05  2.63374E-06  6.59290E-04  3.90495E-04 -1.25140E-04 -1.57837E-05  2.64383E-05
  9.400  7.66203E-05  7.05223E-05 -2.50064E-06 -9.41888E-06  2.11746E-06  5.49311E-04  3.19200E-04 -1.07958E-04 -1.18770E-05  2.28412E-05
  9.500  5.87219E-05  5.33412E-05 -1.95843E-06 -6.94300E-06  1.72580E-06  4.58268E-04  2.61723E-04 -9.30635E-05 -9.10023E-06  1.97857E-05
  9.600  4.52044E-05  4.04557E-05 -1.53340E-06 -5.10045E-06  1.42529E-06  3.82820E-04  2.15419E-04 -8.01311E-05 -7.18806E-06  1.71742E-05
  9.700  3.50020E-05  3.08210E-05 -1.19886E-06 -3.74120E-06  1.19167E-06  3.20202E-04  1.78101E-04 -6.88891E-05 -5.92057E-06  1.49278E-05
  9.800  2.72943E-05  2.36280E-05 -9.36026E-07 -2.74658E-06  1.00747E-06  2.68138E-04  1.47976E-04 -5.91098E-05 -5.11943E-06  1.29830E-05
  9.900  2.14558E-05  1.82569E-05 -7.31106E-07 -2.02429E-06  8.60162E-07  2.24759E-04  1.23584E-04 -5.06016E-05 -4.64306E-06  1.12889E-05
 10.000  1.70140E-05  1.42382E-05 -5.73474E-07 -1.50361E-06  7.40660E-07  1.88538E-04  1.03753E-04 -4.32019E-05 -4.38161E-06  9.80485E-06
 10.100  1.36141E-05  1.12192E-05 -4.54617E-07 -1.13115E-06  6.42319E-07  1.58228E-04  8.75423E-05 -3.67719E-05 -4.25188E-06  8.49853E-06
 10.200  1.09914E-05  8.93714E-06 -3.67492E-07 -8.67045E-07  5.60184E-07  1.32812E-04  7.42066E-05 -3.11925E-05 -4.19266E-06  7.34421E-06
 10.300  8.94976E-06  7.19762E-06 -3.06148E-07 -6.81766E-07  4.90502E-07  1.11460E-04  6.31563E-05 -2.63608E-05 -4.16050E-06  6.32151E-06
 10.400  7.34375E-06  5.85739E-06 -2.65478E-07 -5.53580E-07  4.30400E-07  9.34909E-05  5.39286E-05 -2.21873E-05 -4.12603E-06  5.41423E-06
 10.500  6.06618E-06  4.81156E-06 -2.41060E-07 -4.66484E-07  3.77682E-07  7.83499E-05  4.61616E-05 -1.85934E-05 -4.07081E-06  4.60944E-06
 10.600  5.03801E-06  3.98361E-06 -2.29025E-07 -4.08650E-07  3.30697E-07  6.55794E-05  3.95737E-05 -1.55099E-05 -3.98467E-06  3.89673E-06
 10.700  4.20098E-06  3.31801E-06 -2.25971E-07 -3.71266E-07  2.88245E-07  5.48023E-05  3.39460E-05 -1.28751E-05 -3.86360E-06  3.26754E-06
 10.800  3.51211E-06  2.77462E-06 -2.28903E-07 -3.47703E-07  2.49501E-07  4.57066E-05  2.91091E-05 -1.06341E-05 -3.70793E-06  2.71462E-06
 10.900  2.93966E-06  2.32461E-06 -2.35201E-07 -3.32933E-07  2.13953E-07  3.80326E-05  2.49312E-05 -8.73747E-06 -3.52098E-06  2.23165E-06
 11.000  2.46009E-06  1.94735E-06 -2.42611E-07 -3.23136E-07  1.81327E-07  3.15634E-05  2.13096E-05 -7.14073E-06 -3.30791E-06  1.81292E-06
 11.100  2.05587E-06  1.62813E-06 -2.49251E-07 -3.15436E-07  1.51528E-07  2.61171E-05  1.81639E-05 -5.80388E-06 -3.07488E-06  1.45306E-06
 11.200  1.71378E-06  1.35644E-06 -2.53624E-07 -3.07726E-07  1.24572E-07  2.15401E-05  1.54296E-05 -4.69097E-06 -2.82842E-06  1.14691E-06
 11.300  1.42376E-06  1.12469E-06 -2.54631E-07 -2.98543E-07  1.00527E-07  1.77023E-05  1.30547E-05 -3.76982E-06 -2.57493E-06  8.89444E-07
 11.400  1.17795E-06  9.27288E-07 -2.51574E-07 -2.86970E-07  7.94658E-08  1.44930E-05  1.09962E-05 -3.01179E-06 -2.32033E-06  6.75705E-07
 11.500  9.70114E-07  7.59910E-07 -2.44141E-07 -2.72557E-07  6.14264E-08  1.18178E-05  9.21752E-06 -2.39156E-06 -2.06989E-06  5.00829E-07
 11.600  7.95094E-07  6.19048E-07 -2.32373E-07 -2.55242E-07  4.63849E-08  9.59561E-06  7.68686E-06 -1.88692E-06 -1.82806E-06  3.60077E-07
 11.700  6.48538E-07  5.01674E-07 -2.16623E-07 -2.35268E-07  3.42433E-08  7.75704E-06  6.37608E-06 -1.47858E-06 -1.59843E-06  2.48880E-07
 11.800  5.26655E-07  4.05032E-07 -1.97486E-07 -2.13111E-07  2.48268E-08  6.24231E-06  5.25979E-06 -1.14994E-06 -1.38372E-06  1.62901E-07
 11.900  4.26080E-07  3.26534E-07 -1.75735E-07 -1.89395E-07  1.78908E-08  5.00010E-06  4.31485E-06 -8.86827E-07 -1.18582E-06  9.80884E-08
 12.000  3.43784E-07  2.63705E-07 -1.52245E-07 -1.64828E-07  1.31353E-08  3.98627E-06  3.52007E-06 -6.77279E-07 -1.00589E-06  5.07228E-08
 12.100  2.77032E-07  2.14185E-07 -1.27921E-07 -1.40132E-07  1.02230E-08  3.16302E-06  2.85603E-06 -5.11281E-07 -8.44411E-07  1.74527E-08
 12.200  2.23352E-07  1.75747E-07 -1.03639E-07 -1.15994E-07  8.79922E-09  2.49799E-06  2.30497E-06 -3.80521E-07 -7.01292E-07 -4.68399E-09
 12.300  1.80533E-07  1.46329E-07 -8.01861E-08 -9.30225E-08  8.51152E-09  1.96364E-06  1.85079E-06 -2.78150E-07 -5.75997E-07 -1.82528E-08
 12.400  1.46615E-07  1.24068E-07 -5.82320E-08 -7.17186E-08  9.02667E-09  1.53662E-06  1.47898E-06 -1.98564E-07 -4.67625E-07 -2.54291E-08
 12.500  1.19889E-07  1.07326E-07 -3.82974E-08 -5.24610E-08  1.00445E-08  1.19720E-06  1.17662E-06 -1.37201E-07 -3.75013E-07 -2.80167E-08
 12.600  9.88886E-08  9.47014E-08 -2.07474E-08 -3.55005E-08  1.13075E-08  9.28877E-07  9.32300E-07 -9.03620E-08 -2.96821E-07 -2.74747E-08
 12.700  8.23803E-08  8.50362E-08 -5.79264E-09 -2.09643E-08  1.26064E-08  7.17874E-07  7.36075E-07 -5.50581E-08 -2.31610E-07 -2.49519E-08
 12.800  6.93454E-08  7.74053E-08  6.49832E-09 -8.86791E-09  1.37818E-08  5.52801E-07  5.79368E-07 -2.88767E-08 -1.77907E-07 -2.13253E-08
 12.900  5.89611E-08  7.10997E-08  1.61801E-08  8.68281E-10  1.47224E-08  4.24297E-07  4.54869E-07 -9.87248E-09 -1.34254E-07 -1.72393E-08
 13.000  5.05778E-08  6.56021E-08  2.34066E-08  8.39932E-09  1.53608E-08  3.24728E-07  3.56413E-07  3.52256E-09 -9.92543E-08 -1.31455E-08
 13.100  4.36944E-08  6.05577E-08  2.84057E-08  1.39352E-08  1.56672E-08  2.47912E-07  2.78864E-07  1.25721E-08 -7.15996E-08 -9.34009E-09
 13.200  3.79340E-08  5.57436E-08  3.14542E-08  1.77208E-08  1.56427E-08  1.88884E-07  2.17984E-07  1.82939E-08 -5.00914E-08 -5.99763E-09
 13.300  3.30203E-08  5.10397E-08  3.28543E-08  2.00185E-08  1.53114E-08  1.43683E-07  1.70314E-07  2.15056E-08 -3.36532E-08 -3.20136E-09
 13.400  2.87562E-08  4.64002E-08  3.29138E-08  2.10917E-08  1.47135E-08  1.09175E-07  1.33055E-07  2.28623E-08 -2.13358E-08 -9.68792E-10
 13.500  2.50049E-08  4.18301E-08  3.19301E-08  2.11938E-08  1.38988E-08  8.28939E-08  1.03966E-07  2.28856E-08 -1.23161E-08  7.27072E-10
 13.600  2.16735E-08  3.73647E-08  3.01777E-08  2.05580E-08  1.29211E-08  6.29171E-08  8.12649E-08  2.19871E-08 -5.89288E-09  1.94082E-09
 13.700  1.87002E-08  3.30541E-08  2.79006E-08  1.93919E-08  1.18338E-08  4.77524E-08  6.35462E-08  2.04882E-08 -1.47801E-09  2.74161E-09
 13.800  1.60436E-08  2.89512E-08  2.53071E-08  1.78739E-08  1.06866E-08  3.62495E-08  4.97069E-08  1.86355E-08  1.41348E-09  3.20357E-09
 13.900  1.36754E-08  2.51043E-08  2.25688E-08  1.61519E-08  9.52332E-09  2.75264E-08  3.88865E-08  1.66143E-08  3.17491E-09  3.39913E-09
 14.000  1.15742E-08  2.15514E-08  1.98210E-08  1.43445E-08  8.38054E-09  2.09102E-08  3.04165E-08  1.45603E-08  4.11974E-09  3.39474E-09
 14.100  9.72221E-09  1.83185E-08  1.71654E-08  1.25429E-08  7.28712E-09  1.58890E-08  2.37784E-08  1.25688E-08  4.49325E-09  3.24841E-09
 14.200  8.10283E-09  1.54189E-08  1.46739E-08  1.08135E-08  6.26435E-09  1.20754E-08  1.85707E-08  1.07031E-08  4.48355E-09  3.00866E-09
 14.300  6.69922E-09  1.28540E-08  1.23928E-08  9.20199E-09  5.32651E-09  9.17615E-09  1.44823E-08  9.00158E-09  4.23181E-09  2.71452E-09
 14.400  5.49394E-09  1.06154E-08  1.03474E-08  7.73626E-09  4.48170E-09  6.97010E-09  1.12718E-08  7.48367E-09  3.84126E-09  2.39605E-09
 14.500  4.46887E-09  8.68606E-09  8.54666E-09  6.43041E-09  3.73290E-09  5.29020E-09  8.75145E-09  6.15477E-09  3.38514E-09  2.07542E-09
 14.600  3.60554E-09  7.04355E-09  6.98685E-09  5.28780E-09  3.07897E-09  4.01031E-09  6.77475E-09  5.01033E-09  2.91346E-09  1.76808E-09
 14.700  2.88549E-09  5.66145E-09  5.65563E-09  4.30397E-09  2.51569E-09  3.03506E-09  5.22681E-09  4.03916E-09  2.45863E-09  1.48397E-09
 14.800  2.29073E-09  4.51144E-09  4.53486E-09  3.46911E-09  2.03670E-09  2.29216E-09  4.01727E-09  3.22601E-09  2.04001E-09  1.22872E-09
 14.900  1.80415E-09  3.56480E-09  3.60311E-09  2.77008E-09  1.63429E-09  1.72673E-09  3.07479E-09  2.55355E-09  1.66768E-09  1.00475E-09
 15.000  1.40980E-09  2.79361E-09  2.83762E-09  2.19200E-09  1.30007E-09  1.29695E-09  2.34285E-09  2.00382E-09  1.34524E-09  8.12094E-10
 15.100  1.09312E-09  2.17162E-09  2.21570E-09  1.71947E-09  1.02551E-09  9.70891E-10  1.77664E-09  1.55929E-09  1.07202E-09  6.49258E-10
 15.200  8.41124E-10  1.67478E-09  1.71575E-09  1.33744E-09  8.02289E-10  7.24121E-10  1.34050E-09  1.20352E-09  8.44765E-10  5.13750E-10
 15.300  6.42355E-10  1.28161E-09  1.31790E-09  1.03176E-09  6.22624E-10  5.37904E-10  1.00615E-09  9.21571E-10  6.58754E-10  4.02560E-10
 15.400  4.86926E-10  9.73295E-10  1.00433E-09  7.89607E-10  4.79401E-10  3.97856E-10  7.51113E-10  7.00224E-10  5.08668E-10  3.12496E-10
 15.500  3.66413E-10  7.33639E-10  7.59494E-10  5.99585E-10  3.66287E-10  2.92930E-10  5.57621E-10  5.28023E-10  3.89130E-10  2.40413E-10
 15.600  2.73745E-10  5.48944E-10  5.70025E-10  4.51832E-10  2.77752E-10  2.14648E-10  4.11636E-10  3.95227E-10  2.95047E-10  1.83365E-10
 15.700  2.03064E-10  4.07789E-10  4.24673E-10  3.37958E-10  2.09058E-10  1.56506E-10  3.02126E-10  2.93684E-10  2.21812E-10  1.38691E-10
 15.800  1.49581E-10  3.00786E-10  3.14100E-10  2.50942E-10  1.56210E-10  1.13530E-10  2.20463E-10  2.16677E-10  1.65392E-10  1.04054E-10
 15.900  1.09426E-10  2.20314E-10  2.30671E-10  1.84999E-10  1.15888E-10  8.19234E-11  1.59931E-10  1.58745E-10  1.22349E-10  7.74567E-11
 16.000  7.95063E-11  1.60265E-10  1.68222E-10  1.35427E-10  8.53694E-11  5.87998E-11  1.15336E-10  1.15502E-10  8.98145E-11  5.72178E-11
 16.100  5.73805E-11  1.15794E-10  1.21839E-10  9.84544E-11  6.24524E-11  4.19738E-11  8.26845E-11  8.34696E-11  6.54408E-11  4.19527E-11
 16.200  4.11383E-11  8.31060E-11  8.76505E-11  7.10897E-11  4.53758E-11  2.97978E-11  5.89256E-11  5.99188E-11  4.73356E-11  3.05364E-11
 16.300  2.93010E-11  5.92534E-11  6.26367E-11  5.09878E-11  3.27467E-11  2.10364E-11  4.17450E-11  4.27300E-11  3.39969E-11  2.20685E-11
 16.400  2.07353E-11  4.19728E-11  4.44683E-11  3.63292E-11  2.34759E-11  1.47681E-11  2.93988E-11  3.02746E-11  2.42476E-11  1.58375E-11
 16.500  1.45801E-11  2.95415E-11  3.13661E-11  2.57167E-11  1.67195E-11  1.03094E-11  2.05818E-11  2.13126E-11  1.71767E-11  1.12879E-11
 16.600  1.01875E-11  2.06605E-11  2.19833E-11  1.80876E-11  1.18306E-11  7.15624E-12  1.43244E-11  1.49087E-11  1.20866E-11  7.99113E-12
 16.700  7.07399E-12  1.43590E-11  1.53104E-11  1.26412E-11  8.31775E-12  4.93948E-12  9.91090E-12  1.03639E-11  8.44913E-12  5.61976E-12
 16.800  4.88177E-12  9.91787E-12  1.05967E-11  8.77961E-12  5.81106E-12  3.39016E-12  6.81726E-12  7.16007E-12  5.86830E-12  3.92633E-12
 16.900  3.34840E-12  6.80846E-12  7.28913E-12  6.05994E-12  4.03445E-12  2.31368E-12  4.66204E-12  4.91646E-12  4.04992E-12  2.72557E-12
 17.000  2.28281E-12  4.64564E-12  4.98351E-12  4.15719E-12  2.78370E-12  1.57013E-12  3.16976E-12  3.35549E-12  2.77751E-12  1.88005E-12
 17.100  1.54704E-12  3.15090E-12  3.38669E-12  2.83463E-12  1.90897E-12  1.05955E-12  2.14276E-12  2.27644E-12  1.89310E-12  1.28872E-12
 17.200  1.04222E-12  2.12444E-12  2.28783E-12  1.92127E-12  1.30118E-12  7.11006E-13  1.44023E-12  1.53525E-12  1.28244E-12  8.77921E-13
 17.300  6.98021E-13  1.42395E-12  1.53640E-12  1.29449E-12  8.81589E-13  4.74455E-13  9.62535E-13  1.02931E-12  8.63534E-13  5.94425E-13
 17.400  4.64782E-13  9.48892E-13  1.02576E-12  8.67068E-13  5.93756E-13  3.14845E-13  6.39650E-13  6.86097E-13  5.78000E-13  4.00047E-13
 17.500  3.07698E-13  6.28677E-13  6.80873E-13  5.77398E-13  3.97547E-13  2.07774E-13  4.22692E-13  4.54692E-13  3.84602E-13  2.67625E-13
 17.600  2.02543E-13  4.14143E-13  4.49356E-13  3.82285E-13  2.64623E-13  1.36361E-13  2.77765E-13  2.99615E-13  2.54424E-13  1.77980E-13
 17.700  1.32571E-13  2.71274E-13  2.94877E-13  2.51658E-13  1.75125E-13  8.90021E-14  1.81516E-13  1.96311E-13  1.67337E-13  1.17671E-13
 17.800  8.62848E-14  1.76692E-13  1.92414E-13  1.64728E-13  1.15232E-13  5.77746E-14  1.17965E-13  1.27903E-13  1.09430E-13  7.73476E-14
 17.900  5.58468E-14  1.14446E-13  1.24852E-13  1.07220E-13  7.53906E-14  3.73003E-14  7.62446E-14  8.28691E-14  7.11567E-14  5.05505E-14
 18.000  3.59465E-14  7.37185E-14  8.05640E-14  6.93992E-14  4.90460E-14  2.39518E-14  4.90110E-14  5.33945E-14  4.60098E-14  3.28494E-14
 18.100  2.30107E-14  4.72238E-14  5.16997E-14  4.46707E-14  3.17285E-14  1.52977E-14  3.13345E-14  3.42146E-14  2.95842E-14  2.12263E-14
 18.200  1.46498E-14  3.00866E-14  3.29955E-14  2.85955E-14  2.04115E-14  9.71826E-15  1.99255E-14  2.18049E-14  1.89176E-14  1.36391E-14
 18.300  9.27638E-15  1.90646E-14  2.09439E-14  1.82052E-14  1.30585E-14  6.14099E-15  1.26029E-14  1.38210E-14  1.20306E-14  8.71526E-15
 18.400  5.84237E-15  1.20155E-14  1.32225E-14  1.15275E-14  8.30851E-15  3.86000E-15  7.92892E-15  8.71339E-15  7.60918E-15  5.53831E-15
 18.500  3.65997E-15  7.53239E-15  8.30308E-15  7.25987E-15  5.25752E-15  2.41350E-15  4.96201E-15  5.46398E-15  4.78673E-15  3.50021E-15
 18.600  2.28065E-15  4.69692E-15  5.18618E-15  4.54772E-15  3.30888E-15  1.50117E-15  3.08897E-15  3.40818E-15  2.99505E-15  2.20012E-15
 18.700  1.41367E-15  2.91338E-15  3.22221E-15  2.83364E-15  2.07128E-15  9.28852E-16  1.91290E-15  2.11466E-15  1.86402E-15  1.37548E-15
 18.800  8.71680E-16  1.79763E-15  1.99146E-15  1.75628E-15  1.28964E-15  5.71755E-16  1.17845E-15  1.30520E-15  1.15397E-15  8.55318E-16
 18.900  5.34689E-16  1.10341E-15  1.22438E-15  1.08282E-15  7.98705E-16  3.50131E-16  7.22231E-16  8.01389E-16  7.10636E-16  5.29036E-16
 19.000  3.26282E-16  6.73776E-16  7.48855E-16  6.64118E-16  4.92043E-16  2.13315E-16  4.40355E-16  4.89504E-16  4.35336E-16  3.25492E-16
 19.100  1.98082E-16  4.09310E-16  4.55650E-16  4.05203E-16  3.01531E-16  1.29297E-16  2.67117E-16  2.97459E-16  2.65302E-16  1.99208E-16
 19.200  1.19638E-16  2.47378E-16  2.75822E-16  2.45953E-16  1.83818E-16  7.79739E-17  1.61207E-16  1.79832E-16  1.60845E-16  1.21283E-16
 19.300  7.18912E-17  1.48747E-16  1.66112E-16  1.48523E-16  1.11476E-16  4.67853E-17  9.67966E-17  1.08165E-16  9.70145E-17  7.34565E-17
 19.400  4.29813E-17  8.89880E-17  9.95317E-17  8.92302E-17  6.72547E-17  2.79306E-17  5.78285E-17  6.47293E-17  5.82159E-17  4.42600E-17
 19.500  2.55676E-17  5.29685E-17  5.93362E-17  5.33354E-17  4.03671E-17  1.65910E-17  3.43747E-17  3.85406E-17  3.47563E-17  2.65311E-17
 19.600  1.51327E-17  3.13704E-17  3.51954E-17  3.17187E-17  2.41048E-17  9.80608E-18  2.03312E-17  2.28323E-17  2.06454E-17  1.58224E-17
 19.700  8.91194E-18  1.84862E-17  2.07717E-17  1.87682E-17  1.43207E-17  5.76712E-18  1.19652E-17  1.34588E-17  1.22018E-17  9.38809E-18
 19.800  5.22234E-18  1.08395E-17  1.21980E-17  1.10497E-17  8.46487E-18  3.37499E-18  7.00687E-18  7.89404E-18  7.17536E-18  5.54215E-18
 19.900  3.04513E-18  6.32437E-18  7.12761E-18  6.47296E-18  4.97829E-18  1.96537E-18  4.08303E-18  4.60719E-18  4.19849E-18  3.25527E-18
  67 181 200   0.100
  0.000  5.70678E-02 -3.10317E-16 -3.33067E-16 -8.63140E-16  1.07287E-16  9.30017E-02 -4.80991E-16 -7.28584E-16 -8.88158E-16 -1.50201E-15
  0.100  5.70708E-02 -4.75509E-05 -3.64880E-08 -1.33337E-11 -2.75369E-15  9.30338E-02  7.75429E-05  7.81831E-08  3.30106E-11 -1.57354E-16
  0.200  5.70801E-02 -1.87664E-04 -5.78667E-07 -8.46528E-10 -7.94272E-13  9.31283E-02  3.05470E-04  1.23746E-06  2.09336E-09  1.98988E-12
  0.300  5.70970E-02 -4.12849E-04 -2.88655E-06 -9.51528E-09 -2.00526E-11  9.32790E-02  6.69964E-04  6.15242E-06  2.34841E-08  5.03122E-11
  0.400  5.71231E-02 -7.11039E-04 -8.93579E-06 -5.24779E-08 -1.96464E-10  9.34766E-02  1.14893E-03  1.89577E-05  1.29165E-07  4.92804E-10
  0.500  5.71608E-02 -1.06620E-03 -2.12403E-05 -1.95456E-07 -1.14239E-09  9.37090E-02  1.71331E-03  4.47935E-05  4.79400E-07  2.86398E-09
  0.600  5.72125E-02 -1.45911E-03 -4.26219E-05 -5.66805E-07 -4.76587E-09  9.39623E-02  2.32887E-03  8.92278E-05  1.38431E-06  1.19406E-08
  0.700  5.72811E-02 -1.86838E-03 -7.59433E-05 -1.38068E-06 -1.57846E-08  9.42217E-02  2.95822E-03  1.57605E-04  3.35521E-06  3.95198E-08
  0.800  5.73689E-02 -2.27146E-03 -1.23824E-04 -2.95601E-06 -4.40892E-08  9.44730E-02  3.56305E-03  2.54381E-04  7.14217E-06  1.10305E-07
  0.900  5.74779E-02 -2.64580E-03 -1.88360E-04 -5.72738E-06 -1.07989E-07  9.47030E-02  4.10638E-03  3.82502E-04  1.37485E-05  2.69969E-07
  1.000  5.76095E-02 -2.96998E-03 -2.70867E-04 -1.02449E-05 -2.38202E-07  9.49011E-02  4.55472E-03  5.42886E-04  2.44147E-05  5.95053E-07
  1.100  5.77643E-02 -3.22479E-03 -3.71669E-04 -1.71608E-05 -4.82271E-07  9.50595E-02  4.88003E-03  7.34048E-04  4.05689E-05  1.20390E-06
  1.200  5.79415E-02 -3.39415E-03 -4.89946E-04 -2.72021E-05 -9.08916E-07  9.51736E-02  5.06125E-03  9.51909E-04  6.37424E-05  2.26741E-06
  1.300  5.81396E-02 -3.46592E-03 -6.23657E-04 -4.11304E-05 -1.61172E-06  9.52426E-02  5.08550E-03  1.18982E-03  9.54557E-05  4.01822E-06
  1.400  5.83557E-02 -3.43251E-03 -7.69543E-04 -5.96909E-05 -2.71149E-06  9.52689E-02  4.94874E-03  1.43876E-03  1.37081E-04  6.75652E-06
  1.500  5.85857E-02 -3.29121E-03 -9.23213E-04 -8.35531E-05 -4.35671E-06  9.52581E-02  4.65588E-03  1.68778E-03  1.89695E-04  1.08512E-05
  1.600  5.88248E-02 -3.04430E-03 -1.07931E-03 -1.13250E-04 -6.72160E-06  9.52182E-02  4.22043E-03  1.92459E-03  2.53925E-04  1.67348E-05
  1.700  5.90672E-02 -2.69893E-03 -1.23176E-03 -1.49117E-04 -1.00015E-05  9.51589E-02  3.66364E-03  2.13626E-03  3.29814E-04  2.48920E-05
  1.800  5.93066E-02 -2.26675E-03 -1.37403E-03 -1.91241E-04 -1.44059E-05  9.50910E-02  3.01318E-03  2.31003E-03  4.16709E-04  3.58404E-05
  1.900  5.95366E-02 -1.76324E-03 -1.49951E-03 -2.39415E-04 -2.01486E-05  9.50252E-02  2.30156E-03  2.43415E-03  5.13184E-04  5.01044E-05
  2.000  5.97507E-02 -1.20705E-03 -1.60183E-03 -2.93112E-04 -2.74366E-05  9.49716E-02  1.56420E-03  2.49867E-03  6.17006E-04  6.81837E-05
  2.100  5.99431E-02 -6.18955E-04 -1.67522E-03 -3.51472E-04 -3.64583E-05  9.49386E-02  8.37444E-04  2.49617E-03  7.25154E-04  9.05163E-05
  2.200  6.01086E-02 -2.09556E-05 -1.71484E-03 -4.13312E-04 -4.73708E-05  9.49327E-02  1.56558E-04  2.42234E-03  8.33897E-04  1.17438E-04
  2.300  6.02432E-02  5.64829E-04 -1.71704E-03 -4.77144E-04 -6.02890E-05  9.49577E-02 -4.46212E-04  2.27636E-03  9.38916E-04  1.49141E-04
  2.400  6.03442E-02  1.11717E-03 -1.67963E-03 -5.41217E-04 -7.52755E-05  9.50147E-02 -9.43345E-04  2.06116E-03  1.03548E-03  1.85636E-04
  2.500  6.04105E-02  1.61668E-03 -1.60200E-03 -6.03572E-04 -9.23337E-05  9.51017E-02 -1.31346E-03  1.78333E-03  1.11868E-03  2.26708E-04
  2.600  6.04421E-02  2.04670E-03 -1.48525E-03 -6.62097E-04 -1.11403E-04  9.52143E-02 -1.54233E-03  1.45291E-03  1.18368E-03  2.71894E-04
  2.700  6.04411E-02  2.39400E-03 -1.33214E-03 -7.14604E-04 -1.32356E-04  9.53453E-02 -1.62351E-03  1.08285E-03  1.22597E-03  3.20452E-04
  2.800  6.04107E-02  2.64933E-03 -1.14709E-03 -7.58897E-04 -1.55000E-04  9.54853E-02 -1.55847E-03  6.88381E-04  1.24172E-03  3.71353E-04
  2.900  6.03551E-02  2.80780E-03 -9.35984E-04 -7.92848E-04 -1.79077E-04  9.56236E-02 -1.35621E-03  2.86137E-04  1.22800E-03  4.23277E-04
  3.000  6.02795E-02  2.86905E-03 -7.06041E-04 -8.14466E-04 -2.04269E-04  9.57481E-02 -1.03255E-03 -1.06826E-04  1.18308E-03  4.74636E-04
  3.100  6.01897E-02  2.83724E-03 -4.65522E-04 -8.21975E-04 -2.30198E-04  9.58466E-02 -6.08904E-04 -4.74044E-04  1.10660E-03  5.23607E-04
  3.200  6.00912E-02  2.72090E-03 -2.23473E-04 -8.13875E-04 -2.56431E-04  9.59068E-02 -1.10769E-04 -8.00684E-04  9.99780E-04  5.68190E-04
  3.300  5.99892E-02  2.53254E-03  1.05926E-05 -7.89006E-04 -2.82483E-04  9.59174E-02  4.34037E-04 -1.07450E-03  8.65444E-04  6.06280E-04
  3.400  5.98879E-02  2.28815E-03  2.27019E-04 -7.46609E-04 -3.07814E-04  9.58680E-02  9.97272E-04 -1.28668E-03  7.08030E-04  6.35773E-04
  3.500  5.97903E-02  2.00662E-03  4.16345E-04 -6.86378E-04 -3.31833E-04  9.57500E-02  1.55219E-03 -1.43245E-03  5.33465E-04  6.54673E-04
  3.600  5.96974E-02  1.70900E-03  5.69643E-04 -6.08512E-04 -3.53897E-04  9.55565E-02  2.07538E-03 -1.51150E-03  3.48945E-04  6.61220E-04
  3.700  5.96083E-02  1.41770E-03  6.78844E-04 -5.13750E-04 -3.73316E-04  9.52826E-02  2.54835E-03 -1.52806E-03  1.62611E-04  6.54030E-04
  3.800  5.95197E-02  1.15565E-03  7.37048E-04 -4.03401E-04 -3.89358E-04  9.49251E-02  2.95879E-03 -1.49076E-03 -1.68527E-05  6.32211E-04
  3.900  5.94261E-02  9.45409E-04  7.38813E-04 -2.79363E-04 -4.01255E-04  9.44827E-02  3.30150E-03 -1.41214E-03 -1.80696E-04  5.95492E-04
  4.000  5.93193E-02  8.08306E-04  6.80405E-04 -1.44112E-04 -4.08230E-04  9.39551E-02  3.57869E-03 -1.30784E-03 -3.20615E-04  5.44303E-04
  4.100  5.91890E-02  7.63581E-04  5.60002E-04 -6.80785E-07 -4.09510E-04  9.33433E-02  3.79990E-03 -1.19572E-03 -4.29272E-04  4.79836E-04
  4.200  5.90231E-02  8.27579E-04  3.77851E-04  1.47400E-04 -4.04364E-04  9.26483E-02  3.98130E-03 -1.09459E-03 -5.00782E-04  4.04049E-04
  4.300  5.88075E-02  1.01303E-03  1.36351E-04  2.96182E-04 -3.92139E-04  9.18710E-02  4.14453E-03 -1.02306E-03 -5.31132E-04  3.19632E-04
  4.400  5.85271E-02  1.32843E-03 -1.59943E-04  4.41415E-04 -3.72303E-04  9.10115E-02  4.31516E-03 -9.98221E-04 -5.18493E-04  2.29906E-04
  4.500  5.81660E-02  1.77757E-03 -5.04385E-04  5.78690E-04 -3.44489E-04  9.00687E-02  4.52075E-03 -1.03448E-03 -4.63405E-04  1.38679E-04
  4.600  5.77084E-02  2.35919E-03 -8.88417E-04  7.03604E-04 -3.08543E-04  8.90397E-02  4.78879E-03 -1.14257E-03 -3.68805E-04  5.00500E-05
  4.700  5.71387E-02  3.06689E-03 -1.30181E-03  8.11951E-04 -2.64562E-04  8.79198E-02  5.14452E-03 -1.32876E-03 -2.39895E-04 -3.18126E-05
  4.800  5.64426E-02  3.88912E-03 -1.73304E-03  8.99913E-04 -2.12929E-04  8.67021E-02  5.60896E-03 -1.59437E-03 -8.38512E-05 -1.02921E-04
  4.900  5.56075E-02  4.80955E-03 -2.16964E-03  9.64254E-04 -1.54324E-04  8.53777E-02  6.19703E-03 -1.93568E-03  9.05998E-05 -1.59711E-04
  5.000  5.46230E-02  5.80747E-03 -2.59877E-03  1.00250E-03 -8.97344E-05  8.39363E-02  6.91625E-03 -2.34405E-03  2.73719E-04 -1.99273E-04
  5.100  5.34813E-02  6.85852E-03 -3.00765E-03  1.01306E-03 -2.04362E-05  8.23664E-02  7.76571E-03 -2.80649E-03  4.55363E-04 -2.19539E-04
  5.200  5.21779E-02  7.93554E-03 -3.38415E-03  9.95401E-04  5.20420E-05  8.06559E-02  8.73582E-03 -3.30647E-03  6.25614E-04 -2.19426E-04
  5.300  5.07114E-02  9.00959E-03 -3.71725E-03  9.50015E-04  1.25970E-04  7.87934E-02  9.80843E-03 -3.82493E-03  7.75389E-04 -1.98907E-04
  5.400  4.90842E-02  1.00511E-02 -3.99755E-03  8.78491E-04  1.99486E-04  7.67685E-02  1.09577E-02 -4.34144E-03  8.96982E-04 -1.59015E-04
  5.500  4.73022E-02  1.10308E-02 -4.21762E-03  7.83422E-04  2.70676E-04  7.45731E-02  1.21514E-02 -4.83545E-03  9.84498E-04 -1.01775E-04
  5.600  4.53751E-02  1.19214E-02 -4.37230E-03  6.68302E-04  3.37662E-04  7.22022E-02  1.33526E-02 -5.28748E-03  1.03415E-03 -3.00694E-05
  5.700  4.33158E-02  1.26981E-02 -4.45890E-03  5.37354E-04  3.98690E-04  6.96548E-02  1.45217E-02 -5.68016E-03  1.04440E-03  5.25480E-05
  5.800  4.11402E-02  1.33398E-02 -4.47720E-03  3.95325E-04  4.52213E-04  6.69341E-02  1.56187E-02 -5.99919E-03  1.01595E-03  1.42083E-04
  5.900  3.88673E-02  1.38300E-02 -4.42939E-03  2.47251E-04  4.96961E-04  6.40483E-02  1.66052E-02 -6.23393E-03  9.51574E-04  2.34350E-04
  6.000  3.65180E-02  1.41572E-02 -4.31988E-03  9.82136E-05  5.32001E-04  6.10107E-02  1.74466E-02 -6.37783E-03  8.55808E-04  3.25219E-04
  6.100  3.41151E-02  1.43154E-02 -4.15499E-03 -4.69067E-05  5.56768E-04  5.78394E-02  1.81137E-02 -6.42854E-03  7.34582E-04  4.10853E-04
  6.200  3.16825E-02  1.43041E-02 -3.94254E-03 -1.83647E-04  5.71084E-04  5.45570E-02  1.85842E-02 -6.38772E-03  5.94749E-04  4.87905E-04
  6.300  2.92443E-02  1.41279E-02 -3.69143E-03 -3.08154E-04  5.75151E-04  5.11900E-02  1.88436E-02 -6.26070E-03  4.43601E-04  5.53674E-04
  6.400  2.68248E-02  1.37965E-02 -3.41118E-03 -4.17323E-04  5.69519E-04  4.77682E-02  1.88856E-02 -6.05589E-03  2.88406E-04  6.06206E-04
  6.500  2.44471E-02  1.33241E-02 -3.11143E-03 -5.08897E-04  5.55043E-04  4.43232E-02  1.87119E-02 -5.78406E-03  1.35980E-04  6.44336E-04
  6.600  2.21330E-02  1.27280E-02 -2.80155E-03 -5.81501E-04  5.32827E-04  4.08880E-02  1.83322E-02 -5.45763E-03 -7.66162E-06  6.67680E-04
  6.700  1.99025E-02  1.20284E-02 -2.49024E-03 -6.34635E-04  5.04150E-04  3.74952E-02  1.77625E-02 -5.08982E-03 -1.37570E-04  6.76573E-04
  6.800  1.77731E-02  1.12470E-02 -2.18522E-03 -6.68609E-04  4.70397E-04  3.41765E-02  1.70249E-02 -4.69398E-03 -2.50023E-04  6.71974E-04
  6.900  1.57594E-02  1.04064E-02 -1.89303E-03 -6.84450E-04  4.32986E-04  3.09613E-02  1.61454E-02 -4.28289E-03 -3.42588E-04  6.55341E-04
  7.000  1.38733E-02  9.52884E-03 -1.61889E-03 -6.83773E-04  3.93305E-04  2.78761E-02  1.51527E-02 -3.86826E-03 -4.14099E-04  6.28485E-04
  7.100  1.21235E-02  8.63562E-03 -1.36666E-03 -6.68634E-04  3.52652E-04  2.49437E-02  1.40768E-02 -3.46030E-03 -4.64549E-04  5.93430E-04
  7.200  1.05156E-02  7.74625E-03 -1.13884E-03 -6.41383E-04  3.12189E-04  2.21825E-02  1.29477E-02 -3.06753E-03 -4.94928E-04  5.52275E-04
  7.300  9.05202E-03  6.87803E-03 -9.36728E-04 -6.04513E-04  2.72912E-04  1.96068E-02  1.17939E-02 -2.69659E-03 -5.07020E-04  5.07073E-04
  7.400  7.73258E-03  6.04555E-03 -7.60491E-04 -5.60525E-04  2.35629E-04  1.72258E-02  1.06414E-02 -2.35228E-03 -5.03185E-04  4.59730E-04
  7.500  6.55444E-03  5.26058E-03 -6.09402E-04 -5.11811E-04  2.00953E-04  1.50448E-02  9.51319E-03 -2.03767E-03 -4.86133E-04  4.11934E-04
  7.600  5.51252E-03  4.53193E-03 -4.82013E-04 -4.60563E-04  1.69310E-04  1.30644E-02  8.42866E-03 -1.75428E-03 -4.58722E-04  3.65102E-04
  7.700  4.59991E-03  3.86555E-03 -3.76360E-04 -4.08703E-04  1.40944E-04  1.12817E-02  7.40316E-03 -1.50229E-03 -4.23775E-04  3.20360E-04
  7.800  3.80824E-03  3.26476E-03 -2.90149E-04 -3.57845E-04  1.15947E-04  9.69034E-03  6.44814E-03 -1.28083E-03 -3.83940E-04  2.78545E-04
  7.900  3.12809E-03  2.73049E-03 -2.20929E-04 -3.09270E-04  9.42758E-05  8.28145E-03  5.57128E-03 -1.08823E-03 -3.41579E-04  2.40212E-04
  8.000  2.54935E-03  2.26165E-03 -1.66232E-04 -2.63937E-04  7.57845E-05  7.04386E-03  4.77678E-03 -9.22245E-04 -2.98701E-04  2.05672E-04
  8.100  2.06163E-03  1.85551E-03 -1.23688E-04 -2.22496E-04  6.02478E-05  5.96498E-03  4.06582E-03 -7.80326E-04 -2.56929E-04  1.75028E-04
  8.200  1.65455E-03  1.50808E-03 -9.11027E-05 -1.85323E-04  4.73888E-05  5.03122E-03  3.43704E-03 -6.59771E-04 -2.17494E-04  1.48212E-04
  8.300  1.31801E-03  1.21450E-03 -6.65168E-05 -1.52558E-04  3.69017E-05  4.22857E-03  2.88706E-03 -5.57888E-04 -1.81261E-04  1.25032E-04
  8.400  1.04239E-03  9.69377E-04 -4.82292E-05 -1.24151E-04  2.84710E-05  3.54303E-03  2.41097E-03 -4.72103E-04 -1.48762E-04  1.05210E-04
  8.500  8.18763E-04  7.67096E-04 -3.48052E-05 -9.99033E-05  2.17876E-05  2.96097E-03  2.00286E-03 -4.00040E-04 -1.20246E-04  8.84160E-05
  8.600  6.38981E-04  6.02056E-04 -2.50663E-05 -7.95135E-05  1.65606E-05  2.46944E-03  1.65620E-03 -3.39563E-04 -9.57360E-05  7.42966E-05
  8.700  4.95730E-04  4.68881E-04 -1.80689E-05 -6.26115E-05  1.25251E-05  2.05636E-03  1.36422E-03 -2.88794E-04 -7.50790E-05  6.24982E-05
  8.800  3.82568E-04  3.62560E-04 -1.30761E-05 -4.87931E-05  9.44688E-06  1.71065E-03  1.12020E-03 -2.46116E-04 -5.79997E-05  5.26833E-05
  8.900  2.93911E-04  2.78542E-04 -9.52585E-06 -3.76455E-05  7.12465E-06  1.42237E-03  9.17719E-04 -2.10160E-04 -4.41446E-05  4.45410E-05
  9.000  2.24990E-04  2.12793E-04 -6.99994E-06 -2.87679E-05  5.38940E-06  1.18265E-03  7.50757E-04 -1.79777E-04 -3.31198E-05  3.77935E-05
  9.100  1.71797E-04  1.61809E-04 -5.19386E-06 -2.17857E-05  4.10269E-06  9.83742E-04  6.13849E-04 -1.54018E-04 -2.45209E-05  3.21985E-05
  9.200  1.31008E-04  1.22609E-04 -3.89073E-06 -1.63598E-05  3.15361E-06  8.18937E-04  5.02110E-04 -1.32101E-04 -1.79553E-05  2.75489E-05
  9.300  9.99064E-05  9.26982E-05 -2.93899E-06 -1.21915E-05  2.45524E-06  6.82487E-04  4.11258E-04 -1.13387E-04 -1.30575E-05  2.36706E-05
  9.400  7.63020E-05  7.00299E-05 -2.23441E-06 -9.02415E-06  1.94085E-06  5.69519E-04  3.37598E-04 -9.73537E-05 -9.49880E-06  2.04197E-05
  9.500  5.84497E-05  5.29477E-05 -1.70612E-06 -6.64205E-06  1.56022E-06  4.75940E-04  2.77982E-04 -8.35751E-05 -6.99185E-06  1.76779E-05
  9.600  4.49771E-05  4.01327E-05 -1.30608E-06 -4.86769E-06  1.27624E-06  3.98334E-04  2.29766E-04 -7.17024E-05 -5.29180E-06  1.53498E-05
  9.700  3.48168E-05  3.05491E-05 -1.00154E-06 -3.55773E-06  1.06190E-06  3.33873E-04  1.90751E-04 -6.14493E-05 -4.19481E-06  1.33583E-05
  9.800  2.71475E-05  2.33939E-05 -7.69802E-07 -2.59855E-06  8.97821E-07  2.80225E-04  1.59129E-04 -5.25799E-05 -3.53486E-06  1.16418E-05
  9.900  2.13433E-05  1.80517E-05 -5.94682E-07 -1.90163E-06  7.70162E-07  2.35478E-04  1.33424E-04 -4.48986E-05 -3.17965E-06  1.01514E-05
 10.000  1.69312E-05  1.40560E-05 -4.64264E-07 -1.39904E-06  6.69081E-07  1.98067E-04  1.12444E-04 -3.82429E-05 -3.02604E-06  8.84821E-06
 10.100  1.35567E-05  1.10561E-05 -3.69442E-07 -1.03945E-06  5.87536E-07  1.66713E-04  9.52287E-05 -3.24762E-05 -2.99557E-06  7.70174E-06
 10.200  1.09554E-05  8.79050E-06 -3.03027E-07 -7.84480E-07  5.20425E-07  1.40375E-04  8.10149E-05 -2.74835E-05 -3.03016E-06  6.68790E-06
 10.300  8.93108E-06  7.06560E-06 -2.59183E-07 -6.05750E-07  4.64003E-07  1.18201E-04  6.91959E-05 -2.31673E-05 -3.08827E-06  5.78786E-06
 10.400  7.33896E-06  5.73869E-06 -2.33062E-07 -4.82352E-07  4.15484E-07  9.94975E-05  5.92932E-05 -1.94437E-05 -3.14152E-06  4.98688E-06
 10.500  6.07214E-06  4.70515E-06 -2.20560E-07 -3.98915E-07  3.72784E-07  8.36952E-05  5.09313E-05 -1.62406E-05 -3.17180E-06  4.27342E-06
 10.600  5.05196E-06  3.88862E-06 -2.18147E-07 -3.44085E-07  3.34364E-07  7.03274E-05  4.38166E-05 -1.34948E-05 -3.16885E-06  3.63836E-06
 10.700  4.22054E-06  3.23359E-06 -2.22752E-07 -3.09408E-07  2.99118E-07  5.90093E-05  3.77204E-05 -1.11508E-05 -3.12827E-06  3.07438E-06
 10.800  3.53526E-06  2.69995E-06 -2.31688E-07 -2.88517E-07  2.66300E-07  4.94231E-05  3.24647E-05 -9.15940E-06 -3.04989E-06  2.57547E-06
 10.900  2.96473E-06  2.25883E-06 -2.42612E-07 -2.76563E-07  2.35460E-07  4.13045E-05  2.79108E-05 -7.47649E-06 -2.93646E-06  2.13649E-06
 11.000  2.48572E-06  1.88959E-06 -2.53513E-07 -2.69839E-07  2.06386E-07  3.44327E-05  2.39505E-05 -6.06251E-06 -2.79262E-06  1.75287E-06
 11.100  2.08097E-06  1.57752E-06 -2.62719E-07 -2.65521E-07  1.79043E-07  2.86226E-05  2.04987E-05 -4.88183E-06 -2.62412E-06  1.42037E-06
 11.200  1.73756E-06  1.31213E-06 -2.68907E-07 -2.61502E-07  1.53522E-07  2.37181E-05  1.74875E-05 -3.90237E-06 -2.43715E-06  1.13492E-06
 11.300  1.44564E-06  1.08589E-06 -2.71121E-07 -2.56279E-07  1.29979E-07  1.95864E-05  1.48621E-05 -3.09534E-06 -2.23791E-06  8.92511E-07
 11.400  1.19757E-06  8.93258E-07 -2.68776E-07 -2.48865E-07  1.08594E-07  1.61148E-05  1.25771E-05 -2.43500E-06 -2.03228E-06  6.89164E-07
 11.500  9.87289E-07  7.29997E-07 -2.61646E-07 -2.38721E-07  8.95223E-08  1.32064E-05  1.05941E-05 -1.89852E-06 -1.82557E-06  5.20903E-07
 11.600  8.09784E-07  5.92691E-07 -2.49842E-07 -2.25680E-07  7.28719E-08  1.07783E-05  8.87970E-06 -1.46580E-06 -1.62239E-06  3.83790E-07
 11.700  6.60821E-07  4.78404E-07 -2.33767E-07 -2.09887E-07  5.86806E-08  8.75873E-06  7.40438E-06 -1.11930E-06 -1.42656E-06  2.73968E-07
 11.800  5.36701E-07  3.84472E-07 -2.14060E-07 -1.91720E-07  4.69087E-08  7.08603E-06  6.14147E-06 -8.43874E-07 -1.24113E-06  1.87712E-07
 11.900  4.34117E-07  3.08387E-07 -1.91527E-07 -1.71724E-07  3.74402E-08  5.70676E-06  5.06660E-06 -6.26593E-07 -1.06833E-06  1.21486E-07
 12.000  3.50080E-07  2.47743E-07 -1.67077E-07 -1.50541E-07  3.00918E-08  4.57479E-06  4.15739E-06 -4.56512E-07 -9.09719E-07  7.19908E-08
 12.100  2.81867E-07  2.00229E-07 -1.41647E-07 -1.28850E-07  2.46269E-08  3.65038E-06  3.39320E-06 -3.24475E-07 -7.66162E-07  3.62076E-08
 12.200  2.27006E-07  1.63658E-07 -1.16144E-07 -1.07314E-07  2.07729E-08  2.89930E-06  2.75511E-06 -2.22896E-07 -6.37981E-07  1.14275E-08
 12.300  1.83267E-07  1.35989E-07 -9.13917E-08 -8.65367E-08  1.82400E-08  2.29225E-06  2.22581E-06 -1.45546E-07 -5.25019E-07 -4.73205E-09
 12.400  1.48664E-07  1.15371E-07 -6.80933E-08 -6.70314E-08  1.67377E-08  1.80420E-06  1.78963E-06 -8.73572E-08 -4.26740E-07 -1.43228E-08
 12.500  1.21456E-07  1.00166E-07 -4.68043E-08 -4.92027E-08  1.59908E-08  1.41391E-06  1.43248E-06 -4.42343E-08 -3.42319E-07 -1.90730E-08
 12.600  1.00141E-07  8.89696E-08 -2.79226E-08 -3.33377E-08  1.57504E-08  1.10345E-06  1.14188E-06 -1.28901E-08 -2.70723E-07 -2.04047E-08
 12.700  8.34474E-08  8.06139E-08 -1.16890E-08 -1.96064E-08  1.58027E-08  8.57770E-07  9.06828E-07  9.30157E-09 -2.10785E-07 -1.94583E-08
 12.800  7.03241E-08  7.41654E-08  1.80218E-09 -8.07029E-09  1.59732E-08  6.64347E-07  7.17768E-07  2.44304E-08 -1.61271E-07 -1.71222E-08
 12.900  5.99174E-08  6.89073E-08  1.25846E-08  1.30408E-09  1.61285E-08  5.12809E-07  5.66492E-07  3.41549E-08 -1.20929E-07 -1.40660E-08
 13.000  5.15518E-08  6.43175E-08  2.07969E-08  8.62769E-09  1.61741E-08  3.94636E-07  4.46018E-07  3.97890E-08 -8.85369E-08 -1.07734E-08
 13.100  4.47053E-08  6.00398E-08  2.66576E-08  1.40705E-08  1.60515E-08  3.02884E-07  3.50475E-07  4.23719E-08 -6.29318E-08 -7.57617E-09
 13.200  3.89850E-08  5.58541E-08  3.04394E-08  1.78427E-08  1.57325E-08  2.31930E-07  2.74978E-07  4.27242E-08 -4.30353E-08 -4.68401E-09
 13.300  3.41035E-08  5.16465E-08  3.24459E-08  2.01772E-08  1.52136E-08  1.77260E-07  2.15499E-07  4.14917E-08 -2.78679E-08 -2.21303E-09
 13.400  2.98566E-08  4.73810E-08  3.29902E-08  2.13145E-08  1.45100E-08  1.35269E-07  1.68750E-07  3.91805E-08 -1.65576E-08 -2.09884E-10
 13.500  2.61040E-08  4.30746E-08  3.23788E-08  2.14903E-08  1.36495E-08  1.03106E-07  1.32073E-07  3.61842E-08 -8.34242E-09  1.32767E-09
 13.600  2.27520E-08  3.87767E-08  3.08976E-08  2.09253E-08  1.26675E-08  7.85242E-08  1.03330E-07  3.28054E-08 -2.56816E-09  2.43396E-09
 13.700  1.97400E-08  3.45521E-08  2.88034E-08  1.98190E-08  1.16026E-08  5.97700E-08  8.08213E-08  2.92729E-08  1.31725E-09  3.16217E-09
 13.800  1.70291E-08  3.04686E-08  2.63184E-08  1.83452E-08  1.04929E-08  4.54795E-08  6.31978E-08  2.57557E-08  3.77164E-09  3.57432E-09
 13.900  1.45943E-08  2.65887E-08  2.36276E-08  1.66501E-08  9.37356E-09  3.45991E-08  4.93980E-08  2.23742E-08  5.16804E-09  3.73406E-09
 14.000  1.24178E-08  2.29638E-08  2.08793E-08  1.48527E-08  8.27517E-09  2.63184E-08  3.85890E-08  1.92100E-08  5.80492E-09  3.70176E-09
 14.100  1.04855E-08  1.96316E-08  1.81871E-08  1.30457E-08  7.22270E-09  2.00165E-08  3.01194E-08  1.63136E-08  5.91650E-09  3.53145E-09
 14.200  8.78380E-09  1.66155E-08  1.56333E-08  1.12981E-08  6.23516E-09  1.52198E-08  2.34810E-08  1.37114E-08  5.68276E-09  3.26932E-09
 14.300  7.29879E-09  1.39256E-08  1.32732E-08  9.65836E-09  5.32582E-09  1.15677E-08  1.82772E-08  1.14115E-08  5.23873E-09  2.95315E-09
 14.400  6.01524E-09  1.15598E-08  1.11396E-08  8.15734E-09  4.50268E-09  8.78602E-09  1.41989E-08  9.40835E-09  4.68302E-09  2.61259E-09
 14.500  4.91672E-09  9.50662E-09  9.24707E-09  6.81181E-09  3.76915E-09  6.66677E-09  1.10045E-08  7.68672E-09  4.08521E-09  2.26982E-09
 14.600  3.98590E-09  7.74700E-09  7.59658E-09  5.62749E-09  3.12491E-09  5.05208E-09  8.50519E-09  6.22525E-09  3.49236E-09  1.94058E-09
 14.700  3.20500E-09  6.25706E-09  6.17892E-09  4.60186E-09  2.56670E-09  3.82206E-09  6.55272E-09  4.99887E-09  2.93436E-09  1.63519E-09
 14.800  2.55632E-09  5.00988E-09  4.97811E-09  3.72661E-09  2.08914E-09  2.88556E-09  5.03065E-09  3.98095E-09  2.42840E-09  1.35970E-09
 14.900  2.02268E-09  3.97734E-09  3.97399E-09  2.98971E-09  1.68548E-09  2.17323E-09  3.84717E-09  3.14477E-09  1.98261E-09  1.11684E-09
 15.000  1.58785E-09  3.13148E-09  3.14440E-09  2.37698E-09  1.34816E-09  1.63215E-09  2.92980E-09  2.46467E-09  1.59881E-09  9.06906E-10
 15.100  1.23683E-09  2.44555E-09  2.46671E-09  1.87342E-09  1.06932E-09  1.22191E-09  2.22125E-09  1.91676E-09  1.27475E-09  7.28547E-10
 15.200  9.56046E-10  1.89474E-09  1.91902E-09  1.46413E-09  8.41219E-10  9.11591E-10  1.67613E-09  1.47940E-09  1.00567E-09  5.79329E-10
 15.300  7.33443E-10  1.45660E-09  1.48088E-09  1.13490E-09  6.56483E-10  6.77502E-10  1.25859E-09  1.13337E-09  7.85544E-10  4.56225E-10
 15.400  5.58501E-10  1.11126E-09  1.13378E-09  8.72706E-10  5.08305E-10  5.01475E-10  9.40249E-10  8.61951E-10  6.07853E-10  3.55960E-10
 15.500  4.22181E-10  8.41468E-10  8.61362E-10  6.65881E-10  3.90554E-10  3.69582E-10  6.98748E-10  6.50839E-10  4.66159E-10  2.75266E-10
 15.600  3.16841E-10  6.32509E-10  6.49486E-10  5.04221E-10  2.97822E-10  2.71144E-10  5.16489E-10  4.87971E-10  3.54440E-10  2.11045E-10
 15.700  2.36101E-10  4.72020E-10  4.86126E-10  3.78977E-10  2.25429E-10  1.97986E-10  3.79683E-10  3.63322E-10  2.67279E-10  1.60468E-10
 15.800  1.74708E-10  3.49760E-10  3.61231E-10  2.82773E-10  1.69395E-10  1.43862E-10  2.77564E-10  2.68664E-10  1.99951E-10  1.21033E-10
 15.900  1.28391E-10  2.57364E-10  2.66526E-10  2.09488E-10  1.26380E-10  1.04009E-10  2.01771E-10  1.97330E-10  1.48433E-10  9.05783E-11
 16.000  9.37129E-11  1.88080E-10  1.95284E-10  1.54109E-10  9.36259E-11  7.48103E-11  1.45844E-10  1.43972E-10  1.09364E-10  6.72718E-11
 16.100  6.79442E-11  1.36520E-10  1.42107E-10  1.12591E-10  6.88809E-11  5.35274E-11  1.04819E-10  1.04353E-10  7.99917E-11  4.95921E-11
 16.200  4.89363E-11  9.84361E-11  1.02716E-10  8.17013E-11  5.03306E-11  3.80961E-11  7.49022E-11  7.51467E-11  5.80920E-11  3.62940E-11
 16.300  3.50165E-11  7.05110E-11  7.37522E-11  5.88915E-11  3.65290E-11  2.69680E-11  5.32173E-11  5.37684E-11  4.18945E-11  2.63734E-11
 16.400  2.48951E-11  5.01813E-11  5.26102E-11  4.21712E-11  2.63363E-11  1.89871E-11  3.75933E-11  3.82287E-11  3.00073E-11  1.90313E-11
 16.500  1.75869E-11  3.54852E-11  3.72875E-11  3.00027E-11  1.88635E-11  1.32952E-11  2.64040E-11  2.70102E-11  2.13494E-11  1.36395E-11
 16.600  1.23462E-11  2.49348E-11  2.62597E-11  2.12091E-11  1.34239E-11  9.25864E-12  1.84387E-11  1.89659E-11  1.50898E-11  9.70966E-12
 16.700  8.61340E-12  1.74122E-11  1.83776E-11  1.48983E-11  9.49188E-12  6.41220E-12  1.28027E-11  1.32359E-11  1.05966E-11  6.86653E-12
 16.800  5.97234E-12  1.20842E-11  1.27817E-11  1.04002E-11  6.66930E-12  4.41643E-12  8.83877E-12  9.18116E-12  7.39395E-12  4.82438E-12
 16.900  4.11598E-12  8.33557E-12  8.83539E-12  7.21543E-12  4.65684E-12  3.02509E-12  6.06745E-12  6.33039E-12  5.12693E-12  3.36788E-12
 17.000  2.81960E-12  5.71517E-12  6.07053E-12  4.97546E-12  3.23160E-12  2.06067E-12  4.14148E-12  4.33888E-12  3.53302E-12  2.33627E-12
 17.100  1.92005E-12  3.89519E-12  4.14592E-12  3.41022E-12  2.22887E-12  1.39600E-12  2.81095E-12  2.95641E-12  2.41978E-12  1.61056E-12
 17.200  1.29980E-12  2.63912E-12  2.81472E-12  2.32347E-12  1.52799E-12  9.40536E-13  1.89717E-12  2.00269E-12  1.64733E-12  1.10345E-12
 17.300  8.74793E-13  1.77766E-12  1.89975E-12  1.57370E-12  1.04124E-12  6.30207E-13  1.27330E-12  1.34880E-12  1.11479E-12  7.51418E-13
 17.400  5.85354E-13  1.19047E-12  1.27476E-12  1.05965E-12  7.05345E-13  4.19968E-13  8.49846E-13  9.03210E-13  7.49959E-13  5.08621E-13
 17.500  3.89440E-13  7.92667E-13  8.50464E-13  7.09388E-13  4.75002E-13  2.78345E-13  5.64084E-13  6.01391E-13  5.01584E-13  3.42230E-13
 17.600  2.57628E-13  5.24796E-13  5.64157E-13  4.72179E-13  3.18021E-13  1.83482E-13  3.72355E-13  3.98174E-13  3.33532E-13  2.28919E-13
 17.700  1.69472E-13  3.45491E-13  3.72119E-13  3.12502E-13  2.11692E-13  1.20297E-13  2.44451E-13  2.62154E-13  2.20517E-13  1.52234E-13
 17.800  1.10859E-13  2.26178E-13  2.44075E-13  2.05657E-13  1.40107E-13  7.84481E-14  1.59611E-13  1.71643E-13  1.44971E-13  1.00653E-13
 17.900  7.21171E-14  1.47249E-13  1.59200E-13  1.34586E-13  9.22033E-14  5.08840E-14  1.03653E-13  1.11763E-13  9.47714E-14  6.61695E-14
 18.000  4.66567E-14  9.53366E-14  1.03267E-13  8.75867E-14  6.03367E-14  3.28295E-14  6.69523E-14  7.23754E-14  6.16098E-14  4.32536E-14
 18.100  3.00204E-14  6.13891E-14  6.66189E-14  5.66864E-14  3.92630E-14  2.10689E-14  4.30153E-14  4.66146E-14  3.98309E-14  2.81152E-14
 18.200  1.92116E-14  3.93155E-14  4.27431E-14  3.64871E-14  2.54081E-14  1.34501E-14  2.74896E-14  2.98612E-14  2.56097E-14  1.81734E-14
 18.300  1.22284E-14  2.50434E-14  2.72763E-14  2.33580E-14  1.63517E-14  8.54139E-15  1.74749E-14  1.90267E-14  1.63766E-14  1.16823E-14
 18.400  7.74206E-15  1.58671E-14  1.73130E-14  1.48725E-14  1.04658E-14  5.39583E-15  1.10503E-14  1.20588E-14  1.04159E-14  7.46846E-15
 18.500  4.87567E-15  9.99983E-15  1.09305E-14  9.41893E-15  6.66222E-15  3.39100E-15  6.95120E-15  7.60227E-15  6.58924E-15  4.74860E-15
 18.600  3.05436E-15  6.26891E-15  6.86445E-15  5.93338E-15  4.21810E-15  2.12006E-15  4.34994E-15  4.76757E-15  4.14628E-15  3.00295E-15
 18.700  1.90339E-15  3.90940E-15  4.28829E-15  3.71793E-15  2.65633E-15  1.31865E-15  2.70805E-15  2.97425E-15  2.59526E-15  1.88883E-15
 18.800  1.17997E-15  2.42528E-15  2.66495E-15  2.31747E-15  1.66390E-15  8.15985E-16  1.67723E-15  1.84586E-15  1.61591E-15  1.18173E-15
 18.900  7.27720E-16  1.49679E-15  1.64753E-15  1.43698E-15  1.03674E-15  5.02363E-16  1.03348E-15  1.13966E-15  1.00088E-15  7.35430E-16
 19.000  4.46498E-16  9.19006E-16  1.01329E-15  8.86397E-16  6.42569E-16  3.07714E-16  6.33570E-16  7.00031E-16  6.16722E-16  4.55273E-16
 19.100  2.72552E-16  5.61370E-16  6.20005E-16  5.43948E-16  3.96180E-16  1.87534E-16  3.86441E-16  4.27796E-16  3.78052E-16  2.80366E-16
 19.200  1.65527E-16  3.41165E-16  3.77430E-16  3.32086E-16  2.42997E-16  1.13717E-16  2.34519E-16  2.60104E-16  2.30559E-16  1.71758E-16
 19.300  1.00020E-16  2.06289E-16  2.28596E-16  2.01707E-16  1.48272E-16  6.86116E-17  1.41608E-16  1.57347E-16  1.39892E-16  1.04678E-16
 19.400  6.01329E-17  1.24107E-16  1.37753E-16  1.21893E-16  9.00068E-17  4.11909E-17  8.50797E-17  9.47072E-17  8.44491E-17  6.34687E-17
 19.500  3.59718E-17  7.42909E-17  8.25935E-17  7.32888E-17  5.43580E-17  2.46064E-17  5.08629E-17  5.67193E-17  5.07225E-17  3.82858E-17
 19.600  2.14113E-17  4.42491E-17  4.92737E-17  4.38435E-17  3.26614E-17  1.46268E-17  3.02567E-17  3.37996E-17  3.03125E-17  2.29775E-17
 19.700  1.26814E-17  2.62249E-17  2.92495E-17  2.60973E-17  1.95255E-17  8.65185E-18  1.79102E-17  2.00418E-17  1.80247E-17  1.37203E-17
 19.800  7.47389E-18  1.54659E-17  1.72769E-17  1.54566E-17  1.16137E-17  5.09262E-18  1.05497E-17  1.18254E-17  1.06647E-17  8.15146E-18
 19.900  4.38316E-18  9.07602E-18  1.01547E-17  9.10913E-18  6.87320E-18  2.98299E-18  6.18385E-18  6.94317E-18  6.27883E-18  4.81866E-18
  67 182 200   0.100
  0.000  5.65451E-02 -2.94801E-16 -4.37150E-16 -4.75352E-16 -5.14976E-16  9.30850E-02 -5.27539E-16 -6.45317E-16 -9.88232E-16 -1.53062E-15
  0.100  5.65503E-02 -4.94917E-05 -3.63712E-08 -1.21951E-11 -2.80376E-15  9.31170E-02  8.17807E-05  8.25144E-08  3.67346E-11  7.63881E-15
  0.200  5.65662E-02 -1.95357E-04 -5.77133E-07 -7.75003E-10 -5.65315E-13  9.32109E-02  3.22060E-04  1.30589E-06  2.32839E-09  2.45605E-12
  0.300  5.65941E-02 -4.29893E-04 -2.88154E-06 -8.72607E-09 -1.43341E-11  9.33607E-02  7.05961E-04  6.49160E-06  2.60948E-08  6.20930E-11
  0.400  5.66356E-02 -7.40682E-04 -8.93161E-06 -4.82384E-08 -1.41119E-10  9.35566E-02  1.20971E-03  1.99986E-05  1.43326E-07  6.06642E-10
  0.500  5.66929E-02 -1.11120E-03 -2.12647E-05 -1.80200E-07 -8.25656E-10  9.37864E-02  1.80207E-03  4.72412E-05  5.31031E-07  3.51419E-09
  0.600  5.67686E-02 -1.52163E-03 -4.27538E-05 -5.24429E-07 -3.47040E-09  9.40358E-02  2.44630E-03  9.40775E-05  1.53020E-06  1.45941E-08
  0.700  5.68650E-02 -1.94984E-03 -7.63505E-05 -1.28273E-06 -1.15947E-08  9.42902E-02  3.10231E-03  1.66124E-04  3.69984E-06  4.80798E-08
  0.800  5.69844E-02 -2.37248E-03 -1.24806E-04 -2.75900E-06 -3.27086E-08  9.45353E-02  3.72913E-03  2.68059E-04  7.85446E-06  1.33490E-07
  0.900  5.71284E-02 -2.76611E-03 -1.90393E-04 -5.37288E-06 -8.10025E-08  9.47584E-02  4.28734E-03  4.02978E-04  1.50748E-05  3.24780E-07
  1.000  5.72981E-02 -3.10841E-03 -2.74638E-04 -9.66357E-06 -1.80845E-07  9.49494E-02  4.74140E-03  5.71858E-04  2.66850E-05  7.11176E-07
  1.100  5.74933E-02 -3.37925E-03 -3.78101E-04 -1.62815E-05 -3.70948E-07  9.51011E-02  5.06170E-03  7.73177E-04  4.41931E-05  1.42855E-06
  1.200  5.77128E-02 -3.56172E-03 -5.00202E-04 -2.59663E-05 -7.08903E-07  9.52102E-02  5.22625E-03  1.00274E-03  6.91965E-05  2.66979E-06
  1.300  5.79540E-02 -3.64294E-03 -6.39118E-04 -3.95108E-05 -1.27566E-06  9.52770E-02  5.22192E-03  1.25368E-03  1.03259E-04  4.69236E-06
  1.400  5.82131E-02 -3.61471E-03 -7.91760E-04 -5.77127E-05 -2.17936E-06  9.53051E-02  5.04507E-03  1.51673E-03  1.47766E-04  7.82142E-06
  1.500  5.84851E-02 -3.47392E-03 -9.53838E-04 -8.13160E-05 -3.55802E-06  9.53014E-02  4.70167E-03  1.78063E-03  2.03776E-04  1.24470E-05
  1.600  5.87640E-02 -3.22269E-03 -1.12001E-03 -1.10946E-04 -5.58024E-06  9.52750E-02  4.20688E-03  2.03273E-03  2.71877E-04  1.90144E-05
  1.700  5.90426E-02 -2.86821E-03 -1.28408E-03 -1.47043E-04 -8.44358E-06  9.52369E-02  3.58402E-03  2.25974E-03  3.52052E-04  2.80080E-05
  1.800  5.93137E-02 -2.42241E-03 -1.43934E-03 -1.89800E-04 -1.23702E-05  9.51982E-02  2.86321E-03  2.44850E-03  4.43589E-04  3.99279E-05
  1.900  5.95697E-02 -1.90133E-03 -1.57885E-03 -2.39108E-04 -1.75992E-05  9.51704E-02  2.07953E-03  2.58680E-03  5.45018E-04  5.52628E-05
  2.000  5.98032E-02 -1.32429E-03 -1.69585E-03 -2.94517E-04 -2.43766E-05  9.51632E-02  1.27109E-03  2.66422E-03  6.54095E-04  7.44578E-05
  2.100  6.00077E-02 -7.12972E-04 -1.78409E-03 -3.55214E-04 -3.29422E-05  9.51847E-02  4.76793E-04  2.67277E-03  7.67832E-04  9.78816E-05
  2.200  6.01774E-02 -9.03090E-05 -1.83823E-03 -4.20016E-04 -4.35147E-05  9.52403E-02 -2.65728E-04  2.60749E-03  8.82577E-04  1.25794E-04
  2.300  6.03084E-02  5.20587E-04 -1.85411E-03 -4.87395E-04 -5.62760E-05  9.53326E-02 -9.22170E-04  2.46688E-03  9.94136E-04  1.58313E-04
  2.400  6.03980E-02  1.09753E-03 -1.82904E-03 -5.55513E-04 -7.13553E-05  9.54606E-02 -1.46333E-03  2.25308E-03  1.09793E-03  1.95391E-04
  2.500  6.04454E-02  1.62029E-03 -1.76200E-03 -6.22280E-04 -8.88141E-05  9.56203E-02 -1.86658E-03  1.97187E-03  1.18920E-03  2.36786E-04
  2.600  6.04520E-02  2.07150E-03 -1.65368E-03 -6.85426E-04 -1.08634E-04  9.58045E-02 -2.11689E-03  1.63248E-03  1.26323E-03  2.82045E-04
  2.700  6.04207E-02  2.43739E-03 -1.50657E-03 -7.42589E-04 -1.30707E-04  9.60032E-02 -2.20748E-03  1.24715E-03  1.31558E-03  3.30490E-04
  2.800  6.03560E-02  2.70839E-03 -1.32489E-03 -7.91400E-04 -1.54831E-04  9.62044E-02 -2.13992E-03  8.30515E-04  1.34234E-03  3.81210E-04
  2.900  6.02640E-02  2.87948E-03 -1.11440E-03 -8.29578E-04 -1.80705E-04  9.63944E-02 -1.92375E-03  3.98860E-04  1.34040E-03  4.33060E-04
  3.000  6.01515E-02  2.95035E-03 -8.82277E-04 -8.55019E-04 -2.07938E-04  9.65588E-02 -1.57572E-03 -3.07951E-05  1.30764E-03  4.84667E-04
  3.100  6.00258E-02  2.92535E-03 -6.36789E-04 -8.65876E-04 -2.36049E-04  9.66830E-02 -1.11852E-03 -4.41648E-04  1.24320E-03  5.34455E-04
  3.200  5.98943E-02  2.81328E-03 -3.87037E-04 -8.60637E-04 -2.64484E-04  9.67532E-02 -5.79244E-04 -8.18093E-04  1.14760E-03  5.80670E-04
  3.300  5.97637E-02  2.62695E-03 -1.42623E-04 -8.38185E-04 -2.92622E-04  9.67572E-02  1.24444E-05 -1.14666E-03  1.02287E-03  6.21432E-04
  3.400  5.96395E-02  2.38265E-03  8.66919E-05 -7.97851E-04 -3.19796E-04  9.66847E-02  6.26239E-04 -1.41687E-03  8.72607E-04  6.54803E-04
  3.500  5.95257E-02  2.09947E-03  2.91321E-04 -7.39452E-04 -3.45303E-04  9.65278E-02  1.23319E-03 -1.62189E-03  7.01874E-04  6.78863E-04
  3.600  5.94244E-02  1.79854E-03  4.62188E-04 -6.63320E-04 -3.68421E-04  9.62815E-02  1.80759E-03 -1.75907E-03  5.17116E-04  6.91821E-04
  3.700  5.93349E-02  1.50220E-03  5.91045E-04 -5.70317E-04 -3.88425E-04  9.59436E-02  2.32866E-03 -1.83013E-03  3.25900E-04  6.92122E-04
  3.800  5.92544E-02  1.23317E-03  6.70769E-04 -4.61842E-04 -4.04600E-04  9.55146E-02  2.78191E-03 -1.84117E-03  1.36584E-04  6.78572E-04
  3.900  5.91771E-02  1.01365E-03  6.95631E-04 -3.39819E-04 -4.16256E-04  9.49973E-02  3.16008E-03 -1.80234E-03 -4.20904E-05  6.50462E-04
  4.000  5.90947E-02  8.64494E-04  6.61531E-04 -2.06681E-04 -4.22744E-04  9.43961E-02  3.46363E-03 -1.72725E-03 -2.01475E-04  6.07675E-04
  4.100  5.89962E-02  8.04395E-04  5.66194E-04 -6.53260E-05 -4.23468E-04  9.37168E-02  3.70066E-03 -1.63215E-03 -3.33524E-04  5.50777E-04
  4.200  5.88686E-02  8.49148E-04  4.09311E-04  8.09309E-05 -4.17909E-04  9.29651E-02  3.88632E-03 -1.53492E-03 -4.31307E-04  4.81071E-04
  4.300  5.86969E-02  1.01098E-03  1.92632E-04  2.28436E-04 -4.05636E-04  9.21461E-02  4.04171E-03 -1.45389E-03 -4.89478E-04  4.00608E-04
  4.400  5.84647E-02  1.29799E-03 -8.00159E-05  3.73289E-04 -3.86336E-04  9.12636E-02  4.19233E-03 -1.40660E-03 -5.04680E-04  3.12146E-04
  4.500  5.81550E-02  1.71374E-03 -4.02781E-04  5.11461E-04 -3.59831E-04  9.03187E-02  4.36620E-03 -1.40869E-03 -4.75825E-04  2.19053E-04
  4.600  5.77504E-02  2.25695E-03 -7.67916E-04  6.38925E-04 -3.26107E-04  8.93099E-02  4.59169E-03 -1.47273E-03 -4.04243E-04  1.25162E-04
  4.700  5.72340E-02  2.92141E-03 -1.16600E-03  7.51811E-04 -2.85330E-04  8.82322E-02  4.89536E-03 -1.60739E-03 -2.93670E-04  3.45712E-05
  4.800  5.65900E-02  3.69605E-03 -1.58623E-03  8.46559E-04 -2.37873E-04  8.70773E-02  5.29986E-03 -1.81680E-03 -1.50068E-04 -4.85846E-05
  4.900  5.58042E-02  4.56518E-03 -2.01679E-03  9.20085E-04 -1.84322E-04  8.58337E-02  5.82196E-03 -2.10021E-03  1.87111E-05 -1.20382E-04
  5.000  5.48649E-02  5.50899E-03 -2.44530E-03  9.69932E-04 -1.25485E-04  8.44870E-02  6.47114E-03 -2.45201E-03  2.03400E-04 -1.77357E-04
  5.100  5.37629E-02  6.50417E-03 -2.85928E-03  9.94403E-04 -6.23868E-05  8.30208E-02  7.24847E-03 -2.86205E-03  3.93888E-04 -2.16733E-04
  5.200  5.24926E-02  7.52471E-03 -3.24664E-03  9.92667E-04  3.75341E-06  8.14177E-02  8.14622E-03 -3.31631E-03  5.79864E-04 -2.36607E-04
  5.300  5.10517E-02  8.54291E-03 -3.59621E-03  9.64830E-04  7.15486E-05  7.96605E-02  9.14794E-03 -3.79772E-03  7.51453E-04 -2.36083E-04
  5.400  4.94419E-02  9.53038E-03 -3.89818E-03  9.11950E-04  1.39489E-04  7.77333E-02  1.02293E-02 -4.28730E-03  8.99832E-04 -2.15331E-04
  5.500  4.76686E-02  1.04592E-02 -4.14448E-03  8.36016E-04  2.05995E-04  7.56230E-02  1.13591E-02 -4.76529E-03  1.01775E-03 -1.75578E-04
  5.600  4.57413E-02  1.13029E-02 -4.32915E-03  7.39864E-04  2.69482E-04  7.33202E-02  1.25015E-02 -5.21235E-03  1.09991E-03 -1.19023E-04
  5.700  4.36730E-02  1.20377E-02 -4.44850E-03  6.27057E-04  3.28424E-04  7.08204E-02  1.36175E-02 -5.61067E-03  1.14324E-03 -4.86866E-05
  5.800  4.14803E-02  1.26435E-02 -4.50123E-03  5.01711E-04  3.81422E-04  6.81248E-02  1.46676E-02 -5.94496E-03  1.14697E-03  3.17899E-05
  5.900  3.91828E-02  1.31042E-02 -4.48842E-03  3.68305E-04  4.27265E-04  6.52407E-02  1.56136E-02 -6.20315E-03  1.11255E-03  1.18386E-04
  6.000  3.68024E-02  1.34088E-02 -4.41333E-03  2.31464E-04  4.64986E-04  6.21816E-02  1.64211E-02 -6.37698E-03  1.04341E-03  2.06956E-04
  6.100  3.43632E-02  1.35516E-02 -4.28121E-03  9.57364E-05  4.93904E-04  5.89670E-02  1.70611E-02 -6.46215E-03  9.44620E-04  2.93477E-04
  6.200  3.18903E-02  1.35321E-02 -4.09891E-03 -3.46079E-05  5.13646E-04  5.56220E-02  1.75113E-02 -6.45838E-03  8.22484E-04  3.74280E-04
  6.300  2.94096E-02  1.33550E-02 -3.87451E-03 -1.55767E-04  5.24160E-04  5.21764E-02  1.77573E-02 -6.36906E-03  6.84014E-04  4.46235E-04
  6.400  2.69466E-02  1.30298E-02 -3.61687E-03 -2.64554E-04  5.25705E-04  4.86634E-02  1.77928E-02 -6.20085E-03  5.36463E-04  5.06890E-04
  6.500  2.45260E-02  1.25701E-02 -3.33517E-03 -3.58510E-04  5.18827E-04  4.51188E-02  1.76197E-02 -5.96301E-03  3.86868E-04  5.54554E-04
  6.600  2.21709E-02  1.19930E-02 -3.03852E-03 -4.35958E-04  5.04318E-04  4.15794E-02  1.72476E-02 -5.66669E-03  2.41643E-04  5.88318E-04
  6.700  1.99024E-02  1.13180E-02 -2.73554E-03 -4.96021E-04  4.83172E-04  3.80817E-02  1.66926E-02 -5.32420E-03  1.06278E-04  6.08025E-04
  6.800  1.77389E-02  1.05663E-02 -2.43409E-03 -5.38589E-04  4.56520E-04  3.46608E-02  1.59767E-02 -4.94827E-03 -1.48836E-05  6.14200E-04
  6.900  1.56959E-02  9.75974E-03 -2.14098E-03 -5.64249E-04  4.25577E-04  3.13490E-02  1.51256E-02 -4.55140E-03 -1.18752E-04  6.07933E-04
  7.000  1.37856E-02  8.91981E-03 -1.86183E-03 -5.74179E-04  3.91578E-04  2.81750E-02  1.41678E-02 -4.14526E-03 -2.03506E-04  5.90748E-04
  7.100  1.20170E-02  8.06699E-03 -1.60101E-03 -5.70030E-04  3.55726E-04  2.51633E-02  1.31327E-02 -3.74032E-03 -2.68521E-04  5.64463E-04
  7.200  1.03955E-02  7.22003E-03 -1.36161E-03 -5.53787E-04  3.19139E-04  2.23333E-02  1.20497E-02 -3.34550E-03 -3.14232E-04  5.31048E-04
  7.300  8.92349E-03  6.39539E-03 -1.14555E-03 -5.27636E-04  2.82821E-04  1.96996E-02  1.09464E-02 -2.96801E-03 -3.41941E-04  4.92493E-04
  7.400  7.60022E-03  5.60692E-03 -9.53612E-04 -4.93832E-04  2.47627E-04  1.72714E-02  9.84804E-03 -2.61333E-03 -3.53610E-04  4.50702E-04
  7.500  6.42232E-03  4.86562E-03 -7.85693E-04 -4.54584E-04  2.14249E-04  1.50533E-02  8.77656E-03 -2.28526E-03 -3.51635E-04  4.07404E-04
  7.600  5.38409E-03  4.17964E-03 -6.40910E-04 -4.11965E-04  1.83212E-04  1.30451E-02  7.75026E-03 -1.98604E-03 -3.38636E-04  3.64094E-04
  7.700  4.47792E-03  3.55433E-03 -5.17808E-04 -3.67830E-04  1.54875E-04  1.12429E-02  6.78350E-03 -1.71658E-03 -3.17272E-04  3.22001E-04
  7.800  3.69475E-03  2.99249E-03 -4.14536E-04 -3.23774E-04  1.29447E-04  9.63899E-03  5.88673E-03 -1.47668E-03 -2.90082E-04  2.82071E-04
  7.900  3.02450E-03  2.49464E-03 -3.29001E-04 -2.81101E-04  1.06999E-04  8.22326E-03  5.06672E-03 -1.26525E-03 -2.59371E-04  2.44979E-04
  8.000  2.45647E-03  2.05939E-03 -2.59017E-04 -2.40818E-04  8.74905E-05  6.98334E-03  4.32688E-03 -1.08058E-03 -2.27130E-04  2.11153E-04
  8.100  1.97974E-03  1.68379E-03 -2.02413E-04 -2.03644E-04  7.07900E-05  5.90548E-03  3.66773E-03 -9.20533E-04 -1.94992E-04  1.80801E-04
  8.200  1.58350E-03  1.36377E-03 -1.57123E-04 -1.70037E-04  5.66992E-05  4.97510E-03  3.08738E-03 -7.82747E-04 -1.64221E-04  1.53955E-04
  8.300  1.25729E-03  1.09446E-03 -1.21245E-04 -1.40224E-04  4.49754E-05  4.17733E-03  2.58210E-03 -6.64773E-04 -1.35726E-04  1.30511E-04
  8.400  9.91265E-04  8.70538E-04 -9.30804E-05 -1.14239E-04  3.53515E-05  3.49747E-03  2.14677E-03 -5.64200E-04 -1.10096E-04  1.10262E-04
  8.500  7.76333E-04  6.86530E-04 -7.11499E-05 -9.19653E-05  2.75527E-05  2.92135E-03  1.77538E-03 -4.78743E-04 -8.76401E-05  9.29403E-05
  8.600  6.04250E-04  5.37036E-04 -5.41934E-05 -7.31741E-05  2.13101E-05  2.43562E-03  1.46146E-03 -4.06295E-04 -6.84428E-05  7.82402E-05
  8.700  4.67681E-04  4.16914E-04 -4.11610E-05 -5.75611E-05  1.63710E-05  2.02791E-03  1.19837E-03 -3.44958E-04 -5.24152E-05  6.58463E-05
  8.800  3.60210E-04  3.21414E-04 -3.11931E-05 -4.47780E-05  1.25051E-05  1.68700E-03  9.79612E-04 -2.93057E-04 -3.93438E-05  5.54488E-05
  8.900  2.76311E-04  2.46253E-04 -2.35982E-05 -3.44596E-05  9.50897E-06  1.40285E-03  7.99009E-04 -2.49133E-04 -2.89355E-05  4.67566E-05
  9.000  2.11304E-04  1.87664E-04 -1.78282E-05 -2.62445E-05  7.20729E-06  1.16659E-03  6.50858E-04 -2.11933E-04 -2.08540E-05  3.95046E-05
  9.100  1.61276E-04  1.42400E-04 -1.34538E-05 -1.97903E-05  5.45248E-06  9.70495E-04  5.30004E-04 -1.80393E-04 -1.47496E-05  3.34576E-05
  9.200  1.23009E-04  1.07715E-04 -1.01426E-05 -1.47842E-05  4.12297E-06  8.07914E-04  4.31880E-04 -1.53612E-04 -1.02812E-05  2.84116E-05
  9.300  9.38875E-05  8.13311E-05 -7.63956E-06 -1.09490E-05  3.12059E-06  6.73178E-04  3.52510E-04 -1.30837E-04 -7.13142E-06  2.41923E-05
  9.400  7.18150E-05  6.13887E-05 -5.74982E-06 -8.04521E-06  2.36747E-06  5.61499E-04  2.88487E-04 -1.11434E-04 -5.01594E-06  2.06530E-05
  9.500  5.51322E-05  4.63937E-05 -4.32541E-06 -5.87137E-06  1.80285E-06  4.68866E-04  2.36928E-04 -9.48781E-05 -3.68814E-06  1.76718E-05
  9.600  4.25410E-05  3.51637E-05 -3.25409E-06 -4.26133E-06  1.37994E-06  3.91942E-04  1.95425E-04 -8.07282E-05 -2.94024E-06  1.51486E-05
  9.700  3.30369E-05  2.67750E-05 -2.45080E-06 -3.08105E-06  1.06316E-06  3.27967E-04  1.61991E-04 -6.86182E-05 -2.60179E-06  1.30012E-05
  9.800  2.58503E-05  2.05156E-05 -1.85105E-06 -2.22444E-06  8.25641E-07  2.74667E-04  1.34998E-04 -5.82424E-05 -2.53663E-06  1.11633E-05
  9.900  2.03971E-05  1.58421E-05 -1.40588E-06 -1.60900E-06  6.47205E-07  2.30176E-04  1.13131E-04 -4.93454E-05 -2.63890E-06  9.58141E-06
 10.000  1.62375E-05  1.23445E-05 -1.07806E-06 -1.17157E-06  5.12738E-07  1.92968E-04  9.53297E-05 -4.17136E-05 -2.82873E-06  8.21248E-06
 10.100  1.30425E-05  9.71558E-06 -8.39185E-07 -8.64506E-07  4.10908E-07  1.61792E-04  8.07500E-05 -3.51675E-05 -3.04796E-06  7.02228E-06
 10.200  1.05675E-05  7.72692E-06 -6.67557E-07 -6.52233E-07  3.33208E-07  1.35626E-04  6.87230E-05 -2.95563E-05 -3.25608E-06  5.98357E-06
 10.300  8.63129E-06  6.20981E-06 -5.46505E-07 -5.08404E-07  2.73245E-07  1.13632E-04  5.87225E-05 -2.47520E-05 -3.42670E-06  5.07472E-06
 10.400  7.10008E-06  5.04016E-06 -4.63159E-07 -4.13580E-07  2.26225E-07  9.51228E-05  5.03368E-05 -2.06461E-05 -3.54436E-06  4.27856E-06
 10.500  5.87530E-06  4.12716E-06 -4.07515E-07 -3.53401E-07  1.88583E-07  7.95334E-05  4.32455E-05 -1.71455E-05 -3.60192E-06  3.58138E-06
 10.600  4.88431E-06  3.40459E-06 -3.71742E-07 -3.17219E-07  1.57708E-07  6.63971E-05  3.72003E-05 -1.41701E-05 -3.59837E-06  2.97210E-06
 10.700  4.07364E-06  2.82437E-06 -3.49670E-07 -2.97085E-07  1.31736E-07  5.53273E-05  3.20096E-05 -1.16503E-05 -3.53703E-06  2.44161E-06
 10.800  3.40378E-06  2.35174E-06 -3.36427E-07 -2.87031E-07  1.09386E-07  4.60023E-05  2.75253E-05 -9.52522E-06 -3.42410E-06  1.98221E-06
 10.900  2.84552E-06  1.96168E-06 -3.28182E-07 -2.82576E-07  8.98258E-08  3.81536E-05  2.36332E-05 -7.74155E-06 -3.26753E-06  1.58717E-06
 11.000  2.37707E-06  1.63619E-06 -3.21971E-07 -2.80389E-07  7.25582E-08  3.15556E-05  2.02443E-05 -6.25220E-06 -3.07615E-06  1.25044E-06
 11.100  1.98210E-06  1.36239E-06 -3.15569E-07 -2.78057E-07  5.73188E-08  2.60183E-05  1.72888E-05 -5.01556E-06 -2.85896E-06  9.66390E-07
 11.200  1.64815E-06  1.13094E-06 -3.07398E-07 -2.73923E-07  4.39941E-08  2.13811E-05  1.47109E-05 -3.99486E-06 -2.62466E-06  7.29697E-07
 11.300  1.36562E-06  9.34998E-07 -2.96453E-07 -2.66961E-07  3.25513E-08  1.75075E-05  1.24653E-05 -3.15769E-06 -2.38124E-06  5.35230E-07
 11.400  1.12687E-06  7.69424E-07 -2.82226E-07 -2.56670E-07  2.29838E-08  1.42812E-05  1.05139E-05 -2.47552E-06 -2.13581E-06  3.78042E-07
 11.500  9.25709E-07  6.30167E-07 -2.64635E-07 -2.42980E-07  1.52724E-08  1.16028E-05  8.82428E-06 -1.92344E-06 -1.89442E-06  2.53367E-07
 11.600  7.56976E-07  5.13890E-07 -2.43942E-07 -2.26155E-07  9.36076E-09  9.38752E-06  7.36771E-06 -1.47977E-06 -1.66202E-06  1.56662E-07
 11.700  6.16237E-07  4.17701E-07 -2.20671E-07 -2.06707E-07  5.14315E-09  7.56242E-06  6.11848E-06 -1.12581E-06 -1.44245E-06  8.36396E-08
 11.800  4.99619E-07  3.38989E-07 -1.95528E-07 -1.85310E-07  2.46361E-09  6.06518E-06  5.05315E-06 -8.45587E-07 -1.23849E-06  3.03211E-08
 11.900  4.03686E-07  2.75342E-07 -1.69316E-07 -1.62717E-07  1.12276E-09  4.84243E-06  4.15019E-06 -6.25502E-07 -1.05200E-06 -6.92599E-09
 12.000  3.25364E-07  2.24507E-07 -1.42861E-07 -1.39697E-07  8.90018E-10  3.84853E-06  3.38973E-06 -4.54130E-07 -8.83950E-07 -3.13563E-08
 12.100  2.61905E-07  1.84390E-07 -1.16954E-07 -1.16976E-07  1.51845E-09  3.04460E-06  2.75349E-06 -3.21932E-07 -7.34620E-07 -4.58290E-08
 12.200  2.10861E-07  1.53070E-07 -9.22969E-08 -9.51948E-08  2.76015E-09  2.39757E-06  2.22471E-06 -2.21016E-07 -6.03685E-07 -5.28030E-08
 12.300  1.70070E-07  1.28815E-07 -6.94713E-08 -7.48811E-08  4.38020E-09  1.87949E-06  1.78817E-06 -1.44899E-07 -4.90364E-07 -5.43465E-08
 12.400  1.37647E-07  1.10099E-07 -4.89149E-08 -5.64335E-08  6.16812E-09  1.46679E-06  1.43015E-06 -8.82990E-08 -3.93530E-07 -5.21568E-08
 12.500  1.11969E-07  9.56159E-08 -3.09166E-08 -4.01179E-08  7.94601E-09  1.13974E-06  1.13841E-06 -4.69407E-08 -3.11826E-07 -4.75901E-08
 12.600  9.16648E-08  8.42775E-08 -1.56207E-08 -2.60738E-08  9.57325E-09  8.81884E-07  9.02167E-07 -1.73875E-08 -2.43756E-07 -4.16972E-08
 12.700  7.55904E-08  7.52059E-08 -3.04072E-09 -1.43272E-08  1.09479E-08  6.79618E-07  7.12001E-07  3.10689E-09 -1.87770E-07 -3.52632E-08
 12.800  6.28122E-08  6.77183E-08  6.92067E-09 -4.80852E-09  1.20053E-08  5.21740E-07  5.59791E-07  1.67240E-08 -1.42323E-07 -2.88484E-08
 12.900  5.25804E-08  6.13052E-08  1.44483E-08  2.62662E-09  1.27144E-08  3.99099E-07  4.38605E-07  2.51872E-08 -1.05929E-07 -2.28288E-08
 13.000  4.43046E-08  5.56046E-08  1.97896E-08  8.17663E-09  1.30727E-08  3.04266E-07  3.42592E-07  2.98493E-08 -7.71984E-08 -1.74332E-08
 13.100  3.75287E-08  5.03755E-08  2.32310E-08  1.20737E-08  1.31000E-08  2.31257E-07  2.66862E-07  3.17659E-08 -5.48594E-08 -1.27778E-08
 13.200  3.19062E-08  4.54711E-08  2.50764E-08  1.45662E-08  1.28329E-08  1.75277E-07  2.07368E-07  3.17541E-08 -3.77741E-08 -8.89601E-09
 13.300  2.71790E-08  4.08147E-08  2.56290E-08  1.59030E-08  1.23182E-08  1.32517E-07  1.60796E-07  3.04405E-08 -2.49432E-08 -5.76334E-09
 13.400  2.31574E-08  3.63778E-08  2.51769E-08  1.63223E-08  1.16080E-08  9.99677E-08  1.24450E-07  2.83005E-08 -1.55051E-08 -3.31805E-09
 13.500  1.97034E-08  3.21628E-08  2.39831E-08  1.60428E-08  1.07554E-08  7.52670E-08  9.61598E-08  2.56890E-08 -8.72981E-09 -1.47720E-09
 13.600  1.67174E-08  2.81883E-08  2.22784E-08  1.52579E-08  9.81081E-09  5.65739E-08  7.41878E-08  2.28660E-08 -4.00874E-09 -1.48825E-10
 13.700  1.41267E-08  2.44788E-08  2.02582E-08  1.41331E-08  8.81976E-09  4.24606E-08  5.71543E-08  2.00169E-08 -8.43255E-10  7.59369E-10
 13.800  1.18774E-08  2.10578E-08  1.80821E-08  1.28051E-08  7.82122E-09  3.18267E-08  4.39693E-08  1.72690E-08  1.16852E-09  1.33418E-09
 13.900  9.92809E-09  1.79426E-08  1.58748E-08  1.13828E-08  6.84689E-09  2.38278E-08  3.37765E-08  1.47046E-08  2.34490E-09  1.65334E-09
 14.000  8.24521E-09  1.51427E-08  1.37296E-08  9.94948E-09  5.92113E-09  1.78195E-08  2.59056E-08  1.23722E-08  2.93353E-09  1.78377E-09
 14.100  6.80027E-09  1.26588E-08  1.17121E-08  8.56591E-09  5.06130E-09  1.33116E-08  1.98343E-08  1.02950E-08  3.12337E-09  1.78104E-09
 14.200  5.56789E-09  1.04831E-08  9.86428E-09  7.27338E-09  4.27846E-09  9.93273E-09  1.51562E-08  8.47790E-09  3.05558E-09  1.68982E-09
 14.300  4.52473E-09  8.60117E-09  8.20929E-09  6.09740E-09  3.57831E-09  7.40229E-09  1.15560E-08  6.91305E-09  2.83309E-09  1.54479E-09
 14.400  3.64892E-09  6.99293E-09  6.75536E-09  5.05090E-09  2.96216E-09  5.50879E-09  8.78916E-09  5.58425E-09  2.52891E-09  1.37198E-09
 14.500  2.91988E-09  5.63464E-09  5.49976E-09  4.13727E-09  2.42794E-09  4.09312E-09  6.66630E-09  4.47027E-09  2.19300E-09  1.19011E-09
 14.600  2.31834E-09  4.50038E-09  4.43204E-09  3.35304E-09  1.97108E-09  3.03571E-09  5.04070E-09  3.54743E-09  1.85802E-09  1.01196E-09
 14.700  1.82642E-09  3.56355E-09  3.53683E-09  2.69005E-09  1.58540E-09  2.24677E-09  3.79871E-09  2.79138E-09  1.54394E-09  8.45696E-10
 14.800  1.42773E-09  2.79794E-09  2.79599E-09  2.13732E-09  1.26374E-09  1.65895E-09  2.85232E-09  2.17848E-09  1.26169E-09  6.95962E-10
 14.900  1.10747E-09  2.17865E-09  2.19033E-09  1.68239E-09  9.98536E-10  1.22168E-09  2.13332E-09  1.68656E-09  1.01596E-09  5.64838E-10
 15.000  8.52487E-10  1.68267E-09  1.70085E-09  1.31243E-09  7.82270E-10  8.97023E-10  1.58892E-09  1.29553E-09  8.07326E-10  4.52625E-10
 15.100  6.51246E-10  1.28925E-09  1.30953E-09  1.01495E-09  6.07749E-10  6.56528E-10  1.17824E-09  9.87553E-10  6.33834E-10  3.58458E-10
 15.200  4.93787E-10  9.80094E-10  9.99904E-10  7.78304E-10  4.68328E-10  4.78835E-10  8.69684E-10  7.47143E-10  4.92102E-10  2.80774E-10
 15.300  3.71628E-10  7.39351E-10  7.57339E-10  5.91951E-10  3.58022E-10  3.47929E-10  6.38852E-10  5.61097E-10  3.78102E-10  2.17655E-10
 15.400  2.77645E-10  5.53534E-10  5.69108E-10  4.46631E-10  2.71565E-10  2.51805E-10  4.66959E-10  4.18327E-10  2.87674E-10  1.67075E-10
 15.500  2.05933E-10  4.11343E-10  4.24373E-10  3.34364E-10  2.04412E-10  1.81472E-10  3.39574E-10  3.09663E-10  2.16846E-10  1.27051E-10
 15.600  1.51653E-10  3.03447E-10  3.14065E-10  2.48413E-10  1.52712E-10  1.30209E-10  2.45649E-10  2.27617E-10  1.62012E-10  9.57503E-11
 15.700  1.10895E-10  2.22244E-10  2.30716E-10  1.83182E-10  1.13247E-10  9.29991E-11  1.76755E-10  1.66152E-10  1.20017E-10  7.15396E-11
 15.800  8.05267E-11  1.61620E-10  1.68260E-10  1.34094E-10  8.33723E-11  6.61084E-11  1.26493E-10  1.20458E-10  8.81816E-11  5.30061E-11
 15.900  5.80734E-11  1.16714E-10  1.21838E-10  9.74562E-11  6.09411E-11  4.67643E-11  9.00263E-11  8.67423E-11  6.42789E-11  3.89576E-11
 16.000  4.15967E-11  8.37066E-11  8.76072E-11  7.03300E-11  4.42322E-11  3.29154E-11  6.37168E-11  6.20482E-11  4.64963E-11  2.84084E-11
 16.100  2.95953E-11  5.96269E-11  6.25601E-11  5.04026E-11  3.18824E-11  2.30497E-11  4.48436E-11  4.40927E-11  3.33825E-11  2.05579E-11
 16.200  2.09171E-11  4.21903E-11  4.43714E-11  3.58750E-11  2.28239E-11  1.60574E-11  3.13829E-11  3.11298E-11  2.37932E-11  1.47663E-11
 16.300  1.46868E-11  2.96556E-11  3.12607E-11  2.53632E-11  1.62292E-11  1.11276E-11  2.18385E-11  2.18368E-11  1.68380E-11  1.05292E-11
 16.400  1.02456E-11  2.07091E-11  2.18788E-11  1.78127E-11  1.14632E-11  7.67025E-12  1.51105E-11  1.52207E-11  1.18331E-11  7.45455E-12
 16.500  7.10165E-12  1.43685E-11  1.52131E-11  1.24281E-11  8.04372E-12  5.25878E-12  1.03958E-11  1.05425E-11  8.25919E-12  5.24092E-12
 16.600  4.89130E-12  9.90577E-12  1.05102E-11  8.61531E-12  5.60765E-12  3.58599E-12  7.11148E-12  7.25676E-12  5.72610E-12  3.65940E-12
 16.700  3.34781E-12  6.78615E-12  7.21518E-12  5.93416E-12  3.88428E-12  2.43203E-12  4.83710E-12  4.96432E-12  3.94379E-12  2.53793E-12
 16.800  2.27719E-12  4.62005E-12  4.92210E-12  4.06165E-12  2.67349E-12  1.64042E-12  3.27141E-12  3.37535E-12  2.69866E-12  1.74849E-12
 16.900  1.53944E-12  3.12598E-12  3.33698E-12  2.76269E-12  1.82857E-12  1.10043E-12  2.19996E-12  2.28110E-12  1.83485E-12  1.19676E-12
 17.000  1.03438E-12  2.10218E-12  2.24846E-12  1.86757E-12  1.24291E-12  7.34148E-13  1.47106E-12  1.53236E-12  1.23969E-12  8.13857E-13
 17.100  6.90839E-13  1.40515E-12  1.50582E-12  1.25477E-12  8.39630E-13  4.87103E-13  9.78115E-13  1.02327E-12  8.32374E-13  5.49955E-13
 17.200  4.58643E-13  9.33618E-13  1.00241E-12  8.37960E-13  5.63746E-13  3.21420E-13  6.46695E-13  6.79290E-13  5.55460E-13  3.69300E-13
 17.300  3.02690E-13  6.16645E-13  6.63317E-13  5.56257E-13  3.76227E-13  2.10932E-13  4.25177E-13  4.48307E-13  3.68422E-13  2.46454E-13
 17.400  1.98595E-13  4.04895E-13  4.36344E-13  3.67069E-13  2.49581E-13  1.37668E-13  2.77977E-13  2.94152E-13  2.42900E-13  1.63467E-13
 17.500  1.29541E-13  2.64310E-13  2.85359E-13  2.40802E-13  1.64585E-13  8.93611E-14  1.80728E-13  1.91895E-13  1.59193E-13  1.07768E-13
 17.600  8.40113E-14  1.71542E-13  1.85536E-13  1.57050E-13  1.07896E-13  5.76893E-14  1.16852E-13  1.24472E-13  1.03720E-13  7.06225E-14
 17.700  5.41722E-14  1.10696E-13  1.19940E-13  1.01835E-13  7.03206E-14  3.70407E-14  7.51351E-14  8.02805E-14  6.71844E-14  4.60061E-14
 17.800  3.47332E-14  7.10258E-14  7.70927E-14  6.56545E-14  4.55657E-14  2.36542E-14  4.80466E-14  5.14872E-14  4.32676E-14  2.97943E-14
 17.900  2.21442E-14  4.53153E-14  4.92719E-14  4.20876E-14  2.93557E-14  1.50242E-14  3.05566E-14  3.28364E-14  2.77057E-14  1.91831E-14
 18.000  1.40391E-14  2.87498E-14  3.13141E-14  2.68279E-14  1.88046E-14  9.49146E-15  1.93277E-14  2.08255E-14  1.76403E-14  1.22798E-14
 18.100  8.85121E-15  1.81386E-14  1.97903E-14  1.70051E-14  1.19776E-14  5.96410E-15  1.21591E-14  1.31352E-14  1.11685E-14  7.81589E-15
 18.200  5.54964E-15  1.13807E-14  1.24381E-14  1.07189E-14  7.58629E-15  3.72765E-15  7.60814E-15  8.23929E-15  7.03163E-15  4.94647E-15
 18.300  3.46052E-15  7.10146E-15  7.77429E-15  6.71917E-15  4.77812E-15  2.31747E-15  4.73503E-15  5.14012E-15  4.40255E-15  3.11289E-15
 18.400  2.14610E-15  4.40710E-15  4.83269E-15  4.18881E-15  2.99274E-15  1.43314E-15  2.93120E-15  3.18934E-15  2.74132E-15  1.94805E-15
 18.500  1.32374E-15  2.72020E-15  2.98781E-15  2.59711E-15  1.86415E-15  8.81595E-16  1.80492E-15  1.96828E-15  1.69761E-15  1.21234E-15
 18.600  8.12113E-16  1.66996E-15  1.83726E-15  1.60151E-15  1.15481E-15  5.39468E-16  1.10553E-15  1.20821E-15  1.04557E-15  7.50327E-16
 18.700  4.95569E-16  1.01973E-15  1.12370E-15  9.82255E-16  7.11488E-16  3.28388E-16  6.73591E-16  7.37710E-16  6.40504E-16  4.61846E-16
 18.800  3.00802E-16  6.19367E-16  6.83617E-16  5.99221E-16  4.35982E-16  1.98858E-16  4.08266E-16  4.48048E-16  3.90264E-16  2.82735E-16
 18.900  1.81617E-16  3.74205E-16  4.13682E-16  3.63606E-16  2.65722E-16  1.19796E-16  2.46163E-16  2.70691E-16  2.36526E-16  1.72152E-16
 19.000  1.09081E-16  2.24896E-16  2.49015E-16  2.19467E-16  1.61086E-16  7.17955E-17  1.47653E-16  1.62684E-16  1.42591E-16  1.04258E-16
 19.100  6.51724E-17  1.34455E-16  1.49109E-16  1.31769E-16  9.71336E-17  4.28069E-17  8.81086E-17  9.72630E-17  8.55100E-17  6.28032E-17
 19.200  3.87363E-17  7.99670E-17  8.88199E-17  7.87006E-17  5.82609E-17  2.53923E-17  5.23065E-17  5.78490E-17  5.10108E-17  3.76312E-17
 19.300  2.29046E-17  4.73141E-17  5.26331E-17  4.67599E-17  3.47611E-17  1.49855E-17  3.08934E-17  3.42294E-17  3.02719E-17  2.24295E-17
 19.400  1.34737E-17  2.78502E-17  3.10285E-17  2.76382E-17  2.06314E-17  8.79894E-18  1.81534E-17  2.01497E-17  1.78716E-17  1.32986E-17
 19.500  7.88542E-18  1.63093E-17  1.81981E-17  1.62518E-17  1.21813E-17  5.14030E-18  1.06131E-17  1.18009E-17  1.04964E-17  7.84376E-18
 19.600  4.59139E-18  9.50220E-18  1.06186E-17  9.50723E-18  7.15485E-18  2.98782E-18  6.17342E-18  6.87620E-18  6.13323E-18  4.60237E-18
 19.700  2.65984E-18  5.50811E-18  6.16444E-18  5.53327E-18  4.18080E-18  1.72797E-18  3.57289E-18  3.98638E-18  3.56544E-18  2.68653E-18
 19.800  1.53310E-18  3.17674E-18  3.56052E-18  3.20402E-18  2.43042E-18  9.94355E-19  2.05747E-18  2.29940E-18  2.06218E-18  1.56014E-18
 19.900  8.79219E-19  1.82293E-18  2.04616E-18  1.84587E-18  1.40565E-18  5.69352E-19  1.17889E-18  1.31967E-18  1.18669E-18  9.01381E-19
  67 183 200   0.100
  0.000  5.63989E-02 -3.02559E-16 -4.37150E-16 -4.50334E-16 -1.34466E-15  9.30520E-02 -5.12023E-16 -6.45317E-16 -1.18838E-15 -6.00806E-16
  0.100  5.64029E-02 -4.80764E-05 -3.56603E-08 -1.16165E-11 -1.87394E-15  9.30864E-02  7.69962E-05  7.74786E-08  3.28663E-11  3.86232E-15
  0.200  5.64153E-02 -1.89792E-04 -5.65835E-07 -7.38371E-10 -5.25869E-13  9.31875E-02  3.03326E-04  1.22649E-06  2.08371E-09  2.37333E-12
  0.300  5.64372E-02 -4.17729E-04 -2.82499E-06 -8.31461E-09 -1.33174E-11  9.33491E-02  6.65294E-04  6.09937E-06  2.33680E-08  5.99999E-11
  0.400  5.64705E-02 -7.19921E-04 -8.75572E-06 -4.59714E-08 -1.31144E-10  9.35613E-02  1.14099E-03  1.88007E-05  1.28466E-07  5.86055E-10
  0.500  5.65176E-02 -1.08043E-03 -2.08440E-05 -1.71768E-07 -7.67567E-10  9.38115E-02  1.70159E-03  4.44424E-05  4.76528E-07  3.39368E-09
  0.600  5.65811E-02 -1.48012E-03 -4.19035E-05 -5.00017E-07 -3.22750E-09  9.40849E-02  2.31312E-03  8.85768E-05  1.37507E-06  1.40870E-08
  0.700  5.66638E-02 -1.89758E-03 -7.48223E-05 -1.22338E-06 -1.07881E-08  9.43662E-02  2.93839E-03  1.56557E-04  3.33017E-06  4.63826E-08
  0.800  5.67682E-02 -2.31017E-03 -1.22290E-04 -2.63225E-06 -3.04488E-08  9.46403E-02  3.53928E-03  2.52883E-04  7.08270E-06  1.28689E-07
  0.900  5.68964E-02 -2.69515E-03 -1.86522E-04 -5.12798E-06 -7.54488E-08  9.48934E-02  4.07892E-03  3.80584E-04  1.36213E-05  3.12844E-07
  1.000  5.70495E-02 -3.03073E-03 -2.69002E-04 -9.22692E-06 -1.68550E-07  9.51140E-02  4.52384E-03  5.40705E-04  2.41656E-05  6.84390E-07
  1.100  5.72279E-02 -3.29721E-03 -3.70261E-04 -1.55528E-05 -3.45955E-07  9.52940E-02  4.84589E-03  7.31928E-04  4.01160E-05  1.37324E-06
  1.200  5.74307E-02 -3.47795E-03 -4.89711E-04 -2.48160E-05 -6.61598E-07  9.54284E-02  5.02379E-03  9.50372E-04  6.29709E-05  2.56319E-06
  1.300  5.76559E-02 -3.56013E-03 -6.25544E-04 -3.77795E-05 -1.19139E-06  9.55161E-02  5.04437E-03  1.18960E-03  9.42164E-05  4.49860E-06
  1.400  5.79000E-02 -3.53545E-03 -7.74713E-04 -5.52129E-05 -2.03691E-06  9.55596E-02  4.90316E-03  1.44081E-03  1.35194E-04  7.48644E-06
  1.500  5.81583E-02 -3.40052E-03 -9.32993E-04 -7.78362E-05 -3.32797E-06  9.55648E-02  4.60461E-03  1.69325E-03  1.86962E-04  1.18926E-05
  1.600  5.84251E-02 -3.15700E-03 -1.09513E-03 -1.06257E-04 -5.22339E-06  9.55401E-02  4.16175E-03  1.93476E-03  2.50153E-04  1.81316E-05
  1.700  5.86937E-02 -2.81154E-03 -1.25505E-03 -1.40908E-04 -7.90961E-06  9.54958E-02  3.59533E-03  2.15249E-03  3.24851E-04  2.66496E-05
  1.800  5.89570E-02 -2.37544E-03 -1.40616E-03 -1.81985E-04 -1.15965E-05  9.54433E-02  2.93262E-03  2.33366E-03  4.10488E-04  3.79017E-05
  1.900  5.92074E-02 -1.86406E-03 -1.54167E-03 -2.29393E-04 -1.65104E-05  9.53942E-02  2.20581E-03  2.46638E-03  5.05780E-04  5.23246E-05
  2.000  5.94379E-02 -1.29608E-03 -1.65498E-03 -2.82711E-04 -2.28846E-05  9.53589E-02  1.45017E-03  2.54043E-03  6.08702E-04  7.03066E-05
  2.100  5.96416E-02 -6.92583E-04 -1.73999E-03 -3.41163E-04 -3.09464E-05  9.53467E-02  7.02092E-04  2.54799E-03  7.16503E-04  9.21568E-05
  2.200  5.98129E-02 -7.60052E-05 -1.79149E-03 -4.03621E-04 -4.09040E-05  9.53642E-02 -2.88264E-06  2.48421E-03  8.25779E-04  1.18076E-04
  2.300  5.99475E-02  5.30913E-04 -1.80549E-03 -4.68618E-04 -5.29305E-05  9.54154E-02 -6.31982E-04  2.34762E-03  9.32582E-04  1.48130E-04
  2.400  6.00425E-02  1.10621E-03 -1.77939E-03 -5.34387E-04 -6.71492E-05  9.55009E-02 -1.15690E-03  2.14036E-03  1.03257E-03  1.82227E-04
  2.500  6.00969E-02  1.62971E-03 -1.71226E-03 -5.98913E-04 -8.36196E-05  9.56184E-02 -1.55522E-03  1.86823E-03  1.12122E-03  2.20097E-04
  2.600  6.01115E-02  2.08395E-03 -1.60487E-03 -6.60009E-04 -1.02326E-04  9.57623E-02 -1.81149E-03  1.54039E-03  1.19400E-03  2.61283E-04
  2.700  6.00890E-02  2.45492E-03 -1.45973E-03 -7.15392E-04 -1.23166E-04  9.59242E-02 -1.91788E-03  1.16901E-03  1.24667E-03  3.05128E-04
  2.800  6.00336E-02  2.73265E-03 -1.28103E-03 -7.62774E-04 -1.45951E-04  9.60935E-02 -1.87439E-03  7.68618E-04  1.27549E-03  3.50773E-04
  2.900  5.99509E-02  2.91162E-03 -1.07451E-03 -7.99949E-04 -1.70400E-04  9.62576E-02 -1.68861E-03  3.55302E-04  1.27749E-03  3.97160E-04
  3.000  5.98474E-02  2.99094E-03 -8.47222E-04 -8.24878E-04 -1.96145E-04  9.64031E-02 -1.37507E-03 -5.41680E-05  1.25070E-03  4.43037E-04
  3.100  5.97303E-02  2.97436E-03 -6.07318E-04 -8.35771E-04 -2.22739E-04  9.65163E-02 -9.54152E-04 -4.43332E-04  1.19432E-03  4.86976E-04
  3.200  5.96066E-02  2.87001E-03 -3.63726E-04 -8.31156E-04 -2.49665E-04  9.65841E-02 -4.50705E-04 -7.97019E-04  1.10894E-03  5.27401E-04
  3.300  5.94830E-02  2.69009E-03 -1.25845E-04 -8.09938E-04 -2.76350E-04  9.65943E-02  1.07627E-04 -1.10229E-03  9.96605E-04  5.62625E-04
  3.400  5.93651E-02  2.45033E-03  9.67863E-05 -7.71449E-04 -3.02175E-04  9.65368E-02  6.92222E-04 -1.34926E-03  8.60831E-04  5.90907E-04
  3.500  5.92569E-02  2.16930E-03  2.94822E-04 -7.15482E-04 -3.26497E-04  9.64035E-02  1.27536E-03 -1.53177E-03  7.06572E-04  6.10522E-04
  3.600  5.91606E-02  1.86774E-03  4.59429E-04 -6.42316E-04 -3.48652E-04  9.61888E-02  1.83203E-03 -1.64785E-03  5.40064E-04  6.19845E-04
  3.700  5.90758E-02  1.56770E-03  5.82592E-04 -5.52732E-04 -3.67979E-04  9.58898E-02  2.34159E-03 -1.69991E-03  3.68584E-04  6.17459E-04
  3.800  5.90000E-02  1.29174E-03  6.57402E-04 -4.48019E-04 -3.83822E-04  9.55059E-02  2.78914E-03 -1.69467E-03  2.00124E-04  6.02259E-04
  3.900  5.89276E-02  1.06202E-03  6.78309E-04 -3.29962E-04 -3.95549E-04  9.50387E-02  3.16650E-03 -1.64282E-03  4.29859E-05  5.73567E-04
  4.000  5.88508E-02  8.99505E-04  6.41347E-04 -2.00830E-04 -4.02559E-04  9.44914E-02  3.47277E-03 -1.55841E-03 -9.46732E-05  5.31237E-04
  4.100  5.87590E-02  8.23110E-04  5.44322E-04 -6.33410E-05 -4.04296E-04  9.38680E-02  3.71439E-03 -1.45797E-03 -2.05329E-04  4.75743E-04
  4.200  5.86393E-02  8.48971E-04  3.86947E-04  7.93853E-05 -4.00263E-04  9.31727E-02  3.90467E-03 -1.35950E-03 -2.82574E-04  4.08236E-04
  4.300  5.84771E-02  9.89761E-04  1.70932E-04  2.23890E-04 -3.90036E-04  9.24092E-02  4.06284E-03 -1.28132E-03 -3.21557E-04  3.30567E-04
  4.400  5.82563E-02  1.25412E-03 -9.99977E-05  3.66459E-04 -3.73286E-04  9.15795E-02  4.21266E-03 -1.24083E-03 -3.19356E-04  2.45259E-04
  4.500  5.79599E-02  1.64620E-03 -4.20145E-04  5.03231E-04 -3.49801E-04  9.06835E-02  4.38063E-03 -1.25334E-03 -2.75234E-04  1.55426E-04
  4.600  5.75705E-02  2.16538E-03 -7.81965E-04  6.30317E-04 -3.19507E-04  8.97186E-02  4.59404E-03 -1.33106E-03 -1.90773E-04  6.46474E-05
  4.700  5.70713E-02  2.80611E-03 -1.17627E-03  7.43941E-04 -2.82494E-04  8.86791E-02  4.87883E-03 -1.48219E-03 -6.98413E-05 -2.32114E-05
  4.800  5.64461E-02  3.55799E-03 -1.59249E-03  8.40591E-04 -2.39036E-04  8.75561E-02  5.25753E-03 -1.71036E-03  8.15774E-05 -1.04210E-04
  4.900  5.56808E-02  4.40600E-03 -2.01909E-03  9.17177E-04 -1.89609E-04  8.63380E-02  5.74743E-03 -2.01428E-03  2.55717E-04 -1.74565E-04
  5.000  5.47631E-02  5.33090E-03 -2.44389E-03  9.71176E-04 -1.34900E-04  8.50106E-02  6.35896E-03 -2.38781E-03  4.43483E-04 -2.30893E-04
  5.100  5.36838E-02  6.30991E-03 -2.85462E-03  1.00078E-03 -7.58087E-05  8.35580E-02  7.09469E-03 -2.82028E-03  6.35005E-04 -2.70428E-04
  5.200  5.24364E-02  7.31749E-03 -3.23936E-03  1.00497E-03 -1.34347E-05  8.19636E-02  7.94872E-03 -3.29715E-03  8.20244E-04 -2.91213E-04
  5.300  5.10186E-02  8.32625E-03 -3.58702E-03  9.83666E-04  5.09470E-05  8.02111E-02  8.90670E-03 -3.80087E-03  9.89612E-04 -2.92238E-04
  5.400  4.94313E-02  9.30803E-03 -3.88785E-03  9.37668E-04  1.15923E-04  7.82855E-02  9.94645E-03 -4.31199E-03  1.13455E-03 -2.73510E-04
  5.500  4.76798E-02  1.02350E-02 -4.13376E-03  8.68708E-04  1.79991E-04  7.61746E-02  1.10391E-02 -4.81030E-03  1.24804E-03 -2.36066E-04
  5.600  4.57729E-02  1.10807E-02 -4.31872E-03  7.79359E-04  2.41617E-04  7.38701E-02  1.21506E-02 -5.27604E-03  1.32496E-03 -1.81897E-04
  5.700  4.37234E-02  1.18212E-02 -4.43894E-03  6.72927E-04  2.99302E-04  7.13683E-02  1.32437E-02 -5.69100E-03  1.36236E-03 -1.13822E-04
  5.800  4.15477E-02  1.24360E-02 -4.49298E-03  5.53301E-04  3.51647E-04  6.86708E-02  1.42800E-02 -6.03951E-03  1.35954E-03 -3.52952E-05
  5.900  3.92649E-02  1.29089E-02 -4.48172E-03  4.24763E-04  3.97418E-04  6.57852E-02  1.52224E-02 -6.30921E-03  1.31796E-03  4.98145E-05
  6.000  3.68970E-02  1.32283E-02 -4.40829E-03  2.91785E-04  4.35600E-04  6.27252E-02  1.60365E-02 -6.49155E-03  1.24104E-03  1.37472E-04
  6.100  3.44679E-02  1.33879E-02 -4.27774E-03  1.58816E-04  4.65446E-04  5.95101E-02  1.66931E-02 -6.58207E-03  1.13385E-03  2.23722E-04
  6.200  3.20028E-02  1.33867E-02 -4.09681E-03  3.00761E-05  4.86505E-04  5.61647E-02  1.71692E-02 -6.58039E-03  1.00264E-03  3.04915E-04
  6.300  2.95275E-02  1.32290E-02 -3.87344E-03 -9.06301E-05  4.98640E-04  5.27183E-02  1.74492E-02 -6.48993E-03  8.54425E-04  3.77898E-04
  6.400  2.70676E-02  1.29235E-02 -3.61642E-03 -2.00067E-04  5.02020E-04  4.92037E-02  1.75253E-02 -6.31745E-03  6.96487E-04  4.40164E-04
  6.500  2.46480E-02  1.24833E-02 -3.33491E-03 -2.95681E-04  4.97106E-04  4.56561E-02  1.73977E-02 -6.07246E-03  5.35919E-04  4.89939E-04
  6.600  2.22921E-02  1.19251E-02 -3.03799E-03 -3.75674E-04  4.84612E-04  4.21117E-02  1.70740E-02 -5.76645E-03  3.79238E-04  5.26217E-04
  6.700  2.00210E-02  1.12679E-02 -2.73435E-03 -4.39019E-04  4.65460E-04  3.86066E-02  1.65688E-02 -5.41215E-03  2.32070E-04  5.48739E-04
  6.800  1.78535E-02  1.05326E-02 -2.43188E-03 -4.85444E-04  4.40730E-04  3.51756E-02  1.59020E-02 -5.02279E-03  9.89246E-05  5.57929E-04
  6.900  1.58053E-02  9.74064E-03 -2.13749E-03 -5.15369E-04  4.11590E-04  3.18507E-02  1.50978E-02 -4.61139E-03 -1.69209E-05  5.54789E-04
  7.000  1.38888E-02  8.91344E-03 -1.85691E-03 -5.29811E-04  3.79249E-04  2.86606E-02  1.41834E-02 -4.19019E-03 -1.13451E-04  5.40770E-04
  7.100  1.21133E-02  8.07136E-03 -1.59460E-03 -5.30270E-04  3.44891E-04  2.56299E-02  1.31871E-02 -3.77018E-03 -1.89853E-04  5.17634E-04
  7.200  1.04844E-02  7.23312E-03 -1.35376E-03 -5.18597E-04  3.09633E-04  2.27783E-02  1.21376E-02 -3.36079E-03 -2.46387E-04  4.87310E-04
  7.300  9.00467E-03  6.41524E-03 -1.13637E-03 -4.96865E-04  2.74481E-04  2.01206E-02  1.10620E-02 -2.96967E-03 -2.84209E-04  4.51766E-04
  7.400  7.67363E-03  5.63170E-03 -9.43317E-04 -4.67239E-04  2.40301E-04  1.76667E-02  9.98546E-03 -2.60266E-03 -3.05163E-04  4.12895E-04
  7.500  6.48806E-03  4.89365E-03 -7.74530E-04 -4.31865E-04  2.07801E-04  1.54215E-02  8.92998E-03 -2.26381E-03 -3.11566E-04  3.72426E-04
  7.600  5.44237E-03  4.20945E-03 -6.29162E-04 -3.92768E-04  1.77524E-04  1.33855E-02  7.91420E-03 -1.95556E-03 -3.05994E-04  3.31857E-04
  7.700  4.52909E-03  3.58466E-03 -5.05769E-04 -3.51782E-04  1.49847E-04  1.15551E-02  6.95297E-03 -1.67890E-03 -2.91096E-04  2.92423E-04
  7.800  3.73924E-03  3.02233E-03 -4.02491E-04 -3.10496E-04  1.24997E-04  9.92331E-03  6.05736E-03 -1.43360E-03 -2.69437E-04  2.55076E-04
  7.900  3.06281E-03  2.52318E-03 -3.17214E-04 -2.70223E-04  1.03059E-04  8.48032E-03  5.23483E-03 -1.21853E-03 -2.43367E-04  2.20493E-04
  8.000  2.48915E-03  2.08605E-03 -2.47715E-04 -2.31988E-04  8.40073E-05  7.21419E-03  4.48948E-03 -1.03182E-03 -2.14946E-04  1.89098E-04
  8.100  2.00734E-03  1.70818E-03 -1.91782E-04 -1.96540E-04  6.77191E-05  6.11150E-03  3.82252E-03 -8.71166E-04 -1.85889E-04  1.61098E-04
  8.200  1.60658E-03  1.38567E-03 -1.47302E-04 -1.64368E-04  5.40041E-05  5.15788E-03  3.23273E-03 -7.33989E-04 -1.57549E-04  1.36513E-04
  8.300  1.27641E-03  1.11378E-03 -1.12327E-04 -1.35732E-04  4.26247E-05  4.33865E-03  2.71694E-03 -6.17618E-04 -1.30926E-04  1.15226E-04
  8.400  1.00695E-03  8.87314E-04 -8.51130E-05 -1.10703E-04  3.33168E-05  3.63918E-03  2.27056E-03 -5.19424E-04 -1.06697E-04  9.70210E-05
  8.500  7.89079E-04  7.00880E-04 -6.41420E-05 -8.91973E-05  2.58075E-05  3.04533E-03  1.88798E-03 -4.36909E-04 -8.52563E-05  8.16141E-05
  8.600  6.14506E-04  5.49138E-04 -4.81213E-05 -7.10169E-05  1.98287E-05  2.54371E-03  1.56307E-03 -3.67772E-04 -6.67644E-05  6.86897E-05
  8.700  4.75854E-04  4.26984E-04 -3.59746E-05 -5.58853E-05  1.51279E-05  2.12192E-03  1.28944E-03 -3.09946E-04 -5.12000E-05  5.79229E-05
  8.800  3.66661E-04  3.29686E-04 -2.68241E-05 -4.34789E-05  1.14752E-05  1.76861E-03  1.06076E-03 -2.61614E-04 -3.84080E-05  4.89977E-05
  8.900  2.81355E-04  2.52967E-04 -1.99663E-05 -3.34534E-05  8.66744E-06  1.47362E-03  8.70983E-04 -2.21202E-04 -2.81442E-05  4.16202E-05
  9.000  2.15211E-04  1.93052E-04 -1.48470E-05 -2.54647E-05  6.52990E-06  1.22794E-03  7.14456E-04 -1.87370E-04 -2.01127E-05  3.55262E-05
  9.100  1.64276E-04  1.46676E-04 -1.10363E-05 -1.91850E-05  4.91607E-06  1.02370E-03  5.86043E-04 -1.58989E-04 -1.39960E-05  3.04844E-05
  9.200  1.25291E-04  1.11075E-04 -8.20496E-06 -1.43131E-05  3.70580E-06  8.54101E-04  4.81162E-04 -1.35117E-04 -9.47832E-06  2.62976E-05
  9.300  9.56090E-05  8.39456E-05 -6.10358E-06 -1.05810E-05  2.80266E-06  7.13342E-04  3.95798E-04 -1.14977E-04 -6.26158E-06  2.28005E-05
  9.400  7.31027E-05  6.34049E-05 -4.54512E-06 -7.75669E-06  2.13079E-06  5.96499E-04  3.26491E-04 -9.79273E-05 -4.07556E-06  1.98573E-05
  9.500  5.60878E-05  4.79355E-05 -3.39016E-06 -5.64408E-06  1.63155E-06  4.99440E-04  2.70295E-04 -8.34438E-05 -2.68357E-06  1.73582E-05
  9.600  4.32449E-05  3.63333E-05 -2.53524E-06 -4.08142E-06  1.26036E-06  4.18718E-04  2.24738E-04 -7.10982E-05 -1.88430E-06  1.52152E-05
  9.700  3.35516E-05  2.76555E-05 -1.90378E-06 -2.93795E-06  9.83734E-07  3.51477E-04  1.87766E-04 -6.05411E-05 -1.51105E-06  1.33589E-05
  9.800  2.62241E-05  2.11735E-05 -1.43905E-06 -2.11004E-06  7.76822E-07  2.95360E-04  1.57689E-04 -5.14879E-05 -1.42926E-06  1.17352E-05
  9.900  2.06670E-05  1.63300E-05 -1.09901E-06 -1.51703E-06  6.21262E-07  2.48429E-04  1.33132E-04 -4.37061E-05 -1.53307E-06  1.03022E-05
 10.000  1.64314E-05  1.27035E-05 -8.52345E-07 -1.09719E-06  5.03534E-07  2.09096E-04  1.12982E-04 -3.70058E-05 -1.74144E-06  9.02768E-06
 10.100  1.31813E-05  9.97739E-06 -6.75631E-07 -8.03922E-07  4.13670E-07  1.76061E-04  9.63482E-05 -3.12311E-05 -1.99421E-06  7.88730E-06
 10.200  1.06668E-05  7.91607E-06 -5.51232E-07 -6.02464E-07  3.44292E-07  1.48258E-04  8.25195E-05 -2.62535E-05 -2.24843E-06  6.86267E-06
 10.300  8.70241E-06  6.34502E-06 -4.65759E-07 -4.67101E-07  2.89919E-07  1.24816E-04  7.09339E-05 -2.19662E-05 -2.47502E-06  5.94002E-06
 10.400  7.15145E-06  5.13569E-06 -4.08949E-07 -3.78892E-07  2.46471E-07  1.05020E-04  6.11488E-05 -1.82797E-05 -2.65579E-06  5.10903E-06
 10.500  5.91298E-06  4.19380E-06 -3.72854E-07 -3.23880E-07  2.10932E-07  8.82825E-05  5.28178E-05 -1.51182E-05 -2.78104E-06  4.36187E-06
 10.600  4.91267E-06  3.45049E-06 -3.51254E-07 -2.91744E-07  1.81096E-07  7.41181E-05  4.56708E-05 -1.24166E-05 -2.84742E-06  3.69243E-06
 10.700  4.09574E-06  2.85563E-06 -3.39244E-07 -2.74803E-07  1.55394E-07  6.21260E-05  3.94977E-05 -1.01184E-05 -2.85622E-06  3.09575E-06
 10.800  3.42178E-06  2.37289E-06 -3.32948E-07 -2.67311E-07  1.32758E-07  5.19726E-05  3.41352E-05 -8.17410E-06 -2.81197E-06  2.56748E-06
 10.900  2.86084E-06  1.97602E-06 -3.29320E-07 -2.64969E-07  1.12505E-07  4.33798E-05  2.94565E-05 -6.53944E-06 -2.72133E-06  2.10361E-06
 11.000  2.39064E-06  1.64609E-06 -3.26015E-07 -2.64587E-07  9.42409E-08  3.61142E-05  2.53622E-05 -5.17492E-06 -2.59216E-06  1.70014E-06
 11.100  1.99448E-06  1.36947E-06 -3.21299E-07 -2.63866E-07  7.77787E-08  2.99789E-05  2.17738E-05 -4.04497E-06 -2.43282E-06  1.35299E-06
 11.200  1.65964E-06  1.13628E-06 -3.13977E-07 -2.61228E-07  6.30626E-08  2.48075E-05  1.86282E-05 -3.11746E-06 -2.25161E-06  1.05787E-06
 11.300  1.37634E-06  9.39270E-07 -3.03339E-07 -2.55702E-07  5.01066E-08  2.04583E-05  1.58741E-05 -2.36346E-06 -2.05641E-06  8.10333E-07
 11.400  1.13684E-06  7.72994E-07 -2.89099E-07 -2.46820E-07  3.89451E-08  1.68102E-05  1.34681E-05 -1.75697E-06 -1.85436E-06  6.05756E-07
 11.500  9.34880E-07  6.33199E-07 -2.71333E-07 -2.34524E-07  2.95961E-08  1.37595E-05  1.13731E-05 -1.27477E-06 -1.65166E-06  4.39445E-07
 11.600  7.65273E-07  5.16418E-07 -2.50412E-07 -2.19077E-07  2.20377E-08  1.12171E-05  9.55631E-06 -8.96310E-07 -1.45353E-06  3.06709E-07
 11.700  6.23588E-07  4.19688E-07 -2.26927E-07 -2.00981E-07  1.61965E-08  9.10619E-06  7.98834E-06 -6.03527E-07 -1.26413E-06  2.02967E-07
 11.800  5.05970E-07  3.40370E-07 -2.01617E-07 -1.80888E-07  1.19459E-08  7.36063E-06  6.64227E-06 -3.80733E-07 -1.08660E-06  1.23835E-07
 11.900  4.09011E-07  2.76054E-07 -1.75293E-07 -1.59532E-07  9.11236E-09  5.92339E-06  5.49328E-06 -2.14442E-07 -9.23140E-07  6.52075E-08
 12.000  3.29669E-07  2.24510E-07 -1.48778E-07 -1.37659E-07  7.48676E-09  4.74535E-06  4.51843E-06 -9.31957E-08 -7.75081E-07  2.33257E-08
 12.100  2.65227E-07  1.83676E-07 -1.22845E-07 -1.15977E-07  6.83891E-09  3.78432E-06  3.69645E-06 -7.37679E-09 -6.43029E-07 -5.18070E-09
 12.200  2.13265E-07  1.51665E-07 -9.81748E-08 -9.51103E-08  6.93255E-09  3.00412E-06  3.00778E-06  5.09899E-08 -5.26974E-07 -2.32668E-08
 12.300  1.71644E-07  1.26777E-07 -7.53276E-08 -7.55772E-08  7.53941E-09  2.37387E-06  2.43446E-06  8.84331E-08 -4.26416E-07 -3.34663E-08
 12.400  1.38493E-07  1.07513E-07 -5.47229E-08 -5.77717E-08  8.45083E-09  1.86733E-06  1.96023E-06  1.10229E-07 -3.40487E-07 -3.79019E-08
 12.500  1.12200E-07  9.25856E-08 -3.66354E-08 -4.19605E-08  9.48650E-09  1.46228E-06  1.57043E-06  1.20582E-07 -2.68060E-07 -3.83090E-08
 12.600  9.13933E-08  8.09161E-08 -2.12009E-08 -2.82889E-08  1.04997E-08  1.14003E-06  1.25201E-06  1.22801E-07 -2.07847E-07 -3.60690E-08
 12.700  7.49277E-08  7.16292E-08 -8.42936E-09 -1.67925E-08  1.13796E-08  8.84957E-07  9.93466E-07  1.19447E-07 -1.58481E-07 -3.22493E-08
 12.800  6.18618E-08  6.40378E-08  1.77516E-09 -7.41472E-09  1.20505E-08  6.84068E-07  7.84767E-07  1.12470E-07 -1.18582E-07 -2.76473E-08
 12.900  5.14354E-08  5.76222E-08  9.59210E-09 -2.58178E-11  1.24688E-08  5.26631E-07  6.17249E-07  1.03331E-07 -8.68121E-08 -2.28334E-08
 13.000  4.30457E-08  5.20070E-08  1.52608E-08  5.55670E-09  1.26191E-08  4.03839E-07  4.83510E-07  9.31000E-08 -6.19102E-08 -1.81938E-08
 13.100  3.62229E-08  4.69351E-08  1.90576E-08  9.54909E-09  1.25082E-08  3.08515E-07  3.77285E-07  8.25409E-08 -4.27208E-08 -1.39696E-08
 13.200  3.06074E-08  4.22432E-08  2.12758E-08  1.21842E-08  1.21600E-08  2.34847E-07  2.93320E-07  7.21805E-08 -2.82082E-08 -1.02911E-08
 13.300  2.59282E-08  3.78380E-08  2.22080E-08  1.36969E-08  1.16097E-08  1.78161E-07  2.27253E-07  6.23654E-08 -1.74632E-08 -7.20768E-09
 13.400  2.19839E-08  3.36763E-08  2.21327E-08  1.43128E-08  1.08988E-08  1.34722E-07  1.75491E-07  5.33074E-08 -9.70346E-09 -4.71279E-09
 13.500  1.86267E-08  2.97468E-08  2.13041E-08  1.42398E-08  1.00712E-08  1.01563E-07  1.35098E-07  4.51190E-08 -4.26748E-09 -2.76367E-09
 13.600  1.57483E-08  2.60572E-08  1.99463E-08  1.36626E-08  9.16946E-09  7.63442E-08  1.03694E-07  3.78417E-08 -6.06334E-10 -1.29674E-09
 13.700  1.32692E-08  2.26234E-08  1.82495E-08  1.27397E-08  8.23251E-09  5.72310E-08  7.93625E-08  3.14670E-08  1.72761E-09 -2.39115E-10
 13.800  1.11303E-08  1.94620E-08  1.63696E-08  1.16029E-08  7.29410E-09  4.27917E-08  6.05720E-08  2.59536E-08  3.09285E-09  4.83333E-10
 13.900  9.28620E-09  1.65860E-08  1.44295E-08  1.03574E-08  6.38190E-09  3.19162E-08  4.61047E-08  2.12392E-08  3.77120E-09  9.40626E-10
 14.000  7.70091E-09  1.40022E-08  1.25216E-08  9.08442E-09  5.51724E-09  2.37479E-08  3.49979E-08  1.72500E-08  3.97985E-09  1.19546E-09
 14.100  6.34432E-09  1.17100E-08  1.07120E-08  7.84370E-09  4.71537E-09  1.76291E-08  2.64945E-08  1.39070E-08  3.88265E-09  1.30164E-09
 14.200  5.19031E-09  9.70197E-09  9.04404E-09  6.67647E-09  3.98597E-09  1.30568E-08  2.00017E-08  1.11313E-08  3.60024E-09  1.30361E-09
 14.300  4.21544E-09  7.96433E-09  7.54258E-09  5.60880E-09  3.33394E-09  9.64832E-09  1.50571E-08  8.84656E-09  3.21901E-09  1.23689E-09
 14.400  3.39817E-09  6.47865E-09  6.21821E-09  4.65468E-09  2.76029E-09  7.11309E-09  1.13015E-08  6.98184E-09  2.79871E-09  1.12884E-09
 14.500  2.71860E-09  5.22314E-09  5.07071E-09  3.81886E-09  2.26293E-09  5.23159E-09  8.45664E-09  5.47229E-09  2.37887E-09  9.99784E-10
 14.600  2.15831E-09  4.17405E-09  4.09222E-09  3.09939E-09  1.83757E-09  3.83831E-09  6.30767E-09  4.25993E-09  1.98398E-09  8.64211E-10
 14.700  1.70034E-09  3.30700E-09  3.26989E-09  2.48972E-09  1.47840E-09  2.80886E-09  4.68902E-09  3.29382E-09  1.62771E-09  7.31893E-10
 14.800  1.32927E-09  2.59795E-09  2.58799E-09  1.98040E-09  1.17878E-09  2.04998E-09  3.47352E-09  2.52978E-09  1.31618E-09  6.08953E-10
 14.900  1.03124E-09  2.02403E-09  2.02955E-09  1.56048E-09  9.31683E-10  1.49188E-09  2.56366E-09  1.93008E-09  1.05046E-09  4.98786E-10
 15.000  7.93960E-10  1.56408E-09  1.57752E-09  1.21847E-09  7.30116E-10  1.08247E-09  1.88488E-09  1.46285E-09  8.28424E-10  4.02824E-10
 15.100  6.06674E-10  1.19902E-09  1.21565E-09  9.43094E-10  5.67404E-10  7.82927E-10  1.38028E-09  1.10147E-09  6.46138E-10  3.21157E-10
 15.200  4.60110E-10  9.11958E-10  9.28977E-10  7.23764E-10  4.37371E-10  5.64389E-10  1.00658E-09  8.23974E-10  4.98781E-10  2.53015E-10
 15.300  3.46379E-10  6.88290E-10  7.04147E-10  5.50866E-10  3.34457E-10  4.05426E-10  7.30905E-10  6.12410E-10  3.81297E-10  1.97127E-10
 15.400  2.58858E-10  5.15551E-10  5.29504E-10  4.15908E-10  2.53766E-10  2.90168E-10  5.28375E-10  4.52247E-10  2.88802E-10  1.51987E-10
 15.500  1.92056E-10  3.83293E-10  3.95096E-10  3.11555E-10  1.91070E-10  2.06879E-10  3.80222E-10  3.31843E-10  2.16822E-10  1.16028E-10
 15.600  1.41479E-10  2.82880E-10  2.92574E-10  2.31599E-10  1.42785E-10  1.46909E-10  2.72330E-10  2.41952E-10  1.61408E-10  8.77455E-11
 15.700  1.03487E-10  2.07270E-10  2.15049E-10  1.70874E-10  1.05915E-10  1.03892E-10  1.94119E-10  1.75302E-10  1.19179E-10  6.57605E-11
 15.800  7.51714E-11  1.50793E-10  1.56916E-10  1.25146E-10  7.79958E-11  7.31559E-11  1.37693E-10  1.26217E-10  8.73054E-11  4.88579E-11
 15.900  5.42284E-11  1.08939E-10  1.13681E-10  9.09957E-11  5.70262E-11  5.12863E-11  9.71833E-11  9.03118E-11  6.34679E-11  3.59972E-11
 16.000  3.88547E-11  7.81598E-11  8.17795E-11  6.56964E-11  4.14013E-11  3.57918E-11  6.82453E-11  6.42218E-11  4.57960E-11  2.63077E-11
 16.100  2.76529E-11  5.56963E-11  5.84242E-11  4.71012E-11  2.98493E-11  2.48629E-11  4.76790E-11  4.53888E-11  3.28051E-11  1.90758E-11
 16.200  1.95502E-11  3.94231E-11  4.14550E-11  3.35382E-11  2.13736E-11  1.71895E-11  3.31382E-11  3.18832E-11  2.33327E-11  1.37264E-11
 16.300  1.37311E-11  2.77200E-11  2.92174E-11  2.37197E-11  1.52015E-11  1.18271E-11  2.29117E-11  2.22607E-11  1.64803E-11  9.80376E-12
 16.400  9.58168E-12  1.93638E-11  2.04563E-11  1.66642E-11  1.07397E-11  8.09781E-12  1.57578E-11  1.54489E-11  1.15612E-11  6.95125E-12
 16.500  6.64334E-12  1.34393E-11  1.42290E-11  1.16306E-11  7.53768E-12  5.51697E-12  1.07802E-11  1.06574E-11  8.05607E-12  4.89369E-12
 16.600  4.57690E-12  9.26802E-12  9.83366E-12  8.06496E-12  5.25598E-12  3.73984E-12  7.33570E-12  7.30841E-12  5.57675E-12  3.42117E-12
 16.700  3.13347E-12  6.35111E-12  6.75285E-12  5.55671E-12  3.64143E-12  2.52233E-12  4.96512E-12  4.98225E-12  3.83548E-12  2.37538E-12
 16.800  2.13195E-12  4.32509E-12  4.60810E-12  3.80437E-12  2.50683E-12  1.69252E-12  3.34260E-12  3.37657E-12  2.62108E-12  1.63820E-12
 16.900  1.44162E-12  2.92720E-12  3.12500E-12  2.58838E-12  1.71491E-12  1.12987E-12  2.23821E-12  2.27505E-12  1.77992E-12  1.12233E-12
 17.000  9.68895E-13  1.96902E-12  2.10621E-12  1.75018E-12  1.16586E-12  7.50369E-13  1.49066E-12  1.52400E-12  1.20120E-12  7.63910E-13
 17.100  6.47257E-13  1.31647E-12  1.41092E-12  1.17619E-12  7.87723E-13  4.95752E-13  9.87442E-13  1.01503E-12  8.05669E-13  5.16618E-13
 17.200  4.29809E-13  8.74912E-13  9.39467E-13  7.85660E-13  5.28985E-13  3.25829E-13  6.50585E-13  6.72172E-13  5.37103E-13  3.47171E-13
 17.300  2.83724E-13  5.78005E-13  6.21817E-13  5.21654E-13  3.53087E-13  2.13032E-13  4.26340E-13  4.42599E-13  3.55915E-13  2.31845E-13
 17.400  1.86192E-13  3.79609E-13  4.09139E-13  3.44307E-13  2.34268E-13  1.38556E-13  2.77889E-13  2.89789E-13  2.34450E-13  1.53874E-13
 17.500  1.21477E-13  2.47858E-13  2.67626E-13  2.25916E-13  1.54510E-13  8.96456E-14  1.80157E-13  1.88674E-13  1.53530E-13  1.01503E-13
 17.600  7.87971E-14  1.60897E-13  1.74043E-13  1.47369E-13  1.01307E-13  5.76973E-14  1.16172E-13  1.22155E-13  9.99540E-14  6.65533E-14
 17.700  5.08200E-14  1.03848E-13  1.12533E-13  9.55760E-14  6.60357E-14  3.69407E-14  7.45124E-14  7.86493E-14  6.46986E-14  4.33772E-14
 17.800  3.25901E-14  6.66449E-14  7.23458E-14  6.16300E-14  4.27952E-14  2.35277E-14  4.75375E-14  5.03591E-14  4.16388E-14  2.81050E-14
 17.900  2.07817E-14  4.25282E-14  4.62467E-14  3.95145E-14  2.75745E-14  1.49067E-14  3.01670E-14  3.20681E-14  2.66460E-14  1.81034E-14
 18.000  1.31777E-14  2.69865E-14  2.93967E-14  2.51919E-14  1.76659E-14  9.39534E-15  1.90424E-14  2.03093E-14  1.69556E-14  1.15934E-14
 18.100  8.30953E-15  1.70291E-14  1.85817E-14  1.59706E-14  1.12538E-14  5.89085E-15  1.19568E-14  1.27925E-14  1.07291E-14  7.38185E-15
 18.200  5.21088E-15  1.06864E-14  1.16804E-14  1.00683E-14  7.12868E-15  3.67436E-15  7.46816E-15  8.01430E-15  6.75147E-15  4.67346E-15
 18.300  3.24981E-15  6.66926E-15  7.30188E-15  6.31228E-15  4.49043E-15  2.27997E-15  4.64013E-15  4.99390E-15  4.22509E-15  2.94207E-15
 18.400  2.01574E-15  4.13953E-15  4.53972E-15  3.93570E-15  2.81287E-15  1.40743E-15  2.86795E-15  3.09521E-15  2.62962E-15  1.84174E-15
 18.500  1.24352E-15  2.55543E-15  2.80710E-15  2.44051E-15  1.75231E-15  8.64325E-16  1.76337E-15  1.90821E-15  1.62774E-15  1.14652E-15
 18.600  7.63009E-16  1.56904E-15  1.72638E-15  1.50514E-15  1.08564E-15  5.28067E-16  1.07859E-15  1.17021E-15  1.00213E-15  7.09790E-16
 18.700  4.65671E-16  9.58236E-16  1.05603E-15  9.23262E-16  6.68941E-16  3.20974E-16  6.56324E-16  7.13856E-16  6.13665E-16  4.37011E-16
 18.800  2.82692E-16  5.82095E-16  6.42532E-16  5.63300E-16  4.09952E-16  1.94099E-16  3.97316E-16  4.33190E-16  3.73779E-16  2.67598E-16
 18.900  1.70706E-16  3.51732E-16  3.88869E-16  3.41849E-16  2.49882E-16  1.16777E-16  2.39287E-16  2.61504E-16  2.26459E-16  1.62974E-16
 19.000  1.02540E-16  2.11417E-16  2.34108E-16  2.06358E-16  1.51497E-16  6.99007E-17  1.43375E-16  1.57044E-16  1.36480E-16  9.87218E-17
 19.100  6.12723E-17  1.26412E-16  1.40199E-16  1.23912E-16  9.13601E-17  4.16293E-17  8.54694E-17  9.38248E-17  8.18214E-17  5.94814E-17
 19.200  3.64226E-17  7.51923E-17  8.35221E-17  7.40156E-17  5.48029E-17  2.46672E-17  5.06916E-17  5.57669E-17  4.87970E-17  3.56481E-17
 19.300  2.15390E-17  4.44941E-17  4.94992E-17  4.39807E-17  3.27006E-17  1.45428E-17  2.99129E-17  3.29767E-17  2.89507E-17  2.12516E-17
 19.400  1.26718E-17  2.61932E-17  2.91841E-17  2.59981E-17  1.94101E-17  8.53088E-18  1.75625E-17  1.94009E-17  1.70875E-17  1.26026E-17
 19.500  7.41689E-18  1.53406E-17  1.71182E-17  1.52888E-17  1.14611E-17  4.97923E-18  1.02596E-17  1.13561E-17  1.00337E-17  7.43455E-18
 19.600  4.31903E-18  8.93872E-18  9.98943E-18  8.94470E-18  6.73238E-18  2.89176E-18  5.96336E-18  6.61354E-18  5.86157E-18  4.36301E-18
 19.700  2.50231E-18  5.18199E-18  5.79973E-18  5.20634E-18  3.93424E-18  1.67109E-18  3.44891E-18  3.83222E-18  3.40685E-18  2.54722E-18
 19.800  1.44244E-18  2.98894E-18  3.35018E-18  3.01496E-18  2.28725E-18  9.60905E-19  1.98477E-18  2.20946E-18  1.97009E-18  1.47947E-18
 19.900  8.27307E-19  1.71533E-18  1.92545E-18  1.73710E-18  1.32294E-18  5.49811E-19  1.13653E-18  1.26750E-18  1.13350E-18  8.54903E-19
  67 184 200   0.100
  0.000  6.18517E-02 -3.33591E-16 -4.68375E-16 -5.00371E-16 -9.15513E-16  9.09359E-02 -5.12023E-16 -6.45317E-16 -8.13102E-16 -2.40322E-15
  0.100  6.18155E-02  4.37862E-05 -7.08391E-09 -5.00670E-12  1.11578E-15  9.10329E-02 -7.19056E-05  2.94524E-08  5.30040E-12 -1.35897E-15
  0.200  6.17088E-02  1.72623E-04 -1.11150E-07 -3.19244E-10  3.78393E-13  9.13189E-02 -2.83077E-04  4.64096E-07  3.40983E-10 -1.64236E-12
  0.300  6.15372E-02  3.79077E-04 -5.44517E-07 -3.61442E-09  9.64242E-12  9.17789E-02 -6.20170E-04  2.29026E-06  3.91843E-09 -4.16958E-11
  0.400  6.13098E-02  6.51201E-04 -1.64256E-06 -2.01348E-08  9.53897E-11  9.23893E-02 -1.06189E-03  6.98309E-06  2.22666E-08 -4.09720E-10
  0.500  6.10385E-02  9.73170E-04 -3.77255E-06 -7.59535E-08  5.61341E-10  9.31186E-02 -1.58034E-03  1.62749E-05  8.60389E-08 -2.39141E-09
  0.600  6.07374E-02  1.32612E-03 -7.24638E-06 -2.23662E-07  2.37585E-09  9.39302E-02 -2.14281E-03  3.18711E-05  2.60359E-07 -1.00221E-08
  0.700  6.04223E-02  1.68917E-03 -1.22279E-05 -5.54614E-07  8.00218E-09  9.47835E-02 -2.71381E-03  5.51479E-05  6.64924E-07 -3.33703E-08
  0.800  6.01090E-02  2.04051E-03 -1.86469E-05 -1.21159E-06  2.27822E-08  9.56375E-02 -3.25730E-03  8.68682E-05  1.49795E-06 -9.37769E-08
  0.900  5.98134E-02  2.35861E-03 -2.61299E-05 -2.40056E-06  5.69982E-08  9.64520E-02 -3.73894E-03  1.26951E-04  3.06190E-06 -2.31254E-07
  1.000  5.95500E-02  2.62333E-03 -3.39595E-05 -4.40005E-06  1.28681E-07  9.71908E-02 -4.12819E-03  1.74319E-04  5.78774E-06 -5.13924E-07
  1.100  5.93311E-02  2.81702E-03 -4.10668E-05 -7.56657E-06  2.67149E-07  9.78229E-02 -4.40014E-03  2.26854E-04  1.02534E-05 -1.04898E-06
  1.200  5.91663E-02  2.92550E-03 -4.60624E-05 -1.23347E-05  5.17138E-07  9.83246E-02 -4.53703E-03  2.81448E-04  1.71917E-05 -1.99428E-06
  1.300  5.90621E-02  2.93873E-03 -4.73040E-05 -1.92108E-05  9.43289E-07  9.86803E-02 -4.52920E-03  3.34178E-04  2.74825E-05 -3.56927E-06
  1.400  5.90212E-02  2.85144E-03 -4.29974E-05 -2.87588E-05  1.63458E-06  9.88834E-02 -4.37562E-03  3.80557E-04  4.21254E-05 -6.06384E-06
  1.500  5.90428E-02  2.66334E-03 -3.13215E-05 -4.15793E-05  2.70823E-06  9.89358E-02 -4.08386E-03  4.15865E-04  6.21914E-05 -9.84339E-06
  1.600  5.91224E-02  2.37914E-03 -1.05692E-05 -5.82802E-05  4.31245E-06  9.88478E-02 -3.66945E-03  4.35516E-04  8.87516E-05 -1.53488E-05
  1.700  5.92522E-02  2.00830E-03  2.07107E-05 -7.94426E-05  6.62744E-06  9.86368E-02 -3.15493E-03  4.35438E-04  1.22788E-04 -2.30897E-05
  1.800  5.94217E-02  1.56449E-03  6.35802E-05 -1.05581E-04  9.86403E-06  9.83260E-02 -2.56831E-03  4.12426E-04  1.65091E-04 -3.36312E-05
  1.900  5.96186E-02  1.06485E-03  1.18599E-04 -1.37101E-04  1.42595E-05  9.79429E-02 -1.94134E-03  3.64446E-04  2.16151E-04 -4.75721E-05
  2.000  5.98288E-02  5.29107E-04  1.85745E-04 -1.74261E-04  2.00700E-05  9.75167E-02 -1.30754E-03  2.90865E-04  2.76053E-04 -6.55170E-05
  2.100  6.00383E-02 -2.14881E-05  2.64360E-04 -2.17131E-04  2.75605E-05  9.70772E-02 -7.00162E-04  1.92582E-04  3.44388E-04 -8.80414E-05
  2.200  6.02332E-02 -5.65234E-04  3.53148E-04 -2.65566E-04  3.69905E-05  9.66521E-02 -1.50236E-04  7.20616E-05  4.20192E-04 -1.15652E-04
  2.300  6.04009E-02 -1.08108E-03  4.50199E-04 -3.19181E-04  4.85986E-05  9.62659E-02  3.15272E-04 -6.67453E-05  5.01908E-04 -1.48746E-04
  2.400  6.05307E-02 -1.54965E-03  5.53051E-04 -3.77343E-04  6.25850E-05  9.59382E-02  6.74970E-04 -2.18577E-04  5.87401E-04 -1.87564E-04
  2.500  6.06144E-02 -1.95418E-03  6.58778E-04 -4.39170E-04  7.90940E-05  9.56826E-02  9.14192E-04 -3.77135E-04  6.74006E-04 -2.32154E-04
  2.600  6.06468E-02 -2.28126E-03  7.64096E-04 -5.03552E-04  9.81977E-05  9.55062E-02  1.02573E-03 -5.35435E-04  7.58622E-04 -2.82328E-04
  2.700  6.06257E-02 -2.52142E-03  8.65484E-04 -5.69173E-04  1.19882E-04  9.54093E-02  1.01005E-03 -6.86213E-04  8.37837E-04 -3.37633E-04
  2.800  6.05519E-02 -2.66951E-03  9.59306E-04 -6.34553E-04  1.44038E-04  9.53859E-02  8.75064E-04 -8.22377E-04  9.08093E-04 -3.97329E-04
  2.900  6.04294E-02 -2.72485E-03  1.04193E-03 -6.98093E-04  1.70457E-04  9.54241E-02  6.35408E-04 -9.37460E-04  9.65864E-04 -4.60373E-04
  3.000  6.02644E-02 -2.69122E-03  1.10985E-03 -7.58132E-04  1.98830E-04  9.55073E-02  3.11266E-04 -1.02607E-03  1.00784E-03 -5.25422E-04
  3.100  6.00654E-02 -2.57656E-03  1.15976E-03 -8.12995E-04  2.28762E-04  9.56156E-02 -7.31256E-05 -1.08429E-03  1.03112E-03 -5.90842E-04
  3.200  5.98421E-02 -2.39264E-03  1.18871E-03 -8.61054E-04  2.59779E-04  9.57269E-02 -4.91246E-04 -1.11003E-03  1.03339E-03 -6.54737E-04
  3.300  5.96049E-02 -2.15447E-03  1.19412E-03 -9.00770E-04  2.91352E-04  9.58190E-02 -9.16216E-04 -1.10323E-03  1.01304E-03 -7.14998E-04
  3.400  5.93642E-02 -1.87969E-03  1.17393E-03 -9.30741E-04  3.22918E-04  9.58705E-02 -1.32274E-03 -1.06605E-03  9.69344E-04 -7.69354E-04
  3.500  5.91295E-02 -1.58783E-03  1.12663E-03 -9.49731E-04  3.53904E-04  9.58627E-02 -1.68897E-03 -1.00278E-03  9.02494E-04 -8.15456E-04
  3.600  5.89087E-02 -1.29950E-03  1.05135E-03 -9.56697E-04  3.83754E-04  9.57801E-02 -1.99806E-03 -9.19775E-04  8.13675E-04 -8.50963E-04
  3.700  5.87075E-02 -1.03563E-03  9.47954E-04 -9.50806E-04  4.11945E-04  9.56114E-02 -2.23952E-03 -8.25081E-04  7.05059E-04 -8.73642E-04
  3.800  5.85288E-02 -8.16661E-04  8.17071E-04 -9.31440E-04  4.38011E-04  9.53499E-02 -2.41000E-03 -7.28033E-04  5.79777E-04 -8.81486E-04
  3.900  5.83726E-02 -6.61741E-04  6.60176E-04 -8.98206E-04  4.61549E-04  9.49933E-02 -2.51361E-03 -6.38680E-04  4.41838E-04 -8.72819E-04
  4.000  5.82354E-02 -5.87994E-04  4.79623E-04 -8.50937E-04  4.82227E-04  9.45429E-02 -2.56178E-03 -5.67138E-04  2.96010E-04 -8.46415E-04
  4.100  5.81100E-02 -6.09829E-04  2.78660E-04 -7.89693E-04  4.99778E-04  9.40035E-02 -2.57246E-03 -5.22892E-04  1.47665E-04 -8.01593E-04
  4.200  5.79860E-02 -7.38336E-04  6.14133E-05 -7.14772E-04  5.13998E-04  9.33816E-02 -2.56890E-03 -5.14100E-04  2.58135E-06 -7.38308E-04
  4.300  5.78498E-02 -9.80772E-04 -1.67171E-04 -6.26714E-04  5.24729E-04  9.26845E-02 -2.57802E-03 -5.46950E-04 -1.33280E-04 -6.57210E-04
  4.400  5.76848E-02 -1.34018E-03 -4.01435E-04 -5.26316E-04  5.31848E-04  9.19188E-02 -2.62845E-03 -6.25129E-04 -2.54030E-04 -5.59668E-04
  4.500  5.74724E-02 -1.81511E-03 -6.35164E-04 -4.14648E-04  5.35250E-04  9.10892E-02 -2.74837E-03 -7.49446E-04 -3.54120E-04 -4.47769E-04
  4.600  5.71920E-02 -2.39957E-03 -8.61793E-04 -2.93059E-04  5.34842E-04  9.01971E-02 -2.96342E-03 -9.17647E-04 -4.28615E-04 -3.24265E-04
  4.700  5.68225E-02 -3.08306E-03 -1.07466E-03 -1.63193E-04  5.30532E-04  8.92402E-02 -3.29461E-03 -1.12445E-03 -4.73457E-04 -1.92484E-04
  4.800  5.63424E-02 -3.85088E-03 -1.26726E-03 -2.69820E-05  5.22231E-04  8.82116E-02 -3.75668E-03 -1.36178E-03 -4.85703E-04 -5.61998E-05
  4.900  5.57314E-02 -4.68454E-03 -1.43360E-03  1.13368E-04  5.09862E-04  8.71000E-02 -4.35670E-03 -1.61928E-03 -4.63716E-04  8.05266E-05
  5.000  5.49706E-02 -5.56242E-03 -1.56843E-03  2.55408E-04  4.93372E-04  8.58899E-02 -5.09331E-03 -1.88490E-03 -4.07302E-04  2.13538E-04
  5.100  5.40441E-02 -6.46054E-03 -1.66756E-03  3.96494E-04  4.72749E-04  8.45626E-02 -5.95647E-03 -2.14566E-03 -3.17771E-04  3.38777E-04
  5.200  5.29390E-02 -7.35351E-03 -1.72808E-03  5.33862E-04  4.48049E-04  8.30969E-02 -6.92781E-03 -2.38855E-03 -1.97914E-04  4.52494E-04
  5.300  5.16467E-02 -8.21548E-03 -1.74852E-03  6.64707E-04  4.19416E-04  8.14711E-02 -7.98152E-03 -2.60130E-03 -5.18963E-05  5.51426E-04
  5.400  5.01634E-02 -9.02125E-03 -1.72897E-03  7.86287E-04  3.87103E-04  7.96644E-02 -9.08579E-03 -2.77320E-03  1.14933E-04  6.32965E-04
  5.500  4.84902E-02 -9.74728E-03 -1.67104E-03  8.96031E-04  3.51484E-04  7.76583E-02 -1.02045E-02 -2.89571E-03  2.96308E-04  6.95275E-04
  5.600  4.66332E-02 -1.03727E-02 -1.57783E-03  9.91643E-04  3.13064E-04  7.54387E-02 -1.12994E-02 -2.96302E-03  4.85363E-04  7.37375E-04
  5.700  4.46039E-02 -1.08799E-02 -1.45374E-03  1.07121E-03  2.72473E-04  7.29966E-02 -1.23322E-02 -2.97224E-03  6.74996E-04  7.59157E-04
  5.800  4.24188E-02 -1.12559E-02 -1.30421E-03  1.13328E-03  2.30453E-04  7.03301E-02 -1.32664E-02 -2.92354E-03  8.58232E-04  7.61359E-04
  5.900  4.00987E-02 -1.14918E-02 -1.13547E-03  1.17693E-03  1.87833E-04  6.74444E-02 -1.40696E-02 -2.81997E-03  1.02858E-03  7.45489E-04
  6.000  3.76683E-02 -1.15839E-02 -9.54178E-04  1.20182E-03  1.45494E-04  6.43523E-02 -1.47150E-02 -2.66713E-03  1.18037E-03  7.13701E-04
  6.100  3.51554E-02 -1.15333E-02 -7.67063E-04  1.20819E-03  1.04335E-04  6.10740E-02 -1.51825E-02 -2.47269E-03  1.30895E-03  6.68641E-04
  6.200  3.25896E-02 -1.13456E-02 -5.80627E-04  1.19684E-03  6.52242E-05  5.76368E-02 -1.54592E-02 -2.24582E-03  1.41094E-03  6.13276E-04
  6.300  3.00018E-02 -1.10307E-02 -4.00820E-04  1.16908E-03  2.89589E-05  5.40737E-02 -1.55404E-02 -1.99650E-03  1.48428E-03  5.50710E-04
  6.400  2.74230E-02 -1.06021E-02 -2.32801E-04  1.12667E-03 -3.77267E-06  5.04224E-02 -1.54287E-02 -1.73492E-03  1.52827E-03  4.84013E-04
  6.500  2.48832E-02 -1.00758E-02 -8.07502E-05  1.07171E-03 -3.24244E-05  4.67235E-02 -1.51337E-02 -1.47089E-03  1.54348E-03  4.16062E-04
  6.600  2.24105E-02 -9.47001E-03  5.22426E-05  1.00654E-03 -5.66155E-05  4.30192E-02 -1.46711E-02 -1.21330E-03  1.53161E-03  3.49414E-04
  6.700  2.00303E-02 -8.80391E-03  1.64215E-04  9.33627E-04 -7.61423E-05  3.93515E-02 -1.40615E-02 -9.69752E-04  1.49531E-03  2.86212E-04
  6.800  1.77645E-02 -8.09685E-03  2.54306E-04  8.55455E-04 -9.09800E-05  3.57606E-02 -1.33288E-02 -7.46290E-04  1.43792E-03  2.28123E-04
  6.900  1.56316E-02 -7.36764E-03  3.22662E-04  7.74423E-04 -1.01273E-04  3.22834E-02 -1.24992E-02 -5.47273E-04  1.36326E-03  1.76323E-04
  7.000  1.36455E-02 -6.63381E-03  3.70304E-04  6.92749E-04 -1.07315E-04  2.89529E-02 -1.15995E-02 -3.75364E-04  1.27538E-03  1.31500E-04
  7.100  1.18162E-02 -5.91108E-03  3.98954E-04  6.12410E-04 -1.09524E-04  2.57964E-02 -1.06563E-02 -2.31638E-04  1.17829E-03  9.39032E-05
  7.200  1.01492E-02 -5.21297E-03  4.10854E-04  5.35079E-04 -1.08410E-04  2.28360E-02 -9.69423E-03 -1.15763E-04  1.07582E-03  6.34000E-05
  7.300  8.64639E-03 -4.55052E-03  4.08571E-04  4.62106E-04 -1.04540E-04  2.00875E-02 -8.73583E-03 -2.62494E-05  9.71429E-04  3.95516E-05
  7.400  7.30578E-03 -3.93224E-03  3.94820E-04  3.94500E-04 -9.85061E-05  1.75610E-02 -7.80052E-03  3.92727E-05  8.68123E-04  2.16958E-05
  7.500  6.12242E-03 -3.36408E-03  3.72307E-04  3.32943E-04 -9.08937E-05  1.52606E-02 -6.90436E-03  8.37711E-05  7.68364E-04  9.02717E-06
  7.600  5.08874E-03 -2.84966E-03  3.43594E-04  2.77810E-04 -8.22542E-05  1.31857E-02 -6.05988E-03  1.10541E-04  6.74062E-04  6.72373E-07
  7.700  4.19512E-03 -2.39041E-03  3.11002E-04  2.29207E-04 -7.30845E-05  1.13310E-02 -5.27614E-03  1.22967E-04  5.86580E-04 -4.24616E-06
  7.800  3.43050E-03 -1.98595E-03  2.76540E-04  1.87010E-04 -6.38116E-05  9.68734E-03 -4.55896E-03  1.24323E-04  5.06782E-04 -6.55894E-06
  7.900  2.78289E-03 -1.63438E-03  2.41869E-04  1.50916E-04 -5.47843E-05  8.24284E-03 -3.91122E-03  1.17627E-04  4.35086E-04 -7.01252E-06
  8.000  2.23990E-03 -1.33263E-03  2.08296E-04  1.20485E-04 -4.62705E-05  6.98335E-03 -3.33329E-03  1.05533E-04  3.71542E-04 -6.24630E-06
  8.100  1.78914E-03 -1.07682E-03  1.76779E-04  9.51896E-05 -3.84595E-05  5.89336E-03 -2.82348E-03  9.02778E-05  3.15909E-04 -4.78191E-06
  8.200  1.41859E-03 -8.62523E-04  1.47963E-04  7.44514E-05 -3.14688E-05  4.95665E-03 -2.37852E-03  7.36587E-05  2.67732E-04 -3.02283E-06
  8.300  1.11689E-03 -6.85067E-04  1.22221E-04  5.76774E-05 -2.53535E-05  4.15687E-03 -1.99398E-03  5.70486E-05  2.26409E-04 -1.26212E-06
  8.400  8.73549E-04 -5.39760E-04  9.96956E-05  4.42873E-05 -2.01172E-05  3.47807E-03 -1.66468E-03  4.14302E-05  1.91259E-04  3.04544E-07
  8.500  6.79057E-04 -4.22058E-04  8.03548E-05  3.37337E-05 -1.57239E-05  2.90502E-03 -1.38505E-03  2.74461E-05  1.61566E-04  1.56270E-06
  8.600  5.24966E-04 -3.27708E-04  6.40355E-05  2.55174E-05 -1.21095E-05  2.42352E-03 -1.14940E-03  1.54575E-05  1.36622E-04  2.46194E-06
  8.700  4.03902E-04 -2.52826E-04  5.04867E-05  1.91950E-05 -9.19202E-06  2.02057E-03 -9.52186E-04  5.60335E-06  1.15754E-04  2.99919E-06
  8.800  3.09533E-04 -1.93954E-04  3.94068E-05  1.43831E-05 -6.88058E-06  1.68449E-03 -7.88123E-04 -2.14280E-06  9.83420E-05  3.20377E-06
  8.900  2.36508E-04 -1.48080E-04  3.04726E-05  1.07575E-05 -5.08270E-06  1.40490E-03 -6.52343E-04 -7.92194E-06  8.38310E-05  3.12464E-06
  9.000  1.80373E-04 -1.12627E-04  2.33624E-05  8.05016E-06 -3.70959E-06  1.17274E-03 -5.40447E-04 -1.19468E-05  7.17338E-05  2.82030E-06
  9.100  1.37471E-04 -8.54309E-05  1.77719E-05  6.04401E-06 -2.67984E-06  9.80162E-04 -4.48531E-04 -1.44676E-05  6.16308E-05  2.35127E-06
  9.200  1.04843E-04 -6.47073E-05  1.34247E-05  4.56661E-06 -1.92165E-06  8.20482E-04 -3.73193E-04 -1.57455E-05  5.31663E-05  1.77489E-06
  9.300  8.01234E-05 -4.90050E-05  1.00778E-05  3.48345E-06 -1.37374E-06  6.88029E-04 -3.11511E-04 -1.60344E-05  4.60428E-05  1.14205E-06
  9.400  6.14447E-05 -3.71620E-05  7.52348E-06  2.69140E-06 -9.85351E-07  5.78048E-04 -2.61007E-04 -1.55689E-05  4.00139E-05  4.95576E-07
  9.500  4.73491E-05 -2.82604E-05  5.58862E-06  2.11258E-06 -7.15565E-07  4.86578E-04 -2.19602E-04 -1.45566E-05  3.48783E-05 -1.30355E-07
  9.600  3.67111E-05 -2.15840E-05  4.13205E-06  1.68899E-06 -5.32209E-07  4.10341E-04 -1.85576E-04 -1.31756E-05  3.04722E-05 -7.09922E-07
  9.700  2.86693E-05 -1.65805E-05  3.04093E-06  1.37788E-06 -4.10571E-07  3.46639E-04 -1.57512E-04 -1.15740E-05  2.66639E-05 -1.22494E-06
  9.800  2.25709E-05 -1.28282E-05  2.22661E-06  1.14802E-06 -3.32068E-07  2.93260E-04 -1.34257E-04 -9.87109E-06  2.33481E-05 -1.66390E-06
  9.900  1.79241E-05 -1.00081E-05  1.62057E-06  9.76656E-07 -2.82994E-07  2.48396E-04 -1.14880E-04 -8.16011E-06  2.04414E-05 -2.02088E-06
 10.000  1.43612E-05 -7.88052E-06  1.17055E-06  8.47290E-07 -2.53416E-07  2.10574E-04 -9.86325E-05 -6.51129E-06  1.78777E-05 -2.29452E-06
 10.100  1.16083E-05 -6.26689E-06  8.37120E-07  7.47900E-07 -2.36241E-07  1.78594E-04 -8.49157E-05 -4.97504E-06  1.56053E-05 -2.48708E-06
 10.200  9.46222E-06 -5.03455E-06  5.90782E-07  6.69716E-07 -2.26478E-07  1.51477E-04 -7.32555E-05 -3.58508E-06  1.35840E-05 -2.60354E-06
 10.300  7.77269E-06 -4.08540E-06  4.09577E-07  6.06332E-07 -2.20665E-07  1.28427E-04 -6.32764E-05 -2.36139E-06  1.17819E-05 -2.65090E-06
 10.400  6.42850E-06 -3.34712E-06  2.77184E-07  5.53077E-07 -2.16442E-07  1.08794E-04 -5.46825E-05 -1.31281E-06  1.01744E-05 -2.63747E-06
 10.500  5.34743E-06 -2.76644E-06  1.81449E-07  5.06585E-07 -2.12250E-07  9.20434E-05 -4.72406E-05 -4.39418E-07  8.74170E-06 -2.57237E-06
 10.600  4.46863E-06 -2.30419E-06  1.13274E-07  4.64484E-07 -2.07107E-07  7.77377E-05 -4.07674E-05  2.65413E-07  7.46763E-06 -2.46501E-06
 10.700  3.74691E-06 -1.93157E-06  6.57961E-08  4.25171E-07 -2.00460E-07  6.55141E-05 -3.51176E-05  8.13220E-07  6.33873E-06 -2.32473E-06
 10.800  3.14865E-06 -1.62742E-06  3.37909E-08  3.87644E-07 -1.92071E-07  5.50710E-05 -3.01762E-05  1.21891E-06  5.34325E-06 -2.16043E-06
 10.900  2.64868E-06 -1.37615E-06  1.32484E-08  3.51356E-07 -1.81942E-07  4.61559E-05 -2.58502E-05  1.49942E-06  4.47051E-06 -1.98036E-06
 11.000  2.22805E-06 -1.16629E-06  1.07015E-09  3.16102E-07 -1.70242E-07  3.85557E-05 -2.20643E-05  1.67265E-06  3.71055E-06 -1.79190E-06
 11.100  1.87235E-06 -9.89379E-07 -5.14450E-09  2.81917E-07 -1.57260E-07  3.20893E-05 -1.87556E-05  1.75654E-06  3.05377E-06 -1.60144E-06
 11.200  1.57051E-06 -8.39106E-07 -7.25192E-09  2.48991E-07 -1.43358E-07  2.66014E-05 -1.58710E-05  1.76836E-06  2.49081E-06 -1.41431E-06
 11.300  1.31389E-06 -7.10754E-07 -6.67655E-09  2.17593E-07 -1.28931E-07  2.19583E-05 -1.33645E-05  1.72416E-06  2.01253E-06 -1.23477E-06
 11.400  1.09562E-06 -6.00739E-07 -4.49572E-09  1.88017E-07 -1.14373E-07  1.80439E-05 -1.11954E-05  1.63845E-06  1.60999E-06 -1.06605E-06
 11.500  9.10150E-07 -5.06284E-07 -1.50609E-09  1.60533E-07 -1.00053E-07  1.47571E-05 -9.32714E-06  1.52393E-06  1.27452E-06 -9.10401E-07
 11.600  7.52880E-07 -4.25193E-07  1.72234E-09  1.35360E-07 -8.62947E-08  1.20093E-05 -7.72654E-06  1.39139E-06  9.97813E-07 -7.69217E-07
 11.700  6.19938E-07 -3.55677E-07  4.80116E-09  1.12648E-07 -7.33619E-08  9.72305E-06 -6.36310E-06  1.24973E-06  7.72025E-07 -6.43139E-07
 11.800  5.08001E-07 -2.96243E-07  7.48530E-09  9.24667E-08 -6.14535E-08  7.83049E-06 -5.20877E-06  1.10604E-06  5.89840E-07 -5.32189E-07
 11.900  4.14182E-07 -2.45611E-07  9.64026E-09  7.48115E-08 -5.07023E-08  6.27214E-06 -4.23771E-06  9.65730E-07  4.44552E-07 -4.35897E-07
 12.000  3.35947E-07 -2.02663E-07  1.12142E-08  5.96068E-08 -4.11781E-08  4.99612E-06 -3.42623E-06  8.32722E-07  3.30100E-07 -3.53428E-07
 12.100  2.71063E-07 -1.66411E-07  1.22145E-08  4.67191E-08 -3.28955E-08  3.95727E-06 -2.75269E-06  7.09667E-07  2.41096E-07 -2.83691E-07
 12.200  2.17558E-07 -1.35968E-07  1.26882E-08  3.59708E-08 -2.58223E-08  3.11651E-06 -2.19752E-06  5.98147E-07  1.72824E-07 -2.25443E-07
 12.300  1.73695E-07 -1.10542E-07  1.27068E-08  2.71541E-08 -1.98901E-08  2.44018E-06 -1.74311E-06  4.98885E-07  1.21216E-07 -1.77371E-07
 12.400  1.37949E-07 -8.94250E-08  1.23534E-08  2.00450E-08 -1.50045E-08  1.89947E-06 -1.37380E-06  4.11943E-07  8.28204E-08 -1.38160E-07
 12.500  1.08993E-07 -7.19840E-08  1.17141E-08  1.44146E-08 -1.10550E-08  1.46987E-06 -1.07578E-06  3.36896E-07  5.47524E-08 -1.06541E-07
 12.600  8.56748E-08 -5.76598E-08  1.08711E-08  1.00397E-08 -7.92303E-09  1.13071E-06 -8.37006E-07  2.72978E-07  3.46360E-08 -8.13309E-08
 12.700  6.70069E-08 -4.59604E-08  9.89860E-09  6.70989E-09 -5.48928E-09  8.64638E-07 -6.47047E-07  2.19214E-07  2.05455E-08 -6.14551E-08
 12.800  5.21476E-08 -3.64570E-08  8.86025E-09  4.23326E-09 -3.63912E-09  6.57241E-07 -4.96997E-07  1.74516E-07  1.09439E-08 -4.59578E-08
 12.900  4.03864E-08 -2.87789E-08  7.80810E-09  2.43920E-09 -2.26639E-09  4.96614E-07 -3.79308E-07  1.37765E-07  4.62444E-09 -3.40076E-08
 13.000  3.11285E-08 -2.26085E-08  6.78260E-09  1.18000E-09 -1.27595E-09  3.73006E-07 -2.87647E-07  1.07863E-07  6.54480E-10 -2.48942E-08
 13.100  2.38799E-08 -1.76755E-08  5.81333E-09  3.30775E-10 -5.84894E-10  2.78495E-07 -2.16756E-07  8.37768E-08 -1.67385E-09 -1.80214E-08
 13.200  1.82343E-08 -1.37521E-08  4.92021E-09 -2.11667E-10 -1.22885E-10  2.06694E-07 -1.62307E-07  6.45611E-08 -2.88817E-09 -1.28963E-08
 13.300  1.38596E-08 -1.06477E-08  4.11499E-09 -5.30682E-10  1.68290E-10  1.52493E-07 -1.20775E-07  4.93726E-08 -3.37385E-09 -9.11797E-09
 13.400  1.04865E-08 -8.20373E-09  3.40273E-09 -6.92069E-10  3.35650E-10  1.11839E-07 -8.93112E-08  3.74746E-08 -3.40616E-09 -6.36500E-09
 13.500  7.89835E-09 -6.28954E-09  2.78341E-09 -7.46552E-10  4.16256E-10  8.15397E-08 -6.56355E-08  2.82348E-08 -3.17665E-09 -4.38316E-09
 13.600  5.92211E-09 -4.79791E-09  2.25321E-09 -7.32248E-10  4.38595E-10  5.90993E-08 -4.79395E-08  2.11196E-08 -2.81455E-09 -2.97421E-09
 13.700  4.42024E-09 -3.64151E-09  1.80577E-09 -6.77009E-10  4.23980E-10  4.25839E-08 -3.48007E-08  1.56853E-08 -2.40364E-09 -1.98561E-09
 13.800  3.28423E-09 -2.74963E-09  1.43318E-09 -6.00534E-10  3.87894E-10  3.05048E-08 -2.51096E-08  1.15679E-08 -1.99543E-09 -1.30156E-09
 13.900  2.42900E-09 -2.06538E-09  1.12680E-09 -5.16214E-10  3.41197E-10  2.17253E-08 -1.80080E-08  8.47268E-09 -1.61901E-09 -8.35276E-10
 14.000  1.78815E-09 -1.54320E-09  8.77829E-10 -4.32688E-10  2.91191E-10  1.53832E-08 -1.28376E-08  6.16354E-09 -1.28855E-09 -5.22617E-10
 14.100  1.31021E-09 -1.14684E-09  6.77788E-10 -3.55121E-10  2.42511E-10  1.08299E-08 -9.09734E-09  4.45374E-09 -1.00859E-09 -3.16779E-10
 14.200  9.55462E-10 -8.47648E-10  5.18788E-10 -2.86219E-10  1.97857E-10  7.58073E-09 -6.40874E-09  3.19700E-09 -7.77903E-10 -1.84092E-10
 14.300  6.93405E-10 -6.23047E-10  3.93715E-10 -2.27021E-10  1.58575E-10  5.27621E-09 -4.48824E-09  2.27992E-09 -5.92056E-10 -1.00670E-10
 14.400  5.00762E-10 -4.55395E-10  2.96309E-10 -1.77491E-10  1.25100E-10  3.65149E-09 -3.12494E-09  1.61544E-09 -4.45164E-10 -4.98201E-11
 14.500  3.59844E-10 -3.30970E-10  2.21183E-10 -1.36953E-10  9.72957E-11  2.51285E-09 -2.16315E-09  1.13733E-09 -3.30969E-10 -2.00566E-11
 14.600  2.57277E-10 -2.39163E-10  1.63782E-10 -1.04396E-10  7.46897E-11  1.71960E-09 -1.48877E-09  7.95673E-10 -2.43491E-10 -3.61091E-12
 14.700  1.83003E-10 -1.71822E-10  1.20323E-10 -7.86781E-11  5.66469E-11  1.17020E-09 -1.01878E-09  5.53182E-10 -1.77365E-10  4.67486E-12
 14.800  1.29496E-10 -1.22721E-10  8.77110E-11 -5.86642E-11  4.24792E-11  7.91926E-10 -6.93205E-10  3.82219E-10 -1.27985E-10  8.15358E-12
 14.900  9.11503E-11 -8.71355E-11  6.34506E-11 -4.32991E-11  3.15168E-11  5.32978E-10 -4.69014E-10  2.62478E-10 -9.15264E-11  8.95189E-12
 15.000  6.38173E-11 -6.15021E-11  4.55557E-11 -3.16498E-11  2.31476E-11  3.56737E-10 -3.15549E-10  1.79157E-10 -6.48906E-11  8.37900E-12
 15.100  4.44394E-11 -4.31507E-11  3.24653E-11 -2.29205E-11  1.68371E-11  2.37472E-10 -2.11116E-10  1.21552E-10 -4.56251E-11  7.21064E-12
 15.200  3.07767E-11 -3.00938E-11  2.29674E-11 -1.64507E-11  1.21337E-11  1.57222E-10 -1.40462E-10  8.19770E-11 -3.18222E-11  5.88281E-12
 15.300  2.11970E-11 -2.08615E-11  1.61309E-11 -1.17054E-11  8.66631E-12  1.03530E-10 -9.29393E-11  5.49604E-11 -2.20225E-11  4.62145E-12
 15.400  1.45179E-11 -1.43743E-11  1.12486E-11 -8.25917E-12  6.13646E-12  6.78079E-11 -6.11578E-11  3.66315E-11 -1.51252E-11  3.52743E-12
 15.500  9.88768E-12 -9.84445E-12  7.78880E-12 -5.78018E-12  4.30882E-12  4.41739E-11 -4.00248E-11  2.42731E-11 -1.03114E-11  2.63080E-12
 15.600  6.69616E-12 -6.70130E-12  5.35558E-12 -4.01320E-12  3.00092E-12  2.86243E-11 -2.60523E-11  1.59912E-11 -6.97898E-12  1.92453E-12
 15.700  4.50903E-12 -4.53404E-12  3.65714E-12 -2.76479E-12  2.07347E-12  1.84501E-11 -1.68659E-11  1.04746E-11 -4.69014E-12  1.38464E-12
 15.800  3.01895E-12 -3.04909E-12  2.48031E-12 -1.89031E-12  1.42157E-12  1.18295E-11 -1.08602E-11  6.82196E-12 -3.13011E-12  9.81711E-13
 15.900  2.00970E-12 -2.03805E-12  1.67082E-12 -1.28282E-12  9.67251E-13  7.54478E-12 -6.95561E-12  4.41789E-12 -2.07476E-12  6.86931E-13
 16.000  1.33015E-12 -1.35400E-12  1.11800E-12 -8.64213E-13  6.53245E-13  4.78686E-12 -4.43114E-12  2.84491E-12 -1.36603E-12  4.74929E-13
 16.100  8.75304E-13 -8.94102E-13  7.43140E-13 -5.78036E-13  4.37966E-13  3.02126E-12 -2.80795E-12  1.82174E-12 -8.93473E-13  3.24735E-13
 16.200  5.72663E-13 -5.86846E-13  4.90729E-13 -3.83900E-13  2.91532E-13  1.89699E-12 -1.76996E-12  1.16005E-12 -5.80594E-13  2.19753E-13
 16.300  3.72493E-13 -3.82855E-13  3.21944E-13 -2.53196E-13  1.92693E-13  1.18493E-12 -1.10982E-12  7.34614E-13 -3.74862E-13  1.47270E-13
 16.400  2.40887E-13 -2.48270E-13  2.09851E-13 -1.65850E-13  1.26481E-13  7.36343E-13 -6.92243E-13  4.62638E-13 -2.40500E-13  9.77875E-14
 16.500  1.54876E-13 -1.60030E-13  1.35912E-13 -1.07902E-13  8.24537E-14  4.55231E-13 -4.29531E-13  2.89759E-13 -1.53333E-13  6.43619E-14
 16.600  9.89989E-14 -1.02535E-13  8.74665E-14 -6.97340E-14  5.33897E-14  2.79999E-13 -2.65136E-13  1.80492E-13 -9.71544E-14  4.20057E-14
 16.700  6.29149E-14 -6.53043E-14  5.59352E-14 -4.47702E-14  3.43405E-14  1.71342E-13 -1.62812E-13  1.11819E-13 -6.11822E-14  2.71929E-14
 16.800  3.97517E-14 -4.13450E-14  3.55474E-14 -2.85560E-14  2.19429E-14  1.04317E-13 -9.94620E-14  6.88995E-14 -3.82957E-14  1.74659E-14
 16.900  2.49712E-14 -2.60209E-14  2.24508E-14 -1.80968E-14  1.39299E-14  6.31893E-14 -6.04488E-14  4.22254E-14 -2.38266E-14  1.11331E-14
 17.000  1.55959E-14 -1.62798E-14  1.40920E-14 -1.13954E-14  8.78631E-15  3.80830E-14 -3.65498E-14  2.57394E-14 -1.47362E-14  7.04401E-15
 17.100  9.68435E-15 -1.01254E-14  8.79133E-15 -7.13028E-15  5.50673E-15  2.28362E-14 -2.19865E-14  1.56062E-14 -9.06027E-15  4.42471E-15
 17.200  5.97897E-15 -6.26069E-15  5.45119E-15 -4.43365E-15  3.42956E-15  1.36248E-14 -1.31585E-14  9.41193E-15 -5.53796E-15  2.75982E-15
 17.300  3.67015E-15 -3.84847E-15  3.35970E-15 -2.73979E-15  2.12259E-15  8.08823E-15 -7.83503E-15  5.64616E-15 -3.36536E-15  1.70952E-15
 17.400  2.24000E-15 -2.35190E-15  2.05826E-15 -1.68267E-15  1.30557E-15  4.77749E-15 -4.64159E-15  3.36920E-15 -2.03332E-15  1.05177E-15
 17.500  1.35933E-15 -1.42898E-15  1.25345E-15 -1.02713E-15  7.98119E-16  2.80785E-15 -2.73583E-15  1.99991E-15 -1.22149E-15  6.42795E-16
 17.600  8.20208E-16 -8.63214E-16  7.58816E-16 -6.23188E-16  4.84939E-16  1.64202E-15 -1.60441E-15  1.18089E-15 -7.29621E-16  3.90282E-16
 17.700  4.92096E-16 -5.18450E-16  4.56670E-16 -3.75837E-16  2.92874E-16  9.55481E-16 -9.36152E-16  6.93634E-16 -4.33359E-16  2.35441E-16
 17.800  2.93569E-16 -3.09599E-16  2.73226E-16 -2.25313E-16  1.75820E-16  5.53230E-16 -5.43488E-16  4.05305E-16 -2.55950E-16  1.41132E-16
 17.900  1.74146E-16 -1.83827E-16  1.62520E-16 -1.34276E-16  1.04923E-16  3.18739E-16 -3.13943E-16  2.35597E-16 -1.50326E-16  8.40697E-17
 18.000  1.02723E-16 -1.08528E-16  9.61107E-17 -7.95520E-17  6.22446E-17  1.82732E-16 -1.80439E-16  1.36239E-16 -8.78005E-17  4.97694E-17
 18.100  6.02528E-17 -6.37104E-17  5.65108E-17 -4.68557E-17  3.67099E-17  1.04243E-16 -1.03190E-16  7.83757E-17 -5.09986E-17  2.92837E-17
 18.200  3.51442E-17 -3.71898E-17  3.30368E-17 -2.74377E-17  2.15243E-17  5.91742E-17 -5.87181E-17  4.48558E-17 -2.94598E-17  1.71260E-17
 18.300  2.03846E-17 -2.15869E-17  1.92037E-17 -1.59744E-17  1.25475E-17  3.34257E-17 -3.32460E-17  2.55397E-17 -1.69248E-17  9.95599E-18
 18.400  1.17580E-17 -1.24601E-17  1.10995E-17 -9.24705E-18  7.27247E-18  1.87884E-17 -1.87303E-17  1.44671E-17 -9.67057E-18  5.75351E-18
 18.500  6.74458E-18 -7.15198E-18  6.37917E-18 -5.32233E-18  4.19100E-18  1.05091E-17 -1.05000E-17  8.15303E-18 -5.49573E-18  3.30541E-18
 18.600  3.84745E-18 -4.08238E-18  3.64571E-18 -3.04601E-18  2.40148E-18  5.84943E-18 -5.85705E-18  4.57125E-18 -3.10637E-18  1.88793E-18
 18.700  2.18271E-18 -2.31735E-18  2.07189E-18 -1.73344E-18  1.36830E-18  3.23990E-18 -3.25099E-18  2.54996E-18 -1.74641E-18  1.07210E-18
 18.800  1.23150E-18 -1.30819E-18  1.17093E-18 -9.80938E-19  7.75234E-19  1.78576E-18 -1.79557E-18  1.41521E-18 -9.76600E-19  6.05328E-19
 18.900  6.91023E-19 -7.34447E-19  6.58083E-19 -5.52008E-19  4.36768E-19  9.79475E-19 -9.86830E-19  7.81450E-19 -5.43214E-19  3.39839E-19
 19.000  3.85638E-19 -4.10079E-19  3.67816E-19 -3.08910E-19  2.44706E-19  5.34617E-19 -5.39684E-19  4.29319E-19 -3.00551E-19  1.89714E-19
 19.100  2.14045E-19 -2.27720E-19  2.04452E-19 -1.71914E-19  1.36342E-19  2.90386E-19 -2.93695E-19  2.34672E-19 -1.65413E-19  1.05314E-19
 19.200  1.18161E-19 -1.25769E-19  1.13024E-19 -9.51470E-20  7.55460E-20  1.56961E-19 -1.59043E-19  1.27629E-19 -9.05587E-20  5.81367E-20
 19.300  6.48778E-20 -6.90853E-20  6.21407E-20 -5.23714E-20  4.16300E-20  8.44296E-20 -8.57038E-20  6.90634E-20 -4.93186E-20  3.19158E-20
 19.400  3.54306E-20 -3.77443E-20  3.39799E-20 -2.86694E-20  2.28151E-20  4.51946E-20 -4.59571E-20  3.71846E-20 -2.67189E-20  1.74247E-20
 19.500  1.92454E-20 -2.05106E-20  1.84805E-20 -1.56092E-20  1.24357E-20  2.40752E-20 -2.45231E-20  1.99204E-20 -1.43999E-20  9.46117E-21
 19.600  1.03980E-20 -1.10859E-20  9.99685E-21 -8.45251E-21  6.74155E-21  1.27628E-20 -1.30218E-20  1.06184E-20 -7.72048E-21  5.10924E-21
 19.700  5.58802E-21 -5.95995E-21  5.37869E-21 -4.55246E-21  3.63497E-21  6.73317E-21 -6.88089E-21  5.63176E-21 -4.11791E-21  2.74418E-21
 19.800  2.98713E-21 -3.18711E-21  2.87848E-21 -2.43877E-21  1.94941E-21  3.53499E-21 -3.61822E-21  2.97210E-21 -2.18507E-21  1.46597E-21
 19.900  1.58835E-21 -1.69528E-21  1.53226E-21 -1.29948E-21  1.03986E-21  1.84696E-21 -1.89333E-21  1.56069E-21 -1.15350E-21  7.78941E-22
  67 185 200   0.100
  0.000  6.06206E-02 -3.10317E-16 -4.68375E-16 -6.25463E-16 -8.72599E-16  9.06400E-02 -4.96507E-16 -7.28584E-16 -6.37973E-16 -3.14708E-16
  0.100  6.05920E-02  4.51455E-05 -6.48777E-09 -4.88967E-12 -7.15245E-16  9.07314E-02 -7.11299E-05  2.33574E-08  1.05347E-11 -1.67367E-14
  0.200  6.05080E-02  1.78061E-04 -1.02246E-07 -3.11833E-10  3.52673E-13  9.10011E-02 -2.80174E-04  3.69264E-07  6.70298E-10 -8.47923E-13
  0.300  6.03731E-02  3.91305E-04 -5.04594E-07 -3.52930E-09  9.02343E-12  9.14360E-02 -6.14349E-04  1.83219E-06  7.56860E-09 -2.16982E-11
  0.400  6.01949E-02  6.72888E-04 -1.53797E-06 -1.96527E-08  8.92887E-11  9.20147E-02 -1.05318E-03  5.62844E-06  4.20062E-08 -2.16083E-10
  0.500  5.99834E-02  1.00686E-03 -3.58003E-06 -7.41072E-08  5.25713E-10  9.27092E-02 -1.56970E-03  1.32426E-05  1.57724E-07 -1.28214E-09
  0.600  5.97504E-02  1.37413E-03 -6.99167E-06 -2.18169E-07  2.22685E-09  9.34862E-02 -2.13204E-03  2.62282E-05  4.61905E-07 -5.48042E-09
  0.700  5.95089E-02  1.75338E-03 -1.20364E-05 -5.40969E-07  7.50909E-09  9.43086E-02 -2.70530E-03  4.59794E-05  1.13823E-06 -1.86664E-08
  0.800  5.92724E-02  2.12222E-03 -1.87957E-05 -1.18211E-06  2.14128E-08  9.51383E-02 -3.25364E-03  7.34915E-05  2.46935E-06 -5.38001E-08
  0.900  5.90540E-02  2.45832E-03 -2.70892E-05 -2.34378E-06  5.36868E-08  9.59377E-02 -3.74239E-03  1.09133E-04  4.85603E-06 -1.36387E-07
  1.000  5.88659E-02  2.74056E-03 -3.64066E-05 -4.30114E-06  1.21537E-07  9.66717E-02 -4.14017E-03  1.52457E-04  8.82994E-06 -3.12205E-07
  1.100  5.87182E-02  2.95022E-03 -4.58624E-05 -7.40972E-06  2.53172E-07  9.73102E-02 -4.42078E-03  2.02061E-04  1.50577E-05 -6.57482E-07
  1.200  5.86189E-02  3.07194E-03 -5.41798E-05 -1.21084E-05  4.92090E-07  9.78292E-02 -4.56477E-03  2.55541E-04  2.43334E-05 -1.29135E-06
  1.300  5.85730E-02  3.09466E-03 -5.97119E-05 -1.89168E-05  9.01933E-07  9.82122E-02 -4.56070E-03  3.09527E-04  3.75584E-05 -2.39003E-06
  1.400  5.85823E-02  3.01219E-03 -6.05025E-05 -2.84260E-05  1.57161E-06  9.84509E-02 -4.40579E-03  3.59831E-04  5.57066E-05 -4.20155E-06
  1.500  5.86453E-02  2.82361E-03 -5.43895E-05 -4.12810E-05  2.62024E-06  9.85454E-02 -4.10615E-03  4.01684E-04  7.97756E-05 -7.05958E-06
  1.600  5.87573E-02  2.53342E-03 -3.91457E-05 -5.81555E-05  4.20136E-06  9.85042E-02 -3.67636E-03  4.30082E-04  1.10724E-04 -1.13940E-05
  1.700  5.89108E-02  2.15124E-03 -1.26494E-05 -7.97181E-05  6.50564E-06  9.83428E-02 -3.13861E-03  4.40180E-04  1.49397E-04 -1.77363E-05
  1.800  5.90958E-02  1.69142E-03  2.69250E-05 -1.06590E-04  9.76139E-06  9.80830E-02 -2.52132E-03  4.27735E-04  1.96444E-04 -2.67160E-05
  1.900  5.93005E-02  1.17218E-03  8.09145E-05 -1.39300E-04  1.42321E-05  9.77506E-02 -1.85731E-03  3.89540E-04  2.52234E-04 -3.90479E-05
  2.000  5.95122E-02  6.14670E-04  1.49988E-04 -1.78229E-04  2.02102E-05  9.73744E-02 -1.18181E-03  3.23818E-04  3.16765E-04 -5.55058E-05
  2.100  5.97178E-02  4.18393E-05  2.33998E-04 -2.23560E-04  2.80070E-05  9.69832E-02 -5.30230E-04  2.30523E-04  3.89596E-04 -7.68839E-05
  2.200  5.99048E-02 -5.22847E-04  3.31883E-04 -2.75233E-04  3.79378E-05  9.66044E-02  6.40235E-05  1.11528E-04  4.69777E-04 -1.03945E-04
  2.300  6.00619E-02 -1.05664E-03  4.41623E-04 -3.32898E-04  5.03035E-05  9.62621E-02  5.71603E-04 -2.93467E-05  5.55817E-04 -1.37359E-04
  2.400  6.01798E-02 -1.53869E-03  5.60273E-04 -3.95892E-04  6.53690E-05  9.59755E-02  9.68973E-04 -1.86462E-04  6.45672E-04 -1.77630E-04
  2.500  6.02519E-02 -1.95114E-03  6.84058E-04 -4.63223E-04  8.33391E-05  9.57580E-02  1.23978E-03 -3.52653E-04  7.36774E-04 -2.25028E-04
  2.600  6.02741E-02 -2.27996E-03  8.08535E-04 -5.33578E-04  1.04335E-04  9.56160E-02  1.37569E-03 -5.19669E-04  8.26089E-04 -2.79514E-04
  2.700  6.02453E-02 -2.51560E-03  9.28812E-04 -6.05354E-04  1.28372E-04  9.55497E-02  1.37676E-03 -6.78730E-04  9.10228E-04 -3.40685E-04
  2.800  6.01676E-02 -2.65336E-03  1.03980E-03 -6.76700E-04  1.55340E-04  9.55525E-02  1.25113E-03 -8.21152E-04  9.85578E-04 -4.07727E-04
  2.900  6.00453E-02 -2.69349E-03  1.13647E-03 -7.45589E-04  1.84996E-04  9.56123E-02  1.01428E-03 -9.38998E-04  1.04848E-03 -4.79394E-04
  3.000  5.98855E-02 -2.64103E-03  1.21414E-03 -8.09899E-04  2.16954E-04  9.57125E-02  6.87720E-04 -1.02570E-03  1.09541E-03 -5.54016E-04
  3.100  5.96967E-02 -2.50547E-03  1.26872E-03 -8.67505E-04  2.50695E-04  9.58334E-02  2.97346E-04 -1.07661E-03  1.12320E-03 -6.29528E-04
  3.200  5.94885E-02 -2.30014E-03  1.29688E-03 -9.16373E-04  2.85583E-04  9.59535E-02 -1.28527E-04 -1.08938E-03  1.12922E-03 -7.03534E-04
  3.300  5.92711E-02 -2.04152E-03  1.29621E-03 -9.54650E-04  3.20882E-04  9.60514E-02 -5.61244E-04 -1.06425E-03  1.11158E-03 -7.73399E-04
  3.400  5.90541E-02 -1.74846E-03  1.26535E-03 -9.80750E-04  3.55799E-04  9.61071E-02 -9.73901E-04 -1.00411E-03  1.06927E-03 -8.36357E-04
  3.500  5.88464E-02 -1.44128E-03  1.20395E-03 -9.93409E-04  3.89512E-04  9.61031E-02 -1.34329E-03 -9.14352E-04  1.00232E-03 -8.89642E-04
  3.600  5.86548E-02 -1.14095E-03  1.11269E-03 -9.91739E-04  4.21219E-04  9.60252E-02 -1.65155E-03 -8.02627E-04  9.11821E-04 -9.30620E-04
  3.700  5.84843E-02 -8.68266E-04  9.93197E-04 -9.75239E-04  4.50172E-04  9.58636E-02 -1.88751E-03 -6.78333E-04  7.99967E-04 -9.56923E-04
  3.800  5.83368E-02 -6.43055E-04  8.47935E-04 -9.43802E-04  4.75718E-04  9.56126E-02 -2.04743E-03 -5.52048E-04  6.70022E-04 -9.66578E-04
  3.900  5.82114E-02 -4.83495E-04  6.80082E-04 -8.97684E-04  4.97324E-04  9.52707E-02 -2.13535E-03 -4.34844E-04  5.26214E-04 -9.58114E-04
  4.000  5.81038E-02 -4.05481E-04  4.93406E-04 -8.37471E-04  5.14603E-04  9.48397E-02 -2.16280E-03 -3.37564E-04  3.73585E-04 -9.30652E-04
  4.100  5.80064E-02 -4.22096E-04  2.92135E-04 -7.64028E-04  5.27317E-04  9.43244E-02 -2.14803E-03 -2.70106E-04  2.17797E-04 -8.83961E-04
  4.200  5.79084E-02 -5.43162E-04  8.08449E-05 -6.78444E-04  5.35377E-04  9.37310E-02 -2.11476E-03 -2.40745E-04  6.49006E-05 -8.18491E-04
  4.300  5.77961E-02 -7.74880E-04 -1.35642E-04 -5.81983E-04  5.38832E-04  9.30662E-02 -2.09046E-03 -2.55571E-04 -7.89319E-05 -7.35371E-04
  4.400  5.76528E-02 -1.11957E-03 -3.52351E-04 -4.76035E-04  5.37841E-04  9.23356E-02 -2.10446E-03 -3.18041E-04 -2.07681E-04 -6.36383E-04
  4.500  5.74600E-02 -1.57553E-03 -5.64243E-04 -3.62087E-04  5.32652E-04  9.15431E-02 -2.18581E-03 -4.28710E-04 -3.15761E-04 -5.23895E-04
  4.600  5.71976E-02 -2.13693E-03 -7.66302E-04 -2.41701E-04  5.23564E-04  9.06891E-02 -2.36115E-03 -5.85133E-04 -3.98293E-04 -4.00782E-04
  4.700  5.68446E-02 -2.79399E-03 -9.53632E-04 -1.16504E-04  5.10899E-04  8.97705E-02 -2.65272E-03 -7.81970E-04 -4.51345E-04 -2.70318E-04
  4.800  5.63799E-02 -3.53307E-03 -1.12158E-03  1.18059E-05  4.94975E-04  8.87796E-02 -3.07661E-03 -1.01127E-03 -4.72145E-04 -1.36051E-04
  4.900  5.57833E-02 -4.33715E-03 -1.26584E-03  1.41458E-04  4.76085E-04  8.77045E-02 -3.64144E-03 -1.26291E-03 -4.59238E-04 -1.66444E-06
  5.000  5.50362E-02 -5.18624E-03 -1.38266E-03  2.70600E-04  4.54490E-04  8.65294E-02 -4.34748E-03 -1.52523E-03 -4.12579E-04  1.29162E-04
  5.100  5.41227E-02 -6.05809E-03 -1.46891E-03  3.97295E-04  4.30413E-04  8.52350E-02 -5.18632E-03 -1.78570E-03 -3.33564E-04  2.52904E-04
  5.200  5.30298E-02 -6.92892E-03 -1.52233E-03  5.19540E-04  4.04048E-04  8.38001E-02 -6.14112E-03 -2.03170E-03 -2.24981E-04  3.66326E-04
  5.300  5.17490E-02 -7.77434E-03 -1.54160E-03  6.35287E-04  3.75578E-04  8.22026E-02 -7.18742E-03 -2.25122E-03 -9.08882E-05  4.66615E-04
  5.400  5.02758E-02 -8.57026E-03 -1.52651E-03  7.42493E-04  3.45192E-04  8.04211E-02 -8.29442E-03 -2.43367E-03  6.35758E-05  5.51489E-04
  5.500  4.86112E-02 -9.29385E-03 -1.47799E-03  8.39178E-04  3.13109E-04  7.84369E-02 -9.42663E-03 -2.57038E-03  2.32444E-04  6.19281E-04
  5.600  4.67611E-02 -9.92451E-03 -1.39813E-03  9.23502E-04  2.79598E-04  7.62350E-02 -1.05459E-02 -2.65515E-03  4.09221E-04  6.68997E-04
  5.700  4.47367E-02 -1.04446E-02 -1.29013E-03  9.93854E-04  2.44991E-04  7.38060E-02 -1.16134E-02 -2.68452E-03  5.87205E-04  7.00337E-04
  5.800  4.25541E-02 -1.08404E-02 -1.15820E-03  1.04893E-03  2.09697E-04  7.11469E-02 -1.25920E-02 -2.65785E-03  7.59830E-04  7.13689E-04
  5.900  4.02341E-02 -1.11022E-02 -1.00734E-03  1.08780E-03  1.74194E-04  6.82623E-02 -1.34478E-02 -2.57731E-03  9.20980E-04  7.10076E-04
  6.000  3.78013E-02 -1.12252E-02 -8.43159E-04  1.11002E-03  1.39022E-04  6.51644E-02 -1.41523E-02 -2.44758E-03  1.06528E-03  6.91083E-04
  6.100  3.52835E-02 -1.12089E-02 -6.71537E-04  1.11559E-03  1.04764E-04  6.18730E-02 -1.46833E-02 -2.27544E-03  1.18833E-03  6.58752E-04
  6.200  3.27106E-02 -1.10579E-02 -4.98391E-04  1.10505E-03  7.20170E-05  5.84151E-02 -1.50261E-02 -2.06930E-03  1.28686E-03  6.15460E-04
  6.300  3.01140E-02 -1.07803E-02 -3.29364E-04  1.07941E-03  4.13616E-05  5.48240E-02 -1.51735E-02 -1.83856E-03  1.35886E-03  5.63781E-04
  6.400  2.75248E-02 -1.03885E-02 -1.69567E-04  1.04012E-03  1.33306E-05  5.11376E-02 -1.51264E-02 -1.59303E-03  1.40355E-03  5.06353E-04
  6.500  2.49734E-02 -9.89752E-03 -2.33569E-05  9.89021E-04 -1.16226E-05  4.73975E-02 -1.48926E-02 -1.34235E-03  1.42135E-03  4.45743E-04
  6.600  2.24886E-02 -9.32448E-03  1.05829E-04  9.28215E-04 -3.31498E-05  4.36469E-02 -1.44863E-02 -1.09549E-03  1.41374E-03  3.84338E-04
  6.700  2.00960E-02 -8.68793E-03  2.15571E-04  8.59987E-04 -5.10264E-05  3.99290E-02 -1.39272E-02 -8.60258E-04  1.38312E-03  3.24243E-04
  6.800  1.78183E-02 -8.00683E-03  3.04501E-04  7.86682E-04 -6.51617E-05  3.62855E-02 -1.32385E-02 -6.43070E-04  1.33253E-03  2.67218E-04
  6.900  1.56740E-02 -7.29978E-03  3.72268E-04  7.10602E-04 -7.55992E-05  3.27549E-02 -1.24461E-02 -4.48725E-04  1.26551E-03  2.14635E-04
  7.000  1.36775E-02 -6.58434E-03  4.19445E-04  6.33905E-04 -8.25082E-05  2.93713E-02 -1.15770E-02 -2.80362E-04  1.18579E-03  1.67463E-04
  7.100  1.18389E-02 -5.87640E-03  4.47400E-04  5.58526E-04 -8.61679E-05  2.61635E-02 -1.06578E-02 -1.39514E-04  1.09713E-03  1.26282E-04
  7.200  1.01639E-02 -5.18978E-03  4.58116E-04  4.86112E-04 -8.69450E-05  2.31547E-02 -9.71390E-03 -2.62582E-05  1.00311E-03  9.13126E-05
  7.300  8.65441E-03 -4.53592E-03  4.54017E-04  4.17988E-04 -8.52678E-05  2.03615E-02 -8.76851E-03  6.05623E-05  9.06989E-04  6.24705E-05
  7.400  7.30850E-03 -3.92375E-03  4.37777E-04  3.55135E-04 -8.15989E-05  1.77946E-02 -7.84180E-03  1.23078E-04  8.11588E-04  3.94212E-05
  7.500  6.12112E-03 -3.35971E-03  4.12145E-04  2.98203E-04 -7.64088E-05  1.54586E-02 -6.95060E-03  1.64108E-04  7.19241E-04  2.16465E-05
  7.600  5.08455E-03 -2.84781E-03  3.79796E-04  2.47526E-04 -7.01517E-05  1.33528E-02 -6.10821E-03  1.86887E-04  6.31757E-04  8.50804E-06
  7.700  4.18905E-03 -2.38991E-03  3.43203E-04  2.03166E-04 -6.32463E-05  1.14718E-02 -5.32437E-03  1.94809E-04  5.50436E-04 -6.94163E-07
  7.800  3.42339E-03 -1.98598E-03  3.04549E-04  1.64951E-04 -5.60607E-05  9.80636E-03 -4.60549E-03  1.91218E-04  4.76103E-04 -6.67099E-06
  7.900  2.77541E-03 -1.63439E-03  2.65671E-04  1.32536E-04 -4.89033E-05  8.34399E-03 -3.95497E-03  1.79234E-04  4.09167E-04 -1.01036E-05
  8.000  2.23255E-03 -1.33232E-03  2.28029E-04  1.05444E-04 -4.20181E-05  7.07010E-03 -3.37357E-03  1.61637E-04  3.49691E-04 -1.16137E-05
  8.100  1.78227E-03 -1.07604E-03  1.92714E-04  8.31193E-05 -3.55858E-05  5.96865E-03 -2.85993E-03  1.40793E-04  2.97466E-04 -1.17447E-05
  8.200  1.41243E-03 -8.61261E-04  1.60466E-04  6.49703E-05 -2.97272E-05  5.02290E-03 -2.41099E-03  1.18622E-04  2.52083E-04 -1.09519E-05
  8.300  1.11157E-03 -6.83383E-04  1.31717E-04  5.04025E-05 -2.45106E-05  4.21599E-03 -2.02248E-03  9.66075E-05  2.13001E-04 -9.60140E-06
  8.400  8.69095E-04 -5.37755E-04  1.06639E-04  3.88469E-05 -1.99597E-05  3.53152E-03 -1.68935E-03  7.58207E-05  1.79602E-04 -7.97455E-06
  8.500  6.75448E-04 -4.19850E-04  8.51979E-05  2.97792E-05 -1.60637E-05  2.95385E-03 -1.40609E-03  5.69740E-05  1.51242E-04 -6.27684E-06
  8.600  5.22134E-04 -3.25409E-04  6.72051E-05  2.27320E-05 -1.27856E-05  2.46848E-03 -1.16705E-03  4.04774E-05  1.27283E-04 -4.64913E-06
  8.700  4.01754E-04 -2.50538E-04  5.23691E-05  1.73000E-05 -1.00716E-05  2.06215E-03 -9.66706E-04  2.65009E-05  1.07122E-04 -3.17982E-06
  8.800  3.07963E-04 -1.91756E-04  4.03376E-05  1.31410E-05 -7.85783E-06  1.72298E-03 -7.99786E-04  1.50332E-05  9.02038E-05 -1.91668E-06
  8.900  2.35410E-04 -1.46030E-04  3.07327E-05  9.97278E-06 -6.07691E-06  1.44046E-03 -6.61421E-04  5.93600E-06  7.60320E-05 -8.77619E-07
  9.000  1.79646E-04 -1.10762E-04  2.31785E-05  7.56722E-06 -4.66220E-06  1.20543E-03 -5.47205E-04 -1.01086E-06  6.41702E-05 -5.98624E-08
  9.100  1.37026E-04 -8.37704E-05  1.73202E-05  5.74376E-06 -3.55123E-06  1.01002E-03 -4.53228E-04 -6.07225E-06  5.42415E-05  5.52578E-07
  9.200  1.04602E-04 -6.32568E-05  1.28371E-05  4.36174E-06 -2.68769E-06  8.47509E-04 -3.76078E-04 -9.52978E-06  4.59243E-05  9.83226E-07
  9.300  8.00240E-05 -4.77597E-05  9.44879E-06  3.31319E-06 -2.02249E-06  7.12229E-04 -3.12820E-04 -1.16617E-05  3.89469E-05  1.25899E-06
  9.400  6.14374E-05 -3.61103E-05  6.91747E-06  2.51617E-06 -1.51404E-06  5.99443E-04 -2.60961E-04 -1.27293E-05  3.30813E-05  1.40733E-06
  9.500  4.73968E-05 -2.73866E-05  5.04665E-06  1.90904E-06 -1.12789E-06  5.05218E-04 -2.18411E-04 -1.29692E-05  2.81375E-05  1.45447E-06
  9.600  3.67872E-05 -2.08707E-05  3.67773E-06  1.44562E-06 -8.36181E-07  4.26305E-04 -1.83430E-04 -1.25893E-05  2.39579E-05  1.42432E-06
  9.700  2.87559E-05 -1.60099E-05  2.68531E-06  1.09133E-06 -6.16738E-07  3.60040E-04 -1.54589E-04 -1.17676E-05  2.04122E-05  1.33799E-06
  9.800  2.26567E-05 -1.23832E-05  1.97210E-06  8.20221E-07 -4.52218E-07  3.04239E-04 -1.30718E-04 -1.06530E-05  1.73934E-05  1.21361E-06
  9.900  1.80029E-05 -9.67258E-06  1.46380E-06  6.12720E-07 -3.29223E-07  2.57123E-04 -1.10868E-04 -9.36740E-06  1.48135E-05  1.06635E-06
 10.000  1.44302E-05 -7.63985E-06  1.10445E-06  4.53948E-07 -2.37511E-07  2.17240E-04 -9.42753E-05 -8.00810E-06  1.26009E-05  9.08562E-07
 10.100  1.16669E-05 -6.10753E-06  8.52387E-07  3.32534E-07 -1.69310E-07  1.83404E-04 -8.03279E-05 -6.65056E-06  1.06973E-05  7.50034E-07
 10.200  9.51119E-06 -4.94411E-06  6.76844E-07  2.39746E-07 -1.18758E-07  1.54649E-04 -6.85369E-05 -5.35117E-06  9.05547E-06  5.98179E-07
 10.300  7.81332E-06 -4.05247E-06  5.55260E-07  1.68870E-07 -8.14400E-08  1.30183E-04 -5.85140E-05 -4.14992E-06  7.63714E-06  4.58318E-07
 10.400  6.46225E-06 -3.36116E-06  4.71170E-07  1.14752E-07 -5.40360E-08  1.09352E-04 -4.99511E-05 -3.07291E-06  6.41125E-06  3.33933E-07
 10.500  5.37560E-06 -2.81771E-06  4.12616E-07  7.34549E-08 -3.40496E-08  9.16164E-05 -4.26041E-05 -2.13470E-06  5.35247E-06  2.26946E-07
 10.600  4.49223E-06 -2.38374E-06  3.70970E-07  4.19910E-08 -1.96024E-08  7.65268E-05 -3.62792E-05 -1.34048E-06  4.43989E-06  1.37981E-07
 10.700  3.76665E-06 -2.03129E-06  3.40070E-07  1.81115E-08 -9.28041E-09  6.37051E-05 -3.08216E-05 -6.88080E-07  3.65601E-06  6.66394E-08
 10.800  3.16494E-06 -1.74005E-06  3.15589E-07  1.32692E-10 -2.02082E-09  5.28317E-05 -2.61070E-05 -1.69780E-07  2.98586E-06  1.17523E-08
 10.900  2.66171E-06 -1.49537E-06  2.94580E-07 -1.32044E-08  2.97402E-09  4.36342E-05 -2.20343E-05  2.26046E-07  2.41638E-06 -2.83779E-08
 11.000  2.23786E-06 -1.28675E-06  2.75126E-07 -2.28463E-08  6.30073E-09  3.58787E-05 -1.85202E-05  5.13506E-07  1.93595E-06 -5.57637E-08
 11.100  1.87894E-06 -1.10669E-06  2.56080E-07 -2.95155E-08  8.40393E-09  2.93630E-05 -1.54947E-05  7.07977E-07  1.53402E-06 -7.25501E-08
 11.200  1.57388E-06 -9.49886E-07  2.36856E-07 -3.37779E-08  9.61382E-09  2.39114E-05 -1.28981E-05  8.25103E-07  1.20092E-06 -8.08656E-08
 11.300  1.31408E-06 -8.12536E-07  2.17267E-07 -3.60912E-08  1.01751E-08  1.93711E-05 -1.06785E-05  8.80008E-07  9.27731E-07 -8.27093E-08
 11.400  1.09276E-06 -6.91914E-07  1.97394E-07 -3.68384E-08  1.02690E-08  1.56083E-05 -8.79027E-06  8.86723E-07  7.06228E-07 -7.98739E-08
 11.500  9.04466E-07 -5.86002E-07  1.77477E-07 -3.63492E-08  1.00304E-08  1.25065E-05 -7.19248E-06  8.57796E-07  5.28847E-07 -7.38986E-08
 11.600  7.44683E-07 -4.93244E-07  1.57835E-07 -3.49123E-08  9.56015E-09  9.96369E-06 -5.84846E-06  8.04069E-07  3.88702E-07 -6.60505E-08
 11.700  6.09611E-07 -4.12369E-07  1.38808E-07 -3.27816E-08  8.93467E-09  7.89139E-06 -4.72508E-06  7.34605E-07  2.79584E-07 -5.73271E-08
 11.800  4.95976E-07 -3.42275E-07  1.20708E-07 -3.01792E-08  8.21227E-09  6.21272E-06 -3.79239E-06  6.56710E-07  1.95973E-07 -4.84749E-08
 11.900  4.00916E-07 -2.81954E-07  1.03796E-07 -2.72957E-08  7.43796E-09  4.86141E-06 -3.02341E-06  5.76053E-07  1.33030E-07 -4.00188E-08
 12.000  3.21895E-07 -2.30456E-07  8.82658E-08 -2.42909E-08  6.64662E-09  3.78056E-06 -2.39398E-06  4.96836E-07  8.65749E-08 -3.22964E-08
 12.100  2.56656E-07 -1.86863E-07  7.42399E-08 -2.12937E-08  5.86509E-09  2.92168E-06 -1.88256E-06  4.21990E-07  5.30610E-08 -2.54953E-08
 12.200  2.03186E-07 -1.50292E-07  6.17722E-08 -1.84042E-08  5.11369E-09  2.24370E-06 -1.47013E-06  3.53396E-07  2.95252E-08 -1.96881E-08
 12.300  1.59694E-07 -1.19893E-07  5.08564E-08 -1.56950E-08  4.40725E-09  1.71211E-06 -1.14006E-06  2.92088E-07  1.35357E-08 -1.48647E-08
 12.400  1.24594E-07 -9.48590E-08  4.14367E-08 -1.32147E-08  3.75593E-09  1.29812E-06 -8.77900E-07  2.38455E-07  3.13329E-09 -1.09595E-08
 12.500  9.64922E-08 -7.44373E-08  3.34195E-08 -1.09910E-08  3.16591E-09  9.77924E-07 -6.71286E-07  1.92408E-07 -3.23188E-09 -7.87410E-09
 12.600  7.41747E-08 -5.79344E-08  2.66860E-08 -9.03446E-09  2.64003E-09  7.31965E-07 -5.09697E-07  1.53535E-07 -6.76121E-09 -5.49445E-09
 12.700  5.65954E-08 -4.47231E-08  2.11019E-08 -7.34228E-09  2.17838E-09  5.44332E-07 -3.84290E-07  1.21217E-07 -8.36655E-09 -3.70344E-09
 12.800  4.28615E-08 -3.42451E-08  1.65273E-08 -5.90179E-09  1.77890E-09  4.02183E-07 -2.87710E-07  9.47260E-08 -8.72413E-09 -2.38958E-09
 12.900  3.22194E-08 -2.60111E-08  1.28235E-08 -4.69359E-09  1.43794E-09  2.95234E-07 -2.13898E-07  7.32962E-08 -8.32254E-09 -1.45223E-09
 13.000  2.40404E-08 -1.95995E-08  9.85857E-09 -3.69425E-09  1.15072E-09  2.15324E-07 -1.57914E-07  5.61739E-08 -7.50432E-09 -8.04279E-10
 13.100  1.78054E-08 -1.46517E-08  7.51107E-09 -2.87850E-09  9.11829E-10  1.56029E-07 -1.15775E-07  4.26531E-08 -6.50095E-09 -3.72971E-10
 13.200  1.30908E-08 -1.08672E-08  5.67207E-09 -2.22094E-09  7.15545E-10  1.12333E-07 -8.42939E-08  3.20949E-08 -5.46156E-09 -9.94144E-11
 13.300  9.55432E-09 -7.99775E-09  4.24624E-09 -1.69723E-09  5.56173E-10  8.03541E-08 -6.09510E-08  2.39382E-08 -4.47595E-09  6.26771E-11
 13.400  6.92266E-09 -5.84083E-09  3.15177E-09 -1.28490E-09  4.28249E-10  5.71095E-08 -4.37707E-08  1.77012E-08 -3.59248E-09  1.48669E-10
 13.500  4.97974E-09 -4.23322E-09  2.31982E-09 -9.63863E-10  3.26709E-10  4.03290E-08 -3.12191E-08  1.29792E-08 -2.83173E-09  1.84823E-10
 13.600  3.55651E-09 -3.04502E-09  1.69342E-09 -7.16568E-10  2.46984E-10  2.82972E-08 -2.21160E-08  9.43856E-09 -2.19656E-09  1.90069E-10
 13.700  2.52200E-09 -2.17404E-09  1.22615E-09 -5.28049E-10  1.85045E-10  1.97286E-08 -1.55617E-08  6.80833E-09 -1.67934E-09  1.77613E-10
 13.800  1.77580E-09 -1.54076E-09  8.80728E-10 -3.85778E-10  1.37419E-10  1.36673E-08 -1.08766E-08  4.87209E-09 -1.26695E-09  1.56327E-10
 13.900  1.24164E-09 -1.08399E-09  6.27643E-10 -2.79456E-10  1.01167E-10  9.40836E-09 -7.55138E-09  3.45929E-09 -9.44104E-10  1.31902E-10
 14.000  8.62126E-10 -7.57129E-10  4.43817E-10 -2.00756E-10  7.38418E-11  6.43577E-09 -5.20807E-09  2.43731E-09 -6.95436E-10  1.07765E-10
 14.100  5.94488E-10 -5.25049E-10  3.11432E-10 -1.43041E-10  5.34437E-11  4.37475E-09 -3.56830E-09  1.70426E-09 -5.06696E-10  8.57872E-11
 14.200  4.07133E-10 -3.61531E-10  2.16887E-10 -1.01099E-10  3.83593E-11  2.95517E-09 -2.42882E-09  1.18279E-09 -3.65361E-10  6.68201E-11
 14.300  2.76931E-10 -2.47193E-10  1.49919E-10 -7.08893E-11  2.73071E-11  1.98380E-09 -1.64247E-09  8.14845E-10 -2.60842E-10  5.10751E-11
 14.400  1.87099E-10 -1.67841E-10  1.02867E-10 -4.93188E-11  1.92824E-11  1.32346E-09 -1.10352E-09  5.57281E-10 -1.84452E-10  3.83941E-11
 14.500  1.25563E-10 -1.13178E-10  7.00687E-11 -3.40479E-11  1.35074E-11  8.77476E-10 -7.36658E-10  3.78395E-10 -1.29236E-10  2.84306E-11
 14.600  8.37059E-11 -7.57974E-11  4.73850E-11 -2.33270E-11  9.38757E-12  5.78201E-10 -4.88615E-10  2.55109E-10 -8.97436E-11  2.07646E-11
 14.700  5.54347E-11 -5.04195E-11  3.18172E-11 -1.58622E-11  6.47364E-12  3.78664E-10 -3.22032E-10  1.70785E-10 -6.17816E-11  1.49734E-11
 14.800  3.64717E-11 -3.33135E-11  2.12138E-11 -1.07064E-11  4.42995E-12  2.46475E-10 -2.10901E-10  1.13541E-10 -4.21743E-11  1.06691E-11
 14.900  2.38397E-11 -2.18647E-11  1.40457E-11 -7.17356E-12  3.00846E-12  1.59457E-10 -1.37253E-10  7.49654E-11 -2.85536E-11  7.51706E-12
 15.000  1.54823E-11 -1.42558E-11  9.23559E-12 -4.77177E-12  2.02779E-12  1.02537E-10 -8.87650E-11  4.91595E-11 -1.91767E-11  5.23990E-12
 15.100  9.99027E-12 -9.23398E-12  6.03135E-12 -3.15146E-12  1.35666E-12  6.55379E-11 -5.70499E-11  3.20199E-11 -1.27781E-11  3.61546E-12
 15.200  6.40540E-12 -5.94230E-12  3.91218E-12 -2.06663E-12  9.01004E-13  4.16381E-11 -3.64396E-11  2.07169E-11 -8.44881E-12  2.47030E-12
 15.300  4.08093E-12 -3.79936E-12  2.52061E-12 -1.34576E-12  5.94048E-13  2.62958E-11 -2.31321E-11  1.33152E-11 -5.54406E-12  1.67200E-12
 15.400  2.58366E-12 -2.41366E-12  1.61324E-12 -8.70275E-13  3.88855E-13  1.65078E-11 -1.45945E-11  8.50187E-12 -3.61091E-12  1.12140E-12
 15.500  1.62551E-12 -1.52361E-12  1.02571E-12 -5.58931E-13  2.52731E-13  1.03018E-11 -9.15195E-12  5.39321E-12 -2.33460E-12  7.45488E-13
 15.600  1.01634E-12 -9.55692E-13  6.47896E-13 -3.56533E-13  1.63104E-13  6.39088E-12 -5.70425E-12  3.39913E-12 -1.49853E-12  4.91342E-13
 15.700  6.31539E-13 -5.95704E-13  4.06597E-13 -2.25897E-13  1.04528E-13  3.94138E-12 -3.53393E-12  2.12863E-12 -9.55022E-13  3.21134E-13
 15.800  3.90021E-13 -3.69001E-13  2.53526E-13 -1.42172E-13  6.65264E-14  2.41649E-12 -2.17623E-12  1.32453E-12 -6.04368E-13  2.08177E-13
 15.900  2.39397E-13 -2.27158E-13  1.57072E-13 -8.88869E-14  4.20507E-14  1.47292E-12 -1.33214E-12  8.18983E-13 -3.79810E-13  1.33875E-13
 16.000  1.46051E-13 -1.38978E-13  9.66983E-14 -5.52081E-14  2.63996E-14  8.92566E-13 -8.10600E-13  5.03220E-13 -2.37052E-13  8.54203E-14
 16.100  8.85654E-14 -8.45080E-14  5.91558E-14 -3.40670E-14  1.64623E-14  5.37748E-13 -4.90328E-13  3.07276E-13 -1.46949E-13  5.40850E-14
 16.200  5.33835E-14 -5.10741E-14  3.59628E-14 -2.08858E-14  1.01971E-14  3.22110E-13 -2.94849E-13  1.86468E-13 -9.04832E-14  3.39867E-14
 16.300  3.19852E-14 -3.06809E-14  2.17274E-14 -1.27226E-14  6.27454E-15  1.91833E-13 -1.76262E-13  1.12461E-13 -5.53446E-14  2.11987E-14
 16.400  1.90503E-14 -1.83196E-14  1.30459E-14 -7.70072E-15  3.83554E-15  1.13592E-13 -1.04755E-13  6.74125E-14 -3.36293E-14  1.31259E-14
 16.500  1.12792E-14 -1.08732E-14  7.78521E-15 -4.63163E-15  2.32933E-15  6.68784E-14 -6.18953E-14  4.01636E-14 -2.03012E-14  8.06893E-15
 16.600  6.63883E-15 -6.41511E-15  4.61757E-15 -2.76824E-15  1.40546E-15  3.91512E-14 -3.63595E-14  2.37845E-14 -1.21762E-14  4.92506E-15
 16.700  3.88466E-15 -3.76246E-15  2.72219E-15 -1.64421E-15  8.42577E-16  2.27895E-14 -2.12356E-14  1.40004E-14 -7.25626E-15  2.98508E-15
 16.800  2.25983E-15 -2.19368E-15  1.59514E-15 -9.70546E-16  5.01906E-16  1.31905E-14 -1.23313E-14  8.19193E-15 -4.29681E-15  1.79675E-15
 16.900  1.30698E-15 -1.27151E-15  9.29122E-16 -5.69368E-16  2.97081E-16  7.59165E-15 -7.11971E-15  4.76479E-15 -2.52833E-15  1.07410E-15
 17.000  7.51526E-16 -7.32698E-16  5.37961E-16 -3.31975E-16  1.74738E-16  4.34475E-15 -4.08724E-15  2.75503E-15 -1.47842E-15  6.37753E-16
 17.100  4.29648E-16 -4.19758E-16  3.09633E-16 -1.92384E-16  1.02136E-16  2.47261E-15 -2.33305E-15  1.58361E-15 -8.59124E-16  3.76140E-16
 17.200  2.44222E-16 -2.39085E-16  1.77164E-16 -1.10816E-16  5.93280E-17  1.39932E-15 -1.32420E-15  9.04940E-16 -4.96167E-16  2.20375E-16
 17.300  1.38029E-16 -1.35394E-16  1.00774E-16 -6.34474E-17  3.42494E-17  7.87505E-16 -7.47350E-16  5.14109E-16 -2.84794E-16  1.28268E-16
 17.400  7.75674E-17 -7.62337E-17  5.69876E-17 -3.61095E-17  1.96504E-17  4.40733E-16 -4.19419E-16  2.90378E-16 -1.62474E-16  7.41732E-17
 17.500  4.33432E-17 -4.26783E-17  3.20391E-17 -2.04286E-17  1.12056E-17  2.45295E-16 -2.34062E-16  1.63065E-16 -9.21303E-17  4.26157E-17
 17.600  2.40827E-17 -2.37569E-17  1.79085E-17 -1.14889E-17  6.35114E-18  1.35769E-16 -1.29892E-16  9.10440E-17 -5.19281E-17  2.43283E-17
 17.700  1.33058E-17 -1.31494E-17  9.95248E-18 -6.42327E-18  3.57800E-18  7.47344E-17 -7.16823E-17  5.05418E-17 -2.90937E-17  1.38005E-17
 17.800  7.31034E-18 -7.23709E-18  5.49927E-18 -3.57010E-18  2.00362E-18  4.09121E-17 -3.93391E-17  2.78976E-17 -1.62034E-17  7.77935E-18
 17.900  3.99395E-18 -3.96071E-18  3.02129E-18 -1.97272E-18  1.11529E-18  2.22742E-17 -2.14698E-17  1.53113E-17 -8.97100E-18  4.35787E-18
 18.000  2.16993E-18 -2.15547E-18  1.65045E-18 -1.08373E-18  6.17126E-19  1.20608E-17 -1.16528E-17  8.35591E-18 -4.93757E-18  2.42610E-18
 18.100  1.17239E-18 -1.16649E-18  8.96490E-19 -5.91918E-19  3.39456E-19  6.49508E-18 -6.28987E-18  4.53442E-18 -2.70171E-18  1.34235E-18
 18.200  6.29933E-19 -6.27762E-19  4.84207E-19 -3.21437E-19  1.85623E-19  3.47881E-18 -3.37649E-18  2.44685E-18 -1.46970E-18  7.38182E-19
 18.300  3.36602E-19 -3.35967E-19  2.60058E-19 -1.73554E-19  1.00909E-19  1.85319E-18 -1.80264E-18  1.31297E-18 -7.94874E-19  4.03477E-19
 18.400  1.78875E-19 -1.78810E-19  1.38890E-19 -9.31731E-20  5.45365E-20  9.81885E-19 -9.57150E-19  7.00614E-19 -4.27421E-19  2.19203E-19
 18.500  9.45359E-20 -9.46430E-20  7.37631E-20 -4.97361E-20  2.93034E-20  5.17437E-19 -5.05458E-19  3.71778E-19 -2.28515E-19  1.18377E-19
 18.600  4.96899E-20 -4.98190E-20  3.89572E-20 -2.63990E-20  1.56543E-20  2.71216E-19 -2.65479E-19  1.96191E-19 -1.21474E-19  6.35462E-20
 18.700  2.59759E-20 -2.60806E-20  2.04609E-20 -1.39332E-20  8.31463E-21  1.41398E-19 -1.38683E-19  1.02961E-19 -6.42061E-20  3.39104E-20
 18.800  1.35054E-20 -1.35789E-20  1.06870E-20 -7.31250E-21  4.39094E-21  7.33232E-20 -7.20555E-20  5.37368E-20 -3.37444E-20  1.79891E-20
 18.900  6.98381E-21 -7.03145E-21  5.55124E-21 -3.81632E-21  2.30562E-21  3.78198E-20 -3.72367E-20  2.78924E-20 -1.76348E-20  9.48713E-21
 19.000  3.59192E-21 -3.62128E-21  2.86771E-21 -1.98060E-21  1.20377E-21  1.94036E-20 -1.91399E-20  1.43986E-20 -9.16414E-21  4.97417E-21
 19.100  1.83746E-21 -1.85492E-21  1.47333E-21 -1.02218E-21  6.24930E-22  9.90222E-21 -9.78542E-21  7.39234E-21 -4.73560E-21  2.59286E-21
 19.200  9.34914E-22 -9.45015E-22  7.52819E-22 -5.24628E-22  3.22601E-22  5.02664E-21 -4.97618E-21  3.77468E-21 -2.43349E-21  1.34376E-21
 19.300  4.73147E-22 -4.78863E-22  3.82573E-22 -2.67775E-22  1.65597E-22  2.53818E-21 -2.51706E-21  1.91699E-21 -1.24356E-21  6.92410E-22
 19.400  2.38174E-22 -2.41350E-22  1.93365E-22 -1.35923E-22  8.45281E-23  1.27489E-21 -1.26643E-21  9.68297E-22 -6.31960E-22  3.54742E-22
 19.500  1.19255E-22 -1.20992E-22  9.72050E-23 -6.86169E-23  4.29063E-23  6.36985E-22 -6.33809E-22  4.86466E-22 -3.19383E-22  1.80710E-22
 19.600  5.93940E-23 -6.03308E-23  4.86019E-23 -3.44499E-23  2.16581E-23  3.16593E-22 -3.15526E-22  2.43085E-22 -1.60524E-22  9.15339E-23
 19.700  2.94241E-23 -2.99230E-23  2.41700E-23 -1.72018E-23  1.08719E-23  1.56528E-22 -1.56248E-22  1.20818E-22 -8.02379E-23  4.61022E-23
 19.800  1.44998E-23 -1.47625E-23  1.19555E-23 -8.54265E-24  5.42738E-24  7.69849E-23 -7.69668E-23  5.97284E-23 -3.98879E-23  2.30894E-23
 19.900  7.10759E-24 -7.24449E-24  5.88209E-24 -4.21943E-24  2.69448E-24  3.76658E-23 -3.77142E-23  2.93703E-23 -1.97212E-23  1.14991E-23
  67 186 200   0.100
  0.000  5.99097E-02 -3.10317E-16 -4.78784E-16 -4.62843E-16 -9.87038E-16  8.98496E-02 -4.65475E-16 -6.66134E-16 -8.00593E-16 -8.43989E-16
  0.100  5.98828E-02  4.44849E-05 -6.55038E-09 -5.05393E-12  3.51900E-15  8.99466E-02 -7.10395E-05  2.26492E-08  1.14307E-11 -1.31891E-14
  0.200  5.98037E-02  1.75458E-04 -1.03275E-07 -3.22097E-10  4.23897E-13  9.02331E-02 -2.79784E-04  3.57979E-07  7.27878E-10 -1.08711E-12
  0.300  5.96769E-02  3.85598E-04 -5.10027E-07 -3.64425E-09  1.08208E-11  9.06953E-02 -6.13370E-04  1.77543E-06  8.21990E-09 -2.76467E-11
  0.400  5.95098E-02  6.63104E-04 -1.55610E-06 -2.02833E-08  1.06950E-10  9.13113E-02 -1.05120E-03  5.45061E-06  4.56286E-08 -2.75295E-10
  0.500  5.93120E-02  9.92284E-04 -3.62715E-06 -7.64393E-08  6.28768E-10  9.20518E-02 -1.56614E-03  1.28129E-05  1.71359E-07 -1.63267E-09
  0.600  5.90952E-02  1.35434E-03 -7.09617E-06 -2.24871E-07  2.65861E-09  9.28821E-02 -2.12615E-03  2.53477E-05  5.01949E-07 -6.97486E-09
  0.700  5.88720E-02  1.72831E-03 -1.22437E-05 -5.57115E-07  8.94649E-09  9.37638E-02 -2.69616E-03  4.43687E-05  1.23719E-06 -2.37413E-08
  0.800  5.86555E-02  2.09216E-03 -1.91741E-05 -1.21622E-06  2.54523E-08  9.46570E-02 -3.24016E-03  7.07795E-05  2.68465E-06 -6.83801E-08
  0.900  5.84584E-02  2.42391E-03 -2.77348E-05 -2.40881E-06  6.36514E-08  9.55222E-02 -3.72339E-03  1.04846E-04  5.28048E-06 -1.73222E-07
  1.000  5.82925E-02  2.70280E-03 -3.74490E-05 -4.41528E-06  1.43697E-07  9.63228E-02 -4.11440E-03  1.46007E-04  9.60330E-06 -3.96229E-07
  1.100  5.81677E-02  2.91040E-03 -4.74677E-05 -7.59672E-06  2.98456E-07  9.70265E-02 -4.38701E-03  1.92739E-04  1.63782E-05 -8.33797E-07
  1.200  5.80916E-02  3.03162E-03 -5.65522E-05 -1.23973E-05  5.78330E-07  9.76078E-02 -4.52186E-03  2.42505E-04  2.64681E-05 -1.63641E-06
  1.300  5.80687E-02  3.05558E-03 -6.30916E-05 -1.93407E-05  1.05664E-06  9.80486E-02 -4.50767E-03  2.91802E-04  4.08504E-05 -3.02641E-06
  1.400  5.81007E-02  2.97621E-03 -6.51613E-05 -2.90201E-05  1.83526E-06  9.83393E-02 -4.34191E-03  3.36308E-04  6.05781E-05 -5.31646E-06
  1.500  5.81858E-02  2.79267E-03 -6.06220E-05 -4.20797E-05  3.04988E-06  9.84791E-02 -4.03095E-03  3.71140E-04  8.67239E-05 -8.92681E-06
  1.600  5.83192E-02  2.50939E-03 -4.72578E-05 -5.91886E-05  4.87445E-06  9.84756E-02 -3.58973E-03  3.91197E-04  1.20311E-04 -1.43986E-05
  1.700  5.84932E-02  2.13592E-03 -2.29449E-05 -8.10062E-05  7.52384E-06  9.83442E-02 -3.04076E-03  3.91581E-04  1.62227E-04 -2.24001E-05
  1.800  5.86976E-02  1.68640E-03  1.41598E-05 -1.08140E-04  1.12540E-05  9.81065E-02 -2.41276E-03  3.68051E-04  2.13136E-04 -3.37234E-05
  1.900  5.89206E-02  1.17884E-03  6.54257E-05 -1.41098E-04  1.63590E-05  9.77889E-02 -1.73884E-03  3.17473E-04  2.73379E-04 -4.92674E-05
  2.000  5.91493E-02  6.34125E-04  1.31568E-04 -1.80239E-04  2.31633E-05  9.74207E-02 -1.05439E-03  2.38220E-04  3.42881E-04 -7.00063E-05
  2.100  5.93707E-02  7.48638E-05  2.12497E-04 -2.25717E-04  3.20108E-05  9.70318E-02 -3.94921E-04  1.30494E-04  4.21071E-04 -9.69413E-05
  2.200  5.95721E-02 -4.75809E-04  3.07216E-04 -2.77440E-04  4.32480E-05  9.66509E-02  2.06210E-04 -3.50160E-06  5.06814E-04 -1.31037E-04
  2.300  5.97425E-02 -9.95489E-04  4.13776E-04 -3.35024E-04  5.72032E-05  9.63033E-02  7.19814E-04 -1.59528E-04  5.98375E-04 -1.73145E-04
  2.400  5.98727E-02 -1.46368E-03  5.29303E-04 -3.97771E-04  7.41629E-05  9.60097E-02  1.12264E-03 -3.31458E-04  6.93415E-04 -2.23915E-04
  2.500  5.99558E-02 -1.86286E-03  6.50090E-04 -4.64658E-04  9.43449E-05  9.57848E-02  1.39873E-03 -5.11594E-04  7.89027E-04 -2.83710E-04
  2.600  5.99882E-02 -2.17929E-03  7.71762E-04 -5.34345E-04  1.17872E-04  9.56366E-02  1.54023E-03 -6.91131E-04  8.81811E-04 -3.52515E-04
  2.700  5.99687E-02 -2.40369E-03  8.89484E-04 -6.05205E-04  1.44749E-04  9.55663E-02  1.54774E-03 -8.60748E-04  9.68000E-04 -4.29870E-04
  2.800  5.98996E-02 -2.53158E-03  9.98218E-04 -6.75375E-04  1.74840E-04  9.55684E-02  1.42995E-03 -1.01127E-03  1.04361E-03 -5.14808E-04
  2.900  5.97855E-02 -2.56337E-03  1.09299E-03 -7.42830E-04  2.07857E-04  9.56316E-02  1.20287E-03 -1.13435E-03  1.10466E-03 -6.05836E-04
  3.000  5.96335E-02 -2.50419E-03  1.16917E-03 -8.05460E-04  2.43356E-04  9.57398E-02  8.88488E-04 -1.22312E-03  1.14733E-03 -7.00937E-04
  3.100  5.94522E-02 -2.36355E-03  1.22267E-03 -8.61170E-04  2.80743E-04  9.58735E-02  5.13051E-04 -1.27276E-03  1.16826E-03 -7.97610E-04
  3.200  5.92516E-02 -2.15474E-03  1.25023E-03 -9.07974E-04  3.19291E-04  9.60115E-02  1.05113E-04 -1.28090E-03  1.16470E-03 -8.92948E-04
  3.300  5.90420E-02 -1.89413E-03  1.24945E-03 -9.44085E-04  3.58167E-04  9.61322E-02 -3.06597E-04 -1.24791E-03  1.13477E-03 -9.83741E-04
  3.400  5.88331E-02 -1.60036E-03  1.21899E-03 -9.67996E-04  3.96467E-04  9.62150E-02 -6.95272E-04 -1.17696E-03  1.07756E-03 -1.06662E-03
  3.500  5.86339E-02 -1.29351E-03  1.15850E-03 -9.78543E-04  4.33264E-04  9.62420E-02 -1.03798E-03 -1.07387E-03  9.93327E-04 -1.13820E-03
  3.600  5.84514E-02 -9.94288E-04  1.06866E-03 -9.74941E-04  4.67650E-04  9.61987E-02 -1.31732E-03 -9.46796E-04  8.83495E-04 -1.19524E-03
  3.700  5.82906E-02 -7.23150E-04  9.51046E-04 -9.56804E-04  4.98784E-04  9.60743E-02 -1.52272E-03 -8.05768E-04  7.50701E-04 -1.23482E-03
  3.800  5.81535E-02 -4.99609E-04  8.08068E-04 -9.24134E-04  5.25934E-04  9.58626E-02 -1.65120E-03 -6.62041E-04  5.98725E-04 -1.25450E-03
  3.900  5.80393E-02 -3.41527E-04  6.42811E-04 -8.77293E-04  5.48512E-04  9.55614E-02 -1.70768E-03 -5.27400E-04  4.32376E-04 -1.25239E-03
  4.000  5.79436E-02 -2.64518E-04  4.58918E-04 -8.16955E-04  5.66098E-04  9.51721E-02 -1.70464E-03 -4.13400E-04  2.57318E-04 -1.22734E-03
  4.100  5.78588E-02 -2.81434E-04  2.60466E-04 -7.44051E-04  5.78453E-04  9.46987E-02 -1.66132E-03 -3.30614E-04  7.98502E-05 -1.17894E-03
  4.200  5.77742E-02 -4.01933E-04  5.18524E-05 -6.59708E-04  5.85515E-04  9.41471E-02 -1.60243E-03 -2.87947E-04 -9.33514E-05 -1.10761E-03
  4.300  5.76759E-02 -6.32135E-04 -1.62300E-04 -5.65189E-04  5.87388E-04  9.35235E-02 -1.55645E-03 -2.92028E-04 -2.55520E-04 -1.01456E-03
  4.400  5.75473E-02 -9.74368E-04 -3.77222E-04 -4.61850E-04  5.84313E-04  9.28332E-02 -1.55357E-03 -3.46757E-04 -4.00096E-04 -9.01772E-04
  4.500  5.73697E-02 -1.42701E-03 -5.88076E-04 -3.51100E-04  5.76638E-04  9.20798E-02 -1.62365E-03 -4.53015E-04 -5.21027E-04 -7.71931E-04
  4.600  5.71230E-02 -1.98443E-03 -7.90030E-04 -2.34386E-04  5.64781E-04  9.12635E-02 -1.79395E-03 -6.08551E-04 -6.13056E-04 -6.28328E-04
  4.700  5.67859E-02 -2.63707E-03 -9.78338E-04 -1.13187E-04  5.49189E-04  9.03807E-02 -2.08719E-03 -8.08083E-04 -6.71973E-04 -4.74733E-04
  4.800  5.63373E-02 -3.37163E-03 -1.14845E-03  1.09759E-05  5.30306E-04  8.94236E-02 -2.51970E-03 -1.04358E-03 -6.94837E-04 -3.15256E-04
  4.900  5.57569E-02 -4.17141E-03 -1.29611E-03  1.36525E-04  5.08545E-04  8.83801E-02 -3.10014E-03 -1.30470E-03 -6.80134E-04 -1.54190E-04
  5.000  5.50259E-02 -5.01678E-03 -1.41754E-03  2.61806E-04  4.84267E-04  8.72337E-02 -3.82859E-03 -1.57944E-03 -6.27877E-04  4.15441E-06
  5.100  5.41281E-02 -5.88583E-03 -1.50953E-03  3.85079E-04  4.57780E-04  8.59652E-02 -4.69622E-03 -1.85480E-03 -5.39627E-04  1.55615E-04
  5.200  5.30504E-02 -6.75508E-03 -1.56964E-03  5.04515E-04  4.29337E-04  8.45527E-02 -5.68555E-03 -2.11759E-03 -4.18442E-04  2.96338E-04
  5.300  5.17840E-02 -7.60040E-03 -1.59636E-03  6.18212E-04  3.99150E-04  8.29738E-02 -6.77131E-03 -2.35520E-03 -2.68746E-04  4.22924E-04
  5.400  5.03244E-02 -8.39787E-03 -1.58919E-03  7.24234E-04  3.67412E-04  8.12067E-02 -7.92168E-03 -2.55633E-03 -9.61213E-05  5.32561E-04
  5.500  4.86721E-02 -9.12476E-03 -1.54874E-03  8.20662E-04  3.34320E-04  7.92322E-02 -9.10009E-03 -2.71164E-03  9.29539E-05  6.23119E-04
  5.600  4.68330E-02 -9.76047E-03 -1.47679E-03  9.05666E-04  3.00097E-04  7.70351E-02 -1.02672E-02 -2.81423E-03  2.91427E-04  6.93224E-04
  5.700  4.48181E-02 -1.02873E-02 -1.37621E-03  9.77593E-04  2.65015E-04  7.46056E-02 -1.13831E-02 -2.86003E-03  4.92015E-04  7.42293E-04
  5.800  4.26433E-02 -1.06913E-02 -1.25089E-03  1.03505E-03  2.29407E-04  7.19407E-02 -1.24093E-02 -2.84783E-03  6.87562E-04  7.70520E-04
  5.900  4.03293E-02 -1.09627E-02 -1.10558E-03  1.07699E-03  1.93675E-04  6.90448E-02 -1.33111E-02 -2.77935E-03  8.71379E-04  7.78841E-04
  6.000  3.79008E-02 -1.10962E-02 -9.45639E-04  1.10278E-03  1.58284E-04  6.59302E-02 -1.40587E-02 -2.65891E-03  1.03755E-03  7.68849E-04
  6.100  3.53854E-02 -1.10913E-02 -7.76814E-04  1.11227E-03  1.23748E-04  6.26169E-02 -1.46294E-02 -2.49308E-03  1.18121E-03  7.42684E-04
  6.200  3.28132E-02 -1.09519E-02 -6.04928E-04  1.10579E-03  9.06098E-05  5.91324E-02 -1.50077E-02 -2.29016E-03  1.29866E-03  7.02900E-04
  6.300  3.02155E-02 -1.06861E-02 -4.35608E-04  1.08417E-03  5.94098E-05  5.55102E-02 -1.51862E-02 -2.05959E-03  1.38756E-03  6.52318E-04
  6.400  2.76237E-02 -1.03059E-02 -2.74015E-04  1.04869E-03  3.06585E-05  5.17890E-02 -1.51653E-02 -1.81131E-03  1.44690E-03  5.93872E-04
  6.500  2.50685E-02 -9.82593E-03 -1.24616E-04  1.00103E-03  4.80445E-06  4.80110E-02 -1.49529E-02 -1.55523E-03  1.47694E-03  5.30460E-04
  6.600  2.25786E-02 -9.26331E-03  8.98787E-06  9.43185E-04 -1.77933E-05  4.42203E-02 -1.45633E-02 -1.30059E-03  1.47912E-03  4.64815E-04
  6.700  2.01800E-02 -8.63634E-03  1.24179E-04  8.77347E-04 -3.68856E-05  4.04606E-02 -1.40165E-02 -1.05560E-03  1.45585E-03  3.99393E-04
  6.800  1.78956E-02 -7.96388E-03  2.19366E-04  8.05817E-04 -5.23473E-05  3.67745E-02 -1.33360E-02 -8.27069E-04  1.41028E-03  3.36289E-04
  6.900  1.57441E-02 -7.26447E-03  2.93964E-04  7.30884E-04 -6.41808E-05  3.32012E-02 -1.25481E-02 -6.20222E-04  1.34612E-03  2.77183E-04
  7.000  1.37402E-02 -6.55564E-03  3.48316E-04  6.54727E-04 -7.25119E-05  2.97756E-02 -1.16804E-02 -4.38602E-04  1.26731E-03  2.23319E-04
  7.100  1.18942E-02 -5.85332E-03  3.83570E-04  5.79327E-04 -7.75774E-05  2.65271E-02 -1.07601E-02 -2.84125E-04  1.17787E-03  1.75507E-04
  7.200  1.02120E-02 -5.17138E-03  4.01517E-04  5.06400E-04 -7.97051E-05  2.34792E-02 -9.81305E-03 -1.57212E-04  1.08165E-03  1.34159E-04
  7.300  8.69560E-03 -4.52136E-03  4.04412E-04  4.37352E-04 -7.92911E-05  2.06492E-02 -8.86292E-03 -5.70025E-05  9.82181E-04  9.93289E-05
  7.400  7.34324E-03 -3.91228E-03  3.94795E-04  3.73254E-04 -7.67731E-05  1.80480E-02 -7.93036E-03  1.83899E-05  8.82568E-04  7.07829E-05
  7.500  6.14993E-03 -3.35066E-03  3.75316E-04  3.14847E-04 -7.26048E-05  1.56804E-02 -7.03260E-03  7.15957E-05  7.85397E-04  4.80621E-05
  7.600  5.10805E-03 -2.84065E-03  3.48580E-04  2.62551E-04 -6.72319E-05  1.35458E-02 -6.18329E-03  1.05712E-04  6.92711E-04  3.05532E-05
  7.700  4.20785E-03 -2.38420E-03  3.17023E-04  2.16507E-04 -6.10720E-05  1.16390E-02 -5.39244E-03  1.24047E-04  6.06011E-04  1.75535E-05
  7.800  3.43813E-03 -1.98135E-03  2.82819E-04  1.76613E-04 -5.44981E-05  9.95037E-03 -4.66669E-03  1.29898E-04  5.26294E-04  8.32787E-06
  7.900  2.78670E-03 -1.63058E-03  2.47812E-04  1.42575E-04 -4.78286E-05  8.46758E-03 -4.00958E-03  1.26381E-04  4.54107E-04  2.15519E-06
  8.000  2.24096E-03 -1.32913E-03  2.13493E-04  1.13961E-04 -4.13208E-05  7.17583E-03 -3.42200E-03  1.16296E-04  3.89618E-04 -1.63613E-06
  8.100  1.78833E-03 -1.07332E-03  1.80991E-04  9.02439E-05 -3.51707E-05  6.05886E-03 -2.90265E-03  1.02054E-04  3.32693E-04 -3.64433E-06
  8.200  1.41662E-03 -8.58894E-04  1.51096E-04  7.08486E-05 -2.95150E-05  5.09972E-03 -2.44851E-03  8.56392E-05  2.82971E-04 -4.38092E-06
  8.300  1.11429E-03 -6.81302E-04  1.24290E-04  5.51880E-05 -2.44373E-05  4.28135E-03 -2.05533E-03  6.86030E-05  2.39937E-04 -4.26615E-06
  8.400  8.70706E-04 -5.35908E-04  1.00800E-04  4.26926E-05 -1.99759E-05  3.58710E-03 -1.71803E-03  5.20949E-05  2.02981E-04 -3.63160E-06
  8.500  6.76235E-04 -4.18205E-04  8.06419E-05  3.28308E-05 -1.61324E-05  3.00115E-03 -1.43107E-03  3.69049E-05  1.71451E-04 -2.72768E-06
  8.600  5.22334E-04 -3.23944E-04  6.36755E-05  2.51237E-05 -1.28807E-05  2.50877E-03 -1.18879E-03  2.35190E-05  1.44692E-04 -1.73425E-06
  8.700  4.01554E-04 -2.49233E-04  4.96530E-05  1.91520E-05 -1.01753E-05  2.09653E-03 -9.85605E-04  1.21790E-05  1.22076E-04 -7.72613E-07
  8.800  3.07509E-04 -1.90601E-04  3.82606E-05  1.45581E-05 -7.95923E-06  1.75238E-03 -8.16208E-04  2.94003E-06  1.03019E-04  8.23384E-08
  8.900  2.34810E-04 -1.45011E-04  2.91537E-05  1.10444E-05 -6.16979E-06  1.46567E-03 -6.75689E-04 -4.27646E-06  8.69930E-05  7.90845E-07
  9.000  1.78979E-04 -1.09867E-04  2.19845E-05  8.36796E-06 -4.74380E-06  1.22712E-03 -5.59602E-04 -9.63748E-06  7.35301E-05  1.33842E-06
  9.100  1.36346E-04 -8.29901E-05  1.64219E-05  6.33482E-06 -3.62097E-06  1.02872E-03 -4.64001E-04 -1.33616E-05  6.22234E-05  1.72770E-06
  9.200  1.03947E-04 -6.25792E-05  1.21642E-05  4.79238E-06 -2.74629E-06  8.63683E-04 -3.85441E-04 -1.56907E-05  5.27230E-05  1.97202E-06
  9.300  7.94150E-05 -4.71738E-05  8.94675E-06  3.62246E-06 -2.07130E-06  7.26252E-04 -3.20959E-04 -1.68689E-05  4.47311E-05  2.09063E-06
  9.400  6.08864E-05 -3.56053E-05  6.54405E-06  2.73460E-06 -1.55459E-06  6.11627E-04 -2.68036E-04 -1.71292E-05  3.79968E-05  2.10529E-06
  9.500  4.69086E-05 -2.69526E-05  4.76948E-06  2.06019E-06 -1.16166E-06  5.15820E-04 -2.24560E-04 -1.66844E-05  3.23096E-05  2.03799E-06
  9.600  3.63614E-05 -2.04984E-05  3.47212E-06  1.54745E-06 -8.64448E-07  4.35541E-04 -1.88772E-04 -1.57225E-05  2.74942E-05  1.90950E-06
  9.700  2.83893E-05 -1.56909E-05  2.53259E-06  1.15742E-06 -6.40533E-07  3.68087E-04 -1.59226E-04 -1.44053E-05  2.34048E-05  1.73853E-06
  9.800  2.23444E-05 -1.21101E-05  1.85821E-06  8.60757E-07 -4.72336E-07  3.11249E-04 -1.34738E-04 -1.28684E-05  1.99212E-05  1.54140E-06
  9.900  1.77391E-05 -9.43895E-06  1.37826E-06  6.35270E-07 -3.46260E-07  2.63223E-04 -1.14349E-04 -1.12226E-05  1.69443E-05  1.33180E-06
 10.000  1.42089E-05 -7.44013E-06  1.03949E-06  4.64108E-07 -2.51911E-07  2.22538E-04 -9.72834E-05 -9.55618E-06  1.43927E-05  1.12090E-06
 10.100  1.14825E-05 -5.93698E-06  8.02320E-07  3.34413E-07 -1.81414E-07  1.87995E-04 -8.29216E-05 -7.93695E-06  1.22001E-05  9.17433E-07
 10.200  9.35843E-06 -4.79868E-06  6.37536E-07  2.36337E-07 -1.28838E-07  1.58615E-04 -7.07673E-05 -6.41504E-06  1.03120E-05  7.27889E-07
 10.300  7.68742E-06 -3.92874E-06  5.23747E-07  1.62328E-07 -8.97306E-08  1.33597E-04 -6.04260E-05 -5.02511E-06  8.68441E-06  5.56750E-07
 10.400  6.35902E-06 -3.25619E-06  4.45356E-07  1.06605E-07 -6.07515E-08  1.12278E-04 -5.15844E-05 -3.78869E-06  7.28100E-06  4.06723E-07
 10.500  5.29140E-06 -2.72899E-06  3.91037E-07  6.47616E-08 -3.93935E-08  9.41133E-05 -4.39940E-05 -2.71642E-06  6.07202E-06  2.79003E-07
 10.600  4.42393E-06 -2.30909E-06  3.52616E-07  3.34596E-08 -2.37701E-08  7.86465E-05 -3.74568E-05 -1.81005E-06  5.03275E-06  1.73544E-07
 10.700  3.71155E-06 -1.96880E-06  3.24252E-07  1.01884E-08 -1.24591E-08  6.54949E-05 -3.18148E-05 -1.06439E-06  4.14237E-06  8.93233E-08
 10.800  3.12076E-06 -1.68803E-06  3.01841E-07 -6.92795E-09 -4.38602E-09  5.43343E-05 -2.69405E-05 -4.69066E-07  3.38304E-06  2.46002E-08
 10.900  2.62651E-06 -1.45235E-06  2.82580E-07 -1.92871E-08  1.26173E-09  4.48880E-05 -2.27302E-05 -1.00812E-08  2.73919E-06 -2.28407E-08
 11.000  2.21001E-06 -1.25141E-06  2.64648E-07 -2.79329E-08  5.09860E-09  3.69184E-05 -1.90979E-05  3.28766E-07  2.19700E-06 -5.54761E-08
 11.100  1.85706E-06 -1.07788E-06  2.46954E-07 -3.36528E-08  7.58889E-09  3.02195E-05 -1.59715E-05  5.64701E-07  1.74405E-06 -7.58600E-08
 11.200  1.55681E-06 -9.26563E-07  2.28947E-07 -3.70528E-08  9.08309E-09  2.46124E-05 -1.32893E-05  7.14992E-07  1.36900E-06 -8.64762E-08
 11.300  1.30088E-06 -7.93806E-07  2.10460E-07 -3.86122E-08  9.84558E-09  1.99408E-05 -1.09975E-05  7.96185E-07  1.06151E-06 -8.96275E-08
 11.400  1.08263E-06 -6.76992E-07  1.91581E-07 -3.87217E-08  1.00759E-08  1.60682E-05 -9.04867E-06  8.23539E-07  8.12111E-07 -8.73607E-08
 11.500  8.96763E-07 -5.74210E-07  1.72555E-07 -3.77089E-08  9.92483E-09  1.28751E-05 -7.40044E-06  8.10656E-07  6.12172E-07 -8.14243E-08
 11.600  7.38875E-07 -4.84001E-07  1.53707E-07 -3.58545E-08  9.50696E-09  1.02571E-05 -6.01472E-06  7.69277E-07  4.53893E-07 -7.32538E-08
 11.700  6.05271E-07 -4.05183E-07  1.35378E-07 -3.34004E-08  8.90955E-09  8.12323E-06 -4.85708E-06  7.09213E-07  3.30286E-07 -6.39791E-08
 11.800  4.92764E-07 -3.36733E-07  1.17886E-07 -3.05551E-08  8.19950E-09  6.39461E-06 -3.89648E-06  6.38397E-07  2.35171E-07 -5.44478E-08
 11.900  3.98560E-07 -2.77715E-07  1.01496E-07 -2.74954E-08  7.42815E-09  5.00306E-06 -3.10492E-06  5.63011E-07  1.63149E-07 -4.52596E-08
 12.000  3.20184E-07 -2.27240E-07  8.64097E-08 -2.43677E-08  6.63485E-09  3.89008E-06 -2.45736E-06  4.87671E-07  1.09577E-07 -3.68053E-08
 12.100  2.55425E-07 -1.84443E-07  7.27560E-08 -2.12892E-08  5.84943E-09  3.00574E-06 -1.93148E-06  4.15642E-07  7.05198E-08 -2.93083E-08
 12.200  2.02310E-07 -1.48484E-07  6.05969E-08 -1.83496E-08  5.09402E-09  2.30775E-06 -1.50763E-06  3.49068E-07  4.26943E-08 -2.28633E-08
 12.300  1.59076E-07 -1.18553E-07  4.99341E-08 -1.56131E-08  4.38444E-09  1.76056E-06 -1.16859E-06  2.89189E-07  2.34074E-08 -1.74718E-08
 12.400  1.24163E-07 -9.38733E-08  4.07193E-08 -1.31213E-08  3.73126E-09  1.33451E-06 -8.99458E-07  2.36551E-07  1.04870E-08 -1.30727E-08
 12.500  9.61938E-08 -7.37175E-08  3.28665E-08 -1.08966E-08  3.14069E-09  1.00505E-06 -6.87456E-07  1.91186E-07  2.21192E-09 -9.56627E-09
 12.600  7.39705E-08 -5.74125E-08  2.62632E-08 -8.94566E-09  2.61542E-09  7.52040E-07 -5.21737E-07  1.52772E-07 -2.75640E-09 -6.83412E-09
 12.700  5.64570E-08 -4.43473E-08  2.07815E-08 -7.26263E-09  2.15526E-09  5.59083E-07 -3.93190E-07  1.20758E-07 -5.43870E-09 -4.75263E-09
 12.800  4.27685E-08 -3.39763E-08  1.62864E-08 -5.83286E-09  1.75788E-09  4.12942E-07 -2.94241E-07  9.44624E-08 -6.59691E-09 -3.20284E-09
 12.900  3.21576E-08 -2.58201E-08  1.26438E-08 -4.63559E-09  1.41934E-09  3.03026E-07 -2.18656E-07  7.31549E-08 -6.78658E-09 -2.07639E-09
 13.000  2.39996E-08 -1.94646E-08  9.72555E-09 -3.64656E-09  1.13467E-09  2.20927E-07 -1.61356E-07  5.61068E-08 -6.40210E-09 -1.27877E-09
 13.100  1.77788E-08 -1.45569E-08  7.41336E-09 -2.84007E-09  8.98271E-10  1.60029E-07 -1.18246E-07  4.26288E-08 -5.71481E-09 -7.30368E-10
 13.200  1.30735E-08 -1.08010E-08  5.60084E-09 -2.19051E-09  7.04313E-10  1.15168E-07 -8.60552E-08  3.20938E-08 -4.90427E-09 -3.66220E-10
 13.300  9.54311E-09 -7.95180E-09  4.19467E-09 -1.67349E-09  5.47031E-10  8.23491E-08 -6.21974E-08  2.39481E-08 -4.08327E-09 -1.34779E-10
 13.400  6.91544E-09 -5.80907E-09  3.11470E-09 -1.26666E-09  4.20929E-10  5.85036E-08 -4.46463E-08  1.77153E-08 -3.31743E-09  3.76656E-12
 13.500  4.97510E-09 -4.21138E-09  2.29336E-09 -9.50015E-10  3.20936E-10  4.12963E-08 -3.18298E-08  1.29937E-08 -2.64022E-09  7.93601E-11
 13.600  3.55351E-09 -3.03006E-09  1.67466E-09 -7.06185E-10  2.42493E-10  2.89636E-08 -2.25388E-08  9.45162E-09 -2.06399E-09  1.13926E-10
 13.700  2.52006E-09 -2.16384E-09  1.21293E-09 -5.20350E-10  1.81598E-10  2.01845E-08 -1.58524E-08  6.81923E-09 -1.58810E-09  1.23071E-10
 13.800  1.77454E-09 -1.53383E-09  8.71477E-10 -3.80130E-10  1.34807E-10  1.39770E-08 -1.10750E-08  4.88073E-09 -1.20452E-09  1.17558E-10
 13.900  1.24081E-09 -1.07929E-09  6.21209E-10 -2.75355E-10  9.92096E-11  9.61730E-09 -7.68582E-09  3.46589E-09 -9.01625E-10  1.04553E-10
 14.000  8.61570E-10 -7.53960E-10  4.39370E-10 -1.97807E-10  7.23921E-11  6.57574E-09 -5.29851E-09  2.44220E-09 -6.66693E-10  8.86137E-11
 14.100  5.94111E-10 -5.22917E-10  3.08376E-10 -1.40939E-10  5.23813E-11  4.46786E-09 -3.62870E-09  1.70779E-09 -4.87355E-10  7.24747E-11
 14.200  4.06873E-10 -3.60101E-10  2.14800E-10 -9.96145E-11  3.75889E-11  3.01668E-09 -2.46887E-09  1.18529E-09 -3.52417E-10  5.76322E-11
 14.300  2.76750E-10 -2.46236E-10  1.48502E-10 -6.98497E-11  2.67539E-11  2.02415E-09 -1.66883E-09  8.16572E-10 -2.52226E-10  4.47784E-11
 14.400  1.86972E-10 -1.67203E-10  1.01910E-10 -4.85968E-11  1.88889E-11  1.34975E-09 -1.12075E-09  5.58454E-10 -1.78746E-10  3.41088E-11
 14.500  1.25472E-10 -1.12754E-10  6.94262E-11 -3.35505E-11  1.32301E-11  8.94484E-10 -7.47837E-10  3.79178E-10 -1.25478E-10  2.55340E-11
 14.600  8.36409E-11 -7.55155E-11  4.69561E-11 -2.29870E-11  9.19395E-12  5.89129E-10 -4.95815E-10  2.55622E-10 -8.72810E-11  1.88198E-11
 14.700  5.53881E-11 -5.02329E-11  3.15324E-11 -1.56315E-11  6.33960E-12  3.85636E-10 -3.26636E-10  1.71116E-10 -6.01760E-11  1.36763E-11
 14.800  3.64384E-11 -3.31904E-11  2.10257E-11 -1.05510E-11  4.33795E-12  2.50892E-10 -2.13823E-10  1.13750E-10 -4.11328E-11  9.80972E-12
 14.900  2.38159E-11 -2.17837E-11  1.39222E-11 -7.06973E-12  2.94583E-12  1.62237E-10 -1.39094E-10  7.50949E-11 -2.78813E-11  6.95130E-12
 15.000  1.54654E-11 -1.42027E-11  9.15492E-12 -4.70285E-12  1.98550E-12  1.04274E-10 -8.99166E-11  4.92382E-11 -1.87449E-11  4.86983E-12
 15.100  9.97834E-12 -9.19924E-12  5.97893E-12 -3.10603E-12  1.32833E-12  6.66153E-11 -5.77647E-11  3.20666E-11 -1.25020E-11  3.37491E-12
 15.200  6.39703E-12 -5.91966E-12  3.87831E-12 -2.03689E-12  8.82171E-13  4.23018E-11 -3.68801E-11  2.07439E-11 -8.27323E-12  2.31492E-12
 15.300  4.07511E-12 -3.78466E-12  2.49883E-12 -1.32642E-12  5.81622E-13  2.67018E-11 -2.34014E-11  1.33303E-11 -5.43290E-12  1.57225E-12
 15.400  2.57964E-12 -2.40416E-12  1.59931E-12 -8.57783E-13  3.80719E-13  1.67544E-11 -1.47579E-11  8.50997E-12 -3.54087E-12  1.05775E-12
 15.500  1.62276E-12 -1.51748E-12  1.01685E-12 -5.50913E-13  2.47442E-13  1.04504E-11 -9.25032E-12  5.39731E-12 -2.29068E-12  7.05116E-13
 15.600  1.01447E-12 -9.51765E-13  6.42288E-13 -3.51421E-13  1.59690E-13  6.47989E-12 -5.76300E-12  3.40102E-12 -1.47111E-12  4.65889E-13
 15.700  6.30282E-13 -5.93196E-13  4.03066E-13 -2.22658E-13  1.02340E-13  3.99428E-12 -3.56874E-12  2.12936E-12 -9.37988E-13  3.05181E-13
 15.800  3.89183E-13 -3.67408E-13  2.51315E-13 -1.40132E-13  6.51337E-14  2.44769E-12 -2.19668E-12  1.32469E-12 -5.93834E-13  1.98237E-13
 15.900  2.38842E-13 -2.26150E-13  1.55695E-13 -8.76103E-14  4.11704E-14  1.49119E-12 -1.34406E-12  8.18888E-13 -3.73326E-13  1.27718E-13
 16.000  1.45688E-13 -1.38343E-13  9.58447E-14 -5.44142E-14  2.58468E-14  9.03180E-13 -8.17483E-13  5.03039E-13 -2.33080E-13  8.16277E-14
 16.100  8.83287E-14 -8.41108E-14  5.86296E-14 -3.35761E-14  1.61176E-14  5.43868E-13 -4.94268E-13  3.07088E-13 -1.44527E-13  5.17624E-14
 16.200  5.32309E-14 -5.08266E-14  3.56402E-14 -2.05842E-14  9.98353E-15  3.25610E-13 -2.97084E-13  1.86306E-13 -8.90131E-14  3.25723E-14
 16.300  3.18875E-14 -3.05276E-14  2.15306E-14 -1.25384E-14  6.14306E-15  1.93820E-13 -1.77517E-13  1.12333E-13 -5.44565E-14  2.03423E-14
 16.400  1.89883E-14 -1.82251E-14  1.29265E-14 -7.58885E-15  3.75512E-15  1.14710E-13 -1.05453E-13  6.73172E-14 -3.30953E-14  1.26102E-14
 16.500  1.12402E-14 -1.08153E-14  7.71315E-15 -4.56410E-15  2.28046E-15  6.75020E-14 -6.22791E-14  4.00954E-14 -1.99816E-14  7.76012E-15
 16.600  6.61447E-15 -6.37984E-15  4.57431E-15 -2.72771E-15  1.37595E-15  3.94961E-14 -3.65681E-14  2.37373E-14 -1.19859E-14  4.74116E-15
 16.700  3.86957E-15 -3.74110E-15  2.69636E-15 -1.62003E-15  8.24862E-16  2.29784E-14 -2.13476E-14  1.39684E-14 -7.14343E-15  2.87617E-15
 16.800  2.25054E-15 -2.18081E-15  1.57980E-15 -9.56198E-16  4.91339E-16  1.32930E-14 -1.23906E-14  8.17072E-15 -4.23025E-15  1.73260E-15
 16.900  1.30131E-15 -1.26381E-15  9.20061E-16 -5.60905E-16  2.90817E-16  7.64672E-15 -7.15060E-15  4.75097E-15 -2.48926E-15  1.03651E-15
 17.000  7.48090E-16 -7.28110E-16  5.32638E-16 -3.27011E-16  1.71047E-16  4.37401E-15 -4.10306E-15  2.74617E-15 -1.45559E-15  6.15854E-16
 17.100  4.27580E-16 -4.17042E-16  3.06523E-16 -1.89490E-16  9.99734E-17  2.48797E-15 -2.34098E-15  1.57801E-15 -8.45853E-16  3.63448E-16
 17.200  2.42987E-16 -2.37488E-16  1.75357E-16 -1.09137E-16  5.80692E-17  1.40728E-15 -1.32807E-15  9.01442E-16 -4.88490E-16  2.13059E-16
 17.300  1.37297E-16 -1.34459E-16  9.97296E-17 -6.24793E-17  3.35208E-17  7.91576E-16 -7.49185E-16  5.11949E-16 -2.80375E-16  1.24074E-16
 17.400  7.71362E-17 -7.56904E-17  5.63870E-17 -3.55544E-17  1.92312E-17  4.42781E-16 -4.20249E-16  2.89060E-16 -1.59943E-16  7.17809E-17
 17.500  4.30910E-17 -4.23643E-17  3.16957E-17 -2.01121E-17  1.09658E-17  2.46307E-16 -2.34414E-16  1.62268E-16 -9.06877E-17  4.12586E-17
 17.600  2.39362E-17 -2.35765E-17  1.77133E-17 -1.13094E-17  6.21476E-18  1.36258E-16 -1.30025E-16  9.05674E-17 -5.11101E-17  2.35625E-17
 17.700  1.32213E-17 -1.30464E-17  9.84206E-18 -6.32204E-18  3.50089E-18  7.49641E-17 -7.17213E-17  5.02593E-17 -2.86323E-17  1.33707E-17
 17.800  7.26192E-18 -7.17859E-18  5.43717E-18 -3.51333E-18  1.96027E-18  4.10163E-17 -3.93416E-17  2.77316E-17 -1.59444E-17  7.53935E-18
 17.900  3.96639E-18 -3.92769E-18  2.98655E-18 -1.94106E-18  1.09106E-18  2.23192E-17 -2.14608E-17  1.52146E-17 -8.82639E-18  4.22457E-18
 18.000  2.15434E-18 -2.13695E-18  1.63113E-18 -1.06617E-18  6.03659E-19  1.20789E-17 -1.16423E-17  8.30005E-18 -4.85725E-18  2.35245E-18
 18.100  1.16363E-18 -1.15616E-18  8.85802E-19 -5.82232E-19  3.32014E-19  6.50136E-18 -6.28113E-18  4.50242E-18 -2.65732E-18  1.30187E-18
 18.200  6.25044E-19 -6.22034E-19  4.78328E-19 -3.16123E-19  1.81533E-19  3.48033E-18 -3.37015E-18  2.42865E-18 -1.44530E-18  7.16053E-19
 18.300  3.33890E-19 -3.32810E-19  2.56841E-19 -1.70655E-19  9.86739E-20  1.85302E-18 -1.79837E-18  1.30271E-18 -7.81528E-19  3.91441E-19
 18.400  1.77380E-19 -1.77080E-19  1.37139E-19 -9.16001E-20  5.33221E-20  9.81275E-19 -9.54415E-19  6.94864E-19 -4.20161E-19  2.12692E-19
 18.500  9.37172E-20 -9.37008E-20  7.28158E-20 -4.88872E-20  2.86472E-20  5.16840E-19 -5.03765E-19  3.68581E-19 -2.24586E-19  1.14872E-19
 18.600  4.92443E-20 -4.93087E-20  3.84474E-20 -2.59434E-20  1.53016E-20  2.70759E-19 -2.64459E-19  1.94426E-19 -1.19360E-19  6.16700E-20
 18.700  2.57348E-20 -2.58059E-20  2.01880E-20 -1.36899E-20  8.12615E-21  1.41084E-19 -1.38081E-19  1.01994E-19 -6.30739E-20  3.29111E-20
 18.800  1.33759E-20 -1.34319E-20  1.05417E-20 -7.18336E-21  4.29077E-21  7.31215E-20 -7.17070E-20  5.32103E-20 -3.31414E-20  1.74597E-20
 18.900  6.91457E-21 -6.95320E-21  5.47435E-21 -3.74813E-21  2.25267E-21  3.76956E-20 -3.70381E-20  2.76077E-20 -1.73154E-20  9.20809E-21
 19.000  3.55514E-21 -3.57988E-21  2.82723E-21 -1.94479E-21  1.17593E-21  1.93294E-20 -1.90282E-20  1.42457E-20 -8.99583E-21  4.82786E-21
 19.100  1.81805E-21 -1.83314E-21  1.45213E-21 -1.00348E-21  6.10378E-22  9.85908E-21 -9.72342E-21  7.31078E-21 -4.64739E-21  2.51655E-21
 19.200  9.24728E-22 -9.33624E-22  7.41782E-22 -5.14907E-22  3.15034E-22  5.00204E-21 -4.94214E-21  3.73145E-21 -2.38750E-21  1.30417E-21
 19.300  4.67833E-22 -4.72938E-22  3.76857E-22 -2.62752E-22  1.61684E-22  2.52440E-21 -2.49858E-21  1.89423E-21 -1.21971E-21  6.71973E-22
 19.400  2.35419E-22 -2.38287E-22  1.90421E-22 -1.33341E-22  8.25153E-23  1.26728E-21 -1.25648E-21  9.56388E-22 -6.19661E-22  3.44249E-22
 19.500  1.17834E-22 -1.19416E-22  9.56968E-23 -6.72968E-23  4.18766E-23  6.32839E-22 -6.28512E-22  4.80274E-22 -3.13074E-22  1.75350E-22
 19.600  5.86660E-23 -5.95255E-23  4.78335E-23 -3.37787E-23  2.11342E-23  3.14361E-22 -3.12728E-22  2.39886E-22 -1.57304E-22  8.88100E-23
 19.700  2.90531E-23 -2.95136E-23  2.37807E-23 -1.68622E-23  1.06068E-23  1.55340E-22 -1.54783E-22  1.19176E-22 -7.86041E-23  4.47253E-23
 19.800  1.43119E-23 -1.45556E-23  1.17593E-23 -8.37184E-24  5.29389E-24  7.63588E-23 -7.62056E-23  5.88900E-23 -3.90632E-23  2.23970E-23
 19.900  7.01294E-24 -7.14048E-24  5.78374E-24 -4.13396E-24  2.62765E-24  3.73390E-23 -3.73218E-23  2.89451E-23 -1.93071E-23  1.11527E-23
  67 187 200   0.100
  0.000  5.84655E-02 -3.10317E-16 -4.26742E-16 -7.38047E-16  5.57891E-16  9.02331E-02 -4.80991E-16 -6.24500E-16 -1.40104E-15  2.18865E-15
  0.100  5.84444E-02  4.36578E-05 -5.74795E-09 -4.12716E-12 -1.77381E-15  9.03270E-02 -7.13034E-05  2.44082E-08  8.85765E-12 -2.20725E-14
  0.200  5.83827E-02  1.72231E-04 -9.06025E-08 -2.63153E-10  2.77243E-13  9.06040E-02 -2.80896E-04  3.86095E-07  5.62895E-10 -6.90755E-13
  0.300  5.82845E-02  3.78635E-04 -4.47263E-07 -2.97765E-09  7.05309E-12  9.10505E-02 -6.16072E-04  1.91752E-06  6.35374E-09 -1.78623E-11
  0.400  5.81566E-02  6.51442E-04 -1.36376E-06 -1.65758E-08  6.97869E-11  9.16447E-02 -1.05647E-03  5.89853E-06  3.52484E-08 -1.77746E-10
  0.500  5.80080E-02  9.75442E-04 -3.17602E-06 -6.24822E-08  4.10838E-10  9.23576E-02 -1.57527E-03  1.39025E-05  1.32282E-07 -1.05569E-09
  0.600  5.78492E-02  1.33238E-03 -6.20596E-06 -1.83872E-07  1.74014E-09  9.31549E-02 -2.14071E-03  2.75962E-05  3.87182E-07 -4.51736E-09
  0.700  5.76916E-02  1.70188E-03 -1.06898E-05 -4.55739E-07  5.86771E-09  9.39988E-02 -2.71799E-03  4.85081E-05  9.53557E-07 -1.54053E-08
  0.800  5.75471E-02  2.06245E-03 -1.67022E-05 -9.95472E-07  1.67329E-08  9.48499E-02 -3.27127E-03  7.77839E-05  2.06762E-06 -4.44620E-08
  0.900  5.74269E-02  2.39260E-03 -2.40833E-05 -1.97303E-06  4.19583E-08  9.56695E-02 -3.76580E-03  1.15951E-04  4.06419E-06 -1.12883E-07
  1.000  5.73410E-02  2.67193E-03 -3.23768E-05 -3.61972E-06  9.50077E-08  9.64221E-02 -4.17001E-03  1.62718E-04  7.38773E-06 -2.58818E-07
  1.100  5.72977E-02  2.88226E-03 -4.07857E-05 -6.23461E-06  1.97980E-07  9.70768E-02 -4.45733E-03  2.16822E-04  1.25965E-05 -5.45983E-07
  1.200  5.73026E-02  3.00858E-03 -4.81554E-05 -1.01874E-05  3.85007E-07  9.76092E-02 -4.60784E-03  2.75969E-04  2.03578E-05 -1.07429E-06
  1.300  5.73587E-02  3.03990E-03 -5.29883E-05 -1.59166E-05  7.06129E-07  9.80027E-02 -4.60948E-03  3.36847E-04  3.14331E-05 -1.99202E-06
  1.400  5.74660E-02  2.96991E-03 -5.34962E-05 -2.39230E-05  1.23144E-06  9.82492E-02 -4.45874E-03  3.95266E-04  4.66525E-05 -3.50874E-06
  1.500  5.76210E-02  2.79733E-03 -4.76900E-05 -3.47553E-05  2.05514E-06  9.83495E-02 -4.16091E-03  4.46384E-04  6.68771E-05 -5.90751E-06
  1.600  5.78177E-02  2.52608E-03 -3.35061E-05 -4.89906E-05  3.29911E-06  9.83125E-02 -3.72974E-03  4.85034E-04  9.29505E-05 -9.55479E-06
  1.700  5.80471E-02  2.16508E-03 -8.96124E-06 -6.72063E-05  5.11535E-06  9.81548E-02 -3.18662E-03  5.06131E-04  1.25640E-04 -1.49058E-05
  1.800  5.82984E-02  1.72783E-03  2.76728E-05 -8.99467E-05  7.68678E-06  9.78992E-02 -2.55920E-03  5.05110E-04  1.65571E-04 -2.25033E-05
  1.900  5.85592E-02  1.23168E-03  7.76893E-05 -1.17683E-04  1.12256E-05  9.75728E-02 -1.87974E-03  4.78382E-04  2.13152E-04 -3.29675E-05
  2.000  5.88165E-02  6.96920E-04  1.41777E-04 -1.50768E-04  1.59691E-05  9.72051E-02 -1.18305E-03  4.23738E-04  2.68503E-04 -4.69757E-05
  2.100  5.90574E-02  1.45675E-04  2.19879E-04 -1.89396E-04  2.21712E-05  9.68260E-02 -5.04398E-04  3.40690E-04  3.31386E-04 -6.52305E-05
  2.200  5.92699E-02 -3.99291E-04  3.11090E-04 -2.33556E-04  3.00918E-05  9.64637E-02  1.22721E-04  2.30678E-04  4.01143E-04 -8.84162E-05
  2.300  5.94437E-02 -9.15786E-04  4.13612E-04 -2.82993E-04  3.99817E-05  9.61429E-02  6.68578E-04  9.71395E-05  4.76651E-04 -1.17146E-04
  2.400  5.95706E-02 -1.38336E-03  5.24777E-04 -3.37186E-04  5.20647E-05  9.58828E-02  1.10900E-03 -5.45891E-05  5.56304E-04 -1.51902E-04
  2.500  5.96455E-02 -1.78436E-03  6.41124E-04 -3.95331E-04  6.65186E-05  9.56969E-02  1.42675E-03 -2.17537E-04  6.38013E-04 -1.92970E-04
  2.600  5.96657E-02 -2.10477E-03  7.58554E-04 -4.56338E-04  8.34547E-05  9.55913E-02  1.61245E-03 -3.83515E-04  7.19252E-04 -2.40378E-04
  2.700  5.96320E-02 -2.33488E-03  8.72520E-04 -5.18859E-04  1.02899E-04  9.55656E-02  1.66498E-03 -5.43655E-04  7.97126E-04 -2.93842E-04
  2.800  5.95480E-02 -2.46968E-03  9.78274E-04 -5.81318E-04  1.24778E-04  9.56125E-02  1.59126E-03 -6.89034E-04  8.68484E-04 -3.52721E-04
  2.900  5.94200E-02 -2.50894E-03  1.07111E-03 -6.41969E-04  1.48904E-04  9.57191E-02  1.40558E-03 -8.11328E-04  9.30056E-04 -4.15996E-04
  3.000  5.92562E-02 -2.45711E-03  1.14664E-03 -6.98967E-04  1.74974E-04  9.58678E-02  1.12841E-03 -9.03445E-04  9.78620E-04 -4.82268E-04
  3.100  5.90668E-02 -2.32298E-03  1.20099E-03 -7.50443E-04  2.02571E-04  9.60380E-02  7.84771E-04 -9.60093E-04  1.01118E-03 -5.49783E-04
  3.200  5.88624E-02 -2.11912E-03  1.23104E-03 -7.94588E-04  2.31176E-04  9.62077E-02  4.02371E-04 -9.78217E-04  1.02516E-03 -6.16479E-04
  3.300  5.86542E-02 -1.86119E-03  1.23453E-03 -8.29739E-04  2.60188E-04  9.63549E-02  9.56936E-06 -9.57293E-04  1.01856E-03 -6.80062E-04
  3.400  5.84525E-02 -1.56717E-03  1.21018E-03 -8.54450E-04  2.88948E-04  9.64591E-02 -3.66694E-04 -8.99440E-04  9.90154E-04 -7.38104E-04
  3.500  5.82665E-02 -1.25653E-03  1.15769E-03 -8.67555E-04  3.16770E-04  9.65027E-02 -7.02838E-04 -8.09346E-04  9.39557E-04 -7.88147E-04
  3.600  5.81032E-02 -9.49422E-04  1.07772E-03 -8.68210E-04  3.42980E-04  9.64719E-02 -9.80340E-04 -6.94011E-04  8.67362E-04 -8.27827E-04
  3.700  5.79674E-02 -6.65852E-04  9.71813E-04 -8.55921E-04  3.66946E-04  9.63570E-02 -1.18707E-03 -5.62328E-04  7.75145E-04 -8.54993E-04
  3.800  5.78609E-02 -4.24969E-04  8.42291E-04 -8.30548E-04  3.88112E-04  9.61531E-02 -1.31816E-03 -4.24535E-04  6.65459E-04 -8.67818E-04
  3.900  5.77820E-02 -2.44391E-04  6.92123E-04 -7.92286E-04  4.06023E-04  9.58593E-02 -1.37643E-03 -2.91565E-04  5.41756E-04 -8.64904E-04
  4.000  5.77259E-02 -1.39624E-04  5.24790E-04 -7.41636E-04  4.20346E-04  9.54785E-02 -1.37218E-03 -1.74348E-04  4.08276E-04 -8.45357E-04
  4.100  5.76841E-02 -1.23567E-04  3.44155E-04 -6.79366E-04  4.30879E-04  9.50160E-02 -1.32257E-03 -8.31036E-05  2.69873E-04 -8.08847E-04
  4.200  5.76450E-02 -2.06096E-04  1.54347E-04 -6.06452E-04  4.37549E-04  9.44790E-02 -1.25042E-03 -2.66822E-05  1.31818E-04 -7.55639E-04
  4.300  5.75937E-02 -3.93738E-04 -4.03378E-05 -5.24040E-04  4.40406E-04  9.38745E-02 -1.18268E-03 -1.19757E-05 -4.30181E-07 -6.86596E-04
  4.400  5.75127E-02 -6.89427E-04 -2.35520E-04 -4.33388E-04  4.39602E-04  9.32087E-02 -1.14851E-03 -4.34564E-05 -1.21474E-04 -6.03154E-04
  4.500  5.73822E-02 -1.09234E-03 -4.26808E-04 -3.35841E-04  4.35367E-04  9.24853E-02 -1.17730E-03 -1.22861E-04 -2.26224E-04 -5.07273E-04
  4.600  5.71811E-02 -1.59785E-03 -6.09864E-04 -2.32796E-04  4.27983E-04  9.17045E-02 -1.29647E-03 -2.49045E-04 -3.10144E-04 -4.01367E-04
  4.700  5.68872E-02 -2.19754E-03 -7.80473E-04 -1.25691E-04  4.17756E-04  9.08623E-02 -1.52953E-03 -4.18017E-04 -3.69472E-04 -2.88211E-04
  4.800  5.64784E-02 -2.87940E-03 -9.34621E-04 -1.59994E-05  4.04988E-04  8.99499E-02 -1.89426E-03 -6.23154E-04 -4.01416E-04 -1.70838E-04
  4.900  5.59335E-02 -3.62811E-03 -1.06859E-03  9.47662E-05  3.89960E-04  8.89539E-02 -2.40128E-03 -8.55579E-04 -4.04298E-04 -5.24207E-05
  5.000  5.52330E-02 -4.42545E-03 -1.17907E-03  2.05050E-04  3.72914E-04  8.78566E-02 -3.05307E-03 -1.10469E-03 -3.77656E-04  6.38520E-05
  5.100  5.43601E-02 -5.25086E-03 -1.26329E-03  3.13252E-04  3.54055E-04  8.66369E-02 -3.84354E-03 -1.35878E-03 -3.22284E-04  1.74896E-04
  5.200  5.33013E-02 -6.08216E-03 -1.31911E-03  4.17728E-04  3.33547E-04  8.52711E-02 -4.75808E-03 -1.60575E-03 -2.40204E-04  2.77852E-04
  5.300  5.20475E-02 -6.89631E-03 -1.34521E-03  5.16812E-04  3.11528E-04  8.37350E-02 -5.77426E-03 -1.83384E-03 -1.34580E-04  3.70197E-04
  5.400  5.05941E-02 -7.67030E-03 -1.34113E-03  6.08838E-04  2.88125E-04  8.20052E-02 -6.86296E-03 -2.03229E-03 -9.56783E-06  4.49838E-04
  5.500  4.89418E-02 -8.38204E-03 -1.30742E-03  6.92190E-04  2.63472E-04  8.00609E-02 -7.98996E-03 -2.19198E-03  1.29889E-04  5.15189E-04
  5.600  4.70967E-02 -9.01127E-03 -1.24559E-03  7.65353E-04  2.37731E-04  7.78857E-02 -9.11782E-03 -2.30593E-03  2.78306E-04  5.65222E-04
  5.700  4.50705E-02 -9.54037E-03 -1.15815E-03  8.26981E-04  2.11105E-04  7.54689E-02 -1.02080E-02 -2.36963E-03  4.29935E-04  5.99496E-04
  5.800  4.28797E-02 -9.95511E-03 -1.04851E-03  8.75962E-04  1.83853E-04  7.28070E-02 -1.12228E-02 -2.38122E-03  5.79051E-04  6.18150E-04
  5.900  4.05458E-02 -1.02452E-02 -9.20852E-04  9.11486E-04  1.56293E-04  6.99043E-02 -1.21276E-02 -2.34151E-03  7.20235E-04  6.21877E-04
  6.000  3.80943E-02 -1.04046E-02 -7.79920E-04  9.33094E-04  1.28797E-04  6.67733E-02 -1.28925E-02 -2.25376E-03  8.48628E-04  6.11861E-04
  6.100  3.55539E-02 -1.04318E-02 -6.30824E-04  9.40723E-04  1.01783E-04  6.34349E-02 -1.34935E-02 -2.12340E-03  9.60152E-04  5.89704E-04
  6.200  3.29556E-02 -1.03296E-02 -4.78772E-04  9.34722E-04  7.56943E-05  5.99172E-02 -1.39138E-02 -1.95755E-03  1.05167E-03  5.57318E-04
  6.300  3.03316E-02 -1.01051E-02 -3.28824E-04  9.15843E-04  5.09793E-05  5.62553E-02 -1.41445E-02 -1.76453E-03  1.12108E-03  5.16825E-04
  6.400  2.77142E-02 -9.76883E-03 -1.85647E-04  8.85218E-04  2.80647E-05  5.24890E-02 -1.41840E-02 -1.55326E-03  1.16737E-03  4.70435E-04
  6.500  2.51347E-02 -9.33448E-03 -5.33071E-05  8.44302E-04  7.33118E-06  4.86620E-02 -1.40381E-02 -1.33271E-03  1.19056E-03  4.20342E-04
  6.600  2.26224E-02 -8.81794E-03  6.48946E-05  7.94804E-04 -1.09099E-05  4.48198E-02 -1.37191E-02 -1.11143E-03  1.19163E-03  3.68620E-04
  6.700  2.02040E-02 -8.23656E-03  1.66532E-04  7.38603E-04 -2.64341E-05  4.10076E-02 -1.32450E-02 -8.97055E-04  1.17238E-03  3.17138E-04
  6.800  1.79024E-02 -7.60836E-03  2.50104E-04  6.77656E-04 -3.91159E-05  3.72693E-02 -1.26375E-02 -6.96044E-04  1.13524E-03  2.67497E-04
  6.900  1.57366E-02 -6.95116E-03  3.15025E-04  6.13907E-04 -4.89331E-05  3.36451E-02 -1.19215E-02 -5.13421E-04  1.08311E-03  2.20986E-04
  7.000  1.37213E-02 -6.28199E-03  3.61556E-04  5.49204E-04 -5.59645E-05  3.01707E-02 -1.11231E-02 -3.52701E-04  1.01914E-03  1.78566E-04
  7.100  1.18666E-02 -5.61636E-03  3.90705E-04  4.85225E-04 -6.03800E-05  2.68765E-02 -1.02685E-02 -2.15899E-04  9.46539E-04  1.40865E-04
  7.200  1.01784E-02 -4.96794E-03  4.04076E-04  4.23422E-04 -6.24267E-05  2.37864E-02 -9.38276E-03 -1.03638E-04  8.68419E-04  1.08207E-04
  7.300  8.65822E-03 -4.34812E-03  4.03715E-04  3.64980E-04 -6.24094E-05  2.09178E-02 -8.48909E-03 -1.53338E-05  7.87651E-04  8.06419E-05
  7.400  7.30408E-03 -3.76595E-03  3.91940E-04  3.10805E-04 -6.06703E-05  1.82819E-02 -7.60782E-03  5.05778E-05  7.06765E-04  5.79938E-05
  7.500  6.11065E-03 -3.22804E-03  3.71183E-04  2.61515E-04 -5.75682E-05  1.58834E-02 -6.75611E-03  9.63852E-05  6.27880E-04  3.99125E-05
  7.600  5.06994E-03 -2.73868E-03  3.43846E-04  2.17461E-04 -5.34588E-05  1.37216E-02 -5.94766E-03  1.24845E-04  5.52674E-04  2.59257E-05
  7.700  4.17189E-03 -2.30003E-03  3.12184E-04  1.78752E-04 -4.86774E-05  1.17910E-02 -5.19272E-03  1.38941E-04  4.82384E-04  1.54896E-05
  7.800  3.40497E-03 -1.91239E-03  2.78213E-04  1.45291E-04 -4.35264E-05  1.00818E-02 -4.49821E-03  1.41679E-04  4.17831E-04  8.03269E-06
  7.900  2.75675E-03 -1.57449E-03  2.43652E-04  1.16819E-04 -3.82652E-05  8.58131E-03 -3.86805E-03  1.35913E-04  3.59466E-04  2.99241E-06
  8.000  2.21441E-03 -1.28381E-03  2.09890E-04  9.29591E-05 -3.31057E-05  7.27431E-03 -3.30352E-03  1.24228E-04  3.07424E-04 -1.56708E-07
  8.100  1.76518E-03 -1.03695E-03  1.77983E-04  7.32539E-05 -2.82104E-05  6.14428E-03 -2.80374E-03  1.08855E-04  2.61593E-04 -1.88412E-06
  8.200  1.39674E-03 -8.29907E-04  1.48666E-04  5.72062E-05 -2.36943E-05  5.17395E-03 -2.36611E-03  9.16354E-05  2.21669E-04 -2.59228E-06
  8.300  1.09746E-03 -6.58338E-04  1.22391E-04  4.43100E-05 -1.96294E-05  4.34598E-03 -1.98676E-03  7.40126E-05  1.87220E-04 -2.61273E-06
  8.400  8.56637E-04 -5.17824E-04  9.93629E-05  3.40748E-05 -1.60506E-05  3.64348E-03 -1.66099E-03  5.70557E-05  1.57739E-04 -2.20774E-06
  8.500  6.64617E-04 -4.04043E-04  7.95923E-05  2.60448E-05 -1.29624E-05  3.05042E-03 -1.38360E-03  4.14979E-05  1.32681E-04 -1.57595E-06
  8.600  5.12845E-04 -3.12908E-04  6.29397E-05  1.98099E-05 -1.03466E-05  2.55189E-03 -1.14924E-03  2.77869E-05  1.11503E-04 -8.60559E-07
  8.700  3.93880E-04 -2.40672E-04  4.91625E-05  1.50127E-05 -8.16847E-06  2.13430E-03 -9.52591E-04  1.61406E-05  9.36820E-05 -1.58626E-07
  8.800  3.01359E-04 -1.83984E-04  3.79555E-05  1.13495E-05 -6.38351E-06  1.78547E-03 -7.88579E-04  6.60043E-06  7.87351E-05  4.69385E-07
  8.900  2.29920E-04 -1.39910E-04  2.89837E-05  8.56849E-06 -4.94212E-06  1.49466E-03 -6.52498E-04 -9.18271E-07  6.62266E-05  9.90753E-07
  9.000  1.75117E-04 -1.05943E-04  2.19091E-05  6.46591E-06 -3.79384E-06  1.25248E-03 -5.40073E-04 -6.58393E-06  5.57721E-05  1.39272E-06
  9.100  1.33314E-04 -7.99712E-05  1.64094E-05  4.87979E-06 -2.89031E-06  1.05089E-03 -4.47502E-04 -1.06135E-05  4.70377E-05  1.67607E-06
  9.200  1.01576E-04 -6.02546E-05  1.21908E-05  3.68394E-06 -2.18720E-06  8.83021E-04 -3.71456E-04 -1.32454E-05  3.97377E-05  1.85007E-06
  9.300  7.75674E-05 -4.53790E-05  8.99485E-06  2.78153E-06 -1.64537E-06  7.43077E-04 -3.09071E-04 -1.47199E-05  3.36299E-05  1.92868E-06
  9.400  5.94494E-05 -3.42136E-05  6.60146E-06  2.09927E-06 -1.23132E-06  6.26219E-04 -2.57906E-04 -1.52659E-05  2.85107E-05  1.92795E-06
  9.500  4.57917E-05 -2.58668E-05  4.82790E-06  1.58222E-06 -9.17104E-07  5.28430E-04 -2.15911E-04 -1.50925E-05  2.42099E-05  1.86419E-06
  9.600  3.54929E-05 -1.96448E-05  3.52624E-06  1.18945E-06 -6.79976E-07  4.46392E-04 -1.81379E-04 -1.43845E-05  2.05862E-05  1.75291E-06
  9.700  2.77128E-05 -1.50138E-05  2.57924E-06  8.90540E-07 -5.01781E-07  3.77381E-04 -1.52902E-04 -1.33013E-05  1.75225E-05  1.60817E-06
  9.800  2.18158E-05 -1.15676E-05  1.89578E-06  6.62841E-07 -3.68289E-07  3.19167E-04 -1.29330E-04 -1.19767E-05  1.49227E-05  1.44230E-06
  9.900  1.73244E-05 -8.99959E-06  1.40616E-06  4.89387E-07 -2.68514E-07  2.69928E-04 -1.09727E-04 -1.05205E-05  1.27076E-05  1.26577E-06
 10.000  1.38818E-05 -7.08040E-06  1.05786E-06  3.57383E-07 -1.94073E-07  2.28180E-04 -9.33389E-05 -9.02069E-06  1.08129E-05  1.08721E-06
 10.100  1.12227E-05 -5.63930E-06  8.11751E-07  2.57095E-07 -1.38631E-07  1.92710E-04 -7.95606E-05 -7.54540E-06  9.18623E-06  9.13514E-07
 10.200  9.15045E-06 -4.54987E-06  6.38910E-07  1.81072E-07 -9.74297E-08  1.62525E-04 -6.79094E-05 -6.14553E-06  7.78534E-06  7.49933E-07
 10.300  7.51940E-06 -3.71890E-06  5.18110E-07  1.23585E-07 -6.69062E-08  1.36812E-04 -5.80018E-05 -4.85698E-06  6.57612E-06  6.00222E-07
 10.400  6.22189E-06 -3.07781E-06  4.33833E-07  8.02323E-08 -4.43951E-08  1.14899E-04 -4.95335E-05 -3.70286E-06  5.53106E-06  4.66803E-07
 10.500  5.17824E-06 -2.57636E-06  3.74771E-07  4.76391E-08 -2.78995E-08  9.62284E-05 -4.22636E-05 -2.69560E-06  4.62791E-06  3.50932E-07
 10.600  4.32949E-06 -2.17782E-06  3.32722E-07  2.32375E-08 -1.59200E-08  8.03357E-05 -3.60010E-05 -1.83892E-06  3.84851E-06  2.52880E-07
 10.700  3.63186E-06 -1.85547E-06  3.01781E-07  5.08798E-09 -7.32724E-09  6.68284E-05 -3.05936E-05 -1.12963E-06  3.17780E-06  1.72127E-07
 10.800  3.05282E-06 -1.58996E-06  2.77756E-07 -8.26277E-09 -1.26887E-09  5.53738E-05 -2.59191E-05 -5.59351E-07  2.60310E-06  1.07539E-07
 10.900  2.56807E-06 -1.36737E-06  2.57736E-07 -1.78986E-08  2.89932E-09  4.56871E-05 -2.18785E-05 -1.16020E-07  2.11341E-06  5.75551E-08
 11.000  2.15939E-06 -1.17779E-06  2.39780E-07 -2.46285E-08  5.66407E-09  3.75230E-05 -1.83898E-05  2.14770E-07  1.69904E-06  2.03515E-08
 11.100  1.81299E-06 -1.01416E-06  2.22674E-07 -2.90617E-08  7.39266E-09  3.06688E-05 -1.53847E-05  4.48608E-07  1.35124E-06 -6.01386E-09
 11.200  1.51834E-06 -8.71541E-07  2.05741E-07 -3.16664E-08  8.36168E-09  2.49393E-05 -1.28044E-05  6.01307E-07  1.06200E-06 -2.34788E-08
 11.300  1.26727E-06 -7.46436E-07  1.88692E-07 -3.28127E-08  8.77901E-09  2.01727E-05 -1.05982E-05  6.88154E-07  8.23903E-07 -3.38816E-08
 11.400  1.05330E-06 -6.36367E-07  1.71504E-07 -3.28033E-08  8.80069E-09  1.62276E-05 -8.72094E-06  7.23345E-07  6.30114E-07 -3.88933E-08
 11.500  8.71244E-07 -5.39528E-07  1.54323E-07 -3.18934E-08  8.54389E-09  1.29800E-05 -7.13240E-06  7.19612E-07  4.74306E-07 -3.99743E-08
 11.600  7.16767E-07 -4.54546E-07  1.37386E-07 -3.03036E-08  8.09680E-09  1.03221E-05 -5.79630E-06  6.88001E-07  3.50687E-07 -3.83544E-08
 11.700  5.86225E-07 -3.80311E-07  1.20964E-07 -2.82261E-08  7.52598E-09  8.15961E-06 -4.67979E-06  6.37791E-07  2.54010E-07 -3.50304E-08
 11.800  4.76460E-07 -3.15859E-07  1.05316E-07 -2.58280E-08  6.88191E-09  6.41115E-06 -3.75316E-06  5.76521E-07  1.79579E-07 -3.07784E-08
 11.900  3.84704E-07 -2.60312E-07  9.06666E-08 -2.32527E-08  6.20291E-09  5.00639E-06 -2.98958E-06  5.10102E-07  1.23253E-07 -2.61757E-08
 12.000  3.08499E-07 -2.12829E-07  7.71868E-08 -2.06202E-08  5.51799E-09  3.88508E-06 -2.36495E-06  4.42976E-07  8.14385E-08 -2.16279E-08
 12.100  2.45652E-07 -1.72595E-07  6.49884E-08 -1.80274E-08  4.84891E-09  2.99595E-06 -1.85780E-06  3.78315E-07  5.10662E-08 -1.73996E-08
 12.200  1.94203E-07 -1.38815E-07  5.41247E-08 -1.55490E-08  4.21160E-09  2.29563E-06 -1.44918E-06  3.18229E-07  2.95598E-08 -1.36437E-08
 12.300  1.52410E-07 -1.10720E-07  4.45968E-08 -1.32393E-08  3.61723E-09  1.74777E-06 -1.12247E-06  2.63972E-07  1.47943E-08 -1.04292E-08
 12.400  1.18729E-07 -8.75762E-08  3.63620E-08 -1.11336E-08  3.07305E-09  1.32211E-06 -8.63261E-07  2.16132E-07  5.04843E-09 -7.76501E-09
 12.500  9.18030E-08 -6.86940E-08  2.93438E-08 -9.25152E-09  2.58305E-09  9.93658E-07 -6.59209E-07  1.74810E-07 -1.04576E-09 -5.62062E-09
 12.600  7.04538E-08 -5.34360E-08  2.34424E-08 -7.59919E-09  2.14860E-09  7.41972E-07 -4.99823E-07  1.39759E-07 -4.55435E-09 -3.94183E-09
 12.700  5.36650E-08 -4.12240E-08  1.85435E-08 -6.17241E-09  1.76894E-09  5.50445E-07 -3.76291E-07  1.10508E-07 -6.29083E-09 -2.66305E-09
 12.800  4.05712E-08 -3.15422E-08  1.45269E-08 -4.95924E-09  1.44169E-09  4.05706E-07 -2.81290E-07  8.64595E-08 -6.86195E-09 -1.71597E-09
 12.900  3.04433E-08 -2.39379E-08  1.12727E-08 -3.94256E-09  1.16331E-09  2.97086E-07 -2.08792E-07  6.69592E-08 -6.70901E-09 -1.03535E-09
 13.000  2.26736E-08 -1.80205E-08  8.66649E-09 -3.10216E-09  9.29494E-10  2.16135E-07 -1.53892E-07  5.13498E-08 -6.14382E-09 -5.62486E-10
 13.100  1.67618E-08 -1.34575E-08  6.60225E-09 -2.41648E-09  7.35502E-10  1.56223E-07 -1.12634E-07  3.90061E-08 -5.37919E-09 -2.46934E-10
 13.200  1.23000E-08 -9.97047E-09  4.98482E-09 -1.86397E-09  5.76456E-10  1.12187E-07 -8.18634E-08  2.93569E-08 -4.55409E-09 -4.69768E-11
 13.300  8.95980E-09 -7.32918E-09  3.73067E-09 -1.42405E-09  4.47561E-10  8.00442E-08 -5.90871E-08  2.18966E-08 -3.75395E-09  7.07315E-11
 13.400  6.47912E-09 -5.34588E-09  2.76804E-09 -1.07779E-09  3.44269E-10  5.67426E-08 -4.23539E-08  1.61894E-08 -3.02651E-09  1.32011E-10
 13.500  4.65137E-09 -3.86940E-09  2.03643E-09 -8.08252E-10  2.62399E-10  3.99659E-08 -3.01515E-08  1.18674E-08 -2.39403E-09  1.56240E-10
 13.600  3.31525E-09 -2.77948E-09  1.48573E-09 -6.00684E-10  1.98198E-10  2.79691E-08 -2.13184E-08  8.62649E-09 -1.86224E-09  1.57508E-10
 13.700  2.34609E-09 -1.98160E-09  1.07508E-09 -4.42491E-10  1.48376E-10  1.94486E-08 -1.49709E-08  6.21922E-09 -1.42692E-09  1.45706E-10
 13.800  1.64850E-09 -1.40227E-09  7.71666E-10 -3.23142E-10  1.10106E-10  1.34377E-08 -1.04426E-08  4.44762E-09 -1.07843E-09  1.27511E-10
 13.900  1.15020E-09 -9.85026E-10  5.49486E-10 -2.33979E-10  8.10010E-11  9.22566E-09 -7.23517E-09  3.15552E-09 -8.04756E-10  1.07217E-10
 14.000  7.96927E-10 -6.86902E-10  3.88216E-10 -1.68004E-10  5.90822E-11  6.29390E-09 -4.97956E-09  2.22138E-09 -5.93440E-10  8.74073E-11
 14.100  5.48342E-10 -4.75561E-10  2.72161E-10 -1.19641E-10  4.27326E-11  4.26679E-09 -3.40449E-09  1.55181E-09 -4.32740E-10  6.94848E-11
 14.200  3.74709E-10 -3.26898E-10  1.89349E-10 -8.45106E-11  3.06511E-11  2.87444E-09 -2.31231E-09  1.07587E-09 -3.12221E-10  5.40729E-11
 14.300  2.54314E-10 -2.23122E-10  1.30744E-10 -5.92201E-11  2.18054E-11  1.92436E-09 -1.56025E-09  7.40359E-10 -2.22993E-10  4.13063E-11
 14.400  1.71435E-10 -1.51226E-10  8.96086E-11 -4.11722E-11  1.53873E-11  1.28029E-09 -1.04595E-09  5.05736E-10 -1.57722E-10  3.10377E-11
 14.500  1.14791E-10 -1.01787E-10  6.09652E-11 -2.84029E-11  1.07716E-11  8.46520E-10 -6.96649E-10  3.42961E-10 -1.10514E-10  2.29761E-11
 14.600  7.63506E-11 -6.80409E-11  4.11772E-11 -1.94442E-11  7.48104E-12  5.56262E-10 -4.61019E-10  2.30912E-10 -7.67366E-11  1.67768E-11
 14.700  5.04472E-11 -4.51733E-11  2.76127E-11 -1.32108E-11  5.15526E-12  3.63284E-10 -3.03140E-10  1.54369E-10 -5.28159E-11  1.20951E-11
 14.800  3.31133E-11 -2.97889E-11  1.83855E-11 -8.90887E-12  3.52521E-12  2.35804E-10 -1.98062E-10  1.02477E-10 -3.60418E-11  8.61638E-12
 14.900  2.15937E-11 -1.95125E-11  1.21558E-11 -5.96359E-12  2.39224E-12  1.52126E-10 -1.28591E-10  6.75572E-11 -2.43907E-11  6.06937E-12
 15.000  1.39905E-11 -1.26964E-11  7.98123E-12 -3.96299E-12  1.61118E-12  9.75470E-11 -8.29630E-11  4.42313E-11 -1.63719E-11  4.22967E-12
 15.100  9.00608E-12 -8.20695E-12  5.20428E-12 -2.61458E-12  1.07707E-12  6.21719E-11 -5.31911E-11  2.87627E-11 -1.09020E-11  2.91755E-12
 15.200  5.76045E-12 -5.27031E-12  3.37043E-12 -1.71270E-12  7.14717E-13  3.93872E-11 -3.38913E-11  1.85780E-11 -7.20299E-12  1.99276E-12
 15.300  3.66111E-12 -3.36253E-12  2.16806E-12 -1.11401E-12  4.70815E-13  2.48032E-11 -2.14609E-11  1.19197E-11 -4.72264E-12  1.34826E-12
 15.400  2.31218E-12 -2.13154E-12  1.38530E-12 -7.19553E-13  3.07910E-13  1.55260E-11 -1.35061E-11  7.59713E-12 -3.07310E-12  9.03869E-13
 15.500  1.45111E-12 -1.34257E-12  8.79281E-13 -4.61559E-13  1.99934E-13  9.66108E-12 -8.44791E-12  4.81039E-12 -1.98492E-12  6.00580E-13
 15.600  9.05035E-13 -8.40261E-13  5.54432E-13 -2.94044E-13  1.28904E-13  5.97604E-12 -5.25193E-12  3.02607E-12 -1.27272E-12  3.95617E-13
 15.700  5.60961E-13 -5.22572E-13  3.47319E-13 -1.86056E-13  8.25269E-14  3.67479E-12 -3.24528E-12  1.89134E-12 -8.10191E-13  2.58412E-13
 15.800  3.45556E-13 -3.22961E-13  2.16167E-13 -1.16936E-13  5.24685E-14  2.24644E-12 -1.99325E-12  1.17455E-12 -5.12097E-13  1.67406E-13
 15.900  2.11561E-13 -1.98355E-13  1.33676E-13 -7.30052E-14  3.31287E-14  1.36524E-12 -1.21692E-12  7.24774E-13 -3.21415E-13  1.07578E-13
 16.000  1.28737E-13 -1.21072E-13  8.21369E-14 -4.52774E-14  2.07748E-14  8.24865E-13 -7.38515E-13  4.44413E-13 -2.00339E-13  6.85875E-14
 16.100  7.78629E-14 -7.34453E-14  5.01495E-14 -2.78968E-14  1.29397E-14  4.95483E-13 -4.45524E-13  2.70795E-13 -1.24017E-13  4.33908E-14
 16.200  4.68096E-14 -4.42816E-14  3.04269E-14 -1.70764E-14  8.00544E-15  2.95906E-13 -2.67182E-13  1.63977E-13 -7.62521E-14  2.72420E-14
 16.300  2.79723E-14 -2.65360E-14  1.83454E-14 -1.03855E-14  4.91980E-15  1.75699E-13 -1.59286E-13  9.86806E-14 -4.65697E-14  1.69757E-14
 16.400  1.66159E-14 -1.58057E-14  1.09925E-14 -6.27577E-15  3.00353E-15  1.03725E-13 -9.44052E-14  5.90204E-14 -2.82531E-14  1.05005E-14
 16.500  9.81152E-15 -9.35786E-15  6.54600E-15 -3.76823E-15  1.82163E-15  6.08837E-14 -5.56251E-14  3.50841E-14 -1.70281E-14  6.44813E-15
 16.600  5.75938E-15 -5.50724E-15  3.87426E-15 -2.24831E-15  1.09763E-15  3.55333E-14 -3.25847E-14  2.07288E-14 -1.01960E-14  3.93137E-15
 16.700  3.36089E-15 -3.22181E-15  2.27902E-15 -1.33304E-15  6.57104E-16  2.06202E-14 -1.89773E-14  1.21732E-14 -6.06573E-15  2.38002E-15
 16.800  1.94977E-15 -1.87365E-15  1.33250E-15 -7.85444E-16  3.90857E-16  1.18983E-14 -1.09886E-14  7.10591E-15 -3.58548E-15  1.43080E-15
 16.900  1.12454E-15 -1.08321E-15  7.74399E-16 -4.59927E-16  2.31007E-16  6.82674E-15 -6.32626E-15  4.12318E-15 -2.10593E-15  8.54238E-16
 17.000  6.44825E-16 -6.22558E-16  4.47355E-16 -2.67659E-16  1.35667E-16  3.89485E-15 -3.62126E-15  2.37824E-15 -1.22913E-15  5.06537E-16
 17.100  3.67614E-16 -3.55719E-16  2.56889E-16 -1.54814E-16  7.91740E-17  2.20965E-15 -2.06105E-15  1.36365E-15 -7.12891E-16  2.98338E-16
 17.200  2.08371E-16 -2.02071E-16  1.46641E-16 -8.89992E-17  4.59164E-17  1.24658E-15 -1.16639E-15  7.77295E-16 -4.10908E-16  1.74542E-16
 17.300  1.17432E-16 -1.14125E-16  8.32138E-17 -5.08544E-17  2.64635E-17  6.99337E-16 -6.56343E-16  4.40472E-16 -2.35385E-16  1.01441E-16
 17.400  6.58039E-17 -6.40843E-17  4.69439E-17 -2.88835E-17  1.51578E-17  3.90149E-16 -3.67250E-16  2.48148E-16 -1.34011E-16  5.85702E-17
 17.500  3.66641E-17 -3.57786E-17  2.63281E-17 -1.63067E-17  8.62875E-18  2.16451E-16 -2.04335E-16  1.38988E-16 -7.58320E-17  3.35980E-17
 17.600  2.03125E-17 -1.98613E-17  1.46800E-17 -9.15141E-18  4.88203E-18  1.19421E-16 -1.13054E-16  7.73973E-17 -4.26508E-17  1.91492E-17
 17.700  1.11900E-17 -1.09626E-17  8.13785E-18 -5.10540E-18  2.74542E-18  6.55243E-17 -6.22005E-17  4.28518E-17 -2.38441E-17  1.08445E-17
 17.800  6.12979E-18 -6.01659E-18  4.48522E-18 -2.83142E-18  1.53456E-18  3.57543E-17 -3.40312E-17  2.35894E-17 -1.32504E-17  6.10251E-18
 17.900  3.33905E-18 -3.28344E-18  2.45786E-18 -1.56108E-18  8.52597E-19  1.94029E-17 -1.85159E-17  1.29116E-17 -7.31955E-18  3.41251E-18
 18.000  1.80871E-18 -1.78179E-18  1.33919E-18 -8.55661E-19  4.70868E-19  1.04719E-17 -1.00185E-17  7.02694E-18 -4.01942E-18  1.89637E-18
 18.100  9.74297E-19 -9.61491E-19  7.25518E-19 -4.66280E-19  2.58501E-19  5.62090E-18 -5.39083E-18  3.80266E-18 -2.19421E-18  1.04731E-18
 18.200  5.21914E-19 -5.15941E-19  3.90826E-19 -2.52622E-19  1.41074E-19  3.00067E-18 -2.88479E-18  2.04622E-18 -1.19081E-18  5.74842E-19
 18.300  2.78035E-19 -2.75316E-19  2.09343E-19 -1.36078E-19  7.65362E-20  1.59320E-18 -1.53527E-18  1.09489E-18 -6.42490E-19  3.13589E-19
 18.400  1.47299E-19 -1.46098E-19  1.11502E-19 -7.28793E-20  4.12792E-20  8.41324E-19 -8.12597E-19  5.82573E-19 -3.44639E-19  1.70031E-19
 18.500  7.76083E-20 -7.70997E-20  5.90564E-20 -3.88090E-20  2.21336E-20  4.41882E-19 -4.27750E-19  3.08248E-19 -1.83801E-19  9.16364E-20
 18.600  4.06660E-20 -4.04631E-20  3.11040E-20 -2.05486E-20  1.17989E-20  2.30836E-19 -2.23943E-19  1.62192E-19 -9.74605E-20  4.90902E-20
 18.700  2.11922E-20 -2.11190E-20  1.62908E-20 -1.08184E-20  6.25333E-21  1.19940E-19 -1.16606E-19  8.48679E-20 -5.13827E-20  2.61411E-20
 18.800  1.09837E-20 -1.09623E-20  8.48496E-21 -5.66349E-21  3.29511E-21  6.19851E-20 -6.03880E-20  4.41624E-20 -2.69353E-20  1.38378E-20
 18.900  5.66187E-21 -5.65915E-21  4.39491E-21 -2.94819E-21  1.72635E-21  3.18627E-20 -3.11050E-20  2.28541E-20 -1.40397E-20  7.28187E-21
 19.000  2.90276E-21 -2.90556E-21  2.26386E-21 -1.52611E-21  8.99285E-22  1.62913E-20 -1.59355E-20  1.17621E-20 -7.27661E-21  3.80944E-21
 19.100  1.48017E-21 -1.48369E-21  1.15973E-21 -7.85565E-22  4.65786E-22  8.28535E-21 -8.12015E-21  6.02039E-21 -3.75016E-21  1.98124E-21
 19.200  7.50700E-22 -7.53530E-22  5.90853E-22 -4.02119E-22  2.39886E-22  4.19134E-21 -4.11557E-21  3.06470E-21 -1.92188E-21  1.02442E-21
 19.300  3.78688E-22 -3.80632E-22  2.99380E-22 -2.04697E-22  1.22846E-22  2.10905E-21 -2.07477E-21  1.55161E-21 -9.79426E-22  5.26629E-22
 19.400  1.90005E-22 -1.91234E-22  1.50868E-22 -1.03624E-22  6.25555E-23  1.05565E-21 -1.04037E-21  7.81292E-22 -4.96353E-22  2.69167E-22
 19.500  9.48244E-23 -9.55623E-23  7.56144E-23 -5.21687E-23  3.16757E-23  5.25595E-22 -5.18910E-22  3.91282E-22 -2.50146E-22  1.36786E-22
 19.600  4.70711E-23 -4.74980E-23  3.76926E-23 -2.61196E-23  1.59497E-23  2.60310E-22 -2.57445E-22  1.94903E-22 -1.25369E-22  6.91155E-23
 19.700  2.32419E-23 -2.34821E-23  1.86877E-23 -1.30058E-23  7.98640E-24  1.28245E-22 -1.27050E-22  9.65613E-23 -6.24863E-23  3.47244E-23
 19.800  1.14151E-23 -1.15472E-23  9.21535E-24 -6.44068E-24  3.97678E-24  6.28504E-23 -6.23679E-23  4.75830E-23 -3.09734E-23  1.73472E-23
 19.900  5.57675E-24 -5.64810E-24  4.51991E-24 -3.17215E-24  1.96925E-24  3.06405E-23 -3.04547E-23  2.33222E-23 -1.52689E-23  8.61726E-24
  67 188 200   0.100
  0.000  5.66497E-02 -3.02559E-16 -4.05925E-16 -4.37824E-16 -1.65222E-15  9.09721E-02 -4.80991E-16 -7.28584E-16 -6.62991E-16 -2.01699E-15
  0.100  5.66346E-02  4.03310E-05 -6.88099E-09 -1.31655E-12 -2.86098E-17  9.10706E-02 -6.90898E-05  2.84605E-08  2.25756E-12  6.39429E-15
  0.200  5.65907E-02  1.59122E-04 -1.08722E-07 -8.40866E-11  9.25670E-14  9.13613E-02 -2.72206E-04  4.50619E-07  1.44487E-10 -3.14364E-13
  0.300  5.65222E-02  3.49871E-04 -5.38910E-07 -9.56288E-10  2.40638E-12  9.18292E-02 -5.97132E-04  2.24154E-06  1.62767E-09 -8.01143E-12
  0.400  5.64357E-02  6.02093E-04 -1.65302E-06 -5.36130E-09  2.37991E-11  9.24507E-02 -1.02429E-03  6.91098E-06  9.00736E-09 -7.97252E-11
  0.500  5.63400E-02  9.01822E-04 -3.88082E-06 -2.03952E-08  1.40264E-10  9.31942E-02 -1.52790E-03  1.63380E-05  3.37104E-08 -4.72010E-10
  0.600  5.62452E-02  1.23230E-03 -7.66351E-06 -6.06967E-08  5.95095E-10  9.40224E-02 -2.07744E-03  3.25551E-05  9.84044E-08 -2.01180E-09
  0.700  5.61623E-02  1.57479E-03 -1.33802E-05 -1.52455E-07  2.01143E-09  9.48944E-02 -2.63945E-03  5.74960E-05  2.41819E-07 -6.83125E-09
  0.800  5.61021E-02  1.90952E-03 -2.12698E-05 -3.38152E-07  5.75462E-09  9.57677E-02 -3.17949E-03  9.27279E-05  5.23679E-07 -1.96262E-08
  0.900  5.60750E-02  2.21670E-03 -3.13536E-05 -6.81916E-07  1.44916E-08  9.66006E-02 -3.66413E-03  1.39188E-04  1.02953E-06 -4.95945E-08
  1.000  5.60895E-02  2.47750E-03 -4.33678E-05 -1.27528E-06  3.29924E-08  9.73548E-02 -4.06292E-03  1.96952E-04  1.87541E-06 -1.13179E-07
  1.100  5.61523E-02  2.67510E-03 -5.67116E-05 -2.24299E-06  6.92115E-08  9.79977E-02 -4.35016E-03  2.65050E-04  3.21235E-06 -2.37676E-07
  1.200  5.62672E-02  2.79552E-03 -7.04194E-05 -3.74848E-06  1.35674E-07  9.85038E-02 -4.50642E-03  3.41370E-04  5.23082E-06 -4.65689E-07
  1.300  5.64350E-02  2.82846E-03 -8.31634E-05 -5.99818E-06  2.51169E-07  9.88560E-02 -4.51967E-03  4.22646E-04  8.16491E-06 -8.60266E-07
  1.400  5.66531E-02  2.76785E-03 -9.32902E-05 -9.24403E-06  4.42708E-07  9.90470E-02 -4.38599E-03  5.04555E-04  1.22959E-05 -1.51044E-06
  1.500  5.69160E-02  2.61225E-03 -9.88949E-05 -1.37831E-05  7.47672E-07  9.90791E-02 -4.10977E-03  5.81928E-04  1.79543E-05 -2.53670E-06
  1.600  5.72149E-02  2.36496E-03 -9.79298E-05 -1.99531E-05  1.21598E-06  9.89636E-02 -3.70341E-03  6.49064E-04  2.55188E-05 -4.09581E-06
  1.700  5.75387E-02  2.03390E-03 -8.83438E-05 -2.81235E-05  1.91207E-06  9.87201E-02 -3.18662E-03  7.00121E-04  3.54110E-05 -6.38417E-06
  1.800  5.78743E-02  1.63120E-03 -6.82429E-05 -3.86810E-05  2.91636E-06  9.83748E-02 -2.58515E-03  7.29576E-04  4.80826E-05 -9.63898E-06
  1.900  5.82077E-02  1.17262E-03 -3.60618E-05 -5.20085E-05  4.32585E-06  9.79587E-02 -1.92925E-03  7.32700E-04  6.39943E-05 -1.41361E-05
  2.000  5.85245E-02  6.76687E-04  9.27020E-06 -6.84600E-05  6.25349E-06  9.75049E-02 -1.25185E-03  7.06015E-04  8.35854E-05 -2.01840E-05
  2.100  5.88109E-02  1.63717E-04  6.81815E-05 -8.83299E-05  8.82591E-06  9.70468E-02 -5.86541E-04  6.47684E-04  1.07232E-04 -2.81132E-05
  2.200  5.90546E-02 -3.45262E-04  1.40346E-04 -1.11821E-04  1.21792E-05  9.66154E-02  3.44364E-05  5.57800E-04  1.35198E-04 -3.82602E-05
  2.300  5.92455E-02 -8.29629E-04  2.24615E-04 -1.39009E-04  1.64529E-05  9.62374E-02  5.82104E-04  4.38538E-04  1.67577E-04 -5.09469E-05
  2.400  5.93764E-02 -1.27024E-03  3.19012E-04 -1.69818E-04  2.17815E-05  9.59337E-02  1.03246E-03  2.94142E-04  2.04241E-04 -6.64551E-05
  2.500  5.94433E-02 -1.65042E-03  4.20778E-04 -2.03988E-04  2.82848E-05  9.57179E-02  1.36783E-03  1.30747E-04  2.44782E-04 -8.49984E-05
  2.600  5.94455E-02 -1.95674E-03  5.26483E-04 -2.41066E-04  3.60570E-05  9.55959E-02  1.57782E-03 -4.39607E-05  2.88477E-04 -1.06692E-04
  2.700  5.93860E-02 -2.17968E-03  6.32188E-04 -2.80399E-04  4.51555E-05  9.55658E-02  1.65980E-03 -2.21224E-04  3.34263E-04 -1.31521E-04
  2.800  5.92707E-02 -2.31399E-03  7.33646E-04 -3.21146E-04  5.55904E-05  9.56185E-02  1.61883E-03 -3.91797E-04  3.80743E-04 -1.59318E-04
  2.900  5.91084E-02 -2.35885E-03  8.26528E-04 -3.62293E-04  6.73159E-05  9.57386E-02  1.46712E-03 -5.46592E-04  4.26217E-04 -1.89741E-04
  3.000  5.89103E-02 -2.31774E-03  9.06660E-04 -4.02700E-04  8.02249E-05  9.59059E-02  1.22300E-03 -6.77322E-04  4.68743E-04 -2.22259E-04
  3.100  5.86887E-02 -2.19822E-03  9.70238E-04 -4.41135E-04  9.41465E-05  9.60973E-02  9.09516E-04 -7.77111E-04  5.06224E-04 -2.56157E-04
  3.200  5.84569E-02 -2.01137E-03  1.01403E-03 -4.76339E-04  1.08849E-04  9.62882E-02  5.52728E-04 -8.41008E-04  5.36526E-04 -2.90541E-04
  3.300  5.82278E-02 -1.77121E-03  1.03552E-03 -5.07077E-04  1.24047E-04  9.64547E-02  1.79785E-04 -8.66361E-04  5.57605E-04 -3.24367E-04
  3.400  5.80135E-02 -1.49399E-03  1.03302E-03 -5.32201E-04  1.39414E-04  9.65749E-02 -1.83003E-04 -8.53043E-04  5.67644E-04 -3.56474E-04
  3.500  5.78244E-02 -1.19744E-03  1.00570E-03 -5.50697E-04  1.54593E-04  9.66305E-02 -5.12043E-04 -8.03492E-04  5.65188E-04 -3.85634E-04
  3.600  5.76685E-02 -8.99949E-04  9.53627E-04 -5.61734E-04  1.69222E-04  9.66079E-02 -7.88127E-04 -7.22579E-04  5.49263E-04 -4.10601E-04
  3.700  5.75508E-02 -6.19904E-04  8.77648E-04 -5.64694E-04  1.82947E-04  9.64981E-02 -9.97784E-04 -6.17307E-04  5.19478E-04 -4.30176E-04
  3.800  5.74731E-02 -3.74953E-04  7.79365E-04 -5.59189E-04  1.95444E-04  9.62976E-02 -1.13423E-03 -4.96370E-04  4.76089E-04 -4.43263E-04
  3.900  5.74335E-02 -1.81413E-04  6.60997E-04 -5.45066E-04  2.06436E-04  9.60075E-02 -1.19787E-03 -3.69601E-04  4.20032E-04 -4.48931E-04
  4.000  5.74261E-02 -5.37334E-05  5.25269E-04 -5.22395E-04  2.15704E-04  9.56329E-02 -1.19625E-03 -2.47346E-04  3.52917E-04 -4.46455E-04
  4.100  5.74417E-02 -4.04224E-06  3.75292E-04 -4.91454E-04  2.23098E-04  9.51817E-02 -1.14358E-03 -1.39809E-04  2.76979E-04 -4.35370E-04
  4.200  5.74669E-02 -4.17775E-05  2.14456E-04 -4.52691E-04  2.28541E-04  9.46633E-02 -1.05974E-03 -5.64079E-05  1.94996E-04 -4.15490E-04
  4.300  5.74855E-02 -1.73394E-04  4.63354E-05 -4.06699E-04  2.32023E-04  9.40869E-02 -9.68909E-04 -5.18536E-06  1.10168E-04 -3.86932E-04
  4.400  5.74781E-02 -4.02147E-04 -1.25389E-04 -3.54181E-04  2.33600E-04  9.34601E-02 -8.97884E-04  7.69723E-06  2.59815E-05 -3.50115E-04
  4.500  5.74231E-02 -7.27954E-04 -2.96990E-04 -2.95917E-04  2.33374E-04  9.27874E-02 -8.74180E-04 -2.16563E-05 -5.39650E-05 -3.05755E-04
  4.600  5.72973E-02 -1.14733E-03 -4.64747E-04 -2.32747E-04  2.31484E-04  9.20692E-02 -9.24072E-04 -9.46326E-05 -1.26129E-04 -2.54838E-04
  4.700  5.70764E-02 -1.65344E-03 -6.25003E-04 -1.65554E-04  2.28086E-04  9.13007E-02 -1.07070E-03 -2.10020E-04 -1.87207E-04 -1.98590E-04
  4.800  5.67365E-02 -2.23619E-03 -7.74211E-04 -9.52530E-05  2.23341E-04  9.04715E-02 -1.33233E-03 -3.64080E-04 -2.34300E-04 -1.38432E-04
  4.900  5.62545E-02 -2.88251E-03 -9.09009E-04 -2.27994E-05  2.17393E-04  8.95656E-02 -1.72097E-03 -5.50773E-04 -2.65073E-04 -7.59274E-05
  5.000  5.56091E-02 -3.57667E-03 -1.02630E-03  5.08134E-05  2.10366E-04  8.85624E-02 -2.24133E-03 -7.62130E-04 -2.77884E-04 -1.27270E-05
  5.100  5.47819E-02 -4.30076E-03 -1.12334E-03  1.24545E-04  2.02357E-04  8.74370E-02 -2.89032E-03 -9.88730E-04 -2.71876E-04  4.94952E-05
  5.200  5.37584E-02 -5.03529E-03 -1.19785E-03  1.97306E-04  1.93431E-04  8.61621E-02 -3.65698E-03 -1.22027E-03 -2.47037E-04  1.09105E-04
  5.300  5.25284E-02 -5.75986E-03 -1.24813E-03  2.67960E-04  1.83630E-04  8.47094E-02 -4.52298E-03 -1.44620E-03 -2.04206E-04  1.64571E-04
  5.400  5.10868E-02 -6.45392E-03 -1.27315E-03  3.35339E-04  1.72976E-04  8.30520E-02 -5.46360E-03 -1.65630E-03 -1.45042E-04  2.14524E-04
  5.500  4.94345E-02 -7.09757E-03 -1.27264E-03  3.98260E-04  1.61492E-04  8.11657E-02 -6.44907E-03 -1.84131E-03 -7.19363E-05  2.57810E-04
  5.600  4.75777E-02 -7.67233E-03 -1.24716E-03  4.55565E-04  1.49206E-04  7.90314E-02 -7.44625E-03 -1.99342E-03  1.21089E-05  2.93535E-04
  5.700  4.55288E-02 -8.16194E-03 -1.19807E-03  5.06159E-04  1.36167E-04  7.66369E-02 -8.42050E-03 -2.10667E-03  1.03642E-04  3.21096E-04
  5.800  4.33057E-02 -8.55303E-03 -1.12755E-03  5.49059E-04  1.22460E-04  7.39776E-02 -9.33758E-03 -2.17723E-03  1.98947E-04  3.40199E-04
  5.900  4.09312E-02 -8.83561E-03 -1.03852E-03  5.83447E-04  1.08208E-04  7.10579E-02 -1.01655E-02 -2.20350E-03  2.94239E-04  3.50865E-04
  6.000  3.84326E-02 -9.00348E-03 -9.34457E-04  6.08713E-04  9.35756E-05  6.78912E-02 -1.08762E-02 -2.18610E-03  3.85865E-04  3.53415E-04
  6.100  3.58405E-02 -9.05442E-03 -8.19307E-04  6.24502E-04  7.87713E-05  6.45001E-02 -1.14469E-02 -2.12770E-03  4.70487E-04  3.48442E-04
  6.200  3.31878E-02 -8.99016E-03 -6.97246E-04  6.30736E-04  6.40351E-05  6.09151E-02 -1.18610E-02 -2.03271E-03  5.45238E-04  3.36775E-04
  6.300  3.05088E-02 -8.81618E-03 -5.72496E-04  6.27629E-04  4.96301E-05  5.71741E-02 -1.21088E-02 -1.90693E-03  6.07851E-04  3.19422E-04
  6.400  2.78375E-02 -8.54132E-03 -4.49112E-04  6.15683E-04  3.58273E-05  5.33204E-02 -1.21874E-02 -1.75708E-03  6.56736E-04  2.97512E-04
  6.500  2.52069E-02 -8.17723E-03 -3.30797E-04  5.95666E-04  2.28898E-05  4.94008E-02 -1.21007E-02 -1.59038E-03  6.91014E-04  2.72240E-04
  6.600  2.26479E-02 -7.73774E-03 -2.20742E-04  5.68574E-04  1.10565E-05  4.54642E-02 -1.18585E-02 -1.41404E-03  7.10511E-04  2.44796E-04
  6.700  2.01879E-02 -7.23811E-03 -1.21509E-04  5.35578E-04  5.27996E-07  4.15589E-02 -1.14758E-02 -1.23493E-03  7.15701E-04  2.16317E-04
  6.800  1.78508E-02 -6.69431E-03 -3.49519E-05  4.97969E-04 -8.54514E-06  3.77311E-02 -1.09714E-02 -1.05919E-03  7.07623E-04  1.87834E-04
  6.900  1.56560E-02 -6.12230E-03  3.78027E-05  4.57090E-04 -1.60701E-05  3.40234E-02 -1.03670E-02 -8.91995E-04  6.87766E-04  1.60236E-04
  7.000  1.36183E-02 -5.53738E-03  9.63398E-05  4.14272E-04 -2.20149E-05  3.04733E-02 -9.68577E-03 -7.37417E-04  6.57942E-04  1.34248E-04
  7.100  1.17476E-02 -4.95361E-03  1.40892E-04  3.70778E-04 -2.64077E-05  2.71120E-02 -8.95094E-03 -5.98346E-04  6.20155E-04  1.10413E-04
  7.200  1.00493E-02 -4.38341E-03  1.72248E-04  3.27751E-04 -2.93311E-05  2.39640E-02 -8.18511E-03 -4.76515E-04  5.76472E-04  8.90945E-05
  7.300  8.52440E-03 -3.83724E-03  1.91633E-04  2.86177E-04 -3.09141E-05  2.10470E-02 -7.40910E-03 -3.72596E-04  5.28912E-04  7.04890E-05
  7.400  7.17019E-03 -3.32341E-03  2.00588E-04  2.46860E-04 -3.13210E-05  1.83717E-02 -6.64138E-03 -2.86341E-04  4.79347E-04  5.46405E-05
  7.500  5.98049E-03 -2.84809E-03  2.00836E-04  2.10410E-04 -3.07393E-05  1.59422E-02 -5.89759E-03 -2.16766E-04  4.29436E-04  4.14680E-05
  7.600  4.94649E-03 -2.41534E-03  1.94168E-04  1.77240E-04 -2.93678E-05  1.37570E-02 -5.19029E-03 -1.62343E-04  3.80575E-04  3.07929E-05
  7.700  4.05732E-03 -2.02725E-03  1.82331E-04  1.47585E-04 -2.74047E-05  1.18095E-02 -4.52893E-03 -1.21193E-04  3.33877E-04  2.23678E-05
  7.800  3.30070E-03 -1.68425E-03  1.66954E-04  1.21515E-04 -2.50378E-05  1.00890E-02 -3.91999E-03 -9.12627E-05  2.90167E-04  1.59045E-05
  7.900  2.66354E-03 -1.38531E-03  1.49477E-04  9.89612E-05 -2.24370E-05  8.58159E-03 -3.36720E-03 -7.04770E-05  2.50001E-04  1.10979E-05
  8.000  2.13246E-03 -1.12826E-03  1.31120E-04  7.97495E-05 -1.97486E-05  7.27114E-03 -2.87192E-03 -5.68586E-05  2.13692E-04  7.64657E-06
  8.100  1.69425E-03 -9.10122E-04  1.12859E-04  6.36252E-05 -1.70923E-05  6.14020E-03 -2.43352E-03 -4.86143E-05  1.81349E-04  5.26829E-06
  8.200  1.33624E-03 -7.27338E-04  9.54343E-05  5.02825E-05 -1.45601E-05  5.17073E-03 -2.04981E-03 -4.41893E-05  1.52917E-04  3.71034E-06
  8.300  1.04657E-03 -5.76056E-04  7.93589E-05  3.93897E-05 -1.22178E-05  4.34473E-03 -1.71747E-03 -4.22929E-05  1.28215E-04  2.75568E-06
  8.400  8.14388E-04 -4.52331E-04  6.49496E-05  3.06098E-05 -1.01069E-05  3.64480E-03 -1.43235E-03 -4.18998E-05  1.06981E-04  2.22509E-06
  8.500  6.29978E-04 -3.52305E-04  5.23571E-05  2.36168E-05 -8.24825E-06  3.05449E-03 -1.18991E-03 -4.22344E-05  8.88982E-05  1.97623E-06
  8.600  4.84777E-04 -2.72330E-04  4.16012E-05  1.81081E-05 -6.64567E-06  2.55862E-03 -9.85400E-04 -4.27423E-05  7.36258E-05  1.90053E-06
  8.700  3.71390E-04 -2.09063E-04  3.26045E-05  1.38115E-05 -5.29032E-06  2.14341E-03 -8.14123E-04 -4.30561E-05  6.08209E-05  1.91875E-06
  8.800  2.83523E-04 -1.59513E-04  2.52241E-05  1.04895E-05 -4.16430E-06  1.79657E-03 -6.71596E-04 -4.29585E-05  5.01531E-05  1.97594E-06
  8.900  2.15910E-04 -1.21072E-04  1.92787E-05  7.94004E-06 -3.24411E-06  1.50729E-03 -5.53649E-04 -4.23464E-05  4.13147E-05  2.03631E-06
  9.000  1.64209E-04 -9.15102E-05  1.45700E-05  5.99511E-06 -2.50350E-06  1.26618E-03 -4.56500E-04 -4.11998E-05  3.40268E-05  2.07856E-06
  9.100  1.24887E-04 -6.89567E-05  1.08998E-05  4.51812E-06 -1.91571E-06  1.06522E-03 -3.76782E-04 -3.95542E-05  2.80415E-05  2.09177E-06
  9.200  9.51109E-05 -5.18721E-05  8.08141E-06  3.39998E-06 -1.45510E-06  8.97568E-04 -3.11553E-04 -3.74793E-05  2.31423E-05  2.07215E-06
  9.300  7.26367E-05 -3.90092E-05  5.94693E-06  2.55506E-06 -1.09822E-06  7.57500E-04 -2.58276E-04 -3.50623E-05  1.91424E-05  2.02038E-06
  9.400  5.57072E-05 -2.93740E-05  4.35096E-06  1.91709E-06 -8.24430E-07  6.40230E-04 -2.14794E-04 -3.23965E-05  1.58822E-05  1.93986E-06
  9.500  4.29623E-05 -2.21848E-05  3.17155E-06  1.43539E-06 -6.16131E-07  5.41799E-04 -1.79294E-04 -2.95729E-05  1.32267E-05  1.83533E-06
  9.600  3.33594E-05 -1.68352E-05  2.30924E-06  1.07158E-06 -4.58714E-07  4.58944E-04 -1.50266E-04 -2.66755E-05  1.10626E-05  1.71206E-06
  9.700  2.61067E-05 -1.28601E-05  1.68488E-06  7.96708E-07 -3.40345E-07  3.88995E-04 -1.26466E-04 -2.37784E-05  9.29536E-06  1.57535E-06
  9.800  2.06073E-05 -9.90658E-06  1.23682E-06  5.89048E-07 -2.51643E-07  3.29766E-04 -1.06877E-04 -2.09447E-05  7.84685E-06  1.43021E-06
  9.900  1.64145E-05 -7.70896E-06  9.17965E-07  4.32255E-07 -1.85307E-07  2.79478E-04 -9.06741E-05 -1.82260E-05  6.65306E-06  1.28122E-06
 10.000  1.31954E-05 -6.06884E-06  6.92873E-07  3.14020E-07 -1.35740E-07  2.36678E-04 -7.71935E-05 -1.56629E-05  5.66213E-06  1.13243E-06
 10.100  1.07032E-05 -4.83888E-06  5.35226E-07  2.25036E-07 -9.87091E-08  2.00180E-04 -6.59040E-05 -1.32855E-05  4.83250E-06  9.87319E-07
 10.200  8.75510E-06 -3.91014E-06  4.25654E-07  1.58237E-07 -7.10436E-08  1.69013E-04 -5.63838E-05 -1.11146E-05  4.13132E-06  8.48801E-07
 10.300  7.21633E-06 -3.20232E-06  3.49992E-07  1.08246E-07 -5.03820E-08  1.42381E-04 -4.82999E-05 -9.16193E-06  3.53302E-06  7.19178E-07
 10.400  5.98723E-06 -2.65648E-06  2.97921E-07  7.09686E-08 -3.49716E-08  1.19622E-04 -4.13907E-05 -7.43206E-06  3.01798E-06  6.00168E-07
 10.500  4.99424E-06 -2.22941E-06  2.61942E-07  4.32898E-08 -2.35108E-08  1.00185E-04 -3.54512E-05 -5.92277E-06  2.57133E-06  4.92913E-07
 10.600  4.18297E-06 -1.88961E-06  2.36624E-07  2.28518E-08 -1.50301E-08  8.36100E-05 -3.03214E-05 -4.62642E-06  2.18196E-06  3.98019E-07
 10.700  3.51311E-06 -1.61419E-06  2.18068E-07  7.87780E-09 -8.80367E-09  6.95032E-05 -2.58755E-05 -3.53095E-06  1.84158E-06  3.15601E-07
 10.800  2.95476E-06 -1.38665E-06  2.03510E-07 -2.96261E-09 -4.28487E-09  5.75299E-05 -2.20146E-05 -2.62103E-06  1.54395E-06  2.45354E-07
 10.900  2.48557E-06 -1.19515E-06  1.91049E-07 -1.06613E-08 -1.05956E-09  4.74008E-05 -1.86599E-05 -1.87900E-06  1.28431E-06  1.86627E-07
 11.000  2.08878E-06 -1.03134E-06  1.79432E-07 -1.59569E-08  1.18762E-09  3.88649E-05 -1.57474E-05 -1.28592E-06  1.05884E-06  1.38506E-07
 11.100  1.75169E-06 -8.89323E-07  1.67903E-07 -1.94014E-08  2.69769E-09  3.17029E-05 -1.32241E-05 -8.22411E-07  8.64329E-07  9.98988E-08
 11.200  1.46455E-06 -7.65007E-07  1.56072E-07 -2.14124E-08  3.65529E-09  2.57222E-05 -1.10452E-05 -4.69354E-07  6.97916E-07  6.96161E-08
 11.300  1.21974E-06 -6.55541E-07  1.43817E-07 -2.23113E-08  4.20204E-09  2.07539E-05 -9.17183E-06 -2.08548E-07  5.56921E-07  4.64392E-08
 11.400  1.01119E-06 -5.58926E-07  1.31198E-07 -2.23522E-08  4.44659E-09  1.66493E-05 -7.56942E-06 -2.31399E-08  4.38764E-07  2.91807E-08
 11.500  8.33927E-07 -4.73716E-07  1.18388E-07 -2.17406E-08  4.47233E-09  1.32780E-05 -6.20682E-06  1.02060E-07  3.40928E-07  1.67293E-08
 11.600  6.83800E-07 -3.98814E-07  1.05619E-07 -2.06469E-08  4.34323E-09  1.05256E-05 -5.05563E-06  1.80392E-07  2.60959E-07  8.08136E-09
 11.700  5.57248E-07 -3.33320E-07  9.31361E-08 -1.92143E-08  4.10840E-09  8.29270E-06 -4.08977E-06  2.23289E-07  1.96491E-07  2.35993E-09
 11.800  4.51161E-07 -2.76442E-07  8.11730E-08 -1.75633E-08  3.80546E-09  6.49282E-06 -3.28529E-06  2.40306E-07  1.45278E-07 -1.17807E-09
 11.900  3.62791E-07 -2.27437E-07  6.99262E-08 -1.57950E-08  3.46318E-09  5.05157E-06 -2.62030E-06  2.39229E-07  1.05225E-07 -3.14335E-09
 12.000  2.89683E-07 -1.85582E-07  5.95465E-08 -1.39922E-08  3.10342E-09  3.90521E-06 -2.07488E-06  2.26232E-07  7.44213E-08 -4.02267E-09
 12.100  2.29646E-07 -1.50164E-07  5.01342E-08 -1.22208E-08  2.74255E-09  2.99961E-06 -1.63107E-06  2.06070E-07  5.11559E-08 -4.19184E-09
 12.200  1.80718E-07 -1.20478E-07  4.17408E-08 -1.05311E-08  2.39264E-09  2.28912E-06 -1.27283E-06  1.82289E-07  3.39295E-08 -3.93107E-09
 12.300  1.41161E-07 -9.58396E-08  3.43739E-08 -8.95917E-09  2.06219E-09  1.73556E-06 -9.86001E-07  1.57422E-07  2.14551E-08 -3.44131E-09
 12.400  1.09438E-07 -7.55918E-08  2.80051E-08 -7.52824E-09  1.75692E-09  1.30728E-06 -7.58206E-07  1.33194E-07  1.26498E-08 -2.85997E-09
 12.500  8.42058E-08 -5.91159E-08  2.25780E-08 -6.25086E-09  1.48022E-09  9.78244E-07 -5.78763E-07  1.10696E-07  6.62124E-09 -2.27545E-09
 12.600  6.43027E-08 -4.58407E-08  1.80163E-08 -5.13065E-09  1.23364E-09  7.27229E-07 -4.38554E-07  9.05358E-08  2.64886E-09 -1.73974E-09
 12.700  4.87335E-08 -3.52484E-08  1.42324E-08 -4.16427E-09  1.01732E-09  5.37079E-07 -3.29885E-07  7.29767E-08  1.62678E-10 -1.27895E-09
 12.800  3.66558E-08 -2.68781E-08  1.11331E-08 -3.34330E-09  8.30283E-10  3.94047E-07 -2.46338E-07  5.80382E-08 -1.27858E-09 -9.01744E-10
 12.900  2.73642E-08 -2.03264E-08  8.62504E-09 -2.65586E-09  6.70778E-10  2.87212E-07 -1.82617E-07  4.55830E-08 -2.00898E-09 -6.05822E-10
 13.000  2.02750E-08 -1.52462E-08  6.61917E-09 -2.08806E-09  5.36527E-10  2.07972E-07 -1.34403E-07  3.53813E-08 -2.27543E-09 -3.82693E-10
 13.100  1.49105E-08 -1.13433E-08  5.03296E-09 -1.62515E-09  4.24945E-10  1.49610E-07 -9.82084E-08  2.71577E-08 -2.25569E-09 -2.21016E-10
 13.200  1.08843E-08 -8.37196E-09  3.79225E-09 -1.25245E-09  3.33326E-10  1.06925E-07 -7.12494E-08  2.06246E-08 -2.07394E-09 -1.08814E-10
 13.300  7.88673E-09 -6.13011E-09  2.83204E-09 -9.55939E-10  2.58978E-10  7.59209E-08 -5.13244E-08  1.55040E-08 -1.81388E-09 -3.48107E-11
 13.400  5.67296E-09 -4.45347E-09  2.09652E-09 -7.22763E-10  1.99331E-10  5.35574E-08 -3.67110E-08  1.15407E-08 -1.52941E-09  1.08524E-11
 13.500  4.05097E-09 -3.21038E-09  1.53874E-09 -5.41423E-10  1.52006E-10  3.75372E-08 -2.60746E-08  8.50928E-09 -1.25313E-09  3.63306E-11
 13.600  2.87190E-09 -2.29657E-09  1.11984E-09 -4.01912E-10  1.14863E-10  2.61395E-08 -1.83911E-08  6.21662E-09 -1.00286E-09  4.80689E-11
 13.700  2.02145E-09 -1.63044E-09  8.08231E-10 -2.95700E-10  8.60178E-11  1.80858E-08 -1.28821E-08  4.50120E-09 -7.86658E-10  5.09538E-11
 13.800  1.41275E-09 -1.14886E-09  5.78574E-10 -2.15659E-10  6.38466E-11  1.24334E-08 -8.96142E-09  3.23083E-09 -6.06342E-10  4.85431E-11
 13.900  9.80389E-10 -8.03528E-10  4.10847E-10 -1.55935E-10  4.69766E-11  8.49313E-09 -6.19150E-09  2.29934E-09 -4.60093E-10  4.33196E-11
 14.000  6.75596E-10 -5.57881E-10  2.89435E-10 -1.11800E-10  3.42667E-11  5.76476E-09 -4.24877E-09  1.62283E-09 -3.44181E-10  3.69341E-11
 14.100  4.62332E-10 -3.84522E-10  2.02312E-10 -7.94915E-11  2.47832E-11  3.88814E-09 -2.89601E-09  1.13606E-09 -2.54114E-10  3.04192E-11
 14.200  3.14212E-10 -2.63131E-10  1.40325E-10 -5.60577E-11  1.77740E-11  2.60591E-09 -1.96076E-09  7.88960E-10 -1.85337E-10  2.43675E-11
 14.300  2.12089E-10 -1.78783E-10  9.65911E-11 -3.92138E-11  1.26417E-11  1.73559E-09 -1.31873E-09  5.43619E-10 -1.33629E-10  1.90717E-11
 14.400  1.42187E-10 -1.20618E-10  6.59888E-11 -2.72133E-11  8.91782E-12  1.14873E-09 -8.81078E-10  3.71687E-10 -9.53040E-11  1.46307E-11
 14.500  9.46826E-11 -8.08085E-11  4.47481E-11 -1.87375E-11  6.24013E-12  7.55575E-10 -5.84813E-10  2.52207E-10 -6.72690E-11  1.10268E-11
 14.600  6.26285E-11 -5.37640E-11  3.01222E-11 -1.28018E-11  4.33162E-12  4.93904E-10 -3.85640E-10  1.69856E-10 -4.70111E-11  8.17926E-12
 14.700  4.11515E-11 -3.55256E-11  2.01301E-11 -8.67976E-12  2.98313E-12  3.20865E-10 -2.52654E-10  1.13552E-10 -3.25409E-11  5.97932E-12
 14.800  2.68616E-11 -2.33149E-11  1.33562E-11 -5.84063E-12  2.03843E-12  2.07171E-10 -1.64463E-10  7.53606E-11 -2.23174E-11  4.31260E-12
 14.900  1.74193E-11 -1.51981E-11  8.79901E-12 -3.90092E-12  1.38218E-12  1.32945E-10 -1.06372E-10  4.96554E-11 -1.51694E-11  3.07158E-12
 15.000  1.12228E-11 -9.84099E-12  5.75611E-12 -2.58623E-12  9.30059E-13  8.47940E-11 -6.83619E-11  3.24862E-11 -1.02214E-11  2.16192E-12
 15.100  7.18390E-12 -6.32995E-12  3.73938E-12 -1.70214E-12  6.21116E-13  5.37548E-11 -4.36565E-11  2.11047E-11 -6.82920E-12  1.50466E-12
 15.200  4.56909E-12 -4.04481E-12  2.41254E-12 -1.11221E-12  4.11704E-13  3.38719E-11 -2.77042E-11  1.36156E-11 -4.52515E-12  1.03607E-12
 15.300  2.88753E-12 -2.56776E-12  1.54590E-12 -7.21564E-13  2.70882E-13  2.12150E-11 -1.74711E-11  8.72382E-12 -2.97426E-12  7.06123E-13
 15.400  1.81329E-12 -1.61953E-12  9.83890E-13 -4.64825E-13  1.76926E-13  1.32080E-11 -1.09494E-11  5.55159E-12 -1.93945E-12  4.76526E-13
 15.500  1.13154E-12 -1.01490E-12  6.22007E-13 -2.97345E-13  1.14723E-13  8.17401E-12 -6.81969E-12  3.50911E-12 -1.25486E-12  3.18532E-13
 15.600  7.01694E-13 -6.31935E-13  3.90618E-13 -1.88893E-13  7.38564E-14  5.02856E-12 -4.22145E-12  2.20329E-12 -8.05739E-13  2.10966E-13
 15.700  4.32434E-13 -3.90986E-13  2.43692E-13 -1.19175E-13  4.72096E-14  3.07521E-12 -2.59713E-12  1.37426E-12 -5.13482E-13  1.38477E-13
 15.800  2.64851E-13 -2.40383E-13  1.51038E-13 -7.46785E-14  2.99646E-14  1.86955E-12 -1.58809E-12  8.51552E-13 -3.24818E-13  9.01059E-14
 15.900  1.61216E-13 -1.46866E-13  9.30047E-14 -4.64804E-14  1.88863E-14  1.12991E-12 -9.65201E-13  5.24231E-13 -2.03979E-13  5.81345E-14
 16.000  9.75328E-14 -8.91713E-14  5.69012E-14 -2.87365E-14  1.18215E-14  6.78888E-13 -5.83090E-13  3.20646E-13 -1.27176E-13  3.71965E-14
 16.100  5.86471E-14 -5.38067E-14  3.45904E-14 -1.76486E-14  7.34876E-15  4.05522E-13 -3.50139E-13  1.94868E-13 -7.87302E-14  2.36067E-14
 16.200  3.50517E-14 -3.22678E-14  2.08942E-14 -1.07677E-14  4.53724E-15  2.40824E-13 -2.08999E-13  1.17676E-13 -4.83982E-14  1.48629E-14
 16.300  2.08234E-14 -1.92327E-14  1.25415E-14 -6.52670E-15  2.78247E-15  1.42188E-13 -1.24011E-13  7.06136E-14 -2.95464E-14  9.28476E-15
 16.400  1.22966E-14 -1.13936E-14  7.48080E-15 -3.93044E-15  1.69493E-15  8.34671E-14 -7.31472E-14  4.21075E-14 -1.79144E-14  5.75567E-15
 16.500  7.21815E-15 -6.70886E-15  4.43441E-15 -2.35173E-15  1.02561E-15  4.87150E-14 -4.28913E-14  2.49528E-14 -1.07883E-14  3.54106E-15
 16.600  4.21195E-15 -3.92660E-15  2.61234E-15 -1.39815E-15  6.16504E-16  2.82693E-14 -2.50026E-14  1.46955E-14 -6.45336E-15  2.16238E-15
 16.700  2.44326E-15 -2.28443E-15  1.52950E-15 -8.25949E-16  3.68162E-16  1.63110E-14 -1.44896E-14  8.60151E-15 -3.83468E-15  1.31082E-15
 16.800  1.40895E-15 -1.32113E-15  8.90029E-16 -4.84852E-16  2.18429E-16  9.35761E-15 -8.34822E-15  5.00382E-15 -2.26365E-15  7.88871E-16
 16.900  8.07747E-16 -7.59506E-16  5.14770E-16 -2.82837E-16  1.28756E-16  5.33801E-15 -4.78197E-15  2.89323E-15 -1.32755E-15  4.71372E-16
 17.000  4.60381E-16 -4.34059E-16  2.95931E-16 -1.63966E-16  7.54106E-17  3.02782E-15 -2.72336E-15  1.66278E-15 -7.73537E-16  2.79676E-16
 17.100  2.60875E-16 -2.46609E-16  1.69103E-16 -9.44659E-17  4.38854E-17  1.70776E-15 -1.54205E-15  9.49878E-16 -4.47835E-16  1.64784E-16
 17.200  1.46971E-16 -1.39291E-16  9.60518E-17 -5.40901E-17  2.53775E-17  9.57796E-16 -8.68152E-16  5.39384E-16 -2.57624E-16  9.64219E-17
 17.300  8.23238E-17 -7.82176E-17  5.42337E-17 -3.07820E-17  1.45826E-17  5.34170E-16 -4.85967E-16  3.04466E-16 -1.47267E-16  5.60366E-17
 17.400  4.58482E-17 -4.36678E-17  3.04407E-17 -1.74112E-17  8.32716E-18  2.96246E-16 -2.70484E-16  1.70845E-16 -8.36555E-17  3.23469E-17
 17.500  2.53882E-17 -2.42385E-17  1.69853E-17 -9.78866E-18  4.72552E-18  1.63380E-16 -1.49695E-16  9.53023E-17 -4.72252E-17  1.85476E-17
 17.600  1.39786E-17 -1.33766E-17  9.42189E-18 -5.47013E-18  2.66506E-18  8.96035E-17 -8.23779E-17  5.28507E-17 -2.64948E-17  1.05648E-17
 17.700  7.65294E-18 -7.33999E-18  5.19589E-18 -3.03854E-18  1.49378E-18  4.88696E-17 -4.50778E-17  2.91379E-17 -1.47732E-17  5.97835E-18
 17.800  4.16613E-18 -4.00461E-18  2.84872E-18 -1.67779E-18  8.32149E-19  2.65062E-17 -2.45285E-17  1.59711E-17 -8.18706E-18  3.36103E-18
 17.900  2.25520E-18 -2.17246E-18  1.55281E-18 -9.20935E-19  4.60750E-19  1.42973E-17 -1.32722E-17  8.70352E-18 -4.50962E-18  1.87740E-18
 18.000  1.21393E-18 -1.17187E-18  8.41549E-19 -5.02516E-19  2.53567E-19  7.66955E-18 -7.14146E-18  4.71571E-18 -2.46902E-18  1.04197E-18
 18.100  6.49786E-19 -6.28562E-19  4.53460E-19 -2.72592E-19  1.38707E-19  4.09164E-18 -3.82129E-18  2.54040E-18 -1.34369E-18  5.74636E-19
 18.200  3.45875E-19 -3.35252E-19  2.42946E-19 -1.47004E-19  7.54208E-20  2.17093E-18 -2.03338E-18  1.36072E-18 -7.26899E-19  3.14911E-19
 18.300  1.83083E-19 -1.77810E-19  1.29419E-19 -7.88155E-20  4.07650E-20  1.14556E-18 -1.07602E-18  7.24699E-19 -3.90900E-19  1.71498E-19
 18.400  9.63753E-20 -9.37798E-20  6.85516E-20 -4.20116E-20  2.19027E-20  6.01203E-19 -5.66269E-19  3.83777E-19 -2.08971E-19  9.28162E-20
 18.500  5.04521E-20 -4.91858E-20  3.61057E-20 -2.22645E-20  1.16986E-20  3.13806E-19 -2.96369E-19  2.02088E-19 -1.11058E-19  4.99232E-20
 18.600  2.62661E-20 -2.56541E-20  1.89095E-20 -1.17314E-20  6.21166E-21  1.62909E-19 -1.54261E-19  1.05816E-19 -5.86766E-20  2.66877E-20
 18.700  1.35994E-20 -1.33065E-20  9.84783E-21 -6.14607E-21  3.27891E-21  8.41153E-20 -7.98547E-20  5.50963E-20 -3.08211E-20  1.41797E-20
 18.800  7.00268E-21 -6.86393E-21  5.09995E-21 -3.20154E-21  1.72073E-21  4.31976E-20 -4.11122E-20  2.85272E-20 -1.60956E-20  7.48831E-21
 18.900  3.58617E-21 -3.52118E-21  2.62642E-21 -1.65824E-21  8.97770E-22  2.20650E-20 -2.10511E-20  1.46883E-20 -8.35715E-21  3.93078E-21
 19.000  1.82653E-21 -1.79646E-21  1.34506E-21 -8.54020E-22  4.65692E-22  1.12101E-20 -1.07206E-20  7.52084E-21 -4.31427E-21  2.05100E-21
 19.100  9.25249E-22 -9.11525E-22  6.85027E-22 -4.37354E-22  2.40172E-22  5.66485E-21 -5.43007E-21  3.82959E-21 -2.21445E-21  1.06379E-21
 19.200  4.66158E-22 -4.59988E-22  3.46953E-22 -2.22715E-22  1.23154E-22  2.84734E-21 -2.73555E-21  1.93926E-21 -1.13018E-21  5.48491E-22
 19.300  2.33591E-22 -2.30865E-22  1.74757E-22 -1.12779E-22  6.27888E-23  1.42354E-21 -1.37069E-21  9.76621E-22 -5.73529E-22  2.81135E-22
 19.400  1.16422E-22 -1.15242E-22  8.75410E-23 -5.67903E-23  3.18300E-23  7.07924E-22 -6.83120E-22  4.89135E-22 -2.89404E-22  1.43253E-22
 19.500  5.77129E-23 -5.72152E-23  4.36119E-23 -2.84379E-23  1.60442E-23  3.50179E-22 -3.38628E-22  2.43641E-22 -1.45212E-22  7.25692E-23
 19.600  2.84562E-23 -2.82529E-23  2.16084E-23 -1.41613E-23  8.04152E-24  1.72301E-22 -1.66963E-22  1.20698E-22 -7.24534E-23  3.65485E-23
 19.700  1.39557E-23 -1.38763E-23  1.06481E-23 -7.01301E-24  4.00778E-24  8.43306E-23 -8.18836E-23  5.94678E-23 -3.59486E-23  1.83007E-23
 19.800  6.80777E-24 -6.77876E-24  5.21864E-24 -3.45385E-24  1.98620E-24  4.10567E-23 -3.99445E-23  2.91409E-23 -1.77370E-23  9.11082E-24
 19.900  3.30323E-24 -3.29379E-24  2.54383E-24 -1.69165E-24  9.78825E-25  1.98834E-23 -1.93823E-23  1.42027E-23 -8.70282E-24  4.50973E-24
  67 189 200   0.100
  0.000  5.42262E-02 -2.71527E-16 -4.57967E-16 -5.87936E-16 -5.00671E-17  9.24254E-02 -4.80991E-16 -7.70217E-16 -5.62917E-16 -2.53197E-15
  0.100  5.42186E-02  3.38625E-05 -1.29721E-08  3.12131E-12  8.58294E-17  9.25288E-02 -6.63291E-05  4.13533E-08 -8.82127E-12 -2.57488E-16
  0.200  5.41972E-02  1.33613E-04 -2.05795E-07  1.98606E-10 -7.02084E-14  9.28333E-02 -2.61500E-04  6.55364E-07 -5.59981E-10  2.05290E-13
  0.300  5.41664E-02  2.93831E-04 -1.02710E-06  2.23901E-09 -1.78675E-12  9.33220E-02 -5.74280E-04  3.26521E-06 -6.31234E-09  5.27237E-12
  0.400  5.41333E-02  5.05777E-04 -3.18160E-06  1.23979E-08 -1.78384E-11  9.39683E-02 -9.86663E-04  1.00903E-05 -3.49496E-08  5.22340E-11
  0.500  5.41071E-02  7.57825E-04 -7.56764E-06  4.64045E-08 -1.06278E-10  9.47367E-02 -1.47489E-03  2.39280E-05 -1.30806E-07  3.07404E-10
  0.600  5.40981E-02  1.03603E-03 -1.51942E-05  1.35337E-07 -4.56087E-10  9.55856E-02 -2.01082E-03  4.78689E-05 -3.81500E-07  1.30104E-09
  0.700  5.41173E-02  1.32484E-03 -2.70817E-05  3.31738E-07 -1.55889E-09  9.64693E-02 -2.56350E-03  8.49650E-05 -9.35289E-07  4.38202E-09
  0.800  5.41753E-02  1.60784E-03 -4.41521E-05  7.14966E-07 -4.50479E-09  9.73410E-02 -3.10094E-03  1.37876E-04 -2.01644E-06  1.24744E-08
  0.900  5.42818E-02  1.86860E-03 -6.71166E-05  1.39467E-06 -1.14351E-08  9.81552E-02 -3.59190E-03  2.08518E-04 -3.93568E-06  3.12017E-08
  1.000  5.44439E-02  2.09152E-03 -9.63669E-05  2.51138E-06 -2.61685E-08  9.88709E-02 -4.00769E-03  2.97748E-04 -7.09289E-06  7.04102E-08
  1.100  5.46665E-02  2.26260E-03 -1.31881E-04  4.23321E-06 -5.49874E-08  9.94537E-02 -4.32372E-03  4.05109E-04 -1.19694E-05  1.46065E-07
  1.200  5.49508E-02  2.37021E-03 -1.73153E-04  6.74821E-06 -1.07533E-07  9.98776E-02 -4.52089E-03  5.28660E-04 -1.91083E-05  2.82424E-07
  1.300  5.52947E-02  2.40564E-03 -2.19148E-04  1.02520E-05 -1.97705E-07  1.00127E-01 -4.58664E-03  6.64915E-04 -2.90814E-05  5.14299E-07
  1.400  5.56923E-02  2.36363E-03 -2.68304E-04  1.49313E-05 -3.44436E-07  1.00197E-01 -4.51560E-03  8.08904E-04 -4.24439E-05  8.89141E-07
  1.500  5.61340E-02  2.24265E-03 -3.18566E-04  2.09440E-05 -5.72144E-07  1.00094E-01 -4.30984E-03  9.54359E-04 -5.96788E-05  1.46857E-06
  1.600  5.66074E-02  2.04497E-03 -3.67470E-04  2.83974E-05 -9.10700E-07  9.98335E-02 -3.97873E-03  1.09403E-03 -8.11341E-05  2.32894E-06
  1.700  5.70972E-02  1.77660E-03 -4.12264E-04  3.73270E-05 -1.39474E-06  9.94412E-02 -3.53832E-03  1.22007E-03 -1.06958E-04  3.56053E-06
  1.800  5.75869E-02  1.44695E-03 -4.50068E-04  4.76772E-05 -2.06219E-06  9.89492E-02 -3.01035E-03  1.32459E-03 -1.37041E-04  5.26487E-06
  1.900  5.80588E-02  1.06842E-03 -4.78053E-04  5.92874E-05 -2.95204E-06  9.83943E-02 -2.42102E-03  1.40013E-03 -1.70962E-04  7.55002E-06
  2.000  5.84958E-02  6.55696E-04 -4.93636E-04  7.18839E-05 -4.10135E-06  9.78154E-02 -1.79940E-03  1.44024E-03 -2.07967E-04  1.05236E-05
  2.100  5.88818E-02  2.25035E-04 -4.94675E-04  8.50816E-05 -5.54177E-06  9.72505E-02 -1.17573E-03  1.43999E-03 -2.46953E-04  1.42839E-05
  2.200  5.92031E-02 -2.06581E-04 -4.79639E-04  9.83936E-05 -7.29580E-06  9.67345E-02 -5.79722E-04  1.39639E-03 -2.86495E-04  1.89089E-05
  2.300  5.94489E-02 -6.22302E-04 -4.47748E-04  1.11251E-04 -9.37318E-06  9.62966E-02 -3.87962E-05  1.30869E-03 -3.24898E-04  2.44447E-05
  2.400  5.96121E-02 -1.00626E-03 -3.99073E-04  1.23031E-04 -1.17678E-05  9.59584E-02  4.23435E-04  1.17855E-03 -3.60275E-04  3.08941E-05
  2.500  5.96896E-02 -1.34433E-03 -3.34575E-04  1.33088E-04 -1.44554E-05  9.57331E-02  7.88473E-04  1.01006E-03 -3.90657E-04  3.82056E-05
  2.600  5.96824E-02 -1.62482E-03 -2.56086E-04  1.40797E-04 -1.73929E-05  9.56245E-02  1.04391E-03  8.09520E-04 -4.14114E-04  4.62652E-05
  2.700  5.95955E-02 -1.83898E-03 -1.66239E-04  1.45589E-04 -2.05183E-05  9.56274E-02  1.18401E-03  5.85151E-04 -4.28891E-04  5.48918E-05
  2.800  5.94379E-02 -1.98134E-03 -6.83387E-05  1.46985E-04 -2.37533E-05  9.57281E-02  1.20985E-03  3.46595E-04 -4.33543E-04  6.38368E-05
  2.900  5.92215E-02 -2.04992E-03  3.38065E-05  1.44633E-04 -2.70058E-05  9.59060E-02  1.12909E-03  1.04348E-04 -4.27054E-04  7.27887E-05
  3.000  5.89606E-02 -2.04618E-03  1.36080E-04  1.38328E-04 -3.01752E-05  9.61354E-02  9.55234E-04 -1.30886E-04 -4.08941E-04  8.13832E-05
  3.100  5.86714E-02 -1.97488E-03  2.34267E-04  1.28026E-04 -3.31568E-05  9.63874E-02  7.06575E-04 -3.48860E-04 -3.79316E-04  8.92186E-05
  3.200  5.83704E-02 -1.84374E-03  3.24262E-04  1.13848E-04 -3.58484E-05  9.66322E-02  4.04865E-04 -5.40413E-04 -3.38927E-04  9.58747E-05
  3.300  5.80741E-02 -1.66302E-03  4.02260E-04  9.60711E-05 -3.81552E-05  9.68413E-02  7.37349E-05 -6.98036E-04 -2.89137E-04  1.00936E-04
  3.400  5.77976E-02 -1.44492E-03  4.64914E-04  7.51159E-05 -3.99947E-05  9.69897E-02 -2.62961E-04 -8.16325E-04 -2.31884E-04  1.04017E-04
  3.500  5.75543E-02 -1.20309E-03  5.09460E-04  5.15184E-05 -4.13010E-05  9.70569E-02 -5.82793E-04 -8.92300E-04 -1.69584E-04  1.04785E-04
  3.600  5.73546E-02 -9.51936E-04  5.33799E-04  2.59036E-05 -4.20271E-05  9.70286E-02 -8.66280E-04 -9.25559E-04 -1.05011E-04  1.02986E-04
  3.700  5.72054E-02 -7.06082E-04  5.36535E-04 -1.04697E-06 -4.21459E-05  9.68970E-02 -1.09819E-03 -9.18282E-04 -4.11508E-05  9.84650E-05
  3.800  5.71101E-02 -4.79764E-04  5.16978E-04 -2.86251E-05 -4.16496E-05  9.66608E-02 -1.26853E-03 -8.75070E-04  1.89662E-05  9.11794E-05
  3.900  5.70675E-02 -2.86329E-04  4.75111E-04 -5.61246E-05 -4.05474E-05  9.63249E-02 -1.37315E-03 -8.02637E-04  7.24312E-05  8.12131E-05
  4.000  5.70725E-02 -1.37771E-04  4.11544E-04 -8.28636E-05 -3.88627E-05  9.58990E-02 -1.41398E-03 -7.09383E-04  1.16622E-04  6.87786E-05
  4.100  5.71153E-02 -4.43461E-05  3.27445E-04 -1.08202E-04 -3.66288E-05  9.53962E-02 -1.39876E-03 -6.04869E-04  1.49356E-04  5.42148E-05
  4.200  5.71821E-02 -1.42552E-05  2.24472E-04 -1.31555E-04 -3.38845E-05  9.48314E-02 -1.34045E-03 -4.99237E-04  1.69009E-04  3.79771E-05
  4.300  5.72554E-02 -5.33936E-05  1.04708E-04 -1.52393E-04 -3.06704E-05  9.42189E-02 -1.25623E-03 -4.02592E-04  1.74619E-04  2.06208E-05
  4.400  5.73139E-02 -1.65176E-04 -2.94000E-05 -1.70250E-04 -2.70257E-05  9.35712E-02 -1.16622E-03 -3.24408E-04  1.65938E-04  2.77820E-06
  4.500  5.73339E-02 -3.50429E-04 -1.75093E-04 -1.84719E-04 -2.29863E-05  9.28964E-02 -1.09204E-03 -2.72967E-04  1.43454E-04 -1.48699E-05
  4.600  5.72896E-02 -6.07351E-04 -3.29343E-04 -1.95453E-04 -1.85842E-05  9.21971E-02 -1.05520E-03 -2.54886E-04  1.08362E-04 -3.16261E-05
  4.700  5.71539E-02 -9.31550E-04 -4.88901E-04 -2.02163E-04 -1.38494E-05  9.14695E-02 -1.07555E-03 -2.74733E-04  6.25041E-05 -4.68114E-05
  4.800  5.68998E-02 -1.31615E-03 -6.50339E-04 -2.04627E-04 -8.81190E-06  9.07026E-02 -1.16984E-03 -3.34788E-04  8.26153E-06 -5.98004E-05
  4.900  5.65011E-02 -1.75199E-03 -8.10105E-04 -2.02691E-04 -3.50595E-06  8.98785E-02 -1.35051E-03 -4.34927E-04 -5.15759E-05 -7.00549E-05
  5.000  5.59334E-02 -2.22788E-03 -9.64592E-04 -1.96287E-04  2.02582E-06  8.89729E-02 -1.62472E-03 -5.72658E-04 -1.13970E-04 -7.71537E-05
  5.100  5.51755E-02 -2.73096E-03 -1.11022E-03 -1.85439E-04  7.72826E-06  8.79564E-02 -1.99383E-03 -7.43300E-04 -1.75807E-04 -8.08172E-05
  5.200  5.42103E-02 -3.24716E-03 -1.24355E-03 -1.70286E-04  1.35304E-05  8.67963E-02 -2.45318E-03 -9.40285E-04 -2.34071E-04 -8.09240E-05
  5.300  5.30255E-02 -3.76164E-03 -1.36136E-03 -1.51087E-04  1.93435E-05  8.54585E-02 -2.99235E-03 -1.15558E-03 -2.86015E-04 -7.75182E-05
  5.400  5.16147E-02 -4.25939E-03 -1.46083E-03 -1.28233E-04  2.50618E-05  8.39103E-02 -3.59573E-03 -1.38016E-03 -3.29307E-04 -7.08074E-05
  5.500  4.99777E-02 -4.72577E-03 -1.53959E-03 -1.02248E-04  3.05641E-05  8.21220E-02 -4.24350E-03 -1.60457E-03 -3.62148E-04 -6.11504E-05
  5.600  4.81207E-02 -5.14710E-03 -1.59589E-03 -7.37839E-05  3.57195E-05  8.00700E-02 -4.91274E-03 -1.81949E-03 -3.83357E-04 -4.90360E-05
  5.700  4.60563E-02 -5.51124E-03 -1.62866E-03 -4.35996E-05  4.03931E-05  7.77381E-02 -5.57890E-03 -2.01618E-03 -3.92411E-04 -3.50530E-05
  5.800  4.38037E-02 -5.80802E-03 -1.63759E-03 -1.25398E-05  4.44546E-05  7.51190E-02 -6.21710E-03 -2.18703E-03 -3.89443E-04 -1.98556E-05
  5.900  4.13873E-02 -6.02967E-03 -1.62312E-03  1.85016E-05  4.77866E-05  7.22160E-02 -6.80363E-03 -2.32589E-03 -3.75194E-04 -4.12451E-06
  6.000  3.88366E-02 -6.17111E-03 -1.58646E-03  4.86213E-05  5.02931E-05  6.90423E-02 -7.31717E-03 -2.42832E-03 -3.50936E-04  1.14718E-05
  6.100  3.61845E-02 -6.23010E-03 -1.52953E-03  7.69499E-05  5.19065E-05  6.56216E-02 -7.73990E-03 -2.49175E-03 -3.18359E-04  2.63135E-05
  6.200  3.34669E-02 -6.20724E-03 -1.45482E-03  1.02696E-04  5.25931E-05  6.19868E-02 -8.05826E-03 -2.51548E-03 -2.79440E-04  3.98613E-05
  6.300  3.07204E-02 -6.10585E-03 -1.36532E-03  1.25183E-04  5.23561E-05  5.81787E-02 -8.26349E-03 -2.50057E-03 -2.36305E-04  5.16803E-05
  6.400  2.79819E-02 -5.93174E-03 -1.26431E-03  1.43884E-04  5.12357E-05  5.42441E-02 -8.35181E-03 -2.44966E-03 -1.91089E-04  6.14560E-05
  6.500  2.52868E-02 -5.69278E-03 -1.15526E-03  1.58446E-04  4.93068E-05  5.02340E-02 -8.32432E-03 -2.36669E-03 -1.45816E-04  6.90017E-05
  6.600  2.26678E-02 -5.39850E-03 -1.04159E-03  1.68696E-04  4.66740E-05  4.62010E-02 -8.18656E-03 -2.25653E-03 -1.02285E-04  7.42554E-05
  6.700  2.01542E-02 -5.05956E-03 -9.26587E-04  1.74645E-04  4.34648E-05  4.21973E-02 -7.94795E-03 -2.12466E-03 -6.20002E-05  7.72705E-05
  6.800  1.77711E-02 -4.68721E-03 -8.13234E-04  1.76474E-04  3.98214E-05  3.82727E-02 -7.62098E-03 -1.97684E-03 -2.61113E-05  7.81991E-05
  6.900  1.55385E-02 -4.29281E-03 -7.04111E-04  1.74514E-04  3.58923E-05  3.44726E-02 -7.22034E-03 -1.81873E-03  4.60163E-06  7.72706E-05
  7.000  1.34714E-02 -3.88729E-03 -6.01331E-04  1.69218E-04  3.18234E-05  3.08367E-02 -6.76200E-03 -1.65565E-03  2.97241E-05  7.47685E-05
  7.100  1.15798E-02 -3.48081E-03 -5.06495E-04  1.61122E-04  2.77509E-05  2.73981E-02 -6.26234E-03 -1.49238E-03  4.91772E-05  7.10068E-05
  7.200  9.86859E-03 -3.08238E-03 -4.20694E-04  1.50814E-04  2.37948E-05  2.41824E-02 -5.73737E-03 -1.33298E-03  6.31699E-05  6.63072E-05
  7.300  8.33794E-03 -2.69965E-03 -3.44528E-04  1.38898E-04  2.00545E-05  2.12076E-02 -5.20205E-03 -1.18071E-03  7.21405E-05  6.09800E-05
  7.400  6.98415E-03 -2.33877E-03 -2.78157E-04  1.25958E-04  1.66063E-05  1.84844E-02 -4.66973E-03 -1.03803E-03  7.66912E-05  5.53090E-05
  7.500  5.80002E-03 -2.00432E-03 -2.21366E-04  1.12537E-04  1.35027E-05  1.60165E-02 -4.15186E-03 -9.06597E-04  7.75249E-05  4.95399E-05
  7.600  4.77560E-03 -1.69941E-03 -1.73640E-04  9.91119E-05  1.07733E-05  1.38015E-02 -3.65772E-03 -7.87361E-04  7.53854E-05  4.38747E-05
  7.700  3.89895E-03 -1.42570E-03 -1.34245E-04  8.60829E-05  8.42677E-06  1.18319E-02 -3.19439E-03 -6.80650E-04  7.10072E-05  3.84691E-05
  7.800  3.15676E-03 -1.18365E-03 -1.02304E-04  7.37645E-05  6.45453E-06  1.00958E-02 -2.76682E-03 -5.86289E-04  6.50756E-05  3.34339E-05
  7.900  2.53505E-03 -9.72635E-04 -7.68659E-05  6.23860E-05  4.83414E-06  8.57814E-03 -2.37797E-03 -5.03714E-04  5.81984E-05  2.88389E-05
  8.000  2.01965E-03 -7.91222E-04 -5.69664E-05  5.20956E-05  3.53334E-06  7.26177E-03 -2.02908E-03 -4.32093E-04  5.08892E-05  2.47188E-05
  8.100  1.59675E-03 -6.37339E-04 -4.16764E-05  4.29694E-05  2.51379E-06  6.12817E-03 -1.71994E-03 -3.70423E-04  4.35599E-05  2.10798E-05
  8.200  1.25321E-03 -5.08501E-04 -3.01361E-05  3.50216E-05  1.73449E-06  5.15839E-03 -1.44917E-03 -3.17621E-04  3.65223E-05  1.79068E-05
  8.300  9.76854E-04 -4.01988E-04 -2.15784E-05  2.82177E-05  1.15453E-06  4.33369E-03 -1.21453E-03 -2.72595E-04  2.99955E-05  1.51699E-05
  8.400  7.56636E-04 -3.15006E-04 -1.53404E-05  2.24864E-05  7.35252E-07  3.63602E-03 -1.01319E-03 -2.34292E-04  2.41177E-05  1.28296E-05
  8.500  5.82740E-04 -2.44810E-04 -1.08666E-05  1.77322E-05  4.41746E-07  3.04848E-03 -8.41985E-04 -2.01737E-04  1.89597E-05  1.08425E-05
  8.600  4.46605E-04 -1.88800E-04 -7.70491E-06  1.38453E-05  2.43729E-07  2.55551E-03 -6.97585E-04 -1.74051E-04  1.45395E-05  9.16403E-06
  8.700  3.40894E-04 -1.44595E-04 -5.49745E-06  1.07108E-05  1.15886E-07  2.14310E-03 -5.76687E-04 -1.50464E-04  1.08360E-05  7.75138E-06
  8.800  2.59421E-04 -1.10064E-04 -3.96897E-06  8.21550E-06  3.78068E-08  1.79879E-03 -4.76124E-04 -1.30311E-04  7.80120E-06  6.56514E-06
  8.900  1.97052E-04 -8.33476E-05 -2.91350E-06  6.25286E-06 -6.37925E-09  1.51168E-03 -3.92943E-04 -1.13029E-04  5.37035E-06  5.57004E-06
  9.000  1.49591E-04 -6.28617E-05 -2.18128E-06  4.72629E-06 -2.85606E-08  1.27236E-03 -3.24466E-04 -9.81467E-05  3.47040E-06  4.73528E-06
  9.100  1.13651E-04 -4.72789E-05 -1.66646E-06  3.55090E-06 -3.72897E-08  1.07278E-03 -2.68305E-04 -8.52749E-05  2.02594E-06  4.03439E-06
  9.200  8.65421E-05 -3.55097E-05 -1.29633E-06  2.65410E-06 -3.84470E-08  9.06134E-04 -2.22374E-04 -7.40931E-05  9.63599E-07  3.44493E-06
  9.300  6.61469E-05 -2.66744E-05 -1.02236E-06  1.97527E-06 -3.58649E-08  7.66732E-04 -1.84874E-04 -6.43395E-05  2.14841E-07  2.94804E-06
  9.400  5.08225E-05 -2.00743E-05 -8.12990E-07  1.46491E-06 -3.18763E-08  6.49831E-04 -1.54277E-04 -5.58007E-05 -2.82367E-07  2.52793E-06
  9.500  3.93063E-05 -1.51621E-05 -6.48114E-07  1.08333E-06 -2.77710E-08  5.51514E-04 -1.29297E-04 -4.83029E-05 -5.82780E-07  2.17144E-06
  9.600  3.06372E-05 -1.15151E-05 -5.15104E-07  7.99280E-07 -2.41554E-08  4.68565E-04 -1.08867E-04 -4.17042E-05 -7.33694E-07  1.86767E-06
  9.700  2.40897E-05 -8.81057E-06 -4.05987E-07  5.88527E-07 -2.12214E-08  3.98351E-04 -9.21044E-05 -3.58889E-05 -7.75144E-07  1.60761E-06
  9.800  1.91202E-05 -6.80442E-06 -3.15599E-07  4.32514E-07 -1.89355E-08  3.38724E-04 -7.82905E-05 -3.07617E-05 -7.40348E-07  1.38384E-06
  9.900  1.53237E-05 -5.31380E-06 -2.40411E-07  3.17196E-07 -1.71646E-08  2.87937E-04 -6.68418E-05 -2.62439E-05 -6.56274E-07  1.19032E-06
 10.000  1.24000E-05 -4.20257E-06 -1.77845E-07  2.32034E-07 -1.57520E-08  2.44567E-04 -5.72892E-05 -2.22693E-05 -5.44270E-07  1.02217E-06
 10.100  1.01269E-05 -3.36989E-06 -1.25893E-07  1.69174E-07 -1.45579E-08  2.07451E-04 -4.92583E-05 -1.87821E-05 -4.20712E-07  8.75458E-07
 10.200  8.34079E-06 -2.74135E-06 -8.29241E-08  1.22790E-07 -1.34769E-08  1.75642E-04 -4.24526E-05 -1.57337E-05 -2.97660E-07  7.47069E-07
 10.300  6.92096E-06 -2.26219E-06 -4.75853E-08  8.85700E-08 -1.24405E-08  1.48359E-04 -3.66388E-05 -1.30815E-05 -1.83494E-07  6.34532E-07
 10.400  5.77855E-06 -1.89221E-06 -1.87557E-08  6.33312E-08 -1.14121E-08  1.24959E-04 -3.16349E-05 -1.07873E-05 -8.35321E-08  5.35891E-07
 10.500  4.84813E-06 -1.60195E-06  4.48915E-09  4.47229E-08 -1.03794E-08  1.04902E-04 -2.72991E-05 -8.81601E-06 -6.13635E-10  4.49580E-07
 10.600  4.08143E-06 -1.36996E-06  2.29087E-08  3.10109E-08 -9.34631E-09  8.77363E-05 -2.35219E-05 -7.13492E-06  6.43522E-08  3.74321E-07
 10.700  3.44283E-06 -1.18069E-06  3.71308E-08  2.09165E-08 -8.32518E-09  7.30779E-05 -2.02184E-05 -5.71345E-06  1.11890E-07  3.09037E-07
 10.800  2.90595E-06 -1.02294E-06  4.76850E-08  1.34981E-08 -7.33209E-09  6.05964E-05 -1.73225E-05 -4.52264E-06  1.43518E-07  2.52785E-07
 10.900  2.45115E-06 -8.88793E-07  5.50333E-08  8.06326E-09 -6.38294E-09  5.00059E-05 -1.47823E-05 -3.53514E-06  1.61367E-07  2.04706E-07
 11.000  2.06375E-06 -7.72681E-07  5.95948E-08  4.10393E-09 -5.49139E-09  4.10567E-05 -1.25561E-05 -2.72518E-06  1.67873E-07  1.63995E-07
 11.100  1.73257E-06 -6.70777E-07  6.17637E-08  1.24746E-09 -4.66779E-09  3.35291E-05 -1.06096E-05 -2.06866E-06  1.65529E-07  1.29879E-07
 11.200  1.44904E-06 -5.80484E-07  6.19183E-08 -7.79690E-10 -3.91897E-09  2.72293E-05 -8.91390E-06 -1.54325E-06  1.56706E-07  1.01612E-07
 11.300  1.20636E-06 -5.00056E-07  6.04251E-08 -2.17922E-09 -3.24841E-09  2.19858E-05 -7.44356E-06 -1.12853E-06  1.43532E-07  7.84751E-08
 11.400  9.99074E-07 -4.28317E-07  5.76356E-08 -3.10119E-09 -2.65670E-09  1.76466E-05 -6.17575E-06 -8.06060E-07  1.27817E-07  5.97800E-08
 11.500  8.22616E-07 -3.64450E-07  5.38815E-08 -3.65880E-09 -2.14203E-09  1.40777E-05 -5.08949E-06 -5.59407E-07  1.11026E-07  4.48787E-08
 11.600  6.73096E-07 -3.07848E-07  4.94677E-08 -3.93897E-09 -1.70076E-09  1.11609E-05 -4.16520E-06 -3.74176E-07  9.42844E-08  3.31703E-08
 11.700  5.47113E-07 -2.58008E-07  4.46661E-08 -4.00982E-09 -1.32791E-09  8.79256E-06 -3.38452E-06 -2.37934E-07  7.83961E-08  2.41082E-08
 11.800  4.41638E-07 -2.14467E-07  3.97105E-08 -3.92571E-09 -1.01756E-09  6.88242E-06 -2.73021E-06 -1.40124E-07  6.38899E-08  1.72048E-08
 11.900  3.53952E-07 -1.76769E-07  3.47939E-08 -3.73064E-09 -7.63272E-10  5.35236E-06 -2.18620E-06 -7.19276E-08  5.10637E-08  1.20334E-08
 12.000  2.81602E-07 -1.44441E-07  3.00675E-08 -3.46043E-09 -5.58363E-10  4.13525E-06 -1.73758E-06 -2.61049E-08  4.00349E-08  8.22823E-09
 12.100  2.22372E-07 -1.16994E-07  2.56430E-08 -3.14417E-09 -3.96193E-10  3.17388E-06 -1.37068E-06  3.18144E-09  3.07866E-08  5.48178E-09
 12.200  1.74276E-07 -9.39310E-08  2.15950E-08 -2.80517E-09 -2.70358E-10  2.41990E-06 -1.07313E-06  2.05512E-08  2.32095E-08  3.54085E-09
 12.300  1.35544E-07 -7.47510E-08  1.79664E-08 -2.46170E-09 -1.74852E-10  1.83277E-06 -8.33844E-07  2.95886E-08  1.71374E-08  2.20100E-09
 12.400  1.04615E-07 -5.89656E-08  1.47733E-08 -2.12759E-09 -1.04186E-10  1.37885E-06 -6.43036E-07  3.30153E-08  1.23747E-08  1.30054E-09
 12.500  8.01250E-08 -4.61076E-08  1.20107E-08 -1.81276E-09 -5.34602E-11  1.03044E-06 -4.92161E-07  3.28501E-08  8.71801E-09  7.14206E-10
 12.600  6.08986E-08 -3.57410E-08  9.65798E-09 -1.52382E-09 -1.83974E-11  7.64922E-07 -3.73860E-07  3.05506E-08  5.97089E-09  3.47014E-10
 12.700  4.59321E-08 -2.74671E-08  7.68363E-09 -1.26457E-09  4.64904E-12  5.64034E-07 -2.81872E-07  2.71368E-08  3.95334E-09  1.28535E-10
 12.800  3.43801E-08 -2.09290E-08  6.04971E-09 -1.03658E-09  1.87194E-11  4.13132E-07 -2.10936E-07  2.32952E-08  2.50719E-09  7.76606E-12
 12.900  2.55384E-08 -1.58130E-08  4.71527E-09 -8.39674E-10  2.62892E-11  3.00589E-07 -1.56683E-07  1.94642E-08  1.49819E-09 -5.12847E-11
 13.000  1.88277E-08 -1.18482E-08  3.63907E-09 -6.72426E-10  2.93259E-11  2.17252E-07 -1.15527E-07  1.59034E-08  8.15781E-10 -7.33016E-11
 13.100  1.37764E-08 -8.80441E-09  2.78154E-09 -5.32547E-10  2.93524E-11  1.55980E-07 -8.45582E-08  1.27475E-08  3.71422E-10 -7.46631E-11
 13.200  1.00054E-08 -6.48941E-09  2.10612E-09 -4.17246E-10  2.75146E-11  1.11249E-07 -6.14409E-08  1.00472E-08  9.60282E-11 -6.58122E-11
 13.300  7.21295E-09 -4.74468E-09  1.58005E-09 -3.23499E-10  2.46472E-11  7.88240E-08 -4.43211E-08  7.80005E-09 -6.29366E-11 -5.30749E-11
 13.400  5.16176E-09 -3.44151E-09  1.17470E-09 -2.48266E-10  2.13347E-11  5.54832E-08 -3.17421E-08  5.97260E-09 -1.44407E-10 -4.00172E-11
 13.500  3.66703E-09 -2.47669E-09  8.65627E-10 -1.88639E-10  1.79673E-11  3.87988E-08 -2.25712E-08  4.51539E-09 -1.76473E-10 -2.84274E-11
 13.600  2.58635E-09 -1.76855E-09  6.32341E-10 -1.41943E-10  1.47877E-11  2.69550E-08 -1.59364E-08  3.37332E-09 -1.78823E-10 -1.90061E-11
 13.700  1.81110E-09 -1.25321E-09  4.57990E-10 -1.05793E-10  1.19317E-11  1.86053E-08 -1.11728E-08  2.49200E-09 -1.64809E-10 -1.18337E-11
 13.800  1.25923E-09 -8.81308E-10  3.28933E-10 -7.81174E-11  9.45940E-12  1.27592E-08 -7.77850E-09  1.82144E-09 -1.43142E-10 -6.67458E-12
 13.900  8.69360E-10 -6.15133E-10  2.34296E-10 -5.71564E-11  7.38128E-12  8.69383E-09 -5.37786E-09  1.31785E-09 -1.19226E-10 -3.16519E-12
 14.000  5.96007E-10 -4.26170E-10  1.65533E-10 -4.14460E-11  5.67647E-12  5.88589E-09 -3.69254E-09  9.44227E-10 -9.61823E-11 -9.22455E-13
 14.100  4.05774E-10 -2.93092E-10  1.16016E-10 -2.97902E-11  4.30683E-12  3.95949E-09 -2.51805E-09  6.70197E-10 -7.56203E-11  3.99950E-13
 14.200  2.74361E-10 -2.00109E-10  8.06714E-11 -2.12278E-11  3.22655E-12  2.64670E-09 -1.70549E-09  4.71384E-10 -5.81834E-11  1.08807E-12
 14.300  1.84243E-10 -1.35644E-10  5.56587E-11 -1.49981E-11  2.38849E-12  1.75801E-09 -1.14735E-09  3.28633E-10 -4.39383E-11  1.36322E-12
 14.400  1.22888E-10 -9.12936E-11  3.81070E-11 -1.05082E-11  1.74810E-12  1.16038E-09 -7.66709E-10  2.27151E-10 -3.26361E-11  1.38755E-12
 14.500  8.14150E-11 -6.10119E-11  2.58928E-11 -7.30197E-12  1.26557E-12  7.61128E-10 -5.08941E-10  1.55696E-10 -2.38818E-11  1.27395E-12
 14.600  5.35790E-11 -4.04904E-11  1.74620E-11 -5.03294E-12  9.06703E-13  4.96138E-10 -3.35605E-10  1.05848E-10 -1.72383E-11  1.09696E-12
 14.700  3.50270E-11 -2.66859E-11  1.16893E-11 -3.44131E-12  6.43080E-13  3.21402E-10 -2.19852E-10  7.13841E-11 -1.22862E-11  9.02783E-13
 14.800  2.27483E-11 -1.74675E-11  7.76790E-12 -2.33451E-12  4.51676E-13  2.06922E-10 -1.43085E-10  4.77644E-11 -8.65338E-12  7.17774E-13
 14.900  1.46775E-11 -1.13560E-11  5.12473E-12 -1.57138E-12  3.14252E-13  1.32401E-10 -9.25200E-11  3.17140E-11 -6.02685E-12  5.55023E-13
 15.000  9.40880E-12 -7.33307E-12  3.35680E-12 -1.04960E-12  2.16634E-13  8.41996E-11 -5.94391E-11  2.08978E-11 -4.15311E-12  4.19277E-13
 15.100  5.99256E-12 -4.70373E-12  2.18322E-12 -6.95775E-13  1.48005E-13  5.32204E-11 -3.79422E-11  1.36679E-11 -2.83296E-12  3.10410E-13
 15.200  3.79233E-12 -2.99720E-12  1.41001E-12 -4.57773E-13  1.00234E-13  3.34354E-11 -2.40658E-11  8.87371E-12 -1.91368E-12  2.25751E-13
 15.300  2.38470E-12 -1.89726E-12  9.04321E-13 -2.98956E-13  6.73015E-14  2.08788E-11 -1.51679E-11  5.71944E-12 -1.28059E-12  1.61567E-13
 15.400  1.49008E-12 -1.19317E-12  5.76013E-13 -1.93810E-13  4.48108E-14  1.29595E-11 -9.49973E-12  3.66006E-12 -8.49177E-13  1.13948E-13
 15.500  9.25239E-13 -7.45514E-13  3.64398E-13 -1.24736E-13  2.95908E-14  7.99579E-12 -5.91253E-12  2.32567E-12 -5.58148E-13  7.92818E-14
 15.600  5.70929E-13 -4.62820E-13  2.28971E-13 -7.97051E-14  1.93825E-14  4.90387E-12 -3.65702E-12  1.46747E-12 -3.63722E-13  5.44685E-14
 15.700  3.50113E-13 -2.85489E-13  1.42912E-13 -5.05697E-14  1.25951E-14  2.98972E-12 -2.24795E-12  9.19575E-13 -2.35044E-13  3.69782E-14
 15.800  2.13378E-13 -1.74988E-13  8.86069E-14 -3.18591E-14  8.12061E-15  1.81195E-12 -1.37330E-12  5.72309E-13 -1.50652E-13  2.48226E-14
 15.900  1.29247E-13 -1.06582E-13  5.45754E-14 -1.99318E-14  5.19539E-15  1.09168E-12 -8.33836E-13  3.53778E-13 -9.57897E-14  1.64847E-14
 16.000  7.78102E-14 -6.45108E-14  3.33950E-14 -1.23839E-14  3.29867E-15  6.53870E-13 -5.03201E-13  2.17229E-13 -6.04299E-14  1.08354E-14
 16.100  4.65597E-14 -3.88039E-14  2.03021E-14 -7.64169E-15  2.07872E-15  3.89350E-13 -3.01831E-13  1.32500E-13 -3.78300E-14  7.05204E-15
 16.200  2.76920E-14 -2.31967E-14  1.22629E-14 -4.68350E-15  1.30026E-15  2.30490E-13 -1.79953E-13  8.02881E-14 -2.35033E-14  4.54608E-15
 16.300  1.63713E-14 -1.37816E-14  7.35976E-15 -2.85118E-15  8.07390E-16  1.35655E-13 -1.06645E-13  4.83335E-14 -1.44938E-14  2.90366E-15
 16.400  9.62080E-15 -8.13792E-15  4.38901E-15 -1.72415E-15  4.97725E-16  7.93782E-14 -6.28230E-14  2.89088E-14 -8.87248E-15  1.83806E-15
 16.500  5.62016E-15 -4.77618E-15  2.60089E-15 -1.03572E-15  3.04639E-16  4.61804E-14 -3.67881E-14  1.71799E-14 -5.39217E-15  1.15341E-15
 16.600  3.26368E-15 -2.78622E-15  1.53161E-15 -6.18092E-16  1.85142E-16  2.67124E-14 -2.14149E-14  1.01446E-14 -3.25371E-15  7.17647E-16
 16.700  1.88409E-15 -1.61560E-15  8.96315E-16 -3.66459E-16  1.11732E-16  1.53630E-14 -1.23925E-14  5.95250E-15 -1.94953E-15  4.42822E-16
 16.800  1.08128E-15 -9.31205E-16  5.21286E-16 -2.15863E-16  6.69629E-17  8.78525E-15 -7.12923E-15  3.47080E-15 -1.15999E-15  2.71029E-16
 16.900  6.16928E-16 -5.33538E-16  3.01308E-16 -1.26338E-16  3.98569E-17  4.99525E-15 -4.07737E-15  2.01115E-15 -6.85468E-16  1.64566E-16
 17.000  3.49942E-16 -3.03883E-16  1.73093E-16 -7.34699E-17  2.35621E-17  2.82418E-15 -2.31837E-15  1.15814E-15 -4.02307E-16  9.91444E-17
 17.100  1.97349E-16 -1.72060E-16  9.88321E-17 -4.24544E-17  1.38353E-17  1.58769E-15 -1.31057E-15  6.62825E-16 -2.34530E-16  5.92733E-17
 17.200  1.10653E-16 -9.68496E-17  5.60893E-17 -2.43777E-17  8.06966E-18  8.87540E-16 -7.36580E-16  3.77026E-16 -1.35812E-16  3.51697E-17
 17.300  6.16862E-17 -5.41965E-17  3.16402E-17 -1.39103E-17  4.67558E-18  4.93361E-16 -4.11598E-16  2.13155E-16 -7.81271E-17  2.07131E-17
 17.400  3.41916E-17 -3.01517E-17  1.77414E-17 -7.88803E-18  2.69125E-18  2.72712E-16 -2.28681E-16  1.19780E-16 -4.46496E-17  1.21099E-17
 17.500  1.88438E-17 -1.66775E-17  9.88878E-18 -4.44535E-18  1.53897E-18  1.49903E-16 -1.26328E-16  6.69042E-17 -2.53517E-17  7.02897E-18
 17.600  1.03263E-17 -9.17143E-18  5.47915E-18 -2.48980E-18  8.74351E-19  8.19401E-17 -6.93886E-17  3.71464E-17 -1.43020E-17  4.05084E-18
 17.700  5.62668E-18 -5.01466E-18  3.01795E-18 -1.38598E-18  4.93562E-19  4.45414E-17 -3.78972E-17  2.05017E-17 -8.01690E-18  2.31813E-18
 17.800  3.04863E-18 -2.72618E-18  1.65254E-18 -7.66833E-19  2.76832E-19  2.40781E-17 -2.05809E-17  1.12482E-17 -4.46537E-18  1.31736E-18
 17.900  1.64251E-18 -1.47362E-18  8.99586E-19 -4.21704E-19  1.54287E-19  1.29442E-17 -1.11139E-17  6.13489E-18 -2.47156E-18  7.43501E-19
 18.000  8.79979E-19 -7.92031E-19  4.86853E-19 -2.30511E-19  8.54470E-20  6.92042E-18 -5.96793E-18  3.32642E-18 -1.35945E-18  4.16771E-19
 18.100  4.68818E-19 -4.23288E-19  2.61955E-19 -1.25247E-19  4.70259E-20  3.67958E-18 -3.18671E-18  1.79310E-18 -7.43115E-19  2.32052E-19
 18.200  2.48377E-19 -2.24944E-19  1.40133E-19 -6.76462E-20  2.57198E-20  1.94572E-18 -1.69212E-18  9.60951E-19 -4.03705E-19  1.28342E-19
 18.300  1.30858E-19 -1.18868E-19  7.45327E-20 -3.63192E-20  1.39798E-20  1.02325E-18 -8.93507E-19  5.12008E-19 -2.17975E-19  7.05150E-20
 18.400  6.85619E-20 -6.24623E-20  3.94148E-20 -1.93846E-20  7.55192E-21  5.35197E-19 -4.69189E-19  2.71233E-19 -1.16976E-19  3.84897E-20
 18.500  3.57241E-20 -3.26393E-20  2.07246E-20 -1.02853E-20  4.05461E-21  2.78405E-19 -2.45014E-19  1.42859E-19 -6.23956E-20  2.08729E-20
 18.600  1.85117E-20 -1.69606E-20  1.08352E-20 -5.42531E-21  2.16366E-21  1.44039E-19 -1.27242E-19  7.48141E-20 -3.30819E-20  1.12465E-20
 18.700  9.53984E-21 -8.76451E-21  5.63274E-21 -2.84508E-21  1.14761E-21  7.41183E-20 -6.57169E-20  3.89564E-20 -1.74349E-20  6.02108E-21
 18.800  4.88940E-21 -4.50409E-21  2.91169E-21 -1.48333E-21  6.05032E-22  3.79334E-20 -3.37547E-20  2.01699E-20 -9.13393E-21  3.20311E-21
 18.900  2.49226E-21 -2.30190E-21  1.49665E-21 -7.68885E-22  3.17068E-22  1.93096E-20 -1.72429E-20  1.03841E-20 -4.75682E-21  1.69329E-21
 19.000  1.26347E-21 -1.16996E-21  7.64987E-22 -3.96258E-22  1.65169E-22  9.77654E-21 -8.76017E-21  5.31592E-21 -2.46269E-21  8.89549E-22
 19.100  6.37048E-22 -5.91388E-22  3.88826E-22 -2.03047E-22  8.55307E-23  4.92337E-21 -4.42635E-21  2.70611E-21 -1.26751E-21  4.64416E-22
 19.200  3.19466E-22 -2.97299E-22  1.96531E-22 -1.03449E-22  4.40294E-23  2.46610E-21 -2.22441E-21  1.36986E-21 -6.48558E-22  2.40969E-22
 19.300  1.59340E-22 -1.48643E-22  9.87847E-23 -5.24056E-23  2.25321E-23  1.22867E-21 -1.11180E-21  6.89575E-22 -3.29927E-22  1.24265E-22
 19.400  7.90464E-23 -7.39140E-23  4.93786E-23 -2.63973E-23  1.14634E-23  6.08890E-22 -5.52700E-22  3.45196E-22 -1.66866E-22  6.36917E-23
 19.500  3.90032E-23 -3.65553E-23  2.45463E-23 -1.32214E-23  5.79807E-24  3.00143E-22 -2.73279E-22  1.71846E-22 -8.39091E-23  3.24476E-23
 19.600  1.91419E-23 -1.79813E-23  1.21349E-23 -6.58484E-24  2.91559E-24  1.47166E-22 -1.34395E-22  8.50760E-23 -4.19521E-23  1.64309E-23
 19.700  9.34420E-24 -8.79718E-24  5.96623E-24 -3.26113E-24  1.45765E-24  7.17763E-23 -6.57393E-23  4.18870E-23 -2.08550E-23  8.27057E-24
 19.800  4.53708E-24 -4.28080E-24  2.91731E-24 -1.60603E-24  7.24553E-25  3.48220E-23 -3.19844E-23  2.05098E-23 -1.03084E-23  4.13824E-24
 19.900  2.19126E-24 -2.07190E-24  1.41870E-24 -7.86525E-25  3.58088E-25  1.68047E-23 -1.54785E-23  9.98759E-24 -5.06644E-24  2.05834E-24
  67 190 200   0.100
  0.000  5.34623E-02 -2.79285E-16 -4.16334E-16 -5.25389E-16 -7.29550E-16  9.28276E-02 -4.80991E-16 -6.24500E-16 -1.05078E-15  5.43586E-16
  0.100  5.34553E-02  2.96414E-05 -1.87681E-08  5.66924E-12 -1.18015E-15  9.29413E-02 -6.41839E-05  5.58306E-08 -1.62123E-11 -1.49057E-14
  0.200  5.34358E-02  1.16932E-04 -2.97904E-07  3.60759E-10 -1.53999E-13  9.32763E-02 -2.53030E-04  8.85091E-07 -1.03163E-09  5.00285E-13
  0.300  5.34086E-02  2.57052E-04 -1.48814E-06  4.06943E-09 -3.95666E-12  9.38140E-02 -5.55632E-04  4.41223E-06 -1.16339E-08  1.30767E-11
  0.400  5.33811E-02  4.42241E-04 -4.61569E-06  2.25526E-08 -3.94660E-11  9.45246E-02 -9.54514E-04  1.36457E-05 -6.44526E-08  1.29350E-10
  0.500  5.33627E-02  6.62189E-04 -1.09976E-05  8.45095E-08 -2.34611E-10  9.53689E-02 -1.42663E-03  3.23932E-05 -2.41423E-07  7.60402E-10
  0.600  5.33644E-02  9.04561E-04 -2.21293E-05  2.46834E-07 -1.00449E-09  9.63007E-02 -1.94467E-03  6.48894E-05 -7.04851E-07  3.21426E-09
  0.700  5.33978E-02  1.15562E-03 -3.95500E-05  6.06170E-07 -3.42549E-09  9.72692E-02 -2.47865E-03  1.15361E-04 -1.73025E-06  1.08103E-08
  0.800  5.34739E-02  1.40094E-03 -6.46943E-05  1.30943E-06 -9.87813E-09  9.82225E-02 -2.99758E-03  1.87564E-04 -3.73621E-06  3.07274E-08
  0.900  5.36026E-02  1.62611E-03 -9.87381E-05  2.56143E-06 -2.50313E-08  9.91103E-02 -3.47124E-03  2.84315E-04 -7.30616E-06  7.67412E-08
  1.000  5.37916E-02  1.81752E-03 -1.42450E-04  4.62781E-06 -5.72099E-08  9.98870E-02 -3.87184E-03  4.07077E-04 -1.31969E-05  1.72924E-07
  1.100  5.40457E-02  1.96303E-03 -1.96062E-04  7.83172E-06 -1.20133E-07  1.00514E-01 -4.17563E-03  5.55601E-04 -2.23295E-05  3.58254E-07
  1.200  5.43660E-02  2.05262E-03 -2.59162E-04  1.25430E-05 -2.34930E-07  1.00963E-01 -4.36415E-03  7.27696E-04 -3.57587E-05  6.91927E-07
  1.300  5.47502E-02  2.07891E-03 -3.30632E-04  1.91595E-05 -4.32261E-07  1.01217E-01 -4.42526E-03  9.19115E-04 -5.46199E-05  1.25895E-06
  1.400  5.51915E-02  2.03754E-03 -4.08627E-04  2.80807E-05 -7.54257E-07  1.01270E-01 -4.35377E-03  1.12361E-03 -8.00527E-05  2.17546E-06
  1.500  5.56800E-02  1.92741E-03 -4.90611E-04  3.96748E-05 -1.25594E-06  1.01129E-01 -4.15167E-03  1.33312E-03 -1.13105E-04  3.59287E-06
  1.600  5.62018E-02  1.75078E-03 -5.73447E-04  5.42417E-05 -2.00576E-06  1.00813E-01 -3.82799E-03  1.53818E-03 -1.54625E-04  5.70013E-06
  1.700  5.67409E-02  1.51312E-03 -6.53536E-04  7.19749E-05 -3.08483E-06  1.00349E-01 -3.39821E-03  1.72838E-03 -2.05140E-04  8.72276E-06
  1.800  5.72792E-02  1.22284E-03 -7.27006E-04  9.29245E-05 -4.58463E-06  9.97732E-02 -2.88336E-03  1.89298E-03 -2.64747E-04  1.29181E-05
  1.900  5.77978E-02  8.90888E-04 -7.89934E-04  1.16967E-04 -6.60297E-06  9.91276E-02 -2.30876E-03  2.02164E-03 -3.33016E-04  1.85656E-05
  2.000  5.82782E-02  5.30159E-04 -8.38586E-04  1.43783E-04 -9.23830E-06  9.84555E-02 -1.70261E-03  2.10504E-03 -4.08912E-04  2.59520E-05
  2.100  5.87032E-02  1.54843E-04 -8.69667E-04  1.72849E-04 -1.25825E-05  9.77997E-02 -1.09428E-03  2.13565E-03 -4.90767E-04  3.53515E-05
  2.200  5.90580E-02 -2.20303E-04 -8.80541E-04  2.03442E-04 -1.67129E-05  9.71996E-02 -5.12738E-04  2.10823E-03 -5.76285E-04  4.70004E-05
  2.300  5.93309E-02 -5.80704E-04 -8.69433E-04  2.34658E-04 -2.16833E-05  9.66881E-02  1.51588E-05  2.02033E-03 -6.62604E-04  6.10698E-05
  2.400  5.95141E-02 -9.12691E-04 -8.35568E-04  2.65448E-04 -2.75165E-05  9.62899E-02  4.66129E-04  1.87256E-03 -7.46408E-04  7.76351E-05
  2.500  5.96042E-02 -1.20417E-03 -7.79258E-04  2.94663E-04 -3.41967E-05  9.60202E-02  8.21745E-04  1.66867E-03 -8.24084E-04  9.66478E-05
  2.600  5.96024E-02 -1.44519E-03 -7.01920E-04  3.21111E-04 -4.16651E-05  9.58837E-02  1.06940E-03  1.41544E-03 -8.91921E-04  1.17909E-04
  2.700  5.95138E-02 -1.62838E-03 -6.06016E-04  3.43618E-04 -4.98173E-05  9.58749E-02  1.20289E-03  1.12233E-03 -9.46331E-04  1.41052E-04
  2.800  5.93481E-02 -1.74926E-03 -4.94942E-04  3.61090E-04 -5.85040E-05  9.59791E-02  1.22264E-03  8.00977E-04 -9.84087E-04  1.65529E-04
  2.900  5.91181E-02 -1.80638E-03 -3.72857E-04  3.72570E-04 -6.75354E-05  9.61735E-02  1.13546E-03  4.64537E-04 -1.00255E-03  1.90616E-04
  3.000  5.88392E-02 -1.80127E-03 -2.44466E-04  3.77293E-04 -7.66876E-05  9.64295E-02  9.53949E-04  1.26909E-04 -9.99866E-04  2.15422E-04
  3.100  5.85287E-02 -1.73833E-03 -1.14790E-04  3.74716E-04 -8.57135E-05  9.67148E-02  6.95493E-04 -1.98082E-04 -9.75148E-04  2.38919E-04
  3.200  5.82047E-02 -1.62451E-03  1.10755E-05  3.64549E-04 -9.43542E-05  9.69961E-02  3.81019E-04 -4.97492E-04 -9.28569E-04  2.59980E-04
  3.300  5.78848E-02 -1.46891E-03  1.28194E-04  3.46758E-04 -1.02352E-04  9.72415E-02  3.35032E-05 -7.60022E-04 -8.61418E-04  2.77427E-04
  3.400  5.75856E-02 -1.28230E-03  2.31987E-04  3.21564E-04 -1.09466E-04  9.74224E-02 -3.23606E-04 -9.76658E-04 -7.76079E-04  2.90095E-04
  3.500  5.73214E-02 -1.07664E-03  3.18407E-04  2.89415E-04 -1.15480E-04  9.75157E-02 -6.67978E-04 -1.14118E-03 -6.75942E-04  2.96889E-04
  3.600  5.71038E-02 -8.64476E-04  3.84061E-04  2.50961E-04 -1.20218E-04  9.75049E-02 -9.79876E-04 -1.25048E-03 -5.65251E-04  2.96857E-04
  3.700  5.69406E-02 -6.58483E-04  4.26290E-04  2.07012E-04 -1.23553E-04  9.73806E-02 -1.24344E-03 -1.30470E-03 -4.48901E-04  2.89246E-04
  3.800  5.68356E-02 -4.70904E-04  4.43210E-04  1.58497E-04 -1.25403E-04  9.71412E-02 -1.44765E-03 -1.30719E-03 -3.32184E-04  2.73564E-04
  3.900  5.67883E-02 -3.13127E-04  4.33714E-04  1.06418E-04 -1.25744E-04  9.67917E-02 -1.58698E-03 -1.26421E-03 -2.20522E-04  2.49619E-04
  4.000  5.67936E-02 -1.95276E-04  3.97443E-04  5.18179E-05 -1.24596E-04  9.63427E-02 -1.66165E-03 -1.18458E-03 -1.19172E-04  2.17558E-04
  4.100  5.68419E-02 -1.25884E-04  3.34748E-04 -4.25933E-06 -1.22023E-04  9.58092E-02 -1.67742E-03 -1.07905E-03 -3.29552E-05  1.77876E-04
  4.200  5.69193E-02 -1.11624E-04  2.46635E-04 -6.07874E-05 -1.18122E-04  9.52081E-02 -1.64509E-03 -9.59716E-04  3.40052E-05  1.31415E-04
  4.300  5.70077E-02 -1.57115E-04  1.34706E-04 -1.16777E-04 -1.13010E-04  9.45568E-02 -1.57960E-03 -8.39216E-04  7.85026E-05  7.93444E-05
  4.400  5.70857E-02 -2.64785E-04  1.11510E-06 -1.71282E-04 -1.06818E-04  9.38701E-02 -1.49885E-03 -7.30029E-04  9.84169E-05  2.31209E-05
  4.500  5.71290E-02 -4.34804E-04 -1.51487E-04 -2.23409E-04 -9.96741E-05  9.31591E-02 -1.42237E-03 -6.43731E-04  9.28243E-05 -3.55706E-05
  4.600  5.71111E-02 -6.65085E-04 -3.19989E-04 -2.72309E-04 -9.16978E-05  9.24290E-02 -1.36985E-03 -5.90323E-04  6.20424E-05 -9.48857E-05
  4.700  5.70045E-02 -9.51341E-04 -5.00865E-04 -3.17188E-04 -8.29951E-05  9.16783E-02 -1.35972E-03 -5.77675E-04  7.60539E-06 -1.52904E-04
  4.800  5.67813E-02 -1.28721E-03 -6.90226E-04 -3.57302E-04 -7.36546E-05  9.08977E-02 -1.40783E-03 -6.11084E-04 -6.78273E-05 -2.07715E-04
  4.900  5.64146E-02 -1.66445E-03 -8.83874E-04 -3.91968E-04 -6.37498E-05  9.00704E-02 -1.52627E-03 -6.93008E-04 -1.60624E-04 -2.57514E-04
  5.000  5.58793E-02 -2.07318E-03 -1.07738E-03 -4.20578E-04 -5.33435E-05  8.91725E-02 -1.72255E-03 -8.22960E-04 -2.66387E-04 -3.00683E-04
  5.100  5.51536E-02 -2.50223E-03 -1.26620E-03 -4.42620E-04 -4.24951E-05  8.81744E-02 -1.99904E-03 -9.97581E-04 -3.80197E-04 -3.35872E-04
  5.200  5.42195E-02 -2.93951E-03 -1.44576E-03 -4.57695E-04 -3.12696E-05  8.70426E-02 -2.35280E-03 -1.21089E-03 -4.96885E-04 -3.62066E-04
  5.300  5.30642E-02 -3.37240E-03 -1.61164E-03 -4.65550E-04 -1.97465E-05  8.57416E-02 -2.77576E-03 -1.45469E-03 -6.11309E-04 -3.78626E-04
  5.400  5.16806E-02 -3.78828E-03 -1.75970E-03 -4.66099E-04 -8.02716E-06  8.42366E-02 -3.25525E-03 -1.71905E-03 -7.18622E-04 -3.85323E-04
  5.500  5.00677E-02 -4.17495E-03 -1.88624E-03 -4.59447E-04  3.75933E-06  8.24959E-02 -3.77480E-03 -1.99299E-03 -8.14515E-04 -3.82331E-04
  5.600  4.82315E-02 -4.52114E-03 -1.98818E-03 -4.45897E-04  1.54546E-05  8.04933E-02 -4.31518E-03 -2.26507E-03 -8.95419E-04 -3.70218E-04
  5.700  4.61842E-02 -4.81693E-03 -2.06318E-03 -4.25960E-04  2.68730E-05  7.82101E-02 -4.85559E-03 -2.52405E-03 -9.58648E-04 -3.49896E-04
  5.800  4.39446E-02 -5.05417E-03 -2.10974E-03 -4.00341E-04  3.78070E-05  7.56369E-02 -5.37489E-03 -2.75956E-03 -1.00249E-03 -3.22566E-04
  5.900  4.15372E-02 -5.22675E-03 -2.12728E-03 -3.69916E-04  4.80374E-05  7.27746E-02 -5.85285E-03 -2.96258E-03 -1.02625E-03 -2.89643E-04
  6.000  3.89914E-02 -5.33084E-03 -2.11618E-03 -3.35703E-04  5.73444E-05  6.96349E-02 -6.27123E-03 -3.12590E-03 -1.03016E-03 -2.52672E-04
  6.100  3.63404E-02 -5.36503E-03 -2.07774E-03 -2.98813E-04  6.55217E-05  6.62401E-02 -6.61474E-03 -3.24437E-03 -1.01536E-03 -2.13246E-04
  6.200  3.36202E-02 -5.33024E-03 -2.01407E-03 -2.60402E-04  7.23893E-05  6.26222E-02 -6.87169E-03 -3.31506E-03 -9.83694E-04 -1.72920E-04
  6.300  3.08680E-02 -5.22967E-03 -1.92805E-03 -2.21614E-04  7.78063E-05  5.88218E-02 -7.03450E-03 -3.33727E-03 -9.37601E-04 -1.33135E-04
  6.400  2.81212E-02 -5.06853E-03 -1.82310E-03 -1.83536E-04  8.16800E-05  5.48856E-02 -7.09980E-03 -3.31238E-03 -8.79882E-04 -9.51632E-05
  6.500  2.54155E-02 -4.85374E-03 -1.70305E-03 -1.47140E-04  8.39726E-05  5.08652E-02 -7.06836E-03 -3.24359E-03 -8.13533E-04 -6.00534E-05
  6.600  2.27844E-02 -4.59352E-03 -1.57193E-03 -1.13256E-04  8.47035E-05  4.68141E-02 -6.94477E-03 -3.13562E-03 -7.41558E-04 -2.86082E-05
  6.700  2.02578E-02 -4.29699E-03 -1.43378E-03 -8.25328E-05  8.39474E-05  4.27856E-02 -6.73689E-03 -2.99428E-03 -6.66814E-04 -1.37165E-06
  6.800  1.78611E-02 -3.97370E-03 -1.29251E-03 -5.54319E-05  8.18296E-05  3.88306E-02 -6.45519E-03 -2.82610E-03 -5.91879E-04  2.13655E-05
  6.900  1.56151E-02 -3.63323E-03 -1.15168E-03 -3.22189E-05  7.85169E-05  3.49961E-02 -6.11203E-03 -2.63789E-03 -5.18958E-04  3.95451E-05
  7.000  1.35352E-02 -3.28477E-03 -1.01444E-03 -1.29744E-05  7.42072E-05  3.13230E-02 -5.72083E-03 -2.43642E-03 -4.49826E-04  5.33104E-05
  7.100  1.16316E-02 -2.93679E-03 -8.83422E-04  2.38719E-06  6.91176E-05  2.78458E-02 -5.29539E-03 -2.22806E-03 -3.85807E-04  6.29678E-05
  7.200  9.90933E-03 -2.59679E-03 -7.60709E-04  1.40914E-05  6.34719E-05  2.45910E-02 -4.84919E-03 -2.01855E-03 -3.27780E-04  6.89442E-05
  7.300  8.36898E-03 -2.27109E-03 -6.47797E-04  2.24724E-05  5.74894E-05  2.15777E-02 -4.39479E-03 -1.81284E-03 -2.76217E-04  7.17443E-05
  7.400  7.00684E-03 -1.96472E-03 -5.45638E-04  2.79396E-05  5.13749E-05  1.88175E-02 -3.94343E-03 -1.61500E-03 -2.31233E-04  7.19109E-05
  7.500  5.81573E-03 -1.68143E-03 -4.54674E-04  3.09447E-05  4.53105E-05  1.63146E-02 -3.50473E-03 -1.42812E-03 -1.92655E-04  6.99899E-05
  7.600  4.78564E-03 -1.42366E-03 -3.74913E-04  3.19520E-05  3.94503E-05  1.40671E-02 -3.08645E-03 -1.25443E-03 -1.60088E-04  6.65019E-05
  7.700  3.90454E-03 -1.19272E-03 -3.05996E-04  3.14126E-05  3.39171E-05  1.20677E-02 -2.69454E-03 -1.09529E-03 -1.32986E-04  6.19209E-05
  7.800  3.15899E-03 -9.88850E-04 -2.47287E-04  2.97446E-05  2.88013E-05  1.03045E-02 -2.33310E-03 -9.51366E-04 -1.10715E-04  5.66603E-05
  7.900  2.53484E-03 -8.11429E-04 -1.97953E-04  2.73182E-05  2.41627E-05  8.76263E-03 -2.00460E-03 -8.22677E-04 -9.26058E-05  5.10661E-05
  8.000  2.01780E-03 -6.59149E-04 -1.57035E-04  2.44476E-05  2.00323E-05  7.42465E-03 -1.71002E-03 -7.08778E-04 -7.79962E-05  4.54146E-05
  8.100  1.59388E-03 -5.30192E-04 -1.23522E-04  2.13874E-05  1.64171E-05  6.27195E-03 -1.44914E-03 -6.08863E-04 -6.62659E-05  3.99157E-05
  8.200  1.24981E-03 -4.22400E-04 -9.63999E-05  1.83335E-05  1.33038E-05  5.28537E-03 -1.22076E-03 -5.21886E-04 -5.68558E-05  3.47193E-05
  8.300  9.73281E-04 -3.33433E-04 -7.46969E-05  1.54274E-05  1.06639E-05  4.44592E-03 -1.02295E-03 -4.46660E-04 -4.92796E-05  2.99232E-05
  8.400  7.53138E-04 -2.60900E-04 -5.75130E-05  1.27629E-05  8.45832E-06  3.73534E-03 -8.53302E-04 -3.81938E-04 -4.31284E-05  2.55822E-05
  8.500  5.79478E-04 -2.02463E-04 -4.40394E-05  1.03936E-05  6.64150E-06  3.13648E-03 -7.09104E-04 -3.26483E-04 -3.80680E-05  2.17173E-05
  8.600  4.43670E-04 -1.55917E-04 -3.35679E-05  8.34168E-06  5.16493E-06  2.63360E-03 -5.87538E-04 -2.79109E-04 -3.38334E-05  1.83245E-05
  8.700  3.38326E-04 -1.19244E-04 -2.54929E-05  6.60515E-06  3.98018E-06  2.21247E-03 -4.85800E-04 -2.38715E-04 -3.02197E-05  1.53820E-05
  8.800  2.57223E-04 -9.06469E-05 -1.93074E-05  5.16578E-06  3.04100E-06  1.86047E-03 -4.01208E-04 -2.04303E-04 -2.70734E-05  1.28565E-05
  8.900  1.95203E-04 -6.85613E-05 -1.45952E-05  3.99494E-06  2.30489E-06  1.56657E-03 -3.31265E-04 -1.74986E-04 -2.42820E-05  1.07083E-05
  9.000  1.48056E-04 -5.16555E-05 -1.10204E-05  3.05871E-06  1.73394E-06  1.32121E-03 -2.73706E-04 -1.49991E-04 -2.17660E-05  8.89543E-06
  9.100  1.12391E-04 -3.88182E-05 -8.31656E-06  2.32167E-06  1.29531E-06  1.11625E-03 -2.26516E-04 -1.28647E-04 -1.94705E-05  7.37559E-06
  9.200  8.55140E-05 -2.91387E-05 -6.27508E-06  1.74956E-06  9.61175E-07  9.44804E-04 -1.87933E-04 -1.10386E-04 -1.73589E-05  6.10867E-06
  9.300  6.53115E-05 -2.18835E-05 -4.73476E-06  1.31102E-06  7.08532E-07  8.01089E-04 -1.56441E-04 -9.47255E-05 -1.54080E-05  5.05752E-06
  9.400  5.01444E-05 -1.64715E-05 -3.57231E-06  9.78504E-07  5.18701E-07  6.80308E-04 -1.30750E-04 -8.12613E-05 -1.36032E-05  4.18864E-06
  9.500  3.87550E-05 -1.24486E-05 -2.69422E-06  7.28691E-07  3.76806E-07  5.78493E-04 -1.09779E-04 -6.96566E-05 -1.19359E-05  3.47241E-06
  9.600  3.01873E-05 -9.46491E-06 -2.03002E-06  5.42367E-07  2.71191E-07  4.92385E-04 -9.26248E-05 -5.96317E-05 -1.04013E-05  2.88299E-06
  9.700  2.37205E-05 -7.25394E-06 -1.52679E-06  4.04118E-07  1.92858E-07  4.19316E-04 -7.85470E-05 -5.09549E-05 -8.99602E-06  2.39822E-06
  9.800  1.88152E-05 -5.61465E-06 -1.14489E-06  3.01851E-07  1.34949E-07  3.57111E-04 -6.69387E-05 -4.34343E-05 -7.71770E-06  1.99927E-06
  9.900  1.50699E-05 -4.39674E-06 -8.54605E-07  2.26264E-07  9.22915E-08  3.03997E-04 -5.73089E-05 -3.69110E-05 -6.56377E-06  1.67035E-06
 10.000  1.21870E-05 -3.48852E-06 -6.33670E-07  1.70320E-07  6.10148E-08  2.58530E-04 -4.92628E-05 -3.12528E-05 -5.53104E-06  1.39836E-06
 10.100  9.94683E-06 -2.80743E-06 -4.65352E-07  1.28779E-07  3.82363E-08  2.19530E-04 -4.24857E-05 -2.63494E-05 -4.61541E-06  1.17257E-06
 10.200  8.18731E-06 -2.29262E-06 -3.37058E-07  9.77780E-08  2.18131E-08  1.86034E-04 -3.67286E-05 -2.21075E-05 -3.81173E-06  9.84239E-07
 10.300  6.78919E-06 -1.89937E-06 -2.39297E-07  7.44986E-08  1.01490E-08  1.57248E-04 -3.17962E-05 -1.84477E-05 -3.11381E-06  8.26369E-07
 10.400  5.66464E-06 -1.59488E-06 -1.64901E-07  5.68945E-08  2.05028E-09  1.32513E-04 -2.75366E-05 -1.53014E-05 -2.51452E-06  6.93374E-07
 10.500  4.74904E-06 -1.35516E-06 -1.08453E-07  4.34852E-08 -3.38263E-09  1.11280E-04 -2.38321E-05 -1.26085E-05 -2.00595E-06  5.80838E-07
 10.600  3.99476E-06 -1.16273E-06 -6.58540E-08  3.31986E-08 -6.83253E-09  9.30845E-05 -2.05920E-05 -1.03159E-05 -1.57968E-06  4.85285E-07
 10.700  3.36667E-06 -1.00496E-06 -3.39894E-08  2.52572E-08 -8.82174E-09  7.75295E-05 -1.77467E-05 -8.37600E-06 -1.22697E-06  4.03977E-07
 10.800  2.83879E-06 -8.72782E-07 -1.04850E-08  1.90934E-08 -9.75203E-09  6.42739E-05 -1.52424E-05 -6.74567E-06 -9.39038E-07  3.34748E-07
 10.900  2.39181E-06 -7.59784E-07  6.48313E-09  1.42909E-08 -9.93320E-09  5.30201E-05 -1.30370E-05 -5.38577E-06 -7.07287E-07  2.75862E-07
 11.000  2.01124E-06 -6.61495E-07  1.83309E-08  1.05414E-08 -9.60359E-09  4.35073E-05 -1.10969E-05 -4.26068E-06 -5.23508E-07  2.25903E-07
 11.100  1.68614E-06 -5.74856E-07  2.61710E-08  7.61448E-09 -8.94532E-09  3.55050E-05 -9.39452E-06 -3.33794E-06 -3.80042E-07  1.83692E-07
 11.200  1.40805E-06 -4.97807E-07  3.08908E-08  5.33634E-09 -8.09574E-09  2.88090E-05 -7.90662E-06 -2.58819E-06 -2.69904E-07  1.48225E-07
 11.300  1.17028E-06 -4.28978E-07  3.32066E-08  3.57391E-09 -7.15635E-09  2.32376E-05 -6.61261E-06 -1.98498E-06 -1.86862E-07  1.18623E-07
 11.400  9.67444E-07 -3.67453E-07  3.37036E-08  2.22404E-09 -6.20005E-09  1.86298E-05 -5.49383E-06 -1.50467E-06 -1.25467E-07  9.41062E-08
 11.500  7.95031E-07 -3.12598E-07  3.28622E-08  1.20542E-09 -5.27705E-09  1.48428E-05 -4.53293E-06 -1.12641E-06 -8.10555E-08  7.39759E-08
 11.600  6.49185E-07 -2.63938E-07  3.10769E-08  4.52928E-10 -4.41980E-09  1.17507E-05 -3.71355E-06 -8.31921E-07 -4.97154E-08  5.76006E-08
 11.700  5.26526E-07 -2.21071E-07  2.86697E-08 -8.64281E-11 -3.64712E-09  9.24292E-06 -3.02018E-06 -6.05429E-07 -2.82325E-08  4.44109E-08
 11.800  4.24045E-07 -1.83622E-07  2.58996E-08 -4.56335E-10 -2.96764E-09  7.22290E-06 -2.43810E-06 -4.33469E-07 -1.40195E-08  3.38969E-08
 11.900  3.39036E-07 -1.51207E-07  2.29707E-08 -6.93144E-10 -2.38265E-09  5.60718E-06 -1.95345E-06 -3.04696E-07 -5.03758E-09  2.56054E-08
 12.000  2.69059E-07 -1.23425E-07  2.00387E-08 -8.27230E-10 -1.88839E-09  4.32397E-06 -1.55330E-06 -2.09683E-07  2.84685E-10  1.91386E-08
 12.100  2.11915E-07 -9.98566E-08  1.72180E-08 -8.83932E-10 -1.47786E-09  3.31214E-06 -1.22573E-06 -1.40701E-07  3.13076E-09  1.41517E-08
 12.200  1.65634E-07 -8.00710E-08  1.45873E-08 -8.84241E-10 -1.14226E-09  2.52005E-06 -9.59847E-07 -9.15049E-08  4.36959E-09  1.03501E-08
 12.300  1.28466E-07 -6.36353E-08  1.21959E-08 -8.45329E-10 -8.71989E-10  1.90447E-06 -7.45895E-07 -5.71203E-08  4.62164E-09  7.48587E-09
 12.400  9.88687E-08 -5.01252E-08  1.00692E-08 -7.80988E-10 -6.57437E-10  1.42955E-06 -5.75205E-07 -3.36435E-08  4.31587E-09  5.35342E-09
 12.500  7.55025E-08 -3.91357E-08  8.21427E-09 -7.02038E-10 -4.89475E-10  1.06581E-06 -4.40192E-07 -1.80584E-08  3.73762E-09  3.78478E-09
 12.600  5.72133E-08 -3.02886E-08  6.62433E-09 -6.16713E-10 -3.59773E-10  7.89253E-07 -3.34309E-07 -8.07193E-09  3.06750E-09  2.64489E-09
 12.700  4.30203E-08 -2.32384E-08  5.28319E-09 -5.31040E-10 -2.60962E-10  5.80512E-07 -2.51972E-07 -1.96989E-09  2.41215E-09  1.82670E-09
 12.800  3.20999E-08 -1.76764E-08  4.16860E-09 -4.49200E-10 -1.86700E-10  4.24101E-07 -1.88482E-07  1.50619E-09  1.82791E-09  1.24674E-09
 12.900  2.37687E-08 -1.33317E-08  3.25510E-09 -3.73876E-10 -1.31648E-10  3.07748E-07 -1.39933E-07  3.26232E-09  1.33837E-09  8.40793E-10
 13.000  1.74662E-08 -9.97056E-09  2.51619E-09 -3.06577E-10 -9.14020E-11  2.21819E-07 -1.03115E-07  3.93672E-09  9.47129E-10  5.60272E-10
 13.100  1.27381E-08 -7.39505E-09  1.92594E-09 -2.47917E-10 -6.24022E-11  1.58813E-07 -7.54219E-08  3.96806E-09  6.46567E-10  3.68915E-10
 13.200  9.22029E-09 -5.43992E-09  1.46004E-09 -1.97870E-10 -4.18183E-11  1.12945E-07 -5.47602E-08  3.64921E-09  4.23759E-10  2.40077E-10
 13.300  6.62438E-09 -3.96934E-09  1.09649E-09 -1.55975E-10 -2.74391E-11  7.97910E-08 -3.94682E-08  3.16873E-09  2.64172E-10  1.54467E-10
 13.400  4.72424E-09 -2.87316E-09  8.15919E-10 -1.21499E-10 -1.75651E-11  5.59959E-08 -2.82401E-08  2.64246E-09  1.53832E-10  9.83262E-11
 13.500  3.34449E-09 -2.06328E-09  6.01696E-10 -9.35715E-11 -1.09113E-11  3.90379E-08 -2.00607E-08  2.13677E-09  8.04421E-11  6.19893E-11
 13.600  2.35053E-09 -1.47013E-09  4.39812E-10 -7.12773E-11 -6.52132E-12  2.70369E-08 -1.41484E-08  1.68560E-09  3.38173E-11  3.87700E-11
 13.700  1.64008E-09 -1.03942E-09  3.18705E-10 -5.37224E-11 -3.69504E-12  1.86028E-08 -9.90770E-09  1.30241E-09  5.90906E-12  2.41134E-11
 13.800  1.13620E-09 -7.29294E-10  2.28985E-10 -4.00772E-11 -1.92838E-12  1.27165E-08 -6.88915E-09  9.88461E-10 -9.39334E-12  1.49650E-11
 13.900  7.81551E-10 -5.07843E-10  1.63149E-10 -2.96008E-11 -8.64589E-13  8.63640E-09 -4.75672E-09  7.38397E-10 -1.65633E-11  9.30902E-12
 14.000  5.33828E-10 -3.50999E-10  1.15286E-10 -2.16515E-11 -2.55759E-13  5.82761E-09 -3.26152E-09  5.43767E-10 -1.87614E-11  5.83630E-12
 14.100  3.62085E-10 -2.40806E-10  8.08058E-11 -1.56876E-11  6.70347E-14  3.90708E-09 -2.22088E-09  3.95233E-10 -1.81392E-11  3.71060E-12
 14.200  2.43899E-10 -1.64002E-10  5.61861E-11 -1.12616E-11  2.16429E-13  2.60274E-09 -1.50191E-09  2.83807E-10 -1.61028E-11  2.40643E-12
 14.300  1.63163E-10 -1.10887E-10  3.87603E-11 -8.01139E-12  2.65710E-13  1.72283E-09 -1.00878E-09  2.01492E-10 -1.35259E-11  1.59889E-12
 14.400  1.08411E-10 -7.44387E-11  2.65316E-11 -5.64885E-12  2.61199E-13  1.13317E-09 -6.72984E-10  1.41525E-10 -1.09171E-11  1.09025E-12
 14.500  7.15455E-11 -4.96168E-11  1.80219E-11 -3.94848E-12  2.31147E-13  7.40639E-10 -4.45951E-10  9.83961E-11 -8.54315E-12  7.61867E-13
 14.600  4.69001E-11 -3.28399E-11  1.21490E-11 -2.73645E-12  1.91988E-13  4.81047E-10 -2.93538E-10  6.77459E-11 -6.51914E-12  5.43352E-13
 14.700  3.05400E-11 -2.15847E-11  8.12872E-12 -1.88060E-12  1.52652E-13  3.10492E-10 -1.91935E-10  4.62077E-11 -4.86978E-12  3.93237E-13
 14.800  1.97555E-11 -1.40892E-11  5.39864E-12 -1.28179E-12  1.17469E-13  1.99163E-10 -1.24674E-10  3.12330E-11 -3.57091E-12  2.87060E-13
 14.900  1.26956E-11 -9.13383E-12  3.55929E-12 -8.66573E-13  8.80741E-14  1.26962E-10 -8.04543E-11  2.09268E-11 -2.57567E-12  2.10212E-13
 15.000  8.10552E-12 -5.88122E-12  2.32966E-12 -5.81184E-13  6.46234E-14  8.04375E-11 -5.15810E-11  1.39025E-11 -1.83030E-12  1.53735E-13
 15.100  5.14154E-12 -3.76146E-12  1.51393E-12 -3.86716E-13  4.65457E-14  5.06495E-11 -3.28560E-11  9.15965E-12 -1.28295E-12  1.11909E-13
 15.200  3.24047E-12 -2.38969E-12  9.76857E-13 -2.55322E-13  3.29823E-14  3.16982E-11 -2.07942E-11  5.98612E-12 -8.87927E-13  8.08920E-14
 15.300  2.02929E-12 -1.50816E-12  6.25895E-13 -1.67281E-13  2.30312E-14  1.97174E-11 -1.30764E-11  3.88123E-12 -6.07262E-13  5.79697E-14
 15.400  1.26275E-12 -9.45567E-13  3.98241E-13 -1.08770E-13  1.58687E-14  1.21908E-11 -8.17091E-12  2.49701E-12 -4.10671E-13  4.11449E-14
 15.500  7.80810E-13 -5.88980E-13  2.51646E-13 -7.01961E-14  1.07993E-14  7.49186E-12 -5.07344E-12  1.59426E-12 -2.74772E-13  2.89068E-14
 15.600  4.79783E-13 -3.64494E-13  1.57929E-13 -4.49676E-14  7.26481E-15  4.57653E-12 -3.13040E-12  1.01029E-12 -1.81978E-13  2.00967E-14
 15.700  2.92976E-13 -2.24121E-13  9.84427E-14 -2.85959E-14  4.83417E-15  2.77896E-12 -1.91945E-12  6.35518E-13 -1.19346E-13  1.38245E-14
 15.800  1.77796E-13 -1.36929E-13  6.09513E-14 -1.80535E-14  3.18364E-15  1.67741E-12 -1.16963E-12  3.96878E-13 -7.75351E-14  9.40997E-15
 15.900  1.07234E-13 -8.31278E-14  3.74871E-14 -1.13162E-14  2.07603E-15  1.00650E-12 -7.08321E-13  2.46080E-13 -4.99138E-14  6.33861E-15
 16.000  6.42793E-14 -5.01480E-14  2.29035E-14 -7.04300E-15  1.34097E-15  6.00374E-13 -4.26318E-13  1.51505E-13 -3.18489E-14  4.22609E-15
 16.100  3.82965E-14 -3.00632E-14  1.39017E-14 -4.35271E-15  8.58276E-16  3.56015E-13 -2.55020E-13  9.26285E-14 -2.01477E-14  2.78937E-15
 16.200  2.26781E-14 -1.79104E-14  8.38292E-15 -2.67139E-15  5.44486E-16  2.09877E-13 -1.51622E-13  5.62429E-14 -1.26389E-14  1.82302E-15
 16.300  1.33484E-14 -1.06043E-14  5.02237E-15 -1.62822E-15  3.42460E-16  1.23004E-13 -8.96009E-14  3.39178E-14 -7.86373E-15  1.18001E-15
 16.400  7.80974E-15 -6.23991E-15  2.98969E-15 -9.85643E-16  2.13596E-16  7.16709E-14 -5.26304E-14  2.03168E-14 -4.85357E-15  7.56622E-16
 16.500  4.54196E-15 -3.64931E-15  1.76834E-15 -5.92621E-16  1.32138E-16  4.15187E-14 -3.07289E-14  1.20888E-14 -2.97219E-15  4.80691E-16
 16.600  2.62580E-15 -2.12126E-15  1.03931E-15 -3.53926E-16  8.10936E-17  2.39128E-14 -1.78343E-14  7.14549E-15 -1.80608E-15  3.02644E-16
 16.700  1.50905E-15 -1.22558E-15  6.06989E-16 -2.09965E-16  4.93792E-17  1.36935E-14 -1.02890E-14  4.19598E-15 -1.08919E-15  1.88868E-16
 16.800  8.62145E-16 -7.03825E-16  3.52283E-16 -1.23738E-16  2.98375E-17  7.79649E-15 -5.90080E-15  2.44799E-15 -6.51970E-16  1.16849E-16
 16.900  4.89669E-16 -4.01772E-16  2.03186E-16 -7.24440E-17  1.78937E-17  4.41364E-15 -3.36419E-15  1.41900E-15 -3.87399E-16  7.16815E-17
 17.000  2.76491E-16 -2.27980E-16  1.16467E-16 -4.21372E-17  1.06515E-17  2.48436E-15 -1.90674E-15  8.17293E-16 -2.28530E-16  4.36087E-17
 17.100  1.55213E-16 -1.28597E-16  6.63485E-17 -2.43508E-17  6.29423E-18  1.39046E-15 -1.07437E-15  4.67750E-16 -1.33852E-16  2.63141E-17
 17.200  8.66263E-17 -7.21094E-17  3.75661E-17 -1.39818E-17  3.69266E-18  7.73820E-16 -6.01836E-16  2.66018E-16 -7.78466E-17  1.57513E-17
 17.300  4.80684E-17 -4.01968E-17  2.11403E-17 -7.97691E-18  2.15102E-18  4.28217E-16 -3.35178E-16  1.50344E-16 -4.49602E-17  9.35433E-18
 17.400  2.65196E-17 -2.22762E-17  1.18247E-17 -4.52215E-18  1.24421E-18  2.35634E-16 -1.85590E-16  8.44427E-17 -2.57883E-17  5.51231E-18
 17.500  1.45472E-17 -1.22730E-17  6.57426E-18 -2.54749E-18  7.14702E-19  1.28935E-16 -1.02170E-16  4.71360E-17 -1.46912E-17  3.22353E-18
 17.600  7.93432E-18 -6.72256E-18  3.63323E-18 -1.42610E-18  4.07728E-19  7.01564E-17 -5.59232E-17  2.61502E-17 -8.31308E-18  1.87091E-18
 17.700  4.30292E-18 -3.66099E-18  1.99591E-18 -7.93377E-19  2.31027E-19  3.79609E-17 -3.04348E-17  1.44194E-17 -4.67268E-18  1.07781E-18
 17.800  2.32033E-18 -1.98224E-18  1.08995E-18 -4.38644E-19  1.30026E-19  2.04260E-17 -1.64689E-17  7.90279E-18 -2.60913E-18  6.16378E-19
 17.900  1.24416E-18 -1.06712E-18  5.91691E-19 -2.41026E-19  7.26947E-20  1.09299E-17 -8.86108E-18  4.30519E-18 -1.44736E-18  3.49948E-19
 18.000  6.63369E-19 -5.71191E-19  3.19318E-19 -1.31628E-19  4.03741E-20  5.81623E-18 -4.74070E-18  2.33129E-18 -7.97691E-19  1.97266E-19
 18.100  3.51715E-19 -3.03998E-19  1.71317E-19 -7.14467E-20  2.22770E-20  3.07797E-18 -2.52197E-18  1.25489E-18 -4.36810E-19  1.10415E-19
 18.200  1.85435E-19 -1.60875E-19  9.13769E-20 -3.85457E-20  1.22121E-20  1.61991E-18 -1.33410E-18  6.71483E-19 -2.37668E-19  6.13712E-20
 18.300  9.72222E-20 -8.46533E-20  4.84555E-20 -2.06702E-20  6.65153E-21  8.47872E-19 -7.01769E-19  3.57187E-19 -1.28497E-19  3.38763E-20
 18.400  5.06897E-20 -4.42941E-20  2.55465E-20 -1.10180E-20  3.59976E-21  4.41351E-19 -3.67084E-19  1.88886E-19 -6.90361E-20  1.85717E-20
 18.500  2.62823E-20 -2.30463E-20  1.33909E-20 -5.83792E-21  1.93583E-21  2.28487E-19 -1.90946E-19  9.93019E-20 -3.68588E-20  1.01126E-20
 18.600  1.35519E-20 -1.19240E-20  6.97889E-21 -3.07487E-21  1.03447E-21  1.17643E-19 -9.87718E-20  5.19019E-20 -1.95572E-20  5.46957E-21
 18.700  6.94927E-21 -6.13492E-21  3.61638E-21 -1.60997E-21  5.49353E-22  6.02428E-20 -5.08094E-20  2.69703E-20 -1.03131E-20  2.93868E-21
 18.800  3.54394E-21 -3.13889E-21  1.86329E-21 -8.38000E-22  2.89920E-22  3.06820E-20 -2.59925E-20  1.39341E-20 -5.40513E-21  1.56850E-21
 18.900  1.79742E-21 -1.59708E-21  9.54580E-22 -4.33627E-22  1.52061E-22  1.55420E-20 -1.32237E-20  7.15760E-21 -2.81561E-21  8.31718E-22
 19.000  9.06637E-22 -8.08113E-22  4.86275E-22 -2.23072E-22  7.92657E-23  7.83031E-21 -6.69058E-21  3.65566E-21 -1.45782E-21  4.38174E-22
 19.100  4.54826E-22 -4.06646E-22  2.46318E-22 -1.14088E-22  4.10674E-23  3.92380E-21 -3.36658E-21  1.85645E-21 -7.50269E-22  2.29361E-22
 19.200  2.26929E-22 -2.03501E-22  1.24069E-22 -5.80115E-23  2.11479E-23  1.95567E-21 -1.68474E-21  9.37402E-22 -3.83816E-22  1.19293E-22
 19.300  1.12610E-22 -1.01282E-22  6.21426E-23 -2.93274E-23  1.08246E-23  9.69500E-22 -8.38500E-22  4.70659E-22 -1.95181E-22  6.16529E-23
 19.400  5.55784E-23 -5.01318E-23  3.09517E-23 -1.47411E-23  5.50734E-24  4.78048E-22 -4.15054E-22  2.34981E-22 -9.86676E-23  3.16631E-23
 19.500  2.72828E-23 -2.46787E-23  1.53305E-23 -7.36705E-24  2.78530E-24  2.34460E-22 -2.04336E-22  1.16657E-22 -4.95844E-23  1.61598E-23
 19.600  1.33207E-23 -1.20827E-23  7.55113E-24 -3.66076E-24  1.40028E-24  1.14379E-22 -1.00052E-22  5.75910E-23 -2.47720E-23  8.19624E-24
 19.700  6.46887E-24 -5.88362E-24  3.69878E-24 -1.80873E-24  6.99813E-25  5.55020E-23 -4.87256E-23  2.82727E-23 -1.23037E-23  4.13151E-24
 19.800  3.12462E-24 -2.84950E-24  1.80178E-24 -8.88601E-25  3.47685E-25  2.67891E-23 -2.36017E-23  1.38025E-23 -6.07548E-24  2.06983E-24
 19.900  1.50120E-24 -1.37260E-24  8.72873E-25 -4.34092E-25  1.71727E-25  1.28618E-23 -1.13707E-23  6.70091E-24 -2.98267E-24  1.03064E-24
  67 191 200   0.100
  0.000  5.15131E-02 -2.79285E-16 -3.33067E-16 -7.63065E-16  4.64909E-16  9.31077E-02 -4.80991E-16 -7.49401E-16 -1.05078E-15 -6.29415E-16
  0.100  5.15153E-02  2.79218E-05 -1.76417E-08  4.83826E-12 -1.70944E-15  9.32134E-02 -6.48623E-05  5.40322E-08 -1.45378E-11 -8.41128E-15
  0.200  5.15234E-02  1.10163E-04 -2.80055E-07  3.07833E-10 -1.35403E-13  9.35246E-02 -2.55717E-04  8.56642E-07 -9.24201E-10  4.77755E-13
  0.300  5.15411E-02  2.42227E-04 -1.39924E-06  3.47208E-09 -3.42742E-12  9.40233E-02 -5.61580E-04  4.27093E-06 -1.04222E-08  1.20620E-11
  0.400  5.15746E-02  4.16874E-04 -4.34105E-06  1.92396E-08 -3.41028E-11  9.46814E-02 -9.64848E-04  1.32111E-05 -5.77379E-08  1.19094E-10
  0.500  5.16318E-02  6.24484E-04 -1.03467E-05  7.20839E-08 -2.02096E-10  9.54614E-02 -1.44230E-03  3.13688E-05 -2.16265E-07  6.99513E-10
  0.600  5.17214E-02  8.53548E-04 -2.08283E-05  2.10506E-07 -8.62066E-10  9.63192E-02 -1.96642E-03  6.28564E-05 -6.31383E-07  2.95440E-09
  0.700  5.18524E-02  1.09124E-03 -3.72439E-05  5.16870E-07 -2.92761E-09  9.72070E-02 -2.50697E-03  1.11789E-04 -1.54987E-06  9.92649E-09
  0.800  5.20332E-02  1.32410E-03 -6.09586E-05  1.11635E-06 -8.40420E-09  9.80754E-02 -3.03270E-03  1.81840E-04 -3.34671E-06  2.81845E-08
  0.900  5.22707E-02  1.53867E-03 -9.31016E-05  2.18344E-06 -2.11937E-08  9.88772E-02 -3.51308E-03  2.75793E-04 -6.54460E-06  7.03087E-08
  1.000  5.25696E-02  1.72222E-03 -1.34427E-04  3.94449E-06 -4.81943E-08  9.95697E-02 -3.92006E-03  3.95137E-04 -1.18219E-05  1.58238E-07
  1.100  5.29318E-02  1.86340E-03 -1.85189E-04  6.67502E-06 -1.00672E-07  1.00118E-01 -4.22955E-03  5.39731E-04 -2.00045E-05  3.27433E-07
  1.200  5.33556E-02  1.95280E-03 -2.45045E-04  1.06907E-05 -1.95818E-07  1.00495E-01 -4.42281E-03  7.07568E-04 -3.20393E-05  6.31654E-07
  1.300  5.38360E-02  1.98346E-03 -3.12989E-04  1.63316E-05 -3.58332E-07  1.00686E-01 -4.48741E-03  8.94666E-04 -4.89467E-05  1.14802E-06
  1.400  5.43643E-02  1.95125E-03 -3.87333E-04  2.39404E-05 -6.21803E-07  1.00688E-01 -4.41788E-03  1.09511E-03 -7.17534E-05  1.98184E-06
  1.500  5.49287E-02  1.85504E-03 -4.65733E-04  3.38346E-05 -1.02962E-06  1.00509E-01 -4.21599E-03  1.30124E-03 -1.01407E-04  3.27050E-06
  1.600  5.55144E-02  1.69680E-03 -5.45266E-04  4.62756E-05 -1.63508E-06  1.00167E-01 -3.89051E-03  1.50399E-03 -1.38675E-04  5.18571E-06
  1.700  5.61047E-02  1.48152E-03 -6.22563E-04  6.14359E-05 -2.50049E-06  9.96914E-02 -3.45675E-03  1.69336E-03 -1.84046E-04  7.93326E-06
  1.800  5.66815E-02  1.21692E-03 -6.93975E-04  7.93686E-05 -3.69500E-06  9.91173E-02 -2.93555E-03  1.85900E-03 -2.37620E-04  1.17493E-05
  1.900  5.72265E-02  9.13063E-04 -7.55778E-04  9.99806E-05 -5.29102E-06  9.84853E-02 -2.35212E-03  1.99084E-03 -2.99020E-04  1.68930E-05
  2.000  5.77224E-02  5.81868E-04 -8.04401E-04  1.23014E-04 -7.35951E-06  9.78375E-02 -1.73453E-03  2.07979E-03 -3.67326E-04  2.36342E-05
  2.100  5.81535E-02  2.36471E-04 -8.36653E-04  1.48035E-04 -9.96404E-06  9.72153E-02 -1.11216E-03  2.11836E-03 -4.41035E-04  3.22371E-05
  2.200  5.85066E-02 -1.09432E-04 -8.49943E-04  1.74442E-04 -1.31543E-05  9.66562E-02 -5.13962E-04  2.10125E-03 -5.18068E-04  4.29398E-05
  2.300  5.87723E-02 -4.42273E-04 -8.42466E-04  2.01474E-04 -1.69595E-05  9.61913E-02  3.31287E-05  2.02581E-03 -5.95811E-04  5.59300E-05
  2.400  5.89449E-02 -7.49290E-04 -8.13349E-04  2.28240E-04 -2.13818E-05  9.58436E-02  5.05688E-04  1.89230E-03 -6.71218E-04  7.13199E-05
  2.500  5.90231E-02 -1.01914E-03 -7.62740E-04  2.53762E-04 -2.63915E-05  9.56266E-02  8.85078E-04  1.70404E-03 -7.40939E-04  8.91203E-05
  2.600  5.90100E-02 -1.24242E-03 -6.91831E-04  2.77014E-04 -3.19232E-05  9.55435E-02  1.15841E-03  1.46732E-03 -8.01501E-04  1.09217E-04
  2.700  5.89127E-02 -1.41210E-03 -6.02824E-04  2.96980E-04 -3.78743E-05  9.55878E-02  1.31914E-03  1.19107E-03 -8.49510E-04  1.31353E-04
  2.800  5.87422E-02 -1.52380E-03 -4.98827E-04  3.12705E-04 -4.41059E-05  9.57437E-02  1.36731E-03  8.86450E-04 -8.81860E-04  1.55114E-04
  2.900  5.85124E-02 -1.57591E-03 -3.83702E-04  3.23344E-04 -5.04465E-05  9.59877E-02  1.30930E-03  5.66189E-04 -8.95953E-04  1.79929E-04
  3.000  5.82399E-02 -1.56963E-03 -2.61868E-04  3.28214E-04 -5.66973E-05  9.62908E-02  1.15729E-03  2.43891E-04 -8.89889E-04  2.05077E-04
  3.100  5.79422E-02 -1.50877E-03 -1.38082E-04  3.26822E-04 -6.26404E-05  9.66207E-02  9.28274E-04 -6.67728E-05 -8.62633E-04  2.29702E-04
  3.200  5.76377E-02 -1.39952E-03 -1.72050E-05  3.18893E-04 -6.80486E-05  9.69440E-02  6.42840E-04 -3.52851E-04 -8.14128E-04  2.52849E-04
  3.300  5.73440E-02 -1.25012E-03  9.60174E-05  3.04382E-04 -7.26957E-05  9.72289E-02  3.23720E-04 -6.02869E-04 -7.45353E-04  2.73500E-04
  3.400  5.70772E-02 -1.07036E-03  1.97162E-04  2.83470E-04 -7.63676E-05  9.74476E-02 -5.76471E-06 -8.07485E-04 -6.58327E-04  2.90626E-04
  3.500  5.68514E-02 -8.71169E-04  2.82297E-04  2.56547E-04 -7.88725E-05  9.75774E-02 -3.23274E-04 -9.60022E-04 -5.56037E-04  3.03238E-04
  3.600  5.66772E-02 -6.64098E-04  3.48112E-04  2.24191E-04 -8.00506E-05  9.76024E-02 -6.08917E-04 -1.05683E-03 -4.42314E-04  3.10449E-04
  3.700  5.65618E-02 -4.60821E-04  3.92003E-04  1.87128E-04 -7.97811E-05  9.75143E-02 -8.46527E-04 -1.09746E-03 -3.21654E-04  3.11525E-04
  3.800  5.65083E-02 -2.72687E-04  4.12120E-04  1.46200E-04 -7.79873E-05  9.73122E-02 -1.02467E-03 -1.08467E-03 -1.98996E-04  3.05941E-04
  3.900  5.65152E-02 -1.10301E-04  4.07370E-04  1.02318E-04 -7.46390E-05  9.70018E-02 -1.13729E-03 -1.02421E-03 -7.94700E-05  2.93421E-04
  4.000  5.65764E-02  1.68443E-05  3.77391E-04  5.64282E-05 -6.97520E-05  9.65947E-02 -1.18401E-03 -9.24478E-04  3.18649E-05  2.73968E-04
  4.100  5.66815E-02  1.00673E-04  3.22512E-04  9.47611E-06 -6.33847E-05  9.61064E-02 -1.17002E-03 -7.95974E-04  1.30286E-04  2.47885E-04
  4.200  5.68155E-02  1.34771E-04  2.43684E-04 -3.76216E-05 -5.56330E-05  9.55543E-02 -1.10556E-03 -6.50699E-04  2.11647E-04  2.15774E-04
  4.300  5.69596E-02  1.14570E-04  1.42427E-04 -8.39968E-05 -4.66227E-05  9.49557E-02 -1.00514E-03 -5.01438E-04  2.72598E-04  1.78519E-04
  4.400  5.70913E-02  3.74706E-05  2.07582E-05 -1.28843E-04 -3.65021E-05  9.43255E-02 -8.86362E-04 -3.61022E-04  3.10744E-04  1.37257E-04
  4.500  5.71856E-02 -9.70952E-05 -1.18856E-04 -1.71420E-04 -2.54333E-05  9.36743E-02 -7.68678E-04 -2.41592E-04  3.24770E-04  9.33308E-05
  4.600  5.72151E-02 -2.87652E-04 -2.73557E-04 -2.11058E-04 -1.35855E-05  9.30066E-02 -6.71939E-04 -1.53920E-04  3.14492E-04  4.82264E-05
  4.700  5.71515E-02 -5.30729E-04 -4.40135E-04 -2.47156E-04 -1.12858E-06  9.23195E-02 -6.14989E-04 -1.06813E-04  2.80850E-04  3.50728E-06
  4.800  5.69662E-02 -8.20965E-04 -6.15077E-04 -2.79176E-04  1.17703E-05  9.16026E-02 -6.14337E-04 -1.06637E-04  2.25845E-04 -3.92622E-05
  4.900  5.66319E-02 -1.15127E-03 -7.94618E-04 -3.06649E-04  2.49490E-05  9.08374E-02 -6.83005E-04 -1.56995E-04  1.52410E-04 -7.85933E-05
  5.000  5.61230E-02 -1.51304E-03 -9.74803E-04 -3.29174E-04  3.82498E-05  8.99983E-02 -8.29639E-04 -2.58565E-04  6.42413E-05 -1.13146E-04
  5.100  5.54175E-02 -1.89645E-03 -1.15156E-03 -3.46426E-04  5.15178E-05  8.90540E-02 -1.05793E-03 -4.09116E-04 -3.44147E-05 -1.41794E-04
  5.200  5.44972E-02 -2.29075E-03 -1.32081E-03 -3.58168E-04  6.45980E-05  8.79693E-02 -1.36635E-03 -6.03692E-04 -1.38995E-04 -1.63681E-04
  5.300  5.33494E-02 -2.68466E-03 -1.47854E-03 -3.64264E-04  7.73321E-05  8.67073E-02 -1.74833E-03 -8.34952E-04 -2.44865E-04 -1.78258E-04
  5.400  5.19672E-02 -3.06678E-03 -1.62099E-03 -3.64693E-04  8.95562E-05  8.52319E-02 -2.19263E-03 -1.09364E-03 -3.47560E-04 -1.85305E-04
  5.500  5.03503E-02 -3.42602E-03 -1.74473E-03 -3.59564E-04  1.01100E-04  8.35106E-02 -2.68410E-03 -1.36917E-03 -4.43004E-04 -1.84935E-04
  5.600  4.85050E-02 -3.75201E-03 -1.84681E-03 -3.49123E-04  1.11787E-04  8.15165E-02 -3.20470E-03 -1.65022E-03 -5.27700E-04 -1.77576E-04
  5.700  4.64443E-02 -4.03548E-03 -1.92492E-03 -3.33761E-04  1.21440E-04  7.92308E-02 -3.73453E-03 -1.92543E-03 -5.98870E-04 -1.63939E-04
  5.800  4.41876E-02 -4.26870E-03 -1.97743E-03 -3.14004E-04  1.29883E-04  7.66444E-02 -4.25310E-03 -2.18399E-03 -6.54555E-04 -1.44968E-04
  5.900  4.17604E-02 -4.44569E-03 -2.00354E-03 -2.90504E-04  1.36951E-04  7.37586E-02 -4.74051E-03 -2.41621E-03 -6.93653E-04 -1.21781E-04
  6.000  3.91927E-02 -4.56249E-03 -2.00324E-03 -2.64018E-04  1.42500E-04  7.05861E-02 -5.17849E-03 -2.61396E-03 -7.15907E-04 -9.56044E-05
  6.100  3.65186E-02 -4.61725E-03 -1.97737E-03 -2.35377E-04  1.46412E-04  6.71503E-02 -5.55139E-03 -2.77104E-03 -7.21842E-04 -6.76990E-05
  6.200  3.37750E-02 -4.61024E-03 -1.92754E-03 -2.05450E-04  1.48608E-04  6.34845E-02 -5.84687E-03 -2.88335E-03 -7.12668E-04 -3.92974E-05
  6.300  3.09996E-02 -4.54379E-03 -1.85606E-03 -1.75110E-04  1.49051E-04  5.96307E-02 -6.05640E-03 -2.94897E-03 -6.90141E-04 -1.15411E-05
  6.400  2.82303E-02 -4.42208E-03 -1.76582E-03 -1.45192E-04  1.47756E-04  5.56372E-02 -6.17542E-03 -2.96807E-03 -6.56417E-04  1.45693E-05
  6.500  2.55035E-02 -4.25089E-03 -1.66011E-03 -1.16459E-04  1.44787E-04  5.15569E-02 -6.20337E-03 -2.94272E-03 -6.13885E-04  3.82117E-05
  6.600  2.28529E-02 -4.03726E-03 -1.54250E-03 -8.95693E-05  1.40255E-04  4.74447E-02 -6.14339E-03 -2.87662E-03 -5.65016E-04  5.87662E-05
  6.700  2.03087E-02 -3.78910E-03 -1.41667E-03 -6.50551E-05  1.34322E-04  4.33551E-02 -6.00184E-03 -2.77473E-03 -5.12224E-04  7.58240E-05
  6.800  1.78966E-02 -3.51482E-03 -1.28622E-03 -4.33058E-05  1.27182E-04  3.93404E-02 -5.78774E-03 -2.64291E-03 -4.57743E-04  8.91831E-05
  6.900  1.56372E-02 -3.22293E-03 -1.15454E-03 -2.45640E-05  1.19063E-04  3.54481E-02 -5.51204E-03 -2.48749E-03 -4.03536E-04  9.88318E-05
  7.000  1.35461E-02 -2.92168E-03 -1.02469E-03 -8.92853E-06  1.10208E-04  3.17203E-02 -5.18692E-03 -2.31495E-03 -3.51239E-04  1.04924E-04
  7.100  1.16332E-02 -2.61877E-03 -8.99329E-04  3.63409E-06  1.00867E-04  2.81917E-02 -4.82508E-03 -2.13157E-03 -3.02123E-04  1.07745E-04
  7.200  9.90371E-03 -2.32105E-03 -7.80601E-04  1.32713E-05  9.12849E-05  2.48895E-02 -4.43910E-03 -1.94316E-03 -2.57098E-04  1.07681E-04
  7.300  8.35781E-03 -2.03439E-03 -6.70163E-04  2.02220E-05  8.16936E-05  2.18329E-02 -4.04085E-03 -1.75487E-03 -2.16722E-04  1.05178E-04
  7.400  6.99165E-03 -1.76354E-03 -5.69159E-04  2.47919E-05  7.23001E-05  1.90336E-02 -3.64107E-03 -1.57104E-03 -1.81249E-04  1.00714E-04
  7.500  5.79785E-03 -1.51207E-03 -4.78257E-04  2.73277E-05  6.32824E-05  1.64960E-02 -3.24908E-03 -1.39517E-03 -1.50669E-04  9.47637E-05
  7.600  4.76621E-03 -1.28243E-03 -3.97691E-04  2.81935E-05  5.47844E-05  1.42179E-02 -2.87254E-03 -1.22987E-03 -1.24768E-04  8.77792E-05
  7.700  3.88448E-03 -1.07602E-03 -3.27332E-04  2.77497E-05  4.69142E-05  1.21917E-02 -2.51743E-03 -1.07696E-03 -1.03186E-04  8.01690E-05
  7.800  3.13904E-03 -8.93270E-04 -2.66751E-04  2.63358E-05  3.97449E-05  1.04056E-02 -2.18802E-03 -9.37476E-04 -8.54635E-05  7.22868E-05
  7.900  2.51557E-03 -7.33807E-04 -2.15299E-04  2.42576E-05  3.33161E-05  8.84418E-03 -1.88705E-03 -8.11841E-04 -7.10961E-05  6.44250E-05
  8.000  1.99961E-03 -5.96616E-04 -1.72171E-04  2.17785E-05  2.76377E-05  7.48978E-03 -1.61585E-03 -6.99945E-04 -5.95687E-05  5.68132E-05
  8.100  1.57706E-03 -4.80192E-04 -1.36478E-04  1.91158E-05  2.26946E-05  6.32342E-03 -1.37459E-03 -6.01273E-04 -5.03866E-05  4.96210E-05
  8.200  1.23452E-03 -3.82700E-04 -1.07293E-04  1.64398E-05  1.84516E-05  5.32563E-03 -1.16247E-03 -5.15017E-04 -4.30970E-05  4.29635E-05
  8.300  9.59600E-04 -3.02111E-04 -8.37058E-05  1.38763E-05  1.48585E-05  4.47710E-03 -9.77980E-04 -4.40179E-04 -3.73007E-05  3.69085E-05
  8.400  7.41067E-04 -2.36328E-04 -6.48506E-05  1.15108E-05  1.18555E-05  3.75927E-03 -8.19114E-04 -3.75660E-04 -3.26586E-05  3.14849E-05
  8.500  5.68965E-04 -1.83280E-04 -4.99324E-05  9.39477E-06  9.37697E-06  3.15471E-03 -6.83542E-04 -3.20321E-04 -2.88918E-05  2.66913E-05
  8.600  4.34623E-04 -1.41002E-04 -3.82408E-05  7.55194E-06  7.35604E-06  2.64742E-03 -5.68788E-04 -2.73049E-04 -2.57778E-05  2.25036E-05
  8.700  3.30626E-04 -1.07684E-04 -2.91567E-05  5.98460E-06  5.72715E-06  2.22295E-03 -4.72361E-04 -2.32784E-04 -2.31450E-05  1.88825E-05
  8.800  2.50738E-04 -8.17068E-05 -2.21525E-05  4.67981E-06  4.42855E-06  1.86849E-03 -3.91847E-04 -1.98552E-04 -2.08644E-05  1.57794E-05
  8.900  1.89795E-04 -6.16557E-05 -1.67874E-05  3.61470E-06  3.40384E-06  1.57280E-03 -3.24987E-04 -1.69475E-04 -1.88426E-05  1.31407E-05
  9.000  1.43588E-04 -4.63221E-05 -1.27001E-05  2.76081E-06  2.60286E-06  1.32621E-03 -2.69715E-04 -1.44775E-04 -1.70144E-05  1.09122E-05
  9.100  1.08731E-04 -3.46945E-05 -9.59944E-06  2.08763E-06  1.98211E-06  1.12043E-03 -2.24184E-04 -1.23776E-04 -1.53356E-05  9.04103E-06
  9.200  8.25418E-05 -2.59428E-05 -7.25426E-06  1.56501E-06  1.50463E-06  9.48486E-04 -1.86772E-04 -1.05897E-04 -1.37782E-05  7.47771E-06
  9.300  6.29175E-05 -1.93975E-05 -5.48372E-06  1.16497E-06  1.13967E-06  8.04501E-04 -1.56077E-04 -9.06432E-05 -1.23249E-05  6.17708E-06
  9.400  4.82321E-05 -1.45278E-05 -4.14796E-06  8.62591E-07  8.62122E-07  6.83609E-04 -1.30901E-04 -7.75994E-05 -1.09665E-05  5.09874E-06
  9.500  3.72405E-05 -1.09190E-05 -3.13998E-06  6.36547E-07  6.51826E-07  5.81786E-04 -1.10238E-04 -6.64169E-05 -9.69826E-06  4.20718E-06
  9.600  2.89989E-05 -8.25176E-06 -2.37857E-06  4.69119E-07  4.92847E-07  4.95728E-04 -9.32431E-05 -5.68061E-05 -8.51856E-06  3.47158E-06
  9.700  2.27979E-05 -6.28298E-06 -1.80250E-06  3.45995E-07  3.72769E-07  4.22734E-04 -7.92219E-05 -4.85270E-05 -7.42712E-06  2.86551E-06
  9.800  1.81079E-05 -4.82982E-06 -1.36581E-06  2.55893E-07  2.82044E-07  3.60602E-04 -6.76029E-05 -4.13812E-05 -6.42416E-06  2.36652E-06
  9.900  1.45361E-05 -3.75581E-06 -1.03409E-06  1.90116E-07  2.13406E-07  3.07541E-04 -5.79214E-05 -3.52049E-05 -5.50966E-06  1.95571E-06
 10.000  1.17924E-05 -2.95981E-06 -7.81558E-07  1.42086E-07  1.61378E-07  2.62095E-04 -4.98021E-05 -2.98625E-05 -4.68301E-06  1.61729E-06
 10.100  9.66332E-06 -2.36723E-06 -5.88925E-07  1.06918E-07  1.21855E-07  2.23079E-04 -4.29439E-05 -2.52414E-05 -3.94271E-06  1.33816E-06
 10.200  7.99184E-06 -1.92320E-06 -4.41716E-07  8.10356E-08  9.17734E-08  1.89525E-04 -3.71072E-05 -2.12476E-05 -3.28631E-06  1.10752E-06
 10.300  6.66290E-06 -1.58745E-06 -3.29051E-07  6.18517E-08  6.88491E-08  1.60640E-04 -3.21022E-05 -1.78019E-05 -2.71038E-06  9.16557E-07
 10.400  5.59211E-06 -1.33045E-06 -2.42737E-07  4.75118E-08  5.13758E-08  1.35770E-04 -2.77799E-05 -1.48367E-05 -2.21059E-06  7.58074E-07
 10.500  4.71764E-06 -1.13058E-06 -1.76590E-07  3.66931E-08  3.80730E-08  1.14369E-04 -2.40238E-05 -1.22939E-05 -1.78184E-06  6.26251E-07
 10.600  3.99416E-06 -9.72073E-07 -1.25937E-07  2.84539E-08  2.79729E-08  9.59785E-05 -2.07432E-05 -1.01228E-05 -1.41843E-06  5.16391E-07
 10.700  3.38845E-06 -8.43491E-07 -8.72384E-08  2.21219E-08  2.03385E-08  8.02098E-05 -1.78672E-05 -8.27850E-06 -1.11424E-06  4.24706E-07
 10.800  2.87611E-06 -7.36619E-07 -5.78038E-08  1.72149E-08  1.46036E-08  6.67277E-05 -1.53405E-05 -6.72105E-06 -8.62917E-07  3.48138E-07
 10.900  2.43916E-06 -6.45638E-07 -3.55824E-08  1.33842E-08  1.03303E-08  5.52416E-05 -1.31194E-05 -5.41447E-06 -6.58092E-07  2.84212E-07
 11.000  2.06427E-06 -5.66506E-07 -1.89998E-08  1.03754E-08  7.17778E-09  4.54964E-05 -1.11686E-05 -4.32624E-06 -4.93537E-07  2.30912E-07
 11.100  1.74146E-06 -4.96482E-07 -6.83776E-09  8.00073E-09  4.87990E-09  3.72671E-05 -9.45926E-06 -3.42692E-06 -3.63312E-07  1.86577E-07
 11.200  1.46309E-06 -4.33760E-07  1.85628E-09  6.12069E-09  3.22884E-09  3.03535E-05 -7.96664E-06 -2.68993E-06 -2.61895E-07  1.49828E-07
 11.300  1.22317E-06 -3.77187E-07  7.83587E-09  4.63019E-09  2.06255E-09  2.45777E-05 -6.66925E-06 -2.09129E-06 -1.84255E-07  1.19507E-07
 11.400  1.01690E-06 -3.26047E-07  1.17040E-08  3.44946E-09  1.25538E-09  1.97808E-05 -5.54771E-06 -1.60955E-06 -1.25914E-07  9.46272E-08
 11.500  8.40241E-07 -2.79894E-07  1.39481E-08  2.51714E-09  7.10529E-10  1.58217E-05 -4.58418E-06 -1.22568E-06 -8.29664E-08  7.43440E-08
 11.600  6.89714E-07 -2.38439E-07  1.49643E-08  1.78545E-09  3.54186E-10  1.25752E-05 -3.76201E-06 -9.22918E-07 -5.20732E-08  5.79275E-08
 11.700  5.62237E-07 -2.01464E-07  1.50759E-08  1.21659E-09  1.30705E-10  9.93080E-06 -3.06556E-06 -6.86683E-07 -3.04390E-08  4.47461E-08
 11.800  4.55025E-07 -1.68766E-07  1.45453E-08  7.80133E-10 -1.28587E-12  7.79147E-06 -2.48008E-06 -5.04417E-07 -1.57699E-08  3.42527E-08
 11.900  3.65531E-07 -1.40128E-07  1.35838E-08  4.51230E-10 -7.20546E-11  6.07283E-06 -1.99177E-06 -3.65441E-07 -6.22191E-09  2.59749E-08
 12.000  2.91419E-07 -1.15304E-07  1.23588E-08  2.09252E-10 -1.03338E-10  4.70191E-06 -1.58779E-06 -2.60783E-07 -3.43883E-10  1.95071E-08
 12.100  2.30550E-07 -9.40173E-08  1.10004E-08  3.69077E-11 -1.10405E-10  3.61617E-06 -1.25634E-06 -1.83000E-07  2.98137E-09  1.45038E-08
 12.200  1.80982E-07 -7.59622E-08  9.60645E-09 -8.03783E-11 -1.03705E-10  2.76250E-06 -9.86636E-07 -1.25998E-07  4.59395E-09  1.06730E-08
 12.300  1.40965E-07 -6.08160E-08  8.24766E-09 -1.54891E-10 -9.01566E-11  2.09615E-06 -7.69020E-07 -8.48556E-08  5.10967E-09  7.77110E-09
 12.400  1.08938E-07 -4.82489E-08  6.97232E-09 -1.96927E-10 -7.41476E-11  1.57981E-06 -5.94902E-07 -5.56494E-08  4.96716E-09  5.59677E-09
 12.500  8.35295E-08 -3.79344E-08  5.81051E-09 -2.15023E-10 -5.82959E-11  1.18262E-06 -4.56753E-07 -3.52973E-08  4.46864E-09  3.98577E-09
 12.600  6.35481E-08 -2.95590E-08  4.77797E-09 -2.16147E-10 -4.40179E-11  8.79315E-07 -3.48059E-07 -2.14119E-08  3.81397E-09  2.80581E-09
 12.700  4.79709E-08 -2.28297E-08  3.87966E-09 -2.05871E-10 -3.19442E-11  6.49387E-07 -2.63251E-07 -1.21709E-08  3.12843E-09  1.95169E-09
 12.800  3.59322E-08 -1.74785E-08  3.11266E-09 -1.88549E-10 -2.22173E-11  4.76350E-07 -1.97626E-07 -6.20489E-09  2.48462E-09  1.34087E-09
 12.900  2.67079E-08 -1.32664E-08  2.46881E-09 -1.67475E-10 -1.46979E-11  3.47072E-07 -1.47262E-07 -2.50120E-09  1.91938E-09  9.09440E-10
 13.000  1.97001E-08 -9.98367E-09  1.93667E-09 -1.45053E-10 -9.10457E-12  2.51183E-07 -1.08924E-07 -3.23685E-10  1.44631E-09  6.08597E-10
 13.100  1.44209E-08 -7.45015E-09  1.50315E-09 -1.22955E-10 -5.10316E-12  1.80571E-07 -7.99769E-08  8.52924E-10  1.06486E-09  4.01574E-10
 13.200  1.04771E-08 -5.51346E-09  1.15473E-09 -1.02269E-10 -2.36090E-12  1.28944E-07 -5.82949E-08  1.39589E-09  7.66715E-10  2.61058E-10
 13.300  7.55506E-09 -4.04684E-09  8.78249E-10 -8.36290E-11 -5.76506E-13  9.14661E-08 -4.21835E-08  1.55614E-09  5.39932E-10  1.67044E-10
 13.400  5.40770E-09 -2.94635E-09  6.61506E-10 -6.73318E-11  5.06123E-13  6.44523E-08 -3.03054E-08  1.50062E-09  3.71677E-10  1.05084E-10
 13.500  3.84230E-09 -2.12803E-09  4.93554E-10 -5.34365E-11  1.09439E-12  4.51176E-08 -2.16164E-08  1.33682E-09  2.49761E-10  6.48966E-11
 13.600  2.71021E-09 -1.52488E-09  3.64854E-10 -4.18422E-11  1.34951E-12  3.13759E-08 -1.53093E-08  1.13112E-09  1.63446E-10  3.92722E-11
 13.700  1.89790E-09 -1.08419E-09  2.67284E-10 -3.23506E-11  1.39218E-12  2.16771E-08 -1.07660E-08  9.22166E-10  1.03754E-10  2.32323E-11
 13.800  1.31957E-09 -7.64935E-10  1.94080E-10 -2.47125E-11  1.30940E-12  1.48791E-08 -7.51800E-09  7.30524E-10  6.34773E-11  1.33930E-11
 13.900  9.10968E-10 -5.35593E-10  1.39707E-10 -1.86619E-11  1.16141E-12  1.01468E-08 -5.21340E-09  5.65344E-10  3.70194E-11  7.49164E-12
 14.000  6.24476E-10 -3.72199E-10  9.97130E-11 -1.39379E-11  9.88019E-13  6.87511E-09 -3.59031E-09  4.28965E-10  2.01604E-11  4.04174E-12
 14.100  4.25103E-10 -2.56732E-10  7.05748E-11 -1.02997E-11  8.13977E-13  4.62847E-09 -2.45558E-09  3.19950E-10  9.80269E-12  2.08435E-12
 14.200  2.87385E-10 -1.75787E-10  4.95419E-11 -7.53331E-12  6.53390E-13  3.09611E-09 -1.66805E-09  2.35028E-10  3.73027E-12  1.01310E-12
 14.300  1.92953E-10 -1.19490E-10  3.44966E-11 -5.45534E-12  5.13127E-13  2.05793E-09 -1.12542E-09  1.70279E-10  3.97309E-13  4.52893E-13
 14.400  1.28670E-10 -8.06389E-11  2.38295E-11 -3.91251E-12  3.95390E-13  1.35923E-09 -7.54210E-10  1.21814E-10 -1.24684E-12  1.77284E-13
 14.500  8.52257E-11 -5.40330E-11  1.63320E-11 -2.77969E-12  2.99571E-13  8.92106E-10 -5.02066E-10  8.61221E-11 -1.89672E-12  5.33574E-14
 14.600  5.60724E-11 -3.59505E-11  1.11070E-11 -1.95679E-12  2.23537E-13  5.81855E-10 -3.32001E-10  6.02186E-11 -1.99756E-12  5.65748E-15
 14.700  3.66468E-11 -2.37526E-11  7.49607E-12 -1.36519E-12  1.64483E-13  3.77138E-10 -2.18095E-10  4.16681E-11 -1.82453E-12 -6.91687E-15
 14.800  2.37933E-11 -1.55850E-11  5.02099E-12 -9.44110E-13  1.19468E-13  2.42933E-10 -1.42331E-10  2.85465E-11 -1.54016E-12 -5.56496E-15
 14.900  1.53470E-11 -1.01559E-11  3.33815E-12 -6.47312E-13  8.57222E-14  1.55519E-10 -9.22819E-11  1.93713E-11 -1.23461E-12 -3.93000E-16
 15.000  9.83482E-12 -6.57315E-12  2.20303E-12 -4.40084E-13  6.08051E-14  9.89484E-11 -5.94449E-11  1.30251E-11 -9.53214E-13  4.37617E-15
 15.100  6.26180E-12 -4.22568E-12  1.44335E-12 -2.96725E-13  4.26614E-14  6.25706E-11 -3.80462E-11  8.68069E-12 -7.14781E-13  7.43043E-15
 15.200  3.96135E-12 -2.69843E-12  9.38842E-13 -1.98441E-13  2.96201E-14  3.93262E-11 -2.41949E-11  5.73582E-12 -5.23361E-13  8.74693E-15
 15.300  2.49009E-12 -1.71175E-12  6.06340E-13 -1.31651E-13  2.03597E-14  2.45671E-11 -1.52885E-11  3.75846E-12 -3.75544E-13  8.75980E-15
 15.400  1.55537E-12 -1.07872E-12  3.88842E-13 -8.66539E-14  1.38594E-14  1.52546E-11 -9.59964E-12  2.44281E-12 -2.64778E-13  7.97041E-15
 15.500  9.65425E-13 -6.75360E-13  2.47626E-13 -5.65939E-14  9.34635E-15  9.41522E-12 -5.98971E-12  1.57512E-12 -1.83782E-13  6.79280E-15
 15.600  5.95502E-13 -4.20090E-13  1.56607E-13 -3.66791E-14  6.24569E-15  5.77639E-12 -3.71393E-12  1.00777E-12 -1.25766E-13  5.51486E-15
 15.700  3.65044E-13 -2.59627E-13  9.83661E-14 -2.35927E-14  4.13682E-15  3.52280E-12 -2.28851E-12  6.39870E-13 -8.49508E-14  4.30997E-15
 15.800  2.22392E-13 -1.59433E-13  6.13660E-14 -1.50623E-14  2.71640E-15  2.13569E-12 -1.40145E-12  4.03246E-13 -5.66910E-14  3.26503E-15
 15.900  1.34655E-13 -9.72845E-14  3.80261E-14 -9.54543E-15  1.76867E-15  1.28711E-12 -8.52948E-13  2.52260E-13 -3.74052E-14  2.40929E-15
 16.000  8.10344E-14 -5.89883E-14  2.34063E-14 -6.00524E-15  1.14210E-15  7.71136E-13 -5.15941E-13  1.56667E-13 -2.44169E-14  1.73792E-15
 16.100  4.84700E-14 -3.55437E-14  1.43120E-14 -3.75086E-15  7.31534E-16  4.59298E-13 -3.10187E-13  9.66062E-14 -1.57767E-14  1.22880E-15
 16.200  2.88170E-14 -2.12839E-14  8.69387E-15 -2.32612E-15  4.64838E-16  2.71967E-13 -1.85356E-13  5.91523E-14 -1.00949E-14  8.53386E-16
 16.300  1.70298E-14 -1.26662E-14  5.24672E-15 -1.43240E-15  2.93066E-16  1.60105E-13 -1.10093E-13  3.59680E-14 -6.39901E-15  5.83100E-16
 16.400  1.00038E-14 -7.49139E-15  3.14591E-15 -8.75906E-16  1.83349E-16  9.37069E-14 -6.49979E-14  2.17209E-14 -4.01969E-15  3.92512E-16
 16.500  5.84165E-15 -4.40371E-15  1.87416E-15 -5.31916E-16  1.13839E-16  5.45286E-14 -3.81446E-14  1.30283E-14 -2.50304E-15  2.60585E-16
 16.600  3.39100E-15 -2.57293E-15  1.10941E-15 -3.20810E-16  7.01537E-17  3.15480E-14 -2.22523E-14  7.76207E-15 -1.54542E-15  1.70776E-16
 16.700  1.95684E-15 -1.49418E-15  6.52557E-16 -1.92176E-16  4.29141E-17  1.81478E-14 -1.29043E-14  4.59387E-15 -9.46293E-16  1.10566E-16
 16.800  1.12261E-15 -8.62502E-16  3.81420E-16 -1.14346E-16  2.60603E-17  1.03798E-14 -7.43916E-15  2.70097E-15 -5.74771E-16  7.07632E-17
 16.900  6.40265E-16 -4.94893E-16  2.21547E-16 -6.75831E-17  1.57119E-17  5.90303E-15 -4.26338E-15  1.57770E-15 -3.46364E-16  4.47954E-17
 17.000  3.63044E-16 -2.82274E-16  1.27885E-16 -3.96803E-17  9.40548E-18  3.33803E-15 -2.42904E-15  9.15632E-16 -2.07113E-16  2.80612E-17
 17.100  2.04663E-16 -1.60048E-16  7.33639E-17 -2.31448E-17  5.59076E-18  1.87691E-15 -1.37587E-15  5.27995E-16 -1.22910E-16  1.74024E-17
 17.200  1.14712E-16 -9.02110E-17  4.18282E-17 -1.34120E-17  3.30013E-18  1.04940E-15 -7.74803E-16  3.02535E-16 -7.23979E-17  1.06882E-17
 17.300  6.39262E-17 -5.05492E-17  2.37026E-17 -7.72183E-18  1.93459E-18  5.83438E-16 -4.33796E-16  1.72257E-16 -4.23332E-17  6.50329E-18
 17.400  3.54208E-17 -2.81595E-17  1.33499E-17 -4.41722E-18  1.12636E-18  3.22558E-16 -2.41474E-16  9.74667E-17 -2.45753E-17  3.92121E-18
 17.500  1.95145E-17 -1.55956E-17  7.47352E-18 -2.51074E-18  6.51354E-19  1.77332E-16 -1.33646E-16  5.48064E-17 -1.41654E-17  2.34358E-18
 17.600  1.06902E-17 -8.58726E-18  4.15867E-18 -1.41806E-18  3.74144E-19  9.69492E-17 -7.35445E-17  3.06282E-17 -8.10789E-18  1.38872E-18
 17.700  5.82302E-18 -4.70107E-18  2.30027E-18 -7.95878E-19  2.13484E-19  5.27088E-17 -4.02403E-17  1.70115E-17 -4.60870E-18  8.16046E-19
 17.800  3.15398E-18 -2.55880E-18  1.26477E-18 -4.43889E-19  1.21010E-19  2.84978E-17 -2.18927E-17  9.39102E-18 -2.60181E-18  4.75624E-19
 17.900  1.69873E-18 -1.38479E-18  6.91293E-19 -2.46034E-19  6.81439E-20  1.53227E-17 -1.18433E-17  5.15284E-18 -1.45893E-18  2.75003E-19
 18.000  9.09814E-19 -7.45159E-19  3.75617E-19 -1.35527E-19  3.81246E-20  8.19337E-18 -6.37073E-18  2.81035E-18 -8.12614E-19  1.57763E-19
 18.100  4.84565E-19 -3.98695E-19  2.02895E-19 -7.41958E-20  2.11922E-20  4.35712E-18 -3.40766E-18  1.52360E-18 -4.49632E-19  8.98110E-20
 18.200  2.56643E-19 -2.12114E-19  1.08956E-19 -4.03712E-20  1.17046E-20  2.30436E-18 -1.81252E-18  8.21082E-19 -2.47161E-19  5.07423E-20
 18.300  1.35175E-19 -1.12213E-19  5.81701E-20 -2.18332E-20  6.42348E-21  1.21206E-18 -9.58687E-19  4.39871E-19 -1.34984E-19  2.84564E-20
 18.400  7.08034E-20 -5.90294E-20  3.08761E-20 -1.17363E-20  3.50293E-21  6.34055E-19 -5.04249E-19  2.34261E-19 -7.32458E-20  1.58420E-20
 18.500  3.68820E-20 -3.08786E-20  1.62942E-20 -6.27084E-21  1.89828E-21  3.29885E-19 -2.63751E-19  1.24029E-19 -3.94920E-20  8.75598E-21
 18.600  1.91066E-20 -1.60626E-20  8.54948E-21 -3.33053E-21  1.02228E-21  1.70702E-19 -1.37193E-19  6.52835E-20 -2.11585E-20  4.80517E-21
 18.700  9.84390E-21 -8.30907E-21  4.46018E-21 -1.75836E-21  5.47117E-22  8.78534E-20 -7.09687E-20  3.41630E-20 -1.12649E-20  2.61855E-21
 18.800  5.04398E-21 -4.27440E-21  2.31357E-21 -9.22832E-22  2.91008E-22  4.49707E-20 -3.65093E-20  1.77743E-20 -5.96018E-21  1.41710E-21
 18.900  2.57045E-21 -2.18671E-21  1.19326E-21 -4.81468E-22  1.53836E-22  2.28959E-20 -1.86789E-20  9.19436E-21 -3.13400E-21  7.61662E-22
 19.000  1.30280E-21 -1.11252E-21  6.11964E-22 -2.49721E-22  8.08270E-23  1.15944E-20 -9.50415E-21  4.72885E-21 -1.63782E-21  4.06610E-22
 19.100  6.56736E-22 -5.62901E-22  3.12075E-22 -1.28764E-22  4.22097E-23  5.83990E-21 -4.80948E-21  2.41826E-21 -8.50699E-22  2.15615E-22
 19.200  3.29269E-22 -2.83251E-22  1.58250E-22 -6.60085E-23  2.19099E-23  2.92573E-21 -2.42054E-21  1.22963E-21 -4.39184E-22  1.13579E-22
 19.300  1.64196E-22 -1.41753E-22  7.97971E-23 -3.36419E-23  1.13045E-23  1.45795E-21 -1.21161E-21  6.21702E-22 -2.25369E-22  5.94370E-23
 19.400  8.14396E-23 -7.05543E-23  4.00129E-23 -1.70469E-23  5.79779E-24  7.22653E-22 -6.03186E-22  3.12559E-22 -1.14956E-22  3.09019E-23
 19.500  4.01766E-23 -3.49260E-23  1.99521E-23 -8.58829E-24  2.95584E-24  3.56292E-22 -2.98668E-22  1.56255E-22 -5.82878E-23  1.59627E-23
 19.600  1.97143E-23 -1.71955E-23  9.89376E-24 -4.30203E-24  1.49804E-24  1.74732E-22 -1.47088E-22  7.76778E-23 -2.93794E-23  8.19308E-24
 19.700  9.62202E-24 -8.42033E-24  4.87894E-24 -2.14266E-24  7.54739E-25  8.52388E-23 -7.20486E-23  3.83998E-23 -1.47212E-23  4.17856E-24
 19.800  4.67124E-24 -4.10107E-24  2.39270E-24 -1.06111E-24  3.78020E-25  4.13621E-23 -3.51024E-23  1.88773E-23 -7.33314E-24  2.11771E-24
 19.900  2.25572E-24 -1.98666E-24  1.16697E-24 -5.22512E-25  1.88230E-25  1.99652E-23 -1.70105E-23  9.22858E-24 -3.63159E-24  1.06656E-24
  67 192 200   0.100
  0.000  5.02043E-02 -2.48253E-16 -4.16334E-16 -4.25315E-16 -1.04426E-15  9.35527E-02 -5.12023E-16 -6.24500E-16 -1.10082E-15 -2.11712E-15
  0.100  5.02099E-02  1.75883E-05 -6.11363E-09  8.66917E-13 -5.57891E-16  9.36736E-02 -3.81539E-05  1.98593E-08 -2.87679E-12 -1.51203E-14
  0.200  5.02283E-02  6.94550E-05 -9.70962E-08  5.53771E-11 -1.15584E-14  9.40293E-02 -1.50468E-04  3.14885E-07 -1.82784E-10  4.88369E-14
  0.300  5.02635E-02  1.52947E-04 -4.85495E-07  6.25782E-10 -2.62638E-13  9.45995E-02 -3.30621E-04  1.57018E-06 -2.06154E-09  1.24945E-12
  0.400  5.03219E-02  2.63783E-04 -1.50786E-06  3.47662E-09 -2.63013E-12  9.53518E-02 -5.68487E-04  4.85822E-06 -1.14236E-08  1.24025E-11
  0.500  5.04118E-02  3.96253E-04 -3.59904E-06  1.30686E-08 -1.57935E-11  9.62432E-02 -8.50714E-04  1.15399E-05 -4.28021E-08  7.27186E-11
  0.600  5.05424E-02  5.43493E-04 -7.25776E-06  3.83147E-08 -6.83886E-11  9.72234E-02 -1.16149E-03  2.31355E-05 -1.25013E-07  3.07000E-10
  0.700  5.07229E-02  6.97807E-04 -1.30054E-05  9.45067E-08 -2.36092E-10  9.82370E-02 -1.48342E-03  4.11754E-05 -3.07041E-07  1.03098E-09
  0.800  5.09619E-02  8.51035E-04 -2.13396E-05  2.05169E-07 -6.89495E-10  9.92277E-02 -1.79852E-03  6.70399E-05 -6.63463E-07  2.92604E-09
  0.900  5.12664E-02  9.94945E-04 -3.26866E-05  4.03564E-07 -1.76971E-09  1.00141E-01 -2.08921E-03  1.01802E-04 -1.29854E-06  7.29572E-09
  1.000  5.16407E-02  1.12163E-03 -4.73534E-05  7.33565E-07 -4.09623E-09  1.00927E-01 -2.33922E-03  1.46081E-04 -2.34811E-06  1.64121E-08
  1.100  5.20859E-02  1.22388E-03 -6.54845E-05  1.24961E-06 -8.70757E-09  1.01546E-01 -2.53450E-03  1.99926E-04 -3.97850E-06  3.39457E-08
  1.200  5.25997E-02  1.29554E-03 -8.70271E-05  2.01551E-06 -1.72289E-08  1.01966E-01 -2.66391E-03  2.62732E-04 -6.38192E-06  6.54609E-08
  1.300  5.31756E-02  1.33183E-03 -1.11705E-04  3.10197E-06 -3.20522E-08  1.02170E-01 -2.71977E-03  3.33197E-04 -9.76792E-06  1.18941E-07
  1.400  5.38035E-02  1.32955E-03 -1.39010E-04  4.58281E-06 -5.65076E-08  1.02154E-01 -2.69824E-03  4.09330E-04 -1.43510E-05  2.05298E-07
  1.500  5.44694E-02  1.28726E-03 -1.68201E-04  6.52990E-06 -9.49955E-08  1.01926E-01 -2.59943E-03  4.88513E-04 -2.03345E-05  3.38792E-07
  1.600  5.51567E-02  1.20532E-03 -1.98330E-04  9.00721E-06 -1.53048E-07  1.01507E-01 -2.42734E-03  5.67607E-04 -2.78925E-05  5.37299E-07
  1.700  5.58463E-02  1.08594E-03 -2.28273E-04  1.20642E-05 -2.37285E-07  1.00931E-01 -2.18961E-03  6.43105E-04 -3.71490E-05  8.22335E-07
  1.800  5.65179E-02  9.33019E-04 -2.56788E-04  1.57291E-05 -3.55244E-07  1.00238E-01 -1.89705E-03  7.11317E-04 -4.81580E-05  1.21875E-06
  1.900  5.71510E-02  7.51957E-04 -2.82572E-04  2.00029E-05 -5.15062E-07  9.94748E-02 -1.56305E-03  7.68589E-04 -6.08852E-05  1.75407E-06
  2.000  5.77259E-02  5.49411E-04 -3.04336E-04  2.48540E-05 -7.25007E-07  9.86907E-02 -1.20285E-03  8.11520E-04 -7.51924E-05  2.45734E-06
  2.100  5.82252E-02  3.32950E-04 -3.20877E-04  3.02149E-05 -9.92893E-07  9.79339E-02 -8.32713E-04  8.37189E-04 -9.08284E-05  3.35757E-06
  2.200  5.86343E-02  1.10686E-04 -3.31155E-04  3.59809E-05 -1.32539E-06  9.72483E-02 -4.69076E-04  8.43348E-04 -1.07426E-04  4.48176E-06
  2.300  5.89426E-02 -1.09126E-04 -3.34351E-04  4.20106E-05 -1.72730E-06  9.66708E-02 -1.27695E-04  8.28596E-04 -1.24506E-04  5.85249E-06
  2.400  5.91436E-02 -3.18480E-04 -3.29930E-04  4.81302E-05 -2.20083E-06  9.62291E-02  1.77179E-04  7.92495E-04 -1.41492E-04  7.48541E-06
  2.500  5.92361E-02 -5.10006E-04 -3.17672E-04  5.41387E-05 -2.74496E-06  9.59397E-02  4.33527E-04  7.35640E-04 -1.57732E-04  9.38648E-06
  2.600  5.92233E-02 -6.77302E-04 -2.97693E-04  5.98163E-05 -3.35498E-06  9.58075E-02  6.32168E-04  6.59660E-04 -1.72526E-04  1.15496E-05
  2.700  5.91133E-02 -8.15219E-04 -2.70446E-04  6.49343E-05 -4.02214E-06  9.58258E-02  7.67208E-04  5.67159E-04 -1.85166E-04  1.39541E-05
  2.800  5.89185E-02 -9.20073E-04 -2.36697E-04  6.92657E-05 -4.73364E-06  9.59773E-02  8.36293E-04  4.61597E-04 -1.94970E-04  1.65638E-05
  2.900  5.86546E-02 -9.89769E-04 -1.97491E-04  7.25963E-05 -5.47278E-06  9.62356E-02  8.40668E-04  3.47111E-04 -2.01328E-04  1.93255E-05
  3.000  5.83398E-02 -1.02385E-03 -1.54097E-04  7.47354E-05 -6.21949E-06  9.65676E-02  7.85015E-04  2.28297E-04 -2.03737E-04  2.21696E-05
  3.100  5.79944E-02 -1.02348E-03 -1.07945E-04  7.55253E-05 -6.95097E-06  9.69362E-02  6.77096E-04  1.09964E-04 -2.01842E-04  2.50117E-05
  3.200  5.76389E-02 -9.91279E-04 -6.05571E-05  7.48491E-05 -7.64268E-06  9.73030E-02  5.27204E-04 -3.13606E-06 -1.95464E-04  2.77542E-05
  3.300  5.72933E-02 -9.31220E-04 -1.34788E-05  7.26359E-05 -8.26937E-06  9.76313E-02  3.47467E-04 -1.06566E-04 -1.84617E-04  3.02910E-05
  3.400  5.69762E-02 -8.48346E-04  3.17878E-05  6.88633E-05 -8.80631E-06  9.78884E-02  1.51040E-04 -1.96447E-04 -1.69522E-04  3.25110E-05
  3.500  5.67036E-02 -7.48528E-04  7.38419E-05  6.35579E-05 -9.23050E-06  9.80479E-02 -4.87539E-05 -2.69673E-04 -1.50602E-04  3.43040E-05
  3.600  5.64881E-02 -6.38181E-04  1.11432E-04  5.67922E-05 -9.52179E-06  9.80911E-02 -2.39288E-04 -3.24068E-04 -1.28472E-04  3.55666E-05
  3.700  5.63385E-02 -5.23975E-04  1.43490E-04  4.86799E-05 -9.66390E-06  9.80079E-02 -4.09438E-04 -3.58502E-04 -1.03913E-04  3.62076E-05
  3.800  5.62591E-02 -4.12555E-04  1.69157E-04  3.93689E-05 -9.64522E-06  9.77968E-02 -5.50275E-04 -3.72929E-04 -7.78380E-05  3.61538E-05
  3.900  5.62490E-02 -3.10285E-04  1.87792E-04  2.90339E-05 -9.45933E-06  9.74645E-02 -6.55598E-04 -3.68381E-04 -5.12506E-05  3.53553E-05
  4.000  5.63029E-02 -2.23021E-04  1.98971E-04  1.78677E-05 -9.10521E-06  9.70244E-02 -7.22285E-04 -3.46882E-04 -2.51983E-05  3.37894E-05
  4.100  5.64102E-02 -1.55910E-04  2.02484E-04  6.07332E-06 -8.58711E-06  9.64946E-02 -7.50413E-04 -3.11318E-04 -7.21802E-07  3.14633E-05
  4.200  5.65557E-02 -1.13239E-04  1.98319E-04 -6.14341E-06 -7.91407E-06  9.58961E-02 -7.43169E-04 -2.65258E-04  2.11946E-05  2.84155E-05
  4.300  5.67199E-02 -9.83068E-05  1.86648E-04 -1.85797E-05 -7.09928E-06  9.52500E-02 -7.06545E-04 -2.12737E-04  3.96702E-05  2.47156E-05
  4.400  5.68795E-02 -1.13346E-04  1.67810E-04 -3.10404E-05 -6.15904E-06  9.45749E-02 -6.48843E-04 -1.58020E-04  5.39702E-05  2.04622E-05
  4.500  5.70080E-02 -1.59467E-04  1.42295E-04 -4.33407E-05 -5.11182E-06  9.38851E-02 -5.80036E-04 -1.05357E-04  6.35402E-05  1.57794E-05
  4.600  5.70770E-02 -2.36644E-04  1.10733E-04 -5.53074E-05 -3.97709E-06  9.31883E-02 -5.11018E-04 -5.87446E-05  6.80311E-05  1.08117E-05
  4.700  5.70566E-02 -3.43729E-04  7.38816E-05 -6.67795E-05 -2.77442E-06  9.24841E-02 -4.52811E-04 -2.17075E-05  6.73145E-05  5.71781E-06
  4.800  5.69166E-02 -4.78494E-04  3.26099E-05 -7.76072E-05 -1.52263E-06  9.17635E-02 -4.15776E-04  2.88584E-06  6.14861E-05  6.63462E-07
  4.900  5.66280E-02 -6.37707E-04 -1.21089E-05 -8.76512E-05 -2.39260E-07  9.10087E-02 -4.08888E-04  1.29655E-05  5.08576E-05 -4.18614E-06
  5.000  5.61638E-02 -8.17232E-04 -5.92147E-05 -9.67826E-05  1.05975E-06  9.01939E-02 -4.39122E-04  7.35224E-06  3.59387E-05 -8.67406E-06
  5.100  5.55003E-02 -1.01217E-03 -1.07578E-04 -1.04882E-04  2.36000E-06  8.92867E-02 -5.10985E-04 -1.42056E-05  1.74083E-05 -1.26589E-05
  5.200  5.46182E-02 -1.21700E-03 -1.56025E-04 -1.11843E-04  3.64843E-06  8.82496E-02 -6.26235E-04 -5.10498E-05 -3.92141E-06 -1.60216E-05
  5.300  5.35035E-02 -1.42579E-03 -2.03366E-04 -1.17571E-04  4.91285E-06  8.70432E-02 -7.83785E-04 -1.01683E-04 -2.71474E-05 -1.86703E-05
  5.400  5.21485E-02 -1.63240E-03 -2.48428E-04 -1.21988E-04  6.14144E-06  8.56284E-02 -9.79806E-04 -1.63887E-04 -5.13214E-05 -2.05446E-05
  5.500  5.05521E-02 -1.83069E-03 -2.90095E-04 -1.25036E-04  7.32220E-06  8.39692E-02 -1.20800E-03 -2.34875E-04 -7.54965E-05 -2.16179E-05
  5.600  4.87203E-02 -2.01476E-03 -3.27348E-04 -1.26682E-04  8.44261E-06  8.20357E-02 -1.46006E-03 -3.11475E-04 -9.87716E-05 -2.18971E-05
  5.700  4.66659E-02 -2.17917E-03 -3.59305E-04 -1.26919E-04  9.48934E-06  7.98059E-02 -1.72616E-03 -3.90325E-04 -1.20332E-04 -2.14215E-05
  5.800  4.44087E-02 -2.31915E-03 -3.85255E-04 -1.25772E-04  1.04483E-05  7.72679E-02 -1.99566E-03 -4.68066E-04 -1.39483E-04 -2.02598E-05
  5.900  4.19745E-02 -2.43082E-03 -4.04687E-04 -1.23296E-04  1.13050E-05  7.44211E-02 -2.25769E-03 -5.41529E-04 -1.55674E-04 -1.85048E-05
  6.000  3.93941E-02 -2.51126E-03 -4.17317E-04 -1.19580E-04  1.20449E-05  7.12766E-02 -2.50181E-03 -6.07893E-04 -1.68518E-04 -1.62679E-05
  6.100  3.67025E-02 -2.55869E-03 -4.23088E-04 -1.14741E-04  1.26544E-05  6.78569E-02 -2.71859E-03 -6.64815E-04 -1.77794E-04 -1.36726E-05
  6.200  3.39374E-02 -2.57248E-03 -4.22177E-04 -1.08926E-04  1.31215E-05  6.41952E-02 -2.90008E-03 -7.10521E-04 -1.83444E-04 -1.08475E-05
  6.300  3.11380E-02 -2.55314E-03 -4.14973E-04 -1.02299E-04  1.34368E-05  6.03338E-02 -3.04016E-03 -7.43851E-04 -1.85565E-04 -7.91954E-06
  6.400  2.83431E-02 -2.50226E-03 -4.02059E-04 -9.50423E-05  1.35941E-05  5.63221E-02 -3.13479E-03 -7.64275E-04 -1.84382E-04 -5.00806E-06
  6.500  2.55903E-02 -2.42242E-03 -3.84170E-04 -8.73462E-05  1.35914E-05  5.22143E-02 -3.18205E-03 -7.71856E-04 -1.80233E-04 -2.21948E-06
  6.600  2.29143E-02 -2.31700E-03 -3.62157E-04 -7.94001E-05  1.34311E-05  4.80670E-02 -3.18211E-03 -7.67192E-04 -1.73531E-04  3.56717E-07
  6.700  2.03462E-02 -2.19000E-03 -3.36941E-04 -7.13869E-05  1.31203E-05  4.39366E-02 -3.13707E-03 -7.51329E-04 -1.64743E-04  2.65059E-06
  6.800  1.79123E-02 -2.04587E-03 -3.09465E-04 -6.34755E-05  1.26703E-05  3.98771E-02 -3.05066E-03 -7.25660E-04 -1.54355E-04  4.61303E-06
  6.900  1.56338E-02 -1.88922E-03 -2.80651E-04 -5.58159E-05  1.20966E-05  3.59381E-02 -2.92795E-03 -6.91810E-04 -1.42851E-04  6.21566E-06
  7.000  1.35266E-02 -1.72469E-03 -2.51367E-04 -4.85344E-05  1.14179E-05  3.21631E-02 -2.77491E-03 -6.51531E-04 -1.30686E-04  7.44961E-06
  7.100  1.16009E-02 -1.55670E-03 -2.22387E-04 -4.17311E-05  1.06552E-05  2.85882E-02 -2.59807E-03 -6.06597E-04 -1.18275E-04  8.32324E-06
  7.200  9.86178E-03 -1.38932E-03 -1.94376E-04 -3.54792E-05  9.83119E-06  2.52418E-02 -2.40415E-03 -5.58717E-04 -1.05972E-04  8.85925E-06
  7.300  8.30928E-03 -1.22614E-03 -1.67872E-04 -2.98253E-05  8.96856E-06  2.21442E-02 -2.19970E-03 -5.09461E-04 -9.40704E-05  9.09133E-06
  7.400  6.93930E-03 -1.07017E-03 -1.43280E-04 -2.47910E-05  8.08953E-06  1.93073E-02 -1.99082E-03 -4.60213E-04 -8.27976E-05  9.06069E-06
  7.500  5.74410E-03 -9.23788E-04 -1.20876E-04 -2.03757E-05  7.21473E-06  1.67358E-02 -1.78297E-03 -4.12133E-04 -7.23158E-05  8.81274E-06
  7.600  4.71308E-03 -7.88749E-04 -1.00815E-04 -1.65603E-05  6.36250E-06  1.44279E-02 -1.58079E-03 -3.66143E-04 -6.27283E-05  8.39401E-06
  7.700  3.83357E-03 -6.66182E-04 -8.31451E-05 -1.33111E-05  5.54835E-06  1.23758E-02 -1.38804E-03 -3.22934E-04 -5.40864E-05  7.84966E-06
  7.800  3.09153E-03 -5.56651E-04 -6.78240E-05 -1.05832E-05  4.78467E-06  1.05673E-02 -1.20757E-03 -2.82970E-04 -4.63979E-05  7.22142E-06
  7.900  2.47225E-03 -4.60221E-04 -5.47392E-05 -8.32495E-06  4.08058E-06  8.98671E-03 -1.04135E-03 -2.46522E-04 -3.96363E-05  6.54620E-06
  8.000  1.96095E-03 -3.76544E-04 -4.37260E-05 -6.48123E-06  3.44197E-06  7.61607E-03 -8.90546E-04 -2.13690E-04 -3.37497E-05  5.85522E-06
  8.100  1.54321E-03 -3.04942E-04 -3.45855E-05 -4.99619E-06  2.87181E-06  6.43597E-03 -7.55626E-04 -1.84438E-04 -2.86696E-05  5.17368E-06
  8.200  1.20542E-03 -2.44501E-04 -2.71010E-05 -3.81578E-06  2.37041E-06  5.42653E-03 -6.36464E-04 -1.58626E-04 -2.43173E-05  4.52087E-06
  8.300  9.34994E-04 -1.94150E-04 -2.10510E-05 -2.88948E-06  1.93590E-06  4.56807E-03 -5.32474E-04 -1.36039E-04 -2.06106E-05  3.91049E-06
  8.400  7.20594E-04 -1.52741E-04 -1.62204E-05 -2.17150E-06  1.56468E-06  3.84170E-03 -4.42730E-04 -1.16416E-04 -1.74677E-05  3.35138E-06
  8.500  5.52186E-04 -1.19106E-04 -1.24078E-05 -1.62145E-06  1.25189E-06  3.22973E-03 -3.66077E-04 -9.94689E-05 -1.48111E-05  2.84824E-06
  8.600  4.21068E-04 -9.21126E-05 -9.43099E-06 -1.20461E-06  9.91838E-07  2.71591E-03 -3.01228E-04 -8.49045E-05 -1.25695E-05  2.40242E-06
  8.700  3.19823E-04 -7.06974E-05 -7.12954E-06 -8.91764E-07  7.78444E-07  2.28561E-03 -2.46848E-04 -7.24351E-05 -1.06789E-05  2.01275E-06
  8.800  2.42237E-04 -5.38936E-05 -5.36580E-06 -6.58926E-07  6.05532E-07  1.92587E-03 -2.01615E-04 -6.17892E-05 -9.08342E-06  1.67624E-06
  8.900  1.83184E-04 -4.08442E-05 -4.02435E-06 -4.86775E-07  4.67116E-07  1.62535E-03 -1.64269E-04 -5.27168E-05 -7.73476E-06  1.38874E-06
  9.000  1.38502E-04 -3.08074E-05 -3.01043E-06 -3.60070E-07  3.57596E-07  1.37430E-03 -1.33639E-04 -4.49929E-05 -6.59209E-06  1.14540E-06
  9.100  1.04856E-04 -2.31555E-05 -2.24771E-06 -2.67018E-07  2.71887E-07  1.16436E-03 -1.08670E-04 -3.84188E-05 -5.62120E-06  9.41148E-07
  9.200  7.96141E-05 -1.73672E-05 -1.67583E-06 -1.98656E-07  2.05497E-07  9.88515E-04 -8.84235E-05 -3.28208E-05 -4.79371E-06  7.70946E-07
  9.300  6.07210E-05 -1.30183E-05 -1.24780E-06 -1.48293E-07  1.54553E-07  8.40868E-04 -7.20813E-05 -2.80492E-05 -4.08625E-06  6.30006E-07
  9.400  4.65931E-05 -9.76898E-06 -9.27564E-07 -1.11006E-07  1.15784E-07  7.16531E-04 -5.89404E-05 -2.39765E-05 -3.47966E-06  5.13927E-07
  9.500  3.60220E-05 -7.35171E-06 -6.87792E-07 -8.32256E-08  8.64906E-08  6.11467E-04 -4.84037E-05 -2.04943E-05 -2.95827E-06  4.18758E-07
  9.600  2.80947E-05 -5.55878E-06 -5.07991E-07 -6.23899E-08  6.44827E-08  5.22367E-04 -3.99698E-05 -1.75113E-05 -2.50928E-06  3.41022E-07
  9.700  2.21267E-05 -4.23112E-06 -3.72903E-07 -4.66707E-08  4.80179E-08  4.46523E-04 -3.32220E-05 -1.49511E-05 -2.12220E-06  2.77714E-07
  9.800  1.76085E-05 -3.24823E-06 -2.71223E-07 -3.47649E-08  3.57323E-08  3.81732E-04 -2.78166E-05 -1.27499E-05 -1.78839E-06  2.26268E-07
  9.900  1.41627E-05 -2.51977E-06 -1.94595E-07 -2.57387E-08  2.65753E-08  3.26200E-04 -2.34729E-05 -1.08543E-05 -1.50071E-06  1.84518E-07
 10.000  1.15111E-05 -1.97850E-06 -1.36839E-07 -1.89133E-08  1.97484E-08  2.78471E-04 -1.99638E-05 -9.22001E-06 -1.25315E-06  1.50657E-07
 10.100  9.44907E-06 -1.57465E-06 -9.33641E-08 -1.37865E-08  1.46524E-08  2.37356E-04 -1.71070E-05 -7.81012E-06 -1.04067E-06  1.23188E-07
 10.200  7.82627E-06 -1.27152E-06 -6.07489E-08 -9.97726E-09  1.08419E-08  2.01886E-04 -1.47579E-05 -6.59380E-06 -8.58911E-07  1.00881E-07
 10.300  6.53258E-06 -1.04212E-06 -3.64237E-08 -7.18993E-09  7.98805E-09  1.71264E-04 -1.28028E-05 -5.54520E-06 -7.04127E-07  8.27349E-08
 10.400  5.48726E-06 -8.66623E-07 -1.84469E-08 -5.19049E-09  5.84910E-09  1.44831E-04 -1.11537E-05 -4.64255E-06 -5.73007E-07  6.79376E-08
 10.500  4.63116E-06 -7.30462E-07 -5.34193E-09 -3.79122E-09  4.24709E-09  1.22036E-04 -9.74343E-06 -3.86734E-06 -4.62615E-07  5.58361E-08
 10.600  3.92094E-06 -6.22986E-07  4.02070E-09 -2.84092E-09  3.05055E-09  1.02412E-04 -8.52127E-06 -3.20367E-06 -3.70319E-07  4.59073E-08
 10.700  3.32488E-06 -5.36423E-07  1.05097E-08 -2.21818E-09  2.16155E-09  8.55615E-05 -7.44974E-06 -2.63776E-06 -2.93749E-07  3.77345E-08
 10.800  2.81966E-06 -4.65153E-07  1.47966E-08 -1.82666E-09  1.50644E-09  7.11400E-05 -6.50151E-06 -2.15753E-06 -2.30760E-07  3.09868E-08
 10.900  2.38815E-06 -4.05148E-07  1.74027E-08 -1.59127E-09  1.02915E-09  5.88457E-05 -5.65689E-06 -1.75226E-06 -1.79416E-07  2.54015E-08
 11.000  2.01762E-06 -3.53570E-07  1.87353E-08 -1.45500E-09  6.86554E-10  4.84123E-05 -4.90184E-06 -1.41240E-06 -1.37972E-07  2.07703E-08
 11.100  1.69849E-06 -3.08456E-07  1.91141E-08 -1.37595E-09  4.45265E-10  3.96028E-05 -4.22626E-06 -1.12937E-06 -1.04869E-07  1.69269E-08
 11.200  1.42343E-06 -2.68473E-07  1.87913E-08 -1.32467E-09  2.79301E-10  3.22054E-05 -3.62274E-06 -8.95447E-07 -7.87209E-08  1.37383E-08
 11.300  1.18665E-06 -2.32742E-07  1.79670E-08 -1.28167E-09  1.68483E-10  2.60303E-05 -3.08552E-06 -7.03674E-07 -5.83079E-08  1.10967E-08
 11.400  9.83424E-07 -2.00689E-07  1.68003E-08 -1.23518E-09  9.72290E-11  2.09077E-05 -2.60985E-06 -5.47814E-07 -4.25701E-08  8.91386E-09
 11.500  8.09776E-07 -1.71940E-07  1.54175E-08 -1.17916E-09  5.36443E-11  1.66859E-05 -2.19143E-06 -4.22298E-07 -3.05966E-08  7.11691E-09
 11.600  6.62235E-07 -1.46242E-07  1.39185E-08 -1.11168E-09  2.87904E-11  1.32299E-05 -1.82614E-06 -3.22188E-07 -2.16147E-08  5.64463E-09
 11.700  5.37697E-07 -1.23405E-07  1.23810E-08 -1.03345E-09  1.60911E-11  1.04204E-05 -1.50987E-06 -2.43142E-07 -1.49781E-08  4.44523E-09
 11.800  4.33340E-07 -1.03267E-07  1.08645E-08 -9.46798E-10  1.08349E-11  8.15267E-06 -1.23842E-06 -1.81383E-07 -1.01537E-08  3.47449E-09
 11.900  3.46579E-07 -8.56669E-08  9.41291E-09 -8.54825E-10  9.75739E-12  6.33537E-06 -1.00757E-06 -1.33660E-07 -6.70869E-09  2.69448E-09
 12.000  2.75040E-07 -7.04354E-08  8.05717E-09 -7.60786E-10  1.06921E-11  4.88967E-06 -8.13066E-07 -9.72056E-08 -4.29673E-09  2.07263E-09
 12.100  2.16554E-07 -5.73901E-08  6.81718E-09 -6.67719E-10  1.22829E-11  3.74806E-06 -6.50736E-07 -6.96943E-08 -2.64528E-09  1.58098E-09
 12.200  1.69157E-07 -4.63360E-08  5.70383E-09 -5.78199E-10  1.37518E-11  2.85325E-06 -5.16541E-07 -4.91955E-08 -1.54338E-09  1.19565E-09
 12.300  1.31083E-07 -3.70703E-08  4.72080E-09 -4.94225E-10  1.47165E-11  2.15712E-06 -4.06658E-07 -3.41272E-08 -8.30577E-10  8.96373E-10
 12.400  1.00771E-07 -2.93878E-08  3.86613E-09 -4.17198E-10  1.50504E-11  1.61958E-06 -3.17532E-07 -2.32102E-08 -3.87058E-10  6.66083E-10
 12.500  7.68523E-08 -2.30867E-08  3.13370E-09 -3.47957E-10  1.47797E-11  1.20760E-06 -2.45921E-07 -1.54241E-08 -1.25105E-10  4.90555E-10
 12.600  5.81466E-08 -1.79736E-08  2.51453E-09 -2.86851E-10  1.40111E-11  8.94206E-07 -1.88917E-07 -9.96606E-09  1.81516E-11  3.58050E-10
 12.700  4.36467E-08 -1.38683E-08  1.99785E-09 -2.33830E-10  1.28825E-11  6.57584E-07 -1.43959E-07 -6.21335E-09  8.67275E-11  2.58994E-10
 12.800  3.25056E-08 -1.06063E-08  1.57201E-09 -1.88544E-10  1.15324E-11  4.80251E-07 -1.08823E-07 -3.68996E-09  1.10631E-10  1.85664E-10
 12.900  2.40195E-08 -8.04090E-09  1.22521E-09 -1.50430E-10  1.00829E-11  3.48334E-07 -8.16102E-08 -2.03744E-09  1.09698E-10  1.31911E-10
 13.000  1.76115E-08 -6.04345E-09  9.46015E-10 -1.18792E-10  8.63154E-12  2.50925E-07 -6.07209E-08 -9.90145E-10  9.65494E-11  9.28927E-11
 13.100  1.28139E-08 -4.50350E-09  7.23748E-10 -9.28739E-11  7.24956E-12  1.79523E-07 -4.48261E-08 -3.54415E-10  7.88359E-11  6.48456E-11
 13.200  9.25213E-09 -3.32773E-09  5.48707E-10 -7.19046E-11  5.98387E-12  1.27566E-07 -3.28360E-08  8.42303E-12  6.08805E-11  4.48795E-11
 13.300  6.62994E-09 -2.43850E-09  4.12305E-10 -5.51411E-11  4.86068E-12  9.00331E-08 -2.38685E-08  1.95775E-10  4.48654E-11  3.08018E-11
 13.400  4.71533E-09 -1.77223E-09  3.07099E-10 -4.18927E-11  3.89007E-12  6.31149E-08 -1.72181E-08  2.74605E-10  3.16588E-11  2.09693E-11
 13.500  3.32873E-09 -1.27757E-09  2.26765E-10 -3.15377E-11  3.07032E-12  4.39479E-08 -1.23271E-08  2.89830E-10  2.13739E-11  1.41650E-11
 13.600  2.33257E-09 -9.13605E-10  1.66022E-10 -2.35301E-11  2.39184E-12  3.03971E-08 -8.75944E-09  2.70720E-10  1.37333E-11  9.49850E-12
 13.700  1.62260E-09 -6.48163E-10  1.20530E-10 -1.74017E-11  1.84039E-12  2.08847E-08 -6.17821E-09  2.35668E-10  8.29576E-12  6.32591E-12
 13.800  1.12056E-09 -4.56251E-10  8.67797E-11 -1.27585E-11  1.39952E-12  1.42542E-08 -4.32561E-09  1.95692E-10  4.58810E-12  4.18681E-12
 13.900  7.68307E-10 -3.18680E-10  6.19693E-11 -9.27487E-12  1.05238E-12  9.66459E-09 -3.00646E-09  1.56946E-10  2.17508E-12  2.75581E-12
 14.000  5.23041E-10 -2.20891E-10  4.38952E-11 -6.68612E-12  7.82870E-13  6.50982E-09 -2.07451E-09  1.22484E-10  6.90283E-13  1.80544E-12
 14.100  3.53561E-10 -1.51953E-10  3.08449E-11 -4.78025E-12  5.76376E-13  4.35623E-09 -1.42119E-09  9.34680E-11 -1.56324E-13  1.17841E-12
 14.200  2.37327E-10 -1.03749E-10  2.15039E-11 -3.38991E-12  4.20124E-13  2.89617E-09 -9.66692E-10  6.99758E-11 -5.83310E-13  7.67080E-13
 14.300  1.58201E-10 -7.03131E-11  1.48750E-11 -2.38470E-12  3.03281E-13  1.91303E-09 -6.52907E-10  5.15192E-11 -7.48410E-13  4.98549E-13
 14.400  1.04731E-10 -4.73043E-11  1.02103E-11 -1.66431E-12  2.16886E-13  1.25550E-09 -4.37890E-10  3.73676E-11 -7.60825E-13  3.23891E-13
 14.500  6.88598E-11 -3.15942E-11  6.95514E-12 -1.15246E-12  1.53691E-13  8.18704E-10 -2.91642E-10  2.67372E-11 -6.92948E-13  2.10575E-13
 14.600  4.49684E-11 -2.09503E-11  4.70206E-12 -7.91869E-13  1.07944E-13  5.30470E-10 -1.92900E-10  1.88925E-11 -5.90459E-13  1.37146E-13
 14.700  2.91690E-11 -1.37935E-11  3.15516E-12 -5.39949E-13  7.51568E-14  3.41533E-10 -1.26715E-10  1.31944E-11 -4.80438E-13  8.95584E-14
 14.800  1.87945E-11 -9.01761E-12  2.10154E-12 -3.65393E-13  5.18853E-14  2.18503E-10 -8.26733E-11  9.11403E-12 -3.77550E-13  5.86747E-14
 14.900  1.20297E-11 -5.85421E-12  1.38954E-12 -2.45420E-13  3.55223E-14  1.38914E-10 -5.35747E-11  6.23022E-12 -2.88561E-13  3.85798E-14
 15.000  7.64914E-12 -3.77426E-12  9.12112E-13 -1.63619E-13  2.41216E-14  8.77634E-11 -3.44853E-11  4.21673E-12 -2.15495E-13  2.54588E-14
 15.100  4.83201E-12 -2.41660E-12  5.94429E-13 -1.08284E-13  1.62489E-14  5.51024E-11 -2.20498E-11  2.82685E-12 -1.57755E-13  1.68556E-14
 15.200  3.03261E-12 -1.53679E-12  3.84639E-13 -7.11424E-14  1.08596E-14  3.43819E-11 -1.40053E-11  1.87774E-12 -1.13475E-13  1.11897E-14
 15.300  1.89103E-12 -9.70700E-13  2.47137E-13 -4.64042E-14  7.20159E-15  2.13208E-11 -8.83727E-12  1.23625E-12 -8.03461E-14  7.44212E-15
 15.400  1.17164E-12 -6.09027E-13  1.57680E-13 -3.00523E-14  4.73932E-15  1.31403E-11 -5.53981E-12  8.06913E-13 -5.60762E-14  4.95399E-15
 15.500  7.21299E-13 -3.79571E-13  9.99071E-14 -1.93248E-14  3.09546E-15  8.04904E-12 -3.45019E-12  5.22275E-13 -3.86206E-14  3.29712E-15
 15.600  4.41249E-13 -2.35003E-13  6.28667E-14 -1.23395E-14  2.00677E-15  4.90041E-12 -2.13490E-12  3.35283E-13 -2.62708E-14  2.19164E-15
 15.700  2.68234E-13 -1.44544E-13  3.92892E-14 -7.82425E-15  1.29144E-15  2.96539E-12 -1.31255E-12  2.13523E-13 -1.76629E-14  1.45351E-15
 15.800  1.62040E-13 -8.83268E-14  2.43880E-14 -4.92697E-15  8.25066E-16  1.78363E-12 -8.01813E-13  1.34917E-13 -1.17448E-14  9.60878E-16
 15.900  9.72798E-14 -5.36252E-14  1.50367E-14 -3.08127E-15  5.23337E-16  1.06637E-12 -4.86705E-13  8.45953E-14 -7.72780E-15  6.32645E-16
 16.000  5.80406E-14 -3.23480E-14  9.20920E-15 -1.91388E-15  3.29596E-16  6.33732E-13 -2.93567E-13  5.26428E-14 -5.03364E-15  4.14550E-16
 16.100  3.44163E-14 -1.93886E-14  5.60279E-15 -1.18074E-15  2.06121E-16  3.74375E-13 -1.75960E-13  3.25161E-14 -3.24706E-15  2.70181E-16
 16.200  2.02830E-14 -1.15474E-14  3.38626E-15 -7.23547E-16  1.28006E-16  2.19848E-13 -1.04809E-13  1.99377E-14 -2.07504E-15  1.75054E-16
 16.300  1.18810E-14 -6.83399E-15  2.03324E-15 -4.40429E-16  7.89473E-17  1.28340E-13 -6.20406E-14  1.21370E-14 -1.31407E-15  1.12707E-16
 16.400  6.91728E-15 -4.01916E-15  1.21291E-15 -2.66316E-16  4.83577E-17  7.44790E-14 -3.64971E-14  7.33583E-15 -8.24859E-16  7.20865E-17
 16.500  4.00308E-15 -2.34899E-15  7.18878E-16 -1.59975E-16  2.94198E-17  4.29684E-14 -2.13383E-14  4.40280E-15 -5.13345E-16  4.57897E-17
 16.600  2.30273E-15 -1.36436E-15  4.23338E-16 -9.54672E-17  1.77781E-17  2.46443E-14 -1.23992E-14  2.62412E-15 -3.16809E-16  2.88809E-17
 16.700  1.31671E-15 -7.87571E-16  2.47709E-16 -5.66009E-17  1.06714E-17  1.40523E-14 -7.16092E-15  1.55328E-15 -1.93922E-16  1.80851E-17
 16.800  7.48432E-16 -4.51835E-16  1.44024E-16 -3.33408E-17  6.36319E-18  7.96612E-15 -4.11056E-15  9.13176E-16 -1.17752E-16  1.12423E-17
 16.900  4.22900E-16 -2.57640E-16  8.32111E-17 -1.95131E-17  3.76930E-18  4.48979E-15 -2.34531E-15  5.33249E-16 -7.09400E-17  6.93728E-18
 17.000  2.37552E-16 -1.46017E-16  4.77745E-17 -1.13473E-17  2.21819E-18  2.51589E-15 -1.33008E-15  3.09316E-16 -4.24088E-17  4.24917E-18
 17.100  1.32655E-16 -8.22548E-17  2.72581E-17 -6.55673E-18  1.29691E-18  1.40170E-15 -7.49804E-16  1.78237E-16 -2.51604E-17  2.58342E-18
 17.200  7.36457E-17 -4.60576E-17  1.54558E-17 -3.76467E-18  7.53373E-19  7.76466E-16 -4.20163E-16  1.02033E-16 -1.48159E-17  1.55905E-18
 17.300  4.06477E-17 -2.56350E-17  8.70961E-18 -2.14795E-18  4.34826E-19  4.27663E-16 -2.34044E-16  5.80300E-17 -8.66039E-18  9.33922E-19
 17.400  2.23050E-17 -1.41831E-17  4.87788E-18 -1.21785E-18  2.49370E-19  2.34208E-16 -1.29599E-16  3.27912E-17 -5.02559E-18  5.55336E-19
 17.500  1.21689E-17 -7.80055E-18  2.71520E-18 -6.86197E-19  1.42106E-19  1.27535E-16 -7.13405E-17  1.84109E-17 -2.89547E-18  3.27801E-19
 17.600  6.60084E-18 -4.26488E-18  1.50218E-18 -3.84240E-19  8.04693E-20  6.90543E-17 -3.90402E-17  1.02713E-17 -1.65642E-18  1.92085E-19
 17.700  3.56000E-18 -2.31807E-18  8.26049E-19 -2.13829E-19  4.52812E-20  3.71789E-17 -2.12393E-17  5.69411E-18 -9.40979E-19  1.11744E-19
 17.800  1.90903E-18 -1.25255E-18  4.51506E-19 -1.18265E-19  2.53213E-20  1.99045E-17 -1.14876E-17  3.13687E-18 -5.30858E-19  6.45395E-20
 17.900  1.01789E-18 -6.72854E-19  2.45306E-19 -6.50100E-20  1.40718E-20  1.05965E-17 -6.17713E-18  1.71733E-18 -2.97439E-19  3.70098E-20
 18.000  5.39654E-19 -3.59349E-19  1.32480E-19 -3.55183E-20  7.77178E-21  5.60969E-18 -3.30235E-18  9.34357E-19 -1.65527E-19  2.10728E-20
 18.100  2.84492E-19 -1.90805E-19  7.11213E-20 -1.92878E-20  4.26591E-21  2.95315E-18 -1.75528E-18  5.05232E-19 -9.14990E-20  1.19141E-20
 18.200  1.49132E-19 -1.00728E-19  3.79550E-20 -1.04108E-20  2.32721E-21  1.54600E-18 -9.27615E-19  2.71521E-19 -5.02424E-20  6.68902E-21
 18.300  7.77365E-20 -5.28699E-20  2.01357E-20 -5.58552E-21  1.26184E-21  8.04851E-19 -4.87407E-19  1.45031E-19 -2.74065E-20  3.72945E-21
 18.400  4.02941E-20 -2.75913E-20  1.06195E-20 -2.97876E-21  6.80029E-22  4.16689E-19 -2.54641E-19  7.69987E-20 -1.48522E-20  2.06506E-21
 18.500  2.07695E-20 -1.43169E-20  5.56792E-21 -1.57910E-21  3.64265E-22  2.14538E-19 -1.32277E-19  4.06331E-20 -7.99655E-21  1.13566E-21
 18.600  1.06461E-20 -7.38670E-21  2.90228E-21 -8.32136E-22  1.93948E-22  1.09850E-19 -6.83235E-20  2.13140E-20 -4.27772E-21  6.20313E-22
 18.700  5.42667E-21 -3.78950E-21  1.50402E-21 -4.35914E-22  1.02646E-22  5.59376E-20 -3.50906E-20  1.11135E-20 -2.27374E-21  3.36546E-22
 18.800  2.75086E-21 -1.93309E-21  7.74900E-22 -2.27006E-22  5.40001E-23  2.83284E-20 -1.79207E-20  5.76033E-21 -1.20089E-21  1.81372E-22
 18.900  1.38676E-21 -9.80546E-22  3.96940E-22 -1.17521E-22  2.82394E-23  1.42678E-20 -9.10057E-21  2.96803E-21 -6.30265E-22  9.70974E-23
 19.000  6.95241E-22 -4.94582E-22  2.02161E-22 -6.04842E-23  1.46803E-23  7.14695E-21 -4.59558E-21  1.52029E-21 -3.28712E-22  5.16388E-23
 19.100  3.46641E-22 -2.48068E-22  1.02370E-22 -3.09476E-23  7.58646E-24  3.56053E-21 -2.30768E-21  7.74156E-22 -1.70372E-22  2.72832E-23
 19.200  1.71886E-22 -1.23729E-22  5.15422E-23 -1.57426E-23  3.89744E-24  1.76418E-21 -1.15234E-21  3.91911E-22 -8.77578E-23  1.43214E-23
 19.300  8.47663E-23 -6.13691E-23  2.58031E-23 -7.96167E-24  1.99051E-24  8.69389E-22 -5.72225E-22  1.97248E-22 -4.49257E-23  7.46898E-24
 19.400  4.15751E-23 -3.02699E-23  1.28442E-23 -4.00327E-24  1.01065E-24  4.26120E-22 -2.82576E-22  9.86997E-23 -2.28582E-23  3.87029E-24
 19.500  2.02805E-23 -1.48477E-23  6.35739E-24 -2.00132E-24  5.10154E-25  2.07731E-22 -1.38770E-22  4.91025E-23 -1.15595E-23  1.99273E-24
 19.600  9.83923E-24 -7.24280E-24  3.12891E-24 -9.94759E-25  2.56018E-25  1.00722E-22 -6.77723E-23  2.42878E-23 -5.81031E-24  1.01951E-24
 19.700  4.74777E-24 -3.51363E-24  1.53129E-24 -4.91616E-25  1.27737E-25  4.85750E-23 -3.29164E-23  1.19447E-23 -2.90295E-24  5.18311E-25
 19.800  2.27860E-24 -1.69517E-24  7.45208E-25 -2.41574E-25  6.33649E-26  2.33005E-23 -1.58994E-23  5.84085E-24 -1.44168E-24  2.61854E-25
 19.900  1.08768E-24 -8.13368E-25  3.60631E-25 -1.18031E-25  3.12517E-26  1.11171E-23 -7.63773E-24  2.83987E-24 -7.11707E-25  1.31466E-25
  67 193 200   0.100
  0.000  5.00339E-02 -2.71527E-16 -4.05925E-16 -2.87713E-16 -1.53062E-15  8.99543E-02 -4.80991E-16 -7.07767E-16 -4.75352E-16 -7.58159E-16
  0.100  5.00353E-02  1.72957E-06  6.24544E-10 -3.52011E-14 -9.29818E-17  9.01294E-02 -1.75256E-06 -3.98641E-10  2.54939E-14 -2.17291E-14
  0.200  5.00413E-02  6.84212E-06  9.97586E-09 -2.13753E-12 -1.60930E-15  9.06456E-02 -6.93083E-06 -6.32764E-09  1.11740E-12  5.32142E-15
  0.300  5.00566E-02  1.51106E-05  5.03520E-08 -2.34699E-11 -1.80170E-14  9.14764E-02 -1.53001E-05 -3.16111E-08  1.19004E-11  6.87922E-14
  0.400  5.00889E-02  2.61616E-05  1.58415E-07 -1.25207E-10 -1.68404E-13  9.25793E-02 -2.64807E-05 -9.80628E-08  6.09502E-11  6.64777E-13
  0.500  5.01478E-02  3.94836E-05  3.84272E-07 -4.46131E-10 -9.70323E-13  9.38978E-02 -3.99644E-05 -2.33729E-07  2.04891E-10  3.83730E-12
  0.600  5.02444E-02  5.44397E-05  7.89883E-07 -1.22229E-09 -3.99721E-12  9.53652E-02 -5.51375E-05 -4.70590E-07  5.16347E-10  1.56336E-11
  0.700  5.03901E-02  7.02865E-05  1.44658E-06 -2.77242E-09 -1.29977E-11  9.69080E-02 -7.13078E-05 -8.41856E-07  1.03668E-09  5.08306E-11
  0.800  5.05953E-02  8.61988E-05  2.43154E-06 -5.43181E-09 -3.54789E-11  9.84499E-02 -8.77361E-05 -1.37905E-06  1.68103E-09  1.38801E-10
  0.900  5.08691E-02  1.01302E-04  3.82305E-06 -9.42539E-09 -8.43953E-11  9.99164E-02 -1.03670E-04 -2.10901E-06  2.09340E-09  3.31196E-10
  1.000  5.12178E-02  1.14710E-04  5.69477E-06 -1.46826E-08 -1.79366E-10  1.01239E-01 -1.18378E-04 -3.05106E-06  1.45786E-09  7.09022E-10
  1.100  5.16441E-02  1.25570E-04  8.10907E-06 -2.06116E-08 -3.46318E-10  1.02358E-01 -1.31183E-04 -4.21438E-06 -1.71488E-09  1.38840E-09
  1.200  5.21469E-02  1.33107E-04  1.11100E-05 -2.58647E-08 -6.14225E-10  1.03227E-01 -1.41496E-04 -5.59588E-06 -9.80051E-09  2.52098E-09
  1.300  5.27210E-02  1.36671E-04  1.47163E-05 -2.81407E-08 -1.00701E-09  1.03815E-01 -1.48839E-04 -7.17847E-06 -2.62365E-08  4.28902E-09
  1.400  5.33566E-02  1.35784E-04  1.89156E-05 -2.40763E-08 -1.52867E-09  1.04108E-01 -1.52870E-04 -8.92994E-06 -5.56308E-08  6.89247E-09
  1.500  5.40400E-02  1.30171E-04  2.36598E-05 -9.28146E-09 -2.13986E-09  1.04107E-01 -1.53395E-04 -1.08024E-05 -1.03769E-07  1.05276E-08
  1.600  5.47541E-02  1.19788E-04  2.88629E-05  2.14356E-08 -2.72416E-09  1.03831E-01 -1.50380E-04 -1.27325E-05 -1.77503E-07  1.53574E-08
  1.700  5.54790E-02  1.04832E-04  3.44021E-05  7.36235E-08 -3.04343E-09  1.03315E-01 -1.43947E-04 -1.46418E-05 -2.84505E-07  2.14775E-08
  1.800  5.61933E-02  8.57372E-05  4.01211E-05  1.52517E-07 -2.68271E-09  1.02603E-01 -1.34371E-04 -1.64384E-05 -4.32895E-07  2.88777E-08
  1.900  5.68748E-02  6.31524E-05  4.58380E-05  2.62163E-07 -9.86480E-10  1.01751E-01 -1.22064E-04 -1.80188E-05 -6.30760E-07  3.74050E-08
  2.000  5.75022E-02  3.79039E-05  5.13548E-05  4.04403E-07  3.01016E-09  1.00819E-01 -1.07557E-04 -1.92709E-05 -8.85572E-07  4.67303E-08
  2.100  5.80558E-02  1.09445E-05  5.64699E-05  5.77784E-07  1.06499E-08  9.98662E-02 -9.14749E-05 -2.00775E-05 -1.20357E-06  5.63241E-08
  2.200  5.85189E-02 -1.67062E-05  6.09917E-05  7.76527E-07  2.37143E-08  9.89519E-02 -7.45113E-05 -2.03211E-05 -1.58911E-06  6.54367E-08
  2.300  5.88786E-02 -4.40271E-05  6.47527E-05  9.89636E-07  4.44706E-08  9.81270E-02 -5.73944E-05 -1.98893E-05 -2.04402E-06  7.30974E-08
  2.400  5.91265E-02 -7.00599E-05  6.76226E-05  1.20031E-06  7.56948E-08  9.74332E-02 -4.08563E-05 -1.86818E-05 -2.56703E-06  7.81160E-08
  2.500  5.92594E-02 -9.39672E-05  6.95193E-05  1.38570E-06  1.20665E-07  9.69000E-02 -2.55997E-05 -1.66168E-05 -3.15325E-06  7.91003E-08
  2.600  5.92790E-02 -1.15081E-04  7.04169E-05  1.51716E-06  1.83121E-07  9.65436E-02 -1.22644E-05 -1.36398E-05 -3.79382E-06  7.44723E-08
  2.700  5.91921E-02 -1.32937E-04  7.03502E-05  1.56094E-06  2.67180E-07  9.63664E-02 -1.39601E-06 -9.73043E-06 -4.47562E-06  6.25001E-08
  2.800  5.90102E-02 -1.47292E-04  6.94151E-05  1.47937E-06  3.77218E-07  9.63574E-02  6.58307E-06 -4.90958E-06 -5.18118E-06  4.13158E-08
  2.900  5.87489E-02 -1.58126E-04  6.77644E-05  1.23244E-06  5.17717E-07  9.64940E-02  1.13981E-05  7.55057E-07 -5.88890E-06  8.96691E-09
  3.000  5.84268E-02 -1.65630E-04  6.56013E-05  7.79666E-07  6.93084E-07  9.67441E-02  1.29403E-05  7.14610E-06 -6.57333E-06 -3.65650E-08
  3.100  5.80645E-02 -1.70178E-04  6.31683E-05  8.21790E-08  9.07450E-07  9.70689E-02  1.12766E-05  1.40965E-05 -7.20596E-06 -9.73029E-08
  3.200  5.76840E-02 -1.72293E-04  6.07353E-05 -8.95261E-07  1.16447E-06  9.74261E-02  6.65017E-06  2.13938E-05 -7.75620E-06 -1.75216E-07
  3.300  5.73067E-02 -1.72606E-04  5.85863E-05 -2.18234E-06  1.46713E-06  9.77735E-02 -5.32423E-07  2.87878E-05 -8.19278E-06 -2.72136E-07
  3.400  5.69531E-02 -1.71814E-04  5.70057E-05 -3.80161E-06  1.81758E-06  9.80714E-02 -9.72520E-06  3.60043E-05 -8.48551E-06 -3.89632E-07
  3.500  5.66411E-02 -1.70641E-04  5.62668E-05 -5.76725E-06  2.21699E-06  9.82859E-02 -2.02805E-05  4.27611E-05 -8.60742E-06 -5.28878E-07
  3.600  5.63856E-02 -1.69803E-04  5.66202E-05 -8.08439E-06  2.66547E-06  9.83907E-02 -3.14978E-05  4.87887E-05 -8.53709E-06 -6.90466E-07
  3.700  5.61973E-02 -1.69981E-04  5.82861E-05 -1.07489E-05  3.16202E-06  9.83686E-02 -4.26820E-05  5.38525E-05 -8.26125E-06 -8.74192E-07
  3.800  5.60822E-02 -1.71802E-04  6.14473E-05 -1.37477E-05  3.70449E-06  9.82118E-02 -5.32060E-05  5.77756E-05 -7.77721E-06 -1.07883E-06
  3.900  5.60414E-02 -1.75820E-04  6.62461E-05 -1.70594E-05  4.28968E-06  9.79220E-02 -6.25740E-05  6.04598E-05 -7.09524E-06 -1.30191E-06
  4.000  5.60705E-02 -1.82518E-04  7.27811E-05 -2.06552E-05  4.91336E-06  9.75090E-02 -7.04782E-05  6.19035E-05 -6.24028E-06 -1.53951E-06
  4.100  5.61601E-02 -1.92293E-04  8.11071E-05 -2.45004E-05  5.57037E-06  9.69891E-02 -7.68440E-05  6.22128E-05 -5.25309E-06 -1.78610E-06
  4.200  5.62953E-02 -2.05459E-04  9.12343E-05 -2.85552E-05  6.25475E-06  9.63827E-02 -8.18572E-05  6.16066E-05 -4.19029E-06 -2.03444E-06
  4.300  5.64568E-02 -2.22241E-04  1.03129E-04 -3.27760E-05  6.95981E-06  9.57120E-02 -8.59691E-05  6.04115E-05 -3.12335E-06 -2.27566E-06
  4.400  5.66211E-02 -2.42771E-04  1.16714E-04 -3.71164E-05  7.67825E-06  9.49981E-02 -8.98770E-05  5.90485E-05 -2.13623E-06 -2.49940E-06
  4.500  5.67610E-02 -2.67075E-04  1.31866E-04 -4.15277E-05  8.40223E-06  9.42582E-02 -9.44791E-05  5.80096E-05 -1.32176E-06 -2.69413E-06
  4.600  5.68472E-02 -2.95065E-04  1.48418E-04 -4.59596E-05  9.12344E-06  9.35039E-02 -1.00807E-04  5.78277E-05 -7.76849E-07 -2.84758E-06
  4.700  5.68489E-02 -3.26527E-04  1.66157E-04 -5.03599E-05  9.83317E-06  9.27390E-02 -1.09939E-04  5.90391E-05 -5.96751E-07 -2.94739E-06
  4.800  5.67346E-02 -3.61106E-04  1.84824E-04 -5.46750E-05  1.05224E-05  9.19586E-02 -1.22904E-04  6.21435E-05 -8.68760E-07 -2.98173E-06
  4.900  5.64743E-02 -3.98300E-04  2.04116E-04 -5.88496E-05  1.11817E-05  9.11487E-02 -1.40578E-04  6.75638E-05 -1.66573E-06 -2.94016E-06
  5.000  5.60397E-02 -4.37455E-04  2.23684E-04 -6.28269E-05  1.18016E-05  9.02869E-02 -1.63597E-04  7.56084E-05 -3.04005E-06 -2.81431E-06
  5.100  5.54061E-02 -4.77772E-04  2.43143E-04 -6.65483E-05  1.23724E-05  8.93432E-02 -1.92270E-04  8.64406E-05 -5.01845E-06 -2.59864E-06
  5.200  5.45532E-02 -5.18319E-04  2.62077E-04 -6.99548E-05  1.28845E-05  8.82824E-02 -2.26529E-04  1.00057E-04 -7.59820E-06 -2.29102E-06
  5.300  5.34663E-02 -5.58056E-04  2.80049E-04 -7.29871E-05  1.33287E-05  8.70657E-02 -2.65905E-04  1.16277E-04 -1.07451E-05 -1.89319E-06
  5.400  5.21370E-02 -5.95875E-04  2.96616E-04 -7.55873E-05  1.36960E-05  8.56544E-02 -3.09528E-04  1.34746E-04 -1.43935E-05 -1.41092E-06
  5.500  5.05638E-02 -6.30639E-04  3.11341E-04 -7.77007E-05  1.39784E-05  8.40118E-02 -3.56172E-04  1.54950E-04 -1.84485E-05 -8.53991E-07
  5.600  4.87524E-02 -6.61235E-04  3.23815E-04 -7.92778E-05  1.41688E-05  8.21066E-02 -4.04320E-04  1.76239E-04 -2.27899E-05 -2.35878E-07
  5.700  4.67156E-02 -6.86628E-04  3.33669E-04 -8.02763E-05  1.42617E-05  7.99151E-02 -4.52256E-04  1.97871E-04 -2.72786E-05  4.26798E-07
  5.800  4.44730E-02 -7.05917E-04  3.40597E-04 -8.06641E-05  1.42531E-05  7.74232E-02 -4.98173E-04  2.19047E-04 -3.17634E-05  1.11504E-06
  5.900  4.20505E-02 -7.18378E-04  3.44369E-04 -8.04205E-05  1.41410E-05  7.46275E-02 -5.40286E-04  2.38964E-04 -3.60897E-05  1.80843E-06
  6.000  3.94790E-02 -7.23508E-04  3.44842E-04 -7.95389E-05  1.39257E-05  7.15367E-02 -5.76945E-04  2.56859E-04 -4.01074E-05  2.48612E-06
  6.100  3.67939E-02 -7.21052E-04  3.41971E-04 -7.80275E-05  1.36097E-05  6.81708E-02 -6.06734E-04  2.72050E-04 -4.36792E-05  3.12790E-06
  6.200  3.40329E-02 -7.11016E-04  3.35811E-04 -7.59103E-05  1.31979E-05  6.45605E-02 -6.28548E-04  2.83978E-04 -4.66876E-05  3.71523E-06
  6.300  3.12355E-02 -6.93667E-04  3.26517E-04 -7.32265E-05  1.26974E-05  6.07460E-02 -6.41651E-04  2.92231E-04 -4.90404E-05  4.23207E-06
  6.400  2.84406E-02 -6.69517E-04  3.14335E-04 -7.00299E-05  1.21175E-05  5.67750E-02 -6.45706E-04  2.96560E-04 -5.06748E-05  4.66563E-06
  6.500  2.56862E-02 -6.39291E-04  2.99593E-04 -6.63869E-05  1.14693E-05  5.27005E-02 -6.40770E-04  2.96889E-04 -5.15589E-05  5.00681E-06
  6.600  2.30072E-02 -6.03889E-04  2.82683E-04 -6.23746E-05  1.07653E-05  4.85781E-02 -6.27272E-04  2.93306E-04 -5.16920E-05  5.25048E-06
  6.700  2.04348E-02 -5.64338E-04  2.64047E-04 -5.80770E-05  1.00191E-05  4.44639E-02 -6.05963E-04  2.86047E-04 -5.11027E-05  5.39548E-06
  6.800  1.79957E-02 -5.21738E-04  2.44153E-04 -5.35826E-05  9.24475E-06  4.04118E-02 -5.77852E-04  2.75481E-04 -4.98449E-05  5.44438E-06
  6.900  1.57113E-02 -4.77210E-04  2.23476E-04 -4.89805E-05  8.45631E-06  3.64718E-02 -5.44136E-04  2.62073E-04 -4.79940E-05  5.40309E-06
  7.000  1.35975E-02 -4.31843E-04  2.02478E-04 -4.43574E-05  7.66740E-06  3.26880E-02 -5.06116E-04  2.46355E-04 -4.56407E-05  5.28026E-06
  7.100  1.16650E-02 -3.86656E-04  1.81595E-04 -3.97943E-05  6.89073E-06  2.90977E-02 -4.65125E-04  2.28900E-04 -4.28856E-05  5.08665E-06
  7.200  9.91888E-03 -3.42558E-04  1.61215E-04 -3.53641E-05  6.13771E-06  2.57301E-02 -4.22460E-04  2.10280E-04 -3.98332E-05  4.83439E-06
  7.300  8.35945E-03 -3.00319E-04  1.41674E-04 -3.11295E-05  5.41819E-06  2.26066E-02 -3.79323E-04  1.91050E-04 -3.65871E-05  4.53632E-06
  7.400  6.98274E-03 -2.60563E-04  1.23243E-04 -2.71419E-05  4.74020E-06  1.97406E-02 -3.36779E-04  1.71718E-04 -3.32451E-05  4.20530E-06
  7.500  5.78115E-03 -2.23752E-04  1.06131E-04 -2.34401E-05  4.10990E-06  1.71377E-02 -2.95725E-04  1.52731E-04 -2.98957E-05  3.85362E-06
  7.600  4.74418E-03 -1.90196E-04  9.04793E-05 -2.00511E-05  3.53154E-06  1.47972E-02 -2.56875E-04  1.34463E-04 -2.66154E-05  3.49261E-06
  7.700  3.85924E-03 -1.60057E-04  7.63683E-05 -1.69897E-05  3.00753E-06  1.27123E-02 -2.20758E-04  1.17211E-04 -2.34674E-05  3.13222E-06
  7.800  3.11236E-03 -1.33372E-04  6.38225E-05 -1.42604E-05  2.53862E-06  1.08715E-02 -1.87725E-04  1.01191E-04 -2.05007E-05  2.78084E-06
  7.900  2.48884E-03 -1.10067E-04  5.28181E-05 -1.18579E-05  2.12406E-06  9.25993E-03 -1.57966E-04  8.65469E-05 -1.77506E-05  2.44520E-06
  8.000  1.97389E-03 -8.99819E-05  4.32917E-05 -9.76947E-06  1.76187E-06  7.85993E-03 -1.31532E-04  7.33526E-05 -1.52394E-05  2.13037E-06
  8.100  1.55308E-03 -7.28921E-05  3.51497E-05 -7.97601E-06  1.44906E-06  6.65250E-03 -1.08359E-04  6.16248E-05 -1.29780E-05  1.83983E-06
  8.200  1.21275E-03 -5.85297E-05  2.82772E-05 -6.45417E-06  1.18196E-06  5.61796E-03 -8.82959E-05  5.13318E-05 -1.09675E-05  1.57565E-06
  8.300  9.40291E-04 -4.66027E-05  2.25463E-05 -5.17782E-06  9.56381E-07  4.73673E-03 -7.11265E-05  4.24049E-05 -9.20127E-06  1.33867E-06
  8.400  7.24284E-04 -3.68112E-05  1.78234E-05 -4.11946E-06  7.67924E-07  3.98993E-03 -5.65951E-05  3.47489E-05 -7.66666E-06  1.12869E-06
  8.500  5.54642E-04 -2.88610E-05  1.39756E-05 -3.25155E-06  6.12118E-07  3.35979E-03 -4.44247E-05  2.82516E-05 -6.34685E-06  9.44751E-07
  8.600  4.22601E-04 -2.24733E-05  1.08753E-05 -2.54740E-06  4.84607E-07  2.82993E-03 -3.43332E-05  2.27920E-05 -5.22244E-06  7.85304E-07
  8.700  3.20688E-04 -1.73919E-05  8.40350E-06 -1.98198E-06  3.81266E-07  2.38557E-03 -2.60457E-05  1.82469E-05 -4.27281E-06  6.48410E-07
  8.800  2.42635E-04 -1.33873E-05  6.45273E-06 -1.53243E-06  2.98291E-07  2.01357E-03 -1.93036E-05  1.44963E-05 -3.47718E-06  5.31916E-07
  8.900  1.83271E-04 -1.02585E-05  4.92773E-06 -1.17832E-06  2.32253E-07  1.70239E-03 -1.38697E-05  1.14272E-05 -2.81544E-06  4.33583E-07
  9.000  1.38394E-04 -7.83310E-06  3.74609E-06 -9.01821E-07  1.80125E-07  1.44209E-03 -9.53239E-06  8.93566E-06 -2.26875E-06  3.51198E-07
  9.100  1.04638E-04 -5.96609E-06  2.83786E-06 -6.87641E-07  1.39288E-07  1.22416E-03 -6.10561E-06  6.92864E-06 -1.81986E-06  2.82646E-07
  9.200  7.93439E-05 -4.53759E-06  2.14479E-06 -5.22926E-07  1.07511E-07  1.04138E-03 -3.42905E-06  5.32416E-06 -1.45335E-06  2.25970E-07
  9.300  6.04384E-05 -3.45002E-06  1.61916E-06 -3.97044E-07  8.29277E-08  8.87717E-04 -1.36635E-06  4.05125E-06 -1.15565E-06  1.79394E-07
  9.400  4.63226E-05 -2.62518E-06  1.22254E-06 -3.01340E-07  6.40009E-08  7.58148E-04  1.97093E-07  3.04925E-06 -9.15021E-07  1.41339E-07
  9.500  3.57779E-05 -2.00122E-06  9.24428E-07 -2.28877E-07  4.94819E-08  6.48514E-04  1.35666E-06  2.26700E-06 -7.21416E-07  1.10422E-07
  9.600  2.78839E-05 -1.52983E-06  7.00935E-07 -1.74167E-07  3.83700E-08  5.55402E-04  2.19119E-06  1.66173E-06 -5.66341E-07  8.54520E-08
  9.700  2.19515E-05 -1.17371E-06  5.33597E-07 -1.32926E-07  2.98738E-08  4.76016E-04  2.76546E-06  1.19798E-06 -4.42676E-07  6.54067E-08
  9.800  1.74682E-05 -9.04327E-07  4.08301E-07 -1.01849E-07  2.33740E-08  4.08079E-04  3.13260E-06  8.46615E-07 -3.44497E-07  4.94215E-08
  9.900  1.40550E-05 -7.00036E-07  3.14361E-07 -7.84068E-08  1.83912E-08  3.49735E-04  3.33607E-06  5.83796E-07 -2.66905E-07  3.67680E-08
 10.000  1.14329E-05 -5.44545E-07  2.43752E-07 -6.06870E-08  1.45581E-08  2.99478E-04  3.41147E-06  3.90157E-07 -2.05872E-07  2.68359E-08
 10.100  9.39671E-06 -4.25647E-07  1.90484E-07 -4.72496E-08  1.15950E-08  2.56079E-04  3.38802E-06  2.50046E-07 -1.58097E-07  1.91157E-08
 10.200  7.79619E-06 -3.34238E-07  1.50108E-07 -3.70175E-08  9.29064E-09  2.18537E-04  3.28972E-06  1.50887E-07 -1.20891E-07  1.31836E-08
 10.300  6.52126E-06 -2.63542E-07  1.19327E-07 -2.91875E-08  7.48606E-09  1.86030E-04  3.13634E-06  8.26470E-08 -9.20650E-08  8.68782E-09
 10.400  5.49137E-06 -2.08520E-07  9.57010E-08 -2.31619E-08  6.06221E-09  1.57878E-04  2.94412E-06  3.73788E-08 -6.98514E-08  5.33717E-09
 10.500  4.64759E-06 -1.65426E-07  7.74236E-08 -1.84960E-08  4.92998E-09  1.33517E-04  2.72646E-06  8.84914E-09 -5.28244E-08  2.89145E-09
 10.600  3.94685E-06 -1.31466E-07  6.31576E-08 -1.48588E-08  4.02271E-09  1.12468E-04  2.49426E-06 -7.77620E-09 -3.98415E-08  1.15332E-09
 10.700  3.35769E-06 -1.04555E-07  5.19115E-08 -1.20032E-08  3.29038E-09  9.43233E-05  2.25638E-06 -1.61945E-08 -2.99914E-08 -3.85682E-11
 10.800  2.85710E-06 -8.31246E-08  4.29496E-08 -9.74432E-09  2.69537E-09  7.87313E-05  2.01987E-06 -1.91856E-08 -2.25524E-08 -8.15171E-10
 10.900  2.42822E-06 -6.59918E-08  3.57261E-08 -7.94374E-09  2.20916E-09  6.53835E-05  1.79022E-06 -1.87959E-08 -1.69568E-08 -1.28194E-09
 11.000  2.05864E-06 -5.22566E-08  2.98365E-08 -6.49734E-09  1.81002E-09  5.40070E-05  1.57160E-06 -1.64928E-08 -1.27609E-08 -1.52291E-09
 11.100  1.73908E-06 -4.12288E-08  2.49808E-08 -5.32670E-09  1.48121E-09  4.43588E-05  1.36699E-06 -1.32929E-08 -9.62129E-09 -1.60419E-09
 11.200  1.46250E-06 -3.23736E-08  2.09371E-08 -4.37259E-09  1.20972E-09  3.62207E-05  1.17837E-06 -9.86918E-09 -7.27423E-09 -1.57707E-09
 11.300  1.22338E-06 -2.52721E-08  1.75409E-08 -3.59011E-09  9.85315E-10  2.93964E-05  1.00689E-06 -6.63814E-09 -5.51882E-09 -1.48056E-09
 11.400  1.01726E-06 -1.95924E-08  1.46701E-08 -2.94512E-09  7.99830E-10  2.37091E-05  8.52957E-07 -3.83041E-09 -4.20342E-09 -1.34376E-09
 11.500  8.40369E-07 -1.50685E-08  1.22328E-08 -2.41143E-09  6.46688E-10  1.90002E-05  7.16441E-07 -1.54694E-09 -3.21447E-09 -1.18775E-09
 11.600  6.89436E-07 -1.14846E-08  1.01596E-08 -1.96881E-09  5.20518E-10  1.51276E-05  5.96746E-07  1.97434E-10 -2.46759E-09 -1.02729E-09
 11.700  5.61508E-07 -8.66451E-09  8.39614E-09 -1.60144E-09  4.16884E-10  1.19647E-05  4.92942E-07  1.44106E-09 -1.90045E-09 -8.72215E-10
 11.800  4.53882E-07 -6.46298E-09  6.89931E-09 -1.29674E-09  3.32087E-10  9.39984E-06  4.03866E-07  2.25125E-09 -1.46725E-09 -7.28657E-10
 11.900  3.64057E-07 -4.75999E-09  5.63353E-09 -1.04455E-09  2.63020E-10  7.33490E-06  3.28206E-07  2.70734E-09 -1.13439E-09 -5.99971E-10
 12.000  2.89717E-07 -3.45618E-09  4.56862E-09 -8.36539E-10  2.07056E-10  5.68460E-06  2.64579E-07  2.88933E-09 -8.77278E-10 -4.87536E-10
 12.100  2.28726E-07 -2.46944E-09  3.67827E-09 -6.65741E-10  1.61970E-10  4.37541E-06  2.11588E-07  2.87090E-09 -6.77795E-10 -3.91374E-10
 12.200  1.79130E-07 -1.73215E-09  2.93916E-09 -5.26270E-10  1.25872E-10  3.34456E-06  1.67874E-07  2.71566E-09 -5.22555E-10 -3.10624E-10
 12.300  1.39160E-07 -1.18903E-09  2.33036E-09 -4.13093E-10  9.71595E-11  2.53892E-06  1.32147E-07  2.47566E-09 -4.01562E-10 -2.43904E-10
 12.400  1.07240E-07 -7.95241E-10  1.83303E-09 -3.21891E-10  7.44792E-11  1.91402E-06  1.03214E-07  2.19145E-09 -3.07269E-10 -1.89573E-10
 12.500  8.19771E-08 -5.14783E-10  1.43026E-09 -2.48941E-10  5.66919E-11  1.43294E-06  7.99923E-08  1.89303E-09 -2.33906E-10 -1.45916E-10
 12.600  6.21640E-08 -3.19095E-10  1.10695E-09 -1.91048E-10  4.28448E-11  1.06535E-06  6.15199E-08  1.60132E-09 -1.77003E-10 -1.11265E-10
 12.700  4.67638E-08 -1.85805E-10  8.49751E-10 -1.45478E-10  3.21461E-11  7.86581E-07  4.69528E-08  1.32983E-09 -1.33062E-10 -8.40792E-11
 12.800  3.49000E-08 -9.76349E-11  6.46995E-10 -1.09905E-10  2.39434E-11  5.76749E-07  3.55640E-08  1.08630E-09 -9.93157E-11 -6.29813E-11
 12.900  2.58410E-08 -4.14464E-11  4.88609E-10 -8.23735E-11  1.77031E-11  4.19980E-07  2.67352E-08  8.74141E-10 -7.35654E-11 -4.67772E-11
 13.000  1.89840E-08 -7.41256E-12  3.66005E-10 -6.12477E-11  1.29929E-11  3.03722E-07  1.99482E-08  6.93759E-10 -5.40574E-11 -3.44546E-11
 13.100  1.38383E-08  1.16838E-11  2.71954E-10 -4.51772E-11  9.46558E-12  2.18141E-07  1.47739E-08  5.43559E-10 -3.93937E-11 -2.51728E-11
 13.200  1.00099E-08  2.10383E-11  2.00452E-10 -3.30582E-11  6.84492E-12  1.55606E-07  1.08612E-08  4.20765E-10 -2.84626E-11 -1.82458E-11
 13.300  7.18541E-09  2.43084E-11  1.46574E-10 -2.39981E-11  4.91328E-12  1.10243E-07  7.92634E-09  3.22014E-10 -2.03845E-11 -1.31220E-11
 13.400  5.11893E-09  2.40032E-11  1.06332E-10 -1.72833E-11  3.50073E-12  7.75750E-08  5.74252E-09  2.43778E-10 -1.44684E-11 -9.36501E-12
 13.500  3.61944E-09  2.17920E-11  7.65350E-11 -1.23492E-11  2.47593E-12  5.42193E-08  4.13036E-09  1.82645E-10 -1.01755E-11 -6.63336E-12
 13.600  2.54020E-09  1.87439E-11  5.46612E-11 -8.75459E-12  1.73827E-12  3.76408E-08  2.94951E-09  1.35486E-10 -7.08995E-12 -4.66365E-12
 13.700  1.76965E-09  1.55092E-11  3.87393E-11 -6.15795E-12  1.21146E-12  2.59567E-08  2.09126E-09  9.95425E-11 -4.89335E-12 -3.25483E-12
 13.800  1.22384E-09  1.24546E-11  2.72465E-11 -4.29796E-12  8.38156E-13  1.77802E-08  1.47225E-09  7.24584E-11 -3.34483E-12 -2.25516E-12
 13.900  8.40259E-10  9.76148E-12  1.90190E-11 -2.97670E-12  5.75677E-13  1.20987E-08  1.02919E-09  5.22705E-11 -2.26395E-12 -1.55136E-12
 14.000  5.72765E-10  7.49532E-12  1.31770E-11 -2.04587E-12  3.92542E-13  8.17834E-09  7.14431E-10  3.73784E-11 -1.51704E-12 -1.05965E-12
 14.100  3.87652E-10  5.65347E-12  9.06205E-12 -1.39546E-12  2.65744E-13  5.49200E-09  4.92494E-10  2.65018E-11 -1.00614E-12 -7.18720E-13
 14.200  2.60517E-10  4.19707E-12  6.18656E-12 -9.44653E-13  1.78618E-13  3.66394E-09  3.37159E-10  1.86342E-11 -6.60293E-13 -4.84095E-13
 14.300  1.73853E-10  3.07138E-12  4.19292E-12 -6.34700E-13  1.19204E-13  2.42847E-09  2.29235E-10  1.29958E-11 -4.28629E-13 -3.23817E-13
 14.400  1.15215E-10  2.21810E-12  2.82135E-12 -4.23282E-13  7.89906E-14  1.59917E-09  1.54795E-10  8.99131E-12 -2.75116E-13 -2.15125E-13
 14.500  7.58293E-11  1.58231E-12  1.88495E-12 -2.80206E-13  5.19755E-14  1.04629E-09  1.03819E-10  6.17216E-12 -1.74511E-13 -1.41947E-13
 14.600  4.95668E-11  1.11582E-12  1.25048E-12 -1.84134E-13  3.39607E-14  6.80161E-10  6.91614E-11  4.20441E-12 -1.09326E-13 -9.30303E-14
 14.700  3.21804E-11  7.78321E-13  8.23775E-13 -1.20122E-13  2.20357E-14  4.39331E-10  4.57648E-11  2.84237E-12 -6.75895E-14 -6.05625E-14
 14.800  2.07521E-11  5.37290E-13  5.38924E-13 -7.77970E-14  1.41994E-14  2.81970E-10  3.00813E-11  1.90728E-12 -4.11945E-14 -3.91634E-14
 14.900  1.32931E-11  3.67228E-13  3.50153E-13 -5.00237E-14  9.08697E-15  1.79829E-10  1.96415E-11  1.27043E-12 -2.47185E-14 -2.51577E-14
 15.000  8.45860E-12  2.48603E-13  2.25957E-13 -3.19361E-14  5.77558E-15  1.13965E-10  1.27404E-11  8.40109E-13 -1.45764E-14 -1.60542E-14
 15.100  5.34692E-12  1.66747E-13  1.44828E-13 -2.02441E-14  3.64599E-15  7.17718E-11  8.20990E-12  5.51579E-13 -8.42658E-15 -1.01776E-14
 15.200  3.35783E-12  1.10846E-13  9.22076E-14 -1.27422E-14  2.28610E-15  4.49176E-11  5.25596E-12  3.59587E-13 -4.75885E-15 -6.40998E-15
 15.300  2.09500E-12  7.30464E-14  5.83160E-14 -7.96413E-15  1.42382E-15  2.79365E-11  3.34304E-12  2.32788E-13 -2.61179E-15 -4.01078E-15
 15.400  1.29866E-12  4.77301E-14  3.66385E-14 -4.94305E-15  8.80859E-16  1.72676E-11  2.11261E-12  1.49660E-13 -1.38163E-15 -2.49330E-15
 15.500  7.99860E-13  3.09305E-14  2.28686E-14 -3.04672E-15  5.41340E-16  1.06074E-11  1.32649E-12  9.55599E-14 -6.94642E-16 -1.53993E-15
 15.600  4.89501E-13  1.98821E-14  1.41812E-14 -1.86493E-15  3.30492E-16  6.47610E-12  8.27569E-13  6.06031E-14 -3.23047E-16 -9.44970E-16
 15.700  2.97667E-13  1.26790E-14  8.73737E-15 -1.13371E-15  2.00445E-16  3.92967E-12  5.13022E-13  3.81761E-14 -1.30361E-16 -5.76143E-16
 15.800  1.79872E-13  8.02277E-15  5.34883E-15 -6.84487E-16  1.20779E-16  2.37000E-12  3.16019E-13  2.38886E-14 -3.63302E-17 -3.49016E-16
 15.900  1.08010E-13  5.03774E-15  3.25362E-15 -4.10451E-16  7.23034E-17  1.42069E-12  1.93440E-13  1.48497E-14  5.22824E-18 -2.10072E-16
 16.000  6.44543E-14  3.13960E-15  1.96664E-15 -2.44458E-16  4.30049E-17  8.46490E-13  1.17666E-13  9.17046E-15  2.02182E-17 -1.25633E-16
 16.100  3.82242E-14  1.94217E-15  1.18127E-15 -1.44612E-16  2.54146E-17  5.01331E-13  7.11276E-14  5.62648E-15  2.27185E-17 -7.46542E-17
 16.200  2.25288E-14  1.19268E-15  7.05106E-16 -8.49710E-17  1.49235E-17  2.95133E-13  4.27287E-14  3.42983E-15  2.00710E-17 -4.40781E-17
 16.300  1.31966E-14  7.27150E-16  4.18274E-16 -4.95922E-17  8.70745E-18  1.72707E-13  2.55099E-14  2.07739E-15  1.58872E-17 -2.58590E-17
 16.400  7.68299E-15  4.40177E-16  2.46595E-16 -2.87501E-17  5.04850E-18  1.00465E-13  1.51361E-14  1.25024E-15  1.17842E-17 -1.50738E-17
 16.500  4.44580E-15  2.64589E-16  1.44490E-16 -1.65561E-17  2.90869E-18  5.80948E-14  8.92586E-15  7.47678E-16  8.36356E-18 -8.73079E-18
 16.600  2.55703E-15  1.57940E-16  8.41469E-17 -9.47049E-18  1.66538E-18  3.33955E-14  5.23150E-15  4.44323E-16  5.74495E-18 -5.02464E-18
 16.700  1.46183E-15  9.36306E-17  4.87079E-17 -5.38134E-18  9.47588E-19  1.90843E-14  3.04757E-15  2.62398E-16  3.84593E-18 -2.87325E-18
 16.800  8.30713E-16  5.51293E-17  2.80243E-17 -3.03749E-18  5.35838E-19  1.08421E-14  1.76459E-15  1.53999E-16  2.52065E-18 -1.63252E-18
 16.900  4.69250E-16  3.22413E-17  1.60273E-17 -1.70313E-18  3.01140E-19  6.12353E-15  1.01556E-15  8.98219E-17  1.62249E-18 -9.21623E-19
 17.000  2.63493E-16  1.87299E-17  9.11145E-18 -9.48625E-19  1.68204E-19  3.43839E-15  5.80963E-16  5.20678E-17  1.02801E-18 -5.16956E-19
 17.100  1.47082E-16  1.08088E-17  5.14908E-18 -5.24872E-19  9.33801E-20  1.91947E-15  3.30358E-16  2.99981E-17  6.42231E-19 -2.88106E-19
 17.200  8.16169E-17  6.19676E-18  2.89267E-18 -2.88485E-19  5.15268E-20  1.06533E-15  1.86734E-16  1.71777E-17  3.96118E-19 -1.59530E-19
 17.300  4.50241E-17  3.52952E-18  1.61550E-18 -1.57509E-19  2.82610E-20  5.87866E-16  1.04923E-16  9.77686E-18  2.41457E-19 -8.77636E-20
 17.400  2.46924E-17  1.99736E-18  8.96945E-19 -8.54264E-20  1.54074E-20  3.22528E-16  5.86059E-17  5.53104E-18  1.45575E-19 -4.79685E-20
 17.500  1.34631E-17  1.12306E-18  4.95094E-19 -4.60237E-20  8.34978E-21  1.75938E-16  3.25417E-17  3.11028E-18  8.68678E-20 -2.60469E-20
 17.600  7.29795E-18  6.27451E-19  2.71695E-19 -2.46302E-20  4.49817E-21  9.54248E-17  1.79630E-17  1.73855E-18  5.13320E-20 -1.40507E-20
 17.700  3.93312E-18  3.48340E-19  1.48239E-19 -1.30930E-20  2.40895E-21  5.14614E-17  9.85743E-18  9.66010E-19  3.00522E-20 -7.52949E-21
 17.800  2.10748E-18  1.92173E-19  8.04147E-20 -6.91338E-21  1.28251E-21  2.75948E-17  5.37779E-18  5.33572E-19  1.74377E-20 -4.00811E-21
 17.900  1.12277E-18  1.05357E-19  4.33724E-20 -3.62581E-21  6.78817E-22  1.47131E-17  2.91681E-18  2.92976E-19  1.00316E-20 -2.11933E-21
 18.000  5.94737E-19  5.74033E-20  2.32598E-20 -1.88873E-21  3.57203E-22  7.80050E-18  1.57284E-18  1.59922E-19  5.72329E-21 -1.11305E-21
 18.100  3.13239E-19  3.10830E-20  1.24029E-20 -9.77162E-22  1.86880E-22  4.11231E-18  8.43222E-19  8.67819E-20  3.23908E-21 -5.80583E-22
 18.200  1.64040E-19  1.67279E-20  6.57616E-21 -5.02083E-22  9.72094E-23  2.15576E-18  4.49455E-19  4.68173E-20  1.81884E-21 -3.00754E-22
 18.300  8.54194E-20  8.94753E-21  3.46708E-21 -2.56196E-22  5.02769E-23  1.12377E-18  2.38192E-19  2.51100E-20  1.01355E-21 -1.54710E-22
 18.400  4.42286E-20  4.75691E-21  1.81764E-21 -1.29816E-22  2.58557E-23  5.82527E-19  1.25507E-19  1.33894E-20  5.60594E-22 -7.90215E-23
 18.500  2.27717E-20  2.51373E-21  9.47565E-22 -6.53152E-23  1.32217E-23  3.00281E-19  6.57540E-20  7.09830E-21  3.07802E-22 -4.00721E-23
 18.600  1.16585E-20  1.32038E-21  4.91223E-22 -3.26281E-23  6.72320E-24  1.53928E-19  3.42525E-20  3.74143E-21  1.67793E-22 -2.01723E-23
 18.700  5.93545E-21  6.89411E-22  2.53235E-22 -1.61814E-23  3.39967E-24  7.84677E-20  1.77414E-20  1.96073E-21  9.08257E-23 -1.00791E-23
 18.800  3.00491E-21  3.57822E-22  1.29823E-22 -7.96602E-24  1.70957E-24  3.97790E-20  9.13720E-21  1.02165E-21  4.88231E-23 -4.99763E-24
 18.900  1.51281E-21  1.84620E-22  6.61868E-23 -3.89232E-24  8.54952E-25  2.00545E-20  4.67926E-21  5.29297E-22  2.60656E-23 -2.45868E-24
 19.000  7.57391E-22  9.46946E-23  3.35574E-23 -1.88734E-24  4.25223E-25  1.00548E-20  2.38279E-21  2.72656E-22  1.38221E-23 -1.19987E-24
 19.100  3.77089E-22  4.82853E-23  1.69204E-23 -9.08014E-25  2.10343E-25  5.01346E-21  1.20655E-21  1.39655E-22  7.28093E-24 -5.80693E-25
 19.200  1.86708E-22  2.44772E-23  8.48491E-24 -4.33354E-25  1.03489E-25  2.48609E-21  6.07522E-22  7.11265E-23  3.81010E-24 -2.78612E-25
 19.300  9.19352E-23  1.23359E-23  4.23157E-24 -2.05115E-25  5.06439E-26  1.22606E-21  3.04189E-22  3.60202E-23  1.98087E-24 -1.32474E-25
 19.400  4.50203E-23  6.18100E-24  2.09885E-24 -9.62559E-26  2.46519E-26  6.01354E-22  1.51459E-22  1.81387E-23  1.02323E-24 -6.23943E-26
 19.500  2.19254E-23  3.07915E-24  1.03537E-24 -4.47700E-26  1.19365E-26  2.93344E-22  7.49929E-23  9.08281E-24  5.25189E-25 -2.90939E-26
 19.600  1.06195E-23  1.52509E-24  5.07978E-25 -2.06298E-26  5.74949E-27  1.42317E-22  3.69256E-23  4.52264E-24  2.67862E-25 -1.34217E-26
 19.700  5.11550E-24  7.51046E-25  2.47879E-25 -9.41321E-27  2.75501E-27  6.86710E-23  1.80810E-23  2.23939E-24  1.35763E-25 -6.12064E-27
 19.800  2.45076E-24  3.67747E-25  1.20305E-25 -4.25056E-27  1.31334E-27  3.29559E-23  8.80464E-24  1.10265E-24  6.83827E-26 -2.75616E-27
 19.900  1.16775E-24  1.79041E-25  5.80746E-26 -1.89798E-27  6.22886E-28  1.57305E-23  4.26382E-24  5.39913E-25  3.42319E-26 -1.22385E-27
  67 194 200   0.100
  0.000  5.00319E-02 -2.56011E-16 -4.37150E-16 -3.75278E-16 -4.43452E-16  8.98227E-02 -4.65475E-16 -7.91034E-16 -5.75426E-16 -1.50201E-15
  0.100  5.00324E-02  7.17861E-06  2.16228E-09 -6.43852E-14  2.86098E-16  8.99974E-02 -5.22662E-06 -4.62865E-10  2.99347E-14 -2.86098E-17
  0.200  5.00357E-02  2.83432E-05  3.44704E-08 -4.01367E-12 -9.18374E-15  9.05126E-02 -2.06740E-05 -7.36787E-09  1.27383E-12  3.44033E-14
  0.300  5.00468E-02  6.23961E-05  1.73431E-07 -4.43582E-11 -2.28793E-13  9.13418E-02 -4.56596E-05 -3.69640E-08  1.00285E-11  7.33040E-13
  0.400  5.00736E-02  1.07561E-04  5.43300E-07 -2.38800E-10 -2.26051E-12  9.24425E-02 -7.90932E-05 -1.15247E-07  2.31171E-11  7.02483E-12
  0.500  5.01263E-02  1.61458E-04  1.31099E-06 -8.61379E-10 -1.32358E-11  9.37588E-02 -1.19544E-04 -2.76060E-07 -6.77029E-11  4.08531E-11
  0.600  5.02164E-02  2.21213E-04  2.67860E-06 -2.39820E-09 -5.56413E-11  9.52241E-02 -1.65324E-04 -5.57979E-07 -7.36993E-10  1.70469E-10
  0.700  5.03557E-02  2.83580E-04  4.87333E-06 -5.55344E-09 -1.85932E-10  9.67652E-02 -2.14584E-04 -9.99722E-07 -3.33739E-09  5.64439E-10
  0.800  5.05556E-02  3.45087E-04  8.13476E-06 -1.11740E-08 -5.24544E-10  9.83065E-02 -2.65412E-04 -1.63396E-06 -1.09167E-08  1.57609E-09
  0.900  5.08252E-02  4.02196E-04  1.26995E-05 -2.00697E-08 -1.29884E-09  9.97739E-02 -3.15923E-04 -2.47966E-06 -2.93447E-08  3.85974E-09
  1.000  5.11714E-02  4.51466E-04  1.87840E-05 -3.27220E-08 -2.89851E-09  1.01099E-01 -3.64348E-04 -3.53332E-06 -6.86873E-08  8.51438E-09
  1.100  5.15973E-02  4.89711E-04  2.65655E-05 -4.88919E-08 -5.94079E-09  1.02224E-01 -4.09095E-04 -4.75986E-06 -1.44704E-07  1.72441E-08
  1.200  5.21020E-02  5.14155E-04  3.61632E-05 -6.71588E-08 -1.13396E-08  1.03101E-01 -4.48811E-04 -6.08397E-06 -2.80286E-07  3.25202E-08
  1.300  5.26802E-02  5.22568E-04  4.76203E-05 -8.44421E-08 -2.03708E-08  1.03702E-01 -4.82415E-04 -7.38296E-06 -5.06615E-07  5.77260E-08
  1.400  5.33224E-02  5.13377E-04  6.08889E-05 -9.55704E-08 -3.47230E-08  1.04010E-01 -5.09130E-04 -8.48218E-06 -8.63833E-07  9.72617E-08
  1.500  5.40146E-02  4.85750E-04  7.58185E-05 -9.29730E-08 -5.65235E-08  1.04030E-01 -5.28497E-04 -9.15366E-06 -1.40103E-06  1.56592E-07
  1.600  5.47397E-02  4.39646E-04  9.21512E-05 -6.65662E-08 -8.83261E-08  1.03780E-01 -5.40386E-04 -9.11871E-06 -2.17544E-06  2.42220E-07
  1.700  5.54774E-02  3.75828E-04  1.09522E-04 -3.89787E-09 -1.33054E-07  1.03294E-01 -5.45008E-04 -8.05460E-06 -3.25072E-06  3.61576E-07
  1.800  5.62061E-02  2.95841E-04  1.27470E-04  1.09407E-07 -1.93892E-07  1.02617E-01 -5.42910E-04 -5.60530E-06 -4.69444E-06  5.22819E-07
  1.900  5.69033E-02  2.01950E-04  1.45450E-04  2.88882E-07 -2.74117E-07  1.01805E-01 -5.34980E-04 -1.39578E-06 -6.57483E-06  7.34555E-07
  2.000  5.75471E-02  9.70407E-05  1.62861E-04  5.50155E-07 -3.76889E-07  1.00917E-01 -5.22427E-04  4.95060E-06 -8.95700E-06  1.00547E-06
  2.100  5.81177E-02 -1.54981E-05  1.79069E-04  9.07631E-07 -5.04993E-07  1.00014E-01 -5.06759E-04  1.37926E-05 -1.18987E-05  1.34393E-06
  2.200  5.85976E-02 -1.31930E-04  1.93444E-04  1.37301E-06 -6.60557E-07  9.91521E-02 -4.89735E-04  2.54499E-05 -1.54463E-05  1.75748E-06
  2.300  5.89735E-02 -2.48335E-04  2.05393E-04  1.95372E-06 -8.44759E-07  9.83834E-02 -4.73293E-04  4.01814E-05 -1.96303E-05  2.25238E-06
  2.400  5.92365E-02 -3.60784E-04  2.14394E-04  2.65146E-06 -1.05756E-06  9.77486E-02 -4.59457E-04  5.81632E-05 -2.44619E-05  2.83305E-06
  2.500  5.93825E-02 -4.65514E-04  2.20025E-04  3.46087E-06 -1.29744E-06  9.72766E-02 -4.50214E-04  7.94678E-05 -2.99294E-05  3.50164E-06
  2.600  5.94126E-02 -5.59099E-04  2.21993E-04  4.36857E-06 -1.56127E-06  9.69829E-02 -4.47376E-04  1.04043E-04 -3.59955E-05  4.25745E-06
  2.700  5.93331E-02 -6.38594E-04  2.20153E-04  5.35261E-06 -1.84414E-06  9.68690E-02 -4.52429E-04  1.31697E-04 -4.25955E-05  5.09652E-06
  2.800  5.91548E-02 -7.01671E-04  2.14515E-04  6.38235E-06 -2.13940E-06  9.69230E-02 -4.66384E-04  1.62081E-04 -4.96356E-05  6.01124E-06
  2.900  5.88926E-02 -7.46714E-04  2.05255E-04  7.41896E-06 -2.43873E-06  9.71211E-02 -4.89649E-04  1.94681E-04 -5.69926E-05  6.98995E-06
  3.000  5.85646E-02 -7.72885E-04  1.92705E-04  8.41638E-06 -2.73229E-06  9.74300E-02 -5.21923E-04  2.28814E-04 -6.45145E-05  8.01672E-06
  3.100  5.81913E-02 -7.80155E-04  1.77341E-04  9.32277E-06 -3.00906E-06  9.78096E-02 -5.62151E-04  2.63636E-04 -7.20220E-05  9.07122E-06
  3.200  5.77943E-02 -7.69298E-04  1.59766E-04  1.00824E-05 -3.25713E-06  9.82160E-02 -6.08524E-04  2.98153E-04 -7.93114E-05  1.01288E-05
  3.300  5.73953E-02 -7.41851E-04  1.40683E-04  1.06376E-05 -3.46416E-06  9.86054E-02 -6.58549E-04  3.31252E-04 -8.61595E-05  1.11604E-05
  3.400  5.70150E-02 -7.00037E-04  1.20872E-04  1.09313E-05 -3.61783E-06  9.89365E-02 -7.09190E-04  3.61740E-04 -9.23291E-05  1.21338E-05
  3.500  5.66720E-02 -6.46668E-04  1.01158E-04  1.09091E-05 -3.70630E-06  9.91739E-02 -7.57057E-04  3.88393E-04 -9.75775E-05  1.30133E-05
  3.600  5.63819E-02 -5.85019E-04  8.23827E-05  1.05214E-05 -3.71867E-06  9.92898E-02 -7.98659E-04  4.10026E-04 -1.01666E-04  1.37617E-05
  3.700  5.61563E-02 -5.18689E-04  6.53747E-05  9.72526E-06 -3.64547E-06  9.92658E-02 -8.30673E-04  4.25563E-04 -1.04373E-04  1.43413E-05
  3.800  5.60024E-02 -4.51452E-04  5.09260E-05  8.48594E-06 -3.47896E-06  9.90932E-02 -8.50233E-04  4.34118E-04 -1.05505E-04  1.47156E-05
  3.900  5.59225E-02 -3.87103E-04  3.97662E-05  6.77800E-06 -3.21350E-06  9.87732E-02 -8.55205E-04  4.35071E-04 -1.04910E-04  1.48515E-05
  4.000  5.59134E-02 -3.29310E-04  3.25418E-05  4.58590E-06 -2.84575E-06  9.83156E-02 -8.44411E-04  4.28141E-04 -1.02494E-04  1.47212E-05
  4.100  5.59667E-02 -2.81472E-04  2.97983E-05  1.90433E-06 -2.37479E-06  9.77371E-02 -8.17809E-04  4.13445E-04 -9.82325E-05  1.43047E-05
  4.200  5.60688E-02 -2.46589E-04  3.19639E-05 -1.26190E-06 -1.80217E-06  9.70593E-02 -7.76580E-04  3.91535E-04 -9.21779E-05  1.35916E-05
  4.300  5.62011E-02 -2.27153E-04  3.93368E-05 -4.89820E-06 -1.13187E-06  9.63060E-02 -7.23132E-04  3.63407E-04 -8.44692E-05  1.25834E-05
  4.400  5.63410E-02 -2.25052E-04  5.20743E-05 -8.98066E-06 -3.70114E-07  9.55004E-02 -6.61001E-04  3.30486E-04 -7.53330E-05  1.12944E-05
  4.500  5.64619E-02 -2.41506E-04  7.01840E-05 -1.34766E-05  4.74748E-07  9.46626E-02 -5.94670E-04  2.94571E-04 -6.50794E-05  9.75284E-06
  4.600  5.65347E-02 -2.77013E-04  9.35181E-05 -1.83451E-05  1.39253E-06  9.38071E-02 -5.29291E-04  2.57749E-04 -5.40934E-05  8.00079E-06
  4.700  5.65288E-02 -3.31340E-04  1.21771E-04 -2.35373E-05  2.37148E-06  9.29412E-02 -4.70358E-04  2.22291E-04 -4.28190E-05  6.09308E-06
  4.800  5.64128E-02 -4.03515E-04  1.54477E-04 -2.89969E-05  3.39852E-06  9.20634E-02 -4.23331E-04  1.90510E-04 -3.17389E-05  4.09556E-06
  4.900  5.61563E-02 -4.91872E-04  1.91021E-04 -3.46601E-05  4.45955E-06  9.11633E-02 -3.93252E-04  1.64621E-04 -2.13490E-05  2.08232E-06
  5.000  5.57308E-02 -5.94096E-04  2.30643E-04 -4.04559E-05  5.53968E-06  9.02216E-02 -3.84383E-04  1.46597E-04 -1.21316E-05  1.32159E-07
  5.100  5.51111E-02 -7.07314E-04  2.72456E-04 -4.63062E-05  6.62348E-06  8.92113E-02 -3.99882E-04  1.38025E-04 -4.52634E-06 -1.67546E-06
  5.200  5.42765E-02 -8.28194E-04  3.15469E-04 -5.21264E-05  7.69519E-06  8.80994E-02 -4.41558E-04  1.40002E-04  1.09627E-06 -3.26482E-06
  5.300  5.32117E-02 -9.53072E-04  3.58613E-04 -5.78259E-05  8.73890E-06  8.68491E-02 -5.09715E-04  1.53043E-04  4.45834E-06 -4.56829E-06
  5.400  5.19077E-02 -1.07809E-03  4.00777E-04 -6.33094E-05  9.73882E-06  8.54223E-02 -6.03101E-04  1.77044E-04  5.39251E-06 -5.53035E-06
  5.500  5.03623E-02 -1.19933E-03  4.40841E-04 -6.84786E-05  1.06794E-05  8.37828E-02 -7.18961E-04  2.11274E-04  3.85298E-06 -6.11096E-06
  5.600  4.85807E-02 -1.31301E-03  4.77723E-04 -7.32346E-05  1.15457E-05  8.18985E-02 -8.53192E-04  2.54422E-04 -8.14097E-08 -6.28795E-06
  5.700  4.65750E-02 -1.41558E-03  5.10414E-04 -7.74804E-05  1.23235E-05  7.97442E-02 -1.00059E-03  3.04674E-04 -6.21217E-06 -6.05842E-06
  5.800  4.43642E-02 -1.50390E-03  5.38024E-04 -8.11246E-05  1.29998E-05  7.73039E-02 -1.15518E-03  3.59828E-04 -1.42340E-05 -5.43871E-06
  5.900  4.19734E-02 -1.57533E-03  5.59813E-04 -8.40847E-05  1.35629E-05  7.45716E-02 -1.31055E-03  4.17434E-04 -2.37542E-05 -4.46338E-06
  6.000  3.94332E-02 -1.62786E-03  5.75225E-04 -8.62906E-05  1.40032E-05  7.15528E-02 -1.46025E-03  4.74939E-04 -3.43173E-05 -3.18282E-06
  6.100  3.67780E-02 -1.66017E-03  5.83907E-04 -8.76885E-05  1.43130E-05  6.82642E-02 -1.59815E-03  5.29846E-04 -4.54330E-05 -1.66009E-06
  6.200  3.40453E-02 -1.67165E-03  5.85722E-04 -8.82433E-05  1.44873E-05  6.47333E-02 -1.71879E-03  5.79849E-04 -5.66046E-05  3.30086E-08
  6.300  3.12737E-02 -1.66241E-03  5.80755E-04 -8.79415E-05  1.45239E-05  6.09971E-02 -1.81762E-03  6.22955E-04 -6.73572E-05  1.82025E-06
  6.400  2.85020E-02 -1.63325E-03  5.69298E-04 -8.67918E-05  1.44235E-05  5.71002E-02 -1.89124E-03  6.57581E-04 -7.72617E-05  3.62530E-06
  6.500  2.57676E-02 -1.58561E-03  5.51834E-04 -8.48262E-05  1.41899E-05  5.30930E-02 -1.93749E-03  6.82612E-04 -8.59556E-05  5.37584E-06
  6.600  2.31053E-02 -1.52143E-03  5.29013E-04 -8.20983E-05  1.38301E-05  4.90293E-02 -1.95552E-03  6.97428E-04 -9.31569E-05  7.00711E-06
  6.700  2.05460E-02 -1.44309E-03  5.01613E-04 -7.86821E-05  1.33541E-05  4.49634E-02 -1.94568E-03  7.01901E-04 -9.86725E-05  8.46476E-06
  6.800  1.81165E-02 -1.35329E-03  4.70505E-04 -7.46685E-05  1.27742E-05  4.09485E-02 -1.90946E-03  6.96352E-04 -1.02401E-04  9.70677E-06
  6.900  1.58381E-02 -1.25484E-03  4.36610E-04 -7.01618E-05  1.21053E-05  3.70341E-02 -1.84933E-03  6.81499E-04 -1.04326E-04  1.07045E-05
  7.000  1.37271E-02 -1.15064E-03  4.00862E-04 -6.52751E-05  1.13636E-05  3.32645E-02 -1.76844E-03  6.58374E-04 -1.04513E-04  1.14428E-05
  7.100  1.17943E-02 -1.04346E-03  3.64166E-04 -6.01257E-05  1.05666E-05  2.96775E-02 -1.67050E-03  6.28240E-04 -1.03093E-04  1.19193E-05
  7.200  1.00452E-02 -9.35913E-04  3.27368E-04 -5.48308E-05  9.73227E-06  2.63035E-02 -1.55948E-03  5.92498E-04 -1.00246E-04  1.21430E-05
  7.300  8.48047E-03 -8.30327E-04  2.91229E-04 -4.95023E-05  8.87827E-06  2.31651E-02 -1.43938E-03  5.52601E-04 -9.61919E-05  1.21324E-05
  7.400  7.09667E-03 -7.28694E-04  2.56401E-04 -4.42438E-05  8.02152E-06  2.02770E-02 -1.31408E-03  5.09978E-04 -9.11689E-05  1.19135E-05
  7.500  5.88660E-03 -6.32633E-04  2.23420E-04 -3.91468E-05  7.17759E-06  1.76464E-02 -1.18716E-03  4.65971E-04 -8.54211E-05  1.15169E-05
  7.600  4.84025E-03 -5.43375E-04  1.92693E-04 -3.42889E-05  6.36031E-06  1.52741E-02 -1.06176E-03  4.21782E-04 -7.91858E-05  1.09764E-05
  7.700  3.94541E-03 -4.61765E-04  1.64508E-04 -2.97320E-05  5.58137E-06  1.31546E-02 -9.40510E-04  3.78440E-04 -7.26831E-05  1.03261E-05
  7.800  3.18851E-03 -3.88287E-04  1.39034E-04 -2.55219E-05  4.85016E-06  1.12779E-02 -8.25526E-04  3.36787E-04 -6.61085E-05  9.59933E-06
  7.900  2.55516E-03 -3.23104E-04  1.16335E-04 -2.16885E-05  4.17368E-06  9.63009E-03 -7.18357E-04  2.97465E-04 -5.96280E-05  8.82666E-06
  8.000  2.03083E-03 -2.66100E-04  9.63843E-05 -1.82472E-05  3.55657E-06  8.19451E-03 -6.20041E-04  2.60933E-04 -5.33756E-05  8.03527E-06
  8.100  1.60129E-03 -2.16935E-04  7.90811E-05 -1.51998E-05  3.00125E-06  6.95287E-03 -5.31146E-04  2.27473E-04 -4.74536E-05  7.24821E-06
  8.200  1.25302E-03 -1.75098E-04  6.42667E-05 -1.25372E-05  2.50813E-06  5.88605E-03 -4.51837E-04  1.97218E-04 -4.19340E-05  6.48412E-06
  8.300  9.73472E-04 -1.39962E-04  5.17417E-05 -1.02409E-05  2.07590E-06  4.97484E-03 -3.81948E-04  1.70174E-04 -3.68615E-05  5.75722E-06
  8.400  7.51266E-04 -1.10828E-04  4.12812E-05 -8.28547E-06  1.70182E-06  4.20056E-03 -3.21056E-04  1.46248E-04 -3.22573E-05  5.07766E-06
  8.500  5.76298E-04 -8.69697E-05  3.26484E-05 -6.64107E-06  1.38208E-06  3.54553E-03 -2.68555E-04  1.25272E-04 -2.81231E-05  4.45184E-06
  8.600  4.39762E-04 -6.76651E-05  2.56059E-05 -5.27493E-06  1.11211E-06  2.99335E-03 -2.23721E-04  1.07028E-04 -2.44457E-05  3.88305E-06
  8.700  3.34117E-04 -5.22264E-05  1.99247E-05 -4.15337E-06  8.86881E-07  2.52915E-03 -1.85766E-04  9.12681E-05 -2.12008E-05  3.37196E-06
  8.800  2.53017E-04 -4.00168E-05  1.53908E-05 -3.24318E-06  7.01164E-07  2.13961E-03 -1.53887E-04  7.77315E-05 -1.83567E-05  2.91725E-06
  8.900  1.91202E-04 -3.04634E-05  1.18095E-05 -2.51274E-06  5.49767E-07  1.81303E-03 -1.27297E-04  6.61573E-05 -1.58775E-05  2.51613E-06
  9.000  1.44384E-04 -2.30629E-05  9.00819E-06 -1.93281E-06  4.27710E-07  1.53926E-03 -1.05253E-04  5.62952E-05 -1.37252E-05  2.16484E-06
  9.100  1.09113E-04 -1.73834E-05  6.83671E-06 -1.47708E-06  3.30353E-07  1.30955E-03 -8.70751E-05  4.79122E-05 -1.18625E-05  1.85903E-06
  9.200  8.26524E-05 -1.30616E-05  5.16746E-06 -1.12237E-06  2.53487E-07  1.11651E-03 -7.21482E-05  4.07963E-05 -1.02535E-05  1.59411E-06
  9.300  6.28601E-05 -9.79770E-06  3.89382E-06 -8.48736E-07  1.93380E-07  9.53905E-04 -5.99321E-05  3.47587E-05 -8.86471E-06  1.36549E-06
  9.400  4.80789E-05 -7.34862E-06  2.92829E-06 -6.39351E-07  1.46798E-07  8.16524E-04 -4.99576E-05  2.96344E-05 -7.66607E-06  1.16876E-06
  9.500  3.70407E-05 -5.52072E-06  2.20027E-06 -4.80262E-07  1.10990E-07  7.00055E-04 -4.18232E-05  2.52808E-05 -6.63073E-06  9.99823E-07
  9.600  2.87850E-05 -4.16198E-06  1.65364E-06 -3.60111E-07  8.36593E-08  6.00947E-04 -3.51895E-05  2.15765E-05 -5.73527E-06  8.54930E-07
  9.700  2.25903E-05 -3.15474E-06  1.24440E-06 -2.69803E-07  6.29256E-08  5.16283E-04 -2.97722E-05  1.84189E-05 -4.95948E-06  7.30742E-07
  9.800  1.79190E-05 -2.40912E-06  9.38559E-07 -2.02167E-07  4.72721E-08  4.43682E-04 -2.53358E-05  1.57219E-05 -4.28615E-06  6.24319E-07
  9.900  1.43726E-05 -1.85717E-06  7.10112E-07 -1.51624E-07  3.54954E-08  3.81205E-04 -2.16869E-05  1.34140E-05 -3.70069E-06  5.33102E-07
 10.000  1.16573E-05 -1.44801E-06  5.39392E-07 -1.13894E-07  2.66543E-08  3.27270E-04 -1.86676E-05  1.14354E-05 -3.19084E-06  4.54886E-07
 10.100  9.55683E-06 -1.14380E-06  4.11640E-07 -8.57287E-08  2.00230E-08  2.80591E-04 -1.61506E-05  9.73691E-06 -2.74632E-06  3.87786E-07
 10.200  7.91287E-06 -9.16584E-07  3.15849E-07 -6.46857E-08  1.50480E-08  2.40115E-04 -1.40336E-05  8.27727E-06 -2.35848E-06  3.30194E-07
 10.300  6.60928E-06 -7.45735E-07  2.43844E-07 -4.89425E-08  1.13117E-08  2.04980E-04 -1.22356E-05  7.02229E-06 -2.02007E-06  2.80744E-07
 10.400  5.56107E-06 -6.16094E-07  1.89565E-07 -3.71455E-08  8.50133E-09  1.74474E-04 -1.06929E-05  5.94332E-06 -1.72494E-06  2.38279E-07
 10.500  4.70608E-06 -5.16527E-07  1.48519E-07 -2.82924E-08  6.38434E-09  1.48001E-04 -9.35587E-06  5.01625E-06 -1.46788E-06  2.01818E-07
 10.600  3.99885E-06 -4.38871E-07  1.17367E-07 -2.16400E-08  4.78795E-09  1.25061E-04 -8.18643E-06  4.22065E-06 -1.24439E-06  1.70526E-07
 10.700  3.40620E-06 -3.77155E-07  9.36215E-08 -1.66366E-08  3.58388E-09  1.05227E-04 -7.15550E-06  3.53905E-06 -1.05056E-06  1.43694E-07
 10.800  2.90386E-06 -3.27037E-07  7.54225E-08 -1.28706E-08  2.67656E-09  8.81290E-05 -6.24117E-06  2.95646E-06 -8.82993E-07  1.20716E-07
 10.900  2.47410E-06 -2.85386E-07  6.13769E-08 -1.00333E-08  1.99438E-09  7.34429E-05 -5.42696E-06  2.45989E-06 -7.38649E-07  1.01071E-07
 11.000  2.10388E-06 -2.49970E-07  5.04401E-08 -7.89254E-09  1.48329E-09  6.08825E-05 -4.70046E-06  2.03801E-06 -6.14829E-07  8.43140E-08
 11.100  1.78354E-06 -2.19225E-07  4.18297E-08 -6.27268E-09  1.10218E-09  5.01918E-05 -4.05223E-06  1.68089E-06 -5.09104E-07  7.00564E-08
 11.200  1.50582E-06 -1.92082E-07  3.49621E-08 -5.04107E-09  8.19570E-10  4.11405E-05 -3.47488E-06  1.37984E-06 -4.19281E-07  5.79629E-08
 11.300  1.26508E-06 -1.67825E-07  2.94045E-08 -4.09759E-09  6.11255E-10  3.35211E-05 -2.96239E-06  1.12716E-06 -3.43378E-07  4.77408E-08
 11.400  1.05686E-06 -1.45989E-07  2.48386E-08 -3.36711E-09  4.58577E-10  2.71457E-05 -2.50961E-06  9.16094E-07 -2.79601E-07  3.91344E-08
 11.500  8.77446E-07 -1.26278E-07  2.10324E-08 -2.79368E-09  3.47189E-10  2.18451E-05 -2.11190E-06  7.40662E-07 -2.26332E-07  3.19194E-08
 11.600  7.23645E-07 -1.08505E-07  1.78182E-08 -2.33612E-09  2.66123E-10  1.74673E-05 -1.76487E-06  5.95615E-07 -1.82112E-07  2.58990E-08
 11.700  5.92616E-07 -9.25448E-08  1.50759E-08 -1.96447E-09  2.07066E-10  1.38762E-05 -1.46428E-06  4.76346E-07 -1.45638E-07  2.09005E-08
 11.800  4.81769E-07 -7.83053E-08  1.27192E-08 -1.65729E-09  1.63797E-10  1.09509E-05 -1.20594E-06  3.78828E-07 -1.15748E-07  1.67726E-08
 11.900  3.88714E-07 -6.57030E-08  1.06858E-08 -1.39940E-09  1.31729E-10  8.58482E-06 -9.85738E-07  2.99559E-07 -9.14161E-08  1.33826E-08
 12.000  3.11227E-07 -5.46525E-08  8.92973E-09 -1.18017E-09  1.07541E-10  6.68490E-06 -7.99618E-07  2.35508E-07 -7.17428E-08  1.06149E-08
 12.100  2.47247E-07 -4.50591E-08  7.41591E-09 -9.92214E-10  8.88738E-11  5.17036E-06 -6.43665E-07  1.84068E-07 -5.59445E-08  8.36892E-09
 12.200  1.94877E-07 -3.68174E-08  6.11615E-09 -8.30330E-10  7.40883E-11  3.97187E-06 -5.14130E-07  1.43011E-07 -4.33454E-08  6.55771E-09
 12.300  1.52387E-07 -2.98124E-08  5.00661E-09 -6.90787E-10  6.20698E-11  3.03046E-06 -4.07485E-07  1.10448E-07 -3.33673E-08  5.10649E-09
 12.400  1.18218E-07 -2.39228E-08  4.06619E-09 -5.70778E-10  5.20766E-11  2.29644E-06 -3.20460E-07  8.47849E-08 -2.55203E-08  3.95133E-09
 12.500  9.09855E-08 -1.90243E-08  3.27556E-09 -4.68063E-10  4.36233E-11  1.72836E-06 -2.50069E-07  6.46897E-08 -1.93922E-08  3.03797E-09
 12.600  6.94739E-08 -1.49937E-08  2.61667E-09 -3.80739E-10  3.63949E-11  1.29194E-06 -1.93633E-07  4.90559E-08 -1.46401E-08  2.32069E-09
 12.700  5.26315E-08 -1.17122E-08  2.07265E-09 -3.07095E-10  3.01846E-11  9.59148E-07 -1.48780E-07  3.69720E-08 -1.09808E-08  1.76127E-09
 12.800  3.95607E-08 -9.06860E-09  1.62775E-09 -2.45547E-10  2.48512E-11  7.07240E-07 -1.13441E-07  2.76931E-08 -8.18278E-09  1.32797E-09
 12.900  2.95052E-08 -6.96065E-09  1.26742E-09 -1.94603E-10  2.02906E-11  5.17955E-07 -8.58362E-08  2.06147E-08 -6.05825E-09  9.94706E-10
 13.000  2.18359E-08 -5.29677E-09  9.78432E-10 -1.52856E-10  1.64186E-11  3.76765E-07 -6.44567E-08  1.52505E-08 -4.45634E-09  7.40177E-10
 13.100  1.60366E-08 -3.99638E-09  7.48913E-10 -1.18993E-10  1.31610E-11  2.72213E-07 -4.80377E-08  1.12120E-08 -3.25688E-09  5.47148E-10
 13.200  1.16881E-08 -2.98995E-09  5.68390E-10 -9.18087E-11  1.04484E-11  1.95353E-07 -3.55333E-08  8.19173E-09 -2.36496E-09  4.01790E-10
 13.300  8.45472E-09 -2.21843E-09  4.27763E-10 -7.02079E-11  8.21414E-12  1.39256E-07 -2.60885E-08  5.94779E-09 -1.70630E-09  2.93101E-10
 13.400  6.07022E-09 -1.63252E-09  3.19254E-10 -5.32182E-11  6.39473E-12  9.86051E-08 -1.90129E-08  4.29164E-09 -1.22322E-09  2.12403E-10
 13.500  4.32602E-09 -1.19164E-09  2.36310E-10 -3.99895E-11  4.93003E-12  6.93572E-08 -1.37547E-08  3.07735E-09 -8.71334E-10  1.52909E-10
 13.600  3.06042E-09 -8.62880E-10  1.73491E-10 -2.97910E-11  3.76428E-12  4.84621E-08 -9.87843E-09  2.19290E-09 -6.16745E-10  1.09356E-10
 13.700  2.14937E-09 -6.19893E-10  1.26345E-10 -2.20051E-11  2.84690E-12  3.36391E-08 -7.04332E-09  1.55292E-09 -4.33790E-10  7.76944E-11
 13.800  1.49867E-09 -4.41861E-10  9.12786E-11 -1.61179E-11  2.13295E-12  2.31969E-08 -4.98590E-09  1.09287E-09 -3.03193E-10  5.48386E-11
 13.900  1.03751E-09 -3.12533E-10  6.54253E-11 -1.17081E-11  1.58333E-12  1.58919E-08 -3.50437E-09  7.64328E-10 -2.10590E-10  3.84540E-11
 14.000  7.13183E-10 -2.19375E-10  4.65295E-11 -8.43541E-12  1.16469E-12  1.08166E-08 -2.44568E-09  5.31236E-10 -1.45360E-10  2.67895E-11
 14.100  4.86806E-10 -1.52826E-10  3.28363E-11 -6.02856E-12  8.49119E-13  7.31459E-09 -1.69486E-09  3.66939E-10 -9.97146E-11  1.85424E-11
 14.200  3.29978E-10 -1.05673E-10  2.29965E-11 -4.27420E-12  6.13634E-13  4.91460E-09 -1.16637E-09  2.51886E-10 -6.79811E-11  1.27514E-11
 14.300  2.22133E-10 -7.25301E-11  1.59841E-11 -3.00660E-12  4.39642E-13  3.28094E-09 -7.97122E-10  1.71839E-10 -4.60626E-11  8.71269E-12
 14.400  1.48513E-10 -4.94193E-11  1.10272E-11 -2.09855E-12  3.12321E-13  2.17638E-09 -5.41034E-10  1.16506E-10 -3.10207E-11  5.91509E-12
 14.500  9.86193E-11 -3.34296E-11  7.55149E-12 -1.45354E-12  2.20028E-13  1.43452E-09 -3.64716E-10  7.85046E-11 -2.07640E-11  3.99023E-12
 14.600  6.50477E-11 -2.24519E-11  5.13357E-12 -9.99171E-13  1.53740E-13  9.39579E-10 -2.44194E-10  5.25728E-11 -1.38146E-11  2.67471E-12
 14.700  4.26183E-11 -1.49724E-11  3.46465E-12 -6.81707E-13  1.06557E-13  6.11539E-10 -1.62400E-10  3.49908E-11 -9.13579E-12  1.78159E-12
 14.800  2.77381E-11 -9.91462E-12  2.32157E-12 -4.61676E-13  7.32697E-14  3.95542E-10 -1.07282E-10  2.31462E-11 -6.00548E-12  1.17926E-12
 14.900  1.79347E-11 -6.51981E-12  1.54461E-12 -3.10381E-13  4.99872E-14  2.54244E-10 -7.04006E-11  1.52174E-11 -3.92423E-12  7.75695E-13
 15.000  1.15204E-11 -4.25789E-12  1.02047E-12 -2.07160E-13  3.38404E-14  1.62410E-10 -4.58936E-11  9.94368E-12 -2.54906E-12  5.07071E-13
 15.100  7.35230E-12 -2.76173E-12  6.69498E-13 -1.37278E-13  2.27353E-14  1.03108E-10 -2.97216E-11  6.45805E-12 -1.64601E-12  3.29424E-13
 15.200  4.66202E-12 -1.77917E-12  4.36210E-13 -9.03267E-14  1.51600E-14  6.50574E-11 -1.91230E-11  4.16879E-12 -1.05663E-12  2.12699E-13
 15.300  2.93726E-12 -1.13850E-12  2.82270E-13 -5.90172E-14  1.00339E-14  4.07983E-11 -1.22241E-11  2.67473E-12 -6.74323E-13  1.36494E-13
 15.400  1.83885E-12 -7.23674E-13  1.81419E-13 -3.82929E-14  6.59262E-15  2.54295E-11 -7.76378E-12  1.70575E-12 -4.27831E-13  8.70580E-14
 15.500  1.14394E-12 -4.56957E-13  1.15816E-13 -2.46754E-14  4.30029E-15  1.57543E-11 -4.89939E-12  1.08125E-12 -2.69865E-13  5.51911E-14
 15.600  7.07176E-13 -2.86648E-13  7.34432E-14 -1.57922E-14  2.78500E-15  9.70135E-12 -3.07211E-12  6.81261E-13 -1.69240E-13  3.47781E-14
 15.700  4.34449E-13 -1.78643E-13  4.62647E-14 -1.00387E-14  1.79092E-15  5.93816E-12 -1.91415E-12  4.26665E-13 -1.05523E-13  2.17838E-14
 15.800  2.65249E-13 -1.10613E-13  2.89524E-14 -6.33867E-15  1.14362E-15  3.61300E-12 -1.18514E-12  2.65614E-13 -6.54176E-14  1.35632E-14
 15.900  1.60948E-13 -6.80501E-14  1.80002E-14 -3.97579E-15  7.25225E-16  2.18520E-12 -7.29184E-13  1.64366E-13 -4.03225E-14  8.39474E-15
 16.000  9.70627E-14 -4.15979E-14  1.11186E-14 -2.47730E-15  4.56752E-16  1.31381E-12 -4.45851E-13  1.01106E-13 -2.47126E-14  5.16512E-15
 16.100  5.81790E-14 -2.52669E-14  6.82365E-15 -1.53350E-15  2.85715E-16  7.85239E-13 -2.70921E-13  6.18234E-14 -1.50595E-14  3.15932E-15
 16.200  3.46611E-14 -1.52507E-14  4.16102E-15 -9.43111E-16  1.77523E-16  4.66562E-13 -1.63609E-13  3.75789E-14 -9.12511E-15  1.92114E-15
 16.300  2.05255E-14 -9.14743E-15  2.52125E-15 -5.76280E-16  1.09566E-16  2.75591E-13 -9.81971E-14  2.27069E-14 -5.49799E-15  1.16142E-15
 16.400  1.20819E-14 -5.45252E-15  1.51803E-15 -3.49877E-16  6.71764E-17  1.61837E-13 -5.85772E-14  1.36395E-14 -3.29395E-15  6.98060E-16
 16.500  7.06934E-15 -3.22998E-15  9.08267E-16 -2.11070E-16  4.09169E-17  9.44838E-14 -3.47304E-14  8.14473E-15 -1.96238E-15  4.17142E-16
 16.600  4.11185E-15 -1.90162E-15  5.40043E-16 -1.26528E-16  2.47603E-17  5.48421E-14 -2.04670E-14  4.83498E-15 -1.16254E-15  2.47841E-16
 16.700  2.37751E-15 -1.11270E-15  3.19110E-16 -7.53723E-17  1.48867E-17  3.16488E-14 -1.19887E-14  2.85338E-15 -6.84855E-16  1.46410E-16
 16.800  1.36662E-15 -6.47120E-16  1.87398E-16 -4.46189E-17  8.89305E-18  1.81591E-14 -6.98035E-15  1.67409E-15 -4.01201E-16  8.59973E-17
 16.900  7.80950E-16 -3.74070E-16  1.09375E-16 -2.62497E-17  5.27876E-18  1.03594E-14 -4.03998E-15  9.76463E-16 -2.33723E-16  5.02260E-17
 17.000  4.43670E-16 -2.14929E-16  6.34471E-17 -1.53476E-17  3.11359E-18  5.87605E-15 -2.32429E-15  5.66239E-16 -1.35402E-16  2.91683E-17
 17.100  2.50594E-16 -1.22752E-16  3.65814E-17 -8.91842E-18  1.82498E-18  3.31404E-15 -1.32929E-15  3.26449E-16 -7.80075E-17  1.68438E-17
 17.200  1.40722E-16 -6.96885E-17  2.09641E-17 -5.15082E-18  1.06301E-18  1.85848E-15 -7.55753E-16  1.87115E-16 -4.46931E-17  9.67227E-18
 17.300  7.85687E-17 -3.93285E-17  1.19419E-17 -2.95680E-18  6.15347E-19  1.03632E-15 -4.27149E-16  1.06632E-16 -2.54649E-17  5.52308E-18
 17.400  4.36154E-17 -2.20637E-17  6.76182E-18 -1.68708E-18  3.54012E-19  5.74614E-16 -2.40009E-16  6.04161E-17 -1.44293E-17  3.13624E-18
 17.500  2.40737E-17 -1.23052E-17  3.80591E-18 -9.56826E-19  2.02418E-19  3.16817E-16 -1.34071E-16  3.40342E-17 -8.13120E-18  1.77101E-18
 17.600  1.32120E-17 -6.82249E-18  2.12946E-18 -5.39417E-19  1.15034E-19  1.73701E-16 -7.44580E-17  1.90625E-17 -4.55695E-18  9.94541E-19
 17.700  7.20987E-18 -3.76060E-18  1.18442E-18 -3.02290E-19  6.49780E-20  9.47024E-17 -4.11117E-17  1.06158E-17 -2.53985E-18  5.55423E-19
 17.800  3.91225E-18 -2.06083E-18  6.54914E-19 -1.68400E-19  3.64823E-20  5.13446E-17 -2.25687E-17  5.87813E-18 -1.40786E-18  3.08483E-19
 17.900  2.11094E-18 -1.12281E-18  3.60007E-19 -9.32590E-20  2.03604E-20  2.76827E-17 -1.23181E-17  3.23627E-18 -7.76130E-19  1.70393E-19
 18.000  1.13262E-18 -6.08215E-19  1.96741E-19 -5.13429E-20  1.12952E-20  1.48427E-17 -6.68472E-18  1.77164E-18 -4.25533E-19  9.36041E-20
 18.100  6.04304E-19 -3.27574E-19  1.06893E-19 -2.81010E-20  6.22894E-21  7.91425E-18 -3.60692E-18  9.64355E-19 -2.32039E-19  5.11404E-20
 18.200  3.20630E-19 -1.75416E-19  5.77410E-20 -1.52906E-20  3.41478E-21  4.19671E-18 -1.93513E-18  5.21957E-19 -1.25841E-19  2.77887E-20
 18.300  1.69174E-19 -9.34001E-20  3.10104E-20 -8.27180E-21  1.86101E-21  2.21318E-18 -1.03232E-18  2.80915E-19 -6.78758E-20  1.50180E-20
 18.400  8.87676E-20 -4.94484E-20  1.65588E-20 -4.44895E-21  1.00828E-21  1.16075E-18 -5.47588E-19  1.50336E-19 -3.64123E-20  8.07238E-21
 18.500  4.63204E-20 -2.60311E-20  8.79133E-21 -2.37906E-21  5.43098E-22  6.05455E-19 -2.88827E-19  8.00024E-20 -1.94277E-20  4.31562E-21
 18.600  2.40378E-20 -1.36262E-20  4.64085E-21 -1.26490E-21  2.90834E-22  3.14088E-19 -1.51487E-19  4.23353E-20 -1.03095E-20  2.29479E-21
 18.700  1.24059E-20 -7.09270E-21  2.43593E-21 -6.68671E-22  1.54843E-22  1.62052E-19 -7.90077E-20  2.22775E-20 -5.44131E-21  1.21368E-21
 18.800  6.36771E-21 -3.67120E-21  1.27134E-21 -3.51470E-22  8.19652E-23  8.31565E-20 -4.09762E-20  1.16573E-20 -2.85639E-21  6.38461E-22
 18.900  3.25059E-21 -1.88961E-21  6.59785E-22 -1.83692E-22  4.31388E-23  4.24407E-20 -2.11333E-20  6.06606E-21 -1.49136E-21  3.34070E-22
 19.000  1.65034E-21 -9.67191E-22  3.40479E-22 -9.54612E-23  2.25744E-23  2.15436E-20 -1.08389E-20  3.13902E-21 -7.74470E-22  1.73867E-22
 19.100  8.33344E-22 -4.92306E-22  1.74717E-22 -4.93294E-23  1.17458E-23  1.08771E-20 -5.52824E-21  1.61535E-21 -4.00022E-22  9.00074E-23
 19.200  4.18523E-22 -2.49201E-22  8.91541E-23 -2.53475E-23  6.07681E-24  5.46217E-21 -2.80404E-21  8.26668E-22 -2.05505E-22  4.63475E-23
 19.300  2.09058E-22 -1.25447E-22  4.52396E-23 -1.29515E-23  3.12611E-24  2.72826E-21 -1.41443E-21  4.20717E-22 -1.05008E-22  2.37391E-23
 19.400  1.03865E-22 -6.28025E-23  2.28284E-23 -6.58071E-24  1.59911E-24  1.35544E-21 -7.09557E-22  2.12936E-22 -5.33692E-23  1.20947E-23
 19.500  5.13258E-23 -3.12683E-23  1.14555E-23 -3.32504E-24  8.13398E-25  6.69805E-22 -3.54002E-22  1.07180E-22 -2.69789E-23  6.12950E-24
 19.600  2.52273E-23 -1.54828E-23  5.71674E-24 -1.67070E-24  4.11422E-25  3.29231E-22 -1.75648E-22  5.36524E-23 -1.35653E-23  3.08998E-24
 19.700  1.23334E-23 -7.62467E-24  2.83713E-24 -8.34810E-25  2.06938E-25  1.60968E-22 -8.66771E-23  2.67104E-23 -6.78432E-24  1.54950E-24
 19.800  5.99752E-24 -3.73441E-24  1.40028E-24 -4.14828E-25  1.03506E-25  7.82834E-23 -4.25400E-23  1.32248E-23 -3.37488E-24  7.72921E-25
 19.900  2.90099E-24 -1.81912E-24  6.87325E-25 -2.04997E-25  5.14842E-26  3.78702E-23 -2.07648E-23  6.51218E-24 -1.66989E-24  3.83522E-25
  67 195 200   0.100
  0.000  4.96019E-02 -2.56011E-16 -3.74700E-16 -5.00371E-16 -7.29550E-16  8.99990E-02 -4.65475E-16 -7.07767E-16 -9.00667E-16 -1.14439E-16
  0.100  4.96042E-02  5.81368E-06  1.18185E-09 -8.75399E-14 -6.72330E-16  9.01698E-02 -3.54222E-06 -7.38572E-11  1.94219E-13 -1.19589E-14
  0.200  4.96128E-02  2.29634E-05  1.88612E-08 -5.56236E-12 -4.65624E-15  9.06735E-02 -1.40223E-05 -1.25500E-09  1.19707E-11 -1.26312E-14
  0.300  4.96325E-02  5.05874E-05  9.50655E-08 -6.21322E-11 -5.00814E-14  9.14842E-02 -3.10079E-05 -6.94955E-09  1.33111E-10  1.72488E-13
  0.400  4.96713E-02  8.72905E-05  2.98535E-07 -3.39711E-10 -4.74772E-13  9.25606E-02 -5.38035E-05 -2.44567E-08  7.22630E-10  1.61325E-12
  0.500  4.97388E-02  1.31203E-04  7.22566E-07 -1.25106E-09 -2.77067E-12  9.38479E-02 -8.14849E-05 -6.69536E-08  2.63714E-09  9.34168E-12
  0.600  4.98465E-02  1.80062E-04  1.48165E-06 -3.57756E-09 -1.16185E-11  9.52814E-02 -1.12944E-04 -1.55458E-07  7.45634E-09  3.89317E-11
  0.700  5.00056E-02  2.31307E-04  2.70663E-06 -8.56946E-09 -3.87088E-11  9.67897E-02 -1.46941E-04 -3.20138E-07  1.76184E-08  1.28754E-10
  0.800  5.02270E-02  2.82197E-04  4.53829E-06 -1.79884E-08 -1.08800E-10  9.82989E-02 -1.82154E-04 -6.00366E-07  3.63903E-08  3.59076E-10
  0.900  5.05196E-02  3.29927E-04  7.11916E-06 -3.40664E-08 -2.68181E-10  9.97368E-02 -2.17239E-04 -1.04308E-06  6.76204E-08  8.78089E-10
  1.000  5.08895E-02  3.71755E-04  1.05839E-05 -5.93663E-08 -5.95207E-10  1.01037E-01 -2.50871E-04 -1.69920E-06  1.15255E-07  1.93365E-09
  1.100  5.13395E-02  4.05131E-04  1.50482E-05 -9.65447E-08 -1.21188E-09  1.02142E-01 -2.81798E-04 -2.61827E-06  1.82635E-07  3.90853E-09
  1.200  5.18681E-02  4.27809E-04  2.05979E-05 -1.48033E-07 -2.29485E-09  1.03007E-01 -3.08879E-04 -3.84146E-06  2.71629E-07  7.35512E-09
  1.300  5.24696E-02  4.37962E-04  2.72771E-05 -2.15673E-07 -4.08332E-09  1.03603E-01 -3.31122E-04 -5.39374E-06  3.81686E-07  1.30250E-08
  1.400  5.31340E-02  4.34260E-04  3.50787E-05 -3.00351E-07 -6.88102E-09  1.03915E-01 -3.47717E-04 -7.27581E-06  5.08925E-07  2.18890E-08
  1.500  5.38472E-02  4.15948E-04  4.39363E-05 -4.01690E-07 -1.10490E-08  1.03947E-01 -3.58073E-04 -9.45664E-06  6.45357E-07  3.51412E-08
  1.600  5.45916E-02  3.82882E-04  5.37202E-05 -5.17854E-07 -1.69858E-08  1.03716E-01 -3.61846E-04 -1.18675E-05  7.78358E-07  5.41893E-08
  1.700  5.53469E-02  3.35546E-04  6.42364E-05 -6.45521E-07 -2.50926E-08  1.03256E-01 -3.58972E-04 -1.43980E-05  8.90472E-07  8.06202E-08
  1.800  5.60915E-02  2.75037E-04  7.52304E-05 -7.80059E-07 -3.57220E-08  1.02613E-01 -3.49693E-04 -1.68947E-05  9.59589E-07  1.16148E-07
  1.900  5.68028E-02  2.03023E-04  8.63966E-05 -9.15920E-07 -4.91095E-08  1.01838E-01 -3.34579E-04 -1.91631E-05  9.59538E-07  1.62544E-07
  2.000  5.74592E-02  1.21673E-04  9.73904E-05 -1.04726E-06 -6.52901E-08  1.00991E-01 -3.14533E-04 -2.09723E-05  8.61048E-07  2.21543E-07
  2.100  5.80406E-02  3.35621E-05  1.07845E-04 -1.16871E-06 -8.40044E-08  1.00131E-01 -2.90788E-04 -2.20629E-05  6.33081E-07  2.94747E-07
  2.200  5.85299E-02 -5.84354E-05  1.17393E-04 -1.27634E-06 -1.04598E-07  9.93141E-02 -2.64873E-04 -2.21581E-05  2.44421E-07  3.83507E-07
  2.300  5.89138E-02 -1.51278E-04  1.25683E-04 -1.36856E-06 -1.25927E-07  9.85901E-02 -2.38564E-04 -2.09770E-05 -3.34505E-07  4.88809E-07
  2.400  5.91833E-02 -2.41889E-04  1.32402E-04 -1.44706E-06 -1.46270E-07  9.79992E-02 -2.13800E-04 -1.82506E-05 -1.12970E-06  6.11152E-07
  2.500  5.93343E-02 -3.27295E-04  1.37299E-04 -1.51757E-06 -1.63262E-07  9.75697E-02 -1.92581E-04 -1.37392E-05 -2.16163E-06  7.50427E-07
  2.600  5.93679E-02 -4.04752E-04  1.40192E-04 -1.59041E-06 -1.73866E-07  9.73164E-02 -1.76835E-04 -7.25045E-06 -3.44327E-06  9.05808E-07
  2.700  5.92900E-02 -4.71875E-04  1.40989E-04 -1.68068E-06 -1.74371E-07  9.72407E-02 -1.68284E-04  1.34164E-06 -4.97829E-06  1.07564E-06
  2.800  5.91112E-02 -5.26733E-04  1.39691E-04 -1.80822E-06 -1.60440E-07  9.73303E-02 -1.68299E-04  1.20796E-05 -6.75946E-06  1.25736E-06
  2.900  5.88461E-02 -5.67935E-04  1.36393E-04 -1.99706E-06 -1.27202E-07  9.75615E-02 -1.77771E-04  2.49070E-05 -8.76730E-06  1.44738E-06
  3.000  5.85128E-02 -5.94690E-04  1.31285E-04 -2.27467E-06 -6.93868E-08  9.79007E-02 -1.96999E-04  3.96570E-05 -1.09692E-05  1.64112E-06
  3.100  5.81314E-02 -6.06835E-04  1.24641E-04 -2.67082E-06  1.84949E-08  9.83076E-02 -2.25626E-04  5.60457E-05 -1.33190E-05  1.83290E-06
  3.200  5.77236E-02 -6.04837E-04  1.16812E-04 -3.21632E-06  1.41948E-07  9.87382E-02 -2.62610E-04  7.36724E-05 -1.57573E-05  2.01604E-06
  3.300  5.73110E-02 -5.89769E-04  1.08205E-04 -3.94154E-06  3.06260E-07  9.91481E-02 -3.06258E-04  9.20279E-05 -1.82124E-05  2.18292E-06
  3.400  5.69146E-02 -5.63257E-04  9.92726E-05 -4.87506E-06  5.16267E-07  9.94957E-02 -3.54309E-04  1.10511E-04 -2.06022E-05  2.32517E-06
  3.500  5.65534E-02 -5.27412E-04  9.04941E-05 -6.04223E-06  7.76118E-07  9.97446E-02 -4.04080E-04  1.28456E-04 -2.28373E-05  2.43392E-06
  3.600  5.62434E-02 -4.84728E-04  8.23568E-05 -7.46411E-06  1.08906E-06  9.98665E-02 -4.52646E-04  1.45166E-04 -2.48246E-05  2.50015E-06
  3.700  5.59970E-02 -4.37986E-04  7.53408E-05 -9.15650E-06  1.45727E-06  9.98421E-02 -4.97061E-04  1.59953E-04 -2.64725E-05  2.51512E-06
  3.800  5.58221E-02 -3.90126E-04  6.99034E-05 -1.11293E-05  1.88169E-06  9.96622E-02 -5.34589E-04  1.72190E-04 -2.76961E-05  2.47092E-06
  3.900  5.57217E-02 -3.44135E-04  6.64651E-05 -1.33863E-05  2.36193E-06  9.93272E-02 -5.62935E-04  1.81356E-04 -2.84233E-05  2.36110E-06
  4.000  5.56936E-02 -3.02920E-04  6.53976E-05 -1.59249E-05  2.89625E-06  9.88466E-02 -5.80451E-04  1.87084E-04 -2.86012E-05  2.18127E-06
  4.100  5.57302E-02 -2.69198E-04  6.70125E-05 -1.87364E-05  3.48154E-06  9.82371E-02 -5.86303E-04  1.89202E-04 -2.82020E-05  1.92975E-06
  4.200  5.58184E-02 -2.45383E-04  7.15525E-05 -2.18063E-05  4.11336E-06  9.75206E-02 -5.80578E-04  1.87764E-04 -2.72275E-05  1.60818E-06
  4.300  5.59405E-02 -2.33493E-04  7.91827E-05 -2.51144E-05  4.78605E-06  9.67216E-02 -5.64323E-04  1.83063E-04 -2.57131E-05  1.22198E-06
  4.400  5.60741E-02 -2.35074E-04  8.99836E-05 -2.86358E-05  5.49284E-06  9.58642E-02 -5.39515E-04  1.75639E-04 -2.37288E-05  7.80659E-07
  4.500  5.61931E-02 -2.51136E-04  1.03945E-04 -3.23404E-05  6.22596E-06  9.49702E-02 -5.08948E-04  1.66250E-04 -2.13794E-05  2.97839E-07
  4.600  5.62684E-02 -2.82111E-04  1.20963E-04 -3.61937E-05  6.97682E-06  9.40557E-02 -4.76060E-04  1.55843E-04 -1.88000E-05 -2.08916E-07
  4.700  5.62693E-02 -3.27835E-04  1.40832E-04 -4.01569E-05  7.73617E-06  9.31302E-02 -4.44699E-04  1.45494E-04 -1.61515E-05 -7.18612E-07
  4.800  5.61643E-02 -3.87551E-04  1.63253E-04 -4.41866E-05  8.49422E-06  9.21945E-02 -4.18855E-04  1.36343E-04 -1.36113E-05 -1.20766E-06
  4.900  5.59227E-02 -4.59928E-04  1.87827E-04 -4.82351E-05  9.24080E-06  9.12404E-02 -4.02366E-04  1.29516E-04 -1.13639E-05 -1.65094E-06
  5.000  5.55155E-02 -5.43112E-04  2.14065E-04 -5.22501E-05  9.96555E-06  9.02510E-02 -3.98642E-04  1.26047E-04 -9.58911E-06 -2.02312E-06
  5.100  5.49170E-02 -6.34791E-04  2.41398E-04 -5.61753E-05  1.06580E-05  8.92015E-02 -4.10397E-04  1.26797E-04 -8.45060E-06 -2.30014E-06
  5.200  5.41059E-02 -7.32283E-04  2.69189E-04 -5.99508E-05  1.13077E-05  8.80605E-02 -4.39441E-04  1.32391E-04 -8.08422E-06 -2.46066E-06
  5.300  5.30664E-02 -8.32635E-04  2.96752E-04 -6.35134E-05  1.19046E-05  8.67926E-02 -4.86531E-04  1.43168E-04 -8.58821E-06 -2.48754E-06
  5.400  5.17888E-02 -9.32739E-04  3.23373E-04 -6.67982E-05  1.24388E-05  8.53608E-02 -5.51292E-04  1.59142E-04 -1.00154E-05 -2.36906E-06
  5.500  5.02705E-02 -1.02945E-03  3.48334E-04 -6.97397E-05  1.29012E-05  8.37290E-02 -6.32225E-04  1.80002E-04 -1.23684E-05 -2.09990E-06
  5.600  4.85159E-02 -1.11973E-03  3.70944E-04 -7.22740E-05  1.32834E-05  8.18649E-02 -7.26785E-04  2.05122E-04 -1.55980E-05 -1.68173E-06
  5.700  4.65367E-02 -1.20074E-03  3.90560E-04 -7.43411E-05  1.35779E-05  7.97425E-02 -8.31539E-04  2.33596E-04 -1.96054E-05 -1.12335E-06
  5.800  4.43515E-02 -1.26997E-03  4.06619E-04 -7.58870E-05  1.37786E-05  7.73444E-02 -9.42377E-04  2.64301E-04 -2.42475E-05 -4.40435E-07
  5.900  4.19849E-02 -1.32533E-03  4.18658E-04 -7.68665E-05  1.38810E-05  7.46627E-02 -1.05477E-03  2.95962E-04 -2.93452E-05  3.45263E-07
  6.000  3.94671E-02 -1.36524E-03  4.26337E-04 -7.72452E-05  1.38820E-05  7.17008E-02 -1.16403E-03  3.27234E-04 -3.46944E-05  1.20701E-06
  6.100  3.68322E-02 -1.38868E-03  4.29451E-04 -7.70022E-05  1.37805E-05  6.84729E-02 -1.26562E-03  3.56783E-04 -4.00779E-05  2.11455E-06
  6.200  3.41174E-02 -1.39519E-03  4.27939E-04 -7.61312E-05  1.35775E-05  6.50040E-02 -1.35537E-03  3.83369E-04 -4.52780E-05  3.03574E-06
  6.300  3.13612E-02 -1.38491E-03  4.21885E-04 -7.46417E-05  1.32761E-05  6.13286E-02 -1.42973E-03  4.05907E-04 -5.00892E-05  3.93831E-06
  6.400  2.86021E-02 -1.35853E-03  4.11513E-04 -7.25592E-05  1.28815E-05  5.74891E-02 -1.48595E-03  4.23529E-04 -5.43288E-05  4.79153E-06
  6.500  2.58776E-02 -1.31723E-03  3.97172E-04 -6.99250E-05  1.24008E-05  5.35338E-02 -1.52213E-03  4.35618E-04 -5.78461E-05  5.56776E-06
  6.600  2.32222E-02 -1.26263E-03  3.79319E-04 -6.67945E-05  1.18430E-05  4.95148E-02 -1.53737E-03  4.41827E-04 -6.05287E-05  6.24372E-06
  6.700  2.06672E-02 -1.19667E-03  3.58495E-04 -6.32354E-05  1.12190E-05  4.54851E-02 -1.53166E-03  4.42084E-04 -6.23063E-05  6.80142E-06
  6.800  1.82393E-02 -1.12153E-03  3.35300E-04 -5.93251E-05  1.05405E-05  4.14972E-02 -1.50587E-03  4.36571E-04 -6.31512E-05  7.22878E-06
  6.900  1.59602E-02 -1.03952E-03  3.10367E-04 -5.51476E-05  9.82045E-06  3.76003E-02 -1.46164E-03  4.25692E-04 -6.30767E-05  7.51975E-06
  7.000  1.38463E-02 -9.52964E-04  2.84330E-04 -5.07902E-05  9.07218E-06  3.38386E-02 -1.40119E-03  4.10040E-04 -6.21327E-05  7.67418E-06
  7.100  1.19088E-02 -8.64123E-04  2.57806E-04 -4.63404E-05  8.30902E-06  3.02505E-02 -1.32720E-03  3.90340E-04 -6.03999E-05  7.69727E-06
  7.200  1.01533E-02 -7.75105E-04  2.31366E-04 -4.18821E-05  7.54393E-06  2.68672E-02 -1.24260E-03  3.67404E-04 -5.79824E-05  7.59883E-06
  7.300  8.58118E-03 -6.87791E-04  2.05521E-04 -3.74936E-05  6.78907E-06  2.37122E-02 -1.15040E-03  3.42079E-04 -5.50003E-05  7.39231E-06
  7.400  7.18906E-03 -6.03793E-04  1.80710E-04 -3.32443E-05  6.05546E-06  2.08013E-02 -1.05359E-03  3.15207E-04 -5.15819E-05  7.09378E-06
  7.500  5.97017E-03 -5.24421E-04  1.57286E-04 -2.91937E-05  5.35267E-06  1.81433E-02 -9.54918E-04  2.87578E-04 -4.78564E-05  6.72083E-06
  7.600  4.91477E-03 -4.50668E-04  1.35521E-04 -2.53896E-05  4.68866E-06  1.57399E-02 -8.56882E-04  2.59908E-04 -4.39480E-05  6.29156E-06
  7.700  4.01097E-03 -3.83219E-04  1.15597E-04 -2.18678E-05  4.06964E-06  1.35871E-02 -7.61592E-04  2.32813E-04 -3.99706E-05  5.82372E-06
  7.800  3.24539E-03 -3.22465E-04  9.76221E-05 -1.86525E-05  3.50003E-06  1.16758E-02 -6.70764E-04  2.06801E-04 -3.60242E-05  5.33389E-06
  7.900  2.60386E-03 -2.68539E-04  8.16288E-05 -1.57563E-05  2.98252E-06  9.99317E-03 -5.85698E-04  1.82261E-04 -3.21927E-05  4.83696E-06
  8.000  2.07196E-03 -2.21344E-04  6.75895E-05 -1.31817E-05  2.51818E-06  8.52336E-03 -5.07296E-04  1.59474E-04 -2.85428E-05  4.34573E-06
  8.100  1.63557E-03 -1.80605E-04  5.54258E-05 -1.09224E-05  2.10663E-06  7.24876E-03 -4.36087E-04  1.38612E-04 -2.51238E-05  3.87066E-06
  8.200  1.28120E-03 -1.45905E-04  4.50210E-05 -8.96445E-06  1.74626E-06  6.15073E-03 -3.72281E-04  1.19761E-04 -2.19689E-05  3.41990E-06
  8.300  9.96333E-04 -1.16733E-04  3.62307E-05 -7.28872E-06  1.43442E-06  5.21040E-03 -3.15818E-04  1.02925E-04 -1.90969E-05  2.99929E-06
  8.400  7.69566E-04 -9.25172E-05  2.88942E-05 -5.87182E-06  1.16774E-06  4.40931E-03 -2.66424E-04  8.80469E-05 -1.65140E-05  2.61261E-06
  8.500  5.90752E-04 -7.26638E-05  2.28430E-05 -4.68798E-06  9.42303E-07  3.72987E-03 -2.23670E-04  7.50250E-05 -1.42163E-05  2.26179E-06
  8.600  4.51027E-04 -5.65816E-05  1.79091E-05 -3.71037E-06  7.53882E-07  3.15569E-03 -1.87019E-04  6.37237E-05 -1.21921E-05  1.94727E-06
  8.700  3.42780E-04 -4.37051E-05  1.39309E-05 -2.91222E-06  5.98152E-07  2.67180E-03 -1.55877E-04  5.39885E-05 -1.04240E-05  1.66826E-06
  8.800  2.59590E-04 -3.35105E-05  1.07576E-05 -2.26777E-06  4.70842E-07  2.26479E-03 -1.29626E-04  4.56557E-05 -8.89113E-06  1.42305E-06
  8.900  1.96123E-04 -2.55254E-05  8.25226E-06 -1.75300E-06  3.67870E-07  1.92279E-03 -1.07652E-04  3.85616E-05 -7.57052E-06  1.20933E-06
  9.000  1.48019E-04 -1.93338E-05  6.29353E-06 -1.34603E-06  2.85438E-07  1.63545E-03 -8.93730E-05  3.25479E-05 -6.43873E-06  1.02440E-06
  9.100  1.11761E-04 -1.45781E-05  4.77608E-06 -1.02743E-06  2.20099E-07  1.39387E-03 -7.42468E-05  2.74669E-05 -5.47278E-06  8.65372E-07
  9.200  8.45547E-05 -1.09568E-05  3.61034E-06 -7.80288E-07  1.68793E-07  1.19045E-03 -6.17838E-05  2.31841E-05 -4.65093E-06  7.29338E-07
  9.300  6.42073E-05 -8.22042E-06  2.72153E-06 -5.90198E-07  1.28859E-07  1.01877E-03 -5.15494E-05  1.95790E-05 -3.95316E-06  6.13489E-07
  9.400  4.90186E-05 -6.16656E-06  2.04829E-06 -4.45101E-07  9.80243E-08  8.73481E-04 -4.31642E-05  1.65462E-05 -3.36143E-06  5.15187E-07
  9.500  3.76857E-05 -4.63345E-06  1.54113E-06 -3.35080E-07  7.43853E-08  7.50104E-04 -3.63021E-05  1.39945E-05 -2.85983E-06  4.32022E-07
  9.600  2.92200E-05 -3.49392E-06  1.16071E-06 -2.52115E-07  5.63730E-08  6.44955E-04 -3.06860E-05  1.18459E-05 -2.43448E-06  3.61828E-07
  9.700  2.28782E-05 -2.64943E-06  8.76202E-07 -1.89822E-07  4.27157E-08  5.55000E-04 -2.60830E-05  1.00345E-05 -2.07346E-06  3.02695E-07
  9.800  1.81056E-05 -2.02454E-06  6.63787E-07 -1.43190E-07  3.23979E-08  4.77755E-04 -2.22993E-05  8.50498E-06 -1.76664E-06  2.52956E-07
  9.900  1.44912E-05 -1.56223E-06  5.05259E-07 -1.08340E-07  2.46203E-08  4.11190E-04 -1.91752E-05  7.21123E-06 -1.50546E-06  2.11171E-07
 10.000  1.17314E-05 -1.21972E-06  3.86849E-07 -8.23043E-08  1.87624E-08  3.53648E-04 -1.65798E-05  6.11491E-06 -1.28275E-06  1.76107E-07
 10.100  9.60319E-06 -9.65249E-07  2.98235E-07 -6.28370E-08  1.43479E-08  3.03777E-04 -1.44073E-05  5.18428E-06 -1.09253E-06  1.46713E-07
 10.200  7.94305E-06 -7.75296E-07  2.31727E-07 -4.82536E-08  1.10153E-08  2.60471E-04 -1.25724E-05  4.39304E-06 -9.29813E-07  1.22094E-07
 10.300  6.63112E-06 -6.32549E-07  1.81624E-07 -3.72987E-08  8.49265E-09  2.22821E-04 -1.10074E-05  3.71942E-06 -7.90438E-07  1.01494E-07
 10.400  5.57977E-06 -5.24280E-07  1.43707E-07 -2.90414E-08  6.57653E-09  1.90076E-04 -9.65866E-06  3.14536E-06 -6.70949E-07  8.42728E-08
 10.500  4.72487E-06 -4.41147E-07  1.14858E-07 -2.27928E-08  5.11562E-09  1.61610E-04 -8.48467E-06  2.65582E-06 -5.68456E-07  6.98904E-08
 10.600  4.01959E-06 -3.76302E-07  9.27682E-08 -1.80431E-08  3.99746E-09  1.36894E-04 -7.45326E-06  2.23828E-06 -4.80538E-07  5.78901E-08
 10.700  3.42975E-06 -3.24740E-07  7.57246E-08 -1.44145E-08  3.13846E-09  1.15479E-04 -6.53999E-06  1.88220E-06 -4.05157E-07  4.78867E-08
 10.800  2.93039E-06 -2.82817E-07  6.24539E-08 -1.16262E-08  2.47622E-09  9.69758E-05 -5.72639E-06  1.57875E-06 -3.40588E-07  3.95557E-08
 10.900  2.50330E-06 -2.47907E-07  5.20080E-08 -9.46863E-09  1.96397E-09  8.10433E-05 -4.99863E-06  1.32041E-06 -2.85364E-07  3.26238E-08
 11.000  2.13515E-06 -2.18136E-07  4.36811E-08 -7.78507E-09  1.56640E-09  6.73809E-05 -4.34634E-06  1.10084E-06 -2.38226E-07  2.68615E-08
 11.100  1.81613E-06 -1.92195E-07  3.69487E-08 -6.45809E-09  1.25672E-09  5.57194E-05 -3.76168E-06  9.14588E-07 -1.98092E-07  2.20760E-08
 11.200  1.53891E-06 -1.69189E-07  3.14227E-08 -5.39976E-09  1.01447E-09  4.58169E-05 -3.23857E-06  7.56986E-07 -1.64025E-07  1.81056E-08
 11.300  1.29791E-06 -1.48521E-07  2.68179E-08 -4.54445E-09  8.23988E-10  3.74546E-05 -2.77209E-06  6.24013E-07 -1.35206E-07  1.48152E-08
 11.400  1.08871E-06 -1.29812E-07  2.29263E-08 -3.84339E-09  6.73264E-10  3.04347E-05 -2.35804E-06  5.12191E-07 -1.10923E-07  1.20918E-08
 11.500  9.07736E-07 -1.12823E-07  1.95973E-08 -3.26065E-09  5.53103E-10  2.45783E-05 -1.99263E-06  4.18502E-07 -9.05496E-08  9.84112E-09
 11.600  7.51915E-07 -9.74113E-08  1.67227E-08 -2.76992E-09  4.56484E-10  1.97241E-05 -1.67228E-06  3.40326E-07 -7.35360E-08  7.98427E-09
 11.700  6.18545E-07 -8.34868E-08  1.42247E-08 -2.35207E-09  3.78075E-10  1.57274E-05 -1.39346E-06  2.75382E-07 -5.93993E-08  6.45554E-09
 11.800  5.05168E-07 -7.09867E-08  1.20468E-08 -1.99327E-09  3.13848E-10  1.24593E-05 -1.15267E-06  2.21685E-07 -4.77152E-08  5.19999E-09
 11.900  4.09506E-07 -5.98559E-08  1.01475E-08 -1.68350E-09  2.60770E-10  9.80570E-06 -9.46410E-07  1.77510E-07 -3.81119E-08  4.17171E-09
 12.000  3.29435E-07 -5.00362E-08  8.49469E-09 -1.41537E-09  2.16572E-10  7.66623E-06 -7.71211E-07  1.41361E-07 -3.02647E-08  3.33225E-09
 12.100  2.62974E-07 -4.14597E-08  7.06246E-09 -1.18335E-09  1.79549E-10  5.95368E-06 -6.23672E-07  1.11942E-07 -2.38910E-08  2.64943E-09
 12.200  2.08283E-07 -3.40473E-08  5.82866E-09 -9.83109E-10  1.48412E-10  4.59276E-06 -5.00504E-07  8.81375E-08 -1.87461E-08  2.09625E-09
 12.300  1.63671E-07 -2.77097E-08  4.77335E-09 -8.11075E-10  1.22180E-10  3.51914E-06 -3.98581E-07  6.89901E-08 -1.46194E-08  1.65007E-09
 12.400  1.27602E-07 -2.23495E-08  3.87795E-09 -6.64179E-10  1.00086E-10  2.67835E-06 -3.14977E-07  5.36819E-08 -1.13307E-08  1.29191E-09
 12.500  9.86988E-08 -1.78650E-08  3.12480E-09 -5.39659E-10  8.15181E-11  2.02470E-06 -2.47000E-07  4.15190E-08 -8.72712E-09  1.00588E-09
 12.600  7.57427E-08 -1.41534E-08  2.49707E-09 -4.34962E-10  6.59728E-11  1.52026E-06 -1.92211E-07  3.19165E-08 -6.67958E-09  7.78689E-10
 12.700  5.76712E-08 -1.11140E-08  1.97878E-09 -3.47702E-10  5.30259E-11  1.13381E-06 -1.48435E-07  2.43839E-08 -5.08013E-09  5.99263E-10
 12.800  4.35696E-08 -8.65099E-09  1.55492E-09 -2.75636E-10  4.23110E-11  8.39906E-07 -1.13758E-07  1.85135E-08 -3.83917E-09  4.58401E-10
 12.900  3.26615E-08 -6.67559E-09  1.21161E-09 -2.16677E-10  3.35067E-11  6.18009E-07 -8.65232E-08  1.39686E-08 -2.88288E-09  3.48496E-10
 13.000  2.42964E-08 -5.10720E-09  9.36219E-10 -1.68900E-10  2.63285E-11  4.51689E-07 -6.53143E-08  1.04733E-08 -2.15098E-09  2.63287E-10
 13.100  1.79360E-08 -3.87428E-09  7.17411E-10 -1.30554E-10  2.05245E-11  3.27924E-07 -4.89360E-08  7.80300E-09 -1.59465E-09  1.97654E-10
 13.200  1.31406E-08 -2.91446E-09  5.45206E-10 -1.00071E-10  1.58719E-11  2.36486E-07 -3.63928E-08  5.77673E-09 -1.17466E-09  1.47433E-10
 13.300  9.55512E-09 -2.17435E-09  4.10947E-10 -7.60691E-11  1.21749E-11  1.69412E-07 -2.68652E-08  4.24949E-09 -8.59764E-10  1.09263E-10
 13.400  6.89638E-09 -1.60898E-09  3.07238E-10 -5.73477E-11  9.26358E-12  1.20560E-07 -1.96868E-08  3.10613E-09 -6.25273E-10  8.04502E-11
 13.500  4.94081E-09 -1.18105E-09  2.27858E-10 -4.28809E-11  6.99144E-12  8.52306E-08 -1.43217E-08  2.25594E-09 -4.51845E-10  5.88489E-11
 13.600  3.51395E-09 -8.60044E-10  1.67645E-10 -3.18044E-11  5.23407E-12  5.98590E-08 -1.03435E-08  1.62802E-09 -3.24448E-10  4.27661E-11
 13.700  2.48108E-09 -6.21376E-10  1.22374E-10 -2.34004E-11  3.88702E-12  4.17656E-08 -7.41692E-09  1.16739E-09 -2.31496E-10  3.08749E-11
 13.800  1.73926E-09 -4.45460E-10  8.86329E-11 -1.70808E-11  2.86365E-12  2.89519E-08 -5.28057E-09  8.31758E-10 -1.64132E-10  2.21439E-11
 13.900  1.21059E-09 -3.16902E-10  6.37013E-11 -1.23703E-11  2.09303E-12  1.99396E-08 -3.73305E-09  5.88850E-10 -1.15639E-10  1.57777E-11
 14.000  8.36679E-10 -2.23739E-10  4.54344E-11 -8.88947E-12  1.51780E-12  1.36442E-08 -2.62056E-09  4.14231E-10 -8.09633E-11  1.11682E-11
 14.100  5.74226E-10 -1.56782E-10  3.21617E-11 -6.33922E-12  1.09211E-12  9.27661E-09 -1.82681E-09  2.89545E-10 -5.63318E-11  7.85365E-12
 14.200  3.91375E-10 -1.09050E-10  2.25968E-11 -4.48639E-12  7.79762E-13  6.26687E-09 -1.26469E-09  2.01107E-10 -3.89504E-11  5.48681E-12
 14.300  2.64921E-10 -7.52947E-11  1.57595E-11 -3.15133E-12  5.52507E-13  4.20674E-09 -8.69539E-10  1.38798E-10 -2.67655E-11  3.80834E-12
 14.400  1.78105E-10 -5.16113E-11  1.09108E-11 -2.19717E-12  3.88531E-13  2.80600E-09 -5.93782E-10  9.51899E-11 -1.82791E-11  2.62620E-12
 14.500  1.18931E-10 -3.51238E-11  7.49934E-12 -1.52069E-12  2.71182E-13  1.85990E-09 -4.02735E-10  6.48716E-11 -1.24068E-11  1.79932E-12
 14.600  7.88866E-11 -2.37336E-11  5.11769E-12 -1.04486E-12  1.87877E-13  1.22508E-09 -2.71323E-10  4.39322E-11 -8.36963E-12  1.22487E-12
 14.700  5.19778E-11 -1.59244E-11  3.46767E-12 -7.12773E-13  1.29210E-13  8.01908E-10 -1.81571E-10  2.95653E-11 -5.61180E-12  8.28483E-13
 14.800  3.40222E-11 -1.06103E-11  2.33316E-12 -4.82779E-13  8.82195E-14  5.21655E-10 -1.20704E-10  1.97724E-11 -3.73990E-12  5.56804E-13
 14.900  2.21237E-11 -7.02077E-12  1.55891E-12 -3.24698E-13  5.98007E-14  3.37251E-10 -7.97122E-11  1.31408E-11 -2.47738E-12  3.71844E-13
 15.000  1.42931E-11 -4.61384E-12  1.03442E-12 -2.16859E-13  4.02488E-14  2.16694E-10 -5.22973E-11  8.67922E-12 -1.63120E-12  2.46758E-13
 15.100  9.17464E-12 -3.01152E-12  6.81701E-13 -1.43836E-13  2.68989E-14  1.38381E-10 -3.40880E-11  5.69692E-12 -1.06763E-12  1.62723E-13
 15.200  5.85145E-12 -1.95245E-12  4.46211E-13 -9.47494E-14  1.78517E-14  8.78319E-11 -2.20753E-11  3.71629E-12 -6.94606E-13  1.06637E-13
 15.300  3.70825E-12 -1.25739E-12  2.90108E-13 -6.19916E-14  1.17656E-14  5.54100E-11 -1.42041E-11  2.40934E-12 -4.49235E-13  6.94484E-14
 15.400  2.33520E-12 -8.04405E-13  1.87359E-13 -4.02867E-14  7.70139E-15  3.47452E-11 -9.08113E-12  1.55243E-12 -2.88826E-13  4.49496E-14
 15.500  1.46132E-12 -5.11235E-13  1.20201E-13 -2.60067E-14  5.00688E-15  2.16563E-11 -5.76898E-12  9.94168E-13 -1.84602E-13  2.89144E-14
 15.600  9.08770E-13 -3.22795E-13  7.66093E-14 -1.66775E-14  3.23322E-15  1.34173E-11 -3.64172E-12  6.32778E-13 -1.17296E-13  1.84858E-14
 15.700  5.61646E-13 -2.02495E-13  4.85084E-14 -1.06247E-14  2.07394E-15  8.26331E-12 -2.28443E-12  4.00307E-13 -7.40948E-14  1.17467E-14
 15.800  3.44976E-13 -1.26213E-13  3.05164E-14 -6.72458E-15  1.32152E-15  5.05891E-12 -1.42406E-12  2.51707E-13 -4.65325E-14  7.41925E-15
 15.900  2.10596E-13 -7.81656E-14  1.90743E-14 -4.22863E-15  8.36551E-16  3.07883E-12 -8.82214E-13  1.57313E-13 -2.90536E-14  4.65782E-15
 16.000  1.27779E-13 -4.81023E-14  1.18464E-14 -2.64204E-15  5.26105E-16  1.86273E-12 -5.43157E-13  9.77259E-14 -1.80355E-14  2.90668E-15
 16.100  7.70601E-14 -2.94153E-14  7.31071E-15 -1.64022E-15  3.28727E-16  1.12037E-12 -3.32351E-13  6.03446E-14 -1.11313E-14  1.80310E-15
 16.200  4.61933E-14 -1.78753E-14  4.48320E-15 -1.01183E-15  2.04080E-16  6.69929E-13 -2.02117E-13  3.70390E-14 -6.83068E-15  1.11188E-15
 16.300  2.75245E-14 -1.07951E-14  2.73205E-15 -6.20261E-16  1.25889E-16  3.98256E-13 -1.22168E-13  2.25986E-14 -4.16762E-15  6.81602E-16
 16.400  1.63029E-14 -6.47898E-15  1.65454E-15 -3.77850E-16  7.71648E-17  2.35381E-13 -7.33953E-14  1.37060E-14 -2.52830E-15  4.15380E-16
 16.500  9.59905E-15 -3.86464E-15  9.95792E-16 -2.28749E-16  4.70012E-17  1.38314E-13 -4.38280E-14  8.26332E-15 -1.52507E-15  2.51662E-16
 16.600  5.61852E-15 -2.29113E-15  5.95635E-16 -1.37629E-16  2.84497E-17  8.08084E-14 -2.60147E-14  4.95249E-15 -9.14701E-16  1.51585E-16
 16.700  3.26933E-15 -1.35003E-15  3.54099E-16 -8.22972E-17  1.71135E-17  4.69406E-14 -1.53491E-14  2.95069E-15 -5.45512E-16  9.07766E-17
 16.800  1.89126E-15 -7.90684E-16  2.09227E-16 -4.89107E-17  1.02309E-17  2.71115E-14 -9.00226E-15  1.74769E-15 -3.23498E-16  5.40483E-17
 16.900  1.08770E-15 -4.60302E-16  1.22878E-16 -2.88920E-17  6.07876E-18  1.55697E-14 -5.24854E-15  1.02908E-15 -1.90760E-16  3.19957E-17
 17.000  6.21932E-16 -2.66365E-16  7.17303E-17 -1.69637E-17  3.58970E-18  8.89065E-15 -3.04196E-15  6.02407E-16 -1.11855E-16  1.88327E-17
 17.100  3.53563E-16 -1.53221E-16  4.16218E-17 -9.90032E-18  2.10697E-18  5.04808E-15 -1.75270E-15  3.50584E-16 -6.52207E-17  1.10219E-17
 17.200  1.99843E-16 -8.76148E-17  2.40071E-17 -5.74346E-18  1.22923E-18  2.85013E-15 -1.00395E-15  2.02845E-16 -3.78164E-17  6.41400E-18
 17.300  1.12311E-16 -4.98045E-17  1.37648E-17 -3.31213E-18  7.12836E-19  1.60013E-15 -5.71707E-16  1.16684E-16 -2.18045E-17  3.71146E-18
 17.400  6.27585E-17 -2.81451E-17  7.84560E-18 -1.89872E-18  4.10910E-19  8.93323E-16 -3.23672E-16  6.67332E-17 -1.25022E-17  2.13555E-18
 17.500  3.48701E-17 -1.58122E-17  4.44547E-18 -1.08206E-18  2.35459E-19  4.95942E-16 -1.82186E-16  3.79458E-17 -7.12869E-18  1.22190E-18
 17.600  1.92651E-17 -8.83172E-18  2.50413E-18 -6.13032E-19  1.34125E-19  2.73797E-16 -1.01956E-16  2.14527E-17 -4.04220E-18  6.95231E-19
 17.700  1.05837E-17 -4.90428E-18  1.40234E-18 -3.45280E-19  7.59521E-20  1.50318E-16 -5.67293E-17  1.20588E-17 -2.27938E-18  3.93368E-19
 17.800  5.78181E-18 -2.70765E-18  7.80762E-19 -1.93343E-19  4.27581E-20  8.20701E-17 -3.13840E-17  6.73970E-18 -1.27824E-18  2.21337E-19
 17.900  3.14089E-18 -1.48630E-18  4.32177E-19 -1.07637E-19  2.39308E-20  4.45612E-17 -1.72633E-17  3.74535E-18 -7.12865E-19  1.23851E-19
 18.000  1.69675E-18 -8.11200E-19  2.37845E-19 -5.95772E-20  1.33158E-20  2.40621E-17 -9.44195E-18  2.06952E-18 -3.95372E-19  6.89205E-20
 18.100  9.11515E-19 -4.40215E-19  1.30144E-19 -3.27867E-20  7.36644E-21  1.29217E-17 -5.13489E-18  1.13705E-18 -2.18079E-19  3.81419E-20
 18.200  4.86969E-19 -2.37535E-19  7.08046E-20 -1.79399E-20  4.05173E-21  6.90125E-18 -2.77677E-18  6.21189E-19 -1.19628E-19  2.09928E-20
 18.300  2.58724E-19 -1.27446E-19  3.83014E-20 -9.76023E-21  2.21578E-21  3.66571E-18 -1.49313E-18  3.37453E-19 -6.52634E-20  1.14911E-20
 18.400  1.36703E-19 -6.79938E-20  2.06013E-20 -5.27988E-21  1.20482E-21  1.93652E-18 -7.98378E-19  1.82286E-19 -3.54100E-20  6.25572E-21
 18.500  7.18346E-20 -3.60715E-20  1.10181E-20 -2.84002E-21  6.51392E-22  1.01747E-18 -4.24505E-19  9.79150E-20 -1.91077E-20  3.38710E-21
 18.600  3.75414E-20 -1.90292E-20  5.85952E-21 -1.51901E-21  3.50180E-22  5.31696E-19 -2.24454E-19  5.23008E-20 -1.02546E-20  1.82397E-21
 18.700  1.95126E-20 -9.98263E-21  3.09862E-21 -8.07889E-22  1.87189E-22  2.76348E-19 -1.18018E-19  2.77802E-20 -5.47342E-21  9.76906E-22
 18.800  1.00868E-20 -5.20771E-21  1.62942E-21 -4.27268E-22  9.94985E-23  1.42858E-19 -6.17100E-20  1.46736E-20 -2.90560E-21  5.20403E-22
 18.900  5.18605E-21 -2.70168E-21  8.52047E-22 -2.24706E-22  5.25908E-23  7.34535E-20 -3.20888E-20  7.70759E-21 -1.53409E-21  2.75729E-22
 19.000  2.65196E-21 -1.39385E-21  4.43066E-22 -1.17517E-22  2.76419E-23  3.75654E-20 -1.65939E-20  4.02612E-21 -8.05582E-22  1.45307E-22
 19.100  1.34881E-21 -7.15146E-22  2.29115E-22 -6.11183E-23  1.44477E-23  1.91089E-20 -8.53397E-21  2.09144E-21 -4.20741E-22  7.61653E-23
 19.200  6.82337E-22 -3.64907E-22  1.17823E-22 -3.16103E-23  7.50948E-24  9.66856E-21 -4.36479E-21  1.08045E-21 -2.18559E-22  3.97099E-23
 19.300  3.43331E-22 -1.85176E-22  6.02558E-23 -1.62585E-23  3.88159E-24  4.86598E-21 -2.22021E-21  5.55090E-22 -1.12921E-22  2.05929E-23
 19.400  1.71831E-22 -9.34563E-23  3.06458E-23 -8.31641E-24  1.99528E-24  2.43594E-21 -1.12318E-21  2.83617E-22 -5.80280E-23  1.06222E-23
 19.500  8.55397E-23 -4.69095E-23  1.55008E-23 -4.23058E-24  1.02000E-24  1.21299E-21 -5.65113E-22  1.44117E-22 -2.96592E-23  5.45001E-24
 19.600  4.23565E-23 -2.34179E-23  7.79742E-24 -2.14032E-24  5.18570E-25  6.00821E-22 -2.82785E-22  7.28309E-23 -1.50780E-23  2.78143E-24
 19.700  2.08624E-23 -1.16272E-23  3.90096E-24 -1.07691E-24  2.62198E-25  2.96031E-22 -1.40741E-22  3.66051E-23 -7.62421E-24  1.41199E-24
 19.800  1.02212E-23 -5.74183E-24  1.94097E-24 -5.38898E-25  1.31848E-25  1.45090E-22 -6.96681E-23  1.82977E-23 -3.83455E-24  7.13002E-25
 19.900  4.98132E-24 -2.82020E-24  9.60512E-25 -2.68206E-25  6.59401E-26  7.07375E-23 -3.43005E-23  9.09675E-24 -1.91825E-24  3.58138E-25
  67 196 200   0.100
  0.000  4.97797E-02 -2.56011E-16 -3.74700E-16 -5.75426E-16  4.21994E-16  9.03365E-02 -4.49959E-16 -6.86950E-16 -9.63214E-16 -2.38892E-15
  0.100  4.97813E-02 -1.26583E-05  9.91549E-10  1.20040E-12 -1.48771E-15  9.05045E-02  3.41483E-06  5.36993E-09 -3.36008E-12 -8.86904E-16
  0.200  4.97879E-02 -5.00492E-05  1.61093E-08  7.62018E-11  4.29147E-16  9.09999E-02  1.36548E-05  8.43268E-08 -2.13308E-10 -2.33885E-14
  0.300  4.98045E-02 -1.10443E-04  8.35528E-08  8.56498E-10  3.50184E-14  9.17974E-02  3.06931E-05  4.13742E-07 -2.38985E-09 -1.00892E-12
  0.400  4.98387E-02 -1.91029E-04  2.72504E-07  4.72329E-09  3.29621E-13  9.28566E-02  5.44420E-05  1.25114E-06 -1.31215E-08 -9.69943E-12
  0.500  4.99007E-02 -2.88028E-04  6.90107E-07  1.75893E-08  1.71771E-12  9.41241E-02  8.46956E-05  2.88435E-06 -4.85918E-08 -5.52349E-11
  0.600  5.00017E-02 -3.96837E-04  1.48883E-06  5.09944E-08  6.16159E-12  9.55363E-02  1.21061E-04  5.57122E-06 -1.39926E-07 -2.24379E-10
  0.700  5.01533E-02 -5.12209E-04  2.87220E-06  1.24168E-07  1.64715E-11  9.70235E-02  1.62888E-04  9.47795E-06 -3.38024E-07 -7.19825E-10
  0.800  5.03662E-02 -6.28468E-04  5.09686E-06  2.65685E-07  3.34142E-11  9.85134E-02  2.09214E-04  1.46249E-05 -7.16768E-07 -1.93575E-09
  0.900  5.06495E-02 -7.39734E-04  8.46910E-06  5.14349E-07  4.71126E-11  9.99352E-02  2.58722E-04  2.08477E-05 -1.37363E-06 -4.53641E-09
  1.000  5.10094E-02 -8.40169E-04  1.33346E-05  9.19007E-07  1.90304E-11  1.01224E-01  3.09736E-04  2.77794E-05 -2.42697E-06 -9.50832E-09
  1.100  5.14486E-02 -9.24222E-04  2.00611E-05  1.53708E-06 -1.49436E-10  1.02322E-01  3.60253E-04  3.48581E-05 -4.00977E-06 -1.81530E-08
  1.200  5.19658E-02 -9.86868E-04  2.90134E-05  2.43176E-06 -6.64580E-10  1.03188E-01  4.08008E-04  4.13585E-05 -6.25979E-06 -3.19820E-08
  1.300  5.25554E-02 -1.02383E-03  4.05238E-05  3.66790E-06 -1.90502E-09  1.03790E-01  4.50587E-04  4.64475E-05 -9.30687E-06 -5.24870E-08
  1.400  5.32076E-02 -1.03178E-03  5.48582E-05  5.30685E-06 -4.50003E-09  1.04115E-01  4.85568E-04  4.92569E-05 -1.32581E-05 -8.07647E-08
  1.500  5.39082E-02 -1.00848E-03  7.21823E-05  7.40063E-06 -9.41453E-09  1.04166E-01  5.10693E-04  4.89669E-05 -1.81823E-05 -1.17007E-07
  1.600  5.46401E-02 -9.52945E-04  9.25292E-05  9.98588E-06 -1.80282E-08  1.03961E-01  5.24054E-04  4.48937E-05 -2.40946E-05 -1.59888E-07
  1.700  5.53833E-02 -8.65444E-04  1.15774E-04  1.30780E-05 -3.21921E-08  1.03532E-01  5.24278E-04  3.65722E-05 -3.09436E-05 -2.05897E-07
  1.800  5.61163E-02 -7.47566E-04  1.41618E-04  1.66665E-05 -5.42441E-08  1.02923E-01  5.10704E-04  2.38266E-05 -3.86008E-05 -2.48704E-07
  1.900  5.68169E-02 -6.02154E-04  1.69580E-04  2.07113E-05 -8.69618E-08  1.02187E-01  4.83526E-04  6.82412E-06 -4.68548E-05 -2.78635E-07
  2.000  5.74637E-02 -4.33208E-04  1.99005E-04  2.51411E-05 -1.33436E-07  1.01380E-01  4.43892E-04 -1.38948E-05 -5.54105E-05 -2.82357E-07
  2.100  5.80372E-02 -2.45738E-04  2.29081E-04  2.98540E-05 -1.96855E-07  1.00560E-01  3.93944E-04 -3.74102E-05 -6.38933E-05 -2.42837E-07
  2.200  5.85202E-02 -4.55657E-05  2.58874E-04  3.47198E-05 -2.80186E-07  9.97843E-02  3.36788E-04 -6.24429E-05 -7.18595E-05 -1.39649E-07
  2.300  5.88997E-02  1.60912E-04  2.87366E-04  3.95853E-05 -3.85779E-07  9.91000E-02  2.76393E-04 -8.74004E-05 -7.88112E-05  5.03615E-08
  2.400  5.91667E-02  3.66983E-04  3.13506E-04  4.42806E-05 -5.14883E-07  9.85472E-02  2.17405E-04 -1.10446E-04 -8.42178E-05  3.52042E-07
  2.500  5.93169E-02  5.65903E-04  3.36260E-04  4.86277E-05 -6.67133E-07  9.81535E-02  1.64903E-04 -1.29590E-04 -8.75394E-05  7.90587E-07
  2.600  5.93512E-02  7.51173E-04  3.54670E-04  5.24493E-05 -8.40026E-07  9.79333E-02  1.24086E-04 -1.42796E-04 -8.82559E-05  1.38992E-06
  2.700  5.92750E-02  9.16821E-04  3.67903E-04  5.55788E-05 -1.02843E-06  9.78875E-02  9.99225E-05 -1.48100E-04 -8.58962E-05  2.17093E-06
  2.800  5.90985E-02  1.05765E-03  3.75296E-04  5.78693E-05 -1.22418E-06  9.80039E-02  9.67880E-05 -1.43738E-04 -8.00691E-05  3.14962E-06
  2.900  5.88358E-02  1.16946E-03  3.76396E-04  5.92026E-05 -1.41581E-06  9.82584E-02  1.18105E-04 -1.28269E-04 -7.04937E-05  4.33531E-06
  3.000  5.85040E-02  1.24922E-03  3.70987E-04  5.94960E-05 -1.58841E-06  9.86174E-02  1.66027E-04 -1.00697E-04 -5.70263E-05  5.72900E-06
  3.100  5.81228E-02  1.29521E-03  3.59104E-04  5.87085E-05 -1.72371E-06  9.90404E-02  2.41182E-04 -6.05731E-05 -3.96841E-05  7.32193E-06
  3.200  5.77132E-02  1.30709E-03  3.41043E-04  5.68438E-05 -1.80034E-06  9.94832E-02  3.42515E-04 -8.07916E-06 -1.86627E-05  9.09450E-06
  3.300  5.72965E-02  1.28587E-03  3.17352E-04  5.39524E-05 -1.79424E-06  9.99012E-02  4.67237E-04  5.59229E-05  5.65481E-06  1.10155E-05
  3.400  5.68931E-02  1.23394E-03  2.88818E-04  5.01307E-05 -1.67927E-06  1.00252E-01  6.10894E-04  1.29876E-04  3.26968E-05  1.30420E-05
  3.500  5.65219E-02  1.15488E-03  2.56441E-04  4.55192E-05 -1.42799E-06  1.00500E-01  7.67567E-04  2.11560E-04  6.17142E-05  1.51193E-05
  3.600  5.61989E-02  1.05339E-03  2.21401E-04  4.02981E-05 -1.01241E-06  1.00615E-01  9.30189E-04  2.98164E-04  9.18012E-05  1.71820E-05
  3.700  5.59366E-02  9.35022E-04  1.85026E-04  3.46818E-05 -4.04938E-07  1.00578E-01  1.09096E-03  3.86414E-04  1.21930E-04  1.91557E-05
  3.800  5.57433E-02  8.05996E-04  1.48745E-04  2.89124E-05  4.20802E-07  1.00378E-01  1.24187E-03  4.72736E-04  1.50992E-04  2.09584E-05
  3.900  5.56225E-02  6.72915E-04  1.14045E-04  2.32520E-05  1.48909E-06  1.00017E-01  1.37518E-03  5.53459E-04  1.77855E-04  2.25043E-05
  4.000  5.55725E-02  5.42513E-04  8.24240E-05  1.79748E-05  2.82137E-06  9.95031E-02  1.48406E-03  6.25047E-04  2.01423E-04  2.37070E-05
  4.100  5.55865E-02  4.21375E-04  5.53413E-05  1.33580E-05  4.43549E-06  9.88527E-02  1.56300E-03  6.84328E-04  2.20697E-04  2.44839E-05
  4.200  5.56522E-02  3.15678E-04  3.41693E-05  9.67385E-06  6.34517E-06  9.80879E-02  1.60836E-03  7.28731E-04  2.34844E-04  2.47617E-05
  4.300  5.57526E-02  2.30948E-04  2.01450E-05  7.17978E-06  8.55940E-06  9.72335E-02  1.61858E-03  7.56485E-04  2.43249E-04  2.44814E-05
  4.400  5.58659E-02  1.71846E-04  1.43233E-05  6.11031E-06  1.10820E-05  9.63146E-02  1.59446E-03  7.66780E-04  2.45573E-04  2.36043E-05
  4.500  5.59667E-02  1.41987E-04  1.75331E-05  6.66817E-06  1.39111E-05  9.53536E-02  1.53914E-03  7.59864E-04  2.41781E-04  2.21173E-05
  4.600  5.60267E-02  1.43804E-04  3.03388E-05  9.01625E-06  1.70390E-05  9.43683E-02  1.45796E-03  7.37075E-04  2.32163E-04  2.00378E-05
  4.700  5.60154E-02  1.78462E-04  5.30069E-05  1.32700E-05  2.04514E-05  9.33698E-02  1.35815E-03  7.00784E-04  2.17333E-04  1.74169E-05
  4.800  5.59019E-02  2.45813E-04  8.54821E-05  1.94906E-05  2.41271E-05  9.23608E-02  1.24838E-03  6.54267E-04  1.98200E-04  1.43410E-05
  4.900  5.56557E-02  3.44413E-04  1.27372E-04  2.76799E-05  2.80381E-05  9.13355E-02  1.13820E-03  6.01508E-04  1.75928E-04  1.09320E-05
  5.000  5.52479E-02  4.71585E-04  1.77947E-04  3.77761E-05  3.21486E-05  9.02792E-02  1.03737E-03  5.46934E-04  1.51872E-04  7.34380E-06
  5.100  5.46530E-02  6.23532E-04  2.36148E-04  4.96517E-05  3.64154E-05  8.91693E-02  9.55229E-04  4.95120E-04  1.27499E-04  3.75666E-06
  5.200  5.38497E-02  7.95494E-04  3.00613E-04  6.31138E-05  4.07875E-05  8.79768E-02  9.00013E-04  4.50478E-04  1.04298E-04  3.69443E-07
  5.300  5.28219E-02  9.81944E-04  3.69718E-04  7.79070E-05  4.52066E-05  8.66683E-02  8.78299E-04  4.16947E-04  8.36959E-05 -2.61102E-06
  5.400  5.15599E-02  1.17682E-03  4.41628E-04  9.37185E-05  4.96077E-05  8.52081E-02  8.94548E-04  3.97728E-04  6.69632E-05 -4.98176E-06
  5.500  5.00606E-02  1.37376E-03  5.14361E-04  1.10186E-04  5.39197E-05  8.35614E-02  9.50795E-04  3.95064E-04  5.51400E-05 -6.55644E-06
  5.600  4.83281E-02  1.56638E-03  5.85866E-04  1.26910E-04  5.80671E-05  8.16965E-02  1.04652E-03  4.10098E-04  4.89736E-05 -7.17788E-06
  5.700  4.63738E-02  1.74851E-03  6.54098E-04  1.43465E-04  6.19716E-05  7.95874E-02  1.17871E-03  4.42807E-04  4.88760E-05 -6.72947E-06
  5.800  4.42154E-02  1.91444E-03  7.17100E-04  1.59417E-04  6.55542E-05  7.72158E-02  1.34206E-03  4.92031E-04  5.49055E-05 -5.14440E-06
  5.900  4.18773E-02  2.05917E-03  7.73085E-04  1.74336E-04  6.87379E-05  7.45728E-02  1.52935E-03  5.55569E-04  6.67716E-05 -2.41189E-06
  6.000  3.93887E-02  2.17853E-03  8.20503E-04  1.87817E-04  7.14502E-05  7.16600E-02  1.73197E-03  6.30358E-04  8.38626E-05  1.42014E-06
  6.100  3.67832E-02  2.26939E-03  8.58104E-04  1.99495E-04  7.36262E-05  6.84894E-02  1.94045E-03  7.12697E-04  1.05294E-04  6.24636E-06
  6.200  3.40973E-02  2.32969E-03  8.84982E-04  2.09057E-04  7.52109E-05  6.50835E-02  2.14511E-03  7.98506E-04  1.29972E-04  1.19092E-05
  6.300  3.13687E-02  2.35851E-03  9.00607E-04  2.16259E-04  7.61623E-05  6.14741E-02  2.33661E-03  8.83602E-04  1.56669E-04  1.82073E-05
  6.400  2.86355E-02  2.35604E-03  9.04830E-04  2.20930E-04  7.64531E-05  5.77010E-02  2.50653E-03  9.63954E-04  1.84097E-04  2.49073E-05
  6.500  2.59344E-02  2.32351E-03  8.97881E-04  2.22985E-04  7.60723E-05  5.38099E-02  2.64776E-03  1.03592E-03  2.10994E-04  3.17574E-05
  6.600  2.32997E-02  2.26310E-03  8.80337E-04  2.22419E-04  7.50261E-05  4.98505E-02  2.75487E-03  1.09645E-03  2.36186E-04  3.85011E-05
  6.700  2.07621E-02  2.17774E-03  8.53084E-04  2.19313E-04  7.33382E-05  4.58740E-02  2.82429E-03  1.14320E-03  2.58649E-04  4.48921E-05
  6.800  1.83481E-02  2.07100E-03  8.17263E-04  2.13820E-04  7.10488E-05  4.19311E-02  2.85437E-03  1.17460E-03  2.77558E-04  5.07071E-05
  6.900  1.60794E-02  1.94685E-03  7.74207E-04  2.06162E-04  6.82130E-05  3.80701E-02  2.84530E-03  1.18993E-03  2.92308E-04  5.57565E-05
  7.000  1.39724E-02  1.80946E-03  7.25373E-04  1.96616E-04  6.48993E-05  3.43347E-02  2.79896E-03  1.18923E-03  3.02532E-04  5.98926E-05
  7.100  1.20383E-02  1.66307E-03  6.72278E-04  1.85497E-04  6.11862E-05  3.07631E-02  2.71864E-03  1.17322E-03  3.08094E-04  6.30149E-05
  7.200  1.02833E-02  1.51176E-03  6.16429E-04  1.73148E-04  5.71593E-05  2.73868E-02  2.60874E-03  1.14322E-03  3.09071E-04  6.50716E-05
  7.300  8.70878E-03  1.35933E-03  5.59269E-04  1.59922E-04  5.29080E-05  2.42299E-02  2.47442E-03  1.10101E-03  3.05730E-04  6.60579E-05
  7.400  7.31190E-03  1.20916E-03  5.02125E-04  1.46167E-04  4.85222E-05  2.13093E-02  2.32122E-03  1.04865E-03  2.98485E-04  6.60128E-05
  7.500  6.08632E-03  1.06417E-03  4.46173E-04  1.32214E-04  4.40891E-05  1.86348E-02  2.15477E-03  9.88363E-04  2.87862E-04  6.50121E-05
  7.600  5.02277E-03  9.26721E-04  3.92408E-04  1.18366E-04  3.96898E-05  1.62095E-02  1.98052E-03  9.22419E-04  2.74457E-04  6.31608E-05
  7.700  4.10981E-03  7.98621E-04  3.41631E-04  1.04889E-04  3.53978E-05  1.40305E-02  1.80346E-03  8.52986E-04  2.58894E-04  6.05851E-05
  7.800  3.33447E-03  6.81131E-04  2.94444E-04  9.20055E-05  3.12764E-05  1.20902E-02  1.62798E-03  7.82062E-04  2.41798E-04  5.74232E-05
  7.900  2.68297E-03  5.74999E-04  2.51257E-04  7.98942E-05  2.73778E-05  1.03767E-02  1.45777E-03  7.11403E-04  2.23758E-04  5.38173E-05
  8.000  2.14124E-03  4.80510E-04  2.12300E-04  6.86856E-05  2.37424E-05  8.87533E-03  1.29575E-03  6.42484E-04  2.05308E-04  4.99068E-05
  8.100  1.69540E-03  3.97555E-04  1.77643E-04  5.84659E-05  2.03987E-05  7.56936E-03  1.14407E-03  5.76483E-04  1.86915E-04  4.58220E-05
  8.200  1.33218E-03  3.25704E-04  1.47222E-04  4.92796E-05  1.73639E-05  6.44085E-03  1.00419E-03  5.14280E-04  1.68965E-04  4.16797E-05
  8.300  1.03920E-03  2.64282E-04  1.20862E-04  4.11348E-05  1.46446E-05  5.47149E-03  8.76899E-04  4.56475E-04  1.51764E-04  3.75803E-05
  8.400  8.05153E-04  2.12439E-04  9.83075E-05  3.40084E-05  1.22386E-05  4.64321E-03  7.62458E-04  4.03420E-04  1.35537E-04  3.36063E-05
  8.500  6.19925E-04  1.69219E-04  7.92420E-05  2.78527E-05  1.01356E-05  3.93866E-03  6.60667E-04  3.55251E-04  1.20439E-04  2.98222E-05
  8.600  4.74647E-04  1.33618E-04  6.33162E-05  2.26015E-05  8.31939E-06  3.34157E-03  5.70986E-04  3.11932E-04  1.06557E-04  2.62747E-05
  8.700  3.61675E-04  1.04633E-04  5.01655E-05  1.81760E-05  6.76909E-06  2.83702E-03  4.92626E-04  2.73292E-04  9.39272E-05  2.29948E-05
  8.800  2.74528E-04  8.12983E-05  3.94270E-05  1.44901E-05  5.46085E-06  2.41151E-03  4.24645E-04  2.39061E-04  8.25388E-05  1.99994E-05
  8.900  2.07799E-04  6.27144E-05  3.07525E-05  1.14552E-05  4.36918E-06  2.05308E-03  3.66014E-04  2.08906E-04  7.23489E-05  1.72937E-05
  9.000  1.57044E-04  4.80661E-05  2.38176E-05  8.98403E-06  3.46813E-06  1.75121E-03  3.15684E-04  1.82460E-04  6.32905E-05  1.48739E-05
  9.100  1.18663E-04  3.66320E-05  1.83281E-05  6.99325E-06  2.73226E-06  1.49684E-03  2.72625E-04  1.59342E-04  5.52809E-05  1.27288E-05
  9.200  8.97786E-05  2.77877E-05  1.40233E-05  5.40588E-06  2.13742E-06  1.28217E-03  2.35869E-04  1.39176E-04  4.82290E-05  1.08425E-05
  9.300  6.81222E-05  2.10036E-05  1.06770E-05  4.15246E-06  1.66129E-06  1.10061E-03  2.04521E-04  1.21606E-04  4.20405E-05  9.19563E-06
  9.400  5.19251E-05  1.58386E-05  8.09645E-06  3.17177E-06  1.28373E-06  9.46630E-04  1.77778E-04  1.06299E-04  3.66225E-05  7.76735E-06
  9.500  3.98242E-05  1.19320E-05  6.12075E-06  2.41095E-06  9.86951E-07  8.15590E-04  1.54929E-04  9.29570E-05  3.18866E-05  6.53605E-06
  9.600  3.07800E-05  8.99342E-06  4.61756E-06  1.82523E-06  7.55554E-07  7.03659E-04  1.35356E-04  8.13124E-05  2.77505E-05  5.48045E-06
  9.700  2.40071E-05  6.79267E-06  3.47985E-06  1.37738E-06  5.76450E-07  6.07676E-04  1.18532E-04  7.11321E-05  2.41393E-05  4.58015E-06
  9.800  1.89165E-05  5.14973E-06  2.62233E-06  1.03694E-06  4.38706E-07  5.25046E-04  1.04008E-04  6.22143E-05  2.09860E-05  3.81601E-06
  9.900  1.50696E-05  3.92564E-06  1.97792E-06  7.79379E-07  3.33339E-07  4.53645E-04  9.14080E-05  5.43862E-05  1.82312E-05  3.17041E-06
 10.000  1.21416E-05  3.01428E-06  1.49456E-06  5.85233E-07  2.53079E-07  3.91739E-04  8.04206E-05  4.75009E-05  1.58234E-05  2.62734E-06
 10.100  9.89315E-06  2.33541E-06  1.13230E-06  4.39268E-07  1.92129E-07  3.37910E-04  7.07893E-05  4.14344E-05  1.37173E-05  2.17244E-06
 10.200  8.14792E-06  1.82882E-06  8.60758E-07  3.29698E-07  1.45928E-07  2.91002E-04  6.23044E-05  3.60822E-05  1.18744E-05  1.79288E-06
 10.300  6.77668E-06  1.44959E-06  6.57028E-07  2.47509E-07  1.10930E-07  2.50065E-04  5.47958E-05  3.13560E-05  1.02610E-05  1.47738E-06
 10.400  5.68469E-06  1.16435E-06  5.03946E-07  1.85864E-07  8.44078E-08  2.14315E-04  4.81258E-05  2.71816E-05  8.84870E-06  1.21604E-06
 10.500  4.80258E-06  9.48407E-07  3.88702E-07  1.39618E-07  6.42860E-08  1.83101E-04  4.21836E-05  2.34958E-05  7.61267E-06  1.00022E-06
 10.600  4.07958E-06  7.83477E-07  3.01753E-07  1.04915E-07  4.89941E-08  1.55873E-04  3.68795E-05  2.02444E-05  6.53170E-06  8.22483E-07
 10.700  3.47861E-06  6.56060E-07  2.35989E-07  7.88753E-08  3.73515E-08  1.32165E-04  3.21412E-05  1.73808E-05  5.58744E-06  6.76417E-07
 10.800  2.97259E-06  5.56200E-07  1.86106E-07  5.93461E-08  2.84726E-08  1.11576E-04  2.79093E-05  1.48645E-05  4.76391E-06  5.56570E-07
 10.900  2.54172E-06  4.76571E-07  1.48137E-07  4.47172E-08  2.16936E-08  9.37525E-05  2.41345E-05  1.26594E-05  4.04718E-06  4.58320E-07
 11.000  2.17154E-06  4.11812E-07  1.19105E-07  3.37792E-08  1.65159E-08  7.83837E-05  2.07752E-05  1.07335E-05  3.42497E-06  3.77789E-07
 11.100  1.85143E-06  3.58031E-07  9.67716E-08  2.56198E-08  1.25631E-08  6.51903E-05  1.77951E-05  9.05787E-06  2.88644E-06  3.11743E-07
 11.200  1.57350E-06  3.12430E-07  7.94540E-08  1.95483E-08  9.54963E-09  5.39204E-05  1.51621E-05  7.60625E-06  2.42193E-06  2.57507E-07
 11.300  1.33178E-06  2.73029E-07  6.58864E-08  1.50396E-08  7.25724E-09  4.43453E-05  1.28466E-05  6.35456E-06  2.02281E-06  2.12887E-07
 11.400  1.12167E-06  2.38447E-07  5.51217E-08  1.16947E-08  5.51819E-09  3.62569E-05  1.08212E-05  5.28070E-06  1.68130E-06  1.76092E-07
 11.500  9.39453E-07  2.07744E-07  4.64549E-08  9.21042E-09  4.20289E-09  2.94657E-05  9.05995E-06  4.36434E-06  1.39044E-06  1.45672E-07
 11.600  7.82050E-07  1.80289E-07  3.93662E-08  7.35757E-09  3.21091E-09  2.37996E-05  7.53798E-06  3.58677E-06  1.14392E-06  1.20458E-07
 11.700  6.46781E-07  1.55660E-07  3.34756E-08  5.96421E-09  2.46444E-09  1.91031E-05  6.23151E-06  2.93084E-06  9.36060E-07  9.95099E-08
 11.800  5.31248E-07  1.33578E-07  2.85086E-08  4.90270E-09  1.90329E-09  1.52363E-05  5.11779E-06  2.38087E-06  7.61754E-07  8.20725E-08
 11.900  4.33253E-07  1.13844E-07  2.42686E-08  4.07960E-09  1.48115E-09  1.20744E-05  4.17518E-06  1.92262E-06  6.16413E-07  6.75394E-08
 12.000  3.50756E-07  9.63061E-08  2.06158E-08  3.42756E-09  1.16261E-09  9.50690E-06  3.38325E-06  1.54322E-06  4.95934E-07  5.54211E-08
 12.100  2.81857E-07  8.08315E-08  1.74504E-08  2.89890E-09  9.20894E-10  7.43668E-06  2.72288E-06  1.23114E-06  3.96668E-07  4.53205E-08
 12.200  2.24786E-07  6.72914E-08  1.47005E-08  2.46056E-09  7.35919E-10  5.77925E-06  2.17638E-06  9.76133E-07  3.15387E-07  3.69129E-08
 12.300  1.77910E-07  5.55521E-08  1.23128E-08  2.08999E-09  5.92811E-10  4.46176E-06  1.72757E-06  7.69148E-07  2.49253E-07  2.99302E-08
 12.400  1.39736E-07  4.54722E-08  1.02457E-08  1.77209E-09  4.80673E-10  3.42197E-06  1.36183E-06  6.02272E-07  1.95789E-07  2.41487E-08
 12.500  1.08915E-07  3.69034E-08  8.46491E-09  1.49682E-09  3.91603E-10  2.60724E-06  1.06607E-06  4.68645E-07  1.52850E-07  1.93804E-08
 12.600  8.42453E-08  2.96928E-08  6.94085E-09  1.25748E-09  3.19922E-10  1.97341E-06  8.28748E-07  3.62370E-07  1.18591E-07  1.54658E-08
 12.700  6.46684E-08  2.36866E-08  5.64639E-09  1.04941E-09  2.61565E-10  1.48385E-06  6.39788E-07  2.78426E-07  9.14382E-08  1.22687E-08
 12.800  4.92655E-08  1.87343E-08  4.55618E-09  8.69183E-10  2.13623E-10  1.10841E-06  4.90489E-07  2.12574E-07  7.00625E-08  9.67252E-09
 12.900  3.72494E-08  1.46920E-08  3.64620E-09  7.14047E-10  1.73994E-10  8.22547E-07  3.73428E-07  1.61270E-07  5.33476E-08  7.57721E-09
 13.000  2.79539E-08  1.14252E-08  2.89370E-09  5.81576E-10  1.41135E-10  6.06420E-07  2.82344E-07  1.21572E-07  4.03653E-08  5.89713E-09
 13.100  2.08228E-08  8.81089E-09  2.27733E-09  4.69497E-10  1.13881E-10  4.44170E-07  2.12009E-07  9.10655E-08  3.03502E-08  4.55911E-09
 13.200  1.53970E-08  6.73890E-09  1.77730E-09  3.75614E-10  9.13268E-11  3.23220E-07  1.58105E-07  6.77823E-08  2.26764E-08  3.50095E-09
 13.300  1.13022E-08  5.11224E-09  1.37552E-09  2.97787E-10  7.27395E-11  2.33685E-07  1.17102E-07  5.01330E-08  1.68363E-08  2.67011E-09
 13.400  8.23653E-09  3.84705E-09  1.05576E-09  2.33951E-10  5.75100E-11  1.67865E-07  8.61437E-08  3.68451E-08  1.24216E-08  2.02249E-09
 13.500  5.95955E-09  2.87198E-09  8.03693E-10  1.82146E-10  4.51188E-11  1.19812E-07  6.29418E-08  2.69087E-08  9.10694E-09  1.52141E-09
 13.600  4.28152E-09  2.12722E-09  6.06833E-10  1.40548E-10  3.51155E-11  8.49690E-08  4.56800E-08  1.95283E-08  6.63492E-09  1.13658E-09
 13.700  3.05441E-09  1.56339E-09  4.54506E-10  1.07493E-10  2.71080E-11  5.98765E-08  3.29306E-08  1.40833E-08  4.80367E-09  8.43225E-10
 13.800  2.16387E-09  1.14020E-09  3.37707E-10  8.14964E-11  2.07545E-11  4.19277E-08  2.35817E-08  1.00931E-08  3.45613E-09  6.21274E-10
 13.900  1.52243E-09  8.25273E-10  2.48948E-10  6.12566E-11  1.57588E-11  2.91749E-08  1.67753E-08  7.18826E-09  2.47113E-09  4.54594E-10
 14.000  1.06384E-09  5.92865E-10  1.82090E-10  4.56538E-11  1.18668E-11  2.01741E-08  1.18549E-08  5.08765E-09  1.75589E-09  3.30350E-10
 14.100  7.38369E-10  4.22761E-10  1.32164E-10  3.37418E-11  8.86244E-12  1.38634E-08  8.32300E-09  3.57859E-09  1.23995E-09  2.38422E-10
 14.200  5.09045E-10  2.99261E-10  9.51974E-11  2.47332E-11  6.56460E-12  9.46781E-09  5.80534E-09  2.50160E-09  8.70211E-10  1.70905E-10
 14.300  3.48620E-10  2.10310E-10  6.80557E-11  1.79833E-11  4.82312E-12  6.42613E-09  4.02309E-09  1.73798E-09  6.06972E-10  1.21678E-10
 14.400  2.37185E-10  1.46743E-10  4.82913E-11  1.29715E-11  3.51517E-12  4.33494E-09  2.77008E-09  1.20006E-09  4.20772E-10  8.60469E-11
 14.500  1.60319E-10  1.01667E-10  3.40153E-11  9.28302E-12  2.54157E-12  2.90646E-09  1.89514E-09  8.23567E-10  2.89914E-10  6.04425E-11
 14.600  1.07664E-10  6.99444E-11  2.37858E-11  6.59207E-12  1.82321E-12  1.93690E-09  1.28831E-09  5.61753E-10  1.98539E-10  4.21747E-11
 14.700  7.18407E-11  4.77875E-11  1.65133E-11  4.64551E-12  1.29774E-12  1.28300E-09  8.70262E-10  3.80848E-10  1.35142E-10  2.92334E-11
 14.800  4.76327E-11  3.24260E-11  1.13830E-11  3.24916E-12  9.16646E-13  8.44760E-10  5.84175E-10  2.56642E-10  9.14338E-11  2.01301E-11
 14.900  3.13832E-11  2.18533E-11  7.79143E-12  2.25569E-12  6.42563E-13  5.52896E-10  3.89686E-10  1.71903E-10  6.14910E-11  1.37711E-11
 15.000  2.05480E-11  1.46290E-11  5.29602E-12  1.55454E-12  4.47067E-13  3.59724E-10  2.58334E-10  1.14454E-10  4.11067E-11  9.35983E-12
 15.100  1.33703E-11  9.72784E-12  3.57506E-12  1.06359E-12  3.08754E-13  2.32662E-10  1.70199E-10  7.57488E-11  2.73163E-11  6.32063E-12
 15.200  8.64644E-12  6.42606E-12  2.39688E-12  7.22502E-13  2.11677E-13  1.49597E-10  1.11444E-10  4.98346E-11  1.80447E-11  4.24097E-12
 15.300  5.55742E-12  4.21722E-12  1.59614E-12  4.87341E-13  1.44077E-13  9.56260E-11  7.25259E-11  3.25916E-11  1.18497E-11  2.82749E-12
 15.400  3.55034E-12  2.74970E-12  1.05579E-12  3.26430E-13  9.73667E-14  6.07710E-11  4.69119E-11  2.11889E-11  7.73580E-12  1.87321E-12
 15.500  2.25448E-12  1.78133E-12  6.93746E-13  2.17142E-13  6.53370E-14  3.83969E-11  3.01605E-11  1.36947E-11  5.02056E-12  1.23321E-12
 15.600  1.42305E-12  1.14664E-12  4.52855E-13  1.43459E-13  4.35385E-14  2.41207E-11  1.92741E-11  8.79918E-12  3.23936E-12  8.06816E-13
 15.700  8.92914E-13  7.33429E-13  2.93684E-13  9.41397E-14  2.88128E-14  1.50656E-11  1.22434E-11  5.62071E-12  2.07796E-12  5.24580E-13
 15.800  5.56969E-13  4.66181E-13  1.89228E-13  6.13630E-14  1.89378E-14  9.35616E-12  7.73106E-12  3.56949E-12  1.32524E-12  3.38975E-13
 15.900  3.45383E-13  2.94468E-13  1.21144E-13  3.97336E-14  1.23633E-14  5.77747E-12  4.85281E-12  2.25371E-12  8.40314E-13  2.17700E-13
 16.000  2.12930E-13  1.84854E-13  7.70627E-14  2.55595E-14  8.01727E-15  3.54744E-12  3.02816E-12  1.41474E-12  5.29771E-13  1.38963E-13
 16.100  1.30512E-13  1.15331E-13  4.87123E-14  1.63349E-14  5.16461E-15  2.16592E-12  1.87849E-12  8.82971E-13  3.32081E-13  8.81670E-14
 16.200  7.95358E-14  7.15165E-14  3.05987E-14  1.03723E-14  3.30517E-15  1.31502E-12  1.15849E-12  5.47925E-13  2.06976E-13  5.56026E-14
 16.300  4.81930E-14  4.40788E-14  1.91011E-14  6.54416E-15  2.10145E-15  7.93945E-13  7.10309E-13  3.38070E-13  1.28269E-13  3.48563E-14
 16.400  2.90355E-14  2.70042E-14  1.18502E-14  4.10272E-15  1.32752E-15  4.76684E-13  4.32992E-13  2.07402E-13  7.90422E-14  2.17209E-14
 16.500  1.73945E-14  1.64449E-14  7.30662E-15  2.55594E-15  8.33261E-16  2.84619E-13  2.62423E-13  1.26517E-13  4.84330E-14  1.34555E-14
 16.600  1.03620E-14  9.95500E-15  4.47769E-15  1.58239E-15  5.19712E-16  1.69004E-13  1.58134E-13  7.67397E-14  2.95106E-14  8.28630E-15
 16.700  6.13824E-15  5.99073E-15  2.72743E-15  9.73594E-16  3.22113E-16  9.98028E-14  9.47465E-14  4.62847E-14  1.78804E-14  5.07311E-15
 16.800  3.61591E-15  3.58394E-15  1.65132E-15  5.95339E-16  1.98398E-16  5.86151E-14  5.64446E-14  2.77592E-14  1.07732E-14  3.08783E-15
 16.900  2.11827E-15  2.13157E-15  9.93807E-16  3.61818E-16  1.21443E-16  3.42378E-14  3.34361E-14  1.65554E-14  6.45494E-15  1.86857E-15
 17.000  1.23409E-15  1.26041E-15  5.94543E-16  2.18562E-16  7.38806E-17  1.98904E-14  1.96948E-14  9.81836E-15  3.84614E-15  1.12424E-15
 17.100  7.15024E-16  7.40980E-16  3.53581E-16  1.31230E-16  4.46716E-17  1.14928E-14  1.15356E-14  5.79049E-15  2.27904E-15  6.72524E-16
 17.200  4.12021E-16  4.33113E-16  2.09042E-16  7.83219E-17  2.68468E-17  6.60495E-15  6.71883E-15  3.39607E-15  1.34301E-15  4.00011E-16
 17.300  2.36130E-16  2.51714E-16  1.22865E-16  4.64665E-17  1.60373E-17  3.77553E-15  3.89152E-15  1.98074E-15  7.87073E-16  2.36571E-16
 17.400  1.34595E-16  1.45458E-16  7.17947E-17  2.74043E-17  9.52283E-18  2.14664E-15  2.24143E-15  1.14889E-15  4.58740E-16  1.39119E-16
 17.500  7.63060E-17  8.35804E-17  4.17095E-17  1.60670E-17  5.62096E-18  1.21402E-15  1.28388E-15  6.62730E-16  2.65914E-16  8.13506E-17
 17.600  4.30282E-17  4.77551E-17  2.40918E-17  9.36483E-18  3.29823E-18  6.82937E-16  7.31345E-16  3.80195E-16  1.53301E-16  4.73033E-17
 17.700  2.41336E-17  2.71328E-17  1.38359E-17  5.42663E-18  1.92394E-18  3.82151E-16  4.14313E-16  2.16919E-16  8.78995E-17  2.73521E-17
 17.800  1.34639E-17  1.53299E-17  7.90062E-18  3.12636E-18  1.11573E-18  2.12713E-16  2.33428E-16  1.23087E-16  5.01268E-17  1.57277E-17
 17.900  7.47163E-18  8.61327E-18  4.48583E-18  1.79076E-18  6.43269E-19  1.17779E-16  1.30798E-16  6.94647E-17  2.84317E-17  8.99352E-18
 18.000  4.12438E-18  4.81269E-18  2.53258E-18  1.01986E-18  3.68731E-19  6.48728E-17  7.28931E-17  3.89901E-17  1.60395E-17  5.11433E-18
 18.100  2.26470E-18  2.67431E-18  1.42179E-18  5.77504E-19  2.10146E-19  3.55455E-17  4.04029E-17  2.17667E-17  9.00001E-18  2.89237E-18
 18.200  1.23703E-18  1.47790E-18  7.93717E-19  3.25161E-19  1.19081E-19  1.93751E-17  2.22735E-17  1.20860E-17  5.02298E-18  1.62680E-18
 18.300  6.72164E-19  8.12277E-19  4.40624E-19  1.82045E-19  6.70935E-20  1.05061E-17  1.22130E-17  6.67471E-18  2.78839E-18  9.09987E-19
 18.400  3.63332E-19  4.44011E-19  2.43249E-19  1.01346E-19  3.75882E-20  5.66749E-18  6.66069E-18  3.66647E-18  1.53967E-18  5.06254E-19
 18.500  1.95376E-19  2.41393E-19  1.33544E-19  5.61041E-20  2.09394E-20  3.04155E-18  3.61318E-18  2.00325E-18  8.45638E-19  2.80117E-19
 18.600  1.04517E-19  1.30528E-19  7.29120E-20  3.08853E-20  1.15993E-20  1.62390E-18  1.94958E-18  1.08868E-18  4.61990E-19  1.54156E-19
 18.700  5.56235E-20  7.02011E-20  3.95897E-20  1.69078E-20  6.38940E-21  8.62567E-19  1.04635E-18  5.88505E-19  2.51060E-19  8.43786E-20
 18.800  2.94504E-20  3.75535E-20  2.13789E-20  9.20475E-21  3.49997E-21  4.55827E-19  5.58613E-19  3.16438E-19  1.35714E-19  4.59376E-20
 18.900  1.55129E-20  1.99817E-20  1.14819E-20  4.98351E-21  1.90657E-21  2.39655E-19  2.96650E-19  1.69248E-19  7.29758E-20  2.48756E-20
 19.000  8.12959E-21  1.05754E-20  6.13311E-21  2.68327E-21  1.03284E-21  1.25360E-19  1.56705E-19  9.00446E-20  3.90342E-20  1.33984E-20
 19.100  4.23864E-21  5.56745E-21  3.25830E-21  1.43685E-21  5.56442E-22  6.52415E-20  8.23453E-20  4.76540E-20  2.07696E-20  7.17824E-21
 19.200  2.19873E-21  2.91550E-21  1.72168E-21  7.65213E-22  2.98137E-22  3.37820E-20  4.30442E-20  2.50873E-20  1.09934E-20  3.82535E-21
 19.300  1.13478E-21  1.51872E-21  9.04851E-22  4.05309E-22  1.58867E-22  1.74040E-20  2.23829E-20  1.31379E-20  5.78851E-21  2.02778E-21
 19.400  5.82704E-22  7.86964E-22  4.73008E-22  2.13517E-22  8.41939E-23  8.92113E-21  1.15785E-20  6.84415E-21  3.03201E-21  1.06924E-21
 19.500  2.97708E-22  4.05652E-22  2.45944E-22  1.11873E-22  4.43777E-23  4.54992E-21  5.95836E-21  3.54685E-21  1.57991E-21  5.60836E-22
 19.600  1.51337E-22  2.08009E-22  1.27200E-22  5.83013E-23  2.32646E-23  2.30890E-21  3.05033E-21  1.82851E-21  8.18982E-22  2.92625E-22
 19.700  7.65443E-23  1.06107E-22  6.54378E-23  3.02200E-23  1.21305E-23  1.16582E-21  1.55353E-21  9.37762E-22  4.22340E-22  1.51883E-22
 19.800  3.85215E-23  5.38454E-23  3.34864E-23  1.55805E-23  6.29105E-24  5.85711E-22  7.87131E-22  4.78443E-22  2.16671E-22  7.84208E-23
 19.900  1.92894E-23  2.71832E-23  1.70456E-23  7.99005E-24  3.24516E-24  2.92798E-22  3.96769E-22  2.42838E-22  1.10584E-22  4.02797E-23
  67 197 200   0.100
  0.000  4.95713E-02 -2.63769E-16 -3.95517E-16 -2.75204E-16 -1.44479E-15  9.05820E-02 -4.80991E-16 -7.49401E-16 -5.50408E-16 -2.41753E-15
  0.100  4.95737E-02 -1.37083E-05  1.43281E-10  9.23922E-13 -1.58784E-15  9.07451E-02  2.72832E-06  5.58627E-09 -2.39794E-12 -1.24310E-14
  0.200  4.95824E-02 -5.42069E-05  2.58294E-09  5.87061E-11 -8.81897E-15  9.12262E-02  1.09766E-05  8.78665E-08 -1.51882E-10  1.43049E-16
  0.300  4.96024E-02 -1.19642E-04  1.54679E-08  6.60122E-10 -2.01456E-13  9.20009E-02  2.49154E-05  4.32292E-07 -1.70387E-09  5.55044E-13
  0.400  4.96414E-02 -2.07001E-04  5.90864E-08  3.64249E-09 -1.96632E-12  9.30300E-02  4.47666E-05  1.31237E-06 -9.36959E-09  5.77633E-12
  0.500  4.97092E-02 -3.12233E-04  1.74718E-07  1.35750E-08 -1.15773E-11  9.42618E-02  7.07175E-05  3.04119E-06 -3.47659E-08  3.38968E-11
  0.600  4.98169E-02 -4.30402E-04  4.34766E-07  3.93942E-08 -4.90809E-11  9.56351E-02  1.02817E-04  5.91278E-06 -1.00353E-07  1.42982E-10
  0.700  4.99757E-02 -5.55885E-04  9.52263E-07  9.60347E-08 -1.65564E-10  9.70821E-02  1.40866E-04  1.01410E-05 -2.43117E-07  4.80128E-10
  0.800  5.01962E-02 -6.82592E-04  1.88774E-06  2.05772E-07 -4.72076E-10  9.85329E-02  1.84315E-04  1.58037E-05 -5.17216E-07  1.36223E-09
  0.900  5.04872E-02 -8.04213E-04  3.45162E-06  3.99006E-07 -1.18270E-09  9.99189E-02  2.32189E-04  2.28008E-05 -9.94903E-07  3.39508E-09
  1.000  5.08546E-02 -9.14477E-04  5.90078E-06  7.14251E-07 -2.67308E-09  1.01177E-01  2.83042E-04  3.08299E-05 -1.76518E-06  7.63360E-09
  1.100  5.13009E-02 -1.00741E-03  9.52839E-06  1.19718E-06 -5.55345E-09  1.02252E-01  3.34967E-04  3.93863E-05 -2.92994E-06  1.57801E-08
  1.200  5.18247E-02 -1.07761E-03  1.46472E-05  1.89862E-06 -1.07525E-08  1.03102E-01  3.85645E-04  4.77851E-05 -4.59748E-06  3.04119E-08
  1.300  5.24200E-02 -1.12044E-03  2.15668E-05  2.87164E-06 -1.96051E-08  1.03698E-01  4.32454E-04  5.52068E-05 -6.87385E-06  5.52260E-08
  1.400  5.30769E-02 -1.13228E-03  3.05669E-05  4.16770E-06 -3.39327E-08  1.04027E-01  4.72624E-04  6.07613E-05 -9.85243E-06  9.52737E-08
  1.500  5.37814E-02 -1.11068E-03  4.18683E-05  5.83235E-06 -5.61042E-08  1.04090E-01  5.03429E-04  6.35642E-05 -1.36026E-05  1.57168E-07
  1.600  5.45163E-02 -1.05449E-03  5.56041E-05  7.90057E-06 -8.90590E-08  1.03905E-01  5.22411E-04  6.28196E-05 -1.81583E-05  2.49225E-07
  1.700  5.52618E-02 -9.63907E-04  7.17954E-05  1.03924E-05 -1.36277E-07  1.03504E-01  5.27605E-04  5.79026E-05 -2.35076E-05  3.81521E-07
  1.800  5.59964E-02 -8.40537E-04  9.03308E-05  1.33089E-05 -2.01680E-07  1.02929E-01  5.17763E-04  4.84323E-05 -2.95844E-05  5.65826E-07
  1.900  5.66984E-02 -6.87315E-04  1.10956E-04  1.66294E-05 -2.89448E-07  1.02230E-01  4.92547E-04  3.43321E-05 -3.62623E-05  8.15397E-07
  2.000  5.73466E-02 -5.08420E-04  1.33272E-04  2.03097E-05 -4.03743E-07  1.01464E-01  4.52672E-04  1.58707E-05 -4.33521E-05  1.14462E-06
  2.100  5.79216E-02 -3.09110E-04  1.56741E-04  2.42819E-05 -5.48349E-07  1.00686E-01  3.99988E-04 -6.31908E-06 -5.06035E-05  1.56849E-06
  2.200  5.84065E-02 -9.55267E-05  1.80709E-04  2.84559E-05 -7.26222E-07  9.99508E-02  3.37477E-04 -3.12458E-05 -5.77102E-05  2.10193E-06
  2.300  5.87884E-02  1.25557E-04  2.04430E-04  3.27221E-05 -9.38973E-07  9.93059E-02  2.69171E-04 -5.75886E-05 -6.43198E-05  2.75896E-06
  2.400  5.90582E-02  3.47008E-04  2.27098E-04  3.69565E-05 -1.18632E-06  9.87898E-02  1.99975E-04 -8.37508E-05 -7.00467E-05  3.55177E-06
  2.500  5.92117E-02  5.61627E-04  2.47893E-04  4.10254E-05 -1.46554E-06  9.84295E-02  1.35403E-04 -1.07934E-04 -7.44892E-05  4.48969E-06
  2.600  5.92494E-02  7.62449E-04  2.66015E-04  4.47928E-05 -1.77095E-06  9.82392E-02  8.12534E-05 -1.28229E-04 -7.72484E-05  5.57816E-06
  2.700  5.91766E-02  9.43029E-04  2.80731E-04  4.81264E-05 -2.09346E-06  9.82197E-02  4.32182E-05 -1.42724E-04 -7.79500E-05  6.81764E-06
  2.800  5.90030E-02  1.09772E-03  2.91409E-04  5.09052E-05 -2.42030E-06  9.83589E-02  2.64754E-05 -1.49620E-04 -7.62661E-05  8.20265E-06
  2.900  5.87422E-02  1.22189E-03  2.97555E-04  5.30254E-05 -2.73483E-06  9.86331E-02  3.52801E-05 -1.47346E-04 -7.19375E-05  9.72089E-06
  3.000  5.84111E-02  1.31215E-03  2.98838E-04  5.44063E-05 -3.01665E-06  9.90090E-02  7.25915E-05 -1.34676E-04 -6.47946E-05  1.13526E-05
  3.100  5.80287E-02  1.36645E-03  2.95111E-04  5.49950E-05 -3.24178E-06  9.94465E-02  1.39767E-04 -1.10833E-04 -5.47753E-05  1.30700E-05
  3.200  5.76157E-02  1.38422E-03  2.86422E-04  5.47696E-05 -3.38319E-06  9.99017E-02  2.36354E-04 -7.55732E-05 -4.19399E-05  1.48373E-05
  3.300  5.71931E-02  1.36634E-03  2.73018E-04  5.37412E-05 -3.41141E-06  1.00330E-01  3.59994E-04 -2.92515E-05 -2.64802E-05  1.66109E-05
  3.400  5.67813E-02  1.31512E-03  2.55342E-04  5.19549E-05 -3.29542E-06  1.00690E-01  5.06473E-04  2.71535E-05 -8.72292E-06  1.83398E-05
  3.500  5.63992E-02  1.23422E-03  2.34019E-04  4.94887E-05 -3.00357E-06  1.00943E-01  6.69895E-04  9.20453E-05  1.08740E-05  1.99672E-05
  3.600  5.60629E-02  1.12849E-03  2.09843E-04  4.64519E-05 -2.50467E-06  1.01061E-01  8.43003E-04  1.63259E-04  3.17333E-05  2.14314E-05
  3.700  5.57855E-02  1.00373E-03  1.83750E-04  4.29822E-05 -1.76908E-06  1.01024E-01  1.01761E-03  2.38152E-04  5.31777E-05  2.26687E-05
  3.800  5.55756E-02  8.66530E-04  1.56793E-04  3.92418E-05 -7.69804E-07  1.00821E-01  1.18512E-03  3.13734E-04  7.44576E-05  2.36158E-05
  3.900  5.54374E-02  7.23922E-04  1.30109E-04  3.54129E-05  5.16501E-07  1.00451E-01  1.33712E-03  3.86833E-04  9.47850E-05  2.42126E-05
  4.000  5.53700E-02  5.83142E-04  1.04884E-04  3.16924E-05  2.10857E-06  9.99238E-02  1.46595E-03  4.54282E-04  1.13374E-04  2.44066E-05
  4.100  5.53673E-02  4.51327E-04  8.23155E-05  2.82860E-05  4.01975E-06  9.92542E-02  1.56530E-03  5.13128E-04  1.29484E-04  2.41558E-05
  4.200  5.54177E-02  3.35227E-04  6.35714E-05  2.54024E-05  6.25732E-06  9.84646E-02  1.63068E-03  5.60829E-04  1.42463E-04  2.34332E-05
  4.300  5.55050E-02  2.40940E-04  4.97487E-05  2.32461E-05  8.82199E-06  9.75799E-02  1.65978E-03  5.95443E-04  1.51795E-04  2.22302E-05
  4.400  5.56081E-02  1.73668E-04  4.18318E-05  2.20110E-05  1.17075E-05  9.66254E-02  1.65275E-03  6.15784E-04  1.57129E-04  2.05600E-05
  4.500  5.57020E-02  1.37514E-04  4.06511E-05  2.18731E-05  1.49006E-05  9.56246E-02  1.61223E-03  6.21525E-04  1.58318E-04  1.84597E-05
  4.600  5.57589E-02  1.35322E-04  4.68446E-05  2.29835E-05  1.83806E-05  9.45964E-02  1.54321E-03  6.13255E-04  1.55430E-04  1.59917E-05
  4.700  5.57485E-02  1.68566E-04  6.08232E-05  2.54615E-05  2.21197E-05  9.35532E-02  1.45279E-03  5.92461E-04  1.48758E-04  1.32440E-05
  4.800  5.56401E-02  2.37296E-04  8.27423E-05  2.93880E-05  2.60828E-05  9.24995E-02  1.34969E-03  5.61453E-04  1.38811E-04  1.03276E-05
  4.900  5.54030E-02  3.40140E-04  1.12481E-04  3.47998E-05  3.02282E-05  9.14313E-02  1.24367E-03  5.23218E-04  1.26287E-04  7.37404E-06
  5.000  5.50084E-02  4.74368E-04  1.49634E-04  4.16848E-05  3.45074E-05  9.03359E-02  1.14488E-03  4.81230E-04  1.12041E-04  4.52983E-06
  5.100  5.44302E-02  6.36002E-04  1.93507E-04  4.99793E-05  3.88661E-05  8.91925E-02  1.06315E-03  4.39216E-04  9.70332E-05  1.94990E-06
  5.200  5.36470E-02  8.19985E-04  2.43136E-04  5.95658E-05  4.32442E-05  8.79740E-02  1.00732E-03  4.00897E-04  8.22737E-05 -2.10203E-07
  5.300  5.26420E-02  1.02040E-03  2.97311E-04  7.02744E-05  4.75773E-05  8.66481E-02  9.84592E-04  3.69737E-04  6.87605E-05 -1.80289E-06
  5.400  5.14052E-02  1.23069E-03  3.54613E-04  8.18852E-05  5.17975E-05  8.51807E-02  1.00006E-03  3.48705E-04  5.74177E-05 -2.69742E-06
  5.500  4.99327E-02  1.44399E-03  4.13468E-04  9.41341E-05  5.58345E-05  8.35373E-02  1.05636E-03  3.40071E-04  4.90383E-05 -2.78829E-06
  5.600  4.82283E-02  1.65332E-03  4.72200E-04  1.06721E-04  5.96171E-05  8.16865E-02  1.15345E-03  3.45261E-04  4.42359E-05 -2.00264E-06
  5.700  4.63024E-02  1.85196E-03  5.29106E-04  1.19318E-04  6.30755E-05  7.96021E-02  1.28870E-03  3.64775E-04  4.34072E-05 -3.06036E-07
  5.800  4.41724E-02  2.03365E-03  5.82516E-04  1.31585E-04  6.61424E-05  7.72648E-02  1.45704E-03  3.98167E-04  4.67115E-05  2.29393E-06
  5.900  4.18619E-02  2.19287E-03  6.30865E-04  1.43179E-04  6.87556E-05  7.46646E-02  1.65134E-03  4.44098E-04  5.40643E-05  5.74648E-06
  6.000  3.93997E-02  2.32504E-03  6.72761E-04  1.53767E-04  7.08603E-05  7.18012E-02  1.86288E-03  5.00448E-04  6.51483E-05  9.95916E-06
  6.100  3.68188E-02  2.42665E-03  7.07035E-04  1.63047E-04  7.24103E-05  6.86848E-02  2.08198E-03  5.64482E-04  7.94394E-05  1.48019E-05
  6.200  3.41553E-02  2.49537E-03  7.32788E-04  1.70750E-04  7.33707E-05  6.53357E-02  2.29855E-03  6.33041E-04  9.62450E-05  2.01137E-05
  6.300  3.14467E-02  2.53013E-03  7.49424E-04  1.76660E-04  7.37191E-05  6.17834E-02  2.50279E-03  7.02765E-04  1.14752E-04  2.57105E-05
  6.400  2.87305E-02  2.53104E-03  7.56665E-04  1.80619E-04  7.34468E-05  5.80656E-02  2.68572E-03  7.70308E-04  1.34080E-04  3.13955E-05
  6.500  2.60433E-02  2.49936E-03  7.54552E-04  1.82532E-04  7.25595E-05  5.42259E-02  2.83963E-03  8.32535E-04  1.53335E-04  3.69690E-05
  6.600  2.34194E-02  2.43736E-03  7.43427E-04  1.82373E-04  7.10776E-05  5.03122E-02  2.95851E-03  8.86703E-04  1.71665E-04  4.22391E-05
  6.700  2.08895E-02  2.34818E-03  7.23910E-04  1.80179E-04  6.90352E-05  4.63744E-02  3.03824E-03  9.30590E-04  1.88300E-04  4.70308E-05
  6.800  1.84801E-02  2.23560E-03  6.96853E-04  1.76055E-04  6.64798E-05  4.24621E-02  3.07669E-03  9.62584E-04  2.02596E-04  5.11943E-05
  6.900  1.62130E-02  2.10389E-03  6.63293E-04  1.70158E-04  6.34701E-05  3.86228E-02  3.07368E-03  9.81724E-04  2.14055E-04  5.46112E-05
  7.000  1.41050E-02  1.95754E-03  6.24399E-04  1.62695E-04  6.00739E-05  3.49002E-02  3.03082E-03  9.87700E-04  2.22342E-04  5.71987E-05
  7.100  1.21676E-02  1.80112E-03  5.81412E-04  1.53909E-04  5.63661E-05  3.13324E-02  2.95128E-03  9.80801E-04  2.27291E-04  5.89110E-05
  7.200  1.04071E-02  1.63902E-03  5.35593E-04  1.44065E-04  5.24256E-05  2.79516E-02  2.83945E-03  9.61846E-04  2.28894E-04  5.97394E-05
  7.300  8.82555E-03  1.47536E-03  4.88170E-04  1.33446E-04  4.83325E-05  2.47826E-02  2.70057E-03  9.32077E-04  2.27286E-04  5.97091E-05
  7.400  7.42038E-03  1.31383E-03  4.40292E-04  1.22329E-04  4.41658E-05  2.18433E-02  2.54041E-03  8.93054E-04  2.22722E-04  5.88755E-05
  7.500  6.18565E-03  1.15759E-03  3.92998E-04  1.10986E-04  4.00004E-05  1.91446E-02  2.36490E-03  8.46528E-04  2.15552E-04  5.73187E-05
  7.600  5.11246E-03  1.00923E-03  3.47184E-04  9.96666E-05  3.59051E-05  1.66909E-02  2.17982E-03  7.94337E-04  2.06187E-04  5.51368E-05
  7.700  4.18968E-03  8.70743E-04  3.03590E-04  8.85926E-05  3.19410E-05  1.44804E-02  1.99056E-03  7.38304E-04  1.95077E-04  5.24399E-05
  7.800  3.40465E-03  7.43524E-04  2.62792E-04  7.79542E-05  2.81597E-05  1.25066E-02  1.80191E-03  6.80148E-04  1.82679E-04  4.93435E-05
  7.900  2.74382E-03  6.28423E-04  2.25202E-04  6.79050E-05  2.46029E-05  1.07588E-02  1.61794E-03  6.21423E-04  1.69437E-04  4.59627E-05
  8.000  2.19331E-03  5.25789E-04  1.91077E-04  5.85617E-05  2.13019E-05  9.22311E-03  1.44195E-03  5.63474E-04  1.55761E-04  4.24072E-05
  8.100  1.73939E-03  4.35543E-04  1.60533E-04  5.00041E-05  1.82780E-05  7.88361E-03  1.27642E-03  5.07406E-04  1.42016E-04  3.87772E-05
  8.200  1.36888E-03  3.57255E-04  1.33564E-04  4.22778E-05  1.55425E-05  6.72296E-03  1.12306E-03  4.54083E-04  1.28511E-04  3.51610E-05
  8.300  1.06942E-03  2.90223E-04  1.10065E-04  3.53978E-05  1.30983E-05  5.72331E-03  9.82921E-04  4.04131E-04  1.15496E-04  3.16326E-05
  8.400  8.29719E-04  2.33556E-04  8.98474E-05  2.93527E-05  1.09404E-05  4.86688E-03  8.56405E-04  3.57957E-04  1.03162E-04  2.82514E-05
  8.500  6.39647E-04  1.86240E-04  7.26691E-05  2.41094E-05  9.05752E-06  4.13651E-03  7.43436E-04  3.15774E-04  9.16447E-05  2.50620E-05
  8.600  4.90284E-04  1.47204E-04  5.82483E-05  1.96185E-05  7.43359E-06  3.51602E-03  6.43542E-04  2.77635E-04  8.10272E-05  2.20957E-05
  8.700  3.73918E-04  1.15373E-04  4.62841E-05  1.58190E-05  6.04877E-06  2.99043E-03  5.55963E-04  2.43460E-04  7.13498E-05  1.93710E-05
  8.800  2.83996E-04  8.97095E-05  3.64708E-05  1.26425E-05  4.88092E-06  2.54620E-03  4.79747E-04  2.13073E-04  6.26163E-05  1.68962E-05
  8.900  2.15031E-04  6.92422E-05  2.85106E-05  1.00177E-05  3.90673E-06  2.17120E-03  4.13830E-04  1.86229E-04  5.48022E-05  1.46706E-05
  9.000  1.62500E-04  5.30883E-05  2.21224E-05  7.87299E-06  3.10272E-06  1.85477E-03  3.57108E-04  1.62639E-04  4.78619E-05  1.26868E-05
  9.100  1.22728E-04  4.04642E-05  1.70481E-05  6.13969E-06  2.44602E-06  1.58764E-03  3.08484E-04  1.41994E-04  4.17357E-05  1.09324E-05
  9.200  9.27706E-05  3.06896E-05  1.30568E-05  4.75353E-06  1.91501E-06  1.36186E-03  2.66913E-04  1.23980E-04  3.63553E-05  9.39152E-06
  9.300  7.02966E-05  2.31857E-05  9.94607E-06  3.65607E-06  1.48978E-06  1.17063E-03  2.31422E-04  1.08292E-04  3.16486E-05  8.04638E-06
  9.400  5.34848E-05  1.74696E-05  7.54226E-06  2.79541E-06  1.15239E-06  1.00823E-03  2.01128E-04  9.46398E-05  2.75433E-05  6.87823E-06
  9.500  4.09278E-05  1.31449E-05  5.69908E-06  2.12641E-06  8.87026E-07  8.69874E-04  1.75246E-04  8.27604E-05  2.39698E-05  5.86832E-06
  9.600  3.15495E-05  9.89179E-06  4.29545E-06  1.61061E-06  6.79979E-07  7.51577E-04  1.53088E-04  7.24154E-05  2.08627E-05  4.99855E-06
  9.700  2.45349E-05  7.45629E-06  3.23282E-06  1.21581E-06  5.19609E-07  6.50041E-04  1.34059E-04  6.33938E-05  1.81621E-05  4.25191E-06
  9.800  1.92719E-05  5.63931E-06  2.43218E-06  9.15528E-07  3.96188E-07  5.62553E-04  1.17655E-04  5.55118E-05  1.58142E-05  3.61269E-06
  9.900  1.53040E-05  4.28693E-06  1.83113E-06  6.88334E-07  3.01711E-07  4.86888E-04  1.03449E-04  4.86105E-05  1.37714E-05  3.06668E-06
 10.000  1.22925E-05  3.28145E-06  1.38102E-06  5.17147E-07  2.29697E-07  4.21224E-04  9.10828E-05  4.25545E-05  1.19919E-05  2.60116E-06
 10.100  9.98756E-06  2.53380E-06  1.04440E-06  3.88541E-07  1.74969E-07  3.64070E-04  8.02627E-05  3.72286E-05  1.04396E-05  2.20489E-06
 10.200  8.20542E-06  1.97710E-06  7.92728E-07  2.92102E-07  1.33450E-07  3.14205E-04  7.07462E-05  3.25355E-05  9.08336E-06  1.86798E-06
 10.300  6.81109E-06  1.56146E-06  6.04451E-07  2.19845E-07  1.01966E-07  2.70630E-04  6.23355E-05  2.83935E-05  7.89676E-06  1.58183E-06
 10.400  5.70567E-06  1.24987E-06  4.63423E-07  1.65706E-07  7.80746E-08  2.32517E-04  5.48704E-05  2.47335E-05  6.85716E-06  1.33898E-06
 10.500  4.81673E-06  1.01488E-06  3.57596E-07  1.25120E-07  5.99148E-08  1.99180E-04  4.82214E-05  2.14975E-05  5.94539E-06  1.13299E-06
 10.600  4.09130E-06  8.36248E-07  2.78011E-07  9.46684E-08  4.60788E-08  1.70041E-04  4.22842E-05  1.86363E-05  5.14517E-06  9.58309E-07
 10.700  3.49066E-06  6.98998E-07  2.18010E-07  7.18030E-08  3.55083E-08  1.44613E-04  3.69744E-05  1.61078E-05  4.44267E-06  8.10208E-07
 10.800  2.98654E-06  5.92094E-07  1.72638E-07  5.46249E-08  2.74103E-08  1.22473E-04  3.22238E-05  1.38761E-05  3.82609E-06  6.84634E-07
 10.900  2.55830E-06  5.07412E-07  1.38202E-07  4.17184E-08  2.11911E-08  1.03254E-04  2.79760E-05  1.19099E-05  3.28532E-06  5.78138E-07
 11.000  2.19088E-06  4.38995E-07  1.11934E-07  3.20242E-08  1.64057E-08  8.66314E-05  2.41843E-05  1.01818E-05  2.81167E-06  4.87794E-07
 11.100  1.87327E-06  3.82510E-07  9.17638E-08  2.47468E-08  1.27188E-08  7.23151E-05  2.08084E-05  8.66744E-06  2.39758E-06  4.11126E-07
 11.200  1.59730E-06  3.34834E-07  7.61333E-08  1.92858E-08  9.87649E-09  6.00432E-05  1.78134E-05  7.34498E-06  2.03641E-06  3.46044E-07
 11.300  1.35691E-06  2.93751E-07  6.38760E-08  1.51864E-08  7.68531E-09  4.95781E-05  1.51676E-05  6.19469E-06  1.72234E-06  2.90784E-07
 11.400  1.14743E-06  2.57716E-07  5.41205E-08  1.21031E-08  5.99656E-09  4.07032E-05  1.28418E-05  5.19853E-06  1.45015E-06  2.43865E-07
 11.500  9.65185E-07  2.25677E-07  4.62208E-08  9.77400E-09  4.69545E-09  3.32209E-05  1.08086E-05  4.33998E-06  1.21518E-06  2.04038E-07
 11.600  8.07150E-07  1.96931E-07  3.97030E-08  8.00102E-09  3.69290E-09  2.69515E-05  9.04184E-06  3.60382E-06  1.01322E-06  1.70255E-07
 11.700  6.70747E-07  1.71021E-07  3.42238E-08  6.63543E-09  2.91972E-09  2.17317E-05  7.51646E-06  2.97603E-06  8.40449E-07  1.41628E-07
 11.800  5.53690E-07  1.47651E-07  2.95386E-08  5.56670E-09  2.32218E-09  1.74142E-05  6.20834E-06  2.44371E-06  6.93401E-07  1.17408E-07
 11.900  4.53895E-07  1.26625E-07  2.54756E-08  4.71380E-09  1.85869E-09  1.38669E-05  5.09436E-06  1.99500E-06  5.68920E-07  9.69607E-08
 12.000  3.69431E-07  1.07803E-07  2.19157E-08  4.01827E-09  1.49724E-09  1.09722E-05  4.15254E-06  1.61910E-06  4.64138E-07  7.97426E-08
 12.100  2.98491E-07  9.10685E-08  1.87775E-08  3.43871E-09  1.21335E-09  8.62634E-06  3.36212E-06  1.30617E-06  3.76459E-07  6.52896E-08
 12.200  2.39387E-07  7.63113E-08  1.60043E-08  2.94637E-09  9.88447E-10  6.73850E-06  2.70373E-06  1.04733E-06  3.03539E-07  5.32018E-08
 12.300  1.90552E-07  6.34154E-08  1.35562E-08  2.52165E-09  8.08564E-10  5.22988E-06  2.15946E-06  8.34640E-07  2.43274E-07  4.31342E-08
 12.400  1.50539E-07  5.22547E-08  1.14029E-08  2.15136E-09  6.63267E-10  4.03278E-06  1.71295E-06  6.61027E-07  1.93788E-07  3.47874E-08
 12.500  1.18033E-07  4.26918E-08  9.51994E-09  1.82672E-09  5.44810E-10  3.08957E-06  1.34943E-06  5.20264E-07  1.53418E-07  2.79020E-08
 12.600  9.18496E-08  3.45812E-08  7.88527E-09  1.54173E-09  4.47451E-10  2.35164E-06  1.05575E-06  4.06908E-07  1.20704E-07  2.22525E-08
 12.700  7.09382E-08  2.77725E-08  6.47801E-09  1.29214E-09  3.66932E-10  1.77838E-06  8.20311E-07  3.16245E-07  9.43725E-08  1.76432E-08
 12.800  5.43785E-08  2.21149E-08  5.27752E-09  1.07465E-09  3.00062E-10  1.33618E-06  6.32996E-07  2.44229E-07  7.33209E-08  1.39051E-08
 12.900  4.13749E-08  1.74612E-08  4.26320E-09  8.86490E-10  2.44422E-10  9.97453E-07  4.85106E-07  1.87417E-07  5.66055E-08  1.08921E-08
 13.000  3.12487E-08  1.36714E-08  3.41457E-09  7.25078E-10  1.98136E-10  7.39807E-07  3.69225E-07  1.42907E-07  4.34241E-08  8.47915E-09
 13.100  2.34281E-08  1.06155E-08  2.71163E-09  5.87911E-10  1.59716E-10  5.45194E-07  2.79111E-07  1.08275E-07  3.31007E-08  6.55928E-09
 13.200  1.74373E-08  8.17510E-09  2.13515E-09  4.72505E-10  1.27944E-10  3.99208E-07  2.09557E-07  8.15151E-08  2.50712E-08  5.04192E-09
 13.300  1.28850E-08  6.24472E-09  1.66707E-09  3.76404E-10  1.01805E-10  2.90452E-07  1.56272E-07  6.09789E-08  1.88689E-08  3.85078E-09
 13.400  9.45329E-09  4.73198E-09  1.29074E-09  2.97206E-10  8.04326E-11  2.09984E-07  1.15751E-07  4.53270E-08  1.41108E-08  2.92212E-09
 13.500  6.88658E-09  3.55735E-09  9.91088E-10  2.32617E-10  6.30803E-11  1.50851E-07  8.51632E-08  3.34791E-08  1.04855E-08  2.20308E-09
 13.600  4.98168E-09  2.65342E-09  7.54777E-10  1.80483E-10  4.90985E-11  1.07690E-07  6.22407E-08  2.45718E-08  7.74235E-09  1.65021E-09
 13.700  3.57873E-09  1.96392E-09  5.70161E-10  1.38830E-10  3.79226E-11  7.63972E-08  4.51865E-08  1.79206E-08  5.68070E-09  1.22807E-09
 13.800  2.55324E-09  1.44253E-09  4.27259E-10  1.05883E-10  2.90636E-11  5.38603E-08  3.25890E-08  1.29876E-08  4.14177E-09  9.07977E-10
 13.900  1.80923E-09  1.05159E-09  3.17647E-10  8.00796E-11  2.21007E-11  3.77367E-08  2.33495E-08  9.35343E-09  3.00076E-09  6.66961E-10
 14.000  1.27339E-09  7.60906E-10  2.34315E-10  6.00641E-11  1.66750E-11  2.62770E-08  1.66205E-08  6.69406E-09  2.16048E-09  4.86746E-10
 14.100  8.90281E-10  5.46536E-10  1.71514E-10  4.46846E-11  1.24834E-11  1.81852E-08  1.17540E-08  4.76095E-09  1.54578E-09  3.52929E-10
 14.200  6.18321E-10  3.89715E-10  1.24591E-10  3.29764E-11  9.27316E-12  1.25086E-08  8.25894E-09  3.36506E-09  1.09910E-09  2.54251E-10
 14.300  4.26629E-10  2.75901E-10  8.98266E-11  2.41435E-11  6.83547E-12  8.55175E-09  5.76596E-09  2.36372E-09  7.76659E-10  1.81986E-10
 14.400  2.92457E-10  1.93942E-10  6.42822E-11  1.75388E-11  5.00013E-12  5.81134E-09  3.99986E-09  1.65012E-09  5.45425E-10  1.29426E-10
 14.500  1.99193E-10  1.35375E-10  4.56651E-11  1.26430E-11  3.62992E-12  3.92541E-09  2.75716E-09  1.14488E-09  3.80682E-10  9.14592E-11
 14.600  1.34807E-10  9.38391E-11  3.22050E-11  9.04481E-12  2.61544E-12  2.63569E-09  1.88859E-09  7.89474E-10  2.64073E-10  6.42192E-11
 14.700  9.06565E-11  6.46016E-11  2.25500E-11  6.42228E-12  1.87051E-12  1.75921E-09  1.28555E-09  5.41083E-10  1.82068E-10  4.48071E-11
 14.800  6.05841E-11  4.41720E-11  1.56778E-11  4.52652E-12  1.32793E-12  1.16727E-09  8.69623E-10  3.68593E-10  1.24767E-10  3.10661E-11
 14.900  4.02359E-11  3.00002E-11  1.08238E-11  3.16714E-12  9.35884E-13  7.69959E-10  5.84628E-10  2.49574E-10  8.49836E-11  2.14042E-11
 15.000  2.65575E-11  2.02396E-11  7.42086E-12  2.20007E-12  6.54842E-13  5.04915E-10  3.90617E-10  1.67969E-10  5.75375E-11  1.46553E-11
 15.100  1.74220E-11  1.35648E-11  5.05297E-12  1.51744E-12  4.54937E-13  3.29183E-10  2.59393E-10  1.12370E-10  3.87222E-11  9.97214E-12
 15.200  1.13597E-11  9.03187E-12  3.41732E-12  1.03927E-12  3.13833E-13  2.13373E-10  1.71206E-10  7.47255E-11  2.59043E-11  6.74365E-12
 15.300  7.36238E-12  5.97483E-12  2.29562E-12  7.06843E-13  2.14987E-13  1.37510E-10  1.12317E-10  4.93969E-11  1.72266E-11  4.53239E-12
 15.400  4.74315E-12  3.92718E-12  1.53186E-12  4.77449E-13  1.46259E-13  8.81123E-11  7.32409E-11  3.24603E-11  1.13881E-11  3.02761E-12
 15.500  3.03762E-12  2.56488E-12  1.01547E-12  3.20312E-13  9.88231E-14  5.61381E-11  4.74741E-11  2.12050E-11  7.48414E-12  2.01013E-12
 15.600  1.93391E-12  1.66459E-12  6.68763E-13  2.13449E-13  6.63211E-14  3.55640E-11  3.05892E-11  1.37710E-11  4.88968E-12  1.32653E-12
 15.700  1.22403E-12  1.07355E-12  4.37582E-13  1.41291E-13  4.42110E-14  2.24030E-11  1.95931E-11  8.89091E-12  3.17598E-12  8.70143E-13
 15.800  7.70222E-13  6.88078E-13  2.84480E-13  9.29111E-14  2.92767E-14  1.40332E-11  1.24759E-11  5.70677E-12  2.05090E-12  5.67359E-13
 15.900  4.81868E-13  4.38298E-13  1.83769E-13  6.06984E-14  1.92598E-14  8.74126E-12  7.89753E-12  3.64173E-12  1.31671E-12  3.67733E-13
 16.000  2.99739E-13  2.77485E-13  1.17963E-13  3.93977E-14  1.25878E-14  5.41463E-12  4.97017E-12  2.31051E-12  8.40483E-13  2.36934E-13
 16.100  1.85386E-13  1.74609E-13  7.52471E-14  2.54080E-14  8.17403E-15  3.33543E-12  3.10975E-12  1.45748E-12  5.33416E-13  1.51759E-13
 16.200  1.14010E-13  1.09212E-13  4.77010E-14  1.62818E-14  5.27396E-15  2.04331E-12  1.93449E-12  9.14110E-13  3.36600E-13  9.66331E-14
 16.300  6.97203E-14  6.78998E-14  3.00524E-14  1.03679E-14  3.38124E-15  1.24488E-12  1.19647E-12  5.70043E-13  2.11194E-13  6.11725E-14
 16.400  4.23971E-14  4.19641E-14  1.88175E-14  6.56071E-15  2.15414E-15  7.54290E-13  7.35785E-13  3.53458E-13  1.31758E-13  3.84995E-14
 16.500  2.56383E-14  2.57819E-14  1.17111E-14  4.12581E-15  1.36381E-15  4.54549E-13  4.49904E-13  2.17921E-13  8.17361E-14  2.40900E-14
 16.600  1.54181E-14  1.57470E-14  7.24434E-15  2.57861E-15  8.58092E-16  2.72436E-13  2.73540E-13  1.33599E-13  5.04194E-14  1.49868E-14
 16.700  9.22091E-15  9.56177E-15  4.45438E-15  1.60176E-15  5.36582E-16  1.62404E-13  1.65373E-13  8.14429E-14  3.09270E-14  9.27017E-15
 16.800  5.48443E-15  5.77239E-15  2.72257E-15  9.88924E-16  3.33487E-16  9.62916E-14  9.94178E-14  4.93699E-14  1.88644E-14  5.70139E-15
 16.900  3.24425E-15  3.46468E-15  1.65421E-15  6.06879E-16  2.06007E-16  5.67870E-14  5.94329E-14  2.97604E-14  1.14426E-14  3.48658E-15
 17.000  1.90869E-15  2.06764E-15  9.99159E-16  3.70195E-16  1.26491E-16  3.33110E-14  3.53317E-14  1.78398E-14  6.90220E-15  2.12010E-15
 17.100  1.11688E-15  1.22689E-15  5.99969E-16  2.24474E-16  7.72028E-17  1.94362E-14  2.08876E-14  1.06347E-14  4.14039E-15  1.28191E-15
 17.200  6.50032E-16  7.23879E-16  3.58169E-16  1.35308E-16  4.68399E-17  1.12806E-14  1.22802E-14  6.30451E-15  2.46998E-15  7.70757E-16
 17.300  3.76301E-16  4.24690E-16  2.12581E-16  8.10807E-17  2.82505E-17  6.51262E-15  7.18004E-15  3.71688E-15  1.46539E-15  4.60833E-16
 17.400  2.16679E-16  2.47763E-16  1.25445E-16  4.83020E-17  1.69386E-17  3.74017E-15  4.17505E-15  2.17928E-15  8.64626E-16  2.73997E-16
 17.500  1.24105E-16  1.43737E-16  7.36019E-17  2.86075E-17  1.00968E-17  2.13672E-15  2.41446E-15  1.27076E-15  5.07370E-16  1.62007E-16
 17.600  7.07066E-17  8.29247E-17  4.29380E-17  1.68451E-17  5.98362E-18  1.21431E-15  1.38871E-15  7.36953E-16  2.96109E-16  9.52613E-17
 17.700  4.00720E-17  4.75764E-17  2.49073E-17  9.86198E-18  3.52556E-18  6.86514E-16  7.94405E-16  4.25056E-16  1.71876E-16  5.57061E-17
 17.800  2.25913E-17  2.71459E-17  1.43666E-17  5.74065E-18  2.06533E-18  3.86110E-16  4.51983E-16  2.43833E-16  9.92252E-17  3.23968E-17
 17.900  1.26698E-17  1.54039E-17  8.24013E-18  3.32260E-18  1.20299E-18  2.16035E-16  2.55777E-16  1.39118E-16  5.69745E-17  1.87379E-17
 18.000  7.06860E-18  8.69327E-18  4.69983E-18  1.91217E-18  6.96719E-19  1.20253E-16  1.43968E-16  7.89457E-17  3.25384E-17  1.07788E-17
 18.100  3.92321E-18  4.87946E-18  2.66567E-18  1.09425E-18  4.01226E-19  6.65931E-17  8.06019E-17  4.45589E-17  1.84832E-17  6.16673E-18
 18.200  2.16622E-18  2.72400E-18  1.50356E-18  6.22680E-19  2.29756E-19  3.66890E-17  4.48856E-17  2.50154E-17  1.04431E-17  3.50901E-18
 18.300  1.18993E-18  1.51251E-18  8.43395E-19  3.52353E-19  1.30829E-19  2.01104E-17  2.48633E-17  1.39687E-17  5.86894E-18  1.98595E-18
 18.400  6.50296E-19  8.35321E-19  4.70491E-19  1.98275E-19  7.40816E-20  1.09670E-17  1.36996E-17  7.75862E-18  3.28075E-18  1.11792E-18
 18.500  3.53569E-19  4.58864E-19  2.61030E-19  1.10955E-19  4.17154E-20  5.95044E-18  7.50868E-18  4.28649E-18  1.82422E-18  6.25924E-19
 18.600  1.91258E-19  2.50725E-19  1.44032E-19  6.17478E-20  2.33600E-20  3.21223E-18  4.09384E-18  2.35566E-18  1.00897E-18  3.48583E-19
 18.700  1.02933E-19  1.36271E-19  7.90429E-20  3.41746E-20  1.30092E-20  1.72531E-18  2.22033E-18  1.28773E-18  5.55111E-19  1.93096E-19
 18.800  5.51166E-20  7.36734E-20  4.31435E-20  1.88106E-20  7.20503E-21  9.22013E-19  1.19793E-18  7.00238E-19  3.03802E-19  1.06396E-19
 18.900  2.93639E-20  3.96211E-20  2.34220E-20  1.02974E-20  3.96864E-21  4.90255E-19  6.42955E-19  3.78773E-19  1.65392E-19  5.83145E-20
 19.000  1.55652E-20  2.11963E-20  1.26473E-20  5.60647E-21  2.17408E-21  2.59375E-19  3.43296E-19  2.03813E-19  8.95693E-20  3.17927E-20
 19.100  8.20934E-21  1.12802E-20  6.79269E-21  3.03594E-21  1.18453E-21  1.36540E-19  1.82349E-19  1.09096E-19  4.82534E-20  1.72419E-20
 19.200  4.30807E-21  5.97184E-21  3.62885E-21  1.63512E-21  6.41895E-22  7.15191E-20  9.63592E-20  5.80926E-20  2.58599E-20  9.30161E-21
 19.300  2.24949E-21  3.14514E-21  1.92835E-21  8.75929E-22  3.45968E-22  3.72753E-20  5.06573E-20  3.07729E-20  1.37868E-20  4.99172E-21
 19.400  1.16874E-21  1.64785E-21  1.01930E-21  4.66719E-22  1.85468E-22  1.93314E-20  2.64946E-20  1.62166E-20  7.31206E-21  2.66482E-21
 19.500  6.04209E-22  8.58916E-22  5.35944E-22  2.47355E-22  9.88946E-23  9.97587E-21  1.37862E-20  8.50156E-21  3.85800E-21  1.41520E-21
 19.600  3.10813E-22  4.45395E-22  2.80318E-22  1.30397E-22  5.24511E-23  5.12260E-21  7.13692E-21  4.43397E-21  2.02505E-21  7.47661E-22
 19.700  1.59096E-22  2.29778E-22  1.45849E-22  6.83769E-23  2.76708E-23  2.61750E-21  3.67588E-21  2.30063E-21  1.05747E-21  3.92947E-22
 19.800  8.10349E-23  1.17936E-22  7.54886E-23  3.56656E-23  1.45205E-23  1.33089E-21  1.88365E-21  1.18759E-21  5.49363E-22  2.05453E-22
 19.900  4.10716E-23  6.02236E-23  3.88681E-23  1.85053E-23  7.57949E-24  6.73387E-22  9.60365E-22  6.09896E-22  2.83934E-22  1.06867E-22
  67 198 200   0.100
  0.000  4.97921E-02 -2.79285E-16 -3.22659E-16 -6.81755E-16  4.29147E-16  9.11861E-02 -4.80991E-16 -7.07767E-16 -7.25538E-16 -1.74520E-15
  0.100  4.97943E-02 -1.86216E-05 -2.09706E-09  1.32837E-12 -9.01208E-16  9.13441E-02  1.36646E-06  1.07994E-08 -3.07423E-12 -1.15011E-14
  0.200  4.98027E-02 -7.36459E-05 -3.28650E-08  8.45298E-11  7.49577E-15  9.18101E-02  5.73184E-06  1.70205E-07 -1.95519E-10  4.19849E-14
  0.300  4.98220E-02 -1.62584E-04 -1.60676E-07  9.52675E-10  1.88159E-13  9.25607E-02  1.38530E-05  8.40216E-07 -2.20322E-09  6.30660E-13
  0.400  4.98598E-02 -2.81389E-04 -4.83248E-07  5.27354E-09  1.83132E-12  9.35581E-02  2.68590E-05  2.56300E-06 -1.21932E-08  6.20452E-12
  0.500  4.99257E-02 -4.24614E-04 -1.10539E-06  1.97340E-08  1.05958E-11  9.47524E-02  4.60676E-05  5.97674E-06 -4.56136E-08  3.57124E-11
  0.600  5.00305E-02 -5.85615E-04 -2.11186E-06  5.75529E-08  4.39003E-11  9.60846E-02  7.27581E-05  1.17121E-05 -1.32974E-07  1.47147E-10
  0.700  5.01853E-02 -7.56805E-04 -3.53868E-06  1.41125E-07  1.44158E-10  9.74895E-02  1.07925E-04  2.02816E-05 -3.25888E-07  4.80344E-10
  0.800  5.04003E-02 -9.29956E-04 -5.34677E-06  3.04429E-07  3.98520E-10  9.88995E-02  1.52041E-04  3.19749E-05 -7.02504E-07  1.32005E-09
  0.900  5.06839E-02 -1.09652E-03 -7.40140E-06  5.94806E-07  9.64181E-10  1.00248E-01  2.04859E-04  4.67726E-05 -1.37139E-06  3.17577E-09
  1.000  5.10417E-02 -1.24798E-03 -9.46053E-06  1.07378E-06  2.09624E-09  1.01475E-01  2.65274E-04  6.42895E-05 -2.47306E-06  6.87085E-09
  1.100  5.14758E-02 -1.37618E-03 -1.11743E-05  1.81660E-06  4.17305E-09  1.02527E-01  3.31268E-04  8.37540E-05 -4.17835E-06  1.36282E-08
  1.200  5.19846E-02 -1.47372E-03 -1.20967E-05  2.91030E-06  7.71228E-09  1.03363E-01  3.99948E-04  1.04028E-04 -6.68325E-06  2.51399E-08
  1.300  5.25621E-02 -1.53420E-03 -1.17087E-05  4.45030E-06  1.33704E-08  1.03955E-01  4.67681E-04  1.23668E-04 -1.01999E-05  4.36113E-08
  1.400  5.31984E-02 -1.55259E-03 -9.45284E-06  6.53541E-06  2.19188E-08  1.04289E-01  5.30325E-04  1.41019E-04 -1.49442E-05  7.17679E-08
  1.500  5.38798E-02 -1.52540E-03 -4.77436E-06  9.26174E-06  3.41921E-08  1.04368E-01  5.83530E-04  1.54339E-04 -2.11198E-05  1.12833E-07
  1.600  5.45893E-02 -1.45090E-03  2.83228E-06  1.27156E-05  5.10078E-08  1.04208E-01  6.23103E-04  1.61944E-04 -2.89004E-05  1.70480E-07
  1.700  5.53077E-02 -1.32919E-03  1.37769E-05  1.69658E-05  7.30618E-08  1.03839E-01  6.45396E-04  1.62351E-04 -3.84106E-05  2.48770E-07
  1.800  5.60145E-02 -1.16227E-03  2.83307E-05  2.20566E-05  1.00810E-07  1.03301E-01  6.47690E-04  1.54424E-04 -4.97072E-05  3.52104E-07
  1.900  5.66886E-02 -9.53965E-04  4.65907E-05  2.80009E-05  1.34353E-07  1.02644E-01  6.28545E-04  1.37501E-04 -6.27619E-05  4.85194E-07
  2.000  5.73099E-02 -7.09817E-04  6.84547E-05  3.47743E-05  1.73338E-07  1.01920E-01  5.88075E-04  1.11491E-04 -7.74476E-05  6.53074E-07
  2.100  5.78598E-02 -4.36858E-04  9.36093E-05  4.23123E-05  2.16911E-07  1.01185E-01  5.28124E-04  7.69410E-05 -9.35293E-05  8.61140E-07
  2.200  5.83226E-02 -1.43359E-04  1.21532E-04  5.05077E-05  2.63729E-07  1.00490E-01  4.52323E-04  3.50563E-05 -1.10660E-04  1.11523E-06
  2.300  5.86859E-02  1.61500E-04  1.51505E-04  5.92124E-05  3.12058E-07  9.98826E-02  3.66001E-04 -1.23139E-05 -1.28383E-04  1.42168E-06
  2.400  5.89413E-02  4.68000E-04  1.82646E-04  6.82399E-05  3.59966E-07  9.93988E-02  2.75964E-04 -6.27414E-05 -1.46144E-04  1.78738E-06
  2.500  5.90851E-02  7.66273E-04  2.13947E-04  7.73714E-05  4.05606E-07  9.90653E-02  1.90129E-04 -1.13322E-04 -1.63303E-04  2.21967E-06
  2.600  5.91177E-02  1.04670E-03  2.44322E-04  8.63632E-05  4.47585E-07  9.88960E-02  1.17044E-04 -1.60818E-04 -1.79164E-04  2.72622E-06
  2.700  5.90441E-02  1.30033E-03  2.72655E-04  9.49559E-05  4.85392E-07  9.88918E-02  6.53195E-05 -2.01825E-04 -1.92995E-04  3.31459E-06
  2.800  5.88737E-02  1.51921E-03  2.97863E-04  1.02886E-04  5.19844E-07  9.90408E-02  4.30011E-05 -2.32971E-04 -2.04070E-04  3.99168E-06
  2.900  5.86192E-02  1.69674E-03  3.18942E-04  1.09894E-04  5.53531E-07  9.93200E-02  5.69429E-05 -2.51119E-04 -2.11697E-04  4.76293E-06
  3.000  5.82964E-02  1.82793E-03  3.35019E-04  1.15739E-04  5.91186E-07  9.96966E-02  1.12215E-04 -2.53573E-04 -2.15262E-04  5.63133E-06
  3.100  5.79236E-02  1.90963E-03  3.45397E-04  1.20208E-04  6.39956E-07  1.00131E-01  2.11604E-04 -2.38275E-04 -2.14259E-04  6.59621E-06
  3.200  5.75202E-02  1.94062E-03  3.49586E-04  1.23124E-04  7.09543E-07  1.00581E-01  3.55243E-04 -2.03975E-04 -2.08330E-04  7.65210E-06
  3.300  5.71062E-02  1.92170E-03  3.47339E-04  1.24354E-04  8.12170E-07  1.01001E-01  5.40416E-04 -1.50365E-04 -1.97291E-04  8.78750E-06
  3.400  5.67009E-02  1.85565E-03  3.38658E-04  1.23817E-04  9.62387E-07  1.01350E-01  7.61559E-04 -7.81657E-05 -1.81154E-04  9.98389E-06
  3.500  5.63226E-02  1.74708E-03  3.23814E-04  1.21487E-04  1.17671E-06  1.01592E-01  1.01047E-03  1.08459E-05 -1.60148E-04  1.12151E-05
  3.600  5.59869E-02  1.60231E-03  3.03336E-04  1.17397E-04  1.47314E-06  1.01696E-01  1.27670E-03  1.13873E-04 -1.34717E-04  1.24473E-05
  3.700  5.57064E-02  1.42908E-03  2.78006E-04  1.11637E-04  1.87053E-06  1.01643E-01  1.54821E-03  2.27201E-04 -1.05518E-04  1.36390E-05
  3.800  5.54898E-02  1.23623E-03  2.48838E-04  1.04354E-04  2.38797E-06  1.01421E-01  1.81204E-03  3.46373E-04 -7.34067E-05  1.47427E-05
  3.900  5.53416E-02  1.03340E-03  2.17047E-04  9.57474E-05  3.04409E-06  1.01029E-01  2.05523E-03  4.66414E-04 -3.94041E-05  1.57066E-05
  4.000  5.52612E-02  8.30577E-04  1.84018E-04  8.60676E-05  3.85647E-06  1.00476E-01  2.26567E-03  5.82115E-04 -4.65960E-06  1.64774E-05
  4.100  5.52431E-02  6.37761E-04  1.51258E-04  7.56052E-05  4.84101E-06  9.97768E-02  2.43300E-03  6.88340E-04  2.95990E-05  1.70035E-05
  4.200  5.52767E-02  4.64532E-04  1.20345E-04  6.46855E-05  6.01153E-06  9.89533E-02  2.54934E-03  7.80349E-04  6.21235E-05  1.72387E-05
  4.300  5.53461E-02  3.19684E-04  9.28733E-05  5.36588E-05  7.37934E-06  9.80301E-02  2.60998E-03  8.54110E-04  9.17081E-05  1.71469E-05
  4.400  5.54314E-02  2.10867E-04  7.03948E-05  4.28901E-05  8.95293E-06  9.70326E-02  2.61374E-03  9.06579E-04  1.17254E-04  1.67053E-05
  4.500  5.55083E-02  1.44288E-04  5.43529E-05  3.27479E-05  1.07378E-05  9.59843E-02  2.56322E-03  9.35919E-04  1.37832E-04  1.59088E-05
  4.600  5.55495E-02  1.24458E-04  4.60215E-05  2.35925E-05  1.27360E-05  9.49046E-02  2.46463E-03  9.41645E-04  1.52738E-04  1.47727E-05
  4.700  5.55257E-02  1.54015E-04  4.64445E-05  1.57635E-05  1.49463E-05  9.38068E-02  2.32749E-03  9.24686E-04  1.61544E-04  1.33348E-05
  4.800  5.54064E-02  2.33613E-04  5.63811E-05  9.56736E-06  1.73635E-05  9.26964E-02  2.16405E-03  8.87344E-04  1.64120E-04  1.16559E-05
  4.900  5.51615E-02  3.61907E-04  7.62602E-05  5.26574E-06  1.99784E-05  9.15707E-02  1.98845E-03  8.33158E-04  1.60662E-04  9.81922E-06
  5.000  5.47624E-02  5.35602E-04  1.06146E-04  3.06411E-06  2.27771E-05  9.04186E-02  1.81578E-03  7.66680E-04  1.51674E-04  7.92769E-06
  5.100  5.41835E-02  7.49602E-04  1.45716E-04  3.10208E-06  2.57410E-05  8.92212E-02  1.66110E-03  6.93182E-04  1.37955E-04  6.10028E-06
  5.200  5.34032E-02  9.97219E-04  1.94263E-04  5.44561E-06  2.88459E-05  8.79529E-02  1.53835E-03  6.18306E-04  1.20550E-04  4.46635E-06
  5.300  5.24050E-02  1.27046E-03  2.50703E-04  1.00817E-05  3.20620E-05  8.65836E-02  1.45948E-03  5.47692E-04  1.00692E-04  3.15910E-06
  5.400  5.11786E-02  1.56037E-03  3.13610E-04  1.69159E-05  3.53532E-05  8.50807E-02  1.43357E-03  4.86608E-04  7.97277E-05  2.30816E-06
  5.500  4.97203E-02  1.85739E-03  3.81269E-04  2.57733E-05  3.86777E-05  8.34116E-02  1.46630E-03  4.39609E-04  5.90402E-05  2.03184E-06
  5.600  4.80333E-02  2.15178E-03  4.51736E-04  3.64033E-05  4.19876E-05  8.15460E-02  1.55958E-03  4.10253E-04  3.99621E-05  2.42955E-06
  5.700  4.61280E-02  2.43402E-03  5.22920E-04  4.84870E-05  4.52299E-05  7.94584E-02  1.71145E-03  4.00893E-04  2.36981E-05  3.57495E-06
  5.800  4.40212E-02  2.69517E-03  5.92669E-04  6.16488E-05  4.83473E-05  7.71302E-02  1.91629E-03  4.12559E-04  1.12534E-05  5.51026E-06
  5.900  4.17362E-02  2.92726E-03  6.58858E-04  7.54708E-05  5.12797E-05  7.45509E-02  2.16525E-03  4.44928E-04  3.37847E-06  8.24225E-06
  6.000  3.93012E-02  3.12354E-03  7.19481E-04  8.95091E-05  5.39656E-05  7.17198E-02  2.44686E-03  4.96399E-04  5.29932E-07  1.17402E-05
  6.100  3.67486E-02  3.27874E-03  7.72736E-04  1.03312E-04  5.63446E-05  6.86457E-02  2.74787E-03  5.64243E-04  2.85359E-06  1.59359E-05
  6.200  3.41137E-02  3.38922E-03  8.17094E-04  1.16439E-04  5.83592E-05  6.53473E-02  3.05406E-03  6.44827E-04  1.01876E-05  2.07263E-05
  6.300  3.14333E-02  3.45304E-03  8.51362E-04  1.28477E-04  5.99578E-05  6.18520E-02  3.35117E-03  7.33879E-04  2.20860E-05  2.59775E-05
  6.400  2.87444E-02  3.46997E-03  8.74720E-04  1.39061E-04  6.10961E-05  5.81951E-02  3.62575E-03  8.26791E-04  3.78603E-05  3.15313E-05
  6.500  2.60830E-02  3.44133E-03  8.86745E-04  1.47882E-04  6.17400E-05  5.44178E-02  3.86587E-03  9.18910E-04  5.66336E-05  3.72131E-05
  6.600  2.34825E-02  3.36994E-03  8.87414E-04  1.54707E-04  6.18671E-05  5.05655E-02  4.06170E-03  1.00582E-03  7.74053E-05  4.28401E-05
  6.700  2.09732E-02  3.25983E-03  8.77080E-04  1.59376E-04  6.14680E-05  4.66858E-02  4.20598E-03  1.08360E-03  9.91181E-05  4.82308E-05
  6.800  1.85812E-02  3.11598E-03  8.56444E-04  1.61816E-04  6.05468E-05  4.28262E-02  4.29418E-03  1.14898E-03  1.20725E-04  5.32135E-05
  6.900  1.63282E-02  2.94412E-03  8.26499E-04  1.62030E-04  5.91217E-05  3.90326E-02  4.32455E-03  1.19949E-03  1.41248E-04  5.76346E-05
  7.000  1.42307E-02  2.75032E-03  7.88476E-04  1.60102E-04  5.72240E-05  3.53472E-02  4.29797E-03  1.23355E-03  1.59832E-04  6.13652E-05
  7.100  1.23001E-02  2.54084E-03  7.43769E-04  1.56180E-04  5.48973E-05  3.18075E-02  4.21768E-03  1.25043E-03  1.75780E-04  6.43065E-05
  7.200  1.05431E-02  2.32175E-03  6.93872E-04  1.50473E-04  5.21955E-05  2.84452E-02  4.08884E-03  1.25024E-03  1.88579E-04  6.63929E-05
  7.300  8.96175E-03  2.09880E-03  6.40309E-04  1.43233E-04  4.91806E-05  2.52854E-02  3.91810E-03  1.23383E-03  1.97907E-04  6.75932E-05
  7.400  7.55393E-03  1.87718E-03  5.84567E-04  1.34740E-04  4.59206E-05  2.23463E-02  3.71308E-03  1.20262E-03  2.03637E-04  6.79103E-05
  7.500  6.31410E-03  1.66141E-03  5.28048E-04  1.25295E-04  4.24863E-05  1.96397E-02  3.48186E-03  1.15852E-03  2.05812E-04  6.73782E-05
  7.600  5.23379E-03  1.45524E-03  4.72018E-04  1.15197E-04  3.89488E-05  1.71710E-02  3.23257E-03  1.10375E-03  2.04632E-04  6.60586E-05
  7.700  4.30238E-03  1.26161E-03  4.17578E-04  1.04736E-04  3.53774E-05  1.49398E-02  2.97300E-03  1.04066E-03  2.00417E-04  6.40351E-05
  7.800  3.50768E-03  1.08267E-03  3.65641E-04  9.41834E-05  3.18365E-05  1.29407E-02  2.71022E-03  9.71637E-04  1.93575E-04  6.14083E-05
  7.900  2.83657E-03  9.19809E-04  3.16922E-04  8.37789E-05  2.83843E-05  1.11643E-02  2.45045E-03  8.98961E-04  1.84573E-04  5.82891E-05
  8.000  2.27557E-03  7.73708E-04  2.71938E-04  7.37282E-05  2.50711E-05  9.59808E-03  2.19886E-03  8.24725E-04  1.73897E-04  5.47928E-05
  8.100  1.81130E-03  6.44452E-04  2.31022E-04  6.41984E-05  2.19383E-05  8.22713E-03  1.95953E-03  7.50765E-04  1.62033E-04  5.10339E-05
  8.200  1.43086E-03  5.31617E-04  1.94332E-04  5.53168E-05  1.90179E-05  7.03509E-03  1.73548E-03  6.78622E-04  1.49439E-04  4.71213E-05
  8.300  1.12212E-03  4.34384E-04  1.61882E-04  4.71719E-05  1.63326E-05  6.00489E-03  1.52870E-03  6.09522E-04  1.36527E-04  4.31541E-05
  8.400  8.73929E-04  3.51643E-04  1.33558E-04  3.98158E-05  1.38959E-05  5.11939E-03  1.34030E-03  5.44381E-04  1.23653E-04  3.92195E-05
  8.500  6.76240E-04  2.82086E-04  1.09151E-04  3.32683E-05  1.17130E-05  4.36186E-03  1.17058E-03  4.83826E-04  1.11110E-04  3.53907E-05
  8.600  5.20178E-04  2.24304E-04  8.83804E-05  2.75215E-05  9.78210E-06  3.71640E-03  1.01926E-03  4.28221E-04  9.91296E-05  3.17260E-05
  8.700  3.98026E-04  1.76854E-04  7.09169E-05  2.25453E-05  8.09481E-06  3.16819E-03  8.85562E-04  3.77713E-04  8.78777E-05  2.82695E-05
  8.800  3.03190E-04  1.38321E-04  5.64064E-05  1.82922E-05  6.63807E-06  2.70371E-03  7.68350E-04  3.32264E-04  7.74658E-05  2.50513E-05
  8.900  2.30120E-04  1.07367E-04  4.44872E-05  1.47030E-05  5.39513E-06  2.31078E-03  6.66281E-04  2.91699E-04  6.79555E-05  2.20895E-05
  9.000  1.74214E-04  8.27575E-05  3.48050E-05  1.17112E-05  4.34682E-06  1.97863E-03  5.77891E-04  2.55740E-04  5.93674E-05  1.93915E-05
  9.100  1.31710E-04  6.33861E-05  2.70241E-05  9.24700E-06  3.47263E-06  1.69782E-03  5.01680E-04  2.24045E-04  5.16891E-05  1.69558E-05
  9.200  9.95724E-05  4.82805E-05  2.08357E-05  7.24067E-06  2.75166E-06  1.46018E-03  4.36177E-04  1.96233E-04  4.48839E-05  1.47744E-05
  9.300  7.53833E-05  3.66043E-05  1.59621E-05  5.62530E-06  2.16343E-06  1.25871E-03  3.79988E-04  1.71909E-04  3.88977E-05  1.28342E-05
  9.400  5.72408E-05  2.76517E-05  1.21597E-05  4.33856E-06  1.68852E-06  1.08749E-03  3.31823E-04  1.50683E-04  3.36656E-05  1.11189E-05
  9.500  4.36652E-05  2.08373E-05  9.21874E-06  3.32402E-06  1.30891E-06  9.41518E-04  2.90518E-04  1.32183E-04  2.91169E-05  9.61014E-06
  9.600  3.35174E-05  1.56834E-05  6.96204E-06  2.53173E-06  1.00840E-06  8.16621E-04  2.55038E-04  1.16063E-04  2.51795E-05  8.28875E-06
  9.700  2.59290E-05  1.18066E-05  5.24269E-06  1.91850E-06  7.72634E-07  7.09332E-04  2.24478E-04  1.02009E-04  2.17828E-05  7.13572E-06
  9.800  2.02436E-05  8.90296E-06  3.94077E-06  1.44769E-06  5.89209E-07  6.16785E-04  1.98060E-04  8.97395E-05  1.88597E-05  6.13273E-06
  9.900  1.59689E-05  6.73534E-06  2.95998E-06  1.08882E-06  4.47582E-07  5.36623E-04  1.75118E-04  7.90074E-05  1.63480E-05  5.26255E-06
 10.000  1.27379E-05  5.12057E-06  2.22406E-06  8.16958E-07  3.38955E-07  4.66914E-04  1.55093E-04  6.95979E-05  1.41914E-05  4.50934E-06
 10.100  1.02786E-05  3.91880E-06  1.67348E-06  6.12046E-07  2.56107E-07  4.06078E-04  1.37518E-04  6.13262E-05  1.23392E-05  3.85872E-06
 10.200  8.39014E-06  3.02424E-06  1.26228E-06  4.58197E-07  1.93202E-07  3.52822E-04  1.22007E-04  5.40349E-05  1.07471E-05  3.29779E-06
 10.300  6.92450E-06  2.35746E-06  9.55417E-07  3.43000E-07  1.45597E-07  3.06090E-04  1.08245E-04  4.75904E-05  9.37604E-06  2.81503E-06
 10.400  5.77306E-06  1.85920E-06  7.26404E-07  2.56887E-07  1.09647E-07  2.65012E-04  9.59743E-05  4.18801E-05  8.19251E-06  2.40028E-06
 10.500  4.85610E-06  1.48543E-06  5.55359E-07  1.92565E-07  8.25263E-08  2.28874E-04  8.49869E-05  3.68095E-05  7.16774E-06  2.04455E-06
 10.600  4.11522E-06  1.20348E-06  4.27449E-07  1.44523E-07  6.20691E-08  1.97080E-04  7.51165E-05  3.22994E-05  6.27731E-06  1.73992E-06
 10.700  3.50769E-06  9.89207E-07  3.31642E-07  1.08635E-07  4.66311E-08  1.69130E-04  6.62293E-05  2.82831E-05  5.50067E-06  1.47946E-06
 10.800  3.00225E-06  8.24740E-07  2.59741E-07  8.18211E-08  3.49732E-08  1.44597E-04  5.82180E-05  2.47048E-05  4.82062E-06  1.25706E-06
 10.900  2.57610E-06  6.96875E-07  2.05649E-07  6.17902E-08  2.61662E-08  1.23113E-04  5.09959E-05  2.15170E-05  4.22288E-06  1.06740E-06
 11.000  2.21258E-06  5.95876E-07  1.64825E-07  4.68382E-08  1.95148E-08  1.04356E-04  4.44920E-05  1.86796E-05  3.69565E-06  9.05796E-07
 11.100  1.89951E-06  5.14586E-07  1.33873E-07  3.56933E-08  1.44983E-08  8.80398E-05  3.86469E-05  1.61576E-05  3.22927E-06  7.68209E-07
 11.200  1.62798E-06  4.47778E-07  1.10251E-07  2.74028E-08  1.07254E-08  7.39050E-05  3.34096E-05  1.39209E-05  2.81579E-06  6.51117E-07
 11.300  1.39138E-06  3.91672E-07  9.20521E-08  2.12492E-08  7.90038E-09  6.17175E-05  2.87347E-05  1.19427E-05  2.44871E-06  5.51485E-07
 11.400  1.18475E-06  3.43566E-07  7.78488E-08  1.66895E-08  5.79810E-09  5.12623E-05  2.45808E-05  1.01991E-05  2.12270E-06  4.66705E-07
 11.500  1.00429E-06  3.01563E-07  6.65782E-08  1.33120E-08  4.24581E-09  4.23421E-05  2.09089E-05  8.66811E-06  1.83332E-06  3.94546E-07
 11.600  8.46951E-07  2.64357E-07  5.74547E-08  1.08039E-08  3.11019E-09  3.47751E-05  1.76814E-05  7.32982E-06  1.57684E-06  3.33112E-07
 11.700  7.10229E-07  2.31066E-07  4.99052E-08  8.92869E-09  2.28794E-09  2.83945E-05  1.48620E-05  6.16562E-06  1.35007E-06  2.80793E-07
 11.800  5.91966E-07  2.01106E-07  4.35181E-08  7.50882E-09  1.69898E-09  2.30477E-05  1.24149E-05  5.15812E-06  1.15024E-06  2.36233E-07
 11.900  4.90243E-07  1.74096E-07  3.80036E-08  6.41256E-09  1.28141E-09  1.85957E-05  1.03053E-05  4.29109E-06  9.74850E-07  1.98284E-07
 12.000  4.03304E-07  1.49780E-07  3.31625E-08  5.54385E-09  9.87731E-10  1.49127E-05  8.49933E-06  3.54929E-06  8.21646E-07  1.65982E-07
 12.100  3.29515E-07  1.27980E-07  2.88611E-08  4.83411E-09  7.81934E-10  1.18862E-05  6.96437E-06  2.91850E-06  6.88529E-07  1.38512E-07
 12.200  2.67351E-07  1.08552E-07  2.50117E-08  4.23572E-09  6.37130E-10  9.41564E-06  5.66922E-06  2.38548E-06  5.73536E-07  1.15186E-07
 12.300  2.15382E-07  9.13679E-08  2.15574E-08  3.71670E-09  5.33640E-10  7.41252E-06  4.58446E-06  1.93798E-06  4.74816E-07  9.54173E-08
 12.400  1.72279E-07  7.62954E-08  1.84610E-08  3.25641E-09  4.57418E-10  5.79938E-06  3.68267E-06  1.56477E-06  3.90619E-07  7.87080E-08
 12.500  1.36816E-07  6.31952E-08  1.56967E-08  2.84220E-09  3.98733E-10  4.50913E-06  2.93858E-06  1.25559E-06  3.19296E-07  6.46290E-08
 12.600  1.07875E-07  5.19172E-08  1.32441E-08  2.46672E-09  3.51098E-10  3.48415E-06  2.32920E-06  1.00121E-06  2.59303E-07  5.28105E-08
 12.700  8.44472E-08  4.23020E-08  1.10852E-08  2.12598E-09  3.10383E-10  2.67543E-06  1.83387E-06  7.93341E-07  2.09200E-07  4.29316E-08
 12.800  6.56362E-08  3.41847E-08  9.20158E-09  1.81786E-09  2.74126E-10  2.04168E-06  1.43426E-06  6.24660E-07  1.67662E-07  3.47129E-08
 12.900  5.06536E-08  2.73991E-08  7.57381E-09  1.54116E-09  2.40985E-10  1.54840E-06  1.11426E-06  4.88726E-07  1.33478E-07  2.79105E-08
 13.000  3.88155E-08  2.17818E-08  6.18112E-09  1.29492E-09  2.10330E-10  1.16705E-06  8.59915E-07  3.79945E-07  1.05554E-07  2.23114E-08
 13.100  2.95359E-08  1.71766E-08  5.00164E-09  1.07806E-09  1.81951E-10  8.74198E-07  6.59235E-07  2.93498E-07  8.29128E-08  1.77296E-08
 13.200  2.23188E-08  1.34368E-08  4.01289E-09  8.89194E-10  1.55846E-10  6.50814E-07  5.02058E-07  2.25278E-07  6.46925E-08  1.40031E-08
 13.300  1.67492E-08  1.04282E-08  3.19245E-09  7.26600E-10  1.32090E-10  4.81549E-07  3.79846E-07  1.71816E-07  5.01384E-08  1.09915E-08
 13.400  1.24837E-08  8.03008E-09  2.51852E-09  5.88242E-10  1.10753E-10  3.54137E-07  2.85506E-07  1.30210E-07  3.85992E-08  8.57349E-09
 13.500  9.24173E-09  6.13570E-09  1.97041E-09  4.71862E-10  9.18615E-11  2.58859E-07  2.13202E-07  9.80538E-08  2.95177E-08  6.64497E-09
 13.600  6.79590E-09  4.65249E-09  1.52898E-09  3.75078E-10  7.53751E-11  1.88073E-07  1.58180E-07  7.33722E-08  2.24230E-08  5.11730E-09
 13.700  4.96426E-09  3.50127E-09  1.17686E-09  2.95484E-10  6.11937E-11  1.35823E-07  1.16603E-07  5.45574E-08  1.69209E-08  3.91545E-09
 13.800  3.60251E-09  2.61534E-09  8.98611E-10  2.30735E-10  4.91654E-11  9.75033E-08  8.54047E-08  4.03124E-08  1.26849E-08  2.97649E-09
 13.900  2.59732E-09  1.93924E-09  6.80757E-10  1.78617E-10  3.91010E-11  6.95788E-08  6.21564E-08  2.96004E-08  9.44697E-09  2.24803E-09
 14.000  1.86056E-09  1.42751E-09  5.11720E-10  1.37098E-10  3.07892E-11  4.93583E-08  4.49508E-08  2.15994E-08  6.98970E-09  1.68682E-09
 14.100  1.32431E-09  1.04330E-09  3.81714E-10  1.04352E-10  2.40103E-11  3.48083E-08  3.23038E-08  1.56632E-08  5.13807E-09  1.25749E-09
 14.200  9.36671E-10  7.57112E-10  2.82591E-10  7.87768E-11  1.85478E-11  2.44039E-08  2.30701E-08  1.12882E-08  3.75260E-09  9.31353E-10
 14.300  6.58360E-10  5.45593E-10  2.07651E-10  5.89908E-11  1.41966E-11  1.70099E-08  1.63736E-08  8.08515E-09  2.72315E-09  6.85334E-10
 14.400  4.59879E-10  3.90457E-10  1.51465E-10  4.38248E-11  1.07689E-11  1.17876E-08  1.15492E-08  5.75549E-09  1.96351E-09  5.01043E-10
 14.500  3.19266E-10  2.77528E-10  1.09682E-10  3.23044E-11  8.09747E-12  8.12162E-09  8.09636E-09  4.07211E-09  1.40681E-09  3.63950E-10
 14.600  2.20300E-10  1.95932E-10  7.88573E-11  2.36302E-11  6.03677E-12  5.56376E-09  5.64125E-09  2.86361E-09  1.00161E-09  2.62672E-10
 14.700  1.51097E-10  1.37404E-10  5.62955E-11  1.71549E-11  4.46295E-12  3.78979E-09  3.90682E-09  2.00159E-09  7.08648E-10  1.88366E-10
 14.800  1.03013E-10  9.57244E-11  3.99087E-11  1.23617E-11  3.27249E-12  2.56683E-09  2.68937E-09  1.39065E-09  4.98258E-10  1.34221E-10
 14.900  6.98155E-11  6.62527E-11  2.80970E-11  8.84263E-12  2.38040E-12  1.72873E-09  1.84023E-09  9.60410E-10  3.48165E-10  9.50343E-11
 15.000  4.70385E-11  4.55589E-11  1.96466E-11  6.27982E-12  1.71793E-12  1.15776E-09  1.25171E-09  6.59328E-10  2.41790E-10  6.68647E-11
 15.100  3.15077E-11  3.11285E-11  1.36453E-11  4.42811E-12  1.23029E-12  7.71048E-10  8.46374E-10  4.49951E-10  1.66890E-10  4.67502E-11
 15.200  2.09828E-11  2.11343E-11  9.41407E-12  3.10054E-12  8.74422E-13  5.10659E-10  5.68932E-10  3.05255E-10  1.14493E-10  3.24830E-11
 15.300  1.38935E-11  1.42589E-11  6.45215E-12  2.15597E-12  6.16882E-13  3.36341E-10  3.80201E-10  2.05875E-10  7.80720E-11  2.24300E-11
 15.400  9.14706E-12  9.56046E-12  4.39332E-12  1.48893E-12  4.32021E-13  2.20312E-10  2.52601E-10  1.38039E-10  5.29175E-11  1.53928E-11
 15.500  5.98809E-12  6.37076E-12  2.97216E-12  1.02134E-12  3.00386E-13  1.43522E-10  1.66856E-10  9.20176E-11  3.56536E-11  1.04987E-11
 15.600  3.89807E-12  4.21936E-12  1.99788E-12  6.95919E-13  2.07384E-13  9.29888E-11  1.09584E-10  6.09847E-11  2.38794E-11  7.11702E-12
 15.700  2.52339E-12  2.77758E-12  1.33447E-12  4.71061E-13  1.42180E-13  5.99223E-11  7.15586E-11  4.01851E-11  1.58992E-11  4.79536E-12
 15.800  1.62445E-12  1.81750E-12  8.85770E-13  3.16779E-13  9.68072E-14  3.84063E-11  4.64624E-11  2.63278E-11  1.05237E-11  3.21159E-12
 15.900  1.03999E-12  1.18220E-12  5.84287E-13  2.11653E-13  6.54676E-14  2.44840E-11  2.99971E-11  1.71507E-11  6.92504E-12  2.13800E-12
 16.000  6.62175E-13  7.64421E-13  3.83045E-13  1.40512E-13  4.39777E-14  1.55253E-11  1.92578E-11  1.11091E-11  4.53051E-12  1.41482E-12
 16.100  4.19322E-13  4.91387E-13  2.49582E-13  9.26926E-14  2.93468E-14  9.79227E-12  1.22941E-11  7.15505E-12  2.94685E-12  9.30707E-13
 16.200  2.64100E-13  3.14037E-13  1.61636E-13  6.07646E-14  1.94557E-14  6.14363E-12  7.80485E-12  4.58247E-12  1.90575E-12  6.08636E-13
 16.300  1.65444E-13  1.99537E-13  1.04051E-13  3.95870E-14  1.28151E-14  3.83419E-12  4.92741E-12  2.91842E-12  1.22542E-12  3.95684E-13
 16.400  1.03087E-13  1.26057E-13  6.65822E-14  2.56316E-14  8.38717E-15  2.38033E-12  3.09365E-12  1.84829E-12  7.83478E-13  2.55741E-13
 16.500  6.38912E-14  7.91826E-14  4.23538E-14  1.64946E-14  5.45455E-15  1.47004E-12  1.93167E-12  1.16406E-12  4.98086E-13  1.64333E-13
 16.600  3.93891E-14  4.94571E-14  2.67835E-14  1.05505E-14  3.52516E-15  9.03138E-13  1.19955E-12  7.29080E-13  3.14868E-13  1.04987E-13
 16.700  2.41556E-14  3.07170E-14  1.68385E-14  6.70795E-15  2.26413E-15  5.51979E-13  7.40859E-13  4.54128E-13  1.97930E-13  6.66881E-14
 16.800  1.47360E-14  1.89712E-14  1.05248E-14  4.23950E-15  1.44528E-15  3.35617E-13  4.55089E-13  2.81317E-13  1.23727E-13  4.21185E-14
 16.900  8.94276E-15  1.16518E-14  6.54063E-15  2.66357E-15  9.16972E-16  2.03014E-13  2.78042E-13  1.73315E-13  7.69131E-14  2.64497E-14
 17.000  5.39888E-15  7.11680E-15  4.04142E-15  1.66363E-15  5.78274E-16  1.22173E-13  1.68962E-13  1.06197E-13  4.75474E-14  1.65161E-14
 17.100  3.24254E-15  4.32302E-15  2.48299E-15  1.03303E-15  3.62500E-16  7.31483E-14  1.02127E-13  6.47187E-14  2.92318E-14  1.02551E-14
 17.200  1.93744E-15  2.61164E-15  1.51690E-15  6.37749E-16  2.25891E-16  4.35729E-14  6.14012E-14  3.92283E-14  1.78730E-14  6.33191E-15
 17.300  1.15170E-15  1.56918E-15  9.21494E-16  3.91454E-16  1.39935E-16  2.58238E-14  3.67204E-14  2.36500E-14  1.08683E-14  3.88777E-15
 17.400  6.81125E-16  9.37740E-16  5.56671E-16  2.38904E-16  8.61808E-17  1.52273E-14  2.18444E-14  1.41819E-14  6.57291E-15  2.37382E-15
 17.500  4.00776E-16  5.57381E-16  3.34416E-16  1.44975E-16  5.27678E-17  8.93374E-15  1.29266E-14  8.45891E-15  3.95364E-15  1.44142E-15
 17.600  2.34624E-16  3.29529E-16  1.99790E-16  8.74794E-17  3.21232E-17  5.21503E-15  7.60938E-15  5.01861E-15  2.36530E-15  8.70431E-16
 17.700  1.36661E-16  1.93784E-16  1.18705E-16  5.24897E-17  1.94436E-17  3.02901E-15  4.45599E-15  2.96175E-15  1.40747E-15  5.22749E-16
 17.800  7.92006E-17  1.13354E-16  7.01430E-17  3.13193E-17  1.17020E-17  1.75053E-15  2.59584E-15  1.73868E-15  8.33026E-16  3.12231E-16
 17.900  4.56699E-17  6.59575E-17  4.12226E-17  1.85838E-17  7.00297E-18  1.00664E-15  1.50438E-15  1.01532E-15  4.90408E-16  1.85478E-16
 18.000  2.62034E-17  3.81773E-17  2.40952E-17  1.09661E-17  4.16734E-18  5.75993E-16  8.67347E-16  5.89800E-16  2.87173E-16  1.09585E-16
 18.100  1.49595E-17  2.19822E-17  1.40083E-17  6.43542E-18  2.46607E-18  3.27949E-16  4.97497E-16  3.40829E-16  1.67273E-16  6.43970E-17
 18.200  8.49800E-18  1.25914E-17  8.10039E-18  3.75599E-18  1.45122E-18  1.85800E-16  2.83896E-16  1.95932E-16  9.69193E-17  3.76393E-17
 18.300  4.80355E-18  7.17501E-18  4.65914E-18  2.18023E-18  8.49293E-19  1.04748E-16  1.61178E-16  1.12051E-16  5.58608E-17  2.18820E-17
 18.400  2.70184E-18  4.06747E-18  2.66560E-18  1.25871E-18  4.94300E-19  5.87632E-17  9.10413E-17  6.37498E-17  3.20275E-17  1.26536E-17
 18.500  1.51222E-18  2.29398E-18  1.51699E-18  7.22775E-19  2.86117E-19  3.28046E-17  5.11640E-17  3.60828E-17  1.82670E-17  7.27826E-18
 18.600  8.42239E-19  1.28715E-18  8.58778E-19  4.12806E-19  1.64714E-19  1.82238E-17  2.86082E-17  2.03183E-17  1.03644E-17  4.16426E-18
 18.700  4.66795E-19  7.18534E-19  4.83612E-19  2.34511E-19  9.43106E-20  1.00744E-17  1.59156E-17  1.13827E-17  5.85012E-18  2.37003E-18
 18.800  2.57450E-19  3.99075E-19  2.70920E-19  1.32516E-19  5.37089E-20  5.54227E-18  8.80990E-18  6.34433E-18  3.28499E-18  1.34178E-18
 18.900  1.41299E-19  2.20526E-19  1.50981E-19  7.44846E-20  3.04226E-20  3.03420E-18  4.85221E-18  3.51812E-18  1.83510E-18  7.55668E-19
 19.000  7.71746E-20  1.21246E-19  8.37047E-20  4.16457E-20  1.71405E-20  1.65308E-18  2.65910E-18  1.94101E-18  1.01988E-18  4.23359E-19
 19.100  4.19470E-20  6.63270E-20  4.61670E-20  2.31626E-20  9.60589E-21  8.96278E-19  1.44999E-18  1.06548E-18  5.63908E-19  2.35951E-19
 19.200  2.26895E-20  3.61021E-20  2.53324E-20  1.28153E-20  5.35484E-21  4.83610E-19  7.86747E-19  5.81927E-19  3.10202E-19  1.30821E-19
 19.300  1.22138E-20  1.95524E-20  1.38290E-20  7.05344E-21  2.96934E-21  2.59690E-19  4.24768E-19  3.16230E-19  1.69771E-19  7.21579E-20
 19.400  6.54305E-21  1.05367E-20  7.51079E-21  3.86200E-21  1.63791E-21  1.38781E-19  2.28202E-19  1.70984E-19  9.24426E-20  3.95957E-20
 19.500  3.48837E-21  5.64998E-21  4.05851E-21  2.10365E-21  8.98752E-22  7.38106E-20  1.21996E-19  9.19883E-20  5.00815E-20  2.16160E-20
 19.600  1.85089E-21  3.01465E-21  2.18193E-21  1.13996E-21  4.90595E-22  3.90687E-20  6.48989E-20  4.92424E-20  2.69950E-20  1.17401E-20
 19.700  9.77371E-22  1.60060E-21  1.16713E-21  6.14568E-22  2.66407E-22  2.05809E-20  3.43556E-20  2.62290E-20  1.44777E-20  6.34380E-21
 19.800  5.13643E-22  8.45642E-22  6.21160E-22  3.29627E-22  1.43918E-22  1.07902E-20  1.80981E-20  1.39016E-20  7.72553E-21  3.41043E-21
 19.900  2.68654E-22  4.44588E-22  3.28930E-22  1.75895E-22  7.73469E-23  5.63025E-21  9.48746E-21  7.33158E-21  4.10183E-21  1.82414E-21
  67 199 200   0.100
  0.000  4.96450E-02 -2.48253E-16 -3.74700E-16 -5.87936E-16 -5.72196E-17  9.19470E-02 -4.80991E-16 -7.28584E-16 -5.37899E-16 -2.37461E-15
  0.100  4.96481E-02 -1.96378E-05 -3.27895E-09  1.10358E-12  6.00806E-16  9.20943E-02 -1.72956E-06  1.28697E-08 -2.16250E-12  7.78186E-15
  0.200  4.96589E-02 -7.76880E-05 -5.16436E-08  7.01894E-11  2.00054E-14  9.25287E-02 -6.39725E-06  2.03094E-07 -1.37036E-10 -6.37569E-14
  0.300  4.96820E-02 -1.71592E-04 -2.54640E-07  7.91004E-10  5.17129E-13  9.32286E-02 -1.25002E-05  1.00474E-06 -1.54641E-09 -1.25371E-12
  0.400  4.97246E-02 -2.97190E-04 -7.75398E-07  4.37826E-09  5.07789E-12  9.41588E-02 -1.77283E-05  3.07426E-06 -8.57376E-09 -1.22716E-11
  0.500  4.97958E-02 -4.48871E-04 -1.80375E-06  1.63823E-08  2.95440E-11  9.52730E-02 -1.92360E-05  7.19781E-06 -3.21468E-08 -7.17994E-11
  0.600  4.99058E-02 -6.19783E-04 -3.52290E-06  4.77731E-08  1.23350E-10  9.65163E-02 -1.39844E-05  1.41762E-05 -9.39680E-08 -3.01212E-10
  0.700  5.00650E-02 -8.02089E-04 -6.07350E-06  1.17133E-07  4.08897E-10  9.78281E-02  8.79548E-07  2.46998E-05 -2.31002E-07 -1.00461E-09
  0.800  5.02829E-02 -9.87262E-04 -9.51911E-06  2.52653E-07  1.14318E-09  9.91452E-02  2.76458E-05  3.92285E-05 -4.99653E-07 -2.82774E-09
  0.900  5.05674E-02 -1.16642E-03 -1.38172E-05  4.93613E-07  2.80255E-09  1.00406E-01  6.77027E-05  5.78877E-05 -9.78964E-07 -6.98535E-09
  1.000  5.09235E-02 -1.33066E-03 -1.87992E-05  8.91074E-07  6.18709E-09  1.01553E-01  1.21273E-04  8.03947E-05 -1.77219E-06 -1.55510E-08
  1.100  5.13530E-02 -1.47146E-03 -2.41622E-05  1.50752E-06  1.25358E-08  1.02538E-01  1.87255E-04  1.06023E-04 -3.00614E-06 -3.17956E-08
  1.200  5.18540E-02 -1.58096E-03 -2.94737E-05  2.41531E-06  2.36391E-08  1.03320E-01  2.63183E-04  1.33608E-04 -4.82782E-06 -6.05438E-08
  1.300  5.24205E-02 -1.65236E-03 -3.41902E-05  3.69389E-06  4.19321E-08  1.03873E-01  3.45322E-04  1.61600E-04 -7.39812E-06 -1.08508E-07
  1.400  5.30427E-02 -1.68018E-03 -3.76872E-05  5.42579E-06  7.05487E-08  1.04185E-01  4.28896E-04  1.88153E-04 -1.08826E-05 -1.84545E-07
  1.500  5.37071E-02 -1.66056E-03 -3.93003E-05  7.69164E-06  1.13321E-07  1.04257E-01  5.08426E-04  2.11250E-04 -1.54393E-05 -2.99780E-07
  1.600  5.43974E-02 -1.59137E-03 -3.83721E-05  1.05644E-05  1.74709E-07  1.04104E-01  5.78165E-04  2.28854E-04 -2.12050E-05 -4.67545E-07
  1.700  5.50951E-02 -1.47243E-03 -3.43026E-05  1.41032E-05  2.59653E-07  1.03753E-01  6.32587E-04  2.39068E-04 -2.82796E-05 -7.03073E-07
  1.800  5.57803E-02 -1.30547E-03 -2.65979E-05  1.83473E-05  3.73347E-07  1.03243E-01  6.66901E-04  2.40297E-04 -3.67106E-05 -1.02292E-06
  1.900  5.64331E-02 -1.09416E-03 -1.49140E-05  2.33108E-05  5.20957E-07  1.02618E-01  6.77534E-04  2.31396E-04 -4.64789E-05 -1.44413E-06
  2.000  5.70340E-02 -8.43965E-04  9.07546E-07  2.89776E-05  7.07281E-07  1.01930E-01  6.62552E-04  2.11796E-04 -5.74864E-05 -1.98305E-06
  2.100  5.75655E-02 -5.61950E-04  2.08164E-05  3.52988E-05  9.36399E-07  1.01229E-01  6.21978E-04  1.81595E-04 -6.95475E-05 -2.65401E-06
  2.200  5.80126E-02 -2.56531E-04  4.45421E-05  4.21907E-05  1.21134E-06  1.00566E-01  5.57966E-04  1.41610E-04 -8.23857E-05 -3.46776E-06
  2.300  5.83636E-02  6.28602E-05  7.15965E-05  4.95353E-05  1.53378E-06  9.99842E-02  4.74813E-04  9.33789E-05 -9.56347E-05 -4.42989E-06
  2.400  5.86106E-02  3.86141E-04  1.01290E-04  5.71829E-05  1.90386E-06  9.95188E-02  3.78807E-04  3.91245E-05 -1.08846E-04 -5.53922E-06
  2.500  5.87500E-02  7.02982E-04  1.32759E-04  6.49558E-05  2.32006E-06  9.91955E-02  2.77896E-04 -1.83382E-05 -1.21504E-04 -6.78646E-06
  2.600  5.87823E-02  1.00322E-03  1.65004E-04  7.26541E-05  2.77921E-06  9.90280E-02  1.81204E-04 -7.57312E-05 -1.33042E-04 -8.15308E-06
  2.700  5.87124E-02  1.27727E-03  1.96934E-04  8.00635E-05  3.27665E-06  9.90175E-02  9.84274E-05 -1.29482E-04 -1.42870E-04 -9.61071E-06
  2.800  5.85490E-02  1.51653E-03  2.27415E-04  8.69624E-05  3.80646E-06  9.91534E-02  3.91354E-05 -1.75921E-04 -1.50400E-04 -1.11210E-05
  2.900  5.83045E-02  1.71369E-03  2.55327E-04  9.31315E-05  4.36181E-06  9.94140E-02  1.20481E-05 -2.11496E-04 -1.55081E-04 -1.26364E-05
  3.000  5.79939E-02  1.86309E-03  2.79607E-04  9.83617E-05  4.93535E-06  9.97685E-02  2.43268E-05 -2.32998E-04 -1.56425E-04 -1.41009E-05
  3.100  5.76346E-02  1.96091E-03  2.99308E-04  1.02464E-04  5.51963E-06  1.00180E-01  8.09452E-05 -2.37773E-04 -1.54042E-04 -1.54531E-05
  3.200  5.72451E-02  2.00535E-03  3.13635E-04  1.05274E-04  6.10753E-06  1.00606E-01  1.84191E-04 -2.23925E-04 -1.47667E-04 -1.66277E-05
  3.300  5.68446E-02  1.99672E-03  3.21986E-04  1.06665E-04  6.69262E-06  1.01006E-01  3.33342E-04 -1.90472E-04 -1.37185E-04 -1.75599E-05
  3.400  5.64517E-02  1.93740E-03  3.23985E-04  1.06548E-04  7.26947E-06  1.01338E-01  5.24558E-04 -1.37467E-04 -1.22649E-04 -1.81888E-05
  3.500  5.60839E-02  1.83180E-03  3.19508E-04  1.04878E-04  7.83391E-06  1.01568E-01  7.50996E-04 -6.60544E-05 -1.04291E-04 -1.84615E-05
  3.600  5.57563E-02  1.68617E-03  3.08692E-04  1.01659E-04  8.38320E-06  1.01667E-01  1.00316E-03  2.15361E-05 -8.25221E-05 -1.83375E-05
  3.700  5.54812E-02  1.50836E-03  2.91948E-04  9.69448E-05  8.91614E-06  1.01615E-01  1.26948E-03  1.22068E-04 -5.79311E-05 -1.77923E-05
  3.800  5.52674E-02  1.30750E-03  2.69954E-04  9.08385E-05  9.43316E-06  1.01400E-01  1.53703E-03  2.31447E-04 -3.12625E-05 -1.68206E-05
  3.900  5.51193E-02  1.09369E-03  2.43646E-04  8.34938E-05  9.93645E-06  1.01021E-01  1.79243E-03  3.44930E-04 -3.39219E-06 -1.54389E-05
  4.000  5.50366E-02  8.77570E-04  2.14193E-04  7.51116E-05  1.04300E-05  1.00484E-01  2.02278E-03  4.57396E-04  2.47084E-05 -1.36863E-05
  4.100  5.50143E-02  6.69911E-04  1.82964E-04  6.59365E-05  1.09196E-05  9.98051E-02  2.21659E-03  5.63654E-04  5.20164E-05 -1.16241E-05
  4.200  5.50422E-02  4.81183E-04  1.51487E-04  5.62520E-05  1.14134E-05  9.90033E-02  2.36468E-03  6.58763E-04  7.75069E-05 -9.33383E-06
  4.300  5.51055E-02  3.21143E-04  1.21397E-04  4.63739E-05  1.19215E-05  9.81019E-02  2.46087E-03  7.38362E-04  1.00207E-04 -6.91361E-06
  4.400  5.51846E-02  1.98436E-04  9.43742E-05  3.66420E-05  1.24564E-05  9.71251E-02  2.50252E-03  7.98963E-04  1.19252E-04 -4.47274E-06
  4.500  5.52562E-02  1.20249E-04  7.20770E-05  2.74109E-05  1.30331E-05  9.60951E-02  2.49081E-03  8.38197E-04  1.33932E-04 -2.12516E-06
  4.600  5.52937E-02  9.20049E-05  5.60714E-05  1.90389E-05  1.36688E-05  9.50306E-02  2.43071E-03  8.54996E-04  1.43745E-04  1.80857E-08
  4.700  5.52684E-02  1.17143E-04  4.77585E-05  1.18756E-05  1.43828E-05  9.39441E-02  2.33072E-03  8.49683E-04  1.48430E-04  1.85682E-06
  4.800  5.51504E-02  1.96966E-04  4.83036E-05  6.24935E-06  1.51960E-05  9.28412E-02  2.20231E-03  8.23971E-04  1.47989E-04  3.30956E-06
  4.900  5.49102E-02  3.30582E-04  5.85723E-05  2.45352E-06  1.61298E-05  9.17192E-02  2.05915E-03  7.80861E-04  1.42702E-04  4.32052E-06
  5.000  5.45193E-02  5.14933E-04  7.90754E-05  7.33269E-07  1.72055E-05  9.05678E-02  1.91618E-03  7.24455E-04  1.33113E-04  4.86519E-06
  5.100  5.39524E-02  7.44922E-04  1.09928E-04  1.27298E-06  1.84426E-05  8.93689E-02  1.78853E-03  6.59685E-04  1.20012E-04  4.95392E-06
  5.200  5.31878E-02  1.01362E-03  1.50827E-04  4.18531E-06  1.98574E-05  8.80982E-02  1.69052E-03  5.91985E-04  1.04387E-04  4.63312E-06
  5.300  5.22090E-02  1.31257E-03  2.01042E-04  9.50240E-06  2.14612E-05  8.67270E-02  1.63458E-03  5.26928E-04  8.73764E-05  3.98374E-06
  5.400  5.10053E-02  1.63213E-03  2.59437E-04  1.71701E-05  2.32585E-05  8.52239E-02  1.63047E-03  4.69853E-04  7.01992E-05  3.11707E-06
  5.500  4.95726E-02  1.96187E-03  3.24503E-04  2.70459E-05  2.52458E-05  8.35575E-02  1.68453E-03  4.25516E-04  5.40834E-05  2.16799E-06
  5.600  4.79135E-02  2.29107E-03  3.94414E-04  3.89002E-05  2.74099E-05  8.16988E-02  1.79932E-03  3.97786E-04  4.01920E-05  1.28624E-06
  5.700  4.60378E-02  2.60909E-03  4.67107E-04  5.24231E-05  2.97272E-05  7.96232E-02  1.97344E-03  3.89403E-04  2.95526E-05  6.26044E-07
  5.800  4.39618E-02  2.90586E-03  5.40361E-04  6.72339E-05  3.21635E-05  7.73123E-02  2.20169E-03  4.01828E-04  2.29955E-05  3.35204E-07
  5.900  4.17077E-02  3.17229E-03  6.11898E-04  8.28951E-05  3.46740E-05  7.47561E-02  2.47542E-03  4.35177E-04  2.11042E-05  5.44225E-07
  6.000  3.93032E-02  3.40055E-03  6.79485E-04  9.89299E-05  3.72047E-05  7.19533E-02  2.78316E-03  4.88260E-04  2.41837E-05  1.35652E-06
  6.100  3.67799E-02  3.58444E-03  7.41025E-04  1.14842E-04  3.96939E-05  6.89122E-02  3.11140E-03  5.58693E-04  3.22457E-05  2.84035E-06
  6.200  3.41725E-02  3.71949E-03  7.94653E-04  1.30135E-04  4.20743E-05  6.56503E-02  3.44549E-03  6.43095E-04  4.50151E-05  5.02332E-06
  6.300  3.15171E-02  3.80313E-03  8.38808E-04  1.44335E-04  4.42764E-05  6.21940E-02  3.77052E-03  7.37341E-04  6.19532E-05  7.88960E-06
  6.400  2.88504E-02  3.83468E-03  8.72298E-04  1.57012E-04  4.62312E-05  5.85768E-02  4.07225E-03  8.36845E-04  8.22983E-05  1.13804E-05
  6.500  2.62077E-02  3.81524E-03  8.94334E-04  1.67793E-04  4.78735E-05  5.48384E-02  4.33788E-03  9.36862E-04  1.05119E-04  1.53973E-05
  6.600  2.36224E-02  3.74758E-03  9.04554E-04  1.76380E-04  4.91454E-05  5.10228E-02  4.55670E-03  1.03277E-03  1.29374E-04  1.98086E-05
  6.700  2.11246E-02  3.63587E-03  9.03016E-04  1.82563E-04  4.99990E-05  4.71760E-02  4.72057E-03  1.12035E-03  1.53982E-04  2.44572E-05
  6.800  1.87405E-02  3.48546E-03  8.90173E-04  1.86220E-04  5.03992E-05  4.33443E-02  4.82419E-03  1.19597E-03  1.77879E-04  2.91712E-05
  6.900  1.64916E-02  3.30250E-03  8.66834E-04  1.87323E-04  5.03248E-05  3.95726E-02  4.86518E-03  1.25677E-03  2.00083E-04  3.37735E-05
  7.000  1.43949E-02  3.09367E-03  8.34106E-04  1.85932E-04  4.97704E-05  3.59023E-02  4.84399E-03  1.30075E-03  2.19741E-04  3.80931E-05
  7.100  1.24621E-02  2.86587E-03  7.93325E-04  1.82190E-04  4.87459E-05  3.23707E-02  4.76359E-03  1.32679E-03  2.36166E-04  4.19742E-05
  7.200  1.07002E-02  2.62589E-03  7.45985E-04  1.76310E-04  4.72762E-05  2.90091E-02  4.62912E-03  1.33467E-03  2.48864E-04  4.52847E-05
  7.300  9.11164E-03  2.38018E-03  6.93664E-04  1.68561E-04  4.53998E-05  2.58431E-02  4.44741E-03  1.32494E-03  2.57540E-04  4.79219E-05
  7.400  7.69484E-03  2.13462E-03  6.37949E-04  1.59255E-04  4.31667E-05  2.28914E-02  4.22645E-03  1.29883E-03  2.62099E-04  4.98166E-05
  7.500  6.44468E-03  1.89440E-03  5.80376E-04  1.48728E-04  4.06360E-05  2.01664E-02  3.97487E-03  1.25815E-03  2.62627E-04  5.09347E-05
  7.600  5.35317E-03  1.66385E-03  5.22373E-04  1.37323E-04  3.78727E-05  1.76744E-02  3.70145E-03  1.20505E-03  2.59372E-04  5.12762E-05
  7.700  4.41008E-03  1.44643E-03  4.65214E-04  1.25379E-04  3.49450E-05  1.54160E-02  3.41471E-03  1.14196E-03  2.52711E-04  5.08723E-05
  7.800  3.60359E-03  1.24472E-03  4.09992E-04  1.13216E-04  3.19215E-05  1.33867E-02  3.12253E-03  1.07138E-03  2.43114E-04  4.97813E-05
  7.900  2.92092E-03  1.06043E-03  3.57596E-04  1.01124E-04  2.88678E-05  1.15783E-02  2.83193E-03  9.95749E-04  2.31112E-04  4.80829E-05
  8.000  2.34884E-03  8.94489E-04  3.08708E-04  8.93547E-05  2.58451E-05  9.97911E-03  2.54883E-03  9.17386E-04  2.17263E-04  4.58717E-05
  8.100  1.87418E-03  7.47149E-04  2.63806E-04  7.81170E-05  2.29073E-05  8.57498E-03  2.27801E-03  8.38359E-04  2.02117E-04  4.32515E-05
  8.200  1.48417E-03  6.18065E-04  2.23175E-04  6.75749E-05  2.01005E-05  7.35034E-03  2.02310E-03  7.60451E-04  1.86199E-04  4.03287E-05
  8.300  1.16679E-03  5.06434E-04  1.86930E-04  5.78473E-05  1.74616E-05  6.28872E-03  1.78662E-03  6.85129E-04  1.69980E-04  3.72074E-05
  8.400  9.10919E-04  4.11103E-04  1.55038E-04  4.90099E-05  1.50180E-05  5.37342E-03  1.57006E-03  6.13528E-04  1.53873E-04  3.39845E-05
  8.500  7.06519E-04  3.30681E-04  1.27344E-04  4.10995E-05  1.27882E-05  4.58804E-03  1.37405E-03  5.46473E-04  1.38216E-04  3.07469E-05
  8.600  5.44679E-04  2.63638E-04  1.03604E-04  3.41189E-05  1.07818E-05  3.91690E-03  1.19849E-03  4.84495E-04  1.23279E-04  2.75686E-05
  8.700  4.17628E-04  2.08392E-04  8.35047E-05  2.80427E-05  9.00108E-06  3.34528E-03  1.04270E-03  4.27873E-04  1.09258E-04  2.45102E-05
  8.800  3.18696E-04  1.63375E-04  6.66943E-05  2.28237E-05  7.44138E-06  2.85969E-03  9.05596E-04  3.76670E-04  9.62847E-05  2.16180E-05
  8.900  2.42250E-04  1.27089E-04  5.27996E-05  1.83982E-05  6.09284E-06  2.44789E-03  7.85777E-04  3.30779E-04  8.44319E-05  1.89252E-05
  9.000  1.83600E-04  9.81479E-05  4.14464E-05  1.46924E-05  4.94154E-06  2.09900E-03  6.81694E-04  2.89964E-04  7.37245E-05  1.64525E-05
  9.100  1.38893E-04  7.52950E-05  3.22726E-05  1.16269E-05  3.97069E-06  1.80343E-03  5.91718E-04  2.53900E-04  6.41482E-05  1.42101E-05
  9.200  1.05010E-04  5.74218E-05  2.49395E-05  9.12089E-06  3.16184E-06  1.55286E-03  5.14227E-04  2.22202E-04  5.56584E-05  1.21995E-05
  9.300  7.94556E-05  4.35689E-05  1.91381E-05  7.09569E-06  2.49587E-06  1.34011E-03  4.47661E-04  1.94458E-04  4.81895E-05  1.04150E-05
  9.400  6.02579E-05  3.29214E-05  1.45934E-05  5.47708E-06  1.95381E-06  1.15908E-03  3.90559E-04  1.70251E-04  4.16620E-05  8.84571E-06
  9.500  4.58762E-05  2.48000E-05  1.10662E-05  4.19710E-06  1.51747E-06  1.00460E-03  3.41590E-04  1.49172E-04  3.59892E-05  7.47729E-06
  9.600  3.51196E-05  1.86475E-05  8.35216E-06  3.19507E-06  1.17000E-06  8.72322E-04  2.99556E-04  1.30836E-04  3.10819E-05  6.29314E-06
  9.700  2.70763E-05  1.40139E-05  6.28015E-06  2.41805E-06  8.96093E-07  7.58629E-04  2.63404E-04  1.14887E-04  2.68523E-05  5.27564E-06
  9.800  2.10548E-05  1.05414E-05  4.70930E-06  1.82078E-06  6.82257E-07  6.60518E-04  2.32216E-04  1.01005E-04  2.32171E-05  4.40701E-06
  9.900  1.65343E-05  7.94904E-06  3.52552E-06  1.36529E-06  5.16800E-07  5.75511E-04  2.05205E-04  8.89043E-05  2.00985E-05  3.66998E-06
 10.000  1.31257E-05  6.01896E-06  2.63784E-06  1.02035E-06  3.89807E-07  5.01566E-04  1.81701E-04  7.83338E-05  1.74260E-05  3.04820E-06
 10.100  1.05396E-05  4.58432E-06  1.97475E-06  7.60680E-07  2.93025E-07  4.37010E-04  1.61141E-04  6.90769E-05  1.51360E-05  2.52655E-06
 10.200  8.56178E-06  3.51846E-06  1.48079E-06  5.66140E-07  2.19709E-07  3.80471E-04  1.43059E-04  6.09470E-05  1.31727E-05  2.09123E-06
 10.300  7.03431E-06  2.72609E-06  1.11344E-06  4.20931E-07  1.64432E-07  3.30825E-04  1.27065E-04  5.37855E-05  1.14869E-05  1.72983E-06
 10.400  5.84103E-06  2.13596E-06  8.40477E-07  3.12823E-07  1.22899E-07  2.87147E-04  1.12846E-04  4.74579E-05  1.00364E-05  1.43131E-06
 10.500  4.89664E-06  1.69511E-06  6.37658E-07  2.32470E-07  9.17611E-08  2.48675E-04  1.00142E-04  4.18513E-05  8.78470E-06  1.18590E-06
 10.600  4.13861E-06  1.36427E-06  4.86889E-07  1.72803E-07  6.84411E-08  2.14777E-04  8.87474E-05  3.68708E-05  7.70082E-06  9.85037E-07
 10.700  3.52114E-06  1.11439E-06  3.74720E-07  1.28522E-07  5.09783E-08  1.84921E-04  7.84948E-05  3.24371E-05  6.75859E-06  8.21254E-07
 10.800  3.01073E-06  9.24007E-07  2.91178E-07  9.56795E-08  3.78968E-08  1.58656E-04  6.92508E-05  2.84838E-05  5.93606E-06  6.88095E-07
 10.900  2.58289E-06  7.77274E-07  2.28868E-07  7.13451E-08  2.80936E-08  1.35596E-04  6.09080E-05  2.49554E-05  5.21495E-06  5.80011E-07
 11.000  2.21974E-06  6.62507E-07  1.82300E-07  5.33473E-08  2.07482E-08  1.15403E-04  5.33796E-05  2.18052E-05  4.58011E-06  4.92272E-07
 11.100  1.90823E-06  5.71111E-07  1.47385E-07  4.00730E-08  1.52513E-08  9.77775E-05  4.65942E-05  1.89939E-05  4.01911E-06  4.20892E-07
 11.200  1.63878E-06  4.96800E-07  1.21071E-07  3.03200E-08  1.11493E-08  8.24525E-05  4.04919E-05  1.64877E-05  3.52175E-06  3.62544E-07
 11.300  1.40435E-06  4.35011E-07  1.01076E-07  2.31876E-08  8.10332E-09  6.91852E-05  3.50209E-05  1.42575E-05  3.07973E-06  3.14485E-07
 11.400  1.19968E-06  3.82472E-07  8.56953E-08  1.79971E-08  5.85768E-09  5.77538E-05  3.01352E-05  1.22779E-05  2.68626E-06  2.74494E-07
 11.500  1.02077E-06  3.36871E-07  7.36606E-08  1.42354E-08  4.21812E-09  4.79547E-05  2.57920E-05  1.05261E-05  2.33579E-06  2.40794E-07
 11.600  8.64495E-07  2.96608E-07  6.40351E-08  1.15140E-08  3.03564E-09  3.96006E-05  2.19512E-05  8.98159E-06  2.02373E-06  2.11994E-07
 11.700  7.28323E-07  2.60600E-07  5.61363E-08  9.53945E-09  2.19526E-09  3.25191E-05  1.85740E-05  7.62566E-06  1.74625E-06  1.87025E-07
 11.800  6.10116E-07  2.28135E-07  4.94757E-08  8.09173E-09  1.60796E-09  2.65518E-05  1.56226E-05  6.44083E-06  1.50008E-06  1.65082E-07
 11.900  5.08007E-07  1.98749E-07  4.37118E-08  7.00793E-09  1.20488E-09  2.15542E-05  1.30598E-05  5.41080E-06  1.28239E-06  1.45576E-07
 12.000  4.20314E-07  1.72148E-07  3.86132E-08  6.16969E-09  9.33153E-10  1.73948E-05  1.08494E-05  4.52023E-06  1.09063E-06  1.28081E-07
 12.100  3.45487E-07  1.48137E-07  3.40291E-08  5.49317E-09  7.52601E-10  1.39551E-05  8.95614E-06  3.75470E-06  9.22502E-07  1.12301E-07
 12.200  2.82080E-07  1.26576E-07  2.98652E-08  4.92104E-09  6.33248E-10  1.11289E-05  7.34594E-06  3.10061E-06  7.75860E-07  9.80291E-08
 12.300  2.28743E-07  1.07347E-07  2.60660E-08  4.41585E-09  5.53243E-10  8.82197E-06  5.98633E-06  2.54525E-06  6.48687E-07  8.51221E-08
 12.400  1.84215E-07  9.03347E-08  2.26006E-08  3.95471E-09  4.97137E-10  6.95118E-06  4.84666E-06  2.07675E-06  5.39075E-07  7.34784E-08
 12.500  1.47328E-07  7.54164E-08  1.94520E-08  3.52495E-09  4.54443E-10  5.44411E-06  3.89835E-06  1.68412E-06  4.45207E-07  6.30204E-08
 12.600  1.17009E-07  6.24559E-08  1.66099E-08  3.12076E-09  4.18426E-10  4.23805E-06  3.11506E-06  1.35729E-06  3.65362E-07  5.36824E-08
 12.700  9.22843E-08  5.13041E-08  1.40659E-08  2.74054E-09  3.85093E-10  3.27926E-06  2.47284E-06  1.08708E-06  2.97916E-07  4.54025E-08
 12.800  7.22800E-08  4.18019E-08  1.18103E-08  2.38498E-09  3.52385E-10  2.52208E-06  1.95017E-06  8.65205E-07  2.41346E-07  3.81181E-08
 12.900  5.62216E-08  3.37842E-08  9.83084E-09  2.05574E-09  3.19524E-10  1.92805E-06  1.52790E-06  6.84284E-07  1.94241E-07  3.17628E-08
 13.000  4.34310E-08  2.70847E-08  8.11207E-09  1.75449E-09  2.86524E-10  1.46507E-06  1.18924E-06  5.37779E-07  1.55303E-07  2.62663E-08
 13.100  3.33218E-08  2.15405E-08  6.63567E-09  1.48245E-09  2.53827E-10  1.10659E-06  9.19619E-07  4.19968E-07  1.23351E-07  2.15550E-08
 13.200  2.53929E-08  1.69958E-08  5.38107E-09  1.24008E-09  2.22044E-10  8.30835E-07  7.06508E-07  3.25891E-07  9.73260E-08  1.75531E-08
 13.300  1.92210E-08  1.33051E-08  4.32627E-09  1.02706E-09  1.91795E-10  6.20081E-07  5.39274E-07  2.51288E-07  7.62837E-08  1.41846E-08
 13.400  1.44526E-08  1.03353E-08  3.44874E-09  8.42313E-10  1.63606E-10  4.60044E-07  4.08976E-07  1.92538E-07  5.93958E-08  1.13750E-08
 13.500  1.07956E-08  7.96710E-09  2.72618E-09  6.84152E-10  1.37862E-10  3.39296E-07  3.08174E-07  1.46593E-07  4.59414E-08  9.05253E-09
 13.600  8.01139E-09  6.09526E-09  2.13721E-09  5.50443E-10  1.14797E-10  2.48770E-07  2.30737E-07  1.10909E-07  3.53008E-08  7.14981E-09
 13.700  5.90685E-09  4.62851E-09  1.66184E-09  4.38769E-10  9.44960E-11  1.81330E-07  1.71664E-07  8.33840E-08  2.69468E-08  5.60467E-09
 13.800  4.32732E-09  3.48890E-09  1.28184E-09  3.46584E-10  7.69239E-11  1.31403E-07  1.26909E-07  6.22979E-08  2.04354E-08  4.36079E-09
 13.900  3.15010E-09  2.61082E-09  9.80925E-10  2.71340E-10  6.19492E-11  9.46712E-08  9.32355E-08  4.62539E-08  1.53966E-08  3.36798E-09
 14.000  2.27876E-09  1.93976E-09  7.44813E-10  2.10588E-10  4.93731E-11  6.78143E-08  6.80700E-08  3.41284E-08  1.15251E-08  2.58222E-09
 14.100  1.63820E-09  1.43101E-09  5.61203E-10  1.62050E-10  3.89559E-11  4.82979E-08  4.93895E-08  2.50259E-08  8.57150E-09  1.96547E-09
 14.200  1.17047E-09  1.04833E-09  4.19667E-10  1.23662E-10  3.04384E-11  3.42020E-08  3.56151E-08  1.82382E-08  6.33401E-09  1.48533E-09
 14.300  8.31182E-10  7.62700E-10  3.11494E-10  9.35984E-11  2.35595E-11  2.40826E-08  2.55253E-08  1.32100E-08  4.65076E-09  1.11454E-09
 14.400  5.86685E-10  5.51120E-10  2.29511E-10  7.02773E-11  1.80685E-11  1.68616E-08  1.81828E-08  9.50972E-09  3.39320E-09  8.30452E-10
 14.500  4.11632E-10  3.95559E-10  1.67885E-10  5.23532E-11  1.37342E-11  1.17395E-08  1.28742E-08  6.80437E-09  2.46010E-09  6.14484E-10
 14.600  2.87099E-10  2.82022E-10  1.21932E-10  3.87004E-11  1.03493E-11  8.12775E-09  9.06087E-09  4.83924E-09  1.77243E-09  4.51559E-10
 14.700  1.99065E-10  1.99754E-10  8.79353E-11  2.83918E-11  7.73294E-12  5.59592E-09  6.33900E-09  3.42096E-09  1.26903E-09  3.29576E-10
 14.800  1.37222E-10  1.40566E-10  6.29782E-11  2.06742E-11  5.73047E-12  3.83148E-09  4.40850E-09  2.40390E-09  9.02992E-10  2.38927E-10
 14.900  9.40444E-11  9.82802E-11  4.47958E-11  1.49445E-11  4.21241E-12  2.60896E-09  3.04787E-09  1.67916E-09  6.38583E-10  1.72056E-10
 15.000  6.40837E-11  6.82788E-11  3.16476E-11  1.07250E-11  3.07216E-12  1.76680E-09  2.09485E-09  1.16598E-09  4.48838E-10  1.23083E-10
 15.100  4.34197E-11  4.71375E-11  2.22094E-11  7.64234E-12  2.22331E-12  1.18997E-09  1.43144E-09  8.04875E-10  3.13557E-10  8.74736E-11
 15.200  2.92528E-11  3.23398E-11  1.54832E-11  5.40771E-12  1.59686E-12  7.97132E-10  9.72473E-10  5.52349E-10  2.17728E-10  6.17636E-11
 15.300  1.95979E-11  2.20507E-11  1.07236E-11  3.80016E-12  1.13843E-12  5.31100E-10  6.56866E-10  3.76845E-10  1.50280E-10  4.33301E-11
 15.400  1.30566E-11  1.49433E-11  7.37929E-12  2.65235E-12  8.05711E-13  3.51955E-10  4.41150E-10  2.55616E-10  1.03107E-10  3.02046E-11
 15.500  8.65063E-12  1.00656E-11  5.04555E-12  1.83883E-12  5.66156E-13  2.31993E-10  2.94592E-10  1.72386E-10  7.03223E-11  2.09222E-11
 15.600  5.70001E-12  6.73937E-12  3.42808E-12  1.26640E-12  3.95031E-13  1.52107E-10  1.95612E-10  1.15589E-10  4.76795E-11  1.44017E-11
 15.700  3.73535E-12  4.48550E-12  2.31458E-12  8.66465E-13  2.73722E-13  9.92022E-11  1.29158E-10  7.70633E-11  3.21378E-11  9.85181E-12
 15.800  2.43461E-12  2.96781E-12  1.55308E-12  5.89002E-13  1.88374E-13  6.43577E-11  8.48032E-11  5.10864E-11  2.15360E-11  6.69785E-12
 15.900  1.57828E-12  1.95216E-12  1.03573E-12  3.97831E-13  1.28766E-13  4.15334E-11  5.53711E-11  3.36746E-11  1.43479E-11  4.52577E-12
 16.000  1.01767E-12  1.27664E-12  6.86520E-13  2.67010E-13  8.74374E-14  2.66638E-11  3.59540E-11  2.20725E-11  9.50390E-12  3.03953E-12
 16.100  6.52706E-13  8.30075E-13  4.52309E-13  1.78087E-13  5.89852E-14  1.70288E-11  2.32175E-11  1.43868E-11  6.25921E-12  2.02908E-12
 16.200  4.16413E-13  5.36634E-13  2.96221E-13  1.18043E-13  3.95343E-14  1.08191E-11  1.49108E-11  9.32507E-12  4.09878E-12  1.34644E-12
 16.300  2.64265E-13  3.44961E-13  1.92848E-13  7.77635E-14  2.63285E-14  6.83844E-12  9.52387E-12  6.01072E-12  2.66882E-12  8.88158E-13
 16.400  1.66831E-13  2.20502E-13  1.24813E-13  5.09173E-14  1.74233E-14  4.30016E-12  6.05018E-12  3.85301E-12  1.72793E-12  5.82404E-13
 16.500  1.04772E-13  1.40158E-13  8.03084E-14  3.31384E-14  1.14582E-14  2.69021E-12  3.82274E-12  2.45630E-12  1.11247E-12  3.79672E-13
 16.600  6.54577E-14  8.85944E-14  5.13741E-14  2.14387E-14  7.48877E-15  1.67444E-12  2.40240E-12  1.55734E-12  7.12230E-13  2.46070E-13
 16.700  4.06845E-14  5.56919E-14  3.26758E-14  1.37875E-14  4.86457E-15  1.03691E-12  1.50173E-12  9.82015E-13  4.53451E-13  1.58558E-13
 16.800  2.51572E-14  3.48169E-14  2.06644E-14  8.81486E-15  3.14081E-15  6.38867E-13  9.33730E-13  6.15876E-13  2.87099E-13  1.01582E-13
 16.900  1.54764E-14  2.16479E-14  1.29944E-14  5.60283E-15  2.01571E-15  3.91638E-13  5.77494E-13  3.84167E-13  1.80774E-13  6.47081E-14
 17.000  9.47241E-15  1.33870E-14  8.12524E-15  3.54063E-15  1.28596E-15  2.38876E-13  3.55288E-13  2.38347E-13  1.13202E-13  4.09851E-14
 17.100  5.76826E-15  8.23389E-15  5.05223E-15  2.22461E-15  8.15564E-16  1.44970E-13  2.17435E-13  1.47086E-13  7.05009E-14  2.58128E-14
 17.200  3.49488E-15  5.03727E-15  3.12401E-15  1.38977E-15  5.14216E-16  8.75415E-14  1.32374E-13  9.02845E-14  4.36689E-14  1.61658E-14
 17.300  2.10683E-15  3.06526E-15  1.92104E-15  8.63310E-16  3.22336E-16  5.25996E-14  8.01702E-14  5.51248E-14  2.69027E-14  1.00677E-14
 17.400  1.26370E-15  1.85538E-15  1.17482E-15  5.33262E-16  2.00894E-16  3.14479E-14  4.83023E-14  3.34797E-14  1.64844E-14  6.23509E-15
 17.500  7.54201E-16  1.11713E-15  7.14548E-16  3.27553E-16  1.24491E-16  1.87089E-14  2.89518E-14  2.02267E-14  1.00466E-14  3.84015E-15
 17.600  4.47883E-16  6.69098E-16  4.32243E-16  2.00079E-16  7.67083E-17  1.10754E-14  1.72642E-14  1.21560E-14  6.09031E-15  2.35213E-15
 17.700  2.64657E-16  3.98662E-16  2.60062E-16  1.21540E-16  4.69996E-17  6.52425E-15  1.02421E-14  7.26742E-15  3.67236E-15  1.43281E-15
 17.800  1.55615E-16  2.36298E-16  1.55628E-16  7.34252E-17  2.86359E-17  3.82444E-15  6.04524E-15  4.32223E-15  2.20265E-15  8.68057E-16
 17.900  9.10487E-17  1.39336E-16  9.26350E-17  4.41159E-17  1.73504E-17  2.23088E-15  3.54998E-15  2.55729E-15  1.31416E-15  5.23055E-16
 18.000  5.30102E-17  8.17389E-17  5.48466E-17  2.63621E-17  1.04544E-17  1.29498E-15  2.07412E-15  1.50524E-15  7.79947E-16  3.13471E-16
 18.100  3.07124E-17  4.77049E-17  3.23015E-17  1.56680E-17  6.26475E-18  7.48058E-16  1.20572E-15  8.81438E-16  4.60471E-16  1.86857E-16
 18.200  1.77070E-17  2.76998E-17  1.89237E-17  9.26211E-18  3.73362E-18  4.30027E-16  6.97382E-16  5.13508E-16  2.70439E-16  1.10788E-16
 18.300  1.01591E-17  1.60021E-17  1.10283E-17  5.44600E-18  2.21306E-18  2.46008E-16  4.01343E-16  2.97633E-16  1.58007E-16  6.53370E-17
 18.400  5.80036E-18  9.19767E-18  6.39356E-18  3.18515E-18  1.30469E-18  1.40057E-16  2.29820E-16  1.71632E-16  9.18390E-17  3.83281E-17
 18.500  3.29569E-18  5.25997E-18  3.68739E-18  1.85301E-18  7.65035E-19  7.93530E-17  1.30946E-16  9.84710E-17  5.31047E-17  2.23654E-17
 18.600  1.86353E-18  2.99299E-18  2.11566E-18  1.07233E-18  4.46201E-19  4.47437E-17  7.42406E-17  5.62106E-17  3.05493E-17  1.29821E-17
 18.700  1.04865E-18  1.69453E-18  1.20762E-18  6.17304E-19  2.58860E-19  2.51082E-17  4.18830E-17  3.19253E-17  1.74840E-17  7.49611E-18
 18.800  5.87268E-19  9.54606E-19  6.85786E-19  3.53504E-19  1.49381E-19  1.40223E-17  2.35120E-17  1.80412E-17  9.95532E-18  4.30580E-18
 18.900  3.27306E-19  5.35104E-19  3.87457E-19  2.01385E-19  8.57501E-20  7.79375E-18  1.31342E-17  1.01442E-17  5.63970E-18  2.46042E-18
 19.000  1.81548E-19  2.98469E-19  2.17795E-19  1.14131E-19  4.89655E-20  4.31125E-18  7.30103E-18  5.67542E-18  3.17869E-18  1.39865E-18
 19.100  1.00220E-19  1.65659E-19  1.21805E-19  6.43480E-20  2.78147E-20  2.37352E-18  4.03869E-18  3.15945E-18  1.78254E-18  7.90979E-19
 19.200  5.50613E-20  9.14936E-20  6.77781E-20  3.60936E-20  1.57179E-20  1.30053E-18  2.22320E-18  1.75012E-18  9.94574E-19  4.45022E-19
 19.300  3.01073E-20  5.02846E-20  3.75254E-20  2.01418E-20  8.83611E-21  7.09232E-19  1.21787E-18  9.64652E-19  5.52138E-19  2.49097E-19
 19.400  1.63846E-20  2.75013E-20  2.06720E-20  1.11827E-20  4.94178E-21  3.84949E-19  6.63924E-19  5.29087E-19  3.04984E-19  1.38717E-19
 19.500  8.87444E-21  1.49677E-20  1.13309E-20  6.17707E-21  2.74961E-21  2.07955E-19  3.60191E-19  2.88765E-19  1.67623E-19  7.68561E-20
 19.600  4.78403E-21  8.10668E-21  6.17996E-21  3.39482E-21  1.52205E-21  1.11812E-19  1.94470E-19  1.56829E-19  9.16690E-20  4.23661E-20
 19.700  2.56683E-21  4.36944E-21  3.35388E-21  1.85633E-21  8.38243E-22  5.98365E-20  1.04492E-19  8.47583E-20  4.98827E-20  2.32358E-20
 19.800  1.37075E-21  2.34374E-21  1.81117E-21  1.00996E-21  4.59303E-22  3.18717E-20  5.58760E-20  4.55843E-20  2.70098E-20  1.26795E-20
 19.900  7.28578E-22  1.25112E-21  9.73260E-22  5.46735E-22  2.50395E-22  1.68971E-20  2.97365E-20  2.43968E-20  1.45528E-20  6.88429E-21
  67 200 200   0.100
  0.000  4.91999E-02 -2.48253E-16 -4.37150E-16 -2.25167E-16 -9.94190E-16  9.31627E-02 -4.96507E-16 -7.07767E-16 -7.50556E-16 -2.08851E-15
  0.100  4.92072E-02 -2.23610E-05 -7.37216E-09  1.47460E-12  1.78811E-16  9.32924E-02 -9.70675E-06  2.33358E-08 -6.37322E-13  6.60886E-15
  0.200  4.92307E-02 -8.85389E-05 -1.16380E-07  9.39569E-11  1.15255E-13  9.36752E-02 -3.76155E-05  3.68562E-07 -4.08316E-11 -4.00594E-13
  0.300  4.92737E-02 -1.95845E-04 -5.76086E-07  1.06191E-09  2.92537E-12  9.42920E-02 -8.02064E-05  1.82587E-06 -4.76341E-10 -1.01460E-11
  0.400  4.93418E-02 -3.39884E-04 -1.76408E-06  5.90135E-09  2.87493E-11  9.51124E-02 -1.31984E-04  5.59773E-06 -2.76210E-09 -9.97278E-11
  0.500  4.94421E-02 -5.14687E-04 -4.13428E-06  2.21941E-08  1.67865E-10  9.60961E-02 -1.86003E-04  1.31398E-05 -1.09276E-08 -5.84023E-10
  0.600  4.95825E-02 -7.12892E-04 -8.15158E-06  6.51211E-08  7.03761E-10  9.71948E-02 -2.34528E-04  2.59618E-05 -3.39343E-08 -2.45775E-09
  0.700  4.97705E-02 -9.25978E-04 -1.42201E-05  1.60817E-07  2.34422E-09  9.83554E-02 -2.69790E-04  4.54098E-05 -8.90427E-08 -8.22302E-09
  0.800  5.00130E-02 -1.14454E-03 -2.26125E-05  3.49714E-07  6.59038E-09  9.95223E-02 -2.84751E-04  7.24520E-05 -2.06173E-07 -2.32349E-08
  0.900  5.03154E-02 -1.35862E-03 -3.34078E-05  6.89464E-07  1.62584E-08  1.00641E-01 -2.73819E-04  1.07491E-04 -4.33015E-07 -5.76458E-08
  1.000  5.06805E-02 -1.55806E-03 -4.64449E-05  1.25705E-06  3.61446E-08  1.01660E-01 -2.33452E-04  1.50223E-04 -8.40377E-07 -1.28959E-07
  1.100  5.11081E-02 -1.73287E-03 -6.12956E-05  2.14964E-06  7.37980E-08  1.02536E-01 -1.62589E-04  1.99555E-04 -1.52703E-06 -2.65101E-07
  1.200  5.15952E-02 -1.87366E-03 -7.72620E-05  3.48395E-06  1.40332E-07  1.03233E-01 -6.28727E-05  2.53603E-04 -2.62309E-06 -5.07818E-07
  1.300  5.21351E-02 -1.97199E-03 -9.33994E-05  5.39368E-06  2.51182E-07  1.03726E-01  6.13633E-05  3.09752E-04 -4.29098E-06 -9.16094E-07
  1.400  5.27180E-02 -2.02078E-03 -1.08561E-04  8.02510E-06  4.26707E-07  1.04003E-01  2.03343E-04  3.64797E-04 -6.72296E-06 -1.56917E-06
  1.500  5.33313E-02 -2.01463E-03 -1.21466E-04  1.15307E-05  6.92495E-07  1.04064E-01  3.54321E-04  4.15141E-04 -1.01347E-05 -2.56874E-06
  1.600  5.39600E-02 -1.95010E-03 -1.30778E-04  1.60610E-05  1.07929E-06  1.03922E-01  5.04239E-04  4.57042E-04 -1.47543E-05 -4.03971E-06
  1.700  5.45875E-02 -1.82593E-03 -1.35200E-04  2.17550E-05  1.62243E-06  1.03600E-01  6.42527E-04  4.86885E-04 -2.08074E-05 -6.12923E-06
  1.800  5.51965E-02 -1.64319E-03 -1.33561E-04  2.87302E-05  2.36075E-06  1.03132E-01  7.58976E-04  5.01465E-04 -2.84985E-05 -9.00336E-06
  1.900  5.57696E-02 -1.40525E-03 -1.24908E-04  3.70712E-05  3.33495E-06  1.02558E-01  8.44617E-04  4.98259E-04 -3.79899E-05 -1.28413E-05
  2.000  5.62906E-02 -1.11778E-03 -1.08577E-04  4.68204E-05  4.58542E-06  1.01924E-01  8.92544E-04  4.75655E-04 -4.93798E-05 -1.78268E-05
  2.100  5.67451E-02 -7.88548E-04 -8.42541E-05  5.79684E-05  6.14976E-06  1.01274E-01  8.98586E-04  4.33150E-04 -6.26813E-05 -2.41376E-05
  2.200  5.71210E-02 -4.27128E-04 -5.20124E-05  7.04470E-05  8.05994E-06  1.00655E-01  8.61808E-04  3.71462E-04 -7.78040E-05 -3.19316E-05
  2.300  5.74095E-02 -4.45794E-05 -1.23269E-05  8.41246E-05  1.03394E-05  1.00105E-01  7.84754E-04  2.92586E-04 -9.45405E-05 -4.13328E-05
  2.400  5.76053E-02  3.47001E-04  3.39333E-05  9.88039E-05  1.30005E-05  9.96576E-02  6.73432E-04  1.99760E-04 -1.12558E-04 -5.24154E-05
  2.500  5.77069E-02  7.34962E-04  8.55351E-05  1.14224E-04  1.60417E-05  9.93360E-02  5.37021E-04  9.73546E-05 -1.31398E-04 -6.51888E-05
  2.600  5.77163E-02  1.10662E-03  1.40931E-04  1.30064E-04  1.94460E-05  9.91531E-02  3.87311E-04 -9.31974E-06 -1.50484E-04 -7.95835E-05
  2.700  5.76394E-02  1.44976E-03  1.98323E-04  1.45950E-04  2.31797E-05  9.91106E-02  2.37919E-04 -1.14270E-04 -1.69133E-04 -9.54404E-05
  2.800  5.74854E-02  1.75320E-03  2.55741E-04  1.61467E-04  2.71915E-05  9.91995E-02  1.03328E-04 -2.11141E-04 -1.86583E-04 -1.12503E-04
  2.900  5.72663E-02  2.00720E-03  3.11129E-04  1.76171E-04  3.14134E-05  9.94007E-02 -2.18575E-06 -2.93574E-04 -2.02020E-04 -1.30414E-04
  3.000  5.69963E-02  2.20393E-03  3.62432E-04  1.89601E-04  3.57615E-05  9.96871E-02 -6.56416E-05 -3.55592E-04 -2.14613E-04 -1.48721E-04
  3.100  5.66914E-02  2.33778E-03  4.07684E-04  2.01298E-04  4.01381E-05  1.00026E-01 -7.63937E-05 -3.91984E-04 -2.23555E-04 -1.66885E-04
  3.200  5.63681E-02  2.40562E-03  4.45100E-04  2.10818E-04  4.44343E-05  1.00379E-01 -2.70233E-05 -3.98667E-04 -2.28111E-04 -1.84297E-04
  3.300  5.60435E-02  2.40694E-03  4.73148E-04  2.17750E-04  4.85332E-05  1.00711E-01  8.59829E-05 -3.72999E-04 -2.27654E-04 -2.00301E-04
  3.400  5.57333E-02  2.34388E-03  4.90630E-04  2.21733E-04  5.23136E-05  1.00985E-01  2.61832E-04 -3.14026E-04 -2.21720E-04 -2.14221E-04
  3.500  5.54523E-02  2.22121E-03  4.96740E-04  2.22470E-04  5.56542E-05  1.01169E-01  4.95341E-04 -2.22627E-04 -2.10040E-04 -2.25398E-04
  3.600  5.52127E-02  2.04611E-03  4.91116E-04  2.19744E-04  5.84373E-05  1.01239E-01  7.77184E-04 -1.01563E-04 -1.92583E-04 -2.33226E-04
  3.700  5.50240E-02  1.82794E-03  4.73877E-04  2.13427E-04  6.05537E-05  1.01176E-01  1.09447E-03  4.46051E-05 -1.69576E-04 -2.37184E-04
  3.800  5.48921E-02  1.57786E-03  4.45646E-04  2.03499E-04  6.19066E-05  1.00971E-01  1.43159E-03  2.09717E-04 -1.41527E-04 -2.36879E-04
  3.900  5.48189E-02  1.30844E-03  4.07559E-04  1.90050E-04  6.24159E-05  1.00621E-01  1.77135E-03  3.86329E-04 -1.09222E-04 -2.32072E-04
  4.000  5.48022E-02  1.03316E-03  3.61245E-04  1.73290E-04  6.20222E-05  1.00132E-01  2.09615E-03  5.66136E-04 -7.37094E-05 -2.22708E-04
  4.100  5.48352E-02  7.65884E-04  3.08800E-04  1.53556E-04  6.06906E-05  9.95167E-02  2.38938E-03  7.40472E-04 -3.62719E-05 -2.08929E-04
  4.200  5.49067E-02  5.20360E-04  2.52729E-04  1.31305E-04  5.84139E-05  9.87915E-02  2.63660E-03  9.00857E-04  1.62932E-06 -1.91081E-04
  4.300  5.50012E-02  3.09639E-04  1.95873E-04  1.07118E-04  5.52155E-05  9.79754E-02  2.82671E-03  1.03956E-03  3.84219E-05 -1.69711E-04
  4.400  5.50992E-02  1.45578E-04  1.41313E-04  8.16858E-05  5.11511E-05  9.70878E-02  2.95287E-03  1.15011E-03  7.25068E-05 -1.45542E-04
  4.500  5.51779E-02  3.83563E-05  9.22574E-05  5.57995E-05  4.63102E-05  9.61464E-02  3.01305E-03  1.22781E-03  1.02354E-04 -1.19449E-04
  4.600  5.52119E-02 -3.94817E-06  5.19099E-05  3.03275E-05  4.08157E-05  9.51650E-02  3.01028E-03  1.27003E-03  1.26605E-04 -9.24131E-05
  4.700  5.51739E-02  2.43004E-05  2.33321E-05  6.19255E-06  3.48226E-05  9.41521E-02  2.95254E-03  1.27645E-03  1.44171E-04 -6.54745E-05
  4.800  5.50361E-02  1.26041E-04  9.29772E-06 -1.56593E-05  2.85154E-05  9.31097E-02  2.85222E-03  1.24915E-03  1.54321E-04 -3.96737E-05
  4.900  5.47709E-02  3.01367E-04  1.21511E-05 -3.42931E-05  2.21029E-05  9.20330E-02  2.72526E-03  1.19247E-03  1.56762E-04 -1.59949E-05
  5.000  5.43524E-02  5.47497E-04  3.36753E-05 -4.88238E-05  1.58128E-05  9.09098E-02  2.59003E-03  1.11277E-03  1.51680E-04  4.69066E-06
  5.100  5.37576E-02  8.58854E-04  7.49783E-05 -5.84559E-05  9.88350E-06  8.97222E-02  2.46603E-03  1.01802E-03  1.39761E-04  2.16756E-05
  5.200  5.29671E-02  1.22727E-03  1.36406E-04 -6.25234E-05  4.55519E-06  8.84468E-02  2.37244E-03  9.17259E-04  1.22175E-04  3.44574E-05
  5.300  5.19666E-02  1.64232E-03  2.17489E-04 -6.05274E-05  5.97137E-08  8.70568E-02  2.32675E-03  8.19998E-04  1.00520E-04  4.27673E-05
  5.400  5.07471E-02  2.09170E-03  3.16924E-04 -5.21684E-05 -3.39008E-06  8.55237E-02  2.34348E-03  7.35594E-04  7.67402E-05  4.65841E-05
  5.500  4.93060E-02  2.56175E-03  4.32598E-04 -3.73714E-05 -5.61103E-06  8.38198E-02  2.43314E-03  6.72610E-04  5.30037E-05  4.61320E-05
  5.600  4.76469E-02  3.03803E-03  5.61659E-04 -1.63023E-05 -6.45977E-06  8.19199E-02  2.60146E-03  6.38256E-04  3.15704E-05  4.18627E-05
  5.700  4.57801E-02  3.50588E-03  7.00618E-04  1.06280E-05 -5.84144E-06  7.98031E-02  2.84900E-03  6.37918E-04  1.46412E-05  3.44226E-05
  5.800  4.37218E-02  3.95102E-03  8.45492E-04  4.27703E-05 -3.71658E-06  7.74551E-02  3.17109E-03  6.74824E-04  4.20881E-06  2.46074E-05
  5.900  4.14940E-02  4.36015E-03  9.91971E-04  7.92575E-05 -1.05499E-07  7.48689E-02  3.55816E-03  7.49866E-04  1.92007E-06  1.33087E-05
  6.000  3.91232E-02  4.72144E-03  1.13561E-03  1.19035E-04  4.91024E-06  7.20458E-02  3.99643E-03  8.61575E-04  8.96053E-06  1.45503E-06
  6.100  3.66400E-02  5.02496E-03  1.27202E-03  1.60906E-04  1.11896E-05  6.89960E-02  4.46879E-03  1.00627E-03  2.59701E-05 -1.00479E-05
  6.200  3.40775E-02  5.26308E-03  1.39706E-03  2.03576E-04  1.85368E-05  6.57378E-02  4.95593E-03  1.17832E-03  5.29968E-05 -2.03725E-05
  6.300  3.14701E-02  5.43060E-03  1.50701E-03  2.45717E-04  2.67096E-05  6.22975E-02  5.43756E-03  1.37056E-03  8.94920E-05 -2.88171E-05
  6.400  2.88525E-02  5.52491E-03  1.59875E-03  2.86018E-04  3.54296E-05  5.87078E-02  5.89365E-03  1.57478E-03  1.34346E-04 -3.48434E-05
  6.500  2.62586E-02  5.54598E-03  1.66985E-03  3.23248E-04  4.43953E-05  5.50069E-02  6.30553E-03  1.78221E-03  1.85963E-04 -3.81002E-05
  6.600  2.37198E-02  5.49615E-03  1.71865E-03  3.56306E-04  5.32955E-05  5.12365E-02  6.65694E-03  1.98410E-03  2.42364E-04 -3.84339E-05
  6.700  2.12650E-02  5.37995E-03  1.74435E-03  3.84267E-04  6.18244E-05  4.74400E-02  6.93478E-03  2.17216E-03  3.01318E-04 -3.58839E-05
  6.800  1.89189E-02  5.20375E-03  1.74694E-03  4.06417E-04  6.96952E-05  4.36610E-02  7.12964E-03  2.33903E-03  3.60475E-04 -3.06665E-05
  6.900  1.67023E-02  4.97534E-03  1.72721E-03  4.22278E-04  7.66531E-05  3.99417E-02  7.23608E-03  2.47863E-03  4.17513E-04 -2.31468E-05
  7.000  1.46314E-02  4.70358E-03  1.68663E-03  4.31613E-04  8.24858E-05  3.63210E-02  7.25262E-03  2.58638E-03  4.70264E-04 -1.38040E-05
  7.100  1.27176E-02  4.39788E-03  1.62730E-03  4.34431E-04  8.70318E-05  3.28339E-02  7.18149E-03  2.65932E-03  5.16834E-04 -3.19111E-06
  7.200  1.09679E-02  4.06783E-03  1.55174E-03  4.30967E-04  9.01858E-05  2.95099E-02  7.02825E-03  2.69617E-03  5.55683E-04  8.10600E-06
  7.300  9.38498E-03  3.72281E-03  1.46284E-03  4.21659E-04  9.18999E-05  2.63733E-02  6.80116E-03  2.69719E-03  5.85694E-04  1.95083E-05
  7.400  7.96781E-03  3.37164E-03  1.36363E-03  4.07114E-04  9.21831E-05  2.34420E-02  6.51054E-03  2.66410E-03  6.06195E-04  3.04785E-05
  7.500  6.71191E-03  3.02230E-03  1.25721E-03  3.88068E-04  9.10967E-05  2.07281E-02  6.16804E-03  2.59975E-03  6.16963E-04  4.05494E-05
  7.600  5.61008E-03  2.68174E-03  1.14658E-03  3.65346E-04  8.87482E-05  1.82380E-02  5.78599E-03  2.50797E-03  6.18193E-04  4.93444E-05
  7.700  4.65295E-03  2.35578E-03  1.03457E-03  3.39817E-04  8.52822E-05  1.59730E-02  5.37669E-03  2.39317E-03  6.10449E-04  5.65898E-05
  7.800  3.82962E-03  2.04899E-03  9.23679E-04  3.12356E-04  8.08717E-05  1.39296E-02  4.95192E-03  2.26015E-03  5.94597E-04  6.21185E-05
  7.900  3.12817E-03  1.76474E-03  8.16108E-04  2.83803E-04  7.57071E-05  1.21004E-02  4.52246E-03  2.11378E-03  5.71731E-04  6.58668E-05
  8.000  2.53620E-03  1.50523E-03  7.13650E-04  2.54936E-04  6.99863E-05  1.04750E-02  4.09778E-03  1.95877E-03  5.43090E-04  6.78640E-05
  8.100  2.04127E-03  1.27161E-03  6.17701E-04  2.26447E-04  6.39055E-05  9.04082E-03  3.68584E-03  1.79952E-03  5.09982E-04  6.82188E-05
  8.200  1.63124E-03  1.06411E-03  5.29259E-04  1.98924E-04  5.76510E-05  7.78334E-03  3.29299E-03  1.63995E-03  4.73713E-04  6.71013E-05
  8.300  1.29459E-03  8.82175E-04  4.48949E-04  1.72841E-04  5.13922E-05  6.68730E-03  2.92398E-03  1.48340E-03  4.35529E-04  6.47249E-05
  8.400  1.02061E-03  7.24636E-04  3.77058E-04  1.48559E-04  4.52766E-05  5.73708E-03  2.58205E-03  1.33260E-03  3.96565E-04  6.13279E-05
  8.500  7.99533E-04  5.89865E-04  3.13579E-04  1.26325E-04  3.94268E-05  4.91718E-03  2.26909E-03  1.18965E-03  3.57814E-04  5.71568E-05
  8.600  6.22623E-04  4.75922E-04  2.58266E-04  1.06284E-04  3.39388E-05  4.21264E-03  1.98580E-03  1.05607E-03  3.20107E-04  5.24519E-05
  8.700  4.82191E-04  3.80683E-04  2.10682E-04  8.84859E-05  2.88821E-05  3.60932E-03  1.73191E-03  9.32809E-04  2.84102E-04  4.74359E-05
  8.800  3.71574E-04  3.01961E-04  1.70254E-04  7.29057E-05  2.43010E-05  3.09410E-03  1.50639E-03  8.20356E-04  2.50289E-04  4.23057E-05
  8.900  2.85080E-04  2.37591E-04  1.36321E-04  5.94545E-05  2.02169E-05  2.65501E-03  1.30765E-03  7.18788E-04  2.19004E-04  3.72273E-05
  9.000  2.17919E-04  1.85508E-04  1.08172E-04  4.79962E-05  1.66317E-05  2.28128E-03  1.13370E-03  6.27863E-04  1.90439E-04  3.23340E-05
  9.100  1.66104E-04  1.43793E-04  8.50910E-05  3.83621E-05  1.35308E-05  1.96336E-03  9.82340E-04  5.47100E-04  1.64668E-04  2.77260E-05
  9.200  1.26367E-04  1.10707E-04  6.63750E-05  3.03640E-05  1.08872E-05  1.69284E-03  8.51282E-04  4.75843E-04  1.41668E-04  2.34729E-05
  9.300  9.60534E-05  8.47101E-05  5.13629E-05  2.38059E-05  8.66497E-06  1.46245E-03  7.38236E-04  4.13333E-04  1.21339E-04  1.96173E-05
  9.400  7.30361E-05  6.44648E-05  3.94475E-05  1.84930E-05  6.82238E-06  1.26590E-03  6.41000E-04  3.58756E-04  1.03528E-04  1.61783E-05
  9.500  5.56260E-05  4.88301E-05  3.00848E-05  1.42389E-05  5.31495E-06  1.09784E-03  5.57511E-04  3.11284E-04  8.80456E-05  1.31565E-05
  9.600  4.24961E-05  3.68496E-05  2.27983E-05  1.08711E-05  4.09780E-06  9.53736E-04  4.85877E-04  2.70111E-04  7.46813E-05  1.05386E-05
  9.700  3.26137E-05  2.77344E-05  1.71787E-05  8.23389E-06  3.12756E-06  8.29771E-04  4.24396E-04  2.34474E-04  6.32172E-05  8.30074E-06
  9.800  2.51817E-05  2.08433E-05  1.28810E-05  6.19013E-06  2.36373E-06  7.22752E-04  3.71558E-04  2.03666E-04  5.34372E-05  6.41282E-06
  9.900  1.95902E-05  1.56625E-05  9.61942E-06  4.62181E-06  1.76964E-06  6.30026E-04  3.26046E-04  1.77045E-04  4.51340E-05  4.84094E-06
 10.000  1.53757E-05  1.17857E-05  7.16128E-06  3.42931E-06  1.31291E-06  5.49391E-04  2.86721E-04  1.54038E-04  3.81138E-05  3.54991E-06
 10.100  1.21881E-05  8.89543E-06  5.31979E-06  2.53016E-06  9.65647E-07  4.79029E-04  2.52613E-04  1.34140E-04  3.21992E-05  2.50486E-06
 10.200  9.76491E-06  6.74656E-06  3.94732E-06  1.85731E-06  7.04336E-07  4.17442E-04  2.22899E-04  1.16908E-04  2.72303E-05  1.67249E-06
 10.300  7.90989E-06  5.15156E-06  2.92872E-06  1.35713E-06  5.09578E-07  3.63396E-04  1.96890E-04  1.01960E-04  2.30650E-05  1.02177E-06
 10.400  6.47724E-06  3.96830E-06  2.17526E-06  9.87431E-07  3.65672E-07  3.15871E-04  1.74013E-04  8.89696E-05  1.95785E-05  5.24345E-07
 10.500  5.35895E-06  3.08986E-06  1.61936E-06  7.15482E-07  2.60149E-07  2.74025E-04  1.53797E-04  7.76556E-05  1.66624E-05  1.54725E-07
 10.600  4.47531E-06  2.43632E-06  1.21001E-06  5.16258E-07  1.83281E-07  2.37156E-04  1.35855E-04  6.77800E-05  1.42230E-05 -1.09735E-07
 10.700  3.76766E-06  1.94826E-06  9.09034E-07  3.70844E-07  1.27604E-07  2.04676E-04  1.19870E-04  5.91411E-05  1.21802E-05 -2.88942E-07
 10.800  3.19292E-06  1.58164E-06  6.87997E-07  2.65089E-07  8.74809E-08  1.76085E-04  1.05587E-04  5.15687E-05  1.04660E-05 -4.00229E-07
 10.900  2.71954E-06  1.30395E-06  5.25834E-07  1.88493E-07  5.87113E-08  1.50958E-04  9.27975E-05  4.49190E-05  9.02306E-06 -4.58550E-07
 11.000  2.32440E-06  1.09125E-06  4.06953E-07  1.33310E-07  3.82034E-08  1.28922E-04  8.13324E-05  3.90711E-05  7.80348E-06 -4.76672E-07
 11.100  1.99063E-06  9.25935E-07  3.19825E-07  9.38360E-08  2.37011E-08  1.09652E-04  7.10530E-05  3.39228E-05  6.76745E-06 -4.65372E-07
 11.200  1.70581E-06  7.95154E-07  2.55915E-07  6.58771E-08  1.35671E-08  9.28574E-05  6.18446E-05  2.93879E-05  5.88223E-06 -4.33619E-07
 11.300  1.46083E-06  6.89539E-07  2.08896E-07  4.63367E-08  6.61503E-09  7.82758E-05  5.36100E-05  2.53933E-05  5.12112E-06 -3.88750E-07
 11.400  1.24892E-06  6.02325E-07  1.74081E-07  3.29206E-08  1.98217E-09  6.56700E-05  4.62657E-05  2.18766E-05  4.46252E-06 -3.36637E-07
 11.500  1.06495E-06  5.28671E-07  1.47998E-07  2.39203E-08 -9.63426E-10  5.48227E-05  3.97377E-05  1.87843E-05  3.88912E-06 -2.81856E-07
 11.600  9.05002E-07  4.65160E-07  1.28092E-07  1.80589E-08 -2.68961E-09  4.55350E-05  3.39591E-05  1.60700E-05  3.38712E-06 -2.27844E-07
 11.700  7.65984E-07  4.09415E-07  1.12498E-07  1.43815E-08 -3.54676E-09  3.76241E-05  2.88678E-05  1.36932E-05  2.94561E-06 -1.77056E-07
 11.800  6.45371E-07  3.59817E-07  9.98716E-08  1.21765E-08 -3.79981E-09  3.09227E-05  2.44053E-05  1.16180E-05  2.55599E-06 -1.31121E-07
 11.900  5.41047E-07  3.15279E-07  8.92685E-08  1.09191E-08 -3.65009E-09  2.52779E-05  2.05159E-05  9.81259E-06  2.21143E-06 -9.09841E-08
 12.000  4.51179E-07  2.75087E-07  8.00412E-08  1.02291E-08 -3.25022E-09  2.05506E-05  1.71463E-05  8.24804E-06  1.90651E-06 -5.70466E-08
 12.100  3.74141E-07  2.38770E-07  7.17650E-08  9.83882E-09 -2.71457E-09  1.66150E-05  1.42451E-05  6.89824E-06  1.63685E-06 -2.92918E-08
 12.200  3.08464E-07  2.06014E-07  6.41762E-08  9.56777E-09 -2.12687E-09  1.33583E-05  1.17635E-05  5.73933E-06  1.39883E-06 -7.39817E-09
 12.300  2.52806E-07  1.76591E-07  5.71249E-08  9.30191E-09 -1.54615E-09  1.06797E-05  9.65482E-06  4.74946E-06  1.18937E-06  9.16251E-09
 12.400  2.05937E-07  1.50318E-07  5.05376E-08  8.97695E-09 -1.01153E-09  8.49004E-06  7.87524E-06  3.90861E-06  1.00579E-06  2.10418E-08
 12.500  1.66728E-07  1.27025E-07  4.43884E-08  8.56453E-09 -5.46410E-10  6.71116E-06  6.38372E-06  3.19844E-06  8.45666E-07  2.89473E-08
 12.600  1.34149E-07  1.06540E-07  3.86776E-08  8.06092E-09 -1.62016E-10  5.27492E-06  5.14233E-06  2.60223E-06  7.06780E-07  3.35908E-08
 12.700  1.07264E-07  8.86786E-08  3.34170E-08  7.47802E-09  1.39420E-10  4.12251E-06  4.11633E-06  2.10476E-06  5.87048E-07  3.56495E-08
 12.800  8.52324E-08  7.32449E-08  2.86190E-08  6.83646E-09  3.61976E-10  3.20357E-06  3.27432E-06  1.69229E-06  4.84502E-07  3.57404E-08
 12.900  6.73030E-08  6.00306E-08  2.42910E-08  6.16039E-09  5.13787E-10  2.47535E-06  2.58815E-06  1.35250E-06  3.97277E-07  3.44047E-08
 13.000  5.28140E-08  4.88209E-08  2.04320E-08  5.47389E-09  6.05226E-10  1.90182E-06  2.03291E-06  1.07440E-06  3.23613E-07  3.21004E-08
 13.100  4.11866E-08  3.93992E-08  1.70313E-08  4.79858E-09  6.47505E-10  1.45291E-06  1.58676E-06  8.48291E-07  2.61856E-07  2.92026E-08
 13.200  3.19202E-08  3.15529E-08  1.40696E-08  4.15231E-09  6.51654E-10  1.10369E-06  1.23076E-06  6.65673E-07  2.10466E-07  2.60072E-08
 13.300  2.45862E-08  2.50777E-08  1.15200E-08  3.54860E-09  6.27835E-10  8.33692E-07  9.48665E-07  5.19166E-07  1.68024E-07  2.27386E-08
 13.400  1.88213E-08  1.97817E-08  9.34993E-09  2.99666E-09  5.84925E-10  6.26209E-07  7.26678E-07  4.02416E-07  1.33237E-07  1.95589E-08
 13.500  1.43203E-08  1.54882E-08  7.52323E-09  2.50172E-09  5.30331E-10  4.67732E-07  5.53185E-07  3.10003E-07  1.04940E-07  1.65779E-08
 13.600  1.08297E-08  1.20376E-08  6.00208E-09  2.06563E-09  4.69956E-10  3.47413E-07  4.18516E-07  2.37344E-07  8.20958E-08  1.38633E-08
 13.700  8.14066E-09  9.28787E-09  4.74857E-09  1.68756E-09  4.08286E-10  2.56612E-07  3.14688E-07  1.80600E-07  6.37936E-08  1.14495E-08
 13.800  6.08276E-09  7.11487E-09  3.72606E-09  1.36466E-09  3.48544E-10  1.88495E-07  2.35173E-07  1.36579E-07  4.92401E-08  9.34645E-09
 13.900  4.51811E-09  5.41169E-09  2.90018E-09  1.09270E-09  2.92883E-10  1.37696E-07  1.74682E-07  1.02657E-07  3.77535E-08  7.54642E-09
 14.000  3.33613E-09  4.08744E-09  2.23949E-09  8.66606E-10  2.42589E-10  1.00035E-07  1.28968E-07  7.66893E-08  2.87548E-08  6.02998E-09
 14.100  2.44895E-09  3.06593E-09  1.71587E-09  6.80959E-10  1.98276E-10  7.22780E-08  9.46452E-08  5.69422E-08  2.17566E-08  4.77070E-09
 14.200  1.78723E-09  2.28402E-09  1.30463E-09  5.30290E-10  1.60059E-10  5.19384E-08  6.90426E-08  4.20239E-08  1.63539E-08  3.73869E-09
 14.300  1.29678E-09  1.69006E-09  9.84497E-10  4.09363E-10  1.27712E-10  3.71202E-08  5.00670E-08  3.08271E-08  1.22128E-08  2.90327E-09
 14.400  9.35510E-10  1.24224E-09  7.37426E-10  3.13333E-10  1.00786E-10  2.63866E-08  3.60927E-08  2.24778E-08  9.06143E-09  2.23471E-09
 14.500  6.71037E-10  9.07076E-10  5.48342E-10  2.37847E-10  7.87091E-11  1.86558E-08  2.58664E-08  1.62919E-08  6.68008E-09  1.70548E-09
 14.600  4.78601E-10  6.58036E-10  4.04822E-10  1.79090E-10  6.08566E-11  1.31195E-08  1.84296E-08  1.17381E-08  4.89318E-09  1.29083E-09
 14.700  3.39427E-10  4.74303E-10  2.96758E-10  1.33784E-10  4.66045E-11  9.17691E-09  1.30550E-08  8.40715E-09  3.56160E-09  9.69137E-10
 14.800  2.39375E-10  3.39699E-10  2.16029E-10  9.91675E-11  3.53625E-11  6.38507E-09  9.19456E-09  5.98597E-09  2.57611E-09  7.21914E-10
 14.900  1.67875E-10  2.41765E-10  1.56184E-10  7.29521E-11  2.65944E-11  4.41910E-09  6.43868E-09  4.23711E-09  1.85169E-09  5.33640E-10
 15.000  1.17079E-10  1.70995E-10  1.12154E-10  5.32689E-11  1.98287E-11  3.04234E-09  4.48321E-09  2.98172E-09  1.32275E-09  3.91513E-10
 15.100  8.12036E-11  1.20196E-10  8.00002E-11  3.86132E-11  1.46612E-11  2.08353E-09  3.10400E-09  2.08613E-09  9.39094E-10  2.85132E-10
 15.200  5.60124E-11  8.39741E-11  5.66890E-11  2.77894E-11  1.07525E-11  1.41944E-09  2.13702E-09  1.45113E-09  6.62651E-10  2.06162E-10
 15.300  3.84255E-11  5.83136E-11  3.99094E-11  1.98591E-11  7.82372E-12  9.61980E-10  1.46308E-09  1.00363E-09  4.64754E-10  1.48009E-10
 15.400  2.62177E-11  4.02523E-11  2.79161E-11  1.40937E-11  5.64884E-12  6.48573E-10  9.96112E-10  6.90169E-10  3.23998E-10  1.05521E-10
 15.500  1.77918E-11  2.76205E-11  1.94030E-11  9.93388E-12  4.04784E-12  4.35014E-10  6.74447E-10  4.71922E-10  2.24524E-10  7.47154E-11
 15.600  1.20090E-11  1.88415E-11  1.34014E-11  6.95486E-12  2.87923E-12  2.90273E-10  4.54149E-10  3.20869E-10  1.54667E-10  5.25465E-11
 15.700  8.06240E-12  1.27780E-11  9.19876E-12  4.83698E-12  2.03321E-12  1.92698E-10  3.04141E-10  2.16941E-10  1.05918E-10  3.67099E-11
 15.800  5.38403E-12  8.61587E-12  6.27528E-12  3.34206E-12  1.42560E-12  1.27269E-10  2.02576E-10  1.45857E-10  7.21099E-11  2.54782E-11
 15.900  3.57639E-12  5.77619E-12  4.25490E-12  2.29428E-12  9.92619E-13  8.36280E-11  1.34200E-10  9.75200E-11  4.88078E-11  1.75685E-11
 16.000  2.36312E-12  3.85044E-12  2.86764E-12  1.56496E-12  6.86411E-13  5.46728E-11  8.84259E-11  6.48420E-11  3.28450E-11  1.20370E-11
 16.100  1.55325E-12  2.55226E-12  1.92116E-12  1.06077E-12  4.71467E-13  3.55622E-11  5.79538E-11  4.28773E-11  2.19761E-11  8.19505E-12
 16.200  1.01560E-12  1.68230E-12  1.27947E-12  7.14547E-13  3.21684E-13  2.30150E-11  3.77808E-11  2.81980E-11  1.46201E-11  5.54454E-12
 16.300  6.60597E-13  1.10271E-12  8.47130E-13  4.78365E-13  2.18051E-13  1.48199E-11  2.44997E-11  1.84434E-11  9.67126E-12  3.72811E-12
 16.400  4.27457E-13  7.18821E-13  5.57624E-13  3.18301E-13  1.46851E-13  9.49510E-12  1.58037E-11  1.19980E-11  6.36156E-12  2.49143E-12
 16.500  2.75170E-13  4.66008E-13  3.64945E-13  2.10519E-13  9.82707E-14  6.05312E-12  1.01410E-11  7.76305E-12  4.16109E-12  1.65491E-12
 16.600  1.76226E-13  3.00467E-13  2.37481E-13  1.38403E-13  6.53480E-14  3.83966E-12  6.47338E-12  4.99601E-12  2.70662E-12  1.09267E-12
 16.700  1.12281E-13  1.92684E-13  1.53661E-13  9.04542E-14  4.31852E-14  2.42351E-12  4.11080E-12  3.19811E-12  1.75081E-12  7.17157E-13
 16.800  7.11739E-14  1.22901E-13  9.88674E-14  5.87706E-14  2.83637E-14  1.52210E-12  2.59701E-12  2.03636E-12  1.12630E-12  4.67925E-13
 16.900  4.48870E-14  7.79722E-14  6.32576E-14  3.79633E-14  1.85159E-14  9.51248E-13  1.63224E-12  1.28978E-12  7.20590E-13  3.03525E-13
 17.000  2.81653E-14  4.92053E-14  4.02496E-14  2.43815E-14  1.20146E-14  5.91565E-13  1.02063E-12  8.12617E-13  4.58514E-13  1.95746E-13
 17.100  1.75837E-14  3.08877E-14  2.54693E-14  1.55694E-14  7.74967E-15  3.66080E-13  6.34943E-13  5.09307E-13  2.90175E-13  1.25513E-13
 17.200  1.09223E-14  1.92874E-14  1.60285E-14  9.88590E-15  4.96923E-15  2.25434E-13  3.93000E-13  3.17545E-13  1.82651E-13  8.00201E-14
 17.300  6.75046E-15  1.19808E-14  1.00324E-14  6.24186E-15  3.16775E-15  1.38146E-13  2.42020E-13  1.96958E-13  1.14354E-13  5.07278E-14
 17.400  4.15123E-15  7.40353E-15  6.24558E-15  3.91906E-15  2.00767E-15  8.42445E-14  1.48293E-13  1.21532E-13  7.12133E-14  3.19776E-14
 17.500  2.54011E-15  4.55136E-15  3.86728E-15  2.44702E-15  1.26513E-15  5.11248E-14  9.04080E-14  7.46058E-14  4.41124E-14  2.00455E-14
 17.600  1.54655E-15  2.78358E-15  2.38188E-15  1.51950E-15  7.92685E-16  3.08755E-14  5.48429E-14  4.55642E-14  2.71808E-14  1.24960E-14
 17.700  9.36963E-16  1.69371E-15  1.45924E-15  9.38386E-16  4.93862E-16  1.85565E-14  3.31032E-14  2.76857E-14  1.66600E-14  7.74691E-15
 17.800  5.64848E-16  1.02531E-15  8.89291E-16  5.76368E-16  3.05965E-16  1.10990E-14  1.98821E-14  1.67369E-14  1.01581E-14  4.77642E-15
 17.900  3.38844E-16  6.17539E-16  5.39113E-16  3.52103E-16  1.88501E-16  6.60662E-15  1.18824E-14  1.00668E-14  6.16144E-15  2.92892E-15
 18.000  2.02270E-16  3.70063E-16  3.25123E-16  2.13947E-16  1.15492E-16  3.91372E-15  7.06654E-15  6.02445E-15  3.71789E-15  1.78631E-15
 18.100  1.20153E-16  2.20647E-16  1.95057E-16  1.29307E-16  7.03726E-17  2.30739E-15  4.18191E-15  3.58720E-15  2.23184E-15  1.08359E-15
 18.200  7.10260E-17  1.30900E-16  1.16420E-16  7.77374E-17  4.26463E-17  1.35387E-15  2.46273E-15  2.12529E-15  1.33289E-15  6.53802E-16
 18.300  4.17814E-17  7.72705E-17  6.91295E-17  4.64884E-17  2.57041E-17  7.90609E-16  1.44324E-15  1.25288E-15  7.91945E-16  3.92383E-16
 18.400  2.44590E-17  4.53863E-17  4.08390E-17  2.76553E-17  1.54092E-17  4.59496E-16  8.41682E-16  7.34924E-16  4.68143E-16  2.34246E-16
 18.500  1.42491E-17  2.65267E-17  2.40035E-17  1.63660E-17  9.18823E-18  2.65792E-16  4.88486E-16  4.28964E-16  2.75329E-16  1.39105E-16
 18.600  8.26116E-18  1.54275E-17  1.40370E-17  9.63492E-18  5.44964E-18  1.53019E-16  2.82135E-16  2.49146E-16  1.61111E-16  8.21736E-17
 18.700  4.76651E-18  8.92835E-18  8.16729E-18  5.64297E-18  3.21516E-18  8.76799E-17  1.62169E-16  1.43995E-16  9.38009E-17  4.82896E-17
 18.800  2.73699E-18  5.14183E-18  4.72825E-18  3.28800E-18  1.88690E-18  5.00043E-17  9.27673E-17  8.28155E-17  5.43381E-17  2.82304E-17
 18.900  1.56410E-18  2.94674E-18  2.72363E-18  1.90604E-18  1.10158E-18  2.83839E-17  5.28130E-17  4.73970E-17  3.13203E-17  1.64184E-17
 19.000  8.89569E-19  1.68055E-18  1.56111E-18  1.09930E-18  6.39768E-19  1.60362E-17  2.99236E-17  2.69944E-17  1.79630E-17  9.49970E-18
 19.100  5.03528E-19  9.53793E-19  8.90348E-19  6.30808E-19  3.69636E-19  9.01771E-18  1.68740E-17  1.52998E-17  1.02512E-17  5.46841E-18
 19.200  2.83663E-19  5.38711E-19  5.05288E-19  3.60149E-19  2.12463E-19  5.04734E-18  9.47019E-18  8.62965E-18  5.82124E-18  3.13180E-18
 19.300  1.59046E-19  3.02806E-19  2.85351E-19  2.04589E-19  1.21496E-19  2.81193E-18  5.28985E-18  4.84400E-18  3.28937E-18  1.78451E-18
 19.400  8.87534E-20  1.69389E-19  1.60357E-19  1.15639E-19  6.91223E-20  1.55929E-18  2.94088E-18  2.70598E-18  1.84958E-18  1.01168E-18
 19.500  4.92944E-20  9.43028E-20  8.96751E-20  6.50371E-20  3.91259E-20  8.60665E-19  1.62729E-18  1.50439E-18  1.03491E-18  5.70660E-19
 19.600  2.72499E-20  5.22504E-20  4.99045E-20  3.63963E-20  2.20348E-20  4.72856E-19  8.96216E-19  8.32373E-19  5.76245E-19  3.20280E-19
 19.700  1.49931E-20  2.88128E-20  2.76375E-20  2.02677E-20  1.23470E-20  2.58592E-19  4.91275E-19  4.58356E-19  3.19298E-19  1.78858E-19
 19.800  8.21077E-21  1.58132E-20  1.52320E-20  1.12307E-20  6.88382E-21  1.40766E-19  2.68044E-19  2.51201E-19  1.76066E-19  9.93853E-20
 19.900  4.47552E-21  8.63768E-21  8.35444E-21  6.19264E-21  3.81878E-21  7.62749E-20  1.45567E-19  1.37018E-19  9.66167E-20  5.49513E-20
  67 201 200   0.100
  0.000  4.88761E-02 -2.48253E-16 -3.95517E-16 -5.87936E-16  1.43049E-17  9.38112E-02 -4.96507E-16 -6.66134E-16 -9.25686E-16 -1.37327E-15
  0.100  4.88852E-02 -2.25684E-05 -9.18884E-09  1.10796E-12 -3.43318E-16  9.39286E-02 -1.33187E-05  2.49431E-08  1.86383E-12 -5.66474E-15
  0.200  4.89136E-02 -8.94069E-05 -1.45252E-07  7.07510E-11  1.24503E-13  9.42751E-02 -5.17687E-05  3.94111E-07  1.17251E-10 -4.80201E-13
  0.300  4.89643E-02 -1.97936E-04 -7.20618E-07  8.02064E-10  3.16713E-12  9.48337E-02 -1.10968E-04  1.95381E-06  1.29481E-09 -1.22848E-11
  0.400  4.90421E-02 -3.43928E-04 -2.21370E-06  4.47606E-09  3.11165E-11  9.55771E-02 -1.84056E-04  5.99599E-06  6.96459E-09 -1.21004E-10
  0.500  4.91530E-02 -5.21611E-04 -5.20969E-06  1.69232E-08  1.81616E-10  9.64690E-02 -2.62318E-04  1.40933E-05  2.51015E-08 -7.07923E-10
  0.600  4.93037E-02 -7.23823E-04 -1.03257E-05  4.99704E-08  7.61090E-10  9.74663E-02 -3.35981E-04  2.78926E-05  6.98536E-08 -2.97561E-09
  0.700  4.95006E-02 -9.42211E-04 -1.81277E-05  1.24303E-07  2.53390E-09  9.85208E-02 -3.95119E-04  4.88883E-05  1.61808E-07 -9.94232E-09
  0.800  4.97493E-02 -1.16748E-03 -2.90464E-05  2.72515E-07  7.11937E-09  9.95822E-02 -4.30573E-04  7.81983E-05  3.26109E-07 -2.80507E-08
  0.900  5.00541E-02 -1.38968E-03 -4.33018E-05  5.42061E-07  1.75513E-08  1.00601E-01 -4.34835E-04  1.16367E-04  5.87989E-07 -6.94775E-08
  1.000  5.04168E-02 -1.59855E-03 -6.08417E-05  9.97779E-07  3.89882E-08  1.01530E-01 -4.02786E-04  1.63212E-04  9.65720E-07 -1.55143E-07
  1.100  5.08368E-02 -1.78388E-03 -8.13026E-05  1.72361E-06  7.95331E-08  1.02328E-01 -3.32250E-04  2.17739E-04  1.46156E-06 -3.18296E-07
  1.200  5.13105E-02 -1.93593E-03 -1.03995E-04  2.82318E-06  1.51086E-07  1.02962E-01 -2.24306E-04  2.78120E-04  2.05175E-06 -6.08427E-07
  1.300  5.18313E-02 -2.04578E-03 -1.27917E-04  4.41883E-06  2.70132E-07  1.03410E-01 -8.33233E-05  3.41754E-04  2.67692E-06 -1.09513E-06
  1.400  5.23897E-02 -2.10580E-03 -1.51795E-04  6.64894E-06  4.58333E-07  1.03660E-01  8.32789E-05  4.05396E-04  3.23461E-06 -1.87141E-06
  1.500  5.29736E-02 -2.10996E-03 -1.74148E-04  9.66326E-06  7.42812E-07  1.03709E-01  2.65538E-04  4.65351E-04  3.57524E-06 -3.05595E-06
  1.600  5.35689E-02 -2.05420E-03 -1.93372E-04  1.36164E-05  1.15599E-06  1.03570E-01  4.51680E-04  5.17713E-04  3.50302E-06 -4.79358E-06
  1.700  5.41602E-02 -1.93664E-03 -2.07839E-04  1.86594E-05  1.73490E-06  1.03264E-01  6.29026E-04  5.58639E-04  2.78227E-06 -7.25370E-06
  1.800  5.47312E-02 -1.75779E-03 -2.16000E-04  2.49300E-05  2.51994E-06  1.02822E-01  7.84997E-04  5.84626E-04  1.14953E-06 -1.06259E-05
  1.900  5.52661E-02 -1.52062E-03 -2.16489E-04  3.25421E-05  3.55299E-06  1.02280E-01  9.08150E-04  5.92785E-04 -1.66911E-06 -1.51126E-05
  2.000  5.57499E-02 -1.23050E-03 -2.08217E-04  4.15743E-05  4.87511E-06  1.01680E-01  9.89149E-04  5.81087E-04 -5.93655E-06 -2.09190E-05
  2.100  5.61696E-02 -8.95084E-04 -1.90451E-04  5.20600E-05  6.52372E-06  1.01065E-01  1.02161E-03  5.48557E-04 -1.18805E-05 -2.82397E-05
  2.200  5.65145E-02 -5.24047E-04 -1.62877E-04  6.39772E-05  8.52965E-06  1.00478E-01  1.00271E-03  4.95420E-04 -1.96687E-05 -3.72438E-05
  2.300  5.67767E-02 -1.28721E-04 -1.25631E-04  7.72419E-05  1.09141E-05  9.99546E-02  9.33579E-04  4.23168E-04 -2.93847E-05 -4.80570E-05
  2.400  5.69521E-02  2.78336E-04 -7.93210E-05  9.17025E-05  1.36859E-05  9.95262E-02  8.19373E-04  3.34557E-04 -4.10071E-05 -6.07447E-05
  2.500  5.70397E-02  6.83854E-04 -2.50047E-05  1.07138E-04  1.68390E-05  9.92146E-02  6.69004E-04  2.33530E-04 -5.43933E-05 -7.52945E-05
  2.600  5.70423E-02  1.07440E-03  3.58395E-05  1.23261E-04  2.03508E-05  9.90321E-02  4.94621E-04  1.25054E-04 -6.92684E-05 -9.16008E-05
  2.700  5.69661E-02  1.43693E-03  1.01371E-04  1.39718E-04  2.41812E-05  9.89806E-02  3.10794E-04  1.48988E-05 -8.52223E-05 -1.09453E-04
  2.800  5.68202E-02  1.75939E-03  1.69461E-04  1.56103E-04  2.82722E-05  9.90518E-02  1.33491E-04 -9.06593E-05 -1.01713E-04 -1.28528E-04
  2.900  5.66164E-02  2.03117E-03  2.37777E-04  1.71964E-04  3.25489E-05  9.92280E-02 -2.10730E-05 -1.85171E-04 -1.18080E-04 -1.48388E-04
  3.000  5.63686E-02  2.24364E-03  3.03885E-04  1.86821E-04  3.69212E-05  9.94841E-02 -1.37645E-04 -2.62388E-04 -1.33562E-04 -1.68486E-04
  3.100  5.60919E-02  2.39047E-03  3.65343E-04  2.00175E-04  4.12860E-05  9.97893E-02 -2.03097E-04 -3.16644E-04 -1.47328E-04 -1.88179E-04
  3.200  5.58021E-02  2.46795E-03  4.19814E-04  2.11532E-04  4.55303E-05  1.00110E-01 -2.07461E-04 -3.43232E-04 -1.58516E-04 -2.06746E-04
  3.300  5.55149E-02  2.47517E-03  4.65163E-04  2.20416E-04  4.95348E-05  1.00410E-01 -1.44737E-04 -3.38742E-04 -1.66268E-04 -2.23416E-04
  3.400  5.52452E-02  2.41405E-03  4.99553E-04  2.26389E-04  5.31776E-05  1.00659E-01 -1.34261E-05 -3.01343E-04 -1.69791E-04 -2.37406E-04
  3.500  5.50060E-02  2.28931E-03  5.21540E-04  2.29069E-04  5.63386E-05  1.00825E-01  1.83272E-04 -2.30986E-04 -1.68401E-04 -2.47953E-04
  3.600  5.48084E-02  2.10831E-03  5.30147E-04  2.28150E-04  5.89033E-05  1.00886E-01  4.37614E-04 -1.29499E-04 -1.61582E-04 -2.54362E-04
  3.700  5.46604E-02  1.88078E-03  5.24928E-04  2.23414E-04  6.07667E-05  1.00826E-01  7.37821E-04 -5.73383E-07 -1.49038E-04 -2.56050E-04
  3.800  5.45665E-02  1.61841E-03  5.06023E-04  2.14750E-04  6.18379E-05  1.00634E-01  1.06890E-03  1.50381E-04 -1.30736E-04 -2.52585E-04
  3.900  5.45277E-02  1.33449E-03  4.74177E-04  2.02168E-04  6.20428E-05  1.00309E-01  1.41374E-03  3.16496E-04 -1.06949E-04 -2.43724E-04
  4.000  5.45406E-02  1.04334E-03  4.30755E-04  1.85806E-04  6.13289E-05  9.98568E-02  1.75435E-03  4.89830E-04 -7.82667E-05 -2.29448E-04
  4.100  5.45979E-02  7.59801E-04  3.77724E-04  1.65944E-04  5.96675E-05  9.92872E-02  2.07328E-03  6.61834E-04 -4.56018E-05 -2.09977E-04
  4.200  5.46877E-02  4.98660E-04  3.17605E-04  1.43004E-04  5.70573E-05  9.86149E-02  2.35491E-03  8.23895E-04 -1.01653E-05 -1.85777E-04
  4.300  5.47946E-02  2.74064E-04  2.53409E-04  1.17551E-04  5.35270E-05  9.78567E-02  2.58668E-03  9.67909E-04  2.65812E-05 -1.57561E-04
  4.400  5.48994E-02  9.89782E-05  1.88539E-04  9.02911E-05  4.91373E-05  9.70294E-02  2.76014E-03  1.08683E-03  6.29975E-05 -1.26256E-04
  4.500  5.49797E-02 -1.53359E-05  1.26669E-04  6.20547E-05  4.39824E-05  9.61480E-02  2.87164E-03  1.17520E-03  9.73596E-05 -9.29781E-05
  4.600  5.50108E-02 -5.97814E-05  7.16010E-05  3.37832E-05  3.81903E-05  9.52238E-02  2.92270E-03  1.22955E-03  1.27972E-04 -5.89730E-05
  4.700  5.49668E-02 -2.78117E-05  2.71052E-05  6.50263E-06  3.19226E-05  9.42633E-02  2.91994E-03  1.24869E-03  1.53288E-04 -2.55602E-05
  4.800  5.48209E-02  8.42757E-05 -3.24904E-06 -1.87070E-05  2.53718E-05  9.32667E-02  2.87470E-03  1.23387E-03  1.72036E-04  5.93823E-06
  4.900  5.45470E-02  2.77153E-04 -1.62676E-05 -4.07498E-05  1.87582E-05  9.22282E-02  2.80222E-03  1.18872E-03  1.83327E-04  3.42706E-05
  5.000  5.41206E-02  5.48391E-04 -9.29828E-06 -5.85563E-05  1.23243E-05  9.11354E-02  2.72053E-03  1.11906E-03  1.86753E-04  5.83270E-05
  5.100  5.35199E-02  8.92516E-04  1.96168E-05 -7.11299E-05  6.32755E-06  8.99703E-02  2.64915E-03  1.03258E-03  1.82448E-04  7.72051E-05
  5.200  5.27269E-02  1.30119E-03  7.16148E-05 -7.75952E-05  1.03130E-06  8.87104E-02  2.60760E-03  9.38255E-04  1.71112E-04  9.02650E-05
  5.300  5.17281E-02  1.76351E-03  1.46918E-04 -7.72444E-05 -3.30538E-06  8.73301E-02  2.61396E-03  8.45833E-04  1.54000E-04  9.71687E-05
  5.400  5.05153E-02  2.26644E-03  2.44781E-04 -6.95809E-05 -6.43948E-06  8.58027E-02  2.68349E-03  7.65125E-04  1.32854E-04  9.79013E-05
  5.500  4.90864E-02  2.79529E-03  3.63485E-04 -5.43556E-05 -8.15601E-06  8.41021E-02  2.82746E-03  7.05357E-04  1.09804E-04  9.27723E-05
  5.600  4.74452E-02  3.33434E-03  5.00379E-04 -3.15939E-05 -8.28010E-06  8.22047E-02  3.05231E-03  6.74544E-04  8.72341E-05  8.23952E-05
  5.700  4.56016E-02  3.86744E-03  6.51972E-04 -1.61060E-06 -6.68809E-06  8.00916E-02  3.35910E-03  6.78945E-04  6.76151E-05  6.76488E-05
  5.800  4.35715E-02  4.37869E-03  8.14066E-04  3.49887E-05 -3.31697E-06  7.77497E-02  3.74335E-03  7.22651E-04  5.33340E-05  4.96204E-05
  5.900  4.13759E-02  4.85303E-03  9.81935E-04  7.73213E-05  1.82856E-06  7.51732E-02  4.19540E-03  8.07321E-04  4.65195E-05  2.95365E-05
  6.000  3.90407E-02  5.27687E-03  1.15053E-03  1.24256E-04  8.67218E-06  7.23639E-02  4.70089E-03  9.32093E-04  4.88854E-05  8.68644E-06
  6.100  3.65952E-02  5.63861E-03  1.31468E-03  1.74454E-04  1.70656E-05  6.93322E-02  5.24182E-03  1.09366E-03  6.16024E-05 -1.16580E-05
  6.200  3.40712E-02  5.92899E-03  1.46937E-03  2.26426E-04  2.67919E-05  6.60963E-02  5.79760E-03  1.28650E-03  8.52080E-05 -3.03177E-05
  6.300  3.15021E-02  6.14143E-03  1.60989E-03  2.78593E-04  3.75734E-05  6.26816E-02  6.34636E-03  1.50328E-03  1.19564E-04 -4.62737E-05
  6.400  2.89215E-02  6.27218E-03  1.73212E-03  3.29358E-04  4.90818E-05  5.91201E-02  6.86630E-03  1.73532E-03  1.63861E-04 -5.87212E-05
  6.500  2.63618E-02  6.32032E-03  1.83261E-03  3.77172E-04  6.09532E-05  5.54486E-02  7.33691E-03  1.97314E-03  2.16674E-04 -6.71062E-05
  6.600  2.38540E-02  6.28766E-03  1.90879E-03  4.20607E-04  7.28035E-05  5.17076E-02  7.74008E-03  2.20704E-03  2.76057E-04 -7.11447E-05
  6.700  2.14259E-02  6.17854E-03  1.95899E-03  4.58412E-04  8.42464E-05  4.79391E-02  8.06103E-03  2.42765E-03  3.39673E-04 -7.08221E-05
  6.800  1.91019E-02  5.99944E-03  1.98251E-03  4.89569E-04  9.49113E-05  4.41855E-02  8.28892E-03  2.62647E-03  4.04947E-04 -6.63753E-05
  6.900  1.69024E-02  5.75860E-03  1.97960E-03  5.13324E-04  1.04460E-04  4.04876E-02  8.41719E-03  2.79623E-03  4.69228E-04 -5.82593E-05
  7.000  1.48435E-02  5.46559E-03  1.95138E-03  5.29218E-04  1.12601E-04  3.68836E-02  8.44366E-03  2.93125E-03  5.29950E-04 -4.71021E-05
  7.100  1.29367E-02  5.13077E-03  1.89975E-03  5.37085E-04  1.19103E-04  3.34075E-02  8.37028E-03  3.02759E-03  5.84775E-04 -3.36516E-05
  7.200  1.11892E-02  4.76488E-03  1.82728E-03  5.37051E-04  1.23803E-04  3.00887E-02  8.20277E-03  3.08317E-03  6.31719E-04 -1.87200E-05
  7.300  9.60429E-03  4.37854E-03  1.73700E-03  5.29509E-04  1.26611E-04  2.69510E-02  7.94995E-03  3.09770E-03  6.69238E-04 -3.12857E-06
  7.400  8.18130E-03  3.98189E-03  1.63230E-03  5.15082E-04  1.27510E-04  2.40125E-02  7.62307E-03  3.07254E-03  6.96286E-04  1.23424E-05
  7.500  6.91639E-03  3.58424E-03  1.51672E-03  4.94584E-04  1.26553E-04  2.12858E-02  7.23503E-03  3.01049E-03  7.12336E-04  2.69952E-05
  7.600  5.80298E-03  3.19383E-03  1.39381E-03  4.68966E-04  1.23858E-04  1.87778E-02  6.79960E-03  2.91549E-03  7.17360E-04  4.02471E-05
  7.700  4.83237E-03  2.81765E-03  1.26698E-03  4.39268E-04  1.19595E-04  1.64902E-02  6.33069E-03  2.79232E-03  7.11794E-04  5.16505E-05
  7.800  3.99425E-03  2.46134E-03  1.13937E-03  4.06563E-04  1.13979E-04  1.44205E-02  5.84174E-03  2.64628E-03  6.96463E-04  6.09026E-05
  7.900  3.27729E-03  2.12919E-03  1.01380E-03  3.71913E-04  1.07252E-04  1.25622E-02  5.34518E-03  2.48291E-03  6.72504E-04  6.78440E-05
  8.000  2.66961E-03  1.82415E-03  8.92651E-04  3.36325E-04  9.96737E-05  1.09057E-02  4.85206E-03  2.30767E-03  6.41272E-04  7.24487E-05
  8.100  2.15919E-03  1.54794E-03  7.77856E-04  3.00716E-04  9.15072E-05  9.43899E-03  4.37175E-03  2.12571E-03  6.04249E-04  7.48065E-05
  8.200  1.73425E-03  1.30121E-03  6.70887E-04  2.65888E-04  8.30072E-05  8.14860E-03  3.91186E-03  1.94173E-03  5.62956E-04  7.51017E-05
  8.300  1.38356E-03  1.08365E-03  5.72762E-04  2.32510E-04  7.44104E-05  7.01984E-03  3.47821E-03  1.75981E-03  5.18877E-04  7.35876E-05
  8.400  1.09660E-03  8.94203E-04  4.84079E-04  2.01111E-04  6.59279E-05  6.03767E-03  3.07489E-03  1.58337E-03  4.73396E-04  7.05626E-05
  8.500  8.63730E-04  7.31227E-04  4.05060E-04  1.72079E-04  5.77393E-05  5.18705E-03  2.70439E-03  1.41510E-03  4.27749E-04  6.63459E-05
  8.600  6.76281E-04  5.92666E-04  3.35607E-04  1.45666E-04  4.99900E-05  4.45339E-03  2.36786E-03  1.25699E-03  3.82990E-04  6.12574E-05
  8.700  5.26574E-04  4.76207E-04  2.75362E-04  1.22003E-04  4.27897E-05  3.82280E-03  2.06527E-03  1.11041E-03  3.39977E-04  5.56006E-05
  8.800  4.07909E-04  3.79409E-04  2.23769E-04  1.01113E-04  3.62136E-05  3.28232E-03  1.79566E-03  9.76127E-04  2.99371E-04  4.96495E-05
  8.900  3.14531E-04  2.99822E-04  1.80131E-04  8.29316E-05  3.03047E-05  2.82008E-03  1.55739E-03  8.54410E-04  2.61638E-04  4.36407E-05
  9.000  2.41557E-04  2.35074E-04  1.43668E-04  6.73223E-05  2.50774E-05  2.42531E-03  1.34833E-03  7.45131E-04  2.27072E-04  3.77683E-05
  9.100  1.84897E-04  1.82933E-04  1.13556E-04  5.40989E-05  2.05220E-05  2.08841E-03  1.16603E-03  6.47844E-04  1.95813E-04  3.21830E-05
  9.200  1.41172E-04  1.41359E-04  8.89746E-05  4.30411E-05  1.66097E-05  1.80091E-03  1.00791E-03  5.61870E-04  1.67874E-04  2.69940E-05
  9.300  1.07614E-04  1.08524E-04  6.91305E-05  3.39108E-05  1.32969E-05  1.55539E-03  8.71351E-04  4.86382E-04  1.43167E-04  2.22727E-05
  9.400  8.19888E-05  8.28265E-05  5.32836E-05  2.64643E-05  1.05305E-05  1.34547E-03  7.53808E-04  4.20461E-04  1.21530E-04  1.80574E-05
  9.500  6.25047E-05  6.28877E-05  4.07604E-05  2.04637E-05  8.25135E-06  1.16563E-03  6.52873E-04  3.63156E-04  1.02748E-04  1.43597E-05
  9.600  4.77432E-05  4.75423E-05  3.09625E-05  1.56845E-05  6.39849E-06  1.01121E-03  5.66321E-04  3.13523E-04  8.65741E-05  1.11697E-05
  9.700  3.65900E-05  3.58208E-05  2.33696E-05  1.19207E-05  4.91163E-06  8.78233E-04  4.92134E-04  2.70655E-04  7.27466E-05  8.46228E-06
  9.800  2.81777E-05  2.69286E-05  1.75380E-05  8.98861E-06  3.73352E-06  7.63387E-04  4.28510E-04  2.33705E-04  6.10016E-05  6.20141E-06
  9.900  2.18364E-05  2.02242E-05  1.30964E-05  6.72791E-06  2.81150E-06  6.63888E-04  3.73867E-04  2.01898E-04  5.10830E-05  4.34480E-06
 10.000  1.70530E-05  1.51962E-05  9.73916E-06  5.00172E-06  2.09844E-06  5.77417E-04  3.26830E-04  1.74533E-04  4.27495E-05  2.84718E-06
 10.100  1.34369E-05  1.14423E-05  7.21890E-06  3.69552E-06  1.55323E-06  5.02052E-04  2.86218E-04  1.50992E-04  3.57790E-05  1.66289E-06
 10.200  1.06927E-05  8.64951E-06  5.33833E-06  2.71520E-06  1.14080E-06  4.36199E-04  2.51027E-04  1.30728E-04  2.99705E-05  7.47799E-07
 10.300  8.59849E-06  6.57691E-06  3.94237E-06  1.98486E-06  8.31908E-07  3.78534E-04  2.20411E-04  1.13268E-04  2.51451E-05  6.04952E-08
 10.400  6.98820E-06  5.04089E-06  2.91067E-06  1.44423E-06  6.02627E-07  3.27961E-04  1.93661E-04  9.82032E-05  2.11457E-05 -4.36929E-07
 10.500  5.73837E-06  3.90265E-06  2.15099E-06  1.04623E-06  4.33775E-07  2.83565E-04  1.70191E-04  8.51838E-05  1.78358E-05 -7.78530E-07
 10.600  4.75747E-06  3.05803E-06  1.59331E-06  7.54603E-07  3.10251E-07  2.44582E-04  1.49515E-04  7.39110E-05  1.50982E-05 -9.94425E-07
 10.700  3.97797E-06  2.42938E-06  1.18502E-06  5.41792E-07  2.20374E-07  2.10364E-04  1.31236E-04  6.41313E-05  1.28326E-05 -1.11089E-06
 10.800  3.35018E-06  1.95907E-06  8.86817E-07  3.87094E-07  1.55258E-07  1.80361E-04  1.15029E-04  5.56301E-05  1.09545E-05 -1.15055E-06
 10.900  2.83761E-06  1.60454E-06  6.69526E-07  2.75100E-07  1.08243E-07  1.54099E-04  1.00625E-04  4.82264E-05  9.39301E-06 -1.13269E-06
 11.000  2.41356E-06  1.33447E-06  5.11545E-07  1.94426E-07  7.44064E-08  1.31163E-04  8.78082E-05  4.17677E-05  8.08921E-06 -1.07351E-06
 11.100  2.05845E-06  1.12589E-06  3.96913E-07  1.36697E-07  5.01467E-08  1.11191E-04  7.63978E-05  3.61253E-05  6.99446E-06 -9.86414E-07
 11.200  1.75791E-06  9.62022E-07  3.13836E-07  9.57589E-08  3.28521E-08  9.38568E-05  6.62442E-05  3.11911E-05  6.06908E-06 -8.82343E-07
 11.300  1.50135E-06  8.30685E-07  2.53598E-07  6.70875E-08  2.06346E-08  7.88706E-05  5.72214E-05  2.68737E-05  5.28092E-06 -7.70016E-07
 11.400  1.28092E-06  7.23087E-07  2.09758E-07  4.73417E-08  1.21292E-08  6.59684E-05  4.92210E-05  2.30958E-05  4.60423E-06 -6.56205E-07
 11.500  1.09068E-06  6.32937E-07  1.77564E-07  3.40429E-08  6.34293E-09  5.49111E-05  4.21482E-05  1.97917E-05  4.01857E-06 -5.45988E-07
 11.600  9.26107E-07  5.55784E-07  1.53526E-07  2.53440E-08  2.54662E-09  4.54807E-05  3.59184E-05  1.69050E-05  3.50788E-06 -4.42982E-07
 11.700  7.83647E-07  4.88524E-07  1.35105E-07  1.98651E-08  1.97882E-10  3.74789E-05  3.04545E-05  1.43874E-05  3.05963E-06 -3.49572E-07
 11.800  6.60440E-07  4.29023E-07  1.20475E-07  1.65769E-08 -1.11187E-09  3.07252E-05  2.56855E-05  1.21966E-05  2.66412E-06 -2.67127E-07
 11.900  5.54119E-07  3.75839E-07  1.08355E-07  1.47171E-08 -1.69350E-09  2.50562E-05  2.15447E-05  1.02957E-05  2.31387E-06 -1.96193E-07
 12.000  4.62666E-07  3.28007E-07  9.78692E-08  1.37296E-08 -1.78448E-09  2.03244E-05  1.79696E-05  8.65185E-06  2.00305E-06 -1.36684E-07
 12.100  3.84327E-07  2.84890E-07  8.84478E-08  1.32186E-08 -1.56550E-09  1.63975E-05  1.49013E-05  7.23587E-06  1.72712E-06 -8.80386E-08
 12.200  3.17541E-07  2.46053E-07  7.97406E-08  1.29125E-08 -1.17218E-09  1.31576E-05  1.22843E-05  6.02147E-06  1.48244E-06 -4.93710E-08
 12.300  2.60906E-07  2.11187E-07  7.15542E-08  1.26360E-08 -7.03721E-10  1.05001E-05  1.00664E-05  4.98489E-06  1.26602E-06 -1.95910E-08
 12.400  2.13153E-07  1.80049E-07  6.38012E-08  1.22859E-08 -2.29828E-10  8.33337E-06  8.19905E-06  4.10463E-06  1.07530E-06  2.49253E-09
 12.500  1.73132E-07  1.52422E-07  5.64609E-08  1.18124E-08  2.03565E-10  6.57732E-06  6.63736E-06  3.36116E-06  9.08014E-07  1.80905E-08
 12.600  1.39798E-07  1.28096E-07  4.95498E-08  1.12030E-08  5.69284E-10  5.16263E-06  5.34012E-06  2.73681E-06  7.62092E-07  2.83719E-08
 12.700  1.12213E-07  1.06851E-07  4.31010E-08  1.04697E-08  8.54521E-10  4.02980E-06  4.26989E-06  2.21560E-06  6.35587E-07  3.44205E-08
 12.800  8.95325E-08  8.84587E-08  3.71492E-08  9.63884E-09  1.05700E-09  3.12814E-06  3.39300E-06  1.78314E-06  5.26645E-07  3.72062E-08
 12.900  7.10076E-08  7.26763E-08  3.17221E-08  8.74353E-09  1.18168E-09  2.41478E-06  2.67947E-06  1.42657E-06  4.33487E-07  3.75709E-08
 13.000  5.59770E-08  5.92556E-08  2.68350E-08  7.81811E-09  1.23806E-09  1.85379E-06  2.10286E-06  1.13446E-06  3.54411E-07  3.62234E-08
 13.100  4.38624E-08  4.79465E-08  2.24895E-08  6.89437E-09  1.23801E-09  1.41526E-06  1.64010E-06  8.96705E-07  2.87791E-07  3.37432E-08
 13.200  3.41629E-08  3.85026E-08  1.86738E-08  5.99942E-09  1.19410E-09  1.07451E-06  1.27125E-06  7.04462E-07  2.32095E-07  3.05898E-08
 13.300  2.64485E-08  3.06868E-08  1.53642E-08  5.15450E-09  1.11849E-09  8.11314E-07  9.79277E-07  5.50048E-07  1.85893E-07  2.71151E-08
 13.400  2.03533E-08  2.42755E-08  1.25276E-08  4.37480E-09  1.02211E-09  6.09222E-07  7.49716E-07  4.26845E-07  1.47863E-07  2.35782E-08
 13.500  1.55692E-08  1.90620E-08  1.01245E-08  3.66979E-09  9.14276E-10  4.54964E-07  5.70448E-07  3.29202E-07  1.16805E-07  2.01606E-08
 13.600  1.18387E-08  1.48590E-08  8.11138E-09  3.04396E-09  8.02497E-10  3.37909E-07  4.31395E-07  2.52334E-07  9.16371E-08  1.69808E-08
 13.700  8.94865E-09  1.14992E-08  6.44321E-09  2.49769E-09  6.92506E-10  2.49604E-07  3.24255E-07  1.92225E-07  7.14003E-08  1.41082E-08
 13.800  6.72413E-09  8.83552E-09  5.07534E-09  2.02820E-09  5.88398E-10  1.83375E-07  2.42249E-07  1.45535E-07  5.52536E-08  1.15747E-08
 13.900  5.02287E-09  6.74101E-09  3.96507E-09  1.63048E-09  4.92851E-10  1.33990E-07  1.79894E-07  1.09511E-07  4.24686E-08  9.38547E-09
 14.000  3.73007E-09  5.10718E-09  3.07275E-09  1.29806E-09  4.07372E-10  9.73769E-08  1.32790E-07  8.18995E-08  3.24220E-08  7.52692E-09
 14.100  2.75386E-09  3.84271E-09  2.36243E-09  1.02373E-09  3.32552E-10  7.03880E-08  9.74362E-08  6.08766E-08  2.45864E-08  5.97385E-09
 14.200  2.02133E-09  2.87163E-09  1.80222E-09  8.00023E-10  2.68305E-10  5.06069E-08  7.10720E-08  4.49753E-08  1.85205E-08  4.69445E-09
 14.300  1.47509E-09  2.13153E-09  1.36437E-09  6.19676E-10  2.14073E-10  3.61906E-08  5.15364E-08  3.30266E-08  1.38591E-08  3.65424E-09
 14.400  1.07028E-09  1.57165E-09  1.02517E-09  4.75854E-10  1.69000E-10  2.57433E-08  3.71520E-08  2.41062E-08  1.03029E-08  2.81871E-09
 14.500  7.72112E-10  1.15123E-09  7.64618E-10  3.62348E-10  1.32069E-10  1.82148E-08  2.66268E-08  1.74897E-08  7.60946E-09  2.15520E-09
 14.600  5.53840E-10  8.37789E-10  5.66157E-10  2.73659E-10  1.02207E-10  1.28199E-08  1.89731E-08  1.26135E-08  5.58387E-09  1.63393E-09
 14.700  3.95021E-10  6.05773E-10  4.16218E-10  2.05025E-10  7.83573E-11  8.97537E-09  1.34418E-08  9.04282E-09  4.07124E-09  1.22856E-09
 14.800  2.80156E-10  4.35228E-10  3.03839E-10  1.52403E-10  5.95303E-11  6.25077E-09  9.46866E-09  6.44465E-09  2.94951E-09  9.16375E-10
 14.900  1.97576E-10  3.10731E-10  2.20268E-10  1.12419E-10  4.48311E-11  4.33050E-09  6.63205E-09  4.56600E-09  2.12338E-09  6.78195E-10
 15.000  1.38559E-10  2.20466E-10  1.58595E-10  8.23030E-11  3.34746E-11  2.98450E-09  4.61902E-09  3.21608E-09  1.51908E-09  4.98103E-10
 15.100  9.66302E-11  1.55458E-10  1.13421E-10  5.98108E-11  2.47883E-11  2.04617E-09  3.19897E-09  2.25210E-09  1.08001E-09  3.63111E-10
 15.200  6.70162E-11  1.08951E-10  8.05762E-11  4.31510E-11  1.82083E-11  1.39559E-09  2.20313E-09  1.56794E-09  7.63118E-10  2.62773E-10
 15.300  4.62218E-11  7.58948E-11  5.68677E-11  3.09103E-11  1.32698E-11  9.46948E-10  1.50889E-09  1.08535E-09  5.35912E-10  1.88801E-10
 15.400  3.17047E-11  5.25517E-11  3.98755E-11  2.19871E-11  9.59642E-12  6.39224E-10  1.02771E-09  7.46996E-10  3.74070E-10  1.34700E-10
 15.500  2.16283E-11  3.61724E-11  2.77819E-11  1.55322E-11  6.88775E-12  4.29286E-10  6.96146E-10  5.11202E-10  2.59531E-10  9.54377E-11
 15.600  1.46742E-11  2.47517E-11  1.92338E-11  1.08979E-11  4.90721E-12  2.86822E-10  4.68980E-10  3.47860E-10  1.78987E-10  6.71598E-11
 15.700  9.90208E-12  1.68380E-11  1.32326E-11  7.59521E-12  3.47089E-12  1.90660E-10  3.14230E-10  2.35379E-10  1.22707E-10  4.69441E-11
 15.800  6.64586E-12  1.13883E-11  9.04765E-12  5.25854E-12  2.43756E-12  1.26093E-10  2.09407E-10  1.58379E-10  8.36272E-11  3.25968E-11
 15.900  4.43648E-12  7.65820E-12  6.14840E-12  3.61707E-12  1.69992E-12  8.29693E-11  1.38803E-10  1.05975E-10  5.66602E-11  2.24870E-11
 16.000  2.94577E-12  5.12052E-12  4.15290E-12  2.47201E-12  1.17736E-12  5.43179E-11  9.15129E-11  7.05184E-11  3.81661E-11  1.54130E-11
 16.100  1.94554E-12  3.40439E-12  2.78824E-12  1.67872E-12  8.09928E-13  3.53814E-11  6.00141E-11  4.66665E-11  2.55601E-11  1.04973E-11
 16.200  1.27813E-12  2.25072E-12  1.86090E-12  1.13286E-12  5.53454E-13  2.29308E-11  3.91492E-11  3.07132E-11  1.70196E-11  7.10444E-12
 16.300  8.35236E-13  1.47971E-12  1.23468E-12  7.59756E-13  3.75713E-13  1.47871E-11  2.54041E-11  2.01036E-11  1.12682E-11  4.77836E-12
 16.400  5.42943E-13  9.67435E-13  8.14414E-13  5.06406E-13  2.53401E-13  9.48793E-12  1.63986E-11  1.30878E-11  7.41815E-12  3.19413E-12
 16.500  3.51090E-13  6.29033E-13  5.34095E-13  3.35490E-13  1.69814E-13  6.05747E-12  1.05303E-11  8.47445E-12  4.85607E-12  2.12216E-12
 16.600  2.25846E-13  4.06768E-13  3.48253E-13  2.20924E-13  1.13080E-13  3.84812E-12  6.72691E-12  5.45786E-12  3.16110E-12  1.40146E-12
 16.700  1.44525E-13  2.61611E-13  2.25785E-13  1.44616E-13  7.48307E-14  2.43247E-12  4.27508E-12  3.49631E-12  2.04631E-12  9.19996E-13
 16.800  9.20064E-14  1.67347E-13  1.45558E-13  9.41065E-14  4.92135E-14  1.53002E-12  2.70294E-12  2.22786E-12  1.31734E-12  6.00367E-13
 16.900  5.82705E-14  1.06474E-13  9.33124E-14  6.08806E-14  3.21683E-14  9.57637E-13  1.70020E-12  1.41209E-12  8.43397E-13  3.89490E-13
 17.000  3.67149E-14  6.73827E-14  5.94869E-14  3.91576E-14  2.08996E-14  5.96437E-13  1.06401E-12  8.90328E-13  5.37016E-13  2.51214E-13
 17.100  2.30148E-14  4.24174E-14  3.77137E-14  2.50410E-14  1.34972E-14  3.69654E-13  6.62494E-13  5.58416E-13  3.40076E-13  1.61096E-13
 17.200  1.43533E-14  2.65610E-14  2.37787E-14  1.59223E-14  8.66492E-15  2.27980E-13  4.10411E-13  3.48415E-13  2.14196E-13  1.02715E-13
 17.300  8.90598E-15  1.65447E-14  1.49110E-14  1.00670E-14  5.53005E-15  1.39919E-13  2.52967E-13  2.16261E-13  1.34186E-13  6.51192E-14
 17.400  5.49804E-15  1.02519E-14  9.29968E-15  6.32918E-15  3.50880E-15  8.54549E-14  1.55141E-13  1.33540E-13  8.36128E-14  4.10518E-14
 17.500  3.37705E-15  6.31956E-15  5.76883E-15  3.95706E-15  2.21347E-15  5.19382E-14  9.46705E-14  8.20363E-14  5.18230E-14  2.57347E-14
 17.600  2.06384E-15  3.87544E-15  3.55943E-15  2.46031E-15  1.38834E-15  3.14144E-14  5.74826E-14  5.01385E-14  3.19498E-14  1.60431E-14
 17.700  1.25497E-15  2.36437E-15  2.18454E-15  1.52130E-15  8.65859E-16  1.89091E-14  3.47296E-14  3.04872E-14  1.95938E-14  9.94606E-15
 17.800  7.59305E-16  1.43510E-15  1.33364E-15  9.35546E-16  5.36961E-16  1.13270E-14  2.08791E-14  1.84439E-14  1.19533E-14  6.13235E-15
 17.900  4.57121E-16  8.66620E-16  8.09893E-16  5.72211E-16  3.31134E-16  6.75256E-15  1.24906E-14  1.11016E-14  7.25412E-15  3.76036E-15
 18.000  2.73832E-16  5.20676E-16  4.89263E-16  3.48098E-16  2.03070E-16  4.00623E-15  7.43561E-15  6.64857E-15  4.37945E-15  2.29337E-15
 18.100  1.63224E-16  3.11248E-16  2.94032E-16  2.10628E-16  1.23848E-16  2.36549E-15  4.40476E-15  3.96173E-15  2.63029E-15  1.39114E-15
 18.200  9.68140E-17  1.85121E-16  1.75790E-16  1.26769E-16  7.51179E-17  1.39005E-15  2.59661E-15  2.34891E-15  1.57162E-15  8.39342E-16
 18.300  5.71414E-17  1.09553E-16  1.04557E-16  7.58941E-17  4.53138E-17  8.12959E-16  1.52327E-15  1.38573E-15  9.34239E-16  5.03718E-16
 18.400  3.35606E-17  6.45085E-17  6.18703E-17  4.51972E-17  2.71871E-17  4.73194E-16  8.89279E-16  8.13452E-16  5.52519E-16  3.00697E-16
 18.500  1.96147E-17  3.77961E-17  3.64244E-17  2.67754E-17  1.62239E-17  2.74125E-16  5.16652E-16  4.75152E-16  3.25105E-16  1.78557E-16
 18.600  1.14081E-17  2.20354E-17  2.13350E-17  1.57795E-17  9.62987E-18  1.58052E-16  2.98719E-16  2.76178E-16  1.90325E-16  1.05473E-16
 18.700  6.60282E-18  1.27834E-17  1.24335E-17  9.25120E-18  5.68556E-18  9.06982E-17  1.71886E-16  1.59738E-16  1.10860E-16  6.19778E-17
 18.800  3.80310E-18  7.37960E-18  7.20953E-18  5.39583E-18  3.33908E-18  5.18023E-17  9.84313E-17  9.19387E-17  6.42488E-17  3.62302E-17
 18.900  2.17993E-18  4.23921E-18  4.15947E-18  3.13102E-18  1.95071E-18  2.94480E-17  5.60983E-17  5.26581E-17  3.70492E-17  2.10695E-17
 19.000  1.24351E-18  2.42333E-18  2.38780E-18  1.80755E-18  1.13366E-18  1.66618E-17  3.18197E-17  3.00135E-17  2.12580E-17  1.21899E-17
 19.100  7.05940E-19  1.37854E-18  1.36394E-18  1.03821E-18  6.55408E-19  9.38328E-18  1.79629E-17  1.70239E-17  1.21368E-17  7.01646E-18
 19.200  3.98841E-19  7.80399E-19  7.75243E-19  5.93300E-19  3.76953E-19  5.25964E-18  1.00925E-17  9.60945E-18  6.89497E-18  4.01806E-18
 19.300  2.24260E-19  4.39651E-19  4.38464E-19  3.37344E-19  2.15686E-19  2.93448E-18  5.64369E-18  5.39812E-18  3.89775E-18  2.28931E-18
 19.400  1.25496E-19  2.46491E-19  2.46770E-19  1.90848E-19  1.22779E-19  1.62961E-18  3.14109E-18  3.01785E-18  2.19259E-18  1.29775E-18
 19.500  6.98939E-20  1.37532E-19  1.38204E-19  1.07431E-19  6.95359E-20  9.00778E-19  1.74002E-18  1.67907E-18  1.22735E-18  7.31963E-19
 19.600  3.87422E-20  7.63693E-20  7.70241E-20  6.01735E-20  3.91816E-20  4.95607E-19  9.59377E-19  9.29743E-19  6.83686E-19  4.10774E-19
 19.700  2.13733E-20  4.22042E-20  4.27186E-20  3.35370E-20  2.19662E-20  2.71423E-19  5.26490E-19  5.12372E-19  3.78989E-19  2.29374E-19
 19.800  1.17356E-20  2.32123E-20  2.35775E-20  1.85992E-20  1.22528E-20  1.47962E-19  2.87582E-19  2.81024E-19  2.09067E-19  1.27444E-19
 19.900  6.41342E-21  1.27061E-20  1.29503E-20  1.02642E-20  6.80043E-21  8.02883E-20  1.56355E-19  1.53405E-19  1.14774E-19  7.04588E-20
  67 202 200   0.100
  0.000  4.77150E-02 -2.48253E-16 -3.53884E-16 -5.12880E-16 -1.14439E-16  9.42607E-02 -4.96507E-16 -5.62050E-16 -1.61370E-15  1.08717E-15
  0.100  4.77325E-02 -2.34300E-05 -1.08651E-08  6.27903E-13 -7.72464E-16  9.43692E-02 -1.58428E-05  2.60764E-08  4.91374E-12 -8.52572E-15
  0.200  4.77854E-02 -9.28559E-05 -1.71819E-07  4.03813E-11  1.86543E-13  9.46894E-02 -6.16713E-05  4.12143E-07  3.09337E-10 -6.34751E-13
  0.300  4.78759E-02 -2.05703E-04 -8.52987E-07  4.64350E-10  4.76525E-12  9.52058E-02 -1.32534E-04  2.04424E-06  3.44450E-09 -1.60527E-11
  0.400  4.80068E-02 -3.57740E-04 -2.62280E-06  2.64176E-09  4.68335E-11  9.58930E-02 -2.20662E-04  6.27800E-06  1.87461E-08 -1.58251E-10
  0.500  4.81819E-02 -5.43173E-04 -6.18001E-06  1.02270E-08  2.73447E-10  9.67178E-02 -3.16151E-04  1.47698E-05  6.86290E-08 -9.27524E-10
  0.600  4.84048E-02 -7.54782E-04 -1.22675E-05  3.10346E-08  1.14649E-09  9.76400E-02 -4.07833E-04  2.92647E-05  1.94829E-07 -3.90598E-09
  0.700  4.86788E-02 -9.84103E-04 -2.15758E-05  7.95725E-08  3.81928E-09  9.86152E-02 -4.84278E-04  5.13628E-05  4.62645E-07 -1.30794E-08
  0.800  4.90064E-02 -1.22166E-03 -3.46456E-05  1.80213E-07  1.07384E-08  9.95969E-02 -5.34820E-04  8.22862E-05  9.61339E-07 -3.69910E-08
  0.900  4.93881E-02 -1.45724E-03 -5.17776E-05  3.70871E-07  2.64949E-08  1.00539E-01 -5.50544E-04  1.22672E-04  1.79936E-06 -9.18653E-08
  1.000  4.98229E-02 -1.68023E-03 -7.29592E-05  7.06947E-07  5.89105E-08  1.01397E-01 -5.25137E-04  1.72410E-04  3.09380E-06 -2.05724E-07
  1.100  5.03072E-02 -1.88001E-03 -9.78149E-05  1.26513E-06  1.20300E-07  1.02134E-01 -4.55543E-04  2.30541E-04  4.95447E-06 -4.23355E-07
  1.200  5.08348E-02 -2.04629E-03 -1.25585E-04  2.14654E-06  2.28802E-07  1.02720E-01 -3.42349E-04  2.95232E-04  7.46380E-06 -8.11833E-07
  1.300  5.13974E-02 -2.16963E-03 -1.55135E-04  3.47870E-06  4.09625E-07  1.03131E-01 -1.89880E-04  3.63823E-04  1.06548E-05 -1.46607E-06
  1.400  5.19842E-02 -2.24178E-03 -1.84997E-04  5.41561E-06  6.96034E-07  1.03357E-01 -5.98660E-06  4.32950E-04  1.44895E-05 -2.51379E-06
  1.500  5.25824E-02 -2.25611E-03 -2.13443E-04  8.13546E-06  1.12988E-06  1.03398E-01  1.98471E-04  4.98734E-04  1.88410E-05 -4.11903E-06
  1.600  5.31782E-02 -2.20799E-03 -2.38574E-04  1.18356E-05  1.76149E-06  1.03263E-01  4.10400E-04  5.57026E-04  2.34812E-05 -6.48347E-06
  1.700  5.37568E-02 -2.09506E-03 -2.58434E-04  1.67246E-05  2.64880E-06  1.02974E-01  6.15455E-04  6.03676E-04  2.80776E-05 -9.84471E-06
  1.800  5.43035E-02 -1.91742E-03 -2.71130E-04  2.30113E-05  3.85555E-06  1.02557E-01  7.99159E-04  6.34832E-04  3.21988E-05 -1.44707E-05
  1.900  5.48042E-02 -1.67780E-03 -2.74955E-04  3.08915E-05  5.44871E-06  1.02049E-01  9.48064E-04  6.47224E-04  3.53308E-05 -2.06499E-05
  2.000  5.52464E-02 -1.38148E-03 -2.68499E-04  4.05326E-05  7.49497E-06  1.01488E-01  1.05088E-03  6.38428E-04  3.69031E-05 -2.86775E-05
  2.100  5.56196E-02 -1.03618E-03 -2.50750E-04  5.20580E-05  1.00567E-05  1.00915E-01  1.09943E-03  6.07092E-04  3.63232E-05 -3.88365E-05
  2.200  5.59160E-02 -6.51828E-04 -2.21171E-04  6.55308E-05  1.31874E-05  1.00369E-01  1.08947E-03  5.53100E-04  3.30177E-05 -5.13758E-05
  2.300  5.61306E-02 -2.40195E-04 -1.79756E-04  8.09395E-05  1.69272E-05  9.98838E-02  1.02112E-03  4.77679E-04  2.64770E-05 -6.64859E-05
  2.400  5.62620E-02  1.85584E-04 -1.27049E-04  9.81862E-05  2.12981E-05  9.94887E-02  8.99069E-04  3.83419E-04  1.63025E-05 -8.42723E-05
  2.500  5.63118E-02  6.11526E-04 -6.41484E-05  1.17078E-04  2.63006E-05  9.92038E-02  7.32331E-04  2.74221E-04  2.25078E-06 -1.04731E-04
  2.600  5.62848E-02  1.02339E-03  7.33079E-06  1.37323E-04  3.19102E-05  9.90399E-02  5.33747E-04  1.55158E-04 -1.57256E-05 -1.27723E-04
  2.700  5.61891E-02  1.40728E-03  8.53098E-05  1.58533E-04  3.80758E-05  9.89983E-02  3.19122E-04  3.22603E-05 -3.74453E-05 -1.52960E-04
  2.800  5.60351E-02  1.75026E-03  1.67326E-04  1.80225E-04  4.47185E-05  9.90707E-02  1.06126E-04 -8.77676E-05 -6.24751E-05 -1.79988E-04
  2.900  5.58352E-02  2.04088E-03  2.50629E-04  2.01837E-04  5.17325E-05  9.92400E-02 -8.69712E-05 -1.97898E-04 -9.01191E-05 -2.08187E-04
  3.000  5.56035E-02  2.26973E-03  3.32291E-04  2.22742E-04  5.89867E-05  9.94822E-02 -2.42646E-04 -2.91169E-04 -1.19423E-04 -2.36774E-04
  3.100  5.53547E-02  2.42981E-03  4.09327E-04  2.42265E-04  6.63275E-05  9.97681E-02 -3.45434E-04 -3.61100E-04 -1.49197E-04 -2.64821E-04
  3.200  5.51036E-02  2.51691E-03  4.78817E-04  2.59709E-04  7.35828E-05  1.00066E-01 -3.83117E-04 -4.02110E-04 -1.78049E-04 -2.91284E-04
  3.300  5.48644E-02  2.52973E-03  5.38035E-04  2.74378E-04  8.05663E-05  1.00343E-01 -3.47677E-04 -4.09905E-04 -2.04449E-04 -3.15041E-04
  3.400  5.46503E-02  2.47004E-03  5.84568E-04  2.85604E-04  8.70827E-05  1.00568E-01 -2.35957E-04 -3.81820E-04 -2.26797E-04 -3.34940E-04
  3.500  5.44722E-02  2.34257E-03  6.16430E-04  2.92773E-04  9.29332E-05  1.00716E-01 -4.99474E-05 -3.17079E-04 -2.43520E-04 -3.49856E-04
  3.600  5.43388E-02  2.15490E-03  6.32170E-04  2.95352E-04  9.79207E-05  1.00764E-01  2.03301E-04 -2.16942E-04 -2.53166E-04 -3.58755E-04
  3.700  5.42557E-02  1.91718E-03  6.30956E-04  2.92913E-04  1.01855E-04  1.00697E-01  5.12164E-04 -8.47455E-05 -2.54517E-04 -3.60753E-04
  3.800  5.42251E-02  1.64173E-03  6.12650E-04  2.85162E-04  1.04560E-04  1.00507E-01  8.61281E-04  7.42107E-05 -2.46696E-04 -3.55184E-04
  3.900  5.42456E-02  1.34262E-03  5.77858E-04  2.71953E-04  1.05876E-04  1.00194E-01  1.23269E-03  2.52902E-04 -2.29257E-04 -3.41654E-04
  4.000  5.43119E-02  1.03513E-03  5.27948E-04  2.53312E-04  1.05669E-04  9.97625E-02  1.60718E-03  4.42957E-04 -2.02270E-04 -3.20086E-04
  4.100  5.44149E-02  7.35159E-04  4.65049E-04  2.29451E-04  1.03833E-04  9.92217E-02  1.96577E-03  6.35148E-04 -1.66365E-04 -2.90758E-04
  4.200  5.45416E-02  4.58688E-04  3.92014E-04  2.00779E-04  1.00298E-04  9.85853E-02  2.29116E-03  8.19964E-04 -1.22747E-04 -2.54312E-04
  4.300  5.46755E-02  2.21111E-04  3.12350E-04  1.67904E-04  9.50330E-05  9.78683E-02  2.56909E-03  9.88240E-04 -7.31659E-05 -2.11754E-04
  4.400  5.47972E-02  3.66725E-05  2.30114E-04  1.31636E-04  8.80547E-05  9.70853E-02  2.78949E-03  1.13179E-03 -1.98411E-05 -1.64425E-04
  4.500  5.48844E-02 -8.21047E-05  1.49779E-04  9.29754E-05  7.94299E-05  9.62488E-02  2.94734E-03  1.24398E-03  3.46562E-05 -1.13957E-04
  4.600  5.49132E-02 -1.24925E-04  7.60671E-05  5.30970E-05  6.92810E-05  9.53679E-02  3.04307E-03  1.32028E-03  8.75606E-05 -6.21983E-05
  4.700  5.48585E-02 -8.41547E-05  1.37613E-05  1.33241E-05  5.77889E-05  9.44466E-02  3.08267E-03  1.35858E-03  1.36100E-04 -1.11323E-05
  4.800  5.46950E-02  4.48310E-05 -3.25017E-05 -2.49067E-05  4.51940E-05  9.34834E-02  3.07726E-03  1.35946E-03  1.77698E-04  3.72243E-05
  4.900  5.43985E-02  2.63416E-04 -5.84486E-05 -6.00902E-05  3.17955E-05  9.24707E-02  3.04230E-03  1.32622E-03  2.10177E-04  8.09281E-05
  5.000  5.39463E-02  5.69625E-04 -6.03834E-05 -9.07052E-05  1.79477E-05  9.13953E-02  2.99650E-03  1.26467E-03  2.31944E-04  1.18218E-04
  5.100  5.33188E-02  9.58145E-04 -3.53890E-05 -1.15274E-04  4.05257E-06  9.02390E-02  2.96041E-03  1.18287E-03  2.42142E-04  1.47617E-04
  5.200  5.25000E-02  1.42047E-03  1.84955E-05 -1.32429E-04 -9.45031E-06  8.89795E-02  2.95488E-03  1.09055E-03  2.40754E-04  1.68022E-04
  5.300  5.14783E-02  1.94520E-03  1.02135E-04 -1.40975E-04 -2.20978E-05  8.75922E-02  2.99946E-03  9.98532E-04  2.28636E-04  1.78772E-04
  5.400  5.02476E-02  2.51843E-03  2.15204E-04 -1.39957E-04 -3.34203E-05  8.60519E-02  3.11094E-03  9.17957E-04  2.07500E-04  1.79691E-04
  5.500  4.88069E-02  3.12429E-03  3.56146E-04 -1.28719E-04 -4.29610E-05  8.43342E-02  3.30202E-03  8.59566E-04  1.79807E-04  1.71105E-04
  5.600  4.71612E-02  3.74556E-03  5.22197E-04 -1.06949E-04 -5.02975E-05  8.24180E-02  3.58030E-03  8.32951E-04  1.48616E-04  1.53824E-04
  5.700  4.53213E-02  4.36433E-03  7.09463E-04 -7.47199E-05 -5.50633E-05  8.02865E-02  3.94767E-03  8.45903E-04  1.17370E-04  1.29096E-04
  5.800  4.33032E-02  4.96275E-03  9.13062E-04 -3.25057E-05 -5.69688E-05  7.79287E-02  4.40005E-03  9.03870E-04  8.96498E-05  9.85289E-05
  5.900  4.11279E-02  5.52365E-03  1.12732E-03  1.88194E-05 -5.58194E-05  7.53407E-02  4.92758E-03  1.00959E-03  6.89120E-05  6.39985E-05
  6.000  3.88207E-02  6.03130E-03  1.34600E-03  7.80015E-05 -5.15310E-05  7.25261E-02  5.51522E-03  1.16292E-03  5.82361E-05  2.75307E-05
  6.100  3.64098E-02  6.47196E-03  1.56259E-03  1.43448E-04 -4.41394E-05  6.94963E-02  6.14368E-03  1.36079E-03  6.00940E-05 -8.81832E-06
  6.200  3.39260E-02  6.83436E-03  1.77056E-03  2.13291E-04 -3.38042E-05  6.62699E-02  6.79060E-03  1.59749E-03  7.61681E-05 -4.30831E-05
  6.300  3.14012E-02  7.11009E-03  1.96369E-03  2.85458E-04 -2.08062E-05  6.28726E-02  7.43192E-03  1.86494E-03  1.07228E-04 -7.35011E-05
  6.400  2.88672E-02  7.29384E-03  2.13626E-03  3.57767E-04 -5.53820E-06  5.93357E-02  8.04333E-03  2.15331E-03  1.53076E-04 -9.86074E-05
  6.500  2.63551E-02  7.38345E-03  2.28339E-03  4.28017E-04  1.15115E-05  5.56951E-02  8.60160E-03  2.45153E-03  2.12566E-04 -1.17307E-04
  6.600  2.38941E-02  7.37987E-03  2.40114E-03  4.94091E-04  2.97799E-05  5.19898E-02  9.08593E-03  2.74801E-03  2.83686E-04 -1.28920E-04
  6.700  2.15104E-02  7.28693E-03  2.48671E-03  5.54039E-04  4.86557E-05  4.82600E-02  9.47888E-03  3.03128E-03  3.63706E-04 -1.33198E-04
  6.800  1.92272E-02  7.11104E-03  2.53850E-03  6.06170E-04  6.75074E-05  4.45463E-02  9.76727E-03  3.29065E-03  4.49367E-04 -1.30310E-04
  6.900  1.70638E-02  6.86075E-03  2.55609E-03  6.49115E-04  8.57132E-05  4.08877E-02  9.94254E-03  3.51671E-03  5.37099E-04 -1.20806E-04
  7.000  1.50354E-02  6.54628E-03  2.54027E-03  6.81874E-04  1.02690E-04  3.73204E-02  1.00010E-02  3.70176E-03  6.23254E-04 -1.05553E-04
  7.100  1.31531E-02  6.17900E-03  2.49286E-03  7.03851E-04  1.17917E-04  3.38769E-02  9.94362E-03  3.84015E-03  7.04325E-04 -8.56614E-05
  7.200  1.14238E-02  5.77088E-03  2.41665E-03  7.14856E-04  1.30963E-04  3.05852E-02  9.77571E-03  3.92841E-03  7.77148E-04 -6.23973E-05
  7.300  9.85067E-03  5.33400E-03  2.31514E-03  7.15093E-04  1.41497E-04  2.74681E-02  9.50629E-03  3.96527E-03  8.39064E-04 -3.70952E-05
  7.400  8.43340E-03  4.88008E-03  2.19239E-03  7.05127E-04  1.49300E-04  2.45431E-02  9.14731E-03  3.95154E-03  8.88039E-04 -1.10735E-05
  7.500  7.16861E-03  4.42009E-03  2.05280E-03  6.85833E-04  1.54271E-04  2.18224E-02  8.71287E-03  3.88992E-03  9.22730E-04  1.44405E-05
  7.600  6.05032E-03  3.96392E-03  1.90090E-03  6.58340E-04  1.56422E-04  1.93129E-02  8.21835E-03  3.78467E-03  9.42507E-04  3.83715E-05
  7.700  5.07058E-03  3.52016E-03  1.74115E-03  6.23957E-04  1.55868E-04  1.70169E-02  7.67957E-03  3.64127E-03  9.47424E-04  5.98400E-05
  7.800  4.21987E-03  3.09593E-03  1.57780E-03  5.84105E-04  1.52817E-04  1.49323E-02  7.11208E-03  3.46603E-03  9.38152E-04  7.81895E-05
  7.900  3.48769E-03  2.69686E-03  1.41469E-03  5.40247E-04  1.47551E-04  1.30536E-02  6.53052E-03  3.26574E-03  9.15884E-04  9.29953E-05
  8.000  2.86294E-03  2.32705E-03  1.25524E-03  4.93821E-04  1.40405E-04  1.13721E-02  5.94814E-03  3.04725E-03  8.82219E-04  1.04058E-04
  8.100  2.33436E-03  1.98919E-03  1.10228E-03  4.46186E-04  1.31750E-04  9.87687E-03  5.37645E-03  2.81724E-03  8.39033E-04  1.11383E-04
  8.200  1.89086E-03  1.68465E-03  9.58080E-04  3.98576E-04  1.21968E-04  8.55542E-03  4.82499E-03  2.58189E-03  7.88355E-04  1.15153E-04
  8.300  1.52177E-03  1.41367E-03  8.24320E-04  3.52064E-04  1.11441E-04  7.39412E-03  4.30131E-03  2.34673E-03  7.32250E-04  1.15687E-04
  8.400  1.21704E-03  1.17554E-03  7.02123E-04  3.07543E-04  1.00525E-04  6.37881E-03  3.81098E-03  2.11649E-03  6.72717E-04  1.13407E-04
  8.500  9.67413E-04  9.68792E-04  5.92096E-04  2.65714E-04  8.95478E-05  5.49530E-03  3.35769E-03  1.89505E-03  6.11604E-04  1.08796E-04
  8.600  7.64476E-04  7.91368E-04  4.94393E-04  2.27086E-04  7.87907E-05  4.72966E-03  2.94350E-03  1.68540E-03  5.50549E-04  1.02360E-04
  8.700  6.00722E-04  6.40833E-04  4.08785E-04  1.91988E-04  6.84875E-05  4.06854E-03  2.56900E-03  1.48970E-03  4.90940E-04  9.46014E-05
  8.800  4.69537E-04  5.14521E-04  3.34740E-04  1.60586E-04  5.88203E-05  3.49940E-03  2.23363E-03  1.30932E-03  4.33894E-04  8.59914E-05
  8.900  3.65179E-04  4.09673E-04  2.71496E-04  1.32901E-04  4.99202E-05  3.01063E-03  1.93590E-03  1.14496E-03  3.80257E-04  7.69510E-05
  9.000  2.82724E-04  3.23555E-04  2.18136E-04  1.08839E-04  4.18703E-05  2.59162E-03  1.67365E-03  9.96735E-04  3.30619E-04  6.78404E-05
  9.100  2.17998E-04  2.53546E-04  1.73650E-04  8.82093E-05  3.47102E-05  2.23284E-03  1.44424E-03  8.64303E-04  2.85336E-04  5.89524E-05
  9.200  1.67505E-04  1.97198E-04  1.36991E-04  7.07589E-05  2.84429E-05  1.92579E-03  1.24477E-03  7.46962E-04  2.44560E-04  5.05123E-05
  9.300  1.28348E-04  1.52285E-04  1.07125E-04  5.61888E-05  2.30408E-05  1.66298E-03  1.07225E-03  6.43763E-04  2.08281E-04  4.26810E-05
  9.400  9.81488E-05  1.16821E-04  8.30607E-05  4.41775E-05  1.84535E-05  1.43786E-03  9.23659E-04  5.53590E-04  1.76352E-04  3.55616E-05
  9.500  7.49766E-05  8.90706E-05  6.38796E-05  3.43980E-05  1.46143E-05  1.24480E-03  7.96127E-04  4.75246E-04  1.48534E-04  2.92075E-05
  9.600  5.72775E-05  6.75435E-05  4.87493E-05  2.65318E-05  1.14465E-05  1.07892E-03  6.86938E-04  4.07508E-04  1.24521E-04  2.36319E-05
  9.700  4.38122E-05  5.09808E-05  3.69338E-05  2.02788E-05  8.86849E-06  9.36086E-04  5.93599E-04  3.49176E-04  1.03967E-04  1.88162E-05
  9.800  3.36007E-05  3.83358E-05  2.77951E-05  1.53648E-05  6.79877E-06  8.12791E-04  5.13858E-04  2.99111E-04  8.65109E-05  1.47195E-05
  9.900  2.58749E-05  2.87509E-05  2.07909E-05  1.15456E-05  5.15892E-06  7.06077E-04  4.45711E-04  2.56248E-04  7.17909E-05  1.12854E-05
 10.000  2.00372E-05  2.15329E-05  1.54684E-05  8.60838E-06  3.87624E-06  6.13466E-04  3.87402E-04  2.19621E-04  5.94591E-05  8.44897E-06
 10.100  1.56261E-05  1.61290E-05  1.14557E-05  6.37201E-06  2.88530E-06  5.32885E-04  3.37406E-04  1.88360E-04  4.91890E-05  6.14138E-06
 10.200  1.22883E-05  1.21035E-05  8.45235E-06  4.68508E-06  2.12878E-06  4.62605E-04  2.94416E-04  1.61693E-04  4.06817E-05  4.29403E-06
 10.300  9.75465E-06  9.11719E-06  6.21898E-06  3.42350E-06  1.55765E-06  4.01189E-04  2.57322E-04  1.38947E-04  3.36682E-05  2.84113E-06
 10.400  7.82195E-06  6.90876E-06  4.56776E-06  2.48732E-06  1.13092E-06  3.47435E-04  2.25190E-04  1.19533E-04  2.79100E-05  1.72154E-06
 10.500  6.33742E-06  5.27878E-06  3.35311E-06  1.79739E-06  8.15073E-07  3.00340E-04  1.97239E-04  1.02948E-04  2.31987E-05  8.79670E-07
 10.600  5.18705E-06  4.07647E-06  2.46354E-06  1.29200E-06  5.83197E-07  2.59062E-04  1.72822E-04  8.87580E-05  1.93540E-05  2.66016E-07
 10.700  4.28612E-06  3.18873E-06  1.81458E-06  9.23755E-07  4.14145E-07  2.22890E-04  1.51406E-04  7.65954E-05  1.62217E-05 -1.62886E-07
 10.800  3.57205E-06  2.53133E-06  1.34281E-06  6.56722E-07  2.91583E-07  1.91219E-04  1.32553E-04  6.61485E-05  1.36708E-05 -4.44673E-07
 10.900  2.99872E-06  2.04194E-06  1.00099E-06  4.63992E-07  2.03115E-07  1.63526E-04  1.15904E-04  5.71542E-05  1.15915E-05 -6.11561E-07
 11.000  2.53230E-06  1.67464E-06  7.54099E-07  3.25604E-07  1.39487E-07  1.39360E-04  1.01167E-04  4.93917E-05  9.89195E-06 -6.90814E-07
 11.100  2.14797E-06  1.39584E-06  5.76319E-07  2.26863E-07  9.38820E-08  1.18325E-04  8.81027E-05  4.26760E-05  8.49659E-06 -7.05242E-07
 11.200  1.82754E-06  1.18103E-06  4.48639E-07  1.56999E-07  6.13392E-08  1.00071E-04  7.65134E-05  3.68525E-05  7.34349E-06 -6.73687E-07
 11.300  1.55762E-06  1.01244E-06  3.57083E-07  1.08136E-07  3.82776E-08  8.42822E-05  6.62352E-05  3.17923E-05  6.38254E-06 -6.11482E-07
 11.400  1.32832E-06  8.77256E-07  2.91387E-07  7.45039E-08  2.21213E-08  7.06790E-05  5.71300E-05  2.73881E-05  5.57363E-06 -5.30883E-07
 11.500  1.13223E-06  7.66306E-07  2.44019E-07  5.18632E-08  1.10146E-08  5.90071E-05  4.90797E-05  2.35500E-05  4.88502E-06 -4.41461E-07
 11.600  9.63777E-07  6.73082E-07  2.09471E-07  3.70812E-08  3.61081E-09  4.90363E-05  4.19816E-05  2.02033E-05  4.29197E-06 -3.50469E-07
 11.700  8.18642E-07  5.93019E-07  1.83737E-07  2.78339E-08 -1.07971E-09  4.05585E-05  3.57445E-05  1.72849E-05  3.77541E-06 -2.63184E-07
 11.800  6.93444E-07  5.22954E-07  1.63933E-07  2.23929E-08 -3.79554E-09  3.33852E-05  3.02858E-05  1.47417E-05  3.32088E-06 -1.83220E-07
 11.900  5.85461E-07  4.60731E-07  1.48016E-07  1.94755E-08 -5.09661E-09  2.73463E-05  2.55302E-05  1.25285E-05  2.91754E-06 -1.12819E-07
 12.000  4.92448E-07  4.04903E-07  1.34578E-07  1.81381E-08 -5.41249E-09  2.22886E-05  2.14078E-05  1.06062E-05  2.55738E-06 -5.31221E-08
 12.100  4.12515E-07  3.54514E-07  1.22678E-07  1.76985E-08 -5.07444E-09  1.80752E-05  1.78535E-05  8.94111E-06  2.23450E-06 -4.41146E-09
 12.200  3.44035E-07  3.08931E-07  1.11724E-07  1.76770E-08 -4.33682E-09  1.45841E-05  1.48064E-05  7.50346E-06  1.94455E-06  3.36714E-08
 12.300  2.85588E-07  2.67733E-07  1.01375E-07  1.77518E-08 -3.39199E-09  1.17071E-05  1.22097E-05  6.26693E-06  1.68428E-06  6.19355E-08
 12.400  2.35917E-07  2.30620E-07  9.14612E-08  1.77221E-08 -2.38139E-09  9.34945E-06  1.00103E-05  5.20796E-06  1.45117E-06  8.14778E-08
 12.500  1.93902E-07  1.97356E-07  8.19312E-08  1.74786E-08 -1.40441E-09  7.42802E-06  8.15912E-06  4.30537E-06  1.24316E-06  9.35498E-08
 12.600  1.58544E-07  1.67735E-07  7.28019E-08  1.69783E-08 -5.26099E-10  5.87088E-06  6.61109E-06  3.54001E-06  1.05849E-06  9.94505E-08
 12.700  1.28945E-07  1.41551E-07  6.41271E-08  1.62245E-08  2.16056E-10  4.61604E-06  5.32495E-06  2.89456E-06  8.95496E-07  1.00446E-07
 12.800  1.04304E-07  1.18591E-07  5.59729E-08  1.52500E-08  8.05857E-10  3.61051E-06  4.26343E-06  2.35337E-06  7.52599E-07  9.77135E-08
 12.900  8.39089E-08  9.86271E-08  4.84020E-08  1.41041E-08  1.24287E-09  2.80928E-06  3.39309E-06  1.90230E-06  6.28221E-07  9.23002E-08
 13.000  6.71258E-08  8.14182E-08  4.14631E-08  1.28428E-08  1.53758E-09  2.17444E-06  2.68422E-06  1.52865E-06  5.20785E-07  8.51073E-08
 13.100  5.33976E-08  6.67143E-08  3.51868E-08  1.15218E-08  1.70728E-09  1.67427E-06  2.11070E-06  1.22110E-06  4.28711E-07  7.68808E-08
 13.200  4.22360E-08  5.42615E-08  2.95833E-08  1.01913E-08  1.77282E-09  1.28241E-06  1.64977E-06  9.69573E-07  3.50436E-07  6.82163E-08
 13.300  3.32167E-08  4.38079E-08  2.46439E-08  8.89383E-09  1.75603E-09  9.77136E-07  1.28177E-06  7.65206E-07  2.84432E-07  5.95692E-08
 13.400  2.59735E-08  3.51091E-08  2.03437E-08  7.66262E-09  1.67794E-09  7.40645E-07  9.89908E-07  6.00249E-07  2.29230E-07  5.12705E-08
 13.500  2.01926E-08  2.79329E-08  1.66446E-08  6.52158E-09  1.55755E-09  5.58462E-07  7.59949E-07  4.67984E-07  1.83439E-07  4.35451E-08
 13.600  1.56076E-08  2.20633E-08  1.34993E-08  5.48594E-09  1.41115E-09  4.18898E-07  5.79948E-07  3.62637E-07  1.45764E-07  3.65300E-08
 13.700  1.19938E-08  1.73026E-08  1.08546E-08  4.56339E-09  1.25205E-09  3.12577E-07  4.39964E-07  2.79289E-07  1.15016E-07  3.02926E-08
 13.800  9.16322E-09  1.34732E-08  8.65472E-09  3.75540E-09  1.09058E-09  2.32029E-07  3.31804E-07  2.13785E-07  9.01230E-08  2.48475E-08
 13.900  6.96006E-09  1.04180E-08  6.84386E-09  3.05869E-09  9.34332E-10  1.71343E-07  2.48768E-07  1.62647E-07  7.01297E-08  2.01709E-08
 14.000  5.25594E-09  7.99983E-09  5.36817E-09  2.46653E-09  7.88494E-10  1.25874E-07  1.85424E-07  1.22989E-07  5.41975E-08  1.62133E-08
 14.100  3.94605E-09  6.10093E-09  4.17731E-09  1.96996E-09  6.56244E-10  9.19918E-08  1.37408E-07  9.24371E-08  4.15997E-08  1.29091E-08
 14.200  2.94545E-09  4.62128E-09  3.22534E-09  1.55877E-09  5.39171E-10  6.68828E-08  1.01239E-07  6.90551E-08  3.17146E-08  1.01848E-08
 14.300  2.18587E-09  3.47707E-09  2.47131E-09  1.22232E-09  4.37657E-10  4.83765E-08  7.41616E-08  5.12773E-08  2.40167E-08  7.96478E-09
 14.400  1.61281E-09  2.59885E-09  1.87935E-09  9.50114E-10  3.51226E-10  3.48107E-08  5.40166E-08  3.78482E-08  1.80666E-08  6.17568E-09
 14.500  1.18314E-09  1.92973E-09  1.41866E-09  7.32254E-10  2.78829E-10  2.49203E-08  3.91204E-08  2.77695E-08  1.35012E-08  4.74888E-09
 14.600  8.62959E-10  1.42362E-09  1.06313E-09  5.59678E-10  2.19083E-10  1.77485E-08  2.81722E-08  2.02539E-08  1.00238E-08  3.62234E-09
 14.700  6.25825E-10  1.04351E-09  7.91025E-10  4.24319E-10  1.70447E-10  1.25760E-08  2.01741E-08  1.46852E-08  7.39394E-09  2.74137E-09
 14.800  4.51267E-10  7.60050E-10  5.84434E-10  3.19159E-10  1.31356E-10  8.86535E-09  1.43661E-08  1.05851E-08  5.41915E-09  2.05875E-09
 14.900  3.23549E-10  5.50115E-10  4.28814E-10  2.38209E-10  1.00309E-10  6.21772E-09  1.01734E-08  7.58522E-09  3.94660E-09  1.53452E-09
 15.000  2.30665E-10  3.95694E-10  3.12490E-10  1.76448E-10  7.59266E-11  4.33862E-09  7.16456E-09  5.40399E-09  2.85611E-09  1.13537E-09
 15.100  1.63519E-10  2.82870E-10  2.26193E-10  1.29732E-10  5.69806E-11  3.01204E-09  5.01792E-09  3.82780E-09  2.05405E-09  8.33994E-10
 15.200  1.15269E-10  2.00984E-10  1.62644E-10  9.46919E-11  4.24083E-11  2.08048E-09  3.49527E-09  2.69578E-09  1.46810E-09  6.08281E-10
 15.300  8.08013E-11  1.41941E-10  1.16185E-10  6.86229E-11  3.13084E-11  1.42977E-09  2.42144E-09  1.88772E-09  1.04287E-09  4.40569E-10
 15.400  5.63251E-11  9.96436E-11  8.24616E-11  4.93823E-11  2.29323E-11  9.77624E-10  1.66846E-09  1.31439E-09  7.36309E-10  3.16914E-10
 15.500  3.90456E-11  6.95361E-11  5.81540E-11  3.52914E-11  1.66683E-11  6.65099E-10  1.14346E-09  9.10027E-10  5.16730E-10  2.26430E-10
 15.600  2.69177E-11  4.82405E-11  4.07536E-11  2.50502E-11  1.20245E-11  4.50209E-10  7.79465E-10  6.26536E-10  3.60466E-10  1.60705E-10
 15.700  1.84550E-11  3.32718E-11  2.83820E-11  1.76620E-11  8.61078E-12  3.03221E-10  5.28517E-10  4.28955E-10  2.49967E-10  1.13311E-10
 15.800  1.25836E-11  2.28152E-11  1.96445E-11  1.23708E-11  6.12186E-12  2.03203E-10  3.56466E-10  2.92056E-10  1.72321E-10  7.93783E-11
 15.900  8.53352E-12  1.55552E-11  1.35141E-11  8.60851E-12  4.32162E-12  1.35496E-10  2.39158E-10  1.97753E-10  1.18100E-10  5.52521E-11
 16.000  5.75560E-12  1.05450E-11  9.24078E-12  5.95202E-12  3.02962E-12  8.98996E-11  1.59614E-10  1.33167E-10  8.04712E-11  3.82164E-11
 16.100  3.86104E-12  7.10826E-12  6.28108E-12  4.08925E-12  2.10940E-12  5.93509E-11  1.05972E-10  8.91861E-11  5.45161E-11  2.62685E-11
 16.200  2.57620E-12  4.76472E-12  4.24412E-12  2.79190E-12  1.45884E-12  3.89889E-11  6.99920E-11  5.94075E-11  3.67216E-11  1.79447E-11
 16.300  1.70972E-12  3.17606E-12  2.85098E-12  1.89437E-12  1.00225E-12  2.54860E-11  4.59895E-11  3.93587E-11  2.45952E-11  1.21837E-11
 16.400  1.12864E-12  2.10539E-12  1.90403E-12  1.27752E-12  6.84077E-13  1.65775E-11  3.00628E-11  2.59363E-11  1.63804E-11  8.22235E-12
 16.500  7.41100E-13  1.38799E-12  1.26431E-12  8.56326E-13  4.63915E-13  1.07298E-11  1.95512E-11  1.70003E-11  1.08484E-11  5.51579E-12
 16.600  4.84063E-13  9.10051E-13  8.34738E-13  5.70566E-13  3.12615E-13  6.91084E-12  1.26502E-11  1.10840E-11  7.14471E-12  3.67825E-12
 16.700  3.14515E-13  5.93451E-13  5.48007E-13  3.77915E-13  2.09341E-13  4.42933E-12  8.14351E-12  7.18853E-12  4.67951E-12  2.43849E-12
 16.800  2.03284E-13  3.84910E-13  3.57751E-13  2.48845E-13  1.39318E-13  2.82501E-12  5.21587E-12  4.63767E-12  3.04808E-12  1.60719E-12
 16.900  1.30707E-13  2.48315E-13  2.32248E-13  1.62905E-13  9.21505E-14  1.79301E-12  3.32391E-12  2.97637E-12  1.97460E-12  1.05318E-12
 17.000  8.36059E-14  1.59342E-13  1.49941E-13  1.06031E-13  6.05836E-14  1.13247E-12  2.10761E-12  1.90026E-12  1.27225E-12  6.86196E-13
 17.100  5.32019E-14  1.01707E-13  9.62718E-14  6.86192E-14  3.95921E-14  7.11810E-13  1.32971E-12  1.20694E-12  8.15306E-13  4.44552E-13
 17.200  3.36806E-14  6.45780E-14  6.14763E-14  4.41565E-14  2.57207E-14  4.45241E-13  8.34753E-13  7.62641E-13  5.19680E-13  2.86383E-13
 17.300  2.12131E-14  4.07885E-14  3.90447E-14  2.82553E-14  1.66114E-14  2.77157E-13  5.21437E-13  4.79428E-13  3.29482E-13  1.83458E-13
 17.400  1.32926E-14  2.56285E-14  2.46647E-14  1.79796E-14  1.06659E-14  1.71697E-13  3.24112E-13  2.99852E-13  2.07789E-13  1.16872E-13
 17.500  8.28709E-15  1.60197E-14  1.54977E-14  1.13777E-14  6.80907E-15  1.05854E-13  2.00469E-13  1.86586E-13  1.30352E-13  7.40437E-14
 17.600  5.14036E-15  9.96191E-15  9.68606E-15  7.16040E-15  4.32208E-15  6.49483E-14  1.23386E-13  1.15519E-13  8.13456E-14  4.66533E-14
 17.700  3.17243E-15  6.16308E-15  6.02187E-15  4.48177E-15  2.72794E-15  3.96596E-14  7.55713E-14  7.11594E-14  5.04986E-14  2.92354E-14
 17.800  1.94807E-15  3.79342E-15  3.72420E-15  2.79001E-15  1.71212E-15  2.41020E-14  4.60604E-14  4.36145E-14  3.11865E-14  1.82215E-14
 17.900  1.19026E-15  2.32302E-15  2.29121E-15  1.72752E-15  1.06859E-15  1.45777E-14  2.79375E-14  2.65985E-14  1.91605E-14  1.12960E-14
 18.000  7.23619E-16  1.41538E-15  1.40229E-15  1.06393E-15  6.63259E-16  8.77523E-15  1.68632E-14  1.61405E-14  1.17115E-14  6.96529E-15
 18.100  4.37742E-16  8.58025E-16  8.53822E-16  6.51773E-16  4.09418E-16  5.25736E-15  1.01296E-14  9.74590E-15  7.12179E-15  4.27215E-15
 18.200  2.63496E-16  5.17542E-16  5.17205E-16  3.97175E-16  2.51352E-16  3.13488E-15  6.05558E-15  5.85570E-15  4.30876E-15  2.60649E-15
 18.300  1.57828E-16  3.10612E-16  3.11699E-16  2.40760E-16  1.53476E-16  1.86047E-15  3.60273E-15  3.50103E-15  2.59364E-15  1.58192E-15
 18.400  9.40712E-17  1.85492E-16  1.86895E-16  1.45184E-16  9.32102E-17  1.09895E-15  2.13318E-15  2.08296E-15  1.55336E-15  9.55082E-16
 18.500  5.57955E-17  1.10225E-16  1.11496E-16  8.70951E-17  5.63070E-17  6.46090E-16  1.25704E-15  1.23323E-15  9.25654E-16  5.73638E-16
 18.600  3.29321E-17  6.51754E-17  6.61803E-17  5.19787E-17  3.38339E-17  3.78068E-16  7.37232E-16  7.26589E-16  5.48843E-16  3.42759E-16
 18.700  1.93430E-17  3.83487E-17  3.90857E-17  3.08620E-17  2.02231E-17  2.20198E-16  4.30325E-16  4.26015E-16  3.23803E-16  2.03752E-16
 18.800  1.13063E-17  2.24536E-17  2.29687E-17  1.82306E-17  1.20243E-17  1.27653E-16  2.49997E-16  2.48576E-16  1.90087E-16  1.20501E-16
 18.900  6.57677E-18  1.30828E-17  1.34305E-17  1.07144E-17  7.11225E-18  7.36583E-17  1.44551E-16  1.44344E-16  1.11039E-16  7.09032E-17
 19.000  3.80725E-18  7.58573E-18  7.81444E-18  6.26517E-18  4.18501E-18  4.23052E-17  8.31884E-17  8.34158E-17  6.45442E-17  4.15084E-17
 19.100  2.19341E-18  4.37711E-18  4.52438E-18  3.64510E-18  2.44987E-18  2.41853E-17  4.76503E-17  4.79754E-17  3.73340E-17  2.41775E-17
 19.200  1.25761E-18  2.51349E-18  2.60666E-18  2.11012E-18  1.42678E-18  1.37625E-17  2.71665E-17  2.74608E-17  2.14895E-17  1.40121E-17
 19.300  7.17626E-19  1.43639E-18  1.49445E-18  1.21544E-18  8.26706E-19  7.79539E-18  1.54161E-17  1.56437E-17  1.23092E-17  8.08014E-18
 19.400  4.07548E-19  8.16923E-19  8.52633E-19  6.96628E-19  4.76580E-19  4.39516E-18  8.70740E-18  8.86959E-18  7.01653E-18  4.63627E-18
 19.500  2.30354E-19  4.62392E-19  4.84096E-19  3.97298E-19  2.73351E-19  2.46669E-18  4.89537E-18  5.00509E-18  3.98027E-18  2.64704E-18
 19.600  1.29585E-19  2.60475E-19  2.73525E-19  2.25471E-19  1.55997E-19  1.37803E-18  2.73948E-18  2.81106E-18  2.24702E-18  1.50385E-18
 19.700  7.25537E-20  1.46034E-19  1.53803E-19  1.27330E-19  8.85799E-20  7.66324E-19  1.52595E-18  1.57139E-18  1.26244E-18  8.50178E-19
 19.800  4.04314E-20  8.14858E-20  8.60690E-20  7.15555E-20  5.00477E-20  4.24209E-19  8.46076E-19  8.74296E-19  7.05886E-19  4.78280E-19
 19.900  2.24252E-20  4.52538E-20  4.79343E-20  4.00166E-20  2.81367E-20  2.33757E-19  4.66958E-19  4.84173E-19  3.92810E-19  2.67751E-19
  67 203 200   0.100
  0.000  4.70865E-02 -2.32738E-16 -3.74700E-16 -4.75352E-16  0.00000E+00  9.43412E-02 -4.80991E-16 -7.49401E-16 -9.00667E-16 -8.58294E-16
  0.100  4.71089E-02 -2.20095E-05 -1.18228E-08 -9.93586E-13 -1.85964E-16  9.44465E-02 -1.84618E-05  1.84585E-08 -1.09306E-12 -6.66608E-15
  0.200  4.71764E-02 -8.72444E-05 -1.87206E-07 -6.16945E-11  1.62153E-13  9.47567E-02 -7.17923E-05  2.93032E-07 -6.57386E-11 -1.11857E-12
  0.300  4.72896E-02 -1.93338E-04 -9.31371E-07 -6.68048E-10  4.13600E-12  9.52546E-02 -1.54016E-04  1.46409E-06 -6.74996E-10 -2.78319E-11
  0.400  4.74495E-02 -3.36395E-04 -2.87235E-06 -3.48812E-09  4.10205E-11  9.59128E-02 -2.55792E-04  4.54180E-06 -3.23621E-09 -2.72391E-10
  0.500  4.76572E-02 -5.11066E-04 -6.79362E-06 -1.20511E-08  2.42104E-10  9.66955E-02 -3.65276E-04  1.08219E-05 -9.76975E-09 -1.58108E-09
  0.600  4.79133E-02 -7.10666E-04 -1.35470E-05 -3.16111E-08  1.02823E-09  9.75607E-02 -4.69219E-04  2.17705E-05 -2.04413E-08 -6.58248E-09
  0.700  4.82180E-02 -9.27322E-04 -2.39521E-05 -6.73899E-08  3.47650E-09  9.84628E-02 -5.54195E-04  3.88834E-05 -2.77778E-08 -2.17515E-08
  0.800  4.85702E-02 -1.15219E-03 -3.86910E-05 -1.20518E-07  9.93823E-09  9.93556E-02 -6.07850E-04  6.35244E-05 -7.08449E-09 -6.06079E-08
  0.900  4.89676E-02 -1.37568E-03 -5.82050E-05 -1.81300E-07  2.49701E-08  1.00195E-01 -6.20061E-04  9.67547E-05  9.63326E-08 -1.48074E-07
  1.000  4.94064E-02 -1.58779E-03 -8.26043E-05 -2.19903E-07  5.66150E-08  1.00941E-01 -5.83899E-04  1.39163E-04  3.81257E-07 -3.25799E-07
  1.100  4.98810E-02 -1.77842E-03 -1.11597E-04 -1.75100E-07  1.18027E-07  1.01561E-01 -4.96329E-04  1.90711E-04  1.00288E-06 -6.58015E-07
  1.200  5.03840E-02 -1.93777E-03 -1.44445E-04  5.77105E-08  2.29375E-07  1.02030E-01 -3.58567E-04  2.50617E-04  2.17947E-06 -1.23733E-06
  1.300  5.09064E-02 -2.05674E-03 -1.79951E-04  6.37531E-07  4.19892E-07  1.02335E-01 -1.76088E-04  3.17275E-04  4.18930E-06 -2.18967E-06
  1.400  5.14379E-02 -2.12732E-03 -2.16485E-04  1.78586E-06  7.29861E-07  1.02470E-01  4.17189E-05  3.88248E-04  7.35455E-06 -3.67768E-06
  1.500  5.19669E-02 -2.14301E-03 -2.52040E-04  3.78982E-06  1.21225E-06  1.02441E-01  2.82218E-04  4.60328E-04  1.20102E-05 -5.90178E-06
  1.600  5.24815E-02 -2.09914E-03 -2.84330E-04  6.99850E-06  1.93367E-06  1.02263E-01  5.30458E-04  5.29668E-04  1.84582E-05 -9.09833E-06
  1.700  5.29696E-02 -1.99320E-03 -3.10905E-04  1.18113E-05  2.97428E-06  1.01958E-01  7.70282E-04  5.91993E-04  2.69101E-05 -1.35346E-05
  1.800  5.34198E-02 -1.82508E-03 -3.29304E-04  1.86578E-05  4.42637E-06  1.01555E-01  9.85547E-04  6.42879E-04  3.74240E-05 -1.95002E-05
  1.900  5.38215E-02 -1.59711E-03 -3.37204E-04  2.79696E-05  6.39119E-06  1.01085E-01  1.16134E-03  6.78070E-04  4.98431E-05 -2.72956E-05
  2.000  5.41659E-02 -1.31416E-03 -3.32582E-04  4.01453E-05  8.97412E-06  1.00584E-01  1.28509E-03  6.93832E-04  6.37459E-05 -3.72164E-05
  2.100  5.44464E-02 -9.83488E-04 -3.13866E-04  5.55124E-05  1.22779E-05  1.00085E-01  1.34758E-03  6.87295E-04  7.84190E-05 -4.95368E-05
  2.200  5.46586E-02 -6.14540E-04 -2.80059E-04  7.42870E-05  1.63947E-05  9.96210E-02  1.34362E-03  6.56772E-04  9.28582E-05 -6.44883E-05
  2.300  5.48011E-02 -2.18603E-04 -2.30850E-04  9.65376E-05  2.13963E-05  9.92178E-02  1.27254E-03  6.02008E-04  1.05808E-04 -8.22393E-05
  2.400  5.48749E-02  1.91621E-04 -1.66669E-04  1.22155E-04  2.73249E-05  9.88972E-02  1.13831E-03  5.24346E-04  1.15839E-04 -1.02872E-04
  2.500  5.48840E-02  6.02523E-04 -8.87147E-05  1.50830E-04  3.41834E-05  9.86735E-02  9.49305E-04  4.26783E-04  1.21460E-04 -1.26358E-04
  2.600  5.48351E-02  1.00016E-03  1.06737E-06  1.82050E-04  4.19269E-05  9.85536E-02  7.17898E-04  3.13900E-04  1.21266E-04 -1.52539E-04
  2.700  5.47370E-02  1.37084E-03  1.00050E-04  2.15100E-04  5.04576E-05  9.85365E-02  4.59612E-04  1.91673E-04  1.14094E-04 -1.81105E-04
  2.800  5.46004E-02  1.70175E-03  2.05029E-04  2.49087E-04  5.96205E-05  9.86137E-02  1.92151E-04  6.71647E-05  9.91895E-05 -2.11580E-04
  2.900  5.44374E-02  1.98147E-03  3.12359E-04  2.82971E-04  6.92048E-05  9.87705E-02 -6.57580E-05 -5.18905E-05  7.63504E-05 -2.43307E-04
  3.000  5.42611E-02  2.20055E-03  4.18119E-04  3.15612E-04  7.89476E-05  9.89865E-02 -2.95608E-04 -1.57567E-04  4.60389E-05 -2.75451E-04
  3.100  5.40845E-02  2.35193E-03  5.18291E-04  3.45821E-04  8.85424E-05  9.92375E-02 -4.80355E-04 -2.42274E-04  9.44084E-06 -3.07000E-04
  3.200  5.39205E-02  2.43124E-03  6.08947E-04  3.72416E-04  9.76502E-05  9.94974E-02 -6.05574E-04 -2.99287E-04 -3.15393E-05 -3.36785E-04
  3.300  5.37809E-02  2.43708E-03  6.86428E-04  3.94279E-04  1.05914E-04  9.97392E-02 -6.60447E-04 -3.23237E-04 -7.43550E-05 -3.63515E-04
  3.400  5.36757E-02  2.37113E-03  7.47520E-04  4.10407E-04  1.12976E-04  9.99378E-02 -6.38515E-04 -3.10533E-04 -1.15965E-04 -3.85817E-04
  3.500  5.36131E-02  2.23809E-03  7.89603E-04  4.19956E-04  1.18493E-04  1.00071E-01 -5.38134E-04 -2.59669E-04 -1.53045E-04 -4.02301E-04
  3.600  5.35983E-02  2.04559E-03  8.10777E-04  4.22275E-04  1.22150E-04  1.00119E-01 -3.62578E-04 -1.71404E-04 -1.82246E-04 -4.11633E-04
  3.700  5.36337E-02  1.80391E-03  8.09961E-04  4.16930E-04  1.23682E-04  1.00070E-01 -1.19800E-04 -4.87883E-05 -2.00485E-04 -4.12615E-04
  3.800  5.37182E-02  1.52565E-03  7.86956E-04  4.03718E-04  1.22875E-04  9.99164E-02  1.78169E-04  1.02965E-04 -2.05225E-04 -4.04277E-04
  3.900  5.38474E-02  1.22524E-03  7.42482E-04  3.82665E-04  1.19584E-04  9.96552E-02  5.16134E-04  2.76768E-04 -1.94744E-04 -3.85964E-04
  4.000  5.40131E-02  9.18485E-04  6.78182E-04  3.54026E-04  1.13729E-04  9.92896E-02  8.76906E-04  4.64074E-04 -1.68337E-04 -3.57421E-04
  4.100  5.42036E-02  6.21915E-04  5.96586E-04  3.18273E-04  1.05300E-04  9.88266E-02  1.24265E-03  6.55410E-04 -1.26447E-04 -3.18860E-04
  4.200  5.44038E-02  3.52216E-04  5.01061E-04  2.76077E-04  9.43528E-05  9.82761E-02  1.59630E-03  8.40991E-04 -7.07054E-05 -2.71004E-04
  4.300  5.45959E-02  1.25583E-04  3.95720E-04  2.28303E-04  8.10044E-05  9.76493E-02  1.92296E-03  1.01137E-03 -3.86715E-06 -2.15107E-04
  4.400  5.47591E-02 -4.29041E-05  2.85309E-04  1.75987E-04  6.54269E-05  9.69575E-02  2.21114E-03  1.15808E-03  7.03563E-05 -1.52940E-04
  4.500  5.48712E-02 -1.39883E-04  1.75069E-04  1.20332E-04  4.78416E-05  9.62097E-02  2.45371E-03  1.27423E-03  1.47550E-04 -8.67297E-05
  4.600  5.49084E-02 -1.54254E-04  7.05714E-05  6.26949E-05  2.85133E-05  9.54121E-02  2.64861E-03  1.35504E-03  2.22923E-04 -1.90779E-05
  4.700  5.48466E-02 -7.76630E-05 -2.24633E-05  4.57336E-06  7.74764E-06  9.45661E-02  2.79906E-03  1.39819E-03  2.91675E-04  4.71691E-05
  4.800  5.46625E-02  9.51130E-05 -9.83730E-05 -5.24047E-05 -1.41109E-05  9.36684E-02  2.91339E-03  1.40405E-03  3.49383E-04  1.09071E-04
  4.900  5.43338E-02  3.65885E-04 -1.51769E-04 -1.06503E-04 -3.66778E-05  9.27099E-02  3.00443E-03  1.37578E-03  3.92366E-04  1.63762E-04
  5.000  5.38409E-02  7.32900E-04 -1.77764E-04 -1.55903E-04 -5.95266E-05  9.16764E-02  3.08853E-03  1.31914E-03  4.17991E-04  2.08635E-04
  5.100  5.31670E-02  1.19082E-03 -1.72191E-04 -1.98746E-04 -8.21866E-05  9.05492E-02  3.18429E-03  1.24222E-03  4.24915E-04  2.41505E-04
  5.200  5.22994E-02  1.73086E-03 -1.31826E-04 -2.33185E-04 -1.04142E-04  8.93063E-02  3.31101E-03  1.15496E-03  4.13214E-04  2.60767E-04
  5.300  5.12301E-02  2.34102E-03 -5.45727E-05 -2.57449E-04 -1.24832E-04  8.79235E-02  3.48713E-03  1.06855E-03  3.84410E-04  2.65517E-04
  5.400  4.99559E-02  3.00655E-03  6.03756E-05 -2.69921E-04 -1.43660E-04  8.63767E-02  3.72870E-03  9.94718E-04  3.41384E-04  2.55624E-04
  5.500  4.84788E-02  3.71041E-03  2.12424E-04 -2.69219E-04 -1.60003E-04  8.46431E-02  4.04797E-03  9.44991E-04  2.88178E-04  2.31764E-04
  5.600  4.68064E-02  4.43396E-03  3.99523E-04 -2.54289E-04 -1.73229E-04  8.27035E-02  4.45231E-03  9.29928E-04  2.29714E-04  1.95388E-04
  5.700  4.49512E-02  5.15761E-03  6.18173E-04 -2.24485E-04 -1.82724E-04  8.05434E-02  4.94342E-03  9.58425E-04  1.71444E-04  1.48648E-04
  5.800  4.29305E-02  5.86161E-03  8.63509E-04 -1.79645E-04 -1.87919E-04  7.81544E-02  5.51705E-03  1.03711E-03  1.18962E-04  9.42657E-05
  5.900  4.07658E-02  6.52678E-03  1.12945E-03 -1.20141E-04 -1.88328E-04  7.55355E-02  6.16309E-03  1.16988E-03  7.76081E-05  3.53691E-05
  6.000  3.84822E-02  7.13524E-03  1.40891E-03 -4.69194E-05 -1.83580E-04  7.26929E-02  6.86606E-03  1.35760E-03  5.20962E-05 -2.47006E-05
  6.100  3.61071E-02  7.67109E-03  1.69408E-03  3.85048E-05 -1.73451E-04  6.96405E-02  7.60602E-03  1.59801E-03  4.61937E-05 -8.25939E-05
  6.200  3.36699E-02  8.12094E-03  1.97675E-03  1.34075E-04 -1.57902E-04  6.63993E-02  8.35977E-03  1.88582E-03  6.24721E-05 -1.35155E-04
  6.300  3.12004E-02  8.47439E-03  2.24864E-03  2.37257E-04 -1.37090E-04  6.29966E-02  9.10216E-03  2.21299E-03  1.02148E-04 -1.79606E-04
  6.400  2.87283E-02  8.72434E-03  2.50177E-03  3.45136E-04 -1.11389E-04  5.94650E-02  9.80761E-03  2.56920E-03  1.65022E-04 -2.13702E-04
  6.500  2.62822E-02  8.86708E-03  2.72879E-03  4.54534E-04 -8.13785E-05  5.58406E-02  1.04515E-02  2.94239E-03  2.49513E-04 -2.35844E-04
  6.600  2.38885E-02  8.90234E-03  2.92332E-03  5.62154E-04 -4.78386E-05  5.21623E-02  1.10116E-02  3.31949E-03  3.52785E-04 -2.45148E-04
  6.700  2.15711E-02  8.83312E-03  3.08017E-03  6.64730E-04 -1.17153E-05  4.84693E-02  1.14689E-02  3.68711E-03  4.70955E-04 -2.41462E-04
  6.800  1.93509E-02  8.66539E-03  3.19555E-03  7.59174E-04  2.59171E-05  4.48006E-02  1.18089E-02  4.03224E-03  5.99349E-04 -2.25336E-04
  6.900  1.72452E-02  8.40768E-03  3.26720E-03  8.42726E-04  6.39061E-05  4.11930E-02  1.20218E-02  4.34293E-03  7.32811E-04 -1.97949E-04
  7.000  1.52675E-02  8.07063E-03  3.29444E-03  9.13070E-04  1.01077E-04  3.76802E-02  1.21028E-02  4.60883E-03  8.66008E-04 -1.60999E-04
  7.100  1.34277E-02  7.66641E-03  3.27809E-03  9.68436E-04  1.36289E-04  3.42922E-02  1.20523E-02  4.82169E-03  9.93745E-04 -1.16574E-04
  7.200  1.17320E-02  7.20817E-03  3.22039E-03  1.00766E-03  1.68495E-04  3.10542E-02  1.18750E-02  4.97559E-03  1.11124E-03 -6.69992E-05
  7.300  1.01834E-02  6.70948E-03  3.12483E-03  1.03022E-03  1.96788E-04  2.79866E-02  1.15800E-02  5.06714E-03  1.21434E-03 -1.46917E-05
  7.400  8.78149E-03  6.18380E-03  2.99590E-03  1.03623E-03  2.20444E-04  2.51046E-02  1.11796E-02  5.09546E-03  1.29975E-03  3.79843E-05
  7.500  7.52344E-03  5.64401E-03  2.83884E-03  1.02638E-03  2.38951E-04  2.24186E-02  1.06887E-02  5.06202E-03  1.36507E-03  8.88423E-05
  7.600  6.40402E-03  5.10202E-03  2.65937E-03  1.00190E-03  2.52025E-04  1.99344E-02  1.01238E-02  4.97043E-03  1.40892E-03  1.35976E-04
  7.700  5.41621E-03  4.56845E-03  2.46341E-03  9.64439E-04  2.59609E-04  1.76535E-02  9.50208E-03  4.82606E-03  1.43086E-03  1.77832E-04
  7.800  4.55163E-03  4.05241E-03  2.25684E-03  9.15973E-04  2.61864E-04  1.55736E-02  8.84094E-03  4.63565E-03  1.43140E-03  2.13256E-04
  7.900  3.80093E-03  3.56137E-03  2.04523E-03  8.58682E-04  2.59144E-04  1.36894E-02  8.15698E-03  4.40690E-03  1.41182E-03  2.41509E-04
  8.000  3.15422E-03  3.10115E-03  1.83372E-03  7.94841E-04  2.51964E-04  1.19929E-02  7.46555E-03  4.14797E-03  1.37404E-03  2.62254E-04
  8.100  2.60136E-03  2.67588E-03  1.62678E-03  7.26705E-04  2.40962E-04  1.04744E-02  6.78033E-03  3.86718E-03  1.32050E-03  2.75525E-04
  8.200  2.13231E-03  2.28818E-03  1.42819E-03  6.56415E-04  2.26853E-04  9.12261E-03  6.11307E-03  3.57257E-03  1.25394E-03  2.81674E-04
  8.300  1.73731E-03  1.93925E-03  1.24097E-03  5.85924E-04  2.10390E-04  7.92529E-03  5.47336E-03  3.27162E-03  1.17727E-03  2.81313E-04
  8.400  1.40710E-03  1.62908E-03  1.06735E-03  5.16932E-04  1.92325E-04  6.86983E-03  4.86871E-03  2.97107E-03  1.09341E-03  2.75243E-04
  8.500  1.13303E-03  1.35664E-03  9.08805E-04  4.50853E-04  1.73370E-04  5.94350E-03  4.30452E-03  2.67672E-03  1.00512E-03  2.64389E-04
  8.600  9.07167E-04  1.12009E-03  7.66150E-04  3.88795E-04  1.54173E-04  5.13376E-03  3.78430E-03  2.39335E-03  9.14983E-04  2.49731E-04
  8.700  7.22319E-04  9.17009E-04  6.39580E-04  3.31559E-04  1.35294E-04  4.42850E-03  3.30983E-03  2.12472E-03  8.25237E-04  2.32252E-04
  8.800  5.72071E-04  7.44561E-04  5.28787E-04  2.79658E-04  1.17196E-04  3.81625E-03  2.88145E-03  1.87356E-03  7.37786E-04  2.12888E-04
  8.900  4.50767E-04  5.99677E-04  4.33059E-04  2.33343E-04  1.00235E-04  3.28626E-03  2.49829E-03  1.64170E-03  6.54156E-04  1.92492E-04
  9.000  3.53473E-04  4.79213E-04  3.51384E-04  1.92638E-04  8.46655E-05  2.82863E-03  2.15850E-03  1.43012E-03  5.75503E-04  1.71809E-04
  9.100  2.75937E-04  3.80060E-04  2.82546E-04  1.57384E-04  7.06430E-05  2.43429E-03  1.85957E-03  1.23908E-03  5.02626E-04  1.51460E-04
  9.200  2.14532E-04  2.99248E-04  2.25209E-04  1.27276E-04  5.82385E-05  2.09505E-03  1.59847E-03  1.06827E-03  4.36008E-04  1.31940E-04
  9.300  1.66196E-04  2.34008E-04  1.77998E-04  1.01911E-04  4.74499E-05  1.80358E-03  1.37192E-03  9.16931E-04  3.75853E-04  1.13617E-04
  9.400  1.28367E-04  1.81821E-04  1.39555E-04  8.08208E-05  3.82172E-05  1.55336E-03  1.17648E-03  7.83941E-04  3.22139E-04  9.67446E-05
  9.500  9.89220E-05  1.40442E-04  1.08586E-04  6.35065E-05  3.04375E-05  1.33863E-03  1.00874E-03  6.67971E-04  2.74661E-04  8.14731E-05
  9.600  7.61197E-05  1.07907E-04  8.38943E-05  4.94659E-05  2.39792E-05  1.15437E-03  8.65406E-04  5.67549E-04  2.33085E-04  6.78657E-05
  9.700  5.85426E-05  8.25274E-05  6.44002E-05  3.82142E-05  1.86941E-05  9.96208E-04  7.43355E-04  4.81151E-04  1.96982E-04  5.59151E-05
  9.800  4.50473E-05  6.28743E-05  4.91529E-05  2.92996E-05  1.44284E-05  8.60351E-04  6.39703E-04  4.07254E-04  1.65871E-04  4.55603E-05
  9.900  3.47198E-05  4.77580E-05  3.73314E-05  2.23131E-05  1.10309E-05  7.43545E-04  5.51830E-04  3.44385E-04  1.39249E-04  3.67020E-05
 10.000  2.68353E-05  3.62011E-05  2.82399E-05  1.68938E-05  8.35906E-06  6.43003E-04  4.77389E-04  2.91156E-04  1.16612E-04  2.92157E-05
 10.100  2.08238E-05  2.74116E-05  2.12993E-05  1.27306E-05  6.28322E-06  5.56344E-04  4.14310E-04  2.46281E-04  9.74729E-05  2.29632E-05
 10.200  1.62405E-05  2.07558E-05  1.60351E-05  9.56074E-06  4.68886E-06  4.81546E-04  3.60789E-04  2.08588E-04  8.13768E-05  1.78019E-05
 10.300  1.27416E-05  1.57325E-05  1.20646E-05  7.16653E-06  3.47748E-06  4.16892E-04  3.15269E-04  1.77027E-04  6.79048E-05  1.35913E-05
 10.400  1.00626E-05  1.19500E-05  9.08333E-06  5.37095E-06  2.56633E-06  3.60930E-04  2.76424E-04  1.50664E-04  5.66795E-05  1.01982E-05
 10.500  8.00202E-06  9.10488E-06  6.85240E-06  4.03229E-06  1.88738E-06  3.12427E-04  2.43132E-04  1.28681E-04  4.73650E-05  7.49936E-06
 10.600  6.40737E-06  6.96453E-06  5.18639E-06  3.03887E-06  1.38578E-06  2.70343E-04  2.14456E-04  1.10365E-04  3.96659E-05  5.38362E-06
 10.700  5.16383E-06  5.35205E-06  3.94311E-06  2.30391E-06  1.01808E-06  2.33794E-04  1.89617E-04  9.51008E-05  3.33248E-05  3.75234E-06
 10.800  4.18555E-06  4.13388E-06  3.01453E-06  1.76085E-06  7.50414E-07  2.02029E-04  1.67973E-04  8.23626E-05  2.81187E-05  2.51932E-06
 10.900  3.40858E-06  3.20984E-06  2.31930E-06  1.35926E-06  5.56759E-07  1.74411E-04  1.49000E-04  7.17040E-05  2.38560E-05  1.61010E-06
 11.000  2.78548E-06  2.50518E-06  1.79664E-06  1.06127E-06  4.17366E-07  1.50394E-04  1.32271E-04  6.27490E-05  2.03726E-05  9.61029E-07
 11.100  2.28111E-06  1.96438E-06  1.40141E-06  8.38803E-07  3.17407E-07  1.29510E-04  1.17442E-04  5.51837E-05  1.75287E-05  5.18120E-07
 11.200  1.86941E-06  1.54634E-06  1.10029E-06  6.71151E-07  2.45845E-07  1.11358E-04  1.04236E-04  4.87481E-05  1.52056E-05  2.35959E-07
 11.300  1.53100E-06  1.22071E-06  8.68807E-07  5.43203E-07  1.94532E-07  9.55894E-05  9.24294E-05  4.32292E-05  1.33035E-05  7.65938E-08
 11.400  1.25138E-06  9.65089E-07  6.89046E-07  4.44010E-07  1.57495E-07  8.19041E-05  8.18431E-05  3.84540E-05  1.17385E-05  8.55348E-09
 11.500  1.01955E-06  7.62962E-07  5.47949E-07  3.65705E-07  1.30387E-07  7.00398E-05  7.23323E-05  3.42834E-05  1.04413E-05  5.96821E-09
 11.600  8.27102E-07  6.02127E-07  4.36023E-07  3.02684E-07  1.10081E-07  5.97679E-05  6.37792E-05  3.06071E-05  9.35451E-06  4.78010E-08
 11.700  6.67427E-07  4.73532E-07  3.46380E-07  2.50996E-07  9.43532E-08  5.08884E-05  5.60867E-05  2.73383E-05  8.43175E-06  1.17182E-07
 11.800  5.35266E-07  3.70421E-07  2.74017E-07  2.07880E-07  8.16573E-08  4.32258E-05  4.91737E-05  2.44097E-05  7.63584E-06  2.00831E-07
 11.900  4.26323E-07  2.87701E-07  2.15289E-07  1.71433E-07  7.09477E-08  3.66261E-05  4.29706E-05  2.17696E-05  6.93754E-06  2.88550E-07
 12.000  3.37024E-07  2.21473E-07  1.67522E-07  1.40347E-07  6.15484E-08  3.09535E-05  3.74170E-05  1.93784E-05  6.31434E-06  3.72775E-07
 12.100  2.64339E-07  1.68708E-07  1.28719E-07  1.13725E-07  5.30507E-08  2.60888E-05  3.24588E-05  1.72063E-05  5.74935E-06  4.48174E-07
 12.200  2.05663E-07  1.26994E-07  9.73544E-08  9.09445E-08  4.52340E-08  2.19270E-05  2.80468E-05  1.52305E-05  5.23028E-06  5.11281E-07
 12.300  1.58742E-07  9.43760E-08  7.22298E-08  7.15534E-08  3.80033E-08  1.83755E-05  2.41354E-05  1.34335E-05  4.74853E-06  5.60160E-07
 12.400  1.21610E-07  6.92308E-08  5.23662E-08  5.52018E-08  3.13409E-08  1.53529E-05  2.06818E-05  1.18014E-05  4.29837E-06  5.94108E-07
 12.500  9.25603E-08  5.01915E-08  3.69369E-08  4.15939E-08  2.52699E-08  1.27877E-05  1.76458E-05  1.03229E-05  3.87623E-06  6.13374E-07
 12.600  7.01100E-08  3.60925E-08  2.52236E-08  3.04582E-08  1.98274E-08  1.06172E-05  1.49890E-05  8.98816E-06  3.48009E-06  6.18917E-07
 12.700  5.29842E-08  2.59350E-08  1.65897E-08  2.15308E-08  1.50458E-08  8.78609E-06  1.26751E-05  7.78833E-06  3.10899E-06  6.12189E-07
 12.800  4.00954E-08  1.88643E-08  1.04662E-08  1.45485E-08  1.09424E-08  7.24634E-06  1.06697E-05  6.71494E-06  2.76257E-06  5.94948E-07
 12.900  3.05272E-08  1.41545E-08  6.34550E-09  9.24850E-09  7.51340E-09  5.95582E-06  8.94025E-06  5.75975E-06  2.44081E-06  5.69103E-07
 13.000  2.35178E-08  1.11964E-08  3.77889E-09  5.37216E-09  4.73344E-09  4.87787E-06  7.45644E-06  4.91450E-06  2.14377E-06  5.36592E-07
 13.100  1.84438E-08  9.48816E-09  2.37630E-09  2.67030E-09  2.55746E-09  3.98063E-06  6.18988E-06  4.17095E-06  1.87140E-06  4.99276E-07
 13.200  1.48036E-08  8.62538E-09  1.80585E-09  9.09382E-10  9.25007E-10  3.23649E-06  5.11436E-06  3.52081E-06  1.62348E-06  4.58877E-07
 13.300  1.22015E-08  8.29133E-09  1.79260E-09 -1.23246E-10 -2.34696E-10  2.62162E-06  4.20581E-06  2.95586E-06  1.39952E-06  4.16923E-07
 13.400  1.03319E-08  8.24647E-09  2.11599E-09 -6.15310E-10 -9.97545E-10  2.11547E-06  3.44232E-06  2.46801E-06  1.19880E-06  3.74722E-07
 13.500  8.96449E-09  8.31763E-09  2.60580E-09 -7.27247E-10 -1.43973E-09  1.70043E-06  2.80408E-06  2.04939E-06  1.02032E-06  3.33354E-07
 13.600  7.93043E-09  8.38711E-09  3.13692E-09 -5.91467E-10 -1.63378E-09  1.36144E-06  2.27332E-06  1.69244E-06  8.62868E-07  2.93667E-07
 13.700  7.11003E-09  8.38207E-09  3.62327E-09 -3.13117E-10 -1.64551E-09  1.08569E-06  1.83426E-06  1.38999E-06  7.25065E-07  2.56298E-07
 13.800  6.42181E-09  8.26454E-09  4.01128E-09  2.79588E-11 -1.53217E-09  8.62287E-07  1.47295E-06  1.13534E-06  6.05400E-07  2.21683E-07
 13.900  5.81317E-09  8.02247E-09  4.27334E-09  3.74395E-10 -1.34138E-09  6.82050E-07  1.17717E-06  9.22266E-07  5.02291E-07  1.90090E-07
 14.000  5.25254E-09  7.66182E-09  4.40154E-09  6.87971E-10 -1.11106E-09  5.37252E-07  9.36291E-07  7.45094E-07  4.14124E-07  1.61640E-07
 14.100  4.72311E-09  7.20006E-09  4.40202E-09  9.46069E-10 -8.69844E-10  4.21421E-07  7.41142E-07  5.98682E-07  3.39302E-07  1.36337E-07
 14.200  4.21780E-09  6.66090E-09  4.29012E-09  1.13821E-09 -6.38070E-10  3.29164E-07  5.83860E-07  4.78431E-07  2.76275E-07  1.14091E-07
 14.300  3.73552E-09  6.07027E-09  4.08633E-09  1.26286E-09 -4.28969E-10  2.56004E-07  4.57753E-07  3.80265E-07  2.23571E-07  9.47438E-08
 14.400  3.27834E-09  5.45342E-09  3.81317E-09  1.32457E-09 -2.49991E-10  1.98246E-07  3.57162E-07  3.00613E-07  1.79817E-07  7.80892E-08
 14.500  2.84964E-09  4.83308E-09  3.49285E-09  1.33169E-09 -1.04120E-10  1.52850E-07  2.77339E-07  2.36368E-07  1.43749E-07  6.38917E-08
 14.600  2.45281E-09  4.22828E-09  3.14572E-09  1.29445E-09  8.91216E-12  1.17332E-07  2.14321E-07  1.84858E-07  1.14224E-07  5.19011E-08
 14.700  2.09050E-09  3.65392E-09  2.78927E-09  1.22360E-09  9.15621E-11  8.96695E-08  1.64826E-07  1.43802E-07  9.02213E-08  4.18647E-08
 14.800  1.76432E-09  3.12073E-09  2.43772E-09  1.12940E-09  1.47598E-10  6.82232E-08  1.26150E-07  1.11270E-07  7.08402E-08  3.35361E-08
 14.900  1.47470E-09  2.63562E-09  2.10193E-09  1.02099E-09  1.81408E-10  5.16735E-08  9.60844E-08  8.56407E-08  5.52954E-08  2.66822E-08
 15.000  1.22097E-09  2.20213E-09  1.78958E-09  9.06077E-10  1.97489E-10  3.89618E-08  7.28311E-08  6.55665E-08  4.29095E-08  2.10873E-08
 15.100  1.00153E-09  1.82105E-09  1.50553E-09  7.90799E-10  2.00098E-10  2.92438E-08  5.49385E-08  4.99332E-08  3.31048E-08  1.65559E-08
 15.200  8.14093E-10  1.49104E-09  1.25228E-09  6.79755E-10  1.93031E-10  2.18495E-08  4.12413E-08  3.78277E-08  2.53934E-08  1.29139E-08
 15.300  6.55884E-10  1.20920E-09  1.03043E-09  5.76154E-10  1.79511E-10  1.62499E-08  3.08091E-08  2.85068E-08  1.93667E-08  1.00086E-08
 15.400  5.23859E-10  9.71596E-10  8.39167E-10  4.82002E-10  1.62154E-10  1.20297E-08  2.29043E-08  2.13704E-08  1.46864E-08  7.70787E-09
 15.500  4.14881E-10  7.73714E-10  6.76667E-10  3.98329E-10  1.42993E-10  8.86426E-09  1.69450E-08  1.59371E-08  1.10742E-08  5.89891E-09
 15.600  3.25868E-10  6.10799E-10  5.40457E-10  3.25402E-10  1.23528E-10  6.50138E-09  1.24754E-08  1.18234E-08  8.30358E-09  4.48659E-09
 15.700  2.53891E-10  4.78130E-10  4.27713E-10  2.62934E-10  1.04807E-10  4.74610E-09  9.14006E-09  8.72606E-09  6.19134E-09  3.39154E-09
 15.800  1.96255E-10  3.71210E-10  3.35492E-10  2.10256E-10  8.75036E-11  3.44849E-09  6.66389E-09  6.40683E-09  4.59077E-09  2.54824E-09
 15.900  1.50533E-10  2.85898E-10  2.60895E-10  1.66465E-10  7.19991E-11  2.49389E-09  4.83491E-09  4.67975E-09  3.38518E-09  1.90314E-09
 16.000  1.14591E-10  2.18476E-10  2.01194E-10  1.30540E-10  5.84536E-11  1.79504E-09  3.49084E-09  3.40065E-09  2.48248E-09  1.41291E-09
 16.100  8.65850E-11  1.65681E-10  1.53896E-10  1.01430E-10  4.68707E-11  1.28592E-09  2.50814E-09  2.45847E-09  1.81055E-09  1.04278E-09
 16.200  6.49485E-11  1.24706E-10  1.16787E-10  7.81145E-11  3.71489E-11  9.16837E-10  1.79330E-09  1.76824E-09  1.31331E-09  7.65113E-10
 16.300  4.83714E-11  9.31793E-11  8.79419E-11  5.96434E-11  2.91232E-11  6.50588E-10  1.27594E-09  1.26529E-09  9.47478E-10  5.58132E-10
 16.400  3.57729E-11  6.91237E-11  6.57221E-11  4.51617E-11  2.25959E-11  4.59463E-10  9.03419E-10  9.00785E-10  6.79870E-10  4.04805E-10
 16.500  2.62735E-11  5.09177E-11  4.87541E-11  3.39202E-11  1.73592E-11  3.22942E-10  6.36540E-10  6.38025E-10  4.85233E-10  2.91924E-10
 16.600  1.91659E-11  3.72476E-11  3.59054E-11  2.52766E-11  1.32107E-11  2.25903E-10  4.46315E-10  4.49621E-10  3.44470E-10  2.09328E-10
 16.700  1.38877E-11  2.70624E-11  2.62555E-11  1.86912E-11  9.96280E-12  1.57269E-10  3.11414E-10  3.15247E-10  2.43244E-10  1.49258E-10
 16.800  9.99699E-12  1.95308E-11  1.90654E-11  1.37179E-11  7.44800E-12  1.08965E-10  2.16229E-10  2.19916E-10  1.70856E-10  1.05831E-10
 16.900  7.14964E-12  1.40025E-11  1.37497E-11  9.99418E-12  5.52113E-12  7.51365E-11  1.49407E-10  1.52640E-10  1.19379E-10  7.46232E-11
 17.000  5.08059E-12  9.97386E-12  9.84941E-12  7.22900E-12  4.05938E-12  5.15624E-11  1.02734E-10  1.05413E-10  8.29740E-11  5.23279E-11
 17.100  3.58754E-12  7.05884E-12  7.00879E-12  5.19211E-12  2.96101E-12  3.52155E-11  7.02973E-11  7.24329E-11  5.73701E-11  3.64928E-11
 17.200  2.51748E-12  4.96424E-12  4.95492E-12  3.70340E-12  2.14318E-12  2.39361E-11  4.78686E-11  4.95222E-11  3.94608E-11  2.53111E-11
 17.300  1.75572E-12  3.46943E-12  3.48042E-12  2.62362E-12  1.53957E-12  1.61917E-11  3.24377E-11  3.36893E-11  2.70018E-11  1.74605E-11
 17.400  1.21701E-12  2.40981E-12  2.42921E-12  1.84627E-12  1.09785E-12  1.09005E-11  2.18747E-11  2.28043E-11  1.83812E-11  1.19800E-11
 17.500  8.38529E-13  1.66363E-12  1.68491E-12  1.29071E-12  7.77248E-13  7.30339E-12  1.46800E-11  1.53596E-11  1.24486E-11  8.17574E-12
 17.600  5.74315E-13  1.14160E-12  1.16145E-12  8.96492E-13  5.46401E-13  4.86992E-12  9.80402E-12  1.02940E-11  8.38763E-12  5.54983E-12
 17.700  3.91039E-13  7.78718E-13  7.95730E-13  6.18711E-13  3.81469E-13  3.23178E-12  6.51601E-12  6.86498E-12  5.62263E-12  3.74736E-12
 17.800  2.64699E-13  5.28061E-13  5.41886E-13  4.24318E-13  2.64520E-13  2.13444E-12  4.30983E-12  4.55563E-12  3.74999E-12  2.51697E-12
 17.900  1.78145E-13  3.56002E-13  3.66821E-13  2.89198E-13  1.82206E-13  1.40299E-12  2.83689E-12  3.00827E-12  2.48839E-12  1.68170E-12
 18.000  1.19208E-13  2.38621E-13  2.46850E-13  1.95898E-13  1.24685E-13  9.17804E-13  1.85837E-12  1.97674E-12  1.64290E-12  1.11776E-12
 18.100  7.93181E-14  1.59030E-13  1.65148E-13  1.31896E-13  8.47745E-14  5.97553E-13  1.21153E-12  1.29257E-12  1.07925E-12  7.39074E-13
 18.200  5.24802E-14  1.05386E-13  1.09849E-13  8.82734E-14  5.72734E-14  3.87199E-13  7.86044E-13  8.41070E-13  7.05424E-13  4.86159E-13
 18.300  3.45299E-14  6.94455E-14  7.26491E-14  5.87291E-14  3.84518E-14  2.49705E-13  5.07550E-13  5.44618E-13  4.58785E-13  3.18149E-13
 18.400  2.25940E-14  4.55076E-14  4.77745E-14  3.88445E-14  2.56564E-14  1.60272E-13  3.26161E-13  3.50944E-13  2.96897E-13  2.07135E-13
 18.500  1.47030E-14  2.96567E-14  3.12404E-14  2.55437E-14  1.70146E-14  1.02384E-13  2.08598E-13  2.25049E-13  1.91182E-13  1.34171E-13
 18.600  9.51598E-15  1.92211E-14  2.03149E-14  1.67011E-14  1.12158E-14  6.50946E-14  1.32775E-13  1.43619E-13  1.22501E-13  8.64679E-14
 18.700  6.12567E-15  1.23900E-14  1.31374E-14  1.08576E-14  7.34940E-15  4.11914E-14  8.41119E-14  9.12114E-14  7.81075E-14  5.54437E-14
 18.800  3.92214E-15  7.94356E-15  8.44924E-15  7.01893E-15  4.78756E-15  2.59429E-14  5.30315E-14  5.76494E-14  4.95577E-14  3.53720E-14
 18.900  2.49792E-15  5.06561E-15  5.40458E-15  4.51214E-15  3.10060E-15  1.62624E-14  3.32775E-14  3.62621E-14  3.12898E-14  2.24536E-14
 19.000  1.58247E-15  3.21318E-15  3.43843E-15  2.88462E-15  1.99652E-15  1.01463E-14  2.07832E-14  2.27002E-14  1.96596E-14  1.41821E-14
 19.100  9.97261E-16  2.02741E-15  2.17584E-15  1.83403E-15  1.27827E-15  6.30072E-15  1.29189E-14  1.41426E-14  1.22923E-14  8.91319E-15
 19.200  6.25193E-16  1.27253E-15  1.36956E-15  1.15974E-15  8.13795E-16  3.89437E-15  7.99262E-15  8.76921E-15  7.64869E-15  5.57404E-15
 19.300  3.89911E-16  7.94558E-16  8.57508E-16  7.29395E-16  5.15200E-16  2.39581E-15  4.92165E-15  5.41159E-15  4.73631E-15  3.46866E-15
 19.400  2.41922E-16  4.93550E-16  5.34089E-16  4.56284E-16  3.24359E-16  1.46703E-15  3.01644E-15  3.32375E-15  2.91877E-15  2.14790E-15
 19.500  1.49334E-16  3.04998E-16  3.30919E-16  2.83918E-16  2.03088E-16  8.94133E-16  1.84011E-15  2.03178E-15  1.79009E-15  1.32354E-15
 19.600  9.17123E-17  1.87516E-16  2.03975E-16  1.75733E-16  1.26466E-16  5.42430E-16  1.11728E-15  1.23616E-15  1.09262E-15  8.11590E-16
 19.700  5.60395E-17  1.14701E-16  1.25082E-16  1.08201E-16  7.83271E-17  3.27544E-16  6.75240E-16  7.48564E-16  6.63722E-16  4.95248E-16
 19.800  3.40699E-17  6.98063E-17  7.63107E-17  6.62737E-17  4.82522E-17  1.96871E-16  4.06192E-16  4.51173E-16  4.01271E-16  3.00747E-16
 19.900  2.06096E-17  4.22701E-17  4.63196E-17  4.03830E-17  2.95669E-17  1.17784E-16  2.43213E-16  2.70658E-16  2.41450E-16  1.81752E-16
  67 204 200   0.100
  0.000  4.69303E-02 -2.48253E-16 -4.16334E-16 -2.00148E-16 -1.55923E-15  9.41987E-02 -4.80991E-16 -7.91034E-16 -6.00445E-16 -2.60349E-15
  0.100  4.69536E-02 -2.18025E-05 -1.30021E-08 -1.24067E-12 -2.86098E-17  9.43042E-02 -1.90989E-05  1.83800E-08 -6.14555E-13 -4.01968E-15
  0.200  4.70235E-02 -8.64350E-05 -2.06000E-07 -7.72833E-11  1.40918E-13  9.46150E-02 -7.43047E-05  2.92007E-07 -3.51493E-11 -1.21260E-12
  0.300  4.71406E-02 -1.91585E-04 -1.02589E-06 -8.41718E-10  3.60198E-12  9.51139E-02 -1.59538E-04  1.46079E-06 -3.37469E-10 -3.05315E-11
  0.400  4.73055E-02 -3.33443E-04 -3.16829E-06 -4.43364E-09  3.57896E-11  9.57736E-02 -2.65294E-04  4.53943E-06 -1.42417E-09 -2.98214E-10
  0.500  4.75189E-02 -5.06771E-04 -7.50722E-06 -1.55130E-08  2.11843E-10  9.65583E-02 -3.79526E-04  1.08400E-05 -3.26110E-09 -1.72680E-09
  0.600  4.77811E-02 -7.05006E-04 -1.50037E-05 -4.14341E-08  9.02829E-10  9.74261E-02 -4.88755E-04  2.18648E-05 -2.43014E-09 -7.16803E-09
  0.700  4.80916E-02 -9.20409E-04 -2.65997E-05 -9.06810E-08  3.06469E-09  9.83316E-02 -5.79327E-04  3.91721E-05  1.35690E-08 -2.36036E-08
  0.800  4.84488E-02 -1.14425E-03 -4.31050E-05 -1.68768E-07  8.80024E-09  9.92287E-02 -6.38673E-04  6.42199E-05  7.50767E-08 -6.55007E-08
  0.900  4.88501E-02 -1.36707E-03 -6.50862E-05 -2.71131E-07  2.22197E-08  1.00073E-01 -6.56489E-04  9.81958E-05  2.41259E-07 -1.59283E-07
  1.000  4.92912E-02 -1.57892E-03 -9.27658E-05 -3.73041E-07  5.06466E-08  1.00826E-01 -6.25710E-04  1.41844E-04  6.11319E-07 -3.48622E-07
  1.100  4.97660E-02 -1.76977E-03 -1.25940E-04 -4.17146E-07  1.06181E-07  1.01454E-01 -5.43208E-04  1.95301E-04  1.33288E-06 -6.99992E-07
  1.200  5.02669E-02 -1.92981E-03 -1.63926E-04 -2.99901E-07  2.07577E-07  1.01934E-01 -4.10155E-04  2.57965E-04  2.60389E-06 -1.30777E-06
  1.300  5.07849E-02 -2.04991E-03 -2.05535E-04  1.41334E-07  3.82331E-07  1.02250E-01 -2.32022E-04  3.28401E-04  4.66432E-06 -2.29801E-06
  1.400  5.13095E-02 -2.12199E-03 -2.49094E-04  1.13839E-06  6.68787E-07  1.02400E-01 -1.82211E-05  4.04307E-04  7.77493E-06 -3.83016E-06
  1.500  5.18294E-02 -2.13942E-03 -2.92489E-04  2.99731E-06  1.11800E-06  1.02387E-01  2.18575E-04  4.82555E-04  1.21818E-05 -6.09600E-06
  1.600  5.23328E-02 -2.09740E-03 -3.33264E-04  6.09627E-06  1.79500E-06  1.02228E-01  4.63375E-04  5.59306E-04  1.80676E-05 -9.31548E-06
  1.700  5.28082E-02 -1.99328E-03 -3.68736E-04  1.08748E-05  2.77917E-06  1.01943E-01  6.99996E-04  6.30199E-04  2.54937E-05 -1.37293E-05
  1.800  5.32443E-02 -1.82673E-03 -3.96150E-04  1.78137E-05  4.16320E-06  1.01562E-01  9.12289E-04  6.90617E-04  3.43388E-05 -1.95888E-05
  1.900  5.36314E-02 -1.59997E-03 -4.12838E-04  2.74058E-05  6.05047E-06  1.01117E-01  1.08536E-03  7.36004E-04  4.42428E-05 -2.71426E-05
  2.000  5.39611E-02 -1.31769E-03 -4.16399E-04  4.01190E-05  8.55050E-06  1.00641E-01  1.20669E-03  7.62217E-04  5.45658E-05 -3.66224E-05
  2.100  5.42275E-02 -9.87041E-04 -4.04860E-04  5.63539E-05  1.17726E-05  1.00168E-01  1.26713E-03  7.65883E-04  6.43720E-05 -4.82272E-05
  2.200  5.44267E-02 -6.17399E-04 -3.76832E-04  7.63999E-05  1.58174E-05  9.97301E-02  1.26160E-03  7.44734E-04  7.24457E-05 -6.21064E-05
  2.300  5.45578E-02 -2.20019E-04 -3.31631E-04  1.00392E-04  2.07676E-05  9.93526E-02  1.18953E-03  6.97886E-04  7.73467E-05 -7.83443E-05
  2.400  5.46225E-02  1.92371E-04 -2.69367E-04  1.28277E-04  2.66776E-05  9.90568E-02  1.05498E-03  6.26039E-04  7.75048E-05 -9.69443E-05
  2.500  5.46250E-02  6.06088E-04 -1.90990E-04  1.59782E-04  3.35628E-05  9.88565E-02  8.66467E-04  5.31573E-04  7.13519E-05 -1.17814E-04
  2.600  5.45721E-02  1.00706E-03 -9.82852E-05  1.94406E-04  4.13908E-05  9.87582E-02  6.36441E-04  4.18518E-04  5.74808E-05 -1.40750E-04
  2.700  5.44730E-02  1.38144E-03  6.17364E-06  2.31420E-04  5.00741E-05  9.87603E-02  3.80516E-04  2.92407E-04  3.48202E-05 -1.65429E-04
  2.800  5.43383E-02  1.71621E-03  1.19121E-04  2.69883E-04  5.94659E-05  9.88545E-02  1.16468E-04  1.60005E-04  2.80719E-06 -1.91394E-04
  2.900  5.41799E-02  1.99975E-03  2.36733E-04  3.08672E-04  6.93594E-05  9.90257E-02 -1.36925E-04  2.89310E-05 -3.84623E-05 -2.18050E-04
  3.000  5.40107E-02  2.22239E-03  3.54795E-04  3.46536E-04  7.94913E-05  9.92534E-02 -3.61115E-04 -9.28041E-05 -8.81221E-05 -2.44660E-04
  3.100  5.38434E-02  2.37684E-03  4.68890E-04  3.82141E-04  8.95503E-05  9.95138E-02 -5.39033E-04 -1.97306E-04 -1.44484E-04 -2.70349E-04
  3.200  5.36904E-02  2.45859E-03  5.74603E-04  4.14141E-04  9.91882E-05  9.97806E-02 -6.56244E-04 -2.77328E-04 -2.05054E-04 -2.94112E-04
  3.300  5.35629E-02  2.46607E-03  6.67721E-04  4.41233E-04  1.08035E-04  1.00027E-01 -7.01937E-04 -3.26774E-04 -2.66631E-04 -3.14844E-04
  3.400  5.34704E-02  2.40086E-03  7.44434E-04  4.62225E-04  1.15718E-04  1.00229E-01 -6.69682E-04 -3.41146E-04 -3.25478E-04 -3.31364E-04
  3.500  5.34204E-02  2.26762E-03  8.01508E-04  4.76085E-04  1.21877E-04  1.00363E-01 -5.57885E-04 -3.17895E-04 -3.77563E-04 -3.42466E-04
  3.600  5.34176E-02  2.07400E-03  8.36446E-04  4.81984E-04  1.26182E-04  1.00411E-01 -3.69909E-04 -2.56650E-04 -4.18854E-04 -3.46979E-04
  3.700  5.34638E-02  1.83034E-03  8.47604E-04  4.79335E-04  1.28353E-04  1.00361E-01 -1.13834E-04 -1.59312E-04 -4.45641E-04 -3.43833E-04
  3.800  5.35573E-02  1.54935E-03  8.34291E-04  4.67804E-04  1.28168E-04  1.00205E-01  1.98139E-04 -2.99836E-05 -4.54861E-04 -3.32145E-04
  3.900  5.36933E-02  1.24567E-03  7.96820E-04  4.47329E-04  1.25473E-04  9.99401E-02  5.50598E-04  1.25237E-04 -4.44393E-04 -3.11294E-04
  4.000  5.38632E-02  9.35292E-04  7.36527E-04  4.18108E-04  1.20186E-04  9.95698E-02  9.26094E-04  2.98613E-04 -4.13297E-04 -2.81009E-04
  4.100  5.40551E-02  6.35006E-04  6.55757E-04  3.80600E-04  1.12299E-04  9.91009E-02  1.30650E-03  4.81246E-04 -3.61970E-04 -2.41439E-04
  4.200  5.42539E-02  3.61776E-04  5.57814E-04  3.35502E-04  1.01872E-04  9.85433E-02  1.67444E-03  6.63641E-04 -2.92199E-04 -1.93205E-04
  4.300  5.44415E-02  1.32090E-04  4.46874E-04  2.83738E-04  8.90269E-05  9.79081E-02  2.01472E-03  8.36328E-04 -2.07100E-04 -1.37432E-04
  4.400  5.45977E-02 -3.86677E-05  3.27872E-04  2.26440E-04  7.39395E-05  9.72064E-02  2.31556E-03  9.90508E-04 -1.10954E-04 -7.57519E-05
  4.500  5.47001E-02 -1.36828E-04  2.06356E-04  1.64929E-04  5.68327E-05  9.64472E-02  2.56962E-03  1.11866E-03 -8.93035E-06 -1.02590E-05
  4.600  5.47257E-02 -1.50992E-04  8.83116E-05  1.00702E-04  3.79681E-05  9.56366E-02  2.77470E-03  1.21511E-03  9.32707E-05  5.65591E-05
  4.700  5.46510E-02 -7.25160E-05 -2.00325E-05  3.54138E-05  1.76424E-05  9.47764E-02  2.93401E-03  1.27646E-03  1.89826E-04  1.21935E-04
  4.800  5.44530E-02  1.04092E-04 -1.12428E-04 -2.91409E-05 -3.81470E-06  9.38633E-02  3.05597E-03  1.30187E-03  2.75227E-04  1.82966E-04
  4.900  5.41106E-02  3.80889E-04 -1.82843E-04 -9.10504E-05 -2.60392E-05  9.28885E-02  3.15369E-03  1.29326E-03  3.44697E-04  2.36779E-04
  5.000  5.36046E-02  7.56333E-04 -2.25705E-04 -1.48317E-04 -4.86289E-05  9.18384E-02  3.24391E-03  1.25523E-03  3.94570E-04  2.80711E-04
  5.100  5.29192E-02  1.22526E-03 -2.36151E-04 -1.98898E-04 -7.11391E-05  9.06949E-02  3.34575E-03  1.19485E-03  4.22579E-04  3.12493E-04
  5.200  5.20426E-02  1.77900E-03 -2.10265E-04 -2.40759E-04 -9.30773E-05  8.94366E-02  3.47915E-03  1.12128E-03  4.28053E-04  3.30406E-04
  5.300  5.09673E-02  2.40563E-03 -1.45290E-04 -2.71938E-04 -1.13902E-04  8.80400E-02  3.66330E-03  1.04523E-03  4.11985E-04  3.33427E-04
  5.400  4.96908E-02  3.09038E-03 -3.98142E-05 -2.90626E-04 -1.33023E-04  8.64819E-02  3.91497E-03  9.78267E-04  3.76979E-04  3.21319E-04
  5.500  4.82157E-02  3.81615E-03  1.06096E-04 -2.95249E-04 -1.49812E-04  8.47401E-02  4.24716E-03  9.32123E-04  3.27076E-04  2.94677E-04
  5.600  4.65498E-02  4.56413E-03  2.90820E-04 -2.84563E-04 -1.63616E-04  8.27961E-02  4.66790E-03  9.17886E-04  2.67472E-04  2.54918E-04
  5.700  4.47059E-02  5.31446E-03  5.11168E-04 -2.57740E-04 -1.73781E-04  8.06360E-02  5.17945E-03  9.45273E-04  2.04152E-04  2.04214E-04
  5.800  4.27012E-02  6.04705E-03  7.62452E-04 -2.14449E-04 -1.79679E-04  7.82518E-02  5.77793E-03  1.02196E-03  1.43468E-04  1.45372E-04
  5.900  4.05571E-02  6.74229E-03  1.03862E-03 -1.54920E-04 -1.80751E-04  7.56426E-02  6.45339E-03  1.15300E-03  9.16974E-05  8.16652E-05
  6.000  3.82980E-02  7.38176E-03  1.33246E-03 -7.99868E-05 -1.76536E-04  7.28147E-02  7.19030E-03  1.34051E-03  5.46098E-05  1.66406E-05
  6.100  3.59511E-02  7.94897E-03  1.63589E-03  8.90471E-06 -1.66718E-04  6.97817E-02  7.96841E-03  1.58336E-03  3.70772E-05 -4.61028E-05
  6.200  3.35447E-02  8.42987E-03  1.94028E-03  1.09715E-04 -1.51161E-04  6.65643E-02  8.76393E-03  1.87729E-03  4.27547E-05 -1.03131E-04
  6.300  3.11081E-02  8.81337E-03  2.23678E-03  2.19867E-04 -1.29934E-04  6.31891E-02  9.55094E-03  2.21504E-03  7.38530E-05 -1.51379E-04
  6.400  2.86699E-02  9.09165E-03  2.51676E-03  3.36339E-04 -1.03334E-04  5.96878E-02  1.03028E-02  2.58674E-03  1.31015E-04 -1.88331E-04
  6.500  2.62578E-02  9.26030E-03  2.77210E-03  4.55778E-04 -7.18896E-05  5.60957E-02  1.09939E-02  2.98049E-03  2.13301E-04 -2.12152E-04
  6.600  2.38973E-02  9.31841E-03  2.99560E-03  5.74648E-04 -3.63536E-05  5.24504E-02  1.16005E-02  3.38303E-03  3.18282E-04 -2.21777E-04
  6.700  2.16116E-02  9.26837E-03  3.18123E-03  6.89384E-04  2.32126E-06  4.87902E-02  1.21024E-02  3.78041E-03  4.42225E-04 -2.16944E-04
  6.800  1.94206E-02  9.11566E-03  3.32437E-03  7.96556E-04  4.30204E-05  4.51530E-02  1.24838E-02  4.15879E-03  5.80353E-04 -1.98175E-04
  6.900  1.73410E-02  8.86844E-03  3.42198E-03  8.93021E-04  8.45169E-05  4.15745E-02  1.27336E-02  4.50514E-03  7.27166E-04 -1.66705E-04
  7.000  1.53859E-02  8.53708E-03  3.47267E-03  9.76070E-04  1.25531E-04  3.80876E-02  1.28460E-02  4.80790E-03  8.76782E-04 -1.24375E-04
  7.100  1.35647E-02  8.13365E-03  3.47664E-03  1.04354E-03  1.64791E-04  3.47214E-02  1.28203E-02  5.05746E-03  1.02329E-03 -7.34866E-05
  7.200  1.18837E-02  7.67133E-03  3.43569E-03  1.09389E-03  2.01101E-04  3.15005E-02  1.26607E-02  5.24658E-03  1.16109E-03 -1.66432E-05
  7.300  1.03455E-02  7.16388E-03  3.35295E-03  1.12626E-03  2.33395E-04  2.84448E-02  1.23757E-02  5.37061E-03  1.28514E-03  4.34177E-05
  7.400  8.95003E-03  6.62505E-03  3.23274E-03  1.14049E-03  2.60791E-04  2.55695E-02  1.19774E-02  5.42756E-03  1.39126E-03  1.03987E-04
  7.500  7.69459E-03  6.06817E-03  3.08028E-03  1.13706E-03  2.82626E-04  2.28849E-02  1.14807E-02  5.41800E-03  1.47622E-03  1.62531E-04
  7.600  6.57432E-03  5.50565E-03  2.90140E-03  1.11706E-03  2.98484E-04  2.03968E-02  1.09024E-02  5.34485E-03  1.53790E-03  2.16813E-04
  7.700  5.58262E-03  4.94870E-03  2.70228E-03  1.08207E-03  3.08203E-04  1.81072E-02  1.02603E-02  5.21306E-03  1.57527E-03  2.64985E-04
  7.800  4.71156E-03  4.40707E-03  2.48913E-03  1.03410E-03  3.11867E-04  1.60141E-02  9.57246E-03  5.02922E-03  1.58835E-03  3.05648E-04
  7.900  3.95230E-03  3.88890E-03  2.26800E-03  9.75422E-04  3.09788E-04  1.41130E-02  8.85625E-03  4.80111E-03  1.57813E-03  3.37879E-04
  8.000  3.29544E-03  3.40063E-03  2.04449E-03  9.08460E-04  3.02475E-04  1.23964E-02  8.12800E-03  4.53723E-03  1.54642E-03  3.61223E-04
  8.100  2.73135E-03  2.94702E-03  1.82363E-03  8.35681E-04  2.90591E-04  1.08552E-02  7.40241E-03  4.24636E-03  1.49567E-03  3.75666E-04
  8.200  2.25041E-03  2.53126E-03  1.60975E-03  7.59476E-04  2.74907E-04  9.47883E-03  6.69223E-03  3.93721E-03  1.42879E-03  3.81575E-04
  8.300  1.84329E-03  2.15503E-03  1.40638E-03  6.82068E-04  2.56259E-04  8.25576E-03  6.00808E-03  3.61801E-03  1.34896E-03  3.79636E-04
  8.400  1.50107E-03  1.81876E-03  1.21624E-03  6.05436E-04  2.35498E-04  7.17398E-03  5.35839E-03  3.29627E-03  1.25943E-03  3.70774E-04
  8.500  1.21539E-03  1.52176E-03  1.04127E-03  5.31269E-04  2.13449E-04  6.22129E-03  4.74945E-03  2.97861E-03  1.16342E-03  3.56072E-04
  8.600  9.78533E-04  1.26243E-03  8.82640E-04  4.60934E-04  1.90877E-04  5.38564E-03  4.18550E-03  2.67060E-03  1.06392E-03  3.36699E-04
  8.700  7.83480E-04  1.03852E-03  7.40857E-04  3.95464E-04  1.68459E-04  4.65534E-03  3.66897E-03  2.37670E-03  9.63627E-04  3.13834E-04
  8.800  6.23925E-04  8.47296E-04  6.15851E-04  3.35572E-04  1.46768E-04  4.01923E-03  3.20070E-03  2.10030E-03  8.64869E-04  2.88615E-04
  8.900  4.94266E-04  6.85702E-04  5.07076E-04  2.81669E-04  1.26260E-04  3.46682E-03  2.78019E-03  1.84378E-03  7.69564E-04  2.62087E-04
  9.000  3.89587E-04  5.50559E-04  4.13621E-04  2.33903E-04  1.07270E-04  2.98835E-03  2.40588E-03  1.60855E-03  6.79210E-04  2.35171E-04
  9.100  3.05617E-04  4.38674E-04  3.34311E-04  1.92199E-04  9.00254E-05  2.57487E-03  2.07539E-03  1.39524E-03  5.94894E-04  2.08645E-04
  9.200  2.38683E-04  3.46951E-04  2.67805E-04  1.56304E-04  7.46453E-05  2.21821E-03  1.78575E-03  1.20378E-03  5.17329E-04  1.83131E-04
  9.300  1.85658E-04  2.72474E-04  2.12680E-04  1.25831E-04  6.11613E-05  1.91104E-03  1.53363E-03  1.03354E-03  4.46890E-04  1.59100E-04
  9.400  1.43903E-04  2.12560E-04  1.67501E-04  1.00304E-04  4.95314E-05  1.64678E-03  1.31550E-03  8.83498E-04  3.83673E-04  1.36882E-04
  9.500  1.11211E-04  1.64790E-04  1.30874E-04  7.91956E-05  3.96564E-05  1.41960E-03  1.12782E-03  7.52328E-04  3.27544E-04  1.16676E-04
  9.600  8.57543E-05  1.27029E-04  1.01493E-04  6.19576E-05  3.13972E-05  1.22437E-03  9.67074E-04  6.38513E-04  2.78193E-04  9.85715E-05
  9.700  6.60322E-05  9.74218E-05  7.81618E-05  4.80505E-05  2.45894E-05  1.05660E-03  8.29942E-04  5.40438E-04  2.35189E-04  8.25700E-05
  9.800  5.08228E-05  7.43869E-05  5.98130E-05  3.69614E-05  1.90564E-05  9.12377E-04  7.13314E-04  4.56466E-04  1.98020E-04  6.86025E-05
  9.900  3.91397E-05  5.65928E-05  4.55144E-05  2.82186E-05  1.46205E-05  7.88319E-04  6.14340E-04  3.84990E-04  1.66131E-04  5.65499E-05
 10.000  3.01942E-05  4.29369E-05  3.44677E-05  2.13996E-05  1.11105E-05  6.81515E-04  5.30455E-04  3.24475E-04  1.38958E-04  4.62596E-05
 10.100  2.33600E-05  3.25175E-05  2.60008E-05  1.61352E-05  8.36819E-06  5.89469E-04  4.59377E-04  2.73487E-04  1.15944E-04  3.75605E-05
 10.200  1.81449E-05  2.46076E-05  1.95581E-05  1.21100E-05  6.25140E-06  5.10049E-04  3.99105E-04  2.30712E-04  9.65635E-05  3.02744E-05
 10.300  1.41645E-05  1.86273E-05  1.46869E-05  9.05953E-06  4.63629E-06  4.41439E-04  3.47906E-04  1.94960E-04  8.03273E-05  2.42249E-05
 10.400  1.11215E-05  1.41200E-05  1.10241E-05  6.76631E-06  3.41740E-06  3.82093E-04  3.04293E-04  1.65172E-04  6.67908E-05  1.92440E-05
 10.500  8.78766E-06  1.07295E-05  8.28197E-06  5.05459E-06  2.50700E-06  3.30701E-04  2.67003E-04  1.40412E-04  5.55562E-05  1.51763E-05
 10.600  6.98902E-06  8.18111E-06  6.23594E-06  3.78455E-06  1.83356E-06  2.86149E-04  2.34977E-04  1.19862E-04  4.62714E-05  1.18813E-05
 10.700  5.59396E-06  6.26459E-06  4.71234E-06  2.84662E-06  1.33987E-06  2.47492E-04  2.07328E-04  1.02816E-04  3.86285E-05  9.23463E-06
 10.800  4.50353E-06  4.82053E-06  3.57848E-06  2.15612E-06  9.80960E-07  2.13925E-04  1.83324E-04  8.86675E-05  3.23603E-05  7.12734E-06
 10.900  3.64378E-06  3.72888E-06  2.73389E-06  1.64843E-06  7.22005E-07  1.84764E-04  1.62364E-04  7.69008E-05  2.72363E-05  5.46559E-06
 11.000  2.95966E-06  2.89981E-06  2.10315E-06  1.27478E-06  5.36429E-07  1.59423E-04  1.43956E-04  6.70810E-05  2.30589E-05  4.16920E-06
 11.100  2.41030E-06  2.26647E-06  1.63006E-06  9.98777E-07  4.04192E-07  1.37401E-04  1.27703E-04  5.88442E-05  1.96594E-05  3.17017E-06
 11.200  1.96540E-06  1.77933E-06  1.27302E-06  7.93506E-07  3.10341E-07  1.18268E-04  1.13282E-04  5.18891E-05  1.68949E-05  2.41122E-06
 11.300  1.60244E-06  1.40180E-06  1.00142E-06  6.39242E-07  2.43823E-07  1.01651E-04  1.00433E-04  4.59681E-05  1.46445E-05  1.84431E-06
 11.400  1.30461E-06  1.10693E-06  7.92827E-07  5.21647E-07  1.96531E-07  8.72294E-05  8.89452E-05  4.08803E-05  1.28070E-05  1.42934E-06
 11.500  1.05923E-06  8.74851E-07  6.30880E-07  4.30391E-07  1.62572E-07  7.47237E-05  7.86504E-05  3.64640E-05  1.12980E-05  1.13296E-06
 11.600  8.56650E-07  6.90946E-07  5.03701E-07  3.58101E-07  1.37700E-07  6.38911E-05  6.94101E-05  3.25909E-05  1.00479E-05  9.27604E-07
 11.700  6.89377E-07  5.44395E-07  4.02689E-07  2.99565E-07  1.18892E-07  5.45195E-05  6.11111E-05  2.91604E-05  9.00001E-06  7.90636E-07
 11.800  5.51496E-07  4.27164E-07  3.21626E-07  2.51146E-07  1.04035E-07  4.64236E-05  5.36590E-05  2.60945E-05  8.10872E-06  7.03615E-07
 11.900  4.38237E-07  3.33225E-07  2.56020E-07  2.10338E-07  9.16877E-08  3.94411E-05  4.69741E-05  2.33335E-05  7.33786E-06  6.51705E-07
 12.000  3.45678E-07  2.58008E-07  2.02613E-07  1.75440E-07  8.09076E-08  3.34295E-05  4.09875E-05  2.08323E-05  6.65934E-06  6.23150E-07
 12.100  2.70532E-07  1.97983E-07  1.59021E-07  1.45311E-07  7.11127E-08  2.82639E-05  3.56386E-05  1.85572E-05  6.05185E-06  6.08825E-07
 12.200  2.10008E-07  1.50377E-07  1.23473E-07  1.19189E-07  6.19800E-08  2.38345E-05  3.08731E-05  1.64828E-05  5.49961E-06  6.01836E-07
 12.300  1.61709E-07  1.12963E-07  9.46184E-08  9.65614E-08  5.33647E-08  2.00448E-05  2.66413E-05  1.45902E-05  4.99134E-06  5.97161E-07
 12.400  1.23565E-07  8.39143E-08  7.13928E-08  7.70652E-08  4.52368E-08  1.68102E-05  2.28971E-05  1.28649E-05  4.51932E-06  5.91337E-07
 12.500  9.37866E-08  6.17072E-08  5.29267E-08  6.04239E-08  3.76333E-08  1.40563E-05  1.95977E-05  1.12955E-05  4.07849E-06  5.82160E-07
 12.600  7.08282E-08  4.50524E-08  3.84829E-08  4.64004E-08  3.06209E-08  1.17181E-05  1.67024E-05  9.87248E-06  3.66579E-06  5.68435E-07
 12.700  5.33651E-08  3.28514E-08  2.74182E-08  3.47703E-08  2.42708E-08  9.73817E-06  1.41731E-05  8.58732E-06  3.27955E-06  5.49734E-07
 12.800  4.02697E-08  2.41662E-08  1.91603E-08  2.53073E-08  1.86405E-08  8.06667E-06  1.19737E-05  7.43216E-06  2.91896E-06  5.26204E-07
 12.900  3.05931E-08  1.81997E-08  1.31965E-08  1.77777E-08  1.37640E-08  6.65986E-06  1.00704E-05  6.39928E-06  2.58375E-06  4.98384E-07
 13.000  2.35470E-08  1.42809E-08  9.06866E-09  1.19411E-08  9.64779E-09  5.47960E-06  8.43128E-06  5.48094E-06  2.27381E-06  4.67063E-07
 13.100  1.84861E-08  1.18539E-08  6.37112E-09  7.55568E-09  6.27084E-09  4.49269E-06  7.02665E-06  4.66925E-06  1.98909E-06  4.33162E-07
 13.200  1.48911E-08  1.04665E-08  4.75123E-09  4.38408E-09  3.58810E-09  3.67030E-06  5.82903E-06  3.95622E-06  1.72935E-06  3.97637E-07
 13.300  1.23523E-08  9.76022E-09  3.90894E-09  2.20061E-09  1.53565E-09  2.98742E-06  4.81308E-06  3.33377E-06  1.49417E-06  3.61413E-07
 13.400  1.05529E-08  9.45966E-09  3.59574E-09  7.96990E-10  3.67941E-11  2.42246E-06  3.95565E-06  2.79382E-06  1.28285E-06  3.25334E-07
 13.500  9.25427E-09  9.36111E-09  3.61225E-09 -1.29089E-11 -9.91894E-10  1.95682E-06  3.23571E-06  2.32843E-06  1.09445E-06  2.90127E-07
 13.600  8.28171E-09  9.32164E-09  3.80456E-09 -3.90201E-10 -1.63507E-09  1.57452E-06  2.63432E-06  1.92987E-06  9.27813E-07  2.56394E-07
 13.700  7.51171E-09  9.24805E-09  4.05934E-09 -4.69733E-10 -1.97407E-09  1.26188E-06  2.13457E-06  1.59072E-06  7.81575E-07  2.24597E-07
 13.800  6.86071E-09  9.08659E-09  4.29831E-09 -3.60388E-10 -2.08349E-09  1.00724E-06  1.72142E-06  1.30395E-06  6.54239E-07  1.95069E-07
 13.900  6.27544E-09  8.81340E-09  4.47229E-09 -1.46641E-10 -2.02891E-09  8.00688E-07  1.38164E-06  1.06301E-06  5.44216E-07  1.68022E-07
 14.000  5.72474E-09  8.42614E-09  4.55524E-09  1.08988E-10 -1.86569E-09  6.33854E-07  1.10363E-06  8.61845E-07  4.49875E-07  1.43560E-07
 14.100  5.19299E-09  7.93688E-09  4.53867E-09  3.62903E-10 -1.63867E-09  4.99671E-07  8.77350E-07  6.94936E-07  3.69586E-07  1.21696E-07
 14.200  4.67482E-09  7.36622E-09  4.42654E-09  5.87160E-10 -1.38261E-09  3.92217E-07  6.94124E-07  5.57304E-07  3.01762E-07  1.02372E-07
 14.300  4.17109E-09  6.73878E-09  4.23093E-09  7.66205E-10 -1.12305E-09  3.06546E-07  5.46529E-07  4.44509E-07  2.44883E-07  8.54715E-08
 14.400  3.68595E-09  6.07978E-09  3.96851E-09  8.93811E-10 -8.77595E-10  2.38546E-07  4.28248E-07  3.52630E-07  1.97523E-07  7.08382E-08
 14.500  3.22479E-09  5.41271E-09  3.65769E-09  9.70375E-10 -6.57247E-10  1.84815E-07  3.33951E-07  2.78237E-07  1.58367E-07  5.82886E-08
 14.600  2.79282E-09  4.75790E-09  3.31667E-09  1.00062E-09 -4.67796E-10  1.42552E-07  2.59161E-07  2.18364E-07  1.26217E-07  4.76244E-08
 14.700  2.39432E-09  4.13175E-09  2.96199E-09  9.91760E-10 -3.11126E-10  1.09463E-07  2.00149E-07  1.70460E-07  1.00000E-07  3.86419E-08
 14.800  2.03221E-09  3.54649E-09  2.60779E-09  9.52062E-10 -1.86354E-10  8.36760E-08  1.53827E-07  1.32357E-07  7.87650E-08  3.11403E-08
 14.900  1.70795E-09  3.01040E-09  2.26537E-09  8.89857E-10 -9.08016E-11  6.36739E-08  1.17653E-07  1.02228E-07  6.16781E-08  2.49268E-08
 15.000  1.42167E-09  2.52815E-09  1.94317E-09  8.12844E-10 -2.07738E-11  4.82322E-08  8.95492E-08  7.85400E-08  4.80192E-08  1.98215E-08
 15.100  1.17229E-09  2.10143E-09  1.64693E-09  7.27693E-10  2.78545E-11  3.63676E-08  6.78277E-08  6.00236E-08  3.71709E-08  1.56592E-08
 15.200  9.57814E-10  1.72952E-09  1.38003E-09  6.39859E-10  5.92129E-11  2.72950E-08  5.11254E-08  4.56321E-08  2.86095E-08  1.22915E-08
 15.300  7.75607E-10  1.40989E-09  1.14387E-09  5.53553E-10  7.71542E-11  2.03908E-08  3.83484E-08  3.45099E-08  2.18956E-08  9.58683E-09
 15.400  6.22606E-10  1.13874E-09  9.38296E-10  4.71813E-10  8.50879E-11  1.51620E-08  2.86245E-08  2.59625E-08  1.66631E-08  7.43044E-09
 15.500  4.95551E-10  9.11542E-10  7.62013E-10  3.96651E-10  8.59019E-11  1.12213E-08  2.12622E-08  1.94307E-08  1.26102E-08  5.72339E-09
 15.600  3.91163E-10  7.23356E-10  6.12922E-10  3.29218E-10  8.19476E-11  8.26578E-09  1.57165E-08  1.44668E-08  9.49007E-09  4.38146E-09
 15.700  3.06270E-10  5.69190E-10  4.88444E-10  2.69984E-10  7.50683E-11  6.06004E-09  1.15605E-08  1.07154E-08  7.10255E-09  3.33380E-09
 15.800  2.37908E-10  4.44211E-10  3.85767E-10  2.18910E-10  6.66533E-11  4.42190E-09  8.46201E-09  7.89592E-09  5.28650E-09  2.52138E-09
 15.900  1.83378E-10  3.43905E-10  3.02033E-10  1.75599E-10  5.77044E-11  3.21130E-09  6.16374E-09  5.78839E-09  3.91331E-09  1.89558E-09
 16.000  1.40278E-10  2.64172E-10  2.34484E-10  1.39419E-10  4.89067E-11  2.32105E-09  4.46775E-09  4.22164E-09  2.88108E-09  1.41667E-09
 16.100  1.06514E-10  2.01379E-10  1.80553E-10  1.09613E-10  4.06955E-11  1.66962E-09  3.22260E-09  3.06322E-09  2.10966E-09  1.05255E-09
 16.200  8.02883E-11  1.52366E-10  1.37917E-10  8.53718E-11  3.33173E-11  1.19529E-09  2.31312E-09  2.21134E-09  1.53648E-09  7.77475E-10
 16.300  6.00887E-11  1.14439E-10  1.04530E-10  6.58910E-11  2.68809E-11  8.51630E-10  1.65220E-09  1.58825E-09  1.11304E-09  5.70973E-10
 16.400  4.46561E-11  8.53376E-11  7.86224E-11  5.04119E-11  2.14006E-11  6.03876E-10  1.17436E-09  1.13493E-09  8.02001E-10  4.16917E-10
 16.500  3.29586E-11  6.31887E-11  5.86966E-11  3.82435E-11  1.68291E-11  4.26148E-10  8.30647E-10  8.06898E-10  5.74815E-10  3.02696E-10
 16.600  2.41605E-11  4.64652E-11  4.35016E-11  2.87746E-11  1.30832E-11  2.99288E-10  5.84665E-10  5.70779E-10  4.09808E-10  2.18526E-10
 16.700  1.75930E-11  3.39356E-11  3.20100E-11  2.14777E-11  1.00621E-11  2.09185E-10  4.09520E-10  4.01721E-10  2.90632E-10  1.56876E-10
 16.800  1.27266E-11  2.46190E-11  2.33891E-11  1.59068E-11  7.66021E-12  1.45508E-10  2.85445E-10  2.81315E-10  2.05034E-10  1.11990E-10
 16.900  9.14675E-12  1.77426E-11  1.69724E-11  1.16917E-11  5.77547E-12  1.00729E-10  1.97994E-10  1.96010E-10  1.43892E-10  7.95045E-11
 17.000  6.53192E-12  1.27039E-11  1.22328E-11  8.53000E-12  4.31436E-12  6.93963E-11  1.36667E-10  1.35889E-10  1.00458E-10  5.61313E-11
 17.100  4.63524E-12  9.03803E-12  8.75807E-12  6.17828E-12  3.19441E-12  4.75807E-11  9.38769E-11  9.37389E-11  6.97713E-11  3.94125E-11
 17.200  3.26886E-12  6.38943E-12  6.22927E-12  4.44321E-12  2.34506E-12  3.24668E-11  6.41716E-11  6.43410E-11  4.82088E-11  2.75228E-11
 17.300  2.29111E-12  4.48888E-12  4.40203E-12  3.17320E-12  1.70740E-12  2.20477E-11  4.36533E-11  4.39435E-11  3.31390E-11  1.91158E-11
 17.400  1.59607E-12  3.13427E-12  3.09098E-12  2.25074E-12  1.23323E-12  1.49006E-11  2.95518E-11  2.98638E-11  2.26633E-11  1.32054E-11
 17.500  1.10522E-12  2.17514E-12  2.15678E-12  1.58575E-12  8.83857E-13  1.00222E-11  1.99089E-11  2.01950E-11  1.54202E-11  9.07350E-12
 17.600  7.60779E-13  1.50046E-12  1.49560E-12  1.10986E-12  6.28698E-13  6.70871E-12  1.33478E-11  1.35893E-11  1.04386E-11  6.20127E-12
 17.700  5.20611E-13  1.02890E-12  1.03077E-12  7.71751E-13  4.43921E-13  4.46930E-12  8.90578E-12  9.09937E-12  7.03060E-12  4.21578E-12
 17.800  3.54192E-13  7.01401E-13  7.06113E-13  5.33215E-13  3.11207E-13  2.96322E-12  5.91346E-12  6.06303E-12  4.71136E-12  2.85088E-12
 17.900  2.39584E-13  4.75364E-13  4.80822E-13  3.66086E-13  2.16640E-13  1.95531E-12  3.90769E-12  4.02012E-12  3.14132E-12  1.91777E-12
 18.000  1.61138E-13  3.20316E-13  3.25477E-13  2.49780E-13  1.49775E-13  1.28410E-12  2.56988E-12  2.65255E-12  2.08400E-12  1.28333E-12
 18.100  1.07765E-13  2.14609E-13  2.19033E-13  1.69379E-13  1.02851E-13  8.39290E-13  1.68198E-12  1.74169E-12  1.37566E-12  8.54318E-13
 18.200  7.16673E-14  1.42974E-13  1.46548E-13  1.14164E-13  7.01618E-14  5.45962E-13  1.09559E-12  1.13805E-12  9.03563E-13  5.65780E-13
 18.300  4.73969E-14  9.47173E-14  9.74885E-14  7.64872E-14  4.75515E-14  3.53469E-13  7.10236E-13  7.40028E-13  5.90537E-13  3.72763E-13
 18.400  3.11733E-14  6.24000E-14  6.44847E-14  5.09419E-14  3.20218E-14  2.27763E-13  4.58231E-13  4.78885E-13  3.84048E-13  2.44336E-13
 18.500  2.03910E-14  4.08830E-14  4.24143E-14  3.37298E-14  2.14283E-14  1.46070E-13  2.94238E-13  3.08401E-13  2.48531E-13  1.59338E-13
 18.600  1.32659E-14  2.66394E-14  2.77422E-14  2.22042E-14  1.42505E-14  9.32367E-14  1.88039E-13  1.97656E-13  1.60043E-13  1.03380E-13
 18.700  8.58415E-15  1.72642E-14  1.80453E-14  1.45332E-14  9.41918E-15  5.92334E-14  1.19603E-13  1.26072E-13  1.02557E-13  6.67350E-14
 18.800  5.52502E-15  1.11283E-14  1.16735E-14  9.45841E-15  6.18827E-15  3.74544E-14  7.57144E-14  8.00284E-14  6.53988E-14  4.28623E-14
 18.900  3.53724E-15  7.13492E-15  7.51058E-15  6.12110E-15  4.04141E-15  2.35722E-14  4.77051E-14  5.05586E-14  4.15010E-14  2.73913E-14
 19.000  2.25271E-15  4.55032E-15  4.80615E-15  3.93929E-15  2.62383E-15  1.47660E-14  2.99162E-14  3.17889E-14  2.62082E-14  1.74171E-14
 19.100  1.42715E-15  2.88672E-15  3.05908E-15  2.52119E-15  1.69358E-15  9.20648E-15  1.86726E-14  1.98926E-14  1.64707E-14  1.10197E-14
 19.200  8.99446E-16  1.82176E-15  1.93675E-15  1.60476E-15  1.08686E-15  5.71343E-15  1.16003E-14  1.23893E-14  1.03013E-14  6.93757E-15
 19.300  5.63942E-16  1.14371E-15  1.21971E-15  1.01591E-15  6.93526E-16  3.52920E-15  7.17294E-15  7.67981E-15  6.41185E-15  4.34604E-15
 19.400  3.51772E-16  7.14328E-16  7.64119E-16  6.39670E-16  4.40048E-16  2.16989E-15  4.41468E-15  4.73809E-15  3.97182E-15  2.70919E-15
 19.500  2.18308E-16  4.43860E-16  4.76211E-16  4.00620E-16  2.77658E-16  1.32796E-15  2.70444E-15  2.90946E-15  2.44861E-15  1.68055E-15
 19.600  1.34795E-16  2.74394E-16  2.95248E-16  2.49575E-16  1.74226E-16  8.08944E-16  1.64905E-15  1.77821E-15  1.50237E-15  1.03738E-15
 19.700  8.28098E-17  1.68771E-16  1.82112E-16  1.54660E-16  1.08726E-16  4.90509E-16  1.00087E-15  1.08173E-15  9.17425E-16  6.37241E-16
 19.800  5.06185E-17  1.03283E-16  1.11755E-16  9.53416E-17  6.74823E-17  2.96055E-16  6.04662E-16  6.54980E-16  5.57578E-16  3.89548E-16
 19.900  3.07870E-17  6.28895E-17  6.82317E-17  5.84690E-17  4.16585E-17  1.77869E-16  3.63614E-16  3.94742E-16  3.37277E-16  2.36983E-16
  67 205 200   0.100
  0.000  4.66781E-02 -2.48253E-16 -3.53884E-16 -4.12806E-16 -8.15379E-16  9.50316E-02 -5.12023E-16 -7.49401E-16 -6.50482E-16 -2.27448E-15
  0.100  4.67036E-02 -2.13741E-05 -1.40871E-08 -1.85222E-12 -8.65446E-16  9.51242E-02 -2.16951E-05  1.72738E-08  2.15122E-12 -2.84524E-14
  0.200  4.67804E-02 -8.47396E-05 -2.23260E-07 -1.16169E-10  1.18337E-13  9.53971E-02 -8.45604E-05  2.74597E-07  1.40251E-10 -1.15189E-12
  0.300  4.69083E-02 -1.87839E-04 -1.11243E-06 -1.28006E-09  3.05168E-12  9.58346E-02 -1.82133E-04  1.37507E-06  1.63153E-09 -2.87701E-11
  0.400  4.70874E-02 -3.26956E-04 -3.43808E-06 -6.86073E-09  3.04472E-11  9.64125E-02 -3.04282E-04  4.27903E-06  9.41754E-09 -2.80944E-10
  0.500  4.73172E-02 -4.96984E-04 -8.15448E-06 -2.45982E-08  1.80944E-10  9.70988E-02 -4.38105E-04  1.02365E-05  3.70393E-08 -1.62642E-09
  0.600  4.75970E-02 -6.91535E-04 -1.63174E-05 -6.79398E-08  7.74756E-10  9.78560E-02 -5.69074E-04  2.06929E-05  1.14169E-07 -6.74892E-09
  0.700  4.79250E-02 -9.03081E-04 -2.89726E-05 -1.55699E-07  2.64395E-09  9.86435E-02 -6.82318E-04  3.71687E-05  2.96869E-07 -2.22137E-08
  0.800  4.82984E-02 -1.12314E-03 -4.70359E-05 -3.09072E-07  7.63664E-09  9.94203E-02 -7.63949E-04  6.11184E-05  6.79961E-07 -6.16114E-08
  0.900  4.87132E-02 -1.34253E-03 -7.11758E-05 -5.45349E-07  1.94036E-08  1.00147E-01 -8.02290E-04  9.37728E-05  1.40994E-06 -1.49733E-07
  1.000  4.91640E-02 -1.55162E-03 -1.01705E-04 -8.68182E-07  4.45235E-08  1.00789E-01 -7.88928E-04  1.35976E-04  2.69586E-06 -3.27487E-07
  1.100  4.96438E-02 -1.74065E-03 -1.38492E-04 -1.25487E-06  9.39947E-08  1.01318E-01 -7.19489E-04  1.88030E-04  4.81493E-06 -6.57023E-07
  1.200  5.01444E-02 -1.90015E-03 -1.80900E-04 -1.64179E-06  1.85076E-07  1.01712E-01 -5.94080E-04  2.49556E-04  8.10887E-06 -1.22637E-06
  1.300  5.06562E-02 -2.02123E-03 -2.27757E-04 -1.90973E-06  3.43393E-07  1.01960E-01 -4.17364E-04  3.19399E-04  1.29679E-05 -2.15280E-06
  1.400  5.11687E-02 -2.09602E-03 -2.77367E-04 -1.87121E-06  6.05154E-07  1.02058E-01 -1.98271E-04  3.95574E-04  1.97996E-05 -3.58416E-06
  1.500  5.16708E-02 -2.11805E-03 -3.27555E-04 -1.26222E-06  1.01924E-06  1.02013E-01  5.06329E-05  4.75290E-04  2.89827E-05 -5.69762E-06
  1.600  5.21513E-02 -2.08258E-03 -3.75757E-04  2.59471E-07  1.64882E-06  1.01838E-01  3.14060E-04  5.55027E-04  4.08060E-05 -8.69554E-06
  1.700  5.25993E-02 -1.98688E-03 -4.19138E-04  3.10768E-06  2.57221E-06  1.01554E-01  5.75122E-04  6.30702E-04  5.53995E-05 -1.27984E-05
  1.800  5.30047E-02 -1.83049E-03 -4.54743E-04  7.75179E-06  3.88246E-06  1.01187E-01  8.16574E-04  6.97896E-04  7.26621E-05 -1.82353E-05
  1.900  5.33590E-02 -1.61532E-03 -4.79660E-04  1.46913E-05  5.68541E-06  1.00768E-01  1.02209E-03  7.52140E-04  9.21962E-05 -2.52318E-05
  2.000  5.36553E-02 -1.34569E-03 -4.91207E-04  2.44217E-05  8.09590E-06  1.00326E-01  1.17747E-03  7.89235E-04  1.13260E-04 -3.39976E-05
  2.100  5.38889E-02 -1.02828E-03 -4.87097E-04  3.73949E-05  1.12320E-05  9.98928E-02  1.27169E-03  8.05598E-04  1.34749E-04 -4.47123E-05
  2.200  5.40574E-02 -6.71914E-04 -4.65605E-04  5.39748E-05  1.52075E-05  9.94956E-02  1.29774E-03  7.98581E-04  1.55207E-04 -5.75118E-05
  2.300  5.41610E-02 -2.87260E-04 -4.25706E-04  7.43949E-05  2.01222E-05  9.91583E-02  1.25316E-03  7.66760E-04  1.72892E-04 -7.24751E-05
  2.400  5.42027E-02  1.13533E-04 -3.67176E-04  9.87190E-05  2.60521E-05  9.88989E-02  1.14030E-03  7.10153E-04  1.85869E-04 -8.96117E-05
  2.500  5.41876E-02  5.17331E-04 -2.90654E-04  1.26811E-04  3.30384E-05  9.87290E-02  9.66193E-04  6.30347E-04  1.92164E-04 -1.08849E-04
  2.600  5.41233E-02  9.10541E-04 -1.97663E-04  1.58314E-04  4.10772E-05  9.86532E-02  7.42168E-04  5.30521E-04  1.89930E-04 -1.30023E-04
  2.700  5.40190E-02  1.27968E-03 -9.05770E-05  1.92647E-04  5.01114E-05  9.86692E-02  4.83121E-04  4.15350E-04  1.77647E-04 -1.52865E-04
  2.800  5.38857E-02  1.61198E-03  2.74568E-05  2.29013E-04  6.00241E-05  9.87679E-02  2.06563E-04  2.90798E-04  1.54316E-04 -1.76991E-04
  2.900  5.37351E-02  1.89590E-03  1.52633E-04  2.66425E-04  7.06360E-05  9.89345E-02 -6.85227E-05  1.63802E-04  1.19636E-04 -2.01899E-04
  3.000  5.35794E-02  2.12171E-03  2.80646E-04  3.03740E-04  8.17068E-05  9.91495E-02 -3.22926E-04  4.18757E-05  7.41412E-05 -2.26955E-04
  3.100  5.34307E-02  2.28190E-03  4.06870E-04  3.39710E-04  9.29402E-05  9.93904E-02 -5.38483E-04 -6.73604E-05  1.92793E-05 -2.51397E-04
  3.200  5.33004E-02  2.37159E-03  5.26562E-04  3.73037E-04  1.03994E-04  9.96327E-02 -6.99282E-04 -1.56666E-04 -4.25830E-05 -2.74337E-04
  3.300  5.31986E-02  2.38875E-03  6.35070E-04  4.02432E-04  1.14492E-04  9.98521E-02 -7.92728E-04 -2.19674E-04 -1.08237E-04 -2.94775E-04
  3.400  5.31337E-02  2.33440E-03  7.28042E-04  4.26672E-04  1.24041E-04  1.00026E-01 -8.10371E-04 -2.51338E-04 -1.73795E-04 -3.11619E-04
  3.500  5.31118E-02  2.21262E-03  8.01623E-04  4.44653E-04  1.32247E-04  1.00135E-01 -7.48458E-04 -2.48310E-04 -2.34926E-04 -3.23729E-04
  3.600  5.31365E-02  2.03045E-03  8.52638E-04  4.55436E-04  1.38734E-04  1.00162E-01 -6.08139E-04 -2.09223E-04 -2.87159E-04 -3.29958E-04
  3.700  5.32082E-02  1.79771E-03  8.78742E-04  4.58282E-04  1.43159E-04  1.00097E-01 -3.95322E-04 -1.34837E-04 -3.26222E-04 -3.29222E-04
  3.800  5.33243E-02  1.52666E-03  8.78548E-04  4.52679E-04  1.45228E-04  9.99339E-02 -1.20171E-04 -2.80594E-05 -3.48400E-04 -3.20571E-04
  3.900  5.34790E-02  1.23159E-03  8.51719E-04  4.38356E-04  1.44704E-04  9.96714E-02  2.03722E-04  1.06186E-04 -3.50860E-04 -3.03276E-04
  4.000  5.36630E-02  9.28313E-04  7.99019E-04  4.15290E-04  1.41416E-04  9.93130E-02  5.60440E-04  2.61230E-04 -3.31945E-04 -2.76909E-04
  4.100  5.38638E-02  6.33600E-04  7.22333E-04  3.83703E-04  1.35265E-04  9.88654E-02  9.33033E-04  4.29052E-04 -2.91374E-04 -2.41427E-04
  4.200  5.40661E-02  3.64551E-04  6.24641E-04  3.44062E-04  1.26219E-04  9.83377E-02  1.30490E-03  6.00788E-04 -2.30348E-04 -1.97237E-04
  4.300  5.42519E-02  1.37952E-04  5.09960E-04  2.97065E-04  1.14311E-04  9.77397E-02  1.66119E-03  7.67307E-04 -1.51542E-04 -1.45245E-04
  4.400  5.44010E-02 -3.03782E-05  3.83241E-04  2.43638E-04  9.96383E-05  9.70807E-02  1.99001E-03  9.19831E-04 -5.89709E-05 -8.68724E-05
  4.500  5.44919E-02 -1.26223E-04  2.50229E-04  1.84924E-04  8.23530E-05  9.63677E-02  2.28351E-03  1.05056E-03  4.22528E-05 -2.40373E-05
  4.600  5.45019E-02 -1.37558E-04  1.17291E-04  1.22275E-04  6.26609E-05  9.56044E-02  2.53853E-03  1.15323E-03  1.46263E-04  4.08986E-05
  4.700  5.44085E-02 -5.50711E-05 -8.79476E-06  5.72489E-05  4.08182E-05  9.47904E-02  2.75700E-03  1.22366E-03  2.46857E-04  1.05228E-04
  4.800  5.41901E-02  1.27398E-04 -1.21080E-04 -8.41065E-06  1.71323E-05  9.39203E-02  2.94578E-03  1.26008E-03  3.37950E-04  1.66031E-04
  4.900  5.38264E-02  4.12537E-04 -2.12705E-04 -7.27853E-05 -8.03522E-06  9.29836E-02  3.11621E-03  1.26335E-03  4.14036E-04  2.20335E-04
  5.000  5.32998E-02  7.99363E-04 -2.77181E-04 -1.33811E-04 -3.42636E-05  9.19652E-02  3.28317E-03  1.23709E-03  4.70618E-04  2.65299E-04
  5.100  5.25956E-02  1.28317E-03 -3.08671E-04 -1.89317E-04 -6.10670E-05  9.08464E-02  3.46395E-03  1.18748E-03  5.04562E-04  2.98404E-04
  5.200  5.17033E-02  1.85560E-03 -3.02269E-04 -2.37080E-04 -8.78889E-05  8.96054E-02  3.67675E-03  1.12295E-03  5.14364E-04  3.17633E-04
  5.300  5.06165E-02  2.50493E-03 -2.54260E-04 -2.74891E-04 -1.14100E-04  8.82193E-02  3.93918E-03  1.05377E-03  5.00286E-04  3.21632E-04
  5.400  4.93338E-02  3.21639E-03 -1.62338E-04 -3.00638E-04 -1.39002E-04  8.66654E-02  4.26674E-03  9.91343E-04  4.64366E-04  3.09835E-04
  5.500  4.78584E-02  3.97276E-03 -2.57846E-05 -3.12408E-04 -1.61833E-04  8.49233E-02  4.67146E-03  9.47543E-04  4.10299E-04  2.82534E-04
  5.600  4.61989E-02  4.75490E-03  1.54423E-04 -3.08580E-04 -1.81789E-04  8.29757E-02  5.16071E-03  9.33913E-04  3.43184E-04  2.40902E-04
  5.700  4.43680E-02  5.54252E-03  3.75571E-04 -2.87938E-04 -1.98047E-04  8.08107E-02  5.73645E-03  9.60887E-04  2.69180E-04  1.86950E-04
  5.800  4.23832E-02  6.31495E-03  6.33249E-04 -2.49765E-04 -2.09799E-04  7.84222E-02  6.39479E-03  1.03707E-03  1.95075E-04  1.23426E-04
  5.900  4.02655E-02  7.05185E-03  9.21478E-04 -1.93925E-04 -2.16297E-04  7.58109E-02  7.12601E-03  1.16859E-03  1.27818E-04  5.36618E-05
  6.000  3.80388E-02  7.73402E-03  1.23291E-03 -1.20925E-04 -2.16894E-04  7.29847E-02  7.91496E-03  1.35865E-03  7.40392E-05 -1.86222E-05
  6.100  3.57294E-02  8.34408E-03  1.55911E-03 -3.19465E-05 -2.11093E-04  6.99584E-02  8.74186E-03  1.60723E-03  3.96035E-05 -8.95416E-05
  6.200  3.33647E-02  8.86708E-03  1.89090E-03  7.11597E-05 -1.98590E-04  6.67533E-02  9.58343E-03  1.91099E-03  2.92184E-05 -1.55282E-04
  6.300  3.09728E-02  9.29098E-03  2.21872E-03  1.85916E-04 -1.79316E-04  6.33963E-02  1.04141E-02  2.26338E-03  4.61324E-05 -2.12330E-04
  6.400  2.85811E-02  9.60703E-03  2.53305E-03  3.09298E-04 -1.53457E-04  5.99189E-02  1.12076E-02  2.65500E-03  9.19384E-05 -2.57678E-04
  6.500  2.62159E-02  9.80998E-03  2.82481E-03  4.37849E-04 -1.21473E-04  5.63558E-02  1.19381E-02  3.07408E-03  1.66495E-04 -2.88995E-04
  6.600  2.39016E-02  9.89807E-03  3.08573E-03  5.67824E-04 -8.40919E-05  5.27437E-02  1.25819E-02  3.50714E-03  2.67963E-04 -3.04751E-04
  6.700  2.16600E-02  9.87302E-03  3.30870E-03  6.95354E-04 -4.22903E-05  4.91197E-02  1.31183E-02  3.93968E-03  3.92958E-04 -3.04277E-04
  6.800  1.95100E-02  9.73971E-03  3.48804E-03  8.16622E-04  2.74305E-06  4.55200E-02  1.35310E-02  4.35701E-03  5.36786E-04 -2.87781E-04
  6.900  1.74674E-02  9.50586E-03  3.61968E-03  9.28038E-04  4.96589E-05  4.19788E-02  1.38081E-02  4.74499E-03  6.93769E-04 -2.56294E-04
  7.000  1.55445E-02  9.18156E-03  3.70132E-03  1.02640E-03  9.70106E-05  3.85276E-02  1.39429E-02  5.09074E-03  8.57602E-04 -2.11572E-04
  7.100  1.37503E-02  8.77877E-03  3.73240E-03  1.10903E-03  1.43324E-04  3.51939E-02  1.39338E-02  5.38322E-03  1.02174E-03 -1.55965E-04
  7.200  1.20906E-02  8.31073E-03  3.71405E-03  1.17388E-03  1.87171E-04  3.20011E-02  1.37843E-02  5.61374E-03  1.17977E-03 -9.22409E-05
  7.300  1.05680E-02  7.79142E-03  3.64899E-03  1.21964E-03  2.27237E-04  2.89681E-02  1.35020E-02  5.77625E-03  1.32575E-03 -2.34121E-05
  7.400  9.18262E-03  7.23499E-03  3.54125E-03  1.24571E-03  2.62387E-04  2.61093E-02  1.30987E-02  5.86746E-03  1.45453E-03  4.74507E-05
  7.500  7.93195E-03  6.65527E-03  3.39598E-03  1.25223E-03  2.91713E-04  2.34346E-02  1.25889E-02  5.88685E-03  1.56194E-03  1.17390E-04
  7.600  6.81157E-03  6.06534E-03  3.21912E-03  1.24003E-03  3.14571E-04  2.09496E-02  1.19893E-02  5.83649E-03  1.64493E-03  1.83710E-04
  7.700  5.81543E-03  5.47714E-03  3.01712E-03  1.21054E-03  3.30600E-04  1.86564E-02  1.13180E-02  5.72076E-03  1.70168E-03  2.44100E-04
  7.800  4.93622E-03  4.90122E-03  2.79661E-03  1.16570E-03  3.39725E-04  1.65534E-02  1.05934E-02  5.54595E-03  1.73157E-03  2.96716E-04
  7.900  4.16578E-03  4.34654E-03  2.56416E-03  1.10781E-03  3.42141E-04  1.46366E-02  9.83368E-03  5.31981E-03  1.73511E-03  3.40235E-04
  8.000  3.49540E-03  3.82040E-03  2.32598E-03  1.03941E-03  3.38285E-04  1.28993E-02  9.05610E-03  5.05111E-03  1.71377E-03  3.73863E-04
  8.100  2.91609E-03  3.32834E-03  2.08777E-03  9.63172E-04  3.28796E-04  1.13333E-02  8.27640E-03  4.74913E-03  1.66987E-03  3.97320E-04
  8.200  2.41890E-03  2.87432E-03  1.85454E-03  8.81734E-04  3.14465E-04  9.92881E-03  7.50847E-03  4.42324E-03  1.60634E-03  4.10792E-04
  8.300  1.99505E-03  2.46069E-03  1.63049E-03  7.97618E-04  2.96188E-04  8.67525E-03  6.76415E-03  4.08248E-03  1.52654E-03  4.14862E-04
  8.400  1.63611E-03  2.08845E-03  1.41900E-03  7.13126E-04  2.74905E-04  7.56149E-03  6.05306E-03  3.73529E-03  1.43401E-03  4.10433E-04
  8.500  1.33415E-03  1.75740E-03  1.22257E-03  6.30275E-04  2.51562E-04  6.57615E-03  5.38260E-03  3.38921E-03  1.33233E-03  3.98635E-04
  8.600  1.08179E-03  1.46633E-03  1.04289E-03  5.50754E-04  2.27057E-04  5.70792E-03  4.75807E-03  3.05075E-03  1.22496E-03  3.80740E-04
  8.700  8.72260E-04  1.21324E-03  8.80902E-04  4.75897E-04  2.02210E-04  4.94573E-03  4.18280E-03  2.72527E-03  1.11505E-03  3.58080E-04
  8.800  6.99422E-04  9.95540E-04  7.36866E-04  4.06682E-04  1.77736E-04  4.27896E-03  3.65840E-03  2.41699E-03  1.00541E-03  3.31972E-04
  8.900  5.57779E-04  8.10264E-04  6.10487E-04  3.43750E-04  1.54227E-04  3.69750E-03  3.18497E-03  2.12897E-03  8.98419E-04  3.03660E-04
  9.000  4.42454E-04  6.54205E-04  5.01017E-04  2.87432E-04  1.32146E-04  3.19191E-03  2.76139E-03  1.86325E-03  7.95988E-04  2.74269E-04
  9.100  3.49166E-04  5.24081E-04  4.07368E-04  2.37790E-04  1.11826E-04  2.75342E-03  2.38556E-03  1.62091E-03  6.99575E-04  2.44772E-04
  9.200  2.74191E-04  4.16651E-04  3.28218E-04  1.94664E-04  9.34764E-05  2.37397E-03  2.05467E-03  1.40224E-03  6.10199E-04  2.15973E-04
  9.300  2.14319E-04  3.28814E-04  2.62105E-04  1.57721E-04  7.71991E-05  2.04625E-03  1.76542E-03  1.20688E-03  5.28482E-04  1.88507E-04
  9.400  1.66810E-04  2.57672E-04  2.07511E-04  1.26501E-04  6.30016E-05  1.76364E-03  1.51421E-03  1.03391E-03  4.54701E-04  1.62837E-04
  9.500  1.29343E-04  2.00577E-04  1.62929E-04  1.00463E-04  5.08165E-05  1.52022E-03  1.29731E-03  8.82074E-04  3.88846E-04  1.39273E-04
  9.600  9.99741E-05  1.55163E-04  1.26914E-04  7.90233E-05  4.05197E-05  1.31074E-03  1.11099E-03  7.49823E-04  3.30681E-04  1.17989E-04
  9.700  7.70837E-05  1.19346E-04  9.81229E-05  6.15883E-05  3.19479E-05  1.13056E-03  9.51659E-04  6.35465E-04  2.79800E-04  9.90457E-05
  9.800  5.93384E-05  9.13287E-05  7.53374E-05  4.75800E-05  2.49150E-05  9.75583E-04  8.15909E-04  5.37237E-04  2.35680E-04  8.24101E-05
  9.900  4.56488E-05  6.95811E-05  5.74782E-05  3.64558E-05  1.92252E-05  8.42275E-04  7.00583E-04  4.53379E-04  1.97730E-04  6.79815E-05
 10.000  3.51326E-05  5.28212E-05  4.36078E-05  2.77208E-05  1.46843E-05  7.27551E-04  6.02803E-04  3.82189E-04  1.65326E-04  5.56103E-05
 10.100  2.70822E-05  3.99901E-05  3.29278E-05  2.09357E-05  1.11077E-05  6.28752E-04  5.19991E-04  3.22058E-04  1.37842E-04  4.51162E-05
 10.200  2.09346E-05  3.02245E-05  2.47697E-05  1.57189E-05  8.32603E-06  5.43594E-04  4.49864E-04  2.71497E-04  1.14674E-04  3.63037E-05
 10.300  1.62463E-05  2.28299E-05  1.85830E-05  1.17466E-05  6.18893E-06  4.70120E-04  3.90427E-04  2.29150E-04  9.52529E-05  2.89735E-05
 10.400  1.26705E-05  1.72538E-05  1.39213E-05  8.74896E-06  4.56604E-06  4.06660E-04  3.39956E-04  1.93801E-04  7.90573E-05  2.29319E-05
 10.500  9.93911E-06  1.30622E-05  1.04280E-05  6.50516E-06  3.34721E-06  3.51790E-04  2.96978E-04  1.64370E-04  6.56157E-05  1.79966E-05
 10.600  7.84588E-06  9.91740E-06  7.82173E-06  4.83774E-06  2.44140E-06  3.04298E-04  2.60246E-04  1.39912E-04  5.45091E-05  1.40007E-05
 10.700  6.23389E-06  7.55958E-06  5.88353E-06  3.60621E-06  1.77482E-06  2.63155E-04  2.28711E-04  1.19607E-04  4.53694E-05  1.07948E-05
 10.800  4.98444E-06  5.79047E-06  4.44484E-06  2.70104E-06  1.28884E-06  2.27483E-04  2.01501E-04  1.02748E-04  3.78766E-05  8.24708E-06
 10.900  4.00845E-06  4.46012E-06  3.37733E-06  2.03793E-06  9.37583E-07  1.96534E-04  1.77895E-04  8.87319E-05  3.17545E-05  6.24344E-06
 11.000  3.23938E-06  3.45596E-06  2.58420E-06  1.55288E-06  6.85767E-07  1.69672E-04  1.57302E-04  7.70496E-05  2.67664E-05  4.68582E-06
 11.100  2.62778E-06  2.69404E-06  1.99309E-06  1.19779E-06  5.06589E-07  1.46350E-04  1.39238E-04  6.72728E-05  2.27107E-05  3.49093E-06
 11.200  2.13699E-06  2.11210E-06  1.55029E-06  9.36919E-07  3.79946E-07  1.26101E-04  1.23310E-04  5.90456E-05  1.94165E-05  2.58849E-06
 11.300  1.73984E-06  1.66418E-06  1.21621E-06  7.43953E-07  2.90906E-07  1.08523E-04  1.09201E-04  5.20741E-05  1.67398E-05  1.91960E-06
 11.400  1.41616E-06  1.31649E-06  9.61836E-07  5.99670E-07  2.28479E-07  9.32698E-05  9.66528E-05  4.61181E-05  1.45600E-05  1.43512E-06
 11.500  1.15087E-06  1.04423E-06  7.66022E-07  4.90161E-07  1.84637E-07  8.00406E-05  8.54573E-05  4.09830E-05  1.27768E-05  1.09428E-06
 11.600  9.32608E-07  8.29206E-07  6.13425E-07  4.05441E-07  1.53561E-07  6.85758E-05  7.54453E-05  3.65130E-05  1.13072E-05  8.63444E-07
 11.700  7.52698E-07  6.58086E-07  4.92959E-07  3.38415E-07  1.31071E-07  5.86494E-05  6.64789E-05  3.25845E-05  1.00836E-05  7.15050E-07
 11.800  6.04406E-07  5.21055E-07  3.96650E-07  2.84095E-07  1.14203E-07  5.00647E-05  5.84440E-05  2.91006E-05  9.05136E-06  6.26701E-07
 11.900  4.82405E-07  4.10850E-07  3.18774E-07  2.39027E-07  1.00893E-07  4.26498E-05  5.12453E-05  2.59861E-05  8.16686E-06  5.80406E-07
 12.000  3.82400E-07  3.22046E-07  2.55225E-07  2.00853E-07  8.97465E-08  3.62549E-05  4.48021E-05  2.31832E-05  7.39599E-06  5.61927E-07
 12.100  3.00859E-07  2.50536E-07  2.03051E-07  1.67998E-07  7.98605E-08  3.07486E-05  3.90444E-05  2.06481E-05  6.71254E-06  5.60215E-07
 12.200  2.34826E-07  1.93151E-07  1.60107E-07  1.39428E-07  7.06945E-08  2.60160E-05  3.39108E-05  1.83472E-05  6.09684E-06  5.66913E-07
 12.300  1.81794E-07  1.47398E-07  1.24805E-07  1.14475E-07  6.19657E-08  2.19563E-05  2.93461E-05  1.62555E-05  5.53455E-06  5.75927E-07
 12.400  1.39612E-07  1.11265E-07  9.59375E-08  9.27073E-08  5.35690E-08  1.84812E-05  2.53001E-05  1.43533E-05  5.01555E-06  5.83027E-07
 12.500  1.06428E-07  8.30902E-08  7.25492E-08  7.38340E-08  4.55136E-08  1.55133E-05  2.17267E-05  1.26255E-05  4.53299E-06  5.85507E-07
 12.600  8.06425E-08  6.14747E-08  5.38501E-08  5.76391E-08  3.78735E-08  1.29848E-05  1.85828E-05  1.10596E-05  4.08249E-06  5.81866E-07
 12.700  6.08760E-08  4.52225E-08  3.91599E-08  4.39372E-08  3.07502E-08  1.08361E-05  1.58281E-05  9.64501E-06  3.66140E-06  5.71534E-07
 12.800  4.59466E-08  3.33019E-08  2.78731E-08  3.25461E-08  2.42450E-08  9.01515E-06  1.34249E-05  8.37224E-06  3.26829E-06  5.54634E-07
 12.900  3.48489E-08  2.48222E-08  1.94402E-08  2.32725E-08  1.84414E-08  7.47642E-06  1.13377E-05  7.23232E-06  2.90244E-06  5.31770E-07
 13.000  2.67368E-08  1.90175E-08  1.33594E-08  1.59073E-08  1.33943E-08  6.18008E-06  9.53347E-06  6.21656E-06  2.56353E-06  5.03859E-07
 13.100  2.09078E-08  1.52361E-08  9.17401E-09  1.02273E-08  9.12552E-09  5.09136E-06  7.98110E-06  5.31635E-06  2.25135E-06  4.71987E-07
 13.200  1.67868E-08  1.29320E-08  6.47390E-09  6.00073E-09  5.62453E-09  4.18001E-06  6.65188E-06  4.52308E-06  1.96564E-06  4.37297E-07
 13.300  1.39118E-08  1.16572E-08  4.89742E-09  2.99549E-09  2.85210E-09  3.41970E-06  5.51929E-06  3.82814E-06  1.70596E-06  4.00907E-07
 13.400  1.19186E-08  1.10532E-08  4.13325E-09  9.86633E-10  7.46215E-10  2.78762E-06  4.55898E-06  3.22299E-06  1.47167E-06  3.63850E-07
 13.500  1.05271E-08  1.08421E-08  3.92077E-09 -2.36252E-10 -7.71080E-10  2.26403E-06  3.74876E-06  2.69921E-06  1.26184E-06  3.27035E-07
 13.600  9.52744E-09  1.08171E-08  4.04894E-09 -8.63303E-10 -1.78681E-09  1.83191E-06  3.06859E-06  2.24864E-06  1.07535E-06  2.91223E-07
 13.700  8.76776E-09  1.08321E-08  4.35338E-09 -1.06052E-09 -2.39076E-09  1.47664E-06  2.50042E-06  1.86340E-06  9.10859E-07  2.57025E-07
 13.800  8.14258E-09  1.07914E-08  4.71213E-09 -9.67736E-10 -2.67020E-09  1.18568E-06  2.02818E-06  1.53603E-06  7.66853E-07  2.24896E-07
 13.900  7.58271E-09  1.06400E-08  5.04036E-09 -6.98375E-10 -2.70585E-09  9.48324E-07  1.63763E-06  1.25953E-06  6.41723E-07  1.95155E-07
 14.000  7.04638E-09  1.03539E-08  5.28447E-09 -3.40577E-10 -2.56915E-09  7.55477E-07  1.31624E-06  1.02738E-06  5.33796E-07  1.67990E-07
 14.100  6.51180E-09  9.93171E-09  5.41605E-09  4.05316E-11 -2.32067E-09  5.99431E-07  1.05310E-06  8.33653E-07  4.41382E-07  1.43483E-07
 14.200  5.97098E-09  9.38765E-09  5.42598E-09  3.99887E-10 -2.00963E-09  4.73686E-07  8.38699E-07  6.72938E-07  3.62815E-07  1.21628E-07
 14.300  5.42489E-09  8.74514E-09  5.31907E-09  7.09160E-10 -1.67418E-09  3.72785E-07  6.64891E-07  5.40394E-07  2.96490E-07  1.02344E-07
 14.400  4.87965E-09  8.03213E-09  5.10940E-09  9.53356E-10 -1.34234E-09  2.92162E-07  5.24683E-07  4.31719E-07  2.40884E-07  8.55013E-08
 14.500  4.34378E-09  7.27742E-09  4.81631E-09  1.12758E-09 -1.03327E-09  2.28019E-07  4.12140E-07  3.43129E-07  1.94582E-07  7.09309E-08
 14.600  3.82626E-09  6.50811E-09  4.46139E-09  1.23413E-09 -7.58741E-10  1.77208E-07  3.22249E-07  2.71324E-07  1.56284E-07  5.84408E-08
 14.700  3.33523E-09  5.74792E-09  4.06612E-09  1.27997E-09 -5.24660E-10  1.37134E-07  2.50805E-07  2.13452E-07  1.24815E-07  4.78272E-08
 14.800  2.87732E-09  5.01627E-09  3.65028E-09  1.27475E-09 -3.32526E-10  1.05669E-07  1.94300E-07  1.67073E-07  9.91224E-08  3.88836E-08
 14.900  2.45726E-09  4.32802E-09  3.23098E-09  1.22916E-09 -1.80709E-10  8.10721E-08  1.49831E-07  1.30110E-07  7.82807E-08  3.14079E-08
 15.000  2.07787E-09  3.69353E-09  2.82213E-09  1.15386E-09 -6.55581E-11  6.19310E-08  1.15006E-07  1.00814E-07  6.14796E-08  2.52080E-08
 15.100  1.74022E-09  3.11910E-09  2.43434E-09  1.05865E-09  1.77173E-11  4.71026E-08  8.78671E-08  7.77224E-08  4.80196E-08  2.01050E-08
 15.200  1.44384E-09  2.60751E-09  2.07508E-09  9.52063E-10  7.43603E-11  3.56673E-08  6.68214E-08  5.96200E-08  3.73020E-08  1.59359E-08
 15.300  1.18706E-09  2.15869E-09  1.74901E-09  8.41097E-10  1.09577E-10  2.68890E-08  5.05808E-08  4.55056E-08  2.88195E-08  1.25541E-08
 15.400  9.67336E-10  1.77039E-09  1.45841E-09  7.31212E-10  1.28208E-10  2.01812E-08  3.81096E-08  3.45597E-08  2.21461E-08  9.83030E-09
 15.500  7.81502E-10  1.43879E-09  1.20365E-09  6.26408E-10  1.34531E-10  1.50792E-08  2.85798E-08  2.61164E-08  1.69269E-08  7.65150E-09
 15.600  6.26080E-10  1.15903E-09  9.83633E-10  5.29395E-10  1.32169E-10  1.12166E-08  2.13332E-08  1.96380E-08  1.28688E-08  5.92042E-09
 15.700  4.97471E-10  9.25708E-10  7.96228E-10  4.41790E-10  1.24074E-10  8.30588E-09  1.58498E-08  1.46937E-08  9.73183E-09  4.55417E-09
 15.800  3.92129E-10  7.33230E-10  6.38646E-10  3.64341E-10  1.12562E-10  6.12273E-09  1.17209E-08  1.09399E-08  7.32072E-09  3.48288E-09
 15.900  3.06686E-10  5.76087E-10  5.07731E-10  2.97131E-10  9.93801E-11  4.49296E-09  8.62704E-09  8.10496E-09  5.47807E-09  2.64827E-09
 16.000  2.38034E-10  4.49060E-10  4.00199E-10  2.39764E-10  8.57848E-11  3.28202E-09  6.32013E-09  5.97513E-09  4.07781E-09  2.00217E-09
 16.100  1.83373E-10  3.47354E-10  3.12822E-10  1.91530E-10  7.26333E-11  2.38652E-09  4.60841E-09  4.38335E-09  3.01967E-09  1.50513E-09
 16.200  1.40233E-10  2.66666E-10  2.42548E-10  1.51529E-10  6.04655E-11  1.72742E-09  3.34453E-09  3.19986E-09  2.22452E-09  1.12511E-09
 16.300  1.06474E-10  2.03216E-10  1.86581E-10  1.18775E-10  4.95800E-11  1.24461E-09  2.41589E-09  2.32447E-09  1.63029E-09  8.36345E-10
 16.400  8.02740E-11  1.53749E-10  1.42427E-10  9.22739E-11  4.00996E-11  8.92631E-10  1.73690E-09  1.68031E-09  1.18865E-09  6.18240E-10
 16.500  6.01034E-11  1.15501E-10  1.07907E-10  7.10703E-11  3.20253E-11  6.37243E-10  1.24287E-09  1.20873E-09  8.62202E-10  4.54493E-10
 16.600  4.46960E-11  8.61676E-11  8.11542E-11  5.42841E-11  2.52790E-11  4.52825E-10  8.85182E-10  8.65263E-10  6.22215E-10  3.32283E-10
 16.700  3.30165E-11  6.38461E-11  6.05959E-11  4.11283E-11  1.97362E-11  3.20291E-10  6.27467E-10  6.16379E-10  4.46740E-10  2.41610E-10
 16.800  2.42289E-11  4.69903E-11  4.49271E-11  3.09165E-11  1.52503E-11  2.25499E-10  4.42692E-10  4.36951E-10  3.19124E-10  1.74727E-10
 16.900  1.76652E-11  3.43568E-11  3.30799E-11  2.30627E-11  1.16690E-11  1.58026E-10  3.10859E-10  3.08251E-10  2.26809E-10  1.25677E-10
 17.000  1.27976E-11  2.49570E-11  2.41917E-11  1.70759E-11  8.84565E-12  1.10229E-10  2.17259E-10  2.16405E-10  1.60386E-10  8.99115E-11
 17.100  9.21296E-12  1.80132E-11  1.75737E-11  1.25512E-11  6.64569E-12  7.65316E-11  1.51128E-10  1.51190E-10  1.12845E-10  6.39808E-11
 17.200  6.59128E-12  1.29195E-11  1.26825E-11  9.15977E-12  4.95010E-12  5.28892E-11  1.04632E-10  1.05118E-10  7.89979E-11  4.52866E-11
 17.300  4.68677E-12  9.20858E-12  9.09351E-12  6.63811E-12  3.65667E-12  3.63807E-11  7.21001E-11  7.27331E-11  5.50266E-11  3.18851E-11
 17.400  3.31242E-12  6.52335E-12  6.47873E-12  4.77776E-12  2.67962E-12  2.49088E-11  4.94496E-11  5.00831E-11  3.81381E-11  2.23313E-11
 17.500  2.32710E-12  4.59315E-12  4.58688E-12  3.41570E-12  1.94842E-12  1.69751E-11  3.37555E-11  3.43208E-11  2.63017E-11  1.55582E-11
 17.600  1.62523E-12  3.21474E-12  3.22740E-12  2.42584E-12  1.40607E-12  1.15146E-11  2.29342E-11  2.34064E-11  1.80488E-11  1.07829E-11
 17.700  1.12841E-12  2.23669E-12  2.25699E-12  1.71167E-12  1.00725E-12  7.77440E-12  1.55089E-11  1.58864E-11  1.23244E-11  7.43446E-12
 17.800  7.78946E-13  1.54711E-12  1.56886E-12  1.20004E-12  7.16381E-13  5.22472E-12  1.04385E-11  1.07309E-11  8.37405E-12  5.09933E-12
 17.900  5.34633E-13  1.06394E-12  1.08404E-12  8.36052E-13  5.05946E-13  3.49494E-12  6.99292E-12  7.21392E-12  5.66197E-12  3.47966E-12
 18.000  3.64871E-13  7.27478E-13  7.44634E-13  5.78859E-13  3.54880E-13  2.32701E-12  4.66276E-12  4.82649E-12  3.80949E-12  2.36227E-12
 18.100  2.47617E-13  4.94602E-13  5.08520E-13  3.98337E-13  2.47250E-13  1.54220E-12  3.09453E-12  3.21382E-12  2.55059E-12  1.59551E-12
 18.200  1.67110E-13  3.34386E-13  3.45277E-13  2.72459E-13  1.71129E-13  1.01734E-12  2.04416E-12  2.12984E-12  1.69939E-12  1.07215E-12
 18.300  1.12157E-13  2.24812E-13  2.33103E-13  1.85250E-13  1.17678E-13  6.68007E-13  1.34403E-12  1.40479E-12  1.12677E-12  7.16824E-13
 18.400  7.48643E-14  1.50311E-13  1.56484E-13  1.25215E-13  8.04079E-14  4.36601E-13  8.79581E-13  9.22185E-13  7.43473E-13  4.76841E-13
 18.500  4.97010E-14  9.99509E-14  1.04463E-13  8.41431E-14  5.45982E-14  2.84040E-13  5.72957E-13  6.02521E-13  4.88197E-13  3.15609E-13
 18.600  3.28185E-14  6.61034E-14  6.93502E-14  5.62183E-14  3.68447E-14  1.83937E-13  3.71492E-13  3.91812E-13  3.19028E-13  2.07849E-13
 18.700  2.15552E-14  4.34832E-14  4.57873E-14  3.73474E-14  2.47131E-14  1.18565E-13  2.39752E-13  2.53595E-13  2.07478E-13  1.36201E-13
 18.800  1.40827E-14  2.84512E-14  3.00660E-14  2.46713E-14  1.64768E-14  7.60749E-14  1.54014E-13  1.63366E-13  1.34286E-13  8.88079E-14
 18.900  9.15235E-15  1.85172E-14  1.96363E-14  1.62067E-14  1.09205E-14  4.85881E-14  9.84810E-14  1.04749E-13  8.64996E-14  5.76199E-14
 19.000  5.91714E-15  1.19885E-14  1.27560E-14  1.05875E-14  7.19573E-15  3.08905E-14  6.26813E-14  6.68508E-14  5.54529E-14  3.72007E-14
 19.100  3.80574E-15  7.72127E-15  8.24259E-15  6.87881E-15  4.71405E-15  1.95492E-14  3.97121E-14  4.24656E-14  3.53808E-14  2.38998E-14
 19.200  2.43517E-15  4.94719E-15  5.29810E-15  4.44499E-15  3.07066E-15  1.23153E-14  2.50443E-14  2.68502E-14  2.24673E-14  1.52796E-14
 19.300  1.55023E-15  3.15348E-15  3.38768E-15  2.85685E-15  1.98891E-15  7.72283E-15  1.57218E-14  1.68982E-14  1.41997E-14  9.72098E-15
 19.400  9.81871E-16  1.99986E-15  2.15490E-15  1.82634E-15  1.28106E-15  4.82089E-15  9.82435E-15  1.05857E-14  8.93224E-15  6.15457E-15
 19.500  6.18755E-16  1.26183E-15  1.36367E-15  1.16138E-15  8.20572E-16  2.99572E-15  6.11110E-15  6.60074E-15  5.59239E-15  3.87777E-15
 19.600  3.87973E-16  7.92149E-16  8.58544E-16  7.34657E-16  5.22737E-16  1.85311E-15  3.78402E-15  4.09697E-15  3.48496E-15  2.43148E-15
 19.700  2.42056E-16  4.94802E-16  5.37779E-16  4.62302E-16  3.31201E-16  1.14112E-15  2.33243E-15  2.53125E-15  2.16156E-15  1.51730E-15
 19.800  1.50270E-16  3.07530E-16  3.35156E-16  2.89411E-16  2.08718E-16  6.99512E-16  1.43116E-15  1.55673E-15  1.33447E-15  9.42306E-16
 19.900  9.28295E-17  1.90190E-16  2.07829E-16  1.80248E-16  1.30831E-16  4.26871E-16  8.74178E-16  9.53021E-16  8.20034E-16  5.82423E-16
  67 206 200   0.100
  0.000  4.65910E-02 -2.40495E-16 -3.74700E-16 -5.00371E-16 -9.15513E-16  9.49237E-02 -4.96507E-16 -6.66134E-16 -1.02576E-15 -2.86098E-16
  0.100  4.66164E-02 -2.10864E-05 -1.49486E-08 -2.35235E-12 -1.74520E-15  9.50173E-02 -2.31875E-05  1.74592E-08  2.00596E-12 -4.14842E-15
  0.200  4.66928E-02 -8.36098E-05 -2.37016E-07 -1.47906E-10  6.42647E-14  9.52927E-02 -9.04502E-05  2.77652E-07  1.30155E-10 -1.05584E-12
  0.300  4.68201E-02 -1.85374E-04 -1.18182E-06 -1.63518E-09  1.70169E-12  9.57346E-02 -1.95090E-04  1.39126E-06  1.51776E-09 -2.64886E-11
  0.400  4.69983E-02 -3.22759E-04 -3.65622E-06 -8.80681E-09  1.72445E-11  9.63182E-02 -3.26602E-04  4.33327E-06  8.78601E-09 -2.58221E-10
  0.500  4.72269E-02 -4.90786E-04 -8.68310E-06 -3.17861E-08  1.04499E-10  9.70113E-02 -4.71591E-04  1.03782E-05  3.46630E-08 -1.49155E-09
  0.600  4.75050E-02 -6.83209E-04 -1.74028E-05 -8.85673E-08  4.57593E-10  9.77762E-02 -6.14956E-04  2.10085E-05  1.07174E-07 -6.17258E-09
  0.700  4.78309E-02 -8.92659E-04 -3.09580E-05 -2.05312E-07  1.60071E-09  9.85722E-02 -7.41204E-04  3.77982E-05  2.79466E-07 -2.02513E-08
  0.800  4.82017E-02 -1.11081E-03 -5.03689E-05 -4.13693E-07  4.74719E-09  9.93578E-02 -8.35811E-04  6.22725E-05  6.41613E-07 -5.59587E-08
  0.900  4.86135E-02 -1.32861E-03 -7.64096E-05 -7.44472E-07  1.23983E-08  1.00094E-01 -8.86497E-04  9.57521E-05  1.33278E-06 -1.35416E-07
  1.000  4.90606E-02 -1.53656E-03 -1.09491E-04 -1.21703E-06  2.92591E-08  1.00745E-01 -8.84304E-04  1.39189E-04  2.55110E-06 -2.94753E-07
  1.100  4.95363E-02 -1.72501E-03 -1.49566E-04 -1.82530E-06  6.35353E-08  1.01284E-01 -8.24407E-04  1.93004E-04  4.55778E-06 -5.88201E-07
  1.200  5.00321E-02 -1.88452E-03 -1.96054E-04 -2.52118E-06  1.28644E-07  1.01689E-01 -7.06574E-04  2.56950E-04  7.67175E-06 -1.09147E-06
  1.300  5.05387E-02 -2.00623E-03 -2.47806E-04 -3.19746E-06  2.45308E-07  1.01947E-01 -5.35256E-04  3.29996E-04  1.22512E-05 -1.90375E-06
  1.400  5.10456E-02 -2.08227E-03 -3.03104E-04 -3.67239E-06  4.43941E-07  1.02057E-01 -3.19296E-04  4.10276E-04  1.86599E-05 -3.14761E-06
  1.500  5.15417E-02 -2.10610E-03 -3.59703E-04 -3.67868E-06  7.67106E-07  1.02025E-01 -7.13032E-05  4.95083E-04  2.72178E-05 -4.96658E-06
  1.600  5.20160E-02 -2.07291E-03 -4.14913E-04 -2.85938E-06  1.27177E-06  1.01864E-01  1.93285E-04  5.80949E-04  3.81378E-05 -7.52015E-06
  1.700  5.24576E-02 -1.97986E-03 -4.65718E-04 -7.72813E-07  2.03092E-06  1.01595E-01  4.57341E-04  6.63784E-04  5.14545E-05 -1.09765E-05
  1.800  5.28567E-02 -1.82635E-03 -5.08932E-04  3.09225E-06  3.13422E-06  1.01244E-01  7.03319E-04  7.39094E-04  6.69506E-05 -1.55037E-05
  1.900  5.32048E-02 -1.61415E-03 -5.41371E-04  9.29074E-06  4.68701E-06  1.00842E-01  9.14554E-04  8.02259E-04  8.40934E-05 -2.12597E-05
  2.000  5.34951E-02 -1.34743E-03 -5.60045E-04  1.83856E-05  6.80759E-06  1.00418E-01  1.07650E-03  8.48841E-04  1.01990E-04 -2.83821E-05
  2.100  5.37231E-02 -1.03272E-03 -5.62347E-04  3.09048E-05  9.62217E-06  1.00004E-01  1.17782E-03  8.74928E-04  1.19372E-04 -3.69793E-05
  2.200  5.38865E-02 -6.78694E-04 -5.46235E-04  4.72930E-05  1.32577E-05  9.96253E-02  1.21120E-03  8.77464E-04  1.34623E-04 -4.71214E-05
  2.300  5.39859E-02 -2.95898E-04 -5.10383E-04  6.78637E-05  1.78325E-05  9.93065E-02  1.17399E-03  8.54543E-04  1.45843E-04 -5.88341E-05
  2.400  5.40241E-02  1.03633E-04 -4.54309E-04  9.27541E-05  2.34454E-05  9.90650E-02  1.06836E-03  8.05648E-04  1.50973E-04 -7.20918E-05
  2.500  5.40066E-02  5.06850E-04 -3.78452E-04  1.21889E-04  3.01640E-05  9.89120E-02  9.01268E-04  7.31804E-04  1.47947E-04 -8.68129E-05
  2.600  5.39408E-02  9.00220E-04 -2.84201E-04  1.54954E-04  3.80127E-05  9.88520E-02  6.84029E-04  6.35635E-04  1.34884E-04 -1.02854E-04
  2.700  5.38362E-02  1.27029E-03 -1.73877E-04  1.91389E-04  4.69627E-05  9.88822E-02  4.31572E-04  5.21304E-04  1.10301E-04 -1.20003E-04
  2.800  5.37037E-02  1.60427E-03 -5.06629E-05  2.30391E-04  5.69229E-05  9.89935E-02  1.61484E-04  3.94344E-04  7.33215E-05 -1.37973E-04
  2.900  5.35551E-02  1.89060E-03  8.15182E-05  2.70936E-04  6.77359E-05  9.91711E-02 -1.07148E-04  2.61383E-04  2.38556E-05 -1.56393E-04
  3.000  5.34024E-02  2.11946E-03  2.18161E-04  3.11820E-04  7.91766E-05  9.93954E-02 -3.55012E-04  1.29779E-04 -3.72543E-05 -1.74795E-04
  3.100  5.32576E-02  2.28324E-03  3.54369E-04  3.51707E-04  9.09565E-05  9.96439E-02 -5.63849E-04  7.18245E-06 -1.08159E-04 -1.92611E-04
  3.200  5.31318E-02  2.37691E-03  4.85070E-04  3.89189E-04  1.02732E-04  9.98924E-02 -7.17680E-04 -9.89363E-05 -1.86008E-04 -2.09167E-04
  3.300  5.30350E-02  2.39827E-03  6.05239E-04  4.22849E-04  1.14119E-04  1.00116E-01 -8.03872E-04 -1.81772E-04 -2.67043E-04 -2.23681E-04
  3.400  5.29752E-02  2.34816E-03  7.10123E-04  4.51328E-04  1.24706E-04  1.00294E-01 -8.13982E-04 -2.35644E-04 -3.46781E-04 -2.35276E-04
  3.500  5.29581E-02  2.23045E-03  7.95458E-04  4.73381E-04  1.34075E-04  1.00404E-01 -7.44295E-04 -2.56396E-04 -4.20282E-04 -2.42999E-04
  3.600  5.29869E-02  2.05199E-03  8.57664E-04  4.87930E-04  1.41822E-04  1.00432E-01 -5.96039E-04 -2.41713E-04 -4.82484E-04 -2.45861E-04
  3.700  5.30618E-02  1.82241E-03  8.94012E-04  4.94109E-04  1.47571E-04  1.00366E-01 -3.75225E-04 -1.91325E-04 -5.28573E-04 -2.42888E-04
  3.800  5.31797E-02  1.55379E-03  9.02767E-04  4.91293E-04  1.50998E-04  1.00201E-01 -9.21339E-05 -1.07084E-04 -5.54375E-04 -2.33182E-04
  3.900  5.33346E-02  1.26029E-03  8.83285E-04  4.79116E-04  1.51836E-04  9.99356E-02  2.39518E-04  7.10245E-06 -5.56714E-04 -2.16004E-04
  4.000  5.35169E-02  9.57626E-04  8.36080E-04  4.57479E-04  1.49887E-04  9.95725E-02  6.03695E-04  1.45474E-04 -5.33731E-04 -1.90854E-04
  4.100  5.37141E-02  6.62525E-04  7.62840E-04  4.26554E-04  1.45030E-04  9.91190E-02  9.83341E-04  3.00750E-04 -4.85101E-04 -1.57558E-04
  4.200  5.39107E-02  3.92107E-04  6.66421E-04  3.86775E-04  1.37214E-04  9.85841E-02  1.36178E-03  4.64586E-04 -4.12154E-04 -1.16344E-04
  4.300  5.40889E-02  1.63241E-04  5.50775E-04  3.38828E-04  1.26460E-04  9.79778E-02  1.72409E-03  6.28106E-04 -3.17863E-04 -6.78972E-05
  4.400  5.42288E-02 -8.10276E-06  4.20864E-04  2.83641E-04  1.12852E-04  9.73094E-02  2.05839E-03  7.82512E-04 -2.06712E-04 -1.34024E-05
  4.500  5.43091E-02 -1.07492E-04  2.82515E-04  2.22378E-04  9.65320E-05  9.65864E-02  2.35682E-03  9.19698E-04 -8.44276E-05  4.54615E-05
  4.600  5.43077E-02 -1.22624E-04  1.42245E-04  1.56421E-04  7.76951E-05  9.58126E-02  2.61631E-03  1.03285E-03  4.23843E-05  1.06556E-04
  4.700  5.42027E-02 -4.38647E-05  7.05782E-06  8.73670E-05  5.65828E-05  9.49878E-02  2.83885E-03  1.11698E-03  1.66690E-04  1.67359E-04
  4.800  5.39729E-02  1.35312E-04 -1.15806E-04  1.70135E-05  3.34837E-05  9.41070E-02  3.03149E-03  1.16938E-03  2.81520E-04  2.25089E-04
  4.900  5.35988E-02  4.17979E-04 -2.19131E-04 -5.26586E-05  8.73534E-06  9.31601E-02  3.20572E-03  1.18988E-03  3.80477E-04  2.76847E-04
  5.000  5.30633E-02  8.03543E-04 -2.96011E-04 -1.19509E-04 -1.72706E-05  9.21324E-02  3.37670E-03  1.18104E-03  4.58200E-04  3.19801E-04
  5.100  5.23526E-02  1.28767E-03 -3.40146E-04 -1.81277E-04 -4.40808E-05  9.10054E-02  3.56197E-03  1.14804E-03  5.10776E-04  3.51375E-04
  5.200  5.14565E-02  1.86236E-03 -3.46130E-04 -2.35626E-04 -7.11730E-05  8.97578E-02  3.78006E-03  1.09848E-03  5.36031E-04  3.69434E-04
  5.300  5.03693E-02  2.51617E-03 -3.09726E-04 -2.80219E-04 -9.79500E-05  8.83670E-02  4.04894E-03  1.04195E-03  5.33716E-04  3.72459E-04
  5.400  4.90896E-02  3.23457E-03 -2.28104E-04 -3.12791E-04 -1.23738E-04  8.68106E-02  4.38450E-03  9.89480E-04  5.05539E-04  3.59686E-04
  5.500  4.76211E-02  4.00046E-03 -1.00039E-04 -3.31253E-04 -1.47791E-04  8.50683E-02  4.79916E-03  9.52797E-04  4.55061E-04  3.31202E-04
  5.600  4.59722E-02  4.79477E-03  7.39569E-05 -3.33791E-04 -1.69303E-04  8.31232E-02  5.30067E-03  9.43597E-04  3.87458E-04  2.87981E-04
  5.700  4.41559E-02  5.59715E-03  2.91573E-04 -3.18979E-04 -1.87434E-04  8.09634E-02  5.89135E-03  9.72728E-04  3.09170E-04  2.31868E-04
  5.800  4.21891E-02  6.38677E-03  5.48721E-04 -2.85882E-04 -2.01336E-04  7.85830E-02  6.56760E-03  1.04942E-03  2.27455E-04  1.65490E-04
  5.900  4.00926E-02  7.14304E-03  8.39638E-04 -2.34148E-04 -2.10197E-04  7.59827E-02  7.31991E-03  1.18061E-03  1.49899E-04  9.21232E-05
  6.000  3.78898E-02  7.84641E-03  1.15708E-03 -1.64082E-04 -2.13286E-04  7.31703E-02  8.13322E-03  1.37040E-03  8.38980E-05  1.55003E-05
  6.100  3.56064E-02  8.47905E-03  1.49258E-03 -7.66869E-05 -2.10005E-04  7.01603E-02  8.98773E-03  1.61968E-03  3.61681E-05 -6.04078E-05
  6.200  3.32693E-02  9.02553E-03  1.83680E-03  2.63295E-05 -1.99935E-04  6.69739E-02  9.85993E-03  1.92599E-03  1.23075E-05 -1.31633E-04
  6.300  3.09057E-02  9.47324E-03  2.17990E-03  1.42583E-04 -1.82885E-04  6.36375E-02  1.07239E-02  2.28353E-03  1.64441E-05 -1.94447E-04
  6.400  2.85425E-02  9.81284E-03  2.51196E-03  2.69085E-04 -1.58919E-04  6.01823E-02  1.15529E-02  2.68348E-03  5.09893E-05 -2.45589E-04
  6.500  2.62053E-02  1.00385E-02  2.82339E-03  4.02351E-04 -1.28386E-04  5.66423E-02  1.23204E-02  3.11441E-03  1.16514E-04 -2.82449E-04
  6.600  2.39178E-02  1.01478E-02  3.10533E-03  5.38542E-04 -9.19172E-05  5.30537E-02  1.30019E-02  3.56293E-03  2.11749E-04 -3.03212E-04
  6.700  2.17013E-02  1.01420E-02  3.35005E-03  6.73631E-04 -5.04188E-05  4.94528E-02  1.35759E-02  4.01441E-03  3.33706E-04 -3.06949E-04
  6.800  1.95742E-02  1.00255E-02  3.55118E-03  8.03581E-04 -5.03810E-06  4.58753E-02  1.40248E-02  4.45373E-03  4.77901E-04 -2.93640E-04
  6.900  1.75520E-02  9.80549E-03  3.70403E-03  9.24531E-04  4.28833E-05  4.23547E-02  1.43360E-02  4.86615E-03  6.38670E-04 -2.64146E-04
  7.000  1.56466E-02  9.49182E-03  3.80564E-03  1.03297E-03  9.18715E-05  3.89216E-02  1.45017E-02  5.23799E-03  8.09535E-04 -2.20121E-04
  7.100  1.38669E-02  9.09620E-03  3.85490E-03  1.12589E-03  1.40392E-04  3.56033E-02  1.45194E-02  5.55731E-03  9.83609E-04 -1.63884E-04
  7.200  1.22184E-02  8.63173E-03  3.85248E-03  1.20091E-03  1.86923E-04  3.24225E-02  1.43918E-02  5.81445E-03  1.15400E-03 -9.82484E-05
  7.300  1.07041E-02  8.11238E-03  3.80068E-03  1.25638E-03  2.30038E-04  2.93978E-02  1.41259E-02  6.00239E-03  1.31419E-03 -2.63417E-05
  7.400  9.32379E-03  7.55240E-03  3.70331E-03  1.29141E-03  2.68465E-04  2.65432E-02  1.37330E-02  6.11692E-03  1.45835E-03  4.85893E-05
  7.500  8.07538E-03  6.96580E-03  3.56535E-03  1.30587E-03  3.01156E-04  2.38686E-02  1.32272E-02  6.15671E-03  1.58163E-03  1.23362E-04
  7.600  6.95463E-03  6.36593E-03  3.39272E-03  1.30038E-03  3.27322E-04  2.13798E-02  1.26253E-02  6.12317E-03  1.68035E-03  1.95026E-04
  7.700  5.95577E-03  5.76509E-03  3.19193E-03  1.27623E-03  3.46468E-04  1.90787E-02  1.19455E-02  6.02019E-03  1.75205E-03  2.60997E-04
  7.800  5.07184E-03  5.17424E-03  2.96981E-03  1.23525E-03  3.58399E-04  1.69643E-02  1.12065E-02  5.85374E-03  1.79557E-03  3.19165E-04
  7.900  4.29501E-03  4.60278E-03  2.73316E-03  1.17973E-03  3.63208E-04  1.50327E-02  1.04271E-02  5.63148E-03  1.81098E-03  3.67952E-04
  8.000  3.61691E-03  4.05844E-03  2.48855E-03  1.11224E-03  3.61261E-04  1.32779E-02  9.62500E-03  5.36223E-03  1.79944E-03  4.06347E-04
  8.100  3.02893E-03  3.54729E-03  2.24204E-03  1.03553E-03  3.53147E-04  1.16919E-02  8.81679E-03  5.05551E-03  1.76307E-03  4.33889E-04
  8.200  2.52242E-03  3.07367E-03  1.99902E-03  9.52384E-04  3.39642E-04  1.02657E-02  8.01717E-03  4.72106E-03  1.70472E-03  4.50632E-04
  8.300  2.08891E-03  2.64041E-03  1.76410E-03  8.65478E-04  3.21646E-04  8.98920E-03  7.23882E-03  4.36840E-03  1.62775E-03  4.57080E-04
  8.400  1.72025E-03  2.24886E-03  1.54104E-03  7.77307E-04  3.00133E-04  7.85174E-03  6.49218E-03  4.00652E-03  1.53587E-03  4.54103E-04
  8.500  1.40875E-03  1.89916E-03  1.33272E-03  6.90089E-04  2.76098E-04  6.84249E-03  5.78546E-03  3.64357E-03  1.43283E-03  4.42847E-04
  8.600  1.14720E-03  1.59036E-03  1.14114E-03  6.05714E-04  2.50506E-04  5.95055E-03  5.12471E-03  3.28665E-03  1.32236E-03  4.24638E-04
  8.700  9.29002E-04  1.32068E-03  9.67527E-04  5.25708E-04  2.24251E-04  5.16526E-03  4.51391E-03  2.94173E-03  1.20790E-03  4.00896E-04
  8.800  7.48123E-04  1.08769E-03  8.12374E-04  4.51230E-04  1.98127E-04  4.47631E-03  3.95521E-03  2.61355E-03  1.09258E-03  3.73048E-04
  8.900  5.99139E-04  8.88509E-04  6.75565E-04  3.83075E-04  1.72806E-04  3.87385E-03  3.44917E-03  2.30569E-03  9.79077E-04  3.42463E-04
  9.000  4.77214E-04  7.19985E-04  5.56481E-04  3.21705E-04  1.48826E-04  3.34863E-03  2.99501E-03  2.02059E-03  8.69614E-04  3.10396E-04
  9.100  3.78078E-04  5.78832E-04  4.54117E-04  2.67288E-04  1.26586E-04  2.89198E-03  2.59089E-03  1.75969E-03  7.65912E-04  2.77949E-04
  9.200  2.97991E-04  4.61770E-04  3.67189E-04  2.19740E-04  1.06356E-04  2.49594E-03  2.23412E-03  1.52355E-03  6.69226E-04  2.46050E-04
  9.300  2.33712E-04  3.65626E-04  2.94239E-04  1.78779E-04  8.82831E-05  2.15320E-03  1.92147E-03  1.31198E-03  5.80373E-04  2.15439E-04
  9.400  1.82451E-04  2.87408E-04  2.33721E-04  1.43973E-04  7.24112E-05  1.85710E-03  1.64930E-03  1.12420E-03  4.99784E-04  1.86672E-04
  9.500  1.41832E-04  2.24362E-04  1.84077E-04  1.14787E-04  5.86975E-05  1.60169E-03  1.41382E-03  9.59007E-04  4.27563E-04  1.60135E-04
  9.600  1.09845E-04  1.74001E-04  1.43797E-04  9.06283E-05  4.70326E-05  1.38161E-03  1.21117E-03  8.14857E-04  3.63550E-04  1.36059E-04
  9.700  8.48081E-05  1.34122E-04  1.11460E-04  7.08808E-05  3.72588E-05  1.19211E-03  1.03761E-03  6.90023E-04  3.07382E-04  1.14541E-04
  9.800  6.53228E-05  1.02808E-04  8.57646E-05  5.49351E-05  2.91880E-05  1.02901E-03  8.89536E-04  5.82672E-04  2.58554E-04  9.55747E-05
  9.900  5.02388E-05  7.84157E-05  6.55490E-05  4.22110E-05  2.26171E-05  8.88647E-04  7.63615E-04  4.90951E-04  2.16469E-04  7.90683E-05
 10.000  3.86178E-05  5.95584E-05  4.97945E-05  3.21735E-05  1.73400E-05  7.67814E-04  6.56773E-04  4.13052E-04  1.80478E-04  6.48715E-05
 10.100  2.97016E-05  4.50825E-05  3.76268E-05  2.43423E-05  1.31579E-05  6.63742E-04  5.66244E-04  3.47250E-04  1.49921E-04  5.27946E-05
 10.200  2.28826E-05  3.40412E-05  2.83084E-05  1.82968E-05  9.88586E-06  5.74040E-04  4.89566E-04  2.91938E-04  1.24151E-04  4.26263E-05
 10.300  1.76792E-05  2.56676E-05  2.12276E-05  1.36764E-05  7.35729E-06  4.96654E-04  4.24581E-04  2.45646E-04  1.02554E-04  3.41480E-05
 10.400  1.37123E-05  1.93482E-05  1.58850E-05  1.01782E-05  5.42645E-06  4.29826E-04  3.69417E-04  2.07049E-04  8.45582E-05  2.71441E-05
 10.500  1.06869E-05  1.45977E-05  1.18788E-05  7.55263E-06  3.96884E-06  3.72052E-04  3.22467E-04  1.74966E-04  6.96468E-05  2.14101E-05
 10.600  8.37501E-06  1.10370E-05  8.89038E-06  5.59740E-06  2.88050E-06  3.22052E-04  2.82368E-04  1.48360E-04  5.73558E-05  1.67574E-05
 10.700  6.60214E-06  8.37235E-06  6.67018E-06  4.15137E-06  2.07642E-06  2.78736E-04  2.47973E-04  1.26329E-04  4.72762E-05  1.30159E-05
 10.800  5.23573E-06  6.37903E-06  5.02521E-06  3.08804E-06  1.48839E-06  2.41175E-04  2.18323E-04  1.08095E-04  3.90504E-05  1.00353E-05
 10.900  4.17582E-06  4.88625E-06  3.80791E-06  2.30958E-06  1.06264E-06  2.08578E-04  1.92626E-04  9.29912E-05  3.23688E-05  7.68460E-06
 11.000  3.34749E-06  3.76538E-06  2.90661E-06  1.74124E-06  7.57421E-07  1.80273E-04  1.70231E-04  8.04555E-05  2.69652E-05  5.85125E-06
 11.100  2.69484E-06  2.92028E-06  2.23762E-06  1.32665E-06  5.40799E-07  1.55682E-04  1.50606E-04  7.00143E-05  2.26122E-05  4.43931E-06
 11.200  2.17634E-06  2.27950E-06  1.73876E-06  1.02374E-06  3.88642E-07  1.34314E-04  1.33318E-04  6.12731E-05  1.91163E-05  3.36773E-06
 11.300  1.76112E-06  1.79025E-06  1.36419E-06  8.01425E-07  2.82906E-07  1.15744E-04  1.18016E-04  5.39064E-05  1.63142E-05  2.56849E-06
 11.400  1.42623E-06  1.41368E-06  1.08033E-06  6.36954E-07  2.10225E-07  9.96097E-05  1.04416E-04  4.76475E-05  1.40685E-05  1.98475E-06
 11.500  1.15453E-06  1.12129E-06  8.62755E-07  5.13807E-07  1.60770E-07  8.55969E-05  9.22898E-05  4.22807E-05  1.22649E-05  1.56932E-06
 11.600  9.33111E-07  8.92200E-07  6.93802E-07  4.20095E-07  1.27370E-07  7.34339E-05  8.14505E-05  3.76327E-05  1.08083E-05  1.28314E-06
 11.700  7.52154E-07  7.11148E-07  5.60752E-07  3.47333E-07  1.04831E-07  6.28851E-05  7.17467E-05  3.35663E-05  9.62127E-06  1.09416E-06
 11.800  6.04097E-07  5.66937E-07  4.54492E-07  2.89529E-07  8.94298E-08  5.37458E-05  6.30533E-05  2.99736E-05  8.64077E-06  9.76251E-07
 11.900  4.83021E-07  4.51333E-07  3.68514E-07  2.42497E-07  7.85378E-08  4.58374E-05  5.52664E-05  2.67712E-05  7.81666E-06  9.08348E-07
 12.000  3.84215E-07  3.58243E-07  2.98182E-07  2.03355E-07  7.03377E-08  3.90040E-05  4.82977E-05  2.38950E-05  7.10957E-06  8.73716E-07
 12.100  3.03873E-07  2.83111E-07  2.40182E-07  1.70149E-07  6.36169E-08  3.31092E-05  4.20713E-05  2.12966E-05  6.48931E-06  8.59310E-07
 12.200  2.38868E-07  2.22483E-07  1.92131E-07  1.41580E-07  5.76089E-08  2.80335E-05  3.65204E-05  1.89394E-05  5.93328E-06  8.55223E-07
 12.300  1.86601E-07  1.73694E-07  1.52288E-07  1.16794E-07  5.18724E-08  2.36720E-05  3.15854E-05  1.67958E-05  5.42515E-06  8.54194E-07
 12.400  1.44888E-07  1.34646E-07  1.19347E-07  9.52376E-08  4.61974E-08  1.99326E-05  2.72121E-05  1.48451E-05  4.95356E-06  8.51164E-07
 12.500  1.11885E-07  1.03646E-07  9.22924E-08  7.65425E-08  4.05301E-08  1.67344E-05  2.33504E-05  1.30711E-05  4.51109E-06  8.42882E-07
 12.600  8.60232E-08  7.92973E-08  7.02980E-08  6.04514E-08  3.49151E-08  1.40063E-05  1.99540E-05  1.14611E-05  4.09325E-06  8.27544E-07
 12.700  6.59714E-08  6.04294E-08  5.26620E-08  4.67623E-08  2.94503E-08  1.16855E-05  1.69794E-05  1.00045E-05  3.69768E-06  8.04468E-07
 12.800  5.06014E-08  4.60431E-08  3.87645E-08  3.52934E-08  2.42528E-08  9.71721E-06  1.43856E-05  8.69169E-06  3.32349E-06  7.73817E-07
 12.900  3.89614E-08  3.52808E-08  2.80443E-08  2.58632E-08  1.94351E-08  8.05302E-06  1.21345E-05  7.51405E-06  2.97069E-06  7.36345E-07
 13.000  3.02544E-08  2.74047E-08  1.99872E-08  1.82805E-08  1.50896E-08  6.65057E-06  1.01900E-05  6.46303E-06  2.63978E-06  6.93189E-07
 13.100  2.38194E-08  2.17830E-08  1.41216E-08  1.23421E-08  1.12804E-08  5.47273E-06  8.51845E-06  5.53021E-06  2.33140E-06  6.45697E-07
 13.200  1.91143E-08  1.78802E-08  1.00192E-08  7.83651E-09  8.03978E-09  4.48704E-06  7.08875E-06  4.70710E-06  2.04611E-06  5.95291E-07
 13.300  1.57012E-08  1.52487E-08  7.29686E-09  4.54898E-09  5.36997E-09  3.66517E-06  5.87201E-06  3.98517E-06  1.78426E-06  5.43357E-07
 13.400  1.32314E-08  1.35220E-08  5.61891E-09  2.26895E-09  3.24697E-09  2.98248E-06  4.84175E-06  3.35587E-06  1.54589E-06  4.91178E-07
 13.500  1.14332E-08  1.24070E-08  4.69833E-09  7.96600E-10  1.62634E-09  2.41760E-06  3.97384E-06  2.81073E-06  1.33071E-06  4.39873E-07
 13.600  1.00988E-08  1.16764E-08  4.29662E-09 -5.13401E-11  4.49439E-10  1.95204E-06  3.24643E-06  2.34147E-06  1.13808E-06  3.90380E-07
 13.700  9.07391E-09  1.11601E-08  4.22198E-09 -4.37345E-10 -3.50326E-10  1.56991E-06  2.63990E-06  1.94005E-06  9.67079E-07  3.43438E-07
 13.800  8.24734E-09  1.07370E-08  4.32596E-09 -5.00532E-10 -8.42045E-10  1.25753E-06  2.13675E-06  1.59881E-06  8.16520E-07  2.99592E-07
 13.900  7.54212E-09  1.03265E-08  4.49895E-09 -3.55731E-10 -1.09279E-09  1.00323E-06  1.72149E-06  1.31055E-06  6.85034E-07  2.59207E-07
 14.000  6.90772E-09  9.88024E-09  4.66495E-09 -9.39959E-11 -1.16428E-09  7.97101E-07  1.38052E-06  1.06853E-06  5.71116E-07  2.22486E-07
 14.100  6.31342E-09  9.37462E-09  4.77583E-09  2.15745E-10 -1.11066E-09  6.30722E-07  1.10197E-06  8.66594E-07  4.73188E-07  1.89494E-07
 14.200  5.74274E-09  8.80410E-09  4.80570E-09  5.24233E-10 -9.77323E-10  4.97009E-07  8.75561E-07  6.99115E-07  3.89646E-07  1.60183E-07
 14.300  5.18896E-09  8.17540E-09  4.74555E-09  7.98954E-10 -8.00625E-10  3.90014E-07  6.92466E-07  5.61049E-07  3.18906E-07  1.34414E-07
 14.400  4.65159E-09  7.50270E-09  4.59837E-09  1.02102E-09 -6.08240E-10  3.04773E-07  5.45140E-07  4.47906E-07  2.59445E-07  1.11985E-07
 14.500  4.13367E-09  6.80392E-09  4.37506E-09  1.18210E-09 -4.19989E-10  2.37162E-07  4.27187E-07  3.55729E-07  2.09819E-07  9.26471E-08
 14.600  3.63986E-09  6.09785E-09  4.09096E-09  1.28163E-09 -2.48951E-10  1.83771E-07  3.33221E-07  2.81069E-07  1.68690E-07  7.61246E-08
 14.700  3.17501E-09  5.40216E-09  3.76326E-09  1.32430E-09 -1.02698E-10  1.41796E-07  2.58735E-07  2.20943E-07  1.34838E-07  6.21297E-08
 14.800  2.74339E-09  4.73218E-09  3.40901E-09  1.31802E-09  1.54699E-11  1.08944E-07  1.99980E-07  1.72797E-07  1.07161E-07  5.03743E-08
 14.900  2.34815E-09  4.10016E-09  3.04380E-09  1.27227E-09  1.05375E-10  8.33457E-08  1.53862E-07  1.34460E-07  8.46820E-08  4.05794E-08
 15.000  1.99115E-09  3.51508E-09  2.68096E-09  1.19689E-09  1.68962E-10  6.34894E-08  1.17840E-07  1.04102E-07  6.65424E-08  3.24814E-08
 15.100  1.67296E-09  2.98270E-09  2.33122E-09  1.10122E-09  2.09457E-10  4.81561E-08  8.98399E-08  8.01959E-08  5.19974E-08  2.58369E-08
 15.200  1.39298E-09  2.50592E-09  2.00256E-09  9.93528E-10  2.30721E-10  3.63688E-08  6.81814E-08  6.14721E-08  4.04077E-08  2.04250E-08
 15.300  1.14964E-09  2.08518E-09  1.70044E-09  8.80787E-10  2.36754E-10  2.73481E-08  5.15090E-08  4.68864E-08  3.12296E-08  1.60486E-08
 15.400  9.40636E-10  1.71896E-09  1.42806E-09  7.68515E-10  2.31366E-10  2.04758E-08  3.87366E-08  3.55852E-08  2.40053E-08  1.25343E-08
 15.500  7.63139E-10  1.40429E-09  1.18673E-09  6.60844E-10  2.17960E-10  1.52640E-08  2.89990E-08  2.68753E-08  1.83529E-08  9.73149E-09
 15.600  6.14031E-10  1.13717E-09  9.76262E-10  5.60637E-10  1.99428E-10  1.13292E-08  2.16106E-08  2.01979E-08  1.39566E-08  7.51117E-09
 15.700  4.90072E-10  9.13013E-10  7.95352E-10  4.69674E-10  1.78109E-10  8.37210E-09  1.60315E-08  1.51056E-08  1.05570E-08  5.76383E-09
 15.800  3.88051E-10  7.26962E-10  6.41927E-10  3.88844E-10  1.55810E-10  6.15980E-09  1.18387E-08  1.12422E-08  7.94350E-09  4.39759E-09
 15.900  3.04894E-10  5.74142E-10  5.13432E-10  3.18351E-10  1.33853E-10  4.51224E-09  8.70280E-09  8.32635E-09  5.94567E-09  3.33612E-09
 16.000  2.37744E-10  4.49868E-10  4.07080E-10  2.57889E-10  1.13143E-10  3.29084E-09  6.36847E-09  6.13698E-09  4.42715E-09  2.51661E-09
 16.100  1.84007E-10  3.49775E-10  3.20029E-10  2.06811E-10  9.42444E-11  2.38949E-09  4.63909E-09  4.50148E-09  3.27938E-09  1.88780E-09
 16.200  1.41380E-10  2.69901E-10  2.49528E-10  1.64253E-10  7.74528E-11  1.72737E-09  3.36397E-09  3.28596E-09  2.41667E-09  1.40826E-09
 16.300  1.07852E-10  2.06729E-10  1.93003E-10  1.29247E-10  6.28641E-11  1.24320E-09  2.42824E-09  2.38715E-09  1.77179E-09  1.04475E-09
 16.400  8.16974E-11  1.57197E-10  1.48120E-10  1.00796E-10  5.04323E-11  8.90775E-10  1.74482E-09  1.72588E-09  1.29237E-09  7.70841E-10
 16.500  6.14587E-11  1.18684E-10  1.12810E-10  7.79323E-11  4.00179E-11  6.35426E-10  1.24804E-09  1.24183E-09  9.37884E-10  5.65659E-10
 16.600  4.59201E-11  8.89826E-11  8.52800E-11  5.97529E-11  3.14264E-11  4.51260E-10  8.88640E-10  8.89276E-10  6.77189E-10  4.12855E-10
 16.700  3.40811E-11  6.62575E-11  6.39997E-11  4.54441E-11  2.44369E-11  3.19044E-10  6.29853E-10  6.33777E-10  4.86494E-10  2.99715E-10
 16.800  2.51282E-11  4.90041E-11  4.76878E-11  3.42903E-11  1.88236E-11  2.24561E-10  4.44394E-10  4.49538E-10  3.47745E-10  2.16421E-10
 16.900  1.84071E-11  3.60036E-11  3.52853E-11  2.56762E-11  1.43691E-11  1.57352E-10  3.12114E-10  3.17343E-10  2.47326E-10  1.55449E-10
 17.000  1.33977E-11  2.62796E-11  2.59296E-11  1.90826E-11  1.08736E-11  1.09765E-10  2.18209E-10  2.22960E-10  1.75028E-10  1.11066E-10
 17.100  9.69014E-12  1.90587E-11  1.89264E-11  1.40788E-11  8.15955E-12  7.62265E-11  1.51861E-10  1.55907E-10  1.23250E-10  7.89400E-11
 17.200  6.96503E-12  1.37344E-11  1.37232E-11  1.03130E-11  6.07330E-12  5.26982E-11  1.05204E-10  1.08504E-10  8.63596E-11  5.58140E-11
 17.300  4.97558E-12  9.83575E-12  9.88572E-12  7.50175E-12  4.48492E-12  3.62687E-11  7.25492E-11  7.51568E-11  6.02128E-11  3.92584E-11
 17.400  3.53285E-12  7.00037E-12  7.07570E-12  5.41946E-12  3.28663E-12  2.48492E-11  4.98019E-11  5.18132E-11  4.17760E-11  2.74710E-11
 17.500  2.49343E-12  4.95204E-12  5.03246E-12  3.88884E-12  2.39056E-12  1.69487E-11  3.40308E-11  3.55520E-11  2.88424E-11  1.91241E-11
 17.600  1.74941E-12  3.48202E-12  3.55696E-12  2.77210E-12  1.72616E-12  1.15080E-11  2.31479E-11  2.42796E-11  1.98157E-11  1.32454E-11
 17.700  1.22021E-12  2.43383E-12  2.49864E-12  1.96322E-12  1.23756E-12  7.77867E-12  1.56734E-11  1.65035E-11  1.35477E-11  9.12703E-12
 17.800  8.46167E-13  1.69119E-12  1.74457E-12  1.38148E-12  8.81098E-13  5.23419E-12  1.05641E-11  1.11652E-11  9.21741E-12  6.25734E-12
 17.900  5.83418E-13  1.16833E-12  1.21078E-12  9.66006E-13  6.23037E-13  3.50616E-12  7.08781E-12  7.51839E-12  6.24084E-12  4.26828E-12
 18.000  3.99974E-13  8.02485E-13  8.35349E-13  6.71297E-13  4.37616E-13  2.33805E-12  4.73378E-12  5.03903E-12  4.20509E-12  2.89687E-12
 18.100  2.72668E-13  5.48063E-13  5.72960E-13  4.63645E-13  3.05362E-13  1.55207E-12  3.14717E-12  3.36154E-12  2.81975E-12  1.95626E-12
 18.200  1.84847E-13  3.72196E-13  3.90717E-13  3.18294E-13  2.11704E-13  1.02567E-12  2.08281E-12  2.23204E-12  1.88172E-12  1.31448E-12
 18.300  1.24620E-13  2.51352E-13  2.64917E-13  2.17209E-13  1.45841E-13  6.74751E-13  1.37213E-12  1.47516E-12  1.24973E-12  8.78864E-13
 18.400  8.35559E-14  1.68806E-13  1.78605E-13  1.47355E-13  9.98411E-14  4.41893E-13  8.99836E-13  9.70413E-13  8.26031E-13  5.84704E-13
 18.500  5.57193E-14  1.12747E-13  1.19739E-13  9.93842E-14  6.79297E-14  2.88091E-13  5.87424E-13  6.35412E-13  5.43380E-13  3.87084E-13
 18.600  3.69565E-14  7.48963E-14  7.98287E-14  6.66449E-14  4.59376E-14  1.86975E-13  3.81735E-13  4.14133E-13  3.55748E-13  2.54999E-13
 18.700  2.43810E-14  4.94845E-14  5.29284E-14  4.44364E-14  3.08795E-14  1.20803E-13  2.46944E-13  2.68666E-13  2.31803E-13  1.67164E-13
 18.800  1.59995E-14  3.25200E-14  3.49016E-14  2.94618E-14  2.06348E-14  7.76988E-14  1.59023E-13  1.73491E-13  1.50328E-13  1.09051E-13
 18.900  1.04441E-14  2.12581E-14  2.28902E-14  1.94247E-14  1.37084E-14  4.97502E-14  1.01942E-13  1.11516E-13  9.70302E-14  7.07946E-14
 19.000  6.78206E-15  1.38232E-14  1.49320E-14  1.27363E-14  9.05448E-15  3.17118E-14  6.50538E-14  7.13506E-14  6.23345E-14  4.57368E-14
 19.100  4.38124E-15  8.94163E-15  9.68891E-15  8.30527E-15  5.94643E-15  2.01230E-14  4.13264E-14  4.54423E-14  3.98575E-14  2.94059E-14
 19.200  2.81572E-15  5.75398E-15  6.25366E-15  5.38646E-15  3.88323E-15  1.27120E-14  2.61347E-14  2.88091E-14  2.53662E-14  1.88153E-14
 19.300  1.80035E-15  3.68364E-15  4.01527E-15  3.47468E-15  2.52173E-15  7.99442E-15  1.64531E-14  1.81807E-14  1.60683E-14  1.19813E-14
 19.400  1.14528E-15  2.34617E-15  2.56468E-15  2.22949E-15  1.62854E-15  5.00509E-15  1.03114E-14  1.14210E-14  1.01312E-14  7.59316E-15
 19.500  7.24884E-16  1.48672E-15  1.62969E-15  1.42297E-15  1.04596E-15  3.11955E-15  6.43322E-15  7.14192E-15  6.35817E-15  4.78929E-15
 19.600  4.56500E-16  9.37348E-16  1.03026E-15  9.03447E-16  6.68142E-16  1.93566E-15  3.99565E-15  4.44579E-15  3.97181E-15  3.00647E-15
 19.700  2.86049E-16  5.88014E-16  6.47998E-16  5.70616E-16  4.24505E-16  1.19571E-15  2.47056E-15  2.75491E-15  2.46965E-15  1.87839E-15
 19.800  1.78354E-16  3.67031E-16  4.05507E-16  3.58539E-16  2.68273E-16  7.35336E-16  1.52074E-15  1.69940E-15  1.52855E-15  1.16806E-15
 19.900  1.10656E-16  2.27960E-16  2.52485E-16  2.24128E-16  1.68644E-16  4.50204E-16  9.31905E-16  1.04356E-15  9.41723E-16  7.22944E-16
  67 207 200   0.100
  0.000  4.66221E-02 -2.63769E-16 -2.91434E-16 -7.50556E-16  7.22397E-16  9.58130E-02 -4.96507E-16 -8.32667E-16 -5.50408E-16 -2.20295E-15
  0.100  4.66471E-02 -2.13372E-05 -1.56153E-08 -3.14302E-12 -1.66652E-15  9.58950E-02 -2.63144E-05  1.62365E-08  3.53747E-12 -8.92626E-15
  0.200  4.67222E-02 -8.46162E-05 -2.47676E-07 -1.98271E-10  1.63576E-14  9.61360E-02 -1.02765E-04  2.58459E-07  2.27774E-10 -9.57513E-13
  0.300  4.68472E-02 -1.87649E-04 -1.23572E-06 -2.20440E-09  4.77612E-13  9.65223E-02 -2.22092E-04  1.29717E-06  2.61931E-09 -2.37090E-11
  0.400  4.70220E-02 -3.26827E-04 -3.82623E-06 -1.19700E-08  5.20265E-12  9.70319E-02 -3.72883E-04  4.04921E-06  1.48945E-08 -2.30828E-10
  0.500  4.72459E-02 -4.97179E-04 -9.09689E-06 -4.36816E-08  3.42127E-11  9.76359E-02 -5.40562E-04  9.72507E-06  5.75728E-08 -1.32983E-09
  0.600  4.75178E-02 -6.92462E-04 -1.82571E-05 -1.23467E-07  1.63068E-10  9.83008E-02 -7.08623E-04  1.97527E-05  1.74166E-07 -5.48589E-09
  0.700  4.78356E-02 -9.05292E-04 -3.25307E-05 -2.91485E-07  6.20349E-10  9.89902E-02 -8.60045E-04  3.56767E-05  4.44235E-07 -1.79304E-08
  0.800  4.81965E-02 -1.12731E-03 -5.30297E-05 -6.01049E-07  1.99387E-09  9.96677E-02 -9.78736E-04  5.90347E-05  9.98235E-07 -4.93269E-08
  0.900  4.85962E-02 -1.34942E-03 -8.06249E-05 -1.11375E-06  5.61558E-09  1.00298E-01 -1.05090E-03  9.12134E-05  2.03207E-06 -1.18764E-07
  1.000  4.90293E-02 -1.56201E-03 -1.15827E-04 -1.89005E-06  1.42089E-08  1.00851E-01 -1.06619E-03  1.33293E-04  3.81826E-06 -2.57028E-07
  1.100  4.94889E-02 -1.75534E-03 -1.58680E-04 -2.97564E-06  3.28837E-08  1.01302E-01 -1.01865E-03  1.85890E-04  6.70983E-06 -5.09634E-07
  1.200  4.99671E-02 -1.91980E-03 -2.08687E-04 -4.38435E-06  7.05443E-08  1.01633E-01 -9.07150E-04  2.49009E-04  1.11328E-05 -9.38981E-07
  1.300  5.04545E-02 -2.04639E-03 -2.64761E-04 -6.07953E-06  1.41733E-07  1.01833E-01 -7.35612E-04  3.21927E-04  1.75636E-05 -1.62503E-06
  1.400  5.09411E-02 -2.12702E-03 -3.25220E-04 -7.95597E-06  2.68863E-07  1.01902E-01 -5.12698E-04  4.03109E-04  2.64892E-05 -2.66405E-06
  1.500  5.14165E-02 -2.15497E-03 -3.87819E-04 -9.82520E-06  4.84693E-07  1.01845E-01 -2.51197E-04  4.90194E-04  3.83488E-05 -4.16524E-06
  1.600  5.18701E-02 -2.12519E-03 -4.49827E-04 -1.14065E-05  8.34805E-07  1.01675E-01  3.29154E-05  5.80029E-04  5.34614E-05 -6.24536E-06
  1.700  5.22917E-02 -2.03466E-03 -5.08144E-04 -1.23264E-05  1.37974E-06  1.01413E-01  3.21659E-04  6.68793E-04  7.19425E-05 -9.02196E-06
  1.800  5.26721E-02 -1.88261E-03 -5.59447E-04 -1.21273E-05  2.19632E-06  1.01082E-01  5.96368E-04  7.52170E-04  9.36196E-05 -1.26059E-05
  1.900  5.30033E-02 -1.67064E-03 -6.00371E-04 -1.02878E-05  3.37780E-06  1.00708E-01  8.39060E-04  8.25602E-04  1.17956E-04 -1.70942E-05
  2.000  5.32792E-02 -1.40284E-03 -6.27698E-04 -6.25163E-06  5.03225E-06  1.00321E-01  1.03374E-03  8.84581E-04  1.43999E-04 -2.25640E-05
  2.100  5.34956E-02 -1.08567E-03 -6.38555E-04  5.33950E-07  7.27894E-06  9.99452E-02  1.16758E-03  9.24964E-04  1.70352E-04 -2.90688E-05
  2.200  5.36506E-02 -7.27812E-04 -6.30602E-04  1.05742E-05  1.02425E-05  9.96066E-02  1.23181E-03  9.43305E-04  1.95201E-04 -3.66366E-05
  2.300  5.37449E-02 -3.39873E-04 -6.02200E-04  2.42811E-05  1.40449E-05  9.93251E-02  1.22243E-03  9.37152E-04  2.16381E-04 -4.52704E-05
  2.400  5.37815E-02  6.59911E-05 -5.52549E-04  4.19283E-05  1.87957E-05  9.91161E-02  1.14045E-03  9.05303E-04  2.31495E-04 -5.49499E-05
  2.500  5.37655E-02  4.76554E-04 -4.81778E-04  6.36134E-05  2.45808E-05  9.89888E-02  9.91913E-04  8.47990E-04  2.38084E-04 -6.56340E-05
  2.600  5.37043E-02  8.78057E-04 -3.90999E-04  8.92282E-05  3.14510E-05  9.89465E-02  7.87490E-04  7.66973E-04  2.33833E-04 -7.72610E-05
  2.700  5.36069E-02  1.25678E-03 -2.82298E-04  1.18442E-04  3.94111E-05  9.89859E-02  5.41783E-04  6.65530E-04  2.16795E-04 -8.97468E-05
  2.800  5.34836E-02  1.59965E-03 -1.58682E-04  1.50701E-04  4.84109E-05  9.90978E-02  2.72378E-04  5.48348E-04  1.85628E-04 -1.02979E-04
  2.900  5.33456E-02  1.89479E-03 -2.39691E-05  1.85237E-04  5.83389E-05  9.92681E-02 -1.33388E-06  4.21297E-04  1.39800E-04 -1.16805E-04
  3.000  5.32043E-02  2.13207E-03  1.17355E-04  2.21099E-04  6.90194E-05  9.94785E-02 -2.59436E-04  2.91129E-04  7.97599E-05 -1.31019E-04
  3.100  5.30710E-02  2.30360E-03  2.60325E-04  2.57189E-04  8.02145E-05  9.97080E-02 -4.82821E-04  1.65084E-04  7.04062E-06 -1.45341E-04
  3.200  5.29560E-02  2.40409E-03  3.99708E-04  2.92311E-04  9.16304E-05  9.99344E-02 -6.54456E-04  5.04606E-05 -7.57202E-05 -1.59398E-04
  3.300  5.28686E-02  2.43115E-03  5.30225E-04  3.25224E-04  1.02927E-04  1.00135E-01 -7.60518E-04 -4.58477E-05 -1.64851E-04 -1.72708E-04
  3.400  5.28162E-02  2.38545E-03  6.46784E-04  3.54697E-04  1.13734E-04  1.00290E-01 -7.91299E-04 -1.17800E-04 -2.55815E-04 -1.84669E-04
  3.500  5.28041E-02  2.27079E-03  7.44704E-04  3.79560E-04  1.23663E-04  1.00381E-01 -7.41814E-04 -1.60621E-04 -3.43464E-04 -1.94560E-04
  3.600  5.28349E-02  2.09400E-03  8.19923E-04  3.98753E-04  1.32330E-04  1.00393E-01 -6.12080E-04 -1.71150E-04 -4.22371E-04 -2.01557E-04
  3.700  5.29086E-02  1.86479E-03  8.69186E-04  4.11362E-04  1.39372E-04  1.00317E-01 -4.07016E-04 -1.48087E-04 -4.87211E-04 -2.04760E-04
  3.800  5.30221E-02  1.59539E-03  8.90201E-04  4.16651E-04  1.44459E-04  1.00147E-01 -1.35982E-04 -9.21371E-05 -5.33161E-04 -2.03247E-04
  3.900  5.31692E-02  1.30019E-03  8.81761E-04  4.14081E-04  1.47309E-04  9.98834E-02  1.88020E-04 -6.01562E-06 -5.56296E-04 -1.96143E-04
  4.000  5.33407E-02  9.95196E-04  8.43832E-04  4.03323E-04  1.47699E-04  9.95279E-02  5.49440E-04  1.05672E-04 -5.53925E-04 -1.82695E-04
  4.100  5.35243E-02  6.97484E-04  7.77595E-04  3.84264E-04  1.45466E-04  9.90871E-02  9.31467E-04  2.36688E-04 -5.24868E-04 -1.62364E-04
  4.200  5.37053E-02  4.24568E-04  6.85454E-04  3.57007E-04  1.40511E-04  9.85690E-02  1.31744E-03  3.79539E-04 -4.69610E-04 -1.34912E-04
  4.300  5.38663E-02  1.93736E-04  5.70996E-04  3.21874E-04  1.32792E-04  9.79824E-02  1.69223E-03  5.25959E-04 -3.90345E-04 -1.00487E-04
  4.400  5.39882E-02  2.13853E-05  4.38909E-04  2.79403E-04  1.22326E-04  9.73352E-02  2.04357E-03  6.67464E-04 -2.90890E-04 -5.96757E-05
  4.500  5.40504E-02 -7.76329E-05  2.94864E-04  2.30353E-04  1.09176E-04  9.66333E-02  2.36309E-03  7.95950E-04 -1.76466E-04 -1.35462E-05
  4.600  5.40319E-02 -9.06293E-05  1.45347E-04  1.75703E-04  9.34511E-05  9.58794E-02  2.64710E-03  9.04301E-04 -5.33656E-05  3.63581E-05
  4.700  5.39115E-02 -7.62705E-06 -2.54492E-06  1.16661E-04  7.53018E-05  9.50723E-02  2.89695E-03  9.86943E-04  7.14604E-05  8.80573E-05
  4.800  5.36689E-02  1.78174E-04 -1.41342E-04  5.46597E-05  5.49200E-05  9.42061E-02  3.11901E-03  1.04034E-03  1.90888E-04  1.39217E-04
  4.900  5.32854E-02  4.70045E-04 -2.63474E-04 -8.64317E-06  3.25428E-05  9.32705E-02  3.32421E-03  1.06333E-03  2.98120E-04  1.87266E-04
  5.000  5.27445E-02  8.67500E-04 -3.61563E-04 -7.13778E-05  8.45971E-06  9.22507E-02  3.52715E-03  1.05740E-03  3.87169E-04  2.29555E-04
  5.100  5.20331E-02  1.36621E-03 -4.28735E-04 -1.31487E-04 -1.69775E-05  9.11286E-02  3.74497E-03  1.02663E-03  4.53293E-04  2.63520E-04
  5.200  5.11412E-02  1.95809E-03 -4.58928E-04 -1.86768E-04 -4.33448E-05  8.98835E-02  3.99590E-03  9.77631E-04  4.93338E-04  2.86875E-04
  5.300  5.00634E-02  2.63148E-03 -4.47187E-04 -2.34928E-04 -7.01358E-05  8.84939E-02  4.29771E-03  9.19147E-04  5.05969E-04  2.97781E-04
  5.400  4.87985E-02  3.37156E-03 -3.89938E-04 -2.73666E-04 -9.67567E-05  8.69386E-02  4.66621E-03  8.61575E-04  4.91772E-04  2.95004E-04
  5.500  4.73499E-02  4.16084E-03 -2.85206E-04 -3.00761E-04 -1.22526E-04  8.51984E-02  5.11378E-03  8.16305E-04  4.53213E-04  2.78038E-04
  5.600  4.57256E-02  4.97979E-03 -1.32780E-04 -3.14184E-04 -1.46681E-04  8.32576E-02  5.64823E-03  7.94974E-04  3.94470E-04  2.47171E-04
  5.700  4.39381E-02  5.80753E-03  6.56912E-05 -3.12212E-04 -1.68401E-04  8.11054E-02  6.27192E-03  8.08667E-04  3.21136E-04  2.03511E-04
  5.800  4.20038E-02  6.62265E-03  3.06699E-04 -2.93539E-04 -1.86828E-04  7.87366E-02  6.98125E-03  8.67130E-04  2.39835E-04  1.48942E-04
  5.900  3.99424E-02  7.40396E-03  5.84954E-04 -2.57387E-04 -2.01108E-04  7.61526E-02  7.76669E-03  9.78049E-04  1.57760E-04  8.60304E-05
  6.000  3.77767E-02  8.13129E-03  8.93556E-04 -2.03590E-04 -2.10437E-04  7.33612E-02  8.61307E-03  1.14645E-03  8.21841E-05  1.78784E-05
  6.100  3.55312E-02  8.78623E-03  1.22425E-03 -1.32659E-04 -2.14106E-04  7.03770E-02  9.50035E-03  1.37425E-03  1.99761E-05 -5.20619E-05
  6.200  3.32320E-02  9.35278E-03  1.56776E-03 -4.58046E-05 -2.11557E-04  6.72206E-02  1.04047E-02  1.66004E-03 -2.28524E-05 -1.20199E-04
  6.300  3.09053E-02  9.81785E-03  1.91416E-03  5.50659E-05 -2.02429E-04  6.39176E-02  1.12998E-02  1.99907E-03 -4.15258E-05 -1.83022E-04
  6.400  2.85770E-02  1.01717E-02  2.25331E-03  1.67406E-04 -1.86596E-04  6.04981E-02  1.21582E-02  2.38343E-03 -3.27917E-05 -2.37316E-04
  6.500  2.62721E-02  1.04081E-02  2.57528E-03  2.88118E-04 -1.64200E-04  5.69951E-02  1.29530E-02  2.80245E-03  4.90208E-06 -2.80352E-04
  6.600  2.40135E-02  1.05244E-02  2.87079E-03  4.13680E-04 -1.35660E-04  5.34432E-02  1.36589E-02  3.24330E-03  7.13497E-05 -3.10042E-04
  6.700  2.18221E-02  1.05218E-02  3.13155E-03  5.40301E-04 -1.01669E-04  4.98775E-02  1.42537E-02  3.69168E-03  1.64647E-04 -3.25048E-04
  6.800  1.97159E-02  1.04046E-02  3.35066E-03  6.64097E-04 -6.31753E-05  4.63324E-02  1.47194E-02  4.13258E-03  2.81357E-04 -3.24838E-04
  6.900  1.77101E-02  1.01801E-02  3.52280E-03  7.81265E-04 -2.13406E-05  4.28402E-02  1.50426E-02  4.55112E-03  4.16773E-04 -3.09688E-04
  7.000  1.58167E-02  9.85836E-03  3.64443E-03  8.88269E-04  2.25126E-05  3.94306E-02  1.52152E-02  4.93331E-03  5.65240E-04 -2.80630E-04
  7.100  1.40446E-02  9.45132E-03  3.71386E-03  9.81998E-04  6.69660E-05  3.61300E-02  1.52344E-02  5.26672E-03  7.20525E-04 -2.39358E-04
  7.200  1.23997E-02  8.97245E-03  3.73124E-03  1.05990E-03  1.10578E-04  3.29608E-02  1.51026E-02  5.54107E-03  8.76202E-04 -1.88096E-04
  7.300  1.08852E-02  8.43614E-03  3.69844E-03  1.12008E-03  1.51954E-04  2.99413E-02  1.48269E-02  5.74861E-03  1.02602E-03 -1.29439E-04
  7.400  9.50135E-03  7.85709E-03  3.61885E-03  1.16139E-03  1.89821E-04  2.70856E-02  1.44187E-02  5.88443E-03  1.16424E-03 -6.61841E-05
  7.500  8.24656E-03  7.24979E-03  3.49719E-03  1.18339E-03  2.23084E-04  2.44038E-02  1.38926E-02  5.94644E-03  1.28592E-03 -1.16410E-06
  7.600  7.11712E-03  6.62811E-03  3.33916E-03  1.18640E-03  2.50877E-04  2.19021E-02  1.32657E-02  5.93538E-03  1.38710E-03  6.29117E-05
  7.700  6.10778E-03  6.00480E-03  3.15116E-03  1.17139E-03  2.72593E-04  1.95832E-02  1.25568E-02  5.85450E-03  1.46496E-03  1.23593E-04
  7.800  5.21210E-03  5.39130E-03  2.93999E-03  1.13990E-03  2.87905E-04  1.74468E-02  1.17854E-02  5.70926E-03  1.51788E-03  1.78794E-04
  7.900  4.42274E-03  4.79744E-03  2.71249E-03  1.09395E-03  2.96760E-04  1.54897E-02  1.09709E-02  5.50690E-03  1.54537E-03  2.26872E-04
  8.000  3.73176E-03  4.23133E-03  2.47530E-03  1.03590E-03  2.99366E-04  1.37067E-02  1.01319E-02  5.25594E-03  1.54804E-03  2.66664E-04
  8.100  3.13094E-03  3.69934E-03  2.23463E-03  9.68278E-04  2.96158E-04  1.20909E-02  9.28566E-03  4.96570E-03  1.52745E-03  2.97495E-04
  8.200  2.61195E-03  3.20609E-03  1.99604E-03  8.93724E-04  2.87758E-04  1.06339E-02  8.44764E-03  4.64582E-03  1.48590E-03  3.19160E-04
  8.300  2.16658E-03  2.75459E-03  1.76433E-03  8.14804E-04  2.74930E-04  9.32628E-03  7.63117E-03  4.30581E-03  1.42627E-03  3.31872E-04
  8.400  1.78686E-03  2.34634E-03  1.54345E-03  7.33936E-04  2.58524E-04  8.15811E-03  6.84731E-03  3.95473E-03  1.35181E-03  3.36199E-04
  8.500  1.46523E-03  1.98154E-03  1.33647E-03  6.53297E-04  2.39429E-04  7.11902E-03  6.10477E-03  3.60085E-03  1.26593E-03  3.32991E-04
  8.600  1.19456E-03  1.65928E-03  1.14558E-03  5.74767E-04  2.18524E-04  6.19857E-03  5.40999E-03  3.25142E-03  1.17201E-03  3.23292E-04
  8.700  9.68282E-04  1.37775E-03  9.72159E-04  4.99890E-04  1.96641E-04  5.38640E-03  4.76727E-03  2.91260E-03  1.07330E-03  3.08267E-04
  8.800  7.80347E-04  1.13446E-03  8.16856E-04  4.29855E-04  1.74530E-04  4.67242E-03  4.17899E-03  2.58931E-03  9.72745E-04  2.89120E-04
  8.900  6.25290E-04  9.26453E-04  6.79670E-04  3.65507E-04  1.52836E-04  4.04692E-03  3.64583E-03  2.28533E-03  8.72913E-04  2.67034E-04
  9.000  4.98212E-04  7.50443E-04  5.60080E-04  3.07365E-04  1.32087E-04  3.50071E-03  3.16705E-03  2.00328E-03  7.75964E-04  2.43113E-04
  9.100  3.94759E-04  6.03026E-04  4.57153E-04  2.55657E-04  1.12688E-04  3.02512E-03  2.74078E-03  1.74477E-03  6.83609E-04  2.18349E-04
  9.200  3.11106E-04  4.80788E-04  3.69663E-04  2.10364E-04  9.49222E-05  2.61212E-03  2.36427E-03  1.51048E-03  5.97122E-04  1.93589E-04
  9.300  2.43917E-04  3.80420E-04  2.96186E-04  1.71263E-04  7.89615E-05  2.25430E-03  2.03416E-03  1.30036E-03  5.17365E-04  1.69528E-04
  9.400  1.90312E-04  2.98798E-04  2.35200E-04  1.37979E-04  6.48785E-05  1.94490E-03  1.74666E-03  1.11374E-03  4.44833E-04  1.46701E-04
  9.500  1.47828E-04  2.33041E-04  1.85158E-04  1.10032E-04  5.26627E-05  1.67781E-03  1.49781E-03  9.49479E-04  3.79708E-04  1.25493E-04
  9.600  1.14375E-04  1.80549E-04  1.44552E-04  8.68744E-05  4.22383E-05  1.44754E-03  1.28356E-03  8.06110E-04  3.21911E-04  1.06153E-04
  9.700  8.81991E-05  1.39015E-04  1.11959E-04  6.79312E-05  3.34811E-05  1.24919E-03  1.09999E-03  6.81948E-04  2.71166E-04  8.88089E-05
  9.800  6.78395E-05  1.06431E-04  8.60686E-05  5.26283E-05  2.62352E-05  1.07842E-03  9.43310E-04  5.75197E-04  2.27053E-04  7.34919E-05
  9.900  5.20919E-05  8.10763E-05  6.57106E-05  4.04155E-05  2.03270E-05  9.31419E-04  8.10011E-04  4.84028E-04  1.89053E-04  6.01547E-05
 10.000  3.99729E-05  6.14981E-05  4.98567E-05  3.07827E-05  1.55775E-05  8.04871E-04  6.96861E-04  4.06647E-04  1.56596E-04  4.86929E-05
 10.100  3.06867E-05  4.64884E-05  3.76232E-05  2.32703E-05  1.18116E-05  6.95878E-04  6.00944E-04  3.41340E-04  1.29093E-04  3.89636E-05
 10.200  2.35960E-05  3.50561E-05  2.82644E-05  1.74745E-05  8.86509E-06  6.01943E-04  5.19668E-04  2.86505E-04  1.05959E-04  3.08009E-05
 10.300  1.81946E-05  2.63993E-05  2.11614E-05  1.30488E-05  6.58906E-06  5.20916E-04  4.50755E-04  2.40676E-04  8.66369E-05  2.40290E-05
 10.400  1.40851E-05  1.98765E-05  1.58091E-05  9.70155E-06  4.85252E-06  4.50951E-04  3.92233E-04  2.02526E-04  7.06081E-05  1.84724E-05
 10.500  1.09576E-05  1.49813E-05  1.18014E-05  7.19217E-06  3.54322E-06  3.90474E-04  3.42405E-04  1.70875E-04  5.73988E-05  1.39625E-05
 10.600  8.57329E-06  1.13183E-05  8.81639E-06  5.32585E-06  2.56721E-06  3.38140E-04  2.99833E-04  1.44684E-04  4.65846E-05  1.03435E-05
 10.700  6.74931E-06  8.58177E-06  6.60224E-06  3.94735E-06  1.84752E-06  2.92804E-04  2.63305E-04  1.23050E-04  3.77898E-05  7.47420E-06
 10.800  5.34697E-06  6.53800E-06  4.96448E-06  2.93498E-06  1.32239E-06  2.53490E-04  2.31810E-04  1.05191E-04  3.06858E-05  5.22956E-06
 10.900  4.26181E-06  5.00976E-06  3.75462E-06  2.19467E-06  9.43108E-07  2.19370E-04  2.04510E-04  9.04418E-05  2.49873E-05  3.50072E-06
 11.000  3.41566E-06  3.86381E-06  2.86048E-06  1.65473E-06  6.71923E-07  1.89734E-04  1.80716E-04  7.82374E-05  2.04489E-05  2.19402E-06
 11.100  2.75031E-06  3.00072E-06  2.19810E-06  1.26117E-06  4.79986E-07  1.63979E-04  1.59865E-04  6.81035E-05  1.68602E-05  1.22974E-06
 11.200  2.22257E-06  2.34674E-06  1.70519E-06  9.73768E-07  3.45546E-07  1.41588E-04  1.41497E-04  5.96451E-05  1.40422E-05  5.40559E-07
 11.300  1.80042E-06  1.84751E-06  1.33589E-06  7.62885E-07  2.52380E-07  1.22120E-04  1.25242E-04  5.25362E-05  1.18434E-05  6.99227E-08
 11.400  1.46011E-06  1.46307E-06  1.05666E-06  6.06854E-07  1.88501E-07  1.05193E-04  1.10798E-04  4.65104E-05  1.01362E-05 -2.29442E-07
 11.500  1.18398E-06  1.16421E-06  8.43112E-07  4.89975E-07  1.45126E-07  9.04806E-05  9.79214E-05  4.13522E-05  8.81402E-06 -3.96907E-07
 11.600  9.58753E-07  9.29570E-07  6.77621E-07  4.00962E-07  1.15859E-07  7.76987E-05  8.64140E-05  3.68890E-05  7.78860E-06 -4.65128E-07
 11.700  7.74409E-07  7.43580E-07  5.47512E-07  3.31771E-07  9.60846E-08  6.66023E-05  7.61145E-05  3.29844E-05  6.98765E-06 -4.61045E-07
 11.800  6.23254E-07  5.94867E-07  4.43715E-07  2.76722E-07  8.25044E-08  5.69784E-05  6.68895E-05  2.95318E-05  6.35275E-06 -4.06715E-07
 11.900  4.99304E-07  4.75100E-07  3.59764E-07  2.31852E-07  7.27962E-08  4.86415E-05  5.86281E-05  2.64491E-05  5.83748E-06 -3.20004E-07
 12.000  3.97826E-07  3.78146E-07  2.91066E-07  1.94436E-07  6.53637E-08  4.14296E-05  5.12362E-05  2.36739E-05  5.40571E-06 -2.15163E-07
 12.100  3.15012E-07  2.99442E-07  2.34358E-07  1.62630E-07  5.91497E-08  3.52010E-05  4.46326E-05  2.11591E-05  5.03011E-06 -1.03323E-07
 12.200  2.47748E-07  2.35549E-07  1.87307E-07  1.35213E-07  5.34952E-08  2.98315E-05  3.87463E-05  1.88700E-05  4.69064E-06  7.07786E-09
 12.300  1.93451E-07  1.83822E-07  1.48225E-07  1.11389E-07  4.80313E-08  2.52123E-05  3.35136E-05  1.67806E-05  4.37329E-06  1.09910E-07
 12.400  1.49953E-07  1.42182E-07  1.15859E-07  9.06443E-08  4.25945E-08  2.12474E-05  2.88767E-05  1.48720E-05  4.06892E-06  2.01000E-07
 12.500  1.15415E-07  1.08950E-07  8.92426E-08  7.26454E-08  3.71595E-08  1.78526E-05  2.47826E-05  1.31296E-05  3.77217E-06  2.77809E-07
 12.600  8.82717E-08  8.27331E-08  6.75925E-08  5.71591E-08  3.17865E-08  1.49536E-05  2.11817E-05  1.15423E-05  3.48051E-06  3.39128E-07
 12.700  6.71844E-08  6.23524E-08  5.02438E-08  4.40029E-08  2.65798E-08  1.24851E-05  1.80280E-05  1.01009E-05  3.19350E-06  3.84805E-07
 12.800  5.10104E-08  4.67909E-08  3.66049E-08  3.30100E-08  2.16573E-08  1.03894E-05  1.52780E-05  8.79716E-06  2.91203E-06  4.15490E-07
 12.900  3.87772E-08  3.51631E-08  2.61349E-08  2.40098E-08  1.71283E-08  8.61596E-06  1.28910E-05  7.62361E-06  2.63785E-06  4.32410E-07
 13.000  2.96629E-08  2.66964E-08  1.83316E-08  1.68187E-08  1.30798E-08  7.12016E-06  1.08288E-05  6.57282E-06  2.37307E-06  4.37173E-07
 13.100  2.29784E-08  2.07189E-08  1.27289E-08  1.12385E-08  9.56927E-09  5.86292E-06  9.05595E-06  5.63725E-06  2.11986E-06  4.31602E-07
 13.200  1.81531E-08  1.66531E-08  8.89838E-09  7.06001E-09  6.62230E-09  4.80999E-06  7.53926E-06  4.80924E-06  1.88020E-06  4.17596E-07
 13.300  1.47205E-08  1.40096E-08  6.45262E-09  4.06946E-09  4.23470E-09  3.93144E-06  6.24819E-06  4.08091E-06  1.65575E-06  3.97026E-07
 13.400  1.23057E-08  1.23819E-08  5.04926E-09  2.05597E-09  2.37684E-09  3.20119E-06  5.15469E-06  3.44426E-06  1.44773E-06  3.71652E-07
 13.500  1.06131E-08  1.14409E-08  4.39352E-09  8.18931E-10  9.99641E-10  2.59656E-06  4.23320E-06  2.89126E-06  1.25692E-06  3.43069E-07
 13.600  9.41483E-09  1.09282E-08  4.23919E-09  1.74200E-10  4.10436E-11  2.09794E-06  3.46059E-06  2.41398E-06  1.08365E-06  3.12671E-07
 13.700  8.53979E-09  1.06478E-08  4.38765E-09 -4.12481E-11 -5.67789E-10  1.68841E-06  2.81609E-06  2.00466E-06  9.27829E-07  2.81634E-07
 13.800  7.86382E-09  1.04585E-08  4.68514E-09  3.35071E-11 -8.96998E-10  1.35344E-06  2.28117E-06  1.65582E-06  7.89026E-07  2.50918E-07
 13.900  7.30043E-09  1.02647E-08  5.01863E-09  2.84400E-10 -1.01363E-09  1.08058E-06  1.83944E-06  1.36040E-06  6.66504E-07  2.21270E-07
 14.000  6.79268E-09  1.00083E-08  5.31051E-09  6.21911E-10 -9.78436E-10  8.59258E-07  1.47650E-06  1.11176E-06  5.59305E-07  1.93244E-07
 14.100  6.30606E-09  9.65990E-09  5.51288E-09  9.79361E-10 -8.43819E-10  6.80497E-07  1.17979E-06  9.03775E-07  4.66310E-07  1.67225E-07
 14.200  5.82250E-09  9.21179E-09  5.60160E-09  1.31034E-09 -6.52862E-10  5.36731E-07  9.38437E-07  7.30856E-07  3.86300E-07  1.43446E-07
 14.300  5.33538E-09  8.67119E-09  5.57057E-09  1.58563E-09 -4.39204E-10  4.21605E-07  7.43078E-07  5.87950E-07  3.18012E-07  1.22018E-07
 14.400  4.84547E-09  8.05476E-09  5.42660E-09  1.78988E-09 -2.27579E-10  3.29811E-07  5.85733E-07  4.70545E-07  2.60178E-07  1.02957E-07
 14.500  4.35792E-09  7.38417E-09  5.18485E-09  1.91839E-09 -3.48064E-11  2.56939E-07  4.59625E-07  3.74653E-07  2.11567E-07  8.61981E-08
 14.600  3.87988E-09  6.68269E-09  4.86512E-09  1.97414E-09  1.28968E-10  1.99339E-07  3.59047E-07  2.96784E-07  1.71007E-07  7.16246E-08
 14.700  3.41891E-09  5.97270E-09  4.48894E-09  1.96515E-09  2.58929E-10  1.54009E-07  2.79219E-07  2.33909E-07  1.37405E-07  5.90805E-08
 14.800  2.98191E-09  5.27414E-09  4.07742E-09  1.90232E-09  3.54281E-10  1.18491E-07  2.16166E-07  1.83427E-07  1.09761E-07  4.83871E-08
 14.900  2.57450E-09  4.60351E-09  3.64975E-09  1.79774E-09  4.17048E-10  9.07832E-08  1.66603E-07  1.43121E-07  8.71724E-08  3.93545E-08
 15.000  2.20071E-09  3.97351E-09  3.22235E-09  1.66343E-09  4.51044E-10  6.92631E-08  1.27830E-07  1.11117E-07  6.88381E-08  3.17913E-08
 15.100  1.86293E-09  3.39305E-09  2.80843E-09  1.51046E-09  4.61033E-10  5.26221E-08  9.76425E-08  8.58421E-08  5.40535E-08  2.55112E-08
 15.200  1.56207E-09  2.86754E-09  2.41792E-09  1.34844E-09  4.52087E-10  3.98107E-08  7.42511E-08  6.59900E-08  4.22074E-08  2.03386E-08
 15.300  1.29772E-09  2.39935E-09  2.05771E-09  1.18524E-09  4.29119E-10  2.99911E-08  5.62115E-08  5.04804E-08  3.27754E-08  1.61112E-08
 15.400  1.06841E-09  1.98835E-09  1.73192E-09  1.02699E-09  3.96587E-10  2.24977E-08  4.23649E-08  3.84275E-08  2.53119E-08  1.26824E-08
 15.500  8.71921E-10  1.63246E-09  1.44242E-09  8.78096E-10  3.58312E-10  1.68048E-08  3.17867E-08  2.91101E-08  1.94418E-08  9.92147E-09
 15.600  7.05496E-10  1.32822E-09  1.18923E-09  7.41497E-10  3.17413E-10  1.24990E-08  2.37434E-08  2.19450E-08  1.48527E-08  7.71430E-09
 15.700  5.66088E-10  1.07126E-09  9.71013E-10  6.18847E-10  2.76307E-10  9.25663E-09  1.76563E-08  1.64637E-08  1.12862E-08  5.96207E-09
 15.800  4.50541E-10  8.56700E-10  7.85457E-10  5.10782E-10  2.36761E-10  6.82598E-09  1.30710E-08  1.22919E-08  8.53059E-09  4.58046E-09
 15.900  3.55736E-10  6.79466E-10  6.29650E-10  4.17161E-10  1.99975E-10  5.01193E-09  9.63334E-09  9.13313E-09  6.41382E-09  3.49835E-09
 16.000  2.78704E-10  5.34572E-10  5.00359E-10  3.37284E-10  1.66675E-10  3.66411E-09  7.06801E-09  6.75358E-09  4.79705E-09  2.65637E-09
 16.100  2.16698E-10  4.17284E-10  3.94264E-10  2.70081E-10  1.37213E-10  2.66715E-09  5.16260E-09  4.97011E-09  3.56915E-09  2.00543E-09
 16.200  1.67236E-10  3.23239E-10  3.08120E-10  2.14271E-10  1.11656E-10  1.93303E-09  3.75395E-09  3.64015E-09  2.64180E-09  1.50539E-09
 16.300  1.28126E-10  2.48517E-10  2.38879E-10  1.68480E-10  8.98698E-11  1.39488E-09  2.71742E-09  2.65337E-09  1.94533E-09  1.12365E-09
 16.400  9.74626E-11  1.89670E-10  1.83759E-10  1.31334E-10  7.15874E-11  1.00216E-09  1.95826E-09  1.92489E-09  1.42513E-09  8.34020E-10
 16.500  7.36185E-11  1.43720E-10  1.40286E-10  1.01525E-10  5.64626E-11  7.16856E-10  1.40483E-09  1.38978E-09  1.03871E-09  6.15610E-10
 16.600  5.52256E-11  1.08137E-10  1.06305E-10  7.78460E-11  4.41135E-11  5.10527E-10  1.00328E-09  9.98665E-10  7.53217E-10  4.51894E-10
 16.700  4.11481E-11  8.08018E-11  7.99709E-11  5.92202E-11  3.41531E-11  3.61986E-10  7.13274E-10  7.14219E-10  5.43431E-10  3.29903E-10
 16.800  3.04553E-11  5.99673E-11  5.97335E-11  4.47055E-11  2.62110E-11  2.55534E-10  5.04809E-10  5.08373E-10  3.90099E-10  2.39536E-10
 16.900  2.23937E-11  4.42084E-11  4.43069E-11  3.34958E-11  1.99462E-11  1.79590E-10  3.55658E-10  3.60144E-10  2.78625E-10  1.72985E-10
 17.000  1.63599E-11  3.23771E-11  3.26399E-11  2.49136E-11  1.50548E-11  1.25658E-10  2.49443E-10  2.53930E-10  1.98011E-10  1.24255E-10
 17.100  1.18760E-11  2.35591E-11  2.38838E-11  1.83978E-11  1.12728E-11  8.75323E-11  1.74157E-10  1.78197E-10  1.40019E-10  8.87767E-11
 17.200  8.56704E-12  1.70337E-11  1.73614E-11  1.34909E-11  8.37589E-12  6.07034E-11  1.21042E-10  1.24461E-10  9.85195E-11  6.30928E-11
 17.300  6.14187E-12  1.22385E-11  1.25383E-11  9.82488E-12  6.17666E-12  4.19104E-11  8.37459E-11  8.65208E-11  6.89768E-11  4.46035E-11
 17.400  4.37637E-12  8.73881E-12  8.99723E-12  7.10684E-12  4.52149E-12  2.88065E-11  5.76788E-11  5.98633E-11  4.80547E-11  3.13674E-11
 17.500  3.09959E-12  6.20182E-12  6.41561E-12  5.10671E-12  3.28615E-12  1.97114E-11  3.95452E-11  4.12246E-11  3.33140E-11  2.19443E-11
 17.600  2.18224E-12  4.37483E-12  4.54636E-12  3.64561E-12  2.37158E-12  1.34276E-11  2.69896E-11  2.82561E-11  2.29818E-11  1.52725E-11
 17.700  1.52735E-12  3.06769E-12  3.20202E-12  2.58588E-12  1.69979E-12  9.10616E-12  1.83368E-11  1.92765E-11  1.57766E-11  1.05744E-11
 17.800  1.06277E-12  2.13844E-12  2.24157E-12  1.82264E-12  1.21009E-12  6.14785E-12  1.24015E-11  1.30891E-11  1.07776E-11  7.28398E-12
 17.900  7.35255E-13  1.48201E-12  1.55984E-12  1.27669E-12  8.55768E-13  4.13200E-12  8.34929E-12  8.84615E-12  7.32676E-12  4.99183E-12
 18.000  5.05772E-13  1.02117E-12  1.07905E-12  8.88787E-13  6.01261E-13  2.76470E-12  5.59562E-12  5.95072E-12  4.95673E-12  3.40362E-12
 18.100  3.45952E-13  6.99627E-13  7.42110E-13  6.15004E-13  4.19745E-13  1.84155E-12  3.73311E-12  3.98434E-12  3.33715E-12  2.30898E-12
 18.200  2.35313E-13  4.76628E-13  5.07438E-13  4.23018E-13  2.91182E-13  1.22114E-12  2.47924E-12  2.65533E-12  2.23593E-12  1.55851E-12
 18.300  1.59172E-13  3.22896E-13  3.44997E-13  2.89248E-13  2.00745E-13  8.06111E-13  1.63904E-12  1.76140E-12  1.49091E-12  1.04669E-12
 18.400  1.07078E-13  2.17539E-13  2.33234E-13  1.96628E-13  1.37550E-13  5.29750E-13  1.07867E-12  1.16299E-12  9.89368E-13  6.99449E-13
 18.500  7.16421E-14  1.45756E-13  1.56796E-13  1.32896E-13  9.36808E-14  3.46573E-13  7.06667E-13  7.64331E-13  6.53410E-13  4.65084E-13
 18.600  4.76749E-14  9.71291E-14  1.04826E-13  8.93090E-14  6.34232E-14  2.25718E-13  4.60860E-13  5.00003E-13  4.29478E-13  3.07718E-13
 18.700  3.15562E-14  6.43767E-14  6.96974E-14  5.96794E-14  4.26861E-14  1.46347E-13  2.99195E-13  3.25577E-13  2.80950E-13  2.02596E-13
 18.800  2.07764E-14  4.24407E-14  4.60892E-14  3.96572E-14  2.85625E-14  9.44609E-14  1.93361E-13  2.11022E-13  1.82917E-13  1.32731E-13
 18.900  1.36072E-14  2.78311E-14  3.03135E-14  2.62068E-14  1.90022E-14  6.06974E-14  1.24400E-13  1.36144E-13  1.18529E-13  8.65346E-14
 19.000  8.86523E-15  1.81547E-14  1.98312E-14  1.72235E-14  1.25702E-14  3.88274E-14  7.96716E-14  8.74324E-14  7.64441E-14  5.61419E-14
 19.100  5.74587E-15  1.17808E-14  1.29049E-14  1.12581E-14  8.26858E-15  2.47263E-14  5.07956E-14  5.58919E-14  4.90703E-14  3.62472E-14
 19.200  3.70493E-15  7.60514E-15  8.35357E-15  7.31928E-15  5.40878E-15  1.56760E-14  3.22394E-14  3.55659E-14  3.13513E-14  2.32895E-14
 19.300  2.37673E-15  4.88427E-15  5.37921E-15  4.73314E-15  3.51860E-15  9.89384E-15  2.03700E-14  2.25284E-14  1.99369E-14  1.48919E-14
 19.400  1.51694E-15  3.12082E-15  3.44597E-15  3.04457E-15  2.27649E-15  6.21660E-15  1.28127E-14  1.42050E-14  1.26192E-14  9.47666E-15
 19.500  9.63294E-16  1.98394E-15  2.19617E-15  1.94814E-15  1.46490E-15  3.88866E-15  8.02296E-15  8.91605E-15  7.95033E-15  6.00180E-15
 19.600  6.08650E-16  1.25485E-15  1.39251E-15  1.24007E-15  9.37598E-16  2.42164E-15  5.00126E-15  5.57091E-15  4.98564E-15  3.78300E-15
 19.700  3.82654E-16  7.89726E-16  8.78460E-16  7.85272E-16  5.96915E-16  1.50135E-15  3.10368E-15  3.46503E-15  3.11204E-15  2.37316E-15
 19.800  2.39381E-16  4.94531E-16  5.51382E-16  4.94722E-16  3.78020E-16  9.26666E-16  1.91748E-15  2.14545E-15  1.93358E-15  1.48171E-15
 19.900  1.49014E-16  3.08145E-16  3.44354E-16  3.10087E-16  2.38145E-16  5.69419E-16  1.17935E-15  1.32240E-15  1.19586E-15  9.20762E-16
  67 208 200   0.100
  0.000  4.64712E-02 -2.48253E-16 -3.53884E-16 -5.00371E-16 -7.86769E-16  9.63960E-02 -4.96507E-16 -7.49401E-16 -6.75501E-16 -1.31605E-15
  0.100  4.64971E-02 -2.12869E-05 -1.65297E-08 -3.19995E-12 -1.48771E-15  9.64710E-02 -2.97837E-05  1.70897E-08  5.28090E-12 -9.42693E-15
  0.200  4.65749E-02 -8.44108E-05 -2.62158E-07 -2.02022E-10 -6.39715E-14  9.66917E-02 -1.16432E-04  2.71908E-07  3.38073E-10 -9.66868E-13
  0.300  4.67041E-02 -1.87173E-04 -1.30779E-06 -2.24923E-09 -1.58015E-12  9.70452E-02 -2.52062E-04  1.36361E-06  3.84649E-09 -2.41772E-11
  0.400  4.68844E-02 -3.25950E-04 -4.04866E-06 -1.22377E-08 -1.48714E-11  9.75115E-02 -4.24279E-04  4.25223E-06  2.15651E-08 -2.34686E-10
  0.500  4.71147E-02 -4.95761E-04 -9.62364E-06 -4.47769E-08 -8.18972E-11  9.80638E-02 -6.17214E-04  1.02003E-05  8.19576E-08 -1.34808E-09
  0.600  4.73934E-02 -6.90362E-04 -1.93096E-05 -1.26989E-07 -3.18164E-10  9.86714E-02 -8.12861E-04  2.06906E-05  2.43278E-07 -5.54020E-09
  0.700  4.77180E-02 -9.02386E-04 -3.43976E-05 -3.01053E-07 -9.61086E-10  9.93006E-02 -9.92574E-04  3.73203E-05  6.08070E-07 -1.80247E-08
  0.800  4.80850E-02 -1.12352E-03 -5.60597E-05 -6.23957E-07 -2.38332E-09  9.99176E-02 -1.13863E-03  6.16745E-05  1.33811E-06 -4.93140E-08
  0.900  4.84899E-02 -1.34471E-03 -8.52145E-05 -1.16340E-06 -4.99411E-09  1.00490E-01 -1.23567E-03  9.51831E-05  2.66735E-06 -1.17964E-07
  1.000  4.89268E-02 -1.55646E-03 -1.22403E-04 -1.98927E-06 -8.91791E-09  1.00990E-01 -1.27201E-03  1.38969E-04  4.90954E-06 -2.53368E-07
  1.100  4.93885E-02 -1.74912E-03 -1.67680E-04 -3.16082E-06 -1.33184E-08  1.01395E-01 -1.24057E-03  1.93695E-04  8.45709E-06 -4.97985E-07
  1.200  4.98667E-02 -1.91322E-03 -2.20540E-04 -4.71023E-06 -1.52392E-08  1.01687E-01 -1.13944E-03  2.59427E-04  1.37673E-05 -9.08290E-07
  1.300  5.03522E-02 -2.03986E-03 -2.79866E-04 -6.62429E-06 -7.86719E-09  1.01857E-01 -9.72106E-04  3.35519E-04  2.13335E-05 -1.55383E-06
  1.400  5.08350E-02 -2.12108E-03 -3.43929E-04 -8.82601E-06  2.18008E-08  1.01904E-01 -7.47165E-04  4.20540E-04  3.16387E-05 -2.51398E-06
  1.500  5.13048E-02 -2.15023E-03 -4.10426E-04 -1.11589E-05  9.58042E-08  1.01835E-01 -4.77680E-04  5.12252E-04  4.50936E-05 -3.87231E-06
  1.600  5.17512E-02 -2.12230E-03 -4.76555E-04 -1.33760E-05  2.48360E-07  1.01662E-01 -1.80210E-04  6.07640E-04  6.19604E-05 -5.70911E-06
  1.700  5.21645E-02 -2.03428E-03 -5.39138E-04 -1.51370E-05  5.28945E-07  1.01402E-01  1.26432E-04  7.03020E-04  8.22702E-05 -8.09278E-06
  1.800  5.25358E-02 -1.88531E-03 -5.94769E-04 -1.60131E-05  1.00485E-06  1.01081E-01  4.22561E-04  7.94196E-04  1.05740E-04 -1.10715E-05
  1.900  5.28578E-02 -1.67688E-03 -6.39997E-04 -1.55035E-05  1.76267E-06  1.00721E-01  6.89068E-04  8.76685E-04  1.31700E-04 -1.46666E-05
  2.000  5.31246E-02 -1.41290E-03 -6.71511E-04 -1.30602E-05  2.90809E-06  1.00351E-01  9.08806E-04  9.45979E-04  1.59049E-04 -1.88688E-05
  2.100  5.33326E-02 -1.09959E-03 -6.86344E-04 -8.12280E-06  4.56363E-06  9.99961E-02  1.06782E-03  9.97842E-04  1.86232E-04 -2.36386E-05
  2.200  5.34804E-02 -7.45369E-04 -6.82051E-04 -1.58869E-07  6.86379E-06  9.96789E-02  1.15636E-03  1.02862E-03  2.11273E-04 -2.89113E-05
  2.300  5.35689E-02 -3.60583E-04 -6.56883E-04  1.12915E-05  9.94771E-06  9.94190E-02  1.16955E-03  1.03551E-03  2.31848E-04 -3.46063E-05
  2.400  5.36013E-02  4.28807E-05 -6.09919E-04  2.65717E-05  1.39494E-05  9.92308E-02  1.10775E-03  1.01684E-03  2.45409E-04 -4.06389E-05
  2.500  5.35829E-02  4.52032E-04 -5.41167E-04  4.58684E-05  1.89859E-05  9.91229E-02  9.76536E-04  9.72268E-04  2.49361E-04 -4.69340E-05
  2.600  5.35212E-02  8.53295E-04 -4.51611E-04  6.91790E-05  2.51448E-05  9.90979E-02  7.86341E-04  9.02864E-04  2.41270E-04 -5.34374E-05
  2.700  5.34249E-02  1.23307E-03 -3.43215E-04  9.62892E-05  3.24712E-05  9.91519E-02  5.51726E-04  8.11183E-04  2.19094E-04 -6.01232E-05
  2.800  5.33043E-02  1.57830E-03 -2.18878E-04  1.26765E-04  4.09566E-05  9.92758E-02  2.90404E-04  7.01185E-04  1.81423E-04 -6.69946E-05
  2.900  5.31703E-02  1.87706E-03 -8.23335E-05  1.59955E-04  5.05293E-05  9.94552E-02  2.20500E-05  5.78073E-04  1.27693E-04 -7.40750E-05
  3.000  5.30339E-02  2.11908E-03  6.19822E-05  1.95013E-04  6.10494E-05  9.96718E-02 -2.33033E-04  4.48044E-04  5.83632E-05 -8.13903E-05
  3.100  5.29059E-02  2.29625E-03  2.09109E-04  2.30925E-04  7.23079E-05  9.99049E-02 -4.55276E-04  3.17952E-04 -2.49724E-05 -8.89420E-05
  3.200  5.27965E-02  2.40299E-03  3.53760E-04  2.66553E-04  8.40304E-05  1.00132E-01 -6.27152E-04  1.94925E-04 -1.19553E-04 -9.66737E-05
  3.300  5.27144E-02  2.43656E-03  4.90547E-04  3.00682E-04  9.58860E-05  1.00333E-01 -7.34343E-04  8.59232E-05 -2.21516E-04 -1.04435E-04
  3.400  5.26666E-02  2.39729E-03  6.14202E-04  3.32075E-04  1.07501E-04  1.00485E-01 -7.66671E-04 -2.69011E-06 -3.26055E-04 -1.11948E-04
  3.500  5.26581E-02  2.28861E-03  7.19808E-04  3.59518E-04  1.18476E-04  1.00573E-01 -7.18734E-04 -6.55778E-05 -4.27672E-04 -1.18782E-04
  3.600  5.26913E-02  2.11706E-03  8.03016E-04  3.81876E-04  1.28404E-04  1.00583E-01 -5.90196E-04 -9.88009E-05 -5.20514E-04 -1.24343E-04
  3.700  5.27659E-02  1.89206E-03  8.60239E-04  3.98130E-04  1.36891E-04  1.00504E-01 -3.85698E-04 -1.00119E-04 -5.98761E-04 -1.27883E-04
  3.800  5.28786E-02  1.62566E-03  8.88828E-04  4.07418E-04  1.43572E-04  1.00332E-01 -1.14404E-04 -6.91917E-05 -6.57047E-04 -1.28532E-04
  3.900  5.30234E-02  1.33214E-03  8.87214E-04  4.09056E-04  1.48130E-04  1.00067E-01  2.10808E-04 -7.65875E-06 -6.90875E-04 -1.25350E-04
  4.000  5.31908E-02  1.02750E-03  8.55011E-04  4.02561E-04  1.50306E-04  9.97119E-02  5.74436E-04  8.09066E-05 -6.96995E-04 -1.17411E-04
  4.100  5.33689E-02  7.28911E-04  7.93082E-04  3.87665E-04  1.49902E-04  9.92723E-02  9.59653E-04  1.91184E-04 -6.73709E-04 -1.03893E-04
  4.200  5.35429E-02  4.54054E-04  7.03563E-04  3.64317E-04  1.46792E-04  9.87563E-02  1.34973E-03  3.16421E-04 -6.21074E-04 -8.41849E-05
  4.300  5.36957E-02  2.20476E-04  5.89841E-04  3.32696E-04  1.40910E-04  9.81723E-02  1.72943E-03  4.48868E-04 -5.40982E-04 -5.79902E-05
  4.400  5.38085E-02  4.48875E-05  4.56487E-04  2.93208E-04  1.32251E-04  9.75277E-02  2.08636E-03  5.80306E-04 -4.37111E-04 -2.54199E-05
  4.500  5.38611E-02 -5.75092E-05  3.09138E-04  2.46496E-04  1.20861E-04  9.68280E-02  2.41200E-03  7.02638E-04 -3.14728E-04  1.29389E-05
  4.600  5.38328E-02 -7.36555E-05  1.54337E-04  1.93437E-04  1.06828E-04  9.60754E-02  2.70253E-03  8.08506E-04 -1.80379E-04  5.59874E-05
  4.700  5.37029E-02  6.79058E-06 -6.71221E-07  1.35152E-04  9.02806E-05  9.52681E-02  2.95917E-03  8.91883E-04 -4.14695E-05  1.02121E-04
  4.800  5.34515E-02  1.90971E-04 -1.48190E-04  7.30078E-05  7.13795E-05  9.44000E-02  3.18823E-03  9.48609E-04  9.42358E-05  1.49284E-04
  4.900  5.30604E-02  4.82459E-04 -2.80347E-04  8.60990E-06  5.03224E-05  9.34605E-02  3.40060E-03  9.76813E-04  2.19141E-04  1.95063E-04
  5.000  5.25136E-02  8.81019E-04 -3.89408E-04 -5.62049E-05  2.73487E-05  9.24351E-02  3.61093E-03  9.77189E-04  3.26350E-04  2.36831E-04
  5.100  5.17982E-02  1.38252E-03 -4.68095E-04 -1.19393E-04  2.74885E-06  9.13059E-02  3.83645E-03  9.53101E-04  4.10159E-04  2.71920E-04
  5.200  5.09049E-02  1.97899E-03 -5.09916E-04 -1.78739E-04 -2.31230E-05  9.00528E-02  4.09558E-03  9.10486E-04  4.66455E-04  2.97809E-04
  5.300  4.98283E-02  2.65886E-03 -5.09477E-04 -2.31917E-04 -4.98360E-05  8.86549E-02  4.40635E-03  8.57572E-04  4.93019E-04  3.12322E-04
  5.400  4.85677E-02  3.40731E-03 -4.62768E-04 -2.76555E-04 -7.68722E-05  8.70919E-02  4.78487E-03  8.04401E-04  4.89680E-04  3.13812E-04
  5.500  4.71267E-02  4.20680E-03 -3.67400E-04 -3.10335E-04 -1.03620E-04  8.53454E-02  5.24390E-03  7.62200E-04  4.58332E-04  3.01308E-04
  5.600  4.55133E-02  5.03769E-03 -2.22786E-04 -3.31089E-04 -1.29373E-04  8.34007E-02  5.79160E-03  7.42639E-04  4.02796E-04  2.74630E-04
  5.700  4.37399E-02  5.87899E-03 -3.02396E-05 -3.36920E-04 -1.53347E-04  8.12478E-02  6.43068E-03  7.57015E-04  3.28554E-04  2.34439E-04
  5.800  4.18227E-02  6.70908E-03  2.07002E-04 -3.26313E-04 -1.74692E-04  7.88821E-02  7.15788E-03  8.15442E-04  2.42357E-04  1.82230E-04
  5.900  3.97815E-02  7.50656E-03  4.83854E-04 -2.98250E-04 -1.92532E-04  7.63054E-02  7.96389E-03  9.26090E-04  1.51764E-04  1.20266E-04
  6.000  3.76383E-02  8.25101E-03  7.93551E-04 -2.52300E-04 -2.06002E-04  7.35258E-02  8.83365E-03  1.09454E-03  6.46127E-05  5.14459E-05
  6.100  3.54175E-02  8.92375E-03  1.12789E-03 -1.88694E-04 -2.14301E-04  7.05577E-02  9.74712E-03  1.32328E-03 -1.15037E-05 -2.08679E-05
  6.200  3.31444E-02  9.50846E-03  1.47756E-03 -1.08367E-04 -2.16740E-04  6.74213E-02  1.06803E-02  1.61145E-03 -6.97406E-05 -9.30584E-05
  6.300  3.08448E-02  9.99170E-03  1.83254E-03 -1.29572E-05 -2.12800E-04  6.41418E-02  1.16065E-02  1.95476E-03 -1.04439E-04 -1.61483E-04
  6.400  2.85439E-02  1.03634E-02  2.18248E-03  9.52252E-05 -2.02177E-04  6.07483E-02  1.24978E-02  2.34565E-03 -1.11468E-04 -2.22700E-04
  6.500  2.62660E-02  1.06169E-02  2.51720E-03  2.13277E-04 -1.84820E-04  5.72730E-02  1.33266E-02  2.77367E-03 -8.84605E-05 -2.73683E-04
  6.600  2.40335E-02  1.07493E-02  2.82707E-03  3.37816E-04 -1.60957E-04  5.37493E-02  1.40668E-02  3.22604E-03 -3.49094E-05 -3.11994E-04
  6.700  2.18667E-02  1.07613E-02  3.10342E-03  4.65123E-04 -1.31100E-04  5.02114E-02  1.46954E-02  3.68834E-03  4.78507E-05 -3.35924E-04
  6.800  1.97830E-02  1.06568E-02  3.33891E-03  5.91312E-04 -9.60389E-05  4.66924E-02  1.51934E-02  4.14529E-03  1.56790E-04 -3.44569E-04
  6.900  1.77972E-02  1.04429E-02  3.52775E-03  7.12508E-04 -5.68077E-05  4.32239E-02  1.55465E-02  4.58161E-03  2.87430E-04 -3.37855E-04
  7.000  1.59210E-02  1.01294E-02  3.66595E-03  8.25027E-04 -1.46417E-05  3.98347E-02  1.57458E-02  4.98278E-03  4.34175E-04 -3.16509E-04
  7.100  1.41631E-02  9.72790E-03  3.75135E-03  9.25547E-04  2.90838E-05  3.65505E-02  1.57875E-02  5.33577E-03  5.90689E-04 -2.81975E-04
  7.200  1.25292E-02  9.25178E-03  3.78365E-03  1.01125E-03  7.29232E-05  3.33933E-02  1.56734E-02  5.62965E-03  7.50304E-04 -2.36290E-04
  7.300  1.10224E-02  8.71532E-03  3.76434E-03  1.07995E-03  1.15435E-04  3.03810E-02  1.54102E-02  5.85605E-03  9.06417E-04 -1.81935E-04
  7.400  9.64322E-03  8.13324E-03  3.69650E-03  1.13015E-03  1.55254E-04  2.75278E-02  1.50089E-02  6.00943E-03  1.05286E-03 -1.21661E-04
  7.500  8.39014E-03  7.52012E-03  3.58457E-03  1.16112E-03  1.91164E-04  2.48437E-02  1.44838E-02  6.08716E-03  1.18420E-03 -5.83174E-05
  7.600  7.25971E-03  6.88998E-03  3.43410E-03  1.17284E-03  2.22149E-04  2.23352E-02  1.38523E-02  6.08953E-03  1.29600E-03  5.31600E-06
  7.700  6.24700E-03  6.25585E-03  3.25141E-03  1.16601E-03  2.47440E-04  2.00056E-02  1.31333E-02  6.01944E-03  1.38496E-03  6.66724E-05
  7.800  5.34590E-03  5.62944E-03  3.04326E-03  1.14194E-03  2.66540E-04  1.78548E-02  1.23466E-02  5.88215E-03  1.44900E-03  1.23519E-04
  7.900  4.54945E-03  5.02094E-03  2.81661E-03  1.10247E-03  2.79234E-04  1.58803E-02  1.15122E-02  5.68477E-03  1.48728E-03  1.74044E-04
  8.000  3.85010E-03  4.43888E-03  2.57825E-03  1.04980E-03  2.85581E-04  1.40776E-02  1.06494E-02  5.43587E-03  1.50009E-03  2.16907E-04
  8.100  3.24000E-03  3.89001E-03  2.33459E-03  9.86431E-04  2.85889E-04  1.24403E-02  9.77603E-03  5.14487E-03  1.48874E-03  2.51259E-04
  8.200  2.71117E-03  3.37937E-03  2.09147E-03  9.14976E-04  2.80680E-04  1.09604E-02  8.90834E-03  4.82165E-03  1.45537E-03  2.76727E-04
  8.300  2.25572E-03  2.91036E-03  1.85398E-03  8.38048E-04  2.70642E-04  9.62932E-03  8.06042E-03  4.47603E-03  1.40278E-03  2.93377E-04
  8.400  1.86598E-03  2.48484E-03  1.62636E-03  7.58153E-04  2.56584E-04  8.43748E-03  7.24404E-03  4.11739E-03  1.33418E-03  3.01648E-04
  8.500  1.53461E-03  2.10333E-03  1.41201E-03  6.77591E-04  2.39380E-04  7.37498E-03  6.46859E-03  3.75437E-03  1.25302E-03  3.02283E-04
  8.600  1.25470E-03  1.76519E-03  1.21339E-03  5.98383E-04  2.19918E-04  6.43175E-03  5.74114E-03  3.39463E-03  1.16277E-03  2.96247E-04
  8.700  1.01979E-03  1.46883E-03  1.03217E-03  5.22228E-04  1.99060E-04  5.59772E-03  5.06652E-03  3.04468E-03  1.06676E-03  2.84645E-04
  8.800  8.23959E-04  1.21191E-03  8.69208E-04  4.50474E-04  1.77601E-04  4.86304E-03  4.44754E-03  2.70982E-03  9.68069E-04  2.68642E-04
  8.900  6.61793E-04  9.91566E-04  7.24701E-04  3.84116E-04  1.56242E-04  4.21817E-03  3.88526E-03  2.39413E-03  8.69409E-04  2.49401E-04
  9.000  5.28417E-04  8.04568E-04  5.98274E-04  3.23808E-04  1.35572E-04  3.65399E-03  3.37921E-03  2.10052E-03  7.73073E-04  2.28024E-04
  9.100  4.19471E-04  6.47507E-04  4.89102E-04  2.69895E-04  1.16055E-04  3.16193E-03  2.92770E-03  1.83080E-03  6.80902E-04  2.05505E-04
  9.200  3.31097E-04  5.16932E-04  3.96019E-04  2.22453E-04  9.80327E-05  2.73393E-03  2.52808E-03  1.58587E-03  5.94289E-04  1.82710E-04
  9.300  2.59911E-04  4.09460E-04  3.17632E-04  1.81333E-04  8.17285E-05  2.36258E-03  2.17703E-03  1.36579E-03  5.14201E-04  1.60350E-04
  9.400  2.02970E-04  3.21872E-04  2.52414E-04  1.46211E-04  6.72581E-05  2.04104E-03  1.87075E-03  1.16999E-03  4.41218E-04  1.38985E-04
  9.500  1.57740E-04  2.51177E-04  1.98791E-04  1.16635E-04  5.46459E-05  1.76314E-03  1.60520E-03  9.97366E-04  3.75590E-04  1.19025E-04
  9.600  1.22059E-04  1.94655E-04  1.55208E-04  9.20727E-05  4.38418E-05  1.52327E-03  1.37624E-03  8.46483E-04  3.17292E-04  1.00740E-04
  9.700  9.40989E-05  1.49879E-04  1.20181E-04  7.19471E-05  3.47391E-05  1.31643E-03  1.17980E-03  7.15645E-04  2.66083E-04  8.42819E-05
  9.800  7.23303E-05  1.14722E-04  9.23374E-05  5.56723E-05  2.71921E-05  1.13820E-03  1.01196E-03  6.03026E-04  2.21567E-04  6.97011E-05
  9.900  5.54844E-05  8.73530E-05  7.04366E-05  4.26792E-05  2.10316E-05  9.84643E-04  8.69050E-04  5.06757E-04  1.83240E-04  5.69685E-05
 10.000  4.25201E-05  6.62185E-05  5.33848E-05  3.24342E-05  1.60781E-05  8.52340E-04  7.47678E-04  4.24988E-04  1.50535E-04  4.59957E-05
 10.100  3.25913E-05  5.00215E-05  4.02363E-05  2.44526E-05  1.21532E-05  7.38302E-04  6.44771E-04  3.55946E-04  1.22862E-04  3.66537E-05
 10.200  2.50176E-05  3.76942E-05  3.01896E-05  1.83058E-05  9.08707E-06  6.39940E-04  5.57584E-04  2.97968E-04  9.96314E-05  2.87892E-05
 10.300  1.92569E-05  2.83696E-05  2.25775E-05  1.36238E-05  6.72452E-06  5.55022E-04  4.83699E-04  2.49523E-04  8.02795E-05  2.22374E-05
 10.400  1.48824E-05  2.13533E-05  1.68538E-05  1.00942E-05  4.92805E-06  4.81634E-04  4.21008E-04  2.09226E-04  6.42786E-05  1.68331E-05
 10.500  1.15607E-05  1.60960E-05  1.25786E-05  7.45873E-06  3.57929E-06  4.18134E-04  3.67699E-04  1.75838E-04  5.11471E-05  1.24177E-05
 10.600  9.03461E-06  1.21683E-05  9.40305E-06  5.50795E-06  2.57899E-06  3.63123E-04  3.22224E-04  1.48267E-04  4.04528E-05  8.84422E-06
 10.700  7.10706E-06  9.23856E-06  7.05425E-06  4.07492E-06  1.84578E-06  3.15409E-04  2.83276E-04  1.25559E-04  3.18134E-05  5.98057E-06
 10.800  5.62869E-06  7.05324E-06  5.32168E-06  3.02892E-06  1.31445E-06  2.73974E-04  2.49761E-04  1.06889E-04  2.48947E-05  3.71034E-06
 10.900  4.48713E-06  5.42045E-06  4.04486E-06  2.26911E-06  9.33685E-07  2.37954E-04  2.20769E-04  9.15482E-05  1.94066E-05  1.93289E-06
 11.000  3.59848E-06  4.19621E-06  3.10290E-06  1.71886E-06  6.63884E-07  2.06611E-04  1.95549E-04  7.89352E-05  1.50998E-05  5.62408E-07
 11.100  2.90041E-06  3.27339E-06  2.40560E-06  1.32064E-06  4.74918E-07  1.79317E-04  1.73486E-04  6.85422E-05  1.17608E-05 -4.73507E-07
 11.200  2.34683E-06  2.57279E-06  1.88630E-06  1.03181E-06  3.44188E-07  1.55534E-04  1.54077E-04  5.99444E-05  9.20768E-06 -1.23555E-06
 11.300  1.90375E-06  2.03621E-06  1.49611E-06  8.21031E-07  2.54926E-07  1.34801E-04  1.36913E-04  5.27897E-05  7.28619E-06 -1.77443E-06
 11.400  1.54606E-06  1.62107E-06  1.19947E-06  6.65538E-07  1.94794E-07  1.16722E-04  1.21665E-04  4.67884E-05  5.86620E-06 -2.13247E-06
 11.500  1.25517E-06  1.29633E-06  9.70634E-07  5.48902E-07  1.54780E-07  1.00958E-04  1.08064E-04  4.17049E-05  4.83848E-06 -2.34508E-06
 11.600  1.01721E-06  1.03944E-06  7.91125E-07  4.59388E-07  1.28334E-07  8.72139E-05  9.58937E-05  3.73497E-05  4.11199E-06 -2.44197E-06
 11.700  8.21761E-07  8.34002E-07  6.47749E-07  3.88704E-07  1.10736E-07  7.52353E-05  8.49776E-05  3.35716E-05  3.61156E-06 -2.44814E-06
 11.800  6.60885E-07  6.68126E-07  5.31163E-07  3.31071E-07  9.86178E-08  6.48014E-05  7.51716E-05  3.02524E-05  3.27581E-06 -2.38470E-06
 11.900  5.28437E-07  5.33153E-07  4.34805E-07  2.82545E-07  8.96237E-08  5.57198E-05  6.63567E-05  2.73004E-05  3.05535E-06 -2.26946E-06
 12.000  4.19582E-07  4.22756E-07  3.54104E-07  2.40507E-07  8.21612E-08  4.78228E-05  5.84333E-05  2.46457E-05  2.91118E-06 -2.11743E-06
 12.100  3.30447E-07  3.32266E-07  2.85900E-07  2.03296E-07  7.52143E-08  4.09637E-05  5.13168E-05  2.22360E-05  2.81320E-06 -1.94117E-06
 12.200  2.57868E-07  2.58186E-07  2.28014E-07  1.69917E-07  6.82026E-08  3.50141E-05  4.49342E-05  2.00328E-05  2.73888E-06 -1.75108E-06
 12.300  1.99217E-07  1.97837E-07  1.78927E-07  1.39830E-07  6.08676E-08  2.98613E-05  3.92211E-05  1.80083E-05  2.67205E-06 -1.55565E-06
 12.400  1.52275E-07  1.49106E-07  1.37548E-07  1.12789E-07  5.31809E-08  2.54063E-05  3.41201E-05  1.61425E-05  2.60178E-06 -1.36166E-06
 12.500  1.15147E-07  1.10268E-07  1.03048E-07  8.87090E-08  4.52663E-08  2.15619E-05  2.95787E-05  1.44214E-05  2.52134E-06 -1.17437E-06
 12.600  8.61966E-08  7.98621E-08  7.47450E-08  6.75826E-08  3.73356E-08  1.82512E-05  2.55487E-05  1.28349E-05  2.42728E-06 -9.97703E-07
 12.700  6.40039E-08  5.66110E-08  5.20215E-08  4.94088E-08  2.96363E-08  1.54066E-05  2.19851E-05  1.13755E-05  2.31867E-06 -8.34393E-07
 12.800  4.73345E-08  3.93731E-08  3.42841E-08  3.41531E-08  2.24116E-08  1.29685E-05  1.88460E-05  1.00375E-05  2.19635E-06 -6.86184E-07
 12.900  3.51170E-08  2.71132E-08  2.09386E-08  2.17230E-08  1.58710E-08  1.08840E-05  1.60917E-05  8.81571E-06  2.06238E-06 -5.53972E-07
 13.000  2.64262E-08  1.88907E-08  1.13854E-08  1.19605E-08  1.01725E-08  9.10677E-06  1.36851E-05  7.70543E-06  1.91955E-06 -4.37963E-07
 13.100  2.04706E-08  1.38552E-08  5.02481E-09  4.64492E-09  5.41330E-09  7.59586E-06  1.15914E-05  6.70177E-06  1.77096E-06 -3.37816E-07
 13.200  1.65808E-08  1.12482E-08  1.26987E-09 -4.96041E-10  1.62955E-09  6.31522E-06  9.77781E-06  5.79957E-06  1.61977E-06 -2.52772E-07
 13.300  1.41996E-08  1.04057E-08 -4.39048E-10 -3.76995E-09 -1.19884E-09  5.23313E-06  8.21386E-06  4.99333E-06  1.46898E-06 -1.81775E-07
 13.400  1.28722E-08  1.07601E-08 -6.19259E-10 -5.50202E-09 -3.13856E-09  4.32180E-06  6.87131E-06  4.27715E-06  1.32125E-06 -1.23570E-07
 13.500  1.22355E-08  1.18407E-08  2.66596E-10 -6.01753E-09 -4.29128E-09  3.55684E-06  5.72407E-06  3.64485E-06  1.17884E-06 -7.67907E-08
 13.600  1.20084E-08  1.32706E-08  1.81945E-09 -5.62646E-09 -4.78109E-09  2.91697E-06  4.74823E-06  3.09001E-06  1.04358E-06 -4.00313E-08
 13.700  1.19805E-08  1.47610E-08  3.70865E-09 -4.61105E-09 -4.74272E-09  2.38363E-06  3.92204E-06  2.60614E-06  9.16836E-07 -1.19025E-08
 13.800  1.20020E-08  1.61040E-08  5.67270E-09 -3.21718E-09 -4.31105E-09  1.94070E-06  3.22580E-06  2.18674E-06  7.99538E-07  8.92486E-09
 13.900  1.19734E-08  1.71620E-08  7.51655E-09 -1.64926E-09 -3.61279E-09  1.57422E-06  2.64179E-06  1.82541E-06  6.92237E-07  2.36894E-08
 14.000  1.18353E-08  1.78573E-08  9.10588E-09 -6.86683E-11 -2.76042E-09  1.27215E-06  2.15421E-06  1.51600E-06  5.95137E-07  3.35181E-08
 14.100  1.15597E-08  1.81603E-08  1.03595E-08  1.40510E-09 -1.84847E-09  1.02412E-06  1.74905E-06  1.25262E-06  5.08159E-07  3.94150E-08
 14.200  1.11418E-08  1.80783E-08  1.12402E-08  2.69095E-09 -9.51744E-10  8.21260E-07  1.41394E-06  1.02974E-06  4.30992E-07  4.22564E-08
 14.300  1.05927E-08  1.76452E-08  1.17460E-08  3.74128E-09 -1.25425E-10  6.56010E-07  1.13807E-06  8.42246E-07  3.63152E-07  4.27925E-08
 14.400  9.93419E-09  1.69121E-08  1.19006E-08  4.53620E-09  5.93633E-10  5.21939E-07  9.12031E-07  6.85419E-07  3.04028E-07  4.16531E-08
 14.500  9.19309E-09  1.59393E-08  1.17451E-08  5.07748E-09  1.18464E-09  4.13608E-07  7.27691E-07  5.54995E-07  2.52927E-07  3.93560E-08
 14.600  8.39826E-09  1.47901E-08  1.13312E-08  5.38269E-09  1.64009E-09  3.26439E-07  5.78061E-07  4.47143E-07  2.09112E-07  3.63178E-08
 14.700  7.57758E-09  1.35260E-08  1.07148E-08  5.47990E-09  1.96284E-09  2.56589E-07  4.57176E-07  3.58455E-07  1.71835E-07  3.28655E-08
 14.800  6.75627E-09  1.22030E-08  9.95135E-09  5.40306E-09  2.16322E-09  2.00856E-07  3.59974E-07  2.85931E-07  1.40354E-07  2.92491E-08
 14.900  5.95568E-09  1.08697E-08  9.09275E-09  5.18832E-09  2.25637E-09  1.56575E-07  2.82181E-07  2.26951E-07  1.13962E-07  2.56528E-08
 15.000  5.19287E-09  9.56589E-09  8.18489E-09  4.87115E-09  2.26007E-09  1.21546E-07  2.20215E-07  1.79246E-07  9.19909E-08  2.22065E-08
 15.100  4.48048E-09  8.32274E-09  7.26641E-09  4.48433E-09  2.19288E-09  9.39547E-08  1.71090E-07  1.40872E-07  7.38260E-08  1.89963E-08
 15.200  3.82699E-09  7.16274E-09  6.36831E-09  4.05665E-09  2.07276E-09  7.23183E-08  1.32328E-07  1.10168E-07  5.89086E-08  1.60735E-08
 15.300  3.23719E-09  6.10065E-09  5.51405E-09  3.61224E-09  1.91618E-09  5.54260E-08  1.01888E-07  8.57332E-08  4.67388E-08  1.34627E-08
 15.400  2.71271E-09  5.14453E-09  4.72015E-09  3.17040E-09  1.73747E-09  4.22965E-08  7.80967E-08  6.63909E-08  3.68746E-08  1.11687E-08
 15.500  2.25268E-09  4.29693E-09  3.99702E-09  2.74573E-09  1.54855E-09  3.21371E-08  5.95900E-08  5.11607E-08  2.89300E-08  9.18208E-09
 15.600  1.85431E-09  3.55602E-09  3.34992E-09  2.34858E-09  1.35890E-09  2.43115E-08  4.52627E-08  3.92316E-08  2.25714E-08  7.48404E-09
 15.700  1.51343E-09  2.91678E-09  2.78001E-09  1.98559E-09  1.17566E-09  1.83108E-08  3.42239E-08  2.99371E-08  1.75136E-08  6.04983E-09
 15.800  1.22504E-09  2.37191E-09  2.28532E-09  1.66033E-09  1.00388E-09  1.37305E-08  2.57592E-08  2.27332E-08  1.35149E-08  4.85174E-09
 15.900  9.83648E-10  1.91277E-09  1.86162E-09  1.37392E-09  8.46773E-10  1.02503E-08  1.92995E-08  1.71787E-08  1.03726E-08  3.86114E-09
 16.000  7.83647E-10  1.53003E-09  1.50320E-09  1.12566E-09  7.06105E-10  7.61820E-09  1.43936E-08  1.29181E-08  7.91795E-09  3.04999E-09
 16.100  6.19549E-10  1.21424E-09  1.20351E-09  9.13514E-10  5.82458E-10  5.63670E-09  1.06854E-08  9.66703E-09  6.01175E-09  2.39186E-09
 16.200  4.86164E-10  9.56228E-10  9.55653E-10  7.34598E-10  4.75543E-10  4.15191E-09  7.89610E-09  7.19899E-09  4.54009E-09  1.86255E-09
 16.300  3.78714E-10  7.47402E-10  7.52791E-10  5.85539E-10  3.84460E-10  3.04449E-09  5.80804E-09  5.33503E-09  3.41048E-09  1.44040E-09
 16.400  2.92907E-10  5.79904E-10  5.88389E-10  4.62770E-10  3.07915E-10  2.22239E-09  4.25245E-09  3.93453E-09  2.54838E-09  1.10644E-09
 16.500  2.24956E-10  4.46719E-10  4.56412E-10  3.62739E-10  2.44392E-10  1.61495E-09  3.09912E-09  2.88762E-09  1.89418E-09  8.44304E-10
 16.600  1.71583E-10  3.41707E-10  3.51423E-10  2.82065E-10  1.92292E-10  1.16823E-09  2.24816E-09  2.10903E-09  1.40055E-09  6.40100E-10
 16.700  1.29991E-10  2.59582E-10  2.68631E-10  2.17634E-10  1.50031E-10  8.41241E-10  1.62331E-09  1.53293E-09  1.03017E-09  4.82195E-10
 16.800  9.78285E-11  1.95862E-10  2.03894E-10  1.66653E-10  1.16108E-10  6.03025E-10  1.16670E-09  1.10883E-09  7.53797E-10  3.60966E-10
 16.900  7.31438E-11  1.46803E-10  1.53686E-10  1.26675E-10  8.91469E-11  4.30298E-10  8.34648E-10  7.98189E-10  5.48719E-10  2.68548E-10
 17.000  5.43370E-11  1.09313E-10  1.15056E-10  9.55948E-11  6.79213E-11  3.05647E-10  5.94334E-10  5.71814E-10  3.97379E-10  1.98575E-10
 17.100  4.01107E-11  8.08752E-11  8.55611E-11  7.16324E-11  5.13628E-11  2.16116E-10  4.21252E-10  4.07674E-10  2.86303E-10  1.45952E-10
 17.200  2.94248E-11  5.94568E-11  6.32107E-11  5.33066E-11  3.85577E-11  1.52113E-10  2.97192E-10  2.89257E-10  2.05223E-10  1.06638E-10
 17.300  2.14531E-11  4.34383E-11  4.63979E-11  3.94010E-11  2.87387E-11  1.06576E-10  2.08697E-10  2.04255E-10  1.46356E-10  7.74572E-11
 17.400  1.55463E-11  3.15405E-11  3.38410E-11  2.89296E-11  2.12707E-11  7.43303E-11  1.45875E-10  1.43542E-10  1.03846E-10  5.59353E-11
 17.500  1.11985E-11  2.27627E-11  2.45284E-11  2.11026E-11  1.56357E-11  5.16042E-11  1.01492E-10  1.00395E-10  7.33118E-11  4.01617E-11
 17.600  8.01896E-12  1.63294E-11  1.76690E-11  1.52946E-11  1.14164E-11  3.56629E-11  7.02868E-11  6.98829E-11  5.14955E-11  2.86726E-11
 17.700  5.70864E-12  1.16452E-11  1.26506E-11  1.10152E-11  8.28084E-12  2.45337E-11  4.84511E-11  4.84131E-11  3.59904E-11  2.03551E-11
 17.800  4.04048E-12  8.25613E-12  9.00332E-12  7.88383E-12  5.96759E-12  1.68006E-11  3.32450E-11  3.33804E-11  2.50284E-11  1.43700E-11
 17.900  2.84345E-12  5.81961E-12  6.36968E-12  5.60811E-12  4.27317E-12  1.14525E-11  2.27062E-11  2.29066E-11  1.73188E-11  1.00887E-11
 18.000  1.98975E-12  4.07873E-12  4.48010E-12  3.96520E-12  3.04068E-12  7.77136E-12  1.54368E-11  1.56450E-11  1.19247E-11  7.04426E-12
 18.100  1.38457E-12  2.84247E-12  3.13288E-12  2.78688E-12  2.15032E-12  5.24943E-12  1.04465E-11  1.06351E-11  8.17019E-12  4.89185E-12
 18.200  9.58120E-13  1.96985E-12  2.17827E-12  1.94719E-12  1.51142E-12  3.52980E-12  7.03702E-12  7.19548E-12  5.57032E-12  3.37886E-12
 18.300  6.59380E-13  1.35756E-12  1.50599E-12  1.35259E-12  1.05597E-12  2.36272E-12  4.71858E-12  4.84550E-12  3.77920E-12  2.32136E-12
 18.400  4.51320E-13  9.30458E-13  1.03537E-12  9.34165E-13  7.33392E-13  1.57435E-12  3.14951E-12  3.24775E-12  2.55151E-12  1.58639E-12
 18.500  3.07247E-13  6.34264E-13  7.07887E-13  6.41515E-13  5.06377E-13  1.04429E-12  2.09261E-12  2.16669E-12  1.71429E-12  1.07842E-12
 18.600  2.08049E-13  4.30030E-13  4.81332E-13  4.38069E-13  3.47611E-13  6.89559E-13  1.38404E-12  1.43875E-12  1.14621E-12  7.29278E-13
 18.700  1.40131E-13  2.90004E-13  3.25507E-13  2.97480E-13  2.37260E-13  4.53272E-13  9.11233E-13  9.50939E-13  7.62691E-13  4.90617E-13
 18.800  9.38897E-14  1.94537E-13  2.18945E-13  2.00898E-13  1.61026E-13  2.96610E-13  5.97219E-13  6.25613E-13  5.05061E-13  3.28360E-13
 18.900  6.25792E-14  1.29813E-13  1.46483E-13  1.34933E-13  1.08675E-13  1.93221E-13  3.89642E-13  4.09684E-13  3.32857E-13  2.18641E-13
 19.000  4.14944E-14  8.61713E-14  9.74848E-14  9.01381E-14  7.29382E-14  1.25306E-13  2.53063E-13  2.67046E-13  2.18322E-13  1.44844E-13
 19.100  2.73723E-14  5.69058E-14  6.45361E-14  5.98920E-14  4.86848E-14  8.08976E-14  1.63617E-13  1.73271E-13  1.42519E-13  9.54711E-14
 19.200  1.79644E-14  3.73866E-14  4.25014E-14  3.95838E-14  3.23198E-14  5.19941E-14  1.05309E-13  1.11910E-13  9.25948E-14  6.26119E-14
 19.300  1.17303E-14  2.44375E-14  2.78455E-14  2.60241E-14  2.13404E-14  3.32682E-14  6.74760E-14  7.19490E-14  5.98757E-14  4.08573E-14
 19.400  7.62102E-15  1.58926E-14  1.81499E-14  1.70200E-14  1.40157E-14  2.11917E-14  4.30408E-14  4.60465E-14  3.85364E-14  2.65291E-14
 19.500  4.92653E-15  1.02836E-14  1.17701E-14  1.10736E-14  9.15638E-15  1.34390E-14  2.73315E-14  2.93352E-14  2.46862E-14  1.71407E-14
 19.600  3.16889E-15  6.62091E-15  7.59423E-15  7.16771E-15  5.95048E-15  8.48470E-15  1.72784E-14  1.86041E-14  1.57401E-14  1.10204E-14
 19.700  2.02825E-15  4.24162E-15  4.87531E-15  4.61583E-15  3.84694E-15  5.33309E-15  1.08744E-14  1.17452E-14  9.98938E-15  7.05084E-15
 19.800  1.29182E-15  2.70395E-15  3.11422E-15  2.95742E-15  2.47419E-15  3.33733E-15  6.81353E-15  7.38158E-15  6.31036E-15  4.48923E-15
 19.900  8.18759E-16  1.71526E-15  1.97943E-15  1.88533E-15  1.58314E-15  2.07921E-15  4.25019E-15  4.61828E-15  3.96790E-15  2.84446E-15
  67 209 200   0.100
  0.000  4.64030E-02 -2.48253E-16 -3.53884E-16 -4.12806E-16 -4.00537E-16  9.71013E-02 -5.27539E-16 -6.66134E-16 -1.07580E-15 -6.43720E-16
  0.100  4.64303E-02 -2.24639E-05 -1.72738E-08 -4.12124E-12 -1.77381E-15  9.71624E-02 -3.11108E-05  1.47889E-08  6.76830E-12  1.64506E-15
  0.200  4.65117E-02 -8.90601E-05 -2.73972E-07 -2.60668E-10 -1.37041E-13  9.73421E-02 -1.21686E-04  2.35521E-07  4.33021E-10 -7.87170E-13
  0.300  4.66467E-02 -1.97418E-04 -1.36684E-06 -2.91032E-09 -3.42775E-12  9.76299E-02 -2.63681E-04  1.18297E-06  4.91337E-09 -1.96919E-11
  0.400  4.68338E-02 -3.43639E-04 -4.23197E-06 -1.58983E-08 -3.30653E-11  9.80091E-02 -4.44431E-04  3.69693E-06  2.74457E-08 -1.90734E-10
  0.500  4.70710E-02 -5.22376E-04 -1.00611E-05 -5.84801E-08 -1.88294E-10  9.84578E-02 -6.47692E-04  8.89267E-06  1.03847E-07 -1.09173E-09
  0.600  4.73557E-02 -7.26953E-04 -2.01920E-05 -1.66972E-07 -7.65132E-10  9.89505E-02 -8.54984E-04  1.80979E-05  3.06728E-07 -4.46671E-09
  0.700  4.76842E-02 -9.49523E-04 -3.59805E-05 -3.99151E-07 -2.45354E-09  9.94597E-02 -1.04710E-03  3.27695E-05  7.62602E-07 -1.44532E-08
  0.800  4.80518E-02 -1.18127E-03 -5.86628E-05 -8.35707E-07 -6.59100E-09  9.99574E-02 -1.20570E-03  5.43906E-05  1.66906E-06 -3.92856E-08
  0.900  4.84530E-02 -1.41266E-03 -8.92169E-05 -1.57743E-06 -1.54080E-08  1.00417E-01 -1.31475E-03  8.43499E-05  3.30915E-06 -9.32525E-08
  1.000  4.88811E-02 -1.63372E-03 -1.28234E-04 -2.73734E-06 -3.21540E-08  1.00816E-01 -1.36192E-03  1.23809E-04  6.05956E-06 -1.98488E-07
  1.100  4.93284E-02 -1.83437E-03 -1.75810E-04 -4.42755E-06 -6.09531E-08  1.01136E-01 -1.33949E-03  1.73564E-04  1.03887E-05 -3.86030E-07
  1.200  4.97865E-02 -2.00482E-03 -2.31464E-04 -6.74165E-06 -1.06223E-07  1.01362E-01 -1.24505E-03  2.33913E-04  1.68410E-05 -6.95542E-07
  1.300  5.02463E-02 -2.13589E-03 -2.94090E-04 -9.73397E-06 -1.71511E-07  1.01488E-01 -1.08168E-03  3.04539E-04  2.60051E-05 -1.17321E-06
  1.400  5.06984E-02 -2.21944E-03 -3.61952E-04 -1.33978E-05 -2.57648E-07  1.01513E-01 -8.57757E-04  3.84419E-04  3.84631E-05 -1.86754E-06
  1.500  5.11333E-02 -2.24875E-03 -4.32724E-04 -1.76452E-05 -3.60233E-07  1.01444E-01 -5.86329E-04  4.71782E-04  5.47236E-05 -2.82332E-06
  1.600  5.15418E-02 -2.21882E-03 -5.03561E-04 -2.22913E-05 -4.66583E-07  1.01290E-01 -2.84146E-04  5.64102E-04  7.51393E-05 -4.07421E-06
  1.700  5.19156E-02 -2.12672E-03 -5.71223E-04 -2.70447E-05 -5.52419E-07  1.01069E-01  2.95796E-05  6.58165E-04  9.98168E-05 -5.63523E-06
  1.800  5.22472E-02 -1.97177E-03 -6.32226E-04 -3.15080E-05 -5.78709E-07  1.00799E-01  3.34587E-04  7.50180E-04  1.28527E-04 -7.49641E-06
  1.900  5.25306E-02 -1.75572E-03 -6.83013E-04 -3.51874E-05 -4.89196E-07  1.00502E-01  6.11049E-04  8.35956E-04  1.60624E-04 -9.61928E-06
  2.000  5.27618E-02 -1.48276E-03 -7.20154E-04 -3.75135E-05 -2.09174E-07  1.00201E-01  8.41022E-04  9.11128E-04  1.94990E-04 -1.19376E-05
  2.100  5.29383E-02 -1.15946E-03 -7.40534E-04 -3.78715E-05  3.53935E-07  9.99172E-02  1.00974E-03  9.71416E-04  2.30007E-04 -1.43634E-05
  2.200  5.30599E-02 -7.94604E-04 -7.41545E-04 -3.56391E-05  1.30778E-06  9.96691E-02  1.10667E-03  1.01291E-03  2.63580E-04 -1.67986E-05
  2.300  5.31283E-02 -3.98917E-04 -7.21257E-04 -3.02298E-05  2.76978E-06  9.94727E-02  1.12631E-03  1.03236E-03  2.93203E-04 -1.91513E-05
  2.400  5.31476E-02  1.53364E-05 -6.78553E-04 -2.11380E-05  4.85944E-06  9.93392E-02  1.06853E-03  1.02744E-03  3.16083E-04 -2.13561E-05
  2.500  5.31232E-02  4.34801E-04 -6.13239E-04 -7.98159E-06  7.68848E-06  9.92750E-02  9.38664E-04  9.96971E-04  3.29308E-04 -2.33944E-05
  2.600  5.30626E-02  8.45564E-04 -5.26103E-04  9.46070E-06  1.13495E-05  9.92809E-02  7.47098E-04  9.41102E-04  3.30064E-04 -2.53129E-05
  2.700  5.29744E-02  1.23373E-03 -4.18926E-04  3.12205E-05  1.59042E-05  9.93526E-02  5.08610E-04  8.61399E-04  3.15876E-04 -2.72356E-05
  2.800  5.28682E-02  1.58600E-03 -2.94449E-04  5.71224E-05  2.13719E-05  9.94808E-02  2.41347E-04  7.60855E-04  2.84857E-04 -2.93666E-05
  2.900  5.27539E-02  1.89029E-03 -1.56295E-04  8.67788E-05  2.77202E-05  9.96523E-02 -3.44013E-05  6.43800E-04  2.35944E-04 -3.19802E-05
  3.000  5.26417E-02  2.13622E-03 -8.84344E-06  1.19597E-04  3.48578E-05  9.98505E-02 -2.97576E-04  5.15723E-04  1.69108E-04 -3.53984E-05
  3.100  5.25412E-02  2.31568E-03  1.42928E-04  1.54800E-04  4.26319E-05  1.00057E-01 -5.27771E-04  3.83003E-04  8.54890E-05 -3.99534E-05
  3.200  5.24611E-02  2.42317E-03  2.93633E-04  1.91451E-04  5.08298E-05  1.00253E-01 -7.06603E-04  2.52556E-04 -1.25319E-05 -4.59406E-05
  3.300  5.24089E-02  2.45615E-03  4.37687E-04  2.28495E-04  5.91845E-05  1.00418E-01 -8.18923E-04  1.31437E-04 -1.21362E-04 -5.35635E-05
  3.400  5.23903E-02  2.41526E-03  5.69530E-04  2.64797E-04  6.73854E-05  1.00537E-01 -8.53808E-04  2.63988E-05 -2.36320E-04 -6.28773E-05
  3.500  5.24090E-02  2.30433E-03  6.83856E-04  2.99180E-04  7.50923E-05  1.00593E-01 -8.05223E-04 -5.65567E-05 -3.51864E-04 -7.37392E-05
  3.600  5.24661E-02  2.13040E-03  7.75833E-04  3.30471E-04  8.19517E-05  1.00577E-01 -6.72335E-04 -1.12599E-04 -4.61898E-04 -8.57714E-05
  3.700  5.25603E-02  1.90348E-03  8.41317E-04  3.57533E-04  8.76146E-05  1.00480E-01 -4.59434E-04 -1.38437E-04 -5.60158E-04 -9.83441E-05
  3.800  5.26877E-02  1.63629E-03  8.77042E-04  3.79300E-04  9.17526E-05  1.00299E-01 -1.75472E-04 -1.32603E-04 -6.40631E-04 -1.10585E-04
  3.900  5.28412E-02  1.34380E-03  8.80790E-04  3.94802E-04  9.40736E-05  1.00032E-01  1.66757E-04 -9.56271E-05 -6.97993E-04 -1.21419E-04
  4.000  5.30113E-02  1.04277E-03  8.51525E-04  4.03187E-04  9.43325E-05  9.96843E-02  5.51727E-04 -3.00754E-05 -7.28021E-04 -1.29633E-04
  4.100  5.31857E-02  7.51068E-04  7.89490E-04  4.03741E-04  9.23383E-05  9.92592E-02  9.62510E-04  5.95485E-05 -7.27950E-04 -1.33974E-04
  4.200  5.33498E-02  4.87061E-04  6.96269E-04  3.95907E-04  8.79570E-05  9.87632E-02  1.38221E-03  1.67054E-04 -6.96733E-04 -1.33259E-04
  4.300  5.34870E-02  2.68889E-04  5.74793E-04  3.79304E-04  8.11092E-05  9.82025E-02  1.79540E-03  2.84950E-04 -6.35200E-04 -1.26502E-04
  4.400  5.35793E-02  1.13747E-04  4.29310E-04  3.53744E-04  7.17649E-05  9.75820E-02  2.18945E-03  4.04954E-04 -5.46077E-04 -1.13037E-04
  4.500  5.36074E-02  3.71756E-05  2.65290E-04  3.19261E-04  5.99360E-05  9.69046E-02  2.55561E-03  5.18590E-04 -4.33866E-04 -9.26242E-05
  4.600  5.35517E-02  5.24036E-05  8.92857E-05  2.76130E-04  4.56679E-05  9.61701E-02  2.88978E-03  6.17834E-04 -3.04599E-04 -6.55343E-05
  4.700  5.33929E-02  1.69752E-04 -9.12619E-05  2.24902E-04  2.90326E-05  9.53750E-02  3.19295E-03  6.95774E-04 -1.65470E-04 -3.25923E-05
  4.800  5.31128E-02  3.96139E-04 -2.68269E-04  1.66425E-04  1.01250E-05  9.45115E-02  3.47113E-03  7.47210E-04 -2.43684E-05  4.82290E-06
  4.900  5.26946E-02  7.34712E-04 -4.33299E-04  1.01862E-04 -1.09365E-05  9.35686E-02  3.73490E-03  7.69173E-04  1.10638E-04  4.48281E-05
  5.000  5.21240E-02  1.18461E-03 -5.77883E-04  3.27098E-05 -3.40053E-05  9.25316E-02  3.99859E-03  7.61291E-04  2.31849E-04  8.51342E-05
  5.100  5.13897E-02  1.74089E-03 -6.93878E-04 -3.92122E-05 -5.88963E-05  9.13835E-02  4.27909E-03  7.25985E-04  3.32456E-04  1.23186E-04
  5.200  5.04836E-02  2.39463E-03 -7.73817E-04 -1.11780E-04 -8.53720E-05  9.01058E-02  4.59442E-03  6.68454E-04  4.07010E-04  1.56338E-04
  5.300  4.94016E-02  3.13314E-03 -8.11270E-04 -1.82612E-04 -1.13126E-04  8.86797E-02  4.96222E-03  5.96451E-04  4.51791E-04  1.82043E-04
  5.400  4.81437E-02  3.94044E-03 -8.01168E-04 -2.49133E-04 -1.41770E-04  8.70874E-02  5.39814E-03  5.19856E-04  4.65060E-04  1.98049E-04
  5.500  4.67141E-02  4.79776E-03 -7.40086E-04 -3.08669E-04 -1.70815E-04  8.53133E-02  5.91449E-03  4.50063E-04  4.47171E-04  2.02583E-04
  5.600  4.51209E-02  5.68422E-03 -6.26468E-04 -3.58559E-04 -1.99674E-04  8.33457E-02  6.51896E-03  3.99228E-04  4.00534E-04  1.94500E-04
  5.700  4.33764E-02  6.57760E-03 -4.60764E-04 -3.96278E-04 -2.27654E-04  8.11768E-02  7.21375E-03  3.79431E-04  3.29429E-04  1.73389E-04
  5.800  4.14961E-02  7.45519E-03 -2.45489E-04 -4.19580E-04 -2.53974E-04  7.88044E-02  7.99507E-03  4.01808E-04  2.39704E-04  1.39635E-04
  5.900  3.94987E-02  8.29455E-03  1.48269E-05 -4.26628E-04 -2.77788E-04  7.62317E-02  8.85306E-03  4.75732E-04  1.38356E-04  9.44066E-05
  6.000  3.74053E-02  9.07441E-03  3.13784E-04 -4.16119E-04 -2.98217E-04  7.34680E-02  9.77209E-03  6.08082E-04  3.30470E-05  3.95994E-05
  6.100  3.52384E-02  9.77536E-03  6.43352E-04 -3.87391E-04 -3.14393E-04  7.05276E-02  1.07315E-02  8.02684E-04 -6.84140E-05 -2.22823E-05
  6.200  3.30220E-02  1.03806E-02  9.94196E-04 -3.40495E-04 -3.25509E-04  6.74303E-02  1.17067E-02  1.05994E-03 -1.58590E-04 -8.82856E-05
  6.300  3.07799E-02  1.08763E-02  1.35607E-03 -2.76233E-04 -3.30875E-04  6.42000E-02  1.26703E-02  1.37671E-03 -2.30888E-04 -1.55200E-04
  6.400  2.85358E-02  1.12522E-02  1.71826E-03 -1.96153E-04 -3.29963E-04  6.08640E-02  1.35937E-02  1.74638E-03 -2.79964E-04 -2.19764E-04
  6.500  2.63123E-02  1.15019E-02  2.07003E-03 -1.02501E-04 -3.22459E-04  5.74520E-02  1.44488E-02  2.15924E-03 -3.02020E-04 -2.78872E-04
  6.600  2.41303E-02  1.16227E-02  2.40111E-03  1.86910E-06 -3.08295E-04  5.39952E-02  1.52088E-02  2.60295E-03 -2.94994E-04 -3.29762E-04
  6.700  2.20088E-02  1.16156E-02  2.70211E-03  1.13626E-04 -2.87667E-04  5.05248E-02  1.58501E-02  3.06328E-03 -2.58615E-04 -3.70177E-04
  6.800  1.99644E-02  1.14852E-02  2.96489E-03  2.29114E-04 -2.61046E-04  4.70714E-02  1.63533E-02  3.52491E-03 -1.94346E-04 -3.98481E-04
  6.900  1.80111E-02  1.12393E-02  3.18287E-03  3.44537E-04 -2.29161E-04  4.36641E-02  1.67039E-02  3.97222E-03 -1.05210E-04 -4.13734E-04
  7.000  1.61603E-02  1.08883E-02  3.35127E-03  4.56134E-04 -1.92967E-04  4.03297E-02  1.68925E-02  4.39017E-03  4.47320E-06 -4.15711E-04
  7.100  1.44204E-02  1.04450E-02  3.46718E-03  5.60366E-04 -1.53603E-04  3.70919E-02  1.69156E-02  4.76505E-03  1.29420E-04 -4.04876E-04
  7.200  1.27975E-02  9.92354E-03  3.52966E-03  6.54076E-04 -1.12335E-04  3.39717E-02  1.67751E-02  5.08510E-03  2.63750E-04 -3.82310E-04
  7.300  1.12950E-02  9.33920E-03  3.53959E-03  7.34627E-04 -7.04867E-05  3.09861E-02  1.64781E-02  5.34108E-03  4.01373E-04 -3.49610E-04
  7.400  9.91420E-03  8.70763E-03  3.49958E-03  8.00007E-04 -2.93729E-05  2.81491E-02  1.60360E-02  5.52653E-03  5.36348E-04 -3.08754E-04
  7.500  8.65417E-03  8.04434E-03  3.41368E-03  8.48892E-04  9.76578E-06  2.54710E-02  1.54641E-02  5.63795E-03  6.63212E-04 -2.61961E-04
  7.600  7.51239E-03  7.36419E-03  3.28717E-03  8.80667E-04  4.58241E-05  2.29589E-02  1.47805E-02  5.67477E-03  7.77247E-04 -2.11546E-04
  7.700  6.48484E-03  6.68100E-03  3.12619E-03  8.95413E-04  7.78812E-05  2.06166E-02  1.40052E-02  5.63916E-03  8.74675E-04 -1.59782E-04
  7.800  5.56631E-03  6.00716E-03  2.93745E-03  8.93848E-04  1.05237E-04  1.84456E-02  1.31591E-02  5.53572E-03  9.52775E-04 -1.08776E-04
  7.900  4.75071E-03  5.35346E-03  2.72789E-03  8.77248E-04  1.27430E-04  1.64446E-02  1.22632E-02  5.37105E-03  1.00993E-03 -6.03783E-05
  8.000  4.03130E-03  4.72887E-03  2.50437E-03  8.47334E-04  1.44248E-04  1.46103E-02  1.13379E-02  5.15326E-03  1.04559E-03 -1.61052E-05
  8.100  3.40093E-03  4.14053E-03  2.27345E-03  8.06157E-04  1.55713E-04  1.29377E-02  1.04023E-02  4.89152E-03  1.06021E-03  2.28972E-05
  8.200  2.85221E-03  3.59371E-03  2.04113E-03  7.55968E-04  1.62059E-04  1.14203E-02  9.47334E-03  4.59548E-03  1.05506E-03  5.58693E-05
  8.300  2.37775E-03  3.09194E-03  1.81267E-03  6.99094E-04  1.63702E-04  1.00504E-02  8.56613E-03  4.27486E-03  1.03212E-03  8.24257E-05
  8.400  1.97023E-03  2.63713E-03  1.59256E-03  6.37829E-04  1.61197E-04  8.81977E-03  7.69314E-03  3.93903E-03  9.93849E-04  1.02523E-04
  8.500  1.62256E-03  2.22976E-03  1.38436E-03  5.74330E-04  1.55196E-04  7.71922E-03  6.86434E-03  3.59667E-03  9.43010E-04  1.16413E-04
  8.600  1.32799E-03  1.86905E-03  1.19077E-03  5.10546E-04  1.46403E-04  6.73942E-03  6.08722E-03  3.25551E-03  8.82503E-04  1.24582E-04
  8.700  1.08012E-03  1.55324E-03  1.01362E-03  4.48155E-04  1.35531E-04  5.87085E-03  5.36692E-03  2.92219E-03  8.15193E-04  1.27688E-04
  8.800  8.73017E-04  1.27977E-03  8.53944E-04  3.88537E-04  1.23272E-04  5.10402E-03  4.70641E-03  2.60215E-03  7.43784E-04  1.26502E-04
  8.900  7.01205E-04  1.04551E-03  7.12090E-04  3.32753E-04  1.10258E-04  4.42962E-03  4.10677E-03  2.29962E-03  6.70720E-04  1.21844E-04
  9.000  5.59698E-04  8.46962E-04  5.87809E-04  2.81556E-04  9.70464E-05  3.83866E-03  3.56744E-03  2.01764E-03  5.98109E-04  1.14533E-04
  9.100  4.43999E-04  6.80435E-04  4.80378E-04  2.35410E-04  8.41025E-05  3.32254E-03  3.08660E-03  1.75819E-03  5.27691E-04  1.05349E-04
  9.200  3.50099E-04  5.42201E-04  3.88719E-04  1.94519E-04  7.17938E-05  2.87315E-03  2.66136E-03  1.52230E-03  4.60825E-04  9.49951E-05
  9.300  2.74453E-04  4.28614E-04  3.11507E-04  1.58870E-04  6.03900E-05  2.48292E-03  2.28812E-03  1.31017E-03  3.98499E-04  8.40823E-05
  9.400  2.13965E-04  3.36209E-04  2.47267E-04  1.28272E-04  5.00691E-05  2.14484E-03  1.96279E-03  1.12132E-03  3.41360E-04  7.31147E-05
  9.500  1.65952E-04  2.61771E-04  1.94465E-04  1.02403E-04  4.09266E-05  1.85253E-03  1.68101E-03  9.54789E-04  2.89755E-04  6.24881E-05
  9.600  1.28118E-04  2.02381E-04  1.51577E-04  8.08515E-05  3.29890E-05  1.60017E-03  1.43833E-03  8.09216E-04  2.43780E-04  5.24941E-05
  9.700  9.85160E-05  1.55438E-04  1.17141E-04  6.31502E-05  2.62270E-05  1.38256E-03  1.23037E-03  6.82998E-04  2.03328E-04  4.33290E-05
  9.800  7.55116E-05  1.18668E-04  8.98019E-05  4.88121E-05  2.05697E-05  1.19504E-03  1.05293E-03  5.74391E-04  1.68145E-04  3.51067E-05
  9.900  5.77488E-05  9.01167E-05  6.83317E-05  3.73542E-05  1.59184E-05  1.03352E-03  9.02055E-04  4.81593E-04  1.37868E-04  2.78735E-05
 10.000  4.41137E-05  6.81290E-05  5.16463E-05  2.83175E-05  1.21579E-05  8.94374E-04  7.74116E-04  4.02822E-04  1.12071E-04  2.16223E-05
 10.100  3.37010E-05  5.13262E-05  3.88084E-05  2.12806E-05  9.16682E-06  7.74465E-04  6.65824E-04  3.36365E-04  9.02965E-05  1.63076E-05
 10.200  2.57830E-05  3.85758E-05  2.90232E-05  1.58679E-05  6.82493E-06  6.71062E-04  5.74244E-04  2.80613E-04  7.20802E-05  1.18577E-05
 10.300  1.97812E-05  2.89610E-05  2.16297E-05  1.17530E-05  5.01926E-06  5.81813E-04  4.96791E-04  2.34083E-04  5.69722E-05  8.18570E-06
 10.400  1.52403E-05  2.17492E-05  1.60872E-05  8.65934E-06  3.64758E-06  5.04696E-04  4.31216E-04  1.95435E-04  4.45498E-05  5.19852E-06
 10.500  1.18056E-05  1.63627E-05  1.19611E-05  6.35757E-06  2.62055E-06  4.37982E-04  3.75585E-04  1.63470E-04  3.44254E-05  2.80312E-06
 10.600  9.20402E-06  1.23514E-05  8.90713E-06  4.66125E-06  1.86231E-06  3.80195E-04  3.28249E-04  1.37131E-04  2.62507E-05  9.11295E-07
 10.700  7.22694E-06  9.36862E-06  6.65692E-06  3.42180E-06  1.31020E-06  3.30078E-04  2.87816E-04  1.15494E-04  1.97176E-05 -5.57447E-07
 10.800  5.71666E-06  7.15040E-06  5.00381E-06  2.52286E-06  9.13702E-07  2.86562E-04  2.53120E-04  9.77625E-05  1.45566E-05 -1.67441E-06
 10.900  4.55489E-06  5.49755E-06  3.79080E-06  1.87484E-06  6.32953E-07  2.48735E-04  2.23193E-04  8.32496E-05  1.05344E-05 -2.50129E-06
 11.000  3.65358E-06  4.26120E-06  2.89996E-06  1.40974E-06  4.37149E-07  2.15824E-04  1.97237E-04  7.13732E-05  7.45019E-06 -3.09052E-06
 11.100  2.94757E-06  3.33095E-06  2.24363E-06  1.07670E-06  3.02890E-07  1.87167E-04  1.74596E-04  6.16416E-05  5.13232E-06 -3.48605E-06
 11.200  2.38887E-06  2.62552E-06  1.75721E-06  8.38117E-07  2.12660E-07  1.62200E-04  1.54737E-04  5.36428E-05  3.43443E-06 -3.72448E-06
 11.300  1.94220E-06  2.08537E-06  1.39351E-06  6.66459E-07  1.53505E-07  1.40440E-04  1.37226E-04  4.70350E-05  2.23226E-06 -3.83614E-06
 11.400  1.58164E-06  1.66714E-06  1.11825E-06  5.41774E-07  1.15927E-07  1.21472E-04  1.21712E-04  4.15368E-05  1.42072E-06 -3.84625E-06
 11.500  1.28812E-06  1.33934E-06  9.06747E-07  4.49714E-07  9.30001E-08  1.04938E-04  1.07910E-04  3.69188E-05  9.11305E-07 -3.77585E-06
 11.600  1.04752E-06  1.07917E-06  7.41291E-07  3.80055E-07  7.96978E-08  9.05313E-05  9.55905E-05  3.29962E-05  6.30024E-07 -3.64264E-06
 11.700  8.49292E-07  8.70191E-07  6.09296E-07  3.25589E-07  7.23901E-08  7.79835E-05  8.45674E-05  2.96215E-05  5.15508E-07 -3.46164E-06
 11.800  6.85476E-07  7.00514E-07  5.01884E-07  2.81309E-07  6.84801E-08  6.70630E-05  7.46882E-05  2.66790E-05  5.17466E-07 -3.24568E-06
 11.900  5.49973E-07  5.61562E-07  4.12855E-07  2.43819E-07  6.61457E-08  5.75677E-05  6.58271E-05  2.40787E-05  5.95304E-07 -3.00574E-06
 12.000  4.38026E-07  4.47115E-07  3.37936E-07  2.10897E-07  6.41551E-08  4.93208E-05  5.78792E-05  2.17522E-05  7.16906E-07 -2.75124E-06
 12.100  3.45853E-07  3.52625E-07  2.74216E-07  1.81168E-07  6.17327E-08  4.21680E-05  5.07559E-05  1.96483E-05  8.57515E-07 -2.49020E-06
 12.200  2.70380E-07  2.74712E-07  2.19729E-07  1.53861E-07  5.84560E-08  3.59737E-05  4.43804E-05  1.77291E-05  9.98700E-07 -2.22934E-06
 12.300  2.09059E-07  2.10806E-07  1.73151E-07  1.28620E-07  5.41724E-08  3.06186E-05  3.86854E-05  1.59674E-05  1.12740E-06 -1.97422E-06
 12.400  1.59737E-07  1.58879E-07  1.33565E-07  1.05355E-07  4.89291E-08  2.59978E-05  3.36109E-05  1.43439E-05  1.23501E-06 -1.72931E-06
 12.500  1.20559E-07  1.17270E-07  1.00299E-07  8.41303E-08  4.29102E-08  2.20190E-05  2.91024E-05  1.28451E-05  1.31657E-06 -1.49805E-06
 12.600  8.99124E-08  8.45549E-08  7.28076E-08  6.50765E-08  3.63831E-08  1.86005E-05  2.51095E-05  1.14615E-05  1.37002E-06 -1.28297E-06
 12.700  6.63792E-08  5.94683E-08  5.05957E-08  4.83259E-08  2.96517E-08  1.56705E-05  2.15859E-05  1.01864E-05  1.39545E-06 -1.08575E-06
 12.800  4.87097E-08  4.08570E-08  3.31703E-08  3.39697E-08  2.30182E-08  1.31656E-05  1.84880E-05  9.01461E-06  1.39459E-06 -9.07316E-07
 12.900  3.58035E-08  2.76545E-08  2.00185E-08  2.20327E-08  1.67544E-08  1.10296E-05  1.57752E-05  7.94193E-06  1.37024E-06 -7.47990E-07
 13.000  2.66966E-08  1.88732E-08  1.06026E-08  1.24629E-08  1.10821E-08  9.21332E-06  1.34091E-05  6.96447E-06  1.32585E-06 -6.07540E-07
 13.100  2.05519E-08  1.36054E-08  4.36707E-09  5.13235E-09  6.16136E-09  7.67331E-06  1.13542E-05  6.07831E-06  1.26518E-06 -4.85310E-07
 13.200  1.66526E-08  1.10295E-08  7.52890E-10 -1.52663E-10  2.08785E-09  6.37140E-06  9.57697E-06  5.27932E-06  1.19202E-06 -3.80312E-07
 13.300  1.43944E-08  1.04167E-08 -7.85056E-10 -3.63645E-09 -1.10472E-09  5.27415E-06  8.04662E-06  4.56303E-06  1.11002E-06 -2.91317E-07
 13.400  1.32786E-08  1.11374E-08 -7.60363E-10 -5.59576E-09 -3.43681E-09  4.35225E-06  6.73451E-06  3.92462E-06  1.02249E-06 -2.16935E-07
 13.500  1.29033E-08  1.26641E-08  3.60133E-10 -6.32131E-09 -4.97253E-09  3.58014E-06  5.61442E-06  3.35900E-06  9.32364E-07 -1.55691E-07
 13.600  1.29545E-08  1.45703E-08  2.16795E-09 -6.10085E-09 -5.80761E-09  2.93559E-06  4.66237E-06  2.86083E-06  8.42143E-07 -1.06080E-07
 13.700  1.31960E-08  1.65271E-08  4.32019E-09 -5.20486E-09 -6.05736E-09  2.39929E-06  3.85668E-06  2.42467E-06  7.53867E-07 -6.66168E-08
 13.800  1.34584E-08  1.82950E-08  6.54234E-09 -3.87575E-09 -5.84551E-09  1.95454E-06  3.17779E-06  2.04504E-06  6.69137E-07 -3.58778E-08
 13.900  1.36291E-08  1.97145E-08  8.62705E-09 -2.32070E-09 -5.29476E-09  1.58697E-06  2.60820E-06  1.71653E-06  5.89148E-07 -1.25262E-08
 14.000  1.36412E-08  2.06940E-08  1.04296E-08 -7.08018E-10 -4.51939E-09  1.28421E-06  2.13235E-06  1.43388E-06  5.14728E-07  4.66687E-09
 14.100  1.34641E-08  2.11976E-08  1.18608E-08  8.33395E-10 -3.62002E-09  1.03570E-06  1.73652E-06  1.19206E-06  4.46385E-07  1.68102E-08
 14.200  1.30938E-08  2.12323E-08  1.28785E-08  2.21208E-09 -2.68054E-09  8.32430E-07  1.40865E-06  9.86324E-07  3.84359E-07  2.48872E-08
 14.300  1.25454E-08  2.08368E-08  1.34782E-08  3.37024E-09 -1.76680E-09  6.66745E-07  1.13822E-06  8.12251E-07  3.28674E-07  2.97554E-08
 14.400  1.18464E-08  2.00701E-08  1.36838E-08  4.27873E-09 -9.26913E-10  5.32175E-07  9.16093E-07  6.65763E-07  2.79180E-07  3.21502E-08
 14.500  1.10305E-08  1.90030E-08  1.35389E-08  4.93156E-09 -1.92574E-10  4.23269E-07  7.34419E-07  5.43146E-07  2.35598E-07  3.26918E-08
 14.600  1.01339E-08  1.77102E-08  1.30991E-08  5.34028E-09  4.18769E-10  3.35450E-07  5.86451E-07  4.41051E-07  1.97560E-07  3.18940E-08
 14.700  9.19193E-09  1.62649E-08  1.24253E-08  5.52866E-09  9.01395E-10  2.64894E-07  4.66441E-07  3.56487E-07  1.64637E-07  3.01749E-08
 14.800  8.23651E-09  1.47345E-08  1.15789E-08  5.52810E-09  1.25865E-09  2.08416E-07  3.69512E-07  2.86803E-07  1.36367E-07  2.78677E-08
 14.900  7.29514E-09  1.31778E-08  1.06177E-08  5.37359E-09  1.50035E-09  1.63376E-07  2.91555E-07  2.29676E-07  1.12277E-07  2.52318E-08
 15.000  6.39009E-09  1.16439E-08  9.59344E-09  5.10067E-09  1.64053E-09  1.27593E-07  2.29120E-07  1.83080E-07  9.19007E-08  2.24641E-08
 15.100  5.53824E-09  1.01715E-08  8.55022E-09  4.74309E-09  1.69541E-09  9.92720E-08  1.79327E-07  1.45264E-07  7.47870E-08  1.97089E-08
 15.200  4.75137E-09  8.78925E-09  7.52387E-09  4.33123E-09  1.68185E-09  7.69432E-08  1.39784E-07  1.14729E-07  6.05125E-08  1.70673E-08
 15.300  4.03667E-09  7.51648E-09  6.54194E-09  3.89121E-09  1.61614E-09  5.94073E-08  1.08514E-07  9.01953E-08  4.86862E-08  1.46062E-08
 15.400  3.39737E-09  6.36456E-09  5.62427E-09  3.44446E-09  1.51323E-09  4.56897E-08  8.38920E-08  7.05810E-08  3.89523E-08  1.23651E-08
 15.500  2.83349E-09  5.33812E-09  4.78380E-09  3.00771E-09  1.38614E-09  3.50016E-08  6.45879E-08  5.49774E-08  3.09920E-08  1.03630E-08
 15.600  2.34256E-09  4.43638E-09  4.02762E-09  2.59332E-09  1.24580E-09  2.67074E-08  4.95183E-08  4.26257E-08  2.45232E-08  8.60330E-09
 15.700  1.92032E-09  3.65452E-09  3.35805E-09  2.20971E-09  1.10096E-09  2.02970E-08  3.78053E-08  3.28963E-08  1.92989E-08  7.07895E-09
 15.800  1.56126E-09  2.98484E-09  2.77371E-09  1.86198E-09  9.58296E-10  1.53630E-08  2.87409E-08  2.52702E-08  1.51054E-08  5.77540E-09
 15.900  1.25922E-09  2.41776E-09  2.27052E-09  1.55252E-09  8.22646E-10  1.15810E-08  2.17570E-08  1.93221E-08  1.17597E-08  4.67374E-09
 16.000  1.00773E-09  1.94275E-09  1.84255E-09  1.28156E-09  6.97229E-10  8.69411E-09  1.63998E-08  1.47056E-08  9.10608E-09  3.75277E-09
 16.100  8.00365E-10  1.54890E-09  1.48273E-09  1.04780E-09  5.83942E-10  6.49985E-09  1.23085E-08  1.11401E-08  7.01385E-09  2.99062E-09
 16.200  6.30977E-10  1.22553E-09  1.18351E-09  8.48847E-10  4.83634E-10  4.83912E-09  9.19804E-09  8.39982E-09  5.37380E-09  2.36589E-09
 16.300  4.93848E-10  9.62491E-10  9.37233E-10  6.81619E-10  3.96358E-10  3.58758E-09  6.84379E-09  6.30415E-09  4.09561E-09  1.85841E-09
 16.400  3.83793E-10  7.50447E-10  7.36519E-10  5.42690E-10  3.21599E-10  2.64848E-09  5.06992E-09  4.70929E-09  3.10513E-09  1.44971E-09
 16.500  2.96201E-10  5.80982E-10  5.74469E-10  4.28531E-10  2.58465E-10  1.94689E-09  3.73940E-09  3.50151E-09  2.34193E-09  1.12328E-09
 16.600  2.27050E-10  4.46672E-10  4.44810E-10  3.35693E-10  2.05837E-10  1.42504E-09  2.74594E-09  2.59135E-09  1.75716E-09  8.64607E-10
 16.700  1.72886E-10  3.41081E-10  3.41964E-10  2.60935E-10  1.62493E-10  1.03859E-09  2.00753E-09  1.90882E-09  1.31161E-09  6.61205E-10
 16.800  1.30782E-10  2.58718E-10  2.61066E-10  2.01300E-10  1.27196E-10  7.53673E-10  1.46120E-09  1.39950E-09  9.73999E-10  5.02447E-10
 16.900  9.82970E-11  1.94961E-10  1.97947E-10  1.54155E-10  9.87559E-11  5.44550E-10  1.05884E-09  1.02129E-09  7.19592E-10  3.79428E-10
 17.000  7.34141E-11  1.45972E-10  1.49084E-10  1.17207E-10  7.60702E-11  3.91743E-10  7.63866E-10  7.41809E-10  5.28927E-10  2.84772E-10
 17.100  5.44889E-11  1.08602E-10  1.11546E-10  8.84915E-11  5.81471E-11  2.80586E-10  5.48615E-10  5.36296E-10  3.86809E-10  2.12439E-10
 17.200  4.01947E-11  8.02963E-11  8.29214E-11  6.63536E-11  4.41157E-11  2.00092E-10  3.92263E-10  3.85912E-10  2.81448E-10  1.57534E-10
 17.300  2.94712E-11  5.90045E-11  6.12515E-11  4.94201E-11  3.32272E-11  1.42065E-10  2.79219E-10  2.76402E-10  2.03755E-10  1.16134E-10
 17.400  2.14799E-11  4.30967E-11  4.49623E-11  3.65657E-11  2.48488E-11  1.00423E-10  1.97864E-10  1.97047E-10  1.46769E-10  8.51167E-11
 17.500  1.55634E-11  3.12902E-11  3.28023E-11  2.68800E-11  1.84543E-11  7.06745E-11  1.39586E-10  1.39820E-10  1.05194E-10  6.20261E-11
 17.600  1.12112E-11  2.25847E-11  2.37860E-11  1.96344E-11  1.36124E-11  4.95197E-11  9.80328E-11  9.87526E-11  7.50202E-11  4.49434E-11
 17.700  8.02968E-12  1.62066E-11  1.71451E-11  1.42523E-11  9.97413E-12  3.45441E-11  6.85412E-11  6.94235E-11  5.32367E-11  3.23829E-11
 17.800  5.71844E-12  1.15630E-11  1.22855E-11  1.02818E-11  7.26064E-12  2.39911E-11  4.77071E-11  4.85787E-11  3.75921E-11  2.32033E-11
 17.900  4.04965E-12  8.20325E-12  8.75215E-12  7.37259E-12  5.25152E-12  1.65884E-11  3.30572E-11  3.38354E-11  2.64146E-11  1.65345E-11
 18.000  2.85195E-12  5.78709E-12  6.19920E-12  5.25494E-12  3.77445E-12  1.14192E-11  2.28035E-11  2.34576E-11  1.84697E-11  1.17183E-11
 18.100  1.99746E-12  4.05996E-12  4.36602E-12  3.72350E-12  2.69603E-12  7.82615E-12  1.56599E-11  1.61878E-11  1.28515E-11  8.26018E-12
 18.200  1.39140E-12  2.83267E-12  3.05770E-12  2.62302E-12  1.91400E-12  5.33995E-12  1.07061E-11  1.11196E-11  8.89880E-12  5.79146E-12
 18.300  9.64011E-13  1.96565E-12  2.12955E-12  1.83719E-12  1.35065E-12  3.62748E-12  7.28670E-12  7.60308E-12  6.13205E-12  4.03905E-12
 18.400  6.64344E-13  1.35668E-12  1.47499E-12  1.27949E-12  9.47466E-13  2.45332E-12  4.93728E-12  5.17479E-12  4.20515E-12  2.80208E-12
 18.500  4.55413E-13  9.31386E-13  1.01608E-12  8.86088E-13  6.60756E-13  1.65189E-12  3.33046E-12  3.50593E-12  2.86991E-12  1.93381E-12
 18.600  3.10556E-13  6.36041E-13  6.96183E-13  6.10245E-13  4.58150E-13  1.10737E-12  2.23657E-12  2.36442E-12  1.94928E-12  1.32768E-12
 18.700  2.10676E-13  4.32079E-13  4.74460E-13  4.17969E-13  3.15859E-13  7.39077E-13  1.49529E-12  1.58732E-12  1.31767E-12  9.06849E-13
 18.800  1.42184E-13  2.92001E-13  3.21646E-13  2.84722E-13  2.16536E-13  4.91103E-13  9.95261E-13  1.06077E-12  8.86491E-13  6.16250E-13
 18.900  9.54691E-14  1.96320E-13  2.16909E-13  1.92911E-13  1.47619E-13  3.24895E-13  6.59505E-13  7.05676E-13  5.93586E-13  4.16652E-13
 19.000  6.37779E-14  1.31318E-13  1.45519E-13  1.30010E-13  1.00083E-13  2.13996E-13  4.35084E-13  4.67325E-13  3.95589E-13  2.80285E-13
 19.100  4.23924E-14  8.73940E-14  9.71228E-14  8.71567E-14  6.74850E-14  1.40333E-13  2.85762E-13  3.08083E-13  2.62399E-13  1.87607E-13
 19.200  2.80371E-14  5.78696E-14  6.44914E-14  5.81232E-14  4.52592E-14  9.16249E-14  1.86860E-13  2.02187E-13  1.73239E-13  1.24951E-13
 19.300  1.84510E-14  3.81283E-14  4.26066E-14  3.85605E-14  3.01914E-14  5.95614E-14  1.21650E-13  1.32095E-13  1.13842E-13  8.28089E-14
 19.400  1.20827E-14  2.49970E-14  2.80069E-14  2.54506E-14  2.00336E-14  3.85495E-14  7.88483E-14  8.59142E-14  7.44626E-14  5.46109E-14
 19.500  7.87369E-15  1.63074E-14  1.83181E-14  1.67123E-14  1.32237E-14  2.48415E-14  5.08821E-14  5.56286E-14  4.84800E-14  3.58392E-14
 19.600  5.10596E-15  1.05866E-14  1.19218E-14  1.09187E-14  8.68328E-15  1.59384E-14  3.26912E-14  3.58584E-14  3.14182E-14  2.34059E-14
 19.700  3.29515E-15  6.83931E-15  7.72072E-15  7.09776E-15  5.67250E-15  1.01818E-14  2.09120E-14  2.30115E-14  2.02676E-14  1.52122E-14
 19.800  2.11632E-15  4.39711E-15  4.97563E-15  4.59095E-15  3.68673E-15  6.47621E-15  1.33187E-14  1.47018E-14  1.30146E-14  9.83947E-15
 19.900  1.35273E-15  2.81342E-15  3.19098E-15  2.95481E-15  2.38398E-15  4.10142E-15  8.44566E-15  9.35117E-15  8.31912E-15  6.33392E-15
  67 210 200   0.100
  0.000  4.61407E-02 -2.32738E-16 -3.74700E-16 -5.25389E-16 -5.22129E-16  9.61464E-02 -5.12023E-16 -6.66134E-16 -1.05078E-15 -1.20161E-15
  0.100  4.61683E-02 -2.25958E-05 -1.73413E-08 -3.85917E-12 -1.98838E-15  9.62130E-02 -2.99658E-05  1.57217E-08  5.41578E-12 -6.29415E-15
  0.200  4.62507E-02 -8.95770E-05 -2.74986E-07 -2.43916E-10 -1.32656E-13  9.64089E-02 -1.17183E-04  2.50225E-07  3.46659E-10 -7.67372E-13
  0.300  4.63871E-02 -1.98541E-04 -1.37143E-06 -2.72065E-09 -3.29593E-12  9.67232E-02 -2.53836E-04  1.25558E-06  3.93439E-09 -1.91493E-11
  0.400  4.65760E-02 -3.45542E-04 -4.24419E-06 -1.48417E-08 -3.17261E-11  9.71384E-02 -4.27619E-04  3.91857E-06  2.19851E-08 -1.85243E-10
  0.500  4.68150E-02 -5.25173E-04 -1.00841E-05 -5.44945E-08 -1.80244E-10  9.76316E-02 -6.22758E-04  9.41019E-06  8.32199E-08 -1.05980E-09
  0.600  4.71012E-02 -7.30700E-04 -2.02234E-05 -1.55236E-07 -7.30203E-10  9.81759E-02 -8.21317E-04  1.91144E-05  2.45901E-07 -4.33384E-09
  0.700  4.74305E-02 -9.54219E-04 -3.60059E-05 -3.70052E-07 -2.33266E-09  9.87422E-02 -1.00468E-03  3.45364E-05  6.11588E-07 -1.40141E-08
  0.800  4.77980E-02 -1.18688E-03 -5.86473E-05 -7.72144E-07 -6.23669E-09  9.93008E-02 -1.15509E-03  5.71925E-05  1.33887E-06 -3.80608E-08
  0.900  4.81978E-02 -1.41912E-03 -8.90964E-05 -1.45151E-06 -1.44944E-08  9.98237E-02 -1.25711E-03  8.84842E-05  2.65470E-06 -9.02526E-08
  1.000  4.86231E-02 -1.64097E-03 -1.27908E-04 -2.50659E-06 -3.00267E-08  1.00286E-01 -1.29891E-03  1.29563E-04  4.86040E-06 -1.91859E-07
  1.100  4.90662E-02 -1.84242E-03 -1.75133E-04 -4.03084E-06 -5.63974E-08  1.00666E-01 -1.27323E-03  1.81192E-04  8.32897E-06 -3.72557E-07
  1.200  4.95185E-02 -2.01370E-03 -2.30244E-04 -6.09521E-06 -9.71276E-08  1.00950E-01 -1.17803E-03  2.43616E-04  1.34908E-05 -6.69986E-07
  1.300  4.99711E-02 -2.14573E-03 -2.92091E-04 -8.72768E-06 -1.54405E-07  1.01130E-01 -1.01665E-03  3.16451E-04  2.08048E-05 -1.12745E-06
  1.400  5.04146E-02 -2.23048E-03 -3.58897E-04 -1.18923E-05 -2.27099E-07  1.01202E-01 -7.97665E-04  3.98600E-04  3.07144E-05 -1.78956E-06
  1.500  5.08399E-02 -2.26132E-03 -4.28307E-04 -1.54704E-05 -3.08097E-07  1.01173E-01 -5.34193E-04  4.88210E-04  4.35885E-05 -2.69592E-06
  1.600  5.12382E-02 -2.23336E-03 -4.97461E-04 -1.92457E-05 -3.81108E-07  1.01052E-01 -2.42975E-04  5.82683E-04  5.96498E-05 -3.87359E-06
  1.700  5.16014E-02 -2.14374E-03 -5.63124E-04 -2.28978E-05 -4.17217E-07  1.00856E-01  5.68834E-05  6.78732E-04  7.88968E-05 -5.32937E-06
  1.800  5.19226E-02 -1.99187E-03 -6.21832E-04 -2.60038E-05 -3.71624E-07  1.00605E-01  3.45319E-04  7.72503E-04  1.01026E-04 -7.04334E-06
  1.900  5.21962E-02 -1.77948E-03 -6.70075E-04 -2.80503E-05 -1.81108E-07  1.00321E-01  6.02798E-04  8.59751E-04  1.25365E-04 -8.96533E-06
  2.000  5.24184E-02 -1.51076E-03 -7.04482E-04 -2.84562E-05  2.37220E-07  1.00027E-01  8.11757E-04  9.36055E-04  1.50823E-04 -1.10158E-05
  2.100  5.25872E-02 -1.19223E-03 -7.22015E-04 -2.66049E-05  9.85300E-07  9.97465E-02  9.57893E-04  9.97083E-04  1.75877E-04 -1.30920E-05
  2.200  5.27027E-02 -8.32561E-04 -7.20155E-04 -2.18830E-05  2.18121E-06  9.94994E-02  1.03123E-03  1.03887E-03  1.98591E-04 -1.50804E-05
  2.300  5.27668E-02 -4.42344E-04 -6.97063E-04 -1.37248E-05  3.95370E-06  9.93030E-02  1.02686E-03  1.05810E-03  2.16688E-04 -1.68735E-05
  2.400  5.27837E-02 -3.36837E-05 -6.51712E-04 -1.65677E-06  6.43423E-06  9.91701E-02  9.45315E-04  1.05239E-03  2.27661E-04 -1.83911E-05
  2.500  5.27590E-02  3.80240E-04 -5.83993E-04  1.46602E-05  9.74673E-06  9.91081E-02  7.92600E-04  1.02047E-03  2.28941E-04 -1.96019E-05
  2.600  5.27001E-02  7.85693E-04 -4.94761E-04  3.53950E-05  1.39959E-05  9.91191E-02  5.79772E-04  9.62447E-04  2.18088E-04 -2.05431E-05
  2.700  5.26155E-02  1.16895E-03 -3.85850E-04  6.05198E-05  1.92547E-05  9.91995E-02  3.22224E-04  8.79813E-04  1.93021E-04 -2.13336E-05
  2.800  5.25148E-02  1.51685E-03 -2.60034E-04  8.97947E-05  2.55524E-05  9.93405E-02  3.86380E-05  7.75527E-04  1.52248E-04 -2.21775E-05
  2.900  5.24078E-02  1.81743E-03 -1.20947E-04  1.22766E-04  3.28645E-05  9.95291E-02 -2.50278E-04  6.53911E-04  9.50782E-05 -2.33553E-05
  3.000  5.23043E-02  2.06039E-03  2.70404E-05  1.58774E-04  4.11046E-05  9.97487E-02 -5.23193E-04  5.20485E-04  2.18134E-05 -2.52004E-05
  3.100  5.22139E-02  2.23763E-03  1.78976E-04  1.96979E-04  5.01213E-05  9.99803E-02 -7.59595E-04  3.81701E-04 -6.61317E-05 -2.80619E-05
  3.200  5.21450E-02  2.34367E-03  3.29511E-04  2.36388E-04  5.96986E-05  1.00204E-01 -9.41167E-04  2.44600E-04 -1.66175E-04 -3.22550E-05
  3.300  5.21049E-02  2.37590E-03  4.73109E-04  2.75891E-04  6.95613E-05  1.00400E-01 -1.05300E-03  1.16404E-04 -2.74606E-04 -3.80043E-05
  3.400  5.20990E-02  2.33487E-03  6.04258E-04  3.14309E-04  7.93849E-05  1.00551E-01 -1.08457E-03  4.07150E-06 -3.86713E-04 -4.53845E-05
  3.500  5.21307E-02  2.22432E-03  7.17694E-04  3.50426E-04  8.88096E-05  1.00641E-01 -1.03034E-03 -8.61648E-05 -4.97012E-04 -5.42670E-05
  3.600  5.22011E-02  2.05114E-03  8.08623E-04  3.83034E-04  9.74562E-05  1.00657E-01 -8.90077E-04 -1.49233E-04 -5.99555E-04 -6.42802E-05
  3.700  5.23085E-02  1.82523E-03  8.72923E-04  4.10966E-04  1.04944E-04  1.00592E-01 -6.68709E-04 -1.81611E-04 -6.88302E-04 -7.47896E-05
  3.800  5.24487E-02  1.55919E-03  9.07340E-04  4.33128E-04  1.10910E-04  1.00440E-01 -3.75794E-04 -1.81629E-04 -7.57539E-04 -8.49062E-05
  3.900  5.26146E-02  1.26788E-03  9.09649E-04  4.48518E-04  1.15020E-04  1.00201E-01 -2.46760E-05 -1.49658E-04 -8.02302E-04 -9.35241E-05
  4.000  5.27963E-02  9.67974E-04  8.78794E-04  4.56257E-04  1.16988E-04  9.98780E-02  3.68676E-04 -8.81687E-05 -8.18774E-04 -9.93900E-05
  4.100  5.29814E-02  6.77307E-04  8.14992E-04  4.55595E-04  1.16576E-04  9.94745E-02  7.87027E-04 -1.63736E-06 -8.04632E-04 -1.01202E-04
  4.200  5.31553E-02  4.14240E-04  7.19791E-04  4.45939E-04  1.13605E-04  9.89969E-02  1.21333E-03  1.03701E-04 -7.59298E-04 -9.77269E-05
  4.300  5.33012E-02  1.96943E-04  5.96087E-04  4.26866E-04  1.07952E-04  9.84513E-02  1.63217E-03  2.20243E-04 -6.84079E-04 -8.79359E-05
  4.400  5.34008E-02  4.26853E-05  4.48101E-04  3.98148E-04  9.95448E-05  9.78428E-02  2.03108E-03  3.39538E-04 -5.82176E-04 -7.11330E-05
  4.500  5.34351E-02 -3.28835E-05  2.81284E-04  3.59776E-04  8.83542E-05  9.71745E-02  2.40159E-03  4.52900E-04 -4.58555E-04 -4.70750E-05
  4.600  5.33845E-02 -1.63945E-05  1.02191E-04  3.11993E-04  7.43893E-05  9.64466E-02  2.74003E-03  5.52082E-04 -3.19683E-04 -1.60630E-05
  4.700  5.32299E-02  1.02639E-04 -8.17155E-05  2.55322E-04  5.76892E-05  9.56556E-02  3.04783E-03  6.29950E-04 -1.73149E-04  2.10053E-05
  4.800  5.29530E-02  3.31321E-04 -2.62303E-04  1.90598E-04  3.83197E-05  9.47945E-02  3.33152E-03  6.81116E-04 -2.71836E-05  6.26305E-05
  4.900  5.25377E-02  6.72990E-04 -4.31061E-04  1.18991E-04  1.63736E-05  9.38526E-02  3.60217E-03  7.02473E-04  1.09871E-04  1.06759E-04
  5.000  5.19697E-02  1.12698E-03 -5.79422E-04  4.20254E-05 -8.02415E-06  9.28158E-02  3.87460E-03  6.93582E-04  2.30122E-04  1.50883E-04
  5.100  5.12380E-02  1.68853E-03 -6.99115E-04 -3.84225E-05 -3.47057E-05  9.16675E-02  4.16610E-03  6.56882E-04  3.26664E-04  1.92189E-04
  5.200  5.03351E-02  2.34888E-03 -7.82530E-04 -1.20144E-04 -6.34467E-05  9.03899E-02  4.49506E-03  5.97678E-04  3.94053E-04  2.27742E-04
  5.300  4.92572E-02  3.09550E-03 -8.23077E-04 -2.00640E-04 -9.39489E-05  8.89646E-02  4.87939E-03  5.23922E-04  4.28687E-04  2.54691E-04
  5.400  4.80046E-02  3.91250E-03 -8.15518E-04 -2.77191E-04 -1.25824E-04  8.73742E-02  5.33495E-03  4.45768E-04  4.29060E-04  2.70489E-04
  5.500  4.65818E-02  4.78117E-03 -7.56260E-04 -3.46947E-04 -1.58578E-04  8.56039E-02  5.87415E-03  3.74952E-04  3.95873E-04  2.73088E-04
  5.600  4.49972E-02  5.68065E-03 -6.43586E-04 -4.07048E-04 -1.91607E-04  8.36418E-02  6.50470E-03  3.24015E-04  3.31983E-04  2.61119E-04
  5.700  4.32631E-02  6.58869E-03 -4.77803E-04 -4.54754E-04 -2.24189E-04  8.14807E-02  7.22877E-03  3.05440E-04  2.42213E-04  2.34014E-04
  5.800  4.13953E-02  7.48246E-03 -2.61308E-04 -4.87590E-04 -2.55504E-04  7.91183E-02  8.04243E-03  3.30759E-04  1.33021E-04  1.92082E-04
  5.900  3.94123E-02  8.33939E-03  1.45627E-06 -5.03488E-04 -2.84649E-04  7.65580E-02  8.93560E-03  4.09699E-04  1.20650E-05  1.36514E-04
  6.000  3.73349E-02  9.13795E-03  3.04134E-04 -5.00923E-04 -3.10672E-04  7.38086E-02  9.89236E-03  5.49432E-04 -1.12317E-04  6.93282E-05
  6.100  3.51857E-02  9.85849E-03  6.38695E-04 -4.79026E-04 -3.32619E-04  7.08844E-02  1.08917E-02  7.53985E-04 -2.31649E-04 -6.74659E-06
  6.200  3.29881E-02  1.04838E-02  9.95758E-04 -4.37667E-04 -3.49582E-04  6.78046E-02  1.19084E-02  1.02386E-03 -3.37872E-04 -8.84389E-05
  6.300  3.07657E-02  1.09998E-02  1.36498E-03 -3.77501E-04 -3.60754E-04  6.45925E-02  1.29146E-02  1.35587E-03 -4.23839E-04 -1.72139E-04
  6.400  2.85416E-02  1.13958E-02  1.73549E-03 -2.99973E-04 -3.65485E-04  6.12749E-02  1.38810E-02  1.74326E-03 -4.83748E-04 -2.54125E-04
  6.500  2.63379E-02  1.16648E-02  2.09637E-03 -2.07271E-04 -3.63333E-04  5.78809E-02  1.47786E-02  2.17603E-03 -5.13461E-04 -3.30791E-04
  6.600  2.41752E-02  1.18038E-02  2.43713E-03 -1.02242E-04 -3.54098E-04  5.44407E-02  1.55800E-02  2.64144E-03 -5.10701E-04 -3.98863E-04
  6.700  2.20718E-02  1.18134E-02  2.74810E-03  1.17394E-05 -3.37857E-04  5.09852E-02  1.62607E-02  3.12478E-03 -4.75121E-04 -4.55585E-04
  6.800  2.00441E-02  1.16977E-02  3.02087E-03  1.30924E-04 -3.14969E-04  4.75441E-02  1.68003E-02  3.61010E-03 -4.08243E-04 -4.98859E-04
  6.900  1.81055E-02  1.14643E-02  3.24858E-03  2.51376E-04 -2.86067E-04  4.41461E-02  1.71833E-02  4.08118E-03 -3.13273E-04 -5.27344E-04
  7.000  1.62672E-02  1.11232E-02  3.42615E-03  3.69157E-04 -2.52036E-04  4.08174E-02  1.74000E-02  4.52231E-03 -1.94827E-04 -5.40490E-04
  7.100  1.45375E-02  1.06870E-02  3.55042E-03  4.80518E-04 -2.13969E-04  3.75816E-02  1.74458E-02  4.91913E-03 -5.85766E-05 -5.38526E-04
  7.200  1.29223E-02  1.01697E-02  3.62020E-03  5.82071E-04 -1.73114E-04  3.44593E-02  1.73224E-02  5.25928E-03  8.91397E-05 -5.22394E-04
  7.300  1.14249E-02  9.58654E-03  3.63618E-03  6.70937E-04 -1.30806E-04  3.14677E-02  1.70362E-02  5.53298E-03  2.41728E-04 -4.93648E-04
  7.400  1.00467E-02  8.95323E-03  3.60079E-03  7.44860E-04 -8.84009E-05  2.86206E-02  1.65987E-02  5.73331E-03  3.92729E-04 -4.54316E-04
  7.500  8.78686E-03  8.28539E-03  3.51802E-03  8.02282E-04 -4.72074E-05  2.59287E-02  1.60250E-02  5.85645E-03  5.36165E-04 -4.06752E-04
  7.600  7.64315E-03  7.59811E-03  3.39307E-03  8.42371E-04 -8.42066E-06  2.33994E-02  1.53335E-02  5.90160E-03  6.66833E-04 -3.53470E-04
  7.700  6.61173E-03  6.90545E-03  3.23212E-03  8.65016E-04  2.69300E-05  2.10370E-02  1.45445E-02  5.87085E-03  7.80513E-04 -2.97001E-04
  7.800  5.68770E-03  6.22016E-03  3.04192E-03  8.70776E-04  5.80229E-05  1.88433E-02  1.36794E-02  5.76883E-03  8.74110E-04 -2.39746E-04
  7.900  4.86526E-03  5.55338E-03  2.82953E-03  8.60804E-04  8.42708E-05  1.68177E-02  1.27601E-02  5.60228E-03  9.45699E-04 -1.83868E-04
  8.000  4.13800E-03  4.91448E-03  2.60197E-03  8.36734E-04  1.05331E-04  1.49574E-02  1.18075E-02  5.37959E-03  9.94504E-04 -1.31203E-04
  8.100  3.49906E-03  4.31099E-03  2.36597E-03  8.00567E-04  1.21104E-04  1.32580E-02  1.08416E-02  5.11023E-03  1.02081E-03 -8.32072E-05
  8.200  2.94137E-03  3.74857E-03  2.12772E-03  7.54540E-04  1.31711E-04  1.17135E-02  9.88035E-03  4.80427E-03  1.02582E-03 -4.09273E-05
  8.300  2.45778E-03  3.23112E-03  1.89272E-03  7.00998E-04  1.37468E-04  1.03168E-02  8.93946E-03  4.47187E-03  1.01150E-03 -5.00637E-06
  8.400  2.04123E-03  2.76088E-03  1.66565E-03  6.42279E-04  1.38849E-04  9.05995E-03  8.03227E-03  4.12282E-03  9.80332E-04  2.42912E-05
  8.500  1.68483E-03  2.33860E-03  1.45029E-03  5.80608E-04  1.36442E-04  7.93420E-03  7.16947E-03  3.76628E-03  9.35186E-04  4.70350E-05
  8.600  1.38197E-03  1.96374E-03  1.24952E-03  5.18012E-04  1.30907E-04  6.93053E-03  6.35918E-03  3.41039E-03  8.79079E-04  6.35713E-05
  8.700  1.12638E-03  1.63474E-03  1.06534E-03  4.56264E-04  1.22931E-04  6.03964E-03  5.60707E-03  3.06218E-03  8.15022E-04  7.44582E-05
  8.800  9.12217E-04  1.34914E-03  8.98935E-04  3.96837E-04  1.13196E-04  5.25221E-03  4.91652E-03  2.72744E-03  7.45881E-04  8.04002E-05
  8.900  7.34045E-04  1.10392E-03  7.50754E-04  3.40888E-04  1.02340E-04  4.55901E-03  4.28893E-03  2.41068E-03  6.74262E-04  8.21852E-05
  9.000  5.86898E-04  8.95598E-04  6.20636E-04  2.89259E-04  9.09370E-05  3.95109E-03  3.72397E-03  2.11517E-03  6.02434E-04  8.06282E-05
  9.100  4.66273E-04  7.20487E-04  5.07912E-04  2.42496E-04  7.94795E-05  3.41982E-03  3.21990E-03  1.84307E-03  5.32287E-04  7.65241E-05
  9.200  3.68129E-04  5.74816E-04  4.11533E-04  2.00874E-04  6.83674E-05  2.95703E-03  2.77390E-03  1.59552E-03  4.65311E-04  7.06109E-05
  9.300  2.88881E-04  4.54876E-04  3.30178E-04  1.64439E-04  5.79067E-05  2.55506E-03  2.38230E-03  1.37277E-03  4.02611E-04  6.35438E-05
  9.400  2.25376E-04  3.57118E-04  2.62359E-04  1.33051E-04  4.83126E-05  2.20679E-03  2.04094E-03  1.17439E-03  3.44931E-04  5.58798E-05
  9.500  1.74871E-04  2.78229E-04  2.06514E-04  1.06421E-04  3.97172E-05  1.90568E-03  1.74531E-03  9.99383E-04  2.92695E-04  4.80704E-05
  9.600  1.35008E-04  2.15189E-04  1.61075E-04  8.41644E-05  3.21811E-05  1.64579E-03  1.49079E-03  8.46363E-04  2.46059E-04  4.04637E-05
  9.700  1.03774E-04  1.65292E-04  1.24534E-04  6.58299E-05  2.57055E-05  1.42177E-03  1.27282E-03  7.13661E-04  2.04959E-04  3.33108E-05
  9.800  7.94761E-05  1.26164E-04  9.54837E-05  5.09384E-05  2.02466E-05  1.22882E-03  1.08700E-03  5.99457E-04  1.69169E-04  2.67767E-05
  9.900  6.07018E-05  9.57538E-05  7.26426E-05  3.90090E-05  1.57278E-05  1.06271E-03  9.29198E-04  5.01870E-04  1.38346E-04  2.09545E-05
 10.000  4.62862E-05  7.23213E-05  5.48753E-05  2.95799E-05  1.20524E-05  9.19691E-04  7.95585E-04  4.19031E-04  1.12070E-04  1.58788E-05
 10.100  3.52798E-05  5.44097E-05  4.11961E-05  2.22234E-05  9.11299E-06  7.96519E-04  6.82698E-04  3.49144E-04  8.98872E-05  1.15406E-05
 10.200  2.69165E-05  4.08198E-05  3.07662E-05  1.65559E-05  6.80052E-06  6.90363E-04  5.87437E-04  2.90520E-04  7.13296E-05  7.89976E-06
 10.300  2.05852E-05  3.05774E-05  2.28859E-05  1.22422E-05  5.00989E-06  5.98785E-04  5.07072E-04  2.41603E-04  5.59422E-05  4.89624E-06
 10.400  1.58041E-05  2.29025E-05  1.69813E-05  8.99647E-06  3.64450E-06  5.19689E-04  4.39222E-04  2.00987E-04  4.32956E-05  2.45956E-06
 10.500  1.21969E-05  1.71785E-05  1.25897E-05  6.58084E-06  2.61877E-06  4.51285E-04  3.81837E-04  1.67412E-04  3.29951E-05  5.15808E-07
 10.600  9.47325E-06  1.29245E-05  9.34403E-06  4.80109E-06  1.85928E-06  3.92045E-04  3.33170E-04  1.39770E-04  2.46854E-05 -1.00722E-06
 10.700  7.41116E-06  9.76917E-06  6.95734E-06  3.50192E-06  1.30482E-06  3.40670E-04  2.91742E-04  1.17092E-04  1.80525E-05 -2.17657E-06
 10.800  5.84265E-06  7.42982E-06  5.20857E-06  2.56137E-06  9.05689E-07  2.96055E-04  2.56318E-04  9.85391E-05  1.28217E-05 -3.05220E-06
 10.900  4.64168E-06  5.69294E-06  3.92957E-06  1.88528E-06  6.22472E-07  2.57263E-04  2.25870E-04  8.33928E-05  8.75567E-06 -3.68615E-06
 11.000  3.71447E-06  4.39901E-06  2.99401E-06  1.40210E-06  4.24557E-07  2.23497E-04  1.99550E-04  7.10408E-05  5.65038E-06 -4.12259E-06
 11.100  2.99167E-06  3.42977E-06  2.30795E-06  1.05821E-06  2.88624E-07  1.94077E-04  1.76662E-04  6.09658E-05  3.33157E-06 -4.39838E-06
 11.200  2.42230E-06  2.69824E-06  1.80225E-06  8.13909E-07  1.97189E-07  1.68428E-04  1.56642E-04  5.27336E-05  1.65090E-06 -4.54391E-06
 11.300  1.96896E-06  2.14081E-06  1.42639E-06  6.40148E-07  1.37303E-07  1.46053E-04  1.39029E-04  4.59830E-05  4.82381E-07 -4.58418E-06
 11.400  1.60428E-06  1.71122E-06  1.14378E-06  5.15831E-07  9.94667E-08  1.26529E-04  1.23453E-04  4.04157E-05 -2.80631E-07 -4.53973E-06
 11.500  1.30819E-06  1.37597E-06  9.28039E-07  4.25775E-07  7.67445E-08  1.09494E-04  1.09615E-04  3.57874E-05 -7.28142E-07 -4.42759E-06
 11.600  1.06590E-06  1.11084E-06  7.60311E-07  3.59133E-07  6.40858E-08  9.46311E-05  9.72730E-05  3.19002E-05 -9.35741E-07 -4.26202E-06
 11.700  8.66430E-07  8.98420E-07  6.27189E-07  3.08228E-07  5.78190E-08  8.16701E-05  8.62324E-05  2.85954E-05 -9.66480E-07 -4.05516E-06
 11.800  7.01552E-07  7.26173E-07  5.19231E-07  2.67703E-07  5.52869E-08  7.03746E-05  7.63350E-05  2.57473E-05 -8.72446E-07 -3.81744E-06
 11.900  5.65012E-07  5.85091E-07  4.29857E-07  2.33894E-07  5.45894E-08  6.05390E-05  6.74515E-05  2.32576E-05 -6.96122E-07 -3.55794E-06
 12.000  4.51974E-07  4.68686E-07  3.54545E-07  2.04377E-07  5.44045E-08  5.19837E-05  5.94747E-05  2.10509E-05 -4.71562E-07 -3.28459E-06
 12.100  3.58625E-07  3.72258E-07  2.90234E-07  1.77637E-07  5.38601E-08  4.45515E-05  5.23145E-05  1.90698E-05 -2.25461E-07 -3.00432E-06
 12.200  2.81900E-07  2.92357E-07  2.34889E-07  1.52813E-07  5.24391E-08  3.81043E-05  4.58942E-05  1.72719E-05  2.18742E-08 -2.72313E-06
 12.300  2.19275E-07  2.26398E-07  1.87169E-07  1.29504E-07  4.99037E-08  3.25207E-05  4.01468E-05  1.56261E-05  2.55616E-07 -2.44615E-06
 12.400  1.68634E-07  1.72381E-07  1.46186E-07  1.07616E-07  4.62301E-08  2.76937E-05  3.50128E-05  1.41105E-05  4.65569E-07 -2.17766E-06
 12.500  1.28164E-07  1.28691E-07  1.11322E-07  8.72435E-08  4.15509E-08  2.35289E-05  3.04389E-05  1.27095E-05  6.45377E-07 -1.92114E-06
 12.600  9.62890E-08  9.39618E-08  8.21064E-08  6.85716E-08  3.61022E-08  1.99429E-05  2.63759E-05  1.14124E-05  7.91790E-07 -1.67930E-06
 12.700  7.16256E-08  6.69860E-08  5.81235E-08  5.18072E-08  3.01774E-08  1.68623E-05  2.27785E-05  1.02118E-05  9.04001E-07 -1.45414E-06
 12.800  5.29498E-08  4.66614E-08  3.89591E-08  3.71270E-08  2.40865E-08  1.42218E-05  1.96045E-05  9.10249E-06  9.83046E-07 -1.24697E-06
 12.900  3.91779E-08  3.19615E-08  2.41712E-08  2.46444E-08  1.81245E-08  1.19642E-05  1.68143E-05  8.08054E-06  1.03128E-06 -1.05853E-06
 13.000  2.93539E-08  2.19243E-08  1.32799E-08  1.43931E-08  1.25471E-08  1.00388E-05  1.43708E-05  7.14267E-06  1.05196E-06 -8.89033E-07
 13.100  2.26405E-08  1.56533E-08  5.77190E-09  6.32259E-09  7.55557E-09  8.40104E-06  1.22391E-05  6.28584E-06  1.04880E-06 -7.38235E-07
 13.200  1.83131E-08  1.23234E-08  1.11386E-09  3.04702E-10  3.28894E-09  7.01161E-06  1.03868E-05  5.50690E-06  1.02578E-06 -6.05534E-07
 13.300  1.57542E-08  1.11908E-08 -1.22975E-09 -3.85323E-09 -1.76306E-10  5.83610E-06  8.78369E-06  4.80249E-06  9.86830E-07 -4.90038E-07
 13.400  1.44475E-08  1.16009E-08 -1.77736E-09 -6.39107E-09 -2.82174E-09  4.84431E-06  7.40171E-06  4.16896E-06  9.35692E-07 -3.90636E-07
 13.500  1.39714E-08  1.29944E-08 -1.01250E-09 -7.57693E-09 -4.67833E-09  4.00990E-06  6.21511E-06  3.60234E-06  8.75805E-07 -3.06069E-07
 13.600  1.39915E-08  1.49096E-08  6.30775E-10 -7.68880E-09 -5.81558E-09  3.30989E-06  5.20029E-06  3.09840E-06  8.10224E-07 -2.34985E-07
 13.700  1.42512E-08  1.69812E-08  2.77823E-09 -6.99820E-09 -6.32986E-09  2.72432E-06  4.33582E-06  2.65270E-06  7.41585E-07 -1.75990E-07
 13.800  1.45632E-08  1.89347E-08  5.12121E-09 -5.75700E-09 -6.33299E-09  2.23590E-06  3.60228E-06  2.26072E-06  6.72094E-07 -1.27697E-07
 13.900  1.47987E-08  2.05789E-08  7.41802E-09 -4.18775E-09 -5.94205E-09  1.82971E-06  2.98228E-06  1.91787E-06  6.03539E-07 -8.87541E-08
 14.000  1.48777E-08  2.17950E-08  9.49149E-09 -2.47769E-09 -5.27091E-09  1.49290E-06  2.46026E-06  1.61962E-06  5.37320E-07 -5.78758E-08
 14.100  1.47593E-08  2.25249E-08  1.12235E-08 -7.76112E-10 -4.42389E-09  1.21446E-06  2.02241E-06  1.36156E-06  4.74480E-07 -3.38619E-08
 14.200  1.44327E-08  2.27592E-08  1.25475E-08  8.05366E-10 -3.49133E-09  9.84961E-07  1.65657E-06  1.13946E-06  4.15751E-07 -1.56111E-08
 14.300  1.39084E-08  2.25253E-08  1.34396E-08  2.19034E-09 -2.54728E-09  7.96377E-07  1.35206E-06  9.49307E-07  3.61600E-07 -2.12959E-09
 14.400  1.32117E-08  2.18758E-08  1.39093E-08  3.33353E-09 -1.64870E-09  6.41891E-07  1.09956E-06  7.87341E-07  3.12269E-07  7.46602E-09
 14.500  1.23766E-08  2.08791E-08  1.39907E-08  4.21574E-09 -8.36053E-10  5.15733E-07  8.90969E-07  6.50086E-07  2.67819E-07  1.39489E-08
 14.600  1.14407E-08  1.96112E-08  1.37342E-08  4.83842E-09 -1.34861E-10  4.13034E-07  7.19316E-07  5.34360E-07  2.28170E-07  1.79857E-08
 14.700  1.04418E-08  1.81489E-08  1.31992E-08  5.21837E-09  4.42173E-10  3.29701E-07  5.78595E-07  4.37272E-07  1.93136E-07  2.01428E-08
 14.800  9.41507E-09  1.65649E-08  1.24482E-08  5.38269E-09  8.92703E-10  2.62303E-07  4.63674E-07  3.56224E-07  1.62451E-07  2.08934E-08
 14.900  8.39153E-09  1.49245E-08  1.15425E-08  5.36454E-09  1.22224E-09  2.07974E-07  3.70183E-07  2.88900E-07  1.35798E-07  2.06270E-08
 15.000  7.39700E-09  1.32838E-08  1.05386E-08  5.19954E-09  1.44178E-09  1.64328E-07  2.94421E-07  2.33249E-07  1.12832E-07  1.96579E-08
 15.100  6.45173E-09  1.16880E-08  9.48635E-09  4.92298E-09  1.56573E-09  1.29385E-07  2.33266E-07  1.87472E-07  9.31928E-08  1.82354E-08
 15.200  5.57050E-09  1.01721E-08  8.42735E-09  4.56780E-09  1.61012E-09  1.01507E-07  1.84097E-07  1.50001E-07  7.65214E-08  1.65524E-08
 15.300  4.76304E-09  8.76112E-09  7.39498E-09  4.16330E-09  1.59123E-09  7.93471E-08  1.44723E-07  1.19478E-07  6.24696E-08  1.47546E-08
 15.400  4.03465E-09  7.47117E-09  6.41441E-09  3.73437E-09  1.52456E-09  6.17954E-08  1.13319E-07  9.47344E-08  5.07073E-08  1.29482E-08
 15.500  3.38692E-09  6.31066E-09  5.50335E-09  3.30123E-09  1.42415E-09  4.79456E-08  8.83744E-08  7.47741E-08  4.09276E-08  1.12077E-08
 15.600  2.81848E-09  5.28176E-09  4.67291E-09  2.87954E-09  1.30214E-09  3.70581E-08  6.86418E-08  5.87505E-08  3.28495E-08  9.58214E-09
 15.700  2.32571E-09  4.38172E-09  3.92868E-09  2.48072E-09  1.16862E-09  2.85323E-08  5.30973E-08  4.59497E-08  2.62199E-08  8.10060E-09
 15.800  1.90344E-09  3.60415E-09  3.27184E-09  2.11246E-09  1.03162E-09  2.18820E-08  4.09037E-08  3.57733E-08  2.08133E-08  6.77732E-09
 15.900  1.54550E-09  2.94017E-09  2.70014E-09  1.77932E-09  8.97243E-10  1.67152E-08  3.13791E-08  2.77226E-08  1.64316E-08  5.61550E-09
 16.000  1.24520E-09  2.37936E-09  2.20890E-09  1.48328E-09  7.69839E-10  1.27172E-08  2.39714E-08  2.13847E-08  1.29022E-08  4.61061E-09
 16.100  9.95715E-10  1.91058E-09  1.79182E-09  1.22440E-09  6.52299E-10  9.63624E-09  1.82349E-08  1.64195E-08  1.00764E-08  3.75295E-09
 16.200  7.90383E-10  1.52257E-09  1.44165E-09  1.00124E-09  5.46291E-10  7.27177E-09  1.38121E-08  1.25488E-08  7.82743E-09  3.02975E-09
 16.300  6.22905E-10  1.20443E-09  1.15075E-09  8.11410E-10  4.52529E-10  5.46479E-09  1.04172E-08  9.54611E-09  6.04813E-09  2.42666E-09
 16.400  4.87479E-10  9.45916E-10  9.11498E-10  6.51897E-10  3.71004E-10  4.08971E-09  7.82283E-09  7.22814E-09  4.64862E-09  1.92888E-09
 16.500  3.78883E-10  7.37671E-10  7.16594E-10  5.19383E-10  3.01196E-10  3.04777E-09  5.84908E-09  5.44754E-09  3.55417E-09  1.52198E-09
 16.600  2.92502E-10  5.71317E-10  5.59264E-10  4.10474E-10  2.42246E-10  2.26167E-09  4.35424E-09  4.08645E-09  2.70319E-09  1.19238E-09
 16.700  2.24327E-10  4.39499E-10  4.33373E-10  3.21871E-10  1.93095E-10  1.67118E-09  3.22724E-09  3.05113E-09  2.04527E-09  9.27702E-10
 16.800  1.70930E-10  3.35862E-10  3.33486E-10  2.50480E-10  1.52598E-10  1.22957E-09  2.38141E-09  2.26748E-09  1.53947E-09  7.16916E-10
 16.900  1.29416E-10  2.55001E-10  2.54877E-10  1.93486E-10  1.19597E-10  9.00753E-10  1.74951E-09  1.67724E-09  1.15279E-09  5.50377E-10
 17.000  9.73723E-11  1.92375E-10  1.93500E-10  1.48386E-10  9.29842E-11  6.57018E-10  1.27958E-09  1.23485E-09  8.58808E-10  4.19805E-10
 17.100  7.28121E-11  1.44221E-10  1.45943E-10  1.13000E-10  7.17338E-11  4.77153E-10  9.31729E-10  9.04895E-10  6.36532E-10  3.18188E-10
 17.200  5.41171E-11  1.07455E-10  1.09369E-10  8.54620E-11  5.49240E-11  3.45018E-10  6.75419E-10  6.60011E-10  4.69389E-10  2.39674E-10
 17.300  3.99822E-11  7.95756E-11  8.14432E-11  6.42011E-11  4.17458E-11  2.48383E-10  4.87434E-10  4.79152E-10  3.44384E-10  1.79434E-10
 17.400  2.93654E-11  5.85778E-11  6.02721E-11  4.79121E-11  3.15034E-11  1.78030E-10  3.50199E-10  3.46230E-10  2.51398E-10  1.33529E-10
 17.500  2.14425E-11  4.28667E-11  4.43324E-11  3.55251E-11  2.36086E-11  1.27044E-10  2.50476E-10  2.49017E-10  1.82599E-10  9.87819E-11
 17.600  1.55676E-11  3.11872E-11  3.24123E-11  2.61738E-11  1.75720E-11  9.02605E-11  1.78349E-10  1.78265E-10  1.31967E-10  7.26513E-11
 17.700  1.12383E-11  2.25598E-11  2.35570E-11  1.91639E-11  1.29918E-11  6.38445E-11  1.26423E-10  1.27023E-10  9.48998E-11  5.31260E-11
 17.800  8.06762E-12  1.62265E-11  1.70210E-11  1.39454E-11  9.54286E-12  4.49602E-11  8.92137E-11  9.00899E-11  6.79068E-11  3.86280E-11
 17.900  5.75947E-12  1.16059E-11  1.22277E-11  1.00868E-11  6.96464E-12  3.15218E-11  6.26739E-11  6.35994E-11  4.83522E-11  2.79290E-11
 18.000  4.08920E-12  8.25515E-12  8.73424E-12  7.25254E-12  5.05104E-12  2.20024E-11  4.38321E-11  4.46905E-11  3.42598E-11  2.00815E-11
 18.100  2.88761E-12  5.83966E-12  6.20383E-12  5.18412E-12  3.64060E-12  1.52900E-11  3.05175E-11  3.12584E-11  2.41561E-11  1.43599E-11
 18.200  2.02819E-12  4.10859E-12  4.38205E-12  3.68422E-12  2.60806E-12  1.05784E-11  2.11523E-11  2.17627E-11  1.69493E-11  1.02128E-11
 18.300  1.41699E-12  2.87518E-12  3.07826E-12  2.60335E-12  1.85719E-12  7.28629E-12  1.45955E-11  1.50818E-11  1.18350E-11  7.22432E-12
 18.400  9.84784E-13  2.00138E-12  2.15064E-12  1.82924E-12  1.31471E-12  4.99657E-12  1.00262E-11  1.04039E-11  8.22400E-12  5.08316E-12
 18.500  6.80845E-13  1.38581E-12  1.49449E-12  1.27816E-12  9.25277E-13  3.41127E-12  6.85664E-12  7.14408E-12  5.68733E-12  3.55774E-12
 18.600  4.68285E-13  9.54583E-13  1.03300E-12  8.88193E-13  6.47466E-13  2.31867E-12  4.66815E-12  4.88320E-12  3.91427E-12  2.47707E-12
 18.700  3.20440E-13  6.54149E-13  7.10258E-13  6.13850E-13  4.50504E-13  1.56908E-12  3.16403E-12  3.32259E-12  2.68113E-12  1.71572E-12
 18.800  2.18159E-13  4.45977E-13  4.85803E-13  4.21964E-13  3.11706E-13  1.05714E-12  2.13501E-12  2.25044E-12  1.82777E-12  1.18226E-12
 18.900  1.47779E-13  3.02511E-13  3.30562E-13  2.88516E-13  2.14481E-13  7.09095E-13  1.43426E-12  1.51734E-12  1.24012E-12  8.10515E-13
 19.000  9.96037E-14  2.04163E-13  2.23777E-13  1.96233E-13  1.46776E-13  4.73548E-13  9.59238E-13  1.01842E-12  8.37451E-13  5.52844E-13
 19.100  6.68010E-14  1.37101E-13  1.50718E-13  1.32770E-13  9.99005E-14  3.14858E-13  6.38701E-13  6.80458E-13  5.62875E-13  3.75193E-13
 19.200  4.45809E-14  9.16111E-14  1.01000E-13  8.93667E-14  6.76325E-14  2.08429E-13  4.23395E-13  4.52601E-13  3.76557E-13  2.53356E-13
 19.300  2.96066E-14  6.09135E-14  6.73441E-14  5.98439E-14  4.55449E-14  1.37371E-13  2.79431E-13  2.99690E-13  2.50740E-13  1.70236E-13
 19.400  1.95667E-14  4.03044E-14  4.46805E-14  3.98705E-14  3.05101E-14  9.01433E-14  1.83606E-13  1.97549E-13  1.66187E-13  1.13821E-13
 19.500  1.28691E-14  2.65387E-14  2.94980E-14  2.64294E-14  2.03323E-14  5.88941E-14  1.20112E-13  1.29638E-13  1.09637E-13  7.57293E-14
 19.600  8.42351E-15  1.73904E-14  1.93793E-14  1.74320E-14  1.34801E-14  3.83103E-14  7.82309E-14  8.46927E-14  7.19975E-14  5.01402E-14
 19.700  5.48741E-15  1.13411E-14  1.26698E-14  1.14406E-14  8.89158E-15  2.48123E-14  5.07300E-14  5.50836E-14  4.70630E-14  3.30371E-14
 19.800  3.55781E-15  7.36084E-15  8.24326E-15  7.47142E-15  5.83532E-15  1.60003E-14  3.27528E-14  3.56669E-14  3.06233E-14  2.16632E-14
 19.900  2.29590E-15  4.75492E-15  5.33758E-15  4.85546E-15  3.81038E-15  1.02732E-14  2.10541E-14  2.29922E-14  1.98354E-14  1.41371E-14
  67 211 200   0.100
  0.000  4.60431E-02 -2.40495E-16 -3.95517E-16 -2.00148E-16 -1.43049E-15  9.78835E-02 -4.96507E-16 -8.95117E-16 -3.37750E-16 -1.21592E-15
  0.100  4.60715E-02 -2.29664E-05 -1.71283E-08 -4.57674E-12 -1.85248E-15  9.79309E-02 -3.55477E-05  1.20110E-08  8.75021E-12 -9.06930E-15
  0.200  4.61563E-02 -9.10436E-05 -2.71613E-07 -2.89565E-10 -1.74756E-13  9.80701E-02 -1.39231E-04  1.91534E-07  5.56396E-10 -5.96757E-13
  0.300  4.62963E-02 -2.01783E-04 -1.35466E-06 -3.23611E-09 -4.37389E-12  9.82930E-02 -3.02404E-04  9.64131E-07  6.28853E-09 -1.49502E-11
  0.400  4.64896E-02 -3.51164E-04 -4.19252E-06 -1.77027E-08 -4.23407E-11  9.85862E-02 -5.11420E-04  3.02215E-06  3.49431E-08 -1.43937E-10
  0.500  4.67334E-02 -5.33687E-04 -9.96215E-06 -6.52371E-08 -2.42488E-10  9.89326E-02 -7.48710E-04  7.29751E-06  1.31365E-07 -8.18833E-10
  0.600  4.70238E-02 -7.42507E-04 -1.99812E-05 -1.86697E-07 -9.92550E-10  9.93118E-02 -9.94169E-04  1.49204E-05  3.85127E-07 -3.32407E-09
  0.700  4.73564E-02 -9.69603E-04 -3.55805E-05 -4.47577E-07 -3.21205E-09  9.97021E-02 -1.22674E-03  2.71621E-05  9.49679E-07 -1.06519E-08
  0.800  4.77255E-02 -1.20600E-03 -5.79671E-05 -9.40330E-07 -8.72698E-09  1.00081E-01 -1.42605E-03  4.53598E-05  2.06033E-06 -2.86116E-08
  0.900  4.81248E-02 -1.44204E-03 -8.80884E-05 -1.78224E-06 -2.06885E-08  1.00428E-01 -1.57403E-03  7.08251E-05  4.04787E-06 -6.69467E-08
  1.000  4.85469E-02 -1.66764E-03 -1.26508E-04 -3.10792E-06 -4.39233E-08  1.00725E-01 -1.65631E-03  1.04737E-04  7.34415E-06 -1.40051E-07
  1.100  4.89839E-02 -1.87268E-03 -1.73299E-04 -5.05620E-06 -8.50556E-08  1.00957E-01 -1.66331E-03  1.48023E-04  1.24763E-05 -2.66768E-07
  1.200  4.94272E-02 -2.04735E-03 -2.27970E-04 -7.75205E-06 -1.52216E-07  1.01113E-01 -1.59102E-03  2.01242E-04  2.00460E-05 -4.68769E-07
  1.300  4.98680E-02 -2.18249E-03 -2.89424E-04 -1.12848E-05 -2.54156E-07  1.01188E-01 -1.44128E-03  2.64463E-04  3.06924E-05 -7.67142E-07
  1.400  5.02974E-02 -2.27000E-03 -3.55952E-04 -1.56850E-05 -3.98644E-07  1.01182E-01 -1.22168E-03  3.37172E-04  4.50368E-05 -1.17715E-06
  1.500  5.07066E-02 -2.30321E-03 -4.25278E-04 -2.09021E-05 -5.90086E-07  1.01101E-01 -9.44974E-04  4.18192E-04  6.36116E-05 -1.70150E-06
  1.600  5.10876E-02 -2.27719E-03 -4.94633E-04 -2.67864E-05 -8.26476E-07  1.00954E-01 -6.28136E-04  5.05651E-04  8.67758E-05 -2.32299E-06
  1.700  5.14330E-02 -2.18904E-03 -5.60876E-04 -3.30769E-05 -1.09588E-06  1.00755E-01 -2.91125E-04  5.96990E-04  1.14625E-04 -2.99787E-06
  1.800  5.17367E-02 -2.03808E-03 -6.20633E-04 -3.93987E-05 -1.37282E-06  1.00521E-01  4.45900E-05  6.89022E-04  1.46899E-04 -3.65148E-06
  1.900  5.19939E-02 -1.82604E-03 -6.70471E-04 -4.52694E-05 -1.61511E-06  1.00270E-01  3.57588E-04  7.78049E-04  1.82908E-04 -4.17798E-06
  2.000  5.22014E-02 -1.55702E-03 -7.07077E-04 -5.01174E-05 -1.76156E-06  1.00021E-01  6.28048E-04  8.60024E-04  2.21471E-04 -4.44577E-06
  2.100  5.23580E-02 -1.23750E-03 -7.27442E-04 -5.33086E-05 -1.73125E-06  9.97933E-02  8.39171E-04  9.30766E-04  2.60893E-04 -4.30953E-06
  2.200  5.24641E-02 -8.76135E-04 -7.29036E-04 -5.41830E-05 -1.42485E-06  9.96014E-02  9.78381E-04  9.86207E-04  2.98983E-04 -3.62918E-06
  2.300  5.25222E-02 -4.83477E-04 -7.09966E-04 -5.20957E-05 -7.28148E-07  9.94589E-02  1.03822E-03  1.02266E-03  3.33122E-04 -2.29487E-06
  2.400  5.25362E-02 -7.16447E-05 -6.69110E-04 -4.64609E-05  4.81895E-07  9.93746E-02  1.01685E-03  1.03709E-03  3.60375E-04 -2.55918E-07
  2.500  5.25120E-02  3.46143E-04 -6.06212E-04 -3.67954E-05  2.32889E-06  9.93530E-02  9.18221E-04  1.02737E-03  3.77661E-04  2.44946E-06
  2.600  5.24567E-02  7.56077E-04 -5.21942E-04 -2.27566E-05  4.92693E-06  9.93937E-02  7.51745E-04  9.92519E-04  3.81963E-04  5.66774E-06
  2.700  5.23784E-02  1.14431E-03 -4.17913E-04 -4.17407E-06  8.36954E-06  9.94917E-02  5.31651E-04  9.32842E-04  3.70563E-04  9.11159E-06
  2.800  5.22861E-02  1.49755E-03 -2.96654E-04  1.89293E-05  1.27183E-05  9.96377E-02  2.75985E-04  8.50044E-04  3.41298E-04  1.23536E-05
  2.900  5.21891E-02  1.80361E-03 -1.61547E-04  4.63267E-05  1.79929E-05  9.98189E-02  5.35311E-06  7.47231E-04  2.92803E-04  1.48361E-05
  3.000  5.20966E-02  2.05201E-03 -1.67182E-05  7.75881E-05  2.41622E-05  1.00020E-01 -2.58508E-04  6.28829E-04  2.24728E-04  1.58997E-05
  3.100  5.20173E-02  2.23440E-03  1.33101E-04  1.12092E-04  3.11396E-05  1.00223E-01 -4.94222E-04  5.00398E-04  1.37902E-04  1.48301E-05
  3.200  5.19591E-02  2.34507E-03  2.82741E-04  1.49046E-04  3.87812E-05  1.00411E-01 -6.82232E-04  3.68360E-04  3.44268E-05  1.09222E-05
  3.300  5.19286E-02  2.38122E-03  4.26783E-04  1.87514E-04  4.68878E-05  1.00567E-01 -8.06106E-04  2.39640E-04 -8.23216E-05  3.55707E-06
  3.400  5.19307E-02  2.34321E-03  5.59764E-04  2.26445E-04  5.52119E-05  1.00675E-01 -8.53606E-04  1.21249E-04 -2.07783E-04 -7.71586E-06
  3.500  5.19683E-02  2.23464E-03  6.76389E-04  2.64711E-04  6.34672E-05  1.00723E-01 -8.17443E-04  1.98303E-05 -3.36405E-04 -2.30983E-05
  3.600  5.20421E-02  2.06233E-03  7.71747E-04  3.01136E-04  7.13416E-05  1.00701E-01 -6.95646E-04 -5.88071E-05 -4.61933E-04 -4.24749E-05
  3.700  5.21504E-02  1.83620E-03  8.41518E-04  3.34526E-04  7.85113E-05  1.00602E-01 -4.91539E-04 -1.10121E-04 -5.77768E-04 -6.53655E-05
  3.800  5.22887E-02  1.56889E-03  8.82167E-04  3.63700E-04  8.46554E-05  1.00424E-01 -2.13306E-04 -1.31209E-04 -6.77394E-04 -9.09080E-05
  3.900  5.24501E-02  1.27545E-03  8.91129E-04  3.87513E-04  8.94691E-05  1.00166E-01  1.26808E-04 -1.21087E-04 -7.54816E-04 -1.17875E-04
  4.000  5.26249E-02  9.72764E-04  8.66954E-04  4.04880E-04  9.26751E-05  9.98327E-02  5.13610E-04 -8.08409E-05 -8.05010E-04 -1.44730E-04
  4.100  5.28010E-02  6.78965E-04  8.09433E-04  4.14800E-04  9.40308E-05  9.94271E-02  9.30298E-04 -1.36347E-05 -8.24313E-04 -1.69721E-04
  4.200  5.29642E-02  4.12753E-04  7.19679E-04  4.16381E-04  9.33328E-05  9.89546E-02  1.35992E-03  7.54440E-05 -8.10750E-04 -1.91004E-04
  4.300  5.30984E-02  1.92674E-04  6.00171E-04  4.08868E-04  9.04171E-05  9.84202E-02  1.78682E-03  1.79692E-04 -7.64254E-04 -2.06792E-04
  4.400  5.31858E-02  3.63820E-05  4.54739E-04  3.91674E-04  8.51559E-05  9.78275E-02  2.19804E-03  2.91246E-04 -6.86754E-04 -2.15516E-04
  4.500  5.32081E-02 -4.00957E-05  2.88506E-04  3.64423E-04  7.74536E-05  9.71776E-02  2.58437E-03  4.01654E-04 -5.82134E-04 -2.15978E-04
  4.600  5.31464E-02 -2.30437E-05  1.07767E-04  3.26984E-04  6.72405E-05  9.64690E-02  2.94125E-03  5.02532E-04 -4.56038E-04 -2.07490E-04
  4.700  5.29823E-02  9.83216E-05 -8.01896E-05  2.79520E-04  5.44688E-05  9.56967E-02  3.26912E-03  5.86251E-04 -3.15552E-04 -1.89979E-04
  4.800  5.26983E-02  3.31333E-04 -2.67313E-04  2.22526E-04  3.91109E-05  9.48522E-02  3.57352E-03  6.46601E-04 -1.68772E-04 -1.64041E-04
  4.900  5.22787E-02  6.79476E-04 -4.45074E-04  1.56870E-04  2.11611E-05  9.39240E-02  3.86457E-03  6.79388E-04 -2.42794E-05 -1.30953E-04
  5.000  5.17099E-02  1.14214E-03 -6.04794E-04  8.38124E-05  6.42600E-07  9.28973E-02  4.15625E-03  6.82893E-04  1.09412E-04 -9.26153E-05
  5.100  5.09815E-02  1.71454E-03 -7.38000E-04  5.01887E-06 -2.23814E-05  9.17558E-02  4.46517E-03  6.58164E-04  2.24429E-04 -5.14459E-05
  5.200  5.00859E-02  2.38776E-03 -8.36798E-04 -7.74536E-05 -4.77917E-05  9.04819E-02  4.80922E-03  6.09105E-04  3.14068E-04 -1.02257E-05
  5.300  4.90197E-02  3.14906E-03 -8.94249E-04 -1.61194E-04 -7.53959E-05  8.90581E-02  5.20604E-03  5.42338E-04  3.73245E-04  2.80957E-05
  5.400  4.77831E-02  3.98224E-03 -9.04713E-04 -2.43500E-04 -1.04909E-04  8.74683E-02  5.67144E-03  4.66849E-04  3.98835E-04  6.06122E-05
  5.500  4.63804E-02  4.86822E-03 -8.64161E-04 -3.21473E-04 -1.35938E-04  8.56987E-02  6.21793E-03  3.93432E-04  3.89875E-04  8.46786E-05
  5.600  4.48196E-02  5.78569E-03 -7.70424E-04 -3.92132E-04 -1.67971E-04  8.37391E-02  6.85355E-03  3.33975E-04  3.47615E-04  9.81110E-05
  5.700  4.31127E-02  6.71195E-03 -6.23357E-04 -4.52547E-04 -2.00372E-04  8.15834E-02  7.58087E-03  3.00624E-04  2.75412E-04  9.93562E-05
  5.800  4.12745E-02  7.62367E-03 -4.24920E-04 -4.99989E-04 -2.32390E-04  7.92304E-02  8.39649E-03  3.04910E-04  1.78481E-04  8.76134E-05
  5.900  3.93230E-02  8.49779E-03 -1.79151E-04 -5.32081E-04 -2.63174E-04  7.66842E-02  9.29084E-03  3.56888E-04  6.35205E-05  6.28997E-05
  6.000  3.72782E-02  9.31231E-03  1.07956E-04 -5.46937E-04 -2.91804E-04  7.39540E-02  1.02485E-02  4.64357E-04 -6.17540E-05  2.60535E-05
  6.100  3.51617E-02  1.00471E-02  4.28683E-04 -5.43289E-04 -3.17329E-04  7.10542E-02  1.12489E-02  6.32237E-04 -1.89138E-04 -2.13231E-05
  6.200  3.29961E-02  1.06847E-02  7.73897E-04 -5.20578E-04 -3.38815E-04  6.80034E-02  1.22671E-02  8.62125E-04 -3.10483E-04 -7.69774E-05
  6.300  3.08042E-02  1.12106E-02  1.13344E-03 -4.79018E-04 -3.55395E-04  6.48243E-02  1.32756E-02  1.15209E-03 -4.18213E-04 -1.38164E-04
  6.400  2.86083E-02  1.16138E-02  1.49658E-03 -4.19611E-04 -3.66327E-04  6.15425E-02  1.42450E-02  1.49668E-03 -5.05793E-04 -2.01836E-04
  6.500  2.64299E-02  1.18873E-02  1.85245E-03 -3.44114E-04 -3.71042E-04  5.81858E-02  1.51462E-02  1.88723E-03 -5.68096E-04 -2.64845E-04
  6.600  2.42889E-02  1.20280E-02  2.19055E-03 -2.54971E-04 -3.69185E-04  5.47831E-02  1.59517E-02  2.31228E-03 -6.01666E-04 -3.24150E-04
  6.700  2.22036E-02  1.20363E-02  2.50117E-03 -1.55195E-04 -3.60651E-04  5.13637E-02  1.66364E-02  2.75827E-03 -6.04848E-04 -3.77003E-04
  6.800  2.01899E-02  1.19168E-02  2.77580E-03 -4.82231E-05 -3.45596E-04  4.79561E-02  1.71798E-02  3.21031E-03 -5.77797E-04 -4.21101E-04
  6.900  1.82613E-02  1.16768E-02  3.00742E-03  6.22578E-05 -3.24439E-04  4.45875E-02  1.75660E-02  3.65296E-03 -5.22365E-04 -4.54712E-04
  7.000  1.64289E-02  1.13269E-02  3.19079E-03  1.72491E-04 -2.97851E-04  4.12834E-02  1.77844E-02  4.07115E-03 -4.41883E-04 -4.76736E-04
  7.100  1.47014E-02  1.08799E-02  3.32255E-03  2.78834E-04 -2.66713E-04  3.80665E-02  1.78306E-02  4.45090E-03 -3.40861E-04 -4.86736E-04
  7.200  1.30848E-02  1.03501E-02  3.40126E-03  3.77933E-04 -2.32080E-04  3.49570E-02  1.77054E-02  4.78004E-03 -2.24639E-04 -4.84913E-04
  7.300  1.15831E-02  9.75322E-03  3.42741E-03  4.66868E-04 -1.95119E-04  3.19718E-02  1.74154E-02  5.04874E-03 -9.90121E-05 -4.72042E-04
  7.400  1.01979E-02  9.10527E-03  3.40318E-03  5.43273E-04 -1.57051E-04  2.91249E-02  1.69717E-02  5.24989E-03  3.01485E-05 -4.49378E-04
  7.500  8.92912E-03  8.42229E-03  3.33233E-03  6.05419E-04 -1.19086E-04  2.64273E-02  1.63895E-02  5.37928E-03  1.57233E-04 -4.18540E-04
  7.600  7.77486E-03  7.71975E-03  3.21984E-03  6.52251E-04 -8.23621E-05  2.38868E-02  1.56872E-02  5.43562E-03  2.77187E-04 -3.81384E-04
  7.700  6.73185E-03  7.01205E-03  3.07165E-03  6.83391E-04 -4.78964E-05  2.15085E-02  1.48853E-02  5.42039E-03  3.85743E-04 -3.39870E-04
  7.800  5.79565E-03  6.31224E-03  2.89434E-03  6.99105E-04 -1.65391E-05  1.92950E-02  1.40055E-02  5.33756E-03  4.79575E-04 -2.95942E-04
  7.900  4.96090E-03  5.63173E-03  2.69476E-03  7.00228E-04  1.10551E-05  1.72465E-02  1.30699E-02  5.19318E-03  5.56373E-04 -2.51427E-04
  8.000  4.22154E-03  4.98008E-03  2.47979E-03  6.88080E-04  3.44434E-05  1.53610E-02  1.20999E-02  4.99494E-03  6.14857E-04 -2.07943E-04
  8.100  3.57103E-03  4.36497E-03  2.25600E-03  6.64348E-04  5.33971E-05  1.36349E-02  1.11156E-02  4.75164E-03  6.54719E-04 -1.66842E-04
  8.200  3.00251E-03  3.79217E-03  2.02946E-03  6.30973E-04  6.78914E-05  1.20629E-02  1.01356E-02  4.47269E-03  6.76516E-04 -1.29176E-04
  8.300  2.50900E-03  3.26560E-03  1.80558E-03  5.90031E-04  7.80844E-05  1.06386E-02  9.17590E-03  4.16766E-03  6.81525E-04 -9.56838E-05
  8.400  2.08354E-03  2.78751E-03  1.58895E-03  5.43619E-04  8.42873E-05  9.35449E-03  8.25007E-03  3.84586E-03  6.71580E-04 -6.67983E-05
  8.500  1.71928E-03  2.35860E-03  1.38330E-03  4.93760E-04  8.69303E-05  8.20247E-03  7.36911E-03  3.51596E-03  6.48892E-04 -4.26760E-05
  8.600  1.40961E-03  1.97828E-03  1.19147E-03  4.42319E-04  8.65248E-05  7.17376E-03  6.54136E-03  3.18575E-03  6.15887E-04 -2.32343E-05
  8.700  1.14824E-03  1.64486E-03  1.01544E-03  3.90943E-04  8.36268E-05  6.25932E-03  5.77264E-03  2.86197E-03  5.75043E-04 -8.19846E-06
  8.800  9.29243E-04  1.35579E-03  8.56378E-04  3.41022E-04  7.88026E-05  5.44999E-03  5.06646E-03  2.55016E-03  5.28763E-04  2.84804E-06
  8.900  7.47099E-04  1.10790E-03  7.14763E-04  2.93663E-04  7.25994E-05  4.73664E-03  4.42430E-03  2.25469E-03  4.79270E-04  1.04144E-05
  9.000  5.96746E-04  8.97619E-04  5.90452E-04  2.49694E-04  6.55210E-05  4.11030E-03  3.84585E-03  1.97875E-03  4.28528E-04  1.50568E-05
  9.100  4.73578E-04  7.21114E-04  4.82814E-04  2.09671E-04  5.80112E-05  3.56235E-03  3.32938E-03  1.72444E-03  3.78196E-04  1.73392E-05
  9.200  3.73454E-04  5.74509E-04  3.90844E-04  1.73905E-04  5.04421E-05  3.08453E-03  2.87204E-03  1.49289E-03  3.29609E-04  1.78018E-05
  9.300  2.92691E-04  4.53990E-04  3.13271E-04  1.42494E-04  4.31101E-05  2.66907E-03  2.47014E-03  1.28443E-03  2.83779E-04  1.69372E-05
  9.400  2.28050E-04  3.55921E-04  2.48665E-04  1.15362E-04  3.62358E-05  2.30875E-03  2.11944E-03  1.09869E-03  2.41410E-04  1.51753E-05
  9.500  1.76710E-04  2.76913E-04  1.95518E-04  9.22961E-05  2.99694E-05  1.99691E-03  1.81537E-03  9.34775E-04  2.02936E-04  1.28750E-05
  9.600  1.36244E-04  2.13884E-04  1.52324E-04  7.29870E-05  2.43984E-05  1.72746E-03  1.55326E-03  7.91400E-04  1.68557E-04  1.03224E-05
  9.700  1.04586E-04  1.64081E-04  1.17630E-04  5.70624E-05  1.95576E-05  1.49494E-03  1.32847E-03  6.67026E-04  1.38286E-04  7.73400E-06
  9.800  7.99961E-05  1.25092E-04  9.00820E-05  4.41186E-05  1.54395E-05  1.29443E-03  1.13654E-03  5.59962E-04  1.11988E-04  5.26339E-06
  9.900  6.10259E-05  9.48401E-05  6.84514E-05  3.37458E-05  1.20058E-05  1.12159E-03  9.73270E-04  4.68455E-04  8.94273E-05  3.01003E-06
 10.000  4.64826E-05  7.15660E-05  5.16489E-05  2.55469E-05  9.19695E-06  9.72573E-04  8.34779E-04  3.90765E-04  7.02982E-05  1.02931E-06
 10.100  3.53956E-05  5.38019E-05  3.87304E-05  1.91527E-05  6.94086E-06  8.44043E-04  7.17546E-04  3.25213E-04  5.42594E-05 -6.57420E-07
 10.200  2.69832E-05  4.03422E-05  2.88945E-05  1.42301E-05  5.16056E-06  7.33091E-04  6.18423E-04  2.70224E-04  4.09569E-05 -2.05337E-06
 10.300  2.06235E-05  3.02101E-05  2.14732E-05  1.04876E-05  3.77958E-06  6.37211E-04  5.34630E-04  2.24346E-04  3.00426E-05 -3.17809E-06
 10.400  1.58268E-05  2.26257E-05  1.59200E-05  7.67606E-06  2.72606E-06  5.54249E-04  4.63745E-04  1.86263E-04  2.11875E-05 -4.06051E-06
 10.500  1.22118E-05  1.69737E-05  1.17951E-05  5.58778E-06  1.93533E-06  4.82361E-04  4.03678E-04  1.54800E-04  1.40889E-05 -4.73368E-06
 10.600  9.48474E-06  1.27754E-05  8.75007E-06  4.05316E-06  1.35128E-06  4.19978E-04  3.52642E-04  1.28920E-04  8.47549E-06 -5.23076E-06
 10.700  7.42163E-06  9.66231E-06  6.51332E-06  2.93653E-06  9.26729E-07  3.65763E-04  3.09127E-04  1.07716E-04  4.10759E-06 -5.58253E-06
 10.800  5.85318E-06  7.35421E-06  4.87589E-06  2.13139E-06  6.23151E-07  3.18578E-04  2.71865E-04  9.04031E-05  7.76893E-07 -5.81588E-06
 10.900  4.65264E-06  5.63998E-06  3.67919E-06  1.55559E-06  4.09852E-07  2.77460E-04  2.39797E-04  7.63060E-05 -1.69605E-06 -5.95318E-06
 11.000  3.72581E-06  4.36208E-06  2.80426E-06  1.14672E-06  2.62947E-07  2.41588E-04  2.12051E-04  6.48493E-05 -3.46473E-06 -6.01237E-06
 11.100  3.00316E-06  3.40392E-06  2.16284E-06  8.58108E-07  1.64214E-07  2.10262E-04  1.87907E-04  5.55457E-05 -4.65989E-06 -6.00734E-06
 11.200  2.43361E-06  2.67982E-06  1.69002E-06  6.55229E-07  9.99857E-08  1.82887E-04  1.66777E-04  4.79849E-05 -5.39263E-06 -5.94865E-06
 11.300  1.97978E-06  2.12720E-06  1.33851E-06  5.12838E-07  6.01396E-08  1.58952E-04  1.48184E-04  4.18247E-05 -5.75728E-06 -5.84429E-06
 11.400  1.61431E-06  1.70055E-06  1.07404E-06  4.12634E-07  3.72433E-08  1.38021E-04  1.31738E-04  3.67815E-05 -5.83387E-06 -5.70038E-06
 11.500  1.31717E-06  1.36694E-06  8.71974E-07  3.41447E-07  2.58599E-08  1.19715E-04  1.17125E-04  3.26225E-05 -5.69024E-06 -5.52188E-06
 11.600  1.07364E-06  1.10260E-06  7.14704E-07  2.89873E-07  2.20128E-08  1.03710E-04  1.04092E-04  2.91582E-05 -5.38368E-06 -5.31307E-06
 11.700  8.72816E-07  8.90432E-07  5.89727E-07  2.51255E-07  2.27898E-08  8.97215E-05  9.24313E-05  2.62362E-05 -4.96240E-06 -5.07797E-06
 11.800  7.06545E-07  7.18138E-07  4.88247E-07  2.20946E-07  2.60608E-08  7.75046E-05  8.19762E-05  2.37355E-05 -4.46656E-06 -4.82056E-06
 11.900  5.68642E-07  5.76892E-07  4.04144E-07  1.95770E-07  3.02829E-08  6.68442E-05  7.25887E-05  2.15612E-05 -3.92924E-06 -4.54491E-06
 12.000  4.54333E-07  4.60332E-07  3.33212E-07  1.73635E-07  3.43669E-08  5.75518E-05  6.41546E-05  1.96402E-05 -3.37726E-06 -4.25523E-06
 12.100  3.59860E-07  3.63847E-07  2.72611E-07  1.53242E-07  3.75845E-08  4.94621E-05  5.65781E-05  1.79172E-05 -2.83183E-06 -3.95583E-06
 12.200  2.82192E-07  2.84043E-07  2.20453E-07  1.33874E-07  3.95003E-08  4.24294E-05  4.97773E-05  1.63509E-05 -2.30919E-06 -3.65101E-06
 12.300  2.18830E-07  2.18359E-07  1.75492E-07  1.15225E-07  3.99164E-08  3.63254E-05  4.36812E-05  1.49117E-05 -1.82129E-06 -3.34499E-06
 12.400  1.67663E-07  1.64798E-07  1.36899E-07  9.72655E-08  3.88239E-08  3.10364E-05  3.82270E-05  1.35785E-05 -1.37629E-06 -3.04180E-06
 12.500  1.26871E-07  1.21727E-07  1.04097E-07  8.01411E-08  3.63579E-08  2.64621E-05  3.33581E-05  1.23369E-05 -9.79184E-07 -2.74512E-06
 12.600  9.48596E-08  8.77486E-08  7.66377E-08  6.40830E-08  3.27539E-08  2.25136E-05  2.90233E-05  1.11774E-05 -6.32299E-07 -2.45825E-06
 12.700  7.02181E-08  6.16168E-08  5.41232E-08  4.93450E-08  2.83077E-08  1.91123E-05  2.51751E-05  1.00939E-05 -3.35815E-07 -2.18404E-06
 12.800  5.16900E-08  4.21863E-08  3.61552E-08  3.61558E-08  2.33396E-08  1.61885E-05  2.17695E-05  9.08239E-06 -8.82262E-08 -1.92482E-06
 12.900  3.81569E-08  2.83880E-08  2.23089E-08  2.46871E-08  1.81641E-08  1.36809E-05  1.87656E-05  8.14052E-06  1.13238E-07 -1.68238E-06
 13.000  2.86290E-08  1.92215E-08  1.21249E-08  1.50362E-08  1.30661E-08  1.15350E-05  1.61249E-05  7.26653E-06  2.72236E-07 -1.45800E-06
 13.100  2.22378E-08  1.37579E-08  5.11381E-09  7.22029E-09  8.28431E-09  9.70296E-06  1.38116E-05  6.45896E-06  3.92996E-07 -1.25248E-06
 13.200  1.82324E-08  1.11480E-08  7.69576E-10  1.18044E-09  4.00176E-09  8.14249E-06  1.17923E-05  5.71630E-06  4.80042E-07 -1.06613E-06
 13.300  1.59742E-08  1.06320E-08 -1.41362E-09 -3.20809E-09  3.42371E-10  6.81654E-06  1.00359E-05  5.03681E-06  5.37977E-07 -8.98854E-07
 13.400  1.49317E-08  1.15476E-08 -1.92340E-09 -6.12093E-09 -2.62701E-09  5.69260E-06  8.51352E-06  4.41843E-06  5.71307E-07 -7.50215E-07
 13.500  1.46737E-08  1.33351E-08 -1.21282E-09 -7.76790E-09 -4.89066E-09  4.74222E-06  7.19880E-06  3.85871E-06  5.84316E-07 -6.19464E-07
 13.600  1.48610E-08  1.55383E-08  3.12908E-10 -8.37641E-09 -6.47537E-09  3.94059E-06  6.06741E-06  3.35486E-06  5.80966E-07 -5.05622E-07
 13.700  1.52369E-08  1.78019E-08  2.30559E-09 -8.17615E-09 -7.44043E-09  3.26612E-06  5.09724E-06  2.90378E-06  5.64844E-07 -4.07532E-07
 13.800  1.56169E-08  1.98647E-08  4.47896E-09 -7.38643E-09 -7.86737E-09  2.70008E-06  4.26824E-06  2.50215E-06  5.39129E-07 -3.23917E-07
 13.900  1.58774E-08  2.15498E-08  6.60954E-09 -6.20641E-09 -7.85023E-09  2.22624E-06  3.56236E-06  2.14648E-06  5.06578E-07 -2.53431E-07
 14.000  1.59452E-08  2.27536E-08  8.53402E-09 -4.80850E-09 -7.48714E-09  1.83062E-06  2.96341E-06  1.83319E-06  4.69537E-07 -1.94701E-07
 14.100  1.57868E-08  2.34322E-08  1.01439E-08 -3.33479E-09 -6.87342E-09  1.50117E-06  2.45698E-06  1.55869E-06  4.29955E-07 -1.46368E-07
 14.200  1.53985E-08  2.35890E-08  1.13782E-08 -1.89609E-09 -6.09644E-09  1.22755E-06  2.03026E-06  1.31942E-06  3.89419E-07 -1.07117E-07
 14.300  1.47979E-08  2.32624E-08  1.22153E-08 -5.73088E-10 -5.23222E-09  1.00093E-06  1.67198E-06  1.11194E-06  3.49183E-07 -7.56997E-08
 14.400  1.40163E-08  2.25139E-08  1.26642E-08  5.80928E-10 -4.34353E-09  8.13760E-07  1.37221E-06  9.32937E-07  3.10205E-07 -5.09558E-08
 14.500  1.30929E-08  2.14189E-08  1.27563E-08  1.53631E-09 -3.47940E-09  6.59603E-07  1.12228E-06  7.79288E-07  2.73191E-07 -3.18229E-08
 14.600  1.20692E-08  2.00582E-08  1.25379E-08  2.28275E-09 -2.67555E-09  5.33009E-07  9.14655E-07  6.48061E-07  2.38625E-07 -1.73444E-08
 14.700  1.09861E-08  1.85118E-08  1.20633E-08  2.82494E-09 -1.95560E-09  4.29360E-07  7.42790E-07  5.36540E-07  2.06812E-07 -6.67185E-09
 14.800  9.88107E-09  1.68542E-08  1.13897E-08  3.17831E-09 -1.33279E-09  3.44756E-07  6.01046E-07  4.42235E-07  1.77907E-07  9.36158E-10
 14.900  8.78631E-09  1.51514E-08  1.05732E-08  3.36533E-09 -8.11853E-10  2.75915E-07  4.84574E-07  3.62881E-07  1.51946E-07  6.11783E-09
 15.000  7.72833E-09  1.34591E-08  9.66532E-09  3.41224E-09 -3.90981E-10  2.20079E-07  3.89226E-07  2.96435E-07  1.28877E-07  9.41461E-09
 15.100  6.72750E-09  1.18218E-08  8.71145E-09  3.34654E-09 -6.36337E-11  1.74942E-07  3.11466E-07  2.41071E-07  1.08576E-07  1.12789E-08
 15.200  5.79836E-09  1.02733E-08  7.74971E-09  3.19501E-09  1.79809E-10  1.38576E-07  2.48294E-07  1.95165E-07  9.08766E-08  1.20828E-08
 15.300  4.95014E-09  8.83731E-09  6.81058E-09  2.98232E-09  3.50670E-10  1.09379E-07  1.97172E-07  1.57289E-07  7.55775E-08  1.21273E-08
 15.400  4.18748E-09  7.52862E-09  5.91716E-09  2.73018E-09  4.60874E-10  8.60211E-08  1.55966E-07  1.26190E-07  6.24619E-08  1.16515E-08
 15.500  3.51120E-09  6.35437E-09  5.08573E-09  2.45692E-09  5.22115E-10  6.74017E-08  1.22884E-07  1.00780E-07  5.13065E-08  1.08418E-08
 15.600  2.91920E-09  5.31560E-09  4.32661E-09  2.17733E-09  5.45275E-10  5.26146E-08  9.64335E-08  8.01209E-08  4.18900E-08  9.84000E-09
 15.700  2.40712E-09  4.40857E-09  3.64511E-09  1.90284E-09  5.40055E-10  4.09155E-08  7.53713E-08  6.34058E-08  3.39993E-08  8.75108E-09
 15.800  1.96911E-09  3.62610E-09  3.04249E-09  1.64178E-09  5.14787E-10  3.16951E-08  5.86697E-08  4.99483E-08  2.74340E-08  7.65036E-09
 15.900  1.59840E-09  2.95867E-09  2.51694E-09  1.39981E-09  4.76380E-10  2.44566E-08  4.54814E-08  3.91667E-08  2.20090E-08  6.58942E-09
 16.000  1.28778E-09  2.39539E-09  2.06437E-09  1.18033E-09  4.30364E-10  1.87967E-08  3.51117E-08  3.05711E-08  1.75563E-08  5.60138E-09
 16.100  1.02996E-09  1.92477E-09  1.67923E-09  9.84911E-10  3.81004E-10  1.43889E-08  2.69931E-08  2.37520E-08  1.39257E-08  4.70531E-09
 16.200  8.17921E-10  1.53530E-09  1.35507E-09  8.13764E-10  3.31453E-10  1.09702E-08  2.06644E-08  1.83688E-08  1.09844E-08  3.90993E-09
 16.300  6.45037E-10  1.21592E-09  1.08505E-09  6.66067E-10  2.83922E-10  8.32977E-09  1.57526E-08  1.41401E-08  8.61653E-09  3.21654E-09
 16.400  5.05256E-10  9.56294E-10  8.62338E-10  5.40306E-10  2.39849E-10  6.29887E-09  1.19572E-08  1.08345E-08  6.72218E-09  2.62141E-09
 16.500  3.93150E-10  7.47003E-10  6.80353E-10  4.34536E-10  2.00067E-10  4.74342E-09  9.03740E-09  8.26325E-09  5.21590E-09  2.11760E-09
 16.600  3.03938E-10  5.79650E-10  5.32971E-10  3.46593E-10  1.64947E-10  3.55719E-09  6.80120E-09  6.27300E-09  4.02538E-09  1.69633E-09
 16.700  2.33480E-10  4.46872E-10  4.14633E-10  2.74252E-10  1.34524E-10  2.65642E-09  5.09622E-09  4.74005E-09  3.09004E-09  1.34804E-09
 16.800  1.78240E-10  3.42319E-10  3.20395E-10  2.15344E-10  1.08600E-10  1.97539E-09  3.80210E-09  3.56510E-09  2.35947E-09  1.06307E-09
 16.900  1.35238E-10  2.60594E-10  2.45943E-10  1.67830E-10  8.68345E-11  1.46273E-09  2.82426E-09  2.66896E-09  1.79216E-09  8.32173E-10
 17.000  1.01996E-10  1.97167E-10  1.87573E-10  1.29854E-10  6.88007E-11  1.07851E-09  2.08876E-09  1.98882E-09  1.35414E-09  6.46790E-10
 17.100  7.64712E-11  1.48281E-10  1.42152E-10  9.97639E-11  5.40403E-11  7.91823E-10  1.53804E-09  1.47513E-09  1.01787E-09  4.99234E-10
 17.200  5.70014E-11  1.10857E-10  1.07062E-10  7.61213E-11  4.20946E-11  5.78848E-10  1.12756E-09  1.08906E-09  7.61159E-10  3.82754E-10
 17.300  4.22460E-11  8.23970E-11  8.01427E-11  5.76930E-11  3.25281E-11  4.21338E-10  8.22998E-10  8.00303E-10  5.66274E-10  2.91530E-10
 17.400  3.11340E-11  6.08928E-11  5.96330E-11  4.34400E-11  2.49426E-11  3.05367E-10  5.98060E-10  5.85392E-10  4.19140E-10  2.20628E-10
 17.500  2.28174E-11  4.47471E-11  4.41110E-11  3.24989E-11  1.89838E-11  2.20360E-10  4.32687E-10  4.26214E-10  3.08664E-10  1.65925E-10
 17.600  1.66309E-11  3.26997E-11  3.24403E-11  2.41610E-11  1.43444E-11  1.58330E-10  3.11663E-10  3.08888E-10  2.26161E-10  1.24020E-10
 17.700  1.20563E-11  2.37648E-11  2.37213E-11  1.78518E-11  1.07630E-11  1.13268E-10  2.23500E-10  2.22827E-10  1.64880E-10  9.21398E-11
 17.800  8.69334E-12  1.71778E-11  1.72482E-11  1.31104E-11  8.02067E-12  8.06791E-11  1.59569E-10  1.60004E-10  1.19605E-10  6.80493E-11
 17.900  6.23541E-12  1.23502E-11  1.24720E-11  9.57115E-12  5.93735E-12  5.72172E-11  1.13423E-10  1.14365E-10  8.63312E-11  4.99645E-11
 18.000  4.44913E-12  8.83239E-12  8.96902E-12  6.94655E-12  4.36663E-12  4.04019E-11  8.02656E-11  8.13694E-11  6.20067E-11  3.64753E-11
 18.100  3.15821E-12  6.28362E-12  6.41508E-12  5.01269E-12  3.19104E-12  2.84043E-11  5.65508E-11  5.76281E-11  4.43170E-11  2.64772E-11
 18.200  2.23042E-12  4.44727E-12  4.56389E-12  3.59670E-12  2.31744E-12  1.98827E-11  3.96669E-11  4.06272E-11  3.15191E-11  1.91122E-11
 18.300  1.56724E-12  3.13149E-12  3.22978E-12  2.56630E-12  1.67273E-12  1.38571E-11  2.77012E-11  2.85111E-11  2.23080E-11  1.37198E-11
 18.400  1.09574E-12  2.19385E-12  2.27372E-12  1.82100E-12  1.20014E-12  9.61564E-12  1.92598E-11  1.99172E-11  1.57122E-11  9.79507E-12
 18.500  7.62297E-13  1.52926E-12  1.59242E-12  1.28512E-12  8.56008E-13  6.64342E-12  1.33317E-11  1.38504E-11  1.10133E-11  6.95536E-12
 18.600  5.27721E-13  1.06070E-12  1.10956E-12  9.02071E-13  6.07015E-13  4.56997E-12  9.18772E-12  9.58788E-12  7.68253E-12  4.91256E-12
 18.700  3.63552E-13  7.32093E-13  7.69208E-13  6.29833E-13  4.27995E-13  3.13000E-12  6.30399E-12  6.60712E-12  5.33350E-12  3.45141E-12
 18.800  2.49246E-13  5.02822E-13  5.30585E-13  4.37446E-13  3.00075E-13  2.13445E-12  4.30637E-12  4.53247E-12  3.68510E-12  2.41216E-12
 18.900  1.70061E-13  3.43681E-13  3.64170E-13  3.02247E-13  2.09223E-13  1.44924E-12  2.92886E-12  3.09525E-12  2.53409E-12  1.67709E-12
 19.000  1.15482E-13  2.33781E-13  2.48720E-13  2.07761E-13  1.45081E-13  9.79737E-13  1.98326E-12  2.10425E-12  1.73437E-12  1.16003E-12
 19.100  7.80499E-14  1.58266E-13  1.69041E-13  1.42085E-13  1.00060E-13  6.59467E-13  1.33708E-12  1.42412E-12  1.18145E-12  7.98297E-13
 19.200  5.25038E-14  1.06637E-13  1.14331E-13  9.66807E-14  6.86417E-14  4.41971E-13  8.97494E-13  9.59504E-13  8.01037E-13  5.46583E-13
 19.300  3.51548E-14  7.15130E-14  7.69565E-14  6.54571E-14  4.68405E-14  2.94926E-13  5.99802E-13  6.43578E-13  5.40579E-13  3.72361E-13
 19.400  2.34297E-14  4.77344E-14  5.15525E-14  4.40980E-14  3.17970E-14  1.95955E-13  3.99105E-13  4.29750E-13  3.63115E-13  2.52408E-13
 19.500  1.55436E-14  3.17147E-14  3.43710E-14  2.95626E-14  2.14736E-14  1.29635E-13  2.64408E-13  2.85689E-13  2.42782E-13  1.70250E-13
 19.600  1.02647E-14  2.09742E-14  2.28080E-14  1.97219E-14  1.44278E-14  8.53911E-14  1.74409E-13  1.89078E-13  1.61578E-13  1.14271E-13
 19.700  6.74788E-15  1.38076E-14  1.50643E-14  1.30933E-14  9.64485E-15  5.60058E-14  1.14546E-13  1.24583E-13  1.07041E-13  7.63236E-14
 19.800  4.41594E-15  9.04833E-15  9.90349E-15  8.65093E-15  6.41519E-15  3.65750E-14  7.49038E-14  8.17255E-14  7.05868E-14  5.07308E-14
 19.900  2.87691E-15  5.90268E-15  6.48066E-15  5.68858E-15  4.24582E-15  2.37832E-14  4.87694E-14  5.33749E-14  4.63357E-14  3.35573E-14
  67 212 200   0.100
  0.000  4.58069E-02 -2.40495E-16 -3.43475E-16 -4.31570E-16 -6.29415E-16  9.80161E-02 -4.65475E-16 -8.95117E-16 -2.87713E-16 -2.36031E-15
  0.100  4.58355E-02 -2.27785E-05 -1.66443E-08 -4.78513E-12 -1.14439E-15  9.80602E-02 -3.97534E-05  1.10048E-08  9.30646E-12  8.49711E-15
  0.200  4.59208E-02 -9.03177E-05 -2.63944E-07 -3.02859E-10 -1.91714E-13  9.81897E-02 -1.55813E-04  1.75685E-07  5.92570E-10 -5.64486E-13
  0.300  4.60616E-02 -2.00245E-04 -1.31646E-06 -3.38610E-09 -4.82227E-12  9.83967E-02 -3.38827E-04  8.85966E-07  6.69778E-09 -1.39247E-11
  0.400  4.62558E-02 -3.48661E-04 -4.07450E-06 -1.85342E-08 -4.67370E-11  9.86690E-02 -5.74019E-04  2.78404E-06  3.72214E-08 -1.33992E-10
  0.500  4.65004E-02 -5.30221E-04 -9.68231E-06 -6.83546E-08 -2.67943E-10  9.89901E-02 -8.42339E-04  6.74329E-06  1.39951E-07 -7.60285E-10
  0.600  4.67914E-02 -7.38258E-04 -1.94214E-05 -1.95809E-07 -1.09818E-09  9.93412E-02 -1.12194E-03  1.38371E-05  4.10372E-07 -3.07612E-09
  0.700  4.71242E-02 -9.64946E-04 -3.45863E-05 -4.69976E-07 -3.55951E-09  9.97017E-02 -1.38985E-03  2.52921E-05  1.01215E-06 -9.81689E-09
  0.800  4.74928E-02 -1.20150E-03 -5.63518E-05 -9.88769E-07 -9.68925E-09  1.00051E-01 -1.62378E-03  4.24240E-05  2.19642E-06 -2.62366E-08
  0.900  4.78907E-02 -1.43841E-03 -8.56408E-05 -1.87713E-06 -2.30207E-08  1.00369E-01 -1.80377E-03  6.65536E-05  4.31650E-06 -6.10174E-08
  1.000  4.83105E-02 -1.66575E-03 -1.23002E-04 -3.27964E-06 -4.90017E-08  1.00640E-01 -1.91373E-03  9.89058E-05  7.83419E-06 -1.26714E-07
  1.100  4.87441E-02 -1.87349E-03 -1.68507E-04 -5.34739E-06 -9.51776E-08  1.00848E-01 -1.94267E-03  1.40494E-04  1.33139E-05 -2.39233E-07
  1.200  4.91830E-02 -2.05186E-03 -2.21678E-04 -8.21948E-06 -1.70934E-07  1.00986E-01 -1.88547E-03  1.91998E-04  2.14013E-05 -4.15885E-07
  1.300  4.96182E-02 -2.19168E-03 -2.81441E-04 -1.20007E-05 -2.86598E-07  1.01048E-01 -1.74328E-03  2.53640E-04  3.27841E-05 -6.71700E-07
  1.400  5.00411E-02 -2.28479E-03 -3.46129E-04 -1.67372E-05 -4.51746E-07  1.01035E-01 -1.52340E-03  3.25078E-04  4.81339E-05 -1.01405E-06
  1.500  5.04429E-02 -2.32438E-03 -4.13516E-04 -2.23933E-05 -6.72651E-07  1.00951E-01 -1.23870E-03  4.05319E-04  6.80312E-05 -1.43602E-06
  1.600  5.08159E-02 -2.30533E-03 -4.80894E-04 -2.88318E-05 -9.48940E-07  1.00807E-01 -9.06699E-04  4.92665E-04  9.28760E-05 -1.90957E-06
  1.700  5.11529E-02 -2.22454E-03 -5.45185E-04 -3.58004E-05 -1.26970E-06  1.00617E-01 -5.48220E-04  5.84711E-04  1.22791E-04 -2.37978E-06
  1.800  5.14481E-02 -2.08107E-03 -6.03082E-04 -4.29269E-05 -1.60938E-06  1.00395E-01 -1.85903E-04  6.78389E-04  1.57528E-04 -2.76203E-06
  1.900  5.16970E-02 -1.87638E-03 -6.51217E-04 -4.97252E-05 -1.92404E-06  1.00161E-01  1.57452E-04  7.70068E-04  1.96380E-04 -2.94392E-06
  2.000  5.18969E-02 -1.61431E-03 -6.86334E-04 -5.56112E-05 -2.14855E-06  9.99306E-02  4.60513E-04  8.55710E-04  2.38122E-04 -2.79336E-06
  2.100  5.20468E-02 -1.30108E-03 -7.05473E-04 -5.99295E-05 -2.19533E-06  9.97225E-02  7.04924E-04  9.31078E-04  2.80986E-04 -2.17391E-06
  2.200  5.21475E-02 -9.45125E-04 -7.06140E-04 -6.19890E-05 -1.95515E-06  9.95513E-02  8.76594E-04  9.91981E-04  3.22672E-04 -9.67351E-07
  2.300  5.22016E-02 -5.56816E-04 -6.86469E-04 -6.11044E-05 -1.30053E-06  9.94289E-02  9.66661E-04  1.03455E-03  3.60417E-04  8.97737E-07
  2.400  5.22134E-02 -1.48137E-04 -6.45345E-04 -5.66411E-05 -9.16967E-08  9.93636E-02  9.72087E-04  1.05550E-03  3.91119E-04  3.41367E-06
  2.500  5.21888E-02  2.67767E-04 -5.82505E-04 -4.80598E-05  1.81486E-06  9.93591E-02  8.95838E-04  1.05244E-03  4.11505E-04  6.46140E-06
  2.600  5.21350E-02  6.77102E-04 -4.98600E-04 -3.49570E-05  4.55576E-06  9.94147E-02  7.46637E-04  1.02406E-03  4.18351E-04  9.78276E-06
  2.700  5.20601E-02  1.06598E-03 -3.95209E-04 -1.70991E-05  8.24876E-06  9.95249E-02  5.38327E-04  9.70368E-04  4.08731E-04  1.29623E-05
  2.800  5.19731E-02  1.42099E-03 -2.74820E-04  5.55324E-06  1.29803E-05  9.96807E-02  2.88878E-04  8.92767E-04  3.80285E-04  1.54236E-05
  2.900  5.18830E-02  1.72981E-03 -1.40761E-04  3.28314E-05  1.87940E-05  9.98691E-02  1.91155E-05  7.94103E-04  3.31472E-04  1.64438E-05
  3.000  5.17988E-02  1.98174E-03  2.89862E-06  6.43561E-05  2.56805E-05  1.00075E-01 -2.48728E-04  6.78594E-04  2.61802E-04  1.51894E-05
  3.100  5.17290E-02  2.16824E-03  1.51488E-04  9.95454E-05  3.35710E-05  1.00281E-01 -4.92553E-04  5.51669E-04  1.72013E-04  1.07731E-05
  3.200  5.16811E-02  2.28332E-03  2.99898E-04  1.37632E-04  4.23340E-05  1.00472E-01 -6.91895E-04  4.19699E-04  6.41717E-05  2.32967E-06
  3.300  5.16613E-02  2.32396E-03  4.42764E-04  1.77689E-04  5.17762E-05  1.00629E-01 -8.29296E-04  2.89653E-04 -5.83144E-05 -1.08940E-05
  3.400  5.16743E-02  2.29025E-03  5.74674E-04  2.18657E-04  6.16483E-05  1.00739E-01 -8.91440E-04  1.68677E-04 -1.90787E-04 -2.94424E-05
  3.500  5.17225E-02  2.18559E-03  6.90374E-04  2.59376E-04  7.16539E-05  1.00788E-01 -8.69964E-04  6.36348E-05 -3.27528E-04 -5.35570E-05
  3.600  5.18064E-02  2.01661E-03  7.84983E-04  2.98621E-04  8.14625E-05  1.00769E-01 -7.61900E-04 -1.93674E-05 -4.62053E-04 -8.30958E-05
  3.700  5.19238E-02  1.79306E-03  8.54197E-04  3.35128E-04  9.07233E-05  1.00675E-01 -5.69700E-04 -7.54352E-05 -5.87482E-04 -1.17476E-04
  3.800  5.20701E-02  1.52751E-03  8.94486E-04  3.67624E-04  9.90808E-05  1.00503E-01 -3.00850E-04 -1.01282E-04 -6.96972E-04 -1.55651E-04
  3.900  5.22382E-02  1.23493E-03  9.03268E-04  3.94858E-04  1.06189E-04  1.00253E-01  3.28964E-05 -9.55325E-05 -7.84183E-04 -1.96125E-04
  4.000  5.24183E-02  9.32212E-04  8.79067E-04  4.15622E-04  1.11724E-04  9.99296E-02  4.16619E-04 -5.89050E-05 -8.43731E-04 -2.37012E-04
  4.100  5.25984E-02  6.37555E-04  8.21629E-04  4.28779E-04  1.15391E-04  9.95355E-02  8.33564E-04  5.75463E-06 -8.71614E-04 -2.76141E-04
  4.200  5.27642E-02  3.69768E-04  7.32010E-04  4.33293E-04  1.16934E-04  9.90761E-02  1.26662E-03  9.35990E-05 -8.65549E-04 -3.11195E-04
  4.300  5.28998E-02  1.47559E-04  6.12620E-04  4.28260E-04  1.16132E-04  9.85558E-02  1.69979E-03  1.98068E-04 -8.25214E-04 -3.39879E-04
  4.400  5.29877E-02 -1.12120E-05  4.67210E-04  4.12944E-04  1.12802E-04  9.79780E-02  2.11963E-03  3.11327E-04 -7.52359E-04 -3.60104E-04
  4.500  5.30099E-02 -9.02742E-05  3.00821E-04  3.86821E-04  1.06793E-04  9.73433E-02  2.51639E-03  4.24838E-04 -6.50772E-04 -3.70174E-04
  4.600  5.29478E-02 -7.56405E-05  1.19664E-04  3.49624E-04  9.79800E-05  9.66498E-02  2.88490E-03  5.30012E-04 -5.26099E-04 -3.68945E-04
  4.700  5.27834E-02  4.37630E-05 -6.90522E-05  3.01389E-04  8.62628E-05  9.58923E-02  3.22506E-03  6.18909E-04 -3.85531E-04 -3.55964E-04
  4.800  5.24997E-02  2.75567E-04 -2.57345E-04  2.42507E-04  7.15628E-05  9.50618E-02  3.54189E-03  6.84925E-04 -2.37369E-04 -3.31551E-04
  4.900  5.20812E-02  6.23552E-04 -4.36740E-04  1.73758E-04  5.38257E-05  9.41466E-02  3.84517E-03  7.23414E-04 -9.04986E-05 -2.96822E-04
  5.000  5.15149E-02  1.08739E-03 -5.98590E-04  9.63479E-05  3.30290E-05  9.31319E-02  4.14865E-03  7.32176E-04  4.61855E-05 -2.53659E-04
  5.100  5.07906E-02  1.66252E-03 -7.34431E-04  1.19160E-05  9.19323E-06  9.20014E-02  4.46892E-03  7.11794E-04  1.64363E-04 -2.04604E-04
  5.200  4.99011E-02  2.34028E-03 -8.36349E-04 -7.74711E-05 -1.76009E-05  9.07375E-02  4.82400E-03  6.65748E-04  2.56842E-04 -1.52706E-04
  5.300  4.88432E-02  3.10805E-03 -8.97353E-04 -1.69354E-04 -4.71936E-05  8.93231E-02  5.23182E-03  6.00313E-04  3.18039E-04 -1.01316E-04
  5.400  4.76172E-02  3.94974E-03 -9.11724E-04 -2.60945E-04 -7.93256E-05  8.77422E-02  5.70861E-03  5.24237E-04  3.44343E-04 -5.38636E-05
  5.500  4.62274E-02  4.84630E-03 -8.75325E-04 -3.49217E-04 -1.13620E-04  8.59815E-02  6.26739E-03  4.48198E-04  3.34353E-04 -1.36058E-05
  5.600  4.46820E-02  5.77637E-03 -7.85852E-04 -4.31021E-04 -1.49569E-04  8.40311E-02  6.91675E-03  3.84104E-04  2.88951E-04  1.65969E-05
  5.700  4.29925E-02  6.71713E-03 -6.43011E-04 -5.03226E-04 -1.86526E-04  8.18851E-02  7.65979E-03  3.44254E-04  2.11227E-04  3.44875E-05
  5.800  4.11738E-02  7.64504E-03 -4.48598E-04 -5.62867E-04 -2.23714E-04  7.95428E-02  8.49355E-03  3.40459E-04  1.06245E-04  3.85701E-05
  5.900  3.92433E-02  8.53676E-03 -2.06488E-04 -6.07309E-04 -2.60236E-04  7.70084E-02  9.40882E-03  3.83156E-04 -1.93168E-05  2.82113E-05
  6.000  3.72207E-02  9.36998E-03  7.74841E-05 -6.34386E-04 -2.95106E-04  7.42911E-02  1.03903E-02  4.80608E-04 -1.57629E-04  3.67726E-06
  6.100  3.51272E-02  1.01242E-02  3.95741E-04 -6.42547E-04 -3.27286E-04  7.14053E-02  1.14175E-02  6.38242E-04 -3.00238E-04 -3.38953E-05
  6.200  3.29848E-02  1.07814E-02  7.39267E-04 -6.30950E-04 -3.55733E-04  6.83695E-02  1.24652E-02  8.58173E-04 -4.38624E-04 -8.25905E-05
  6.300  3.08158E-02  1.13266E-02  1.09799E-03 -5.99538E-04 -3.79458E-04  6.52062E-02  1.35054E-02  1.13896E-03 -5.64739E-04 -1.39857E-04
  6.400  2.86421E-02  1.17486E-02  1.46122E-03 -5.49068E-04 -3.97578E-04  6.19405E-02  1.45082E-02  1.47560E-03 -6.71490E-04 -2.02692E-04
  6.500  2.64846E-02  1.20396E-02  1.81810E-03 -4.81082E-04 -4.09372E-04  5.85997E-02  1.54436E-02  1.85976E-03 -7.53144E-04 -2.67848E-04
  6.600  2.43630E-02  1.21962E-02  2.15810E-03 -3.97855E-04 -4.14330E-04  5.52122E-02  1.62832E-02  2.28025E-03 -8.05618E-04 -3.32048E-04
  6.700  2.22949E-02  1.22185E-02  2.47143E-03 -3.02275E-04 -4.12189E-04  5.18066E-02  1.70011E-02  2.72364E-03 -8.26641E-04 -3.92192E-04
  6.800  2.02960E-02  1.21105E-02  2.74947E-03 -1.97710E-04 -4.02956E-04  4.84109E-02  1.75757E-02  3.17505E-03 -8.15794E-04 -4.45534E-04
  6.900  1.83796E-02  1.18796E-02  2.98505E-03 -8.78318E-05 -3.86916E-04  4.50519E-02  1.79899E-02  3.61895E-03 -7.74424E-04 -4.89829E-04
  7.000  1.65567E-02  1.15361E-02  3.17279E-03  2.35632E-05 -3.64622E-04  4.17544E-02  1.82327E-02  4.04006E-03 -7.05446E-04 -5.23434E-04
  7.100  1.48359E-02  1.10925E-02  3.30913E-03  1.32743E-04 -3.36865E-04  3.85408E-02  1.82986E-02  4.42414E-03 -6.13065E-04 -5.45361E-04
  7.200  1.32234E-02  1.05634E-02  3.39250E-03  2.36217E-04 -3.04636E-04  3.54309E-02  1.81880E-02  4.75869E-03 -5.02428E-04 -5.55281E-04
  7.300  1.17231E-02  9.96439E-03  3.42318E-03  3.30891E-04 -2.69070E-04  3.24417E-02  1.79070E-02  5.03351E-03 -3.79255E-04 -5.53484E-04
  7.400  1.03369E-02  9.31179E-03  3.40323E-03  4.14195E-04 -2.31387E-04  2.95871E-02  1.74667E-02  5.24111E-03 -2.49458E-04 -5.40812E-04
  7.500  9.06491E-03  8.62184E-03  3.33626E-03  4.84174E-04 -1.92827E-04  2.68780E-02  1.68821E-02  5.37692E-03 -1.18791E-04 -5.18545E-04
  7.600  7.90559E-03  7.91029E-03  3.22716E-03  5.39541E-04 -1.54591E-04  2.43228E-02  1.61720E-02  5.43934E-03  7.46025E-06 -4.88293E-04
  7.700  6.85597E-03  7.19190E-03  3.08180E-03  5.79682E-04 -1.17780E-04  2.19267E-02  1.53572E-02  5.42958E-03  1.24725E-04 -4.51861E-04
  7.800  5.91193E-03  6.48007E-03  2.90671E-03  6.04637E-04 -8.33487E-05  1.96929E-02  1.44600E-02  5.35140E-03  2.29319E-04 -4.11130E-04
  7.900  5.06845E-03  5.78658E-03  2.70875E-03  6.15031E-04 -5.20737E-05  1.76218E-02  1.35031E-02  5.21072E-03  3.18549E-04 -3.67944E-04
  8.000  4.31978E-03  5.12137E-03  2.49479E-03  6.11996E-04 -2.45279E-05  1.57122E-02  1.25086E-02  5.01513E-03  3.90737E-04 -3.24011E-04
  8.100  3.65967E-03  4.49245E-03  2.27146E-03  5.97059E-04 -1.07347E-06  1.39609E-02  1.14975E-02  4.77344E-03  4.45182E-04 -2.80836E-04
  8.200  3.08155E-03  3.90591E-03  2.04489E-03  5.72028E-04  1.81334E-05  1.23632E-02  1.04889E-02  4.49510E-03  4.82070E-04 -2.39666E-04
  8.300  2.57866E-03  3.36597E-03  1.82056E-03  5.38879E-04  3.31263E-05  1.09132E-02  9.49976E-03  4.18977E-03  5.02341E-04 -2.01464E-04
  8.400  2.14422E-03  2.87510E-03  1.60313E-03  4.99639E-04  4.41036E-05  9.60381E-03  8.54427E-03  3.86688E-03  5.07531E-04 -1.66904E-04
  8.500  1.77153E-03  2.43419E-03  1.39644E-03  4.56288E-04  5.13966E-05  8.42724E-03  7.63404E-03  3.53525E-03  4.99602E-04 -1.36389E-04
  8.600  1.45410E-03  2.04279E-03  1.20338E-03  4.10673E-04  5.54345E-05  7.37508E-03  6.77792E-03  3.20283E-03  4.80775E-04 -1.10069E-04
  8.700  1.18568E-03  1.69929E-03  1.02603E-03  3.64449E-04  5.67083E-05  6.43855E-03  5.98217E-03  2.87650E-03  4.53377E-04 -8.78895E-05
  8.800  9.60395E-04  1.40120E-03  8.65616E-04  3.19025E-04  5.57372E-05  5.60865E-03  5.25063E-03  2.56196E-03  4.19699E-04 -6.96279E-05
  8.900  7.72724E-04  1.14536E-03  7.22670E-04  2.75549E-04  5.30378E-05  4.87638E-03  4.58500E-03  2.26369E-03  3.81895E-04 -5.49414E-05
  9.000  6.17583E-04  9.28160E-04  5.97093E-04  2.34893E-04  4.90989E-05  4.23282E-03  3.98512E-03  1.98502E-03  3.41895E-04 -4.34101E-05
  9.100  4.90328E-04  7.45727E-04  4.88288E-04  1.97668E-04  4.43624E-05  3.66934E-03  3.44934E-03  1.72811E-03  3.01355E-04 -3.45762E-05
  9.200  3.86763E-04  5.94113E-04  3.95269E-04  1.64239E-04  3.92099E-05  3.17765E-03  2.97478E-03  1.49420E-03  2.61628E-04 -2.79769E-05
  9.300  3.03144E-04  4.69421E-04  3.16779E-04  1.34763E-04  3.39560E-05  2.74992E-03  2.55769E-03  1.28362E-03  2.23762E-04 -2.31706E-05
  9.400  2.36164E-04  3.67922E-04  2.51388E-04  1.09218E-04  2.88461E-05  2.37882E-03  2.19374E-03  1.09605E-03  1.88511E-04 -1.97555E-05
  9.500  1.82935E-04  2.86135E-04  1.97586E-04  8.74422E-05  2.40593E-05  2.05756E-03  1.87822E-03  9.30605E-04  1.56368E-04 -1.73812E-05
  9.600  1.40964E-04  2.20885E-04  1.53856E-04  6.91734E-05  1.97141E-05  1.77995E-03  1.60630E-03  7.85990E-04  1.27595E-04 -1.57549E-05
  9.700  1.08123E-04  1.69332E-04  1.18736E-04  5.40816E-05  1.58770E-05  1.54038E-03  1.37317E-03  6.60654E-04  1.02268E-04 -1.46413E-05
  9.800  8.26152E-05  1.28982E-04  9.08564E-05  4.18000E-05  1.25718E-05  1.33381E-03  1.17421E-03  5.52885E-04  8.03172E-05 -1.38595E-05
  9.900  6.29429E-05  9.76871E-05  6.89736E-05  3.19502E-05  9.78930E-06  1.15577E-03  1.00505E-03  4.60902E-04  6.15676E-05 -1.32772E-05
 10.000  4.78698E-05  7.36246E-05  5.19844E-05  2.41621E-05  7.49660E-06  1.00231E-03  8.61646E-04  3.82937E-04  4.57727E-05 -1.28030E-05
 10.100  3.63881E-05  5.52730E-05  3.89318E-05  1.80887E-05  5.64575E-06  8.69984E-04  7.40339E-04  3.17282E-04  3.26453E-05 -1.23781E-05
 10.200  2.76859E-05  4.13814E-05  2.90024E-05  1.34155E-05  4.18062E-06  7.55788E-04  6.37846E-04  2.62334E-04  2.18819E-05 -1.19690E-05
 10.300  2.11161E-05  3.09363E-05  2.15185E-05  9.86588E-06  3.04265E-06  6.57131E-04  5.51273E-04  2.16613E-04  1.31804E-05 -1.15595E-05
 10.400  1.61693E-05  2.31281E-05  1.59252E-05  7.20283E-06  2.17498E-06  5.71787E-04  4.78094E-04  1.78780E-04  6.25326E-06 -1.11450E-05
 10.500  1.24485E-05  1.73184E-05  1.17762E-05  5.22830E-06  1.52534E-06  4.97850E-04  4.16132E-04  1.47639E-04  8.35455E-07 -1.07277E-05
 10.600  9.64801E-06  1.30106E-05  8.71807E-06  3.78041E-06  1.04766E-06  4.33695E-04  3.63526E-04  1.22134E-04 -3.31119E-06 -1.03123E-05
 10.700  7.53466E-06  9.82250E-06  6.47544E-06  2.72960E-06  7.02815E-07  3.77940E-04  3.18702E-04  1.01341E-04 -6.39661E-06 -9.90424E-06
 10.800  5.93238E-06  7.46383E-06  4.83665E-06  1.97416E-06  4.58609E-07  3.29412E-04  2.80342E-04  8.44626E-05 -8.60312E-06 -9.50757E-06
 10.900  4.70945E-06  5.71602E-06  3.64128E-06  1.43571E-06  2.89301E-07  2.87114E-04  2.47346E-04  7.08121E-05 -1.00875E-05 -9.12451E-06
 11.000  3.76805E-06  4.41623E-06  2.76913E-06  1.05482E-06  1.74822E-07  2.50200E-04  2.18806E-04  5.98046E-05 -1.09835E-05 -8.75520E-06
 11.100  3.03608E-06  3.44406E-06  2.13116E-06  7.87093E-07  9.98707E-08  2.17949E-04  1.93975E-04  5.09449E-05 -1.14050E-05 -8.39805E-06
 11.200  2.46065E-06  2.71116E-06  1.66203E-06  5.99803E-07  5.29963E-08  1.89748E-04  1.72244E-04  4.38166E-05 -1.14488E-05 -8.05013E-06
 11.300  2.00310E-06  2.15309E-06  1.31415E-06  4.69075E-07  2.57519E-08  1.65074E-04  1.53118E-04  3.80725E-05 -1.11970E-05 -7.70782E-06
 11.400  1.63522E-06  1.72308E-06  1.05313E-06  3.77652E-07  1.19639E-08  1.43476E-04  1.36195E-04  3.34252E-05 -1.07198E-05 -7.36736E-06
 11.500  1.33639E-06  1.38733E-06  8.54268E-07  3.13150E-07  7.13805E-09  1.24570E-04  1.21152E-04  2.96388E-05 -1.00764E-05 -7.02533E-06
 11.600  1.09152E-06  1.12149E-06  6.99911E-07  2.66750E-07  8.00086E-09  1.08022E-04  1.07726E-04  2.65220E-05 -9.31740E-06 -6.67902E-06
 11.700  8.89469E-07  9.08096E-07  5.77545E-07  2.32220E-07  1.21619E-08  9.35421E-05  9.57057E-05  2.39212E-05 -8.48535E-06 -6.32669E-06
 11.800  7.21943E-07  7.34620E-07  4.78369E-07  2.05216E-07  1.78760E-08  8.08806E-05  8.49195E-05  2.17146E-05 -7.61588E-06 -5.96762E-06
 11.900  5.82698E-07  5.92110E-07  3.96260E-07  1.82773E-07  2.38812E-08  6.98181E-05  7.52265E-05  1.98075E-05 -6.73836E-06 -5.60219E-06
 12.000  4.66945E-07  4.74154E-07  3.27024E-07  1.62942E-07  2.92908E-08  6.01627E-05  6.65105E-05  1.81271E-05 -5.87656E-06 -5.23170E-06
 12.100  3.70944E-07  3.76136E-07  2.67832E-07  1.44521E-07  3.35198E-08  5.17459E-05  5.86740E-05  1.66191E-05 -5.04915E-06 -4.85827E-06
 12.200  2.91702E-07  2.94694E-07  2.16815E-07  1.26855E-07  3.62318E-08  4.44195E-05  5.16341E-05  1.52435E-05 -4.27026E-06 -4.48459E-06
 12.300  2.26766E-07  2.27319E-07  1.72755E-07  1.09679E-07  3.72955E-08  3.80523E-05  4.53187E-05  1.39720E-05 -3.54995E-06 -4.11376E-06
 12.400  1.74072E-07  1.72073E-07  1.34856E-07  9.29911E-08  3.67450E-08  3.25287E-05  3.96642E-05  1.27854E-05 -2.89476E-06 -3.74905E-06
 12.500  1.31846E-07  1.27384E-07  1.02575E-07  7.69565E-08  3.47419E-08  2.77459E-05  3.46134E-05  1.16709E-05 -2.30815E-06 -3.39371E-06
 12.600  9.85306E-08  9.19083E-08  7.55000E-08  6.18232E-08  3.15371E-08  2.36132E-05  3.01141E-05  1.06209E-05 -1.79102E-06 -3.05081E-06
 12.700  7.27425E-08  6.44432E-08  5.32675E-08  4.78603E-08  2.74354E-08  2.00498E-05  2.61181E-05  9.63106E-06 -1.34219E-06 -2.72312E-06
 12.800  5.32421E-08  4.38740E-08  3.55111E-08  3.53113E-08  2.27618E-08  1.69842E-05  2.25805E-05  8.69926E-06 -9.58846E-07 -2.41298E-06
 12.900  3.89178E-08  2.91482E-08  2.18322E-08  2.43629E-08  1.78339E-08  1.43530E-05  1.94593E-05  7.82474E-06 -6.36929E-07 -2.12228E-06
 13.000  2.87767E-08  1.92691E-08  1.17922E-08  1.51273E-08  1.29393E-08  1.21000E-05  1.67153E-05  7.00734E-06 -3.71534E-07 -1.85242E-06
 13.100  2.19398E-08  1.32993E-08  4.91694E-09  7.63638E-09  8.31951E-09  1.01758E-05  1.43114E-05  6.24706E-06 -1.57224E-07 -1.60426E-06
 13.200  1.76390E-08  1.03721E-08  7.09533E-10  1.84489E-09  4.16105E-09  8.53630E-06  1.22132E-05  5.54373E-06  1.16992E-08 -1.37821E-06
 13.300  1.52150E-08  9.70310E-09 -1.33150E-09 -2.35917E-09  5.91975E-10  7.14303E-06  1.03885E-05  4.89679E-06  1.40961E-07 -1.17424E-06
 13.400  1.41133E-08  1.06013E-08 -1.69351E-09 -5.14014E-09 -2.31628E-09  5.96204E-06  8.80745E-06  4.30521E-06  2.36139E-07 -9.91900E-07
 13.500  1.38791E-08  1.24765E-08 -8.32172E-10 -6.69803E-09 -4.54316E-09  4.96358E-06  7.44259E-06  3.76748E-06  3.02526E-07 -8.30421E-07
 13.600  1.41506E-08  1.48427E-08  8.42767E-10 -7.25197E-09 -6.11069E-09  4.12164E-06  6.26864E-06  3.28159E-06  3.45031E-07 -6.88756E-07
 13.700  1.46507E-08  1.73167E-08  2.97774E-09 -7.02482E-09 -7.07361E-09  3.41355E-06  5.26254E-06  2.84514E-06  3.68122E-07 -5.65651E-07
 13.800  1.51770E-08  1.96130E-08  5.28111E-09 -6.23033E-09 -7.50937E-09  2.81962E-06  4.40341E-06  2.45538E-06  3.75783E-07 -4.59699E-07
 13.900  1.55912E-08  2.15345E-08  7.52461E-09 -5.06318E-09 -7.50852E-09  2.32276E-06  3.67239E-06  2.10931E-06  3.71513E-07 -3.69402E-07
 14.000  1.58086E-08  2.29615E-08  9.54124E-09 -3.69220E-09 -7.16630E-09  1.90824E-06  3.05260E-06  1.80375E-06  3.58325E-07 -2.93219E-07
 14.100  1.57873E-08  2.38389E-08  1.12200E-08 -2.25661E-09 -6.57579E-09  1.56334E-06  2.52896E-06  1.53546E-06  3.38771E-07 -2.29612E-07
 14.200  1.55182E-08  2.41627E-08  1.24991E-08 -8.64825E-10 -5.82269E-09  1.27716E-06  2.08814E-06  1.30117E-06  3.14975E-07 -1.77079E-07
 14.300  1.50157E-08  2.39674E-08  1.33568E-08  4.04451E-10 -4.98189E-09  1.04037E-06  1.71833E-06  1.09766E-06  2.88668E-07 -1.34186E-07
 14.400  1.43102E-08  2.33139E-08  1.38038E-08  1.49965E-09 -4.11545E-09  8.44996E-07  1.40919E-06  9.21823E-07  2.61227E-07 -9.95887E-08
 14.500  1.34412E-08  2.22789E-08  1.38735E-08  2.39265E-09 -3.27201E-09  6.84259E-07  1.15169E-06  7.70683E-07  2.33725E-07 -7.20482E-08
 14.600  1.24520E-08  2.09464E-08  1.36150E-08  3.07453E-09 -2.48716E-09  5.52406E-07  9.37959E-07  6.41437E-07  2.06967E-07 -5.04393E-08
 14.700  1.13858E-08  1.94006E-08  1.30861E-08  3.55120E-09 -1.78454E-09  4.44570E-07  7.61202E-07  5.31476E-07  1.81532E-07 -3.37560E-08
 14.800  1.02828E-08  1.77208E-08  1.23472E-08  3.83922E-09 -1.17754E-09  3.56646E-07  6.15549E-07  4.38392E-07  1.57813E-07 -2.11115E-08
 14.900  9.17816E-09  1.59779E-08  1.14576E-08  3.96206E-09 -6.71044E-10  2.85181E-07  4.95966E-07  3.59989E-07  1.36050E-07 -1.17346E-08
 15.000  8.10126E-09  1.42323E-08  1.04721E-08  3.94683E-09 -2.63429E-10  2.27281E-07  3.98151E-07  2.94280E-07  1.16361E-07 -4.96398E-09
 15.100  7.07508E-09  1.25330E-08  9.43880E-09  3.82175E-09  5.16804E-11  1.80523E-07  3.18441E-07  2.39483E-07  9.87712E-08 -2.40031E-10
 15.200  6.11645E-09  1.09175E-08  8.39812E-09  3.61418E-09  2.83766E-10  1.42891E-07  2.53732E-07  1.94011E-07  8.32330E-08  2.90420E-09
 15.300  5.23657E-09  9.41272E-09  7.38250E-09  3.34924E-09  4.44047E-10  1.12706E-07  2.01402E-07  1.56463E-07  6.96493E-08  4.85287E-09
 15.400  4.44166E-09  8.03601E-09  6.41650E-09  3.04892E-09  5.44378E-10  8.85794E-08  1.59249E-07  1.25610E-07  5.78881E-08  5.91745E-09
 15.500  3.73380E-09  6.79647E-09  5.51748E-09  2.73173E-09  5.96408E-10  6.93645E-08  1.25428E-07  1.00384E-07  4.77967E-08  6.34649E-09
 15.600  3.11175E-09  5.69652E-09  4.69645E-09  2.41251E-09  6.10994E-10  5.41171E-08  9.84007E-08  7.98584E-08  3.92114E-08  6.33506E-09
 15.700  2.57180E-09  4.73335E-09  3.95908E-09  2.10262E-09  5.97829E-10  4.20630E-08  7.68895E-08  6.32401E-08  3.19666E-08  6.03340E-09
 15.800  2.10846E-09  3.90027E-09  3.30673E-09  1.81027E-09  5.65241E-10  3.25695E-08  5.98392E-08  4.98511E-08  2.59005E-08  5.55482E-09
 15.900  1.71513E-09  3.18794E-09  2.73747E-09  1.54088E-09  5.20137E-10  2.51215E-08  4.63807E-08  3.91168E-08  2.08590E-08  4.98265E-09
 16.000  1.38464E-09  2.58540E-09  2.24694E-09  1.29761E-09  4.68042E-10  1.93011E-08  3.58019E-08  3.05531E-08  1.66992E-08  4.37634E-09
 16.100  1.10961E-09  2.08088E-09  1.82919E-09  1.08174E-09  4.13210E-10  1.47708E-08  2.75218E-08  2.37545E-08  1.32910E-08  3.77665E-09
 16.200  8.82850E-10  1.66250E-09  1.47731E-09  8.93150E-10  3.58779E-10  1.12587E-08  2.10687E-08  1.83837E-08  1.05176E-08  3.21001E-09
 16.300  6.97531E-10  1.31874E-09  1.18396E-09  7.30714E-10  3.06933E-10  8.54722E-09  1.60612E-08  1.41617E-08  8.27557E-09  2.69210E-09
 16.400  5.47360E-10  1.03877E-09  9.41788E-10  5.92598E-10  2.59083E-10  6.46240E-09  1.21922E-08  1.08590E-08  6.47496E-09  2.23079E-09
 16.500  4.26661E-10  8.12664E-10  7.43726E-10  4.76555E-10  2.16025E-10  4.86613E-09  9.21596E-09  8.28811E-09  5.03801E-09  1.82839E-09
 16.600  3.30413E-10  6.31549E-10  5.83175E-10  3.80138E-10  1.78088E-10  3.64905E-09  6.93660E-09  6.29666E-09  3.89844E-09  1.48351E-09
 16.700  2.54246E-10  4.87606E-10  4.54137E-10  3.00860E-10  1.45265E-10  2.72503E-09  5.19864E-09  4.76161E-09  3.00022E-09  1.19241E-09
 16.800  1.94415E-10  3.74073E-10  3.51276E-10  2.36315E-10  1.17317E-10  2.02651E-09  3.87939E-09  3.58415E-09  2.29652E-09  9.49983E-10
 16.900  1.47753E-10  2.85183E-10  2.69929E-10  1.84255E-10  9.38563E-11  1.50072E-09  2.88244E-09  2.68539E-09  1.74848E-09  7.50528E-10
 17.000  1.11614E-10  2.16083E-10  2.06086E-10  1.42639E-10  7.44173E-11  1.10668E-09  2.13243E-09  2.00271E-09  1.32417E-09  5.88234E-10
 17.100  8.38153E-11  1.62741E-10  1.56352E-10  1.09656E-10  5.85013E-11  8.12641E-10  1.57073E-09  1.48668E-09  9.97556E-10  4.57523E-10
 17.200  6.25742E-11  1.21843E-10  1.17888E-10  8.37286E-11  4.56132E-11  5.94197E-10  1.15196E-09  1.09852E-09  7.47584E-10  3.53250E-10
 17.300  4.64487E-11  9.06918E-11  8.83470E-11  6.35084E-11  3.52844E-11  4.32622E-10  8.41153E-10  8.07968E-10  5.57348E-10  2.70811E-10
 17.400  3.42843E-11  6.71186E-11  6.58140E-11  4.78596E-11  2.70871E-11  3.13638E-10  6.11526E-10  5.91525E-10  4.13383E-10  2.06187E-10
 17.500  2.51650E-11  4.93926E-11  4.87407E-11  3.58381E-11  2.06412E-11  2.26405E-10  4.42642E-10  4.31072E-10  3.05038E-10  1.55938E-10
 17.600  1.83701E-11  3.61461E-11  3.58883E-11  2.66695E-11  1.56170E-11  1.62733E-10  3.18997E-10  3.12698E-10  2.23946E-10  1.17170E-10
 17.700  1.33374E-11  2.63071E-11  2.62748E-11  1.97255E-11  1.17337E-11  1.16465E-10  2.28884E-10  2.25788E-10  1.63581E-10  8.74815E-11
 17.800  9.63176E-12  1.90427E-11  1.91288E-11  1.45021E-11  8.75648E-12  8.29938E-11  1.63507E-10  1.62287E-10  1.18889E-10  6.49105E-11
 17.900  6.91901E-12  1.37107E-11  1.38494E-11  1.05991E-11  6.49155E-12  5.88870E-11  1.16292E-10  1.16111E-10  8.59752E-11  4.78703E-11
 18.000  4.94440E-12  9.81953E-12  9.97243E-12  7.70168E-12  4.78144E-12  4.16023E-11  8.23490E-11  8.26936E-11  6.18652E-11  3.50929E-11
 18.100  3.51511E-12  6.99604E-12  7.14213E-12  5.56435E-12  3.49962E-12  2.92642E-11  5.80574E-11  5.86253E-11  4.42966E-11  2.55752E-11
 18.200  2.48625E-12  4.95870E-12  5.08792E-12  3.99755E-12  2.54560E-12  2.04965E-11  4.07521E-11  4.13729E-11  3.15615E-11  1.85313E-11
 18.300  1.74966E-12  3.49673E-12  3.60550E-12  2.85600E-12  1.84042E-12  1.42936E-11  2.84797E-11  2.90648E-11  2.23778E-11  1.33512E-11
 18.400  1.22515E-12  2.45333E-12  2.54172E-12  2.02927E-12  1.32266E-12  9.92491E-12  1.98159E-11  2.03256E-11  1.57893E-11  9.56524E-12
 18.500  8.53630E-13  1.71267E-12  1.78259E-12  1.43406E-12  9.44997E-13  6.86170E-12  1.37274E-11  1.41498E-11  1.10867E-11  6.81497E-12
 18.600  5.91856E-13  1.18969E-12  1.24382E-12  1.00802E-12  6.71278E-13  4.72344E-12  9.46806E-12  9.80589E-12  7.74718E-12  4.82898E-12
 18.700  4.08363E-13  8.22351E-13  8.63523E-13  7.04814E-13  4.74137E-13  3.23748E-12  6.50175E-12  6.76489E-12  5.38767E-12  3.40328E-12
 18.800  2.80401E-13  5.65667E-13  5.96506E-13  4.90237E-13  3.33019E-13  2.20943E-12  4.44529E-12  4.64596E-12  3.72891E-12  2.38571E-12
 18.900  1.91616E-13  3.87225E-13  4.10018E-13  3.39226E-13  2.32612E-13  1.50133E-12  3.02602E-12  3.17639E-12  2.56859E-12  1.66357E-12
 19.000  1.30322E-13  2.63804E-13  2.80450E-13  2.33533E-13  1.61594E-13  1.01578E-12  2.05091E-12  2.16193E-12  1.76097E-12  1.15395E-12
 19.100  8.82178E-14  1.78867E-13  1.90893E-13  1.59956E-13  1.11655E-13  6.84300E-13  1.38398E-12  1.46488E-12  1.20160E-12  7.96310E-13
 19.200  5.94373E-14  1.20705E-13  1.29308E-13  1.09011E-13  7.67389E-14  4.59012E-13  9.29862E-13  9.88144E-13  8.16065E-13  5.46694E-13
 19.300  3.98603E-14  8.10739E-14  8.71715E-14  7.39225E-14  5.24647E-14  3.06572E-13  6.22042E-13  6.63590E-13  5.51644E-13  3.73416E-13
 19.400  2.66082E-14  5.42015E-14  5.84865E-14  4.98812E-14  3.56827E-14  2.03879E-13  4.14318E-13  4.43655E-13  3.71167E-13  2.53774E-13
 19.500  1.76805E-14  3.60687E-14  3.90555E-14  3.34942E-14  2.41440E-14  1.35004E-13  2.74767E-13  2.95299E-13  2.48579E-13  1.71603E-13
 19.600  1.16947E-14  2.38918E-14  2.59578E-14  2.23816E-14  1.62534E-14  8.90138E-14  1.81432E-13  1.95682E-13  1.65711E-13  1.15462E-13
 19.700  7.70042E-15  1.57536E-14  1.71722E-14  1.48840E-14  1.08864E-14  5.84396E-14  1.19285E-13  1.29099E-13  1.09961E-13  7.73058E-14
 19.800  5.04752E-15  1.03404E-14  1.13076E-14  9.85067E-15  7.25520E-15  3.82031E-14  7.80876E-14  8.47958E-14  7.26330E-14  5.15056E-14
 19.900  3.29376E-15  6.75656E-15  7.41162E-15  6.48856E-15  4.81125E-15  2.48675E-14  5.08986E-14  5.54517E-14  4.77578E-14  3.41493E-14
  67 213 200   0.100
  0.000  4.66437E-02 -2.63769E-16 -3.12250E-16 -5.87936E-16 -7.15245E-17  9.86242E-02 -4.96507E-16 -8.74301E-16 -6.50482E-16 -1.05856E-15
  0.100  4.66679E-02 -2.52163E-05 -2.01049E-08 -6.10157E-12 -1.16585E-15  9.86620E-02 -3.61158E-05  9.22913E-09  7.91254E-12  7.05231E-15
  0.200  4.67401E-02 -9.99277E-05 -3.18911E-07 -3.86681E-10 -2.97935E-13  9.87730E-02 -1.41586E-04  1.47416E-07  5.04951E-10 -4.52392E-13
  0.300  4.68592E-02 -2.21346E-04 -1.59138E-06 -4.33268E-09 -7.47997E-12  9.89505E-02 -3.08000E-04  7.44085E-07  5.72115E-09 -1.13602E-11
  0.400  4.70238E-02 -3.84906E-04 -4.92879E-06 -2.37887E-08 -7.29825E-11  9.91839E-02 -5.22048E-04  2.34131E-06  3.18970E-08 -1.08718E-10
  0.500  4.72313E-02 -5.84388E-04 -1.17232E-05 -8.80892E-08 -4.22116E-10  9.94592E-02 -7.66537E-04  5.68113E-06  1.20421E-07 -6.13679E-10
  0.600  4.74787E-02 -8.12089E-04 -2.35429E-05 -2.53623E-07 -1.74926E-09  9.97601E-02 -1.02169E-03  1.16845E-05  3.54825E-07 -2.46621E-09
  0.700  4.77621E-02 -1.05904E-03 -4.19881E-05 -6.12501E-07 -5.74654E-09  1.00069E-01 -1.26666E-03  2.14190E-05  8.80037E-07 -7.80200E-09
  0.800  4.80772E-02 -1.31529E-03 -6.85363E-05 -1.29815E-06 -1.58960E-08  1.00368E-01 -1.48108E-03  3.60530E-05  1.92165E-06 -2.06187E-08
  0.900  4.84187E-02 -1.57017E-03 -1.04389E-04 -2.48595E-06 -3.84925E-08  1.00641E-01 -1.64666E-03  5.67939E-05  3.80233E-06 -4.72662E-08
  1.000  4.87807E-02 -1.81271E-03 -1.50329E-04 -4.38771E-06 -8.37856E-08  1.00872E-01 -1.74853E-03  8.48103E-05  6.95186E-06 -9.63511E-08
  1.100  4.91569E-02 -2.03195E-03 -2.06603E-04 -7.23919E-06 -1.67052E-07  1.01051E-01 -1.77639E-03  1.21139E-04  1.19072E-05 -1.77567E-07
  1.200  4.95405E-02 -2.21739E-03 -2.72831E-04 -1.12812E-05 -3.09340E-07  1.01168E-01 -1.72530E-03  1.66583E-04  1.92990E-05 -2.98996E-07
  1.300  4.99245E-02 -2.35933E-03 -3.47960E-04 -1.67354E-05 -5.37614E-07  1.01221E-01 -1.59608E-03  2.21594E-04  2.98213E-05 -4.62586E-07
  1.400  5.03017E-02 -2.44933E-03 -4.30252E-04 -2.37768E-05 -8.84011E-07  1.01209E-01 -1.39526E-03  2.86170E-04  4.41833E-05 -6.57861E-07
  1.500  5.06651E-02 -2.48052E-03 -5.17321E-04 -3.25053E-05 -1.38404E-06  1.01137E-01 -1.13463E-03  3.59751E-04  6.30425E-05 -8.54345E-07
  1.600  5.10080E-02 -2.44799E-03 -6.06216E-04 -4.29202E-05 -2.07363E-06  1.01014E-01 -8.30382E-04  4.41144E-04  8.69227E-05 -9.93697E-07
  1.700  5.13244E-02 -2.34898E-03 -6.93533E-04 -5.48998E-05 -2.98508E-06  1.00850E-01 -5.01919E-04  5.28468E-04  1.16120E-04 -9.83062E-07
  1.800  5.16087E-02 -2.18311E-03 -7.75569E-04 -6.81881E-05 -4.14231E-06  1.00661E-01 -1.70468E-04  6.19158E-04  1.50606E-04 -6.91480E-07
  1.900  5.18568E-02 -1.95252E-03 -8.48496E-04 -8.23925E-05 -5.55564E-06  1.00460E-01  1.42491E-04  7.10001E-04  1.89937E-04  4.86763E-08
  2.000  5.20654E-02 -1.66180E-03 -9.08546E-04 -9.69918E-05 -7.21693E-06  1.00265E-01  4.16788E-04  7.97235E-04  2.33178E-04  1.43345E-06
  2.100  5.22326E-02 -1.31797E-03 -9.52207E-04 -1.11355E-04 -9.09558E-06  1.00088E-01  6.35048E-04  8.76711E-04  2.78858E-04  3.67105E-06
  2.200  5.23579E-02 -9.30243E-04 -9.76407E-04 -1.24767E-04 -1.11362E-05  9.99433E-02  7.83961E-04  9.44095E-04  3.24964E-04  6.95720E-06
  2.300  5.24423E-02 -5.09744E-04 -9.78685E-04 -1.36470E-04 -1.32583E-05  9.98408E-02  8.55268E-04  9.95125E-04  3.68977E-04  1.14432E-05
  2.400  5.24881E-02 -6.91249E-05 -9.57334E-04 -1.45697E-04 -1.53591E-05  9.97869E-02  8.46382E-04  1.02590E-03  4.07968E-04  1.71985E-05
  2.500  5.24990E-02  3.77898E-04 -9.11518E-04 -1.51718E-04 -1.73181E-05  9.97848E-02  7.60592E-04  1.03318E-03  4.38743E-04  2.41724E-05
  2.600  5.24798E-02  8.17068E-04 -8.41349E-04 -1.53878E-04 -1.90055E-05  9.98333E-02  6.06845E-04  1.01467E-03  4.58036E-04  3.21576E-05
  2.700  5.24364E-02  1.23415E-03 -7.47923E-04 -1.51633E-04 -2.02917E-05  9.99275E-02  3.99125E-04  9.69313E-04  4.62745E-04  4.07636E-05
  2.800  5.23755E-02  1.61551E-03 -6.33324E-04 -1.44577E-04 -2.10587E-05  1.00059E-01  1.55461E-04  8.97449E-04  4.50189E-04  4.94029E-05
  2.900  5.23042E-02  1.94870E-03 -5.00575E-04 -1.32463E-04 -2.12114E-05  1.00217E-01 -1.03350E-04  8.00971E-04  4.18366E-04  5.72967E-05
  3.000  5.22298E-02  2.22298E-03 -3.53561E-04 -1.15212E-04 -2.06885E-05  1.00387E-01 -3.55214E-04  6.83337E-04  3.66202E-04  6.35015E-05
  3.100  5.21595E-02  2.42986E-03 -1.96916E-04 -9.29172E-05 -1.94709E-05  1.00556E-01 -5.78296E-04  5.49482E-04  2.93747E-04  6.69604E-05
  3.200  5.20999E-02  2.56346E-03 -3.58719E-05 -6.58406E-05 -1.75875E-05  1.00708E-01 -7.52547E-04  4.05603E-04  2.02321E-04  6.65757E-05
  3.300  5.20568E-02  2.62089E-03  1.23911E-04 -3.44013E-05 -1.51174E-05  1.00829E-01 -8.61080E-04  2.58840E-04  9.45674E-05  6.12998E-05
  3.400  5.20348E-02  2.60245E-03  2.76541E-04  8.35580E-07 -1.21872E-05  1.00907E-01 -8.91297E-04  1.16843E-04 -2.55839E-05  5.02373E-05
  3.500  5.20367E-02  2.51174E-03  4.16100E-04  3.91716E-05 -8.96548E-06  1.00930E-01 -8.35678E-04 -1.27232E-05 -1.53056E-04  3.27507E-05
  3.600  5.20639E-02  2.35562E-03  5.36872E-04  7.97879E-05 -5.65302E-06  1.00891E-01 -6.92176E-04 -1.22728E-04 -2.81866E-04  8.55644E-06
  3.700  5.21153E-02  2.14409E-03  6.33563E-04  1.21756E-04 -2.47052E-06  1.00783E-01 -4.64179E-04 -2.07119E-04 -4.05449E-04 -2.21961E-05
  3.800  5.21879E-02  1.88994E-03  7.01525E-04  1.64047E-04  3.54646E-07  1.00605E-01 -1.60054E-04 -2.61422E-04 -5.17063E-04 -5.88759E-05
  3.900  5.22763E-02  1.60843E-03  7.36974E-04  2.05540E-04  2.60168E-06  1.00355E-01  2.07695E-04 -2.83154E-04 -6.10227E-04 -1.00358E-04
  4.000  5.23726E-02  1.31673E-03  7.37184E-04  2.45032E-04  4.06804E-06  1.00035E-01  6.23597E-04 -2.72106E-04 -6.79178E-04 -1.45054E-04
  4.100  5.24668E-02  1.03328E-03  7.00661E-04  2.81252E-04  4.57818E-06  9.96482E-02  1.07060E-03 -2.30460E-04 -7.19300E-04 -1.90986E-04
  4.200  5.25469E-02  7.77172E-04  6.27286E-04  3.12880E-04  3.98855E-06  9.91960E-02  1.53157E-03 -1.62720E-04 -7.27504E-04 -2.35903E-04
  4.300  5.25989E-02  5.67361E-04  5.18408E-04  3.38577E-04  2.18831E-06  9.86813E-02  1.99079E-03 -7.54553E-05 -7.02514E-04 -2.77429E-04
  4.400  5.26078E-02  4.21928E-04  3.76893E-04  3.57021E-04 -9.04065E-07  9.81050E-02  2.43536E-03  2.31466E-05 -6.45031E-04 -3.13234E-04
  4.500  5.25571E-02  3.57324E-04  2.07108E-04  3.66960E-04 -5.34758E-06  9.74662E-02  2.85624E-03  1.23881E-04 -5.57779E-04 -3.41215E-04
  4.600  5.24305E-02  3.87655E-04  1.48506E-05  3.67274E-04 -1.11877E-05  9.67616E-02  3.24915E-03  2.17245E-04 -4.45396E-04 -3.59672E-04
  4.700  5.22114E-02  5.24038E-04 -1.92803E-04  3.57045E-04 -1.84662E-05  9.59852E-02  3.61488E-03  2.94215E-04 -3.14190E-04 -3.67456E-04
  4.800  5.18842E-02  7.74056E-04 -4.07706E-04  3.35632E-04 -2.72288E-05  9.51283E-02  3.95929E-03  3.47032E-04 -1.71776E-04 -3.64082E-04
  4.900  5.14346E-02  1.14134E-03 -6.20925E-04  3.02745E-04 -3.75314E-05  9.41798E-02  4.29284E-03  3.69911E-04 -2.66019E-05 -3.49798E-04
  5.000  5.08501E-02  1.62531E-03 -8.23073E-04  2.58515E-04 -4.94400E-05  9.31267E-02  4.62972E-03  3.59633E-04  1.12585E-04 -3.25595E-04
  5.100  5.01210E-02  2.22105E-03 -1.00469E-03  2.03548E-04 -6.30262E-05  9.19546E-02  4.98665E-03  3.15951E-04  2.37301E-04 -2.93154E-04
  5.200  4.92402E-02  2.91940E-03 -1.15666E-03  1.38958E-04 -7.83563E-05  9.06488E-02  5.38147E-03  2.41766E-04  3.39886E-04 -2.54745E-04
  5.300  4.82038E-02  3.70721E-03 -1.27062E-03  6.63694E-05 -9.54756E-05  8.91950E-02  5.83157E-03  1.43070E-04  4.13994E-04 -2.13075E-04
  5.400  4.70116E-02  4.56776E-03 -1.33938E-03 -1.21014E-05 -1.14388E-04  8.75801E-02  6.35234E-03  2.86334E-05  4.55015E-04 -1.71102E-04
  5.500  4.56666E-02  5.48132E-03 -1.35728E-03 -9.39115E-05 -1.35033E-04  8.57937E-02  6.95573E-03 -9.05371E-05  4.60354E-04 -1.31824E-04
  5.600  4.41754E-02  6.42586E-03 -1.32053E-03 -1.76182E-04 -1.57266E-04  8.38282E-02  7.64905E-03 -2.01928E-04  4.29588E-04 -9.80681E-05
  5.700  4.25479E-02  7.37788E-03 -1.22740E-03 -2.55822E-04 -1.80838E-04  8.16798E-02  8.43404E-03 -2.92387E-04  3.64468E-04 -7.22972E-05
  5.800  4.07970E-02  8.31324E-03 -1.07840E-03 -3.29674E-04 -2.05386E-04  7.93487E-02  9.30638E-03 -3.49060E-04  2.68768E-04 -5.64371E-05
  5.900  3.89381E-02  9.20806E-03 -8.76287E-04 -3.94679E-04 -2.30427E-04  7.68395E-02  1.02556E-02 -3.60325E-04  1.48005E-04 -5.17528E-05
  6.000  3.69888E-02  1.00396E-02 -6.25970E-04 -4.48037E-04 -2.55365E-04  7.41612E-02  1.12652E-02 -3.16654E-04  9.05507E-06 -5.87730E-05
  6.100  3.49681E-02  1.07871E-02 -3.34346E-04 -4.87374E-04 -2.79509E-04  7.13269E-02  1.23137E-02 -2.11326E-04 -1.40323E-04 -7.72713E-05
  6.200  3.28962E-02  1.14324E-02 -9.98476E-06 -5.10875E-04 -3.02103E-04  6.83534E-02  1.33754E-02 -4.09547E-05 -2.91994E-04 -1.06301E-04
  6.300  3.07936E-02  1.19606E-02  3.37248E-04 -5.17396E-04 -3.22357E-04  6.52605E-02  1.44218E-02  1.94223E-04 -4.37964E-04 -1.44280E-04
  6.400  2.86806E-02  1.23605E-02  6.96635E-04 -5.06540E-04 -3.39496E-04  6.20708E-02  1.54229E-02  4.90303E-04 -5.70861E-04 -1.89120E-04
  6.500  2.65771E-02  1.26249E-02  1.05709E-03 -4.78681E-04 -3.52803E-04  5.88086E-02  1.63490E-02  8.39920E-04 -6.84351E-04 -2.38379E-04
  6.600  2.45017E-02  1.27507E-02  1.40766E-03 -4.34946E-04 -3.61668E-04  5.54993E-02  1.71717E-02  1.23268E-03 -7.73469E-04 -2.89434E-04
  6.700  2.24716E-02  1.27387E-02  1.73799E-03 -3.77154E-04 -3.65625E-04  5.21685E-02  1.78660E-02  1.65577E-03 -8.34828E-04 -3.39656E-04
  6.800  2.05023E-02  1.25937E-02  2.03875E-03 -3.07712E-04 -3.64389E-04  4.88418E-02  1.84108E-02  2.09474E-03 -8.66726E-04 -3.86573E-04
  6.900  1.86072E-02  1.23236E-02  2.30204E-03 -2.29474E-04 -3.57876E-04  4.55437E-02  1.87901E-02  2.53432E-03 -8.69125E-04 -4.28009E-04
  7.000  1.67977E-02  1.19397E-02  2.52161E-03 -1.45583E-04 -3.46217E-04  4.22973E-02  1.89934E-02  2.95926E-03 -8.43532E-04 -4.62193E-04
  7.100  1.50830E-02  1.14552E-02  2.69309E-03 -5.93032E-05 -3.29747E-04  3.91240E-02  1.90163E-02  3.35516E-03 -7.92786E-04 -4.87841E-04
  7.200  1.34699E-02  1.08855E-02  2.81406E-03  2.61592E-05 -3.08994E-04  3.60429E-02  1.88601E-02  3.70919E-03 -7.20782E-04 -5.04181E-04
  7.300  1.19636E-02  1.02470E-02  2.88400E-03  1.07810E-04 -2.84646E-04  3.30708E-02  1.85317E-02  4.01067E-03 -6.32154E-04 -5.10962E-04
  7.400  1.05667E-02  9.55639E-03  2.90422E-03  1.83006E-04 -2.57516E-04  3.02222E-02  1.80429E-02  4.25147E-03 -5.31936E-04 -5.08414E-04
  7.500  9.28056E-03  8.83061E-03  2.87764E-03  2.49567E-04 -2.28490E-04  2.75087E-02  1.74097E-02  4.42627E-03 -4.25242E-04 -4.97189E-04
  7.600  8.10444E-03  8.08579E-03  2.80855E-03  3.05847E-04 -1.98485E-04  2.49397E-02  1.66514E-02  4.53261E-03 -3.16966E-04 -4.78282E-04
  7.700  7.03636E-03  7.33700E-03  2.70229E-03  3.50772E-04 -1.68400E-04  2.25218E-02  1.57894E-02  4.57079E-03 -2.11539E-04 -4.52935E-04
  7.800  6.07305E-03  6.59783E-03  2.56494E-03  3.83845E-04 -1.39070E-04  2.02595E-02  1.48465E-02  4.54364E-03 -1.12738E-04 -4.22540E-04
  7.900  5.21020E-03  5.88015E-03  2.40301E-03  4.05112E-04 -1.11232E-04  1.81550E-02  1.38458E-02  4.45612E-03 -2.35596E-05 -3.88551E-04
  8.000  4.44267E-03  5.19388E-03  2.22309E-03  4.15104E-04 -8.54966E-05  1.62083E-02  1.28099E-02  4.31492E-03  5.38387E-05 -3.52391E-04
  8.100  3.76467E-03  4.54697E-03  2.03159E-03  4.14754E-04 -6.23283E-05  1.44177E-02  1.17600E-02  4.12796E-03  1.18143E-04 -3.15388E-04
  8.200  3.16997E-03  3.94533E-03  1.83452E-03  4.05311E-04 -4.20391E-05  1.27798E-02  1.07154E-02  3.90391E-03  1.68829E-04 -2.78716E-04
  8.300  2.65204E-03  3.39297E-03  1.63727E-03  3.88232E-04 -2.47903E-05  1.12897E-02  9.69321E-03  3.65172E-03  2.06076E-04 -2.43360E-04
  8.400  2.20422E-03  2.89212E-03  1.44451E-03  3.65087E-04 -1.06028E-05  9.94133E-03  8.70772E-03  3.38021E-03  2.30645E-04 -2.10095E-04
  8.500  1.81986E-03  2.44339E-03  1.26006E-03  3.37468E-04  6.25195E-07  8.72756E-03  7.77054E-03  3.09770E-03  2.43744E-04 -1.79485E-04
  8.600  1.49243E-03  2.04604E-03  1.08693E-03  3.06907E-04  9.09590E-06  7.64056E-03  6.89048E-03  2.81173E-03  2.46889E-04 -1.51886E-04
  8.700  1.21559E-03  1.69819E-03  9.27259E-04  2.74815E-04  1.50872E-05  6.67190E-03  6.07370E-03  2.52890E-03  2.41771E-04 -1.27470E-04
  8.800  9.83336E-04  1.39709E-03  7.82415E-04  2.42429E-04  1.89266E-05  5.81280E-03  5.32390E-03  2.25472E-03  2.30135E-04 -1.06254E-04
  8.900  7.90003E-04  1.13931E-03  6.53063E-04  2.10787E-04  2.09673E-05  5.05433E-03  4.64262E-03  1.99357E-03  2.13680E-04 -8.81226E-05
  9.000  6.30343E-04  9.21018E-04  5.39262E-04  1.80709E-04  2.15656E-05  4.38756E-03  4.02950E-03  1.74872E-03  1.93978E-04 -7.28687E-05
  9.100  4.99544E-04  7.38146E-04  4.40572E-04  1.52803E-04  2.10628E-05  3.80373E-03  3.48266E-03  1.52241E-03  1.72421E-04 -6.02195E-05
  9.200  3.93256E-04  5.86568E-04  3.56173E-04  1.27471E-04  1.97714E-05  3.29438E-03  2.99901E-03  1.31595E-03  1.50183E-04 -4.98659E-05
  9.300  3.07585E-04  4.62244E-04  2.84967E-04  1.04935E-04  1.79651E-05  2.85145E-03  2.57456E-03  1.12983E-03  1.28211E-04 -4.14864E-05
  9.400  2.39092E-04  3.61327E-04  2.25681E-04  8.52606E-05  1.58732E-05  2.46736E-03  2.20476E-03  9.63882E-04  1.07226E-04 -3.47662E-05
  9.500  1.84775E-04  2.80243E-04  1.76953E-04  6.83887E-05  1.36791E-05  2.13506E-03  1.88468E-03  8.17417E-04  8.77377E-05 -2.94110E-05
  9.600  1.42041E-04  2.15745E-04  1.37408E-04  5.41648E-05  1.15214E-05  1.84812E-03  1.60930E-03  6.89359E-04  7.00686E-05 -2.51570E-05
  9.700  1.08682E-04  1.64942E-04  1.05708E-04  4.23687E-05  9.49816E-06  1.60068E-03  1.37362E-03  5.78367E-04  5.43858E-05 -2.17751E-05
  9.800  8.28356E-05  1.25305E-04  8.06021E-05  3.27399E-05  7.67141E-06  1.38746E-03  1.17286E-03  4.82944E-04  4.07309E-05 -1.90735E-05
  9.900  6.29517E-05  9.46617E-05  6.09513E-05  2.50002E-05  6.07403E-06  1.20380E-03  1.00250E-03  4.01524E-04  2.90512E-05 -1.68960E-05
 10.000  4.77549E-05  7.11775E-05  4.57440E-05  1.88713E-05  4.71584E-06  1.04557E-03  8.58372E-04  3.32541E-04  1.92283E-05 -1.51189E-05
 10.100  3.62081E-05  5.33261E-05  3.41034E-05  1.40876E-05  3.58991E-06  9.09154E-04  7.36714E-04  2.74482E-04  1.11025E-05 -1.36471E-05
 10.200  2.74780E-05  3.98579E-05  2.52852E-05  1.04060E-05  2.67799E-06  7.91424E-04  6.34152E-04  2.25923E-04  4.49281E-06 -1.24094E-05
 10.300  2.09028E-05  2.97639E-05  1.86699E-05  7.61055E-06  1.95531E-06  6.89676E-04  5.47716E-04  1.85553E-04 -7.87690E-07 -1.13533E-05
 10.400  1.59631E-05  2.22416E-05  1.37518E-05  5.51547E-06  1.39424E-06  6.01593E-04  4.74819E-04  1.52184E-04 -4.92054E-06 -1.04405E-05
 10.500  1.22558E-05  1.66609E-05  1.01248E-05  3.96472E-06  9.67109E-07  5.25197E-04  4.13233E-04  1.24758E-04 -8.07485E-06 -9.64356E-06
 10.600  9.47130E-06  1.25333E-05  7.46865E-06  2.83046E-06  6.48051E-07  4.58806E-04  3.61058E-04  1.02339E-04 -1.04032E-05 -8.94214E-06
 10.700  7.37430E-06  9.48516E-06  5.53449E-06  2.01023E-06  4.14173E-07  4.00995E-04  3.16689E-04  8.41107E-05 -1.20402E-05 -8.32071E-06
 10.800  5.78776E-06  7.23337E-06  4.13184E-06  1.42356E-06  2.46049E-07  3.50557E-04  2.78780E-04  6.93679E-05 -1.31025E-05 -7.76675E-06
 10.900  4.57955E-06  5.56601E-06  3.11688E-06  1.00843E-06  1.27790E-07  3.06470E-04  2.46214E-04  5.75034E-05 -1.36900E-05 -7.26956E-06
 11.000  3.65184E-06  4.32577E-06  2.38238E-06  7.17835E-07  4.67971E-08  2.67872E-04  2.18069E-04  4.79990E-05 -1.38883E-05 -6.81954E-06
 11.100  2.93257E-06  3.39688E-06  1.84925E-06  5.16683E-07 -6.65909E-09  2.34032E-04  1.93587E-04  4.04152E-05 -1.37702E-05 -6.40789E-06
 11.200  2.36897E-06  2.69471E-06  1.45977E-06  3.79079E-07 -3.99410E-08  2.04329E-04  1.72155E-04  3.43814E-05 -1.33981E-05 -6.02654E-06
 11.300  1.92244E-06  2.15778E-06  1.17215E-06  2.86111E-07 -5.85451E-08  1.78235E-04  1.53274E-04  2.95871E-05 -1.28261E-05 -5.66819E-06
 11.400  1.56480E-06  1.74162E-06  9.56418E-07  2.24060E-07 -6.65566E-08  1.55299E-04  1.36543E-04  2.57743E-05 -1.21009E-05 -5.32647E-06
 11.500  1.27544E-06  1.41423E-06  7.91205E-07  1.83029E-07 -6.70293E-08  1.35134E-04  1.21639E-04  2.27301E-05 -1.12633E-05 -4.99611E-06
 11.600  1.03924E-06  1.15266E-06  6.61447E-07  1.55910E-07 -6.22820E-08  1.17408E-04  1.08304E-04  2.02808E-05 -1.03491E-05 -4.67298E-06
 11.700  8.45010E-07  9.40507E-07  5.56627E-07  1.37630E-07 -5.41128E-08  1.01833E-04  9.63321E-05  1.82862E-05 -9.38962E-06 -4.35422E-06
 11.800  6.84462E-07  7.66103E-07  4.69517E-07  1.24613E-07 -4.39451E-08  8.81572E-05  8.55575E-05  1.66343E-05 -8.41185E-06 -4.03813E-06
 11.900  5.51350E-07  6.21166E-07  3.95254E-07  1.14392E-07 -3.29179E-08  7.61622E-05  7.58460E-05  1.52377E-05 -7.43899E-06 -3.72415E-06
 12.000  4.40920E-07  4.99827E-07  3.30661E-07  1.05333E-07 -2.19384E-08  6.56556E-05  6.70880E-05  1.40289E-05 -6.49049E-06 -3.41267E-06
 12.100  3.49486E-07  3.97912E-07  2.73745E-07  9.64312E-08 -1.17097E-08  5.64676E-05  5.91928E-05  1.29572E-05 -5.58223E-06 -3.10487E-06
 12.200  2.74132E-07  3.12413E-07  2.23319E-07  8.71540E-08 -2.74714E-09  4.84480E-05  5.20834E-05  1.19853E-05 -4.72668E-06 -2.80250E-06
 12.300  2.12496E-07  2.41102E-07  1.78720E-07  7.73181E-08  4.61013E-09  4.14630E-05  4.56933E-05  1.10870E-05 -3.93312E-06 -2.50770E-06
 12.400  1.62609E-07  1.82255E-07  1.39598E-07  6.69851E-08  1.01849E-08  3.53934E-05  3.99635E-05  1.02443E-05 -3.20787E-06 -2.22277E-06
 12.500  1.22787E-07  1.34453E-07  1.05758E-07  5.63752E-08  1.39437E-08  3.01325E-05  3.48406E-05  9.44594E-06 -2.55460E-06 -1.94999E-06
 12.600  9.15592E-08  9.64476E-08  7.70526E-08  4.57946E-08  1.59743E-08  2.55849E-05  3.02754E-05  8.68524E-06 -1.97465E-06 -1.69150E-06
 12.700  6.76112E-08  6.70794E-08  5.33074E-08  3.55770E-08  1.64584E-08  2.16650E-05  2.62215E-05  7.95892E-06 -1.46733E-06 -1.44917E-06
 12.800  4.97596E-08  4.52326E-08  3.42791E-08  2.60384E-08  1.56440E-08  1.82961E-05  2.26354E-05  7.26594E-06 -1.03034E-06 -1.22448E-06
 12.900  3.69328E-08  2.98168E-08  1.96391E-08  1.74452E-08  1.38166E-08  1.54094E-05  1.94755E-05  6.60659E-06 -6.60037E-07 -1.01853E-06
 13.000  2.81629E-08  1.97684E-08  8.97511E-09  9.99436E-09  1.12740E-08  1.29436E-05  1.67023E-05  5.98188E-06 -3.51836E-07 -8.31985E-07
 13.100  2.25836E-08  1.40639E-08  1.80524E-09  3.80459E-09  8.30367E-09  1.08438E-05  1.42782E-05  5.39300E-06 -1.00471E-07 -6.65068E-07
 13.200  1.94297E-08  1.17391E-08 -2.39882E-09 -1.08310E-09  5.16601E-09  9.06132E-06  1.21679E-05  4.84103E-06  9.97265E-08 -5.17618E-07
 13.300  1.80380E-08  1.19091E-08 -4.18575E-09 -4.69828E-09  2.08216E-09  7.55281E-06  1.03380E-05  4.32673E-06  2.54590E-07 -3.89109E-07
 13.400  1.78467E-08  1.37856E-08 -4.09842E-09 -7.12913E-09 -7.72803E-10  6.28006E-06  8.75740E-06  3.85041E-06  3.69926E-07 -2.78711E-07
 13.500  1.83928E-08  1.66900E-08 -2.65042E-09 -8.50786E-09 -3.27213E-09  5.20943E-06  7.39726E-06  3.41192E-06  4.51359E-07 -1.85346E-07
 13.600  1.93078E-08  2.00602E-08 -3.07141E-10 -8.99540E-09 -5.33574E-09  4.31144E-06  6.23110E-06  3.01063E-06  5.04212E-07 -1.07746E-07
 13.700  2.03102E-08  2.34519E-08  2.52773E-09 -8.76677E-09 -6.92575E-09  3.56036E-06  5.23473E-06  2.64548E-06  5.33421E-07 -4.45120E-08
 13.800  2.11975E-08  2.65339E-08  5.52003E-09 -7.99823E-09 -8.04003E-09  2.93384E-06  4.38627E-06  2.31508E-06  5.43475E-07  5.82756E-09
 13.900  2.18350E-08  2.90789E-08  8.40769E-09 -6.85686E-09 -8.70468E-09  2.41259E-06  3.66607E-06  2.01771E-06  5.38391E-07  4.47721E-08
 14.000  2.21460E-08  3.09514E-08  1.09988E-08 -5.49285E-09 -8.96633E-09  1.97998E-06  3.05658E-06  1.75148E-06  5.21701E-07  7.38041E-08
 14.100  2.20996E-08  3.20926E-08  1.31659E-08 -4.03450E-09 -8.88476E-09  1.62177E-06  2.54227E-06  1.51430E-06  4.96457E-07  9.43548E-08
 14.200  2.17006E-08  3.25053E-08  1.48383E-08 -2.58571E-09 -8.52633E-09  1.32584E-06  2.10948E-06  1.30406E-06  4.65255E-07  1.07776E-07
 14.300  2.09794E-08  3.22385E-08  1.59920E-08 -1.22554E-09 -7.95850E-09  1.08187E-06  1.74623E-06  1.11856E-06  4.30260E-07  1.15319E-07
 14.400  1.99830E-08  3.13731E-08  1.66405E-08 -9.47340E-12 -7.24558E-09  8.81143E-07  1.44213E-06  9.55657E-07  3.93244E-07  1.18123E-07
 14.500  1.87678E-08  3.00090E-08  1.68240E-08  1.02818E-09 -6.44565E-09  7.16317E-07  1.18817E-06  8.13250E-07  3.55625E-07  1.17204E-07
 14.600  1.73935E-08  2.82550E-08  1.66010E-08  1.87115E-09 -5.60865E-09  5.81222E-07  9.76583E-07  6.89317E-07  3.18506E-07  1.13455E-07
 14.700  1.59183E-08  2.62195E-08  1.60403E-08  2.51774E-09 -4.77543E-09  4.70697E-07  8.00718E-07  5.81941E-07  2.82720E-07  1.07643E-07
 14.800  1.43960E-08  2.40052E-08  1.52142E-08  2.97728E-09 -3.97756E-09  3.80436E-07  6.54885E-07  4.89320E-07  2.48865E-07  1.00420E-07
 14.900  1.28732E-08  2.17035E-08  1.41936E-08  3.26687E-09 -3.23785E-09  3.06856E-07  5.34242E-07  4.09776E-07  2.17345E-07  9.23252E-08
 15.000  1.13888E-08  1.93931E-08  1.30446E-08  3.40846E-09 -2.57116E-09  2.46983E-07  4.34673E-07  3.41765E-07  1.88402E-07  8.37952E-08
 15.100  9.97332E-09  1.71379E-08  1.18255E-08  3.42634E-09 -1.98558E-09  1.98355E-07  3.52700E-07  2.83870E-07  1.62150E-07  7.51761E-08
 15.200  8.64923E-09  1.49873E-08  1.05856E-08  3.34528E-09 -1.48362E-09  1.58934E-07  2.85380E-07  2.34804E-07  1.38600E-07  6.67331E-08
 15.300  7.43147E-09  1.29772E-08  9.36521E-09  3.18897E-09 -1.06349E-09  1.27041E-07  2.30239E-07  1.93407E-07  1.17688E-07  5.86610E-08
 15.400  6.32849E-09  1.11311E-08  8.19506E-09  2.97907E-09 -7.20289E-10  1.01293E-07  1.85194E-07  1.58635E-07  9.92903E-08  5.10960E-08
 15.500  5.34329E-09  9.46198E-09  7.09755E-09  2.73456E-09 -4.47003E-10  8.05506E-08  1.48500E-07  1.29560E-07  8.32463E-08  4.41249E-08
 15.600  4.47448E-09  7.97413E-09  6.08745E-09  2.47144E-09 -2.35430E-10  6.38803E-08  1.18695E-07  1.05360E-07  6.93700E-08  3.77946E-08
 15.700  3.71732E-09  6.66490E-09  5.17312E-09  2.20271E-09 -7.68787E-11  5.05154E-08  9.45596E-08  8.53090E-08  5.74624E-08  3.21208E-08
 15.800  3.06474E-09  5.52653E-09  4.35768E-09  1.93844E-09  3.72747E-11  3.98280E-08  7.50764E-08  6.87726E-08  4.73207E-08  2.70949E-08
 15.900  2.50809E-09  4.54764E-09  3.64012E-09  1.68609E-09  1.15194E-10  3.13049E-08  5.94001E-08  5.51981E-08  3.87451E-08  2.26909E-08
 16.000  2.03790E-09  3.71461E-09  3.01639E-09  1.45080E-09  1.64317E-10  2.45274E-08  4.68294E-08  4.41071E-08  3.15442E-08  1.88702E-08
 16.100  1.64440E-09  3.01258E-09  2.48035E-09  1.23579E-09  1.91207E-10  1.91540E-08  3.67843E-08  3.50880E-08  2.55385E-08  1.55866E-08
 16.200  1.31797E-09  2.42640E-09  2.02449E-09  1.04267E-09  2.01488E-10  1.49071E-08  2.87863E-08  2.77883E-08  2.05623E-08  1.27894E-08
 16.300  1.04945E-09  1.94122E-09  1.64063E-09  8.71855E-10  1.99849E-10  1.15615E-08  2.24417E-08  2.19085E-08  1.64657E-08  1.04266E-08
 16.400  8.30332E-10  1.54299E-09  1.32039E-09  7.22815E-10  1.90098E-10  8.93472E-09  1.74279E-08  1.71949E-08  1.31142E-08  8.44672E-09
 16.500  6.52906E-10  1.21873E-09  1.05557E-09  5.94382E-10  1.75239E-10  6.87960E-09  1.34811E-08  1.34343E-08  1.03892E-08  6.80046E-09
 16.600  5.10301E-10  9.56699E-10  8.38396E-10  4.84962E-10  1.57577E-10  5.27748E-09  1.03866E-08  1.04486E-08  8.18694E-09  5.44180E-09
 16.700  3.96500E-10  7.46519E-10  6.61716E-10  3.92721E-10  1.38816E-10  4.03311E-09  7.97019E-09  8.08942E-09  6.41769E-09  4.32856E-09
 16.800  3.06309E-10  5.79116E-10  5.19071E-10  3.15727E-10  1.20169E-10  3.07028E-09  6.09097E-09  6.23436E-09  5.00462E-09  3.42280E-09
 16.900  2.35307E-10  4.46693E-10  4.04745E-10  2.52054E-10  1.02450E-10  2.32816E-09  4.63565E-09  4.78274E-09  3.88254E-09  2.69086E-09
 17.000  1.79771E-10  3.42631E-10  3.13760E-10  1.99858E-10  8.61639E-11  1.75843E-09  3.51337E-09  3.65233E-09  2.99659E-09  2.10333E-09
 17.100  1.36604E-10  2.61379E-10  2.41843E-10  1.57427E-10  7.15808E-11  1.32279E-09  2.65163E-09  2.77632E-09  2.30103E-09  1.63478E-09
 17.200  1.03256E-10  1.98331E-10  1.85370E-10  1.23209E-10  5.87993E-11  9.91046E-10  1.99280E-09  2.10074E-09  1.75797E-09  1.26351E-09
 17.300  7.76451E-11  1.49703E-10  1.41308E-10  9.58254E-11  4.77985E-11  7.39462E-10  1.49130E-09  1.58227E-09  1.33631E-09  9.71147E-10
 17.400  5.80906E-11  1.12416E-10  1.07142E-10  7.40717E-11  3.84786E-11  5.49468E-10  1.11123E-09  1.18629E-09  1.01071E-09  7.42350E-10
 17.500  4.32441E-11  8.39904E-11  8.08084E-11  5.69133E-11  3.06928E-11  4.06594E-10  8.24473E-10  8.85330E-10  7.60636E-10  5.64380E-10
 17.600  3.20341E-11  6.24406E-11  6.06313E-11  4.34727E-11  2.42702E-11  2.99612E-10  6.09077E-10  6.57693E-10  5.69601E-10  4.26771E-10
 17.700  2.36155E-11  4.61928E-11  4.52600E-11  3.30147E-11  1.90331E-11  2.19850E-10  4.48007E-10  4.86348E-10  4.24443E-10  3.20996E-10
 17.800  1.73265E-11  3.40081E-11  3.36157E-11  2.49303E-11  1.48081E-11  1.60640E-10  3.28102E-10  3.57996E-10  3.14726E-10  2.40163E-10
 17.900  1.26526E-11  2.49184E-11  2.48432E-11  1.87204E-11  1.14334E-11  1.16879E-10  2.39244E-10  2.62312E-10  2.32231E-10  1.78744E-10
 18.000  9.19679E-12  1.81725E-11  1.82700E-11  1.39800E-11  8.76313E-12  8.46764E-11  1.73690E-10  1.91323E-10  1.70527E-10  1.32341E-10
 18.100  6.65428E-12  1.31914E-11  1.33709E-11  1.03833E-11  6.66883E-12  6.10844E-11  1.25548E-10  1.38910E-10  1.24612E-10  9.74791E-11
 18.200  4.79288E-12  9.53161E-12  9.73848E-12  7.67067E-12  5.04013E-12  4.38766E-11  9.03529E-11  1.00395E-10  9.06217E-11  7.14331E-11
 18.300  3.43672E-12  6.85593E-12  7.05920E-12  5.63669E-12  3.78370E-12  3.13811E-11  6.47397E-11  7.22293E-11  6.55868E-11  5.20803E-11
 18.400  2.45337E-12  4.90917E-12  5.09295E-12  4.12036E-12  2.82194E-12  2.23477E-11  4.61844E-11  5.17293E-11  4.72413E-11  3.77789E-11
 18.500  1.74369E-12  3.49951E-12  3.65722E-12  2.99633E-12  2.09124E-12  1.58461E-11  3.28030E-11  3.68796E-11  3.38655E-11  2.72672E-11
 18.600  1.23390E-12  2.48359E-12  2.61406E-12  2.16776E-12  1.54009E-12  1.11876E-11  2.31967E-11  2.61737E-11  2.41620E-11  1.95822E-11
 18.700  8.69378E-13  1.75485E-12  1.85984E-12  1.56034E-12  1.12726E-12  7.86454E-12  1.63318E-11  1.84918E-11  1.71575E-11  1.39935E-11
 18.800  6.09912E-13  1.23452E-12  1.31718E-12  1.11747E-12  8.20158E-13  5.50469E-12  1.14482E-11  1.30056E-11  1.21264E-11  9.95056E-12
 18.900  4.26057E-13  8.64707E-13  9.28619E-13  7.96291E-13  5.93207E-13  3.83631E-12  7.98987E-12  9.10587E-12  8.53049E-12  7.04105E-12
 19.000  2.96360E-13  6.03058E-13  6.51717E-13  5.64613E-13  4.26575E-13  2.66206E-12  5.55186E-12  6.34688E-12  5.97293E-12  4.95803E-12
 19.100  2.05273E-13  4.18772E-13  4.55326E-13  3.98369E-13  3.05003E-13  1.83926E-12  3.84094E-12  4.40402E-12  4.16275E-12  3.47436E-12
 19.200  1.41584E-13  2.89557E-13  3.16690E-13  2.79700E-13  2.16855E-13  1.26529E-12  2.64569E-12  3.04224E-12  2.88775E-12  2.42295E-12
 19.300  9.72455E-14  1.99358E-13  2.19282E-13  1.95427E-13  1.53329E-13  8.66692E-13  1.81444E-12  2.09217E-12  1.99405E-12  1.68163E-12
 19.400  6.65132E-14  1.36673E-13  1.51160E-13  1.35886E-13  1.07820E-13  5.91104E-13  1.23895E-12  1.43240E-12  1.37061E-12  1.16157E-12
 19.500  4.53036E-14  9.33011E-14  1.03739E-13  9.40321E-14  7.54103E-14  4.01412E-13  8.42318E-13  9.76340E-13  9.37778E-13  7.98541E-13
 19.600  3.07290E-14  6.34237E-14  7.08804E-14  6.47591E-14  5.24615E-14  2.71423E-13  5.70176E-13  6.62537E-13  6.38712E-13  5.46384E-13
 19.700  2.07567E-14  4.29318E-14  4.82161E-14  4.43875E-14  3.63041E-14  1.82740E-13  3.84288E-13  4.47608E-13  4.33046E-13  3.72098E-13
 19.800  1.39626E-14  2.89384E-14  3.26548E-14  3.02807E-14  2.49921E-14  1.22506E-13  2.57883E-13  3.01071E-13  2.92277E-13  2.52224E-13
 19.900  9.35356E-15  1.94241E-14  2.20188E-14  2.05602E-14  1.71160E-14  8.17738E-14  1.72310E-13  2.01617E-13  1.96379E-13  1.70174E-13
  67 214 200   0.100
  0.000  4.64258E-02 -2.48253E-16 -3.53884E-16 -3.37750E-16 -9.15513E-16  9.86320E-02 -5.27539E-16 -7.49401E-16 -7.75575E-16 -2.87528E-15
  0.100  4.64500E-02 -2.51365E-05 -1.97452E-08 -6.28835E-12 -1.88825E-15  9.86674E-02 -3.93783E-05  8.82403E-09  8.10242E-12  1.43049E-16
  0.200  4.65220E-02 -9.96267E-05 -3.13223E-07 -3.98528E-10 -3.16510E-13  9.87713E-02 -1.54427E-04  1.41010E-07  5.17203E-10 -4.99312E-13
  0.300  4.66408E-02 -2.20736E-04 -1.56313E-06 -4.46648E-09 -7.96093E-12  9.89377E-02 -3.36123E-04  7.12295E-07  5.85742E-09 -1.22864E-11
  0.400  4.68048E-02 -3.83983E-04 -4.84192E-06 -2.45316E-08 -7.77033E-11  9.91565E-02 -5.70188E-04  2.24361E-06  3.26381E-08 -1.17696E-10
  0.500  4.70115E-02 -5.83254E-04 -1.15184E-05 -9.08793E-08 -4.49471E-10  9.94148E-02 -8.38176E-04  5.45111E-06  1.23132E-07 -6.64343E-10
  0.600  4.72577E-02 -8.10970E-04 -2.31362E-05 -2.61796E-07 -1.86289E-09  9.96973E-02 -1.11886E-03  1.12285E-05  3.62520E-07 -2.66981E-09
  0.700  4.75394E-02 -1.05829E-03 -4.12722E-05 -6.32644E-07 -6.12095E-09  9.99876E-02 -1.38985E-03  2.06185E-05  8.98325E-07 -8.44613E-09
  0.800  4.78523E-02 -1.31537E-03 -6.73856E-05 -1.34184E-06 -1.69352E-08  1.00269E-01 -1.62928E-03  3.47712E-05  1.95975E-06 -2.23223E-08
  0.900  4.81909E-02 -1.57166E-03 -1.02666E-04 -2.57186E-06 -4.10183E-08  1.00526E-01 -1.81741E-03  5.48856E-05  3.87400E-06 -5.11782E-08
  1.000  4.85495E-02 -1.81625E-03 -1.47897E-04 -4.54382E-06 -8.93069E-08  1.00745E-01 -1.93820E-03  8.21355E-05  7.07618E-06 -1.04352E-07
  1.100  4.89217E-02 -2.03823E-03 -2.03335E-04 -7.50511E-06 -1.78111E-07  1.00914E-01 -1.98040E-03  1.17579E-04  1.21091E-05 -1.92399E-07
  1.200  4.93009E-02 -2.22707E-03 -2.68622E-04 -1.17103E-05 -3.29924E-07  1.01026E-01 -1.93848E-03  1.62053E-04  1.96094E-05 -3.24213E-07
  1.300  4.96800E-02 -2.37306E-03 -3.42738E-04 -1.73964E-05 -5.73582E-07  1.01077E-01 -1.81296E-03  2.16066E-04  3.02777E-05 -5.02224E-07
  1.400  5.00522E-02 -2.46763E-03 -4.23990E-04 -2.47545E-05 -9.43498E-07  1.01067E-01 -1.61043E-03  2.79681E-04  4.48298E-05 -7.15724E-07
  1.500  5.04104E-02 -2.50381E-03 -5.10046E-04 -3.39010E-05 -1.47775E-06  1.01002E-01 -1.34305E-03  3.52415E-04  6.39310E-05 -9.32879E-07
  1.600  5.07484E-02 -2.47649E-03 -5.98008E-04 -4.48501E-05 -2.21491E-06  1.00888E-01 -1.02761E-03  4.33153E-04  8.81143E-05 -1.09252E-06
  1.700  5.10602E-02 -2.38273E-03 -6.84533E-04 -5.74922E-05 -3.18979E-06  1.00737E-01 -6.84344E-04  5.20097E-04  1.17687E-04 -1.09733E-06
  1.800  5.13406E-02 -2.22195E-03 -7.65975E-04 -7.15799E-05 -4.42825E-06  1.00562E-01 -3.35435E-04  6.10750E-04  1.52637E-04 -8.10496E-07
  1.900  5.15856E-02 -1.99606E-03 -8.38554E-04 -8.67235E-05 -5.94162E-06  1.00377E-01 -3.38285E-06  7.01955E-04  1.92537E-04 -5.78123E-08
  2.000  5.17922E-02 -1.70947E-03 -8.98544E-04 -1.02398E-04 -7.72141E-06  1.00197E-01  2.90620E-04  7.89984E-04  2.36476E-04  1.36269E-06
  2.100  5.19586E-02 -1.36901E-03 -9.42461E-04 -1.17960E-04 -9.73490E-06  1.00036E-01  5.28226E-04  8.70689E-04  2.83008E-04  3.66241E-06
  2.200  5.20844E-02 -9.83747E-04 -9.67246E-04 -1.32676E-04 -1.19224E-05  9.99062E-02  6.95256E-04  9.39709E-04  3.30145E-04  7.03490E-06
  2.300  5.21706E-02 -5.64691E-04 -9.70435E-04 -1.45759E-04 -1.41971E-05  9.98176E-02  7.82722E-04  9.92721E-04  3.75394E-04  1.16204E-05
  2.400  5.22196E-02 -1.24436E-04 -9.50302E-04 -1.56404E-04 -1.64470E-05  9.97763E-02  7.87468E-04  1.02573E-03  4.15843E-04  1.74654E-05
  2.500  5.22349E-02  3.23314E-04 -9.05976E-04 -1.63836E-04 -1.85406E-05  9.97853E-02  7.12390E-04  1.03536E-03  4.48304E-04  2.44796E-05
  2.600  5.22212E-02  7.64265E-04 -8.37516E-04 -1.67349E-04 -2.03351E-05  9.98434E-02  5.66227E-04  1.01919E-03  4.69505E-04  3.23979E-05
  2.700  5.21843E-02  1.18409E-03 -7.45956E-04 -1.66343E-04 -2.16864E-05  9.99459E-02  3.62923E-04  9.75988E-04  4.76313E-04  4.07507E-05
  2.800  5.21306E-02  1.56904E-03 -6.33305E-04 -1.60352E-04 -2.24613E-05  1.00085E-01  1.20633E-04  9.05932E-04  4.65991E-04  4.88497E-05
  2.900  5.20670E-02  1.90649E-03 -5.02503E-04 -1.49069E-04 -2.25498E-05  1.00249E-01 -1.39576E-04  8.10767E-04  4.36457E-04  5.57953E-05
  3.000  5.20005E-02  2.18552E-03 -3.57352E-04 -1.32358E-04 -2.18765E-05  1.00425E-01 -3.95218E-04  6.93826E-04  3.86526E-04  6.05070E-05
  3.100  5.19379E-02  2.39742E-03 -2.02400E-04 -1.10261E-04 -2.04100E-05  1.00600E-01 -6.23969E-04  5.59955E-04  3.16121E-04  6.17802E-05
  3.200  5.18857E-02  2.53610E-03 -4.27993E-05 -8.29931E-05 -1.81696E-05  1.00758E-01 -8.05222E-04  4.15318E-04  2.26410E-04  5.83681E-05
  3.300  5.18493E-02  2.59847E-03  1.15862E-04 -5.09385E-05 -1.52276E-05  1.00886E-01 -9.21493E-04  2.67075E-04  1.19883E-04  4.90828E-05
  3.400  5.18331E-02  2.58463E-03  2.67750E-04 -1.46392E-05 -1.17075E-05  1.00972E-01 -9.59581E-04  1.22965E-04  3.16767E-07  3.29100E-05
  3.500  5.18399E-02  2.49801E-03  4.06994E-04  2.52157E-05 -7.77832E-06  1.01004E-01 -9.11386E-04 -9.19673E-06 -1.27346E-04  9.12660E-06
  3.600  5.18706E-02  2.34532E-03  5.27901E-04  6.78018E-05 -3.64443E-06  1.00975E-01 -7.74331E-04 -1.22068E-04 -2.57223E-04 -2.25896E-05
  3.700  5.19244E-02  2.13645E-03  6.25183E-04  1.12168E-04  4.66586E-07  1.00879E-01 -5.51361E-04 -2.09336E-04 -3.82812E-04 -6.20706E-05
  3.800  5.19982E-02  1.88416E-03  6.94176E-04  1.57247E-04  4.31801E-06  1.00713E-01 -2.50503E-04 -2.66237E-04 -4.97375E-04 -1.08601E-04
  3.900  5.20865E-02  1.60366E-03  7.31055E-04  2.01862E-04  7.67770E-06  1.00478E-01  1.15960E-04 -2.89984E-04 -5.94376E-04 -1.60899E-04
  4.000  5.21817E-02  1.31214E-03  7.33032E-04  2.44737E-04  1.03303E-05  1.00173E-01  5.32641E-04 -2.80077E-04 -6.67939E-04 -2.17149E-04
  4.100  5.22739E-02  1.02813E-03  6.98528E-04  2.84511E-04  1.20866E-05  9.98016E-02  9.82440E-04 -2.38445E-04 -7.13278E-04 -2.75079E-04
  4.200  5.23515E-02  7.70799E-04  6.27319E-04  3.19762E-04  1.27882E-05  9.93654E-02  1.44806E-03 -1.69402E-04 -7.27091E-04 -3.32084E-04
  4.300  5.24007E-02  5.59262E-04  5.20634E-04  3.49030E-04  1.23088E-05  9.88666E-02  1.91351E-03 -7.94062E-05 -7.07854E-04 -3.85393E-04
  4.400  5.24067E-02  4.11767E-04  3.81203E-04  3.70866E-04  1.05497E-05  9.83058E-02  2.36553E-03  2.33628E-05 -6.56019E-04 -4.32253E-04
  4.500  5.23537E-02  3.44965E-04  2.13254E-04  3.83879E-04  7.43284E-06  9.76817E-02  2.79472E-03  1.29600E-04 -5.74067E-04 -4.70140E-04
  4.600  5.22255E-02  3.73178E-04  2.24422E-05  3.86803E-04  2.89029E-06  9.69908E-02  3.19637E-03  2.29589E-04 -4.66435E-04 -4.96949E-04
  4.700  5.20058E-02  5.07753E-04 -1.84294E-04  3.78573E-04 -3.14616E-06  9.62268E-02  3.57096E-03  3.13992E-04 -3.39284E-04 -5.11172E-04
  4.800  5.16795E-02  7.56502E-04 -3.98934E-04  3.58402E-04 -1.07546E-05  9.53810E-02  3.92407E-03  3.74643E-04 -2.00160E-04 -5.12034E-04
  4.900  5.12326E-02  1.12329E-03 -6.12650E-04  3.25862E-04 -2.00291E-05  9.44423E-02  4.26600E-03  4.05289E-04 -5.75282E-05 -4.99580E-04
  5.000  5.06528E-02  1.60773E-03 -8.16135E-04  2.80957E-04 -3.10810E-05  9.33977E-02  4.61091E-03  4.02205E-04  7.97529E-05 -4.74695E-04
  5.100  4.99306E-02  2.20510E-03 -9.99982E-04  2.24183E-04 -4.40341E-05  9.22332E-02  4.97566E-03  3.64636E-04  2.03002E-04 -4.39071E-04
  5.200  4.90590E-02  2.90641E-03 -1.15509E-03  1.56570E-04 -5.90129E-05  9.09343E-02  5.37832E-03  2.95010E-04  3.04278E-04 -3.95097E-04
  5.300  4.80342E-02  3.69862E-03 -1.27306E-03  7.96885E-05 -7.61253E-05  8.94871E-02  5.83667E-03  1.98911E-04  3.76900E-04 -3.45714E-04
  5.400  4.68559E-02  4.56506E-03 -1.34666E-03 -4.36726E-06 -9.54394E-05  8.78792E-02  6.36656E-03  8.47980E-05  4.15882E-04 -2.94205E-04
  5.500  4.55270E-02  5.48603E-03 -1.37012E-03 -9.30351E-05 -1.16959E-04  8.61003E-02  6.98045E-03 -3.65155E-05  4.18250E-04 -2.43981E-04
  5.600  4.40540E-02  6.43945E-03 -1.33951E-03 -1.83375E-04 -1.40597E-04  8.41433E-02  7.68615E-03 -1.52577E-04  3.83223E-04 -1.98340E-04
  5.700  4.24463E-02  7.40172E-03 -1.25294E-03 -2.72191E-04 -1.66153E-04  8.20048E-02  8.48585E-03 -2.50160E-04  3.12244E-04 -1.60250E-04
  5.800  4.07167E-02  8.34853E-03 -1.11073E-03 -3.56178E-04 -1.93297E-04  7.96852E-02  9.37558E-03 -3.16204E-04  2.08861E-04 -1.32153E-04
  5.900  3.88800E-02  9.25579E-03 -9.15417E-04 -4.32087E-04 -2.21565E-04  7.71892E-02  1.03450E-02 -3.38765E-04  7.84632E-05 -1.15811E-04
  6.000  3.69533E-02  1.01005E-02 -6.71726E-04 -4.96896E-04 -2.50353E-04  7.45257E-02  1.13778E-02 -3.07897E-04 -7.20914E-05 -1.12207E-04
  6.100  3.49554E-02  1.08615E-02 -3.86342E-04 -5.47975E-04 -2.78942E-04  7.17075E-02  1.24522E-02 -2.16394E-04 -2.34940E-04 -1.21503E-04
  6.200  3.29058E-02  1.15204E-02 -6.76482E-05 -5.83234E-04 -3.06517E-04  6.87510E-02  1.35422E-02 -6.03529E-05 -4.01728E-04 -1.43061E-04
  6.300  3.08246E-02  1.20619E-02  2.74655E-04 -6.01246E-04 -3.32209E-04  6.56758E-02  1.46185E-02  1.60512E-04 -5.64136E-04 -1.75510E-04
  6.400  2.87318E-02  1.24745E-02  6.29984E-04 -6.01327E-04 -3.55135E-04  6.25036E-02  1.56507E-02  4.42791E-04 -7.14378E-04 -2.16874E-04
  6.500  2.66466E-02  1.27506E-02  9.87352E-04 -5.83579E-04 -3.74453E-04  5.92581E-02  1.66079E-02  7.79558E-04 -8.45643E-04 -2.64721E-04
  6.600  2.45875E-02  1.28868E-02  1.33586E-03 -5.48879E-04 -3.89406E-04  5.59639E-02  1.74611E-02  1.16078E-03 -9.52443E-04 -3.16341E-04
  6.700  2.25714E-02  1.28836E-02  1.66517E-03 -4.98827E-04 -3.99376E-04  5.26461E-02  1.81841E-02  1.57394E-03 -1.03086E-03 -3.68933E-04
  6.800  2.06136E-02  1.27455E-02  1.96595E-03 -4.35651E-04 -4.03919E-04  4.93296E-02  1.87550E-02  2.00475E-03 -1.07869E-03 -4.19777E-04
  6.900  1.87273E-02  1.24803E-02  2.23022E-03 -3.62077E-04 -4.02798E-04  4.60383E-02  1.91568E-02  2.43802E-03 -1.09541E-03 -4.66396E-04
  7.000  1.69240E-02  1.20992E-02  2.45166E-03 -2.81171E-04 -3.95998E-04  4.27950E-02  1.93785E-02  2.85851E-03 -1.08212E-03 -5.06683E-04
  7.100  1.52128E-02  1.16154E-02  2.62577E-03 -1.96169E-04 -3.83726E-04  3.96207E-02  1.94150E-02  3.25174E-03 -1.04134E-03 -5.38994E-04
  7.200  1.36010E-02  1.10444E-02  2.75001E-03 -1.10307E-04 -3.66408E-04  3.65345E-02  1.92674E-02  3.60472E-03 -9.76716E-04 -5.62203E-04
  7.300  1.20935E-02  1.04024E-02  2.82373E-03 -2.66569E-05 -3.44652E-04  3.35532E-02  1.89422E-02  3.90659E-03 -8.92756E-04 -5.75718E-04
  7.400  1.06935E-02  9.70667E-03  2.84810E-03  5.20190E-05 -3.19223E-04  3.06913E-02  1.84515E-02  4.14898E-03 -7.94447E-04 -5.79463E-04
  7.500  9.40236E-03  8.97413E-03  2.82589E-03  1.23381E-04 -2.90993E-04  2.79610E-02  1.78113E-02  4.32635E-03 -6.86953E-04 -5.73828E-04
  7.600  8.21986E-03  8.22119E-03  2.76127E-03  1.85598E-04 -2.60893E-04  2.53719E-02  1.70414E-02  4.43601E-03 -5.75300E-04 -5.59596E-04
  7.700  7.14427E-03  7.46322E-03  2.65946E-03  2.37391E-04 -2.29864E-04  2.29313E-02  1.61638E-02  4.47805E-03 -4.64123E-04 -5.37854E-04
  7.800  6.17263E-03  6.71410E-03  2.52647E-03  2.78047E-04 -1.98812E-04  2.06442E-02  1.52019E-02  4.45510E-03 -3.57454E-04 -5.09898E-04
  7.900  5.30093E-03  5.98598E-03  2.36869E-03  3.07393E-04 -1.68565E-04  1.85134E-02  1.41794E-02  4.37197E-03 -2.58587E-04 -4.77139E-04
  8.000  4.52432E-03  5.28907E-03  2.19268E-03  3.25751E-04 -1.39839E-04  1.65395E-02  1.31196E-02  4.23522E-03 -1.69999E-04 -4.41013E-04
  8.100  3.83724E-03  4.63155E-03  2.00481E-03  3.33860E-04 -1.13214E-04  1.47213E-02  1.20446E-02  4.05267E-03 -9.33346E-05 -4.02904E-04
  8.200  3.23370E-03  4.01960E-03  1.81106E-03  3.32789E-04 -8.91260E-05  1.30560E-02  1.09743E-02  3.83293E-03 -2.94432E-05 -3.64081E-04
  8.300  2.70732E-03  3.45738E-03  1.61683E-03  3.23842E-04 -6.78549E-05  1.15392E-02  9.92633E-03  3.58490E-03  2.15428E-05 -3.25650E-04
  8.400  2.25161E-03  2.94729E-03  1.42676E-03  3.08464E-04 -4.95372E-05  1.01651E-02  8.91562E-03  3.31738E-03  6.00969E-05 -2.88532E-04
  8.500  1.85999E-03  2.49005E-03  1.24471E-03  2.88145E-04 -3.41763E-05  8.92695E-03  7.95420E-03  3.03868E-03  8.71701E-05 -2.53442E-04
  8.600  1.52599E-03  2.08500E-03  1.07369E-03  2.64346E-04 -2.16624E-05  7.81715E-03  7.05125E-03  2.75635E-03  1.04056E-04 -2.20896E-04
  8.700  1.24332E-03  1.73030E-03  9.15868E-04  2.38429E-04 -1.17953E-05  6.82743E-03  6.21319E-03  2.47700E-03  1.12259E-04 -1.91220E-04
  8.800  1.00596E-03  1.42319E-03  7.72645E-04  2.11607E-04 -4.30921E-06  5.94910E-03  5.44392E-03  2.20614E-03  1.13374E-04 -1.64572E-04
  8.900  8.08226E-04  1.16023E-03  6.44706E-04  1.84916E-04  1.10346E-06  5.17323E-03  4.74503E-03  1.94816E-03  1.08985E-04 -1.40970E-04
  9.000  6.44832E-04  9.37541E-04  5.32134E-04  1.59189E-04  4.76905E-06  4.49090E-03  4.11621E-03  1.70636E-03  1.00583E-04 -1.20319E-04
  9.100  5.10913E-04  7.50998E-04  4.34512E-04  1.35062E-04  7.01334E-06  3.89326E-03  3.55553E-03  1.48297E-03  8.95075E-05 -1.02443E-04
  9.200  4.02055E-04  5.96406E-04  3.51039E-04  1.12974E-04  8.14560E-06  3.37175E-03  3.05982E-03  1.27929E-03  7.69070E-05 -8.71063E-05
  9.300  3.14299E-04  4.69647E-04  2.80635E-04  9.31911E-05  8.44684E-06  2.91819E-03  2.62499E-03  1.09584E-03  6.37247E-05 -7.40461E-05
  9.400  2.44141E-04  3.66797E-04  2.22043E-04  7.58285E-05  8.16210E-06  2.52486E-03  2.24633E-03  9.32423E-04  5.06948E-05 -6.29868E-05
  9.500  1.88514E-04  2.84204E-04  1.73915E-04  6.08767E-05  7.49657E-06  2.18460E-03  1.91877E-03  7.88363E-04  3.83555E-05 -5.36583E-05
  9.600  1.44767E-04  2.18552E-04  1.34884E-04  4.82312E-05  6.61479E-06  1.89080E-03  1.63711E-03  6.62579E-04  2.70691E-05 -4.58070E-05
  9.700  1.10635E-04  1.66880E-04  1.03626E-04  3.77193E-05  5.64264E-06  1.63748E-03  1.39624E-03  5.53726E-04  1.70494E-05 -3.92032E-05
  9.800  8.42101E-05  1.26605E-04  7.88962E-05  2.91252E-05  4.67100E-06  1.41924E-03  1.19119E-03  4.60308E-04  8.38975E-06 -3.36453E-05
  9.900  6.39003E-05  9.55024E-05  5.95634E-05  2.22111E-05  3.76073E-06  1.23129E-03  1.01732E-03  3.80758E-04  1.09220E-06 -2.89606E-05
 10.000  4.83954E-05  7.16961E-05  4.46232E-05  1.67346E-05  2.94812E-06  1.06939E-03  8.70343E-04  3.13514E-04 -4.90626E-06 -2.50041E-05
 10.100  3.66302E-05  5.36251E-05  3.32049E-05  1.24620E-05  2.25040E-06  9.29849E-04  7.46384E-04  2.57067E-04 -9.71057E-06 -2.16564E-05
 10.200  2.77484E-05  4.00121E-05  2.45700E-05  9.17710E-06  1.67091E-06  8.09446E-04  6.41975E-04  2.09998E-04 -1.34487E-05 -1.88201E-05
 10.300  2.10704E-05  2.98266E-05  1.81045E-05  6.68701E-06  1.20360E-06  7.05408E-04  5.54062E-04  1.71004E-04 -1.62571E-05 -1.64160E-05
 10.400  1.60628E-05  2.22497E-05  1.33073E-05  4.82499E-06  8.36794E-07  6.15359E-04  4.79989E-04  1.38905E-04 -1.82701E-05 -1.43798E-05
 10.500  1.23121E-05  1.66391E-05  9.77719E-06  3.45072E-06  5.56093E-07  5.37269E-04  4.17472E-04  1.12648E-04 -1.96130E-05 -1.26583E-05
 10.600  9.50101E-06  1.24976E-05  7.19772E-06  2.44907E-06  3.46497E-07  4.69414E-04  3.64562E-04  9.13071E-05 -2.03984E-05 -1.12072E-05
 10.700  7.38867E-06  9.44545E-06  5.32372E-06  1.72775E-06  1.93827E-07  4.10334E-04  3.19614E-04  7.40745E-05 -2.07245E-05 -9.98842E-06
 10.800  5.79410E-06  7.19540E-06  3.96788E-06  1.21434E-06  8.55414E-08  3.58791E-04  2.81252E-04  6.02508E-05 -2.06753E-05 -8.96850E-06
 10.900  4.58244E-06  5.53280E-06  2.98910E-06  8.53134E-07  1.11046E-08  3.13740E-04  2.48332E-04  4.92360E-05 -2.03217E-05 -8.11757E-06
 11.000  3.65400E-06  4.29863E-06  2.28242E-06  6.02000E-07 -3.79731E-08  2.74299E-04  2.19910E-04  4.05176E-05 -1.97234E-05 -7.40860E-06
 11.100  2.93551E-06  3.37608E-06  1.77065E-06  4.29584E-07 -6.83066E-08  2.39718E-04  1.95214E-04  3.36613E-05 -1.89306E-05 -6.81694E-06
 11.200  2.37337E-06  2.67992E-06  1.39757E-06  3.12842E-07 -8.49189E-08  2.09364E-04  1.73614E-04  2.83008E-05 -1.79862E-05 -6.32026E-06
 11.300  1.92848E-06  2.14835E-06  1.12261E-06  2.35006E-07 -9.15629E-08  1.82697E-04  1.54603E-04  2.41295E-05 -1.69271E-05 -5.89853E-06
 11.400  1.57236E-06  1.73675E-06  9.16699E-07  1.83958E-07 -9.10317E-08  1.59255E-04  1.37770E-04  2.08924E-05 -1.57852E-05 -5.53406E-06
 11.500  1.28419E-06  1.41305E-06  7.59184E-07  1.50987E-07 -8.54246E-08  1.38643E-04  1.22785E-04  1.83795E-05 -1.45892E-05 -5.21161E-06
 11.600  1.04878E-06  1.15433E-06  6.35518E-07  1.29849E-07 -7.63571E-08  1.20522E-04  1.09386E-04  1.64193E-05 -1.33643E-05 -4.91841E-06
 11.700  8.54910E-07  9.44223E-07  5.35567E-07  1.16100E-07 -6.51111E-08  1.04597E-04  9.73617E-05  1.48735E-05 -1.21328E-05 -4.64417E-06
 11.800  6.94306E-07  7.71127E-07  4.52383E-07  1.06609E-07 -5.27322E-08  9.06123E-05  8.65426E-05  1.36325E-05 -1.09147E-05 -4.38092E-06
 11.900  5.60764E-07  6.26852E-07  3.81306E-07  9.92216E-08 -4.00859E-08  7.83433E-05  7.67921E-05  1.26104E-05 -9.72726E-06 -4.12293E-06
 12.000  4.49594E-07  5.05630E-07  3.19309E-07  9.25158E-08 -2.78840E-08  6.75939E-05  6.79987E-05  1.17415E-05 -8.58507E-06 -3.86645E-06
 12.100  3.57186E-07  4.03394E-07  2.64512E-07  8.56284E-08 -1.66938E-08  5.81908E-05  6.00699E-05  1.09769E-05 -7.50028E-06 -3.60942E-06
 12.200  2.80702E-07  3.17250E-07  2.15817E-07  7.81173E-08 -6.93899E-09  4.99803E-05  5.29276E-05  1.02812E-05 -6.48240E-06 -3.35124E-06
 12.300  2.17857E-07  2.45079E-07  1.72634E-07  6.98536E-08  1.09935E-09  4.28259E-05  4.65046E-05  9.62987E-06 -5.53847E-06 -3.09243E-06
 12.400  1.66752E-07  1.85258E-07  1.34671E-07  6.09300E-08  7.27783E-09  3.66059E-05  4.07413E-05  9.00698E-06 -4.67313E-06 -2.83433E-06
 12.500  1.25767E-07  1.36458E-07  1.01787E-07  5.15827E-08  1.15800E-08  3.12112E-05  3.55840E-05  8.40298E-06 -3.88884E-06 -2.57887E-06
 12.600  9.34761E-08  9.75060E-08  7.38764E-08  4.21256E-08  1.40995E-08  2.65445E-05  3.09833E-05  7.81314E-06 -3.18606E-06 -2.32823E-06
 12.700  6.86033E-08  6.73000E-08  5.08002E-08  3.28964E-08  1.50178E-08  2.25184E-05  2.68929E-05  7.23606E-06 -2.56353E-06 -2.08475E-06
 12.800  4.99866E-08  4.47638E-08  3.23448E-08  2.42137E-08  1.45797E-08  1.90547E-05  2.32694E-05  6.67254E-06 -2.01855E-06 -1.85066E-06
 12.900  3.65636E-08  2.88289E-08  1.82049E-08  1.63476E-08  1.30677E-08  1.60833E-05  2.00713E-05  6.12471E-06 -1.54724E-06 -1.62799E-06
 13.000  2.73648E-08  1.84383E-08  7.98486E-09  9.50057E-09  1.07777E-08  1.35417E-05  1.72595E-05  5.59532E-06 -1.14485E-06 -1.41845E-06
 13.100  2.15130E-08  1.25619E-08  1.21481E-09  3.79899E-09  7.99792E-09  1.13740E-05  1.47967E-05  5.08726E-06 -8.05996E-07 -1.22343E-06
 13.200  1.82256E-08  1.02187E-08 -2.62626E-09 -7.06593E-10  4.99205E-09  9.53052E-06  1.26478E-05  4.60322E-06 -5.24900E-07 -1.04389E-06
 13.300  1.68178E-08  1.04995E-08 -4.08324E-09 -4.03463E-09  1.98695E-09  7.96733E-06  1.07799E-05  4.14547E-06 -2.95616E-07 -8.80417E-07
 13.400  1.67037E-08  1.25882E-08 -3.69775E-09 -6.26121E-09 -8.34652E-10  6.64552E-06  9.16203E-06  3.71573E-06 -1.12200E-07 -7.33216E-07
 13.500  1.73959E-08  1.57765E-08 -1.98381E-09 -7.50605E-09 -3.33710E-09  5.53086E-06  7.76574E-06  3.31517E-06  3.11498E-08 -6.02151E-07
 13.600  1.85027E-08  1.94738E-08  5.91927E-10 -7.91778E-09 -5.43090E-09  4.59339E-06  6.56478E-06  2.94435E-06  1.39968E-07 -4.86786E-07
 13.700  1.97221E-08  2.32098E-08  3.62434E-09 -7.65975E-09 -7.06894E-09  3.80695E-06  5.53520E-06  2.60332E-06  2.19444E-07 -3.86432E-07
 13.800  2.08335E-08  2.66309E-08  6.77819E-09 -6.89758E-09 -8.24056E-09  3.14883E-06  4.65530E-06  2.29166E-06  2.74356E-07 -3.00203E-07
 13.900  2.16883E-08  2.94922E-08  9.79105E-09 -5.78897E-09 -8.96454E-09  2.59937E-06  3.90557E-06  2.00856E-06  3.09041E-07 -2.27063E-07
 14.000  2.21988E-08  3.16450E-08  1.24715E-08 -4.47610E-09 -9.28160E-09  2.14165E-06  3.26858E-06  1.75287E-06  3.27374E-07 -1.65878E-07
 14.100  2.23269E-08  3.30219E-08  1.46935E-08 -3.08067E-09 -9.24715E-09  1.76118E-06  2.72886E-06  1.52323E-06  3.32768E-07 -1.15459E-07
 14.200  2.20731E-08  3.36213E-08  1.63887E-08 -1.70133E-09 -8.92469E-09  1.44556E-06  2.27274E-06  1.31808E-06  3.28187E-07 -7.46014E-08
 14.300  2.14659E-08  3.34910E-08  1.75363E-08 -4.13137E-10 -8.38026E-09  1.18425E-06  1.88828E-06  1.13576E-06  3.16169E-07 -4.21180E-08
 14.400  2.05529E-08  3.27138E-08  1.81531E-08  7.31349E-10 -7.67787E-09  9.68309E-07  1.56500E-06  9.74551E-07  2.98849E-07 -1.68662E-08
 14.500  1.93922E-08  3.13936E-08  1.82836E-08  1.69984E-09 -6.87632E-09  7.90197E-07  1.29385E-06  8.32712E-07  2.77999E-07  2.23105E-09
 14.600  1.80464E-08  2.96443E-08  1.79902E-08  2.47736E-09 -6.02691E-09  6.43554E-07  1.06695E-06  7.08523E-07  2.55062E-07  1.61702E-08
 14.700  1.65777E-08  2.75808E-08  1.73459E-08  3.06291E-09 -5.17231E-09  5.23038E-07  8.77557E-07  6.00309E-07  2.31187E-07  2.58569E-08
 14.800  1.50434E-08  2.53120E-08  1.64269E-08  3.46613E-09 -4.34617E-09  4.24178E-07  7.19849E-07  5.06464E-07  2.07268E-07  3.21011E-08
 14.900  1.34943E-08  2.29359E-08  1.53078E-08  3.70412E-09 -3.57336E-09  3.43235E-07  5.88855E-07  4.25467E-07  1.83981E-07  3.56148E-08
 15.000  1.19730E-08  2.05369E-08  1.40576E-08  3.79866E-09 -2.87074E-09  2.77090E-07  4.80327E-07  3.55889E-07  1.61812E-07  3.70144E-08
 15.100  1.05135E-08  1.81844E-08  1.27375E-08  3.77377E-09 -2.24814E-09  2.23146E-07  3.90650E-07  2.96403E-07  1.41097E-07  3.68246E-08
 15.200  9.14099E-09  1.59324E-08  1.13992E-08  3.65387E-09 -1.70958E-09  1.79248E-07  3.16751E-07  2.45785E-07  1.22040E-07  3.54844E-08
 15.300  7.87302E-09  1.38204E-08  1.00845E-08  3.46234E-09 -1.25445E-09  1.43602E-07  2.56028E-07  2.02919E-07  1.04750E-07  3.33543E-08
 15.400  6.71999E-09  1.18751E-08  8.82557E-09  3.22052E-09 -8.78712E-10  1.14727E-07  2.06278E-07  1.66789E-07  8.92508E-08  3.07251E-08
 15.500  5.68639E-09  1.01117E-08  7.64576E-09  2.94710E-09 -5.75953E-10  9.13932E-08  1.65642E-07  1.36484E-07  7.55105E-08  2.78253E-08
 15.600  4.77193E-09  8.53589E-09  6.56038E-09  2.65783E-09 -3.38293E-10  7.25872E-08  1.32558E-07  1.11187E-07  6.34519E-08  2.48305E-08
 15.700  3.97261E-09  7.14614E-09  5.57803E-09  2.36548E-09 -1.57156E-10  5.74719E-08  1.05709E-07  9.01713E-08  5.29683E-08  2.18708E-08
 15.800  3.28176E-09  5.93518E-09  4.70180E-09  2.07995E-09 -2.38562E-11  4.53580E-08  8.39964E-08  7.27978E-08  4.39339E-08  1.90388E-08
 15.900  2.69094E-09  4.89176E-09  3.93051E-09  1.80851E-09  6.99560E-11  3.56789E-08  6.64983E-08  5.85051E-08  3.62129E-08  1.63964E-08
 16.000  2.19064E-09  4.00206E-09  3.25976E-09  1.55616E-09  1.31994E-10  2.79696E-08  5.24482E-08  4.68044E-08  2.96667E-08  1.39811E-08
 16.100  1.77096E-09  3.25086E-09  2.68294E-09  1.32597E-09  1.69150E-10  2.18493E-08  4.12087E-08  3.72726E-08  2.41583E-08  1.18113E-08
 16.200  1.42203E-09  2.62247E-09  2.19203E-09  1.11942E-09  1.87398E-10  1.70071E-08  3.22522E-08  2.95458E-08  1.95571E-08  9.89137E-09
 16.300  1.13437E-09  2.10142E-09  1.77830E-09  9.36792E-10  1.91782E-10  1.31896E-08  2.51428E-08  2.33130E-08  1.57408E-08  8.21499E-09
 16.400  8.99143E-10  1.67297E-09  1.43281E-09  7.77428E-10  1.86443E-10  1.01907E-08  1.95221E-08  1.83103E-08  1.25969E-08  6.76883E-09
 16.500  7.08276E-10  1.32349E-09  1.14681E-09  6.40030E-10  1.74697E-10  7.84378E-09  1.50966E-08  1.43147E-08  1.00244E-08  5.53498E-09
 16.600  5.54558E-10  1.04060E-09  9.11998E-10  5.22881E-10  1.59123E-10  6.01401E-09  1.16266E-08  1.11392E-08  7.93292E-09  4.49298E-09
 16.700  4.31645E-10  8.13284E-10  7.20740E-10  4.24021E-10  1.41661E-10  4.59302E-09  8.91714E-09  8.62805E-09  6.24339E-09  3.62136E-09
 16.800  3.34043E-10  6.31921E-10  5.66129E-10  3.41400E-10  1.23725E-10  3.49385E-09  6.81059E-09  6.65201E-09  4.88703E-09  2.89881E-09
 16.900  2.57058E-10  4.88208E-10  4.42048E-10  2.72979E-10  1.06293E-10  2.64707E-09  5.17982E-09  5.10476E-09  3.80479E-09  2.30494E-09
 17.000  1.96729E-10  3.75080E-10  3.43164E-10  2.16805E-10  8.99996E-11  1.99738E-09  3.92287E-09  3.89924E-09  2.94645E-09  1.82079E-09
 17.100  1.49748E-10  2.86596E-10  2.64891E-10  1.71066E-10  7.52173E-11  1.50098E-09  2.95830E-09  2.96460E-09  2.26971E-09  1.42918E-09
 17.200  1.13385E-10  2.17818E-10  2.03337E-10  1.34116E-10  6.21222E-11  1.12330E-09  2.22136E-09  2.24355E-09  1.73926E-09  1.11480E-09
 17.300  8.54082E-11  1.64678E-10  1.55237E-10  1.04493E-10  5.07498E-11  8.37163E-10  1.66083E-09  1.69002E-09  1.32586E-09  8.64259E-10
 17.400  6.40075E-11  1.23863E-10  1.17882E-10  8.09162E-11  4.10404E-11  6.21308E-10  1.23639E-09  1.26716E-09  1.00551E-09  6.65996E-10
 17.500  4.77296E-11  9.26933E-11  8.90461E-11  6.22850E-11  3.28742E-11  4.59173E-10  9.16441E-10  9.45716E-10  7.58669E-10  5.10181E-10
 17.600  3.54165E-11  6.90225E-11  6.69160E-11  4.76625E-11  2.60971E-11  3.37918E-10  6.76341E-10  7.02557E-10  5.69514E-10  3.88546E-10
 17.700  2.61528E-11  5.11448E-11  5.00295E-11  3.62626E-11  2.05410E-11  2.47631E-10  4.96976E-10  5.19512E-10  4.25362E-10  2.94213E-10
 17.800  1.92201E-11  3.77148E-11  3.72165E-11  2.74329E-11  1.60364E-11  1.80696E-10  3.63589E-10  3.82390E-10  3.16104E-10  2.21521E-10
 17.900  1.40587E-11  2.76789E-11  2.75476E-11  2.06372E-11  1.24221E-11  1.31292E-10  2.64843E-10  2.80168E-10  2.33739E-10  1.65858E-10
 18.000  1.02356E-11  2.02180E-11  2.02907E-11  1.54393E-11  9.55023E-12  9.49891E-11  1.92074E-10  2.04330E-10  1.71979E-10  1.23496E-10
 18.100  7.41800E-12  1.46996E-11  1.48731E-11  1.14878E-11  7.28907E-12  6.84300E-11  1.38691E-10  1.48339E-10  1.25914E-10  9.14517E-11
 18.200  5.35160E-12  1.06382E-11  1.08495E-11  8.50169E-12  5.52419E-12  4.90858E-11  9.97073E-11  1.07199E-10  9.17354E-11  6.73566E-11
 18.300  3.84349E-12  7.66390E-12  7.87682E-12  6.25835E-12  4.15808E-12  3.50590E-11  7.13682E-11  7.71152E-11  6.65089E-11  4.93449E-11
 18.400  2.74809E-12  5.49624E-12  5.69162E-12  4.58274E-12  3.10901E-12  2.49331E-11  5.08606E-11  5.52217E-11  4.79856E-11  3.59583E-11
 18.500  1.95621E-12  3.92403E-12  4.09339E-12  3.33829E-12  2.30955E-12  1.76557E-11  3.60877E-11  3.93644E-11  3.44542E-11  2.60660E-11
 18.600  1.38642E-12  2.78911E-12  2.93026E-12  2.41923E-12  1.70480E-12  1.24487E-11  2.54939E-11  2.79336E-11  2.46198E-11  1.87970E-11
 18.700  9.78329E-13  1.97368E-12  2.08794E-12  1.74424E-12  1.25060E-12  8.73971E-12  1.79315E-11  1.97325E-11  1.75084E-11  1.34853E-11
 18.800  6.87375E-13  1.39053E-12  1.48092E-12  1.25120E-12  9.11836E-13  6.10942E-12  1.25574E-11  1.38764E-11  1.23919E-11  9.62519E-12
 18.900  4.80878E-13  9.75398E-13  1.04558E-12  8.93018E-13  6.60870E-13  4.25241E-12  8.75569E-12  9.71432E-12  8.72915E-12  6.83522E-12
 19.000  3.34978E-13  6.81232E-13  7.34860E-13  6.34191E-13  4.76170E-13  2.94716E-12  6.07837E-12  6.77012E-12  6.12004E-12  4.82955E-12
 19.100  2.32353E-13  4.73726E-13  5.14142E-13  4.48150E-13  3.41112E-13  2.03379E-12  4.20140E-12  4.69713E-12  4.27067E-12  3.39539E-12
 19.200  1.60486E-13  3.28009E-13  3.58097E-13  3.15126E-13  2.42973E-13  1.39747E-12  2.89144E-12  3.24433E-12  2.96623E-12  2.37528E-12
 19.300  1.10380E-13  2.26140E-13  2.48293E-13  2.20504E-13  1.72100E-13  9.56135E-13  1.98129E-12  2.23090E-12  2.05064E-12  1.65349E-12
 19.400  7.55987E-14  1.55242E-13  1.71389E-13  1.53544E-13  1.21227E-13  6.51379E-13  1.35176E-12  1.52722E-12  1.41111E-12  1.14540E-12
 19.500  5.15599E-14  1.06116E-13  1.17777E-13  1.06402E-13  8.49275E-14  4.41866E-13  9.18275E-13  1.04087E-12  9.66553E-13  7.89594E-13
 19.600  3.50178E-14  7.22278E-14  8.05762E-14  7.33790E-14  5.91769E-14  2.98463E-13  6.21111E-13  7.06266E-13  6.59011E-13  5.41689E-13
 19.700  2.36837E-14  4.89529E-14  5.48812E-14  5.03637E-14  4.10147E-14  2.00741E-13  4.18305E-13  4.77113E-13  4.47270E-13  3.69836E-13
 19.800  1.59513E-14  3.30377E-14  3.72149E-14  3.44029E-14  2.82772E-14  1.34440E-13  2.80509E-13  3.20893E-13  3.02180E-13  2.51302E-13
 19.900  1.06987E-14  2.22023E-14  2.51242E-14  2.33892E-14  1.93941E-14  8.96550E-14  1.87298E-13  2.14878E-13  2.03230E-13  1.69950E-13
  67 215 200   0.100
  0.000  4.65258E-02 -2.40495E-16 -3.64292E-16 -3.18986E-16 -9.01208E-16  9.91581E-02 -4.96507E-16 -8.32667E-16 -8.75649E-16 -1.13009E-15
  0.100  4.65495E-02 -2.61755E-05 -2.00151E-08 -6.36283E-12 -1.57354E-15  9.91858E-02 -3.43514E-05  5.78294E-09  8.72522E-12  8.58294E-17
  0.200  4.66204E-02 -1.03692E-04 -3.17461E-07 -4.03317E-10 -3.35285E-13  9.92670E-02 -1.34677E-04  9.26325E-08  5.55713E-10 -2.94938E-13
  0.300  4.67372E-02 -2.29551E-04 -1.58393E-06 -4.52150E-09 -8.44252E-12  9.93970E-02 -2.92995E-04  4.69761E-07  6.27613E-09 -7.03668E-12
  0.400  4.68979E-02 -3.98855E-04 -4.90488E-06 -2.48445E-08 -8.24965E-11  9.95677E-02 -4.96670E-04  1.48773E-06  3.48394E-08 -6.66296E-11
  0.500  4.70998E-02 -6.04956E-04 -1.16639E-05 -9.20921E-08 -4.78001E-10  9.97689E-02 -7.29359E-04  3.63957E-06  1.30826E-07 -3.69964E-10
  0.600  4.73394E-02 -8.39666E-04 -2.34188E-05 -2.65487E-07 -1.98533E-09  9.99883E-02 -9.72239E-04  7.55911E-06  3.83097E-07 -1.45440E-09
  0.700  4.76124E-02 -1.09351E-03 -4.17578E-05 -6.42161E-07 -6.54020E-09  1.00213E-01 -1.20543E-03  1.40136E-05  9.43634E-07 -4.46928E-09
  0.800  4.79141E-02 -1.35603E-03 -6.81471E-05 -1.36358E-06 -1.81521E-08  1.00429E-01 -1.40947E-03  2.38873E-05  2.04539E-06 -1.13659E-08
  0.900  4.82391E-02 -1.61616E-03 -1.03780E-04 -2.61715E-06 -4.41306E-08  1.00625E-01 -1.56681E-03  3.81530E-05  4.01629E-06 -2.47480E-08
  1.000  4.85817E-02 -1.86254E-03 -1.49441E-04 -4.63150E-06 -9.65088E-08  1.00789E-01 -1.66317E-03  5.78279E-05  7.28636E-06 -4.70087E-08
  1.100  4.89358E-02 -2.08399E-03 -2.05388E-04 -7.66503E-06 -1.93475E-07  1.00912E-01 -1.68856E-03  8.39139E-05  1.23851E-05 -7.83293E-08
  1.200  4.92951E-02 -2.26989E-03 -2.71270E-04 -1.19877E-05 -3.60553E-07  1.00988E-01 -1.63815E-03  1.17319E-04  1.99264E-05 -1.13167E-07
  1.300  4.96531E-02 -2.41055E-03 -3.46084E-04 -1.78572E-05 -6.31241E-07  1.01014E-01 -1.51260E-03  1.58766E-04  3.05791E-05 -1.35035E-07
  1.400  5.00037E-02 -2.49765E-03 -4.28163E-04 -2.54915E-05 -1.04679E-06  1.00991E-01 -1.31812E-03  2.08686E-04  4.50228E-05 -1.09699E-07
  1.500  5.03407E-02 -2.52457E-03 -5.15222E-04 -3.50403E-05 -1.65494E-06  1.00923E-01 -1.06600E-03  2.67110E-04  6.38886E-05  2.26728E-08
  1.600  5.06585E-02 -2.48667E-03 -6.04424E-04 -4.65575E-05 -2.50735E-06  1.00816E-01 -7.71853E-04  3.33567E-04  8.76881E-05  3.55372E-07
  1.700  5.09520E-02 -2.38158E-03 -6.92503E-04 -5.99793E-05 -3.65594E-06  1.00681E-01 -4.54479E-04  4.06988E-04  1.16733E-04  1.02155E-06
  1.800  5.12169E-02 -2.20930E-03 -7.75895E-04 -7.51076E-05 -5.14815E-06  1.00527E-01 -1.34507E-04  4.85651E-04  1.51055E-04  2.19729E-06
  1.900  5.14495E-02 -1.97231E-03 -8.50911E-04 -9.16040E-05 -7.02151E-06  1.00369E-01  1.67111E-04  5.67151E-04  1.90323E-04  4.09947E-06
  2.000  5.16475E-02 -1.67556E-03 -9.13903E-04 -1.08993E-04 -9.29817E-06  1.00218E-01  4.30643E-04  6.48431E-04  2.33785E-04  6.97653E-06
  2.100  5.18091E-02 -1.32632E-03 -9.61446E-04 -1.26673E-04 -1.19798E-05  1.00086E-01  6.39033E-04  7.25865E-04  2.80220E-04  1.10909E-05
  2.200  5.19341E-02 -9.34020E-04 -9.90510E-04 -1.43944E-04 -1.50438E-05  9.99849E-02  7.79185E-04  7.95410E-04  3.27926E-04  1.66927E-05
  2.300  5.20231E-02 -5.09902E-04 -9.98615E-04 -1.60032E-04 -1.84407E-05  9.99213E-02  8.42946E-04  8.52810E-04  3.74742E-04  2.39854E-05
  2.400  5.20780E-02 -6.66560E-05 -9.83970E-04 -1.74129E-04 -2.20950E-05  9.99008E-02  8.27753E-04  8.93862E-04  4.18117E-04  3.30853E-05
  2.500  5.21019E-02  3.82037E-04 -9.45584E-04 -1.85427E-04 -2.59068E-05  9.99255E-02  7.36856E-04  9.14721E-04  4.55217E-04  4.39789E-05
  2.600  5.20987E-02  8.22018E-04 -8.83339E-04 -1.93161E-04 -2.97574E-05  9.99938E-02  5.79130E-04  9.12220E-04  4.83077E-04  5.64813E-05
  2.700  5.20732E-02  1.23920E-03 -7.98043E-04 -1.96637E-04 -3.35163E-05  1.00101E-01  3.68468E-04  8.84186E-04  4.98790E-04  7.02030E-05
  2.800  5.20309E-02  1.62012E-03 -6.91439E-04 -1.95270E-04 -3.70503E-05  1.00239E-01  1.22812E-04  8.29722E-04  4.99719E-04  8.45290E-05
  2.900  5.19780E-02  1.95253E-03 -5.66182E-04 -1.88599E-04 -4.02333E-05  1.00397E-01 -1.37114E-04  7.49426E-04  4.83725E-04  9.86163E-05
  3.000  5.19206E-02  2.22588E-03 -4.25781E-04 -1.76315E-04 -4.29562E-05  1.00564E-01 -3.89273E-04  6.45512E-04  4.49387E-04  1.11414E-04
  3.100  5.18648E-02  2.43184E-03 -2.74511E-04 -1.58261E-04 -4.51358E-05  1.00726E-01 -6.11874E-04  5.21826E-04  3.96204E-04  1.21707E-04
  3.200  5.18166E-02  2.56469E-03 -1.17297E-04 -1.34446E-04 -4.67216E-05  1.00870E-01 -7.84891E-04  3.83719E-04  3.24742E-04  1.28187E-04
  3.300  5.17809E-02  2.62166E-03  4.04358E-05 -1.05045E-04 -4.76999E-05  1.00984E-01 -8.91457E-04  2.37799E-04  2.36737E-04  1.29541E-04
  3.400  5.17619E-02  2.60315E-03  1.92935E-04 -7.03960E-05 -4.80950E-05  1.01055E-01 -9.18984E-04  9.15472E-05  1.35109E-04  1.24559E-04
  3.500  5.17624E-02  2.51282E-03  3.34309E-04 -3.10016E-05 -4.79671E-05  1.01075E-01 -8.59958E-04 -4.71667E-05  2.38935E-05  1.12251E-04
  3.600  5.17835E-02  2.35759E-03  4.58743E-04  1.24728E-05 -4.74063E-05  1.01036E-01 -7.12328E-04 -1.70647E-04 -9.19153E-05  9.19539E-05
  3.700  5.18245E-02  2.14751E-03  5.60716E-04  5.91998E-05 -4.65257E-05  1.00934E-01 -4.79465E-04 -2.71965E-04 -2.06609E-04  6.34373E-05
  3.800  5.18827E-02  1.89542E-03  6.35234E-04  1.08190E-04 -4.54513E-05  1.00765E-01 -1.69702E-04 -3.45532E-04 -3.14088E-04  2.69734E-05
  3.900  5.19532E-02  1.61662E-03  6.78057E-04  1.58296E-04 -4.43133E-05  1.00530E-01  2.04524E-04 -3.87612E-04 -4.08239E-04 -1.66211E-05
  4.000  5.20291E-02  1.32836E-03  6.85918E-04  2.08215E-04 -4.32370E-05  1.00228E-01  6.27839E-04 -3.96701E-04 -4.83347E-04 -6.59861E-05
  4.100  5.21010E-02  1.04915E-03  6.56722E-04  2.56504E-04 -4.23367E-05  9.98621E-02  1.08332E-03 -3.73764E-04 -5.34516E-04 -1.19265E-04
  4.200  5.21579E-02  7.98197E-04  5.89717E-04  3.01598E-04 -4.17121E-05  9.94325E-02  1.55401E-03 -3.22261E-04 -5.58049E-04 -1.74198E-04
  4.300  5.21869E-02  5.94552E-04  4.85624E-04  3.41844E-04 -4.14487E-05  9.89405E-02  2.02438E-03 -2.47975E-04 -5.51786E-04 -2.28252E-04
  4.400  5.21738E-02  4.56415E-04  3.46716E-04  3.75548E-04 -4.16216E-05  9.83856E-02  2.48171E-03 -1.58636E-04 -5.15331E-04 -2.78790E-04
  4.500  5.21035E-02  4.00347E-04  1.76837E-04  4.01031E-04 -4.23023E-05  9.77657E-02  2.91719E-03 -6.33478E-05 -4.50186E-04 -3.23252E-04
  4.600  5.19603E-02  4.40553E-04 -1.86484E-05  4.16706E-04 -4.35679E-05  9.70762E-02  3.32669E-03  2.81152E-05 -3.59737E-04 -3.59348E-04
  4.700  5.17289E-02  5.88224E-04 -2.32981E-04  4.21157E-04 -4.55106E-05  9.63106E-02  3.71114E-03  1.06115E-04 -2.49120E-04 -3.85231E-04
  4.800  5.13944E-02  8.50982E-04 -4.58202E-04  4.13233E-04 -4.82466E-05  9.54597E-02  4.07650E-03  1.61977E-04 -1.24943E-04 -3.99652E-04
  4.900  5.09433E-02  1.23246E-03 -6.85426E-04  3.92141E-04 -5.19218E-05  9.45128E-02  4.43324E-03  1.88777E-04  5.09578E-06 -4.02068E-04
  5.000  5.03637E-02  1.73201E-03 -9.05174E-04  3.57522E-04 -5.67134E-05  9.34575E-02  4.79550E-03  1.82012E-04  1.32687E-04 -3.92702E-04
  5.100  4.96463E-02  2.34463E-03 -1.10776E-03  3.09531E-04 -6.28256E-05  9.22806E-02  5.17988E-03  1.40105E-04  2.49442E-04 -3.72541E-04
  5.200  4.87843E-02  3.06100E-03 -1.28371E-03  2.48883E-04 -7.04788E-05  9.09689E-02  5.60402E-03  6.46752E-05  3.47444E-04 -3.43280E-04
  5.300  4.77738E-02  3.86774E-03 -1.42420E-03  1.76874E-04 -7.98939E-05  8.95100E-02  6.08508E-03 -3.94288E-05  4.19773E-04 -3.07207E-04
  5.400  4.66142E-02  4.74787E-03 -1.52147E-03  9.53732E-05 -9.12696E-05  8.78927E-02  6.63817E-03 -1.64365E-04  4.60968E-04 -2.67048E-04
  5.500  4.53083E-02  5.68135E-03 -1.56926E-03  6.77430E-06 -1.04757E-04  8.61086E-02  7.27492E-03 -2.99778E-04  4.67388E-04 -2.25772E-04
  5.600  4.38619E-02  6.64580E-03 -1.56306E-03 -8.60870E-05 -1.20436E-04  8.41517E-02  8.00232E-03 -4.33486E-04  4.37450E-04 -1.86385E-04
  5.700  4.22841E-02  7.61734E-03 -1.50045E-03 -1.80049E-04 -1.38283E-04  8.20195E-02  8.82176E-03 -5.52331E-04  3.71725E-04 -1.51720E-04
  5.800  4.05866E-02  8.57142E-03 -1.38123E-03 -2.71765E-04 -1.58160E-04  7.97132E-02  9.72855E-03 -6.43118E-04  2.72880E-04 -1.24245E-04
  5.900  3.87836E-02  9.48378E-03 -1.20746E-03 -3.57871E-04 -1.79793E-04  7.72379E-02  1.07118E-02 -6.93571E-04  1.45480E-04 -1.05902E-04
  6.000  3.68913E-02  1.03313E-02 -9.83402E-04 -4.35151E-04 -2.02772E-04  7.46021E-02  1.17548E-02 -6.93230E-04 -4.32928E-06 -9.79891E-05
  6.100  3.49276E-02  1.10927E-02 -7.15356E-04 -5.00711E-04 -2.26553E-04  7.18180E-02  1.28355E-02 -6.34223E-04 -1.69243E-04 -1.01094E-04
  6.200  3.29111E-02  1.17497E-02 -4.11376E-04 -5.52130E-04 -2.50479E-04  6.89012E-02  1.39279E-02 -5.11855E-04 -3.41281E-04 -1.15079E-04
  6.300  3.08611E-02  1.22869E-02 -8.08995E-05 -5.87591E-04 -2.73807E-04  6.58696E-02  1.50028E-02 -3.24963E-04 -5.12298E-04 -1.39121E-04
  6.400  2.87969E-02  1.26930E-02  2.65684E-04 -6.05978E-04 -2.95741E-04  6.27436E-02  1.60300E-02 -7.60310E-05 -6.74476E-04 -1.71793E-04
  6.500  2.67371E-02  1.29606E-02  6.17509E-04 -6.06926E-04 -3.15478E-04  5.95451E-02  1.69792E-02  2.28951E-04 -8.20783E-04 -2.11195E-04
  6.600  2.46996E-02  1.30864E-02  9.63727E-04 -5.90831E-04 -3.32252E-04  5.62971E-02  1.78215E-02  5.80858E-04 -9.45341E-04 -2.55091E-04
  6.700  2.27011E-02  1.30713E-02  1.29398E-03 -5.58816E-04 -3.45380E-04  5.30228E-02  1.85315E-02  9.68004E-04 -1.04370E-03 -3.01079E-04
  6.800  2.07566E-02  1.29200E-02  1.59884E-03 -5.12651E-04 -3.54303E-04  4.97456E-02  1.90875E-02  1.37685E-03 -1.11301E-03 -3.46747E-04
  6.900  1.88795E-02  1.26407E-02  1.87019E-03 -4.54644E-04 -3.58619E-04  4.64883E-02  1.94732E-02  1.79284E-03 -1.15206E-03 -3.89824E-04
  7.000  1.70813E-02  1.22447E-02  2.10148E-03 -3.87495E-04 -3.58110E-04  4.32726E-02  1.96779E-02  2.20119E-03 -1.16122E-03 -4.28306E-04
  7.100  1.53714E-02  1.17458E-02  2.28797E-03 -3.14143E-04 -3.52749E-04  4.01189E-02  1.96969E-02  2.58775E-03 -1.14229E-03 -4.60552E-04
  7.200  1.37574E-02  1.11596E-02  2.42681E-03 -2.37604E-04 -3.42709E-04  3.70459E-02  1.95317E-02  2.93970E-03 -1.09826E-03 -4.85352E-04
  7.300  1.22447E-02  1.05027E-02  2.51700E-03 -1.60814E-04 -3.28340E-04  3.40705E-02  1.91891E-02  3.24615E-03 -1.03303E-03 -5.01956E-04
  7.400  1.08372E-02  9.79259E-03  2.55935E-03 -8.64863E-05 -3.10155E-04  3.12076E-02  1.86813E-02  3.49860E-03 -9.51099E-04 -5.10068E-04
  7.500  9.53653E-03  9.04640E-03  2.55629E-03 -1.69959E-05 -2.88795E-04  2.84696E-02  1.80245E-02  3.69119E-03 -8.57232E-04 -5.09821E-04
  7.600  8.34314E-03  8.28075E-03  2.51160E-03  4.57109E-05 -2.64989E-04  2.58671E-02  1.72387E-02  3.82082E-03 -7.56195E-04 -5.01715E-04
  7.700  7.25578E-03  7.51114E-03  2.43013E-03  1.00172E-04 -2.39515E-04  2.34082E-02  1.63458E-02  3.88705E-03 -6.52475E-04 -4.86554E-04
  7.800  6.27197E-03  6.75156E-03  2.31755E-03  1.45433E-04 -2.13161E-04  2.10988E-02  1.53695E-02  3.89191E-03 -5.50079E-04 -4.65359E-04
  7.900  5.38813E-03  6.01422E-03  2.17995E-03  1.81037E-04 -1.86679E-04  1.89426E-02  1.43334E-02  3.83956E-03 -4.52385E-04 -4.39292E-04
  8.000  4.59973E-03  5.30935E-03  2.02358E-03  2.06994E-04 -1.60761E-04  1.69412E-02  1.32610E-02  3.73586E-03 -3.62049E-04 -4.09570E-04
  8.100  3.90151E-03  4.64512E-03  1.85458E-03  2.23717E-04 -1.36005E-04  1.50944E-02  1.21741E-02  3.58798E-03 -2.80976E-04 -3.77401E-04
  8.200  3.28767E-03  4.02763E-03  1.67873E-03  2.31952E-04 -1.12899E-04  1.34000E-02  1.10928E-02  3.40383E-03 -2.10339E-04 -3.43919E-04
  8.300  2.75199E-03  3.46099E-03  1.50125E-03  2.32695E-04 -9.18106E-05  1.18543E-02  1.00348E-02  3.19171E-03 -1.50635E-04 -3.10145E-04
  8.400  2.28802E-03  2.94747E-03  1.32669E-03  2.27104E-04 -7.29846E-05  1.04523E-02  9.01478E-03  2.95983E-03 -1.01782E-04 -2.76951E-04
  8.500  1.88922E-03  2.48771E-03  1.15883E-03  2.16421E-04 -5.65478E-05  9.18741E-03  8.04488E-03  2.71599E-03 -6.32270E-05 -2.45047E-04
  8.600  1.54909E-03  2.08091E-03  1.00064E-03  2.01896E-04 -4.25200E-05  8.05251E-03  7.13418E-03  2.46730E-03 -3.40634E-05 -2.14972E-04
  8.700  1.26129E-03  1.72510E-03  8.54290E-04  1.84722E-04 -3.08295E-05  7.03950E-03  6.28907E-03  2.22001E-03 -1.31520E-05 -1.87105E-04
  8.800  1.01971E-03  1.41742E-03  7.21206E-04  1.65987E-04 -2.13309E-05  6.13981E-03  5.51336E-03  1.97935E-03  7.71459E-07 -1.61677E-04
  8.900  8.18570E-04  1.15430E-03  6.02131E-04  1.46643E-04 -1.38246E-05  5.34457E-03  4.80859E-03  1.74949E-03  9.00149E-06 -1.38789E-04
  9.000  6.52478E-04  9.31756E-04  4.97220E-04  1.27478E-04 -8.07635E-06  4.64480E-03  4.17439E-03  1.53359E-03  1.27866E-05 -1.18436E-04
  9.100  5.16462E-04  7.45581E-04  4.06149E-04  1.09115E-04 -3.83416E-06  4.03159E-03  3.60876E-03  1.33381E-03  1.32719E-05 -1.00533E-04
  9.200  4.06006E-04  5.91496E-04  3.28213E-04  9.20100E-05 -8.44204E-07  3.49627E-03  3.10848E-03  1.15144E-03  1.14619E-05 -8.49311E-05
  9.300  3.17059E-04  4.65321E-04  2.62437E-04  7.64676E-05  1.13690E-06  3.03049E-03  2.66941E-03  9.87007E-04  8.19954E-06 -7.14458E-05
  9.400  2.46030E-04  3.63080E-04  2.07669E-04  6.26572E-05  2.33276E-06  2.62641E-03  2.28679E-03  8.40422E-04  4.16115E-06 -5.98698E-05
  9.500  1.89781E-04  2.81086E-04  1.62665E-04  5.06356E-05  2.94094E-06  2.27668E-03  1.95555E-03  7.11099E-04 -1.37139E-07 -4.99898E-05
  9.600  1.45599E-04  2.15993E-04  1.26156E-04  4.03698E-05  3.12964E-06  1.97455E-03  1.67045E-03  5.98091E-04 -4.32458E-06 -4.15971E-05
  9.700  1.11171E-04  1.64827E-04  9.69101E-05  3.17609E-05  3.03679E-06  1.71388E-03  1.42635E-03  5.00206E-04 -8.15556E-06 -3.44953E-05
  9.800  8.45496E-05  1.24993E-04  7.37679E-05  2.46647E-05  2.77110E-06  1.48916E-03  1.21830E-03  4.16107E-04 -1.14868E-05 -2.85057E-05
  9.900  6.41123E-05  9.42662E-05  5.56728E-05  1.89111E-05  2.41460E-06  1.29545E-03  1.04165E-03  3.44393E-04 -1.42542E-05 -2.34693E-05
 10.000  4.85267E-05  7.07711E-05  4.16865E-05  1.43196E-05  2.02606E-06  1.12841E-03  8.92108E-04  2.83668E-04 -1.64516E-05 -1.92476E-05
 10.100  3.67113E-05  5.29519E-05  3.09956E-05  1.07107E-05  1.64493E-06  9.84247E-04  7.65795E-04  2.32585E-04 -1.81111E-05 -1.57218E-05
 10.200  2.77987E-05  3.95377E-05  2.29097E-05  7.91532E-06  1.29527E-06  8.59664E-04  6.59248E-04  1.89878E-04 -1.92879E-05 -1.27912E-05
 10.300  2.11015E-05  2.95059E-05  1.68547E-05  5.78036E-06  9.89576E-07  7.51818E-04  5.69412E-04  1.54390E-04 -2.00478E-05 -1.03703E-05
 10.400  1.60815E-05  2.20447E-05  1.23625E-05  4.17156E-06  7.32087E-07  6.58276E-04  4.93628E-04  1.25074E-04 -2.04584E-05 -8.38700E-06
 10.500  1.23223E-05  1.65191E-05  9.05762E-06  2.97478E-06  5.21626E-07  5.76963E-04  4.29603E-04  1.00999E-04 -2.05827E-05 -6.77991E-06
 10.600  9.50478E-06  1.24382E-05  6.64429E-06  2.09547E-06  3.53832E-07  5.06116E-04  3.75382E-04  8.13483E-05 -2.04763E-05 -5.49608E-06
 10.700  7.38719E-06  9.42762E-06  4.89304E-06  1.45718E-06  2.22830E-07  4.44246E-04  3.29308E-04  6.54106E-05 -2.01856E-05 -4.48927E-06
 10.800  5.78808E-06  7.20465E-06  3.62845E-06  9.99384E-07  1.22395E-07  3.90094E-04  2.89989E-04  5.25710E-05 -1.97477E-05 -3.71850E-06
 10.900  4.57242E-06  5.55828E-06  2.71821E-06  6.75150E-07  4.66846E-08  3.42597E-04  2.56266E-04  4.23016E-05 -1.91915E-05 -3.14688E-06
 11.000  3.64042E-06  4.33236E-06  2.06376E-06  4.48685E-07 -9.37066E-09  3.00859E-04  2.27179E-04  3.41515E-05 -1.85390E-05 -2.74093E-06
 11.100  2.91879E-06  3.41231E-06  1.59245E-06  2.93103E-07 -4.99266E-08  2.64122E-04  2.01938E-04  2.77373E-05 -1.78069E-05 -2.47011E-06
 11.200  2.35397E-06  2.71463E-06  1.25127E-06  1.88446E-07 -7.82502E-08  2.31743E-04  1.79897E-04  2.27342E-05 -1.70082E-05 -2.30658E-06
 11.300  1.90685E-06  2.17885E-06  1.00188E-06  1.20030E-07 -9.68423E-08  2.03179E-04  1.60530E-04  1.88686E-05 -1.61535E-05 -2.22511E-06
 11.400  1.54896E-06  1.76138E-06  8.16767E-07  7.71003E-08 -1.07602E-07  1.77963E-04  1.43412E-04  1.59108E-05 -1.52525E-05 -2.20315E-06
 11.500  1.25953E-06  1.43099E-06  6.76365E-07  5.17986E-08 -1.11998E-07  1.55697E-04  1.28199E-04  1.36691E-05 -1.43140E-05 -2.22086E-06
 11.600  1.02335E-06  1.16535E-06  5.66908E-07  3.83823E-08 -1.11213E-07  1.36037E-04  1.14615E-04  1.19849E-05 -1.33473E-05 -2.26116E-06
 11.700  8.29250E-07  9.48616E-07  4.78838E-07  3.26545E-08 -1.06257E-07  1.18685E-04  1.02437E-04  1.07277E-05 -1.23616E-05 -2.30979E-06
 11.800  6.68956E-07  7.69558E-07  4.05639E-07  3.15578E-08 -9.80497E-08  1.03380E-04  9.14874E-05  9.79148E-06 -1.13667E-05 -2.35523E-06
 11.900  5.36265E-07  6.20252E-07  3.42990E-07  3.28870E-08 -8.74527E-08  8.98959E-05  8.16201E-05  9.09083E-06 -1.03726E-05 -2.38865E-06
 12.000  4.26470E-07  4.95098E-07  2.88127E-07  3.50870E-08 -7.52889E-08  7.80306E-05  7.27170E-05  8.55805E-06 -9.38931E-06 -2.40372E-06
 12.100  3.35920E-07  3.90106E-07  2.39375E-07  3.71056E-08 -6.23329E-08  6.76060E-05  6.46803E-05  8.14031E-06 -8.42638E-06 -2.39642E-06
 12.200  2.61718E-07  3.02370E-07  1.95791E-07  3.82843E-08 -4.92928E-08  5.84631E-05  5.74277E-05  7.79721E-06 -7.49298E-06 -2.36473E-06
 12.300  2.01497E-07  2.29692E-07  1.56899E-07  3.82707E-08 -3.67880E-08  5.04599E-05  5.08887E-05  7.49857E-06 -6.59740E-06 -2.30836E-06
 12.400  1.53259E-07  1.70310E-07  1.22491E-07  3.69462E-08 -2.53290E-08  4.34688E-05  4.50017E-05  7.22260E-06 -5.74690E-06 -2.22844E-06
 12.500  1.15275E-07  1.22714E-07  9.24819E-08  3.43645E-08 -1.53020E-08  3.73753E-05  3.97117E-05  6.95418E-06 -4.94751E-06 -2.12717E-06
 12.600  8.60081E-08  8.55287E-08  6.68089E-08  3.06979E-08 -6.96331E-09  3.20762E-05  3.49685E-05  6.68349E-06 -4.20396E-06 -2.00754E-06
 12.700  6.40705E-08  5.74430E-08  4.53694E-08  2.61911E-08 -4.40618E-10  2.74785E-05  3.07261E-05  6.40479E-06 -3.51965E-06 -1.87306E-06
 12.800  4.82013E-08  3.71813E-08  2.79860E-08  2.11238E-08  4.25659E-09  2.34986E-05  2.69413E-05  6.11541E-06 -2.89659E-06 -1.72746E-06
 12.900  3.72547E-08  2.34978E-08  1.43959E-08  1.57797E-08  7.22080E-09  2.00616E-05  2.35738E-05  5.81492E-06 -2.33552E-06 -1.57454E-06
 13.000  3.01975E-08  1.51898E-08  4.25671E-09  1.04245E-08  8.62574E-09  1.71001E-05  2.05857E-05  5.50446E-06 -1.83603E-06 -1.41794E-06
 13.100  2.61107E-08  1.11185E-08 -2.83715E-09  5.28949E-09  8.70326E-09  1.45538E-05  1.79413E-05  5.18620E-06 -1.39663E-06 -1.26103E-06
 13.200  2.41930E-08  1.02330E-08 -7.33130E-09  5.62573E-10  7.72011E-09  1.23691E-05  1.56069E-05  4.86294E-06 -1.01494E-06 -1.10683E-06
 13.300  2.37612E-08  1.15918E-08 -9.68693E-09 -3.61579E-09  5.95609E-09  1.04984E-05  1.35515E-05  4.53776E-06 -6.87873E-07 -9.57929E-07
 13.400  2.42502E-08  1.43795E-08 -1.03574E-08 -7.15251E-09  3.68505E-09  8.89941E-06  1.17458E-05  4.21379E-06 -4.11751E-07 -8.16449E-07
 13.500  2.52083E-08  1.79159E-08 -9.76844E-09 -9.99865E-09  1.15943E-09  7.53508E-06  1.01631E-05  3.89406E-06 -1.82511E-07 -6.84058E-07
 13.600  2.62903E-08  2.16587E-08 -8.30289E-09 -1.21441E-08 -1.40098E-09  6.37275E-06  8.77875E-06  3.58135E-06  4.16207E-09 -5.61974E-07
 13.700  2.72469E-08  2.51987E-08 -6.29097E-09 -1.36109E-08 -3.81628E-09  5.38392E-06  7.57021E-06  3.27812E-06  1.52696E-07 -4.50998E-07
 13.800  2.79132E-08  2.82495E-08 -4.00532E-09 -1.44467E-08 -5.94979E-09  4.54377E-06  6.51710E-06  2.98648E-06  2.67515E-07 -3.51549E-07
 13.900  2.81948E-08  3.06328E-08 -1.66059E-09 -1.47174E-08 -7.70803E-09  3.83076E-06  5.60102E-06  2.70815E-06  3.52933E-07 -2.63717E-07
 14.000  2.80545E-08  3.22614E-08  5.83523E-10 -1.45011E-08 -9.03800E-09  3.22627E-06  4.80546E-06  2.44449E-06  4.13082E-07 -1.87310E-07
 14.100  2.74984E-08  3.31207E-08  2.61666E-09 -1.38823E-08 -9.92248E-09  2.71428E-06  4.11565E-06  2.19647E-06  4.51840E-07 -1.21903E-07
 14.200  2.65637E-08  3.32509E-08  4.37068E-09 -1.29468E-08 -1.03740E-08  2.28102E-06  3.51848E-06  1.96473E-06  4.72796E-07 -6.68924E-08
 14.300  2.53077E-08  3.27296E-08  5.81184E-09 -1.17783E-08 -1.04281E-08  1.91467E-06  3.00230E-06  1.74960E-06  4.79215E-07 -2.15359E-08
 14.400  2.37985E-08  3.16577E-08  6.93302E-09 -1.04548E-08 -1.01369E-08  1.60517E-06  2.55682E-06  1.55113E-06  4.74027E-07  1.50009E-08
 14.500  2.21075E-08  3.01464E-08  7.74648E-09 -9.04665E-09 -9.56230E-09  1.34391E-06  2.17299E-06  1.36912E-06  4.59822E-07  4.36087E-08
 14.600  2.03038E-08  2.83082E-08  8.27750E-09 -7.61518E-09 -8.77070E-09  1.12355E-06  1.84282E-06  1.20319E-06  4.38856E-07  6.52017E-08
 14.700  1.84504E-08  2.62492E-08  8.55919E-09 -6.21164E-09 -7.82811E-09  9.37875E-07  1.55931E-06  1.05276E-06  4.13069E-07  8.06901E-08
 14.800  1.66017E-08  2.40645E-08  8.62823E-09 -4.87714E-09 -6.79646E-09  7.81578E-07  1.31632E-06  9.17143E-07  3.84097E-07  9.09575E-08
 14.900  1.48021E-08  2.18353E-08  8.52188E-09 -3.64287E-09 -5.73091E-09  6.50159E-07  1.10847E-06  7.95535E-07  3.53301E-07  9.68432E-08
 15.000  1.30861E-08  1.96283E-08  8.27575E-09 -2.53067E-09 -4.67818E-09  5.39796E-07  9.31044E-07  6.87067E-07  3.21790E-07  9.91290E-08
 15.100  1.14786E-08  1.74951E-08  7.92249E-09 -1.55391E-09 -3.67571E-09  4.47244E-07  7.79927E-07  5.90821E-07  2.90447E-07  9.85292E-08
 15.200  9.99567E-09  1.54735E-08  7.49103E-09 -7.18576E-10 -2.75154E-09  3.69749E-07  6.51520E-07  5.05859E-07  2.59957E-07  9.56853E-08
 15.300  8.64610E-09  1.35892E-08  7.00628E-09 -2.44187E-11 -1.92478E-09  3.04970E-07  5.42682E-07  4.31238E-07  2.30833E-07  9.11630E-08
 15.400  7.43250E-09  1.18576E-08  6.48923E-09  5.33832E-10 -1.20648E-09  2.50921E-07  4.50673E-07  3.66027E-07  2.03439E-07  8.54521E-08
 15.500  6.35273E-09  1.02854E-08  5.95711E-09  9.65285E-10 -6.00789E-10  2.05918E-07  3.73106E-07  3.09324E-07  1.78016E-07  7.89686E-08
 15.600  5.40109E-09  8.87293E-09  5.42383E-09  1.28177E-09 -1.06180E-10  1.68527E-07  3.07904E-07  2.60263E-07  1.54701E-07  7.20582E-08
 15.700  4.56946E-09  7.61564E-09  4.90035E-09  1.49682E-09  2.83210E-10  1.37535E-07  2.53262E-07  2.18022E-07  1.33548E-07  6.50015E-08
 15.800  3.84819E-09  6.50549E-09  4.39506E-09  1.62481E-09  5.76360E-10  1.11912E-07  2.07613E-07  1.81832E-07  1.14546E-07  5.80200E-08
 15.900  3.22689E-09  5.53225E-09  3.91422E-09  1.68018E-09  7.84240E-10  9.07830E-08  1.69603E-07  1.50978E-07  9.76316E-08  5.12824E-08
 16.000  2.69497E-09  4.68447E-09  3.46227E-09  1.67689E-09  9.18844E-10  7.34102E-08  1.38061E-07  1.24802E-07  8.27047E-08  4.49115E-08
 16.100  2.24208E-09  3.95021E-09  3.04214E-09  1.62796E-09  9.92392E-10  5.91680E-08  1.11978E-07  1.02704E-07  6.96389E-08  3.89907E-08
 16.200  1.85841E-09  3.31760E-09  2.65550E-09  1.54514E-09  1.01672E-09  4.75285E-08  9.04870E-08  8.41387E-08  5.82910E-08  3.35706E-08
 16.300  1.53487E-09  2.77521E-09  2.30303E-09  1.43876E-09  1.00283E-09  3.80469E-08  7.28451E-08  6.86189E-08  4.85084E-08  2.86750E-08
 16.400  1.26320E-09  2.31229E-09  1.98453E-09  1.31761E-09  9.60577E-10  3.03491E-08  5.84180E-08  5.57083E-08  4.01360E-08  2.43067E-08
 16.500  1.03597E-09  1.91891E-09  1.69919E-09  1.18898E-09  8.98542E-10  2.41211E-08  4.66657E-08  4.50212E-08  3.30204E-08  2.04521E-08
 16.600  8.46649E-10  1.58603E-09  1.44565E-09  1.05870E-09  8.23932E-10  1.91005E-08  3.71304E-08  3.62181E-08  2.70140E-08  1.70859E-08
 16.700  6.89477E-10  1.30554E-09  1.22216E-09  9.31258E-10  7.42624E-10  1.50680E-08  2.94251E-08  2.90028E-08  2.19775E-08  1.41746E-08
 16.800  5.59464E-10  1.07016E-09  1.02672E-09  8.09950E-10  6.59243E-10  1.18413E-08  2.32242E-08  2.31181E-08  1.77817E-08  1.16798E-08
 16.900  4.52299E-10  8.73471E-10  8.57104E-10  6.97044E-10  5.77287E-10  9.26949E-09  1.82549E-08  1.83424E-08  1.43085E-08  9.56043E-09
 17.000  3.64284E-10  7.09822E-10  7.11030E-10  5.93940E-10  4.99267E-10  7.22765E-09  1.42894E-08  1.44859E-08  1.14515E-08  7.77501E-09
 17.100  2.92260E-10  5.74258E-10  5.86168E-10  5.01339E-10  4.26867E-10  5.61309E-09  1.11385E-08  1.13871E-08  9.11567E-09  6.28291E-09
 17.200  2.33544E-10  4.62466E-10  4.80227E-10  4.19392E-10  3.61090E-10  4.34160E-09  8.64571E-09  8.90968E-09  7.21764E-09  5.04554E-09
 17.300  1.85861E-10  3.70702E-10  3.90998E-10  3.47836E-10  3.02405E-10  3.34443E-09  6.68229E-09  6.93878E-09  5.68456E-09  4.02706E-09
 17.400  1.47293E-10  2.95737E-10  3.16386E-10  2.86114E-10  2.50872E-10  2.56567E-09  5.14264E-09  5.37866E-09  4.45357E-09  3.19480E-09
 17.500  1.16226E-10  2.34794E-10  2.54444E-10  2.33477E-10  2.06260E-10  1.96007E-09  3.94068E-09  4.14987E-09  3.47091E-09  2.51951E-09
 17.600  9.13072E-11  1.85496E-10  2.03382E-10  1.89060E-10  1.68133E-10  1.49115E-09  3.00656E-09  3.18684E-09  2.69102E-09  1.97534E-09
 17.700  7.14085E-11  1.45822E-10  1.61583E-10  1.51953E-10  1.35931E-10  1.12963E-09  2.28389E-09  2.43587E-09  2.07560E-09  1.53977E-09
 17.800  5.55904E-11  1.14058E-10  1.27603E-10  1.21245E-10  1.09030E-10  8.52124E-10  1.72734E-09  1.85316E-09  1.59270E-09  1.19341E-09
 17.900  4.30745E-11  8.87607E-11  1.00167E-10  9.60605E-11  8.67885E-11  6.40052E-10  1.30068E-09  1.40326E-09  1.21592E-09  9.19754E-10
 18.000  3.32186E-11  6.87218E-11  7.81646E-11  7.55835E-11  6.85752E-11  4.78699E-10  9.75094E-10  1.05763E-09  9.23560E-10  7.04911E-10
 18.100  2.54951E-11  5.29336E-11  6.06366E-11  5.90717E-11  5.37970E-11  3.56482E-10  7.27785E-10  7.93410E-10  6.97959E-10  5.37283E-10
 18.200  1.94726E-11  4.05622E-11  4.67648E-11  4.58633E-11  4.19103E-11  2.64323E-10  5.40799E-10  5.92425E-10  5.24820E-10  4.07290E-10
 18.300  1.48000E-11  3.09212E-11  3.58579E-11  3.53788E-11  3.24290E-11  1.95140E-10  4.00074E-10  4.40295E-10  3.92662E-10  3.07087E-10
 18.400  1.11933E-11  2.34494E-11  2.73371E-11  2.71184E-11  2.49268E-11  1.43440E-10  2.94657E-10  3.25710E-10  2.92326E-10  2.30303E-10
 18.500  8.42360E-12  1.76907E-11  2.07226E-11  2.06577E-11  1.90364E-11  1.04978E-10  2.16053E-10  2.39828E-10  2.16555E-10  1.71806E-10
 18.600  6.30772E-12  1.32769E-11  1.56199E-11  1.56401E-11  1.44460E-11  7.64949E-11  1.57715E-10  1.75774E-10  1.59637E-10  1.27498E-10
 18.700  4.69975E-12  9.91262E-12  1.17079E-11  1.17702E-11  1.08946E-11  5.54969E-11  1.14618E-10  1.28233E-10  1.17105E-10  9.41263E-11
 18.800  3.48417E-12  7.36246E-12  8.72705E-12  8.80544E-12  8.16633E-12  4.00871E-11  8.29275E-11  9.31187E-11  8.54871E-11  6.91327E-11
 18.900  2.57007E-12  5.44009E-12  6.46938E-12  6.54914E-12  6.08469E-12  2.88297E-11  5.97331E-11  6.73092E-11  6.21048E-11  5.05172E-11
 19.000  1.88630E-12  3.99894E-12  4.76964E-12  4.84303E-12  4.50704E-12  2.06431E-11  4.28352E-11  4.84301E-11  4.49013E-11  3.67279E-11
 19.100  1.37753E-12  2.92446E-12  3.49749E-12  3.56110E-12  3.31915E-12  1.47167E-11  3.05815E-11  3.46870E-11  3.23082E-11  2.65688E-11
 19.200  1.00095E-12  2.12773E-12  2.55092E-12  2.60386E-12  2.43043E-12  1.04459E-11  2.17366E-11  2.47306E-11  2.31365E-11  1.91243E-11
 19.300  7.23692E-13  1.54017E-12  1.85065E-12  1.89343E-12  1.76968E-12  7.38213E-12  1.53816E-11  1.75518E-11  1.64901E-11  1.36977E-11
 19.400  5.20630E-13  1.10921E-12  1.33555E-12  1.36932E-12  1.28144E-12  5.19424E-12  1.08365E-11  1.24005E-11  1.16978E-11  9.76297E-12
 19.500  3.72688E-13  7.94797E-13  9.58790E-13  9.84955E-13  9.22828E-13  3.63887E-12  7.60084E-12  8.72142E-12  8.25932E-12  6.92466E-12
 19.600  2.65467E-13  5.66647E-13  6.84748E-13  7.04704E-13  6.60992E-13  2.53817E-12  5.30787E-12  6.10627E-12  5.80442E-12  4.88780E-12
 19.700  1.88161E-13  4.01970E-13  4.86521E-13  5.01537E-13  4.70924E-13  1.76272E-12  3.69037E-12  4.25609E-12  4.06028E-12  3.43353E-12
 19.800  1.32714E-13  2.83733E-13  3.43918E-13  3.55081E-13  3.33744E-13  1.21888E-12  2.55455E-12  2.95324E-12  2.82713E-12  2.40047E-12
 19.900  9.31482E-14  1.99284E-13  2.41883E-13  2.50094E-13  2.35292E-13  8.39181E-13  1.76059E-12  2.04007E-12  1.95947E-12  1.67028E-12
  67 216 200   0.100
  0.000  4.63932E-02 -2.32738E-16 -4.26742E-16 -8.13102E-17 -1.47340E-15  1.00199E-01 -5.27539E-16 -8.32667E-16 -6.75501E-16 -1.95977E-15
  0.100  4.64174E-02 -2.64117E-05 -1.96146E-08 -6.26981E-12 -2.76800E-15  1.00216E-01 -3.36591E-05  2.98647E-09  7.89047E-12  1.01851E-14
  0.200  4.64893E-02 -1.04620E-04 -3.11112E-07 -3.97476E-10 -3.41837E-13  1.00266E-01 -1.31925E-04  4.82753E-08  5.02800E-10 -1.97737E-13
  0.300  4.66078E-02 -2.31575E-04 -1.55227E-06 -4.45668E-09 -8.67212E-12  1.00345E-01 -2.86867E-04  2.48440E-07  5.67963E-09 -4.92209E-12
  0.400  4.67707E-02 -4.02299E-04 -4.80695E-06 -2.44935E-08 -8.48083E-11  1.00447E-01 -4.85925E-04  8.02434E-07  3.15376E-08 -4.57073E-11
  0.500  4.69748E-02 -6.10042E-04 -1.14314E-05 -9.08166E-08 -4.91972E-10  1.00566E-01 -7.12854E-04  2.01043E-06  1.18476E-07 -2.46165E-10
  0.600  4.72164E-02 -8.46494E-04 -2.29532E-05 -2.61904E-07 -2.04637E-09  1.00692E-01 -9.48939E-04  4.29039E-06  3.47114E-07 -9.27280E-10
  0.700  4.74910E-02 -1.10205E-03 -4.09303E-05 -6.33774E-07 -6.75335E-09  1.00818E-01 -1.17440E-03  8.19250E-06  8.55573E-07 -2.68067E-09
  0.800  4.77937E-02 -1.36614E-03 -6.68031E-05 -1.34650E-06 -1.87835E-08  1.00933E-01 -1.36991E-03  1.44069E-05  1.85605E-06 -6.22956E-09
  0.900  4.81187E-02 -1.62756E-03 -1.01747E-04 -2.58601E-06 -4.57796E-08  1.01029E-01 -1.51800E-03  2.37597E-05  3.64818E-06 -1.17697E-08
  1.000  4.84603E-02 -1.87487E-03 -1.46538E-04 -4.57990E-06 -1.00404E-07  1.01098E-01 -1.60449E-03  3.71931E-05  6.62660E-06 -1.73787E-08
  1.100  4.88121E-02 -2.09681E-03 -2.01441E-04 -7.58647E-06 -2.01952E-07  1.01136E-01 -1.61953E-03  5.57254E-05  1.12800E-05 -1.60436E-08
  1.200  4.91679E-02 -2.28269E-03 -2.66130E-04 -1.18773E-05 -3.77781E-07  1.01138E-01 -1.55838E-03  8.03884E-05  1.81794E-05  9.07560E-09
  1.300  4.95214E-02 -2.42282E-03 -3.39641E-04 -1.77145E-05 -6.64261E-07  1.01104E-01 -1.42189E-03  1.12143E-04  2.79538E-05  9.13203E-08
  1.400  4.98666E-02 -2.50887E-03 -4.20368E-04 -2.53240E-05 -1.10695E-06  1.01035E-01 -1.21645E-03  1.51777E-04  4.12528E-05  2.88973E-07
  1.500  5.01975E-02 -2.53425E-03 -5.06098E-04 -3.48676E-05 -1.75972E-06  1.00936E-01 -9.53601E-04  1.99780E-04  5.86950E-05  6.94824E-07
  1.600  5.05089E-02 -2.49438E-03 -5.94084E-04 -4.64167E-05 -2.68272E-06  1.00812E-01 -6.49258E-04  2.56226E-04  8.08061E-05  1.44569E-06
  1.700  5.07961E-02 -2.38693E-03 -6.81153E-04 -5.99296E-05 -3.93910E-06  1.00672E-01 -3.22563E-04  3.20653E-04  1.07947E-04  2.73023E-06
  1.800  5.10550E-02 -2.21199E-03 -7.63842E-04 -7.52360E-05 -5.59060E-06  1.00526E-01  5.47785E-06  3.91960E-04  1.40241E-04  4.79296E-06
  1.900  5.12825E-02 -1.97213E-03 -8.38557E-04 -9.20288E-05 -7.69236E-06  1.00384E-01  3.13525E-04  4.68345E-04  1.77498E-04  7.93228E-06
  2.000  5.14762E-02 -1.67235E-03 -9.01735E-04 -1.09866E-04 -1.02874E-05  1.00256E-01  5.81474E-04  5.47286E-04  2.19156E-04  1.24904E-05
  2.100  5.16350E-02 -1.32004E-03 -9.50021E-04 -1.28184E-04 -1.34013E-05  1.00151E-01  7.91949E-04  6.25582E-04  2.64230E-04  1.88339E-05
  2.200  5.17585E-02 -9.24672E-04 -9.80431E-04 -1.46313E-04 -1.70373E-05  1.00078E-01  9.31612E-04  6.99463E-04  3.11298E-04  2.73234E-05
  2.300  5.18477E-02 -4.97569E-04 -9.90505E-04 -1.63508E-04 -2.11735E-05  1.00042E-01  9.92186E-04  7.64769E-04  3.58505E-04  3.82745E-05
  2.400  5.19043E-02 -5.14820E-05 -9.78439E-04 -1.78982E-04 -2.57610E-05  1.00046E-01  9.71119E-04  8.17194E-04  4.03617E-04  5.19105E-05
  2.500  5.19312E-02  3.99854E-04 -9.43195E-04 -1.91938E-04 -3.07246E-05  1.00092E-01  8.71827E-04  8.52582E-04  4.44105E-04  6.83111E-05
  2.600  5.19322E-02  8.42230E-04 -8.84580E-04 -2.01604E-04 -3.59661E-05  1.00175E-01  7.03505E-04  8.67263E-04  4.77275E-04  8.73621E-05
  2.700  5.19118E-02  1.26151E-03 -8.03290E-04 -2.07267E-04 -4.13686E-05  1.00291E-01  4.80513E-04  8.58396E-04  5.00424E-04  1.08712E-04
  2.800  5.18754E-02  1.64420E-03 -7.00931E-04 -2.08303E-04 -4.68036E-05  1.00432E-01  2.21382E-04  8.24284E-04  5.11037E-04  1.31742E-04
  2.900  5.18284E-02  1.97801E-03 -5.80000E-04 -2.04193E-04 -5.21384E-05  1.00588E-01 -5.24882E-05  7.64645E-04  5.06987E-04  1.55552E-04
  3.000  5.17768E-02  2.25235E-03 -4.43834E-04 -1.94552E-04 -5.72441E-05  1.00747E-01 -3.18344E-04  6.80796E-04  4.86740E-04  1.78979E-04
  3.100  5.17263E-02  2.45888E-03 -2.96531E-04 -1.79131E-04 -6.20037E-05  1.00898E-01 -5.53678E-04  5.75718E-04  4.49545E-04  2.00631E-04
  3.200  5.16824E-02  2.59186E-03 -1.42840E-04 -1.57832E-04 -6.63175E-05  1.01028E-01 -7.37813E-04  4.53998E-04  3.95593E-04  2.18959E-04
  3.300  5.16500E-02  2.64851E-03  1.19758E-05 -1.30711E-04 -7.01085E-05  1.01126E-01 -8.53325E-04  3.21622E-04  3.26117E-04  2.32350E-04
  3.400  5.16328E-02  2.62925E-03  1.62303E-04 -9.79844E-05 -7.33240E-05  1.01182E-01 -8.87216E-04  1.85638E-04  2.43433E-04  2.39244E-04
  3.500  5.16334E-02  2.53776E-03  3.02362E-04 -6.00305E-05 -7.59357E-05  1.01188E-01 -8.31729E-04  5.36913E-05  1.50900E-04  2.38256E-04
  3.600  5.16530E-02  2.38102E-03  4.26408E-04 -1.73980E-05 -7.79372E-05  1.01138E-01 -6.84751E-04 -6.65246E-05  5.27985E-05  2.28310E-04
  3.700  5.16909E-02  2.16911E-03  5.28954E-04  2.91904E-05 -7.93402E-05  1.01028E-01 -4.49776E-04 -1.67871E-04 -4.58732E-05  2.08757E-04
  3.800  5.17445E-02  1.91498E-03  6.04988E-04  7.88314E-05 -8.01692E-05  1.00855E-01 -1.35423E-04 -2.44362E-04 -1.39677E-04  1.79470E-04
  3.900  5.18091E-02  1.63402E-03  6.50209E-04  1.30438E-04 -8.04572E-05  1.00620E-01  2.45441E-04 -2.91706E-04 -2.23075E-04  1.40911E-04
  4.000  5.18778E-02  1.34357E-03  6.61238E-04  1.82738E-04 -8.02414E-05  1.00322E-01  6.76910E-04 -3.07748E-04 -2.90801E-04  9.41488E-05
  4.100  5.19420E-02  1.06228E-03  6.35828E-04  2.34286E-04 -7.95615E-05  9.99626E-02  1.14147E-03 -2.92740E-04 -3.38254E-04  4.08381E-05
  4.200  5.19907E-02  8.09460E-04  5.73035E-04  2.83477E-04 -7.84604E-05  9.95428E-02  1.62156E-03 -2.49438E-04 -3.61861E-04 -1.68612E-05
  4.300  5.20116E-02  6.04287E-04  4.73357E-04  3.28580E-04 -7.69875E-05  9.90625E-02  2.10107E-03 -1.82980E-04 -3.59401E-04 -7.64030E-05
  4.400  5.19910E-02  4.65072E-04  3.38821E-04  3.67784E-04 -7.52055E-05  9.85205E-02  2.56679E-03 -1.00550E-04 -3.30250E-04 -1.35016E-04
  4.500  5.19141E-02  4.08476E-04  1.73011E-04  3.99259E-04 -7.31983E-05  9.79136E-02  3.00949E-03 -1.08504E-05 -2.75516E-04 -1.89892E-04
  4.600  5.17658E-02  4.48785E-04 -1.89684E-05  4.21235E-04 -7.10804E-05  9.72366E-02  3.42477E-03  7.65813E-05 -1.98067E-04 -2.38382E-04
  4.700  5.15309E-02  5.97255E-04 -2.30611E-04  4.32086E-04 -6.90060E-05  9.64821E-02  3.81344E-03  1.52165E-04 -1.02427E-04 -2.78194E-04
  4.800  5.11952E-02  8.61552E-04 -4.54190E-04  4.30436E-04 -6.71760E-05  9.56408E-02  4.18142E-03  2.07109E-04  5.45877E-06 -3.07564E-04
  4.900  5.07453E-02  1.24533E-03 -6.81021E-04  4.15247E-04 -6.58405E-05  9.47014E-02  4.53934E-03  2.34208E-04  1.18560E-04 -3.25393E-04
  5.000  5.01697E-02  1.74793E-03 -9.01788E-04  3.85922E-04 -6.52973E-05  9.36515E-02  4.90158E-03  2.28544E-04  2.29198E-04 -3.31337E-04
  5.100  4.94590E-02  2.36432E-03 -1.10692E-03  3.42383E-04 -6.58831E-05  9.24784E-02  5.28509E-03  1.88019E-04  3.29538E-04 -3.25832E-04
  5.200  4.86065E-02  3.08514E-03 -1.28700E-03  2.85126E-04 -6.79586E-05  9.11691E-02  5.70791E-03  1.13672E-04  4.12110E-04 -3.10072E-04
  5.300  4.76083E-02  3.89695E-03 -1.43320E-03  2.15259E-04 -7.18872E-05  8.97118E-02  6.18765E-03  9.75183E-06  4.70307E-04 -2.85916E-04
  5.400  4.64637E-02  4.78266E-03 -1.53773E-03  1.34497E-04 -7.80084E-05  8.80961E-02  6.73986E-03 -1.16478E-04  4.98840E-04 -2.55751E-04
  5.500  4.51751E-02  5.72213E-03 -1.59416E-03  4.51212E-05 -8.66078E-05  8.63142E-02  7.37661E-03 -2.55177E-04  4.94100E-04 -2.22316E-04
  5.600  4.37481E-02  6.69288E-03 -1.59786E-03 -5.00956E-05 -9.78865E-05  8.43608E-02  8.10524E-03 -3.94583E-04  4.54404E-04 -1.88498E-04
  5.700  4.21913E-02  7.67087E-03 -1.54616E-03 -1.48001E-04 -1.11932E-04  8.22341E-02  8.92745E-03 -5.21835E-04  3.80110E-04 -1.57128E-04
  5.800  4.05159E-02  8.63145E-03 -1.43860E-03 -2.45206E-04 -1.28695E-04  7.99357E-02  9.83875E-03 -6.23895E-04  2.73590E-04 -1.30777E-04
  5.900  3.87357E-02  9.55018E-03 -1.27693E-03 -3.38244E-04 -1.47971E-04  7.74709E-02  1.08284E-02 -6.88495E-04  1.39065E-04 -1.11584E-04
  6.000  3.68664E-02  1.04038E-02 -1.06511E-03 -4.23751E-04 -1.69398E-04  7.48484E-02  1.18795E-02 -7.05039E-04 -1.76825E-05 -1.01125E-04
  6.100  3.49252E-02  1.11709E-02 -8.09108E-04 -4.98633E-04 -1.92455E-04  7.20804E-02  1.29701E-02 -6.65380E-04 -1.89695E-04 -1.00317E-04
  6.200  3.29304E-02  1.18330E-02 -5.16660E-04 -5.60231E-04 -2.16487E-04  6.91818E-02  1.40738E-02 -5.64427E-04 -3.69291E-04 -1.09389E-04
  6.300  3.09007E-02  1.23747E-02 -1.96902E-04 -6.06461E-04 -2.40724E-04  6.61703E-02  1.51612E-02 -4.00527E-04 -5.48556E-04 -1.27895E-04
  6.400  2.88549E-02  1.27844E-02  1.40050E-04 -6.35914E-04 -2.64325E-04  6.30654E-02  1.62016E-02 -1.75603E-04 -7.19816E-04 -1.54780E-04
  6.500  2.68114E-02  1.30546E-02  4.83565E-04 -6.47927E-04 -2.86420E-04  5.98883E-02  1.71641E-02  1.04955E-04 -8.76081E-04 -1.88483E-04
  6.600  2.47878E-02  1.31821E-02  8.22981E-04 -6.42600E-04 -3.06158E-04  5.66610E-02  1.80196E-02  4.32635E-04 -1.01142E-03 -2.27071E-04
  6.700  2.28006E-02  1.31676E-02  1.14807E-03 -6.20771E-04 -3.22754E-04  5.34061E-02  1.87418E-02  7.96345E-04 -1.12125E-03 -2.68386E-04
  6.800  2.08647E-02  1.30158E-02  1.44950E-03 -5.83952E-04 -3.35539E-04  5.01461E-02  1.93089E-02  1.18310E-03 -1.20248E-03 -3.10206E-04
  6.900  1.89936E-02  1.27350E-02  1.71914E-03 -5.34224E-04 -3.43992E-04  4.69030E-02  1.97038E-02  1.57883E-03 -1.25363E-03 -3.50383E-04
  7.000  1.71986E-02  1.23364E-02  1.95045E-03 -4.74104E-04 -3.47771E-04  4.36979E-02  1.99156E-02  1.96916E-03 -1.27474E-03 -3.86980E-04
  7.100  1.54896E-02  1.18339E-02  2.13859E-03 -4.06395E-04 -3.46729E-04  4.05508E-02  1.99393E-02  2.34028E-03 -1.26727E-03 -4.18364E-04
  7.200  1.38742E-02  1.12432E-02  2.28058E-03 -3.34024E-04 -3.40920E-04  3.74803E-02  1.97761E-02  2.67957E-03 -1.23387E-03 -4.43284E-04
  7.300  1.23582E-02  1.05811E-02  2.37529E-03 -2.59891E-04 -3.30589E-04  3.45030E-02  1.94327E-02  2.97630E-03 -1.17812E-03 -4.60908E-04
  7.400  1.09455E-02  9.86507E-03  2.42335E-03 -1.86724E-04 -3.16153E-04  3.16339E-02  1.89213E-02  3.22200E-03 -1.10426E-03 -4.70828E-04
  7.500  9.63853E-03  9.11254E-03  2.42696E-03 -1.16956E-04 -2.98172E-04  2.88859E-02  1.82583E-02  3.41077E-03 -1.01683E-03 -4.73042E-04
  7.600  8.43774E-03  8.34025E-03  2.38972E-03 -5.26325E-05 -2.77312E-04  2.62697E-02  1.74638E-02  3.53940E-03 -9.20453E-04 -4.67905E-04
  7.700  7.34228E-03  7.56387E-03  2.31629E-03  4.65269E-06 -2.54308E-04  2.37940E-02  1.65602E-02  3.60728E-03 -8.19521E-04 -4.56070E-04
  7.800  6.34997E-03  6.79756E-03  2.21211E-03  5.37866E-05 -2.29919E-04  2.14652E-02  1.55713E-02  3.61621E-03 -7.18027E-04 -4.38413E-04
  7.900  5.45751E-03  6.05365E-03  2.08311E-03  9.41384E-05 -2.04892E-04  1.92877E-02  1.45214E-02  3.57008E-03 -6.19394E-04 -4.15957E-04
  8.000  4.66060E-03  5.34253E-03  1.93536E-03  1.25532E-04 -1.79927E-04  1.72636E-02  1.34341E-02  3.47450E-03 -5.26383E-04 -3.89801E-04
  8.100  3.95421E-03  4.67247E-03  1.77486E-03  1.48194E-04 -1.55647E-04  1.53934E-02  1.23318E-02  3.33632E-03 -4.41049E-04 -3.61047E-04
  8.200  3.33267E-03  4.04964E-03  1.60726E-03  1.62692E-04 -1.32579E-04  1.36753E-02  1.12351E-02  3.16316E-03 -3.64752E-04 -3.30747E-04
  8.300  2.78988E-03  3.47823E-03  1.43769E-03  1.69850E-04 -1.11139E-04  1.21063E-02  1.01617E-02  2.96302E-03 -2.98207E-04 -2.99858E-04
  8.400  2.31948E-03  2.96055E-03  1.27060E-03  1.70677E-04 -9.16264E-05  1.06816E-02  9.12700E-03  2.74384E-03 -2.41559E-04 -2.69207E-04
  8.500  1.91497E-03  2.49722E-03  1.10973E-03  1.66279E-04 -7.42294E-05  9.39513E-03  8.14317E-03  2.51315E-03 -1.94489E-04 -2.39480E-04
  8.600  1.56987E-03  2.08744E-03  9.57985E-04  1.57795E-04 -5.90295E-05  8.23994E-03  7.21956E-03  2.27782E-03 -1.56319E-04 -2.11209E-04
  8.700  1.27780E-03  1.72922E-03  8.17534E-04  1.46328E-04 -4.60155E-05  7.20814E-03  6.36266E-03  2.04389E-03 -1.26128E-04 -1.84778E-04
  8.800  1.03262E-03  1.41963E-03  6.89788E-04  1.32903E-04 -3.50997E-05  6.29128E-03  5.57636E-03  1.81640E-03 -1.02847E-04 -1.60436E-04
  8.900  8.28505E-04  1.15508E-03  5.75495E-04  1.18423E-04 -2.61351E-05  5.48051E-03  4.86226E-03  1.59935E-03 -8.53576E-05 -1.38312E-04
  9.000  6.59992E-04  9.31499E-04  4.74827E-04  1.03652E-04 -1.89329E-05  4.76684E-03  4.21992E-03  1.39578E-03 -7.25601E-05 -1.18437E-04
  9.100  5.22045E-04  7.44620E-04  3.87483E-04  8.92048E-05 -1.32799E-05  4.14132E-03  3.64732E-03  1.20773E-03 -6.34314E-05 -1.00760E-04
  9.200  4.10077E-04  5.90104E-04  3.12789E-04  7.55432E-05 -8.95290E-06  3.59516E-03  3.14114E-03  1.03642E-03 -5.70625E-05 -8.51746E-05
  9.300  3.19967E-04  4.63711E-04  2.49804E-04  6.29899E-05 -5.73136E-06  3.11992E-03  2.69715E-03  8.82327E-04 -5.26803E-05 -7.15350E-05
  9.400  2.48063E-04  3.61412E-04  1.97416E-04  5.17416E-05 -3.40713E-06  2.70761E-03  2.31048E-03  7.45319E-04 -4.96548E-05 -5.96724E-05
  9.500  1.91170E-04  2.79472E-04  1.54418E-04  4.18885E-05 -1.79135E-06  2.35075E-03  1.97592E-03  6.24800E-04 -4.74953E-05 -4.94085E-05
  9.600  1.46524E-04  2.14507E-04  1.19585E-04  3.34354E-05 -7.18622E-07  2.04245E-03  1.68814E-03  5.19830E-04 -4.58383E-05 -4.05664E-05
  9.700  1.11771E-04  1.63512E-04  9.17233E-05  2.63229E-05 -4.89431E-08  1.77644E-03  1.44191E-03  4.29236E-04 -4.44307E-05 -3.29776E-05
  9.800  8.49259E-05  1.23866E-04  6.97112E-05  2.04468E-05  3.32311E-07  1.54706E-03  1.23216E-03  3.51712E-04 -4.31095E-05 -2.64872E-05
  9.900  6.43404E-05  9.33282E-05  5.25289E-05  1.56756E-05  5.15868E-07  1.34929E-03  1.05417E-03  2.85902E-04 -4.17819E-05 -2.09559E-05
 10.000  4.86595E-05  7.00109E-05  3.92715E-05  1.18650E-05  5.71027E-07  1.17866E-03  9.03573E-04  2.30455E-04 -4.04061E-05 -1.62615E-05
 10.100  3.67849E-05  5.23512E-05  2.91559E-05  8.86925E-06  5.48699E-07  1.03131E-03  7.76434E-04  1.84077E-04 -3.89745E-05 -1.22979E-05
 10.200  2.78369E-05  3.90748E-05  2.15189E-05  6.54908E-06  4.84670E-07  9.03845E-04  6.69236E-04  1.45562E-04 -3.75000E-05 -8.97412E-06
 10.300  2.11197E-05  2.91579E-05  1.58104E-05  4.77761E-06  4.02792E-07  7.93371E-04  5.78886E-04  1.13804E-04 -3.60051E-05 -6.21227E-06
 10.400  1.60890E-05  2.17899E-05  1.15824E-05  3.44323E-06  3.17912E-07  6.97398E-04  5.02689E-04  8.78118E-05 -3.45140E-05 -3.94542E-06
 10.500  1.23243E-05  1.63378E-05  8.47697E-06  2.45084E-06  2.38413E-07  6.13810E-04  4.38329E-04  6.67083E-05 -3.30480E-05 -2.11555E-06
 10.600  9.50418E-06  1.23134E-05  6.21265E-06  1.72168E-06  1.68290E-07  5.40812E-04  3.83826E-04  4.97244E-05 -3.16225E-05 -6.71620E-07
 10.700  7.38540E-06  9.34495E-06  4.57169E-06  1.19212E-06  1.08786E-07  4.76889E-04  3.37509E-04  3.61933E-05 -3.02459E-05  4.32082E-07
 10.800  5.78566E-06  7.15253E-06  3.38802E-06  8.11886E-07  5.95822E-08  4.20764E-04  2.97974E-04  2.55403E-05 -2.89199E-05  1.23729E-06
 10.900  4.56951E-06  5.52750E-06  2.53672E-06  5.42103E-07  1.96281E-08  3.71362E-04  2.64049E-04  1.72725E-05 -2.76410E-05  1.78275E-06
 11.000  3.63697E-06  4.31578E-06  1.92493E-06  3.53200E-07 -1.23378E-08  3.27778E-04  2.34769E-04  1.09695E-05 -2.64014E-05  2.10488E-06
 11.100  2.91471E-06  3.40452E-06  1.48436E-06  2.23034E-07 -3.74965E-08  2.89251E-04  2.09337E-04  6.27316E-06 -2.51911E-05  2.23817E-06
 11.200  2.34916E-06  2.71162E-06  1.16527E-06  1.35208E-07 -5.68238E-08  2.55138E-04  1.87102E-04  2.87975E-06 -2.39992E-05  2.21534E-06
 11.300  1.90126E-06  2.17773E-06  9.31752E-07  7.76777E-08 -7.10710E-08  2.24895E-04  1.67537E-04  5.32222E-07 -2.28155E-05  2.06725E-06
 11.400  1.54259E-06  1.76018E-06  7.58106E-07  4.16263E-08 -8.08060E-08  1.98058E-04  1.50214E-04 -9.86218E-07 -2.16313E-05  1.82284E-06
 11.500  1.25242E-06  1.42842E-06  6.26090E-07  2.06013E-08 -8.64793E-08  1.74233E-04  1.34788E-04 -1.85766E-06 -2.04406E-05  1.50880E-06
 11.600  1.01561E-06  1.16072E-06  5.22912E-07  9.86854E-09 -8.84906E-08  1.53079E-04  1.20983E-04 -2.23425E-06 -1.92398E-05  1.14940E-06
 11.700  8.21039E-07  9.41661E-07  4.39723E-07  5.94449E-09 -8.72430E-08  1.34302E-04  1.08577E-04 -2.24229E-06 -1.80283E-05  7.66231E-07
 11.800  6.60470E-07  7.60369E-07  3.70524E-07  6.26446E-09 -8.31763E-08  1.17645E-04  9.73919E-05 -1.98579E-06 -1.68081E-05  3.78012E-07
 11.900  5.27739E-07  6.09170E-07  3.11359E-07  8.95022E-09 -7.67810E-08  1.02882E-04  8.72842E-05 -1.54948E-06 -1.55840E-05  5.09168E-10
 12.000  4.18155E-07  4.82631E-07  2.59711E-07  1.26468E-08 -6.85936E-08  8.98162E-05  7.81365E-05 -1.00159E-06 -1.43622E-05 -3.53508E-07
 12.100  3.28071E-07  3.76853E-07  2.14057E-07  1.64055E-08 -5.91783E-08  7.82684E-05  6.98523E-05 -3.96146E-07 -1.31508E-05 -6.74201E-07
 12.200  2.54573E-07  2.88955E-07  1.73534E-07  1.95964E-08 -4.91017E-08  6.80805E-05  6.23507E-05  2.24862E-07 -1.19586E-05 -9.54528E-07
 12.300  1.95260E-07  2.16702E-07  1.37683E-07  2.18401E-08 -3.89037E-08  5.91095E-05  5.55625E-05  8.29658E-07 -1.07948E-05 -1.19003E-06
 12.400  1.48086E-07  1.58249E-07  1.06269E-07  2.29518E-08 -2.90706E-08  5.12266E-05  4.94273E-05  1.39502E-06 -9.66845E-06 -1.37856E-06
 12.500  1.11262E-07  1.11971E-07  7.91510E-08  2.28937E-08 -2.00126E-08  4.43148E-05  4.38910E-05  1.90481E-06 -8.58810E-06 -1.52000E-06
 12.600  8.31843E-08  7.63541E-08  5.61926E-08  2.17348E-08 -1.20480E-08  3.82681E-05  3.89046E-05  2.34873E-06 -7.56136E-06 -1.61588E-06
 12.700  6.24020E-08  4.99470E-08  3.72137E-08  1.96166E-08 -5.39499E-09  3.29902E-05  3.44229E-05  2.72118E-06 -6.59466E-06 -1.66910E-06
 12.800  4.75940E-08  3.13399E-08  2.19667E-08  1.67250E-08 -1.71207E-10  2.83940E-05  3.04037E-05  3.02032E-06 -5.69313E-06 -1.68353E-06
 12.900  3.75649E-08  1.91718E-08  1.01342E-08  1.32674E-08  3.60044E-09  2.44001E-05  2.68073E-05  3.24722E-06 -4.86043E-06 -1.66377E-06
 13.000  3.12451E-08  1.21504E-08  1.34043E-09  9.45511E-09  5.98024E-09  2.09374E-05  2.35964E-05  3.40516E-06 -4.09879E-06 -1.61480E-06
 13.100  2.76945E-08  9.07737E-09 -4.82875E-09  5.49002E-09  7.09634E-09  1.79413E-05  2.07361E-05  3.49902E-06 -3.40902E-06 -1.54178E-06
 13.200  2.61058E-08  8.87350E-09 -8.80304E-09  1.55569E-09  7.12731E-09  1.53540E-05  1.81933E-05  3.53479E-06 -2.79066E-06 -1.44983E-06
 13.300  2.58043E-08  1.05985E-08 -1.10052E-08 -2.18877E-09  6.28386E-09  1.31240E-05  1.59373E-05  3.51912E-06 -2.24206E-06 -1.34382E-06
 13.400  2.62457E-08  1.34632E-08 -1.18321E-08 -5.61221E-09  4.79147E-09  1.12050E-05  1.39396E-05  3.45901E-06 -1.76057E-06 -1.22831E-06
 13.500  2.70080E-08  1.68336E-08 -1.16397E-08 -8.61288E-09  2.87458E-09  9.55642E-06  1.21737E-05  3.36151E-06 -1.34274E-06 -1.10739E-06
 13.600  2.77820E-08  2.02264E-08 -1.07347E-08 -1.11185E-08  7.43501E-10  8.14203E-06  1.06154E-05  3.23348E-06 -9.84490E-07 -9.84693E-07
 13.700  2.83569E-08  2.32978E-08 -9.36998E-09 -1.30851E-08 -1.41576E-09  6.93014E-06  9.24226E-06  3.08144E-06 -6.81274E-07 -8.63285E-07
 13.800  2.86057E-08  2.58269E-08 -7.74562E-09 -1.44953E-08 -3.44845E-09  5.89295E-06  8.03422E-06  2.91148E-06 -4.28273E-07 -7.45719E-07
 13.900  2.84689E-08  2.76960E-08 -6.01250E-09 -1.53551E-08 -5.23488E-09  5.00619E-06  6.97291E-06  2.72909E-06 -2.20535E-07 -6.34026E-07
 14.000  2.79388E-08  2.88694E-08 -4.27876E-09 -1.56915E-08 -6.69150E-09  4.24874E-06  6.04184E-06  2.53918E-06 -5.31074E-08 -5.29743E-07
 14.100  2.70445E-08  2.93723E-08 -2.61719E-09 -1.55485E-08 -7.76941E-09  3.60230E-06  5.22614E-06  2.34603E-06  7.88497E-08 -4.33955E-07
 14.200  2.58396E-08  2.92714E-08 -1.07304E-09 -1.49832E-08 -8.45118E-09  3.05104E-06  4.51253E-06  2.15329E-06  1.79978E-07 -3.47345E-07
 14.300  2.43901E-08  2.86585E-08  3.28807E-10 -1.40624E-08 -8.74613E-09  2.58130E-06  3.88914E-06  1.96400E-06  2.54651E-07 -2.70239E-07
 14.400  2.27667E-08  2.76361E-08  1.57745E-09 -1.28584E-08 -8.68496E-09  2.18132E-06  3.34536E-06  1.78062E-06  3.06928E-07 -2.02664E-07
 14.500  2.10377E-08  2.63071E-08  2.67090E-09 -1.14453E-08 -8.31401E-09  1.84101E-06  2.87176E-06  1.60507E-06  3.40523E-07 -1.44397E-07
 14.600  1.92646E-08  2.47673E-08  3.61231E-09 -9.89600E-09 -7.68963E-09  1.55169E-06  2.45998E-06  1.43880E-06  3.58786E-07 -9.50193E-08
 14.700  1.74998E-08  2.31008E-08  4.40730E-09 -8.27897E-09 -6.87307E-09  1.30593E-06  2.10256E-06  1.28283E-06  3.64702E-07 -5.39602E-08
 14.800  1.57848E-08  2.13772E-08  5.06245E-09 -6.65616E-09 -5.92595E-09  1.09738E-06  1.79289E-06  1.13779E-06  3.60898E-07 -2.05425E-08
 14.900  1.41509E-08  1.96518E-08  5.58452E-09 -5.08116E-09 -4.90670E-09  9.20579E-07  1.52513E-06  1.00401E-06  3.49653E-07  5.97938E-09
 15.000  1.26194E-08  1.79655E-08  5.98020E-09 -3.59811E-09 -3.86779E-09  7.70869E-07  1.29408E-06  8.81537E-07  3.32921E-07  2.63857E-08
 15.100  1.12030E-08  1.63470E-08  6.25634E-09 -2.24117E-09 -2.85393E-09  6.44258E-07  1.09515E-06  7.70210E-07  3.12355E-07  4.14628E-08
 15.200  9.90751E-09  1.48145E-08  6.42012E-09 -1.03457E-09 -1.90105E-09  5.37333E-07  9.24270E-07  6.69691E-07  2.89327E-07  5.19795E-08
 15.300  8.73311E-09  1.33783E-08  6.47947E-09  6.91330E-12 -1.03604E-09  4.47173E-07  7.77841E-07  5.79511E-07  2.64964E-07  5.86689E-08
 15.400  7.67603E-09  1.20423E-08  6.44319E-09  8.77047E-10 -2.77006E-10  3.71279E-07  6.52690E-07  4.99102E-07  2.40168E-07  6.22142E-08
 15.500  6.72980E-09  1.08064E-08  6.32107E-09  1.57703E-09  3.65962E-10  3.07511E-07  5.46013E-07  4.27832E-07  2.15647E-07  6.32389E-08
 15.600  5.88634E-09  9.66743E-09  6.12385E-09  2.11415E-09  8.89735E-10  2.54040E-07  4.55341E-07  3.65025E-07  1.91939E-07  6.23010E-08
 15.700  5.13685E-09  8.62108E-09  5.86299E-09  2.50045E-09  1.29694E-09  2.09301E-07  3.78500E-07  3.09987E-07  1.69436E-07  5.98899E-08
 15.800  4.47239E-09  7.66208E-09  5.55043E-09  2.75133E-09  1.59466E-09  1.71954E-07  3.13581E-07  2.62023E-07  1.48409E-07  5.64268E-08
 15.900  3.88434E-09  6.78511E-09  5.19817E-09  2.88427E-09  1.79320E-09  1.40856E-07  2.58910E-07  2.20451E-07  1.29028E-07  5.22662E-08
 16.000  3.36467E-09  5.98503E-09  4.81800E-09  2.91775E-09  1.90489E-09  1.15030E-07  2.13022E-07  1.84612E-07  1.11379E-07  4.77005E-08
 16.100  2.90608E-09  5.25706E-09  4.42104E-09  2.87023E-09  1.94312E-09  9.36417E-08  1.74638E-07  1.53879E-07  9.54830E-08  4.29642E-08
 16.200  2.50198E-09  4.59676E-09  4.01754E-09  2.75940E-09  1.92144E-09  7.59810E-08  1.42645E-07  1.27664E-07  8.13098E-08  3.82405E-08
 16.300  2.14655E-09  4.00008E-09  3.61655E-09  2.60164E-09  1.85292E-09  6.14431E-08  1.16076E-07  1.05419E-07  6.87909E-08  3.36670E-08
 16.400  1.83461E-09  3.46318E-09  3.22582E-09  2.41156E-09  1.74968E-09  4.95145E-08  9.40946E-08  8.66424E-08  5.78304E-08  2.93423E-08
 16.500  1.56157E-09  2.98240E-09  2.85168E-09  2.20181E-09  1.62250E-09  3.97596E-08  7.59789E-08  7.08750E-08  4.83144E-08  2.53323E-08
 16.600  1.32334E-09  2.55417E-09  2.49905E-09  1.98301E-09  1.48072E-09  3.18101E-08  6.11080E-08  5.77036E-08  4.01182E-08  2.16760E-08
 16.700  1.11625E-09  2.17495E-09  2.17148E-09  1.76370E-09  1.33207E-09  2.53551E-08  4.89500E-08  4.67578E-08  3.31128E-08  1.83908E-08
 16.800  9.36976E-10  1.84120E-09  1.87124E-09  1.55055E-09  1.18281E-09  2.01330E-08  3.90509E-08  3.77088E-08  2.71693E-08  1.54777E-08
 16.900  7.82503E-10  1.54937E-09  1.59948E-09  1.34845E-09  1.03772E-09  1.59246E-08  3.10249E-08  3.02665E-08  2.21629E-08  1.29251E-08
 17.000  6.50066E-10  1.29589E-09  1.35638E-09  1.16078E-09  9.00306E-10  1.25461E-08  2.45453E-08  2.41774E-08  1.79751E-08  1.07130E-08
 17.100  5.37129E-10  1.07725E-09  1.14133E-09  9.89619E-10  7.72951E-10  9.84491E-09  1.93369E-08  1.92213E-08  1.44958E-08  8.81540E-09
 17.200  4.41364E-10  8.89976E-10  9.53112E-10  8.35962E-10  6.57084E-10  7.69392E-09  1.51686E-08  1.52081E-08  1.16243E-08  7.20315E-09
 17.300  3.60637E-10  7.30705E-10  7.90028E-10  6.99972E-10  5.53373E-10  5.98819E-09  1.18475E-08  1.19753E-08  9.26978E-09  5.84569E-09
 17.400  2.93001E-10  5.96218E-10  6.50089E-10  5.81170E-10  4.61883E-10  4.64126E-09  9.21341E-09  9.38468E-09  7.35149E-09  4.71256E-09
 17.500  2.36682E-10  4.83468E-10  5.31125E-10  4.78617E-10  3.82232E-10  3.58221E-09  7.13363E-09  7.31927E-09  5.79837E-09  3.77445E-09
 17.600  1.90085E-10  3.89616E-10  4.30897E-10  3.91071E-10  3.13725E-10  2.75311E-09  5.49904E-09  5.68112E-09  4.54865E-09  3.00391E-09
 17.700  1.51776E-10  3.12050E-10  3.47182E-10  3.17113E-10  2.55461E-10  2.10687E-09  4.22025E-09  4.38853E-09  3.54917E-09  2.37581E-09
 17.800  1.20484E-10  2.48396E-10  2.77844E-10  2.55246E-10  2.06429E-10  1.60540E-09  3.22446E-09  3.37384E-09  2.75458E-09  1.86759E-09
 17.900  9.50877E-11  1.96522E-10  2.20881E-10  2.03975E-10  1.65572E-10  1.21801E-09  2.45265E-09  2.58138E-09  2.12661E-09  1.45929E-09
 18.000  7.46098E-11  1.54543E-10  1.74452E-10  1.61864E-10  1.31846E-10  9.20079E-10  1.85724E-09  1.96564E-09  1.63322E-09  1.13353E-09
 18.100  5.82037E-11  1.20802E-10  1.36899E-10  1.27570E-10  1.04255E-10  6.91993E-10  1.40007E-09  1.48965E-09  1.24778E-09  8.75389E-10
 18.200  4.51440E-11  9.38660E-11  1.06752E-10  9.98718E-11  8.18750E-11  5.18170E-10  1.05069E-09  1.12356E-09  9.48398E-10  6.72170E-10
 18.300  3.48143E-11  7.25065E-11  8.27263E-11  7.76771E-11  6.38704E-11  3.86307E-10  7.84956E-10  8.43426E-10  7.17158E-10  5.13220E-10
 18.400  2.66954E-11  5.56805E-11  6.37157E-11  6.00284E-11  4.95002E-11  2.86732E-10  5.83788E-10  6.30142E-10  5.39544E-10  3.89679E-10
 18.500  2.03542E-11  4.25118E-11  4.87778E-11  4.60985E-11  3.81182E-11  2.11885E-10  4.32220E-10  4.68572E-10  4.03871E-10  2.94253E-10
 18.600  1.54322E-11  3.22717E-11  3.71199E-11  3.51831E-11  2.91696E-11  1.55884E-10  3.18562E-10  3.46791E-10  3.00800E-10  2.20990E-10
 18.700  1.16353E-11  2.43592E-11  2.80826E-11  2.66897E-11  2.21847E-11  1.14177E-10  2.33735E-10  2.55457E-10  2.22919E-10  1.65079E-10
 18.800  8.72408E-12  1.82835E-11  2.11225E-11  2.01261E-11  1.67706E-11  8.32591E-11  1.70724E-10  1.87297E-10  1.64385E-10  1.22660E-10
 18.900  6.50540E-12  1.36468E-11  1.57967E-11  1.50877E-11  1.26026E-11  6.04449E-11  1.24139E-10  1.36684E-10  1.20626E-10  9.06633E-11
 19.000  4.82460E-12  1.01299E-11  1.17471E-11  1.12454E-11  9.41516E-12  4.36881E-11  8.98609E-11  9.92845E-11  8.80837E-11  6.66655E-11
 19.100  3.55878E-12  7.47832E-12  8.68694E-12  8.33385E-12  6.99347E-12  3.14372E-11  6.47560E-11  7.17846E-11  6.40087E-11  4.87678E-11
 19.200  2.61104E-12  5.49098E-12  6.38858E-12  6.14149E-12  5.16524E-12  2.25218E-11  4.64560E-11  5.16622E-11  4.62898E-11  3.54936E-11
 19.300  1.90553E-12  4.01019E-12  4.67273E-12  4.50080E-12  3.79364E-12  1.60636E-11  3.31788E-11  3.70097E-11  3.33155E-11  2.57023E-11
 19.400  1.38335E-12  2.91322E-12  3.39932E-12  3.28040E-12  2.77091E-12  1.14069E-11  2.35906E-11  2.63916E-11  2.38635E-11  1.85191E-11
 19.500  9.99025E-13  2.10520E-12  2.45977E-12  2.37800E-12  2.01289E-12  8.06448E-12  1.66987E-11  1.87340E-11  1.70123E-11  1.32773E-11
 19.600  7.17748E-13  1.51338E-12  1.77053E-12  1.71464E-12  1.45438E-12  5.67645E-12  1.17678E-11  1.32378E-11  1.20711E-11  9.47243E-12
 19.700  5.13021E-13  1.08233E-12  1.26777E-12  1.22981E-12  1.04526E-12  3.97806E-12  8.25624E-12  9.31183E-12  8.52494E-12  6.72499E-12
 19.800  3.64826E-13  7.70091E-13  9.03083E-13  8.77464E-13  7.47282E-13  2.77565E-12  5.76700E-12  6.52066E-12  5.99256E-12  4.75136E-12
 19.900  2.58132E-13  5.45156E-13  6.40013E-13  6.22836E-13  5.31477E-13  1.92823E-12  4.01054E-12  4.54563E-12  4.19297E-12  3.34084E-12
  67 217 200   0.100
  0.000  4.64515E-02 -2.56011E-16 -2.91434E-16 -6.37973E-16  5.72196E-17  9.99848E-02 -5.12023E-16 -8.74301E-16 -8.25612E-16 -2.05991E-15
  0.100  4.64740E-02 -2.67748E-05 -1.96203E-08 -6.26048E-12 -1.76665E-15  1.00002E-01 -3.09341E-05  6.10872E-10  7.66380E-12 -4.52035E-15
  0.200  4.65412E-02 -1.06035E-04 -3.11227E-07 -3.96938E-10 -3.43997E-13  1.00052E-01 -1.21225E-04  1.06378E-08  4.88416E-10 -1.75421E-13
  0.300  4.66517E-02 -2.34623E-04 -1.55306E-06 -4.45235E-09 -8.65047E-12  1.00131E-01 -2.63525E-04  6.10070E-08  5.51712E-09 -3.50872E-12
  0.400  4.68037E-02 -4.07391E-04 -4.81033E-06 -2.44828E-08 -8.46106E-11  1.00234E-01 -4.46201E-04  2.23574E-07  3.06372E-08 -3.20297E-11
  0.500  4.69943E-02 -6.17372E-04 -1.14424E-05 -9.08402E-08 -4.91023E-10  1.00355E-01 -6.54200E-04  6.38720E-07  1.15105E-07 -1.69215E-10
  0.600  4.72201E-02 -8.56008E-04 -2.29827E-05 -2.62199E-07 -2.04346E-09  1.00484E-01 -8.70179E-04  1.54839E-06  3.37292E-07 -6.18739E-10
  0.700  4.74770E-02 -1.11345E-03 -4.09992E-05 -6.35156E-07 -6.74793E-09  1.00614E-01 -1.07581E-03  3.32937E-06  8.31554E-07 -1.70783E-09
  0.800  4.77605E-02 -1.37886E-03 -6.69475E-05 -1.35111E-06 -1.87823E-08  1.00735E-01 -1.25317E-03  6.52073E-06  1.80451E-06 -3.66967E-09
  0.900  4.80654E-02 -1.64086E-03 -1.02025E-04 -2.59863E-06 -4.58163E-08  1.00839E-01 -1.38611E-03  1.18388E-05  3.54838E-06 -5.93454E-09
  1.000  4.83863E-02 -1.88783E-03 -1.47035E-04 -4.60993E-06 -1.00586E-07  1.00919E-01 -1.46148E-03  2.01736E-05  6.44890E-06 -5.57305E-09
  1.100  4.87177E-02 -2.10843E-03 -2.02282E-04 -7.65077E-06 -2.02554E-07  1.00969E-01 -1.47019E-03  3.25611E-05  1.09853E-05  5.49308E-09
  1.200  4.90537E-02 -2.29195E-03 -2.67482E-04 -1.20039E-05 -3.79413E-07  1.00986E-01 -1.40797E-03  5.01277E-05  1.77201E-05  4.48304E-08
  1.300  4.93886E-02 -2.42877E-03 -3.41721E-04 -1.79470E-05 -6.68143E-07  1.00969E-01 -1.27570E-03  7.40061E-05  2.72773E-05  1.45518E-07
  1.400  4.97168E-02 -2.51069E-03 -4.23449E-04 -2.57267E-05 -1.11533E-06  1.00919E-01 -1.07950E-03  1.05224E-04  4.03075E-05  3.63681E-07
  1.500  5.00329E-02 -2.53132E-03 -5.10507E-04 -3.55306E-05 -1.77650E-06  1.00840E-01 -8.30314E-04  1.44573E-04  5.74405E-05  7.86959E-07
  1.600  5.03319E-02 -2.48634E-03 -6.00202E-04 -4.74611E-05 -2.71422E-06  1.00738E-01 -5.43169E-04  1.92463E-04  7.92262E-05  1.54285E-06
  1.700  5.06094E-02 -2.37370E-03 -6.89409E-04 -6.15112E-05 -3.99510E-06  1.00620E-01 -2.36149E-04  2.48777E-04  1.06067E-04  2.80546E-06
  1.800  5.08614E-02 -2.19378E-03 -7.74699E-04 -7.75476E-05 -5.68555E-06  1.00496E-01  7.09160E-05  3.12749E-04  1.38147E-04  4.79879E-06
  1.900  5.10849E-02 -1.94946E-03 -8.52494E-04 -9.53004E-05 -7.84680E-06  1.00375E-01  3.57889E-04  3.82865E-04  1.75358E-04  7.79468E-06
  2.000  5.12775E-02 -1.64601E-03 -9.19228E-04 -1.14362E-04 -1.05294E-05  1.00266E-01  6.05808E-04  4.56817E-04  2.17237E-04  1.21035E-05
  2.100  5.14377E-02 -1.29104E-03 -9.71515E-04 -1.34195E-04 -1.37677E-05  1.00179E-01  7.98311E-04  5.31525E-04  2.62917E-04  1.80560E-05
  2.200  5.15651E-02 -8.94176E-04 -1.00631E-03 -1.54148E-04 -1.75754E-05  1.00122E-01  9.22879E-04  6.03224E-04  3.11100E-04  2.59764E-05
  2.300  5.16600E-02 -4.66846E-04 -1.02106E-03 -1.73481E-04 -2.19414E-05  1.00099E-01  9.71823E-04  6.67636E-04  3.60057E-04  3.61465E-05
  2.400  5.17240E-02 -2.18165E-05 -1.01384E-03 -1.91392E-04 -2.68284E-05  1.00114E-01  9.42913E-04  7.20217E-04  4.07663E-04  4.87628E-05
  2.500  5.17594E-02  4.27232E-04 -9.83471E-04 -2.07052E-04 -3.21727E-05  1.00167E-01  8.39628E-04  7.56460E-04  4.51474E-04  6.38901E-05
  2.600  5.17694E-02  8.66219E-04 -9.29577E-04 -2.19634E-04 -3.78859E-05  1.00255E-01  6.70974E-04  7.72254E-04  4.88834E-04  8.14152E-05
  2.700  5.17580E-02  1.28120E-03 -8.52676E-04 -2.28353E-04 -4.38598E-05  1.00374E-01  4.50903E-04  7.64255E-04  5.17025E-04  1.01008E-04
  2.800  5.17301E-02  1.65891E-03 -7.54184E-04 -2.32485E-04 -4.99714E-05  1.00517E-01  1.97358E-04  7.30239E-04  5.33446E-04  1.22090E-04
  2.900  5.16907E-02  1.98732E-03 -6.36414E-04 -2.31404E-04 -5.60901E-05  1.00673E-01 -6.89723E-05  6.69413E-04  5.35803E-04  1.43828E-04
  3.000  5.16453E-02  2.25616E-03 -5.02540E-04 -2.24592E-04 -6.20851E-05  1.00832E-01 -3.26111E-04  5.82639E-04  5.22319E-04  1.65141E-04
  3.100  5.15993E-02  2.45733E-03 -3.56528E-04 -2.11668E-04 -6.78320E-05  1.00982E-01 -5.52340E-04  4.72543E-04  4.91927E-04  1.84735E-04
  3.200  5.15578E-02  2.58539E-03 -2.03036E-04 -1.92392E-04 -7.32193E-05  1.01113E-01 -7.27721E-04  3.43483E-04  4.44435E-04  2.01166E-04
  3.300  5.15255E-02  2.63779E-03 -4.72904E-05 -1.66685E-04 -7.81525E-05  1.01212E-01 -8.35479E-04  2.01375E-04  3.80651E-04  2.12927E-04
  3.400  5.15062E-02  2.61513E-03  1.05075E-04 -1.34635E-04 -8.25562E-05  1.01272E-01 -8.63127E-04  5.33630E-05  3.02451E-04  2.18549E-04
  3.500  5.15023E-02  2.52126E-03  2.48193E-04 -9.65096E-05 -8.63748E-05  1.01282E-01 -8.03255E-04 -9.26386E-05  2.12769E-04  2.16720E-04
  3.600  5.15152E-02  2.36324E-03  3.76171E-04 -5.27663E-05 -8.95696E-05  1.01238E-01 -6.53921E-04 -2.28512E-04  1.15512E-04  2.06405E-04
  3.700  5.15443E-02  2.15121E-03  4.83306E-04 -4.06429E-06 -9.21163E-05  1.01135E-01 -4.18604E-04 -3.46558E-04  1.53856E-05  1.86961E-04
  3.800  5.15873E-02  1.89810E-03  5.64320E-04  4.87272E-05 -9.40000E-05  1.00970E-01 -1.05734E-04 -4.40132E-04 -8.23458E-05  1.58229E-04
  3.900  5.16398E-02  1.61928E-03  6.14595E-04  1.04522E-04 -9.52110E-05  1.00742E-01  2.72167E-04 -5.04234E-04 -1.72177E-04  1.20597E-04
  4.000  5.16955E-02  1.33199E-03  6.30409E-04  1.62015E-04 -9.57417E-05  1.00452E-01  6.99663E-04 -5.35989E-04 -2.48721E-04  7.50304E-05
  4.100  5.17459E-02  1.05480E-03  6.09147E-04  2.19693E-04 -9.55853E-05  1.00099E-01  1.15980E-03 -5.34983E-04 -3.07089E-04  2.30536E-05
  4.200  5.17810E-02  8.06878E-04  5.49499E-04  2.75849E-04 -9.47366E-05  9.96843E-02  1.63561E-03 -5.03403E-04 -3.43268E-04 -3.33144E-05
  4.300  5.17888E-02  6.07290E-04  4.51611E-04  3.28619E-04 -9.31971E-05  9.92069E-02  2.11161E-03 -4.45955E-04 -3.54461E-04 -9.16645E-05
  4.400  5.17562E-02  4.74212E-04  3.17191E-04  3.76030E-04 -9.09817E-05  9.86652E-02  2.57515E-03 -3.69576E-04 -3.39363E-04 -1.49343E-04
  4.500  5.16691E-02  4.24182E-04  1.49549E-04  4.16067E-04 -8.81282E-05  9.80560E-02  3.01751E-03 -2.82918E-04 -2.98340E-04 -2.03621E-04
  4.600  5.15129E-02  4.71369E-04 -4.64303E-05  4.46750E-04 -8.47086E-05  9.73741E-02  3.43466E-03 -1.95686E-04 -2.33502E-04 -2.51884E-04
  4.700  5.12730E-02  6.26918E-04 -2.64385E-04  4.66233E-04 -8.08398E-05  9.66124E-02  3.82765E-03 -1.17834E-04 -1.48649E-04 -2.91811E-04
  4.800  5.09354E-02  8.98395E-04 -4.96660E-04  4.72905E-04 -7.66931E-05  9.57621E-02  4.20253E-03 -5.87220E-05 -4.90931E-05 -3.21549E-04
  4.900  5.04873E-02  1.28935E-03 -7.34565E-04  4.65495E-04 -7.24996E-05  9.48129E-02  4.56985E-03 -2.62854E-05  5.86402E-05 -3.39848E-04
  5.000  4.99174E-02  1.79906E-03 -9.68692E-04  4.43169E-04 -6.85513E-05  9.37532E-02  4.94379E-03 -2.62920E-05  1.67205E-04 -3.46158E-04
  5.100  4.92164E-02  2.42238E-03 -1.18930E-03  4.05623E-04 -6.51956E-05  9.25713E-02  5.34095E-03 -6.17597E-05  2.68904E-04 -3.40672E-04
  5.200  4.83777E-02  3.14987E-03 -1.38674E-03  3.53145E-04 -6.28232E-05  9.12554E-02  5.77893E-03 -1.32581E-04  3.56193E-04 -3.24317E-04
  5.300  4.73971E-02  3.96800E-03 -1.55188E-03  2.86655E-04 -6.18486E-05  8.97946E-02  6.27479E-03 -2.35398E-04  4.22188E-04 -2.98688E-04
  5.400  4.62736E-02  4.85959E-03 -1.67656E-03  2.07707E-04 -6.26853E-05  8.81797E-02  6.84350E-03 -3.63732E-04  4.61127E-04 -2.65931E-04
  5.500  4.50093E-02  5.80440E-03 -1.75395E-03  1.18462E-04 -6.57157E-05  8.64033E-02  7.49651E-03 -5.08378E-04  4.68769E-04 -2.28590E-04
  5.600  4.36091E-02  6.77986E-03 -1.77896E-03  2.16096E-05 -7.12598E-05  8.44608E-02  8.24061E-03 -6.58012E-04  4.42676E-04 -1.89428E-04
  5.700  4.20810E-02  7.76184E-03 -1.74849E-03 -7.97311E-05 -7.95430E-05  8.23505E-02  9.07694E-03 -7.99987E-04  3.82377E-04 -1.51232E-04
  5.800  4.04356E-02  8.72557E-03 -1.66160E-03 -1.82154E-04 -9.06688E-05  8.00740E-02  1.00006E-02 -9.21231E-04  2.89396E-04 -1.16622E-04
  5.900  3.86858E-02  9.64658E-03 -1.51958E-03 -2.82123E-04 -1.04596E-04  7.76362E-02  1.10005E-02 -1.00919E-03  1.67135E-04 -8.78840E-05
  6.000  3.68466E-02  1.05015E-02 -1.32596E-03 -3.76148E-04 -1.21126E-04  7.50450E-02  1.20595E-02 -1.05275E-03  2.06391E-05 -6.68272E-05
  6.100  3.49345E-02  1.12690E-02 -1.08630E-03 -4.60959E-04 -1.39900E-04  7.23116E-02  1.31556E-02 -1.04301E-03 -1.43746E-04 -5.46850E-05
  6.200  3.29669E-02  1.19303E-02 -8.07978E-04 -5.33673E-04 -1.60407E-04  6.94500E-02  1.42623E-02 -9.73975E-04 -3.18794E-04 -5.20614E-05
  6.300  3.09621E-02  1.24703E-02 -4.99816E-04 -5.91934E-04 -1.82005E-04  6.64765E-02  1.53504E-02 -8.42918E-04 -4.96863E-04 -5.89254E-05
  6.400  2.89384E-02  1.28773E-02 -1.71692E-04 -6.34034E-04 -2.03949E-04  6.34094E-02  1.63894E-02 -6.50626E-04 -6.70362E-04 -7.46492E-05
  6.500  2.69137E-02  1.31440E-02  1.65939E-04 -6.58981E-04 -2.25430E-04  6.02685E-02  1.73488E-02 -4.01320E-04 -8.32200E-04 -9.80871E-05
  6.600  2.49055E-02  1.32671E-02  5.02512E-04 -6.66539E-04 -2.45623E-04  5.70748E-02  1.81996E-02 -1.02375E-04 -9.76168E-04 -1.27683E-04
  6.700  2.29300E-02  1.32475E-02  8.27828E-04 -6.57209E-04 -2.63725E-04  5.38498E-02  1.89161E-02  2.36165E-04 -1.09725E-03 -1.61600E-04
  6.800  2.10023E-02  1.30900E-02  1.13248E-03 -6.32181E-04 -2.79010E-04  5.06151E-02  1.94766E-02  6.02239E-04 -1.19181E-03 -1.97857E-04
  6.900  1.91359E-02  1.28030E-02  1.40825E-03 -5.93242E-04 -2.90862E-04  4.73921E-02  1.98646E-02  9.82509E-04 -1.25775E-03 -2.34462E-04
  7.000  1.73425E-02  1.23981E-02  1.64837E-03 -5.42653E-04 -2.98811E-04  4.42015E-02  2.00693E-02  1.36316E-03 -1.29444E-03 -2.69536E-04
  7.100  1.56320E-02  1.18891E-02  1.84777E-03 -4.83008E-04 -3.02557E-04  4.10631E-02  2.00860E-02  1.73069E-03 -1.30266E-03 -3.01418E-04
  7.200  1.40127E-02  1.12919E-02  2.00315E-03 -4.17086E-04 -3.01980E-04  3.79954E-02  1.99160E-02  2.07259E-03 -1.28443E-03 -3.28739E-04
  7.300  1.24906E-02  1.06235E-02  2.11305E-03 -3.47694E-04 -2.97146E-04  3.50154E-02  1.95663E-02  2.37800E-03 -1.24277E-03 -3.50478E-04
  7.400  1.10703E-02  9.90142E-03  2.17772E-03 -2.77531E-04 -2.88289E-04  3.21383E-02  1.90491E-02  2.63814E-03 -1.18141E-03 -3.65977E-04
  7.500  9.75435E-03  9.14324E-03  2.19900E-03 -2.09060E-04 -2.75798E-04  2.93777E-02  1.83809E-02  2.84661E-03 -1.10454E-03 -3.74946E-04
  7.600  8.54380E-03  8.36575E-03  2.18008E-03 -1.44411E-04 -2.60182E-04  2.67448E-02  1.75816E-02  2.99957E-03 -1.01651E-03 -3.77427E-04
  7.700  7.43814E-03  7.58467E-03  2.12526E-03 -8.53139E-05 -2.42044E-04  2.42490E-02  1.66735E-02  3.09567E-03 -9.21570E-04 -3.73759E-04
  7.800  6.43553E-03  6.81419E-03  2.03965E-03 -3.30534E-05 -2.22038E-04  2.18974E-02  1.56805E-02  3.13590E-03 -8.23682E-04 -3.64514E-04
  7.900  5.53294E-03  6.06665E-03  1.92884E-03  1.15375E-05 -2.00837E-04  1.96950E-02  1.46266E-02  3.12333E-03 -7.26341E-04 -3.50442E-04
  8.000  4.72633E-03  5.35242E-03  1.79864E-03  4.80625E-05 -1.79096E-04  1.76448E-02  1.35356E-02  3.06274E-03 -6.32464E-04 -3.32401E-04
  8.100  4.01080E-03  4.67974E-03  1.65482E-03  7.65224E-05 -1.57424E-04  1.57476E-02  1.24296E-02  2.96019E-03 -5.44336E-04 -3.11301E-04
  8.200  3.38084E-03  4.05476E-03  1.50284E-03  9.72586E-05 -1.36361E-04  1.40024E-02  1.13290E-02  2.82260E-03 -4.63591E-04 -2.88046E-04
  8.300  2.83042E-03  3.48162E-03  1.34770E-03  1.10885E-04 -1.16358E-04  1.24065E-02  1.02517E-02  2.65732E-03 -3.91248E-04 -2.63496E-04
  8.400  2.35321E-03  2.96256E-03  1.19378E-03  1.18217E-04 -9.77712E-05  1.09556E-02  9.21296E-03  2.47177E-03 -3.27772E-04 -2.38427E-04
  8.500  1.94273E-03  2.49818E-03  1.04474E-03  1.20194E-04 -8.08529E-05  9.64404E-03  8.22493E-03  2.27304E-03 -2.73156E-04 -2.13513E-04
  8.600  1.59244E-03  2.08762E-03  9.03530E-04  1.17813E-04 -6.57598E-05  8.46494E-03  7.29697E-03  2.06769E-03 -2.27019E-04 -1.89309E-04
  8.700  1.29595E-03  1.72883E-03  7.72322E-04  1.12073E-04 -5.25575E-05  7.41065E-03  6.43561E-03  1.86152E-03 -1.88702E-04 -1.66250E-04
  8.800  1.04705E-03  1.41885E-03  6.52594E-04  1.03915E-04 -4.12335E-05  6.47284E-03  5.64476E-03  1.65943E-03 -1.57373E-04 -1.44653E-04
  8.900  8.39834E-04  1.15404E-03  5.45172E-04  9.41949E-05 -3.17103E-05  5.64273E-03  4.92606E-03  1.46540E-03 -1.32101E-04 -1.24727E-04
  9.000  6.68782E-04  9.30321E-04  4.50327E-04  8.36522E-05 -2.38611E-05  4.91136E-03  4.27915E-03  1.28245E-03 -1.11937E-04 -1.06590E-04
  9.100  5.28777E-04  7.43382E-04  3.67859E-04  7.28983E-05 -1.75245E-05  4.26972E-03  3.70203E-03  1.11272E-03 -9.59697E-05 -9.02754E-05
  9.200  4.15163E-04  5.88867E-04  2.97203E-04  6.24126E-05 -1.25189E-05  3.70899E-03  3.19144E-03  9.57538E-04 -8.33620E-05 -7.57579E-05
  9.300  3.23756E-04  4.62517E-04  2.37528E-04  5.25478E-05 -8.65508E-06  3.22067E-03  2.74319E-03  8.17515E-04 -7.33806E-05 -6.29629E-05
  9.400  2.50843E-04  3.60289E-04  1.87821E-04  4.35410E-05 -5.74615E-06  2.79665E-03  2.35245E-03  6.92692E-04 -6.54071E-05 -5.17834E-05
  9.500  1.93175E-04  2.78440E-04  1.46975E-04  3.55287E-05 -3.61595E-06  2.42937E-03  2.01403E-03  5.82645E-04 -5.89394E-05 -4.20921E-05
  9.600  1.47943E-04  2.13575E-04  1.13851E-04  2.85651E-05 -2.10453E-06  2.11182E-03  1.72265E-03  4.86606E-04 -5.35853E-05 -3.37515E-05
  9.700  1.12754E-04  1.62684E-04  8.73333E-05  2.26402E-05 -1.07160E-06  1.83764E-03  1.47305E-03  4.03576E-04 -4.90502E-05 -2.66226E-05
  9.800  8.55892E-05  1.23142E-04  6.63687E-05  1.76973E-05 -3.98071E-07  1.60105E-03  1.26020E-03  3.32411E-04 -4.51219E-05 -2.05702E-05
  9.900  6.47735E-05  9.27045E-05  4.99957E-05  1.36489E-05  1.39758E-08  1.39692E-03  1.07936E-03  2.71905E-04 -4.16540E-05 -1.54675E-05
 10.000  4.89301E-05  6.94807E-05  3.73585E-05  1.03900E-05  2.42540E-07  1.22072E-03  9.26167E-04  2.20849E-04 -3.85499E-05 -1.11983E-05
 10.100  3.69434E-05  5.19067E-05  2.77147E-05  7.80917E-06  3.47729E-07  1.06845E-03  7.96679E-04  1.78075E-04 -3.57490E-05 -7.65816E-06
 10.200  2.79202E-05  3.87074E-05  2.04341E-05  5.79668E-06  3.74259E-07  9.36679E-04  6.87364E-04  1.42485E-04 -3.32136E-05 -4.75431E-06
 10.300  2.11540E-05  2.88586E-05  1.49933E-05  4.24998E-06  3.54137E-07  8.22416E-04  5.95115E-04  1.13076E-04 -3.09200E-05 -2.40516E-06
 10.400  1.60930E-05  2.15500E-05  1.09656E-05  3.07734E-06  3.09280E-07  7.23110E-04  5.17224E-04  8.89442E-05 -2.88512E-05 -5.39125E-07
 10.500  1.23108E-05  1.61487E-05  8.00942E-06  2.19955E-06  2.53933E-07  6.36588E-04  4.51356E-04  6.92866E-05 -2.69919E-05  9.06686E-07
 10.600  9.48184E-06  1.21674E-05  5.85629E-06  1.55025E-06  1.96759E-07  5.61003E-04  3.95517E-04  5.34010E-05 -2.53256E-05  1.98786E-06
 10.700  7.35982E-06  9.23505E-06  4.29826E-06  1.07535E-06  1.42569E-07  4.94796E-04  3.48018E-04  4.06777E-05 -2.38337E-05  2.75398E-06
 10.800  5.76045E-06  7.07254E-06  3.17675E-06  7.31794E-07  9.36777E-08  4.36650E-04  3.07439E-04  3.05910E-05 -2.24948E-05  3.24975E-06
 10.900  4.54684E-06  5.47208E-06  2.37242E-06  4.86049E-07  5.09069E-08  3.85459E-04  2.72595E-04  2.26904E-05 -2.12856E-05  3.51596E-06
 11.000  3.61806E-06  4.28036E-06  1.79653E-06  3.12470E-07  1.42891E-08  3.40288E-04  2.42502E-04  1.65915E-05 -2.01820E-05  3.59010E-06
 11.100  2.90015E-06  3.38521E-06  1.38380E-06  1.91747E-07 -1.64846E-08  3.00352E-04  2.16353E-04  1.19672E-05 -1.91600E-05  3.50687E-06
 11.200  2.33908E-06  2.70515E-06  1.08666E-06  1.09507E-07 -4.18064E-08  2.64985E-04  1.93484E-04  8.54008E-06 -1.81970E-05  3.29844E-06
 11.300  1.89551E-06  2.18130E-06  8.70719E-07  5.51301E-08 -6.20332E-08  2.33625E-04  1.73354E-04  6.07550E-06 -1.72727E-05  2.99447E-06
 11.400  1.54080E-06  1.77140E-06  7.11331E-07  2.07902E-08 -7.74566E-08  2.05793E-04  1.55527E-04  4.37567E-06 -1.63702E-05  2.62214E-06
 11.500  1.25410E-06  1.44524E-06  5.90973E-07  7.11863E-10 -8.83250E-08  1.81080E-04  1.39648E-04  3.27459E-06 -1.54757E-05  2.20602E-06
 11.600  1.02017E-06  1.18133E-06  4.97334E-07 -9.38862E-09 -9.48860E-08  1.59134E-04  1.25434E-04  2.63366E-06 -1.45796E-05  1.76792E-06
 11.700  8.27841E-07  9.64482E-07  4.21895E-07 -1.27079E-08 -9.74300E-08  1.39650E-04  1.12656E-04  2.33794E-06 -1.36759E-05  1.32677E-06
 11.800  6.68856E-07  7.84032E-07  3.58890E-07 -1.16422E-08 -9.63226E-08  1.22362E-04  1.01130E-04  2.29295E-06 -1.27621E-05  8.98536E-07
 11.900  5.37077E-07  6.32504E-07  3.04544E-07 -7.98665E-09 -9.20191E-08  1.07037E-04  9.07074E-05  2.42179E-06 -1.18389E-05  4.96168E-07
 12.000  4.27863E-07  5.04668E-07  2.56495E-07 -3.07379E-09 -8.50616E-08  9.34695E-05  8.12689E-05  2.66270E-06 -1.09096E-05  1.29669E-07
 12.100  3.37644E-07  3.96835E-07  2.13374E-07  2.12781E-09 -7.60609E-08  8.14753E-05  7.27146E-05  2.96687E-06 -9.97958E-06 -1.93795E-07
 12.200  2.63600E-07  3.06333E-07  1.74467E-07  6.94113E-09 -6.56665E-08  7.08906E-05  6.49619E-05  3.29644E-06 -9.05557E-06 -4.69701E-07
 12.300  2.03435E-07  2.31138E-07  1.39475E-07  1.09240E-08 -5.45317E-08  6.15677E-05  5.79401E-05  3.62283E-06 -8.14534E-06 -6.95904E-07
 12.400  1.55213E-07  1.69606E-07  1.08322E-07  1.38225E-08 -4.32770E-08  5.33733E-05  5.15878E-05  3.92518E-06 -7.25694E-06 -8.72340E-07
 12.500  1.17248E-07  1.20292E-07  8.10232E-08  1.55307E-08 -3.24577E-08  4.61866E-05  4.58504E-05  4.18899E-06 -6.39829E-06 -1.00068E-06
 12.600  8.80332E-08  8.18415E-08  5.75888E-08  1.60562E-08 -2.25372E-08  3.98979E-05  4.06783E-05  4.40495E-06 -5.57680E-06 -1.08400E-06
 12.700  6.61956E-08  5.29266E-08  3.79711E-08  1.54894E-08 -1.38694E-08  3.44078E-05  3.60258E-05  4.56793E-06 -4.79903E-06 -1.12641E-06
 12.800  5.04745E-08  3.22271E-08  2.20345E-08  1.39775E-08 -6.69000E-09  2.96260E-05  3.18502E-05  4.67608E-06 -4.07045E-06 -1.13273E-06
 12.900  3.97144E-08  1.84345E-08  9.55053E-09  1.17025E-08 -1.11723E-09  2.54706E-05  2.81114E-05  4.73007E-06 -3.39535E-06 -1.10820E-06
 13.000  3.28660E-08  1.02737E-08  2.08395E-10  8.86389E-09  2.84019E-09  2.18675E-05  2.47715E-05  4.73248E-06 -2.77670E-06 -1.05822E-06
 13.100  2.89910E-08  6.53218E-09 -6.36495E-09  5.66361E-09  5.26819E-09  1.87500E-05  2.17948E-05  4.68726E-06 -2.21621E-06 -9.88115E-07
 13.200  2.72686E-08  6.09051E-09 -1.05795E-08  2.29569E-09  6.32842E-09  1.60581E-05  1.91477E-05  4.59926E-06 -1.71435E-06 -9.02972E-07
 13.300  2.69993E-08  7.94867E-09 -1.28565E-08 -1.06214E-09  6.23688E-09  1.37381E-05  1.67984E-05  4.47392E-06 -1.27050E-06 -8.07493E-07
 13.400  2.76057E-08  1.12453E-08 -1.36055E-08 -4.25420E-09  5.24210E-09  1.17420E-05  1.47176E-05  4.31692E-06 -8.83025E-07 -7.05914E-07
 13.500  2.86293E-08  1.52684E-08 -1.32051E-08 -7.15069E-09  3.60450E-09  1.00273E-05  1.28777E-05  4.13399E-06 -5.49477E-07 -6.01942E-07
 13.600  2.97229E-08  1.94570E-08 -1.19904E-08 -9.64994E-09  1.57816E-09  8.55629E-06  1.12537E-05  3.93071E-06 -2.66742E-07 -4.98734E-07
 13.700  3.06410E-08  2.33949E-08 -1.02455E-08 -1.16791E-08 -6.04040E-10  7.29595E-06  9.82222E-06  3.71235E-06 -3.12049E-08 -3.98888E-07
 13.800  3.12255E-08  2.67976E-08 -8.20030E-09 -1.31940E-08 -2.74142E-09  6.21720E-06  8.56223E-06  3.48381E-06  1.61088E-07 -3.04470E-07
 13.900  3.13920E-08  2.94955E-08 -6.03318E-09 -1.41773E-08 -4.67261E-09  5.29470E-06  7.45454E-06  3.24953E-06  3.14290E-07 -2.17042E-07
 14.000  3.11143E-08  3.14132E-08 -3.87527E-09 -1.46365E-08 -6.27881E-09  4.50638E-06  6.48186E-06  3.01344E-06  4.32624E-07 -1.37709E-07
 14.100  3.04095E-08  3.25488E-08 -1.81738E-09 -1.46006E-08 -7.48375E-09  3.83312E-06  5.62865E-06  2.77896E-06  5.20273E-07 -6.71656E-08
 14.200  2.93252E-08  3.29539E-08  8.24286E-11 -1.41166E-08 -8.25093E-09  3.25841E-06  4.88102E-06  2.54900E-06  5.81294E-07 -5.75054E-09
 14.300  2.79270E-08  3.27149E-08  1.79128E-09 -1.32450E-08 -8.57870E-09  2.76802E-06  4.22657E-06  2.32596E-06  6.19547E-07  4.65000E-08
 14.400  2.62891E-08  3.19376E-08  3.29451E-09 -1.20561E-08 -8.49403E-09  2.34971E-06  3.65426E-06  2.11177E-06  6.38642E-07  8.98003E-08
 14.500  2.44867E-08  3.07346E-08  4.58980E-09 -1.06253E-08 -8.04567E-09  1.99300E-06  3.15431E-06  1.90792E-06  6.41906E-07  1.24565E-07
 14.600  2.25904E-08  2.92154E-08  5.68250E-09 -9.02923E-09 -7.29703E-09  1.68891E-06  2.71806E-06  1.71550E-06  6.32362E-07  1.51364E-07
 14.700  2.06624E-08  2.74807E-08  6.58218E-09 -7.34203E-09 -6.31965E-09  1.42975E-06  2.33785E-06  1.53526E-06  6.12719E-07  1.70878E-07
 14.800  1.87547E-08  2.56174E-08  7.30039E-09 -5.63250E-09 -5.18725E-09  1.20897E-06  2.00689E-06  1.36761E-06  5.85370E-07  1.83862E-07
 14.900  1.69084E-08  2.36977E-08  7.84926E-09 -3.96153E-09 -3.97089E-09  1.02098E-06  1.71921E-06  1.21273E-06  5.52405E-07  1.91111E-07
 15.000  1.51537E-08  2.17786E-08  8.24088E-09 -2.38046E-09 -2.73520E-09  8.60993E-07  1.46953E-06  1.07053E-06  5.15619E-07  1.93432E-07
 15.100  1.35111E-08  1.99026E-08  8.48711E-09 -9.30124E-10 -1.53573E-09  7.24933E-07  1.25319E-06  9.40783E-07  4.76535E-07  1.91619E-07
 15.200  1.19925E-08  1.80998E-08  8.59975E-09  3.59544E-10 -4.17404E-10  6.09319E-07  1.06608E-06  8.23077E-07  4.36419E-07  1.86434E-07
 15.300  1.06032E-08  1.63901E-08  8.59070E-09  1.46918E-09  5.86052E-10  5.11177E-07  9.04556E-07  7.16898E-07  3.96308E-07  1.78593E-07
 15.400  9.34290E-09  1.47848E-08  8.47225E-09  2.38924E-09  1.45195E-09  4.27965E-07  7.65425E-07  6.21643E-07  3.57027E-07  1.68749E-07
 15.500  8.20744E-09  1.32891E-08  8.25715E-09  3.11892E-09  2.16779E-09  3.57510E-07  6.45856E-07  5.36650E-07  3.19219E-07  1.57492E-07
 15.600  7.19008E-09  1.19039E-08  7.95867E-09  3.66470E-09  2.73004E-09  2.97948E-07  5.43349E-07  4.61212E-07  2.83361E-07  1.45338E-07
 15.700  6.28250E-09  1.06268E-08  7.59048E-09  4.03892E-09  3.14260E-09  2.47686E-07  4.55702E-07  3.94606E-07  2.49790E-07  1.32730E-07
 15.800  5.47562E-09  9.45385E-09  7.16642E-09  4.25820E-09  3.41517E-09  2.05353E-07  3.80968E-07  3.36102E-07  2.18721E-07  1.20042E-07
 15.900  4.76020E-09  8.38010E-09  6.70024E-09  4.34199E-09  3.56166E-09  1.69778E-07  3.17434E-07  2.84979E-07  1.90270E-07  1.07574E-07
 16.000  4.12730E-09  7.40011E-09  6.20525E-09  4.31121E-09  3.59866E-09  1.39952E-07  2.63590E-07  2.40535E-07  1.64469E-07  9.55641E-08
 16.100  3.56848E-09  6.50846E-09  5.69400E-09  4.18713E-09  3.54408E-09  1.15010E-07  2.18105E-07  2.02095E-07  1.41283E-07  8.41916E-08
 16.200  3.07601E-09  5.69985E-09  5.17802E-09  3.99037E-09  3.41610E-09  9.42096E-08  1.79815E-07  1.69018E-07  1.20626E-07  7.35822E-08
 16.300  2.64287E-09  4.96920E-09  4.66753E-09  3.74021E-09  3.23220E-09  7.69144E-08  1.47695E-07  1.40703E-07  1.02371E-07  6.38164E-08
 16.400  2.26273E-09  4.31164E-09  4.17129E-09  3.45403E-09  3.00853E-09  6.25781E-08  1.20850E-07  1.16587E-07  8.63659E-08  5.49358E-08
 16.500  1.92995E-09  3.72251E-09  3.69652E-09  3.14701E-09  2.75949E-09  5.07333E-08  9.84997E-08  9.61533E-08  7.24380E-08  4.69503E-08
 16.600  1.63947E-09  3.19726E-09  3.24885E-09  2.83194E-09  2.49745E-09  4.09805E-08  7.99643E-08  7.89294E-08  6.04061E-08  3.98441E-08
 16.700  1.38675E-09  2.73143E-09  2.83239E-09  2.51924E-09  2.23264E-09  3.29789E-08  6.46547E-08  6.44857E-08  5.00857E-08  3.35823E-08
 16.800  1.16769E-09  2.32062E-09  2.44981E-09  2.21705E-09  1.97321E-09  2.64381E-08  5.20618E-08  5.24360E-08  4.12942E-08  2.81153E-08
 16.900  9.78605E-10  1.96049E-09  2.10250E-09  1.93138E-09  1.72535E-09  2.11119E-08  4.17471E-08  4.24358E-08  3.38557E-08  2.33843E-08
 17.000  8.16118E-10  1.64675E-09  1.79071E-09  1.66639E-09  1.49346E-09  1.67918E-08  3.33350E-08  3.41794E-08  2.76035E-08  1.93246E-08
 17.100  6.77168E-10  1.37517E-09  1.51379E-09  1.42462E-09  1.28043E-09  1.33018E-08  2.65044E-08  2.73982E-08  2.23822E-08  1.58691E-08
 17.200  5.58956E-10  1.14162E-09  1.27033E-09  1.20727E-09  1.08783E-09  1.04941E-08  2.09828E-08  2.18575E-08  1.80498E-08  1.29508E-08
 17.300  4.58932E-10  9.42114E-10  1.05837E-09  1.01448E-09  9.16167E-10  8.24464E-09  1.65393E-08  1.73539E-08  1.44773E-08  1.05049E-08
 17.400  3.74772E-10  7.72848E-10  8.75552E-10  8.45570E-10  7.65162E-10  6.45023E-09  1.29797E-08  1.37124E-08  1.15496E-08  8.46979E-09
 17.500  3.04371E-10  6.30210E-10  7.19293E-10  6.99268E-10  6.33913E-10  5.02499E-09  1.01414E-08  1.07831E-08  9.16496E-09  6.78861E-09
 17.600  2.45829E-10  5.10831E-10  5.86895E-10  5.73892E-10  5.21102E-10  3.89795E-09  7.88855E-09  8.43899E-09  7.23423E-09  5.40943E-09
 17.700  1.97441E-10  4.11599E-10  4.75659E-10  4.67527E-10  4.25149E-10  3.01068E-09  6.10886E-09  6.57288E-09  5.68027E-09  4.28567E-09
 17.800  1.57691E-10  3.29674E-10  3.82966E-10  3.78147E-10  3.44334E-10  2.31530E-09  4.70953E-09  5.09495E-09  4.43687E-09  3.37610E-09
 17.900  1.25238E-10  2.62494E-10  3.06338E-10  3.03719E-10  2.76904E-10  1.77278E-09  3.61445E-09  3.93050E-09  3.44772E-09  2.64466E-09
 18.000  9.89050E-11  2.07774E-10  2.43478E-10  2.42277E-10  2.21140E-10  1.35144E-09  2.76153E-09  3.01773E-09  2.66532E-09  2.06021E-09
 18.100  7.76714E-11  1.63500E-10  1.92301E-10  1.91978E-10  1.75416E-10  1.02572E-09  2.10037E-09  2.30591E-09  2.04996E-09  1.59613E-09
 18.200  6.06552E-11  1.27913E-10  1.50941E-10  1.51130E-10  1.38230E-10  7.75076E-10  1.59029E-09  1.75363E-09  1.56867E-09  1.22989E-09
 18.300  4.71028E-11  9.94951E-11  1.17754E-10  1.18214E-10  1.08225E-10  5.83092E-10  1.19865E-09  1.32731E-09  1.19433E-09  9.42602E-10
 18.400  3.63755E-11  7.69485E-11  9.13116E-11  9.18874E-11  8.41978E-11  4.36721E-10  8.99381E-10  9.99892E-10  9.04775E-10  7.18591E-10
 18.500  2.79361E-11  5.91738E-11  7.03870E-11  7.09849E-11  6.50997E-11  3.25644E-10  6.71781E-10  7.49694E-10  6.82011E-10  5.44938E-10
 18.600  2.13369E-11  4.52492E-11  5.39400E-11  5.45060E-11  5.00277E-11  2.41742E-10  4.99514E-10  5.59463E-10  5.11553E-10  4.11100E-10
 18.700  1.62077E-11  3.44086E-11  4.10974E-11  4.16039E-11  3.82157E-11  1.78662E-10  3.69746E-10  4.15550E-10  3.81815E-10  3.08535E-10
 18.800  1.22448E-11  2.60207E-11  3.11341E-11  3.15703E-11  2.90213E-11  1.31457E-10  2.72458E-10  3.07217E-10  2.83590E-10  2.30376E-10
 18.900  9.20107E-12  1.95698E-11  2.34535E-11  2.38185E-11  2.19117E-11  9.62955E-11  1.99865E-10  2.26071E-10  2.09614E-10  1.71146E-10
 19.000  6.87699E-12  1.46385E-11  1.75694E-11  1.78682E-11  1.64496E-11  7.02266E-11  1.45956E-10  1.65589E-10  1.54188E-10  1.26505E-10
 19.100  5.11270E-12  1.08909E-11  1.30892E-11  1.33294E-11  1.22799E-11  5.09885E-11  1.06110E-10  1.20728E-10  1.12875E-10  9.30434E-11
 19.200  3.78104E-12  8.05964E-12  9.69848E-12  9.88864E-12  9.11649E-12  3.68572E-11  7.67966E-11  8.76172E-11  8.22376E-11  6.80946E-11
 19.300  2.78162E-12  5.93293E-12  7.14753E-12  7.29609E-12  6.73107E-12  2.65249E-11  5.53335E-11  6.32962E-11  5.96328E-11  4.95915E-11
 19.400  2.03578E-12  4.34457E-12  5.23956E-12  5.35428E-12  4.94306E-12  1.90051E-11  3.96915E-11  4.55180E-11  4.30380E-11  3.59407E-11
 19.500  1.48227E-12  3.16497E-12  3.82072E-12  3.90838E-12  3.61070E-12  1.35574E-11  2.83450E-11  3.25847E-11  3.09160E-11  2.59219E-11
 19.600  1.07375E-12  2.29380E-12  2.77160E-12  2.83796E-12  2.62360E-12  9.62885E-12  2.01526E-11  2.32208E-11  2.21051E-11  1.86064E-11
 19.700  7.73888E-13  1.65396E-12  2.00020E-12  2.04999E-12  1.89646E-12  6.80883E-12  1.42648E-11  1.64734E-11  1.57321E-11  1.32919E-11
 19.800  5.54969E-13  1.18658E-12  1.43614E-12  1.47319E-12  1.36380E-12  4.79373E-12  1.00528E-11  1.16342E-11  1.11451E-11  9.45060E-12
 19.900  3.95997E-13  8.47011E-13  1.02593E-12  1.05330E-12  9.75760E-13  3.36034E-12  7.05342E-12  8.17995E-12  7.85937E-12  6.68791E-12
  67 218 200   0.100
  0.000  4.63073E-02 -2.32738E-16 -3.53884E-16 -4.50334E-16 -7.93922E-16  9.98190E-02 -5.43054E-16 -6.86950E-16 -1.13834E-15 -6.58025E-16
  0.100  4.63291E-02 -2.67726E-05 -1.93574E-08 -6.27699E-12 -1.80242E-15  9.98348E-02 -3.10831E-05 -6.67171E-10  6.96061E-12  9.46984E-15
  0.200  4.63942E-02 -1.06029E-04 -3.07075E-07 -3.98071E-10 -3.54904E-13  9.98812E-02 -1.21802E-04 -9.63868E-09  4.43444E-10 -1.68011E-13
  0.300  4.65012E-02 -2.34619E-04 -1.53250E-06 -4.46573E-09 -9.00462E-12  9.99551E-02 -2.64755E-04 -4.02007E-08  5.01267E-09 -4.29244E-12
  0.400  4.66484E-02 -4.07406E-04 -4.74732E-06 -2.45618E-08 -8.81030E-11  1.00052E-01 -4.48220E-04 -8.99945E-08  2.78620E-08 -3.97789E-11
  0.500  4.68330E-02 -6.17436E-04 -1.12946E-05 -9.11591E-08 -5.11397E-10  1.00165E-01 -6.57033E-04 -1.07406E-07  1.04804E-07 -2.13725E-10
  0.600  4.70518E-02 -8.56169E-04 -2.26910E-05 -2.63212E-07 -2.12878E-09  1.00287E-01 -8.73720E-04  4.93655E-08  3.07553E-07 -8.01685E-10
  0.700  4.73009E-02 -1.11376E-03 -4.04900E-05 -6.37876E-07 -7.03183E-09  1.00410E-01 -1.07982E-03  6.54831E-07  7.59523E-07 -2.30289E-09
  0.800  4.75759E-02 -1.37940E-03 -6.61371E-05 -1.35756E-06 -1.95794E-08  1.00526E-01 -1.25727E-03  2.15358E-06  1.65140E-06 -5.29610E-09
  0.900  4.78720E-02 -1.64170E-03 -1.00826E-04 -2.61251E-06 -4.77802E-08  1.00628E-01 -1.38979E-03  5.18522E-06  3.25438E-06 -9.81661E-09
  1.000  4.81839E-02 -1.88905E-03 -1.45369E-04 -4.63752E-06 -1.04946E-07  1.00709E-01 -1.46416E-03  1.05898E-05  5.92881E-06 -1.38789E-08
  1.100  4.85064E-02 -2.11009E-03 -2.00084E-04 -7.70214E-06 -2.11443E-07  1.00764E-01 -1.47123E-03  1.93876E-05  1.01259E-05 -1.07313E-08
  1.200  4.88338E-02 -2.29411E-03 -2.64715E-04 -1.20943E-05 -3.96289E-07  1.00790E-01 -1.40668E-03  3.27286E-05  1.63803E-05  1.55111E-08
  1.300  4.91609E-02 -2.43146E-03 -3.38386E-04 -1.80986E-05 -6.98307E-07  1.00785E-01 -1.27145E-03  5.18104E-05  2.52921E-05  9.60267E-08
  1.400  4.94821E-02 -2.51392E-03 -4.19592E-04 -2.59701E-05 -1.16651E-06  1.00751E-01 -1.07173E-03  7.77658E-05  3.74963E-05  2.85100E-07
  1.500  4.97925E-02 -2.53508E-03 -5.06227E-04 -3.59070E-05 -1.85945E-06  1.00691E-01 -8.18573E-04  1.11525E-04  5.36203E-05  6.69025E-07
  1.600  5.00871E-02 -2.49057E-03 -5.95656E-04 -4.80234E-05 -2.84338E-06  1.00610E-01 -5.27190E-04  1.53665E-04  7.42302E-05  1.37504E-06
  1.700  5.03617E-02 -2.37833E-03 -6.84811E-04 -6.23255E-05 -4.18914E-06  1.00516E-01 -2.15863E-04  2.04249E-04  9.97674E-05  2.57882E-06
  1.800  5.06126E-02 -2.19872E-03 -7.70319E-04 -7.86938E-05 -5.96785E-06  1.00416E-01  9.53478E-05  2.62694E-04  1.30480E-04  4.50855E-06
  1.900  5.08366E-02 -1.95459E-03 -8.48649E-04 -9.68721E-05 -8.24574E-06  1.00320E-01  3.86058E-04  3.27654E-04  1.66351E-04  7.44359E-06
  2.000  5.10313E-02 -1.65122E-03 -9.16276E-04 -1.16466E-04 -1.10785E-05  1.00235E-01  6.37063E-04  3.96961E-04  2.07036E-04  1.17059E-05
  2.100  5.11954E-02 -1.29620E-03 -9.69836E-04 -1.36948E-04 -1.45056E-05  1.00171E-01  8.31768E-04  4.67634E-04  2.51811E-04  1.76421E-05
  2.200  5.13280E-02 -8.99202E-04 -1.00629E-03 -1.57676E-04 -1.85452E-05  1.00134E-01  9.57454E-04  5.35954E-04  2.99533E-04  2.55970E-05
  2.300  5.14295E-02 -4.71653E-04 -1.02309E-03 -1.77911E-04 -2.31905E-05  1.00128E-01  1.00627E-03  5.97635E-04  3.48641E-04  3.58765E-05
  2.400  5.15010E-02 -2.63591E-05 -1.01828E-03 -1.96852E-04 -2.84075E-05  1.00157E-01  9.75881E-04  6.48059E-04  3.97172E-04  4.87041E-05
  2.500  5.15446E-02  4.22961E-04 -9.90614E-04 -2.13659E-04 -3.41346E-05  1.00222E-01  8.69726E-04  6.82598E-04  4.42828E-04  6.41727E-05
  2.600  5.15633E-02  8.62182E-04 -9.39674E-04 -2.27493E-04 -4.02848E-05  1.00320E-01  6.96835E-04  6.96970E-04  4.83068E-04  8.21962E-05
  2.700  5.15607E-02  1.27731E-03 -8.65890E-04 -2.37542E-04 -4.67494E-05  1.00445E-01  4.71256E-04  6.87629E-04  5.15246E-04  1.02467E-04
  2.800  5.15413E-02  1.65505E-03 -7.70580E-04 -2.43054E-04 -5.34038E-05  1.00592E-01  2.11097E-04  6.52140E-04  5.36774E-04  1.24424E-04
  2.900  5.15097E-02  1.98331E-03 -6.55953E-04 -2.43361E-04 -6.01142E-05  1.00751E-01 -6.27331E-05  5.89507E-04  5.45312E-04  1.47240E-04
  3.000  5.14713E-02  2.25180E-03 -5.25068E-04 -2.37899E-04 -6.67448E-05  1.00912E-01 -3.27989E-04  5.00419E-04  5.38962E-04  1.69826E-04
  3.100  5.14311E-02  2.45240E-03 -3.81777E-04 -2.26232E-04 -7.31644E-05  1.01065E-01 -5.62651E-04  3.87380E-04  5.16463E-04  1.90867E-04
  3.200  5.13942E-02  2.57963E-03 -2.30628E-04 -2.08061E-04 -7.92527E-05  1.01198E-01 -7.46467E-04  2.54696E-04  4.77366E-04  2.08883E-04
  3.300  5.13649E-02  2.63096E-03 -7.67423E-05 -1.83241E-04 -8.49037E-05  1.01302E-01 -8.62352E-04  1.08308E-04  4.22165E-04  2.22310E-04
  3.400  5.13470E-02  2.60699E-03  7.43306E-05 -1.51793E-04 -9.00281E-05  1.01366E-01 -8.97534E-04 -4.45276E-05  3.52380E-04  2.29609E-04
  3.500  5.13431E-02  2.51158E-03  2.16792E-04 -1.13918E-04 -9.45530E-05  1.01383E-01 -8.44362E-04 -1.95703E-04  2.70568E-04  2.29385E-04
  3.600  5.13544E-02  2.35183E-03  3.44788E-04 -7.00110E-05 -9.84195E-05  1.01348E-01 -7.00710E-04 -3.36831E-04  1.80261E-04  2.20511E-04
  3.700  5.13806E-02  2.13790E-03  4.52628E-04 -2.06727E-05 -1.01579E-04  1.01254E-01 -4.69942E-04 -4.59892E-04  8.58199E-05  2.02248E-04
  3.800  5.14195E-02  1.88280E-03  5.35011E-04  3.32759E-05 -1.03988E-04  1.01101E-01 -1.60450E-04 -5.57885E-04 -7.78986E-06  1.74342E-04
  3.900  5.14672E-02  1.60192E-03  5.87262E-04  9.07841E-05 -1.05605E-04  1.00885E-01  2.15208E-04 -6.25449E-04 -9.52858E-05  1.37101E-04
  4.000  5.15174E-02  1.31257E-03  6.05561E-04  1.50567E-04 -1.06388E-04  1.00608E-01  6.41491E-04 -6.59377E-04 -1.71412E-04  9.14220E-05
  4.100  5.15623E-02  1.03338E-03  5.87164E-04  2.11110E-04 -1.06291E-04  1.00267E-01  1.10128E-03 -6.58980E-04 -2.31311E-04  3.87891E-05
  4.200  5.15921E-02  7.83582E-04  5.30596E-04  2.70686E-04 -1.05270E-04  9.98645E-02  1.57741E-03 -6.26253E-04 -2.70891E-04 -1.87888E-05
  4.300  5.15952E-02  5.82307E-04  4.35810E-04  3.27383E-04 -1.03286E-04  9.93979E-02  2.05418E-03 -5.65820E-04 -2.87173E-04 -7.88782E-05
  4.400  5.15589E-02  4.47796E-04  3.04296E-04  3.79157E-04 -1.00315E-04  9.88656E-02  2.51871E-03 -4.84658E-04 -2.78576E-04 -1.38762E-04
  4.500  5.14695E-02  3.96649E-04  1.39134E-04  4.23893E-04 -9.63612E-05  9.82642E-02  2.96208E-03 -3.91593E-04 -2.45114E-04 -1.95612E-04
  4.600  5.13127E-02  4.43096E-04 -5.50261E-05  4.59488E-04 -9.14695E-05  9.75885E-02  3.38015E-03 -2.96632E-04 -1.88496E-04 -2.46677E-04
  4.700  5.10743E-02  5.98344E-04 -2.72054E-04  4.83946E-04 -8.57386E-05  9.68316E-02  3.77388E-03 -2.10152E-04 -1.12099E-04 -2.89469E-04
  4.800  5.07405E-02  8.70008E-04 -5.04509E-04  4.95487E-04 -7.93340E-05  9.59848E-02  4.14932E-03 -1.42032E-04 -2.08183E-05 -3.21950E-04
  4.900  5.02987E-02  1.26169E-03 -7.43887E-04  4.92654E-04 -7.24957E-05  9.50382E-02  4.51712E-03 -1.00799E-04  7.91942E-05 -3.42668E-04
  5.000  4.97376E-02  1.77270E-03 -9.80931E-04  4.74420E-04 -6.55413E-05  9.39810E-02  4.89163E-03 -9.28493E-05  1.80902E-04 -3.50874E-04
  5.100  4.90480E-02  2.39793E-03 -1.20600E-03  4.40283E-04 -5.88619E-05  9.28018E-02  5.28968E-03 -1.21831E-04  2.76825E-04 -3.46577E-04
  5.200  4.82231E-02  3.12794E-03 -1.40950E-03  3.90338E-04 -5.29101E-05  9.14896E-02  5.72920E-03 -1.88229E-04  3.59533E-04 -3.30540E-04
  5.300  4.72587E-02  3.94920E-03 -1.58227E-03  3.25328E-04 -4.81803E-05  9.00340E-02  6.22755E-03 -2.89206E-04  4.22140E-04 -3.04236E-04
  5.400  4.61534E-02  4.84451E-03 -1.71608E-03  2.46655E-04 -4.51821E-05  8.84262E-02  6.80007E-03 -4.18702E-04  4.58771E-04 -2.69736E-04
  5.500  4.49089E-02  5.79360E-03 -1.80397E-03  1.56354E-04 -4.44073E-05  8.66593E-02  7.45851E-03 -5.67797E-04  4.64967E-04 -2.29563E-04
  5.600  4.35299E-02  6.77381E-03 -1.84065E-03  5.70367E-05 -4.62941E-05  8.47290E-02  8.20991E-03 -7.25310E-04  4.37989E-04 -1.86520E-04
  5.700  4.20239E-02  7.76094E-03 -1.82277E-03 -4.82167E-05 -5.11910E-05  8.26336E-02  9.05561E-03 -8.78579E-04  3.77004E-04 -1.43490E-04
  5.800  4.04010E-02  8.73012E-03 -1.74909E-03 -1.55985E-04 -5.93229E-05  8.03745E-02  9.99078E-03 -1.01436E-03  2.83137E-04 -1.03251E-04
  5.900  3.86736E-02  9.65674E-03 -1.62058E-03 -2.62666E-04 -7.07633E-05  7.79563E-02  1.10042E-02 -1.11979E-03  1.59396E-04 -6.82901E-05
  6.000  3.68562E-02  1.05173E-02 -1.44042E-03 -3.64650E-04 -8.54149E-05  7.53865E-02  1.20788E-02 -1.18329E-03  1.04566E-05 -4.06601E-05
  6.100  3.49648E-02  1.12903E-02 -1.21383E-03 -4.58498E-04 -1.03001E-04  7.26758E-02  1.31921E-02 -1.19543E-03 -1.57645E-04 -2.18625E-05
  6.200  3.30165E-02  1.19569E-02 -9.47832E-04 -5.41112E-04 -1.23071E-04  6.98372E-02  1.43173E-02 -1.14956E-03 -3.37912E-04 -1.27803E-05
  6.300  3.10291E-02  1.25017E-02 -6.50935E-04 -6.09890E-04 -1.45013E-04  6.68863E-02  1.54247E-02 -1.04229E-03 -5.22831E-04 -1.36564E-05
  6.400  2.90205E-02  1.29131E-02 -3.32729E-04 -6.62844E-04 -1.68085E-04  6.38405E-02  1.64832E-02 -8.73686E-04 -7.04834E-04 -2.41170E-05
  6.500  2.70087E-02  1.31834E-02 -3.42895E-06 -6.98693E-04 -1.91452E-04  6.07190E-02  1.74616E-02 -6.47298E-04 -8.76737E-04 -4.32364E-05
  6.600  2.50108E-02  1.33093E-02  3.26591E-04 -7.16903E-04 -2.14229E-04  5.75419E-02  1.83306E-02 -3.69854E-04 -1.03214E-03 -6.96333E-05
  6.700  2.30430E-02  1.32917E-02  6.47262E-04 -7.17691E-04 -2.35533E-04  5.43300E-02  1.90638E-02 -5.08175E-05 -1.16572E-03 -1.01591E-04
  6.800  2.11203E-02  1.31354E-02  9.49252E-04 -7.01980E-04 -2.54528E-04  5.11044E-02  1.96388E-02  2.98240E-04 -1.27350E-03 -1.37188E-04
  6.900  1.92564E-02  1.28487E-02  1.22434E-03 -6.71321E-04 -2.70476E-04  4.78862E-02  2.00390E-02  6.64376E-04 -1.35295E-03 -1.74434E-04
  7.000  1.74632E-02  1.24432E-02  1.46572E-03 -6.27781E-04 -2.82772E-04  4.46959E-02  2.02530E-02  1.03406E-03 -1.40299E-03 -2.11393E-04
  7.100  1.57508E-02  1.19328E-02  1.66822E-03 -5.73806E-04 -2.90975E-04  4.15532E-02  2.02761E-02  1.39395E-03 -1.42396E-03 -2.46293E-04
  7.200  1.41276E-02  1.13334E-02  1.82841E-03 -5.12075E-04 -2.94828E-04  3.84768E-02  2.01094E-02  1.73163E-03 -1.41746E-03 -2.77611E-04
  7.300  1.26002E-02  1.06622E-02  1.94461E-03 -4.45353E-04 -2.94265E-04  3.54839E-02  1.97599E-02  2.03618E-03 -1.38612E-03 -3.04137E-04
  7.400  1.11732E-02  9.93694E-03  2.01689E-03 -3.76342E-04 -2.89405E-04  3.25903E-02  1.92400E-02  2.29869E-03 -1.33336E-03 -3.25006E-04
  7.500  9.84969E-03  9.17513E-03  2.04685E-03 -3.07563E-04 -2.80537E-04  2.98098E-02  1.85665E-02  2.51257E-03 -1.26312E-03 -3.39708E-04
  7.600  8.63089E-03  8.39378E-03  2.03745E-03 -2.41243E-04 -2.68093E-04  2.71544E-02  1.77595E-02  2.67367E-03 -1.17960E-03 -3.48069E-04
  7.700  7.51664E-03  7.60873E-03  1.99274E-03 -1.79246E-04 -2.52621E-04  2.46340E-02  1.68418E-02  2.78034E-03 -1.08699E-03 -3.50225E-04
  7.800  6.50535E-03  6.83430E-03  1.91759E-03 -1.23018E-04 -2.34746E-04  2.22563E-02  1.58377E-02  2.83320E-03 -9.89245E-04 -3.46567E-04
  7.900  5.59422E-03  6.08296E-03  1.81740E-03 -7.35754E-05 -2.15133E-04  2.00271E-02  1.47715E-02  2.83496E-03 -8.89968E-04 -3.37693E-04
  8.000  4.77939E-03  5.36515E-03  1.69776E-03 -3.15053E-05 -1.94450E-04  1.79497E-02  1.36675E-02  2.78999E-03 -7.92229E-04 -3.24341E-04
  8.100  4.05615E-03  4.68920E-03  1.56428E-03  2.99833E-06 -1.73340E-04  1.60257E-02  1.25483E-02  2.70400E-03 -6.98525E-04 -3.07336E-04
  8.200  3.41906E-03  4.06131E-03  1.42226E-03  3.00884E-05 -1.52389E-04  1.42545E-02  1.14346E-02  2.58353E-03 -6.10743E-04 -2.87535E-04
  8.300  2.86218E-03  3.48564E-03  1.27659E-03  5.02029E-05 -1.32107E-04  1.26336E-02  1.03446E-02  2.43563E-03 -5.30178E-04 -2.65779E-04
  8.400  2.37924E-03  2.96446E-03  1.13154E-03  6.39966E-05 -1.12912E-04  1.11591E-02  9.29375E-03  2.26740E-03 -4.57583E-04 -2.42859E-04
  8.500  1.96373E-03  2.49836E-03  9.90737E-04  7.22723E-05 -9.51286E-05  9.82544E-03  8.29445E-03  2.08568E-03 -3.93235E-04 -2.19483E-04
  8.600  1.60912E-03  2.08646E-03  8.57054E-04  7.59141E-05 -7.89791E-05  8.62610E-03  7.35619E-03  1.89681E-03 -3.37022E-04 -1.96263E-04
  8.700  1.30898E-03  1.72668E-03  7.32660E-04  7.58286E-05 -6.45941E-05  7.55339E-03  6.48557E-03  1.70640E-03 -2.88537E-04 -1.73700E-04
  8.800  1.05705E-03  1.41603E-03  6.19029E-04  7.28945E-05 -5.20195E-05  6.59899E-03  5.68655E-03  1.51924E-03 -2.47163E-04 -1.52188E-04
  8.900  8.47367E-04  1.15082E-03  5.17007E-04  6.79245E-05 -4.12291E-05  5.75410E-03  4.96075E-03  1.33917E-03 -2.12155E-04 -1.32016E-04
  9.000  6.74332E-04  9.26921E-04  4.26891E-04  6.16372E-05 -3.21387E-05  5.00965E-03  4.30776E-03  1.16918E-03 -1.82714E-04 -1.13375E-04
  9.100  5.32769E-04  7.39977E-04  3.48522E-04  5.46414E-05 -2.46205E-05  4.35655E-03  3.72552E-03  1.01137E-03 -1.58040E-04 -9.63715E-05
  9.200  4.17955E-04  5.85589E-04  2.81384E-04  4.74291E-05 -1.85178E-05  3.78584E-03  3.21069E-03  8.67037E-04 -1.37376E-04 -8.10435E-05
  9.300  3.25642E-04  4.59462E-04  2.24696E-04  4.03774E-05 -1.36577E-05  3.28888E-03  2.75898E-03  7.36836E-04 -1.20038E-04 -6.73712E-05
  9.400  2.52062E-04  3.57516E-04  1.77501E-04  3.37562E-05 -9.86260E-06  2.85741E-03  2.36546E-03  6.20834E-04 -1.05428E-04 -5.52929E-05
  9.500  1.93916E-04  2.75980E-04  1.38745E-04  2.77415E-05 -6.95903E-06  2.48373E-03  2.02485E-03  5.18660E-04 -9.30443E-05 -4.47167E-05
  9.600  1.48352E-04  2.11438E-04  1.07342E-04  2.24294E-05 -4.78483E-06  2.16070E-03  1.73177E-03  4.29608E-04 -8.24732E-05 -3.55318E-05
  9.700  1.12940E-04  1.60861E-04  8.22282E-05  1.78531E-05 -3.19362E-06  1.88181E-03  1.48087E-03  3.52748E-04 -7.33867E-05 -2.76176E-05
  9.800  8.56348E-05  1.21614E-04  6.23973E-05  1.39982E-05 -2.05761E-06  1.64119E-03  1.26706E-03  2.87009E-04 -6.55285E-05 -2.08508E-05
  9.900  6.47352E-05  9.14420E-05  4.69304E-05  1.08170E-05 -1.26850E-06  1.43358E-03  1.08552E-03  2.31262E-04 -5.87019E-05 -1.51108E-05
 10.000  4.88475E-05  6.84530E-05  3.50103E-05  8.24155E-06 -7.37233E-07  1.25436E-03  9.31844E-04  1.84368E-04 -5.27562E-05 -1.02836E-05
 10.100  3.68425E-05  5.10809E-05  2.59285E-05  6.19322E-06 -3.92625E-07  1.09948E-03  8.02026E-04  1.45232E-04 -4.75756E-05 -6.26363E-06
 10.200  2.78171E-05  3.80515E-05  1.90842E-05  4.59107E-06 -1.79411E-07  9.65395E-04  6.92501E-04  1.12825E-04 -4.30684E-05 -2.95530E-06
 10.300  2.10582E-05  2.83431E-05  1.39788E-05  3.35728E-06 -5.59340E-08  8.49082E-04  6.00130E-04  8.62052E-05 -3.91587E-05 -2.72829E-07
 10.400  1.60091E-05  2.11484E-05  1.02066E-05  2.42088E-06  8.26412E-09  7.47939E-04  5.22178E-04  6.45242E-05 -3.57805E-05  1.86014E-06
 10.500  1.22405E-05  1.58384E-05  7.44345E-06  1.71974E-06  3.47583E-08  6.59750E-04  4.56291E-04  4.70315E-05 -3.28733E-05  3.51145E-06
 10.600  9.42500E-06  1.19290E-05  5.43494E-06  1.20136E-06  3.83384E-08  5.82638E-04  4.00459E-04  3.30694E-05 -3.03795E-05  4.74159E-06
 10.700  7.31539E-06  9.05285E-06  3.98446E-06  8.22655E-07  2.88097E-08  5.15017E-04  3.52978E-04  2.20670E-05 -2.82433E-05  5.60485E-06
 10.800  5.72688E-06  6.93377E-06  2.94242E-06  5.49219E-07  1.24642E-08  4.55552E-04  3.12420E-04  1.35322E-05 -2.64103E-05  6.15043E-06
 10.900  4.52245E-06  5.36665E-06  2.19650E-06  3.54195E-07 -6.77283E-09  4.03119E-04  2.77592E-04  7.04237E-06 -2.48281E-05  6.42344E-06
 11.000  3.60121E-06  4.20039E-06  1.66339E-06  2.17030E-07 -2.64962E-08  3.56773E-04  2.47506E-04  2.23642E-06 -2.34471E-05  6.46558E-06
 11.100  2.88934E-06  3.32461E-06  1.28194E-06  1.22258E-07 -4.52293E-08  3.15719E-04  2.21348E-04 -1.19388E-06 -2.22212E-05  6.31574E-06
 11.200  2.33298E-06  2.65925E-06  1.00769E-06  5.83751E-08 -6.20391E-08  2.79286E-04  1.98453E-04 -3.51096E-06 -2.11090E-05  6.01026E-06
 11.300  1.89297E-06  2.14654E-06  8.08574E-07  1.68917E-08 -7.63083E-08  2.46908E-04  1.78279E-04 -4.93780E-06 -2.00744E-05  5.58307E-06
 11.400  1.54085E-06  1.74506E-06  6.61644E-07 -8.44720E-09 -8.76165E-08  2.18102E-04  1.60387E-04 -5.66336E-06 -1.90872E-05  5.06565E-06
 11.500  1.25591E-06  1.42523E-06  5.50633E-07 -2.22642E-08 -9.56913E-08  1.92459E-04  1.44425E-04 -5.84723E-06 -1.81229E-05  4.48691E-06
 11.600  1.02305E-06  1.16606E-06  4.64135E-07 -2.80000E-08 -1.00398E-07  1.69625E-04  1.30107E-04 -5.62349E-06 -1.71635E-05  3.87299E-06
 11.700  8.31241E-07  9.52755E-07  3.94279E-07 -2.82389E-08 -1.01746E-07  1.49296E-04  1.17207E-04 -5.10406E-06 -1.61965E-05  3.24708E-06
 11.800  6.72345E-07  7.74911E-07  3.35759E-07 -2.49367E-08 -9.98913E-08  1.31205E-04  1.05543E-04 -4.38157E-06 -1.52148E-05  2.62923E-06
 11.900  5.40329E-07  6.25287E-07  2.85117E-07 -1.95770E-08 -9.51343E-08  1.15120E-04  9.49675E-05 -3.53186E-06 -1.42158E-05  2.03623E-06
 12.000  4.30653E-07  4.98831E-07  2.40216E-07 -1.32785E-08 -8.79040E-08  1.00836E-04  8.53626E-05 -2.61614E-06 -1.32012E-05  1.48164E-06
 12.100  3.39832E-07  3.91994E-07  1.99828E-07 -6.86955E-09 -7.87298E-08  8.81680E-05  7.66312E-05 -1.68298E-06 -1.21755E-05  9.75744E-07
 12.200  2.65119E-07  3.02216E-07  1.63336E-07 -9.42091E-10 -6.82061E-08  7.69527E-05  6.86927E-05 -7.70055E-07 -1.11459E-05  5.25789E-07
 12.300  2.04279E-07  2.27560E-07  1.30497E-07  4.10601E-09 -5.69514E-08  6.70420E-05  6.14786E-05  9.42991E-08 -1.01211E-05  1.36144E-07
 12.400  1.55422E-07  1.66447E-07  1.01268E-07  8.03631E-09 -4.55673E-08  5.83018E-05  5.49297E-05  8.89641E-07 -9.11037E-06 -1.91387E-07
 12.500  1.16897E-07  1.17480E-07  7.56782E-08  1.07396E-08 -3.46024E-08  5.06104E-05  4.89933E-05  1.60217E-06 -8.12362E-06 -4.57238E-07
 12.600  8.72167E-08  7.93349E-08  5.37467E-08  1.22091E-08 -2.45212E-08  4.38570E-05  4.36219E-05  2.22357E-06 -7.17020E-06 -6.63705E-07
 12.700  6.50183E-08  5.07055E-08  3.54284E-08  1.25162E-08 -1.56843E-08  3.79407E-05  3.87715E-05  2.75005E-06 -6.25872E-06 -8.14572E-07
 12.800  4.90422E-08  3.02816E-08  2.05906E-08  1.17895E-08 -8.33607E-09  3.27695E-05  3.44010E-05  3.18140E-06 -5.39669E-06 -9.14739E-07
 12.900  3.81268E-08  1.67580E-08  9.01004E-09  1.01961E-08 -2.60332E-09  2.82597E-05  3.04717E-05  3.52025E-06 -4.59025E-06 -9.69865E-07
 13.000  3.12115E-08  8.85869E-09  3.84438E-10  7.92574E-09  1.49789E-09  2.43354E-05  2.69468E-05  3.77137E-06 -3.84410E-06 -9.86050E-07
 13.100  2.73444E-08  5.36771E-09 -5.64649E-09  5.17754E-09  4.04865E-09  2.09277E-05  2.37918E-05  3.94112E-06 -3.16139E-06 -9.69552E-07
 13.200  2.56893E-08  5.16141E-09 -9.47617E-09  2.14884E-09  5.20854E-09  1.79745E-05  2.09737E-05  4.03693E-06 -2.54382E-06 -9.26552E-07
 13.300  2.55316E-08  7.23589E-09 -1.15062E-08 -9.73724E-10  5.19422E-09  1.54200E-05  1.84616E-05  4.06689E-06 -1.99167E-06 -8.62964E-07
 13.400  2.62797E-08  1.07270E-08 -1.21241E-08 -4.02122E-09  4.25719E-09  1.32143E-05  1.62266E-05  4.03940E-06 -1.50400E-06 -7.84287E-07
 13.500  2.74627E-08  1.49215E-08 -1.16861E-08 -6.84778E-09  2.66244E-09  1.13126E-05  1.42415E-05  3.96289E-06 -1.07877E-06 -6.95503E-07
 13.600  2.87235E-08  1.92583E-08 -1.05047E-08 -9.33435E-09  6.69575E-10  9.67558E-06  1.24814E-05  3.84556E-06 -7.13041E-07 -6.01010E-07
 13.700  2.98084E-08  2.33226E-08 -8.84261E-09 -1.13909E-08 -1.48281E-09  8.26806E-06  1.09232E-05  3.69524E-06 -4.03193E-07 -5.04593E-07
 13.800  3.05533E-08  2.68322E-08 -6.91109E-09 -1.29570E-08 -3.58878E-09  7.05927E-06  9.54559E-06  3.51924E-06 -1.45072E-07 -4.09412E-07
 13.900  3.08698E-08  2.96202E-08 -4.87220E-09 -1.40017E-08 -5.48259E-09  6.02221E-06  8.32944E-06  3.32425E-06  6.58110E-08 -3.18022E-07
 14.000  3.07291E-08  3.16141E-08 -2.84415E-09 -1.45211E-08 -7.04234E-09  5.13324E-06  7.25719E-06  3.11628E-06  2.34130E-07 -2.32404E-07
 14.100  3.01471E-08  3.28147E-08 -9.08012E-10 -1.45361E-08 -8.19002E-09  4.37181E-06  6.31303E-06  2.90064E-06  3.64603E-07 -1.54010E-07
 14.200  2.91709E-08  3.32759E-08  8.84699E-10 -1.40882E-08 -8.88876E-09  3.72006E-06  5.48271E-06  2.68193E-06  4.61876E-07 -8.38173E-08
 14.300  2.78663E-08  3.30860E-08  2.50481E-09 -1.32353E-08 -9.13778E-09  3.16256E-06  4.75344E-06  2.46406E-06  5.30432E-07 -2.23834E-08
 14.400  2.63083E-08  3.23519E-08  3.93896E-09 -1.20474E-08 -8.96593E-09  2.68594E-06  4.11376E-06  2.25028E-06  5.74512E-07  3.00923E-08
 14.500  2.45729E-08  3.11869E-08  5.18417E-09 -1.06011E-08 -8.42452E-09  2.27871E-06  3.55345E-06  2.04320E-06  5.98072E-07  7.37097E-08
 14.600  2.27316E-08  2.97009E-08  6.24371E-09 -8.97575E-09 -7.58000E-09  1.93098E-06  3.06336E-06  1.84489E-06  6.04739E-07  1.08810E-07
 14.700  2.08479E-08  2.79943E-08  7.12421E-09 -7.24907E-09 -6.50703E-09  1.63424E-06  2.63535E-06  1.65688E-06  5.97792E-07  1.35921E-07
 14.800  1.89746E-08  2.61537E-08  7.83375E-09 -5.49360E-09 -5.28236E-09  1.38118E-06  2.26216E-06  1.48028E-06  5.80161E-07  1.55708E-07
 14.900  1.71539E-08  2.42510E-08  8.38094E-09 -3.77401E-09 -3.97973E-09  1.16555E-06  1.93734E-06  1.31576E-06  5.54419E-07  1.68928E-07
 15.000  1.54168E-08  2.23426E-08  8.77455E-09 -2.14509E-09 -2.66599E-09  9.81980E-07  1.65516E-06  1.16370E-06  5.22801E-07  1.76390E-07
 15.100  1.37848E-08  2.04710E-08  9.02354E-09 -6.50562E-10 -1.39836E-09  8.25852E-07  1.41050E-06  1.02417E-06  4.87218E-07  1.78921E-07
 15.200  1.22707E-08  1.86662E-08  9.13737E-09  6.77364E-10 -2.22837E-10  6.93219E-07  1.19882E-06  8.97016E-07  4.49278E-07  1.77337E-07
 15.300  1.08805E-08  1.69480E-08  9.12620E-09  1.81775E-09  8.26370E-10  5.80694E-07  1.01611E-06  7.81893E-07  4.10307E-07  1.72420E-07
 15.400  9.61470E-09  1.53283E-08  9.00119E-09  2.76015E-09  1.72660E-09  4.85367E-07  8.58777E-07  6.78316E-07  3.71381E-07  1.64902E-07
 15.500  8.47003E-09  1.38129E-08  8.77452E-09  3.50345E-09  2.46585E-09  4.04741E-07  7.23643E-07  5.85688E-07  3.33348E-07  1.55448E-07
 15.600  7.44045E-09  1.24031E-08  8.45938E-09  4.05438E-09  3.04144E-09  3.36674E-07  6.07892E-07  5.03338E-07  2.96856E-07  1.44654E-07
 15.700  6.51833E-09  1.10977E-08  8.06976E-09  4.42589E-09  3.45835E-09  2.79322E-07  5.09026E-07  4.30543E-07  2.62379E-07  1.33036E-07
 15.800  5.69524E-09  9.89350E-09  7.62010E-09  4.63553E-09  3.72759E-09  2.31104E-07  4.24835E-07  3.66556E-07  2.30241E-07  1.21034E-07
 15.900  4.96254E-09  8.78638E-09  7.12494E-09  4.70385E-09  3.86441E-09  1.90659E-07  3.53366E-07  3.10621E-07  2.00642E-07  1.09011E-07
 16.000  4.31183E-09  7.77188E-09  6.59850E-09  4.65299E-09  3.88674E-09  1.56821E-07  2.92895E-07  2.61991E-07  1.73676E-07  9.72574E-08
 16.100  3.73514E-09  6.84538E-09  6.05427E-09  4.50542E-09  3.81381E-09  1.28586E-07  2.41903E-07  2.19939E-07  1.49355E-07  8.59980E-08
 16.200  3.22512E-09  6.00232E-09  5.50464E-09  4.28292E-09  3.66498E-09  1.05093E-07  1.99056E-07  1.83772E-07  1.27623E-07  7.53967E-08
 16.300  2.77506E-09  5.23827E-09  4.96066E-09  4.00581E-09  3.45878E-09  8.56052E-08  1.63184E-07  1.52830E-07  1.08374E-07  6.55652E-08
 16.400  2.37890E-09  4.54887E-09  4.43179E-09  3.69238E-09  3.21228E-09  6.94907E-08  1.33264E-07  1.26498E-07  9.14674E-08  5.65703E-08
 16.500  2.03118E-09  3.92984E-09  3.92583E-09  3.35856E-09  2.94060E-09  5.62097E-08  1.08406E-07  1.04209E-07  7.67348E-08  4.84413E-08
 16.600  1.72694E-09  3.37693E-09  3.44885E-09  3.01776E-09  2.65669E-09  4.53017E-08  8.78348E-08  8.54413E-08  6.39950E-08  4.11774E-08
 16.700  1.46172E-09  2.88583E-09  3.00527E-09  2.68084E-09  2.37122E-09  3.63747E-08  7.08802E-08  6.97210E-08  5.30595E-08  3.47545E-08
 16.800  1.23145E-09  2.45225E-09  2.59795E-09  2.35626E-09  2.09264E-09  2.90959E-08  5.69644E-08  5.66225E-08  4.37397E-08  2.91308E-08
 16.900  1.03240E-09  2.07181E-09  2.22836E-09  2.05020E-09  1.82732E-09  2.31836E-08  4.55910E-08  4.57660E-08  3.58521E-08  2.42525E-08
 17.000  8.61172E-10  1.74017E-09  1.89678E-09  1.76692E-09  1.57976E-09  1.83999E-08  3.63354E-08  3.68146E-08  2.92219E-08  2.00582E-08
 17.100  7.14619E-10  1.45297E-09  1.60246E-09  1.50896E-09  1.35284E-09  1.45449E-08  2.88361E-08  2.94727E-08  2.36853E-08  1.64823E-08
 17.200  5.89863E-10  1.20593E-09  1.34388E-09  1.27744E-09  1.14807E-09  1.14510E-08  2.27868E-08  2.34822E-08  1.90921E-08  1.34583E-08
 17.300  4.84257E-10  9.94899E-10  1.11892E-09  1.07240E-09  9.65900E-10  8.97822E-09  1.79288E-08  1.86200E-08  1.53057E-08  1.09209E-08
 17.400  3.95378E-10  8.15860E-10  9.25026E-10  8.93017E-10  8.05897E-10  7.01021E-09  1.40453E-08  1.46939E-08  1.22039E-08  8.80788E-09
 17.500  3.21023E-10  6.65015E-10  7.59427E-10  7.37840E-10  6.67028E-10  5.45065E-09  1.09549E-08  1.15403E-08  9.67858E-09  7.06107E-09
 17.600  2.59195E-10  5.38803E-10  6.19221E-10  6.05021E-10  5.47826E-10  4.22014E-09  8.50687E-09  9.02024E-09  7.63501E-09  5.62726E-09
 17.700  2.08099E-10  4.33928E-10  5.01517E-10  4.92470E-10  4.46562E-10  3.25352E-09  6.57673E-09  7.01686E-09  5.99118E-09  4.45850E-09
 17.800  1.66134E-10  3.47380E-10  4.03509E-10  3.97994E-10  3.61373E-10  2.49755E-09  5.06199E-09  5.43242E-09  4.67668E-09  3.51221E-09
 17.900  1.31883E-10  2.76443E-10  3.22550E-10  3.19404E-10  2.90370E-10  1.90898E-09  3.87879E-09  4.18576E-09  3.63163E-09  2.75111E-09
 18.000  1.04103E-10  2.18694E-10  2.56189E-10  2.54591E-10  2.31712E-10  1.45279E-09  2.95890E-09  3.20987E-09  2.80558E-09  2.14289E-09
 18.100  8.17119E-11  1.71995E-10  2.02203E-10  2.01582E-10  1.83661E-10  1.10081E-09  2.24709E-09  2.44985E-09  2.15634E-09  1.65992E-09
 18.200  6.37766E-11  1.34480E-10  1.58606E-10  1.58572E-10  1.44619E-10  8.30475E-10  1.69888E-09  1.86094E-09  1.64892E-09  1.27879E-09
 18.300  4.94998E-11  1.04541E-10  1.23651E-10  1.23944E-10  1.13145E-10  6.23787E-10  1.27866E-09  1.40694E-09  1.25455E-09  9.79858E-10
 18.400  3.82051E-11  8.08027E-11  9.58202E-11  9.62732E-11  8.79640E-11  4.66487E-10  9.58067E-10  1.05869E-09  9.49717E-10  7.46797E-10
 18.500  2.93245E-11  6.21001E-11  7.38135E-11  7.43209E-11  6.79648E-11  3.47323E-10  7.14640E-10  7.92913E-10  7.15377E-10  5.66164E-10
 18.600  2.23844E-11  4.74580E-11  5.65288E-11  5.70284E-11  5.21943E-11  2.57463E-10  5.30675E-10  5.91080E-10  5.36198E-10  4.26979E-10
 18.700  1.69934E-11  3.60662E-11  4.30419E-11  4.34999E-11  3.98445E-11  1.90014E-10  3.92303E-10  4.38570E-10  3.99925E-10  3.20345E-10
 18.800  1.28308E-11  2.72576E-11  3.25861E-11  3.29871E-11  3.02386E-11  1.39618E-10  2.88715E-10  3.23901E-10  2.96830E-10  2.39109E-10
 18.900  9.63570E-12  2.04876E-11  2.45316E-11  2.48713E-11  2.28163E-11  1.02138E-10  2.11530E-10  2.38107E-10  2.19245E-10  1.77568E-10
 19.000  7.19756E-12  1.53156E-11  1.83654E-11  1.86460E-11  1.71182E-11  7.43909E-11  1.54289E-10  1.74231E-10  1.61159E-10  1.31202E-10
 19.100  5.34785E-12  1.13878E-11  1.36737E-11  1.39008E-11  1.27712E-11  5.39441E-11  1.12036E-10  1.26905E-10  1.17895E-10  9.64592E-11
 19.200  3.95259E-12  8.42227E-12  1.01253E-11  1.03061E-11  9.47550E-12  3.89459E-11  8.09934E-11  9.20120E-11  8.58355E-11  7.05656E-11
 19.300  2.90612E-12  6.19616E-12  7.45753E-12  7.59947E-12  6.99201E-12  2.79946E-11  5.82924E-11  6.64088E-11  6.21987E-11  5.13696E-11
 19.400  2.12564E-12  4.53462E-12  5.46350E-12  5.57355E-12  5.13170E-12  2.00348E-11  4.17686E-11  4.77124E-11  4.48591E-11  3.72134E-11
 19.500  1.54679E-12  3.30146E-12  3.98163E-12  4.06601E-12  3.74635E-12  1.42758E-11  2.97967E-11  3.41248E-11  3.22022E-11  2.68281E-11
 19.600  1.11983E-12  2.39131E-12  2.88661E-12  2.95068E-12  2.72063E-12  1.01279E-11  2.11628E-11  2.42968E-11  2.30092E-11  1.92484E-11
 19.700  8.06633E-13  1.72326E-12  2.08198E-12  2.13018E-12  1.96550E-12  7.15402E-12  1.49647E-11  1.72217E-11  1.63646E-11  1.37444E-11
 19.800  5.78117E-13  1.23558E-12  1.49399E-12  1.52994E-12  1.41267E-12  5.03148E-12  1.05356E-11  1.21524E-11  1.15855E-11  9.76790E-12
 19.900  4.12278E-13  8.81486E-13  1.06665E-12  1.09326E-12  1.01018E-12  3.52339E-12  7.38505E-12  8.53712E-12  8.16458E-12  6.90931E-12
  67 219 200   0.100
  0.000  4.63590E-02 -2.32738E-16 -3.85109E-16 -5.19135E-16  2.43183E-16  1.00737E-01 -5.43054E-16 -8.11851E-16 -8.50630E-16 -6.86635E-16
  0.100  4.63800E-02 -2.69269E-05 -1.89720E-08 -6.12554E-12 -4.09835E-15  1.00744E-01 -2.75004E-05 -4.74902E-09  6.10325E-12  4.67770E-15
  0.200  4.64426E-02 -1.06619E-04 -3.00995E-07 -3.88475E-10 -3.55784E-13  1.00766E-01 -1.07678E-04 -7.42993E-08  3.88872E-10 -7.16818E-14
  0.300  4.65456E-02 -2.35848E-04 -1.50243E-06 -4.35933E-09 -9.01821E-12  1.00799E-01 -2.33739E-04 -3.62127E-07  4.39746E-09 -2.14515E-12
  0.400  4.66872E-02 -4.09356E-04 -4.65540E-06 -2.39864E-08 -8.82944E-11  1.00842E-01 -3.94926E-04 -1.08384E-06  2.44546E-08 -1.84202E-11
  0.500  4.68648E-02 -6.20034E-04 -1.10797E-05 -8.90710E-08 -5.12956E-10  1.00889E-01 -5.77334E-04 -2.46128E-06  9.20483E-08 -8.97623E-11
  0.600  4.70750E-02 -8.59167E-04 -2.22688E-05 -2.57354E-07 -2.13759E-09  1.00938E-01 -7.64959E-04 -4.65266E-06  2.70349E-07 -2.85802E-10
  0.700  4.73142E-02 -1.11674E-03 -3.97571E-05 -6.24183E-07 -7.07014E-09  1.00982E-01 -9.40922E-04 -7.67683E-06  6.68348E-07 -5.98659E-10
  0.800  4.75780E-02 -1.38177E-03 -6.49796E-05 -1.32969E-06 -1.97164E-08  1.01017E-01 -1.08876E-03 -1.13408E-05  1.45502E-06 -5.47804E-10
  0.900  4.78617E-02 -1.64274E-03 -9.91325E-05 -2.56174E-06 -4.82005E-08  1.01039E-01 -1.19370E-03 -1.51807E-05  2.87176E-06  1.78593E-09
  1.000  4.81604E-02 -1.88797E-03 -1.43045E-04 -4.55329E-06 -1.06086E-07  1.01044E-01 -1.24386E-03 -1.84261E-05  5.24116E-06  1.16625E-08
  1.100  4.84690E-02 -2.10605E-03 -1.97070E-04 -7.57346E-06 -2.14238E-07  1.01030E-01 -1.23117E-03 -1.99965E-05  8.97022E-06  4.09073E-08
  1.200  4.87823E-02 -2.28630E-03 -2.61006E-04 -1.19123E-05 -4.02588E-07  1.00995E-01 -1.15210E-03 -1.85370E-05  1.45460E-05  1.12778E-07
  1.300  4.90951E-02 -2.41915E-03 -3.34048E-04 -1.78603E-05 -7.11504E-07  1.00942E-01 -1.00803E-03 -1.24961E-05  2.25219E-05  2.68610E-07
  1.400  4.94024E-02 -2.49654E-03 -4.14775E-04 -2.56834E-05 -1.19248E-06  1.00870E-01 -8.05256E-04 -2.46000E-07  3.34943E-05  5.76063E-07
  1.500  4.96994E-02 -2.51223E-03 -5.01180E-04 -3.55963E-05 -1.90783E-06  1.00785E-01 -5.54611E-04  1.97603E-05  4.80671E-05  1.13840E-06
  1.600  4.99817E-02 -2.46210E-03 -5.90725E-04 -4.77363E-05 -2.92926E-06  1.00690E-01 -2.70789E-04  4.88052E-05  6.68067E-05  2.10371E-06
  1.700  5.02452E-02 -2.34434E-03 -6.80438E-04 -6.21395E-05 -4.33508E-06  1.00593E-01  2.86792E-05  8.77107E-05  9.01870E-05  3.67269E-06
  1.800  5.04865E-02 -2.15956E-03 -7.67034E-04 -7.87218E-05 -6.20636E-06  1.00499E-01  3.24663E-04  1.36648E-04  1.18528E-04  6.10288E-06
  1.900  5.07026E-02 -1.91086E-03 -8.47049E-04 -9.72672E-05 -8.62191E-06  1.00416E-01  5.97815E-04  1.94977E-04  1.51933E-04  9.70760E-06
  2.000  5.08914E-02 -1.60374E-03 -9.16999E-04 -1.17423E-04 -1.16528E-05  1.00349E-01  8.29998E-04  2.61130E-04  1.90224E-04  1.48474E-05
  2.100  5.10514E-02 -1.24597E-03 -9.73531E-04 -1.38705E-04 -1.53566E-05  1.00306E-01  1.00566E-03  3.32567E-04  2.32886E-04  2.19126E-05
  2.200  5.11819E-02 -8.47353E-04 -1.01358E-03 -1.60507E-04 -1.97718E-05  1.00291E-01  1.11302E-03  4.05818E-04  2.79031E-04  3.12961E-05
  2.300  5.12831E-02 -4.19390E-04 -1.03453E-03 -1.82122E-04 -2.49135E-05  1.00306E-01  1.14503E-03  4.76610E-04  3.27375E-04  4.33567E-05
  2.400  5.13560E-02  2.51071E-05 -1.03432E-03 -2.02766E-04 -3.07700E-05  1.00353E-01  1.10000E-03  5.40096E-04  3.76245E-04  5.83740E-05
  2.500  5.14025E-02  4.72473E-04 -1.01158E-03 -2.21604E-04 -3.73015E-05  1.00431E-01  9.81794E-04  5.91170E-04  4.23618E-04  7.64993E-05
  2.600  5.14250E-02  9.08693E-04 -9.65703E-04 -2.37782E-04 -4.44402E-05  1.00536E-01  7.99678E-04  6.24843E-04  4.67192E-04  9.77045E-05
  2.700  5.14271E-02  1.31994E-03 -8.96934E-04 -2.50455E-04 -5.20927E-05  1.00663E-01  5.67742E-04  6.36662E-04  5.04498E-04  1.21736E-04
  2.800  5.14126E-02  1.69310E-03 -8.06388E-04 -2.58816E-04 -6.01433E-05  1.00805E-01  3.03960E-04  6.23139E-04  5.33036E-04  1.48077E-04
  2.900  5.13859E-02  2.01635E-03 -6.96063E-04 -2.62121E-04 -6.84599E-05  1.00954E-01  2.89669E-05  5.82137E-04  5.50441E-04  1.75931E-04
  3.000  5.13518E-02  2.27960E-03 -5.68824E-04 -2.59713E-04 -7.68986E-05  1.01101E-01 -2.35378E-04  5.13186E-04  5.54666E-04  2.04220E-04
  3.100  5.13151E-02  2.47500E-03 -4.28345E-04 -2.51043E-04 -8.53101E-05  1.01235E-01 -4.67511E-04  4.17688E-04  5.44171E-04  2.31609E-04
  3.200  5.12804E-02  2.59731E-03 -2.79032E-04 -2.35690E-04 -9.35443E-05  1.01348E-01 -6.47663E-04  2.98973E-04  5.18093E-04  2.56564E-04
  3.300  5.12518E-02  2.64421E-03 -1.25907E-04 -2.13376E-04 -1.01454E-04  1.01430E-01 -7.59220E-04  1.62197E-04  4.76398E-04  2.77428E-04
  3.400  5.12327E-02  2.61649E-03  2.55293E-05 -1.83991E-04 -1.08899E-04  1.01473E-01 -7.89840E-04  1.40771E-05  4.19984E-04  2.92522E-04
  3.500  5.12258E-02  2.51817E-03  1.69471E-04 -1.47605E-04 -1.15744E-04  1.01472E-01 -7.32227E-04 -1.37538E-04  3.50729E-04  3.00264E-04
  3.600  5.12320E-02  2.35646E-03  2.99997E-04 -1.04492E-04 -1.21859E-04  1.01420E-01 -5.84515E-04 -2.84223E-04  2.71469E-04  2.99300E-04
  3.700  5.12511E-02  2.14161E-03  4.11293E-04 -5.51483E-05 -1.27120E-04  1.01314E-01 -3.50225E-04 -4.17620E-04  1.85898E-04  2.88619E-04
  3.800  5.12811E-02  1.88663E-03  4.97876E-04 -3.10849E-07 -1.31403E-04  1.01151E-01 -3.77933E-05 -5.30119E-04  9.83983E-05  2.67671E-04
  3.900  5.13182E-02  1.60694E-03  5.54840E-04  5.90285E-05 -1.34587E-04  1.00930E-01  3.40275E-04 -6.15519E-04  1.37891E-05  2.36451E-04
  4.000  5.13567E-02  1.31980E-03  5.78092E-04  1.21615E-04 -1.36550E-04  1.00651E-01  7.68580E-04 -6.69598E-04 -6.29710E-05  1.95547E-04
  4.100  5.13889E-02  1.04377E-03  5.64586E-04  1.85932E-04 -1.37171E-04  1.00312E-01  1.23021E-03 -6.90550E-04 -1.27127E-04  1.46156E-04
  4.200  5.14056E-02  7.97984E-04  5.12524E-04  2.50217E-04 -1.36339E-04  9.99123E-02  1.70826E-03 -6.79226E-04 -1.74481E-04  9.00446E-05
  4.300  5.13959E-02  6.01454E-04  4.21529E-04  3.12490E-04 -1.33959E-04  9.94505E-02  2.18726E-03 -6.39162E-04 -2.01736E-04  2.94676E-05
  4.400  5.13475E-02  4.72289E-04  2.92771E-04  3.70605E-04 -1.29959E-04  9.89236E-02  2.65458E-03 -5.76373E-04 -2.06793E-04 -3.29522E-05
  4.500  5.12473E-02  4.26943E-04  1.29025E-04  4.22314E-04 -1.24310E-04  9.83272E-02  3.10151E-03 -4.98921E-04 -1.88980E-04 -9.43823E-05
  4.600  5.10817E-02  4.79497E-04 -6.53288E-05  4.65352E-04 -1.17037E-04  9.76556E-02  3.52400E-03 -4.16293E-04 -1.49191E-04 -1.51959E-04
  4.700  5.08370E-02  6.41004E-04 -2.84390E-04  4.97541E-04 -1.08234E-04  9.69014E-02  3.92306E-03 -3.38628E-04 -8.99069E-05 -2.02974E-04
  4.800  5.04999E-02  9.18930E-04 -5.20894E-04  5.16894E-04 -9.80756E-05  9.60558E-02  4.30468E-03 -2.75866E-04 -1.51134E-05 -2.45056E-04
  4.900  5.00581E-02  1.31673E-03 -7.66452E-04  5.21738E-04 -8.68277E-05  9.51089E-02  4.67934E-03 -2.36884E-04  6.99116E-05 -2.76334E-04
  5.000  4.95007E-02  1.83358E-03 -1.01186E-03  5.10819E-04 -7.48480E-05  9.40502E-02  5.06113E-03 -2.28692E-04  1.58906E-04 -2.95560E-04
  5.100  4.88186E-02  2.46424E-03 -1.24745E-03  4.83409E-04 -6.25831E-05  9.28689E-02  5.46658E-03 -2.55774E-04  2.45020E-04 -3.02192E-04
  5.200  4.80051E-02  3.19917E-03 -1.46354E-03  4.39385E-04 -5.05560E-05  9.15547E-02  5.91320E-03 -3.19613E-04  3.21263E-04 -2.96427E-04
  5.300  4.70557E-02  4.02473E-03 -1.65082E-03  3.79284E-04 -3.93458E-05  9.00981E-02  6.41798E-03 -4.18459E-04  3.80977E-04 -2.79178E-04
  5.400  4.59691E-02  4.92364E-03 -1.80082E-03  3.04325E-04 -2.95602E-05  8.84911E-02  6.99583E-03 -5.47355E-04  4.18295E-04 -2.52005E-04
  5.500  4.47463E-02  5.87556E-03 -1.90629E-03  2.16392E-04 -2.18017E-05  8.67278E-02  7.65815E-03 -6.98424E-04  4.28545E-04 -2.16992E-04
  5.600  4.33917E-02  6.85779E-03 -1.96160E-03  1.17975E-04 -1.66301E-05  8.48043E-02  8.41165E-03 -8.61392E-04  4.08574E-04 -1.76602E-04
  5.700  4.19120E-02  7.84609E-03 -1.96300E-03  1.20804E-05 -1.45243E-05  8.27196E-02  9.25745E-03 -1.02431E-03  3.56974E-04 -1.33501E-04
  5.800  4.03168E-02  8.81559E-03 -1.90883E-03 -9.78998E-05 -1.58453E-05  8.04755E-02  1.01906E-02 -1.17439E-03  2.74171E-04 -9.03794E-05
  5.900  3.86177E-02  9.74166E-03 -1.79962E-03 -2.08344E-04 -2.08054E-05  7.80765E-02  1.11999E-02 -1.29896E-03  1.62396E-04 -4.97792E-05
  6.000  3.68284E-02  1.06008E-02 -1.63810E-03 -3.15571E-04 -2.94448E-05  7.55299E-02  1.22683E-02 -1.38634E-03  2.55332E-05 -1.39375E-05
  6.100  3.49644E-02  1.13717E-02 -1.42902E-03 -4.16023E-04 -4.16187E-05  7.28460E-02  1.33734E-02 -1.42669E-03 -1.31146E-04  1.53365E-05
  6.200  3.30420E-02  1.20354E-02 -1.17901E-03 -5.06435E-04 -5.69965E-05  7.00371E-02  1.44889E-02 -1.41269E-03 -3.01334E-04  3.67490E-05
  6.300  3.10784E-02  1.25766E-02 -8.96183E-04 -5.83994E-04 -7.50730E-05  6.71180E-02  1.55855E-02 -1.34006E-03 -4.78089E-04  4.95673E-05
  6.400  2.90911E-02  1.29837E-02 -5.89790E-04 -6.46472E-04 -9.51920E-05  6.41052E-02  1.66322E-02 -1.20781E-03 -6.54272E-04  5.36239E-05
  6.500  2.70976E-02  1.32494E-02 -2.69775E-04 -6.92321E-04 -1.16580E-04  6.10167E-02  1.75986E-02 -1.01827E-03 -8.22968E-04  4.92814E-05
  6.600  2.51148E-02  1.33702E-02  5.36904E-05 -7.20723E-04 -1.38387E-04  5.78715E-02  1.84555E-02 -7.76941E-04 -9.77876E-04  3.73648E-05
  6.700  2.31588E-02  1.33472E-02  3.70663E-04 -7.31610E-04 -1.59736E-04  5.46896E-02  1.91770E-02 -4.92056E-04 -1.11363E-03  1.90687E-05
  6.800  2.12446E-02  1.31853E-02  6.71855E-04 -7.25630E-04 -1.79769E-04  5.14912E-02  1.97411E-02 -1.74036E-04 -1.22603E-03 -4.15103E-06
  6.900  1.93860E-02  1.28930E-02  9.49009E-04 -7.04076E-04 -1.97692E-04  4.82964E-02  2.01314E-02  1.65196E-04 -1.31224E-03 -3.06922E-05
  7.000  1.75949E-02  1.24818E-02  1.19521E-03 -6.68785E-04 -2.12822E-04  4.51253E-02  2.03368E-02  5.12951E-04 -1.37075E-03 -5.89184E-05
  7.100  1.58819E-02  1.19659E-02  1.40508E-03 -6.22014E-04 -2.24615E-04  4.19972E-02  2.03526E-02  8.56526E-04 -1.40145E-03 -8.72610E-05
  7.200  1.42558E-02  1.13613E-02  1.57496E-03 -5.66297E-04 -2.32691E-04  3.89304E-02  2.01800E-02  1.18389E-03 -1.40541E-03 -1.14304E-04
  7.300  1.27232E-02  1.06851E-02  1.70288E-03 -5.04300E-04 -2.36848E-04  3.59422E-02  1.98260E-02  1.48432E-03 -1.38479E-03 -1.38848E-04
  7.400  1.12895E-02  9.95520E-03  1.78855E-03 -4.38679E-04 -2.37061E-04  3.30484E-02  1.93029E-02  1.74884E-03 -1.34253E-03 -1.59955E-04
  7.500  9.95802E-03  9.18918E-03  1.83322E-03 -3.71955E-04 -2.33474E-04  3.02632E-02  1.86272E-02  1.97058E-03 -1.28217E-03 -1.76966E-04
  7.600  8.73038E-03  8.40406E-03  1.83948E-03 -3.06404E-04 -2.26381E-04  2.75989E-02  1.78190E-02  2.14499E-03 -1.20756E-03 -1.89503E-04
  7.700  7.60678E-03  7.61572E-03  1.81102E-03 -2.43975E-04 -2.16197E-04  2.50660E-02  1.69010E-02  2.26979E-03 -1.12263E-03 -1.97447E-04
  7.800  6.58597E-03  6.83846E-03  1.75236E-03 -1.86238E-04 -2.03431E-04  2.26726E-02  1.58969E-02  2.34493E-03 -1.03117E-03 -2.00912E-04
  7.900  5.66542E-03  6.08476E-03  1.66856E-03 -1.34351E-04 -1.88649E-04  2.04251E-02  1.48313E-02  2.37234E-03 -9.36683E-04 -2.00203E-04
  8.000  4.84150E-03  5.36503E-03  1.56496E-03 -8.90666E-05 -1.72443E-04  1.83276E-02  1.37279E-02  2.35562E-03 -8.42222E-04 -1.95766E-04
  8.100  4.10967E-03  4.68758E-03  1.44688E-03 -5.07488E-05 -1.55396E-04  1.63819E-02  1.26093E-02  2.29968E-03 -7.50335E-04 -1.88150E-04
  8.200  3.46464E-03  4.05857E-03  1.31946E-03 -1.94156E-05 -1.38060E-04  1.45881E-02  1.14960E-02  2.21032E-03 -6.63017E-04 -1.77953E-04
  8.300  2.90056E-03  3.48212E-03  1.18739E-03  5.20688E-06 -1.20927E-04  1.29443E-02  1.04063E-02  2.09387E-03 -5.81708E-04 -1.65791E-04
  8.400  2.41116E-03  2.96045E-03  1.05488E-03  2.36224E-05 -1.04421E-04  1.14469E-02  9.35527E-03  1.95684E-03 -5.07338E-04 -1.52261E-04
  8.500  1.98998E-03  2.49410E-03  9.25453E-04  3.65000E-05 -8.88791E-05  1.00908E-02  8.35549E-03  1.80554E-03 -4.40373E-04 -1.37914E-04
  8.600  1.63047E-03  2.08215E-03  8.01977E-04  4.46105E-05 -7.45561E-05  8.86970E-03  7.41636E-03  1.64588E-03 -3.80898E-04 -1.23242E-04
  8.700  1.32615E-03  1.72248E-03  6.86623E-04  4.87695E-05 -6.16204E-05  7.77616E-03  6.54450E-03  1.48314E-03 -3.28691E-04 -1.08660E-04
  8.800  1.07069E-03  1.41205E-03  5.80904E-04  4.97869E-05 -5.01624E-05  6.80203E-03  5.74389E-03  1.32184E-03 -2.83312E-04 -9.45089E-05
  8.900  8.58093E-04  1.14714E-03  4.85724E-04  4.84281E-05 -4.02031E-05  5.93864E-03  5.01619E-03  1.16570E-03 -2.44171E-04 -8.10484E-05
  9.000  6.82674E-04  9.23587E-04  4.01458E-04  4.53844E-05 -3.17055E-05  5.17699E-03  4.36104E-03  1.01761E-03 -2.10602E-04 -6.84676E-05
  9.100  5.39187E-04  7.37018E-04  3.28034E-04  4.12544E-05 -2.45874E-05  4.50801E-03  3.77644E-03  8.79644E-04 -1.81914E-04 -5.68895E-05
  9.200  4.22843E-04  5.83010E-04  2.65030E-04  3.65345E-05 -1.87341E-05  3.92275E-03  3.25908E-03  7.53152E-04 -1.57436E-04 -4.63811E-05
  9.300  3.29328E-04  4.57250E-04  2.11758E-04  3.16176E-05 -1.40097E-05  3.41250E-03  2.80474E-03  6.38847E-04 -1.36544E-04 -3.69630E-05
  9.400  2.54816E-04  3.55650E-04  1.67357E-04  2.67981E-05 -1.02684E-05  2.96899E-03  2.40854E-03  5.36910E-04 -1.18683E-04 -2.86196E-05
  9.500  1.95956E-04  2.74430E-04  1.30861E-04  2.22819E-05 -7.36314E-06  2.58442E-03  2.06524E-03  4.47092E-04 -1.03371E-04 -2.13084E-05
  9.600  1.49852E-04  2.10170E-04  1.01267E-04  1.81985E-05 -5.15264E-06  2.25159E-03  1.76949E-03  3.68828E-04 -9.02064E-05 -1.49685E-05
  9.700  1.14036E-04  1.59839E-04  7.75855E-05  1.46157E-05 -3.50641E-06  1.96388E-03  1.51599E-03  3.01330E-04 -7.88550E-05 -9.52785E-06
  9.800  8.64309E-05  1.20802E-04  5.88774E-05  1.15527E-05 -2.30815E-06  1.71534E-03  1.29966E-03  2.43673E-04 -6.90483E-05 -4.90883E-06
  9.900  6.53118E-05  9.08083E-05  4.42815E-05  8.99410E-06 -1.45738E-06  1.50064E-03  1.11571E-03  1.94866E-04 -6.05699E-05 -1.03296E-06
 10.000  4.92642E-05  6.79662E-05  3.30304E-05  6.90122E-06 -8.69858E-07  1.31507E-03  9.59736E-04  1.53905E-04 -5.32461E-05  2.17594E-06
 10.100  3.71434E-05  5.07136E-05  2.44573E-05  5.22176E-06 -4.76964E-07  1.15448E-03  8.27757E-04  1.19817E-04 -4.69354E-05  4.78960E-06
 10.200  2.80346E-05  3.77800E-05  1.79961E-05  3.89754E-06 -2.24343E-07  1.01528E-03  7.16209E-04  9.16872E-05 -4.15198E-05  6.87415E-06
 10.300  2.12157E-05  2.81472E-05  1.31768E-05  2.87011E-06 -7.01547E-08  8.94366E-04  6.21953E-04  6.86767E-05 -3.68979E-05  8.48963E-06
 10.400  1.61233E-05  2.10113E-05  9.61625E-06  2.08460E-06  1.68959E-08  7.89079E-04  5.42256E-04  5.00304E-05 -3.29789E-05  9.69017E-06
 10.500  1.23236E-05  1.57462E-05  7.00861E-06  1.49201E-06  5.95414E-08  6.97149E-04  4.74758E-04  3.50794E-05 -2.96795E-05  1.05245E-05
 10.600  9.48557E-06  1.18707E-05  5.11356E-06  1.05035E-06  7.38108E-08  6.16651E-04  4.17445E-04  2.32386E-05 -2.69210E-05  1.10366E-05
 10.700  7.35964E-06  9.01955E-06  3.74549E-06  7.24791E-07  7.06780E-08  5.45959E-04  3.68607E-04  1.40007E-05 -2.46285E-05  1.12667E-05
 10.800  5.75928E-06  6.91865E-06  2.76313E-06  4.87298E-07  5.74498E-08  4.83700E-04  3.26807E-04  6.92899E-06 -2.27307E-05  1.12519E-05
 10.900  4.54624E-06  5.36437E-06  2.06044E-06  3.15859E-07  3.88804E-08  4.28720E-04  2.90844E-04  1.64908E-06 -2.11595E-05  1.10269E-05
 11.000  3.61878E-06  4.20687E-06  1.55874E-06  1.93553E-07  1.80224E-08  3.80046E-04  2.59722E-04 -2.15879E-06 -1.98518E-05  1.06245E-05
 11.100  2.90242E-06  3.33673E-06  1.20028E-06  1.07594E-07 -3.15679E-09  3.36862E-04  2.32619E-04 -4.76718E-06 -1.87490E-05  1.00761E-05
 11.200  2.34284E-06  2.67463E-06  9.43044E-07  4.84408E-08 -2.33560E-08  2.98477E-04  2.08859E-04 -6.40804E-06 -1.77989E-05  9.41173E-06
 11.300  1.90054E-06  2.16342E-06  7.56708E-07  9.01945E-09 -4.16765E-08  2.64307E-04  1.87894E-04 -7.27848E-06 -1.69553E-05  8.65991E-06
 11.400  1.54679E-06  1.76211E-06  6.19557E-07 -1.59088E-08 -5.74724E-08  2.33856E-04  1.69278E-04 -7.54560E-06 -1.61793E-05  7.84774E-06
 11.500  1.26068E-06  1.44149E-06  5.16175E-07 -3.02448E-08 -7.02794E-08  2.06703E-04  1.52650E-04 -7.35064E-06 -1.54389E-05  7.00051E-06
 11.600  1.02698E-06  1.18087E-06  4.35749E-07 -3.69224E-08 -7.97897E-08  1.82484E-04  1.37719E-04 -6.81242E-06 -1.47089E-05  6.14142E-06
 11.700  8.34549E-07  9.65670E-07  3.70817E-07 -3.81771E-08 -8.58510E-08  1.60883E-04  1.24254E-04 -6.03029E-06 -1.39710E-05  5.29133E-06
 11.800  6.75181E-07  7.85695E-07  3.16358E-07 -3.57326E-08 -8.84712E-08  1.41629E-04  1.12067E-04 -5.08665E-06 -1.32132E-05  4.46838E-06
 11.900  5.42798E-07  6.33857E-07  2.69114E-07 -3.09291E-08 -8.78177E-08  1.24481E-04  1.01007E-04 -4.04904E-06 -1.24290E-05  3.68789E-06
 12.000  4.32834E-07  5.05237E-07  2.27083E-07 -2.48092E-08 -8.42086E-08  1.09225E-04  9.09518E-05 -2.97216E-06 -1.16165E-05  2.96217E-06
 12.100  3.41789E-07  3.96384E-07  1.89142E-07 -1.81781E-08 -7.80899E-08  9.56734E-05  8.18020E-05 -1.89943E-06 -1.07781E-05  2.30050E-06
 12.200  2.66913E-07  3.04812E-07  1.54743E-07 -1.16450E-08 -7.00048E-08  8.36549E-05  7.34741E-05 -8.64611E-07 -9.91933E-06  1.70923E-06
 12.300  2.05967E-07  2.28632E-07  1.23695E-07 -5.65550E-09 -6.05545E-08  7.30164E-05  6.58972E-05  1.06925E-07 -9.04781E-06  1.19191E-06
 12.400  1.57058E-07  1.66285E-07  9.59919E-08 -5.17197E-10 -5.03573E-08  6.36184E-05  5.90103E-05  9.96917E-07 -8.17279E-06  7.49571E-07
 12.500  1.18530E-07  1.16376E-07  7.16887E-08  3.57860E-09 -4.00080E-08  5.53341E-05  5.27589E-05  1.79314E-06 -7.30427E-06  3.81002E-07
 12.600  8.88882E-08  7.75642E-08  5.08223E-08  6.53758E-09 -3.00427E-08  4.80477E-05  4.70939E-05  2.48842E-06 -6.45234E-06  8.31282E-08
 12.700  6.67598E-08  4.85105E-08  3.33606E-08  8.34535E-09 -2.09108E-08  4.16536E-05  4.19702E-05  3.07973E-06 -5.62668E-06 -1.48634E-07
 12.800  5.08720E-08  2.78644E-08  1.91817E-08  9.05204E-09 -1.29553E-08  3.60551E-05  3.73452E-05  3.56744E-06 -4.83609E-06 -3.19995E-07
 12.900  4.00496E-08  1.42756E-08  8.07281E-09  8.75842E-09 -6.40415E-09  3.11642E-05  3.31794E-05  3.95461E-06 -4.08822E-06 -4.37436E-07
 13.000  3.32188E-08  6.42252E-09 -2.56123E-10  7.60335E-09 -1.36956E-09  2.69007E-05  2.94348E-05  4.24637E-06 -3.38931E-06 -5.07878E-07
 13.100  2.94157E-08  3.04747E-09 -6.15023E-09  5.75218E-09  2.14391E-09  2.31919E-05  2.60760E-05  4.44941E-06 -2.74412E-06 -5.38389E-07
 13.200  2.77953E-08  2.99120E-09 -9.98403E-09  3.38611E-09  4.22491E-09  1.99720E-05  2.30689E-05  4.57147E-06 -2.15589E-06 -5.35936E-07
 13.300  2.76371E-08  5.22233E-09 -1.21363E-08  6.92332E-10  5.03628E-09  1.71816E-05  2.03820E-05  4.62100E-06 -1.62639E-06 -5.07190E-07
 13.400  2.83476E-08  8.85806E-09 -1.29683E-08 -2.14505E-09  4.79360E-09  1.47675E-05  1.79852E-05  4.60679E-06 -1.15603E-06 -4.58366E-07
 13.500  2.94574E-08  1.31749E-08 -1.28075E-08 -4.95313E-09  3.74321E-09  1.26822E-05  1.58507E-05  4.53768E-06 -7.44009E-07 -3.95120E-07
 13.600  3.06139E-08  1.76096E-08 -1.19367E-08 -7.57726E-09  2.14137E-09  1.08833E-05  1.39526E-05  4.42234E-06 -3.88485E-07 -3.22473E-07
 13.700  3.15704E-08  2.17510E-08 -1.05890E-08 -9.88675E-09  2.35927E-10  9.33335E-06  1.22671E-05  4.26906E-06 -8.67588E-08 -2.44781E-07
 13.800  3.21717E-08  2.53252E-08 -8.94826E-09 -1.17790E-08 -1.74852E-09  7.99925E-06  1.07722E-05  4.08565E-06  1.64528E-07 -1.65728E-07
 13.900  3.23383E-08  2.81758E-08 -7.15247E-09 -1.31822E-08 -3.62157E-09  6.85194E-06  9.44792E-06  3.87929E-06  3.69219E-07 -8.83369E-08
 14.000  3.20505E-08  3.02415E-08 -5.30042E-09 -1.40557E-08 -5.23378E-09  5.86597E-06  8.27608E-06  3.65651E-06  5.31469E-07 -1.50084E-08
 14.100  3.13326E-08  3.15337E-08 -3.45930E-09 -1.43894E-08 -6.47960E-09  5.01914E-06  7.24020E-06  3.42310E-06  6.55602E-07  5.24360E-08
 14.200  3.02379E-08  3.21143E-08 -1.67261E-09 -1.42013E-08 -7.29682E-09  4.29215E-06  6.32541E-06  3.18415E-06  7.45974E-07  1.12699E-07
 14.300  2.88372E-08  3.20767E-08  3.25335E-11 -1.35332E-08 -7.66323E-09  3.66828E-06  5.51836E-06  2.94400E-06  8.06872E-07  1.64949E-07
 14.400  2.72081E-08  3.15298E-08  1.63924E-09 -1.24465E-08 -7.59111E-09  3.13305E-06  4.80706E-06  2.70635E-06  8.42429E-07  2.08758E-07
 14.500  2.54271E-08  3.05854E-08  3.13615E-09 -1.10170E-08 -7.12052E-09  2.67399E-06  4.18079E-06  2.47422E-06  8.56555E-07  2.44039E-07
 14.600  2.35648E-08  2.93489E-08  4.51425E-09 -9.32854E-09 -6.31187E-09  2.28034E-06  3.62998E-06  2.25003E-06  8.52892E-07  2.70986E-07
 14.700  2.16815E-08  2.79136E-08  5.76503E-09 -7.46866E-09 -5.23846E-09  1.94287E-06  3.14609E-06  2.03569E-06  8.34782E-07  2.90023E-07
 14.800  1.98265E-08  2.63576E-08  6.87984E-09 -5.52307E-09 -3.97965E-09  1.65364E-06  2.72151E-06  1.83261E-06  8.05250E-07  3.01739E-07
 14.900  1.80370E-08  2.47430E-08  7.84999E-09 -3.57171E-09 -2.61477E-09  1.40582E-06  2.34947E-06  1.64175E-06  7.66998E-07  3.06851E-07
 15.000  1.63394E-08  2.31164E-08  8.66751E-09 -1.68544E-09 -1.21823E-09  1.19359E-06  2.02392E-06  1.46376E-06  7.22404E-07  3.06153E-07
 15.100  1.47501E-08  2.15109E-08  9.32603E-09  7.62922E-11  1.44163E-10  1.01193E-06  1.73952E-06  1.29892E-06  6.73534E-07  3.00481E-07
 15.200  1.32773E-08  1.99482E-08  9.82167E-09  1.66683E-09  1.41767E-09  8.56532E-07  1.49148E-06  1.14728E-06  6.22152E-07  2.90677E-07
 15.300  1.19232E-08  1.84414E-08  1.01539E-08  3.05274E-09  2.55989E-09  7.23718E-07  1.27557E-06  1.00866E-06  5.69745E-07  2.77567E-07
 15.400  1.06851E-08  1.69973E-08  1.03258E-08  4.21354E-09  3.54105E-09  6.10316E-07  1.08800E-06  8.82708E-07  5.17536E-07  2.61931E-07
 15.500  9.55752E-09  1.56186E-08  1.03444E-08  5.14067E-09  4.34350E-09  5.13604E-07  9.25409E-07  7.68944E-07  4.66511E-07  2.44495E-07
 15.600  8.53290E-09  1.43053E-08  1.02205E-08  5.83607E-09  4.96052E-09  4.31239E-07  7.84810E-07  6.66771E-07  4.17442E-07  2.25910E-07
 15.700  7.60309E-09  1.30565E-08  9.96801E-09  6.31045E-09  5.39476E-09  3.61205E-07  6.63538E-07  5.75520E-07  3.70910E-07  2.06752E-07
 15.800  6.75983E-09  1.18711E-08  9.60355E-09  6.58131E-09  5.65640E-09  3.01763E-07  5.59219E-07  4.94472E-07  3.27325E-07  1.87514E-07
 15.900  5.99529E-09  1.07481E-08  9.14544E-09  6.67105E-09  5.76132E-09  2.51413E-07  4.69744E-07  4.22876E-07  2.86958E-07  1.68604E-07
 16.000  5.30233E-09  9.68711E-09  8.61297E-09  6.60513E-09  5.72919E-09  2.08859E-07  3.93236E-07  3.59971E-07  2.49951E-07  1.50354E-07
 16.100  4.67461E-09  8.68813E-09  8.02556E-09  6.41042E-09  5.58190E-09  1.72981E-07  3.28028E-07  3.04997E-07  2.16349E-07  1.33017E-07
 16.200  4.10660E-09  7.75158E-09  7.40198E-09  6.11374E-09  5.34202E-09  1.42813E-07  2.72638E-07  2.57211E-07  1.86110E-07  1.16779E-07
 16.300  3.59352E-09  6.87803E-09  6.75972E-09  5.74080E-09  5.03167E-09  1.17517E-07  2.25756E-07  2.15892E-07  1.59128E-07  1.01763E-07
 16.400  3.13116E-09  6.06794E-09  6.11451E-09  5.31528E-09  4.67157E-09  9.63716E-08  1.86221E-07  1.80357E-07  1.35246E-07  8.80386E-08
 16.500  2.71582E-09  5.32151E-09  5.47999E-09  4.85823E-09  4.28043E-09  7.87516E-08  1.53009E-07  1.49956E-07  1.14273E-07  7.56310E-08
 16.600  2.34414E-09  4.63846E-09  4.86750E-09  4.38778E-09  3.87452E-09  6.41191E-08  1.25219E-07  1.24088E-07  9.59915E-08  6.45271E-08
 16.700  2.01301E-09  4.01792E-09  4.28599E-09  3.91895E-09  3.46745E-09  5.20104E-08  1.02060E-07  1.02192E-07  8.01723E-08  5.46847E-08
 16.800  1.71947E-09  3.45843E-09  3.74216E-09  3.46371E-09  3.07020E-09  4.20270E-08  8.28404E-08  8.37565E-08  6.65802E-08  4.60397E-08
 16.900  1.46068E-09  2.95785E-09  3.24054E-09  3.03112E-09  2.69118E-09  3.38273E-08  6.69588E-08  6.83178E-08  5.49818E-08  3.85121E-08
 17.000  1.23386E-09  2.51348E-09  2.78374E-09  2.62765E-09  2.33647E-09  2.71190E-08  5.38923E-08  5.54572E-08  4.51513E-08  3.20119E-08
 17.100  1.03628E-09  2.12212E-09  2.37270E-09  2.25745E-09  2.01006E-09  2.16530E-08  4.31895E-08  4.48008E-08  3.68741E-08  2.64437E-08
 17.200  8.65281E-10  1.78017E-09  2.00696E-09  1.92272E-09  1.71420E-09  1.72176E-08  3.44622E-08  3.60178E-08  2.99498E-08  2.17106E-08
 17.300  7.18247E-10  1.48372E-09  1.68499E-09  1.62406E-09  1.44965E-09  1.36338E-08  2.73782E-08  2.88171E-08  2.41940E-08  1.77176E-08
 17.400  5.92669E-10  1.22873E-09  1.40438E-09  1.36083E-09  1.21604E-09  1.07505E-08  2.16546E-08  2.29449E-08  1.94393E-08  1.43734E-08
 17.500  4.86141E-10  1.01110E-09  1.16218E-09  1.13145E-09  1.01212E-09  8.44090E-09  1.70516E-08  1.81812E-08  1.55358E-08  1.15923E-08
 17.600  3.96389E-10  8.26755E-10  9.55046E-10  9.33685E-10  8.36041E-10  6.59905E-09  1.33672E-08  1.43372E-08  1.23504E-08  9.29542E-09
 17.700  3.21287E-10  6.71790E-10  7.79472E-10  7.64876E-10  6.85534E-10  5.13681E-09  1.04320E-08  1.12516E-08  9.76665E-09  7.41127E-09
 17.800  2.58871E-10  5.42485E-10  6.31915E-10  6.22147E-10  5.58117E-10  3.98118E-09  8.10470E-09  8.78763E-09  7.68318E-09  5.87585E-09
 17.900  2.07349E-10  4.35376E-10  5.08923E-10  5.02554E-10  4.51228E-10  3.07205E-09  6.26826E-09  6.83037E-09  6.01292E-09  4.63267E-09
 18.000  1.65107E-10  3.47289E-10  4.07225E-10  4.03212E-10  3.62340E-10  2.36011E-09  4.82604E-09  5.28368E-09  4.68160E-09  3.63248E-09
 18.100  1.30704E-10  2.75357E-10  3.23782E-10  3.21374E-10  2.89037E-10  1.80518E-09  3.69886E-09  4.06773E-09  3.62647E-09  2.83279E-09
 18.200  1.02870E-10  2.17024E-10  2.55832E-10  2.54493E-10  2.29072E-10  1.37462E-09  2.82211E-09  3.11672E-09  2.79493E-09  2.19729E-09
 18.300  8.04983E-11  1.70041E-10  2.00901E-10  2.00255E-10  1.80397E-10  1.04213E-09  2.14343E-09  2.37673E-09  2.14324E-09  1.69531E-09
 18.400  6.26329E-11  1.32454E-10  1.56813E-10  1.56600E-10  1.41182E-10  7.86553E-10  1.62060E-09  1.80387E-09  1.63530E-09  1.30113E-09
 18.500  4.84572E-11  1.02581E-10  1.21672E-10  1.21715E-10  1.09818E-10  5.91023E-10  1.21976E-09  1.36264E-09  1.24155E-09  9.93403E-10
 18.600  3.72801E-11  7.89931E-11  9.38525E-11  9.40349E-11  8.49103E-11  4.42129E-10  9.13909E-10  1.02450E-09  9.37973E-10  7.54547E-10
 18.700  2.85219E-11  6.04865E-11  7.19758E-11  7.22223E-11  6.52652E-11  3.29277E-10  6.81662E-10  7.66673E-10  7.05158E-10  5.70195E-10
 18.800  2.17014E-11  4.60577E-11  5.48840E-11  5.51482E-11  4.98747E-11  2.44143E-10  5.06143E-10  5.71059E-10  5.27555E-10  4.28703E-10
 18.900  1.64220E-11  3.48776E-11  4.16157E-11  4.18703E-11  3.78962E-11  1.80218E-10  3.74129E-10  4.23382E-10  3.92779E-10  3.20704E-10
 19.000  1.23600E-11  2.62675E-11  3.13800E-11  3.16107E-11  2.86328E-11  1.32442E-10  2.75306E-10  3.12445E-10  2.91032E-10  2.38720E-10
 19.100  9.25300E-12  1.96762E-11  2.35323E-11  2.37328E-11  2.15140E-11  9.69018E-11  2.01680E-10  2.29516E-10  2.14615E-10  1.76817E-10
 19.200  6.89039E-12  1.46603E-11  1.75517E-11  1.77208E-11  1.60768E-11  7.05859E-11  1.47084E-10  1.67826E-10  1.57514E-10  1.30325E-10
 19.300  5.10414E-12  1.08653E-11  1.30210E-11  1.31603E-11  1.19489E-11  5.11904E-11  1.06790E-10  1.22158E-10  1.15061E-10  9.55918E-11
 19.400  3.76133E-12  8.01067E-12  9.60878E-12  9.72142E-12  8.83365E-12  3.69614E-11  7.71910E-11  8.85127E-11  8.36569E-11  6.97776E-11
 19.500  2.75753E-12  5.87545E-12  7.05369E-12  7.14333E-12  6.49624E-12  2.65706E-11  5.55489E-11  6.38445E-11  6.05414E-11  5.06910E-11
 19.600  2.01131E-12  4.28728E-12  5.15126E-12  5.22163E-12  4.75249E-12  1.90175E-11  3.97984E-11  4.58441E-11  4.36106E-11  3.66505E-11
 19.700  1.45962E-12  3.11252E-12  3.74267E-12  3.79727E-12  3.45894E-12  1.35522E-11  2.83885E-11  3.27712E-11  3.12704E-11  2.63741E-11
 19.800  1.05395E-12  2.24829E-12  2.70549E-12  2.74739E-12  2.50467E-12  9.61561E-12  2.01611E-11  2.33218E-11  2.23196E-11  1.88904E-11
 19.900  7.57248E-13  1.61594E-12  1.94593E-12  1.97777E-12  1.80455E-12  6.79296E-12  1.42556E-11  1.65234E-11  1.58585E-11  1.34673E-11
  67 220 200   0.100
  0.000  4.66466E-02 -2.48253E-16 -3.95517E-16 -2.50185E-16 -1.82387E-15  1.01247E-01 -5.27539E-16 -7.91034E-16 -1.02576E-15 -7.43855E-16
  0.100  4.66666E-02 -2.75167E-05 -1.83638E-08 -6.38187E-12 -1.23737E-15  1.01262E-01 -1.70477E-05 -1.53240E-08  1.07279E-11  4.84364E-14
  0.200  4.67262E-02 -1.08929E-04 -2.91403E-07 -4.04810E-10 -3.40914E-13  1.01306E-01 -6.65181E-05 -2.41497E-07  6.83740E-10 -1.33465E-13
  0.300  4.68244E-02 -2.40864E-04 -1.45504E-06 -4.54307E-09 -8.55685E-12  1.01375E-01 -1.43526E-04 -1.19193E-06  7.69791E-09 -5.02136E-12
  0.400  4.69592E-02 -4.17836E-04 -4.51069E-06 -2.50008E-08 -8.37361E-11  1.01465E-01 -2.40357E-04 -3.63440E-06  4.25467E-08 -4.76003E-11
  0.500  4.71283E-02 -6.32440E-04 -1.07418E-05 -9.28545E-08 -4.86301E-10  1.01568E-01 -3.47083E-04 -8.46866E-06  1.58907E-07 -2.59853E-10
  0.600  4.73285E-02 -8.75625E-04 -2.16056E-05 -2.68343E-07 -2.02568E-09  1.01678E-01 -4.52357E-04 -1.65731E-05  4.62389E-07 -9.98083E-10
  0.700  4.75564E-02 -1.13702E-03 -3.86070E-05 -6.50998E-07 -6.69678E-09  1.01786E-01 -5.44328E-04 -2.86368E-05  1.13089E-06 -2.96778E-09
  0.800  4.78077E-02 -1.40530E-03 -6.31642E-05 -1.38721E-06 -1.86651E-08  1.01884E-01 -6.11624E-04 -4.49956E-05  2.43252E-06 -7.19651E-09
  0.900  4.80781E-02 -1.66863E-03 -9.64743E-05 -2.67338E-06 -4.56033E-08  1.01963E-01 -6.44307E-04 -6.54911E-05  4.73805E-06 -1.45827E-08
  1.000  4.83629E-02 -1.91507E-03 -1.39389E-04 -4.75331E-06 -1.00305E-07  1.02017E-01 -6.34747E-04 -8.93706E-05  8.52518E-06 -2.46395E-08
  1.100  4.86570E-02 -2.13307E-03 -1.92309E-04 -7.90896E-06 -2.02425E-07  1.02042E-01 -5.78337E-04 -1.15244E-04  1.43725E-05 -3.30027E-08
  1.200  4.89556E-02 -2.31183E-03 -2.55102E-04 -1.24447E-05 -3.80115E-07  1.02033E-01 -4.73994E-04 -1.41106E-04  2.29416E-05 -2.73037E-08
  1.300  4.92536E-02 -2.44181E-03 -3.27051E-04 -1.86655E-05 -6.71289E-07  1.01990E-01 -3.24392E-04 -1.64433E-04  3.49473E-05  1.88337E-08
  1.400  4.95461E-02 -2.51504E-03 -4.06839E-04 -2.68513E-05 -1.12423E-06  1.01913E-01 -1.35922E-04 -1.82347E-04  5.11154E-05  1.53627E-07
  1.500  4.98286E-02 -2.52549E-03 -4.92568E-04 -3.72285E-05 -1.79728E-06  1.01808E-01  8.16468E-05 -1.91845E-04  7.21306E-05  4.56352E-07
  1.600  5.00967E-02 -2.46928E-03 -5.81807E-04 -4.99421E-05 -2.75745E-06  1.01679E-01  3.15780E-04 -1.90066E-04  9.85762E-05  1.04701E-06
  1.700  5.03464E-02 -2.34491E-03 -6.71681E-04 -6.50302E-05 -4.07789E-06  1.01534E-01  5.52025E-04 -1.74594E-04  1.30868E-04  2.09506E-06
  1.800  5.05744E-02 -2.15334E-03 -7.58976E-04 -8.24038E-05 -5.83418E-06  1.01382E-01  7.75041E-04 -1.43748E-04  1.69188E-04  3.82530E-06
  1.900  5.07778E-02 -1.89802E-03 -8.40271E-04 -1.01833E-04 -8.09986E-06  1.01232E-01  9.69728E-04 -9.68472E-05  2.13422E-04  6.51898E-06
  2.000  5.09544E-02 -1.58477E-03 -9.12086E-04 -1.22943E-04 -1.09413E-05  1.01094E-01  1.12239E-03 -3.44124E-05  2.63101E-04  1.05079E-05
  2.100  5.11028E-02 -1.22165E-03 -9.71034E-04 -1.45216E-04 -1.44126E-05  1.00976E-01  1.22184E-03  4.17122E-05  3.17363E-04  1.61600E-05
  2.200  5.12224E-02 -8.18682E-04 -1.01397E-03 -1.68005E-04 -1.85503E-05  1.00886E-01  1.26030E-03  1.28347E-04  3.74929E-04  2.38551E-05
  2.300  5.13131E-02 -3.87527E-04 -1.03816E-03 -1.90551E-04 -2.33702E-05  1.00829E-01  1.23416E-03  2.21082E-04  4.34101E-04  3.39508E-05
  2.400  5.13762E-02  5.89303E-05 -1.04138E-03 -2.12013E-04 -2.88636E-05  1.00809E-01  1.14438E-03  3.14497E-04  4.92791E-04  4.67402E-05
  2.500  5.14133E-02  5.07033E-04 -1.02209E-03 -2.31496E-04 -3.49967E-05  1.00827E-01  9.96578E-04  4.02500E-04  5.48581E-04  6.24032E-05
  2.600  5.14271E-02  9.42859E-04 -9.79486E-04 -2.48082E-04 -4.17108E-05  1.00880E-01  8.00782E-04  4.78751E-04  5.98816E-04  8.09558E-05
  2.700  5.14210E-02  1.35274E-03 -9.13605E-04 -2.60867E-04 -4.89244E-05  1.00963E-01  5.70828E-04  5.37145E-04  6.40721E-04  1.02203E-04
  2.800  5.13989E-02  1.72380E-03 -8.25374E-04 -2.68991E-04 -5.65363E-05  1.01071E-01  3.23480E-04  5.72325E-04  6.71558E-04  1.25700E-04
  2.900  5.13652E-02  2.04446E-03 -7.16621E-04 -2.71665E-04 -6.44303E-05  1.01193E-01  7.73009E-05  5.80159E-04  6.88800E-04  1.50727E-04
  3.000  5.13246E-02  2.30496E-03 -5.90075E-04 -2.68205E-04 -7.24796E-05  1.01321E-01 -1.48615E-04  5.58166E-04  6.90314E-04  1.76290E-04
  3.100  5.12819E-02  2.49773E-03 -4.49321E-04 -2.58048E-04 -8.05517E-05  1.01443E-01 -3.35969E-04  5.05819E-04  6.74556E-04  2.01137E-04
  3.200  5.12416E-02  2.61784E-03 -2.98722E-04 -2.40781E-04 -8.85124E-05  1.01547E-01 -4.68532E-04  4.24706E-04  6.40742E-04  2.23811E-04
  3.300  5.12079E-02  2.66322E-03 -1.43318E-04 -2.16156E-04 -9.62283E-05  1.01623E-01 -5.33259E-04  3.18530E-04  5.89001E-04  2.42722E-04
  3.400  5.11841E-02  2.63490E-03  1.13183E-05 -1.84111E-04 -1.03569E-04  1.01663E-01 -5.21172E-04  1.92912E-04  5.20478E-04  2.56251E-04
  3.500  5.11727E-02  2.53705E-03  1.59255E-04 -1.44788E-04 -1.10406E-04  1.01656E-01 -4.27909E-04  5.50384E-05  4.37381E-04  2.62862E-04
  3.600  5.11746E-02  2.37696E-03  2.94398E-04 -9.85520E-05 -1.16614E-04  1.01598E-01 -2.53928E-04 -8.68583E-05  3.42958E-04  2.61238E-04
  3.700  5.11895E-02  2.16490E-03  4.10715E-04 -4.60052E-05 -1.22067E-04  1.01483E-01 -4.31484E-06 -2.24124E-04  2.41394E-04  2.50400E-04
  3.800  5.12151E-02  1.91381E-03  5.02482E-04  1.19966E-05 -1.26638E-04  1.01309E-01  3.11766E-04 -3.48374E-04  1.37631E-04  2.29830E-04
  3.900  5.12476E-02  1.63895E-03  5.64532E-04  7.43353E-05 -1.30198E-04  1.01073E-01  6.81952E-04 -4.52194E-04  3.71121E-05  1.99558E-04
  4.000  5.12810E-02  1.35738E-03  5.92508E-04  1.39628E-04 -1.32616E-04  1.00775E-01  1.09181E-03 -5.29777E-04 -5.45371E-05  1.60218E-04
  4.100  5.13077E-02  1.08736E-03  5.83111E-04  2.06234E-04 -1.33764E-04  1.00414E-01  1.52614E-03 -5.77449E-04 -1.31875E-04  1.13067E-04
  4.200  5.13181E-02  8.47710E-04  5.34314E-04  2.72275E-04 -1.33523E-04  9.99910E-02  1.97029E-03 -5.94031E-04 -1.90031E-04  5.99442E-05
  4.300  5.13012E-02  6.57076E-04  4.45545E-04  3.35674E-04 -1.31791E-04  9.95046E-02  2.41150E-03 -5.80985E-04 -2.25077E-04  3.19232E-06
  4.400  5.12448E-02  5.33208E-04  3.17825E-04  3.94206E-04 -1.28496E-04  9.89530E-02  2.83999E-03 -5.42345E-04 -2.34374E-04 -5.44730E-05
  4.500  5.11358E-02  4.92211E-04  1.53838E-04  4.45571E-04 -1.23609E-04  9.83330E-02  3.24986E-03 -4.84419E-04 -2.16839E-04 -1.10129E-04
  4.600  5.09606E-02  5.47857E-04 -4.20706E-05  4.87483E-04 -1.17159E-04  9.76397E-02  3.63964E-03 -4.15278E-04 -1.73122E-04 -1.60840E-04
  4.700  5.07054E-02  7.10949E-04 -2.63965E-04  5.17771E-04 -1.09249E-04  9.68667E-02  4.01248E-03 -3.44088E-04 -1.05667E-04 -2.03857E-04
  4.800  5.03574E-02  9.88790E-04 -5.04485E-04  5.34495E-04 -1.00062E-04  9.60057E-02  4.37591E-03 -2.80319E-04 -1.86423E-05 -2.36818E-04
  4.900  4.99044E-02  1.38477E-03 -7.55078E-04  5.36057E-04 -8.98741E-05  9.50472E-02  4.74128E-03 -2.32913E-04  8.22517E-05 -2.57924E-04
  5.000  4.93357E-02  1.89809E-03 -1.00632E-03  5.21316E-04 -7.90494E-05  9.39808E-02  5.12288E-03 -2.09479E-04  1.90104E-04 -2.66075E-04
  5.100  4.86429E-02  2.52370E-03 -1.24826E-03  4.89683E-04 -6.80377E-05  9.27958E-02  5.53670E-03 -2.15575E-04  2.97209E-04 -2.60962E-04
  5.200  4.78193E-02  3.25230E-03 -1.47091E-03  4.41201E-04 -5.73582E-05  9.14812E-02  5.99912E-03 -2.54160E-04  3.95558E-04 -2.43093E-04
  5.300  4.68611E-02  4.07065E-03 -1.66459E-03  3.76595E-04 -4.75772E-05  9.00273E-02  6.52552E-03 -3.25239E-04  4.77372E-04 -2.13768E-04
  5.400  4.57673E-02  4.96194E-03 -1.82047E-03  2.97284E-04 -3.92793E-05  8.84253E-02  7.12886E-03 -4.25760E-04  5.35620E-04 -1.74988E-04
  5.500  4.45395E-02  5.90635E-03 -1.93092E-03  2.05356E-04 -3.30319E-05  8.66686E-02  7.81846E-03 -5.49751E-04  5.64505E-04 -1.29313E-04
  5.600  4.31823E-02  6.88176E-03 -1.98995E-03  1.03509E-04 -2.93486E-05  8.47529E-02  8.59896E-03 -6.88698E-04  5.59869E-04 -7.96824E-05
  5.700  4.17028E-02  7.86452E-03 -1.99346E-03 -5.05798E-06 -2.86509E-05  8.26765E-02  9.46964E-03 -8.32137E-04  5.19475E-04 -2.92106E-05
  5.800  4.01107E-02  8.83030E-03 -1.93952E-03 -1.16777E-04 -3.12341E-05  8.04406E-02  1.04240E-02 -9.68394E-04  4.43173E-04  1.90293E-05
  5.900  3.84180E-02  9.75496E-03 -1.82840E-03 -2.27879E-04 -3.72386E-05  7.80496E-02  1.14498E-02 -1.08543E-03  3.32901E-04  6.22095E-05
  6.000  3.66383E-02  1.06154E-02 -1.66268E-03 -3.34568E-04 -4.66311E-05  7.55108E-02  1.25294E-02 -1.17173E-03  1.92563E-04  9.79279E-05
  6.100  3.47870E-02  1.13905E-02 -1.44704E-03 -4.33212E-04 -5.91956E-05  7.28342E-02  1.36405E-02 -1.21711E-03  2.77532E-05  1.24350E-04
  6.200  3.28803E-02  1.20616E-02 -1.18812E-03 -5.20518E-04 -7.45378E-05  7.00325E-02  1.47571E-02 -1.21347E-03 -1.54607E-04  1.40305E-04
  6.300  3.09350E-02  1.26132E-02 -8.94131E-04 -5.93695E-04 -9.21006E-05  6.71208E-02  1.58507E-02 -1.15538E-03 -3.46726E-04  1.45326E-04
  6.400  2.89683E-02  1.30336E-02 -5.74550E-04 -6.50584E-04 -1.11193E-04  6.41159E-02  1.68917E-02 -1.04041E-03 -5.40435E-04  1.39639E-04
  6.500  2.69971E-02  1.33151E-02 -2.39612E-04 -6.89754E-04 -1.31025E-04  6.10361E-02  1.78508E-02 -8.69334E-04 -7.27688E-04  1.24106E-04
  6.600  2.50378E-02  1.34538E-02  1.00134E-04 -7.10553E-04 -1.50756E-04  5.79010E-02  1.87004E-02 -6.46051E-04 -9.01022E-04  1.00123E-04
  6.700  2.31059E-02  1.34502E-02  4.34299E-04 -7.13114E-04 -1.69540E-04  5.47306E-02  1.94158E-02 -3.77294E-04 -1.05397E-03  6.94871E-05
  6.800  2.12159E-02  1.33084E-02  7.53104E-04 -6.98320E-04 -1.86574E-04  5.15453E-02  1.99763E-02 -7.21848E-05 -1.18136E-03  3.42517E-05
  6.900  1.93808E-02  1.30363E-02  1.04777E-03 -6.67719E-04 -2.01143E-04  4.83655E-02  2.03663E-02  2.58365E-04 -1.27954E-03 -3.42872E-06
  7.000  1.76121E-02  1.26447E-02  1.31087E-03 -6.23421E-04 -2.12659E-04  4.52109E-02  2.05752E-02  6.02337E-04 -1.34646E-03 -4.14443E-05
  7.100  1.59199E-02  1.21471E-02  1.53652E-03 -5.67950E-04 -2.20689E-04  4.21006E-02  2.05987E-02  9.47325E-04 -1.38168E-03 -7.78580E-05
  7.200  1.43124E-02  1.15587E-02  1.72058E-03 -5.04100E-04 -2.24974E-04  3.90527E-02  2.04377E-02  1.28124E-03 -1.38622E-03 -1.11009E-04
  7.300  1.27961E-02  1.08963E-02  1.86069E-03 -4.34774E-04 -2.25433E-04  3.60841E-02  2.00989E-02  1.59294E-03 -1.36241E-03 -1.39586E-04
  7.400  1.13760E-02  1.01772E-02  1.95625E-03 -3.62834E-04 -2.22161E-04  3.32099E-02  1.95938E-02  1.87278E-03 -1.31360E-03 -1.62664E-04
  7.500  1.00552E-02  9.41873E-03  2.00827E-03 -2.90967E-04 -2.15410E-04  3.04438E-02  1.89380E-02  2.11299E-03 -1.24388E-03 -1.79717E-04
  7.600  8.83549E-03  8.63779E-03  2.01921E-03 -2.21567E-04 -2.05567E-04  2.77977E-02  1.81507E-02  2.30798E-03 -1.15778E-03 -1.90598E-04
  7.700  7.71706E-03  7.85020E-03  1.99271E-03 -1.56654E-04 -1.93125E-04  2.52814E-02  1.72533E-02  2.45438E-03 -1.05997E-03 -1.95495E-04
  7.800  6.69877E-03  7.07040E-03  1.93337E-03 -9.78158E-05 -1.78642E-04  2.29027E-02  1.62688E-02  2.55108E-03 -9.54996E-04 -1.94874E-04
  7.900  5.77834E-03  6.31109E-03  1.84639E-03 -4.61809E-05 -1.62712E-04  2.06676E-02  1.52208E-02  2.59902E-03 -8.47074E-04 -1.89408E-04
  8.000  4.95240E-03  5.58301E-03  1.73733E-03 -2.42399E-06 -1.45930E-04  1.85799E-02  1.41322E-02  2.60094E-03 -7.39897E-04 -1.79910E-04
  8.100  4.21673E-03  4.89485E-03  1.61182E-03  3.32069E-05 -1.28859E-04  1.66414E-02  1.30251E-02  2.56108E-03 -6.36541E-04 -1.67260E-04
  8.200  3.56637E-03  4.25324E-03  1.47530E-03  6.08419E-05 -1.12008E-04  1.48521E-02  1.19197E-02  2.48475E-03 -5.39403E-04 -1.52344E-04
  8.300  2.99580E-03  3.66276E-03  1.33286E-03  8.09267E-05 -9.58130E-05  1.32100E-02  1.08339E-02  2.37801E-03 -4.50200E-04 -1.36002E-04
  8.400  2.49911E-03  3.12612E-03  1.18905E-03  9.41505E-05 -8.06240E-05  1.17119E-02  9.78315E-03  2.24724E-03 -3.69996E-04 -1.18993E-04
  8.500  2.07013E-03  2.64430E-03  1.04776E-03  1.01373E-04 -6.67010E-05  1.03529E-02  8.77994E-03  2.09883E-03 -2.99281E-04 -1.01963E-04
  8.600  1.70260E-03  2.21680E-03  9.12198E-04  1.03552E-04 -5.42143E-05  9.12672E-03  7.83405E-03  1.93890E-03 -2.38055E-04 -8.54335E-05
  8.700  1.39028E-03  1.84186E-03  7.84840E-04  1.01677E-04 -4.32511E-05  8.02645E-03  6.95251E-03  1.77303E-03 -1.85932E-04 -6.98006E-05
  8.800  1.12706E-03  1.51676E-03  6.67461E-04  9.67156E-05 -3.38248E-05  7.04422E-03  6.13977E-03  1.60613E-03 -1.42247E-04 -5.53383E-05
  8.900  9.07080E-04  1.23801E-03  5.61182E-04  8.95691E-05 -2.58875E-05  6.17166E-03  5.39797E-03  1.44234E-03 -1.06150E-04 -4.22117E-05
  9.000  7.24789E-04  1.00164E-03  4.66543E-04  8.10387E-05 -1.93442E-05  5.40008E-03  4.72725E-03  1.28498E-03 -7.67002E-05 -3.04937E-05
  9.100  5.75018E-04  8.03386E-04  3.83589E-04  7.18065E-05 -1.40660E-05  4.72069E-03  4.12607E-03  1.13654E-03 -5.29342E-05 -2.01837E-05
  9.200  4.53020E-04  6.38891E-04  3.11970E-04  6.24268E-05 -9.90399E-06  4.12479E-03  3.59156E-03  9.98779E-04 -3.39260E-05 -1.12264E-05
  9.300  3.54499E-04  5.03854E-04  2.51028E-04  5.33259E-05 -6.70009E-06  3.60389E-03  3.11987E-03  8.72741E-04 -1.88261E-05 -3.52955E-06
  9.400  2.75616E-04  3.94163E-04  1.99896E-04  4.48099E-05 -4.29725E-06  3.14988E-03  2.70641E-03  7.58901E-04 -6.88651E-06  3.02083E-06
  9.500  2.12993E-04  3.05977E-04  1.57575E-04  3.70781E-05 -2.54669E-06  2.75510E-03  2.34623E-03  6.57249E-04  2.52753E-06  8.54736E-06
  9.600  1.63690E-04  2.35795E-04  1.23006E-04  3.02385E-05 -1.31317E-06  2.41245E-03  2.03416E-03  5.67403E-04  9.93695E-06  1.31718E-05
  9.700  1.25188E-04  1.80492E-04  9.51298E-05  2.43263E-05 -4.78187E-07  2.11539E-03  1.76503E-03  4.88710E-04  1.57559E-05  1.70079E-05
  9.800  9.53527E-05  1.37328E-04  7.29266E-05  1.93213E-05  5.86011E-08  1.85801E-03  1.53386E-03  4.20333E-04  2.03043E-05  2.01578E-05
  9.900  7.24025E-05  1.03944E-04  5.54522E-05  1.51643E-05  3.79417E-07  1.63499E-03  1.33591E-03  3.61335E-04  2.38226E-05  2.27089E-05
 10.000  5.48664E-05  7.83472E-05  4.18560E-05  1.17716E-05  5.49450E-07  1.44162E-03  1.16680E-03  3.10735E-04  2.64885E-05  2.47348E-05
 10.100  4.15470E-05  5.88772E-05  3.13917E-05  9.04691E-06  6.18675E-07  1.27375E-03  1.02253E-03  2.67559E-04  2.84317E-05  2.62953E-05
 10.200  3.14811E-05  4.41743E-05  2.34196E-05  6.89081E-06  6.24056E-07  1.12777E-03  8.99525E-04  2.30878E-04  2.97481E-05  2.74384E-05
 10.300  2.39038E-05  3.31410E-05  1.74033E-05  5.20730E-06  5.91886E-07  1.00053E-03  7.94595E-04  1.99824E-04  3.05114E-05  2.82031E-05
 10.400  1.82146E-05  2.49042E-05  1.29019E-05  3.90838E-06  5.40053E-07  8.89358E-04  7.04964E-04  1.73612E-04  3.07818E-05  2.86208E-05
 10.500  1.39477E-05  1.87786E-05  9.55921E-06  2.91657E-06  4.80096E-07  7.91941E-04  6.28222E-04  1.51538E-04  3.06130E-05  2.87187E-05
 10.600  1.07456E-05  1.42335E-05  7.09301E-06  2.16593E-06  4.18970E-07  7.06324E-04  5.62303E-04  1.32983E-04  3.00565E-05  2.85209E-05
 10.700  8.33674E-06  1.08629E-05  5.28284E-06  1.60191E-06  3.60487E-07  6.30848E-04  5.05447E-04  1.17410E-04  2.91645E-05  2.80508E-05
 10.800  6.51694E-06  8.35939E-06  3.95906E-06  1.18055E-06  3.06426E-07  5.64112E-04  4.56169E-04  1.04353E-04  2.79904E-05  2.73322E-05
 10.900  5.13372E-06  6.49288E-06  2.99289E-06  8.67162E-07  2.57362E-07  5.04933E-04  4.13224E-04  9.34171E-05  2.65895E-05  2.63900E-05
 11.000  4.07411E-06  5.09259E-06  2.28764E-06  6.34891E-07  2.13232E-07  4.52316E-04  3.75576E-04  8.42621E-05  2.50178E-05  2.52513E-05
 11.100  3.25487E-06  4.03284E-06  1.77149E-06  4.63260E-07  1.73705E-07  4.05421E-04  3.42364E-04  7.66013E-05  2.33313E-05  2.39447E-05
 11.200  2.61494E-06  3.22177E-06  1.39153E-06  3.36830E-07  1.38401E-07  3.63538E-04  3.12882E-04  7.01913E-05  2.15839E-05  2.25010E-05
 11.300  2.10963E-06  2.59268E-06  1.10910E-06  2.44041E-07  1.06993E-07  3.26067E-04  2.86552E-04  6.48265E-05  1.98267E-05  2.09521E-05
 11.400  1.70629E-06  2.09744E-06  8.96173E-07  1.76271E-07  7.92470E-08  2.92498E-04  2.62900E-04  6.03329E-05  1.81065E-05  1.93307E-05
 11.500  1.38106E-06  1.70148E-06  7.32589E-07  1.27089E-07  5.50136E-08  2.62393E-04  2.41541E-04  5.65638E-05  1.64642E-05  1.76696E-05
 11.600  1.11649E-06  1.38016E-06  6.03997E-07  9.16848E-08  3.42012E-08  2.35377E-04  2.22165E-04  5.33947E-05  1.49346E-05  1.60006E-05
 11.700  8.99778E-07  1.11597E-06  5.00320E-07  6.64509E-08  1.67408E-08  2.11125E-04  2.04516E-04  5.07208E-05  1.35457E-05  1.43539E-05
 11.800  7.21453E-07  8.96556E-07  4.14607E-07  4.86757E-08  2.55363E-09  1.89353E-04  1.88389E-04  4.84527E-05  1.23182E-05  1.27575E-05
 11.900  5.74473E-07  7.13203E-07  3.42177E-07  3.63217E-08 -8.47403E-09  1.69811E-04  1.73615E-04  4.65151E-05  1.12655E-05  1.12359E-05
 12.000  4.53508E-07  5.59729E-07  2.79970E-07  2.78631E-08 -1.65077E-08  1.52277E-04  1.60052E-04  4.48435E-05  1.03941E-05  9.81052E-06
 12.100  3.54437E-07  4.31672E-07  2.26051E-07  2.21648E-08 -2.17719E-08  1.36553E-04  1.47585E-04  4.33832E-05  9.70413E-06  8.49838E-06
 12.200  2.73985E-07  3.25690E-07  1.79234E-07  1.83886E-08 -2.45496E-08  1.22461E-04  1.36112E-04  4.20873E-05  9.18985E-06  7.31249E-06
 12.300  2.09449E-07  2.39136E-07  1.38794E-07  1.59205E-08 -2.51748E-08  1.09840E-04  1.25547E-04  4.09159E-05  8.84044E-06  6.26156E-06
 12.400  1.58524E-07  1.69756E-07  1.04256E-07  1.43119E-08 -2.40198E-08  9.85439E-05  1.15814E-04  3.98349E-05  8.64097E-06  5.35014E-06
 12.500  1.19176E-07  1.15504E-07  7.52476E-08  1.32340E-08 -2.14800E-08  8.84386E-05  1.06844E-04  3.88151E-05  8.57330E-06  4.57881E-06
 12.600  8.95681E-08  7.44277E-08  5.13993E-08  1.24431E-08 -1.79560E-08  7.94027E-05  9.85744E-05  3.78321E-05  8.61699E-06  3.94458E-06
 12.700  6.80194E-08  4.46227E-08  3.22950E-08  1.17559E-08 -1.38364E-08  7.13252E-05  9.09474E-05  3.68651E-05  8.75028E-06  3.44128E-06
 12.800  5.29911E-08  2.42263E-08  1.74517E-08  1.10328E-08 -9.48078E-09  6.41047E-05  8.39097E-05  3.58972E-05  8.95088E-06  3.06008E-06
 12.900  4.30852E-08  1.14415E-08  6.32578E-09  1.01692E-08 -5.20575E-09  5.76492E-05  7.74117E-05  3.49147E-05  9.19682E-06  2.78998E-06
 13.000  3.70525E-08  4.57505E-09 -1.66463E-09  9.09068E-09 -1.27380E-09  5.18752E-05  7.14073E-05  3.39071E-05  9.46703E-06  2.61842E-06
 13.100  3.38022E-08  2.07927E-09 -7.10954E-09  7.75233E-09  2.11423E-09  4.67070E-05  6.58539E-05  3.28666E-05  9.74199E-06  2.53175E-06
 13.200  3.24107E-08  2.58923E-09 -1.05750E-08  6.13894E-09  4.82245E-09  4.20767E-05  6.07120E-05  3.17880E-05  1.00041E-05  2.51577E-06
 13.300  3.21238E-08  4.95004E-09 -1.25748E-08  4.26501E-09  6.77932E-09  3.79233E-05  5.59456E-05  3.06686E-05  1.02380E-05  2.55620E-06
 13.400  3.23538E-08  8.23093E-09 -1.35492E-08  2.17353E-09  7.97327E-09  3.41925E-05  5.15218E-05  2.95078E-05  1.04309E-05  2.63909E-06
 13.500  3.26699E-08  1.17255E-08 -1.38521E-08 -6.72833E-11  8.44523E-09  3.08360E-05  4.74109E-05  2.83069E-05  1.05725E-05  2.75116E-06
 13.600  3.27825E-08  1.49393E-08 -1.37473E-08 -2.36914E-09  8.27875E-09  2.78112E-05  4.35864E-05  2.70692E-05  1.06552E-05  2.88016E-06
 13.700  3.25238E-08  1.75671E-08 -1.34132E-08 -4.63069E-09  7.58861E-09  2.50804E-05  4.00246E-05  2.57991E-05  1.06737E-05  3.01501E-06
 13.800  3.18246E-08  1.94624E-08 -1.29526E-08 -6.74560E-09  6.50883E-09  2.26108E-05  3.67047E-05  2.45025E-05  1.06255E-05  3.14605E-06
 13.900  3.06916E-08  2.06039E-08 -1.24085E-08 -8.61095E-09  5.18105E-09  2.03738E-05  3.36083E-05  2.31860E-05  1.05100E-05  3.26513E-06
 14.000  2.91838E-08  2.10600E-08 -1.17806E-08 -1.01352E-08  3.74382E-09  1.83443E-05  3.07195E-05  2.18573E-05  1.03286E-05  3.36561E-06
 14.100  2.73926E-08  2.09559E-08 -1.10426E-08 -1.12447E-08  2.32372E-09  1.65006E-05  2.80242E-05  2.05242E-05  1.00846E-05  3.44246E-06
 14.200  2.54231E-08  2.04451E-08 -1.01571E-08 -1.18893E-08  1.02844E-09  1.48240E-05  2.55104E-05  1.91950E-05  9.78271E-06  3.49210E-06
 14.300  2.33806E-08  1.96846E-08 -9.08933E-09 -1.20444E-08 -5.78737E-11  1.32982E-05  2.31675E-05  1.78779E-05  9.42871E-06  3.51241E-06
 14.400  2.13599E-08  1.88183E-08 -7.81538E-09 -1.17122E-08 -8.76882E-10  1.19091E-05  2.09863E-05  1.65810E-05  9.02935E-06  3.50255E-06
 14.500  1.94385E-08  1.79643E-08 -6.32860E-09 -1.09205E-08 -1.39633E-09  1.06445E-05  1.89585E-05  1.53120E-05  8.59198E-06  3.46285E-06
 14.600  1.76732E-08  1.72093E-08 -4.64156E-09 -9.71897E-09 -1.60842E-09  9.49344E-06  1.70768E-05  1.40781E-05  8.12430E-06  3.39463E-06
 14.700  1.60995E-08  1.66063E-08 -2.78551E-09 -8.17538E-09 -1.52679E-09  8.44669E-06  1.53345E-05  1.28860E-05  7.63411E-06  3.30003E-06
 14.800  1.47330E-08  1.61776E-08 -8.07480E-10 -6.36986E-09 -1.18251E-09  7.49584E-06  1.37253E-05  1.17415E-05  7.12909E-06  3.18182E-06
 14.900  1.35719E-08  1.59185E-08  1.23413E-09 -4.38943E-09 -6.19486E-10  6.63346E-06  1.22433E-05  1.06496E-05  6.61664E-06  3.04326E-06
 15.000  1.26013E-08  1.58039E-08  3.27465E-09 -2.32248E-09  1.10222E-10  5.85279E-06  1.08826E-05  9.61427E-06  6.10366E-06  2.88788E-06
 15.100  1.17966E-08  1.57951E-08  5.24835E-09 -2.53735E-10  9.50915E-10  5.14771E-06  9.63769E-06  8.63885E-06  5.59649E-06  2.71938E-06
 15.200  1.11279E-08  1.58460E-08  7.09326E-09  1.73989E-09  1.84726E-09  4.51254E-06  8.50276E-06  7.72554E-06  5.10075E-06  2.54144E-06
 15.300  1.05633E-08  1.59090E-08  8.75509E-09  3.59252E-09  2.74761E-09  3.94203E-06  7.47216E-06  6.87570E-06  4.62133E-06  2.35764E-06
 15.400  1.00718E-08  1.59398E-08  1.01902E-08  5.25144E-09  3.60656E-09  3.43122E-06  6.54012E-06  6.08980E-06  4.16230E-06  2.17132E-06
 15.500  9.62534E-09  1.59010E-08  1.13673E-08  6.67812E-09  4.38669E-09  2.97544E-06  5.70081E-06  5.36751E-06  3.72695E-06  1.98556E-06
 15.600  9.20048E-09  1.57638E-08  1.22682E-08  7.84832E-09  5.05945E-09  2.57026E-06  4.94836E-06  4.70775E-06  3.31776E-06  1.80305E-06
 15.700  8.77900E-09  1.55094E-08  1.28874E-08  8.75133E-09  5.60539E-09  2.21148E-06  4.27686E-06  4.10878E-06  2.93647E-06  1.62613E-06
 15.800  8.34813E-09  1.51291E-08  1.32314E-08  9.38861E-09  6.01384E-09  1.89506E-06  3.68042E-06  3.56831E-06  2.58413E-06  1.45672E-06
 15.900  7.90032E-09  1.46231E-08  1.33162E-08  9.77189E-09  6.28204E-09  1.61719E-06  3.15321E-06  3.08358E-06  2.26114E-06  1.29634E-06
 16.000  7.43261E-09  1.39995E-08  1.31661E-08  9.92112E-09  6.41400E-09  1.37424E-06  2.68945E-06  2.65146E-06  1.96735E-06  1.14611E-06
 16.100  6.94584E-09  1.32725E-08  1.28111E-08  9.86223E-09  6.41920E-09  1.16279E-06  2.28356E-06  2.26854E-06  1.70214E-06  1.00680E-06
 16.200  6.44376E-09  1.24607E-08  1.22847E-08  9.62501E-09  6.31117E-09  9.79596E-07  1.93009E-06  1.93125E-06  1.46449E-06  8.78844E-07
 16.300  5.93211E-09  1.15852E-08  1.16219E-08  9.24117E-09  6.10612E-09  8.21635E-07  1.62384E-06  1.63590E-06  1.25305E-06  7.62376E-07
 16.400  5.41781E-09  1.06682E-08  1.08574E-08  8.74262E-09  5.82175E-09  6.86082E-07  1.35988E-06  1.37881E-06  1.06624E-06  6.57283E-07
 16.500  4.90818E-09  9.73143E-09  1.00243E-08  8.16004E-09  5.47607E-09  5.70323E-07  1.13353E-06  1.15632E-06  9.02341E-07  5.63245E-07
 16.600  4.41036E-09  8.79517E-09  9.15273E-09  7.52185E-09  5.08656E-09  4.71955E-07  9.40445E-07  9.64901E-07  7.59496E-07  4.79776E-07
 16.700  3.93086E-09  7.87745E-09  8.26929E-09  6.85342E-09  4.66949E-09  3.88777E-07  7.76596E-07  8.01162E-07  6.35825E-07  4.06262E-07
 16.800  3.47524E-09  6.99351E-09  7.39653E-09  6.17659E-09  4.23937E-09  3.18795E-07  6.38281E-07  6.61904E-07  5.29446E-07  3.42005E-07
 16.900  3.04791E-09  6.15556E-09  6.55275E-09  5.50952E-09  3.80873E-09  2.60211E-07  5.22132E-07  5.44141E-07  4.38525E-07  2.86251E-07
 17.000  2.65210E-09  5.37276E-09  5.75211E-09  4.86663E-09  3.38788E-09  2.11416E-07  4.25106E-07  4.45117E-07  3.61303E-07  2.38220E-07
 17.100  2.28981E-09  4.65132E-09  5.00488E-09  4.25884E-09  2.98499E-09  1.70978E-07  3.44478E-07  3.62319E-07  2.96121E-07  1.97131E-07
 17.200  1.96196E-09  3.99478E-09  4.31780E-09  3.69382E-09  2.60616E-09  1.37636E-07  2.77827E-07  2.93472E-07  2.41435E-07  1.62219E-07
 17.300  1.66849E-09  3.40435E-09  3.69453E-09  3.17640E-09  2.25558E-09  1.10284E-07  2.23016E-07  2.36543E-07  1.95832E-07  1.32753E-07
 17.400  1.40851E-09  2.87925E-09  3.13615E-09  2.70898E-09  1.93576E-09  8.79582E-08  1.78176E-07  1.89727E-07  1.58028E-07  1.08045E-07
 17.500  1.18049E-09  2.41717E-09  2.64169E-09  2.29199E-09  1.64782E-09  6.98278E-08  1.41683E-07  1.51436E-07  1.26871E-07  8.74607E-08
 17.600  9.82404E-10  2.01462E-09  2.20856E-09  1.92427E-09  1.39170E-09  5.51785E-08  1.12135E-07  1.20288E-07  1.01342E-07  7.04186E-08
 17.700  8.11900E-10  1.66727E-09  1.83302E-09  1.60349E-09  1.16645E-09  4.34012E-08  8.83346E-08  9.50858E-08  8.05426E-08  5.63965E-08
 17.800  6.66436E-10  1.37029E-09  1.51056E-09  1.32650E-09  9.70420E-10  3.39803E-08  6.92606E-08  7.48030E-08  6.36924E-08  4.49291E-08
 17.900  5.43390E-10  1.11861E-09  1.23622E-09  1.08961E-09  8.01529E-10  2.64821E-08  5.40525E-08  5.85654E-08  5.01175E-08  3.56070E-08
 18.000  4.40168E-10  9.07108E-10  1.00487E-09  8.88861E-10  6.57389E-10  2.05437E-08  4.19879E-08  4.56343E-08  3.92415E-08  2.80734E-08
 18.100  3.54265E-10  7.30827E-10  8.11423E-10  7.20228E-10  5.35481E-10  1.58640E-08  3.24652E-08  3.53900E-08  3.05752E-08  2.20205E-08
 18.200  2.83329E-10  5.85058E-10  6.50982E-10  5.79756E-10  4.33264E-10  1.21944E-08  2.49865E-08  2.73161E-08  2.37070E-08  1.71850E-08
 18.300  2.25194E-10  4.65438E-10  5.18956E-10  4.63682E-10  3.48266E-10  9.33097E-09  1.91423E-08  2.09852E-08  1.82927E-08  1.33439E-08
 18.400  1.77896E-10  3.68005E-10  4.11136E-10  3.68513E-10  2.78151E-10  7.10753E-09  1.45978E-08  1.60464E-08  1.40472E-08  1.03096E-08
 18.500  1.39691E-10  2.89213E-10  3.23732E-10  2.91068E-10  2.20757E-10  5.38943E-09  1.10815E-08  1.22129E-08  1.07355E-08  7.92590E-09
 18.600  1.09044E-10  2.25944E-10  2.53382E-10  2.28506E-10  1.74127E-10  4.06824E-09  8.37402E-09  9.25229E-09  8.16570E-09  6.06339E-09
 18.700  8.46260E-11  1.75485E-10  1.97153E-10  1.78324E-10  1.36516E-10  3.05714E-09  6.29941E-09  6.97715E-09  6.18175E-09  4.61596E-09
 18.800  6.53005E-11  1.35513E-10  1.52513E-10  1.38347E-10  1.06393E-10  2.28707E-09  4.71743E-09  5.23739E-09  4.65791E-09  3.49705E-09
 18.900  5.01042E-11  1.04053E-10  1.17308E-10  1.06715E-10  8.24320E-11  1.70335E-09  3.51689E-09  3.91355E-09  3.49336E-09  2.63665E-09
 19.000  3.82307E-11  7.94515E-11  8.97231E-11  8.18490E-11  6.35001E-11  1.26298E-09  2.61017E-09  2.91109E-09  2.60785E-09  1.97847E-09
 19.100  2.90111E-11  6.03329E-11  6.82450E-11  6.24266E-11  4.86392E-11  9.32325E-10  1.92861E-09  2.15565E-09  1.93784E-09  1.47756E-09
 19.200  2.18958E-11  4.55664E-11  5.16252E-11  4.73511E-11  3.70483E-11  6.85207E-10  1.41871E-09  1.58909E-09  1.43339E-09  1.09829E-09
 19.300  1.64374E-11  3.42298E-11  3.88427E-11  3.57214E-11  2.80644E-11  5.01382E-10  1.03902E-09  1.16621E-09  1.05544E-09  8.12561E-10
 19.400  1.22746E-11  2.55778E-11  2.90699E-11  2.68037E-11  2.11436E-11  3.65272E-10  7.57607E-10  8.52068E-10  7.73628E-10  5.98382E-10
 19.500  9.11837E-12  1.90130E-11  2.16418E-11  2.00060E-11  1.58442E-11  2.64955E-10  5.50001E-10  6.19795E-10  5.64516E-10  4.38629E-10
 19.600  6.73883E-12  1.40601E-11  1.60284E-11  1.48544E-11  1.18102E-11  1.91356E-10  3.97549E-10  4.48858E-10  4.10086E-10  3.20054E-10
 19.700  4.95492E-12  1.03445E-11  1.18101E-11  1.09724E-11  8.75736E-12  1.37607E-10  2.86110E-10  3.23642E-10  2.96578E-10  2.32473E-10
 19.800  3.62491E-12  7.57243E-12  8.65795E-12  8.06361E-12  6.46011E-12  9.85298E-11  2.05022E-10  2.32342E-10  2.13540E-10  1.68095E-10
 19.900  2.63870E-12  5.51556E-12  6.31533E-12  5.89608E-12  4.74116E-12  7.02483E-11  1.46285E-10  1.66075E-10  1.53076E-10  1.20999E-10
  67 221 200   0.100
  0.000  4.62591E-02 -2.40495E-16 -4.16334E-16 -3.37750E-16 -1.12293E-15  1.01181E-01 -5.12023E-16 -8.11851E-16 -1.17587E-15  4.29147E-16
  0.100  4.62785E-02 -2.68973E-05 -1.82501E-08 -5.96412E-12 -3.34735E-15  1.01182E-01 -2.41712E-05 -9.95779E-09  4.85790E-12  7.85339E-15
  0.200  4.63363E-02 -1.06489E-04 -2.89592E-07 -3.78332E-10 -3.47673E-13  1.01183E-01 -9.45539E-05 -1.56795E-07  3.09284E-10 -7.74467E-14
  0.300  4.64314E-02 -2.35510E-04 -1.44593E-06 -4.24686E-09 -8.76025E-12  1.01184E-01 -2.04916E-04 -7.72713E-07  3.49907E-09 -2.35895E-12
  0.400  4.65620E-02 -4.08650E-04 -4.48215E-06 -2.33778E-08 -8.58218E-11  1.01183E-01 -3.45396E-04 -2.35086E-06  1.94710E-08 -2.09355E-11
  0.500  4.67258E-02 -6.18731E-04 -1.06730E-05 -8.68608E-08 -4.98968E-10  1.01180E-01 -5.03253E-04 -5.46065E-06  7.33531E-08 -1.04482E-10
  0.600  4.69197E-02 -8.56969E-04 -2.14654E-05 -2.51147E-07 -2.08131E-09  1.01171E-01 -6.63837E-04 -1.06410E-05  2.15684E-07 -3.48103E-10
  0.700  4.71402E-02 -1.11328E-03 -3.83527E-05 -6.09651E-07 -6.89194E-09  1.01156E-01 -8.11720E-04 -1.82823E-05  5.33976E-07 -8.07623E-10
  0.800  4.73834E-02 -1.37663E-03 -6.27417E-05 -1.30005E-06 -1.92457E-08  1.01133E-01 -9.31898E-04 -2.85107E-05  1.16457E-06 -1.13779E-09
  0.900  4.76451E-02 -1.63547E-03 -9.58194E-05 -2.50757E-06 -4.71242E-08  1.01100E-01 -1.01098E-03 -4.10865E-05  2.30351E-06  3.31838E-10
  1.000  4.79209E-02 -1.87812E-03 -1.38430E-04 -4.46302E-06 -1.03906E-07  1.01057E-01 -1.03826E-03 -5.53333E-05  4.21509E-06  8.45634E-09
  1.100  4.82060E-02 -2.09320E-03 -1.90972E-04 -7.43472E-06 -2.10268E-07  1.01004E-01 -1.00667E-03 -7.01066E-05  7.23650E-06  3.44787E-08
  1.200  4.84958E-02 -2.27010E-03 -2.53314E-04 -1.17144E-05 -3.96047E-07  1.00941E-01 -9.13365E-04 -8.38140E-05  1.17771E-05  1.00931E-07
  1.300  4.87858E-02 -2.39935E-03 -3.24754E-04 -1.75978E-05 -7.01771E-07  1.00869E-01 -7.60118E-04 -9.44906E-05  1.83112E-05  2.48416E-07
  1.400  4.90716E-02 -2.47302E-03 -4.03994E-04 -2.53612E-05 -1.17959E-06  1.00793E-01 -5.53311E-04 -9.99312E-05  2.73621E-05  5.44165E-07
  1.500  4.93487E-02 -2.48502E-03 -4.89170E-04 -3.52353E-05 -1.89332E-06  1.00714E-01 -3.03597E-04 -9.78732E-05  3.94787E-05  1.09185E-06
  1.600  4.96135E-02 -2.43141E-03 -5.77895E-04 -4.73802E-05 -2.91739E-06  1.00637E-01 -2.52283E-05 -8.62189E-05  5.52013E-05  2.04170E-06
  1.700  4.98621E-02 -2.31055E-03 -6.67349E-04 -6.18610E-05 -4.33458E-06  1.00566E-01  2.64897E-04 -6.32807E-05  7.50196E-05  3.59936E-06
  1.800  5.00916E-02 -2.12323E-03 -7.54386E-04 -7.86294E-05 -6.23259E-06  1.00506E-01  5.48416E-04 -2.80278E-05  9.93231E-05  6.03184E-06
  1.900  5.02993E-02 -1.87269E-03 -8.35660E-04 -9.75095E-05 -8.69956E-06  1.00462E-01  8.06829E-04  1.96922E-05  1.28346E-04  9.66817E-06
  2.000  5.04830E-02 -1.56457E-03 -9.07773E-04 -1.18192E-04 -1.18189E-05  1.00437E-01  1.02286E-03  7.89797E-05  1.62108E-04  1.48929E-05
  2.100  5.06415E-02 -1.20672E-03 -9.67417E-04 -1.40237E-04 -1.56635E-05  1.00434E-01  1.18177E-03  1.47784E-04  2.00363E-04  2.21308E-05
  2.200  5.07737E-02 -8.09010E-04 -1.01153E-03 -1.63079E-04 -2.02908E-05  1.00457E-01  1.27253E-03  2.22899E-04  2.42548E-04  3.18211E-05
  2.300  5.08797E-02 -3.82935E-04 -1.03744E-03 -1.86046E-04 -2.57369E-05  1.00505E-01  1.28871E-03  3.00062E-04  2.87751E-04  4.43816E-05
  2.400  5.09601E-02  5.87232E-05 -1.04298E-03 -2.08377E-04 -3.20138E-05  1.00578E-01  1.22910E-03  3.74167E-04  3.34696E-04  6.01644E-05
  2.500  5.10162E-02  5.02378E-04 -1.02662E-03 -2.29250E-04 -3.91058E-05  1.00675E-01  1.09789E-03  4.39580E-04  3.81752E-04  7.94041E-05
  2.600  5.10501E-02  9.34131E-04 -9.87580E-04 -2.47804E-04 -4.69689E-05  1.00790E-01  9.04529E-04  4.90541E-04  4.26975E-04  1.02164E-04
  2.700  5.10645E-02  1.34030E-03 -9.25856E-04 -2.63168E-04 -5.55310E-05  1.00920E-01  6.63164E-04  5.21623E-04  4.68178E-04  1.28283E-04
  2.800  5.10628E-02  1.70796E-03 -8.42306E-04 -2.74490E-04 -6.46938E-05  1.01057E-01  3.91697E-04  5.28213E-04  5.03037E-04  1.57336E-04
  2.900  5.10485E-02  2.02546E-03 -7.38657E-04 -2.80955E-04 -7.43356E-05  1.01196E-01  1.10598E-04  5.06972E-04  5.29226E-04  1.88598E-04
  3.000  5.10259E-02  2.28292E-03 -6.17495E-04 -2.81818E-04 -8.43149E-05  1.01327E-01 -1.58499E-04  4.56226E-04  5.44573E-04  2.21043E-04
  3.100  5.09991E-02  2.47267E-03 -4.82235E-04 -2.76419E-04 -9.44738E-05  1.01443E-01 -3.94295E-04  3.76247E-04  5.47233E-04  2.53352E-04
  3.200  5.09722E-02  2.58968E-03 -3.37045E-04 -2.64208E-04 -1.04642E-04  1.01536E-01 -5.77300E-04  2.69390E-04  5.35863E-04  2.83958E-04
  3.300  5.09489E-02  2.63177E-03 -1.86750E-04 -2.44767E-04 -1.14638E-04  1.01599E-01 -6.91164E-04  1.40061E-04  5.09784E-04  3.11120E-04
  3.400  5.09323E-02  2.59989E-03 -3.67048E-05 -2.17837E-04 -1.24274E-04  1.01627E-01 -7.23775E-04 -5.49916E-06  4.69114E-04  3.33014E-04
  3.500  5.09248E-02  2.49818E-03  1.07371E-04 -1.83333E-04 -1.33353E-04  1.01613E-01 -6.68018E-04 -1.59606E-04  4.14856E-04  3.47854E-04
  3.600  5.09275E-02  2.33393E-03  2.39574E-04 -1.41381E-04 -1.41672E-04  1.01553E-01 -5.22150E-04 -3.13670E-04  3.48933E-04  3.54017E-04
  3.700  5.09403E-02  2.11745E-03  3.54031E-04 -9.23360E-05 -1.49019E-04  1.01444E-01 -2.89749E-04 -4.58848E-04  2.74150E-04  3.50183E-04
  3.800  5.09614E-02  1.86177E-03  4.45127E-04 -3.68124E-05 -1.55176E-04  1.01284E-01  2.07551E-05 -5.86762E-04  1.94086E-04  3.35454E-04
  3.900  5.09874E-02  1.58230E-03  5.07744E-04  2.42982E-05 -1.59919E-04  1.01072E-01  3.96926E-04 -6.90202E-04  1.12913E-04  3.09464E-04
  4.000  5.10132E-02  1.29626E-03  5.37509E-04  8.98108E-05 -1.63021E-04  1.00804E-01  8.23483E-04 -7.63778E-04  3.51492E-05  2.72452E-04
  4.100  5.10318E-02  1.02214E-03  5.31023E-04  1.58243E-04 -1.64260E-04  1.00480E-01  1.28368E-03 -8.04433E-04 -3.46366E-05  2.25303E-04
  4.200  5.10348E-02  7.79000E-04  4.86082E-04  2.27824E-04 -1.63424E-04  1.00098E-01  1.76077E-03 -8.11782E-04 -9.21542E-05  1.69535E-04
  4.300  5.10120E-02  5.85746E-04  4.01856E-04  2.96521E-04 -1.60328E-04  9.96539E-02  2.23950E-03 -7.88231E-04 -1.33726E-04  1.07249E-04
  4.400  5.09521E-02  4.60375E-04  2.79031E-04  3.62087E-04 -1.54824E-04  9.91448E-02  2.70741E-03 -7.38855E-04 -1.56601E-04  4.10217E-05
  4.500  5.08429E-02  4.19226E-04  1.19887E-04  4.22121E-04 -1.46824E-04  9.85652E-02  3.15595E-03 -6.71047E-04 -1.59221E-04 -2.62289E-05
  4.600  5.06714E-02  4.76263E-04 -7.16856E-05  4.74160E-04 -1.36312E-04  9.79085E-02  3.58120E-03 -5.93951E-04 -1.41409E-04 -9.14212E-05
  4.700  5.04248E-02  6.42429E-04 -2.90250E-04  5.15777E-04 -1.23366E-04  9.71670E-02  3.98422E-03 -5.17724E-04 -1.04472E-04 -1.51497E-04
  4.800  5.00905E-02  9.25095E-04 -5.28961E-04  5.44698E-04 -1.08171E-04  9.63320E-02  4.37103E-03 -4.52698E-04 -5.11879E-05 -2.03618E-04
  4.900  4.96565E-02  1.32763E-03 -7.79779E-04  5.58928E-04 -9.10271E-05  9.53940E-02  4.75208E-03 -4.08493E-04  1.43164E-05 -2.45346E-04
  5.000  4.91124E-02  1.84915E-03 -1.03376E-03  5.56867E-04 -7.23576E-05  9.43431E-02  5.14135E-03 -3.93182E-04  8.67921E-05 -2.74802E-04
  5.100  4.84492E-02  2.48436E-03 -1.28142E-03  5.37427E-04 -5.27003E-05  9.31695E-02  5.55524E-03 -4.12555E-04  1.60193E-04 -2.90784E-04
  5.200  4.76600E-02  3.22368E-03 -1.51310E-03  5.00130E-04 -3.26964E-05  9.18639E-02  6.01110E-03 -4.69568E-04  2.28066E-04 -2.92842E-04
  5.300  4.67404E-02  4.05347E-03 -1.71943E-03  4.45169E-04 -1.30674E-05  9.04180E-02  6.52570E-03 -5.64011E-04  2.83991E-04 -2.81294E-04
  5.400  4.56883E-02  4.95645E-03 -1.89171E-03  3.73456E-04  5.41562E-06  8.88250E-02  7.11373E-03 -6.92428E-04  3.22017E-04 -2.57197E-04
  5.500  4.45044E-02  5.91226E-03 -2.02239E-03  2.86610E-04  2.19696E-05  8.70796E-02  7.78640E-03 -8.48309E-04  3.37084E-04 -2.22257E-04
  5.600  4.31920E-02  6.89821E-03 -2.10535E-03  1.86924E-04  3.58423E-05  8.51790E-02  8.55022E-03 -1.02251E-03  3.25376E-04 -1.78712E-04
  5.700  4.17571E-02  7.89008E-03 -2.13629E-03  7.72778E-05  4.63566E-05  8.31225E-02  9.40613E-03 -1.20389E-03  2.84596E-04 -1.29168E-04
  5.800  4.02081E-02  8.86298E-03 -2.11288E-03 -3.89785E-05  5.29532E-05  8.09118E-02  1.03490E-02 -1.38011E-03  2.14129E-04 -7.64256E-05
  5.900  3.85558E-02  9.79226E-03 -2.03493E-03 -1.58172E-04  5.52289E-05  7.85514E-02  1.13676E-02 -1.53851E-03  1.15086E-04 -2.33012E-05
  6.000  3.68127E-02  1.06544E-02 -1.90438E-03 -2.76478E-04  5.29667E-05  7.60479E-02  1.24448E-02 -1.66702E-03 -9.76762E-06  2.75466E-05
  6.100  3.49932E-02  1.14280E-02 -1.72521E-03 -3.90103E-04  4.61551E-05  7.34105E-02  1.35581E-02 -1.75498E-03 -1.56200E-04  7.37668E-05
  6.200  3.31127E-02  1.20942E-02 -1.50326E-03 -4.95462E-04  3.49953E-05  7.06504E-02  1.46812E-02 -1.79391E-03 -3.18791E-04  1.13436E-04
  6.300  3.11875E-02  1.26374E-02 -1.24592E-03 -5.89350E-04  1.98952E-05  6.77810E-02  1.57846E-02 -1.77803E-03 -4.91287E-04  1.45140E-04
  6.400  2.92345E-02  1.30462E-02 -9.61790E-04 -6.69088E-04  1.44982E-06  6.48171E-02  1.68376E-02 -1.70463E-03 -6.66988E-04  1.68020E-04
  6.500  2.72705E-02  1.33129E-02 -6.60263E-04 -7.32638E-04 -1.95900E-05  6.17752E-02  1.78095E-02 -1.57422E-03 -8.39159E-04  1.81767E-04
  6.600  2.53120E-02  1.34343E-02 -3.51073E-04 -7.78676E-04 -4.23583E-05  5.86730E-02  1.86712E-02 -1.39039E-03 -1.00142E-03  1.86596E-04
  6.700  2.33749E-02  1.34111E-02 -4.38622E-05 -8.06629E-04 -6.59216E-05  5.55287E-02  1.93967E-02 -1.15954E-03 -1.14806E-03  1.83174E-04
  6.800  2.14743E-02  1.32484E-02  2.52242E-04 -8.16664E-04 -8.93300E-05  5.23616E-02  1.99641E-02 -8.90402E-04 -1.27437E-03  1.72537E-04
  6.900  1.96238E-02  1.29546E-02  5.28999E-04 -8.09641E-04 -1.11668E-04  4.91907E-02  2.03566E-02 -5.93411E-04 -1.37678E-03  1.55981E-04
  7.000  1.78360E-02  1.25412E-02  7.79367E-04 -7.87028E-04 -1.32100E-04  4.60354E-02  2.05633E-02 -2.80059E-04 -1.45300E-03  1.34963E-04
  7.100  1.61216E-02  1.20224E-02  9.97730E-04 -7.50787E-04 -1.49914E-04  4.29147E-02  2.05794E-02  3.78308E-05 -1.50202E-03  1.10989E-04
  7.200  1.44899E-02  1.14143E-02  1.18005E-03 -7.03243E-04 -1.64546E-04  3.98468E-02  2.04059E-02  3.48773E-04 -1.52408E-03  8.55261E-05
  7.300  1.29485E-02  1.07342E-02  1.32391E-03 -6.46947E-04 -1.75608E-04  3.68492E-02  2.00498E-02  6.42228E-04 -1.52049E-03  5.99185E-05
  7.400  1.15029E-02  9.99986E-03  1.42849E-03 -5.84529E-04 -1.82890E-04  3.39382E-02  1.95234E-02  9.09097E-04 -1.49350E-03  3.53309E-05
  7.500  1.01573E-02  9.22913E-03  1.49448E-03 -5.18571E-04 -1.86359E-04  3.11286E-02  1.88433E-02  1.14209E-03 -1.44606E-03  1.27076E-05
  7.600  8.91398E-03  8.43914E-03  1.52386E-03 -4.51491E-04 -1.86149E-04  2.84337E-02  1.80296E-02  1.33594E-03 -1.38158E-03 -7.24714E-06
  7.700  7.77373E-03  7.64587E-03  1.51975E-03 -3.85445E-04 -1.82536E-04  2.58647E-02  1.71049E-02  1.48750E-03 -1.30371E-03 -2.40701E-05
  7.800  6.73584E-03  6.86376E-03  1.48609E-03 -3.22261E-04 -1.75912E-04  2.34311E-02  1.60932E-02  1.59568E-03 -1.21614E-03 -3.75257E-05
  7.900  5.79826E-03  6.10539E-03  1.42741E-03 -2.63398E-04 -1.66755E-04  2.11402E-02  1.50191E-02  1.66126E-03 -1.12239E-03 -4.75797E-05
  8.000  4.95779E-03  5.38130E-03  1.34858E-03 -2.09924E-04 -1.55592E-04  1.89971E-02  1.39067E-02  1.68667E-03 -1.02569E-03 -5.43661E-05
  8.100  4.21022E-03  4.69984E-03  1.25450E-03 -1.62529E-04 -1.42971E-04  1.70047E-02  1.27785E-02  1.67565E-03 -9.28857E-04 -5.81490E-05
  8.200  3.55051E-03  4.06726E-03  1.14997E-03 -1.21549E-04 -1.29431E-04  1.51641E-02  1.16554E-02  1.63290E-03 -8.34233E-04 -5.92842E-05
  8.300  2.97299E-03  3.48770E-03  1.03944E-03 -8.70064E-05 -1.15475E-04  1.34741E-02  1.05557E-02  1.56372E-03 -7.43668E-04 -5.81821E-05
  8.400  2.47150E-03  2.96342E-03  9.26880E-04 -5.86658E-05 -1.01553E-04  1.19318E-02  9.49485E-03  1.47370E-03 -6.58522E-04 -5.52756E-05
  8.500  2.03963E-03  2.49494E-03  8.15717E-04 -3.60900E-05 -8.80474E-05  1.05327E-02  8.48539E-03  1.36836E-03 -5.79700E-04 -5.09923E-05
  8.600  1.67082E-03  2.08132E-03  7.08745E-04 -1.86997E-05 -7.52655E-05  9.27086E-03  7.53691E-03  1.25297E-03 -5.07701E-04 -4.57339E-05
  8.700  1.35851E-03  1.72042E-03  6.08127E-04 -5.82873E-06 -6.34370E-05  8.13921E-03  6.65614E-03  1.13228E-03 -4.42688E-04 -3.98608E-05
  8.800  1.09634E-03  1.40914E-03  5.15410E-04  3.22508E-06 -5.27160E-05  7.12978E-03  5.84713E-03  1.01044E-03 -3.84558E-04 -3.36830E-05
  8.900  8.78148E-04  1.14372E-03  4.31572E-04  9.15831E-06 -4.31877E-05  6.23397E-03  5.11158E-03  8.90921E-04 -3.33005E-04 -2.74561E-05
  9.000  6.98158E-04  9.19925E-04  3.57089E-04  1.26287E-05 -3.48768E-05  5.44280E-03  4.44917E-03  7.76445E-04 -2.87592E-04 -2.13812E-05
  9.100  5.50991E-04  7.33336E-04  2.92012E-04  1.42316E-05 -2.77580E-05  4.74713E-03  3.85788E-03  6.69044E-04 -2.47799E-04 -1.56080E-05
  9.200  4.31727E-04  5.79472E-04  2.36051E-04  1.44848E-05 -2.17673E-05  4.13787E-03  3.33442E-03  5.70099E-04 -2.13075E-04 -1.02402E-05
  9.300  3.35933E-04  4.53974E-04  1.88660E-04  1.38221E-05 -1.68132E-05  3.60617E-03  2.87452E-03  4.80415E-04 -1.82869E-04 -5.34246E-06
  9.400  2.59668E-04  3.52708E-04  1.49116E-04  1.25928E-05 -1.27863E-05  3.14355E-03  2.47326E-03  4.00310E-04 -1.56657E-04 -9.47224E-07
  9.500  1.99482E-04  2.71860E-04  1.16590E-04  1.10661E-05 -9.56895E-06  2.74202E-03  2.12537E-03  3.29714E-04 -1.33955E-04  2.93782E-06
  9.600  1.52389E-04  2.07980E-04  9.02047E-05  9.43992E-06 -7.04239E-06  2.39416E-03  1.82545E-03  2.68261E-04 -1.14330E-04  6.32312E-06
  9.700  1.15847E-04  1.58017E-04  6.90899E-05  7.85064E-06 -5.09246E-06  2.09316E-03  1.56817E-03  2.15373E-04 -9.74013E-05  9.23141E-06
  9.800  8.77160E-05  1.19320E-04  5.24129E-05  6.38475E-06 -3.61378E-06  1.83285E-03  1.34839E-03  1.70340E-04 -8.28374E-05  1.16927E-05
  9.900  6.62215E-05  8.96291E-05  3.94069E-05  5.08969E-06 -2.51233E-06  1.60772E-03  1.16130E-03  1.32382E-04 -7.03520E-05  1.37404E-05
 10.000  4.99090E-05  6.70490E-05  2.93871E-05  3.98408E-06 -1.70680E-06  1.41289E-03  1.00245E-03  1.00702E-04 -5.96975E-05  1.54085E-05
 10.100  3.76031E-05  5.00168E-05  2.17572E-05  3.06664E-06 -1.12880E-06  1.24405E-03  8.67830E-04  7.45165E-05 -5.06585E-05  1.67296E-05
 10.200  2.83658E-05  3.72637E-05  1.60108E-05  2.32346E-06 -7.22325E-07  1.09748E-03  7.53848E-04  5.30901E-05 -4.30454E-05  1.77338E-05
 10.300  2.14579E-05  2.77752E-05  1.17274E-05  1.73376E-06 -4.42705E-07  9.69944E-04  6.57344E-04  3.57458E-05 -3.66889E-05  1.84479E-05
 10.400  1.63039E-05  2.07521E-05  8.56445E-06  1.27406E-06 -2.55157E-07  8.58682E-04  5.75563E-04  2.18756E-05 -3.14358E-05  1.88963E-05
 10.500  1.24611E-05  1.55731E-05  6.24872E-06  9.21067E-07 -1.33255E-07  7.61333E-04  5.06128E-04  1.09418E-05 -2.71454E-05  1.91005E-05
 10.600  9.59261E-06  1.17619E-05  4.56586E-06  6.53415E-07 -5.73759E-08  6.75893E-04  4.47009E-04  2.47552E-06 -2.36875E-05  1.90804E-05
 10.700  7.44478E-06  8.95758E-06  3.35054E-06  4.52597E-07 -1.32567E-08  6.00670E-04  3.96482E-04 -3.92873E-06 -2.09408E-05  1.88547E-05
 10.800  5.82832E-06  6.88978E-06  2.47714E-06  3.03265E-07  9.27706E-09  5.34238E-04  3.53098E-04 -8.61895E-06 -1.87926E-05  1.84417E-05
 10.900  4.60313E-06  5.35803E-06  1.85151E-06  1.93126E-07  1.73844E-08  4.75396E-04  3.15646E-04 -1.18926E-05 -1.71380E-05  1.78601E-05
 11.000  3.66623E-06  4.21503E-06  1.40386E-06  1.12614E-07  1.60683E-08  4.23136E-04  2.83121E-04 -1.40035E-05 -1.58810E-05  1.71293E-05
 11.100  2.94228E-06  3.35336E-06  1.08304E-06  5.44367E-08  8.83676E-09  3.76610E-04  2.54691E-04 -1.51676E-05 -1.49339E-05  1.62694E-05
 11.200  2.37638E-06  2.69526E-06  8.51840E-07  1.31250E-08 -1.81501E-09  3.35105E-04  2.29676E-04 -1.55694E-05 -1.42186E-05  1.53019E-05
 11.300  1.92863E-06  2.18473E-06  6.83440E-07 -1.53982E-08 -1.40694E-08  2.98018E-04  2.07521E-04 -1.53657E-05 -1.36662E-05  1.42488E-05
 11.400  1.57004E-06  1.78175E-06  5.58638E-07 -3.41748E-08 -2.65687E-08  2.64838E-04  1.87776E-04 -1.46905E-05 -1.32178E-05  1.31327E-05
 11.500  1.27954E-06  1.45785E-06  4.63826E-07 -4.54976E-08 -3.82830E-08  2.35131E-04  1.70076E-04 -1.36576E-05 -1.28239E-05  1.19764E-05
 11.600  1.04181E-06  1.19294E-06  3.89488E-07 -5.11251E-08 -4.84381E-08  2.08523E-04  1.54129E-04 -1.23640E-05 -1.24447E-05  1.08022E-05
 11.700  8.45679E-07  9.72974E-07  3.29088E-07 -5.24363E-08 -5.64796E-08  1.84695E-04  1.39700E-04 -1.08918E-05 -1.20497E-05  9.63128E-06
 11.800  6.82975E-07  7.88176E-07  2.78264E-07 -5.05378E-08 -6.20551E-08  1.63364E-04  1.26599E-04 -9.30995E-06 -1.16167E-05  8.48342E-06
 11.900  5.47658E-07  6.31820E-07  2.34217E-07 -4.63350E-08 -6.50042E-08  1.44284E-04  1.14675E-04 -7.67632E-06 -1.11314E-05  7.37630E-06
 12.000  4.35210E-07  4.99262E-07  1.95254E-07 -4.05801E-08 -6.53455E-08  1.27239E-04  1.03803E-04 -6.03871E-06 -1.05866E-05  6.32519E-06
 12.100  3.42174E-07  3.87251E-07  1.60437E-07 -3.39023E-08 -6.32579E-08  1.12032E-04  9.38815E-05 -4.43613E-06 -9.98089E-06  5.34266E-06
 12.200  2.65823E-07  2.93417E-07  1.29310E-07 -2.68284E-08 -5.90546E-08  9.84885E-05  8.48258E-05 -2.89984E-06 -9.31778E-06  4.43845E-06
 12.300  2.03915E-07  2.15905E-07  1.01695E-07 -1.97961E-08 -5.31503E-08  8.64482E-05  7.65631E-05 -1.45427E-06 -8.60467E-06  3.61942E-06
 12.400  1.54531E-07  1.53119E-07  7.75420E-08 -1.31628E-08 -4.60247E-08  7.57659E-05  6.90299E-05 -1.17796E-07 -7.85176E-06  2.88962E-06
 12.500  1.15957E-07  1.03561E-07  5.68204E-08 -7.21211E-09 -3.81837E-08  6.63082E-05  6.21699E-05  1.09650E-06 -7.07112E-06  2.25052E-06
 12.600  8.66216E-08  6.57435E-08  3.94548E-08 -2.15718E-09 -3.01233E-08  5.79528E-05  5.59314E-05  2.18018E-06 -6.27574E-06  1.70120E-06
 12.700  6.50585E-08  3.81482E-08  2.52915E-08  1.85597E-09 -2.22969E-08  5.05871E-05  5.02667E-05  3.12884E-06 -5.47880E-06  1.23872E-06
 12.800  4.98970E-08  1.92349E-08  1.40910E-08  4.74617E-09 -1.50899E-08  4.41075E-05  4.51311E-05  3.94153E-06 -4.69301E-06  8.58479E-07
 12.900  3.98651E-08  7.46917E-09  5.53930E-09  6.49413E-09 -8.80090E-09  3.84192E-05  4.04825E-05  4.62027E-06 -3.93010E-06  5.54520E-07
 13.000  3.38016E-08  1.36510E-09 -7.29429E-10  7.13835E-09 -3.63279E-09  3.34351E-05  3.62809E-05  5.16952E-06 -3.20041E-06  3.19946E-07
 13.100  3.06701E-08 -4.68333E-10 -5.10482E-09  6.76947E-09  3.09597E-10  2.90759E-05  3.24887E-05  5.59575E-06 -2.51266E-06  1.47233E-07
 13.200  2.95725E-08  7.14236E-10 -7.97209E-09  5.52270E-09  3.01367E-09  2.52696E-05  2.90701E-05  5.90700E-06 -1.87381E-06  2.85384E-08
 13.300  2.97561E-08  3.82657E-09 -9.68765E-09  3.56838E-09  4.54778E-09  2.19507E-05  2.59917E-05  6.11246E-06 -1.28902E-06 -4.40280E-08
 13.400  3.06155E-08  7.97037E-09 -1.05609E-08  1.10100E-09  5.04553E-09  1.90606E-05  2.32222E-05  6.22212E-06 -7.61692E-07 -7.81809E-08
 13.500  3.16886E-08  1.24417E-08 -1.08434E-08 -1.67271E-09  4.68760E-09  1.65463E-05  2.07326E-05  6.24643E-06 -2.93602E-07 -8.12774E-08
 13.600  3.26450E-08  1.67250E-08 -1.07255E-08 -4.54600E-09  3.68284E-09  1.43609E-05  1.84961E-05  6.19599E-06  1.14950E-07 -6.01765E-08
 13.700  3.32717E-08  2.04770E-08 -1.03389E-08 -7.32366E-09  2.25002E-09  1.24625E-05  1.64879E-05  6.08133E-06  4.64944E-07 -2.11381E-08
 13.800  3.34540E-08  2.35032E-08 -9.76430E-09 -9.83231E-09  6.01503E-10  1.08140E-05  1.46855E-05  5.91264E-06  7.58432E-07  3.02434E-08
 13.900  3.31553E-08  2.57296E-08 -9.04274E-09 -1.19286E-08 -1.07007E-09  9.38283E-06  1.30684E-05  5.69963E-06  9.98330E-07  8.90755E-08
 14.000  3.23976E-08  2.71737E-08 -8.18716E-09 -1.35052E-08 -2.60185E-09  8.14037E-06  1.16179E-05  5.45140E-06  1.18821E-06  1.51178E-07
 14.100  3.12417E-08  2.79151E-08 -7.19469E-09 -1.44935E-08 -3.86712E-09  7.06159E-06  1.03174E-05  5.17632E-06  1.33212E-06  2.13075E-07
 14.200  2.97716E-08  2.80707E-08 -6.05712E-09 -1.48642E-08 -4.77821E-09  6.12468E-06  9.15160E-06  4.88198E-06  1.43442E-06  2.71963E-07
 14.300  2.80795E-08  2.77722E-08 -4.76919E-09 -1.46254E-08 -5.28623E-09  5.31070E-06  8.10699E-06  4.57515E-06  1.49959E-06  3.25676E-07
 14.400  2.62564E-08  2.71499E-08 -3.33437E-09 -1.38179E-08 -5.37818E-09  4.60322E-06  7.17135E-06  4.26181E-06  1.53217E-06  3.72633E-07
 14.500  2.43835E-08  2.63206E-08 -1.76779E-09 -1.25096E-08 -5.07214E-09  3.98804E-06  6.33377E-06  3.94712E-06  1.53662E-06  4.11779E-07
 14.600  2.25284E-08  2.53805E-08 -9.68827E-11 -1.07885E-08 -4.41108E-09  3.45289E-06  5.58446E-06  3.63547E-06  1.51723E-06  4.42528E-07
 14.700  2.07425E-08  2.44022E-08  1.64001E-09 -8.75574E-09 -3.45613E-09  2.98717E-06  4.91465E-06  3.33054E-06  1.47809E-06  4.64692E-07
 14.800  1.90610E-08  2.34343E-08  3.39643E-09 -6.51786E-09 -2.27964E-09  2.58178E-06  4.31648E-06  3.03533E-06  1.42298E-06  4.78421E-07
 14.900  1.75045E-08  2.25040E-08  5.12144E-09 -4.18070E-09 -9.58817E-10  2.22883E-06  3.78290E-06  2.75224E-06  1.35542E-06  4.84137E-07
 15.000  1.60807E-08  2.16211E-08  6.76349E-09 -1.84349E-09  4.29934E-10  1.92155E-06  3.30758E-06  2.48310E-06  1.27859E-06  4.82474E-07
 15.100  1.47878E-08  2.07818E-08  8.27416E-09  4.05544E-10  1.81563E-09  1.65408E-06  2.88480E-06  2.22925E-06  1.19532E-06  4.74216E-07
 15.200  1.36166E-08  1.99744E-08  9.61124E-09  2.49243E-09  3.13618E-09  1.42136E-06  2.50943E-06  1.99161E-06  1.10812E-06  4.60251E-07
 15.300  1.25540E-08  1.91822E-08  1.07412E-08  4.35929E-09  4.34064E-09  1.21901E-06  2.17681E-06  1.77069E-06  1.01916E-06  4.41518E-07
 15.400  1.15847E-08  1.83883E-08  1.16405E-08  5.96504E-09  5.39042E-09  1.04323E-06  1.88271E-06  1.56670E-06  9.30279E-07  4.18969E-07
 15.500  1.06933E-08  1.75773E-08  1.22966E-08  7.28502E-09  6.25950E-09  8.90712E-07  1.62333E-06  1.37955E-06  8.43013E-07  3.93533E-07
 15.600  9.86565E-09  1.67378E-08  1.27071E-08  8.30974E-09  6.93385E-09  7.58571E-07  1.39515E-06  1.20893E-06  7.58608E-07  3.66091E-07
 15.700  9.08984E-09  1.58628E-08  1.28796E-08  9.04304E-09  7.41020E-09  6.44283E-07  1.19501E-06  1.05431E-06  6.78041E-07  3.37450E-07
 15.800  8.35638E-09  1.49505E-08  1.28298E-08  9.49977E-09  7.69449E-09  5.45636E-07  1.02001E-06  9.15049E-07  6.02044E-07  3.08331E-07
 15.900  7.65850E-09  1.40036E-08  1.25800E-08  9.70336E-09  7.79997E-09  4.60683E-07  8.67486E-07  7.90350E-07  5.31129E-07  2.79363E-07
 16.000  6.99190E-09  1.30290E-08  1.21571E-08  9.68327E-09  7.74536E-09  3.87710E-07  7.35017E-07  6.79343E-07  4.65619E-07  2.51070E-07
 16.100  6.35440E-09  1.20363E-08  1.15912E-08  9.47269E-09  7.55292E-09  3.25202E-07  6.20388E-07  5.81095E-07  4.05665E-07  2.23880E-07
 16.200  5.74550E-09  1.10372E-08  1.09131E-08  9.10639E-09  7.24686E-09  2.71820E-07  5.21575E-07  4.94638E-07  3.51283E-07  1.98122E-07
 16.300  5.16589E-09  1.00445E-08  1.01534E-08  8.61891E-09  6.85178E-09  2.26379E-07  4.36736E-07  4.18990E-07  3.02368E-07  1.74037E-07
 16.400  4.61700E-09  9.07080E-09  9.34120E-09  8.04315E-09  6.39154E-09  1.87831E-07  3.64194E-07  3.53177E-07  2.58726E-07  1.51784E-07
 16.500  4.10053E-09  8.12804E-09  8.50278E-09  7.40925E-09  5.88831E-09  1.55249E-07  3.02430E-07  2.96242E-07  2.20090E-07  1.31450E-07
 16.600  3.61817E-09  7.22678E-09  7.66126E-09  6.74389E-09  5.36192E-09  1.27814E-07  2.50074E-07  2.47265E-07  1.86143E-07  1.13063E-07
 16.700  3.17130E-09  6.37580E-09  6.83614E-09  6.06985E-09  4.82951E-09  1.04805E-07  2.05889E-07  2.05371E-07  1.56533E-07  9.65964E-08
 16.800  2.76083E-09  5.58185E-09  6.04314E-09  5.40588E-09  4.30525E-09  8.55852E-08  1.68772E-07  1.69735E-07  1.30889E-07  8.19873E-08
 16.900  2.38708E-09  4.84964E-09  5.29428E-09  4.76674E-09  3.80045E-09  6.95990E-08  1.37735E-07  1.39593E-07  1.08833E-07  6.91402E-08
 17.000  2.04979E-09  4.18185E-09  4.59814E-09  4.16348E-09  3.32360E-09  5.63594E-08  1.11905E-07  1.14237E-07  8.99918E-08  5.79378E-08
 17.100  1.74811E-09  3.57931E-09  3.96018E-09  3.60378E-09  2.88068E-09  4.54430E-08  9.05109E-08  9.30276E-08  7.40032E-08  4.82490E-08
 17.200  1.48066E-09  3.04124E-09  3.38313E-09  3.09234E-09  2.47542E-09  3.64823E-08  7.28761E-08  7.53832E-08  6.05236E-08  3.99350E-08
 17.300  1.24562E-09  2.56551E-09  2.86746E-09  2.63143E-09  2.10962E-09  2.91606E-08  5.84104E-08  6.07853E-08  4.92317E-08  3.28548E-08
 17.400  1.04085E-09  2.14890E-09  2.41185E-09  2.22125E-09  1.78357E-09  2.32056E-08  4.66024E-08  4.87739E-08  3.98319E-08  2.68697E-08
 17.500  8.63955E-10  1.78744E-09  2.01356E-09  1.86046E-09  1.49628E-09  1.83849E-08  3.70111E-08  3.89445E-08  3.20554E-08  2.18465E-08
 17.600  7.12399E-10  1.47662E-09  1.66887E-09  1.54657E-09  1.24589E-09  1.45007E-08  2.92588E-08  3.09442E-08  2.56611E-08  1.76601E-08
 17.700  5.83606E-10  1.21166E-09  1.37342E-09  1.27624E-09  1.02986E-09  1.13859E-08  2.30238E-08  2.44676E-08  2.04348E-08  1.41947E-08
 17.800  4.75026E-10  9.87667E-10  1.12247E-09  1.04569E-09  8.45264E-10  8.90002E-09  1.80340E-08  1.92527E-08  1.61884E-08  1.13452E-08
 17.900  3.84194E-10  7.99855E-10  9.11183E-10  8.50858E-10  6.88974E-10  6.92556E-09  1.40605E-08  1.50759E-08  1.27583E-08  9.01744E-09
 18.000  3.08786E-10  6.43617E-10  7.34781E-10  6.87652E-10  5.57801E-10  5.36482E-09  1.09119E-08  1.17484E-08  1.00035E-08  7.12799E-09
 18.100  2.46646E-10  5.14641E-10  5.88693E-10  5.52083E-10  4.48630E-10  4.13703E-09  8.42937E-09  9.11129E-09  7.80376E-09  5.60391E-09
 18.200  1.95811E-10  4.08963E-10  4.68657E-10  4.40380E-10  3.58502E-10  3.17583E-09  6.48166E-09  7.03232E-09  6.05703E-09  4.38209E-09
 18.300  1.54519E-10  3.23005E-10  3.70771E-10  3.49056E-10  2.84672E-10  2.42693E-09  4.96108E-09  5.40185E-09  4.67775E-09  3.40849E-09
 18.400  1.21212E-10  2.53583E-10  2.91535E-10  2.74956E-10  2.24648E-10  1.84626E-09  3.77981E-09  4.12972E-09  3.59460E-09  2.63729E-09
 18.500  9.45277E-11  1.97904E-10  2.27854E-10  2.15268E-10  1.76204E-10  1.39819E-09  2.86662E-09  3.14225E-09  2.74864E-09  2.02998E-09
 18.600  7.32922E-11  1.53551E-10  1.77029E-10  1.67530E-10  1.37381E-10  1.05409E-09  2.16412E-09  2.37965E-09  2.09147E-09  1.55448E-09
 18.700  5.65034E-11  1.18453E-10  1.36740E-10  1.29613E-10  1.06484E-10  7.91102E-10  1.62634E-09  1.79369E-09  1.58368E-09  1.18430E-09
 18.800  4.33152E-11  9.08598E-11  1.05015E-10  9.96978E-11  8.20587E-11  5.91064E-10  1.21664E-09  1.34571E-09  1.19338E-09  8.97715E-10
 18.900  3.30207E-11  6.93046E-11  8.01947E-11  7.62510E-11  6.28768E-11  4.39631E-10  9.06036E-10  1.00494E-09  8.94957E-10  6.77076E-10
 19.000  2.50347E-11  5.25713E-11  6.08996E-11  5.79916E-11  4.79090E-11  3.25536E-10  6.71682E-10  7.46991E-10  6.67959E-10  5.08134E-10
 19.100  1.88772E-11  3.96609E-11  4.59929E-11  4.38610E-11  3.63027E-11  2.39978E-10  4.95706E-10  5.52703E-10  4.96176E-10  3.79470E-10
 19.200  1.41578E-11  2.97599E-11  3.45467E-11  3.29929E-11  2.73583E-11  1.76122E-10  3.64196E-10  4.07078E-10  3.66838E-10  2.82004E-10
 19.300  1.05621E-11  2.22118E-11  2.58102E-11  2.46843E-11  2.05068E-11  1.28685E-10  2.66381E-10  2.98458E-10  2.69946E-10  2.08558E-10
 19.400  7.83830E-12  1.64911E-11  1.91811E-11  1.83700E-11  1.52897E-11  9.36106E-11  1.93971E-10  2.17831E-10  1.97723E-10  1.53501E-10
 19.500  5.78679E-12  1.21801E-11  1.41802E-11  1.35993E-11  1.13400E-11  6.77968E-11  1.40618E-10  1.58268E-10  1.44155E-10  1.12440E-10
 19.600  4.25031E-12  8.94979E-12  1.04290E-11  1.00154E-11  8.36708E-12  4.88863E-11  1.01491E-10  1.14477E-10  1.04617E-10  8.19742E-11
 19.700  3.10596E-12  6.54277E-12  7.63100E-12  7.33823E-12  6.14191E-12  3.50967E-11  7.29292E-11  8.24326E-11  7.55776E-11  5.94827E-11
 19.800  2.25831E-12  4.75904E-12  5.55546E-12  5.34944E-12  4.48567E-12  2.50873E-11  5.21760E-11  5.90947E-11  5.43512E-11  4.29613E-11
 19.900  1.63383E-12  3.44436E-12  4.02423E-12  3.88012E-12  3.25964E-12  1.78549E-11  3.71658E-11  4.21770E-11  3.89102E-11  3.08853E-11
  67 222 200   0.100
  0.000  4.64576E-02 -2.32738E-16 -3.74700E-16 -4.87861E-16  2.21726E-16  1.01566E-01 -5.27539E-16 -7.49401E-16 -1.27595E-15 -2.86098E-16
  0.100  4.64761E-02 -2.71632E-05 -1.76087E-08 -5.61477E-12 -3.03264E-15  1.01573E-01 -1.52250E-05 -1.97316E-08  7.50406E-12  7.15245E-16
  0.200  4.65313E-02 -1.07527E-04 -2.79475E-07 -3.56386E-10 -2.54084E-13  1.01593E-01 -5.93508E-05 -3.11308E-07  4.72344E-10 -6.82916E-14
  0.300  4.66220E-02 -2.37754E-04 -1.39594E-06 -4.00323E-09 -6.38419E-12  1.01624E-01 -1.27849E-04 -1.53943E-06  5.32577E-09 -3.56771E-12
  0.400  4.67468E-02 -4.12417E-04 -4.32941E-06 -2.20582E-08 -6.25142E-11  1.01664E-01 -2.13565E-04 -4.70695E-06  2.94979E-08 -3.25246E-11
  0.500  4.69031E-02 -6.24190E-04 -1.03162E-05 -8.20609E-08 -3.63447E-10  1.01708E-01 -3.07276E-04 -1.10082E-05  1.10470E-07 -1.73812E-10
  0.600  4.70882E-02 -8.64117E-04 -2.07643E-05 -2.37633E-07 -1.51607E-09  1.01751E-01 -3.98423E-04 -2.16445E-05  3.22514E-07 -6.47397E-10
  0.700  4.72988E-02 -1.12193E-03 -3.71353E-05 -5.77892E-07 -5.02068E-09  1.01790E-01 -4.75959E-04 -3.76205E-05  7.91911E-07 -1.83762E-09
  0.800  4.75310E-02 -1.38644E-03 -6.08161E-05 -1.23490E-06 -1.40226E-08  1.01818E-01 -5.29255E-04 -5.95430E-05  1.71120E-06 -4.13836E-09
  0.900  4.77809E-02 -1.64593E-03 -9.29920E-05 -2.38755E-06 -3.43448E-08  1.01832E-01 -5.49005E-04 -8.74442E-05  3.35049E-06 -7.35621E-09
  1.000  4.80443E-02 -1.88858E-03 -1.34527E-04 -4.26062E-06 -7.57604E-08  1.01828E-01 -5.28051E-04 -1.20651E-04  6.06395E-06 -9.32322E-09
  1.100  4.83167E-02 -2.10294E-03 -1.85862E-04 -7.11819E-06 -1.53407E-07  1.01804E-01 -4.62075E-04 -1.57719E-04  1.02898E-05 -3.32142E-09
  1.200  4.85938E-02 -2.27835E-03 -2.46932E-04 -1.12513E-05 -2.89192E-07  1.01760E-01 -3.50097E-04 -1.96440E-04  1.65426E-05  2.60508E-08
  1.300  4.88712E-02 -2.40535E-03 -3.17116E-04 -1.69600E-05 -5.13013E-07  1.01696E-01 -1.94726E-04 -2.33939E-04  2.53966E-05  1.08804E-07
  1.400  4.91446E-02 -2.47604E-03 -3.95215E-04 -2.45318E-05 -8.63589E-07  1.01614E-01 -2.15515E-06 -2.66851E-04  3.74601E-05  2.97251E-07
  1.500  4.94101E-02 -2.48445E-03 -4.79467E-04 -3.42163E-05 -1.38873E-06  1.01518E-01  2.18130E-04 -2.91569E-04  5.33412E-05  6.75087E-07
  1.600  4.96638E-02 -2.42674E-03 -5.67584E-04 -4.61998E-05 -2.14492E-06  1.01413E-01  4.53910E-04 -3.04557E-04  7.36045E-05  1.36703E-06
  1.700  4.99022E-02 -2.30142E-03 -6.56834E-04 -6.05810E-05 -3.19613E-06  1.01304E-01  6.91028E-04 -3.02684E-04  9.87216E-05  2.54776E-06
  1.800  5.01223E-02 -2.10946E-03 -7.44138E-04 -7.73491E-05 -4.61189E-06  1.01199E-01  9.14369E-04 -2.83579E-04  1.29016E-04  4.44837E-06
  1.900  5.03214E-02 -1.85429E-03 -8.26187E-04 -9.63679E-05 -6.46470E-06  1.01103E-01  1.10896E-03 -2.45938E-04  1.64607E-04  7.35855E-06
  2.000  5.04975E-02 -1.54170E-03 -8.99588E-04 -1.17365E-04 -8.82699E-06  1.01024E-01  1.26112E-03 -1.89786E-04  2.05352E-04  1.16223E-05
  2.100  5.06489E-02 -1.17973E-03 -9.61000E-04 -1.39929E-04 -1.17678E-05  1.00966E-01  1.35953E-03 -1.16640E-04  2.50802E-04  1.76254E-05
  2.200  5.07748E-02 -7.78361E-04 -1.00729E-03 -1.63513E-04 -1.53493E-05  1.00934E-01  1.39623E-03 -2.95562E-05  3.00157E-04  2.57737E-05
  2.300  5.08750E-02 -3.49234E-04 -1.03567E-03 -1.87444E-04 -1.96239E-05  1.00930E-01  1.36731E-03  6.69542E-05  3.52243E-04  3.64615E-05
  2.400  5.09500E-02  9.47912E-05 -1.04386E-03 -2.10943E-04 -2.46313E-05  1.00956E-01  1.27345E-03  1.67141E-04  4.05515E-04  5.00306E-05
  2.500  5.10010E-02  5.40073E-04 -1.03016E-03 -2.33145E-04 -3.03964E-05  1.01009E-01  1.11997E-03  2.64367E-04  4.58073E-04  6.67233E-05
  2.600  5.10299E-02  9.72696E-04 -9.93611E-04 -2.53124E-04 -3.69272E-05  1.01088E-01  9.16708E-04  3.51559E-04  5.07720E-04  8.66304E-05
  2.700  5.10394E-02  1.37900E-03 -9.34057E-04 -2.69923E-04 -4.42142E-05  1.01187E-01  6.77408E-04  4.21744E-04  5.52045E-04  1.09642E-04
  2.800  5.10327E-02  1.74610E-03 -8.52198E-04 -2.82583E-04 -5.22284E-05  1.01301E-01  4.18893E-04  4.68616E-04  5.88535E-04  1.35404E-04
  2.900  5.10135E-02  2.06242E-03 -7.49628E-04 -2.90179E-04 -6.09213E-05  1.01420E-01  1.59947E-04  4.87084E-04  6.14723E-04  1.63287E-04
  3.000  5.09859E-02  2.31822E-03 -6.28841E-04 -2.91842E-04 -7.02231E-05  1.01537E-01 -7.99575E-05  4.73768E-04  6.28351E-04  1.92370E-04
  3.100  5.09541E-02  2.50595E-03 -4.93196E-04 -2.86800E-04 -8.00413E-05  1.01644E-01 -2.82004E-04  4.27367E-04  6.27546E-04  2.21458E-04
  3.200  5.09221E-02  2.62071E-03 -3.46855E-04 -2.74405E-04 -9.02592E-05  1.01731E-01 -4.29338E-04  3.48883E-04  6.11001E-04  2.49111E-04
  3.300  5.08939E-02  2.66052E-03 -1.94687E-04 -2.54163E-04 -1.00733E-04  1.01790E-01 -5.08231E-04  2.41663E-04  5.78138E-04  2.73710E-04
  3.400  5.08726E-02  2.62647E-03 -4.21387E-05 -2.25769E-04 -1.11290E-04  1.01813E-01 -5.09013E-04  1.11235E-04  5.29239E-04  2.93547E-04
  3.500  5.08605E-02  2.52287E-03  1.04935E-04 -1.89137E-04 -1.21725E-04  1.01795E-01 -4.26685E-04 -3.50392E-05  4.65537E-04  3.06935E-04
  3.600  5.08589E-02  2.35715E-03  2.40459E-04 -1.44430E-04 -1.31802E-04  1.01731E-01 -2.61163E-04 -1.88495E-04  3.89246E-04  3.12334E-04
  3.700  5.08675E-02  2.13975E-03  3.58362E-04 -9.20870E-05 -1.41248E-04  1.01616E-01 -1.71431E-05 -3.39822E-04  3.03514E-04  3.08481E-04
  3.800  5.08845E-02  1.88379E-03  4.52816E-04 -3.28445E-05 -1.49764E-04  1.01447E-01  2.96429E-04 -4.79805E-04  2.12313E-04  2.94515E-04
  3.900  5.09066E-02  1.60473E-03  5.18490E-04  3.22441E-05 -1.57021E-04  1.01224E-01  6.67216E-04 -6.00088E-04  1.20247E-04  2.70086E-04
  4.000  5.09285E-02  1.31980E-03  5.50802E-04  1.01804E-04 -1.62678E-04  1.00943E-01  1.08062E-03 -6.93885E-04  3.22856E-05  2.35435E-04
  4.100  5.09431E-02  1.04744E-03  5.46173E-04  1.74147E-04 -1.66386E-04  1.00603E-01  1.52111E-03 -7.56581E-04 -4.65414E-05  1.91435E-04
  4.200  5.09417E-02  8.06638E-04  5.02247E-04  2.47290E-04 -1.67811E-04  1.00203E-01  1.97355E-03 -7.86165E-04 -1.11498E-04  1.39588E-04
  4.300  5.09142E-02  6.16147E-04  4.18084E-04  3.18995E-04 -1.66654E-04  9.97408E-02  2.42461E-03 -7.83445E-04 -1.58498E-04  8.19756E-05
  4.400  5.08491E-02  4.93789E-04  2.94307E-04  3.86834E-04 -1.62669E-04  9.92124E-02  2.86389E-03 -7.52032E-04 -1.84442E-04  2.11598E-05
  4.500  5.07340E-02  4.55699E-04  1.33182E-04  4.48258E-04 -1.55692E-04  9.86134E-02  3.28487E-03 -6.98069E-04 -1.87506E-04 -3.99590E-05
  4.600  5.05561E-02  5.15617E-04 -6.13677E-05  5.00699E-04 -1.45662E-04  9.79380E-02  3.68552E-03 -6.29753E-04 -1.67358E-04 -9.83151E-05
  4.700  5.03024E-02  6.84265E-04 -2.83819E-04  5.41679E-04 -1.32642E-04  9.71794E-02  4.06851E-03 -5.56651E-04 -1.25277E-04 -1.50874E-04
  4.800  4.99605E-02  9.68812E-04 -5.27197E-04  5.68929E-04 -1.16835E-04  9.63292E-02  4.44102E-03 -4.88898E-04 -6.41480E-05 -1.94834E-04
  4.900  4.95187E-02  1.37246E-03 -7.83296E-04  5.80514E-04 -9.85904E-05  9.53785E-02  4.81423E-03 -4.36325E-04  1.16434E-05 -2.27817E-04
  5.000  4.89666E-02  1.89421E-03 -1.04297E-03  5.74949E-04 -7.84077E-05  9.43177E-02  5.20235E-03 -4.07601E-04  9.64507E-05 -2.48037E-04
  5.100  4.82957E-02  2.52874E-03 -1.29651E-03  5.51313E-04 -5.69233E-05  9.31373E-02  5.62148E-03 -4.09456E-04  1.83699E-04 -2.54427E-04
  5.200  4.74995E-02  3.26650E-03 -1.53402E-03  5.09326E-04 -3.48914E-05  9.18281E-02  6.08822E-03 -4.46057E-04  2.66303E-04 -2.46713E-04
  5.300  4.65738E-02  4.09397E-03 -1.74586E-03  4.49416E-04 -1.31526E-05  9.03816E-02  6.61827E-03 -5.18592E-04  3.37133E-04 -2.25440E-04
  5.400  4.55171E-02  4.99406E-03 -1.92310E-03  3.72735E-04  7.40523E-06  8.87907E-02  7.22496E-03 -6.25088E-04  3.89496E-04 -1.91929E-04
  5.500  4.43304E-02  5.94671E-03 -2.05794E-03  2.81151E-04  2.58928E-05  8.70502E-02  7.91799E-03 -7.60487E-04  4.17601E-04 -1.48186E-04
  5.600  4.30174E-02  6.92956E-03 -2.14404E-03  1.77190E-04  4.14693E-05  8.51567E-02  8.70238E-03 -9.16973E-04  4.16958E-04 -9.67641E-05
  5.700  4.15844E-02  7.91875E-03 -2.17689E-03  6.39452E-05  5.33923E-05  8.31092E-02  9.57771E-03 -1.08451E-03  3.84701E-04 -4.05810E-05
  5.800  4.00400E-02  8.88978E-03 -2.15401E-03 -5.50557E-05  6.10640E-05  8.09090E-02  1.05377E-02 -1.25156E-03  3.19784E-04  1.72734E-05
  5.900  3.83950E-02  9.81839E-03 -2.07507E-03 -1.76002E-04  6.40710E-05  7.85603E-02  1.15703E-02 -1.40592E-03  2.23064E-04  7.37427E-05
  6.000  3.66621E-02  1.06814E-02 -1.94193E-03 -2.94976E-04  6.22135E-05  7.60693E-02  1.26577E-02 -1.53560E-03  9.72412E-05  1.25996E-04
  6.100  3.48553E-02  1.14576E-02 -1.75853E-03 -4.08141E-04  5.55216E-05  7.34451E-02  1.37775E-02 -1.62963E-03 -5.33168E-05  1.71599E-04
  6.200  3.29900E-02  1.21283E-02 -1.53075E-03 -5.11917E-04  4.42578E-05  7.06986E-02  1.49036E-02 -1.67891E-03 -2.22866E-04  2.08639E-04
  6.300  3.10822E-02  1.26781E-02 -1.26604E-03 -6.03149E-04  2.89047E-05  6.78431E-02  1.60069E-02 -1.67673E-03 -4.04658E-04  2.35823E-04
  6.400  2.91481E-02  1.30954E-02 -9.73158E-04 -6.79249E-04  1.01390E-05  6.48933E-02  1.70576E-02 -1.61929E-03 -5.91370E-04  2.52508E-04
  6.500  2.72043E-02  1.33724E-02 -6.61666E-04 -7.38307E-04 -1.12074E-05  6.18658E-02  1.80259E-02 -1.50582E-03 -7.75547E-04  2.58694E-04
  6.600  2.52666E-02  1.35055E-02 -3.41543E-04 -7.79153E-04 -3.41944E-05  5.87779E-02  1.88836E-02 -1.33867E-03 -9.50047E-04  2.54974E-04
  6.700  2.33505E-02  1.34953E-02 -2.27070E-05 -8.01393E-04 -5.78272E-05  5.56480E-02  1.96057E-02 -1.12304E-03 -1.10843E-03  2.42442E-04
  6.800  2.14703E-02  1.33462E-02  2.85402E-04 -8.05383E-04 -8.11120E-05  5.24953E-02  2.01710E-02 -8.66611E-04 -1.24527E-03  2.22579E-04
  6.900  1.96393E-02  1.30661E-02  5.74216E-04 -7.92178E-04 -1.03109E-04  4.93387E-02  2.05636E-02 -5.78989E-04 -1.35642E-03  1.97119E-04
  7.000  1.78696E-02  1.26661E-02  8.36354E-04 -7.63437E-04 -1.22981E-04  4.61974E-02  2.07727E-02 -2.71084E-04 -1.43914E-03  1.67913E-04
  7.100  1.61715E-02  1.21598E-02  1.06587E-03 -7.21308E-04 -1.40033E-04  4.30903E-02  2.07937E-02  4.55787E-05 -1.49213E-03  1.36805E-04
  7.200  1.45540E-02  1.15629E-02  1.25843E-03 -6.68283E-04 -1.53738E-04  4.00354E-02  2.06277E-02  3.59531E-04 -1.51550E-03  1.05513E-04
  7.300  1.30244E-02  1.08922E-02  1.41133E-03 -6.07060E-04 -1.63757E-04  3.70500E-02  2.02814E-02  6.59989E-04 -1.51062E-03  7.55417E-05
  7.400  1.15882E-02  1.01652E-02  1.52353E-03 -5.40393E-04 -1.69942E-04  3.41501E-02  1.97665E-02  9.37384E-04 -1.47991E-03  4.81165E-05
  7.500  1.02495E-02  9.39947E-03  1.59554E-03 -4.70959E-04 -1.72328E-04  3.13504E-02  1.90991E-02  1.18378E-03 -1.42667E-03  2.41465E-05
  7.600  9.01058E-03  8.61203E-03  1.62925E-03 -4.01239E-04 -1.71114E-04  2.86638E-02  1.82985E-02  1.39315E-03 -1.35471E-03  4.21504E-06
  7.700  7.87246E-03  7.81884E-03  1.62770E-03 -3.33424E-04 -1.66638E-04  2.61016E-02  1.73867E-02  1.56153E-03 -1.26819E-03 -1.14068E-05
  7.800  6.83459E-03  7.03441E-03  1.59485E-03 -2.69348E-04 -1.59344E-04  2.36730E-02  1.63871E-02  1.68700E-03 -1.17130E-03 -2.27267E-05
  7.900  5.89517E-03  6.27149E-03  1.53532E-03 -2.10442E-04 -1.49750E-04  2.13852E-02  1.53237E-02  1.76957E-03 -1.06806E-03 -2.99845E-05
  8.000  5.05128E-03  5.54084E-03  1.45408E-03 -1.57726E-04 -1.38411E-04  1.92433E-02  1.42198E-02  1.81100E-03 -9.62169E-04 -3.35970E-05
  8.100  4.29899E-03  4.85115E-03  1.35622E-03 -1.11817E-04 -1.25885E-04  1.72505E-02  1.30981E-02  1.81445E-03 -8.56844E-04 -3.41005E-05
  8.200  3.63358E-03  4.20897E-03  1.24674E-03 -7.29581E-05 -1.12707E-04  1.54076E-02  1.19788E-02  1.78421E-03 -7.54755E-04 -3.20952E-05
  8.300  3.04965E-03  3.61882E-03  1.13030E-03 -4.10686E-05 -9.93630E-05  1.37137E-02  1.08804E-02  1.72531E-03 -6.57982E-04 -2.81957E-05
  8.400  2.54134E-03  3.08330E-03  1.01113E-03 -1.58000E-05 -8.62740E-05  1.21662E-02  9.81823E-03  1.64317E-03 -5.68025E-04 -2.29903E-05
  8.500  2.10246E-03  2.60327E-03  8.92874E-04  3.40025E-06 -7.37845E-05  1.07607E-02  8.80512E-03  1.54334E-03 -4.85840E-04 -1.70099E-05
  8.600  1.72667E-03  2.17811E-03  7.78560E-04  1.72257E-05 -6.21580E-05  9.49141E-03  7.85085E-03  1.43116E-03 -4.11899E-04 -1.07075E-05
  8.700  1.40760E-03  1.80593E-03  6.70557E-04  2.64500E-05 -5.15780E-05  8.35158E-03  6.96243E-03  1.31157E-03 -3.46274E-04 -4.44749E-06
  8.800  1.13900E-03  1.48387E-03  5.70592E-04  3.18732E-05 -4.21527E-05  7.33344E-03  6.14425E-03  1.18897E-03 -2.88719E-04  1.49685E-06
  8.900  9.14838E-04  1.20833E-03  4.79797E-04  3.42769E-05 -3.39240E-05  6.42858E-03  5.39835E-03  1.06710E-03 -2.38752E-04  6.93839E-06
  9.000  7.29385E-04  9.75216E-04  3.98769E-04  3.43891E-05 -2.68786E-05  5.62821E-03  4.72473E-03  9.48977E-04 -1.95743E-04  1.17668E-05
  9.100  5.77306E-04  7.80174E-04  3.27645E-04  3.28599E-05 -2.09594E-05  4.92335E-03  4.12169E-03  8.36930E-04 -1.58975E-04  1.59358E-05
  9.200  4.53693E-04  6.18765E-04  2.66194E-04  3.02459E-05 -1.60781E-05  4.30505E-03  3.58622E-03  7.32607E-04 -1.27708E-04  1.94491E-05
  9.300  3.54103E-04  4.86629E-04  2.13899E-04  2.70047E-05 -1.21260E-05  3.76458E-03  3.11427E-03  6.37058E-04 -1.01219E-04  2.23462E-05
  9.400  2.74570E-04  3.79606E-04  1.70040E-04  2.34955E-05 -8.98419E-06  3.29353E-03  2.70113E-03  5.50811E-04 -7.88350E-05  2.46898E-05
  9.500  2.11604E-04  2.93827E-04  1.33774E-04  1.99858E-05 -6.53195E-06  2.88396E-03  2.34168E-03  4.73964E-04 -5.99508E-05  2.65537E-05
  9.600  1.62178E-04  2.25779E-04  1.04193E-04  1.66618E-05 -4.65286E-06  2.52848E-03  2.03063E-03  4.06285E-04 -4.40399E-05  2.80146E-05
  9.700  1.23699E-04  1.72333E-04  8.03825E-05  1.36412E-05 -3.23957E-06  2.22032E-03  1.76271E-03  3.47293E-04 -3.06548E-05  2.91450E-05
  9.800  9.39784E-05  1.30758E-04  6.14611E-05  1.09863E-05 -2.19658E-06  1.95330E-03  1.53284E-03  2.96345E-04 -1.94226E-05  3.00083E-05
  9.900  7.11912E-05  9.87138E-05  4.66087E-05  8.71746E-06 -1.44172E-06  1.72189E-03  1.33622E-03  2.52700E-04 -1.00366E-05  3.06566E-05
 10.000  5.38380E-05  7.42279E-05  3.50867E-05  6.82520E-06 -9.06332E-07  1.52120E-03  1.16841E-03  2.15577E-04 -2.24701E-06  3.11295E-05
 10.100  4.07012E-05  5.56657E-05  2.62473E-05  5.28035E-06 -5.34647E-07  1.34688E-03  1.02536E-03  1.84197E-04  4.15071E-06  3.14546E-05
 10.200  3.08057E-05  4.16939E-05  1.95363E-05  4.04268E-06 -2.82579E-07  1.19520E-03  9.03473E-04  1.57813E-04  9.32537E-06  3.16483E-05
 10.300  2.33797E-05  3.12412E-05  1.44897E-05  3.06741E-06 -1.16172E-07  1.06287E-03  7.99545E-04  1.35733E-04  1.34194E-05  3.17179E-05
 10.400  1.78200E-05  2.34596E-05  1.07271E-05  2.30988E-06 -9.92603E-09  9.47115E-04  7.10787E-04  1.17328E-04  1.65562E-05  3.16637E-05
 10.500  1.36605E-05  1.76866E-05  7.94276E-06  1.72858E-06  5.48414E-08  8.45533E-04  6.34784E-04  1.02040E-04  1.88463E-05  3.14815E-05
 10.600  1.05453E-05  1.34116E-05  5.89511E-06  1.28692E-06  9.14954E-08  7.56097E-04  5.69472E-04  8.93807E-05  2.03915E-05  3.11641E-05
 10.700  8.20511E-06  1.02458E-05  4.39641E-06  9.53962E-07  1.09389E-07  6.77090E-04  5.13095E-04  7.89285E-05  2.12874E-05  3.07040E-05
 10.800  6.43814E-06  7.89640E-06  3.30293E-06  7.04368E-07  1.14939E-07  6.07064E-04  4.64174E-04  7.03230E-05  2.16258E-05  3.00948E-05
 10.900  5.09453E-06  6.14501E-06  2.50609E-06  5.18014E-07  1.12484E-07  5.44801E-04  4.21474E-04  6.32582E-05  2.14950E-05  2.93327E-05
 11.000  4.06366E-06  4.83027E-06  1.92481E-06  3.79262E-07  1.04935E-07  4.89279E-04  3.83966E-04  5.74763E-05  2.09796E-05  2.84173E-05
 11.100  3.26437E-06  3.83383E-06  1.49917E-06  2.76183E-07  9.42491E-08  4.39638E-04  3.50804E-04  5.27607E-05  2.01606E-05  2.73526E-05
 11.200  2.63737E-06  3.06947E-06  1.18520E-06  1.99793E-07  8.17651E-08  3.95155E-04  3.21292E-04  4.89300E-05  1.91145E-05  2.61469E-05
 11.300  2.13946E-06  2.47476E-06  9.50944E-07  1.43376E-07  6.84278E-08  3.55223E-04  2.94866E-04  4.58322E-05  1.79123E-05  2.48129E-05
 11.400  1.73927E-06  2.00475E-06  7.73307E-07  1.01922E-07  5.49314E-08  3.19324E-04  2.71064E-04  4.33405E-05  1.66189E-05  2.33674E-05
 11.500  1.41398E-06  1.62726E-06  6.35749E-07  7.16817E-08  4.18071E-08  2.87022E-04  2.49515E-04  4.13483E-05  1.52922E-05  2.18309E-05
 11.600  1.14706E-06  1.31944E-06  5.26559E-07  4.98375E-08  2.94725E-08  2.57938E-04  2.29921E-04  3.97664E-05  1.39826E-05  2.02263E-05
 11.700  9.26434E-07  1.06513E-06  4.37566E-07  3.42593E-08  1.82571E-08  2.31750E-04  2.12038E-04  3.85193E-05  1.27326E-05  1.85784E-05
 11.800  7.43299E-07  8.53005E-07  3.63191E-07  2.33325E-08  8.41442E-09  2.08173E-04  1.95672E-04  3.75433E-05  1.15765E-05  1.69128E-05
 11.900  5.91135E-07  6.75133E-07  2.99733E-07  1.58345E-08  1.25686E-10  1.86958E-04  1.80663E-04  3.67839E-05  1.05406E-05  1.52553E-05
 12.000  4.65041E-07  5.25939E-07  2.44826E-07  1.08444E-08 -6.49865E-09  1.67883E-04  1.66878E-04  3.61943E-05  9.64329E-06  1.36303E-05
 12.100  3.61227E-07  4.01417E-07  1.97021E-07  7.67362E-09 -1.14184E-08  1.50748E-04  1.54207E-04  3.57339E-05  8.89555E-06  1.20606E-05
 12.200  2.76646E-07  2.98560E-07  1.55461E-07  5.81069E-09 -1.46616E-08  1.35373E-04  1.42554E-04  3.53676E-05  8.30163E-06  1.05666E-05
 12.300  2.08742E-07  2.14946E-07  1.19638E-07  4.87585E-09 -1.63207E-08  1.21592E-04  1.31836E-04  3.50643E-05  7.85973E-06  9.16573E-06
 12.400  1.55271E-07  1.48461E-07  8.92100E-08  4.58332E-09 -1.65458E-08  1.09254E-04  1.21978E-04  3.47970E-05  7.56288E-06  7.87194E-06
 12.500  1.14191E-07  9.71168E-08  6.38781E-08  4.71144E-09 -1.55352E-08  9.82196E-05  1.12910E-04  3.45418E-05  7.39983E-06  6.69579E-06
 12.600  8.35996E-08  5.89629E-08  4.33054E-08  5.08048E-09 -1.35238E-08  8.83593E-05  1.04568E-04  3.42780E-05  7.35604E-06  5.64427E-06
 12.700  6.17127E-08  3.20488E-08  2.70809E-08  5.53799E-09 -1.07700E-08  7.95540E-05  9.68927E-05  3.39875E-05  7.41456E-06  4.72091E-06
 12.800  4.68600E-08  1.44383E-08  1.47126E-08  5.95115E-09 -7.54049E-09  7.16941E-05  8.98261E-05  3.36553E-05  7.55690E-06  3.92599E-06
 12.900  3.75021E-08  4.24767E-09  5.64326E-09  6.20482E-09 -4.09613E-09  6.46783E-05  8.33147E-05  3.32685E-05  7.76386E-06  3.25684E-06
 13.000  3.22499E-08 -3.01625E-10 -7.19323E-10  6.20370E-09 -6.78044E-10  5.84142E-05  7.73075E-05  3.28173E-05  8.01624E-06  2.70820E-06
 13.100  2.98858E-08 -8.30028E-10 -4.96649E-09  5.87683E-09  2.50420E-09  5.28172E-05  7.17570E-05  3.22939E-05  8.29544E-06  2.27263E-06
 13.200  2.93788E-08  1.24593E-09 -7.65312E-09  5.18235E-09  5.28184E-09  4.78108E-05  6.66189E-05  3.16931E-05  8.58397E-06  1.94095E-06
 13.300  2.98925E-08  4.74571E-09 -9.26763E-09  4.11122E-09  7.53289E-09  4.33257E-05  6.18524E-05  3.10121E-05  8.86584E-06  1.70265E-06
 13.400  3.07834E-08  8.74049E-09 -1.02107E-08  2.68862E-09  9.18470E-09  3.93000E-05  5.74202E-05  3.02500E-05  9.12690E-06  1.54633E-06
 13.500  3.15905E-08  1.25521E-08 -1.07844E-08  9.72385E-10  1.02130E-08  3.56786E-05  5.32889E-05  2.94081E-05  9.35498E-06  1.46010E-06
 13.600  3.20174E-08  1.57367E-08 -1.11907E-08 -9.51417E-10  1.06379E-08  3.24124E-05  4.94284E-05  2.84894E-05  9.54004E-06  1.43193E-06
 13.700  3.19080E-08  1.80568E-08 -1.15402E-08 -2.97555E-09  1.05170E-08  2.94586E-05  4.58124E-05  2.74986E-05  9.67421E-06  1.44998E-06
 13.800  3.12195E-08  1.94442E-08 -1.18657E-08 -4.98047E-09  9.93729E-09  2.67797E-05  4.24180E-05  2.64418E-05  9.75176E-06  1.50291E-06
 13.900  2.99935E-08  1.99597E-08 -1.21421E-08 -6.84413E-09  9.00511E-09  2.43431E-05  3.92256E-05  2.53264E-05  9.76905E-06  1.58010E-06
 14.000  2.83285E-08  1.97517E-08 -1.23063E-08 -8.45160E-09  7.83671E-09  2.21207E-05  3.62186E-05  2.41607E-05  9.72438E-06  1.67185E-06
 14.100  2.63547E-08  1.90178E-08 -1.22779E-08 -9.70376E-09  6.54882E-09  2.00886E-05  3.33830E-05  2.29539E-05  9.61786E-06  1.76954E-06
 14.200  2.42130E-08  1.79719E-08 -1.19764E-08 -1.05242E-08  5.25057E-09  1.82262E-05  3.07075E-05  2.17156E-05  9.45121E-06  1.86570E-06
 14.300  2.20379E-08  1.68173E-08 -1.13357E-08 -1.08639E-08  4.03702E-09  1.65161E-05  2.81826E-05  2.04559E-05  9.22758E-06  1.95411E-06
 14.400  1.99458E-08  1.57281E-08 -1.03136E-08 -1.07035E-08  2.98449E-09  1.49437E-05  2.58011E-05  1.91849E-05  8.95133E-06  2.02978E-06
 14.500  1.80277E-08  1.48371E-08 -8.89739E-09 -1.00530E-08  2.14794E-09  1.34965E-05  2.35567E-05  1.79128E-05  8.62778E-06  2.08896E-06
 14.600  1.63458E-08  1.42306E-08 -7.10502E-09 -8.94926E-09  1.56018E-09  1.21639E-05  2.14447E-05  1.66492E-05  8.26304E-06  2.12907E-06
 14.700  1.49337E-08  1.39492E-08 -4.98267E-09 -7.45212E-09  1.23274E-09  1.09372E-05  1.94611E-05  1.54037E-05  7.86371E-06  2.14862E-06
 14.800  1.37987E-08  1.39920E-08 -2.59996E-09 -5.63882E-09  1.15815E-09  9.80859E-06  1.76026E-05  1.41850E-05  7.43672E-06  2.14709E-06
 14.900  1.29266E-08  1.43243E-08 -4.32948E-11 -3.59796E-09  1.31315E-09  8.77151E-06  1.58661E-05  1.30010E-05  6.98910E-06  2.12483E-06
 15.000  1.22869E-08  1.48867E-08  2.59154E-09 -1.42332E-09  1.66249E-09  7.82016E-06  1.42489E-05  1.18589E-05  6.52779E-06  2.08292E-06
 15.100  1.18381E-08  1.56043E-08  5.20674E-09  7.92009E-10  2.16300E-09  6.94933E-06  1.27480E-05  1.07649E-05  6.05949E-06  2.02300E-06
 15.200  1.15330E-08  1.63960E-08  7.70916E-09  2.96075E-09  2.76748E-09  6.15426E-06  1.13604E-05  9.72430E-06  5.59048E-06  1.94718E-06
 15.300  1.13239E-08  1.71821E-08  1.00159E-08  5.00561E-09  3.42835E-09  5.43053E-06  1.00829E-05  8.74110E-06  5.12653E-06  1.85783E-06
 15.400  1.11657E-08  1.78903E-08  1.20583E-08  6.86224E-09  4.10064E-09  4.77393E-06  8.91185E-06  7.81842E-06  4.67282E-06  1.75755E-06
 15.500  1.10187E-08  1.84607E-08  1.37848E-08  8.48110E-09  4.74433E-09  4.18040E-06  7.84328E-06  6.95829E-06  4.23383E-06  1.64895E-06
 15.600  1.08510E-08  1.88476E-08  1.51617E-08  9.82816E-09  5.32605E-09  3.64597E-06  6.87285E-06  6.16178E-06  3.81332E-06  1.53462E-06
 15.700  1.06386E-08  1.90216E-08  1.61732E-08  1.08846E-08  5.82001E-09  3.16676E-06  5.99584E-06  5.42899E-06  3.41435E-06  1.41704E-06
 15.800  1.03659E-08  1.89683E-08  1.68202E-08  1.16456E-08  6.20830E-09  2.73894E-06  5.20724E-06  4.75919E-06  3.03923E-06  1.29847E-06
 15.900  1.00251E-08  1.86879E-08  1.71176E-08  1.21188E-08  6.48069E-09  2.35872E-06  4.50177E-06  4.15090E-06  2.68961E-06  1.18094E-06
 16.000  9.61523E-09  1.81922E-08  1.70925E-08  1.23219E-08  6.63400E-09  2.02239E-06  3.87396E-06  3.60198E-06  2.36647E-06  1.06622E-06
 16.100  9.14073E-09  1.75027E-08  1.67804E-08  1.22807E-08  6.67112E-09  1.72632E-06  3.31820E-06  3.10977E-06  2.07023E-06  9.55775E-07
 16.200  8.61033E-09  1.66478E-08  1.62231E-08  1.20262E-08  6.59985E-09  1.46696E-06  2.82886E-06  2.67117E-06  1.80077E-06  8.50786E-07
 16.300  8.03560E-09  1.56600E-08  1.54652E-08  1.15930E-08  6.43175E-09  1.24091E-06  2.40030E-06  2.28276E-06  1.55753E-06  7.52142E-07
 16.400  7.42970E-09  1.45737E-08  1.45522E-08  1.10165E-08  6.18091E-09  1.04488E-06  2.02701E-06  1.94092E-06  1.33959E-06  6.60467E-07
 16.500  6.80627E-09  1.34230E-08  1.35279E-08  1.03318E-08  5.86279E-09  8.75751E-07  1.70362E-06  1.64189E-06  1.14573E-06  5.76139E-07
 16.600  6.17858E-09  1.22402E-08  1.24334E-08  9.57220E-09  5.49330E-09  7.30592E-07  1.42498E-06  1.38190E-06  9.74510E-07  4.99321E-07
 16.700  5.55880E-09  1.10544E-08  1.13052E-08  8.76782E-09  5.08796E-09  6.06651E-07  1.18621E-06  1.15719E-06  8.24329E-07  4.29986E-07
 16.800  4.95756E-09  9.89080E-09  1.01752E-08  7.94529E-09  4.66122E-09  5.01379E-07  9.82720E-07  9.64141E-07  6.93493E-07  3.67957E-07
 16.900  4.38365E-09  8.77030E-09  9.06958E-09  7.12716E-09  4.22607E-09  4.12430E-07  8.10231E-07  7.99257E-07  5.80269E-07  3.12932E-07
 17.000  3.84391E-09  7.70922E-09  8.00941E-09  6.33183E-09  3.79371E-09  3.37668E-07  6.64815E-07  6.59250E-07  4.82925E-07  2.64516E-07
 17.100  3.34326E-09  6.71951E-09  7.01046E-09  5.57363E-09  3.37339E-09  2.75158E-07  5.42884E-07  5.41053E-07  3.99770E-07  2.22251E-07
 17.200  2.88478E-09  5.80907E-09  6.08377E-09  4.86307E-09  2.97243E-09  2.23165E-07  4.41195E-07  4.41840E-07  3.29184E-07  1.85635E-07
 17.300  2.46994E-09  4.98222E-09  5.23616E-09  4.20723E-09  2.59626E-09  1.80147E-07  3.56840E-07  3.59032E-07  2.69638E-07  1.54148E-07
 17.400  2.09881E-09  4.24016E-09  4.47081E-09  3.61018E-09  2.24861E-09  1.44738E-07  2.87238E-07  2.90305E-07  2.19713E-07  1.27264E-07
 17.500  1.77032E-09  3.58159E-09  3.78794E-09  3.07346E-09  1.93166E-09  1.15744E-07  2.30113E-07  2.33582E-07  1.78106E-07  1.04472E-07
 17.600  1.48251E-09  3.00324E-09  3.18539E-09  2.59658E-09  1.64632E-09  9.21248E-08  1.83475E-07  1.87025E-07  1.43637E-07  8.52808E-08
 17.700  1.23276E-09  2.50036E-09  2.65924E-09  2.17746E-09  1.39240E-09  7.29835E-08  1.45598E-07  1.49019E-07  1.15249E-07  6.92286E-08
 17.800  1.01805E-09  2.06723E-09  2.20430E-09  1.81285E-09  1.16889E-09  5.75502E-08  1.14997E-07  1.18162E-07  9.20032E-08  5.58897E-08
 17.900  8.35083E-10  1.69753E-09  1.81460E-09  1.49873E-09  9.74170E-10  4.51700E-08  9.04012E-08  9.32437E-08  7.30776E-08  4.48763E-08
 18.000  6.80489E-10  1.38470E-09  1.48375E-09  1.23058E-09  8.06167E-10  3.52890E-08  7.07340E-08  7.32282E-08  5.77558E-08  3.58400E-08
 18.100  5.50938E-10  1.12218E-09  1.20525E-09  1.00367E-09  6.62553E-10  2.74425E-08  5.50880E-08  5.72353E-08  4.54205E-08  2.84714E-08
 18.200  4.43230E-10  9.03646E-10  9.72722E-10  8.13261E-10  5.40866E-10  2.12427E-08  4.27040E-08  4.45235E-08  3.55442E-08  2.24990E-08
 18.300  3.54366E-10  7.23131E-10  7.80115E-10  6.54774E-10  4.38629E-10  1.63684E-08  3.29513E-08  3.44718E-08  2.76797E-08  1.76870E-08
 18.400  2.81593E-10  5.75135E-10  6.21783E-10  5.23879E-10  3.53431E-10  1.25551E-08  2.53092E-08  2.65644E-08  2.14509E-08  1.38326E-08
 18.500  2.22425E-10  4.54679E-10  4.92585E-10  4.16583E-10  2.82987E-10  9.58649E-09  1.93505E-08  2.03755E-08  1.65438E-08  1.07631E-08
 18.600  1.74656E-10  3.57329E-10  3.87911E-10  3.29270E-10  2.25183E-10  7.28676E-09  1.47275E-08  1.55561E-08  1.26982E-08  8.33238E-09
 18.700  1.36353E-10  2.79192E-10  3.03696E-10  2.58720E-10  1.78100E-10  5.51381E-09  1.11582E-08  1.18219E-08  9.70030E-09  6.41835E-09
 18.800  1.05843E-10  2.16895E-10  2.36398E-10  2.02106E-10  1.40022E-10  4.15357E-09  8.41580E-09  8.94291E-09  7.37522E-09  4.91947E-09
 18.900  8.16998E-11  1.67552E-10  1.82972E-10  1.56978E-10  1.09440E-10  3.11496E-09  6.31897E-09  6.73423E-09  5.58118E-09  3.75209E-09
 19.000  6.27152E-11  1.28717E-10  1.40832E-10  1.21242E-10  8.50442E-11  2.32570E-09  4.72340E-09  5.04806E-09  4.20390E-09  2.84778E-09
 19.100  4.78799E-11  9.83438E-11  1.07803E-10  9.31220E-11  6.57118E-11  1.72875E-09  3.51504E-09  3.76704E-09  3.15185E-09  2.15097E-09
 19.200  3.63576E-11  7.47333E-11  8.20735E-11  7.11337E-11  5.04904E-11  1.27938E-09  2.60424E-09  2.79849E-09  2.35223E-09  1.61687E-09
 19.300  2.74619E-11  5.64898E-11  6.21519E-11  5.40449E-11  3.85811E-11  9.42677E-10  1.92097E-09  2.06971E-09  1.74745E-09  1.20961E-09
 19.400  2.06343E-11  4.24761E-11  4.68181E-11  4.08434E-11  2.93208E-11  6.91563E-10  1.41076E-09  1.52392E-09  1.29228E-09  9.00661E-10
 19.500  1.54241E-11  3.17737E-11  3.50842E-11  3.07047E-11  2.21638E-11  5.05144E-10  1.03155E-09  1.11712E-09  9.51366E-10  6.67479E-10
 19.600  1.14706E-11  2.36464E-11  2.61562E-11  2.29634E-11  1.66651E-11  3.67385E-10  7.51003E-10  8.15311E-10  6.97247E-10  4.92368E-10
 19.700  8.48751E-12  1.75091E-11  1.94013E-11  1.70859E-11  1.24652E-11  2.66048E-10  5.44397E-10  5.92447E-10  5.08729E-10  3.61521E-10
 19.800  6.24889E-12  1.29000E-11  1.43187E-11  1.26485E-11  9.27561E-12  1.91840E-10  3.92936E-10  4.28633E-10  3.69537E-10  2.64229E-10
 19.900  4.57804E-12  9.45723E-12  1.05152E-11  9.31675E-12  6.86698E-12  1.37742E-10  2.82403E-10  3.08776E-10  2.67247E-10  1.92242E-10
  67 223 200   0.100
  0.000  4.61056E-02 -2.40495E-16 -3.85109E-16 -3.81533E-16 -1.64506E-16  1.01306E-01 -5.12023E-16 -8.53484E-16 -6.50482E-16 -1.35897E-15
  0.100  4.61240E-02 -2.64092E-05 -1.74223E-08 -5.29524E-12 -5.36434E-16  1.01304E-01 -2.01798E-05 -1.61746E-08  3.54105E-12  6.83774E-15
  0.200  4.61787E-02 -1.04556E-04 -2.76521E-07 -3.36137E-10 -2.62602E-13  1.01298E-01 -7.88431E-05 -2.55161E-07  2.25458E-10 -1.08174E-13
  0.300  4.62687E-02 -2.31235E-04 -1.38121E-06 -3.77652E-09 -6.61245E-12  1.01287E-01 -1.70504E-04 -1.26152E-06  2.55411E-09 -2.49088E-12
  0.400  4.63921E-02 -4.01229E-04 -4.28387E-06 -2.08144E-08 -6.47952E-11  1.01270E-01 -2.86485E-04 -3.85597E-06  1.42400E-08 -2.26949E-11
  0.500  4.65467E-02 -6.07489E-04 -1.02080E-05 -7.74599E-08 -3.76884E-10  1.01248E-01 -4.15582E-04 -9.01366E-06  5.37809E-08 -1.17481E-10
  0.600  4.67295E-02 -8.41384E-04 -2.05476E-05 -2.24404E-07 -1.57291E-09  1.01220E-01 -5.44931E-04 -1.77105E-05  1.58624E-07 -4.14047E-10
  0.700  4.69371E-02 -1.09301E-03 -3.67497E-05 -5.46001E-07 -5.21200E-09  1.01184E-01 -6.61008E-04 -3.07526E-05  3.94158E-07 -1.07226E-09
  0.800  4.71657E-02 -1.35152E-03 -6.01885E-05 -1.16746E-06 -1.45669E-08  1.01142E-01 -7.50705E-04 -4.86071E-05  8.63329E-07 -2.02411E-09
  0.900  4.74114E-02 -1.60556E-03 -9.20393E-05 -2.25877E-06 -3.57054E-08  1.01093E-01 -8.02392E-04 -7.12519E-05  1.71606E-06 -2.23938E-09
  1.000  4.76699E-02 -1.84362E-03 -1.33160E-04 -4.03414E-06 -7.88300E-08  1.01037E-01 -8.06889E-04 -9.80642E-05  3.15755E-06  1.82158E-09
  1.100  4.79371E-02 -2.05454E-03 -1.83992E-04 -6.74619E-06 -1.59775E-07  1.00975E-01 -7.58281E-04 -1.27762E-04  5.45433E-06  1.89510E-08
  1.200  4.82087E-02 -2.22783E-03 -2.44475E-04 -1.06748E-05 -3.01513E-07  1.00909E-01 -6.54506E-04 -1.58413E-04  8.93689E-06  6.74869E-08
  1.300  4.84807E-02 -2.35416E-03 -3.14003E-04 -1.61109E-05 -5.35480E-07  1.00841E-01 -4.97662E-04 -1.87514E-04  1.39977E-05  1.81375E-07
  1.400  4.87489E-02 -2.42570E-03 -3.91399E-04 -2.33362E-05 -9.02519E-07  1.00773E-01 -2.94019E-04 -2.12148E-04  2.10831E-05  4.17978E-07
  1.500  4.90098E-02 -2.43643E-03 -4.74927E-04 -3.26002E-05 -1.45325E-06  1.00709E-01 -5.37053E-05 -2.29203E-04  3.06783E-05  8.67256E-07
  1.600  4.92599E-02 -2.38241E-03 -5.62338E-04 -4.40963E-05 -2.24775E-06  1.00651E-01  2.09903E-04 -2.35647E-04  4.32840E-05  1.66153E-06
  1.700  4.94960E-02 -2.26199E-03 -6.50945E-04 -5.79390E-05 -3.35438E-06  1.00604E-01  4.81061E-04 -2.28837E-04  5.93844E-05  2.98456E-06
  1.800  4.97154E-02 -2.07593E-03 -7.37717E-04 -7.41433E-05 -4.84793E-06  1.00570E-01  7.42743E-04 -2.06826E-04  7.94078E-05  5.07834E-06
  1.900  4.99156E-02 -1.82739E-03 -8.19401E-04 -9.26090E-05 -6.80694E-06  1.00553E-01  9.77860E-04 -1.68657E-04  1.03678E-04  8.24560E-06
  2.000  5.00948E-02 -1.52192E-03 -8.92660E-04 -1.13110E-04 -9.31056E-06  1.00556E-01  1.17053E-03 -1.14593E-04  1.32363E-04  1.28462E-05
  2.100  5.02515E-02 -1.16727E-03 -9.54210E-04 -1.35288E-04 -1.24351E-05  1.00580E-01  1.30730E-03 -4.62676E-05  1.65417E-04  1.92851E-05
  2.200  5.03849E-02 -7.73193E-04 -1.00097E-03 -1.58660E-04 -1.62505E-05  1.00627E-01  1.37821E-03  3.32686E-05  2.02535E-04  2.79917E-05
  2.300  5.04945E-02 -3.51085E-04 -1.03021E-03 -1.82617E-04 -2.08167E-05  1.00695E-01  1.37768E-03  1.19632E-04  2.43098E-04  3.93887E-05
  2.400  5.05807E-02  8.63730E-05 -1.03966E-03 -2.06447E-04 -2.61809E-05  1.00784E-01  1.30501E-03  2.07315E-04  2.86151E-04  5.38517E-05
  2.500  5.06444E-02  5.25680E-04 -1.02767E-03 -2.29346E-04 -3.23748E-05  1.00891E-01  1.16465E-03  2.90014E-04  3.30387E-04  7.16621E-05
  2.600  5.06872E-02  9.53012E-04 -9.93280E-04 -2.50441E-04 -3.94123E-05  1.01013E-01  9.65976E-04  3.61074E-04  3.74163E-04  9.29547E-05
  2.700  5.07112E-02  1.35475E-03 -9.36301E-04 -2.68816E-04 -4.72879E-05  1.01143E-01  7.22791E-04  4.13992E-04  4.15544E-04  1.17666E-04
  2.800  5.07191E-02  1.71800E-03 -8.57395E-04 -2.83538E-04 -5.59752E-05  1.01277E-01  4.52442E-04  4.42966E-04  4.52380E-04  1.45489E-04
  2.900  5.07143E-02  2.03117E-03 -7.58088E-04 -2.93678E-04 -6.54256E-05  1.01407E-01  1.74682E-04  4.43426E-04  4.82416E-04  1.75835E-04
  3.000  5.07002E-02  2.28440E-03 -6.40775E-04 -2.98349E-04 -7.55663E-05  1.01527E-01 -8.96721E-05  4.12500E-04  5.03429E-04  2.07818E-04
  3.100  5.06807E-02  2.47007E-03 -5.08693E-04 -2.96725E-04 -8.62984E-05  1.01631E-01 -3.20159E-04  3.49375E-04  5.13386E-04  2.40257E-04
  3.200  5.06593E-02  2.58319E-03 -3.65863E-04 -2.88080E-04 -9.74948E-05  1.01711E-01 -4.98082E-04  2.55499E-04  5.10622E-04  2.71706E-04
  3.300  5.06397E-02  2.62163E-03 -2.16995E-04 -2.71812E-04 -1.08997E-04  1.01762E-01 -6.07782E-04  1.34609E-04  4.94002E-04  3.00507E-04
  3.400  5.06248E-02  2.58642E-03 -6.73665E-05 -2.47485E-04 -1.20612E-04  1.01779E-01 -6.37686E-04 -7.44269E-06  4.63080E-04  3.24877E-04
  3.500  5.06169E-02  2.48175E-03  7.73324E-05 -2.14855E-04 -1.32110E-04  1.01757E-01 -5.81033E-04 -1.63051E-04  4.18215E-04  3.43011E-04
  3.600  5.06172E-02  2.31501E-03  2.11182E-04 -1.73910E-04 -1.43222E-04  1.01692E-01 -4.36229E-04 -3.23394E-04  3.60647E-04  3.53204E-04
  3.700  5.06258E-02  2.09658E-03  3.28241E-04 -1.24903E-04 -1.53641E-04  1.01582E-01 -2.06797E-04 -4.79103E-04  2.92505E-04  3.53985E-04
  3.800  5.06411E-02  1.83959E-03  4.22778E-04 -6.83829E-05 -1.63022E-04  1.01424E-01  9.90799E-05 -6.21008E-04  2.16750E-04  3.44244E-04
  3.900  5.06601E-02  1.55950E-03  4.89512E-04 -5.21735E-06 -1.70989E-04  1.01217E-01  4.69370E-04 -7.40906E-04  1.37047E-04  3.23351E-04
  4.000  5.06781E-02  1.27359E-03  5.23857E-04  6.33888E-05 -1.77145E-04  1.00957E-01  8.89321E-04 -8.32270E-04  5.75585E-05  2.91246E-04
  4.100  5.06887E-02  1.00038E-03  5.22162E-04  1.35891E-04 -1.81085E-04  1.00644E-01  1.34278E-03 -8.90846E-04 -1.73114E-05  2.48503E-04
  4.200  5.06838E-02  7.58909E-04  4.81933E-04  2.10419E-04 -1.82412E-04  1.00273E-01  1.81363E-03 -9.15080E-04 -8.32229E-05  1.96341E-04
  4.300  5.06539E-02  5.68039E-04  4.02022E-04  2.84802E-04 -1.80763E-04  9.98424E-02  2.28721E-03 -9.06314E-04 -1.36226E-04  1.36603E-04
  4.400  5.05882E-02  4.45681E-04  2.82775E-04  3.56627E-04 -1.75834E-04  9.93460E-02  2.75156E-03 -8.68748E-04 -1.73082E-04  7.16758E-05
  4.500  5.04749E-02  4.08056E-04  1.26120E-04  4.23304E-04 -1.67403E-04  9.87785E-02  3.19855E-03 -8.09153E-04 -1.91553E-04  4.37387E-06
  4.600  5.03018E-02  4.68979E-04 -6.44056E-05  4.82164E-04 -1.55359E-04  9.81329E-02  3.62449E-03 -7.36354E-04 -1.90636E-04 -6.22195E-05
  4.700  5.00564E-02  6.39226E-04 -2.83704E-04  5.30561E-04 -1.39726E-04  9.74015E-02  4.03057E-03 -6.60528E-04 -1.70715E-04 -1.24933E-04
  4.800  4.97264E-02  9.25989E-04 -5.25241E-04  5.66001E-04 -1.20683E-04  9.65757E-02  4.42275E-03 -5.92366E-04 -1.33611E-04 -1.80703E-04
  4.900  4.93004E-02  1.33247E-03 -7.81248E-04  5.86265E-04 -9.85746E-05  9.56461E-02  4.81125E-03 -5.42175E-04 -8.25305E-05 -2.26768E-04
  5.000  4.87681E-02  1.85762E-03 -1.04300E-03  5.89540E-04 -7.39136E-05  9.46036E-02  5.20976E-03 -5.19004E-04 -2.19000E-05 -2.60845E-04
  5.100  4.81207E-02  2.49604E-03 -1.30114E-03  5.74534E-04 -4.73749E-05  9.34392E-02  5.63424E-03 -5.29848E-04  4.28938E-05 -2.81278E-04
  5.200  4.73515E-02  3.23805E-03 -1.54608E-03  5.40581E-04 -1.97756E-05  9.21443E-02  6.10156E-03 -5.79019E-04  1.05850E-04 -2.87144E-04
  5.300  4.64558E-02  4.06999E-03 -1.76840E-03  4.87709E-04  7.95496E-06  9.07115E-02  6.62801E-03 -6.67725E-04  1.60755E-04 -2.78306E-04
  5.400  4.54314E-02  4.97457E-03 -1.95929E-03  4.16690E-04  3.48152E-05  8.91349E-02  7.22781E-03 -7.93901E-04  2.01610E-04 -2.55412E-04
  5.500  4.42787E-02  5.93152E-03 -2.11090E-03  3.29035E-04  5.97800E-05  8.74101E-02  7.91175E-03 -9.52297E-04  2.23050E-04 -2.19852E-04
  5.600  4.30006E-02  6.91825E-03 -2.21681E-03  2.26965E-04  8.18534E-05  8.55345E-02  8.68600E-03 -1.13482E-03  2.20726E-04 -1.73647E-04
  5.700  4.16024E-02  7.91065E-03 -2.27225E-03  1.13331E-04  1.00124E-04  8.35079E-02  9.55128E-03 -1.33109E-03  1.91616E-04 -1.19315E-04
  5.800  4.00919E-02  8.88401E-03 -2.27436E-03 -8.50058E-06  1.13817E-04  8.13319E-02  1.05023E-02 -1.52918E-03  1.34245E-04 -5.96982E-05
  5.900  3.84792E-02  9.81383E-03 -2.22236E-03 -1.34792E-04  1.22342E-04  7.90106E-02  1.15279E-02 -1.71648E-03  4.87869E-05  2.21907E-06
  6.000  3.67759E-02  1.06768E-02 -2.11754E-03 -2.61603E-04  1.25329E-04  7.65500E-02  1.26108E-02 -1.88056E-03 -6.29334E-05  6.34948E-05
  6.100  3.49956E-02  1.14514E-02 -1.96322E-03 -3.84972E-04  1.22651E-04  7.39584E-02  1.37289E-02 -2.01004E-03 -1.97567E-04  1.21401E-04
  6.200  3.31529E-02  1.21191E-02 -1.76458E-03 -5.01101E-04  1.14440E-04  7.12458E-02  1.48558E-02 -2.09537E-03 -3.50459E-04  1.73573E-04
  6.300  3.12633E-02  1.26644E-02 -1.52839E-03 -6.06528E-04  1.01074E-04  6.84242E-02  1.59624E-02 -2.12941E-03 -5.15953E-04  2.18116E-04
  6.400  2.93430E-02  1.30756E-02 -1.26269E-03 -6.98281E-04  8.31585E-05  6.55071E-02  1.70182E-02 -2.10792E-03 -6.87750E-04  2.53688E-04
  6.500  2.74082E-02  1.33451E-02 -9.76391E-04 -7.74006E-04  6.14959E-05  6.25096E-02  1.79925E-02 -2.02970E-03 -8.59292E-04  2.79522E-04
  6.600  2.54748E-02  1.34696E-02 -6.78850E-04 -8.32048E-04  3.70351E-05  5.94476E-02  1.88565E-02 -1.89663E-03 -1.02415E-03  2.95422E-04
  6.700  2.35584E-02  1.34498E-02 -3.79452E-04 -8.71506E-04  1.08203E-05  5.63385E-02  1.95843E-02 -1.71343E-03 -1.17639E-03  3.01718E-04
  6.800  2.16739E-02  1.32903E-02 -8.71927E-05 -8.92233E-04 -1.60674E-05  5.32001E-02  2.01538E-02 -1.48730E-03 -1.31086E-03  2.99187E-04
  6.900  1.98349E-02  1.29994E-02  1.89693E-04 -8.94803E-04 -4.25671E-05  5.00509E-02  2.05485E-02 -1.22734E-03 -1.42342E-03  2.88959E-04
  7.000  1.80539E-02  1.25887E-02  4.44043E-04 -8.80436E-04 -6.76921E-05  4.69096E-02  2.07571E-02 -9.43952E-04 -1.51114E-03  2.72410E-04
  7.100  1.63420E-02  1.20720E-02  6.70013E-04 -8.50900E-04 -9.05762E-05  4.37947E-02  2.07748E-02 -6.48183E-04 -1.57231E-03  2.51050E-04
  7.200  1.47087E-02  1.14654E-02  8.63229E-04 -8.08383E-04 -1.10511E-04  4.07247E-02  2.06025E-02 -3.51042E-04 -1.60645E-03  2.26418E-04
  7.300  1.31620E-02  1.07859E-02  1.02087E-03 -7.55359E-04 -1.26968E-04  3.77171E-02  2.02472E-02 -6.29159E-05 -1.61425E-03  1.99989E-04
  7.400  1.17080E-02  1.00515E-02  1.14165E-03 -6.94451E-04 -1.39616E-04  3.47888E-02  1.97209E-02  2.06950E-04 -1.59738E-03  1.73098E-04
  7.500  1.03515E-02  9.27982E-03  1.22574E-03 -6.28291E-04 -1.48317E-04  3.19553E-02  1.90401E-02  4.50844E-04 -1.55833E-03  1.46886E-04
  7.600  9.09522E-03  8.48811E-03  1.27462E-03 -5.59401E-04 -1.53114E-04  2.92307E-02  1.82248E-02  6.62855E-04 -1.50018E-03  1.22269E-04
  7.700  7.94060E-03  7.69243E-03  1.29088E-03 -4.90093E-04 -1.54215E-04  2.66274E-02  1.72977E-02  8.38993E-04 -1.42638E-03  9.99170E-05
  7.800  6.88745E-03  6.90731E-03  1.27799E-03 -4.22387E-04 -1.51960E-04  2.41556E-02  1.62829E-02  9.77197E-04 -1.34056E-03  8.02661E-05
  7.900  5.93424E-03  6.14547E-03  1.24002E-03 -3.57960E-04 -1.46792E-04  2.18238E-02  1.52048E-02  1.07721E-03 -1.24629E-03  6.35333E-05
  8.000  5.07822E-03  5.41757E-03  1.18145E-03 -2.98115E-04 -1.39220E-04  1.96380E-02  1.40877E-02  1.14039E-03 -1.14695E-03  4.97477E-05
  8.100  4.31555E-03  4.73213E-03  1.10686E-03 -2.43777E-04 -1.29787E-04  1.76022E-02  1.29542E-02  1.16940E-03 -1.04559E-03  3.87867E-05
  8.200  3.64151E-03  4.09553E-03  1.02076E-03 -1.95512E-04 -1.19035E-04  1.57182E-02  1.18253E-02  1.16796E-03 -9.44854E-04  3.04151E-05
  8.300  3.05065E-03  3.51204E-03  9.27419E-04 -1.53556E-04 -1.07485E-04  1.39856E-02  1.07195E-02  1.14043E-03 -8.46907E-04  2.43229E-05
  8.400  2.53699E-03  2.98401E-03  8.30664E-04 -1.17864E-04 -9.56070E-05  1.24020E-02  9.65221E-03  1.09159E-03 -7.53450E-04  2.01611E-05
  8.500  2.09419E-03  2.51206E-03  7.33836E-04 -8.81621E-05 -8.38104E-05  1.09635E-02  8.63623E-03  1.02629E-03 -6.65712E-04  1.75710E-05
  8.600  1.71574E-03  2.09532E-03  6.39703E-04 -6.40013E-05 -7.24319E-05  9.66448E-03  7.68121E-03  9.49205E-04 -5.84502E-04  1.62079E-05
  8.700  1.39507E-03  1.73166E-03  5.50445E-04 -4.48161E-05 -6.17327E-05  8.49807E-03  6.79394E-03  8.64683E-04 -5.10251E-04  1.57585E-05
  8.800  1.12575E-03  1.41802E-03  4.67662E-04 -2.99731E-05 -5.18990E-05  7.45647E-03  5.97855E-03  7.76559E-04 -4.43083E-04  1.59510E-05
  8.900  9.01558E-04  1.15060E-03  3.92412E-04 -1.88161E-05 -4.30476E-05  6.53111E-03  5.23679E-03  6.88089E-04 -3.82877E-04  1.65611E-05
  9.000  7.16592E-04  9.25191E-04  3.25272E-04 -1.07027E-05 -3.52336E-05  5.71297E-03  4.56835E-03  6.01906E-04 -3.29332E-04  1.74119E-05
  9.100  5.65362E-04  7.37309E-04  2.66404E-04 -5.03141E-06 -2.84605E-05  4.99283E-03  3.97125E-03  5.20027E-04 -2.82023E-04  1.83713E-05
  9.200  4.42829E-04  5.82442E-04  2.15638E-04 -1.26152E-06 -2.26914E-05  4.36148E-03  3.44219E-03  4.43884E-04 -2.40454E-04  1.93467E-05
  9.300  3.44441E-04  4.56184E-04  1.72548E-04  1.07621E-06 -1.78588E-05  3.80990E-03  2.97690E-03  3.74393E-04 -2.04098E-04  2.02781E-05
  9.400  2.66146E-04  3.54361E-04  1.36526E-04  2.37496E-06 -1.38757E-05  3.32943E-03  2.57047E-03  3.12020E-04 -1.72427E-04  2.11312E-05
  9.500  2.04390E-04  2.73113E-04  1.06854E-04  2.95298E-06 -1.06436E-05  2.91190E-03  2.21760E-03  2.56870E-04 -1.44934E-04  2.18907E-05
  9.600  1.56099E-04  2.08954E-04  8.27594E-05  3.05880E-06 -8.06054E-06  2.54970E-03  1.91291E-03  2.08769E-04 -1.21148E-04  2.25533E-05
  9.700  1.18652E-04  1.58801E-04  6.34615E-05  2.87908E-06 -6.02644E-06  2.23583E-03  1.65104E-03  1.67338E-04 -1.00642E-04  2.31230E-05
  9.800  8.98439E-05  1.19976E-04  4.82103E-05  2.54803E-06 -4.44750E-06  1.96398E-03  1.42685E-03  1.32066E-04 -8.30332E-05  2.36068E-05
  9.900  6.78461E-05  9.01977E-05  3.63108E-05  2.15719E-06 -3.23887E-06  1.72847E-03  1.23552E-03  1.02366E-04 -6.79824E-05  2.40115E-05
 10.000  5.11615E-05  6.75551E-05  2.71396E-05  1.76483E-06 -2.32617E-06  1.52427E-03  1.07263E-03  7.76201E-05 -5.51915E-05  2.43415E-05
 10.100  3.85809E-05  5.04746E-05  2.01526E-05  1.40456E-06 -1.64598E-06  1.34695E-03  9.34129E-04  5.72169E-05 -4.43974E-05  2.45982E-05
 10.200  2.91404E-05  3.76801E-05  1.48869E-05  1.09253E-06 -1.14554E-06  1.19268E-03  8.16447E-04  4.05740E-05 -3.53670E-05  2.47792E-05
 10.300  2.20812E-05  2.81531E-05  1.09577E-05  8.33406E-07 -7.82011E-07  1.05813E-03  7.16418E-04  2.71548E-05 -2.78921E-05  2.48791E-05
 10.400  1.68135E-05  2.10921E-05  8.05191E-06  6.24913E-07 -5.21288E-07  9.40435E-04  6.31285E-04  1.64755E-05 -2.17853E-05  2.48896E-05
 10.500  1.28839E-05  1.58754E-05  5.91948E-06  4.61123E-07 -3.36802E-07  8.37174E-04  5.58668E-04  8.10930E-06 -1.68759E-05  2.48009E-05
 10.600  9.94793E-06  1.20266E-05  4.36461E-06  3.34720E-07 -2.08217E-07  7.46278E-04  4.96533E-04  1.68402E-06 -1.30075E-05  2.46029E-05
 10.700  7.74636E-06  9.18551E-06  3.23643E-06  2.38396E-07 -1.20229E-07  6.66002E-04  4.43153E-04 -3.12078E-06 -1.00354E-05  2.42858E-05
 10.800  6.08602E-06  7.08234E-06  2.42044E-06  1.65614E-07 -6.14833E-08  5.94874E-04  3.97075E-04 -6.57915E-06 -7.82622E-06  2.38420E-05
 10.900  4.82406E-06  5.51723E-06  1.83090E-06  1.10930E-07 -2.36583E-08  5.31658E-04  3.57081E-04 -8.92431E-06 -6.25615E-06  2.32663E-05
 11.000  3.85555E-06  4.34329E-06  1.40440E-06  7.00330E-08 -7.01670E-10  4.75315E-04  3.22159E-04 -1.03543E-05 -5.21125E-06  2.25571E-05
 11.100  3.10379E-06  3.45339E-06  1.09443E-06  3.96250E-08  1.17718E-08  4.24972E-04  2.91474E-04 -1.10372E-05 -4.58717E-06  2.17165E-05
 11.200  2.51300E-06  2.76988E-06  8.67222E-07  1.72374E-08  1.69456E-08  3.79897E-04  2.64340E-04 -1.11157E-05 -4.28922E-06  2.07507E-05
 11.300  2.04269E-06  2.23680E-06  6.98407E-07  1.03682E-09  1.71480E-08  3.39471E-04  2.40195E-04 -1.07114E-05 -4.23256E-06  1.96698E-05
 11.400  1.66352E-06  1.81409E-06  5.70555E-07 -1.03459E-08  1.41033E-08  3.03169E-04  2.18584E-04 -9.92774E-06 -4.34235E-06  1.84878E-05
 11.500  1.35430E-06  1.47323E-06  4.71317E-07 -1.79507E-08  9.10746E-09  2.70546E-04  1.99137E-04 -8.85318E-06 -4.55376E-06  1.72217E-05
 11.600  1.09966E-06  1.19406E-06  3.92058E-07 -2.25855E-08  3.14703E-09  2.41221E-04  1.81557E-04 -7.56336E-06 -4.81195E-06  1.58910E-05
 11.700  8.88483E-07  9.62460E-07  3.26862E-07 -2.48927E-08 -3.02275E-09  2.14861E-04  1.65602E-04 -6.12296E-06 -5.07184E-06  1.45168E-05
 11.800  7.12659E-07  7.68597E-07  2.71785E-07 -2.53923E-08 -8.82844E-09  1.91180E-04  1.51078E-04 -4.58733E-06 -5.29777E-06  1.31213E-05
 11.900  5.66212E-07  6.05643E-07  2.24296E-07 -2.45093E-08 -1.38475E-08  1.69922E-04  1.37828E-04 -3.00365E-06 -5.46293E-06  1.17266E-05
 12.000  4.44651E-07  4.68829E-07  1.82856E-07 -2.25946E-08 -1.77886E-08  1.50862E-04  1.25720E-04 -1.41207E-06 -5.54876E-06  1.03539E-05
 12.100  3.44489E-07  3.54726E-07  1.46582E-07 -1.99398E-08 -2.04777E-08  1.33795E-04  1.14647E-04  1.53528E-07 -5.54408E-06  9.02295E-06
 12.200  2.62905E-07  2.60735E-07  1.14998E-07 -1.67908E-08 -2.18467E-08  1.18539E-04  1.04516E-04  1.66478E-06 -5.44427E-06  7.75147E-06
 12.300  1.97500E-07  1.84714E-07  8.78379E-08 -1.33599E-08 -2.19208E-08  1.04923E-04  9.52497E-05  3.09832E-06 -5.25024E-06  6.55456E-06
 12.400  1.46138E-07  1.24737E-07  6.49130E-08 -9.83497E-09 -2.08057E-08  9.27935E-05  8.67765E-05  4.43525E-06 -4.96747E-06  5.44443E-06
 12.500  1.06848E-07  7.89426E-08  4.60166E-08 -6.38585E-09 -1.86715E-08  8.20078E-05  7.90334E-05  5.66083E-06 -4.60500E-06  4.43032E-06
 12.600  7.77735E-08  4.54654E-08  3.08746E-08 -3.16770E-09 -1.57356E-08  7.24340E-05  7.19626E-05  6.76405E-06 -4.17444E-06  3.51838E-06
 12.700  5.71581E-08  2.24214E-08  1.91268E-08 -3.20275E-10 -1.22441E-08  6.39506E-05  6.55102E-05  7.73738E-06 -3.68911E-06  2.71185E-06
 12.800  4.33521E-08  7.93294E-09  1.03346E-08  2.03553E-09 -8.45357E-09  5.64451E-05  5.96257E-05  8.57644E-06 -3.16319E-06  2.01121E-06
 12.900  3.48330E-08  1.77507E-10  4.00533E-09  3.80317E-09 -4.61284E-09  4.98142E-05  5.42620E-05  9.27972E-06 -2.61103E-06  1.41450E-06
 13.000  3.02294E-08 -2.55552E-09 -3.74516E-10  4.91661E-09 -9.47896E-10  4.39632E-05  4.93747E-05  9.84830E-06 -2.04652E-06  9.17673E-07
 13.100  2.83444E-08 -1.80976E-09 -3.30310E-09  5.34569E-09  2.35091E-09  3.88052E-05  4.49221E-05  1.02855E-05 -1.48267E-06  5.14903E-07
 13.200  2.81711E-08  1.08261E-09 -5.23100E-09  5.09970E-09  5.13781E-09  3.42616E-05  4.08655E-05  1.05966E-05 -9.31211E-07  1.99023E-07
 13.300  2.88997E-08  5.02991E-09 -6.53606E-09  4.22802E-09  7.31667E-09  3.02609E-05  3.71688E-05  1.07885E-05 -4.02394E-07 -3.81258E-08
 13.400  2.99149E-08  9.19253E-09 -7.50791E-09  2.81767E-09  8.84194E-09  2.67390E-05  3.37987E-05  1.08694E-05  9.51861E-08 -2.05339E-07
 13.500  3.07836E-08  1.29775E-08 -8.34264E-09  9.87681E-10  9.71605E-09  2.36381E-05  3.07249E-05  1.08484E-05  5.54621E-07 -3.11725E-07
 13.600  3.12353E-08  1.60180E-08 -9.14689E-09 -1.11923E-09  9.98356E-09  2.09070E-05  2.79193E-05  1.07354E-05  9.70675E-07 -3.66422E-07
 13.700  3.11365E-08  1.81423E-08 -9.94957E-09 -3.34681E-09  9.72312E-09  1.85001E-05  2.53568E-05  1.05406E-05  1.33971E-06 -3.78357E-07
 13.800  3.04622E-08  1.93344E-08 -1.07190E-08 -5.53634E-09  9.03777E-09  1.63771E-05  2.30147E-05  1.02745E-05  1.65956E-06 -3.56044E-07
 13.900  2.92669E-08  1.96930E-08 -1.13828E-08 -7.53751E-09  8.04483E-09  1.45025E-05  2.08724E-05  9.94725E-06  1.92940E-06 -3.07427E-07
 14.000  2.76566E-08  1.93901E-08 -1.18482E-08 -9.21824E-09  6.86594E-09  1.28454E-05  1.89117E-05  9.56898E-06  2.14958E-06 -2.39762E-07
 14.100  2.57640E-08  1.86342E-08 -1.20202E-08 -1.04725E-08  5.61816E-09  1.13786E-05  1.71161E-05  9.14932E-06  2.32144E-06 -1.59534E-07
 14.200  2.37285E-08  1.76387E-08 -1.18176E-08 -1.12260E-08  4.40649E-09  1.00785E-05  1.54711E-05  8.69738E-06  2.44717E-06 -7.24121E-08
 14.300  2.16797E-08  1.65985E-08 -1.11837E-08 -1.14386E-08  3.31838E-09  8.92467E-06  1.39638E-05  8.22168E-06  2.52963E-06  1.67747E-08
 14.400  1.97270E-08  1.56729E-08 -1.00929E-08 -1.11046E-08  2.42017E-09  7.89928E-06  1.25826E-05  7.73006E-06  2.57218E-06  1.04027E-07
 14.500  1.79534E-08  1.49769E-08 -8.55339E-09 -1.02505E-08  1.75555E-09  6.98697E-06  1.13172E-05  7.22964E-06  2.57860E-06  1.86151E-07
 14.600  1.64127E-08  1.45782E-08 -6.60543E-09 -8.93041E-09  1.34588E-09  6.17445E-06  1.01585E-05  6.72687E-06  2.55286E-06  2.60711E-07
 14.700  1.51309E-08  1.44994E-08 -4.31669E-09 -7.22059E-09  1.19195E-09  5.45023E-06  9.09829E-06  6.22742E-06  2.49912E-06  3.25973E-07
 14.800  1.41090E-08  1.47243E-08 -1.77574E-09 -5.21245E-09  1.27696E-09  4.80436E-06  8.12926E-06  5.73629E-06  2.42153E-06  3.80834E-07
 14.900  1.33282E-08  1.52063E-08  9.15770E-10 -3.00586E-09  1.57024E-09  4.22821E-06  7.24473E-06  5.25779E-06  2.32419E-06  4.24747E-07
 15.000  1.27549E-08  1.58779E-08  3.65106E-09 -7.02443E-10  2.03132E-09  3.71430E-06  6.43868E-06  4.79552E-06  2.21107E-06  4.57641E-07
 15.100  1.23467E-08  1.66600E-08  6.32577E-09  1.60036E-09  2.61404E-09  3.25608E-06  5.70557E-06  4.35250E-06  2.08593E-06  4.79840E-07
 15.200  1.20572E-08  1.74710E-08  8.84433E-09  3.81421E-09  3.27037E-09  2.84783E-06  5.04032E-06  3.93110E-06  1.95227E-06  4.91979E-07
 15.300  1.18404E-08  1.82337E-08  1.11250E-08  5.86356E-09  3.95374E-09  2.48451E-06  4.43818E-06  3.53316E-06  1.81331E-06  4.94933E-07
 15.400  1.16543E-08  1.88809E-08  1.31033E-08  7.68814E-09  4.62173E-09  2.16164E-06  3.89469E-06  3.15997E-06  1.67192E-06  4.89743E-07
 15.500  1.14632E-08  1.93591E-08  1.47337E-08  9.24408E-09  5.23801E-09  1.87525E-06  3.40566E-06  2.81234E-06  1.53065E-06  4.77550E-07
 15.600  1.12390E-08  1.96305E-08  1.59900E-08  1.05040E-08  5.77362E-09  1.62177E-06  2.96710E-06  2.49065E-06  1.39168E-06  4.59538E-07
 15.700  1.09622E-08  1.96735E-08  1.68643E-08  1.14562E-08  6.20750E-09  1.39797E-06  2.57521E-06  2.19489E-06  1.25684E-06  4.36888E-07
 15.800  1.06209E-08  1.94814E-08  1.73653E-08  1.21029E-08  6.52652E-09  1.20093E-06  2.22634E-06  1.92468E-06  1.12763E-06  4.10737E-07
 15.900  1.02111E-08  1.90612E-08  1.75152E-08  1.24580E-08  6.72493E-09  1.02798E-06  1.91700E-06  1.67937E-06  1.00520E-06  3.82144E-07
 16.000  9.73457E-09  1.84307E-08  1.73473E-08  1.25451E-08  6.80354E-09  8.76671E-07  1.64387E-06  1.45804E-06  8.90404E-07  3.52073E-07
 16.100  9.19830E-09  1.76163E-08  1.69023E-08  1.23943E-08  6.76860E-09  7.44777E-07  1.40373E-06  1.25957E-06  7.83827E-07  3.21372E-07
 16.200  8.61273E-09  1.66497E-08  1.62256E-08  1.20404E-08  6.63060E-09  6.30235E-07  1.19355E-06  1.08268E-06  6.85789E-07  2.90770E-07
 16.300  7.99057E-09  1.55657E-08  1.53647E-08  1.15203E-08  6.40305E-09  5.31159E-07  1.01044E-06  9.25970E-07  5.96395E-07  2.60869E-07
 16.400  7.34553E-09  1.44000E-08  1.43661E-08  1.08709E-08  6.10127E-09  4.45812E-07  8.51648E-07  7.87979E-07  5.15569E-07  2.32152E-07
 16.500  6.69135E-09  1.31869E-08  1.32742E-08  1.01278E-08  5.74140E-09  3.72608E-07  7.14613E-07  6.67190E-07  4.43077E-07  2.04989E-07
 16.600  6.04098E-09  1.19580E-08  1.21294E-08  9.32408E-09  5.33942E-09  3.10095E-07  5.96927E-07  5.62086E-07  3.78566E-07  1.79641E-07
 16.700  5.40599E-09  1.07412E-08  1.09672E-08  8.48906E-09  4.91052E-09  2.56953E-07  4.96357E-07  4.71165E-07  3.21589E-07  1.56278E-07
 16.800  4.79619E-09  9.56014E-09  9.81760E-09  7.64810E-09  4.46849E-09  2.11986E-07  4.10841E-07  3.92975E-07  2.71635E-07  1.34990E-07
 16.900  4.21944E-09  8.43380E-09  8.70499E-09  6.82222E-09  4.02542E-09  1.74114E-07  3.38493E-07  3.26121E-07  2.28149E-07  1.15795E-07
 17.000  3.68160E-09  7.37651E-09  7.64826E-09  6.02812E-09  3.59146E-09  1.42370E-07  2.77595E-07  2.69290E-07  1.90558E-07  9.86611E-08
 17.100  3.18659E-09  6.39825E-09  6.66112E-09  5.27843E-09  3.17477E-09  1.15891E-07  2.26596E-07  2.21255E-07  1.58282E-07  8.35084E-08
 17.200  2.73658E-09  5.50504E-09  5.75260E-09  4.58199E-09  2.78158E-09  9.39104E-08  1.84104E-07  1.80885E-07  1.30754E-07  7.02273E-08
 17.300  2.33218E-09  4.69948E-09  4.92765E-09  3.94433E-09  2.41628E-09  7.57534E-08  1.48883E-07  1.47148E-07  1.07429E-07  5.86853E-08
 17.400  1.97274E-09  3.98128E-09  4.18786E-09  3.36813E-09  2.08165E-09  6.08287E-08  1.19837E-07  1.19113E-07  8.77910E-08  4.87364E-08
 17.500  1.65655E-09  3.34785E-09  3.53204E-09  2.85376E-09  1.77905E-09  4.86215E-08  9.60076E-08  9.59445E-08  7.13611E-08  4.02278E-08
 17.600  1.38114E-09  2.79486E-09  2.95690E-09  2.39973E-09  1.50867E-09  3.86864E-08  7.65569E-08  7.69038E-08  5.77000E-08  3.30060E-08
 17.700  1.14351E-09  2.31678E-09  2.45762E-09  2.00319E-09  1.26977E-09  3.06405E-08  6.07618E-08  6.13409E-08  4.64102E-08  2.69213E-08
 17.800  9.40318E-10  1.90726E-09  2.02833E-09  1.66027E-09  1.06089E-09  2.41569E-08  4.80006E-08  4.86897E-08  3.71358E-08  2.18310E-08
 17.900  7.68081E-10  1.55957E-09  1.66260E-09  1.36652E-09  8.80051E-10  1.89582E-08  3.77430E-08  3.84607E-08  2.95618E-08  1.76022E-08
 18.000  6.23295E-10  1.26687E-09  1.35373E-09  1.11714E-09  7.24969E-10  1.48102E-08  2.95396E-08  3.02343E-08  2.34126E-08  1.41126E-08
 18.100  5.02564E-10  1.02246E-09  1.09504E-09  9.07242E-10  5.93164E-10  1.15170E-08  2.30121E-08  2.36536E-08  1.84486E-08  1.12520E-08
 18.200  4.02674E-10  8.19998E-10  8.80138E-10  7.32019E-10  4.82102E-10  8.91533E-09  1.78442E-08  1.84169E-08  1.44641E-08  8.92201E-09
 18.300  3.20649E-10  6.53549E-10  7.02985E-10  5.86902E-10  3.89290E-10  6.86997E-09  1.37731E-08  1.42715E-08  1.12837E-08  7.03623E-09
 18.400  2.53787E-10  5.17719E-10  5.58045E-10  4.67636E-10  3.12347E-10  5.26986E-09  1.05820E-08  1.10070E-08  8.75903E-09  5.51936E-09
 18.500  1.99672E-10  4.07669E-10  4.40322E-10  3.70340E-10  2.49048E-10  4.02417E-09  8.09312E-09  8.44931E-09  6.76589E-09  4.30661E-09
 18.600  1.56177E-10  3.19126E-10  3.45379E-10  2.91536E-10  1.97361E-10  3.05908E-09  6.16140E-09  6.45566E-09  5.20085E-09  3.34277E-09
 18.700  1.21453E-10  2.48372E-10  2.69333E-10  2.28154E-10  1.55461E-10  2.31500E-09  4.66947E-09  4.90949E-09  3.97849E-09  2.58123E-09
 18.800  9.39137E-11  1.92206E-10  2.08830E-10  1.77521E-10  1.21732E-10  1.74407E-09  3.52280E-09  3.71637E-09  3.02881E-09  1.98298E-09
 18.900  7.22136E-11  1.47908E-10  1.61008E-10  1.37340E-10  9.47673E-11  1.30808E-09  2.64576E-09  2.80028E-09  2.29483E-09  1.51568E-09
 19.000  5.52222E-11  1.13192E-10  1.23449E-10  1.05660E-10  7.33531E-11  9.76722E-10  1.97816E-09  2.10035E-09  1.73049E-09  1.15269E-09
 19.100  4.19996E-11  8.61534E-11  9.41340E-11  8.08395E-11  5.64578E-11  7.26076E-10  1.47241E-09  1.56820E-09  1.29880E-09  8.72275E-10
 19.200  3.17721E-11  6.52219E-11  7.13940E-11  6.15136E-11  4.32126E-11  5.37372E-10  1.09110E-09  1.16558E-09  9.70248E-10  6.56831E-10
 19.300  2.39082E-11  4.91146E-11  5.38595E-11  4.65570E-11  3.28937E-11  3.95965E-10  8.04964E-10  8.62429E-10  7.21448E-10  4.92187E-10
 19.400  1.78969E-11  3.67920E-11  4.04184E-11  3.50506E-11  2.49036E-11  2.90494E-10  5.91250E-10  6.35267E-10  5.33976E-10  3.67032E-10
 19.500  1.33280E-11  2.74188E-11  3.01746E-11  2.62502E-11  1.87538E-11  2.12189E-10  4.32374E-10  4.65855E-10  3.93411E-10  2.72389E-10
 19.600  9.87499E-12  2.03295E-11  2.24117E-11  1.95580E-11  1.40483E-11  1.54321E-10  3.14810E-10  3.40109E-10  2.88530E-10  2.01191E-10
 19.700  7.27977E-12  1.49971E-11  1.65618E-11  1.44975E-11  1.04688E-11  1.11750E-10  2.28218E-10  2.47210E-10  2.10654E-10  1.47902E-10
 19.800  5.33989E-12  1.10084E-11  1.21776E-11  1.06923E-11  7.76119E-12  8.05748E-11  1.64728E-10  1.78899E-10  1.53106E-10  1.08219E-10
 19.900  3.89767E-12  8.04064E-12  8.90968E-12  7.84653E-12  5.72465E-12  5.78483E-11  1.18390E-10  1.28900E-10  1.10783E-10  7.88157E-11
  67 224 200   0.100
  0.000  4.62377E-02 -2.48253E-16 -3.74700E-16 -2.50185E-16 -9.01208E-16  1.01685E-01 -5.27539E-16 -8.32667E-16 -7.25538E-16 -2.07421E-15
  0.100  4.62547E-02 -2.69879E-05 -1.69613E-08 -5.84464E-12 -2.47475E-15  1.01685E-01 -1.46473E-05 -2.14152E-08  6.65263E-12  8.99206E-14
  0.200  4.63054E-02 -1.06827E-04 -2.69227E-07 -3.71033E-10 -3.70168E-13  1.01687E-01 -5.70069E-05 -3.38179E-07  4.25373E-10 -2.82336E-13
  0.300  4.63889E-02 -2.36186E-04 -1.34497E-06 -4.16746E-09 -9.32254E-12  1.01689E-01 -1.22459E-04 -1.67485E-06  4.78558E-09 -4.61293E-12
  0.400  4.65036E-02 -4.09642E-04 -4.17229E-06 -2.29606E-08 -9.13388E-11  1.01690E-01 -2.03721E-04 -5.13206E-06  2.64358E-08 -4.36053E-11
  0.500  4.66474E-02 -6.19886E-04 -9.94475E-06 -8.54056E-08 -5.31094E-10  1.01689E-01 -2.91436E-04 -1.20362E-05  9.86762E-08 -2.37103E-10
  0.600  4.68176E-02 -8.57978E-04 -2.00242E-05 -2.47276E-07 -2.21550E-09  1.01682E-01 -3.74940E-04 -2.37490E-05  2.86968E-07 -9.06773E-10
  0.700  4.70112E-02 -1.11368E-03 -3.58275E-05 -6.01226E-07 -7.33702E-09  1.01669E-01 -4.43151E-04 -4.14546E-05  7.01552E-07 -2.67781E-09
  0.800  4.72248E-02 -1.37583E-03 -5.87052E-05 -1.28448E-06 -2.04908E-08  1.01648E-01 -4.85509E-04 -6.59457E-05  1.50873E-06 -6.42268E-09
  0.900  4.74547E-02 -1.63276E-03 -8.98190E-05 -2.48283E-06 -5.01792E-08  1.01618E-01 -4.92897E-04 -9.74302E-05  2.93921E-06 -1.27743E-08
  1.000  4.76972E-02 -1.87271E-03 -1.30028E-04 -4.42956E-06 -1.10656E-07  1.01577E-01 -4.58483E-04 -1.35382E-04  5.29210E-06 -2.08264E-08
  1.100  4.79485E-02 -2.08431E-03 -1.79789E-04 -7.39855E-06 -2.23960E-07  1.01525E-01 -3.78400E-04 -1.78450E-04  8.93363E-06 -2.55782E-08
  1.200  4.82045E-02 -2.25697E-03 -2.39078E-04 -1.16914E-05 -4.21899E-07  1.01464E-01 -2.52219E-04 -2.24452E-04  1.42901E-05 -1.36935E-08
  1.300  4.84615E-02 -2.38133E-03 -3.07342E-04 -1.76193E-05 -7.47696E-07  1.01395E-01 -8.31737E-05 -2.70446E-04  2.18348E-05  4.27232E-08
  1.400  4.87157E-02 -2.44961E-03 -3.83472E-04 -2.54798E-05 -1.25699E-06  1.01320E-01  1.21903E-04 -3.12893E-04  3.20688E-05  1.94368E-07
  1.500  4.89636E-02 -2.45594E-03 -4.65817E-04 -3.55319E-05 -2.01790E-06  1.01242E-01  3.52915E-04 -3.47902E-04  4.54968E-05  5.24656E-07
  1.600  4.92020E-02 -2.39662E-03 -5.52219E-04 -4.79699E-05 -3.10990E-06  1.01166E-01  5.97111E-04 -3.71543E-04  6.25970E-05  1.16050E-06
  1.700  4.94277E-02 -2.27028E-03 -6.40085E-04 -6.28983E-05 -4.62146E-06  1.01094E-01  8.39923E-04 -3.80201E-04  8.37867E-05  2.28266E-06
  1.800  4.96381E-02 -2.07799E-03 -7.26478E-04 -8.03108E-05 -6.64639E-06  1.01033E-01  1.06598E-03 -3.70944E-04  1.09385E-04  4.13383E-06
  1.900  4.98307E-02 -1.82328E-03 -8.08229E-04 -1.00074E-04 -9.27910E-06  1.00984E-01  1.26023E-03 -3.41881E-04  1.39569E-04  7.02247E-06
  2.000  5.00036E-02 -1.51204E-03 -8.82070E-04 -1.21918E-04 -1.26091E-05  1.00953E-01  1.40906E-03 -2.92455E-04  1.74336E-04  1.13201E-05
  2.100  5.01554E-02 -1.15233E-03 -9.44762E-04 -1.45434E-04 -1.67149E-05  1.00942E-01  1.50141E-03 -2.23661E-04  2.13453E-04  1.74502E-05
  2.200  5.02851E-02 -7.54153E-04 -9.93247E-04 -1.70079E-04 -2.16587E-05  1.00953E-01  1.52967E-03 -1.38143E-04  2.56425E-04  2.58666E-05
  2.300  5.03922E-02 -3.29120E-04 -1.02478E-03 -1.95185E-04 -2.74806E-05  1.00987E-01  1.49041E-03 -4.01548E-05  3.02456E-04  3.70225E-05
  2.400  5.04769E-02  1.09984E-04 -1.03706E-03 -2.19982E-04 -3.41948E-05  1.01043E-01  1.38477E-03  6.46227E-05  3.50432E-04  5.13274E-05
  2.500  5.05399E-02  5.49636E-04 -1.02835E-03 -2.43614E-04 -4.17869E-05  1.01118E-01  1.21861E-03  1.69403E-04  3.98912E-04  6.90980E-05
  2.600  5.05828E-02  9.76081E-04 -9.97586E-04 -2.65170E-04 -5.02127E-05  1.01211E-01  1.00222E-03  2.66745E-04  4.46142E-04  9.05023E-05
  2.700  5.06074E-02  1.37585E-03 -9.44464E-04 -2.83706E-04 -5.93986E-05  1.01315E-01  7.49759E-04  3.49097E-04  4.90103E-04  1.15505E-04
  2.800  5.06164E-02  1.73628E-03 -8.69487E-04 -2.98278E-04 -6.92436E-05  1.01427E-01  4.78365E-04  4.09393E-04  5.28576E-04  1.43815E-04
  2.900  5.06128E-02  2.04605E-03 -7.74016E-04 -3.07967E-04 -7.96223E-05  1.01538E-01  2.07068E-04  4.41653E-04  5.59246E-04  1.74850E-04
  3.000  5.05999E-02  2.29563E-03 -6.60276E-04 -3.11910E-04 -9.03886E-05  1.01643E-01 -4.44970E-05  4.41535E-04  5.79830E-04  2.07714E-04
  3.100  5.05813E-02  2.47773E-03 -5.31334E-04 -3.09324E-04 -1.01379E-04  1.01734E-01 -2.57410E-04  4.06782E-04  5.88238E-04  2.41196E-04
  3.200  5.05605E-02  2.58764E-03 -3.91051E-04 -2.99536E-04 -1.12416E-04  1.01805E-01 -4.14755E-04  3.37516E-04  5.82736E-04  2.73806E-04
  3.300  5.05410E-02  2.62353E-03 -2.44001E-04 -2.82011E-04 -1.23312E-04  1.01849E-01 -5.02758E-04  2.36354E-04  5.62123E-04  3.03825E-04
  3.400  5.05254E-02  2.58663E-03 -9.53504E-05 -2.56378E-04 -1.33866E-04  1.01861E-01 -5.11698E-04  1.08307E-04  5.25894E-04  3.29397E-04
  3.500  5.05160E-02  2.48130E-03  4.92850E-05 -2.22462E-04 -1.43870E-04  1.01836E-01 -4.36506E-04 -3.95243E-05  4.74377E-04  3.48636E-04
  3.600  5.05139E-02  2.31496E-03  1.84019E-04 -1.80311E-04 -1.53103E-04  1.01770E-01 -2.77000E-04 -1.98451E-04  4.08816E-04  3.59759E-04
  3.700  5.05190E-02  2.09798E-03  3.02900E-04 -1.30228E-04 -1.61333E-04  1.01659E-01 -3.77534E-05 -3.58850E-04  3.31411E-04  3.61221E-04
  3.800  5.05299E-02  1.84339E-03  4.00135E-04 -7.27951E-05 -1.68313E-04  1.01501E-01  2.72426E-04 -5.10931E-04  2.45270E-04  3.51857E-04
  3.900  5.05437E-02  1.56645E-03  4.70337E-04 -8.89685E-06 -1.73784E-04  1.01293E-01  6.41333E-04 -6.45539E-04  1.54296E-04  3.31000E-04
  4.000  5.05557E-02  1.28421E-03  5.08767E-04  6.02638E-05 -1.77476E-04  1.01034E-01  1.05448E-03 -7.54939E-04  6.29884E-05  2.98586E-04
  4.100  5.05597E-02  1.01489E-03  5.11582E-04  1.33162E-04 -1.79114E-04  1.00720E-01  1.49638E-03 -8.33490E-04 -2.38180E-05  2.55212E-04
  4.200  5.05478E-02  7.77239E-04  4.76064E-04  2.07962E-04 -1.78427E-04  1.00349E-01  1.95190E-03 -8.78165E-04 -1.01276E-04  2.02161E-04
  4.300  5.05108E-02  5.89812E-04  4.00817E-04  2.82541E-04 -1.75160E-04  9.99170E-02  2.40761E-03 -8.88864E-04 -1.64878E-04  1.41366E-04
  4.400  5.04382E-02  4.70252E-04  2.85924E-04  3.54539E-04 -1.69091E-04  9.94199E-02  2.85294E-03 -8.68467E-04 -2.10812E-04  7.53338E-05
  4.500  5.03186E-02  4.34559E-04  1.33053E-04  4.21419E-04 -1.60053E-04  9.88520E-02  3.28109E-03 -8.22645E-04 -2.36295E-04  7.01790E-06
  4.600  5.01399E-02  4.96391E-04 -5.45048E-05  4.80561E-04 -1.47952E-04  9.82067E-02  3.68972E-03 -7.59419E-04 -2.39853E-04 -6.03483E-05
  4.700  4.98901E-02  6.66444E-04 -2.71874E-04  5.29360E-04 -1.32790E-04  9.74763E-02  4.08113E-03 -6.88511E-04 -2.21520E-04 -1.23445E-04
  4.800  4.95572E-02  9.51918E-04 -5.12702E-04  5.65344E-04 -1.14685E-04  9.66527E-02  4.46214E-03 -6.20539E-04 -1.82921E-04 -1.79072E-04
  4.900  4.91300E-02  1.35610E-03 -7.69353E-04  5.86302E-04 -9.38852E-05  9.57267E-02  4.84358E-03 -5.66115E-04 -1.27257E-04 -2.24356E-04
  5.000  4.85985E-02  1.87811E-03 -1.03317E-03  5.90406E-04 -7.07799E-05  9.46893E-02  5.23939E-03 -5.34941E-04 -5.91456E-05 -2.56937E-04
  5.100  4.79539E-02  2.51278E-03 -1.29482E-03  5.76334E-04 -4.58980E-05  9.35315E-02  5.66546E-03 -5.34966E-04  1.56350E-05 -2.75119E-04
  5.200  4.71896E-02  3.25072E-03 -1.54465E-03  5.43369E-04 -1.99003E-05  9.22448E-02  6.13831E-03 -5.71673E-04  9.05150E-05 -2.77986E-04
  5.300  4.63009E-02  4.07856E-03 -1.77311E-03  4.91478E-04  6.43970E-06  9.08217E-02  6.67363E-03 -6.47570E-04  1.58567E-04 -2.65448E-04
  5.400  4.52857E-02  4.97935E-03 -1.97119E-03  4.21360E-04  3.22650E-05  8.92560E-02  7.28487E-03 -7.61923E-04  2.12982E-04 -2.38250E-04
  5.500  4.41440E-02  5.93313E-03 -2.13084E-03  3.34456E-04  5.66727E-05  8.75430E-02  7.98195E-03 -9.10739E-04  2.47547E-04 -1.97902E-04
  5.600  4.28785E-02  6.91759E-03 -2.24532E-03  2.32918E-04  7.87589E-05  8.56800E-02  8.77013E-03 -1.08702E-03  2.57085E-04 -1.46578E-04
  5.700  4.14944E-02  7.90886E-03 -2.30954E-03  1.19535E-04  9.76668E-05  8.36661E-02  9.64928E-03 -1.28124E-03  2.37832E-04 -8.69579E-05
  5.800  3.99992E-02  8.88238E-03 -2.32034E-03 -2.36809E-06  1.12636E-04  8.15030E-02  1.06134E-02 -1.48203E-03  1.87701E-04 -2.20518E-05
  5.900  3.84025E-02  9.81377E-03 -2.27658E-03 -1.29079E-04  1.23047E-04  7.91942E-02  1.16506E-02 -1.67699E-03  1.06438E-04  4.49979E-05
  6.000  3.67157E-02  1.06797E-02 -2.17924E-03 -2.56660E-04  1.28463E-04  7.67456E-02  1.27433E-02 -1.85357E-03 -4.35795E-06  1.11109E-04
  6.100  3.49521E-02  1.14588E-02 -2.03137E-03 -3.81130E-04  1.28657E-04  7.41653E-02  1.38692E-02 -1.99993E-03 -1.41345E-04  1.73441E-04
  6.200  3.31258E-02  1.21321E-02 -1.83790E-03 -4.98650E-04  1.23631E-04  7.14632E-02  1.50020E-02 -2.10578E-03 -2.99665E-04  2.29541E-04
  6.300  3.12523E-02  1.26842E-02 -1.60541E-03 -6.05698E-04  1.13616E-04  6.86511E-02  1.61126E-02 -2.16301E-03 -4.73268E-04  2.77465E-04
  6.400  2.93472E-02  1.31030E-02 -1.34183E-03 -6.99227E-04  9.90655E-05  6.57427E-02  1.71708E-02 -2.16625E-03 -6.55307E-04  3.15846E-04
  6.500  2.74265E-02  1.33809E-02 -1.05601E-03 -7.76797E-04  8.06287E-05  6.27528E-02  1.81465E-02 -2.11310E-03 -8.38572E-04  3.43924E-04
  6.600  2.55061E-02  1.35139E-02 -7.57316E-04 -8.36664E-04  5.91141E-05  5.96978E-02  1.90112E-02 -2.00422E-03 -1.01592E-03  3.61527E-04
  6.700  2.36014E-02  1.35027E-02 -4.55209E-04 -8.77840E-04  3.54448E-05  5.65948E-02  1.97395E-02 -1.84322E-03 -1.18070E-03  3.69028E-04
  6.800  2.17271E-02  1.33516E-02 -1.58818E-04 -9.00095E-04  1.06070E-05  5.34619E-02  2.03099E-02 -1.63631E-03 -1.32707E-03  3.67254E-04
  6.900  1.98967E-02  1.30687E-02  1.23441E-04 -9.03935E-04 -1.44035E-05  5.03174E-02  2.07059E-02 -1.39179E-03 -1.45031E-03  3.57387E-04
  7.000  1.81228E-02  1.26651E-02  3.84185E-04 -8.90526E-04 -3.86333E-05  4.71802E-02  2.09168E-02 -1.11953E-03 -1.54700E-03  3.40854E-04
  7.100  1.64164E-02  1.21547E-02  6.17323E-04 -8.61599E-04 -6.12181E-05  4.40688E-02  2.09377E-02 -8.30248E-04 -1.61508E-03  3.19207E-04
  7.200  1.47871E-02  1.15532E-02  8.18221E-04 -8.19328E-04 -8.14224E-05  4.10014E-02  2.07697E-02 -5.34881E-04 -1.65389E-03  2.94019E-04
  7.300  1.32429E-02  1.08776E-02  9.83795E-04 -7.66191E-04 -9.86677E-05  3.79957E-02  2.04195E-02 -2.43978E-04 -1.66406E-03  2.66791E-04
  7.400  1.17901E-02  1.01458E-02  1.11251E-03 -7.04830E-04 -1.12551E-04  3.50684E-02  1.98990E-02  3.28602E-05 -1.64731E-03  2.38873E-04
  7.500  1.04335E-02  9.37548E-03  1.20431E-03 -6.37913E-04 -1.22849E-04  3.22348E-02  1.92244E-02  2.87408E-04 -1.60634E-03  2.11419E-04
  7.600  9.17597E-03  8.58384E-03  1.26047E-03 -5.68013E-04 -1.29517E-04  2.95090E-02  1.84154E-02  5.13122E-04 -1.54448E-03  1.85348E-04
  7.700  8.01913E-03  7.78701E-03  1.28342E-03 -4.97498E-04 -1.32668E-04  2.69032E-02  1.74943E-02  7.05319E-04 -1.46553E-03  1.61337E-04
  7.800  6.96290E-03  6.99963E-03  1.27648E-03 -4.28453E-04 -1.32557E-04  2.44278E-02  1.64849E-02  8.61215E-04 -1.37345E-03  1.39827E-04
  7.900  6.00593E-03  6.23452E-03  1.24366E-03 -3.62615E-04 -1.29545E-04  2.20910E-02  1.54113E-02  9.79854E-04 -1.27217E-03  1.21047E-04
  8.000  5.14558E-03  5.50250E-03  1.18938E-03 -3.01349E-04 -1.24074E-04  1.98989E-02  1.42975E-02  1.06193E-03 -1.16543E-03  1.05042E-04
  8.100  4.37818E-03  4.81223E-03  1.11821E-03 -2.45636E-04 -1.16633E-04  1.78557E-02  1.31660E-02  1.10956E-03 -1.05658E-03  9.17100E-05
  8.200  3.69914E-03  4.17025E-03  1.03469E-03 -1.96087E-04 -1.07725E-04  1.59630E-02  1.20376E-02  1.12595E-03 -9.48528E-04  8.08449E-05
  8.300  3.10314E-03  3.58099E-03  9.43124E-04 -1.52976E-04 -9.78419E-05  1.42208E-02  1.09308E-02  1.11510E-03 -8.43654E-04  7.21694E-05
  8.400  2.58432E-03  3.04698E-03  8.47422E-04 -1.16287E-04 -8.74428E-05  1.26268E-02  9.86105E-03  1.08152E-03 -7.43810E-04  6.53707E-05
  8.500  2.13644E-03  2.56895E-03  7.51009E-04 -8.57602E-05 -7.69338E-05  1.11773E-02  8.84123E-03  1.02987E-03 -6.50331E-04  6.01286E-05
  8.600  1.75308E-03  2.14618E-03  6.56752E-04 -6.09552E-05 -6.66586E-05  9.86672E-03  7.88114E-03  9.64765E-04 -5.64080E-04  5.61366E-05
  8.700  1.42775E-03  1.77666E-03  5.66931E-04 -4.13036E-05 -5.68912E-05  8.68856E-03  6.98777E-03  8.90525E-04 -4.85504E-04  5.31176E-05
  8.800  1.15406E-03  1.45741E-03  4.83245E-04 -2.61623E-05 -4.78356E-05  7.63514E-03  6.16543E-03  8.11043E-04 -4.14710E-04  5.08327E-05
  8.900  9.25842E-04  1.18473E-03  4.06850E-04 -1.48597E-05 -3.96281E-05  6.69809E-03  5.41610E-03  7.29675E-04 -3.51535E-04  4.90853E-05
  9.000  7.37214E-04  9.54448E-04  3.38406E-04 -6.73345E-06 -3.23445E-05  5.86855E-03  4.73968E-03  6.49185E-04 -2.95622E-04  4.77205E-05
  9.100  5.82701E-04  7.62126E-04  2.78153E-04 -1.15990E-06 -2.60079E-05  5.13743E-03  4.13439E-03  5.71739E-04 -2.46480E-04  4.66220E-05
  9.200  4.57263E-04  6.03272E-04  2.25984E-04  2.42494E-06 -2.05989E-05  4.49563E-03  3.59711E-03  4.98926E-04 -2.03546E-04  4.57066E-05
  9.300  3.56338E-04  4.73485E-04  1.81522E-04  4.51308E-06 -1.60657E-05  3.93421E-03  3.12373E-03  4.31813E-04 -1.66226E-04  4.49176E-05
  9.400  2.75856E-04  3.68580E-04  1.44202E-04  5.51898E-06 -1.23340E-05  3.44457E-03  2.70944E-03  3.71012E-04 -1.33929E-04  4.42183E-05
  9.500  2.12237E-04  2.84679E-04  1.13330E-04  5.77988E-06 -9.31546E-06  3.01857E-03  2.34907E-03  3.16762E-04 -1.06097E-04  4.35862E-05
  9.600  1.62380E-04  2.18267E-04  8.81518E-05  5.56049E-06 -6.91596E-06  2.64860E-03  2.03727E-03  2.69005E-04 -8.22107E-05  4.30068E-05
  9.700  1.23632E-04  1.66225E-04  6.78953E-05  5.06060E-06 -5.04121E-06  2.32768E-03  1.76875E-03  2.27463E-04 -6.18061E-05  4.24698E-05
  9.800  9.37556E-05  1.25837E-04  5.18117E-05  4.42441E-06 -3.60152E-06  2.04944E-03  1.53838E-03  1.91711E-04 -4.44704E-05  4.19657E-05
  9.900  7.08904E-05  9.47838E-05  3.92020E-05  3.75053E-06 -2.51496E-06  1.80819E-03  1.34134E-03  1.61232E-04 -2.98419E-05  4.14834E-05
 10.000  5.35092E-05  7.11139E-05  2.94347E-05  3.10170E-06 -1.70922E-06  1.59884E-03  1.17317E-03  1.35467E-04 -1.76048E-05  4.10093E-05
 10.100  4.03752E-05  5.32163E-05  2.19551E-05  2.51370E-06 -1.12241E-06  1.41693E-03  1.02985E-03  1.13852E-04 -7.48323E-06  4.05268E-05
 10.200  3.04993E-05  3.97800E-05  1.62885E-05  2.00308E-06 -7.03036E-07  1.25856E-03  9.07730E-04  9.58440E-05  7.65564E-07  4.00168E-05
 10.300  2.31008E-05  2.97548E-05  1.20375E-05  1.57351E-06 -4.09369E-07  1.12035E-03  8.03630E-04  8.09379E-05  7.35735E-06  3.94581E-05
 10.400  1.75709E-05  2.23114E-05  8.87692E-06  1.22076E-06 -2.08427E-07  9.99398E-04  7.14753E-04  6.86775E-05  1.24864E-05  3.88293E-05
 10.500  1.34404E-05  1.68043E-05  6.54536E-06  9.36351E-07 -7.47579E-08  8.93224E-04  6.38684E-04  5.86589E-05  1.63301E-05  3.81096E-05
 10.600  1.03517E-05  1.27370E-05  4.83678E-06  7.10144E-07  1.08388E-08  7.99716E-04  5.73354E-04  5.05308E-05  1.90525E-05  3.72801E-05
 10.700  8.03500E-06  9.73278E-06  3.59133E-06  5.31954E-07  6.25480E-08  7.17084E-04  5.17004E-04  4.39914E-05  2.08064E-05  3.63256E-05
 10.800  6.28862E-06  7.50847E-06  2.68686E-06  3.92503E-07  9.06560E-08  6.43818E-04  4.68151E-04  3.87837E-05  2.17356E-05  3.52349E-05
 10.900  4.96303E-06  5.85370E-06  2.03127E-06  2.83852E-07  1.02512E-07  5.78646E-04  4.25553E-04  3.46907E-05  2.19754E-05  3.40023E-05
 11.000  3.94808E-06  4.61337E-06  1.55592E-06  1.99502E-07  1.03321E-07  5.20499E-04  3.88175E-04  3.15290E-05  2.16528E-05  3.26277E-05
 11.100  3.16305E-06  3.67409E-06  1.21014E-06  1.34294E-07  9.67643E-08  4.68476E-04  3.55160E-04  2.91444E-05  2.08865E-05  3.11167E-05
 11.200  2.54898E-06  2.95348E-06  9.56862E-07  8.42161E-08  8.54701E-08  4.21819E-04  3.25807E-04  2.74067E-05  1.97864E-05  2.94807E-05
 11.300  2.06295E-06  2.39212E-06  7.69161E-07  4.61737E-08  7.13541E-08  3.79890E-04  2.99538E-04  2.62054E-05  1.84531E-05  2.77363E-05
 11.400  1.67373E-06  1.94736E-06  6.27636E-07  1.77797E-08  5.58499E-08  3.42146E-04  2.75884E-04  2.54465E-05  1.69771E-05  2.59043E-05
 11.500  1.35861E-06  1.58884E-06  5.18443E-07 -2.82908E-09  4.00599E-08  3.08128E-04  2.54466E-04  2.50493E-05  1.54384E-05  2.40094E-05
 11.600  1.10105E-06  1.29506E-06  4.31827E-07 -1.71328E-08  2.48461E-08  2.77442E-04  2.34975E-04  2.49440E-05  1.39062E-05  2.20783E-05
 11.700  8.88975E-07  1.05098E-06  3.61038E-07 -2.63337E-08  1.08798E-08  2.49747E-04  2.17162E-04  2.50699E-05  1.24381E-05  2.01394E-05
 11.800  7.13544E-07  8.46092E-07  3.01528E-07 -3.14295E-08 -1.33295E-09  2.24748E-04  2.00826E-04  2.53735E-05  1.10808E-05  1.82210E-05
 11.900  5.68209E-07  6.73154E-07  2.50336E-07 -3.32646E-08 -1.14398E-08  2.02187E-04  1.85803E-04  2.58078E-05  9.86981E-06  1.63503E-05
 12.000  4.48052E-07  5.27116E-07  2.05628E-07 -3.25641E-08 -1.92354E-08  1.81834E-04  1.71957E-04  2.63308E-05  8.83003E-06  1.45530E-05
 12.100  3.49284E-07  4.04394E-07  1.66335E-07 -2.99580E-08 -2.46539E-08  1.63484E-04  1.59178E-04  2.69053E-05  7.97653E-06  1.28516E-05
 12.200  2.68885E-07  3.02322E-07  1.31870E-07 -2.59978E-08 -2.77581E-08  1.46953E-04  1.47369E-04  2.74980E-05  7.31534E-06  1.12654E-05
 12.300  2.04348E-07  2.18753E-07  1.01924E-07 -2.11680E-08 -2.87240E-08  1.32072E-04  1.36449E-04  2.80794E-05  6.84453E-06  9.80993E-06
 12.400  1.53497E-07  1.51794E-07  7.63034E-08 -1.58945E-08 -2.78198E-08  1.18690E-04  1.26346E-04  2.86236E-05  6.55533E-06  8.49636E-06
 12.500  1.14376E-07  9.96427E-08  5.48284E-08 -1.05486E-08 -2.53819E-08  1.06666E-04  1.16995E-04  2.91078E-05  6.43341E-06  7.33182E-06
 12.600  8.51792E-08  6.04967E-08  3.72672E-08 -5.44921E-09 -2.17889E-08  9.58695E-05  1.08339E-04  2.95129E-05  6.46007E-06  6.31931E-06
 12.700  6.42235E-08  3.25286E-08  2.33082E-08 -8.61644E-10 -1.74346E-08  8.61831E-05  1.00321E-04  2.98227E-05  6.61353E-06  5.45794E-06
 12.800  4.99394E-08  1.39011E-08  1.25586E-08  3.00424E-09 -1.27029E-08  7.74967E-05  9.28921E-05  3.00244E-05  6.87004E-06  4.74334E-06
 12.900  4.08824E-08  2.80829E-09  4.56259E-09  5.99689E-09 -7.94606E-09  6.97097E-05  8.60049E-05  3.01083E-05  7.20495E-06  4.16805E-06
 13.000  3.57490E-08 -2.47058E-09 -1.16962E-09  8.02513E-09 -3.46659E-09  6.27296E-05  7.96154E-05  3.00678E-05  7.59370E-06  3.72205E-06
 13.100  3.33947E-08 -3.51673E-09 -5.12778E-09  9.05875E-09  4.95069E-10  5.64721E-05  7.36825E-05  2.98993E-05  8.01259E-06  3.39329E-06
 13.200  3.28474E-08 -1.72526E-09 -7.76966E-09  9.12654E-09  3.76774E-09  5.08601E-05  6.81682E-05  2.96017E-05  8.43945E-06  3.16823E-06
 13.300  3.33142E-08  1.72814E-09 -9.49469E-09  8.31158E-09  6.25118E-09  4.58239E-05  6.30373E-05  2.91768E-05  8.85417E-06  3.03238E-06
 13.400  3.41811E-08  5.90453E-09 -1.06260E-08  6.74352E-09  7.91283E-09  4.13005E-05  5.82577E-05  2.86287E-05  9.23911E-06  2.97080E-06
 13.500  3.50028E-08  1.01027E-08 -1.14020E-08  4.58832E-09  8.78045E-09  3.72334E-05  5.38003E-05  2.79633E-05  9.57930E-06  2.96858E-06
 13.600  3.54872E-08  1.38455E-08 -1.19768E-08  2.03602E-09  8.93164E-09  3.35720E-05  4.96386E-05  2.71887E-05  9.86262E-06  3.01123E-06
 13.700  3.54738E-08  1.68542E-08 -1.24285E-08 -7.12452E-10  8.48138E-09  3.02711E-05  4.57492E-05  2.63143E-05  1.00798E-05  3.08504E-06
 13.800  3.49084E-08  1.90155E-08 -1.27732E-08 -3.45853E-09  7.56876E-09  2.72910E-05  4.21110E-05  2.53507E-05  1.02244E-05  3.17741E-06
 13.900  3.38173E-08  2.03435E-08 -1.29819E-08 -6.01830E-09  6.34386E-09  2.45965E-05  3.87057E-05  2.43095E-05  1.02927E-05  3.27704E-06
 14.000  3.22821E-08  2.09413E-08 -1.29989E-08 -8.23291E-09  4.95586E-09  2.21567E-05  3.55171E-05  2.32031E-05  1.02834E-05  3.37409E-06
 14.100  3.04163E-08  2.09656E-08 -1.27593E-08 -9.97651E-09  3.54286E-09  1.99444E-05  3.25310E-05  2.20439E-05  1.01974E-05  3.46034E-06
 14.200  2.83461E-08  2.05954E-08 -1.22031E-08 -1.11613E-08  2.22404E-09  1.79361E-05  2.97352E-05  2.08448E-05  1.00377E-05  3.52917E-06
 14.300  2.61943E-08  2.00068E-08 -1.12872E-08 -1.17397E-08  1.09428E-09  1.61112E-05  2.71189E-05  1.96185E-05  9.80899E-06  3.57558E-06
 14.400  2.40696E-08  1.93547E-08 -9.99241E-09 -1.17032E-08  2.21320E-10  1.44516E-05  2.46729E-05  1.83774E-05  9.51725E-06  3.59613E-06
 14.500  2.20593E-08  1.87617E-08 -8.32653E-09 -1.10795E-08 -3.54792E-10  1.29419E-05  2.23889E-05  1.71333E-05  9.16959E-06  3.58884E-06
 14.600  2.02257E-08  1.83118E-08 -6.32434E-09 -9.92684E-09 -6.20240E-10  1.15683E-05  2.02597E-05  1.58973E-05  8.77390E-06  3.55306E-06
 14.700  1.86062E-08  1.80509E-08 -4.04429E-09 -8.32737E-09 -5.84419E-10  1.03188E-05  1.82787E-05  1.46799E-05  8.33851E-06  3.48929E-06
 14.800  1.72150E-08  1.79891E-08 -1.56326E-09 -6.37982E-09 -2.75810E-10  9.18315E-06  1.64398E-05  1.34905E-05  7.87200E-06  3.39904E-06
 14.900  1.60468E-08  1.81081E-08  1.03000E-09 -4.19184E-09  2.62772E-10  8.15189E-06  1.47373E-05  1.23375E-05  7.38290E-06  3.28458E-06
 15.000  1.50813E-08  1.83676E-08  3.64171E-09 -1.87285E-09  9.79127E-10  7.21678E-06  1.31658E-05  1.12281E-05  6.87945E-06  3.14884E-06
 15.100  1.42882E-08  1.87140E-08  6.17977E-09  4.72237E-10  1.81643E-09  6.37035E-06  1.17198E-05  1.01685E-05  6.36949E-06  2.99514E-06
 15.200  1.36313E-08  1.90878E-08  8.55944E-09  2.74826E-09  2.71752E-09  5.60584E-06  1.03940E-05  9.16356E-06  5.86024E-06  2.82706E-06
 15.300  1.30730E-08  1.94300E-08  1.07080E-08  4.87365E-09  3.62846E-09  4.91702E-06  9.18297E-06  8.21716E-06  5.35820E-06  2.64828E-06
 15.400  1.25774E-08  1.96876E-08  1.25679E-08  6.78293E-09  4.50136E-09  4.29813E-06  8.08111E-06  7.33195E-06  4.86908E-06  2.46241E-06
 15.500  1.21127E-08  1.98171E-08  1.40986E-08  8.42792E-09  5.29629E-09  3.74377E-06  7.08275E-06  6.50951E-06  4.39772E-06  2.27294E-06
 15.600  1.16530E-08  1.97871E-08  1.52768E-08  9.77777E-09  5.98236E-09  3.24890E-06  6.18209E-06  5.75045E-06  3.94811E-06  2.08305E-06
 15.700  1.11785E-08  1.95787E-08  1.60958E-08  1.08180E-08  6.53809E-09  2.80870E-06  5.37322E-06  5.05445E-06  3.52338E-06  1.89564E-06
 15.800  1.06765E-08  1.91852E-08  1.65640E-08  1.15488E-08  6.95115E-09  2.41863E-06  4.65014E-06  4.42038E-06  3.12581E-06  1.71319E-06
 15.900  1.01402E-08  1.86114E-08  1.67024E-08  1.19827E-08  7.21755E-09  2.07436E-06  4.00683E-06  3.84640E-06  2.75690E-06  1.53782E-06
 16.000  9.56850E-09  1.78713E-08  1.65418E-08  1.21422E-08  7.34055E-09  1.77180E-06  3.43726E-06  3.33010E-06  2.41747E-06  1.37120E-06
 16.100  8.96449E-09  1.69862E-08  1.61203E-08  1.20570E-08  7.32927E-09  1.50703E-06  2.93546E-06  2.86857E-06  2.10767E-06  1.21463E-06
 16.200  8.33471E-09  1.59823E-08  1.54802E-08  1.17617E-08  7.19734E-09  1.27637E-06  2.49560E-06  2.45855E-06  1.82713E-06  1.06899E-06
 16.300  7.68789E-09  1.48887E-08  1.46657E-08  1.12931E-08  6.96139E-09  1.07634E-06  2.11197E-06  2.09652E-06  1.57500E-06  9.34841E-07
 16.400  7.03396E-09  1.37353E-08  1.37206E-08  1.06885E-08  6.63981E-09  9.03700E-07  1.77911E-06  1.77880E-06  1.35008E-06  8.12409E-07
 16.500  6.38314E-09  1.25511E-08  1.26864E-08  9.98382E-09  6.25154E-09  7.55394E-07  1.49178E-06  1.50165E-06  1.15086E-06  7.01658E-07
 16.600  5.74521E-09  1.13630E-08  1.16010E-08  9.21259E-09  5.81514E-09  6.28612E-07  1.24505E-06  1.26131E-06  9.75649E-07  6.02318E-07
 16.700  5.12903E-09  1.01947E-08  1.04981E-08  8.40472E-09  5.34798E-09  5.20759E-07  1.03428E-06  1.05414E-06  8.22601E-07  5.13941E-07
 16.800  4.54211E-09  9.06646E-09  9.40596E-09  7.58611E-09  4.86576E-09  4.29460E-07  8.55176E-07  8.76591E-07  6.89810E-07  4.35934E-07
 16.900  3.99043E-09  7.99438E-09  8.34778E-09  6.77835E-09  4.38208E-09  3.52559E-07  7.03771E-07  7.25317E-07  5.75351E-07  3.67606E-07
 17.000  3.47839E-09  6.99063E-09  7.34159E-09  5.99871E-09  3.90830E-09  2.88107E-07  5.76453E-07  5.97169E-07  4.77329E-07  3.08198E-07
 17.100  3.00878E-09  6.06358E-09  6.40053E-09  5.26032E-09  3.45348E-09  2.34361E-07  4.69951E-07  4.89228E-07  3.93915E-07  2.56916E-07
 17.200  2.58297E-09  5.21814E-09  5.53336E-09  4.57253E-09  3.02451E-09  1.89768E-07  3.81325E-07  3.98823E-07  3.23374E-07  2.12960E-07
 17.300  2.20105E-09  4.45619E-09  4.74498E-09  3.94132E-09  2.62620E-09  1.52953E-07  3.07961E-07  3.23527E-07  2.64084E-07  1.75541E-07
 17.400  1.86201E-09  3.77708E-09  4.03709E-09  3.36976E-09  2.26157E-09  1.22715E-07  2.47544E-07  2.61163E-07  2.14552E-07  1.43899E-07
 17.500  1.56402E-09  3.17814E-09  3.40875E-09  2.85858E-09  1.93206E-09  9.80018E-08  1.98049E-07  2.09793E-07  1.73416E-07  1.17318E-07
 17.600  1.30458E-09  2.65515E-09  2.85699E-09  2.40661E-09  1.63783E-09  7.79062E-08  1.57709E-07  1.67711E-07  1.39455E-07  9.51304E-08
 17.700  1.08075E-09  2.20280E-09  2.37738E-09  2.01122E-09  1.37802E-09  6.16471E-08  1.25000E-07  1.33424E-07  1.11578E-07  7.67274E-08
 17.800  8.89339E-10  1.81508E-09  1.96447E-09  1.66881E-09  1.15099E-09  4.85579E-08  9.86141E-08  1.05636E-07  8.88270E-08  6.15573E-08
 17.900  7.27025E-10  1.48566E-09  1.61222E-09  1.37508E-09  9.54552E-10  3.80728E-08  7.74370E-08  8.32360E-08  7.03629E-08  4.91282E-08
 18.000  5.90508E-10  1.20809E-09  1.31433E-09  1.12537E-09  7.86176E-10  2.97156E-08  6.05264E-08  6.52741E-08  5.54616E-08  3.90053E-08
 18.100  4.76594E-10  9.76104E-10  1.06451E-09  9.14925E-10  6.43136E-10  2.30873E-08  4.70907E-08  5.09460E-08  4.35016E-08  3.08093E-08
 18.200  3.82266E-10  7.83723E-10  8.56684E-10  7.39024E-10  5.22655E-10  1.78560E-08  3.64692E-08  3.95760E-08  3.39546E-08  2.42116E-08
 18.300  3.04737E-10  6.25387E-10  6.85133E-10  5.93166E-10  4.22007E-10  1.37476E-08  2.81142E-08  3.05995E-08  2.63746E-08  1.89308E-08
 18.400  2.41475E-10  4.96025E-10  5.44583E-10  4.73145E-10  3.38589E-10  1.05367E-08  2.15746E-08  2.35488E-08  2.03884E-08  1.47279E-08
 18.500  1.90217E-10  3.91086E-10  4.30267E-10  3.75116E-10  2.69978E-10  8.03943E-09  1.64810E-08  1.80388E-08  1.56857E-08  1.14012E-08
 18.600  1.48969E-10  3.06547E-10  3.37943E-10  2.95623E-10  2.13963E-10  6.10656E-09  1.25330E-08  1.37543E-08  1.20105E-08  8.78261E-09
 18.700  1.15999E-10  2.38902E-10  2.63891E-10  2.31611E-10  1.68558E-10  4.61769E-09  9.48785E-09  1.04394E-08  9.15316E-09  6.73245E-09
 18.800  8.98174E-11  1.85131E-10  2.04890E-10  1.80414E-10  1.32010E-10  3.47630E-09  7.15040E-09  7.88728E-09  6.94296E-09  5.13591E-09
 18.900  6.91591E-11  1.42664E-10  1.58188E-10  1.39738E-10  1.02790E-10  2.60545E-09  5.36476E-09  5.93204E-09  5.24198E-09  3.89918E-09
 19.000  5.29609E-11  1.09334E-10  1.21456E-10  1.07629E-10  7.95838E-11  1.94414E-09  4.00716E-09  4.44136E-09  3.93946E-09  2.94616E-09
 19.100  4.03378E-11  8.33377E-11  9.27452E-11  8.24419E-11  6.12721E-11  1.44432E-09  2.97988E-09  3.31036E-09  2.94701E-09  2.21555E-09
 19.200  3.05598E-11  6.31831E-11  7.04409E-11  6.28071E-11  4.69140E-11  1.06830E-09  2.20620E-09  2.45635E-09  2.19453E-09  1.65831E-09
 19.300  2.30303E-11  4.76503E-11  5.32171E-11  4.75929E-11  3.57253E-11  7.86729E-10  1.62623E-09  1.81457E-09  1.62678E-09  1.23544E-09
 19.400  1.72659E-11  3.57491E-11  3.99945E-11  3.58740E-11  2.70593E-11  5.76861E-10  1.19350E-09  1.33454E-09  1.20049E-09  9.16149E-10
 19.500  1.28779E-11  2.66825E-11  2.99020E-11  2.68999E-11  2.03870E-11  4.21150E-10  8.72109E-10  9.77187E-10  8.81934E-10  6.76255E-10
 19.600  9.55642E-12  1.98142E-11  2.22423E-11  2.00671E-11  1.52797E-11  3.06148E-10  6.34510E-10  7.12394E-10  6.45026E-10  4.96901E-10
 19.700  7.05608E-12  1.46400E-11  1.64613E-11  1.48938E-11  1.13929E-11  2.21596E-10  4.59657E-10  5.17093E-10  4.69670E-10  3.63460E-10
 19.800  5.18412E-12  1.07633E-11  1.21221E-11  1.09987E-11  8.45142E-12  1.59712E-10  3.31562E-10  3.73708E-10  3.40481E-10  2.64657E-10
 19.900  3.79011E-12  7.87428E-12  8.88267E-12  8.08187E-12  6.23780E-12  1.14621E-10  2.38144E-10  2.68919E-10  2.45747E-10  1.91851E-10
  67 225 200   0.100
  0.000  4.60822E-02 -2.24980E-16 -3.64292E-16 -4.56588E-16 -8.79751E-16  1.01564E-01 -5.27539E-16 -8.74301E-16 -5.75426E-16 -3.01833E-15
  0.100  4.60977E-02 -2.60239E-05 -1.57439E-08 -4.76815E-12 -8.01074E-16  1.01558E-01 -1.48020E-05 -1.71528E-08  6.62436E-12 -4.91373E-14
  0.200  4.61440E-02 -1.03056E-04 -2.50087E-07 -3.02824E-10 -2.84646E-13  1.01542E-01 -5.77262E-05 -2.71172E-07  4.23609E-10  8.35692E-14
  0.300  4.62205E-02 -2.28009E-04 -1.25087E-06 -3.40604E-09 -7.15748E-12  1.01516E-01 -1.24438E-04 -1.34546E-06  4.75073E-09  2.49264E-12
  0.400  4.63260E-02 -3.95846E-04 -3.88696E-06 -1.88018E-08 -7.02014E-11  1.01481E-01 -2.08070E-04 -4.13311E-06  2.61156E-08  2.58397E-11
  0.500  4.64591E-02 -5.99740E-04 -9.28450E-06 -7.01101E-08 -4.08737E-10  1.01438E-01 -2.99743E-04 -9.72410E-06  9.68779E-08  1.61284E-10
  0.600  4.66177E-02 -8.31298E-04 -1.87428E-05 -2.03608E-07 -1.70791E-09  1.01388E-01 -3.89236E-04 -1.92591E-05  2.79632E-07  7.28943E-10
  0.700  4.67995E-02 -1.08083E-03 -3.36346E-05 -4.96828E-07 -5.66733E-09  1.01333E-01 -4.65781E-04 -3.37614E-05  6.77668E-07  2.63535E-09
  0.800  4.70018E-02 -1.33769E-03 -5.52964E-05 -1.06584E-06 -1.58649E-08  1.01274E-01 -5.18921E-04 -5.39616E-05  1.44301E-06  8.07973E-09
  0.900  4.72215E-02 -1.59062E-03 -8.49150E-05 -2.06988E-06 -3.89562E-08  1.01212E-01 -5.39374E-04 -8.01309E-05  2.78054E-06  2.18037E-08
  1.000  4.74553E-02 -1.82817E-03 -1.23417E-04 -3.71219E-06 -8.61736E-08  1.01150E-01 -5.19839E-04 -1.11940E-04  4.94723E-06  5.31078E-08
  1.100  4.76995E-02 -2.03913E-03 -1.71370E-04 -6.23623E-06 -1.75022E-07  1.01088E-01 -4.55689E-04 -1.48362E-04  8.24636E-06  1.18856E-07
  1.200  4.79505E-02 -2.21293E-03 -2.28895E-04 -9.91708E-06 -3.31012E-07  1.01027E-01 -3.45494E-04 -1.87634E-04  1.30171E-05  2.47628E-07
  1.300  4.82043E-02 -2.34006E-03 -2.95605E-04 -1.50478E-05 -5.89217E-07  1.00968E-01 -1.91322E-04 -2.27289E-04  1.96204E-05  4.85078E-07
  1.400  4.84571E-02 -2.41249E-03 -3.70567E-04 -2.19218E-05 -9.95433E-07  1.00915E-01  1.20547E-06 -2.64269E-04  2.84229E-05  9.00351E-07
  1.500  4.87050E-02 -2.42400E-03 -4.52291E-04 -3.08117E-05 -1.60670E-06  1.00866E-01  2.23136E-04 -2.95111E-04  3.97788E-05  1.59319E-06
  1.600  4.89445E-02 -2.37048E-03 -5.38755E-04 -4.19465E-05 -2.49104E-06  1.00826E-01  4.62666E-04 -3.16210E-04  5.40124E-05  2.70107E-06
  1.700  4.91720E-02 -2.25017E-03 -6.27453E-04 -5.54883E-05 -3.72621E-06  1.00795E-01  7.05872E-04 -3.24134E-04  7.14002E-05  4.40540E-06
  1.800  4.93845E-02 -2.06375E-03 -7.15475E-04 -7.15103E-05 -5.39754E-06  1.00776E-01  9.37642E-04 -3.15974E-04  9.21519E-05  6.93564E-06
  1.900  4.95794E-02 -1.81443E-03 -7.99615E-04 -8.99771E-05 -7.59485E-06  1.00771E-01  1.14275E-03 -2.89693E-04  1.16391E-04  1.05698E-05
  2.000  4.97545E-02 -1.50787E-03 -8.76499E-04 -1.10730E-04 -1.04086E-05  1.00781E-01  1.30700E-03 -2.44444E-04  1.44134E-04  1.56302E-05
  2.100  4.99082E-02 -1.15203E-03 -9.42723E-04 -1.33477E-04 -1.39255E-05  1.00809E-01  1.41835E-03 -1.80823E-04  1.75263E-04  2.24728E-05
  2.200  5.00396E-02 -7.56920E-04 -9.95013E-04 -1.57786E-04 -1.82241E-05  1.00854E-01  1.46791E-03 -1.01018E-04  2.09500E-04  3.14692E-05
  2.300  5.01483E-02 -3.34218E-04 -1.03038E-03 -1.83092E-04 -2.33699E-05  1.00918E-01  1.45079E-03 -8.82683E-06  2.46373E-04  4.29814E-05
  2.400  5.02348E-02  1.03112E-04 -1.04626E-03 -2.08697E-04 -2.94113E-05  1.00999E-01  1.36665E-03  9.04645E-05  2.85187E-04  5.73292E-05
  2.500  5.02999E-02  5.41329E-04 -1.04068E-03 -2.33790E-04 -3.63763E-05  1.01096E-01  1.21991E-03  1.90358E-04  3.25000E-04  7.47509E-05
  2.600  5.03453E-02  9.66444E-04 -1.01238E-03 -2.57463E-04 -4.42689E-05  1.01205E-01  1.01967E-03  2.83557E-04  3.64605E-04  9.53609E-05
  2.700  5.03731E-02  1.36477E-03 -9.60875E-04 -2.78737E-04 -5.30674E-05  1.01323E-01  7.79205E-04  3.62501E-04  4.02527E-04  1.19106E-04
  2.800  5.03862E-02  1.72350E-03 -8.86597E-04 -2.96585E-04 -6.27224E-05  1.01444E-01  5.15164E-04  4.19965E-04  4.37055E-04  1.45725E-04
  2.900  5.03874E-02  2.03121E-03 -7.90889E-04 -3.09967E-04 -7.31565E-05  1.01562E-01  2.46492E-04  4.49691E-04  4.66287E-04  1.74715E-04
  3.000  5.03800E-02  2.27837E-03 -6.76038E-04 -3.17864E-04 -8.42630E-05  1.01672E-01 -6.85881E-06  4.46984E-04  4.88216E-04  2.05316E-04
  3.100  5.03675E-02  2.45777E-03 -5.45240E-04 -3.19315E-04 -9.59058E-05  1.01765E-01 -2.25304E-04  4.09217E-04  5.00850E-04  2.36500E-04
  3.200  5.03530E-02  2.56491E-03 -4.02538E-04 -3.13455E-04 -1.07919E-04  1.01837E-01 -3.91000E-04  3.36185E-04  5.02352E-04  2.66995E-04
  3.300  5.03395E-02  2.59818E-03 -2.52720E-04 -2.99554E-04 -1.20107E-04  1.01881E-01 -4.89085E-04  2.30274E-04  4.91211E-04  2.95325E-04
  3.400  5.03294E-02  2.55910E-03 -1.01185E-04 -2.77064E-04 -1.32243E-04  1.01891E-01 -5.08700E-04  9.64032E-05  4.66404E-04  3.19869E-04
  3.500  5.03245E-02  2.45230E-03  4.62304E-05 -2.45654E-04 -1.44069E-04  1.01864E-01 -4.43696E-04 -5.82519E-05  4.27569E-04  3.38954E-04
  3.600  5.03255E-02  2.28548E-03  1.83449E-04 -2.05251E-04 -1.55298E-04  1.01795E-01 -2.92967E-04 -2.24760E-04  3.75134E-04  3.50954E-04
  3.700  5.03321E-02  2.06920E-03  3.04373E-04 -1.56078E-04 -1.65613E-04  1.01682E-01 -6.03779E-05 -3.93108E-04  3.10404E-04  3.54407E-04
  3.800  5.03427E-02  1.81658E-03  4.03123E-04 -9.86848E-05 -1.74671E-04  1.01522E-01  2.45705E-04 -5.53006E-04  2.35596E-04  3.48139E-04
  3.900  5.03544E-02  1.54289E-03  4.74283E-04 -3.39663E-05 -1.82109E-04  1.01313E-01  6.13245E-04 -6.94747E-04  1.53782E-04  3.31374E-04
  4.000  5.03628E-02  1.26507E-03  5.13145E-04  3.68216E-05 -1.87554E-04  1.01055E-01  1.02766E-03 -8.10051E-04  6.87651E-05  3.03832E-04
  4.100  5.03618E-02  1.00111E-03  5.15946E-04  1.12066E-04 -1.90629E-04  1.00744E-01  1.47316E-03 -8.92810E-04 -1.51304E-05  2.65806E-04
  4.200  5.03443E-02  7.69439E-04  4.80076E-04  1.89815E-04 -1.90976E-04  1.00378E-01  1.93415E-03 -9.39666E-04 -9.33344E-05  2.18198E-04
  4.300  5.03016E-02  5.88213E-04  4.04261E-04  2.67815E-04 -1.88267E-04  9.99546E-02  2.39660E-03 -9.50366E-04 -1.61360E-04  1.62516E-04
  4.400  5.02238E-02  4.74643E-04  2.88700E-04  3.43564E-04 -1.82232E-04  9.94684E-02  2.84935E-03 -9.27848E-04 -2.15158E-04  1.00832E-04
  4.500  5.01004E-02  4.44288E-04  1.35141E-04  4.14392E-04 -1.72674E-04  9.89140E-02  3.28504E-03 -8.78060E-04 -2.51466E-04  3.56895E-05
  4.600  4.99200E-02  5.10404E-04 -5.30923E-05  4.77548E-04 -1.59499E-04  9.82845E-02  3.70082E-03 -8.09499E-04 -2.68121E-04 -3.00242E-05
  4.700  4.96712E-02  6.83349E-04 -2.71149E-04  5.30314E-04 -1.42732E-04  9.75719E-02  4.09860E-03 -7.32534E-04 -2.64311E-04 -9.32384E-05
  4.800  4.93426E-02  9.70077E-04 -5.12773E-04  5.70122E-04 -1.22538E-04  9.67674E-02  4.48495E-03 -6.58543E-04 -2.40726E-04 -1.50881E-04
  4.900  4.89233E-02  1.37375E-03 -7.70489E-04  5.94682E-04 -9.92306E-05  9.58616E-02  4.87055E-03 -5.98964E-04 -1.99597E-04 -2.00066E-04
  5.000  4.84035E-02  1.89348E-03 -1.03586E-03  6.02101E-04 -7.32799E-05  9.48449E-02  5.26931E-03 -5.64316E-04 -1.44622E-04 -2.38279E-04
  5.100  4.77744E-02  2.52421E-03 -1.29980E-03  5.91002E-04 -4.53062E-05  9.37078E-02  5.69723E-03 -5.63294E-04 -8.07594E-05 -2.63537E-04
  5.200  4.70293E-02  3.25679E-03 -1.55293E-03  5.60621E-04 -1.60668E-05  9.24415E-02  6.17093E-03 -6.02011E-04 -1.39176E-05 -2.74517E-04
  5.300  4.61629E-02  4.07817E-03 -1.78597E-03  5.10876E-04  1.35684E-05  9.10383E-02  6.70630E-03 -6.83441E-04  4.94385E-05 -2.70642E-04
  5.400  4.51726E-02  4.97177E-03 -1.99015E-03  4.42418E-04  4.26504E-05  8.94920E-02  7.31697E-03 -8.07124E-04  1.02740E-04 -2.52113E-04
  5.500  4.40577E-02  5.91803E-03 -2.15759E-03  3.56631E-04  7.01922E-05  8.77978E-02  8.01299E-03 -9.69142E-04  1.39784E-04 -2.19894E-04
  5.600  4.28203E-02  6.89505E-03 -2.28164E-03  2.55606E-04  9.52164E-05  8.59532E-02  8.79978E-03 -1.16237E-03  1.55184E-04 -1.75640E-04
  5.700  4.14646E-02  7.87934E-03 -2.35722E-03  1.42070E-04  1.16804E-04  8.39576E-02  9.67729E-03 -1.37699E-03  1.44766E-04 -1.21584E-04
  5.800  3.99973E-02  8.84667E-03 -2.38105E-03  1.92821E-05  1.34146E-04  8.18128E-02  1.06396E-02 -1.60116E-03  1.05870E-04 -6.03901E-05
  5.900  3.84273E-02  9.77289E-03 -2.35178E-03 -1.09100E-04  1.46587E-04  7.95224E-02  1.16747E-02 -1.82193E-03  3.75542E-05  5.02124E-06
  6.000  3.67654E-02  1.06348E-02 -2.27010E-03 -2.39181E-04  1.53663E-04  7.70926E-02  1.27652E-02 -2.02608E-03 -5.93436E-05  7.16533E-05
  6.100  3.50240E-02  1.14112E-02 -2.13864E-03 -3.67001E-04  1.55133E-04  7.45312E-02  1.38885E-02 -2.20108E-03 -1.82258E-04  1.36611E-04
  6.200  3.32171E-02  1.20830E-02 -1.96188E-03 -4.88713E-04  1.50991E-04  7.18483E-02  1.50184E-02 -2.33594E-03 -3.27079E-04  1.97260E-04
  6.300  3.13597E-02  1.26346E-02 -1.74590E-03 -6.00754E-04  1.41469E-04  6.90552E-02  1.61258E-02 -2.42187E-03 -4.88426E-04  2.51361E-04
  6.400  2.94672E-02  1.30540E-02 -1.49813E-03 -7.00001E-04  1.27029E-04  6.61654E-02  1.71805E-02 -2.45284E-03 -6.60016E-04  2.97167E-04
  6.500  2.75558E-02  1.33331E-02 -1.22690E-03 -7.83898E-04  1.08332E-04  6.31931E-02  1.81523E-02 -2.42587E-03 -8.35061E-04  3.33481E-04
  6.600  2.56414E-02  1.34680E-02 -9.41151E-04 -8.50553E-04  8.62036E-05  6.01542E-02  1.90128E-02 -2.34112E-03 -1.00669E-03  3.59674E-04
  6.700  2.37394E-02  1.34589E-02 -6.49937E-04 -8.98797E-04  6.15909E-05  5.70654E-02  1.97366E-02 -2.20174E-03 -1.16836E-03  3.75664E-04
  6.800  2.18649E-02  1.33101E-02 -3.62082E-04 -9.28202E-04  3.55078E-05  5.39440E-02  2.03025E-02 -2.01358E-03 -1.31420E-03  3.81864E-04
  6.900  2.00318E-02  1.30294E-02 -8.57876E-05 -9.39060E-04  8.98319E-06  5.08080E-02  2.06940E-02 -1.78466E-03 -1.43932E-03  3.79100E-04
  7.000  1.82531E-02  1.26279E-02  1.71679E-04 -9.32324E-04 -1.69914E-05  4.76758E-02  2.09006E-02 -1.52463E-03 -1.53998E-03  3.68521E-04
  7.100  1.65401E-02  1.21192E-02  4.04242E-04 -9.09521E-04 -4.15094E-05  4.45656E-02  2.09175E-02 -1.24406E-03 -1.61376E-03  3.51487E-04
  7.200  1.49028E-02  1.15192E-02  6.07188E-04 -8.72641E-04 -6.37884E-05  4.14956E-02  2.07460E-02 -9.53844E-04 -1.65955E-03  3.29470E-04
  7.300  1.33497E-02  1.08449E-02  7.77270E-04 -8.24009E-04 -8.32008E-05  3.84834E-02  2.03929E-02 -6.64524E-04 -1.67749E-03  3.03957E-04
  7.400  1.18874E-02  1.01140E-02  9.12718E-04 -7.66150E-04 -9.92922E-05  3.55458E-02  1.98701E-02 -3.85777E-04 -1.66887E-03  2.76363E-04
  7.500  1.05210E-02  9.34440E-03  1.01318E-03 -7.01660E-04 -1.11790E-04  3.26984E-02  1.91940E-02 -1.25968E-04 -1.63590E-03  2.47969E-04
  7.600  9.25372E-03  8.55336E-03  1.07962E-03 -6.33079E-04 -1.20598E-04  2.99557E-02  1.83844E-02  1.08158E-04 -1.58156E-03  2.19871E-04
  7.700  8.08733E-03  7.75707E-03  1.11410E-03 -5.62792E-04 -1.25787E-04  2.73303E-02  1.74635E-02  3.11658E-04 -1.50929E-03  1.92959E-04
  7.800  7.02201E-03  6.97026E-03  1.11959E-03 -4.92934E-04 -1.27570E-04  2.48330E-02  1.64549E-02  4.81437E-04 -1.42281E-03  1.67897E-04
  7.900  6.05651E-03  6.20581E-03  1.09977E-03 -4.25334E-04 -1.26278E-04  2.24728E-02  1.53830E-02  6.16187E-04 -1.32591E-03  1.45141E-04
  8.000  5.18833E-03  5.47459E-03  1.05872E-03 -3.61474E-04 -1.22326E-04  2.02562E-02  1.42713E-02  7.16223E-04 -1.22222E-03  1.24948E-04
  8.100  4.41385E-03  4.78531E-03  1.00073E-03 -3.02471E-04 -1.16189E-04  1.81879E-02  1.31425E-02  7.83243E-04 -1.11510E-03  1.07408E-04
  8.200  3.72850E-03  4.14450E-03  9.30079E-04 -2.49090E-04 -1.08361E-04  1.62701E-02  1.20171E-02  8.20055E-04 -1.00750E-03  9.24728E-05
  8.300  3.12698E-03  3.55661E-03  8.50860E-04 -2.01758E-04 -9.93377E-05  1.45030E-02  1.09134E-02  8.30262E-04 -9.01934E-04  7.99939E-05
  8.400  2.60340E-03  3.02414E-03  7.66820E-04 -1.60609E-04 -8.95852E-05  1.28849E-02  9.84695E-03  8.17969E-04 -8.00403E-04  6.97504E-05
  8.500  2.15148E-03  2.54779E-03  6.81257E-04 -1.25526E-04 -7.95259E-05  1.14122E-02  8.83029E-03  7.87490E-04 -7.04426E-04  6.14812E-05
  8.600  1.76475E-03  2.12680E-03  5.96954E-04 -9.61951E-05 -6.95239E-05  1.00798E-02  7.87315E-03  7.43113E-04 -6.15061E-04  5.49091E-05
  8.700  1.43665E-03  1.75912E-03  5.16143E-04 -7.21555E-05 -5.98775E-05  8.88123E-03  6.98241E-03  6.88888E-04 -5.32953E-04  4.97603E-05
  8.800  1.16072E-03  1.44173E-03  4.40512E-04 -5.28516E-05 -5.08167E-05  7.80888E-03  6.16233E-03  6.28483E-04 -4.58392E-04  4.57791E-05
  8.900  9.30720E-04  1.17087E-03  3.71226E-04 -3.76778E-05 -4.25045E-05  6.85445E-03  5.41481E-03  5.65076E-04 -3.91384E-04  4.27365E-05
  9.000  7.40710E-04  9.42346E-04  3.08984E-04 -2.60169E-05 -3.50422E-05  6.00910E-03  4.73971E-03  5.01309E-04 -3.31713E-04  4.04353E-05
  9.100  5.85142E-04  7.51681E-04  2.54077E-04 -1.72713E-05 -2.84768E-05  5.26368E-03  4.13526E-03  4.39270E-04 -2.79005E-04  3.87110E-05
  9.200  4.58918E-04  5.94360E-04  2.06462E-04 -1.08858E-05 -2.28098E-05  4.60904E-03  3.59832E-03  3.80515E-04 -2.32780E-04  3.74304E-05
  9.300  3.57420E-04  4.65967E-04  1.65839E-04 -6.36314E-06 -1.80071E-05  4.03615E-03  3.12482E-03  3.26114E-04 -1.92502E-04  3.64881E-05
  9.400  2.76532E-04  3.62308E-04  1.31714E-04 -3.27224E-06 -1.40086E-05  3.53631E-03  2.71001E-03  2.76716E-04 -1.57613E-04  3.58022E-05
  9.500  2.12634E-04  2.79503E-04  1.03475E-04 -1.25102E-06 -1.07368E-05  3.10126E-03  2.34874E-03  2.32617E-04 -1.27562E-04  3.53095E-05
  9.600  1.62591E-04  2.14040E-04  8.04393E-05 -4.50105E-09 -8.10480E-06  2.72328E-03  2.03575E-03  1.93837E-04 -1.01822E-04  3.49609E-05
  9.700  1.23723E-04  1.62808E-04  6.19078E-05  7.00352E-07 -6.02278E-06  2.39528E-03  1.76579E-03  1.60188E-04 -7.99027E-05  3.47170E-05
  9.800  9.37733E-05  1.23104E-04  4.71975E-05  1.04184E-06 -4.40305E-06  2.11078E-03  1.53381E-03  1.31341E-04 -6.13569E-05  3.45453E-05
  9.900  7.08651E-05  9.26183E-05  3.56688E-05  1.15185E-06 -3.16372E-06  1.86397E-03  1.33506E-03  1.06877E-04 -4.57816E-05  3.44168E-05
 10.000  5.34600E-05  6.94156E-05  2.67430E-05  1.12433E-06 -2.23104E-06  1.64967E-03  1.16514E-03  8.63338E-05 -3.28167E-05  3.43047E-05
 10.100  4.03131E-05  5.18979E-05  1.99116E-05  1.02345E-06 -1.54071E-06  1.46334E-03  1.02007E-03  6.92405E-05 -2.21416E-05  3.41833E-05
 10.200  3.04304E-05  3.87673E-05  1.47391E-05  8.90800E-07 -1.03830E-06  1.30098E-03  8.96279E-04  5.51409E-05 -1.34711E-05  3.40274E-05
 10.300  2.30280E-05  2.89857E-05  1.08612E-05  7.51646E-07 -6.78901E-07  1.15916E-03  7.90604E-04  4.36105E-05 -6.55065E-06  3.38125E-05
 10.400  1.74955E-05  2.17348E-05  7.98005E-06  6.19928E-07 -4.26430E-07  1.03489E-03  7.00286E-04  3.42657E-05 -1.15208E-06  3.35156E-05
 10.500  1.33630E-05  1.63780E-05  5.85638E-06  5.02185E-07 -2.52566E-07  9.25656E-04  6.22934E-04  2.67678E-05  2.93038E-06  3.31153E-05
 10.600  1.02728E-05  1.24272E-05  4.30184E-06  4.00444E-07 -1.35590E-07  8.29292E-04  5.56494E-04  2.08230E-05  5.88338E-06  3.25934E-05
 10.700  7.95539E-06  9.51204E-06  3.17046E-06  3.14243E-07 -5.92059E-08  7.43975E-04  4.99215E-04  1.61800E-05  7.87704E-06  3.19353E-05
 10.800  6.20927E-06  7.35500E-06  2.35080E-06  2.41967E-07 -1.14295E-08  6.68167E-04  4.49614E-04  1.26259E-05  9.06691E-06  3.11307E-05
 10.900  4.88518E-06  5.75013E-06  1.75887E-06  1.81659E-07  1.64022E-08  6.00576E-04  4.06444E-04  9.98158E-06  9.59536E-06  3.01747E-05
 11.000  3.87309E-06  4.54600E-06  1.33204E-06  1.31456E-07  3.04690E-08  5.40116E-04  3.68659E-04  8.09630E-06  9.59249E-06  2.90675E-05
 11.100  3.09229E-06  3.63219E-06  1.02406E-06  8.97783E-08  3.51495E-08  4.85877E-04  3.35391E-04  6.84340E-06  9.17664E-06  2.78146E-05
 11.200  2.48371E-06  2.92875E-06  8.00987E-07  5.53749E-08  3.35510E-08  4.37098E-04  3.05919E-04  6.11587E-06  8.45470E-06  2.64272E-05
 11.300  2.00422E-06  2.37821E-06  6.38102E-07  2.72820E-08  2.79049E-08  3.93136E-04  2.79651E-04  5.82274E-06  7.52216E-06  2.49207E-05
 11.400  1.62231E-06  1.93956E-06  5.17507E-07  4.75606E-09  1.98478E-08  3.53452E-04  2.56099E-04  5.88600E-06  6.46315E-06  2.33152E-05
 11.500  1.31495E-06  1.58373E-06  4.26359E-07 -1.27994E-08  1.06108E-08  3.17587E-04  2.34864E-04  6.23806E-06  5.35046E-06  2.16336E-05
 11.600  1.06530E-06  1.29032E-06  3.55554E-07 -2.58949E-08  1.14016E-09  2.85152E-04  2.15622E-04  6.81979E-06  4.24559E-06  1.99013E-05
 11.700  8.60984E-07  1.04512E-06  2.98754E-07 -3.50002E-08 -7.83176E-09  2.55811E-04  1.98108E-04  7.57896E-06  3.19898E-06  1.81449E-05
 11.800  6.92915E-07  8.38315E-07  2.51659E-07 -4.05734E-08 -1.57481E-08  2.29274E-04  1.82108E-04  8.46906E-06  2.25029E-06  1.63910E-05
 11.900  5.54343E-07  6.63153E-07  2.11464E-07 -4.30762E-08 -2.22081E-08  2.05284E-04  1.67445E-04  9.44844E-06  1.42893E-06  1.46658E-05
 12.000  4.40204E-07  5.14951E-07  1.76427E-07 -4.29794E-08 -2.69566E-08  1.83616E-04  1.53975E-04  1.04797E-05  7.54710E-07  1.29934E-05
 12.100  3.46617E-07  3.90371E-07  1.45541E-07 -4.07617E-08 -2.98759E-08  1.64066E-04  1.41579E-04  1.15292E-05  2.38652E-07  1.13956E-05
 12.200  2.70525E-07  2.86887E-07  1.18274E-07 -3.69033E-08 -3.09752E-08  1.46451E-04  1.30157E-04  1.25671E-05 -1.16049E-07  9.89130E-06
 12.300  2.09422E-07  2.02413E-07  9.43667E-08 -3.18777E-08 -3.03759E-08  1.30602E-04  1.19623E-04  1.35668E-05 -3.12965E-07  8.49571E-06
 12.400  1.61172E-07  1.35057E-07  7.36877E-08 -2.61405E-08 -2.82925E-08  1.16365E-04  1.09904E-04  1.45052E-05 -3.61303E-07  7.22047E-06
 12.500  1.23887E-07  8.29719E-08  5.61286E-08 -2.01183E-08 -2.50092E-08  1.03597E-04  1.00935E-04  1.53627E-05 -2.74746E-07  6.07345E-06
 12.600  9.58468E-08  4.42857E-08  4.15419E-08 -1.41967E-08 -2.08543E-08  9.21640E-05  9.26584E-05  1.61230E-05 -7.03006E-08  5.05880E-06
 12.700  7.54637E-08  1.70872E-08  2.97112E-08 -8.70922E-09 -1.61740E-08  8.19427E-05  8.50207E-05  1.67732E-05  2.32797E-07  4.17725E-06
 12.800  6.12704E-08 -5.46714E-10  2.03483E-08 -3.92701E-09 -1.13079E-08  7.28180E-05  7.79739E-05  1.73037E-05  6.14100E-07  3.42635E-06
 12.900  5.19227E-08 -1.05025E-08  1.31071E-08 -5.16531E-11 -6.56634E-09  6.46833E-05  7.14733E-05  1.77083E-05  1.05286E-06  2.80090E-06
 13.000  4.62123E-08 -1.45707E-08  7.60998E-09  2.78955E-09 -2.21386E-09  5.74395E-05  6.54773E-05  1.79838E-05  1.52881E-06  2.29342E-06
 13.100  4.30813E-08 -1.43889E-08  3.47704E-09  4.54440E-09  1.54386E-09  5.09957E-05  5.99474E-05  1.81300E-05  2.02279E-06  1.89457E-06
 13.200  4.16336E-08 -1.13948E-08  3.55059E-10  5.23265E-09  4.56654E-09  4.52680E-05  5.48475E-05  1.81491E-05  2.51729E-06  1.59368E-06
 13.300  4.11409E-08 -6.79325E-09 -2.05965E-09  4.93901E-09  6.78073E-09  4.01798E-05  5.01442E-05  1.80460E-05  2.99675E-06  1.37916E-06
 13.400  4.10409E-08 -1.54129E-09 -4.00573E-09  3.80258E-09  8.17628E-09  3.56615E-05  4.58067E-05  1.78273E-05  3.44788E-06  1.23897E-06
 13.500  4.09290E-08  3.65091E-09 -5.65006E-09  2.00362E-09  8.79879E-09  3.16498E-05  4.18063E-05  1.75014E-05  3.85969E-06  1.16098E-06
 13.600  4.05420E-08  8.30370E-09 -7.08919E-09 -2.51356E-10  8.73908E-09  2.80879E-05  3.81168E-05  1.70780E-05  4.22360E-06  1.13335E-06
 13.700  3.97384E-08  1.21402E-08 -8.35768E-09 -2.74514E-09  8.12081E-09  2.49248E-05  3.47141E-05  1.65677E-05  4.53333E-06  1.14476E-06
 13.800  3.84746E-08  1.50511E-08 -9.44132E-09 -5.26480E-09  7.08749E-09  2.21147E-05  3.15761E-05  1.59818E-05  4.78478E-06  1.18471E-06
 13.900  3.67804E-08  1.70551E-08 -1.02931E-08 -7.61499E-09  5.78983E-09  1.96171E-05  2.86827E-05  1.53318E-05  4.97587E-06  1.24363E-06
 14.000  3.47349E-08  1.82603E-08 -1.08498E-08 -9.62898E-09  4.37437E-09  1.73959E-05  2.60155E-05  1.46293E-05  5.10633E-06  1.31309E-06
 14.100  3.24456E-08  1.88272E-08 -1.10471E-08 -1.11765E-08  2.97404E-09  1.54194E-05  2.35579E-05  1.38859E-05  5.17747E-06  1.38578E-06
 14.200  3.00293E-08  1.89378E-08 -1.08326E-08 -1.21686E-08  1.70103E-09  1.36594E-05  2.12947E-05  1.31124E-05  5.19194E-06  1.45565E-06
 14.300  2.75985E-08  1.87705E-08 -1.01747E-08 -1.25588E-08  6.42173E-10  1.20914E-05  1.92119E-05  1.23193E-05  5.15349E-06  1.51782E-06
 14.400  2.52507E-08  1.84822E-08 -9.06849E-09 -1.23417E-08 -1.43209E-10  1.06936E-05  1.72971E-05  1.15165E-05  5.06670E-06  1.56858E-06
 14.500  2.30623E-08  1.81969E-08 -7.53678E-09 -1.15489E-08 -6.23252E-10  9.44705E-06  1.55385E-05  1.07129E-05  4.93683E-06  1.60531E-06
 14.600  2.10857E-08  1.80008E-08 -5.62902E-09 -1.02427E-08 -7.91580E-10  8.33515E-06  1.39257E-05  9.91669E-06  4.76952E-06  1.62640E-06
 14.700  1.93494E-08  1.79419E-08 -3.41692E-09 -8.50898E-09 -6.63916E-10  7.34328E-06  1.24489E-05  9.13508E-06  4.57067E-06  1.63112E-06
 14.800  1.78604E-08  1.80336E-08 -9.88585E-10 -6.44937E-09 -2.73727E-10  6.45863E-06  1.10990E-05  8.37441E-06  4.34619E-06  1.61950E-06
 14.900  1.66077E-08  1.82612E-08  1.55838E-09 -4.17325E-09  3.32636E-10  5.66993E-06  9.86765E-06  7.64009E-06  4.10194E-06  1.59224E-06
 15.000  1.55666E-08  1.85891E-08  4.12383E-09 -1.79054E-09  1.10087E-09  4.96726E-06  8.74695E-06  6.93664E-06  3.84352E-06  1.55054E-06
 15.100  1.47037E-08  1.89687E-08  6.61159E-09  5.94565E-10  1.97338E-09  4.34183E-06  7.72952E-06  6.26767E-06  3.57618E-06  1.49597E-06
 15.200  1.39812E-08  1.93460E-08  8.93494E-09  2.88870E-09  2.89337E-09  3.78586E-06  6.80836E-06  5.63596E-06  3.30478E-06  1.43039E-06
 15.300  1.33604E-08  1.96680E-08  1.10209E-08  5.01293E-09  3.80822E-09  3.29240E-06  5.97682E-06  5.04349E-06  3.03366E-06  1.35581E-06
 15.400  1.28053E-08  1.98873E-08  1.28128E-08  6.90506E-09  4.67203E-09  2.85522E-06  5.22855E-06  4.49150E-06  2.76666E-06  1.27430E-06
 15.500  1.22841E-08  1.99660E-08  1.42719E-08  8.52051E-09  5.44729E-09  2.46873E-06  4.55749E-06  3.98056E-06  2.50706E-06  1.18790E-06
 15.600  1.17715E-08  1.98776E-08  1.53774E-08  9.83213E-09  6.10576E-09  2.12788E-06  3.95781E-06  3.51062E-06  2.25756E-06  1.09856E-06
 15.700  1.12484E-08  1.96077E-08  1.61250E-08  1.08290E-08  6.62861E-09  1.82807E-06  3.42392E-06  3.08108E-06  2.02034E-06  1.00809E-06
 15.800  1.07025E-08  1.91536E-08  1.65255E-08  1.15144E-08  7.00601E-09  1.56514E-06  2.95047E-06  2.69091E-06  1.79705E-06  9.18109E-07
 15.900  1.01277E-08  1.85229E-08  1.66019E-08  1.19039E-08  7.23620E-09  1.33528E-06  2.53231E-06  2.33865E-06  1.58884E-06  8.30020E-07
 16.000  9.52295E-09  1.77319E-08  1.63866E-08  1.20221E-08  7.32432E-09  1.13500E-06  2.16454E-06  2.02254E-06  1.39643E-06  7.45002E-07
 16.100  8.89170E-09  1.68035E-08  1.59190E-08  1.19004E-08  7.28098E-09  9.61127E-07  1.84250E-06  1.74057E-06  1.22013E-06  6.64004E-07
 16.200  8.24036E-09  1.57647E-08  1.52419E-08  1.15746E-08  7.12089E-09  8.10737E-07  1.56175E-06  1.49054E-06  1.05991E-06  5.87751E-07
 16.300  7.57745E-09  1.46450E-08  1.43997E-08  1.10821E-08  6.86139E-09  6.81171E-07  1.31811E-06  1.27014E-06  9.15457E-07  5.16756E-07
 16.400  6.91250E-09  1.34739E-08  1.34360E-08  1.04605E-08  6.52119E-09  5.69999E-07  1.10765E-06  1.07701E-06  7.86202E-07  4.51340E-07
 16.500  6.25524E-09  1.22801E-08  1.23916E-08  9.74547E-09  6.11929E-09  4.75009E-07  9.26710E-07  9.08736E-07  6.71403E-07  3.91652E-07
 16.600  5.61489E-09  1.10895E-08  1.13037E-08  8.97007E-09  5.67404E-09  3.94196E-07  7.71897E-07  7.62980E-07  5.70174E-07  3.37696E-07
 16.700  4.99969E-09  9.92507E-09  1.02048E-08  8.16354E-09  5.20244E-09  3.25747E-07  6.40078E-07  6.37448E-07  4.81537E-07  2.89351E-07
 16.800  4.41651E-09  8.80575E-09  9.12213E-09  7.35098E-09  4.71965E-09  2.68030E-07  5.28384E-07  5.29952E-07  4.04454E-07  2.46400E-07
 16.900  3.87074E-09  7.74663E-09  8.07777E-09  6.55311E-09  4.23870E-09  2.19585E-07  4.34210E-07  4.38419E-07  3.37869E-07  2.08553E-07
 17.000  3.36619E-09  6.75881E-09  7.08861E-09  5.78632E-09  3.77032E-09  1.79112E-07  3.55201E-07  3.60918E-07  2.80728E-07  1.75465E-07
 17.100  2.90514E-09  5.84970E-09  6.16679E-09  5.06290E-09  3.32298E-09  1.45457E-07  2.89244E-07  2.95664E-07  2.32007E-07  1.46757E-07
 17.200  2.48852E-09  5.02335E-09  5.32014E-09  4.39143E-09  2.90296E-09  1.17603E-07  2.34457E-07  2.41027E-07  1.90728E-07  1.22034E-07
 17.300  2.11603E-09  4.28090E-09  4.55279E-09  3.77720E-09  2.51456E-09  9.46604E-08  1.89178E-07  1.95530E-07  1.55970E-07  1.00893E-07
 17.400  1.78635E-09  3.62109E-09  3.86577E-09  3.22273E-09  2.16033E-09  7.58540E-08  1.51943E-07  1.57852E-07  1.26883E-07  8.29430E-08
 17.500  1.49740E-09  3.04078E-09  3.25762E-09  2.72827E-09  1.84134E-09  6.05120E-08  1.21477E-07  1.26818E-07  1.02687E-07  6.78052E-08
 17.600  1.24651E-09  2.53539E-09  2.72499E-09  2.29227E-09  1.55744E-09  4.80567E-08  9.66735E-08  1.01395E-07  8.26789E-08  5.51240E-08
 17.700  1.03062E-09  2.09936E-09  2.26317E-09  1.91187E-09  1.30752E-09  3.79938E-08  7.65816E-08  8.06797E-08  6.62308E-08  4.45699E-08
 17.800  8.46444E-10  1.72655E-09  1.86654E-09  1.58326E-09  1.08977E-09  2.99031E-08  6.03874E-08  6.38896E-08  5.27870E-08  3.58419E-08
 17.900  6.90642E-10  1.41052E-09  1.52897E-09  1.30206E-09  9.01884E-10  2.34296E-08  4.73997E-08  5.03528E-08  4.18612E-08  2.86691E-08
 18.000  5.59905E-10  1.14486E-09  1.24414E-09  1.06358E-09  7.41269E-10  1.82751E-08  3.70353E-08  3.94962E-08  3.30317E-08  2.28106E-08
 18.100  4.51058E-10  9.23313E-10  1.00581E-09  8.63051E-10  6.05172E-10  1.41906E-08  2.88052E-08  3.08342E-08  2.59358E-08  1.80544E-08
 18.200  3.61122E-10  7.39986E-10  8.07966E-10  6.95819E-10  4.90824E-10  1.09696E-08  2.23021E-08  2.39588E-08  2.02643E-08  1.42159E-08
 18.300  2.87360E-10  5.89422E-10  6.45002E-10  5.57452E-10  3.95527E-10  8.44181E-09  1.71888E-08  1.85295E-08  1.57560E-08  1.11361E-08
 18.400  2.27297E-10  4.66663E-10  5.11764E-10  4.43840E-10  3.16729E-10  6.46750E-09  1.31879E-08  1.42638E-08  1.21914E-08  8.67917E-09
 18.500  1.78730E-10  3.67282E-10  4.03617E-10  3.51241E-10  2.52066E-10  4.93285E-09  1.00726E-08  1.09293E-08  9.38797E-09  6.73029E-09
 18.600  1.39726E-10  2.87382E-10  3.16450E-10  2.76307E-10  1.99390E-10  3.74564E-09  7.65869E-09  8.33578E-09  7.19470E-09  5.19299E-09
 18.700  1.08611E-10  2.23574E-10  2.46672E-10  2.16089E-10  1.56784E-10  2.83156E-09  5.79717E-09  6.32853E-09  5.48772E-09  3.98703E-09
 18.800  8.39506E-11  1.72951E-10  1.91186E-10  1.68023E-10  1.22562E-10  2.13109E-09  4.36853E-09  4.78271E-09  4.16603E-09  3.04612E-09
 18.900  6.45297E-11  1.33047E-10  1.47350E-10  1.29909E-10  9.52592E-11  1.59684E-09  3.27733E-09  3.59807E-09  3.14787E-09  2.31595E-09
 19.000  4.93307E-11  1.01788E-10  1.12939E-10  9.98820E-11  7.36193E-11  1.19128E-09  2.44781E-09  2.69463E-09  2.36750E-09  1.75231E-09
 19.100  3.75084E-11  7.74528E-11  8.60923E-11  7.63738E-11  5.65780E-11  8.84830E-10  1.82018E-09  2.00897E-09  1.77237E-09  1.31951E-09
 19.200  2.83677E-11  5.86211E-11  6.52755E-11  5.80825E-11  4.32425E-11  6.54350E-10  1.34753E-09  1.49108E-09  1.32075E-09  9.88885E-10
 19.300  2.13419E-11  4.41345E-11  4.92302E-11  4.39363E-11  3.28711E-11  4.81804E-10  9.93256E-10  1.10177E-09  9.79728E-10  7.37616E-10
 19.400  1.59730E-11  3.30551E-11  3.69349E-11  3.30604E-11  2.48536E-11  3.53223E-10  7.28932E-10  8.10510E-10  7.23464E-10  5.47620E-10
 19.500  1.18934E-11  2.46299E-11  2.75674E-11  2.47474E-11  1.86924E-11  2.57841E-10  5.32628E-10  5.93618E-10  5.31825E-10  4.04677E-10
 19.600  8.81093E-12  1.82590E-11  2.04709E-11  1.84296E-11  1.39853E-11  1.87408E-10  3.87509E-10  4.32862E-10  3.89200E-10  2.97668E-10
 19.700  6.49468E-12  1.34682E-11  1.51245E-11  1.36550E-11  1.04096E-11  1.35632E-10  2.80716E-10  3.14263E-10  2.83556E-10  2.17954E-10
 19.800  4.76362E-12  9.88506E-12  1.11188E-11  1.00666E-11  7.70873E-12  9.77428E-11  2.02484E-10  2.27169E-10  2.05674E-10  1.58861E-10
 19.900  3.47683E-12  7.21960E-12  8.13374E-12  7.38436E-12  5.67987E-12  7.01394E-11  1.45431E-10  1.63503E-10  1.48527E-10  1.15268E-10
  67 226 200   0.100
  0.000  4.60532E-02 -2.40495E-16 -3.85109E-16 -4.19061E-16  5.14976E-16  1.01664E-01 -4.96507E-16 -8.74301E-16 -6.25463E-16 -2.54627E-15
  0.100  4.60677E-02 -2.61776E-05 -1.53771E-08 -4.61395E-12 -2.10282E-15  1.01658E-01 -1.28039E-05 -1.98670E-08  6.27618E-12  2.52624E-14
  0.200  4.61111E-02 -1.03650E-04 -2.44258E-07 -2.93145E-10 -2.66250E-13  1.01640E-01 -4.98397E-05 -3.14143E-07  3.99794E-10 -4.17703E-14
  0.300  4.61827E-02 -2.29270E-04 -1.22169E-06 -3.29790E-09 -6.78465E-12  1.01610E-01 -1.07083E-04 -1.55922E-06  4.48195E-09  2.87958E-13
  0.400  4.62815E-02 -3.97907E-04 -3.79622E-06 -1.82105E-08 -6.65625E-11  1.01570E-01 -1.78165E-04 -4.79230E-06  2.46274E-08  4.73104E-12
  0.500  4.64063E-02 -6.02617E-04 -9.06758E-06 -6.79324E-08 -3.87680E-10  1.01522E-01 -2.54858E-04 -1.12833E-05  9.13094E-08  3.82512E-11
  0.600  4.65551E-02 -8.34874E-04 -1.83047E-05 -1.97382E-07 -1.62058E-09  1.01466E-01 -3.27716E-04 -2.23690E-05  2.63396E-07  2.14777E-10
  0.700  4.67260E-02 -1.08486E-03 -3.28484E-05 -4.81923E-07 -5.38020E-09  1.01405E-01 -3.86816E-04 -3.92637E-05  6.37881E-07  9.29725E-10
  0.800  4.69164E-02 -1.34180E-03 -5.40046E-05 -1.03459E-06 -1.50698E-08  1.01339E-01 -4.22575E-04 -6.28608E-05  1.35728E-06  3.30748E-09
  0.900  4.71236E-02 -1.59434E-03 -8.29347E-05 -2.01081E-06 -3.70286E-08  1.01272E-01 -4.26556E-04 -9.35450E-05  2.61333E-06  1.00963E-08
  1.000  4.73445E-02 -1.83099E-03 -1.20548E-04 -3.60956E-06 -8.19726E-08  1.01204E-01 -3.92239E-04 -1.31034E-04  4.64615E-06  2.72480E-08
  1.100  4.75759E-02 -2.04050E-03 -1.67405E-04 -6.07013E-06 -1.66635E-07  1.01138E-01 -3.15665E-04 -1.74270E-04  7.73886E-06  6.64443E-08
  1.200  4.78144E-02 -2.21231E-03 -2.23637E-04 -9.66415E-06 -3.15458E-07  1.01074E-01 -1.95931E-04 -2.21368E-04  1.22081E-05  1.48798E-07
  1.300  4.80563E-02 -2.33701E-03 -2.88879E-04 -1.46830E-05 -5.62146E-07  1.01014E-01 -3.54656E-05 -2.69658E-04  1.83915E-05  3.09858E-07
  1.400  4.82982E-02 -2.40665E-03 -3.62241E-04 -2.14207E-05 -9.50853E-07  1.00960E-01  1.59927E-04 -3.15792E-04  2.66337E-05  6.05881E-07
  1.500  4.85364E-02 -2.41515E-03 -4.42294E-04 -3.01545E-05 -1.53681E-06  1.00913E-01  3.81291E-04 -3.55950E-04  3.72709E-05  1.12109E-06
  1.600  4.87675E-02 -2.35857E-03 -5.27090E-04 -4.11218E-05 -2.38619E-06  1.00875E-01  6.16989E-04 -3.86119E-04  5.06167E-05  1.97532E-06
  1.700  4.89883E-02 -2.23530E-03 -6.14210E-04 -5.44982E-05 -3.57511E-06  1.00847E-01  8.53416E-04 -4.02431E-04  6.69465E-05  3.33124E-06
  1.800  4.91958E-02 -2.04619E-03 -7.00842E-04 -7.03751E-05 -5.18772E-06  1.00831E-01  1.07591E-03 -4.01532E-04  8.64827E-05  5.39979E-06
  1.900  4.93874E-02 -1.79460E-03 -7.83878E-04 -8.87402E-05 -7.31340E-06  1.00830E-01  1.26977E-03 -3.80967E-04  1.09377E-04  8.44263E-06
  2.000  4.95608E-02 -1.48631E-03 -8.60037E-04 -1.09461E-04 -1.00432E-05  1.00844E-01  1.42141E-03 -3.39517E-04  1.35691E-04  1.27699E-05
  2.100  4.97145E-02 -1.12938E-03 -9.26000E-04 -1.32276E-04 -1.34659E-05  1.00874E-01  1.51940E-03 -2.77479E-04  1.65369E-04  1.87321E-05
  2.200  4.98473E-02 -7.33861E-04 -9.78558E-04 -1.56782E-04 -1.76633E-05  1.00921E-01  1.55547E-03 -1.96831E-04  1.98211E-04  2.67040E-05
  2.300  4.99586E-02 -3.11451E-04 -1.01476E-03 -1.82441E-04 -2.27060E-05  1.00985E-01  1.52530E-03 -1.01275E-04  2.33837E-04  3.70621E-05
  2.400  5.00486E-02  1.24912E-04 -1.03206E-03 -2.08583E-04 -2.86492E-05  1.01065E-01  1.42903E-03  3.88004E-06  2.71650E-04  5.01526E-05
  2.500  5.01181E-02  5.61543E-04 -1.02845E-03 -2.34415E-04 -3.55286E-05  1.01159E-01  1.27152E-03  1.11991E-04  3.10805E-04  6.62532E-05
  2.600  5.01683E-02  9.84542E-04 -1.00261E-03 -2.59039E-04 -4.33572E-05  1.01264E-01  1.06215E-03  2.15494E-04  3.50186E-04  8.55308E-05
  2.700  5.02012E-02  1.38033E-03 -9.53982E-04 -2.81476E-04 -5.21228E-05  1.01376E-01  8.14406E-04  3.06450E-04  3.88390E-04  1.07995E-04
  2.800  5.02191E-02  1.73621E-03 -8.82863E-04 -3.00689E-04 -6.17855E-05  1.01491E-01  5.45028E-04  3.77159E-04  4.23750E-04  1.33457E-04
  2.900  5.02249E-02  2.04089E-03 -7.90458E-04 -3.15615E-04 -7.22763E-05  1.01603E-01  2.72942E-04  4.20818E-04  4.54371E-04  1.61491E-04
  3.000  5.02217E-02  2.28494E-03 -6.78889E-04 -3.25201E-04 -8.34955E-05  1.01707E-01  1.79890E-05  4.32143E-04  4.78210E-04  1.91411E-04
  3.100  5.02127E-02  2.46128E-03 -5.51187E-04 -3.28437E-04 -9.53121E-05  1.01797E-01 -2.00441E-04  4.07901E-04  4.93190E-04  2.22260E-04
  3.200  5.02009E-02  2.56548E-03 -4.11232E-04 -3.24402E-04 -1.07562E-04  1.01866E-01 -3.64761E-04  3.47304E-04  4.97338E-04  2.52825E-04
  3.300  5.01892E-02  2.59602E-03 -2.63662E-04 -3.12304E-04 -1.20048E-04  1.01910E-01 -4.60418E-04  2.52204E-04  4.88959E-04  2.81668E-04
  3.400  5.01801E-02  2.55446E-03 -1.13750E-04 -2.91521E-04 -1.32539E-04  1.01922E-01 -4.76887E-04  1.27075E-04  4.66807E-04  3.07188E-04
  3.500  5.01753E-02  2.44548E-03  3.27640E-05 -2.61652E-04 -1.44768E-04  1.01900E-01 -4.08365E-04 -2.12486E-05  4.30270E-04  3.27701E-04
  3.600  5.01756E-02  2.27679E-03  1.69857E-04 -2.22555E-04 -1.56434E-04  1.01838E-01 -2.54085E-04 -1.84042E-04  3.79509E-04  3.41545E-04
  3.700  5.01808E-02  2.05896E-03  2.91445E-04 -1.74386E-04 -1.67207E-04  1.01735E-01 -1.82285E-05 -3.51356E-04  3.15574E-04  3.47193E-04
  3.800  5.01895E-02  1.80511E-03  3.91619E-04 -1.17635E-04 -1.76723E-04  1.01586E-01  2.90561E-04 -5.12822E-04  2.40449E-04  3.43377E-04
  3.900  5.01989E-02  1.53051E-03  4.64888E-04 -5.31511E-05 -1.84600E-04  1.01391E-01  6.60018E-04 -6.58508E-04  1.57021E-04  3.29208E-04
  4.000  5.02048E-02  1.25207E-03  5.06431E-04  1.78462E-05 -1.90440E-04  1.01147E-01  1.07540E-03 -7.79790E-04  6.89747E-05  3.04276E-04
  4.100  5.02016E-02  9.87772E-04  5.12335E-04  9.37638E-05 -1.93846E-04  1.00851E-01  1.52080E-03 -8.70112E-04 -1.94026E-05  2.68738E-04
  4.200  5.01820E-02  7.56025E-04  4.79812E-04  1.72654E-04 -1.94433E-04  1.00499E-01  1.98059E-03 -9.25603E-04 -1.03487E-04  2.23361E-04
  4.300  5.01379E-02  5.74972E-04  4.07391E-04  2.52252E-04 -1.91851E-04  1.00089E-01  2.44081E-03 -9.45463E-04 -1.78644E-04  1.69531E-04
  4.400  5.00595E-02  4.61799E-04  2.95058E-04  3.30026E-04 -1.85808E-04  9.96143E-02  2.89037E-03 -9.32097E-04 -2.40581E-04  1.09218E-04
  4.500  4.99366E-02  4.32043E-04  1.44350E-04  4.03260E-04 -1.76086E-04  9.90699E-02  3.32210E-03 -8.90963E-04 -2.85713E-04  4.48958E-05
  4.600  4.97581E-02  4.98931E-04 -4.16198E-05  4.69146E-04 -1.62572E-04  9.84486E-02  3.73333E-03 -8.30158E-04 -3.11492E-04 -2.05842E-05
  4.700  4.95126E-02  6.72789E-04 -2.58199E-04  5.24890E-04 -1.45275E-04  9.77425E-02  4.12625E-03 -7.59767E-04 -3.16674E-04 -8.41461E-05
  4.800  4.91891E-02  9.60538E-04 -4.99308E-04  5.67842E-04 -1.24347E-04  9.69430E-02  4.50768E-03 -6.91022E-04 -3.01510E-04 -1.42671E-04
  4.900  4.87767E-02  1.36530E-03 -7.57627E-04  5.95614E-04 -1.00093E-04  9.60411E-02  4.88858E-03 -6.35366E-04 -2.67804E-04 -1.93189E-04
  5.000  4.82657E-02  1.88613E-03 -1.02484E-03  6.06213E-04 -7.29755E-05  9.50275E-02  5.28311E-03 -6.03477E-04 -2.18874E-04 -2.33064E-04
  5.100  4.76473E-02  2.51793E-03 -1.29196E-03  5.98155E-04 -4.36151E-05  9.38936E-02  5.70748E-03 -6.04351E-04 -1.59368E-04 -2.60166E-04
  5.200  4.69147E-02  3.25150E-03 -1.54966E-03  5.70567E-04 -1.27730E-05  9.26311E-02  6.17852E-03 -6.44520E-04 -9.49814E-05 -2.73008E-04
  5.300  4.60625E-02  4.07374E-03 -1.78868E-03  5.23263E-04  1.86710E-05  9.12329E-02  6.71223E-03 -7.27468E-04 -3.20727E-05 -2.70839E-04
  5.400  4.50879E-02  4.96801E-03 -2.00022E-03  4.56788E-04  4.97511E-05  8.96931E-02  7.32231E-03 -8.53293E-04  2.27786E-05 -2.53695E-04
  5.500  4.39899E-02  5.91473E-03 -2.17633E-03  3.72433E-04  7.94567E-05  8.80077E-02  8.01883E-03 -1.01865E-03  6.32430E-05 -2.22386E-04
  5.600  4.27702E-02  6.89195E-03 -2.31026E-03  2.72207E-04  1.06779E-04  8.61741E-02  8.80714E-03 -1.21693E-03  8.37014E-05 -1.78441E-04
  5.700  4.14328E-02  7.87617E-03 -2.39680E-03  1.58769E-04  1.30761E-04  8.41919E-02  9.68709E-03 -1.43879E-03  7.96561E-05 -1.23998E-04
  5.800  3.99839E-02  8.84312E-03 -2.43245E-03  3.53316E-05  1.50547E-04  8.20627E-02  1.06526E-02 -1.67272E-03  4.80607E-05 -6.16644E-05
  5.900  3.84319E-02  9.76866E-03 -2.41567E-03 -9.44755E-05  1.65430E-04  7.97901E-02  1.16915E-02 -1.90597E-03 -1.24575E-05  5.65296E-06
  6.000  3.67873E-02  1.06296E-02 -2.34688E-03 -2.26759E-04  1.74890E-04  7.73795E-02  1.27861E-02 -2.12535E-03 -1.01498E-04  7.49310E-05
  6.100  3.50621E-02  1.14047E-02 -2.22843E-03 -3.57533E-04  1.78626E-04  7.48384E-02  1.39137E-02 -2.31821E-03 -2.16917E-04  1.43209E-04
  6.200  3.32700E-02  1.20751E-02 -2.06452E-03 -4.82900E-04  1.76571E-04  7.21760E-02  1.50478E-02 -2.47324E-03 -3.54979E-04  2.07753E-04
  6.300  3.14256E-02  1.26250E-02 -1.86094E-03 -5.99218E-04  1.68901E-04  6.94033E-02  1.61591E-02 -2.58124E-03 -5.10617E-04  2.66198E-04
  6.400  2.95442E-02  1.30426E-02 -1.62478E-03 -7.03258E-04  1.56019E-04  6.65326E-02  1.72171E-02 -2.63558E-03 -6.77773E-04  3.16651E-04
  6.500  2.76417E-02  1.33198E-02 -1.36412E-03 -7.92339E-04  1.38542E-04  6.35779E-02  1.81918E-02 -2.63263E-03 -8.49796E-04  3.57758E-04
  6.600  2.57340E-02  1.34528E-02 -1.08762E-03 -8.64425E-04  1.17257E-04  6.05541E-02  1.90544E-02 -2.57182E-03 -1.01986E-03  3.88731E-04
  6.700  2.38365E-02  1.34418E-02 -8.04118E-04 -9.18190E-04  9.30856E-05  5.74775E-02  1.97795E-02 -2.45558E-03 -1.18137E-03  4.09337E-04
  6.800  2.19644E-02  1.32912E-02 -5.22249E-04 -9.53043E-04  6.70288E-05  5.43649E-02  2.03458E-02 -2.28903E-03 -1.32833E-03  4.19848E-04
  6.900  2.01317E-02  1.30089E-02 -2.50082E-04 -9.69114E-04  4.01170E-05  5.12342E-02  2.07370E-02 -2.07956E-03 -1.45566E-03  4.20970E-04
  7.000  1.83514E-02  1.26059E-02  5.19286E-06 -9.67203E-04  1.33572E-05  4.81035E-02  2.09424E-02 -1.83624E-03 -1.55938E-03  4.13753E-04
  7.100  1.66354E-02  1.20961E-02  2.37517E-04 -9.48699E-04 -1.23146E-05  4.49910E-02  2.09573E-02 -1.56920E-03 -1.63680E-03  3.99485E-04
  7.200  1.49937E-02  1.14951E-02  4.42138E-04 -9.15473E-04 -3.60752E-05  4.19149E-02  2.07832E-02 -1.28901E-03 -1.68653E-03  3.79591E-04
  7.300  1.34351E-02  1.08200E-02  6.15712E-04 -8.69757E-04 -5.72459E-05  3.88932E-02  2.04268E-02 -1.00604E-03 -1.70844E-03  3.55534E-04
  7.400  1.19666E-02  1.00888E-02  7.56321E-04 -8.14016E-04 -7.53141E-05  3.59429E-02  1.99003E-02 -7.29898E-04 -1.70358E-03  3.28733E-04
  7.500  1.05933E-02  9.31908E-03  8.63429E-04 -7.50811E-04 -8.99443E-05  3.30800E-02  1.92201E-02 -4.69045E-04 -1.67395E-03  3.00490E-04
  7.600  9.31891E-03  8.52824E-03  9.37763E-04 -6.82686E-04 -1.00978E-04  3.03194E-02  1.84061E-02 -2.30415E-04 -1.62235E-03  2.71944E-04
  7.700  8.14533E-03  7.73243E-03  9.81148E-04 -6.12053E-04 -1.08421E-04  2.76743E-02  1.74807E-02 -1.92407E-05 -1.55211E-03  2.44035E-04
  7.800  7.07294E-03  6.94634E-03  9.96308E-04 -5.41105E-04 -1.12431E-04  2.51559E-02  1.64677E-02  1.61024E-04 -1.46689E-03  2.17494E-04
  7.900  6.10065E-03  6.18284E-03  9.86639E-04 -4.71751E-04 -1.13286E-04  2.27736E-02  1.53913E-02  3.08660E-04 -1.37043E-03  1.92847E-04
  8.000  5.22609E-03  5.45275E-03  9.55981E-04 -4.05570E-04 -1.11361E-04  2.05347E-02  1.42755E-02  4.23542E-04 -1.26640E-03  1.70424E-04
  8.100  4.44571E-03  4.76475E-03  9.08392E-04 -3.43789E-04 -1.07093E-04  1.84439E-02  1.31428E-02  5.06923E-04 -1.15819E-03  1.50389E-04
  8.200  3.75503E-03  4.12535E-03  8.47943E-04 -2.87286E-04 -1.00956E-04  1.65040E-02  1.20139E-02  5.61175E-04 -1.04885E-03  1.32768E-04
  8.300  3.14875E-03  3.53894E-03  7.78544E-04 -2.36606E-04 -9.34280E-05  1.47156E-02  1.09071E-02  5.89494E-04 -9.40971E-04  1.17476E-04
  8.400  2.62101E-03  3.00797E-03  7.03796E-04 -1.91991E-04 -8.49723E-05  1.30771E-02  9.83798E-03  5.95608E-04 -8.36669E-04  1.04358E-04
  8.500  2.16550E-03  2.53316E-03  6.26886E-04 -1.53428E-04 -7.60133E-05  1.15853E-02  8.81922E-03  5.83507E-04 -7.37571E-04  9.32055E-05
  8.600  1.77572E-03  2.11367E-03  5.50518E-04 -1.20689E-04 -6.69244E-05  1.02351E-02  7.86053E-03  5.57198E-04 -6.44843E-04  8.37914E-05
  8.700  1.44508E-03  1.74744E-03  4.76881E-04 -9.33895E-05 -5.80181E-05  9.02007E-03  6.96878E-03  5.20502E-04 -5.59230E-04  7.58829E-05
  8.800  1.16707E-03  1.43143E-03  4.07642E-04 -7.10309E-05 -4.95422E-05  7.93284E-03  6.14821E-03  4.76907E-04 -4.81112E-04  6.92583E-05
  8.900  9.35391E-04  1.16188E-03  3.43979E-04 -5.30498E-05 -4.16798E-05  6.96504E-03  5.40069E-03  4.29458E-04 -4.10572E-04  6.37158E-05
  9.000  7.44052E-04  9.34556E-04  2.86617E-04 -3.88557E-05 -3.45527E-05  6.10778E-03  4.72605E-03  3.80701E-04 -3.47458E-04  5.90792E-05
  9.100  5.87454E-04  7.44992E-04  2.35892E-04 -2.78636E-05 -2.82280E-05  5.35189E-03  4.12246E-03  3.32668E-04 -2.91446E-04  5.51988E-05
  9.200  4.60448E-04  5.88666E-04  1.91817E-04 -1.95188E-05 -2.27263E-05  4.68810E-03  3.58674E-03  2.86887E-04 -2.42094E-04  5.19509E-05
  9.300  3.58371E-04  4.61159E-04  1.54153E-04 -1.33146E-05 -1.80305E-05  4.10730E-03  3.11475E-03  2.44426E-04 -1.98892E-04  4.92352E-05
  9.400  2.77067E-04  3.58282E-04  1.22475E-04 -8.80296E-06 -1.40952E-05  3.60067E-03  2.70168E-03  2.05951E-04 -1.61299E-04  4.69703E-05
  9.500  2.12882E-04  2.76158E-04  9.62343E-05 -5.59939E-06 -1.08552E-05  3.15984E-03  2.34233E-03  1.71791E-04 -1.28770E-04  4.50901E-05
  9.600  1.62648E-04  2.11283E-04  7.48135E-05 -3.38342E-06 -8.23372E-06  2.77699E-03  2.03138E-03  1.42006E-04 -1.00782E-04  4.35396E-05
  9.700  1.23662E-04  1.60553E-04  5.75724E-05 -1.89507E-06 -6.14854E-06  2.44488E-03  1.76352E-03  1.16460E-04 -7.68419E-05  4.22708E-05
  9.800  9.36468E-05  1.21272E-04  4.38824E-05 -9.29234E-07 -4.51773E-06  2.15696E-03  1.53367E-03  9.48768E-05 -5.64965E-05  4.12403E-05
  9.900  7.07092E-05  9.11418E-05  3.31522E-05 -3.28458E-07 -3.26344E-06  1.90729E-03  1.33703E-03  7.68934E-05 -3.93353E-05  4.04066E-05
 10.000  5.32987E-05  6.82333E-05  2.48453E-05  2.47265E-08 -2.31463E-06  1.69061E-03  1.16917E-03  6.21050E-05 -2.49896E-05  3.97290E-05
 10.100  4.01612E-05  5.09574E-05  1.84888E-05  2.15412E-07 -1.60866E-06  1.50229E-03  1.02607E-03  5.00962E-05 -1.31299E-05  3.91668E-05
 10.200  3.02958E-05  3.80240E-05  1.36776E-05  3.03352E-07 -1.09198E-06  1.33827E-03  9.04158E-04  4.04655E-05 -3.46185E-06  3.86792E-05
 10.300  2.29143E-05  2.84021E-05  1.00723E-05  3.29141E-07 -7.20069E-07  1.19503E-03  8.00244E-04  3.28407E-05  4.27782E-06  3.82258E-05
 10.400  1.74030E-05  2.12796E-05  7.39493E-06  3.19383E-07 -4.56871E-07  1.06956E-03  7.11562E-04  2.68884E-05  1.03259E-05  3.77673E-05
 10.500  1.32904E-05  1.60257E-05  5.42270E-06  2.90849E-07 -2.73930E-07  9.59264E-04  6.35713E-04  2.23176E-05  1.48968E-05  3.72672E-05
 10.600  1.02178E-05  1.21569E-05  3.98000E-06  2.53670E-07 -1.49310E-07  8.61955E-04  5.70642E-04  1.88799E-05  1.81857E-05  3.66919E-05
 10.700  7.91515E-06  9.30677E-06  2.93085E-06  2.13690E-07 -6.64914E-08  7.75773E-04  5.14597E-04  1.63671E-05  2.03719E-05  3.60129E-05
 10.800  6.18117E-06  7.20125E-06  2.17151E-06  1.74120E-07 -1.32920E-08  6.99155E-04  4.66099E-04  1.46073E-05  2.16205E-05  3.52072E-05
 10.900  4.86676E-06  5.63706E-06  1.62384E-06  1.36646E-07  1.91009E-08  6.30787E-04  4.23904E-04  1.34597E-05  2.20844E-05  3.42582E-05
 11.000  3.86221E-06  4.46493E-06  1.22962E-06  1.02117E-07  3.69700E-08  5.69568E-04  3.86973E-04  1.28105E-05  2.19049E-05  3.31563E-05
 11.100  3.08718E-06  3.57613E-06  9.45830E-07  7.09638E-08  4.47562E-08  5.14577E-04  3.54443E-04  1.25674E-05  2.12129E-05  3.18991E-05
 11.200  2.48294E-06  2.89208E-06  7.40927E-07  4.34088E-08  4.56013E-08  4.65041E-04  3.25601E-04  1.26559E-05  2.01284E-05  3.04911E-05
 11.300  2.00665E-06  2.35634E-06  5.91887E-07  1.95695E-08  4.17556E-08  4.20316E-04  2.99862E-04  1.30151E-05  1.87610E-05  2.89437E-05
 11.400  1.62704E-06  1.92873E-06  4.82021E-07 -5.05958E-10  3.48717E-08  3.79858E-04  2.76744E-04  1.35950E-05  1.72094E-05  2.72737E-05
 11.500  1.32128E-06  1.58085E-06  3.99324E-07 -1.68330E-08  2.62033E-08  3.43209E-04  2.55857E-04  1.43536E-05  1.55614E-05  2.55033E-05
 11.600  1.07267E-06  1.29285E-06  3.35266E-07 -2.94957E-08  1.67319E-08  3.09979E-04  2.36884E-04  1.52546E-05  1.38934E-05  2.36580E-05
 11.700  8.68970E-07  1.05099E-06  2.83896E-07 -3.86507E-08  7.24165E-09  2.79834E-04  2.19565E-04  1.62662E-05  1.22704E-05  2.17662E-05
 11.800  7.01181E-07  8.45853E-07  2.41182E-07 -4.45276E-08 -1.64225E-09  2.52486E-04  2.03691E-04  1.73595E-05  1.07459E-05  1.98575E-05
 11.900  5.62634E-07  6.71061E-07  2.04501E-07 -4.74234E-08 -9.43571E-09  2.27683E-04  1.89092E-04  1.85078E-05  9.36231E-06  1.79616E-05
 12.000  4.48334E-07  5.22265E-07  1.72248E-07 -4.76933E-08 -1.57893E-08  2.05202E-04  1.75629E-04  1.96856E-05  8.15074E-06  1.61071E-05
 12.100  3.54462E-07  3.96425E-07  1.43523E-07 -4.57384E-08 -2.04848E-08  1.84842E-04  1.63185E-04  2.08688E-05  7.13215E-06  1.43205E-05
 12.200  2.78012E-07  2.91280E-07  1.17887E-07 -4.19913E-08 -2.34304E-08  1.66423E-04  1.51665E-04  2.20345E-05  6.31780E-06  1.26256E-05
 12.300  2.16526E-07  2.04972E-07  9.51653E-08 -3.69013E-08 -2.46515E-08  1.49779E-04  1.40986E-04  2.31604E-05  5.71031E-06  1.10424E-05
 12.400  1.67906E-07  1.35795E-07  7.53055E-08 -3.09190E-08 -2.42768E-08  1.34758E-04  1.31076E-04  2.42259E-05  5.30466E-06  9.58724E-06
 12.500  1.30288E-07  8.20466E-08  5.82718E-08 -2.44803E-08 -2.25186E-08  1.21219E-04  1.21874E-04  2.52116E-05  5.08940E-06  8.27204E-06
 12.600  1.01971E-07  4.19531E-08  4.39830E-08 -1.79915E-08 -1.96511E-08  1.09029E-04  1.13322E-04  2.61001E-05  5.04789E-06  7.10457E-06
 12.700  8.13736E-08  1.36624E-08  3.22798E-08 -1.18154E-08 -1.59856E-08  9.80662E-05  1.05368E-04  2.68760E-05  5.15947E-06  6.08841E-06
 12.800  6.70255E-08 -4.72766E-09  2.29211E-08 -6.25800E-09 -1.18460E-08  8.82163E-05  9.79673E-05  2.75261E-05  5.40072E-06  5.22323E-06
 12.900  5.75722E-08 -1.51135E-08  1.55972E-08 -1.55916E-09 -7.54616E-09  7.93729E-05  9.10748E-05  2.80399E-05  5.74655E-06  4.50517E-06
 13.000  5.17893E-08 -1.93202E-08  9.95609E-09  2.11469E-09 -3.37022E-09  7.14372E-05  8.46505E-05  2.84096E-05  6.17122E-06  3.92721E-06
 13.100  4.85996E-08 -1.90366E-08  5.63481E-09  4.67348E-09  4.42622E-10  6.43180E-05  7.86572E-05  2.86300E-05  6.64926E-06  3.47976E-06
 13.200  4.70872E-08 -1.57606E-08  2.28940E-09  6.10242E-09  3.70866E-09  5.79313E-05  7.30601E-05  2.86989E-05  7.15622E-06  3.15108E-06
 13.300  4.65053E-08 -1.07594E-08 -3.79424E-10  6.45672E-09  6.30493E-09  5.22003E-05  6.78275E-05  2.86164E-05  7.66933E-06  2.92790E-06
 13.400  4.62770E-08 -5.04856E-09 -2.60854E-09  5.85250E-09  8.16967E-09  4.70549E-05  6.29304E-05  2.83856E-05  8.16794E-06  2.79589E-06
 13.500  4.59874E-08  6.11580E-10 -4.56350E-09  4.45453E-09  9.29839E-09  4.24316E-05  5.83422E-05  2.80114E-05  8.63393E-06  2.74022E-06
 13.600  4.53692E-08  5.70224E-09 -6.33820E-09  2.46177E-09  9.73648E-09  3.82732E-05  5.40390E-05  2.75011E-05  9.05194E-06  2.74595E-06
 13.700  4.42817E-08  9.92006E-09 -7.96205E-09  9.18663E-11  9.56924E-09  3.45283E-05  4.99994E-05  2.68636E-05  9.40947E-06  2.79852E-06
 13.800  4.26876E-08  1.31416E-08 -9.41270E-09 -2.43436E-09  8.91055E-09  3.11514E-05  4.62041E-05  2.61096E-05  9.69690E-06  2.88407E-06
 13.900  4.06269E-08  1.53832E-08 -1.06320E-08 -4.90726E-09  7.89103E-09  2.81018E-05  4.26364E-05  2.52506E-05  9.90750E-06  2.98977E-06
 14.000  3.81923E-08  1.67596E-08 -1.15434E-08 -7.14060E-09  6.64672E-09  2.53435E-05  3.92812E-05  2.42995E-05  1.00372E-05  3.10404E-06
 14.100  3.55060E-08  1.74449E-08 -1.20678E-08 -8.98111E-09  5.30898E-09  2.28452E-05  3.61256E-05  2.32693E-05  1.00846E-05  3.21675E-06
 14.200  3.27002E-08  1.76391E-08 -1.21378E-08 -1.03149E-08  3.99621E-09  2.05790E-05  3.31582E-05  2.21740E-05  1.00504E-05  3.31934E-06
 14.300  2.99016E-08  1.75401E-08 -1.17084E-08 -1.10703E-08  2.80768E-09  1.85209E-05  3.03692E-05  2.10271E-05  9.93744E-06  3.40486E-06
 14.400  2.72201E-08  1.73235E-08 -1.07629E-08 -1.12184E-08  1.81956E-09  1.66498E-05  2.77499E-05  1.98425E-05  9.75040E-06  3.46798E-06
 14.500  2.47415E-08  1.71295E-08 -9.31612E-09 -1.07693E-08  1.08321E-09  1.49474E-05  2.52929E-05  1.86334E-05  9.49530E-06  3.50496E-06
 14.600  2.25247E-08  1.70566E-08 -7.41313E-09 -9.76813E-09  6.25411E-10  1.33976E-05  2.29915E-05  1.74127E-05  9.17933E-06  3.51355E-06
 14.700  2.06014E-08  1.71605E-08 -5.12547E-09 -8.28745E-09  4.50221E-10  1.19865E-05  2.08399E-05  1.61926E-05  8.81052E-06  3.49284E-06
 14.800  1.89784E-08  1.74575E-08 -2.54514E-09 -6.42030E-09  5.42102E-10  1.07021E-05  1.88325E-05  1.49843E-05  8.39744E-06  3.44316E-06
 14.900  1.76419E-08  1.79313E-08  2.22630E-10 -4.27203E-09  8.69866E-10  9.53355E-06  1.69645E-05  1.37981E-05  7.94892E-06  3.36583E-06
 15.000  1.65620E-08  1.85405E-08  3.06694E-09 -1.95280E-09  1.39104E-09  8.47149E-06  1.52309E-05  1.26432E-05  7.47379E-06  3.26305E-06
 15.100  1.56983E-08  1.92280E-08  5.87858E-09  4.29310E-10  2.05626E-09  7.50750E-06  1.36270E-05  1.15278E-05  6.98066E-06  3.13765E-06
 15.200  1.50048E-08  1.99290E-08  8.55637E-09  2.77404E-09  2.81343E-09  6.63403E-06  1.21481E-05  1.04587E-05  6.47771E-06  2.99294E-06
 15.300  1.44344E-08  2.05785E-08  1.10123E-08  4.99341E-09  3.61136E-09  5.84423E-06  1.07893E-05  9.44160E-06  5.97255E-06  2.83250E-06
 15.400  1.39424E-08  2.11174E-08  1.31752E-08  7.01481E-09  4.40273E-09  5.13182E-06  9.54567E-06  8.48088E-06  5.47206E-06  2.66006E-06
 15.500  1.34894E-08  2.14964E-08  1.49927E-08  8.78272E-09  5.14634E-09  4.49099E-06  8.41203E-06  7.57980E-06  4.98232E-06  2.47930E-06
 15.600  1.30429E-08  2.16794E-08  1.64322E-08  1.02592E-08  5.80860E-09  3.91629E-06  7.38302E-06  6.74050E-06  4.50856E-06  2.29377E-06
 15.700  1.25780E-08  2.16438E-08  1.74796E-08  1.14232E-08  6.36427E-09  3.40261E-06  6.45308E-06  5.96401E-06  4.05509E-06  2.10679E-06
 15.800  1.20779E-08  2.13814E-08  1.81384E-08  1.22693E-08  6.79660E-09  2.94511E-06  5.61647E-06  5.25041E-06  3.62536E-06  1.92133E-06
 15.900  1.15335E-08  2.08962E-08  1.84266E-08  1.28056E-08  7.09692E-09  2.53919E-06  4.86735E-06  4.59891E-06  3.22195E-06  1.74001E-06
 16.000  1.09419E-08  2.02034E-08  1.83743E-08  1.30510E-08  7.26386E-09  2.18047E-06  4.19978E-06  4.00794E-06  2.84663E-06  1.56505E-06
 16.100  1.03058E-08  1.93264E-08  1.80203E-08  1.30332E-08  7.30222E-09  1.86479E-06  3.60778E-06  3.47529E-06  2.50042E-06  1.39826E-06
 16.200  9.63218E-09  1.82949E-08  1.74093E-08  1.27856E-08  7.22176E-09  1.58816E-06  3.08539E-06  2.99824E-06  2.18369E-06  1.24102E-06
 16.300  8.93074E-09  1.71421E-08  1.65888E-08  1.23448E-08  7.03593E-09  1.34685E-06  2.62676E-06  2.57364E-06  1.89623E-06  1.09433E-06
 16.400  8.21290E-09  1.59026E-08  1.56066E-08  1.17489E-08  6.76057E-09  1.13731E-06  2.22614E-06  2.19805E-06  1.63732E-06  9.58841E-07
 16.500  7.49068E-09  1.46103E-08  1.45091E-08  1.10353E-08  6.41276E-09  9.56188E-07  1.87799E-06  1.86785E-06  1.40587E-06  8.34862E-07
 16.600  6.77583E-09  1.32974E-08  1.33390E-08  1.02395E-08  6.00987E-09  8.00384E-07  1.57700E-06  1.57929E-06  1.20045E-06  7.22429E-07
 16.700  6.07918E-09  1.19923E-08  1.21348E-08  9.39362E-09  5.56867E-09  6.66999E-07  1.31813E-06  1.32863E-06  1.01942E-06  6.21339E-07
 16.800  5.41015E-09  1.07200E-08  1.09295E-08  8.52609E-09  5.10473E-09  5.53364E-07  1.09664E-06  1.11217E-06  8.60987E-07  5.31192E-07
 16.900  4.77648E-09  9.50052E-09  9.75066E-09  7.66102E-09  4.63195E-09  4.57028E-07  9.08133E-07  9.26356E-07  7.23254E-07  4.51442E-07
 17.000  4.18407E-09  8.34977E-09  8.62013E-09  6.81814E-09  4.16230E-09  3.75761E-07  7.48525E-07  7.67759E-07  6.04308E-07  3.81428E-07
 17.100  3.63703E-09  7.27910E-09  7.55444E-09  6.01286E-09  3.70565E-09  3.07546E-07  6.14093E-07  6.33173E-07  5.02248E-07  3.20418E-07
 17.200  3.13774E-09  6.29585E-09  6.56513E-09  5.25657E-09  3.26981E-09  2.50573E-07  5.01454E-07  5.19611E-07  4.15230E-07  2.67638E-07
 17.300  2.68704E-09  5.40378E-09  5.65936E-09  4.55703E-09  2.86060E-09  2.03225E-07  4.07567E-07  4.24328E-07  3.41500E-07  2.22298E-07
 17.400  2.28448E-09  4.60356E-09  4.84052E-09  3.91881E-09  2.48199E-09  1.64074E-07  3.29715E-07  3.44828E-07  2.79410E-07  1.83615E-07
 17.500  1.92850E-09  3.89338E-09  4.10889E-09  3.34380E-09  2.13636E-09  1.31862E-07  2.65494E-07  2.78862E-07  2.27436E-07  1.50832E-07
 17.600  1.61673E-09  3.26943E-09  3.46228E-09  2.83172E-09  1.82468E-09  1.05492E-07  2.12788E-07  2.24425E-07  1.84188E-07  1.23231E-07
 17.700  1.34616E-09  2.72649E-09  2.89664E-09  2.38058E-09  1.54683E-09  8.40110E-08  1.69756E-07  1.79747E-07  1.48411E-07  1.00141E-07
 17.800  1.11343E-09  2.25834E-09  2.40661E-09  1.98715E-09  1.30176E-09  6.66001E-08  1.34800E-07  1.43274E-07  1.18984E-07  8.09465E-08
 17.900  9.14936E-10  1.85822E-09  1.98595E-09  1.64730E-09  1.08777E-09  5.25580E-08  1.06549E-07  1.13659E-07  9.49183E-08  6.50875E-08
 18.000  7.47023E-10  1.51909E-09  1.62801E-09  1.35640E-09  9.02691E-10  4.12888E-08  8.38312E-08  8.97379E-08  7.53464E-08  5.20637E-08
 18.100  6.06103E-10  1.23398E-09  1.32598E-09  1.10955E-09  7.44066E-10  3.22893E-08  6.56555E-08  7.05177E-08  5.95173E-08  4.14318E-08
 18.200  4.88739E-10  9.96159E-10  1.07316E-09  9.01812E-10  6.09286E-10  2.51377E-08  5.11859E-08  5.51545E-08  4.67852E-08  3.28031E-08
 18.300  3.91719E-10  7.99268E-10  8.63180E-10  7.28371E-10  4.95713E-10  1.94821E-08  3.97238E-08  4.29373E-08  3.65994E-08  2.58404E-08
 18.400  3.12093E-10  6.37455E-10  6.90080E-10  5.84675E-10  4.00771E-10  1.50313E-08  3.06888E-08  3.32713E-08  2.84940E-08  2.02538E-08
 18.500  2.47200E-10  5.05413E-10  5.48414E-10  4.66503E-10  3.22015E-10  1.15456E-08  2.36019E-08  2.56625E-08  2.20781E-08  1.57964E-08
 18.600  1.94676E-10  3.98407E-10  4.33287E-10  3.70017E-10  2.57170E-10  8.82875E-09  1.80700E-08  1.97030E-08  1.70261E-08  1.22594E-08
 18.700  1.52445E-10  3.12271E-10  3.40365E-10  2.91784E-10  2.04162E-10  6.72132E-09  1.37729E-08  1.50584E-08  1.30685E-08  9.46810E-09
 18.800  1.18710E-10  2.43389E-10  2.65863E-10  2.28780E-10  1.61134E-10  5.09435E-09  1.04509E-08  1.14565E-08  9.98415E-09  7.27702E-09
 18.900  9.19334E-11  1.88656E-10  2.06517E-10  1.78374E-10  1.26444E-10  3.84423E-09  7.89503E-09  8.67689E-09  7.59243E-09  5.56621E-09
 19.000  7.08117E-11  1.45438E-10  1.59541E-10  1.38305E-10  9.86623E-11  2.88819E-09  5.93790E-09  6.54217E-09  5.74711E-09  4.23738E-09
 19.100  5.42519E-11  1.11521E-10  1.22587E-10  1.06655E-10  7.65563E-11  2.16045E-09  4.44633E-09  4.91063E-09  4.33042E-09  3.21058E-09
 19.200  4.13461E-11  8.50627E-11  9.36929E-11  8.18062E-11  5.90778E-11  1.60906E-09  3.31487E-09  3.66962E-09  3.24815E-09  2.42122E-09
 19.300  3.13469E-11  6.45438E-11  7.12343E-11  6.24154E-11  4.53436E-11  1.19322E-09  2.46059E-09  2.73013E-09  2.42538E-09  1.81745E-09
 19.400  2.36441E-11  4.87228E-11  5.38793E-11  4.73725E-11  3.46168E-11  8.81035E-10  1.81855E-09  2.02225E-09  1.80290E-09  1.35796E-09
 19.500  1.77438E-11  3.65933E-11  4.05448E-11  3.57701E-11  2.62887E-11  6.47742E-10  1.33825E-09  1.49137E-09  1.33422E-09  1.00999E-09
 19.600  1.32493E-11  2.73457E-11  3.03567E-11  2.68721E-11  1.98606E-11  4.74192E-10  9.80573E-10  1.09508E-09  9.83005E-10  7.47775E-10
 19.700  9.84440E-12  2.03338E-11  2.26156E-11  2.00861E-11  1.49274E-11  3.45666E-10  7.15426E-10  8.00619E-10  7.21055E-10  5.51138E-10
 19.800  7.27873E-12  1.50459E-11  1.67656E-11  1.49392E-11  1.11627E-11  2.50911E-10  5.19756E-10  5.82819E-10  5.26596E-10  4.04389E-10
 19.900  5.35571E-12  1.10791E-11  1.23683E-11  1.10567E-11  8.30566E-12  1.81363E-10  3.76004E-10  4.22455E-10  3.82908E-10  2.95393E-10
  67 227 200   0.100
  0.000  4.61665E-02 -2.40495E-16 -3.74700E-16 -3.00222E-16 -9.36971E-16  1.01517E-01 -5.27539E-16 -7.49401E-16 -9.00667E-16 -3.10416E-15
  0.100  4.61803E-02 -2.64541E-05 -1.57420E-08 -4.33065E-12 -1.33036E-15  1.01516E-01 -9.83162E-06 -2.15673E-08  4.93531E-12  1.28172E-14
  0.200  4.62217E-02 -1.04714E-04 -2.50023E-07 -2.75203E-10 -2.15303E-13  1.01514E-01 -3.81946E-05 -3.41001E-07  3.12638E-10  3.94386E-14
  0.300  4.62899E-02 -2.31513E-04 -1.25027E-06 -3.09654E-09 -5.45923E-12  1.01510E-01 -8.17796E-05 -1.69230E-06  3.50704E-09 -1.27248E-12
  0.400  4.63842E-02 -4.01532E-04 -3.88389E-06 -1.71025E-08 -5.35766E-11  1.01503E-01 -1.35352E-04 -5.20039E-06  1.92907E-08 -1.09303E-11
  0.500  4.65033E-02 -6.07596E-04 -9.27367E-06 -6.38183E-08 -3.12267E-10  1.01495E-01 -1.92157E-04 -1.22415E-05  7.16197E-08 -5.45611E-11
  0.600  4.66455E-02 -8.40924E-04 -1.87128E-05 -1.85498E-07 -1.30653E-09  1.01485E-01 -2.44448E-04 -2.42628E-05  2.06952E-07 -1.81720E-10
  0.700  4.68089E-02 -1.09145E-03 -3.35649E-05 -4.53117E-07 -4.34237E-09  1.01471E-01 -2.84114E-04 -4.25770E-05  5.02239E-07 -4.20729E-10
  0.800  4.69911E-02 -1.34819E-03 -5.51541E-05 -9.73282E-07 -1.21789E-08  1.01455E-01 -3.03348E-04 -6.81480E-05  1.07135E-06 -5.82873E-10
  0.900  4.71897E-02 -1.59965E-03 -8.46536E-05 -1.89287E-06 -2.99720E-08  1.01435E-01 -2.95331E-04 -1.01389E-04  2.06892E-06  2.41625E-10
  1.000  4.74017E-02 -1.83424E-03 -1.22977E-04 -3.40039E-06 -6.64709E-08  1.01411E-01 -2.54869E-04 -1.41995E-04  3.69098E-06  4.71564E-09
  1.100  4.76240E-02 -2.04074E-03 -1.70681E-04 -5.72324E-06 -1.35404E-07  1.01384E-01 -1.78937E-04 -1.88822E-04  6.17238E-06  1.90682E-08
  1.200  4.78534E-02 -2.20872E-03 -2.27884E-04 -9.12067E-06 -2.56945E-07  1.01354E-01 -6.70875E-05 -2.39844E-04  9.78116E-06  5.59383E-08
  1.300  4.80865E-02 -2.32892E-03 -2.94207E-04 -1.38722E-05 -4.59110E-07  1.01321E-01  7.83183E-05 -2.92187E-04  1.48108E-05  1.38431E-07
  1.400  4.83197E-02 -2.39371E-03 -3.68734E-04 -2.02624E-05 -7.78928E-07  1.01287E-01  2.52082E-04 -3.42256E-04  2.15707E-05  3.05441E-07
  1.500  4.85497E-02 -2.39731E-03 -4.50013E-04 -2.85617E-05 -1.26322E-06  1.01253E-01  4.46360E-04 -3.85951E-04  3.03758E-05  6.18080E-07
  1.600  4.87730E-02 -2.33613E-03 -5.36068E-04 -3.90062E-05 -1.96880E-06  1.01221E-01  6.51073E-04 -4.18960E-04  4.15354E-05  1.16680E-06
  1.700  4.89863E-02 -2.20890E-03 -6.24454E-04 -5.17756E-05 -2.96210E-06  1.01194E-01  8.54522E-04 -4.37124E-04  5.53403E-05  2.07846E-06
  1.800  4.91868E-02 -2.01678E-03 -7.12333E-04 -6.69720E-05 -4.31798E-06  1.01174E-01  1.04417E-03 -4.36823E-04  7.20483E-05  3.52240E-06
  1.900  4.93717E-02 -1.76336E-03 -7.96569E-04 -8.46005E-05 -6.11790E-06  1.01164E-01  1.20752E-03 -4.15383E-04  9.18659E-05  5.71410E-06
  2.000  4.95388E-02 -1.45461E-03 -8.73852E-04 -1.04553E-04 -8.44742E-06  1.01166E-01  1.33311E-03 -3.71430E-04  1.14925E-04  8.91515E-06
  2.100  4.96864E-02 -1.09862E-03 -9.40829E-04 -1.26593E-04 -1.13931E-05  1.01183E-01  1.41142E-03 -3.05187E-04  1.41256E-04  1.34280E-05
  2.200  4.98133E-02 -7.05403E-04 -9.94252E-04 -1.50353E-04 -1.50390E-05  1.01217E-01  1.43571E-03 -2.18648E-04  1.70750E-04  1.95845E-05
  2.300  4.99189E-02 -2.86517E-04 -1.03112E-03 -1.75326E-04 -1.94629E-05  1.01267E-01  1.40271E-03 -1.15629E-04  2.03124E-04  2.77265E-05
  2.400  5.00033E-02  1.45344E-04 -1.04885E-03 -2.00871E-04 -2.47324E-05  1.01335E-01  1.31309E-03 -1.64452E-06  2.37876E-04  3.81799E-05
  2.500  5.00673E-02  5.76813E-04 -1.04536E-03 -2.26222E-04 -3.09012E-05  1.01418E-01  1.17157E-03  1.16366E-04  2.74253E-04  5.12212E-05
  2.600  5.01122E-02  9.94349E-04 -1.01927E-03 -2.50501E-04 -3.80049E-05  1.01515E-01  9.86879E-04  2.30467E-04  3.11219E-04  6.70387E-05
  2.700  5.01399E-02  1.38477E-03 -9.69956E-04 -2.72739E-04 -4.60576E-05  1.01620E-01  7.71231E-04  3.32289E-04  3.47445E-04  8.56911E-05
  2.800  5.01530E-02  1.73574E-03 -8.97658E-04 -2.91900E-04 -5.50485E-05  1.01729E-01  5.39649E-04  4.13667E-04  3.81324E-04  1.07067E-04
  2.900  5.01543E-02  2.03633E-03 -8.03530E-04 -3.06909E-04 -6.49384E-05  1.01837E-01  3.08989E-04  4.67324E-04  4.11011E-04  1.30847E-04
  3.000  5.01469E-02  2.27741E-03 -6.89667E-04 -3.16692E-04 -7.56564E-05  1.01937E-01  9.68114E-05  4.87515E-04  4.34501E-04  1.56481E-04
  3.100  5.01341E-02  2.45210E-03 -5.59094E-04 -3.20212E-04 -8.70975E-05  1.02022E-01 -7.98251E-05  4.70598E-04  4.49741E-04  1.83171E-04
  3.200  5.01192E-02  2.55610E-03 -4.15720E-04 -3.16510E-04 -9.91193E-05  1.02087E-01 -2.05558E-04  4.15443E-04  4.54775E-04  2.09880E-04
  3.300  5.01049E-02  2.58793E-03 -2.64248E-04 -3.04755E-04 -1.11540E-04  1.02124E-01 -2.67799E-04  3.23662E-04  4.47910E-04  2.35359E-04
  3.400  5.00938E-02  2.54910E-03 -1.10054E-04 -2.84286E-04 -1.24137E-04  1.02129E-01 -2.57599E-04  1.99599E-04  4.27896E-04  2.58193E-04
  3.500  5.00875E-02  2.44413E-03  4.09769E-05 -2.54666E-04 -1.36646E-04  1.02097E-01 -1.70245E-04  5.00915E-05  3.94097E-04  2.76879E-04
  3.600  5.00868E-02  2.28052E-03  1.82647E-04 -2.15723E-04 -1.48762E-04  1.02023E-01 -5.50645E-06 -1.16003E-04  3.46647E-04  2.89911E-04
  3.700  5.00913E-02  2.06859E-03  3.08667E-04 -1.67595E-04 -1.60140E-04  1.01904E-01  2.32471E-04 -2.88471E-04  2.86553E-04  2.95889E-04
  3.800  5.00996E-02  1.82114E-03  4.12909E-04 -1.10764E-04 -1.70406E-04  1.01738E-01  5.35628E-04 -4.56556E-04  2.15743E-04  2.93632E-04
  3.900  5.01085E-02  1.55311E-03  4.89659E-04 -4.60840E-05 -1.79156E-04  1.01524E-01  8.92777E-04 -6.09847E-04  1.37042E-04  2.82291E-04
  4.000  5.01137E-02  1.28110E-03  5.33884E-04  2.52086E-05 -1.85974E-04  1.01258E-01  1.29064E-03 -7.39161E-04  5.40648E-05  2.61443E-04
  4.100  5.01093E-02  1.02277E-03  5.41486E-04  1.01493E-04 -1.90446E-04  1.00939E-01  1.71506E-03 -8.37350E-04 -2.89771E-05  2.31180E-04
  4.200  5.00881E-02  7.96245E-04  5.09536E-04  1.80788E-04 -1.92171E-04  1.00564E-01  2.15230E-03 -8.99947E-04 -1.07533E-04  1.92149E-04
  4.300  5.00417E-02  6.19435E-04  4.36471E-04  2.60788E-04 -1.90790E-04  1.00131E-01  2.59026E-03 -9.25597E-04 -1.77037E-04  1.45572E-04
  4.400  4.99603E-02  5.09334E-04  3.22251E-04  3.38925E-04 -1.86003E-04  9.96348E-02  3.01958E-03 -9.16222E-04 -2.33257E-04  9.32108E-05
  4.500  4.98336E-02  4.81340E-04  1.68452E-04  4.12451E-04 -1.77593E-04  9.90705E-02  3.43453E-03 -8.76914E-04 -2.72652E-04  3.72993E-05
  4.600  4.96506E-02  5.48602E-04 -2.17036E-05  4.78534E-04 -1.65449E-04  9.84317E-02  3.83357E-03 -8.15538E-04 -2.92705E-04 -1.95695E-05
  4.700  4.94002E-02  7.21421E-04 -2.43392E-04  5.34373E-04 -1.49587E-04  9.77111E-02  4.21951E-03 -7.42106E-04 -2.92188E-04 -7.45881E-05
  4.800  4.90713E-02  1.00675E-03 -4.90307E-04  5.77324E-04 -1.30163E-04  9.69004E-02  4.59936E-03 -6.67951E-04 -2.71346E-04 -1.24903E-04
  4.900  4.86535E-02  1.40780E-03 -7.54859E-04  6.05024E-04 -1.07488E-04  9.59908E-02  4.98381E-03 -6.04778E-04 -2.31974E-04 -1.67796E-04
  5.000  4.81372E-02  1.92377E-03 -1.02844E-03  6.15523E-04 -8.20250E-05  9.49732E-02  5.38631E-03 -5.63683E-04 -1.77367E-04 -2.00859E-04
  5.100  4.75141E-02  2.54974E-03 -1.30174E-03  6.07394E-04 -5.43889E-05  9.38386E-02  5.82202E-03 -5.54210E-04 -1.12156E-04 -2.22159E-04
  5.200  4.67775E-02  3.27675E-03 -1.56516E-03  5.79830E-04 -2.53265E-05  9.25786E-02  6.30646E-03 -5.83532E-04 -4.20206E-05 -2.30369E-04
  5.300  4.59227E-02  4.09194E-03 -1.80915E-03  5.32719E-04  4.30590E-06  9.11855E-02  6.85416E-03 -6.55830E-04  2.66776E-05 -2.24861E-04
  5.400  4.49468E-02  4.97899E-03 -2.02468E-03  4.66683E-04  3.35756E-05  8.96532E-02  7.47732E-03 -7.71909E-04  8.73384E-05 -2.05746E-04
  5.500  4.38493E-02  5.91862E-03 -2.20361E-03  3.83079E-04  6.15141E-05  8.79767E-02  8.18462E-03 -9.29082E-04  1.33588E-04 -1.73873E-04
  5.600  4.26320E-02  6.88920E-03 -2.33906E-03  2.83972E-04  8.71622E-05  8.61533E-02  8.98022E-03 -1.12134E-03  1.59739E-04 -1.30769E-04
  5.700  4.12989E-02  7.86754E-03 -2.42573E-03  1.72061E-04  1.09617E-04  8.41818E-02  9.86302E-03 -1.33976E-03  1.61204E-04 -7.85351E-05
  5.800  3.98564E-02  8.82968E-03 -2.46014E-03  5.05733E-05  1.28080E-04  8.20636E-02  1.08264E-02 -1.57317E-03  1.34827E-04 -1.97060E-05
  5.900  3.83127E-02  9.75177E-03 -2.44077E-03 -7.68669E-05  1.41897E-04  7.98017E-02  1.18580E-02 -1.80888E-03  7.91215E-05  4.29141E-05
  6.000  3.66783E-02  1.06109E-02 -2.36813E-03 -2.06399E-04  1.50597E-04  7.74015E-02  1.29404E-02 -2.03366E-03 -5.62913E-06  1.06431E-04
  6.100  3.49650E-02  1.13858E-02 -2.24471E-03 -3.34095E-04  1.53919E-04  7.48704E-02  1.40514E-02 -2.23458E-03 -1.17384E-04  1.68036E-04
  6.200  3.31861E-02  1.20579E-02 -2.07486E-03 -4.56134E-04  1.51822E-04  7.22176E-02  1.51656E-02 -2.39990E-03 -2.52490E-04  2.25169E-04
  6.300  3.13559E-02  1.26115E-02 -1.86454E-03 -5.68967E-04  1.44495E-04  6.94542E-02  1.62547E-02 -2.51979E-03 -4.05929E-04  2.75653E-04
  6.400  2.94896E-02  1.30346E-02 -1.62105E-03 -6.69474E-04  1.32339E-04  6.65928E-02  1.72897E-02 -2.58695E-03 -5.71657E-04  3.17798E-04
  6.500  2.76026E-02  1.33191E-02 -1.35266E-03 -7.55082E-04  1.15951E-04  6.36476E-02  1.82418E-02 -2.59699E-03 -7.42995E-04  3.50460E-04
  6.600  2.57104E-02  1.34609E-02 -1.06821E-03 -8.23866E-04  9.60859E-05  6.06339E-02  1.90838E-02 -2.54854E-03 -9.13048E-04  3.73066E-04
  6.700  2.38283E-02  1.34600E-02 -7.76734E-04 -8.74602E-04  7.36170E-05  5.75681E-02  1.97916E-02 -2.44330E-03 -1.07512E-03  3.85594E-04
  6.800  2.19709E-02  1.33205E-02 -4.87032E-04 -9.06791E-04  4.94887E-05  5.44674E-02  2.03448E-02 -2.28572E-03 -1.22308E-03  3.88518E-04
  6.900  2.01520E-02  1.30499E-02 -2.07337E-04 -9.20636E-04  2.46671E-05  5.13497E-02  2.07279E-02 -2.08264E-03 -1.35169E-03  3.82733E-04
  7.000  1.83845E-02  1.26589E-02  5.50184E-05 -9.16994E-04  9.12722E-08  4.82331E-02  2.09310E-02 -1.84274E-03 -1.45683E-03  3.69449E-04
  7.100  1.66798E-02  1.21608E-02  2.93843E-04 -8.97288E-04 -2.33706E-05  4.51358E-02  2.09493E-02 -1.57592E-03 -1.53567E-03  3.50091E-04
  7.200  1.50481E-02  1.15710E-02  5.04273E-04 -8.63408E-04 -4.49595E-05  4.20760E-02  2.07842E-02 -1.29272E-03 -1.58669E-03  3.26181E-04
  7.300  1.34978E-02  1.09063E-02  6.82864E-04 -8.17581E-04 -6.40543E-05  3.90710E-02  2.04422E-02 -1.00362E-03 -1.60967E-03  2.99244E-04
  7.400  1.20359E-02  1.01840E-02  8.27622E-04 -7.62252E-04 -8.01915E-05  3.61378E-02  1.99346E-02 -7.18547E-04 -1.60560E-03  2.70715E-04
  7.500  1.06676E-02  9.42192E-03  9.37950E-04 -6.99949E-04 -9.30741E-05  3.32918E-02  1.92770E-02 -4.46389E-04 -1.57647E-03  2.41875E-04
  7.600  9.39662E-03  8.63695E-03  1.01453E-03 -6.33170E-04 -1.02570E-04  3.05476E-02  1.84882E-02 -1.94621E-04 -1.52511E-03  2.13797E-04
  7.700  8.22487E-03  7.84518E-03  1.05918E-03 -5.64274E-04 -1.08704E-04  2.79178E-02  1.75895E-02  3.09184E-05 -1.45493E-03  1.87324E-04
  7.800  7.15285E-03  7.06127E-03  1.07462E-03 -4.95398E-04 -1.11636E-04  2.54133E-02  1.66036E-02  2.26134E-04 -1.36965E-03  1.63056E-04
  7.900  6.17962E-03  6.29810E-03  1.06428E-03 -4.28389E-04 -1.11641E-04  2.30430E-02  1.55537E-02  3.88676E-04 -1.27316E-03  1.41368E-04
  8.000  5.30293E-03  5.56659E-03  1.03204E-03 -3.64768E-04 -1.09081E-04  2.08138E-02  1.44627E-02  5.17828E-04 -1.16924E-03  1.22427E-04
  8.100  4.51945E-03  4.87554E-03  9.82046E-04 -3.05703E-04 -1.04376E-04  1.87303E-02  1.33524E-02  6.14327E-04 -1.06140E-03  1.06225E-04
  8.200  3.82484E-03  4.23167E-03  9.18450E-04 -2.52017E-04 -9.79750E-05  1.67952E-02  1.22429E-02  6.80115E-04 -9.52805E-04  9.26214E-05
  8.300  3.21400E-03  3.63959E-03  8.45272E-04 -2.04203E-04 -9.03332E-05  1.50089E-02  1.11520E-02  7.18068E-04 -8.46142E-04  8.13800E-05
  8.400  2.68124E-03  3.10201E-03  7.66234E-04 -1.62459E-04 -8.18854E-05  1.33701E-02  1.00950E-02  7.31709E-04 -7.43588E-04  7.22057E-05
  8.500  2.22044E-03  2.61989E-03  6.84649E-04 -1.26729E-04 -7.30305E-05  1.18753E-02  9.08459E-03  7.24930E-04 -6.46803E-04  6.47789E-05
  8.600  1.82524E-03  2.19266E-03  6.03352E-04 -9.67484E-05 -6.41172E-05  1.05200E-02  8.13043E-03  7.01744E-04 -5.56955E-04  5.87825E-05
  8.700  1.48920E-03  1.81849E-03  5.24658E-04 -7.21013E-05 -5.54360E-05  9.29787E-03  7.23967E-03  6.66071E-04 -4.74758E-04  5.39227E-05
  8.800  1.20592E-03  1.49455E-03  4.50356E-04 -5.22633E-05 -4.72153E-05  8.20181E-03  6.41685E-03  6.21566E-04 -4.00538E-04  4.99424E-05
  8.900  9.69221E-04  1.21728E-03  3.81730E-04 -3.66496E-05 -3.96218E-05  7.22379E-03  5.66425E-03  5.71501E-04 -3.34298E-04  4.66289E-05
  9.000  7.73176E-04  9.82597E-04  3.19599E-04 -2.46532E-05 -3.27643E-05  6.35527E-03  4.98215E-03  5.18682E-04 -2.75793E-04  4.38154E-05
  9.100  6.12248E-04  7.86158E-04  2.64378E-04 -1.56780E-05 -2.66999E-05  5.58735E-03  4.36917E-03  4.65416E-04 -2.24595E-04  4.13797E-05
  9.200  4.81322E-04  6.23524E-04  2.16138E-04 -9.16242E-06 -2.14419E-05  4.91110E-03  3.82258E-03  4.13512E-04 -1.80159E-04  3.92378E-05
  9.300  3.75753E-04  4.90332E-04  1.74681E-04 -4.59771E-06 -1.69685E-05  4.31766E-03  3.33868E-03  3.64303E-04 -1.41874E-04  3.73378E-05
  9.400  2.91385E-04  3.82414E-04  1.39604E-04 -1.53780E-06 -1.32313E-05  3.79844E-03  2.91305E-03  3.18696E-04 -1.09104E-04  3.56515E-05
  9.500  2.24551E-04  2.95891E-04  1.10365E-04  3.95961E-07 -1.01642E-05  3.34528E-03  2.54084E-03  2.77233E-04 -8.12271E-05  3.41667E-05
  9.600  1.72062E-04  2.27238E-04  8.63412E-05  1.51511E-06 -7.69054E-06  2.95049E-03  2.21701E-03  2.40154E-04 -5.76525E-05  3.28805E-05
  9.700  1.31182E-04  1.73311E-04  6.68740E-05  2.06802E-06 -5.72931E-06  2.60697E-03  1.93650E-03  2.07465E-04 -3.78379E-05  3.17929E-05
  9.800  9.95967E-05  1.31364E-04  5.13078E-05  2.24624E-06 -4.20041E-06  2.30823E-03  1.69440E-03  1.78996E-04 -2.12963E-05  3.09029E-05
  9.900  7.53764E-05  9.90417E-05  3.90191E-05  2.19237E-06 -3.02821E-06  2.04841E-03  1.48606E-03  1.54463E-04 -7.59816E-06  3.02046E-05
 10.000  5.69308E-05  7.43567E-05  2.94352E-05  2.00839E-06 -2.14409E-06  1.82225E-03  1.30714E-03  1.33508E-04  3.63085E-06  2.96859E-05
 10.100  4.29683E-05  5.56601E-05  2.20464E-05  1.76385E-06 -1.48790E-06  1.62513E-03  1.15367E-03  1.15741E-04  1.27143E-05  2.93278E-05
 10.200  3.24528E-05  4.16057E-05  1.64111E-05  1.50349E-06 -1.00847E-06  1.45297E-03  1.02211E-03  1.00767E-04  1.99311E-05  2.91043E-05
 10.300  2.45643E-05  3.11103E-05  1.21558E-05  1.25380E-06 -6.63485E-07  1.30222E-03  9.09263E-04  8.82042E-05  2.55219E-05  2.89839E-05
 10.400  1.86615E-05  2.33154E-05  8.97155E-06  1.02853E-06 -4.18911E-07  1.16983E-03  8.12356E-04  7.77004E-05  2.96960E-05  2.89308E-05
 10.500  1.42488E-05  1.75498E-05  6.60796E-06  8.33037E-07 -2.48052E-07  1.05316E-03  7.28957E-04  6.89390E-05  3.26365E-05  2.89067E-05
 10.600  1.09476E-05  1.32956E-05  4.86594E-06  6.67603E-07 -1.30494E-07  9.49969E-04  6.56971E-04  6.16421E-05  3.45063E-05  2.88729E-05
 10.700  8.47177E-06  1.01583E-05  3.58980E-06  5.29758E-07 -5.09962E-08  8.58350E-04  5.94602E-04  5.55704E-05  3.54517E-05  2.87922E-05
 10.800  6.60685E-06  7.84053E-06  2.65966E-06  4.15868E-07  1.55802E-09  7.76691E-04  5.40321E-04  5.05213E-05  3.56059E-05  2.86303E-05
 10.900  5.19359E-06  6.12063E-06  1.98446E-06  3.22106E-07  3.51121E-08  7.03630E-04  4.92834E-04  4.63253E-05  3.50916E-05  2.83578E-05
 11.000  4.11444E-06  4.83495E-06  1.49577E-06  2.44982E-07  5.52459E-08  6.38026E-04  4.51056E-04  4.28420E-05  3.40228E-05  2.79509E-05
 11.100  3.28306E-06  3.86366E-06  1.14262E-06  1.81562E-07  6.58392E-08  5.78917E-04  4.14075E-04  3.99559E-05  3.25057E-05  2.73927E-05
 11.200  2.63623E-06  3.11970E-06  8.87340E-07  1.29508E-07  6.95908E-08  5.25500E-04  3.81136E-04  3.75725E-05  3.06394E-05  2.66732E-05
 11.300  2.12772E-06  2.54030E-06  7.02191E-07  8.70030E-08  6.84086E-08  4.77097E-04  3.51611E-04  3.56145E-05  2.85161E-05  2.57899E-05
 11.400  1.72376E-06  2.08053E-06  5.66856E-07  5.26466E-08  6.36875E-08  4.33142E-04  3.24985E-04  3.40185E-05  2.62210E-05  2.47471E-05
 11.500  1.39959E-06  1.70851E-06  4.66523E-07  2.53348E-08  5.64983E-08  3.93156E-04  3.00833E-04  3.27324E-05  2.38322E-05  2.35558E-05
 11.600  1.13709E-06  1.40182E-06  3.90475E-07  4.16249E-09  4.77069E-08  3.56733E-04  2.78809E-04  3.17126E-05  2.14199E-05  2.22325E-05
 11.700  9.22894E-07  1.14490E-06  3.31059E-07 -1.16510E-08  3.80429E-08  3.23530E-04  2.58631E-04  3.09218E-05  1.90464E-05  2.07985E-05
 11.800  7.47144E-07  9.27042E-07  2.82916E-07 -2.28110E-08  2.81340E-08  2.93247E-04  2.40070E-04  3.03280E-05  1.67653E-05  1.92786E-05
 11.900  6.02507E-07  7.40991E-07  2.42407E-07 -2.99758E-08  1.85183E-08  2.65629E-04  2.22938E-04  2.99024E-05  1.46218E-05  1.77000E-05
 12.000  4.83474E-07  5.81845E-07  2.07171E-07 -3.37693E-08  9.64445E-09  2.40447E-04  2.07083E-04  2.96186E-05  1.26519E-05  1.60911E-05
 12.100  3.85838E-07  4.46253E-07  1.75780E-07 -3.47847E-08  1.86710E-09  2.17501E-04  1.92377E-04  2.94520E-05  1.08829E-05  1.44802E-05
 12.200  3.06309E-07  3.31825E-07  1.47456E-07 -3.35822E-08 -4.55773E-09  1.96610E-04  1.78717E-04  2.93790E-05  9.33349E-06  1.28946E-05
 12.300  2.42228E-07  2.36699E-07  1.21847E-07 -3.06860E-08 -9.47480E-09  1.77610E-04  1.66014E-04  2.93767E-05  8.01412E-06  1.13596E-05
 12.400  1.91362E-07  1.59252E-07  9.88483E-08 -2.65798E-08 -1.28273E-08  1.60348E-04  1.54191E-04  2.94231E-05  6.92769E-06  9.89785E-06
 12.500  1.51767E-07  9.79032E-08  7.84684E-08 -2.17034E-08 -1.46497E-08  1.44684E-04  1.43183E-04  2.94970E-05  6.07021E-06  8.52857E-06
 12.600  1.21695E-07  5.10146E-08  6.07308E-08 -1.64502E-08 -1.50568E-08  1.30489E-04  1.32930E-04  2.95781E-05  5.43177E-06  7.26737E-06
 12.700  9.95413E-08  1.68517E-08  4.56132E-08 -1.11646E-08 -1.42280E-08  1.17640E-04  1.23379E-04  2.96473E-05  4.99746E-06  6.12597E-06
 12.800  8.38245E-08 -6.40460E-09  3.30154E-08 -6.13946E-09 -1.23909E-08  1.06023E-04  1.14480E-04  2.96870E-05  4.74838E-06  5.11219E-06
 12.900  7.31807E-08 -2.06144E-08  2.27532E-08 -1.61421E-09 -9.80146E-09  9.55300E-05  1.06188E-04  2.96815E-05  4.66273E-06  4.23003E-06
 13.000  6.63734E-08 -2.76169E-08  1.45695E-08  2.22709E-09 -6.72668E-09  8.60617E-05  9.84596E-05  2.96170E-05  4.71672E-06  3.47993E-06
 13.100  6.23069E-08 -2.91642E-08  8.15741E-09  5.25683E-09 -3.42662E-09  7.75243E-05  9.12563E-05  2.94821E-05  4.88556E-06  2.85913E-06
 13.200  6.00397E-08 -2.68591E-08  3.18844E-09  7.40377E-09 -1.39734E-10  6.98309E-05  8.45403E-05  2.92679E-05  5.14428E-06  2.36202E-06
 13.300  5.87941E-08 -2.21055E-08 -6.58750E-10  8.65130E-09  2.92911E-09  6.29007E-05  7.82771E-05  2.89677E-05  5.46850E-06  1.98065E-06
 13.400  5.79588E-08 -1.60740E-08 -3.67380E-09  9.03378E-09  5.61708E-09  5.66595E-05  7.24342E-05  2.85774E-05  5.83502E-06  1.70514E-06
 13.500  5.70846E-08 -9.68680E-09 -6.09638E-09  8.63076E-09  7.80812E-09  5.10390E-05  6.69816E-05  2.80954E-05  6.22234E-06  1.52423E-06
 13.600  5.58728E-08 -3.61823E-09 -8.10573E-09  7.55924E-09  9.43412E-09  4.59768E-05  6.18914E-05  2.75222E-05  6.61105E-06  1.42569E-06
 13.700  5.41578E-08  1.68851E-09 -9.81794E-09  5.96435E-09  1.04728E-08  4.14161E-05  5.71381E-05  2.68602E-05  6.98410E-06  1.39680E-06
 13.800  5.18851E-08  5.99345E-09 -1.12902E-08  4.00891E-09  1.09430E-08  3.73053E-05  5.26981E-05  2.61139E-05  7.32694E-06  1.42472E-06
 13.900  4.90868E-08  9.22410E-09 -1.25304E-08  1.86266E-09  1.08977E-08  3.35979E-05  4.85498E-05  2.52891E-05  7.62765E-06  1.49685E-06
 14.000  4.58568E-08  1.14358E-08 -1.35099E-08 -3.08322E-10  1.04156E-08  3.02522E-05  4.46735E-05  2.43930E-05  7.87686E-06  1.60116E-06
 14.100  4.23271E-08  1.27719E-08 -1.41785E-08 -2.35106E-09  9.59285E-09  2.72306E-05  4.10514E-05  2.34338E-05  8.06773E-06  1.72645E-06
 14.200  3.86466E-08  1.34266E-08 -1.44787E-08 -4.13369E-09  8.53369E-09  2.44996E-05  3.76670E-05  2.24204E-05  8.19581E-06  1.86252E-06
 14.300  3.49633E-08  1.36128E-08 -1.43581E-08 -5.55137E-09  7.34280E-09  2.20295E-05  3.45057E-05  2.13625E-05  8.25884E-06  2.00035E-06
 14.400  3.14112E-08  1.35366E-08 -1.37800E-08 -6.53006E-09  6.11827E-09  1.97936E-05  3.15540E-05  2.02697E-05  8.25656E-06  2.13221E-06
 14.500  2.81009E-08  1.33780E-08 -1.27298E-08 -7.02791E-09  4.94608E-09  1.77686E-05  2.87997E-05  1.91521E-05  8.19051E-06  2.25169E-06
 14.600  2.51140E-08  1.32793E-08 -1.12184E-08 -7.03457E-09  3.89632E-09  1.59336E-05  2.62318E-05  1.80193E-05  8.06372E-06  2.35372E-06
 14.700  2.25016E-08  1.33393E-08 -9.28309E-09 -6.56859E-09  3.02096E-09  1.42701E-05  2.38401E-05  1.68811E-05  7.88049E-06  2.43454E-06
 14.800  2.02855E-08  1.36131E-08 -6.98432E-09 -5.67329E-09  2.35314E-09  1.27618E-05  2.16154E-05  1.57465E-05  7.64615E-06  2.49165E-06
 14.900  1.84612E-08  1.41154E-08 -4.40181E-09 -4.41166E-09  1.90790E-09  1.13944E-05  1.95492E-05  1.46242E-05  7.36678E-06  2.52370E-06
 15.000  1.70031E-08  1.48272E-08 -1.62851E-09 -2.86056E-09  1.68391E-09  1.01550E-05  1.76335E-05  1.35223E-05  7.04899E-06  2.53037E-06
 15.100  1.58693E-08  1.57040E-08  1.23573E-09 -1.10492E-09  1.66599E-09  9.03227E-06  1.58611E-05  1.24480E-05  6.69965E-06  2.51224E-06
 15.200  1.50078E-08  1.66846E-08  4.09056E-09  7.67932E-10  1.82825E-09  8.01609E-06  1.42249E-05  1.14079E-05  6.32577E-06  2.47066E-06
 15.300  1.43615E-08  1.76991E-08  6.84094E-09  2.67321E-09  2.13721E-09  7.09739E-06  1.27182E-05  1.04076E-05  5.93420E-06  2.40759E-06
 15.400  1.38729E-08  1.86769E-08  9.40199E-09  4.53293E-09  2.55512E-09  6.26798E-06  1.13346E-05  9.45192E-06  5.53157E-06  2.32545E-06
 15.500  1.34876E-08  1.95523E-08  1.17027E-08  6.27907E-09  3.04283E-09  5.52049E-06  1.00679E-05  8.54473E-06  5.12410E-06  2.22697E-06
 15.600  1.31577E-08  2.02697E-08  1.36882E-08  7.85584E-09  3.56239E-09  4.84818E-06  8.91190E-06  7.68902E-06  4.71747E-06  2.11509E-06
 15.700  1.28427E-08  2.07859E-08  1.53211E-08  9.22083E-09  4.07904E-09  4.24486E-06  7.86049E-06  6.88694E-06  4.31681E-06  1.99277E-06
 15.800  1.25115E-08  2.10720E-08  1.65811E-08  1.03453E-08  4.56279E-09  3.70484E-06  6.90770E-06  6.13977E-06  3.92657E-06  1.86298E-06
 15.900  1.21415E-08  2.11134E-08  1.74642E-08  1.12139E-08  4.98935E-09  3.22285E-06  6.04754E-06  5.44800E-06  3.55054E-06  1.72853E-06
 16.000  1.17190E-08  2.09088E-08  1.79807E-08  1.18230E-08  5.34056E-09  2.79396E-06  5.27408E-06  4.81142E-06  3.19180E-06  1.59201E-06
 16.100  1.12376E-08  2.04689E-08  1.81531E-08  1.21798E-08  5.60448E-09  2.41357E-06  4.58144E-06  4.22914E-06  2.85278E-06  1.45580E-06
 16.200  1.06976E-08  1.98138E-08  1.80134E-08  1.22999E-08  5.77498E-09  2.07736E-06  3.96380E-06  3.69970E-06  2.53523E-06  1.32196E-06
 16.300  1.01044E-08  1.89710E-08  1.76001E-08  1.22057E-08  5.85116E-09  1.78130E-06  3.41543E-06  3.22116E-06  2.24032E-06  1.19224E-06
 16.400  9.46672E-09  1.79726E-08  1.69561E-08  1.19242E-08  5.83657E-09  1.52159E-06  2.93075E-06  2.79116E-06  1.96867E-06  1.06808E-06
 16.500  8.79613E-09  1.68533E-08  1.61260E-08  1.14852E-08  5.73825E-09  1.29466E-06  2.50430E-06  2.40703E-06  1.72039E-06  9.50597E-07
 16.600  8.10517E-09  1.56484E-08  1.51538E-08  1.09194E-08  5.56587E-09  1.09719E-06  2.13083E-06  2.06586E-06  1.49519E-06  8.40619E-07
 16.700  7.40669E-09  1.43917E-08  1.40818E-08  1.02572E-08  5.33079E-09  9.26093E-07  1.80530E-06  1.76458E-06  1.29243E-06  7.38693E-07
 16.800  6.71293E-09  1.31147E-08  1.29487E-08  9.52766E-09  5.04525E-09  7.78474E-07  1.52289E-06  1.50006E-06  1.11115E-06  6.45118E-07
 16.900  6.03503E-09  1.18453E-08  1.17889E-08  8.75719E-09  4.72168E-09  6.51675E-07  1.27908E-06  1.26911E-06  9.50217E-07  5.59978E-07
 17.000  5.38256E-09  1.06072E-08  1.06321E-08  7.96931E-09  4.37209E-09  5.43248E-07  1.06961E-06  1.06861E-06  8.08300E-07  4.83172E-07
 17.100  4.76330E-09  9.41987E-09  9.50282E-09  7.18414E-09  4.00764E-09  4.50952E-07  8.90515E-07  8.95510E-07  6.83981E-07  4.14452E-07
 17.200  4.18322E-09  8.29840E-09  8.42062E-09  6.41829E-09  3.63831E-09  3.72746E-07  7.38139E-07  7.46894E-07  5.75778E-07  3.53447E-07
 17.300  3.64645E-09  7.25363E-09  7.40020E-09  5.68494E-09  3.27266E-09  3.06787E-07  6.09131E-07  6.19997E-07  4.82199E-07  2.99703E-07
 17.400  3.15545E-09  6.29258E-09  6.45186E-09  4.99395E-09  2.91783E-09  2.51416E-07  5.00445E-07  5.12234E-07  4.01768E-07  2.52701E-07
 17.500  2.71116E-09  5.41884E-09  5.58201E-09  4.35220E-09  2.57942E-09  2.05151E-07  4.09328E-07  4.21214E-07  3.33058E-07  2.11888E-07
 17.600  2.31324E-09  4.63315E-09  4.79368E-09  3.76395E-09  2.26164E-09  1.66676E-07  3.33316E-07  3.44745E-07  2.74713E-07  1.76693E-07
 17.700  1.96033E-09  3.93389E-09  4.08715E-09  3.23114E-09  1.96736E-09  1.34831E-07  2.70215E-07  2.80843E-07  2.25460E-07  1.46547E-07
 17.800  1.65024E-09  3.31756E-09  3.46050E-09  2.75388E-09  1.69830E-09  1.08598E-07  2.18089E-07  2.27723E-07  1.84123E-07  1.20895E-07
 17.900  1.38017E-09  2.77932E-09  2.91008E-09  2.33080E-09  1.45519E-09  8.70892E-08  1.75238E-07  1.83796E-07  1.49628E-07  9.92060E-08
 18.000  1.14696E-09  2.31339E-09  2.43107E-09  1.95936E-09  1.23792E-09  6.95377E-08  1.40185E-07  1.47660E-07  1.21003E-07  8.09833E-08
 18.100  9.47227E-10  1.91343E-09  2.01784E-09  1.63627E-09  1.04572E-09  5.52828E-08  1.11648E-07  1.18084E-07  9.73825E-08  6.57665E-08
 18.200  7.77501E-10  1.57286E-09  1.66434E-09  1.35766E-09  8.77350E-10  4.37598E-08  8.85287E-08  9.40014E-08  7.79970E-08  5.31361E-08
 18.300  6.34369E-10  1.28510E-09  1.36433E-09  1.11942E-09  7.31199E-10  3.44889E-08  6.98885E-08  7.44904E-08  6.21733E-08  4.27144E-08
 18.400  5.14548E-10  1.04377E-09  1.11169E-09  9.17318E-10  6.05443E-10  2.70648E-08  5.49315E-08  5.87623E-08  4.93258E-08  3.41649E-08
 18.500  4.14955E-10  8.42840E-10  9.00494E-10  7.47183E-10  4.98137E-10  2.11474E-08  4.29869E-08  4.61466E-08  3.89496E-08  2.71912E-08
 18.600  3.32744E-10  6.76711E-10  7.25212E-10  6.05018E-10  4.07308E-10  1.64528E-08  3.34933E-08  3.60772E-08  3.06130E-08  2.15348E-08
 18.700  2.65337E-10  5.40287E-10  5.80740E-10  4.87070E-10  3.31016E-10  1.27455E-08  2.59831E-08  2.80794E-08  2.39495E-08  1.69722E-08
 18.800  2.10427E-10  4.28992E-10  4.62461E-10  3.89891E-10  2.67412E-10  9.83141E-09  2.00699E-08  2.17578E-08  1.86505E-08  1.33119E-08
 18.900  1.65982E-10  3.38780E-10  3.66258E-10  3.10361E-10  2.14766E-10  7.55130E-09  1.54356E-08  1.67852E-08  1.44577E-08  1.03911E-08
 19.000  1.30230E-10  2.66114E-10  2.88507E-10  2.45699E-10  1.71495E-10  5.77537E-09  1.18206E-08  1.28922E-08  1.11567E-08  8.07278E-09
 19.100  1.01646E-10  2.07938E-10  2.26058E-10  1.93459E-10  1.36169E-10  4.39843E-09  9.01350E-09  9.85894E-09  8.57070E-09  6.24228E-09
 19.200  7.89273E-11  1.61640E-10  1.76202E-10  1.51518E-10  1.07520E-10  3.33566E-09  6.84381E-09  7.50663E-09  6.55468E-09  4.80439E-09
 19.300  6.09754E-11  1.25011E-10  1.36636E-10  1.18048E-10  8.44347E-11  2.51906E-09  5.17440E-09  5.69091E-09  4.99062E-09  3.68064E-09
 19.400  4.68708E-11  9.61962E-11  1.05417E-10  9.14964E-11  6.59494E-11  1.89442E-09  3.89571E-09  4.29585E-09  3.78301E-09  2.80683E-09
 19.500  3.58509E-11  7.36562E-11  8.09245E-11  7.05561E-11  5.12381E-11  1.41873E-09  2.92069E-09  3.22893E-09  2.85505E-09  2.13075E-09
 19.600  2.72880E-11  5.61216E-11  6.18158E-11  5.41350E-11  3.96005E-11  1.05808E-09  2.18055E-09  2.41667E-09  2.14533E-09  1.61022E-09
 19.700  2.06703E-11  4.25544E-11  4.69889E-11  4.13296E-11  3.04484E-11  7.85844E-10  1.62119E-09  1.80109E-09  1.60505E-09  1.21140E-09
 19.800  1.55829E-11  3.21129E-11  3.55462E-11  3.13987E-11  2.32923E-11  5.81251E-10  1.20033E-09  1.33667E-09  1.19567E-09  9.07316E-10
 19.900  1.16923E-11  2.41189E-11  2.67620E-11  2.37385E-11  1.77286E-11  4.28161E-10  8.85052E-10  9.87851E-10  8.86894E-10  6.76564E-10
